Brooks® Models SLA7950 - SLA7960 Mass Flow Controllers & Meters

Brooks® Models SLA7950 - SLA7960 Mass Flow Controllers & Meters
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
Brooks® Models SLA7950 - SLA7960
Mass Flow Controllers & Meters
Model SLA7950S
Analog I/O
9-pin D-Connector
VCR Fittings
Model SLA7950S
Analog I/O
15-pin D-Connector
VCR Fittings
Model SLA7950D
Digital I/O
DeviceNet Downport
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Essential Instructions
Read this page before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Inform and educate your personnel in the proper installation, operation and maintenance of the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.
• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.
Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.
• Section 1 of this manual contains important safety and operating instructions related to the PED directive.
• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.
• All Brooks Instrument Flowmeters fall under fluid group 1.
• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.
• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
ESD (Electrostatic Discharge)
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly, exhibit early failure.
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yours sincerely,
Brooks Instrument
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
THIS PAGE WAS
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Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Paragraph
Number
Contents
SLA7900 Series
Page
Number
Section 1 Introduction
1-1 Scope ............................................................................................................................................... 1-1
1-2 Purpose ............................................................................................................................................ 1-1
1-3 Description ....................................................................................................................................... 1-1
1-4 Specifications ................................................................................................................................... 1-2
Section 2 Installation
2-1 General ............................................................................................................................................. 2-1
2-2 Receipt of Equipment ....................................................................................................................... 2-1
2-3 Recommended Storage Practice ...................................................................................................... 2-1
2-4 Return Shipment .............................................................................................................................. 2-2
2-5 Transit Precautions .......................................................................................................................... 2-2
2-6 Removal from Storage ...................................................................................................................... 2-2
2-7 Gas Connections .............................................................................................................................. 2-3
2-8 In-Line Filter ..................................................................................................................................... 2-3
2-9 Installation ........................................................................................................................................ 2-3
2-10 Electrical Interface (Analog I/O) ....................................................................................................... 2-5
2-11 Operation Check Procedure (Analog I/O) ........................................................................................ 2-9
2-12 Electrical Interface (DeviceNet I/O) ................................................................................................. 2-10
2-13 Operation Check Procedure (DeviceNet I/O) .................................................................................. 2-11
2-14 DeviceNet Features ......................................................................................................................... 2-11
Section 3 Operation
3-1 General ............................................................................................................................................. 3-1
3-2 Theory of Operation for Flow Measurement ..................................................................................... 3-1
3-3 Features ........................................................................................................................................... 3-2
3-4 Adaptive Valve Control ..................................................................................................................... 3-3
3-5 Analog Mode of Operation ................................................................................................................ 3-3
Section 4 Maintenance & Troubleshooting
4-1 Overview .......................................................................................................................................... 4-1
4-2 Troubleshooting ................................................................................................................................ 4-2
4-3 Gas Conversion Factors ................................................................................................................... 4-5
4-4 Orifice Sizing .................................................................................................................................... 4-7
4-5 Restrictor Sizing ............................................................................................................................... 4-7
Section A CE Certification
CE Certification of Mass Flow Equipment ........................................................................................ A-1
Section B
Zero Drift Diagnostic on SLA7950S .................................................................................................. B-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover
i
Contents
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Figures
Figure
Page
Number
Number
1-1 General Wiring ................................................................................................................................. 1-5
1-2 Model SLA7950S MFC Analog I/O 9-pin D-Connector with VCR Fittings. ....................................... 1-7
1-3 Model SLA7950S MFC Analog I/O 9-pin D-Connector with Downport Connections(C-seal) ........... 1-7
1-4 Model SLA7950S MFC Analog I/O 15-pin D-Connector with VCR Fittings. ..................................... 1-8
1-5 Model SLA7950S MFC Analog I/O 15-pin D-Connector with Downport Connections(C-seal) ......... 1-8
1-6 Model SLA7950D MFC DeviceNet Digital I/O with Downport Connections(C-seal) ......................... 1-9
1-7 Model SLA7950D MFC DeviceNet Digital I/O with VCR Fittings. ..................................................... 1-9
1-8 Model SLA7950S MFC 15-pin D-Connector Analog with 1.5" Downport Connections (W-seal) ..... 1-10
2-1
2-2
2-3
2-4
2-5
2-6
2-7
15-pin D-Connector Shielded Cable Hookup Diagram Voltage I/O Version ..................................... 2-6
Common Electrical Hookups for 15-pin D-Connector Voltage I/O Version ....................................... 2-6
Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply) .................. 2-7
Recommended Wiring Configuration for Current Signals (Isolated Power Supply) ......................... 2-7
9-in D-Connector Shielded Cable Hookup Diagram Voltage I/O Version ......................................... 2-8
Common Electrical Hookups for 9-pin D-Connector Voltage I/O Version ......................................... 2-8
5-in Shielded Cable Hookup Diagram Voltage I/O Version .............................................................. 2-10
3-1
3-2
3-3
Flow Sensor Operational Diagram ................................................................................................... 3-2
Externally Accessible Adjustment ..................................................................................................... 3-4
Flow Control System Block Diagram ................................................................................................ 3-5
4-1
Bench Troubleshooting Circuit ......................................................................................................... 4-6
B-1
B-2
B-3
B-4
B-5
Recommended Shutoff Valve Configuration ..................................................................................... B-1
ZDD Interlock Timing ........................................................................................................................ B-2
Error Limits ....................................................................................................................................... B-3
Connecting to the SLA7950S Service Port ....................................................................................... B-4
About ZDDCT Window ..................................................................................................................... B-5
Tables
Table
Page
Number
Number
1-1 PED Rating ....................................................................................................................................... 1-3
ii
2-1
Recommended Filter Size ................................................................................................................ 2-3
4-1
4-2
4-3
Sensor Troubleshooting ................................................................................................................... 4-5
Orifice Capacities ............................................................................................................................. 4-7
Model SLA7900 Series Standard Restrictors ................................................................................... 4-8
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
1-1 Scope
Thank you for purchasing a Brooks Instrument SLA7900 Series device.
This manual Part Number 541B022AHG is a complete installation and
operation manual for your device.
1-2 Purpose
The Brooks® SLA7900 Series are mass flow measurement devices
designed for accurately measuring and rapidly controlling flows of gases.
This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Brooks SLA7900
Series devices. This manual is organized into the following sections:
Section 1
Section 2
Section 3
Section 4
Section A
Section B
Back Cover
Introduction
Installation
Operation
Maintenance & Troubleshooting
CE Certification
Zero Drift Diagnostic on SLA7950S
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Brooks SLA7900 Series devices.
1-3 Description
Brooks Instrument’s SLA7900 Series is a 1.125” wide profile high purity
metal sealed thermal mass flow measurement and control instrument,
which offers unparalleled flexibility and performance. The SLA7900 Series
MFC is designed for use in advanced gas handling systems. The result is
the most accurate, repeatable, and responsive MFC on the market today!
Superior Valve Technology
The coplanar valve offers unmatched performance. Due to its simplified
construction, the valve exhibits superior repeatability, stability, and
response time.
Highly Adaptable Configurations
The 1.125” body offers a compact, space saving footprint. The SLA7900
Series is easily retrofitable to existing gas box designs that utilize the
traditional
1.5” MFC body platform. Likewise, the all-digital electronics is adaptable
and allows the SLA7900 Series to serve as a direct replacement for
existing analog products bringing with them greatly improved accuracy and
reliability.
Broad Array of Communication Options
Brooks offers traditional 0-5 volt and 4-20 mA analog options as well as
RS-485 digital communications
(“S-protocol”, based on HART). Brooks also offers control interface with
DeviceNetTM, a high-speed (up to 500k baud) digital communication
network. Brooks’ communication capabilities and device-profiles have been
certified by the ODVATM (Open DeviceNet Vendor’s Association). Other
network protocols are in development. Talk to your Brooks representative
about your specific needs.
1-1
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
Reduced Cost of Ownership
The SLA7900 Series allows multi-gas and multi-range capabilities to
reduce customer inventory. Storage and pre-programming of up to 10 gas
calibrations easily permits users to switch between different gases and
ranges on a single device. Also, the greater control range provided by the
coplanar valve gives users the option to decrease the number of parts
needed to control their entire process. either analog or digital modes,
reducing measurement errors resulting from property differences between
process gases and the calibration gas.
