Omega FMA-2600A Series Owner Manual
Omega FMA-2600A Series Gas Flow Controllers precisely measure and control the flow of gases. They are ideal for a wide range of industrial, research, and laboratory applications. With their high accuracy, fast response time, and wide flow ranges, FMA-2600A Series Controllers can be used to control the flow of gases in a variety of processes, including:
- Semiconductor manufacturing
- Pharmaceutical manufacturing
- Food and beverage processing
- Environmental monitoring
- And many others
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User’s Guide
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FMA-2600/FVL-2600 SERIES
Mass and Volumetric Flow Controllers
omega.com [email protected]
Servicing North America:
Omega Engineering, Inc. Customer Service: 1-800-622-2378 (USA & Canada only) Engineering Service: 1-800-872-9436 (USA & Canada only) Tel: (203) 359-1660 Fax: (203) 359-7700 e-mail: [email protected]
For Other Locations Visit omega.com/worldwide
The information contained in this document is believed to be correct, but OMEGA accepts no liability for any errors it contains, and reserves the right to alter specifications without notice.
Thank you for purchasing an Omega FMA-2600A Series Gas Flow Controller.
Please take the time to read the information contained in this manual. This will
help to ensure that you get the best possible service from your instrument. This manual covers the following Omega instruments:
FMA-2600A Mass Gas Flow Controllers FMA-LP2600A Low Pressure Drop Mass Gas Flow Controllers FMA-2600A-LSS Mass Gas Flow Controllers
FMA-2600A-LSS Flow Controllers are for use with certain aggressive gases (see page 67)
FMA-2600A-P Mass Gas Flow Controllers
FMA-2600A-P Flow Controllers have an integrated shut-off valve and are built for use with applications that require tight shut-off (see pages 30 and 65).
Unless otherwise noted, the instructions in this manual are applicable to all of
the above instruments.
Full specifications for each device can be found on pages 56 through 71.
Please contact Omega at 800-826-6342 if you have any questions regarding the use or operation of this device.
3
TABLE OF CONTENTS
GETTING STARTED MOUNTING PLUMBING PRESSURE POWER AND SIGNAL CONNECTIONS INPUT SIGNALS Analog Input Signal
RS232 / RS485 Digital Input Signal
OUTPUT SIGNALS
RS232 / RS485 Digital Output Signal Standard Voltage (0-5 Vdc) Output Signal Optional 0-10 Vdc Output Signal Optional Current (4-20 mA) Output Signal Optional 2nd Analog Output Signal Information for Omega TFT (Color Display) Instruments
DISPLAYS AND MENUS MAIN Gas Absolute Pressure Gas Temperature Set-Pt.
Volumetric Flow Rate
Mass Flow Rate
Flashing Error Message
SELECT MENU CONTROL SETUP Set-Point Source
Loop Variable On / Off Auto-tare
PID Tuning GAS SELECT Composer COMMUNICATION SELECT Unit ID
Baud
MISCELLANEOUS
MISC1 Zero Band
Pressure Averaging Flow Averaging LCD Contrast MISC2 STP/NTP DIAG TEST Rotate Display
DEVICE UNITS
MANUFACTURER DATA 4
25 25 25
26 26 26 26 26 26 27 27 28 28 28 29
Page
6 6 7 7 8 9 9
10 11 11 11 11 11 11 13 14 15 15 15 15 15 16 16 17 18 18 19 19
20 22 23
TABLE OF CONTENTS
FMA-2600A-P Controller Operating Notes RS232 or RS485 Output and Input Configuring HyperTerminal® Streaming Mode Changing from Streaming to Polling Mode Sending a Set-Point via RS232 or RS485 To adjust the P & D terms via RS232 or RS485
Gas Select
Creating and Deleting Gas Mixtures using RS232 or RS485 Collecting Data
Data Format
Sending a Simple Script File to HyperTerminal® Operating Principle Standard Gas Data Tables Gas Lists with Viscosities, Densities and Compressibilities Supported Units List Troubleshooting Maintenance and Recalibration Option: Totalizing Mode
Batch Processing
Accessory: FMA1600-MDB Multi-Drop Box
Accessories
FMA-2600A Technical Specifications FMA-LP2600A Technical Specifications FMA-2600A-P and FMA-2600A-P-LSS Technical Specifications FMA-2600A-LSS Technical Specifications
Eight Pin Mini-DIN Pin-Out DB15 Pin-Out Diagrams Warranty / Returns See Inside of Back Cover Page
30
31 31 31
32 32 33 34
35
36 36 37 37 38 39 47 49
51 52 53 54 55 56 61 65
67 72 73
5
GETTING STARTED
Control Valve Power Jack 8 Pin MiniDIN Inlet Connection Port Display Screen Outlet Connection Port Flow Direction Arrow
Small Valve Mass Flow Controller shown with an
upstream
valve configuration and connection port fittings
Inlet Connection Port Outlet Connection Port
Large Valve Mass Flow Controller shown with a downstream valve configuration and connection port fittings
MOUNTING
FMA-2600A Gas Flow Controllers have holes on the bottom for mounting to flat panels. See pages 56 - 71. Small valve controllers can usually be mounted in any position.
Large valve controllers should be mounted so that the valve cylinder is vertical and upright.
Mounting a large valve controller in another position increases the risk of leakage when the controller is being held closed by the spring force.
No straight runs of pipe are required upstream or downstream of the controller.
6
PLUMBING
Your controller is shipped with plastic plugs fitted in the port openings. To lessen the chance of contaminating the flow stream do not remove these plugs until you are ready to install the device.
Make sure that the gas will flow in the direction indicated by the flow arrow.
Standard FMA-2600A Gas Flow Controllers have female inlet and outlet port connections. Welded VCR and other specialty fittings may have male ports.
The inlet and outlet port sizes (process connections) for different flow ranges are shown on pages 56 - 71.
Controllers with M5 (10-32) ports have O-ring face seals and require no sealant or tape. Do not use tape with welded or o-ring fittings.
For non-M5 (10-32) ports use thread sealing PTFE tape to prevent leakage around the port threads.
Do not wrap
the first two threads. This will minimize the possibility of getting tape into the flow stream and flow body.
Do not use pipe dopes or sealants on the process connections as these compounds can cause permanent damage to the controller should they get into the flow stream.
When changing fittings, carefully clean any tape or debris from the port threads.
We recommend the use of in-line sintered filters to prevent large particulates from entering the measurement head of the instrument. Suggested maximum particulate sizes are as follows: 5 microns for units with FS flow ranges of 0-1 sccm or less.
20 microns for units with FS flow ranges between 0-2 sccm and 0-1 slpm.
50 microns for units with FS flow ranges of 0-1 slpm or more.
PRESSURE
Maximum operating line pressure is 145 psig (1 MPa). If the line pressure is higher than 145 psig (1 MPa), use a pressure regulator upstream from the flow controller to reduce the pressure to 145 psig (1 MPa) or less.
CAUTION!
Exceeding the maximum specified line pressure may cause permanent damage to the solid-state differential pressure transducer.
7
POWER AND SIGNAL CONNECTIONS
Power can be supplied to your controller through either the power jack or the 8 pin
Mini-DIN connector.
An AC to DC adapter which converts line AC power to DC voltage and current as specified below is required to use the power jack.
Small Valve
controllers require a 12-30Vdc power supply with a 2.1 mm female positive center plug capable of supplying 250 mA.
NOTE:
4-20mA analog output
requires at least 15 Vdc.
Large Valve
controllers require a 24-30 Vdc power supply with a 2.1 mm female positive center plug capable of supplying at least 750mA.
7
Standard 8 Pin Mini-DIN Pin-Out Pin Function Mini-DIN cable color
1 2 Not Connected (or optional 4-20mA Primary Output Signal) Static 5.12 Vdc [or optional Secondary Analog Output (4-20mA, 5Vdc, 10Vdc) or Basic Alarm] Black Brown 3 4 5 6 7 8 Serial RS232RX / RS485(–) Input Signal (receive) Meters = Remote Tare (Ground to Tare) Controllers = Analog Set-Point Input Serial RS232TX / RS485(+) Output Signal (send) 0-5 Vdc (or optional 0-10 Vdc) Output Signal Power In (as described above) Ground (common for power, communications and analog signals) Red Orange Yellow Green Blue Purple
Note:
The above pin-out is applicable to all the flow meters and controllers with the Mini-DIN connector. The availability of different output signals depends on the options ordered. Optional configurations are noted on the unit’s calibration sheet.
CAUTION!
Do not connect power to pins 1 through 6 as permanent damage can occur!
It is common to mistake Pin 2 (labeled 5.12 Vdc Output) as the standard 0-5 Vdc analog output signal.
In fact Pin 2 is normally a constant 5.12 Vdc that reflects the system bus voltage and can be used as a source for the set-point signal.
DB15 pin-outs see pages 73 to 79.
8
INPUT SIGNALS
Analog Input Signal
Apply analog input to Pin 4 as shown on page 8.
For DB15 pin-outs see pages 73 to 79.
Standard 0-5 Vdc
is the standard analog input signal. Apply the 0-5 Vdc input signal to pin 4, with common ground on pin 8. The 5.12 Vdc output on pin 2 can be wired through a 50K ohm potentiometer and back to the analog input on pin 4 to create an adjustable 0-5 Vdc input signal source as shown below.
0-5 Vdc 5 8 7 4 6 3 2 1 5.12 Vdc 50 KOhm Potentiometer Simple method for providing set-point to controllers
Optional 0-10 Vdc:
If specified at time of order, a 0-10 Vdc input signal can be applied to pin 4, with common ground on pin 8.
Optional 4-20 mA:
If specified at time of order, a 4-20 mA input signal can be applied to pin 4, with common ground on pin 8.
NOTE:
This is a current sinking device. The receiving circuit is essentially a 250 ohm resistor to ground.
NOTE:
4-20mA output requires at least 15 Vdc power input.
CAUTION!
Do not connect this device to “loop powered’” systems, as this will destroy portions of the circuitry and void the warranty. If you must interface with existing loop powered systems, always use a signal isolator and a separate power supply.
9
RS232 / RS485 Digital Input Signal
To use the RS232 or RS485 input signal, connect the RS232 / RS485 Output Signal (Pin 5), the RS232 / RS485 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown below. (See page 30 for details on accessing RS232 / RS485 input.)
5 4 3
2 1 1
2 3 4 5
9 8 7
Serial Cable End
6 6 7 8
PC Serial Port
9
1 4
5 3 8 7 6
8 Pin MiniDIN Cable End
8 Pin MiniDIN Connector
9 Pin Serial Connection
Pin
5
3 2
Function Ground
Transmit Receive
8 Pin MiniDIN Connection Function Ground
Receive Transmit Pin 8 3
5 DB9 to Mini-DIN Connection for RS232 / RS485 Signals 10
OUTPUT SIGNALS RS232 / RS485 Digital Output Signal
To use the RS232 or RS485 output signal, it is necessary to connect the RS232 / RS485 Output Signal (Pin 5), the RS232 / RS485 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown on page 8. (See page 31 for details on accessing RS232 / RS485 output.)
Standard Voltage (0-5 Vdc) Output Signal
FMA-2600A flow controllers equipped with a 0-5 Vdc (optional 0-10 Vdc) will
have this output signal available on Pin 6. This output is generally available in
addition to other optionally ordered outputs. This voltage is usually in the range of 0.010 Vdc for zero flow and 5.0 Vdc for full-scale flow. The output voltage is linear over the entire range. Ground for this signal is common on Pin 8.
Optional 0-10 Vdc Output Signal
If your controller was ordered with a 0-10 Vdc output signal, it will be available on Pin 6. (See the Calibration Data Sheet that shipped with your controller to determine which output signals were ordered.) This voltage is usually in the range of 0.010 Vdc for zero flow and 10.0 Vdc for full-scale flow. The output voltage is linear over the entire range. Ground for this signal is common on Pin 8.
Optional Current (4-20 mA) Output Signal
If your controller was ordered with a 4-20 mA current output signal, it will be available on Pin 1. (See the Calibration Data Sheet that shipped with your controller to determine which output signals were ordered.) The current signal is 4 mA at 0 flow and 20 mA at the controller’s full scale flow. The output current is linear over the entire range. Ground for this signal is common on Pin 8. (Current output units require 15-30Vdc power.)
Optional 2nd Analog Output Signal
You may specify an optional 2nd analog output on Pin 2 at time of order. (See the Calibration Data Sheet that shipped with your controller to determine which output signals were ordered.) This output may be a 0-5 Vdc, 0-10 Vdc, or 4-20 mA analog signal that can represent any measured parameter. With this optional output, a controller could output the mass flow rate (0-5 Vdc on pin 6) and the absolute pressure (0-5 Vdc on pin 2).
CAUTION!
Do not connect this device to “loop powered’” systems, as this will destroy portions of the circuitry and void the warranty. If you must interface with existing loop powered systems, always use a signal isolator and a separate power supply.
11
CAUTION!
Do not connect this device to “loop powered’” systems, as this will destroy portions of the circuitry and void the warranty. If you must interface with existing loop powered systems, always use a signal isolator and a separate power supply.
Purple (Ground) Red Yellow Purple Red Yellow Purple Red Yellow 5 4 3 2 Unit A Unit B Unit C 1 9 8 7 Female Serial Cable Front 6
Typical Multiple Device (Addressable) Wiring Configuration
The easiest way to connect multiple devices is with a Multi-Drop Box (see page 54).
12
Information for Omega TFT (Color Display) Instruments
Omega TFT (color display) instruments have a high contrast back-lit LCD display.
for our monochrome menus and displays with the following differences. TFT instruments operate in accordance with Omega standard operating instructions
Multi-Color Display Color Codes: GREEN
: Green labels identify the parameters and/or adjustments associated with the button directly above or below the label.
WHITE
: The color of each parameter is displayed in white while operating under normal conditions.
RED
: The color of a parameter is displayed in red when operating conditions for that parameter exceed 128% of the device’s specifications.
YELLOW
: Yellow is the equivalent of the selection arrow on the monochrome display.
