cn

cn
REV.2.3
CS200-A,C,D MFC/MFM
User’s
Manual
2 0 13 . 6
Contents
SECTION 1
INTRODUCTION
1.1 Declaration ...................................................
1.2 Attention.......................................................
1.3 The notice of safety ......................................
1.4 General .........................................................
1.5 Specification .................................................
1.6 Calibration features .....................................
SECTION 2
1
2
2
3
5
6
INSTALLATION
2.1 General .........................................................
2.2 Unpacking .....................................................
2.3 Mechanical Installation ...............................
2.3.1 General ........................................................
2.3.2 Installation ..................................................
2.3.2.1 1/4VCR Installation .................................
2.3.2.2 Compression Fitting Installation ..............
2.4 Electrical Installation...................................
2.5 Checking Before Operation.......................
3.4 Soft-Start .........................................................
3.5 Delay ................................................................
3.6 Valve Command Mode ...................................
3.7 Valve Type........................................................
3.8 Multi-Gas and Multi-Flow .............................
3.9 Total Flow Accumulator .................................
3.10 Alarm .............................................................
7
7
7
8
14
14
14
15
21
3.11 LED ................................................................
SECTION 4
MAINTENANCE
4.1 General ............................................................
4.2 Caution ............................................................
FUNCTIONS
3.1 General...........................................................
5.1 Initial check .....................................................
5.2 Troubleshooting ..............................................
3.2 Control Mode ...............................................
3.3 Zero ...............................................................
25
26
SECTION 6 WARRANTY AND SERVICES
6.1 Guarantee of Sevenstar ..................................
6.3 Services ............................................................
21
21
22
24
25
SECTION 5 TROUBLESHOOTING
6.2 Product Warranty…………………………...
SECTION3
22
22
22
22
23
23
23
24
6.4 Disclaimer ........................................................
APPENDIX I .........................................................
APPENDIXⅡ .......................................................
27
27
29
29
30
33
Instruction of MFC/MFM
1.1 Declaration
The copy right of The user’s manual of mass flow controller and mass flow meter is
subjected to Beijing Sevenstar Electronics Co., Ltd (following abbr. Sevenstar), which is
not allowed to duplicate, store and distribute any part of this manual in mean of electric,
mechanical, photocopy, recording or other way without permission of Sevenstar. This
manual is not assured that there is no mistake and missing in which have been corrected
strictly, and the publisher is under no obligation to the mistake or missing, meanwhile the
publisher is not in charge of any loss that this manual leads to.
Beijing Sevenstar Electronics Co. , Ltd
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1.2 Attention
Dear customer, thanks for using CS mass flow controller and mass flow meter. This
manual describes in detail important issues about correct and safe operations of the
product.
User of the product should read and comprehend this manual and pay attention to the
text with labels
and notices.
Sevenstar assumes no liability for the customer’s failure to comply with this manual.
This manual is necessary for your installation and maintenance, please keep it carefully.
1.3 The notice of safety
Please pay attention to the below notices when reading this manual. We are not responsible
for any result without abiding by the below notices.
a) Do not replace any components or disassemble instrument.
Do not replace any components, or disassemble the instrument without any authorized
and make sure that the label or/and seal of product is not removed when returning for
reworking, recalibration and maintenance.
b) Please contact professional for technical service.
Do not replace any components. Any technical support is provided by professional who
must be authorized by Sevenstar.
c) Please pay more attention to use dangerous gas.
Instrument should be purged completely and keep safety if dangerous gas is used.
Meanwhile make sure that moist gas must not react with material of seal and
instrument.
d) Please pay attention to purging instrument.
The whole system should be purged by dry gas after and before the instrument is
installed.
e) Please abide by proper steps of purging.
Product should be purged and handled with gloves.
f) Do not use the instrument in explosive environment.
Do not use the instrument in explosive environment, unless the safety certificate is
available.
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g) Please use proper fittings and keep the rules.
All fittings of instrument must be matched according to the listing in manual. Please
read manual carefully before screwing tightly.
h) Please do leakage check.
Please check carefully all of vacuum parts and make sure that there is not leakage in
the system.
i) Please make sure that instrument is working under safe pressure.
Please make sure that the pressure of inlet gas is less than maximum working pressure
(referring to maximum working pressure in manual).
j) Please keep the whole system away from pollution.
When system running, do not use polluting gas, such as particle of dust, dirt, fibre,
glass or scrap iron.
k) Please do warm-up instrument before working.
Please do warm-up instrument, especially in using dangerous gas. Please close valve
completely to make sure that there is not error flow.
1.4 General
Mass flow controller (MFC) accurately measures and controls mass flow rates, which
is widely applied in the fields as: semiconductor and IC fabrication, special materials
science, chemical industry, petrolic industry, pharmaceutical industry, environmental
protecting and vacuum system researching, etc.. The typical applications include:
microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma
etching, sputtering, ion implantation, vacuum deposition equipment, optical fiber melting,
micro-reaction equipment, mixing & matching gas system, capillary flow control system,
gas chromatograph and other analytical instruments.
The CS200-A,C,D MFC/MFM are a latest generation MFC for use in semiconductor
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applications and demanding industrial uses where its high accuracy and flexibility in
interfacing are required.
