Dual Controller


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Dual Controller

Models

929-7000, 929-7001, 929-7002, 929-7003,

929-7004, 929-7005, 929-7006, 929-7007,

929-7008, 929-7009, 929-7010, 929-7011,

929-7012, 929-7013, 929-7014, 929-7015

Manuale di istruzioni

Bedienungshandbuch

Notice de mode d’emploi

User Manual

05/2011

Notices

© Agilent Technologies, Inc. 2011

No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from

Agilent Technologies, Inc. as governed by United States and international copyright laws.

Manual Part Number

Publication Number: 87-900-094-01 (I)

Edition

Edition 05/2011

Printed in ITALY

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

Warranty

The material contained in this document is provided “as is,” and is subject to being changed, without notice, in future editions. Further, to the maximum extent permitted by applicable law, Agilent disclaims all warranties, either express or implied, with regard to this manual and any information contained herein, including but not limited to the implied warranties of merchantability and fitness for a particular purpose.

Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing, use, or performance of this document or of any information contained herein. Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms, the warranty terms in the separate agreement shall control.

Technology Licenses

The hardware and/or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of a U.S. Government prime contract or subcontract,

Software is delivered and licensed as

“Commercial computer software” as defined in DFAR 252.227-7014 (June

1995), or as a “commercial item” as defined in FAR 2.101(a) or as

“Restricted computer software” as defined in FAR 52.227-19 (June 1987) or any equivalent agency regulation or contract clause. Use, duplication or disclosure of Software is subject to

Agilent Technologies’ standard commercial license terms, and non-

DOD Departments and Agencies of the

U.S. Government will receive no greater than Restricted Rights as defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive no greater than Limited Rights as defined in FAR 52.227-14 (June

1987) or DFAR 252.227-7015 (b)(2)

(November 1995), as applicable in any technical data.

Trademarks

Windows and MS Windows are U.S. registered trademarks of Microsoft

Corporation.

Safety Notices

CAUTION

A CAUTION notice denotes a hazard.

It calls attention to an operating procedure, practice, or the like that, if not correctly performed or adhered to, could result in damage to the product or loss of important data. Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met.

WARNING

A WARNING notice denotes a hazard. It calls attention to an operating procedure, practice, or the like that, if not correctly performed or adhered to, could result in personal injury or death. Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met.

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DUAL Controller

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DUAL Controller

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Contents

1

Istruzioni per l’uso 9  

Informazioni generali 11 

Descrizione del controller 12 

Immagazzinamento 14 

Preparazione per l’installazione 14 

Installazione 15 

Uso 17 

Procedure operative 23 

Manutenzione 26 

Smaltimento 27 

Messaggi di errore 28 

2

Gebrauchsanleitung 33

 

Allgemeines 34 

Beschreibung des Controllers 35 

Lagerung 37 

Vor der Installation 37 

Installation 38 

Gebrauch 40 

Bedienung 46 

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Contents

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Wartung 49 

Entsorgung 50 

Fehlermeldungen 51 

3

Mode d’emploi 57

 

Indications Generales 59 

Description du controleur 60 

Emmagasinage 62 

Preparation pour l’installation 62 

Installation 63 

Utilisation 65 

Utilisation 71 

Entretien 74 

Mise au rebut 75 

Messages d’erreur 76 

4

Instructions for Use 81

 

General Information 83 

Controller Description 84 

Storage 86 

Prior to Installation 86 

Installation 87 

Usage 89 

Operating Procedures 95 

Dual Controller User Manual / 87-900-094-01 (I)

Maintenance 98 

Disposal 99 

Error Messages 100 

5

Technical Information 103  

Dual Controller Description 107 

Controller Specifications 109 

Controller Outline 113 

Fuse Holder 114 

Interconnections 115 

Start Mode of Operation 116 

Usage 130 

Startup 131 

Operating Modes 132 

Unit Configuration 137 

Serial Interface 151 

Software Protocol 155 

List of Commands 162 

Specific Protocol Settings 183 

Accessories/Options 187 

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Contents

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Dual Controller User Manual

1

Istruzioni per l’uso

Informazioni generali 11

Descrizione del controller 12

Immagazzinamento 14

Preparazione per l’installazione 14

Installazione 15

Uso 17

Controlli ed indicatori del pannello frontale del controller

Dual 18

Procedura di regolazione del contrasto dello schermo

LCD del Controller a pompa ionica “DUAL” 19

Pannello posteriore del controller Dual 21

Procedure operative 23

Modalità operative 23

Modalità operativa Step 24

Accensione del controller dal pannello frontale (modalità

LOCAL) 25

Avvio della pompa 26

Traduzione delle istruzioni originali

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1 Istruzioni per l’uso

Informazioni generali

Spegnimento della pompa 26

Manutenzione 26

Smaltimento 27

Messaggi di errore 28

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Istruzioni per l’uso

Informazioni generali

1

Informazioni generali

Questa apparecchiatura è destinata ad uso professionale.

L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell'utilizzo dell'apparecchiatura. La Agilent si ritiene sollevata da eventuali responsabilità dovute all'inosservanza totale o parziale delle istruzioni, ad uso improprio da parte di personale non addestrato, ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche. Il MiniVac è un alimentatore ad alta tensione e bassa potenza, utilizzato per alimentare le pompe Ioniche.

Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell'operatore durante l'utilizzo dell'apparecchiatura. Informazioni dettagliate sono fornite nella sezione "Technical Information".

Questo manuale utilizza le seguenti convenzioni:

AVVERTENZA! I messaggi di avvertenza attirano l'attenzione dell'operatore su una procedura o una pratica specifica che, se non eseguita in modo corretto, potrebbe provocare gravi lesioni personali.

ATTENZIONE! I messaggi di attenzione sono visualizzati prima di procedure che, se non osservate, potrebbero causare danni all'apparecchiatura.

NOTA Le note contengono informazioni importanti estrapolate dal testo.

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1 Istruzioni per l’uso

Descrizione del controller

Descrizione del controller

Il controller Dual della Agilent è un controller, per le pompe ioniche, modulare e flessibile. L’unità è configurata in fabbrica a seconda delle esigenze del cliente.

Il controller Dual è disponibile con:

ƒ Pannello frontale con tastierina, display (16x2) e scheda processore.

ƒ

ƒ

Scheda di I/O remoto.

Scheda di comunicazione seriale (opzionale).

ƒ

ƒ

ƒ

Alimentatore da 24 Vcc, 20 W, per il misuratore Eyesys Gauge

(opzionale).

Scheda di alimentazione con DSP integrato per la gestione delle tensioni in uscita.

Scheda(e) di alta tensione.

