1480G 2480G series

1480G 2480G series
Pamphlet
™
1480G
2480G
series
Hitachi Metals, Ltd.
Proposal for a new generation
™
1480G
2480G
2
series
mass flow controller
From the release of the first of our SFC480 series, SAM
brand high-performance mass flow controllers continue in
the tradition of perfection. High corrosion resistance and
stable control performance are possible thanks to a
waveform diaphragm made of a Ni-Co alloy (YET 101),
developed by Hitachi Metals. This technology
demonstrates that Hitachi is a manufacturer of high grade
metallic materials. Hitachi includes features like
“dual-range” mass flow controller and a “hybrid” mass
flow controller, thanks to the latest digital control
technology developed for the SFC1480F series. Hitachi
products that are equipped with these technologies enjoy
a well deserved reputation from globally recognized
customers. Real SAM-brand products are highly valued
as premium performance designs.
In an ever changing and demanding market for even
more advanced mass flow controllers, Hitachi Metals is
proud to introduce the G series. This design is positioned
to play a major role in the next generation of controllers.
This G series is an all-in-one mass flow controller that
meets or exceeds the next generation of requirements, a
step ahead of the competition. These advances are in
response to our customers’ needs for functions such as
guaranteed control accuracy with actual gas, MG/MR, PI,
valve shut off, and flow rate veritication.
With SAM’s advanced technologies, such as its reliable
diaphragm valve structure, digital control, etc., the G
series offers innovative features that can be used for a
variety of new functions. Hitachi Metals is developing a
product lineup that best meets user’s needs, such as an
all-in-one mass flow controller that includes all the
functions along with models that include only desired
functions.
The search for excellent technologies with unlimited
investment is a bygone era. Today we seek appropriate
technologies with appropriate levels of investment. We
believe our new mass flow controller must apply the
technologies which are desired to receive good marks
from customers. Customers can get the most desirable
functions in performance from one of our many G series
models, at a cost to match the expectation of
performance. If users have a mass flow controller
problems, Hitachi Metals strongly recommends that close
review of the G series will satisfy the demands for next
generation semiconductor production.
3
The G series controllers are all-in-one mass flow controllers ready
for the next generation of requirements for guaranteed accuracy
with the actual gas, MG/MR, PI, valve shut off, and flow rate verification.
New functions in the G series
Multi-gas / multi-range (MG/MR) function
The G4 has new functions which allow one mass flow
controller to hande two or more gas types and ranges.
When mass flow controllers are equipped with this
function the need for dedicated devices is reduced to
only a few models which reduces the capital investment
and inventory liability.
Also, the G series MFCs provide a flow rate accuracy
guarantee for the actual gas type, so that the performance (precision and response) of the MFC before
changing the flow rate can be maintained the after a
change.
Pressure Insensitive (PI) function
While a mass flow controller is controlling the flow rate
and another gas line is connected to the same gas
source, the upstream gas supply pressure changes
instantly which can cause the flow rate control to
fluctuate by this change in pressure.
This symptom comes from the fact that the mass flow
controller tries to maintain control of the flow rate as it
detects the change in pressure at the flow rate sensor.
To reduce or eliminate this problem, a line regulators for
each gas line is installed to augment pressure fluctuation.
The PI function reduces this influence by sensing
pressure changes with a pressure sensor incorporated
in the device. This interrupts the feedback from the flow
rate sensor to the control valve, and keeps the control
valve opening at the optimum level.
Valve shut off function
The flow rate control valve on a mass flow controller
stabilizes the flow rate, but it cannot shut off the flow
like an ordinary pneumatic valve. That is why a minute
leak may still occur if a mass flow controller tries to shut
off the gas flow completely. Therefore, normally a mass
flow controller is installed with pneumatic control valves
upstream and downstream the MFC. Sometimes,
leaking gas may be left in the space between the mass
4
flow controller valve and the downstream pneumatic
valve. This can cause an unexpected gas surge when
gas is re-introduced which may negatively impact the
process.
Hitachi Metals has incorporated a positive valve shut off
function which makes it possible to isolate the gas
completely by integrating an ultra-small pneumatic
valve linked to the control valve.
G series
Integrated pressure/
temperature sensors
PI function
Dual range type
Small zero shift
MG/MR
function
Valve shut off
function
In-line flow rate
verification and
self calibration
functions
All-In-One
Diaphragm direct
sealing valve
Guaranteed accuracy
of the actual gas
flow rate
F series
In-line flow rate verification and self calibration functions
The requirements for flow rate accuracy and repeat
performance from a mass flow controller are constantly
growing. In manufacturing semi-conductor devices,
where process margins are tight, and stopping operation of the devices is not allowed, it must be possible to
evaluate the performance of the mass flow controller
without removing it from the gas circuit.
The in-line flow rate verification function measures the
current flow rate using an integrated flow rate verification system, while the mass flow controller remains
installed in the gas circuit. The report identifies deviation in flow rate after comparing the measured data with
previously recorded data in memory. And, this function
allows you to re-calibrate the stored data in memory
whenever you like.
Using this function, you can identify risks that might
otherwise cause significant damage to your products,
and it prolongs the life of the mass flow controller by
using the calibration function until it is time to be
replaced. It also contributes to maintaining planned
maintenance cycles.
