Leak Detection - Make Agilent Your Vacuum

AGILENT
LEAK DETECTION
2-3 The Agilent Advantage
4-22 Leak Detection Instruments
23-27 Accessories and Options
28-29 Global Support Network
30-31 Training
32-33 Advantages of Helium Leak Detection
34-35 Leak Detection Methods
36-39 Typical Applications
40-41 Design and Application Considerations
42-43 Technical Notes
AGILENT LEAK DETECTION
The Agilent Advantage
Rigorous standards in today’s manufacturing and research and
development environments require complete leak detection solutions.
The Agilent Advantage offers a comprehensive solution the primary
component of which is our committment to Maximize your Productivity
and Uptime.
Key components of The Agilent Advantage:
●Global Applications Support
●High Performance Instruments
●Industry Leading Service and Support
High Performance Instruments
VS Series
• Easy, two button operation with fully automated start-up and calibration
• Color touch screen display allows users to program several test parameters
• Can select from several languages and measurement units
• Available with wireless remote
VS C15
• The most compact, easiest to integrate component system available – more than
50 % smaller than competitive systems
• Only 2 cables, power and communications
• Comprehensive interface options – serial, analog, discrete I/O and Profinet
• Selectable sensitivity scales and Contra-Flow vacuum design for fast, accurate
measurements with maximum protection from contamination in industrial applications
959 Leak Detector
• Rugged, easy to use, idea for many industrial applications
• Single button test activation, automatic pump down and transfer into test mode
• Vacuum testing at high inlet pressures – up to 1 Torr – shortens time-to-test
• Auto-protection from test port overpressure, power failures and operator errors
• Wet and dry versions available
PHD-4
• Sensitivity and portability in a very economical package
• Easy to use – no training required
• Battery power, and light weight (2.6 kg (5.7lbs)), make it ideal for field
maintenance applications
2
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Bubble Testing
Pressure Decay
Acoustic
Halogen
Expertise When & Where You Need It
• Toll-free hotlines provide easy accessibility to live, front-end support
• Worldwide customer service representatives assist you with
order status, pricing and delivery, and service information
• Native language applications specialists available locally, worldwide
• Application specific consulting
• More than ten thousand installed systems delivering application solutions
to customers in a broad range of industries
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Application Notes
and White Papers
Our offering of technical information
guides you to the most appropriate
leak detection method or system
design for your specific application.
• Application notes are available
at no cost
• Agilent handbooks on leak
detection principles, operation,
and techniques
Industry Leading Service and Support
Get the Most from Your Investment
• Extensive network of service engineers available to meet your needs
• Flexible, comprehensive service plans provide service and support for years of
trouble-free operation
• Services include applications assistance, start-up support, vacuum and leak
detection training, comprehensive maintenance, service agreements,
and warranty extensions
• Competent Technical support engineers are to respond with technical product
data, troubleshooting, and literature
3
Agilent is a Total Vacuum Solutions
provider, offering a comprehensive
choice of vacuum pumps.
• Rotary vane and dry scroll
primary pumps
• Turbo/drag high vacuum pumps
• Specifically designed for leak
detection applications
• See page 22 and dedicated
sections of the Agilent catalog for
more information
Leak
Detection
Complete Line
of Vacuum Pumps
PUMP SPECIFICATIONS
Mass Spectrometers
Portable
Primary pumps
Bench Mount
VS PR02
VS PD03
VS BR15
VS BD15
VS BD30
DS 42 RVP
Dry pump
combo
DS 302
IDP-15
TriScroll 620
2 (34)
3 (50)
15 (250)
15 (256)
30 (500)
Nominal pumping speed (m3/hr (l/min))
Sensitivity ranges (atm cc/sec)
5 x 10-12
5 x 10-12 atm cc/sec: 5 x 10-12 mbar l/s:
5 x 10-13 Pa m3/sec
Minimum detectable leak*
Gross leak mode:
Test mode:
Maximum test port pressure
Calibration
200 mbar, 150 Torr, 20,000 Pa
13 mbar, 10 Torr, 1,330 Pa
Automated or Manual (Internal or External)
Background suppression
Push Button Initiated Auto Zero,
and Auto Zero < Zero Function
Communication interface
RS232 and analog (standard),
Discrete IO (optional)
Set points
5 Set Points Standard, N/O or N/C;
3 Leak Rate, 1 Pressure, 1 Audio
Remote Display/Control
Wireless Remote Control (Optional)
Shipping weight - base unit (kg (lbs))
63 (140)
57 (125)
75 (165)
Compliance to Norms
85 (188)
83 (183)
CE, UL/CSA
*Per AVS 2.1
VS PR02
VS MD30+
VS MR15
4
LEAK DETECTION
Selective Ion Pump Detector
Mobile
Mobile
Component
Portable Sniffer
VS MR15
VS MD15
VS MD30+
959
VS C15
PHD-4
DS 302
IDP-15
TriScroll 620
Dry Scroll or Rotary Vane
N/A
Diaphragm Pump
15 (250)
15 (256)
30 (500)
Options as required
Options as required
–
1 x 10-4 through 1 x 10-8
4 working ranges covering
1 x 10-3 to 1 x 10-9 atm cc/sec
–
2x
116 (255)
114 (250)
atm cc/sec
5x
10-10
atm cc/sec
5 x 10-6 atm cc/sec
5 x 10-6 mbar l/s
5 x 10-7 Pa m3/sec
1 Torr
5 Torr, 7 mbar, 667 Pa
–
Manual
Automated or manual
(internal or external)
–
Manual
Auto zero, and
auto zero < zero function
Automatic/Manual
Analog
RS232, analog, discrete IO,
and Profinet
Standard Analog and
RS-232 Serial Output
–
5 set points: 4 leak rate and/
or pressure, 1 audio
–
–
Optional
–
23 (50)
Base Unit: 9 (19.8)
2.6 (5.7)
–
UL/CSA, CE Approved
CE, CSA/US
Leak
Detection
105 (230)
10-9
PHD-4
959
VS C15
5
AGILENT LEAK DETECTION INSTRUMENTS
► Agilent VS Series
567.0
(22.32)
1,016
(40.0)
441.0
(17.36)
396.0
(15.59)
620.0
(24.4)
Dimensions: millimeters (inches)
VS Series leak detectors combine the simplicity of two-button
operation with advanced system intelligence. Start and vent
buttons permit simple day-to day operation. User friendly
software offers intuitive navigation to vast system
capabilities. Programmable test sequences simplify daily
operation, minimize operator error, and maximize production
effieciency. The TFT style touch screen features high
definition and brightness with wide viewing angles.
Setup for worldwide use, these leak detectors can be
operated in multiple languages – English, French, German,
Spanish, Korean, Japanese and Chinese – and units of
measure. And the VS Series conforms to CE, UL and CSA
standards, assuring global acceptance.
VS Series leak detectors employ Agilent’s primary pumps –
rotary vane or scroll – and high vacuum pumps that deliver high
inlet pumping speed and inlet pressure tolerance minimizing
test cycle time and maximizing production throughput.
State-of-the-art spectrometer and vacuum system design
enable a broad range of test methods for specific
applications. The high efficiency ion source and beam optics
optimize sensitivity and mass separation, giving the VS Series
very high sensitivity to meet the most stringent leak test
requirements. At the same time, these leak detectors enjoy
high test port pressure tolerance which permits detection of
large leaks.
In addition, high helium pumping speed ensures fast system
response and clean-up times.
Primary pump and system mounting options may be selected
to best suit application requirements and test environments,
and the compact, lightweight design enables easy transport
from one application to another. Robust design innovations
allow the VS Series to conform to the most rigoroug industrial
standards and oprate dependently in the most challenging
environments.
Technical Specifications
Model Number
PR02
PD03
BD/MD15
BR/MR15
Configuration options
PortableBench/Mobile
Primary pump type
Rotary vane pump
Dry scroll pump
Dry scroll pump
Rotary vane pump
DS-42
Dry pump combo
IDP-15
DS-302
2 m3/hr (34 l/m)
3 m3/hr (50 l/m)
15 m3/hr (256 l/m) 15 m3/hr (250 l/m)
Minimum detectable leak
at 1000 ppm ambient helium
5 x 10-12 atm cc/sec: 5 x 10-12 mbar l/s: 5 x 10-13 Pa m3/sec helium
Maximum test port pressure
13 mbar, 10 Torr, 1330 Pa
Helium pumping speed @ test port (fine test)
1.8 l/s
Calibration routine
Automated or manual (internal or external)
Background suppression
Push button initiated auto zero, and auto zero<zero function
User interface
High clarity, color display, TFT touch screen
Selectable languages
English, French, German, Japanese, Korean, Mandarin, Spanish
Automated cycling
Programmable rough time, test time, reject set points
Response time
< 0.5 seconds
Set points
Standard, 5 set points, N/O or N/C; 3 leak rate, 1 pressure, 1 audio
Communications interface
RS232 and analog (standard), Discrete IO (optional)
Conformance standards
UL/CSA, CE
6
BD/MD30+
Dry scroll pump
TS-620
30 m3/hr (500 l/m)
LEAK DETECTION
Ordering Information
VS Models
Description
VS PR02 Portable Leak Detector, 2 m3/hr rotary vane pump
VS PD03 Portable Leak Detector, 3 m3/hr dry scroll pump combo
VS MR15 Mobile Leak Detector, 15 m3/hr rotary vane pump
VS MD15 Mobile Leak Detector, 15 m3/hr dry scroll pump
VS MD30+ Mobile Leak Detector, 30 m3/hr dry scroll pump VS BR15 Bench Mount Leak Detector, 15 m3/hr rotary vane pump VS BD15 Bench Mount Leak Detector, 15 m3/hr dry scroll pump
VS BD30+ Bench Mount Leak Detector, 30 m3/hr dry scroll pump Ordering Instructions
Choose Product Number G8600A
Choose Product Number G8600B
Choose Product Number G8601A
Choose Product Number G8601C
Choose Product Number G8601B
Choose Product Number G8602A
Choose Product Number G8602C
Choose Product Number G8602B
Additional Options (Add Option Number to Product Number as desired)
Description
Ordering Instructions
Benefit
Oil Mist Eliminator for DS42 RVP
Add Option #100
Reduces oil vapor in pump exhaust.
Discrete IO Interface
Add Option #101*
Allows control and monitoring via PC or PLC. 12 outputs permit total
control of the instrument and 6 inputs allow recording of key test data.
Wireless remote, base unit
Add Option #102
Allows communication with wireless hand-held remote control,
ordered separately (p/n VSLDWRC).
Nitrogen vent
Add Option #103
Allows the VS leak detector to be vented with nitrogen or other gas
of the users preference. Maximum supply pressure 2 PSI (0.14 bar).
Requires user supplied overpressure protection.
1 ⅛ inch compression testport
Add Option #104
For customers who prefer the old-style 1 ⅛ in. compression fitting
on the leak detector inlet.
Test fixture cable
Add Option #105*
For customers who wish to add a test fixture and test initiation
switch. Requires Discrete IO Interface, ordered separately (p/n VSFACIO).
Harsh environment (HE) probe
Add Option #106
Designed to withstand the wet environment and high temperatures
inside condenser piping without the need for dryers, chillers,
a secondary vacuum pump, or throttling valves.
