INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS MANAGEMENT DIVISION Direct : (+91-22) 2576 8800 (DR) / 8805 (Tender Section)/8801(Local) / 8803,04,06 (Import) / 8802 (Enquiry & Bill tracking)/ 8848(Progress) Email : email@example.com, firstname.lastname@example.org Tender No.201701131 3D Laser lithography system The proposed 3D Laser lithography system will be used for fabrication of threedimensional microstructures. The system should be offered with all necessary hardware and software seamlessly integrated for smooth and trouble free operation of the system. The system should consist of the following components and should meet (or exceed) the following minimum specification. An itemized quotation of the parts as listed below should be given. A compliance sheet with respect to our specification and your quote should be included while submitting the tender. ____________________________________________________________________________ (1)A 3D Laser lithography system with: An ultra-fast galvo-scanner based scan-head with scanning control unit and analog control OR A high-precision and fast linear motor stage (with 10 nm minimum incremental motion and 300 mm/sec) For rapid x-y-scanning for two-photon polymerization; and to provide high writing speeds for accurate fabrication keeping highest resolution in the submicron range. Laser: A femtosecond laser with specifications as follows: Pulse length < 120 fs; repetition rate: 80 MHz ± 1 MHz; average power >120 mW; centre wavelength: 780 nm ± 10 nm for two photon polymerization process Stages: The system should implement two stages: One piezo stage with at least 100 μm x 100 μm x 100 μm travel volume and another motorized stage with at least 10 cm x 10 cm travel range. The positioning repeatability of the piezo stage within its full travel volume should be better than 30 nm in all three axes. The motorized stage should allow for the stitching of different piezo travel volumes laterally. The minimum incremental motion of x-y motorized stages should be about 10 nm with an encoder resolution of about 1 nm. Microscope: A microscope for mounting multiple objectives for focusing the laser beam into a photosensitive material and for real-time visualization of the exposure INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS MANAGEMENT DIVISION Direct : (+91-22) 2576 8800 (DR) / 8805 (Tender Section)/8801(Local) / 8803,04,06 (Import) / 8802 (Enquiry & Bill tracking)/ 8848(Progress) Email : email@example.com, firstname.lastname@example.org process. The microscope should be equipped with objective turret, autofocus system, one LED for reflection illumination and one LED for transmission illumination. Camera: High-sensitivity CCD camera for real time monitoring of the sample while being processed. It should have a resolution of at least 1388 (H) x 1038 (V) = 1.4 Mega Pixel; 4.65 μm x 4.65 μm and chip size of at least 1/2". Objectives o Oil immersion objective; 63x; NA=1.4; WD=190 μm; o Immersion objective; 25x; NA =0.8;WD = 380 μm; o Air objective: 20x, NA=0.5, WD=2.1 mm; o Air objective: 40x, NA =0.65 Sample holders o Sample holders of different shapes (for holding rectangular, square and circular cover glasses (0.17 mm thick) and glass slides (0.3 - 1 mm thick) of various dimensions. o Sample holder for microfluidic channels (3" x 1") lateral dimensions and glass thickness 1.5 mm. Photoresists 1.5 liter of each of the following photoresists to be given over a period of 5 years: o o o o o o o o o o o IP-Dip Photoresist or equivalent IP-L 780 photoresist or equivalent IP-G 780 photoresist or equivalent IP-S or equivalent SU-8 2075 SU-8 2100 Ormocomp AZ 9260 AZ MIR 701 AZ 5214 AZ 40XT INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS MANAGEMENT DIVISION Direct : (+91-22) 2576 8800 (DR) / 8805 (Tender Section)/8801(Local) / 8803,04,06 (Import) / 8802 (Enquiry & Bill tracking)/ 8848(Progress) Email : email@example.com, firstname.lastname@example.org Working desk: Accessories like monitor, keyboard, mouse, etc. should be placed separately on another table with dimensions of about 120 x 80 cm 2. Imported (Newport or Thorlabs or equivalent) Active Vibration Isolation table: Compressed air connection is not available at the site, hence following specifications need to be quoted and met: It is required to place the laser lithographic system on a scientific grade vibration isolation table to eliminate torsional and bending table modes. The table should be equipped with pneumatic vibration isolators