ALTA 1480A, 1485A, 180A, 185A Mass Flow Controllers/Meters

ALTA 1480A, 1485A, 180A, 185A Mass Flow Controllers/Meters
ALTATM Series True Digital Mass
Flow
Meter/Controller with
Profibus® Network
Communications
MKS Types 180A, 185A,
1480A, 1485A
Instruction Manual
90 Industrial Way
Wilmington MA
01887
Main: 978.284.4000
Fax: 978. 284.4999
www.mksinst.com
1001037-001 Rev. A
2/06
Instruction Manual
W ARRANTY
Types 180A, 185A, 1480A, 1485A w ith
Profibus® Netw ork Com m unications
MKS Instrum ents, Inc. (M KS) warrants that for three years from the date of
shipm ent the equipm ent described above (the “equipm ent”) m anufactured by M KS
shall be free from defects in m aterials and workm anship and will correctly perform
all date-related operations, including without lim itation accepting data entry,
sequencing, sorting, com paring, and reporting, regardless of the date the operation
is perform ed or the date involved in the operation, provided that, if the equipment
exchanges data or is otherwise used with equipm ent, software, or other products of
others, such products of others themselves correctly perform all date-related
operations and store and transm it dates and date-related data in a form at
com patible with M KS equipm ent. THIS W ARRANTY IS MKS’ SOLE W ARRANTY
CONCERNING DATE-RELATED OPERATIONS.
For the period com mencing with the date of shipm ent of this equipm ent and ending
two years later, MKS will, at its option, either repair or replace any part which is
defective in m aterials or workm anship or with respect to the date-related operations
warranty without charge to the purchaser. The foregoing shall constitute the
exclusive and sole rem edy of the purchaser for any breach by MKS of this
warranty.
The purchaser, before returning any equipm ent covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrangem ents with respect to the responsibility for shipping the equipm ent and handling
any other incidental charges with the M KS sales representative or distributor from
which the equipm ent was purchased or, in the case of a direct purchase from M KS,
with the M KS hom e office in Andover, Massachusetts, USA.
This warranty does not apply to any equipm ent which has not been installed and
used in accordance with the specifications recomm ended by M KS for the proper
and norm al use of the equipm ent. M KS shall not be liable under any circumstances
for indirect, special, consequential, or incidental dam ages in connection with, or
arising out of, the sale, perform ance, or use of the equipm ent covered by this
warranty.
M KS recomm ends that all M KS pressure and flow products be calibrated
periodically (typically every 6 to 12 months) to ensure accurate readings. W hen a
product is returned to M KS for this periodic re-calibration it is considered norm al
preventative m aintenance not covered by any warranty.
THIS W ARRANTY IS IN LIEU OF ALL OTHER RELEVANT W ARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED W ARRANTY OF
MERCHANTABILITY AND THE IMPLIED W ARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY W ARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.
2/06
1001037-001 Rev. A
1001037-001
Rev. A, 2/7/2006
ALTATM Series True Digital Mass Flow
Meter/Controller with
Profibus® Network Communications
MKS Types 180A, 185A,
1480A, 1485A
90 Industrial Way
Wilmington MA 01887
Main: 978.284.4000
Fax: 978. 284.4999
www.mksinst.com
Copyright © 2006 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or retrieval
system, except as may be expressly permitted in writing by MKS Instruments, Inc.
Printed in the United States of America
Baratron® and Mass-Flo® are registered trademarks of MKS Instruments, Inc., Wilmington, MA
Kel-F® is a registered trademark of 3M, Minneapolis, MN
Swagelok® and VCR® are registered trademarks of Swagelok Marketing Company, Solon, OH
Protected by U. S. Patents 5314164 and 5461913
iv
Table of Contents
Table of Contents
List of Tables ......................................................................................................................................................x
List of References...............................................................................................................................................1
Mass Flow Device Safety Information .............................................................................................................3
Symbols Used in This Instruction Manual .................................................................................................................... 3
Symbols Found on the Unit........................................................................................................................................... 3
Safety Procedures and Precautions................................................................................................................................ 3
Sicherheitshinweise für das Massenflussgerät.................................................................................................5
In dieser Betriebsanleitung vorkommende Symbole ..................................................................................................... 5
Erklärung der am Gerät angebrachten Symbole ............................................................................................................ 5
Sicherheitsvorschriften und Vorsichtsmaßnahmen ....................................................................................................... 5
Informations de sécurité pour appareils de mesure/contrôle de débit massique .........................................7
Symboles utilisés dans ce manuel d'utilisation.............................................................................................................. 7
Symboles figurant sur l'unité ......................................................................................................................................... 7
Mesures de sécurité et précautions ................................................................................................................................ 7
Medidas de seguridad del dispositivo de flujo de masa ..................................................................................9
Símbolos usados en este manual de instrucciones......................................................................................................... 9
Símbolos hallados en la unidad ..................................................................................................................................... 9
Procedimientos y precauciones de seguridad ................................................................................................................ 9
マスフロー機器の安全に関する情報............................................................................................................11
本取扱説明書のマーク ............................................................................................................................................. 11
本機器のマーク ......................................................................................................................................................... 11
安全対策について ..................................................................................................................................................... 11
질량 유량 장치 안전 정보................................................................................................................................13
본 지침 매뉴얼에 사용되는 기호들 ......................................................................................................................... 13
장치에 표시된 기호들 ............................................................................................................................................... 13
안전 절차 및 예방조치 .............................................................................................................................................. 13
Chapter One: General Information ..............................................................................................................17
Introduction ................................................................................................................................................................. 17
How This Manual is Organized................................................................................................................................... 18
Customer Support........................................................................................................................................................ 20
Chapter Two: Installation ..............................................................................................................................23
How to Unpack the MKS ALTA Mass Flow Device.................................................................................................. 23
Product Location and Requirements............................................................................................................................ 24
Setup............................................................................................................................................................................ 25
Dimensions.................................................................................................................................................................. 25
Chapter Three: Overview ..............................................................................................................................34
General Information .................................................................................................................................................... 34
How the MKS ALTA Mass Flow Controller Works................................................................................................... 35
Overview of ALTA Profibus Digital Operation .......................................................................................................... 36
v
Table of Contents
The Gas Correction Factor (GCF) ...............................................................................................................................41
Chapter Four: Operation............................................................................................................................... 42
Profibus Connector ......................................................................................................................................................42
Profibus Controls and Indicators .................................................................................................................................43
Power Up .....................................................................................................................................................................44
How to Zero the Flow Device .....................................................................................................................................45
How to Override the Valve Via Hardware (Controllers Only) ....................................................................................46
Chapter Five: Communication I .................................................................................................................. 47
Profibus Protocol .........................................................................................................................................................47
Cyclic Data Exchange Object......................................................................................................................................48
Setup Object ................................................................................................................................................................50
Diagnostics Object.......................................................................................................................................................50
Chapter Six: Communication II - DP-V1 Extension Messages .................................................................. 52
Multiple Instance Object (DP-V1 Extension Messages) .............................................................................................52
Device Status (DP-V1 Extension Message) ................................................................................................................53
Device Settings Object (DP-V1 Extension Messages) ................................................................................................57
Analog Sensor Object (DP-V1 Extension Messages)..................................................................................................59
S-Analog Actuator Object (DP-V1 Extension Messages) ...........................................................................................62
Single Stage Controller Object (DP-V1 Extension Messages) ....................................................................................63
Gas Calibration Object (DP-V1 Extension Messages) ................................................................................................64
Controller Calibration Object ......................................................................................................................................65
Chapter Seven: Maintenance ........................................................................................................................ 68
General Information ....................................................................................................................................................68
Zero Adjustment ..........................................................................................................................................................68
Chapter Eight: Troubleshooting ................................................................................................................... 71
Troubleshooting Chart.................................................................................................................................................71
Appendix A: Product Specifications ............................................................................................................. 73
Performance Specifications .........................................................................................................................................73
Physical Specifications ................................................................................................................................................74
Environmental Specifications......................................................................................................................................74
Appendix B: Gas Correction Factors ........................................................................................................... 77
Appendix C: Model Code Explanation......................................................................................................... 81
Model Code Description..............................................................................................................................................81
Appendix D: Mass Flow Device Sizing Guidelines ...................................................................................... 85
General Information ....................................................................................................................................................85
How To Determine the Flow Device Range................................................................................................................85
Appendix E: MKS ALTA Digital MFC Graphical User Interface (GUI)................................................. 87
Overview .....................................................................................................................................................................87
Equipment Needed ......................................................................................................................................................87
Software Setup.............................................................................................................................................................88
Equipment Setup .........................................................................................................................................................89
Starting the GUI ..........................................................................................................................................................90
Exiting the GUI ...........................................................................................................................................................91
vi
Table of Contents
Description of the Main Control Panel........................................................................................................................ 91
User Mode and Calibration Mode ............................................................................................................................... 92
Calibration Mode Access ............................................................................................................................................ 93
Setting, Adding, and Deleting Gas Tables................................................................................................................... 95
Adjusting PID Tuning Parameters............................................................................................................................... 99
vii
List of Figures
List of Figures
Figure 1: Front and Back Views of the MKS ALTA Mass Flow Devices (Welded Fittings) ..........................26
Figure 2: Side View of the MKS ALTA Mass Flow Devices (Welded Fittings) .............................................27
Figure 3: Top View of the MKS ALTA Mass Flow Devices (Welded Fittings)..............................................28
Figure 4: Bottom View of the MKS ALTA Mass Flow Devices (Welded Fittings) ........................................28
Figure 5: Front View of the MKS ALTA Mass Flow Devices (Downport Fittings).........................................29
Figure 6: Top View of the MKS ALTA Mass Flow Devices (Downport Fittings) ..........................................30
Figure 7: Bottom View of the MKS ALTA Mass Flow Devices (Downport Fittings) ....................................30
Figure 8: Serial Number Label..........................................................................................................................31
Figure 9: Effects of the Proportional Term (Low Proportional Term) .............................................................39
Figure 10: Effects of the Proportional Term (High Proportional Term)...........................................................39
Figure 11: Effects of the Integral Term (Low Integral Term)...........................................................................39
Figure 12: Effects of the Integral Term (High Integral Term)..........................................................................40
Figure 13: Profibus Connector Pin Diagram.....................................................................................................42
Figure 15: Station Address Rotary Switches ....................................................................................................44
Figure 16: Equipment Setup .............................................................................................................................89
Figure 17: Start Window...................................................................................................................................90
Figure 18: Scan Device Network ......................................................................................................................90
Figure 19: Main Control Panel .........................................................................................................................91
Figure 20: Password Control ............................................................................................................................93
Figure 21: Change Password Window..............................................................................................................94
Figure 22: Adding a Calibration Mode Password for a New User ...................................................................94
Figure 23: Edit Gas ...........................................................................................................................................95
Figure 24: Gas List............................................................................................................................................97
Figure 25: Copy Cal Table................................................................................................................................98
Figure 26: Tuning Parameters...........................................................................................................................99
ix
List of Tables
List of Tables
Table 1: Definition of Symbols Found on the Unit ............................................................................................ 3
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole .............................................................................. 5
Tableau 3: Définition des symboles sur l'unité................................................................................................... 7
Tabla 4: Definición de los símbolos hallados en la unidad ................................................................................ 9
表 5: 本機器に使用されているマークについて ......................................................................................... 11
표 6: 장치에 표시된 기호들의 정의 .............................................................................................................. 13
Table 7: User and Calibration Access Rights................................................................................................... 37
Table 8: Profibus Communications Connector Pinout ..................................................................................... 42
Table 9: Profibus Power Connector Pinout ...................................................................................................... 43
Table 10: Object Models Present in the ALTA................................................................................................ 47
Table 11: Exception Status Bit Map................................................................................................................. 54
Table 12: Exception Detail Device Common Alarm Bit Map ......................................................................... 55
Table 13: Exception Detail Device Specific Alarm Bit Map ........................................................................... 55
Table 14: Exception Detail Manufacturer Specific Alarm Bit Map................................................................. 55
Table 15: Controller Status Bit Map ................................................................................................................ 64
Table 16: Troubleshooting Chart...................................................................................................................... 71
Table 17: Gas Correction Factors..................................................................................................................... 77
Table 18: Summary of User and Calibration Mode Capabilities ..................................................................... 93
x
List of References
List of References
The documents listed below are referenced throughout this manual.
[1] “Sensor/Actuator Network Common Device Model”, SEMI Standards Document E54.1-0097.
1
List of References
This page intentionally left blank.
2
Mass Flow Device Safety Information
Mass Flow Device Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard. It calls attention to a procedure, practice,
condition, or the like, which, if not correctly performed or adhered to, could result
in injury to personnel.
Caution
The CAUTION sign denotes a hazard. It calls attention to an operating procedure,
practice, or the like, which, if not correctly performed or adhered to, could result in
damage to or destruction of all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a procedure, practice,
condition, or the like, which is essential to highlight.
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Table 1: Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No. 5007
Off (Supply)
IEC 417, No. 5008
Earth (ground)
IEC 417, No. 5017
Protective Earth (ground)
IEC 417, No. 5019
Frame or Chassis
IEC 417, No. 5020
Equipotentiality
IEC 417, No. 5021
Direct Current
IEC 417, No. 5031
Alternating Current
IEC 417, No. 5032
Both Direct and Alternating Current
IEC 417, No. 5033-a
Class II Equipment
IEC 417, No. 5172-a
Three Phase
Alternating Current
IEC 617-2, No. 020206
Caution (refer to accompanying
documents)
ISO 3864, No. B.3.1
Caution, Risk of Electric Shock
ISO 3864, No. B.3.6
Caution, Hot Surface
IEC 417, No. 5041
Safety Procedures and Precautions
Observe the following general safety precautions during all phase of operation of this instrument.
Failure to comply with these precautions or with specific warnings elsewhere in this manual violates
safety standards of intended use of the instrument and may impair the protection provided by the
equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these
requirements.
3
Mass Flow Device Safety Information
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an
MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal adjustments must be
made by qualified service personnel only.
KEEP AWAY FROM LIVE CIRCUITS
Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even
with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety precautions, completely purge
the instrument when necessary, and ensure that the material used is compatible with sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before its removal from a system, be sure to purge the unit completely with a clean dry gas to
eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn to protect personnel.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for
such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the intended use of the
instrument. Assemble and tighten fittings according to manufacturer's directions.
CHECK FOR LEAK-TIGHT FITTINGS
Before proceeding to instrument setup, carefully check all plumbing connections to the instrument to ensure leak-tight
installation.
OPERATE AT SAFE INLET PRESSURES
This unit should never be operated at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, a suitable burst disc should be installed in the vacuum system to prevent
system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants of any kind to enter the unit before or during use. Contamination such as dust, dirt, lint, glass
chips, and metal chips may permanently damage the unit.
ALLOW PROPER WARM UP TIME FOR TEMPERATURE-CONTROLLED UNITS
Temperature-controlled unit will only meet specifications when sufficient time is allowed for the unit to meet, and
stabilize at, the designed operating temperature. Do not zero or calibrate the unit until the warm up is complete.
4
Sicherheitshinweise für das Massenflussgerät
Sicherheitshinweise für das Massenflussgerät
In dieser Betriebsanleitung vorkommende Symbole
Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser
Betriebsanleitung.
Warnung!
Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es
macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine
sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.
ungenügende Berücksichtigung zu Verletzungen führen kann.
Vorsicht!
Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es macht auf
einen Bedienungsablauf, eine Arbeitsweise oder eine sonstige Gegebenheit
aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende
Berücksichtigung zu einer Beschädigung oder Zerstörung des Gerätes oder von
Teilen des Gerätes führen kann.
Hinweis
Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines
Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige Gegebenheit
aufmerksam.
Erklärung der am Gerät angebrachten Symbole
Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können.
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole
|
Ein (Energie)
IEC 417, No.5007
Aus (Energie)
IEC 417, No.5008
Erdanschluss
IEC 417, No.5017
Schutzleiteranschluss
IEC 417, No.5019
Masseanschluss
IEC 417, No.5020
Aquipotentialanschluss
IEC 417, No.5021
Gleichstrom
IEC 417, No.5031
Wechselstrom
IEC 417, No.5032
Gleich- oder Wechselstrom
IEC 417, No.5033-a
Durchgängige doppelte oder
verstärkte Isolierung
IEC 417, No.5172-a
Dreileiter-Wechselstrom (Drehstrom)
IEC 617-2, No.020206
Warnung vor einer Gefahrenstelle
(Achtung, Dokumentation beachten)
ISO 3864, No.B.3.1
Warnung vor gefährlicher
elektrischer Spannung
ISO 3864, No.B.3.6
Höhere Temperatur an leicht
zugänglichen Teilen
IEC 417, No.5041
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Gerätes zu
befolgen. Eine Missachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser
5
Sicherheitshinweise für das Massenflussgerät
Betriebsanleitung verletzt die für dieses Gerät und seine Bedienung geltenden Sicherheitsstandards,
und kann die Schutzvorrichtungen an diesem Gerät wirkungslos machen. MKS Instruments, Inc.
haftet nicht für Missachtung dieser Sicherheitsvorschriften seitens des Kunden.