Table of models and functions
Function
Model name
Standard
MG/MR function
(Guaranteed accuracy
with the actual gas)
Optional
PI
function
Valve
shut off
function
1480FX
2480FX
*
1480G1
2480G1
*
1480G2
2480G2
*
1480G3
2480G3
*
*
*
1480G4
2480G4
*
*
*
Flow rate
verification
function
LCD
display unit
Connection
specifications
Communication
specifications
W seal
C seal
H1G seal
HMJ (UJR)
RS232C
RS485
DeviceNetTM
MG / MR
*
*
MG / MR + PI
MG/MR + valve shut off
*
*
*
MG/MR + PI + valve shut off
*
All-In-One
5
1480G1 / 2480G1 series
For both the 1.5" and 1.125"IGS PI Mass Flow Controllers
Digital interface connector
RJ-12 x2
LCD display unit
Digital interface connector
RJ-12 x2
D-sub. 9-pin
D-sub. 9-pin
100.6
84
16.9
25.4
H
12.1
25.4
Item
Model name
Basic specifications
Standard full scale flow rate
(N2 equivalent)
Function
Valve operation
Flow rate control range
Operation pressure
*2
Temperature
Inlet pressure
Outlet pressure
Proof pressure
Operation
Accuracy guaranteed
Heating temperature when not powered
Humidity
Installation position
Flow rate setting signal
Flow rate output signal
Pressure,
temperature display
PI function *5
Flow rate control
Hardware
Required power
6
Housing, flange, valve seat
Diaphragm
Flow sensor
Seal *3
Pressure sensor
Surface finish of components that contact the gas
Fitting *4
LCD display unit
External leakage standard
10∼100%
N2 gas
2∼10%
Accuracy
10∼100%
Actual gas
2∼10%
N2 gas
Linearity
Actual gas
10∼100%
Repeatability
2∼10%
Flow rate sensor guaranteed zero point deviation range
Zero point
Temperature
Span
dependence
0% → (20∼100%)
Response Time
0% → (2∼20%)
Pressure gradient: <0.5kPa 0.1PSI/0.12sec
Pressure fluctuation width
Flow rate fluctuation
Pressure gradient: <0.02MPa 2.9PSI
width during
>0.5kPa 0.1PSI/0.12sec Pressure fluctuation width
pressure variations
0.02∼0.05MPa 2.9∼7.3PSI
Flow rate change time when the pressure changes
Pressure range
Accuracy
Repeatability
Pressure sensor
Temperature dependence
Pressure output
Temperature measuring range
Material of gas
wetted surface
147
167
42.5
20
2xM4, 3mm deep
1480G1
Model name
2480
2470
2481
2471
2482
2472
2483
2473
4-φ4.4
92
H
20
30
127
39
H
15
Model name
1480
1470
1481
1471
1482
1472
1483
1473
W-seal
4-φ5.6
79.8
W-seal
127
147
167
50.6
20
21.8
28.6
H
12.1
50.8
27.7
27.2
LCD display unit
93
70.8
Alarm LED
Zero calibration
LCD display select switch
FLOW
(5.6)
FLOW
(5.6)
Dimensions
Zero calibration
Alarm LED
LCD display select switch
2xM4, 3mm deep
2480G1
Specifications *1
1483G1
1481G1
1482G1
1480G1
2483G1
2481G1
2482G1
2480G1
5SCCM
∼11SLM
∼30SLM
∼50SLM
∼5,500SCCM
1) Multi-gas/multi-range, 2) PI function, 3) LCD display (flow rate output, flow rate setting, pressure, and temperature)
Normally closed / normally open
2∼100% F.S.
0.05∼0.3 MPa (G)
0.1∼0.3 MPa (G)
0.2∼0.3 MPa (G)
7.3∼43.5 PSI (G)
14.5∼43.5 PSI (G)
29.0∼43.5 PSI (G)
Vacuum to ambient pressure
1.0 MPa(G) 145 PSI(G)
5∼50 ℃
15∼35 ℃
65 ℃ max
35∼80%RH (non condensing)
Horizontal, Vertical (option)
Horizontal, Vertical
0.1 - 5 VDC (absolute rating: Max. ±15 VDC)
0 - 5 VDC (maximum output: ±15 VDC)
+15 VDC ±4%, 140 mA max
-15 VDC ±4%, 140 mA max
SUS316L
YET101 (Ni-Co alloy)
SUS316L
Ni
SUS316L
SUS316L
Specially electro-polished (standard)
W seal, C seal, H1G seal, 1/4” HMJ (UJR) male
4 digit display (6 x 4 mm), LED backlight
Max. 1x10-11 Pa・m3/s (He)
± (0.5% S.P. + 0.15% F.S.)
±0.2% F.S.
± (1.5% S.P. + 0.35% F.S.)
±0.5% F.S.
±0.3% F.S.
±1.0% F.S.
± (0.1% S.P. + 0.05% F.S.)
±0.06% F.S.
±0.5% F.S. / year, max.
±0.01% F.S. / ℃ (15∼35 ℃)
±0.01% S.P. / ℃ (15∼35 ℃)
Max. 1.0 sec. to reach ±2% S.P of the set value.
Max. 1.5 sec. to reach ±0.4% S.P of the set value.
±1.0% S.P.
± (1.5% S.P. + 1.0%F.S.)
± (3.0% S.P. + 1.0% F.S.)
Within 1 second of the pressure fluctuation
-99.9∼999.9 kPa (G) -14.5∼145 PSI (G)
±0.5% F.S.
±0.01% F.S.
0.05% / ℃
LCD display and digital communication (no analog output)
273.2∼323.2 K (0∼50℃)
*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The 147*G1 / 247*G1 series are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
*3: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
*4: An H1G seal is only available on the SFC14**G1 series
*5: The PI function may not perform as specified in certain plumbing conditions. Please consult us in advance.
What is a G1?
The PI function, without needing this regulator, restricts
The G1 series is a line of mass flow controllers that are
equipped with MG/MR an PI (Pressure Insensitive)
the influence of fluctuation in the gas supply inlet pressure,
functions.
and greatly reduces fluctuation in the actual flow rate.
