Digital Mass Flow Controllers
05
GAS
Digital Mass Flow Controllers
Gas supply systems require devices that are ultraclean, compact, and support greater circuit integration,
and lately there is increasing demand for devices that
offer highly intelligent functioning in more intelligent
gas supply systems as well. Mass flow controllers are
commonly considered the core of gas supply systems,
and the advance of digital mass flow controllers with
CPUs is the focus of a great deal of attention.
HORIBA STEC succeeded in developing the world’s
first mass-produced digital mass flow controller in
1990. Since then, digital mass flow controllers have
come to be regarded as high-end products. HORIBA
STEC has consistently pursued the advance of digital
mass flow controllers through the development of
new functions and the improvement of existing
functions, including the creation of higher
performance CPUs, the addition of DeviceNet™
communications compatibility, and the expansion of
software capabilities to push mass flow controller
performance to its limit.
Digital Mass Flow Controllers 06
SEC-Z500 series
Multi Range Multi Gas
digital mass flow controllers
Cutting edge models with DeviceNet™ or Digital communications
sAdvanced High reliability 32bit CPU installed.
s10SCCM-10SLM FS (standard gas) is covered by 6MFCs.
sGas and FS flow specification are available to change easily by user. (MRMG function)
sHigh precision. (Set point accuracy)
sFast Response across the whole flow range. (Variable PID function)
sAnalog/Digital (RS485) control mode or DeviceNet Interface available.
(Passed the ODVA (DeviceNet Association) SEMI SIG conformance test.)
sCompact
SEC-Z512: Compatible with 1.125 inch pitch gas panel.
SEC-Z512/522: 106mm between VCR surface (Compatible with 1.5 inch gas panel.)
SEC-Z10D/Z10DW series
DeviceNet™ compatible
digital mass flow controllers
Cutting edge models with DeviceNet™ communications
sCompatible with the DeviceNet™ interface: Passed the ODVA
(DeviceNet™ Association) SEMI SIG conformance test.
sFull scale 5 SCCM to 100 SLM flow rate lineup.
sFast response in the control flow rate range.
sUltra clean models featuring piezo valves.
sCompact
SEC-Z11D/Z12D: Compatible with 1.125 inch pitch gas panels
SEC-Z10DW/Z12DW: 106 mm between VCR type surfaces
(Compatible with 1.5 inch pitch gas panels)
SEC-F700 series
Digital mass flow controllers
The pioneer series of digital mass flow controllers
sHigh precision: By using a digital linearizer (polynomial calibration
curve). Up to five calibration can be stored curve internally.
sFast response: Have digital PID for fast response in a low flow
rate range.
sA variety of alarms alert the operator to changes in the gas
quickly, averting trouble.
sSensor alarm functions: The mass flow controller determines if
there are changes in the control conditions and outputs an alarm.
sUltra clean models featuring piezo valves.
sCompact: 106 mm between surfaces, suitable for integrated gas
panels.
SEC-V100D series
High precision models offering set point precision
sHigh precision: Set point ± 1.0% (30 to 100% F.S.)
sFast response: Quick start function and response times of
under a second.
sA lineup of models that are not affected by orientation: A MF
(mount-free) sensor that prevents thermal siphoning through its
construction (MF models option).
sCompletely interchangeable with analog mass flow controllers.
sCompact: 106 mm between surfaces, suitable for integrated
gas panels.
Digital mass flow controllers
07
GAS
SEC-Z500 series
Model
SEC-
Z512MG (DeviceNet™ model: Z514MG)
Z522MG (DeviceNet™ model: Z524MG)
M: type, SUS316L, internal surface polishing standard
Materials used in gas contact area
Open at power-off: O
Valve Type
Close at power-off: C
#07: 30/#08: 50 SLM
#01: 30/#1.5: 55/#02: 100/#2.5: 175/#03: 300/#3.5: 550 SCCM
#04: 1/#4.5: 1.75/#05: 3/#5.5: 5.5/#06: 10 SLM
Standard Flow Range
(N2 Equivalent F.S.)
*Available for N2,H2,Ar,O2 Please contact us if you need another gases others
2 to 100% F.S.