Zero Drift Diagnostic Option
The Zero Drift Diagnostic is an advanced diagnostic
now offered on the 7950S MFC and 7960S MFM, which detects and alerts
the user when the flow sensor zero drifts by more than user specified
limits. This unique feature monitors the flow signal during no-flow
conditions and then utilizes the alarms to notify the user when an out of
limits condition has been detected. Zero drift can be accurately detected
because Brooks MFCs have the ability to monitor both positive and
negative flow signals. This diagnostic gives the user a higher level of
confidence that the process has not shifted. Brooks products have long
been revered for their resistance to zero drift over long periods of time.
Now Brooks is the first MFC supplier to prove their stability.
1-4 Specifications
WARNING
Do not operate this instrument in excess of the specifications
listed below. Failure to heed this warning can result in serious
personal injury and/or damage to the equipment.
PERFORMANCE CHARACTERISTICS:
Flow Ranges
Models SLA7950/SLA7960
Any range from 0-3 sccm to 0-50 slpm N2 eq.*
Control Range
Turndown 100:1 (for any FS range from 1-50 slpm)
Turndown 50:1 (for FS range below 1 slpm)
Accuracy
±1.0% of rate, including linearity (20% to 100% F.S.), ±0.2% of F.S.
(below 20% full scale.)
Repeatability
±0.20% of rate
Settling Time
< 1 sec for all step changes above 5% FS**
1-2
Temperature Sensitivity
Zero: Less than 0.035% F.S. per °C
Span: Less than 0.1% of rate per °C
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
RATINGS:
Pressure Equipment Directive (PED) 97/23/EC
See Table 1
Table 1 PED Rating
Mass Flow
Controller
Flow Ranges
N2 Equivalent Ratings
Models
Min. f.s. Max f.s.
SLA7950/
3.0
50,000
SLA7960
Unit
sccm
Pressure
PED Module H
Category
Bar
100 Bar
SEP
Mounting Attitude Sensitivity
0.2% of FS maximum deviation after rezeroing
Valve Leak-By: < 0.5% F.S.
Leak Integrity
Inboard to Outboard: less than 1x10-10 atm scc/sec Helium max.
Ambient Temperature Limits
Operating: 0°C to 65°C (32°F to 149°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)
Maximum Operating Pressure Range
1500 psig (10,342 kPa) maximum
150 psig (106.2 kPa) and below recommended for
best performance.
Differential Pressure Range
5 - 50 psid (broader depending on customer conditions;
consult factory for details.)***
(34.5 - 344.7 kPa)
(259 - 2586 torr)
Particulate
Zero particles per cubic foot greater than 0.1 microns under process
conditions. Less than 4 particles per cubic foot greater than 0.02 microns
under process conditions.
PHYSICAL:
Materials of Construction
316L Vacuum Arc Remelt (VAR), 316L
and high-alloy ferritic stainless steel.
External/internal seals: Nickel
Valve seat: 17-7PH stainless steel - standard
Process Connections
Integral 1/4" male VCRTM
CS Seal (SEMI 2787.5 or SEMI F82-0304 R1-1)
C Seal (SEMI 2787.1 or SEMI F82-0304 R1-2)
W Seal (SEMI 2787.3 or SEMI F82-0304 R1-3)
1-3
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
Outline Dimensions
Refer to Figures 1-1 through 1-7Electrical Characteristics:
Electrical Connections
Analog I/O option: 9-pin D-connector or 15-pin D-Connector, male
DeviceNet I/O option: 5-pin Micro-Connector, male
RS-485 option: 15-pin D-Connector, male
Analog I/O Pin Connections for 9-pin D-Connector:
Function
9-pin D-conn
Override, Input
Flow Signal, 0-5 volt, Output (+)
Power Supply, +13.5 Vdc to +27 Vdc (+)
Power Supply, Common (-)
Not Connected
Setpoint, 0-5 Vdc, Input (+)
Flow Signal, Common Output, (-)
Setpoint, Command Input (-)
Not Connected
Valve
1
2
3
4
5
6
7
8
9
Analog I/O Pin Connections for 15-pin D-Connector:
Function
Setpoint, Common Input (-)
Flow Signal, 0(1)-5 volt, Output (+)
TTL Alarm, open collector, Output (+)
Flow Signal, 0(4)-20 mA, Output (+)
Power Supply, +13.5 Vdc to +27 Vdc(+)
Not Connected
Setpoint, 0(4)-20 mA, Input (+)
Setpoint, 0(1)-5 Vdc, Input (+)
Power Supply, Common (-)
Flow Signal, Common, Output, (-)
Reference, +5 Vdc, Output (+)
Valve Override, Input
Calibration Select, Input
RS-485 Common B (-)
RS-485 Common A (+)
15-pin D-Conn
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Power Supply Voltage
Watts typ.
Analog I/O or RS-485 option, with valve:
VIN = 27 Vdc Valve = Full Open
DeviceNet I/O option, with valve:
VIN = 25 Vdc Valve = Full Open
Watts Max.
4.2
4.6
6.3
6.9
* Standard temperature and pressure are in accordance with SEMI
Standard E12-96: 0°C and 101.32 kPa (760 torr)
** Within ±2% of rate or ±0.5% FS, which ever is greater, per SEMI E17-91
***For flows above 30 slpm N2 eq., 30 psid minimum required
1-4
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Section 1 Introduction
SLA7900 Series
RS-485 Communications
The Brooks Digital Series is equipped with RS-485 communication
capability.
Refer to Table 1-3 (Analog I/O pin connections), that enables the device to
communicate via a personal computer for process control. Baud rate
selections for the Brooks Digital Series related to RS-485 are:
1200, 2400, 4800, 9600, 19200 and 38400 baud and can be selected via
the Brooks Service SuiteTM.
The RS-485 is essentially a multi-drop connection.
It allows a maximum of 32 devices to be connected to a computer system.
IBM-compatible PC’s are not equipped with RS-485 ports as standard. An
RS-232 to RS-485 converter or RS-485 interface board is therefore
required to connect an RS-485 network to a standard pc. The RS-485 bus,
a daisy chain network, meaning that the wires are connected at the units
as in Figure 1-1.
This form of multi-drop capable communication provides access to many
of the Brooks Digital Series functions for “control and monitor” operations,
including:
• Accurate setpoint adjustment and flow output
measurement (including units of measure selection)
• Valve Override (controller only)
• Flow Totalizer
• Alarm status and settings
• Soft Start Control (controller only)
Reference the Brooks document “S-protocol Communication Command
Description for Smart II” for more details regarding the capabilities of the
RS-485 communication interface.
Figure 1-1 General Wiring
1-5
Section 1 Introduction
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
DeviceNet Communications
The Brooks Digital Series is also available with DeviceNet communication
capability. DeviceNet is an open digital protocol capable of high speeds
and easy system connectivity. Brooks Instrument has several of its devices
available on this popular networking standard, and is a member of ODVA
(Open DeviceNet Vendors Association), the governing standard body for
DeviceNet.
DeviceNet is similar to the RS485 standard in that it is a multi-drop
connection that allows a maximum of 64 devices to be connected on the
same network. Baud rate selections for DeviceNet products are 125K,
250K and 500K and can be selected via MAC ID switches mounted on the
device.
The DeviceNet communication link also provides access to many of the
Brooks Digital Series functions for “control and monitor” operations,
including:
• Accurate setpoint adjustment and flow output measurement (including
units of measure selection)
• PID Settings (controller only)
• Valve Override (controller only)
• Calibration Gas Select
• Soft Start Control (controller only)
Depending on the type of device you've purchased, reference one of the
following Brooks documents for more details regarding the capabilities of
the DeviceNet protocol:
X-DPT-DeviceNet-SLA7000-MFC-eng for Mass Flow Controllers,
X-DPT-DeviceNet-SLA7000-PC-eng for Pressure Controllers
X-DPT-DeviceNet-SLA7000-RT-eng for Remote Transducers.