The PI function is resistant to fluctuation in the actual
flow rate caused by fluctuation in the inlet pressure of
Pressure
the mass flow controller (MFC).
An ordinary gas supply unit uses a regulator to absorb
Gas supply inlet
pressure fluctuation
pressure fluctuation in
Time
Resists flow rate fluctuations
the gas supply inlet, and
caused by fluctuation
to stabilize the actual flow
MFC Without MFC inlet
in the MFC inlet pressure
pressure
the PI function,
rate.
with a
Therefore, any current
Actual
regulator
flow rate
Gas supply unit
mass flow controller,
without this regulator, is
directly influenced by
fluctuation in the gas
supply inlet pressure, and
the actual flow rate will
change instantly by a
large amount.
Regulator
Gas inlet
Gas supply
inlet pressure
P
MFC
inlet
pressure
PI
MFC
Actual
flow rate
Smaller fluctuations in the actual flow rate,
even without a regulator
MFC Without
the PI function,
without a
regulator
MFC inlet
pressure
MFC With the
PI function,
without a
regulator
MFC inlet
pressure
Actual
flow rate
Actual
flow rate
Principle of the PI control
At a normal stable pressure, a mass flow controller
controls the flow rate using feedback control, in order to
match the signal from the flow rate sensor with the
setting.
The PI control stops this feedback when the integrated
pressure sensor detects an inlet pressure fluctuation.
The pressure sensing circuit controls valve voltage
directly using this pressure signal, thereby reducing
fluctuation in the flow rate. It controls the opening of the
flow rate control valve directly.
In other words, a PI equipped mass flow controller uses
two control methods: PI control when a pressure
fluctuation occurs, and feedback control while the
pressure is stable.
Control circuit program
Flow rate
output signal
Feedback control
(when the gas pressure varies)
PI control
Input pressure
(when the gas pressure is stable)
feedback control
Flow rate
setting signal
Input
pressure
Pressure
signal
Flow rate
signal
P
Gas
inlet
PI control
Pressure
Flow rate
Flow rate Gas
sensor sensor bypass control valve outlet
When the
pressure varies
Reduced flow
rate fluctuations
Time
When the
pressure is stable
Adjusts the valve voltage (which controls the opening
of the flow rate valve) based on the pressure signal,
in order to reduce fluctuations in the flow rate.
7
1480G2 / 2480G2 series
Valve shut off Mass Flow Controllers
Dimensions
Zero calibration
Alarm LED
FLOW
Alarm LED
Zero calibration
FLOW
Operation air inlet (φ1.8)
Digital interface connector
RJ-12 x2
15.8
Operation air inlet (φ1.8)
D-sub. 9-pin
Digital interface connector
RJ-12 x2
100.6
84
12.1
9
12.1
38
35
150
135
140.6
20.9
23
93
70.8
(5.6)
D-sub. 9-pin
(5.6)
Applied to 1.5" and 1.125" IGS
4-φ5.6
W-seal
92
1480G2
Item
Basic specifications
Model name
Standard full scale flow rate
(N2 equivalent)
Function
Valve operation
Flow rate control range
Inlet pressure
Operation pressure
Outlet pressure
*2
Proof pressure
Operation
Temperature
Accuracy guaranteed
Heating temperature when not powered
Humidity
Installation position
Flow rate setting signal
Flow rate output signal
Required power
4-φ4.4
21.8
28.6
79.8
30
39
W-seal
2480G2
Specifications *1
1480G2
2480G2
5SCCM∼5,500SCCM
1) Multi-gas/multi-range, 2) Valve shut off function
Normally closed / normally open
2∼100% F.S.
0.05∼0.3 MPa (G) 7.3∼43.5 PSI (G)
Vacuum to ambient pressure
1.0 MPa(G) 145 PSI (G)
5∼50 ℃
15∼35 ℃
65 ℃ max
35∼80%RH (non condensing)
Horizontal, vertical
0.1 - 5 VDC (absolute rating: Max. ±15 VDC)
0 - 5 VDC (maximum output: ±15 VDC)
+15 VDC ±4%, 200 mA max
-15 VDC ±4%, 150 mA max
SUS316L
YET101 (Ni-Co alloy)
SUS316L
SUS316L
SUS316L, YET101, PCTFE
SUS316L
Specially electro-polished (standard)
W seal, C seal, H1G seal
Max. 1x10-11 Pa・m3/s (He)
± (0.5% S.P. + 0.15% F.S.)
±0.2% F.S.
± (1.5% S.P. + 0.35% F.S.)
±0.5% F.S.
±0.3% F.S.
±1.0% F.S.
± (0.1% S.P. + 0.05% F.S.)
±0.06% F.S.
±0.5% F.S. / year, max.
±0.01% F.S. / ℃ (15∼35 ℃)
±0.01% S.P. / ℃ (15∼35 ℃)
Max. 1.0 sec. to reach ±2% S.P of the set value.
Max. 1.5 sec. to reach ±0.4% S.P of the set value.
0.4∼0.7 MPa (G) 58.0∼101.5 PSI (G)
Max. 1x10-8 Pa・m3/s (He)
2 million times
Normally open
Control valve
shut off function
Flow rate control
Hardware
Housing, flange, valve seat
Diaphragm
Flow sensor
Material of gas
Seal *3
wetted surface
Shut off valve
Pressure sensor
Surface finish of components that contact the gas
Fitting *4
External leakage standard
10∼100%
N2 gas
2∼10%
Accuracy
10∼100%
Actual gas
2∼10%
N2 gas
Linearity
Actual gas
10∼100%
Repeatability
2∼10%
Flow rate sensor guaranteed zero point deviation range
Temperature
Zero point
dependence
Span
0% → (20∼100%)
Response Time
0% → (2∼20%)
Valve operation pneumatic pressure
Valve seat leakage amount
Number of durability
Operation of integrated metal diaphragm valve
*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The 147*G2 / 247*G2 series are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
*3: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
*4: An H1G seal is only available on the SFC14**G2 series
8
What is a G2?