Flow Rate Control Range
Response speed
Less than 1 sec across the entire flow rate control range (T98)
Accuracy
± 1.0%S.P.(30 to 100%F.S.) ± 0.25%F.S.(2 to 25%F.S.)
(Description in accordance with SEMI STANDARD E56-1296)
Linearity
± 0.5% F.S.
Repeatability
± 0.2% F.S.
50 to 300kPa (d) [0.5 to 3.0kgf/cm2 (d)]
(#5.5 and #06 100 to 300kPa(d)
Operating differential pressure
#07: 200 to 300kPa(d)
#08: 200(valve C)/250(valve O) to 300kPa(d)
450 kPa (G)
Maximum operating pressure
1MPa(G)
Pressure Resistance
less than 5 x 10-12 Pa·m3/s (He)
Leak Integrity
Operating Temperature
5 to 50°C
Flow rate setting signal
Digital: RS-485 (F-Net protocol)
DeviceNet™: (SEC-Z514MG/Z524MG)
Analog: 0.1 to 5VDC (Input impedance : more then 1MΩ)
Flow rate output signal
Digital: RS-485 (F-Net protocol)
DeviceNet™: (SEC-Z514MG/Z524MG)
Analog: 0 to 5VDC (Minimun load resistance 2kΩ)
+15V ± 5% 150mA -15V ± 5% 150mA DeviceNet : Conforms to ODVA standard (rated value 24VDC (11 to25VDC) 3.5VA
Drive Power Source
1/4"VCR Type or IGS
Standard Fitting
*SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
SEC-Z10D/Z10DW series
Model
SEC-
Z10D
Z12D
Z13D
Materials used in gas contact area
Open at power-off: O
Closed at power-off: C
Valve type
Standard flow rate range
(N2 equivalent F.S.)
Z11DW
Z12DW
Z13DW
M: type, SUS316L, internal surface polishing standard
5/10/20/30/50/100
200/300/500 SCCM
1/2/3/5 SLM
Flow rate control range
Closed at power-off: C
10 SLM
20/30 SLM
Open at power-off: O Close at power-off: C
5/10/20/30/50/100
200/300/500 SCCM
1/2/3/5 SLM
100 SLM (H2, H2)
10 SLM
20/30 SLM
5 to 100% F.S.
2 to 100% F.S.
100 SLM
(H2 200 SLM: Option)
50 SLM
2 to 100% F.S.
Less than 1.5 sec (T98)
Less than 1 sec (T98)
Response speed
± 1% F.S.
Accuracy
Linearity
± 0.5% F.S.
Repeatability
± 0.2% F.S.
Operating differential pressure 50 to 300 kPa (d) 100 to 300 kPa (d)
Maximum operating pressure
20 SLM: 150 to 300 kPa (d)
30 SLM: 200 to 300 kPa (d)
N2: 350 to 400 kPa (d)
H2: 250 to 300 kPa (d)
150 to 300 kPa (d) 200 to 300 kPa (d) 150 to 300 kPa (d) 200 to 300 kPa (d)
N2: 400 kPa (G)
H2: 300 kPa (G)
300 kPa (G)
100 SLM: 150 to 300 kPa (d)
H2 200 SLM: 200 to 300 kPa (d)
300 kPa (G)
Pressure Resistance
1 MPa (G)
less than 5 x 10-12 Pa·m3/s (He)
Leak Integrity
5 to 50°C (accuracy guaranteed between 15 and 45°C)
Operating temperature
Conforms to ODVA standard (rated value 24 VDC (11 to 25 VDC)) 3.5 VA
Drive power source
Connector position
Standard Fitting
Top or sides
Top
Top or sides
Top
1/4 VCR type or IGS
3/8 VCR type or IGS
1/4 VCR type or IGS
3/8 VCR type
*SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
SEC-F700 series
Model
SEC-
F730
F740
Materials used in gas contact area
Valve type
Standard flow rate range
(N2 equivalent F.S.)
Open at power-off: O Close at power-off: C
5/10/20/30/50/100
200/300/500 SCCM
1/2 SLM
3/5/10 SLM
20/30 SLM
2 to 100% F.S.
