User manual | 2017 VACUUM PUMP We looked across the universe to find the

2017 VACUUM PUMP
Floating Scroll Pump, SVF
Scroll Pump, SP
Vane pump, VP1, VP2
Roots Blower, RP
Multi-Root, EV-A
Screw Pump, PS & PD
Turbo Pump, EBT
We looked across the universe to find the best performing pumps. This is a priority of ours.
41340 Christy Street, Fremont, CA USA - (510) 498-8518 - www.vacproducts.com - [email protected]
Table of Content
Content
Page
Introduction
2
Agilent Scroll Pump
3-4
Dry Scroll Pump
5-6
Floating Scroll Pump
7-9
Vane Pump
10 - 13
Ebara Mechanical Pump
14 - 16
Dry Screw Pump
17 - 25
Dry Roots Blower
26 - 28
Turbo Pump
29 - 31
Trap & Filter
32 - 34
Accessaries
Gauge
Valve
Metal Hose
35 - 39
40 - 47
48 - 49
Engineering
50 - 51
-1-
Vacuum Products Corporation
Mission Statement
Vacuum Products Corp. is committed to providing products and services that lead the industry standard
in customer satisfaction , quality, delivery and cost performance.
Vacuum Products Corp is committed to satisfying the increasing demand of rapidly changing applications
reasonal price
One Stop Supplier
We offer a broad range of vacuum products from roughing to high vacuum pumps, vacuum fittings,
valves, gauges, feedthroughs, stages and manipulators. For vacuum components information, visit
our website www.vacproducts.com
Customer Care
Technical support and repair service play an essential role in serving our customers. We achieve best
result when collaborating with our customer to develop the solution that fits their requirements. Custom
design and fabrication are part of our service.
Application
Our vacuum pumps are used in broad industries:
Research & Development
University
Government Lab
Space Simulation
Thin-film Deposition
Glass / Web / Optics
Data storage
Surface coating
Industrial vacuum
Metallurgy and furnace
Heat treatment
Laser
Biotechnology
Instrumentation
Electron optics
Metrology
Mass Spec
Leak Detection
Automotive
Refrigeration
Aerospace
Food Packaging
Biopolymer
Shelf life
Semiconductor
Sputtering / Evaporation
Sample preparation
CVD / ALD / MBE
Research
Ion Implant
Etch
41340 Christy Street, Fremont, CA USA - (510) 498-8518 - www.vacproducts.com - [email protected]
-2-
Dry Scroll Pump
IDP Series, by Agilent Technologies
IDP Dry Scroll provids rapid pump down. This is the newer design with bearing and motor outside of
vacuum thus protected from process gas. Runs quiet and low vibration. Ideal use for analytical instrument,
R&D, and many industrrial application. Examples are Mass Spec instrument, SEM, Loadlock, Beam line,
Lab, Cryo Regen., Glove Box and leak detector.
IDP standard includes: Hour meter
IDP options includes: : Isolation valve, (Standard on IDP15)
IDP-3
IDP-15
Agilent Technologies’ patented scroll pump technology line provides affordable,
oil-free vacuum, is suitable for a broad range of both research and industrial
applications. The pump creates a vacuum using a simple dual scroll mechanism
creating moving zones of captured gas. Gas enters the scroll pump at the perimeter
and is displaced and compressed toward the center hub, where it is exhausted
creating low ultimate pressure. Our dryscroll pumps delivers durability, reliability
and easy maintenance.
The Agilent IDP-15 Scroll Pump is a high performance pump, providing rapid
pump-down at 15.4 m3/hour (60 Hz). It is hermetic, with the motor and all bearings
completely isolated from the vacuum path and protected from process gases for
extended life. The IDP-15 is exceptionally quiet (<50db) and vibration-free, and is
ideal for use in Analytical Instrument and Research applications, and many industrial
applications as well.
TriScroll 300 Series, by Agilent Technologies
TriScroll Dry pump is industry's standard selection for reliability and performance. Field proven with
a large installed base. TriScroll 300 features two-stage pump that deliver high pump speed and low base
pressure.
Agilent Technologies’ patented TriScroll series features two-stage dry scroll
pumps that deliver high pumping speeds and low base pressure. The
maintenance requirements of oil-sealed vane pumps are eliminated, saving
oil disposal costs. TriScroll dry scroll pumps feature proven reliability and
durability, providing consistent performance and superior cost of ownership.
TriScroll 300 with Inverter features frequency inverter technology that offer
high initial pump down and energy conservation.
-3-
Dry Scroll Pump
TriScroll 600 Series, by Agilent Technologies
TriScroll 600 features two-stage dry scroll pumps that deliver high
pumping speed and low base pressure. It has the same reliability and
performance as TriScroll 300 with high pumping speed.
TriScroll 600 with Inverter features frequency inverter technology that offer
high initial pump down and energy conservation.
Triscroll options includes: Isolation valve to prevent comtanmination to the vacuum chamber.
Specification
Capacity, cfm, 50/60
Ultimate Pressure, Torr
Max. inlet pressure
Max. outlet pressure
Inlet port
Outlet port
Gas Ballast
Op. temp.
Voltage
thermal protection
RPM, 50/60 Hz
Cooling
Weight, Kg
Leak rate, std cc/sec
Noise, db (A)
Compliance
IDP-3
1.8/2.1
2.5x 10-1
1 atm
1.4 atm
1/4" FPT
KF16
1/8" FPT
5 - 40 C
110V
automatic
2600/3200
Air
9.5
1x 10-6
55
CE, RoHS
IDP-15
7.5/9.1
1x 10-2
1 atm
1.4 atm
NW25
NW16
1/4" FPT
5 - 40 C
110V
automatic
1450/1725
Air
34
1x 10-6
50
CE, RoHS
Triscroll 300
7.4/8.8
1x10-2
1 atm
1.1 atm
NW25
1/4" FPT
1/4" FPT
5 - 40 C
110/220
automatic
1450/1725
Air
26.4
1x 10-6
Triscroll 300
w/ Inverter
8.8 (60 HZ)
1x 10-2
1 atm
1.1 atm
NW25
KF16
1/4" FPT
5 - 40 C
110/220
automatic
1450/1725
Air
26
1x 10-6
Triscroll 600
14.8/17.7
7x 10-3
1 atm
1.1 atm
NW40
3/8" FPT
1/4" FPT
5 - 40 C
110/220
automatic
1450/1725
Air
32
1x 10-6
Triscroll 600
w/ Inverter
14.8/17.7
7x 10-3
1 atm
1.1 atm
NW40
KF16
1/4" FPT
5 - 40 C
220 V
automatic
1450/1725
Air
31
1x 10-6
CE
CE
CE, UL
CE
We offer exchange inventory program on all models of Agilent Dry Scroll pump
Standard Delivery: 4 weeks, ARO
-4-
Dry Scroll Pump
SP Series
For those who are on tight budget, we offer an alternative selection to solve your budget concern.
Operating principle
Based on two spiral cylinders, first one fixed and the second offset and orbiting against the first with
an offset of 180°. Thus several crescent-shaped pockets of differing sizes are created. By means of
an eccentric drive, the orbiting scroll is made to orbit about the fixed scroll, reducing the volume of the
pockets and compressing gases from the outside towards the inside thereby pumping the gases from
vacuum chamber.
SP series of Scroll pumps are available in sizes from 2.5 cfm to 43 cfm. This series offers the lowest initial
investment. 10,000 hour life warranty. This series pump has same performance of TriScroll but at a lower
cost. This is a generic pump, designed for customers who does not require the image of a known brand.
Technical Specification
Model
Pumping Speed
60 Hz
Ultimate pressure
Noise Level
Leakage
Max. Inlet/Exhaust Pressure
Ambient Operation Temp.
Max. Water Treatment
Output
Motor
Voltage
1 phase
Frequency
Speed
Output
Motor
Voltage
1 phase
Frequency
Speed
Output
Motor
Voltage
1 phase
Frequency
Speed
Output
Motor
Voltage
3 phase
Frequency
Speed
≤7.5×10-2
≤52
Atm
℃
G/h
kW
V
Hz
rpm
kW
V
Hz
rpm
kW
V
Hz
rpm
kW
V
Hz
rpm
0.15
110
60
1710
0.15
220
50
1425
0.15
230
50/60
1710
---------
Inlet/Exhaust Flange
KF25/16
Dimensions
mm
Packing Dimension
mm
Net Weight
Gross Weight
Cooling Type
SP75
2.5
cfm
Torr
dB(A)
kg
kg
SP150
5.1
SP300
10.9
SP600
22.3
≤6.0×10-2
≤1.9×10-2
≤7.5×10-3
≤57
≤61
≤63
0.75x10-3 std cc/ sec
1.0 / 1.2
5 C - 40 C
50
60
0.25
0.55
0.75
110
110
110
60
60
60
1710
1730
1750
0.25
0.55
0.75
220
220
220
50
50
50
1425
1440
1440
0.25
0.55
0.75
230
230
230
50/60
50/60
50/60
1710
1710
1740
0.37
0.55
0.75
380
380
380
50
50
50
1400
1440
1440
KF25/16
KF25/16
KF40/16
SP1000
42.8
≤7.5×10-3
≤67
------------------------1.5
380
50
1440
KF40/16×2
350x210x24 430x250x2 492x268x32 530x312x3 580x360x40
5
80
4
43
0
400x300x34 550x400x4 650x450x48 650x450x4 750x500x52
0
20
0
80
0
13
18
32
38
52
21
27
42
50
65
Air cooled
-5-
Dry Scroll Pump
Performance curve
Inlet
pressure
(Pa)
Pressurepumping
speed
relation
curve
5.Connection
Model
SP150
SP300
SP600
SP1000
A
430
490
520
580
B
250
290
316
360
C
280
340
360
400
D
220
267
291
336
E
214
252
252
267
F
109
145
160
184
G
86
101
93
121
H
130
201
175
195
Advantage
1. Provide clean vacuum environment
Provide oil free and clean vacuum vacuum environment.