The G2 series is a line of mass flow controllers that are equipped
valve is integrated near the downstream flow rate control valve,
The major purpose of the valve shut off function is to reduce the
pneumatic valve is a normally open type and is normally fully
with MG/MR and valve shut off functions.
gas purge time that is required to vent residual gas in the space
between the downstream pneumatic valve and the mass flow
controller valve.
The ordinary flow rate control valve installed in a mass flow
to enable the valve shut off function. The integrated minute
open. It absolutely shuts off all gas with a setting of 0 % or when
a close fully signal is received. Also, this miniature pneumatic
valve is always installed together with a flow rate control valve,
so that the volume of gas leaking (that could cause a gas surge)
controller cannot shut off the gas completely. In order to
overcome this problem, a minute, solenoid driven pneumatic
will be approximately 1/10 that in a combination of an ordinary
mass flow controller and pneumatic valve, as shown in the figure.
Description of the G2 series construction
Construction
Integrates a miniature, solenoid driven pneumatic
valve. Normally open type.
Operation
Shuts off the gas inlet completely when set to 0%
or when connected to a close fully input signal
Existing model
Solenoid to drive
the pneumatic valve
G series
Normal
pneumatic valve
Diaphragm
valve
Dead volume: 0.25 cc
(Approximately 1/10 that of ordinary MFCs)
Dead volume: 2.85 cc
Gas inlet
Gas outlet
Miniature pneumatic valve
Pneumatic valve operation air:
0.4 to 0.7 MPa (G) / 58.0 to 101.5 PSI (G)
Solenoid to drive the pneumatic valve
Using the configuration above, the G2 series MFCs reduce
time needed to achieve a stable flow rate. Finally, it provides
the pipe, as shown in the figure, and it shorten the gas purge
expensive gas.
the gas that can surge into a chamber due to residual gas in
productivity improvements and reduces the amount of wasted
Reduction of gas purge time
Gas panel
Process gas
Valve
Valve
MFC output
Conventional
model
Actual flow rate right after the MFC
Actual flow rate
MFC output
Time
Actual flow rate
G series
MFC output
Time
Time
Process
chamber
Actual flow rate just before the chamber
Actual flow rate
MFC
Time
Actual flow rate
Valve
Time
Influence from
the dead volume
Reduced gas
purge time
Time
9
1480G4 / 2480G4 series
All-in-one Mass Flow Controllers
Dimensions
Alarm LED
Zero calibration
Zero calibration
Alarm LED
LCD display select switch
FLOW
LCD display select switch
LCD display unit
FLOW
LCD display unit
PS
IAk a
PK ℃
SP
ROSCCM
SL
M%
Operation air inlet (φ1.8)
100.6
84
12.1
Operation air inlet (φ1.8)
Digital interface connector
RJ-12 x2
9
12.1
20.9
15.8
D-sub. 9-pin
38
35
150
135
140.6
23
93
70.8
(5.6)
D-sub. 9-pin
Digital interface connector
RJ-12 x2
(5.6)
Applied to 1.5" and 1.125" IGS
92
4-φ4.4
39
30
28.6
W-seal
4-φ5.6
79.8
21.8
W-seal
1480G4
Valve operation
Flow rate control range
Inlet pressure
Operation
Outlet pressure
pressure *2
Proof pressure
Operation
Temperature Accuracy guaranteed
Heating temperature when not powered
Humidity
Installation position
Flow rate setting signal
Flow rate output signal
Flow rate control
Hardware
Required power
Housing, flange, valve seat
Diaphragm
Material
Flow sensor
of gas
Seal *3
wetted
Shut off valve
surface
Pressure sensor
Flow rate confirmation tank
Surface finish of components that contact the gas
Fitting *4
LCD display
External leakage standard
10∼100%
N2 gas
2∼10%
Accuracy
10∼100%
Actual gas
2∼10%
N2 gas
Linearity
Actual gas
10∼100%
Repeatability
2∼10%
Flow rate sensor guaranteed
±0.5% F.S. / year, max.
zero point deviation range
Zero point
Temperature
±0.01% F.S. / ℃ (15∼35 ℃)
Span
dependence
±0.01% S.P. / ℃ (15∼35 ℃)
Response 0% → (20∼100%)
Max. 1.0 sec. to reach ±2% S.P of the set value.
Time
0% → (2∼20%)
Max. 1.5 sec. to reach ±0.4% S.P of the set value.
PI function *5
Model name
Control valve
shut off function
Basic specifications
Function
5SCCM∼5,500SCCM
1) Multi-gas/multi-range,
2) PI function,
3) Valve shut off function,
4) Flow rate confirmation function,
5) LCD display
(flow rate output, flow rate setting,
pressure, and temperature)
Normally closed / normally open
2∼100% F.S.
0.05∼0.3 MPa (G) 7.3∼43.5PSI(G)
Vacuum to ambient pressure
1.0 MPa (G) 145 PSI (G)
5∼50 ℃
15∼35 ℃
65℃ max
35∼80%RH (non condensing)
Horizontal, vertical
0.1 to 5 VDC (absolute rating: Max. ±15 VDC)
0 to 5 VDC (maximum output: ±15 VDC)
+15 VDC ±4%, 200 mA max
-15 VDC ±4%, 150 mA max
SUS316L
YET101 (Ni-Co alloy)
SUS316L
SUS316L
SUS316L, YET101, PCTFE
SUS316L
SUS316L
Specially electro-polished (standard)
W seal, C seal, H1G seal
4 digit display (6 x 4 mm), LED backlight
Max. 1x10-11 Pa・m3/s (He)
± (0.5% S.P. + 0.15% F.S.)
