indian institute of technology bombay

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Tender No.201701131
3D Laser lithography system
The proposed 3D Laser lithography system will be used for fabrication of threedimensional microstructures. The system should be offered with all necessary hardware
and software seamlessly integrated for smooth and trouble free operation of the system.
The system should consist of the following components and should meet (or exceed) the
following minimum specification. An itemized quotation of the parts as listed below
should be given. A compliance sheet with respect to our specification and your quote
should be included while submitting the tender.
(1)A 3D Laser lithography system with:
An ultra-fast galvo-scanner based scan-head with scanning control unit and analog
A high-precision and fast linear motor stage (with 10 nm minimum incremental motion
and 300 mm/sec)
For rapid x-y-scanning for two-photon polymerization; and to provide high writing
speeds for accurate fabrication keeping highest resolution in the submicron range.
Laser: A femtosecond laser with specifications as follows:
Pulse length < 120 fs; repetition rate: 80 MHz ± 1 MHz; average power >120 mW;
centre wavelength: 780 nm ± 10 nm for two photon polymerization process
Stages: The system should implement two stages: One piezo stage with at least 100
μm x 100 μm x 100 μm travel volume and another motorized stage with at least 10
cm x 10 cm travel range. The positioning repeatability of the piezo stage within its
full travel volume should be better than 30 nm in all three axes. The motorized stage
should allow for the stitching of different piezo travel volumes laterally. The
minimum incremental motion of x-y motorized stages should be about 10 nm with an
encoder resolution of about 1 nm.
Microscope: A microscope for mounting multiple objectives for focusing the laser
beam into a photosensitive material and for real-time visualization of the exposure
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process. The microscope should be equipped with objective turret, autofocus system,
one LED for reflection illumination and one LED for transmission illumination.
Camera: High-sensitivity CCD camera for real time monitoring of the sample while
being processed. It should have a resolution of at least 1388 (H) x 1038 (V) = 1.4
Mega Pixel; 4.65 μm x 4.65 μm and chip size of at least 1/2".
o Oil immersion objective; 63x; NA=1.4; WD=190 μm;
o Immersion objective; 25x; NA =0.8;WD = 380 μm;
o Air objective: 20x, NA=0.5, WD=2.1 mm;
o Air objective: 40x, NA =0.65
Sample holders
o Sample holders of different shapes (for holding rectangular, square and circular
cover glasses (0.17 mm thick) and glass slides (0.3 - 1 mm thick) of various
o Sample holder for microfluidic channels (3" x 1") lateral dimensions and glass
thickness 1.5 mm.
1.5 liter of each of the following photoresists to be given over a period of 5 years:
IP-Dip Photoresist or equivalent
IP-L 780 photoresist or equivalent
IP-G 780 photoresist or equivalent
IP-S or equivalent
SU-8 2075
SU-8 2100
AZ 9260
AZ MIR 701
AZ 5214
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Working desk: Accessories like monitor, keyboard, mouse, etc. should be placed
separately on another table with dimensions of about 120 x 80 cm 2.
Imported (Newport or Thorlabs or equivalent) Active Vibration Isolation table:
Compressed air connection is not available at the site, hence following specifications
need to be quoted and met:
It is required to place the laser lithographic system on a scientific grade vibration
isolation table to eliminate torsional and bending table modes. The table should be
equipped with pneumatic vibration isolators provided with air compressors for
automatic re-leveling.
o Active floating anti-vibration table with air damping, honeycomb, bread-board
table top with M-6 threading for the complete fabrication system including laser.
Table dimensions should be appropriate to fit the entire system on the table.
Minimum dimensions should be at least: Length – 1.5 m; Breadth – 1.8 m; Height
– 0.8 m; Thickness - at least 12”.
o Highly accurate re-leveling to improve repositioning after disturbance and built in
leveling indicators to provide visual feedback ensuring table properly floating at
correct level.
o The air compressors with pneumatic vibration isolators should have clean
compressed air, with quiet operation, super-precise vertical adjustment and the
ARF air filter regulator should remove contaminants from the air and guarantee
maintenance free operation.
o The operating voltage should be 220V.
Safety goggles and power meter: Three pairs of laser safety goggles and standalone power meter for monitoring laser power.
Computer with monitor, keyboard and mouse.
