Keysight Technologies B1507A Power Device Capacitance Analyzer

Keysight Technologies B1507A 
Power Device Capacitance Analyzer
User’s Guide
Notices
© Keysight Technologies 2014
Warranty
No part of this manual may be reproduced in
any form or by any means (including electronic storage and retrieval or translation into
a foreign language) without prior agreement
and written consent from Keysight Technologies as governed by United States and international copyright laws.
The material contained in this document is provided “as is,” and is subject
to being changed, without notice, in
future ed itions. Further, to the maximum extent permitted by applicable
law, Keysight d isclaims all warranties,
either express or implied, with regard
to this manual and any information contained herein, includ ing but not limited
to the implied warranties of merchantability and fitness for a particular purpose. Keysight shall not be liable for
errors or for incidental or consequential
damages in connection with the furnishing, use, or performance of this
document or of any information contained herein. Should Keysight and the
user have a separate written agreement
with warranty terms covering the material in this document that conflict with
these terms, the warranty terms in the
separate agreement shall control.
Manual Part Number
B1507-90000
Ed ition
Edition 1, October 2014
Edition 2, December 2014
Keysight Technologies
1400 Fountaingrove Parkway 
Santa Rosa, CA 95403
Technology Licenses
The hardware and/or software described in
this document are furnished under a license
and may be used or copied only in accordance with the terms of such license.
Restricted Rights Legend
If software is for use in the performance of a
U.S. Government prime contract or subcontract, Software is delivered and licensed as
“Commercial computer software” as defined
in DFAR 252.227-7014 (June 1995), or as a
“commercial item” as defined in FAR 2.101(a)
or as “Restricted computer software” as
defined in FAR 52.227-19 (June 1987) or any
equivalent agency regulation or contract
clause. Use, duplication or disclosure of
Software is subject to Keysight Technologies’
standard commercial license terms, and
non-DOD Departments and Agencies of the
U.S. Government will receive no greater than
Restricted Rights as defined in FAR
52.227-19(c)(1-2) (June 1987). U.S. Government users will receive no greater than Limited Rights as defined in FAR 52.227-14
(June 1987) or DFAR 252.227-7015 (b)(2)
(November 1995), as applicable in any technical data.
Declaration of Conformity
To get the latest version of the declaration of
conformity, go to http://www.keysight.com/go/conformity and type in the
product number in the Search field.
Latest Information
To get the latest firmware/software/electronic manuals/specifications/support information, go to www.keysight.com and type in
the product number in the Search field at the
top of the page.
COMPLIANCE WITH GERMAN NOISE REQUIREMENTS
This is to declare that this product is in conformance with the German Regulation on
Noise Declaration for Machines
(Lärmangabe nach der Maschinenlärminformation-Verordnung -3.GSGV Deutschland).
•
Herstellerbescheinigung
GERÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T. 19
•
Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779
South Korean Class A EMC declaration
This equipment is Class A suitable for professional use and is for use in electromagnetic
environments outside of the home.
WARNING
High Voltage
is used in the operation of this equipment.
LETHAL VOLTAGE on CONTACT
may be present at measurement terminals,
if you fail to take in all safety precautions!
•
When the RED indicator lights, lethal voltage (3000 V dc/pulse) may appear at
measurement terminals.
•
Usually use the interlock function.
•
Do not operate the instrument unless another person is around the work space who is
familiar with instrument operation and hazards or administering first aid.
•
Potentials less than 500 V may cause death under certain conditions. Therefore,
adequate preventive measures must be taken at all times!
FIRST AID FOR ELECTRIC SHOCK
SPECIAL ATTENTION TO RESCUE IN SAFETY
•
Never rush into an accidental situation.
•
Take special attention to the following notices to prevent second accident.
•
•
Do NOT touch the CASUALTY or conductive surface with your hands unprotected.
•
Shut off high voltage at once.
•
Disconnect AC mains.
If it is unsure to make safe, the following procedure will helps to protect your lives
during the CASUALTY is rescued.
•
Stand on a dry insulating material; use a dry wooden or plastic implement to free
the CASUALTY from contact with hazardous electrical source.
•
Ground the circuit to de-energize.
•
Free the CASUALTY from the LIVE conductor
CALL EMERGENCY
•
Call your local Emergency number immediately, if any of signs or symptoms shown in
the following table will be found.
http://en.wikipedia.org/wiki/Emergency_telephone_number#Emergency_numbers
DELAYED SYMPTOMS
English
Symptoms
Cardiac arrest
Abnormal cardiac
rhythm
Respiratory failure
(difficult or absent
breathing)
Muscle pain and
contractions
Seizures (heart
beat stopped)
Numbness and
tingling
Unconsciousness
Entrance and exit
wound burns
•
In some cases, electric shock can cause injuries that are not evident and symptoms
may be delayed.
•
Burns to the CASUALTY may be greater than they appear on the surface.
•
For these reasons, all electric shock CASUALTY should be taken to hospital for
advanced observation.
Deutsch
French
Japanese
Korean
Symptome
Herz-Kreislauf-Stillsta
nd
Arrhythmia
Symptômes
Arestation
cardiopulmonaire
Arythmie
඙ೃ
ᚰ⫵೵Ṇ
Simplified
Chinese
㰫䤚
ᚁೃ
㕂䘦 㩫㰖G ᚰ⫵೵Ṇ
୙ᩚ⬦
⿖㩫ⰻ
⬧ᚊ୙滸ġ
⬦ᚊ୙㰺
Respiratorischer
Mißerfolg
Échec respiratoire
࿧྾୙඲
䢎䦷 ⿖㩚
࿧྾୙඲
࿧྾୙඲
Muskelschmerz und
Zusammenziehungen
Herzlähmung
Douleur du muscle
et contractions
Paralysie cardiaque
➽⫗③ /
②ᨥ
ᚰ⮚㯞⑷
⁒㥷䐋 /
⫙⫗③ /
䕱㋃
㑮㿫
㕂㧻 Ⱎ゚G ᚰ傷㯞⑶
⫙⫗③ /
②ᨥ
ᚰ⮤㯞⑷
Eine Taubheit /
Stachel
Bewusstlosigkeit
Eine elektrische
Schockspur
Un engourdissement
/ Une épine
Évanouissement
Une trace du choc
électrique
⑷ࢀ /
่③
ព㆑୙᫂
ឤ㟁㊧
㩖Ⰲ┺ /
Ṗ㔲③
㦮㔳 ⿞ⳛ
Ṧ㩚 㧦ῃ
ⓐ㯞 /
่③
ព㆑୙᫂
゙㟁⑞㊧
⍹㯞 /
่③
ព孮୙᫂
ゐ䓝⑞㏠
Traditional
Chinese
ᚪೃ
ᚰ⫵೵Ṇ
First Aid for Electric Shock Procedure
Do not give compression-only CPR to infants and children — all infants and children who have a sudden
cardiac arrest need conventional CPR. Also should not be used for adults whose cardiac arrest is from
respiratory causes, or for an unwitnessed cardiac arrest.
D
R
Danger
Response
C
CPR
for ADULT only
Check for DANGER, make SAFE first to YOU, Others, and the CASUALTY.
Check for a RESPONSE.
Leave on back.
If not conscious,
1. Ask others to emergency CALL for an ambulance immediately.
2. HELP to bring AED, ASAP.
3. Start CPR by YOU.
Start the center of chest compressions (>100 compressions per minute) without
stopping until emergency medical services arrive.
One of the most famous chest compression-only CPR is AHA Hands-Only CPR which
is without mouth-to-mouth rescue breaths.
http://handsonlycpr.org/
http://www.youtube.com/watch?v=zuJkRpJ7Fxg
Rhythm of chest compression:
http://www.heart.org/HEARTORG/CPRAndECC/CommunityTraining/CommunityPro
grams/CPR-Week_UCM_427219_SubHomePage.jsp
http://www.youtube.com/watch?v=n5hP4DIBCEE&feature=player_detailpage
Continue CPR until
z Signs of life return.
z AED is ready to use.
z Medical services arrive and take over.
If YOU have a trained rescue skill, should apply the following step.
If not, only keep chest compression until others help.
A
Airway
No foreign material
Foreign material
Leave on back, open airway.
Place in the recovery position, clear of objects.
B
Breathing
30 compress & 2 breaths
D
Defibrillator
Apply AED with following voice prompts.
If no AED available, continue CPR until qualified personnel arrives.
䯲AED: Automated External Defibrillator
䯲CPR: Cardio Pulmonary Resuscitation
䯲AHA: American Heart Association, Inc.
Reference
•
AHA CPR & Emergency Cardiovascular Care (ECC) 
(http://www.heart.org/HEARTORG/CPRAndECC/CPR_UCM_001118_SubHomePage.j
sp)
•
AHA Hands-only CPR (http://handsonlycpr.org/)
•
Save a Life 
(http://www.heart.org/HEARTORG/CPRAndECC/CommunityTraining/CommunityPro
grams/CPR-Week_UCM_427219_SubHomePage.jsp)
•
AHA CPR Translated Website 
(http://www.heart.org/HEARTORG/CPRAndECC/International/TranslatedWebsites/Tr
anslated-Websites_UCM_303149_SubHomePage.jsp)
Deutsch (http://www.american-heart.de/startseite)
Japanese (http://eccjapan.heart.org/) available as of March, 2012))
•
Chain of Survival
(http://www.heart.org/HEARTORG/CPRAndECC/WhatisCPR/ECCIntro/Chain-of-Surv
ival_UCM_307516_Article.jsp)
•
ECC Guidelines Highlights 2010 
English (http://eccjapanheart.org/pdf/ECC_Guidelines_Highlights_2010.pdf)
Japanese (http://eccjapanheart.org/pdf/ECC_Guidelines_Highlights_2010JP.pdf)
Deutsch (http://www.american-heart.at/fileadmin/downloads/Guidelines2010-Highl
ights_D/Guidelines2010-Highlights_D.pd f)
International
•
ILCOR (http://www.ilcor.org/home/)
•
ILCOR CoSTR 2010 Consensus 
(http://www.ilcor.org/consensus-2010/costr-2010-documents/)
Europe
•
ERC (https://www.erc.edu/)
•
ERC Guidelines 2010 (http://www.cprguidelines.eu/2010/)
Local language translation (https://www.erc.edu/index.php/doclibrary/en/185/1/)
America
•
AHA (http://www.americanheart.org/)
•
AHA Guidelines 2010 (http://guidelines.ecc.org/2010-guidelines-for-cpr.html)
Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these precautions
or with specific warnings elsewhere in this manual may impair the protections provided
by the instrument. In addition, it violates safety standards of design, manufacture, and
intended use of the instrument. Keysight Technologies assumes no liability for
customer’s failure to comply with these requirements.
Product manuals may be provided on CD-ROM or in printed form. Printed manuals are an
option for many products. Manuals may also be available on the Web. Go to
www.keysight.com and type the product model number in the Search field at the top of
the page.
NOTE
Do not use this instrument in any manner not specified by the manufacturer. The
protective features of this instrument may be impaired if it is used in a manner not
specified in the operation instructions.
This instrument is an INDOOR USE product.
This instrument complies with INSTALLATION CATEGORY II for mains input and
INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2
defined in IEC 61010-1.
If an instrument is marked CAT I (IEC Measurement Category I), or it is not marked with a
measurement category, its measurement terminals must not be connected to
line-voltage mains.
•
DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, shall be complied. Procedures throughout in this
manual prevent you from potentially hazard. Their instructions contained in the
warnings must be followed.
WARNING
Hazardous vol tage, instrument maximum output vol tage may appear at the
measurement terminals (Force, Guard, and Sense) if Interlock terminal is closed. Open
the Interlock terminal when the measurement terminals are accessible. Vol tage
applied to the terminals will be limited up to ±42 V.
Do not work the interlock function intentionally in order to bring the output vol tage to
the safe level. While the high vol tage ind icator is lit, the dangerous vol tage by the
output vol tage or the resid ual charge appears on the measurement terminal.
•
BEFORE APPLYING POWER
Verify that all safety precautions are taken. Make all connections to the instrument
before applying power. Note the instrument's external markings described under
“Safety Symbols”.
•
GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument chassis
and cabinet must be connected to an electrical ground. The power terminal and the
power cable must meet International Electrotechnical Commission (IEC) safety
standards.
•
DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a definite
safety hazard.
•
DO NOT REMOVE COVERS
No operator serviceable parts inside. Refer servicing to qualified personnel. To
prevent electrical shock do not remove covers.
•
IN CASE OF DAMAGE
Instruments that appear damaged or defective should be made inoperative and
secured against unintended operation until they can be repaired by qualified service
personnel. Return the instrument to a Keysight Technologies sales or service office
for services and repair to ensure that safety features are maintained.
•
USE ONLY THE SPECIFIC ACCESSORIES
Specific accessories satisfy the requirements for specific characteristics for using the
instrument. Use the specific accessories, cables, adapters, and so on for safety
reasons.
Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are listed
below.
Direct current.
`
Alternating current.
Earth (ground) terminal.
Protective conductor terminal. For protection against electrical shock in case of a fault.
Used with field wiring terminals to indicate the terminal which must be connected to
ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment which
normally includes all exposed metal structures.
>
^
Grounded terminal which indicates the earth potential.
On supply.
Off supply.
Standby supply. The equipment will be marked with this symbol is not completely
disconnected from AC mains when power switch is in the standby position.
In position of a bi-stable push switch.
Out position of a bi-stable push switch.
Hazardous voltage and potential for electrical shock. Do not touch terminals that have
this symbol when the equipment is on.
Hot surface. Avoid contact. Surfaces are hot and may cause personal injury if touched.
Caution, refer to accompanying documentation. The equipment will be marked with this
symbol when it is necessary for the user to refer to the instruction manual.
WARNING
The warning sign denotes a hazard. It calls attention to a procedure, practice, cond ition
or the like, which, if not correctly performed or adhered to, could resul t in injury or
death to personal.
CAUTION
The caution sign denotes a hazard. It calls attention to an operating procedure, practice,
condition or the like, which, if not correctly performed or adhered to, could result in
damage to or destruction of part or all of the equipment.
Read operator's manual. To indicate that the operator's manual or card should be read
before continuing the operation.
CAT I
IEC Measurement Category I
The CE mark shows that the product complies with all applicable European Directives.
The CSA mark is a registered trademark of the Canadian Standards Association.
The RCM mark is a registered trademark of the Australian Communications Authority. This
signifies compliance with the Australian EMC Framework Regulations under the terms of
the Radio communications Act.
This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme à la norme NMB-001 du Canada.
This is the symbol for an Industrial, Scientific and Medical, Group 1 Class A product.
(CISPR 11)
Korea’s safety and EMC mark
China RoHS - Environmentally Green Product Label
China RoHS - Product with Toxic Substance 40 yr EPUP
The Chinese mark for paper-based packaging materials; Paperboard and Corrugated
Fiberboard
Plastic Material Coding Identification
Low temperature or freezing conditions. Avoid contact. Surfaces are cold and may cause
personal injury if touched.
Power Supply and Measurement Safety
•
Power Supply Safety
This instrument can output high currents and voltages. Make sure that the load or
device under test can safely handle the output current and voltage. Also, make sure
that the connection leads can safely withstand the expected currents and are
insulated for the expected voltages.
The instrument outputs may be connected so as to float relative to earth ground.
Isolation or floating voltage ratings are indicated on the instrument, near the output
terminal or the Circuit Common terminal. There is the danger of electric shock by
touching the floated measurement terminals. Keep in mind it to protect yourself. And
it is a reason of using the recommended accessories.
•
Voltage/Current Measurement Safety
Multimeters and other instruments capable of measuring high voltages and currents
are subject to specific safety concerns because of the circuits to which they may be
connected. To safely use these instruments, you need to understand the markings on
the instrument near the input terminals, which include the Protection Limits and the
IEC Measurement Category.
•
Protection Limits
Keysight multimeters and other voltage measurement instruments provide protection
circuitry to prevent damage to the instrument and to protect against the danger of
electric shock, provided the Protection Limits are not exceeded. To ensure safe
operation of the instrument, do not exceed the Protection Limits shown on the input
terminals.
•
Source/Monitor Terminals
Source/monitor unit, SMU, can simultaneously perform DC voltage or current output
and measurement. Typical SMU has the Force, Guard, Sense, and Circuit Common
terminals as shown below. Normally the Force, Guard, and Sense terminals are the
same potential. Voltage marked around the terminals indicates the Protection Limits.
Force and Sense must be connected to a terminal of a device under test for the Kelvin
connection which is effective for high current measurement and low resistance
measurement. For the non-Kelvin connection to ease the connections, connect Force
only. Do not connect Sense. It must be opened.
Guard should be extended to around the device terminal for reducing leakage current
caused by a coaxial cable used. Guard must be never connected to anything at the
device side.
Circuit Common should be connected to shielding of the coaxial cable used.
The following image is the Kelvin triaxial connector of Medium Power SMU.
Guard Force Circuit Common Sense Guard
To Avoid Risk of Residual Charge
1.E-06
C=0.1 μF
Capacitance (F)
•
1.E-07
Q=45 μC
1.E-08
Safety Area
1.E-09
100
1000
Voltage (V)
10000
(Based on standards IEC60950-1 and IEC61010-1.)
This graph shows the load capacitance vs voltage characteristics generally
considered as safety. Use the instrument within the safety area up to 0.1 F or 45 C
according to the voltage. Also do not connect the capacitive load over the maximum
load capacitance specified for the instrument, for example 10 nF for HVSMU.
Before touching the measurement terminal, confirm that it has been discharged
enough. For that, ground and discharge the terminals over 10 seconds after stopping
the high voltage output, and confirm that they have been safety voltage by using
another volt meter.
If abnormal end of measurement, breaking of cable, or device damage occurs, do not
touch the terminals until they are discharged enough.
Also if a series resistor is connected, do not touch the terminal until it is discharged
enough.
High Voltage Shock Hazard
Keysight B1507A can force dangerous voltages (±3000 Vdc for HVSMU and ±100
Vdc for MPSMU) at the Force, Guard, and Sense terminals. To prevent electric
shock hazard, the following safety precautions must be observed during the use of
Keysight B1507A.
•
Connect the instrument to an electrical ground (safety ground) by using
three-conductor AC power cable.
•
Before performing measurement, connect the interlock circuit to the Interlock
terminal of this instrument.
•
Confirm periodically that the interlock function works normally.
•
Before touching the connections of the Force, Guard, and Sense terminals, turn
the instrument off and discharge any capacitors of the measurement path. If you
do not turn the instrument off, complete “all” of the following items, regardless
of any instrument settings.
•
•
Terminate measurement by pressing the Stop key, confirm that the
Measurement status indicator is not lit.
•
Confirm that the High Voltage indicator is not lit.
•
Open the Interlock terminal.
•
Discharge any capacitors if the capacitance is connected to an SMU.
Warn workers in the vicinity of the instrument about hazardous conditions.
Gefahr durch Hochspannung
Von den Geräten Keysight B1507A können Spannungen an den Anschlüssen
“Force”, “Guard” und “Sense” von bis zu 3000 V ausgehen. Um elektrischem
Schlag vorzubeugen, ist bei der Benützung der Geräte Keysight B1507A folgendes
zu beachten.
•
Verwenden Sie ein dreiphasiges AC-Stromkabel für die Gerätsteckvorrichtung
(Eingang) und schließen Sie das Instrument an eine Erdung an
(Sicherheitserdung).
•
Vor der Messung verbinden Sie den Verriegelungsstromkreis mit dem
Interlock-Anschluss dieses Instruments.
•
Prüfen Sie in regelmäßigen Abständen, dass die Verriegelungsfunktion
ordnungsgemäß funktioniert.
•
Bevor Sie die Verbindungen zu den Anschlüssen “Force”, “Guard” und “Sense”
berühren, schalten Sie das Instrument aus und entladen alle Kondensatoren des
Messwegs. Wenn Sie das Instrument nicht ausschalten, führen Sie, unabhängig
von den Instrumenteinstellungen, alle folgenden Schritte durch.
•
•
Beenden Sie die Messung, indem Sie auf die Taste “Stop” drücken. Stellen
Sie sicher, dass die Statusanzeige “Measurement” nicht leuchtet.
•
Stellen Sie sicher, dass die Anzeige “High Voltage” nicht leuchtet.
•
Öffnen des Interlock-Anschlusses.
•
Entladen Sie alle Kondensatoren, wenn die Kapazität mit einer SMU
verbunden ist.
Warnen Sie Mitarbeiter in der Umgebung des Instruments vor den Gefahren.
Danger de choc dû à une haute tension
Une tension dangereuse (max. ± pour HVSMU; 3000 Vdc, max. ± pour MPSMU;
100 Vdc) émanant du dispositif Keysight B1507A peut être sortie aux bornes Force,
Guard et Sense. Les précautions suivantes doivent être obserées contre commotion
électrique accidentelle.
•
Utilisez un câble d’alimentation CA à trois conducteurs vers le coupleur secteur
(entrée) et branchez l’instrument sur une mise électrique à la terre (prise de terre
de sécurité).
•
Avant de procéder aux mesures, connectez le circuit de sécurité à la borne
Interlock de l’instrument.
•
Vérifiez régulièrement le bon fonctionnement de la fonction de sécurité.
•
Avant de toucher les connexions des bornes Force, Guard et Sense, mettez
l’instrument hors tension et déchargez tout condensateur du chemin de mesure.
Si vous ne mettez pas l’instrument hors tension, effectuez « toutes » les
opérations ci-dessous, quels que soient les paramètres de l’instrument.
•
•
Terminez les mesures en appuyant sur la touche Stop ; vérifiez que
l’indicateur d’état Measurement est éteint.
•
Vérifiez que le témoin High Voltage est éteint.
•
Ouvrez la borne Interlock.
•
Déchargez les éventuels condensateurs si la capacité est connectée à une
unité SMU.
Informez les personnes travaillant à proximité de l’instrument des conditions.
高電圧感電注意
Keysight B1507A の Force、Guard、Sense 端子には、危険電圧が出力されることがあ
ります(HVSMU の場合は最大 ±3000 Vdc、MPSMU の場合は最大 ±100 Vdc)。感電
事故防止のため、Keysight B1507A の使用時には必ず以下の事柄を守ってください。
•
3 極電源ケーブルを使用して本器を接地してください。
•
測定を開始する前にはインターロック回路を本器の Interlock 端子に接続してく
ださい。
•
インターロック機能が正常であることを定期的に確認してください。
•
Force、Guard、Sense 端子に繋がる接続部に触れる前には、本器の電源をオフし
てください。また、測定系のキャパシタを放電してください。電源をオフしな
い場合は、以下の事項を全て実施してください。
•
•
Stop キーを押して Measurement インジケータが消灯したことを確認してくだ
さい。
•
高電圧警告(High Voltage)インジケータが消灯していることを確認してく
ださい。
•
Interlock 端子を開放してください。
•
キャパシタが SMU に接続されているならば、キャパシタを放電してくださ
い。
周囲のほかの作業者に対しても、高電圧危険に対する注意を徹底してください。
Product Stewardship
•
Waste Electrical and Electronic Equipment (WEEE) Directive 2002/96/EC
This product complies with the WEEE Directive (2002/96/EC) marking requirements.
The affixed label indicates that you must not discard this electrical/ electronic
product in domestic household waste.
Product Category: With reference to the equipment types in the WEEE directive
Annex 1, this product is classified as a “Monitoring and Control instrumentation”
product.
Do not dispose in domestic household waste.
To return unwanted products, contact your local Keysight office or visit the following
website for more information.
http://about.keysight.com/en/companyinfo/environment/
•
LCD Fluorescent Lamp
Certain products sold by Keysight contain a liquid crystal display (LCD); backlighting
for the LCD is provided by a fluorescent lamp which contains mercury, and must be
managed, recycled, and/or disposed in accordance with all applicable laws,
ordinances and regulations.
For information on how to recycle or dispose of the fluorescent lamp contained in
your own product, visit the following website.
http://about.keysight.com/en/quality/env_compliance.shtml
If you live in the U.S., also visit the following websites.
http://www.lamprecycle.org
http://www.eiae.org
If you have additional questions, please visit the following website.
http://www.keysight.com/go/contactus
•
Perchlorate Information
Perchlorate Material - special handling may apply. Visit the following website.
http://www.dtsc.ca.gov/hazardouswaste/perchlorate/
Equipment's real-time clock battery or coin cell battery may contain perchlorate and
may require special handling when recycled or disposed of in California.
Precautionary Statement
Keysight B1507A Power Device Capacitance Analyzer operates in the Microsoft Windows
environment. Keysight B1507A requires Keysight Easy Test Navigator software, a
specially-designed Windows application program.
•
About guarantee and support for Keysight B1507A
Keysight Technologies guarantees and supports the performance of Keysight B1507A
for the same condition as the preload condition when shipped from the factory.
•
About updating Keysight Easy Test Navigator and the Windows Update
Keysight Technologies confirms the operation of Easy Test Navigator patch programs
and important Windows security patches, and provides recommended update
information. Visit Keysight B1507A support site, download the patches, and perform
the software update.
•
About Windows application programs and peripherals (including driver)
Using commercial products on Keysight B1507A is your responsibility. Keysight
Technologies cannot provide compatibility information for commercial products. If
problems arise, perform Keysight B1507A system recovery.
•
About servicing
Bench repair service is available at your nearest Keysight Technologies service
center. Be aware that the B1507A configuration might be updated to the latest one
without notice because of support issues.
The internal hard disk drive (HDD) might be initialized during servicing. If peripherals
are connected, they will be removed.
When Keysight B1507A is returned, the internal HDD might be initialized. Peripherals
will be returned separately.
•
Other notes
•
Back up the internal HDD to prevent loss of data by accident or failure.
•
Protect Keysight B1507A from computer viruses.
•
If you connect Keysight B1507A to the network, take care to protect it from
computer virus.
Working in Comfort
To optimize your comfort and productivity, it is important that you set up your work area
correctly and use your instrument properly. With that in mind, we have developed some
set-up and use recommendations for you to follow based on established ergonomic
principles. Improper and prolonged use of keyboards and input devices are among those
tasks that have been associated with repetitive strain injury (RSI) to soft tissues in the
hands and arms. If you experience discomfort or pain while using the instrument,
discontinue use immediately and consult your physician as soon as possible. For more
information on RSI you may wish to consult the About Repetitive Strain Injury section.
