05 GAS Digital Mass Flow Controllers Gas supply systems require devices that are ultraclean, compact, and support greater circuit integration, and lately there is increasing demand for devices that offer highly intelligent functioning in more intelligent gas supply systems as well. Mass flow controllers are commonly considered the core of gas supply systems, and the advance of digital mass flow controllers with CPUs is the focus of a great deal of attention. HORIBA STEC succeeded in developing the world’s first mass-produced digital mass flow controller in 1990. Since then, digital mass flow controllers have come to be regarded as high-end products. HORIBA STEC has consistently pursued the advance of digital mass flow controllers through the development of new functions and the improvement of existing functions, including the creation of higher performance CPUs, the addition of DeviceNet™ communications compatibility, and the expansion of software capabilities to push mass flow controller performance to its limit. Digital Mass Flow Controllers 06 SEC-Z500 series Multi Range Multi Gas digital mass flow controllers Cutting edge models with DeviceNet™ or Digital communications sAdvanced High reliability 32bit CPU installed. s10SCCM-10SLM FS (standard gas) is covered by 6MFCs. sGas and FS flow specification are available to change easily by user. (MRMG function) sHigh precision. (Set point accuracy) sFast Response across the whole flow range. (Variable PID function) sAnalog/Digital (RS485) control mode or DeviceNet Interface available. (Passed the ODVA (DeviceNet Association) SEMI SIG conformance test.) sCompact SEC-Z512: Compatible with 1.125 inch pitch gas panel. SEC-Z512/522: 106mm between VCR surface (Compatible with 1.5 inch gas panel.) SEC-Z10D/Z10DW series DeviceNet™ compatible digital mass flow controllers Cutting edge models with DeviceNet™ communications sCompatible with the DeviceNet™ interface: Passed the ODVA (DeviceNet™ Association) SEMI SIG conformance test. sFull scale 5 SCCM to 100 SLM flow rate lineup. sFast response in the control flow rate range. sUltra clean models featuring piezo valves. sCompact SEC-Z11D/Z12D: Compatible with 1.125 inch pitch gas panels SEC-Z10DW/Z12DW: 106 mm between VCR type surfaces (Compatible with 1.5 inch pitch gas panels) SEC-F700 series Digital mass flow controllers The pioneer series of digital mass flow controllers sHigh precision: By using a digital linearizer (polynomial calibration curve). Up to five calibration can be stored curve internally. sFast response: Have digital PID for fast response in a low flow rate range. sA variety of alarms alert the operator to changes in the gas quickly, averting trouble. sSensor alarm functions: The mass flow controller determines if there are changes in the control conditions and outputs an alarm. sUltra clean models featuring piezo valves. sCompact: 106 mm between surfaces, suitable for integrated gas panels. SEC-V100D series High precision models offering set point precision sHigh precision: Set point ± 1.0% (30 to 100% F.S.) sFast response: Quick start function and response times of under a second. sA lineup of models that are not affected by orientation: A MF (mount-free) sensor that prevents thermal siphoning through its construction (MF models option). sCompletely interchangeable with analog mass flow controllers. sCompact: 106 mm between surfaces, suitable for integrated gas panels. Digital mass flow controllers 07 GAS SEC-Z500 series Model SEC- Z512MG (DeviceNet™ model: Z514MG) Z522MG (DeviceNet™ model: Z524MG) M: type, SUS316L, internal surface polishing standard Materials used in gas contact area Open at power-off: O Valve Type Close at power-off: C #07: 30/#08: 50 SLM #01: 30/#1.5: 55/#02: 100/#2.5: 175/#03: 300/#3.5: 550 SCCM #04: 1/#4.5: 1.75/#05: 3/#5.5: 5.5/#06: 10 SLM Standard Flow Range (N2 Equivalent F.S.) *Available for N2,H2,Ar,O2 Please contact us if you need another gases others 2 to 100% F.S. Flow Rate Control Range Response speed Less than 1 sec across the entire flow rate control range (T98) Accuracy ± 1.0%S.P.(30 to 100%F.S.) ± 0.25%F.S.