Brooks® SLA5850, SLA5851, SLA5853 Mass Flow Controllers

Brooks® SLA5850, SLA5851, SLA5853 Mass Flow Controllers
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
Brooks® SLA5850, SLA5851, SLA5853
Mass Flow Controllers Models
and Models SLA5860, SLA5861, SLA5863
Mass Flow Meters
Model SLA5850D
Digital I/O
DeviceNetTM MFC
with Coplanar Valve
Model SLA5850S
Analog I/O MFC
with RS-485
Model SLA5853S
Analog I/O MFC
with RS-485
Model SLA5850F
Digital I/O
FOUNDATION Fieldbus MFC
with Coplanar Valve
Model SLA5850S
Analog I/O MFC
with RS-485
Elastomer Downport
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Essential Instructions
Read this page before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Inform and educate your personnel in the proper installation, operation and maintenance of the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.
• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.
Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.
• Section 1 of this manual contains important safety and operating instructions related to the PED directive.
• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.
• All Brooks Instrument Flowmeters fall under fluid group 1.
• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.
• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
ESD (Electrostatic Discharge)
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly, exhibit early failure.
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yours sincerely,
Brooks Instrument
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
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Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Paragraph
Number
Contents
Brooks® Digital MFC's & MFM's
Page
Number
Section 1 Introduction
1-1
Scope ......................................................................................................................................... 1-1
1-2
Purpose ...................................................................................................................................... 1-1
1-3
Description ................................................................................................................................. 1-1
1-4
Specifications ............................................................................................................................. 1-2
Section 2 Installation
2-1
General ...................................................................................................................................... 2-1
2-2
Receipt of Equipment ................................................................................................................. 2-1
2-3
Recommended Storage Practice ............................................................................................... 2-1
2-4
Return Shipment ........................................................................................................................ 2-2
2-5
Transit Precaution ...................................................................................................................... 2-2
2-6
Removal from Storage ............................................................................................................... 2-2
2-7
Gas Connections ........................................................................................................................ 2-2
2-8
In-Line Filter ............................................................................................................................... 2-3
2-9
Installation .................................................................................................................................. 2-3
2-10 Electrical Interface ...................................................................................................................... 2-5
2-11 Operation Check Procedure (Analog I/O) .................................................................................. 2-8
2-12 Digital I/O: DeviceNet or FOUNDATION Fieldbus .......................................................................... 2-9
2-13 DeviceNet I/O Assemblies .......................................................................................................... 2-9
Section 3 Operation
3-1
Overview .................................................................................................................................... 3-1
3-2
Theory of Operation for Flow Measurement .............................................................................. 3-1
3-3
Features ..................................................................................................................................... 3-2
3-4
Analog I/O Mode of Operation .................................................................................................... 3-4
3-5
Communications Features ......................................................................................................... 3-6
3-5-1 RS-485 Communications Features (Analog versions only) ........................................................ 3-6
3-5-2 RS-485 DeviceNet Communications Features .......................................................................... 3-7
3-5-3 RS-485 FOUNDATION Fieldbus Communications Features ......................................................... 3-7
3-6
Alarms and Warnings (Analog versions only) ............................................................................ 3-8
3-6-1 Alarms and Warnings (Analog versions only) ............................................................................ 3-8
3-6-2 Diagnostic Alarms (Analog versions only) ................................................................................. 3-10
3-6-3 General Alarms and Warnings (Analog versions only) .............................................................. 3-11
3-7
Calibration/Configuration Sets ................................................................................................... 3-12
3-8
Special Features ....................................................................................................................... 3-13
3-8-1 Setpoint Ramping ...................................................................................................................... 3-13
3-8-2 Low Setpoint Command Cutoff ................................................................................................. 3-13
3-8-3 Low Flow Output Cutoff ............................................................................................................. 3-13
3-8-4 Flow Output Damping ............................................................................................................... 3-13
3-8-5 Adaptive Control ........................................................................................................................ 3-13
3-8-6 Flow Totalizer ............................................................................................................................ 3-13
3-8-7 Flow Output Conditioning .......................................................................................................... 3-13
3-8-8 Flow Signal Lock-in ................................................................................................................... 3-14
3-9
PC-based Support Tools ........................................................................................................... 3-14
i
Contents
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 4 Maintenance
4-1
Maintenance and Troubleshooting ............................................................................................. 4-1
4-1-1 Troubleshooting Analog or DeviceNet version ........................................................................... 4-2
4-1-2 System Checks .......................................................................................................................... 4-4
4-1-3 Cleaning Procedures .................................................................................................................. 4-6
4-1-4 Calibration Procedure ................................................................................................................ 4-6
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................ A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover
Figures
Figure
Page
Number
Number
1-1
Open Collector Alarm Output. .................................................................................................... 1-6
1-2
General Wiring ........................................................................................................................... 1-6
1-3
Response Performance of Brooks Digital MFC ......................................................................... 1-7
1-4
Linear Ramp-up and/or Ramp-down from 200% Per Second Down to
0.5% Per Second Setpoint Change ............................................................................................ 1-7
1-5
Model SLA5850D Digital I/O DeviceNet MFC ........................................................................... 1-11
1-6
Model SLA5850S Analog I/O MFC with RS-485 Elastomer Downport Connections ................. 1-11
1-7
Model SLA5850F Digital I/O FOUNDATION Fieldbus MFC with Coplanar Valve .......................... 1-12
1-8
Model SLA5851D Digital I/O FOUNDATION Fieldbus MFC .......................................................... 1-12
1-9
Model SLA5853F Digital I/O DeviceNet MFC and Flanged Connections .................................. 1-13
1-10 Model SLA5853 Analog I/O MFC with Flanged Connections .................................................... 1-13
1-11 Model SLA5860S Analog I/O MFM with RS-485 ........................................................................ 1-14
1-12 Model SLA5861F Digital I/O FOUNDATION Fieldbus MFM........................................................... 1-14
1-13 Model SLA5863D Digital I/O DeviceNet MFM ............................................................................ 1-15
2-1 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version .......................................... 2-6
2-2 Common Electrical Hookups, Voltage I/O Version ...................................................................... 2-6
2-3 Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply) ............ 2-7
2-4 Recommended Wiring Configuration for Current Signals (Isolated Power Supply) .................... 2-7
3-1 Flow Sensor Operational Diagram (VCRTM End Connections Shown) ........................................ 3-3
3-2 Externally Accessible Adjustment for all Meters/Controllers ....................................................... 3-3
4-1 Bench Troubleshooting Circuit .................................................................................................... 4-2
Tables
Table
Page
Number
Number
1-1
Flow Ranges and Pressure Ratings ........................................................................................... 1-3
1-2
Calibration Select Signal ............................................................................................................ 1-8
1-3
Analog I/O Pin Connections ....................................................................................................... 1-8
2-1
Recommended Filter Size .......................................................................................................... 2-3
3-1
Typical Resistor Values for Calibration Selection ....................................................................... 3-5
4-1
Sensor Troubleshooting ............................................................................................................. 4-4
4-2
Troubleshooting.......................................................................................................................... 4-7
ii
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
1-1 Scope
Thank you for purchasing a Brooks Instrument Mass Flow Product. This
manual, X-TMF-SLA5800-MFC-eng is an installation and operation manual
for your instrument.
If you have purchased a Brooks® Digital Mass Flow Product with DeviceNet
Communications, a separate DeviceNet Instruction Manual shall also be
provided as part of the operating documentation.
1-2 Purpose
The Brooks Digital Products are mass flow measurement devices
designed for accurately measuring (MFM's) and rapidly controlling (MFC's)
flows of gases. This instruction manual is intended to provide the user with
all the information necessary to install, operate and maintain the Brooks
MFC and MFM. This manual is organized into the following sections.
Section 1
Section 2
Section 3
Section 4
Section A
Back Cover
Introduction
Installation
Operation
Maintenance
CE Certification
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these Brooks Digital products.
1-3 Description
Brooks Instrument’s SLA5800 Series is an elastomer sealed digital thermal
mass flow measurement and control instrument, which offers unparalleled
flexibility and performance. The SLA5800 Series MFC is designed for use
in advanced gas handling systems. The result is the most accurate,
repeatable, and responsive MFC on the market today!
Wide Flow Range
The SLA5800 Series covers an extremely broad range of flowrates. Model
SLA5850 can have a full scale flow as low as 3 ccm. With a high turndown
ratio of 50:1, accurate gas flow can be measured or controlled down to
0.06 ccm! Model SLA5853 can meter or control gas flow up to 2500 lpm.
Fast Response Performance
The all-digital electronics and superior mechanical configuration in the
SLA5800 series provide for ultra fast response characteristics. Settling
times are specified as less than one second, but Brooks’ Adaptive Valve
Control can achieve response times of 0.2 sec.
Broad Array of Communication Options
Brooks® offers traditional 0-5 volt and 4-20mA analog options as well as
RS-485 digital communications (“S-protocol”, based on HART). Brooks
also offers control interface via digital network protocols like DeviceNet, a
high-speed (up to 500k baud) digital communication network, or
FOUNDATION® Fieldbus. Brooks’ communication capabilities and deviceprofiles have been certified by the ODVA (Open DeviceNet Vendor’s
Association) and the ITK Interoperability Test Kit. Other network protocols
are in development. Talk to your Brooks representative about your specific
needs.
1-1
Section 1 Introduction
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Reduced Cost of Ownership
The SLA5800 Series allows multi-gas and multi-range capabilities to
reduce customer inventory. Storage and pre-programming of up to 10 gas
calibrations easily permits users to switch between different gases and
ranges on a single device.
1-4 Specifications
PERFORMANCE CHARACTERISTICS:
Flow Ranges
Models SLA5850/SLA5860 - Any FS range from 0-3 ccm to 0-30 lpm (N2 eq.)
Up to 0-50 lpm (N2 eq.) with the Coplanar Valve option
Models SLA5851/SLA5861 - Any FS range from 20-100 lpm (N2 eq.)
Up to 200 lpm H2 flows possible
Models SLA5853/SLA5863 - Any FS range from 100-2500 lpm (N2 eq.)
