Instruction manual
Instruction manual
MASS-VIEW® series
Doc. nr.: 9.17.051A Date: 01-09-2008
ATTENTION
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.
9.17.051
page 1
BRONKHORST HIGH-TECH B.V.
SCOPE OF THIS MANUAL
This manual covers the general part of the MASS-VIEW® series mass flow instruments
for gases. It covers the general instructions needed for the instruments.
More detailed information can be found in documents listed below.
MASS-VIEW® instruments have modular instruction manuals consisting of:
-
Instruction manual MASS-VIEW® series
Short form instruction manual MASS-VIEW® series
Operation instructions digital instruments
(document nr. 9.17.051)
(document nr. 9.17.054)
(document nr. 9.17.023)
Fieldbus/interface description:
Manual :
RS232 Interface with FLOW-BUS
protocol
Modbus interface
9.17.027
Hook-up
diagram :
9.16.044
9.17.035
9.16.066
-
FlowPlot Manual
(document nr. 9.17.030)
-
Hook-up diagram MASS-VIEW® series
(document nr. 9.16.085)
-
Dimensional drawing MASS-VIEW® series
(document nr. 7.05.697)
These documents can be downloaded from our website: www.massflow-online.com
BRONKHORST HIGH-TECH B.V.
Please check www.massflow-online.com for the latest
version of this manual. The information in this manual
has been reviewed and is believed to be entirely
reliable. No responsibility, however, is assumed for
inaccuracies. The material in this manual is for
information purposes only, and is subject to change
without notice.
Bronkhorst High-Tech B.V.
September 2008
Warranty
The products of Bronkhorst High-Tech B.V. are
warranted against defects in material and
workmanship for a period of three years from the date
of shipment provided they are used in accordance
with the ordering specifications and not subjected to
abuse or physical damage.
Products that do not operate properly during this
period may be repaired or replaced at no charge.
Repairs are normally warranted for one year or the
balance of the original warranty, whichever is longer.
The warranty includes all initial and latent defects,
random failures, and indeterminable internal causes.
It excludes failures and damage caused by the
customer, such as contamination, improper electrical
hook-up, dropping etc. Re-conditioning of products
primarily returned for warranty service that is partly or
wholly judged non-warranty may be charged for.
Mass Flow ONLINE B.V. prepays outgoing freight
charges when any part of the service is performed
under warranty, unless otherwise agreed upon
beforehand, however, if the product has been
returned collect to Mass Flow ONLINE B.V., these
costs are added to the repair invoice. Import and/or
export charges, foreign shipping methods/carriers are
paid for by the customer.
BRONKHORST HIGH-TECH B.V.
Short-Form Operation Instruction
CAUTION: Before installing the MASS-VIEW® it is
important to be sure whether you received the right
model using the packing list and the attached label
on the instrument.
CAUTION: Be sure the piping system is clean. For
absolute cleanliness always install filters to assure a
moisture and oil-free gas stream.
Install the instrument in the line and tighten the
fittings according to the instructions of the supplier of
the fittings.
Be sure the system has no leaks before applying gas
pressure.
CAUTION: Electrical connections must be made with
a standard cable or according to the hook-up
diagram in this manual.
Apply power to the instrument and allow approx. 30
minutes for warm-up and stabilization. This may be
done with or without gas pressure, applied to the
system.
When the instrument is powered up the first time, a
setup menu appears where the pre-installed gas can
be selected and which flow range is to be used.
Navigate to the gas name using the 4-way button (up
and down direction) and press in the centre to make
a selection, then select the range using the up and
down direction and press also in the centre to make
the selection. After selecting the gas and the range,
the communication type can be selected.
After entering the default password (which is ‘abc’) in
the security menu, all menus can be enabled or
disabled. Also a new password can be entered and
saved.
The settings will be stored when “save” is selected
and the button is pressed.
Your instrument is now ready for operation.
BRONKHORST HIGH-TECH B.V.
TABLE OF CONTENTS
1.
Introduction
1.1
1.2
1.3
1.4
1.5
1.6
General description .................................................................................................................... page
Housing ..................................................................................................................................... page
Sensor principle.......................................................................................................................... page
Needle valve principle ............................................................................................................... page
Electronics, display and 4-way button ........................................................................................ page
Software tools............................................................................................................................. page
2.
