Differential Pressure Detection Type Digital Mass Flow

Differential Pressure Detection Type Digital Mass Flow
1
New Concept Mass Flow Module
HORIBA STEC has developed a new series of flow control modules called the D500 that satisfies the extremely
stringent performance requirements for gas flow control in next generation semiconductor fabrication
processes. The D500 achieves high sensitivity flow measurements over a wide dynamic range of flows by
measuring the differential pressure across an advanced laminar flow element. The D500 utilizes a reliable
piezoelectric metal diaphragm control valve. This valve has been proven itself over the last 20 years and is the
standard actuator for HORIBA STEC’ s line of mass flow controllers. This valve design benefits from an
extremely small dead volume and produces high speed flow control. In addition, the placement of the control
valve on the inlet of the MFC gives the D500 excellent pressure insensitivity. With the D500 the gas flow to the
process remains undisturbed even if the supply pressure fluctuates. The brain of the D500 is its 32bit CPU
which calculates mass flow utilizing a 3 dimensional map developed by actual process gas testing. The CPU
calculates the mass flow through the D500 based on the current values of temperature, line pressure and the
differential pressure across the advanced laminar flow element and actuates the Piezo valve every 2
milliseconds to maintain the desired flow. The result is high accuracy, high resolution, and high speed response
in gas control.
2
Origin of the Product Name
Criterion
The name “CRITERION” is based on the Greek word “Kriterion,”
meaning a reference, standard, or yardstick on which to base a judgment.
Aiming to become the world’s leading company in the fluid control
field, HORIBA STEC created a new series of flow control modules and
called it CRITERION.
3
Display
Connector for Digital/
Analog communication
Connector for Digital
communication
Flow control valve
32 Bit CPU
Pressure sensor
P
P1
P2
Pressure sensor
Flow restorictor
P0
Temperature sensor
Gas filter
GAS INLET
GAS OUTLET
[Structure]
The device consists of a pressure sensor for monitoring an operating supply pressure, a particle
protection filter, a flow rate control valve, a flow restrictor, a pair of absolute pressure sensors, and a
temperature sensor. Operating pressures and outlet pressures of the flow restrictor as well as
temperature are used to obtain an accurate flow rate through conversion by the computation circuit. The
measured flow rate is used to drive the control valve to the flow rate set value.
New functions and high performance in one unit
[High Accuracy]
[Fast Response]
[Dynamic Range]
[Complying with all RoHS regulations]
RoHS regulations:
[Pressure Performance]
G-LIFE
Self-Diagnosis Function
Multi gas, multi range,
multi pressure
RoHS stands for “Restriction of Hazardous
Substances” and is a set of regulations
enforced in the EU to limit the use of six
hazardous substances (lead, mercury,
cadmium, hexavalent chromium,
polybrominated biphenyls (PBBs) and
polybrominated diphenyls (PBDEs)), in
electric and electronic components.
4
[High Accuracy]
Improvement in flow rate accuracy
CRITERION D500 (hereinafter referred to as D500) obtains characteristic
sure and flow rate. The gas data map from the actual process gas is
data of a gas based on the HORIBA ROR System* by utilizing actual
loaded into the D500, thereby guaranteeing control of an actual flow rate
process gas to improve the actual flow rate accuracy of the D500. Accord-
with high accuracy.
ing to the measurement principle of the HORIBA ROR System, an equation
Unlike sonic nozzle approaches, utilizing a laminar-flow-viscous-range-
of state of ideal gas in which a controlled gas is introduced into a vacuum
pressure-difference as in the D500, eliminates the necessity for satisfying a
exhausted chamber is applied to obtain a flow rate by conversion from a
critical pressure condition. The D500 can be utilized in a wide range of a
pressure increase rate inside the chamber. Flow rate characteristic data of
pressure condition equivalent to or below 53.3kPa(A).
the process gas is subjected to three-dimensional mapping in terms of pres-
3D map
Set point accuracy
20
Down Stream
Pressure Torr
Flow
SCCM
P2
Q
Differential Pressure Torr
ΔP
Flow rate accuracy (% S.P.)
15
10
S.P. accuracy
±1%S.P.
5
0
-5
5%
-10
-15
-20
20%
F.S. Standard MFC
accuracy
±1%F.S.
40%
Flow rate
accuracy
60%
[Principle of Measurement]
For the perfect laminar flow element the mass flow rate is proportional to the square of the absolute upstream pressure
– the absolute downstream pressure.
Q = k(P12 - P22)
The D500 module utilizes a specialized compressible laminar flow restrictor and measures flow rate based on the above
equation. By its nature, the flow relationship between pressure and mass flow is beneficially non-linear. At lower flows the
pressure increase required for an incremental flow increase is much larger than the required pressure increase for the
same incremental flow increase from a higher flow. In addition, the D500 is not limited like a sonic-based MFC to maintain
a critical pressure ratio, P1/P2, allowing the D500 to operate to higher outlet pressures.
As a result the D500 has a natural percent of reading characteristic as opposed to the percent full scale error
characteristic displayed by conventional MFCs. This inherent property enables the high-accuracy the D500 modules to
operate over a wider dynamic range than the competition.