The CS200-A,C,D MFC/MFM incorporate a dual interface, voltage and current as
well as RS-485,DeviceNet and ProfiBus digital interfaces. It is possible to operate the
instrument completely digitally or it can be operated in analog mode with digital
monitoring. CS200-A,C,D series have wide range of power supply(available for ±8 ~
±16 VDC or +14 ~ +28 VDC).
In addition, auto-alarm, change of operating gas and range available through the
digital interface. Customer Secondary Development of control and sample software is
available through the open protocol.
CS200-A,C,D MFC default setting:
MAC address:32;
RS485 baud rate:19200;
Control mold:
0-5V analog signal control.
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1.5 Specification
CS200
Type
CS200A
CS200C
( 0~5,10,20,30,50,100,200,300,500)SCCM
CS200D
( 0~2,3,5,10,20,30,50,100,200,300,500)SCCM
Full scale range (N2)
( 0~1,2,3,5,10,20,30,50)SLM
( 0~1,2,3,5,10,20,30)SLM
Accuracy
±1.0% S.P. (≥35% F.S.)
±0.35% F.S. (<35% F.S.)
Linearity
±0.5% F.S.
Repeatability
±0.2% F.S.
≤1sec
Response Time
Normally Closed or
Valve Rest Position
≤ 0.8 sec (SEMI E17-0600)
Normally Open
Normally Closed or Normally
Normally Closed or Normally
No Valve
(F.S.≤30slm)
No Valve
No Valve
Open
Open
0.05~0.35MPa (Flow≤10slm)
Differential Pressure
0.1~0.35MPa(10slm<Flow≤30slm)
<0.02MPa
(0.05~0.35) MPa(≤10slm)
(0.05~0.35) MPa(≤10slm)
<0.02MPa
(0.1~0.35) MPa(>10slm)
<0.02MPa
(0.1~0.35) MPa(>10slm)
0.2~0.45MPa(Flow>30slm)
Zero:≤±0.05% F.S./℃;
Temperature
Span: ≤±0.1% F.S.℃ (Flow≤30slm)
Coefficient
Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃
Span: ≤±0.2% F.S.℃ (Flow>30slm)
Max Pressure
3MPa (435pisg)
<0.6%F.S. per year without autozero
Zero Drift
1×10-9 atm·cc / sec He
Leak integrity
Wetted Materials
Viton;
Surface Chemistry
——
Surface Finish
25Ra
Digital: RS485
or
or
10Ra
25Ra
(0~50)℃
ProfiBus
Digital: RS485
DeviceNetTM
or ProfiBus
or
Digital:RS485 or ProfiBus
DeviceNetTM
(0~20)mA
N/A
Analog:(0~5)VDC or (4~20)mA
Analog:(0 ~ 5)VDC or (4 ~
or (0~20)mA
20)mA or (0~20)mA
Digital: RS485 or DeviceNetTM or ProfiBus
Power Supply
Analog:(0~5)VDC or (4~20)mA or (0~20)mA
9 pin male sub-D ,15 pin male sub-D ,DeviceNetTM
,ProfiBus ,Analog
VCR1/4” M; VCO1/4” M;
VCR1/4” M;
Compression FittingΦ10;Compression FittingΦ6;
Compression Fitting 3/8”;
Compression FittingΦ6,
Compression FittingΦ3,
Compression Fitting1/4”;
Compression Fitting1/8”; Compression FittingΦ3;
Compression Fitting1/4”,
Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose;
W-seal,
A-sael ;
Weight
N/A
±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA)
Electronic Connector
Fittings
or
DeviceNetTM
N/A
Analog:(0 ~ 5)VDC or (4 ~ 20)mA or
Output Signal
Metal
Cr/Fe ratio >2.0; CrO thickness >20 Angstroms
(5~45)℃
Operation Temperature
Input Signal
1×10-10 atm·cc / sec He
Metal (Stainless Steel V/V, 5Ra)
C-seal
1kg
0.8kg
1.2kg
1kg
1.2kg
1kg
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Notes
:
MFC/MFM is calibrated by N2 as a standard gas.
Units:
SCCM (Standard Cubic Centimeter/Min);
SLM
(Standard Liter/Min)
Standard Situation:
Tem — 273.15K ( 0 ºC );
Air Pressure — 101325 Pa (760mm Hg)
F.S. :
Full Scale
1.6 Calibration Features
Normally, the MFC are calibrated close to customer’s requirement ( the requirement
should be accorded with the specification). Without customer’s information, the MFC are
calibrated under standard conditions.
1.6.1 Standard conditions
Without special conditions specified by the customer, the MFC is calibrated under the
following standard conditions:
Pressure Outlet: Atmospheric.
Normally gas mass flow rate is transferred to gas volume flow rate at standard state.
Mass flow rate unit:
SCCM——standard cubic centimeter per minute.
SLM——standard liter per minute.
Standard state:Temperature —— 0ºC (273.15K)
Pressure —— 101325Pa (760mmHg)
At standard state, the gas density will be constant. The multiplication of density and
volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume
flow rate can represent mass flow rate.