Installation
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
2.9
2.10
2.11
2.12
2.13
Receipt of equipment ................................................................................................................ page
Return shipment ........................................................................................................................ page
Mounting .................................................................................................................................... page
In-line filter ................................................................................................................................. page
Fluid connections ...................................................................................................................... page
Piping ......................................................................................................................................... page
Electrical connections ................................................................................................................ page
Test pressure ............................................................................................................................ page
Supply pressure ......................................................................................................................... page
System purging ......................................................................................................................... page
Seals ......................................................................................................................................... page
Equipment storage .................................................................................................................... page
Electromagnetic compatibility .................................................................................................... page
3.
Operation
3.1
3.2
3.3
3.4
3.4.1
3.4.2
3.4.3
3.4.4
3.4.5
3.4.6
3.4.7
3.4.8
3.5
3.6
General ...................................................................................................................................... page 6
Power and warm-up .................................................................................................................. page 6
Setting up the instrument .......................................................................................................... page 6
User interface, menu structure and instrument functions ......................................................... page 7
The readout screen .................................................................................................................... page 7
Changing the readout screen ..................................................................................................... page 7
The menu structure .................................................................................................................... page 8
Sleep mode ................................................................................................................................ page 9
Counter....................................................................................................................................... page 9
Alarms ........................................................................................................................................ page 9
Alarm outputs ............................................................................................................................. page 10
User tag...................................................................................................................................... page 10
Other gases ............................................................................................................................... page 10
Zero procedure........................................................................................................................... page 10
4.
Maintenance
4.1
4.2
General ...................................................................................................................................... page 11
Needle valves ............................................................................................................................ page 11
5.
Troubleshooting
5.1
5.2
General ...................................................................................................................................... page 12
Troubleshooting summary ......................................................................................................... page 12
1
1
1
2
2
2
3
3
3
3
3
4
4
5
5
5
5
5
5
BRONKHORST HIGH-TECH B.V.
1 Introduction
1.1 General description
®
The MASS-VIEW series operate on the principle of direct thermal mass flow measurement (no by-pass). An
advantage of using this type of sensor is that the instruments measure direct mass flow, virtually independent
of pressure and temperature changes, and have a low pressure drop. Other advantages compared to
conventional meters are the high accuracy and the large rangeability. The MASS-VIEW® series are supplied
with totaliser and alarm functions. Flow control can be achieved by an optional built-in needle valve. A bright
graphical OLED display, clearly visible over any angle, allows reading of actual flow (value and bar graph),
total flow and fluid type. The display features easy navigation through a user-friendly menu, using a 4-way
button with centre push. Furthermore the instruments have 2 potential free alarm contacts grounded on one
side.
1.2 Housing
®
The MASS-VIEW meter has a straight tube with a mass flow sensor.
The fluid connections have a distance of 114 mm and an inner thread of
G1/4” (1/4” BSPP cavity). The connections reside on the back of the
instrument. The bottom fluid connection is the inlet; the upper connection
is the outlet. For electrical connection and power supply, the instrument
has a RJ-45 modular connector on top of the instrument. These
instruments are suited for indoor (dry) applications, like laboratories and
in well protected (OEM) housings. The front part is made of ABS, the
back part of Aluminium.
Some models have a manually operated needle valve on the front side.
1.3 Sensor principle
The MASS-VIEW® operates on the principle of direct thermal mass flow measurement. The
thru-flow design sensor consists of a heater resistor and a temperature sensing resistor.
Both resistors are made of temperature sensitive resistive material that is covered with a
stainless steel tube. The necessary heating power to keep the temperature difference
between the heater resistor and the sensing resistor at a constant level depends on the
mass flow. A different and unique heater current is produced for each value of the flow. The
measurement principle described is called Constant Temperature Anemometry (CTA).
The transfer function between mass flow and output signal can be described by the
equation:
Vsignal = K ⋅ Φ m
Vsignal
K
Φm
= output signal
= constant factor (includes λ – heat conductivity, Cp – specific heat, µ – dynamic viscosity and ρ – density of the gas)
= mass flow
BRONKHORST HIGH-TECH B.V.
1.4 Needle valve principle
The needle valve has an orifice with a long, tapered conical seat. A
needle-shaped plunger, on the end of a screw, exactly fits this seat.
As the screw is turned and the plunger retracted, flow between the
seat and the plunger increases. Since it takes many turns of the finethreaded screw to retract the plunger, precise regulation of the flow
rate is possible.
