REV.2.3 CS200-A,C,D MFC/MFM User’s Manual 2 0 13 . 6 Contents SECTION 1 INTRODUCTION 1.1 Declaration ................................................... 1.2 Attention....................................................... 1.3 The notice of safety ...................................... 1.4 General ......................................................... 1.5 Specification ................................................. 1.6 Calibration features ..................................... SECTION 2 1 2 2 3 5 6 INSTALLATION 2.1 General ......................................................... 2.2 Unpacking ..................................................... 2.3 Mechanical Installation ............................... 2.3.1 General ........................................................ 2.3.2 Installation .................................................. 18.104.22.168 1/4VCR Installation ................................. 22.214.171.124 Compression Fitting Installation .............. 2.4 Electrical Installation................................... 2.5 Checking Before Operation....................... 3.4 Soft-Start ......................................................... 3.5 Delay ................................................................ 3.6 Valve Command Mode ................................... 3.7 Valve Type........................................................ 3.8 Multi-Gas and Multi-Flow ............................. 3.9 Total Flow Accumulator ................................. 3.10 Alarm ............................................................. 7 7 7 8 14 14 14 15 21 3.11 LED ................................................................ SECTION 4 MAINTENANCE 4.1 General ............................................................ 4.2 Caution ............................................................ FUNCTIONS 3.1 General........................................................... 5.1 Initial check ..................................................... 5.2 Troubleshooting .............................................. 3.2 Control Mode ............................................... 3.3 Zero ............................................................... 25 26 SECTION 6 WARRANTY AND SERVICES 6.1 Guarantee of Sevenstar .................................. 6.3 Services ............................................................ 21 21 22 24 25 SECTION 5 TROUBLESHOOTING 6.2 Product Warranty…………………………... SECTION3 22 22 22 22 23 23 23 24 6.4 Disclaimer ........................................................ APPENDIX I ......................................................... APPENDIXⅡ ....................................................... 27 27 29 29 30 33 Instruction of MFC/MFM 1.1 Declaration The copy right of The user’s manual of mass flow controller and mass flow meter is subjected to Beijing Sevenstar Electronics Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store and distribute any part of this manual in mean of electric, mechanical, photocopy, recording or other way without permission of Sevenstar. This manual is not assured that there is no mistake and missing in which have been corrected strictly, and the publisher is under no obligation to the mistake or missing, meanwhile the publisher is not in charge of any loss that this manual leads to. Beijing Sevenstar Electronics Co. , Ltd 1of35 1.2 Attention Dear customer, thanks for using CS mass flow controller and mass flow meter. This manual describes in detail important issues about correct and safe operations of the product. User of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully. 1.3 The notice of safety Please pay attention to the below notices when reading this manual. We are not responsible for any result without abiding by the below notices. a) Do not replace any components or disassemble instrument. Do not replace any components, or disassemble the instrument without any authorized and make sure that the label or/and seal of product is not removed when returning for reworking, recalibration and maintenance. b) Please contact professional for technical service. Do not replace any components. Any technical support is provided by professional who must be authorized by Sevenstar. c) Please pay more attention to use dangerous gas. Instrument should be purged completely and keep safety if dangerous gas is used. Meanwhile make sure that moist gas must not react with material of seal and instrument. d) Please pay attention to purging instrument. The whole system should be purged by dry gas after and before the instrument is installed. e) Please abide by proper steps of purging. Product should be purged and handled with gloves. f) Do not use the instrument in explosive environment. Do not use the instrument in explosive environment, unless the safety certificate is available. 