The Company Thyracont
Thyracont
The Company
V a c u u m
I n s t r u m e n t s
Sm rt line
V a c u u m
I n s t r u m e n t s
Thyracont develops and
manufactures smart vacuum
measurement and control
instruments for a wide variety
of applications:
Coating Plants
Rotary Evaporators
Vacuum Pump QA
Freeze Dryers
Spectrometers
Laboratory Workstations
Vacuum Isolation
Vacuum Packaging
Equipment
• Leak Testers
•
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Online Store
All our vacuum gauges and
controllers are available
online. Easy ordering and fast
delivery at the click of a
mouse.
Special Needs?
Thyracont is ready to
customize hardware and
software to meet your
requirements. We can also
develop special vacuum
metrology equipment to your
specification.
Your Brand on our Instruments
OEM partnerships are
welcome; our teams will work
with you to fulfill specific
product requirements.
Expertise and Responsiveness
Whatever your vacuum
measurement requirements
are, the Thyracont team is
ready to help.
+49(0)851 95986 28
tanja.feicht@thyracont.de
Company Philosophy
For Decades we have set the Standards
Joy in innovation is the main driving force
that sets our direction and has given rise to
many new concepts in vacuum metrology.
In house R&D has resulted in a series of
patents being granted for innovations and
processes that are built into our entire
product range.
Accuracy is our Obsession
Precision is found throughout our company.
In our instruments, our production
processes, our scheduling and our customer
relations. We continue to focus on
improvements in efficiency across all
company functions and positive customer
feedback confirms that we are on track.
Expertise and Responsiveness
Made in Germany since 1970
Quality and reliability are the principles of our
success. For customers, suppliers and staff
Thyracont is a long term partner combining
technical excellence with environmental
awareness and a strong sense of community.
We encourage direct contact from our
customers. For technical queries, delivery
dates or price quotations we will get straight
forward responses to you quickly and
accurately.
Research and Development
Through a commitment to in-house R&D we
have been making continuous
improvements to our vacuum measurement
products. Breaking new ground, combining
‘state of the art’ innovation with practical
technology, ensures that our customers
benefit in usability and cost effectiveness.
advantages in handling and
functionality.
A convenient, open working atmosphere
inspires our engineers and ensures that
creativity and new ideas flow into the whole
range of our products.
Some examples:
• Automatically controlled combination
sensors can easily measure pressures
over a wide range with high resolution
and high accuracy. Ranges from
atmosphere to 10-9 mbar are
available.
• Thyracont smart vacuum transmitters
with modern micro processor
technology offer considerable
• Vacuum controllers with proportional
valves guarantee optimal process
control even under difficult conditions.
As specialists in vacuum metrology today, we
are also involved in your technological needs
of tomorrow.
• For high reliability and long term
stability all instruments are
subjected to regular and random
stress tests.
For all Thyracont gauges test certificates or works
calibration certificates can be provided.
Our technical staff is supported by latest
software and hardware tools for simulation,
calibration and testing.
Quality Assurance
All Thyracont products are developed,
manufactured and calibrated in Germany.
Sophisticated test procedures assure that
the measurement and control instruments
meet our high demands in terms of long
lifetime, reliability and precision.
• Helium leak testing of all metal sealed
sensors checks that the maximum
Leak rate does not exceed
5x10-10 mbar l/s.
• Each sensor is provided with
individual temperature compensation
that is applied using a 4 point
calibration method.
Both certificates are traceable to national DKD
standards (German National Calibration
Laboratory).
DKD calibrations are also optionally available.
Customer Feedback
“Immediately I had a qualified contact
person on the phone who answered my
questions. That was a pleasant surprise
for me.”
Ernst K., purchasing for a manufacturer of vacuum pumps
“For more than 10 years Thyracont has
been a reliable supplier. To react quickly
to customer enquiries, we often have to
bring forward delivery dates.
Thyracont staff work with us to meet our
delivery requirements. This flexibility
really makes our daily work a lot easier
and our customers happy.”
Anita S., purchasing for a manufacturer of laboratory equipment
“For three years we have used ThyracontPiranis in our freeze dryers. Due to the
longevity of these sensors our device
availability has improved significantly.”
“We had a line down and we were in urgent
need of a new vacuum transducer.
Thyracont responded immediately and sent
a replacement and we were able to install
the replacement gauge in under 24 hours.
This fast response and qualified assistance
saved us a lot of time and money.”
“Time and again our service personnel are
asked for Thyracont compact vacuum meters.
The handheld gauges are easy to use and are a
great help for our field service staff.”
Manfred L., production manager of a synthetics manufacturer
Wolfgang K., service manager of a manufacturer of vacuum pumps
Jürgen K., technician at a manufacturer of freeze dryers
THYRACONT
Vacuum Instruments GmbH
Max-Emanuel-Straße 10
94036 Passau, Germany
Tel.: +49 (0)851 95986 0
Fax: +49 (0)851 95986 40
Email: info@thyracont-vacuum.de
www.thyracont-vacuum.com
Expertise and Responsiveness: +49 (0)851 95986 28
V a c u u m
I n s t r u m e n t s
VD8
mode
VD8
Digital Compact Vacuum Meters
Data Loggers
V a c u u m
I n s t r u m e n t s
V a c u u m
I n s t r u m e n t s
Your Digital Compact
Vacuum Meters / Data Loggers
For 1600 to 5 x 10-4 mbar
The VD8 family of compact
vacuum meters is fully
electronic and combines high
quality sensors and micro
controller technology with
modern design. Our customers
appreciate these easy to use
gauges as reliable tools in
quality control, service and
laboratory.
Do You Want To Know Exactly?
Using the VD8 series vacuum
meters the digital display
shows the precise absolute
pressure.
Sensors with temperature
compensation and
sophisticated evaluation
electronics guarantee high
accuracy and reproducible
measurements.
Quality Assurance Made Easy
Optionally the vacuum meters
can be used as data logger to
store pressure data during the
measurement.
Push button data transmission
via USB to a PC allows analysis
and documentation using our
VacuGraphTM Windows
software.
On request works calibration
of the vacuum meter is
provided. It documents the
traceability to DKD national
German calibration standards.
You Can Choose
Mobile use or fixed
installation? Integrated or
detachable sensor? Quick spot
check of actual pressure or
documentation of measurements on a PC? The VD8 meets
all these needs and more...
Further VD8 Advantages
• High battery life due to
clocked measurement
• Display of minimum and
maximum pressure
• Automatic switch-off or
continuous operation
• Option: data logging at
measurement changes
• Versatile and multifunctional
• Operation with battery or
power supply
• Stainless steel flange
VD81 1600 to 1 mbar Ceramic Sensor
Application Example
Solution
Applications
Vacuum packaging increases storage life of
food products by a factor 3 to 5; the package
is first evacuated and then hermetically
sealed.
To check correct performance a battery
operated VD81 is vacuum-sealed instead of
the product at regular time intervals. During
the packaging process the instrument stores
the achieved minimum pressure. After the
VD8
vacuum meter is taken out of the packing
this minimum pressure can be displayed and
checked.
• Setup and check of
vacuum plants
• Analysis instruments
• Chemical engineering
• Substitution of mechanical
and mercury manometers
• Vacuum furnaces
Challenge
Correct functioning of the packing machine
must be regularly checked. Only when there
is a sufficient vacuum inside the packing,
quality, freshness, nutrients and taste of the
product can be fully maintained.
mode
V D 8 3 1 0 0 t o 5 x 1 0 -4 m b a r P i r a n i
V D 8 4 1 0 0 t o 1 x 1 0 -3 m b a r E x t e r n a l P i r a n i
Application Example
Vacuum insulation of liquid gas tanks
protects the liquified gas from the influence
of ambient heat. The vacuum envelope
effectively prevents heat conduction
between the tank and its environment.
Challenge
To assure correct functioning of the
insulation and detect leakage in the gas
tank or the outer shell as soon as possible,
the insulating vacuum is regularly checked.
Failure of the vacuum insulation runs the
risk of the gas heating up resulting in a
dangerous rise in pressure.
Solution
Using a VD84 vacuum meter with detachable
sensor head the insulating vacuum of a gas
tank can be checked easily and quickly.
Each gas tank is equipped with a separate
sensor, which remains fixed at the
insulation envelope. The vacuum meter is
periodically connected to those sensors so
that the vacuum can be checked.
Applications
• Service and maintenance
• Check of roughing pumps
• Vacuum drying
• Vacuum centrifuges
• Cooling and refrigeration
technique
V D 8 5 1 2 0 0 t o 5 x 1 0 -4 m b a r C o m b i s e n s o r P i e z o / P i r a n i
Application Example
Solution
Applications
Systematic maintenance and servicing of
vacuum pumps helps to prevent failure in
production processes and improves the
availability of systems.
A VD85 with wide range combination sensor
is capable of capturing the minimum
pressure of many pump types like
diaphragm, scroll or rotary vane pumps. In
addition the instrument can measure and, on
demand, record the complete pump down
cycle from atmospheric to ultimate pressure.
In this case the vacuum meter is used as
data logger which stores the measurements
in the gauge memory. Via a USB interface
data can be transmitted to a PC for further
analysis and documentation.
• Leakage testing
• Quality assurance
• Service and maintenance
• Vacuum evaporators
• Coating
Challenge
For diagnosis of a pump as well as for
maintenance work the ultimate minimum
pressure achieved and the pump down
characteristic have to be recorded. These
factors provide essential information about
the actual condition and performance of the
pump.
Alterations reserved (8A04)
VD81
Compact Vacuum Meter / Data Logger
Absolute Pressure 1600 to 1 mbar
The versatile VD81 digital vacuum
meter measures absolute pressure in
the rough vacuum range.
It is available with USB interface and
can be used as data logger.
The VD81 can be operated with
either battery or external power
supply making it ideal for both,
portable or stationary applications.
Typical Applications
Benefits
• Checking and setup of
vacuum plants
• Chemically resistant ceramic
sensor with FKM sealing
• Operational control and
documentation at vacuum
plants and pumps
• High repeatability
• Service and maintenance
• Up to 5000 h battery life
• Modern teaching aid with PC
interface
• Vacuum connection by
small flange, G1/4 female thread
or screw in hose nozzle
• Leak tests
• Packing machines
• Analysis instruments
• Chemical process engineering
• Compact, easy to use
• Min/Max Memory:
Storage and display
of high and low values
• Automatic switch off or
continuous operation
• Pressure units
mbar, Torr, hPa
• Exact readjustment
without a potentiometer
• Easy configuration of the vacuum
meter by VacuGraphTM software or
directly at the instrument
• Measuring rate of the data logger
can be arbitrarily set by means of
VacuGraphTM software or directly
selected at the instrument
• Optionally measurements are saved
only on pressure change to reduce
data volume
• Online data transfer to PC via USB
• Data logger functionality:
Save up to 2000 measurements in
the vacuum meter and push button
data transfer to a PC; no PC
connection is necessary during the
measurement
• VacuGraphTM software
for saving and plotting
measurements on PC
Actual Pressure
• Replacement of mercury
manometers in research and
teaching, laboratories and
manufacturing
• Excellent long term stability
• USB interface
Logged Data Point
Data logging at measurement changes
Time
120,0 mm
30,0 mm
44,0 mm
60,0 mm
25,0 mm
47,0 mm
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Piezo resistive, independent of gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4305, Al2O3 ceramic, FKM
_______________________________________________________________________________________
Measurement Range
1600 - 1 mbar (1200 - 1 Torr), max. overpressure 4 bar absolute
_______________________________________________________________________________________
Resolution
1 mbar (Torr)
_______________________________________________________________________________________
Accuracy
< ± 0.3% full scale (linearity, hysteresis, repeatability)
_______________________________________________________________________________________
Response Time
20 ms
_______________________________________________________________________________________
Measuring Rate
1.0 s (100 ms in data logger mode)
_______________________________________________________________________________________
Data Logging Rate
0.1...999 s
_______________________________________________________________________________________
Operating Temperature
0...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Power Supply
9 V block battery (alternatively NiMh rechargeable battery)
or 15 VDC external (power supply)
_______________________________________________________________________________________
Power Consumption
Approx. 2 mW
_______________________________________________________________________________________
Operating Time
9 V lithium battery: max. 5000 h
9 V Alkaline 6LR61 battery: max. 2500 h
9 V rechargeable battery 150 mA: max. 500 h
_______________________________________________________________________________________
Electrical Connection
Jack for external power supply
_______________________________________________________________________________________
Vacuum Connection
DN 16 ISO-KF with G1/4 female thread or
hose nozzle (accessory VD81SW1)
_______________________________________________________________________________________
Protection Class
IP40
_______________________________________________________________________________________
Display
LCD 12 mm
_______________________________________________________________________________________
Weight
Approx. 200 g (battery included)
_______________________________________________________________________________________
• VD81
Compact vacuum meter,
1600 to 1 mbar, DN 16 ISO-KF flange
with G1/4 female thread
Accessories:
• VD8CASE
Protective case
• VD8ALK
AlMn battery, 9 V block 6LR61
• VD8N4
External power supply,
100 to 240 VAC
• VD81SW1
Hose nozzle, nickel coated brass
• VD8ANS
Connection set with tee
DN 16 ISO-KF, 2 centering rings and
2 clamps
• VGR
VacuGraphTM software for Windows
• WUSB0002
Interface cable USB, shielded, 2 m
Alterations reserved (81A04)
VD83
Compact Vacuum Meter / Data Logger
Absolute Pressure 100 to 5 x 10-4 mbar
VD83 precision digital vacuum meter
measures absolute pressure in the
fine vacuum range.
It is available with USB interface and
can be used as data logger.
The VD83 can be operated with
either battery or external power
supply making it ideal for portable or
fixed applications.
Typical Applications
Benefits
• Checking and setup of
vacuum appliances
• Temperature compensated,
metal sealed Pirani sensor with
durable helix filament
• Diagnosis and documentation
of rotary vane vacuum pumps
• High accuracy
• Service and maintenance
• Excellent repeatability
• Modern teaching aid with PC
interface
• The sensor is well protected
against condensed solvents
• Recording and plotting of
pump down diagrams
• High battery life due to
clocked measurement
• Leak tests
• Compact, user-friendly
• Vacuum centrifugation
• Pressure units mbar, Torr, hPa
• Coating plants
• Min/Max memory:
Storage and display
of high and low values
• Gas correction factors for correct
pressure readings
• Easy configuration of the vacuum
meter by VacuGraphTM software or
directly at the instrument
• Measuring rate of the data logger
can be arbitrarily set by means of
VacuGraphTM software or directly
selected at the instrument
• Online data transfer to PC via USB
• Data logger functionality:
Save up to 2000 measurements in
the vacuum meter and push button
data transfer to a PC; no PC
connection is necessary during the
measurement
• VacuGraphTM software
for saving and plotting
measurements on PC
• Precise push button readjustment
• Battery conserving auto-off mode
or continuous operation
Actual Pressure
• Evaporators
• USB interface
Logged Data Point
Data logging at measurement changes
Time
120,0 mm
30,0 mm
44,0 mm
60,0 mm
25,0 mm
47,0 mm
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Pirani, depending on gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4307, tungsten, nickel, glass
_______________________________________________________________________________________
Measurement Range
100 - 5 x 10-4 mbar (75 - 5 x 10-4 Torr),
max. overpressure 4 bar absolute
_______________________________________________________________________________________
Resolution
2-digit plus exponent
_______________________________________________________________________________________
Accuracy
100 - 20 mbar: < ±30% from reading
20 - 2 x 10-3 mbar: < ±10% from reading
< 1 x 10-3 mbar: < factor 2
_______________________________________________________________________________________
Measuring Rate
1.0 s
_______________________________________________________________________________________
Data Logging Rate
1...999 s
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Power Supply
9 V block battery, NiCd rechargeable battery or 15 VDC external
_______________________________________________________________________________________
Electrical Connection
Jack for external power supply
_______________________________________________________________________________________
Power Consumption
Approx. 110 mW
_______________________________________________________________________________________
Vacuum Connection
Stainless steel small flange DN 16 ISO-KF
_______________________________________________________________________________________
Operating Time
Max. 100 h with 9V lithium battery,
max. 40 h with 9V Alkali-Mangan battery
_______________________________________________________________________________________
Display
LCD 12 mm
_______________________________________________________________________________________
Protection Class
IP40
_______________________________________________________________________________________
Weight
Approx. 200 g (battery included)
_______________________________________________________________________________________
• VD83
Compact vacuum meter,
100 to 5 x 10-4 mbar, DN 16 ISO-KF
flange
Accessories:
• VD8CASE
Protective case
• VD8ALK
AlMn battery, 9 V block 6LR61
• VD8N4
External power supply,
100 to 240 VAC
• VD8ANS
Connection set with tee
DN 16 ISO-KF, 2 centering rings and
2 clamps
• VGR
VacuGraphTM software for Windows
• WUSB0002
Interface cable USB, shielded, 2 m
Alterations reserved (83A04)
VD84
Compact Vacuum Meter / Data Logger
Absolute Pressure 100 to 1 x 10-3 mbar
VD84 digital Pirani vacuum meter
with exchangeable sensor head
reads absolute pressure in the fine
vacuum range.
It is available with USB interface and
can be used as data logger.
VD84 can be operated with either
battery or external power supply
making it ideal for portable or fixed
applications.
