The VHX-500 provides all functions, from zoom observation to

NEW
Digital Microscope
VHX-500
The VHX-500 provides all functions,
from zoom observation to advanced analysis.
Digital Microscope
Clear 3-D observation that is not available
with conventional microscopes
All functions from observation to 3-D display are provided in the VHX-500 unit.
Do you need to clearly observe a target with more accuracy in less time?
The VHX-500 has been designed to meet these needs.
The VHX-500 not only provides advanced functions that provide ultra-deep and high definition
observation, it can be easily operated by anyone. The VHX meets a variety of user’s requests for
evaluation time reduction and quality improvement. Observation, recording and measurement can all
be performed within the VHX-500.
NEW Digital Microscope VHX-500
2
Ease of operation superior to
conventional microscopes ……P4-5
❙ Observation — Large depth of field
❙ Recording — Recording observed images
on the spot
❙ Measurement — Providing real-time
measurement
1 Clear observation
……………………P6-8
❙ 18,000,000-pixel handheld camera with the highest resolution in its class
❙ High-resolution RZ lens
❙ Contrast optimization (First in the industry)
2 3-D observation
………………………P9-11
❙ Highest speed in the industry Real-time depth composition
❙ Highest speed in the industry Quick 3-D function (Hybrid D.F.D method)
❙ Various 3-D display and 3-D measurement modes
3 Easy operation ……………………………P12
❙ Optimal observation with the push of a button
4 More accurate measurement
…P13-15
❙ Wide-visual-field, automatic 2-point distance measurement (Industry-first)
❙ 3-D profile automatic measurement
3
Ease of operation superior
to conventional microscopes
The VHX-500 makes Observation, Recording and Measurement easy. Anyone can observe targets quickly
and accurately.
Observation
Clear 3-D observation with a large depth of field
The VHX-500 provides a depth of field
at least 20 times larger than optical
microscopes. Thus, the VHX-500 can
accurately observe a target (even with a
large height difference) that could not
be focused on with conventional
microscopes. Furthermore, the number
of steps required for observation
including focus adjustment can be
reduced considerably.
Image captured with an optical microscope
Image captured with a digital microscope
Observation at all angles
°
15°
0°
15°
5°
30
°
4
60
60
°
4
30
5°
You can freely observe a target with the
lens unit held by hand or mounted to the
stand. You can capture any phenomenon
exactly as it is and not overlook a defect
by changing the observation angle.
Furthermore, the time required for
observation can be reduced considerably.
°
75 °
90°
Hand-held observation
Free-angle observation system
Real-time image improvement
Through various digital processing
functions, the VHX-500 can solve
problems on displayed images caused
by low contrast or darkness. With the
KEYENCE-original graphic engine, the
VHX-500 enables real-time observation
while using the image improvement
functions, providing accurate observation
without overlooking any phenomenon.
Gold plating (100x)
4
Normal image
Improved image
Recording
All In One
Recording observed images on the spot
Built-in Display
The VHX-500 incorporates a large-capacity (160 GB)
HDD. Image files can be easily copied into your PC via
LAN. Furthermore, the VHX-500 can be connected to
various storage media. Saved images can be loaded
instantaneously into your storage media. Since the
VHX-500 can save moving images as well as still
images, it can record a real change or minute motion
of a target over time.
The VHX-500 includes a UXGA (1600 x 1200 pixels) high-resolution
15-inch LCD monitor. This monitor displays the observed images as
well as the measurement information. Displayed images can be
quickly saved onto the integrated HDD or CD-R/RW drive.
Hard disk
CD-R/RW
Measurement
Real-time measurement
Through simple mouse operations, the VHX-500 offers
real-time measurement of the distance, radius, angle and
area of a target on the monitor screen. Unlike systems
that execute measurement after loading a still image into
a PC, the VHX-500 can measure a target repeatedly
while changing the visual field. This function is useful for
measurement at various positions of a target.
USB
15-inch LCD monitor
Measuring function
Lens
CCD camera
Weld penetration (50x)
5
1
Clear
observation
18
Highest resolution in its class
million pixels
With a high-precision multi-scan system, the VHX-500 produces
18 mega-pixel images with a handheld camera.
Advanced Scanning System
Although the VHX-500 is compact, it provides high-definition (18 million pixels max.) observation
using the CCD multi-scan system with a built-in actuator. Furthermore, with the progressive
scanning method that eliminates glare, the VHX-500 produces texture expression and color
reproduction similar to observation with the naked eye.
2.11 million pixels
Resolution: 1000 TV lines
18 million pixels
Resolution: 2000 TV lines
Selectable resolutions suited for observation purposes
❙ 18,000,000-pixel ultra-high-definition mode (2000 TV lines)
❙ 8,000,000-pixel high-definition mode (1600TV lines)
❙ 2,000,000-pixel, 3-CCD mode (1200TV lines)
❙ 4,000,000-pixel-equivalent clear mode [Equivalent to moving image] (1200TV lines)
❙ 2,110,000-pixel normal mode (1000TV lines)
A peacock feather
Industry-first
Camera-shake
correction function
Through further improvement of the
processing capacity, the VHX-500
has real-time camera-shake
correction. This function allows highmagnification observation without
being affected by environmental
vibration.
Without camera-shake correction
With camera-shake correction
Frame rate 15 F/sec
With a frame rate of 15 frames/second, the VHX-500 provides excellent tracking ability,
providing magnification change and focus adjustment to be performed smoothly.
6
High-resolution lens
Using KEYENCE-original optical technologies, the VHX-500 provides superior
resolution, producing clear and accurate observation.
Real Zoom Lens
The VHX-500 uses the RZ (real zoom)
lens, a high-performance lens that can
correct chromatic aberration to an ideal
value. Through the leading-edge optical
design and advanced illumination
technology, the VHX-500 can minimize
aberration distortion. Furthermore, with
the highly-telecentric lens design, the
RZ lens can create extremely clear
depth composition images and 3-D
images.
The lens unit is comprised of 24 lenses
in total, including 13 lenses for the
objective section, and 11 lenses for the
zoom section. Using a silica lens, the
VHX-500 can correct chromatic
aberration.
Ultra-small, high-performance zoom lens
NEW
VH-Z20
20
200
❙ Resolution approximately twice as high as
conventional microscopes
❙ A depth of field at least twenty times larger than
optical microscopes
❙ Optical 10x zoom covering 20x to 200x observation
magnification
Wide-range zoom lens
VH-Z100
100 1000
VH-Z500
500 5000
❙ High-resolution lens. Providing 2.5 times higher resolution
than conventional microscopes
❙ Optical 10x zoom covering 100x to 1000x observation
magnification at a 0.98" (25 mm) observation distance
❙ Extremely large depth of field: Approx. twice as deep as
conventional microscopes
High-resolution zoom lens
❙ High-resolution lens with a numerical aperture (NA) of
0.82
❙ Optical 10x zoom covering 500x to 5000x observation
magnification
❙ Polarizing illumination available
7
Optimal settings
With the KEYENCE-original graphic engine, you can always observe a target with optimal
settings. Accurately observe parts without overlooking defects.
Optimal contrast
Industry-first
Real-time correction similar to
the sensitivity of human eyes
With the optimal contrast algorithm, the
VHX-500 automatically adjusts dark and
bright areas to the optimal contrast, without
changing the area with proper sensitivity.
You can observe fine surface pictures which
cannot be expressed only with illumination
adjustment.
DVD mechanical component (30x)
Simply with the push
of a button
Solder(150x)
Simply with the push
of a button
Retaining the area
with proper sensitivity
Eliminating halation Industry-first
For a still image
Eliminating the glare of a target
In addition to the contrast optimization, the
KEYENCE halation eliminating function can
suppress the glare of a target subjected to
strong reflected light. This function can
remarkably reduce the time required for
illumination adjustment.
Additional image
improvement
functions applicable
to various targets
Supercharge shutter
Gamma correction
Edge enhancement function
Noise elimination
When the displayed image is
dark due to insufficient light
quantity, the shutter time can
be specified in 0.1-second
steps up to 17 seconds (max).
Provides contrast for a
target without brightness
difference.
Enhances the edges of
an observation area,
enabling easy detection
of a minute flaw.
Eliminates noise
components only, with
original image data
retained.
