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Omega FMA1700A and FMA1800A Owner Manual
TM
User’s Guide
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NORWALK, CT
FMA1700A & FMA1800A
Mass Flow Meter
omega.com info@omega.com
U.S.A.
Headquarters:
Servicing North America:
Omega Engineering, Inc.
Toll-Free: 1-800-826-6342 (USA & Canada only)
Customer Service: 1-800-622-2378 (USA & Canada only)
Engineering Service: 1-800-872-9436 (USA & Canada only)
Tel: (203) 359-1660
Fax: (203) 359-7700
e-mail: info@omega.com
For Other Locations Visit omega.com/worldwide
The information contained in this document is believed to be correct, but OMEGA accepts no liability for any errors it contains,
and reserves the right to alter specifications without notice.
TABLE OF CONTENTS
1. UNPACKING THE FMA1700A/1800A MASS FLOW METER.....................1
1
1.1 Inspect Package for External Damage.................................................
1
1.2 Unpack the Mass Flow Meter...............................................................
1
1.3 Returning Merchandise for Repair.......................................................
2. INSTALLATION........................................................................................ 1
2.1 Primary Gas Connections................................................................. 1
2.2 Electrical Connections...................................................................... 2
2.3.1 Remote LCD Readouts..................................................................... 4
2.3.2 Panel Mounting Readouts................................................................ 4
3. PRINCIPLE OF OPERATION................................................................... 5
4. SPECIFICATIONS................................................................................... 6
4.1 CE Compliance................................................................................. 7
5. OPERATING INSTRUCTIONS.................................................................. 9
5.1 Preparation and Warm Up..................................................................9
5.2 Flow Signal Output Readings.......................................................... 9
5.3 Swamping Condition....................................................................... 10
6. MAINTENANCE.........................................................................................10
6.1 Introduction......................................................................................10
6.2 Flow Path Cleaning...........................................................................10
6.2.1 Restrictor Flow Element (RFE)........................................................ 10
11
6.2.2 FMA1700A/1800A Series Max. Flow 15 L/min...................................
7. CALIBRATION PROCEDURES................................................................. 11
7.1 Flow Calibration...............................................................................11
7.2 Calibration of FMA1700A/1800A Mass Flow Meters........................13
7.2.1 Connections and Initial Warm Up.....................................................13
7.2.2 ZERO Adjustment.............................................................................13
7.2.3 SPAN Adjustment............................................................................ 13
14
7.3 Linearity Adjustment..........................................................................
7.3.1 Connections and Initial Warm Up....................................................14
7.3.2 ZERO Adjustment.............................................................................14
7.3.3 25% Flow Adjustment (using R33 potentiometer)...........................14
7.3.4 10% Flow Adjustment......................................................................15
7.3.5 25% Flow Adjustment (using R52 potentiometer).......................... 15
7.3.6
7.3.7
7.3.8
7.4
7.4.1
7.4.2
7.4.3
50% Flow Adjustment.................................................................... 15
75% Flow Adjustment.................................................................... 15
100% Flow Adjustment....................................................................15
LCD Display Scaling.........................................................................15
Access LCD Display Circuit..............................................................16
Adjust Scaling..................................................................................16
Change Decimal Point......................................................................16
8. TROUBLESHOOTING............................................................................. 16
8.1 Common Conditions........................................................................16
8.2 Troubleshooting Guide.....................................................................17
8.3 Technical Assistance....................................................................... 21
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES.......................
22
APPENDIX 1 COMPONENT DIAGRAM.........................................................23
APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS)........................................
24
APPENDIX 3 DIMENSIONAL DRAWINGS......................................................
28
PARTS OF THE FLOW METER.............................................. 29
1.
UNPACKING THE FMA1700A/1800A
MASS FLOW METER
1.1
Inspect Package for External Damage
Remove the Packing List and verify that you have received all equipment. If you
have any questions about the shipment, please call the OMEGA7 Customer
Service Department at 1-800-622-2378 or (203) 359-1660.
Your FMA1700A/1800A Mass Flow Meter was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock.
Upon receipt, inspect the package for possible external damage. In case of external damage to the package contact the shipping company immediately.
1.2

Unpack the Mass Flow Meter
CAUTION: Some of the IC devices used in the FMA1700A & FMA1800A are
Electro Static Discharge (ESD) sensitive and may be damaged by improper
handling. When wiring interface connector, adjusting or servicing the meter,
use of a grounded ESD protection wrist strap is required to prevent inadvertent
damage to the CMOS integral solid state circuitry. When 9 pin Interface
D-connector is not used do not remove factory installed ESD protection cover.
Open the carton carefully from the top and inspect for any sign of concealed shipping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to OMEGA7 directly.
When unpacking the instrument please make sure that you have all the items
indicated on the Packing List. Please report any shortages promptly.
1.3
Returning Merchandise for Repair
Please contact an OMEGA7 customer service representative and request a
Return Authorization Number (AR).
It is mandatory that any equipment returned for servicing be purged and neutralized of any dangerous contents including but not limited to toxic, bacterially infectious, corrosive or radioactive substances. No work shall be performed on a
returned product unless the customer submits a fully executed, signed SAFETY
CERTIFICATE. Please request form from the Service Manager.
2.
INSTALLATION
2.1
Primary Gas Connections
Please note that the FMA1700A/1800A Mass Flow Meter will not operate with liquids. Only clean gases are allowed to be introduced into the instrument. If gases
are contaminated they must be filtered to prevent the introduction of impediments
into the sensor.
1

CAUTION: IT IS THE USERS RESPONSIBILITY TO DETERMINE IF THE
INSTRUMENT IS APPROPRIATE FOR THEIR OXYGEN APPLICATION, AND FOR
SPECIFYING O2 CLEANING SERVICE IF REQUIRED. OMEGA IS NOT LIABLE
FOR ANY DAMAGE OR PERSONAL INJURY, WHATSOEVER, RESULTING FROM
THE USE OF THIS INSTRUMENT FOR OXYGEN GAS.
Attitude sensitivity of the Mass Flow Meter is ±15. This means that the gas flow
path of the Flow Meter must be horizontal within those stated limits. Should there
be need for a different orientation of the meter, re-calibration may be necessary. It
is also preferable to install the FMA1700A/1800A transducer in a stable environment, free of frequent and sudden temperature changes, high moisture, and
drafts.
Prior to connecting gas lines inspect all parts of the piping system including ferrules and fittings for dust or other contaminant’s.
Be sure to observe the direction of gas flow as indicated by the arrow on the front
of the meter when connecting the gas system to be monitored.
Insert tubing into the compression fittings (except FMA1700A/1800A Series Max
Flow 1000 L/min) until the ends of the properly sized tubings home flush against
the shoulders of the fittings. Compression fittings are to be tightened according to
the manufacturer's instructions to one and one quarter turns. Avoid over tightening which will seriously damage the Restrictor Flow Elements (RFE's)!
Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system. (All FMA1700A/1800A are checked prior to shipment for leakage within stated limits. See specifications in this manual.)
2.2
Electrical Connections

CAUTION: Some of the IC devices used in the FMA1700A & FMA1800A are
Electro Static Discharge (ESD) sensitive and may be damaged by improper
handling. When wiring interface connector, adjusting or servicing the meter,
use of a grounded ESD protection wrist strap is required to prevent inadver
tent damage to the CMOS integral solid state circuitry. When 9 pin interface
D-connector is not used do not remove factory installed ESD protection cover.

CAUTION: WIRING THE FMA1700A & FMA1800A METER WITH THE POWER
ON MAY RESULT IN INTERNAL DAMAGE! PLEASE MAKE ALL WIRING
CONNECTIONS BEFORE SWITCHING ON THE POWER.