1.5 Electronics, display and 4-way button
The MASS-VIEW® has a bright graphical OLED display, clearly visible
over any angle, which allows reading of actual flow (value and bar
graph), total flow and gas type.
The three display options can be changed using the 4-way button This
button is a navigation joystick which has UP/DOWN/LEFT/RIGHT keys
and a centre push (ENTER) key.
1.6 Software tools
The MASS-VIEW® series have a digital interface which can be connected using RS-232 (or RS-485) to a
computer. For an MS-Windows based PC, we have several freeware tools available for download on our
website.
-FlowDDE, the FLOW-BUS DDE (Dynamic Data Exchange) Server is gathering data from the modules
connected to the FLOW-BUS, and at the same time transferring data to these modules. DDE provides the
user a basic level of inter process communication between MS-Windows applications and is therefore, the
most flexible way to transfer data. By using DDE commands, sent by software, to the DDE Server, data can
be sent or requested from the FLOW-BUS. FlowDDE communicates very easily with Microsoft Excel and
other applications.
-FlowPlot (needs FlowDDE). Flow-Plot is a DDE-client program for service-purposes on Bronkhorst digital
instruments or readout-units. It gives good insight into the dynamic behaviour of digital instruments.
-FlowView (needs FlowDDE). FlowView is a DDE-client program to operate Bronkhorst digital
instruments. Please check our website for the latest updates on our freeware tools.
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BRONKHORST HIGH-TECH B.V.
2 Installation
2.1 Receipt of equipments
Check the outside packing box for damage incurred during shipment. Should the packing box be damaged,
then the local carrier must be notified at once regarding his liability, if so required. At the same time a report
should be submitted to your supplier. Remove the envelope containing the packing list; carefully remove the
equipment from the packing box. Inspect the contents for damaged or missing parts.
2.2 Return shipment
When returning material, arrange a return material authorisation at www.massflow-online.com and
completely fill in the RMA request.
It is absolutely essential that you notify your supplier if toxic or dangerous fluids have been in
contact with the instrument!
This is to enable us to take sufficient precautionary measures to safeguard our staff.
Take proper care of packing, if possible use the original packing box; seal instrument in plastic etc.
Contaminated instruments must be dispatched with a fully completed 'declaration on contamination
form', found in the RMA-form on the website. Contaminated instruments without this declaration will
not be accepted.
Note:
If the instruments have been used with toxic or dangerous fluids the customer should pre-clean the
instrument.
2.3 Mounting
The mounting position of the MASS-VIEW® is vertical, although it is possible to turn the device 180° and
change the display setting. Avoid installation in close proximity of mechanic vibration and/or heat sources.
2.4 In-line filter
Although the gases to be measured should be absolutely free of dirt, oil, moisture and other particles, it is
recommended to install an in-line filter upstream of the flow meter / controller, and if backflow can occur, a
downstream filter is recommended too. Be aware of the pressure drop caused by the filter.
2.5 Fluid connections
®
The MASS-VIEW can be equipped with (compression) fittings. Tighten the nut finger tight; while holding the
instrument, then tighten the nut 1 turn. If applicable follow the guidelines of the manufacturer of the fittings.
While tightening fittings, do not apply excessive force, in order to avoid damaging in/output thread or other
sensitive parts of your instruments.
Please be aware when using Oxygen (O2) that the fittings mounted to the body should be absolutely oxygen
clean.
* Note: Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or
other dangerous fluids are used.
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2.6 Piping
BE SURE THAT PIPING IS ABSOLUTELY CLEAN!
CAUTION - DO NOT install small diameter piping on high flow rates, because the inlet jet flow will affect the
accuracy.
CAUTION - DO NOT mount abrupt angles directly to the inlet or outlet, especially for high flow rates.
CAUTION - DO NOT mount pressure regulators directly to the inlet of gas flow meters/controllers, but allow
some distance of piping (at least 25 D). Special attention should be taken at high flow rates with flow
controllers.
2.7 Electrical connections
We recommend using our standard cables. These cables have the right connectors and if loose ends are
used, these are coloured and marked to prevent improper connection. All cabling options can be purchased
online at massflow-online.com.