2. Wider vacuum range, higher ultimate vacuum level, and higher pumping speed
Pumping from atmosphere to ultimate vacuum level in seconds. Suitable for repeated switch
on/off operation.
3. Low noise; less vibration; higher efficiency, low power consumption
Continuous motion results in minimum pressure pulsation, less vibration and low noise. Inlet
and exhaust are separated, gas pockets are efficiently sealed, ensures minimum gas leak.
-6-
M
155
192
206
224
Floating Scroll Pump
SVF Series
Operating principle
Floating Scroll pump works under the same principal as the conventional Scroll. The pump consists of a fixed
and a rotating scroll. The difference is the fixed scroll is allow to "float" with the rotating scroll. The two scroll
are allowed to lightly touch each other. A dynamic balancing mechanism keep the contact to be mild and
controllable at constant pressure. The benefit is obvious. It has No Tip Seal. Pumps moisture at higher rate.
The number one problem of a Scroll pump is the wear and deterioation of the Tip Seal. The floating Scroll pump
does not use Tip Seal. The liability of seal wear is eliminated. No tip seal replacement is necessary.
4 stanadard sizes available:
SVF-5 (0.2 cfm), SVF-20 (0.7 cfm), SVF-50 (1.8 cfm) and SVF-100 (3.5 cfm).
The pump is 100% oil free and maintenance free. Very compact and ideal for portable equipment. It has been the
prefer choice for medical application such as resperator system for patients. Common applications are for
analytical instrument, laboratory, backing pump or anywhere clean vacuum is needed.
Larger size pumps are available. Higher vacuum pumps are also available upon request.
Features and Benefits:
The oil-free floating scroll pump has fixed first scroll and spining second scroll that floats. Seals are dynamically
balanced to a slight touch but in full contact. This patented feature increases pumping speed for moisture at nearly
no wear. Life of pump is extremely extended without requireing seal change.
Conventional Scroll pump requires seal replacement after 6 month of running. The Floating Scroll pump can run
continuously for years without service requirement.
-7-
Floating Scroll Pump
Technical Data
Model
SVF-E2M-5
SVF-E2-20
SVF-E1M-50
SVF-E2M-100
Ultimate Pressure
≤ 0.05 mbar (5 Pa) ≤ 0.01 mbar (1 Pa) ≤ 0.5 mbar (50 Pa) ≤ 0.05 mbar (5 Pa)
Pumping Speed
5 L/min (0.3 m3/h) 20 L/min (1.2 m3/h) 50 L/min (3 m3/h) 100 L/min (6 m3/h)
Power
15 W
70 W
95 W
200 W
Motor Type
Brushless DC Motor Brushless DC Motor Brushless DC Motor Brushless DC Motor
DC Voltage
12 or 24 VDC
24 VDC
24 VDC
24 / 48 VDC
AC Voltage (with
100-240 VAC
100-240 VAC
100-240 VAC
100-240 VAC
adapter)
Max. Speed
3,600 RPM
4,500 RPM
5,300 RPM
4,000 RPM
Vapor Tolerance
Unlimited
Unlimited
Unlimited
Unlimited
Max. Inlet Pressure
Unlimited
Unlimited
Unlimited
Unlimited
Max. Outlet
1 barg
1 barg
1 barg
1 barg
Noise (OEM)
56 dB(A)
60 dB(A)
60 dB(A)
60 dB(A)
Noise (with case)
55 dB(A)
55 dB(A)
55 dB(A)
Weight (OEM1/2)
0.84 kg
2.1 kg /2.7 kg
1.0 kg /1.2 kg
5.4 kg
Weight (with
1.1 kg
4.5 kg
2.8 kg
6.8 kg
base/case)
Dimension
184×132×132 mm 124×90×87 mm
150×88×85 mm
230×208×148 mm
(OEM1/2)
243×132×132 mm 189×116×110 mm
Dimension (with
182×88×94 mm 294×200×165 mm 230×183×150 mm 325×191×160 mm
base/case)
Inlet/Outlet
G 1/4"
G 1/8"
G 1/4"
KF-25 / G 3/8”
Connection
Cooling System
Air-Cooled
Air-Cooled
Air-Cooled
Air-Cooled
Ambient
-40℃ to 50℃
-40℃ to 50℃
-40℃ to 50℃
-40℃ to 50℃
Pumping Speed Curves
-8-
Floating Scroll Pump
-9-
Rotary Vane Pump
VP Series
VP Series pumps are rugged mechanical oil-sealed pumps with speeds ranging from 8 to 300 m3/hr (5 to 178 CFM).
Compact and quiet, they feature advanced lubrication circuits, highly reliable to suit specific application.
A built-in anti-suckback valve isolates the pump from the process during power interruptions, and keeps oil out of
your system.
Vane pump has become industry's standard choice for laboratory and light industrial application. Known for its
rapid pumping and ability to handle vapor, vane pumps are designed for reliable and long-term opeation. Single
phase motors are equiped with thermal overload protection at no extra charge. Distinguished by high pumping
speed even in low pressure ranges. Very quick pump-down time. It does not require regular maintenance
other than oil change at service intervals.
Shipping includes: 1 litre of oil, KF25 center ring and O-Ring. Supplied at no extra charge.
Fomblin oil, if required, must be purchased separately for PFPE pumps.
Application:
*
*
*
*
*
*
*
*
*
*
*
*
*
SEM (Scanning electron microscope)
Electron Microscopy (Surface Science)
Vacuum oven & furnace
Thin-film coating
Vacuum Brazing
Metrology and analytical instrument
Medical instrument
Backing to Turbo pump
Loadlock and transfer chamber
Refrigeration& Freeze drying
Glove box, Oven
Gas bottle filling / emptying
Automotive
Reliable system with anti suck-back protection Every pump has protection device to prevent oil and air suck-back into the vacuum system if the pump
stops while under vacuum. A variety of protection devices are used, depending on the pump size and
cost, but emphasis is always placed on reliability and simplicity. When you use gas ballast on the pump,
you must use a solenoid operated gas ballast control valve to prevent air suck-back. Positive Pressure Oil Lubrication The pumps incorporate a positive pressure oil lubrication system to ensure correct lubrication to prevent
oil starvation with high gas loads. An integral oil pump ensures that flow is adequately pumped throughout the stator/rotor assembly at all
times. This oil lubrication level in the reservoir is less critical than other pump design.
Pump can operate at 50-70% of the maximum oil level . A sight glass allows convenient monitoring of the level. - 10 -
Rotary Vane Pump
Gas Ballast
The pump has a gas ballast valve. The valve is used to introduce gas into the stator during the compression
stage. This prevents vapor condensation inside the pump, dilutes and purges corrosive gas. Therefore, the
use of gas ballast reduces oil degradation and pump corrosion.
Vane pumps are available in Single stage and Dual stage. Performance difference is in the vacuum range.
Single Stage Vane Pump
VP1 Series :
VP1-10, VP1-20, VP1-25, VP1-40, VP1-63, VP1-100, VP1-160, VP1-250, VP1-300
Single Stage Vane pump is oil-sealed with pumping speed ranging from 6 CFM to 177 CFM.
Compact and rugged designed. They feature advanced lubrication circuits with high reliability.
This type of pump is commonly used in industrial application because of its high initial pump down and low cost.
It is also used as backing pump for Roots Blower.