Please study the recommendations described below. Included there are references to
relevant parts of international standards, regulations and guidelines, such as ISO 9241
and the European Community Display Screen Equipment directive. You may also wish to
consult your employer’s human resources department or other relevant departments for
guidance specific to your company.
About Repetitive Strain Injury
Because your comfort and safety are our primary concern, we strongly recommend that
you use the instrument in accordance with established ergonomic principles and
recommendations. Scientific literature suggests that there may be a relationship between
injury to soft tissues -especially in the hands and arms- and prolonged improper use of
keyboards or other equipment requiring repeated motions of the hands and forearms.
This literature also suggests that there are many other risk factors that may increase the
chance of such injury, commonly called Repetitive Strain Injury.
What is RSI?
Repetitive Strain Injury (RSI -also known as cumulative trauma disorder or repetitive
motion injury) is a type of injury where soft tissues in the body, such as muscles, nerves,
or tendons, become irritated or inflamed. RSI has been a reported problem for those who
perform repetitive tasks such as assembly line work, meatpacking, sewing, playing
musical instruments, and computer work. RSI also has been observed in those who
frequently engage in activities such as carpentry, knitting, housework, gardening, tennis,
windsurfing and lifting children.
What causes RSI?
The specific causes of RSI have not been established. Nevertheless, the incidence of RSI
has been associated with a variety of risk factors, including:
•
Too many uninterrupted repetitions of an activity or motion.
•
Performing an activity in an awkward or unnatural posture.
•
Maintaining static posture for prolonged periods.
•
Failing to take frequent short breaks.
•
Other environmental and psychosocial factors.
In addition, there have been reports associating the occurrence of RSI with the use of
keyboards, mice, and other input devices. Also, certain medical conditions, such as
rheumatoid arthritis, obesity and diabetes, may predispose some people to this type of
injury.
What if I experience discomfort?
If you are experiencing any discomfort, seek professional medical advice immediately.
Typically, the earlier a problem is diagnosed and treated, the easier it is to resolve.
Mice and Other Input Devices
Various aspects of using mice and other input devices may increase your risk of
discomfort or injury. Observing the following recommendations may reduce that risk.
•
Try to keep your hand, wrist, and forearm in a neutral position while using your mouse
or other input device.
•
If you use your thumb to rotate the ball on a trackball or spaceball, keep it in a
relaxed, natural shape, and maintain a neutral posture in your hand, wrist, and
forearm.
•
Hold the mouse gently by draping your fingers over it. Keep your hand relaxed and
fingers loose. Do not grip the mouse tightly.
•
It takes very little pressure or force from your fingers to activate the buttons or scroll
wheel on your mouse, scrolling mouse, trackball, or other input device. Using too
much force can place unnecessary stress on the tendons and muscles in your hands,
wrists, and forearms.
•
If you are using a scrolling mouse, be sure to keep your fingers and hand in a relaxed,
neutral position when activating the scroll wheel. Also, this type of mouse features
software that can minimize the number of mouse movements or button clicks.
•
When using a mouse, trackball, or other input device, position it as close to the
keyboard as possible, and keep it at the same level as you do not have to stretch while
using it.
•
Be sure to keep your mouse and trackball clean. Regular removal of accumulated
dust and dirt helps ensure proper tracking and reduces unnecessary hand and wrist
motions.
In This Manual
This manual describes the product overview, installation information, measurement
operation, and software reference information of Keysight Technologies B1507A.
This manual consists of the following chapters:
1. “Introduction”
This chapter describes basic features of Keysight B1507A.
2. “Installation”
This chapter describes installation and maintenance.
3. “How To Perform Measurement”
This chapter explains how to perform measurement by using Keysight B1507A.
4. “GUI Reference”
This chapter provides the reference information of Keysight Easy Test Navigator
software.
Contents
1. Introduction
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Mainframe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Test Fixture and Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Mainframe Front View. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Mainframe Rear View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
Test Fixture Front View. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
Measurement Terminals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
Test Fixture Rear View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
Easy Test Navigator Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
EasyEXPERT Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18
Utility Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18
Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20
Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22
Measurement Resources . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23
GNDU - Ground Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23
About SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-24
MPSMU - Medium Power SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25
HVSMU - High Voltage SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28
MFCMU - Multi Frequency CMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30
Keysight B1507A User’s Guide, Ed ition 2
Contents
2. Installation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Storaging/Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5
Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6
Inspection and Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
To Inspect Shipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
To Perform Initial Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9
To Connect Selector and Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
To Check Operation of Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
To Change Windows Logon Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
To Change GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
To Enable System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15
Connecting Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
...................................................................
3-pin Inline Package Socket Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
.................................................................
Universal Socket Module Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
.................................................................
Accessories for Connecting a DUT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
.................................................................
2-16
2-17
2-17
2-18
2-18
2-23
2-23
Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
Keysight B1507A User’s Guide, Ed ition 2
Contents
Self-test and Diagnosis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
Before Shipping to Service Center . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
To Make Backup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
To Check Module Slots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
To Collect Equipment and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
3. How To Perform Measurement
How To Perform Capacitance Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Preparing Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Executing Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Setting Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
How To Perform I/V Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Preparing Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Executing Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Monitoring Voltage/Current Waveforms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
Setting Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
How To Calculate Power Loss . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
Calculating Power Loss . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
Extracted Parameters By Power Loss Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
Displaying and Operating Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
How To Select and Display Characteristics Curve . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
How To Use the Marker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-33
4. GUI Reference
Software Palette . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Capacitance Measurement Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Keysight B1507A User’s Guide, Ed ition 2
Contents
GUI Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
Work Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
Automatic Data Save . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
Main Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
Dialog Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
Summary of Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31
I/V Measurement Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
GUI Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Work Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Automatic Data Save . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Main Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dialog Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Summary of Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4-33
4-34
4-35
4-56
4-57
4-59
4-61
4-62
Power Loss Calculation Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
GUI Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Work Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Automatic Data Save . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Main Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dialog Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Summary of Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4-64
4-65
4-66
4-77
4-78
4-80
4-82
4-83
Common GUI Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-85
Module Configuration Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-85
Keysight B1507A User’s Guide, Ed ition 2
1
Introduction
Introduction
This chapter describes the basic functions and features of Keysight B1507A Power
Device Capacitance Analyzer, and consists of the following sections.
•
“Overview”
•
“Mainframe Front View”
•
“Mainframe Rear View”
•
“Test Fixture Front View”
•
“Test Fixture Rear View”
•
“Software”
•
“Accessories”
•
“Options”
•
“Measurement Resources”
1- 2
Keysight B1507A User’s Guide, Ed ition 2
Introduction
Overview
Overview
Keysight B1507A Power Device Capacitance Analyzer provides a complete
solution for the evaluation of power device capacitance (such as input, output, and
reverse transfer capacitances). Intuitive GUI allows you to automatically measure
all capacitances under a wide range of operating voltages. In addition, it makes it
easy to switch back and forth between leakage tests (to verify the device is not
damaged) and capacitance measurements without having to do any recabling.
The B1507A can help identify
substandard devices under actual
circuit operating voltage biases (up
to 3 kV). This is an ideal
complement to conventional IV test
equipment (such as curve tracers)
that do not have either capacitance
or leakage testing capabilities.
The furnished software presents the
user with an intuitive user interface
that makes it easy to characterize
devices without going through any
formal training. Integrated switching
circuitry within the test fixture
supports fully-automated testing,
with the ability to automatically
make the correct connections for all
types of capacitance measurements.
This includes the insertion of DC
blocking capacitors and AC
blocking resistors as well as making
the connections necessary for
correct gate and drain/collector
leakage measurements.
Unique plug-in style device test fixture socket adapter helps to eliminate cable
connection and other human-related errors.
The B1507A contains the mainframe, the test fixture, the connection cables, and the
control software. For the furnished accessories, see Table 1-1.
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Introduction
Overview
Mainframe
Mainframe is equipped with the measurement resources listed below, the 15-inch
touch screen LCD panel, hard disk drive, DVD drive, USB, LAN, GPIB, GPIO
interfaces, and so on. For more information on the measurement resources, see
“Measurement Resources” on page 1-23.
•
HVSMU, high voltage source/monitor unit, 1 ea.
•
MFCMU, multi frequency capacitance measurement unit, 1 ea.
•
MPSMU, medium power source/monitor unit, 1 ea.
•
GNDU, ground unit, 1 ea.
The B1507A provides an intuitive graphical user interface, touch screen LCD,
stylus pen, USB keyboard, and USB mouse for easy and effective measurement and
analysis on the Windows environment, and supports the following B1507A control
software. For more information, see “Software” on page 1-17.
•
Easy Test Navigator software
•
EasyEXPERT software
Test Fixture and Selector
The test fixture is required to connect your device under test (DUT). The following
furnished accessories are available.
•
Socket module for connecting a 3-pin inline package device
•
Universal socket module kit for connecting variety of packaged devices.
•
Accessories for connecting other type of device
•
Connection wire
•
Clip
•
Banana pin adapter
The selector is connected between the mainframe and the test fixture. And it is used
for switching the IV measurement and the CV measurement.
NOTE
Selector may emit a noise sound during operation. However it is not abnormal
status.
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Introduction
Mainframe Front View
Mainframe Front View
This section describes the front view of the mainframe.
6
7
8
9
5
10
11
12
4
1
3
2
1. Standby switch
Turns on/off the mainframe. Pressing the button in the ON state makes it in the
standby state. The green LED lights when it is in the ON state.
NOTE
Opening measurement terminals
Open the measurement terminals at the device side when turning the B1507A on.
Also disconnect the device from the measurement terminals and open the
measurement terminals after the measurement. If you leave the connection with the
device, the device may be damaged by unexpected operations or charge-up of
measurement cables.
2. HDD access indicator
This green LED lights in the access status of HDD or DVD drive. Do not turn
the instrument off during this LED lights.
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Introduction
Mainframe Front View
3. LCD adjustment keys
LCD Off enables or disables the LCD panel. The green LED lights when the
LCD is disabled.
Four keys are available for adjusting brightness. Use + and - to adjust it and
then press Set to fix it. Pressing Cancel instead of Set cancels the adjustment.
4. USB interfaces
USB, 2 ports. For keyboard, mouse, and so on.
To remove USB devices from the instrument, use “Safely Remove Hardware”
on Windows taskbar. If it is not used, the instrument may cause the internal USB
communication error. If the error occurs, turn the instrument off and disconnect
the power cable from it. Leave it about 30 seconds before rebooting it, and
connect the power cable again, and then turn the instrument on.
5. LCD panel
15 inch TFT XGA display, 1024  768 resolution. Displays the Windows screen,
the B1507A control software window, and so on. Touch screen operation is
available when the Touch Panel Off indicator does not light.
To adjust the touch panel, use Microchip TSHARC Control Panel which is
opened by selecting Microchip TSHARC Control Panel from the Start menu.
6. Stop key
Stops the present measurement or source output immediately.
7. High voltage status indicator
This red LED lights when a source channel applies dangerous voltage.
8. Measurement status indicator
This green LED lights when a measurement channel performs measurement.
9. Rotary knob
Works on the execution environment of the B1507A control software. Rotating
the knob moves the marker on the graph, or increases/decreases/changes the
value in the active entry field. Pressing the knob sets or enters the value.
10. Softkeys
Seven softkeys are available for the B1507A control software. Used to select an
alternative for the entry field specified or the dialog box.
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Introduction
Mainframe Front View
11. DVD-R drive
For data backup, software update, and so on. With the option DR1, the drive is
changed to the DVD-ROM drive.
12. Touch Panel Off key
Works on the execution environment of the B1507A control software. Enables
or disables the touch screen operation. The green LED lights when the touch
screen is disabled.
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Introduction
Mainframe Rear View
Mainframe Rear View
This section describes the rear view of the mainframe.
WARNING
To avoid electrical shock and instrument damage, turn the all instruments off
before connecting or disconnecting measurement cable.
Mettez la machine hors tension pour fixer le connecteur ou pour retirer le
connecteur de l’unité centrale.
WARNING
There are potentially hazardous voltages (± 3000 Vdc for HVSMU and ± 100
Vdc for MPSMU) present at the Force, Sense, and Guard terminals of the
instruments. To prevent electrical shock, the following safety precautions must
be observed during the use of instruments.
•
Connect the instrument to an electrical ground (safety ground) by using
three-conductor AC power cable.
•
Connect the mainframe Interlock terminal to the selector Interlock
terminal by using an interlock cable. Also connect the selector Interlock
terminal to the test fixture Interlock terminal by using an interlock cable.
•
Confirm periodically that the interlock function works normally.
•
Before touching the connections on the Force, Sense, and Guard terminals
in the test fixture, turn the instruments off and discharge any capacitors. If
you do not turn the instruments off, complete all of the following items,
regardless of the instrument settings.
•
•
Press the front panel Stop key to set the source output off.
•
Confirm that the front panel High Voltage indicator is not lit.
•
Open the Interlock terminal (open the fixture cover).
•
Discharge any capacitors connected to a measurement resource.
Warn persons working around the instrument about dangerous conditions.
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Introduction
Mainframe Rear View
5
4
3
2
D
C
6
B
A
1
14
13 12
11
10
9 8
7
1. Serial number
You need this serial number when using Keysight Technologies telephone
assistance program.
2. LED status indicator
For troubleshooting. Followings are some examples.
•
Both LEDs turn off:
The instrument is in the standby state and Standby switch is OFF position.
•
One LED turns green:
Power supply works normally.
•
Both LEDs turn orange:
The instrument is in the standby state and Standby switch is ON position.
3. LINE input receptacle
AC power cable is connected to this receptacle.
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Introduction
Mainframe Rear View
4. GPIB interface
Use an Keysight 82357A USB/GPIB interface or Keysight 10833A/B/C/D
GPIB cable to connect to an external computer or equipment.
5. Video output terminal
VGA connector. For an external display. Signal to the built-in LCD is also
applied to this terminal.
6. Measurement Resources
See A to D described later.
7. Circuit Common (
) and frame ground (
) terminals
Normally, connect the terminals together by using the shorting bar. For floating
measurement, remove the shorting bar.
WARNING
If the Circuit Common terminal is not connected to the frame ground terminal
(for floating measurement), a potential shock hazard may present. Do not
touch any of measurement circuit at any time while a floating measurement is
in progress.
CAUTION
For floating measurement, do not apply dangerous voltage to the Circuit Common
terminal. Failure to heed this caution may result in damage to the instrument.
8. Zero Check terminal
Ground reference point of the instrument.
CAUTION
The Zero Check terminal can be used for the service purpose only. For the normal
operation, leave this terminal open and do not connect anything to this terminal.
Connecting anything can damage the instrument.
9. GNDU terminal
0 V constant voltage source. Used for the reference of measurement ground.
Triaxial connector.
10. LAN interface
RJ45 connector.
11. USB interfaces
USB, 2 ports. For keyboard, mouse, or peripherals.
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Introduction
Mainframe Rear View
To remove USB devices from the instrument, use “Safely Remove Hardware”
on Windows taskbar. If it is not used, the instrument may cause the internal USB
communication error.
If the error occurs, turn the instrument off and disconnect the power cable from
it. Leave it about 30 seconds before rebooting it, and connect the power cable
again, and then turn the instrument on.
12. Ext Trig terminals
Two BNC connectors, one for trigger input, and one for trigger output. For
details about the trigger function, see Programming Guide.
13. Digital I/O terminal
Used to connect the test fixture.
14. Interlock terminal
Used to connect the test fixture. If the fixture cover is open, maximum output is
limited to ±42 V.
To verify the interlock function, perform the Interlock Open/Close test on the
Main Frame tab screen of the EasyEXPERT Configuration window.
WARNING
Dangerous voltage, instrument maximum output voltage may appear at Force,
Sense, and Guard terminals if the fixture cover is closed.
A. GNDU/ADC
Ground unit (GNDU) and A/D converter.
B. MPSMU
Medium power source/monitor unit (MPSMU) has two triaxial connectors, force
and sense, for the Kelvin connections.
C. MFCMU
Multi frequency capacitance measurement unit (MFCMU) has four coaxial
connectors, Lcur, Lpot, Hpot, and Hcur, for the four-terminal pair connection.
CAUTION
Do not apply voltage more than ±25 V to the MFCMU input terminals. Failure to
heed this caution may result in damage to the MFCMU.
D. HVSMU
High voltage source/monitor unit (HVSMU) has the force connector.
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Introduction
Test Fixture Front View
Test Fixture Front View
This section describes the front view of the test fixture and selector.
1
2
Selector
3
5
6
7
4
Test fixture
1. Fixture cover
The fixture cover should be closed to avoid electrical shock by touching
measurement terminals and to prevent a device under test from external noise.
When the fixture cover is open, maximum output voltage is limited to ± 42 V.
WARNING
Hazardous voltage, instrument maximum output voltage may appear at the
Force, Sense, and Guard terminals if the fixture cover is closed.
WARNING
Make sure that the cover is closed properly before starting measurement. Do
not perform the measurement when a wire is protruding from the fixture cover.
Assurez-vous que le couvercle est fermé correctement avant de commencer la
mesure. Ne pas effectuer la mesure lorsqu’un câble dépasse du couvercle de
l'appareil.
2. 3-pin inline package socket module
Attach the module to the measurement terminals if your device under test (DUT)
is a 3-pin inline packaged device.
3. Measurement terminals
Connects the connection wire or attaches the socket module for connecting your
DUT. For more information, see “Measurement Terminals” on page 1-13.
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Introduction
Test Fixture Front View
4. Terminal for connecting wrist strap
5. DUT stage (silicon plate)
6. Hazardous voltage status indicator
This red LED lights when a measurement resource applies dangerous voltage.
This indicator is connected to the mainframe via the Interlock terminal and
works with the High Voltage indicator on the mainframe front panel.
Warming labels written in French, German, and Japanese are furnished. Attach
the label to the front panel of the fixture if you need.
WARNING
The red light indicates that hazardous voltage (maximum ± 3000 Vdc) may
appear at measurement terminals. Check this indicator before accessing.
Le témoin rouge indique qu'une tension dangereuse (± 3000 V Max) risque
d’apparaître au niveau des bornes de mesure. Vérifiez cet indicateur avant
d’accéder.
7. Status indicator
Power LED turns yellow when the AC power is applied to the test fixture.
Power LED turns green when the test fixture is ready to use.
IV LED lights when the B1507A is in the IV measurement condition.
CV LED lights when the B1507A is in the capacitance measurement condition.
Measurement Terminals
WARNING
Set the instrument output off before connecting or disconnecting connection
wire.
Press the mainframe front panel Stop key to set the source output off. And
confirm that the mainframe front panel High Voltage indicator is not lit.
WARNING
Do not connect or disconnect your device under test (DUT) while Keysight
B1507A is applying voltage or current. Otherwise, the DUT may be damaged.
When you touch the DUT after measurement, devise a countermeasure of
residual charge and heat to prevent electrical shock and burn. Use glove and
any tool. Also have enough time for discharge and radiation.
Pour éviter toute électrocution et tout risque d'endommagement de l'appareil,
ne retirez pas les câbles pendant le fonctionnement.
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Introduction
Test Fixture Front View
Lorsque vous touchez le MST après la mesure, élaborez une contre-mesure de
la charge résiduelle et du chauffage afin d'éviter tout choc électrique et toute
brûlure. Utilisez des gants et des outils. Prévoyez également du temps pour la
décharge et la radiation.
CAUTION
Never connect the terminals to any output, including circuit common and chassis
ground. Connecting other output may damage the connected one.
NOTE
To use the 3-pin inline package socket module, attach it to the Base/Gate,
Collector/Drain, and Emitter/Source terminals. Then do not use the AC/DC Guard
terminal.
AC/DC Guard
Emitter/Source
Collector/Drain
Base/Gate
±3 kV &Max
If you do not use the 3-pin inline package socket module, connect your device under
test (DUT) to the terminals by using connection wire, clip, adapter, and so on.
1. Base/Gate terminal
Connect the terminal to the gate or base terminal of DUT.
2. Collector/Drain terminal
Connect the terminal to the drain or collector terminal of DUT.
3. Emitter/Source terminal
Connect Force and Sense to the source or emitter terminal of DUT.
4. AC/DC Guard terminal
When the CV LED lights, this terminal works as the AC guard.
When the IV LED lights, this terminal works as the DC guard.
In the most cases, never connect anything to this terminal for safety and to
prevent instrument damage.
5. Chassis common terminal
Use for grounding or shielding.
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Introduction
Test Fixture Rear View
Test Fixture Rear View
WARNING
To avoid electrical shock and instrument damage, turn the all instruments off
before connecting or disconnecting measurement cable.
Mettez la machine hors tension pour fixer le connecteur ou pour retirer le
connecteur de l’unité centrale.
This section describes the rear view of the test fixture and selector. For connecting
the cables, see “To Connect Selector and Test Fixture” on page 2-11.
Input
Interlock
Base/Gate
10
Collector/Drain Emitter/Source
T1
T2
11
Output
9
8
Base/Gate
Collector/Drain
T2
7
Hcur(HC)
Lcur(LC)
±3 kV &Max
±100 V &Max
Emitter/Source AC/DC Guard
T4
±5 V &Max
12
#LINE
SMU
±3 kV &Max
Lpot(LP)
6
HVSMU
Force
(2F)
Hpot(HP)
±25 V &Max
Sense
(1S)
±100 V &Max
Interlock
SMU 2
GNDU
To avoid electrical shock and instrument damage,
do not connect/disconnect the cables during operation.
100-240 V#
50/60 Hz
70 VA Max
Digital I/O
SMU 1
Force
(1F)
T1
T3
T4
Input
MFCMU
Interlock
AC/DC Guard
T3
±3 kV &Max
5
±3 kV &Max
4
3
1
2
1. Power switch
Turns on/off the test fixture.
2. LINE input receptacle
AC power cable is connected to this receptacle.
3. Digital I/O terminal
This terminal is used to connect the Digital I/O cable from the mainframe
Digital I/O terminal.
4. Interlock terminal
This terminal is used to connect the interlock cable from the mainframe
Interlock terminal. The interlock cable is included in the system cable.
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Introduction
Test Fixture Rear View
5. Connectors for connecting the system cable from the mainframe
The following measurement resources in the mainframe are connected by using
the system cable.
•
HVSMU
•
MPSMU
•
GNDU
6. Connectors for connecting the CMU cable
The connectors are used to connect the CMU cable from the MFCMU in the
mainframe.
7. Connectors for connecting the system cable from the test fixture
The connectors are used to connect the system cable for connecting the test
fixture.
8. Earth terminal
Screw terminal for earthing. This terminal is used to connect the earthing wire
for connecting the test fixture. The wire is included in the system cable.
9. Interlock terminal
This terminal is used to connect the interlock cable for connecting the test
fixture. The interlock cable is included in the system cable.
10. Interlock terminal
This terminal is used to connect the interlock cable from the selector.
WARNING
Potentially hazardous voltage may be present at the test fixture measurement
terminals when the Interlock terminals are shorted on the test fixture.
11. Earth terminal
Screw terminal for earthing. This terminal is used to connect the earthing wire
from the selector.
12. Connectors for connecting the system cable from the selector
The connectors are used to connect the system cable from the selector.
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Introduction
Software
Software
Keysight B1507A realizes easy and effective measurement and analysis on the
Windows environment using an intuitive graphical user interface, touch screen
LCD, stylus pen, keyboard, and mouse. The following software is previously
installed or stored in the mainframe.
•
“Easy Test Navigator Software”
•
“EasyEXPERT Software”
•
“Utility Software”
Easy Test Navigator Software
The Easy Test Navigator software provides measurement control software for power
device characterization. It supports various types of measurement task with
ease-of-use and simple operation. Some of the functions are listed below. For more
information on the Easy Test Navigator software, see Chapters 3 and 4.
•
Software included:
•
Capacitance measurement software
•
I/V measurement software
•
Power loss calculation software
•
Ability to automatically accumulate measurement data on the HDD in
exportable formats
•
Oscilloscope view for a pulsed sweep measurement point
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Introduction
Software
EasyEXPERT Software
The EasyEXPERT software is an application program for controlling Keysight
B1500 series. Some of the functions are listed below. For more information, see
Keysight EasyEXPERT User’s Guide.
•
Single measurement, repeat measurement, and append measurement
•
Module selector control
•
Measurement/setup data management by workspace
•
Graph display and analysis with markers, cursors, and lines; and auto analysis
•
Data import/export capability, data output by CSV/XML format, and graph
output by EMF/BMP/GIF/PNG format
•
Maintenance; self-test and self-calibration
•
Remote control function from an external computer
The EasyEXPERT has the following measurement execution environments.
NOTE
•
Application test
•
Classic test
•
Tracer test
•
Quick test
Application Library
The EasyEXPERT contains an application library that is a set of test definitions. The
application test can be performed by selecting a test definition and setting the test
condition for the actual DUT (device under test).
All test definitions are just sample. If the samples damage your devices, Keysight
Technologies is NOT LIABLE for the damage.
Utility Software
Followings are the utility software available for the B1507A. For more information
on the utility software, see Keysight EasyEXPERT User’s Guide Vol. 2.
•
Desktop EasyEXPERT software
EasyEXPERT software runs on an external Windows PC. Not installed.
•
4155/4156 setup file converter
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Introduction
Software
Program for converting the 4155/4156 measurement setup files (file extension
MES or DAT) into EasyEXPERT classic test setup files. This program is stored
in the following folder.
<program folder>\Agilent\B1500\EasyEXPERT\415xC\Conversion\
•
MDM file converter
Program for converting EasyEXPERT data files (file extension XTR or ZTR)
into Keysight IC-CAP MDM files. This program is stored in the following
folder.
<program folder>\Agilent\B1500\EasyEXPERT\IC-CAP Support\MDM\
•
Prober control programs
Execution files for controlling the probers listed below. The files are stored in
the following folder.
<program folder>\Agilent\B1500\EasyEXPERT\Utilities\
Probers supported:
•
•
Cascade Microtech Summit 12K or S300
•
SUSS MicroTec PA200 or PA300
•
Vector Semiconductor VX-2000 or VX-3000
sleep.exe program
Execution file for inserting a wait time in the test execution flow of an
EasyEXPERT application test. This file is stored in the following folder.