A branded (Dell or Lenovo or HP or equivalent) computer workstation having a
widescreen flat panel display with the specifications below as the minimum
o Genuine Microsoft Windows 7 Professional 64-Bit;
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o Intel Workstation: Intel Core i7 processor GHz 6 MB/1600 MHz, Graphics
interface: 2GB;
o Memory: 8 GB or better with additional slots for memory expansion to 128 GB
RAM. Memory slots: 16 DIMM slot.
o Hard drives: 1 x 128 GB SSD (configured as 128 GB hard drive) and 2 x 2 TB
o Optical storage: 24x DVD+/-RW Drive;
o Network Controller: Dual integrated 10/100/1000 LAN interface, Dual-band
WiFi-certified 802.11 a/b/g/n - compliant adapter
o Ports: 4 or more USB ports with at least 2 ports with USB 3.0, 4 x FireWire A/B,
RS 232 interface,
o High resolution large LCD/LED screen with 29” diagonal (or better), 2560x1600
pixel resolution.
Software: The software should provide complete automation in following respects:
 Switching different microscope objectives
 Multiple sample substrate handling
 Automatic interface finding
 Software compatibility with STL format
 3D visualization of the model and the writing process of the model
Demonstration sample:
o As a tender pre-technical qualification criteria, bidder has to fabricate & submit
along with the Techno-Commercial bid, THREE micro/nano structured objects:
o A 3D woodpile with a Lateral feature size of 200 nm and vertical resolution
at least 1000 nm;
o A high aspect ratio structure with height ≥ 300 μm (maximum is
o A structure fabricated on SU-8 resist, clearly indicating the minimum
feature sizes achievable in it.
o SEM image of the fabricated structure should be enclosed with the Technocommercial bid, clearly mentioning the time taken for creating such an object, its
3D lateral feature size, vertical resolution, aspect ratio, volume of the object.
o The same submitted structure should be fabricated again during the time of
installation & commissioning of the system at IIT-Bombay, guaranteeing and
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demonstrating all its features and parameters to the buyers as agreed by the
bidders in their Technical Bid.
Warranty, Service and Miscellaneous
o The system should carry 1-year warranty and 4 years of Comprehensive
Maintenance Contract (CMC) after the first year of warranty for all laser
lithography system parts including laser, stages, galvo scanner (if applicable),
vibration isolation table and labor – this is extremely important for us.
o Operator (trained and paid by the vendor) for one-year on-site bench space
training to multiple users and maintaining the system. The same to be offered
along with the quote.
o In case of downtime, the system should be attended within 48 hours of complaint.
o One 6 KVA on-line isolation transformer UPS with 1 hour power backup capability
should be provided along with the system.
o A dehumidifier (capacity atleast 20 L) should be supplied with the system.
o All pre-installation requirements to have the system installed in ideal room
conditions should be included in the quote.
o The bidders should provide full details of after sales service support and detailed
list of users in India over the last 3years with contact details.
o The system should be pre-assembled, pre-aligned and tested at the origin. The
system should be designed and tested to meet local electrical voltage, but system
will have many components switchable to 230 V standard in India. For those
components that are not directly convertible, power adapters/converters should
be provided. An uninterruptible power supply may be provided.
o All the parts not included in the price of the laser lithography system should be
quoted separately.
o The system should be tested and shipped to the customer site to be installed,
tested and commissioned by manufacturer’s personnel. An application scientist
from the system’s manufacturer should create samples at the site of installation
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for validation. Should also provide samples to demonstrate voxel size.
o The manufacturer’s scientist or engineer should provide installation, qualification
and training on-site of the system at IIT.
o Post installation support should be provided throughout the warranty and
maintenance period.
o Warranty will start from the day of installation of the equipment.
(2)Table-top Scanning Electron Microscope:
Similar to or better than Phenom PRO imaging display system with following
Imaging module standalone including 19” Touch-Screen User Interface/Display,
 Rotary Magnification / Input knob, Mouse,
 10-7 mBar Vacuum Pump for Source (inbuilt),
 Diaphragm Vacuum pump for Sample chamber.
 Power supply,
 USB 2.0 flash drive,
 One Standard Sample Holder (3.5mm pin stub),
 One sample preparation starter kit
Imaging Modes:
 Magnification Range (Optical): 20 – 120 X
 Magnification Range (Electron Optical): 80- 100,000 X
 Resolution ≤ 17 nm; Pixel Resolution 2.9 nm
 Digital zoom: max. 12 X
 Optical: Selectable axial and off-axis LEDs
 Electron Optical: Long-lifetime High Brightness Thermionic CeB6 Crystal source
 Source Lifetime ~ 1500 Hrs.
 Acceleration Voltage - 5 kV - 10kV; user Settable and continuously variable.
Image Detection:
 Optical - Color Navigation Camera; Optical overview always present in all modes
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Electron Optical - High-sensitivity Back Scattered Electron Detector; operates in low
vacuum. For Best Material contrast information in Compositional mode, 4 Quadrants
design for Topographic mode.