Typical Applications
Benefits
• Monitoring of vacuum insulations
• External detachable sensor with
stainless steel small flange
DN 16 ISO-KF or 1/8"NPT male
thread
• Evacuation of brake and
air-conditioning systems
• Checking and setup of
vacuum appliances
• Operational control and documentation of vacuum plants and pumps
• Service and maintenance
• Modern teaching aid with PC
interface
• Recording and plotting of
pump down diagrams
• Temperature compensated
Pirani sensor with durable
helix filament
• USB interface
• Easy configuration of the vacuum
meter by VacuGraphTM software or
directly at the instrument
• Excellent reproducibility
• Measuring rate of the data logger
can be arbitrarily set by means of
VacuGraphTM software or directly
selected at the instrument
• The sensor is well protected
against condensed solvents
• Gas correction factors for correct
pressure readings
• Long battery life due to
clocked measurement
• Online data transfer to PC via USB
• Compact, easy to use
• Leak tests
• Pressure units mbar, Torr, hPa
• Vacuum centrifugation
• Coating plants
• Min/Max memory:
Storage and display
of high and low values
• Vacuum evaporators
• Precise push button readjustment
• Data logger functionality:
Save up to 2000 measurements in
the vacuum meter and push button
data transfer to a PC; no PC
connection is necessary during the
measurement
• VacuGraphTM software
for saving and plotting
measurements on PC
Actual Pressure
• Automatic switch off or
continuous operation
Logged Data Point
Data logging at measurement changes
Time
50,0 mm
120,0 mm
20,0 mm
60,0 mm
25,0 mm
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Pirani, depending on gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4305, tungsten, nickel, glass
_______________________________________________________________________________________
Measurement Range
100 - 1 x 10-3 mbar (75 - 1 x 10-3 Torr),
max. overpressure 4 bar absolute
_______________________________________________________________________________________
Resolution
2-digit plus exponent
_______________________________________________________________________________________
Accuracy
100 - 20 mbar: < ± 30% from reading
20 - 1 x 10-2 mbar: < ± 10% from reading
< 1 x 10-2 mbar: < factor 2
_______________________________________________________________________________________
Measuring Rate
1.0 s
_______________________________________________________________________________________
Data Logging Rate
1...999 s
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Power Supply
9 V block battery (alt. NiCd rechargeable battery)
or 15 VDC external
_______________________________________________________________________________________
Electrical Connection
Jack for external power supply
_______________________________________________________________________________________
Power Consumption
Approx. 110 mW
_______________________________________________________________________________________
Vacuum Connection
Stainless steel small flange DN 16 ISO-KF or 1/8" NPT male thread
_______________________________________________________________________________________
Operating Time
Max. 100 h with 9 V lithium battery,
max. 40 h with 9 V Alkali-Mangan battery
_______________________________________________________________________________________
Display
LCD 12 mm
_______________________________________________________________________________________
Protection Class
IP40
_______________________________________________________________________________________
Weight
Approx. 200 g (battery included)
_______________________________________________________________________________________
• VD84/1
Compact vacuum meter,
100 to 1 x 10-3 mbar, with probe
type VSP841, DN 16 ISO-KF flange
• VD84/2
Digital compact vacuum meter, 100
to 1 x 10-3 mbar, with probe type
VSP842, 1/8" NPT male thread
Accessories:
• VSP841
Additional sensor,
DN 16 ISO-KF flange
• VSP842
Additonal sensor,
1/8" NPT male thread
• VD8CASE
Protective case
• VD8ALK
AlMn battery, 9 V block 6LR61
• VD8N4
External power supply,
100 to 240 VAC
• VD8ANS
Connection set with tee DN 16
ISO-KF, 2 centering rings and
2 clamps
• VGR
VacuGraphTM software for Windows
• WUSB0002
Interface cable USB, shielded, 2 m
Alterations reserved (84A04)
VD85
Compact Vacuum Meter / Data Logger
Absolute Pressure 1200 to 5 x 10-4 mbar
VD85 digital vacuum meter reads
pressure over 7 decades in the rough
and fine vacuum range.
Its sensor combination of piezo and
Pirani guarantees high resolution
and precision over the whole range.
It is available with USB interface and
can be used as data logger.
The VD85 can be operated with
either battery or external power
supply making it ideal for portable or
stationary applications.
Typical Applications
Benefits
• Checking and setup of
vacuum appliances
• Wide measuring range due to
combined piezo/Pirani sensor
• Diagnosis and documentation
of vacuum pumps
• High precision and optimal
resolution over the whole range
• Service and maintenance
• Excellent long term stability
• Leak tests
• Rugged sensor (piezo/Pirani)
• Graphical evaluation of
pump down diagrams
• Continuous pressure display over
the whole range
• Modern teaching aid with PC
interface
• The Pirani sensor is active only
below 200 mbar
• Coating plants
• Pressure units mbar, Torr, hPa
• Evaporators
• Min/Max memory: Storage and
display of high and low values
• Gas correction factors for correct
pressure readings
• Precise push button readjustment
• Easy configuration of the vacuum
meter by VacuGraphTM software or
directly at the instrument
• Measuring rate of the data logger
can be arbitrarily set by means of
VacuGraphTM software or directly
selected at the instrument
• Optionally measurements are saved
only on pressure change to reduce
data volume
• Online data transfer to PC via USB
• Data logger functionality:
Save up to 2000 measurements in
the vacuum meter and push button
data transfer to a PC; no PC
connection is necessary during the
measurement
• VacuGraphTM software for saving
and plotting measurements on PC
Actual Pressure
• Automatic switch off
and continuous operation
• USB interface
Logged Data Point
Data logging at measurement changes
Time
120,0 mm
30,0 mm
44,0 mm
60,0 mm
25,0 mm
61,0 mm
Technical Data
Product Code
_______________________________________________________________________________________
Measuring Principle
Piezo resistive, independent of gas type
Pirani, depending on gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4307, nickel, gold, tungsten, glass, FKM
_______________________________________________________________________________________
Measurement Range
1200 - 5 x 10-4 mbar (900 - 5 x 10-4 Torr),
max. overpressure 2 bar absolute
_______________________________________________________________________________________
Resolution
1200 - 1000 mbar: 1 mbar
1000 - 1 mbar: 0.1 mbar
< 1 mbar: 2-digit plus exponent
_______________________________________________________________________________________
Accuracy
1200 - 10 mbar: ± 0.3% full scale
10 - 2 x 10-3 mbar: < ± 10% from reading
< 2 x 10-3 mbar: < factor 2
_______________________________________________________________________________________
Measuring Rate
1.0 s
_______________________________________________________________________________________
Data Logging Rate
1...999 s
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Power Supply
9 V block battery (alt. NiCd rechargable batt.) or 15 VDC external
_______________________________________________________________________________________
Electrical Connection
Jack for external power supply
_______________________________________________________________________________________
Power Consumption
Approx. 60 mW
_______________________________________________________________________________________
Vacuum Connection
Stainless steel small flange DN 16 ISO-KF
_______________________________________________________________________________________
Operating Time
Max. 100 h with 9 V lithium battery,
max. 40 h with 9 V Alkali-Mangan battery
_______________________________________________________________________________________
Display
LCD 12 mm
_______________________________________________________________________________________
Protection Class
IP40
_______________________________________________________________________________________
Weight
Approx. 230 g (battery included)
_______________________________________________________________________________________
• VD85
Compact vacuum meter,
1200 to 5 x 10-4 mbar, DN 16 ISO-KF
flange
Accessories:
• VD8CASE
Protective case
• VD8ALK
AlMn battery, 9V block 6LR61
• VD8N4
External power supply,
100 to 240 VAC
• VD8ANS
Connection set with tee
DN 16 ISO-KF, 2 centering rings and
2 clamps
• VGR
VacuGraphTM software for Windows
• WUSB0002
Interface cable USB, shielded, 2 m
Alterations reserved (85A04)
VGR
VacuGraphTM
Windows® Software
VacuGraphTM software can save
measurements, plot pressure
diagrams for graphical evaluation,
control your application in
combination with our vacuum control
units and calculate leakage rates.
VacuGraphTM is easy to use, self
explanatory and suitable for all
Thyracont instruments with either an
USB, RS 232 or RS 485 interface.
Operating Systems:
Windows Vista/7/8
(32bit and 64bit),
minimum resolution 1024 x 768
Typical Applications
Benefits
• Documentation of measurements
and pump down curves
• Saving of measurements
• Printing diagram
• Graphical display and evaluation of
measurements
• Logarithmic or linear pressure
scales
• Easy adjustment of gauge
parameters
• Units mbar, Torr or Pa
• Analysis of vacuum processes
• Visualization of pressure increase
• Programming set points
• Comparison of multiple plots
• Read out data of Thyracont
data loggers
• Easy installation and intuitive
operation
• Export data as ASCII text file
e. g. for Microsoft Excel
• Leakage rate calculator
• PC based control by programming
setpoints
• Remote control of vacuum
controllers (keyboard lock/unlock,
contoller active/inactive,...)
• Comfortable setting of instrument
parameters in the configuration
board
Features
Product Codes
VD8
VD6
VD12
VD10
VSR
VSP
VSM
VSH
• VGR
VacuGraphTM Windows software
x
x
x
x
x
x
x
x
Accessories:
Program set points
x
x
x
x
x
x
Set hystereses
x
x
• WUSB0002
Interface cable 2m, for instruments
with USB interface
Start / Stop Control
x
x
x
Keyboard lock
x
x
x
x
x
Read measurements
Read out data logger
x
Set data logger rate
x
Gas correction factors
x
• W0800002
PC cable RS232, 2 m
x
x
x
Degas
Instrument configuration
x
x
x
x
x
x
x
Alterations reserved (VGRA04)
VD8
mode
THYRACONT
Vacuum Instruments GmbH
Max-Emanuel-Straße 10
94036 Passau, Germany
Tel.: +49 (0)851 95986 0
Fax: +49 (0)851 95986 40
Email: info@thyracont-vacuum.com
www.thyracont-vacuum.com
Expertise and Responsiveness: +49 (0)851 95986 28
V a c u u m
I n s t r u m e n t s
VD82EX
ATEX Compact Vacuum Meter
Absolute Pressure 1050 to 1 mbar
VD82 ATEX certified digital vacuum
meter with external sensor head to
measure absolute pressure in the
rough vacuum range.
Used in hazardous areas where
explosive vapors are present.
EG prototype certificate:
BVS 06 ATEX E 011
Mark: II 2 G EEX ia IIC T4
Typical Applications
Benefits
• Measuring absolute pressure in
zone 1 hazardous (explosion)
areas
• External detachable stainless steel
sensor head
• Chemical engineering
• Checking and setup of
vacuum pumps
• Laboratory and research
• Analysis and documentation of
vacuum pumps and facilities
• Service and maintenance
• Analysis instruments
• Leak tests
• Chemically resistant ceramic
sensor with FFKM sealing
• High repeatability
• Excellent long-term stability
• Up to 100 h battery life
• Compact, easy to use
• Automatic switch off
and continuous operation
• Pressure units
mbar, Torr, hPa
• Min/Max memory:
Storage and display
of high and low values
• Variable vacuum connection
using small flange, G1/4
female thread or hose nozzle
• Delivered with protective case,
hose nozzle and plug in battery
charger
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Piezo resistive, independent of gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4305, Al2O3 ceramic, FFKM
_______________________________________________________________________________________
Measurement Range
1050 - 1 mbar (780 - 1 Torr), max. overpressure 2 bar absolute
_______________________________________________________________________________________
Resolution
1 mbar (Torr)
_______________________________________________________________________________________
Accuracy
Typ. ± 0.3% full scale (linearity, hysteresis, repeatability)
_______________________________________________________________________________________
Response Time
20 ms
_______________________________________________________________________________________
Measuring Rate
1.0 s
_______________________________________________________________________________________
Operating Temperature
0...+40°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Power Supply
Integrated 4.8 V Ni-MH rechargeable battery,
charging outside of Ex area with plug in charging adaptor,
max. charging voltage Um=28 VDC
_______________________________________________________________________________________
Electrical Connection
Jack for external plug in charging adaptor
_______________________________________________________________________________________
Power Consumption
Approx. 2 mW
_______________________________________________________________________________________
Operating Time
Max. 100 h
_______________________________________________________________________________________
Display
LCD 12 mm
_______________________________________________________________________________________
Sensor Connection
Measuring cable 2 m, plug 4-pole, lockable
_______________________________________________________________________________________
Vacuum Connection
DN 16 ISO-KF, G1/4 female thread, hose nozzle 6 - 8 mm
_______________________________________________________________________________________
Protection Class
IP40
_______________________________________________________________________________________
Weight
Approx. 200 g
_______________________________________________________________________________________
• VD82EXP
ATEX compact vacuum meter,
1050 to 1 mbar, with protective
case, hose nozzle and charging
adaptor 230 V
• VD82EXUSP
As above, with charging adaptor
115 V
Alterations reserved (82A03)
Analogline
Transducers, Sensors,
Display And Control Units
V a c u u m
I n s t r u m e n t s
Sm rt line
V a c u u m
I n s t r u m e n t s
Analogline
Vacuum Transmitters,
Sensors, Display and
Control Units for the range
of 1400 to 1 x 10–4 mbar
Stable measurements, high
reliability and a rugged
metal casings are just some
of the advantages which the
Analogline offers.
The transducers with
4-20 mA or 0-10 V output
read rough or fine vacuum
and can be connected to a
programmable logic
controller (PLC) or one of
the versatile vacuum
display and control units of
our Analogline.
Together with Thyracont's
VacuGraph software it is
possible to program set
points via serial interface,
visualize processes and
record them.
Further Analogline
Benefits:
• Compact dimensions
• High precission due to
microprocessor controls
• Linear or logarithmic
output signal
• Temperature compensated
VSC43 1400 to 1 mbar Piezo Resistive
Application Example
Wafer bonding is a procedural step in
semiconductor technology, where two wafers
are joined. For certain applications like the
encapsulation of chip sensors this process is
carried out under vacuum.
then performed under high vacuum conditions.
Absolute pressure in the bypass-line must be
accurately controlled during evacuation in
order to prevent damaging of the high vacuum
system. During the wafer bonding the vacuum
inside the chamber has to be monitored to
guarantee the required results.
maintenance-free. Optionally a VD12 can be
used for indicating the pressure directly at the
measuring place.
Applications
• Plant engineerig
Challenge
• Medical technology
Solution
When loaded the bond chamber is evacuated
• Operation control of vacuum pumps
A type VSC43 rough vacuum transducer is used • Packing machines
in a bypass connection by means of the
roughing pump until a vacuum level is reached, for controlling the bypass cycle. Its ceramic
• Appliance engineering
where the system can be switched smoothly to sensor measures the absolute pressure with
• Chemical process engineering
the high vacuum pump. The bonding process is the required accuracy and is nearly
• Vacuum furnaces
V C C 2 0 0 2 0 0 t o 1 x 1 0 -1m b a r C a p a c i t i v e
Application Example
Challenge
For the production of steel of highest quality
the carbon content in the melt is reduced by
means of vacuum oxygen decarburization.
The pressure over the molten steel is
decreased to 100 to 150 mbar and
simultaneously oxygen is injected using a
lance. This converts the dissolved carbon
into carbon monoxide, which escapes into
the vacuum environment of the molten bath.
Other dissolved gases in the melt, such as
hydrogen, are removed by vacuum
degassing, which typically takes place at a
pressure arround 1 mbar.
For an optimal degassing process the
vacuum over the molten steel must be
controlled precisely. Since there is a high
amount of dust and partly problematic
substances a particularly robust transmitter
is required to keep maintenance costs low.
Solution
A vacuum VCC200 transmitter is applied,
which measures pressure from 200 to
0.1 mbar with high accuracy. The capacitive
aluminum oxide ceramic sensor of the gauge
is very robust and largely unaffected by
pollution. The measurement is independent
of the gas type, so that the gases emitted
during the process do not influence the
pressure reading and accurate results are
ensured.
Applications
• Appliance engineering
• Analysis instruments
• Chemical engineering
• Vacuum insulation
V S P 6 3 1 0 0 0 t o 1 x 1 0 -4m b a r P i r a n i
Application Example
Thermo-sensitive mixtures are separated
gently through the use of a short pass
distillation system. The distillation can be
carried out at relatively low temperatures
due to evacuation to a fine vacuum level.
Challenge
The mixture which needs to be distilled is
heated up in a cylindrical boiler with a
thermal oil filled casing and starts to boil in
vacuum. The internal pressure of the
distillation system has to be regulated to
10-3 mbar through the whole process and it
needs to be recorded for quality management
purposes.
Solution
The compact vacuum display and control unit
VD64p is used for the pressure management.
Through the use of two dry contact switch
points, it is possible to pilot a vacuum valve
and also a ventilation valve if required.
Combined with the external transmitter
VSP63, the needed vacuum control is realized
hassle-free and cost-efficient. The process
can be documented and recorded accurately
via USB interface.
Applications
• Industrial vacuum plants
• Vacuum furnaces
• Mechanical engineering
• Analysis instruments
• Packing machines
V S P 8 4 1 / 8 4 2 1 0 0 0 . . . 1 0 0 t o 1 x 1 0 -3m b a r P i r a n i ( p a s s i v e )
contents heating up with consequent rise in
pressure.
Vacuum insulation of liquid gas tanks protects
the liquified gas from the influence of ambient Solution
heat. The vacuum envelope effectively
Using a VD84 vacuum meter with detachable
prevents heat conduction between the tank
sensor head VSP842 the insulating vacuum of
and its environment.
a gas tank can be checked easily and quickly.
Application Example
Applications
Challenge
• Service and maintenance
• Check of roughing pumps
• Vacuum drying
• Vacuum centrifuges
• Cooling and refrigeration
technique
To assure correct functioning of the insulation
and detect emerging leakages in the gas tank
or the outer shell as soon as possible, the
insulating vacuum is regularly checked. Failure
of the vacuum insulation runs the risk of the
Each gas tank is equipped with a separate
sensor, which remains fixed at the insulation
envelope. The vacuum meter is periodically
connected to those sensors so that the vacuum
can be checked.