Niemals Teile austauschen oder Änderungen am Gerät vornehmen!
Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am
Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein.
Nur so wird sichergestellt, dass alle Schutzvorrichtungen voll funktionsfähig bleiben.
Wartung nur durch qualifizierte Fachleute!
Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten
Fachleuten durchgeführt werden, niemals vom Bedienpersonal.
Vorsicht vor stromführenden Leitungen!
Ersetzen Sie keine Komponente von Geräten, die an Netzstrom angeschlossen sind. Unter Umständen kann gefährliche
Spannung auch dann bestehen, wenn das Netzanschlusskabel von der Strmversorgung entfernt wurde. Um Verletzungen
vorzubeugen sollten zuerst alle Geräte von der Stromversorgung getrennt und alle Stromkreusläufe entladen werden.
Vorsicht beim Arbeiten mit gefährlichen Stoffen!
Wenn gefährliche Stoffe verwendet werden, muss der Bediener die entsprechenden Sicherheitsvorschriften genauestens
einhalten, das Gerät, falls erforderlich, vollständig spülen, sowie sicherstellen, dass der Gefahrstoff die am Gerät
verwendeten Materialien, insbesondere Dichtungen, nicht angreift.
Spülen des Gerätes mit Gas!
Nach dem Installieren oder vor dem Ausbau aus einem System muss das Gerät unter Einsatz eines reinen Trockengases
vollständig gespült werden, um alle Rückstände des Vorgängermediums zu entfernen.
Anweisungen zum Spülen des Gerätes
Das Gerät darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen.
Gerät nicht zusammen mit explosiven Stoffen, Gasen oder Dämpfen benutzen!
Um der Gefahr einer Explosion vorzubeugen, darf dieses Gerät niemals zusammen mit (oder in der Nähe von)
explosiven Stoffen aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zugelassen ist.
Anweisungen zum Installieren der Armaturen!
Alle Anschlussstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten
Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muss gemäß den
Anweisungen des Herstellers vorgenommen werden.
Verbindungen auf Undichtigkeiten prüfen!
Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
Gerät nur unter zulässigen Anschlussdrücken betreiben!
Betreiben Sie das Gerät niemals unter Drücken, die den maximal zulässigen Druck (siehe Produktspezifikationen)
übersteigen.
Geeignete Berstscheibe installieren!
Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird, sollte eine geeignete Berstscheibe in das
Vakuumsystem installiert werden, um eine Explosionsgefahr aufgrund von steigendem Systemdruck zu vermeiden.
Verunreinigungen im Gerät vermeiden!
Stellen Sie sicher, dass Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des Betriebs in das
Instrumenteninnere gelangen können. Staub- und Schmutzpartikel, Glassplitter oder Metallspäne können das Gerät
dauerhaft beschädigen oder Prozess- und Messwerte verfälschen.
Bei Geräten mit Temperaturkontrolle korrekte Anwärmzeit einhalten!
Temperaturkontrollierte Geräte arbeiten nur dann gemäß ihrer Spezifikation, wenn genügend Zeit zum Erreichen und
Stabilisieren der Betriebstemperatur eingeräumt wird. Kalibrierungen und Nulleinstellungen sollten daher nur nach
Abschluss des Anwärmvorgangs durchgeführt werden.
6
Informations de sécurité pour appareils de mesure/contrôle de débit massique
Informations de sécurité pour appareils de mesure/contrôle de débit
massique
Symboles utilisés dans ce manuel d'utilisation
Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel.
Avertissement
L'indication AVERTISSEMENT signale un danger pour le personnel. Elle
attire l'attention sur une procédure, une pratique, une condition, ou toute
autre situation présentant un risque d'accident pour le personnel, en cas
d'exécution incorrecte ou de non-respect des consignes.
Attention
L'indication ATTENTION signale un danger pour l'appareil. Elle attire
l'attention sur une procédure d'exploitation, une pratique, ou toute autre
situation, présentant un risque de dégât ou de destruction partielle ou totale
du produit, en cas d'exécution incorrecte ou de non-respect des consignes.
Remarque
L'indication REMARQUE signale une information importante. Elle attire
l'attention sur une procédure, une pratique, une condition, ou toute autre situation,
présentant un intérêt particulier.
Symboles figurant sur l'unité
Le tableau suivant décrit les symboles pouvant apparaître sur l'unité.
Tableau 3: Définition des symboles sur l'unité
|
Marche (sous tension)
IEC 417, No.5007
Arrêt (hors tension)
IEC 417, No.5008
Terre (masse)
IEC 417, No.5017
Terre de protection (masse)
IEC 417, No.5019
Masse
IEC 417, No.5020
Equipotentialité
IEC 417, No.5021
Courant continu
IEC 417, No.5031
Courant alternatif
IEC 417, No.5032
Courant continu et alternatif
IEC 417, No.5033-a
Matériel de classe II
IEC 417, No.5172-a
Courant alternatif triphasé
IEC 617-2, No.020206
Attention : se reporter
à la documentation
ISO 3864, No.B.3.1
Attention : risque de
choc électrique
ISO 3864, No.B.3.6
Attention : surface brûlante
IEC 417, No.5041
Mesures de sécurité et précautions
Observer les précautions générales de sécurité suivantes pendant toutes les phases d'exploitation de cet
appareil. Le non-respect des ces précautions ou des avertissements du manuel constitue une violation
des normes de sécurité relatives à l'utilisation de l'appareil et peut compromettre la protection assurée
7
Informations de sécurité pour appareils de mesure/contrôle de débit massique
par l'appareil. MKS Instruments, Inc. rejette toute responsabilité en cas de non-respect des consignes
par les clients.
PAS DE REMPLACEMENT DE PIÈCES OU DE MODIFICATION DE L'APPAREIL
Ne pas installer de pièces de remplacement ni effectuer des modifications non autorisées sur l'appareil. Renvoyer
l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des
dispositifs de sécurité.
DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ
Le personnel d'exploitation ne doit pas essayer de sortir les composants du boîtier ou faire des réglages internes. Le
dépannage est réservé au personnel qualifié.
ÉLOIGNEMENT DES CIRCUITS SOUS-TENSION
Ne pas remplacer de composants lorsqu’un câble d’alimentation est branché. Dans certaines conditions, des tensions
dangereuses peuvent être présentes même après le retrait du câble d’alimentation. Pour éliminer tout risque de blessure,
procéder toujours à la déconnexion et décharger les circuits avant tout contact physique.
PRÉCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX
Si des produits dangereux sont utilisés, l'utilisateur est responsable du respect des mesures de sécurité appropriées, de la
purge complète de l'appareil quand elle s’avère nécessaire, et doit s’assurer que les produits utilisés sont compatibles
avec les matériaux d'étanchéité.
PURGE DE L'APPAREIL
Après l'installation de l'unité, ou avant son retrait d'un système, purger l'unité complètement avec un gaz propre et sec
afin d'éliminer toute trace du produit de flux utilisé précédemment.
UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE
Cet appareil doit être purgé sous une hotte de ventilation. Le personnel doit porter des gants de protection.
PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF
Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation
spécifique pour une telle exploitation.
UTILISATION D'ÉQUIPEMENTS ET PROCÉDURES DE SERRAGE APPROPRIÉS
Tous les équipements de l'appareil doivent être conformes à ses spécifications, et compatibles avec l'utilisation prévue de
l'appareil. Assembler et serrer les équipements conformément aux directives du fabricant.
VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS
Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation.
EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES
Ne jamais utiliser des pressions supérieures à la pression nominale maximum (se reporter aux spécifications de l'unité
pour la pression maximum admissible).
INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ
En cas d'exploitation avec une source de gaz pressurisé, installer un disque d'échappement adapté dans le système à vide,
afin d'éviter une explosion du système en cas d'augmentation de la pression.
MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS
Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Des produits contaminants
tels que des poussières et des fragments de tissu, de verre et de métal peuvent endommager l'unité de manière
permanente.
RESPECT DU TEMPS D'ÉCHAUFFEMENT APPROPRIÉ POUR LES UNITÉS Á RÉGULATION DE TEMPÉRATURE
Les unités à régulation de température sont conformes à leurs spécifications uniquement quand on leur laisse un temps
suffisant pour atteindre d'une manière stable la température d'exploitation. Ne pas remettre à zéro ou calibrer l'unité tant
que l'échauffement n'est pas terminé.
8
Medidas de seguridad del dispositivo de flujo de masa
Medidas de seguridad del dispositivo de flujo de masa
Símbolos usados en este manual de instrucciones
Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual.
Advertencia
El símbolo de advertencia indica la posibilidad de que se produzcan daños
personales. Pone de relieve un procedimiento, práctica, estado, etc. que en caso
de no realizarse o cumplirse correctamente puede causar daños personales.
Precaución
El símbolo de precaución indica la posibilidad de producir daños al equipo.
Pone de relieve un procedimiento operativo, práctica, etc. que en caso de no
realizarse o cumplirse correctamente puede causar daños o la destrucción total
o parcial del equipo.
Nota
El símbolo de notas indica información de importancia. Este símbolo pone de relieve
un procedimiento, práctica o condición cuyo conocimiento es esencial destacar.
Símbolos hallados en la unidad
La tabla siguiente contiene los símbolos que puede hallar en la unidad.
Tabla 4: Definición de los símbolos hallados en la unidad
|
Encendido
(alimentación eléctrica)
IEC 417, N° 5007
Apagado
(alimentación eléctrica)
IEC 417, N° 5008
Puesta a tierra
IEC 417, N° 5017
Protección a tierra
IEC 417, N° 5019
Caja o chasis
IEC 417, N° 5020
Equipotencialidad
IEC 417, N° 5021
Corriente continua
IEC 417, N° 5031
Corriente alterna
IEC 417, N° 5032
Corriente continua y alterna
IEC 417, N° 5033-a
Equipo de clase II
IEC 417, N° 5172-a
Corriente alterna trifásica
IEC 617-2, N° 020206
Precaución. Consulte los documentos
adjuntos
ISO 3864, N° B.3.1
Precaución.
Riesgo de descarga eléctrica
ISO 3864, N° B.3.6
Precaución. Superficie caliente
IEC 417, N° 5041
Procedimientos y precauciones de seguridad
Las medidas generales de seguridad descritas a continuación deben observarse durante todas las etapas
de funcionamiento del instrumento. La falta de cumplimiento de dichas medidas de seguridad o de las
advertencias específicas a las que se hace referencia en otras partes de este manual, constituye una
violación de las normas de seguridad establecidas para el uso previsto del instrumento y podría anular
9
Medidas de seguridad del dispositivo de flujo de masa
la protección proporcionada por el equipo. Si el cliente no cumple dichas precauciones y advertencias,
MKS Instruments, Inc. no asume responsabilidad legal alguna.
NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO
No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto
funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS
toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS AUTORIZADOS
Los operarios no deben retirar las tapas del instrumento. El reemplazo de los componentes y las tareas de ajuste deben
ser realizadas únicamente por personal autorizado.
MANTÉNGASE ALEJADO DE LOS CIRCUITOS ACTIVOS
No reemplace componentes con el cable de alimentación eléctrica conectado. En algunos casos, puede haber presente
alto voltaje aun con el cable de alimentación eléctrica desconectado. Para evitar lesiones personales, desconecte siempre
el cable y descargue los circuitos antes de entrar en contacto con los mismos.
TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS
Cuando se utilicen materiales tóxicos, es responsabilidad de los operarios tomar las medidas de seguridad
correspondientes, purgar totalmente el instrumento cuando sea necesario y comprobar que el material utilizado sea
compatible con los materiales de sellado.
PURGUE EL INSTRUMENTO
Una vez instalada la unidad o antes de retirarla del sistema, purgue completamente la unidad con gas limpio y seco para
eliminar todo resto de la sustancia líquida empleada anteriormente.
USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA
El instrumento debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores.
NO HAGA FUNCIONAR EL INSTRUMENTO EN AMBIENTES CON RIESGO DE EXPLOSIÓN
Para evitar que se produzcan explosiones, no haga funcionar este instrumento en un ambiente con riesgo de explosiones,
excepto cuando el mismo haya sido certificado específicamente para tal uso.
USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE
Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se
debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
COMPRUEBE QUE LOS ACCESORIOS SEAN A PRUEBA DE FUGAS
Antes de proceder con la instalación del instrumento, inspeccione cuidadosamente todas las conexiones de las tuberías
para comprobar que hayan sido instaladas a prueba de fugas.
HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA SEGURAS
No haga funcionar nunca el instrumento con presiones superiores a la máxima presión nominal (en las especificaciones
del instrumento hallará la presión máxima permitida).
INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA
Cuando el instrumento funcione con una fuente de gas presurizado, instale una cápsula de seguridad adecuada en el
sistema de vacío para evitar que se produzcan explosiones cuando suba la presión del sistema.
MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES
No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos contaminantes tales como
polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden dañar irreparablemente la unidad.
CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE TEMPERATURA
Las unidades controladas por medio de temperatura funcionarán de acuerdo con las especificaciones sólo cuando se las
caliente durante el tiempo suficiente para permitir que lleguen y se estabilicen a la temperatura de operación indicada.
No calibre la unidad y no la ponga en cero hasta que finalice el procedimiento de calentamiento.
10
マスフロー機器の安全に関する情報
本取扱説明書のマーク
本マニュアルでは警告、注意、ポイントのマークを用いて重要な事項を記載しています。
警告
この表示を無視して誤った取り扱い (手順や使用方法、条件など) をすると、人が重傷
を負う可能性が想定される内容を示しています。必ずお読みください。
注意
この表示を無視して誤った取り扱い (手順や使用方法など) をすると、 製品が損傷する
可能性が想定される内容を示しています。必ずお読みください。
ポイント
この表示は手順や使用方法、条件などに関する重要な情報が記載されていることを示
しています。必ずお読みください。
本機器のマーク
以下の表では、本機器に使用されているマークについて説明いたします。
表 5: 本機器に使用されているマークについて
|
オン (電源)
IEC 417, No. 5007
オフ (電源)
IEC 417, No. 5008
接地 (アース)
IEC 417, No. 5017
保護接地 (アース)
IEC 417, No. 5019
フレームまたはシャーシ
IEC 417, No. 5020
等電位
IEC 417, No. 5021
直流
IEC 417, No. 5031
交流
IEC 417, No. 5032
直流と交流
IEC 417, No. 5033-a
クラス 2 機器
IEC 417, No. 5172-a
三相交流
IEC 617-2, No. 020206
注意 (付属書を参照)
ISO 3864, No. B.3.1
注意 (感電の危険あり)
ISO 3864, No. B.3.6
注意 (表面が熱くなっています)
IEC 417, No. 5041
安全対策について
本機器を使用する際は、必ず以下の安全対策を守ってください。これらの安全対策や本マニュアルの
警告を無視すると、機器本来の用途の安全基準を侵害することになり、機器が提供する保護機能が
損なわれる可能性があります。MKS Instruments, Inc. は、顧客側の安全対策の不履行に対して
は一切責任を負いかねます。
11
勝手に部品を変えたり、本体を改造しないこと
本機器に代用部品を使用したり、不正な改造を加えないでください。すべての安全システムを正しく機能させるた
めの修理やメンテナンスが必要な場合は、本機器を MKS Calibration and Service Center まで戻してください。
修理は必ず専門の修理サービスを利用すること
オペレータは絶対に本機器を分解しないでください。部品の交換や内部の調整は必ず専門の修理サービスを利
用してください。
電流が通じている回路から切断すること
電源ケーブルを接続したままで部品を交換しないでください。特定の状況では、電源ケーブルを取り外した状態
でも危険な電圧が残っている場合があります。感電などの事故を防ぐため、回路に触れる前に必ず電源から切
断し、放電してください。
危険な材料を使用する場合は慎重に機器を使用すること
危険な材料を使用する場合は、使用者は各自の責任の元で適切な安全対策を講じてください。必要に応じて
本機器を浄化してください。また、使用する材料に対するシーリング材の耐久性を確認してください。
機器を浄化すること
本機器を取り付けた後やシステムから取り外す前に、きれいな乾燥ガスで本機器を浄化し、使用した材料を完
全に取り除いてください。
浄化する場合は適切な手順で行うこと
本機器の浄化は換気フードの下で行う必要があります。また、浄化作業を行う人は必ず手袋を着用してください。
爆発の危険性のある環境で機器を使用しないこと
爆発が起きるのを防ぐため、本機器を爆発の危険性のある環境で使用しないでください。ただし、そのような環境
での使用が特別に保証されている場合は除きます。
適切な金具類を使用し、手順に従って金具の締めを行うこと
金具類は本機器の仕様と一致し、機器本来の用途に適合したものである必要があります。金具類の取り付け
や締めは、製造業者の指示に従ってください。
液体の漏れがないよう接続箇所を確認すること
本機器を設定する前に、すべての配管の接続を慎重に確認し、液体が漏れないようにしてください。
安全なインレット圧力で使用すること
定格の最大圧力を超える圧力の下で本機器を絶対に使用しないでください (最大許容圧力については仕様書
を参照)。
適切なバーストディスクを取り付けること
圧力のかかったガスを使用する場合は、万一システムが爆発した場合にシステムの圧力が上昇するのを防ぐため、
真空システムに適切なバーストディスクを取り付けてください。
本機器に異物やゴミが混入しないようにすること
本機器の使用前または使用中に、ほこりやゴミ、繊維、ガラスの破片、金属片などの異物やゴミが混入しないよ
うにしてください。本機器が損傷する可能性があります。
温度調整された機器を十分に温めてから使用すること
温度調整された機器が適切な作動温度にならないうちに使用すると、仕様通りの動作をしないことがあります。
本機器が十分に温まるまでは目盛りをゼロに合わせたり、較正しないでください。
12
질량 유량 장치 안전 정보
본 지침 매뉴얼에 사용되는 기호들
매뉴얼 전체에 사용되는 경고, 주의 및 참고 메시지의 정의.