<program folder>\Agilent\B1500\EasyEXPERT\Utilities\
NOTE
Notations
<program folder> is as follows. Then, <system drive> is the drive the B1507A
control software has been installed.
For Windows 7 64 bit version, <system drive>:\Program Files (x86)
For Windows 7 32 bit version, Vista, or XP, <system drive>:\Program Files
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Introduction
Accessories
Accessories
Furnished accessories and the available accessories for Keysight B1507A are listed
in Tables 1-1 and 1-2.
Table 1-1
Furnished Accessories
Description
Quantity
System cable between mainframe and selector
1
System cable between selector and fixture
1
CMU cable
1
Digital I/O cable
1
3-pin inline package socket module
1
Universal socket module kit
1
Connection wire, 200 mm
4
Banana pin adapter for connection wire
4
Mini alligator clip
4
USB keyboard
1
USB mouse
1
Stylus pen
1
Power cable
2
Product Reference CD-ROM
1
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Introduction
Accessories
Table 1-2
Available Accessories
Model
Number
Option Item
16444A
Description
Accessories for B1500 series
16444A-001
USB keyboard
16444A-002
USB mouse
16444A-003
Stylus pen
16493G
Digital I/O connection cable
16493G-001
1.5 m length
16493G-002
3 m length
N1300A
CMU connection cable
N1300A-001
1.5 m length
N1300A-002
3 m length
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Introduction
Options
Options
Options available for Keysight B1507A are listed in Table 1-3.
Table 1-3
Options
Option Item
Description
Calibration
B1507A-A6J
ANSI Z540-1-1994 Calibration
B1507A-UK6
Commercial calibration certificate with test data
Documentation
B1507A-ABA
User’s Guide, English
B1507A-ABJ
User’s Guide, Japanese
Drive option
B1507A-DR1
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Replace a built-in DVD-R drive with a read-only DVD drive
Keysight B1507A User’s Guide, Ed ition 2
Introduction
Measurement Resources
Measurement Resources
Keysight B1507A is equipped with the following measurement resources.
•
“GNDU - Ground Unit”
•
“MPSMU - Medium Power SMU”
•
“HVSMU - High Voltage SMU”
•
“MFCMU - Multi Frequency CMU”
See Keysight EasyEXPERT User’s Guide Vol. 1 for the functions available for
Keysight EasyEXPERT software. See Programming Guide for the functions
available for the GPIB remote mode.
GNDU - Ground Unit
The ground unit (GNDU) is a 0 V constant voltage source, and used for the
reference of measurement ground. Also the GNDU can sink up to ±4.2 A, so it is
effective for using MPSMU or HVSMU. Figure 1-1 is a simplified circuit diagram
of GNDU.
Figure 1-1
Simplified GNDU Circuit Diagram
0V
GNDU
Force
Common
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Introduction
Measurement Resources
About SMU
Source/monitor unit (SMU) can apply DC voltage or current, and can measure DC
current or voltage. Figure 1-2 is a simplified SMU circuit diagram.
The MPSMU can perform the following operations:
•
Apply voltage and measures current or voltage
•
Apply current and measures current or voltage
The HCSMU, MCSMU, and HVSMU can perform the following operations:
•
Apply voltage and measures current and/or voltage
•
Apply current and measures current and/or voltage
NOTE
To select the SMU operation mode in the GPIB remote condition, enter the CMM
command.
Figure 1-2
Simplified SMU Circuit Diagram
+A SMU
Force
+
VCommon
Compliance
The SMU has a compliance feature that limits output voltage or current to prevent
damage to the device under test. When the SMU applies voltage, you can specify
current compliance. When the SMU applies current, you can specify voltage
compliance. For details on the compliance, see Keysight EasyEXPERT User’s
Guide Vol. 1.
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Introduction
Measurement Resources
MPSMU - Medium Power SMU
This section describes typical specification of the medium power source/monitor
unit (MPSMU).
Figure 1-3
•
Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W
•
Minimum range: 0.5 V, 1 nA
•
Output/measurement value and resolution: see Table 1-4 to Table 1-7.
MPSMU Output and Measurement Ranges
Current (mA)
100
50
20
Voltage (V)
-40
-100
-20
20
40
-20
100
-50
-100
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Introduction
Measurement Resources
Table 1-4
MPSMU Output Voltage Ranges and Resolutions
Range
0.5 V
Maximum
Current
0 |V| 
0.5 V
25 V
± 100 mA
2V
0  |V| 
2V
100 V
± 100 mA
5V
0  |V| 
5V
250 V
± 100 mA
20 V
0  |V| 
20 V
1 mV
± 100 mA
0  |V|  20 V
2 mV
± 100 mA
20 V < |V|  40 V
2 mV
± 50 mA
5 mV
± 100 mA
20 V < |V|  40 V
5 mV
± 50 mA
40 V < |V|  100 V
5 mV
± 20 mA
40 V
100 V
Table 1-5
Setting
Resolution
Output Value
0  |V| 
20 V
MPSMU Output Current Ranges and Resolutions
Range
Output Value
Setting
Resolution
Maximum
Voltage
1 nA
0  |I|  1.15 nA
50 fA
± 100 V
10 nA
0  |I|  11.5 nA
500 fA
± 100 V
100 nA
0  |I|  115 nA
5 pA
± 100 V
1 A
0  |I|  1.15 A
50 pA
± 100 V
10 A
0  |I|  11.5 A
500 pA
± 100 V
100 A
0  |I|  115 A
5 nA
± 100 V
1 mA
0  |I|  1.15 mA
50 nA
± 100 V
10 mA
0  |I|  11.5 mA
500 nA
± 100 V
100 mA
0  |I|  20 mA
5 A
± 100 V
20 mA < |I|  50 mA
5 A
± 40 V
50 mA < |I|  100 mA
5 A
± 20 V
1- 26
Keysight B1507A User’s Guide, Ed ition 2
Introduction
Measurement Resources
Table 1-6
MPSMU Measurement Voltage Values and Resolutions
Table 1-7
Measurement Resolutions
Measurement
Value a
High Speed ADC
High Resolution ADC
0.5 V
0  |V|  0.55 V
25 V
0.5 V
2V
0  |V|  2.2 V
100 V
2 V
5V
0  |V|  5.5 V
250 V
5 V
20 V
0  |V|  22 V
1 mV
20 V
40 V
0  |V|  44 V
2 mV
40 V
100 V
0  |V|  100 V
5 mV
100 V
Range
MPSMU Measurement Current Values and Resolutions
Measurement Resolutions
Measurement
Value a
High Speed ADC
High Resolution ADC
1 nA
0  |I|  1.15 nA
50 fA
10 fA
10 nA
0  |I|  11.5 nA
500 fA
10 fA
100 nA
0  |I|  115 nA
5 pA
100 fA
1 A
0  |I|  1.15 A
50 pA
1 pA
10 A
0  |I|  11.5 A
500 pA
10 pA
100 A
0  |I|  115 A
5 nA
100 pA
1 mA
0  |I|  1.15 mA
50 nA
1 nA
10 mA
0  |I|  11.5 mA
500 nA
10 nA
100 mA
0  |I|  100 mA
5 A
100 nA
Range
a. This column is applied to the auto ranging or the limited auto ranging.
For fixed ranging, maximum measurement value is Range column value.
Keysight B1507A User’s Guide, Ed ition 2
1- 27
Introduction
Measurement Resources
HVSMU - High Voltage SMU
This section describes typical specification of the high voltage source/monitor unit
(HVSMU).
•
Maximum voltage/current: 3000 V/4 mA, -3000 V/-4 mA, 1500 V/8 mA, or
-1500 V/-8 mA
•
Maximum output power: 12 W
•
Minimum range: 200 V, 1 nA
•
Output/measurement value and resolution: see Table 1-8 and Table 1-9.
CAUTION
Never connect the HVSMU Force and Guard terminals to any output, including
circuit common, chassis ground, or any other measurement resource such as SMU.
Connecting other measurement resource may damage the connected one.
Figure 1-4
HVSMU Output and Measurement Ranges
Current (mA)
8
4
-3000
1
-1500
1500
-1
3000
Voltage (V)
-4
-8
1- 28
Keysight B1507A User’s Guide, Ed ition 2
Introduction
Measurement Resources
Table 1-8
Table 1-9
HVSMU Voltage Ranges and Resolutions
Range
Output Value and
Measurement Value
Setting/
Measurement
Resolution
Maximum Current
|Imax|
200 V
0  |V|  200 V
200 V
8 mA
500 V
0  |V|  500 V
500 V
8 mA
1500 V
0  |V|  1500 V
1.5 mV
8 mA
3000 V
0  |V|  3000 V
3 mV
4 mA
HVSMU Current Ranges and Resolutions
Range
Output Value and
Measurement Value
Setting/
Measurement
Resolution
Maximum Voltage
|Vmax|
1 nAa
0  |I|  1.15 nA
10 fA
3000 V
10 nA
0  |I|  11.5 nA
100 fA
3000 V
100 nA
0  |I|  115 nA
100 fA
3000 V
1 A
0  |I|  1.15 A
1 pA
3000 V
10 A
0  |I|  11.5 A
10 pA
3000 V
100 A
0  |I|  115 A
100 pA
3000 V
1 mA
0  |I|  1.15 mA
1 nA
3000 V
10 mA
0  |I|  8 mA
10 nA
1500 V
0  |I|  4 mA
3000 V
a. DC only
Keysight B1507A User’s Guide, Ed ition 2
1- 29
Introduction
Measurement Resources
MFCMU - Multi Frequency CMU
This section describes typical specification of the multi frequency capacitance
measurement unit (CMU). The CMU performs the impedance measurement and
returns the specified measurement data such as Cp-G.
•
Measurement parameters: See Table 1-10.
•
AC signal, output frequency:
1 kHz to 5 MHz
Setting resolution: 1 mHz (1 kHz to), 10 mHz (10 kHz to), 0.1 Hz (100 kHz to),
or 1 Hz (1 MHz to 5 MHz)
•
AC signal, output level:
10 mVrms to 250 mVrms, 1 mV resolution
•
DC bias:
0 to ± 25 V, using MFCMU internal DC bias
0 to ± 3000 V, using HVSMU and high voltage bias-tee
•
Measurement range:
For the fixed ranging mode, measurement range (impedance range) must be
specified to perform measurement. Table 1-11 shows the available measurement
ranges and the corresponding impedance value. And Figure 1-5 shows the
calculation example of the impedance vs frequency characteristics of a
capacitive load. Use these information to decide the measurement range.
Impedance Z is calculated by the following formula.
Z = 1 / (2 f C)
where f is frequency (Hz) and C is capacitance (F).
1- 30
Keysight B1507A User’s Guide, Ed ition 2
Introduction
Measurement Resources
Table 1-10
Measurement Parameters
Primary Parameter
Secondary Parameter
R (resistance, )
X (reactance, )
G (conductance, S)
B (susceptance, S)
Z (impedance, )
 (phase, radian)
Z (impedance, )
 (phase, degree)
Y (admittance, S)
 (phase, radian)
Y (admittance, S)
 (phase, degree)
Cp (parallel capacitance, F)
G (conductance, S)
Cp (parallel capacitance, F)
D (dissipation factor)
Cp (parallel capacitance, F)
Q (quality factor)
Cp (parallel capacitance, F)
Rp (parallel resistance, )
Cs (series capacitance, F)
Rs (series resistance, )
Cs (series capacitance, F)
D (dissipation factor)
Cs (series capacitance, F)
Q (quality factor)
Lp (parallel inductance, H)
G (conductance, S)
Lp (parallel inductance, H)
D (dissipation factor)
Lp (parallel inductance, H)
Q (quality factor)
Lp (parallel inductance, H)
Rp (parallel resistance, )
Ls (series inductance, H)
Rs (series resistance, )
Ls (series inductance, H)
D (dissipation factor)
Ls (series inductance, H)
Q (quality factor)
Keysight B1507A User’s Guide, Ed ition 2
1- 31
Introduction
Measurement Resources
Table 1-11
Measurement Range for Fixed Ranging Mode
Measurement range (impedance range)
Impedance Z
1 kHz  f  200 kHz
200 kHz < f  2 MHz
2 MHz < f  5 MHz
0  Z < 100 
50 
50 
50 
100   Z < 300 
100 
100 
100 
300   Z < 1 k
300 
300 
300 
1 k  Z < 3 k
1 k
1 k
1 k
3 k  Z < 10 k
3 k
3 k
3 k
10 k  Z < 30 k
10 k
10 k
30 k  Z < 100 k
30 k
30 k
100 k  Z < 300 k
100 k
300 k  Z
300 k
Impedance vs Frequency Characteristics of Capacitive Load, Calculation
Example
Impedance Z
Figure 1-5
10 T7
1 T7
100 G7
10 G7
1 G7
100 M7
10 M7
1 M7
100 k7
10 k7
1 k7
100 7
10 7
17
100 m7
10 m7
1 m7
100 M7
10 M7
1 M7
100 n7
10 n7
1 kHz
300 k7 range
3 k7
range
100 aF
1 fF
10 fF
100 fF
1 pF
10 pF
100 pF
1 nF
10 nF
100 nF
1 MF
10 MF
100 MF
1 mF
10 mF
100 mF
1F
50 7 range
10 kHz
100 kHz
1 MHz
5 MHz
Frequency f
1- 32
Keysight B1507A User’s Guide, Ed ition 2
2
Installation
Installation
This chapter describes how to install Keysight B1507A.
WARNING
•
“Requirements”
•
“Inspection and Installation”
•
“Connecting Accessories”
•
“Maintenance”
•
“Before Shipping to Service Center”
To avoid electrical shock and instrument damage, turn the all instruments off
before connecting or disconnecting measurement cable.
Mettez la machine hors tension pour fixer le connecteur ou pour retirer le
connecteur de l’unité centrale.
WARNING
The mainframe and the test fixture are heavy and require a two person lift.
Le châssis principale et l'équipement de test sont lourds et nécessitent un levage
par deux personnes.
CAUTION
Do not grab the fixture cover when lifting the test fixture.
2- 2
Keysight B1507A User’s Guide, Ed ition 2
Installation
WARNING
There are potentially hazardous voltages (± 3000 Vdc for HVSMU and ± 100
Vdc for MPSMU) present at the Force, Guard, and Sense terminals of the
instruments. To prevent electrical shock, the following safety precautions must
be observed during the use of instruments.
•
Connect the instrument to an electrical ground (safety ground) by using
three-conductor AC power cable.
•
Connect the mainframe Interlock terminal to the selector Interlock
terminal by using an interlock cable. Also connect the selector Interlock
terminal to the test fixture Interlock terminal by using an interlock cable.
•
Confirm periodically that the interlock function works normally.
•
Before touching the connections on the Force, Guard, and Sense terminals
in the test fixture or the shielding box, turn the instruments off and
discharge any capacitors. If you do not turn the instruments off, complete
all of the following items, regardless of the instrument settings.
•
•
Press the front panel Stop key to set the source output off.
•
Confirm that the front panel High Voltage indicator is not lit.
•
Open the Interlock terminal (open the fixture cover or the shielding box
access door).
•
Discharge any capacitors connected to a measurement resource.
Warn persons working around the instruments about dangerous
conditions.
Keysight B1507A User’s Guide, Ed ition 2
2- 3
Installation
Requirements
Requirements
This section describes the requirements for the environment this instrument is used.
•
“Power Requirements”
•
“Operating Environment”
•
“Storaging/Shipping Environment”
•
“Installation Requirements”
•
“Power Cable”
Power Requirements
This instrument can operate from any single-phase AC power source supplying 100/
240 V (±10 %) at 50/60 Hz. The maximum power consumption is shown below.
•
Mainframe: 900 VA
•
Selector: 70 VA
Operating Environment
This instrument must be operated within the following environmental conditions:
Temperature:
+5 C to +40 C
Humidity:
20 % to 70 % RH, no condensation
Altitude:
0 to 2,000 m (6,561 ft.)
Storaging/Shipping Environment
This instrument must be stored/shipped within the following environmental
conditions:
Temperature:
-20 C to +60 C
Humidity:
10 % to 90 % RH, no condensation
Altitude:
0 to 4,600 m (15,092 ft.)
2- 4
Keysight B1507A User’s Guide, Ed ition 2
Installation
Requirements
Installation Requirements
WARNING
Do not operate the instrument in dusty environment, or in the presence of
flammable gasses, corrosive gasses, or fumes.
Ne pas utiliser l’appareil dans un endroit poussiéreux, ou en présence de gaz
inflammables, corrosifs ou de fumée.
•
Environmental conditions for this instrument are documented in the previous
page. In principle, this instrument should only be operated indoors in a
controlled environment.
•
Install the instrument horizontal place then face the roof up.
•
The dimensions of this instrument are shown below. Fan cools the instrument by
drawing air through the sides and exhausting it out the back. The instrument
must be installed in a location that allows sufficient space at the sides and back
of the instrument for adequate air circulation.
•
Mainframe: 420 mm (W)  575 mm (D)  330 mm (H)
•
Selector: 420 mm (W)  575 mm (D)  75 mm (H)
•
Test fixture: 340 mm (W)  345 mm (D)  200 mm (H)
If the airflow is restricted, the internal operating temperature will be higher. This
may reduce the instrument’s reliability, or cause the thermal-protection circuits
to turn the instrument off.
•
Make sure that there is enough space for connecting/disconnecting the power
cable easily.
Keysight B1507A User’s Guide, Ed ition 2
2- 5
Installation
Requirements
Power Cable
WARNING
FIRE HAZARD: Use only the power cable supplied with your instrument.
Using other types of power cable may cause overheating of the power cable,
resulting in fire.
SHOCK HAZARD: The power cable provides the chassis ground through a
third conductor. Be sure to connect to a three-conductor type power outlet with
the correct pin grounded.
RISQUE D’INCENDIE : utilisez uniquement le câble d'alimentation fourni
avec votre appareil. L’utilisation d’autres types de câble d’alimentation peut
provoquer une surchauffe du câble d’alimentation et provoquer un incendie.
RISQUE DE CHOC ÉLECTRIQUE: le câble d’alimentation fournit la masse
du châssis par le biais d’un troisième conducteur. Assurez-vous de connecter la
prise d'alimentation de type trois conducteurs avec la broche correcte mise à la
terre.
NOTE
The detachable power cable may be used as an emergency disconnecting device.
Removing the power cable will disconnect AC input power to the instrument.
Connect the power cable to the IEC 320 connector on the rear of the instrument. If
the wrong power cable was shipped with your instrument, contact your nearest
Keysight Sales and Support Office.
The AC input on the back of your instrument is a universal AC input. It accepts
nominal line voltages in the range of 100 to 240 VAC.
2- 6
Keysight B1507A User’s Guide, Ed ition 2
Installation
Requirements
Option 900
Option 901
Option 902
Option 903
•
•
•
•
•
Plug: BS 1363/A,
250 V, 10 A
PN: 8120-4420
•
Plug: AS/NZS 3112,
250 V, 10 A
PN: 8120-4419
•
Plug: IEC 60277-1,
250 V, 10 A
PN: 8121-1226
•
Plug: NEMA 5-15P,
125 V, 10 A
PN: 8120-6825
Option 904
Option 906
Option 912
Option 917
•
•
•
•
•
Plug: NEMA 6-15P,
250 V, 10 A
PN: 8120-3996
•
Option 918
•
•
Plug: JIS C 8303,
125 V, 12 A
PN: 8121-0743
Plug: SEV 1011,
250 V, 10 A
PN: 8120-4416
•
Plug: SB 107-2-D1,
250 V, 10 A
PN: 8121-1655
•
Plug: IS 1293 and
IS 6538, 250 V, 10 A
PN: 8121-1690
Option 919
Option 920
Option 921
•
•
•
•
Plug: Israel SI 32,
250 V, 10 A
PN: 8121-0724
•
Plug: IRAM 2073,
250 V, 10 A
PN: 8121-0725
•
Plug: CEI 23-16,
250 V, 10 A
PN: 8121-0722
Option 922
Option 923
Option 927
Option 930
•
•
•
•
•
Plug: GB 1002
figure 3, 250 V, 10 A
PN: 8120-8376
•
Plug: SANS 164-1,
250 V, 10 A
PN: 8121-0564
Option 931
Option 932
•
•
•
Plug: CNS 10917-2,
125 V, 10 A
PN: 8121-1635
•
•
Plug: NEMA WD-6,
250 V, 10 A
PN: 8120-0674
•
Plug: NBR 14136,
250 V, 10 A
PN: 8121-1809
Plug: CS 0017,
250 V, 10 A
PN: 8121-1638
Keysight B1507A User’s Guide, Ed ition 2
2- 7
Installation
Inspection and Installation
Inspection and Installation
Do the following when this instrument arrived.
•
“To Inspect Shipment”
•
“To Perform Initial Setup”
•
“To Connect Selector and Test Fixture”
•
“To Check Operation of Selector”
Do the following setup if you need.
•
“To Change Windows Logon Setting”
•
“To Change GPIB Address”
•
“To Enable System Controller”
To Inspect Shipment
1. Before unpacking any components, inspect all boxes for any signs of damage
that might have occurred during shipment, such as:
•
dents
•
scratches
•
cuts
•
water marks
If you suspect any damage, contact Keysight Technologies.
2. When you open the boxes that contain the instrument and accessories, check the
components against the contents lists attached to the boxes.
If anything is missing, contact Keysight Technologies.
After the inspection, move the instrument and accessories to the installation site. For
the requirements for the installation site, see “Requirements” on page 2-4.
2- 8
Keysight B1507A User’s Guide, Ed ition 2
Installation
Inspection and Installation
To Perform Initial Setup
1. Place the mainframe at the installation site.
2. Make sure that the Standby switch is set to off.
3. On the rear panel, connect the Circuit Common terminal to the frame ground
terminal by using a shorting-bar.
4. If you use the furnished USB keyboard and/or USB mouse, connect it to an USB
port of the mainframe.
5. Connect the power cable from the mainframe to an AC power outlet.
6. Open the measurement terminals and press the Standby switch to turn on the
mainframe.
If the mainframe is operating correctly, the power-on self-test is automatically
performed. If problems arise, contact Keysight Technologies.
7. Follow the Windows setup wizard and complete the initial setup.
a. Set the system display language to English. The language must be English. If
you set another language, you must perform the system recovery of the
B1507A. See Keysight EasyEXPERT User’s Guide Vol. 2 for the system
recovery.
b. Set Country or region, Time and currency, and Keyboard layout.
If you use the furnished USB keyboard, the Keyboard layout must be US.
c. Accept the End User License Agreement.
d. Set Time zone, date and time.
If the mainframe has been already connected to your site LAN, you can proceed the
network connection setup. If you connect the mainframe to the network, take care to
protect it from computer virus.
NOTE
Other Windows setup
You can set other setup of Windows after the initial setup. It is your responsibility.
NOTE
Keysight Technologies cannot guarantee the performance and provide compatibility
information for all B1507As under several conditions. If problems arise, perform
Keysight B1507A system recovery.
To perform recovery, see Keysight EasyEXPERT User’s Guide Vol. 2.
Keysight B1507A User’s Guide, Ed ition 2
2- 9
Installation
Inspection and Installation
Users listed in Table 2-1 are available just after the initial setup.
Table 2-1
Users Available Just After the Initial Setup
User Account
Description
Keysight B1500
User
Account for automatic logon. Password is not set to this
account.
KeysightOnly
Account for Keysight service personnel. Do not delete
this account. This account is password protected.
Administrator
Administrator. Password is not set to this account.
You can add users after the initial setup. Add users as you need.
2- 10
Keysight B1507A User’s Guide, Ed ition 2
Installation
Inspection and Installation
To Connect Selector and Test Fixture
WARNING
To avoid electrical shock and instrument damage, turn the all instruments off
before connecting or disconnecting measurement cable.
Mettez la machine hors tension pour fixer le connecteur ou pour retirer le
connecteur de l’unité centrale.
Figure 2-1
B1507A Rear View
Test fixture
System cable 2
Selector
Mainframe
System cable 1
CMU cable
Digital I/O cable
Connect the system cables between the mainframe, selector, and test fixture as
shown in Figure 2-1. Also see Tables 2-2 and 2-3.
1. Connect the System cable between the mainframe and the selector.
2. Connect the CMU cable.
3. Connect the Digital I/O cable.
Keysight B1507A User’s Guide, Ed ition 2
2- 11
Installation
Inspection and Installation
4. Connect the System cable between the selector and the test fixture.
Table 2-2
System Cable Connections between Mainframe and Selector
Mainframe
Label of Cable
Selector
System Cable 1
Interlock
none
none
Interlock
GNDU
GNDU
GNDU
GNDU
Sense
1S
1S
Sense (1S)
Force
1F
1F
Force (1F)
Force
2
2
Force (2F)
HVSMU
SMU2
MFCMU
SMU1
SMU2
SMU
SMU1
CMU Cable
MFCMU
Hpot
HP
Hpot (HP)
Lpot
LP
Lpot (LP)
Hcur
HC
Hcur (HC)
Lcur
LC
Lcur (LC)
Digital I/O Cable
Digital I/O
Table 2-3
none
none
Digital I/O
System Cable Connections between Selector and Test Fixture
Selector
Label of Cable
Test Fixture
System Cable 2
AC/DC Guard
T4
T4
AC/DC Guard
Emitter/Source
T3
T3
Emitter/Source
Base/Gate
T1
T1
Base/Gate
Collector/Drain
T2
T2
Collector/Drain
Earth terminal
none
none
Earth terminal
Interlock
none
none
Interlock
2- 12
Keysight B1507A User’s Guide, Ed ition 2
Installation
Inspection and Installation
To Check Operation of Selector
1. Complete the cable connections described in “To Connect Selector and Test
Fixture” on page 2-11.
2. Connect the power cable from the selector to an AC power outlet.
3. Connect the power cable from the mainframe to an AC power outlet.
4. Open the measurement terminals of the test fixture and close the fixture cover.
5. Set the selector power switch to the ON position to turn on the selector.
6. Press the mainframe Standby switch to turn on the mainframe.
7. After boot up, launch the Capacitance Measurement software.
8. Click the Configuration > Module menu to display the Module Configuration
dialog box.