To establish and verify flow measurement accuracy on process gases which are often non-ideal, empirical data,
which is taken on each process gases at multiple temperatures and pressure conditions, has been compiled into our
three-dimensional mapping database allowing a high degree of accuracy even when temperature or outlet
Restrictor P1 Pressure
Nonlinear Characteristics Diagram
Critical point
Flow = k(P12 - P22)
The resolution in the low flow-rate region is
better than that in the high flow-rate region.
Flow
5
Flow%
100%
Specification H operating
downstream pressure ≤ 13.3kPa(A)
±1.0% S.P. : 5–100% F.S.
±0.05% F.S. : 0.2-5% F.S.
*ROR System : Rate of Rise System
conditions fluctuate.
80%
[Fast Response]
[Dynamic Range]
Fast response across an entire flow rate range
An opportunity to reduce the size of the gas panel
In cutting-edge deposition and etching, fast response is an important factor.
The D500 combines an algorithm which is unique to HORIBA STEC, Co.,
Ltd. and supports fast response of digital MFC, a high-speed pressure
sensor, a fast and stable piezoelectric actuator, and a fast response 32 bit
CPU capable of handling changes in process gas delivery conditions. This
combination of high quality and high speed components enables the D500
to provide accurate and responsive flow control in transient and
steady-state conditions across the entire flow range from the smallest to the
largest set points.
The historic flow control range of the MFC has been 2% to 100%. The
increased diversification in cutting-edge processes has resulted in a
demand for a widening of the range of gas flows into the chamber,
beyond this 50 to 1 dynamic range. To provide this wider control with
older technology MFCs, it has been necessary to install two MFCs with
different full scales for the same gas, increasing the size and cost of the
gas box.
The D500’s low-flow-rate accuracy, combined with its advanced
control algorithms, widens its dynamic control range 500 to 1,
accurately controlling flows from 0.2 to 100% full scale.
Step up 0-100%
120
Flow%F.S.
Flow%F.S.
Wide range
10
80
0.61sec
60
40
Flow rate set value
Flow rate output value
20
0
0
1 Time [s]
2
8
0.61sec
6
Standard MFC
4
Flow rate set value
Flow rate output value
2
0
3
0
Step up 0-1%
1.2
1 Time [s]
2
Flow control range
Air valve
3
CRITERION
D500
Step up 0-0.5%
0.6
0.5
Flow%F.S.
1.0
Flow%F.S.
Step up 0-10%
12
100
0.8
0.67sec
0.6
0.4
Flow rate set value
Flow rate output value
0.2
0
0
1 Time [s]
2
0.67sec
0.3
D510 specification H operating
downstream pressure ≤ 13.3kPa(A)
0.2
Flow rate set value
Flow rate output value
0.1
0
3
0
CRITERION
D500
Standard
MFC
0.4
1 Time [s]
2
Air valve
CRITERION
D500
3
6
[PI Performance]
[G-LIFE Self-Diagnosis Function]
(Pressure Insensitive)
(Gas Law check of Integrated Flow restrictor Equation)
New module to simplify gas lines
Offers more intelligent gas panels
Some semiconductor tools, cluster tools, have multiple chambers each
with their own gas panel. Typically a single gas supply feeds these multiple
panels. As a result, the same gas line feeds multiple MFCs concurrently
leading to the potential for MFC cross talk. Cross talk is the interaction of
multiple MFCs being supplied pressure by a single regulator. The gas
delivery pressure from a gas regulator is affected by the flow demand from
the MFCs. When one MFC turns on or turns off the flow demand to the
single supply regulator changes causing the delivery pressure to all MFCs
to spike or droop. The flow measuring section in a conventional MFC is
affected by these supply pressure fluctuations, indicating false flows that
do not represent the actual flow out of the MFC and can cause system
faults in addition to flow errors.
The D500, with its measuring section placed downstream of its control
valve is not affected by supply pressure fluctuations. The D500 realizes
stable flow control by using a newly developed control algorithm that can
buffer pressure fluctuations. The D500 incorporates its own supply
pressure sensor which can be read locally on its cover and remotely via
digital communications. As a result, the costly stand-alone inlet pressure
transducers common on conventional gas sticks can be eliminated.
With conventional MFCs, it is difficult to recognize changes in the gas
flow rate resulting from the aging of the flow rate sensor. The D500
modules have a self diagnostic function named “G-LIFE” for Gas Law
check of the Integrated Flow Equation. G-Life is activated when, at the
end of a flow run, the MFC is given a 0% command and the upstream
Piezo valve closes. At this time the gas in the volume between the
closed valve seat and the flow restrictor bleeds out. The D500
eliminates the necessity for providing an external reference and is able
to perform G-LIFE by using in-line falling of the flow rate. Thereby, this
device is able to make a diagnosis of change from an initial status,
judge validity of process and predict troubles, thus making it possible to
reduce loss of wafer and downtime of equipment.
Diagnosis method for G-LIFE
(%)
100
upper limit of the set flow rate
(Start Point)
Flow
Piping diagram for pressure fluctuation test
P
lower limit of the set flow rate
(End Point)
D500
Pump
Time
*Automatic pressure regulator for pressure fluctuation
102
50
101
45
100
40
99
35
98
0
20
40
60
80
100
120
140
30
160
Time [sec]
Flow rate set value
Flow rate output value
Inlet pressure
Piping structure
Standard
MFC
Regulator Pressure meter
Air valve
Air valve
Filter
Simple
CRITERION
D500
7
Hand valve
Air valve
Air valve
Inlet pressure [psia]
Mass Flow [%F.S.]