Accessories (Ordered Separately)
Description
Part Number
Power probe, NW25
K9565306
Helium spray probe
K0167301
Wireless remote (hand held unit)
G8600-60002
External calibrated leaks
F8473xxx
(see page 23 for details)
Tuning leaks
K1608301
R1947301
Universal test fixture (Flapper box) L6241xxx
(see page 25 for details)
Leak Test Data Wizard
VSLTDW
Benefit
Rugged sniffer probe for testing of sealed containers pressurized
with helium; adjusts for varying sensitivity and response time.
Allows spraying of helium to find the exact location of a leak.
Includes three nozzle types for different application requirements.
Brings all major functions of the leak detector to the user’s fingertips,
enabling a truly portable solution at up to 100 meters.
Leak traceable to NIST standards for precise calibration of your
leak detector.
Ten segment calibrated needle valve to aid gross leak testing.
This accessory makes testing of small parts very fast and almost
totally automatic.
Comprehensive, user-friendly data management software enables
automation of basic leak test processes, tracks data history,
and provides graphical display of leak test data.
7
Leak
Detection
* Option #101 is required when Option #105 is ordered. Example: G860xx#101#105.
AGILENT LEAK DETECTION INSTRUMENTS
► Agilent Wireless Hand-Held Remote Control
Leaks in large systems often occur far from the leak detector.
Wired remote controls have sought to address this problem
but impedance and the cumbersome nature of long cables are
often limiting factors, so in many applications these
traditional wired remotes offer little benefit.
Agilent is proud to introduce the first wireless remote control
for a helium mass spectro– meter leak detector. By utilizing
modern wireless technology, leak testing hard-to-reach
locations is now much easier, and can be performed at much
greater distances of up to 100 meters.
Applications in large systems in which two technicians were
previously required can now be performed by one technician,
thereby reducing labor costs. All the major functions of the
leak detector are now at your fingertips giving you a truly
portable leak detection solution.
In addition to the visual bar graph of the leak rate, the remote
control has a speaker that provides a variable tone indicating
the trend and relative size of the leak. The wireless remote
can operate for a full 8-hour shift, or longer, on four AA
batteries and conforms to ISM band, 2.4 GHz FHSS standards.
Applications
Features
Benefits
• Vacuum Furnaces
• Glass Coaters
• Roll Coaters
• E-Beam Welders
• Beam Lines/Accelerators
• Semiconductor Process Tools
• Ion Implanters
• Power Generation Plants
• Wireless technology
•Significantly extends range
without cumbersome,
restrictive cables
• Enables single operator testing
•Emits variable tone that
corresponds to leak rate signal
•Enables testing even in noisy
environments
•Allows use of hand held remote
with multiple leak detectors
• Free license band with minimum
cross-talk
• 100 meter (328 ft) range
• Internal speaker
• Head phone jack
• 20 channels
•2.4 GHz frequency, ISM band
compliant
Technical Specifications
Frequency/Band
Range
Functions
Power supply
Operating life
Internal speaker
Head phones Operating temperature
Ruggedness
2.4 GHz, ISM Band FHSS Compliant
100 m (328 ft)
Test/Hold, Zero, Read standard leak, Set-up
4 (four) AA batteries, Alkaline or rechargeable (not included)
Approximately 12 hrs (dependent on batteries)
85 dB min @ 1.0 ft
Mono, 3.5 mm plug, ≥ 32 ohm impedance, 1000-10,000 Hz frequency response
+12 °C to +40 °C
Meets industrial standards for hand-held equipment (Section 8.4.2 of UL 61010-1 2nd edition)
Ordering Information
Description
Shipping Weight kg (lbs)
VS Wireless Remote Controller
0.5 (1.0)
VS Wireless Remote Control Base Unit Kit (field installed).
Also available as a factory installed option on VS leak detectors - order Option 102
0.5 (1.0)
8
Part Number
G8600-60002
G8600-68001
LEAK DETECTION
► Leak Test Data Wizard for VS Series Leak Detectors
Capturing and analyzing leak test data are increasingly critical
to the leak test process. Aggressive manufacturing yield and
efficiency targets, demanding quality control procedures, and
ISO and regulatory compliance requirements have created
a need for a capable, user-friendly data management tool.
To meet this need, Agilent has designed the Leak Test Data
Wizard, a comprehensive data management software package
for use with our VS Series mass spectrometer leak detectors.
The Leak Test Data Wizard is a flexible PC based, graphic-rich
tool that makes full use of the data from the VS leak detector
to customize automation of basic leak test processes,
assuring testing uniformity over time or between operators.
Messages can be created that guide your operators step-bystep through your testing process. Once a specific test is
developed for a particular part or system, it can be saved and
recalled for future use. Results from leak tests are graphically
displayed in easy to read formats to provide individual part
test histories, or to clearly identify trends in high volume test
applications. All this can be accomplished without costly third
party support.
Features
Benefits
• Data recording and plotting mode
•Stores and plots leak rate vs. time and pressure
vs. time data for analysis
•Basic automation of a leak testing process without the need
for third party support
•Custom messages guide operator through
step-by-step process
• Identify bad parts early in the testing cycle
•Allows access to previous test set-ups
• Clearly track trends during the testing process
• Multiple parts testing mode
• Four reject set points with custom messaging capability
Leak
Detection
•Background test set-up function
•Leak test library
•Graphical display of test results in easy to read formats Ordering Information
Description
Leak Test Data Wizard
Shipping Weight kg (lbs)
0.2 (0.5)
9
Part Number
VSLTDW
AGILENT LEAK DETECTION INSTRUMENTS
► Agilent Harsh Environment Probe for Helium Leak Detection
Equipment damage due to corrosion or water in the leak
detector or roughing pump is eliminated. The Agilent HE
Probe is able to withstand water, amines (ammonia
derivatives), and operate at temperatures up to 95 °C (200 °F).
The probe is connected directly to a VS Leak Detector with no
additional water trapping or auxiliary pumping required.
The probe consists of a corrosion resistant 316L stainless
steel tube with a composite permeable membrane at its tip.
The membrane readily permeates helium tracer gas while
protecting the leak detector from water vapor and chemicals
that would destroy the pumps, valves, and spectrometer.
When the HE Probe is used in conjunction with an Agilent VS
Leak Detector equipped with a wireless remote, the
manpower needed for a leak test can be cut in half. A single
operator can spray helium remotely from the location where
the detector is sampling gas, yet can still monitor the
instrument’s response.
Power generation facilities, chemical plants and similar
facilities require a leak detector to sample gas that is
primarily water vapor (steam) and/or contains chemicals that
would damage the detector. To prevent this damage from
happening, Agilent has developed a specialized probe and
leak detector configuration tailored to the demanding
requirements of these applications.
The VS Harsh Environment (HE) Probe is designed to
withstand the wet environment and high temperatures inside
condenser piping without the need for dryers, chillers, a
secondary vacuum pump, or throttling valves. The probe can
either be held or installed in the exhaust of a pump on the
condenser system, or can be flange-mounted directly into the
piping of the system under test. The probe is connected to
the flange via an adjustable compression fitting so the probe
tip can be positioned in the center of the pipe. This
guarantees the probe tip is in the maximum helium flow for
the best sensitivity.
Applications
• Power generation
• Chemical plants
• Process gas piping
10
LEAK DETECTION
Features
Benefits
• Permeable membrane technology
•Prevents water and chemicals from contaminating and damaging
the leak detector
• Faster response time and better sensitivity
•Withstands hot, wet, corrosive environments
•Simple system connection.
No maintenance or adjustments
•Less expensive than dryers and repeated
purchases of sacrificial pumps
•Can be inserted directly into the center of the pipe
• Extremely durable
• Easy to use
• Economical
Technical Specifications
Operating temperature range
Storage temperature range
Operating vacuum pressure
Maximum internal overpressure
Probe length
Weight of probe assembly
Hose fitting size
Vacuum flanges
Adaptor flange o-ring Chemical resistance
+10 °C (+50 °F) to +95 °C (+200 °F)
–18 °C (0 °F) to +65 °C (+150 °F)
Atmospheric pressure to low vacuum 1μ Hg, <1-3 mbar/Torr, 1-1 Pa
1 Bar, (14.7 PSI), (105 Pa)
450 mm (17.7”) Hose High density polyethylene, 5 meters (16.4’) long
0.5 kilogram (1 pound)
½” (12.7 mm) SwagelokTM compression or equivalent
ISO KF25
Butyl rubber, Parker B2-016 or equivalent
Probe resists virtually all chemicals except complex halogenated compounds
Ordering Information
Shipping Weight kg (lbs)
2.0 (5.0)
Part Number
Order option #106
Leak
Detection
Description
Harsh Environment (HE) Probe
11
VS SERIES FEATURES AND BENEFITS
Easy-to-Use – Two Button Operation
VS Series Leak Detectors combine the simplicity of two-button operation
with advanced expert system intelligence.
• Fully automated start-up and calibration maximizes productivity
• Intuitive menu structure is easy to navigate
• Programmable test sequences improves testing efficiency
• Color touch screen provides excellent clarity, even at wide angles
Powerful – Broad Range of Test Methods
The state-of-the-art spectrometer and vacuum system design provides powerful capability,
enabling a broad range of test methods for specific applications.
• High test port pressure allows for detection of large leaks
• 5 x 10-12 MDL (sensitivity) meets the most stringent leak test requirements
• High helium pumping speed ensures fast system response and clean-up times
• New high efficiency ion source and beam optics optimize sensitivity and mass separation
Versatile – Multiple System Configurations
A wide range of options allows for broad configuration flexibility, meeting all application
requirements and test environments.
• Primary pump and system mounting options may be selected to best suit your needs
• Multiple language and units capability permits easy implementation worldwide
• Compact lightweight design enables easy transport from one application to another
Dependable – Robust Design
Robust design innovations allow the VS series to conform to the most rigorous industrial standards
and operate dependably in the most challenging environments.
• Fast clean-up time enhances system up-time
• Robust Faraday cup technology delivers proven reliability with low cost of ownership
• Conforms to CE, UL and CSA standards, assuring global acceptance
Truly Portable – Wireless Remote Control/Display
Hand-held remote performs essential functions up to 100 meters (328 feet) indoors,
facilitating access to all leak sites.
• Eliminates cumbersome cables while extending range
• Allows testing of large systems by a single operator
• Leak detector can be located outside cleanroom to prevent contamination
• Multiple channels for use of one remote with up to ten leak detectors
12
LEAK DETECTION
VS SERIES APPLICATIONS
Industrial Process Tools
VS Series Leak Detectors can help rid your process tool of costly and inefficient leaks. Robust system
features assure reliable operation in the most challenging industrial environments. Superior pumping
characteristics such as high inlet pressure tolerance and split flow capability deliver fast response and
clean-up times. Wireless remote control enables single-person leak testing of even the largest systems.
• Vacuum furnaces • Coating systems • Electronic beam welders
Power Generation
Leaks within power plant condensers can cause a significant loss of efficiency. High inlet pressure
tolerance, auto-zero function, and mobility of the two-wheel cart option simplify the leak detection
process. Simple, intuitive operation allows intermittent use without excessive training requirements.