Specifications
Water Water
vapor capacity
Pump
Speed
Ultimate
pressure
In/Out
port
Power
Noise
Oil
cfm
(m3/hr)
Torr
mm
kw
db
Litre
VP1- 10
6 (10)
1.5
G 1/2
0.37
69
1
30
0.15
VP1- 20
12 (20)
1.5
G 1/2
0.75
73
1
30
0.3
VP1- 25
15 (25)
1.5
Model
VP1- 40
24 (40)
VP. Torr Kg/hr
G 1/2
0.75
73
1
30
0.3
-1
G 1 1/4
1.5
65
1
30
0.4
-1
3.75x 10
VP1- 63
35 (60)
3.75x 10
G 1 1/4
1.5
65
2
30
35
VP1-100
59 (100)
3.75x 10-1
G 1 1/4
3
67
2
30
56
94 (160)
-2
G2
4
70
5
30
141
-2
VP1-160
7.5 x 10
VP1-250
147 (250)
7.5 x 10
G2
5.5
72
5
30
159
VP1-300
177 (300)
7.5 x 10-2
G2
5.5
74
5
30
176
- 11 -
Rotary Vane Pump
Dual stage Vane pump
VP2 Series :
VP2-8, VP2-16, VP2-30, VP2-40, VP2-60, VP2-90,
Dual Stage Vane pump is oil-sealed with pumping speed ranging from 5 CFM to 50 CFM.
Compact and rugged designed. They feature advanced lubrication circuits with high reliability.
Characteristics:
* 2 stage direct drive motor for any voltage (see specification)
* Gas ballast to keep oil clean and remove moisture and other vapor from condensing
* Anti-suck back valve to prevent oil back-streaming
* Single phase motor is equipped with thermal protection for safety
* Large, easy-to-see sight glass ensures proper oil level
* 18 months warranty for operating under clean environment
* Optional trap and oil mist eliminator
* Extremely quiet. Virtually vibration free
* Larger oil capacity keeps the pump cooler and reduce thermal degradation
* On / Off switch
Specifications
Model
In/Out
Power
port
Motor
Noise Weight Voltage
speed
ballast
close
ballast
open
Pump
Speed
Torr
Torr
cfm
(m3/hr)
mm
kw
Liter
rpm
db
kg
-2
-3
Oil
VP2-10
3.7 x 10
3.7 x 10
5 (10)
KF25/25
0.4
1.1
1440/1720
60
25
220V/ 380V
VP2-16
3.7 x 10-3
3.7 x 10-2
9 (14)
KF25/25
0.55
1.2
1440/1720
60
27
220V / 380V
VP2-30
3.7 x 10-3
1.5 x 10-2
18 (30)
KF40/40
1.5
2
1440/1720
60
63
3 ph/4 pole
VP2-40
7.5 x 10-3
1.5 x 10-2
24 (40)
KF40/40
1.5
2
1440/1720
65
65
3 ph/4 pole
VP2-60
7.5 x 10-3
1.5 x 10-2
35 (60)
KF40/40
2.2
3.4
1440/1720
65
87
3 ph/4 pole
VP2-80
7.5 x 10-3
1.5 x 10-2
50 (90)
KF40/40
3.7
3.4
1440/1720
65
101
3 ph/4 pole
VP2-60
VP2-40
VP2-30
- 12 -
Rotary Vane Pump
Optional Accessories:
1. Trap – minimize back streaming of oil vapor to vacuum chamber during power failure
2. Oil Mist Eliminator – keep oil mist off the exhaust port and recirculate back to reservoir
3. Angle valve – to keep pump under vacuum when chamber is vented for service
- 13 -
Dry Mechanical Pump, EV-A
This family of pumps are made by Ebara Technologies
Operating Principle
With two claw-shaped rotors turn in opposite direction inside the housing. Due to
the shape of these claw rotors, the air or gas is sucked in, compressed and then
discharged. The claw rotors do not come into contact with each other or with the
cylinder in which they are rotating. Tight clearances between the claw rotors and
the housing optimize the internal seal and porvide a consistently high pumping
speed. A synchronization gearbox ensures exact synchronization of claw rotors.
The rotary claw operation principle reduces energy consumption considerably in
comparison with conventional vacuum pumps so energy costs are reduced. Due to
their near maintenance-free operation, a decrease in operating costs adds to the
savings; no maintenance downtime occurs, no wearing parts or operating fluids
need to be changed – only a gear box oil change is recommended after every
20,000 hours. When compared to conventional vacuum pump solutions, Mink claw
vacuum pumps can save up to 60% on energy and operating costs.
The EV-A Series is a family of air-cooled, dry pumps that have industry-leading specifications.
The family consists of the EV-A3 (9 cfm), the EV-A6 (21.6 cfm), the EV-A10 (36 cfm)
and EV-SA20 (59 cfm) pumps. Typical applications include Load Locks, PVD Systems,
Analytical Instruments and Electron Microscopes. These pumps are ideal for replacing
wet pumps as well as Scroll type dry vacuum pumps.
EV-A pumps are manufactured by Ebara Technologies of Japan.
Features and Benefits:
* Load Locks
* Analytical Instruments (LCMS, ICPMS)
* Electron Microscopes
* Electron Microscopes
* PVD Systems
* Oxygen Plasma Systems
Applications:
* Small Air-Cooled Pump
* No-Contact Design
* No-Contact Design
* High Pumping Speeds at Atmosphere
* Highest Water Vapor Pumping of Any Air-Cooled Dry Pump
* UL, CE, and NRTL rated
- 14 -
Dry Vacuum Pump, EV-A
Model EV-A03
The Model EV-A03 air cooled dry pump offers high pumping speed (9 cfm) and high
water vapor pumping (250 g/hr) when used with the optional gas ballast valve.
The pump is available with optional casters/levelers.
Specifications
Pumping Speed, l/min
Ultimate Pressure, Pa
Max. Inlet Pressure
Max. Water Vapor Pumping Rate
(at Gas Ballast: On), g/hr
Connection
Approx. Power at Ultimate Pressure, kW
Weight
Power Supply
Max
Atmospheric Open
Gas Ballast: Off
Gas Ballast: On
250
150
1
10
Atmospheric Pressure
250
Gas Inlet
Gas Outlet
NW25
NW25
0.34
23
51
1 Phase, 100-115V, 50/60Hz
1 Phase, 200-240V, 50/60Hz
3 Phase, 200-240V, 50/60Hz
kg
lbs
[1 Phase/100V model]
[1 Phase/200V model]
[3 Phase/200V model]
Model EV-A06
The Model EV-A06 air cooled dry pump offers high pumping speed (21.6 cfm) and
high water vapor pumping (350 g/hr) when used with the optional gas ballast valve.
The pump is available with optional casters/levelers.
Specifications
Pumping Speed, l/min
Ultimate Pressure, Pa
Max. Inlet Pressure
Max. Water Vapor Pumping
Rate (at Gas Ballast: On), g/hr
Connection
Approx. Power at Ultimate Pressure, kW
Weight
Power Supply
Max
Atmospheric Open
Gas Ballast: Off
Gas Ballast: On
600
480
1
10
Atmospheric Pressure
350
Gas Inlet
Gas Outlet
NW40
NW25
0.59
54
119
1 Phase, 100-115V, 50/60Hz
1 Phase, 200-240V, 50/60Hz
3 Phase, 200-240V, 50/60Hz
kg
lbs
[1 Phase/100V model]
[1 Phase/200V model]
[3 Phase/200V model]
- 15 -
Dry Vacuum Pump, EV-A
Model EV-A10
The Model EV-A10 air cooled dry pump offers industry leading specifications in an air cooled
dry pump. The pump comes standard with four lockable casters/levelers.
Specifications
Pumping Speed, l/min
Ultimate Pressure, Pa
Max. Inlet Pressure
Max. Water Vapor Pumping Rate (at Gas Ballast: On), g/hr
Connection
Approx. Power at Ultimate Pressure, kW
Weight
Power Supply
Max
Atmospheric Open
Gas Ballast: Off
Gas Ballast: On
1000
800
1
2
Atmospheric Pressure
500
Gas Inlet
Gas Outlet
NW40
NW25
1.1
72
159
-----1 Phase, 200-240V, 50/60Hz
3 Phase, 200-240V, 50/60Hz
kg
lbs
[1 Phase/100V model]
[1 Phase/200V model]
[3 Phase/200V model]
Model EV-SA20
The Model EV-S20 pump is engery efficient vacuum pump for clean to light duty processess such as
Load Lock, SEM, PVD, Ashing, Ion Implant and Etch. It has a pumping speed of (59 CFM) with an
ultimate pressure as low as 3 mTorr. Options include: nitrogen purge, Niresist (Nickel alloy) to
prevent corrosion and idel mode allows the tool to send a remotely controlled signal to save
additional energy.
Specifications
Pumping Speed, l/min
Ultimate Pressure, Pa
Max. Inlet Pressure
Max. Water Vapor Pumping Rate (at Gas Ballast: On), g/hr
Connection
Approx. Power at Ultimate Pressure, kW
Weight
Power Supply
Max
Atmospheric Open
Gas Ballast: Off
Gas Ballast: On
Gas Inlet
Gas Outlet
kg
lbs
[1 Phase/100V model]
[1 Phase/200V model]
[3 Phase/200V model]
- 16 -
1670
3
5
Atmospheric Pressure
100
NW40
NW40
0.45
65
143
-----1 Phase, 200-240V, 50/60Hz
3 Phase, 200-240V, 50/60Hz
Dry Screw Vacuum Pump
PS, PD Series Screw Pump
Thin-film, vacuum industry has been looking for a pump that is clean (oil free), long lasting and universally
applicable to all processes such as Etch, CVD and PVD. Our Dry Screw Pump is designed to do just that.
