Selection guide Optional parts (sold separately)

CP-PC-1280E
Selection guide
SUS model
Connection
R
Gas type
N
S
2
0
0
0
1
0
D
Y
0
Output
Option (1)
Option (2)
Option (3)
Option (4)
Design code
Gas Mass Flowmeter
Gas Mass Flowmeter
T
S
V
Option (1)
Option (2)
Option (3)
Option (4)
Design code
Connection
N
S
E
2
0
1
0
0
1
0
D
Y
0
T
S
V
Gas type
Output
Option (1)
Option (2)
Option (3)
Option (4)
Description
Design code
Air flow rate range 0 to 500mL/min (standard) [Notes 1,3]
Air flow rate range 0 to 2L/min (standard) [Notes 1, 3]
Air flow rate range 0 to 5L/min (standard) [Notes 1, 3]
Air flow rate range 0 to 20L/min (standard) [Notes 1, 3]
Air flow rate range 0 to 50L/min (standard) [Notes 1, 3]
Air flow rate range 0 to 200L/min (standard) [Notes 1, 3]
Air flow rate range 0 to 500L/min (standard) [Notes 1, 3]
Includes display. Flow direction: left
right
Includes display. Flow direction: right
left
SUS316
UNF connection: 9/16-18 UNF (CMS9500/0002/
0005/0020/0050), 3/4-16 UNF (CMS0200/0500)
Rc 1/4" (CMS9500/0002/0005/0020/0050),
Rc 1/2" (CMS0200/0500)
1/4" Swagelok (CMS9500/0002/ 0005/0020/0050),
1/2" Swagelok (CMS0200/0500)
1/4" VCR (CMS9500/0002/0005/ 0020/0050),
3/8" VCR or equiv., (CMS0200/ 0500)
Air/nitrogen (changeable to standard gases [Note 3])
Oxygen [Note 2]
Semi-standards gas: acetylene (C2H2), ammonia (NH3) [Note 2]
4-20mAdc / 0-5Vdc / 1-5Vdc selectable
(None)
RS-485 communications
(None)
(None)
Gas-contacting parts treated to be oil-inhibited
(None)
Inspection results provided
Traceability certificate provided
Product version
U
Output
U
Example: CMS9500BTTN200000
Selection
CMS
Basic model No.
9500
0002
0005
0020
Flow rate range
0050
0200
0500
B
Display
R
Material
T
Gas type
Selection
CMS
Basic model No.
0010
0050
0200
Flow rate range
0500
1000
2000
B
Display
R
Material
T
Description
Air flow rate range 0 to 500mL/min (standard) [Notes 1, 3]
Air flow rate range 0 to 2L/min (standard) [Notes 1, 3]
Air flow rate range 0 to 5L/min (standard) [Notes 1, 3]
Air flow rate range 0 to 20L/min (standard) [Notes 1, 3]
Air flow rate range 0 to 50L/min (standard) [Notes 1, 3]
Air flow rate range 0 to 200L/min (standard) [Notes 1, 3]
Air flow rate range 0 to 500L/min (standard) [Notes 1, 3]
Includes display. Flow direction: left
right
Includes display. Flow direction: right
left
SUS303 and SUS316
Rc 1/2" (CMS0200/0500)
Rc 1/4" (CMS9500/0002/0005/0020/0050)
Air/nitrogen (changeable to standard gases [Note 3])
Oxygen [Note 2]
4-20mAdc / 0-5Vdc / 1-5Vdc selectable
(None)
(None)
(None)
Gas-contacting parts treated to be oil-inhibited
(None)
Inspection results provided
Traceability certificate provided
Product version
SUS316 model
Connection
Hydrogen/helium gas model (SUS316)
Example: CMS9500BSRN200000
Selection
Basic model No.