2of35 g) Please use proper fittings and keep the rules. All fittings of instrument must be matched according to the listing in manual. Please read manual carefully before screwing tightly. h) Please do leakage check. Please check carefully all of vacuum parts and make sure that there is not leakage in the system. i) Please make sure that instrument is working under safe pressure. Please make sure that the pressure of inlet gas is less than maximum working pressure (referring to maximum working pressure in manual). j) Please keep the whole system away from pollution. When system running, do not use polluting gas, such as particle of dust, dirt, fibre, glass or scrap iron. k) Please do warm-up instrument before working. Please do warm-up instrument, especially in using dangerous gas. Please close valve completely to make sure that there is not error flow. 1.4 General Mass flow controller (MFC) accurately measures and controls mass flow rates, which is widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc.. The typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation, vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. The CS200-A,C,D MFC/MFM are a latest generation MFC for use in semiconductor 3of35 applications and demanding industrial uses where its high accuracy and flexibility in interfacing are required. The CS200-A,C,D MFC/MFM incorporate a dual interface, voltage and current as well as RS-485，DeviceNet and ProfiBus digital interfaces. It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring. CS200-A,C,D series have wide range of power supply(available for ±8 ～ ±16 VDC or +14 ～ +28 VDC). In addition, auto-alarm, change of operating gas and range available through the digital interface. Customer Secondary Development of control and sample software is available through the open protocol. CS200-A,C,D MFC default setting： MAC address：32； RS485 baud rate：19200； Control mold： 0-5V analog signal control. 4of35 1.5 Specification CS200 Type CS200A CS200C ( 0～5,10,20,30,50,100,200,300,500)SCCM CS200D ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM Full scale range (N2) ( 0～1,2,3,5,10,20,30,50)SLM ( 0～1,2,3,5,10,20,30)SLM Accuracy ±1.0% S.P. (≥35% F.S.) ±0.35% F.S. (＜35% F.S.) Linearity ±0.5% F.S. Repeatability ±0.2% F.S. ≤1sec Response Time Normally Closed or Valve Rest Position ≤ 0.8 sec (SEMI E17-0600) Normally Open Normally Closed or Normally Normally Closed or Normally No Valve （F.S.≤30slm） No Valve No Valve Open Open 0.05～0.35MPa （Flow≤10slm） Differential Pressure 0.1～0.35MPa（10slm＜Flow≤30slm） ＜0.02MPa (0.05～0.35) MPa（≤10slm） (0.05～0.35) MPa（≤10slm） ＜0.02MPa (0.1～0.35) MPa（＞10slm） ＜0.02MPa (0.1～0.35) MPa（＞10slm） 0.2～0.45MPa（Flow＞30slm） Zero:≤±0.05% F.S./℃; Temperature Span: ≤±0.1% F.S.℃ （Flow≤30slm） Coefficient Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃ Span: ≤±0.2% F.S.℃ （Flow>30slm） Max Pressure 3MPa (435pisg) ＜0.6%F.S. per year without autozero Zero Drift 1×10-9 atm·cc / sec He Leak integrity Wetted Materials Viton; Surface Chemistry —— Surface Finish 25Ra Digital: RS485 or or 10Ra 25Ra （0～50）℃ ProfiBus Digital: RS485 DeviceNetTM or ProfiBus or Digital:RS485 or ProfiBus DeviceNetTM (0～20)mA N/A Analog:(0～5)VDC or (4～20)mA Analog:(0 ～ 5)VDC or (4 ～ or (0～20)mA 20)mA or (0～20)mA Digital: RS485 or DeviceNetTM or ProfiBus Power Supply Analog:(0～5)VDC or (4～20)mA or (0～20)mA 9 pin male sub-D ，15 pin male sub-D ，DeviceNetTM ，ProfiBus ，Analog VCR1/4” M； VCO1/4” M； VCR1/4” M; Compression FittingΦ10;Compression FittingΦ6； Compression Fitting 3/8”; Compression FittingΦ6, Compression FittingΦ3, Compression Fitting1/4”； Compression Fitting1/8”; Compression FittingΦ3； Compression Fitting1/4”， Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose; W-seal， A-sael ; Weight N/A ±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA) Electronic Connector Fittings or DeviceNetTM N/A Analog:(0 ～ 5)VDC or (4 ～ 20)mA or Output Signal Metal Cr/Fe ratio ＞2.0; CrO thickness ＞20 Angstroms （5～45）℃ Operation Temperature Input Signal 1×10-10 atm·cc / sec He Metal (Stainless Steel V/V, 5Ra) C-seal 1kg 0.8kg 1.2kg 1kg 1.2kg 1kg 5of35 Notes : MFC/MFM is calibrated by N2 as a standard gas. Units: SCCM (Standard Cubic Centimeter/Min); SLM (Standard Liter/Min) Standard Situation: Tem — 273.15K ( 0 ºC ); Air Pressure — 101325 Pa (760mm Hg) F.S. : Full Scale 1.6 Calibration Features Normally, the MFC are calibrated close to customer’s requirement ( the requirement should be accorded with the specification). Without customer’s information, the MFC are calibrated under standard conditions. 