Output diagram for pressure fluctuation test
Internal Pressure
*UR
P1(a)
ΔP
P1(b)
Time
Compare a volume caliculated in the step down response with a default
volume and check the flow rate.
[Multi gas, multi range, multi pressure]
Contributions to cost reductions such as
reduction in backup supplies
User-friendly software enables easy configuration changes
The D500 allows a customer to locally change gas type, full-scale flow
rate, and pressure specifications easily by using dedicated software.
Therefore, the D500 can be changed in specifications without being
removed from a gas panel and piping. It is possible to significantly reduce
the number of spare MFCs required to support uptime on an advanced
semiconductor process system.
The D500 offers multi-range, multi-gas, multi-pressure functionality
through its Configuration Software. This software makes it possible to
select MR/MG numbers simply by entering the type of gas being used
and the flow rate range. It also features handy N2 gas conversion for flow
rate measurements using N2 gas during receipt inspections.
COS
CH3F
He
Ar
Configuration Software
USB cable
Xe
PC
Printer
PC (Windows)
D500
Configuration Software
USB cable
H2
SO2
N2
Serial
converter
RS-485 communication cable
CO
CH4
C4F8
Conversion
adapter
O2
Cl2
Power supply
Suitable for multiple types of gas
Conversion adapter
RJ45MJ-ADP
Example:D514
Specification H 350∼750kPa (A)
MR・MG-03
The
conversion adaptor and
mini-jack cable shown are also required
for D514MG and D524MG.
Mini-jack cable
CA-EMJ
C4F8 300SCCM
N2 300SCCM
Signal cable
Freely change types of gas.
D500
Suitable for multiple ranges
To ensure that the software is used correctly, HORIBA STEC offers software
operation training. For information on these training, please contact your HORIBA
STEC representative.
Freely change the full scale.
Example:D514
Specification H 350∼750kPa (A)
MR・MG-04
N2 500SCCM
Suitable for multiple pressure
Name
Computer
Software
N2 700SCCM
Freely change the operating inlet pressure.
Example:D514
Specification H 350∼750kPa (A)
MR・MG-05
D514
Specification M 240∼450kPa (A)
MR・MG-05
Serial converter
Conversion adapter
USB cable
RS-485 communication cable
Printer
Notes
OS: Japanese or English, Windows® Vista / 7 / 8
Configuration software
HORIBA STEC offers seminars detailing the use of the software.
RS-485 ⇔ RS-232C
Serial converter ⇔ RJ-45 connecter
PC to Serial converter, PC to Printer
LAN cable for D500 communications
Please consult your HORIBA STEC representative for further information
The customer can supply all the system components listed above, if desired, except for the software, which must
be provided by HORIBA STEC. Please consult your HORIBA STEC representative for more detailed specifications.
N2 1000SCCM
Changing ranges of the full-scale flow rate
To increase the precision of flow rate calibration,
HORIBA STEC offers the following lineup of
MR/MG numbers.
N2 500SCCM
*Windows is a registered trademark of Microsoft Corporation.
List of full-scale flow rates for different gases
MR/MG
number
Gas type
N2
Ar
01
02
03
04
05
06
07
08
09
10
78-157
137-274
235-470
392-784
627-1254
1097-2195
1881-3762
3135-6270
4389-8778
5643-11286
62-124
109-218
187-373
311-622
497-995
870-1741
1492-2984
2487-4974
3482-6963
4476-8953
11
12
13
14
15
8025-16049
11269-22537
15964-31928
21595-43190
27216-50000
6549-13098
9197-18393
13029-26057
17769-35538
22451-44903
Flow rate may vary depend on spec.
O2
D51_MG Series
68-136
119-239
205-409
341-682
546-1092
955-1911
1638-3276
2730-5459
3822-7643
4914-9827
D52_MG Series
7145-14290
10033-20066
14214-28427
19545-39090
24810-50000
Cl2
C4F8
CHF3
92-184
161-322
276-551
459-919
735-1470
1234-2469
2205-4410
3675-7349
4850-9700
5732-11465
75-150
132-263
226-451
376-752
601-1203
937-1875
1804-3608
2886-5773
3666-7333
4237-8475
86-172
150-300
257-515
429-858
686-1373
1174-2348
2059-4118
3432-6863
4621-9242
5498-10996
7314-14628
10271-20542
13869-27737
17003-34005
20240-40480
4980-9959
6993-13985
9071-18142
11008-22016
12910-25820
7031-14063
9874-19748
13544-27088
16749-33498
20091-40181
Minimum flow rate — Maximum flow rate Unit : SCCM
8
Product specifications
Digital/Analog communication model
D512MG
Model
Specification
H
Full scale
Operating inlet pressure
Configurable
100SCCM - 10SLM
50SCCM - 5SLM
10SCCM - 1SLM
350 - 750 kPa(A), Configurable
240 - 450 kPa(A), Configurable
110 - 350 kPa(A), Configurable
Operating differential pressure
Operating downstream pressure
Control range
Flow rate accuracy at 25°C
Temperature error from 25°C
Offset / Span stability
Repeatability
L
M
Gas
≥ 350 kPa(D)
≥ 110 kPa(D)
≥ 240 kPa(D)
≤ 13.3 kPa(A)
≤ 53.3 kPa(A)
≤ 13.3 kPa(A)
≤ 53.3 kPa(A)
≤ 13.3 kPa(A)
0.2 - 100% F.S. for digital control
0.5 - 100% F.S. for digital control
0.5 - 100% F.S. for digital control
1 - 100% F.S. for digital control
≤ 53.3 kPa(A)
2 - 100% F.S.
