User manual | Manual IQ + FLOW Mass Flow / Pressure meters / controllers

Instruction Manual
IQ+FLOW® series
Digital Mass Flow / Pressure Controllers for gases
Doc. no.: 9.17.045U
Date: 30-08-2017
ATTENTION
Please read this Instruction Manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.
Bronkhorst®
Disclaimer
The information in this manual has been reviewed and is believed to be wholly reliable. No responsibility, however, is
assumed for inaccuracies. The material in this manual is for information purposes only.
Copyright
All rights reserved. This documentation is protected by copyright.
Subject to technical and optical changes as well as printing errors. The information contained in this document is subject to
change at any time without prior notification. Bronkhorst High-Tech B.V. reserves the right to modify or improve its
products and modify the contents without being obliged to inform any particular persons or organizations. The device
specifications and the contents of the package may deviate from what is stated in this document.
Symbols
Important information. Disregarding this information could cause injuries to people or damage to the instrument or
installation.
Helpful information. This information will facilitate the use of the instrument.
Additional info available on the internet or from your local sales representative.
Receipt of equipment
Check the outside packaging box for damage incurred during shipment. If the packaging box is damaged, then the local
carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your
local sales representative.
Carefully remove the equipment from the packaging box. Verify that the equipment was not damaged during shipment.
Should the equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At
the same time a report should be submitted to your local sales representative.
Check the packing list to ensure that you received all of the items within the scope of delivery.
Do not discard spare or replacement parts with the packaging material and inspect the contents for damage.
Refer to Removal and return instructions about return shipment procedures.
Equipment storage
The equipment should be stored in its original package in a cupboard warehouse or similar. Care should be taken not to
subject the equipment to excessive temperatures or humidity.
2
Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
9.17.045U
Bronkhorst®
Warranty
Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date
of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical
damage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are
normally warranted for one year or the balance of the original warranty, whichever is the longer.
See paragraph 9 of the Conditions of sales:
http://www.bronkhorst.com/files/corporate_headquarters/sales_conditions/en_general_terms_of_sales.pdf
The warranty includes all initial and latent defects, random failures, and indeterminable internal causes.
It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock
etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is
performed under warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect to
our factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping
methods/carriers are paid by the customer.
General safety precautions
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety
precautions required to avoid possible injury. Read the operating information carefully before using the product.
Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables for cracks or breaks before each use.
The module and accessories must be used in accordance with their specifications and operating instructions, otherwise the
safety of the equipment may be impaired.
If required, replace fuses with the same type and rating for continued protection against fire hazard.
Opening of the equipment is not allowed. There are no repairable parts inside. In case of a defect please return the
equipment to Bronkhorst High-Tech B.V..
One or more warning signs may be present on different parts of the product. These signs have the following meaning:
Consult the instruction manual for handling instructions
Surface may get hot during operation
Shock hazard; electrical parts inside
To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst. Standard
fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are
not safety related may be obtained from other suppliers, as long as they are equivalent to the original component. Selected
parts should be obtained only through Bronkhorst, to maintain accuracy and functionality of the product. If you are unsure
about the relevance of a replacement component, contact Bronkhorst for information.
9.17.045U
Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
3
Bronkhorst®
4
Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
9.17.045U
Bronkhorst®
Table of contents
1
............................................................................................................7
Introduction
1.1
1.2
. . . . manual
........................................................................................................7
Scope of this
............................................................................................................7
Product description
1.3
. . other
. . . . . . .applicable
. . . . . . . . . . .documents
......................................................................................7
References. .to
2
...........................................................................................................8
Starting .up
2.1
............................................................................................................8
Check properties
. . . . . .test
. . . . inspection
..................................................................................................8
Rated pressure
2.2
2.3
2.4
2.5
2.6
2.7
2.8
2.9
2.10
2.11
2.12
2.13
............................................................................................................8
Check piping
............................................................................................................8
Install system
Leak check. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
............................................................................................................9
Electrical connection
. . . . . . .operation
.....................................................................................................9
Analog / digital
. . . . . . . . .switch
. . . . . . .operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Multi-functional
Purging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Zeroing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Calibration
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Supply pressure
2.13.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Model key
Model key
. . .IQF
. . . ./. IQP
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.13.2
Model key
. . .IQM
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Basic operation
3.1
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Analog operation
3.2
3.3
3.3.1
. . . . . . . . . .micro-switch,
. . . . . . . . . . . . . .LEDs
. . . . . .and
. . . . rotary
. . . . . . .switches
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Manual interface:
Micro-switch
. . . . . operation
. . . . . . . . . . .(single-channel
. . . . . . . . . . . . . . . . versions
. . . . . . . . . only)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3.3.2
LED functions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
3.3.3
Rotary switch
. . . . . .operation
. . . . . . . . . . (multi-channel
. . . . . . . . . . . . . . . . versions
. . . . . . . . . only)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
3.4
3.4.1
. . . .operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Basic RS232
Hook-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.4.2
Dynamic .Data
. . . . . Exchange
. . . . . . . . . . .(DDE)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.4.3
FlowDDE. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.4.4
Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.4.5
FlowDDE. parameter
. . . . . . . . . . . numbers
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.4.6
Baud rate. .setup
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.5
3.5.1
. . . .operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Basic RS485
Hook-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.5.2
Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
3.5.3
Slave address,
. . . . . . baud
. . . . . . rate
. . . . .and
. . . . parity
. . . . . . . setup
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
3.6
3.6.1
. . . . . . . . . and
. . . . .properties
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Basic parameters
Introduction
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.6.2
Basic measurement
. . . . . . . . . . . .and
. . . . control
. . . . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.6.3
Basic identification
. . . . . . . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
4
. . . . operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Advanced
4.1
4.1.1
. . . . .changing
. . . . . . . . . . instrument
. . . . . . . . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Reading and
Special parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
4.1.2
Fluid information
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
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Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
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Bronkhorst®
4.1.3
Advanced. . measurement
. . . . . . . . . . . . . . .and
. . . . control
. . . . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
4.1.4
Controller. . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
4.1.5
Display filter
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
4.1.6
Alarm / Status
. . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
4.1.7
Counter parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
4.2
4.2.1
. . . . . . . . . . . features
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Special instrument
Auto zeroing
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
4.2.2
Changing. . default
. . . . . . . . control
. . . . . . . . mode
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
4.2.3
Disabling. .micro
. . . . . . switch
. . . . . . . (single-channel
. . . . . . . . . . . . . . . . .versions
. . . . . . . . .only)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
4.2.4
Setting digital
. . . . . . output
. . . . . . . . (multi-channel
. . . . . . . . . . . . . . . .versions
. . . . . . . . . only)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
4.2.5
Changing. . slave
. . . . . .address,
. . . . . . . . .baud
. . . . . .rate
. . . . and
. . . . . parity
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
5
. . . . . . . . . . . . .and
. . . . .service
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Troubleshooting
5.1
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
LED indication
5.2
5.3
5.4
. . . . . . . . . summary
. . . . . . . . . . general
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Troubleshooting
Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
6
. . .and
. . . . .return
. . . . . . . .instructions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Removal
6
Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
9.17.045U
Bronkhorst®
1
Introduction
1.1
Scope of this manual
This manual covers the IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for gases. It includes product information,
installation instructions, operation, maintenance and troubleshooting.