1.6.1 Standard conditions Without special conditions specified by the customer, the MFC is calibrated under the following standard conditions: Pressure Outlet: Atmospheric. Normally gas mass flow rate is transferred to gas volume flow rate at standard state. Mass flow rate unit: SCCM——standard cubic centimeter per minute. SLM——standard liter per minute. Standard state：Temperature —— 0ºC (273.15K) Pressure —— 101325Pa (760mmHg) At standard state, the gas density will be constant. The multiplication of density and volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume flow rate can represent mass flow rate. The standard mounting position is horizontal, And other positions such as vertical(inlet up or down)，flatwise or customized position are optional. The mounting 6of35 position should be specified by the customer to ensure the best accuracy. 1.6.2 Manufacturing Environment The MFC are assembled in a class 100 clean room, calibrated, packaged and controlled in class 1000 environment. The temperature is 22±2℃. 1.6.3 Precision Adjustment Each MFC is accurately controlled for 24 hours after manufacturing on a different calibration bench. The accuracy, the dynamic response, the stability to pressure variations is double checked, only qualified product available for sale. SECTION 2 INSTALLATION 2.1 General WARNING: Toxic, corrosive or explosive gases must be handled with extreme care. After installing the MFC, the system should be thoroughly checked to ensure it is leak-free. Purge the MFC with a dry inert gas for one hour before using corrosive gases. IMPORTANT: When installing the MFC, ensure that the arrow on the back of the unit in the same direction as the gas flow. 2.2 Unpacking The CS200-A,C,D MFC/MFM are assembled，calibrated and clean packaged under clean room conditions. These series products are packaged with two separately sealed plastic bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be removed in the entrance to the clean room. In order to minimize the contamination, the second clean bag should be removed in the clean room when MFC installed in the system. 2.3 Mechanical Installation 7of35 2.3.1 General Most applications will require a positive shutoff valve in line with the MFC. Pressurized gas trapped between the two devices can cause purge effects, and consideration must be given to the sitting of the shutoff valve (upstream or downstream) in relation to the process sequencing. It is recommended that you install an in-line filter upstream to the controller in order to prevent MFC from contamination. CS200-A,C,D should be mounted in the position accord with the requirement in the purchase order. The gas should be clean and dry. The mounting should be free from shock or vibration. The pictures of the product are shown in figure2-1,the dimensions of the product are shown in figure2-2, figure2-3，figure2-4.. Different fittings(Compression Fittingφ6, Compression Fittingφ3,Compression Fitting1/4 ， Compression Fitting1/8,VCR1/4 M, Compression Fitting3/8，1.5〞W-seal，1.5〞C-seal) are optional for customer, The length of the product L are shown in Table 2-1. Do not remove the protective end caps of the fittings until installation. Figure 2-1 CS200-A,C,D MFC/MFM 8of35 Figure 2-2 Product dimensions 9of35 Figure 2-3a Product with A-seal dimensions 10of35 Figure 2-3b Product with C-seal dimensions 11of35 Figure 2-3c Product with W-seal dimensions 12of35 Figure 2-4 Product dimensions Fitting Compression Fittingφ6; Compression Fittingφ3 Compression Fitting1/4; Compression Fittingφ10 Length Compression Fitting1/8; Compression Fitting3/8 L（mm） 112.8 Ф4(inner)×1hose VCR1/4〞 M 1.5〞 VCO1/4〞 M W-seal Ф6(inner)×1hose 1.5〞C-seal Ф5(inner)×1.5hose A-seal 124 105.2 Table 2-1 The length of the product with different fittings 13of35 Attention : The height (which is showing in figure 2-2 and figure 2-4 ) of 132mm are height without electric connectors of cable. It should be added around 50mm more after adding the electric connector. 2.3.2 Installation Place MFC according to the flow direction. 126.96.36.199 1/4VCR Connection Refer to figure 2-5 and figure 2-6. Check the gland to gland space, including the gaskets. Remove the plastic gland protector caps. When using loose VCR original style gaskets, inserting the gasket into the female nut. For VCR retainer gaskets, snap the gasket onto the male coupling. Tighten the nuts finger tight. Scribe both nut and body in order to mark the position of the nut. While holding the body with a wrench, tighten the nut: 1/8 turn past finger tight for 316L stainless steel and nickel gaskets. Figure 2-5 VCR original style gasket Figure 2-6 VCR retainer gasket 188.8.131.52 Two-ferrule (Compression Fitting) Connection Refer to figure 2-7. Check the gland to gland space. Remove the gland protector caps. 14of35 Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned as shown in figure2-7. Tighten the nuts finger tight. Use two spanners, one spanner locking the fitting stable, wrench another one to tighten in 1.25 turns