5 - 100% F.S.
2 - 100% F.S. for analog control
2 - 100% F.S. for analog control
2 - 100% F.S. for analog control
2 - 100% F.S. for analog control
±1% S.P. (5 - 100% F.S.)
±1% S.P. (10 - 100% F.S.)
±1% S.P. (10 - 100% F.S.)
±1% S.P. (20 - 100% F.S.)
±1% S.P. (50 - 100% F.S.)
±0.05% F.S. (0.2 - 5% F.S.)
±0.1% F.S. (0.5 - 10% F.S.)
±0.1% F.S. (0.5 - 10% F.S.)
±0.2% F.S. (1 - 20% F.S.)
±0.5% F.S. (2 - 50% F.S.)
±1% F.S. (5 - 100% F.S.)
+ ±0.2%F.S. for analog control
+ ±0.2%F.S. for analog control
+ ±0.2%F.S. for analog control
+ ±0.2%F.S. for analog control
+ ±0.2%F.S. for analog control
±0.05% S.P. / °C (5 - 100% F.S.)
±0.05% S.P. / °C (10 - 100% F.S.)
±0.05% S.P. / °C (10 - 100% F.S.)
±0.05% S.P. / °C (20 - 100% F.S.)
±0.05% S.P. / °C (50 - 100% F.S.)
±0.0025% F.S. / °C (0.2 - 5% F.S.)
±0.005% F.S. / °C (0.5 - 10% F.S.)
±0.005% F.S. / °C (0.5 - 10% F.S.)
±0.01% F.S. / °C (1 - 20% F.S.)
±0.025% F.S. / °C (2 - 50% F.S.)
+ ±0.01%F.S. / °C for analog control
+ ±0.01%F.S. / °C for analog control
+ ±0.01%F.S. / °C for analog control + ±0.01%F.S. / °C for analog control
±0.5% F.S. / year
±0.05% F.S. / °C (5 - 100% F.S.)
+ ±0.01%F.S. / °C for analog control
+ ±0.01%F.S. / °C for analog control
±5% F.S. / year
±1% F.S. / year
±0.3% S.P. (5 - 100% F.S.)
±0.3% S.P. (10 - 100% F.S.)
±0.3% S.P. (10 - 100% F.S.)
±0.3% S.P. (20 - 100% F.S.)
±0.3% S.P. (50 ~ 100% F.S.)
±0.015% F.S. (0.2 - 5% F.S.)
±0.03% F.S. (0.5 - 10% F.S.)
±0.03% F.S. (0.5 - 10% F.S.)
±0.06% F.S. (1 - 20% F.S.)
±0.15% F.S. (2 ~ 50% F.S.)
Valve type
+ ±0.2%F.S. for analog control
±0.3% F.S. (5 ~ 100% F.S.)
Normally Close / Piezo Actuator
Settling time for step up *1
Valve sheet leak
≤ 0.8 sec
≤ 0.8 sec
≤ 1 sec
< 0.2 %F.S.
< 0.5 %F.S.
< 2 %F.S.
Proof pressure
1000 kPa(A)
Leak integrity
≤ 5×10-12 Pa·m3/s (He)
Wetted material
SUS-316L, Ni-Alloy
Standard fitting *2
1/4 inch VCR equivalent, 1.125 inch IGS
Operating temperature
15 - 45 °C
Storage temperature
0 - 80 °C
Installation orientation
Attitude Insensitive
±10 kPa ( 0 - 1000 kPa(A) ) for digital signal
Inlet pressure accuracy
±17 kPa ( 0 - 700 kPa(A) ) for analog signal
Temperature accuracy
±1 °C ( 15 - 45 °C )
Warming up operation
≥ 30 minutes
Control interface
Analog:D-Subminiature 9-pin, Digital:RS-485 F-Net Protocol
Power supply
+15 V ± 5 %, 200 mA as maximum, -15 V ± 5 %, 150 mA as maximum
*1 This is settling time of flow rate output for calibration gas: N2. This is in accordance with E17-1011 of the SEMI standards.
*2 IGS: Integrated Gas System
EtherCAT® communication model
DeviceNet™ communication model
D514MG *3 D517MG *4
Model
Specification
H
Full Scale
Operating inlet pressure
Configurable
100SCCM - 10SLM
50SCCM - 5SLM
10SCCM - 1SLM
350 - 750 kPa(A), Configurable
240 - 450 kPa(A), Configurable
110 ~ 350 kPa(A), Configurable
Operating differential pressure
Operating downstream pressure
Control range
Flow rate accuracy at 25°C
Temperature error from 25°C
Offset / Span stability
Repeatability
≥ 350 kPa(D)
Valve sheet leak
≤ 53.3 kPa(A)
≤ 13.3 kPa(A)
≤ 53.3 kPa(A)
≤ 13.3 kPa(A)
≤ 53.3 kPa(A)
0.2 - 100% F.S.