Alterations reserved (ANA02)
VSC43
Vacuum Transducer
Absolute Pressure 1400 to 1 mbar
The VSC43 piezo transducer is used
for measuring absolute pressure in
the rough vacuum range.
Due to its durable ceramic sensor it
is nearly insensitive to dirt and
contamination.
Typical Applications
Benefits
• Appliance engineering
• Chemical resistant ceramic
sensor with FKM sealing
• Medical technology
• Standardized output signal
4-20 mA (two wire) or
1-8 V (four wire)
• Packing machines
• High reliability and
long term stability
• Plant engineering
• Short response time
• Chemical process engineering
• Resistant to dirt
• Extremely compact, designed for
industrial applications
• Vacuum furnaces
• Measurements independent
of gas type
• Robust metal housing with
protection class IP54 (VSC43MA4)
• Temperature compensated
• Vacuum connection over a
stainless steel small flange
DN 16 ISO-KF with G1/4 female
thread
• Operation control and
documentation of vacuum plants
and pumps
• Vacuum drying
• Precise push button digital
adjustment of zero
pressure and span
• Suitable for Thyracont
1 and 2 channel display
and control units VD6 / VD12
• Easy connection to PLCs
and other system controllers
VSc43MA4
VSC43MV
VSC43MA4
VSC43MV
20,00
Output (mA)
18,00
16,00
14,00
12,00
10,00
8,00
32
6,00
4,00
2,00
0,00
0
200
400
600
800
1000
1200
1400
Pressure (hPa)
VSC43MA4
Iout (mA) = (p(hPa) / 87.5) + 4.0
66
66
p (hPa) = 87.5 (Iout(mA) - 4.0)
30
VSC43MV
Vout (V) = 0.005 x p(mbar) + 1.0
Dimensions in mm
p (mbar) = (Vout(V) - 1.0) x 200
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Piezo resistive, independent of gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4305, Al2O3 ceramic, FKM
_______________________________________________________________________________________
Measurement Range
1400 - 1 mbar (1050 - 1 Torr), max. overpressure 4 bar absolute
_______________________________________________________________________________________
Accuracy
± 0.3 % full scale
_______________________________________________________________________________________
Response Time
20 ms
_______________________________________________________________________________________
Power Supply
9 - 30 VDC (VSC43MA4)
15 - 30 VDC (VSC43MV)
_______________________________________________________________________________________
Electrical Connection
M12 A, 5pole, male, lockable (VSC43MA4),
type Hirschmann, 6pole, male, lockable (VSC43MV)
_______________________________________________________________________________________
Operating Temperature
+5...+60°C
_______________________________________________________________________________________
Storage Temperature
-40...+70°C
_______________________________________________________________________________________
Output Signal
VSC43MA4: 4 - 20 mA, linear, two wire,
max. loop resistance: RL = (supply voltage - 9V) / 20 mA
VSC43MV: 1.0 to 8.0 VDC, linear (5 mV/mbar)
_______________________________________________________________________________________
Vacuum Connection
Stainless steel small flange DN 16 ISO-KF with G1/4 female thread
_______________________________________________________________________________________
Protection Class
IP54 (VSC43MA4),
IP40 (VSC43MV)
_______________________________________________________________________________________
Weight
Approx. 125 g
_______________________________________________________________________________________
• VSC43MA4
Piezo transducer 1400 - 1 mbar with
DN 16 ISO-KF flange; G1/4 female
thread; output 4 - 20mA
• VSC43MV
Piezo transducer 1400 - 1 mbar with
DN 16 ISO-KF flange; G1/4 female
thread; output 1.0 - 8.0 VDC
Accessories:
• VD81SW1
Hose nozzle brass, nickel plated
• XB0500004
Mating plug, 5pole f. VSC43MA4
• XB0600002
Mating plug, 6pole f. VSC43MV
• W0509002
Measuring cable for VSC43MA4
with VD6, shielded, 2 m
• W0509006
As W0509002, 6 m
• W0606002
Measuring cable for VSC43MV
with VD12, shielded, 2 m
• W0606006
As W0606002, 6 m
Alterations reserved (VSCA02)
VCC200
Capacitance Vacuum Transducer
Absolute Pressure 200 to 0.1 mbar
The VCC200 capacitance vacuum
transducer is used for measuring
absolute pressure with high accuracy
and independent of gas type even
below 20 mbar.
Due to its durable ceramic sensor it
is nearly insensitive to dirt and
contamination.
Typical Applications
Benefits
• Chemical process engineering
• Excellent accuracy
• Vacuum insulations
• High resolution
• Evacuation and filling
• Corrosion resistant aluminum
oxide ceramic sensor
• Analysis instruments
• Packing machines
• Measurement is independent
of gas type
• Medical technology
• High reliability
• Appliance engineering
• Short response time
• Vacuum furnaces
• Temperature compensated
• Lamp production
• Insensitive against contamination
• Vacuum drying
• Suitable for Thyracont
display and control unit VD6
• Standardized output signal
4 - 20 mA (two wire), linear
• Easy connection to PLCs
and other system controllers
• Designed for industrial applications
• Robust metal housing with
protection class IP54
• Vacuum connection over a
stainless steel small flange
DN 16 ISO-KF with G1/4 female
thread
20,00
40
Output (mA)
18,00
16,00
14,00
12,00
10,00
8,00
6,00
4,00
2,00
71
0,00
0
50
100
150
200
Pressure (hPa)
Iout (mA) = (p(hPa) / 12.5) + 4.0
30
p (hPa) = 12.5 (Iout(mA) - 4.0)
30
Dimensions in mm
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Capacitive, absolute pressure, independent of gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4305, Al2O3 ceramic, FKM
_______________________________________________________________________________________
Measurement Range
200 - 0.1 mbar (150 - 0.1 Torr),
max. overpressure 6 bar absolute
_______________________________________________________________________________________
Accuracy
± 0.25 % full scale (f.s.), linearity, hysteresis, repeatability
_______________________________________________________________________________________
Temperature Coefficient
± 0.04 % f.s. / 10 K
_______________________________________________________________________________________
Response Time (10...90%)
< 120 ms
_______________________________________________________________________________________
Power Supply
9 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
M12, 5-pole, male, lockable
_______________________________________________________________________________________
Operating Temperature
+5...+60°C, relative humidity max. 80% at 25 °C
_______________________________________________________________________________________
Storage Temperature
-40...+70°C
_______________________________________________________________________________________
Output Signal
4 - 20 mA, two wire (linear)
max. loop resistance: Rmax [W
] = ( Supply Voltage [V] - 9 ) / 0.02
_______________________________________________________________________________________
Vacuum Connection
Stainless steel small flange DN 16 ISO-KF with G1/4 female thread
_______________________________________________________________________________________
Protection Class
IP54 (with suitable counter plug)
_______________________________________________________________________________________
Weight
Approx. 170 g
_______________________________________________________________________________________
• VCC200MA4
Capacitance transducer
200 - 0.1 mbar with DN 16 ISO-KF
flange; G1/4 female thread;
output 4 - 20mA (two wire)
Accessories:
• VD81SW1
Hose nozzle 6 to 8 mm, brass,
nickel plated
• XB0500004
Mating plug, 5pole f. VCC200MA4
• W05090002
Measuring cable, for VD6, shielded,
2m
• W05090006
As W05090002, 6 m
Alterations reserved (VCCA03)
VSP63 / VSP64
Vacuum Transducer
Absolute Pressure 1000 to 1 x 10-4 mbar
The VSP63 is based on a new,
patented measurement principle.
The well proven Thyracont impulse
Pirani sensor provides a larger
measuring range with higher
resolution.
The advanced VSP63 uses an
optimized temperature
compensation. Accuracy and stability
have been further improved.
Analog, logarithmic output signal
Typical Applications
Benefits
• Analysis instruments
• High reliability
• Coating plants
• Extremely compact, designed for
industrial applications
• Vacuum ovens
• Leakage testing
• Freeze drying
• Operational control of roughing
pumps and vacuum plants
• Applications requiring cost savings
and inaccessible installations
• Safety circuits in vacuum systems
• Monitoring of fore vacuum
• Process engineering
• Vacuum centrifuges
• Wide measuring range, high
resolution in the rough vacuum
range
• Excellent reproducibility
• Suitable for UHV applications due
to the robust metal sealed
stainless steel sensor
• Durable Pirani helix filament
• Highly cost effective
• Filament protected by a metal
screen provides good resistance
against oil and solvent vapors
• Stable measuring values due to
optimized temperature
compensation
• Suitable for Thyracont
1 and 2 channel display
and control units VD6 / VD12
• Precise push button digital
adjustment on zero
pressure and atmosphere
• Logarithmic standard output
1.5 - 8.5 V (VSP63MV, VSP64MV) or
4-20 mA (VSP63MA4)
• Easy system integration and
connection with PLCs, wide supply
voltage range
• Rugged, EMI-proof metal housing
• Protection class IP54 (VSP63MA4)
• Vacuum connection using stainless
steel small flange DN 16 ISO-KF
(VSP63MV, VSP63MA4) or
conflat flange DN 16 CF (VSP64MV)
VSP63MA4
VSP63MA4
VSP63MV
VSP63MV
9
8
32
Output (V)
7
6
5
4
3
2
1
0
1,0E-04
1,0E-03
1,0E-02
1,0E-01
1,0E+00
1,0E+01
1,0E+02
1,0E+03
VSP63MA4
VSP64MV: 75
Iout [mA] = 16/7 x log (p[hPa]) + 92/7
p [hPa] = 10
30
66
66
Pressure (hPa)
7/16 x (Iout[mA] - 92/7)
VSP63MV / VSP64MV
Vout (V) = log (p(hPa)) + 5.5
Dimensions in mm
(V (V) - 5.5)
p (hPa) = 10 out
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Heat conduction (Impulse Pirani), depending on gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4307, nickel, tungsten, glass
_______________________________________________________________________________________
Measurement Range
1000 - 1 x 10-4 mbar (750 - 1 x 10-4 Torr),
max. overpressure 4 bar absolute
_______________________________________________________________________________________
Accuracy
1000 - 20 mbar: < 30% from reading
20 - 2 x 10-3 mbar: < 10% from reading
< 2 x 10-3 mbar: < factor 2
_______________________________________________________________________________________
Repeatability
2%
_______________________________________________________________________________________
Reaction Time
Max. 200 ms
_______________________________________________________________________________________
Voltage Supply
15 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
M12 A, 5pole, male, lockable (VSP63MA4)
Hirschmann, 6 pole, male, lockable (VSP63MV/VSP64MV)
_______________________________________________________________________________________
Power Consumption
Max. 1 W with 24 VDC supply voltage
_______________________________________________________________________________________
Operating Temperature
+5...+60°C
_______________________________________________________________________________________
Storage Temperature
-40...+70°C
_______________________________________________________________________________________
Max. Bake Out Temperature
80°C at the flange
_______________________________________________________________________________________
Output Signal
VSP63MA4: 4 - 20 mA, logarithmic, three wire,
max. loop resistance: RL = (supply voltage - 4 V) / 20 mA
VSP63MV/VSP64MV: 1.5 - 8.5 VDC, logarithmic, 1 V / decade
load resistance > 10 kW
_______________________________________________________________________________________
Vacuum Connection
Small flange DN 16 ISO-KF (VSP63MA4, VSP63MV),
conflat flange DN 16 CF (VSP64MV)
_______________________________________________________________________________________
Protection Class
IP54 (VSP63MA4), IP40 (VSP63MV, VSP64MV)
_______________________________________________________________________________________
Weight
Approx. 120 g
_______________________________________________________________________________________
• VSP63MA4
Pirani transducer, 1000 to
1 x 10-4 mbar, with DN 16 ISO-KF
connection; output 4 - 20 mA,
logarithmic
• VSP63MV
Pirani transducer, 1000 to
1 x 10-4 mbar, with DN 16 ISO-KF
connection; output 0 - 10 V
logarithmic
• VSP64MV
As above, with DN 16 CF connection
Accessories:
• XB0500004
Mating plug, 5pole,
for VSP63MA4
• XB0600002
Mating plug, 6pole,
for VSP63MV/VSP64MV
• W0509002
Measuring cable for VSP63MA4
with VD6, shielded, 2 m
• W0509006
As W0509002, 6 m
• W0606002
Measuring cable for
VSP63MV/VSP64MV with VD12,
shielded, 2 m
• W0606006
As W0606002, 6 m
Alterations reserved (63A02)
VSP841/842
Passive Vacuum Sensor
Absolute Pressure 1000...100 to 1 x 10-3 mbar
The VSP841 and VSP842 Pirani half
bridges measure absolute pressure
in the fine vacuum range.
The robust heat conduction sensor is
compact, preadjusted and
temperature compensated and is
suitable for controlled and passive
bridge circuit.
Typical Applications
Benefits
• Appliances with integrated
electronics for regulation and
evaluation
• Economical Pirani sensor
• Compact dimensions
• Long time stability
• Lockable, electric connector
• Apparatus engineering
• Durable sensor, elastic helix
filament
• Optionally with cap to protect the
sensor against dust and humidity
• Filament protected from
condensing solvents by a
metal screen
• Sensor pre-adjusted
• Analysis instruments
• Chemical process engineering
• Freeze drying
• Monitoring of vacuum insulations
• Concentrators
• Extremely small sensor volume
• Temperature sensor integrated
• Vacuum connection by stainless
steel small flange DN 16 ISO-KF
(VSP841) or 1/8" NPT
male thread (VSP842)
• Proposal for evaluation circuit
available on request
hose
diameter
Schlauchdurchmesser
8 mm 10 mm
17
1/8" NPT
69
30
20
DN16KF
47
Technical Data
_______________________________________________________________________________________
Measuring Principle
Pirani, depending on gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4305, nickel, tungsten, glass, epoxy resin
_______________________________________________________________________________________
Measurement Range
1000...100 - 1 x 10-3 mbar (750...75 - 1 x 10-3 Torr),
admitted overpressure 4 bar absolute
_______________________________________________________________________________________
Accuracy
Dependent on the evaluation circuit, e. g.
10 - 1 x 10-2 mbar: Approx. 15% from reading
_______________________________________________________________________________________
Response Time
Approx. 200 ms
_______________________________________________________________________________________
Power Supply
Supply of bridge circuit according to circuit proposal
_______________________________________________________________________________________
Electrical Connection
4 pole circular plug binder 713, screwable
_______________________________________________________________________________________
Power Consumption
Approx. 30 mA
_______________________________________________________________________________________
Operating Temperature
+10...+40°C
_______________________________________________________________________________________
Storage Temperature
-20...+80°C
_______________________________________________________________________________________
Maximum Bake Out Temperature
80°C at the flange
_______________________________________________________________________________________
Output Signal
Change of bridge voltage depending on vacuum
_______________________________________________________________________________________
Vacuum Connection
VSP841: DN 16 ISO-KF, stainless steel, Ni
VSP842: 1/8”-NPT-male thread, stainless steel, Ni
_______________________________________________________________________________________
Protection Class
IP65
_______________________________________________________________________________________
Weight
Approx. 60g
_______________________________________________________________________________________
Product Codes
• VSP841
Pirani half bridge,
1000...100 - 1 x 10-3 mbar,
with DN 16 ISO-KF connection
• VSP842
Pirani half bridge,
1000...100 - 1 x 10-3 mbar
with 1/8"-NPT thread
Accessories
• XB0400005
Mating plug for VSP841 / 842
• VSPKAPPE
Protective cap for plug
VD6
1 Channel Vacuum Display And Control Unit
Absolute Pressure 1400 to 1 x 10-4 mbar
The Thyracont VD6 universal vacuum
indicator and controller is designed
for panel mounting.
Available as complete set with
Thyracont transducer type
VSC43MA4 (1400 - 1 mbar) or
with transducer type VSP63MA4
(1000 - 1 x 10-4 mbar).
A relay monitor on the front panel
allows continuous operation control
of the two switch points.
Typical Applications
Benefits
• Industrial vacuum plants
• 2- or 3-state-control
• Vacuum furnaces
• Mechanical engineering
• 2 independent relay switch points
(switch-over), adjustable over the
entire range
• Analysis instruments
• Intuitive operation
• Packing machines
• Large, high-contrast LED-display
• Chemical engineering
• Thyracont transducers
with 4 - 20 mA signal output
allow long cable runs
• Foil-protected front panel
• DIN case 96 x 48 mm for
panel mounting
• Variable gas type correction factor
• USB interface for process control
and documentation
• VacuGraph software:
Documentation and evaluation of
vacuum processes, programming
set points and remote control
48.0
42.0
90.0
2.0
14
96.0
Dimensions in mm
Technical Data
Product Codes
_______________________________________________________________________________________
Suitable Vacuum Transducers
VCC200MA4, VSC43MA4, VSP63MA4
_______________________________________________________________________________________
Display
LED, 13 mm, max. 4 1/2 digit,
pressure unit mbar (Torr on request)
_______________________________________________________________________________________
Display Refresh Rate
2 Hz (0.5 s)
_______________________________________________________________________________________
Sample Rate
20 Hz (50 ms)
_______________________________________________________________________________________
Power Supply
VD6S2115: 115 VAC, 50/60 Hz
VD6S2230: 230 VAC, 50/60 Hz
_______________________________________________________________________________________
Power Consumption
Max. 3.5 W
_______________________________________________________________________________________
Fuse
VD6S2115: 200 mA/T
VD6S2230: 100 mA/T
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Signal Input
4 - 20 mA, SubD, 9-pole, female
_______________________________________________________________________________________
Control Output
2 x relay contact, potential free change-over switches,
Phoenix strip terminal 3-pole each:
2 A / 250 VAC, 1 A /30 VDC (normal closed)
5 A / 250 VAC, 5 A / 30 VDC (normal open)
_______________________________________________________________________________________
Analog Output
0-1 V or 0-10 V
_______________________________________________________________________________________
Serial Interface
Mini-USB, type B, Virtual Com Port protocol
_______________________________________________________________________________________
Protection Class
IP20
_______________________________________________________________________________________
Weight
Approx. 420 g
_______________________________________________________________________________________
• VD6S2115
For mains supply 115 VAC/ 3.5W, for
panel mounting 96 mm x 48 mm,
USB interface
• VD6S2230
As above, for mains supply
230 VAC/ 3.5W
Complete Sets
• VD62P230 (1400 - 1 mbar)
Set 230 V, consisting of controller
VD6S2230, transducer VSC43MA4
and measuring cable 2 m
• VD64P230 (1000 - 1 x 10-4 mbar)
Set 230 V, consisting of controller
VD6S2230, transducer VSP63MA4
and measuring cable 2 m
Accessories:
• VGR
VacuGraph software for Windows
• WUSB0002
PC cable USB, shielded, 2 m
Alterations reserved (6A02)
VD12
2 Channel Vacuum Display And Control Unit
Absolute Pressure 1400 to 5 x 10-10 mbar
VD12 is an intelligent control unit for
applications in apparatus and plant
engineering or special equipment
construction.