LCD Contrast:
LCD contrast is ranged from 0 to 11 on color displays with 11 being the greatest
contrast.
Display On/Off:
Pushing the button under the Omega name will turn the device display on or off. This feature is not available on monochrome displays.
Technical Data for TFT (Color Display) Meters, Gauges and Controllers
The following specifications are applicable to Omega operating manual provided with the device.
TFT
(color display) meters, gauges and controllers only. All other operating specifications are shown in the Technical Data page for standard Omega instruments. All standard device features and functions are available and operate in accordance with the Omega
Specification
Supply Voltage
Supply Current
Meter or Gauge
7 to 30 Vdc 80 mA @ 12Vdc 70 mA @ 24Vdc
Small Valve Controller
12 to 30 Vdc 290 mA @ 12Vdc 200 mA @ 24Vdc
Large Valve Controller
24 to 30 Vdc
780 mA @
24Vdc 13
DISPLAYS AND MENUS
The device screen defaults to
Main
display as soon as power is applied to the controller.
Note: See page 28 to rotate the display 180°.
Main
PSIA +13.60
#C +21.50
SETPT 0.000 +0.00
SCCM Air +0.00
CCM +0.00
SCCM MENU/ TOTAL
The
Main
display shows pressure, temperature, set-point, volumetric flow and mass flow.
Pressing the button adjacent to a
parameter will make that parameter
the primary display unit.
By hitting the
enter the
MENU
button at the bottom right of the screen you will
Select Menu
display.
Totalizer
(option only) TOTAL/ TIMER SETPT 0123.4
Scm3 00123.45
2:05 h:m:s MENU/ MAIN REMAIN RESET If your controller was ordered with the
Totalizer
option (page 52), pushing the
TOTAL
button once will bring up the
Totalizing Mode
display. Pushing
MENU
will bring up the
Select Menu
display.
Select Menu
MISC MFG DATA RS232 COMM
Select Menu
From Push
Select Menu MAIN
you can change
the selected gas, interact with your RS232 / RS485 settings, read manufacturer’s data or access the control set-up display. to return to the Main display.
GAS SELECT C ONTROL SETUP MAIN 14
MAIN
PSIA +13.60
+0.00
CCM >#C K #F #R UP CANCEL
Set Point :
#C +21.50
+0.00
+0.00
SCCM SETPT +0.00 MENU/ TOTAL absolute pressure reading: DOWN
The set-point (
Volumetric Flow Rate:
SCCM Air SET
SETPT
This
mode defaults on power up, with mass flow as the primary displayed
parameter.
The following parameters are displayed in the Main mode.
Gas Absolute Pressure:
This sensor
references hard vacuum and reads incoming pressure both above and below
local atmospheric pressure. This parameter
is moved to the primary display by pushing the button above
Gas Temperature:
or
0 temperature scale will be displayed on the screen.
PSIA
.
The engineering unit associated with absolute pressure is pounds per square inch absolute (psia). This can be converted to gage pressure (psig) by subtracting local atmospheric pressure from the PSIG = PSIA – (Local Atmospheric Pressure) FMA-2600A flow
controllers measure the incoming
temperature of the gas flow. The temperature is displayed in degrees Celsius (°C). This parameter is moved to the primary display by pushing the button above front of the desired scale. It is moved to the primary display by pushing the button below example. Your display may show a different unit of measure.
CCM °C
.
Pushing the button again allows you to
select
0C (Celsius), K (Kelvin), 0
F (Fahrenheit) R (Rankine) for the temperature scale.
To select a temperature scale, use the UP and DOWN buttons to position the arrow in Press SET to record your selection and return to the MAIN display. The selected )is shown in the upper right of the display.
For information on changing the set-point see SETPT SOURCE, page 18.
This parameter is located in the lower left of the display.
in this
When using a mass flow controller as an absolute pressure controller
, the mass flow rate may momentarily exceed the flow measurement capability (full scale + 28%) of the unit. This may occur when the unit is asked to make an abrupt pressure change.
If the optional totalizer is in use at that time
‘over-flow’ condition has occurred. , the totalized value will necessarily become incorrect. Please reset the totalizer if such an 15
Mass Flow Rate:
The mass flow rate is the volumetric flow rate corrected to a standard temperature and pressure (typically 14.696 psia and 25 °C). This parameter is located in the lower middle of the display. It can be moved to the primary display by pushing the button below
must be selected. See Gas Select, page 22.
MENU:
Pressing
MENU SCCM
in this example. Your display may show a different unit of measure preceded by the letter
switches the screen to the
Select Menu S
.
To get an accurate volumetric or mass flow rate, the gas being measured
display.
Flashing Error Message:
An error message (
MOV
= mass overrange,
VOV
= volumetric overrange,
POV
= pressure overrange,
TOV
= temperature
overrange) flashes when a measured parameter exceeds the range of the sensor. When any item flashes, neither the flashing parameter nor the mass flow measurement is accurate. Reducing the value of the flashing parameter to within specified limits will return the unit to normal operation and accuracy.
If the unit does not return to normal operation contact Omega
.
16
SELECT MENU
From Select Menu you can change the selected gas, interact with your RS232 / RS485 settings, read manufacturer’s data and access the control setup screen.
Press the button next to the desired operation to bring that function to the screen.
MISC1 MISC2 BACK DEVICE UNITS MAIN Miscellaneous MODEL INFO O M E G A Ph 800-826-6342 Fax 203-359-7700 BACK MAIN1 Manufacturer Data UP DOWN >Recent Standard Factory Custom COMPOSER User Mixes Bioreactor Breathing Chromatography Fuel CANCEL PAGE SELECT Gas Select MISC MFG DATA
Select Menu
RS232 COMM GAS SELECT C ONTROL SETUP MAIN UNIT ID A BAUD 19200 BACK MAIN Communications Select PSIA +13.60
#C +21.50
+ 0.00
SETPT 0.000 SCCM Air +0.00
CCM +0.00
SCCM Main SETPT SOURCE LOOP VAR SETPT +0.00 - ON AUTO TARE PID MAIN Control Setup An explanation for each screen can be found on the following pages.
17 MAIN
CONTROL SETUP
Control Setup
is accessed by pressing the button below Control Setup on the Select Menu display. From this screen you can select your set-point source, choose a loop variable and adjust the PID terms.
SETPT SOURCE - ON AUTO TARE LOOP VAR PID SETPT +0.0
MAIN Press BACK to return to the Select Menu display. Press MAIN to return to the MAIN display
SETPT SOURCE
– Pressing the button
above SETPT SOURCE will allow you to
select how the set point will be conveyed
to your controller.
Use the line-up and line-down buttons to move the arrow in front of the desired option. Then press SET.
Press CANCEL to return to the previous
display.
The controller will ignore any set-point
except that of the selected set-point source and it will remember which input is selected even if the power is disconnected.
UP DOWN >Serial/ FRONT PANEL ANALOG MODE
Serial
refers to a remote digital RS232 / RS485 set-point applied via a serial connection to a computer or PLC as described in the installation and RS232 / RS485 sections of this manual.
Front Panel
refers to a set-point applied directly at the controller. CANCEL SET
Front Panel input must be selected prior to changing the set-point at the device. Analog
refers to a remote analog set-
point applied to Pin 4 of the Mini-DIN connector as described in the installation section of this manual.
NOTE:
The standard analog input is 0-5 Vdc.
To determine what type of analog set-point your controller has, refer to the Calibration Data Sheet that was included with your controller.
If nothing is connected to Pin 4, and the controller is set for analog control, the device will generate random set-point values.
If your controller has the
IPC
(Integrated Potentiometer Control) option, the IPC dial will operate with the ANALOG set-point source selected.
SETPT
refers to the
set-point
. This parameter may be changed using the display
only if
FRONT PANEL
is selected as the Input. Press
SETPT.
Then use SELECT to
choose the decimal with the arrow and the UP and DOWN buttons to change the value. Press SET to record your value. Press CLEAR to return to zero.
18
CAUTION!
Never leave a Controller with a non-zero set-point if no pressure is available to make flow. The controller will apply full power to the valve in an attempt to reach the set-point. When there is no flow, this can make the valve very HOT!
CONTROL SETUP (continued)
SETPT SOURCE -ON AUTO TARE LOOP VAR PID UP DOWN >Mass Flow Volumetric Flow BAbs Pressure CANCEL SETPT +0.0
MAIN MODE SET
LOOP VAR
—The selection of what variable to close the loop on is a feature unique to FMA-2600A mass flow controllers.
Pressing the
option.
LOOP VAR
button on the
Control Setup screen will allow you to
change what variable is controlled. Use the line-up and line-down buttons to move the arrow in front of the desired When the mass flow controller is supplied
with the
control valve upstream
of the
electronics portion of the system, the unit
can be set to control on outlet pressure (absolute pressures only) or volumetric
flow rate, instead of mass flow rate.
The change from mass to volume can
usually be accomplished without much, if any, change in the P and D settings.
When you change from controlling flow to controlling pressure, sometimes fairly radical changes must be made to the P & D variables.
See page 20 –
PID TUNING
.
Contact Omega if you are having difficulties with this procedure.
ON AUTO / OFF AUTO—
refers to the standard auto-tare or “auto-zero” feature.
The auto-tare feature automatically tares (takes the detected signal as zero) the unit when it receives a zero set-point for more than two seconds. A zero set-point results in the closing of the valve and a known “no flow” condition. This feature makes the device more accurate by periodically removing any cumulative errors associated with drift.
It is recommended that the controller be left in the default auto-tare ON mode unless your specific application requires that it be turned off.
19
PID TUNING
SETPT SOURCE LOOP VAR SETPT +0.0
-ON AUTO TARE PID MAIN UP > PD PID PD2I PID DOWN MODE CANCEL SET P 00100 I 00000 D 02501 BACK LOOP TYPE MAIN PID Values determine the performance and operation of your proportional control valve. These terms dictate control speed, control stability, overshoot and oscillation.
All units leave the factory with a generic
tuning designed to handle most applications. If you encounter issues with valve stability, oscillation or speed, fine tuning these
parameters may resolve the problem.
FMA-2600A controllers allow you to adjust the Proportional, Integral and Differential
terms of the PID control loop.
To change the PID loop parameters, push the button below
PID
.
Press
LOOP TYPE.
Then use the LN-UP and LN-DN buttons to select the appropriate
PID control algorithm. Press SET.
See the following page for descriptions of the PID Loop Types (PID Control Algorithms).
P
refers to the Proportional term of the
PID loop.
I
refers to the Integral term of the PID loop.
D
refers to the Differential term of the PID
loop.
Press P, I or D. Then use SELECT to choose the decimal with the arrow and the UP and DOWN buttons to change the value. Press SET to record your value. Press CLEAR to return to zero.
Before changing the P, I or D parameter, please record the initial value so that it can be returned to the factory setting if necessary.
Valve tuning can be complex. If you would like assistance, please contact Omega for technical support.
20
The
PD
algorithm is the PID algorithm used on most FMA-2600A controllers.
It is divided into two segments: The first compares the process value to the set-point to generate a proportional error. The proportional error is multiplied by the ‘P’ gain, with the result added to the output drive register. The second operates on the present process value minus the process value during the immediately previous evaluation cycle. This ‘velocity’ term in multiplied by the ‘D’ gain, with the result subtracted from the output drive register. The above additions to and subtractions from the output drive register are carried over from process cycle to process cycle, thus performing the integration function automatically. Increasing the ‘P’ gain will
promote
the tendency of the system to overshoot, ring, or oscillate. Increasing the ‘D’ gain will
reduce
the tendency of the system to overshoot.
The
PD2I
algorithm is a PID algorithm used primarily for high performance pressure and flow control applications.
It exhibits two basic differences from the PD algorithm that most controllers utilize.
1. Instead of applying a damping function based upon the rate of change of the process value, it applies a damping function based upon the square of the rate of
change of the process value.
2. The damping function is applied directly to the proportional error term before that term is used in the proportional and integral functions of the algorithm. This provides a certain amount of ‘look ahead’ capability in the
control loop.
Because of these differences, you will note the following:
1. Increasing ‘P’ gain can be used to damp out overshoot and slow oscillations in pressure controllers. You will know that ‘P’ gain is too high, when the controller breaks into fast oscillations on step changes in set-point. On flow controllers, too high a ‘P’ gain results in slower response times. Too low a ‘P’ gain results in overshoot and/or slow oscillation. A good starting value for ‘P’
gain is 200.
2. If the unit was originally shipped with the PD2I algorithm selected, the ‘D’ gain value should be left at or near the factory setting because it relates primarily to the system phase lags. If you are changing from the default algorithm to the PD2I algorithm, you should start with a ‘D’ gain value of 20.
3. The ‘I’ gain is used to control the rate at which the process converges to the set-point, after the initial step change. Too low a value for ‘I’ gain shows up as a process value that jumps to near the set-point and then takes awhile to converge the rest of the way. Too high a value for ‘I’ gain results in oscillation. A good starting value for the ‘I’ gain is 200.
21
GAS SELECT
UP >Recent Standard Factory Custom Composer User Mixes Bioreactor Breathing Chromatography Fuel CANCEL UP DOWN DOWN > Fuel Laser O2 Concentrator Pure Corrosive Pure Non-Corrosive Refrigerant Stack Welding CANCEL PAGE SET PAGE SET
Gas Select
gas mixes.
allows you to set your
device to up to 150 standard gases and mixes. You can also use
composer
to
program and store up to 20 additional
Gas Select
is accessed by pressing the button below Menu display.
Press PAGE to view a new page in the gas category list.
GAS SELECT
on the Select
» » » » » To select a gas, use the UP and DOWN buttons to position the arrow in front of the desired gas category. » » Recent: Eight most recent selections Standard: Gases and mixes standard
on earlier Omega instruments (page 37)
»
Factory Custom: Present only if customer
requested gases were added at the factory » programmed by the user (page 23) » » » » » » Composer User Mixes: Gas mixes
Bioreactor (page 43) Breathing (page 44) Chromatography (page 46)
Fuel (page 45) Laser (page 45)
O2 Concentrator (page 46) Pure Corrosive* (page 40) Pure Non-Corrosive (page 39)
Refrigerant* (page 41)
Stack (page 46)
Welding (page 42) Press SELECT to view the gases in the selected category. Align the arrow with the desired gas. Press SET to record your selection and return to the MAIN display. The selected gas will be displayed on the screen.