0.5 - 100% F.S.
0.5 - 100% F.S.
1 - 100% F.S.
2 - 100% F.S.
5 - 100% F.S.
±1% S.P. (5 - 100% F.S.)
±1% S.P. (10 - 100% F.S.)
±1% S.P. (10 - 100% F.S.)
±1% S.P. (20 - 100% F.S.)
±1% S.P. (50 - 100% F.S.)
±0.05% F.S. (0.2 - 5% F.S.)
±0.1% F.S. (0.5 - 10% F.S.)
±0.1% F.S. (0.5 - 10% F.S.)
±0.2% F.S. (1 - 20% F.S.)
±0.5% F.S. (2 - 50% F.S.)
±0.05% S.P. / °C (5 - 100% F.S.)
±0.05% S.P. / °C (10 - 100% F.S.)
±0.05% S.P. / °C (10 - 100% F.S.)
±0.05% S.P. / °C (20 - 100% F.S.)
±0.05% S.P. / °C (50 - 100% F.S.)
±0.0025% F.S. / °C (0.2 - 5% F.S.)
±0.005% F.S. / °C (0.5 - 10% F.S.)
±0.005% F.S. / °C (0.5 - 10% F.S.)
±0.01% F.S. / °C (1 - 20% F.S.)
±0.025% F.S. / °C (2 - 50% F.S.)
±0.5% F.S. / year
±0.3% S.P. (10 - 100% F.S.)
±0.3% S.P. (10 - 100% F.S.)
±0.3% S.P. (20 - 100% F.S.)
±0.3% S.P. (50 - 100% F.S.)
±0.015% F.S. (0.2 - 5% F.S.)
±0.03% F.S. (0.5 - 10% F.S.)
±0.03% F.S. (0.5 - 10% F.S.)
±0.06% F.S. (1 - 20% F.S.)
±0.15% F.S. (2 - 50% F.S.)
≤ 0.8 sec
≤ 0.8 sec
≤ 1 sec
< 0.5 %F.S.
< 2 %F.S.
1000 kPa(A)
SUS-316L, Ni-Alloy
1/4 inch VCR equivalent, 1.125 inch IGS
Operating temperature
15 - 45 °C
Storage temperature
0 - 80 °C
Installation orientation
Attitude Insensitive
Inlet pressure accuracy
±10 kPa ( 0 - 1000 kPa(A) )
Temperature accuracy
±1 °C ( 15 - 45 °C )
Warming up operation
Power supply
±0.3% F.S. (5 - 100% F.S.)
< 0.2 %F.S.
≤ 5×10-12 Pa·m3/s (He)
Control interface
±0.05% F.S. / °C (5 - 100% F.S.)
Normally Close / Piezo Actuator
Leak integrity
Standard fitting *2
±1% F.S. (5 - 100% F.S.)
±5% F.S. / year
±1% F.S. / year
±0.3% S.P. (5 - 100% F.S.)
Proof pressure
Wetted material
≥ 30 minutes
DeviceNetTM Protocol *3
EtherCAT® Protocol *4
DC24V 5.7VA, Applicable for ODVA standard *3 24VDC±4V 6.2VA *4
*1 This is settling time of flow rate output for calibration gas: N2. This is in accordance with E17-1011 of the SEMI standards.
*2 IGS: Integrated Gas System *3 DeviceNet™ communication model *4 EtherCAT® communication model
9
≥ 110 kPa(D)
≥ 240 kPa(D)
13.3 ≤ 13.3 kPa(A)
Valve type
Settling time for step up *1
L
M
Gas
Digital/Analog communication model
D522MG
H
Model
Specification
L
M
Gas
Configurable
Full scale
10 - 50SLM
5 - 30SLM
1 - 7.5SLM
350 - 750 kPa(A), Configurable
240 - 450 kPa(A), Configurable
110 - 350 kPa(A), Configurable
≥ 350 kPa(D)
≥ 240 kPa(D)
≥ 110 kPa(D)
≤ 53.3 kPa(A)
≤ 53.3 kPa(A)
0.5 - 100% F.S. for digital control
1 - 100% F.S. for digital control
2 - 100% F.S. for analog control
2 - 100% F.S. for analog control
≤ 53.3 kPa(A)
≤ 13.3 kPa(A)
±1% S.P. (10 - 100% F.S.)
±1% S.P. (20 - 100% F.S.)
±1% S.P. (50 - 100% F.S.)
±0.2% F.S. (1 - 20% F.S.)
±0.5% F.S. (5 - 50% F.S.)
+ ±0.2%F.S. for analog control
+ ±0.2%F.S. for analog control
+ ±0.2%F.S. for analog control
±1% F.S. (5 - 100% F.S.)
±0.05% S.P. / °C (10 - 100% F.S.)
±0.05% S.P. / °C (20 - 100% F.S.)
±0.05% S.P. / °C (50 - 100% F.S.)
±0.005% F.S. / °C (0.5 - 10% F.S.)
±0.01% F.S. / °C (1 - 20% F.S.)
±0.025% F.S. / °C (5 - 50% F.S.)