Tab. 1

Modelli Dual

Unità base da 120 Vca con 1 scheda alta tensione negativa

Unità base da 120 Vca con 2 schede alta tensione negative

Unità base da 120 Vca con 1 scheda alta tensione positiva

Unità base da 120 Vca con 2 schede alta tensione positive

Unità base da 230 Vca con 1 scheda alta tensione negativa

Unità base da 230 Vca con 2 schede alta tensione negative

Unità base da 230 Vca con 1 scheda alta tensione positiva

Unità base da 230 Vca con 2 schede alta tensione positive

Unità base da 120 Vca con 1 scheda alta tensione negativa e 1 scheda RS232

Unità base da 120 Vca con 2 schede alta tensione negative e 1 scheda RS232

929-7000

929-7001

929-7002

929-7003

929-7004

929-7005

929-7006

929-7007

929-7008

929-7009

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Istruzioni per l’uso

Descrizione del controller

1

NOTA

Unità base da 120 Vca con 1 scheda alta tensione positiva e 1 scheda RS232

Unità base da 120 Vca con 2 schede alta tensione positive e 1 scheda RS232

Unità base da 230 Vca con 1 scheda alta tensione negativa e 1 scheda RS232

Unità base da 230 Vca con 2 schede alta tensione negative e 1 scheda RS232

Unità base da 230 Vca con 1 scheda alta tensione positiva e 1 scheda RS232

Unità base da 230 Vca con 2 schede alta tensione positive e 1 scheda RS232

929-7010

929-7011

929-7012

929-7013

929-7014

929-7015

Il controller Dual è in grado di gestire fino a due pompe ioniche. dalla

20 l/s alla 500 l/s, con polarità positiva o negativa. Permette di eseguire delle letture affidabili di pressione fino a 10 -11 Torr ottimizzando quindi le prestazioni della pompa sull’intero campo operativo.

Con due misuratori Eyesys opzionali, è possibile eseguire letture di pressione con differenti precisioni e campi di musura.

Il controller Dual può essere gestito nelle modalità LOCAL, REMOTE

I/O e SERIAL attraverso le interfacce RS 232-422 e 485 (le interfacce

RS422 e RS485 sono opzionali).

Contattare l’ufficio vendite della Agilent per ordinare i sistemi con RS 422/485 e misuratori Eyesys.

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1 Istruzioni per l’uso

Immagazzinamento

Le modalità con cui i comandi operativi vengono impartiti al sistema dipendono dalla modalità operativa in cui si trova il controller:

ƒ

ƒ

Nella modalità LOCAL, tutti i comandi vengono impartiti attraverso il pannello frontale.

Nella modalità REMOTE I/O, tutti i comandi vengono impartiti attraverso segnali I/O remoti (relay contacts) direttamente sul connettore Remote Control posto sul pannello posteriore.

ƒ Nella modalità SERIAL, tutti i comandi vengono impartiti attraverso un personal computer locale collegato all’interfaccia

RS 232-422-485.

Immagazzinamento

Per trasportare e immagazzinare il controller occorre osservare le seguenti condizioni ambientali:

ƒ

ƒ

Temperatura: da -20 °C a +70 °C

Umidità relativa: da 0 a 95% (senza condensa)

Preparazione per l’installazione

Il controller viene fornito in un imballo protettivo speciale; nel caso in cui si presentassero segni di danni che potrebbero essere stati causati durante il trasporto, contattare l’ufficio vendite locale.

Durante l’operazione di disimballo, prestare particolare attenzione a non lasciar cadere il controller e a non sottoporlo ad urti.

Il materiale dell’imballo è completamente riciclabile e risponde alla direttiva CEE 85/399 per la tutela dell’ambiente.

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Istruzioni per l’uso

Installazione

1

Figura 1 Imballo del controller

Il controller Dual è configurato in fabbrica per funzionare con le seguenti tensioni di alimentazione:

ƒ Modelli 929-7000/1/2/3 e 929-7008/09/10/11, tensione di ingresso da 100 a 120 Vac, frequenza di 50/60 Hz,

ƒ Modelli 929-7004/5/6/7 e 929-7012/13/14/15; Tensione di ingresso da 200 a 240 Vac, frequenza di 50/60 Hz.

Installazione

AVVERTENZA! Il controller Dual è provvisto di un cavo di alimentazione a 3 fili dotato di spina approvata a livello internazionale. Utilizzare sempre questo cavo di alimentazione, inserendo la spina in una presa di alimentazione munita di collegamento a terra onde evitare scariche elettrostatiche.

All’interno del controller si sviluppano delle alte tensioni che possono provocare delle lesioni gravi o addirittura la morte. Prima di eseguire qualsiasi operazione di installazione o manutenzione del controller, scollegarlo dalla presa elettrica.

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1 Istruzioni per l’uso

Installazione

ATTENZIONE! Il controller può essere utilizzato sia come unità da tavolo che come modulo installato in un rack. In ogni caso deve essere posizionato in modo tale che l’aria possa circolare liberamente attraverso i fori di areazione presenti sulla copertura.

Nel caso in cui il controller viene utilizzato come modulo rack, DEVE essere installato in un’adattatore alto quattro unità rack per evitare che cada all’interno del rack stesso. Il pannello frontale del controller Dual non è previsto per reggere il peso dell’unità.

Non installare o utilizzare il controller in ambienti esposti ad agenti atmosferici

(pioggia, neve, ghiaccio), nella presenza di polvere, gas corrosivi o in ambienti esplosivi o ad alto rischio di infiammabilità.

NOTA Nel caso in cui il controller viene installato in un rack, rimuovere i quattro piedini in modo che venga posizionato con almeno 30 mm di spazio sotto e sopra.

Durante il funzionamento, occorre che siano rispettate le seguenti condizioni ambientali:

ƒ

ƒ

Temperatura: da 0 °C a +45 °C

Umidità relativa: 0 - 90% (senza condensa)

Per collegare il controller alla pompa, utilizzare il cavo specifico disponibile come opzione.

Fare riferimento all’appendice “Technical Information” per informazioni dettagliate su questi ed altri collegamenti.

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Istruzioni per l’uso

Uso

1

Figura 2 Collegamenti delle masse

NOTA L’interlock del cavo viene chiuso sulla massa della pompa. Se il collegamento è interrotto l’alta tensione viene disabilitata. Chiudere l’interlock con l’apposito contro-connettore se si utlizza un cavo senza connettore di interlock.

Uso

In questo paragrafo vengono riportate le principali procedure operative. Per ulteriori informazioni e per le procedure riguardanti collegamenti o particolari opzioni fare riferimento al paragrafi

“UTILIZZO” nell’appendice “Technical Information”.

Prima di utilizzare il controller effettuare tutti i collegamenti elettrici e pneumatici e fare riferimento al manuale della pompa collegata.

AVVERTENZA! Per evitare danni alle persone ed all'apparecchiatura, nel caso in cui la pompa debba essere posizionata su di un tavolo assicurarsi che quest’ultimo sia stabile. Non mettere mai in funzione la pompa se la flangia di ingresso non è collegata al sistema o se non è chiusa con la flangia di chiusura.

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1 Istruzioni per l’uso

Uso

Controlli ed indicatori del pannello frontale del controller Dual

Nella seguente figura viene riportato il pannello frontale del controller Dual. La tabella che segue indica la definizione e la funzionalità dei controlli e indicatori.