*
Pure Corrosive and Refrigerant gases are only available on
FMA-2600A-LSS Series
instruments that are compatible with these gases.
Note:
Gas Select may not be available on units ordered with a custom gas or blend.
See pages 39 -46 for a full list of gases in each category.
22
COMPOSER
UP DOWN >Add Mix: 20 Free CANCEL SET UP DOWN Composer Mix name: MyGas ----- ˄ BACK/ CANCEL CHANGE CASE NEXT LETTER SET
Composer
allows you to program
and save up to 20 custom gas mixes containing 2 to 5 component gases found in the gas lists (pages 39-46). The minimum resolution is 0.01%.
Composer is accessed by selecting
Composer User Mixes
on the GAS
SELECT display.
Press SET when the arrow is aligned with Add Mix.
Name the mix by pressing the UP and DOWN buttons for letters, numerals and symbols.
CHANGE CASE
– Toggles the letter case. Letters remain in selected case until CHANGE CASE is pushed again.
Press SET to save the name.
After naming the mix, press
ADD GAS
and select the gas category and the
component gas.
Select the digit with arrow and adjust the % with the UP and DOWN buttons. Press set to save. Add up to 4 more gases as needed. The total must equal 100% or an error message will appear.
GAS OPTNS
been saved.
allows you to adjust the percentage of the constituents or delete a gas from the mix. Gas mixes cannot be adjusted after they have EDIT NAME ADD GAS Composer Mix: MyGAS GAS OPTNS 0.00% of Total BACK/ CANCEL CHANGE CASE SET
23
UP DOWN Percent of Air: 50.00
˄ SELECT DIGIT BACK/ CANCEL CLEAR SET UP DOWN SELECT DIGIT Percent of Ar Argon: 30.00
˄ BACK/ CANCEL CLEAR SET UP Percent of He Helium: 20.00
˄ SELECT DIGIT BACK/ CANCEL DOWN CLEAR SET EDIT NAME ADD GAS Composer Mix: MyGAS 50% Air 30% AR Argon 20% He Helium 100.00% Total GAS OPTNS CANCEL SAVE CREATE NEW CREATE SIMILAR COMPOSER USER MIX MyGas HAS BEEN SAVED MAIN SELECT MIXTURE Once the mix has been saved, you
may press
CREATE SIMILAR
to
compose an additional mix based on the mix you have just saved. This CREATE SIMILAR option is not available after leaving this screen.
Press
CREATE NEW
to add a completely new mix.
Press
SELECT MIXTURE
to bring the
custom mix onto the MAIN display.
24
COMMUNICATION SELECT
UNIT ID A BACK UNIT ID C UP C BACK RESET A SET DN DN BAUD 19200 UP BACK SET BAUD 19200 MAIN
Access
Communication Select
by pressing
the button above
RS232 COMM
or
RS485 COMM
on the
Select Menu
display.
Unit ID
Press
– Valid unit identifiers are the letters A-Z and @. The identifier allows you to assign a unique address to each device so that multiple units can be connected to a single RS232 or RS485
computer port.
UNIT ID
. Use the UP and DOWN buttons to change the Unit ID. Press SET to record the ID. Press Reset to return to the previously recorded Unit ID.
Any Unit ID change will take effect when Communication Select is exited
.
If the symbol @ is selected as the Unit ID, the device will enter streaming mode when Communication Select is exited.
See RS232 Communications (page 31) for information about the streaming mode.
Baud
Press
– Both this instrument and your computer must send/receive data at the same baud rate. The default baud rate for this device is 19200 baud.
BAUD
. Use the UP and DOWN buttons to select the baud rate that
matches your computer. The choices are
38400, 19200, 9600, or 2400 baud. Press SET to record the baud rate.
Any baud rate change will not take effect until power to the unit is cycled.
25
MISCELLANEOUS
Miscellaneous
is accessed by pressing the
MISC
button on the Select Menu display. Next select either This can be effective at “smoothing” high frequency process oscillations such as those caused by diaphragm pumps.
Press
ZERO BAND BACK UP CANCEL PRESS AVG LCD CONTRAST DOWN 0.0
CLEAR
PRESS AVG.
MISC1
FLOW AVG MAIN SET
or
SELECT
MISC2.
MISC1
will display as shown at left.
ZERO BAND
refers to Display Zero Deadband. Zero deadband is a value below which the display jumps to zero. This deadband is often desired to
prevent electrical noise from showing up on the
display as minor flows or pressures that do not exist. Display Zero Deadband does not affect the analog or digital signal outputs.
ZERO BAND
can be adjusted between 0 and 6.3% of the sensor’s Full Scale (FS).
Press
ZERO BAND.
Then use SELECT to choose
the digit with the arrow and the UP and DOWN buttons to change the value. Press SET to record your value. Press CLEAR to return to zero.
Pressure Averaging and Flow Averaging
the number between 1 and 256 can be
may
be useful to make it easier to read and interpret rapidly fluctuating pressures and flows. Pressure and flow averaging can be adjusted between 1 (no averaging) and 256 (maximum averaging).
These are geometric running averages where
considered roughly equivalent to the response time constant in milliseconds. Then use SELECT to choose the digit with the arrow and the UP and DOWN buttons to change the value. Press SET to record your value. Press CLEAR to return to zero.
UP CANCEL DOWN RESET 11 SET
Press
FLOW AVG
. Then use SELECT to choose the
digit with the arrow and the UP and DOWN buttons to change the value. Press SET to record your value. Press CLEAR to return to zero.
Setting a higher number will equal a smoother display.
LCD CONTRAST:
The display contrast can be adjusted between 0 and 31, with zero being the lightest and 31 being the darkest. Use the UP and DOWN buttons to adjust the contrast. Press SET when you are satisfied. Press CANCEL to return to the MISC display.
26
STP/ NTP BACK DIAG TEST ROTATE DISP MAIN
MISC2
will display as shown at left.
STP/NPT
refers to the functions that allow your selection of
standard
temperature and pressure conditions or
parameters. The
STP
normal
temperature
and pressure conditions. This feature is
generally useful for comparison purposes to
other devices or systems using different STP menu is comprised of the
STP TEMP
and
STP PRESS
screens.
STP TEMP
allows you to select from
0C, 0F, K
or
0R. The arrow position will automatically default to the currently stored value.
The
NTP
menu is comprised of the
NTP TEMP
and
NTP PRESS
screens.
Once a selection has been made and recorded
using the
SET
button, a change acknowledgement message will be displayed on screen. STP TEMP STP PRESS MAIN Selecting
MAIN
will revert screen to the
Main display. If the
SET
selection is already the currently stored value, a message indicating that fact will appear.
STP PRESS
enables you to select from a
menu pressure settings. Use the UP/DOWN or PAGE buttons to view the settings.
The arrow position will automatically default to the currently stored value. Once a selection has been made and recorded using the
SET
button, a change acknowledgement message will be displayed on screen.
Pressing
SET
again will revert screen to the Main display. If the
SET
selection is already the currently stored value, a message indicating that fact will appear. UP DOWN SELECT DIGIT Temperature: #C 25.0000
BACK/ CANCEL CLEAR SET
STP TEMP Display 27
UP DOWN SELECT DIGIT Pressure: PaA 101355.0
BACK/ CANCEL CLEAR SET
STP PRESS Display
SCROLL R8: AP Sig R9: Temp Sig R10: DP Side R11: DP Brdg R13: AP Brdg R16: Meter Fun R18: Power Up BACK 7871 39071 9986 36673 36673 199 32768 MAIN
DIAG TEST:
Select the
This diagnostic screen displays the current internal register values, which is useful for noting factory settings prior
to making any changes. It is also helpful
for troubleshooting with Omega customer
service personnel.
DIAG TEST
button from the
MISC2
screen to view a list of select register values. Pressing the
SCROLL
button will cycle the display through the register screens. An example screen is shown at left.
Press
ROTATE DISP
and SET to
Inverted 180
° if your device is inverted. The display and buttons will rotate together.
DEVICE UNITS
UP DOWN Mass Flow Volumetric Flow Pressure Temperature Mass Totalizer Totalizer Time DONE SELECT
Press
DEVICE UNITS
to access menus of
units of measure for each parameter (and totalizer if so equipped).
Scroll to the desired unit and press select.
Once selected, you will see the message shown below. Verify that all connected devices expect the change.
See pages 47 and 48 for a full list of
available units.
UP SCCM Scm3/h Sm3/h Sm3/d Sin3/m SCFH NmL/s CANCEL DOWN PAGE SET PRESSING SET WILL AFFECT DISPLAY AND SERIAL VALUES VERIFY CONNECTED SERIAL DEVICES EXPECT THE CHANGE CANCEL SET
28
MANUFACTURER DATA
MODEL INFO O M E G A Ph 800-826-6342 Fax 203-359-7700 BACK MAIN1
Manufacturer Data
is accessed by pressing
the
MFG DATA
button on the Select Menu display. The initial display shows the name and
telephone number of the manufacturer.
Press
MODEL INFO
to show important
information about your flow meter including the model number, serial number, and date of manufacture. Press BACK to return to the MFG DATA display.
Push MAIN to return to the Main display.
MODEL: FMA-2600A-10SLPM-D SERIAL NO: 80003 DATE MFG: 10/7/2012 DATE CAL: 10/9/2012 CAL BY: DL SW REV: 2V62 BACK MAIN
29
FMA-2600A-P Controller Operating Notes
The FMA-2600A-P mass flow controller is equipped with an integrated Swagelok® positive shutoff valve. The normally closed valve is air actuated and will remain closed until it is connected to an air source supplying between 60 and 120 psig of air pressure.
Once the appropriate amount of air pressure is supplied to the shutoff valve, it will open, allowing flow through the mass controller. Air pressure must be removed from the shutoff valve in order for the valve to close.
A common method for actuating the shutoff valve incorporates a three-way solenoid valve (below).
Air pressure is applied to one side of the solenoid valve while the other side of the solenoid is left open to atmosphere.
When the solenoid is energized, air pressure is delivered to the shutoff valve,
allowing it to open.
When the solenoid is returned to a relaxed state, air pressure is removed from the shutoff valve, allowing it to close. The air pressure is vented to atmosphere.
Note:
All standard FMA-2600A device features and functions are available on the FMA-2600A-P controllers and operate in accordance with the standard FMA-2600A operating instructions.
Three-way Solenoid Valve Air Supply Vent FMA-2600A-P Controller FMA-2600A-P controller and three-way solenoid valve.
30
RS232 / RS485 Output and Input Configuring HyperTerminal®:
1. Open your HyperTerminal® RS232 / RS485 terminal program (installed under the “Accessories” menu on all Microsoft Windows® operating systems).
2. 3.
Select “Properties” from the file menu.
Click on the “Configure” button under the “Connect To” tab. Be sure the program is set for: 19,200 baud (or matches the baud rate selected in the RS232 / RS485 communications menu on the meter) and an 8-N-1-None (8 Data Bits, No Parity, 1 Stop Bit, and no Flow Control) protocol.
4.
Under the “Settings” tab, make sure the Terminal Emulation is set to ANSI
or Auto Detect.
5. Click on the “ASCII Setup” button and be sure the “Send Line Ends with Line Feeds” box is not checked and the “Echo Typed Characters Locally” box and the “Append Line Feeds to Incoming Lines” boxes are checked. Those settings not mentioned here are normally okay in the default position.
6.
Save the settings, close HyperTerminal® and reopen it.
Streaming Mode (RS485 units do not have a streaming mode)
In the
default
assignments.
Polling Mode, the screen should be blank except the blinking cursor. In order to get the data streaming to the screen, hit the “Enter” key several times to clear any extraneous information. Type “*@=@” followed by “Enter” (or using the RS232 / RS485 communication select menu, select @ as identifier and exit the screen). If data still does not appear, check all the connections and COM port
Streaming Mode – Advanced
The streaming data rate is controlled by register 91. The recommended default rate of data provision is once every 50 milliseconds and this is suitable for most purposes. If a slower or faster streaming data rate is desired, register 91 can be changed to a value from 1 millisecond to 65535 milliseconds, or slightly over once every minute. Below approximately 40 milliseconds, data provision will be dependent upon how many parameters are selected. Fewer data parameters can be streamed more quickly than more. It is left to the user to balance streaming speed with number of parameters streamed.
To
read
register 91, type “*r91” followed by “Enter”.
To To
modify return
register 91, type “*w91=X”, where X is a positive integer from 1 to 65535, followed by “Enter”. to the recommended factory default streaming speed, type “*w91= 50”.
Changing From Streaming to Polling Mode:
When the meter is in the Streaming Mode (
RS485 units do not have a streaming mode
), the screen is updated approximately 10-60 times per second (depending on the amount of data on each line) so that the user sees the data essentially in real time. It is sometimes desirable, and necessary when using more than one unit on a single RS232 line, to be able to poll the unit.
In Polling Mode the unit measures the flow normally, but only sends a line of data 31
when it is “polled”. Each unit can be given its own unique identifier or address. Unless otherwise specified each unit is shipped with a default address of capital A. Other valid addresses are B thru Z.
Once you have established communication with the unit and have a stream of information filling your screen: 1. Type *@=A followed by “Enter” (or using the RS232 / RS485 communication select menu, select A as identifier and exit the screen) to stop the streaming mode of information. Note that the flow of information will not stop while you are typing and you will not be able to read what you have typed. Also, the unit does not accept a backspace or delete in the line so it must be typed correctly. If in doubt, simply hit enter and start again. If the unit does not get exactly what it is expecting, it will ignore it. If the line has been typed correctly, the data will stop.
2.