Wireless remote control with an operating range of 100 meters (328 feet) provides true hand-held
portability, enabling leak testing by a single operator. See page 8.
Power generation facilities, chemical plants and similar facilities require a leak detector to sample gas
that is primarily water vapor (steam) and/or contains chemicals that would damage the detector.
To prevent this damage from happening, Agilent has developed a specialized probe and leak detector
configuration tailored to the demanding requirements of these applications. See page 10.
• Condensers • H
eat exchangers • Steam circuits
Semiconductor Production
VS Series Leak Detectors combine high sensitivity and large, dry rough pumping capacity to meet the
testing needs of semiconductor processing equipment and gas handling systems. With the high inlet
pressure tolerance and fast clean up and response times, these units excel at locating leaks in both
evacuated and pressurized systems. A clean room technician can use the hand-held wireless remote
control while the leak detector remains installed in a less critical area.
• Process tools • Gas panels • Gas transfer lines
Small Parts Manufacturing
VS Series Leak Detectors employ high inlet pumping speed and high inlet pressure tolerance to minimize
test cycle time, thereby maximizing production throughput. Programmable test sequences simplify daily
operation, minimize operator error, and maximize your production efficiency. Optional “Leak Test Data
Wizard” software can be used to collect data for quality control purposes and even automate test cycles.
• Automotive • E lectrical • Refrigeration • Hermetic packaging • Medical & Implantable devices
General R&D
Research and university labs often require a portable leak detector with the versatility to cover a wide
range of applications. The ability to be easily moved from lab to lab, in conjunction with high
performance specifications in both the evacuation and pressurized mode, make the VS Series an
essential tool for this environment.
• Electron microscopes • Experimental chambers • Surface analytical systems • Space chambers
13
Leak
Detection
High Energy Physics
High sensitivity, large roughing capacity and portability are essential for leak
testing accelerators and beam lines. These instruments provide excellent mass
separation that differentiates the smallest helium leaks from residual water vapor
and hydrogen, and are available with large, dry roughing pumps to evacuate large
volumes, or smaller internal pumps when used with turbo pumping systems.
Wireless remote control with an operating range of 100 meters (328 feet) enables a single operator to check
potential leak sites without a cord of any kind.
• Accelerators • Beam lines • Synchrotrons
AGILENT LEAK DETECTION INSTRUMENTS
► Agilent VS C15 Component Leak Detector
140.0
(5.75 5
)
Optional Display
2
259.2
)
(10.21
339
.2
(13.3 2
6)
403.86
(15.59
)
66.6
0
(2.62
)
247.12
(9.73)
UL/CSA, CE Approved
The VS C15 Component Leak Detector is a simple solution
to the complex task of leak detection integration.
• Compact housing minimizes space requirements –
everything needed to do the job is located within one box.
Over 50% reduction in space when compared to competitive
systems
• Simplified interface with only two cables required, one for
power, one for communications
• Does not require mounting modules or bulky, expensive
interconnecting cables that are found standard in most leak
detection systems today
• Most comprehensive array of interface options, including
serial, discrete I/O and Profinet. Other interface options
to be made available when required.
Dimensions: millimeters (inches)
• Optional color touch screen display allows access to system
status information and all operating parameters
• Critical leak detector components are safely housed
in a single enclosure protecting them from the industrial
environment
• Selectable sensitivity scales and a Contra-Flow vacuum
design ensures fast, accurate measurements while
maximizing protection from contamination in industrial
applications
• Calibrated leak (10-7 range) included
• Widest operating temperature range, suitable for warm
factory environments.
Technical Specifications
Minimum detectable leak
5 x 10-10 atm cc/sec; 5 x 10-10 mbar l/s; 5 x 10-11 Pa m3/sec
Selectable sensitivity ranges4 working ranges covering 1 x 10-3 to 1 x 10-9 atm cc/sec
Maximum test port pressure
5 Torr, 7 mbar, 667 Pa
Calibration routineAutomated or manual (internal or external)
Background suppressionAuto zero, and auto zero < zero function
Display interface (optional)
High clarity TFT color touch screen
Display – Selectable languages
English, French, German, Spanish, Japanese, Korean, Mandarin
Set points
5 set points: 4 leak rate and/or pressure, 1 audio
Analog output
0-10 V, log 1 V/decade & 2 V/decade and linear (DB-9F)
Serial interfaceRS-232 isolated interface @9600 baud (DB-9M)
Discrete I/OOptically isolated, 5-24 VDC outputs and inputs (DB-25S)
Networking interface (optional)
Profinet I/O option (RJ45)
Power input
24 VDC: ±5%; Max current: 4 A (Molex 03-12-1036)
Operating temperature
5 to 48 °C
14
LEAK DETECTION
Ordering Information
Description
VS C15 base unit
Shipping Weight kg (lbs)
9.0 (19.8)
Part Number
G8603A
3.5 (7.8)
0.2 (0.5)
0.8 (1.7)
0.5 (1.0)
0.5 (1.0)
0.5 (1.0)
0.5 (1.0)
0.2 (0.5)
0.2 (0.5)
–
0.5 (1.0)
VSC15DU
VSCDUC10
VSC15PS
VSCBUPC8
L9090301
L9090305
L9090306
VSCCTC10
VSCCTC25
G8603A#300
VSCFLDPN
Options and accessories
Display and display cable – 10 ft.
Display cable – 10 ft.
24 V external power supply
Power cord for power supply – 8 ft.
ConvecTorr gauge – ⅛ in. NPT
ConvecTorr gauge – NW 16 KF
ConvecTorr gauge – NW 25 KF
Remote gauge cable – 10 ft.
Remote Gauge Cable – 25 ft.
Profinet interface card – factory installed
Profinet interface card – field installed
For information on Support Plans, refer to page 28.
For information on leak detector options and accessories, refer to page 23 through 27.
Leak
Detection
For information on roughing pumps, refer to page 22.
15
AGILENT LEAK DETECTION INSTRUMENTS
► Agilent 959
254
(10)
508
(20)
396
(15.6)
on 2-Wheel Cart
The 959 MacroTorr Helium Leak Detector fulfills the need for a
rugged and dependable leak detector in the most demanding
industrial applications. With its low price and cost of
ownership, this unit is the most cost effective leak detector
available. It is available in stand-alone, bench-top, and twowheel cart configurations. We have designed these units with
large externally-mounted primary pumps that deliver high
roughing speeds for fast pump down times. The bench-top and
cart-mounted versions are available with Agilent DS 302 rotary
vane pumps or TriScroll 320 dry pumps.
• External mounting of large primary pumps results
in fast pump down cycles
• High test port pressure tolerance reduces time required
to reach test mode
• Available in wet and dry versions, on two- or four-wheel
carts, or bench-top
• Simple, rugged design provides the cost effective solution
for many applications
Dimensions: millimeters (inches)
Technical Specifications
Sensitivity ranges Minimum detectable leak at 1000 ppm ambient helium
Maximum test port pressure
High vacuum pump
Primary pump type
Rotary vane pump
Dry scroll pump
Inlet flange
Calibration routine
Background suppression
Leak indication
Leak units displayed Ranging
Analog leak rate output (plug)
Audio alarm Electronic response time Recommended ambient operating temperature
Power requirements
Weight, base unit 10-4 thru 10-8 atm cc/sec
2 x 10-9 atm cc/sec helium
1 Torr
V70D MacroTorr turbo/drag pump
DS 302
TS 320
NW-25 (optional 1 ⅛" compression adapter)
Manual
Manual
50 segment bar graph w/exponent display
Atmospheric cc/sec.
Manual
Phone jack, 0-5 VDC
Threshold and volume control (103 dBA maximum @ 1 ft.) and
output jack for remote speaker
2 seconds
5 to 35 °C
115 V or 230 V, 50/60 Hz (15/20 amps)
22.7 kg (50 lbs)
16
LEAK DETECTION
Ordering Information
Part Number
Configuration
Base
x = Mounting
x = Sensitivity
Stand-Alone (Pumps not Included)*
S9590000xxxxx
• 0 (None supplied)
Single Rotary Vane Pump
L9593000xxxxx
• B = Bench
DS-302
• T = Two-wheel
• M = Standard Sensitivity
Single Dry Scroll Pump
D9593500xxxxx
• B = Bench
TS-320
• T = Two-wheel
Description
Accessories and Options
Sniffer probe, NW25, 10’ hose
Sniffer probe, NW25, 25’ hose
Calibrated leak, external, NW25, 10-7 range (NIST-traceable)
Calibrated leak, external, NW25, 10-8 range (NIST-traceable)
Tuning leak/throttle valve, NW25
Spectrometer tube cleaning kit
Replacement Parts
O-ring kit
Ion Source, thoriated iridium Preamplifier, MacroTorr
xxx = Voltage
• 120
• 220
Shipping Weight kg (lbs)
Part Number
1.8 (4)
1.8 (4)
1.8 (4)
1.8 (4)
2.3 (5)
1.4 (3)
K9565306
K9565307
F8473321
F8473322
R1947301
670029096
0.9 (2)
0.1 (0.2)
0.5 (1)
L6930301
82850302
L9030301
* 959 sensitivity is influenced by the speed of the system’s primary pump. The above specifications are obtained with a nominal 10 cfm
displacement pump.
For information on Support Plans, refer to page 28.
For information on pump options, refer to page 22.
Leak
Detection
For information on additional accessories and options, refer to pages 23 through 27.
17
AGILENT LEAK DETECTION INSTRUMENTS
136 (5.35)
► Agilent PHD-4
170,5 (6.71)
16,9 (0.66)
291 (11.45)
Dimensions: millimeters (inches)
The PHD-4 is a portable, compact leak detector that runs on
its own battery for up to four hours. Weighing only 2.6 kg
(5.7 lbs) including the battery, it can be taken anywhere.
The PHD-4 detects very small leaks in objects that have a
slight helium/air pressure inside. It is sensitive to helium
concentrations as small as 2 parts per million which
equivalent to a leak rate of 5 x 10-6 atm-cc/sec. This level of
sensitivity is far superior to the performance of other means
of detecting leaks such as bubble testing. To accomplish this
it relies on Agilent’s proprietary and patented Selective Ion
Pump Detection (SIPD) technology.
Controlled by a microprocessor, the PHD-4 is easy to use
with no training required. All tuning and zeroing are handled
automatically. The display can be set to use any of four
languages – English, French, German, and Italian.
The basic PHD-4 package includes:
• PHD-4 basic module
• Transformer/battery charger (115 V-240 V)
• Carrying strap
• 15-pin I/O connector
• Instruction manual on CD-ROM
The complete PHD-4 package includes everything in the basic
package plus:
• Spare battery
• Travel case
• Probe set
The PHD-4 replacement kit includes:
• Sampling pump with fittings
• Probe with sampling line
• Probe tip filter
• Internal filter kit (5 units)
Technical Specifications
Lowest detectable helium concentration
Lowest detectable helium leak
Response time
Recovery time
Start up time, including self check-up
Electrical supply
Battery operation time
Maximum signal drift
Operating conditions
Storage conditions
Compliance to norms
2 ppm (parts per million)
5 x 10-6 mbar l/s 5 x 10-6 atm cc/s
5 x 10-7 Pa m3/s
< 2 sec
<10 sec (from 50 ppm to 0 ppm)
3 min approx.