1-6
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Section 1 Introduction
SLA7900 Series
*MFM Outline drawing is identical to the MFC, except without the valve.
Figure 1-2 Model SLA7950S MFC Analog I/O 9-pin D-Connector with VCR Fittings
*MFM Outline drawing is identical to the MFC, except without the valve.
Figure 1-3 Model SLA7950S MFC Analog I/O 9-pin D-Connector with Downport Connections (C-seal)
1-7
Section 1 Introduction
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
*MFM Outline drawing is identical to the MFC, except without the valve.
Figure 1-4 Model SLA7950S MFC Analog I/O 15-pin D-Connector with VCR Fittings
*MFM Outline drawing is identical to the MFC, except without the valve.
Figure 1-5 Model SLA7950S MFC Analog I/O 15-pin D-Connector with Downport Connections (C-seal)
1-8
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Section 1 Introduction
SLA7900 Series
*MFM Outline drawing is identical to the MFC, except without the valve.
Figure 1-6 Model SLA7950D MFC DeviceNet Digital I/O with Downport Connections (C-seal)
*MFM Outline drawing is identical to the MFC, except without the valve.
Figure 1-7 Model SLA7950D MFC DeviceNet Digital I/O with VCR Fittings
1-9
Section 1 Introduction
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
*MFM Outline drawing is identical to the MFC, except without the valve.
Figure 1-8 Model SLA7950S MFC 15-pin D-Connector Analog I/O with 1.5" Downport Connections (W-seal)
1-10
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
2-1 General
This section provides installation instructions for the Brooks SLA7900
Series. Figures 1-1 through Figure 1-7 show the SLA7900 series
dimensions, gas connections and electrical connection locations for an
MFC.
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability.
A report should be submitted to your nearest Product Service Department.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: [email protected]
www.BrooksInstrument.com
Brooks Instrument
Neonstraat 3
6718 WX Ede, Netherlands
P.O. Box 428
6710 BK Ede, Netherlands
Tel +31 (0) 318 549 300
Fax +31 (0) 318 549 309
E-mail: [email protected]
Brooks Instrument
1-4-4 Kitasuna Koto-Ku
Tokyo, 136-0073 Japan
Tel +81 (0) 3 5633 7100
Fax +81 (0) 3 5633 7101
Email: [email protected]
Remove the envelope containing the packing list. Outside of your clean area,
carefully remove the equipment from the packing case. Make sure spare
parts are not discarded with the packing material. Inspect for damaged or
missing parts.
This device has been assembled, calibrated and double-vacuum bagged in
a Class 100 clean room. In your semi-clean area,remove the outer bag
only. Pass your SLA7900 Series Ultra-Clean Metal Seal Mass Flow Device
into your clean area. Remove the second clean room compatible bag only
when the equipment is ready to be tested and/or installed in your clean
system.
2-3 Recommended Storage Practice
If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following conditions:
a. Within the original shipping container.
b. Stored in a sheltered area, preferably a warm, dry, heated warehouse.
c. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,
45°F (7°C) minimum.
d. Relative humidity 45% nominal, 60% maximum, 25% minimum.
2-1
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
2-4 Return Shipment
Prior to returning any instrument to the factory visit the Brooks website
www.BrooksInstrument.com for a Return Materials Authorization Number
(RMA#), or contact one of the following locations:
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: [email protected]
www.BrooksInstrument.com
Brooks Instrument
Neonstraat 3
6718 WX Ede, Netherlands
P.O. Box 428
6710 BK Ede, Netherlands
Tel +31 (0) 318 549 300
Fax +31 (0) 318 549 309
E-mail: [email protected]
Brooks Instrument
1-4-4 Kitasuna Koto-Ku
Tokyo, 136-0073 Japan
Tel +81 (0) 3 5633 7100
Fax +81 (0) 3 5633 7101
Email: [email protected]
Instrument must have been purged in accordance with the following:
All flow instruments returned to Brooks requires completion of Form
RPR003-1, Brooks Instrument Decontamination Statement, along with a
Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument.
Failure to provide this information will delay processing by Brooks
personnel. Copies of these forms can be downloaded from the Brooks
website www.BrooksInstrument.com or are available from any Brooks
Instrument location listed above.
2-5 Transit Precautions
To safeguard against damage during transit, transport the instrument to the
installation site in the same container used for transportation from the
factory if circumstances permit.
2-6 Removal from Storage
Upon removal of the instrument from storage, a visual inspection should be
conducted to verify its "as-received" condition. If the instrument has been
subject to storage conditions in excess of those recommended (See
Section 2-3), it should be subjected to a pneumatic pressure test in
accordance with applicable vessel codes. To maintain an instrument's
ultraclean integrity, this service should be performed by the factory or one
of the certified service centers.
2-2
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
2-7 Gas Connections
Standard inlet and outlet connections supplied on the Model SLA7900
Series are 1/4"(M) VCR or Downport surface mount per Semi 2787 or
Semi F82-0304. Prior to installation ensure all piping is clean and free
from obstructions. Install piping in such a manner that permits easy
access to the instrument if removal becomes necessary.
2-8 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
mass flow controller to prevent the possibility of any foreign material
entering the flow sensor or control valve. The filtering element should be
replaced periodically or ultrasonically cleaned.
Table 2-1. Recommended Filter Size
Maximum Flow Rate
Recommended Filter
100 sccm
500 sccm
1 to 5 slpm
10 to 30 slpm
30 to 50 slpm
1 micron
2 micron
7 micron
15 micron
40 micron
2-9 Installation
Recommended installation procedures:
a. The SLA7900 Series device should be located in a clean, dry
atmosphere relatively free from shock and vibration.
b. Leave sufficient room for access to Self-zero function push-button.
c. Install in such a manner that permits easy removal if the instrument
requires servicing.
2-3
Section 2 Installation
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
d. The SLA7900 Series device can be installed in any position.
However,mounting in orientations other than the original factory
calibration (see calibration data sheet supplied with the instrument)
can result in a ±0.2% maximum full scale shift after rezeroing.
e. When installing a mass flow controller with 1/4" (m) VCR end fittings
and with full scale flow rates of 10 slpm or greater, be aware that
sharp, abrupt angles in the system piping directly upstream of the
controller may cause a small shift in accuracy. If possible, have at
least ten pipe diameters of straight tubing upstream of the mass
flow controller.
2-4
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
2-10 Electrical Interface (Analog I/O)
The setpoint signal is supplied as a 0(1) to 5 Vdc or 0(4)-20 mA analog
signal. All signals are supplied via the 15-pin D-Connector. For an analog
unit the minimum set of connections which must be made to the MFC and
MFM includes +13.5 - 27 Vdc, supply common, and a setpoint signal.
The Brooks Digital electrical interface is designed to facilitate
low-loss, quiet signal connections. Separate returns (commons) are
supplied for the analog setpoint, analog flow signal, and the power supply.
These commons are electrically connected together on the PC board.
Analog I/O Versions
• Signal Common
• Signal Output (Voltage or Current)
• +13.5 - 27 Vdc Supply
• Setpoint Input (Voltage or Current)
• Setpoint Common
• Supply Common
• Chassis Ground (via unit body)
Refer to Section 1 for pin connections
Refer to Figures 2-1, 2-2, 2-3, 2-4, 2-5, 2-6 and 2-7 for electrical I/O
connections
(The Brook’s MFC acts as a current sink to a setpoint input signal. The 0/420 mA setpoint signal should be “driven” into the MFC input by a controlled
current source. Reference Brook’s device specifications for the setpoint
input impedance.)
(The Brook’s MFC acts as the current source when providing a 0/4-20 mA
output signal to the load. The output signal is “driven” by the MFC into the
customer load. Reference Brook’s device specifications for maximum load
capacity.)
NOTICE
The Brooks (electric/electronic) equipment bearing the CE mark
has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC). Special
attention is required when selecting the signal cable to be used
with CE marked equipment.
Brooks supplies high quality cables which meet the
specifications for CE certification. If you provide your own signal
cable you should use a cable which is completely screened with a
100% shield. D-Connectors should also be shielded using a metal
shield. If applicable, metal cable glands must be used to provide
cable screen clamping. The cable screen should be connected to
the metal shell or gland and shielded at both ends over 360
degrees. The shield should be terminated to an earth ground. See
Appendix A for CE Certification of Mass Flow Equipment.