18/194

Figura 3 Pannello frontale

1

2

3

4

Display a cristalli liquidi retro illuminato, 16 caratteri x 2 righe

LED verdi che indicano la modalità operativa selezionata:

ƒ LED Local acceso quando è selezionata la modalità operativa LOCAL

ƒ LED Serial acceso quando è selezionata la modalità operativa

SERIAL

ƒ LED Remote acceso quando è selezionata la modalità operativa

REMOTE I/O

Interruttore HV ENABLE, attivo indipendentemente dalla modalità operativa selezionata. Per alimentare l’alta tensione dal pannello di controllo, dal Remote I/O o dalla linea seriale, occorre che l’interruttore

HV ENABLE sia predisposto nella posizione ON.

Pulsanti HV1 on/off e HV2 on/off, utilizzati per abilitare/disabilitare la funzionalità dei circuiti di alta tensione.

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5

6

Istruzioni per l’uso

Uso

1

LED; quando è acceso il LED ON il relativo circuito HV (alta tensione) è abilitato, mentre quando è acceso il LED PROT è stata selezionata la modalità operativa per la pompa corrispondente.

Gruppo di sei pulsanti di funzione con le seguenti caratteristiche:

ƒ Pulsante ENTER, utilizzato per confermare una selezione che è stata effettuata con il pulsante CHANGE

ƒ Pulsante CHANGE CONFIG, utilizzato per visualizzare tutte le opzioni disponibili

ƒ Pulsante MENU, utilizzato per entrare nel menu di Configurazione

ƒ Pulsante MODE, utilizzato per selezionare la modalità operativa

ƒ Pulsanti START PROT 1 e START PROT 2, utilizzati per selezionare la modalità Start Protect per la pompa corrispondente

Procedura di regolazione del contrasto dello schermo LCD del Controller a pompa ionica

“DUAL”

Il Controller a pompa ionica “DUAL” è dotato di uno schermo LCD, installato nel pannello anteriore dell’unità. Il contrasto del display, nonostante sia impostato dalla fabbrica, necessiterà di essere regolato qualora si verifichi una delle seguenti condizioni:

ƒ

ƒ

La retroilluminazione è attiva, ma sul display non è visualizzato nessun carattere.

La retroilluminazione è attiva, ma sul display è visualizzata una matrice a quadretti neri

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1 Istruzioni per l’uso

Uso

È necessario eseguire la procedura di regolazione

Figura 4

Per eseguire la procedura di regolazione del contrasto del display, accendere il controller e, al termine dell’inizializzazione, premere il tasto ENTER collocato sul pannello anteriore, tenendolo premuto fino a quando non è ottenuta l’impostazione desiderata. Rilasciando il pulsante “ENTER”, il valore di contrasto sarà salvato nella memoria dell’unità.

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Istruzioni per l’uso

Uso

1

Figura 5

Quando l’unità accede alla “modalità di regolazione del contrasto”, il display visualizza il relativo messaggio e i LED del display iniziano a lampeggiare.

Pannello posteriore del controller Dual

La seguente figura riporta i controlli e connettori sul pannello posteriore del controller Dual. La configurazione riportata nella figura consiste in due schede ad alta tensione (HV), due schede Set

Point/Remote Control, una scheda d’interfaccia RS 232/422 ed il collegamento a due misuratori Eyesys.

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1 Istruzioni per l’uso

Uso

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7

8

5

6

3

4

1

2

9

10

11

Figura 6 Pannello posteriore

Sede porta fusibile

Connettore Fischer HV2

Bloccaggio del cavo HV sul connettore HV2

Connettore Fischer HV1

Bloccaggio del cavo HV sul connettore HV1

Connettore a 37-pin per Remote I/O HV2

Connettore a 37-pin per Remote I/O HV1

Connettori a 9-pin per misuratori Eyesys multipli

Connettore d’interfaccia seriale a 9-pin

Presa di alimentazione

Interruttore di alimentazione principale

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Istruzioni per l’uso

Procedure operative

1

Procedure operative

Modalità operative

Il Dual controller può funzionare nelle seguenti modalità:

ƒ

ƒ

LOCAL

REMOTE I/O (input/output)

ƒ SERIAL.

Nella modalità LOCAL tutti i comandi sono attivati dal pannello frontale.

Nella modalità REMOTE I/O tutti i comandi sono attivati da un personal computer remoto collegato tramite il connettore di input/output collocato sul pannello posteriore.

Nella modalità SERIAL tutti i comandi sono attivati da un personal computer esterno collegato tramite l’interfaccia seriale

RS 232-422-485.

NOTA La modalità operativa selezionata viene memorizzata dal sistema e quindi al ripristino della tensione in seguito alla sua caduta, il controller Dual ritornerà nella modalità operativa nella quale era al momento dalla caduta di tensione.

NOTA Quando viene selezionata una qualsiasi modalità operativa, il sistema accetterà solamente i comandi della relativa modalità però è in grado di visualizzare informazioni e acquisire segnali e dati contemporaneamente da tutte le interfacce.

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1 Istruzioni per l’uso

Procedure operative

L’unità è progettata per funzionare nelle seguenti modalità:

ƒ

ƒ modalità START modalità PROTECTED

Nella modalità START il controller fornisce tutta la potenza, indipendentemente dalle condizioni della pompa, fino a raggiungere la corrente di corto circuito. Questa modalità di funzionamento deve essere utilizzata per avviare la pompa ad alta pressione.

Nella modalità PROTECTED il controller limita la corrente in uscita e spegne l’alta tensione quando il valore di corrente supera la corrente di soglia per oltre 0,2 secondi.

In condizioni di normale funzionamento, questa è la modalità preferita in quanto, in caso di guasto alla pompa ionica o al cavo causato da corto circuito o alto carico, l’alta tensione si spegnerà.

Fare riferimento “Technical Information” per informazioni dettagliate sulle modalità operative.

Modalità operativa Step

La modalità Step deve essere scelta alfine di ottimizzare le prestazioni della pompa e consentire le letture a pressione molto bassa senza influenzare la corrente di dispersione.

Nella modalità Step il controller Dual sceglie la tensione in uscita più appropriata secondo la pressione all’interno della pompa (vedere la figura seguente).

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Istruzioni per l’uso

Procedure operative

1

Figura 7 Cambiamento della tensione in uscita vs pressione

Accensione del controller dal pannello frontale

(modalità LOCAL)

NOTA Per accendere l’alta tensione (HV) occorre che l’interlock esterno sia chiuso

(connettore inserito). Nel caso in cui non venga eseguita alcuna connessione esterna, inserire i ponticelli di chiusura e interlock forniti con l’unità.

Procedere come segue per alimentare il controller e abilitare la tensione sui connettori di alta tensione (H.V.):

ƒ

ƒ

Inserire il cavo proveniente dalla pompa ed il pin di interlock loopback del cavo H.V. nei relativi connettori sul pannello posteriore.

Predisporre l’interruttore di alimentazione sul pannello posteriore nella posizione di ON.

ƒ

ƒ

Predisporre l’interruttore ENABLE HV sul pannello anteriore nella posizione ON.

Premere i pulsanti HV 1/2 ON/OFF (LED ON si accende).