경고
경고 표시는 위험을 나타냅니다. 이 표시는 올바르게 수행되거나 지켜지지 않을
경우, 사람에게 상해를 입힐 수 있는 절차, 수행지침, 상태 또는 이와 유사한
상황들에 대한 주의를 환기시킵니다.
주의
주의 표시는 위험을 나타냅니다. 이 표시는 올바르게 수행되거나 지켜지지 않을
경우, 제품의 일부나 전체에 손상이나 파손을 일으킬 수 있는 절차, 수행지침 또는
이와 유사한 상황들에 대한 주의를 환기시킵니다.
참고
참고 표시는 중요한 정보를 나타냅니다. 이 표시는 강조할 만한 주요 절차,
수행지침, 상태 또는 이와 유사한 상황들에 대한 주의를 환기시킵니다.
장치에 표시된 기호들
다음 표는 장치에서 볼 수 있는 기호들을 설명합니다.
표 6: 장치에 표시된 기호들의 정의
|
켬 (전원)
IEC 417, No. 5007
끔 (전원)
IEC 417, No. 5008
접지(지면)
IEC 417, No. 5017
보호 접지(지면)
IEC 417, No. 5019
프레임 또는 섀시
IEC 417, No. 5020
등전위성
IEC 417, No. 5021
직류
IEC 417, No. 5031
교류
IEC 417, No. 5032
직류와 교류 모두
IEC 417, No. 5033-a
클래스 II 장비
IEC 417, No. 5172-a
3상 교류
IEC 617-2, No. 020206
주의 (동봉 문서 참조)
ISO 3864, No. B.3.1
주의, 감전 위험
ISO 3864, No. B.3.6
주의, 표면이 뜨거움
IEC 417, No. 5041
안전 절차 및 예방조치
본 기계의 모든 작동 시에 다음의 일반 안전 예방조치를 준수하십시오. 아래 예방조치를
준수하지 않거나 본 매뉴얼의 다른 부분에 있는 특정 경고를 준수하지 않을 경우, 기계
사용 목적의 안전 기준을 위반하는 것이 되며, 장비가 제공하는 보호기능을 손상시킬 수
있습니다. MKS Instruments, Inc.는 고객이 본 요건을 준수하지 않는 경우에 대해서는
어떠한 책임도 지지 않습니다.
13
부품을 교체하거나 기계를 개조하지 마십시오
교체 부품을 설치하거나 기계에 허가되지 않은 어떠한 수정도 가하지 마십시오. 서비스와 수리가
필요한 경우에는 모든 안전 특성이 유지되도록 기계를 MKS 보정 서비스 센터(MKS Calibration and
Service Center)로 보내주십시오.
자격이 있는 사람에게만 서비스를 받으십시오
작동하는 사람은 기계 겉면을 제거해서는 안됩니다. 부품 교체 및 내부 조정은 자격이 있는 서비스
기사에게만 받으실 수 있습니다.
전류가 통하는 회로에서 분리해 보관하십시오
전원 케이블을 연결한 채로 부품을 교체하지 마십시오. 일부 환경에서는 전원 케이블을 제거한
상태라도 위험 전압이 존재할 수 있습니다. 부상을 방지하려면, 전원을 항상 분리하고 회로를
만지기 전에 회로를 방전시키십시오.
위험한 물질과 함께 작동할 때는 주의를 기울이십시오
위험한 물질이 사용되는 경우, 사용자는 필요시 기계를 완전히 청소하여, 적절한 안전 예방조치를
준수할 책임을 지키고, 사용된 물질이 봉인 물질과 함께 사용해도 무방하다고 보증할 수 있어야
합니다.
기계를 청소하십시오
장치를 설치한 후나 시스템에서 장치를 제거하기 전에는 반드시 깨끗한 건조성 기체로 장치를
완전히 청소하여 이전에 사용된 유량 물질의 모든 흔적을 제거하십시오.
청소 시에는 적절한 절차를 사용하십시오
본 기계는 환기 후드 아래에서 청소되어야 하며, 인체 보호를 위해 장갑을 착용해야 합니다.
폭발성 환경에서 작동하지 마십시오
폭발을 방지하려면, 폭발성 환경에서 작동하도록 특별히 승인받지 않은 경우 본 제품을 폭발성
환경에서 작동하지 마십시오.
적절한 조립부품과 조임 절차를 사용하십시오
모든 기계 조립부품은 제품 사양과 일치해야 하고, 기계의 사용 목적에 부합해야 합니다.
제조업체의 지시에 따라 조립부품을 조립하고 조이십시오.
누출방지 조립부품을 점검하십시오
기계 설치를 진행하기 전에 기계의 모든 연관 연결부를 점검해 누출방지 설치가 되었는지
확인하십시오.
안전한 흡입 압력에서 작동하십시오
이 장치는 절대 정격 최대 압력보다 높은 압력에서 작동해서는 안됩니다(최대 허용 압력에
대해서는 제품 사양을 참조하십시오).
적합한 안전 파열판을 설치하십시오
가압 가스 공급원에서 작동시, 시스템 폭발이 시스템 압력 상승을 일으키는 것을 방지하기 위해
적합한 안전 파열판이 진공 시스템에 설치되어야 합니다.
장치를 오염이 없는 곳에 보관하십시오
장치를 사용하기 전이나 사용 중에는 어떠한 종류의 오염 물질도 허용해서는 안됩니다. 먼지, 때,
보풀, 유리 조각, 금속 조각과 같은 오염 물질은 영구적으로 장치를 손상시킬 수 있습니다.
온도 제어 장치의 경우 알맞은 시동 시간을 두십시오
14
온도 제어 장치는 장치가 설계 작동 온도와 일치하고 이 온도에서 안정화될 수 있도록 충분한
시간을 허용해야만 사양에 맞게 작동합니다. 시동이 완료될 때까지 장치를 영점 설정하거나
보정하지 마십시오.
15
Introduction
Chapter One: General Information
Chapter One: General Information
Introduction
The MKS ALTATM series of Mass Flow Devices are metal-sealed, digitally controlled instruments which
accurately measure and control the mass flow of gases. This manual covers the Profibus versions of mass
flow meters (Types 180A and 185A) and mass flow controllers (Types 1480A, 1485A).
„
Types 180A, 185A, 1480A, and 1485A have traditional 3” footprints with 1.5” width.
„
The models are also differentiated by internal surface finishes. For Types 180A and 1480A surface
finishes are 10Ra with an electro-polished treatment while Types 185A, and 1485A have ultra-clean 5Ra
surface finishes, which are specially treated for the ultimate in purity and corrosive resistance.
Based on a patented MKS Instruments measurement technique, these instruments are laminar flow devices
whose precise indication of mass flow is achieved through the use of a bypass element in parallel with the
sensor tube. These ALTA units feature digital controller circuits and are completely operable through a
Profibus network. These devices include a metal enclosure and RF bypass capacitors and incorporate a design
that virtually eliminates RFI and EMI interference. The MKS ALTA Mass Flow Devices carry the CE mark
indicating compliance with the EMC Directive 89/336/89.
Use the MKS ALTA Mass Flow Controller when both gas flow control and gas flow measurement are
required. The valve is supplied normally closed. Use the MKS ALTA Mass Flow Meter when only
measurement is required.
The MKS ALTA Mass Flow Devices are available in a variety of configurations and types to suit your
specific application needs. Appendix C, Model Code Explanation, page 81, contains the options that must be
specified when ordering a mass flow device.
Design Features
The design of the MKS ALTA Mass Flow Devices incorporates an advanced flow sensor, a control valve, and
an optimized bypass. The latest generation two-element sensing circuit provides accurate, repeatable
performance even in low flow ranges (< 10 sccm). A low temperature effect from ambient temperature
change and a low attitude sensitivity effect are also ensured. The optimized sensor/bypass arrangement
minimizes the flow splitting error for gases with different properties, which dramatically improves
measurement accuracy when gases other than the calibration gas are used.
Digital Features
The Profibus interface offers interoperability in a Profibus mass flow application. In addition, the true digital
calibration and valve control electronics, coupled with standard 11 point calibration, provide for high flow
accuracy over a wide range of setpoints and fast response. The ALTA Profibus Mass Flow device accepts up
to 15 gas tables.
17
Chapter One: General Information
How This Manual is Organized
Reliability
To provide excellent reliability, the design contains a low mechanical and electronic components count and
has successfully passed the following test:
„
STRIFE, including temperature cycling and vibration (sine and random tests)
And with a metal braided, shielded cable, properly grounded at both ends:
„
EMC Directive 89/336/EEC for CE Mark compliance
Cleanliness Features
The MKS ALTA Mass Flow Devices use only metal for all external seals. The metal seals eliminate gas
permeation and ensure extremely low external leakage. The internal valve control plug is Teflon or Kel-F
(depending on flow range) which are pure, chemically stable, and not prone to out-gassing or particle
generation. The MKS ALTA Mass Flow Device mechanical design incorporates minimal wetted surface area
and virtual leaks, assuring rapid dry-down. To further enhance its cleanliness, all internal surfaces are
precision machined, electro-polished, and subjected to a proprietary cleaning process under Class 100
conditions. The instrument is assembled and double-packaged in a Class 100 clean room environment.
How This Manual is Organized
This manual is designed to provide instructions on how to set up, install, and operate an MKS ALTA Mass
Flow Device.
Before installing your MKS ALTA Mass Flow Device in a system and/or operating it, carefully read
and familiarize yourself with all precautionary notes in the Mass Flow Device Safety Information section
at the front of this manual. In addition, observe and obey all WARNING and CAUTION notes provided
throughout the manual.
Chapter One: General Information (this chapter) introduces the product and describes the organization of the
manual.
Chapter Two: Installation explains the environmental requirements and describes how to mount the
instrument in your system.
18
How This Manual is Organized
Chapter One: General Information
Chapter Three: Overview gives a brief description of the instrument and its functionality.
Chapter Four: Operation describes how to use the instrument and explains all the functions and features.
Chapter Seven: Maintenance lists any maintenance required to keep the instrument in good working
condition.
Chapter Eight: Troubleshooting provides a reference should the instrument malfunction.
Appendix A: Product Specifications lists the specifications of the instrument.
Appendix B: Gas Correction Factors lists the gas correction factors of commonly used gases.
Appendix C: Model Code Explanation describes the model code.
Appendix D: Mass Flow Device Sizing Guidelines describes the guidelines for correctly sizing mass flow
devices for your process application and is provided for reference.
Appendix E: MKS ALTA Digital MFC Graphical User Interface describes the Windows-based graphical user
interface (GUI). This appendix provides detailed information on the interface kit and user manipulation of gas
tables and PID parameters.
19
Chapter One: General Information
Customer Support
Customer Support
Standard maintenance and repair services are available at all of the regional MKS Calibration and Service
Centers. MKS also accepts the instruments of other manufacturers for recalibration using the Primary and
Transfer Standard calibration equipment located at our regional service centers.
If any difficulties arise in the use of your MKS ALTA Mass Flow Device, or to obtain information about
companion products MKS offers, contact any authorized MKS Calibration and Service Center. If it is
necessary to return the instrument to MKS, please obtain an RMA Number (Return Material Authorization
Number) from the MKS Calibration and Service Center before shipping. The RMA Number expedites
handling and ensures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers.
Warning
All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or
toxic materials.
20
Customer Support
Chapter One: General Information
This page intentionally left blank.
21
How to Unpack the MKS ALTA Mass Flow Device
Chapter Two: Installation
Chapter Two: Installation
How to Unpack the MKS ALTA Mass Flow Device
MKS has carefully packed your MKS ALTA Mass Flow Device so that it will reach you in perfect operating
order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be
certain that damage has not occurred during shipment.
Note
Do not discard any packing materials until you have completed your inspection and are sure the
unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to
MKS, obtain an RMA Number (Return Material Authorization Number) from the MKS Calibration and
Service Center before shipping. Please refer to the inside of the back cover of this manual for a list of MKS
Calibration and Service Centers.
Opening the Package
The MKS ALTA Mass Flow Device is assembled, leak tested with helium, and calibrated in a clean room
environment. The instrument is double-packaged in this environment to ensure maintenance of its particle free
condition during shipment. It is very important to remove the packaging according to good clean room
practices. To maintain at least a minimal level of clean room standards, follow the instructions below:
1. Remove all cardboard and packaging materials. Discard before entering the garmenting room.
2. Remove the outer plastic shipping container in an ante room (garmenting room) or transfer box.
Do not allow this container to enter the clean room.
3. Remove the inner bag in the clean room.
4. Inspect for any damage.
Caution
Only qualified individuals should perform the installation and any user adjustments.
Individuals must comply with all necessary ESD handling precautions while installing
and adjusting the instrument. Proper handling is essential when working with all highly
sensitive precision electronic instruments.
Unpacking Checklist
Standard Equipment:
„
MKS ALTA Mass Flow Device (Controller or Meter)
„
MKS ALTA Mass Flow Device Instruction Manual (this book)
23
Chapter Two: Installation
Product Location and Requirements
Product Location and Requirements
„
Ventilation requirements include sufficient air circulation
„
Ambient operating temperature range: 10° to 45° C (50° to 113° F)
„
Power requirement: 20-25 VDC, 300 mA maximum current (250 mA @ 24 VDC nominal)
Optional: +/-15 VDC (+/-5%) @ 230mA
„
Storage temperature range: -20° to 65° C (-4° and 149° F)
„
Mount the MKS ALTA Mass Flow Device in an upright position if possible, although any mounting
orientation is satisfactory. Refer to Setup, page 25, for more information.
„
Install a separate positive shutoff valve if your system cannot tolerate any leakage through the MKS
ALTA Mass Flow Device. The internal flow control valve is not a positive shutoff valve so some leakage
across the valve may occur.
Warning
Your corporate policy on handling toxic or hazardous gases supersedes the
instructions in this manual. Comply with your corporate policy. MKS assumes no
liability for the safe handling of such materials.
„
Install the MKS ALTA Mass Flow Device in a “flowing” system where gas is continually added and
evacuated. Do not use the controller in a “dead-ended” system (a system which cannot remove excess
mass). The MKS ALTA Mass Flow Device can not vent excess mass to the atmosphere.
„
Warm up time: 30 minutes
„
Use high purity gas filters in line upstream of the device.
„
Observe the pressure limits for the flow device.
Controller:
Maximum gas inlet pressure is 150 psig with properly configured valve (consult factory for cases
where inlet pressure is expected to exceed 40 psig).
Operational differential pressure is:
1. 10 to 40 psid for ≤ 5000 sccm units
2. 15 to 40 psid for ≥ 10,000 sccm units
The standard valve configuration provides control over this pressure range with the outlet at
atmospheric pressure.
For additional information, refer to Appendix A, Product Specifications, page 73.
Meter:
Maximum gas inlet pressure is 150 psig in all cases.
24
Setup
Chapter Two: Installation
Setup
This section describes how to install the MKS ALTA Mass Flow Device into your system.
Follow the guidelines below when setting up the MKS ALTA Mass Flow Device.
1. Set the device into position where it will be connected to a gas supply. Placement of mass flow devices in
orientations other than that in which they were calibrated (typically horizontal) may cause a small zero
shift. The zero offset can be removed by re-zeroing the flow controller using the appropriate Profibus
command after the unit is installed and properly warmed-up.
2. Install the flow device in the gas stream such that the flow will be in the direction of the arrow on the
front of the device.
A. Orient the unit properly.
B. Mount the unit into place with the proper hardware. Take care that the gas flow is in the direction of
the arrow on the enclosure of the unit. For surface mount versions, the gas connection is made at this
time. Be sure to insert the appropriate C-seal or W-seal.
C. Connect the gas supply (if not a surface mount unit). For VCR connections, remember to include the
gasket.
D. Perform external leak test.
E. Using switches on top of the unit, select the device address, then power unit through the 9-pin female
connector of the power cable. Connect the device to the Profibus network through the 9-pin male
connector of the Profibus cable.
F. Power the unit and allow 30 minute warm-up.
3. Allow adequate clearance for the Power and Profibus connectors.
Refer below for outline dimensions of the flow devices and locations for the mounting hardware.
Dimensions
Refer to the applicable drawings, which follow.