The standard mounting position is horizontal, And other positions such as
vertical(inlet up or down),flatwise or customized position are optional. The mounting
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position should be specified by the customer to ensure the best accuracy.
1.6.2 Manufacturing Environment
The MFC are assembled in a class 100 clean room, calibrated, packaged and
controlled in class 1000 environment. The temperature is 22±2℃.
1.6.3 Precision Adjustment
Each MFC is accurately controlled for 24 hours after manufacturing on a different
calibration bench. The accuracy, the dynamic response, the stability to pressure
variations is double checked, only qualified product available for sale.
SECTION 2
INSTALLATION
2.1 General
WARNING: Toxic, corrosive or explosive gases must be handled with extreme care.
After installing the MFC, the system should be thoroughly checked to ensure it is leak-free.
Purge the MFC with a dry inert gas for one hour before using corrosive gases.
IMPORTANT: When installing the MFC, ensure that the arrow on the back of the unit
in the same direction as the gas flow.
2.2 Unpacking
The CS200-A,C,D MFC/MFM are assembled,calibrated and clean packaged under
clean room conditions. These series products are packaged with two separately sealed
plastic bags. The outside is common plastic bag, the inside is clean bag. The outside bag
should be removed in the entrance to the clean room. In order to minimize the
contamination, the second clean bag should be removed in the clean room when MFC
installed in the system.
2.3 Mechanical Installation
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2.3.1 General
Most applications will require a positive shutoff valve in line with the MFC.
Pressurized gas trapped between the two devices can cause purge effects, and consideration
must be given to the sitting of the shutoff valve (upstream or downstream) in relation to the
process sequencing. It is recommended that you install an in-line filter upstream to the
controller in order to prevent MFC from contamination.
CS200-A,C,D should be mounted in the position accord with the requirement in the
purchase order. The gas should be clean and dry. The mounting should be free from shock
or vibration. The pictures of the product are shown in figure2-1,the dimensions of the
product are shown in figure2-2, figure2-3,figure2-4.. Different fittings(Compression
Fittingφ6,
Compression
Fittingφ3,Compression
Fitting1/4 , Compression
Fitting1/8,VCR1/4 M, Compression Fitting3/8,1.5〞W-seal,1.5〞C-seal) are optional for
customer, The length of the product L are shown in Table 2-1. Do not remove the
protective end caps of the fittings until installation.
Figure 2-1 CS200-A,C,D MFC/MFM
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Figure 2-2 Product dimensions
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Figure 2-3a Product with A-seal dimensions
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Figure 2-3b Product with C-seal dimensions
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Figure 2-3c Product with W-seal dimensions
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Figure 2-4 Product dimensions
Fitting
Compression Fittingφ6; Compression Fittingφ3
Compression Fitting1/4; Compression Fittingφ10
Length
Compression Fitting1/8; Compression Fitting3/8
L(mm)
112.8
Ф4(inner)×1hose
VCR1/4〞 M
1.5〞
VCO1/4〞 M
W-seal
Ф6(inner)×1hose
1.5〞C-seal
Ф5(inner)×1.5hose
A-seal
124
105.2
Table 2-1 The length of the product with different fittings
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Attention
:
The height (which is showing in figure 2-2 and figure 2-4 ) of 132mm are height without electric connectors
of cable. It should be added around 50mm more after adding the electric connector.
2.3.2 Installation
Place MFC according to the flow direction.
2.3.2.1 1/4VCR Connection
Refer to figure 2-5 and figure 2-6. Check the gland to gland space, including the
gaskets. Remove the plastic gland protector caps. When using loose VCR original style
gaskets, inserting the gasket into the female nut. For VCR retainer gaskets, snap the gasket
onto the male coupling. Tighten the nuts finger tight. Scribe both nut and body in order to
mark the position of the nut. While holding the body with a wrench, tighten the nut: 1/8
turn past finger tight for 316L stainless steel and nickel gaskets.
Figure 2-5 VCR original style gasket
Figure 2-6 VCR retainer gasket
2.3.2.2 Two-ferrule (Compression Fitting) Connection
Refer to figure 2-7. Check the gland to gland space. Remove the gland protector caps.
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Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned
as shown in figure2-7. Tighten the nuts finger tight. Use two spanners, one spanner locking
the fitting stable, wrench another one to tighten in 1.25 turns to prove it’s not blow-by after
installing the front ferrule, back ferrule and nut.
Gland
Nut
Back ferrule
Front ferrule
Fitting
Figure 2-7 Compression Fitting Connector Installation
Attention
:
When installing the fitting, you should manually use spanner to wrench it tighten by 1/2 turn pulling up,
(imported Compression Fitting should use spanner to be tighten in 1,25 turns) to prove its not blow-by
after your installing the front ferrule 、back ferrule and nut. Please note you should use two spanners to
operating, one spanner for locking the fitting stable and another one for revolving the nut. Especially when
you dismantle the tube, you should operate by the two spanners otherwise fitting will become flexible
which will affect its airproof function.
2.4 Electrical Installation
2.4.1 General
With simple switching power supply, CS200-A,C,D MFC/MFM are available for ±8
to ±16 VDC (dual-ending) and +14 to +28 VDC (single-ending). Customer can choose as
need.