±0.2% F.S.
± (1.5% S.P. + 0.35% F.S.)
±0.5% F.S.
±0.3% F.S.
±1.0% F.S.
± (0.1% S.P. + 0.05% F.S.)
±0.06% F.S.
Item
Flow rate confirmation function
Model name
Standard full scale flow rate
(N2 equivalent)
Specifications *1
1480G4
2480G4
Pressure,
temperature display
Item
2480G4
Specifications *1
1480G4
2480G4
±1.0% S.P.
Pressure gradient:<0.5kPa 0.1PSI/0.12sec
Flow rate
fluctuation Pressure Pressure fluctuation width
± (1.5% S.P. + 1.0%F.S.)
<0.02MPa 2.9PSI
width during gradient:
pressure >0.5kPa 0.1PSI Pressure fluctuation width
± (3.0% S.P. + 1.0% F.S.)
variation
/0.12sec 0.02∼0.05MPa 2.9∼7.3PSI
Flow rate change time when pressure changed Within +1 of pressure changed time
Valve operation pneumatic pressure 0.4∼0.7 MPa (G) 58.0∼101.5 PSI (G)
Valve seat leakage amount
Max. 1x10-8 Pa・m3/s (He)
2 million times
Number of durability
(including the number of times
when in-line flow rate verification)
Operation of integrated metal diaphragm valve
Normally open
Flow rate
10SCCM∼5,500SCCM
Flow range
confirmation range Confirmation range
2∼100% F.S.
±1.5% S.P.
10∼400SCCM
Confirmation
±2.5% S.P.
repeatability (3σ) 401∼5,500SCCM
0.05∼0.3 MPa (G)
Input
pressure
Confirmation of
(7.3∼43.5 PSI (G))
available pressure
Max. - 0.08 MPa (G) - 11.6 PSI (G)
Output
pressure
*6
(when controlling at 100 % of the flow rate)
Pressure at measuring reference data:
Confirmation repeatability
±0.03 MPa (G) ±4.4 PSI (G)
at a guaranteed pressure
2 to 4 minutes
Confirmation time
Span deviation calibration
±20 % (cumulative)
(allowable range)
ReZero position deviation calibration
±20 % (cumulative)
calibration
(allowable range)
2 seconds
Re-calibration time
-99.9∼999.9 kPa (G) 14.5∼145 PSI (G)
Pressure range
±0.5% F.S.
Accuracy
±0.01% F.S.
Repeatability
Pressure
0.05% / ℃
Temperature dependence
sensor
LCD display and digital communication
Pressure output
(not analog output)
273.2∼323.2 K (0∼50℃)
Temperature measuring range
*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The 147*G4 / 247*G4 series are also available for use with low inlet pressure. Please inquire separately for the specifications for low inlet pressure models.
*3: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
*4: An H1G seal is available only on the SFC14**G4 series
*5: The PI function may not perform its specifications depending on each plumbing condition. Please consult us in advance.
*6: For details about the confirmation pressure for the minute pressure difference model, please contact Hitachi Metals.
10
What is a G4?
The G4 series MFCs are full specification G series models. They
below shows the relationship between the internal tank pressure P
shut off, inline flow rate verification, and self calibration functions.
axis and pressure and output on the vertical axis. After closing the
are equipped with the MG/MR, PI (Pressure Insensitive), valve
Flow rate verification is a method for verifying changes in the flow
rate over time. It compares reference data for normal operation
when starting to the current flow rate verification results at certain
intervals.
A tank with an integrated pressure sensor and a side inlet valve
are the main items used for verification.
At the beginning of the verification the MFC temporarily stops the
normal flow rate control and locks the opening position of the flow
rate control valve. Next, the side inlet valve closes. The chart
Principle
and the flow rate sensor output RO, with time on the horizontal
side inlet valve, P and RO change as shown below. The amount of
flow rate deviation (the verification value), can be obtained from
the ratio between flow rate when starting to use the MFC, and the
results of the verification calculation after a certain period has
elapsed.
The results of the verification can be checked on a personal
computer display or on the LCD on the main housing. If needed,
the mass flow controller can be re-calibrated to normalize the data
using the self calibration function.
Compare the flow rate when the initial data was obtained and the data when you are confirming the flow rate. Then calculate
the change in the flow rate output over time
100%
Flow rate sensor
output (RO)
Internal flow
ΣRO
0%
Pressure
sensor
Tank
V
verification
time t
Internal tank
pressure (P)
P
Control panel
RO
ΔP
Control valve open
position locked
Side inlet Temperatur Flow rate
sensor
valve
sensor
bypass line
Close the side inlet valve
Flow rate
control valve
Side outlet
valve
There are three types of verification operations
Three types of verification operations are available as follows.
the LCD. This method does not need a personal computer.
Another is a stand alone operation using the mass flow controller
system.
One is operation uses a special program on a personal computer.
by itself.
With this method, the zero reset switch on top of the main housing
is used for the verification and the verification results are shown on
1) Operation using a special program on a personal computer
G series
2) Stand alone operation
Top of the
MFC
In any of these methods, the basic operation procedures are the
same, as shown below. You can easily calibrate a periodically
verified flow rate.
3) Verification using commands from a system
Basic operating procedures
RS232C
RS485
Follow the instructions
on the screen.
The last method controls the operation with commands from a
Flow rate verification
operation switch
(also called the zero reset switch)
1. Obtain the initial data or select the flow rate verification
(Up to 5 sets of initial data can be stored.)
2. Start obtaining the initial data.
3. Set the verification flow rate, and start the verification.
4. The measured results are displayed.
・・・
5. Verity the flow rate periodically
=> The user can calibrate the MFC using
the verification results.