25
Chapter Two: Installation
Dimensions
Welded Fittings
Front and Back Views: 180A, 185A, 1480A, and 1485A
The front of the MKS ALTA Mass Flow Device has an arrow to indicate the direction of gas flow through the
unit. The back of the MKS ALTA Mass Flow Device contains the serial label and connector pin-outs.
Figure 1: Front and Back Views of the MKS ALTA Mass Flow Devices (Welded Fittings)
26
Dimensions
Chapter Two: Installation
Side View: 180A, 185A, 1480A, and 1485A
Figure 2: Side View of the MKS ALTA Mass Flow Devices (Welded Fittings)
27
Chapter Two: Installation
Dimensions
Top View: 180A, 185A, 1480A, and 1485A
Figure 3: Top View of the MKS ALTA Mass Flow Devices (Welded Fittings)
Bottom View: 180A, 185A, 1480A, and 1485A
Figure 4: Bottom View of the MKS ALTA Mass Flow Devices (Welded Fittings)
28
Dimensions
Chapter Two: Installation
Downport Fittings
Front and Back Views: 1480A and 1485A
The front of the MKS ALTA Mass Flow Device has an arrow to indicate the direction of gas flow through the
unit. The back of the MKS ALTA Mass Flow Device contains the serial label and connector pin-outs.
Figure 5: Front View of the MKS ALTA Mass Flow Devices (Downport Fittings)
29
Chapter Two: Installation
Dimensions
Top View: 180A, 185A, 1480A, and 1485A
Figure 6: Top View of the MKS ALTA Mass Flow Devices (Downport Fittings)
Bottom View: 180A, 185A, 1480A, and 1485A
Figure 7: Bottom View of the MKS ALTA Mass Flow Devices (Downport Fittings)
Labels
Each ALTA unit has two serial number labels, a small one on top side and the standard, larger label on the
back side. Each label shows the serial number, the model code, the full scale flow range, and the name plate
gas.
30
Dimensions
Chapter Two: Installation
Serial #:
012345678
Range: 100 sccm
Gas:
N2
Model #:
1480A01312CR4M14
Serial #:
012345678
Model #:
1480A01312CR4M14
RANGE: 100 SCCM GAS: N2
MKS Instruments, Inc.
Made in the USA
Figure 8: Serial Number Label
Fittings
MKS ALTA Mass Flow Devices are available with the following fittings:
„
Swagelok VCR-4, Male (180A, 185A, 1480A, and 1485A).
„
Swagelok compression (180A and 1480A).
„
¼” weld stub (180A, 185A, 1480A, and 1485A).
„
Downport C-Seal, 1.5 inch (180A, 185A, 1480A, and 1485A). All conform to SEMI Std. 2787.1.
„
Downport W-Seal, 1.5 inch (180A, 185A, 1480A, and 1485A). All conform to SEMI Std. 2787.3F.
31
Chapter Two: Installation
Dimensions
Mounting Hardware
MKS ALTA Mass Flow Devices with in-line fittings (Swagelok VCR, Swagelok compression, and ¼” weld
stub) have six threaded mounting holes located on the bottom or base of the unit: four #8-32 and two M4.
Depending on the hole pattern chosen, use #8-32 UNC-2B or M4 hardware to mount the instrument. The
figures beginning on page 26 show the location and dimensions of the mounting holes for standard axial
fittings.
The C-Seal and W-Seal downmount fittings are designed for device mounting using four M5-0.8 x 30 mm
long socket head cap screws. In addition, C-Seal units may be mounted using 10-32 UNF x 1.25” long socket
head cap screws if your mounting substrate requires.
Gas Flow
The control valve is not a positive shutoff valve. Some leakage across the valve may occur. Refer to
Appendix A, Product Specifications, page 73, for the leak integrity specifications. If necessary, install a
separate positive shutoff valve in your system.
Note
Connect the MKS ALTA Mass Flow Device to your system so that the gas flows in the direction
of the flow arrow on the front of the unit.
32
Dimensions
Chapter Two: Installation
This page intentionally left blank.
33
Chapter Three: Overview
General Information
Chapter Three: Overview
General Information
Typical Control System Configuration
The MKS ALTA Mass Flow Device is used in a wide variety of control systems, most of which share several
characteristics. Typically, a control system consists of four basic parts:
„
„
„
„
Mass flow transducer
Control electronics
Control valve (Mass Flow Controllers only)
Flow system (whose flow is being controlled by the ALTA Profibus Mass Flow Controller)
The MKS ALTA Mass Flow Controller provides the first three components. The mass flow transducer is a
MKS design. The MKS ALTA Mass Flow Controller instrument contains the electronics necessary for flow
control. The control valve included in the MKS ALTA Mass Flow Controller is a proportional control valve.
The flow system can be any process whose flow you need to control. In addition, the MKS ALTA Mass Flow
Controller is capable of metering the mass flow of the gas during the flow control operation.
Flow Measurement Overview
The MKS ALTA Mass Flow Device measures the mass flow rate of a gas and controls the flow rate
according to a given setpoint. The control range is from 2% to 100% of Full Scale (F.S.) with an accuracy of
± 1% of Reading of the calibration gas (20% to 100% of Full Scale). For setpoints between 2% and 20%,
ALTA Mass Flow Devices have an accuracy of ±0.2% FS of the calibration gas.
During valve override - (open), the device operates as a fixed orifice and flow rate is based on differential
pressure across the MFC - (upstream supply pressure – downstream pressure). Determining the actual flow
rate during valve override - (open) - mode requires the use of an additional flow measurement device sized
correctly for the larger flow, such as a mass flow meter or other flow transfer standard.
Flow Path
Upon entering the MKS ALTA Mass Flow Controller, the gas stream passes first through the metering
section of the instrument for its mass flow to be measured. The gas moves on through the control valve,
which regulates the flow rate according to the given setpoint, and then exits the instrument at the established
rate of flow.
The metering section consists of one of the following:
„
A sensor tube for Full Scale ranges < 10 sccm (N2 equivalent)
„
A sensor tube and parallel bypass for ranges > 10 sccm (N2 equivalent)
The bypass elements are specifically matched to the characteristics of the sensor tube to achieve a laminar
flow splitting ratio, which remains constant throughout each range.
34
How the MKS ALTA Mass Flow Controller Works
Chapter Three: Overview
Flow Control Range
The MKS ALTA Mass Flow Controller can control flow over a range of 2 to 100% of full scale flow. This
means that an MKS ALTA Mass Flow Controller with a 1000 sccm configuration can control flow from 20 to
1000 sccm, whereas an instrument with a 100 sccm configuration can control flow from 2 to 100 sccm.
Measurement Technique
The flow measurement is based on differential heat transfer between temperature sensing heater elements,
which are attached to the sensor tube. This senses the thermal mass movement, which is converted to mass
flow using the specific heat, Cp, of the gas.
Control Circuitry
The controller employs the above measurement technique and utilizes a control circuit that provides drive
current for the proportioning control valve. The flow controller accepts a setpoint signal, compares it to its
own flow signal, and generates an error voltage. This error signal is then conditioned by a PID (ProportionalIntegral-Derivative) algorithm and amplified so that it can reposition the control valve, thus reducing the
control error to zero.
With a normally closed valve is normally closed, the MKS ALTA Mass Flow Controller instrument lifts the
armature and plug assembly from the seat to regulate the gas flow rate.
Control Valve
The control valve is a specially constructed solenoid valve in which the armature (moving valve mechanism)
is suspended. The arrangement ensures that no friction is present and makes precise control possible. For an
MKS ALTA Mass Flow Controller with a normally-closed valve the control current is used to lift the
armature and plug assembly from the seat, allowing a controlled flow of gas.
How the MKS ALTA Mass Flow Controller Works
The MKS ALTA Mass Flow Controller compares the flow reading to the setpoint, and positions the valve to
maintain, or achieve, the setpoint rate. The controller functions as a PID (Proportional-Integral-Derivative)
controller. The Proportional (P), Integral (I) and the Derivative (D) terms can be adjusted digitally through the
Profibus network. To facilitate PID adjustment, MKS Instruments offers a graphical user interface (GUI),
which allows for easy communication with the device.
Example
Assume that your MKS ALTA Mass Flow Controller is positioned upstream of the process chamber. The
MKS ALTA Mass Flow Controller is positioned before the chamber so it will regulate the flow rate of the gas
entering the process chamber.
When the actual flow rate reading is less than the setpoint value, the MKS ALTA Mass Flow Controller
opens the valve to increase the amount of gas entering the system. As the valve opens, assuming adequate
differential pressure across the flow controller, gas enters the process chamber, so the flow rate rises to meet
the setpoint value.
When the actual flow rate reading is more than the setpoint value, the MKS ALTA Mass Flow Controller
closes the valve to decrease the amount of gas entering the system. As the valve closes, there is a reduced
flow of gas entering the process chamber, so the flow rate decreases to meet the setpoint value.
35
Chapter Three: Overview
Note
Overview of ALTA Profibus Digital Operation
The MKS ALTA Mass Flow Device must have sufficient pressure on its inlet side to achieve the
setpoint.
Overview of ALTA Profibus Digital Operation
A detailed software index summary for Profibus communications is provided in the Communication chapters
of this manual.
Communication Method
•
Cyclic data exchange (Polled I/O) - fixed data format.
•
Setup/Diagnostic communication - Data structure based on a structure ID and fixed data length.
•
Profibus DP-V1 Extension Messaging - Select “Slot”, “Index” and data “Size” to Set/Get the datum.
Profibus Module
Slot 1
Index 1
Data Length
Index 2 ...
Data Length
Slot 2
Index 1
Data Length
Index 2 ...
Data Length
Slot 3 ...
Index 1
Data Length
Index 2 ...
Data Length
Gas Tables
Each ALTA series Mass Flow Device supports up to 15 gas calibration tables. The user may copy factory
calibrations into new tables to accommodate alternative gases or adjust the full scale flow rate. It is also
possible, if certified flow standards are available, to create entirely new calibration tables with up to 21 points.
The standard factory calibration contains 11 points.
Associated with each table are the PID control parameters. This allows each gas table to have its own
optimized PID settings. Activating a particular table automatically activates the associated PID settings. Thus,
different process gases can be chosen and the optimum PID parameters can be selected.
Gas tables (0 to 14)and associated PID parameters are accessed through the Controller Calibration Object,
Slot 102(0x66) as presented in Chapter Six: Communication II - DP-V1 Extension Messages.
Users may access and adjust gas tables through a MKS-supplied GUI communications kit fully described in
Appendix , page 87. (This includes a GUI CD and security hard key and is available in two versions: MKS
P/N 1001077-001 with USB port hard key and P/N 1001067-001 with parallel port hard key.)
Alternatively,
to create a user table using DP-V1 Extension messaging,
first go into the calibration mode (See User Access, page 37),
in Slot 20, index 3 set the value to the table number (0-14), see page 52,
set the table attributes in slot 0x34 and set associated parameters and the table contents in slot 0x66
(see pages 64 and 65).
36
Overview of ALTA Profibus Digital Operation
Chapter Three: Overview
To select a gas table,
using Cyclic Data Exchange, set the “SELECT_GAS_TABLE” field in the Send Data structure to the
table number, (see page 48)
OR using DP-V1 Extension messaging, set the value of Slot 0x31, index 7 to the gas table number (see
page 59).
Gas Calibration Table Protection
Gas table 0 created at the MKS factory are protected in a manner which prevents editing or deletion in the
field. This ensures that vital calibration and PID tuning information is not lost during subsequent field
adjustment. In order to perform a field calibration or change PID parameters, a new table must be created.
This is very straight foreword. Commonly, the user desires to change the PID tuning parameters to meet a
particular process requirement but would like to maintain the original gas calibration. In such a case, key
index and values (gas table and PID parameters among others) in the base instance of Controller Calibration
Object can be read and then copied to a second instance, which then can be edited.
User Access
ALTA Profibus Mass Flow devices can operate in the following two different access modes:
User mode:
The user mode is available to any operator. It offers access to a limited set of
parameters. In user mode, it is possible to operate the device and view many functions
but make few changes.
Calibration mode:
The calibration mode is for use by supervisory personnel at OEM and end user sites. It
provides read only access to most functions and write access to certain select functions.
A password is required to enter calibration mode.
In ALTA Profibus Mass Flow devices, the object of interest is the Controller Calibration Object, Slot 102
(0x66hex). Specific access rights are listed in Table 7, page 37.
Table 7: User and Calibration Access Rights
Controller Calibration Object only, Slot 102 (0x66 hex)
Access Level
User Mode
Calibration Mode
Read Only
All Tables:
All Tables:
Read and Write
No write access.
Read and Write access all parameters
listed in page 65-67 except for
gas table 0.
To go to user mode (default), set the value of index 8 in Slot 0x30 to 0.
To go to calibration mode, set the value of index 8 in Slot 0x30 to 0x1234.
Graphical User Interface
To simplify copying of gas tables and editing PID control variables, MKS offers a PC-based graphical user
interface (GUI) kit. This consists of a CD with software and a security hard key that plugs into either the USB
37
Chapter Three: Overview
Overview of ALTA Profibus Digital Operation
or parallel port of the PC, depending on the kit configuration. With a USB hard key, the kit part number is
1001077-001. With a parallel hard key, the part number is 1001067-001.
“Additional Scalar”
When creating new gas tables based on copying an existing calibration table, an Additional Scalar term is
required that relates the full scale flow and Gas Corrections Factor (GCF) for the new table to those of the
original calibration table that is being copied. The GCFs for common gases are available in Appendix B, page
77.
Additional Scalar = (Original Cal. FS Range/Target FS Range) X (GCF of Target Gas/GCF of Cal. Gas)
Additional Scalars are associated with the gas calibration tables, Slot 52(0x34) index 4. Also related to
creating new gas tables are gas standard number and full scale flow amount. Refer to Chapter Four, page 42,
for more detail.
When copying tables using the MKS graphical user interface, the Additional Scalar is automatically
calculated and loaded.
Tuning the MKS ALTA Mass Flow Controller
Tuning optimizes the MKS ALTA Mass Flow Controller’s control of flow rate. The Proportional (P), Integral
(I), and Derivative (D) terms adjust the response of the MKS ALTA Mass Flow Controller to changes in
either setpoint mass flow rate or system mass flow rate. The controller responds to changes in either the flow
rate of the system or the setpoint value.
Accessing PID Variables
The PID tuning parameters are associated with specific gas tables. This allows each gas to have it’s own
optimized PID values, facilitating gas switching while in service. Gas tables and their associated PID values
share the same Controller Calibration Object – Slot 102(0x66 hex) instances.
As with gas tables, all PID settings are protected and may not be edited in user mode. This is for the user’s
protection, preventing accidental resetting of values, which may leave a unit inoperable. However, it in no
way limits the options available to the user. The user, operating in “calibration mode,” simply populates a
new instance with gas table and PID values that may be obtained by copying the contents of an existing
instance. The resulting information may then be edited as needed to obtain the desired performance. The PID
values are located in index 0, 1, and 2 of the Controller Calibration Object Slot 102(0x66 hex).
This approach provides significant flexibility of operation with multiple PID settings to be used with the same
gas (but different gas tables).
For most users, editing PID variables is most readily accomplished using the MKS-supplied graphical user
interface.
Error Signal
An error signal is the difference between the measured mass flow rate and the setpoint mass flow rate. The
error signal is the basis for the operation of the PID algorithm.
Proportional Term
When the Proportional (P) term, or gain, is multiplied by the error signal, a proportional valve drive signal
results. The higher the Proportional (P) control, the greater the change in valve drive signal for a given error
38
Overview of ALTA Profibus Digital Operation
Chapter Three: Overview
signal. Typically, a higher Proportional (P) control setting yields a faster response. However, too high a
Proportional (P) control setting will cause the mass flow rate to oscillate around the setpoint. Too low a
Proportional (P) control setting will result in a slow response from the mass flow controller. Figures 9 and 10
show the effects of the Proportional (P) term.
Figure 9: Effects of the Proportional Term (Low Proportional Term)
Figure 10: Effects of the Proportional Term (High Proportional Term)
Integral Term
The action of the Integral (I) term creates a valve drive signal that is proportional to the magnitude and sign of
the area under the error signal curve (error signal with respect to time). Therefore, as time passes, the integral
term acts to position the valve to reduce the error signal to zero. An increase in the integration time increases
the period of time over which the error signal is generated, and the system response gets slower. Figures 11
and 12 show the effect of the Integral term.
Figure 11: Effects of the Integral Term (Low Integral Term)
39
Chapter Three: Overview
Overview of ALTA Profibus Digital Operation
Figure 12: Effects of the Integral Term (High Integral Term)
Note
To shorten the integration time, increase the I term setting.
Derivative Term
The action of the Derivative (D) term creates a valve drive signal that is proportional to the rate of change of
the error signal over time. In moderate amounts, it can be used to reduce overshoot within the system by
adding predictive capabilities to the control algorithm. At high rates of change of the error signal as it
approaches the setpoint quickly (negative slope of the absolute error over time), the derivative term reduces
the effects of the Proportional term. Excessively high Derivative term values can result in instability of the
controller. In general, ALTA series mass flow controllers control well with the Derivative term equal to zero.