Customer can choose 9 pin male Sub-D or 15 pin male sub-D connector. 9 pin male
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Sub-D connector is the SEMI Standard compatible, only 0-5V analog signal control and
output available. 15 pin male sub-D connector, both 4-20mA or 0-20mA and 0-5V analog
signal control and output available.
CS200-A,C,D MFC/MFM can communicate with PC via RS485 ,DeviceNet or
ProfiBus .
2.4.2 Connections
The 9 pin male Sub-D connector, 15 pin male sub-D connector, RS485
connector ,DeviceNet connector ,Analog Signal Interface ,RS232-RS485 connector,
ProfiBus connector of 9-pin female sub-D and ProfiBus connector of 15-pin male sub-D
are shown in figure2-8, figure2-9 , figure 2-10 ,figure 2-11, figure 2-12 , figure2-13,
figure2-14 and figure2-15.
Attention
:
Although sharing with the same appearance of CS200-A,C,D MFC, the 0~5V Setpoint Input, the 4~20mA
or 0~20mA Setpoint Input and the valve Over-ride are not available. That means pin1 and pin6 of D-sub
9 and pin1, pin7, pin8 and pin12 of D-sub 15 are not available.
Figure 2-8 9 pin male D-sub connector
Figure 2-9 15 pin male D-sub connector
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Figure 2-10 RS485 connector
Figure 2-12 Analog Signal Interface
Figure 2-14 ProfiBus connector of
9-pin female sub-D
Figure 2-11
Figure 2-13
DeviceNet connector
RS232-RS485 connector
Figure 2-15 ProfiBus connector of
15-pin male sub-D connector
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2.4.3 Table of Selecting Type of Cable and its Illustration of Connection
D082B/3B/4B
2E/3E/4E
D08- 1/2/4 2F/3F/4F
D08-1F/1FM/1FS/8C/8CM/1G/1GM
Input
±15V
Input
+24V
To
Serial of
PC
To USB
of
Computer
MFC
(DB15 Pin)
QCX-19/
QCX-P19
QCX-48
QCX-17/QCX-P17
QCX-46
QCX-41
QCX-43
QCX-34
QCX-50
MFC
(DB9 pin)
QCX-20/
QCX-P20
QCX-49
QCX-18/QCX-P18
QCX-47
QCX-42
QCX-34
QCX-50
Table 2-2 Table of Selecting Type of Cable
Figure 2-16
CS Product and Illustration of Connecting Power D08-1D/1F
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Figure 2-17
CS Product and Illustration of Connecting Power
Figure 2-18
CS Product and Illustration of Connecting Power
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Figure 2-19
Illustration of Connecting CS Product
Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and
some accessories. For more details, contact Sevenstar or its local agent.
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2.5 Checking Before Operation
Before operating the MFC the following checks should be completed:
2.5.1 Check that tubing is leak free.
2.5.2 Check the process sequence and proper function of all other gas components
involved.
2.5.3 Check the voltage of command signals and power supply to the MFC/MFM.
2.5.4 Check that the appropriate type of gas is being supplied at the rated pressure.
2.5.5 Allow the MFC to warm up for 20 minutes, and then check the zero level output.
2.5.6 Use dry inert gas for test runs.
2.5.7 Prior to using the MFC for extremely corrosive gases, purge MFC with a dry inert
gas for one hour.
SECTION3 FUNCTIONS
3.1 General
Based on new sensor driver technology, zero balance technology and VCP technology,
CS200-A,C,D MFC/MFM presents high performance and reliability. And more digital
functions are developed in CS200-A,C,D products.
3.2 Control Mode
CS200-A,C,D MFC/MFM are available for digital,0-5V voltage and 4-20mA or
0-20mA current control mode and output. When customer chooses one of the three control
modes, the others will be screened. The analog output will be available at all times. The
flow output of the CS200-A,C,D MFC/MFM will be available through the RS485 interface,
even in the analog control mode. The setting of the CS200-A,C,D MFC/MFM can be
provided to the MFC through one of three sources, in digital or analog mode.
Please refer to “Digital MFC Communication User Manual” for more details.
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3.3 Zero
The Zero function can be commanded through the digital interface or zero-button. Before
zero MFC, please make sure that no gas flow through MFC. Then zero MFC by the digital
interface or zero-button. The zero-button must be pressed continuously for 0.5 seconds in
order to start zero process. The green LED will blink during the zero process. After zero
finished, the green LED will be on constantly. CS Product of the ProfiBus has the Zero
function,but does not have the LED.
3.4 Soft-Start
The CS200-A,C,D MFC/MFM support soft-start function. Soft-start allows customer
change the setting of MFC with definite rate. Please refer to “Digital MFC Communication
User Manual ” for more details.
3.5 Delay
Delay is used to postpone the start of flow from zero flow to the received set-point. It
is programmed in millisecond but the MFC internally rounds up any value to 100ms. For
example, when the delay value is 200, MFC will delay 200ms then receiving the operate
command. When the set point is less than the min control rate, the valve will shut off, and
when larger than the min control rate, MFC will start after the set delay time.
Special default: Values from 1 to 49 ms will be programmed as 100ms. Delay applies
to digital and analog set-points.