Operating principle
Dry Screw Pump consists of precision-grind and matching pair of screws rotors that rotates in opposite
direction. The rotors makes no contact, therefore no need for lubrication. The pump is suitable for clean
as well as harsh and corrosive environment. It uses no oil and has the shortest gas discharge path which
makes this pump more efficient than any other style dry pump available on the market.
Unlike Scroll pump which deteriorates with usage from day one, dry screw pump maintains vacuum
integrity year after year without requiring service. Cost of ownership is lower than Scroll Pump. We
produce more than 60,000 screw rotors each year.
VPC pump is built with superior technology to achieve excellent vacuum performance and low running
costs. The highly intelligent dry pump is ideal for replacing wet pumps as well as Scroll Pumps.
unit in meters
Application:
* Vacuum Coating
* Vacuum Oven
* Thermal Process
* Biotech
* Pharmaceutical
* Chemical
* Semiconductor
*
*
*
*
*
*
*
TFT/LCD, LED
Solar Cell
Touch Panel
Metallurgical
Plasma processess
Drying Process
Degas
Roots + Claw
Screw pump sizes range from 170 CFM to 5,100 CFM
- 17 -
Dry Screw Vacuum Pump
Characteristics of VPC Dry Screw Vacuum Pump
* Short Gas Path and Reduces Contaimination:
VPC screw pump has the shortest gas path in the industry. Moisture condensation is minimized.
Rotors can pump powder, thus runs well in the presence of contamination.
* Excellent Pump Performance Due to the Excellent Rotor Profile Sealing Effects:
Patented rotor profile allows larger clearance, but better sealing. Reduce rotor wear and
jam (caused by process contamination).
* Simple Structure:
Requires no isolation plate in different pump stages, contamination between rotors and isolation plates is avoided.
Accidental Pump Stoppage problem is solved.
* Easy Overhaul:
VPC dry pump is much easier to overhaul than other type of
dry pump. Repair is simple and low cost.
* Microprocessor and Remote Control Software:
Controls and monitors up to 250 pumps from panel - remotely.
FEATURES AND BENEFITS
* Environment friendly – no contaminated oil, no waste
* Applicable to all processes such as Etch, CVD and PVD
* Resistant to hash condition
* Short gas path – less contamination
* Runs well under unstable power
* Easy service, quick access to all service points
* High uptime, high throughput, high MTTR (mean time to repair)
* No wear, maintains vacuum integrity without degradation
* Low COO, long life, low upfront cost, low maintenance
* Sizes range from 57 CFM to 1,772 CFM
Screw pump Series:
PS:
PD:
PS, PD
PSE:
PDE:
Standard single-stage pump, water cooled motor
Low energy dual-stage pump. water cooled motor
PS Series Screw Pump
Air cooled moter
Air cooled moter
PD Series Screw Pump
- 18 -
Dry Screw Vacuum Pump
Screw pump cross secssion
*
*
*
*
*
*
Double end shaft support
Choice of air cool or water cool motor
Tolerant to voltage variation
Wide selection of material for different processes
Wide selection of voltages (220V - 460V)
Heated purge to prevent condensation
Screw Pump:
# of sealing surface is 1
Claw & Root:
Multi Root:
# of sealing surface is 8
# of sealing surface is 10
By product condensate from CVD process
Exhaust
Gap bet. Rotor end
& end plate
- 19 -
Dry Screw Vacuum Pump
Heat exchanger is available (optional) as an integral part of cooling system at minimal cost
Explosion-proof motor is available upon request; used for Pharmaceutical & Chemical application
PS Screw Pump Model
Single stage
Model #
PS80
PS160
PS180
PS602
PS902
PS1302
PS1802
Screw
PS80
PS160
PS180
PS80
PS160
PS180
PD Screw Pump Model
Dual stage
Booster
---------PR600
PR900
PR1300
PR1800
Model #
Screw
Booster
PD120
PD120
----
PD300
PD300
----
PD500
PD500
----
PD702
PD120
PR600
PD1902
PD300
PR1800
PD2202
PD300
PR3000
PD2602
PD500
PR3000
PDE3012 PDE800 PR3000 E: indicates air-cooled motor
Pump type:
A, H, G
Pump Type
A
H
G
Pump
x
x
x
Coating ty, N, H, C
Coating
Coating
Material
Type
NMC:
D
Defric
Ni
N
Ni-Teflon
H
NMC
C
Nano Modified Ceramic
Part number system:
Controller
x
x
x
Clean Process
N2 heater
Air cool Kit
Inverter
1 or 2
x
Corrosive
Process
x
x
x
x
1 or 2
x
1 or 2
Abrasive
Process
Sticky Process
x
x
x
x
x
x
Pump model # -- Type -- Coating material -- Inverter --Special
Example: PS602 -- HN1
PS80 pump + PR600 Booster + Advance controller + N2 heating + Ni coating + one Inverter
- 20 -
PS Screw Vacuum Pump
PS DRY SCREW PUMP
PS Standard Series (1600 - 21000 L/min)
PS series pump down to an ultimate vacuum of 7.5 x 10-4 Torr. PS is robust and designed
to work under harsh environment. The cost of ownership is lowest among competing
technologies. You get all the reliability and performance for the processes.
PS Pumping Speed Curve
- 21 -
PS Screw Vacuum Pump
PS Pumping Speed Curve (With Inverter)
PS Pumping Speed Curve (With Switch)
- 22 -
PD Screw Vacuum Pump
PD DRY SCREW PUMP
PD Series (Energy Saving, 2000 - 13330 L/min)
PDE series sets new benchmark in high-energy efficiency. It is environmentally friendly, and with low
power consumption. PDE series give you all the reliability and performance you want with less utilities cost.
Technical Data for PD Series Energy Saving Dry Vacuum Pump
Specification
Model
Unit
PDE120
Pumping Speed
L/min
m3/hr
cfm
1300/2000
80/120
47/70
Frequency
Voltage
Rated Power
Inlet
Connection
Outlet
Min. Flow
Max Pressure
Cooling
Pressure Dif
Water
Temp.
Connection
Pressure
N2
Purge Flow
Connection
Dim
LxWxH
Weight
Noise
System Max. Leak-rate
Operation Temp.
Aircooled
Motor
Operation Moisture
Interface
mBar
Pa
Hz
V
kW
L/min
kg/cm2
kf/cm2
⁰F
Mpa
SLM
Inch
Lbs
dB(A)
mbar l/s
⁰F
RH
PDE500
6950/8333
417/500
245/294
≤ 7.5 x 10-3
Torr
Ultimate Pressure
PDE300
4500/5500
270/330
160/195
≤ 1 x 10-2
≤2
50/60
220/380/440±5% (3Phase) 50/60Hz
3.73
7.5
15
NW50
ISO63
ND80
NW40
ND50
3
4
1
64⁰F ~ 77⁰F
RC 38"
RC 1/2"
0.05
6~60
12~150
Swagelok 1/4"
Swagelok 3/8"
46x21x24
54x23x24
72x31x30
616
770
1907
< 70
< 72
< 80
1X10-5
41⁰F ~ 104⁰F
≤ 90%
SEMI E73-0299
- 23 -
PD Screw Vacuum Pump
PD Series Pumping Speed Curves
PD & PS Series
Power Comsumption Curves
- 24 -
PD Screw Vacuum Pump
Pump Selection Chart
Pumping Speed m3/hr (CFM)
Model #
PS80
PS602
PS1002
PS160
PS902
PS180
PS1302
PS1802
PD120
PD702
PD902
PD1202
PD300
PD1402
PD1902
PD2202
PD500
PD1502
PD2012
PD2602
Screw
100
150
300
500
600
(170)
x
(255)
(510)
(850)
(1,019)
PS80
Booster
----PR600
PR1000
----PR900
x
PS160
x
PS180
----PR1300
PR1800
x
PD120
----PR600
PR900
PR1000
PD300
----PR1300
PR1800
PR3000
PD500
----PR1300
PR1800
PR3000
PDE800
PDE3012 PDE800
800
1000
1200
1500
1800
2000
2200
Solar Cell
Field
Semi
3000
(1,359) (1,699) (2,023) (2,548) (3,058) (3,398) (3,738) (4,417) (5,097)
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
x
----PR3000
x
x
Installed Base & Application
Field
2600
Process
PVD
LPCVD
PECVD
CVD
ETCH
Mono Crystal pulling
Poly Crystal Furnace
Field
TFT-LCD
Field
Process
ICP/RIE Etch
ETCH / PECVD
Plasma Cleaning
LPCVD
PECVD
Chemical
Pharma
Field
Industrial
Electronic
- 25 -
Process
Metal / Oxide Etch
PVD
Oven
Cell
Color Filter Stripper
Process
HF Generation
Methanol de-press
Distillation
Esterification
Vacuum Extract
Process
Vacuum Furnace
PVD
Heat Pipe
PVD
Rotary Roots Blowers
RP Series Roots Blower
Principle of Operation
Two symmetrically shaped impellors rotate inopposite directions inside the pump housing. Roots pumps are used
where great volumes have to be pumped. In combination with backing pumps, which compress against the atmosphere,
these pumps are capable of improving the attainable ultimate pressure of a pump system by a factor of 10. With two
Roots vacuum pump stages and a corresponding backing pump it is possible to attain pressure in the range down to
10-5 mbar (0.75x10-5 Torr).