Optimizing PID Control Settings
Optimizing the MKS ALTA Mass Flow Controller response in your system involves adjusting the
Proportional, Integral, and Derivative (PID) terms. Since every system is different, the optimum PID settings
may vary. Operating pressures, process gas density, and target setpoints, all contribute to determining the
ideal settings.
Guidelines for Flow Control Tuning
„
Tuning is best done with setpoint changes from zero to the target flow rate.
„
Units are usually delivered with P values between 2600 and 7000, I values between 140 and 350, and the
D term set at zero. The P term is generally around 20 times the value of the I term. After optimizing for
your process, the PID values generally will remain within this range.
„
Increasing the I term will reduce response time, especially at setpoints below 20% of full scale, but
promote flow overshoot during setpoint changes. Increasing the P term reduces the overshoot because the
controller is able to respond more quickly to the indicated overshoot. However, an excessive P term will
cause controller oscillation, a highly undesirable condition. Thus, caution must be exercised in setting the
P term aggressively.
„
Any adjustments to the P and I terms (D is generally kept at zero) should be done incrementally. For
improved response, I should be increased in increments of 20 and P in increments of 400 between
response tests. If excessive overshoot is observed, the P value may be increased somewhat but should not
be allowed to exceed 10,000. For improved control stability, the I term should be decreased in similar
increments (20 for the I term and 400 for the P term).
40
The Gas Correction Factor (GCF)
Chapter Three: Overview
The Gas Correction Factor (GCF)
A Gas Correction Factor (GCF) is used to indicate the ratio of flow rates of different gases which will
produce the same output voltage from a mass flow device. The GCF is a function of specific heat, density,
and the molecular structure of the gases. Since flow devices are usually calibrated with nitrogen, nitrogen is
used as the baseline gas (GCF = 1). Appendix B, Gas Correction Factors, page 77, lists the gas correction
factors for the most commonly used gases. If the gas you are using is not listed in the appendix, you must
calculate its GCF using the following equation:
GCFx =
(0.3106) (S)
(d x ) (Cp x )
where:
GCFx = Gas Correction Factor for gas X
dx = Standard Density of gas X, g/l (at 0° C and 760 mmHg)
Cpx = Specific Heat of gas X, cal/g ° C
0.3106 = (Standard Density of nitrogen) (Specific heat of nitrogen)
S = Molecular Structure correction factor where S equals:
Note
1.030
for Monatomic gases
1.000
for Diatomic gases
0.941
for Triatomic gases
0.880
for Polyatomic gases
When using the GCF, the accuracy of the flow reading may vary by ±5%, however, the
repeatability will remain ±0.2% of F.S.
41
Chapter Four: Operation
Profibus Connector
Chapter Four: Operation
Profibus Connector
The MKS ALTA Profibus Mass Flow devices have two 9-pin connectors. The female connector is used for
the communications interface with the Profibus network. The male connector is used for the power
connection as well as the valve override connections.
Table 8: Profibus Communications Connector Pinout
Pin Number
1
2
3
4
5
6
7
8
9
Signal Name
NC
NC
(B) Bus Positive
Repeater Control
Gnd Profibus
+5V Profibus
NC
(A) Bus Negative
NC
Figure 13: Profibus Connector Pin Diagram
Power Requirements
The MKS ALTA Profibus Mass Flow Controller requires an input voltage of 20.0 to 25.0 VDC with <300
mA max @ 20 VDC (250 mA @ 24 VDC, nominal). An optional power source is +/-15 VDC (+/-5%) @
210mA. The input voltage is introduced to the mass flow controller through the male D-Sub connector
located on top of the instrument. (See Table 9 for pin out.)
42
Profibus Controls and Indicators
Chapter Four: Operation
Table 9: Profibus Power Connector Pinout
Pin Number
Signal Name
1
Valve Override
2
3
4
5
6
7
8
9
NC
Power +
I/O Ground
Power Return
NC
NC
NC
NC
Figure 14
Relative Voltages with 24V
supply
Relative Voltages with ±15V
supply
Override off =
Pin open circuit.
Valve Open: 5V to 24V
Valve Closed: 0V
Override off =
Pin open circuit.
Valve Open: 5V to15V
Valve Closed: -15V to 0V
24V
0V
0V
+15V
0V
-15V
Power Connector (male) diagram.
Profibus Controls and Indicators
The top panel, shown in the figures beginning on page 26, of the MKS ALTA Mass Flow device contains
several Profibus controls and indicators.
The mass flow device has two standard bi-color (green/red) Profibus status LEDs, (Module Status LED and
Network Status LED) located on top of the instrument, as shown in the figures beginning on page 26. This is
the power-up sequence of the LEDs.
1.
2.
3.
MOD LED is set to solid RED if SYSTEM_ERROR in the Small Receive Data is set, otherwise it is set to solid
GREEN.
.
NET LED is set to solid GREEN if the module is in idle state. It is set to about 2 Hz blinking
GREEN if the module is in executing state(check Device Status in Slot 30, Index 9).
.
NET LED is set to about 5 Hz blinking red if the WINK_STATUS is set to 1 and stops
43
Chapter Four: Operation
Power Up
blinking RED if WINK_STATUS is set to 0.
Station Address
The address (station address) for your device is set using the rotary switches located on the top panel of the
device. The address switches allow you to easily configure units without an operational network, or to
network multiple units quickly.
The address is read from the non-volatile memory. Any changes to the values must be made over the network;
any changes in the rotary switch positions after power-up are ignored.
Station Address Switches
Two 10-position rotary switches, shown in Figure 15, are used to set the station address.
The station address is an integer identification value assigned to each node on the Profibus network.
Station Address
(00-99)
Sets most
significant digit
2
2
4
4
Sets least
significant digit
0
0
6
8
6
Figure 15: Station Address Rotary Switches
The valid STATION ADDRESS switch positions are 0 to 99. Use the switch on the left to set the most
significant digit (MSD), that is, the factor of ten (10, 20, 30...90). Use the switch on the right to set the least
significant digit (LSD), that is, the increments of one (1, 2, 3...9). The switch positions are numbered in a
clockwise direction, to correspond to the increasing address values.
Power Up
1. At power-up, flow device performs checks on its communications link and internal diagnostic checks of
the EEPROM and RAM. The results of these checks are indicated by the color (green or red) and
condition of the status LEDs on top of the instrument.
2. The Module and Network Status LED’s illuminate solid GREEN when initialization is complete.
3. When the device establishes communication with other devices on the network, the Network Status LED
illuminates flashing GREEN.
Warm Up Time
After installation and power up, allow the MKS ALTA Mass Flow Device to warm up for a minimum of 30
minutes.
44
How to Zero the Flow Device
Chapter Four: Operation
How to Zero the Flow Device
Although MKS flow devices are zeroed at the factory prior to shipment, it is normal to check the zero and rezero them, if needed, when they are first installed on the tool.
A mass flow device will provide a zero output signal under “no flow” gas conditions. Zero offset from
improper zeroing procedures can contribute to flow measurement inaccuracy. This is more apparent at the
lower end of the device range.
In order to complete a true zeroing of the device, ensure the following conditions are satisfied prior to
beginning the procedure.
„
Device is installed in the orientation intended for final use (i.e. horizontal base down, vertical flow up,
etc.).
„
Device is powered at operating temperature, preferably for 30 or more minutes.
„
Devices subject to ambient temperatures other than room temperature (23º C) should be zeroed under
those conditions.
„
Pressure drop and flow across the device is reduced to zero. Depending on the gas panel configuration,
this may be done by one of the following procedures.
For Systems With Upstream and Downstream Positive Shut-Off Valves
1. Close both the upstream and downstream shut-off valves.
2. Set the device to 100% setpoint (controllers only).
3. Allow pressure across the device to equilibrate as flow output approaches zero and stabilizes.
4. To ensure that actual flow remains at zero, keep the shut-off valves closed. To the controllers, provide
zero setpoint.
5. Wait one minute and activate the zero function. The zero function may be activated in three different
ways:
„
In cyclic data exchange communication, set the AUTOZERO field in the Send Data structure to 1.
„
Communicating digitally through the software GUI by clicking the Remote Zero button on the main
screen,
„
In DP-V1 Extension message, set the Auto Zero Value (Index 16) to zero in slot 0x31 in the Analog
Sensor Object .
For Systems With Downstream Valve Only
6. Zero the device at typical operating inlet pressure.
7. Close the downstream shut-off valve.
8. Set the device to 100% setpoint (controllers only).
9. Allow pressure to equilibrate across the device as flow output approaches zero and stabilizes.
10. Provide zero setpoint to the device (controllers only).
11. Wait one minute and activate the zero function. The zero function may be activated in three different
ways:
„
In cyclic data exchange communication, set the AUTOZERO field in the Send Data structure to 1.
45
Chapter Four: Operation
How to Override the Valve Via Hardware
(Controllers Only)
„
Communicating digitally through the software GUI by clicking the Remote Zero button on the main
screen,
„
In DP-V1 Extension message, set the Auto Zero Value (Index 16) to zero in slot 0x31 in the Analog
Sensor Object .
For Systems With Upstream Valve Only
12. The device may be re-zeroed with the downstream line under vacuum or atmosphere.
13. Close the upstream valve.
14. Set the device to 100% setpoint (controllers only).
15. The device may be evacuated to vacuum or exposed to atmosphere on the downstream side.
16. For either case, the downstream pressure must be kept constant to ensure there are no fluctuations in
pressure drop across the device, which could induce false flow readings.
17. Allow pressure to equilibrate across the Mass Flow device as flow output approaches zero and stabilizes.
18. Provide zero setpoint to the device (controllers only).
19. Wait one minute and activate the zero function. The zero function may be activated in three different
ways:
„
In cyclic data exchange communication, set the AUTOZERO field in the Send Data structure to 1.
„
Communicating digitally through the software GUI by clicking the Remote Zero button on the main
screen,
„
In DP-V1 Extension message, set the Auto Zero Value (Index 16) to zero in slot 0x31 in the Analog
Sensor Object .
How to Override the Valve Via Hardware (Controllers Only)
The valve override features enables the control valve to be fully opened (purged) or closed independent of the
setpoint command.
To open the valve, apply a +5V (above I/O Ground) signal to pin 1 of the 9-pin male D-sub Power connector.
To close the valve, ground pin 1 with respect to I/O Ground, pin 4.
To disable the hardware override and maintain setpoint control, allow pin 1 to float or put the signal driving
device output in tri-state.
46
Profibus Protocol
Chapter Five: Communication I
Chapter Five: Communication I
Profibus Protocol
Use this manual with the Profibus Specification IEC 61158 Type 3 and IEC 61784. IEC 61158 Type 3.
This chapter defines the application specific objects used by MKS Profibus device. It also defines how system
requirements are mapped to specific objects and index in the Profibus protocol.
Note
This device is intended to be Compliant with Profibus DP-V1 protocol, however
this device does not support Alarms as part of Cyclic Data Communication.
Acknowledgement of Alarms by the Profibus master should be
disabled. This device will not send a status message in response to an
acknowledgement of Alarms by the Profibus master.
Object Models
The object models used by the ALTA Mass Flow device are listed in Table 10. The slots and indices
associated with each object Model are defined in chapter six.
Descriptions are supplied throughout this document for slots and index that are either MKS specific, or
require additional specifications beyond the Profibus and SEMI specifications [1].
Table 10: Object Models Present in the ALTA
Object Model
Slot / ID
(hex)
Send Data
Small Receive Data
Functions
See Page
6 bytes output data (send to MFC)
48
14 bytes input data (received from
MFC)
50
Small Setup
10
19 bytes setup data
50
Small Diagnostics
20
22 bytes diagnostic data
50
Below are DP-V1 Extension Messages
Multiple Instance
14
Select different instances
Reset device
52
Device Status
1E
Read Device Status
53
Device Settings
30
Device Type
Standard Revision
Manufacturer
Manufacturer Model Number
Firmware/Hardware Revisions
Serial Number
Valve Power off Mode
Password
57
(Continued on next page)
47
Chapter Five: Communication I
Cyclic Data Exchange Object
Table 10: Object Models Present in the ALTA (continued)
Object Model
Slot / ID
(hex)
Functions
See
Page
Analog Sensor
31
Flow Data Type
Flow Units
Reading Valid
Indicated Flow Value
Status
Full Scale
Auto Zero Status
Gas Calibration Object
Alarm Trip Point High
Alarm Trip Point Low
Warning Trip Point High
Warning Trip Point Low
Overrange
Underrange
Flow Hours
Flow Totalizer
Auto Zero Value
59
Analog Actuator
32
Valve information:
Valve Data Units
Valve Override Selector
Valve Drive Level Value
Valve Exception Status
Valve Safe State
62
Single Stage Controller
33
Setpoint information:
Setpoint Data Type
Setpoint Units
Setpoint Value
Setpoint Status
Ramp Rate
63
Gas Calibration
34
Gas calibration information:
Standard Number
Valid Sensor Instance
Full Scale
Units
Additional Scalar
64
Controller Calibration
66
MFC Tuning Information
65
Cyclic Data Exchange Object
The Cyclic Data Exchange Object (Send Data) sends 4 bytes of data to the MFC over the Profibus network.
Name:
SET_MFC
48
Cyclic Data Exchange Object
Type:
Size:
Description:
Chapter Five: Communication I
cyclic write (small & full)
6
Analog Output Transducer Block, for small & full
setup
Members:
Name
VALVE_OVERRIDE
AUTOZERO
Add.
1:0
1:2
Type
uint:2
uint:1
REPORT_DIAG
1:3
uint:3
WINK_STATUS
1:6
uint:1
SELECT_GAS_TABLE
reserved
0:2
0:7
uint:4
uint:1
FLOW_SETPOINT
2:0
long
Comment
NORMAL, FLOW_OFF, PURGE
0 to 1 transition activates zeroing if
(VALVE_OVERRIDE==FLOW_OFF && FLOW_SETPOINT < 5%FS)
transition to a new value, triggers the device to
send a new actual diagnosis: 0 = no diagnosis 1 =
diagnosis of small functionality.
set to 1 to blink RED, set to 0 to restore to
normal.
0 to 14; 15 = default gas table is used
in [FLOW_UNIT] in 1/10000 steps. Valve switched off
if setpoint < 2%. Valve switched on if setpoint > 2%
The Cyclic Data Exchange Object (Small Receive Data) receives 14 bytes of data from the MFC over the
Profibus network.
Name: FLOW_MFC Type: cyclic read (small) Size: 14 Description: Analog Input
Transducer Block Members:
Name
HIGH_LIMIT_ALARM
LOW_LIMIT_ALARM
SYSTEM_ERROR
Reserved
Reserved
THERMAL_MASS_FLOW_
RATE
INTERNAL_TEMP
VALVE_DRIVE_LEVEL
Add.
1:0
1:1
1:2
1:3
0:0
2:0
Type
uint:1
uint:1
uint:1
uint:5
uint:8
long
Comment
(flow > HIGH_LIMIT), Hysteresis = 0.5%
(flow < LOW_LIMIT) , Hysteresis = 0.5%
This is exception byte.
6:0
10:0
long
long
temperature in [C] (in 1/10000 steps)
0 to 100% (in 1/10000 steps) 0% = valve is closed
100% = valve is in purge position (full open)
in [FLOW_UNIT] in 1/10000 steps
49
Chapter Five: Communication I
Setup Object
Setup Object
Note
This data structure is not used in the Profibus 1480 Mass Flow devices.
The Small Setup Object (ID 10hex) contains 19 byte of setup data that define the initial settings in the device.
Name: SMALL_SETUP
Type: initial write (small)
Size: 19
Description:
Name
STRUCT_ID
INITIAL_SETUP
BASE_UNIT
OPERATION_MODE
Reserved
Reserved
USER_SPAN
USER_ZERO
HIGH_TRIP_POINT
LOW_TRIP_POINT
Add.
0:0
2:0
2:1
2:2
2:3
Type
uint8
uint:1
uint:1
uint:1
uint:5
1:0
uint:8
3:0
7:0
11:0
15:0
Comment
0x10 (SMALL_SETUP)
THIS, ROM
Display in base unit
0=ANALOG, 1=PROFIBUS
long
long
long
long
5% to 200% in [%] (in 1/10000 steps)
-5% to +5% of full scale (in 1/10000 steps)
-10% to +120% of full scale (in 1/10000 steps)
-10% to +120% of full scale (in 1/10000 steps)
Diagnostics Object
The Small Diagnostic Object (ID 20hex) contains 22 bytes of diagnostic data received from the device.