Flow rate control range
Less than 1 sec (T98)
Response speed
Accuracy
20 to 100% ± 0.8% F.S./2 to 20% ± 0.3% F.S.
Linearity
± 0.5% F.S.
± 0.2% F.S.
Repeatability
Operating differential pressure
F750
M: type, SUS316L
20 SLM: 100 to 300 kPa (d)
30 SLM: 100 to 300 kPa (d)
5 SCCM to 5 SLM: 50 to 300 kPa (d)
10 SLM: 100 to 300 kPa (d)
Maximum operating pressure
Pressure Resistance
Leak Integrity
300 kPa (G)
1 MPa (G)
5 x 10-12 Pa·m3/s (He)
Operating temperature
5 to 50°C (accuracy guaranteed between 15 and 35°C)
Flow rate setting signal
Digital: RS-422A (F-Net protocol)
Analog: 0.1 to 5VDC (Input impedance : more then 1MΩ)
Flow rate output signal
Digital: RS-422A (F-Net protocol)
Analog: 0 to 5VDC (Minimun load resistance 2kΩ)
Drive power source
Standard Fitting
*SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
+15 VDC ± 5%, 140 mA
-15 VDC ± 5%, 120 mA, 3.9 VA
1/4 VCR type or IGS
Digital Mass Flow Controllers 08
SEC-V100D series
flow
SEC- ( mass
controller )
flow
)
SEF- ( mass
meter
Model
V110D
V110D
V120D
V120D
Materials used in gas contact area
M: type, SUS316L, PTFE, magnetic stainless steel
Valve type
Close at power-off: C
Open at power-off: O Close at power-off: C
Standard flow rate range
(N2 equivalent F.S.)
10/20/30/50/100/200/300/500 SCCM
1/2/3/5/10 SLM
20/30/50 SLM
2 to 100% F.S.
Flow rate control range (for SEC series)
0 to 100% F.S.
Flow rate control range (for SEF series)
Less than 1 sec (T98)
Response speed
Accuracy
± 1.0% within S.P [30 to 100% F.S.]/ ± 0.3% within F.S. [2 to 30% F.S.] (Description in accordance with SEMI STANDARD E56-1296)
Linearity
Within ± 0.5% F.S.
Within ± 0.2% F.S.
Repeatability
150 to 300 kPa (d)
50 SLM: 250 to 300 kPa (d)
50 to 300 kPa (d)
10 SLM: 100 to 300 kPa (d)
Operating differential pressure*1
(for SEC series)
Operating differential pressure*1
300 kPa (G) or under
Pressure Resistance
1 MPa (G)
Leak Integrity
5 x 10-12Pa·m3/s (He)
Seal method
Metal seal
5 to 50°C
Operating temperature
0.08% F.S./°C
Temperature influence span
Flow rate setting signal
Digital: RS-422A (F-Net protocol)
Analog: 0.1 to 5VDC (Input impedance : more then 1MΩ)
Flow rate output signal
Digital: RS-422A (F-Net protocol)
Analog: 0 to 5VDC (Minimun load resistance 2kΩ)
+15 VDC ± 5% 150 mA/-15 VDC ± 5% 250 mA
+15 VDC ± 5% 150 mA/-15 VDC ± 5% 200 mA
Drive power source
1/4 VCR type or IGS
Standard Fitting
Quick start function*2, auto-close function*2, valve voltage function*2,
auto-zero function (SEC-V110DM) *2, zero adjustment switch
Standard expanded functions
*1 Maximum inlet pressure is 300 kPa (G).
*2 Compatible with SEC series.
*Mount-free sensor (MF sensor) can also be used.
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0 °C, 101.3 kPa).
SEC-Z500 series
s High Accuracy
Linearity is compensated by polynomial approximated carve
MFC's linearity is compensated by polynomial approximated
curve. This achieves high accuracy for all flow control ranges.
For the purpose of advancement of actual gas accuracy,
the calibration data of various process gases are measured by
HORIBA STEC standard gas measurement system.
±1.0% S.P. : 25 –100% F.S.