(2 to 25%F.S.) (Description in accordance with SEMI STANDARD E56-1296) Linearity ± 0.5% F.S. Repeatability ± 0.2% F.S. 50 to 300kPa (d) [0.5 to 3.0kgf/cm2 (d)] (#5.5 and #06 100 to 300kPa(d) Operating differential pressure #07: 200 to 300kPa(d) #08: 200(valve C)/250(valve O) to 300kPa(d) 450 kPa (G) Maximum operating pressure 1MPa(G) Pressure Resistance less than 5 x 10-12 Pa·m3/s (He) Leak Integrity Operating Temperature 5 to 50°C Flow rate setting signal Digital: RS-485 (F-Net protocol) DeviceNet™: (SEC-Z514MG/Z524MG) Analog: 0.1 to 5VDC (Input impedance : more then 1MΩ) Flow rate output signal Digital: RS-485 (F-Net protocol) DeviceNet™: (SEC-Z514MG/Z524MG) Analog: 0 to 5VDC (Minimun load resistance 2kΩ) +15V ± 5% 150mA -15V ± 5% 150mA DeviceNet : Conforms to ODVA standard (rated value 24VDC (11 to25VDC) 3.5VA Drive Power Source 1/4"VCR Type or IGS Standard Fitting *SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa). SEC-Z10D/Z10DW series Model SEC- Z10D Z12D Z13D Materials used in gas contact area Open at power-off: O Closed at power-off: C Valve type Standard flow rate range (N2 equivalent F.S.) Z11DW Z12DW Z13DW M: type, SUS316L, internal surface polishing standard 5/10/20/30/50/100 200/300/500 SCCM 1/2/3/5 SLM Flow rate control range Closed at power-off: C 10 SLM 20/30 SLM Open at power-off: O Close at power-off: C 5/10/20/30/50/100 200/300/500 SCCM 1/2/3/5 SLM 100 SLM (H2, H2) 10 SLM 20/30 SLM 5 to 100% F.S. 2 to 100% F.S. 100 SLM (H2 200 SLM: Option) 50 SLM 2 to 100% F.S. Less than 1.5 sec (T98) Less than 1 sec (T98) Response speed ± 1% F.S. Accuracy Linearity ± 0.5% F.S. Repeatability ± 0.2% F.S. Operating differential pressure 50 to 300 kPa (d) 100 to 300 kPa (d) Maximum operating pressure 20 SLM: 150 to 300 kPa (d) 30 SLM: 200 to 300 kPa (d) N2: 350 to 400 kPa (d) H2: 250 to 300 kPa (d) 150 to 300 kPa (d) 200 to 300 kPa (d) 150 to 300 kPa (d) 200 to 300 kPa (d) N2: 400 kPa (G) H2: 300 kPa (G) 300 kPa (G) 100 SLM: 150 to 300 kPa (d) H2 200 SLM: 200 to 300 kPa (d) 300 kPa (G) Pressure Resistance 1 MPa (G) less than 5 x 10-12 Pa·m3/s (He) Leak Integrity 5 to 50°C (accuracy guaranteed between 15 and 45°C) Operating temperature Conforms to ODVA standard (rated value 24 VDC (11 to 25 VDC)) 3.5 VA Drive power source Connector position Standard Fitting Top or sides Top Top or sides Top 1/4 VCR type or IGS 3/8 VCR type or IGS 1/4 VCR type or IGS 3/8 VCR type *SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa). SEC-F700 series Model SEC- F730 F740 Materials used in gas contact area Valve type Standard flow rate range (N2 equivalent F.S.) Open at power-off: O Close at power-off: C 5/10/20/30/50/100 200/300/500 SCCM 1/2 SLM 3/5/10 SLM 20/30 SLM 2 to 100% F.S. Flow rate control range Less than 1 sec (T98) Response speed Accuracy 20 to 100% ± 0.8% F.S./2 to 20% ± 0.3% F.S. Linearity ± 0.5% F.S. ± 0.2% F.S. Repeatability Operating differential pressure F750 M: type, SUS316L 20 SLM: 100 to 300 kPa (d) 30 SLM: 100 to 300 kPa (d) 5 SCCM to 5 SLM: 50 to 300 kPa (d) 10 SLM: 100 to 300 kPa (d) Maximum operating pressure Pressure Resistance Leak Integrity 300 kPa (G) 1 MPa (G) 5 x 10-12 Pa·m3/s (He) Operating temperature 5 to 50°C (accuracy guaranteed between 15 and 35°C) Flow rate setting signal Digital: RS-422A (F-Net protocol) Analog: 0.1 to 5VDC (Input impedance : more then 1MΩ) Flow rate output signal Digital: RS-422A (F-Net protocol) Analog: 0 to 5VDC (Minimun load resistance 2kΩ) Drive power source Standard Fitting *SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa). +15 VDC ± 5%, 140 mA -15 VDC ± 5%, 120 mA, 3.9 VA 1/4 VCR type or IGS Digital Mass Flow Controllers 08 SEC-V100D series flow SEC- ( mass controller ) flow ) SEF- ( mass meter Model V110D V110D V120D V120D Materials used in gas contact area M: type, SUS316L, PTFE, magnetic stainless steel Valve type Close at power-off: C Open at power-off: O Close at power-off: C Standard flow rate range (N2 equivalent F.S.) 10/20/30/50/100/200/300/500 SCCM 1/2/3/5/10 SLM 20/30/50 SLM 2 to 100% F.S. Flow rate control range (for SEC series) 0 to 100% F.S. Flow rate control range (for SEF series) Less than 1 sec (T98) Response speed Accuracy ± 1.0% within S.P [30 to 100% F.S.]