CMS
9500
0002
0005
0020
Flow rate range
0050
0200
0500
B
Display
R
Material
S
H
2
0
1
0
1
0
D
Y
0
Gas Mass Flowmeter
Example: CMS0010BTTH200100
Description
Air flow rate range 0 to 10L/min (standard) [Note 1]
Air flow rate range 0 to 50L/min (standard) [Note 1]
Air flow rate range 0 to 200L/min (standard) [Note 1]
Air flow rate range 0 to 500L/min (standard) [Note 1]
Air flow rate range 0 to 1000L/min (standard) [Note 1]
Air flow rate range 0 to 2000L/min (standard) [Note 1]
Includes display. Flow direction: left
right
Includes display. Flow direction: right
left
SUS316
UNF connection: 9/16-18 UNF (CMS0010/0050/0200),
3/4-16 UNF (CMS0500/1000/2000)
Rc connection: Rc 1/4" (CMS0010/0050/0200),
Rc 1/2" (CMS0500/1000/2000)
Swl connection: 1/4" Swagelok (CMS0010/0050/0200),
1/2" Swagelok (CMS0500/1000/2000)
VCR connection: 1/4" VCR (CMS0010/0050/0200),
3/8" VCR or equiv. (CMS0500/1000/2000)
Hydrogen, helium [Note 5]
4-20mAdc / 0-5Vdc / 1-5Vdc selectable
(None)
RS-485 communications
(None)
Gas-contacting parts treated to be oil-inhibited
(None)
Inspection results provided
Traceability certificate provided
Product version
• A circle (o) denotes availability.
Notes 1. “Standard” refers to the flow rate after conversion to 20℃, 101.325kPa (1 atmosphere).
2. When oxygen (gas type: S) or Semi-standards gas (gas type: E) are selected, make sure to
specify “1: Gas-contacting parts tr eated to be oil-inhibited” for option (3). Note that resin and
hydrogen models cannot be used for oxygen.
3. Gas type is set to air/nitrogen at the factory. The user can change to any of the gas types listed
below using the control panel keys. A change in gas type can result in a change in flow rate range.
Consequently, when selecting a gas type, make sure to check the maximum measurable flow rate
for the gas type in the specifications of the re levant model. Compatible gas types: air/nitrogen,
argon, carbon dioxide, city gas 13A (produced from LNG, 88% methane, calorific value of 45MJ or
46MJ), methane (100%), propane (100%), butane (100%). For other gas types, contact Yamatake
Corporation.
4. Compatible gas types for resin and aluminum models are air/nitrogen, argon and carbon dioxide
only. The user can change to any of these gas types using the control panel keys. A change in gas
type can result in a change in flow rate range. Consequently, when selecting a gas type, make
sure to check the maximum measurable flow rate for the gas type in the specifications of the
relevant model.
5. Gas type is set to hydrogen at the factory. Change to helium with the gas type selection function.
The maximum measurable flow rate is the same for hydrogen and helium.
Optional parts (sold separately)
A dedicated harness is required for each CMS flowmeter. Please order the harness when ordering the CMS.
Name
Harness with special connector
Mounting bracket
Applicable models
• Without RS-485 communications
• With RS-485 communications
• SUS/SUS316 models (CMS9500/0002/0005/0020/0050)
• Hydrogen/helium gas models (CMS0010/0050/0200)
• SUS/SUS316 models (CMS0200)
• Hydrogen/helium gas models (CMS0500/1000)
• SUS/SUS316 models (CMS0500)
• Hydrogen/helium gas models (CMS2000)
Harness length
2m
5m
2m
5m
Part No.
81446594-005
81446594-006
81446594-007
81446594-008
81446628-001
81446721-001
81446856-001
Please read “Terms and Conditions” from the following URL
before ordering and use.
http://www.azbil.com/products/factory/order.html
Other product names, model numbers and company names may be trademarks of the respective company.
[Notice] Specifications are subject to change without notice.
No part of this publication may be reproduced or duplicated
without the prior written permission of Azbil Corporation.
Yamatake Corporation changed its name to Azbil Corporation on April 1, 2012.
1-12-2 Kawana, Fujisawa
Kanagawa 251-8522 Japan
URL: http://www.azbil.com
1st Edition : Mar. 2003-MO
8th Edition: Sep. 2017-AZ
CP-PC-1280E
(14)
Solutions to a range of application needs...
Need:
Need: AA low
low cost
cost and
and high
high accuracy
accuracy //
resolution
resolution mass
mass
The gas mass flowmeter is equipped with a Micro Flow sensor
to offer high accuracy of ±3% RD, repeatability of 0.5% FS and
wide rangeability of 100:1, all at low cost.