Control Range
Turndown: 50:1
Turndown: 100:1 with Coplanar valve option
( for any FS range from 1-50 lpm (N2eq.)
Accuracy (N2 eq. at calibration conditions)
±1.0% of rate (20% - 100% FS)
±0.2% FS (below 20% FS) up to 1200 lpm
(Optional: ±0.7% of rate ±0.2% FS ("S-Series") up to
1200 lpm
Flow ranges above 1200 lpm and up to 2500 lpm: ±1.0% of full scale
Repeatability
±0.20% of rate
Settling Time/Response Time
< 1 second to within ±2% FS of final value for a
0-100% command step (better on request)
for flow rates up to 100 lpm N2 Eq.
< 3 seconds to within ±2% FS of final value for a
0-100% command step (better on request)
for flow rates greater than 100 lpm (N2 eq.) up to 2500 lpm (N2 eq.)
Sensitivity to Mounting Attitude
< 0.2% FS maximum deviation from specified accuracy, after rezeroing.
RATINGS:
Temperature Sensitivity
Zero: less than 0.05% FS per °C
Span: less than 0.05% FS per °C
Pressure Sensitivity
± 0.03% per psi up to 200 psig (N2 eq.)
1-2
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
Maximum Operating Pressure
See Table 1-1 below:
Optional 4500 psig (300 bar) For 50 and 61 Series body only.
Pressure Equipment Directive (PED) 97/23/EC
See Table 1-1:
Table 1-1 Flow Ranges and Pressure Ratings
Mass Flow Mass Flow
Controller
Meter
Model:
Model:
SLA5850(1)
SLA5851
SLA5853(2)
SLA5860
SLA5861(1)
SLA5863
Min. f.s.
0.003
0.003
20
100
Flow Ranges
N2 Eq.Ratings
Max. f.s.
30 lpm (4)
30 slpm
100 lpm
2500
Pressure
PED Module H Category
Unit
Bar/psi
100bar/1500 psi
SEP
300bar/4500 psi
SEP
100bar/1500 psi(3)
SEP
70 bar/1000 psi 1 for all 150 lbs flanges
2 for all other
connections
(1) 300 bar (4500 psi) version optional.
(2) Max. Delta P for 5853 is 20 bar (300 psi).
(3) 70 bar / 1000 psi for UL Certification.
(4) 50 lpm with Coplanar valve option
Pressure Differential Range (Controllers)
Minimum:
model SLA5850
5 psi (0.35 bar) up to 30 lpm (N2 eq.)
Model SLA5851
10 psi (0.69 bar) from 30 lpm to 100 lpm (N2 eq.)
Model SLA5853
7.5 psi (0.52 bar) at 500 lpm (N2 eq.)
14.5 psi (1.00 bar) at 1000 lpm (N2 eq.)
35.0 psi (2.41 bar) at 2500 lpm (N2 eq.)
High DP valve 30 psi (2.07 bar) to 290 psi (20 bar max.)
Low DP valve 7.5 psi (0.52 bar) to 30 psi (2.07 bar max.)
Minimum pressure drop depends on gas and FS flow rate (consult factory)
Leak Integrity
Inboard to Outboard: 1x10-9 atm scc/sec Helium max.
Ambient Temperature Limits
Operating: 0°C to 65°C (32°F to 149°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)
Fluid Temperature Limits
0°C to 65°C (32°F to 149°F)
PHYSICAL:
1-3
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
Materials of Construction
Wetted parts - stainless steel with Viton® fluoroelastomers
Optional: Buna-N, Kalrez®, Teflon®/Kalrez and EPDM
Outline Dimensions
Refer to Figures 1-5 thru 1-13
Process Connections
Refer to Figures 1-5 thru 1-13
Reference Conditions
Due to effects of pressure and temperature on the compressibility of gases, specific reference conditions must be used when
reporting volumetric flow rates in mass flow terms. For example, the unit of measure SCCM (standard cubic centimeters per
minute) refers to a volumetric gas flow at a standard reference condition, NOT the actual volumetric gas flow at the actual
operating pressure and temperature. The key point is that the MASS FLOW of the gas is fixed, but the reference volumetric
flow can be reported differently based upon the standard reference condition used in the calculation.
Throughout the world, there are differences in terminology when describing reference conditions for gases. The words
“normal conditions” and “standard conditions” are sometimes used interchangeably to describe the reference STP (Standard
Temperature and Pressure) for gases. Further note that temperature and pressure values for standard or normal reference
conditions vary in countries and industries worldwide. For example, the Semiconductor Equipment Manufacturing Industry
(SEMI) defines standard temperature and pressure conditions as 273.15 K (0 °C) and 101,325 Pa (760 torr). The main
concern is that no matter what words are used for descriptive purposes, a gas mass flow rate must have a defined standard
pressure and temperature reference condition when performing a volumetric conversion.
ELECTRICAL CHARACTERISTICS:
Analog/RS-485 version: 15-pin D-Connector, male
Digital I/O:
DeviceNet: 5-pin Micro-Connector, male
FOUNDATION Fieldbus: 4-pin Micro-Connector, male
Power Supply Voltage
Analog option: 13.5-27 Vdc,
Digital I/O:
DeviceNet I/O: 11-25 Vdc
FOUNDATION Fieldbus I/O: 14-27 Vdc
SLA5851S Model: 22-27 Vdc
Watts, typical
Power Requirements:
Analog I/O option, no valve:
Analog I/O option, with valve:
Digital I/O option, n.v.:
Digital I/O option, w.v.:
1.6
3.6
3.6
6.9
Watts, max.
1.8
4.0
4.0
7.6
Command/Setpoint Input (Analog I/O capabilities)
Voltage and Current type inputs (but not both simultaneously) are
supported.
Setpoint input types are software selectable as follows:
0 - 5 Vdc
1 - 5 Vdc
0 - 20 mA
4 - 20 mA
Voltage Setpoint Input Specifications
Nominal Range:
0 - 5 Vdc
Full Range:
0 - 5.5 Vdc
Absolute Max.:
20 V
(Without Damage)
Input Impedence:
>990 kΩ
Calibrated Accuracy: +0.1% of F.S.
1-4
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 1 Introduction
Brooks® Digital MFC's & MFM's
Current Setpoint Input Specifications
Nominal Range:
4 - 20 mA or 0 - 20 mA
Full Range:
0 - 22 mA
Absolute Max.:
25 mA
(Without Damage)
Input Impedence:
125 Ω
Calibrated Accuracy: +0.1% of F.S.
Flow Output (Analog I/O version only)
Voltage and current type outputs (but not both simultaneously) are
supported. Flow output types are selectable as follows.
0 - 5 Vdc
1 - 5 Vdc
0 - 20 mA
4 - 20 mA
Flow Output (Voltage) Specifications
Nominal Range:
0 - 5 Vdc, 1 - 5 Vdc
Calibrated Accuracy: +0.1% of F.S.
Full Range:
-0.5 - 5.5 Vdc (@ 0-5 Vdc); 0.6 - 5.5 Vdc (@ 1-5 Vdc)
Min. Load Resistance:2 kW
Flow Output (Current) Specifications
Nominal Range:
4 - 20 mA or 0 - 20 mA
Calibrated Accuracy: +0.1% of F.S.
Full Range:
0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA)
Max. Load:
380 Ω (for supply voltage < 16 Vdc)
580 Ω (for supply voltage > 16 Vdc)
Valve Override Signal (Analog I/O version only)
The Valve Override Signal (VOR) is implemented as an analog input which
measures the voltage at the input and controls the valve based upon the
measured reading as follows:
Valve Override Signal Drive Settings (Analog I/O Versions only)
Floating / Unconnected: Instrument controls valve to command setpoint
VOR < 0.3 Vdc:
Valve Closed
VOR > 4.8 Vdc:
Valve Open
0.3 Vdc > VOR > 4.8 Vdc: Undefined
Valve Override Signal Specifications (Analog I/O Versions only)
Input Impedence:
800 kΩ
Absolute Max. Input: -25 Vdc > VOR > 25 Vdc
(without damage)
5 Volt Reference Signal (Analog I/O versions only)
A 5 Vdc reference output is provided to the customer for use in generating
a setpoint and/or Valve Override signal. The current drive of this output is
very limited and must be used with care.
Min. Load Resistance:2 kΩ (2.5 mA maximum)
Accuracy:
+1.0%
1-5
Section 1 Introduction
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Alarm Output (Analog I/O versions only)
The Alarm Output is an open collector or "contact" type that is CLOSED
(on) whenever an alarm is active. The Alarm Output may be set to indicate
any one of various alarm conditions. Reference Section 3-6-2 for more
information on alarms.
Type:
Open Collector
Max Closed (ON) Current:
25 mA
Max Open (OFF) Leakage:
1 μA
Max Open (OFF) Voltage:
30 Vdc
Figure 1-1 Open Collector Alarm Output
Figure 1-2 General Wiring
Fast Response Performance
The curves in Figure 1-3 depict the MFC output signal and actual
transitional flow to steady-state when gas flow enters into process
chamber, under a step response command condition.
Brooks devices also feature adaptive (optimized) PID control, including fast
response. and linear ramp-up and/or ramp-down control characteristics.
1-6
Calibration Curve Selection (Analog I/O versions only)
Select one of ten gases and select PID tuning settings in analog mode.
Requires external connection of resistors between Pin # 13 and Pin # 9.
(Reference Tables 1-2 and 1-3.)
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 1 Introduction
Brooks® Digital MFC's & MFM's
Selectable Soft Start
Processes requiring injection of gases can be adversely affected by
excessive initial gas flow. This abrupt injection of gas can result in process
damage from explosion or initial pressure impact. These problems are
virtually eliminated with the soft start feature.
Traditional soft start or linear ramp-up and/or ramp-down (See Figure 1-4)
can be factory selected or are available via the Brooks Service SuiteTM.
Linear ramp-up is adjustable at 200% per second down to 0.5% per
second setpoint change.
Figure 1-3 Response Performance of Brooks Digital MFC
Figure 1-4 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to
0.5 % Per Second Setpoint Change
1-7
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
Table 1-2 Calibration Select Signal.