1.2
Product description
The IQ+FLOW® series is one of the smallest mass flow, chip based, instruments of its kind for applications with pressure
conditions up to 10 bar (145 psi) and temperatures between 5 to 50 °C (41 to 122 °F). Due to the use of micro system
technology, ultra compact flow controllers are realised with dimensions of only 20 x 40 x 60 mm. The (IQF) flow controllers
are able to measure and control flow rates of 10 mln/min FS up to 5 ln/min FS. The (IQP) pressure controllers are available in
ranges from 0.3 to 150 psi (0.02 to 10 bar). The IQ+FLOW® series has a modular concept with combinations of 20 mm
footprint modules, available as single instruments, but also as multiple channel arrangements. A very compact manifold
(IQM) system can be constructed, with one multi-channel digital pc-board (per 3 channels) in a single housing. Additional
filters, control valves and shut-off valves are available with the same footprints to meet customer demands. The IQF flow
sensor is a fast-response chip sensor, with the main advantage of fast and reliable control response. This is possible due to
the MBC3-based pc-board and the flow sensor, which output signal very accurately corresponds with the real flow
behavior.
Communication with the devices can be either in analog mode or digital over RS232 or RS485. Communication over RS232 is
established with the Propar (FLOW-BUS) protocol. With digital operation over RS485 a bus-system with multiple instruments
can be set up. Modbus RTU/ASCII and FLOW-BUS protocols are supported (some exceptions for multi-channel versions, see
section 3).
1.3
References to other applicable documents
Instructions:
· IQ+FLOW® Quick Installation Guide (document nr. 9.17.074)
· Operation instructions digital instruments (document nr. 9.17.023)
· RS232 interface with FLOW-BUS for digital instruments (document nr. 9.17.027)
· Modbus slave interface for digital Mass Flow / Pressure instruments (document nr. 9.17.035)
Technical drawings:
· Hook-up diagram IQ+FLOW® RS232/RS485 + Analog I/O (document nr. 9.16.101)
· Hook-up diagram IQ+FLOW® Manifold (multi-channel) (document nr. 9.16.090)
· Dimensional drawing IQF/IQP (document nr. 7.05.870)
· Dimensional drawing IQFD/IQPD (document nr. 7.05.871)
· Dimensional drawing IQM (document nr. 7.05.760)
These documents can be downloaded from http://www.bronkhorst.com/en/downloads and are available by request
at our local sales & service representatives
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2
Starting up
2.1
Check properties
1. Check IQ +FLOW® properties
Before installing it is important to read the label on the back of the instrument and check:
· Instrument type:
- gas (IQF) red label or
- pressure (IQP) yellow label
· Flow rate
· Fluid to be measured / controlled
· Up- and downstream pressure
· Input and output signals
· Temperature
IQ(F/M) - Gas Flow
IQP - Pressure
IQ+FLOW® instruments are designed for dry, clean, inert and non-explosive gases. Do not use the instruments for gases that
do not belong to this category.
2.2
Rated pressure test inspection
Bronkhorst® instruments are pressure tested to at least 1.5 times the requested working process
conditions. Before installation, make sure that the tested pressure is in accordance with the safety
factor of your application. The tested pressure should always be higher than the maximum
operating pressure.
The tested pressure is specified on the instrument with a red sticker. If this sticker is missing or if the specified pressure is
insufficient, the instrument must not be used and should be returned to the factory.
Disassembling the instrument and/or replacing parts of it will invalidate the pressure test specification.
2.3
Check piping
For reliable measurement, always make sure that the fluid stream is clean. Use
filters to ensure a clean, moisture- and oil-free gas stream. Recommended poresize: 7 µm. If back flow can occur, a downstream filter is recommended too. Be
aware of the pressure drop caused by using filters.
2.4
Install system
For IQ+FLOW® the upright position is preferred. When using an IQ+FLOW®
instrument in up- or downward position make sure to “zero” the instrument
prior to use (see section 2.10). Avoid installation in close proximity of
mechanic vibration and/or heat sources. The housing of the instrument is
according to class IP40, which means that the instrument is suitable for
indoor (dry) applications, like laboratories or well protected (OEM)
housings.
Install the IQ+FLOW® instrument in the line, in accordance with the
direction of the FLOW arrow. The arrow for flow direction is indicated on
the body of the instrument. If applicable follow the guidelines of the supplier
of the fittings. Special types of fittings are available on request.
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Compression type fittings
For leak tight installation of compression type fittings make sure that the tube is inserted up to the shoulder in the fitting
body and that no dirt or dust is present on tube, ferrules or fittings. Tighten the nut finger tight; while holding the
instrument, then tighten the nut one turn.
10-32 UNF fittings
Tighten the 10-32 UNF fittings according to the instructions of the
supplier of the fittings.
Only use 1/16” tubing with a straight and clean cut without burrs to
ensure leak tightness. Preferably deburr the tubing prior to installation. A
new ferrule connection must be made for each new adapter to ensure
leak-tightness and minimum dead volume, due to variances in the
adapter dimensions.
Mounting downported instruments
For downported instruments make sure that the seals are present at the bottom, that the surfaces are undamaged and that
they are dry and free from dirt or dust.
2.5
Leak check
Check the system for leaks before applying pressure, especially if toxic, explosive or other dangerous fluids are used.
2.6
Electrical connection
Electrical connections must be made with a standard cable, according to the IQ+FLOW® hook-up diagram. Several hookup examples and standard cables can be found in section 3.
IQ+FLOW® instruments are powered with +15…+24 Vdc.
The devices contain electronic components that are susceptible to damage by electrostatic discharge. Proper handling
procedures must be taken during installation, removing and connecting the electronics.
The devices described in this manual carry the CE-mark and are compliant with the concerning EMC requirements.
However, compliance with the EMC requirements is not possible without the use of proper cables and connector/gland
assemblies Bronkhorst recommends the use of their standard cables. These cables have the right connectors and if loose
ends are used, these will be marked to prevent wrong connection. When using other cables, cable wire diameters should be
sufficient to carry the supply current, and voltage loss must be kept as low as possible. When in doubt, contact your
distributor.
When connecting the product to other devices (for instance a PLC), be sure that the integrity of the shielding is not affected.
Do not use unshielded wire terminals.
2.7
Analog / digital operation
Analog operation (single channel versions only)
For analog operation refer to the “Hook-up diagram IQ+FLOW®” or use an RJ-45
loose-end cable (7.03.419) to connect the required signals.
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Digital RS232 operation
Digital operation over RS232 can be established when
using the following setup. Using a RS232 cable or a USBRS232 converter with a PC will allow you to use (free)
Bronkhorst® software for Windows, such as FlowDDE and
FlowPlot. See also section 3.4.
Digital RS485 operation
With digital operation over RS485 a bus-system with multiple instruments can be set up. See section 3.5 for possible
systems.