Lighting
Lighting shift function Industry-first
e-Preview mode
One-button control for enhancing projections
and depressions
One-click operation selects the image mode
optimal for observation.
Simply with the push
of a button
Simply by pushing the Height Difference Enhancement button on
the console, the illumination mode is switched instantaneously to
partial illumination that enhances target edges.
Full illumination
All illuminations at
the tip of the camera
unit turn on.
Simply with the push
of a button
Simply by pushing the Optimal Image button, four types of
image modes are listed. Then, you can click on an image
suitable for your observation purpose.
Partial illumination
Only one-fourth of the
illuminations at the tip of the
camera unit turn on. The
projections and depressions
are enhanced.
Industry-first
Full illumination mode
Partial illumination mode
Selectable
by a click!
Full illumination + image
enhancement mode
Gold plating(100x)
8
Coating surface condition (500x)
Partial illumination + image
enhancement mode
2
3-D
observation
Digital Focus
The VHX-500 can remarkably reduce observation time during the
inspection of targets with uneven surface conditions.
Real-time depth composition
Highest speed in the industry
Effective for quick confirmation of the whole image (Approx. 5 times higher speed than
conventional microscopes)
Real-time depth composition is so quick that you may not realize that you have executed
the composition. You can view the overall-in-focus image in real time simply by turning the
focus adjusting dial while observing a target. With the KEYENCE-original graphic engine,
the VHX-500 can quickly display a composed image on the large (UXGA) screen.
Therefore, you can save a considerable amount of labor and time required for composition.
Just turn
the knob
Observation at high magnification
The microscope cannot be
focused on the whole image.
Observation using the VHX digital microscope
The whole image is brought into focus simply
by moving the lens downward.
When a higher area is brought into focus
When a lower area is brought into focus
Coil (400x)
High-quality depth composition
Industry-first
Composing sharp images with superior depth-of-field while correcting the edge deviations
With the KEYENCE-original hybrid D.F.D depth composition method, the VHX-500 can
display a high-definition, overall-in-focus image without being affected by extraneous
light. Furthermore, the VHX-500 provides the position correction function as a standard
feature, which can correct edge displacement of a target image and magnification
fluctuations caused by shift of the focus position. The VHX-500 can create a highquality composed image.
Position correction
The VHX-500 corrects edge displacement caused by the shift of the focus
position of a non-telecentric optical lens.
When an image with different
focus positions is captured with a
non-telecentric optical lens, the
edge of the target image will be
displaced when the focus position
is changed. The VHX-500 can
correct such edge displacement
automatically and display a
perfect, overall-in-focus image.
Originally developed
graphic engine
Component on board (90x)
Without position correction
With position correction
With the special image processing
board based on the KEYENCE-original
architecture, the VHX-500
provides real-time processing of UXGA images.
9
Quick 3D
A 3-D image can be displayed instantaneously
by moving the lens downward.
Quick 3-D display
Highest speed in the industry
Ultimate ease of operation
Through improvements made to the
hybrid D.F.D method, the VHX-500 lets
you create a high-quality composed
image instantaneously by turning the
focus adjusting knob and proceeding
directly to the 3-D display mode.
Simply by
turning the dial
Focus on the highest point. Gradually
shift the focus point downward.
High-quality composition is complete.
Proceed directly to the 3-D display
mode.
Electrode hole (1000x)
The 3-D image can be rotated freely or zoomed
through mouse operations.
The D.F.D method is an abbreviation of the Depth from Defocus
method, a way of obtaining 3-D depth data through analysis of defocus of
2-D images. Even if a completely focused image cannot be captured, the
VHX-500 series calculates a height difference of the target. Thus, the
VHX-500 series enables depth composition and 3-D image display by using
less sample images than conventional microscopes.
This method eliminates the need to load images on all focus positions,
resulting in analysis efficiency improvement.
Method for
superimposing
in-focus images
D.F.D method
The hybrid D.F.D method provides the following features:
● Accurate composition even with a target that has a gentle slope and no remarkable unevenness. (A.D.I algorithm)
● Noise waveform generated on a target edge can be eliminated securely. (A.S.I filter)
10
3-D illumination simulation
Since the illumination direction can be changed freely through mouse control, the VHX-500 can capture
optimal images according to the purpose of observation, such as inspecting the profile and surface
condition. This function is effective for observation of fine surface conditions.
Ceramic substrate (1000x)
Normal 3-D image
3-D illumination simulation image
3-D comparative function
This function compares two different targets placed side by side, while changing the
observation angle. Furthermore, the newly added comparative difference display, allows
you to capture a profile difference visually with two types of 3-D data superimposed.
Two-screen simultaneous comparative function
Comparative difference display function
Various measurements on the 3-D image
New function
*Function of the
VHX-H2M
Volume measurement
Cross-section profile measurement
A volume surrounded with the rectangle on a 3-D
image can be measured.
An arbitrary cross-section profile on a 3-D image
can be measured.
Plane distance measurement
Plane angle measurement
A distance between two parallel planes on a 3-D
image can be measured.
A cross-section angle of two arbitrary planes on a
3-D image can be measured.
11
3
Easy operation
Simple operation
Professional observation with the push of a button.
The console is intended to perform observation more quickly and easily. Commonly used
functions are provided on the console, allowing you to observe any target clearly with the
push of a button.
Optimal contrast
Optimal Image
Adjusts the contrast
automatically according
to the sensitivity of
human eyes.
Four types of image modes
are listed, allowing you to
select a suitable image
according to the purpose of
observation.
Height Difference
Enhancement
Real Digital Zoom
You can simultaneously
zoom in on a desired
observation spot.
The full and partial
illumination modes can
be switched simply by
pressing this button.
Camera-Shake Correction
Corrects minute vibration
such as environmental
vibration, ensuring stable
observation.
REC
Recording
PAUSE
Real-time depth composition
Pause
Simultaneously composes
images of a target with a
height difference.
Remove Halation
Quick 3-D display
Eliminates the glare of a
target surface caused by
light reflection.
Creates a 3-D image
simply by moving the
focus downward.
Useful observation functions
Split screen Simplifies comparative observation
Four-part split
Motor
Vertical two-part split
Electronic component
Horizontal two-part split
Razor (2000x)
Easy data recording/application
Compatible with USB2.0
The VHX-500 can be connected to various
storage media (external memory devices)
via the USB interface. (USB2.0)
You can quickly take observation results
with your storage media.
* Some devices may not be compatible, depending on the specifications.
VHX-500 communication software (Free software)
Dedicated software that can be used on your PC.
This software enables data transmission/reception
between the VHX and PC via LAN.
With the newly added high-speed transmission
mode for LAN, data communication speed becomes
three times higher than conventional models.
(Compatible OS: Windows XP/ 2000)
Compatible with LAN / FTP server
The VHX-500 provides a 1000baseT
LAN port. You can take data from your
PC browser or FTP software by setting
a VHX IP address.
* For connection to a FTP server, additional software is required.
12
1.Windows XP/2000 are registered trademarks of Microsoft Corporation, U.S.A.
VHX-500 3-D display software
(Free software)
This software reproduces a 3-D image captured
with the VHX Series, allowing you to observe the
3-D image while changing the 3-D angle, as well as
a still image. It's new report tool software can
convey analysis results correctly to associated
people by giving impact on the visuals.
4
More accurate
measurement
Real-time on screen measurement
High-resolution dimensional measurement
Auto edge selection
Accurate measurement on the 4800 x 3600 sub-pixel screen
Accurate observation by eliminating operator errors
With an overall view, it is difficult to accurately select
measurement points. With a close-up view, the measurement
points may not appear on the same screen. The VHX-500
zooms in as you select the measurement points, then returns to
the overall view for easier observation.
Even when the measurement
point specified by clicking the
parallel 1762.6 µm
mouse on the screen is
deviated, the edge of the
target is detected to correct
the measurement point
automatically. This function
realizes accurate and highly
reliable dimension
Corrects the point
measurement by eliminating
automatically
the reading errors of
Read head of hard disk (70x)
operators.
Normal screen
TFT (500x)
Auto calibration
Industry-first
OP-51483
Option
Enlarged screen
Industry-first
Discrimination lines are displayed under
the scale marks. The pitch of the scale
marks is recognized by differentiating the
number of lines through image processing.
Calibration is performed by counting the
CCD pixels between the pitches.