Name: SMALL_DIAG
Type: diagnose (small)
Size: 22
Description:
Members:
Name
Add. Type
Comment
STRUCT_ID
0:0
uint8
0x20 (SMALL_DIAG)
ALARM_DEVICE_COMMON
1:0
uint:1
specific to network (e.g. power fail)
ALARM_DEVICE_SPECIFIC
1:1
uint:1
specific to flow device (e.g. r/w EPROM)
ALARM_MKS_SPECIFIC
1:2
uint:1
specific to MKS
ALARM_TABLE_ERROR
1:3
uint:1
Reports cal. Table errors
Reserved
1:4
uint:4
PRODUCT_CODE
2:0
uint16
1480
REVISION_CODE
4:0
uint8
A
Exception Status
Identification:
(Table continued on next page)
50
Diagnostics Object
VERSION_CODE
Chapter Five: Communication I
5:0
uint16
0x0102
FULL_SCALE_RNG
7:0
long
full scale range in [FLOW_UNIT] (in 1/10000
steps)
Name
Add. Type
Comment
FLOW_UNIT
11:0 uint8
SCCM, SLM(SCCM is base unit)
Specification:
Status:
INTERNAL_TEMP
12:0 long
temperature in [C] (in 1/10000 steps)
VALVE_DRIVE_LEVEL
16:0 long
0 to 100% (in 1/10000 steps)
RUN_HOURS
20:0 uint16
hours
51
Chapter Six: Communication II - DP-V1 Extension Messages
Multiple Instance Object (DP-V1 Extension
Messages)
Chapter Six: Communication II - DP-V1 Extension Messages
Multiple Instance Object (DP-V1 Extension Messages)
The Multiple Instance Object ((Slot 20 (0x14hex))) contains 5 index, which are accessible through the explicit
messaging by providing the slot, index and its data length.
Index
Access
Name
Type
2
Get
Flash Counter
UINT
3
Get/Set
Gas Instance
UINT
4
Get
Controller Firmware Revision
UINT
5
Get
Counts Full Scale
UINT
Value
0 to 14
The number of count that = 100%
FS.
Flash Counter
Index #02 reports the number of times the firmware was installed.
Gas Instance
Index #03 can be used to set/get the calibration table instances. There are total of 15 calibration instances (gas
tables) available in the Profibus Mass Flow device.
Controller Firmware Revision
Index #04 reports the controller firmware revision.
Count Full Scale
Index #05 reports the count value that = 100% of Full Scale. It is 0x6000(24576).
52
Chapter Six: Communication II - DP-V1 Extension
Messages
Device Status (DP-V1 Extension Message)
(Slot 30 (0x1Ehex))
Index
Access
Name
Type
0
Get
Exception Byte
UINT
1
Get
Common Exception Detail (Alarm)
UINT
2
Get
Device Exception Detail (Alarm)
UINT
3
Get
Manufacturer
(Alarm)
4
Get
Common Exception Detail (Warning)
UINT
5
Get
Device Exception Detail (Warning)
UINT
6
Get
Manufacturer Exception Detail
(Warning)
UINT
7
Get/Set
Alarm Enable
UINT
8
Get/Set
Warning Enable
UINT
Exception
Value
Detail UINT
Exception Status
Index #0 reports the type of alarm or warning condition detected by the instrument. The alarms and warnings
are identified as being:
„
Device Common—alarm/warning common to all SEMI devices
„
Device Specific—specific to mass flow devices
„
Manufacturer Specific—specific to the MKS unit
The response is a byte structured as a bit mapped variable [1]. The device supports the expanded mode of
reporting exceptions. The bit map defining this variable is listed in Table 11.
53
Chapter Six: Communication II - DP-V1 Extension Messages
Device Status (DP-V1 Extension Message)
Table 11: Exception Status Bit Map
Bit
(Least significant to
Most Significant)
Hex Value
0
1
2
3
4
5
6
7
01
02
04
08
10
20
40
80
Meaning
Alarm – Device Common
Alarm – Device Specific
Alarm – Manufacturer Specific
Reserved – Set to 0
Warning – Device Common
Warning – Device Specific
Warning – Manufacturer Specific
0– Reserved
The response returns a binary value with the least significant bit (bit 0) as the last digit. The response values
are additive, therefore, one hexadecimal (hex) value reports all alarm conditions. For example, if the unit
detects a device specific alarm condition, the unit reports a hex value of “02”, where:
02hex = 1 0 0 0 0 0 1 0
Exception Detail (Alarm)
Index #1,2,3 identify the Common Exception Detail (Alarm) condition(s) detected by your mass flow device.
The response is a byte with each bit representing a specific exception (alarm) condition, as listed below. Any
bit that is set indicates that the alarm assigned to that bit is active. The response values are additive, therefore,
one value reports all alarm conditions. The response returns a binary (hex) value with the least significant bit
(bit 0) as the last digit. The exception detail alarm conditions are reported in an unlatched format; the
exception status bit automatically clears as soon as the alarm condition is corrected.
54
Device Status (DP-V1 Extension Message)
Chapter Six: Communication II - DP-V1 Extension
Messages
Table 12: Exception Detail Device Common Alarm Bit Map
Byte [0]
Hex Value
0
1
2
3
4
5
6
7
01
02
04
08
10
20
40
80
Byte [1]
Hex Value
0
1
2
3
4
5
6
7
01
02
04
08
10
20
40
80
Meaning
Exception – Internal Diagnostics
Exception – Microprocessor
Exception – ROM / FLASH Memory
Exception – EEPROM
Exception – RAM Memory
Reserved
Exception – Internal Timer
Reserved
Meaning
Reserved
Reserved
Reserved
Exception – Power Supply Input Voltage
Reserved
Exception – Notify Manufacturer
Exception – Reset
Reserved
Table 13: Exception Detail Device Specific Alarm Bit Map
Byte [0]
Hex Value
0
1
2
3
4
5
6
7
01
02
04
08
10
20
40
80
Meaning
Exception – Flow Reading Valid
Exception – Flow High
Exception – Flow Low
Exception – Flow Control
Exception – Valve Low
Exception – Valve High
Reserved
Reserved
Table 14: Exception Detail Manufacturer Specific Alarm Bit Map
Byte [0]
Hex Value
0
1
2
3
4
5
6
7
01
02
04
08
10
20
40
80
Meaning
Exception – Speedup Result Invalid
Exception – Bridge Controller Error
Exception – Valve Circuit Error
Exception – No Gas Table Available
Exception – Power Ground Level Invalid
Exception – AD / DA Circuitry Error
Exception – Temperature Out of Range
Exception – Bus Controller Error
55
Chapter Six: Communication II - DP-V1 Extension Messages
Device Status (DP-V1 Extension Message)
Exception Detail Warning
Index #4,5,6 identify the specific warning condition(s) detected by your mass flow device. The response is a
byte with each bit representing a specific exception (warning) condition. Any bit that is set indicates that the
alarm assigned to that bit is active. The response values are additive, therefore, one value reports all warning
conditions. The response returns a binary (hex) value with the least significant bit (bit 0) as the last digit. The
exception detail warning conditions are reported in an unlatched format; the exception status bit automatically
clears as soon as the warning condition is corrected.
Alarm Enable
Index #7 specifies whether an alarm condition will be set in the exception status byte where:
0 = Disable
1 = Enable (default)
Warning Enable
Index #8 specifies whether an warning condition will be set in the exception status byte where:
0 = Disable.
1 = Enable (default).
56
Device Settings Object (DP-V1 Extension Messages)
Chapter Six: Communication II - DP-V1 Extension
Messages
Device Settings Object (DP-V1 Extension Messages)
The Device Settings Object (Slot 48 (0x30 hex)) manages the static Device Settings
For each index in Slot 0x30, the maximum string length is 25. When reading, use buffer size 25, the returned
string is null terminated.
Index
Access
Name
Type
Value
0
Get
Device Type
SHORT STRING
MFC
1
Get
Product Code
SHORT STRING
1480
2
Get
Manufacturer’s Name
SHORT STRING
MKS Instruments
3
Get
Manufacturer’s Model
Number
SHORT STRING
1480A12CR14MAA
4
Get
Software Revision
Level
SHORT STRING
1.01
5
Get
Hardware Revision
Level
SHORT STRING
1.04
6
Get
Manufacturer’s Serial
Number
SHORT_STRING
123456
8
Get/Set
Password
UINT
User = 0
Cal = 0x1234
Device Type
Index #0 reports the type of device on the network using an ASCII string. In the response, the unit is defined
as either a mass flow controller (MFC) or a mass flow meter (MFM).
Product Code
Index #01 reports the product code as ASCII string “1480”.
Manufacturer Name
Index #02 reports the maker of the mass flow device, using an ASCII string. The manufacturer of the unit is
always reported as MKS Instruments, identified with the ASCII string “MKS Instruments”
Manufacturer Model Number
Index #03 reports the model number of the instrument with an ASCII string. The response reports the type of
mass flow device in use, identified with the ASCII string such as 1480A12CR14MAA.
Software Revision Level
Index #04 reports the version of microprocessor code in the instrument. The firmware revision will be a text
string of the major and minor revision level as listed in the Identity Object. The format of the field is
57
Chapter Six: Communication II - DP-V1 Extension Messages
Device Settings Object (DP-V1 Extension Messages)
“X.YYY”, where X is the major revision level and YYY is the minor revision level. The default firmware
revision level is “1.000.”
Hardware Revision Level
Index #05 designates the hardware version of your device with a text string of the major and minor revision
level. The format of the field is “X.YYY”, where X is the major revision level and YYY is the minor revision
level. The default hardware revision level is “1.000.”
Serial Number
Index #06 reports the serial number of the device with an ASCII string of up to 25 characters.
Password
Index #08 is used as the password to protect calibration tables as well as other calibrated parameters. Default
calibration password is 0x1234.
To go to user mode (default), set the value of index 8 to 0.
To go to calibration mode, set the value of index 8 to 0x1234.
58
Analog Sensor Object (DP-V1 Extension Messages)
Chapter Six: Communication II - DP-V1 Extension
Messages
Analog Sensor Object (DP-V1 Extension Messages)
The Analog Sensor Object (Slot 49 (0x31hex)) allows you to report the indicated (corrected) flow value, set
and report the high and low trip point alarms, and report various status information on the system flow.
Index No.
Access
Name
Type
Value
1
Get/Set
Data Units
UINT
0x1001=counts,
0x1400=sccm
2
Get
Reading Valid
UINT
0=invalid, 1=valid
3
Get
Value (Flow)
REAL
4
Get
Status
UINT
5
Get
Full Scale
REAL
6
Get
Auto Zero Status
UINT
7
Get/Set
Gas Calibration Object
UINT
8
Get/Set
Alarm Trip Point High
REAL
110%(FS)
9
Get/Set
Alarm Trip Point Low
REAL
-10%(FS)
10
Get/Set
Warning Trip Point High
REAL
110%(FS)
11
Get/Set
Warning Trip Point Low
REAL
-10%(FS)
12
Get
Overrange
REAL
110%(FS)
13
Get
Underrange
REAL
-10%(FS)
14
Get/Set
Flow Totalizer
Unsigned Long
INT (8 bytes)
15
Get/Set
Flow Hours
Unsigned Double
INT (4 bytes)
16
Get/Set
Auto Zero Value
REAL
Flow Units
Index #01 defines the flow units, where:
0x1001 = Counts
0x1400 = sccm(default)
The indices in this object which are affected by the choice of flow units include:
„
Indicated Flow (ID #03)
„
Flow Full Scale (ID # 05)
„
Alarm Trip Points (ID #8 and 9)
„
Warning Trip Points (ID #10 and 11)
59
Chapter Six: Communication II - DP-V1 Extension Messages
„
Over Range (ID #13)
„
Under Range (ID #14)
Analog Sensor Object (DP-V1 Extension Messages)
Flow Reading Valid
Index #02 reports whether or not the flow value reported by Index #03 in this object is valid, where:
0 = Invalid (default)
1 = Valid
Indicated Flow Value
Index #03 reports the value of the indicated flow ,which is dependent on the data unit selected with Index #01
in this object.
Status
Index #04 reports the flow sensor status.
Byte [0]
Hex Value
0
1
2
3
4
5
6
7
01
02
04
08
10
20
40
80
Meaning
High Alarm Exception
Low Alarm Exception
High Warning Exception
Low Warning Exception
Reserved
Reserved
Reserved
Reserved
Flow Full Scale
Index #05 reports the 100% full scale flow value in the units selected with Index #1 in this object. The
acceptable range of this index is 0 to 24576 (0x6000); where 0 corresponds to 0% flow, and 24576 (0x6000)
corresponds to 100% flow or in sccm.
Autozero Status
Index #06 specifies the current status of the autozero function execution. If the autozero function is actively
executing, the field returns a value of 1. If the autozero function is not actively executing, the field returns a
value of 0.
Select Active Programmed Gas (Gas Calibration Object Instance)
Index #07specifies the current active programmed gas (the gas you want to monitor) from the programmed
gas calibration tables that are stored in your device.
60
Analog Sensor Object (DP-V1 Extension Messages)
Chapter Six: Communication II - DP-V1 Extension
Messages
Alarm/Warning High Trip Points
Index #08 specifies the value for the high trip point alarm. Index #10 specifies the value for the high trip
point warning.
If the indicated flow value is greater than the specified value, an alarm/warning status indicator is generated.
Alarm/Warning Low Trip Points
Index #09 specifies the value for the low trip point alarm. Index #11 specifies the value for the low trip point
warning.
If the indicated flow is less than the specified value, an alarm/warning status indicator is generated.
Overrange
Index #12 specifies the highest valid value for the flow output reading.
Underrange
Index #13 specifies the lowest valid value for the flow output reading.
Flow Totalizer
Index #14 reports the volume of gas in standard cubic centimeters (sccm) that has flowed through the device
since the last time the flow totalizer field was set to 0. This field can only be reset to 0. This value is not reset
at power up.
Flow Hours
Index #15 reports the total number of hours the unit has been flowing gas. The resolution of the response is 1
hour. This value is not reset at power up.
Auto Zero Value
Index #16 specifies an offset, in the units selected with Index #01 in this object, which is applied to the
indicated (corrected) flow value for the active programmed gas, where:
Indicated Flow (Index #03) = Sensor Reading + Zero Offset.
The acceptable input range is -5 to +5% of full scale, in the current flow units. The figures beginning on page
26 illustrate where the zero is incorporated into the calculation of the indicated flow value.
61
Chapter Six: Communication II - DP-V1 Extension Messages
S-Analog Actuator Object (DP-V1 Extension
Messages)
S-Analog Actuator Object (DP-V1 Extension Messages)
The S-Analog Actuator Object (Slot 50 (0x32 hex)) contains information on the valve.
Note
The S-Analog Actuator Object is valid for mass flow controllers only. An error
message is returned if you use this object for a mass flow meter.
Index No
Access
Name
Type
Value
1
Get/Set
Data Units
UINT
0x1001 = counts
0x1007 = %FS
0x2D00=Volts
0x2D01=mVolts
2
Get/Set
Override
UINT
3
Get/Set
Value (Valve)
REAL
4
Get
Status
UINT
5
Get/Set
Safe State
UINT
Valve Data Units
Index #01 reports the units that the Valve Drive Level (reported with Index #03 in this object), is reported in,
where:
0x1001 = counts
0x1007 =% Full Scale (default)
0x2D00 = Volts
0x2D01 = mVolts
Valve Override Selector
Index #02 allows you to override the control valve in accordance with the following:
0 = Normal (default)
1 = Closed
2 = Open
4 = Safe State
Valve Drive Level Value
Index #03 reports the value of the valve drive level.
62
Single Stage Controller Object (DP-V1 Extension Messages)
Chapter Six: Communication II - DP-V1 Extension
Messages
Valve Exception Status
Index #04 reports the status of the alarm and warning exceptions in this object. Your mass flow device does
not support the standard Analog Actuator valve alarms, therefore, this index always reports the status as 0.
Valve Safe State
Index #04 defines the normal behavior of the valve whenever there is a loss of power or communication to
the device, where:
0 = Closed
1 = Open
2 = Hold Last Value
Single Stage Controller Object (DP-V1 Extension Messages)
The Single Stage Controller Object (Slot 51 (0x33 hex)) contains the following index:
Index No
Access
Name
Type
Value
1
Get/Set
Data Units
UINT
0x1001=counts,
0x1400=sccm
2
Get/Set
Setpoint
REAL
3
Get
Status
UNIT
4
Get/Set
Ramp Rate
REAL
Setpoint Data Units
Index #01 reports the units for the setpoint value reported with Index #02 in this object, where:
0x1001 = counts
0x1400 = sccm (default)
Setpoint
Index #02 defines the value of the setpoint value (the value to which the device is controlling the flow of gas).
63
Chapter Six: Communication II - DP-V1 Extension Messages
Gas Calibration Object (DP-V1 Extension Messages)
Status
Index #03 reports the status of the alarm and warning exceptions in this object.
Table 15: Controller Status Bit Map
Byte [0]
Hex Value
0
1
2
3
4
5
6
7
01
02
04
08
10
20
40
80
Meaning
Alarm Exception
Warning Exception
Reserved
Reserved
Reserved
Reserved
Reserved
Reserved
Ramp Rate
Index #04 defines the ramp rate at which this object tracks toward the current setpoint value. The ramp rate
specifies how quickly the setpoint is ramped from the previous setpoint value to the current setpoint value.
The acceptable input range is 0 to 12000 milliseconds (msec); the default setting is 0.0.