Due to the non-contact rotation of the impellers, Roots vacuum pumps are able to run at higher speeds. Thus a high
pumping speed is obtained with a relatively small size pump. Pumping speed in excess of 1000 m3/h (589 cfm) can only be attained
with Roots pumps. When selecting the right kind of backing pump it will be possible to pump large quantity of gas in
connection with smaller backing pumps. Energy consumption is much less compared to a single backing pump offering
the same pumping speed.
The pressure difference between the inlet side and outlet side of roots pump are limited. RP series roots pump adopts
a bypass valve. When pressure difference reaches to a certain figure, the bypass valve opens automatically. Some air
volume from the outlet side flows to the reverse direction of inlet side through the bypassvalve, which reduce the
operational load of roots pump and backing pump greatly in the condition of high pressure system.
RP series vacuum pump and backing pump start at same time to avoid the overload for both of them.
Universal voltage motors, reduced capital and operating costs. Air cooled motors is standard that run quietly with
minimum vibration. Water cooled motor is optional.
Important cost savings
When you use RP mechanical booster pumps, you save money on installation and operation. Your capital costs are
reduced as you do not need valves, by-pass lines and pressure switches, and you can use a smaller front-stage pump
than with conventional drive booster pumps. Operating at relatively low pressures, the mechanical booster pump is
not exposed to the same concentrations of corrosive process media as is thebacking pump, which makes it reliable.
- 26 -
Rotary Roots Blowers
Advantages
* Compact structure; easy to install horizontally or vertically
* Dynamically balanced, low vibration and low noise
* Pumps non-condensable gases
* Quick start and high pumping speed
* Low energy consumption and low maintenance
* By-pass valve offers overload protection and runs reliably
* Reduced capital and operating costs
* Can operate continuously at all pressures when used with a backing pump
* Fast pump down of chamber vacuum. Pump down times cut by up to 50% Application
* Freeze drying in Chemical, food and textile industry
• Semiconductor processing
• Vacuum distillation
• Vacuum packaging
• De-gassing
• Thin film coating
• Vacuum metallurgy
• Low density wind tunnels
• Space simulation
* CO2 Laser
Dimensions
A
A1
A2
H1
H4
L
L2
F
RP150
RP250
RP500
RP1000
RP2000
670
740
845
1080
1236
300
300
395
495
642
290
290
316
370
460
285
285
350
419
530
348
330
446
553
760
355
420
370
510
740
194
185
218
240
292
165
209
236
301
370
- 27 -
Rotary Roots Blowers
Dimensions
F2
H3
H2
I
d
S
N
RP150
RP250
RP500
RP1000
RP2000
180
180
238
302
410
5
5
35
49
70
168
160
207
252
351
37
37
106
139
154
70
70
70
100
150
M12
M12
M12
M16
M16
130
130
130
170
225
Units
RP-150
RP-250
RP-500
RP-1000
RP-2000
RP Specification：
ITEMS
Pumping speed
3
m /h (cfm)
153 (90)
253 (149)
505 (297)
1000 (589) 2050 (1207)
Ultimate pressure
Torr
3.75x 10-4
Extreme full pressuer
Torr
3.75x 10-3
Max.Differential pressure
Torr
60
In and out of caliber
mm
65
65
65
100
150
Zero flow compression
Noise
Motor power
Motor synchronous speed
max
≥35
≥35
≥40
≥40
≥50
Db(A)
63
63
63
68
75
kW
1.1
1.1
2.2
4
7.5
3000
r/min
natural air cooling
Cooling model
Weight
Recommend backing
pump models
kg
90
X-63,
2X8
100
155
233
465
X-100,
2X-15
X-160,
2X-30
X-302,
2X-70
X-630,
two2X-70
Pump Curve
RP150
RP250
RP500
RP1000
RP2000
Dotted line represents the backing pump's pump speed at 10%
- 28 -
Turbomolecular Pumps, EBT, EMT
Model EBT
Innovative Technology - Ceramic-Bearing
Model EBT are mechnical-bearing, compound turbomolecular pumps which compliment line of Model
EMT mag-lev turbomolecular pumps. Model EBT pumps are highly efficient, cost effective solutions to
your high vauum pumping requirements. Model EBT compound turbomolecular pumps offer an extremely
rugged, mechnical bearing design which provides clean, reliable vacuum generation for high tech
manufacturing. Typical applications include semiconductor, thin film, photovoltaic, and analytical
instruments. Model EBT of compound turbomolecular pumps can be mounted in any orientation. These
pumps offer high pumping speed and high, light gas compression, making them ideal for UHV and
analytical systems.
EBT70
EBT240
Features and Benefits
*
*
*
*
*
Rugged Bearing Design Ideal for Mobile Applications
High Pumping Speeds
High Compression Ratios for Light Gases
Fast Starts and Stops
Quick Venting (No Vent Pulsing
* Fan or Water Cooling
* ISO or Conflat (CF) Flanges
* Integrated Controller (Select Models)
Applications
*
*
*
*
*
Surface Treatment
Analytical Instrument Lamps
Electron / X-Ray Tubes
Ion / EB-Source
Wafer Bonding
* Sputter
* Glass / Film Coating
* Exhaust Carts
Options
*
*
*
*
*
Natural Air or Water Cooling
Vent Valve Kit
Nitrogen Purge
Install Kit (Valves, etc.)
Isolation Valves
- 29 -
Turbomolecular Pumps
Specifications
- 30 -
Turbomolecular Pumps
Model Description
Performance Curves
- 31 -
Oil Mist Filters and Traps
Compact, Closed Oil Mist Filters
EE/SV Series
Features and Benefits :
* Captures oil fog, mist or smoke from exhaust of oil flooded vacuum pumps
* Seamless drawn housings – no welds to rust or vibrate apart
* Rugged all steel construction
* Compact low profile design
* Easy field maintenance
Technical Specifications:
* 03 micron media; 99.97% efficiency
* Continuous operating temp: 68°F (20°C) to 180°F (80°C)
Options:
* Additional ISO flange connections
* Additional coating options available
* Side outlet configuration
* Drain for SV Series
EE Series Specification
Inlet
Outlet
CFM
KF16
KF16
8
KF25
KF25
KF25
KF25
P/N
P/N
A
B
C
D
Wt (lb)
EE-GL915-KF16
4.69
0.88
3.25
0.88
1.2
8
EE-GL915-KF26
4.69
0.88
3.25
0.88
1.2
20
EE-PSG925-KF26
7.75
0.88
5.25
0.88
5
* Back pressure valve to release element at 7.35 psi differential for pump safety
* 1/8" port for oil drain
SV Series Specification
Inlet
Outlet
CFM
P/N
A
B
C
D
Wt (lb)
KF16
KF16
8
SV-GL915-KF16
4.69
0.88
3.25
0.88
1.20
KF25
KF25
8
SV-GL915-KF25
4.69
0.88
3.25
0.88
1.20
KF25
KF25
20
SV-PSG925-KF26
7.75
0.88
5.25
0.88
5.00
* Same dimension as EE Series. Without valve or external drain
- 32 -
Oil Mist Filters and Traps
Compact, Oil Mist Eliminator
EF Series:
1/2" - 1 3/4", NW16 - NW40
Features and Specifications:
* Captures oil fog, mist or smoke from exhaust of oil flooded vacuum pumps
* Easy thumbscrew access for maintenance
* Steel construction with Nickel plated finish
* Seamless drawn housings – no welds to rust or vibrate apart
* Minimum 99.97% D.O.P. on 0.3 micron particles Vacuum Coating
* Temp (continuous): min 40°F (4.4°C) max 220°F (104°C)
Applications and Equipment :
* Vacuum Furnaces & Ovens
* Vacuum Freeze Drying & Outgassing
* Custom Vacuum Pumping Systems
* Vacuum Drying
* Vacuum Metallizing
* Vacuum Coating
* Refrigeration and Air Conditioning evacuation service
* Semiconductor Industry
* Laboratory Industry
* Autoclaving, Sterilization
* Electronic tube and light bulb evacuation
* Leak detectors
Options:
* ISO flange connections
* Special connections
* Drain Back Design Available on Selected Models
Specification
Inlet
KF16
KF25
KF25
KF40
KF40
Outlet
KF16
KF25
KF25
KF40
KF40
ISO Flg Vacuum Filters, CSL Series (Electorless Nickel Finish, SS Fittings)
(Compact Inlet "L" Style Vacuum Filters with ISO-NW Flanges)
CFM
P/N
A
B
C
Wt (lb)
EF-FG5-KF16
4.5
4.50
0.88
2.50
0.60
EF-FG5-KF25
4.50
0.88
2.50
1.40
4.5
EF-FG10-KF25
9.25
2.13
5.13
3.50
24
EF-FG20-KF40
7.50
2.13
10.25
7.00
44
EF-FG24-KF40
9.25
2.13
10.25
9.00
55
Features :
* Temp (continuous): min -15°F (-26°C ) max 220°F (104°C )
* Positive sealing O-ring seal system
* Carbon steel construction
* Seamless drawn housings
* Large dirt holding capacity and easy field cleaning, especially when mounted horizontally
or inverted
* Vacuum leak rate: Typecally 1x10-5mmHg (1x10-5mbar-L/sec)
* Stainless steel ISO flanges
* Electroless nickel finish
- 33 -
Oil Mist Filters and Traps
Applications:
* Leak Detection
* Medical
* Vacuum Pump-Rotary Piston
* Vacuum Pump-Rotary Vane
* Scroll Dry Pump
* Backstreaming-Protect the system from pump fluid or particulate migration
* Prevent dry scroll tip seal migration
* Laser technology
*Vacuum coating and lamination
Specification
Inlet
Outlet
CFM
P/N
A
B
C
D
Wt (lb)
KF16
KF16
8
CLS-824-KF16
3.88
2.63
3.75
2.25
1.20
KF25
KF25
8
CLS-824-KF25
3.88
2.63
3.75
2.25
1.20
KF25
KF25
20
CLS-842-KF25
4.38
3.38
5.75
2.75
3.00
KF40
KF40
CLS-842-KF40
4.38
3.38
5.75
2.75
3.00
KF40
KF40
CLS-848-KF40
7.19
4.63
7.38
5.00
5.00
- 34 -
Vacuum Gauge
Digital Compact Vacuum Meters / Data Loggers
Thyracont has been developing and manufacturing vacuum measurement instruments in Germany
for more than 40 years. Our company provides the world’s end-users and original equipment
manufacturers of vacuum pumps and vacuum process equipment with innovative vacuum
measurement instrumentation.