2.8
Multi-functional switch operation
Micro-switch operation (single channel versions only)
Using the micro-switch on the instruments, several actions can be monitored and
started. The green LED is used for status indication. The red LED is used for
errors/warnings/messages. The micro-switch can be used to start several actions,
such as auto-zero, restore factory settings and bus-initialisation actions, if
applicable. See specific zero-procedure below and section 3.3 for more details.
Multi-functional switch
Status LED
Error/Warning LED
Rotary switch operation (multi-channel versions only)
Select the communication type and Baud rate with the “COMM. TYPE” switch. Select
the node address with the “MSD” and “LSD” switch (e.g. MSD = 1 and LSD = 9 selects
node 19 for channel 1, but also node 20 and 21 for channels 2 and 3). See section 3.3
for more details.
2.9
Purging
Do not apply pressure until electrical connections are made. When applying pressure to the system, avoid pressure shocks in
the system and increase pressure gradually. Also decrease pressure gradually when required.
In systems for use with corrosive, reactive or explosive media, purging for at least 30 minutes with a dry, inert gas (like
Nitrogen or Argon) is absolutely necessary before use. After use with these media, complete purging is also required before
exposing the system to air.
For best accuracy, allow the IQ+FLOW® to warm up and stabilize for at least 30 minutes before starting measurement
and/or controlling of the fluid stream(s). This may be done with or without gas flow.
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2.10
Zeroing
The zero point of each instrument is factory adjusted. If required the zero point can be re-adjusted over RS232 or by means
of using the micro-switch. Procedure for zeroing by-micro switch (not for pressure meter/controller):
· Warm-up, pressure up the system and fill the instrument according to the process conditions.
· Make sure no flow is going through the instrument by closing valves near the instrument.
· The setpoint must be zero.
· Press micro-switch and hold it. After a short time the red LED will go ON and OFF, then the green LED will go ON. At
that moment release the micro-switch.
· The zeroing procedure will start at that moment and the green LED will blink fast. The zeroing procedure waits for a
stable signal and saves the zero. If the signal is not stable, zeroing will take long and the nearest point to zero is accepted.
The procedure will take approximately 10 seconds.
· When the indication is showing 0% signal and the green indication LED is burning continuously again, the zeroing
action was successful.
2.11
Calibration
Each IQ+FLOW® instrument is factory calibrated. Bronkhorst® certifies that all instruments meet the rated accuracy.
Calibration is performed using measurement standards traceable to the standards of the Dutch Metrology Institute (VSL).
Calibration certificates are included in the shipment. When operated properly (clean gas, no pressure shocks, no vibrations,
no thermal shocks, etc.), regular maintenance is not required. However, periodical inspection, recalibration or verification
of the accuracy may be subject to individual requirements of the end-user.
2.12
Supply pressure
It is recommended to turn on power before applying pressure on the instrument and to switch off power after removing
pressure.
Turn on fluid supply gently. Avoid pressure shocks and bring the instrument gradually up to the level of the actual operating
conditions. Also switch off fluid supply gently.
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2.13
Model key
2.13.1
Model key IQF / IQP
2.13.2
Model key IQM
* Each channel of an instrument will be provided an additional letter after the serial number (e.g. M########AA).
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3
Basic operation
3.1
General
An IQ+FLOW® instrument must be powered with +15…+24 Vdc according to the applicable hook-up diagram, supplied with
the instrument. The instrument can be operated by means of:
· Analog interface: 0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA (single-channel versions only)
· Digital RS232 interface (FLOW-BUS (Propar) protocol)
· Digital RS485 interface (Modbus RTU, Modbus ASCII or FLOW-BUS protocols)
By default the instrument is set as specified. The table below lists the supported interfaces for single-channel and multichannel versions.
Analog interface
(section 3.2)
Digital RS232 interface
(section 3.4)
Digital RS485 interface
(section 3.5)
IQF/IQP
(singlechannel)
0…5 Vdc; 0…10
Vdc;
0…20 mA; 4…20
mA
(software selectable)
FLOW-BUS (Propar) protocol on 9600,
19200, 38400, 57600 or 115200 Baud
(software selectable)
Modbus RTU and Modbus ASCII
protocols on 9600, 19200, 38400, 56000,
57600 or 115200 Baud; FLOW-BUS
protocol on 187500 or 400000 Baud
(software selectable)
IQM
(multichannel)
Not supported
FLOW-BUS (Propar) protocol on 38400
or 115200 Baud (select with rotary
switch)
Modbus RTU protocol on 9600, 19200 or
38400 Baud (select with rotary switch)
3.2
Analog operation
Analog operation is only possible with single-channel IQ+FLOW® instruments. Multi-channel instruments can only be
operated digitally. At analog operation the following signals are available:
· Measured value (analog output) at pin 2
· Setpoint (analog input/setpoint) at pin 3
The valve output is no longer available as analog signal with IQ+FLOW®. The selected analog interface (0…5 Vdc; 0…10 Vdc;
0…20 mA or 4…20 mA) can be found in the model key of the instrument. Refer to Section 2.13.
When operating the instrument through the analog interface it is possible to connect the instrument simultaneously to
RS232 for reading/changing parameters (e.g. settings or fluid selection).
Hook-up
For analog operation either an RJ-45 loose-end cable or an RJ-45 to 9-pin sub-D converter may be used to connect the
required signals.
Refer to the “Hook-up diagram IQ+FLOW®” or use an
RJ-45 loose-end cable (7.03.419) to connect the required
signals.
9.17.045U
When using a Bronkhorst® readout unit use only an RJ45 cable (7.03.236) in combination with the RJ-45 to 9pin sub-D converter (7.03.376). With these items the pin
configuration is unchanged.
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3.3
Manual interface: micro-switch, LEDs and rotary switches
In this section the manual instrument interfaces are described. In section 3.3.1 the micro-switch operation is explained (if
present), section 3.3.2 specifies the LED functionality and section 3.3.3 covers the rotary switch operation.
3.3.1
Micro-switch operation (single-channel versions only)
By means of manual operation of the micro push-button switch some important actions for the instrument can be selected
or started. These options are available in both analog and digital operation mode.
These functions are:
· Reset alarm
· Reset instrument (firmware program reset)
· Auto-zeroing
· Restore factory settings (in case of accidently changing of the settings)
Using digital RS232 or RS485 operation it is also possible to set:
· Bus-address (only required for RS485)
· Baudrate
· Change control mode
Multi-functional switch
Status LED
Error/Warning LED
The tables below describe the micro-switch functions that can be started in normal operation mode and during power-up:
LEDs
Green n
Red n
Time
Pushed
Indication
Off
Off
0 – 1 sec.
No action. Pressing a switch shortly by accident will not start any
unwanted reaction of instrument.
Pressing the switch 3x briefly with intervals of max. 1 sec. forces the
instrument to indicate its bus-address and baud rate. Check section 3.5 for
more details.
Off
Off
1 – 4 sec.
In case of min/max alarm or counter batch reached: Reset alarm (only if
reset by keyboard has been enabled)
For FLOW-BUS only: if the node address is occupied, this function will
install a free node-address on FLOW-BUS.
Off
On
4 – 8 sec.