2-5
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
For a DeviceNet unit, 11-25 Vdc power and communication I/O are
supplied via the standard 5-pin Circular Micro-Connector.
*BROOKS READ OUT MFC / MFM
SIDE SUB D (15 PIN)
PIN
6
10
9
2
13
14
3
5
12
8
4
7
1
11
15
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
FUNCTION
Setpoint, Common Input (-)
Flow Signal, 0(1)-5 volt, Output (+)
TTL Alarm, Open Collector, Output (+)
Flow Signal, 0(4)-20 mA, Output (+)
Power Supply, +13.5 Vdc to +27 Vdc (+)
Not Connected
Setpoint, 0(4)-20 mA, Input (+)
Setpoint, 0(1)-5 volt, Input (+)
Power Supply, Common (-)
Flow Signal, Common, Output (-)
Reference, +5 Vdc, Output (+)
Valve Override, Input
Calibration Select, Input
RS-485, Common B (-) Input/Output
RS-485, Common A (+) Input/Output
* Brooks Read Out Models 0151, 0152, 0154, 0254
Figure 2-1 15-pin D-Connector Shielded Cable Hookup Diagram
2-6
WIRE
COLOR
Figure 2-2 Common Electrical Hookups for 15-pin D-Connector Voltage I/O Version
BLACK
WHITE
RED
GREEN
ORANGE
BLUE
WHT/BLK
RED/BLK
GRN/BLK
ORG/BLK
BLU/BLK
BLK/WHT
RED/WHT
GRN/WHT
BLU/WHT
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Section 2 Installation
SLA7900 Series
Figure 2-3 Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply)
Figure 2-4 Recommended Wiring Configuration for Current Signals (Isolated Power Supply)
2-7
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
Analog I/O Pin Connections for 9-pin D-Connector:
Function
9-pin D-conn
Valve Override, Input
1
Flow Signal, 0-5 volt, Output (+)
2
Power Supply, +13.5 Vdc to +27 Vdc (+)
3
Power Supply, Common (-)
4
Not Connected
5
Setpoint, 0-5 Vdc, Input (+)
6
Flow Signal, Common Output, (-)
7
Setpoint, Command Input (-)
8
Not Connected
9
Figure 2-5 9-pin D-Connector Shielded Cable Hookup Diagram - Voltage I/O Version
2-8
Figure 2-6 Common Electrical Hookups for 9-pin D-Connector Voltage I/O Version
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
2-11 Operation Check Procedure (Analog I/O)
a. Mount the MFC in its final orientation.
b. Apply power to the MFC and allow approximately one hour for the
instrument to warm up and stabilize its temperature.
c.
Do NOT supply gas to the MFC. Ensure that the differential pressure
across the MFC is zero.
d. Check the MFC zero.
e. The analog output signal should be equivalent to 0.0 ± 0.2% FS
(0.000 ± 0.010 Vdc). If the zero exceeds one of these limits, follow
the re-zeroing procedure in Section 3-5.
f.
Turn on the gas supply. A positive flow signal may be present due to
valve leak-thru. At 0% setpoint the flow signal output < 0.5% FS.
g. If flow signal at 0% setpoint is > 0.5%, then there is too much leak
through across valve seat and orifice. MFC would need to be
reworked to adjust valve shutoff.
h. Supply a setpoint voltage between 1 and 5 Vdc.
i.
Check the MFC analog output signal. The output voltage signal
should match the setpoint voltage (± 20mV) within 10 seconds after
the setpoint is changed.
j. If flow output signal does not match setpoint, and pressure settings
are correct, this could indicate a problem in the MFC. A secondary
issue could be the gas type. When checking with a surrogate gas,
ensure that there is enough pressure to the MFC in order to flow the
correct amount of the surrogate gas.
Example:
Checking an MFC calibrated for 100 sccm SF6 (sulfur hexafluoride). The
sensor factor using N2 (nitrogen) is 0.27, therefore the equivalent N2
needed is 100/0.27 = 370.4 sccm. This may require a pressure increase
to make this flow rate.
2-9
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
2-12 Electrical Interface (DeviceNet I/O)
Power and network signals are interfaced to the MFC through the standard
5-pin Micro-connector on the device. This connector is specified in the
DeviceNet Specification, Vol. 1, Section 9-3.6.3 and is defined as a male,
sealed, micro-style connector. The figure below illustrates the electrical
connections to the device.
Figure 2-7 5-pin Shielded Cable Hookup Diagram - Voltage I/O Versions
2-10
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
2-13 Operation Check Procedure (DeviceNet I/O)
a. Mount the MFC in its final orientation.
b. Apply power to the MFC and allow approximately one hour for the
instrument to warm up and stabilize its temperature.
c.
Do NOT supply gas to the MFC. Ensure that the differential pressure
across the MFC is zero.
d. Check the MFC zero.
e. The output signal should be equivalent to 0.0 ± 0.2% FS in the
appropriate DeviceNet units of measure (UOM). If the zero exceeds
one of these limits, follow the re-zeroing procedure in Section 3-5.
f.
Turn on the gas supply. A positive flow signal may be present due to
valve leak-thru. At 0% setpoint the flow signal output < 0.5% FS.
g. If flow signal at 0% setpoint is > 0.5%, then there is too much leak
through across valve seat and orifice. MFC would need to be
reworked to adjust valve shutoff.
h. Provide the proper UOM setpoint beween 20% and 100% FS to the
MFC.
i.
Check the MFC output signal UOM. It should match the setpoint
UOM value within ± 0.2% FS in less than 10 seconds after setpoint
change.
j.
If flow output signal does not match setpoint, and pressure settings
are correct, this could indicate a problem in the MFC. A secondary
issue could be the gas type. When checking with a surrogate gas,
ensure that there is enough pressure to the MFC in order to flow the
correct amount of the surrogate gas.
Example:
Checking an MFC calibrated for 100 sccm SF6 (sulfur hexafluoride). The
sensor factor using N2 (nitrogen) is 0.27, therefore the equivalent N2
needed is 100/0.27 = 370.4 sccm. This may require a pressure increase to
make this flow rate.
2-14 DeviceNet Features
Information regarding DeviceNet capability for the Brooks SLA7900 Series
is available in the DeviceNet Supplemental Instruction manual.
(X-DPT-DeviceNet-SLA7000-MFC-eng)
2-11
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
THIS PAGE WAS
INTENTIONALLY
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2-12
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
3-1 General
After the device has been properly installed in the process, it is ready for
operation. When initiating flow, slowly open the valve to avoid a flow
surge.A bypass is helpful in bringing the flow on smoothly. Avoid starting a
pump to supply the flowmeter without the use of a valve upstream of the
flowmeter.
3-2 Theory of Operation for Flow Measurement
The thermal mass flow measurement system consists of two components:
the restrictor and the flow sensor. Figure 3-1 contains a diagram of the flow
stream through the MFC with an enlarged view of the flow sensor. Gas flow
entering the MFC is separated into two paths; one straight through the
restrictor and the other through the flow sensor. This is represented in
Figure 3-1 where the total flow A+B enters the MFC and is separated into
streams A and B. The streams are joined again at the far side of the
restrictor.
The separation of the flow streams is caused by the restrictor. During flow
conditions there will be a pressure differential across the restrictor which
forces gas to flow in the sensor.
The pressure difference caused by the restrictor varies linearly with total
flow rate. The sensor has the same linear pressure difference versus flow
relationship. The ratio of sensor flow to the flow through the restrictor
remains constant over the range of the MFC (A/B = constant). The full
scale flow rate of the MFC is established by selecting a restrictor with the
correct pressure differential for the desired flow.