+ ±0.01%F.S. / °C for analog control
+ ±0.01%F.S. / °C for analog control
+ ±0.01%F.S. / °C for analog control
±1% F.S. / year
±0.3% S.P. (20 - 100% F.S.)
±0.3% S.P. (50 - 100% F.S.)
±0.06% F.S. (1 - 20% F.S.)
±0.15% F.S. (5 - 50% F.S.)
±0.03% F.S. (0.5 - 10% F.S.)
Flow rate accuracy at 25°C *1
+ ±0.2%F.S. for analog control
±0.05% F.S. / °C (5 - 100% F.S.)
Temperature error from 25°C
+ ±0.01%F.S. / °C for analog control
Offset / Span stability
±5% F.S. / year
±0.5% F.S. / year
±0.3% S.P. (10 - 100% F.S.)
Operating downstream pressure
Control range
5 - 100% F.S.
±0.1% F.S. (0.5 - 10% F.S.)
Operating inlet pressure
Operating differential pressure
±0.3% F.S. (5 - 100% F.S.)
Repeatability *1
Valve type
Normally Close / Piezo Actuator
≤ 0.8 sec
≤ 0.8 sec
≤ 1 sec
< 0.5 %F.S.
< 1 %F.S.
< 5 %F.S.
Settling time for step up *2
Valve sheet leak
1000 kPa(A)
Proof pressure
≤ 5×10-12 Pa·m3/s (He)
Leak integrity
Wetted material
SUS-316L, Ni-Alloy
Standard fitting *3
1/4 inch VCR equivalent, 1.125 inch IGS
15 - 45 °C
Operating temperature
0 - 80 °C
Storage temperature
Installation orientation
Attitude Insensitive
±10 kPa ( 0 - 1000 kPa(A) ) for digital signal
Inlet pressure accuracy
±17 kPa ( 0 - 700 kPa(A) ) for analog signal
±1 °C ( 15 - 45 °C )
Temperature accuracy
≥ 30 minutes
Warming up operation
Control interface
Analog:D-Subminiature 9-pin, Digital:RS-485 F-Net Protocol
Power supply
+15 V ± 5 %, 200 mA as maximum, -15 V ± 5 %, 150 mA as maximum
*1 Flow rate accuracy and repeatability of MR/MG numbers of 14 and 15 guarantee the calibration gas: N . *2 This is settling time of flow rate output for calibration gas: N . This is in accordance with E17-1011 of the SEMI standards.
*3 IGS: Integrated Gas System
2
EtherCAT® communication model
DeviceNet™ communication model
4
D524MG *
H
2
D527MG *5
Model
M
Specification
L
Gas
Configurable
Full scale
10 - 50SLM
5 - 30SLM
1 - 7.5SLM
350 - 750 kPa(A), Configurable
240 - 450 kPa(A), Configurable
110 - 350 kPa(A), Configurable
≥ 350 kPa(D)
≥ 240 kPa(D)
≥ 110 kPa(D)
≤ 53.3 kPa(A)
≤ 53.3 kPa(A)
0.5 - 100% F.S.
1 - 100% F.S.
≤ 53.3 kPa(A)
≤ 13.3 kPa(A)
5 - 100% F.S.
±1% S.P. (10 - 100% F.S.)
±1% S.P. (20 - 100% F.S.)
±1% S.P. (50 - 100% F.S.)
±0.1% F.S. (0.5 - 10% F.S.)
±0.2% F.S. (1 - 20% F.S.)
±0.5% F.S. (5 - 50% F.S.)
±0.05% S.P. / °C (10 - 100% F.S.)
±0.05% S.P. / °C (20 - 100% F.S.)
±0.05% S.P. / °C (50 - 100% F.S.)
±0.005% F.S. / °C (0.5 - 10% F.S.)
±0.01% F.S. / °C (1 - 20% F.S.)
±0.025% F.S. / °C (5 - 50% F.S.)
±1% F.S. / year
±0.3% S.P. (20 - 100% F.S.)
±0.3% S.P. (50 - 100% F.S.)
±0.03% F.S. (0.5 - 10% F.S.)
±0.06% F.S. (1 - 20% F.S.)
±0.15% F.S. (5 - 50% F.S.)
Operating downstream pressure
Control range
±1% F.S. (5 - 100% F.S.)
Flow rate accuracy at 25°C *1
±0.05% F.S. / °C (5 - 100% F.S.)
Temperature error from 25°C
±5% F.S. / year
±0.5% F.S. / year
±0.3% S.P. (10 - 100% F.S.)
Operating inlet pressure
Operating differential pressure
±0.3% F.S. (5 - 100% F.S.)
Offset / Span stability
Repeatability *1
Valve type
Normally Close / Piezo Actuator
≤ 0.8 sec
≤ 0.8 sec
≤ 1 sec
< 0.5 %F.S.
< 1 %F.S.
< 5 %F.S.