to prove it’s not blow-by after installing the front ferrule, back ferrule and nut. Gland Nut Back ferrule Front ferrule Fitting Figure 2-7 Compression Fitting Connector Installation Attention : When installing the fitting, you should manually use spanner to wrench it tighten by 1/2 turn pulling up, (imported Compression Fitting should use spanner to be tighten in 1,25 turns) to prove its not blow-by after your installing the front ferrule 、back ferrule and nut. Please note you should use two spanners to operating, one spanner for locking the fitting stable and another one for revolving the nut. Especially when you dismantle the tube, you should operate by the two spanners otherwise fitting will become flexible which will affect its airproof function. 2.4 Electrical Installation 2.4.1 General With simple switching power supply, CS200-A,C,D MFC/MFM are available for ±8 to ±16 VDC (dual-ending) and +14 to +28 VDC (single-ending). Customer can choose as need. Customer can choose 9 pin male Sub-D or 15 pin male sub-D connector. 9 pin male 15of35 Sub-D connector is the SEMI Standard compatible, only 0-5V analog signal control and output available. 15 pin male sub-D connector, both 4-20mA or 0-20mA and 0-5V analog signal control and output available. CS200-A,C,D MFC/MFM can communicate with PC via RS485 ，DeviceNet or ProfiBus . 2.4.2 Connections The 9 pin male Sub-D connector, 15 pin male sub-D connector, RS485 connector ,DeviceNet connector ,Analog Signal Interface ，RS232-RS485 connector， ProfiBus connector of 9-pin female sub-D and ProfiBus connector of 15-pin male sub-D are shown in figure2-8, figure2-9 , figure 2-10 ,figure 2-11, figure 2-12 , figure2-13， figure2-14 and figure2-15. Attention : Although sharing with the same appearance of CS200-A,C,D MFC, the 0~5V Setpoint Input, the 4~20mA or 0～20mA Setpoint Input and the valve Over-ride are not available. That means pin1 and pin6 of D-sub 9 and pin1, pin7, pin8 and pin12 of D-sub 15 are not available. Figure 2-8 9 pin male D-sub connector Figure 2-9 15 pin male D-sub connector 16of35 Figure 2-10 RS485 connector Figure 2-12 Analog Signal Interface Figure 2-14 ProfiBus connector of 9-pin female sub-D Figure 2-11 Figure 2-13 DeviceNet connector RS232-RS485 connector Figure 2-15 ProfiBus connector of 15-pin male sub-D connector 17of35 2.4.3 Table of Selecting Type of Cable and its Illustration of Connection D082B/3B/4B 2E/3E/4E D08- 1/2/4 2F/3F/4F D08-1F/1FM/1FS/8C/8CM/1G/1GM Input ±15V Input +24V To Serial of PC To USB of Computer MFC (DB15 Pin) QCX-19/ QCX-P19 QCX-48 QCX-17/QCX-P17 QCX-46 QCX-41 QCX-43 QCX-34 QCX-50 MFC (DB9 pin) QCX-20/ QCX-P20 QCX-49 QCX-18/QCX-P18 QCX-47 QCX-42 QCX-34 QCX-50 Table 2-2 Table of Selecting Type of Cable Figure 2-16 CS Product and Illustration of Connecting Power D08-1D/1F 18of35 Figure 2-17 CS Product and Illustration of Connecting Power Figure 2-18 CS Product and Illustration of Connecting Power 19of35 Figure 2-19 Illustration of Connecting CS Product Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and some accessories. For more details, contact Sevenstar or its local agent. 20of35 2.5 Checking Before Operation Before operating the MFC the following checks should be completed: 2.5.1 Check that tubing is leak free. 2.5.2 Check the process sequence and proper function of all other gas components involved. 2.5.3 Check the voltage of command signals and power supply to the MFC/MFM. 2.5.4 Check that the appropriate type of gas is being supplied at the rated pressure. 2.5.5 Allow the MFC to warm up for 20 minutes, and then check the zero level output. 2.5.6 Use dry inert gas for test runs. 2.5.7 Prior to using the MFC for extremely corrosive gases, purge MFC with a dry inert gas for one hour. SECTION3 FUNCTIONS 3.1 General Based on new sensor driver technology, zero balance technology and VCP technology, CS200-A,C,D MFC/MFM presents high performance and reliability. And more digital functions are developed in CS200-A,C,D products. 3.2 Control Mode CS200-A,C,D MFC/MFM are available for digital，0-5V voltage and 4-20mA or 0-20mA current control mode and output. When customer chooses one of the three control modes, the others will be screened. The analog output will be available at all times. The flow output of the CS200-A,C,D MFC/MFM will be available through the RS485 interface, even in the analog control mode. The setting of the CS200-A,C,D MFC/MFM can be provided to the MFC through one of three sources, in digital or analog mode. Please refer to “Digital MFC Communication User Manual” for more details. 