provided with air compressors for automatic re-leveling. o Active floating anti-vibration table with air damping, honeycomb, bread-board table top with M-6 threading for the complete fabrication system including laser. Table dimensions should be appropriate to fit the entire system on the table. Minimum dimensions should be at least: Length – 1.5 m; Breadth – 1.8 m; Height – 0.8 m; Thickness - at least 12”. o Highly accurate re-leveling to improve repositioning after disturbance and built in leveling indicators to provide visual feedback ensuring table properly floating at correct level. o The air compressors with pneumatic vibration isolators should have clean compressed air, with quiet operation, super-precise vertical adjustment and the ARF air filter regulator should remove contaminants from the air and guarantee maintenance free operation. o The operating voltage should be 220V. Safety goggles and power meter: Three pairs of laser safety goggles and standalone power meter for monitoring laser power. Computer with monitor, keyboard and mouse. A branded (Dell or Lenovo or HP or equivalent) computer workstation having a widescreen flat panel display with the specifications below as the minimum requirements: o Genuine Microsoft Windows 7 Professional 64-Bit; INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS MANAGEMENT DIVISION Direct : (+91-22) 2576 8800 (DR) / 8805 (Tender Section)/8801(Local) / 8803,04,06 (Import) / 8802 (Enquiry & Bill tracking)/ 8848(Progress) Email : email@example.com, firstname.lastname@example.org o Intel Workstation: Intel Core i7 processor GHz 6 MB/1600 MHz, Graphics interface: 2GB; o Memory: 8 GB or better with additional slots for memory expansion to 128 GB RAM. Memory slots: 16 DIMM slot. o Hard drives: 1 x 128 GB SSD (configured as 128 GB hard drive) and 2 x 2 TB SATA HDD; o Optical storage: 24x DVD+/-RW Drive; o Network Controller: Dual integrated 10/100/1000 LAN interface, Dual-band WiFi-certified 802.11 a/b/g/n - compliant adapter o Ports: 4 or more USB ports with at least 2 ports with USB 3.0, 4 x FireWire A/B, RS 232 interface, o High resolution large LCD/LED screen with 29” diagonal (or better), 2560x1600 pixel resolution. Software: The software should provide complete automation in following respects: Switching different microscope objectives Multiple sample substrate handling Automatic interface finding Software compatibility with STL format 3D visualization of the model and the writing process of the model Demonstration sample: o As a tender pre-technical qualification criteria, bidder has to fabricate & submit along with the Techno-Commercial bid, THREE micro/nano structured objects: o A 3D woodpile with a Lateral feature size of 200 nm and vertical resolution at least 1000 nm; o A high aspect ratio structure with height ≥ 300 μm (maximum is preferred); o A structure fabricated on SU-8 resist, clearly indicating the minimum feature sizes achievable in it. o SEM image of the fabricated structure should be enclosed with the Technocommercial bid, clearly mentioning the time taken for creating such an object, its 3D lateral feature size, vertical resolution, aspect ratio, volume of the object. o The same submitted structure should be fabricated again during the time of installation & commissioning of the system at IIT-Bombay, guaranteeing and INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS MANAGEMENT DIVISION Direct : (+91-22) 2576 8800 (DR) / 8805 (Tender Section)/8801(Local) / 8803,04,06 (Import) / 8802 (Enquiry & Bill tracking)/ 8848(Progress) Email : email@example.com, firstname.lastname@example.org demonstrating all its features and parameters to the buyers as agreed by the bidders in their Technical Bid. Warranty, Service and Miscellaneous o The system should carry 1-year warranty and 4 years of Comprehensive Maintenance Contract (CMC) after the first year of warranty for all laser lithography system parts including laser, stages, galvo scanner (if applicable), vibration isolation table and labor – this is extremely important for us. o Operator (trained and paid by the vendor) for one-year on-site bench space training to multiple users and maintaining the system. The same to be offered along with the quote. o In case of downtime, the system should be attended within 48 hours of complaint. o One 6 KVA on-line isolation transformer UPS with 1 hour power backup capability should be provided along with the system. o A dehumidifier (capacity atleast 20 L) should be supplied with the