CAL
1
2
3
4
5
DEFAULT = CAL# 1 (External resistor not installed)
Resistor Value (k ohms)
CAL
Resistor Value (k ohms)
Not Installed
6
124
Shorted
7
80.6
665
8
52.3
324
9
30.9
191
10
15
Table 1-3 Analog I/O Pin Connections:
Function
Setpoint, Command Input (-)
Flow Signal, 0(1) -5 volt, Output (+)
TTL Alarm, open collector, Output (+)
Flow Signal, 0(4)-20 mA, Output (+)
Power Supply, +13.5 Vdc to +27 Vdc(+)
Not Connected
Setpoint, 0(4)-20 mA, Input (+)
Setpoint, 0(1)-5 Vdc, Input (+)
Power Supply, Common (-)
Flow Signal, Common, Output, (-)
Reference, +5 Vdc, Output (+)
Valve Override, Input
Calibration Select Input
RS-485 Common B (-)
RS-485 Common A (+)
PIN
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
RS-485 Communications
The Brooks Digital Series is equipped with RS-485 communication
capability. Refer to Table 1-3 (Analog I/O pin connections), that enables the
device to communicate via a personal computer for process control.
Baud rate selections for the Brooks Digital Series related to RS-485 are:
1200, 2400, 4800, 9600, 19200 and 38400 baud and can be selected via
the Brooks service SuiteTM.
The RS-485 is essentially a multidrop connection. It allows a maximum of
32 devices to be connected to a computer system. IBM-compatible PC's
are not equipped with RS-485 ports as standard. An RS-232 to RS-485
converter or RS-485 interface board is therefore required to connect an
RS-485 network to a standard pc. The RS-485 bus, a daisy chain network,
meaning that the wires are connected at the units as in Figure 1-2.
1-8
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 1 Introduction
Brooks® Digital MFC's & MFM's
DeviceNet Communications
The Brooks SLAMf Digital Series is also available with DeviceNetTM
communication capability. DeviceNet is an open digital protocol capable of
high speeds and easy system connectivity. Brooks Instrument has several
of its devices available on this popular networking standard, and is a
member of ODVATM (Open DeviceNet Vendors Association), the governing
standard body for DeviceNet.
DeviceNet is similar to the RS485 standard in that it is a multi-drop
connection that allows a maximum of 64 devices to be connected on the
same network. Baud rate selections for DeviceNet products are 125K,
250K and 500K and can be selected via MAC ID switches mounted on the
device.
The DeviceNet communication link also provides access to many of the
Brooks SLAMf Digital Series functions for “control and monitor” operations,
including:
• Accurate setpoint adjustment and flow output measurement (including
units of measure selection)
• PID Settings (controller only)
• Valve Override (controller only)
• Calibration Gas Select
• Soft Start Control (controller only)
FOUNDATION® Fieldbus Communications:
The Brooks SLA5800 Digital Series is supporting FOUNDATION® Fieldbus
communication protocol. FOUNDATION® Fieldbus is a digital network allowing
usage of existing 4-20mA cables, avoiding costly re-wiring. Fully certified
by passing ITK, this device has passed several Interoperability
requirements over a broad range of hosts. When combined with DeltaV
and using the power of PlantWeb, those devices provide intelligent alerts
allowing accurate device maintenance and service.
• Value Range check - Part of the standard function blocks
• Temperature sensor connection - Check sensor connection
• Firmware checksum - Check for Internal firmware integrity
• Non-volatile memory - Check for non-volatile memory integrity
• RAM - Check for RAM integrity
• Zero Drift/Valve Leak-by - Check for flow leak-by or sensor zero drift
• Device Overhaul due - Preventive Maintenance
• Calibration Due - Preventive Maintenance
• Valve spring life - Preventive Maintenance
• No Flow - No flow detected when setpoint requested
• Reverse Flow - Reverse flow detected
·
Flow Totalizer - Informed when a user define amount of fluid has
been delivered
·
Time Totalizer - Informed when a user define amount of time has
expired
Device type dependant function block are available representing the
different device functions:
• Current Flow Value (Mass Flow device only)
• Current Pressure Value (Pressure device only)
• Current Device Temperature (Mass Flow device only)
• Current Valve position (Controller Only)
• Setpoint Control (Controller Only)
• Direct Valve Control (Controller Only)
• Actuator Override (Controller Only)
• Ultra-fast (8ms) PID function block for Cascade control
(all devices)
1-9
Section 1 Introduction
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Certifications:
EMC Directive 89/336/EEC:
per EN 61326
Hazardous Location Classification
Enclosure: Type 1/IP40
Ambient Temperature: 0°F > Tamb < 150°F (0°C > Tamb < 65°C)
United States and Canada
UL Recognized: E73889 Volume 3, Section 4
Class 1, Zone 2, AEx nA II T4
Per ANSI/ISA 12.12.02 - 2003 and ANSI/UL 60079-15
Ex nA II T4
Per CSA - E79 - 15
Europe - ATEX Directive 94/9/EC
KEMA 04ATEX1118X
Pressure Equipment Directive (97/23/EC):
See Table 1-1 for further pressure information
PC-based Support Tools
Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our
customers. SmartDDE may be used with any unit supporting RS-485 in a multidrop configuration, thus allowing
users to control and monitor their Brooks devices. The Brooks Service ToolTM (BST) may be used to monitor,
diagnose, tune and calibrate Brooks devices equipped with DeviceNet or FOUNDATION Fieldbus communications.
The Brooks Service ToolTM interfaces with Brooks products via a special service port.
1-10
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 1 Introduction
Brooks® Digital MFC's & MFM's
Figure 1-5 Model SLA5850D Digital I/O DeviceNet MFC
Figure 1-6 Model SLA5850S Analog I/O MFC with RS-485 Elastomer Downport Connections
1-11
Section 1 Introduction
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Figure 1-7 Model SLA5850F Digital I/O FOUNDATION Fieldbus MFC with Coplanar Valve
Figure 1-8 Model SLA5851D Digital I/O DeviceNet MFC
1-12
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 1 Introduction
Brooks® Digital MFC's & MFM's
Figure 1-9 Model SLA5853F Digital I/O FOUNDATION Fieldbus MFC
Figure 1-10 Model SLA5853S Analog I/O MFC with Flanged Connections
1-13
Section 1 Introduction
Brooks® Digital MFC's & MFM's
Figure 1-11 Model SLA5860S Analog I/O MFM with RS-485
Figure 1-12 Model SLA5861F Digital I/O FOUNDATION Fieldbus MFM
1-14
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 1 Introduction
Brooks® Digital MFC's & MFM's
Figure 1-13 Model SLA5863D Digital I/O Devicenet MFM
1-15
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
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1-16
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 2 Installation
Brooks® Digital MFC's & MFM's
2-1 General
This section provides installation instructions for the Brooks® Digital MFC's
and MFM's. Section 1, Figures 1-5 thru 1-12 show the dimensions and
electrical connections.
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability.
A report should be submitted to your nearest Product Service Department.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: [email protected]
www.BrooksInstrument.com
Brooks Instrument
Neonstraat 3
6718 WX Ede, Netherlands
P.O. Box 428
6710 BK Ede, Netherlands
Tel +31 (0) 318 549 300
Fax +31 (0) 318 549 309
E-mail: [email protected]
Brooks Instrument
1-4-4 Kitasuna Koto-Ku
Tokyo, 136-0073 Japan
Tel +81 (0) 3 5633 7100
Fax +81 (0) 3 5633 7101
Email: [email protected]
Remove the envelope containing the packing list. Carefully remove the
instrument from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.
2-3 Recommended Storage Practice
If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following:
a. Within the original shipping container.
b. Stored in a sheltered area, preferably a warm, dry, heated warehouse.
c. 32°C (90°F) maximum,45°F (7°C) minimum.
d. Relative humidity 45% nominal, 60% maximum, 25% minimum.
Upon removal from storage a visual inspection should be
conducted to verify the condition of equipment is "as received".
2-1
Section 2 Installation
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
2-4 Return Shipment
Prior to returning any instrument to the factory, contact your nearest Brooks
location for a Return Materials Authorization Number (RMA#). This can be
obtained from one of the following locations:
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: [email protected]
www.BrooksInstrument.com
Brooks Instrument
Neonstraat 3
6718 WX Ede, Netherlands
P.O. Box 428
6710 BK Ede, Netherlands
Tel +31 (0) 318 549 300
Fax +31 (0) 318 549 309
E-mail: [email protected]
Brooks Instrument
1-4-4 Kitasuna Koto-Ku
Tokyo, 136-0073 Japan
Tel +81 (0) 3 5633 7100
Fax +81 (0) 3 5633 7101
Email: [email protected]
Any instrument returned to Brooks requires completion of Form RPR003-1,
Brooks Instrument Decontamination Statement, as well as, a Material
Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. This is
required before any Brooks Personnel can begin processing. Copies of the
form can be obtained from any Brooks Instrument location listed above.
2-5 Transit Precautions
To safeguard against damage during transit, transport the instrument to the
installation site in the same container used for transportation from the
factory if circumstances permit.
2-6 Removal from Storage
Upon removal from storage, a visual inspection should be conducted to
verify the condition of the equipment is “as received.” If the equipment has
been in storage in conditions in excess of those recommended
(See Section 2-3), the device should be subjected to a pneumatic pressure
test in accordance with applicable vessel codes.
2-7 Gas Connections
Prior to installation ensure all piping is clean and free from obstructions.
Install piping in such a manner that permits easy access to the instrument
if removal becomes necessary.
2-2
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
2-8 In-Line Filter
Unless an integrated (internal) filter is already installed, it is recommended
that an in-line filter be installed upstream from the mass flow controller or
meter to prevent the possibility of any foreign material entering the flow
sensor or control valve MFC. The filtering element should be replaced
periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Models
SLA5850/60
SLA5850/60
SLA5850/60
SLA5850/60
SLA5851/61
SLA5853/63
Maximum Flow Rate
100 ccm
500 ccm
1 to 5 lpm
10 to 100 lpm
10 to 30 lpm
> 100 lpm
Recommended Filter
2 micron
2 micron
10 micron
40 micron
40 micron
Consult factory
Note: Brooks provides many filter options. For those not listed here, please contact factory.