±0.25% F.S. : < 25% F.S.
15
4
Accuracy (% S.P.)
Sensor output (V)
Accuracy
5
3
2
1
60% 80%100%
5
4
3
10
S.P. Accuracy
5
0
25%
40%
60%
80%
-5
-10
F.S. Accuracy
±1%FS
-15
2
y=ax +bx +cx +dx +ex+f
SEC-Z500 is installed with a newly developed "Variable PID
system", which can achieve 1 second response to all setting
points. Variable PID is continuously changing depending on
setting flow points. This allows the PID factor to be optimized
when you changed full scale flow and gases.
SEC-Z500 series Gases and Full Scale Range can be changed
by the customer using our exclusive software. It is possible to
configure the MFC without dismounting it from the gas panel or
piping, giving an advantage for cost and time reduction on your
maintenance operation.
MFC OUT
1sec
1sec
NF3
C2H4
MFC
C2F6
H2
PH3
SEC-Z500
MFC
MFC
O2
MFC
SF6
MFC OUT
CF4
SiH4
MFC
MFC
SiF4
MFC SET
Ar
MFC
MFC SET
CO
MFC
MFC
After changed full scale to 25%
MFC
Before changed full scale
MFC
sMulti Gas/Multi Range Solution
MFC
s High Speed Response
SEC-Z500 0-2% response
100%
Flow%
N2
Easy spec change
at customer
GAS
Digital Mass Flow Controller Logging System
The importance of preventative maintenance for production
equipment in semiconductor device manufacturing plants is widely
acknowledged. In fact, preventative maintenance is considered
a critical factor for increasing productivity. HORIBA STEC offers
a preventative maintenance system for its mass flow controllers,
which are considered key devices in the semiconductor
manufacturing process. The mass flow controller’s preventative
maintenance system monitors the flow rate control conditions and
the position of the valve, and determines the status of overall flow
rate control in the mass flow controller. The system informs the user
of what sort of maintenance is required before the mass flow
controller becomes unable to control the flow rate. It is considered
difficult to predict the maintenance required for a mass flow
controller’s functioning by monitoring its flow control status alone.
HORIBA STEC’s mass flow controller monitoring system collects
information on the control status of the digital mass flow controllers
(analog control) in semiconductor manufacturing equipment using
digital communications, and monitors whether or not there is a need
for any preventative maintenance. This system is compatible with
LAN (TCP/IP) networks, and a single superior Surveillance Server
can be used to monitor the mass flow controllers in each
semiconductor manufacturing system. It’s also relatively easy to
create a wide area network (WAN) for this monitoring system.
s Sample system setup
The logging unit can be used to log the flow rate control status of
digital mass flow controller in each semiconductor manufacturing
system. The Surveillance Server is connected to the logging unit
through a LAN. The logging unit monitors the flow rate control
conditions and the position of the flow control valve, and determines
whether any preventative maintenance is necessary. This data can be
used to investigate the reasons for problems or to review changes in
the gas pressure, in addition to determining whether or not
preventative maintenance is required.
s Main screen
Each type of alarm
is displayed in
a different color.
Surveillance System
LAN
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
DMFC
Controller
DMFC
Controller
DMFC
Controller
DMFC
Logging unit
DMFC
Logging unit
DMFC
Logging unit
DMFC
Equipment
DMFC
Equipment
DMFC
Equipment
s Alarm information screen
Setup
Valve center
Valve
HUB
LAN
DMFC
09
s Logging data screen
PC communications
Data initialization
MFC communications
D-Net Data Logger DeviceNet™ mass flow controller monitoring tool
Since DeviceNet™ mass flow controllers do not use an analog signal for
flow rate output, they cannot be checked using analog recorders or
analog checkers. As a result, there is no simple tool for checking and
recording their operating conditions. Checking generally requires
additional equipment and extra work by the equipment operator.
HORIBA STEC has used the technology it developed through the
mass production of DeviceNet™ mass flow controllers to create a new
software product called D-Net Data
Logger, which makes it easy to check the
operating status of mass flow controllers.