• Rechargeable battery included
• Power supply included
110-240 V 50-60 Hz
4 hours
10 ppm/10 min
Temperature: +5 °C to +35 °C Humidity: 90% maximum relative humidity
Temperature: -20 °C to +60 °C
Weight: 2,6 kg (5.7 lbs)
CE, CSA/US approved
18
LEAK DETECTION
Ordering Information
Part Number
9694640
PHD-4 Basic Package
Includes
•PHD-4 basic unit
•Transformer/Battery charger (110-240 V)
•Carrying strap
•15-pin I/O connector
•CD Instruction manual
Part Number
9694600
PHD-4 Replacement Part Kit
Includes
•Sampling pump with fittings
•Probe with sampling line
•Tip probe filter
•Internal filter (kit of 5 units)
Part Number
9694660
Accessories
Part Number
•Probe set
9693515
•Capillary leak with refillable reservoir and gauge
9693540
•Probe with 10 meter (30’) maximum sampling line 9693525
•Telescoping extension probe
9693520
Individual Replacement Parts
•Spare battery
•Power supply (110-240 V)
•Sampling pump with fittings
•Probe with sampling line
•Tip probe filter
•Internal filter (kit of 5 units)
•Carrying strap
•15-pin I/O connector
•Travel Case (metal)
•Protective Bag (canvas)
Part Number
SR03702609
SR03702888
SR03702513
SR03702538
SR2890001201
SR03702959
SR03702791
SR03702894
SR03702890
VSPHD4BAG
Contact Agilent for Rack mounting or specific application
requirements.
Leak
Detection
PHD-4 Complete Package
Travel Case includes
•PHD-4 basic unit
•Spare battery
•Transformer/Battery charger (110-240 V)
•Carrying strap
•Probe set
•15-pin I/O connector
•CD Instruction manual
19
PHD-4 FEATURES AND BENEFITS
High Sensitivity to Helium – Can detect very small leaks
• High Sensitivity (2 ppm) to helium, three orders of magnitude better than industry standard, due to SIPD
(proprietary and patented Selective Ion Pump Detection)
• Excellent selectivity for helium allows you to read helium leaks and ignore all other gases
• Helium sensitivity can be adjusted as required to minimize test costs and helium consumption
• Autozero function allows leak detection even in high helium background environment
Easy to Use – No training required
• State-of-the-art microprocessor control allows great simplicity of operation
• Fully automatic start-up
• Ready for test in less than 3 minutes
• Intuitive touch screen display
• Visual and audio indicators (standard headphone connection)
• No tuning required
Truly Portable – Compact and light
• The PHD-4 weighs only 2.6 kg (5.7 lbs) including the battery
• Its compact size allows it to be easily carried anywhere
• Its ergonomic design allows comfortable use for extended periods
Versatile – Suitable for many different applications
• Wide range of uses: replaces or can be used with existing methods such as bubble test or pressure decay
• Able to detect both very small and large leaks
• Can operate either on battery power or connected to an outlet
• Displayed messages can be viewed in several languages (English, French, German, Italian).
• Standard Analog and RS232 Serial output.
Dependable – Long term operation
• Automatic backflow valve prevents helium saturation ensuring fast response times, as well as long life
of sensing element.
• CE, CSA/US approved for global standardization.
20
LEAK DETECTION
PHD-4 APPLICATIONS
Large Vessels and Bioreactors
The PHD-4 offers unmatched accuracy and repeatability, presenting a unique solution that
it is cost effective and very well suited for the leak range specifications of this application.
Biotech and pharmaceutical industries used to rely on pressure decay and bubble test
methods for finding leaks in their large bioreactors. The PHD-4 has established a new
standard of quality, significantly increasing production yields.
• Fermenters
• Sterilizers
• Freeze Dryers
Underground Pipes and Storage Tanks
The portability and light weight of the PHD-4 plays a major role in this application.
Underground pipes and storage tanks (UST) are slightly pressurized with helium which, due
to its high mobility, can escape through small leaks and migrate to the surface, where it
can be easily detected by the PHD-4.
The accuracy, portability and light weight of this unit greatly simplifies this process,
particularly in difficult construction sites or rough terrain.
• Gas distribution lines
• Under and above ground containers and storage tanks
• Telecommunication and high voltage underground cables
Airplane Fuel Tanks and Lines
PHD-4 technology is approved worldwide by airplane manufacturers and operators as the
standard for the location of leaks in aircraft fuel tanks and in oxygen distribution lines.
Agilent works with an exclusive distributor for aircraft applications. Please contact your
local Agilent office for more information.
• Fuel tanks
• Oxygen distribution lines
He
Leak
Part to be tested
Other Applications
The PHD-4 is in daily use in many other applications. Its portability makes it ideal for factory
and field maintenance. Here is a partial list of other applications:
• Components and systems for the Chemical and Petrochemical Industries
• Compressed air components and delivery systems
• Process gas delivery lines in Semiconductor fabrication industry
21
Leak
Detection
Courtesy of Fraunhofer UMSICHT,
Germany
Water Heating and Cooling Pipes
The PHD-4 allows leak location without interruption of the normal operation, by mixing
helium with the water in the circuit. Until recently, the precise and rapid location of leaks in
buried pipes has been very difficult.
In the event of a leak, helium desorbs from the fluid and diffuses to the surface, where it is
easily detected. Leaks in pipeline systems such as district heating systems, drinking or
chilled water systems and steam pipe networks incur high costs due to losses and
corrosion damage.
• Heater exchangers and steam condensation lines
• Water pipes
• Radiant heating systems
AGILENT PUMPS DESIGNED FOR LEAK DETECTION
Agilent has the advantage of being a designer and
manufacturer of both vacuum pumps and leak detectors.
This gives us the proper insight for designing pumps that are
perfectly suited for use in leak detection applications.
Rotary Vane Pump – Outline Drawing
B
DS Series Rotary Vane Pumps
Leak detectors require pumps with the ability to quickly pump
out the test piece while efficiently pumping and expelling
helium from the system. Failure to do so limits leak detector
performance. DS series pumps fulfill all the rigorous
requirements of use in leak detection while delivering quiet,
cool-running and dependable performance. DS Series Pumps:
• provide excellent helium pumping characteristics for stable
leak rate signals
• employ forced oil-feed to remain cool even when pumping
large volumes
• feature an anti-suck back valve to prevent migration of
pump oil toward the leak detector
For technical information on rotary vane pumps, refer to
Agilent‘s Dual Stage Rotary Vane Pump catalog.
C
Pump
DS 42
DS 302
A
Pump Speed
A (length)
60 Hz 1.2 cfm
309 (12.0)
50 Hz 1.8 m3/hr
60 Hz 8.2 cfm
467 (18.4)
50 Hz 11.6 m3/hr
B (height)
192 (7.5)
C (width)
108 (4.2)
212 (8.3)
132 (5.2)
Dry Scroll Pumps – Outline Drawing
C
B
IDP-3
A
C
TriScroll and IDP Series Dry Scroll Pumps
For many applications, ”dry” pumping is essential. In the past,
dry pumps have had either low pumping speeds, poor base
pressure, or both. Agilent’s TriScroll series pumps have
revolutionized dry leak detection. With special design
considerations implemented specifically for helium mass
spectrometer leak detection, our dry pumps conform to
rigorous standards without the potential for contamination.
TriScroll pumps:
• provide high speeds for fast evacuation and cycle time
• deliver low base pressure for high sensitivity testing
• use no oil, avoiding contamination and oil disposal
• are optimized for helium pumping
For technical information on scroll pumps, refer to Agilent‘s
Dry Scroll Pump catalog.
B
IDP-15
A
C
B
TS 620
Pump
IDP-3
IDP-15
TS 620
MacroTorr Turbo and Turbo/drag pumps
The high vacuum pump in a mass spectrometer system is
critical to a well-designed leak detector. These pumps need to
deliver high pumping speed to keep the spectrometer tube at
low pressure, while offering the correct helium compression
ratios to allow for high sensitivity. In addition to offering all of
the appropriate pumping characteristics, Agilent’s patented
MacroTorr turbo and turbo/drag pumps require no periodic
maintenance.
• MacroTorr design provides high inlet pressure tolerance
• optimized helium compression ratio permits optimal
helium detection and fast signal clean-up
• permanently lubricated bearings need no maintenance
For technical information on turbo pumps, refer to Agilent’s
Turbo Pump catalog.
22
A
Pump Speed
60 Hz 2.1 cfm
50 Hz 3.0 m3/hr
60 Hz 9.1 cfm
50 Hz 5.4 m3/hr
60 Hz 17.7 cfm
50 Hz 25.2 m3/hr
A (length) B (height)
358 (14.09) 181 (7.13)7
C (width)
140 (5.50)
488 (19.20) 364 (14.33)7 340 (13.39)
471 (18.54) 355 (13.98)7 300 (11.80)
LEAK DETECTION
ACCESSORIES AND OPTIONS
Leak Detection Handbook*
The 135-page handbook, Introduction to Helium
Mass Spectrometer Leak Detection, is useful
for experts and novices. It covers leak detection
fundamentals, helium leak detector types,
equipment calibration, and product fixture
design. A wide variety of process-specific
application solution notes is also available.
Helium Spray Probe Kit
K0167301
For use in spraying helium to find the exact location of a leak.
Three nozzles are included: a hypodermic nozzle for
pinpointing leaks, a flexible tubing nozzle for hard-to-reach
areas, and a long, soft copper
nozzle that can be bent into
almost any configuration
to reach into deep crevices.
An easy operating spring handle
and 10 feet of hose with a female
fitting simplifies attachment
to the helium regulator.
* Available for download
Calibrated Helium Leaks
Agilent offers helium leaks traceable to NIST standards for
use in calibrating your leak detector. An NW25 or 1⅛" OD
tube fitting and isolation valve are provided as standard on
the external leaks. The 10-6/10-5 range reference helium leak
includes a pressure gauge and refill port for evacuation and
sniff test calibration.
External
Leak Detection Service Contracts
Agilent offers a full range of preventive maintenance and
comprehensive on-site support options for all of our leak
detectors. See page 28.
1⅛" Compression
NW25
Port
F8473325
F847332010-6/10-5 std cc/sec range refillable
sniffing/evacuation leak with
pressure gauge and KF25 adapter
F8473321
F8473301
10-7 std cc/sec range, with valve
F8473322
F8473302
10-8 std cc/sec range, with valve
F8473323
F8473303
10-9 std cc/sec range, with valve
F8473324
F8473304
10-10 std cc/sec range, with valve
Leak Test Data Wizard
The Leak Test Data Wizard is a comprehensive
data management software package for
use with our VS Series leak detectors.
It is a flexible PC based, graphic-rich
tool that makes full use of the data
from the VS leak detector to customize
automation of basic leak test
processes, assuring testing uniformity
over time or between operators.
Internal, ⅛" NPT Fitting (without valve)
K3264301
10-7 std cc/sec range
K3264302
10-8 std cc/sec range
Calibration
Calibration of existing leaks is done on an advance exchange
basis. To order the recalibration service, simply add “GG”
in front of the above part numbers.