2-9 Installation
Recommended installation procedures:
a. The Brooks Digital MFC or MFM should be located in a clean,
dry atmosphere relatively free from shock and vibration.
b. Leave sufficient room for access to Self-zero function push-button.
c. Install in such a manner that permits easy removal if the instrument
requires servicing.
d. The Brooks Digital MFC or MFM can be installed in any position.
However, mounting in orientations other than the original factory
calibration
(see calibration data sheet supplied with the instrument) can result in a
<±0.2% maximum full scale shift after re-zeroing.
e. When installing a mass flow controller or meter with full scale flow rates
of 10 lpm or greater, be aware that sharp, abrupt angles in the system
piping directly upstream of the controller may cause a small shift in
accuracy. If possible, have at least ten pipe diameters of straight tubing
upstream of the mass flow controller or meter. This is not required for
meters with an integrated filter.
2-3
Section 2 Installation
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Special considerations to be taken when installing the SLA5853 MFC:
The SLA5853 valve is a dual stage, pilot operated valve. The pilot valve
(located on top of the MFC) controls a differential pressure across the main
valve which, in turn controls the main orifice and flow through the device.
The main valve is a pressure operated valve that utilizes a bellows spring
and diaphragm to control flow. This bellows and diaphragm assembly can
be susceptible to damage by pressure spikes. For this reason, it is
recommended that process line startups are handled with care.
The bellows spring is offered in two levels. A low force for low differential
pressures (Delta P < 30psig), and a high force (delta P >30 and <300 psig).
- The selection of the bellows spring is determined by the differential
pressure as specified on the customer order. This should reflect your
actual process conditions.
- The low force bellows is a softer spring which is required to allow flow
control at lower differential pressures.
During startups, when a process line is being pressurized, the pressures
that the SLA5853 is exposed to may not be the same as the final process
conditions. For higher pressure applications, and especially those with the
low force bellows, it is important to bring the pressure up gently in order to
prevent a possible pressure spike to the bellows spring and main valve
diaphragm. A pressure spike could deform the bellows, damage the
diaphragm or blow out an o-ring. This typically results in a failure to shutoff
(leakby at zero setpoint).
2-4
One method to assure successful startups is to set a 100% setpoint
command or valve override open command and then gently ramp the
pressure up to operating conditions. This will allow you to bring your
process up to normal process conditions and the SLA5853 will then
function as specified. Another method is to utilize a bypass valve to allow
pressure around the device while ramping up pressure to proper operating
conditions. The main point is to not instantly open a ball valve and allow a
high upstream pressure surge into the SLA5853 main valve.
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
Stable Operating Conditions:
As stated above, the SLA5853 model utilizes a pressure operated main
valve. Valve performance is dependant on stable system pressures.
Oscillating or unstable upstream or downstream pressures are likely to
cause the device flow control to become unstable. For the best
performance, it is important to create a stable pressure environment by
utilizing quality inlet and back pressure regulators in your process design.
The addition of a back pressure regulator will isolate the SLA5853 from the
unstable downstream pressures inherent in many process designs. For
more information, please contact the Brooks Technical Service group.
2-10 Electrical Interface
The setpoint signal is supplied as a 0(1) to 5 Vdc or 0(4)-20 mA analog
signal. All signals are supplied via the 15-pin D-Connector. For an analog
unit the minimum set of connections which must be made to the MFC and
MFM includes +13.5 - 27 Vdc, supply common, and a setpoint signal.
The Brooks Digital electrical interface is designed to facilitate
low-loss, quiet signal connections. Separate returns (commons) are
supplied for the analog setpoint, analog flow signal, and the power supply.
These commons are electrically connected together on the PC board.
Analog I/O Versions
• Signal Common
• Signal Output (Voltage or Current)
• +13.5 - 27 Vdc Supply
• Setpoint Input (Voltage or Current)
• Setpoint Common
• Supply Common
• Chassis Ground (via unit body)
Refer to Table 1-3 for pin connections
Refer to Figures 2-2, 2-3 and 2-4 for electrical I/O connections
(The Brook’s MFC acts as a current sink to a setpoint input signal. The 0/420 mA setpoint signal should be “driven” into the MFC input by a controlled
current source. Reference Brook’s device specifications for the setpoint
input impedance.)
(The Brook’s MFC acts as the current source when providing a 0/4-20 mA
output signal to the load. The output signal is “driven” by the MFC into the
customer load. Reference Brook’s device specifications for maximum load
capacity.)
2-5
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
For a DeviceNet unit, 11-25 Vdc power and communication I/O are
supplied via the standard 5-pin Circular Micro-Connector.
15 PIN MALE
D-CONNECTOR
*BROOKS READ OUT MFC / MFM
SIDE SUB D (15 PIN)
PIN
6
10
9
2
13
14
3
5
12
8
4
7
1
11
15
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
FUNCTION
Setpoint, Common Input (-)
Flow Signal, 0(1)-5 volt, Output (+)
TTL Alarm, Open Collector, Output (+)
Flow Signal, 0(4)-20 mA, Output (+)
Power Supply, +13.5 Vdc to +27 Vdc (+)
Not Connected
Setpoint, 0(4)-20 mA, Input (+)
Setpoint, 0(1)-5 volt, Input (+)
Power Supply, Common (-)
Flow Signal, Common, Output (-)
Reference, +5 Vdc, Output (+)
Valve Override, Input
Calibration Select, Input
RS-485, Common B (-) Input/Output
RS-485, Common A (+) Input/Output
* Brooks Read Out Models 0151, 0152, 0154, 0254
See Table 3-1 for Resistor values
Figure 2-1 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version
2-6
WIRE
COLOR
Figure 2-2 Common Electrical Hookups, Voltage I/O Version
BLACK
WHITE
RED
GREEN
ORANGE
BLUE
WHT/BLK
RED/BLK
GRN/BLK
ORG/BLK
BLU/BLK
BLK/WHT
RED/WHT
GRN/WHT
BLU/WHT
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 2 Installation
Brooks® Digital MFC's & MFM's
Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)
Figure 2-4 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)
2-7
Section 2 Installation
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
2-11 Operation Check Procedure (Analog I/O)
a. Mount the MFC/MFM in its final orientation.
b. Apply power to the MFC/MFM and allow approximately 45 minutes for
the instrument to completely warm up and stabilize its temperature.
c. Do NOT supply gas to the MFC/MFM. Ensure that the differential
pressure across the MFC/MFM is zero.
d. Apply a setpoint of:
0.000 Vdc ± 10 mV (0 - 5 Vdc setpoint)
1.000 Vdc ± 10 mV (1 - 5 Vdc setpoint)
0.000 mA ± 100 μA (0 - 20 mA setpoint)
4.000 mA ± 100 μA (4 - 20 mA setpoint)
e. If the zero exceeds one of these limits, follow the re-zeroing procedure
in Section 3-4. The analog output signal should be:
0.000 Vdc ± 10 mV (0 - 5 Vdc output)
1.000 Vdc ± 10 mV (1 - 5 Vdc output)
0.000 mA ± 40 μA (0 - 20 mA output)
4.000 mA ± 40 μA (4 - 20 mA output)
f. Turn on the gas supply. A positive flow signal may be present due to
slight valve leak-thru (MFC only).
g. Supply a setpoint signal between:
0 to 5 Vdc (0 - 5 Vdc setpoint)
1 to 5 Vdc (1 - 5 Vdc setpoint)
0 to 20 mA (0 - 20 mA setpoint)
4 to 20 mA (4 - 20 mA setpoint)
h. Check the analog output signal. The output signal should match the
setpoint signal in accordance with the accuracy specifications provided
in Section 1-4 of this document.
i. If flow output signal does not match the setpoint, and pressure settings
are correct, this could indicate a problem in the MFC. A secondary
issue could be the gas type. When checking with a surrogate gas,
ensure that there is enough pressure to the MFC in order to flow the
correct amount of the surrogate gas.
Example:
Checking an MFC calibrated for 100 ccm SF6 (sulfur hexafluoride).
The sensor factor N2 (nitrogen) is 0.27, therefore the eqivalent N2
needed is 100/0.27 = 370.4 ccm. This may require a pressure
increase to make this flow rate.
2-8
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
2-12 Digital I/O: DeviceNet or FOUNDATION Fieldbus
a. Mount the MFC/MFM in its final orientation.
b. Apply power to the MFC/MFM and allow approximately 45 minutes for
the instrument to completely warm up and stabilize its temperature.
c. Turn on the gas supply. A positive flow signal may be present due to
slight valve leak-thru (MFC only).
d. Provide the proper UOM setpoint between 20% and 100% FS to the
MFC via the digital network controller.
e. Check the MFC Flow value. It should match the setpoint UOM. Value
within ± 0.2% FS in less than 10 seconds after setpoint change.
f. If flow output signal does not match the setpoint, and pressure settings
are correct, this could indicate a problem in the MFC. A secondary
issue could be the gas type. When checking with a surrogate gas,
ensure that there is enough pressure to the MFC in order to flow the
correct amount of the surrogate gas.
Example:
Checking an MFC calibrated for 100 ccm SF6 (sulfur hexafluoride).
The sensor factor N2 (nitrogen) is 0.27, therefore the equivalent N2
needed is 100/0.27 = 370.4 ccm. This may require a pressure increase
to make this flow rate.
2-13 DeviceNet I/O Assemblies
Other problems that may occur in an operational checkout of a DeviceNet
MFC could be due to data mismatches of Input/Output I/O assemblies. For
proper communication over the DeviceNet network, the MFC must be set
up with the same I/O Assembly as the network master. The DeviceNet
specification defines Input and Output relative to the network (i.e. the data
being PRODUCED from the device (MFC) as an INPUT into the network or
the data is being CONSUMED by the device (MFC) is an OUTPUT from
the network). The Brooks MFC supports 12 instances of Input Assemblies
and 4 instances of Output Assemblies.
NOTE: This information and all other detailed DeviceNet information is
available in the Brooks DeviceNet Supplement Instruction Manual.