* For details about the operation method, see the instruction manual.
PSIA k Pa K ℃
SPRO SCCM
SLM %
LCD display (displays the results)
Perform the verification using the zero reset switch
on the top of the MFC housing.
11
1480G1-D / 2480G1-D series
DeviceNetTM communication type For both the 1.5" and 1.125"IGS
PI Mass Flow Controllers
Zero calibration
LCD display select switch
FLOW
DeviceNetTM Connector
Male Micro Connector
Service connector (RJ-12)
(RS-232C)
17.2
(16)
LCD display unit
DeviceNetTM Connector
Male Micro Connector
84
13.5
93
70.8
LCD display select switch
FLOW
25.4
25.4
H
H
36
27
Service connector (RJ-12)
(RS-232C)
26.7
Zero calibration
LCD display unit
(16)
Dimensions
147
167
42.5
20
2xM4, 3mm deep
1480G1-D
Model name
2480
2470
2481
2471
2482
2472
2483
2473
127
147
167
4-φ4.4
92
H
50.6
20
21.8
28.6
W-seal
20
127
30
39
H
15
Model name
1480
1470
1481
1471
1482
1472
1483
1473
100.6
4-φ5.6
79.8
W-seal
2xM4, 3mm deep
2480G1-D
Specifications *1
1483G1-D0
1480G1-D0
1481G1-D0
1482G1-D0
2483G1-D0
2480G1-D0
2481G1-D0
2482G1-D0
Standard full scale flow rate
5SCCM
11SLM
30SLM
50SLM
(N2 equivalent)
∼5,500SCCM
Function
1) Multi-gas/multi-range, 2) PI function, 3) LCD display (flow rate output, flow rate setting, pressure, and temperature)
Valve operation
Normally closed / normally open
Flow rate control range
2∼100% F.S.
0.05∼0.3 MPa (G)
0.1∼0.3 MPa (G)
0.2∼0.3 MPa (G)
Operation pressure
Inlet pressure
7.3∼43.5 PSI (G)
14.5∼43.5 PSI (G)
29.0∼43.5 PSI (G)
*2
Outlet pressure
Vacuum to ambient pressure
Proof pressure
1.0 MPa(G) 145 PSI(G)
Operation
5∼50 ℃
Temperature
Accuracy guaranteed
15∼35 ℃
Heating temperature when not powered
65 ℃ max
Humidity
35∼80%RH (non condensing)
Installation position
Horizontal, Vertical (option)
Horizontal, Vertical
Flow rate setting signal
TM
DeviceNet communication *3
Flow rate output signal
Item
Pressure,
temperature display
PI function *6
Flow rate control
Hardware
Basic specifications
Model name
12
Required power
Housing, flange, valve seat
Diaphragm
Material of gas
Flow sensor
wetted surface
Seal *4
Pressure sensor
Surface finish of components that contact the gas
Fitting *5
LCD display unit
External leakage standard
10∼100%
N2 gas
2∼10%
Accuracy
10∼100%
Actual gas
2∼10%
N2 gas
Linearity
Actual gas
10∼100%
Repeatability
2∼10%
Flow rate sensor guaranteed zero point deviation range
Zero point
Temperature
Span
dependence
0% → (20∼100%)
Response Time
0% → (2∼20%)
Pressure gradient: <0.5kPa 0.1PSI/0.12sec
Flow rate fluctuation Pressure gradient: Pressure fluctuation width
<0.02MPa 2.9PSI
width during
>0.5kPa 0.1PSI
Pressure fluctuation width
pressure variations
/0.12sec
0.02∼0.05MPa 2.9∼7.3PSI
Flow rate change time when the pressure changes
Pressure range
Accuracy
Repeatability
Pressure sensor
Temperature dependence
Pressure output
Temperature measuring range
+24 VDC, 0.3 A max
SUS316L
YET101 (Ni-Co alloy)
SUS316L
Ni
SUS316L
SUS316L
Specially electro-polished (standard)
W seal, C seal, H1G seal, 1/4” HMJ (UJR) male
4 digit display (6 x 4 mm), LED backlight
Max. 1x10-11 Pa・m3/s (He)
± (0.5% S.P. + 0.15% F.S.)
±0.2% F.S.
± (1.5% S.P. + 0.35% F.S.)
±0.5% F.S.
±0.3% F.S.
±1.0% F.S.
± (0.1% S.P. + 0.05% F.S.)
±0.06% F.S.
±0.5% F.S. / year, max.
±0.01% F.S. / ℃ (15∼35 ℃)
±0.01% S.P. / ℃ (15∼35 ℃)
Max. 1.0 sec. to reach ±2% S.P of the set value.
Max. 1.5 sec. to reach ±0.4% S.P of the set value.
±1.0% S.P.
± (1.5% S.P. + 1.0%F.S.)
± (3.0% S.P. + 1.0% F.S.)
Within 1 second of the pressure fluctuation
-99.9∼999.9 kPa (G) 14.5∼145 PSI (G)
±0.5% F.S.
±0.01% F.S.
0.05% / ℃
LCD display and DeviceNetTM communication (not analog output)
273.2∼323.2 K (0∼50℃)
*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The 147*G1-D / 247*G1-D series are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
*3: For details about DeviceNetTM communication, see page 14.
*4: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
*5: An H1G seal is available only on the SFC14**G1 series
*6: The PI function may not perform its specifications depending on each plumbing condition. Please consult us in advance.
MG/MR (multi-gas/multi-range) function
This is the core technology that is included in all the G series
To get the flow rate conditions for your actual gas using a
conventional mass flow controllers, one controller would only
coefficient to convert the flow rate.
conventional MFC, a conversion factor must be used as a
models is the MG/MR (multi-gas / multi-range) function. In
handle one type of gas and one full scale flow rate range.