The gas mass flowmeter is a mass flowmeter equipped with Azbil's µF(Micro Flow)sensor,
wtich can detect even the slightest gas flows. It combines the superb performance of the
µF sensor not available before and Azbil's original rectification mechanism to realize
high accuracy, high resolution, and high rangeability, at the cost of a conventional float
type flowmeter. Available in a range of functions, the gas mass flowmeter employs a unique
method of measuring gas flow rate that is also resistant to changes in temperature and pressure.
Need:
Need: AA mass
mass flowmeter
flowmeter with
with aa variety
variety
of
of functions
functions
The gas mass flowmeter offers a variety of functions, such as
instantaneous /integratred flow rate indication, analog output,
integrated pulse output, event output (2 points) and analog
output scaling function and RS-485 communications.
Need:
Need: Elbow
Elbow piping
piping on
on the
the upstream
upstream side
side
To obtain stable measurement, a conventional flowmeter
requires a long straight piping area at the upstream side. The
gas mass flowmeter, however, can assure stable measurement
without a straight piping area, due to the superior performance
of μF sensor and Azbil's rectification mechanism. It can even
be connected to an elbow pipe, allowing for easy design of
piping layout.
Need:
Need: Low
Low pressure
pressure gas
gas measurement
measurement
Only 500Pa pressure loss [when the primary pressure is 49kPa
for the CMS200] due to a special measurement method on the
flow path wall.
Analog output
Event outputs: 2 points
(One point is applicable as
an integrated pulse output.)
RS-485 communications
(Optional function for SUS316/hydrogen
gas models)
Need:
Need: AA suitable
suitable model
model
A broad selection of the gas mass flowmeter is available tomeet
any application and price range. Choose asuitable model
according to flow rate range, gas passage material, types of gas
measured, etc.
Structure and features of µF (Micro Flow) sensor
Section A-A'
• Manufactured by silicon micro-machining and thin-film technologies,
this thermal type flow sensor is a mere 1.7mm (squared) and 0.5mm
thickness.
Downstream temperature
sensor (Rd)
• The use of ultra-precision machining technology minimizes variations in
Upstream temperature
sensor (Ru)
element layout and thermal capacity. High resolution of 1 mm/s in flow
speed and high-speed response of approx. 2ms are achieved at the
sensor chip level.
[Principle of Measurement] When gas flow does not exist, the
temperature distribution around the heater is symmetric. When the gas
starts to flow from Ru to Rd, the temperature at Ru upstream begins to
decrease, while the temperature at Rd downstream increases, thus
causing a distortion in the symmetry in temperature distribution. This
temperature difference between Ru and Rd is used to calculate the mass
velocity (velocity x density).
1
Flow
Silicon
chip
1.7 mm
Diaphragm
A
A'
Ambient
temperature sensor
(Rr)
Silicon chip
Heater (Rh)
0.5mm
Rr Ru Rh Rd Diaphragm
Cavity
No flow situation
Temperature
profile
A
Ru Rh Rd
A'
Flow situation
Temperature
profile
A
Ru Rh Rd
A'
2
Specifications
SUS model
Model No.
Compatible gas types
Air flow range [Note 1]
Max. measured
flow rate for
each gas
(at 1 atm, 20℃)
[Note 2]
Air/nitrogen
Oxygen [Note 3]
Argon
Carbon dioxide
City gas 13A [Note 4]
Methane
Propane
Butane
Specifications
CMS9500
CMS0002
CMS0005
CMS0020
CMS0050
CMS0200
CMS0500
Air, nitrogen, oxygen (oxygen model only), argon, carbondioxide, city gas 13A (limited to LNG: 45/46MJ), methane(100%), propane (100%) and butane (100%).
Gas must be dry and without corrosive components (chlorine, sulfur, acid, etc.). It must also be clean, without dust or oil mist.
0 to 500
0 to 2
0 to 5
0 to 20
0 to 50
0 to 200
0 to 500
mL/min(standard)
L/min(standard)
L/min(standard)
L/min(standard)
L/min(standard)
L/min(standard)
L/min(standard)
“Standard” refers to the flow rate after conversion to 20℃, 101.325kPa (1 atmosphere).