/ ± 0.3% within F.S. [2 to 30% F.S.] (Description in accordance with SEMI STANDARD E56-1296) Linearity Within ± 0.5% F.S. Within ± 0.2% F.S. Repeatability 150 to 300 kPa (d) 50 SLM: 250 to 300 kPa (d) 50 to 300 kPa (d) 10 SLM: 100 to 300 kPa (d) Operating differential pressure*1 (for SEC series) Operating differential pressure*1 300 kPa (G) or under Pressure Resistance 1 MPa (G) Leak Integrity 5 x 10-12Pa·m3/s (He) Seal method Metal seal 5 to 50°C Operating temperature 0.08% F.S./°C Temperature influence span Flow rate setting signal Digital: RS-422A (F-Net protocol) Analog: 0.1 to 5VDC (Input impedance : more then 1MΩ) Flow rate output signal Digital: RS-422A (F-Net protocol) Analog: 0 to 5VDC (Minimun load resistance 2kΩ) +15 VDC ± 5% 150 mA/-15 VDC ± 5% 250 mA +15 VDC ± 5% 150 mA/-15 VDC ± 5% 200 mA Drive power source 1/4 VCR type or IGS Standard Fitting Quick start function*2, auto-close function*2, valve voltage function*2, auto-zero function (SEC-V110DM) *2, zero adjustment switch Standard expanded functions *1 Maximum inlet pressure is 300 kPa (G). *2 Compatible with SEC series. *Mount-free sensor (MF sensor) can also be used. * SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0 °C, 101.3 kPa). SEC-Z500 series s High Accuracy Linearity is compensated by polynomial approximated carve MFC's linearity is compensated by polynomial approximated curve. This achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC standard gas measurement system. ±1.0% S.P. : 25 –100% F.S. ±0.25% F.S. : < 25% F.S. 15 4 Accuracy (% S.P.) Sensor output (V) Accuracy 5 3 2 1 60% 80%100% 5 4 3 10 S.P. Accuracy 5 0 25% 40% 60% 80% -5 -10 F.S. Accuracy ±1%FS -15 2 y=ax +bx +cx +dx +ex+f SEC-Z500 is installed with a newly developed "Variable PID system", which can achieve 1 second response to all setting points. Variable PID is continuously changing depending on setting flow points. This allows the PID factor to be optimized when you changed full scale flow and gases. SEC-Z500 series Gases and Full Scale Range can be changed by the customer using our exclusive software. It is possible to configure the MFC without dismounting it from the gas panel or piping, giving an advantage for cost and time reduction on your maintenance operation. MFC OUT 1sec 1sec NF3 C2H4 MFC C2F6 H2 PH3 SEC-Z500 MFC MFC O2 MFC SF6 MFC OUT CF4 SiH4 MFC MFC SiF4 MFC SET Ar MFC MFC SET CO MFC MFC After changed full scale to 25% MFC Before changed full scale MFC sMulti Gas/Multi Range Solution MFC s High Speed Response SEC-Z500 0-2% response 100% Flow% N2 Easy spec change at customer GAS Digital Mass Flow Controller Logging System The importance of preventative maintenance for production equipment in semiconductor device manufacturing plants is widely acknowledged. In fact, preventative maintenance is considered a critical factor for increasing productivity. HORIBA STEC offers a preventative maintenance system for its mass flow controllers, which are considered key devices in the semiconductor manufacturing process. The mass flow controller’s preventative maintenance system monitors the flow rate control conditions and the position of the valve, and determines the status of overall flow rate control in the mass flow controller. The system informs the user of what sort of maintenance is required before the mass flow controller becomes unable to control the flow rate. It is considered difficult to predict the maintenance required for a mass flow controller’s functioning by monitoring its flow control status alone. HORIBA STEC’s mass flow controller monitoring system collects information on the control status of the digital mass flow controllers (analog control) in semiconductor manufacturing equipment using digital communications, and monitors whether or not there is a need for any preventative maintenance. This system is compatible with LAN (TCP/IP) networks, and a single superior Surveillance Server can be used to monitor the mass flow controllers in each semiconductor manufacturing system. It’s also relatively easy to create a wide area network (WAN) for this monitoring system. s Sample system setup The logging unit can be used to log the flow rate control status of digital mass flow controller in each semiconductor manufacturing system. The Surveillance Server is connected to the logging unit through a LAN. The logging