Settling time for step up *2
Valve sheet leak
1000 kPa(A)
Proof pressure
≤ 5×10-12 Pa·m3/s (He)
Leak integrity
Wetted material
SUS-316L, Ni-Alloy
1/4 inch VCR equivalent, 1.125 inch IGS
Standard fitting *3
15 - 45 °C
Operating temperature
0 - 80 °C
Storage temperature
Attitude Insensitive
Installation orientation
±10 kPa ( 0 - 1000 kPa(A) )
Inlet pressure accuracy
±1 °C ( 15 - 45 °C )
Temperature accuracy
≥ 30 minutes
Warming up operation
DeviceNetTM Protocol *4
EtherCAT® Protocol *5
DC24V 5.7VA, Applicable for ODVA standard *4
24VDC±4V 6.2VA *5
Control interface
Power supply
*1 Flow rate accuracy and repeatability of MR/MG numbers of 14 and 15 guarantee the calibration gas: N2. *2 This is settling time of flow rate output for calibration gas: N2. This is in accordance with E17-1011 of the SEMI standards.
*3 IGS: Integrated Gas System *4 DeviceNet™ communication model *5 EtherCAT® communication model
10
Digital/ Analog communication models
B
G
H
DeviceNet™ communication models
F
B
A
A
Symbol
I
C
D
Name
C
E
E
Explanation
Symbol
A
Analog connector
Analog communication and power supply
I
D
G
F
Name
Explanation
A
DeviceNetTM connector
DeviceNetTM transmission and shield type micro connector
Communication port for services
B
Digital communication Connector
RS-485 transmission Daisy chain available
B
DIAGNOSTIC PORT
C
ZERO adjust button
Button for Zero adjust
C
MFC communication ID setting switch (MSD)
D
Display switching button
Button for display selecting
D
MFC communication ID setting switch (LSD)
E
LED indicator (Analog/Digital communication)
Analog transmission:Green light on/Digital transmission:Green light flashing
E
Baud rate setting switch
Set baud rate
F
LED indicator (Status)
Power voltage error:Red light flashing
F
Zero adjust button
Button for Zero adjust
G
MFC communication ID setting switch (MSD)
G
Display switching button
Button for display selecting
H
MFC communication ID setting switch (LSD)
H
LED indicator (MOD)
Status for node
I
Baud rate setting switch
I
LED indicator (NET)
Status for network
Set from 01 to 99 Except 98.
Set baud rate
H
Set from 00 to 63
DIAGNOSTIC PORT is on the side of the D500.
EtherCAT® communication models
Symbol
A
B
C
D
E
F
G
Name
A
Power connector
B
MFC indicator LED
Explanation
Drive power supply connector
Indicates MFC state.
Normal: Turns on in green
Abnormal: Turns on in red or flashes in red/green depending on abnormal cause
Settable in a range from 0×0000 to 0×0FFF
I
H
* If this ID is used for EtherCAT® communication, it is required to perform
C
EtherCAT® ID selector
D
E
F
G
H
Zero adjust button
Button for Zero adjust
DIAGNOSTIC PORT
Communication port for services
EtherCAT® IN port
For EtherCAT® communication Connection on IN side
a predetermined initial setting.
If you have any question about how to set up, please contact us.
EtherCAT OUT port
For EtherCAT® communication Connection on OUT side
Display switching button
Button for display selecting
®
ECAT ERR: Indicates error state of EtherCAT® communication
I
®
EtherCAT indicator LED
POWER: Turn on in green when power is supplied
LA: Indicates link/active state of each port
RUN: Indicates state of EtherCAT® state machine
Multi-display
The D500 is equipped with a multiple display function that enables easy in-situ verification of process conditions
and device setup. This onboard display contributes to simplified system maintenance and process tool uptime.
11
Minimum operating inlet pressure
Inlet pressure
MFC communication ID
Outlet pressure
Serial number
Temperature
Model name and specification
Flow rate set
Self-diagnose result
Flow rate out
Selecting a model
D51 4 MG - C S , 14C3 ,
<Example>
1
Step
2
3 4
, - M ,
5
N2
6
1 Model
●
, 100SCCM - 1
7
8
,
9
1
,
10
5
, 002 , 007
11
12
13
11 DeviceNet™ counts full scale
●
5 Fitting
●
D51
Specification H: 10SCCM-10SLM
4CRL
1/4 inch VCR equivalent
1
100%
D52
Specification H: 10-50SLM
14C3
1.125 inch C-Seal, i.d. 1/4 inch
3
133%
14W3
1.125 inch W-Seal, i.d. 1/4 inch
5
133.33%
2 Protocol
●
6 Operating inlet pressure
●
12 DeviceNet™ input assembly
●
2
Analog/Digital communication
4
DeviceNet™ communication
H
350~750kPa(A)
001
001
7
EtherCAT® communication
M
240~450kPa(A)
002
002
L
110~350kPa(A)
003
003
3 Valve
●
C
7 Gas type
●
Normally Closed
With Digital analog “T”
With EtherCAT® “S”
TM
With DeviceNet
13 DeviceNet™ output assembly
●
8 Full scale flow rate
●
4 Connector position
●
9 DeviceNet™ MOD LED
●
only, select “S” or “T”
007
007
008
008
models except for DeviceNet™ model
Blank
T
Top Positioned Connector
1
Solid
S
Side Positioned Connector
2
Flash
10 DeviceNet™ minus flow display
●
0
OFF
1
ON
External dimensions
1.125 inch IGS
D5□2
D5□4
11.6
25.4
25.4
25.4
11.6
28.6±0.3
105±0.5
105±0.5
28.6±0.3
105±0.5
4-ø4.4
21.8
10.9
4-ø4.4
10.9
21.8
10.9
4-ø4.4
92±0.3
81.8
107.4±1
126±1
11.6
21.8
D5□7
11
81.8
113±1
130±1
126±1
11.5
126±1
81.8
6.5
92±0.3
6.5
92±0.3
6.5
1/4 inch VCR equivalent
D5□4
21.1
28.6±0.3
21.1
124±1
ø60±0.2
2-M4 5depth
2-M4 5depth
20°
20°
20°
12.7
12.7
ø60±0.2
40.9±0.2
107.4±1
126±1
130±1
113±1
21.1
124±1
2-M4 5depth
81.8
11
28.6±0.3
124±1
ø60±0.2
D5□7
81.8
12.7
126±1
11.5
126±1
D5□2
81.8
40.9±0.2
40.9±0.2
12
Connection examples
Digital communication
PC
RS485 Digital communication connector
Communication converter
Power Supply
(PE Series)
Signal name
Signal ground [D. COM]
Signal ground [D. COM]
N.C.