Reset instrument
Instrument program will be restarted and all warning and error messages
will be cleared. During start-up the instrument will perform a (new) selftest.
On
Off
8 – 12 sec.
Auto-zero
Instrument will be re-adjusted for measurement of zero-flow (not for
pressure meter/controller). See section 2.10.
On
On
12 – 16 sec.
Prepare instrument for FLASH mode for firmware update.
Instrument shuts down and both LEDs turn off.
At next power-up instrument will be active again.
LED indications using micro-switch at normal operation mode of an instrument
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LEDs
Green n
Red n
Time
Pushed
Indication
Off
Off
0 – 4 sec.
No action. Pressing a switch shortly by accident will not start any
unwanted reaction of the instrument.
Off
Normal
flash
0,2 sec on,
0,2 sec off
4 – 8 sec.
Restore factory settings
All parameter settings (except field bus settings) will be restored to
situation of final test at Bronkhorst® production.
Normal
flash
0,2 sec on,
0,2 sec off
On
8 – 12 sec.
For FLOW-BUS only: install a free node-address on FLOW-BUS.
Normal
flash
0,2 sec on,
0,2 sec off
Normal
flash
0,2 sec on,
0,2 sec off
12 – 16 sec
Activate 'Configuration Mode'. The baud rate and bus type are set to 38k4
and RS232 FLOW-BUS (Propar). The 'Configuration Mode' is recognized by
the green LED blinking 2 sec on, 0,1 sec off. The 'Configuration Mode' is
deactivated only after applying this micro-switch action again.
LED indications using micro-switch at power-up situation of an instrument
Change control mode
For switching between different functions in use of a digital meter or controller several modes are available. More
information about the available control modes can be found at parameter “Control mode”.
Pressing the switch 4x briefly with intervals of max. 1 second in normal running/operation mode will trigger the instrument
to “change” its control mode.
Change current control mode (press switch 4x briefly)
Step
1
Action
Indication
Set tens of
setpoint / control
mode number
n green LED flashes
0.1 sec on
0.1 sec off
Time
time-out:
60 sec
Set units of setpoint n red LED flashes
/ control mode
0.1 sec on
number
0.1 sec off
Count-flashes
start when switch
is pressed:
0.5 sec on
0.5 sec off
Press switch and count green flashes for tens of
control mode number.
Release when wanted amount has been count.
Counts up to max. 2 and than starts at 0 again.
When counting fails, keep switch pressed and restart
counting for next attempt
Count-flashes
start when switch
is pressed:
0.5 sec on
0.5 sec off
2
Handling
time-out:
60 sec
Press switch and count red flashes for units of control
mode number.
Release when wanted amount has been count.
Counts up to max. 9 and than starts at 0 again. When
counting failed, keep switch pressed and restart
counting for next attempt.
Instrument returns to normal running/operation mode.
Changes are valid when they are made within the time-out times.
See parameter ‘Control mode’ for behavior at power-up of the instrument.
Value zero will be indicated by a period of 1 sec. off (0.5 sec. off + 0.5 sec. off).
When value zero is wanted, press switch shortly and release it again within 1 sec.
Before each action of flash-counting, the LED’s to be used for counting will flash in a high frequency.
(Pattern: 0.1 sec on, 0.1 sec off). As soon as the switch is pressed-down, this LED (or both LED’s) will be off and the counting
sequence will start.
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3.3.2
LED functions
The LEDs on top of the instrument can also be used for manual operation of some options. The green LED will indicate in
what mode the instrument is active. The red LED will indicate error/warning situations.
For details see “Manual interface: micro-switch and LEDs” in Operation Instructions Digital Instruments:
http://www.bronkhorst.com/files/downloads/manuals_english/917023_operation_instructions_digital_instr
uments.pdf (document nr. 9.17.023, Chapter 11)
3.3.3
Rotary switch operation (multi-channel versions only)
The IQ+FLOW® multi-channel instruments are equipped with rotary switches for selection of communication type, baud rate
and node address.
Communication type switch
With the 'COMM. TYPE' switch the following communication types can be selected:
0. RS485 9k6: Modbus RTU protocol with baud rate 9600, EVEN parity
1. RS485 19k2: Modbus RTU protocol with baud rate 19200, EVEN parity
2. RS485 38k4: Modbus RTU protocol with baud rate 38400, EVEN partiy
3. RS232 38k4: FLOW-BUS protocol with baud rate 38400
4. RS232 115k2: FLOW-BUS protocol with baud rate 115200
Node address switches
With the two 'NODE ADDRESS' switches the node address of the instrument channels can be selected. The 'MSD' (Most
Significant Digit) sets the first digit (tens), the 'LSD' (Least Significant Digit) sets the second digit (units). The node address of
channel 1 is set with the switches, the channels 2 and 3 receive 'node address' + 1 and 'node address' + 2 respectively (e.g.
MSD = 1 and LSD = 9 selects node 19 for channel 1, but also node 20 and 21 for channels 2 and 3).
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3.4
Basic RS232 operation
Digital operation adds a lot of extra features (compared to analog operation) to the instruments, such as:
· Up to eight selectable fluids (if installed)
· Direct reading at readout/control module or host computer
· Testing and self diagnosis
· Identification (serial number, model number, device type, user tag)
· Adjustable minimal and maximal alarm limits
· (Batch) counter
3.4.1
Hook-up
Connecting an IQ+FLOW® instrument to a COM port of a pc
requires a special cable (7.03.426) which changes the
appropriate pin configuration. Optionally use an RS232 to
USB2.0 converter (9.02.122) to connect to a USB port. Use the
split cable (Y-adapter 7.03.241) in combination with the Plugin Power Supply (7.03.424) for powering the instrument.
Instead of using a COM or USB port, it is also possible to
connect the RS232 pinning manually using the loose-end
cable (7.03.419), typically for connection to PLC or
microcontroller devices.
3.4.2
Dynamic Data Exchange (DDE)
RS232 communication can be used for operating the instrument using the Bronkhorst® FlowDDE server application.
Dynamic Data Exchange (DDE) provides the user a basic level of interprocess communication between Windows
applications. FlowDDE is a DDE server application. Together with a client-application, either self-made or with a SCADAprogram from third parties, it is possible to create an easy way of data exchange between the flow controller and a
Windows application. For example, a cell in Microsoft Excel could be linked to the measured value of the IQ+FLOW® and
when the measured value changes, it will be updated automatically in the Excel spreadsheet.
3.4.3
FlowDDE
The FlowDDE server also offers a lot of test facilities and user-adjustable settings for efficient communication with the
connected flow/pressure meter or controller. How to setup a DDE link with FlowDDE is described in the help-file of the
FlowDDE application. Programming examples are available for making applications in: Visual Basic, LabView and Microsoft
Excel.
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3.4.4
Software
Examples of free Bronkhorst® DDE client applications: FlowDDE, FlowPlot and FlowView. Other software programs
supporting DDE are for example MS-Office, LabView, Intouch and Wizcon.