All FMA1700A & FMA1800A models require power supplies with nominal current
rating of at least 200 mA. The operating power input is supplied via the DC power
jack or the 9-pin “D” connector located at the side of the flow transducer enclosure.
On FMA1700A & FMA1800A's purchased without an LCD readout, a readout
panel meter, digital multimeter, or other equivalent device is required to observe
the flow signal.
2
The FMA1700A & FMA1800A flow meters have universal power input and can be
used with any power supply voltage between +12 and +26 Vdc.

CAUTION: BEFORE CONNECTING POWER SUPPLY CHECK YOUR METER
SERIAL NUMBER AND POWER SUPPLY REQUREMENTS LABEL LOCATED ON
THE FLOW METER BACK COVER. DO NOT CONNECT POWER SUPPLY WITH
VOLTAGE ABOVE 26 VDC. EXCEEDING SPECIFIED MAXIMUM POWER SUPPLY
VOLTAGE LIMIT MAY RESULT IN DEVICE PERMANENT DAMAGE.
PIN
FUNCTION
1
2
3
4
5
6
7
8
Remote LCD display signal
0 to 5 VDC output indication
0 to 5 VDC common
Power supply, positive
Power supply, common
Remote LCD display reference
(unassigned)
4 to 20 mA output indication
self-powered (sourcing type,
non-isolated)
4 to 20 mA common (return)
9
FIGURE 2.a - 9-PIN “D” CONNECTOR PINOUTS FOR FMA1700A/1800A TRANSDUCER

IMPORTANT NOTES:
In general, “D” Connector numbering patterns are standardized. There are, however, some connectors with nonconforming patterns and the numbering sequence
on your mating connector may or may not coincide with the numbering sequence
shown in our pin configuration table above. It is imperative that you match the
appropriate wires in accordance with the correct sequence regardless of the particular numbers displayed on your mating connector.
Make sure power is OFF when connecting or disconnecting any cables in the
system.
When connecting power to the FMA1700A/1800A mass flow meter via the DC
power jack, do not connect any power supply to the 9-pin “D” Connector. The DC
power jack has a center positive polarity.
When battery use is required to power the FMA1700A/1800A, use only the
optional battery and accompanying charger available from OMEGA7.
3
The power input is protected by 300 mA M (medium time-lag) resettable fuse. If a
shorting condition or polarity reversal occurs, the fuse will cut power to the flow
transducer circuit. Disconnect the power to the unit, remove the faulty condition,
and reconnect the power. The fuse will reset once the faulty condition has been
removed.

CAUTION: Resettable fuse will not protect meter if power supply voltage
exceeds maximum voltage specified for particular model.
In order to operate flow meter within the specification the cable length for analog
0-5 Vdc output and remote LCD display may not exceed 9.5 feet (3 meters).
Use of the FMA1700A/1800A flow transducer in a manner other than that specified in this manual or in writing from OMEGA7, may impair the protection provided by the equipment.
2.3.1
Remote LCD Readouts
FMA1700A/1800A Mass Flow Meters are available with optional remote reading
LCD displays supplied with a three foot long wire to accommodate most applications. This configuration includes the upper block element which serves as the
LCD readout mounting. Special lengths of remote extension wiring (up to 9.5 feet
[3 meters]) are available on request.
2.3.2 Panel Mounting Readouts
Another option for the FMA1700A/1800A Mass Flow Meter is the Panel Mounting
Remote Readout. In this configuration the LCD readout is supplied with a three
foot long extension wire, and no aluminum housing around the LCD. The LCD
readout for panel mounting includes a bezel with two plastic screws which conveniently fit into a rectangular cut-out for panel mounting (see Figure 2.b).
FIGURE 2.b - CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING
4
3.
PRINCIPLE OF OPERATION
The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit. The geometry of the primary conduit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics the flow rates of a gas in the two laminar
flow conduits are proportional to one another. Therefore, the flow rates measured
in the sensor tube are directly proportional to the total flow through the transducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sections of the sensor tube by means of precision wound heater-sensor coils. Heat is
transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected by the electronic control circuit. The measured gradient at
the sensor windings is linearly proportional to the instantaneous rate of flow taking place.
An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass-molecular based flow rates.
5
4.
SPECIFICATIONS
FLOW MEDIUM: Please note that FMA1700A/1800A Series Max Flow 15, 50, 100, 200,
500 and 1000 L/min Mass Flow Meters are designed to work with clean gases only. Never
try to meter or control flow rates of liquids with any FMA1700A/1800A.
CALIBRATIONS: Performed at standard conditions [14.7 psia (1.01 bars) and 70 FF
(21.1 FC)] unless otherwise requested or stated.
ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II.
ACCURACY: FMA1700A/1800A Series Max Flow 15, 50 and 100 L/min ±1.0% F.S.
FMA1700A/1800A Series Max Flow 200, 500 and 1000 L/min. ±1.5% F.S.
REPEATABILITY: ±0.25% of full scale.
TEMPERATURE COEFFICIENT: 0.15% of full scale/ FC.
PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME: 800 ms time constant; approximately 2 seconds to within ±2% of set
flow rate for 25% to 100% of full scale flow rate.
GAS PRESSURE: 1000 psig (69 bars) FMA1700A/1800A Series Max Flow 15, 50 and 100;
500 psig (34.5 bars) FMA1700A/1800A Series Max Flow 200, 500 and 1000 L/min.
Optimum pressure is 20 psig (1.4 bars).
GAS AND AMBIENT TEMPERATURE: 32 FF to 122 FF (0 FC to 50 FC).
14 FF to 122 FF (-10 FC to 50 FC) - Dry gases only.
RELATIVE GAS HUMIDITY: Up to 70%.
LEAK INTEGRITY: 1 x 10- 7 sccs He max. to the outside environment.
ATTITUDE SENSITIVITY: Incremental deviation of up to 1% full scale from stated accuracy,
after re-zeroing.
OUTPUT SIGNALS: Linear 0-5 VDC (1000 Ω minimum load impedance) and 4-20 mA selfpowered sourcing type, non-isolated, (0-500 Ω loop resistance); 20 mV peak to peak max noise.
Contact Omega© for optional RS232 or RS485 interfaces.
TRANSDUCER INPUT POWER:
FMA1700A & FMA1800A models with universal power input between +12 and +25 VDC, 200
mA maximum;
Power input is protected by a 300 mA M (medium time-lag) resettable fuse, and a rectifier
diode for polarity protection.
6
WETTED MATERIALS:
FMA1700A/1800A Series Max Flow 15, 50, 100, 200, 500 and 1000 L/min: Anodized
aluminum, brass, and 316 stainless steel with FKM O-rings seals; BUNA, EPR or
Perfluoroelastomer O-rings are optional.
FMA1700A/1800A Series Max Flow 15, 50, 100, 200, 500 and 1000 L/min: 316 stainless steel with FKM O-rings seals; BUNA, EPR or Perfluoroelastomer O-rings are optional.
OMEGA7 makes no expressed or implied guarantees of corrosion resistance of mass flow
meters as pertains to different flow media reacting with components of meters. It is the
customers' sole responsibility to select the model suitable for a particular gas based on the
fluid contacting (wetted) materials offered in the different models.
INLET AND OUTLET CONNECTIONS:
FMA1700A/1800A Series Max. Flow 15 and 50 L/min:
1/4" compression fittings.
Optional: 6mm compression, 1/4" VCR®, 3/8" or 1/8" compression fittings (Max. Flow 15).
FMA1700A/1800A Series Max. Flow 100 and 200 L/min: 3/8" compression fittings.