500 mL/min
2 L/min
5 L/min
20 L/min
50 L/min
200 L/min
500 L/min
500 mL/min
2 L/min
5 L/min
20 L/min
50 L/min
200 L/min
500 L/min
500 mL/min
2 L/min
5 L/min
20 L/min
50 L/min
200 L/min
500 L/min
250 mL/min
1 L/min
3.3 L/min
10 L/min
25 L/min
100 L/min
250 L/min
400 mL/min
1.5 L/min
4.5 L/min
15 L/min
40 L/min
150 L/min
400 L/min
500 mL/min
2 L/min
5 L/min
20 L/min
50 L/min
200 L/min
500 L/min
140 mL/min
0.5 L/min
1.7 L/min
5 L/min
14 L/min
50 L/min
140 L/min
100 mL/min
0.4 L/min
1.25 L/min
5 L/min
12 L/min
50 L/min
120 L/min
Measurement accuracy
at 20℃,1 atm [Note 5]
Minimum display
Display resolution
Operating temperature
Storage temperature
Operating humidity
Connection method
Body material
Case material
Operating pressure
Pressure resistance
Mounting position
Rated voltage
Sampling cycle
Output signal
(instantaneous flow rate)
Event output
Event functions
External contact input
Electrical connection
Display
Weight
SUS316 model
Model No.
Compatible gas types
Air flow range [Note 1]
Max. measured
flow rate for
each gas
(at 1 atm, 20℃)
[Note 2]
Air/nitrogen
Oxygen [Note 3]
Argon
Carbon dioxide
City gas 13A [Note 4]
Methane
Propane
Butane
1 mL/min
1 mL/min
0.01 L/min
0.01 L/min
0.1 L/min
0.1 L/min
-10 to 60℃
-20 to +70℃
10 to 90% RH (no condensation allowed)
Rc 1/4"
SUS303 and SUS316
Polycarbonate
-0.07 to +1.0MPa
1.5MPa
Horizontal, flow direction: left
right or right
left
12 to 24Vdc
100ms± 10ms
1 L/min
1 L/min
Rc 1/2"
Hydrogen/helium gas model (SUS316)
Model No.
Compatible gas types
Flow range [Note 1]
Max. measured flow rate for each Hydrogen
gas (at 1 atm, 20℃) [Note 2]
Helium
Measurement accuracy
at 20℃,1 atm
Minimum display
Display resolution
Operating temperature
Storage temperature
Operating humidity
Connection method
Body material
Case material
Operating pressure
Pressure resistance
Mounting position
Rated voltage
Sampling cycle
Output signal
(instantaneous flow rate)
Event output
Event functions
0-5Vdc / 1-5Vdc / 4-20mA, selectable using control panel keys
Open collector output: 2 points
Specify from among instantaneous flow rate upper/lower limit,cumulative flow countup, reverse-cumulative flow countdown, totalizer pulse output (event 2 only), flow rate data serial output (event 1).
1 (reserved for reset of cumulative count, no-voltage contact)
Harness with special connector (sold separately)
4-digit 7-segment LED, selectable between instantaneous flow rate and cumulative flow
Approx.2000g
Approx.1400g
Approx. 800g
External contact input
Electrical connection
Display
Weight
CMS0050
CMS0200
CMS0500
CMS1000
CMS2000
Hydrogen and helium. Gas must be dry and without corrosive components (chlorine, sulfur, acid, etc.).
It must also be clean, without dust or oil mist.
0 to 50
0 to 200
0 to 500
0 to 1000
0 to 2000
0 to 10
L/min(standard)
L/min(standard)
L/min(standard)
L/min(standard)
L/min(standard)
L/min(standard)
“Standard” refers to the flow rate after conversion to 20℃, 101.325kPa (1 atmosphere).