Bronkhorst® software programs “FlowView” (left) and “FlowPlot” (right)
FlowDDE and other Bronkhorst applications are available on the support CD or can be downloaded from the Bronkhorst
internet site: http://www.bronkhorst.com/en/products/accessories_and_software/bronkhorst_flowware/
3.4.5
FlowDDE parameter numbers
Reading/changing parameter values via FlowDDE offers the user a different and user-friendly interface to the instrument. A
DDE-parameter number is a unique number in a special FlowDDE instruments/parameter database and not the same as the
parameter number from the process on an instrument. Node-address and process number will be translated by FlowDDE to
a channel number.
An instrument parameter can be changed by using the application name: 'FlowDDE' with only:
· topic, used for channel number: 'C(X)'
· item, used for parameter number: 'P(Y)'
3.4.6
Baud rate setup
Make sure that the instrument's baud rate corresponds with the baud rate of the application the instrument is
communicating with. For single-channel instruments the selectable baud rates are 9K6, 19k2, 38k4, 57k6 and 115k2 Baud; for
multi-channel instruments the selectable baud rates are 38k4 and 115k2 Baud.
For more information regarding communication through an RS232 interface, see document nr. 9.17.027:
RS232 interface with FLOW-BUS for digital instruments.
http://www.bronkhorst.com/files/downloads/manuals_english/917027manual_rs232_interface.pdf
3.5
Basic RS485 operation
This section is limited to the description of the interface between the IQ+FLOW® instrument with a master device. IQ+FLOW®
instruments always serve as slaves in a Modbus system. There is no mutual communication between Modbus slaves; only
between master and slave. The master device is for example a pc.
More detailed information about Modbus can be found at http://www.modbus.org or any website of the (local) Modbus
organisation of your country (when available).
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3.5.1
Hook-up
These illustrations show examples of IQ+FLOW® instruments in a RS485 bus-system. When the power consumption is more
than 15W, two separate power supplies are required due to the maximum power supply of 15 W for one PiPS.
FLOW-BUS setup
Modbus setup
RS232 stand alone setup
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3.5.2
Software
When using a pc to communicate with IQ+FLOW® instruments only the FLOW-BUS protocol is supported by Bronkhorst®
software. When using Modbus operation, software from third parties, such as LabView, ModScan or a Modbus PLC must be
used to serve as Modbus master.
Note: an IQ+FLOW® instrument set for RS485 FLOW-BUS or Modbus communication will not respond when connecting to
an RS232 configuration. When required press the micro-switch according to the procedure in section 3.3.1 at start-up to
activate the 'Configuration Mode'. The baud rate and bus type are set to 38k4 and RS232 FLOW-BUS (Propar). For multichannel instruments the communication type can be set with the rotary switches.
3.5.3
Slave address, baud rate and parity setup
The IQ+FLOW® instrument is configured as specified on order. If there is a need of changing any of the specified settings,
see the tables below for the supported configurations. The default selections are presented in bold.
Single-channel versions
Mode:
Analog
Digital
Interface/medium:
-
Bus protocol:
-
Propar
FLOW-BUS
Modbus RTU
Modbus ASCII
Baud rate:
-
9600
19200
38400
57600
115200
187500
400000
9600
19200
38400
56000
57600
115200
9600
19200
38400
56000
57600
115200
Node address:
-
3…125
3…125
1…247
1…247
Parity:
-
None*
None*
None; Even; Odd
None; Even; Odd
RS232
RS485
In case the baud rate or node address of an IQ+FLOW® instrument needs to be changed, this can be done with the microswitch or by changing the settings in the 'Configuration Mode'. Other parameters can be changed only in the
'Configuration Mode'. For changing the mentioned parameters with the micro-switch see Section 4.2.5. When using the
'Configuration Mode' to change these settings, activate the 'Configuration Mode' by pressing the micro-switch at start-up
according the description in Section 3.3.1. In 'Configuration Mode' the baud rate and bus type are set to 38k4 and RS232
FLOW-BUS (Propar). Change the appropriate parameters as described in Section 4.2.5. When finished, deactivate the
'Configuration Mode' using the same procedure. Now the instrument is ready to use in desired configuration with the
adjusted baud rate, node address or parity.
Multi-channel versions (select with rotary switches)
Mode:
Digital
Interface/medium:
RS232
RS485
Bus protocol:
Propar
Modbus RTU
Baud rate:
38400
115200
9600
19200
38400
Node address:
3…99
1...99
Parity:
None*
Even
* Not selectable
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Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
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Bronkhorst®
3.6
Basic parameters and properties
3.6.1
Introduction
Most instrument parameters can only be accessed with digital communication. For each communication protocol the
instrument parameters are accessed differently. When using Bronkhorst® software programs FlowView or FlowPlot, easy
access is provided to the mostly used parameters by menu interfaces. When using other communication methods the
addressing method for the supported communication protocol is presented for a number of basic parameters in a table as
shown below:
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
[type]
RW B
[x]…[y]
[FB]
[Pro]/[Par]
[address]/[index]
Type
Unsigned char
Unsigned char[x]
Unsigned int
Unsigned long
Float
Access
R
RW
RW B
1 byte character
x byte array (string)
2 byte unsigned integer
4 byte unsigned long
4 byte floating point
The parameter is read-only
The parameter can be read and written
The parameter is protected and can only be written when the 'Init Reset' parameter is set to 64.
See section 4.1.1 for more details.
Range
Some parameters only accept values within a certain range:
[x]
Minimum value of the range.
[y]
Maximum value of the range.
FlowDDE
Parameter number within FlowDDE. Refer to section 3.4 for more information about FlowDDE.
FLOW-BUS
Within the FLOW-BUS protocol (Propar when using RS232) parameters are divided into a 'Process' and a 'Parameter' number.
To address parameters using the FLOW-BUS/Propar protocol write both numbers:
[Pro]
Process number
[Par]
Parameter number
Check document 9.17.027, “RS232 interface with FLOW-BUS protocol” for detailed information.
http://www.bronkhorst.com/files/downloads/manuals_english/917027manual_rs232_interface.pdf
Modbus
Parameters can be read or written via the Modbus protocol by specifying either the PDU Address or the register number.
The PDU Address is a hexadecimal number (identifyable by the '0x' prefix), which corresponds to the decimal register
number minus one, e.g. PDU Adress 0x0000 equals register number 1, PDU Adress 0x000A equals register number 11 etc.):
[address]
Hexadecimal PDU address
[index]
Decimal register number
For the Modbus protocol every two bytes are addressed separately.
9.17.045U
Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
21
Bronkhorst®
3.6.2
Basic measurement and control parameters
The list below provides the most basic parameters for digital communication with the instrument.
For more detailed information regarding operation parameters, see document nr. 9.17.023: Operational instructions for
digital instruments.
http://www.bronkhorst.com/files/downloads/manuals_english/917023_operation_instructions_digital_instr
uments.pdf
Measured Value (Measure)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
R
0…41942
8
1/0
0x0020/33
The 'Measured Value' indicates the amount of mass flow or pressure metered by the instrument. The signal of 0...100% will
be presented in a range of 0...32000. The maximum measured value output is 131.07 %, which is: 41942. A floating point
variable of the measured value, 'Fmeasure', is also available in the capacity and capacity unit for which the instrument has
been set, see section 4.