VSLTDW
Leak
Detection
See page 9.
L8856301
Helium Lecture Bottle Kit
The Helium Lecture bottle provides a convenient supply
of helium for leak testing. Measuring only 14" long and
2½" diameter, the bottle will provide enough helium for a full
eight hours of leak testing at normal
flow rates. The kit includes a Helium
Lecture bottle containing 2 cubic feet of
helium at 1800 psi, a pressure and flow
regulator (P/N 642972175), and a
helium spray probe kit (P/N K0167301)
in one package.
23
ACCESSORIES AND OPTIONS
Training Programs
Training courses for leak detector operation and maintenance
are offered in regularly scheduled classes at our Palo Alto,
California or Lexington, Massachusetts facilities. On-site
training can also be provided at your plant. Contact your local
sales engineer or see the training and service sections of this
catalog.
Spectrometer Tube Cleaning Kit
670029096
Kit with pre-saturated wipes and swabs
This Cleaning Kit contains clean wipes pre-saturated
with Dow-Corning OS-20 solvent plus
cotton swabs for cleaning in small
holes or corners. The kit is adequate
for three spectrometer cleanings and
can also be used for a variety of other
vacuum applications.
See worldwide service and support on page 28.
See Leak Detector Training Programs on pages 28 and 29.
Test Port Adapters and Kits
L8741301
1⅛" Test Port to NW25 nipple adapter
L8741302
1⅛" Test Port to NW40 nipple adapter
KCP401125Adapter from NW40
to 1⅛" compression fitting
LDCOMPINADKITTest Port Adapter Kit,
to 1⅛"compression fitting
LDNW25INADKIT Test Port Adapter Kit, to NW25 fitting
PHD-4 Bag
VSPHD4BAG
Protective bag for PHD-4 portable sniffer
leak detector.
Throttle Valve, for 1⅛" Compression Port
626603345
The Agilent throttle valve is a manually operated, NW25
to 1⅛" tubulated variable conductance device used to
control the flow of gas to the leak detector. It is
frequently used in leak detector applications in
which a grossly leaking part or vacuum chamber
will not permit the leak detector to go into the
test mode. The throttle valve is a non-quantitative
approach to locating very large leaks in your vacuum
system.
Power Probe
K9565301
K9565302
K9565306
K9565307
K9565303
Power Probe with 1⅛" Test Port Adapter,
10' length
Power Probe with 1⅛" Test Port Adapter,
25' length
Power Probe with KF25 Flange, 10' length
Power Probe with KF25 Flange, 25' length
Spare Tip Filters (10 each)
The Power Probe is a “sniffer” probe designed to locate leaks
emanating from sealed containers internally
pressurized with helium. The Power Probe
adjusts for varying sensitivity and
response time. It is extremely rugged
and can be easily disassembled for
cleaning.
The probe kit includes 5 tip filters and
is available with 10 or 25 feet of
connecting tubing and an inlet adapter to fit
on the leak detector. It is ideal for fast response
sniffing
with MacroTorr pumped leak detectors.
24
Tuning Leak, for 1⅛" Compression Port
The Tuning Leak consists of a ten-segment
calibrated needle valve which can be used
as an aid to gross leak testing or for gross
leak calibration. The Tuning Leak can be
used with any Agilent Leak Detector and can
also provide an indication of background
helium in the testing area.
K1608301
Throttle/Tuning Leak Valve
with NW25 Fitting
For leak detectors with an NW25 inlet, the tuning
leak and throttle valves have been combined into
one product. This valve performs the same
functions as the two described above.
R1947301
LEAK DETECTION
Universal Test Fixture Option (Flapper Box)
L6241301
L6241305
L6241306
Probe with 10 m (30’) Sampling Line, PHD-4
9693525
For applications in which the length of the standard probe is
not adequate, a probe extension is available. It has a
maximum length of 10 m, but may be cut to shorter lengths.
947/948 Series, 1⅛" Compression Port
VS/979 Series, 1⅛" Compression Port
VS/979 Series, NW25
This leak detector option makes leak
testing of small parts almost totally
automatic and very fast. With this
option, the total time to test a typical
integrated circuit or other small device
is less than six seconds. The fixture is
clamshell-shaped with tapered walls
and a spring-loaded lid. The fixture can
be used with the Automatic Sequencer feature in Models
947/948/960 or 979 in order to fully automate and quicken
the test cycle. Size: 4" ID x 1" deep. An insert is supplied to
reduce the size to 3.25" ID, tapered to 2.83" x ¾" deep.
9693515
Leak
Detection
Probe Set, PHD-4
This set consists of three different probe
tips that can replace the standard tip for
specific applications. One tip has a
smaller diameter for more precise
leak location. A second is more
flexible, for easy access to difficult
areas, and a third
is for general use.
Telescoping Extension Probe, PHD-4
9693520
This probe assists the operator when additional rigid length is
required, as when checking underground
objects, or objects beyond arms length.
The tip has a small funnel to better convey
helium to the probe.
25
ACCESSORIES AND SPARE PARTS
Ordering Information
Description
Part Number
VS
979
959
•
•
•
•
•
•
•
•
•
•
Calibrated Leaks
External calibrated helium leak, 1⅛” comp., 10-7 atm cc/sec
External calibrated helium leak, 1⅛” comp., 10-8 atm cc/sec
External calibrated helium leak, 1⅛” comp.,10-9 atm cc/sec
External calibrated helium leak, 1⅛” comp., 10-10 atm cc/sec
External calibrated helium refillable leak, 1⅛” comp., 10-6/10-5 std cc/sec
External calibrated helium leak, NW25, 10-7 atm cc/sec
External calibrated helium leak, NW25, 10-8 atm cc/sec
External calibrated helium leak, NW25, 10-9 atm cc/sec
External calibrated helium leak, NW25, 10-10 atm cc/sec
External calibrated helium refillable leak, NW25, 10-6/10-5 atm cc/sec
Internal calibrated leak, 10-7 atm cc/sec range
Internal calibrated leak, 10-8 atm cc/sec range
F8473301
F8473302
F8473303
F8473304
F8473320
F8473321
F8473322
F8473323
F8473324
F8473325
K3264301
K3264302
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
Ion Sources
Ion source, tungsten (new)
Ion source, thoriated iridium (new)
82850301
82850302
•
•
•
•
Miscellaneous
Spectrometer tube cleaning kit
Elite Z Rotary Vane Pump oil, 1L
Helium lecture bottle with regulator and spray probe kit
670029096
695409005
L8856301
•
•
•
•
•
•
O-Ring Kits
O-Ring kit for 959 DP
O-Ring kit for 959 Turbo
O-Ring kit for 979
L6749301
L6930301
R0491301
Preamplifiers
Preamplifier assembly, 959 (Turbo)
Preamplifier assembly, 979 standard sensitivity and 959 (MacroTorr)
Preamplifier assembly, 979 high sensitivity
K3333301
L9030301
R1003301
Probes
Power probe sniff accessory, 1⅛” fitting, 10’
Power probe sniff accessory, 1⅛” fitting, 25’
Power probe sniff accessory, NW25 fitting, 10’
Power probe sniff accessory, NW25 fitting, 25’
Tip filters for power probe sniffer (10 each)
Helium spray probe (order regulator separately)
K9565301
K9565302
K9565306
K9565307
K9565303
K0167301
•
•
•
•
•
•
Test Port Kits
Test port conversion kit, 1⅛” test port to NW25
Test port conversion kit, 1⅛” test port to NW40 Test port adapter kit, 1⅛ compression fitting
Test port adapter kit, NW25 fitting
•
•
•
•
•
•
L8741301
L8741302
LDCOMPINADKIT
LDNW25INADKIT
Throttle Valves and Tuning Leaks
Throttle valve, 1⅛” compression Port
Tuning Leak, 1⅛” compression Port
Throttle/Tuning Leak Valve, NW25 Fitting
626603345
K1608301
R1947301
26
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
LEAK DETECTION
Ordering Information
Description
Part Number
VS Series Accessories and Replacement Parts (Field Replaceable)
Tip Seal kit, IPD-3 Dry Scroll Pump
Tip Seal kit, IDP-15 Dry Scroll Pump
Oil mist eliminator for internal DS 42
Internal calibrated Leak
1⅛” compression test port
Maintenance kit, Diaphragm Pump
Filament kit
Hot Ion Source (including filament)
O-Ring kit for VS Series
IDP3TS
X3815-67000
VSFLDME
VSFLDCL
VSFLDCP
VSFLDDP
VSFLDHFR
VSFLDHIS
VSFLDOV
PHD-4 Accessories
Probe set
Telescoping extension probe
Probe with 10 m (30’) sampling line
Capillary leak with refillable reservoir
9693515
9693520
9693525
9693540
Leak
Detection
Support of older leak detector models may be limited by availability of component parts and spares.
Please contact our technical support staff for further information.
Ask about opportunities to upgrade to a new, state-of-the-art VS Leak Detector.
27
AGILENT GLOBAL SUPPORT NETWORK
Our Customer Service mandate is to provide you
with the level of support necessary to increase your
productivity, maximize your system uptime, and
achieve the highest possible return
on your investment.
Application Consulting
Your initial introduction to the Agilent Global
Support Network begins when our field
engineers assist you in evaluating your
requirements to determine the
leak detection solution best suited
to your application.
Application
Consulting
Trade-Up Program
Offers trade-in opportunities of your older units toward
the purchase of a new VS Leak Detector – maximizes
return on investment.
Trade Up
Program
AGILENT
ADVANTAGE
Field &
Factory
Support
Field & Factory Support
In order to maximize your system uptime and
extend the value of your investment, we offer
a complete range of support programs that
meet all your needs.
Agilent
Service
Guarantee
Agilent Service Guarantee
Agilent’s service guarantee means that
if we can’t fix it, we’ll replace it. No other
company offers this level of commitment to
keeping you up and running at peak efficiency.
28
LEAK DETECTION
Onsite Integration Support
When its time to install your new equipment,
your local engineer will provide hands-on integration
and training assistance.
Onsite
Integration
Support
Ongoing
Technical
Support
Ongoing Technical Support
When you are a member of the Agilent Global Support
Network, support is for the life of your instrument.
We provide toll-free technical support, application analysis
and rapid problem resolution.
MAXIMIZING YOUR
PRODUCTIVITY AND
SYSTEM UPTIME
Leak
Detection
Agilent
Certified
Parts
Leak Detection
Technology
and Methods
Training
Leak Detection Technology and Methods Training
Comprehensive classes in Leak Rate Test & Measurement
and Leak Detector Maintenance provide in-depth and handson instruction to allow you to get optimal use of your
equipment.
Agilent Certified Parts
Repairs and maintenance are performed by factory-trained
field engineers using Agilent certified parts. This protects the
quality, reliability, and performance of your leak detector.
Learn more: www.agilent.com/chem/leakdetection
29
TRAINING
Leak Rate Test & Measurement
Course Outline
Stand Alone (LRTM-SA) 2 Days
Basic Vacuum Practice is the required prerequisite and
scheduled to immediately precede LRTM-BC.