VD81 Compact Vacuum Meter ● Piezo ● 1600 to 1 mbar
* Chemically resistant ceramic sensor with FKM sealing
* Min/Max Memory: Storage and display of high and low values
* Up to 5000 h battery life
* Data logger functionality: Save up to 2000 measurements in the vacuum meter
* High repeatability, excellent long term stability
* Pressure units mbar, Torr, hPa
* Measurement range: 1600 – 1 mbar (1200 – 1 Torr)
* Automatic switch off or continuous operation
* Vacuum connection by small flange, G1/4 female thread or screw in hose nozzle
VD83 Compact Vacuum Meter ● Pirani ● 100 to 5e-4 mbar
* Temperature compensated, metal sealed Pirani sensor with durable helix filament
* High accuracy, excellent repeatability
* Min/Max memory: Storage and display of high and low values
* Gas correction factors for correct pressure readings
* High battery life due to clocked measurement
* The sensor is well protected against condensing solvents
* Pressure units: mbar, Torr, hPa
* Measurement range: 100 – 5e-4 mbar (75 to 5e-4 Torr)
* Battery conserving auto-off mode or continuous operation
- 35 -
Vacuum Gauge
Digital Compact Vacuum Meters / Data Loggers
VD84 Compact Vacuum Meter ● external Pirani ● 100 to 1e-3 mbar
* Temperature compensated Pirani sensor with durable helix filament
* Min/Max memory: Storage and display of high and low values
* Excellent reproducibility
* Gas correction factors for correct pressure readings
* Long battery life due to clocked measurement
* The sensor is well protected against condensed solvents
* Automatic switch off or continuous operation
* Pressure units mbar, Torr, hPa
* Measurement range: 100 – 1e-3 mbar (75 – 1e-3 Torr)
Digital Compact Vacuum Meters / Data Loggers
VD85 Compact Vacuum Meter ● Piezo/Pirani ● 1200 to 5e-4 mbar
* Wide measuring range due to combined sensor piezo/Pirani
* High precision and optimal resolution over the whole range
* Min/Max memory: Storage and display of high and low values
* Excellent long term stability
* Gas correction factor for correct pressure readings
* Pressure units mbar, Torr, hPa
* Measurement range: 1200 to 5e-4 mbar (900 to 5e-4 Torr)
* Automatic switch off and continuous operation
* Continuous pressure display over the whole range
- 36 -
Vacuum Gauge
VPC offers a wide range of compact vacuum gauges to meet your measurement needs. VPC vacuum gauges
include Pirani, Pirani/Capacitance, Pirani/Ionization and The TotalOne Guage, a
Pirani/Capacitance/Ionization, covering pressures from atmosphere to ultra-high vacuum. VPC supplies a
range of power supply display units to control all the gauges or can be powered by the user while utilizing
the gauge output or the optional gauge mounted display. Gauge options include KF or CF flanges and
process control setpoint outputs. Our gauges can be used in applications including load locks, PVD Systems,
analytical systems and many others.
Model EGP500: Pirani Gauge, 5 x 10-4...1000, KF16 Flange
* Available with Tungsten or Nickel filament or with a fully
ceramic coated sensor unit for highly corrosive applications
* Easy to exchange plug & play senor element with on-board calibration
data - guarantees high reproducibility and low cost of ownership
* Eligible output signal and various plug versions for easy integration
* Mounts in any orientation
* Diagnostic port on all versions
* Measurement range: 5 x 10-4...1000
* Optional display, setpoints and digital interfaces
- 37 -
Vacuum Gauge
Model EGPC550: Pirani/Capacitance Gauge, 5 x 10-5...1500,
KF16 Flange
* Gas-type independent above 10 mbar - allows safe venting with any
gas mixture
* High accuracy and reproducibility at atmosphere - for reliable
atmospheric pressure detection
* Fast atmospheric detection - eliminates waiting time and shortens
process cycle
* Mount in any orientation
* Available with Tungsten or Nickel filament or with a fully ceramic
coated sensor unit for highly corrosive applications
* Easy to exchange plug & play sensor element with on-board
calibration data - guarantees high reproducibility and low cost of
ownership
* Eligible output signal for easy integrationDiagnostic port
* Optional atmospheric switch, display and digital interfaces
Model EGPI400: Pirani/Ionization Gauge, 5 x 10-10...1000,
KF25 Flange
* Extremely wide measurement range from 5 x 10-10 mbar to
*
*
*
*
*
atmosphere (3.8 x 10-10 Torr to atmosphere)
Excellent repeatability in the process pressure range from
10-8...10-2 mbar of 5%
The Pirani interlock protects the Bayard-Alpert system from premature
filament burnout and excess contamination from high pressure
operation
Long-life yttrium oxide coated iridum filament
Automatic high vacuum Pirani adjustment reduces operator
interventions
Optional graphic display and Fieldbus interfaces available
Model EGT450: Pirani/Capacitance/Ionization Gauge,
5 x 10-10...1500, KF25 Flange
* EGT450 saves cost and tool space and reduces the complexity of
vacuum measurement, installation and setup
* Gas-type-independent pressure measurement above 10 Torr provides
more reliable loadlock control for any gas mixture
* Pirani interlock protects the hot filament from premature burnout
* Automatic high vacuum Pirani adjustment reduces operator
interventions
* Differential pressure measurement at atmosphere eliminates
uncertainty related to atmospheric pressure changes
* Easy-to-exchange sensing element with on-board calibration data
guarantees reproducibility
* Optional graphic display and Fieldbus interfaces available
* RoHS compliance
- 38 -
Vacuum Gauge
ConvecTorr: Thermalcouple Gauge, 1 x 10-4...1000
*
*
*
*
Measurement range: 1 x 10-4 Torr to atmosphere
Measure precision: +30% within a pressure decade
Pressure response time: Less than 0.2 seconds
KF16 Flange (other flange available upon request)
* 304 SST with platinel filament and ABS housing
531TC: Thermalcouple Gauge, 1 x 10-3...760
* Measurement range: 1 x 10-3 Torr to atmosphere
* Pressure response time: Less than 3 seconds
* KF16 Flange (other flange available upon request)
* Nickel plated, soldered construction
Vacuum Gauge Controller
Model EGC1000: Gauge Controller, Single Channel
* Automatic identification of the connected EBARA Gauges
* User selectable measurement unit (mbar, Torr, Pascal, micron)
* High resolution - 16 bit A/D converter
* Up to six adjustable setpoints with adjustable hysteresis, may be
assigned to any channel
* Programmable 0 to 10 V chart recorder output with logarithmic / linear
characteristics for each gauge or gauge combination
(Model EGC-3000 only)
* Firmware upgrades available online are easily downloaded via the
RS232C interface
* Versatile, compact bench-top model design can easily be mounted in a
panel or 19”rack
* Wide range power supply 90 to 250V, 50 to 60 Hz
- 39 -
Poppet Valve
Stainless and Aluminum Angle & Inline Valve
Our valves are uniquely designed for:
Ø
Longevity
Ø
High conductance
Ø
Cost efficiency
Ø
KF, ISO, CF flange configuration
Ø
Size from 0.5" to 25"
Ø
Leak rate achievable to 2x10-10 standard cc/sec, He
These valves are designed for 3 million cycles with warranty of 1.5 million cycles (or 12 months).