9. Perform diagnosis of the selector by using the Module Configuration dialog box.
If problems arise, contact Keysight Technologies.
To Change Windows Logon Setting
Windows automatic logon has been enabled initially. If you want to change this
setting, select All Programs > Control Auto Logon from the Start menu. Control
Auto Logon is displayed on the browser. Then click one of the following buttons on
the browser and follow the setup script.
NOTE
•
Enable Auto Logon
•
Disable Auto Logon
If you set a password for the user account Keysight B1500 User, disable the
automatic logon.
Keysight B1507A User’s Guide, Ed ition 2
2- 13
Installation
Inspection and Installation
To Change GPIB Address
When this instrument is shipped from the factory, the GPIB address is set to 17. To
change the GPIB address, perform the following procedure.
1. If the EasyEXPERT software is running, terminate it as shown below:
a. Select the menu function File > Exit on the EasyEXPERT main screen.
b. Click [x] at the upper right corner of the Start EasyEXPERT button.
2. Select All Programs > Keysight IO Libraries Suite > Keysight Connection
Expert from the Start menu. Keysight Connection Expert window appears.
3. At the Instrument I/O on this PC area, select GPIB0, and click the Change
Properties... button. Keysight 82350 PCI GPIB Interface - GPIB0 window
appears.
4. Change the GPIB Address value.
5. Remove the check from the Auto-discover instruments connected to this
interface box.
6. Click the OK button on Keysight 82350 PCI GPIB Interface - GPIB0 window.
7. On the Reboot Required dialog box, click the Reboot Now button, and reboot
the mainframe.
2- 14
Keysight B1507A User’s Guide, Ed ition 2
Installation
Inspection and Installation
To Enable System Controller
To allow this instrument to control external GPIB devices, perform the following
procedure. After the procedure, you cannot control the instrument from an external
computer.
1. If the EasyEXPERT software is running, terminate it as shown below:
a. Select the menu function File > Exit on the EasyEXPERT main screen.
b. Click [x] at the upper right corner of the Start EasyEXPERT button.
2. Select All Programs > Keysight IO Libraries Suite > Keysight Connection
Expert from the Start menu. Keysight Connection Expert window appears.
3. At the Instrument I/O on this PC area, select GPIB0, and click the Change
Properties... button. Keysight 82350 PCI GPIB Interface - GPIB0 window
appears.
4. Set the GPIB Address value to 21 that is the typical address number for the
system controller.
5. Check the System Controller box.
6. Remove the check from the Auto-discover instruments connected to this
interface box.
This disables the automatic device detection. So the Connection Expert cannot
detect the instruments connected to the GPIB interface by itself.
7. Click the OK button on Keysight 82350 PCI GPIB Interface - GPIB0 window.
8. On the Reboot Required dialog box, click the Reboot Now button, and reboot
the mainframe.
NOTE
To Disable System Controller
To disable the system controller, change the steps 4 and 5 for setting the GPIB
Address value to not 21 and removing the check from the System Controller box,
and perform the procedure to the step 8.
Keysight B1507A User’s Guide, Ed ition 2
2- 15
Installation
Connecting Accessories
Connecting Accessories
The test fixture is used to connect your device under test (DUT). The B1507A is
furnished with the following accessories.
WARNING
•
“3-pin Inline Package Socket Module”
•
“Universal Socket Module Kit”
•
“Accessories for Connecting a DUT”
Set the instrument output off before connecting or disconnecting connection
wire.
Press the mainframe front panel Stop key to set the source output off. And
confirm that the mainframe front panel High Voltage indicator is not lit.
WARNING
To prevent electrical shock and DUT damage, do not connect or disconnect the
DUT while the instrument is applying voltage or current.
When you touch the DUT after measurement, devise a countermeasure of
residual charge and heat to prevent electrical shock and burn. Use glove and
any tool. Also have enough time for discharge and radiation.
Pour éviter toute électrocution et tout risque d'endommagement de l'appareil,
ne retirez pas les câbles pendant le fonctionnement.
Lorsque vous touchez le MST après la mesure, élaborez une contre-mesure de
la charge résiduelle et du chauffage afin d'éviter tout choc électrique et toute
brûlure. Utilisez des gants et des outils. Prévoyez également du temps pour la
décharge et la radiation.
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Keysight B1507A User’s Guide, Ed ition 2
Installation
Connecting Accessories
3-pin Inline Package Socket Module
Use the socket module to connect a three-terminal inline packaged device. See the
following simple instruction.
Requirements
Procedure
•
3-pin inline package socket module
•
DUT
1. If the earthing wire is not connected to the socket module, connect it.
2. Attach the socket module directly to the Base/Gate, Collector/Drain, and
Emitter/Source terminals of the test fixture.
3. Connect the earthing wire of the socket module to the chassis common terminal.
4. Set your DUT on the socket.
5. Close the fixture cover and perform measurement.
DUT
Test fixture
Chassis
common
Socket module
WARNING
Hazardous voltage, instrument maximum output voltage may appear at the
measurement terminals if the fixture cover is closed.
WARNING
Open the Guard terminal of the test fixture. Do not connect anything to it.
NOTE
Short plate is furnished with the socket module. It is used for performing the short
correction before the capacitance measurement. Set it on the socket before the short
correction and remove it after the correction.
Keysight B1507A User’s Guide, Ed ition 2
2- 17
Installation
Connecting Accessories
Universal Socket Module Kit
This is a blank module, kind of a do-it-yourself kit for supporting variety of
packaged devices. Using this module kit, you can make one of the following socket
modules.
•
Curve Tracer Test Adapter Socket Module
This is a handmade socket module available for connecting a test adapter
designed for connecting to Tektronix 370B/371B curve tracers. For how to make
this, see “Making the Curve Tracer Test Adapter Socket Module”.
•
Universal Socket Module
This is a handmade socket module available for connecting your test devices.
For how to make this, see “Making the Universal Socket Module”. You need to
prepare a socket capable of dealing with your device package separately.
The contents of this kit are shown in Figure 2-2 and Table 2-4.
You can use their handmade socket modules with the same manner as the 3-pin
Inline Package Socket Module. See “3-pin Inline Package Socket Module”.
Figure 2-2
Universal Socket Module Kit
3
2
1
4
5
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Keysight B1507A User’s Guide, Ed ition 2
Installation
Connecting Accessories
Table 2-4
Parts of Universal Socket Module Kit
No.
Parts
Description
Qty
1
Blank Module
Base of the socket module
1 ea
2
Dummy Board
This is pre-assembled to the blank
module. You can also make a socket
board using this board, instead of a new
blank board.
1 ea
3
Curve Tracer Test
Adapter Socket Board
This is a socket board that is attached to
the blank module. This has a socket for
connecting a test adapter designed for
connecting Tektronix 370B/371B curve
tracers.
1 ea
4
Wire
For internal connections
2m
5
Lug Terminal
For internal connections
14 ea
Making the Curve Tracer Test Adapter Socket Module
Requirements
Procedure
•
T10 Torx screwdriver
•
T15 Torx screwdriver
•
7 mm wrench, 2 ea
•
9 mm wrench
•
Caulking tool for lug terminals, 2.0sq
1. Remove the dummy board from the blank module using a T15 Torx screwdriver.
2. Fix the curve tracer test adapter socket board to the blank module using the
screws and tooth washers you kept when removing the dummy board.
3. Remove the bottom cover of the blank module using a T10 Torx screwdriver.
4. Assemble cables using the wire and lug terminals.
Cut the appropriate length of the wire, tear off the coating of wire ends, and then
secure the lug terminals to the wire ends using a caulking tool.
Keysight B1507A User’s Guide, Ed ition 2
2- 19
Installation
Connecting Accessories
Assemble the necessary cables with referring to the figure below.
Collector/Drain
AC/DC Guard
Blank Module
(Wiring side view)
Emitter/Source
Base/Gate
Curve Tracer Test Adapter
Socket Board
(Wiring side view)
Collector/Drain Sense
(Red)
(Red)
Base/Gate Sense
Emitter/Source Sense
Collector/Drain Force
Base/Gate Force
Emitter/Source Force
5. Connect one ends of all cables to the upside terminals on the blank module.
Remove screws and tooth washers from the terminals, and fix the lug terminal of
the cable end in order of a washer, a lug terminal, a tooth washer, and a screw.
When fixing the lug terminal, secure a screw by a T15 Torx screwdriver with
fixing the bottom nut by a 9 mm wrench. And, pass the cables through the
opening of the blank module.
There is no sense terminal on the blank module.
6. Connect the other ends of the cables to the terminals on the back side of the
socket board.
Remove nuts and tooth washers from the terminals, and fix the lug terminal of
the cable end in order of a lug terminal, a tooth washer, and a nut. When fixing
the lug terminal, secure the top nut by a 7 mm wrench with fixing the bottom nut
by another 7 mm wrench.
Ensure the terminal position of the blank module and the socket board, and
connect the cables correctly.
7. Fix the bottom cover to the blank module using a T10 Torx screwdriver.
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Keysight B1507A User’s Guide, Ed ition 2
Installation
Connecting Accessories
Making the Universal Socket Module
Requirements
•
T10 Torx screwdriver
•
T15 Torx screwdriver
•
9 mm wrench
•
Caulking tool for lug terminals, 2.0sq
Prepare a socket for your test devices, a blank board, tools for mounting the socket,
screws and nut for socket terminals, and so on separately.
For the dimensions and screw holes of a blank board, see Figure 2-3.
Figure 2-3
Dimensions and Screw Holes of Blank Board
7KLFNQHVVPP
Procedure
1. Remove the dummy board from the blank module using a T15 Torx screwdriver.
2. Make a socket board by process a blank board or the dummy board and mount
your device socket onto the board.
WARNING
Make enough space between the socket terminal and the shield/chassis, for
example, about 1 mm for maximum 200 V output and 6 mm for 3000 V, to
prevent discharge and any accident.
Keysight B1507A User’s Guide, Ed ition 2
2- 21
Installation
Connecting Accessories
3. Fix the socket board to the blank module using the screws and tooth washers you
kept when removing the dummy board.
4. Remove the bottom cover of the blank module using a T10 Torx screwdriver.
5. Assemble cables using the wire and lug terminals.
Cut the appropriate length of the wire, tear off the coating of wire ends, and then
secure the lug terminals to the wire ends using a caulking tool.
6. Connect one ends of all cables to the upside terminals on the blank module.
Remove screws and tooth washers from the terminals, and fix the lug terminal of
the cable end in order of a washer, a lug terminal, a tooth washer, and a screw.
When fixing the lug terminal, secure a screw by a T15 Torx screwdriver with
fixing the bottom nut by a 9 mm wrench. And, pass the cables through the
opening of the blank module.
The following shows the positions of the upside terminals in the blank module.
Collector/Drain
AC/DC Guard
Blank Module
(Wiring side view)
Base/Gate
Emitter/Source
7. Connect the other ends of the cables to the terminals on the back side of the
socket board.
If a socket terminal does not have a screw or nut for securing a lug terminal of
the cable, prepare it. Ensure the terminal position of the blank module and the
socket board, and connect the cables correctly.
8. Fix the bottom cover to the blank module using a T10 Torx screwdriver.
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Keysight B1507A User’s Guide, Ed ition 2
Installation
Connecting Accessories
Accessories for Connecting a DUT
Use the connection wire, clip, adapter, and so on to connect a device that cannot be
connected to any socket module.
AC/DC Guard
Emitter/Source
Collector/Drain
Base/Gate
High
Base
Low
Base
Emitter
Collector
±3 kV&Max
Base Low is internally
connected to Emitter.
Requirements
Procedure
•
Connection wire, clip, adapter, and so on. Use the furnished accessories.
•
DUT (other than 3-pin inline package device)
1. Put your DUT on the DUT stage (silicon plate). The device size should be
smaller than approximately 280 mm (W)  140 mm (D)  100 mm (H).
2. Connect your DUT to the measurement terminals of the test fixture by using
connection wire, clip, adapter, and so on.
3. Close the fixture cover and perform measurement.
WARNING
Hazardous voltage, instrument maximum output voltage may appear at the
measurement terminals if the fixture cover is closed.
WARNING
Open the AC/DC Guard terminal to avoid electrical shock, instrument
damage, or DUT damage. Do not connect anything to this terminal which may
have the same potential as the Collector/Drain terminal.
WARNING
Make sure that the cover is closed properly before starting measurement. Do
not perform the measurement when a wire is protruding from the fixture cover.
Assurez-vous que le couvercle est fermé correctement avant de commencer la
mesure. Ne pas effectuer la mesure lorsqu’un câble dépasse du couvercle de
l'appareil.
Keysight B1507A User’s Guide, Ed ition 2
2- 23
Installation
Maintenance
Maintenance
Maintenance should be performed periodically to keep the instrument in good
condition.
Cleaning
Before performing cleaning, turn off the instrument, and disconnect power cable
from the rear panel. Use a dry cloth to clean the external case parts.
To prevent electrical shock, do not perform cleaning when the instrument is turned
on, and do not use a wet cloth.
Self-test and Diagnosis
This instrument provides the following functions to check the operation. Perform
the following functions as necessary. Open the measurement terminals to perform
self-test, self-calibration, or diagnosis.
•
Self-test
•
Self-calibration
•
Diagnosis
If problems arise, contact Keysight Technologies.
NOTE
Interlock Open/Close test and High Voltage LED test
Interlock function limits the maximum output voltage to ± 42 V when the
measurement terminal is touchable. For safety, this function must be checked before
using the instrument after power on at least once a day by performing the diagnosis.
Calibration
Calibration and adjustments must be performed periodically so that the instruments
satisfy the specifications, and keep a good condition. It is recommended to perform
the calibration once a year at least. For the calibration and adjustments, contact
Keysight Technologies. Trained service personnel will perform the calibration and
adjustments.
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Keysight B1507A User’s Guide, Ed ition 2
Installation
Before Shipping to Service Center
Before Shipping to Service Center
Before shipping this instrument to service center, you have to do following:
•
“To Make Backup”
•
“To Check Module Slots”
•
“To Collect Equipment and Accessories”
To Make Backup
If the internal hard disk drive (HDD) is failed, you will lose all data stored in the
HDD. So it is important to make backup constantly.
Before shipping the instrument to the service center, make backup of data in the
HDD. And keep the backup media in trust. You may need to perform data recovery
of the instrument returned from the service center.
If the HDD is replaced, the instrument will be returned with the latest revision of the
software.
To Check Module Slots
Do not remove the plug-in module from the mainframe. The instrument must be
shipped with all modules. The module cannot be repaired or calibrated without the
mainframe.
If a module is removed and installed, the specifications are not guaranteed. The
specifications are guaranteed after the calibration is performed at Keysight
Technologies service center.
To Collect Equipment and Accessories
The mainframe, test fixture, and all connection cables are required for servicing and
must be shipped to the service center. For details, contact the service center.
WARNING
To prevent electrical shock, turn off the instrument and remove the power
cable before removing the connection cables.
Mettez la machine hors tension pour fixer le connecteur ou pour retirer le
connecteur de l’unité centrale.
Keysight B1507A User’s Guide, Ed ition 2
2- 25
Installation
Before Shipping to Service Center
2- 26
Keysight B1507A User’s Guide, Ed ition 2
3
How To Perform Measurement
How To Perform Measurement
This chapter describes how to measure the power devices by using Keysight
B1507A and Keysight Easy Test Navigator Software, and consists of the following
sections:
•
How To Perform Capacitance Measurement
This section describes how to perform the measurement using the capacitance
measurement software.
•
How To Perform I/V Measurement
This section describes how to perform the measurement using the I/V
measurement software.
•
How To Calculate Power Loss
This section describes how to calculate the power loss using the power loss
calculation software.
3- 2
Keysight B1507A User’s Guide, Ed ition 2
How To Perform Measurement
How To Perform Capacitance Measurement
How To Perform Capacitance Measurement
This section describes how to perform a measurement using the capacitance
measurement software and consists of the following sub-sections:
Figure 3-1
•
Preparing Measurement
•
Executing Measurement
•
Setting Parameter
Capacitance Measurement Software
Keysight B1507A User’s Guide, Ed ition 2
3- 3
How To Perform Measurement
How To Perform Capacitance Measurement
Preparing Measurement
WARNING
Set the instrument output off before connecting or disconnecting connection
wire.
Press the mainframe front panel Stop key to set the source output off. And
confirm that the mainframe front panel High Voltage indicator is not lit.
WARNING
To prevent electrical shock and DUT damage, do not connect or disconnect the
DUT while the instrument is applying voltage or current.
When you touch the DUT after measurement, devise a countermeasure of
residual charge and heat to prevent electrical shock and burn. Use glove and
any tool. Also have enough time for discharge and radiation.
Step 1. Prepare the test fixture and accessories to connect your device under test (DUT).
And, connect the test fixture and 3-pin inline package socket module or other
accessories that is adequate for your DUT.
For more information on the test fixture and its accessories, see the following
sections:
•
“To Connect Selector and Test Fixture” on page 2-11
•
“3-pin Inline Package Socket Module” on page 2-17
•
“Universal Socket Module Kit” on page 2-18
•
“Accessories for Connecting a DUT” on page 2-23
Step 2. Turn the instrument on. 
Don’t connect your DUT to the test fixture at this time.
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Keysight B1507A User’s Guide, Ed ition 2
How To Perform Measurement
How To Perform Capacitance Measurement
Executing Measurement
NOTE
This section explains the procedure using an example that selects MOSFET as a
device type of DUT and Ciss, Coss, Crss as a measurement item.
Execute a measurement as follows:
Step 1. On the software palette, click the Capacitance Measurement icon
Capacitance Measurement software (Figure 3-1) opens.
. The
Step 2. At the Setup area in work area, select a device type of your DUT and a measurement
item to be measured.
•
Device Type
Select a device type from the Device Type drop-down list.
This example selects MOSFET.
•
Measurement Item
From the radio buttons located on the right of a Device Type selection, which is
MOSFET in this example, select a measurement item to be measured.
This example selects Ciss, Coss, Crss.
For information on the available device types and measurement items, see Table 3-1
on page 3-9
By selecting a device type and measurement item, the setup items displayed in the
Setup area are automatically switched.
Keysight B1507A User’s Guide, Ed ition 2
3- 5
How To Perform Measurement
How To Perform Capacitance Measurement
Step 3. Enter the measurement frequency in the Frequency of General settings located at the
left part of Setup area.
By clicking the Details button, the area expands to set more detail conditions.
For more information on setting items, see “Setup” on page 4-6.
Step 4. Enter the bias voltage value in the Bias of Base/Gate Voltage Bias at the center of
Setup area.
Step 5. Enter or select the voltage sweep conditions in the Collector/Drain Voltage Sweep at
the right of Setup area.
Start
Enter a start voltage value of sweep.
Stop
Enter a stop voltage value of sweep.
Sweep Mode
Select a sweep mode.
LinearSingle
One-way linear sweep from the Start to the
Stop.
LogSingle
One-way logarithmic sweep from the Start
to the Stop.
LinearDouble
Linear-sweep from the Start to the Stop and
then return linear-sweep from the Stop to
the Start.
LogDouble
Logarithmic-sweep from the Start to the
Stop and then return logarithmic-sweep
from the Stop to the Start.
By clicking the Details button, the area expands to set more detail conditions.
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Keysight B1507A User’s Guide, Ed ition 2
How To Perform Measurement
How To Perform Capacitance Measurement
For more information on setting items, see “Setup” on page 4-6.
Step 6. Click the Start Calibration... button in the toolbar to measure the calibration data of
measurement path.
Follow the instruction displayed on the dialog to measure the open and short
calibration data.
If you have measured and saved the calibration data of measurement path, click the
Select Calibration Data... button in the toolbar to select and load the stored
calibration data.
Step 7. Set your DUT on the test fixture and click the Start Measurement button
start a measurement.
to
You can stop the measurement by clicking the Stop Measurement button
during a measurement execution.
NOTE
If your DUT is diode, connect the cathode of your DUT to the Collector/Drain
terminal of the test fixture and the anode of your DUT to the Emitter/Source
terminal of the test fixture.
Step 8. Click the Characteristics tab to display the Characteristics area.
After a measurement is finished, a measured capacitance characteristics curve is
displayed on the Characteristics area. This example shows the Ciss, Coss, and Crss,
characteristics curves.
Keysight B1507A User’s Guide, Ed ition 2
3- 7
How To Perform Measurement
How To Perform Capacitance Measurement
For the operation on the graph display, see “Displaying and Operating Graph” on
page 3-32.
3- 8
Keysight B1507A User’s Guide, Ed ition 2
How To Perform Measurement
How To Perform Capacitance Measurement
Setting Parameters
Table 3-1
Device Type
MOSFET
IGBT
Available Device Types and Measurement Items
Measurement
Item
Description
Ciss
Ciss (Input capacitance) - Vds characteristics
Coss
Coss (Output capacitance) - Vds characteristics
Crss
Crss (Feedback capacitance) - Vds characteristics
Ciss, Coss, Crss
Ciss, Coss, and Crss characteristics
Cgs
Cgs (Gate to Source capacitance) - Vds characteristics
Cds
Cds (Drain to Source capacitance) - Vds characteristics
Cgd
Cgd (Gate to Drain capacitance) - Vds characteristics
Cgs, Cds, Cgd
Cgs, Cds, and Cgd characteristics
Rg
Rg (Gate resistance) - Vgs characteristics
Cox
Cox (Gate oxide film capacitance) - Vgs characteristics
Cies
Cies (Input capacitance) - Vce characteristics
Coes
Coes (Output capacitance) - Vce characteristics
Cres
Cres (Feedback capacitance) - Vce characteristics
Cies, Coes, Cres
Cies, Coes, and Cres characteristics
Cge
Cge (Gate to Emitter capacitance) - Vce characteristics
Cce
Cce (Collector to Emitter capacitance) - Vce characteristics
Cgc
Cgc (Gate to Collector capacitance) - Vce characteristics
Cge, Cce, Cgc
Cge, Cce, and Cgc characteristics
Rg
Rg (Gate resistance) - Vge characteristics
Keysight B1507A User’s Guide, Ed ition 2
3- 9
How To Perform Measurement
How To Perform Capacitance Measurement
Device Type
Measurement
Item
Description
Diode
CT
Total capacitance at reverse bias to bias voltage
characteristics
Generic
Sweep Voltage
Between
Terminal 2-3
Cp-G model capacitance between Collector/Drain terminal
and Emitter/Source terminal to Vce/Vds characteristics
Sweep Voltage
Between
Terminal 1-3
Cs-Rs model capacitance between Base/Gate terminal and
Emitter/Source terminal to Vbe/Vgs characteristics
3- 10
Keysight B1507A User’s Guide, Ed ition 2
How To Perform Measurement
How To Perform I/V Measurement
How To Perform I/V Measurement
This section describes how to perform a measurement using the I/V measurement
software and consists of the following sub-sections:
Figure 3-2
•
Preparing Measurement
•
Executing Measurement
•
Monitoring Voltage/Current Waveforms
•
Setting Parameter
I/V Measurement Software
Keysight B1507A User’s Guide, Ed ition 2
3- 11
How To Perform Measurement
How To Perform I/V Measurement
Preparing Measurement
WARNING
Set the instrument output off before connecting or disconnecting connection
wire.
Press the mainframe front panel Stop key to set the source output off. And
confirm that the mainframe front panel High Voltage indicator is not lit.
WARNING
To prevent electrical shock and DUT damage, do not connect or disconnect the
DUT while the instrument is applying voltage or current.
When you touch the DUT after measurement, devise a countermeasure of
residual charge and heat to prevent electrical shock and burn. Use glove and
any tool. Also have enough time for discharge and radiation.
Step 1. Prepare the test fixture and accessories to connect your device under test (DUT).
And, connect the test fixture and, 3-pin inline package socket module or other
accessories that is adequate for your DUT.
For more information on the test fixture and its accessories, see the following
sections:
•
“To Connect Selector and Test Fixture” on page 2-11
•
“3-pin Inline Package Socket Module” on page 2-17
•
“Universal Socket Module Kit” on page 2-18
•
“Accessories for Connecting a DUT” on page 2-23
Step 2. Turn the instrument on and then connect your DUT to the test fixture.
If your DUT is diode, connect a cathode terminal of your DUT to the
Collector/Drain terminal of test fixture and a anode terminal of your DUT to the
Emitter/Source terminal of test fixture.
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Keysight B1507A User’s Guide, Ed ition 2
How To Perform Measurement
How To Perform I/V Measurement
Executing Measurement
NOTE
This section explains the procedure using an example that selects MOSFET as a
device type of DUT and ID-VDS as a measurement item.
Execute a measurement as follows:
Step 1. On the software palette, click the I/V Measurement icon
Software (Figure 3-2) opens.
. The I/V Measurement
Step 2. At the Setup area in work area, select a device type and measurement item to be
measured.
•
Device Type
From the Device Type drop-down list, select a device type.
This example selects MOSFET.
•
Measurement Item
From the radio buttons located on the right of a Device Type selection, which is
MOSFET in this example, select a measurement item to be measured.
This example selects ID-VDS.
For information on the available device types and measurement items, see Table 3-2
on page 3-20
By selecting a device type and measurement item, the setup items displayed in the
Setup area are automatically switched.
Keysight B1507A User’s Guide, Ed ition 2
3- 13
How To Perform Measurement
How To Perform I/V Measurement
Step 3. Enter or select the setup conditions for the gate of MOSFET in Gate/Base Voltage
Pulse Step at the center of Setup area.
•
Selecting Step Mode
From the Step Mode drop-down list, select a step mode of pulse voltage output.
LinearSingle
Outputs voltage level changes from the Start value to the
Stop value at equal intervals.
ListSingle
Specify the output voltages of each step in the List.
Each step voltage in the List will be output in order from top
to bottom.
This example selects the ListSingle.
•
To change step values
Click the value in the List and you can change it to new value.
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Keysight B1507A User’s Guide, Ed ition 2
How To Perform Measurement
How To Perform I/V Measurement
•
To insert new step value
Select the step value immediately after where you want to insert new step value
and click the Insert button
.
•
To change an output order of step values
Click the Move Down and the Move Up buttons
order of the selected step value.
•
to move down or up an
To delete a step value
Click the Delete button
to delete the selected step value.