10 L/min
50 L/min
200 L/min
500 L/min
1000 L/min
2000 L/min
10 L/min
50 L/min
200 L/min
500 L/min
1000 L/min
2000 L/min
0.5≤ x< 10L/min
2≤ x< 40L/min
5≤ x< 100L/min
10≤ x< 200L/min
20≤ x< 400L/min
0.1≤ x< 2L/min
±1% FS±1digit
±1% FS±1digit
±1% FS±1digit
±1% FS±1digit
±1% FS±1digit
±1% FS±1digit
2≤ x≤ 10L/min
10≤ x≤ 50L/min
40≤ x≤ 200L/min
100≤ x≤ 500L/min
200≤ x≤ 1000L/min
400≤ x≤ 2000L/min
±5% RD±1digit
±5% RD±1digit
±5% RD±1digit
±5% RD±1digit
±5% RD±1digit
±5% RD±1digit
0.01 L/min
0.1 L/min
1 L/min
1 L/min
1 L/min
5 L/min
0.01 L/min
0.1 L/min
1 L/min
1 L/min
1 L/min
5 L/min
-10 to +60℃
-20 to +70℃
10 to 90% RH (no condensation allowed)
3/4-16 UNF, Rc 1/2", 1/2" Swagelok, and 3/8" VCR or equiv.,
9/16-18 UNF, Rc 1/4", 1/4" Swagelok, and 1/3" VCR or equiv.,
selectable by model No.
selectable by model No.
SUS316
Polycarbonate
-0.07 to +1.0MPa
1.5MPa
Horizontal, flow direction: left
right or right
left
12 to 24Vdc
100ms± 20ms
CMS0010
0-5Vdc / 1-5Vdc / 4-20mA, selectable using control panel keys
2 open collector outputs
Instantaneous flow rate upper/lower limit, cumulative flow countup, reverse-cumulative flow countdown,
totalizer pulse output (event 2 only), flow rate data serial output (event 1).
1 (reserved for reset of cumulative count, no-voltage contact)
Harness with special connector (sold separately)
4-digit 7-segment LED, selectable between instantaneous flow rate and cumulative flow
Approx. 1400g
Approx. 800g
Approx.2000g
Notes 1. Flow rate range for hydrogen and helium. Using the control panel keys, user can change the scaling of the analog output.
2. The flowmeter can also be used for mixed gases containing hydrogen or helium gases by means of the gas type conversion factor function. For details, contact Azbil Corporation.
CMS0050
CMS0020
CMS0500
CMS0005
CMS0200
CMS0002
CMS9500
Air, nitrogen, oxygen (oxygen model only), argon, carbon dioxide, city gas 13A (limited to LNG: 45/46MJ), methane (100%), propane (100%) and butane (100%).
Semi-standard gas: Acetylene (C2H2), ammonia (NH3)
Gas must be dry and without corrosive components (chlorine, sulfur, acid, etc.). It must also be clean, without dust or oil mist.
0 to 20
0 to 500
0 to 5
0 to 200
0 to 2
0 to 50
0 to 500
L/min(standard)
L/min(standard)
L/min(standard)
L/min(standard)
L/min(standard)
L/min(standard)
mL/min(standard)
“Standard” refers to the flow rate after conversion to 20℃, 101.325kPa (1 atmosphere).
500 L/min
5 L/min
200 L/min
2 L/min
50 L/min
500 mL/min
20 L/min
500 L/min
5 L/min
200 L/min
2 L/min
50 L/min
500 mL/min
20 L/min
20
L/min
500
L/min
5
L/min
200 L/min
2 L/min
50 L/min
500 mL/min
250 mL/min
10 L/min
250 L/min
3.3 L/min
100 L/min
1 L/min
25 L/min
40 L/min
400 mL/min
15 L/min
400 L/min
4.5 L/min
150 L/min
1.5 L/min
200 L/min
2 L/min
50 L/min
500 mL/min
20 L/min
500 L/min
5 L/min
50
L/min
0.5
L/min
14
L/min
140 mL/min
5 L/min
140 L/min
1.7 L/min
50 L/min
0.4 L/min
12 L/min
100 mL/min
5 L/min
120 L/min
1.25 L/min
Measurement accuracy
at 20℃,1 atm [Note 5]
Minimum display
Display resolution
Operating temperature
Storage temperature
Operating humidity
1 mL/min
1 mL/min
0.01 L/min
0.01 L/min
1 L/min
1 L/min
-10 to +60℃
-20 to +70℃
10 to 90% RH (no condensation allowed)
9/16-18 UNF, Rc 1/4", 1/4" Swagelok, and
3/4-16 UNF, Rc 1/2", 1/2" Swagelok, and
1/3" VCR or equiv., selectable by model No.