You may now poll the unit by typing A followed by “Enter”. This does an instantaneous poll of unit A and returns the values once. You may type A “Enter” as many times as you like. Alternately you could resume streaming mode by typing *@=@ followed by “Enter”. Repeat step 1 to remove the unit from the streaming mode.
3.
To assign the unit a new address, type *@=New Address, e.g. *@=B. Care should be taken not to assign an address to a unit if more than one unit is on the RS232 / RS485 line as all of the addresses will be reassigned. Instead, each should be individually attached to the RS232 / RS485 line, given an address, and taken off. After each unit has been given a unique address, they can all be put back on the same line and polled individually.
Sending a Set-point via RS232 / RS485:
“Serial” must be selected under the “Input” list in the control set up mode.
Method 1:
Set-point may be set in floating point in serial communication using serial command (UnitID)SX.YZ To send a set-point via RS232 / RS485, Example: AS4.54 results in Unit ID A changing set-point to 4.54.
Method 2:
Type in a number between 0 and 65535 (2% over range), where 64000 denotes full-scale flow rate, and hit “Enter”. The set-point column and flow rates should change accordingly. If they do not, try hitting “Enter” a couple of times and repeating your command. The formula for performing a linear interpolation is as follows: Value = (Desired Set-point X 64000) / Full Scale Flow Range For example, if your device is a 100 slpm full-scale unit and you wish to apply a set-point of 35 slpm you would enter the following value: 22400 = (35 slpm X 64000) / 100 slpm If the controller is in polling mode as described in
Changing from Streaming Mode to Polling Mode
, the set-point must be preceded by the address of the controller. For example, if your controller has been given an address of D, the set-point above would be sent by typing: D22400 followed by “Enter”
32
To adjust the Proportional and Differential (P&D) terms via RS232 / RS485:
Type *@=A followed by “Enter” to stop the streaming mode of information.
To adjust the “P” or proportional term of the PID controller, type *R21 followed by “Enter”.
The computer will respond by reading the current value for register 21 between 0-65535. It is good practice to write this value down so you can return to the factory settings if necessary. Enter the value you wish to try by writing the new value to register 21. For example, if you wished to try a “P” term of 220, you would type *W21=
220
followed by “Enter” where the bold number denotes the
new value.
The computer will respond to the new value by confirming that 21=220. To see the effect of the change you may now poll the unit by typing A followed by “Enter”. This does an instantaneous poll and returns the values once. You may type A “Enter” as many times as you like. Alternately you could resume streaming mode by typing *@=@ followed by “Enter”. Repeat step 3 to remove the unit from the streaming mode.
To adjust the “D” or proportional term of the PID controller, type *R22 followed by “Enter”.
The computer will respond by reading the current value for register 22 between 0-65535. It is good practice to write this value down so you can return to the factory settings if necessary. Enter the value you wish to try by writing the new value to register 22. For example, if you wished to try a “D” term of 25, you would type *W22=
25
followed by “Enter” where the bold number denotes the
new value.
The computer will respond to the new value by confirming that 22=25. To see the effect of the change you may now poll the unit by typing A followed by “Enter”. This does an instantaneous poll and returns the values once. You may type A “Enter” as many times as you like. Alternately you could resume streaming mode by typing *@=@ followed by “Enter”. Repeat.
You may test your settings for a step change by changing the set-point. To do this type A32000 (A is the default single unit address, if you have multiple addressed units on your RS232 / RS485 line the letter preceding the value would change accordingly.) followed by “Enter” to give the unit a ½ full scale set-point. Monitor the unit’s response to the step change to ensure it is satisfactory for your needs. Recall that the “P” term controls how quickly the unit goes from one set-point to the next, and the “D” term controls how quickly the signal begins to “decelerate”
as it approaches the new set-point (controls the overshoot).
33
Gas Select
– The selected gas can be changed via RS232 / RS485 input. To change the selected gas, enter the following commands: In Polling Mode: Address$$#
# 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 GAS Air Argon Methane Carbon Monoxide Carbon Dioxide Ethane Hydrogen Helium Nitrogen Nitrous Oxide Neon Oxygen Propane normal-Butane Acetylene Ethylene iso-Butane Krypton Xenon Sulfur Hexafluoride 75% Argon / 25% CO2 90% Argon / 10% CO2 92% Argon / 8% CO2 98% Argon / 2% CO2 75% CO2 / 25% Argon 75% Argon / 25% Helium 75% Helium / 25% Argon 90% Helium / 7.5% Argon / 2.5% CO2
(Praxair - Helistar® A1025)
90% Argon / 8% CO2 / 2% Oxygen
(Praxair - Stargon® CS)
95% Argon / 5% Methane
For example, to select Propane, enter: $$12
Air Ar CH4 CO CO2 C2H6 H2 He N2 N2O Ne O2 C3H8 n-C4H10 C2H2 C2H4 i-C2H10 Kr Xe SF6 C-25 C-10 C-8 C-2 C-75 A-75 A-25 A1025 Star29 P-5
34
Creating and Deleting Gas Mixtures with Composer using RS232 or RS485 No te:
All c
ommands must be prefixed with the unit ID letter. The unit should not be in streaming mode
.
You may create and store up to 20 gas mixtures containing up to five constituent gases each. The constituent gases must be chosen from the existing list of gases installed on the device (which may vary model to model). Please see pages 39 – 46 for lists of gases and their corresponding gas numbers.
Create a Gas Mixture
To create a gas mixture, enter a single-line command according to the following formula: [Unit ID] GM [Gas Name] [Gas Mix Number] [Percent 1] [Gas Number 1] [Percent 2] [Gas Number 2] …etc. etc.
Notes:
Do not type the brackets.
There should be only
one space between
all items. Any percentages less than 1, should have a leading zero before the decimal (i.e. 0.25 for .25%). Trailing zeros are not necessary but they are allowed to help visualize the percentages on screen (as in the example). The sum of all percentages must be 100.00 otherwise an error will occur.
Here is an example of a three gas mixture for a new gas called “MyMix1” (50% O2, 49.5% Helium, and .5% Neon), stored in user location #236, where the unit ID of the device is “A”:
A GM MyMix1 236 50.00 11 49.50 7 0.50 10
: Name your mixture using a maximum of 6 characters.
Gas Mix Number
: Composer user mixes have Omega gas numbers between 236 and 255. You can assign any number in this range to your new mixture. If another mixture with the same number exists, it will be overwritten, even if that gas is currently selected on the unit. If you enter a 0 here, the new mix will be assigned the next available number between 236 and 255.
Percent 1
: The percentage of the first constituent gas. The percentage of each constituent must be between 0.01 and 99.99. Values entered beyond two decimal points will be rounded to the nearest 0.01%.
Gas Number 1
: The Omega gas number of the first constituent gas.
Percent 2
: The percentage of the second constituent gas. Values entered beyond two decimal points will be rounded to the nearest 0.01%.
Gas Number 2
: The Omega gas number of the second constituent gas.
Additional Gases
: (Optional) The above pattern of [Percent] + [Gas Number] may be repeated for additional constituent gases (up to a total of five).
Upon success, the unit ID (if set) is returned followed by a space. The number of the gas mixture is then returned, followed by the percentages and names of each constituent in the mix. If the gas mix is not successfully created, a "
?
" is returned, and you must start over.
Delete a Gas Mixture
To delete a gas mixture, enter: [Unit ID]
GD [Gas Number]:
The number of the Composer user mixture you wish to delete from the unit Only Composer user mixtures can be deleted with this command.
On success, the unit ID (if set) is returned followed by a space and the number of the gas deleted. If the gas is not successfully deleted, a "
?"
is returned.
35
Collecting Data:
The RS232/RS485 output updates to the screen many times per second. Very short term events can be captured simply by disconnecting (there are two telephone symbol icons at the top of the HyperTerminal® screen for disconnecting and connecting) immediately after the event in question. The scroll bar can be driven up to the event and all of the data associated with the event can be selected, copied, and pasted into Microsoft® Excel® or other spreadsheet program as described below.
For longer term data, it is useful to capture the data in a text file. With the desired data streaming to the screen, select “Capture Text” from the Transfer Menu. Type in the path and file name you wish to use. Push the start button. When the data collection period is complete, simply select “Capture Text” from the Transfer Menu and select “Stop” from the sub-menu that appears.
Data that is selected and copied, either directly from HyperTerminal® or from a text file can be pasted directly into Excel®. When the data is pasted it will all be in the selected column. Select “Text to Columns...” under the Data menu in Excel® and a Text to Columns Wizard (dialog box) will appear. Make sure that “Fixed Width” is selected under Original Data Type in the first dialog box and click “Next”. In the second dialog box, set the column widths as desired, but the default is usually acceptable. Click on “Next” again. In the third dialog box, make sure the column data format is set to “General”, and click “Finish”. This separates the data into columns for manipulation and removes symbols such as the plus signs from the numbers. Once the data is in this format, it can be graphed or manipulated as desired.
For extended term data capture see page 37.
Data Format:
The data stream on the screen represents the flow parameters of the main mode in the units shown on the display. For mass flow controllers, there are six columns of data representing pressure, temperature, volumetric flow, mass flow, set-point, and the selected gas The first column is absolute pressure (normally in psia), the second column is temperature (normally in °C), the third column is volumetric flow rate (in the units specified at time of order and shown on the display), the fourth column is mass flow (also in the units specified at time of order and shown on the display), the fifth column is the currently selected set-point value, the sixth column designates the currently selected gas. For instance, if the controller was ordered in units of scfm, the display on the controller would read 2.004 scfm and the last two columns of the output below would represent volumetric flow and mass flow in cfm and scfm respectively.
+014.70
+014.70
+014.70
+014.70
+025.00
+025.00
+025.00
+025.00
+02.004
+02.004
+02.004
+02.004
+02.004
+02.004
+02.004
+02.004
2.004
2.004
2.004
2.004
Air Air Air Air Pressure Temp
Vol. Flow
Mass Flow Set Point FMA-2600A Mass Flow Controller Data Format Gas
Note:
On units with the totalizer function, the sixth column will be the totalizer value, with gas select moving to a seventh column.
36
Sending a Simple Script File to HyperTerminal®
It is sometimes desirable to capture data for an extended period of time. Standard streaming mode information is useful for short term events, however, when capturing data for an extended period of time, the amount of data and thus the file size can become too large very quickly. Without any special programming skills, the user can use HyperTerminal® and a text editing program such as Microsoft® Word® to capture text at user defined intervals.
1. Open your text editing program, MS Word for example.
2. Set the cap lock on so that you are typing in capital letters.
3. Beginning at the top of the page, type A
For example: A
A A A A A
will get a total of six lines of data from the flow meter, but you can
enter as many as you like.
The time between each line will be set in HyperTerminal.
4. When you have as many lines as you wish, go to the File menu and select save. In the save dialog box, enter a path and file name as desired and in the “Save as Type” box, select the plain text (.txt) option. It is important that it be saved as a generic text file for HyperTerminal to work with it.
5. Click Save.
6. A file conversion box will appear. In the “End Lines With” drop down box, select CR Only. Everything else can be left as default.
7. Click O.K.
8. You have now created a “script” file to send to HyperTerminal. Close the file and exit the text editing program.
9. Open HyperTerminal and establish communication with your flow device as outlined in the manual.
10. Set the flow device to Polling Mode as described in the manual. Each time you type A
11. Go to the File menu in HyperTerminal and select “Properties”.
12. Select the “Settings” tab.
13. Click on the “ASCII Setup” button.
14. The “Line Delay” box is defaulted to 0 milliseconds. This is where you will tell the program how often to read a line from the script file you’ve created. 1000 milliseconds is one second, so if you want a line of data every 30 seconds, you
37
would enter 30000 into the box. If you want a line every 5 minutes, you would enter 300000 into the box.
15. When you have entered the value you want, click on OK and OK in the Properties dialog box.
16. Go the Transfer menu and select “Send
Text
File…” (NOT Send File…).
17. Browse and select the text “script” file you created.
18. Click Open.
19. The program will begin “executing” your script file, reading one line at a time with the line delay you specified and the flow device will respond by sending one line of data for each poll it receives, when it receives it.
You can also capture the data to another file as described in the manual under “Collecting Data”. You will be simultaneously sending it a script file and capturing the output to a separate file for analysis.
Operating Principle
All FMA-1600A Gas Flow Meters and FMA-2600A Gas Flow Controllers are based on the accurate measurement of volumetric flow. The volumetric flow rate is determined by creating a pressure drop across a unique internal restriction, known as a Laminar Flow Element (LFE), and measuring differential pressure across it. The restriction is designed so that the gas molecules are forced to move in parallel paths along the entire length of the passage; hence laminar (streamline) flow is established for the entire range of operation of the device. Unlike other flow measuring devices, in laminar flow meters the relationship between pressure drop and flow is linear.
STANDARD GAS DATA TABLES:
Those of you who have older FMA-2600A products may notice small discrepancies between the gas property tables of your old and new units. Omega has incorporated the latest data sets from NIST (including their REFPROP 9 data where available) in our products’ built-in gas property models. Be aware that the calibrators that you may be using may be checking against older data sets such as the widely distributed Air Liquide data. This may generate apparent calibration discrepancies of up to 0.6% of reading on well behaved gases and as much as 3% of reading on some gases such as propane and butane, unless the standard was directly calibrated on the gas in question. As the older standards are phased out, this difference in readings will cease to be a problem. If you see a difference between the Omega meter and your in house standard, in addition to calling Omega at, call the manufacturer of your standard for clarification as to which data set they used in their calibration. This comparison will in all likelihood resolve the problem.
38
39
40
41
42
43
44
45
46
Supported Units: This device supports many different units. You may select the desired units (see page 28). Note that only units appropriate to this device are available for selection.