FMA1700A/1800A Series Max. Flow 500 L/min:
1/2" compression fittings.
FMA1700A/1800A Series Max. Flow 1000 L/min:
3/4" FNPT fittings or 3/4"
compression fittings.
LCD DISPLAY: 3½ digit LCD (maximum viewable digits “1999”), 0.5 inch high characters.
On FMA1700A/1800A aluminum or stainless steel models the LCD display is built into the
upper block element and may be tilted over 90 degrees for optimal viewing comfort.
Remote or panel mounting remote reading is optional.
Standard readings are in direct engineering units for the given gas and flow rate (i.e.
liters/minute [lpm], standard cubic centimeters/minute [sccm], standard cubic feet/hour
[scfh], etc.). 0 to 100% LCD calibration scaling is available upon request at time of order.
Contact OMEGA7 when non-standard display settings are desired.
TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the
FMA1700A/1800A transducer 9-pin “D” connector. In order to operate flow meter within the
specification the cable length for analog 0-5 Vdc output and remote LCD display may not
exceed 9.5 feet (3 meters).
4.1
CE Compliance
Any model FMA1700A/1800A bearing a CE marking on it, is in compliance with
the below stated test standards currently accepted.
EMC Compliance with 89/336/EEC as amended; Emission Standard: EN
55011:1991, Group 1, Class B Immunity Standard: EN 55082-2:1992.
7
FLOW RANGES
TABLE I FMA1700A/1800A
SERIES MAX FLOW 15 L/min
LOW FLOW MASS FLOW METER*
TABLE II FMA1700A/1800A
SERIES MAX FLOW 50 L/min
MEDIUM FLOW MASS FLOW METER*
CODE
mL/min [N2]
CODE
L/min [N2]
02
0 to 10
23
15
04
0 to 20
24
06
0 to 50
26
20
30
08
0 to 100
27
40
10
0 to 200
28
50
12
0 to 500
CODE
L/min [N2]
14
0 to 1
16
0 to 2
18
0 to 5
CODE
L/min [N2]
0 to 10
40
60
20
TABLE III FMA1700A/1800A
SERIES MAX FLOW 100 L/min
HIGH FLOW MASS FLOW METER*
* Flow rates are stated for Nitrogen at STP
conditions [i.e. 70 FF (21.1 FC) at 1 atm].
For other gases use the K factor as a
multiplier from APPENDIX 2.
41
80
42
100
43
200
44
500
45
1000
TABLE IV PRESSURE DROPS
MAXIMUM
FLOW RATE
SERIES
FLOW RATE
[liters/min]
10 L/min
up to 10
25
0.04
2.5
15
63
0.09
6.4
20
300
0.44
30
30
800
1.18
81
40
1480
2.18
150
50
2200
3.23
223
60
3100
4.56
314
100
5500
8.08
557
200
2720
4.0
280
500 L/min
500
3400
5.0
340
1000 L/min
1000
6120
9.0
620
50 L/min
100 L/min
200 L/min
MAXIMUM PRESSURE DROP
[mm H2O]
8
[psid]
[mbar]
5.
OPERATING INSTRUCTIONS
5.1
Preparation and Warm Up
It is assumed that the Mass Flow Meter has been correctly installed and thoroughly leak tested as described in section 2. Make sure the flow source is OFF.
Apply power to the unit by plugging the power supply line into the DC power
jack (or 9-pin 'D' connector) on the side of the meter. Allow the Mass Flow
Meter to warm-up for a minimum of 15 minutes.

SUPPLYING DC POWER TO THE POWER JACK AND THE “D” CONNECTOR AT
THE SAME TIME WILL DAMAGE THE METER. DC POWER JACK POLARITY
IS CENTER POSITIVE.
During initial powering of the FMA1700A/1800A transducer, the flow output signal will be indicating a higher than usual output. This is indication that the
FMA1700A/1800A transducer has not yet attained it's minimum operating temperature. This condition will automatically cancel within a few minutes and the
transducer should eventually zero. If after the 15 minutes warm-up period, the
display still indicates a reading of less than ± 3.0 % of F.S., readjust the ZERO
potentiometer [R34] through the access hole. Before zero adjustment it is good
practice to temporarily disconnect the gas source, to ensure that no see page or
leak occurs in to the meter.

5.2
ADJUSTING ZERO READING MORE THAN ± 3.0% F.S. FROM THE FACTORY
SETTINGS MAY AFFECT DEVICE CALIBRATION ACCURACY. IF SUCH
ADJUSTMENT IS REQUIRED IT IS RECOMMENDED TO PERFORM METER
RECALIBRATION TO PRESERVE DEVICE ACCURACY.
Flow Signal Output Readings
Initiate a controlled gas flow after warm up. The flow signal output can be viewed
either on the LCD display, remote panel meter, digital multimeter, or other display
device.
If an LCD display has been supplied with the FMA1700A/1800A, the observed
reading is in direct engineering units (0 to 100% indication is optional).
Analog output flow signals of 0 to 5 VDC and 4 to 20 mA are attained at the appropriate pins of the 9-pin “D” connector (see Figure 2.a) on the side of the
FMA1700A/1800A transducer.
Meter signal output is linearly proportional to the mass molecular flow rate of the
gas being metered. By default calibration is done against 0 to 5 VDC output signal. If 4-20 mA output signal is used for flow indication on the FMA1700A/1800A,
which was calibrated against 0 to 5 VDC, the total uncertainty of the reading may
be in the range of +2.5% of full scale. Optional calibration for 4-20 mA output signal is available upon request at time of order. The full scale range and gas for
which your meter has been calibrated are shown on the flow transducers front
label.
9
5.3
Swamping Condition
If a flow of more than 10% above the maximum flow rate of the Mass Flow Meter
is taking place, a condition known as “swamping” may occur. Readings of a
“swamped” meter cannot be assumed to be either accurate or linear. Flow must
be restored to below 110% of maximum meter range. Once flow rates are lowered
to within calibrated range, the swamping condition will end. Operation of the meter
above 110% of maximum calibrated flow may increase recovery time.
6.
MAINTENANCE
6.1
Introduction
It is important that the Mass Flow Meter/Controller is used with clean, filtered
gases only. Liquids may not be metered. Since the RTD sensor consists, in part,
of a small capillary stainless steel tube, it is prone to occlusion due to impediments or gas crystallization. Other flow passages are also easily obstructed.
Therefore, great care must be exercised to avoid the introduction of any potential
flow impediment. To protect the instrument a 50 micron (FMA1700A/1800A Series
Max Flow 15 L/min) or 60 micron (FMA1700A/1800A Series Max Flow 100 and
200 L/min) filter is built into the inlet of the flow transducer. The filter screen and
the flow paths may require occasional cleaning as described below. There is no
other recommended maintenance required. It is good practice, however, to keep
the meter away from vibration, hot or corrosive environments and excessive RF
or magnetic interference.
If periodic calibrations are required they should be performed by qualified personnel and calibrating instruments, as described in section 7. It is recommended
that units are returned to OMEGA7 for repair service and calibration.

6.2
CAUTION: TO PROTECT SERVICING PERSONNEL IT IS MANDATORY THAT ANY
INSTRUMENT BEING SERVICED IS COMPLETELY PURGED AND NEUTRALIZED
OF TOXIC, BACTERIOLOGICALLY INFECTED, CORROSIVE OR RADIOACTIVE
CONTENTS.
Flow Path Cleaning
Before attempting any disassembly of the unit for cleaning, try inspecting the
flow paths by looking into the inlet and outlet ends of the meter for any debris that
may be clogging the flow through the meter. Remove debris as necessary. If the
flow path is not unclogged, then proceed with steps below.