By clicking the Details button, the area expands to set more detail conditions.
For more information on setting items, see “Setup” on page 4-35.
Step 4. Enter or select the setup conditions for the drain of MOSFET in Drain/Collector
Voltage Pulse Sweep at the right side of Setup area.
Select or specify a sweep mode, a sweep start value, a sweep stop value, and a
voltage compliance.
•
Sweep Mode
Select a sweep mode from the Sweep Mode drop-down list.
LinearSingle
One-way linear sweep from the Start (sweep start value) to
the Stop (sweep stop value).
LogSingle
One-way logarithmic sweep from the Start (sweep start
value) to the Stop (sweep stop value).
LinearDouble
Linear-sweep from the Start (sweep start value) to the Stop
(sweep stop value) and then return linear-sweep from the
Stop to the Start.
Keysight B1507A User’s Guide, Ed ition 2
3- 15
How To Perform Measurement
How To Perform I/V Measurement
LogDouble
•
Logarithmic-sweep from the Start (sweep start value) to the
Stop (sweep stop value) and then return logarithmic-sweep
from the Stop to the Start.
Start、Stop
Enter the sweep start value in the Start and the sweep stop value in the Stop.
•
Voltage Compliance
Enter the voltage compliance value in the Voltage Compliance.
If the output voltage of measurement unit connected to a drain terminal is more
than this value, a measurement unit stops the output.
By clicking the Details button, the area expands to set more detail conditions.
For more information on setting items, see “Setup” on page 4-35.
Step 5. Enter the setup conditions for the pulse output in General settings at the left side of
Setup area.
Auto Period
Automatic adjustment for the pulse period.
To enable this function, mark the check box.
Pulse Period
Pulse period.
However, if the Auto Period function is enabled, the pulse
period is automatically adjusted to a minimum period
corresponding to the pulse width.
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Keysight B1507A User’s Guide, Ed ition 2
How To Perform Measurement
How To Perform I/V Measurement
Step 6. Click the Connections tab to display Connections area.
At Connections area, you can confirm a measurement circuit.
Step 7. Click the Start Measurement tool button
Or, click the Repeat Measurement tool button
to start a measurement.
to repeat a measurement.
After starting a measurement, you can stop a measurement by clicking the Stop
Measurement tool button .
Step 8. Click the Characteristics tab to display the Characteristics area.
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How To Perform Measurement
How To Perform I/V Measurement
After a measurement is finished, a measured I/V characteristics curve is displayed
on the Characteristics area. This example shows an ID-VDS characteristics curve.
For the operation on the graph display, see “Displaying and Operating Graph” on
page 3-32.
Monitoring Voltage/Current Waveforms
he I/V measurement software can monitor both voltage and current waveforms for
the measurement channels at the specified measurement point on the characteristic
trace when the measurement is in the pulse mode operation.
Step 1. Click the Characteristics tab to display the Characteristics area.
Step 2. Click the Oscilloscope View
button to display the Oscilloscope View area.
Step 3. Execute the I/V measurement according to the steps described in “Executing
Measurement” on page 3-13.
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How To Perform Measurement
How To Perform I/V Measurement
Step 4. Move the trace marker on the Characteristics graph to specify the observation point.
Step 5. Click the Start Measurement tool button
Or, click the Repeat Measurement tool button
to start a measurement.
to repeat a measurement.
After starting a measurement, you can stop a measurement by clicking the Stop
Measurement tool button .
After measuring the specified point, the observation point on the characteristics
graph is identified by a monitor marker (green frame), and the time domain
waveform(s) is displayed on this area.
In the case of the repeat measurement, you can move the trace marker to change the
observation point during the measurement. After measuring the changed point, the
monitor maker moves to the point and the waveforms are updated.
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How To Perform Measurement
How To Perform I/V Measurement
Step 6. Mark the check boxes for the voltage or current data names the measurement
channels that you want to monitor.
Setting Parameter
Table 3-2
Device Type
MOSFET
IGBT
Diode
Available Device Types and Measurement Items
Measurement
Item
Description
ID-VDS
ID-VDS output characteristics
ID-VGS
ID-VGS transmission characteristics
RDS-ID
RDS (Drain to Source resistance) - ID characteristics
VGS(th)
Gate to Source Threshold voltage
VDS-VGS
VDS-VGS characteristics
RDS-VGS
RDS (Drain to Source resistance) - VGS characteristics
IDSS
Drain leak current - VDS characteristics
IGSS
Gate leak current - VGS characteristics
IS-VSD
Forward current of body diode - VSD characteristics
IC-VCE
IC-VCE output characteristics
IC-VGE
IC-VGE transmission characteristics
VGE(th)
Gate to Emitter Threshold voltage
VCE-VGE
VCE-VGE characteristics
VCE(sat)
VCE(sat) (Collector to Emitter saturation voltage) - IC
characteristics
ICES
Collector leak current - VCE characteristics
IGES
Gate leak current - VGE characteristics
IF-VF
Forward characteristics of free wheel diode
IF-VF
Forward bias current - voltage characteristics
IR-VR
Reverse bias current - voltage characteristics
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How To Perform Measurement
How To Perform I/V Measurement
Device Type
Generic2T
Generic
Measurement
Item
Description
Conduction
Conduction resistance characteristics
Isolation
Isolation characteristics
Free setup on the measurement units connection and
measurement conditions.
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How To Perform Measurement
How To Calculate Power Loss
How To Calculate Power Loss
This section describes how to calculate the power loss at a switching device using
the power loss calculation software and consists of the following sub-sections:
Figure 3-3
•
Calculating Power Loss
•
Extracted Parameters By Power Loss Calculation
Power Loss Calculation Software
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How To Perform Measurement
How To Calculate Power Loss
The power loss calculation software calculates the power loss from the drive
conditions and the device characteristics parameters of DUT.
There are the following two ways to specify the parameters for calculation:
•
Specify the parameter values from the datasheet of DUT.
If you want to calculate the power loss of DUT at the different drive conditions
or there are the parameters that are not specified in the datasheet, you may
specify the predicted values.
•
Measure the switching device by the I/V measurement software, capacitance
measurement software, and gate charge measurement software at your desired
drive conditions and store the measurement data. Then, the power loss
calculation software read the stored measurement data and extract the required
drive conditions and characteristics parameters for power loss calculation.
This section explains the procedure that specify the measurement data file of DUT.
Calculating Power Loss
Step 1. Prepare the measurement data
The power loss calculation software uses the following measurement data files to
calculate the power loss. So, measure the DUT at your desired drive conditions and
save the measured data.
•
Measurement data file of I/V measurement software
Prepare a measurement data file that measured either one of the following
measurement item.
For MOSFET device type,
•
ID-VDS
•
RDS-ID
•
VDS-VGS
•
RDS-VGS
For IGBT device type,
•
IC-VCE
•
VCE(sat)
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How To Perform Measurement
How To Calculate Power Loss
•
•
VCE-VGE
Measurement data file of capacitance measurement software
Prepare the measurement data files that measured the following measurement
items.
For MOSFET device type,
•
Rg
•
Ciss, Coss, Crss (Coss or Crss)
For IGBT device type,
•
•
Rg
•
Cies, Coes, Cres (Coes or Cres)
Measurement data file of gate charge measurement software
If you have a B1506A Power Device Analyzer for Circuit Design, prepare a
measurement data file that measured any measurement item using B1506A’s
gate charge measurement software.
Step 2. On the software palette, click the Power Loss Calculation icon
Calculation software (Figure 3-3) opens.
. The Power Loss
Step 3. Select the assumed load type to calculate the power loss in the Conditions area on
the work area.
Inductive
Inductive load
Resistive
Resistive load
Step 4. At the Inputs area in work area, select a device type.
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How To Calculate Power Loss
From the Device Type drop-down list, select a device type.
This example selects MOSFET.
Step 5. Specify the measurement data files to be used for power loss calculation and load
them.
1. Specify the measurement data file of the I/V measurement software to load.
a. Click the Output Characteristics tab at the right of work area to display the
Output Characteristics area.
b. Click the Load Measurement Data button
Output Characteristics area.
at the upper-left corner of the
After the dialog box opens, specify the measurement data of I/V
measurement software.
The characteristics graph of the loaded measurement item is displayed.
2. Specify the Rg measurement data file of the capacitance measurement software
to load.
a. Click the Gate Resistance tab to display the Gate Resistance area.
b. Click the Load Measurement Data button
Gate Resistance area.
Keysight B1507A User’s Guide, Ed ition 2
at the upper-left corner of the
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How To Perform Measurement
How To Calculate Power Loss
After the dialog box opens, specify the Rg measurement data of capacitance
measurement software.
The loaded Rg characteristics graph is displayed.
3. Specify the “Ciss, Coss, Crss” measurement data file of the capacitance
measurement software to load.
a. Click the Capacitance tab to display the Capacitance area.
b. Click the Load Measurement Data button
Capacitance area.
at the upper-left corner of the
After the dialog box opens, specify the “Ciss, Coss, Crss” measurement data
of capacitance measurement software.
The loaded “Ciss, Coss, Crss” characteristics graph is displayed.
4. Specify the measurement data file of the gate charge measurement software to
load. (data measured by B1506A’ gate charge measurement software)
a. Click the Gate Charge tab to display the Gate Charge area.
b. Click the Load Measurement Data button
Gate Charge area.
at the upper-left corner of the
After the dialog box opens, specify the measurement data of gate charge
measurement software.
The gate charge characteristics graph of the loaded measurement item is
displayed.
For the drive conditions and the device parameters for power loss calculation that
extracted from the loaded measurement data, see “Extracted Parameters By Power
Loss Calculation” on page 3-30”.
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How To Calculate Power Loss
You can confirm or change the drive conditions for power loss calculation by
clicking the Drive Conditions tab at the left of work area.
Also, you can confirm or change the device parameters for power loss calculation by
clicking the Device Parameters tab.
Step 6. Select a drive condition or device parameter to be swept and specify the sweep
condition.
If you select a drive condition parameter to be swept, click the Drive Condition tab
and mark the check box of the desired drive parameter.
If you select a device parameter to be swept, click the Device Parameters tab and
mark the check box of the desired device parameter.
This example select a switching frequency to be swept.
1. Click the Drive Conditions tab and mark the check box of the Switching
Frequency parameter to select.
2. Specify the sweep condition in the Value column.
Start
Sweep start value
Stop
Sweep stop value
Sweep Mode
Sweep mode
Log (logarithmic sweep) or Linear (linear sweep)
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How To Perform Measurement
How To Calculate Power Loss
Number of
Step
Number of sweep steps
Step 7. Specify the drive conditions that are not extracted from the loaded measurement
data.
1. Click the Drive Conditions tab at the left of work area to display the Drive
Conditions area.
2. Specify the following drive conditions that are not extracted from the
measurement data.
Switching
Frequency
Switching frequency
In this example, this parameter already specified by Step.4.
Rg(ext)
Gate input resistance in the external drive circuit
Irms, D
Irms: Effective drain current (the root mean square of the
load current)
D: Duty cycle.
Specify Irms or D. 
The relation between Irms and D is Irms = Id  D1/2.
Step 8. Click the Start button
of toolbar to start the power loss calculation.
Step 9. After the calculation is completed, the list of calculated values and the trand chart
are displayed as shown below.
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How To Calculate Power Loss
•
List of Calculated Results
The following calculated data are displayed in list format.
Index
Index number of sweep step.
Sweep Parameter
Sweep parameter and its step values.
In this example, F values are listed as the sweep
parameter.
Conduction Loss
Calculated conduction loss
Coss (or Coes) Loss
Calculated output capacitance loss
Switching Loss
Calculated switching loss
Driving Loss
Calculated driving loss
Total Power Loss
Sum total of the conduction loss, switching loss, and
driving loss.
For the calculation formula for each power loss, see “Results” on page 4-74.
•
Trend Chart
The sweep parameter is assigned to X-axis, and the conduction loss, output
capacitance loss, switching loss, and driving loss are assigned to Y-axis and
accumulated in this order.
You can change the minimum and maximum values on the X and Y-axises by
clicking the value.
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How To Perform Measurement
How To Calculate Power Loss
Extracted Parameters By Power Loss Calculation
Table 3-3
Measurement Data and Extracted Drive Conditions and Device Parameters for
Power Loss Calculation (MOSFET)
Measurement Data
Measurement Software
Measurement Item
Extracted
Drive
Conditions
Extracted
Device
Parameters
I/V Measurement
ID-VDS, RDS-ID,
RDS-VGS, or
VDS-VGS
Rds(on)a
Capacitance Measurement
Rg
Rgb
Crss
Qswc
Gate Charge Measurement
(by B1506A)
Any measurement
items
Vgs(on),
Vgs(off), 
Id,
Vds
Qg(on),
Qg(off),
Qsw,
Vgs(pl)
a. Extracted from Vgs(on)
b. Extracted from Vgs(off)
c. Extracted from Vgs(off) and Vds(off)
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How To Perform Measurement
How To Calculate Power Loss
Table 3-4
Measurement Data and Extracted Drive Conditions and Device Parameters for
Power Loss Calculation (IGBT)
Measurement Data
Measurement Software
Measurement Item
Extracted
Drive
Conditions
Extracted
Device
Parameters
I/V Measurement
IC-VCE, VCE(sat),
or VCE-VGE
Vce(sat)a
Capacitance Measurement
Rg
Rgb
Cres
Qswc
Gate Charge Measurement
(by B1506A)
Any measurement
items
Vge(on),
Vge(off), 
Ic,
Vce
Qg(on),
Qg(off),
Qsw,
Vgs(pl)
a. Extracted from Vge(on)
b. Extracted from Vge(off)
c. Extracted from Vge(off) and Vce(off)
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How To Perform Measurement
Displaying and Operating Graph
Displaying and Operating Graph
This section describes the common graph operation within the measurement
softwares and consists of the followings:
•
How To Select and Display Characteristics Curve
•
How To Use the Marker
How To Select and Display Characteristics Curve
Step 1. Select the characteristics curves to display.
The check boxes for the available characteristics are displayed at the upper left on
the graph area.
Mark the check boxes for the desired characteristics to display.
You can select the multiple characteristics to display.
Step 2. Select the line type of curve.
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Displaying and Operating Graph
By the radio buttons at the top of graph area, you can select the line type of curve
from the Line, Dot, or Line&Dot.
Step 3. Change the minimum and maximum values of X and Y-axises
If the auto scale mode button
is selected, the X and Y-axises of the graph are
automatically changing to fit the measured data during measurement execution.
If the fixed scale mode button
is selected and the auto-scale button
is
clicked, the X and Y-axises of the graph are changed to fit the measured data.
Or, you can change the minimum and maximum values of X and Y-axises by
clicking the value.
How To Use the Marker
You can use the domain marker and/or trace marker to read the value on the curve.
The following table shows the measurement softwares and their furnished marker
function.
Marker
Description
Applied Software
Domain Marker
Vertical line marker.
The marker moves in the direction of
X and you can read the X-axis value
of the marker and Y-axis values of
the intersections of marker and
characteristics curves.
I/V measurement,
Capacitance measurement
Trace Marker
Circle marker.
The marker moves on a
characteristics curve and you can
read the X and Y-axis values of the
marker.
I/V measurement,
Capacitance measurement 
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How To Perform Measurement
Displaying and Operating Graph
Using the domain marker
Step 1. If the trace marker is displayed, click the trace marker mode button
the domain marker mode
.
to change to
Step 2. Marker A (Vertical line) is displayed.
To move the marker, use the rotary nob or mouse.
The MARKER(A): at the upper left of graph area shows the X-axis value of marker A
and the Y-axis value of the intersection of the marker and each characteristics curve
is displayed at the right of characteristics curve name.
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Displaying and Operating Graph
Step 3. If the check box at the left of the MARKER(B): is marked, the marker B (vertical dot
line) is displayed.
The following information is displayed at the top of graph area:
MARKER(B):
X-axis value of marker B
()
X-axis value of marker B - X-axis value of marker A
The Y-axis values of the intersection of the markers and each characteristics curve,
and the differences of Y-axis values between the mark A interaction and the mark B
interaction (B-A) are displayed at the right of characteristics curve name.
Using the trace marker
Step 1. If the domain marker is displayed, click the domain marker mode button
change to the trace marker mode .
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How To Perform Measurement
Displaying and Operating Graph
Step 2. The trace marker (circle) is displayed.
You can move the trace marker on the characteristics curve using the rotary nob or
mouse.
The MARKER: at the upper left of graph shows the X-axis value of the marker and
the Y-axis value is displayed at the right of the characteristics curve name.
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4
GUI Reference
GUI Reference
Keysight Easy Test Navigator software provides dedicated measurement software
for power device characterization. It supports various types of measurement tasks
with ease-of-use and simple operation.
This chapter describes reference information of the Keysight Easy Test Navigator
software, and covers the following topics.
•
“Software Palette”
•
“Capacitance Measurement Software”
•
“I/V Measurement Software”
•
“Power Loss Calculation Software”
For how to perform the measurements, see Chapter 3.
For the EasyEXPERT software, see EasyEXPERT User’s Guide.
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GUI Reference
Software Palette
Software Palette
The Software Palette provides a complete list of the B1507A's measurement
software and also allows this software to be launched. The Software Palette lists
icons with the measurement software names. You can start a measurement software
by clicking an icon or a software name, or by pressing a softkey corresponding to
the software. Seven softkeys are available for this purpose at the right next to the
LCD of this instrument.
The Software Palette is displayed in fullscreen mode after powering up the B1507A.
The Software Palette can be minimized to access the Windows desktop.
The following shows the icons and texts displayed on the Software Palette, and
actions by clicking them.
Capacitance
Measurement
Starts the capacitance measurement software. See “Capacitance
Measurement Software” on page 4-4.
I/V Measurement
Starts the I/V measurement software. See “I/V Measurement Software”
on page 4-33.
Power Loss
Calculation
Starts the power loss calculation software. See “Power Loss Calculation
Software” on page 4-64.
Minimize
Minimizes the Software Palette. This is useful when you access the
Windows desktop. When you click the icon on the taskbar, the Software
Palette appears again.
Exit
Exits the software palette and opened measurement software. This
button is displayed if you move the mouse pointer over the upper right
corner.
When you use the EasyEXPERT software or you update the Easy Test
Navigator software, use this button to exit the Easy Test Navigator
software in advance.
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GUI Reference
Capacitance Measurement Software
Capacitance Measurement Software
Capacitance measurement software provides:
•
Automated measurement circuit configuration for three-terminal device
capacitance measurement (e.g. Ciss, Coss and Crss), with no need to manually
modify any device connections
•
With DC bias (sweep) control up to 3 kV for Collector/Drain terminal
•
With DC bias (sweep) control up to 100 V for Base/Collector terminal
•
Automated correction for every measurement path
•
Stable measurements even if the low-side load capacitance changes due to a bias
change (load adaptive gain-phase compensation)
•
Predefined templates for typical capacitance measurements of both
enhancement and depletion type MOSFETs, IGBTs and Diodes
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GUI Reference
Capacitance Measurement Software
GUI Overview
The GUI (Graphical User Interface) of the capacitance measurement software is
comprised of the following areas.
Figure 4-1
Capacitance Measurement Software GUI
3
a
b
c
1
2
1. Work Area (See p. 4-6.)
This area provides the functions to set the measurement conditions and observe
the measurement results. This is separated to the following areas.
a. Setup (See p. 4-6.)
b. Characteristics (See p. 4-15.)
c. Connections (See p. 4-19.)
2. Automatic Data Save (See p. 4-23.)
This area provides the functions regarding the automatic saving of the
measurement data files.
3. Operating Tools
•
Toolbar (See p. 4-24.)
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GUI Reference
Capacitance Measurement Software
This provides the functions that are very frequently used in the button
format.
•
Main Menu (See p. 4-26.)
This provides the functions needed for various operations in the menu
format.
For the dialog boxes displayed during this software operation, see “Dialog Boxes”
on page 4-28.
For the files handled by this software, see “Summary of Files” on page 4-31.
Work Area
In this area, set the measurement conditions and observe the measurement results.
This is separated to the following areas.
•
Setup (See p. 4-6.)
•
Characteristics (See p. 4-15.)
•
Connections (See p. 4-19.)
Setup
This is an area to select the device type and its measured parameters, and enter your
measurement conditions.
Figure 4-2
Setup
Device Type
Select the device type of your DUT from below.
•
“MOSFET”
•
“IGBT”
•
“Diode”
•
“Generic”
Select Generic to execute more general measurements for device other than
above types.
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GUI Reference
Capacitance Measurement Software
MOSFET
You can select one of the following capacitance and resistance parameter
measurements for “MOSFET” device type.
•
Ciss, Coss, Crss
Creates new settings to measure the characteristics of the input capacitance,
output capacitance, and reverse transfer capacitance for the drain-source voltage
in order.
•
Ciss
Creates new settings to measure the characteristics of the input capacitance for
the drain-source voltage.
•
Coss
Creates new settings to measure the characteristics of the output capacitance for
the drain-source voltage.
•
Crss
Creates new settings to measure the characteristics of the reverse transfer
capacitance for the drain-source voltage.
•
Cgs, Cds, Cgd
Creates new settings to measure the characteristics of the gate-source
capacitance, drain-source capacitance, and gate-drain capacitance for the
drain-source voltage in order.
•
Cgs
Creates new settings to measure the characteristics of the gate-source
capacitance for the drain-source voltage.
•
Cds
Creates new settings to measure the characteristics of the drain-source
capacitance for the drain-source voltage.
•
Cgd
Creates new settings to measure the characteristics of the gate-drain capacitance
for the drain-source voltage.
•
Rg
Creates new settings to measure the characteristics of the gate resistance for the
gate-source voltage.
•
Cox
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GUI Reference
Capacitance Measurement Software
Creates new settings to measure the characteristics of the gate oxide capacitance
for the gate-source voltage.
IGBT
You can select one of the following capacitance and resistance parameter
measurements for “IGBT” device type.
•
Cies, Coes, Cres
Creates new settings to measure the characteristics of the input capacitance,
output capacitance, and reverse transfer capacitance for the collector-emitter
voltage in order.
•
Cies
Creates new settings to measure the characteristics of the input capacitance for
the collector-emitter voltage.
•
Coes
Creates new settings to measure the characteristics of the output capacitance for
the collector-emitter voltage.
•
Cres
Creates new settings to measure the characteristics of the reverse transfer
capacitance for the collector-emitter voltage.
•
Cge, Cce, Cgc
Creates new settings to measure the characteristics of the gate-emitter
capacitance, collector-emitter capacitance, and gate-collector capacitance for the
collector-emitter voltage in order.
•
Cge
Creates new settings to measure the characteristics of the gate-emitter
capacitance for the collector-emitter voltage.
•
Cce
Creates new settings to measure the characteristics of the collector-emitter
capacitance for the collector-emitter voltage.
•
Cgc
Creates new settings to measure the characteristics of the gate-collector
capacitance for the collector-emitter voltage.
•
Rg
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GUI Reference
Capacitance Measurement Software
Creates new settings to measure the characteristics of the gate resistance for the
gate-emitter voltage.
Diode
You can select the following capacitance parameter measurements for “Diode”
device type.
•
CT
Creates new settings to measure the characteristics of the total anode-cathode
capacitance for the reverse bias voltage.
Generic
You can select one of the following measurements for “Generic” device type.
•
Sweep Voltage Between Terminal 2-3 (Collector-Emitter/Drain-Source Voltage
Sweep Measurement)
Creates new settings to measure the Cp-G model capacitance between the
collector/drain and the emitter/source terminals for the swept collector-emitter
or drain-source voltage.
•
Sweep Voltage Between Terminal 1-3 (Base-Emitter/Gate-Source Voltage
Sweep Measurement)
Creates new settings to measure the Cs-Rs model capacitance between the
base/gate and the emitter/source terminals for the swept base-emitter or
gate-source voltage.
General settings
In this area, you can set the following measurement conditions.
•
Frequency
Specify the output frequency of the AC signal from MFCMU.
Setting range: 1 kHz to 1 MHz
•
AC Level
Specify the output level of the AC signal from MFCMU.
Setting range: 0 to 250 mV
•
N PLC
Specify the measurement time (integral time) in the number of power line cycle. 
Setting range: 1 to 100
•
Phase Compensation
Specify one from the following phase compensation modes.
•
Auto
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GUI Reference
Capacitance Measurement Software
Uses the predefined phase compensation data.
•
Adaptive
Compensates the phase at each measurement point before the measurement.
It is useful when you cannot measure in the Auto compensation mode by
MFCMU oscillation.
The following parameter can be shown or hidden by clicking the line of
Base/Gate drive
settings
•
AC Level
•
N PLC
•
Phase Compensation
Details.
Specify the output settings for the base-collector or gate-source voltage. You can set
them up depending on the types of the selected measurement: forcing the constant
bias voltage or sweeping the bias voltage.
Base/Gate Voltage Bias:
You can specify the following parameters to force the constant bias voltage.
•
Bias
Specify the bias voltage.
Setting range: 100 V to +100 V
Base/Gate Voltage Sweep:
You can specify the following parameters to sweep the bias voltage.
•
Start
Specify the sweep start value.
Setting range: 100 V to +100 V
•
Stop
Specify the sweep stop value.
Setting range: 100 V to +100 V
•
Sweep Mode
Select one from the following sweep modes.
•
LinearSingle (Sweep from start to stop in a linear incremental step)
•
LogSingle (Sweep from start to stop in a logarithmic incremental step)
•
LinearDouble (Sweep from start to stop to start in a linear incremental step)
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GUI Reference
Capacitance Measurement Software
•
•
LogDouble (Sweep from start to stop to start in a logarithmic incremental
step)
Number of Step
Specify the number of sweep steps from start to stop.
Setting range: 1 to 1001
•
Hold Time
Specify the hold time of the sweep start voltage. At the sweep start point, the
start voltage is forced for more than the specified time.
Setting range: 0 to 655.35 s
•
Delay Time
Specify the delay time of the measurement at each sweep step. The measurement
is executed after waiting for more than the specified time at each sweep step.
Setting range: 0 to 65.535 s
•
Zero Bias Time
Keeps 0 V at every terminal for more than the specified time after one sweep
measurement.