Pressure Units Absolute
PaA hPaA kPaA MPaA mbarA barA g/cm2A kg/cmA PSIA PSFA mTorrA torrA mmHgA inHgA mmH2OA mmH2OA cmH2OA cmH2OA inH2OA inH2OA atm m asl ft asl V count %
Gauge
PaG hPaG kPaG MPaG mbarG barG g/cm2G kg/cmG PSIG PSFG mTorrG torrG
Differential
PaD hPaD kPaD MPaD mbarD barD g/cm2D kg/cmD PSID PSFD mTorrD torrD
Notes
pascal hectopascal kilopascal megapascal millibar bar gram force per square centimeter kilogram force per square centimeter pound force per square inch pound force per square foot millitorr torr mmHgG inHgG mmH2OG mmH2OG cmH2OG cmH2OG inH2OG inH2OG count % mmHgD inHgD mmH2OD mmH2OD cmH2OD cmH2OD inH2OD inH2OD millimeter of mercury at 0 C inch of mercury at 0 C millimeter of water at 4 C (NIST conventional) millimeter of water at 60 C centimeter of water at 4 C (NIST conventional) centimeter of water at 60 C inch of water at 4 C (NIST conventional) inch of water at 60 C atmosphere meter above sea level (only in /ALT builds) foot above sea level (only in /ALT builds) volt; no conversions are performed to or from other units count % setpoint count, 0 – 64000 percent of full scale
Volumetric
uL/m mL/s mL/m mL/h L/s LPM L/h US GPM US GPH CCS CCM cm3/h m3/m m3/h m3/d in3/m CFM CFH count %
Standard
SuL/m SmL/s SmL/m Sml/h SL/s SLPM SL/h SCCS SCCM Scm3/h Sm3/m Sm3/h Sm3/d Sin3/m SCFM SCFH kSCFM count %
Flow Units Normal
NuL/m NmL/s NmL/m NmL/h NL/s NLPM NL/h NCCS NCCM Ncm3/h Nm3/m Nm3/h Nm3/d count %
Notes
microliter per minute milliliter per second milliliter per minute milliliter per hour liter per second liter per minute liter per hour US gallon per minute US gallon per hour cubic centimeter per second cubic centimeter per minute cubic centimeter per hour cubic meter per minute cubic meter per hour cubic meter per day cubic inch per minute cubic foot per minute cubic foot per hour 1000 cubic feet per minute setpoint count, 0 – 64000 percent of full scale
47
True Mass Flow Units Label
mg/s mg/m g/s g/m
Notes
milligram per second milligram per minute gram per second gram per minute g/h kg/m kg/h oz/s gram per hour kilogram per minute kilogram per hour ounce per second oz/m lb/m ounce per minute pound per minute lb/h pound per hour These can be used for mass flow on gas devices. These can also be used for volumetric flow on liquid devices calibrated in one of these units (liquid density is not yet supported).
Volumetric
uL mL L US GAL cm3 m3 in3 ft3 uP
Totalizer Units Standard
SuL SmL SL
Normal
NuL NmL NL
Notes
microliter milliliter liter Scm3 Sm3 Sin3 Ncm3 Nm3 US gallon cubic centimeter cubic meter cubic inch Sft3 kSft3 cubic foot 1000 cubic feet micropoise, a measure of viscosity; no conversions are performed to or from other units
Total Mass Units Label
mg g kg oz
Notes
milligram gram kilogram ounce lb pound These can be used for totalized mass on gas devices. These can also be used for totalized volume on liquid devices calibrated in one of these units (liquid density is not yet supported).
Label
°C °F K °R
Label
h:m:s ms s m hour day
Label
count %
Temperature Units Notes
degree Celsius degree Farenheit Kelvin degree Rankine
Time Units Notes
Displayed value is hours:minutes:seconds millisecond second minute hour day
Valve Drive Units Notes
+/- 65536 at full drive Percent of full scale drive
48
TROUBLESHOOTING
Display does not come on or is weak.
Check power and ground connections. Please reference the technical specifications (pages 56 - 71) to assure you have the proper power for your model.
Flow reading is approximately fixed either near zero or near full scale regardless of actual line flow.
Differential pressure sensor may be damaged. A common cause of this problem is instantaneous application of high-pressure gas as from a snap acting solenoid
valve upstream of the meter. If you suspect that your pressure sensor is
damaged please discontinue use of the controller and contact Omega.
Displayed mass flow, volumetric flow, pressure or temperature is flashing and message MOV, VOV, POV or TOV is displayed:
Our flow meters and controllers display an error message (MOV = mass overrange, VOV = volumetric overrange, POV = pressure overrange, TOV = temperature overrange) when a measured parameter exceeds the range of the sensors in the device. When any item flashes on the display, neither the flashing parameter nor the mass flow measurement is accurate. Reducing the value of the flashing parameter to within specified limits will return the unit to normal operation and accuracy. If the unit does not return to normal contact Omega.
After installation, there is no flow.
FMA-2600A controllers incorporate normally closed valves and require a set-point to operate. Check that your set-point signal is present and supplied to the correct pin and that the correct set-point source is selected under the SETPT SOURCE list in the control set up display. Also check that the unit is properly grounded.
The flow lags below the set-point.
Be sure there is enough pressure available to make the desired flow rate. If either the set-point signal line and/or the output signal line is relatively long, it may be necessary to provide heavier wires (especially ground wiring) to negate voltage drops due to line wire length. An inappropriate PID tuning can also cause this symptom if the D term is too large relative to the P term. See pages 18 and 19 for more information on PID tuning.
Controller is slow to react to a set-point change or imparts an oscillation to the flow.
An inappropriate PID tuning can cause these symptoms. Use at conditions considerably different than those at which the device was originally set up can necessitate a re-tuning of the PID loop. See pages 20 and 21 for more information on PID tuning.
The output signal is lower than the reading at the display.
This can occur if the output signal is measured some distance from the meter, as voltage drops in the wires increase with distance. Using heavier gauge wires, especially in the ground wire, can reduce this effect.
49
Meter does not agree with another meter I have in line.
Volumetric meters are affected by pressure drops. Volumetric flow meters should not be compared to mass flow meters. Mass flow meters can be compared against one another provided there are no leaks between the two meters and they are set to the same standard temperature and pressure. Both meters must also be calibrated (or set) for the gas being measured. FMA-1600A mass flow meters are normally set to Standard Temperature and Pressure conditions of 25° C and 14.696 psia. Note: it is possible to special order meters with a customer specified set of standard conditions. The calibration sheet provided with each meter lists its standard conditions.
When performing this comparison it is best to use the smallest transition possible between the two devices. Using small transitions will minimize lag and dead volume.
RS232 / RS485 Serial Communications is not responding.
Check that your meter is powered and connected properly. Be sure that the port on the computer to which the meter is connected is active. Confirm that the port settings are correct per the RS232 instructions in this manual (Check the RS232 / RS485 communications select screen for current meter readings). Close Hyperterminal® and reopen it. Reboot your PC. See pages 10, 11 and 30 for more information on RS232 / RS485 signals and communications.
Slower response than specified.
FMA-2600A Controllers feature a programmable Geometric Running Average
(GRA). Depending on the full scale range of the meter, it may have the GRA set to enhance the stability/readability of the display, which would result in slower perceived response time. Please see “Pressure Averaging” and “Flow Averaging” on page 26.
Jumps to zero at low flow.
FMA-2600A Controllers feature a programmable zero deadband. The factory setting is usually 0.5% of full scale. This can be adjusted between NONE and 6.3% of full scale. See page 26.
Discrepancies between old and new units.
Please see “Standard Gas Data Tables” explanation on page 38.
50
Maintenance and Recalibration General:
FMA-2600A Flow Controllers require minimal maintenance. They have no moving parts. The single most important thing that affects the life and accuracy of these devices is the quality of the gas being measured. The controller is designed to measure CLEAN, DRY, NON-CORROSIVE gases. Moisture, oil and other contaminants can affect the laminar flow elements. We recommend the use of in-line sintered filters to prevent large particulates from entering the measurement head of the instrument. Suggested maximum particulate sizes are as follows: 5 microns for units with FS flow ranges of 0-1 sccm or less.
20 microns for units with FS flow ranges between 0-2 sccm and 0-1 slpm.
50 microns for units with FS flow ranges of 0-1 slpm or more.
Recalibration:
(page 29).
The recommended period for recalibration is once every year. A label located on the back of the controller lists the most recent calibration date. The controller should be returned to the factory for recalibration within one year from the listed date. Before calling to schedule a recalibration, please note the serial number on the back of the instrument. The Serial Number, Model Number, and Date of Manufacture are also available on the Model Info display
Cleaning:
FMA-2600A Flow Controllers require no periodic cleaning. If necessary, the outside of the controller can be cleaned with a soft dry cloth. Avoid excess moisture or solvents.
For repair, recalibration or recycling of this product contact Omega.
51
Option: Totalizing Mode - Controllers
Controllers can be purchased with the Totalizing Mode option. This option adds an additional mode screen that displays the total flow (normally in the units of the main flow screen) that has passed through the device since the last time the totalizer was cleared. The Totalizing Mode screen is accessed by pushing the
TOTAL/TIMER
button on the
MAIN
display.
TOTAL/TIMER:
Pushing the TOTAL/TIMER button will cycle the large numbers on the display between total mass and time elapsed.
TOTAL/ TIMER SETPT +123.4
SCCM +123.4
BATCH RESET Scm3 +123.45
50:56 h:m:s MENU/ MAIN
Rollover
– The customer can also specify at the time of order what the totalizer is to do when the maximum count is reached. The following options may be specified: No Rollover – When the counter reaches the maximum count it stops counting until the counter is cleared.
Rollover – When the counter reaches the maximum count it automatically rolls over to zero and continues counting until the counter is cleared.
Rollover with Notification – When the counter reaches the maximum count it automatically rolls over to zero, displays an overflow error, and continues counting until the counter is cleared.
TOTAL MASS:
The counter can have as many as seven digits. At the time of order, the customer must specify the range. This directly affects the maximum count. For instance, if a range of 1/100ths of a liter is specified on a meter which is totalizing in liters, the maximum count would be 99999.99 liters. If the same unit were specified with a 1 liter range, the maximum count would be 9999999 liters.
ELAPSED TIME: RESET TOTAL/TIMER
The small numbers below the mass total show the elapsed time since the last reset in hours, minutes and seconds. The maximum measurable elapsed time is 9999 hours 59 minutes 59 seconds. The hours count resets when is pushed, an RS232 or RS485 clear is executed or on loss of power. Press to show this as the primary display.
SETPT:
Pushing SETPT will allow you to change the controller's set-point.
RESET
– The counter can be reset to zero at any time by pushing the RESET button. To clear the counter via RS232 or RS485, establish serial communication with the meter or controller as described in the RS232 or RS485 section of the manual. To reset the counter, enter the following commands: In Polling (addressable) Mode: Address$$T
When using a mass flow controller as an absolute pressure controller
, the mass flow rate may momentarily exceed the flow measurement capability (full scale + 28%) of the unit. This may occur when the unit is asked to make an abrupt pressure change.
If the totalizer is in use at that time
, the totalized value will necessarily become incorrect. Please reset the totalizer if such an ‘over-flow’ condition has occurred. 52
BATCH PROCESSING MODE – CONTROLLERS ONLY
Batch mode is a function within the optional Totalizing mode. Batch mode is designed to provide repeatable, finite flow quantities. UP DOWN SELECT DIGIT Batch Size: Scm3 00123.45
˄
To activate Batch Mode:
Press
BATCH
. Then use
SELECT DIGIT
Press
CLEAR
to move the arrow to the desired digit, and the UP and DOWN buttons to change the value. to return to zero. Press
SET
flow will start immediately. If not, press to record your value. If the controller has a non-zero Set-Point,
SETPT
to select a Set-Point.
BACK / CANCEL CLEAR SET Batch values can also be established via RS232/RS485 communication using Register 92. (See RS232/RS485 Section of this manual for serial communication methods.) until updated by the user.
Note:
While the Totalizer counter will still reset across power cycles, the Batch process value is stored in EEPROM and will remain valid While the Batch is processing, the remaining amount of the Batch value is displayed above
REMAIN
on the Totalizer screen. Time elapsed during the Batch processing is displayed below the totalizing counter. Press
TOTAL/TIMER
to toggle these values.
When the active Totalizer reaches the preset Batch value, flow ceases, and
REMAIN
updates to
Done Batch
. The Totalizer timer also pauses. TOTAL/ TIMER +100 REMAIN SETPT 123.4
RESET SCCM +123.4
Scm3 00123.45
4:14 h:m:s MENU
- To start a new batch of the same size,
fixed Batches in this manner.
simply press
RESET. The Totalizer can reproduce any number of
- To start a smaller batch,
decrease the Batch value.
The new batch begins when you press RESET.
- To continue the existing batch to a larger total volume,
increase the Batch value. Flow resumes as
soon as you press OK in the Batch Value screen.
you press
SET - To start a larger batch from scratch,
in the Set-Point screen.
first clear the flow Set-Point to zero to prevent unwanted flow. Then increase the Batch value, and select a flow Set-Point. Flow will begin when
- To cancel a batch in progress,
clear the Set-Point and press
SET
.
Note:
Batch mode operates independently of the desired flow rate, but requires a non-zero flow rate to run. The rate of flow is determined by the controller Set-Point value, which is established by the user via analog, front panel or serial communication methods. Batches can be produced more slowly or more rapidly as determined by the user-selected Set-Point flow rate.
To turn off Batch Mode:
Set the Batch value to zero (0.0) via the front panel or RS232/RS485 communication using Register 92. If there is a non-zero flow Set Point, flow will immediately resume, and the Totalizer counter will continue per the user established Set-Point flow rate.
53
Accessory: FMA1600-MDB Multi-Drop Box
The
FMA1600-MDB Multi-Drop Box
RS232 or RS485 port.
makes it convenient
to wire multiple flow and/or pressure devices to a single
Now available with a USB interface!
The Multi-Drop Box has nine 8 pin mini-DIN ports available. The ports are to be used with a standard double ended 8 pin mini-DIN style cable going from the box to each flow or pressure device. A single DB9 D-SUB type connector (COM PORT) connects, using the included cable, to the serial connector on a PC or laptop. All of the flow and/or pressure devices are powered via a terminal block on the front of the box. If more than nine devices will be required, additional Multi-Drop Boxes can be daisy chained together with a double ended 8 pin mini-DIN cable plugged into any receptacle on both boxes.