A special glass scale simplifies automatic calibration.
Automated calibration according to the observation
magnification can be performed using the special glass scale
(op-51483). Accurate dimension measurements can be
performed without significant measurement errors.
1 mm
0.04"
0.1 mm
0.004"
0.01 mm
0.0004"
Various measurement modes
Distance
Radius
Center distance
X-Y distance
Y
D
X
The distance between two points
on the screen can be measured by
specifying the points with the
cursor.
The radius of the circle can be
measured by specifying the desired
three points on the screen.
Area/Count/Auto measurement
Specify three points on the
circumference to find the coordinate of
the circle center. The distance between
two circle centers can be measured by
specifying two circles sequentially.
The longitudinal (X-direction), transversal
(Y-direction), and diagonal (D-direction)
distances of a rectangle formed by four
coordinate axes (two in the X-direction and two
in the Y-direction) can be measured at one time.
Distance between parallel lines
The shortest distance between two parallel
lines can be measured by specifying two
arbitrary points that draw a line and
another line parallel to the first line.
Length of perpendicular line
The shortest distance (perpendicular
line) between a line specified with
two arbitrary points and another
arbitrary point can be measured.
Connector crimp (100x)
The target of the measurement can be
extracted automatically by differentiating
the brightness and colors in the image.
The area and the perimeter length are
measured. The number of extracted areas
can be counted automatically as well.
Angle
The angle determined
Angle by three
arbitrary points on the screen can
be measured.
Overlay Scales
Bar, mesh, cross and other various shapes can be
displayed as a scale. These can be conveniently
used as the reference scale for simplified
measurement or for printing the images.
13
3-D profile measurement using a microscope
With the high-precision electric linear stage and the newly-developed profile measurement function, the VHX-500
integrates all steps from zoom observation to 3-D profile automatic measurement.
Profile Measurement Unit
3-D automatic profile measurement unit
Optional
High-resolution zoom lens
VH-Z500
Electric stage
VHX-S15
Dedicated stand
VH-S1
Controller
VHX-S15
3-D profile measurement software
VHX-H2MK
3-D profile measurement
* Function of the VHX-H2MK
The VHX-500 creates a 3-D image based on automatically captured
images, and it calculates height profile data on a desired measuring
line. Height, width and height difference data on the measuring line
are plotted on a graph. Since the profile graph is related to the
cursor position in the image display area, you can see the current
measuring point easily.
Height color/scale display
* Function of the VHX-H2MK
Color bars that indicate height are displayed on a 3-D image. The highest
position is displayed in red, and the lowest position is displayed in blue,
allowing you to see a height difference at a glance. The height data can
be superimposed on a raw image. Furthermore, the X-axis, Y-axis and
Z-axis scales are calculated automatically and displayed according to the
image size and the 3-D rotation angle.
3-D raw image
3-D raw image + rainbow image
3-D rainbow image
Bump on semiconductor (3000x)
With the horizontal/vertical cursor, the height and width can be
measured. The 2-line comparative mode can simultaneously display
comparative analysis profile data on two parallel lines.
14
Grind stone (500x)
2-point height difference measurement
The VHX-500 can quickly and automatically
measure a height difference between specified
windows in the automatic measurement mode. In
the manual measurement mode, you can measure
a height difference between two points while
monitoring the focus conditions.
Bump (3000x)
Auto focus
This function helps everyone to perform highmagnification focus adjustment quickly and
accurately. The auto focus can be applied even to a
target with uneven surface conditions, since the
focusing area can be specified on the screen.
Chip resistor (500x)
Before focusing
After focusing
All-in-one system
Centralized control of stage operation, observation and analysis
All steps from stage operation, zoom observation
and 3-D analysis to image-saving and network
connection are controlled in the VHX unit. You do not
need a device or PC for stage operation or analysis.
This system saves space and provides high
operating efficiency.
❙ Specifications
Stage control software
Electric stage
Dedicated stand
Lens
Controller
VHX-500/100F
3-D profile measurement
software
❙ Option
Model
VHX-S15
Applicable lens
VH-Z500, VH-Z450, VH-Z100, VH-Z75
Stage stroke distance
0.59" 15 mm
Motor
5-phase stepping motor
Resolution
0.002 Mil 0.05 µm/pulse
Positioning accuracy *
0.23 Mil 6 µm
Repeatability *
±0.02 Mil 0.5 µm
Ratings
Camera
Power supply voltage
100 to 240 VAC, 50/60 Hz
Power consumption
70 VA
Ambient temperature
+5 to 40°C (41 to 104°F)
Relative humidity
35 to 80% RH (No condensation)
Weight
Controller: 3 kg, Electric stage: 1.3 kg
Load capacity
5 kg
Digital indicator set
OP- 51610
Digital indicator for direct
measurement of the lens
stroke distance, ensuring
easy calibration
*Typical value of electric stage single unit
15
Applications
Wide range of applications to meet the needs of various industries
Electric/Electronics
Transportation/Metal industries
16
HDD head
(100x)
IC pattern
(1000x)
LCD
(800x)
LED
(200x)
Fracture surface
(500x)
Microstructure of metal
(400x)
Grind stone
(500x)
Tip of ballpoint pen
(200x)
Material/Chemical industries
Non-woven fabric
(150x)
Glass fiber
Residual stress on resin
(100x)
Mica
(200x)
(1000x)
Other industries
Food (Sugar)
Plant (Broad bean)
(50x)
(300x)
Chemical (Liquid agent)
(500x)
Microorganisms (Water flea)
(300x)
17
Peripheral equipment
Free angle System
NEW
Free-angle observation system
VH-S30
Vibration Proof / Super High-accuracy
QUICK SETUP MARKS
The ideal setting position for different
lenses is indicated on the arm.
Visual field/height
EASY-TO-ADJUST
Easy adjustment of visual
field(height), rotation, and oblique
axis. A custom mechanism allows
the target to stay in focus, even
when the lens unit is inclined or
rotated.
WEDGE-SHAPED
CHANNEL
The mounting arm is held in place with a
wedge-shaped channel. This prevents the
arm from moving during observations.
CABLE HOLDER
The cable is held in place, preventing
vibration. The cable is also protected
against abrasions and deterioration.
Oblique axis
STABILITY
The die-cast main body provides a highly
rigid structure that allows for more stable
observations.
Rotation axis
VIBRATION
PROTECTION
Absorbs low to high frequency
vibration, allowing for observation of
specimens without interference.
18
Easy to operate
SIMPLE ADJUSTMENT
FLEXIBLE OPERATION
It is easy to adjust the optical axes by simply positioning the stage at the
indicated height. The instructions are provided on the base of the stage,
allowing new users to immediately begin using the VH-S30. (Patent pending)
Observation can be performed from any angle without moving the lens. You
can instantly find the best position to observe an object. Since the VH-S30
does not use a mirror, it enables the user to observe objects as they
normally appear. (Patent pending)
Easy adjustment of axes by fixing the
stage at the upper limit.
Observation from various angles by
moving the pole.
Instructions printed on the stage.
360° observation.
Excellent vibration protection
Ultra precise mechanism
A special vibration proof material has been selected to insulate the VH-S30.
It is designed to absorb a broad range of vibrations in order to provide stable
images of highly magnified objects.
The stage combines the flexibility and ultra precision that are critical to a wide
range of applications.
The vibration protective rubber is the same
material used for vision inspection systems and
high-accuracy measurement devices in the
semiconductor, R&D, and automotive industries.
Vibration-protective material
15°
30
The oblique axis uses an ultra precise
bearing to accurately position the central
axis.
0°
Inclination
15°
30
°
4
60
60
°
°
5°
4
Ultra precise bearing
In addition to the course adjustment dial,
the super fine adjustment dial can be
adjusted in 5 µm steps.
Mounting components/solder (50x)
VIEW
5°
Super fine adjustment dial
°
75°
30°
60°
20°
60°
80°
9 0°
Right above
Rotation
19
Lens Line up
Three types of high-resolution, high-performance RZ lenses
High resolution, Ultra-small
High-performance zoom lens
NEW
Real Zoom Lens
Ultra-small, high-performance zoom lens
20
200
VH-Z20
The VH-Z20 offers high-resolution observation at generalpurpose magnifications of 20x to 200x. Furthermore, the
large depth of field, that is a feature of the conventional
VHX Series, has been further enhanced.