Please study carefully the hook-up diagram which is shown here
Depending on the mode of the digital output (which can be
changed through the user interface) the function of Pin 1 and 6
are:
Pin 1 = RS232 TXD or RS485B (MODBUS D0)
Pin 6 = RS232 RXD or RS485A (MODBUS D1)
Available cabling options on massflow-online.com
Pin 2 = analog output
Pin 3 = alarm contact 1
Pin 5 = alarm contact 2
Pin 4 = 0V shared alarm contact for alarm 1/2
To use both the power supply and an analog or digital
connection, you should use the optional shielded RJ-45 Yadapter.
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BRONKHORST HIGH-TECH B.V.
2.8 Test pressure
Each instrument is pressure tested at 21 bar (a)
The tested pressure is stated on the instrument sticker. The absolute maximum line pressure is 10 bar (g).
Check test pressure before installing in the line. If the sticker is not available or the test pressure is incorrect,
the instrument should not be mounted in the process line. Each instrument is helium leak tested to at least
1x10E-9 mbar l/s Helium.
2.9 Supply pressure
Do not apply pressure until electrical connections are made. When applying pressure to the system, take
care to avoid pressure shocks in the system and increase pressure gradually.
2.10 System purging
If explosive gases are to be used, purge the process with inert dry gas like Nitrogen, Argon etc. for at least 30
minutes. Complete purging is also required to remove such gases from the system before exposing the
system to air.
2.11 Seals
The seals fitted are compatible with the published list of gases, at the stated conditions.
2.12 Equipment storage
The equipment should be stored in its original packing in a cupboard, warehouse or similar. Care should be
taken to not subject the equipment to excessive temperatures or humidity.
2.13 Electromagnetic compatibility
The MASS-VIEW® series carries the CE-mark.
Therefore it has to comply with the EMC requirements as are valid for these instruments.
However compliance with the EMC requirements is not possible without the use of proper cables and
connector assemblies. Do not use unshielded wire terminals.
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BRONKHORST HIGH-TECH B.V.
3 Operation
3.1 General
Bronkhorst High-Tech instruments are designed in such a way that they will meet user process requirements
in the best possible way. Flow meters and controllers are powered from a dc power source with a minimal
ripple. When providing your own power supply be sure that voltage and current rating are according to the
specifications of the instrument and furthermore that the source is capable of delivering enough energy to the
instrument. Cable wire diameters should be sufficient to carry the supply current and voltage losses must be
kept as low as possible.
3.2 Power and warm-up
Before switching on the power, be sure all connections have been made according to the hook-up diagram in
2.7. Check gas connections and make sure there is no leakage. If needed purge the system with a proper
gas. Turn on power and allow at least 30 minutes for warming up and stabilizing. During the warm-up period,
gas pressure may either be on or off.
3.3 Setting up the instrument
After powering on, the first time, the instrument will ask which gas is used and which flow range is to be used
(see picture below).
Navigate to the fluidname using the 4-way button (up and down direction) and press in the centre to make a
selection, then select the range using the up and down direction and press also in the centre to make the
selection.
After selecting the fluid and the range, the communication type can be selected .
After entering the default password (which is ‘abc’) in the security menu, all menu’s can be enabled or
disabled. Also a new password can be entered and saved.
The settings will be stored when the “save” button is pressed.
Then turn on gas supply gently. Avoid pressure shocks, and bring the instrument gradually up to the level of
the actual operating conditions. Also switch off gas supply gently.
®
The MASS-VIEW is designed in such a way that for a change in the range or gas, you simply select another
available range or gas in the menu.
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BRONKHORST HIGH-TECH B.V.
3.4 User Interface, menu structure and instrument functions
3.4.1 The readout screen.
The readout screen of the MASS-VIEW® is divided into several blocks as described in the picture
on the right.
1. At the top of the screen the fluid name and the unit dimensions are displayed.
2. Left of the graph the capacity is displayed.
3. If there are any alarms activated, their values will be displayed at the left side of the graph.
More information about how to use the alarms can be found in chapter 3.4.6.
4. The custom readout parameter 1 is displayed near the bottom of the screen.
More information can be found in chapter 3.4.2.
5. The “Flow marker” indicates the desired flow and is only a “marker” where the actual flow
should be. The Flow Marker value can be set in the menu “marker”
6. Readout parameter 2 is displayed at the bottom of the screen and indicates the actual flow
and the selected unit.
3.4.2 Changing the readout screen.
It is possible to customize the readout screen using the navigation button (see picture below).
By pressing left or right one can switch between three different graph sizes. Depending on the selected
graph one can also switch between four different custom readout parameters by pressing up or down.