The flow sensor is a very narrow, thin-walled stainless steel tube. Onto this
tube are built upstream and downstream temperature sensing elements on
either side of a heating element. Constant power is applied to the heater
element, which is located at the midpoint of the sensor tube. During noflow conditions, the amount of heat reaching each temperature sensor is
equal, so temperatures T1 and T2 (Fig. 3-1) are equal. Gas flowing
through the tube carries heat away from the upstream temperature sensor
and toward the downstream sensor. The temperature difference, T2 - T1,
is directly proportional to the gas mass flow. The equation is:
DT = A x P x Cp x m
Where,
DT = Temperature difference T2 - T1 (°K)
A = Constant of proportionality (S2-°K2/kJ2)
P = Heater Power
Cp = specific heat of the gas at constant pressure (kJ/kg - °K)
m = Mass Flow (kg/s)
A bridge circuit and a differential amplifier interpret the temperature difference and
generate an electrical signal directly proportional to the gas mass flow rate.
3-1
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
3-3 Features
Note: All Model SLA7950 mass flow controllers are configured at the factory
according to customer order and do not require adjustment. Not all features are
available on all instruments.
The Model SLA7950 is a full-featured digital MFC. The Model SLA7950
performs much like a traditional analog MFC, but with improved accuracy,
step response and valve control. The analog interface matches that of
Brooks' popular analog MFCs so the Model SLA7950 can be retrofitted into
tools using analog MFCs. Other versions of the Model SLA7950 can
provide a variety of digital protocols, for example DeviceNet.
The Model SLA7950 is capable of storing up to 10 different sets of gas
calibration data. Each set includes a calibration curve, PID controller
settings, valve performance data, and information about the calibration
conditions. The Model SLA7950 can contain calibrations for different gases
or for the same gas at multiple conditions (pressures, full-scale flow rates).
Section 3-5 Analog Mode of Operation describes more information about
the data contained in the calibration table and how to access the data.
Calibrations will appear in the calibration table in the same order as they
appeared on the Model SLA7950 customer order, unless otherwise
specified. The first listed gas will appear as calibration #1, the second as
calibration #2 and so on. Note that unless specified otherwise on the
customer order Model SLA7950’s containing a single calibration will have
that calibration stored in calibration #1.
TMF principle of measurement
Sensor
Flow A
T1
Upstream
Temperature
Sensor
Heater
T2
Downstream
Temperature
Sensor
Valve (if equipped)
Inlet
Flow A & B
Outlet
Flow A & B
Restrictor
Flow B
Figure 3-1 Flow Sensor Operational Diagram
3-2
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Section 3 Operation
SLA7900 Series
3-4 Adaptive Valve Control
The Model SLA7950 offers a feature, called adaptive valve control, which
allows the instrument to learn about the process gas and operating
conditions. If multiple calibrations are being used, the adaptive valve
control procedure must be performed separately for each calibration. This
function is disabled on MFC's when they are shipped.
The adaptive valve control process requires that the process gas be
supplied to the Model SLA7950 at the pressure and temperature which will
exist during the process.
If the system conditions have changed so substantially that the Model
SLA7950 becomes unstable, the adaptive valve control algorithm
determines new gains which will stabilize the instrument and restore the
step response to the factory performance level.
3-5 Analog Mode of Operation
NOTE: Read Section 3-3, Features, before reading this section.
A. Functional Description
The analog interface is consistent with other Brooks analog MFCs. This
includes a 0-5 volt setpoint input, 0-5 volt flow signal output and Valve
Override input.
Before operating the SLA7900 Series, apply power and warm-up the
instrument for approximately one hour. After warm-up, apply gas pressure
then proceed by following the instructions in the following sections.
B. Analog Setpoint
This input allows the user to establish the MFC setpoint. The usable range
of this input is from 0 to 5.5 Vdc which corresponds to 0 to 110% of the
MFC full scale flow rate. Setpoints below 50 mV will be treated as 0 volt
setpoints. For setpoints below 0 Vdc the MFC behaves as if a 0 Vdc
setpoint is present. Setpoints above 5.5 Vdc will cause a setpoint of at
least 110% FS.
C. Analog Flow Signal
This output is used to indicate the flow signal. The range of this signal is
from -0.5 to 5.5 Vdc, with the range of 0 to 5.5 Vdc corresponding to a
calibrated flow signal of 0 to 110% of the full scale flow rate. A negative
flow signal indicates reverse flow through the device, but is NOT
calibrated. The analog flow signal is capable of resolving signals to 1.0 mV.
D. Valve Override
This input allows the valve to be forced to its most closed state or its most
open state, regardless of setpoint. If this input is not electrically connected
the MFC will operate according to the current values of the MFC setpoint. If
this input is held at 0 Vdc or -15Vdc, the valve will be forced to its most
closed state. If this input is held to +15 Vdc the valve will be forced to its
most open state.
3-3
Section 3 Operation
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
F. Zeroing the MFC (Self-zero)
It may be desirable to re-zero the flow sensor if it is operated at its
temperature extremes or if it is positioned in an attitude other than that
specified on the customer order.
Note: Before zeroing the instrument, zero pressure differential MUST be
established across the device. If there is pressure across the instrument
during the zero process, any detected flow through the sensor will be
misinterpreted as the zero flow reading. This will result in calibration
inaccuracy during normal operation.
Once zero differential pressure is established and verified, press the
recessed, momentary push-button (Self-zero button) located on the side of
the device (see Fig. 3-2) to start the Self-zero function.
The zero process requires approximately 500 milliseconds. During this
time, the device will set its output signal to 0.0 Vdc.
Figure 3-2 Externally Accessible Adjustment
3-4
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Section 3 Operation
SLA7900 Series
Figure 3-3 Flow Control System Block Diagram
3-5
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
THIS PAGE WAS
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3-6
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
4-1 Overview
No routine maintenance is required on the SLA7900 Series devices. If an
in-line filter is used, the filtering elements should be periodically replaced.
This section provides the following information:
• Troubleshooting
• Gas Conversion Factors
• Orifice Sizing*
• Restrictor Sizing
4-1
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
4-2 Troubleshooting
Analog or DeviceNet Version
This section contains suggestions to help diagnose MFC related problems
in the gas distribution system and answers commonly asked questions.
Failure of the flow rate or flow signal to achieve the setpoint.
4-2
1.
Insufficient pressure drop across the SLA7900 series MFC (low or no
pressure). If there is not enough pressure differential across the MFC,
it is impossible for the MFC’s orifice to pass the full scale flow rate. To
check for this condition, compare the actual inlet/outlet pressure drop
with that specified on the order. Increase the pressure if necessary.
2.
If pressure settings are correct and flow signal does not match
setpoint, a secondary issue could be the gas type. If checking the
MFC with a surrogate gas, ensure that there is enough pressure to the
MFC in order to flow the correct amount of the surrogate gas.
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
3.
Setpoint is below minimum. MFCs may have a settable low flow cutoff
for the setpoint command. If setpoint is below this value, then MFC will
not attempt to control.
4.
Clogged sensor tube. If the MFC sensor tube is clogged, the flow
signal will be very low or zero while the actual flow will be at the valve’s
maximum rate.
Flow signal matched setpoint but actual flow is not correct.
5.
Clogged restrictor. If the MFC restrictor becomes clogged, a much
larger portion of the flow stream will pass through the sensor rather
than going straight through the restrictor. The symptom of this
condition is a substantially reduced actual flow with a flow signal which
matches the setpoint.
Flow rate in excess of 100% at zero setpoint.
6.
Valve Override pin set to open. If valve override (VOR) pin is active,
the valve will be forced open or closed. Set this pin to its normal level
before setting a setpoint.
Flow/Flow signal ‘unstable’.
7.
Model SLA7950 Series MFC performance is tuned during calibration
at the conditions specified on the order. If the conditions in use (inlet
and outlet pressure, temperature, attitude, gas or mixture type) are
different or become different over time, the MFC may not perform as it
did when it left the factory.
DeviceNet Version Only
Failure of the flow rate or flow signal to achieve the setpoint.
8.
Specifically for a DevcieNet MFC, there may be problems associated
with the network communication link. One common problem is due to
data type mismatches of the Input\Output (I\O) Assemblies. For proper
communication over the DeviceNet network, the MFC must be set up
with the same I\O Assembly as the network master. Confirm these I\O
settings are correct. Note this information and all other detailed
DeviceNet information is available in the DeviceNet supplement
instruction manual, X-DeviceNet-MFC-eng,
Part Number 541B059AHG.