Sample Stage: Computer-controlled Motorized X and Y axis; 360o Rotation; Autocentrable
Sample Holder: Direct Mounting onto SEM Column (No need for vibration isolation
Sample Size: 32 mm (dia) x 100 mm (h)
Loading Times: Optical < 5 seconds: Electron Optical < 30 seconds
Image Format/Resolution: jpeg/tiff/bmp; 456x456/684x684/1024x1024/2048x2048
 Imaging Module: 286 (w) x 566 (d) x 495 (h) mm, 50 kg
 Touch Screen/Display Monitor: 375 (w) x 203 (d) x 395 (h) mm, 7.9 kg
 Diaphragm Vacuum Pump unit: 145 (w) x 220 (d) x 213 (h) mm, 4.5 kg
 Power Supply: 156 (w) x 300 (d) x 74 (h) mm, 3 kg
 Power Requirement: Single-phase AC 110 - 240 Volt, 50 Hz, 300 W (max).
Accompanying software:
 Automated Image Mapping: to enable user-defined collection of images with a large
field of view (such as morphological features on an insect) onto a high-resolution
image map.
 3D Roughness Reconstruction Application package: to enable generation of threedimensional images and sub micrometer roughness measurements. It will help to
communicate imaging results and will extract and visualize data normally hidden
within a sample. The automated 3D image creation to allow full 3D, 2D or 3D wil
colored height indication and filtered 3D for surface roughness reconstruction. The
auto - roughness measurement will measure average roughness and height of
 Fibermetric application: to allow producing accurate size information from micro and
nano fiber samples. This will enable to extend the range of measurements of the
Fibermetric application providing even more in-depth information. It is possible to
measure and analyze complicated fiber structures, ranging from spun-bond and
electrospun fibers to the melt blown type fibers.
 Automated image characterization: to generate hundreds of measurements in
seconds. In addition to more accurate data acquisition, the automated measurements
of the Fibermetric application guarantee a fast return on investment (time savings
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compared to previous manual measurements; operator independent; more consistent
data). The automated feature and fiber size detection has made Fibermetric even
more user-friendly and further improved the time to result. With Fibermetric it has
become possible to measure and analyze samples with large fiber diameter
Particle Metric application software: to allow the user to gather morphology and
particle size data for many submicron particle applications. The data would include
particle size range, detection speed, size, shape, count, area, diameter, surface area,
aspect ratio, circularity, etc. The histogram, scatter plots and generated images can be
exported in the selected format to be used as a reporting tool. Histograms of any
measured particle property can be generated by numerical value and volume. Scatter
plots can be plotted from any combination of particle properties to reveal correlations
and trends.
(3)Sputter Coater with Vacuum Pump:
Fitted as standard with a glow discharge function, making it ideal for the
hydrophilization, or ‘wetting’, of carbon-coated TEM grids and other surface
modifications. A panel-mounted switch allows the system to be easily changed
between sputter coating and glow discharge modes. Supplied with SC502-314B gold/
palladium (Au/Pd) target, 1m lengths of flexible vacuum hose, and fittings to a rotary
pump, comprehensive operating manual & 5m3/hr 2-Stage Oil Sealed Rotary Vane
(4)Charge Reduction Sample Holder:
This sample holder eliminates extra sample preparation of difficult non-conductive
samples. Imaging samples like paper, polymers, organic materials, ceramics, glass
and coatings becomes fast and trouble free without any coating at all. This sample
holder works with the provision of a controlled lower (poor) vacuum in the sample
chamber hence leading to a reduction of charging effects.
(5)Fluorescence stereomicroscope with camera and image analysis software and a
computer system attached with it:
Fluorescence stereomicroscope with a zoom ratio of 18:1 or better with a camera and
computer attached for capturing and recording images. Eyepiece should have a
magnification of 10x and objective lens should be Plan Apochromat with
magnification of 1x and 2x. Magnification should be 130x or better with 1x objective
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and 10x eyepiece. There should be trinocular tube for connecting the camera.
Illumination of sample should be done through transmitted as well as reflected light.
Illumination through LED based transmitted light with reflecting mirror for
enhancing contrast and LED based reflected light with bifurcated fiber optic cables.
For fluorescence imaging, the filters required are for GFP, RFP, DAPI, Cy5.
Fluorescence illumination should be possible with 130 Watt mercury lamp using fiber
optics cable. The lamp life should be 2000 hours. Colored CMOS camera should be
16 MP (true and not interpolated) or better with camera mount adapters with data
transfer should be possible via USB 3 port. Automatic image analysis software should
allow macro writing capability. The software should allow composite image
formation by overlapping the images. The computer specifications should be – i7
processor, with 8GB RAM, 1 TB hard disk, 64-bit data transfer, monitor size of 22
inch or better with keyboard, mouse, 4 USB ports (more than 2 USB3 ports), DVD
drive and required accessories. A dust cover for the microscope should be provided.