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1 Istruzioni per l’uso

Manutenzione

NOTA Con un solo circuito H.V. installato entrambe le righe del display sono dedicate alla pompa numero uno, mentre con due circuiti installati ogni riga è dedicata ad una pompa diversa.

Avvio della pompa

Per avviare la pompa, premere il relativo pulsante HV ON/OFF; si accenderà il LED ON.

Spegnimento della pompa

Per fermare la pompa, premere il relativo pulsante HV ON/OFF; si spegnerà il LED ON.

Manutenzione

Il controller Dual non richiede alcun intervento di manutenzione.

Qualsiasi tipo di intervento sull’unità deve essere eseguito da personale tecnico autorizzato.

In caso di guasto è possibile usufruire del servizio di riparazione

Agilent o del "Agilent advanced exchange service", che permette di ottenere un controller rigenerato in sostituzione di quello guasto.

Qualora un controller dovesse essere rottamato, procedere nel rispetto delle normative nazionali specifiche.

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Istruzioni per l’uso

Smaltimento

1

Smaltimento

Significato del logo "WEEE" presente sulle etichette.

Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva

CE denominata "WEEE".

Questo simbolo (valido solo per i paesi della Comunità Europea) indica che il prodotto sul quale è applicato, NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali, ma deve essere avviato ad un sistema di raccolta differenziata.

Si invita pertanto l'utente finale a contattare il fornitore del dispositivo, sia esso la casa madre o un rivenditore, per avviare il processo di raccolta e smaltimento, dopo opportuna verifica dei termini e condizioni contrattuali di vendita.

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1 Istruzioni per l’uso

Messaggi di errore

Messaggi di errore

Per certi tipi di guasti il controller esegue un test di autodiagnostica e visualizza uno dei seguenti messaggi riportati nella tabella seguente.

Tab. 2

MESSAGGIO DESCRIZIONE

HV(X)

ERROR

PANEL

INTERLOCK

HV(X)

ERROR

REMOTE

INTERLOCK

HV(X)

ERROR

CABLE

INTERLOCK

HV(X)

AZIONE CORRETTIVA

GUASTI DELL’ALTA TENSIONE 1 O 2

L’alta tensione (HV) è stata spenta da un interlock ricevuto dal pannello frontale o dalla copertura. (l’interruttore “HV

ENABLE” predisposto su OFF oppure copertura rimossa dall’unità)

1. Impostare l’interruttore “HV

ENABLE” su ON e ripetere la procedura di accensione dell’alta tensione (H.V.).

2. Assicurarsi che la copertura sia installata correttamente.

L’alta tensione (HV) è stata spenta da un interlock ricevuto dal Remote I/O.

L’alta tensione (HV) è stata spenta a causa di un interlock del cavo HV.

1. Controllare che siano installati gli interruttori di richiusura con relativi interlock esterni ponticellati.

2. Assicurarsi che l’interlock esterno sia chiuso.

1. Nel caso in cui la pompa utilizza un cavi HV con interlock di sicurezza, controllare che il connettore all’estremità della pompa sia inserito correttamente e che il pin di richiusura all’estremità dell’unità sia inserito nel relativo connettore sul pannello posteriore.

2. Nel caso in cui la pompa utilizza un cavo HV a polo singolo senza interlock, controllare che il ponticello sia correttamente inserito tra la presa del cavo HV interlock e la terra.

Non è stato rilevato il circuito Ripetere la procedura di accensione

28/194 Dual Controller User Manual / 87-900-094-01 (I)

Istruzioni per l’uso

Messaggi di errore

1

MESSAGGIO DESCRIZIONE

ERROR

HV NOT

FOUND di alta tensione (HV).

HV(X)

ERROR

HV FAULT

HV(X)

ERROR

HV

OVERTEMP.

L’alta tensione (HV) è stata spenta a causa di un guasto nel circuito HV.

I sensori di temperatura all’interno del controller Dual hanno rilevato una temperatura che va oltre i limiti di sicurezza.

AZIONE CORRETTIVA del Dual; se il problema persiste, contattare Agilent per la riparazione o sostituzione.

Contattare Agilent per la riparazione o sostituzione.

1. Assicurarsi che la temperatura ambientale durante il funzionamento del controller non sia superiore ai 45 º.

2. Assicurarsi che i fori di aerazione sulla copertura non siano ostruiti.

3. Assicurarsi che le palette della ventola girino liberamente e che l’aria coinvogliata all’interno del controller Dual non sia ostruita da polvere o da materiale estraneo.

Attendere qualche minuto in modo che la temperatura interna dell’unità si raffreddi e quindi ripetere la procedura di accensione dell’alta tensione (H.V.)

Ripetere la procedura di accensione del Dual; se il problema persiste, contattare Agilent per la riparazione o sostituzione.

HV(X)

ERROR

REMOTE

I/O

NOT FOUND

HV(X)

ERROR

R. I/O

FAULT

Non è stata rilevata la scheda

Remote I/O.

Guasto al circuito Remote I/O. 1. Assicurarsi che i connettori esterni Remote I/O siano collegati come descritto in questo documento.

2. Ripetere la procedura di accensione del Dual; se il problema persiste, contattare

Agilent per la riparazione o sostituzione.

Dual Controller User Manual / 87-900-094-01 (I) 29/ 194

1 Istruzioni per l’uso

Messaggi di errore

MESSAGGIO DESCRIZIONE

HV(X)

ERROR

PROTECT

HV(X)

ERROR

SHORT

CIRCUIT

HV(X)

ERROR

OVER

VOLT/CURR

HV(X)

ERROR

ZERO MEAS

GAUGE(X)

ERROR

PANEL

INTERLOCK

GAUGE(X)

ERROR

GAUGE NOT

FOUND

GAUGE(X)

ERROR

GAUGE

FAULT

È scattata la protezione di sovracorrente quando è stata selezionata la modalità operativa “PROTECT”.

È stato rilevato un corto circuito sull’uscita H.V.

AZIONE CORRETTIVA

Nel caso fosse necessario, selezionare la modalità START in modo che il controller possa operare fino al raggiungimento della corrente di corto circuito.

1. Controllare l’integrità del cavo dell’alta tensione (H.V.).

2. Rimuovere il cavo dalla pompa ionica e assicurarsi che non ci sia un corto circuito nella pompa o nel cavo.

Ripetere la procedura di accensione del Dual; se il problema persiste, contattare Agilent per la riparazione o sostituzione.

Sono stati rilevati dei valori errati di tensione e corrente sull’uscita H.V.

Questo errore indica un guasto del circuito di controllo H.V.

Il microprocessore del controller Dual ha rilevato che sia la tensione che la corrente non sono presenti sull’uscita

H.V. che doveva essere attiva.

Ripetere la procedura di accensione del Dual; se il problema persiste, contattare Agilent per la riparazione o sostituzione.

ERRORI DI FUNZIONAMENTO DEI MISURATORI 1 O 2

L’interruttore “HV ENABLE” è predisposto su OFF oppure la copertura è stata rimossa dall’unita.

Il microprocessore non rileva l’HW di gestione misuratore.

È stato rilevato un malfunzionamento nel misuratore Eyesys collegato.