unit monitors the flow rate control conditions and the position of the flow control valve, and determines whether any preventative maintenance is necessary. This data can be used to investigate the reasons for problems or to review changes in the gas pressure, in addition to determining whether or not preventative maintenance is required. s Main screen Each type of alarm is displayed in a different color. Surveillance System LAN DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC DMFC Controller DMFC Controller DMFC Controller DMFC Logging unit DMFC Logging unit DMFC Logging unit DMFC Equipment DMFC Equipment DMFC Equipment s Alarm information screen Setup Valve center Valve HUB LAN DMFC 09 s Logging data screen PC communications Data initialization MFC communications D-Net Data Logger DeviceNet™ mass flow controller monitoring tool Since DeviceNet™ mass flow controllers do not use an analog signal for flow rate output, they cannot be checked using analog recorders or analog checkers. As a result, there is no simple tool for checking and recording their operating conditions. Checking generally requires additional equipment and extra work by the equipment operator. HORIBA STEC has used the technology it developed through the mass production of DeviceNet™ mass flow controllers to create a new software product called D-Net Data Logger, which makes it easy to check the operating status of mass flow controllers. D-Net Data Logger consists of a PC, DeviceNet™ communications card, and communications cable. A DeviceNet™ communications connector, which does not include any proprietary HORIBA STEC equipment, makes it easy to check and record the flow rate control status of mass flow controllers. s Settings screen s Sample system setup PLC Master Power PLS bus line D-Net Data Logger DeviceNet™ communications card PC Distribution box Communications cable SEC SEC SEC Digital Mass Flow Controllers 10 Connecting digital mass flow controllers (examples) s DeviceNet™ communications: SEC-Z10D series PLC DeviceNet™ communications Master +24 PLC bus line Power Distribution box DeviceNet™ is an open and global field network that was developed by the ODVA (Open DeviceNet™ Vendor Association, Inc.) as a unique means for supporting standardization worldwide. The ODVA offers EDS (Electronic Data Sheet) specifications, which are designed to allow shared operability and programming in a multi-vendor environment. The ODVA also carries out conformance testing. Devices that have passed the ODVA’s conformance testing can display the logo. Advantages · Reduces costs, since AD/DA converters and I/O boards are not required. · The user simply connects the devices through network cables and makes address settings. This reduces both the number of processes required and the time involved. · No special accessories are necessary for the devices. Users can simply choose DeviceNet™ conforming products, which reduces costs. SEC-Z10D SEC-Z10D SEC-Z10D DeviceNet™ cable s Digital communications: SEC-Z500 series PC s Digital communications: SEC-V100D series PC Converter HUB Power Supply Converter Power Supply SC-DH2-MM SEC-V100D SEC-V100D SEC-V100D SEC-Z500 SEC-Z500 SEC-Z500 SEC-Z500 SEC-Z500 SC-DH2-MM Signal connectors s SEC-Z10D series: DeviceNet™ communications 2 3 5 1 4 Pin no. 1 2 3 4 5 Signal name Drain V+ VCAN_H CAN_L s SEC-F700 series Pin no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Signal name Signal ground [D. COM] *1 Serial input (–) [R x D (B)] Serial output (–) [T x D (B)] CPU hang-up signal and A alarm pin [ALM. A] Analog flow rate output signal [OUT] (0 to 5 VDC) Analog flow rate setting signal [SET] (0.1 to 5 VDC) Analog COMMON and power source COMMON [A. COM] *1 Power source input [–15 V] Power source output [+5 V] *2 Analog/digital switching pin [ANALOG/DIGITAL] *3 Valve forced open/close signal [OPEN/CLOSE] *4 Serial input (+) [R x D (A)] Serial output (+) [T x D (A)] B alarm pin [ALM. B] Power source input [+15 V] Connector used: D-subminiature 15 contact pin connector (with M3 fitting screws) *1 [A. COM] and [D. COM] are connected internally. *2 Not for use by the user, since it is already required for the system. *3 Can be altered using digital commands. *4 Highest