VH-Z20
Model
Magnification 1.
30x
20x
50x
100x
150x
200x
Horizontal 0.60" 15.24 0.40" 10.16 0.24" 6.10 0.12" 3.05 0.08" 2.03 0.06" 1.52
Monitoring
Vertical 0.45" 11.40 0.30" 7.60 0.18" 4.56 0.09" 2.28 0.06" 1.52 0.04" 1.14
range
(inch mm)
Diagonal 0.75" 19.05 0.50" 12.70 0.30" 7.62 0.15" 3.81 0.10" 2.54 0.08" 1.91
Depth of field
(inch mm) 2.
1.34" 34
0.61" 15.5
Monitoring distance
0.24" 6.0
0.06" 1.6
0.03" 0.74 0.02" 0.44
1" 25.5
(inch mm)
1. Magnification on a 15-inch monitor
2. When priority is given to the depth of field. The depth of field varies depending on
the diaphragm ring.
❙ Features
Approx. twice the resolution of conventional lenses
Excellent depth of field: Approx. twice as large as conventional lenses
As a result of concentrating many years of microscope experience and the
essence of KEYENCE optical technologies, the VH-Z20 is designed to
provide high-class resolution.
The large depth of field, which is the greatest feature of the VHX Series
microscope, has been intensified further. The VH-Z20 provides a larger depth
of field than conventional lenses. You can observe a target easily with uneven
surface conditions.
Conventional lens
Drill tip (Optical microscope)
RZ lens
(100x)
Drill tip (RZ lens)
(100x)
Optical adapters for the VH-Z20 (Z25)
Variable illumination adapter
Coaxial vertical illumination adapter
With the KEYENCE-original optical mechanism,
the variable illumination adapter covers both
vertical illumination and lateral illumination
without irregularity in the illuminating conditions.
The optimal illumination angle can be selected.
The coaxial vertical illumination adapter emits light
parallel to the lens axis. Using this adapter, the
microscope can retain sufficient light quantity for
illumination. This adapter is useful for observation
of metal microstructures, IC, etc. in a bright visual
field.
VH-K25
Paper surface (200x)
Standard illumination
* The above photo is the optical adapter for VH-Z20(Z25).
20
Variable illumination
IC (1000x)
When the adapter is not used
(Dark visual field)
OP-35416
When the adapter is used (Bright visual field)
Wide-range zoom lens offers
high resolution and large depth of field
Real Zoom Lens
Wide-range zoom lens
100 1000
VH-Z100
This innovative lens was developed to satisfy the
contradictory needs of high resolution and high depth of
field for magnified observation.
VH-Z100
Model
Magnification 1.
100x
200x
300x
500x
700x
1000x
Horizontal 012" 3.05 0.06" 1.53 0.04" 1.02 0.02" 0.61 0.02" 0.44 0.01" 0.30
Monitoring
Vertical 0.09" 2.28 0.04" 1.14 0.03" 0.76 0.02" 0.46 0.01" 0.33 0.01" 0.23
range
(inch mm)
Diagonal 0.15" 3.81 0.07" 1.90 0.05" 1.27 0.03" 0.76 0.02" 0.54 0.01" 0.38
Monitoring distance
0.98" (0.79 2.) 25 (20 2.)
(inch mm)
1. Magnification on a 15-inch monitor
2. When the ring illumination adapter is attached
Wide range zoom: 10x optical zoom
Highly-telecentric zoom lens
The VH-Z100 is designed for a wide zoom range, seamlessly covering from
the whole image to an enlarged view of a target. Since the VH-Z100 retains
a constant observation distance throughout the zoom range, it can improve
operating efficiency. It is an all-around zoom lens applicable to any target.
With the highly-telecentric lens design, the RZ lens can create extremely
clear and perfect depth composition images and 3-D images. The RZ lens
can make the best use of the digital focus functions that are an essential
feature of the VHX Series.
Solder cross-section
Battery safety valve
(100x)
(1000x)
(700x)
Diffuse illumination adapter
OP-35324
Polarization illumination adapter
Diffuse illumination
Effective for suppressing glare
during observation through a
transparent film or coating.
You can observe real surface
conditions without the glare of a
Multi-diffuse
target. The diffuse illumination
adapter
adapter emits both vertical
OP-35469
illumination and lateral
illumination.
OP-35415
Printed material (30x)
standard illumination
polarizing illumination
Solder (200x)
Electrode hole
standard illumination
(1000x)
Super-diffuse
Illumination adapter
OP-42305
Non-contact
diffusion adapter
OP-35414
diffuse illumination
21
High-resolution zoom lens
is the pinnacle of optical lenses
Real Zoom Lens
High-resolution zoom lens
500 5000
VH-Z500
This zoom lens incorporates high-quality fluorite
optics to provide the highest resolution in its class.
The advanced 3D display function precisely
reproduces images.
VH-Z500
Model
Magnification 1.
Horizontal
Monitoring
Vertical
range
(Mil µm)
Diagonal
500x
1000x
2000x
3000x
5000x
24.02"
610
17.99"
457
12.01"
305
9.02"
229
5.98"
152
4.49"
114
4.02"
102
2.99"
76
2.4"
61
1.81"
46
30"
762
15"
381
7.52"
191
5"
127
2.99"
76
Monitoring distance
0.17" 4.4
(inch mm)
1. Magnification on a 15-inch monitor
❙ Features of the VH-Z500
Numerical aperture (N.A.) of 0.82 at a distance of 0.17" (4.4 mm)
Optical 10x zoom from 500x to 5000x magnification
Optical aberration has been minimized by using 24 high-grade lenses.
The large-diameter spherical lens has achieved an observation distance
of 0.17" (4.4 mm). This is an ideal zoom lens featuring both high
resolution and ease of use.
The development of this high-resolution lens with almost no optical
aberration easily provides a zoom range 10 times wider than conventional
models. High-resolution images with minimum distortion can be obtained
within the entire zoom range.
HDD head (1500x)
TFT (500x)
CCD (2000x)
Polarizing illumination mechanism
TFT (5000x)
Option
The polarizing illumination mechanism blocks unnecessary reflected light
from an observation target by adjusting the light quantity to an optimal
level. It is suitable for viewing a target through a transparent film.
Zoom lens
Zoom lens
VH-Z25
VH-Z25
Model
25
175
A single lens unit covers 25x to 175x magnification.
The VH-Z25 can continuously change magnification from 25x to 175x without the need for lens
replacement. You can quickly find an observation point at low magnification and then directly zoom
in on the observation point. The VH-Z25 provides two types of illumination heads (contact type and
non-contact type) as standard equipment. The non-contact type illumination head provides an
observation distance of 1.00" (25.5 mm), improving your operating efficiency.
25x
50x
100x
175x
Horizontal
0.48" 12.20
0.24" 6.10
0.12" 3.05
0.07" 1.74
0.36" 9.10
0.18" 4.55
0.09" 2.28
0.05" 1.30
Diagonal
0.60" 15.24
0.30" 7.62
0.15" 3.81
0.09" 2.18
0.51" 13.0
0.12" 3.0
0.03" 0.7
0.01" 0.3
Magnification 1.
Monitoring
range Vertical
(inch mm)
Depth of field
(inch mm)
Monitoring distance of the
non-contact type
illumination head (inch mm)
1. Magnification on a 15-inch monitor
22
1" 25.5
Non-reflective
illumination ring (Optional)
OP-32009
Low-range zoom lens
VH-Z05
VH-Z05
Model
0
40
0x to 40x magnification for viewing the entire target
Magnification 1.
0.1x
125.98"
3200
Monitor94.49"
Vertical
ing
2400
range
(inch mm) Diagonal 157.48"
4000
Monitoring distance Approx.
(inch mm)
25.3" 7.7m
Horizontal
This low-range zoom lens provides a magnification of between 0x and 40x, allowing the entire
target to be monitored as well as providing a magnified view. You can easily capture an image of the
whole target without using an external camera, perfect for inserting into your report or reference
document. The monitoring distance is 3.74" (95 mm) or more, ensuring improved workability.
0.5x
25.20"
640
18.90"
480
31.50"
800
Approx.
4.9" 1.5m
1x
5x
12.60" 2.40"
320
61.0
9.45"
1.79"
240
45.5
15.75" 3.00"
400
76.2
Approx.