3.6 Valve Command Mode
CS200-A,C,D MFC/MFM are available for valve-close or valve-open by input digital
signal or analog voltage directly. The Valve Command Mode is used to select one of three
ways to interpret the analog signal of Valve Command. Please refer to “Digital MFC
Communication User Manual” for more details.
3.7 Valve Type
CS200-A,C,D MFC/MFM have two types of valve: Normally open(NO) or Normally
closed(NC) . When MFC do not have power supply, the “NO” type valve is open and gas
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can flow through the MFC; the “NC” type valve is closed and gas can not flow through.
Please mention the valve type when you order the MFC.
3.8 Multi-Gas and Multi-Flow
The multi-gas and multi-range technology has been developed in the CS200-A,C,D
series MFC/MFM. Customer can change gas convert factor, full scale of MFC via digital
interface. Full scale of CS200-A,C,D series MFC/MFM can be re-ranged from 30% to
110%F.S. For example, an MFC with 100SCCM full scale , the new full scale can be
re-ranged between from 30SCCM to 110SCCM.
CS200-A,C,D MFC/MFM support customer offset by the target null value. The target
null value is a customer-programmed constant used to offset the flow output independently
of all other sensor offset constants, including the zero process. For example, set Target Null
Value: -20%F.S,then when no flow through MFC/MFM,the reading is -20%F.S,with gas
flow 20%F.S through MFC/MFM,the reading is 0%F.S。Offset range is from -100%F.S
to100%F.S。
Please refer to “Digital MFC Communication User Manual” for more details.
3.9 Total Flow Accumulator
The Total Flow accumulator will record the amount of gas (in SCC) that has been
delivered by CS200-A,C,D MFC/MFM. The amount of purge will not be accumulated in
the total flow amount. For example, the total reading is 3000, means the amount of gas
delivered by MFC is 3000SCC
Please refer to “Digital MFC Communication User Manual” for more details.
3.10 Alarm
The CS200-A,C,D MFC/MFM will monitor and store certain abnormal conditions as
described below. These conditions can be read and reset from the RS485 interface.
Provisions will be made for masking (disabling) the alarms or warnings on an individual
basis.
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Warning and Alarms:
Sensor Zero Output Out of Bounds
EEPROM Failure
Valve Coil Failure or Valve Disconnected
Temperature Out of Operating Range
After power up the LED on the top of the CS200-A,C,D MFC/MFM is turned
GREEN. A warning condition will be announced by a blinking RED and whenever an
alarm condition is detected it will be set continuously to RED.
Please refer to “Digital MFC Communication User Manual” for more details.
3.11 LED
There is a green-red LED located on the top of the MFC. The constant green LED
indicates the power on. Green blinking indicates that the MFC is zeroing. A blinking red
LED indicates warning condition. Constant red indicates error condition.
In DeviceNet connection, there will be 2 LED on the top of CS200-A,C,D, refer to
CS200MFC(CS220)_DnetSpecification_V1.01 for more details.
In ProfiBus connection, there will be 1 LED on the top of CS200-A,C,D, the constant
green LED indicates that the communication is normal .No light indicates warning
condition.
Attention
:
When the valve of MFC is fully opened , it can be functioned as a MFM. In that case, the maximum flow
testing voltage could reach beyond +10V, please be careful, while flow is beyond F.S. +5V(Full Scale), the
real flow will have no linearity corresponding with flow testing voltage. While it’s purging, flow display will
be inaccurate, even showing “reduce” while the real flow is enhanced, please be sure it’ll be no damaged
to device itself.
SECTION 4
MAINTENANCE
4.1 General
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No routine maintenance is required to be performed on the MFM or MFC, Other than
occasional cleaning and re-calibration:
It can be used about 3 or 4 years with an ultra-clean and non corrosive gas.
It can be used about 1 or 2 years with a low purity gas or a corrosive gas.
For any other problems, contact Sevenstar.
4.2 Caution
4.2.1 Medium Forbidden
The used gas should be purified without dust,liquid and oil stain. If necessary, the
filter should be added to gas system for purification. If the outlet of MFC is connected to
liquid sources, a One-way valve should be added to avoid the liquid back to destroy MFC.
Attention
:
For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure
that the fixing and fitting are airtight. It becomes necessary to remove the controller from the system, purge the
controller thoroughly with a dry inert gas such as nitrogen, before disconnecting the gas connections. Failure to
purge the controller could cause a fire or explosion resulting in death.
4.2.2 Seal of Valves
The Solenoid Valve of MFC is only for adjustment, can not be used for shut-off.
Generally, shut-off valves should be added in upstream and downstream of MFC for
protection. Normally leakage of MFC valve is not more than 1% F.S.
SECTION 5
TROUBLESHOOTING
5.1 Initial Check
5.1.1 Check the gas supply pressure and check the flow-path to the MFC/MFM has been
opened.
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5.1.2 Ensure that the power supply and command signals are correctly transmitted to the
D-connector pins and RS485.
5.1.3 Check that the output signal matches the external reading.
5.2 Troubleshooting
Use the following table to locate the fault.