priority, both in digital and analog modes. *5 +15V is the capacity when the 5V power source output is at no load. Please do not connect anything to the [RESERVED] pin. Connecting to this pin can cause malfunctions and errors. s SEC-Z500 series: Digital connector connections Pin no. 1 2 3 4 5 6 7 8 Signal name Signal ground [D. COM] Signal ground [D. COM] N.C. *1 Serial output/input (–) Serial output/input (+) N.C. *1 N.C. *1 N.C. *1 *1: N.C. means No Connection. *2: Be sure to use shield cable to minimize the effect of electrical noise. s SEC-V100D series: Digital connector connections Pin no. 1 2 3 4 Signal name Serial output (+) [T x D [A]] Serial output (-) [T x D [B]] Serial input (+) [R x D [A]] Serial input (-) [R x D [B]] 5 Analog/digital switching pin [ANALOG/DIGITAL] When open, analog mode (electric current at point of contact: 0 mA) Digital mode when connected to [D.COM] (electric current at point of contact: 0.45 mA) 6 7 8 Signal ground [D. COM] NC NC s Analog connector connections Pin no. 1 2 3 4 5 6 7 8 9 Signal name Valve override open/close signal *1 Analog flow rate output signal (0-5VDC) Minimum resistance: 2kΩ Power supply input (+15VDC, capacity: 150mA) Power COMMON *2 Power supply input (–15VDC, capacity: 150mA) Analog flow rate setting signal (0-5VDC) *1 Input impedance: 1MΩ and over S. COMMON *2 S. COMMON *2 N.C. *3 *1: No connection for SEF series. *2: Power COMMON (Pin No.4) and S. COMMON (Pin No.7) are not connected inside the DMFC. Pin No.7 (S. COMMON) and Pin No.8 (S. COMMON) are connected inside the DMFC. *3: N.C. means No Connection. Mass Flow Controllers 26 Choosing the appropriate mass flow controller model and specifications s SEC series SEC-7330 Model M *1 O *2 Seal material SUC *3 Valve Gas contact area structure surface processing Ar *4 100SCCM *5 1/4VCR *6 Gas types Full-scale flow rate and unit Fitting *1 Select the seal material. M: Metal seal R: Rubber seal If you are using poisonous or corrosive gases, we recommend using M (metal) as the seal material. (Examples: AsH3, B2H6, PH3, GeH4, H2Se, BCl3, BF3, Cl2, F2, HBr, HF, SiCl4, TiCl4, CiF3, HCI, WF6, etc.) *2 Select the desired valve state for when there is no electricity. (Select the desired normal valve state.) O: Open C: Closed (This option is not available for flow meters.) *3 Gas contact area surface processing The gas contact area can be processed to ultra clean levels (option). SUC: Surfaces are polished until the roughness is at the sub-micron level. CRP: A CRP film (passivation film) is formed on the gas contact surfaces (stainless steel). *4 Select the types of gas you wish to use. *5 Select the full scale flow rate and flow rate unit. The flow rate unit is usually noted at 0°C or 25°C (101.3 kPa). See Chart 1 for more information. Individual specifications *7 Chart 1 *6 Fitting A variety of contact joints other than 1/4 VCR type fitting can be used. Units can also be made compatible with integrated gas panels. Please contact HORIBA STEC for more information. *7 Units can be adjusted to meet non-standard specifications. Please contact HORIBA STEC for more information. Flow rate unit L/min mL/min 0°C display SLM SCCM 25°C display LM CCM s Digital interface RS-485.F-Net protocol : SEC-Z512MG/Z522MG RS-422A.F-Net protocol : SEC-F700series SEC-V100Dseries DeviceNet™ : Series SEC-Z500 SEC-Z10D/DW SEC-F700 SEC-V100D SEC-7300 SEC-4400 SEC-4001 SEC-G100A SEC-E400J SEC-E40 SEC-8000 SEC-2000 SEC-400 SEC-Z514MG/Z524MG SEC-Z10D/Z10DWseries Operating temparture Standard Flow Range Normal High (N2 Equivalent F.S.) temp model temp model 5SCCM to 50SLM 5SCCM to 100SLM 5SCCM to 30SLM 10SCCM to 50SLM 1SCCM to 100SLM 5SCCM to 100SLM 5SCCM to 20SLM 10SCCM to 5SLM 10SCCM to 30SLM 10SCCM to 500SLM 5SCCM to 100SLM 10SCCM to 100SLM 5SCCM to 200SLM Seal material Metal Rubber Internal surface polishing Analog Interface Fitting Digital (F-Net) Digital IGS VCR Type Swagelok type RS-422A RS-485 DeviceNet™ 1.125inch 1.5inch Standard Standard Option Option Option Option Option Standard Option — Option — — Mass flow meters: For the SEF series, please start by deciding without valve structure and then consider the other options.
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