Do not attempt to disassemble the sensor. If blockage of the sensor tube is not alleviated by flushing through with cleaning fluids, please return meter for servicing.
,
6.2.1
NOTE: DISASSEMBLY MAY COMPROMISE CURRENT CALIBRATION.
Restrictor Flow Element (RFE)
The Restrictor Flow Element (RFE) is a precision flow divider inside the transducer, which splits the inlet gas flow by a preset amount to the sensor and main
flow paths. The particular RFE used in a given Mass Flow Meter depends on the
gas and flow range of the instrument.
10
6.2.2 FMA1700A/1800A Series Max Flow 15 L/min models
Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow
Element (RFE) is connected to the inlet fitting.
Carefully disassemble the RFE from the inlet connection. The 50 micron filter
screen will now become visible. Push the screen out through the inlet fitting. Clean
or replace each of the removed parts as necessary. If alcohol is used for cleaning, allow time for drying.
Inspect the flow path inside the transducer for any visible signs of contaminant. If
necessary, flush the flow path through with alcohol. Thoroughly dry the flow paths
by flowing clean dry gas through.
Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming
the RFE. Be sure that no dust has collected on the O-ring seal.
,
NOTE: OVER TIGHTENING WILL DEFORM AND RENDER THE RFE DEFECTIVE.
It is advisable that at least one calibration point be checked after re-installing the
inlet fitting-See section (g).

7.
,
7.1
IT IS NOT RECOMMENDED TO ATTEMPT TO DISASSEMBLE, OR REPAIR
MAXIMUM FLOW RATE SERIES MODELS 50 L/min, 100 L/min, 200 L/min,
500 L/min or 1000 L/min. DISASSEMBLY NECESSITATES RE-CALIBRATION.
CALIBRATION PROCEDURES
NOTE:
NOTE: REMOVAL
REMOVAL OF
OF THE
THE FACTORY
FACTORY INSTALLED
INSTALLED CALIBRATION
CALIBRATION SEALS
SEALS AND/OR
AND/OR
ANY
ADJUSTMENTS
MADE
TO
THE
METER,
AS
DESCRIBED
IN
ANY ADJUSTMENTS MADE TO THE METER, AS DESCRIBED IN THIS
THIS SECTION,
SECTION,
WILL
WILL VOID
VOID ANY
ANY CALIBRATION
CALIBRATION WARRANTY
WARRANTY APPLICABLE.
APPLICABLE.
Flow Calibration
OMEGA7 Engineering Flow Calibration Laboratory offers professional calibration
support for Mass Flow Meters, using precision calibrators under strictly controlled
conditions. NIST traceable calibrations are available. Calibrations can also be performed at customers' site using available standards.
Factory calibrations are performed using NIST traceable precision volumetric
calibrators incorporating liquid sealed frictionless actuators. Generally, calibrations are performed using dry nitrogen gas. The calibration can then be corrected
to the appropriate gas desired based on relative correction [K] factors shown in
the gas factor table - see Appendix 2. A reference gas, other than nitrogen, may
be used to better approximate the flow characteristics of certain gases.
11
This practice is recommended when a reference gas is found with thermodynamic
properties similar to the actual gas under consideration. The appropriate relative
correction factor should be recalculated - see section 9. It is standard practice to
calibrate Mass Flow Meters with dry nitrogen gas at 700 F (21.1 FC), 20 psig (1.4
bars) inlet pressure and 0 psig (0 bar) outlet pressure. It is best to calibrate the
FMA1700A/1800A transducers to actual operating conditions. Specific gas calibrations of non-toxic and non-corrosive gases are available at specific conditions.
Please contact your OMEGA7 for a price quotation. It is recommended that a flow
calibrator of at least four times better collective accuracy than that of the Mass
Flow Meter to be calibrated be used. Equipment required for calibration includes
a flow calibration standard and a certified high sensitivity multimeter (which
together have a collective accuracy of ±0.25% or better), an insulated (plastic)
screwdriver, a flow regulator (example: metering needle valve) installed upstream
from the Mass Flow Meter and a pressure regulated source of dry filtered nitrogen gas (or other suitable reference gas).
The gas and ambient temperature, as well as inlet and outlet pressure conditions
should be set up in accordance with actual operating conditions.
J1A (R52)
J1B (R38)
J1C (R39)
R1
J1D (R40)
MODULAR JACK
R52-25%
(IF ENABLED)
D-CONNECTOR
R33-SPAN
(25% or 10%)
INCREASE
DECREASE
R34-ZERO
POWER JACK
R38-50%
R39-75%
R40-100%
FIGURE 7.a - CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS
12
7.2
Calibration of FMA1700A/1800A Mass Flow Meters
All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.
FMA1700A/1800A Mass Flow Meters may be field recalibrated/checked for the
same range they were originally factory calibrated for. When linearity adjustment
is needed, or flow range changes are being made proceed to step 7.3. Flow
range changes may require a different Restrictor Flow Element (RFE). Consult
OMEGA7 for more information.
7.2.1
Connections and Initial Warm Up
At the 9-pin “D” connector of the FMA1700A/1800A transducer, connect the multimeter to output pins [2] and [3] for 0-5 VDC (or pins [8] and [9] for 4-20 mA)-(see
Figure 2.a).
Power up the Mass Flow Meter for at least 30 minutes prior to commencing the
calibration procedure.
7.2.2 ZERO Adjustment
Shut off the flow of gas into the Mass Flow Meter. To ensure that no seepage or leak
occurs into the meter, it is good practice to temporarily disconnect the gas source.
Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer
[R34] through the access window for 0 VDC (or 4 mA respectively) at zero flow.

CAUTION: The minimum voltage on 0-5 Vdc output can be in the range of 7
to 25 mV. Trying to reduce voltage below this level may increase negative
zero shift. This shift may be invisible on devices without LCD display. Stop
R34 zero potentiometer adjustment if voltage on 0-5 Vdc output is in the
range from 7 to 25 mV and does not decrease any lower.
7.2.3 SPAN Adjustment
Reconnect the gas source. Using the flow regulator, adjust the flow rate to 100% of
full scale flow. Check the flow rate indicated against the flow calibrator. If the deviation is less than ±10% of full scale reading, correct the SPAN potentiometer [R33]
setting by using the insulated screwdriver through the access window, to eliminate
any deviation. If the deviation is larger than ±10% of full scale reading, a defective
condition may be present.
LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE:
✓
✓
✓
✓
Occluded or contaminated sensor tube.
Leaking condition in the FMA1700A/1800A transducer or the gas line and fittings.
For gases other than nitrogen, recheck appropriate “K” factor from the Gas Factor Table.
Temperature and/or pressure correction errors.
13
See also section 8. TROUBLESHOOTING. If after attempting to remedy the
above conditions, a malfunction still persists, return the meter for factory
service, see section 1.1.
At this point the calibration is complete. However, it is advisable that several
additional points between 0 and 100%, such as 25%, 50%, and 75% flow be
checked. If discrepancies are found, proceed to step 7.3 for Linearity Adjustment.
7.3
Linearity Adjustment
7.3.1
Connections and Initial Warm Up
At the 9-pin “D” connector of the FMA1700A & FMA1800A transducer, connect
the multimeter to output pins [2] and [3] for 0-5 VDC (or pins [8] and [9] for 4-20
mA)-(see Figure 2.a). If calibration to a new flow range or different gas is being
performed, it may be necessary to remove any jumpers at J1.A, J1.B, J1.C, and
J1.D before the beginning the linearizing procedure.
Power up the Mass Flow Meter for at least 30 minutes prior to commencing the
calibration procedure.