Valve body is made of 304 stainless steel. Welded bellows are made of AM350 for long life.
To guarantee long lasting seal life, actuator housings are machined and honed to micron
precision -- contrary to traditional tube-housing which are neither round nor straight.
Our standard pneumatic valves up to 50mm are normally closed. Standard valves over 50mm
are air-open / air-close. Valve size goes up to 630mm. Optional "pneumatic lock" is available.
Options:
 Flange configuration
 Solenoid valve
 Reed sensor
 Kalrez O-Ring
 Heating jacket
VPC Core Competencies
Application expertise
Strong engineering R&D
Superior product offering
System level know-how
Specification:
Vacuum range :
Leak test :
Bake temperature :
MTTF (life) :
Time from open-close :
Operating temperature
Differential pressure
Position indicator
Operating pressure
:
:
:
:
1 x 10-9 Torr
1 x 10-9 std cc/sec He
120o C
1.5 million cycle
<0.5 sec
20o to 90o C
15 psi
24 VDC or 120 VAC
60 -- 95 psi
- 40 -
Poppet Valve
Stainless Z Angle Valve


Any flange configuration. 
Cycle life of 1.5 million
Pneumatic Z Valve-KF Flange
Part No.
ZVP -KF16
ZVP -KF25
ZVP -KF40
ZVP -KF50
A (inch)
2.15
2.03
2.40
3.40
Large conductance
B (inch)
1.12
1.37
1.88
2.62
C (inch)
B (inch)
1.12
1.37
1.88
2.62
3.12
C (inch)
N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
Pneumatic Z Valve-CF Flange
Part No.
ZVP-CF1.33-HV
ZVP-CF2.12-HV
ZVP-CF2.75-HV
ZVP-CF3.38-HV
ZVP-CF4.50-HV
A (inch)
2.50
2.05
2.46
3.48
3.38
Manual Z Valve-KF Flange
Part No.
A (inch)
B (inch)
C (inch)
ZVM-KF16
ZVM-KF25
ZVM-KF40
ZVM-KF50
2.15
2.03
2.40
3.40
1.12
1.37
1.88
2.62
5.19
5.69
8.02
10.73
B (inch)
1.12
1.37
1.88
2.62
3.12
C (inch)
5.19
5.69
8.02
10.73
12.70
Manual Z Valve-CF Flange
Part No.
ZVM-CF1.33-HV
ZVM-CF2.12-HV
ZVM-CF2.75-HV
ZVM-CF3.38-HV
ZVM-CF4.50-HV
A (inch)
2.50
2.05
2.46
3.48
3.38
- 41 -
Poppet Valve
Stainless KF Angle Valve


Any flange configuration. 
Cycle life of 1.5 million
Large conductance
Pneumatic Angle Valve-KF Flange
Part No.
AVP -KF16
AVP -KF25
AVP -KF40
AVP -KF50
AVP-ISO 63
AVP-ISO 80
AVP-ISO100
AVP-ISO160
AVP-ISO200
AVP-ISO250
A (inch)
2.15
2.05
2.56
3.00
3.25
3.50
4.47
6.25
7.01
9.84
B (inch)
2.03
2.03
2.56
2.62
2.76
3.25
3.51
5.51
5.51
7.95
C (inch)
6.35
6.13
6.94
9.36
9.55
11.15
13.53
18.23
25.51
25.98
B (inch)
2.36
2.36
2.36
2.36
C (inch)
5.42
5.27
6.45
7.80
Manual Angle Valve-KF Flange
Part No.
AVM-KF16
AVM-KF25
AVM-KF40
AVM-KF50
A (inch)
2.15
2.05
2.56
3.00
Pneumatic In-Line Valve-KF Flange
Part No.
IVP-KF16
IVP-KF25
IVP-KF40
IVP-KF50
A (inch)
4.00
4.25
5.20
7.01
B (inch)
C (inch)
A (inch)
B (inch)
C (inch)
4.00
4.20
5.12
7.01
3.47
3.42
4.55
6.19
N/A
N/A
N/A
N/A
Manual In-Line Valve-KF Flange
Part No.
IVM-KF16
IVM-KF25
IVM-KF40
IVM-KF50
- 42 -
Poppet Valve
Stainless CF Angle and Inline Valve - - - HV (High Vacuum)
Any flange configuration.
Cycle life of 1.5 million
Large conductance
 [email protected] bonnet
Pneumatic Angle Valve-CF Flange
Part No.
AVP -CF1.33-HV
AVP -CF2.12-HV
AVP -CF2.75-HV
AVP -CF3.38-HV
AVP -CF4.50-HV
AVP -CF4.62-HV
AVP-CF6.00-HV
AVP-CF8.00-HV
A (inch)
B (inch)
C (inch)
2.18
2.07
2.47
3.08
3.38
3.63
4.66
5.68
2.03
2.03
2.56
2.62
2.76
3.25
3.51
5.51
6.38
6.14
7.00
9.44
9.68
11.28
13.70
17.66
2.18
2.07
2.62
3.08
B (inch)
2.36
2.36
2.36
2.36
C (inch)
5.45
5.22
6.70
7.85
3.35
2.36
8.00
Manual Angle Valve-CF Flange
Part No.
AVM-CF1.33-HV
AVM-CF2.12-HV
AVM-CF2.75-HV
AVM-CF3.38-HV
AVM-CF4.50-HV
A (inch)
Pneumatic In-Line Valve-CF Flange
Part No.
IVP-CF1.33-HV
IVP-CF2.12-HV
IVP-CF2.75-HV
IVP-CF3.38-HV
IVP-CF4.50-HV
A (inch)
B (inch)
C (inch)
4.70
4.24
5.26
7.00
N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
A (inch)
B (inch)
C (inch)
4.70
4.24
5.24
7.00
7.30
3.92
3.83
4.83
5.97
6.72
N/A
N/A
N/A
N/A
N/A
Manual In-Line Valve-CF Flange
Part No.
IVM-CF1.33-HV
IVM-CF2.12-HV
IVM-CF2.75-HV
IVM-CF3.38-HV
IVM-CF4.50-HV
- 43 -
Poppet Valve
Stainless CF Angle and Inline Valve - - - UHV (Ultra High Vacuum)
Any flange configuration.
Cycle life of 1.5 million
Large conductance
Cu @Bonnet
Pneumatic Angle Valve-CF Flange
Part No.
AVP-CF1.33-UHV
AVP-CF2.12-UHV
AVP-CF2.75-UHV
AVP-CF3.38-UHV
AVP-CF4.50-UHV
AVP-CF4.62-UHV
AVP-CF6.00-UHV
AVP-CF8.00-UHV
A (inch)
B (inch)
C (inch)
2.18
2.07
2.47
3.08
3.38
3.63
4.66
6.50
2.03
2.03
2.56
2.62
2.76
3.25
3.51
9.97
6.38
6.14
7.00
9.44
9.68
11.28
13.70
18.47
2.18
2.07
2.62
3.08
B (inch)
2.36
2.36
2.36
2.36
C (inch)
5.47
5.22
6.50
7.85
3.38
2.36
8.15
Manual Angle Valve-CF Flange
Part No.
AVM-CF1.33-UHV
AVM-CF2.12-UHV
AVM-CF2.75-UHV
AVM-CF3.38-UHV
AVM-CF4.50-UHV
A (inch)
Pneumatic In-Line Valve-CF Flange
Part No.
IVP-CF1.33-UHV
IVP-CF2.12-UHV
IVP-CF2.75-UHV
IVP-CF3.38-UHV
IVP-CF4.50-UHV
A (inch)
B (inch)
C (inch)
4.70
4.24
5.24
7.15
N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
A (inch)
B (inch)
C (inch)
4.70
4.24
5.24
7.00
N/A
3.93
3.83
4.88
5.97
N/A
N/A
N/A
N/A
N/A
N/A
Manual In-Line Valve-CF Flange
Part No.