3/8" VCR or equiv., selectable by model No.
SUS316
Fluoro rubber: Gas type code (N) (S)
EPDM: Gas type code (E) EPDM: Ethylene-Propylene-Dlene-Methylene (rubber)
Polycarbonate
-0.07 to +1.0MPa
1.5MPa
right or right
left
Horizontal, flow direction: left
12 to 24Vdc
100ms± 10ms
Connection method
Body material
O-ring material
Case material
Operating pressure
Pressure resistance
Mounting position
Rated voltage
Sampling cycle
Output signal
(instantaneous flow rate)
Event output
Event functions
External contact input
Electrical connection
Display
Weight
0.1 L/min
0.1 L/min
0-5Vdc / 1-5Vdc / 4-20mA, selectable using control panel keys
2 open collector outputs
Specify from among instantaneous flow rate upper/lower limit,cumulative flow countup, reverse-cumulative flow countdown, totalizer pulse output (event 2 only), flow rate data serial output (event 1).
1 (reserved for reset of cumulative count, no-voltage contact)
Harness with special connector (sold separately)
4-digit 7-segment LED, selectable between instantaneous flow rate and cumulative flow
Approx.2000g
Approx.1400g
Approx. 800g
Notes 1. Flow rate range for air. Using the control panel keys, user can select the desired gas type and can
also change the scaling of the analog output.
2. The flowmeter can also be used for some gases not listed in this table by means of the gas type
conversion factor function. For details, contact Azbil Corporation.
3. Only models with the catalog listing CMS_ _ _ _ B _ _ S _ _ _ 1 _ _ are for oxygen use.
4. City gas 13A is based on the gases shown below, which are produced from LNG. If the composition
of your 13A is different, contact Azbil Corporation.
5. Accuracy infromation applies to air/nitrogen or oxygen (oxygen gas model).
Gas type name
City gas 13A-46MJ
City gas 13A-45MJ
3
Calorific value
(MJ)
46.04655
45.007
Methane Ethane
(%)
(%)
88
5.8
88.9
6.8
Propane
(%)
4.5
3.1
Butane
(%)
1.7
1.2
4
External Dimensions
(unit:mm)
CMS9500/0002/0005/0020/0050 (SUS model and SUS316 model)
SUS model
External Dimensions
(unit:mm)
CMS0010/0050/0200 (Hydrogen/helium model (SUS316))
SUS 316 model
Massflow CMS
Massflow CMS
EV1
EV1
EV2
EV2
DISP
15±0.1
(7.5)
1/4" Swagelok connection type
(21.5)
48
(23.9)
MADE IN JAPAN
(138.8)
MADE IN JAPAN
(142.4)
(23.9)
Material SUS316
MADE IN JAPAN
(138.8)
91
15.7
Rc 1/4" joint (2)
1/4" Swagelok joint (2)
SS-400-1-6STSC11
Applicable pipe: outer dia. 1/4"
Material SUS316
(25.7)
1/4" Swagelok connection type
1/4" VCR joint (2)
SS-4-VCR-1-000325SC11
(23.9)
Material SUS316
1/4" VCR connection type
1/4" VCR connection type
CMS0500/1000 (Hydrogen/helium model (SUS316))
CMS0200 (SUS model and SUS316 model)
SUS model
23.5
15.7
9/16-18UNF (2)
HEX21
(25.7)
1/4" VCR joint (2)
SS-4-VCR-1-000325SC11
(23.9)
MADE IN JAPAN
(138)
Rc 1/4" connection type
1/4" Swagelok joint (2)
SS-400-1-6STSC11