7.3.2 ZERO Adjustment
Shut off the flow of gas into the Mass Flow Meter. To ensure that no seepage or
leak occurs into the meter, it is good practice to temporarily disconnect the gas
source. Using the multimeter and the insulated screwdriver, adjust the ZERO
potentiometer [R34] through the access window for 0 VDC (or 4 mA respectively)
at zero flow.

CAUTION: The minimum voltage on 0-5 Vdc output can be in the range of 7
to 25 mV. Trying to reduce voltage below this level may increase negative
zero shift. This shift may be invisible on devices without LCD display. Stop
R34 zero potentiometer adjustment if voltage on 0-5 Vdc output is in the
range from 7 to 25 mV and does not decrease any lower.
7.3.3 25% Flow Adjustment (using R33 potentiometer)
Reconnect the gas source. Using the flow regulator, adjust the flow rate to 25%
of full scale flow. Check the flow rate indicated against the flow calibrator.
Adjust the setting for potentiometer [R33] by using the insulated screwdriver
through the access window, until the output of the flow meter reads 1.25VDC
±63mV (or 8mA ±0.25mA).
Using the flow regulator, adjust the flow rate until the output of the flow meter
reads 0.5 VDC (or 5.6mA). Check the flow rate against the flow calibrator. If the
flow rate indicated by the calibrator is within 10% ± 1.5% of F.S. then skip paragraphs 7.3.4, 7.3.5 and proceed directly to paragraph 7.3.6, if not, perform 10%
flow adjustment according to paragraph 7.3.4.
14
7.3.4 10% Flow Adjustment
Using the flow regulator, adjust the flow rate to 10% of full scale flow according to the
calibrator. Check the flow rate indicated against the flow calibrator. Adjust the setting
for potentiometer [R33] by using the insulated screwdriver through the access window, until the output of the flow meter reads 0.5VDC ±63mV (or 5.6mA ±0.25mA).
7.3.5 25% Flow Adjustment (using R52 potentiometer)
Using the flow regulator, adjust the flow rate to 25% of full scale flow according to
the calibrator. Check the flow rate indicated against the flow calibrator. The output
of the flow meter should read 1.25VDC ±63mV (or 8.0mA ±0.25mA). If the reading
is outside of that range, place the jumper at [J1.A] as appropriate to increase or
decrease the signal. Adjust the setting for potentiometer [R52] by using the insulated screwdriver through the access window, until reading is within specification.
7.3.6 50% Flow Adjustment
Using the flow regulator, increase the flow rate to 50% of full scale flow according
to the calibrator. Check the flow rate indicated against the flow calibrator. The output of the flow meter should read 2.50VDC ±63mV (or 12mA ±0.25mA). If the reading is outside of that range, place the jumper at [J1.B] as appropriate to increase
or decrease the signal. Adjust the setting for potentiometer [R38] by using the insulated screwdriver through the access window, until reading is within specification.
7.3.7 75% Flow Adjustment
Using the flow regulator, increase the flow rate to 75% of full scale flow according
to calibrator. Check the flow rate indicated against the flow calibrator. The output of
the flow meter should read 3.75VDC ±63mV (or 16mA ±0.25mA). If the reading is
outside of that range, place the jumper at [J1.C] as appropriate to increase or
decrease the signal. Adjust the setting for potentiometer [R39] by using the insulated screwdriver through the access window, until reading is within specification.
7.3.8 100% Flow Adjustment
Using the flow regulator, increase the flow rate to 100% of full scale flow. Check
the flow rate indicated against the flow calibrator. The output of the flow meter
should read 5.00VDC ±63mV (or 20mA ±0.25mA).
If the reading is outside of that range, place the jumper at [J3] as appropriate to
increase or decrease the signal. Adjust the setting for potentiometer [R40] by using the
insulated screwdriver through the access window, until reading is within specification.
Repeat steps 7.3.3 to 7.3.6 at least once more.
7.4
LCD Display Scaling
It may be desirable to re-scale the output reading on the LCD readout supplied with
certain model FMA1700A/1800A transducers. Re-calibration for a new flow range
or different engineering units are two examples of when this may be necessary.
15
7.4.1
Access LCD Display Circuit
Carefully remove the LCD from the FMA1700A/1800A or panel mounted surface.
Remove the aluminum housing on the side of the connection cable. Slide the
LCD assembly out of the aluminum housing.
7.4.2 Adjust Scaling
Using a digital multimeter connected to either the 0 to 5 VDC or 4 to 20 mA signal at the 9-pin “D” connector, set the flow rate on the FMA1700A/1800A to full
scale flow (5 VDC or 20mA). Maintain full scale flow, and adjust the potentiometer [R3] on the LCD printed circuit board to desired full scale flow reading.
7.4.3 Change Decimal Point
To change the decimal place on the LCD display readout, simply move the jumper
to the appropriate location on the 8-pin header block. The numbers are printed to
the side of the connections. Do not attempt to place more than one jumper for
decimal setting.
JUMPER POSITION
MAXIMUM SCALABLE DISPLAY READING
“0”
1999
“3”
199.9
“2”
19.99
“1”
1.999
8.
TROUBLESHOOTING
8.1
Common Conditions
Your Mass Flow Meter was thoroughly checked at numerous quality control points
during and after manufacturing and assembly operations. It was calibrated
according to your desired flow and pressure conditions for a given gas or a mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:
Are all cables connected correctly? Are there any leaks in the installation? Is the
power supply correctly selected according to requirements? When several meters
are used a power supply with appropriate current rating should be selected.
Were the connector pinouts matched properly? When interchanging with other
manufacturers' equipment, cables and connectors must be carefully wired for correct pin configurations. Is the pressure differential across the instrument sufficient?
16
8.2
Troubleshooting Guide
INDICATION
Lack of reading or output.
LIKELY REASON
REMEDY
Power supply off
Check connection of power
supply.
Fuse blown
Disconnect FMA1700A/1800A
transducer from power
supply; remove the shorting
condition or check polarities;
fuse resets automatically.
Filter screen
obstructed at inlet.
Flush clean or disassemble
to remove impediments or
replace.
Occluded sensor tube.
Flush clean or or return to
factory for replacement.
PC board defect.
Return to factory for replacement.
Power supply problem.
Check power supply for
appropriate output.
Unstable or no zero reading. Gas leak.
Locate and correct.
PC board defective.
Return to factory for replacement.
Full scale output at “no
Defective sensor.
flow” condition or with valve
closed.
Gas leak.
Return to factory for replacement.
Calibration off.
Gas metered is not the
same as what meter was
calibrated for.
Use matched calibration.
Composition of gas
changed.
See K factor tables in
APPENDIX 2.
Gas leak.
Locate and correct.
PC board defective.
Return to factory for replacement.
RFE dirty.
Flush clean or disassemble
to remove impediments.
Occluded sensor tube.
Flush clean or return to
factory for replacement.
Filter screen obstructed at
inlet.
Flush clean or disassemble to
remove impediments or replace.
Transducer
is not mounted properly.
Check for any tilt or change
in the mounting of the
transducer; generally, units
are calibrated for horizontal
installation
(relative to the sensor tube).
17
Locate and correct.
INDICATION
LIKELY REASON
REMEDY
No zero reading after 15
Embedded temperature has Readjust ZERO
minute warm up time and no been changed.
potentiometer R34 through
flow condition.
the access hole
(see page 13 for details).
No zero reading after 15
Power supply voltage is
minute warm up time and no less than 11.0 Vdc.
flow condition. Display
reading does not response
on zero adjustment.
Measure voltage on pins
[4] and [5] of the 9-pin
D-connector. If voltage is
less than 11.0Vdc replace
power supply with new one
(regulated 12.0 to 24.0
Vdc, 250 mA minimum is
recommended).