SYMPTOMS
1
Output reading,
without gas flow, is
not zero
Possible cause
Gas flow is actually
present
Zero drift
other
Gas connection incorrect
Pressure incorrect
Wrong control mode
2
MFC will not
control
3
MFC will not
communicate with
PC
Attention
Power failure
Setpoint incorrect
Contamination
Defective sensor
PCB problems
Defective Mechanics
Power failure
Cable problems
Address conflict
Baud rate error
PCB problems
Action
Check closure of series shutoff valve
Zero MFC
*Contact Sevenstar
Check gas connection
Check pressure condition
Change the control mode by the
software
Check Power and pin position
Check setpoint signal
*Contact Sevenstar
*Contact Sevenstar
*Contact Sevenstar
*Contact Sevenstar
Check Power and pin position
Check cable and connector
Check address of MFC
Check baud rate of MFC
*Contact Sevenstar
:
* Mark indicates that reparation and adjustment must be dealt under specialist advices。For any other
problems, contact Sevenstar.
26of35
SECTION 6 WARRANTY AND SERVICES
6.1 Guarantee of Sevenstar
Sevenstar and its authorized distributors assure that there are not flaw of the material
and quality of product within 12 months since the date of the product purchased by you.
The compensation for customer is only limited to invalid part for substitution,
installation and processing flaw.
It is guaranteed that all part chose by customers are suitable to relative manufacturer.
Other relative statements, guarantee and obligation of status and usage of product,
whether direct or indirect, are definite to be excluded. In any circumstance, Sevenstar and
its authorized distributors are not charged of any obligation of direct or indirect loss for
customers or others.
6.2 Product Warranty
6.2.1 Sevenstar products are guaranteed against defects in materials and workmanship if
used in accordance with specifications and not subject to physical damage, contamination,
alteration or retrofit. Warranty periods: One year
6.2.2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment
incidents by fax, phone or e-mail as soon as possible after receipting the goods.
6.2.3 During the warranty period, products must only be repaired by authorized Sevenstar
service centers; Otherwise, the Sevenstar product warranty will be invalidated.
6.2.4 Repairs will be performed free of charge during the one-year warranty period. If
MFC are out of warranty, Sevenstar will notify the owner of replacement or repair costs
before proceeding. Factory service and repairs are guaranteed 90 days. The warranty
excludes consumable materials and wear parts (in teflon, viton, etc.).
6.2.5 No MFC will be accepted for repair or warranty without a decontamination and purge
certificate.
6.2.6 Each MFC is individually checked (visual inspection of fittings, helium leak test and
27of35
flow calibration). Sevenstar shall not be responsible for any damage caused by gas leakage
or the use of a dangerous gas. Users are responsible for following the safety rules
applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty,
and MFC that have been damaged as a result of improper use will not be replaced by
Sevenstar.
6.2.7 Specific warranty requirements are as follows :
A,Gas must be clean and particle-free, which means a filter must be fitted in the gas
line upstream of the MFC.
B,Gas must comply with the following pressure specifications:
1. Gas pressure must never exceed 3MPa.
2. Differential pressure must be more than 0.05MPa for full-scale flow through the
MFC valve unless another value is specified in the user’s manual.
3. Differential pressure must be less than 0.35MPa for the MFC valve to regulate
without gas-flow oscillation unless another value is specified in the user’s manual.
4. Pressure at the mass-flow inlet must be regulated by an accurate pressure regulator
to prevent gas-flow oscillation.
C,Electrical connection requirements are as follows:
The system must be wired carefully: non-observance of the pin-out may irreversibly
damage the electronic board inside the MFC, in which case the warranty will be
invalidated.
D,Gas connections: The fittings must be handled carefully. Sevenstar guarantees that
all fittings have been individually inspected and are scratch-free.
E,Fitting procedure: The fitting procedure set out in the manual must be followed
meticulously. Specifically, the purge procedure is very important if corrosive gases or toxic
gases are used.
28of35
F,The mass-flow must not be dismounted: The MFC warranty will be invalidated if
the seal between the MFC block and cover is torn.
6.3 Services
Sevenstar can provide services like start-up service, software development, gas
system design, training, etc.
Please visit mfc.sevenstar.com.cn for more information and find your nearest service
and calibration centre.
6.4 Disclaimer
Beijing Sevenstar Electronics Co., Ltd is not responsible to loss as following situation:
1. Nature disaster and calamity;
2. Unsuitable operation and unreasonable usage;
3. Operating and storing in inappropriate or execrable circumstance;
4. Usage of instrument beyond user’s manual;
5. Unauthorized change or replacement of product.
For example:
It is whether that gas path is not cleared before using corrodible gas or MFC is
contaminated or blocked by particle such as dust.