Multi-Drop Box Power Supply for Large Valve Controllers:
for running multiple large controllers on a Multi-Drop Box. The PS24VHC (Power Supply 24Vdc High Current) is a 6.5Amp 24Vdc power supply designed The 6.5Amp power supply can run as many as 8 large valve controllers, which makes it ideal for the Multi-Drop Box and multiple large valve (or small valve / large valve combination) controllers on a Multi-Drop Box.
BB-9 Multi-Drop Box
6.75
7.56
54 Ø .175 Thru 2 PL
Accessories Part Number
FMA1600-C1 FMA1600-C2 FMA1600-C3 FMA1600-PSU FMA1600-CRA FMA1600-C1-25FT FMA1600-C2-25FT FMA1600-MDB
Description
8 Pin Male Mini-DIN connector cable, single ended, 6 foot length 8 Pin Male Mini-DIN connector cable, double ended, 6 foot length 8 Pin Male Mini-DIN to DB9 Female Adapter, 6 foot length Universal 100-240 VAC to 24 Volt DC Power Supply Adapter 8 Pin Male Right Angle Mini-Din Cable, single ended, 6 foot length 8 Pin Male Mini-DIN connector cable, single ended, 25 foot length 8 Pin Male Mini-DIN connector cable, double ended, 25 foot length Multi-Drop Box 55
Technical Data for FMA-2600A Mass Flow Controllers 0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full Scale Standard Operating Specifications (Contact Omega for available options) Performance
Accuracy at calibration conditions after tare High Accuracy at calibration conditions after tare Repeatability Zero Shift and Span Shift Operating Range / Turndown Ratio Maximum Controllable Flow Rate Typical Response Time Warm-up Time
FMA-2600A Mass Flow Controller
± (0.8% of Reading + 0.2% of Full Scale) ± (0.4% of Reading + 0.2% of Full Scale) High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
± 0.2% Full Scale 0.02% Full Scale / ºCelsius / Atm 0.5% to 100% Full Scale / 200:1 Turndown 102.4% Full Scale 100 ms (Adjustable) < 1 Second
Operating Conditions
Mass Reference Conditions (STP) Operating Temperature Humidity Range (Non–Condensing) Maximum Pressure Mounting Attitude Sensitivity Valve Type Ingress Protection Wetted Materials
FMA-2600A Mass Flow Controller
25ºC & 14.696 psia (standard — others available on request) −10 to +50 ºCelsius 0 to 100% 145 psig
Small Valve:
None
Large Valve:
Mount with valve cylinder vertical & upright Normally Closed IP40
Small Valve:
303 & 302 Stainless Steel, FKM, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR
Large Valve:
303 & 302 Stainless Steel, FKM, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, 416 Stainless Steel, Silicon, Glass. If your application demands a different material, please contact Omega.
Communications / Power
Monochrome LCD Display with integrated touchpad Digital Input/Output Signal 1 Options Analog Input/Output Signal 2 Options Optional Secondary Analog Input/Output Signal 2 Electrical Connection Options Supply Voltage Supply Current
FMA-2600A Mass Flow Controller
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature RS232 Serial / RS485 Serial 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA 8 Pin Mini-DIN / 15-pin D-sub (DB15)
Small Valve:
12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
Small Valve
: 0.250 Amp
Large Valve:
24 to 30 Vdc
Large Valve:
0.750 Amp 1. The
Digital Output Signal
communicates Mass Flow, Volumetric Flow, Pressure and Temperature 2. The
Analog Output Signal
and
Optional Secondary Analog Output Signal
communicate your choice of Mass Flow, Volumetric Flow, Pressure or Temperature
Range Specific Specifications Full Scale Flow Mass Pressure Drop 1 at FS Flow Process Connections 2
0.5 sccm to 50 sccm 1.0
3.9”H x 3.4”W x 1.1”D M-5 (10-32) Female Thread 100 sccm to 500 sccm 1 slpm 2 slpm 5 slpm 10 slpm 20 slpm 50 slpm 100 slpm 250 slpm 500 slpm 1000 slpm 1500 slpm 2000 slpm 3000 slpm 1.0
1.5
3.0
2.0
5.5
20.0
9.0
11.7
2.4
6.5
14.0
17.0
28.6
16.8
4.1”H x 3.6”W x 1.1”D 4.4”H x 6.4”W x 2.3”D 5.5”H x 7.4”W x 2.3”D 5.5”H x 8.1” W x 2.9” D 5.5”H x 8.9” W x 2.9” D 1/8” NPT Female 1/4” NPT Female 3/4” NPT Female (A 1-1/4” NPT Female process connection is available for 2000 slpm controllers.) 1-1/4” NPT Female 1. Lower Pressure Drops Available, please contact Omega.
2. Compatible with Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings. VCR and SAE connections upon request.
56
FMA-2600A Upstream Valve 0 - 0.5 sccm 0 - 1 sccm 0 - 2 sccm 0 - 5 sccm 0 - 10 sccm 0 - 20 sccm 0 - 50 sccm 8.53mm
.336in
13.34mm
.525in
26.67mm
1.050in
98.98mm
3.897in
M5X0.8
(10-32 UNF) BOTH SIDES 84.77mm
3.338in
56.52mm
2.225in
3.81mm
.150in
3.18mm
.125in
23.50mm
.925in
8-32 UNC .175in[4.45mm] 0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
MC-0.5SCCM-D-MSPEC
8.53mm
.336in
13.34mm
.525in
FMA-2600A Downstream Valve* 0 - 0.5 sccm 0 - 1 sccm 0 - 2 sccm 0 - 5 sccm 0 - 10 sccm 0 - 20 sccm 0 - 50 sccm 26.67mm
1.050in
98.98mm
3.897in
4.93mm
.194in
M5X0.8 (10-32 UNF) Both Sides 3.81mm
.150in
23.50mm
.925in
84.77mm
3.338in
56.52mm
2.225in
3.18mm
.125in
8-32 UNC .175in[4.45mm] * Note process connection port locations for downstream valve in this flow range.
MC-0.5SCCM-D-DS-MSPEC
0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
57
FMA-2600A 0 - 100 sccm 0 - 200 sccm 0 - 500 sccm 0 - 1 slpm 0 - 2 slpm 0 - 3 slpm 0 - 5 slpm 0 - 10 slpm 0 - 20 slpm 26.67mm
1.050in
8.89mm
.350in
13.34mm
.525in
103.30mm
4.067in
1/8 NPT Both Sides 94.95mm
3.738in
56.52mm
2.225in
8.89mm
.350in
13.34mm
.525in
3.81mm
.150in
3.18mm
.125in
2X 8-32 UNC .350in[8.89mm] 100 sccm to 20 slpm approximate weight: 1.2lb
23.50mm
.925in
MC-20SLPM-D-MSPEC
DATE
1/5/2016
FMA-2600A 0 - 50 slpm 0 - 100 slpm 50 slpm to 100 slpm approximate weight: 7.0 lb. 58
FMA-2600A 0 - 250 slpm 57.15mm
2.250in
40.64mm
1.600in
28.45mm
1.120in 28.58mm
1.125in 139.56mm
5.495in
28.45mm
1.120in 1/2" NPT Both Sides 9.53mm
.375in
14.61mm
.575in
194.31mm
7.650in 78.11mm
3.075in
8.13mm
.320in
82.55mm
3.250in
19.05mm
.750in
4.45mm
.175in
47.63mm
1.875in
4X 8-32 UNC .328in
8.33mm
4X 33.66mm
1.325in
REF 8-32 UNC .375in
36.20mm
1.425in 9.53mm
MCR-250SLPM-D-MSPEC
250 slpm approximate weight: 9.0 lb.
20.32mm
.800in DATE
1/7/2016
FMA-2600A 0 - 500 slpm 0 - 1000 slpm 0 - 1500 slpm 57.15mm
2.250in
40.64mm
1.600in
184.79mm
7.2750in 28.45mm
1.120in
28.58mm
1.125in
139.56mm
5.495in
133.88mm
5.2710in 20.32mm
.800in
3/4 NPT Both Sides 47.63mm
1.875in
5.08mm
.200in
9.53mm
.375in
68.58mm
2.700in
8.13mm
.320in
82.550mm
3.250in
19.050mm
.750in
4.45mm
.175in
36.20mm
1.425in
.328in[8.33mm] 33.66mm
1.325in REF 4X 8-32 UNC .375in[9.53mm]
MCR-500SLPM-D-MSPEC
1500 slpm approximate weight: 9.0 lb.
20.32mm
.800in
DATE
12/09/2015
59
FMA-2600A 0 - 2000 slpm 73.66mm
2.900in
57.15mm
2.250in
28.45mm
1.120in
36.83mm
1.450in
139.56mm
5.495in
28.45mm
1.120in
3/4 NPT BOTH SIDES 5.08mm
.200in
68.58mm
2.700in
205.74mm
8.100in
171.45mm
6.750in
68.58mm
2.700in
107.95mm
4.250in
5.08mm
.200in
9.53mm
.375in
47.63mm
1.875in
4 X 8-32 UNC .330in[8.38mm] 4X 8-32 UNC .328in[8.33mm]
MCR-2000SLPM-D-MSPEC
2000 slpm approximate weight: 12.0 lb.
28.58mm
1.125in
DATE
12/11/2015
FMA-2600A 0 - 3000 slpm 73.66mm
2.900in
57.15mm
2.250in
24.38mm
.960in
36.83mm
1.450in
139.56mm
5.495in
24.38mm
.960in
1-1/4 NPT Both Sides 5.08mm
.200in
68.58mm
2.700in
34.29mm
1.350in
97.79mm
3.850in
226.06mm
8.900in
88.90mm
3.500in
25.40mm
1.000in
9.53mm
.375in
47.63mm
1.875in
.330in[8.38mm] 4 X 8-32 UNC 39.37mm
1.550in
REF .328in[8.33mm]
MCR-3000SLPM-D-MSPEC
3000 slpm approximate weight: 12.0 lb.
28.58mm
1.125in
DATE
12/09/2015
60
Technical Data for FMA-LP2600A Low Pressure Drop Mass Flow Controllers 0 to 0.5 sccm Full Scale through 0 to 500 slpm Full Scale Standard Specifications (Contact Omega for available options.) Performance
Accuracy at calibration conditions after tare High Accuracy at calibration conditions after tare Repeatability Zero Shift and Span Shift Operating Range / Turndown Ratio Maximum Controllable Flow Rate Typical Response Time Warm-up Time
FMA-LP2600A Mass Flow Controller
± (0.8% of Reading + 0.2% of Full Scale) ± (0.4% of Reading + 0.2% of Full Scale) High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
± 0.2% Full Scale 0.02% Full Scale / ºCelsius / Atm 0.5% to 100% Full Scale / 200:1 Turndown 102.4% Full Scale 100 ms (Adjustable) < 1 Second
Operating Conditions
Mass Reference Conditions (STP) Operating Temperature Humidity Range (Non–Condensing) Maximum Pressure Mounting Attitude Sensitivity Valve Type Ingress Protection Wetted Materials
FMA-LP2600A Mass Flow Controller
25ºC & 14.696 psia (standard — others available on request) −10 to +50 ºCelsius 0 to 100% 50 psig Higher line pressures available, please contact Omega.
Small Valve:
None
Large Valve:
Mount with valve cylinder vertical & upright Normally Closed IP40
Small Valve: Large Valve:
303 & 302 Stainless Steel, FKM, Silicone RTV (Rubber), Glass Reinforced Nylon, Aluminum, Brass, 430FR Stainless Steel, Silicon, Glass.
303 & 302 Stainless Steel, FKM, Silicone RTV (Rubber), Glass Reinforced Nylon, Aluminum, 416 Stainless Steel, Nickel, Silicon, Glass.
If your application demands a different material, please contact Omega.
Communications / Power
Monochrome LCD Display with integrated touchpad Digital Input/Output Signal 1 Options Analog Input/Output Signal 2 Options Optional Secondary Analog Input/Output Signal 2
FMA-LP2600A Mass Flow Controller
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature RS232 Serial / RS485 Serial 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA Electrical Connection Options Supply Voltage Supply Current 8 Pin Mini-DIN /15-pin D-sub (DB15)
Small Valve:
12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
Large Valve:
24 to 30 Vdc
Small Valve
: 0.250 Amp
Large Valve:
0.750 Amp 1. The
Digital Output Signal
communicates Mass Flow, Volumetric Flow, Pressure and Temperature 2. The
Analog Output Signal
and
Optional Secondary Analog Output Signal
communicate your choice of Mass Flow, Volumetric Flow, Pressure or Temperature
Range Specific Specifications Full Scale Flow Mass Controller Pressure Drop at FS Flow (psid) venting to atmosphere
0.5 sccm to 2 sccm 5 sccm to 10 sccm 20 sccm 50 sccm to 200 sccm 500 sccm 1 slpm 2 slpm 5 slpm 10 slpm 20 slpm 40 slpm 0.06
0.08
0.07
0.07
0.08
0.10
0.18
0.10
0.12
0.26
0.14
50 slpm 100 slpm 250 slpm 500 slpm 0.17
0.30
0.69
0.69
Mechanical Dimensions
3.9”H x 3.4”W x 1.1”D 4.1”H x 3.6”W x 1.1”D 5.5”H x 7.7”W x 2.3”D 5.5”H x 7.7”W x 2.3”D 5.5”H x 7.3”W x 2.3”D 5.5”H x 8.1”W x 2.7”D
Process Connections 1 M-5 (10-32) Female Thread
1/8” NPT Female 1/4” NPT Female 1/2” NPT Female 3/4” NPT Female 3/4” NPT Female 1. Compatible with, Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings. VCR and SAE connections upon request.