It offers two relay switches, one
common or two independent set
points.
19inch cassette 14 HP x 3 RE.
Typical Applications
Benefits
• Industrial plant engineering
• Simultaneous control of
2 measuring channels
• Large graphic LCD display with
background illumination
• Can be combined with all
Smartline and 0-10 V Analogline
transducers
• Comfortable operation by menudriven operator guidance
• Process automation
• Apparatus engineering, e. g.
process control and documentation
for quality assurance
• Mechanical engineering
• Packaging technology
• Chemical process engineering
(vacuum mixers)
• Pressure display in
mbar, Torr, hPa
• Universal switched mode
power supply 95 - 265 VAC
• 2 potential-free relay switches
• Two- or three-step control
• Robust 19" metal cassette with
foil-protected front panel
• EMI compatible
• Adjustable gas type correction
factor
• USB interface for process
documentation and setpoint
programming
• VacuGraph software:
Documentation and evaluation of
vacuum processes, programming
set points, remote control
• On demand the controller can be
configured ex works according to
the customer‘s requirements
17
8.0
128.4
106.0
66.0
Dimensions in mm
70.8
Technical Data
Product Codes
_______________________________________________________________________________________
Suitable Vacuum Transducers
All Smartline transducers,
VSC43MV, VSP63MV, VSP64MV, VCP63MV
_______________________________________________________________________________________
Display
LCD graphic display, background illumination,
resolution 128x64
_______________________________________________________________________________________
Display Refresh Rate
2 Hz (0.5 s)
_______________________________________________________________________________________
Sample Rate
RS485: 12,5 Hz (80 ms) / channel
0-10V: 50 Hz (20 ms) /channel
_______________________________________________________________________________________
Power Supply
95 - 265 VAC, 50/60 Hz
_______________________________________________________________________________________
Power Consumption
Max. 25 W incl. transducer
_______________________________________________________________________________________
Fuse
0.8 A/T
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Measuring Inputs
1 x RS485, SubD male, 15pole, for Smartline
2 x Amphenol C91E, 6pole, 0-10 V, female, for Analogline
_______________________________________________________________________________________
Control Outputs
2 x relay contact, potential free change over switches,
Phoenix strip terminal 6-pole,
lifetime > 300.000 cycles,
4 A / 250 VAC, 2 A / 45 VDC
_______________________________________________________________________________________
Serial Interface
Mini-USB, Type B, 5pole, female, Virtual Com Port Protocol
_______________________________________________________________________________________
Protection Class
IP20
_______________________________________________________________________________________
Weight
750 g
_______________________________________________________________________________________
• VD12S2
19inch cassette 14 HP x 3 RU, USB,
95 - 265 VAC
Complete Sets
• VD1253P (1200 - 1 x 10-4 mbar)
VD12 + VSR53D + cable 2 m
• VD1263P (1000 - 1 x 10-4 mbar)
VD12 + VSP63D + cable 2 m
• VD1277P (1000 - 5 x 10-9 mbar)
VD12 + VSM77D + cable 2 m
• VD1288P (1000 - 5 x 10-10 mbar)
VD12 + VSH88D + cable 2 m
Accessories:
• W1515002
Measuring cable RS485 for
Smartline transducers,
shielded, 2 m
• W1515006
As W1515002, 6 m
• VGR
VacuGraph Windows software
• WUSB0002
Interface cable USB, shielded, 2 m
Alterations reserved (12A01)
VGR
VacuGraphTM
Windows® Software
VacuGraphTM software can save
measurements, plot pressure
diagrams for graphical evaluation,
control your application in
combination with our vacuum control
units and calculate leakage rates.
VacuGraphTM is easy to use, self
explanatory and suitable for all
Thyracont instruments with either an
USB, RS 232 or RS 485 interface.
Operating Systems:
Windows Vista/7/8
(32bit and 64bit),
minimum resolution 1024 x 768
Typical Applications
Benefits
• Documentation of measurements
and pump down curves
• Saving of measurements
• Printing diagram
• Graphical display and evaluation of
measurements
• Logarithmic or linear pressure
scales
• Easy adjustment of gauge
parameters
• Units mbar, Torr or Pa
• Analysis of vacuum processes
• Visualization of pressure increase
• Programming set points
• Comparison of multiple plots
• Read out data of Thyracont
data loggers
• Easy installation and intuitive
operation
• Export data as ASCII text file
e. g. for Microsoft Excel
• Leakage rate calculator
• PC based control by programming
setpoints
• Remote control of vacuum
controllers (keyboard lock/unlock,
contoller active/inactive,...)
• Comfortable setting of instrument
parameters in the configuration
board
Features
Product Codes
VD8
VD6
VD12
VD10
VSR
VSP
VSM
VSH
• VGR
VacuGraphTM Windows software
x
x
x
x
x
x
x
x
Accessories:
Program set points
x
x
x
x
x
x
Set hystereses
x
x
• WUSB0002
Interface cable 2m, for instruments
with USB interface
Start / Stop Control
x
x
x
Keyboard lock
x
x
x
x
x
Read measurements
Read out data logger
x
Set data logger rate
x
Gas correction factors
x
• W0800002
PC cable RS232, 2 m
x
x
x
Degas
Instrument configuration
x
x
x
x
x
x
x
Alterations reserved (VGRA04)
THYRACONT
Vacuum Instruments GmbH
Max-Emanuel-Straße 10
94036 Passau, Germany
Tel.: +49 (0)851 95986 0
Fax: +49 (0)851 95986 40
Email: info@thyracont-vacuum.com
www.thyracont-vacuum.com
Expertise and Responsiveness: +49 (0)851 95986 28
V a c u u m
I n s t r u m e n t s
VSC42
Vacuum Transducer
Absolute Pressure 1400 to 1 mbar
The VSC42 piezo transducer is used
for measuring absolute pressure in
the rough vacuum range.
Due to its durable ceramic sensor it
is nearly insensitive to dirt and
contamination.
Signal output:
4 - 20 mA (two wire)
Typical Applications
Benefits
• Appliance engineering
• Chemical resistant ceramic
sensor with Viton® sealing
• Standardized output signal
4 - 20 mA (two wire), linear
• Packing machines
• High reliability and
long term stability
• Easy connection to PLCs
and other system controllers
• Plant engineering
• Short response time
• Designed for industrial applications
• Chemical process engineering
• Temperature compensated
• Vacuum furnaces
• Resistant to dirt
• Robust metal housing with
protection class IP54
• Operation control and
documentation of vacuum plants
and pumps
• Easy readjustment to
atmospheric and zero
pressure with trim pots
• Medical technology
• Vacuum drying
• Vacuum connection over a
stainless steel small flange
DN 16 ISO-KF with G1/4 female
thread
20,00
18,00
Output (V)
16,00
14,00
12,00
10,00
8,00
6,00
4,00
2,00
0,00
0
200
400
600
800
1000
1200
1400
Pressure (hPa)
Iout (V) = (p(hPa) / 87.5) + 4.0
p (hPa) = 87.5 (Iout(mA) - 4.0)
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Piezo resistive, independent of gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4305, Al2O3 ceramic, Viton®
_______________________________________________________________________________________
Measurement Range
1400 - 1 mbar (1050 - 1 Torr), max. overpressure 4 bar absolute
_______________________________________________________________________________________
Accuracy
± 0,4 % full scale
_______________________________________________________________________________________
Response Time
10 ms
_______________________________________________________________________________________
Power Supply
9 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
SubD, 9-pole, female, lockable
_______________________________________________________________________________________
Power Consumption
Max. 30 mA
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+70°C
_______________________________________________________________________________________
Output Signal
4 - 20 mA, two wire (linear, 20 mA / 1400 mbar)
max. loop resistance: RL = (supply voltage - 9V) / 20 mA
_______________________________________________________________________________________
Vacuum Connection
Stainless steel small flange DN 16 ISO-KF with G1/4 female thread
_______________________________________________________________________________________
Protection Class
IP54
_______________________________________________________________________________________
Weight
Approx. 170 g
_______________________________________________________________________________________
• VSC42MA4
Piezo transducer 1400 - 1 mbar with
DN 16 ISO-KF flange; G1/4 female
thread; output 4 - 20mA (two wire)
Accessories:
• VD81SW1
Hose nozzle brass, nickel plated
• W0900002
Measuring cable, shielded, 2 m
(for VD6/VD9)
• W0900006
Measuring cable, shielded, 6 m
(for VD6/VD9)
VSC42C
Vacuum Transducer - Corrosive Gas Version
Absolute Pressure 1400 to 1 mbar
The VSC42C piezo transducer is used
for measuring absolute pressure in
chemical process engineering and
industrial applications.
The ceramic sensor and the glass
fiber reinforced Teflon® hose
connection ensures resistance to
aggressive gases and chemicals.
Signal output:
4 - 20 mA (two wire)
Typical Applications
Benefits
• Vacuum measuring in harsh
environment
• Chemically resistant ceramic
measuring cell with Kalrez®
sealing and PTFE connection
• Chemical process engineering
• Corrosive gas applications
• Plant construction
• Suitable for aggressive media such
as corrosive gases and solvent
vapor
• Medical technology
• High reliability and
long term stability
• Laboratory
• Short response time
• Temperature compensated
• Resistant to contamination
• Easy readjustment to
atmospheric and zero
pressure with trim pots
• Standard signal output
4 - 20 mA (two wire), linear
• Easy connection to PLCs
and other system controllers
• Designed for tough industrial
environments
• Robust metal housing with
protection class IP54
• Vacuum connection over a
8 mm hose nozzle
20,00
18,00
Output (V)
16,00
14,00
12,00
10,00
8,00
6,00
4,00
2,00
0,00
0
200
400
600
800
1000
1200
1400
Pressure (hPa)
Iout (V) = (p(hPa) / 87.5) + 4.0
p (hPa) = 87.5 (Iout(mA) - 4.0)
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Piezo resistive, independent of gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Al2O3 ceramic, PTFE, Kalrez®
_______________________________________________________________________________________
Measurement Range
1400 - 1 mbar (1050 - 1 Torr), max. overpressure 4 bar absolute
_______________________________________________________________________________________
Accuracy
± 0,4 % full scale
_______________________________________________________________________________________
Response Time
10 ms
_______________________________________________________________________________________
Power Supply
9 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
SubD, 9-pole, female, lockable
_______________________________________________________________________________________
Power Consumption
Max. 30 mA
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+70°C
_______________________________________________________________________________________
Output Signal
4 - 20 mA, two wire (linear, 20 mA / 1400 mbar)
max. loop resistance: RL = (supply voltage - 9 V) / 20 mA
_______________________________________________________________________________________
Vacuum Connection
Hose nozzle PTFE, 8 mm
_______________________________________________________________________________________
Protection Class
IP54
_______________________________________________________________________________________
Weight
Approx. 160 g
_______________________________________________________________________________________
• VSC42CA4
Piezo transducer 1400 - 1 mbar with
PTFE hose nozzle, output 4 - 20 mA
(two wire)
Accessories:
• W0900002
Measuring cable, shielded, 2 m
(for VD6 / VD9)
• W0900006
Measuring cable, shielded, 6 m
(for VD6 / VD9)
VSP52
Vacuum Transducer
Absolute Pressure 1000...100 to 1 x 10-3 mbar
The VSP52 Pirani transducer is used
for measuring absolute pressure in
the fine vacuum range.
Its remarkable features include a
minimized sensor volume
(< 1 ccm) and excellent repeatability.
Signal output:
4 - 20 mA (three wire)
Typical Applications
Benefits
• Analysis instruments
• High reliability
• Standardized output signal
• Operation control at vacuum plants
and pumps
• Economical Pirani measuring
principle
• Designed for industrial applications
• Vacuum drying
• Excellent reproducibility
• Vacuum furnaces
• Durable Pirani filament
• Freeze drying
• Suitable for UHV applications
due to metal sealed sensor
• Appliance engineering
• Process engineering
• Quick reaction to pressure
changes
•Temperature compensated
• Easy readjustment at atmospheric
and zero pressure with trim pots
• Robust metal housing with
protection class IP54
• Vacuum connection over a
stainless steel small flange
DN 16 ISO-KF
20,00
Output (V)
18,00
16,00
14,00
12,00
10,00
8,00
6,00
4,00
0,001
0,01
0,1
1
10
100
Pressure (hPa)
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Pirani, depending on gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4307, nickel, tungsten, glass
_______________________________________________________________________________________
Measurement Range
1000...100 - 1 x 10-3 mbar (750...75 - 1 x 10-3 Torr),
max. overpressure 4 bar absolute
_______________________________________________________________________________________
Accuracy
1000 - 100 mbar: tendency
100 - 10 mbar: < 30 % from reading
10 - 1 x 10-2 mbar: approx. 10 % from reading
< 1 x 10-2 mbar: < factor 2
_______________________________________________________________________________________
Repeatability
5%
_______________________________________________________________________________________
Response Time
200 ms
_______________________________________________________________________________________
Power Supply
8 - 16 VDC
_______________________________________________________________________________________
Electrical Connection
SubD, 9-pole, female, lockable
_______________________________________________________________________________________
Power Consumption
Approx. 50 mA
_______________________________________________________________________________________
Operating Temperature
+10...+40°C
_______________________________________________________________________________________
Storage Temperature
-20...+70°C
_______________________________________________________________________________________
Max. Bake Out Temperature
80°C at the flange
_______________________________________________________________________________________
Output Signal
4 - 20 mA (non linear, according characteristic)
max. loop resistance 180 W / 8 VDC, 280 W / 15 VDC
_______________________________________________________________________________________
Vacuum Connection
Stainless steel small flange DN 16 ISO-KF
_______________________________________________________________________________________
Protection Class
IP54
_______________________________________________________________________________________
Weight
Approx. 180 g
_______________________________________________________________________________________
• VSP52MA4
Pirani transducer 1000...100 1 x 10-3 mbar with DN 16 ISO-KF
connection; output 4 - 20 mA
Accessories:
• W0900002
Measuring cable, shielded, 2 m
(for VD6 / VD9)
• W0900006
Measuring cable, shielded, 6 m
(for VD6 / VD9)
VSP62
Smartline Vacuum Transducer
Absolute Pressure 1000 to 1 x 10-4 mbar
The VSP62 is based on a new,
patented measurement principle.
This enhancement of the well proven
Pirani sensor results in a larger
measuring range with higher
resolution.
The temperature compensated
transducer provides an analog,
logarithmic output signal 0 - 10 V.