D-Net Data Logger consists of a PC,
DeviceNet™ communications card, and
communications cable. A DeviceNet™
communications connector, which does
not include any proprietary HORIBA STEC
equipment, makes it easy to check and
record the flow rate control status of mass
flow controllers.
s Settings screen
s Sample system setup
PLC
Master
Power
PLS bus line
D-Net Data Logger
DeviceNet™
communications
card
PC
Distribution box
Communications
cable
SEC
SEC
SEC
Digital Mass Flow Controllers 10
Connecting digital mass flow controllers (examples)
s DeviceNet™ communications: SEC-Z10D series
PLC
DeviceNet™ communications
Master
+24
PLC bus line
Power
Distribution
box
DeviceNet™ is an open and global field network that was developed by
the ODVA (Open DeviceNet™ Vendor Association, Inc.) as a unique means
for supporting standardization worldwide. The ODVA offers EDS
(Electronic Data Sheet) specifications, which are designed to allow shared
operability and programming in a multi-vendor environment. The ODVA
also carries out conformance testing. Devices that have passed
the ODVA’s conformance testing can display the
logo.
Advantages
· Reduces costs, since AD/DA converters and I/O boards are not required.
· The user simply connects the devices through network cables and
makes address settings. This reduces both the number of processes
required and the time involved.
· No special accessories are necessary for the devices. Users can simply
choose DeviceNet™ conforming products, which reduces costs.
SEC-Z10D
SEC-Z10D
SEC-Z10D
DeviceNet™ cable
s Digital communications: SEC-Z500 series
PC
s Digital communications: SEC-V100D series
PC
Converter
HUB
Power Supply
Converter
Power Supply
SC-DH2-MM
SEC-V100D
SEC-V100D
SEC-V100D
SEC-Z500
SEC-Z500
SEC-Z500
SEC-Z500
SEC-Z500
SC-DH2-MM
Signal connectors
s SEC-Z10D series: DeviceNet™ communications
2
3
5
1
4
Pin no.
1
2
3
4
5
Signal name
Drain
V+
VCAN_H
CAN_L
s SEC-F700 series
Pin no.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Signal name
Signal ground [D. COM] *1
Serial input (–) [R x D (B)]
Serial output (–) [T x D (B)]
CPU hang-up signal and A alarm pin [ALM. A]
Analog flow rate output signal [OUT] (0 to 5 VDC)
Analog flow rate setting signal [SET] (0.1 to 5 VDC)
Analog COMMON and power source COMMON [A. COM] *1
Power source input [–15 V]
Power source output [+5 V] *2
Analog/digital switching pin [ANALOG/DIGITAL] *3
Valve forced open/close signal [OPEN/CLOSE] *4
Serial input (+) [R x D (A)]
Serial output (+) [T x D (A)]
B alarm pin [ALM. B]
Power source input [+15 V]
Connector used: D-subminiature 15 contact pin connector (with M3 fitting screws)
*1 [A. COM] and [D. COM] are connected internally.
*2 Not for use by the user, since it is already required for the system.
*3 Can be altered using digital commands.
*4 Highest priority, both in digital and analog modes.
*5 +15V is the capacity when the 5V power source output is at no load.
Please do not connect anything to the [RESERVED] pin. Connecting to this pin can cause malfunctions and errors.
s SEC-Z500 series: Digital connector connections
Pin no.
1
2
3
4
5
6
7
8
Signal name
Signal ground [D. COM]
Signal ground [D. COM]
N.C. *1
Serial output/input (–)
Serial output/input (+)
N.C. *1
N.C. *1
N.C. *1
*1: N.C. means No Connection.
*2: Be sure to use shield cable to minimize the effect of
electrical noise.
s SEC-V100D series: Digital connector connections
Pin no.
1
2
3
4
Signal name
Serial output (+) [T x D [A]]
Serial output (-) [T x D [B]]
Serial input (+) [R x D [A]]
Serial input (-) [R x D [B]]
5
Analog/digital switching pin [ANALOG/DIGITAL]
When open, analog mode (electric current at point of contact: 0 mA)
Digital mode when connected to [D.COM] (electric current at point of contact: 0.45 mA)
6
7
8
Signal ground [D. COM]
NC
NC
s Analog connector connections
Pin no.