Serial output/input (-)
Serial output/input (+)
N.C.
N.C.
N.C.
Pin No.
1
2
3
4
5
6
7
8
SC-EBR
cable
Daisy chain connection
Connector used: RJ-45
Analog communication
Using an external power source and control signal
Analog connector
Using PE-S7 control unit
SC-EAH series signal cable
Flow rate output
Flow rate setting: 0 to 5 VDC
Flow rate alarm
(minimum/ maximum)
Flow rate output signal:
o to 5 VDC
Valve voltage monitor
(option)
Program control
Valve control signal:
Fully open/ Fully closed
PE-S7
External control model
·Flow rate setting
·Valve fully open/ fully
closed signal, etc.
Power supply: ±15 VDC
Signal name
Valve open/closed input
Flow rate output signal: 0 to 5 V DC
Power source: +15V DC
Power source: Common*1
Power source: -15V DC
Flow rate setting signal: 0 to 5 V DC
Signal: Common*1
Signal: Common*1
inlet pressure
Pin No.
1
2
3
4
5
6
7
8
9
SC-EDH series signal cable
Connector used: D-subminiature 9-contact-pin connector
*1 The pin No.4 Common power source and pin No.7 signal are not
connected within the mass flow controller. The pin No.7 and No.8
Common signals are connected within the mass flow controller.
DeviceNet™ communication
DeviceNet™ communication connectors
PLC
PLC
bus line
DeviceNet™ communication
Master
+24V
Power Supply
4
3
5
1
2
Distribution
Pin No.
Signal name
1
Drain
2
V+
3
V-
4
CAN_H
5
CAN_L
Advantaged
DeviceNet™ cable
·Reduces costs, since AD/DA converters and I/O boards are
not required.
·The user simply connects the devices through network
cables and makes address settings. This reduces both the
number of processes required and the time involved.
·No special accessories are necessary for the devices. Users
can simply choose DeviceNet™ conforming products, which
reduces costs.
DeviceNet™ is an open and global field network
that was developed by the ODVA (Open
DeviceNet™ Vendor Association, Inc.) as a
unique means for supporting standardization
worldwide. The ODVA offers EDS (Electronic
Data Sheet) specifications, which are designed
to allow shared operability and programming in
a multi-vendor environment. The ODVA also
carries out conformance testing. Devices that
have passed the ODVA’s conformance testing
display the logo.
EtherCAT® communication
Power connector
Power Supply
EtherCAT®
master
2
4
1
5
Signal name
V+
N.C.
Power Common
N.C.
N.C.
Connector used: M8 5pin male connector
* Use connectors that conform to the EtherCAT®
Technology Group standard: ETG5003.2020.
+24V
13
3
Pin No.
1
2
3
4
5
What is EtherCAT® communication?
Features
Open field bus system based on Ethernet. ETG (EtherCAT ® Technology Group) has been established
as an international forum to promote support and diffusion of EtherCAT ® , and maintain mutual
compatibility. ETG specifies functional requirements, conformance tests and its certification
procedure, and permits only devices which satisfy conditions specified by ETG to use the EtherCAT
logo.
·High bus efficiency and high-speed data scan is realized by
simultaneously communicating with many devices.
·The master can use the standard Ethernet interface when
connecting to devices, and does not require expensive dedicated
hardware.
To respond to product needs in
markets related to the high-tech
i n d u s t r y, H O R I B A Te c h n o l o g y
Center was established in Silicon
Valley. Its aim is to promote joint
development with partners in the US
and deliver optimum solutions.
The Fukuchiyama Technology Center is
permanently equipped with high accuracy
gas flow measurement equipment and
experimental equipment for development
of products, so as to build up functions of
basic research on flow rate control devices
for high-tech materials.
The HORIBA Aso Plant manufactures
semiconductor-related products and
products for the medical industry, in
a d d i t i o n t o fl a g s h i p m a s s fl o w
c o n t ro l l e r s , a n d e n g a g e s i n m a s s
production as a key manufacturer for the
HORIBA group companies.
Development and manufacture of HORIBA, Ltd.
semiconductor sensors are integrated with
HORIBA STEC, Co., Ltd. fluid control technologies
to realize speedy development, downsizing, and
stable quality of products.
14
D5-DE
Printed in Japan 1612SK13
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