Sm rtline
Typical Applications
Benefits
• Analysis instruments
• High reliability
• Freeze drying
• Extremely compact, designed for
industrial applications
• Vacuum ovens
• Coating plants
• Operational control of roughing
pumps and vacuum plants
• Applications requiring cost savings
and inaccessible installations
• Safety circuits in vacuum systems
• Monitoring of fore vacuum
• Process engineering
• Vacuum centrifuges
• Wide measuring range, high
resolution in the rough vacuum
range
• Excellent reproducibility
• Suitable for UHV applications due
to the robust metal sealed
stainless steel sensor
• Durable Pirani helix filament
• Highly cost effective
• Filament protected by a metal
screen provides good resistance
against oil and solvent vapors
• Rugged, EMI-proof metal housing
• Low power consumption
• Stable measuring values due to
optimized temperature
compensation
• Precise push button digital
adjustment on zero
pressure and atmosphere
• Easy system integration and
connection with PLCs due to
logarithmic 0 - 10 V standard output
• Vacuum connection using stainless
steel small flange DN 16 ISO-KF,
conflat flange DN 16 CF or hose
nozzle 9.5 mm
9
8
Output (V)
7
6
5
4
3
2
1
0
1,0E-04
1,0E-03
1,0E-02
1,0E-01
1,0E+00
1,0E+01
1,0E+02
1,0E+03
Pressure (hPa)
Vout (V) = log (p(hPa)) + 5.5
p (hPa) = 10 (Vout(V) - 5.5)
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Heat conduction (Impulse Pirani), depending on gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4307, nickel, tungsten, glass
_______________________________________________________________________________________
Measurement Range
1000 - 1 x 10-4 mbar (750 - 1 x 10-4 Torr),
max. overpressure 4 bar absolute
_______________________________________________________________________________________
Accuracy
1000 - 20 mbar: < 30% from reading
20 - 2 x 10-3 mbar: < 10% from reading
< 2 x 10-3 mbar: < factor 2
_______________________________________________________________________________________
Repeatability
2%
_______________________________________________________________________________________
Reaction Time
Max. 200 ms
_______________________________________________________________________________________
Voltage Supply
15 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
Hirschmann, 6 pole, male, screwable
_______________________________________________________________________________________
Power Consumption
Approx. 10 mA
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+70°C
_______________________________________________________________________________________
Max. Bake Out Temperature
80°C at the flange
_______________________________________________________________________________________
Output Signal
0 - 10 VDC, measuring range 1.5 - 8.5 VDC, logarithmic, 1V / decade
load resistance > 10 kW
_______________________________________________________________________________________
Vacuum Connection
Stainless steel small flange DN 16 ISO-KF (VSP62MV),
additional hose nozzle 9.5 mm (VSP62MVSW)
stainless steel conflat flange DN 16 CF (VSP62MVCF)
_______________________________________________________________________________________
Protection Class
IP40
_______________________________________________________________________________________
Weight
Approx. 120 g
_______________________________________________________________________________________
• VSP62MV
Pirani transducer, 1000 to
1 x 10-4 mbar, with DN 16 ISO-KF
connection; Output 0 - 10 V
logarithmic
• VSP62MVSW
As above, with DN 16 ISO-KF
connection and hose nozzle
9.5 mm
• VSP62MVCF
As above, with DN 16 CF connection
Accessories:
• XB0600002
Counter plug, 6-pole
• W0606002
Measuring cable, shielded, 2 m
(for VD9 / VD10)
• W0606006
Measuring cable, shielded, 6 m
(for VD9 / VD10)
VSM72
Smartline Vacuum Transducer
Absolute Pressure 1000 to 5 x 10-9 mbar
The combination transducer VSM72
(Pirani/cold cathode) measures
absolute pressure from atmospheric
to ultrahigh vacuum.
The intelligent, micro processor
controlled Smartline transducers
automatically manage the
appropriate interaction of both
vacuum sensors regarding
measurement ranges and switching
points.
Smartline uses a high tech design
and provides safe, easy to use and
cost effective process control.
Sm rtline
Typical Applications
Benefits
• Analysis technology
• Combination sensor with wide
measuring range
• Coating plants and
vapor deposition
• Process engineering
• Measuring and controlling in
fine and ultrahigh vacuum
• The cold cathode sensor is
automatically switched on and off
by the Pirani
• Sputtering plants
• Patented pulsed Pirani sensor with
extended range allows operation
of cold cathode at lower pressure
and increase of lifetime
• Vacuum furnaces
• Robust cold cathode sensor
• Low thermal and electrical
interference with the vacuum
process
• Excellent ignition behavior
• Insensitive against inrush of air
• Two independent, dry relay
switch points
• Logarithmic signal output
0 - 10 V provides easy
interpretation
• RS485 serial interface
• The digital output signals
can be transmitted error-free
over long distances (up to 500 m)
• Replaceable sensor heads
• Low power consumption
• Correct pressure readings by
means of separate gas type
correction factors for Pirani and cold
cathode sensors
• Precise pushbutton digital
adjustment of zero pressure and
atmospheric
• Rugged, EMI-proof metal housing
10
9
8
Output (V)
7
6
5
4
3
2
1
1E-09
0,0000001 0,00001
0,001
0,1
10
Pressure (hPa)
Vout /V = 0,6 log (p/mbar) + 6,8
p /mbar = 10 ( (Vout /V – 6,8) / 0,6 )
Technical Data
_______________________________________________________________________________________
Measuring Principle
Heat conduction (Impulse Pirani),
cold cathode: inverted magnetron, both depending on gas type
_______________________________________________________________________________________
Material In Contact With Vacuum
Stainless steel 1.4307, nickel, tungsten, molybdenum, glass
_______________________________________________________________________________________
Measurement Range
1000 - 5 x 10-9 mbar (750 - 5 x 10-9 Torr), max. overpressure 4 bar abs.
_______________________________________________________________________________________
Accuracy
1000 - 20 mbar: < 30 % from reading
20 - 5 x 10-3 mbar: < 10 % from reading
5 x 10-3 mbar - 1 x 10-7 mbar: < 25% from reading
_______________________________________________________________________________________
Repeatability
5%
_______________________________________________________________________________________
Response Time
200 ms, 500 ms for activating the cold cathode
_______________________________________________________________________________________
Cathode Voltage
Max. 2.5 kV
_______________________________________________________________________________________
Voltage Supply
19 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
Sub-D, 15-pole, male
_______________________________________________________________________________________
Power Consumption
Approx. 2.5 W (without switch points)
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+70°C
_______________________________________________________________________________________
Maximum Bake Out Temperature
150°C at flange (electronic detached)
_______________________________________________________________________________________
Output Signal
0 - 10 VDC, measuring range 1.8 - 8.6 VDC, logarithmic, 1 V/decade
_______________________________________________________________________________________
Serial Interface
RS485: 9600 baud, address switch
_______________________________________________________________________________________
Switch Points
2 switch-over relays, 60 V, 0.5 A
_______________________________________________________________________________________
Vacuum Connection
Stainless steel flange DN 25-KF (VSM72MV)
Stainless steel conflat flange DN 40 CF (VSM72MVCF)
_______________________________________________________________________________________
Protection Class
IP40
_______________________________________________________________________________________
Weight
Approx. 570 g
_______________________________________________________________________________________
Product Codes
• VSM72MV
Combination transducer
Pirani/inverted magnetron
1000 - 5 x 10-9 mbar, with
DN 25 ISO-KF connection; output
0 - 10 V logarithmic, RS485
• VSM72MVCF
As above, with DN 40 CF connection
Accessories:
• W1506002
Measuring cable, shielded, 2 m
(for VD9)
• W1506006
Measuring cable, shielded, 6 m
(for VD9)
• W1515002
Measuring cable, shielded, 2 m
(for VD10)
• W1515006
Measuring cable, shielded, 6 m
(for VD10)
• BVSM72KF25
Sensor head DN 25 ISO-KF for
replacement
• BVSM72CF
Sensor head DN 40 CF for
replacement
VSH82
Smartline Vacuum Transducer
Absolute Pressure 1000 to 1 x 10-9 mbar
The combination transducer VSH82
(Pirani/hot cathode) measures
absolute pressure from atmospheric
to ultrahigh vacuum.
The intelligent, micro processor
controlled Smartline transducers
automatically manage the
appropriate interaction of both
vacuum sensors regarding
measurement ranges and switching
points.
Smartline uses a high tech design
and provides safe, easy to use and
cost effective process control.
Sm rtline
Typical Applications
Benefits
• Analysis technology
• Combination sensor with wide
measuring range
• Coating plants and
vapor deposition
• Sputtering plants
• Vacuum furnaces
• Process engineering
• Measuring and controlling in
the fine and ultrahigh vacuum range
• The hot cathode sensor is
automatically switched on and off
by the Pirani
• Patented pulsed Pirani sensor with
extended range allows operation
of hot cathode at lower pressure
and increase of lifetime
• RS485 interface
• The digital output signals
can be transmitted error free
over long distances (up to 500 m)
• Replaceable sensor heads
• Low power consumption
• Excellent repeatability and
high accuracy
• Correct pressure readings by
means of separate gas type
correction factors for Pirani and hot
cathode sensors
• Low thermal and electrical
interference with the vacuum
process
• Metal sealed stainless steel
sensor cell with detachable
protective screen
• Bayard-Alpert with double
filament, in the event of
filament failure the gauge
automatically switches to the
backup
• Resistant, EMC compatible
metal housing
• Insensitive against inrush of air
• Two independent, dry relay
switch points
• Logarithmic signal output
0 - 10 V provides easy
interpretation
• Precise pushbutton digital
adjustment of zero pressure and
atmospheric
Output (V)
10,00
9,00
8,00
7,00
6,00
5,00
4,00
3,00
2,00
1,00
1,0E-09 1,0E-07 1,0E-05 1,0E-03 1,0E-01 1,0E+01
Pressure (hPa)
Vout /V = 0,6 log (p/mbar) + 6,8
p /mbar = 10( (Vout /V – 6,8) / 0,6 )
Technical Data
Product Codes
_______________________________________________________________________________________
Heat conduction (Impulse Pirani), Bayard Alpert, dep. on gas type
Measuring Principle
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass, ceramic
_______________________________________________________________________________________
Measurement Range
1000 - 1 x 10-9 mbar (750 - 1 x 10-9 Torr), max. overpressure 4 bar abs.
_______________________________________________________________________________________
Accuracy
1000 - 20 mbar: < 30 % from reading
20 - 5 x 10-3 mbar: < 10 % from reading
< 5 x 10-3 mbar: < 15% from reading
_______________________________________________________________________________________
Response Time
200 ms, 500 ms for switching BA emission currents
_______________________________________________________________________________________
Repeatability
5%
_______________________________________________________________________________________
Emission Current
10 µA, 100 µA, 1 mA
_______________________________________________________________________________________
Degas
Ohmic heating of the anode
_______________________________________________________________________________________
Voltage Supply
19 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
Sub-D, 15-pole, male
_______________________________________________________________________________________
Power Consumption
Approx. 6.5 W (without switch points)
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+70°C
_______________________________________________________________________________________
Maximum Bake Out Temperature
180°C at the flange (electronic detached)
_______________________________________________________________________________________
Output Signal
0 - 10 VDC, measuring range 2.0 - 8.6 VDC, logarithmic, 1V / decade
_______________________________________________________________________________________
Serial Interface
RS485: 9600 baud, address switch 1 - 15
_______________________________________________________________________________________
Switch Points
2 switch-over relays, 60 V, 0.5 A
_______________________________________________________________________________________
Vacuum Connection
Stainless steel flange DN 40 ISO-KF (VSH82MV)
Stainless steel conflat flange DN 40 CF (VSH82MVCF)
_______________________________________________________________________________________
Protection Class
IP40
_______________________________________________________________________________________
Weight
Approx. 665 g
_______________________________________________________________________________________
• VSH82MV
Combination transducer
Pirani/Bayard Alpert,
1000 to 1 x 10-9 mbar, with
DN 40 ISO-KF connection;
output 0 - 10 V, logarithmic, RS485
• VSH82MVCF
As above, with DN 40 CF connection
Accessories:
• W1506002
Measuring cable, shielded, 2 m
(for VD9)
• W1506006
Measuring cable, shielded, 6 m
(for VD9)
• W1515002
Measuring cable, shielded, 2 m
(for VD10)
• W1515006
Measuring cable, shielded, 6 m
(for VD10)
• BVSH82KF40
Sensor head DN 40 ISO-KF for
replacement
• BVSH82CF
Sensor head DN 40 CF for
replacement
Sm rt line
Intelligent Vacuum Metrology
V a c u u m
I n s t r u m e n t s
Sm rt line
Intelligent
Vacuum Transducers for
1200 to 5 x 10–10 mbar
Joy in innovation is our main
driving force for developing
vacuum metrology at its best.
The new generation of
Smartline sets highest
standards with regard to
precision, functionality and
reliability.
Durability That Pays Off
The THYRACONT Pirani with
extended measuring range
activates ionization sensors
below a very low pressure
threshold. This protects the
sensors and improves gauge
life.
Stay Connected
The latest transducers offer an
RS485 interface and an
additional 0-10 V output or
EtherCAT.
Time Is Money
Smartline‘s intelligent
microcontrollers manage
sensor control automatically.
This guarantees an optimal
interplay between the Pirani
and ionization sensors without
operator intervention.
Further Smartline Advantages:
• Optionally with large
LCD display
• Compact, metal sealed
sensors
• Low thermal and electric
interference with the vacuum
process
• Insensitive to shock
venting
• Replaceable sensor heads
• Correct pressure readings
due to separate gas
correction factors for each
sensor
V S R 1 2 0 0 t o 1 x 1 0 -4 m b a r P i e z o / P i r a n i
Application Example
Silicon nitride is used in the semiconductor
industry as an insulating material or for
masking. It is deposited by PECVD (plasmaenhanced CVD) or LPCVD (low pressure CVD).
The feeding of the coating system is done via
a load-lock to continuously keep the vacuum
in the process chamber at 10-2 to 1 mbar.
Challenge
The pressure must be measured accurately
while evacuating the air lock, in order to take
in the wafer into the process chamber at the
earliest possible moment to start the coating
process. At last the processed wafer is
returned to the load-lock. After venting back
to atmospheric pressure and release of the
lock door, the wafer can be removed. For
short lead times, a fast reaction of the
pressure reading is important.
Solution
The pressure in the load-lock is monitored by
a VSR vacuum transmitter with Piezo / Pirani
combination sensor, which measures 1200 to
1 x 10-4 mbar with high accuracy. Thus, the
lock-pressure for the opening of the process
chamber can be measured accurately, as well
as the exact moment when atmospheric
pressure is reached after venting. The fast
response time and the precise pressure
reading of the VSR allow for rapid door
release, so very short lock cycles are possible.
Due to outstanding long-term stability, the
transmitter is essentially maintenance-free.
Applications
• Analysis instruments
• Vacuum furnaces
• Coating plants
• Test of roughing pumps
• Safety switching in vacuum systems
V S P 1 0 0 0 t o 1 x 1 0 -4m b a r P i r a n i
Application Example
Plastic components are provided with
metallic coatings, either for aesthetic
reasons or to shield sensitive components
from interferences.
Challenge
The metallization is done in a PVD coating
system. It is evacuated with a rotary vane
pump via a bypass line to a pressure of
10-2 mbar. Then a turbo-molecular pump is
connected, which further evacuates to
10-5 mbar. The vacuum during the coating
process, that takes place at 2 x 10-4 mbar,
must be monitored continuously to ensure
consistently high quality coatings. In order
to avoid an overload of the turbo-molecular
pump, e.g. by connecting it during
inapplicable system pressure, the pressure
in the bypass line as well as the prevacuum
pressure of the turbo-molecular pump have
to be monitored.
during the coating process. A VD10
multichannel vacuum display and control unit
is used as a central control module.
Solution
• Analysis instruments
• Vacuum furnaces
• Coating
• Prevacuum control
• Safety switching in vacuum systems
The VSP Pirani Transmitter controls whether
the vacuum via the bypass line is sufficient
to connect the turbo-molecular pump.
Another VSP monitors the necessary
prevacuum pressure directly at the turbomolecular pump. A VSM wide-range
transmitter measures the ultimate vacuum
inside the system, as well as the pressure
V S M 1 0 0 0 t o 5 x 1 0 -9m b a r
Application Example
During the optical coating of mirrors for laser
resonators the typical process pressure lies
above 2 x 10-3 mbar.
Challenge
A suitable vacuum transducer must be able
to monitor both, process pressure during the
coating as well as the available minimum
pressure of 10-6 mbar in the vacuum
chamber.
One of our customers used to work with a
Pirani/cold cathode combination gauge, the
cold cathode monitoring minimum and
process vacuum. However, the continuous
Applications
Pirani / Cold Cathode
operation above 10-3 mbar resulted in rapid
deterioration of the sensor.
Solution
In the VSM transducer a Pirani with extended
range operates the cold cathode only below
very low pressures. Further the transition
between the two sensors can be configured
to meet applications requirements. The
entire coating process is now monitored by
the Pirani. The cold cathode is saved
because it is active only when the system
pumps down to minimum pressure. The
availability of the coating plant has improved
significantly.
For checking the pressure directly at the
measurement location the integraded LCD of
the VSM can be used.
Applications
• Analysis instruments
• Coating plants
• Process engineering
• Controlling fine to high
vacuum applications
• Sputtering appliances
• Vacuum furnaces
VS H 1 0 0 0 t o 5 x 1 0 -10m b a r P i r a n i / H o t Ca t h o d e
Application Example
Solution
Applications
Brazing, sintering or annealing requires an
oxygen free atmosphere which means that
processes are carried out under vacuum
partially using inert gas.
Two VSH transducers that have the required
wide measuring range and are used to
measure the pressure at the furnaces gas inlet
and vacuum port with high precision. The
transducers are linked to the system PLC by
their serial RS485 interfaces, so that both
pressure levels can be directly visualized
graphically which allows easy monitoring of
the pressure gradient inside the furnace tube.
Optionally a VD12 2 channel vacuum display
and control unit can be used for pressure
reading in the panel.
• Analysis instruments
• Coating processes
• Controlling fine to ultrahigh
vacuum applications
• Sputtering appliances
• Process engineering
Challenge
The vacuum level must be monitored and kept
constantly low during the process to avoid
oxidation of the products. One of our clients
needed to measure the pressure in their high
vacuum tube furnace near the gas inlet as well
as at the vacuum port with high accuracy.
Alterations reserved (SLA03)
VSR
Smartline Vacuum Transducer
Absolute Pressure 1200 to 1 x 10-4 mbar
The combination of piezo and Pirani
sensor in the digital VSR vacuum
transducer offers high precision and
excellent resolution in the rough and
fine vacuum range.
Microcontroller intelligence
automatically manages the optional
interplay of both vacuum sensors.
Smartline represents cutting edge
technology providing safe, precise
and cost effective process control.