Applicable pipe: outer dia. 1/4"
Material SUS316
18.5
37
9/16-18UNF connection type(standard)
23.5
Rc 1/4" joint (2)
(25.7)
MADE IN JAPAN
(142.4)
91
15.7
HEX9/16
HEX21
(25.7)
15.7
9/16-18UNF (2)
HEX9/16
69.1
17
(48.7)
32
Threaded hole for body
installationM4 with thread
depth 5 (4)
91
Connection thread
Rc 1/4" (2)
23.5
MADE IN JAPAN
(138)
Rc 1/4" connection type
37
ENT
MADE IN JAPAN
18.5
37
9/16-18UNF connection type(standard)
23.5
17
(48.7)
32
17
(48.7)
MADE IN JAPAN
MODE
69.1
ENT
32
MODE
69.1
DISP
SUS 316 model
Massflow CMS
EV1
EV2
Massflow CMS
DISP
MODE
ENT
EV1
EV2
23.2
(148.6)
98.6
25
Rc 1/2" joint (2)
Threaded hole for
body installation
M4 with thread
depth 6 (4)
27
13.5
Connection thread
Rc 1/2" (2)
MADE IN JAPAN
(30.7)
MADE IN JAPAN
(31.5)
48
(30.7)
(160)
(161.6)
3/8" VCR joint (2)
SS-8-VCR-1-8STSC11
(31.5)
(161.6)
Material SUS316
CMS2000 (Hydrogen/helium model (SUS316))
SUS 316 model
60
3/4-16UNF connection type (standard)
25
(160)
80
(30.7)
1/2" Swagelok connection type
(31.5)
(161.6)
96.1
16.4
(148.6)
(25)
Rc 1/2" joint (2)
Rc 1/2" connection type
(31.5)
3/8" VCR connection type
HEX7/8
MADE IN JAPAN
(30.7)
98.6
MADE IN JAPAN
(25)
Rc 1/2" connection type
MADE IN JAPAN
9.3
Rc 1/2" joint (2)
HEX7/8
98.6
M5 with thread
depth 8 (4)
Threaded hole for
body installation
15
Connection
thread
Rc 1/2" (2)
16.4
30± 0.3
16.4
60
(148.6)
16.4
HEX 26
29.5
MADE IN JAPAN
25
59
29.5
(76)
59
29.5
98.6
16.4
HEX 26
96.1
MADE IN JAPAN
16.4
3/4-16UNF connection type (standard)
59
(75.5)
96.1
60
(75.5)
MADE IN JAPAN
5
18.7
1/2" Swagelok joint (2)
SS-810-1-8STSC11
Applicable pipe: outer dia. 1/2"
Material SUS316
3/8" VCR connection type
CMS0500 (SUS model and SUS316 model)
SUS model
MADE IN JAPAN
(31.5)
Material SUS316
3/8" VCR connection type
(30.7)
(160)
1/2" Swagelok connection type
3/8" VCR joint (2)
SS-8-VCR-1-8STSC11
(31.5)
MADE IN JAPAN
(30.7)
1/2" Swagelok joint (2)
SS-810-1-8STSC11
Applicable pipe: outer dia. 1/2"
Material SUS316
1/2" Swagelok connection type
98.6
Rc 1/2" connection type
HEX7/8
HEX7/8
98.6
18.7
50
3/4-16 UNF (2)
Rc 1/2" joint (2)
25
MADE IN JAPAN
(148.6)
Rc 1/2" connection type
38
50
82.1
23.2
18.7
HEX26
18.7
3/4-16 UNF (2)
25
MADE IN JAPAN
45
(62)
MADE IN JAPAN
3/4-16UNF connection type (standard)
50
HEX26
82.1
3/4-16UNF connection type (standard)
45
ENT
23.2
MADE IN JAPAN
25
MODE
82.1
45
(62)
DISP
1/2" Swagelok joint (2)
SS-810-1-8STSC11
Applicable pipe: outer dia. 1/2"
Material SUS316
(30.7)
3/8" VCR Swagelok joint (2)
SS-8-VCR-1-8STSC11 or equivalent model
Material SUS316
(31.5)
MADE IN JAPAN
(160)
(30.7)
1/2" Swagelok connection type
MADE IN JAPAN
(161.6)
(31.5)
3/8" VCR connection type
1/2" Swagelok joint (2)
SS-810-1-8STSC11
Applicable pipe: outer dia. 1/2"
Material SUS316
3/8" VCR Swagelok joint (2)
SS-8-VCR-1-8STSC11 or equivalent model
Material SUS316
6