2-9
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
THIS PAGE WAS
INTENTIONALLY
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2-10
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
3-1 Overview
This section contains the following information:
• Theory of Operation
• Features
3-2 Theory of Operation for Flow Measurement
The thermal mass flow measurement system consists of two components:
the restrictor and the flow sensor. Figure 3-1 contains a diagram of the flow
stream through the MFC/MFM with an enlarged view of the flow sensor.
Gas flow entering the MFC/MFM is separated into two paths; one straight
through the restrictor and the other through the flow sensor. This is
represented in Figure 3-1 where the total flow A+B enters the MFC/MFM
and is separated into streams A and B. The streams are joined again at the
far side of the restrictor.
The separation of the flow streams is caused by the restrictor. During flow
conditions there will be a pressure differential across the restrictor which
forces gas to flow in the sensor.
The pressure difference caused by the restrictor varies linearly with total
flow rate. The sensor has the same linear pressure difference versus flow
relationship. The ratio of sensor flow to the flow through the restrictor
remains constant over the range of the MFC/MFM (A/B = constant). The
full scale flow rate of the MFC/MFM is established by selecting a restrictor
with the correct pressure differential for the desired flow.
The flow sensor is a very narrow, thin-walled stainless steel tube. Onto this
tube are built upstream and downstream temperature sensing elements on
either side of a heating element. Constant power is applied to the heater
element, which is located at the midpoint of the sensor tube. During noflow conditions, the amount of heat reaching each temperature sensor is
equal, so temperatures T1 and T2 (Fig. 3-1) are equal. Gas flowing
through the tube carries heat away from the upstream temperature sensor
and toward the downstream sensor. The temperature difference, T2 - T1,
is directly proportional to the gas mass flow. The equation is:
DT = A x P x Cp x m
Where,
DT = Temperature difference T2 - T1 (°K)
A = Constant of proportionality (s2-°K2/kJ2)
P = Heater Power (kJ/s)
Cp = specific heat of the gas at constant pressure (kJ/kg - °K)
m = Mass Flow (kg/s)
A bridge circuit and a differential amplifier interpret the temperature difference
and generate an electrical signal directly proportional to the gas mass flow
rate.
3-1
Section 3 Operation
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
3-3 Features
Note: All Brooks Digital Series mass flow meters are configured at the
factory according to customer order and do not require adjustment. Not all
features are available on all instruments.
The Brooks Digital is a full-featured digital MFC. The Brooks Digital
performs much like a traditional analog MFC, but with improved accuracy,
step response and valve control. The analog interface matches that of
Brooks' popular analog MFCs so it can be retrofitted into tools using
analog MFCs. Other versions of the Delta Class can provide a variety of
digital protocols, for example DeviceNet and RS-485.
The Brooks Digital equipment is capable of storing up to 10 different sets
of gas calibration data. Each set includes a calibration curve, PID controller
settings, valve performance data, and information about the calibration
conditions. The Brooks Digital equipment can contain calibrations for
different gases or for the same gas at multiple conditions (pressures, fullscale flow rates). Section 3-4 Analog I/O Mode of Operation describes
more information about the data contained in the calibration table and how
to access the data.
The DeviceNet Instruction Manual describes further details on specific
communication features.
Calibrations will appear in the calibration table in the same order as they
appeared on the customer order, unless otherwise specified. The first
listed gas will appear as calibration #1 the second as calibration #2 and so
on. Note that unless specified otherwise on the customer order any unit
containing a single calibration will have that calibration stored in calibration
position 1.
3-2
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 3 Operation
Brooks® Digital MFC's & MFM's
Figure 3-1 Flow Sensor Operational Diagram (VCRTM End Connections Shown)
Figure 3-2 Externally Accessible Adjustment for all Meters/Controllers.
3-3
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
3-4 Analog I/O Mode of Operation
The following paragraphs describe the basic features of the Brooks Digital
Series Mass Flow Meters/Controllers.
NOTE: Read Section 3-3, Features, before reading this section. See
DeviceNet Supplemental Instruction Manual for specific details on
communication features.
Functional Description
The analog interface may include any of the following I/O options as
specified by the user:
0 - 5 Vdc setpoint, 0 - 5 Vdc flow output
1 - 5 Vdc setpoint, 1 - 5 Vdc flow Output
0 - 20 mA setpoint, 0 - 20 mA flow output
4 - 20 mA setpoint, 4 - 20 mA flow output
Also included are the Valve Override input and Calibration Select input
pins. All analog signals available are on the 15 pin D-Connector. (See Fig.
2-1 for connections). Note that one formerly unused connector pin, Pin 13,
now allows selection of up to ten separate calibrations. The contents of the
ten calibrations are determined from the customer order. Only those
calibrations ordered will be available in the instrument. Unless otherwise
specified, a Brooks Digital MFC/MFM ordered with only one calibration will
have that calibration stored in calibration #1.
Before operating the MFC/MFM, apply power and warm-up the instrument
for approximately 45 minutes. After warm-up, apply gas pressure then
proceed by following the instructions in the following sections.
Analog I/O Setpoint (MFC Only)
This input allows the user to establish the MFC setpoint,. Several input
types are available as follows:
Setpoint Signal Type
0 to 5 Vdc
1 to 5 Vdc
0 to 20 mA
4 to 20 mA
Full Scale
5 Vdc
5 Vdc
20 mA
20 mA
Minimum Signal
0V
1 V
0 mA
20 mA
Maximum Signal
5.5 Vdc = 110%
5.5 Vdc = 111%
22 mA = 110%
22 mA = 111%
Analog I/O Flow Signal
This output is used to indicate the flow signal. A negative flow signal
indicates reverse flow through the device, but is NOT calibrated.
Several flow signal types are available:
Anolog I/O Type
0 to 5 Vdc
1 to 5 Vdc
0 to 20 mA
4 to 20 mA
3-4
Full Scale
5 Vdc
5 Vdc
20 mA
20 mA
Minimum Signal
-0.5 V
0.5 V
0 mA
3.8 mA
Maximum Signal
5.5 Vdc = 110%
5.5 Vdc = 111%
22 mA = 110%
22 mA = 111%
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
Valve Override (MFC Only)
Connector Pin 12 on the 15 pin D-Connector allows the valve to be forced
to its most closed state or its most open state, regardless of setpoint. If this
input is not electrically connected, the MFC will operate according to the
current values of the other MFC inputs. If this input is held at 0 Vdc or -15
Vdc the valve will be forced to its most closed state. If this input is held at
+5 Vdc or greater (max. = 24 Vdc), the valve will be forced to its open
state.
Calibration Select Pin
Connector Pin 13, on the15 pin D-Connector allows selection of one of ten
calibrations stored in the device. This pin is designed to accept pull-down
resistors referenced to signal common (Pin 10).
Table 3-1 shows typical resistor values required for selecting calibrations 1
through 10. Note, these resistor values should be within ± 1% tolerance.
The default condition is with no resistor connected which activates
Calibration #1.
When the calibration select pin changes state, the device performs any
required processing to change the calibration, then returns to normal
operation. If the device determines that the selected calibration is not valid,
(where applicable) the valve is driven to the closed state and the flow
signal is set to zero. Typical time required to change calibrations is
approximately 1.0 second.
NOTE: It is recommended to change calibration curve selection during no-flow
conditions.
Table 3-1 Typical Resistor Values for Calibration Selection
CAL#
1
2
3
4
5
6
7
8
9
10
RESISTOR VALUE (K ohms)
Open
Shorted
665
324
191
124
80.6
52.3
30.9
15
Zeroing the MFC (Self-zero)
It may be desirable to re-zero the flow sensor if it is operated at its
temperature extremes or if it is positioned in an attitude other than that
specified on the customer order.
Note: Before zeroing the instrument, zero pressure differential MUST be established
across the device. If there is pressure across the instrument during the zero process,
any detected flow through the sensor will be misinterpreted as the zero flow reading.
This will result in calibration inaccuracy during normal operation.
Once zero differential pressure is established and verified, press the recessed,
momentary push-button (self-zero button) located on the side of the device
(See Figure 3-2) to start the self-zero function. The zeroing process requires
approximately 10 mseconds.
3-5
Section 3 Operation
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
5 Vdc Reference
Connector Pin 11 on the 15 pin D-Connector provides a 5 Vdc reference
output signal and is for use in generating a setpoint and/or Valve Override
Signal. The current drive capability of this output is limited to 2.5 mA
maximum and must be used with care.
3-5 Communications Features
3-5-1 RS-485 Communications Features (Analog versions only)
Digital communication, designed to emulate the Brooks S-series
"S-protocol" or pseudo-HART communications is available on the Brooks
Digital Series via RS-485. This form of multi-drop capable communication
provides access to many of the Brooks Digital Series functions for "control
and monitor" operations, including:
• Accurate setpoint adjustment flow output measurement
(including units of measure selection)
Valve Override (controller only)
•
• Flow Totalizer
• Alarm status and settings
• Soft Start Control (controller only)
RS-485 equipped units support the following baud rates. Please specify the
desired baud rate when ordering (default is 19200 baud). Alternately, baud
rate may be changed using the Brooks Service SuiteTM.
Baud Rates: 1200, 2400, 4800, 9600, 19200 and 38400
Reference the Brooks document "S-protocol Communication Command
Description for Smart II" for more detail regarding the capabilities of this
communication interface.
3-6
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
3-5-2 DeviceNet Communications Features
The Brooks SLA5800 Digital Series is also available with DeviceNetTM
communication capability. DeviceNet is an open digital protocol capable of
high speeds and easy system connectivity. Brooks Instrument has several
of its devices available on this popular networking standard, and is a
member of ODVATM (Open DeviceNet Vendors Association), the governing
standard body for DeviceNet.
DeviceNet is similar to the RS485 standard in that it is a multi-drop
connection that allows a maximum of 64 devices to be connected on the
same network. Baud rate selections for DeviceNet products are 125K,
250K and 500K and can be selected via MAC ID switches mounted on the
device.