This means that customers needed to have a dedicated mass
flow controller for each system, and for each process recipe.
The reference values for these coefficients have been based
of a variety of values, including calculated values, actually
measured values, and empirical values. And, these were
merely guidelines or reference values with some gas types.
With the FX series flow rate controller equipped with the
Although the MG/MR function is included, if the gas data
MG/MR function, you can have up to 14 user recipes (full
deviates from the characteristics of the actual gas, the mass
scale ranges of 2 SCCM to 50 SLM) to match the intended
flow controller cannot perform as its designed level.
flow range, and you can change the gas type and flow rate to
With the G series mass flow controller, in addition to the flow
match the actual gas you want to handle. When connected to
rate reference for N2 gas (that ensures conformance with the
a personal computer, the metering conditions can be
changed instantly (See page 14).
national standard using the conventional gravimetric method),
Hitachi Metals actual gas flow rate accuracy warranty system
processing facilities at our factory. Using these facilities,
we installed full scale actual gas metering and exhaust gas
backs up this MG/MR function. A conventional mass flow
controller only guarantees the flow rate accuracy with N2 gas.
measurement is made for each type of gas at each full-scale
range, and record the data. This is then used as actual gas data.
Conceptual diagram of the MG/MR (multi-gas/multi-range) mass flow controller
MFC
MFC
MFC
Ar
O2
H2
MFC
MFC
MFC
CF4
PH3
C2F6
MFC
MFC
MFC
SF6
SiH4
MFC
MFC
MFC
NF3
SiF4
CO
C 2H 4
N2
Abbreviation
MG/MR
FR-01
FR-02
FR-03
FR-04
FR-05
FR-06
FR-07
FR-08
FR-09
FR-10
FR-11
FR-12
FR-13
FR-14
N2 gas reference flow rate
Standard full-scale flow rate range
(N2 equivalent)
Flow range
2∼5 SCCM
6∼14 SCCM
15∼27 SCCM
28∼38 SCCM
39∼71 SCCM
72∼103 SCCM
104∼192 SCCM
193∼279 SCCM
280∼754 SCCM
755∼2037 SCCM
2038∼5500 SCCM
5501∼11000 SCCM
11001∼30000 SCCM
30001∼50000 SCCM
Actual gas flow rate measurement facility
13
How to use the MG/MR conversion program
Gas type and flow rate can be converting using
an MG/MR conversion program. Connect the
mass flow controller to a personal computer
using a digital communication cable, and use our
proprietary program. One can convert the data
easily with a simple GUI interface program.
Following the program instructions, first select
the gas type, and then flow rate units. A flow rate
range will appear, and it can be changed. Enter
a flow rate value and the setting is complete.
Users can change the gas type and flow rate.
<MG/MR conversion program> Select the correction amount data
according to the gas type and flow rate you want to control
RS232C
RS485
HOST PC
Before
conversion
N2 500SCCM
Simple operation to set the gas type and flow rate.
After
conversion
Select a gas type
The flow rate range
is displayed
(user settable).
Enter a flow rate
SF6 100SCCM
O2 300SCCM
HBr 400SCCM
* For details about the operation, see the instruction manual
A screen that shows
the program is converting.
Models compatible with the DeviceNetTM communication system
About DeviceNetTM
This is a field network recognized world wide, and it is approved
as a standard sensor bus by the SEMI.
Field devices can be connected using serial communication in
place of an I/O connection, allowing transfer of a large volume
of data effectively.
The DeviceNetTM specifications are administrated by the ODVA
(Open DeviceNet Vendor Association, Inc.) a non-profit body
established to promote the spread of this system world-wide.
What are the advantages of employing DeviceNetTM
1) By using serial communication from an I/O connection, one does not
need an AD / DA / O board which can decrease configuration and
set up costs.
2) Only network cables are needed and this reduces cabling costs,
which decreses required man-hours, shortening engineering periods,
and avoids problems from incorrect wiring.
3) DeviceNetTM employs a CAN (Controller Area Network) as a
communication controller, and you can use a variety of CAN error
detection functions.
4) The DeviceNetTM specifications are administrated by the ODVA, and
have been normalized as international standards by IEC and SEMI.
With this normalization, they are completely open, and lots of control
devices are available from multiple venders. You can choose the
optimum device for your application.
5) The power for DeviceNetTM is only +24 VDC. You do not need to
supply ±15 VDC for the mass flow controller.
14
PLC
Master
+24VDC
POWER
PLC bus line
DeviceNetTM cable
Distribution
box
Communication connector pin assignment
Analog interface connector (D-Sub 9-pin)
Connector used : D-Subminiature, 9-pin connector (M3 screw)
Compatible plug : 17JE-13090-02 (D8B) (made by DDK) or equivalent
1) Connector model : L type
Pin number
1
2
3
4
5
6
7
8
9
2) Connector model: Q type
Function
Valve open/close input (+15 VDC = Fully open; -15 VDC = Fully closed)
Output (0 to 5 VDC)
+15 VDC
COM (±15 VDC)
-15 VDC
Input (0.1 to 5 VDC)
COM (output)
COM (Input)
Valve valtage (0 to 5VDC)
Pin number
1
2
3
4
5
6
7
8
9
Function
Valve Full open (operate by connecting to COM)
Out put (0 to 5 VDC)
+15 VDC
COM (±15 VDC)
-15 VDC
Input (0.1 to 5 VDC)
COM (output)
COM (Input)
Valve Full-close (operate by connecting to COM)
Digital interface connector
Connector used : 43814-6621 (made by Molex) (RJ-12 x 2 connectors)
Pin number
RS232C
1
2
3
4
5
6
Rxd
Txd
Signal name
COM (Siginal)
No Connection
RS485
N.C.