system. o All pre-installation requirements to have the system installed in ideal room conditions should be included in the quote. o The bidders should provide full details of after sales service support and detailed list of users in India over the last 3years with contact details. o The system should be pre-assembled, pre-aligned and tested at the origin. The system should be designed and tested to meet local electrical voltage, but system will have many components switchable to 230 V standard in India. For those components that are not directly convertible, power adapters/converters should be provided. An uninterruptible power supply may be provided. o All the parts not included in the price of the laser lithography system should be quoted separately. o The system should be tested and shipped to the customer site to be installed, tested and commissioned by manufacturer’s personnel. An application scientist from the system’s manufacturer should create samples at the site of installation INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS MANAGEMENT DIVISION Direct : (+91-22) 2576 8800 (DR) / 8805 (Tender Section)/8801(Local) / 8803,04,06 (Import) / 8802 (Enquiry & Bill tracking)/ 8848(Progress) Email : email@example.com, firstname.lastname@example.org for validation. Should also provide samples to demonstrate voxel size. o The manufacturer’s scientist or engineer should provide installation, qualification and training on-site of the system at IIT. o Post installation support should be provided throughout the warranty and maintenance period. o Warranty will start from the day of installation of the equipment. (2)Table-top Scanning Electron Microscope: Similar to or better than Phenom PRO imaging display system with following specifications: Imaging module standalone including 19” Touch-Screen User Interface/Display, Rotary Magnification / Input knob, Mouse, 10-7 mBar Vacuum Pump for Source (inbuilt), Diaphragm Vacuum pump for Sample chamber. Power supply, USB 2.0 flash drive, One Standard Sample Holder (3.5mm pin stub), One sample preparation starter kit Imaging Modes: Magnification Range (Optical): 20 – 120 X Magnification Range (Electron Optical): 80- 100,000 X Resolution ≤ 17 nm; Pixel Resolution 2.9 nm Digital zoom: max. 12 X Illumination: Optical: Selectable axial and off-axis LEDs Electron Optical: Long-lifetime High Brightness Thermionic CeB6 Crystal source Source Lifetime ~ 1500 Hrs. Acceleration Voltage - 5 kV - 10kV; user Settable and continuously variable. Image Detection: Optical - Color Navigation Camera; Optical overview always present in all modes INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS MANAGEMENT DIVISION Direct : (+91-22) 2576 8800 (DR) / 8805 (Tender Section)/8801(Local) / 8803,04,06 (Import) / 8802 (Enquiry & Bill tracking)/ 8848(Progress) Email : email@example.com, firstname.lastname@example.org Electron Optical - High-sensitivity Back Scattered Electron Detector; operates in low vacuum. For Best Material contrast information in Compositional mode, 4 Quadrants design for Topographic mode. Sample Stage: Computer-controlled Motorized X and Y axis; 360o Rotation; Autocentrable Sample Holder: Direct Mounting onto SEM Column (No need for vibration isolation table) Sample Size: 32 mm (dia) x 100 mm (h) Loading Times: Optical < 5 seconds: Electron Optical < 30 seconds Image Format/Resolution: jpeg/tiff/bmp; 456x456/684x684/1024x1024/2048x2048 pixels Dimensions/Weights: Imaging Module: 286 (w) x 566 (d) x 495 (h) mm, 50 kg Touch Screen/Display Monitor: 375 (w) x 203 (d) x 395 (h) mm, 7.9 kg Diaphragm Vacuum Pump unit: 145 (w) x 220 (d) x 213 (h) mm, 4.5 kg Power Supply: 156 (w) x 300 (d) x 74 (h) mm, 3 kg Power Requirement: Single-phase AC 110 - 240 Volt, 50 Hz, 300 W (max). Accompanying software: Automated Image Mapping: to enable user-defined collection of images with a large field of view (such as morphological features on an insect) onto a high-resolution image map. 3D Roughness Reconstruction Application package: to enable generation of threedimensional images and sub micrometer roughness measurements. It will help to communicate imaging results and will extract and visualize data normally hidden within a sample. The automated 3D image creation to allow full 3D, 2D or 3D wil colored height indication and filtered 3D for surface roughness reconstruction. The auto - roughness measurement will measure average roughness and height of roughness. Fibermetric application: to allow producing accurate size information