Questions
Analog Version
What is the purpose of the LED on top of the SLA7900 Series MFC?
The LED on top of the MFC should normally be lit GREEN. This signifies
the MFC is in proper working mode. If the LED is lit RED this signifies a
critical fault has occurred in the MFC. Please contact the factory for
instructions.
4-3
Section 4 Maintenance &
Troubleshooting
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
DeviceNet Version
What is the purpose of the LED’s on top of the SLA7900 Series MFC?
There are two LED’s on top of a DevcieNet version MFC. The LED labeled
‘MOD’ is used to indicate Module status. This LED should normally be lit
GREEN. If the ‘MOD’ LED is lit RED this signifies a critical fault has
occurred in the MFC. Please contact the factory for instructions.
The LED labeled ‘NET’ is used to indicate NETWORK status. Note the
‘NET’ LED can have 4 distinct operational states. For more complete
details on these LED’s, reference the DeviceNet supplement instruction
manual, X-DeviceNet-MFC-eng, Part Number 541B059AHG.
What is the purpose of the Rotary Switchess on top of the SLA7900 Series
MFC?
Two of the rotary switches are labeled ‘ADDRESS’. These two switches
are used to configure the MAC ID of MFC when used on the DeviceNet
network. MAC ID stands for Media Access Control Identifier and is used to
set the unique address of the device on the network. The possible range of
addresses is 00 to 63. The out-of-box MAC ID setting is 63.
The third rotary switch is labeled ‘RATE’. This switch sets the baud rate of
the MFC for communicating over the DeviceNet network. The out-of-box
default setting is 125K baud.
For more complete details on these switches, reference the DeviceNet
supplement instruction manual, X-DeviceNet-MFC-eng, Part Number
541B059AHG.
Analog or DeviceNet Version
What is the purpose of the recessed push-button on the side of the MFC?
This push-button is used to start a self-zero function. Do NOT press this
button unless you are performing this function as described in the
Section 3-5, F.
4-4
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
Table 4-1 Sensor Troubleshooting
SENSOR
SCHEMATIC
PIN
NO.
1
2
3
4
5
6
7
FUNCTION
Heater
Upstream
Temperature
Sensor (Su)
Downstream
Temperature
Sensor (Sd)
Sensor Common
Heater Common
Thermistor
Thermistor
Flex Circuit Wire Numbers
Remove the sensor connector from the PC Board for this procedure.
OHMMETER CONNECTION
Pin 1 or 4 to meter body
Pin 4 to Pin 2
Pin 4 to Pin 3
RESULT IF ELECTRICALLY FUNCTIONAL
Open circuit on ohmmeter. If either heater (1) or
sensor common (4) are shorted, an ohmmeter
reading will be obtained.
Nominal 1100 ohms reading, depending on
temperature and ohmmeter current.
Pin 5 to Pin 1
Nominal 1000 ohm reading.
Pin 6 to Pin 7
Nominal 580 ohm reading.
4-3 Gas Conversion Factors
If a mass flow controller is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relation between the output
signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases or by sensor
conversion factor. Consult factory or nearest Brooks Instrument rep for a
list of sensor conversion factors. To change to a new gas, multiply the
output reading by the ratio of the gas factor for the desired gas by the gas
factor for the calibration gas used.
4-5
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
Example:
The controller is calibrated for Nitrogen.
The desired gas is Carbon Dioxide (CO2)
The output reading is 75 sccm when Carbon Dioxide is flowing
Then 75 x 0.74 = 55.5 sccm of (CO2)
In order to calculate the conversion factor for a gas mixture, the following
formula should be used:
Where,
P1 = percentage (%) of gas 1 (by volume)
P2 = percentage (%) of gas 2 (by volume)
Pn = percentage (%) of gas n (by volume)
Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by
volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen
It is generally accepted that the mass flow rate derived from this equation
is only accurate to ±5%. The sensor conversion factors given in Table 4-3
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure, and/
or temperature, dependent. However, gas conditions that vary widely from
these reference conditions may cause an additional error due to the
change in specific heat caused by pressure and/or temperature.
Figure 4-1 Bench Troubleshooting Circuit
4-6
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
4-4 Orifice Sizing
The flow controller's orifice is factory-sized to a preselected gas, operating
pressure and flow range. Note that the orifice is marked with its size in
thousandths of an inch. When changing the gas operating pressure (inlet
or outlet), or flow range consult the factory for re-sizing information.
Table 4-2 Orifice Capacities
Orifice Size (inches)
Minimum Flow Rate (sccm)
0°C
(21.1°C)
5.3
(5.7)
12.5
(13.5)
39.2
(42.2)
82.5
(88.9)
190
(205)
374
(403)
748
(806)
1364
(1469)
2673
(2879)
6490
(6991)
12980
(13980)
22000
(2879)
30000
(34400)
42500
(45800)
69300
(74700)
0.0013
0.002
0.003
0.004
0.0055
0.007
0.010
0.014
0.020
0.032
0.048
0.062
0.078
0.093
0.120
Inlet Pressure = 10 psig
Outlet Pressure = 10 inches of water (0.4 psig) or less
Note: Flow Rate based on Nitrogen
4-5 Restrictor Sizing
The restrictor assembly is a ranging device for the sensor portion of the
controller. It creates a pressure drop which is linear with flow rate. This
diverts a sample quantity of the process gas flow through the sensor. Each
restrictor maintains a ratio of sensor flow to restrictor flow, however, the
total flow through each restrictor is different. Different restrictors (active
area) have different pressure drops and produce controllers with different
full scale flow rates. For a discussion of the interaction of the various parts
of the controller, you are urged to review Section 3-2, Theory of Operation.
If the restrictor assembly has been contaminated with foreign matter, the
pressure drop versus flow characteristics will be altered and it must be
cleaned or replaced. It may also be necessary to replace the restrictor
assembly when the mass flow controller is to be calibrated to a new flow
rate.
Restrictor assembly replacement should be performed only by trained
personnel. Consult Factory / Service center.
4-7
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
Restrictors
The SLA7900 Series MFC uses two types of restrictor assemblies
depending on full scale flowrate and expected service conditions.
1.
Wire mesh for Nitrogen equivalent flow rates above 3.4 slpm. These
restrictor assemblies are made from a cylinder of wire mesh and are
easily cleaned if they become contaminated in service.
2.
Anti-Clog Laminar Flow Element (A.C.L.F.E.) - This type of restrictor
assembly is used for Nitrogen equivalent flow rates less than 3.4 slpm.
If a mixture of two or more gases is being used, the restrictor selection
must be based on a Nitrogen equivalent flow rate of the mixture.
Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume.
The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example
a Size 4 Wire Mesh Assembly would be selected.
Table 4-3 Model SLA7900 Series Standard Restrictors
Size
D
G
J
M
P
Q
R
U
W
1
3
5
Range
SCCM Nitrogen Equivalent Flow*
Low
High
8.038
22.05
43.23
118.6
232.5
325.4
455.7
1250.
2451.
6724.
13176.
28500.
11.38
31.23
61.21
167.9
329.3
460.9
645.3
1771.
3471.
9523.
30060.
50000.
ACLFE
Part Number
Wire Mesh
S110Z275BMG
S110Z278BMG
S110Z280BMG
S110Z283BMG
S110Z285BMG
S110Z286BMG
S110Z287BMG
S110Z290BMG
S110Z292BMG
S110Z317BMG
S110Z226BMG
S110Z417BMG
*Materials: BMG = 316 Stainless Steel Electropolished
NOTES: • If two sizes are allowed because of overlap, select the larger size.
• Restrictor size not required to enter order.
4-8
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Section A
CE Certification of Mass Flow Equipment
SLA7900 Series
Dansk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Emne
Reference
Dato
:
:
:
Tillæg til instruktions manual.
CE mærkning af Masse Flow udstyr
Januar-1996.
Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj
(EMC direktivet 89/336/EEC).
Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
Kvaliteten af signal kabler og stik:
Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten
være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 100%
dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,
Deutsch
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject
Referenz
Datum
:
:
:
Nachtrag zur Bedienungsanleitung.
CE Zertifizierung für Massedurchflußgeräte
Januar-1996.
Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/
EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.
Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.
Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen
Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.
·“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.
Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von
360 ° anzuschließen.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CEZertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.
A-1
Section A
CE Certification of Mass Flow Equipment
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
English
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject
Reference
Date
:
:
:
Addendum to the Instruction Manual.
CE certification of Mass Flow Equipment
January-1996.
The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used
providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE
certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
Español
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Asunto
Referencia
Fecha
:
:
:
Addendum al Manual de Instrucciones.
Certificación CE de los Equipos de Caudal Másico
Enero-1996.
Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas
referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).
Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un
equipo con marca CE.
Calidad del cable de señal, prensaestopas y conectores:
Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un
apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea posible,
se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente
en los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con un
apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.
A-2
Section A
CE Certification of Mass Flow Equipment
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
Français
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Sujet
Référence
Date
:
:
:
Annexe au Manuel d’Instructions.
Certification CE des Débitmètres Massiques à Effet Thermique.
Janvier 1996.
Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la
Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal
d’un appareil portant le label CE.
Qualité du câble, des presse-étoupes et des connecteurs:
Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à
chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour satisfaire à
la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.
Greek
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
1996
A-3
Section A
CE Certification of Mass Flow Equipment
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Italiano
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Oggetto
Riferimento
Data
:
:
:
Addendum al manuale di istruzioni.
Certificazione CE dei misuratori termici di portata in massa
Gennaio 1996.
Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con
successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).
E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio
CE.
Qualità dei cavi di segnale e dei relativi connettori:
Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare
propri cavi, questi devono possedere una schermatura del 100%.
I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere metallico
e fornito di fissaggio per lo schermo del cavo.
Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le
estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 100%
per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.
Nederlands
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Onderwerp
: Addendum voor Instructie Handboek
Referentie : CE certificering voor Mass Flow Meters & Controllers
Datum
: Januari 1996
Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan
de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.
Kwaliteit van de signaalkabel en kabelaansluitingen:
· Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is
afgeschermd met een bedekkingsgraad van 100%.
· “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden
toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen
Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.
· “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een
bedekkingsgraad van 100% om te voldoen aan de CE certificering.
Het scherm moet worden verbonden met aarde.
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,
A-4
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Section A
CE Certification of Mass Flow Equipment
SLA7900 Series
Norsk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Vedrørende
Referanse
Dato
:
:
:
Vedlegg til håndbok
CE sertifisering av utstyr for massestrømsmåling og regulering
Januar 1996
Til den det angår
Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC
forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.
For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.
Utførelse av signalkabel og tilhørende plugger:
·
Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.
·
Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.
“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for jordet
innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°, tilkoblet
elektrisk jord.
·
Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100% skjerming
som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.
For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen
Português
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Assunto
Referência
Data
:
:
:
Adenda ao Manual de Instruções
Certificação CE do Equipamento de Fluxo de Massa
Janeiro de 1996.
O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da
Compatibilidade Electromagnética (directiva CEM 89/336/EEC).
Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma
atenção especial.
Qualidade do cabo de sinal, buchas de cabo e conectores:
A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizarse buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a
100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.
A-5
Section A
CE Certification of Mass Flow Equipment
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Suomi
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Asia
Viite
Päivämäärä
: Lisäys Käyttöohjeisiin
: Massamäärämittareiden CE sertifiointi
: Tammikuu 1996
Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu
Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse, olisi
hankittava 100%:sti suojattu kaapeli.
“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia kaapeliliittimiä
kiinnitettäessä suojaa.
Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne olisivat
CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,
Svensk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject
Reference
Date
: Addendum to the Instruction Manual
: CE certification of Mass Flow Equipment
: January 1996
Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk
kompabilitet (EMC direktiv 89/336/EEC).
Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.
Kvalitet på signalkabel och anslutningskontakter:
Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.
“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.
Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma med CEcertifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.
A-6
Installation and Operation Manual
Section B
Zero Drift Diagnostic on SLA7950S
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AHG
August, 2009
SLA7900 Series
Zero Drift Diagnostic on Brooks Model SLA7950S
A configuration tool application is provided that allows
the user to customize the Zero Drift Diagnostic using a
personal computer connected to the SLA7950S service
port. Installation and user instructions for the configuration
tool are covered at the end of this document.
Installation Recommendations
In order to utilize this diagnostic feature, the user must
take some precautions to guarantee that there is no leakby flow through the device while the Zero Drift Diagnostic
is active as the flow signal is used to detect a zero drift
condition. Since the SLA7950S valve is not a shutoff type
valve, the user must have shutoff valves upstream and
downstream of the device that are closed whenever
setpoint is 0. The recommended configuration is shown
in Figure B-1.The recommended shutoff valves will
prevent false drift detection that could result due to
normal leak-by flow.
BROOKS
Introduction
The Zero Drift Diagnostic is an advanced diagnostic now
offered on the SLA7950S MFC, which detects and alerts
the user when the flow sensor zero drifts by more than
user specified limits. This unique feature monitors the
flow signal during no-flow conditions and then utilizes the
SLA7950S alarms to notify the user when an out of limits
condition has been detected. Zero drift can be accurately
detected because Brooks MFCs have the ability to monitor
both positive and negative flow signals. This diagnostic
gives the user a higher level of confidence that the
process has not shifted. Brooks products have long been
revered for their resistance to zero drift over long periods
of time. Now Brooks is the first MFC supplier to prove
their stability.
Figure B-1 Recommended Shutoff Valve Configuration
B-1
Section B
Zero Drift Diagnostic on SLA7950S
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AHG
August, 2009
SLA7900 Series
Theory of Operation
The Zero Drift Diagnostic actively monitors for drift by
monitoring the flow signal during known no-flow
conditions. The SLA7950S uses a zero setpoint value
to define a no-flow condition. However, since flow does
not stop instantly when the setpoint is set to zero,
monitoring for drift is delayed for a time period known
as the interlock delay as shown in Figure B-2. When
the setpoint first becomes zero and the user shutoff
valves close, there will be some differential pressure
across the MFC valve. Leak-by flow will occur until the
pressure across the valve equalizes. The length of time
that is required for the pressure to equalize will depend
upon the volume in the users system between the MFC
and the shutoff valves. The purpose of the interlock
delay is to allow the differential pressure across the
MFC to equalize (become zero) and thus prevent false
drift detection. The user can configure the interlock
delay to any value in the range of 1 to 99.9 minutes.
The user may specify the error limit that the Zero Drift
Diagnostic will allow before notifying the user that a zero
drift has been detected. The error limit can be set to any
value in the range 0.5% to 100% of full scale.
The SLA7950S has a temperature zero drift specification
of 0.035% per ºC. Therefore, it is possible for the flow
signal drift to exceed a user specified error limit of 0.5%
with a 14.28 ºC change in temperature as compared to
the temperature of the device when it was last zeroed. To
prevent undesired drift detection, a feature is provided
which adjusts the allowable error limit for temperature as
shown in Figure B-3. When this feature is enabled, the
Zero Drift Diagnostic will never detect drift if the drift does
not exceed the zero drift specification of 0.035% per ºC.
Figure B-3 is an example of effect of the “Adjust Error
Limit for Temperature” feature. In this example, the user
has specified an error limit value of 1% of full scale. If the
“Adjust Error Limit for Temperature” feature is disabled,
flow signal values that exceed 1% (pink and yellow
areas) would be detected as drift. However, if the “Adjust
Error Limit for Temperature” feature is enabled, then the
flow values that exceed 1% and exceed the allowable
drift due to temperature (pink area) would be detected as
drift.
Setpoint
Flow
Flow Signal
Alarm
Anunciated
Error Limit
0
Interlock Delay
Alarm Delay
Figure B-2 ZDD Interlock Timing
B-2
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AHG
August, 2009
Section B
Zero Drift Diagnostic on SLA7950S
SLA7900 Series
Figure B-3 Error Limits
Once drift beyond the allowed limits has been detected,
the SLA7950S alarms are utilized to notify the user. The
Zero Drift Diagnostic alarm allows the user several
options to configure how the user is notified. The options
are:
1. Flash the Alarm LED; red for alarm, green for
warning.