Setting range: 0 to 99.9 s
In the measurement of the same capacitance parameter as shown in the
following table, the characteristics results by the single measurement and the
continuous measurement may have the difference depending on the bias voltage
condition between the measurements. This parameter is used to cancel the
dependence on the bias voltage condition in the continuous measurement.
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Continuous
Measurement
Device Type
MOSFET
•
•
IGBT
•
•
Ciss, Coss, Crss
Cgs, Cds, Cgd
Cies, Coes, Cres
Cge, Cce, Cgc
Single Measurement
•
Ciss
•
Coss
•
Crss
•
Cgs
•
Cds
•
Cgd
•
Cies
•
Coes
•
Cres
•
Cge
•
Cce
•
Cgc
The following parameter can be shown or hidden by clicking the line of
Collector/Drain
drive settings
•
Number of Step
•
Hold Time
•
Delay Time
•
Zero Bias Time
Details.
Specify the output settings for the collector-emitter or drain-source voltage. You can
set them up depending on the types of the selected measurement: forcing the
constant bias voltage or sweeping the bias voltage.
Collector/Drain Voltage Bias:
You can specify the following parameters to force the constant bias voltage.
•
Bias
Specify the bias voltage.
Setting range: 3000 V to +3000 V
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Collector/Drain Voltage Sweep:
You can specify the following parameters to sweep the bias voltage.
•
Start
Specify the sweep start value.
Setting range: 3000 V to +3000 V
•
Stop
Specify the sweep stop value.
Setting range: 3000 V to +3000 V
•
Sweep Mode
Select one from the following sweep modes.
•
•
LinearSingle (Sweep from start to stop in a linear incremental step)
•
LogSingle (Sweep from start to stop in a logarithmic incremental step)
•
LinearDouble (Sweep from start to stop to start in a linear incremental step)
•
LogDouble (Sweep from start to stop to start in a logarithmic incremental
step)
Number of Step
Specify the number of sweep steps from start to stop.
Setting range: 1 to 1001
•
Hold Time
Specify the hold time of the sweep start voltage. At the sweep start point, the
start voltage is forced for more than the specified time.
Setting range: 0 to 655.35 s
•
Delay Time
Specify the delay time of the measurement at each sweep step. The measurement
is executed after waiting for more than the specified time at each sweep step.
Setting range: 0 to 65.535 s
•
Zero Bias Time
Keeps 0 V at every terminal for more than the specified time after one sweep
measurement.
Setting range: 0 to 99.9 s
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Capacitance Measurement Software
In the measurement of the same capacitance parameter as shown in the
following table, the characteristics results by the single measurement and the
continuous measurement may have the difference depending on the bias voltage
condition between the measurements. This parameter is used to cancel the
dependence on the bias voltage condition in the continuous measurement.
Continuous
Measurement
Device Type
MOSFET
•
•
IGBT
•
•
Ciss, Coss, Crss
Cgs, Cds, Cgd
Cies, Coes, Cres
Cge, Cce, Cgc
Single Measurement
•
Ciss
•
Coss
•
Crss
•
Cgs
•
Cds
•
Cgd
•
Cies
•
Coes
•
Cres
•
Cge
•
Cce
•
Cgc
The following parameter can be shown or hidden by clicking the line of
•
Number of Step
•
Hold Time
•
Delay Time
•
Zero Bias Time
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GUI Reference
Capacitance Measurement Software
Characteristics
This page shows the graph of the specified parameter characteristics as the
measurement result. To display this page, click the Characteristics tab.
Figure 4-3
c
Characteristics
d b
e
f
g
b
a
a. Displaying
Characteristic
Curves
The data for the X and Y-axes are assigned according to the parameter
characteristics specified in the Setup.
If the graph has multiple characteristic curves for different measurement conditions,
the measurement conditions are displayed on the graph with the check boxes.
Marking the check box displays the characteristic curve for the measurement
condition. You can mark multiple check boxes for the measurement conditions.
You can change the minimum and maximum values on the X and Y-axes by clicking
the value.
b. Markers
This graph supports two kinds of markers: Domain marker and Trace marker. You
can switch these markers by clicking the Marker button shown in the bottom part of
the graph.
: Marker button when the Domain marker is used.
: Marker button when the Trace marker is used.
The Domain marker can read multiple characteristic values for the X-axis position.
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The Domain marker supports two markers (A and B). Marker A is always available.
To use the Marker B, mark the check box for the Marker B. The Marker B is a break
line. To move the marker position, use the rotary knob or mouse.
The marker annotation on the graph has X-axis values for markers, and a difference
value () between the Marker B and A (BA). And, each curve annotation has
Y-axis values and difference values () between the Marker B and A (BA).
The Trace marker can read the characteristic value with tracing each characteristic
curve. It is useful when you want to read the characteristic value on double sweep
result.
The marker annotation on the graph has X-axis value for the marker. And, the traced
curve annotation has Y-axis value.
c. Trace
Representation
The curves can be represented as Line, Dot, or combination (Line & Dot). Select
any trace representation using the radio buttons shown in the bottom part of the
graph.
d. Reference
Traces
You can register the presently-displayed curves as reference traces to compare with
other measurement results on the graph. If you register them as reference traces, the
reference traces are displayed as dimmed thin lines on the graph when you open
other measurement data files or execute the next measurement. To register as the
reference traces, click the Capture button
shown in the bottom part of the graph.
You can register a maximum of 10 reference traces. The measurement data files
registered as the reference traces are listed in the References field under the Capture
button . You can show or hide the reference traces using the check boxes at the
head of the measurement data file names. The References field can be shown or
hidden by clicking the line of the
button on top of the graph.
To remove unnecessary reference traces, select the measurement data file in the
References field, and then click the Remove button
.
The registration of the reference traces is cleared when you exit the capacitance
measurement software.
e. Auto Scale
Clicking the Auto Scale button
graph scale.
fits the measurement data at that time in the
If the auto scale mode is selected by using the Scale mode button, the measurement
data is automatically fit according to the progress of the measurement.
If the fixed scale mode is selected by using the Scale mode button, the scale is fixed
until changing the scale manually or clicking the Auto Scale button.
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Capacitance Measurement Software
: Scale mode button during selecting the auto scale mode.
: Scale mode button during selecting the fixed scale mode.
f. Trace Labels
The step values for the characteristic curves can be shown or hidden by clicking the
Trace Label button
.
In the case that multiple curves (Ciss, Coss, and Crss of MOSFET, and so on) are
displayed on the graph, the parameter name display is useful to identify which curve
is for which parameter.
g. X/Y Data
You can select the data and scale for the X and Y-axes. As default, the data for the X
and Y-axes are assigned according to the parameter characteristics specified in the
Setup.
The X/Y data field can be shown or hidden by clicking the line of the
top of the graph.
button on
Select one from the following scales.
•
Linear
Linear scale
•
PositiveLog
Logarithm scale for positive data
•
NegativeLog
Logarithm scale for negative data
Select data for X and Y-axes. The data corresponding to the parameter specified in
the Setup is represented as Capacitance, Conductance, or Resistance.
For example, in the case of the Ciss measurement, Cp is represented as Capacitance
and G is represented as Conductance. In like manner, in the case of the Rs
measurement, Rs is represented as Resistance and Cs is represented as Capacitance.
•
Cp
Parallel capacitance on the Cp-G model
•
G
Conductance on the Cp-G model
•
Cs
Serial capacitance on the Cs-Rs model
•
Rs
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Capacitance Measurement Software
Serial resistance on the Cs-Rs model
•
Ls
Serial inductance on the Ls-Rs model
•
Lp
Parallel inductance on the Lp-G model
•
R
Resistance on the R-X (impedance) model
•
X
Reactance on the R-X (impedance) model
•
G
Conductance on the G-B (admittance) model
•
B
Susceptance on the G-B (admittance) model
•
VGS (for MOSFET)/VGE (for IGBT)
Gate-source voltage or base-emitter voltage
•
IG
Gate or base current
•
VDS (for MOSFET)/VCE (for IGBT)
Drain-source voltage or collect-emitter voltage
•
ID (for MOSFET)/IC (for IGBT)
Drain or collector current
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Capacitance Measurement Software
Connections
This page shows the measurement circuit that is automatically connected according
to your specified measurement conditions. To display this page, click the
Connections tab.
Figure 4-4
Connections
a
b
a. Measurement
Circuit
NOTE
On the measurement circuit, the measurement terminals, the measurement
resources, and the built-in capacitance and resistance are displayed. The following
shows the relationship between the terminal numbers and the measurement
terminals.
•
1: Base/Gate terminal
•
2: Collector/Drain terminal
•
3: Emitter/Source terminal
•
4: Guard terminal
If DUT is a diode, connect the cathode terminal to 2. Collector/Drain terminal, and
the anode terminal to 3. Emitter/Source terminal.
In the case that the specified parameter characteristics has multiple measurements
such as Ciss, Coss, and Crss measurements, the measurement circuits are
respectively separated for the measurements by left-side tabs.
b. Details
This area is hidden as default. You can show this area under the measurement circuit
by clicking the line of
Details.
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GUI Reference
Capacitance Measurement Software
This area shows the connection status for the terminals in the table format. To edit
the settings, mark the check box in this area. You can set up the connections by the
combination of the following items.
•
CMU High/Low
Select a combination of connections between the DUT terminals (1 to 3) and the
CMU terminals (High and Low).
•
High
Connects the DUT terminal to the High terminal of CMU.
Low
Connects the DUT terminal to the Low terminal of CMU.
---
No connection
AC Guard/AC Short
Select a combination of connections between the DUT terminals (1 to 3) and AC
Guard terminal, or AC short connection between the DUT terminals 2 and 3.
•
Com.
Connects the DUT terminal to the circuit common directly.
Floating
Connects the DUT terminal to the selected bias source or
the circuit common via the built-in capacitor.
2-Short-3
Shorts between DUT terminals 2 and 3 via the built-in
capacitor.
---
No connection
Bias
Select a combination of connections between the DUT terminals (1 to 3) and the
DC bias source (SMU, CMU, or Common).
•
CMU
Uses the bias source in the CMU that is connected.
SMU
Connects the DUT terminal to an SMU as the bias source.
Com.
Connects the DUT terminal to the circuit common.
---
No connection
Guard
Select a connection between the DUT terminal 4 and AC Guard terminal.
Com.
Connects the DUT terminal 4 to circuit common directly.
Floating
Connects the DUT terminal 4 to the selected bias source or
the circuit common via the built-in capacitor.
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Capacitance Measurement Software
The following table shows applicable connections between the DUT terminals and
the measurement resources. The rightmost column shows the potential at the DUT
terminal 4 when it is connected to the AC Guard terminal in the built-in capacitor
(Floating connection). In the table, the blank cell means “same as above”.
Table 4-1
Applicable Connections
CMU High/Low
AC Guard/AC Short
Bias
Guard
1
2
3
1
2
3
1
2
3
Floating
High
---
Low
---
Com.
---
CMU
Com.
Com.
AC Guard
SMU
Com.
Com.
AC Guard
CMU
SMU
Com.
Terminal 2
SMU
SMU
Com.
Terminal 2
CMU
---
Com.
AC Guard
SMU
---
Com.
AC Guard
CMU
SMU
Com.
Terminal 2
SMU
SMU
Com.
Terminal 2
CMU
Com.
Com.
AC Guard
SMU
Com.
Com.
AC Guard
---
---
High
---
Low
Low
Low
High
High
High
Low
Low
---
Low
---
Floating
---
2-Short-3
---
---
Com.
---
---
Com.
SMU
Com.
AC Guard
Floating
---
---
SMU
SMU
Com.
AC Guard
---
CMU
Com.
AC Guard
SMU
CMU
Com.
AC Guard
Com.
SMU
Com.
AC Guard
SMU
SMU
Com.
AC Guard
Com.
CMU
Com.
AC Guard
SMU
CMU
Com.
AC Guard
Com.
SMU
Com.
AC Guard
---
---
---
---
Com.
---
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GUI Reference
Capacitance Measurement Software
CMU High/Low
1
Low
2
High
AC Guard/AC Short
3
High
4- 22
1
---
2
---
3
---
Bias
Guard
1
2
3
Floating
SMU
SMU
Com.
AC Guard
Com.
CMU
Com.
AC Guard
SMU
CMU
Com.
AC Guard
Com.
CMU
CMU
AC Guard
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GUI Reference
Capacitance Measurement Software
Automatic Data Save
This area sets the automatic saving for the setup data and measurement data. These
data are automatically saved to a new measurement data file in the specified folder
at the end of the measurement.
The Data folder and Recent data fields can be shown or hidden by clicking the line
of
Automatic Data Save.
Figure 4-5
Automatic Data Save
Device ID
Enter device ID string to the Device ID field. The maximum 10
recently-entered device IDs can be kept as history, and you can
also select one from the history list.
The entered device ID is automatically saved to the
measurement data file at the end of the measurement.
You can also change the device ID in the latest measurement
data file after the measurement here. To change it, change the
device ID in the Device ID field, and then click the Apply
button .
Comment
Enter a comment string to the Comment field.
The entered comment is automatically saved to the
measurement data file at the end of the measurement.
You can also change the comment in the latest measurement
data file after the measurement here. To change it, change the
comment in the Comment field, and then click the Apply
button .
Data
The Data field shows the latest auto-saved or last-opened
measurement data file name. You can do the following
operations.
•
Open the measurement data file by clicking the Open
button .
•
Rename the measurement data file by clicking the
measurement data file name.
•
Delete the measurement data file by clicking the Delete
button .
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Data folder
Shows the absolute path of the auto-saved measurement data
file. To change this, click the Browse button to open the folder
selection dialog box. Select your desired folder in the dialog
box.
For the initial setting of the data folder, see “Summary of Files”
on page 4-31.
Recent data
Shows up to 10 auto-saved measurement data files that were
automatically saved recently, in the hyper-link format. Clicking
the hyper-link opens the selected measurement data file. This
destroys the presently-editing data.
If the number of the auto-saved measurement data files is over
ten, this field shows “more...”. Clicking this opens the file
selection dialog box. Select a measurement data file to open.
Toolbar
Figure 4-6
Toolbar
The toolbar has five tool button groups. The following shows the tool buttons in the
tool button groups.
File tool button group
Open
Opens the Open File dialog box used to open a
specified setup file or measurement data file. The
present data is cleared by opening the file.
Save
Saves the present data as the same file name.
Exit
Exits the capacitance measurement software. Unsaved
data is destroyed.
Edit tool button group
Cut
4- 24
Moves the selected text to the clipboard.
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Capacitance Measurement Software
Copy
Copies the selected text to the clipboard.
Paste
Pastes the text from the clipboard to the insertion point.
On-screen
keyboard
Displays the on-screen keyboard.
Measurement tool button group
Start
Measurement
Starts a measurement. During the measurement, the
measurement status indicator on the front panel lights
up.
To stop the measurement, select the Measurement >
Stop menu, click the Stop Measurement button on
the toolbar, or press the Stop key on the front panel.
Stop
Measurement
Stops the measurement.
View tool button group
Go to Palette
Displays the Software Palette in fullscreen mode.
Calibration tool button group
Start Calibration...
Opens the Calibration dialog box to get the calibration
data. See “Calibration Dialog Box” on page 4-29.
Select Calibration
Data...
Opens a dialog box for the file selection, and then
applies the selected calibration data file to the
measurement.
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GUI Reference
Capacitance Measurement Software
Main Menu
Figure 4-7
Main Menu
The following describes the functions of the main menu.
File Menu
Displays the following menu items to operate the setup file and measurement data
file. For the file types and extensions, see “Summary of Files” on page 4-31.
New
Clears the present data to start from initial setting.
Open...
Opens the Open File dialog box used to open a specified setup
file or measurement data file. The present data is cleared by
opening the file.
Save
Saves the present data as the same file name.
Save Setup As...
Opens the Save Data File dialog box used to save the present
setup data as the specified setup file.
Save Data As...
Opens the Save Data File dialog box used to save the present
setup data and measurement data as the specified measurement
data file.
Change Device
ID...
Changes the device ID recorded in the measurement data file.
This opens the Change Device ID dialog box, and changes the
device ID recorded in the selected measurement data file(s). See
“Change Device ID Dialog Box” on page 4-28.
Recent Setup Files
Lists a maximum of 10 names of the setup files that were
recently edited, as menu items. You can easily open a setup file
by using them.
Exit
Edit Menu
Exits the capacitance measurement software. Unsaved data is
destroyed.
Displays the following menu items to edit the setup.
Cut
Moves the selected text to the clipboard.
Copy
Copies the selected text to the clipboard.
Paste
Pastes the text from the clipboard to the insertion point.
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On-screen
keyboard...
View Menu
Displays the on-screen keyboard.
Displays the following menu items for the display setting.
Go to Palette
Displays the Software Palette in fullscreen mode.
Main Window
Displays the following menu item.
Fullscreen
Changes the display style of the main
window.
If this is marked, the main window does not
have the titlebar and is displayed in
fullscreen mode.
If this is unmarked, the main window has
the titlebar and is displayed in the regular
window style.
This is initially marked.
Color Settings...
Calibration Menu
Displays the following menu items for the calibration.
Start
Opens the Calibration dialog box to get the calibration data. See
“Calibration Dialog Box” on page 4-29.
Select Data
Opens a dialog box for the file selection, and then applies the
selected calibration data file to the measurement.
Load Factory
Default
Measurement
Menu
Opens the Color Setting dialog box to set the color for parts in
this software. See “Color Setting Dialog Box” on page 4-29.
Applies the factory default calibration data file to the
measurement.
Displays the following menu items for controlling the measurement.
Start
Starts a measurement. During the measurement, the
measurement status indicator on the front panel lights up.
To stop the measurement, select the Measurement > Stop menu,
click the Stop Measurement button on the toolbar, or press
the Stop key on the front panel.
Stop
Stops the measurement.
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Configuration
Menu
Displays the following menu item to administrate the configuration of the built-in
modules in the mainframe and test fixture.
Module...
Help Menu
Opens the Module Configuration dialog box. See “Module
Configuration Dialog Box” on page 4-85.
Displays the following menu item.
About...
Opens the about box. See “About Box” on page 4-30.
Dialog Boxes
Change Device ID Dialog Box
The Change Device ID dialog box is used to change the device ID in all selected
measurement data files at once.
This dialog box is opened by selecting the main menu File > Change Device ID....
Device ID field
Enter a new device ID. You can also select it from the history.
Add... button
Opens the file selection dialog box to select the measurement
data file(s) that you want to change the device ID. The selected
files are displayed into the list.
Remove button
Excludes the selected measurement data file from the list.
Execute button
Changes the device ID.
Close button
Closes this dialog box.
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Color Setting Dialog Box
The Color Setting dialog box is used to set colors of the following parts in this
software. The setting in the Color Setting dialog box is saved as a user setting.
•
Graph Background
•
Graph Axis
•
Graph Grid
•
Graph Text
•
Marker
•
Trace
•
First
•
Second
•
Third
This dialog box is opened by selecting the main menu View > Color Settings....
Clicking the color pattern opens the dialog box for selecting a color.
Apply button
Applies the present setting to the graph.
Reset button
Resets to the default setting.
OK button
Applies the present setting to the graph, and closes this dialog
box.
Cancel button
Closes this dialog box without applying the present setting.
Calibration Dialog Box
The Calibration dialog box is used to acquire the calibration data regarding the
leakage conductance, parasitic capacitance, residual resistance, and inductance on
the signal paths, and apply it to the measurement.
If you change the signal paths to DUT, you need to acquire the calibration data for
the new paths.
The calibration data supports the situation that the signal paths in the test fixture are
automatically switched.
This dialog box is opened by selecting the main menu Calibration > Start.
Full Path Calibration Measurement
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Select to acquire the calibration data for all available signal
paths.
Minimum Path Calibration Measurement
Select to acquire the calibration data for the signal paths used in
the present setup.
For signal paths except for them, the factory default calibration
data is applied.
Start button
Starts to acquire the calibration data. Open or short the
capacitance measurement circuit according to instructions of
the wizard.
Save and Apply
button
Cancel button
Saves the acquired calibration data to a file, and applies it to the
measurement.
Destroys the acquired calibration data and closes this dialog
box.
About Box
The about box displays the model number, the software revision number, download
URL for software updating, and so on.
This dialog box is opened by selecting the main menu Help > About....
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Summary of Files
The following shows the summary of the files handled by the capacitance
measurement software.
Table 4-2
Summary of Files
File Type
Setup File
Description
This has the setup data only.
Extension
*.pda-cap
(You can specify the folder
when saving the data)
*.pda-cap.txt
C:\Users\<user name>\
Documents\Keysight\
SeriesB150x\PowerDevice
Analyzer\DeviceCapacitan
ce\DataStore
(You can change this)
*.pda-cap.cal
C:\ProgramData\Keysight\
SeriesB150x\PowerDevice
Analyzer\DeviceCapacitan
ce\UserCalibrationData
You can also save this using the File
menu anytime.
Measurement
Data File
This has the setup data and
measurement data including the
device ID and comment.
The setup data and measurement data
are automatically saved to this file in
the specified folder at the end of the
measurement. And, you can also save
this using the File menu anytime.
Calibration Data
File
Calibration data
Folder as Initial Setting
This is automatically saved after the
calibration execution.
Factory Default Calibration data
This is used when there is no user
calibration data.
C:\ProgramData\Keysight\
SeriesB150x\PowerDevice
Analyzer\DeviceCapacitan
ce\CalibrationData
File name of Measurement Data File on Auto-saving
An auto-saved measurement data file is named as follows:
<DeviceID>_<TIME>.pda-cap.txt
<DeviceID>:
Device ID
<TIME>:
Time stamp on auto-saving
Example)
Device-1_2014-10-30_18-56-55.pda-cap.txt
And, the file name is decided according to the following rule.
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1. <TIME> is the characters of year, month, day, hour, minute, and second. The
time stamp representation depends on the time setting on Windows. And, an
invalid character is replaced with an underscore (_).
Example 1) 2014-10-30_18-56-55
Example 2) 30-10-2014_6-56-55_PM
2. If the file name duplicates the existing file name, the serial number from 2
enclosed by brackets is concatenated before the file extension.
Example)
Device-1_2014-10-30_18-56-55(3).pda-cap.txt
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GUI Reference
I/V Measurement Software
I/V Measurement Software
I/V Measurement Software provides:
•
Voltage/current sweep/spot measurements
•
DC/pulse outputs
•
Linear/log sweep with both single (one-way) and double (round-trip) capability
for the primary sweep source (similar to the collector supply of a conventional
curve tracer)
•
Linear/list sweep capability for the secondary sweep source (corresponding to
the step generator of a conventional curve tracer)
•
The ability to assign the primary sweep source or the secondary sweep source to
either the collector/drain terminal or to the base/gate terminal.
•
Intuitive and interactive sweep/spot measurement operation using rotary knob.
•
Predefined templates for typical MOSFET, IGBT and Diode I/V measurements.
I/V Measurement Software supports Oscilloscope View function in the pulse mode
operation. At the specified measurement point on the characteristic trace, this
function can monitor both voltage and current waveforms for the measurement
channels of all supported modules. Oscilloscope View supports the following
modules:
•
MCSMU
•
HVSMU
•
HCSMU
•
UHCU
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I/V Measurement Software
GUI Overview
The GUI (Graphical User Interface) of the I/V measurement software is comprised
of the following areas.
Figure 4-8
I/V Measurement Software GUI
3
a
b
c
1
2
1. Work Area (See p. 4-35.)
This area provides the functions to set the measurement conditions and observe
the measurement results. This is separated to the following areas.
a. Setup (See p. 4-35.)
b. Characteristics (See p. 4-48.)
c. Connections (See p. 4-54.)
2. Automatic Data Save (See p. 4-56.)
This area provides the functions regarding the automatic saving of the
measurement data files.
3. Operating Tools
•
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Toolbar (See p. 4-57.)
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I/V Measurement Software
This provides the functions that are very frequently used in the button
format.
•
Main Menu (See p. 4-59.)
This provides the functions needed for various operations in the menu
format.
For the dialog boxes displayed during this software operation, see “Dialog Boxes”
on page 4-61.
For the files handled by this software, see “Summary of Files” on page 4-62.
Work Area
In this area, set the measurement conditions and observe the measurement results.
This is separated to the following areas.
•
Setup (See p. 4-35.)
•
Characteristics (See p. 4-48.)
•
Connections (See p. 4-54.)
Setup
This is an area to select the device type and its measured I/V characteristics, and
enter your measurement conditions.
Figure 4-9
Setup
Device Type
Select the device type of your DUT from below.
•
MOSFET
•
IGBT
•
Diode
•
Generic2T
This is for two-terminal general devices.
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•
Generic
Select the Generic to execute more general measurements for device other than
above types.
MOSFET
You can select one of the following I/V characteristics measurements for
“MOSFET” device type.
•
ID-VDS
Creates new settings to measure the output characteristics.
•
ID-VGS
Creates new settings to measure the transfer characteristics.
•
VGS(th)
Creates new settings to measure the threshold voltage.
•
RDS-ID
Creates new settings to measure the drain-source resistance characteristics for
the drain current.
•
VDS-VGS
Creates new settings to measure the drain-source voltage characteristics for the
gate-source voltage.
•
RDS-VGS
Creates new settings to measure the drain-source resistance characteristics for
the gate-source voltage.
•
IDSS
Creates new settings to measure the drain leak current characteristics for the
drain-source voltage.
•
IGSS
Creates new settings to measure the gate leak current characteristics for the
gate-source voltage.
•
IS-VSD
Creates new settings to measure the forward characteristics of the body diode for
the source-drain voltage.
IGBT
You can select one of the following I/V characteristics measurements for “IGBT”
device type.
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•
IC-VCE
Creates new settings to measure the output characteristics.
•
IC-VGE
Creates new settings to measure the transfer characteristics.
•
VGE(th)
Creates new settings to measure the threshold voltage.
•
VCE-VGE
Creates new settings to measure the collector-emitter voltage characteristics for
the gate-emitter voltage.
•
VCE(sat)
Creates new settings to measure the collector-emitter saturation voltage
characteristics for the collector current.
•
ICES
Creates new settings to measure the collector leak current characteristics for the
collector-emitter voltage.
•
IGES
Creates new settings to measure the gate leak current characteristics for the
gate-emitter voltage.