1. Full scale capacity with unit.
2. Flow marker value. “Off” when flow marker is disabled.
3. Usertag.
4. Counter with counter unit. “Off” when counter is disabled.
4-way
navigation
buton (joystick)
The readout parameter 2 can be displayed in percentage or actual capacity units. This can be changed with
the “Readout” parameter in the measure menu.
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BRONKHORST HIGH-TECH B.V.
3.4.3 The Menu structure.
From the readout screen one can enter the menu by pressing enter. One can navigate through the menuitems using up and down and enter the selected item by pressing enter.
Select the “back” option to return to the readout screen or to go up one level in the menu.
In each sub-menu various parameters can be edited by pressing enter.
Depending on the type of parameter, the edit screen will look like the following.
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BRONKHORST HIGH-TECH B.V.
In the value-list edit screen a value can be selected from a list using the up and down button. The number of
parameter values in the list and the index of the selected item will be displayed on top of the screen. In the
value edit screen the parameter value can be changed by selecting the digits using left or right and then
increase or decrease the value using up or down.
Pressing enter after editing the parameter value will save the new value and return to the sub-menu.
Note: The visibility of some parameters depends on the value of other parameters. For instance if the marker
is disabled, the marker value will not be displayed.
3.4.4 Sleep mode.
To increase the lifetime of the display a sleep mode is built-in which displays the flow at a random place on
the screen. The sleep mode will become active when the readout screen is visible and no button is pressed
for a number of minutes.
The screensaver and the delay can be enabled in the settings menu.
In addition to the sleep mode the display contrast can be adjusted in 5 steps in the settings menu.
3.4.5 Counter.
The counter in the MASS-VIEW can be set up in the “counter” menu and has 3 different modes which can be
selected via the “mode” parameter in the “counter” menu:
1. Off:
counter disabled.
2. Up:
counting upwards continuously.
3. Up to..:
counting up to limit (batch counter).
When the counter mode is set to “Up” or “Up to..” the following parameters will be displayed
Unit:
The output unit in which the counter will be displayed on the screen. (FlowDDE parameter 123 or
128).
Limit: Batch limit. This parameter is only active when counter mode “Up to..” is selected.
Reset: Resets the counter.
3.4.6 Alarms.
The alarms can be adjusted in the Alarms menu using the following parameters:
Activate (FlowDDE parm118):
This parameter sets one of the following alarm modes.
Name:
None
Min + max
Response
DDE Value:
0
1
2
Description:
Alarms Off.
Alarm on absolute limits.
Alarm on limits related to setpoint/marker.
When the alarm mode is set to “None”, the other alarm parameters are not visible in the menu.
Set max / Set min (FlowDDE parameter 116 and 117).
The minimum and maximum alarm values can be set between 0% and 130%.
An alarm can be disabled by setting the value to 0%.
When alarm mode “min + max” is selected, these are absolute values, when “Response” is selected these
values are relative to the setpoint or marker value. This enables the user to create a band around the
setpoint/marker.
Delay (FlowDDE parameter 182).
The delay parameter is the time in seconds the alarm action will be delayed when alarm limit has been
exceeded. This is also the time automatic reset will be delayed when sensor signal reaches the desired level
again.
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BRONKHORST HIGH-TECH B.V.
Mode (FlowDDE parameter 156).
With the “mode” parameter the user can choose if the alarms reset automatically or manually.
When the reset mode is set to automatic, the alarms will be reset when measure reaches the desired level
and the delay time has exceeded.
When the reset mode is manual, the user can reset the alarms in the following ways:
1)
With the “reset” option in the alarms menu.
2)
Via RS-232 (or FLOWDDE / FlowView / FlowPlot).
Writing the value “2” to FLOWDDE parameter 114 resets the alarms.
3)
When the readout screen is visible and an alarm is active, this will be displayed at the top of the
screen (see chapter 3.4.7). By pressing up at an alarm situation, the user can reset the alarms from
the readout screen.
Relay.
The relays parameter sets the output mode of the relays. The user can choose between disabled, enabled
and pulse. When a relay is active, the relay contact will connect to the 0V signal
3.4.7 Alarm outputs.
The status of the alarms can be read in various ways.
For example when the minimum and maximum alarms are enabled this is
made visible in the readout screen with two markers at the left of the
graph (see picture on the right).