21of35 3.3 Zero The Zero function can be commanded through the digital interface or zero-button. Before zero MFC, please make sure that no gas flow through MFC. Then zero MFC by the digital interface or zero-button. The zero-button must be pressed continuously for 0.5 seconds in order to start zero process. The green LED will blink during the zero process. After zero finished, the green LED will be on constantly. CS Product of the ProfiBus has the Zero function,but does not have the LED. 3.4 Soft-Start The CS200-A,C,D MFC/MFM support soft-start function. Soft-start allows customer change the setting of MFC with definite rate. Please refer to “Digital MFC Communication User Manual ” for more details. 3.5 Delay Delay is used to postpone the start of flow from zero flow to the received set-point. It is programmed in millisecond but the MFC internally rounds up any value to 100ms. For example, when the delay value is 200, MFC will delay 200ms then receiving the operate command. When the set point is less than the min control rate, the valve will shut off, and when larger than the min control rate, MFC will start after the set delay time. Special default: Values from 1 to 49 ms will be programmed as 100ms. Delay applies to digital and analog set-points. 3.6 Valve Command Mode CS200-A,C,D MFC/MFM are available for valve-close or valve-open by input digital signal or analog voltage directly. The Valve Command Mode is used to select one of three ways to interpret the analog signal of Valve Command. Please refer to “Digital MFC Communication User Manual” for more details. 3.7 Valve Type CS200-A,C,D MFC/MFM have two types of valve: Normally open(NO) or Normally closed(NC) . When MFC do not have power supply, the “NO” type valve is open and gas 22of35 can flow through the MFC; the “NC” type valve is closed and gas can not flow through. Please mention the valve type when you order the MFC. 3.8 Multi-Gas and Multi-Flow The multi-gas and multi-range technology has been developed in the CS200-A,C,D series MFC/MFM. Customer can change gas convert factor, full scale of MFC via digital interface. Full scale of CS200-A,C,D series MFC/MFM can be re-ranged from 30% to 110%F.S. For example, an MFC with 100SCCM full scale , the new full scale can be re-ranged between from 30SCCM to 110SCCM. CS200-A,C,D MFC/MFM support customer offset by the target null value. The target null value is a customer-programmed constant used to offset the flow output independently of all other sensor offset constants, including the zero process. For example, set Target Null Value: -20%F.S，then when no flow through MFC/MFM，the reading is -20%F.S，with gas flow 20%F.S through MFC/MFM，the reading is 0%F.S。Offset range is from -100%F.S to100%F.S。 Please refer to “Digital MFC Communication User Manual” for more details. 3.9 Total Flow Accumulator The Total Flow accumulator will record the amount of gas (in SCC) that has been delivered by CS200-A,C,D MFC/MFM. The amount of purge will not be accumulated in the total flow amount. For example, the total reading is 3000, means the amount of gas delivered by MFC is 3000SCC Please refer to “Digital MFC Communication User Manual” for more details. 3.10 Alarm The CS200-A,C,D MFC/MFM will monitor and store certain abnormal conditions as described below. These conditions can be read and reset from the RS485 interface. Provisions will be made for masking (disabling) the alarms or warnings on an individual basis. 23of35 Warning and Alarms: Sensor Zero Output Out of Bounds EEPROM Failure Valve Coil Failure or Valve Disconnected Temperature Out of Operating Range After power up the LED on the top of the CS200-A,C,D MFC/MFM is turned GREEN. A warning condition will be announced by a blinking RED and whenever an alarm condition is detected it will be set continuously to RED. Please refer to “Digital MFC Communication User Manual” for more details. 3.11 LED There is a green-red LED located on the top of the MFC. The constant green LED indicates the power on. Green blinking indicates that the MFC is zeroing. A blinking red LED indicates warning condition. Constant red indicates error condition. In DeviceNet connection, there will be 2 LED on the top of CS200-A,C,D, refer to CS200MFC(CS220)_DnetSpecification_V1.01 for more details. In ProfiBus connection, there will be 1 LED on the top of CS200-A,C,D, the constant green LED indicates that the communication is normal .No light indicates warning condition. Attention : When the valve of MFC is fully opened , it can be functioned as a MFM. In that case, the maximum flow testing voltage could reach beyond +10V, please be careful, while flow is beyond F.S. +5V(Full Scale), the real flow will have no linearity corresponding with flow testing voltage. While it’s purging, flow display will be inaccurate, even showing “reduce” while the real flow is enhanced, please be sure it’ll be no damaged to device itself. SECTION 4 MAINTENANCE 4.1 General 24of35 No routine maintenance is required to be performed on the MFM or MFC, Other than occasional cleaning and re-calibration: It can be used about 3 or 4 years with an ultra-clean and non corrosive gas. It can be used about 1 or 2 years with a low purity gas or a corrosive gas. For any other problems, contact Sevenstar. 