IVM-CF1.33-UHV
IVM-CF2.12-UHV
IVM-CF2.75-UHV
IVM-CF3.38-UHV
IVM-CF4.50-UHV
- 44 -
Poppet Valve
Large Pneumatic Stainless Steel Angle Valve
Angle Valve Features:
Specification :
1x10-9 atm cc/sec He
Valve body and poppet material: 304L
Leak rate
Electropolished surface finish interior
Vacuum rating
Rotatable ISO flange on 200mm and up
Bake temperature
Magnetic position indicator included on 200 mm and up
Operating temperature
Edge welded bellow with 90% full conductance
Mounting position
20o C -- 90o C
Any
Viton O-Ring
Air pressure required
60 -- 95 psig
Cycle life
100K cycles before maintenance
Part No
AVP-200
AVP-250
AVP-320
AVP-400
AVP-500
AVP-630
A (inch)
210
264
250
330
360
450
B (inch)
370
469
494
624
740
860
C (inch)
592
724
838
1040
1004
1330
Mtg. hole
12x-11
12x-11
12x-14
12x-14
16x-14
20x-14
1x10-9 Torr
1200 C
B.C.
260
310
395
480
580
720
Side port
------DN 80
DN100
DN125
DN160
** Please inquire about our bellow-less valves and pricing **
Stainless Steel Custom Valve
VPC core strenght is in custom design and manufacture of our Poppet Valve, Gate Valve, Ball Valve ,
Butterfly Valve and Slit Valve. Beside offering of our standard valve, if you ever have a need for custom
valve that our standard valve doesn't meet your application requirement, our eningeers is stand by to
help you from design implementation to production.
We also have a superf customer service team that will help you every steps of the way. Give us a call or
email us to [email protected] with your custom valve need and an engineer will reach out to you
to discuss your requirement within 24 hours. We can also be reached at (510) 498-8518 Monday - Friday
from 9:00 am - 5:00 pm PST.
VPC STAFFS IS READY TO SERVE YOU SO GIVE US A CALL!
- 45 -
Poppet Valve
Solenoid Valve
3V1 series
4V series
3-way Solenoid
4-way Solenoid (LED)
3V1
P/N
4V210
Cv
Port
2-position
3V1-06-24
0.15
1/8
LED
3-WAY
3V1-06-110
0.15
1/8
LED
2-position
4V210-08-24
0.89
1/4
LED
4-WAY
4V210-08-110
0.89
1/4
LED
Buying guide
Normally closed valves:
2-position ,3-way
Double acting valves:
2-position, 4 -way
1/2"-2" valve s use 3V1 solenoid
2.5"-12" valves use 4V210
solenoid
Voltage: 24 VDC or 110 VAC
CE certified
LED light to indicate valve open
- 46 -
Poppet Valve
ACCESSORIES
Position Sensor
Part No#
Position Indicator
Specification
3V1-06- 24
3V1-06-110
4V-210-08-24
4V-210-08-110
KF16 ~ ISO250
POSITION INDICATOR, DC/AC 5-120V
Air supply fitting
Voltage option
Solenoid Valve
Part No#
Size
1/8" NPT (KF16-KF50) / 1/4" NPT (ISO63-ISO250)
DC: 24V / AC: 110V / 220V
Specification
Size
DC 24V, 1/8" NPT
AC110V, 1/8" NPT
DC 24V, 1/4" NPT
AC110V, 1/4" NPT
- 47 -
Bellows - Flex Formed Hose
Material: SS 316
KF Flange Thin Wall Bellow
KF Flange Medium Wall Bellow
Wall Thickness: .006"
Part No.
Wall Thickness: .008"
Part No.
FREE LENGTH
A (INCH)
FH-KF16-100-008-316
4.00
FH-KF16-250-008-316
10.00
FH-KF16-305-008-316
12.00
FH-KF16-500-008-316
20.00
FH-KF16-610-008-316
24.00
FH-KF16-750-008-316
30.00
FH-KF16-915-008-316
36.00
FH-KF16-1000-008-316
39.00
FH-KF16-1219-008-316
48.00
FH-KF16-2000-008-316
79.00
FH-KF25-100-008-316
4.00
FH-KF25-250-008-316
10.00
FH-KF25-305-008-316
12.00
FH-KF25-500-008-316
20.00
FH-KF25-610-008-316
24.00
FH-KF25-750-008-316
30.00
FH-KF25-915-008-316
36.00
FH-KF25-1000-008-316
39.00
FH-KF25-1219-008-316
48.00
FH-KF25-2000-008-316
79.00
FH-KF25-2500-008-316
98.00
FH-KF40-100-008-316
4.00
FH-KF40-250-008-316
10.00
FH-KF40-305-008-316
12.00
FH-KF40-500-008-316
20.00
FH-KF40-610-008-316
24.00
FH-KF40-750-008-316
30.00
FH-KF40-915-008-316
36.00
FH-KF40-1000-008-316
39.00
FH-KF40-1219-008-316
48.00
FH-KF40-2000-010-316
79.00
FH-KF50-100-008-316
4.00
FH-KF50-250-008-316
10.00
FH-KF50-305-008-316
12.00
FH-KF50-500-008-316
20.00
FH-KF50-610-008-316
24.00
FH-KF50-750-008-316
30.00
FH-KF50-915-008-316
36.00
FH-KF50-1000-008-316
39.00
FH-KF50-1215-008-316
48.00
FH-KF50-2000-010-316
79.00
FH-KF16-100-006-316
FH-KF16-250-006-316
FH-KF16-305-006-316
FH-KF16-500-006-316
FH-KF16-610-006-316
FH-KF16-750-006-316
FH-KF16-915-006-316
FH-KF16-1000-006-316
FH-KF16-1219-006-316
FH-KF16-2000-006-316
FH-KF25-100-006-316
FH-KF25-250-006-316
FH-KF25-305-006-316
FH-KF25-500-006-316
FH-KF25-610-006-316
FH-KF25-750-006-316
FH-KF25-915-006-316
FH-KF25-1000-006-316
FH-KF25-1219-006-316
FH-KF25-2000-006-316
FH-KF25-2500-006-316
FH-KF40-100-006-316
FH-KF40-250-006-316
FH-KF40-305-006-316
FH-KF40-500-006-316
FH-KF40-610-006-316
FH-KF40-750-006-316
FH-KF40-915-006-316
FH-KF40-1000-006-316
FH-KF40-1219-006-316
FH-KF40-2000-006-316
FH-KF50-100-006-316
FH-KF50-250-006-316
FH-KF50-305-006-316
FH-KF50-500-006-316
FH-KF50-610-006-316
FH-KF50-750-006-316
FH-KF50-915-006-316
FH-KF50-1000-006-316
FH-KF50-1215-006-316
FH-KF50-2000-006-316
FREE LENGTH
A (INCH)
4.00
10.00
12.00
20.00
24.00
30.00
36.00
39.00
48.00
79.00
4.00
10.00
12.00
20.00
24.00
30.00
36.00
39.00
48.00
79.00
98.00
4.00
10.00
12.00
20.00
24.00
30.00
36.00
39.00
48.00
79.00
4.00
10.00
12.00
20.00
24.00
30.00
36.00
39.00
48.00
79.00
- 48 -
Hose - Formed Bellow
ISO Flange Bellow --flex hose
Materials : SS 316
Part No.
FH-ISO63-100-007-316
FH-ISO63-250-007-316
FH-ISO63-305-007-316
FH-ISO63-500-007-316
FH-ISO63-610-007-316
FH-ISO63-750-007-316
FH-ISO63-915-007-316
FH-ISO63-1000-007-316
FH-ISO63-1219-007-316
FH-ISO80-100-007-316
FH-ISO80-250-007-316
FH-ISO80-305-007-316
FH-ISO80-500-007-316
FH-ISO80-610-007-316
FH-ISO80-750-007-316
FH-ISO80-915-007-316
FH-ISO80-1000-007-316
FH-ISO80-1219-007-316
FH-ISO100-100-008-316
FH-ISO100-250-008-316
FH-ISO100-305-008-316
FH-ISO100-500-008-316
FH-ISO100-610-008-316
FH-ISO100-750-008-316
FH-ISO100-910-008-316
FH-ISO100-1000-008-316
FH-ISO100-1219-008-316
FH-ISO160-100-010-316
FH-ISO160-250-010-316
FH-ISO160-305-010-316
FH-ISO160-500-010-316
FH-ISO160-610-010-316
FH-ISO160-750-010-316
FH-ISO160-915-010-316
FH-ISO160-1000-010-316
FH-ISO160-1219-010-316
A
(INCH)
4.00
10.00
12.00
20.00
24.00
30.00
36.00
39.00
48.00
4.00
10.00
12.00
20.00
24.00
30.00
36.00
39.00
48.00
4.00
10.00
12.00
20.00
24.00
30.00
36.00
39.00
48.00
4.00
10.00
12.00
20.00
24.00
30.00
36.00
39.00
48.00
- 49 -
Engineering
Vane Pump
- 50 -
Engineering
Calculation of pumping Speed
- 51 -
Leading the performance in vacuum products
Cost Reduction 30% ~ 60%
"We don't believe valves should be expensive
It should only be clean, reliable and robust"
This is What We Do :
* Guarantee Superior Quality
* Saving as much as 60%
* Registered US Federal Government Supplier
* Materials Originated from US Government Designated Countries
* Lowest Cost Of Ownership
41340 Christy Street, Fremont, CA USA - (510) 498-8518 - www.vacproducts.com - [email protected]

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