Day 1
• Introduction to Leak Detection
• Vacuum Fundamentals for Leak Detection
• Introduction to Rough Vacuum Systems
• Introduction to High Vacuum Systems
• Helium Leak Detector Fundamentals
• Demo LAB: Tuning, zeroing, and calibration
Course Description
Leak Rate Test and Measurement provides a comprehensive
introduction to production testing of parts against leak-rate
specifications, and measuring and locating leaks in
pressurized systems/components, using popular Helium
Mass Spectrometer Leak Detectors (HMSLDs) and various
application test fixtures.
The 2-Day Stand-Alone course presents principles of operation
of the spectrometer and underlying vacuum fundamentals in a
classroom setting. Operation, tuning, and calibration of the
leak detector are covered in practical demonstration/
laboratory sessions. Leak testing methods designed to solve
various problems are discussed and demonstrated.
The 1-Day Companion course builds on the vacuum and
Helium Mass Spectrometer Leak Detector (HMSLD)
fundamentals learned in BVP, and provides an introduction to
production testing of parts against leak-rate specifications,
and measuring and locating leaks in pressurized systems/
components, using an HMSLD. Leak testing methods
designed to solve various problems are discussed and
demonstrated.
Day 2
• HMSLD performance considerations
• Leak-Rate Specification Conversions
• Locating Leaks
• Measuring Leak Rate
• Demo LAB: Measure leak rates
• Application-Specific Leak-Rate Testing examples
– Hermetically sealed parts
– Pressurized parts: accumulation method
– Pre-pressurized parts in large vacuum chamber
– Parts with pressure-differential intolerance
– Small part/high sensitivity
– Long narrow tubes
– Process gas
– Components and systems
Course Outline - BVP-Companion (LRTM-BC) 1 Day
Basic Vacuum Practice is the required prerequisite and
scheduled to immediately precede LRTM-BC.
• Introduction to Leak Detection
• Leak-Rate Specification Conversions
• Locating Leaks
– Demo LAB: Find leaks in evacuated & pressurized parts
• Measuring Leak Rate
– Demo LAB: – Measure leak rates
• Application-Specific Leak-Rate Testing examples
– Hermetically sealed parts
– Pressurized parts: accumulation method (joints/welds/
crimps, AC lines, brake lines, valves)
– Pre-pressurized parts in large vacuum chamber
(compressor, heater core, wheel, gas tank,
transmission, torque converter)
– Parts with pressure-differential intolerance (gas tanks,
gas caps, filler necks)
– Small part/high sensitivity
– Long narrow tubes
– Process gas components and systems
Who Should Attend?
Engineers and operators who are responsible for quality
control of production parts and assemblies. Also, technicians
responsible for the maintenance of pressurized and evacuated
systems such as those found in power generation facilities,
process gas delivery, and refrigeration, etc
Course Goals and Objectives
After completing this course, participants will be able to:
• Identify advantages and disadvantages of various leak
testing methods
• Describe rate-leak specifications and helium conversions.
• Select, setup, and perform the proper leak test technique
for a given application
Students who take the 2-Day Stand-alone course will be able to:
• Explain vacuum fundamentals and concepts essential
to the operation of an HMSLD
• Describe principles of operation of a mass spectrometer
• Properly operate, tune, and calibrate an HMSLD
30
LEAK DETECTION
Leak Detector Maintenance (LDM)
3 Days
Course Outline
Day 1
• Introduction to Leak Detection
• Overview of Vacuum for Leak Detectors
• Introduction to Rough Vacuum Systems
– Hands-On LAB: Roughing pump-down
• Introduction to High Vacuum Systems
• Leak Detector Fundamentals
– Hands-On LAB: ID system components
Day 2
• Operation of the Leak Detector
• Spectrometer Tuning, Zeroing, and Calibration
• Spectrometer Maintenance Procedures
– Hands-On LAB: Clean spectrometer and replace
Ion source
• System Electronics
– Hands-On LAB: ID components and verify test point data
• Gauge Maintenance
– Hands-On LAB: Calibrate test port and system gauge
Course Description
This course provides participants with the ability to perform
routine maintenance and troubleshooting procedures
on supported Agilent Leak Detectors. Scheduled training is
available for the following Agilent models: 959, 979, and VS.
Training for other Agilent LD models is available through our
On-Site Training program. This course begins with an
introduction to leak detection and vacuum fundamentals
then moves on to cover the principles of operation of the
spectrometer and the underlying vacuum system in a
classroom setting. Operation, tuning, and calibration of the
leak detector, as well as preventative maintenance and
troubleshooting procedures, are covered in practical
laboratory sessions.
Lab equipment, including Agilent leak detectors and various
maintenance consumables, is provided for extensive handson lab activities and instructor-led demonstrations.
Participants will work with the Agilent leak detector model
that they use in their work environment.
Day 3
• Valve Block and Manifold Maintenance
– Hands-On LAB: Clean valve block and manifold
• Mechanical Pump Maintenance
– Hands-On LAB: RV/TS pump maintenance
• High Vacuum Pump Maintenance Procedures
– Hands-On LAB: DP/TP pump maintenance
• System Troubleshooting
– Hands-On LAB: Troubleshoot common problems
Leak
Detection
Who Should Attend?
This course is for maintenance technicians and personnel
responsible for maintaining Agilent leak detectors.
Course Goals and Objectives
After completing this course, participants will be able to:
• Explain vacuum fundamentals and concepts essential
to the operation of a leak detector
• Describe principles of operation of a helium mass
spectrometer and ContraFlow
• Identify all major LD components
• Properly operate, tune, and calibrate the LD
• Perform preventative maintenance procedures:
• Spectrometer cleaning and seal replacement
– Ion Source replacement
– Valve blocks and manifold cleaning
– Mechanical and high vacuum pumps
– Troubleshoot routine problems
31
ADVANTAGES OF HELIUM LEAK DETECTION
Acoustic Leak Detection uses sonic or ultrasonic energy that
is generated by a gas as it expands through an orifice.
This method is fairly simple and fast but is only sensitive to
10-3 atm cc/second.
Bubble Testing is a common method of leak detection in
industry today. It can be as simple as pressurizing a part,
placing it under water, and looking for leaks. It can also be
done by pressurizing the part with air, applying a soapy
solution, and looking for bubbles. This method is simple and
cost effective for locating large leaks but also has its
drawbacks. The test piece gets wet and may therefore need
drying. It also cannot measure total leakage rates and is only
useful for 10-4 atm cc/second leaks and larger.
Pressure Decay is commonly used in plumbing and many
other industries. It may only involve a compressor and a
pressure gauge, though some systems can be much more
complex and expensive. The sensitivity of this method is
proportional to time but generally limited to 10-4 atm cc/
second. Another problem with this method is that fluctuations
in temperature degrade the accuracy of the tests.
Halogen Gas Detection is commonly used in the air
conditioning and cooling industry. This technology uses an
infrared type detector to detect the presence of halogen
tracer gas. This requires the test piece to be charged with
Halogen, which is impractical, expensive, and can be an
environmental issue.
Why Helium Leak Detection?
Helium is a superior choice of tracer gas used to find leaks
for a multitude of reasons. Helium is:
• Non-toxic
• Inert and non-condensable
• Normally not present in the atmosphere at more
than trace amounts
• Relatively inexpensive
• Readily passes through leaks due to its small atomic size
• Non-flammable
• Available in various size cylinders
• Available in purities appropriate for medical usage
The only molecule smaller than helium (mass 4) is hydrogen
(mass 2), which is not inert. Helium is much lighter than the
next heavier inert molecule, neon (mass 20) which is much
more expensive. Helium is present at a concentration of only
5 ppm in normal atmospheric conditions.
Other Leak Test Methods Often Fall Short
There are many other methods of leak testing but none that
can match the ability of helium leak testing to locate and
quantify leaks (Figure 1).
Figure 1 - Leak Test Methods Comparison
Approximate Leak Detection Ranges
Test Method
SIPD
Helium
Leak Detector
MSLD
Acoustic
Bubble Testing
Pressure Decay
Halogen Sniffer
102 10
100 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9
Leak Rates in atm.cc/sec.
32
LEAK DETECTION
The PHD-4 Portable Helium Detector is also sensitive to
helium and is based on a patented technology called Selective
Ion Pump Detection (SIPD) (Figure 3). The sensor technology
incorporates an ion pump connected to a quartz capillary tube
and maintained under high vacuum. This membrane is heated
with a coiled platinum filament. Once heated, the membrane
becomes permeable to helium. As the partial pressure of
helium in the ion pump increases, so does the current draw
of the ion pump. This current is proportional to the pressure
and is therefore representative of the helium at the test
probe of the PHD-4.
A selective ion pump detector consists of the following:
• An ion pump and controller
• A permeable quartz capillary
• A heater coil that surrounds the quartz capillary
• Electronics to process the signal
• Display for access to leak rate and other unit functions
Agilent's Helium Leak Detection Technologies
A Mass Spectrometer Leak Detector (MSLD) is a complete
system for locating and/or measuring the size of leaks into or
out of a device or a container. This method of leak detection
is initiated when a tracer gas, helium, is introduced to a test
part that is connected to the MSLD system. The helium
leaking from the test part diffuses through the system, its
partial pressure is measured, and results are displayed.
The MSLD operating principle consists of ionization of the
gases in a vacuum and their acceleration across a voltage
drop and a magnetic field (Figure 2). The helium ions are
separated and collected, and the resulting ion current is
amplified and indicated on the display.
A mass spectrometer leak detector consists of the following
components:
• A spectrometer tuned to detect helium
• A vacuum system to maintain adequately low pressure
in the spectrometer
• Primary pumps to evacuate the part to be tested
• Valves that enable the various stages of the leak detection
cycle, from evacuation, to test, to venting
• Amplifier and readout instrumentation that monitors
spectrometer output signal
• Electrical power supplies and controls that sequence
valve’s, protective circuits, etc.
• Fixturing that attaches the part to be leak-tested
to the leak testing equipment
Figure 3 - Selective Ion Pump Detector
Sampling
Pump
Figure 2 - Mass Spectrometer Tube Schematic
Ionization
Chamber
Magnetic field deflects
helium ions 135
Lighter
Ions
To
Preamplifier
Inlet
Collector
High
Vacuum
Helium ions pass
through slit and
are collected
Heavier Ions
Ion
Pump
33
Leak
Detection
Filament
LEAK DETECTION METHODS
Methods of Leak Testing
Figure 2 - Measuring Leaks – Outside-In
There are many different ways to leak test parts using helium
as a tracer gas. In general, the leak detection method is
selected based on the actual working conditions of the part
being tested. It is recommended that during leak testing, the
same pressure differential be maintained and in the same
“direction” as exists during the actual use of the part. For
example, a vacuum system is tested with a vacuum inside the
chamber, while a compressed air cylinder should be tested
with a high pressure inside the cylinder.
There are also two general concerns when leak testing. One
is the location of leaks and the other is the measurement of
the total leakage rate of the part, as some leakage may be
acceptable. In many cases, parts may be first tested to
determine if they pass an acceptable level, and if not, the part
may be taken off line and subjected to a second test with the
intent of locating the leak. Additionally, many parts may be
tested in batches. If a batch fails, the individual parts in that
batch may then be tested separately to identify the leaking
part(s).