4.2 Caution 4.2.1 Medium Forbidden The used gas should be purified without dust，liquid and oil stain. If necessary, the filter should be added to gas system for purification. If the outlet of MFC is connected to liquid sources, a One-way valve should be added to avoid the liquid back to destroy MFC. Attention : For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure that the fixing and fitting are airtight. It becomes necessary to remove the controller from the system, purge the controller thoroughly with a dry inert gas such as nitrogen, before disconnecting the gas connections. Failure to purge the controller could cause a fire or explosion resulting in death. 4.2.2 Seal of Valves The Solenoid Valve of MFC is only for adjustment, can not be used for shut-off. Generally, shut-off valves should be added in upstream and downstream of MFC for protection. Normally leakage of MFC valve is not more than 1% F.S. SECTION 5 TROUBLESHOOTING 5.1 Initial Check 5.1.1 Check the gas supply pressure and check the flow-path to the MFC/MFM has been opened. 25of35 5.1.2 Ensure that the power supply and command signals are correctly transmitted to the D-connector pins and RS485. 5.1.3 Check that the output signal matches the external reading. 5.2 Troubleshooting Use the following table to locate the fault. SYMPTOMS 1 Output reading, without gas flow, is not zero Possible cause Gas flow is actually present Zero drift other Gas connection incorrect Pressure incorrect Wrong control mode 2 MFC will not control 3 MFC will not communicate with PC Attention Power failure Setpoint incorrect Contamination Defective sensor PCB problems Defective Mechanics Power failure Cable problems Address conflict Baud rate error PCB problems Action Check closure of series shutoff valve Zero MFC *Contact Sevenstar Check gas connection Check pressure condition Change the control mode by the software Check Power and pin position Check setpoint signal *Contact Sevenstar *Contact Sevenstar *Contact Sevenstar *Contact Sevenstar Check Power and pin position Check cable and connector Check address of MFC Check baud rate of MFC *Contact Sevenstar : * Mark indicates that reparation and adjustment must be dealt under specialist advices。For any other problems, contact Sevenstar. 26of35 SECTION 6 WARRANTY AND SERVICES 6.1 Guarantee of Sevenstar Sevenstar and its authorized distributors assure that there are not flaw of the material and quality of product within 12 months since the date of the product purchased by you. The compensation for customer is only limited to invalid part for substitution, installation and processing flaw. It is guaranteed that all part chose by customers are suitable to relative manufacturer. Other relative statements, guarantee and obligation of status and usage of product, whether direct or indirect, are definite to be excluded. In any circumstance, Sevenstar and its authorized distributors are not charged of any obligation of direct or indirect loss for customers or others. 6.2 Product Warranty 6.2.1 Sevenstar products are guaranteed against defects in materials and workmanship if used in accordance with specifications and not subject to physical damage, contamination, alteration or retrofit. Warranty periods: One year 6.2.2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax, phone or e-mail as soon as possible after receipting the goods. 6.2.3 During the warranty period, products must only be repaired by authorized Sevenstar service centers; Otherwise, the Sevenstar product warranty will be invalidated. 6.2.4 Repairs will be performed free of charge during the one-year warranty period. If MFC are out of warranty, Sevenstar will notify the owner of replacement or repair costs before proceeding. Factory service and repairs are guaranteed 90 days. The warranty excludes consumable materials and wear parts (in teflon, viton, etc.). 6.2.5 No MFC will be accepted for repair or warranty without a decontamination and purge certificate. 6.2.6 Each MFC is individually checked (visual inspection of fittings, helium leak test and 27of35 flow calibration). Sevenstar shall not be responsible for any damage caused by gas leakage or the use of a dangerous gas. Users are responsible for following the safety rules applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty, and MFC that have been damaged as a result of improper use will not be replaced by Sevenstar. 