No zero reading after 15
minute warm up time and
no flow condition. Display
reading does not response
on zero adjustment. But
analog output 0-5 Vdc can
be adjusted from 10mV up
to 0.5 Vdc with zero
potentiometer R34.
Wire is disconnected inside Carefully remove the LCD
of the LCD Display.
from FMA1700A/1800A.
Remove the aluminum
housing on the side of the
connection cable. Side the
LCD assembly out of the
aluminum housing. Check
connection for all four
wires. If any wire is
disconnected restore
connection and readjust
zero potentiometer R34 to
get zero reading on the
display (ensure gas source
is disconnected and no
seepage or leak occurs in
to the meter).
LCD Display remains blank
when unit is powered up.
But flow can be observed
on analog output 0-5 Vdc
(pis 2 and 3 of the
D-connector).
LCD Display connector is
not attached to the
FMA1700A/1800A or
connection is loose.
Check LCD connector
(remove and reinstall LCD
connector).
Wire is disconnected inside See instructions for pos. 3.
of the LCD Display.
LCD Display remains blank Power supply is bad or
when unit is powered up. No polarity is reversed.
response on the flow from
analog output 0-5 Vdc
(voltage is less than 15 mV).
PC board is defective.
18
Measure voltage on pins
[4] and [5] of the 9-pin
D-connector. If voltage is
less than 11.0Vdc replace
power supply with new one
(regulated 12.0 to 24.0
Vdc, 250 mA minimum is
recommended). If polarity
is reversed (reading is
negative) make correct
connection.
Return FMA1700A/1800A
to factory for repair.
INDICATION
LIKELY REASON
REMEDY
LCD Display reading does
LCD Display is adjusted for
not correspond the correct wrong flow range or
flow range according analog engineering units.
output 0-5 Vdc signal.
Readjust LCD Display
scaling for required full scale
flow (see 7.4 on page 15).
LCD Display reading and
analog output 0-5Vdc
signal are fluctuate in wide
range during the flow
measurement.
Output 0-5 Vdc signal (pins
[2] and [3] of the
D-connector) is shorted on
the GND or overloaded.
Check external connections
to pins [2] and [3] of the
D-connector. Make sure the
load resistance is more
than 1000 Ohm.
LCD Display reading does
Output 0-5Vdc schematic is
correspond the correct flow burned out or damaged.
range, but 0-5 Vdc output
signal does not change
(always the same reading
or around zero).
Return FMA1700A/1800A to
factory for repair.
LCD Display reading and
0-5 Vdc output voltage do
correspond the correct flow
range, but 4-20 mA output
signal does not change
(always the same or
reading around 4.0 mA).
External loop resistance is
open or more than 500
Ohm.
Check external connections
to pins [8] and [9] of the
D-connector. Make sure the
loop resistance is less than
500 Ohm.
Output 4-20 mA schematic
is burned out or damaged.
Return FMA1700A/1800A to
factory for repair.
Calibration is off
(no more than 3.0 % F.S.).
FMA1700A/1800A has initial Shut off the flow of gas into
zero shift.
the FMA1700A/1800A
(ensure gas source is disconnected and no seepage
or leak occurs in to the
meter). Wait for 15 minute.
with no flow
condition and readjust zero
potentiometer R34 to get
zero reading on the display.
19
INDICATION
LIKELY REASON
REMEDY
LCD Display reading is
above maximum flow range
and output voltage 0-5 Vdc
signal is more than 5.5 Vdc
when gas flows through the
FMA1700A/1800A.
Sensor under swamping
conditions (flow is more
than 10% above maximum
flow rate for particular
FMA1700A/1800A).
Lower the flow through
FMA1700A/1800A within
calibrated range or shut
down the flow completely.
The swamping condition will
end automatically.
PC board is defective.
Return FMA1700A/1800A to
factory for repair.
The gas flow is too low for
particular model of
FMA1700A/1800A.
Check maximum flow range
on transducer's front panel
and make required flow
adjustment.
FMA1700A/1800A Series
Max Flow 15 L/min models:
RFE is not connected properly to the inlet fitting.
Unscrew the inlet compression fitting of the meter and
reinstall RFE (see 6.2.2 on
page 11). NOTE: Calibration
accuracy can be affected.
Sensor or PC board is
defective.
Return FMA1700A/1800A to
factory for repair.
Gas flows through the
FMA1700A/1800A, but LCD
Display reading and output
voltage 0-5 Vdc signal do
not responds on the flow.
Gas does not flow through Filter screen obstructed at
the FMA1700A/1800A with inlet.
inlet pressure applied to the
inlet fitting. LCD Display
reading and output voltage
0-5 Vdc signal show zero
flow.
Flush clean or disassemble
to remove impediments or
replace the filter screen
(see 6.2 on page 9).
NOTE: Calibration accuracy
can be affected.
Gas flows through the
FMA1700A/1800A, but LCD
Display reading is negative
and output voltage 0-5 Vdc
signal do not responds on
the flow (reading near
10mV).
Direction of the gas flow is
reversed.
Check the direction of gas
flow as indicated by the
arrow on the front of the
meter and make required
reconnection in the installation.
FMA1700A/1800A is installed
in the installation with back
pressure conditions and gas
leak exist in the system.
Locate and correct gas leak in the
system. If FMA1700A/1800A
has internal leak return it to
factory for repair.
Gas flows through the
FMA1700A/1800A, but LCD
Display reading is negative
and does not change
according to gas flow.
Output voltage
0-5 Vdc signal corresponds
correct gas flow.
5.00 Vdc reference voltage Carefully remove the LCD
(green wire) is disconnected from FMA1700A/1800A.
inside of the LCD Display.
Remove the aluminum
housing on the side of the
connection cable. Side the
LCD assembly out of the
aluminum housing. Check
connection for green wire
(5.00 Vdc reference voltage).
If any wire is disconnected
restore connection.
20
INDICATION
LIKELY REASON
REMEDY
Sensor or PC board is
FMA1700A/1800A is
defective.
disconnected from the
source of the gas (no flow
conditions) but LCD Display
reading is fluctuating in
wide range. Output voltage
0-5 Vdc signal also
fluctuating. The power
supply voltage is 12.0 to
24.0 Vdc and stable.
Return FMA1700A/1800A to
factory for repair.
Reading on the LCD Display Decimal point jumper is
installed in wrong position
ten (hundreds) times less
on the LCD Display Circuit.
or more than actual gas
flow. Output voltage
0-5 Vdc signal corresponds
correct gas flow.
Carefully remove the LCD
from FMA1700A/1800A.
Remove the aluminum
housing on the side of the
connection cable. Side the
LCD assembly out of the
aluminum housing.
Reinstall jumper to the
appropriate location on the
8-pin header block
(see 7.4.3 on page 16).
For best results it is recommended that instruments are returned to the factory
for servicing. See section 1.3 for return procedures.
8.3
Technical Assistance
OMEGA7 Engineering will provide technical assistance over the phone to qualified repair personnel. Please call our Flow Department at 800-872-9436 Ext.
2298.
21
9.
CALIBRATION CONVERSIONS FROM
REFERENCE GASES
The calibration conversion incorporates the K factor. The K factor is derived from
gas density and coefficient of specific heat. For diatomic gases:
1
d X Cp
where d = gas density (gram/liter)
Cp
= coefficient of specific heat (cal/gram)
K gas =
Note in the above relationship that d and Cp are usually chosen at the same conditions (standard, normal or other).
If the flow range of a Mass Flow Meter remains unchanged, a relative K factor is
used to relate the calibration of the actual gas to the reference gas.