Gas Calibration Object (DP-V1 Extension Messages)
The Gas Calibration Object (Slot 52 (0x34 hex)) reports the current programmed gas calibration table stored in
your device, and allows you to access and modify the calibration data. Your device can store up to 15
programmed gas calibration tables, each consisting of up to 21 calibration parameters.
This object is used to set the gas number, the full scale and the additional scalar for a given gas table.
Index No.
Access
Name
Type
Value
0
Get/Set *
Gas Standard Number
UINT
13
1
Get
Valid Sensor Instance
UINT
1
2
Get/Set*
Full Scale
REAL
3
Get/Set*
Units
UINT
0x1400 = sccm
0x1401=SLM
4
Get/Set*
Additional Scalar
REAL
* indicates it is settable in calibration mode only
64
1.0
Controller Calibration Object
Chapter Six: Communication II - DP-V1 Extension
Messages
Gas Standard Number
Index #0 reports the SEMI assigned code (or gas standard) number for the specified instance. The gas
standard numbers for the gases and vaporizable material that may be used with your mass flow device are
listed in Appendix B, Gas Correction Factors, page 77.
Valid Sensor Instance
Index #01 reports the active sensor instance; the value is always reported as 1. This index was designed to
identify the active sensor in instruments that can accommodate multiple sensors.
Full Scale Range
Index #02 reports the factory set full scale range, in the specified flow units, for the selected gas.
0x1400 = sccm
0x1401 = slm
Units
Index #03 reports the flow unit (0x1400=sccm, 0x1401=slm).
Additional Scalar
Index #03 reports the scalar correction for the gas referenced in the current instance. This additional scalar
reference can be used to contain the Gas Correction Factor for a specific device.
Controller Calibration Object
The Controller Calibration Object (Slot 102 (0x66 hex)) allows calibration of the parameters, which affect the
performance of the device under operating conditions.
Index No.
Access
Name
Type
Default Value
0
Get/Set *
Controller P
REAL
13000
1
Get/Set *
Controller I
REAL
400
2
Get/Set *
Controller D
REAL
0
9
Get/Set *
Speedup Tau
REAL
52
16
Get/Set *
Gas Table Length
UINT
17
Get/Set *
Sensor Value 0
REAL
18
Get/Set *
Flow Value 0
REAL
19
Get/Set *
Sensor Value 1
REAL
(Table continued on next page)
65
Chapter Six: Communication II - DP-V1 Extension Messages
Name
Controller Calibration Object
Index No.
Access
Type
20
Get/Set *
Flow Value 1
REAL
21
Get/Set *
Sensor Value 2
REAL
22
Get/Set *
Flow Value 2
REAL
23
Get/Set *
Sensor Value 3
REAL
24
Get/Set *
Flow Value 3
REAL
25
Get/Set *
Sensor Value 4
REAL
26
Get/Set *
Flow Value 4
REAL
27
Get/Set *
Sensor Value 5
REAL
28
Get/Set *
Flow Value 5
REAL
29
Get/Set *
Sensor Value 6
REAL
30
Get/Set *
Flow Value 6
REAL
31
Get/Set *
Sensor Value 7
REAL
32
Get/Set *
Flow Value 7
REAL
33
Get/Set *
Sensor Value 8
REAL
34
Get/Set *
Flow Value 8
REAL
35
Get/Set *
Sensor Value 9
REAL
36
Get/Set *
Flow Value 9
REAL
37
Get/Set *
Sensor Value 10
REAL
38
Get/Set *
Flow Value 10
REAL
39
Get/Set *
Sensor Value 11
REAL
40
Get/Set *
Flow Value 11
REAL
41
Get/Set *
Sensor Value 12
REAL
42
Get/Set *
Flow Value 12
REAL
43
Get/Set *
Sensor Value 13
REAL
44
Get/Set *
Flow Value 13
REAL
45
Get/Set *
Sensor Value 14
REAL
46
Get/Set *
Flow Value 14
REAL
47
Get/Set *
Sensor Value 15
REAL
48
Get/Set *
Flow Value 15
REAL
49
Get/Set *
Sensor Value 16
REAL
50
Get/Set *
Flow Value 16
REAL
51
Get/Set *
Sensor Value 17
REAL
66
Default Value
Controller Calibration Object
Chapter Six: Communication II - DP-V1 Extension
Messages
Index No.
Access
Name
Type
52
Get/Set *
Flow Value 17
REAL
53
Get/Set *
Sensor Value 18
REAL
54
Get/Set *
Flow Value 18
REAL
55
Get/Set *
Sensor Value 19
REAL
56
Get/Set *
Flow Value 19
REAL
57
Get/Set *
Sensor Value 20
REAL
58
Get/Set *
Flow Value 20
REAL
Default Value
* indicates it is settable in calibration mode only.
The indices within this object instance are only settable in calibration mode. To enter the calibration mode, set
your password in slot 0x30, index 0x08.
Controller P
P component of the PID controller.
Controller I
I component of the PID controller. High P component values give the possibility of high I component values.
Controller D
D component of the PID controller. Should be zero.
Gas Table Length
Number of calibration points in one gas table.
Speedup Tau
Used to adjust the speedup slope.
Sensor Value X, Flow Value X
These are up to 21sets of values for calibrating the sensor output versus the actual flow through the unit. All
flow and sensor values are interpreted as fractions of full scale e.g. 0.1, 0.2 … where 1.0 equals full scale.
67
Chapter Seven: Maintenance
General Information
Chapter Seven: Maintenance
General Information
In general, no maintenance is required other than proper installation and operation. Periodically check for
wear on the cables and inspect the enclosure for visible signs of damage. If a mass flow device fails to operate
properly on receipt, check for shipping damage, and check the Profibus cable for proper power supply. Any
damage should be reported to the freight carrier and MKS Instruments immediately. If there is no obvious
damage, and the unit fails to operate properly through the Profibus network, obtain an RMA Number (Return
Material Authorization Number) before returning the unit to MKS Instruments for service to expedite
handling and ensure proper servicing of your instrument.
Zero Adjustment
For best accuracy and repeatability, you should check the zero output periodically and reset it, if necessary.
Refer to the zero adjustment procedure, How to Zero the Flow Device page 45.
It is also recommended that the instrument be recalibrated annually if no other time interval has been
specifically established. Refer to the inside of the back cover of this instruction manual for a complete list of
MKS Calibration and Service Centers.
68
Zero Adjustment
Chapter Seven: Maintenance
This page intentionally left blank.
69
Troubleshooting Chart
Chapter Eight: Troubleshooting
Chapter Eight: Troubleshooting
Troubleshooting Chart
Table 16: Troubleshooting Chart
Symptoms
Possible Cause
Remedy
Device does not
power up.
Improper Profibus cable.
Malfunctioning electronics.
Device indicates
negative flow.
Incorrect instrument installation
(backwards) in process system.
Controller does not
track setpoint.
Controller mass
flow rate oscillates
Improper PID settings.
Controller has
excessive closed
conductance.
Device does not
achieve full flow.
Inadequate valve preload.
Too high controller gain
Incorrect upstream pressure regulator
Upstream pressure too high
Excessive valve preload
Upstream pressure is too low for the
system.
Excessive valve preload (controller).
71
Check Profibus network.
Check power cable.
Return unit for service to MKS Calibration
and Service Center.
Reinstall instrument in process system such
that gas flow occurs in the direction of the
arrow on the front of the instrument.
Tune controller according to procedures
outlined in instruction manual.
Reduce gain through Profibus interface.
Check manufacturer’s specifications for
correct upstream pressure regulator
Reduce upstream pressure
Return unit for service to MKS Calibration
and Service Center.
Return unit for service to MKS Calibration
and Service Center.
Increase upstream pressure.
Return unit for service to MKS Calibration
and Service Center.
Chapter Eight: Troubleshooting
Troubleshooting Chart
This page intentionally left blank.
72
Performance Specifications
Appendix A: Product Specifications
Appendix A: Product Specifications
Performance Specifications
Accuracy
Mass Flow Device
CE Compliance
Electromagnetic Compatibility*
1% of reading from 20% to 100% F.S. (with
calibration gas)
0.2% of F.S. < 20% F.S. (with calibration gas)
EMC Directive 89/336/EEC
Control Adjustments
Derivative
Integral
Proportional
Control Repeatability (controller only)
±0.2% Reading.
Leak Integrity
Internal to external
Through closed control valve
<10-9 scc/sec He
1% F.S. (N2 at 25 psig to atmosphere differential)
Maximum Operating Differential Pressure
10 – 40 psid: 10 sccm to 5000 sccm
15 – 40 psid: 10,000 to 30,000 sccm
Maximum Operating Inlet Pressure
150 psig
Mass Flow Control Range
2 to 100% F.S.
Resolution (measurement)
≤0.01% F.S.
Temperature Coefficient
Zero
Span
Settling Time
Warm Up Time
≤ ±0.05% F.S./°C
≤ ±0.08% Reading/°C
< 1 second: 10 – 100% F.S. typical.
1- 3 seconds: < 10% F.S.
30 minutes
* An overall metal braided shielded cable, properly grounded at both ends, is required during use.
73
Appendix A: Product Specifications
Physical Specifications
Physical Specifications
Burst Pressure
1500 psig
Dimensions
1.45” W x 3.00” L (less fittings) x 5.90” H max. (180A, 185A,
1480A, and 1485A)
Fittings
Swagelok 4-VCR® male compatible,
¼” Swagelok compression fittings,
¼” tube stub,
C-Seal downmount,
W-Seal downmount
Full Scale Ranges
Flow
Input Power
10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10,000,
20,000 and 30,000 sccm
20-25 VDC, 300 mA max. (250 mA @ 24 VDC nominal)
Optional: +/-15 VDC (+/-5%) @ 230mA
Power-on surge current
Peak ( ≤1.0 msec )
1.5A
@ 5 msec
250 mA
Maximum Cable Length
Valve (controller only)
Type
Profibus netwok band dependent
Normally closed, (Normally open: not available)
Typical purge rate for N2 at 25 psig (to atmospheric pressure ):
100 sccm to 10000 sccm ----- 150%
20000 sccm to 30000 sccm ---130%
Seat Material
Kel-F®
Normally closed …………………..≤ 200 sccm
Teflon®
Normally closed……………………≥ 500 sccm
Surface Finish
5 µinches, Ra, (1485A)
10 µinches, Ra, (1480A)
Weight
≤ 1.9 lbs (0.86 kg)
Wetted Materials (excluding valve seat)
316L VIM/VAR stainless steel
Environmental Specifications
Ambient Operating Temperature Range
10° to 45° C (50° to 113° F)
Storage Temperature Range
-20° to 65° C (-4° to 149° F)
74
Environmental Specifications
Storage Humidity Range
Appendix A: Product Specifications
0 to 95% Relative Humidity, non-condensing
These product specifications are subject to change without notice.
75
Environmental Specifications
Appendix B: Gas Correction Factors
Appendix B: Gas Correction Factors
Table 17 lists the gas names, symbols, and code numbers for gases and vaporizable materials that may be
used with your digital mass flow device. The gas names are listed alphabetically. Your mass flow device can
store information on a maximum of 15 of these gases.
The information in Table 17 is taken from the SEMI® Standard E52-95, Practice for Referencing Gases Used
in Digital Mass Flow Controllers. The code numbers are integers assigned by SEMI to identify a particular
gas. Contact MKS Instruments for information on materials that are not listed in Table 17.
Note
Standard Pressure is defined as 760 mmHg (14.7 psia).
Standard Temperature is defined as 0oC.
Table 17: Gas Correction Factors
Gas
Symbol
Code Number
Density
g/l @ 0oC
Conversion Factor
Air
Ammonia
Argon
Arsine
Boron Trichloride
Bromine
--NH3
Ar
AsH3
BCl3
Br2
8
29
4
35
70
21
1.293
0.760
1.782
3.478
5.227
7.130
1.00
0.73
1.39
0.67
0.41
0.81
Carbon Dioxide
Carbon Monoxide
Carbon Tetrachloride
Carbon Tetraflouride
(Freon - 14)
Chlorine
CO2
CO
CCl4
CF4
25
9
101
63
1.964
1.250
6.86
3.926
0.70
1.00
0.31
0.42
Cl2
CHClF2
19
3.163
0.86
57
3.858
0.46
C2ClF5
119
6.892
0.24
CClF3
74
4.660
0.38
C2N2
D2
59
14
2.322
0.1799
0.61
1.00
B2H6
CBr2F2
CCl2F2
58
84
1.235
9.362
5.395
0.44
0.19
0.35
CHCl2F
65
4.592
0.42
5.758
0.25
Chlorodifluoromethane
(Freon - 22)
Chloropentafluoroethane
(Freon - 115)
Chlorotrifluoromethane
(Freon - 13)
Cyanogen
Deuterium
Diborane
Dibromodifluoromethane
Dichlorodifluoromethane
(Freon - 12)
Dichlorofluoromethane
(Freon - 21)
Dichloromethysilane
(CH3)2SiCl2
(Continued on next page)
77
Appendix B: Gas Correction Factors
Environmental Specifications
Table 17: Gas Correction Factors (continued)
Gas
Symbol
Code Number
Density
g/l @ 0oC
Conversion Factor
Dichlorosilane
1,2-Dichlorotetrafluoroethane
(Freon - 114)
1,1-Difluoroethylene
(Freon - 1132A)
2,2-Dimethylpropane
Ethane
SiH2Cl2
C2Cl2F4
67
125
4.506
7.626
0.40
0.22
C2H2F2
64
2.857
0.43
C5H12
C2H6
122
54
3.219
1.342
0.21
0.50
Fluorine
Fluoroform
(Freon - 23)
Freon - 11
Freon - 12
Freon - 13
F2
CHF3
18
49
1.695
3.127
0.98
0.50
CCl3F
CCl2F2
CClF3
6.129
5.395
4.660
0.33
0.35
0.38
Freon - 13 B1
Freon - 14
Freon - 21
Freon - 22
Freon - 23
CBrF3
CF4
CHCl2F
CHClF2
CHF3
6.644
3.926
4.592
3.858
3.127
0.37
0.42
0.42
0.46
0.50
Freon - 113
Freon - 114
Freon - 115
Freon - 116
Freon - C318
C2Cl3F3
C2Cl2F4
C2ClF5
C2F6
C4F8
8.360
7.626
6.892
6.157
8.93
0.20
0.22
0.24
0.24
0.164
Freon - 1132A
Helium
Hexafluoroethane
(Freon - 116)
Hydrogen
Hydrogen Bromide
C2H2F2
He
C2F6
1
118
2.857
0.1786
6.157
0.43
1.45
0.24
H2
HBr
7
10
0.0899
3.610
1.01
1.00
Hydrogen Chloride
Hydrogen Fluoride
Isobutylene
Krypton
Methane
HCl
HF
C4H8
Kr
CH4
11
12
106
5
28
1.627
0.893
2.503
3.739
0.715
1.00
1.00
0.29
1.543
0.72
Methyl Fluoride
Molybdenum Hexafluoride
Neon
Nitric Oxide
Nitrogen
CH3F
MoF6
Ne
NO
N2
33
124
2
16
13
1.518
9.366
0.900
1.339
1.250
0.56
0.21
1.46
0.99
1.00
(Continued on next page)
78
Environmental Specifications
Appendix B: Gas Correction Factors
Table 17: Gas Correction Factors (continued)
Gas
Symbol
Code Number
Density
g/l @ 0oC
Conversion Factor
Nitrogen Dioxide
Nitrogen Trifluoride
Nitrous Oxide
Octafluorocyclobutane
(Freon - C318)
Oxygen
NO2
NF3
N2O
C4F8
26
53
27
129
2.052
3.168
1.964
8.93
0.74*
0.48
0.71
0.164
O2
15
1.427
0.993
Pentane
Perfluoropropane
Phosgene
Phosphine
Propane
C5H12
C3F8
COCl2
PH3
C3H8
128
60
31
89
3.219
8.388
4.418
1.517
1.967
0.21
0.17
0.44
0.76
0.36
Propylene
Silane
Silicon Tetrachloride
Silicon Tetrafluoride
Sulfur Dioxide
C3H6
SiH4
SiCl4
SiF4
SO2
69
39
108
88
32
1.877
1.433
7.580
4.643
2.858
0.41
0.60
0.28
0.35
0.69
Sulfur Hexafluoride
Trichlorofluoromethane
(Freon - 11)
Trichlorosilane
1,1,2-Trichloro –
1,2,2-Trifluoroethane
(Freon - 113)
Tungsten Hexafluoride
Xenon
SF6
CCl3F
110
91
6.516
6.129
0.26
0.33
SiHCl3
CCl2FCClF2
or
(C2Cl3F3)
WF6
Xe
147
6.043
8.360
0.33
0.20
13.28
5.858
0.25
1.32
*
121
6
Consult MKS Instruments for this application.
79
Appendix B: Gas Correction Factors
Environmental Specifications
This page intentionally left blank.
80
Model Code Description
Appendix C: Model Code Explanation
Appendix C: Model Code Explanation
Model Code Description
The model code of the MKS ALTA Mass Flow Device defines features of the unit such as device type, flow
range, fittings, valve configuration, connector type, seal material and firmware revision.