Setpoint
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
RW
0…32000
9
1/1
0x0021/34
The 'Setpoint' is used to set the required mass flow rate or pressure for the controller. The signals have the same range as
the measured value, only the setpoint is limited between 0 and 100% (0…32000). A floating point variable of the setpoint,
'Fsetpoint', is also available in the capacity and capacity unit for which the instrument has been set, see section 4.
3.6.3
Basic identification parameters
User Tag
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[16]
RW
-
115
113/6
0xF130…0xF136/61745…61751
The 'User Tag' parameter allows the user to give the instrument a custom tag name, with a maximum of 16 characters.
Customer Model
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[16]
RWB
-
93
113/4
0xF120…0xF127/61729…61736
This parameter is used to add extra information to the model number information, such as a customer-specific model
number.
Serial Number
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[20]
R
-
92
113/3
0xF118…0xF11F/61721…61728
This parameter consists of a maximum 20-byte string with instrument serial number for identification, for example:
'M1111111A'.
BHT Model Number
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[23]
R
-
91
113/2
0xF110…0xF116/61712…61718
This parameter shows the
22
Bronkhorst®
instrument model type information.
Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
9.17.045U
Bronkhorst®
4
Advanced operation
4.1
Reading and changing instrument parameters
4.1.1
Special parameters
All parameters described in this chapter have influence on the behaviour of the IQ+FLOW®. Please be aware that wrong
settings can disorder the output. To avoid unintential changes, some parameters are locked (shown by the B symbol). To
unlock parameters set parameter 'Init Reset' to 'Unlocked'.
Init Reset
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
82/64
7
0/10
0x000A/11
The 'Init Reset' parameter is used to unlock advanced parameters for writing. This parameter can be set to the following
values:
Value
Mode
Instrument action
82
Locked
Advanced parameters are read-only
64
Unlocked
Advanced parameters are writeable and readable
This parameter is always set to 'Locked' at power-up.
Control Mode
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
RW
0…255
12
1/4
0x0024/37
The 'Control mode' is used to select different functions of the instrument. The following modes are available:
Value
Mode
Instrument action
Setpoint
source
0
BUS/RS232
Controlling
RS232/RS485
1
Analog input
Controlling
Analog input
2
FLOW-BUS slave
Controlling as slave of other instrument on
bus
FLOW-BUS *
slave factor /
100%
3
Valve close
Close valve
4
Controller idle
Stand-by on BUS/RS232, Controlling is
stopped; Valve Out freezes in current position
5
Testing mode
Test mode enabled (factory only)
6
Tuning mode
Tuning mode enabled (factory only)
7
Setpoint 100%
Controlling at setpoint 100%
8
Valve fully open
Valve fully opened
9
Calibration
mode
Calibration mode enabled (factory only)
10
Analog slave
Controlling as slave of other instrument on
analog input
Analog input *
slave factor /
100%
12
Setpoint 0%
Controlling at setpoint 0%
Fixed 0%
13
FLOW-BUS
analog slave
Controlling as slave of other instrument on
bus, slave factor is set with signal on analog
input
FLOW-BUS *
analog input *
slave factor /
100%
9.17.045U
Master
source
Slave
factor
FLOWBUS
Slave
factor
Analog
input
Slave
factor
FLOWBUS *
analog
input
Analog
input
Fixed 100%
Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
23
Bronkhorst®
Value
Mode
Instrument action
Setpoint
source
18
RS232
Controlling
RS232
20
Valve steering
Setpoint is redirected to Valve Out with
controller idle
21
Analog valve
steering
Analog input is redirected to Valve Out with
the controller idle
22
Valve safe state
Master
source
Slave
factor
After power-up, the control mode is set to 'Analog input' or 'BUS/RS232', depending on the customer's default setting for
analog or digital operation. Except when the actual control mode setting is other than 0, 1, 9 or 18 the actual control mode
setting is maintained. For more information see parameter 'IOStatus', section 4.2.2.
For dual interface operation or slave factors, see document nr. 9.17.023: Operational instructions for digital instruments.
http://www.bronkhorst.com/files/downloads/manuals_english/917023_operation_instructions_digital_instr
uments.pdf
4.1.2
Fluid information
The following parameters give information about the selected fluid range.
Fluid Number
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0…7
24
1/16
0x0030/49
The 'Fluid number' is a pointer to the set of calbration parameters. Each selectable fluid has its own set of calibration
parameter values. Parameter value 0 = fluid 1 and parameter value 7 = fluid 8. Up to eight fluids can be stored in an
instrument. Default value = 0 (fluid 1).
Fluid Name
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[10]
RW B
-
25
1/17
0x8188…0x818C/33161…33165
This parameter consists of the name of the selected fluid number, e.g. 'Air'.
Capacity Unit
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[7]
RW B
-
129
1/31
0x81F8…0x81FB/33273…33276
The 'Fluid Unit' can be read by parameter 'Capacity Unit'. This parameter contains the unit in maximal 7 characters.
Fluid Capacity (@100%)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW B
±1E-10…
±1E+10
21
1/13
0x8168…0x8169/33129…33130
Capacity is the maximum value at 100% for direct reading in sensor readout units.
Fluid Capacity (@0%)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW B
±1E-10…
±1E+10
183
33/22
0xA1B0…0xA1B1/41393…41394
This is the capacity zero point for direct reading in sensor readout units.
For using the 'Capacity Unit Index' or 'Capacity Unit' parameters, see document nr. 9.17.023:
Operational instructions for digital instruments.
http://www.bronkhorst.com/files/downloads/manuals_english/917023_operation_instructions_digital_instr
uments.pdf
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Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
9.17.045U
Bronkhorst®
4.1.3
Advanced measurement and control parameters
Measured Value (Fmeasure)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
R
-3.4E+38…
3.4E+38
205
33/0
0xA100…0xA101/41217…41218
Floating point variable of the 'Measured Value'. The 'Fmeasure' variable shows the measured value in the capacity and
capacity unit for which the instrument has been set. The 'Fmeasure' parameter is dependent of 'Capacity', 'Capacity Unit',
'Sensor Type' and 'Capacity 0%'.
Setpoint (Fsetpoint)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW
0…3.4E+38
206
33/1
0xA118…0xA119/41240…41241
Floating point variable of the 'Setpoint'. The 'Fsetpoint' variable shows the setpoint value in the capacity and capacity unit
for which the instrument has been set. The 'Fsetpoint' parameter is dependent of 'Capacity', 'Capacity Unit', 'Sensor Type'
and 'Capacity 0%'.
Valve Output
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned long
RW
0…
16777215
55
114/1
0xF208...0xF209/61961...61962
This parameter is the signal coming out of the controller, used for driving the valve. 0…16777215 corresponds with
approximately 0…60 mAdc.
4.1.4
Controller parameters
The controlling algorithm for the valve handled by the micro-controller consists of several parameters which can be set.
Although many parameters could be accessed, Bronkhorst® advises not to change these parameters because during
manufacturing the controller is optimized. Changing of controller settings should be performed by or under supervision
from trained service personnel only.