6.2.7 Specific warranty requirements are as follows : A，Gas must be clean and particle-free, which means a filter must be fitted in the gas line upstream of the MFC. B，Gas must comply with the following pressure specifications: 1. Gas pressure must never exceed 3MPa. 2. Differential pressure must be more than 0.05MPa for full-scale flow through the MFC valve unless another value is specified in the user’s manual. 3. Differential pressure must be less than 0.35MPa for the MFC valve to regulate without gas-flow oscillation unless another value is specified in the user’s manual. 4. Pressure at the mass-flow inlet must be regulated by an accurate pressure regulator to prevent gas-flow oscillation. C，Electrical connection requirements are as follows: The system must be wired carefully: non-observance of the pin-out may irreversibly damage the electronic board inside the MFC, in which case the warranty will be invalidated. D，Gas connections: The fittings must be handled carefully. Sevenstar guarantees that all fittings have been individually inspected and are scratch-free. E，Fitting procedure: The fitting procedure set out in the manual must be followed meticulously. Specifically, the purge procedure is very important if corrosive gases or toxic gases are used. 28of35 F，The mass-flow must not be dismounted: The MFC warranty will be invalidated if the seal between the MFC block and cover is torn. 6.3 Services Sevenstar can provide services like start-up service, software development, gas system design, training, etc. Please visit mfc.sevenstar.com.cn for more information and find your nearest service and calibration centre. 6.4 Disclaimer Beijing Sevenstar Electronics Co., Ltd is not responsible to loss as following situation: 1. Nature disaster and calamity; 2. Unsuitable operation and unreasonable usage; 3. Operating and storing in inappropriate or execrable circumstance; 4. Usage of instrument beyond user’s manual; 5. Unauthorized change or replacement of product. For example: It is whether that gas path is not cleared before using corrodible gas or MFC is contaminated or blocked by particle such as dust. 29of35 AppendixⅠ CS200 Selection Guide CS200-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d] [t] –Type - [A] Elastomer type - [C] Metal type, stainless steel VV, 10Ra - [D] Metal type [g,g,g] –Gas Standard: SEMI52-0302（Note:029 NH3 available to type C,D only） For example -[ 013 ] N2 -[ 007 ] H2 -[ 000 ] Mixture Gases (please consult [d] for details) [v] – Type of Valve - [ O ] Normally open (unavailable to MFM) - [ C ] Normally closed (unavailable to MFM) - [ N ] No Valve (available to MFM only) [r,r,r,r] –Full Scale - [ 002C] - [ 003C] - [ 005C] - [ 010C] - [ 020C] - [ 030C] - [ 050C] - [ 100C] - [ 200C] - [ 300C] - [ 500C] - [ 000C] 2SCCM (available to type C, D only) 3SCCM (available to type C, D only) 5SCCM 10SCCM - [ 001L] 1SLM 20SCCM - [ 002L] 2SLM 30SCCM - [ 003L] 3SLM 50SCCM - [ 005L] 5SLM 100SCCM - [ 010L] 10SLM 200SCCM - [ 020L] 20SLM 300SCCM - [ 030L] 30SLM 500SCCM - [ 050L]50SLM(available to type A) customized Full scale, please consult [d] for details [a] –Electronic connector - [ R ] DB 9 pin - [ X ] DeviceNetTM - [ F ] ProfiBus - [ D ] DB15 pin - [ Y ] DeviceNetTM +Analog [f,f] –Fittings -[AA] Compression Fittingφ3mm -[BB] Compression Fitting 1/8" (available to type A only) -[GG] Compression Fittingφ6mm -[JJ ] Compression Fittingφ10mm (available to type A only) -[CC] Compression Fitting 1/4" -[SC] IGS C seal (available to type C,D only) -[MM] VCR 1/4" -[SW] IGS W seal (available to type C,D only) -[UU] VCO 1/4"(available to type A only) -[RR]φ6(inner)x1hose(available to type A only) -[VV]φ5(inner)x1.5hose(available to type A only) -[TT]φ4(inner)x1hose(available to type A only) -[SA] A seal (available to type A only) -[XX ] customized fittings please consult [d] for details [s] –Seal Materials -[ V ] Viton(available to type A, only) -[ M ] Metal (available to type C, D only) 30of35 [m] –Mounting Position -[ H ] Horizontal -[ E ] HESD(Horizontal Edge Side Down) -[ U ] Vertical Inlet Up -[ D ] Vertical Inlet Down [d] –Description -[ - ]：Default Value The letters on cover and tag：In English Differential Pressure: (0.05 ~ 0.35) MPa (7.3~50.8 psid) (FLOW≤10SLM) (0.1 ~ 0.35) MPa (14.5~50.8 psid) (10SLM＜FLOW≤30SLM ) (0.2 ~ 0.45) MPa (29.0~65.3 psid) (30SLM＜FLOW) CS200-A、CS200-C、CS200-D XXXN：＜0.02MPa (2.9psid) Max inlet pressure :3 MPa (435.1 psig) Calibration temperature :(22±2)℃ Valve command mode :2 Power Supply: +24V Command type:DeviceNet default digital mode; Profibus default mode for Profibus; other analog voltage -[ S ] Customized Requirement For Example: I/O sign:4~20mA； The proportion of mixture gases should be indicated: N2 (60%) + CO2(40%)； Customer Differential Pressure: (0.05 ~ 0.3) MPa； Customer Calibration Temperature: 40℃； The letters on cover and tag: in Chinese； Valve command mode:0； Power Supply: ±15V Command type:Profibus default mode for analog voltage and other customized requirements. 