1. Predisporre l’interruttore “HV

ENABLE” su ON e quindi ripetere la procedura di accensione.

2. Assicurarsi che la copertura sia installata correttamente.

Spegnere l’alimentatore del controller Dual quindi riaccenderlo.

Se il problema persiste, contattare

Agilent per la riparazione o sostituzione.

1. Controllare il cavo di collegamento tra il controller

Dual ed il misuratore.

2. Assicurarsi che il misuratore funzioni correttamente quando

30/194 Dual Controller User Manual / 87-900-094-01 (I)

Istruzioni per l’uso

Messaggi di errore

1

MESSAGGIO DESCRIZIONE

GAUGE(X)

ERROR

GAUGE NOT

CONNECT

Il misuratore è stato scollegato dal controller Dual.

AZIONE CORRETTIVA

è scollegato dal controller Dual.

Se il problema persiste, contattare Agilent per la riparazione o sostituzione.

Ricollegare il misuratore e ripetere la procedura di alimentazione.

SYSTEM

ERROR

ER 1 ÷ 10

SYSTEM ERRORS

Ad uso del Supporto tecnico Agilent per la diagnostica. Spegnere e riaccendere il controller Dual; se il problema persiste, contattare

Agilent per la riparazione o sostituzione.

Dual Controller User Manual / 87-900-094-01 (I) 31/ 194

1 Istruzioni per l’uso

Messaggi di errore

32/194 Dual Controller User Manual / 87-900-094-01 (I)

Dual Controller User Manual

2

Gebrauchsanleitung

Allgemeines 34

Beschreibung des Controllers 35

Lagerung 37

Vor der Installation 37

Installation

Gebrauch

38

40

Schalter und Anzeigen auf der vorderen Schalttafel 41

Kontrasteinstellung auf dem LCD-Bildschirm des

Controllers mit Ionenpumpe “DUAL” 42

Hintere Schalttafel des Dual-Controllers 44

Bedienung 46

Betriebsarten 46

Stufenbetrieb 47

Einschalten des Controllers von der vorderen Schalttafel

(LOKAL-Modus) 48

Starten der Pumpe 49

Stoppen der Pumpe 49

Wartung

Entsorgung

49

50

Fehlermeldungen 51

Übersetzung der Originalanleitungen

33/194

2 Gebrauchsanleitung

Allgemeines

Allgemeines

Dieser Apparat ist für Fachbetriebe bestimmt. Vor Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten

Zusatzdokumentationen genau lesen. Bei Nichtbeachtung - auch teilweise - der enthaltenen Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und

Mißachtung der einheimischen, hier zur Geltung kommenden

Bestimmungen übernimmt die Firma Agilent keinerlei Haftung.

In den folgenden Abschnitten sind alle erforderlichen Informationen für die Sicherheit des Bedieners bei der Anwendung des Geräts aufgeführt. Detaillierte technische Informationen sind im Anhang

"Technical Information" enthalten.

In dieser Gebrauchsanleitung werden Sicherheitshinweise folgendermaßen hervorgehoben:

WARNUNG! Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf bestimmte

Vorgänge oder Praktiken, die bei unkorrekter Ausführung schwere

Verletzungen hervorrufen können.

VORSICHT! Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam, daß bei Nichteinhaltung Schäden an der Anlage entstehen können.

HINWEIS Die Hinweise enthalten wichtige Informationen, die im Text hervorgehoben werden.

34/194 Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Beschreibung des Controllers

Beschreibung des Controllers

Der Dual-Controller der Firma Agilent ist ein Gerät zur Steuerung von flexiblen Ionenpumpen, das nach den spezifischen Angaben des

Kunden fabrikseitig vorkonfiguriert wird.

Der Dual-Controller kann in folgender Konfiguration geliefert werden:

ƒ

ƒ

ƒ

ƒ

Vordere Schalttafel mit Tastenfeld, Display (16x2) und

Mikroprozessor-Karte

Fern-E/A-Karte

Karte für seriellen Datenaustausch (Option)

Netzgerät (24 V, 20 W) für das Eyesys Gauge (Option)

ƒ

ƒ

Stromversorgungskarte mit integriertem DSP zur Verwaltung der

Ausgangsspannung.

Hochspannungskarte(n)

Tab. 1

BEZEICHNUNG

Dual Modelle

Grundmodell 120 VWs mit 1 HV-Karte m. negativer Polung

Grundmodell 120 VWs mit 2 HV-Karten m. negativer Polung

Grundmodell 120 VWs mit 1 HV-Karte m. positiver Polung

Grundmodell 120 VWs mit 2 HV-Karten m. positiver Polung

Grundmodell 230 VWs mit 1 HV-Karte m. negativer Polung

Grundmodell 230 VWs mit 2 HV-Karten m. negativer Polung

Grundmodell 230 VWs mit 1 HV-Karte m. positiver Polung

Grundmodell 230 VWs mit 2 positiven HV-Karten

Grundmodell 120 VWs mit 1 HV-Karte m. negativer Polung und

RS 232 Karte

Grundmodell 120 VWs mit 2 HV-Karten m. negativer Polung und einer RS 232 Karte

BESTELLNUMMER

929-7000

929-7001

929-7002

929-7003

929-7004

929-7005

929-7006

929-7007

929-7008

929-7009

2

Dual Controller User Manual / 87-900-094-01 (I) 35/ 194

2 Gebrauchsanleitung

Beschreibung des Controllers

BEZEICHNUNG

Grundmodell 120 VWs mit 1 HV-Karte m. positiver Polung und RS 232 Karte

Grundmodell 120 VWs mit 2 HV-Karten m. positiver Polung und einer RS 232 Karte

Grundmodell 230 VWs mit 1 HV-Karte m. negativer Polung und

RS 232 Karte

Grundmodell 230 VWs mit 2 HV-Karten m. negativer Polung und einer RS 232 Karte

Grundmodell 230 VWs mit 1 HV-Karte m. positiver Polung

und RS 232 Karte

Grundmodell 230 VWs mit 2 HV-Karten m. positiver Polung und einer RS 232 Karte

BESTELLNUMMER

929-7010

929-7011

929-7012

929-7013

929-7014

929-7015

Der Dual-Controller kann bis zu 2 Ionenpumpen von 20 l/s bis 500 l/s mit positiver oder negativer Polung steuern. Er gewährleistet eine zuverlässige Ablesung von Druckwerten bis zu 10 -11 Torr und verbessert die Leistung der Pumpe innerhalb des ganzen

Arbeitsbereichs.

Mit zwei optionalen Eyeses Normalen können Druckmessungen unterschiedlicher Genauigkeiten in verschiedenen Bereichen vorgenommen werden.

Der Dual-Controller kann in Modus LOKAL, FERN-E/A und SERIAL

über die Schnittstellen RS 232-422 und 485 gesteuert werden (die

RS232 und RS485 Karte sind Optionen).

HINWEIS Zum Bestellen von Systemen mit RS 422/485 und Eyesys Gauge ein

Verkaufsbüro von Agilent kontaktieren.

36/194 Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Lagerung

2

Wie dem System Steuerbefehle übergeben werden, hängt von der

Betriebsart des Controllers ab:

ƒ Im LOKAL-Modus werden alle Befehle über die vordere

Schalttafel eingegeben.