Sm rt line
Typical Applications
Benefits
• Load locks
• Wide measuring range due to
combination sensor piezo / Pirani
• Analysis technology
• Coating plants
• Vacuum furnaces
• High accuracy and optimal
resolution over the whole
measuring range
• Leakage tests
• Two independent, potential-free
relay switch points
• Operational control of
roughing pumps
• Short response time
• Process engineering
• Excellent reproducibility and long
term stability
• Mass spectrometers
• Safety circuits in vacuum systems
• Small measuring cell volume
e. g. 2 cm3 for VSR53D
• Metal sealed stainless steel
sensor, suitable for UHV
applications
• Filament is protected against oil
and solvent vapors by a metal
screen
• Stable measurements due to
optimized temperature
compensation
• Easily replaceable sensor heads
with stored calibration data
• Measurements independent of
gas type above 20 mbar and
adjustable gas type correction
factors for Pirani sensor
• LEDs for device status and
switch points
• Digital RS485 interface and
additional analog output signal
1.5-8.58 V or EtherCAT
• Digital adjustment of zero and
atmospheric pressure via
pushbutton or interface
• Large, integrated LCD display with
background illumination
(VSR53DL, VSR54DL)
• Display flashes in bright red color in
case of error, compared to green
ligthing in the normal mode
(VSR53DL, VSR54DL)
• Easy connection with PLCs
• The digital output signal
can be transmitted error-free
over long distances (up to 500 m)
• Baud rate 9.6 kBd to 115 kBd
• Rugged, EMI-proof metal housing
• Protection class IP54
(VSR53E, VSR54E)
• Suitable for Thyracont
2 and 4 channel display
and control units VD12 / VD10
• Vacuum connection using stainless
steel small flange DN 16 ISO-KF or
conflat flange DN 16 CF-F
VSR53
VSR54
9
8
Output (V)
7
6
5
4
3
2
1
0
1,0E-04
1,0E-03
1,0E-02
1,0E-01
1,0E+00
1,0E+01
1,0E+02
1,0E+03
99
99
Pressure (hPa)
48
Vout (V) = log (p(hPa)) + 5.5
(V (V) - 5.5)
p (hPa) = 10 out
C
30
69
Dimensions in mm
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Diaphragm piezo resistive / Pirani
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4307, nickel, gold, silicon oxide, tungsten, glass
_______________________________________________________________________________________
Measurement Range
1200 - 1 x 10-4 mbar (900 - 1 x 10-4 Torr), max. overpressure 4 bar abs.
_______________________________________________________________________________________
Accuracy
1200 - 10 mbar: ±0.3% full scale
10 - 2 x 10-3 mbar: ±10% from reading
_______________________________________________________________________________________
Repeatability
1200-10 mbar: ±0.1 % full scale,
10-2x10-3 mbar: ±2% from reading
_______________________________________________________________________________________
Reaction Time
1200 - 10 mbar: < 30ms (piezo)
10 - 2 x 10-3 mbar: < 100 ms (Pirani)
_______________________________________________________________________________________
Voltage Supply
20 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
VSR53D/DL, VSR54D/DL: SubD 15pol., male, lockable
VSR53E, VSR54E: M12 circular connector, female, lockable,
1x A standard, 5pol., 2x D coded, 4 pol.
_______________________________________________________________________________________
Power Consumption
2.5 W, additionally 0.8 W for EtherCAT / relays /LCD
_______________________________________________________________________________________
Operating Temperature
+5...+60°C (rel. humidity max . 80% at 30°C noncondensing)
_______________________________________________________________________________________
Storage Temperature
-40...+65°C
_______________________________________________________________________________________
Max. Bake Out Temperature
125°C at the flange
_______________________________________________________________________________________
Output Signal
0-10 VDC, measuring range 1.5 to 8.58 VDC, logarithmic,
1V / decade, load resistor > 10 k W
(VSR53D/DL, VSR54D/DL)
_______________________________________________________________________________________
Serial Interface
RS485: 9.6 kBd to 115 kBd, address switch 1 - 16
_______________________________________________________________________________________
Switch Points
2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
_______________________________________________________________________________________
Vacuum Connection
DN 16 ISO-KF (VSR53), DN 16 CF-F (VSR54)
_______________________________________________________________________________________
Protection Class
IP54 (VSR53E, VSR54E), IP40 (VSR53D/DL, VSR54D/DL)
_______________________________________________________________________________________
Weight
220 g (VSR53D)
_______________________________________________________________________________________
• VSR53D
Combi transducer piezo-Pirani,
1200 - 1 x 10-4 mbar,
DN16 ISO-KF connection,
output RS485 and 0-10V
• VSR53DL
As VSR53D, with LCD display
• VSR53E
As VSR53D,
output RS485 and EtherCAT
• VSR54D
Combi transducer piezo-Pirani,
1200 - 1 x 10-4 mbar,
DN16 CF-F connection,
output RS485 and 0-10V
• VSR54DL
As VSR54D, with LCD display
• VSR54E
As VSR54D,
output RS485 and EtherCAT
Accessories:
• SLN4
Plug-in power supply 24 V
• SLKUSB
Interface converter RS485-USB
• VGR
VacuGraphTM software for Windows
• W1515002
Measuring cable for VD12 and
VD10, shielded, 2 m
• W1515006
As W1515002, 6 m
• W1515020
As W1515002, 20 m
• Replacement sensor heads
B_VSR53, B_VSR54
Alterations reserved (VSRA03)
VSP
Smartline Vacuum Transducer
Absolute Pressure 1000 to 1 x 10-4 mbar
The processor controlled VSP with
robust helix filament is ideal for
precise measurements in the fine
vacuum range.
Smartline represents cutting edge
technology providing safe, precise
and cost effective process control.
Sm rt line
Typical Applications
Benefits
• Analysis instruments
• Durable Pirani helix filament
• Operational control of roughing
pumps and vacuum plants
• High resolution
• Safety circuits in vacuum systems
• Vacuum furnaces
• Leakage tests
• Freeze drying
• Process engineering
• Vacuum centrifuges
• Good accuracy and excellent
reproducibility
• Two independent, potential-free
relay switch points
• Short response time
• Filament is protected against oil
and solvent vapors by a metal
screen
• Stable measurements due to
optimized temperature
compensation
• Small volume of the measuring cell
e. g. 1,8 cm3 for VSP63D
• Digital RS485 interface and
additional analog output signal
1.5-8.5 V or EtherCAT
• Digital adjustment of zero and
atmospheric pressure via
pushbutton or interface
• Large, integrated LCD display with
background illumination
(VSP63DL, VSP64DL)
• Display flashes in bright red color in
case of error, compared to green
ligthing in the normal mode
(VSP63DL, VSP64DL)
• Easy connection with PLCs
• The digital output signal
can be transmitted error-free
over long distances (up to 500 m)
• Metal sealed stainless steel
sensor, suitable for UHV
applications
• Baud rate 9.6 kBd to 115 kBd
• Easily replaceable sensor heads
with stored calibration data
• Protection class IP54
(VSP63E/VSP64E)
• LEDs for device status and
switch points
• Vacuum connection by stainless
steel small flange DN 16 ISO-KF or
conflat flange DN 16 CF-F
• Suitable for Thyracont
2 and 4 channel display and
control units VD12 / VD10
• Rugged, EMI-proof metal housing
VSP63
VSP64
9
8
Output (V)
7
6
5
4
3
2
1
0
1,0E-04
1,0E-03
1,0E-02
1,0E-01
1,0E+00
1,0E+01
1,0E+02
1,0E+03
99
99
Pressure (hPa)
48
Vout (V) = log (p(hPa)) + 5.5
(V (V) - 5.5)
p (hPa) = 10 out
C
30
69
Dimensions in mm
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Pirani
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainless steel 1.4307, nickel, tungsten, glass
_______________________________________________________________________________________
Measurement Range
1000 - 1 x 10-4 mbar (750 - 1 x 10-4 Torr), max. overpressure 4 bar abs.
_______________________________________________________________________________________
Accuracy
1000 - 20 mbar: ca. ±30 % from reading
20 - 2 x 10-3 mbar: < ±10 % from reading
< 2 x 10-3 mbar: < factor 2
_______________________________________________________________________________________
Repeatability
±2% from reading
_______________________________________________________________________________________
Reaction Time
< 100 ms
_______________________________________________________________________________________
Voltage Supply
20 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
VSP63D/DL, VSP64D/DL: SubD 15pol., male, lockable
VSP63E, VSP64E: M12 circular connector, female, lockable,
1x A standard, 5pol., 2x D coded, 4 pol.
_______________________________________________________________________________________
Power Consumption
2.5W additonally 0.8 W for EtherCAT /relays / LCD
_______________________________________________________________________________________
Operating Temperature
+5...+60°C (rel. humidity max . 80% at 30°C noncondensing)
_______________________________________________________________________________________
Storage Temperature
-40...+65°C
_______________________________________________________________________________________
Max. Bake Out Temperature
125°C at the flange
_______________________________________________________________________________________
Output Signal
0-10VDC, measuring range 1.5 to 8.5 VDC, logarithmic,
1V / decade, load resistor > 10k W
(VSP63D/DL, VSP64D/DL)
_______________________________________________________________________________________
Serial Interface
RS485: 9.6 kBd to 115 kBd, address switch 1 - 16
_______________________________________________________________________________________
Switch Points
2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
_______________________________________________________________________________________
Vacuum Connection
DN 16 ISO-KF (VSP63), DN 16 CF-F (VSP64)
_______________________________________________________________________________________
Protection Class
IP54 (VSP63E, VSP64E), IP40 (VSP63D/DL, VSP64D/DL)
_______________________________________________________________________________________
Weight
190 g
_______________________________________________________________________________________
• VSP63D
Pirani transducer
1000 - 1 x 10-4 mbar,
DN 16 ISO-KF connection
output RS485 and 0-10V
• VSP63DL
As VS63D, with LCD display
• VSP63E
As VS63D,
output RS485 and EtherCAT
• VSP64D
Pirani transducer
1000 - 1 x 10-4 mbar,
DN 16 CF-F connection,
output RS485 and 0-10V
• VSP64DL
As VSP64D, with LCD display
• VSP64E
As VSP64D,
output RS485 and EtherCAT
Accessories:
• SLN4
Plug-in power supply 24 V
• SLKUSB
Interface converter RS485-USB
• VGR
VacuGraphTM software for Windows
• W1515002
Measuring cable for VD12 and
VD10, shielded 2 m
• W1515006
As W1515002, 6 m
• W1515020
As W1515002, 20 m
• Replacement sensor heads
B_VSP63, B_VSP64
Alterations reserved (VSPA03)
VSM
Smartline Vacuum Transducer
Absolute Pressure 1000 to 5 x 10-9 mbar
The digital combination transducer
VSM (Pirani/cold cathode) measures
absolute pressure from atmospheric
pressure to ultrahigh vacuum.
Microcontroller intelligence
automatically manages the optional
interplay of both vacuum sensors.
Smartline represents cutting edge
technology providing safe, precise
and cost effective process control.
Sm rt line
Typical Applications
Benefits
• Analysis technology
• Wide range sensor
Pirani / cold cathode
• Coating plants and
vapor deposition
• Vacuum furnaces
• Process engineering
• Measuring and controlling in
fine and ultrahigh vacuum
• Sputtering plants
• The cold cathode sensor is
automatically controlled
by the Pirani
• Pirani with extended range allows
operation of cold cathode at lower
pressure and increases lifetime
• Robust sensor design
• Small volume of the measuring cell
e. g. 9 cm3 for VSM77D
• Excellent ignition behavior
• Insensitive against inrush of air
• Digital RS485 interface and
additional analog output signal
1.819-8.6 V or EtherCAT
• Digital adjustment of zero and
atmospheric pressure via
pushbutton or interface
• Large, integrated LCD display with
background illumination
(VSM77DL, VSM79DL)
• Display flashes in bright red color in
case of error, compared to green
ligthing in the normal mode
(VSM77DL, VSM79DL)
• Easy connection with PLCs
• Two independent, potential-free
relay switch points
• The digital output signal
can be transmitted error-free
over long distances (up to 500 m)
• LEDs for device status and
switch points
• Baud rate 9.6 kBd to 115 kBd
• Easily replaceable sensor heads
with stored calibration data
• Correct pressure readings by
means of separate gas type
correction factors for Pirani and
cold cathode
• Suitable for Thyracont
2 and 4 channel display and
control units VD12 / VD10
• Rugged, EMI-proof metal housing
• Vacuum connection by stainless
steel small flange DN 25 ISO-KF or
conflat flange DN 40 CF-F
VSM77
VSM79
10
9
8
Output (V)
7
6
5
4
3
2
0,0000001 0,00001
0,001
0,1
10
Pressure (hPa)
139
139
1
1E-09
48
Vout /V = 0,6 log (p/mbar) + 6,8
p /mbar = 10 ( (Vout /V – 6,8) / 0,6 )
69
40
Dimensions in mm
Technical Data
_______________________________________________________________________________________
Measuring Principle
Pirani / inverted magnetron, both depending on gas type
_______________________________________________________________________________________
Material In Contact With Vacuum
Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic
_______________________________________________________________________________________
Measurement Range
1000 - 5 x 10-9 mbar (750 - 5 x 10-9 Torr), max. overpressure 4 bar abs.
_______________________________________________________________________________________
Accuracy
1000 - 10 mbar: < 30 % from reading
10 - 2 x 10-3 mbar: < 10 % from reading
2 x 10-3 mbar - 1 x 10-8 mbar: < 25% from reading
_______________________________________________________________________________________
Repeatability
10 - 1 x 10-2 mbar: Approx. ±2% from reading
1 x 10-2-1 x 10-8 mbar: Approx. ±7% from reading
_______________________________________________________________________________________
Response Time
200 ms (1s for activating the cold cathode)
_______________________________________________________________________________________
Cathode Voltage
Max. 2.5 kV
_______________________________________________________________________________________
Voltage Supply
20 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
VSM77D/DL, VSM79D/DL: SubD, 15pol., male, lockable
VSM77E, VSM79E: M12 circular connector, female, lockable,
1x A standard, 5pol., 2x D coded, 4pol.
_______________________________________________________________________________________
Power Consumption
Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD
_______________________________________________________________________________________
Operating Temperature
+5...+60°C
_______________________________________________________________________________________
Storage Temperature
-40...+65°C
_______________________________________________________________________________________
Maximum Bake Out Temperature
160°C at flange (electronic detached)
_______________________________________________________________________________________
Output Signal
0 - 10 VDC, measuring range 1.819 - 8.6 VDC, log., 0.6 V/decade
load resistor > 10k W
(VSM77D/DL, VSM79D/DL)
_______________________________________________________________________________________
Serial Interface
RS485: 9.6 kBd to 115 kBd, address switch 1 - 16
_______________________________________________________________________________________
Switch Points
2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
_______________________________________________________________________________________
Vacuum Connection
DN 25 ISO-KF (VSM77), DN 40 CF-F (VSM79)
_______________________________________________________________________________________
Protection Class
IP54 (VSM77E, VSM79E), IP40 (VSM77D/DL, VSM79D/DL)
_______________________________________________________________________________________
Weight
Approx. 555 g
_______________________________________________________________________________________
Product Codes
• VSM77D
Combi transducer Pirani/inverted
magnetron, 1000 - 5 x 10-9 mbar,
DN 25 ISO-KF connection
output 0 - 10 V and RS485
• VSM77DL
As VSM77D, with LCD display
• VSM77E
As VSM77D,
output RS485 and EtherCAT
• VSM79D
Combi transducer Pirani/inverted
Magnetron, 1000 - 5 x 10-9 mbar,
DN 40 CF-F connection
output 0 - 10 V and RS485
• VSM79DL
As VSM79D, with LCD display
• VSM79E
As VSM79D,
output RS485 and EtherCAT
Accessories:
• SLN4
Plug-in power supply 24 V
• SLKUSB
Interface converter RS485-USB
• VGR
VacuGraphTM software for Windows
• W1515002
Measuring cable for VD12 and
VD10, shielded 2 m
• W1515006
As W1515002, 6 m
• W1515020
As W1515002, 20 m
• Replacement sensor heads
B_VSM77, B_VSM79
Alterations reserved (VSMA02)
VSH
Smartline Vacuum Transducer
Absolute Pressure 1000 to 5 x 10-10 mbar
The digital combination transducer
VSH (Pirani/hot cathode) measures
absolute pressure from atmospheric
pressure to ultrahigh vacuum.
Microcontroller intelligence
automatically manages the optional
interplay of both vacuum sensors.
Smartline represents cutting edge
technology providing safe, precise
and cost effective process control.
Sm rt line
Typical Applications
Benefits
• Analysis technology
• Wide range sensor
Pirani / Bayard Alpert
• Coating plants and
vapor deposition
• Sputtering plants
• Measuring and controlling in
the fine and ultrahigh vacuum range
• Vacuum furnaces
• Process engineering
• Space simulation chambers
• The hot cathode sensor is
automatically controlled
by the Pirani
• Pirani with extended range allows
operation of hot cathode at lower
pressure and increases lifetime
• Excellent accuracy and
repeatability
• Low thermal and electrical
interference with the vacuum
process
• Small volume of the measuring cell
e. g. 20 cm3 for VSH88D
• Bayard-Alpert with blowing
resistant, yttrium coated
double filament
• Digital RS485 interface and
additional analog output signal
1.219-8.6 V or EtherCAT
• Digital adjustment of zero and
atmospheric pressure via
pushbutton or interface
• Large, integrated LCD display with
background illumination
(VSH88DL, VSH89DL)
• Display flashes in bright red color in
case of error, compared to green
ligthing in the normal mode
(VSH88DL, VSH89DL)
• Easy connection with PLCs
• The digital output signal
can be transmitted error-free
over long distances (up to 500 m)
• Baud rate 9.6 kBd to 115 kBd
• Insensitive against inrush of air
• Rugged, EMI-proof metal housing
• Two independent, potential-free
relay switch points
• Vacuum connection by stainless
steel small flange DN 40 ISO-KF or
conflat flange DN 40 CF-F
• LEDs for device status and
switch points
• Easily replaceable sensor heads
with stored calibration data
• Correct pressure readings by
means of separate gas type
correction factors for Pirani and
hot cathode
• Suitable for Thyracont
2 and 4 channel display and
control units VD12 / VD10
VSH88
Output (V)
VSH89
10,00
9,00
8,00
7,00
6,00
5,00
4,00
3,00
2,00
1,00
1,0E-09 1,0E-07 1,0E-05 1,0E-03 1,0E-01 1,0E+01
141
141
Pressure (hPa)
48
Vout /V = 0,6 log (p/mbar) + 6,8
p /mbar = 10( (Vout /V – 6,8) / 0,6 )
69
55
70
Dimensions in mm
Technical Data
Product Codes
_______________________________________________________________________________________
Measuring Principle
Pirani / Bayard Alpert, depending on gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass
_______________________________________________________________________________________
Measurement Range
1000 - 5 x10-10 mbar (750 - 5 x10-10 Torr), max. overpressure 4 bar abs.