31of35 Take CS200-A013C500CDGGVHS as the example CS200 - A 013 C 500C D GG V H S Model：CS200 Type: Elastomer type Gas: N2 Type of Valve: Normally closed Full range Electronic connector：DB15 Fittings：Compression Fittingφ6mm Seal material: Viton Mounting position For example Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40℃ 32of35 APPENDIX II CONVERSION FACTOR GAS Air Ar AsH3 BBr3 BCl3 BF3 B2H6 CCl4 CF4 CH4 C2H2 C2H4 C2H6 C3H4 C3H6 C3H8 C4H6 C4H8 C4H10 C5H12 CH3OH C2H6O C2H3Cl3 CO CO2 C2N2 Cl2 D2 F2 GeCl4 GAS CODE (SEMIE52-0302) 008 004 035 079 070 048 058 101 063 028 042 038 054 068 069 089 093 104 117 240 176 136 112 009 025 059 019 014 018 113 SPECIFIC HEAT ( Cal/g ℃) 0.2400 0.1250 0.1168 0.0647 0.1217 0.1779 0.5020 0.1297 0.1659 0.5318 0.4049 0.3658 0.4241 0.3633 0.3659 0.3990 0.3515 0.3723 0.4040 0.3916 0.3277 0.3398 0.1654 0.2488 0.2017 0.2608 0.1145 1.7325 0.1970 0.1072 DENSITY (g/l 0℃) 1.2930 1.7837 3.4780 11.1800 5.2270 3.0250 1.2350 6.8600 3.9636 0.7150 1.1620 1.2510 1.3420 1.7870 1.8770 1.9670 2.4130 2.5030 2.6500 3.2190 1.4300 2.0550 5.9500 1.2500 1.9640 2.3220 3.1630 0.1798 1.6950 9.5650 CONVERSION FACTOR 1.001 1.420 0.673 0.378 0.450 0.508 0.441 0.306 0.420 0.722 0.596 0.597 0.482 0.421 0.398 0.358 0.322 0.299 0.261 0.217 0.584 0.392 0.278 1.000 0.793 0.451 0.858 0.997 0.931 0.267 33of35 GAS GeH4 H2 HBr HCl HF HI H2S He Kr N2 Ne NH3 NO NO2 N2O O2 PCl3 PH3 PF5 POCl3 SiCl4 SiF4 SiH4 SiH2Cl2 SiHCl3 SF6 SO2 TiCl4 WF6 Xe GAS CODE (SEMIE52-0302) 043 007 010 011 012 017 022 001 005 013 002 029 016 026 027 015 193 031 143 102 108 088 039 067 147 110 032 114 121 006 SPECIFIC HEAT ( Cal/g ℃) 0.1405 3.4224 0.0861 0.1911 0.3482 0.0545 0.2278 1.2418 0.0593 0.2486 0.2464 0.5005 0.2378 0.1923 0.2098 0.2196 0.1247 0.2610 0.1611 0.1324 0.1270 0.1692 0.3189 0.1472 0.1332 0.1588 0.14890 0.1572 0.0956 0.0379 DENSITY (g/l 0℃) 3.4180 0.0899 3.6100 1.6270 0.8930 5.707 1.5200 0.1786 3.7390 1.2500 0.9000 0.7600 1.3390 2.0520 1.9640 1.4270 6.1270 1.5170 5.6200 6.8450 7.5847 4.6430 1.4330 4.5060 6.0430 6.5160 2.8580 8.4650 13.2900 5.8580 CONVERSION FACTOR 0.570 1.010 0.999 0.988 1.001 1.000 0.802 1.420 1.431 1.000 1.431 0.719 0.978 0.737 0.710 0.981 0.358 0.690 0.302 0.302 0.284 0.348 0.600 0.416 0.340 0.258 0.687 0.206 0.217 1.431 34of35 Conversion Factors Instruction： MFC and MFM are standard calibrated by N2 while it’s out of factory. Other gas calibrations can be approximated by converting of conversion factors of our instruction. While using other gas operating: One single gas: The conversion factors could find out in the users specification instruction. A mixture of two or more gases: Assume there is “n” sorts of gases, could calculate the conversion factors C by the following formula: Basic Formula： C=0.3106 N /ρ(Cp) ρ — Density of the gas Cp — Specific heat of the gas N — Structure factors of gas-molecule (See the following table) Table . Gas-Molecule Composing factors COMPOSITION Single atom numerator Double atom numerator Tree atom numerator Multi-atom numerator EXAMPLE Ar He CO N2 CO2 NO2 NH3 C4H8 N VALUE 1.01 1.00 0.94 0.88 For mixture gases： N = N1 (ω1/ωT )+N2 (ω2/ωT ) + ···+ Nn (ωn/ωT ) Then： 0.3106 [N1 (ω1/ωT )+N2 (ω2/ωT ) + ···+ Nn (ωn/ωT )] C = ———————————————————————— ρ1Cp1 (ω1/ωT )+ ρ2Cp2 (ω2/ωT )+ ···+ ρnCpn (ωn/ωT) ω1 …ωn — The flow of single gas ωT — The flow of mixture gas ρ1…ρn — The density of single gas CP1…CPn —Specific heat of the single gas N1…Nn —Structure factors of gas-molecule (See Table 6.) Attention : 1） Standard：Temperature 273.15K (0 ºC ); Air Pressure— 101325 Pa (760mm Hg) 2） Please feel free to contact us if the request gas conversion factors could not be found in our appendix. 35of35 Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co.,Ltd. CS Series Mass Flow Controller Beijing Sevenstar Electronics Co., Ltd. Mass Flow Meter Subsidiary Co., Ltd. Address: P.O.BOX Post code： Tel： Fax： Homepage： E-Mail: No.1 Jiuxianqiao East Rd., Chaoyang District, Beijing, China 3#741, Beijing, China 100015 (+86)-10-64362939 (+86)-10-64361831 ext. 8491 or 8315 (+86)-10-64362923 or 64362939 http://mfc.sevenstar.com.cn [email protected] Shanghai Office: Room 1916, Unicom International Tower, NO.547 Tianmu West Road, Zhabei District, Shanghai, 200070, China Tel： (+86)-21-33030324 Fax： (+86)-21-63533265 Shenzhen Office: Room 712, Section B, Qiche Tower, No.45 Zhenhua Road, Futian District, Shenzhen, China Zip code： 518031 Tel： (+86)-755-88290258 Fax： (+86)-755-88294770 *Description may be changed following improvements to product. The information contained in this document is subject to change without notice. *If there is any mistake in this uses manual, please feel free to contact us. *©2010 Beijing Sevenstar Electronics Co.,Ltd. All rights reserved.
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