ƒ

ƒ

Im Modus Fern-E/A kommen alle Befehle über Fern-E/A-Signale

(Relaiskontakte), die an den Stecker für Fernsteuerung auf der

Rückseite angeschlossen sind.

Im SERIAL-Modus kommen die Befehle über einen lokalen

Computer, der an die RS 232-422-485 Schnittstelle angeschlossen ist.

Lagerung

Bei Transport und Lagerung der Controller müssen folgende

Umgebungsbedingungen eingehalten werden:

ƒ Temperatur: -20 °C bis +70 °C

ƒ Rel. Luftfeuchtigkeit: 0-95 % (nicht kondensierend))

Vor der Installation

Der Controller wird mit einer speziellen Schutzverpackung geliefert.

Eventuelle Transportschäden müssen sofort der zuständigen

örtlichen Verkaufsstelle gemeldet werden.

Das Verpackungsmaterial muß korrekt entsorgt werden. Es ist vollständig recyclebar und entspricht der EG-Richtlinie 85/399 für

Umweltschutz.

Dual Controller User Manual / 87-900-094-01 (I) 37/ 194

2 Gebrauchsanleitung

Installation

Abbildung 1

Die Dual-Controller sind fabrikseitig für folgende

Versorgungsspannungen ausgelegt:

ƒ

ƒ

Modelle 929-7000/1/2/3 und 929-7008/09/10/11,

Eingangsspannung 100 - 120 VWs, Frequenz 50/60 Hz

Modelle 929-7004/5/6/7 und 929-7012/13/14/15;

Eingangsspannung 200 - 240 VWs, Frequenz 50/60 Hz

Installation

WARNUNG! Der Dual-Controller wird mit einem Netzkabel mit 3 Leitern und mit einem den internationalen Normen entsprechenden Netzstecker geliefert. Es sollte immer dieses Netzkabel benutzt werden, das an eine vorschriftsmäßig geerdete Steckdose anzuschließen ist, um Stromentladungen zu vermeiden.

Im Inneren des Controllers entstehen hohe Spannungen, die schwere

Schäden verursachen und lebensgefährlich sein können. Vor jedem

Montage- bzw. Wartungseingriff muß deshalb der Netzstecker gezogen werden.

38/194 Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Installation

2

VORSICHT! Der Controller kann auf einen Tisch oder ein Gestell montiert werden. In beiden

Fällen muß eine ungehinderte Zirkulation der Kühlluft durch die im Gehäuse vorne und unten eingelassen Luftöffnungen gewährleistet sein.

Wenn der Controller in einem Gestell montiert wird, MUSS er in einer vier

Rackeinheiten hohen Adapter-Einheit installiert werden, um zu vermeiden, daß der Controller nicht in das Gestell fällt. Die vordere Schalttafel des Dual-

Controllers ist nicht geeignet, das gesamte Gewicht der Einheit zu tragen.

Der Controller darf nicht in Umgebungen installiert u/o benutzt werden, die

Witterungseinflüssen (Regen, Frost, Schnee), Staub und aggressiven Gasen ausgesetzt sind und in denen Explosions- und erhöhte Brandgefahr besteht.

HINWEIS Wenn der Controller in einem Gestell installiert werden soll, müssen alle vier

Füße abmontiert und über- und unterhalb wenigstens 30 mm (1,2 Zoll) Platz gelassen werden.

Während des Betriebs müssen folgende Umgebungsbedingungen eingehalten werden:

ƒ

ƒ

Temperatur: 0 °C to +45 °C

Rel. Luftfeuchtigkeit: 0 - 95 % (nicht kondensierend)

Für den Anschluß des Controllers an die Pumpe muß das optional gelieferte Kabel benutzt werden.

Detailliertere Hinweise zu weiteren Anschlußarten sowie zum

Einsatz von Zusatzkarten finden Sie im Anhang "Technical

Information".

Dual Controller User Manual / 87-900-094-01 (I) 39/ 194

2 Gebrauchsanleitung

Gebrauch

LEITUNG

KABEL PUMPE

PUMPEN-ERDE

Abbildung 2 Erdung

HINWEIS Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen. Wenn die Verbindung unterbrochen wird, wird die Hochspannung deaktiviert. Die

Verriegelung mit dem entsprechenden Gegenstecker schließen, wenn ein Kabel ohne Verriegelungsstecker benutzt wird.

Gebrauch

In diesem Kapitel sind die wichtigsten Betriebsvorgänge aufgeführt.

Für weitere Hinweise bezüglich Anschluß und Montage des bestellbaren Zubehörs verweisen wir auf das Kapitel "USAGE" im

Anhang zu "Technical Information". Vor Benutzung des Controllers müssen sämtliche elektrischen und pneumatischen Anschlüsse ausgeführt und die Betriebsanleitung der angeschlossenen Pumpe durchlesen werden.

WARNUNG! Steht die Pumpe auf einem Tisch, muss auf stabilen Stand geachtet werden, da sonst die Gefahr von Verletzungen und Geräteschäden besteht. Die Pumpe nie einschalten, wenn der Eingangsflansch nicht am System angeschlossen bzw. nicht mit dem Schließflansch abgedeckt ist.

40/194 Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Gebrauch

2

Schalter und Anzeigen auf der vorderen Schalttafel

Die folgende Abbildung zeigt die vordere Schalttafel des Dual-

Controllers und die Tabelle erläutert die Bedeutung und Funktion der Schalter und Anzeigen.

Abbildung 3 Vordere Schalttafel

1

2

3

4

5 von hinten beleuchtetes Flüssigkristall-Display (16 Zeichen x 2 Zeilen) grüne LEDs zur anzeige der gewählten Betriebsart:

ƒ LED LOKAL an, wenn der lokale Modus gewählt ist

ƒ LED SERIELL an, wenn der Modus SERIELL gewählt ist

ƒ LED REMOTE an, wenn der Modus Fern-E/A gewählt ist

Schalter HV ENABLE ist unabhängig von der gewählten Betriebsart aktiv.

Um die HV von der vorderen Schalltafel, den Fern-E/As oder über die serielle Verbindung aus einzuschalten, muss dieser Schalter auf EIN stehen.

Tasten HV1 ein/aus und HV2 ein/aus benutzt zum

Ein-/Ausschalten der Operation der Hochspannungskreise.

LEDs; wenn die LED EIN an ist, ist der betreffende Hochspannungskreis aktiviert. Ist die LED PROT an, wurde für die betreffende Pumpe der

Schutzmodus gewählt.