K =
Qa
Qr
where Qa
Qr
Ka
Kr
=
=
=
=
=
Ka
Kr
mass flow rate of an actual gas (sccm)
mass flow rate of a reference gas (sccm)
K factor of an actual gas
K factor of a reference gas
For example, if we want to know the flow rate of oxygen and wish to calibrate
with nitrogen at 1000 SCCM, the flow rate of oxygen is:
QO2 = Qa = Qr X K = 1000 X 0.9926 = 992.6 sccm
where K = relative K factor to reference gas (oxygen to nitrogen)
22
APPENDIX 1
COMPONENTS DIAGRAM
FMA1700A/1800A METERING PC BOARD
23
APPENDIX 2
GAS FACTOR TABLE (“K” FACTORS)
 CAUTION: K-Factors at best are only an approximation. K factors should not
be used in applications that require accuracy better than +/- 5 to 10%.
ACTUAL GAS
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
.5829
1.0000
.4346
.7310
1.4573
1.205
.6735
.4089
.5082
.8083
.38
.26
.3855
.3697
.3224
.2631
.2994
.324
.291
.7382
.658
.4036
.240
.352
.492
.1244
.1244
.1167
.1279
.1778
.0539
.0647
.1369
.1161
.1113
.3514
.4007
.3648
.336
.374
.2016
.2016
1.162
1.293
1.787
.760
1.782
1.782
3.478
5.227
3.025
7.130
11.18
7.803
6.108
6.644
2.413
2.593
2.503
2.503
2.503
1.964
1.964
.6026
1.00
.31
.42
.5428
.6606
.86
.4016
.4589
.3912
.2418
.3834
.61
.6130
.4584
.1428
.2488
.1655
.1654
.1710
.1651
.114
.1650
.1544
.1309
.164
.153
.2613
.1739
.3177
3.397
1.250
6.860
3.926
2.945
2.680
3.163
4.125
3.858
5.326
6.892
4.660
2.322
2.742
1.877
Acetylene C2H2
Air
Allene (Propadiene) C3H4
Ammonia NH3
*Argon Ar
*Argon AR-1 (>10 L/min)
Arsine AsH3
Boron Trichloride BCl3
Boron Trifluoride BF3
Bromine Br2
Boron Tribromide Br3
Bromine PentaTrifluoride BrF5
Bromine Trifluoride BrF3
Bromotrifluoromethane (Freon-13 B1) CBrF3
1,3-Butadiene C4H6
Butane C4H10
1-Butene C4H8
2-Butene C4H8 CIS
2-Butene C4H8 TRANS
*Carbon Dioxide CO2
*Carbon Dioxide CO2-1 (>10 L/min)
Carbon Disulfide CS2
Carbon Monoxide C0
Carbon Tetrachloride CCl4
Carbon Tetrafluoride (Freon-14)CF4
Carbonyl Fluoride COF2
Carbonyl Sulfide COS
Chlorine Cl2
Chlorine Trifluoride ClF3
Chlorodifluoromethane (Freon-22)CHClF2
Chloroform CHCl3
Chloropentafluoroethane(Freon-115)C2ClF5
Chlorotrifluromethane (Freon-13) CClF3
CyanogenC2N2
CyanogenChloride CICN
Cyclopropane C3H5
* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.
24
ACTUAL GAS
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
Deuterium D2
Diborane B2H6
Dibromodifluoromethane CBr2F2
Dichlorodifluoromethane (Freon-12) CCl2F2
Dichlofluoromethane (Freon-21) CHCl2F
Dichloromethylsilane (CH3)2SiCl2
Dichlorosilane SiH2Cl2
Dichlorotetrafluoroethane (Freon-114) C2Cl2F4
1,1-Difluoroethylene (Freon-1132A) C2H2F2
Dimethylamine (CH3)2NH
Dimethyl Ether (CH3)2O
2,2-Dimethylpropane C3H12
Ethane C2H6
Ethanol C2H6O
Ethyl Acetylene C4H6
Ethyl Chloride C2H5Cl
Ethylene C2H4
Ethylene Oxide C2H4O
Fluorine F2
Fluoroform (Freon-23) CHF3
Freon-11 CCl3F
Freon-12 CCl2F2
Freon-13 CClF3
Freon-13B1 CBrF3
Freon-14 CF4
Freon-21 CHCl2F
Freon-22 CHClF2
Freon-113 CCl2FCClF2
Freon-114 C2Cl2F4
Freon-115 C2ClF5
Freon-C318 C4F8
Germane GeH4
Germanium Tetrachloride GeCl4
*Helium He
*Helium He-1 (>50 L/min)
*Helium He-2 (>10-50 L/min)
Hexafluoroethane C2F6 (Freon-116)
Hexane C6H14
*Hydrogen H2-1
*Hydrogen H2-2 (>10-100 L)
*Hydrogen H2-3 (>100 L)
1.00
.4357
.1947
.3538
.4252
.2522
.4044
.2235
.4271
.3714
.3896
.2170
.50
.3918
.3225
.3891
.60
.5191
.9784
.4967
.3287
.3538
.3834
.3697
.4210
.4252
.4589
.2031
.2240
.2418
.1760
.5696
.2668
1.454
2.43
2.05
.2421
.1792
1.0106
1.35
1.9
1.722
.508
.15
.1432
.140
.1882
.150
.1604
.224
.366
.3414
.3914
.420
.3395
.3513
.244
.365
.268
.1873
.176
.1357
.1432
.153
.1113
.1654
.140
.1544
.161
.160
.164
.185
.1404
.1071
1.241
1.241
1.241
.1834
.3968
3.419
3.419
3.419
1.799
1.235
9.362
5.395
4.592
5.758
4.506
7.626
2.857
2.011
2.055
3.219
1.342
2.055
2.413
2.879
1.251
1.965
1.695
3.127
6.129
5.395
4.660
6.644
3.926
4.592
3.858
8.360
7.626
6.892
8.397
3.418
9.565
.1786
.1786
.1786
6.157
3.845
.0899
.0899
.0899
* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.
25
ACTUAL GAS
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
1.000
1.000
.764
.9998
.9987
.7893
.80
.2492
.27
.2951
1.453
.7175
.75
.0861
.1912
.3171
.3479
.0545
.1025
.2397
.1108
.3872
.3701
.0593
.5328
.5328
3.610
1.627
1.206
.893
5.707
3.613
1.520
9.90
3.593
2.503
3.739
.7175
.7175
.5843
.4313
.5835
.6299
.68
.5180
.2499
.2126
.3512
.51
1.46
.990
1.000
.737
.4802
.6134
.7128
.176
.9926
.6337
.446
.2554
.2134
.3950
.174
.4438
.759
.3274
.3547
.1106
.1926
.3221
.2459
.164
.1373
.387
.4343
.246
.2328
.2485
.1933
.1797
.1632
.2088
.185
.2193
.1917
.195
.38
.398
.1514
.197
.1394
.2374
1.429
1.787
4.236
2.253
1.518
2.146
6.669
9.366
2.011
1.386
.900
1.339
1.25
2.052
3.168
2.920
1.964
8.397
1.427
2.406
2.144
2.816
3.219
4.571
8.388
4.418
1.517
Hydrogen Bromide HBr
Hydrogen Chloride HCl
Hydrogen Cyanide HCN
Hydrogen Fluoride HF
Hydrogen Iodide HI
Hydrogen Selenide H2Se
Hydrogen Sulfide H2S
Iodine Pentafluoride IF5
Isobutane CH(CH3)3
Isobutylene C4H6
Krypton Kr
*Methane CH4
*Methane CH4-1 (>10 L/min)
Methanol CH3
Methyl Acetylene C3H4
Methyl Bromide CH3Br
Methyl Chloride CH3Cl
Methyl Fluoride CH3F
Methyl Mercaptan CH3SH
Methyl Trichlorosilane (CH3)SiCl3
Molybdenum Hexafluoride MoF6
Monoethylamine C2H5NH2
Monomethylamine CH3NH2
Neon NE
Nitric Oxide NO
Nitrogen N2
Nitrogen Dioxide NO2
Nitrogen Trifluoride NF3
Nitrosyl Chloride NOCl
Nitrous Oxide N2O
Octafluorocyclobutane (Freon-C318) C4F8
Oxygen O2
Oxygen Difluoride OF2
Ozone
Pentaborane B5H9
Pentane C5H12
Perchloryl Fluoride ClO3F
Perfluoropropane C3F8
Phosgene COCl2
Phosphine PH3
* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.