_______________________________________________________________________________________
Accuracy
1000 - 10 mbar: < 30 % from reading
10 - 1 x 10-8 mbar: < 10 % from reading
_______________________________________________________________________________________
Repeatability
±2 % (10 - 1 x 10-2 mbar), 5% (1 x10-2 - 1 x 10-8 mbar)
_______________________________________________________________________________________
Response Time
< 200 ms (2 s while switching BA emission current)
_______________________________________________________________________________________
Emission Current
Automatic switching 10 µA, 100 µA, 1 mA, 2 mA
_______________________________________________________________________________________
Degas
Ohmic heating of the anode
_______________________________________________________________________________________
Voltage Supply
20 - 30 VDC
_______________________________________________________________________________________
Electrical Connection
VSH88D/DL, VSH89D/DL: SubD, 15pol., male, lockable
VSH88E, VSH89E: M12 circular connector, female, lockable,
1x A standard, 5pol., 2x D coded, 4pol.
_______________________________________________________________________________________
Power Consumption
Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD
_______________________________________________________________________________________
Operating Temperature
+5...+60°C
_______________________________________________________________________________________
Storage Temperature
-40...+65°C
_______________________________________________________________________________________
Maximum Bake Out Temperature
180°C at the flange (electronic detached)
_______________________________________________________________________________________
Output Signal
0 - 10 VDC, measuring range 1.219 - 8.6 VDC, log., 0.6 V/decade
load resistor > 10k W
(VSH88D/DL, VSH89D/DL)
_______________________________________________________________________________________
Serial Interface
RS485: 9,6 kBd to 115 kBd, address switch 1 - 16
_______________________________________________________________________________________
Switch Points
2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
_______________________________________________________________________________________
Vacuum Connection
DN 40 ISO-KF (VSH88), DN 40 CF-F (VSH89)
_______________________________________________________________________________________
Protection Class
IP54 (VSH88E, VSH89E), IP40 (VSH88D/DL, VSH89D/DL)
_______________________________________________________________________________________
Weight
Approx. 555 g
_______________________________________________________________________________________
• VSH88D
Combi transmitter Pirani/Bayert
Alpert, 1000 - 5 x 10-10 mbar,
DN 40 ISO-KF connection,
output 0 - 10 V log. and RS485
• VSH88DL
As VSH88D, with LCD display
• VSH88E
As VSH88D,
output RS485 and EtherCAT
• VSH89D
Combi transmitter Pirani/Bayert
Alpert, 1000 - 5 x 10-10 mbar,
DN 40 CF-F connection,
output 0 - 10 V log. and RS485
• VSH89DL
As VSH89D, with LCD display
• VSH89E
As VSH89D,
output RS485 and EtherCAT
Accessories
• SLN4
Plug-in power supply 24 V
• SLKUSB
Interface converter RS485-USB
• VGR
VacuGraphTM software for Windows
• W1515002
Measuring cable for VD12 and
VD10, shielded 2 m
• W1515006
As W1515002, 6 m
• W1515020
As W1515002, 20 m
• Replacement sensor heads
B_VSH88, B_VSH89
Alterations reserved (VSHA03)
VD12
2 Channel Vacuum Display And Control Unit
Absolute Pressure 1400 to 5 x 10-10 mbar
VD12 is an intelligent control unit for
applications in apparatus and plant
engineering or special equipment
construction.
It offers two relay switches, one
common or two independent set
points.
19inch cassette 14 HP x 3 RE.
Typical Applications
Benefits
• Industrial plant engineering
• Simultaneous control of
2 measuring channels
• Large graphic LCD display with
background illumination
• Can be combined with all
Smartline and 0-10 V Analogline
transducers
• Comfortable operation by menudriven operator guidance
• Process automation
• Apparatus engineering, e. g.
process control and documentation
for quality assurance
• Mechanical engineering
• Packaging technology
• Chemical process engineering
(vacuum mixers)
• Pressure display in
mbar, Torr, hPa
• Universal switched mode
power supply 95 - 265 VAC
• 2 potential-free relay switches
• Two- or three-step control
• Robust 19" metal cassette with
foil-protected front panel
• EMI compatible
• Adjustable gas type correction
factor
• USB interface for process
documentation and setpoint
programming
• VacuGraph software:
Documentation and evaluation of
vacuum processes, programming
set points, remote control
• On demand the controller can be
configured ex works according to
the customer‘s requirements
17
8.0
128.4
106.0
66.0
Dimensions in mm
70.8
Technical Data
Product Codes
_______________________________________________________________________________________
Suitable Vacuum Transducers
All Smartline transducers,
VSC43MV, VSP63MV, VSP64MV, VCP63MV
_______________________________________________________________________________________
Display
LCD graphic display, background illumination,
resolution 128x64
_______________________________________________________________________________________
Display Refresh Rate
2 Hz (0.5 s)
_______________________________________________________________________________________
Sample Rate
RS485: 12,5 Hz (80 ms) / channel
0-10V: 50 Hz (20 ms) /channel
_______________________________________________________________________________________
Power Supply
95 - 265 VAC, 50/60 Hz
_______________________________________________________________________________________
Power Consumption
Max. 25 W incl. transducer
_______________________________________________________________________________________
Fuse
0.8 A/T
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Measuring Inputs
1 x RS485, SubD male, 15pole, for Smartline
2 x Amphenol C91E, 6pole, 0-10 V, female, for Analogline
_______________________________________________________________________________________
Control Outputs
2 x relay contact, potential free change over switches,
Phoenix strip terminal 6-pole,
lifetime > 300.000 cycles,
4 A / 250 VAC, 2 A / 45 VDC
_______________________________________________________________________________________
Serial Interface
Mini-USB, Type B, 5pole, female, Virtual Com Port Protocol
_______________________________________________________________________________________
Protection Class
IP20
_______________________________________________________________________________________
Weight
750 g
_______________________________________________________________________________________
• VD12S2
19inch cassette 14 HP x 3 RU, USB,
95 - 265 VAC
Complete Sets
• VD1253P (1200 - 1 x 10-4 mbar)
VD12 + VSR53D + cable 2 m
• VD1263P (1000 - 1 x 10-4 mbar)
VD12 + VSP63D + cable 2 m
• VD1277P (1000 - 5 x 10-9 mbar)
VD12 + VSM77D + cable 2 m
• VD1288P (1000 - 5 x 10-10 mbar)
VD12 + VSH88D + cable 2 m
Accessories:
• W1515002
Measuring cable RS485 for
Smartline transducers,
shielded, 2 m
• W1515006
As W1515002, 6 m
• VGR
VacuGraph Windows software
• WUSB0002
Interface cable USB, shielded, 2 m
Alterations reserved (12A01)
VD10
4 Channel Vacuum Display And Control Unit
Absolute Pressure 1000 to 5 x 10-10 mbar
VD10 is an intelligent control unit for
application in apparatus and plant
engineering or special equipment
construction.
Eight potential free relay switches
can be mapped to different
measuring channels.
Compact metal 19inch cassette
21 HP x 3 RU.
Sm rt line
Typical Applications
Benefits
• Industrial plant engineering
• Simultaneous control of up to
4 measuring channels
• Large graphic LCD display with
background illumination
• Coating plants
• Can be combined with
Smartline transducers
• Comfortable operation by menudriven operator guidance
• Vacuum furnaces
• 8 potential-free relay switches
• Apparatus engineering, e. g.
process control and
documentation for quality
assurance
• 2 programmable function keys
• USB interface for process
documentation
• Special equipment construction
• Pressure display in
mbar, Torr, hPa
• Process automation
• Universal switched mode
power supply 95 - 265 VAC
• Fail safe operation due to the
EMC compatible metal housing
•Foil-protected front panel
• VacuGraph software:
Documentation and evaluation of
vacuum processes, remote control
• On demand the controller can be
configured ex works according to
the customer‘s requirements
128.4
106.0
101.6
2.0
17
106.5
Dimensions in mm
Technical Data
Product Codes
_______________________________________________________________________________________
Suitable Vacuum Transducers
All Smartline transducers,
VSP63MV, VSP64MV, VCP63MV
_______________________________________________________________________________________
Display
LCD graphic display, background illuminated,
57 x 35 mm, floating point: 2 - 4 digits,
exponential, 2 digits mantissa, 1 digit exponent
_______________________________________________________________________________________
Display Refresh Rate
2 Hz (0.5 s)
_______________________________________________________________________________________
Sample Rate
5 Hz (200 ms) per channel (RS485-serial interface, digital)
30 Hz (33 ms) per channel (0 - 10 V input, analog)
_______________________________________________________________________________________
Power Supply
95 - 265 VAC, 50/60 Hz
_______________________________________________________________________________________
Power Consumption
Max. 45 W incl. transducer
_______________________________________________________________________________________
Fuse
2.0 A / T
_______________________________________________________________________________________
Operating Temperature
+5...+40°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Measuring Inputs
1 x RS485, SubD, 15pole, male, for Smartline
2 x 0 - 10 V Amphenol C91E, 6pole, female, f. VSP63MV, VSP64MV
_______________________________________________________________________________________
Control Outputs
8 x relay, normally open contact, SP assignable,
Phoenix strip terminal 16-pole,
lifetime > 1.000.000 cycles,
3 A, 250 VAC, 2 A 40 VD
_______________________________________________________________________________________
Serial Interface
Mini-USB, type B, 5pole, female, Virtual Com Port protocol
_______________________________________________________________________________________
Protection Class
IP20
_______________________________________________________________________________________
Weight
1100 g
_______________________________________________________________________________________
• VD10S8
4 channel display and control unit,
19" cassette 21 HP x 3 RU,
95 - 265 VAC
Accessories:
• W1515002
Measuring cable RS485 for
Smartline transducers,
shielded, 2 m
• W1515006
As W1515002, 6 m
• VGR
VacuGraph Windows software
• WUSB0002
USB interface cable, shielded, 2 m
Alterations reserved (10A02)
VGR
VacuGraphTM
Windows® Software
VacuGraphTM software can save
measurements, plot pressure
diagrams for graphical evaluation,
control your application in
combination with our vacuum control
units and calculate leakage rates.
VacuGraphTM is easy to use, self
explanatory and suitable for all
Thyracont instruments with either an
USB, RS 232 or RS 485 interface.
Operating Systems:
Windows Vista/7/8
(32bit and 64bit),
minimum resolution 1024 x 768
Typical Applications
Benefits
• Documentation of measurements
and pump down curves
• Saving of measurements
• Printing diagram
• Graphical display and evaluation of
measurements
• Logarithmic or linear pressure
scales
• Easy adjustment of gauge
parameters
• Units mbar, Torr or Pa
• Analysis of vacuum processes
• Visualization of pressure increase
• Programming set points
• Comparison of multiple plots
• Read out data of Thyracont
data loggers
• Easy installation and intuitive
operation
• Export data as ASCII text file
e. g. for Microsoft Excel
• Leakage rate calculator
• PC based control by programming
setpoints
• Remote control of vacuum
controllers (keyboard lock/unlock,
contoller active/inactive,...)
• Comfortable setting of instrument
parameters in the configuration
board
Features
Product Codes
VD8
VD6
VD12
VD10
VSR
VSP
VSM
VSH
• VGR
VacuGraphTM Windows software
x
x
x
x
x
x
x
x
Accessories:
Program set points
x
x
x
x
x
x
Set hystereses
x
x
• WUSB0002
Interface cable 2m, for instruments
with USB interface
Start / Stop Control
x
x
x
Keyboard lock
x
x
x
x
x
Read measurements
Read out data logger
x
Set data logger rate
x
Gas correction factors
x
• W0800002
PC cable RS232, 2 m
x
x
x
Degas
Instrument configuration
x
x
x
x
x
x
x
Alterations reserved (VGRA04)
THYRACONT
Vacuum Instruments GmbH
Max-Emanuel-Straße 10
94036 Passau, Germany
Tel.: +49 (0)851 95986 0
Fax: +49 (0)851 95986 40
Email: info@thyracont-vacuum.de
www.thyracont-vacuum.com
Expertise and Responsiveness: +49 (0)851 95986 28
V a c u u m
I n s t r u m e n t s
VD9CV
VD9CV are complete sets for
continuous vacuum control with
transducer(s) and proportional
valves for evacuation and venting.
It offers precise and smooth PI-3state-control for optimal process
regulation.
The robust, shielded 19" metal
cassette 14 HP x 3 RU and a
protective front foil provide reliable
and safe operation.
1 Channel Vacuum Display and Control Unit
Absolute Pressure 1400 to 1 x 10-3 mbar
1000
800
600
400
200
Typical Applications
Benefits
• Intelligent control unit for regulating
process pressure in the rough and
fine vacuum range
• Superior control characteristic
due to silent, continuously
regulated valves for evacuation
and venting, which regulate their
opening width depending on
operating requirements
• Optimization of processes and
products
• Regulation of pressure ramps
and profiles via serial interface
(external set point programming)
• Process automation
• Chemical process engineering
• Analytical applications
• Appliance engineering
• 1-channel-controller, can be
combined with 2 transducers for
covering a wider range (e.g. 14001 x 10-3 mbar) generating one
continuous pressure display
• Easy to use
• Downstream control, evacuating
valve included
• Variable gas type correction factor
• Upstream control on request
• Bright LCD display with
background illumination
• Simple wiring, valves are directly
driven by the controller
• Supports programming of
set points via serial interface
(ramps, etc.)
• Universal switched mode
power supply 95 - 265 VAC
• Pressure display in
mbar, Torr, hPa
• Shielded 19" cassette with
foil-protected front panel
• VacuGraph software:
documentation and evaluation of
vacuum processes, programming
set points and time based pressure
profiles, remote control
DN16KF
m
m
106,0 mm
60
128,4 mm
VD9
45,5 x
20,0 m
m
63 mm
aerating valve
66,0 mm
72 mm
Vent
vacuum valve
70,8 m
m
m
75
DN16KF
DN16KF
m
vac
147 mm
17
8,0
mm
set
88 mm
Technical Data
_______________________________________________________________________________________
Display
Vacuum
Alpha-numeric LCD display, background illuminated,
4 digits, 45 x 20 mm, floating point, 2 - 4 digit
exponential, 2 digits mantissa, 1 digit exponent
_______________________________________________________________________________________
Display Refresh Rate
2 Hz (0,5 s)
_______________________________________________________________________________________
Sample Rate
20 Hz (50 ms)
_______________________________________________________________________________________
Power Supply
95 - 265 VAC, 50 / 60 Hz
_______________________________________________________________________________________
Power Consumption
Max. 15 W inclusive transducer
_______________________________________________________________________________________
Fuse
0.8 A/T
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Measuring Inputs
2 x 4 - 20 mA, SubD, 9-pole, female, for VSC42MA4, VSP52MA4
_______________________________________________________________________________________
Control Outputs
2 x transistor control output for 24 V valve
_______________________________________________________________________________________
Analog Output
0-10 V, >10 kW, jack plug, 2-pole
_______________________________________________________________________________________
Serial Interface
RS232, SubD, 9-pole, female; from fall 2009 on
Mini-USB, type B, 5-pole, female, Virtual Com Port protocol
_______________________________________________________________________________________
Protection Class
IP20
_______________________________________________________________________________________
Weight
750 g (without valves)
_______________________________________________________________________________________
Product Codes
• VD92CV (1400 - 1 mbar)
VD9CV + VSC42MA4 + valves
VPROP40 and VPROP16, cables 2 m
• VD95CV (1400 - 1 x 10-3 mbar)
As above, with additional
transducer VSP52MA4
Accessories:
• VPROP16
Continuous valve, stainless steel,
24 VDC, NW 1.6 mm
• VPROP40
Continuous valve, stainless steel,
24 VDC, NW 4 mm
• DC1VV
On/Off valve, nickel coated,
24 VDC, NW 2.2
• DC1VCR
On/Off valve PTFE, 24 VDC, NW 4
• W0900002
Measuring cable, shielded, 2 m
• W0900006
Measuring cable, shielded, 6 m
• VGR
VacuGraph Windows software
• WUSB0002
Interface cable USB, shielded, 2 m
VD9
1 Channel Vacuum Display And Control Unit
Absolute Pressure 1400 to 1 x 10-9 mbar
VD9 is an intelligent control unit for
applications in apparatus and plant
engineering or special equipment
construction.
It offers two relay switches, one joint
or two independent set points.
Compact metal EMC compatible
19inch cassette 14 HP x 3 RE.
A front foil protects the instrument
from water splashing and can be
easily cleaned.