61
FMA-LP2600A 0 - 0.5 sccm 0 - 1 sccm 0 - 2 sccm 0 - 5 sccm 0 - 10 sccm 0 - 20 sccm 26.67mm
1.050in
8.53mm
.336in
13.34mm
.525in
98.98mm
3.897in
M5X0.8
(10-32 UNF) BOTH SIDES 84.77mm
3.338in
56.52mm
2.225in
3.81mm
.150in
3.18mm
.125in
8.53mm
.336in
13.34mm
.525in
2X 8-32 UNC .175in[4.45mm] 23.50mm
.925in
0.5 sccm to 20 sccm approximate shipping weight: 1.1 lb.
MCW-20SCCM-D-MSPEC
DATE
12/10/2015
FMA-LP2600A 0 - 50 sccm 0 - 100 sccm 0 - 200 sccm 0 - 500 sccm 0 - 1 slpm 0 - 2 slpm 26.67mm
1.050in
8.89mm
.350in
13.34mm
.525in
1/8 NPT Both Sides 103.30mm
4.067in
91.12mm
3.588in
56.52mm
2.225in
3.81mm
.150in
3.18mm
.125in
8.89mm
.350in
13.34mm
.525in
2X 8-32 UNC .350in[8.89mm] 50 sccm to 2 slpm approximate weight: 1.2lb
23.50mm
.925in
MCW-2SLPM-D-MSPEC
DATE
12/10/2015
62
FMA-LP2600A 0 - 5 slpm 0 - 10 slpm 0 - 20 slpm 57.15mm
2.250in
194.31mm
7.650in
40.64mm
1.600in
28.45mm
1.120in
28.58mm
1.125in
139.56mm
5.495in
126.67mm
4.987in
12.70mm
.500in
1/4 NPT Both Sides 47.63mm
1.875in
5.08mm
.200in
9.53mm
.375in
68.58mm
2.700in
15.75mm
.620in
82.55mm
3.250in
19.05mm
.750in
36.20mm
1.425in
4.45mm
.175in
4X 8-32 UNC .375in[9.53mm] 20.32mm
.800in
4X 8-32 UNC .375
33.66mm
1.325in REF 5 slpm to 20 slpm approximate weight: 6.4 lb.
MCRW-20SLPM-D-MSPEC
DATE
12/10/2015
FMA-LP2600A 0 - 40 slpm 57.15mm
2.250in
40.64mm
1.600in
194.31mm
7.650in
28.45mm
1.120in
28.58mm
1.125in
139.56mm
5.495in
20.32mm
.800in
1/2 NPT Both Sides 47.63mm
1.875in
14.61mm
.575in
9.53mm
.375in
78.11mm
3.075in
82.55mm
3.250in
8.13mm
.320in
19.05mm
.750in
4.45mm
.175in
36.20mm
1.425in
20.32mm
.800in
4X 8-32 UNC .328in 8.33mm
4X 8-32 UNC .375in
9.53mm
40 slpm approximate weight: 9.0 lb.
MCRW-40SLPM-D-MSPEC
DATE
1/11/2016
63
FMA-LP2600A 0 - 50 slpm 0 - 100 slpm 0 - 250 slpm 57.15mm
2.250in
184.79mm
7.275in
40.64mm
1.600in
28.45mm
1.120in
28.58mm
1.125in
139.56mm
5.495in
8.13mm
.320in
3/4 NPT Both Sides 47.63mm
1.875in
5.08mm
.200in
9.53mm
.375in
68.58mm
2.700in
82.55mm
3.250in
19.05mm
.750in
4.45mm
.175in
36.20mm
1.425in
.328in[8.33mm] 33.66mm
1.325in REF 4X 8-32 UNC .375in[9.53mm] 50 slpm to 250 slpm approximate weight: 9.0 lb.
MCRW-250SLPM-D-MSPEC
20.32mm
.800in
20.32mm
.800in
DATE
12/10/2015
FMA-LP2600A 0 - 500 slpm 73.66mm
2.900in
57.15mm
2.250in
28.45mm
1.120in
36.83mm
1.450in
139.56mm
5.495in
28.45mm
1.120in
3/4 NPT BOTH SIDES 5.08mm
.200in
68.58mm
2.700in
205.74mm
8.100in
171.45mm
6.750in
68.58mm
2.700in
107.95mm
4.250in
5.08mm
.200in
9.53mm
.375in
47.63mm
1.875in
4X 8-32 UNC .328in[8.33mm]
MCRW-500SLPM-D-MSPEC
500 slpm approximate weight: 11.0 lb. 28.58mm
1.125in
DATE
1/7/2016
64
Technical Data for FMA-2600A-P & FMA-2600A-P-LSS Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 20 slpm Full Scale The
FMA-2600A-P
mass flow controller is designed for applications that require tight shut-off normally closed and provides positive shut-off of 1 x 10 -9 atm scc/sec Helium max.
FMA-2600A-P-LSS
controllers are for use with some aggressive gases (page 64).
Standard Specifications (Contact Omega for available options.) Performance FMA-2600A-P Mass Flow Controller FMA-2600A-P-LSS Mass Flow Controller
Accuracy at calibration conditions after tare High Accuracy at calibration conditions after tare Repeatability ± (0.8% of Reading + 0.2% of Full Scale) ± (0.4% of Reading + 0.2% of Full Scale) High Accuracy option not available for units ranged under 5 sccm.
± 0.2% Full Scale Zero Shift and Span Shift Operating Range / Turndown Ratio Maximum Controllable Flow Rate Typical Response Time Warm-up Time Integrated Valve Leak Integrity 0.02% Full Scale / ºCelsius / Atm 0.5% to 100% Full Scale / 200:1 Turndown 1% to 100% Full Scale / 100:1 Turndown 102.4% Full Scale 100 ms (Adjustable) < 1 Second 1 x 10 -9 atm scc/sec Helium max
Operating Conditions
Mass Reference Conditions (STP) Operating Temperature Humidity Range (Non–Condensing) Maximum Pressure Mounting Attitude Sensitivity Valve Type Ingress Protection Wetted Materials
FMA-2600A-P Mass Flow Controller Controller
25ºC & 14.696 psia (standard — others available on request) −10 to +50 ºCelsius 0 to 100% 145 psig None Normally Closed IP40
FMA-2600A-P:
303 & 302 Stainless Steel,FKM, Heat Cured Silicone Rubber, Glass Rein Steel, Silicon, Glass .
FMA-2600A-P-LSS:
316LSS, 303SS, 430FRSS, Perfluoroelastomer standard, FKM, EPDM, Buna, Neoprene as needed for some gases.
If your application demands a different material, please contact Omega.
Communications / Power
Monochrome LCD Display with integrated touchpad Digital Input/Output Signal 1 Options Analog Input/Output Signal 2 Options Optional Secondary Analog Input/Output Signal 2 Electrical Connection Options Supply Voltage Supply Current
FMA-2600A-P & FMA-2600A-P-LSS Mass Flow Controller
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature RS232 Serial / RS485 Serial 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA 8 Pin Mini-DIN / 15-pin D-sub (DB15) 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) 0.250 Amp 1. The
Digital Output Signal
communicates Mass Flow, Volumetric Flow, Pressure and Temperature 2. The
Analog Output Signal
and
Optional Secondary Analog Output Signal
communicate your choice of Mass Flow, Volumetric Flow, Pressure or Temperature
Range Specific Specifications Full Scale Mass Flow Controller Mechanical Dimensions Process Connections FMA-2600A-P
0.5SCCM to 20SLPM
FMA-2600A-P-LSS
0.5SCCM to 20SLPM 4.8”H x 6.8”W x 1.5”D 5.5”H x 6.8”W x 1.5”D 1/4” VCR® Male 1/4” VCR® Male Welded VCR® process connections are recommended for FMA-2600A-P and FMA-2600A-P-LSS applications. Please contact Omega.
65
FMA-2600A-P All ranges 9.53mm
.375in
28.58mm
1.125in
141.73mm
5.580in
4X 6.10mm
.240in THRU 15.94mm
.628in
19.05mm
.750in
120.76mm
4.755in
4.76mm
.188in
38.10mm
1.500in
160.78mm
6.330in
170.71mm
6.721in
FMA-2600A-P approximate weight: 3.0 lb.
FMA-2600A-P-LSS All ranges 9.53mm
.375in
28.58mm
1.125in
141.73mm
5.580in
MCV-0.5SCCM-D-MSPEC
4X 6.10mm
.240in THRU 15.94mm
.628in
19.05mm
.750in
- DATE
1/8/2016
REV.
1
15.94mm
.628in
19.05mm
.750in
138.54mm
5.455in
4.76mm
.188in
38.10mm
1.500in
160.78mm
6.330in
170.71mm
6.721in
FMA-2600A-P-LSS approximate weight: 3.2 lb.
15.94mm
.628in
19.05mm
.750in
MCSV-0.5SCCM-D-MSPEC
DATE
1/8/2016
REV.
1
66
Technical Data for FMA-2600A-LSS Mass Flow Controllers
FMA-2600A-LSS instruments are built for use with aggressive gases. For the
most part, these instruments maintain the specifications of equivalently ranged FMA-2600A devices.
Standard Compatible Gas List for FMA-2600A-LSS Controllers 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Air Argon Methane Carbon Monoxide Carbon Dioxide Ethane Hydrogen Helium Nitrogen Nitrous Oxide Neon Oxygen Propane normal-Butane Acetylene Ethylene 16 17 18 19 iso-Butane Krypton Xenon Sulfur Hexafluoride 20 75%Ar / 25% CO2 21 90% Ar / 10% CO2 22 92% Ar / 8% CO2 Air Ar CH4 CO CO2 C2H6 H2 He N2 N2O Ne O2 C3H8 n-C4H10 C2H2 C2H4 i-C4H10 Kr Xe SF6 C-25 C-10 C-8 23 24 25 26 27 28 98% Ar / 2% CO2 75% CO2 / 25% Ar 75% Ar / 25% He 75% He / 25% Ar 90% He / 7.5% Ar / 2.5% CO2 Helistar® A1025 90% Ar / 8% CO2 / 2% O2 Stargon® CS 95% Ar / 5% CH4 Nitric Oxide C-2 C-75 A-75 A-25 A1025 Star29 29 30 31 32 Nitrogen Triflouride Ammonia Hydrogen Sulfide Propylene P-5 NO NF3 NH3 34 36
available upon request:
Nitrogen Dioxide to 0.5% in an inert carrier H2S C3H6
In addition, the following gases are
NO2 Refrigerant gases to 100% Other gases to 1000 ppm in an inert carrier
If your application requires another gas or gas mixture, please contact Omega.
Please refer to the Technical Data and Specifications for the equivalently ranged FMA-2600A instrument for all operating specifications except: Operating Range Turndown Ratio Wetted Materials 1% to 100% Full Scale 100 : 1 316LSS, 303SS, 430FRSS, Perfluoroelastomer standard, FKM, EPDM as needed for some gases
.
The dimensions of FMA-2600A-LSS instruments may vary from their standard FMA-2600A counterparts. Dimensional drawings for FMA-2600A-LSS instruments are shown on pages 68 -71
67
FMA-2600A-LSS 0 – 0.5 sccm 0 – 1 sccm 0 – 2 sccm 0 – 5 sccm 0 – 10 sccm 0 – 20 sccm 0 – 50 sccm 26.67mm
1.050in
8.53mm
.336in
13.34mm
.525in
111.68mm
4.397in
8.53mm
.336in
M5X0.8
(10-32 UNF) Both Sdes 84.77mm
3.338in
56.52mm
2.225in
3.81mm
.150in
3.18mm
.125in
2X 8-32 UNC .175in[4.45mm] 0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
23.50mm
.925in
13.34mm
.525in
MCS-50SCCM-D-MSPEC
FMA-2600A-LSS 0 – 100 sccm 0 – 200 sccm 0 – 500 sccm 0 – 1 slpm 0 – 2 slpm 0 – 5 slpm 0 – 10 slpm 0 – 20 slpm 26.67mm
1.050in
8.89mm
.350in
13.34mm
.525in
116mm 4.567in
1/8 NPT Both Sides 91.12mm
3.588in
56.52mm
2.225in
3.81mm
.150in
2X 8-32 UNC .350in 8.89mm
100 sccm to 20 slpm approximate weight: 1.2 lb 8.89mm
.350in
13.34mm
.525in
3.18mm
.125in
23.50mm
.925in
MCS-20SLPM-D-MSPEC
DATE
1/5/2016
68
FMA-2600A-LSS 0 – 50 slpm 0 – 100 slpm 28.45mm
1.120in
28.58mm
1.125in
57.15mm
2.250in
40.64mm
1.600in
194.31mm
7.650in
139.56mm
5.495in
144.45mm
5.687in
12.70mm
.500in
1/4 NPT Both Sides 184.79mm
7.275in
15.75mm
.620in
20.32mm
.800in
47.63mm
1.875in
5.08mm
.200in
68.58mm
2.700in
82.55mm
3.250in
19.05mm
.750in
36.20mm
1.425in
9.53mm
.375in
4.45mm
.175in
4X 8-32 UNC .375in[9.53mm] 4X 8-32 UNC .375
50 slpm to 100 slpm approximate weight: 9.0 lb.
MCRS-100SLPM-D-MSPEC
DATE
12/09/2015
FMA-2600A-LSS 0 – 250 slpm 57.15mm
2.250in
194.31mm
7.650in
40.64mm
1.600in
28.45mm
1.120in
28.58mm
1.125in
139.56mm
5.495in
152.07mm
5.987in
20.32mm
.800in
1/2 NPT Both Sides 47.63mm
1.875in
14.61mm
.575in
9.53mm
.375in
78.11mm
3.075in
4X 8-32 UNC .328in[8.33mm] 82.55mm
3.250in
8.13mm
.320in
19.05mm
.750in
4.45mm
.175in
36.20mm
1.425in
4X 8-32 UNC .375in[9.53mm] 20.32mm
.800in
DATE
12/10/15
250 slpm approximate weight: 9.0 lb.