•
IF-VF
Creates new settings to measure the free-wheel diode forward characteristics.
Diode
You can select one of the following I/V characteristics measurements for “Diode”
device type.
•
IF-VF
Creates new settings to measure the forward bias characteristics.
•
IR-VR
Creates new settings to measure the reverse bias characteristics.
Generic2T
You can select on of the following I/V characteristics measurements for
“Generic2T” device type.
•
Conduction
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Creates new settings to measure the conduction resistance characteristics.
•
Isolation
Creates new settings to measure the isolation characteristics.
Generic
Set your measurement conditions in “General settings” on page 4-38, “Gate/Base
drive settings” on page 4-39, and “Drain/Collector drive settings” on page 4-40 for
“Generic” device type.
General settings
In this area, you can set the following measurement conditions for DC output
measurement or pulse output measurement.
For DC output measurement:
•
Step Time
Specify the period between steps for the staircase sweep.
Setting range: 500 s to 5 s
•
Aperture
Specify the measurement time at each step for the staircase sweep.
Setting range: 2 s to 20 ms
•
Hold Time
Specify the hold time of the sweep start voltage. At the sweep start point, the
start voltage is forced for more than the specified time.
Setting range: 0 to 655.35 s
For pulse output measurement:
•
Auto Period
Enable or disable the automatic adjustment for the pulse period. To enable this,
mark the check box.
•
Pulse Period
Specify the pulse period.
Setting range: 5 ms to 5 s
If the Auto Period is enabled, this is automatically adjusted to minimum period
corresponding to the pulse width.
•
Aperture
Specify the measurement time at each pulse.
Setting range: 2 s to 20 ms
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•
Hold Time
Specify the hold time of the sweep start voltage. At the sweep start point, the
start voltage is forced for more than the specified time.
Setting range: 0 to 655.35 s
The following parameter can be shown or hidden by clicking the line of
Gate/Base drive
settings
•
Aperture
•
Hold Time
Details.
Set the output voltage/current to the gate/base terminal. One of the following types
is automatically selected depending on the selected characteristics measurement.
The selected type is displayed on the title of this terminal setting area as shown in
the following figure.
For the setting items of the types, see below.
•
Bias (See p. 4-40.)
Outputs the constant bias voltage/current.
•
Pulse Bias (See p. 4-41.)
Outputs the voltage or current pulse that the peak output is constant.
•
Step (See p. 4-41.)
Outputs the constant voltage/current that the level is changed every time a sweep
measurement is finished.
•
Pulse Step (See p. 4-42.)
Outputs the voltage/current pulse that the peak level is changed every time a
sweep measurement is finished.
•
Staircase Sweep (See p. 4-44.)
Outputs the staircase-swept voltage/current.
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•
Drain/Collector
drive settings
Pulse Sweep (See p. 4-45.)
Outputs the staircase-swept pulse voltage/current.
Set the output voltage/current to the drain/collector terminal. One of the following
types is automatically selected depending on the selected characteristics
measurement. The selected type is displayed on the title of this terminal setting area.
For the setting items of the types, see below.
Bias
•
Bias (See p. 4-40.)
Outputs the constant bias voltage/current.
•
Pulse Bias (See p. 4-41.)
Outputs the voltage or current pulse that the peak output is constant.
•
Step (See p. 4-41.)
Outputs the constant voltage/current that the level is changed every time a sweep
measurement is finished.
•
Pulse Step (See p. 4-42.)
Outputs the voltage/current pulse that the peak level is changed every time a
sweep measurement is finished.
•
Staircase Sweep (See p. 4-44.)
Outputs the staircase-swept voltage/current.
•
Pulse Sweep (See p. 4-45.)
Outputs the staircase-swept pulse voltage/current.
The terminal outputs the constant voltage or current.
Set the following parameters.
•
Source
Specify an output voltage/current value.
The following parameters can be shown or hidden by clicking the line of
•
Details.
Resource/Output Mode/Output Sequence
You can change the settings of this terminal using the pull-down menu. For
details, see “Resource/Output Mode/Output Sequence” on page 4-46.
•
Compliance
Specify a current/voltage compliance value.
If the output exceeds this, the sweep measurement is terminated.
•
Voltage Compliance
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Not available for B1507A.
Pulse Bias
The terminal outputs the voltage or current pulse that the peak output is constant.
Set the following parameters.
•
Source
Specify a pulse peak voltage/current value.
The following parameters can be shown or hidden by clicking the line of
•
Details.
Resource/Output Mode/Output Sequence
You can change the settings of this terminal using the pull-down menu. For
details, see “Resource/Output Mode/Output Sequence” on page 4-46.
•
Base
Specify a pulse base voltage/current value.
•
Compliance
Specify a current/voltage compliance value.
If the output exceeds this, the sweep measurement is terminated.
•
Voltage Compliance
Not available for B1507A.
•
Pulse Delay
Specify a delay time from the beginning point of the pulse period to the raising
point.
•
Pulse Width
Specify a period of the pulse peak.
Step
The terminal outputs the constant voltage or current that the level is changed every
time a sweep measurement is finished.
Set the following parameters.
•
Step Mode
Select one from the following level change operation.
•
•
LinearSingle: Constant level is changed by a constant step value.
•
ListSingle: Constant level is changed according to the listed levels.
Start
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Specify the first step value.
Available for the “LinearSingle” Step Mode.
•
Stop
Specify the last step value.
Available for the “LinearSingle” Step Mode.
The following parameters can be shown or hidden by clicking the line of
•
Details.
Resource/Output Mode/Output Sequence
You can change the settings of this terminal using the pull-down menu. For
details, see “Resource/Output Mode/Output Sequence” on page 4-46.
•
Number of Step
Specify the number of steps.
Available for the “LinearSingle” Step Mode.
•
List
Create the list of the output levels.
Available for the “ListSingle” Step Mode.
To insert a new step entry before the selected step value, click the Insert
button .
To move the selected step value up/down, click the Move button
To delete the selected step value, click the Delete button
•
.
.
Compliance
Specify a current/voltage compliance value.
If the output exceeds this, the sweep measurement is terminated.
•
Power Compliance
Specify the power compliance value.
To enable this, mark the check box.
If the output exceeds this, the sweep measurement is terminated.
Not available for HVSMU.
•
Voltage Compliance
Not available for B1507A.
Pulse Step
The terminal outputs the voltage or current pulse that the peak level is changed
every time a sweep measurement is finished.
Set the following parameters.
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•
Step Mode
Select one from the following level change operations.
•
•
LinearSingle: Peak level is changed by a constant step value.
•
ListSingle: Peak level is changed according to the listed levels.
Start
Specify the first pulse peak value.
Available for the “LinearSingle” Step Mode.
•
Stop
Specify the last pulse peak value.
Available for the “LinearSingle” Step Mode.
•
List
Create the list of the output levels.
Available for the “ListSingle” Step Mode.
To insert a new step entry before the selected step value, click the Insert
button .
To move the selected step value up/down, click the Move button
To delete the selected step value, click the Delete button
.
The following parameters can be shown or hidden by clicking the line of
•
.
Details.
Resource/Output Mode/Output Sequence
You can change the settings of this terminal using the pull-down menu. For
details, see “Resource/Output Mode/Output Sequence” on page 4-46.
•
Base
Specify a pulse base voltage/current value.
•
Number of Step
Specify the number of steps.
Available for the “LinearSingle” Step Mode.
•
Compliance
Specify a current/voltage compliance value.
If the output exceeds this, the sweep measurement is terminated.
•
Power Compliance
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Specify the power compliance value.
To enable this, mark the check box.
If the output exceeds this, the sweep measurement is terminated.
Not available for HVSMU.
•
Voltage Compliance
Not available for B1507A.
•
Pulse Delay
Specify a delay time from the beginning point of the pulse period to the raising
point.
•
Pulse Width
Specify a period of the pulse peak.
Staircase Sweep
The terminal outputs the staircase-swept voltage/current.
Set the following parameters.
•
Sweep Mode
Select one from the following sweep modes.
•
•
LinearSingle (Sweep from start to stop in a linear incremental step)
•
LogSingle (Sweep from start to stop in a logarithmic incremental step)
•
LinearDouble (Sweep from start to stop to start in a linear incremental step)
•
LogDouble (Sweep from start to stop to start in a logarithmic incremental
step)
Start
Specify the sweep start value.
•
Stop
Specify the sweep stop value.
The following parameters can be shown or hidden by clicking the line of
•
Details.
Resource/Output Mode/Output Sequence
You can change the settings of this terminal using the pull-down menu. For
details, see “Resource/Output Mode/Output Sequence” on page 4-46.
•
Number of Step
Specify the number of sweep steps from start to stop.
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•
Compliance
Specify a current/voltage compliance value.
If the output exceeds this, the sweep measurement is terminated.
•
Power Compliance
Specify the power compliance value.
To enable this, mark the check box.
If the output exceeds this, the sweep measurement is terminated.
Not available for HVSMU.
•
Voltage Compliance
Not available for B1507A.
Pulse Sweep
The terminal outputs the staircase-swept pulse voltage/current.
Set the following parameters.
•
Sweep Mode
Select one from the following sweep modes.
•
•
LinearSingle (Sweep from start to stop in a linear incremental step)
•
LogSingle (Sweep from start to stop in a logarithmic incremental step)
•
LinearDouble (Sweep from start to stop to start in a linear incremental step)
•
LogDouble (Sweep from start to stop to start in a logarithmic incremental
step)
Start
Specify the sweep start value.
•
Stop
Specify the sweep stop value.
The following parameters can be shown or hidden by clicking the line of
•
Details.
Resource/Output Mode/Output Sequence
You can change the settings of this terminal using the pull-down menu. For
details, see “Resource/Output Mode/Output Sequence” on page 4-46.
•
Base
Specify a pulse base voltage/current value.
•
Number of Step
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Specify the number of sweep steps from start to stop.
•
Compliance
Specify a current/voltage compliance value.
If the output exceeds this, the sweep measurement is terminated.
•
Power Compliance
Specify the power compliance value.
To enable this, mark the check box.
If the output exceeds this, the sweep measurement is terminated.
Not available for HVSMU.
•
Voltage Compliance
Not available for B1507A.
•
Pulse Delay
Specify a delay time from the beginning point of the pulse period to the raising
point.
•
Pulse Width
Specify a period of the pulse peak.
Resource/Output
Mode/Output
Sequence
Depending on the selected characteristics measurement, the pre-defined output
mode and sequence are automatically selected. If necessary, you can change the
measurement resource, the output mode, and the output sequence. Table 4-3 shows
the available alternatives for the gate/base terminal, and Table 4-4 shows the
available alternatives for the drain/collector terminal.
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Table 4-3
Available Resource/Output Mode/Output Sequence for Gate/Base Terminal
Measurement Resource
•
MPSMU
MPSMU is
connected to this
terminal.
Output Mode
•
V
Output Sequence
•
Specifies the
constant bias output
sequence.
Specifies the DC
voltage output.
•
VPulse
Specifies the pulse
voltage output.
•
•
•
Step
Specifies the step
bias output sequence.
I
Specifies the DC
current output.
Constant
•
Sweep
Specifies the sweep
output sequence.
IPulse
Specifies the pulse
current output.
Table 4-4
Available Resource/Output Mode/Output Sequence for Drain/Collector
Terminal
Measurement Resource
•
Open
No connection.
This terminal is
opened.
•
•
•
•
•
•
•
IPulse
Step
Specifies the step
bias output sequence.
I
Specifies the DC
current output.
Constant
Specifies the
constant bias output
sequence.
VPulse
Specifies the pulse
voltage output.
MPSMU
MPSMU is
connected to this
terminal.
V
Output Sequence
Specifies the DC
voltage output.
HVSMU
HVSMU is
connected to this
terminal.
•
Output Mode
•
Sweep
Specifies the sweep
output sequence.
Specifies the pulse
current output.
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The combinations of the Output Mode and Output Sequence decide the types as
shown in the following table.
Type
Output Mode
Output Sequence
Bias
V or I
Constant
Pulse Bias
VPulse or IPulse
Constant
Step
V or I
Step
Pulse Step
VPulse or IPulse
Step
Staircase Sweep
V or I
Sweep
Pulse Sweep
VPulse or IPulse
Sweep
Characteristics
This page shows the graph of the specified I/V characteristics as the measurement
result. To display this page, click the Characteristics tab.
Figure 4-10
c
Characteristics
d b e
f
h
g
b
a
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a. Displaying
Characteristic
Curves
The data for the X and Y-axes are assigned according to the I/V characteristics
specified in the Setup.
If the graph has multiple characteristic curves for different measurement conditions,
the measurement conditions are displayed on the graph with the check boxes.
Marking the check box displays the characteristic curve for the measurement
condition. You can mark multiple check boxes for the measurement conditions.
You can change the minimum and maximum values on the X and Y-axes by clicking
the value.
b. Markers
This graph supports two kinds of markers: Domain marker and Trace marker. You
can switch these markers by clicking the Marker button shown in the bottom part of
the graph.
: Marker button when the Domain marker is used.
: Marker button when the Trace marker is used.
The Domain marker can read multiple characteristic values for the X-axis position.
The Domain marker supports two markers (A and B). Marker A is always available.
To use the Marker B, mark the check box for the Marker B. The Marker B is a break
line. To move the marker position, use the rotary knob or mouse.
The marker annotation on the graph has X-axis values for markers, and a difference
value () between the Marker B and A (BA). And, each curve annotation has
Y-axis values and difference values () between the Marker B and A (BA).
The Trace marker can read the characteristic value with tracing each characteristic
curve. It is useful when you want to read the characteristic value on double sweep
result.
The marker annotation on the graph has X-axis value for the marker. And, the traced
curve annotation has Y-axis value.
c. Trace
Representation
The curves can be represented as Line, Dot, or combination (Line & Dot). Select
any trace representation using the radio buttons shown in the bottom part of the
graph.
d. Reference
Traces
You can register the presently-displayed curves as reference traces to compare with
other measurement results on the graph. If you register them as reference traces, the
reference traces are displayed as dimmed thin lines on the graph when you open
other measurement data files or execute the next measurement. To register as the
reference traces, click the Capture button
shown in the bottom part of the graph.
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You can register a maximum of 10 reference traces. The measurement data files
registered as the reference traces are listed in the References field under the Capture
button . You can show or hide the reference traces using the check boxes at the
head of the measurement data file names. The References field can be shown or
hidden by clicking the line of the
button on top of the graph.
To remove unnecessary reference traces, select the measurement data file in the
References field, and then click the Remove button
.
The registration of the reference traces is cleared when you exit the I/V
measurement software.
e. Auto Scale
Clicking the Auto Scale button
graph scale.
fits the measurement data at that time in the
If the auto scale mode is selected by using the Scale mode button, the measurement
data is automatically fit according to the progress of the measurement.
If the fixed scale mode is selected by using the Scale mode button, the scale is fixed
until changing the scale manually or clicking the Auto Scale button.
: Scale mode button during selecting the auto scale mode.
: Scale mode button during selecting the fixed scale mode.
f. Trace Labels
The step values for the characteristic curves can be shown or hidden by clicking the
Trace Label button
.
In the case that multiple curves are displayed on the IV-VDS characteristic graph of
MOSFET, IC-VCE characteristic graph of IGBT, and so on, the step value display is
useful to identify which curve is for which step value.
g. X/Y Data
You can select the data and scale for the X and Y-axes. As default, the data for the X
and Y-axes are assigned according to the I/V characteristics specified in the Setup.
The X/Y data field can be shown or hidden by clicking the line of the
top of the graph.
button on
Select one from the following scales.
•
Linear
Linear scale
•
PositiveLog
Logarithm scale for positive data
•
NegativeLog
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Logarithm scale for negative data
Select data for X and Y-axes corresponding to the specified device type. The
following shows data corresponding to the device type.
For MOSFET:
•
VDS: Drain-source voltage
•
ID: Drain current
•
RDS: Drain-source resistance
•
VGS: Gate-source voltage
•
IG: Gate current
•
IS: Forward direction current of body diode (source current)
•
VSD: Forward direction voltage of body diode (source-drain voltage)
For IGBT:
•
VCE: Collector-emitter voltage
•
IC: Collector current
•
VGE: Gate-emitter voltage
•
IG: Gate current
•
VF: Forward direction voltage of free-wheel diode
•
IF: Forward direction current of free-wheel diode
For Diode:
•
VF: Forward direction voltage
•
IF: Forward direction current
•
VR: Reverse direction voltage
•
IR: Reverse direction current
For Generic2T:
•
V: Voltage between terminals 2 and 3
•
I: Terminal 2 current
•
R: Resistance between terminals 2 and 3
•
VGS: Voltage between terminals 1 and 3
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•
IG: Terminal 1 current
•
RGS: Resistance between terminals 1 and 3
For Generic:
h. Oscilloscope
View
•
VDS: Voltage between terminals 2 and 3
•
ID: Terminal 2 current
•
RDS: Resistance between terminals 2 and 3
•
VGS: Voltage between terminals 1 and 3
•
IG: Terminal 1 current
•
RGS: Resistance between terminals 1 and 3
•
VSD: Voltage between terminals 3 and 2
•
IS: Terminal 3 current
The Oscilloscope View area can be hidden or shown by clicking the column of
Oscilloscope View. For details, see “Oscilloscope View” on page 4-52.
Oscilloscope View
When the measurement is in the pulse mode operation, the Oscilloscope View can
monitor both voltage and current waveforms for the measurement channels of all
supported modules, at the specified measurement point on the characteristic trace.
Oscilloscope View supports the following modules:
•
MCSMU
•
HVSMU
•
HCSMU
•
UHCU
To monitor the waveforms in the Oscilloscope View, you need to display this area
before executing the measurement.
To display this area, clicking the column of
corner of the Characteristics area.
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Oscilloscope View at the right top
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Figure 4-11
Oscilloscope View
b
d
a
c
e
a. Specifying
Observation Point
To specify the observation point, use the trace marker on the left-hand
characteristics graph. After measuring the specified point, the observation point on
the characteristics graph is identified by a monitor marker (green frame), and the
time domain waveform(s) is displayed on this area.
In the case of the repeat measurement, you can move the trace marker to change the
observation point during the measurement. After measuring the changed point, the
monitor maker moves to the point and the waveforms are updated.
b. Specifying
Channel
This area can display voltage or current waveforms characteristics for multiple
measurement channels. To display waveforms, mark the check boxes for the voltage
or current data names of the measurement channels that you want to monitor.
c. Scale and Offset The scale and offset values on the Y-axis for each displayed curve are displayed on
on Y-axis
the right upper portion.
You can change the following values on the X and Y-axes by clicking the value.
•
Scale and origin values on X-axis
•
Scale and offset values on Y-axis
There are the Auto Scale button and Scale mode button next to the scale and offset
values on the Y-axis.
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Clicking the Auto Scale button
graph scale.
fits the measurement data at that time in the
If the auto scale mode is selected by using the Scale mode button, the measurement
data is automatically fit according to the progress of the measurement.
If the fixed scale mode is selected by using the Scale mode button, the scale is fixed
until changing the scale manually or clicking the Auto Scale button.
: Scale mode button during selecting the auto scale mode.
: Scale mode button during selecting the fixed scale mode.
d. Domain Markers On the graph, you can read values using the domain marker and change the trace
and Trace
representation. For details, see “b. Markers” on page 4-49, and “c. Trace
Representation
Representation” on page 4-49.
e. Aperture Period The diaphanous green zone on the graph shows the period of the Aperture value set
in the General settings.
Connections
This page shows the measurement circuit that is automatically connected according
to your specified measurement conditions. To display this page, click the
Connections tab.
Figure 4-12
Connections
On the measurement circuit, the measurement terminals, the measurement
resources, and the built-in capacitance and resistance are displayed. The following
shows the relationship between the terminal numbers and the measurement
terminals.
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NOTE
•
1: Base/Gate terminal
•
2: Collector/Drain terminal
•
3: Emitter/Source terminal
•
4: Guard terminal
If DUT is a diode, connect the cathode terminal to 2. Collector/Drain terminal, and
the anode terminal to 3. Emitter/Source terminal.
If DUT is a 2-terminal general device, connect a terminal to 2. Collector/Drain
terminal, and the another terminal to 3. Emitter/Source terminal.
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Automatic Data Save
This area sets the automatic saving for the setup data and measurement data. These
data are automatically saved to a new measurement data file in the specified folder
at the end of the measurement.
The Data folder and Recent data fields can be shown or hidden by clicking the line
of
Automatic Data Save.
Figure 4-13
Automatic Data Save
Device ID
Enter device ID string to the Device ID field. The maximum 10
recently-entered device IDs can be kept as history, and you can
also select one from the history list.
The entered device ID is automatically saved to the
measurement data file at the end of the measurement.
You can also change the device ID in the latest measurement
data file after the measurement here. To change it, change the
device ID in the Device ID field, and then click the Apply
button .
Comment
Enter a comment string to the Comment field.
The entered comment is automatically saved to the
measurement data file at the end of the measurement.
You can also change the comment in the latest measurement
data file after the measurement here. To change it, change the
comment in the Comment field, and then click the Apply
button .
Data
4- 56
The Data field shows the latest auto-saved or last-opened
measurement data file name. You can do the following
operations.
•
Open the measurement data file by clicking the Open
button .
•
Rename the measurement data file by clicking the
measurement data file name.
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I/V Measurement Software
•
Data folder
Delete the measurement data file by clicking the Delete
button .
Shows the absolute path of the auto-saved measurement data
file. To change this, click the Browse button to open the folder
selection dialog box. Select your desired folder in the dialog
box.
For the initial setting of the data folder, see “Summary of Files”
on page 4-62.
Recent data
Shows up to 10 auto-saved measurement data files that were
automatically saved recently, in the hyper-link format. Clicking
the hyper-link opens the selected measurement data file. This
destroys the presently-editing data.
If the number of the auto-saved measurement data files is over
ten, this field shows “more...”. Clicking this opens the file
selection dialog box. Select a measurement data file to open.
Toolbar
Figure 4-14
Toolbar
The toolbar has four tool button groups. The following shows the tool buttons in the
tool button groups.
File tool button group
Open
Opens the Open File dialog box used to open a
specified setup file or measurement data file. The
present data is cleared by opening the file.
Save
Saves the present data as the same file name.
Exit
Exits the I/V measurement software. Unsaved data is
destroyed.
Edit tool button group
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Cut
Moves the selected text to the clipboard.
Copy
Copies the selected text to the clipboard.
Paste
Pastes the text from the clipboard to the insertion point.
On-screen
keyboard
Displays the on-screen keyboard.
Measurement tool button group
Start
Measurement
Starts a measurement. During the measurement, the
measurement status indicator on the front panel lights
up.
Repeat
Measurement
Starts a repeat measurement. During the measurement,
the measurement status indicator on the front panel
lights up.
This allows you to observe the measurement result with
changing the setup.
To stop the measurement, select the Measurement >
Stop menu, click the Stop Measurement button on
the toolbar, or press the Stop key on the front panel.
Stop
Measurement
Stops the measurement.
View tool button group
Go to Palette
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Displays the Software Palette in fullscreen mode.
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Main Menu
Figure 4-15
Main Menu
The following describes the functions of the main menu.
File Menu
Displays the following menu items to operate the setup file and measurement data
file. For the file types and extensions, see “Summary of Files” on page 4-62.
New
Clears the present data to start from initial setting.
Open...
Opens the Open File dialog box used to open a specified setup
file or measurement data file. The present data is cleared by
opening the file.
Save
Saves the present data as the same file name.
Save Setup As...
Opens the Save Data File dialog box used to save the present
setup data as the specified setup file.
Save Data As...
Opens the Save Data File dialog box used to save the present
setup data and measurement data as the specified measurement
data file.
Change Device
ID...
Changes the device ID recorded in the measurement data file.
This opens the Change Device ID dialog box, and changes the
device ID recorded in the selected measurement data file(s). See
“Change Device ID Dialog Box” on page 4-61.
Recent Setup Files
Lists a maximum of 10 names of the setup files that were
recently edited, as menu items. You can easily open a setup file
by using them.
Exit
Edit Menu
Exits the I/V measurement software. Unsaved data is destroyed.
Displays the following menu items to edit the setup.
Cut
Moves the selected text to the clipboard.
Copy
Copies the selected text to the clipboard.
Paste
Pastes the text from the clipboard to the insertion point.
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On-screen
keyboard...
View Menu
Displays the on-screen keyboard.
Displays the following menu items for the display setting.
Go to Palette
Displays the Software Palette in fullscreen mode.
Main Window
Displays the following menu item.
Fullscreen
Changes the display style of the main
window.
If this is marked, the main window does not
have the titlebar and is displayed in
fullscreen mode.
If this is unmarked, the main window has
the titlebar and is displayed in the regular
window style.
This is initially marked.
Color Settings...
Measurement
Menu
Opens the Color Setting dialog box to set the color for parts in
this software. See “Color Setting Dialog Box” on page 4-61.
Displays the following menu items for controlling the measurement.
Start
Starts a measurement. During the measurement, the
measurement status indicator on the front panel lights up.
Repeat
Starts a repeat measurement. During the measurement, the
measurement status indicator on the front panel lights up.
This allows you to observe the measurement result with
changing the setup.
To stop the measurement, select the Measurement > Stop menu,
click the Stop Measurement button on the toolbar, or press
the Stop key on the front panel.
Stop
Configuration
Menu
Displays the following menu item to administrate the configuration of the built-in
modules in the mainframe and test fixture.
Module...
Help Menu
Stops the measurement.
Opens the Module Configuration dialog box. See “Module
Configuration Dialog Box” on page 4-85.
Displays the following menu item.
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About...
Opens the about box. See “About Box” on page 4-62.
Dialog Boxes
Change Device ID Dialog Box
The Change Device ID dialog box is used to change the device ID in all selected
measurement data files at once.
This dialog box is opened by selecting the main menu File > Change Device ID....
Device ID field
Enter a new device ID. You can also select it from the history.
Add... button
Opens the file selection dialog box to select the measurement
data file(s) that you want to change the device ID. The selected
files are displayed into the list.
Remove button
Excludes the selected measurement data file from the list.
Execute button
Changes the device ID.
Close button
Closes this dialog box.