The picture below shows the basic controller diagram of the digital instrument. It consists of a standard PID controller with
a number of add-ons. Basically, when a faster or slower controller response is needed, only the controller speed (Kspeed) or
PID-Kp should be changed.
Kp (PID-Kp)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW B
0…1E+10
167
114/21
0xF2A8…0xF2A9/62121…62122
PID controller proportional action, multiplication factor.
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Bronkhorst®
Controller Speed (Kspeed)
Type
Float
Access
Range
FlowDDE
FLOW-BUS
Modbus
RW B
0…3.4E+38
254
114/30
0xF2F0…0xF2F1/62193…62194
This parameter is the controller speed factor. PID-Kp is multiplied by this factor.
Ti (PID-Ti)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW B
0…1E+10
168
114/22
0xF2B0…0xF2B1/62129…62130
PID controller integration action in seconds. This value should not be changed.
Td (PID-Td)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW B
0…1E+10
169
114/23
0xF2B8…0xF2B9/62137…62138
PID controller differentiation action in seconds. The default value is 0.0. This value should not be changed.
Open from Zero control response (Kopen)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0…255
165
114/18
0x0E52/3667
Controller response when starting-up from 0% (when valve opens). Value 128 is default and means: no correction.
Otherwise controller speed will be adjusted as follows:
New response = Old response·1.05(128-Kspeed)
Normal Step response (Knormal)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0…255
72
114/5
0x0E45/3654
Controller response during normal control (at setpoint step). Value 128 is default and means: no correction.
Otherwise controller speed will be adjusted as follows:
New response = Old response·1.05(128-Knormal)
Stable Situation control response (Kstable)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0…255
141
114/17
0x0E51/3666
Controller response when controller is stable (within band of 2% of setpoint). Value 128 is default and means: no correction.
Otherwise controller speed will be adjusted as follows:
New responce = Old responce·1.05(128-Kstable)
4.1.5
Display filter
The output signal of an IQ+FLOW® instrument (measured value) is filtered. Filter behavior is dynamic: when a change in
sensor signal is detected, the measured value will be less filtered than when the sensor signal is constant and stable. There
are two filter constants: Static Display Factor and Dynamic Display Factor. These two factors can be transformed into time
constants using the following formula:
The measured value is filtered with a first order low pass filter with a filter time constant between the two τ values.
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Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
9.17.045U
Bronkhorst®
Dynamic Display Factor
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW B
0…1.0
56
117/1
0xF508…0xF509/62729…62730
This value should not be changed.
Static Display Factor
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW B
0…1.0
57
117/2
0xF510…0xF511/62737…62738
This value should not be changed.
CycleTime
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
R
0…255
52
114/12
0x0E4C/3661
Note: The unit of parameter CycleTime is 10 ms. Example: value 0.2 means 2 ms
4.1.6
Alarm / Status parameters
See document nr. 9.17.023: Operational instructions for digital instruments, chapter 6.
http://www.bronkhorst.com/files/downloads/manuals_english/917023_operation_instructions_digital_instr
uments.pdf
4.1.7
Counter parameters
See document nr. 9.17.023: Operational instructions for digital instruments, chapter 7.
http://www.bronkhorst.com/files/downloads/manuals_english/917023_operation_instructions_digital_instr
uments.pdf
4.2
Special instrument features
4.2.1
Auto zeroing
To start the auto zero-procedure by digital operation two parameters should be written:
Control Mode
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0…255
12
1/4
0x0024/37
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0…255
58
115/1
0x0E61/3682
Calibration Mode
Value
Mode
Instrument action
0
Idle
Idle
9
Auto zero
Auto-zeroing
255
Error
Idle
9.17.045U
Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
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Bronkhorst®
Auto-zero procedure:
Step 1: Set 'Control Mode' to 'Calibration Mode' (value 9)
Step 2: Set 'Calibration Mode' to 'Auto zero' (value 9)
Step 3: Check 'Calibration Mode',
Idle (value 0)
Auto-zeroing succeeded
Auto zero (value 9)
Auto-zeroing active
Error (value 255)
Auto-zeroing failed
4.2.2
Changing default control mode
Instruments are delivered with either analog or digital signal as default, depending on customer's requirement. After every
(power-up) reset the instrument will return to its default control mode. The default control mode can be changed with the
following parameter:
IOStatus
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0…255
86
114/11
0xF258…0xF259/62041…62042
Bit 6 [7…0] represents the former analog jumper.
1 = default control mode is analog
0 = default control mode is digital
Procedure for changing default digital operation to default analog operation:
· Read 'IOStatus'
· Add 64 to the read value
· Write 'IOStatus'
Procedure for changing default analog operation to default digital operation:
· Read 'IOStatus'
· Subtract 64 from the read value
· Write 'IOStatus'
Control mode can also be changed by micro-switch, see chapter 3.3.1 micro-switch operation
4.2.3
Disabling micro switch (single-channel versions only)
It is possible to disable the micro-switch on top of the instrument. This can prevent undesired use of this button. Disabling
the micro-switch can be performed with the following parameter:
IOStatus
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0…255
86
114/11
0xF258…0xF259/62041…62042
Bit 3 [7…0] is used to disable the micro switch.
0 = micro switch disabled
1 = micro switch enabled
Procedure to enable the micro switch:
· Read 'IOStatus'
· Add 8 to the read
value
· Write 'IOStatus'
Procedure to disable the micro switch:
· Read 'IOStatus'
· Subtract 8 from the read
value
· Write 'IOStatus'
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Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
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Bronkhorst®
4.2.4
Setting digital output (multi-channel versions only)
IQ+FLOW®
The
multi-channel pc-board is equipped with three digital outputs. The digital outputs can be used for driving
shut-off valves (for instance). The digital outputs can be read or written via the parameter 'IO Switch Status'. The parameters
can be set as indicated in the value table below. Note that this parameter is channel-independent. Each output can be
accessed via all channels. E.g. by writing this parameter via channel 2, it is possible to open/close a shut-off valve located at
channel 1.
IO Switch Status
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned long
RW
0…7
288
114/31
0xF2F8/62201
Value
Status output 1
Status output 2
Status output 3
0
Off
Off
Off
1
On
Off
Off
2
Off
On
Off
3
On
On
Off
4
Off
Off
On
5
On
Off
On
6
Off
On
On
7
On
On
On
4.2.5
Changing slave address, baud rate and parity
Changing node address or baud rate by micro-switch operation
Press the micro-switch 5x briefly with intervals of max. 1 second in normal running/operation mode. Within the timeout
period of 60 seconds it is possible to start changing the node address and baud rate of the instrument.
Step
Action
1
Start
2
Set tens of bus
address
3
4
Indication
Time
Handling
Press the switch 5x briefly with intervals of max.
1 second in normal running/operation mode.
Set units of bus
address
Set baud rate of field
bus communication.