The DeviceNet communication link also provides access to many of the
Brooks SLAMf Digital Series functions for “control and monitor” operations,
including:
• Accurate setpoint adjustment and flow output measurement (including
units of measure selection)
• PID Settings (controller only)
• Valve Override (controller only)
• Calibration Gas Select
• Soft Start Control (controller only)
3-5-3 FOUNDATION Fieldbus Communications Features
The Brooks SLA5800 Digital Series is supporting FOUNDATION® Fieldbus
communication protocol. FOUNDATION® Fieldbus is a digital network allowing
usage of existing 4-20mA cables, avoiding costly re-wiring. Fully certified
by passing ITK, this device has passed several Interoperability
requirements other a broad range of hosts. When combined with DeltaV
and using the power of PlantWeb, those devices provide intelligent alerts
allowing accurate device maintenance and service.
· Value Range check - Part of the standard function blocks
· Temperature sensor connection - Check sensor connection
· Firmware checksum - Check for Internal firmware integrity
· Non-volatile memory - Check for non-volatile memory integrity
· RAM - Check for RAM integrity
· Zero Drift/Valve Leak-by - Check for flow leak-by or sensor zero drift
· Device Overhaul due - Preventive Maintenance
· Calibration Due - Preventive Maintenance
· Valve spring life - Preventive Maintenance
· No Flow - No flow detected when setpoint requested
· Reverse Flow - Reverse flow detected
· Flow Totalizer - Informed when a user define amount of fluid has been
delivered
· Time Totalizer - Informed when a user define amount of time has
expired
3-7
Section 3 Operation
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Device type dependant function block are available representing the
different device functions:
· Current Flow Value (Mass Flow device only)
· Current Pressure Value (Pressure device only)
· Current Device Temperature (Mass Flow device only)
· Current Valve position (Controller Only)
· Setpoint Control (Controller Only)
· Direct Valve Control (Controller Only)
· Actuator Override (Controller Only)
· Ultra-fast (8ms) PID function block for Cascade control (all devices)
3-6 Alarms and Warnings (Analog versions only)
This section outlines alarms and warnings associated with the Analog
versions of the Brooks Digital Series.
For information describing alarms and warnings for Brooks DeviceNetTM
units, reference the Brooks DeviceNetTM Supplemental Manual.
3-6 -1 Alarms and Warnings (Analog versions only)
Connector Pin 3, on the 15 pin D-Connector provides an open collector
TTL output that will close depending on the alarm/warning situation and the
alarm settings.
Alarms and Warnings are a user configurable feature. This feature may be
adjusted via the Service Port using a special software application available
from Brooks. Reference the Brooks Service Suite User Manual for more
information about the Service Port and Service Tool software applications.
Each alarm has the following common user configurable traits:
Severity - The options are Off, Warning and Alarm. When set to Off, the
conditions are not monitored and no actions will be taken. When set to
Warning, the Alarm LED will flash Green when the monitored value
exceeds the specified conditions. (See Alarm Code attribute). When set to
Alarm, the Alarm LED will flash Red and the Analog Outputs will act based
on the assigned Output Alarm Behavior when the monitored value exceeds
the specified conditions.
Alarm Code - The alarm code specifies the code to be flashed on the LED
to indicate that an alarm/warning condition has occurred. When more than
one alarm/warning is active, then the LED will indicate the most severe
alarm with the highest Alarm Code. An Alarm is more severe than a
Warning. Alarm Codes do not have to be unique, i.e., more that one alarm/
warning type can use the same alarm code.
3-8
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
Latching Enable - When an alarm/warning is set to non-latching, that
means the alarm is indicated only when the monitored value exceeds the
specified conditions. When the alarm/warning is set to latching, this means
that the alarm/warning will be indicated when the monitored value first
exceeds the specified conditions, and will be indicated until the user clears
the alarm. If the user clears the alarm while the monitored value still
exceeds the specified conditions, then the alarm will be re-latched and
continue to be indicated.
Contact Enable - If the alarm condition is detected and the severity is
alarm or warning, and the alarm contact is enabled, then the alarm contact
is “closed”.
Low Limit - The value of the monitored value below which is considered
an alarm/warning condition. (This attribute not valid for alarms that monitor
a state condition of the device.)
High Limit - The value of the monitored value above which is considered
an alarm/warning condition.(This attribute not valid for alarms that monitor
a state condition of the device.)
Delay - The time in seconds that the value must remain above the high
limit or below the low limit before an alarm/warning condition is indicated.
Alarm Summary
The following table summarizes the parameters for each alarm type and
the respective default values.
Alarm
Severity
Diagnostic
Flow 1
Flow 2
No Flow Indication
Setpoint Deviation
Totalizer Overflow
User Power Supply
Setpoint Input Out of Range
Flow Output Out of Range
Flow Output Loop Open
Flow Sensor Out of Range
Alarm
Off
Off
Alarm
Alarm
Off
Alarm
Alarm
Alarm
Off
Alarm
Alarm
Code
12
11
10
9
8
7
6
5
4
3
1
Latching Contact Low
Enable Enable Limit
n/a
Off
n/a
Off
Off
0%
Off
Off
0%
Off
Off
2%
Off
Off
-10%
n/a
Off
n/a
Off
Off
13.5
Off
Off
n/a
Off
Off
n/a
Off
Off
n/a
Off
Off
n/a
High
Limit
n/a
120%
120%
n/a
+10%
n/a
27.0
n/a
n/a
n/a
n/a
Delay
n/a
1.0
1.0
1.0
1.0
n/a
1.0
1.0
1.0
1.0
1.0
3-9
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
3-6-2 Diagnostic Alarms (Analog versions only)
A Diagnostic Alarm will be indicated when any of the diagnostics below
detect a failure providing a visual indication via the red and/or green LED,
and activating the TTL open collector output located on the 15 pin
D-Connector. The diagnostic test or tests that have detected a problem
and caused the Diagnostic Alarm to occur can be determined only by
reading a parameter via the Service Port. When a diagnostic alarm occurs,
the device will automatically reset after approximately 5 seconds.
Diagnostic
RAM
Flash (Program Memory)
Non-Volatile Memory
Temperature Sensor
Power Supply (Internal)
Failure Description
Byte by byte test of RAM detects bad memory location
8-bit Checksum of the entire Flash not zero.
Byte by byte test of Non-Volatile Memory detects bad memory
location
Temperature Sensor reports a value outside the designed range of
0° C to 100° C
Any internally generated power supply voltage outside operational
limits. (3.3 Volt and 7.6 Volt internal supply voltages must be within ±
5% of nominal value.)
Safe Mode
When the Device is in Safe Mode, the following behavioral characteristics
of the device apply:
Flow Output Signal will be set to its defined Safe State for the following
output signal types:
0 to 5 Vdc: 0 Vdc
1 to 5 Vdc: 1 Vdc
0 to 20 mA: 0 mA
4 to 20 mA: 0 mA
In the Safe State, the valve will be unpowered. This means that for
Normally Closed valves, the valve will stay closed and for Normally Open
valves, the valve will stay open.
3-10
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
3-6-3 General Alarms and Warnings (Analog versions only)
Several alarms are available to indicate unexpected process control events
as follows:
Flow Alarms
Two flow alarms will be provided. Each will allow the user to set a minimum
and maximum flow limit range. Whenever flow is not within the range, the
alarm will occur. These two general flow alarms provide more flexibility
than having specific low and high flow alarms. These two alarms may be
used to create separate low and high flow alarms, or maybe used to
provide banding around a flowrate. If the device is a controller, then this
alarm is disabled if the setpoint is not within the specified flow limits or if
the valve override is active.
User Power Supply Alarm
The User Power Supply Alarm monitors the Power Input to the device for
values outside the device specification of 13.5 to 27 Vdc. The user can
configure the voltage limits that activate this alarm in order to monitor their
supply voltage for a tighter specification than the device requires.
Setpoint Deviation Alarm
The Setpoint Deviation Alarm monitors the difference between Setpoint
and Flow and sets the alarm when the difference exceeds the specified
limits for more than the specified delay period. The user specifies a
minimum and maximum limit in percent of Setpoint. This alarm is disabled
if the valve override is active.
No Flow Indication Alarm
The No Flow Indication Alarm will occur when the measurement of flow
indicates flow less than a value that can be configured to 0 - 2%. If the
device is a controller, setpoint must exceed the configured limit and valve
override must not be active for this alarm to occur.
Totalizer Overflow Alarm
The Totalizer Overflow Alarm will occur when the Flow Totalizer reaches its
maximum value and resets to zero. This alarm is permanently configured
as a latching type alarm which requires the user to reset the alarm via the
Service Port or the RS-485 interface.
Flow Analog Output Loop Open Alarm
The Flow Analog Output Loop Open Alarm will occur when the device
detects that there is no current flowing on the current loop. This alarm
could be the fault of an open connection on the analog output current loop.
Setpoint Analog Input Out of Range Alarm
The Setpoint Analog Input Out of Range Alarm will occur when the Voltage
Input exceeds the maximum allowable 5.5 V, when the 4 – 20 mA input is
less than 3.8 mA or greater than 22 mA, or when the 0 – 20 mA input is
greater than 22 mA.
3-11
Section 3 Operation
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Flow Analog Output Out of Range Alarm
The Flow Analog Output Out of Range Alarm will occur when the measured
flow results in an Analog Output which exceeds the specified range for
either the Voltage or Current Output. See Section 1.
Flow Sensor Out of Range
The Flow Sensor Out of Range Alarm will occur when the device detects
that the signal received from the sensor is not within the allowable
tolerance band. This alarm could be the result of a flow sensor failure.
3-7 Calibration/Configuration Sets
All Flow Calibration parameters and some of the device configuration
parameters are saved in the device Non-Volatile Memory as “sets”. Up to
10 sets of calibration/configuration sets can be saved in order to have a
unit pre-configured for multiple gas calibration, different pressure
conditions, multiple scalings of the same gas.
Calibration and configuration data sets may be adjusted by an advanced
user via the Service Port using a special software application available
from Brooks. Reference the Brooks Service Suite User Manual for more
information about the Service Port and Service Tool software applications.