MCRS-250SLPM-D-MSPEC
69
FMA-2600A-LSS 0 – 500 slpm 0 – 1000 slpm 0 – 1500 slpm 57.15mm
2.250in
40.64mm
1.600in 13.21mm
.520in
3/4 NPT Both Sides 139.28mm
5.484in
151.79mm
5.976in
4.76mm
.188in
28.58mm
1.125in
28.45mm
1.120in 4X 8-32 UNC .438in 11.11mm
47.63mm
1.875in 9.53mm
.375in
184.79mm
7.275in 68.58mm
2.700in
82.55mm
3.250in
7.85mm
.309in
19.05mm
.750in
36.36mm
1.432in
4.45mm
.175in 4X 8-32 UNC .328in
8.33mm
33.66mm
1.325in REF 4X 8-32 UNC .375in
9.53mm
500 slpm to 1500 slpm approximate weight: 9.0 lb. 4X 8-32 UNC .375in 9.53mm
28.45mm
1.120in
28.58mm
1.125in
MCRS-500SLPM-D-MSPEC
DATE
12/10/2015
FMA-2600A-LSS 0 – 2000 slpm 73.66mm
2.900in
57.15mm
2.250in
28.45mm
1.120in
36.83mm
1.450in
152.07mm
5.987in
139.56mm
5.495in
28.45mm
1.120in
3/4 NPT Both Sides 68.58mm
2.700in
34.29mm
1.350in
205.74mm
8.100in
97.79mm
3.850in
68.58mm
2.700in
5.08mm
.200in
47.63mm
1.875in
28.58mm
1.125in
5.08mm
.200in
9.53mm
.375in
4 X 8-32 UNC .330in[8.38mm] 4 X 8-32 UNC 39.37mm
1.550in REF 2000 slpm approximate weight: 12.0 lb.
.328
MCRS-2000SLPM-D-MSPEC
DATE
12/10/2015
70
FMA-2600A-LSS 0 – 3000 slpm 73.66mm
2.900in
57.15mm
2.250in
24.38mm
.960in
36.83mm
1.450in
152.07mm
5.987in
24.38mm
.960in
1-1/4 NPT Both Sides 226.06mm
8.900in
5.08mm
.200in
68.58mm
2.700in
34.29mm
1.350in
97.79mm
3.850in
88.90mm
3.500in
25.40mm
1.000in
9.53mm
.375in
47.63mm
1.875in
.330in[8.38mm] 4 X 8-32 UNC 39.37mm
1.550in
REF .328in[8.33mm]
MCRS-3000SLPM-D-MSPEC
3000 slpm approximate weight: 12.0 lb.
28.58mm
1.125in
DATE
12/11/2015
71
Eight Pin Mini-DIN Connector Pin-Outs
If your FMA-2600A instrument was ordered with the standard Eight Pin Mini DIN connection, please be sure to reference the following pin-out diagram.
Standard 8 Pin Mini-DIN Pin-Out Pin
1 2 3 4 5 6 7
Function
Inactive (or optional 4-20mA Primary Output Signal) Static 5.12 Vdc [or optional Secondary Analog Output (4-20mA, 5Vdc, 10Vdc) or Basic Alarm] Serial RS232RX / RS485(–) Input Signal (receive) Meters = Remote Tare (Ground to Tare) Controllers = Analog Set-Point Input Serial RS232TX / RS485(+) Output Signal (send) 0-5 Vdc (or optional 0-10 Vdc) Output Signal Power In
Mini-DIN cable color
Black Brown Red Orange Yellow Green Blue 8 Ground (common for power, digital communications, analog signals and alarms) Purple
Note:
The above pin-out is applicable to all the flow meters and controllers with the Mini-DIN connector. The availability of different output signals depends on the options ordered. Optional configurations are noted on the unit’s calibration sheet.
72
DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.
DB15 2 5 8 8 5 2 9 11 13 15 Male Connector Front View 15 13 11 9 Female Connector Front View Pin Number
1 2 3 4 5 6 7
Function
Ground Primary Analog Signal Output Ground N/C Power Supply (+Vdc) N/C N/C 8 9 10 11 12 13 14 Analog Tare (meters — when grounded) Analog Set-Point Input (controllers) Power Supply Common Ground Secondary Analog Signal Output / fixed 5.12Vdc
N/C RS232 RX (receive) or RS485 – Ground
N/C
15
NOTE:
common grounding points.
RS232 TX (send) or RS485 + Check your device’s calibration certificate and user manual for the actual electrical input/ output requirements, as all instruments are custom configured to some extent.
Pins 1, 3, 9, 10, and 14 are connected together inside of the device and are = Not Connected/Open (can be used for custom pin assignments – please consult factory).
73
DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.
DB15A (XFM) 2 3 5 7 8 8 7 5 3 2 9 12 15 Male Connector Front View 15 12 9 Female Connector Front View Pin Number
1 2 3 4 5 6 7 8
Function
Ground Primary Analog Signal Output Analog Tare (meters — when grounded)* Analog Set-Point Input (controllers)* Ground Power Supply Common Ground Power Supply (+Vdc) RS232 Tx (send) / RS485 – 9 10 11 12 Ground N/C N/C Secondary Analog Signal Output / fixed 5.12Vdc* 13 14 N/C N/C
NOTE:
grounding points.
N/C
15 RS232 Rx (receive) / RS485 + Check your device’s calibration certificate and user manual for the actual electrical input/ output requirements, as all instruments are custom configured to some extent.
Pins 1, 4, 5, 6 and 9 are connected together inside of the device and are common = Not Connected/Open (can be used for custom pin assignments – please consult factory).
* Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
74
DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.
DB15B 2 5 8 8 5 2 9 11 14 15 Male Connector Front View 15 14 11 9 Female Connector Front View Pin Number
1 2 3 4 5 6 7 8
Function
Ground Primary Analog Signal Output N/C N/C Power Supply (+Vdc) N/C N/C Analog Tare (meters — when grounded)* Analog Set-Point Input (controllers)* Power Supply Common 9 10 11 12 13 14 Ground Secondary Analog Signal Output / fixed 5.12Vdc
N/C N/C RS232 RX (receive) or RS485 –*
N/C
15
NOTE:
grounding points.
RS232 TX (send) or RS485 +* Check your device’s calibration certificate and user manual for the actual electrical input/ output requirements, as all instruments are custom configured to some extent.
Pins 1, 9, and 10 are connected together inside of the device and are common = Not Connected/Open (can be used for custom pin assignments – please consult factory) * Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
75
DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.
DB15K 2 5 7 8 8 7 5 2 9 13 14 Male Connector Front View 14 13 9 Female Connector Front View Pin Number
1 2 3 4 5 6 7
Function
N/C Primary Analog Signal Output N/C N/C Power Supply Common N/C Power Supply (+Vdc) 8 9 10 11 Analog Tare (meters — when grounded) Analog Set-Point Input (controllers) Secondary Analog Signal Output / fixed 5.12Vdc
*
N/C Ground 12 13 Ground RS232 RX (receive) or RS485 –
*
14 RS232 TX (send) or RS485 +
* NOTE:
grounding points.
N/C
15 Ground Check your device’s calibration certificate and user manual for the actual electrical input/ output requirements, as all instruments are custom configured to some extent.
Pins 5, 11, 12 and 15 are connected together inside of the device and are common = Not Connected/Open (can be used for custom pin assignments – please consult factory).
*
Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
76
DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.
DB15H 2 6 7 7 6 2 10 11 14 15 Male Connector Front View 15 14 11 10 Female Connector Front View Pin Number
1 2 3 4 5 6 7 8 9 10 11 12 13 14
Function
N/C RS232 RX (receive) or RS485 –
*
N/C N/C Ground Primary Analog Signal Output Power Supply Common N/C N/C Secondary Analog Signal Output / fixed 5.12Vdc
*
Power Supply (+Vdc) Ground N/C Analog Tare (meters — when grounded) Analog Set-Point Input (controllers) 15 Check your device’s calibration certificate and user manual for the actual electrical input/ output requirements, as all instruments are custom configured to some extent.
NOTE:
grounding points.
RS232 TX (send) or RS485 +
*
Pins 5, 11, 12 and 15 are connected together inside of the device and are common
N/C
= Not Connected/Open (can be used for custom pin assignments – please consult factory).
*
Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
77
DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-FMA-2600A Series DB15 wire to a DB15O equipped FMA-2600A Series. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.
DB15O 2 5 7 7 5 2 9 11 14 15 Male Connector Front View 15 14 11 9 Female Connector Front View Pin Number
1 2 3 4 5 6 7
Function
Ground N/C N/C Primary Analog Signal Output Power Supply (+Vdc) N/C Analog Tare (meters — when grounded)* Analog Set-Point Input (controllers)* N/C 8 9 Power Supply Common 10 11 12 13 Ground Secondary Analog Signal Output / fixed 5.12Vdc
N/C N/C 14 15 RS232 RX (receive) or RS485 –* RS232 TX (send) or RS485 +* Check your device’s calibration certificate and user manual for the actual electrical input/ output requirements, as all instruments are custom configured to some extent.
NOTE:
Pins 1, 9, and 10 are connected together inside of the device and are common grounding points.
N/C
= Not Connected/Open (can be used for custom pin assignments – please consult factory) * Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
78
DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not all features may be available between brands, but the common denominators are featured in our DB15 offerings, along with some options for customization.
DB15S 2 8 8 2 9 11 12 13 14 Male Connector Front View 14 13 12 11 9 Female Connector Front View Pin Number
1 2
Function
Ground Primary Analog Signal Output 3 4 5 6 7 8 9 10 11 12 13 N/C N/C Ground N/C N/C Analog Tare (meters — when grounded) Analog Set-Point Input (controllers) Power Supply Common Ground Secondary Analog Signal Output / fixed 5.12Vdc
*
RS232 RX (receive) or RS485 – Power Supply (+Vdc)
* N/C
14 15
NOTE:
grounding points.
RS232 TX (send) or RS485 +
*
Ground Check your device’s calibration certificate and user manual for the actual electrical input/ output requirements, as all instruments are custom configured to some extent.
Pins 1, 5, 9, 10 and 15 are connected together inside of the device and are common = Not Connected/Open (can be used for custom pin assignments – please consult factory).
*
Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
79
80
WARRANTY/DISCLAIMER
OMEGA ENGINEERING, INC. warrants this unit to be free of defects in materials and workmanship for a period of coverage on each product.
13 months
from date of purchase. OMEGA’s WARRANTY adds an additional one (1) month grace period to the normal limited to contact points, fuses, and triacs.
one (1) year product warranty OMEGA be liable for consequential, incidental or special damages.
to cover handling and shipping time. This ensures that OMEGA’s customers receive maximum If the unit malfunctions, it must be returned to the factory for evaluation. OMEGA’s Customer Service Department will issue an Authorized Return (AR) number immediately upon phone or written request. Upon examination by OMEGA, if the unit is found to be defective, it will be repaired or replaced at no charge. OMEGA’s WARRANTY does not apply to defects resulting from any action of the purchaser, including but not limited to mishandling, improper interfacing, operation outside of design limits, improper repair, or unauthorized modification. This WARRANTY is VOID if the unit shows evidence of having been tampered with or shows evidence of having been damaged as a result of excessive corrosion; or current, heat, moisture or vibration; improper specification; misapplication; misuse or other operating conditions outside of OMEGA’s control. Components in which wear is not warranted, include but are not
OMEGA is pleased to offer suggestions on the use of its various products. However, OMEGA neither assumes responsibility for any omissions or errors nor assumes liability for any damages that result from the use of its products in accordance with information provided by OMEGA, either verbal or written. OMEGA warrants only that the parts manufactured by the company will be as specified and free of defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY KIND WHATSOEVER, EXPRESSED OR IMPLIED, EXCEPT THAT OF TITLE, AND ALL IMPLIED WARRANTIES INCLUDING ANY WARRANTY OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED. LIMITATION OF LIABILITY: The remedies of purchaser set forth herein are exclusive, and the total liability of OMEGA with respect to this order, whether based on contract, warranty, negligence, indemnification, strict liability or otherwise, shall not exceed the purchase price of the component upon which liability is based. In no event shall
CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1) as a “Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or activity; or (2) in medical applications or used on humans. Should any Product(s) be used in or with any nuclear installation or activity, medical application, used on humans, or misused in any way, OMEGA assumes no responsibility as set forth in our basic WARRANTY / DISCLAIMER language, and, additionally, purchaser will indemnify OMEGA and hold OMEGA harmless from any liability or damage whatsoever arising out of the use of the Product(s) in such a manner.
RETURN REQUESTS/INQUIRIES
Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department. BEFORE RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN AUTHORIZED RETURN (AR) NUMBER FROM OMEGA’S CUSTOMER SERVICE DEPARTMENT (IN ORDER TO AVOID PROCESSING DELAYS). The assigned AR number should then be marked on the outside of the return package and on any correspondence.
The purchaser is responsible for shipping charges, freight, insurance and proper packaging to prevent breakage in transit. FOR
WARRANTY
RETURNS, please have the following information available BEFORE contacting OMEGA: 1. Purchase Order number under which the product was PURCHASED, 2. Model and serial number of the product under warranty, and 3. Repair instructions and/or specific problems relative to the product.
FOR
NON-WARRANTY
contacting OMEGA: COST of the repair, REPAIRS, consult OMEGA for current repair charges. Have the following information available BEFORE 1. Purchase Order number to cover the 2. Model and serial number of theproduct, and 3. Repair instructions and/or specific problems relative to the product.
OMEGA’s policy is to make running changes, not model changes, whenever an improvement is possible. This affords our customers the latest in technology and engineering.
OMEGA is a trademark of OMEGA ENGINEERING, INC.
© Copyright 2018 OMEGA ENGINEERING, INC. All rights reserved. This document may not be copied, photocopied, reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part, without the prior written consent of OMEGA ENGINEERING, INC.
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Key features
- High accuracy: ±0.5% of reading or ±1% of full scale
- Fast response time: <100 ms
- Wide flow ranges: 0-1 sccm to 0-200 slpm
- Analog and digital inputs and outputs
- Optional integrated shut-off valve
- Built-in PID controller
- Totalizing mode for batch processing
- Multi-drop capability for controlling multiple controllers from a single RS-485 network
- Optional display for local monitoring and control