28.35" 720mm
10x
20x
40x
1.20"
30.5
0.90"
22.8
1.50"
38.1
0.60"
15.3
0.45"
11.4
0.75"
19.0
0.30"
7.6
0.22"
5.7
0.37"
9.5
3.74" 95mm
1. Magnification on a 15-inch monitor
Coaxial vertical
illumination
adapter (Optional)
OP-35416
Long-focal-distance zoom lens
VH-Z35
VH-Z35
Model
35
245
Magnification 1.
35x to 245x magnification at a distance of 2.13" (54 mm)
Horizontal
With a monitoring distance of 2.13" (54 mm) and extremely high depth-of-field, this lens provides a
convenient way to monitor a target with height differences on the surface. This wide working space
greatly increases monitoring efficiency. With a single lens, you can monitor from a low magnification
(35x) to a high magnification (245x), allowing the desired point to be quickly enlarged.
Monitoring
Vertical
range
(inch mm)
Diagonal
Depth of field
(inch mm)
35x
50x
100x
150x
200x
245x
0.34"
8.71
0.26"
6.5
0.43"
10.89
0.33"
8.3
0.24"
6.10
0.18"
4.55
0.30"
7.62
0.20"
5.0
0.12"
3.05
0.09"
2.28
0.15"
3.81
0.04"
1.0
0.08"
2.03
0.06"
1.52
0.10"
2.54
0.20"
0.5
0.06"
1.53
0.04"
1.14
0.07"
1.90
0.02"
0.4
0.05"
1.24
0.04"
0.93
0.06"
1.56
0.01"
0.3
Monitoring distance
2.13" 54.0
(inch mm)
1. Magnification on a 15-inch monitor
Adjustable illumination
adapter (Optional)
VH-K150
Middle-range zoom lens
VH-Z150
150
800
150x to 800x magnification, ideal for monitoring bright images.
Magnification 1.
Horizontal
This middle-range zoom lens allows continuous changes in magnification of between 150x and
800x. It can be used to monitor at a distance 0.47" (12 mm) at 800x magnification. The illumination
head can be switched to a coaxial vertical illumination type to enable detailed observation of
Microstructure of metal or a semiconductor surface.
High-range zoom lens
VH-Z450
Monitoring
Vertical
range
(inch mm)
Diagonal
150x
200x
500x
800x
0.08"
2.03
0.06"
1.52
0.10"
2.54
0.06"
1.53
0.05"
1.14
0.08"
1.90
0.02"
0.61
0.02"
0.46
0.03"
0.76
0.02"
0.38
0.01"
0.28
0.02"
0.48
Monitoring distance
0.47" 12.0 2.
(inch mm)
1. Magnification on a 15-inch monitor
2. 0.25" (6.5 mm) when the coaxial vertical illumination ring is attached.
Model
450 3000
Magnification 1.
450x to 3000x magnification with vertical/penetration illumination.
Horizontal
This high-range zoom lens allows continuous changes in magnification between 450x and 3000x.
The high-resolution lens and optical edge enhancement function ensure higher reproduction than a
conventional microscope.
The lens provides a magnification of 3000x at a monitoring distance of 0.29" (7.3 mm), ensuring
improved workability. A special stand with penetration illumination is also available, further
expanding the applications of this lens.
HD middle-range zoom lens
VH-Z150
Model
VH-Z75
Monitoring
Vertical
range
(inch mm)
Diagonal
VH-Z450
450x
500x
1000x
1500x
2000x
2500x
3000x
0.03"
0.68
0.02"
0.51
0.03"
0.85
0.03"
0.61
0.02"
0.46
0.03"
0.76
0.01"
0.31
0.009"
0.23
0.01"
0.38
0.01"
0.20
0.006"
0.15
0.01"
0.25
0.01"
0.15
0.004"
0.11
0.007"
0.19
0.004"
0.12
0.004"
0.09
0.006"
0.15
0.003"
0.10
0.003"
0.08
0.005"
0.13
Monitoring distance
0.29" 7.3
(inch mm)
1. Magnification on a 15-inch monitor
Model
75
750
Magnification 1.
75x to 750x magnification
This lens allows continuous changes in magnification between 75x and 750x. The high-quality lens
offers excellent resolution. The monitoring distance of 1.82" (46.2 mm) at 750x greatly improves
workability. This lens achieves high performance surpassing conventional microscopes in both
image quality and workability.
Horizontal
Monitoring
Vertical
range
(inch mm)
Diagonal
VH-Z75
75x
150x
300x
450x
600x
750x
0.16"
4.07
0.12"
3.04
0.20"
5.08
0.08"
2.03
0.06"
1.52
0.10"
2.54
0.04"
1.02
0.03"
0.76
0.05"
1.27
0.03"
0.68
0.02"
0.51
0.03"
0.85
0.02"
0.51
0.01"
0.38
0.03"
0.64
0.02"
0.41
0.01"
0.30
0.02"
0.51
Monitoring distance
(inch mm)
1.82" 46.2
1. Magnification on a 15-inch monitor
23
Borescope
OP-32666
OP-32681
OP-32665
OP-32664
OP-32663
OP-32662/32663/32664/32665/32666
Two observation directions (direct view and lateral view) with a
single unit.
The borescope unit provides a 90° lateral view attachment as standard
equipment, enabling observation directions to be switched between direct view
and lateral view. Five types of bore diameters are available, allowing you to
select an appropriate diameter according to your observation purpose. The
monitoring magnification is 80x to 360x, 1.2 to 5 times larger than conventional
models. You can clearly observe even minute targets that cannot be observed
with conventional models.
Model
Borescope lens
OP-32662
Borescope
OP-32662
OP-32663
OP-32664
OP-32665
OP-32666
OP-32681
Lens attachment
Outer diameter (inch mm) ø0.16" ø4.0 ø0.17" ø4.4 ø0.22" ø5.5 ø0.23" ø5.9 ø0.31" ø8.0 ø0.33" ø8.5 ø0.39" ø10 ø0.42" ø10.5 ø0.55" ø14 ø0.59" ø15
Effective length(inch mm)
5.31" 135
9.84" 250
9.84" 250
9.84" 250
direct view
View
direction Lateral view
0°
0°
0°
0°
0°
90°
90°
90°
90°
90°
View angle
35°
16.53" 420
40°
Observation distance(inch mm) 0.10" to ∞ 2.5 to ∞ 0.11" to ∞ 2.7 to ∞ 0.14" to ∞ 3.5 to ∞ 0.11" to ∞ 2.7 to ∞ 0.39" to ∞ 10 to ∞
Maximum observation
magnification
230x
360x
175x
190x
80x
Minimum view range
0.04" 1.1
0.03" 0.7
0.06" 1.5
0.06" 1.4
0.13" 3.3
Ambient temperature
Sleeve: 0 to 80°C except for sleeve: 0 to 40°C
1. 0°: When the direct-view standard lens is attached. 90°: When the lateral-view attachment is attached
2. Magnification around the center of the 15-inch monitor screen
3. Horizontal view range
VH-B31
VH-B61
VH-B32
VH-B64
VH-B
VH-B31/B32/B61/B64
Model
Borescope lens
ø3-mm sleeve for viewing inside a narrow gap
*In addition to the above, many size variations are available.
For more information, contact the nearest KEYENCE sales office.
VH-B31
VH-B32
Lens attachment
❙ Change of view range
(Magnification on a 15-inch monitor)
View range (inch mm)
3.94"
100
0.39"
10
0
0.39"
10
3.94"
100
Distance between borescope tip and target
(inch mm)
ø
2.36"
60
1.97"
50
1.57"
40
1.18"
40
0.79"
40
0.39"
40
0 0.39" 0.79" 1.18" 1.57" 1.97" 2.36"
10 20 30 40 50 60
Effective length (inch mm) 4.13" 105
View direction
4.21" 107
55°
Observation depth (inch mm)
0.08" to 1.97" 2 to 50
View range (inch mm)
ø0.08" to ø2.05" ø2 to ø52
Protection
Ambient temperature
Sleeve: Waterproof
0 to +40°C (32 to 104°F) (in air/water)
VH-B31/B32
VH-B61/B64
Model
VH-F111
Monitoring a complicated shape
The fiberscope allows you to monitor places where
conventional lenses cannot be used, such as the inside
of a complicated machine or a narrow, bending pipe. You
can even monitor blind spots by changing the angle of
the top of the fiberscope remotely.