29of35
AppendixⅠ CS200 Selection Guide
CS200-[t]
[g,g,g]
[v]
[r,r,r,r]
[a]
[f,f]
[s]
[m]
[d]
[t] –Type
- [A] Elastomer type
- [C] Metal type, stainless steel VV, 10Ra
- [D] Metal type
[g,g,g] –Gas
Standard: SEMI52-0302(Note:029 NH3 available to
type C,D only) For example
-[ 013 ] N2
-[ 007 ] H2
-[ 000 ] Mixture Gases (please consult [d] for details)
[v] – Type of Valve
- [ O ] Normally open (unavailable to MFM)
- [ C ] Normally closed (unavailable to MFM)
- [ N ] No Valve (available to MFM only)
[r,r,r,r] –Full Scale
- [ 002C]
- [ 003C]
- [ 005C]
- [ 010C]
- [ 020C]
- [ 030C]
- [ 050C]
- [ 100C]
- [ 200C]
- [ 300C]
- [ 500C]
- [ 000C]
2SCCM (available to type C, D only)
3SCCM (available to type C, D only)
5SCCM
10SCCM
- [ 001L] 1SLM
20SCCM
- [ 002L] 2SLM
30SCCM
- [ 003L] 3SLM
50SCCM
- [ 005L] 5SLM
100SCCM
- [ 010L] 10SLM
200SCCM
- [ 020L] 20SLM
300SCCM
- [ 030L] 30SLM
500SCCM
- [ 050L]50SLM(available to type A)
customized Full scale, please consult [d] for details
[a] –Electronic connector
- [ R ] DB 9 pin
- [ X ] DeviceNetTM
- [ F ] ProfiBus
- [ D ] DB15 pin
- [ Y ] DeviceNetTM +Analog
[f,f] –Fittings
-[AA] Compression Fittingφ3mm
-[BB] Compression Fitting 1/8" (available to type A only)
-[GG] Compression Fittingφ6mm
-[JJ ] Compression Fittingφ10mm (available to type A only)
-[CC] Compression Fitting 1/4"
-[SC] IGS C seal (available to type C,D only)
-[MM] VCR 1/4"
-[SW] IGS W seal (available to type C,D only)
-[UU] VCO 1/4"(available to type A only)
-[RR]φ6(inner)x1hose(available to type A only)
-[VV]φ5(inner)x1.5hose(available to type A only)
-[TT]φ4(inner)x1hose(available to type A only)
-[SA] A seal (available to type A only)
-[XX ] customized fittings please consult [d] for details
[s] –Seal Materials
-[ V ] Viton(available to type A, only)
-[ M ] Metal (available to type C, D only)
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[m] –Mounting Position
-[ H ] Horizontal
-[ E ] HESD(Horizontal Edge Side Down)
-[ U ] Vertical Inlet Up
-[ D ] Vertical Inlet Down
[d] –Description
-[ - ]:Default Value
The letters on cover and tag:In English
Differential Pressure:
(0.05 ~ 0.35) MPa (7.3~50.8 psid)
(FLOW≤10SLM)
(0.1 ~ 0.35) MPa (14.5~50.8 psid)
(10SLM<FLOW≤30SLM )
(0.2 ~ 0.45) MPa (29.0~65.3 psid)
(30SLM<FLOW)
CS200-A、CS200-C、CS200-D XXXN:<0.02MPa (2.9psid)
Max inlet pressure :3 MPa (435.1 psig)
Calibration temperature :(22±2)℃
Valve command mode :2
Power Supply: +24V
Command type:DeviceNet default digital mode; Profibus default mode for Profibus; other analog voltage
-[ S ] Customized Requirement
For Example: I/O sign:4~20mA;
The proportion of mixture gases should be indicated: N2 (60%) + CO2(40%);
Customer Differential Pressure: (0.05 ~ 0.3) MPa;
Customer Calibration Temperature: 40℃;
The letters on cover and tag: in Chinese;
Valve command mode:0;
Power Supply: ±15V
Command type:Profibus default mode for analog voltage
and other customized requirements.
31of35
Take CS200-A013C500CDGGVHS as the example
CS200 - A
013
C
500C D
GG V
H
S
Model:CS200
Type: Elastomer type
Gas:
N2
Type of Valve: Normally closed
Full range
Electronic connector:DB15
Fittings:Compression Fittingφ6mm
Seal material: Viton
Mounting position
For example
Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40℃
32of35
APPENDIX II CONVERSION FACTOR
GAS
Air
Ar
AsH3
BBr3
BCl3
BF3
B2H6
CCl4
CF4
CH4
C2H2
C2H4
C2H6
C3H4
C3H6
C3H8
C4H6
C4H8
C4H10
C5H12
CH3OH
C2H6O
C2H3Cl3
CO
CO2
C2N2
Cl2
D2
F2
GeCl4
GAS CODE
(SEMIE52-0302)
008
004
035
079
070
048
058
101
063
028
042
038
054
068
069
089
093
104
117
240
176
136
112
009
025
059
019
014
018
113
SPECIFIC HEAT
( Cal/g ℃)
0.2400
0.1250
0.1168
0.0647
0.1217
0.1779
0.5020
0.1297
0.1659
0.5318
0.4049
0.3658
0.4241
0.3633
0.3659
0.3990
0.3515
0.3723
0.4040
0.3916
0.3277
0.3398
0.1654
0.2488
0.2017
0.2608
0.1145
1.7325
0.1970
0.1072
DENSITY
(g/l 0℃)
1.2930
1.7837
3.4780
11.1800
5.2270
3.0250
1.2350
6.8600