Helium
Envelope
Test Part
He
Pressure Testing Method (Inside-out)
In this technique, the part is pressurized with helium or a
mixture of helium and air, and tested by one of the
following methods:
Measuring Leaks (Figure 3)
Vacuum Testing Method (Outside-in)
The part to be tested is evacuated with a separate pumping
system for large volumes, or with just the leak detector itself.
When the appropriate cross over pressure has been reached,
the leak detector is valved-in or transfers into test and the
part is tested using one of the following methods:
To determine the total quantity of leakage (but not the
number or location of leaks), the part is pressurized with
helium (or a mixture of helium and air or nitrogen). This can
be done by bombing or backfilling small hermetically sealed
parts. Larger parts can be actively pressurized using a hose or
tubing to deliver the helium. The part is placed in a volume
that is then evacuated by the leak detector. All the helium
escaping from the part is captured and quantified.
Locating Leaks (Figure 1)
To pinpoint the location of the leak(s) (but not measure the total
leakage rate), helium is administered to the suspected leak sites
of the part using a spray probe with an adjustable flow.
Figure 3 - Measuring Leaks Inside-out
Figure 1 - Locating Leaks – Outside-in
Test Part
(Helium Filled)
Helium Spray
Probe
Vacuum
Chamber
Test Part
Test Port
He
Measuring Leaks (Figure 2)
To determine the total quantity of leakage (but not the number
or location of leaks), the part is connected to the leak detector
and shrouded by a helium environment. This helium
environment can be contained in many methods ranging from a
simple plastic bag to more complex bell jar arrangements.
34
LEAK DETECTION
Locating Leaks (Figure 4)
Vacuum Systems (Figure 6)
To pinpoint the location of the leak(s) (but not measure the
total leakage), the likely potential leak sites of the part are
scanned using a Sniffer Probe connected to the inlet of the
leak detector.
In general, vacuum systems are tested with a portable leak
detector. Typically the leak detector is connected by means
of a "tee" connected in between the foreline of the high
vacuum pump and the inlet of its backing pump. A system
should be capable of maintaining a foreline pressure low
enough to operate the leak detector at this location. Helium is
supplied to potential leak site using a spray probe or "bagging"
suspected areas. If a leak exists, helium will enter the system
and rapidly diffuse through it. The leak detector should
respond within several seconds or less. Note that leak
detector sensitivity will be diminished in systems with large
backing pumps. If a system is using a cryopump as a high
vacuum pump, it must be valved off before helium is
introduced as cryopumps have limited helium pumping
capacity.
Figure 4 - Locating Leaks – Inside Out
Flexible
Hose
Test Part
Test
Probe
Figure 6 - Vacuum System
High Vacuum/
Process Chamber
Accumulation Testing Method (Figure 5)
This method can both locate and quantify leaks. Some type of
shroud or hood is placed in such a manner as to envelop a
potential leak site. A certain amount of time is given to allow
leaking helium to accumulate in the shrouded area, increasing
the helium concentration. The leak detector is then valved-in
to the shrouded volume. If many potential leak sites exist in a
manifold or if many parts are to be tested at the same time,
they can be sequentially valved-in to determine which site is
leaking.
High
Vacuum
Pump
System Rough Pump
or Forepump
Figure 5 - Accumulation – Inside-out
T
T
T
T
Many different types of pressurized systems also need to be
leak-free. These systems can be charged with helium or some
mixture of helium and another gas such as nitrogen. If a
diluted helium mixture is used, the helium signal will be
diminished proportionally. For example, if a mixture of 10%
helium and 90% nitrogen is used, the signal will read 10% of
the actual value of the leak, or a decade lower. This may be
acceptable in many cases as system leak checking is usually
to locate rather than quantify leaks. Once the system has
been charged with an appropriate amount of helium, leak
checking can be performed by means of a sniffer probe, or by
"bagging" suspected leak sites so that leaking helium will
accumulate to a detectable level.
Test Valve
(i.e., 1/4" solenoid operated)
Flow Control Device
(i.e., needle valve)
Flow Line
(i.e., 1/4" diameter Tygon, 5' long)
System Leak Test Methods
Systems, like individual parts, should be tested with the same
pressure differential and in the same direction as in actual
use. Therefore, systems that are under vacuum while in
operation should be leak tested under vacuum, while
pressurized systems should be charged with helium to a
pressure similar to operational conditions when possible.
35
Leak
Detection
Pressurized systems
Accumulation Device
(containing item under test)
Leak Detector Inlet Port
Roughing Line or
Turbo Foreline
Isolation
Valve
TYPICAL LEAK DETECTION APPLICATIONS
Maintenance of Systems
Many vacuum process tools in fabs of all types require
occasional leak checking. This may be part of a preventative
maintenance schedule or in the event of an unexpected
failure. Downtime in either case must be minimized.
A rugged, dependable, fast starting leak detector is essential
to maximize up time of production tools. Agilent VS Series,
959, and PHD-4 portable leak detectors keep industry moving.
Examples of some of these applications are:
Vacuum process equipment or tools
• Vacuum furnaces
• Vacuum coaters
• Beam lines
• Electron beam and ion beam process equipment
• Analytical Instruments
• Semiconductor process tools
• Laser process equipment
Pressurized systems
• Power Plants
• Underground tanks, cables, and pipes
• High purity gas handling systems
• Bioreactors and fermenters
• Liquid gas manufacturing facilities
• Fuel tanks and bladders
Quality Control of Production Parts and Assemblies
System Integrated Leak Detection
The detection and location of leaks is critical in the
production of many products from individual components, to
sub-assemblies, to completed systems. In many of these
cases, it is as important to know the size or rate of the leak
as it is the location. Whether quantitative or qualitative
testing is required, our leak detectors help assure the leak
integrity of your parts or assemblies. Some examples include:
Manufacturers of large, complex systems may choose
to integrate into those systems a component leak detector
that can facilitate the on-going maintenance of leak-free
integrity, thereby providing additional value to their
customers. The Agilent VS C15 Component Leak Detector
provides the necessary elements for flexible integration of
leak detection capability into a large system. Examples of
these systems are:
• Semiconductor process equipment
• PVD/CVD equipment
• E-beam and ion beam processing equipment
Evacuated parts and assemblies
• Hermetically sealed electronic packages
• Valves and manifolding
• Feedthroughs/glass-to-metal seals
• Vacuum vessels and systems
Pressurized parts and assemblies
• Air conditioning and refrigeration assemblies
• Radiators, heat exchangers, and condensers
• Brake, fuel, and hydraulic lines
• Gas tanks
• Food storage tanks and packaging
• Body implantable medical devices
• High purity piping
36
LEAK DETECTION
Mass Produced Parts
Portable Sniffing Applications
Some manufacturing processes require the integration
of a leak checking device into a multi-step process, usually
with very high production rates. Component leak detectors
are designed specifically for these applications in which a
vacuum system and the control electronics may be mounted
separately. The Agilent VS C15 offers the ultimate flexibility in
a helium mass spectrometer leak detection system. The
flexibility, ruggedness and rapid response time of these units
allows for accurate, repeatable, high volume leak testing in
demanding production environments. Some examples include:
High Volume Manufactured Parts
• Automotive fuel systems
• Automotive brake components
• Cooling and refrigeration system components
• Medical devices
• Automotive airbag components
• Tire and wheel assemblies
Some applications require operators or technicians to look
for leaks from a ladder, outdoors, above or below ground, or
in a densely constructed industrial facility or power plant.
In these cases, a mobile cart-mounted MSLD may not be
practical. A truly portable unit such as the PHD-4 is required.
Some examples of such applications are:
• Aircraft manufacturing and maintenance
• Power generating plants
• Pressurized pipelines
• Bioreactors and fermenters
• Petrochemical plants and refineries
• Underground tanks
• Large condensers or heat exchangers
37
Leak
Detection
Small, compact, self-contained footprint
inside your system.
APPLICATIONS TABLE - General Guidelines for Leak Detection Methods and Equipment
The chart below is a general guide to assist you in determining which leak detector and test method is
the correct solution for your application. This information should be used in conjunction with guidance
from your Agilent Sales Engineer.
Containment vessels
Heat exchangers
Condensers
Condensate handling systems
Valves & components
Cryostats
Measurement Pressure (Inside Out) Measurement Location
Location
Accumulation •
•
•
TECHNOLOGY & MODEL Mass Spectrometer VS Series
VS C15
959
SIPD
PHD-4
•
•
•
•
•
•
•
•
•
AUTOMOTIVE
POWER GENERATION
•
•
•
Feedthroughs
•
•
•
•
•
•
•
•
•
Airbag devices
Shock absorbers
Torque converters
Transmissions
Wheel rims
Fuel injectors
Gas tanks
•
•
•
•
•
•
•
•
•
•
•
•
High voltage
circuit breakers
Capacitors
Transformers
Electrical switches
Underground cables
•
•
•
•
•
•
•
•
•
Bioreactors
Fermenters
Interconnecting
components
Glove boxes
Electronic Packages
Display panels
Quartz crystals (SAWS)
Reed relays
38
•
•
Implantable devices
•
•
•
Liquid gas
manufacturing
installations
•
•
•
•
•
•
•
Feedthroughs
Semiconductor
manufacturing
equipment
Gas transfer lines
Gas panels
MEDICAL &
BIOPHARMACEUTICAL
Vacuum (Outside In) Oxygen sensors
ABS
valves
Headlight assemblies
Lamps
Neon signs
CRYOGENICS
Battery cases
Heat exchangers
Oil coolers
ELECTRICAL
LEAK
DETECTION METHOD Vacuum insulated
transfer lines
Cryogenic dewars
& storage tanks
ELECTRONIC &
SEMICONDUCTOR
Radiators
Brake lines
Fuel lines
Exhaust systems
•
•
•
•
•
•
•
•
•
Kidney filters
LEAK DETECTION
To determine the appropriate leak detector for your application:
1.Find the colored column of table that relates to your application: Power Generation, Automotive, etc.
2.Find part(s) that are similar to your part to be tested. The parts are shown on the top and bottom of the table.
3.Find dots that indicate the suggested leak check method and equipment.
Components
Rocket valves
O-ring seals
•
•
•
•
•
•
•
•
•
•
•
•
•
•
Interconnecting
tubing
•
•
•
•
•
•
•
•
•
•
•
•
•
Heat treatment
ovens/furnaces
Coaters
Storage tanks
Transport lines
•
•
•
•
•
•
•
•
•
•
•
•
•
•
Pressure vessels
•
Vacuum
(Outside In)
Location
Measurement
Pressure
(Inside Out)
Accumulation
TECHNOLOGY
& MODEL
Mass
Spectrometer
VS Series
•
•
•
•
•
•
•
Cans
LEAK
DETECTION
METHOD
•
•
•
•
•
•
•
•
•
Fuel tank maintenance
39
•
Space simulation chambers
Accelerators
Synchrotrons
Experimental chambers
Electron microscopes
Surface analytical systems
Food containers
•
Food manufacturing
equipment
Storage drums
•
•
•
Medical supplies &
medicine packages
Inert gas packaging
Aerosol cans
Measurement
Location
VS C15
959
SIPD
PHD-4
Leak
Detection
Oxygen systems
Hydraulic systems
Fuel line components
Pumps
Pitotstatic systems
Engine
bleed
air systems
PACKAGING
Fuel tank production
Valves
Fittings
Connecting
hardware
HIGH ENERGY
PHYSICS/R&D
AIR CONDITIONING&
REFRIGERATION
Pressurized vessel
Distillation columns
Filters
Reactors
Steam generators
High pressure components
Valves
CHEMICAL &
METALLURGICAL
Automobile
A/C systems
Condensors
Evaporators
Compressors
Dryers
Water pipes
Vacuum chambers
SPACE &
AERONAUTICAL
Fire extinguishers
DESIGN AND APPLICATION CONSIDERATIONS
the full response time. The outstanding background
subtraction capabilities of Agilent's VS series helium leak
detectors is of great importance
in improving appearance time.