24
ø0.24" ø6
11.81" 300 11.97" 304
Distance between borescope tip and target
(inch mm)
VH-F61/F111
Inspecting pipes
VH-B64
0° (direct view) 30° (oblique view) 0° (direct view) 70° (oblique view)
View angle
VH-F61
Fiberscope
VH-B61
VH-B
Outer diameter (inch mm) ø0.12" ø3 (Protective tube: ø0.16" ø4)
❙ Change of monitoring magnification
Monitoring Magnification
(inch mm)
The 3-mm sleeve diameter enables you to easily
monitor inside a narrow gap or complicated shape.
Select from two types of end shapes: Direct-view
and oblique-view. Only the lens is contained in the
sleeve, enabling excellent resolution. The borescope
lens is completely waterproof for underwater
observation.
Borescope
Inspecting the inside
of a photocopier
Fiberscope
Lens attachment
Outer diameter (inch mm)
Effective length (inch mm)
View direction
View angle
Observation depth (inch mm)
Bendable sleeve angle
Ambient temperature
Operating atmospheric pressure
Oil & waterproof
VH-F61
VH-F111
VH-F
ø0.24" ø6.1
39.37" 1000
0.43" ø11
59.06" 1500
Direct view
65°
55°
0.39" to ∞ 10 to ∞
0.79" to ∞ 20 to ∞
120° up/down
120° up/down, 100° right/left
+10 to +80°C (+50 to +176°F)
1 atm
Machine oil and light oil
Fixed lens
VH-W50 (50x)
VH-W100 (100x)
Lateral
illumination
adapter
VH-W200 (200x)
OP-98535
Long-focal-distance lens
VH-W50/W100/W200
Model
VH-W50
Magnification 1.
Working while monitoring target
Horizontal
The long-focal-distance lens provides a long monitoring distance of 2.36" to 3.07" (60 to 78 mm),
allowing you to continue working while monitoring a target. You can view clear images even when
close monitoring is impossible, such as a target in a recess or the presence of a glass plate between
the lens and target.
Monitoring
Vertical
range
(inch mm)
Diagonal
Depth of field
(inch mm)
Monitoring distance
(inch mm) 2.
VH-W100
VH-W200
50x
100x
200x
0.24" 6.10
0.12" 3.05
0.06" 1.53
0.18" 4.55
0.09" 2.28
0.04" 1.14
0.30" 7.62
0.15" 3.81
0.07" 1.90
0.12" 3.1
0.02" 0.6
0.01" 0.3
3.07"(3.03") 78(77) 2.36" (2.32") 60(59) 2.36" (2.32") 60(59)
1. Magnification on a 15-inch monitor
2. Figures in parentheses are applicable when a non-reflective illumination
head is used.
VH-V100(100x)
VH-V200(200x)
Hyper-view lens
VH-V100/V200
Easy monitoring of a glossy target with minimum halation
The hyper-view lens suppresses halation (reflection) from a glossy surface, enabling detailed
monitoring. You can easily detect a flaw, stain or crack on metal, glass or ceramic surfaces that are
difficult to detect using conventional microscopes.
Model
VH-V100
Magnification 1.
100x
200x
Horizontal
Monitoring
Vertical
range
(inch mm)
Diagonal
0.12" 3.05
0.06" 1.53
0.09" 2.28
0.04" 1.14
0.15" 3.81
0.07" 1.90
0.04" 1.0
0.02" 0.4
Depth of field
(inch mm)
VH-V200
1. Magnification on a 15-inch monitor
VH-C501
VH-C1001
Vertical-illumination lens
VH-C501/C1001
Monitoring metal surfaces
The vertical-illumination lens utilizes our original optical system to give it a thin body. You can clearly
monitor Microstructure of metal or a semiconductor surface, which are hard to see using conventional
lateral illumination. Two models are available with magnification factors 500x and 1000x.
Model
VH-C501
Magnification 1.
500x
VH-C1001
1000x
Horizontal
Monitoring
Vertical
range
(inch mm)
Diagonal
0.02" 0.61
0.01" 0.31
0.02" 0.46
0.01" 0.23
0.03" 0.76
0.01" 0.38
Depth of field(inch mm)
0.002" 0.06
0.001" 0.03
Monitoring distance
(inch mm)
0" to 0.08" 0 to 2.0
0" to 0.08" 0 to 2.0
1. Magnification on a 15-inch monitor
VH-20
VH-50
VH-100
VH-200
VH-501
VH-1001
Fixed-magnification lens
VH-20/50/100/200/501/1001
Lens selection based on desired magnification
Model
VH-20
VH-50
Magnification 1.
20x
50x
VH-100 VH-200 VH-501 VH-1001
100x
200x
500x
1000x
Horizontal 0.60" 15.25 0.24" 6.10 0.12" 3.05 0.06" 1.53 0.02" 0.61 0.01" 0.31
Select your desired magnification between 20x and 1000x. These fixed-magnification lenses
provide a larger depth-of-field than conventional microscopes, enabling you to obtain a sharp 3-D
image. Two types of illumination heads are included: Contact and non-contact (except for VH-20).
Monitoring
Vertical 0.45" 11.38 0.18" 4.55 0.09" 2.28 0.04" 1.14 0.02" 0.46 0.01" 0.23
range
(inch mm)
Diagonal 0.75" 19.05 0.30" 7.62 0.15" 3.81 0.07" 1.90 0.03" 0.76 0.01" 0.38
Depth of field (mm) 0.47" 12.0 0.26" 6.5 0.04" 1.0 0.02" 0.4 0.002" 0.06 0.001" 0.03
Monitoring distance 2.76"(2.44") 0.50" 12.5 0.43" 11.0 0.14" 3.5 0.14" 3.5 0.14" 3.5
70(62) 2.
(inch mm)
1. Magnification on a 15-inch monitor
2. The figure in parentheses is applicable when a non-reflective illumination
head is used.
Peripheral equipment
Keyboard
Footswitch
Useful for entry of detailed observation data for recording files
Foot operation is enabled even if your hands are full.
Comments and observation conditions (lens and magnification data used
for recording files) can be entered with the onscreen keyboard.
A DOS/V PS2 type keyboard can also be connected.
During handheld operation, you can stop and record an image
with the foot switch, even if both hands are full or you cannot
reach the operation panel. (Commercially available)
25
Standard Model
VHX-100
Standard Model All-in-one system incorporating Observation, Recording and Measuremen functions
Ultimate depth of field
Extensive expression ability
Quick, high-quality depth composition
D.F.D 3-D display function
An image of the desired area with poor focus can be composed
automatically by simply turning the focus-adjustment knob while
observing the real-time image on the screen. As a result, the time and
labor required for composing images can be reduced dramatically. In
addition, KEYENCE’s original image-processing technology enables
high-speed display of large images (UXGA).
The 3-D display function provides visual expression of projections and
recessions in a 3-D image, allowing you to detect a phenomenon that
cannot be seen in a 2-D image. This function enables accurate analysis
and persuasive image capturing.
Just turn
the knob
Electrode hole (1000x)
The composition is complete.
26
Battery safety valve(700x)
Peripheral equipment
Digital Photo Printer
Digital Photo Printer
DP-500
This next-generation printer satisfies
the needs of research, development
and manufacturing fields.
5 million-pixel, high-definition printing (Automatically compresses 18 million-pixel images.)
❙ Dimensions
This printer provides image quality of 385-dpi, which is close to film
photographs. The maximum printing size is 2564 x 1920 pixels
6.65" x 5.00" (169 x 127 mm) with a print quality of 5 million pixels.
The DP-500 boasts an excellent printing quality that enables the
detailed recognition of precise images.
11.02"
280
Colors will not fade. Over-coated printing is supported as standard.
Over-coated printing with excellent light, heat, and moisture
resistance is provided as standard. Durability of 100 years or longer
is ensured for printouts stored in albums. Colors will not deteriorate,
enabling accumulation of an accurate database.
0.85"
0.85"
21.5 6.18" 21.5
157
0.12"
3
2.50"
63.5
14.61"
371
2.17"
55
0.20" 5
3.94"
100
Unit: inch mm
High capacity and small footprint. 1.5 times greater capacity and 50% smaller footprint.