Typical Applications
Benefits
• Industrial plant engineering
• High contrast LCD display with
background illumination
• Supports programming of
set points via serial interface
• Pressure display in
mbar, Torr, hPa
• VacuGraph software:
Documentation and evaluation of
vacuum processes, programming
set points and time based
pressure profiles, remote control
• Process automation
• Apparatus engineering, e. g.
process control and documentation
for quality assurance
• Mechanical engineering
• Packaging technology
• Chemical process engineering
(vacuum mixers)
• Universal switched mode
power supply 95 - 265 VAC
• Easy to use
• 2 relay switches
• On-off or three-position control
• 1 channel controller, can be
combined with 2 transducers to
cover a wider range (e.g. 1400 1 x 10-9 mbar) providing a
continuous pressure display
• Control optionally with PI
characteristic, continuous PI
control output configurable
• The controller is configured at the
factory to customer‘s specification
• Shielded 19" metal cassette with
foil-protected front panel
• Versions made to customer‘s
specification on request (e.g.
analog set point adjustment)
• Variable gas type correction factor
106,0 mm
66,0 mm
128,4 mm
VD9
45,5 x
20,0 m
m
17
8,0
mm
set
70,8 m
m
Technical Data
Product Codes
_______________________________________________________________________________________
Suitable Vacuum Transducers
VCC200MA4, VSC43MA4, VSC43MV, VSP63MA4, VSP63MV,
VSP63MVCF, VSM72MV, VSM72MVCF, VSH82MV, VSH82MVCF
_______________________________________________________________________________________
Display
Alphanumeric LCD display, background illumination,
4 digits, 45 x 20 mm, floating point: 2 - 4 digits
exponential, 2 digits mantissa, 1st. exponent
_______________________________________________________________________________________
Display Refresh Rate
2 Hz (0.5 s)
_______________________________________________________________________________________
Sample Rate
20 Hz (50 ms)
_______________________________________________________________________________________
Power Supply
95 - 265 VAC, 50/60 Hz
_______________________________________________________________________________________
Power Consumption
Max. 15 W incl. transducer
_______________________________________________________________________________________
Fuse
0.8 A/T
_______________________________________________________________________________________
Operating Temperature
+5...+50°C
_______________________________________________________________________________________
Storage Temperature
-20...+60°C
_______________________________________________________________________________________
Measuring Inputs
2 x 4 - 20 mA, SubD, 9-pole, female, for VSC43MA4, VSP63MA4
1 x 0 - 10 V Amphenol C91E, 6-pole, female, for VSC43MV,
VSP63MV, VSP63MVCF, VSM72MV, VSM72MCF, VSH82MV,
VSH82MVCF
_______________________________________________________________________________________
Control Outputs
2 x relay contact, potential free change over switches,
Phoenix strip terminal 6-pole:
4 A / 250 VAC, 2 A / 45 VDC
_______________________________________________________________________________________
Analog Output
0 - 10 V, 10 kW
, jack plug, 2-pole
_______________________________________________________________________________________
Serial Interface
RS232, SubD, 9-pole, female
_______________________________________________________________________________________
Protection Class
IP20
_______________________________________________________________________________________
Weight
750 g
_______________________________________________________________________________________
• VD9S2
19inch cassette 14 HP x 3 RU,
RS232, analog output, 95 - 265 VAC
Complete Sets
• VD92P (1400 - 1 mbar)
VD9S2 + VSC43MV + cable 2 m
• VD96P (1000 - 1 x 10-4 mbar)
VD9S2 + VSP63MV + cable 2 m
• VD97P (1000 - 5 x 10-9 mbar)
VD9S2 + VSM72MV + cable 2 m
• VD98P (1000 - 1 x 10-9 mbar)
VD9S2 + VSH82MV + cable 2 m
Accessories:
• VGR
VacuGraph software for windows
• W0800002
Interface cable RS232, 2 m
Alterations reserved (9A02)
DC1
Vacuum Controller / Distillation Controller
Absolute Pressure 1400 to 1 mbar
The universal DC1 vacuum controller
combines many years of experience
from users and developers.
The compact unit has an integrated
venting valve and provides power for
an external vacuum valve and all
necessary control outputs.
For secure and simple operation,
clear instructions and information
are displayed on the large format
screen.
Typical Applications
Benefits
• Vacuum distillation
• Integrated ceramic sensor,
chemically resistant
• Manual or automatic operation
mode
• Integrated venting valve
• Clearly structured display
shows operation mode,
actual pressure and set point
• Chemical process engineering
• Analysis instruments
• Workplaces with centralized
vacuum supply
• Laboratory workplaces
• Automatic filtration
• Patented automatic mode to
approach and find boiling points
in vacuum evaporators
• Universal switched mode
power supply 95 - 265 VAC
• Timer for distillation period
• Programmable pressure
ramp down
• Connectors for vacuum valve and
cooling water valve
• Easy to use
• Manual operation mode allows
intervention in pressure control
quickly and at anytime
• Serial interface for process data
collection
• VacuGraph software for
saving and plotting
measurements on a PC
85 mm
I
0
aeration valve (internal)
31 mm
145 mm
55 mm
vacuum
chamber
75 mm
Technical Data
Product Codes
_______________________________________________________________________________________
Display
3 displays with 7-segment LED´s for
mode / set point / actual pressure (3 / 3 / 4 digits)
_______________________________________________________________________________________
Display Refresh Rate
2Hz (500 ms)
_______________________________________________________________________________________
Sampling Rate
50 Hz (20 ms)
_______________________________________________________________________________________
Measuring Principle
Piezo resistive, independent of gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Al2O3 -ceramic, PP, Viton®
_______________________________________________________________________________________
Measurement Range
1400 - 1 mbar (1050 - 1 Torr), admitted overpressure 4 bar absolute
_______________________________________________________________________________________
Accuracy
Max. ±0.5% full scale (linearity / hysteresis / repeatability)
_______________________________________________________________________________________
Resolution
1 mbar (Torr)
_______________________________________________________________________________________
Response Time
20 ms
_______________________________________________________________________________________
Power Supply
95 - 265 VAC 50 / 60 Hz
_______________________________________________________________________________________
Electrical Connections
6-pole, female for external valve (24 V, 5 VA)
- vacuum valve
- cooling water valve
serial interface: SubD 9-pole, female
_______________________________________________________________________________________
Power Consumption
Max. 13 W
_______________________________________________________________________________________
Fuse
Thermic Fuse
_______________________________________________________________________________________
Operating Temperature
0...+40 °C
_______________________________________________________________________________________
Storage Temperature
-10...+60°C
_______________________________________________________________________________________
Vacuum Connection
G 1/4 female thread, hose nozzle 8 mm
_______________________________________________________________________________________
Protection Class
IP20
_______________________________________________________________________________________
Weight
Approx. 550 g
_______________________________________________________________________________________
•DC1/1
Vacuum controller, 1400 - 1 mbar,
with integrated ceramic sensor and
venting valve, 95 - 265 VAC
Accessories:
•DC1SH
Stand holder
•DC1VV
Vacuum valve, NW 2.2 mm, nickel
coated, connection G1/4 and hose
nozzle 8 mm, 1.5 m cable
•DC1VCR
Vacuum valve, NW 4 mm,
chemically resistant (PTFE),
connection G1/4 and hose nozzle 8
/ 12 mm, 1.5 m cable
•VGR
VacuGraph Windows software
•W0800002
PC cable RS232, 2 m
DC1S
Vacuum Controller / Distillation Controller
Absolute Pressure 1400 to 1 mbar
The DC1S controls vacuum processes
by means of internal, continuous
valves for vacuum and venting.
It offers high control accuracy and
operates independently of type and
pump speed of the applied vacuum
source.
Fuzzy logic technology allows the
controller to adjust to varying
process conditions.
Worldwide Patented
Typical Applications
Benefits
• Vacuum distillation, rotary
evaporators
• Continuously regulated
proportional valves for evacuation
and venting mean superior
vacuum control
• Chemical process engineering
• Analysis instruments
• Workplaces with centralized vacuum
supply
• Automatic filtration
• Regulation of complex pressure
profiles
• Laboratory workplaces
• Process automation
• Casting
• Automatic adjustment to variable
process conditions using self
optimizing fuzzy logic based
control
• Internal valves and an integrated
sensor minimize the effort for
installation
• Chemically resistant ceramic
sensor with Kalrez® sealing
• Valves made of robust
polypropylene
• Pressure units mbar, Torr
• Clear data display information
shows operation mode,
actual pressure and set point
• Easy to use
• Patented automatic mode to
approach and find boiling points
in vacuum evaporators
• Manual operation mode allows
intervention in pressure control
quickly and at anytime
• Programmable pressure ramp
down for optimal evaporation rates
• Available as desktop unit or for
panel mounting; rod for stand
support available
• Reduction of solvent foaming and
delay in boiling
• Universal switched mode
power supply 95 - 265 VAC
• The controller is suitable for any
kind of vacuum source and can be
easily integrated into existing
appliances
• Serial interface for process data
collection and programming set
points
• Suitable for small volumes
• VacuGraph software for saving
and plotting measurements on a PC
• Silent valve operation
mbar
Torr
set
stop
auto
man
50mm
setpoint
115 mm
mode
DC1 S
continuous
aerating valve
(integrated)
I
0
43mm
85 m
110 mm
continuous
vacuum valve
(integrated)
m
110 mm
155mm
Fuzzy
Control
Vacuum
Chamber
151mm
Technical Data
Product Code
_______________________________________________________________________________________
•DC1S
Vacuum controller DC1S, 1400 1 mbar, with integrated ceramic
sensor and continuous valves for
vacuum and venting, 95 - 265 VAC
Display
3 displays with 7-segment LEDs for
display mode / set point / actual pressure (3 / 3 / 4 digits)
_______________________________________________________________________________________
Display Refresh Rate
2 Hz (500 ms)
_______________________________________________________________________________________
Sampling Rate
50 Hz (20 ms)
_______________________________________________________________________________________
Measuring Principle
Piezo resistive, independent of gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Al2O3-ceramic, PP, Kalrez®
_______________________________________________________________________________________
Measurement Range
1400 - 1 mbar (1050 - 1 Torr), admitted overpressure 2 bar absolute
_______________________________________________________________________________________
Accuracy
Max. ±0.5% full scale (linearity / hysteresis / repeatability)
_______________________________________________________________________________________
Resolution
1 mbar (Torr)
_______________________________________________________________________________________
Measuring Rate
20 ms
_______________________________________________________________________________________
Power Supply
95 - 265 VAC 50 / 60 Hz
_______________________________________________________________________________________
Electrical Connections
6-pole, round jack, female for cooling water valve (24 V, 5 VA)
RS232; SubD 9-pole, female
_______________________________________________________________________________________
Power Consumption
Approx. 13 W
_______________________________________________________________________________________
Fuse
Thermal fuse
_______________________________________________________________________________________
Operating Temperature
0...+40°C
_______________________________________________________________________________________
Storage Temperature
-10...+60°C
_______________________________________________________________________________________
Vacuum Connection
G 1/4, hose nozzle 8 mm (optionally DN 16 ISO-KF)
_______________________________________________________________________________________
Recorder Output
0-10 VDC, resolution 4 mbar
_______________________________________________________________________________________
Protection Class
IP40
_______________________________________________________________________________________
Weight
Approx. 1110 g
_______________________________________________________________________________________
•DC1S/S
As above, for panel mounting
Accessories:
•DC1SH2
Stand holder
•VGR
VacuGraph Windows software
•W0800002
PC cable RS232, 2 m
DC1P
Vacuum Controller / Distillation Controller
Absolute Pressure 1400 to 1 mbar
The compact DC1P combines the
features of our well proven
distillation controllers with the
benefits of programmable pressure
profiles.
The DC1P has an integrated venting
valve and provides power for an
external vacuum valve and all
necessary control outputs.
For secure and simple operation,
clear instructions and information
are displayed on the large format
screen.
Profile
Patent Protected
Typical Applications
Benefits
• Chemical process engineering
• 9 programmable pressure profiles
with each 9 steps
• Manual or automatic
operation mode
• Integrated ceramic sensor,
chemically resistant
• Clearly structured display
shows for operation mode,
actual pressure and set point
• Programmable pressure ramps,
e.g. for vacuum distillation with
a pressure profile specified for
processing a specific substance
• Careful product handling with
step-by-step pressure decrease
• Casting and outgassing
• Medical engineering
• Process automation
• Laboratory workplaces
• Automatic filtration
• Integrated venting valve
• Patented automatic mode to
approach and find boiling points
in vacuum evaporators
• Universal switched mode
power supply 95 - 265 VAC
• Connectors for vacuum valve and
cooling water valve
• Easy to use
• Manual operation mode allows
intervention in pressure control
quickly and at anytime
• Serial interface for process data
collection
• VacuGraph software for
saving and plotting
measurements on a PC
85 mm
I
0
venting valve (integrated)
31 mm
145 mm
55 mm
vacuum
chamber
75 mm
Technical Data
Product Codes
_______________________________________________________________________________________
•DC1P
Programmable vacuum controller,
1400 - 1 mbar, with integrated
ceramic sensor and venting valve,
95-265 VAC
Display
3 displays with 7-segment LED´s for
mode / set point / actual pressure (3 / 3 / 4 digits)
_______________________________________________________________________________________
Display Refresh Rate
2 Hz (500 ms)
_______________________________________________________________________________________
Sampling Rate
50 Hz (20 ms)
_______________________________________________________________________________________
Measuring Principle
Piezo resistive, independent of gas type
_______________________________________________________________________________________
Materials In Contact With Vacuum
Al2O3 -ceramic, PP, Viton®
_______________________________________________________________________________________
Measurement Range
1400 - 1 mbar (1050 - 1 Torr), admitted overpressure 4 bar absolute
_______________________________________________________________________________________
Accuracy
Max. ±0.5% full scale (linearity / hysteresis / repeatability)
_______________________________________________________________________________________
Resolution
1 mbar (Torr)
_______________________________________________________________________________________
Response Time
20 ms
_______________________________________________________________________________________
Power Supply
95 - 265 VAC 50/60 Hz
_______________________________________________________________________________________
Electrical Connections
6-pin, female for external valve (24 V, 5 VA)
- vacuum valve
- cooling water valve
serial interface: SubD 9-pole, female
_______________________________________________________________________________________
Power Consumption
Max. 13 W
_______________________________________________________________________________________
Fuse
Thermal fuse
_______________________________________________________________________________________
Operating Temperature
0...+40°C
_______________________________________________________________________________________
Storage Temperature
-10 ... +60°C
_______________________________________________________________________________________
Vacuum Connection
G 1/4 female thread, hose nozzle 8 mm
_______________________________________________________________________________________
Weight
Approx. 550 g
_______________________________________________________________________________________
Accessories:
•DC1SH
Stand holder
•DC1VV
Vacuum valve, NW 2.2 mm, nickel
coated, connection G1/4 and hose
nozzle 8 mm, 1.5 m cable
•DC1VCR
Vacuum valve, NW 4 mm,
chemically resistant (PTFE),
connection G1/4 and hose nozzle
8/12 mm, 1.5 m cable
•VGR
VacuGraph Windows software
•W0800002
PC cable RS232, 2 m
ISO-KF
ISO-KF Accessories
V a c u u m
I n s t r u m e n t s
ISO-KF Accessories
ISO-KF clamp, Aluminum
Art. No.
ZSR1016
ZSR2025
ZSR3240
B
DN
10 / 16
20 / 25
32 / 40
A
62
72
90
B
41
52
68
C
-
D
-
B
45
C
-
D
-
B
17
26
41
C
-
D
-
C
-
D
-
ISO-KF quick release clamp, Aluminum / Plastic
ØB
Art. No.
ZSSR1016
DN
10 / 16
A
66
A
ISO-KF centering ring, stainless steel / FKM
ØA
3,9
ØB
Art. No.
ZZR016
ZZR025
ZZR040
DN
16
25
40
A
16
25
40
ISO-KF adaptive centering ring, stainless steel / FKM
ØA
3,9
Art. No.
ZRZ1016
DN
10 / 16
A
17
B
12
ØB
ISO-KF centering ring with wire filter, stainless steel / FKM / sinter bronze
ØA
3,9
Art. No.
ZZDF016
DN
16
A
16
B
17
C
-
D
-
B
12
C
7
D
-
ØB
ISO-KF hose nozzle, stainless steel 1.4301
A
Art. No.
ZSW1612
ØC
ØB
DN
16
A
40
ISO-KF adaptor G1/4 male thread, stainless steel
A
D
Art. No.
ZG1614
B
DN
16
A
29
B
G1/4
C
18
D
10
ØC
A
ISO-KF adaptor NPT male thread, stainless steel 1.4301
Art. No.
ZNPT14
DN
16
A
50
B
7.1
C
1/4"
D
-
A
30
70
30
70
B
20
20
28
28
C
2
2
2
2
D
-
A
40
50
B
80
100
C
16
24
D
-
A
40
B
16
C
-
D
-
A
16
28
B
28
24
C
-
D
-
ØB
ISO-KF welding flange, stainless steel 1.4301
A
Art. No.
ZSF016
ZSFL016
ZSF025
ZSFL025
C
ØB
B
DN
16
16
25
25
ISO-KF T piece, Aluminum
ØC
A
Art. No.
ZTA016
ZTA025
DN
16
25
A
ISO-KF elbow 90°, Aluminum
ØB
A
Art. No.
ZBA016
DN
16
A
ISO-KF reducing piece, Aluminum
ØA
Art. No.
ZRRG2516
ZRRG4025
DN
25 / 16
40 / 25
B
Alterations reserved (ACCA02)
THYRACONT
Vacuum Instruments GmbH
Max-Emanuel-Straße 10
94036 Passau, Germany
Tel.: +49 (0)851 95986 0
Fax: +49 (0)851 95986 40
Email: info@thyracont-vacuum.com
www.thyracont-vacuum.com
Expertise and Responsiveness: +49 (0)851 95986 28
V a c u u m
I n s t r u m e n t s
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