3.9636
0.7150
1.1620
1.2510
1.3420
1.7870
1.8770
1.9670
2.4130
2.5030
2.6500
3.2190
1.4300
2.0550
5.9500
1.2500
1.9640
2.3220
3.1630
0.1798
1.6950
9.5650
CONVERSION
FACTOR
1.001
1.420
0.673
0.378
0.450
0.508
0.441
0.306
0.420
0.722
0.596
0.597
0.482
0.421
0.398
0.358
0.322
0.299
0.261
0.217
0.584
0.392
0.278
1.000
0.793
0.451
0.858
0.997
0.931
0.267
33of35
GAS
GeH4
H2
HBr
HCl
HF
HI
H2S
He
Kr
N2
Ne
NH3
NO
NO2
N2O
O2
PCl3
PH3
PF5
POCl3
SiCl4
SiF4
SiH4
SiH2Cl2
SiHCl3
SF6
SO2
TiCl4
WF6
Xe
GAS CODE
(SEMIE52-0302)
043
007
010
011
012
017
022
001
005
013
002
029
016
026
027
015
193
031
143
102
108
088
039
067
147
110
032
114
121
006
SPECIFIC HEAT
( Cal/g ℃)
0.1405
3.4224
0.0861
0.1911
0.3482
0.0545
0.2278
1.2418
0.0593
0.2486
0.2464
0.5005
0.2378
0.1923
0.2098
0.2196
0.1247
0.2610
0.1611
0.1324
0.1270
0.1692
0.3189
0.1472
0.1332
0.1588
0.14890
0.1572
0.0956
0.0379
DENSITY
(g/l 0℃)
3.4180
0.0899
3.6100
1.6270
0.8930
5.707
1.5200
0.1786
3.7390
1.2500
0.9000
0.7600
1.3390
2.0520
1.9640
1.4270
6.1270
1.5170
5.6200
6.8450
7.5847
4.6430
1.4330
4.5060
6.0430
6.5160
2.8580
8.4650
13.2900
5.8580
CONVERSION
FACTOR
0.570
1.010
0.999
0.988
1.001
1.000
0.802
1.420
1.431
1.000
1.431
0.719
0.978
0.737
0.710
0.981
0.358
0.690
0.302
0.302
0.284
0.348
0.600
0.416
0.340
0.258
0.687
0.206
0.217
1.431
34of35
Conversion Factors Instruction:
MFC and MFM are standard calibrated by N2 while it’s out of factory. Other gas calibrations can be approximated
by converting of conversion factors of our instruction. While using other gas operating:
One single gas: The conversion factors could find out in the users specification instruction.
A mixture of two or more gases: Assume there is “n” sorts of gases, could calculate the conversion factors C by the
following formula:
Basic Formula:
C=0.3106 N /ρ(Cp)
ρ — Density of the gas
Cp — Specific heat of the gas
N — Structure factors of gas-molecule (See the following table)
Table .
Gas-Molecule Composing factors
COMPOSITION
Single atom numerator
Double atom numerator
Tree atom numerator
Multi-atom numerator
EXAMPLE
Ar
He
CO
N2
CO2
NO2
NH3
C4H8
N VALUE
1.01
1.00
0.94
0.88
For mixture gases: N = N1 (ω1/ωT )+N2 (ω2/ωT ) + ···+ Nn (ωn/ωT )
Then:
0.3106 [N1 (ω1/ωT )+N2 (ω2/ωT ) + ···+ Nn (ωn/ωT )]
C = ————————————————————————
ρ1Cp1 (ω1/ωT )+ ρ2Cp2 (ω2/ωT )+ ···+ ρnCpn (ωn/ωT)
ω1 …ωn — The flow of single gas
ωT
— The flow of mixture gas
ρ1…ρn
— The density of single gas
CP1…CPn —Specific heat of the single gas
N1…Nn —Structure factors of gas-molecule (See Table 6.)
Attention
:
1) Standard:Temperature 273.15K (0 ºC ); Air Pressure— 101325 Pa (760mm Hg)
2) Please feel free to contact us if the request gas conversion factors could not be found in our appendix.
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Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co.,Ltd.
CS Series
Mass Flow Controller
Beijing Sevenstar Electronics Co., Ltd.
Mass Flow Meter Subsidiary Co., Ltd.
Address:
P.O.BOX
Post code:
Tel:
Fax:
Homepage:
E-Mail:
No.1 Jiuxianqiao East Rd., Chaoyang District, Beijing, China
3#741, Beijing, China
100015
(+86)-10-64362939
(+86)-10-64361831 ext. 8491 or 8315
(+86)-10-64362923 or 64362939
http://mfc.sevenstar.com.cn
[email protected]
Shanghai Office: Room 1916, Unicom International Tower, NO.547 Tianmu West
Road, Zhabei District, Shanghai, 200070, China
Tel:
(+86)-21-33030324
Fax:
(+86)-21-63533265
Shenzhen Office: Room 712, Section B, Qiche Tower, No.45 Zhenhua Road,
Futian District, Shenzhen, China
Zip code:
518031
Tel:
(+86)-755-88290258
Fax:
(+86)-755-88294770
*Description may be changed following improvements to product. The
information contained in this document is subject to change without notice.
*If there is any mistake in this uses manual, please feel free to contact us.
*©2010 Beijing Sevenstar Electronics Co.,Ltd.
All rights reserved.
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