200 L-size prints can be printed consecutively. While providing a large
capacity, a sleek stand-up design is achieved with approximately one
half of the footprint (compared to KEYENCE conventional models).
The DP-500 is easy to install in a limited space such as laboratories,
providing printouts on the spot when needed.
❙ Specifications
Model
Print method
Resolution
DP-500
Sublimate thermal print
385 dpi, 2564 x 1920 pixels max. (2L size)
Tone level
256 levels for Y, M, and C respectively, full color of approx.
16,770,000 colors
Sheet/print size
Standard: 5.00" x 4.02" 127 x 102 mm (1920 x 1544 pixels)
L: 5.00" x 3.74" 127 x 95 mm (1920 x 1444 pixels)
2L: 6.65" x 5.00" 169 x 127 mm (2564 x 1920 pixels)
L-print: 5.00" x 3.42" 127 x 89 mm (1920x 1348 pixels)
Printing time
Paper feed method
Interface
Supporting OS
Power supply
Current consumption
Ambient temperature
Relative humidity
Dimensions
Weight
Approx. 40 seconds (L size)
Machine-glazed paper system
USB1.1
Windows® XP/2000/Me/98 Second Edition1.
100 to 240V AC 50/60 Hz
250 VA max. during printing
5 to 40°C (41 to 104°F), No condensation
20 to 80%, No condensation
6.18" (W) x 11.02" (H) x 14.61" (D) 157 x 280 x 371 mm
11 kg
Easy storage. Fits nicely into albums.
The sheet size is small enough to fit into off-theshelf albums or refill pocket sheets for photographs.
Unlike conventional printers, there is no need to cut
the photograph to a smaller size. The printed
photograph can be filed as is, further eliminating
the time and labor required for conventional
models.
Notes are printed simultaneously. Photographs can be sorted out accurately and easily.
Comments appended to the image can be
printed on the margin when printing images,
eliminating the time and labor required for
writing the descriptions afterward. A
database that is easy to access for anyone
can be constructed easily.
1.Windows XP/2000/Me/98 Second Edition are registered trademarks of Microsoft Corporation, U.S.A.
27
VHX Series System Line Up
System configuration
RZ LENS
VH-Z500 1.
High-resolution
zoom lens
Polarization illumination
adapter
OP-51649
500x to 5000x
VH-Z100 1.
Standard illumination adapter
OP-72402
Wide-range zoom lens
Ring illumination
base unit
OP-72400
Diffuse illumination adapter
OP-72403
100x to 1000x
Ultra-small,
high-performance zoom lens
VH-Z20
20x to 200x
Adjustable illumination
adapter
OP-72404
Head
OP-72407
Fiber
OP-72406
Polarization
illumination adapter 4.
OP-72405
ZOOM LENS
VH-Z25
Zoom Lens
25x to 175x
VH-Z35
Long-focal-distance
zoom lens
Adjustable illumination
adapter
VH-K25
Super-diffuse Illumination
adapter
OP-42305
35x to 245x
VH-Z150
Middle-range zoom lens
150x to 800x
Polarization illumination
adapter
OP-3541
VH-Z05
Low-range zoom lens
Diffuse illumination adapter
OP-35324
0x to 40x
VH-Z450 1.
Non-contact diffusion
adapter
OP-35414
High-range
zoom lens
450x to 3000x
Multi-diffuse adapter
OP-35469
VH-Z75 1.
HD middle-range
zoom lens
Free head 6.
OP-32348
Coaxial vertical
illumination adapter
OP-35416
75x to 750x
HYPER-VIEW LENS
VH-V100 (100x)
VH-V200 (200x)
Adjustable illumination
adapter
VH-K150
VERTICAL-ILLUMINATION LENS
Non-reflective
illumination ring
OP-32009
VH-C501 (500x)
VH-C1001 (1000x)
LONG-FOCAL-DISTANCE LENS
VH-W50 (50x)
BORESCOPE LENS
VH-B31
VH-B32
VH-B
VH-B61
VH-W100 (100x)
VH-B64
Lateral view
adapter
OP-98535
VH-W200 (200x)
BORESCOPE LENS 1.
OP-32666
FIXED-MAGNIFICATION LENS
VH-20 (20x)
VH-200 (200x)
OP-32662
VH-50 (50x)
OP-32665
VH-501 (500x)
OP-32663
VH-100 (100x)
28
VH-1001 (1000x)
OP-32664
OP-32681
VHX-H2M/H1M
(3-D Profile
Measurement software)
Bayonet-type
standard
attachment 5.
OP-51478
PC
PC
PC
VHX-H1C
(Stage control software)
Camera unit
Communication software
(3-D display software)
PC
VHX-500
LAN (100BASE)
CD-R/RW
Footswitch
USB memory, etc.
Hard disk
USB (2.0)
USB
Digital color printer
DP-500
The digital color printer outputs
hard copies of observation data
and reference materials, which
can be widely applied as
substitutes for photographs.
RGB
VHX-100
Camera unit
Bayonet-type C-mount
attachment
OP-51479
Monitor
VHX-100N
Camera lens (C-mount type)
A large screen monitor. When
several people need to view a
target simultaneously, connect a
large screen monitor. Since the
target image is magnified further
on the large screen, it can be
checked more thoroughly.
3-D Profile measurement unit
VHX-S15
Microscope
VH-F
3.
■Option
FIBERSCOPE
2.
VH-F61
VH-F111
1. The optional light guide dedicated to the VHX Series is required.
2. The optional light guide attachment dedicated to the VHX Series is required.
3. A C-mount adapter suitable for the microscope is required.
4. For coaxial illumination, OP-72407 and OP-72406 are required.
5. For the VH-Z100/Z450/Z500, OP-51647 is required.
6. OP-32348 is the special adapter for the VH-Z25.
Free-angle observation system
VH-S30
Vertical illumination head
(for VH-200)
OP-96907
VH lens mounting stand
OP-25539
Side-view adapter
(for VH-W100/W200)
OP-98535
VH lens mounting stand
(with XY stage)
OP-25539 + OP-22124
VH-S1
High-precision
VH mounting stand
(with X-Y stage and
penetration illumination)
Variable illumination
adjustor (for VH-Z25/Z05)
OP-27304
29
Specifications (Basic functions)
Model
VHX-500
VHX-100N 3.
VHX-100
1/2-inch, 2.11 million-pixel CCD image sensor
1/1.8-inch, 2.11 million-pixel CCD image sensor
Total pixels: 1688 (H) x 1248 (V)
Image receiving element
Effective pixels: 1636 (H) x 1236 (V)
Effective pixels: 1628 (H) x 1236 (V)
Virtual pixels: 1600 (H) x 1200 (V)
Scan method
Frame rate
Camera
Progressive
Interlace
15 frames/sec. and 28 frames/sec. selectable
7.5 frames/sec. and 30 frames/sec. selectable
2 million pixels
1600 (H) x 1200 (V) Approx. 1000 TV lines
4 million pixel equivalent
1600 (H) x 1200 (V) Approx. 1200 TV lines
Resolution 2 million pixels x 3 CCD mode 1600 (H) x 1200 (V) Approx. 1200 TV lines (Excellent color reproducibility)
3200 (H) x 2400 (V) Approx. 1600 TV lines
18 million pixels
4800 (H) x 3600 (V) Approx. 2000 TV lines
Gain
AUTO, NORMAL, MANUAL
Electronic shutter
AUTO, MANU, OFF, 1/15, 1/30, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000
Supercharge shutter
0.2 sec. to 17 sec. Can be set in increments of 0.1 sec.