Dual Controller User Manual / 87-900-094-01 (I) 41/ 194

2 Gebrauchsanleitung

Gebrauch

6 Gruppe von 6 Funktionstasten mit folgenden Funktionen:

ƒ ENTER Taste zum Bestätigen der mit der CHANGE Taste vorgenommenen Wahl

ƒ CHANGE CONFIG Taste zur Anzeige aller verfügbaren Optionen

ƒ MENU Taste zum Zugriff auf das Konfigurationsmenü

ƒ MODE Taste zur Wahl der Betriebsart

ƒ Tasten START PROT 1 und START PROT 2 zur Wahl des

Anlaufschutz-Modus für die betreffende Pumpe

Kontrasteinstellung auf dem LCD-Bildschirm des

Controllers mit Ionenpumpe “DUAL”

Der Controller mit Ionenpumpe “DUAL” ist mit einem LCD-

Bildschirm ausgestattet, der sich auf der vorderen Schalttafel der

Steuereinheit befindet. Bei Eintreten einer der folgenden

Bedingungen muss der Displaykontrast neu geregelt werden, auch wenn er werkseitig voreingestellt ist:

ƒ

ƒ

Die Beleuchtung von hinten ist in Betrieb genommen, aber auf dem Display erscheint kein Buchstabe.

Die Beleuchtung von hinten ist in Betrieb genommen, aber auf dem Display erscheint eine Matrize mit schwarzen Kästchen.

42/194 Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Gebrauch

2

Es muss eingestellt werden.

Abbildung 4

Zur Displaykontrasteinstellung auf den Controller zugreifen und nach dem Bootstrap die ENTER-Taste betätigen, die sich auf der vorderen Schalttafel befindet und diese solange gedrückt halten bis die gewünschte Einstellung erreicht wurde. Dann die Taste “ENTER” loslassen, der Kontrastwert wird dann im Speicher der Einheit abgespeichert werden.

Dual Controller User Manual / 87-900-094-01 (I) 43/ 194

2 Gebrauchsanleitung

Gebrauch

44/194

Abbildung 5

Wenn die Einheit auf die “Modalität yur Kontrasteinstellung” zugreift, erscheint auf dem Display eine Nachricht und die LEDs auf dem Display beginnen zu blinken.

Hintere Schalttafel des Dual-Controllers

Die folgende Abbildung zeigt die Schalter und Anschlußstellen der hinteren Schalttafel des Dual-Controllers. Die gezeigt Konfiguration besteht aus zwei HV-Karten, zwei Karten 'Set Point/Remote Control', einer Karte 'RS 232/422 Computer Interface' und Anschluss zu zwei

Eyesys Gauges.

Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Gebrauch

2

Abbildung 6 Hintere Schalttafel

7

8

5

6

3

4

1 Sicherungsfach

2 HV2 Fischer-Stecker

Verriegelung für das HV-Kabel am HV2-Stecker

HV1 Fischer-Stecker

Verriegelung für das HV-Kabel am HV1-Stecker

37-poliger Stecker für Fern-E/A HV2

37-poliger Stecker für Fern-E/A HV1

9-polige Stecker für Multi Gauge Eyesys

9 9-poliger Stecker der seriellen Schnittstelle

10 Stecker für Netzkabel

11 Hauptschalter

Dual Controller User Manual / 87-900-094-01 (I) 45/ 194

2 Gebrauchsanleitung

Bedienung

Bedienung

Betriebsarten

Der Dual-Controller kann in den folgenden Modi arbeiten:

ƒ LOKAL

ƒ

ƒ

FERN-E/A (Ein-/Ausgang)

SERIELL.

Bei LOKAL werden alle Befehle über die vordere Schaltafel gegeben.

Bei FERN-E/A kommen alle Befehle von einem abgesetzten Computer

über den E/A-Stecker auf der hinteren Schalttafel.

Bei SERIELL kommen alle Befehle von einem externen Computer, der über eine serielle Schnittstelle RS 232-422-485 angeschlossen ist.

HINWEIS Das System speichert, welche Betriebsart gewählt ist, und setzt daher bei

Wiederanlauf nach einem Stromausfall mit der Betriebsart fort, die vor der

Unterbrechung gewählt war.

HINWEIS Wenn eine Betriebsart gewählt ist, nimmt das System nur die in diesem Modus gültigen Befehle an. Es kann aber gleichzeitig Informationen anzeigen und

Signale und Daten von allen Schnittstellen entgegennehmen.

46/194 Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Bedienung

2

Der Controller kann in folgenden Betriebsarten betrieben werden:

ƒ START-Modus

ƒ PROTECTED-Modus

In der Betriebsart START arbeitet der Controller unabhängig vom

Pumpenzustand bei voller Leistung bis zum voreingestellten

Kurzschlußstromwert. Diese Betriebsart muß zur Steuerung von

Pumpen bei Hochdruck gewählt werden.

In der Betriebsart PROTECTED werden der Stromausgangswert des

Controllers begrenzt und die Hochspannung abgeschaltet, sobald der

Strom den voreingestellten Schwellenwert länger als 0,2 Sekunden

überschreitet.

Bei Normalbetrieb ist dies der bevorzugte Modus, da bei Versagen von Ionenpumpe oder Kabel wegen Kurzschluss oder Überlastung der

Starkstrom abschaltet.

Detaillierte Angaben zu den beiden Betriebsarten finden sich im

Anhang “Technical Information".

Stufenbetrieb

Stufenbetrieb muss gewählt werden, um die Pumpenleistung zu erhöhen und bei sehr niedrigem Druck ohne Einfluss des Leckstroms ablesen zu können. Im Stufenbetrieb wählt der Dual-Controller die beste Ausgangsspannung entsprechend dem Pumpeneingangsdruck

(siehe die folgende Abbildung).

Dual Controller User Manual / 87-900-094-01 (I) 47/ 194

2 Gebrauchsanleitung

Bedienung

Abbildung 7 Änderung der Ausgangsspannung in Funktion des Drucks

Einschalten des Controllers von der vorderen

Schalttafel (LOKAL-Modus)

HINWEIS Um die Hochspannung einschalten zu können, muss die externe Verriegelung geschlossen sein (Stecker eingesteckt).

Wenn kein Anschluss nach außen gemacht werden soll, die mit der Einheit gelieferten Brücke zum Schließen einsetzen.

48/194

Zum Einschalten des Controllers und zur Aktivierung von Spannung an den Hochspannungssteckern wie folgt vorgehen:

ƒ

ƒ

Das Kabel von der Pumpe und den Rückkoppelungsstift der

Verriegelung am Hochspannungskabel in die betreffenden Stecker auf der hinteren Schalttafel einsetzen.

Den Netzschalter auf der hinteren Schalttafel auf EIN stellen.

ƒ

ƒ

Den Schalter ENABLE HV auf der vorderen Schalttafel auf EIN stellen.

Die Tasten HV 1/2 ON/OFF drücken (die ON LED geht an).

Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Wartung

2

HINWEIS Wenn nur ein Hochspannungskreis installiert ist, gelten beide Zeilen auf dem

Display für die Pumpe Nr. 1. Sind zwei Kreise installiert, bezieht sich jede auf eine der beiden Pumpen.

Starten der Pumpe

Zum Starten der Pumpe auf die entsprechende Taste HV ON/OFF drücken; die ON LED geht an.

Stoppen der Pumpe

Zum Stoppen der Pumpe auf die entsprechende Taste HV ON/OFF drücken; die ON LED geht aus.