Flow Calibration Options
In addition to the factory calibration polynomial, the following calibration
options are provided to modify the factory calibration:
- Gas Correction Factor
- Calibration Scaling
- User Calibration Polynomial
Configuration Options
The following configuration parameters are stored in the Calibration/
Configuration Sets:
- P, I, and D
- Valve Offset, Span, and Leaktight Offset
- Pole Compensation and filtering
3-12
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 3 Operation
Brooks® Digital MFC's & MFM's
3-8 Special Features
Special Features may be adjusted by an advanced user via the Service
Port using a special software application available from Brooks. Reference
the Brooks Service Suite User Manual for more information about the
Service Port and Service Tool software applications.
3-8-1 Setpoint Ramping
The following Setpoint Ramping Options are provided:
Off – The device responds immediately to Setpoint changes.
Time – The device will Ramp Flow from the old Setpoint to the new
Setpoint in the time specified by the user in seconds.
3-8-2 Low Setpoint Command Cutoff
When the Setpoint is derived from analog input, the Low Setpoint
Command Cutoff parameter sets the minimum valid value of Setpoint. If
the Setpoint value reported by the analog input is below the Low Setpoint
Command Cutoff parameter value, then the Setpoint will be set to zero.
3-8-3 Low Flow Output Cutoff
Whenever the measured flow is below the Low Flow Output Cutoff
parameter, the Flow Output will be set to zero.
3-8-4 Flow Output Damping
The Flow Output can be damped from 0 to 10 seconds.
3-8-5 Adaptive Control
Adaptive Valve Control is a means of dynamically adjusting valve offset
and span in response to changing process conditions. Options for Adaptive
Control are: On/Off, Adjust Offset Only, Adjust Offset and Span.
3-8-6 Flow Totalizer
A Flow Totalizer will be provided and maintained in Non-Volatile Memory.
The update rate of the totalizer in Non-Volatile Memory will be 5 seconds.
3-8-7 Flow Output Conditioning
When this feature is enabled and a change in setpoint is detected, the
Flow Out signal will equal setpoint for a configurable time period. At the
end of the time period, the Flow Out signal will indicate actual flow. A
change of setpoint is defined as a change of more than 1% of full scale.
3-13
Section 3 Operation
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
3-8-8 Flow Signal Lock-in
When this feature is enabled, the Flow Out signal will “lock-in” to the
setpoint value whenever the error between measured Flow and Setpoint is
less than a configurable value.
3-9 PC-based Support Tools
Brooks Instrument offers a variety of PC-based process control and service
tools to meet the needs of our customers. SmartDDE may be used with any
unit supporting RS-485 in a multidrop configuration, thus allowing users to
control and monitor their Brooks devices. The Brooks Service Suite (Analog
I/O versions only) may be used to monitor, diagnose, tune and calibrate
Brooks devices. The Brooks Service Suite interfaces with Brooks products
via a special service port. The Brooks Service Tool (BST) may be used for
devices equipped with digital communications to perform many of the same
tasks as the Brooks Service Suite.
3-14
Section 4 Maintenance
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
4-1 Maintenance and Troubleshooting
No routine maintenance is required on the Brooks Digital MFC's and
MFM's. If an in-line filter is used, the filtering elements should be
periodically replaced or cleaned.
4-1
Section 4 Maintenance
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
4-1-1 Troubleshooting Analog or DeviceNet version
This section contains suggestions to help diagnose MFC related problems
in the gas distribution system and answers commonly asked questions.
Failure of the flow rate or flow signal to achieve setpoint.
1. Insufficient pressure drop across the MFCs (low or no pressure). If there
is not enough pressure differential across the MFC, it is impossible for
the MFC's orifice to pass the full scale flow rate. To check for this
condition, compare the actual inlet/outlet pressure drop with that
specified on the order. Increase the pressure if necessary.
2. If pressure settings are correct and flow signal does not match setpoint,
a secondary issue could be the gas type. If checking the MFC with a
surrogate gas, ensure that there is enough pressure to the MFC in
order to flow the correct amount of the surrogate gas.
3. Setpoint is below minimum. MFCs may have a settable low flow cutoff
for the setpoint command. If setpoint is below this value, then the MFC
will not attempt to control.
4. Clogged sensor tube. If the MFC sensor tube is clogged, the flow signal
will be very low or zero while the actual flow will be at the valve's
maximum rate.
5. Flow signal matched setpoint but, actual flow is not correct.
Clogged restrictor. If the MFC's restrictor becomes clogged, a much
larger flow stream will pass through the sensor rather than going
straight through the restricotr. The symptom of this condition is a
substantially reduced actual flow with a flow signal which matches the
setpoint.
6. Flow rate in excess of 100% at zero setpoint.
Valve Override pin set to open. If Vallve Override (VOR) pin is active,
the valve will be forced open or closed. Set this pin to it's normal level
before setting a setpoint.
7. Flow/Flow signal 'Unstable'
Model SL5800 Series MFC performance is tuned during calibration at
the conditions specified on the order. If the conditions in use (inlet and
outlet pressure, temperature, attitude, gas or mixture type) are different
or become different over time, the MFC may not perform as it didwhen
it left the factory.
DeviceNet Version Only
8. Failure of the flow rate or flow signal to achieve setpoint.
Specifically for a DeviceNet MFC, there may be problems associated
with the network communication link. One common problem is due to
data mismatches of the Input/Output (I/O) Assemblies. For proper
communication ove rthe DeviceNet network, the MFC must be set up
with the same I/O assemby as the network master. Confirm these I/O
settings are correct.
4-2
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 4 Maintenance
Brooks® Digital MFC's & MFM's
NOTE: This information and all other detailed DeviceNet information is available in
the Brooks DeviceNet Supplement Instruction Manual.
Questions Analog Version
Q: What is purpose of the LED on top of the MFC?
A: The LED on top of the MFC should normally be lit GREEN, This
signifies the MFC is in proper working mode. If the LED is lit RED, this
signifies a critical fault has occurred in the MFC. Please contact the
factory for instructions.
Questions DeviceNet Version
Q: What is purpose of the LED on top of the MFC?
A: There are two LEDs on top of a DeviceNet version MFC. The LED
labeled 'MOD' is used to indicate module status. This LED should
normally be lit GREEN. If the 'MOD' LED is lit RED, this signifies a
critical fault has occurred in the MFC. Please contact the factory for
instructions. The LED labeled 'NET' is used to indicate NETWORK
status. Note the 'NET' LED can have 4 distinct operational states. For
more complete details on these LEDs, reference the Brooks DeviceNet
Supplement Instruction Manual.
Q: What is purpose of the Rotary Switches on top of the MFC?
A: Two of the rotary switches are labeled 'ADDRESS'. These two switches
are used to configure the MAC ID of the MFCwhen used on the
DeviceNet network. MAC ID stands for Media Access Control Identifier
and is used to set the unique address of the device on the network. The
possible range of addresses is 00 to 63. The out-of-box MAC ID setting
is 63. The third rotary switch is labeled 'RATE'. This switch sets the
baud rate of the MFC for communicating over the DeviceNet network.
The out-of-box default setting is 125K baud. For more complete details
on these switches, reference the Brooks DeviceNet Supplement
Instruction Manual.
Analog or DeviceNet Version
Q: What is the purpose of the recessed push-button on the side of the
MFC?
A: This push-button is used to start a self-zero function. DO NOT press
this button unless you are performing this function as described in
Section 3-5 of this manual.
4-3
Section 4 Maintenance
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
Table 4-1 Sensor Troubleshooting
SENSOR
SCHEMATIC
PIN
NO.
1
2
3
4
5
6
7
FUNCTION
Heater
Upstream
Temperature
Sensor (Su)
Downstream
Temperature
Sensor (Sd)
Sensor Common
Heater Common
Thermistor
Thermistor
Flex Circuit Wire Numbers
Remove the sensor connector from the PC Board for this procedure.
OHMMETER CONNECTION
Pin 1 or 4 to meter body
Pin 4 to Pin 2
Pin 4 to Pin 3
RESULT IF ELECTRICALLY FUNCTIONAL
Open circuit on ohmmeter. If either heater (1) or
sensor common (4) are shorted, an ohmmeter
reading will be obtained.
Nominal 1100 ohms reading, depending on
temperature and ohmmeter current.
Pin 5 to Pin 1
Nominal 1000 ohm reading.
Pin 6 to Pin 7
Nominal 580 ohm reading.
4-1-2 System Checks
The Brooks Digital Series Flowmeters and Controllers are generally used
as a component in gas handling systems, which can be complex in nature.
It can therefore be very difficult to isolate a malfunction in the system. An
inaccurately diagnosed malfunction can cause many hours of unnecessary
downtime. If possible, perform the following system checks before
removing a suspect Mass Flow Meter or Controller for bench
troubleshooting or return to the factory. (especially if the system is new):
4-4
1. Verify a low resistance common connection and that the correct power
supply voltage and signals are present of the connector of the Smart
TMF.
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section 4 Maintenance
Brooks® Digital MFC's & MFM's
2. Verify that the process gas connections have been made correctly, and
that they have been tested for leaks.
3. If the Mass Flow Controller appears to be functioning but cannot
achieve Setpoint, verify that there is sufficient inlet pressure and
pressure drop at the controller to provide the required flow.
This section contains suggestions to help diagnose simple MFC/MFM
related problems in the gas distribution system and answers commonly
asked questions.
Bench Troubleshooting
1. Establish a proper connection between the Brooks Digital Series Mass
Flow Meter or Controller (using Figure 4-1 as a reference) Switch on
the power and allow the instrument to warm-up for 45 minutes. In case
of a Controller model, adjust the Setpoint to zero. Do not connect the
device to a gas source yet. Observe the output signal and, if necessary,
perform the zero adjustment procedure (See Section 3-4 zeroing
function). If the output signal does not zero properly, please contact
Brooks Instrument.
2. Connect the instrument to a source of the same gas used for it's
original calibration. Regulate the Setpoint to 100% flow and adjust the
inlet and outlet pressures to calibration conditions. Verify that the output
signal reaches its full scale value and stabilizes at that value. Vary the
command voltage over the 1 to 100% range and verify that the output
signal follows the Setpoint If possible, connect a flow measurement
device to monitor the actual flow behavior and verify the accuracy of the
mass flow instrument. If the mass instrument performs as described
above, then it is functioning correctly and the problem may lie
elsewhere.