2. Activate the alarm output (pin 3).
3. Transition the MFC to safe state.
Flashing the alarm LED and closing the alarm contact are
standard alarm features on the SLA7950S. When drift is
detected, the alarm LED will flash the Zero Drift Diagnostic
alarm flash code (13 unless changed by the user). The
alarm contact will also be closed if the option is enabled.
Transitioning the MFC to safe state is an option available
only for the Zero Drift Diagnostic alarm. When the
Transition to safe state option is enabled and drift is
detected, the MFC will transition to a “safe state” which
for the SLA7950S means that the valve will be closed and
the flow signal will be set to zero. The Alarm LED will flash
the Zero Drift Diagnostic alarm flash code in red and the
Status LED will flash red. To return the device to normal
operational mode, press the zero button. After the zero
operation completes successfully, the Status LED will
change to solid green and the alarm LED will turn off
(assuming no other alarms are currently active).
B-3
Section B
Zero Drift Diagnostic on SLA7950S
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AHG
August, 2009
SLA7900 Series
Installing the Zero Drift Diagnostic Configuration Tool
The Zero Drift Diagnostic Configuration Tool is
supplied as a single self-installing executable file,
ZDDCT.exe. The ZDDCT requires Windows® XP,
Windows 2000, or Windows 95. Run this file and
follow the Install Wizard directions. When installation
is complete, run the tool from the Start menu, choose
All Programs, then Brooks Instrument, and then select
ZDDCT.
Connecting the Zero Drift Diagnostic Configuration
Tool to your SLA7950S MFC
Connecting a SLA7950S to a Personal Computer RS232 serial port requires Brooks cable kit S778D023ZZZ.
This kit includes a 3-wire cable and a RS-232 converter.
Follow the procedure below to connect the SLA7950S to
your PC.
1. Remove power from the SLA7950S.
2. Remove cover of the SLA7950S by removing the
screw on the top of the device and sliding the cover
upwards.
3. Plug the converter onto the desired communications
port of your PC.
4. Plug the 9 pin D connector on the cable to the
converter.
5. Plug the cable onto the service port as shown in
Figure B-4.
6. Restore power to the SLA7950S.
Figure B-4 Connecting to the SLA7950S Service Port
B-4
Using the Zero Drift Diagnostic Configuration Tool
Important: The ZDDCT will only connect to SLA7950S
MFC’s that have been purchased with the Zero Drift
Diagnostic feature.
Configuring the ZDD using the Zero Drift Diagnostic
Configuration Tool (ZDDCT) is accomplished in 4 easy
steps:
1. Select Communications Port
2. Select Product
3. Configure the ZDD parameters
4. Send the configuration to the device
The ZDDCT main panel is shown in Figure B-5. Some
helpful tips on using this application are:
·
·
·
Holding the cursor over a control for 1 second will
reveal help about that control. For pull-down type
boxes, hold mouse pointer over the pull-down arrow
(6).
The user will be limited to entering valid values for
each control. To determine the range of valid values
for a control, activate the control’s help as described
above.
To reveal the “About” window, right click on the main
window title bar and select About ZDDCT.
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AHG
August, 2009
Section B
Zero Drift Diagnostic on SLA7950S
SLA7900 Series
Figure B-5 About ZDDCT Window
Step 1 - Begin the configuration of the Zero Drift
Diagnostic by selecting the appropriate serial
communications port. The ZDDCT
automatically detects all available COM ports
and displays them in the Select
Communications Port pull-down box. Select the
COM port that the SLA7950S MFC to be
configured is connected to. The ZDDCT
supports
USB to RS-232
communications ports as well
as all built in
COM ports. If the desired COM port
is not
displayed in the pull-down box, verify that
the COM port is not in use by another
application. The status of all installed COM
ports can be verified in the Windows Device
Manager.
B-5
Section B
Zero Drift Diagnostic on SLA7950S
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AHG
August, 2009
Step 2 – Select the type of Brooks MFC to be configured
by using the Select product pull-down. The
ZDDCT will attempt to communicate with the
connected device, verify that the device has
the ZDD feature enabled, and will then read
and display the ZDD configuration parameters.
If the ZDDCT cannot communicate with the
connected device, the error window shown
below will be displayed. Verify that the device
is powered, that the device is properly
connected and that the device is connected to
the selected serial port.
If the ZDDCT detects that the connected device
does not have the ZDD feature enabled, the
error window shown below will be displayed.
Contact your Brooks Instrument representative
to find out how to enable the ZDD feature in
your device.
Step 3 – Configure the parameters that control the
functionality of the ZDD features. The effect of
each configuration parameter on the
functionality of the Zero Drift Diagnostic along
with the range of valid values is detailed below:
Enable – Enables the reporting of drift beyond
allowed limits detected by the Zero Drift
Diagnostic. The user may select Disabled,
Warning, or Alarm. When set to Warning, the
Alarm LED will display the specified flash code
in Green when drift has been detected. When
set to Alarm, the Alarm LED will display the
specified flash code in Red.
Flash Code – This parameter sets the code
that is flashed on the Alarm LED when a drift
condition has been detected. The code is
B-6
displayed as a set of flashes at a ½ second
interval followed by a 1 second interval. To
determine the alarm type, observe the Alarm
LED until the 1-second interval occurs then
count the number of flashes before the next 1second interval. The default value for Flash
Code is 13.
Latching Enable – If selected, the warning/
alarm condition will displayed, even if the Zero
Drift condition goes away. This latched warning/
alarm condition is cleared at the end of each
Interlock Delay.
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AHG
August, 2009
Section B
Zero Drift Diagnostic on SLA7950S
SLA7900 Series
Contact Enable - If selected, a warning/alarm
condition will cause the open-collector output
at pin 3 of the device’s 15 pin D-connector to
be active (closed). Note that the alarm output
is shared among all alarms and that other
alarms may also be configured to activate the
alarm output. If this is the case, it is not
possible to detect the type of alarm that
activated the alarm contact by monitoring the
only the alarm contact. Caution must be taken
when connecting to the open-collector output
to guarantee that the input current to pin 3
must be limited to 25 mA (closed) and applied
voltage must be less than 30 Vdc (open). The
default value for Contact Enable is Disabled.
Error Limit - The maximum allowable drift in
percent of Full Scale that may occur without
the Zero Drift Diagnostic causing an alarm or
warning to be annunciated. The range of valid
values is 0.5% to 100%. The default value for
Error Limit is 1.0%.
Adjust Error Limit for Temperature - When
enabled, the Error Limit will be adjusted to the
device’s Zero Temperature Drift specification
so that the alarm will not be annunciated if the
device is operating within the published Zero
Temperature Drift specification. The default
value for Adjust Error Limit for Temperature is
Enabled.
Alarm Delay - Number of seconds that the
warning/alarm condition must be active before
the warning/alarm is indicated on the Alarm
LED and Alarm contact. The default Alarm
Delay value is 1 second.
Interlock Delay - The time, in minutes, after
setpoint transitions to zero before the Zero
Drift Diagnostic begins monitoring the flow
signal for values that exceed the Error Limit.
The valid range of values is 0.0 to 99.9 minutes.
The default Interlock Delay value is 5 minutes.
Safe State Enable - If Enabled, the MFC will
transition to a “Safe State” when the Zero Drift
Diagnostic annunciates the alarm condition.
To clear this condition, the MFC must be
zeroed or the power cycled. “Safe State” is
defined as valve closed and flow signal set to
0.0. The default value for Safe State Enable is
Disabled.
B-7
Section B
Zero Drift Diagnostic on SLA7950S
SLA7900 Series
Step 4 – Press the Send button to send the configuration
to the device. The parameters in the SLA7950S
will be updated with the values as configured
during step 3. When the parameters have all
been successfully written and verified, the
following dialog box will appear.
Errors are unlikely to occur during this process,
however, if an error is encountered, a dialog
box will be displayed detailing the nature of the
problem. Verify that the device is still connected
properly and that the device is still powered.
B-8
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AHG
August, 2009
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
SLA7900 Series
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SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
LIMITED WARRANTY
Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.
BROOKS SERVICE AND SUPPORT
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
START-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.
CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.
Please contact your nearest sales representative for more details.
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