Color Setting Dialog Box
The Color Setting dialog box is used to set colors of the following parts in this
software. The setting in the Color Setting dialog box is saved as a user setting.
•
Graph Background
•
Graph Axis
•
Graph Grid
•
Graph Text
•
Marker
•
Trance
This dialog box is opened by selecting the main menu View > Color Settings....
Clicking the color pattern opens the dialog box for selecting a color.
Apply button
Applies the present setting to the graph.
Reset button
Resets to the default setting.
OK button
Applies the present setting to the graph, and closes this dialog
box.
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Cancel button
Closes this dialog box without applying the present setting.
About Box
The about box displays the model number, the software revision number, download
URL for software updating, and so on.
This dialog box is opened by selecting the main menu Help > About....
Summary of Files
The following shows the summary of the files handled by the I/V measurement
software.
Table 4-5
Summary of Files
File Type
Setup File
Description
This has the setup data only.
Extension
*.pda-iv
(You can specify the folder
when saving the data)
*.pda-iv.txt
C:\Users\<user name>\
Documents\Keysight\Serie
sB150x\PowerDeviceAnal
yzer\IV\DataStore
(You can change this)
You can also save this using the File
menu anytime.
Measurement
Data File
This has the setup data and
measurement data including the device
ID and comment.
Folder as Initial Setting
The setup data and measurement data
are automatically saved to this file in
the specified folder at the end of the
measurement. And, you can also save
this using the File menu anytime.
File name of Measurement Data File on Auto-saving
An auto-saved measurement data file is named as follows:
<DeviceID>_<TIME>.pda-iv.txt
<DeviceID>:
Device ID
<TIME>:
Time stamp on auto-saving
Example)
Device-1_2014-10-30_18-56-55.pda-iv.txt
And, the file name is decided according to the following rule.
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1. <TIME> is the characters of year, month, day, hour, minute, and second. The
time stamp representation depends on the time setting on Windows. And, an
invalid character is replaced with an underscore (_).
Example 1) 2014-10-30_18-56-55
Example 2) 30-10-2014_6-56-55_PM
2. If the file name duplicates the existing file name, the serial number from 2
enclosed by brackets is concatenated before the file extension.
Example)
Device-1_2014-10-30_18-56-55(3).pda-iv.txt
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Power Loss Calculation Software
Power Loss Calculation Software
Power loss calculation software provides:
•
•
Calculation of switching device power loss for:
•
Hard switching mode
•
Soft switching mode
Inputs to characterize the following parameters:
•
Gate resistance
•
On resistance
•
Gate charge
•
Gate switching charge
•
Equivalent output capacitance (energy related)
•
Equivalent output capacitance (time related)
•
Input parameter assistance using related measurement data including:
•
•
Switching condition parameter input
•
•
Display of source measurement data
Support of parameter sweep for one parameter
Power loss calculation results of:
•
Total power loss
•
Conductive power loss
•
Driving power loss
•
Switching power loss (inductive load)
•
Graph representation of loss components for optional parameter sweep
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GUI Overview
The GUI (Graphical User Interface) of the Power loss calculation software is
comprised of the following areas.
Figure 4-16
Power Loss Calculation Software GUI
3
a
b
1
c
2
1. Work Area (See p. 4-66.)
This area provides the functions to set the calculation conditions and observe the
calculation results. This is separated to the following areas.
a. Conditions (See p. 4-66.)
b. Inputs (See p. 4-67.)
c. Results (See p. 4-74.)
2. Automatic Data Save (See p. 4-77.)
This area provides the functions regarding the automatic saving of the
calculation data files.
3. Operating Tools
•
Toolbar (See p. 4-78.)
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This provides the functions that are very frequently used in the button
format.
•
Main Menu (See p. 4-80.)
This provides the functions needed for various operations in the menu
format.
For the dialog boxes displayed during this software operation, see “Dialog Boxes”
on page 4-82.
For the files handled by this software, see “Summary of Files” on page 4-83.
Work Area
In this area, set the calculation conditions and observe the calculation results. This is
separated to the following areas.
•
Conditions (See p. 4-66.)
•
Inputs (See p. 4-67.)
•
Results (See p. 4-74.)
Conditions
This is an area to specify your assumption to calculate the power loss on your
switching device.
This area can be shown or hidden by clicking the line of
Conditions.
Figure 4-17
Conditions
Load Type
Select the assumed load type to calculate the power loss. You can select one from
the following load types.
•
Inductive: Inductive load
•
Resistive: Resistive load
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Inputs
This is an area to specify the device type of your DUT, and driving condition and
device characteristic parameters that are used as the input data for calculation. The
driving condition parameters and device characteristic parameters are separated by
tabs.
Other than manually entering the parameter values with referring the device data
sheet, you can also enter them using existing measurement data files. This area is
equipped with the functions to read existing measurement data files, display the
characteristic curve graphs, and extract some parameter values from them. The
following measurement data files are readable.
•
I/V measurement data file
•
Capacitance measurement data file
•
Gate charge measurement data file
They are separated by tabs.
This area can be hidden or shown by clicking the line of
Figure 4-18
c
Inputs.
Inputs
a
d
e
f
g
h
b
a. Device Type
Select the device type of your DUT from below.
•
MOSFET
•
IGBT
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b. Sweep
Parameter
Select one parameter that is swept to observe the loss changes for the changes of this
parameter, from the driving condition parameters and device characteristic
parameters. To select it, mark the check box of the parameter. As the default, the
Switching Frequency parameter in the Driving parameters is selected.
Specify the following items for the selected parameter as the sweep parameter.
•
Start
Specify the sweep start value.
•
Stop
Specify the sweep stop value.
•
Sweep Mode
Select one from the following sweep modes.
•
•
Linear (Sweep from start to stop in a linear incremental step)
•
Log (Sweep from start to stop in a logarithmic incremental step)
Number of Step
Specify the number of sweep steps from start to stop.
c. Drive
Conditions
Specify the driving condition parameter values.
For MOSFET:
•
f: Switching Frequency
Specify the switching frequency.
•
Vgs(on): Gate-source turn on Voltage
Specify the gate-source voltage required to turn the device on.
•
Vgs(off): Gate-source turn off Voltage
Specify the gate-source voltage required to turn the device off.
•
Id: Drain Current
Specify the On-state drain current.
•
Vds: Drain-source Voltage
Specify the Off-state drain-source voltage.
•
Rg(ext): External Gate Resistance
Specify the gate resistance included in the external driving circuit.
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•
Irms: Effective Drain Current
Specify the effective drain current (the root mean square of the load current).
The effective drain current (Irms) is the product of the square root of the drain
current (Id) and the duty cycle (D).
•
D: Duty Cycle
Specify the duty cycle within the range from 0 to 1.
For IGBT:
•
f: Switching Frequency
Specify the switching frequency.
•
Vge(on): Gate-Emitter turn on Voltage
Specify the gate-emitter voltage required to turn the device on.
•
Vge(off): Gate-Emitter turn off Voltage
Specify the gate-emitter voltage required to turn the device off.
•
Ic: Collector Current
Specify the On-state collector current.
•
Vce: Collector-Emitter Voltage
Specify the Off-state collector-emitter voltage.
•
Rg(ext): External Gate Resistance
Specify the gate resistance included in the external driving circuit.
•
Irms: Effective Collector Current
Specify the effective collector current (the root mean square of the load current).
The effective collector current (Irms) is the product of the square root of the
collector current (Ic) and the duty cycle (D).
•
D: Duty Cycle
Specify the duty cycle within the range from 0 to 1.
d. Device
Parameters
Specify the device characteristic parameter values.
For MOSFET:
•
Qg(on): Gate Charge at on
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Specify the On-state gate charge.
Qg(on)  Qg(off) is regarded as the gate charge required to turn the device on.
•
Qg(off): Gate Charge at off
Specify the Off-state gate charge.
Qg(on)  Qg(off) is regarded as the gate charge required to turn the device on.
•
Rg: Gate Resistance
Specify the gate resistance.
•
Qsw: Gate Switching Charge (Crss)
Specify the required gate charge (Mirror Charge) so that the drain-source
voltage is same as the gate-source voltage when the device state changes from
Off to On.
•
Vgs(pl): Gate Plateau Voltage
Specify the gate plateau voltage.
•
Rds(on): On Resistance
Specify the On-state resistance.
For IGBT:
•
Qg(on): Gate Charge at on
Specify the On-state gate charge.
Qg(on)  Qg(off) is regarded as the gate charge required to turn the device on.
•
Qg(off): Gate Charge at off
Specify the Off-state gate charge.
Qg(on)  Qg(off) is regarded as the gate charge required to turn the device on.
•
Rg: Gate Resistance
Specify the gate resistance.
•
Qsw: Gate Switching Charge (Cres)
Specify the required gate charge (Mirror Charge) so that the collector-emitter
voltage is same as the gate-emitter voltage when the device state changes from
Off to On.
•
Vge(pl): Gate Plateau Voltage
Specify the gate plateau voltage.
•
Vce(sat): Saturation Voltage
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Specify the collector-emitter saturation voltage.
It is the saturation voltage when the collector current (Ic) carries under the Drive
Condition settings.
e. Output
Characteristics
Specify the measurement data file taken by the I/V measurement software. To read
the file, click the Load Measurement Data button in the top left corner. The file
selection dialog box opens to read the file. The file name to be read is displayed next
to the Load Measurement Data button. And, the output characteristic data is
displayed on the graph.
You can change the minimum and maximum values on the X and Y-axes by clicking
the value.
For MOSFET:
The measurement data file that has any of the following output characteristics is
readable.
•
ID-VDS
•
RDS-ID
•
VDS-VGS
•
RDS-VGS
The following parameter value is extracted from the Vgs(on) parameter value
specified in the Drive Conditions and the output characteristic data to be read.
•
Device Parameters
•
Rds(on): On Resistance
For IGBT:
The measurement data file that has any of the following output characteristics is
readable.
•
IC-VCE
•
VCE(sat)
•
VCE-VGE
The following parameter value is extracted from the Vge(on) parameter value
specified in the Drive Conditions and the output characteristic data to be read.
•
Device Parameters
•
Vce(sat): Saturation Voltage
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f. Gate Resistance Specify the Rg characteristic measurement data file taken by the capacitance
measurement software. To read the file, click the Load Measurement Data button
in the top left corner. The file selection dialog box opens to read the file. The file
name to be read is displayed next to the Load Measurement Data button. And, the
Rg characteristic data is displayed on the graph.
You can change the minimum and maximum values on the X and Y-axes by clicking
the value.
For MOSFET:
The following parameter value is extracted from the Vgs(off) parameter value
specified in the Drive Conditions and the Rg characteristic data to be read.
•
Device Parameters
•
Rg: Gate Resistance
For IGBT:
The following parameter value is extracted from the Vge(off) parameter value
specified in the Drive Conditions and the Rg characteristic data to be read.
•
Device Parameters
•
g. Capacitance
Rg: Gate Resistance
Specify the measurement data file taken by the capacitance measurement software.
To read the file, click the Load Measurement Data button in the top left corner.
The file selection dialog box opens to read the file. The file name to be read is
displayed next to the Load Measurement Data button. And, the characteristic data is
displayed on the graph.
You can change the minimum and maximum values on the X and Y-axes by clicking
the value.
For MOSFET:
The measurement data file that has the following capacitance characteristics is
readable.
•
Ciss, Coss, Crss (Coss or Crss)
The Coss characteristics data is used to calculate the output capacitance loss.
The following parameter value is extracted from the Vgs(off) and Vds(off)
parameter values specified in the Drive Conditions and the Crss characteristic data
to be read.
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•
Device Parameters
•
Qsw: Gate Switching Charge
Charge when the Crss is charged from 0 V to Vds(off)-Vgs(off).
For IGBT:
The measurement data file that has the following capacitance characteristics is
readable.
•
Cies, Coes, Cres (Coes or Cres)
The Coes characteristics data is used to calculate the output capacitance loss.
The following parameter value is extracted from the Vge(off) and Vce(off)
parameter values specified in the Drive Conditions and the Cres characteristic data
to be read.
•
Device Parameters
•
Qsw: Gate Switching Charge
Charge when the Cres is charged from 0 V to Vds(off)-Vgs(off).
h. Gate Charge
If you have a B1506A Power Device Analyzer for Circuit Design, you can use a
measurement data file taken by B1506A’s gate charge measurement software.
Specify the measurement data file taken by the gate charge measurement software.
To read the file, click the Load Measurement Data button in the top left corner.
The file selection dialog box opens to read the file. The file name to be read is
displayed next to the Load Measurement Data button. And, the gate charge
characteristic data is displayed on the graph.
You can change the minimum and maximum values on the X and Y-axes by clicking
the value.
The following parameter values are extracted from the gate charge characteristic
data to be read.
For MOSFET:
•
Drive Conditions
•
Vgs(on): Gate-source turn on Voltage
•
Vgs(off): Gate-source turn off Voltage
•
Id: Drain Current
•
Vds: Drain-source Voltage
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•
Device Parameters
•
Qg(on): Gate Charge at on
•
Qg(off): Gate Charge at off
•
Qsw: Gate Switching Charge (Crss)
•
Vgs(pl): Gate Plateau Voltage
For IGBT:
•
•
Drive Conditions
•
Vge(on): Gate-source turn on Voltage
•
Vge(off): Gate-source turn off Voltage
•
Ic: Collector Current
•
Vce: Collector-Emitter Voltage
Device Parameters
•
Qg(on): Gate Charge at on
•
Qg(off): Gate Charge at off
•
Qsw: Gate Switching Charge (Cres)
•
Vge(pl): Gate Plateau Voltage
Results
This area shows the power loss data in the list and the trend chart formats, that was
calculated along your parameter settings specified in the Inputs.
Figure 4-19
Results
a
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Power Loss Calculation Software
a. List
Shows the loss data for the swept parameter values as the calculation result in the
list format.
•
Index
Shows the index number of the sweep step.
•
Sweep parameter
Shows the sweep parameter value specified in the Inputs.
•
Conduction Loss
Shows the conduction loss as the calculation result.
This is calculated from the following expression.
For MOSFET:
Rds  on   Irms
2
For IGBT:
2
Vce  sat 
-------------------------  Irms
Ic
•
Coss (or Coes) Loss
Shows the output capacitance loss as the calculation result.
This is calculated from the following expression.
For MOSFET:
b
f
a Coss

V
dv 
a = Rds  on   Id  on 
b = Vds
For IGBT:
b
f
a Coes

V
dv 
a = Vce  sat 
b = Vce
•
Switching Loss
Shows the switching loss as the calculation result.
This is calculated from either of the following expressions.
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When the Load Type specified in the Conditions is “Inductive” (MOSFET):


1
1
1
---  f  Vds  Id   Rg + Rg  ext    Qsw   ------------------------------------------------- + ---------------------------------------------------- 
2
 Vgs  on  – Vgs  pl  Vgs  pl  – Vgs  off  
When the Load Type is “Resistive” (MOSFET):


1
1
1
---  f  Vds  Id   Rg + Rg  ext    Qsw   ------------------------------------------------- + ---------------------------------------------------- 
6
 Vgs  on  – Vgs  pl  Vgs  pl  – Vgs  off  
When the Load Type specified in the Conditions is “Inductive” (IGBT):


1
1
1
---  f  Vce  Ic   Rg + Rg  ext    Qsw   ------------------------------------------------- + ---------------------------------------------------- 
2
 Vge  on  – Vge  pl  Vge  pl  – Vge  off  
When the Load Type is “Resistive” (IGBT):


1
1
1
---  f  Vce  Ic   Rg + Rg  ext    Qsw   ------------------------------------------------- + ---------------------------------------------------- 
6
 Vge  on  – Vge  pl  Vge  pl  – Vge  off  
•
Driving Loss
Shows the driving loss as the calculation result.
This is calculated from the following expression.
For MOSFET:
f   Qg  on   Vgs  on  – Qg  off   Vgs  off  
For IGBT:
f   Qg  on   Vge  on  – Qg  off   Vge  off  
•
Total Loss
Shows the total sum of the conduction loss, output capacitance loss, switching
loss, and driving loss.
b. Trend Chart
Shows the loss data for the swept parameter values as the calculation result in the
trend chart format. Where, the sweep parameter is assigned to the data for the
X-axis, and the conduction loss, output capacitance loss, switching loss, and driving
loss are assigned to the data for the Y-axis and are accumulated in this order.
You can change the minimum and maximum values on the X and Y-axes by clicking
the value.
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Automatic Data Save
This area sets the automatic saving for the setup data and measurement data. These
data are automatically saved to a new measurement data file in the specified folder
at the end of the measurement.
The Data folder and Recent data fields can be shown or hidden by clicking the line
of
Automatic Data Save.
Figure 4-20
Automatic Data Save
Device ID
Enter device ID string to the Device ID field. The maximum 10
recently-entered device IDs can be kept as history, and you can
also select one from the history list.
The entered device ID is automatically saved to the calculation
data file at the end of the calculation.
You can also change the device ID in the latest calculation data
file after the calculation here. To change it, change the device
ID in the Device ID field, and then click the Apply button .
Comment
Enter a comment string to the Comment field.
The entered comment is automatically saved to the calculation
data file at the end of the calculation.
You can also change the comment in the latest calculation data
file after the calculation here. To change it, change the comment
in the Comment field, and then click the Apply button .
Data
The Data field shows the latest auto-saved or last-opened
calculation data file name. You can do the following operations.
•
Open the calculation data file by clicking the Open
button .
•
Rename the calculation data file by clicking the calculation
data file name.
•
Delete the calculation data file by clicking the Delete
button .
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Data folder
Shows the absolute path of the auto-saved calculation data file.
To change this, click the Browse button to open the folder
selection dialog box. Select your desired folder in the dialog
box.
For the initial setting of the data folder, see “Summary of Files”
on page 4-83.
Recent data
Shows up to 10 auto-saved calculation data files that were
automatically saved recently, in the hyper-link format. Clicking
the hyper-link opens the selected calculation data file. This
destroys the presently-editing data.
If the number of the auto-saved calculation data files is over ten,
this field shows “more...”. Clicking this opens the file selection
dialog box. Select a calculation data file to open.
Toolbar
Figure 4-21
Toolbar
The toolbar has four tool button groups. The following shows the tool buttons in the
tool button groups.
File tool button group
Open
Opens the Open File dialog box used to open a
specified setup file or calculation data file. The present
data is cleared by opening the file.
Save
Saves the present data as the same file name.
Exit
Exits the power loss calculation software. Unsaved data
is destroyed.
Edit tool button group
Cut
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Moves the selected text to the clipboard.
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Copy
Copies the selected text to the clipboard.
Paste
Pastes the text from the clipboard to the insertion point.
On-screen
keyboard
Displays the on-screen keyboard.
Calculation tool button group
Start
Calculation
Starts a calculation.
Stop
Calculation
Stops the calculation.
To stop the calculation, select the Calculation > Stop
menu, click the Stop Calculation button on the
toolbar, or press the Stop key on the front panel.
View tool button group
Go to Palette
Displays the Software Palette in fullscreen mode.
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Main Menu
Figure 4-22
Main Menu
The following describes the functions of the main menu.
File Menu
Displays the following menu items to operate the setup file and calculation data file.
For the file types and extensions, see “Summary of Files” on page 4-83.
New
Clears the present data to start from initial setting.
Open...
Opens the Open File dialog box used to open a specified setup
file or calculation data file. The present data is cleared by
opening the file.
Save
Saves the present data as the same file name.
Save Setup As...
Opens the Save Data File dialog box used to save the present
setup data as the specified setup file.
Save Data As...
Opens the Save Data File dialog box used to save the present
setup data and calculation data as the specified calculation data
file.
Change Device
ID...
Changes the device ID recorded in the calculation data file.
This opens the Change Device ID dialog box, and changes the
device ID recorded in the selected calculation data file(s). See
“Change Device ID Dialog Box” on page 4-82.
Recent Setup Files
Lists a maximum of 10 names of the setup files that were
recently edited, as menu items. You can easily open a setup file
by using them.
Exit
Edit Menu
Exits the power loss calculation software. Unsaved data is
destroyed.
Displays the following menu items to edit the setup.
Cut
Moves the selected text to the clipboard.
Copy
Copies the selected text to the clipboard.
Paste
Pastes the text from the clipboard to the insertion point.
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On-screen
keyboard...
View Menu
Displays the on-screen keyboard.
Displays the following menu items for the display setting.
Go to Palette
Displays the Software Palette in fullscreen mode.
Main Window
Displays the following menu item.
Fullscreen
Changes the display style of the main
window.
If this is marked, the main window does not
have the titlebar and is displayed in
fullscreen mode.
If this is unmarked, the main window has
the titlebar and is displayed in the regular
window style.
This is initially marked.
Color Settings...
Calculation Menu
Opens the Color Setting dialog box to set the color for parts in
this software. See “Color Setting Dialog Box” on page 4-82.
Displays the following menu items for controlling the calculation.
Start
Starts a calculation.
To stop the present calculation, select the Calculation > Stop
menu, click the Stop Calculation button on the toolbar, or
press the Stop key on the front panel.
Stop
Help Menu
Stops the calculation.
Displays the following menu item.
About...
Opens the about box. See “About Box” on page 4-83.
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Dialog Boxes
Change Device ID Dialog Box
The Change Device ID dialog box is used to change the device ID in all selected
calculation data files at once.
This dialog box is opened by selecting the main menu File > Change Device ID....
Device ID field
Enter a new device ID. You can also select it from the history.
Add... button
Opens the file selection dialog box to select the calculation data
file(s) that you want to change the device ID. The selected files
are displayed into the list.
Remove button
Excludes the selected calculation data file from the list.
Execute button
Changes the device ID.
Close button
Closes this dialog box.
Color Setting Dialog Box
The Color Setting dialog box is used to set colors of the following parts in this
software. The setting in the Color Setting dialog box is saved as a user setting.
•
Graph Background
•
Graph Axis
•
Graph Grid
•
Graph Text
•
Trend
•
•
Driving Loss
•
Output Capacitance Loss
•
Switching Loss
•
Conduction Loss
Trace
This dialog box is opened by selecting the main menu View > Color Settings....
Clicking the color pattern opens the dialog box for selecting a color.
Apply button
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Applies the present setting to the graph.
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Reset button
Resets to the default setting.
OK button
Applies the present setting to the graph, and closes this dialog
box.
Cancel button
Closes this dialog box without applying the present setting.
About Box
The about box displays the model number, the software revision number, download
URL for software updating, and so on.
This dialog box is opened by selecting the main menu Help > About....
Summary of Files
The following shows the summary of the files handled by the power loss calculation
software.
Table 4-6
File Type
Setup File
Summary of Files
Description
This has the setup data only.
Extension
*.pda-pl
(You can specify the folder
when saving the data)
*.pda-pl.txt
C:\Users\<user name>\
Documents\Keysight\Serie
sB150x\PowerDeviceAnal
yzer\PowerLoss\DataStore
(You can change this)
You can also save this using the File
menu anytime.
Calculation data
File
This has the setup data and calculation
data including the device ID and
comment.
Folder as Initial Setting
The setup data and calculation data are
automatically saved to this file in the
specified folder at the end of the
calculation. And, you can also save
this using the File menu anytime.
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File name of calculation data File on Auto-saving
An auto-saved calculation data file is named as follows:
<DeviceID>_<TIME>.pda-pl.txt
<DeviceID>:
Device ID
<TIME>:
Time stamp on auto-saving
Example)
Device-1_2014-10-30_18-56-55.pda-pl.txt
And, the file name is decided according to the following rule.
1. <TIME> is the characters of year, month, day, hour, minute, and second. The
time stamp representation depends on the time setting on Windows. And, an
invalid character is replaced with an underscore (_).
Example 1) 2014-10-30_18-56-55
Example 2) 30-10-2014_6-56-55_PM
2. If the file name duplicates the existing file name, the serial number from 2
enclosed by brackets is concatenated before the file extension.
Example)
Device-1_2014-10-30_18-56-55(3).pda-pl.txt
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Common GUI Components
Common GUI Components
This section describes the following GUI components commonly used in the
Keysight Easy Test Navigator software.
•
“Module Configuration Dialog Box”
Module Configuration Dialog Box
You can do the following operations in the Module Configuration dialog box.
•
Checking the revision of the firmware
•
Setting the power line cycle
•
Checking the status of the hardware modules
•
Resetting the hardware modules
•
Executing the self-test
•
Executing the self-calibration
•
Executing the self-diagnostics
This dialog box is opened by selecting the main menu Configuration > Module....
Firmware Revision Shows the revision of the firmware.
Line Frequency
Module Name and
Status
Sets the power line frequency. Select one from below.
•
50 Hz
•
60 Hz
Shows the module’s model numbers and the result of the self-test, self-calibration,
and self-diagnostics for the modules.
Table 4-7 shows the configuration and status.
Operation Buttons The Module Configuration dialog box has the following buttons for operations.
Reset
Initializes and re-acknowledges all the modules.
Self Test
Starts the self-test for all the modules.
Self Calibration
Starts the self-calibration for all the modules.
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Diagnosis
Starts the self-diagnostics for all the output selectors.
After clicking this button, a dialog box is opened to instruct the
terminal connections. Connect the terminals according to the
displayed instructions.
Error Log
Abort
Aborts the process in progress.
Close
Closes the Module Configuration dialog box.
This is a display area situated between the Abort and Close buttons. Error messages
are displayed when errors occur during a process. The error messages are cleared
when you do any new operation.
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Table 4-7
Configuration and Status
Configuration
GNDU : B1500-66505
Status
•
Passed
MPSMU (SMU1) : B1511B
MFCMU : B1520A
Pass
•
Testing
Self-testing now
HVSMU (SMU2) : B1513C
•
Calibrating
Calibrating now
•
Fail
Self-test failed or self-calibration
failed
•
Unavailable
Not acknowledged
Device Capacitance Selector
•
Pass
Passed
•
Diagnosing
Diagnosing now
•
Fail
Self-diagnostics failed
•
Unavailable a
Not acknowledged
a. This also occurs before it is turned on.
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This information is subject to change without notice.
© Keysight Technologies 2014
Edition 2, December 2014
*B1507-90000*
B1507-90000
www.keysight.com