Figure 4-1 Bench Troubleshooting Circuit
4-5
Section 4 Maintenance
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Table 4-2 lists possible malfunctions which may be encountered during
bench troubleshooting.
For Controller Models Only: Apply +5 Vdc to the +15 Vdc valve override pin
(pin 12) and verify that the output exceeds 100%. Connect the valve
override pin to earth and verify that the output signal falls below 2%.
4-1-3 Cleaning Procedures
When deposition makes it necessary to clean the Brooks Digital Series
Mass Flow Controller or Mass Flow Meter, use the following procedures:
1. Remove the unit from the system.
2. Purge with dry nitrogen gas, which removes virtually all particulate
matter from the device. Should contamination persist, subject all
wetted1 components to ultrasonic cleaning. Following this, purge the
device thoroughly with dry nitrogen gas once again.
3. If the sensor is contaminated, remove the sensor and use a haemostat
or tweezers to push a 0.007" diameter piano wire through the
flow-sensor tube to remove any contamination (end closest to the
control valve). The sensor tube can then be flushed with a solvent that
leaves no residue. This can be accomplished conveniently using a
hypodermic needle filled with solvent.
NOTE: Do not soak the sensor assembly in a cleaning solvent. If solvent
seeps into the sensor assembly, it will likely damage or significantly alter
the sensor's operating characteristics.
4-1-4 Calibration Procedure
The calibration of Brooks Digital Series Mass Flow devices is not described
in this manual. Such calibration requires accurate and traceable calibration
equipment such as Brooks Vol-U-Meter® equipment, in addition to digital
communications.
If your device needs calibration Brooks Instrument can provide this service
at one of its service locations. Visit www.BrooksInstrument.com to locate
the service location nearest to you. However, if traceable calibration
equipment is available at your facility, Brooks service Suite Calibration
software, along with training, is available for purchase.
1
4-6
Wetted components include the body, laminar-flow element, and all valve components including the orifice, process adapters and inlet
filters (if so equipped).
Section 4 Maintenance
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
Table 4-2 Troubleshooting
Trouble
Output stays at zero
(regardless of Setpoint) and
there is flow through the
meter/controller
Flow cannot be achieved
regardless of Setpoint.
(applicable to MFC)
Output signal stays at approx.
5.5 Vdc or 22 mA
(regardless of Setpoint) and
there is flow through the
meter/controller
Output signal follows Setpoint
at higher Setpoints but will not
go below 2%
Output signal follows Setpoint
at lower Setpoints, but does
not reach full scale
Instrument grossly out of
calibration. Flow is higher than
desired.
Instrument grossly out of
calibration. Flow is lower than
desired.
Controller oscillates
(applicable to MFC)
Possible cause
Clogged Sensor
Check/Corrective Action
Clean sensor. Refer to cleaning procedures
(Section 4-1-2).
Defective electronic board
Clogged Control Valve
Contact Brooks Instrument
Clean the control valve (Section 4-1-2) or
return the device to the factory
Valve override input is grounded
Check the valve override input (Pin 12)
Defective electronic board
Valve leaks or is stuck open
(applicable to MFC)
Contact Brooks Instrument.
Clean and/or adjust control valve
(Section 4-1-2).
+15 V applied to the valve
override input
(applicable to MFC)
Check the valve override terminal (Pin 12)
Defective PC board
Control valve leaks or is stuck
open.
Contact Brooks Instrument
Clean the control valve or return the device
to the factory (Section 4-1-2).
Insufficient inlet pressure or
pressure drop
Adjust pressures, inspect in-line filters and
clean/replace as necessary.
Partially clogged sensor
Clean sensor, see cleaning procedures
(Section 4-1-2).
Partially clogged valve
(applicable to MFC)
Clean the control valve (Section 4-1-2) or
return the device to the factory, see
cleaning proceedures
Valve out of adjustment
(applicable to MFC)
Contact Brooks Instrument
Valve guide spring failure
(applicable to MFC)
Partially clogged sensor
Contact Brooks Instrument
Partially clogged restrictor
Replace or clean restrictor
Pressure drop or inlet pressure
deviates from calibrated values
Adjust pressures to original specifications
Valve out of adjustment
Contact Brooks Instrument
Unstable inlet pressure
Check external pressure regulator
Defective PC board
Contact Brooks Instrument
Clean sensor, see cleaning procedures
(Section 4-1-2).
4-7
Section 4 Maintenance
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
THIS PAGE WAS
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4-8
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section A, CE Certification of
Mass Flow Equipment
Brooks® Digital MFC's & MFM's
Dansk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Emne
:
Tillæg til instruktions manual.
Reference
:
CE mærkning af Masse Flow udstyr
Dato
:
Januar-1996.
Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj
(EMC direktivet 89/336/EEC).
Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
Kvaliteten af signal kabler og stik:
Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten
være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 100%
dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,
Deutsch
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject
:
Nachtrag zur Bedienungsanleitung.
Referenz
:
CE Zertifizierung für Massedurchflußgeräte
Datum
:
Januar-1996.
Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/
EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.
Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.
Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen
Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.
•“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.
Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von
360 ° anzuschließen.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CEZertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.
A-1
Section A, CE Certification of
Mass Flow Equipment
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
English
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject
:
Addendum to the Instruction Manual.
Reference
:
CE certification of Mass Flow Equipment
Date
:
January-1996.
The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used
providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE
certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
Español
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Asunto
:
Addendum al Manual de Instrucciones.
Referencia
:
Certificación CE de los Equipos de Caudal Másico
Fecha
:
Enero-1996.
Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas
referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).
Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un
equipo con marca CE
Calidad del cable de señal, prensaestopas y conectores:
Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un
apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea posible,
se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente
en los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con un
apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.
A-2
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Section A, CE Certification of
Mass Flow Equipment
Brooks® Digital MFC's & MFM's
Français
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Sujet
:
Annexe au Manuel d’Instructions.
Référence
:
Certification CE des Débitmètres Massiques à Effet Thermique.
Date
:
Janvier 1996.
Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la
Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal
d’un appareil portant le label CE.
Qualité du câble, des presse-étoupes et des connecteurs:
Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à
chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour satisfaire à
la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.
Greek
A-3
Section A, CE Certification of
Mass Flow Equipment
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Italiano
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Oggetto
:
Addendum al manuale di istruzioni.
Riferimento
:
Certificazione CE dei misuratori termici di portata in massa
Data
:
Gennaio 1996.
Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con
successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).
E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a
marchio CE.
Qualità dei cavi di segnale e dei relativi connettori:
Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende
usare propri cavi, questi devono possedere una schermatura del 100%.
I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere
metallico e fornito di fissaggio per lo schermo del cavo.
Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le
estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 100%
per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.
Nederlands
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Onderwerp
: Addendum voor Instructie Handboek
Referentie : CE certificering voor Mass Flow Meters & Controllers
Datum
: Januari 1996
Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan
de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.
Kwaliteit van de signaalkabel en kabelaansluitingen:
• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is
afgeschermd met een bedekkingsgraad van 100%.
• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden
toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen
Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.
• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een
bedekkingsgraad van 100% om te voldoen aan de CE certificering.
Het scherm moet worden verbonden met aarde.
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,
A-4
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Norsk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Vedrørende
:
Referanse
:
Dato
:
Section A, CE Certification of
Mass Flow Equipment
Brooks® Digital MFC's & MFM's
Vedlegg til håndbok
CE sertifisering av utstyr for massestrømsmåling og regulering
Januar 1996
Til den det angår
Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC
forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.
For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.
Utførelse av signalkabel og tilhørende plugger:
•
Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.
•
Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.
“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for jordet
innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°, tilkoblet
elektrisk jord.
•
Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100% skjerming
som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.
For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen
Português
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Assunto
:
Adenda ao Manual de Instruções
Referência
:
Certificação CE do Equipamento de Fluxo de Massa
Data
:
Janeiro de 1996.
O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da
Compatibilidade Electromagnética (directiva CEM 89/336/EEC).
Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma
atenção especial.
Qualidade do cabo de sinal, buchas de cabo e conectores:
A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizarse buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a
100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.
A-5
Section A, CE Certification of
Mass Flow Equipment
Brooks® Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Suomi
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Asia
: Lisäys Käyttöohjeisiin
Viite
: Massamäärämittareiden CE sertifiointi
Päivämäärä
: Tammikuu 1996
Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu
Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse,
olisi hankittava 100%:sti suojattu kaapeli.
“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia
kaapeliliittimiä kiinnitettäessä suojaa.
Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne
olisivat CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,
Svensk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject
: Addendum to the Instruction Manual
Reference
: CE certification of Mass Flow Equipment
Date
: January 1996
Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för
elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC).
Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.
Kvalitet på signalkabel och anslutningskontakter:
Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.
“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.
Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders
skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma med
CE-certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.
A-6
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
Brooks® Digital MFC's & MFM's
LIMITED WARRANTY
Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.
BROOKS SERVICE AND SUPPORT
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
START-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.
CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.
Please contact your nearest sales representative for more details.
HELP DESK
In case you need technical assistance:
1 888 554 FLOW
Americas
Europe
+31 (0) 318 549 290
Asia
+81 (0) 3 5633 7100
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.
TRADEMARKS
Brooks ....................................................... Brooks Instrument, LLC
Brooks Service Suite ................................ Brooks Instrument, LLC
Brooks Service Tool .................................. Brooks Instrument, LLC
DeviceNet ................... Open DeviceNet Vendors Association, Inc.
FOUNDATION Fieldbus ...................................... Fieldbus FOUNDATION
HART ...................................... HART Communications Foundation
ITK .................................................................. Fieldbus FOUNDATION
Kalrez ........................................................ DuPont Dow Elastomers
ODVA .......................... Open DeviceNet Vendors Association, Inc.
Teflon ............................................. E.I. DuPont de Nemours & Co.
VCO .................................................................................. Cajon Co.
VCR .................................................................................. Cajon Co.
Viton ............................................ DuPont Performance Elastomers
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