White balance
Back-focus adjustment
–
Auto, Manual, One-push set, Preset (2700K, 3200K, 5600K, 9000K)
Not required
Size
Panel size
Color LCD (TFT) 15"
11.99" (H) x 8.99" (V) 304.5 (H) x 228.4 (V) mm
Pixel pitch
1600 (H) x 1200 (V) (UXGA)
–
200 cd/m 2 (typical)
Brightness
500 : 1 (typ)
Viewing angle
400: 1 (typical)
±85° (typical, horizontal), ±85° (typical, vertical)
Speed
Hard disk
drive unit
24x Write, 10x Re-write, 24x Read
Used disk
CD-R/CD-RW
700 MB, approx. 3500 images (When a 2 million-pixel image is compressed) to
approx. 117 images (When a 2 million-pixel image is not compressed)
Storage capacity
Storage capacity
160 GB (including 45 GB reservation area),
approx. 575,000 images (When a 2 million-pixel
image is compressed) to approx. 19,000 images
(When a 2 million-pixel image is not compressed)
Lamp
Light source
40 GB, approx. 200,000 images (When a 2 million-pixel image is compressed) to
approx. 6667 images (When a 2 million-pixel image is not compressed)
12 V, 100 W, Halogen lamp (OP-91641)
Lamp life
1000 hours (average)
Color temperature
3100 K (at maximum light intensity)
Video output
Output
Analog RGB (1600 x 1200 pixels)
75 kHz (H), 60 Hz (V)
Scanning Special LCD monitor
frequency External monitor
75 kHz (H), 60 Hz (V)
Mouse input
Input
MINI-DIN 6-pin connector (DOS/V-compatible PS/2 mouse)
Keyboard input
MINI-DIN 6-pin connector (DOS/V PS/2)
External remote input
LAN
Interface
USB2.0 Series A
USB2.0 Series B
Power supply
Pause/ Recording, Non-voltage input (Contact/Noncontact)
RJ-45 (10BASE-T / 100BASE-TX / 1000BASE-T)
RJ-45 (10BASE-T)
4 types: Special printer port x 1, VHX-S15 port x 1,
External storage connection port x 2
2 types: Special printer port x 1, External storage connection port x 1
–
PC connection port
Power-supply voltage
100 to 240VAC, 50/60Hz
85 to 132 VAC, 170 to 265 VAC, 50/60 Hz
Current consumption
310VA
Environmental Ambient temperature
resistance
Relative humidity
Controller
Weight
Without an LCD monitor
75 kHz (H), 60 Hz (V)
Approx. 16,770,000 colors 1.
Display color
Contrast ratio
12" (H) x 9" (V) 304.8 (H) x 228.6 (V) mm
0.008" (H) x 0.008" (V) 0.1905 (H) x 0.1905 (V) mm
Number of pixels
LCD monitor 2. Scan frequency
CD-R/
CD-RW
drive unit
–
8 million pixels
Camera unit
260 VA
+5 to 40°C (41 to 104°F), No condensation
35 to 80%, No condensation
Approx. 11.9 kg
Camera : Approx. 250 g, Cable : Approx. 600 g All-in-one
Console
Approx. 250 g
Dimensions (Excluding the projected areas)
15.04" (W) x 16.73" (H) x 6.38" (D) 382 x 425 x 162 mm
Controller: Approx. 13 kg (with LCD monitor),
Approx. 11.5 kg (without LCD monitor),
Camera unit: Approx. 0.85 kg
15.75" (W) x 5.12" (H) x 15.16" (D) 400 x 130 x 385 mm
15.75" (W) x 4.53" (H) x 15.16" (D) 400 x 115 x 385 mm
1. Approximately 16,770,000 pixels are realized with the dithering processing of the display controller.
2. The LCD monitor provided in the VHX Series is based on extremely advanced technology. Rarely, an unlit part (black spot) or lit part (bright spot) may exist on the monitor screen. However,
this is not an indication of the LCD monitor being defective.
3. The VHX-100N model does not feature the integrated special LCD monitor.
4. The VHX-H2M and VHX-H1M are the software dedicated to the VHX-500 and VHX-100F (VHX-100FN), respectively.
30
Specifications (Various functions)
Model
VHX-100
VHX-500
Depth composition function
Hybrid D.F.D 3-D display function
3-D illumination simulation function
3-D two-screen simultaneous comparison function
Saving a 3-D 360°-rotation image
Quick depth composition
High-quality depth composition
Provided (Quick)
Provided
Provided
–
Provided (Combination/Comparison/Difference display mode)
–
Enabled (3-D 360°-rotating observation after saving an image)
Real-time digital zoom
Optimal contrast function
Various controller Halation eliminating function
functions
Noise eliminating function
1.0x to 10.0x (100 steps)
Provided
–
Provided
–
–
Provided
Supercharge shutter function
Provided
Edge enhancement function
Provided (200 steps) For a moving image
Wide range view function
Provided
Gamma correcting function
Camera-shake correcting function
Provided
Provided
Provided (For a moving image)
Split function
Moving image recording/reproducing function
Vertical split, Horizontal split, 4-part split
Provided
–
Provided
High-resolution dimensional measurement function
Wide-visual-field automatic 2-point measurement
Measuring function
Provided
–
Provided
Distance, angle, radius, area, etc.
Automatic count/measurement function
Various functions are provided
Provided (Enables distance/area measurement through brightness/color extraction)
Scale display
Various functions are provided
Automatic edge detection
Provided
Auto calibration
3-D profile measurement
Full-auto (Numerical input is not required)
Provided (Enables height profile display along an arbitrary line on the 3-D screen)
3-D height color/scale display function
Provided (Enables X/Y/Z-axis height scale display and color bar display related to height)
2-point height difference measurement function
Provided
Measuring function Auto-focus function
(Optional function)4. Cross-section profile measurement
Provided
Provided
–
3-D volume measurement
Provided
–
3-D plane distance measurement
Provided
–
3-D plane angle measurement
Provided
–
Complete style covering Observation, Recording and Measurement
Utility
All-in-one system that enables all operations for Observation, Recording and Measurement without using a PC
Mail transmission function
Provided
Pop-up guide
Provided
Bayonet-type attachment
Provided
Keyboard entry
Enabled
Compatible with a foot switch
Enabled
Function guide
Provided
Pause
Provided
Recording
Provided
Shutter speed adjustment
Provided
Supercharge shutter
Provided
One-touch 2x zoom
Provided
Depth composition function
Console/Front panel Quick 3-D display function
(One-touch operation) Frame rate switching
Provided
Provided
–
Provided (15 frame/sec. or 28 frame/sec.)
Provided (7.5 frame/sec. or 30 frame/sec.)
Light shift function (Height difference enhancement)
e-preview mode
Provided (Full, Partial, Flanking illumination)
Provided (Automatically lists 4 types of image modes, allowing selection of the optimal image)
Camera-shake correcting function
Provided
–
Optimal contrast function
Provided
–
Halation eliminating function
Provided
–
Sensitivity quick adjustment dial
Halogen lamp light intensity adjustment
Accompanying
software
–
28 frames/sec. max. Moving image size (800 x 600), Actual moving image size (800 x 480)
Timer recording function
Automatic unit VHX-S15 control function
VHX-100N
Real-time depth composition
High-quality depth composition
PC communication software
3-D reproduction software for the PC (Available free of charge)
Shutter speed and camera gain can be adjusted with one trimmer
Provided
Image data transfer between the VHX and PC can be performed easily. (LAN)
The PC can reproduce a 3-D image saved in VHX. (Copy free)
31
Analysis of capacities of SEMs and roughness meters are easily produced,
as if you were using an optical microscope.
Ultra-deep color 3-D profile measurement microscope
VK-9500
❙
❙
❙
❙
❙
❙
Observation magnification: 200x to 18000x
High resolution and large depth of field comparable to SEMs
Z-axis measurement resolution: 10 nm
Abundant analyzing functions, including profile and roughness
Applicable to large-size samples
Provides an image combination function that enables
wide-visual-field analysis
Total information site for microscopes
www.digitalmicroscope.com
Specifications are subject to change without notice.
CALL
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TO CONTACT YOUR LOCAL OFFICE
Fax : 201-930-0099
1 - 8 8 8 - 5 3 9 - 3 6 2 3
KEYENCE CORPORATION OF AMERICA
Corporate Office
50 Tice Blvd., Woodcliff Lake, NJ 07677
■ Regional offices
California N.California
Los Angeles
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Phone:201-930-0100 Fax:201-930-0099 E-mail:keyence@keyence.com
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KEYENCE CANADA INC.
1450 Meyerside Drive, #301, Mississauga, Ontario L5T 2N5 CANADA
Phone:905-696-9970 Fax:905-696-8340
E-mail:keyence@keyence.com
KA1-0036
© KEYENCE CORPORATION, 2006 VHX500-KA-C-E 0066-1 000588 Printed in Japan