1 = 9600 Baud
2 = 19200 Baud
3 = 38400 Baud
4 = 56000 Baud
5 = 57600 Baud
6 = 115200 Baud
n Green LED flashes
0.1 sec on, 0.1 sec off
count flashes
start when switch
is pressed:
0.5 sec on, 0.5 sec off
n red LED flashes
0.1 sec on, 0.1 sec off
count flashes
start when switch
is pressed:
0.5 sec on, 0.5 sec off
both n red and n
green LEDs flashes
0.1 sec on, 0.1 sec off
count flashes
start when switch
is pressed:
0.5 sec on, 0.5 sec off
timeout:
60 sec
Press switch and count green flashes for tens of
bus address.
Release when wanted amount has been count.
Counts up to max. 12 and than starts at 0 again.
When counting fails, keep switch pressed and
restart counting for next attempt.
timeout:
60 sec
Press switch and count red flashes for units of
bus address.
Release when wanted amount has been count.
Counts up to max. 9 and than starts at 0 again.
When counting failed, keep switch pressed and
restart counting for next attempt.
timeout:
60 sec
Press switch and count red and green flashes
for baud rate setting.
Release when wanted amount has been count.
Counts up to max. 5 and than starts at 0 again.
When counting failed, keep switch pressed and
restart counting for next attempt.
Note: selection of 0 means: No change
Instrument returns to normal running / operation mode. Changes are valid when they are made within the time-out times.
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Bronkhorst®
Value zero will be indicated by a period of 1 sec off (0.5 sec off + 0,5 sec off).
When value zero is wanted, press switch shortly and release it again within 1 sec.
Before each action of flash-counting, the LEDs to be used for counting will flash in a high frequency.
(Pattern: 0.1 sec on, 0.1 sec off). As soon as the switch is pressed-down, this LED (or both LEDs) will be off and the counting
sequence will start.
Changing node address, baud rate or parity in 'Configuration Mode' or in normal mode
The procedure for changing the baud rate, node address or parity for a FLOW-BUS or Modbus configuration over RS485 is
described in section 3.5.3 (single-channel versions only). In the list below the selectable bus parameters with corresponding
values are presented.
When changing any of the parameters below in normal running/operation mode the communication with the instrument
may be lost. After a restart the instrument is available for communication on the newly selected parameters. When in
doubt activate the 'Configuration Mode' (38k4 and RS232 FLOW-BUS (Propar)) using the micro-switch.
Fieldbus 2 selection
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0…3
308
124/8
0xFC40/64577
This parameter sets the fieldbus type. Parameter value 0 = FLOW-BUS, 1 = Modbus RTU, 2 = Propar, 3 = Modbus ASCII
Fieldbus 2 address
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0...255
309
124/10
0xFC50/64593
Set the node address at any of the allowed values listed in the table in Section 3.5.3, e.g. '3'.
Fieldbus 2 baud rate
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0...1E+10
310
124/9
0xFC48...0xFC49/64585...64586
Set the baud rate at any of the allowed values listed in table in section Section 3.5.3, e.g. '19200'.
Fieldbus 2 medium
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0...1
311
124/11
0xFC58/64601
Select the communication medium. Parameter value 0 = RS232, 1 = RS485
Fieldbus 2 parity
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW B
0...2
336
124/12
0xFC60/64609
Set the parity for Modbus communication. Parameter value 0 = None, 1 = Odd, 2 = Even.
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5
Troubleshooting and service
5.1
General
For a correct analysis of the proper operation of an instrument it is recommended to remove the unit from the process line
and check it without applying fluid supply pressure. In case the unit is dirty or clogged, this can be ascertained immediately
by loosening the fittings and inspecting visually.
Energizing or de-energizing of the instrument indicates whether there is an electronic failure. After energizing, fluid
pressure is to be applied in order to check behaviour. If there should be suspicion of leakage, do not disassemble the
sensor for inspection but contact your local distributor for service or repairs.
5.2
LED indication
The red LED on the instrument gives error or warning information.
n Red LED
Time
Indication
Off
Continuously
No error
On
Continuously
Critical error message.
A serious error occurred in the instrument.
Instrument needs service before further use
For more information check the instruction manual for digital communication 9.17.023 at
http://www.bronkhorst.com/files/downloads/manuals_english/917023_operation_instructions_digital_instr
uments.pdf
5.3
Troubleshooting summary general
Symptom
Possible cause
Action
No output signal
No power supply
Check power supply and hook-up
Check cable connection and hook-up.
Check status of LEDs (see manual 9.17.023)
Cable damaged or hooked-up
incorrectly
Check and compare signals at both ends
of cable.
PC-board damaged due to long lasting
shortage and/or high-voltage peaks
Return to factory
No or too low inlet pressure
Increase inlet pressure
Open shut-off at inlet and outlet
Supply pressure too high, or differential
pressure across meter too high
Reduce supply pressure
Sensor failure
Return to factory
Maximum output signal
Sensor failure
Return to factory
Output signal much lower
than setpoint signal or desired
flow
Incorrect type of fluid or too low inlet
pressure
Test instrument on conditions for which
it was designed
Oscillation / Signal noise
Pressure regulator of supply pressure is
oscillating or wrong sized
Replace pressure regulator
Small flow indication when
flow is definetly zero
Increased zero reading without flow
caused by raised zero-point
Perform an auto-zero action
No digital communication
Occupied or wrong bus address
Change address with software
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Bronkhorst®
5.4
Service
For current information on Bronkhorst® and service addresses, please visit our website:
ü http://www.bronkhorst.com
Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for
your application. Contact sales by e-mail:
› [email protected]
For after-sales questions, our Customer Service Department is available with help and guidance.
To contact CSD by e-mail:
› [email protected]
No matter the time zone, our experts within the Support Group are available to answer your request immediately or ensure
appropriate further action. Our experts can be reached at:
) +31 859 02 18 66
Bronkhorst High-Tech B.V.
Nijverheidsstraat 1A
NL-7261 AK Ruurlo
The Netherlands
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Instruction Manual IQ+FLOW® Series Digital Mass Flow / Pressure Controllers for Gases
9.17.045U
Bronkhorst®
6
Removal and return instructions
When returning materials, always clearly describe the problem, and, if possible, the work to be done, in a covering letter.
Instrument handling:
1. Purge all gas and/or liquid lines
2. If toxic or dangerous fluids have been used, the instrument must be cleaned before shipping
3. Disconnect all external cabling and tubing and remove the instrument from the process line
4. If applicable, secure movable parts with appropriate transport safety materials, to prevent damage during
transportation
5. The instrument must be at ambient temperature before packaging
6. Insert the instrument into a plastic bag and seal the bag
7. Place the bag in an appropriate shipping container; if possible, use the original packaging box
Add documentation:
· Reason of return
· Failure symptoms
· Contaminated condition
· Declaration on decontamination
It is absolutely required to notify the factory if toxic or dangerous fluids have been in contact with the device!
This is to enable the factory to take sufficient precautionary measures to safeguard the staff in their repair department.
All instruments must be dispatched with a completely filled in 'Declaration on decontamination'. Instruments without this
declaration will not be accepted.
A 'Declaration on decontamination' form (document no 9.17.032) can be downloaded from
http://www.bronkhorst.com/en/downloads.
Important:
Clearly note, on top of the package, the customs clearance number of Bronkhorst High-Tech B.V., namely:
NL801989978B01
(only if applicable, otherwise contact your distributor for local arrangements.)
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