The Effect of Helium Pumping Speed
Detecting a leak quickly is one of the most important
requirements in using a helium leak detector or a leak
detection system. This requirement is characterized
by the following elements:
3. Disappearance time.
Disappearance time (cleanup time) is the time required for a
leak detector to recover to a desired sensitivity after exposure
to a leak. Here one will observe the most noticeable time
difference between a high performance and low performance
leak detection system arrangement. A high pumping speed
will yield significantly faster cleanup times.
• Response time
• Appearance time
• Disappearance (cleanup) time
1. Response time
Response time is defined as the time required for a leak
detector to measure 63 % of the peak helium signal. This
response time is based on an exponential behavior (Figure 1).
This shows the appearance of a 10-7 std. cc/sec leak signal.
Selecting the Proper Connections
In most situations when using the Outside-in Vacuum
Method, it is necessary to install a connection between the
leak detector and the part or chamber to be evacuated. Sizing
this connection is an important aspect of the leak detection
system performance because, 1) the connection adds volume
to the total system arrangement, and 2) it restricts the helium
pumping capability of the leak detector system.
Selecting an inappropriate connection line can alter the
capabilities of a leak detector system. For example, a tube of
4 feet in length by 0.40 inches in diameter has a conductance
of 0.27 l/s for helium in molecular flow (Figure 2). This means
that even the most powerful helium leak detector will not
deliver a pumping speed higher then 0.27 l/s. Using this value
in the calculations provided for response time, appearance
time, and disappearance time will clearly demonstrate the
impact of limited conductance.
% of Signal
Figure 1 - Response Time
100
90
80
70
60
50
40
30
20
10
0
0
1
2
3
4
5
6
7
Response Time
8
9
10
11
Figure 2 - Conductance
In order to quickly measure the signal in a vacuum
application, the response time should be as short as possible.
In general, a larger test volume will yield a slower response
time. Also, a test volume connected to the detector by a long,
narrow tube will negatively affect the response time, since
helium must travel through the tube to the detector.
For a given volume, the effective pump speed of the leak
detector or leak detection system must always be as large as
possible. To optimize cycle time, for example in a production
application, auxiliary pumps can be used to obtain the desired
objectives. These pumps must be sized and correctly
integrated to yield maximum effectiveness.
100000
Speed (l/sec)
10000
1000
100
10
1
0.00001
2. Appearance time
Appearance time is the time required to see an increase of
signal, above the background level, after helium is admitted
to a leak. Appearance time is only a first indication of a leak
and does not indicate the eventual magnitude of the leak rate.
This is different from response time, which is calculated from
the peak value. The first “appearance” of a leak is often
sufficient to stop a test cycle before a test chamber becomes
saturated with helium, thus avoiding a lengthy cleanup period.
In some applications, it is sufficient to know that there is a
leak without knowing the actual magnitude of the leak and
0.001
0.1
Pressure (Torr)
10
1000
The Evacuation Process
In order to leak test a part by the Outside-in Vacuum Method ,
it is necessary to evacuate the part or the chamber in which
the part is placed. The required vacuum level will depend on
the acceptable leak rate requirements. (See section on helium
background, page 41.)
40
LEAK DETECTION
Parallel Operation
If the volume of the part to be tested is very large or the cycle
time very short, an auxiliary pumping station may be required
operating in parallel with the leak detector (see Figure 5). In
this situation, the auxiliary pump or pumping station is used
for roughing only.
Figure 3 - Evacuation
1000.00
Torr
100.00
10.00
1.00
Figure 5 - Parallel Operation
0.10
0.01
0.0
10.0
20.0
30.0
40.0
50.0
60.0
70.0
80.0
90.0
Seconds
To reach the appropriate level in a timely fashion, it is
necessary to select a pumping system based on the right
pump characteristics, pumping speed and base pressure, as
well as the right manifolds arrangement, conductance
limitations and added volume considerations.
When purchasing a self contained helium leak detector that
is equipped with it own roughing pump, special attention
should be paid to the size of the pump to avoid the need for
purchasing auxiliary pumps, manifold, or control equipment.
Qt
S aux
S ld
Q ld
Q aux
Calculation of response time, appearance time, and
disappearance time must be considered in both the effective
helium pumping speed provided by the detector and the
effective helium pumping speed provided by the auxiliary
pump at the chamber. The total helium flow (Qt) coming
through a leak and through the chamber will be split in a flow
(Qld) towards the detector and flow (Qaux) towards the
auxiliary pump. This will result in a decrease of the indicated
leak rate at the leak detector, for which must be
compensation must be made.
As shown in Figure 4, helium is present in ambient air at
5 parts per million (ppm). Although this is a very low level
when looking for leaks as small as 10-9 std. cc/sec, helium
background remains an issue.
Figure 4
Gas
Nitrogen
Oxygen
Argon
Carbon Dioxide
Neon
Helium
Krypton
Hydrogen
Xenon
Symbol
N2
O2
Ar
CO2
Ne
He
Kr
H2
Xe
% by Volume
78.08
20.95
0.93
0.03
0.0018
0.0005
0.0001
0.00005
0.0000087
PPM
780800
209500
9300
300
1
5
1
0.5
0.087
Helium Consumption
Based on the attainable sensitivity using the helium leak
detection method, parts to be tested may be charged with a
helium/gas mixture to reduce the helium consumption. This
is especially true for large parts or production type testing.
Lower Helium consumption may also be achieved by raising
the pressure inside the part to be tested, while lowering the
concentration. The effect will vary depending on the flow
conditions of the actual leak.
When testing by the Outside-in Vacuum Method, correct
evacuation conditions and proper spraying technique,
combined with adequate ventilation, are key to maintaining
proper detector system operation. Proper charging, venting
and careful release of the helium after a test are critical in
testing by the Inside-out Sniffing Method.
Agilent's VS series leak detectors are equipped with unique
helium background suppression features that allow
compensation of >2 decades of helium background
(Floating Zero).
41
Leak
Detection
Appropriate Helium Background Conditions
EQUATIONS FOR USE IN HELIUM LEAK DETECTION
Response time
in molecular flow:
Appearance time
in molecular flow:
With: t = Time in seconds to 63% of full signal
V= Volume in liters
S = Helium pumping speed in l/s
With: ta =Appearance time in seconds
V =Volume in liters
S =Helium pumping speed of the detector in l/s
Q =Leak rate in mbar.l/s
Qm=Smallest detectable leak in mbar.l/s
Split flow calculations:
Disappearance time
in molecular flow:
With:(Qld) = Helium flow towards the leak detector
(Qt) =Total helium flow from the chamber
towards the LD + auxiliary pump
(Sld) = Helium pumping speed of the leak detector
(Saux) = Helium pumping speed of the auxiliary pump
With: td =Disappearance time in seconds
V =Volume in liters
S =Helium pumping speed of the detector
in liters /second
Q =Leak rate in mbar l/sec
Qm=Smallest detectable leak in mbar.l/s
Gas loss under viscous
flow conditions:
Evacuation time:
With: Q= Leak rate in mbar l/s
R = Gas loss in grams/year
M= Molecular weight gas
T = Temperature in degrees Kelvin
22400 = Volume of one mole of gas at 273 °K and
1 atm in cc
365 x 24 x 3600 = seconds in one year
With:
Gas flow under viscous flow conditions:
Gas flow under molecular flow conditions
for long cylindrical tube:
With:Q =
D =
L =
visc=
P1 =
P2 =
Leak rate in mbar l/sec
Leak diameter in cm
Length of the leak in cm
viscosity of the gas in bar s
Absolute pressure one side of the wall in bar
Absolute pressure other side of the wall in bar
With:
t = Evacuation time in seconds
V = Volume in liters
S = Pumping speed in l/s
P1 = Beginning pressure in mbar
P2 = Ending pressure in mbar
Q = Leak rate in mbar l/sec
L = Length of the leak in cm
D = Leak diameter in cm
M = Molecular weight gas
R = Gas constant ( 8.3 E7)
T = Temperature in degrees Kelvin
P1= Absolute pressure one side of the wall in bar
P2 = Absolute pressure other side of the wall in bar
Bombing calculation for hermetically
sealed packages
With:
V = Internal free volume of the package in cubic
centimeters
t2 = Dwell time between end of bombing cycle and
start of leak test in seconds
L = The leak rate specification in atm cc/sec He
Pe= The bombing pressure in atmospheres
Po= Atmospheric pressure (usually 1 ATM)
t1 = Bombing time in seconds
Accumulation Method
Calculating helium concentration increase
Calculating detection time
With: Q = Leak rate from part in atm cm3/sec
T = Soak time in seconds
42
V = Volume in cm3
C = Increase in He concentration in ppm
LEAK DETECTION
CONVERSION TABLES
Pumping Speed
1 cfm
1 l/minute
1 l/sec
1 m3/hour
cfm
1
0.035
2.12
0.589
l/minute
28.32
1
60
16.67
l/sec
0.472
0.016
1
0.27
m3/hour
1.6977
0.06
3.6
1
atm cc/sec
1
1
1.3 10 0.016 mbar l/sec
1
1
1.3 10 0.016 Torr l/sec
0.76 0.76 1
7.5 0.0125 Pa m3/sec
0.1 0.1 0.13 1
0.0016 sccm
60
60
80
600
1
Torr
1
0.751 0.00751
0.001 51.72 760 mbar
1.33 1
0.01
0.0013 68.96 1013 Pa
133
100
1
0.13
6896
101300
micron
1000 750 7.5
1
51710 760000 psi
0.0193 0.014 0.00014
0.000019 1
14.7 inch3
1
1728 61.02 0.061 61023 ft3
0.00056 1
0.035 0.00003 35.33 liter
0.0163 28.316 1
0.001 1000 cm3
16.38 28316 1000 1
1000000 m3
0.000016
0.0283
0.001
0.000001
1
Flow/Leak Rate
1 atm cc/sec
1 mbar l/sec
1 Torr l/sec
1 Pa m3/sec
1 sccm
Pressure
1 Torr
1 mbar
1 Pa
1 micron (mTorr)
1 psi
1 atm
atm
0.00132
0.0009
0.000009
0.0000013
0.07
1
1 inch3
1 ft3
1 liter
1 cm3
1 m3
43
Leak
Detection
Volume