N.C.
1 2 3 4 5 6
RSRS+
Note 1 : Rxd, Txd: RS232C Input and output
Note 2 : RS-, RS+: RS480 Input and output
DeviceNetTM connector
Connector used : DeviceNetTM Male Micro Connector (CM02-8DR5P(D5) made by DDK, or equivalent)
Signal name
Drain
V+
VCAN_H
CAN_L
Pin number
1
2
3
4
5
4 CAN_H
3 V-
5 CAN_L
1 Drain
2 V+
Additional functions
Function name
Alarm function
Flow sensor zero reset function
Pressure sensor zero reset function
Pressure sensor span correction function
Lamp response function
Flow control valve voltage monitor output function
Flow control valve fully open / close function
Description
Setting and reading methods
See the item for the alarm function
By command
Reset the flow sensor zero
By command or when the switch on the top is pressed
Reset the pressure sensor zero
By command
Correct the pressure sensor span
By command
Control the flow rate using a specified time for the step flow rate setting. By command
Set the flow control valve opening (0 to 5 VDC)
By command or analog voltage output (only L type)
Open and close the flow control valve completely
By command, ±15 VDC, or contact point connection
Alarm function
Alarm cause
Alarm LED display
Alarm output condition
Normal operation
Green LED blinks at 1 Hz
No alarm
Flow rate setting does not the match
Red LED lights
The mis-match between the flow rate setting and the flow rate output is 10% or more of the full
flow rate output
scale and has continued for 10 seconds or longer
Abnormal ±15 VDC power supply
Turns off
The ±15 VDC power supply is outside the range of ±12 VDC to ±17 VDC, and has been for 0.5 seconds or longer.
EEPROM access error
Red LED lights
Abnormal value in the EEPROM data.
Digital communication error
Red LED goes on
Did not receive a normal digital command
Change in flow rate control status
Red LED blinks at 2 Hz
The change in the preset value was 10% or more of the full scale and continued for 10 seconds
(Change from the preset status)
・Flow rate setting changed
・Flow rate output changed
・Flow control valve open level changed
or longer.
Or, the cumulative value of the zero point correction amount for the flow sensor is more than
±20% of full scale
・Abnormal zero point
correction value for the flow sensor
15
Precautions to ensure safe use
In order to use our products safely, make sure to read the relevant instruction manuals before use.
1480G, 2480G series ordering information
Model name
Size
Temperature
Pressure
Flow range
Series
Seal
Operation
1
1
2
4
8
0
G1
M
C
1.5" size
1.125" size
Normal temperature type
4
Normal pressure type
8
Low inlet pressure type
7
5∼5,500 SCCM (FR-01∼11)
0
11 SLM (FR-12)
1
30 SLM (FR-13)
2
50 SLM (FR-14)
3
Multi gas, multi range, Pressure insensitive
G1
Multi gas, multi range, valve shut off
G2 *
Multi gas, multi range, Pressure insensitive, valve shut off
G3 *
Multi gas, multi range, Pressure insensitive, valve shut off,
G4 *
flow rate calibration verification
Metal seal
M
Rubber seal
R
Normally closed
C
Optional code
Normally open
O
Flow sensor
Fitting
Connector
Option
material
UG
L
N
1/4” HMJ (UJR) male
4V **
1.5” W seal, 1.125” W seal
UG
1.5" C seal, 1.125” C seal
AG
HG ***
1.5” H1G seal (Hitachi GS seal)
D-sub 9-pin (top mount), valve open/close signal ±15 VDC type
L0
D-sub 9-pin (top mount), valve open/close signal COM connection type
Q0
D-sub 9-pin (upstream mount), digital output type
T0 ****
DeviceNetTM
D0
Ni free
Blank
Ni sensor
N
None
Blank
For details, please contact us.
Note: *
**
G2, G3, and G4 series can only control flow rates up to 5,500 SCCM.
Only the G1 series can be used with a 4V fitting.
Can be used with a 1/4” HMJ (UJR) male, 124 mm.
*** Only the 14** series can be used with an H1G fitting
**** Only the 24** series can be used with a T0 connector.
SAM™・FANTAS・YET 101 is a registered trademark of Hitachi Metals, Ltd.
Hitachi
Metals, Ltd.
http://www.hitachi-metals.co.jp
Head Office
Piping Components Business Unit
Sales Dep. of Fine Flow
Shinagawa Season Terrace, 2-70, Konan 1-chome, Minato-ku, Tokyo 108-8224 Japan
Tel.+81-3-6774-3530 Fax.+81-3-6774-4348
Sales agent:
The contents of this pamphlet are correct as of Jan 2016.
The specification, appearance, etc. of products listed in this pamphlet may be changed without prior notice.
Due to printing reasons, the product colors in this pamphlet may be different from the actual product colors.
This pamphlet is copyright 2007 by Hitachi Metals Ltd., all rights reserved. Duplication of any part of the
contents without prior written approval is strictly prohibited.
If you have questions about anything described in this pamphlet, please contact the address shown on the left.
DeviceNetTM is a registered trademark of ODVA.
We are not liable for and do not accept responsibility for any loss, direct or indirect, caused by incorrect use,
careless handling, force majeure, war, terrorism, fire, pollution, use in unapproved environments, salt damage,
or any natural disasters (such as wind or flood damage, earthquakes or lightning), or for any consequential
damage.
The above contact numbers are subject to change. If you cannot reach us using those numbers, please try the
following:
Hitachi Metals, Ltd. Toll-free 0800-500-5055 (in Japan), Tel.+81-3-6774-3001
All rights reserved.
Pamphlet number: HL-K245-E
Created January, 2016 (T)GT2
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