from micro and nano fiber samples. This will enable to extend the range of measurements of the Fibermetric application providing even more in-depth information. It is possible to measure and analyze complicated fiber structures, ranging from spun-bond and electrospun fibers to the melt blown type fibers. Automated image characterization: to generate hundreds of measurements in seconds. In addition to more accurate data acquisition, the automated measurements of the Fibermetric application guarantee a fast return on investment (time savings INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS MANAGEMENT DIVISION Direct : (+91-22) 2576 8800 (DR) / 8805 (Tender Section)/8801(Local) / 8803,04,06 (Import) / 8802 (Enquiry & Bill tracking)/ 8848(Progress) Email : email@example.com, firstname.lastname@example.org compared to previous manual measurements; operator independent; more consistent data). The automated feature and fiber size detection has made Fibermetric even more user-friendly and further improved the time to result. With Fibermetric it has become possible to measure and analyze samples with large fiber diameter differences. Particle Metric application software: to allow the user to gather morphology and particle size data for many submicron particle applications. The data would include particle size range, detection speed, size, shape, count, area, diameter, surface area, aspect ratio, circularity, etc. The histogram, scatter plots and generated images can be exported in the selected format to be used as a reporting tool. Histograms of any measured particle property can be generated by numerical value and volume. Scatter plots can be plotted from any combination of particle properties to reveal correlations and trends. (3)Sputter Coater with Vacuum Pump: Fitted as standard with a glow discharge function, making it ideal for the hydrophilization, or ‘wetting’, of carbon-coated TEM grids and other surface modifications. A panel-mounted switch allows the system to be easily changed between sputter coating and glow discharge modes. Supplied with SC502-314B gold/ palladium (Au/Pd) target, 1m lengths of flexible vacuum hose, and fittings to a rotary pump, comprehensive operating manual & 5m3/hr 2-Stage Oil Sealed Rotary Vane Pump. (4)Charge Reduction Sample Holder: This sample holder eliminates extra sample preparation of difficult non-conductive samples. Imaging samples like paper, polymers, organic materials, ceramics, glass and coatings becomes fast and trouble free without any coating at all. This sample holder works with the provision of a controlled lower (poor) vacuum in the sample chamber hence leading to a reduction of charging effects. (5)Fluorescence stereomicroscope with camera and image analysis software and a computer system attached with it: Fluorescence stereomicroscope with a zoom ratio of 18:1 or better with a camera and computer attached for capturing and recording images. Eyepiece should have a magnification of 10x and objective lens should be Plan Apochromat with magnification of 1x and 2x. Magnification should be 130x or better with 1x objective INDIAN INSTITUTE OF TECHNOLOGY BOMBAY MATERIALS MANAGEMENT DIVISION Direct : (+91-22) 2576 8800 (DR) / 8805 (Tender Section)/8801(Local) / 8803,04,06 (Import) / 8802 (Enquiry & Bill tracking)/ 8848(Progress) Email : email@example.com, firstname.lastname@example.org and 10x eyepiece. There should be trinocular tube for connecting the camera. Illumination of sample should be done through transmitted as well as reflected light. Illumination through LED based transmitted light with reflecting mirror for enhancing contrast and LED based reflected light with bifurcated fiber optic cables. For fluorescence imaging, the filters required are for GFP, RFP, DAPI, Cy5. Fluorescence illumination should be possible with 130 Watt mercury lamp using fiber optics cable. The lamp life should be 2000 hours. Colored CMOS camera should be 16 MP (true and not interpolated) or better with camera mount adapters with data transfer should be possible via USB 3 port. Automatic image analysis software should allow macro writing capability. The software should allow composite image formation by overlapping the images. The computer specifications should be – i7 processor, with 8GB RAM, 1 TB hard disk, 64-bit data transfer, monitor size of 22 inch or better with keyboard, mouse, 4 USB ports (more than 2 USB3 ports), DVD drive and required accessories. A dust cover for the microscope should be provided.