1480A
GGG
XXX
Y
A
W
Z
VV
Device Type
Gas Number (Name-plate Gas)
Mass Flow Full Scale Range
Fitting Type
Valve Configuration
Connector Type
Seal Material
Firmware Version
Device Type (180A, 185A, 1480A, or 1485A)
The type identifies your unit as a specific model MKS ALTA Mass Flow Device.
SEMI Gas Code (GGG)
The Name-plate gas the device is calibrated for is identified by the SEMI Gas Code. A partial listing is shown
below. The full list is shown in SEMI Document E052-0703, and may be found on the SEMI website,
www.semi.org, or a complete list shown on the MKS Website at www.MKSINST.com.
Gas
Gas Ordering Code
Gas
Gas Ordering Code
Helium
001
Carbon Dioxide
025
Argon
004
Methane
028
Hydrogen
007
Ammonia
029
Air
008
Silane
039
Nitrogen
013
Acetylene
042
Oxygen
015
Sulfur Hexafluoride
110
Chlorine
019
81
Appendix C: Model Code Explanation
Model Code Description
Mass Flow Full Scale Range (XXX)
The MKS ALTA Mass Flow Device’s mass flow full scale range is indicated by a two digit/one letter code.
The first two digits of this code are the flow full scale range in exponential form. The third letter is the flow
units.
Example: 13C = 1 x 103 sccm
Mass Flow Rate
Ordering Code
10 sccm
11C
20 sccm
21C
50 sccm
51C
100 sccm
12C
200 sccm
22C
500 sccm
52C
1000 sccm
13C
2000 sccm
23C
5000 sccm
53C
10000 sccm
14C
20000 sccm
24C
30000 sccm*
* Meter not available at this range.
34C
Fitting Type (Y)
The MKS ALTA Mass Flow Device fitting options are designated by a letter code.
Fitting Style
Ordering Code
Swagelok VCR-4 male
R
¼” weld stub
A
Swagelok ¼” compression
(1480A only)
S
Downport C-Seal
per SEMI 2787.1
C
Downport W-Seal
per SEMI 2787.3F
H
Note
180A, 185A, 1480A, and 1485A are 1.5” wide body
Valve Configuration (A)
The MKS ALTA Mass Flow Device’s valve configuration is designated by a single number code.
Valve Configuration
Normally Closed
No valve (meter)
Ordering Code
1
3
82
Model Code Description
Appendix C: Model Code Explanation
Connector (W)
The MKS ALTA Mass Flow Device’s connector is designated by a single number code. The MKS ALTA
Profibus Mass Flow Device is available with two 9-pin D-Subminiature connectors.
Connector Type
Two 9-pin D-Sub
Ordering Code
4
Seal Material (Z)
The MKS ALTA Mass Flow Device’s seal material option is designated by a letter code. The MKS ALTA
Mass Flow Devices are available with metal seals.
Seal Material
Ordering Code
M
Metal
Firmware Version (VV)
The MKS ALTA Mass Flow Device’s firmware version options are designated by a two digit number code.
Example: The initial release of the MKS ALTA Mass Flow Controller uses firmware version 10.
Profibus Firmware Version
Ordering Code
14
Note
Unless otherwise specified, MKS will ship firmware current to date of order. To receive
previous software revision levels, please specify to customer service at order placement.
83
Appendix C: Model Code Explanation
Model Code Description
84
General Information
Appendix D: Mass Flow Device Sizing Guidelines
Appendix D: Mass Flow Device Sizing Guidelines
General Information
To select the correct device for an application, you must determine the:
„
Flow device range
The flow device range depends on the desired flow rate and the gas correction factor for the gas to be used.
MKS states the flow device ranges based on flow rate of nitrogen; the flow rate for other gases may vary.
The proper valve configuration depends upon the flow range, inlet pressure, differential pressure across the
unit, and density of the gas. Proper valve configurations have been established for all standard flow ranges
flowing nitrogen under standard operating pressures. These configurations are suitable for most all gases and
pressure conditions.
How To Determine the Flow Device Range
The Type 1480/1485 device is available in ranges of 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10,000,
20,000 and 30,000 sccm (N2 equivalent). To select the appropriate range, you must determine the flow rate of
nitrogen that is equivalent to the flow rate of the desired gas. Calculate the ratio of the Gas Correction Factor
(GCF) of nitrogen (1.00) to the GCF of the desired gas (refer to Appendix B, Gas Correction Factors, page
77), as shown in the following example.
Example
You need a flow rate of 250 sccm of argon (Ar). What range flow device should you use?
1. Find the GCF of Ar (1.39, as shown in Appendix B, Gas Correction Factors, page 77).
2. Insert the GCF of Ar in the following formula:
( GCF of N2)
(x)
=
(GCF of Ar)
(Desired flow rate of Ar)
where x is the equivalent flow rate of nitrogen (sccm).
( 1.00 )
( 1.39 )
=
(x)
( 250 sccm Ar )
x = 180 sccm N2
A flow rate of 250 sccm of Ar will produce a flow rate equivalent to 180 sccm of N2. This falls within the
range of a 200 sccm flow device.
When calculating equivalent N2 flows using gas correction factors, be sure to use a flow device with a
sufficient flow rate range. For example, if the calculated equivalent N2 flow in the example shown above is
205 sccm, use a 500 sccm flow device. The 500 sccm instrument can then be calibrated such that 205 sccm
N2 = full scale.
Note
When using a gas with a density higher than nitrogen, be sure that the control valve Full Scale
range can accommodate the desired flow rate. Please call the MKS Applications group if you
have any questions.
85
Appendix D: Mass Flow Device Sizing Guidelines
How To Determine the Flow Device Range
This page intentionally left blank.
86
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Overview
Appendix E: MKS ALTA Digital MFC Graphical User Interface (GUI)
Overview
The ALTA line of digital mass flow devices have calibration and tuning features, which can be altered to
expand the operating range of the devices. Specifically:
„
Calibration tables can be copied to new gas tables to allow device re-ranging or use of alternative gases.
„
Entirely new calibration tables can be created by users who have appropriate flow standards.
„
Each gas table for flow controllers has different PID tuning parameters associated with it. These can be
edited to provide optimum control performance for a particular gases or process conditions. In some
cases, a user might create a new gas table where the gas and full scale flow range remain the same as an
existing table but only the PID parameters are changed.
„
The ALTA Mass Flow Devices have a 15 gas table capacity.
To support these features, MKS Instruments provides a graphical user interface (GUI), which provides digital
access to the ALTA flow devices. This appendix describes use of the GUI, which supports the Profibus
version of the product.
The GUI is part of a complete software/hardware interface kit, which includes the following components:
„
The GUI software on a CD.
„
A security hard-key that attaches to either the parallel or USB ports of the Windows-based personal
computer.
The kit is available in two configurations:
With USB port security hard key
MKS P/N 1001077-001
With parallel port security hard key
MKS P/N 1001067-001
Equipment Needed
You will need the following equipment:
„
ALTA digital Mass Flow Controller or Mass Flow Meter with Profibus interface.
„
Elements included in the Profibus interface kit:
—
Graphical user interface (GUI) software, “AltaProfibusMFC.exe”
—
One security hard-key, linked to the GUI software
„
Standard Profibus communication cables
„
Hilscher CIF50-PB Profibus communication card
„
Profibus Power supply (24V).
„
Assorted Profibus cables.
Note
Before running this program, you MUST install a Hilscher CIF50-PB Profibus communication
card and its software driver in your PC.
87
Software Setup
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Software Setup
The ALTA digital Mass Flow Controller or Mass Flow Meter with Profibus interface can run under Windows
98/WinNT/2000/XP only.
1. Insert the ALTA Profibus Application Kit CD into your CD-ROM drive. The setup wizard will
automatically start.
If the installation does not automatically start, run Setup.exe.
2. Follow the instructions in the Setup wizard.
3. After completing the GUI software installation, install the Hasp Device Driver by going to
Start Æ Programs Æ Alta Profibus MFC. Click on the “Hasp Device Driver” pull-down option and allow
the driver to install.
Now you can start running the program.
88
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Equipment Setup
Equipment Setup
Power Supply
Security Hard-Key
- For parallel or
USB port
Profibus Cable
ALTA Profibus
MFC
Figure 16: Equipment Setup
89
Starting the GUI
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Starting the GUI
1. Double click the “AltaProfibusMFC.exe” shortcut on your computer desktop. The program starts and
following window appears:
Figure 17: Start Window
2. In the Configuration Mode choice box:
•
if the device is added to the network or its configuration has been changed
choose “Small Setup”. Click OK.
A “Small Setup” window will open. In this window click OK and the window will close.
•
otherwise choose “Run”. Click OK.
3. The following panel appears as the software scans the network.
Figure 18: Scan Device Network
4. A Pop-Up window will appear displaying the address of the device. Click Yes.
90
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Exiting the GUI
The Main Control Panel appears:
Figure 19: Main Control Panel
Exiting the GUI
Always formally exit the program before disconnecting the Mass Flow device. If you hot plug any device,
software must be restarted.
„
Click on the “Exit” button in the lower right corner of the Main Control Panel.
Or:
„
Click on “File” pull-down and then “Exit.”
Description of the Main Control Panel
Remote Zero
The Remote Zero button zeros the ALTA Profibus MFC. Refer to How to Zero the Flow
Device, page 45, for proper zeroing procedures. This is available only in calibration mode.
Exit
The Exit button stops the application. Always formally exit the program before
disconnecting the Mass Flow device. If you hot plug any device, software must be
restarted.
91
User Mode and Calibration Mode
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Setpoint
The Setpoint control sets the flow setpoint in sccm.
Valve
Control Mode
The Valve Control Mode sets whether the device is controlling flow, driving its valve full
open, or closing its valve. Simply click on the desired mode.
Flow
The Flow text box displays the current flow rate in sccm.
Gas Table Index Used to change the running gas table.
Calibration
Mode
Start Data Log
The Calibration Mode is used to select the GUI access level as user or calibration. A
password is required for calibration access. Refer to User Mode and Calibration Mode,
page 92.
Checking the Start Data Log check box will cause data to be logged in the DataLog.csv file
in the current PC drive. This can be opened with Microsoft Excel and then saved as a
spreadsheet.
“Time Scale”, “High Scale”, and “Low Scale” dials are used to adjust the scaling of the flow plot
while viewing. Simply click on the desired values.
Device
Status
The Device Status is used to tell if the unit is running OK or has problem.
“Executing” indicates that the unit is running OK. “Sys_Error” indicates the unit has
problem.
Double click the text box to show what might go wrong. See specifications for detail.
Menu Items
The File Menu includes two options:
Exit
Print Graph (send to your default printer)
The Setup Menu has the following options:
Calibrate Flow is used to calibrate the gas table.
Edit Gas (Add/Select) is used to select, add, or delete gas tables.
Tuning Parameters is used to set PID values for device control tuning.
Password is used to edit the user password in calibration mode.
User Mode and Calibration Mode
The GUI has two access levels, User and Calibration, selected in the Calibration Mode field in the lower right
corner of the Main Control Panel.
User Mode
When in User mode, the operator has the ability to provide the unit with flow setpoints
and then view flow response and flow read-back.
Calibration Mode
When in Calibration mode, the operator has nearly full access to the key device
calibration and tuning features. Calibration mode access is password protected. The GUI
is delivered with a standard password, which can be changed by the responsible
administrator. Also, multiple users can be added, each with their own password.
92
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Note
Calibration Mode Access
Gas table 0 is protected factory-set gas table. Users are not permitted to make any changes to
this gas table in the User of Calibration Mode.
A more detailed summary is provided in the table below.
Table 18: Summary of User and Calibration Mode Capabilities
User Mode
Calibration Mode
Pick Run versus Stop operation.
Same as User mode.
Provide setpoint and view output.
Same as User mode.
Pick control mode: control, close, open.
Same as User mode.
Log flow output data to .csv format file.
Same as User mode.
Create Calibration mode access passwords.
Create new gas tables by copying calibration tables; apply new
gas correction factors (GCFs) and full scale ranges.
Change PID tuning parameters associated with particular gas
tables.
Create new calibration tables, if certified flow standard is
available (Advanced feature).
Calibration Mode Access
1. Click in the Calibration Mode field to reveal a list of choices, which include User and Calibration.
2. Click on Calibration. A small window with fields for the user name and password appears.
Figure 20: Password Control
3. Input the user name and password in the appropriate fields. The GUI is shipped from MKS with the
following default assignments:
User Name: Admin
Password:
cal
The password may be changed or new users with their own password added (as described below).
Note
The User Name and Password are case sensitive.
4. Click OK.
93
Calibration Mode Access
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Changing a Password for Calibration Mode Access
1. On the Main Control Panel, choose Setup Æ Password Æ Change. The following window appears:
Figure 21: Change Password Window
2. Enter the User Name, Old Password, and New Password in the fields provided.
3. Re-type the new password into the Confirm Password field.
4. Click OK.
Adding a Calibration Mode Password for a New User
1. On the Main Control Panel, choose Setup Æ Password Æ New. The following window appears:
Figure 22: Adding a Calibration Mode Password for a New User
2. Enter a new User Name and New Password in the fields provided.
3. Re-type the new password in the Confirm Password field.
4. Click OK.
94
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Setting, Adding, and Deleting Gas Tables
Setting, Adding, and Deleting Gas Tables
Note
In order to work with gas tables, the GUI must be in Calibration mode. This is set on the Main
Control Panel, on the lower right side.
Accessing Gas Table Editing
Pull down the Setup submenu and choose Edit Gas (Add/Select). The module will load the gas tables and the
following window appears:
Figure 23: Edit Gas
The currently active gas table (Table Number 0, in this example) is highlighted in red lettering.
95
Setting, Adding, and Deleting Gas Tables
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Setting a Gas Table and Making the Table Active
1. Point to desired gas table and highlight by clicking on it.
2. Click the Select Gas button.
The gas table choice will be set in the Mass Flow device and made active. It will be highlighted in red in the
Edit Gas window.
Adding a Gas Table
Adding gas is based on copying existing tables. There are several guidelines:
„
Gas table 0 is created by the MKS Factory. It cannot be edited or deleted.
„
When creating a new table, you may copy only from tables originally created by the Factory
„
The full scale flow range of any new tables must fall between 40% and 110% of the original calibration
gas equivalent. For example:
A device with a standard 200 sccm N2 calibration allows tables to be created with N2 equivalent full
scale flows of 80 to 220 sccm. Thus, an additional N2 table with 80 sccm full scale is permitted; but, in
creating an Ar gas table (GCF = 1.39), the specified full scale flow may not be below 111.2 sccm (80 x
1.39). On the other hand, a full scale flow as high as 305.8 sccm (220 x 1.39) is possible.
If an incorrect flow setpoint is input, an error warning will appear. Try again.
The specific steps for adding a new gas table are:
1. In the Edit Gas window, enter the new table instance number in the Set Instance # field.
2. Click the Gas List button and the gas list will appear:
96
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Setting, Adding, and Deleting Gas Tables
Figure 24: Gas List
3. Scroll through the list of available gases to find the desired gas. To choose the gas, double click on any
row for that gas.
The program will return to the Edit Gas window.
4. Click the Add Gas button. The Copy Cal Table window will open.
97
Setting, Adding, and Deleting Gas Tables
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Figure 25: Copy Cal Table
5. Click on the drop down box associated with the From field and choose the desired table to be copied.
Your choice must be among the factory set instances.
6. Enter the input target Full Scale amount.
To assure device accuracy, this value must be within the limits given in the message box on the top.
7. Click the Copy button to create the new table.
Deleting a Gas Table
1. Highlight the gas table to be deleted.
Gas table 0 may be altered by the MKS Factory only. These may not be deleted.
2. Click the Delete Gas button. The table will be deleted from the gas table list.
98
Appendix E: MKS ALTA Digital MFC Graphical User
Interface (GUI)
Adjusting PID Tuning Parameters
Adjusting PID Tuning Parameters
Note
The PID tuning parameters may not be adjusted on factory “created” tables. To update the
tuning parameters on such tables, it is necessary to first copy the table to a new instance.
1. Go to calibration mode and make the desired gas table active. To do so:
Access the Add/Select Gas menu on the Main Control Panel by choosing Setup Æ Edit Gas (Add/
Select).
Choose the gas table associated with the PID parameters to be updated. Make it active by highlighting and
clicking the Select Gas button.
2. Return to the Main Control Panel and select Setup Æ Tuning Parameters. The following window appears:
Figure 26: Tuning Parameters
Use this window to get, modify, and set the PID parameters.
„
Retrieve values in the active table of the ALTA Mass Flow Controller by clicking the Get All button.
„
Update the parameters as desired. Note that MKS generally recommends keeping the Controller D set at
zero.
„
Download all parameters into the device by clicking the Set All button.
99
Was this manual useful for you? yes no
Thank you for your participation!

* Your assessment is very important for improving the work of artificial intelligence, which forms the content of this project

Download PDF

advertisement