26
ACTUAL GAS
K FACTOR
Relative to N2
Cp
[Cal/g]
Density
[g/I]
.36
.3021
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278
.1324
.1610
.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380
6.843
5.620
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
.2031
.161
8.36
Phosphorous Oxychloride POCl3
Phosphorous Pentafluoride PH5
Phosphorous Trichloride PCl3
Propane C3H8
Propylene C3H6
Silane SiH4
Silicon Tetrachloride SiCl4
Silicon Tetrafluoride SiF4
Sulfur Dioxide SO2
Sulfur Hexafluoride SF6
Sulfuryl Fluoride SO2F2
Tetrafluoroethane (Forane 134A) CF3CH2F
Tetrafluorohydrazine N2F4
Trichlorofluoromethane (Freon-11) CCl3F
Trichlorosilane SiHCl3
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl2FCClF2
Triisobutyl Aluminum (C4H9)AL
Titanium Tetrachloride TiCl4
Trichloro Ethylene C2HCl3
Trimethylamine (CH3)3N
Tungsten Hexafluoride WF6
Vinyl Bromide CH2CHBr
Vinyl Chloride CH2CHCl
Xenon Xe
.0608
.2691
.32
.2792
.2541
.4616
.48
1.44
27
.508
.120
.163
.3710
.0810
.1241
.12054
.0378
8.848
8.465
5.95
2.639
13.28
4.772
2.788
5.858
APPENDIX 3
DIMENSIONAL DRAWINGS
2.38
NO LCD
VERSION
0.95
A
H
FLOW
B
D
E
*D
*E
J
C
*C
DASHED LINE FOR
HIGH FLOW UNITS
G
F
MAXIMUM
FLOW
SERIES
DIMENSION (INCH)
CONNECTION
Compression Fitting
(Except Model
FMA1700A/1800A
Series Max Flow
1000 L/min)
NO
LCD
LCD VERSION
A
B
C/*C
D/*D
E/*E
F
G
H
10 L/min
¹/₄" Tube O Diameter
5.60
1.00
1.00
3.00
5.02
0.69
2.69
4.50
50 L/min
¹/₄" Tube O Diameter
5.98
1.37
1.25
4.13
6.15
0.69
2.69
4.88
100 L/min
³/₈" Tube O Diameter
5.98
1.37
1.25
4.13
6.27
0.69
2.69
4.88
200 L/min
³/₈" Tube O Diameter
6.60
2.00
1.75
6.69
8.83
0.99
4.69
5.50
500 L/min
¹/₂" Tube O Diameter
7.60
3.00
3.00
7.25
9.67
2.250 6.750 6.50
1000 L/min
³/₄" NPT Female
8.60
4.00
4.00
7.30
-
3.000 6.800 7.50
NOTES:
OMEGA7 reserves the right to change designs and dimensions at its sole discretion at any
time without notice. For certified dimensions please contact OMEGA7.
28
PARTS OF THE FLOW METER
LEFT AND RIGHT VIEWS
FRONT VIEW
29
NOTES:
30
WARRANTY/DISCLAIMER
OMEGA ENGINEERING, INC. warrants this unit to be free of defects in materials and
workmanship for a period of 13 months from date of purchase. OMEGA’s WARRANTY adds
an additional one (1) month grace period to the normal one (1) year product warranty to
cover handling and shipping time. This ensures that OMEGA’s customers receive maximum
coverage on each product.
If the unit malfunctions, it must be returned to the factory for evaluation. OMEGA’s Customer
Service Department will issue an Authorized Return (AR) number immediately upon phone
or written request. Upon examination by OMEGA, if the unit is found to be defective, it
will be repaired or replaced at no charge. OMEGA’s WARRANTY does not apply to defects
resulting from any action of the purchaser, including but not limited to mishandling, improper
interfacing, operation outside of design limits, improper repair, or unauthorized modification.
This WARRANTY is VOID if the unit shows evidence of having been tampered with or shows
evidence of having been damaged as a result of excessive corrosion; or current, heat, moisture
or vibration; improper specification; misapplication; misuse or other operating conditions
outside of OMEGA’s control. Components in which wear is not warranted, include but are not
limited to contact points, fuses, and triacs.
OMEGA is pleased to offer suggestions on the use of its various products. However,
OMEGA neither assumes responsibility for any omissions or errors nor assumes
liability for any damages that result from the use of its products in accordance
with information provided by OMEGA, either verbal or written. OMEGA warrants
only that the parts manufactured by the company will be as specified and free of
defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY
KIND WHATSOEVER, EXPRESSED OR IMPLIED, EXCEPT THAT OF TITLE, AND ALL
IMPLIED WARRANTIES INCLUDING ANY WARRANTY OF MERCHANTABILITY AND
FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED. LIMITATION
OF LIABILITY: The remedies of purchaser set forth herein are exclusive, and the
total liability of OMEGA with respect to this order, whether based on contract,
warranty, negligence, indemnification, strict liability or otherwise, shall not exceed
the purchase price of the component upon which liability is based. In no event shall
OMEGA be liable for consequential, incidental or special damages.
CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1)
as a “Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or
activity; or (2) in medical applications or used on humans. Should any Product(s) be used in or
with any nuclear installation or activity, medical application, used on humans, or misused in
any way, OMEGA assumes no responsibility as set forth in our basic WARRANTY / DISCLAIMER
language, and, additionally, purchaser will indemnify OMEGA and hold OMEGA harmless from
any liability or damage whatsoever arising out of the use of the Product(s) in such a manner.
RETURN REQUESTS/INQUIRIES
Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department.
BEFORE RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN
AUTHORIZED RETURN (AR) NUMBER FROM OMEGA’S CUSTOMER SERVICE DEPARTMENT
(IN ORDER TO AVOID PROCESSING DELAYS). The assigned AR number should then be
marked on the outside of the return package and on any correspondence.
The purchaser is responsible for shipping charges, freight, insurance and proper packaging to
prevent breakage in transit.
FOR WARRANTY RETURNS, please have
the following information available BEFORE
contacting OMEGA:
1. Purchase Order number under which
the product was PURCHASED,
2.Model and serial number of the product
under warranty, and
3.Repair instructions and/or specific
problems relative to the product.
FOR NON-WARRANTY REPAIRS, consult
OMEGA for current repair charges. Have the
following information available BEFORE
contacting OMEGA:
1.Purchase Order number to cover the
COST of the repair,
2. Model and serial number of the product, and
3. Repair instructions and/or specific problems
relative to the product.
OMEGA’s policy is to make running changes, not model changes, whenever an improvement is possible.
This affords our customers the latest in technology and engineering.
OMEGA is a trademark of OMEGA ENGINEERING, INC.
© Copyright 2018 OMEGA ENGINEERING, INC. All rights reserved. This document may not be copied, photocopied,
reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part, without
the prior written consent of OMEGA ENGINEERING, INC.
Where Do I Find Everything I Need for
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OMEGA…Of Course!
Shop online at omega.com
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