1
2
3
4
5
6
7
8
9
Signal name
Valve override open/close signal *1
Analog flow rate output signal (0-5VDC)
Minimum resistance: 2kΩ
Power supply input (+15VDC, capacity: 150mA)
Power COMMON *2
Power supply input (–15VDC, capacity: 150mA)
Analog flow rate setting signal (0-5VDC) *1
Input impedance: 1MΩ and over
S. COMMON *2
S. COMMON *2
N.C. *3
*1: No connection for SEF series.
*2: Power COMMON (Pin No.4) and
S. COMMON (Pin No.7) are not
connected inside the DMFC.
Pin No.7 (S. COMMON) and
Pin No.8 (S. COMMON) are
connected inside the DMFC.
*3: N.C. means No Connection.
Mass Flow Controllers 26
Choosing the appropriate mass flow controller model and specifications
s SEC series
SEC-7330
Model
M
*1
O
*2
Seal material
SUC
*3
Valve
Gas contact area
structure surface processing
Ar
*4
100SCCM
*5
1/4VCR
*6
Gas types
Full-scale flow
rate and unit
Fitting
*1
Select the seal material.
M: Metal seal
R: Rubber seal
If you are using poisonous or corrosive gases, we recommend using M (metal) as the seal material.
(Examples: AsH3, B2H6, PH3, GeH4, H2Se, BCl3, BF3, Cl2, F2, HBr, HF, SiCl4, TiCl4, CiF3, HCI, WF6, etc.)
*2
Select the desired valve state for when there is no electricity. (Select the desired normal valve state.)
O: Open
C: Closed
(This option is not available for flow meters.)
*3
Gas contact area surface processing
The gas contact area can be processed to ultra clean levels (option).
SUC: Surfaces are polished until the roughness is at the sub-micron level.
CRP: A CRP film (passivation film) is formed on the gas contact surfaces
(stainless steel).
*4
Select the types of gas you wish to use.
*5
Select the full scale flow rate and flow rate unit. The flow rate unit is usually
noted at 0°C or 25°C (101.3 kPa). See Chart 1 for more information.
Individual
specifications
*7
Chart 1
*6
Fitting
A variety of contact joints other than 1/4 VCR type fitting can be used. Units can
also be made compatible with integrated gas panels. Please contact HORIBA
STEC for more information.
*7
Units can be adjusted to meet non-standard specifications. Please contact
HORIBA STEC for more information.
Flow rate unit
L/min
mL/min
0°C display
SLM
SCCM
25°C display
LM
CCM
s Digital interface
RS-485.F-Net protocol :
SEC-Z512MG/Z522MG
RS-422A.F-Net protocol : SEC-F700series SEC-V100Dseries
DeviceNet™ :
Series
SEC-Z500
SEC-Z10D/DW
SEC-F700
SEC-V100D
SEC-7300
SEC-4400
SEC-4001
SEC-G100A
SEC-E400J
SEC-E40
SEC-8000
SEC-2000
SEC-400
SEC-Z514MG/Z524MG
SEC-Z10D/Z10DWseries
Operating temparture
Standard Flow Range Normal
High
(N2 Equivalent F.S.) temp model temp model
5SCCM to 50SLM
5SCCM to 100SLM
5SCCM to 30SLM
10SCCM to 50SLM
1SCCM to 100SLM
5SCCM to 100SLM
5SCCM to 20SLM
10SCCM to 5SLM
10SCCM to 30SLM
10SCCM to 500SLM
5SCCM to 100SLM
10SCCM to 100SLM
5SCCM to 200SLM
Seal material
Metal
Rubber
Internal
surface
polishing
Analog
Interface
Fitting
Digital (F-Net)
Digital
IGS
VCR Type Swagelok
type
RS-422A RS-485 DeviceNet™
1.125inch 1.5inch
Standard
Standard
Option
Option
Option
Option
Option
Standard
Option
—
Option
—
—
Mass flow meters: For the SEF series, please start by deciding without valve structure and then consider the other options.
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