When an alarm arises the corresponding marker will be highlighted and
the header will blink and display the alarm.
The MASS-VIEW meters have two relays which indicate an alarm situation.
The status of the relays depend on the alarm source and status of the
relay parameter (see table below).
disable
Relay 1
Relay 2
0
0
0
0
0
0
0
0
0
0
Min alarm
Max alarm
Response (min)
Response (max)
Counter
enable
Relay 1
1
0
1
1
1
Relay 2
0
1
1
1
1
pulse
Relay 1
Relay 2
0/1/0/1/0/1…
0
0
0/1/0/1/0/1…
0/1/0/1/0/1… 0/1/0/1/0/1…
0/1/0/1/0/1… 0/1/0/1/0/1…
0/1/0/1/0/1… 0/1/0/1/0/1…
3.4.8 User tag
The User tag can be edited at the menu item info.
3.5 Other gases
®
The MASS-VIEW series are calibrated on Air. All other pre-installed gases are calculated using a theoretical
conversion model which describes the flow curve for other gases which will introduce additional inaccuracies.
However, as the accuracy of the conversion model also depends on viscosity, pressure and temperature,
special attention should be taken for gases in the heterogeneous gas state where specific heat, density,
thermal conductivity and viscosity can vary tremendously.
3.6 Zero procedure
®
The MASS-VIEW has a zero procedure for each individual gas. The zero function permits the user to zero
the instrument when needed. Please make sure the instrument is zeroed on the desired gas at the desired
operating temperature and pressure conditions. It is extremely important that all flow be blocked and the
MASS-VIEW is in a static (NO FLOW) condition. Select from the main Menu Option -> Fluidset -> Zero.
Pause a few seconds, then press any key to complete the zero procedure.
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4 Maintenance
4.1 General
No routine maintenance is required to be performed on the instrument. Units may be purged with clean, dry
®
inert gas. The MASS-VIEW is designed in such a way that for a change in the range or gas, you simply
select another available range or gas in the menu.
4.2 Needle valves
CAUTION: Pressure surges, as may occur during system pressurisation or deflation must be avoided.
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5 Troubleshooting
5.1 General
®
For a correct analysis of the proper operation of the MASS-VIEW meter it is recommended to remove the
unit from the process line and check it without applying gas supply pressure. In case the unit is dirty, this can
be ascertained immediately by loosening the couplings. Furthermore check if the RJ-45 connector is fixed
properly. Energizing or de-energizing of the instrument indicates whether there is an electronic failure. The
OLED screen should light up.
After that, fluid pressure is to be applied in order to check behaviour.
If there is suspicion of leakage, do not check for bubbles with a leak detection liquid under the cover as this
may lead to a short-circuit at the sensor or p.c.board.
5.2 Troubleshooting summary
Symptom
Possible cause
Action
No output signal, no display, no flow
No power supply
1a) Check power supply
indication
1b) Check cable(s)
PCB failure
Maximum output signal, maximum flow
Valve blocked
1d) contact online: Mass Flow ONLINE*
Filter blocked
1e) Clean filter
Sensor failure
1f) contact online: Mass Flow ONLINE*
Flow too high
2a) reduce the flow or re-range the
indication
instrument
PCB failure
High setpoint vs. output offset, flow
1c) contact online: Mass Flow ONLINE*
2b) contact online: Mass Flow ONLINE*
Sensor failure
2c) contact online: Mass Flow ONLINE*
Pressure not correct
3a) Check pressure
Blockage in line
3b) Remove cause
Valve blocked
3c) contact online: Mass Flow ONLINE*
indication lower than expected
Signal or flow indication lower than
PCB failure
3d) contact online: Mass Flow ONLINE*
System stoppage
4a) Remove cause
(Gas) Condensation
5a) Decrease supply pressure or increase
Pressure has changed
5b) Check valve setting
Valve is leaking
6) contact online: Mass Flow ONLINE*
expected
Flow is gradually decreasing or changing
temperature
Small flow occurs when valve is supposed
to be closed
* For troubleshooting issues or returns, please go to http://www.massflow-online.com/ and click on service.
Here you find the instructions on how to fix the problem (FAQ’s) or how to return an instrument (RMA).
5.3 Service and repair
MASS-VIEW® instruments can be repaired but not all the parts. What can be repaired can be found on the
website of Mass Flow ONLINE (www.massflow-online.com)
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