Wartung

Die Dual-Controller sind wartungsfrei. Eventuell erforderliche

Eingriffe müssen von dazu befugtem Fachpersonal ausgeführt werden. Bei Störungen kann der Agilent-Reparaturdienst in

Anspruch genommen werden oder schließen Sie einen Vertrag für

“Agilent Advanced Exchange Service” ab, mit dem ein defekter

Controller gegen einen generalüberholten ausgetauscht wird.

Eine eventuelle Verschrottung muß unter Einhaltung der einschlägigen landesüblichen Vorschriften erfolgen.

Dual Controller User Manual / 87-900-094-01 (I) 49/ 194

2 Gebrauchsanleitung

Entsorgung

Entsorgung

Bedeutung des "WEEE" Logos auf den Etiketten.

Das folgende Symbol ist in Übereinstimmung mit der EU-Richtlinie

WEEE (Waste Electrical and Electronic Equipment) angebracht.

Dieses Symbol (nur in den EU-Ländern gültig) zeigt an, dass das betreffende Produkt nicht zusammen mit Haushaltsmüll entsorgt werden darf sondern einem speziellen Sammelsystem zugeführt werden muss.

Der Endabnehmer sollte daher den Lieferanten des Geräts - d.h. die

Muttergesellschaft oder den Wiederverkäufer - kontaktieren, um den

Entsorgungsprozess zu starten, nachdem er die Verkaufsbedingungen geprüft hat.

50/194 Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Fehlermeldungen

2

Fehlermeldungen

In einigen Störungsfällen zeigt das Selbstdiagnosesystem des

Controllers die in der nachstehenden Tabelle zusammengefaßten

Meldungen an.

Tab. 2

MELDUNG BESCHREIBUNG

HV(X)

ERROR

PANEL

INTERLOCK

HV(X)

ERROR

REMOTE

INTERLOCK

HV(X)

ERROR

CABLE

INTERLOCK

STÖRUNGSBEHEBUNG

Hochspannung durch eine

Verriegelung von der vorderen Schaltfläche oder

Gehäuse ausgeschaltet.

(“HV ENABLE” auf AUS gesetzt oder Gehäuse entfernt)

FEHLER HOCHSPANNUNG 1 ODER 2

1. Den Schalter “HV ENABLE” auf EIN setzen und die Prozedur zum

Einschalten der Hochspannung wiederholen.

2. Sicherstellen, dass das Gehäuse richtig montiert ist.

Hochspannung von einer

Verriegelung von den Fern-

E/As abgeschaltet.

HV von einer Verriegelung eines

Hochspannungskabel abgeschaltet.

1. Sicherstellen, dass die

Rückkoppelungs-Stöpsel mit den

Verriegelungsbrücken installiert sind.

2. Sicherstellen, dass die externe

Verriegelung geschlossen ist.

1. Wenn die Pumpe ein

Hochspannungskabel mit einer

Sicherheitsverriegelung benutzt, sicherstellen, dass der Stecker auf der Pumpenseite richtig eingesetzt ist und der Rückkoppelungsstift auf der Seite des Controllers in die entsprechende Buchse auf der hinteren Schalttafel eingesteckt ist.

2. Wenn die Pumpe ein einpoliges

Hochspannungskabel ohne

Verriegelung benutzt, sicherstellen, dass die Brücke richtig zwischen der

HV-Steckdose des

Verriegelungskabels und Erde eingesetzt ist.

Dual Controller User Manual / 87-900-094-01 (I) 51/ 194

2 Gebrauchsanleitung

Fehlermeldungen

MELDUNG BESCHREIBUNG

HV(X)

ERROR

HV NOT

FOUND

Der Hochspannungskreis kann nicht gefunden werden.

HV(X)

ERROR

HV FAULT

HV(X)

ERROR

HV

OVERTEMP.

Hochspannung wegen

Fehler im

Hochspannungskreis abgeschaltet.

Die Wärmesensoren im

Dual-Controller messen eine Temperatur, die über der Sicherheitsschwelle liegt.

HV(X)

ERROR

REMOTE

I/O

NOT FOUND

HV(X)

ERROR

R. I/O

FAULT

Die Karte für Fern-E/As kann nicht gefunden werden.

Fehler im Kreis für Fern-

E/As

STÖRUNGSBEHEBUNG

Die Einschaltprozedur für Dual-Controller-

Hochspannung wiederholen. Bleibt der

Fehler bestehen, Agilent zwecks

Reparatur oder Austausch kontaktieren.

Agilent zwecks Reparatur oder Austausch kontaktieren.

1. Sicherstellen, dass die

Umgebungstemperatur nicht über der für den Dual-Controller zulässigen Höchsttemperatur von 45

ºC liegt.

2. Sicherstellen, dass die

Ventilationsschlitze im Gehäuse nicht behindert sind.

3. Sicherstellen, dass die

Ventilatorflügel sich frei drehen können und die im Dual-Controller umgeleitete Luft nicht durch Staub oder Fremdkörper blockiert ist.

Warten Sie einige Minuten, bis die

Temperatur im Gerät gesunken ist, und wiederholen die Prozedur zum

Einschalten der Hochspannung.

Die Einschaltprozedur für Dual-Controller-

Hochspannung wiederholen. Bleibt der

Fehler bestehen, Agilent zwecks

Reparatur oder Austausch kontaktieren.

1. Sicherstellen, dass die externen

Anschlüsse der Fern-E/As so verbunden sind wie in diesem

Handbuch angegeben.

2. Die Einschaltprozedur für Dual-

Controller-Hochspannung wiederholen. Bleibt der Fehler bestehen, Agilent zwecks Reparatur oder Austausch kontaktieren.

52/194 Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Fehlermeldungen

2

MELDUNG BESCHREIBUNG

HV(X)

ERROR

PROTECT

HV(X)

ERROR

SHORT

CIRCUIT

Bei gewählter Betriebsart

“PROTECT” trat ein

Überstrom auf.

Im

Hochspannungsausgang wurde ein Kurzschluss entdeckt.

STÖRUNGSBEHEBUNG

Wenn nötig den START-Modus wählen, so dass der Controller arbeiten kann, bis der Kurzschluss-Strom erreicht wird

1. Die Unversehrtheit der

Hochspannungskabel prüfen.

2. Das Kabel von der Ionenpumpe abnehmen und prüfen, ob es in der

Pumpe oder im Kabel einen

Kurzschluss gibt.

Die Einschaltprozedur für Dual-Controller-

Hochspannung wiederholen. Bleibt der

Fehler bestehen, Agilent zwecks

Reparatur oder Austausch kontaktieren.

HV(X)

ERROR

OVER

VOLT/CURR

HV(X)

ERROR

ZERO MEAS

Im

Hochspannungsausgang wurden falsche

Spannungs- und

Stromwerte entdeckt.

Dieser Fehler zeigt falsches Funktionieren des

Hochspannungs-

Steuerkreises an.

Der Mikroprozessor des

Dual-Controllers hat festgestellt, das an dem

Hochspannungsausgang, der aktiv sein sollte, sowohl Spannung als auch

Strom fehlen.

Die Einschaltprozedur für Dual-Controller-

Hochspannung wiederholen. Bleibt der

Fehler bestehen, Agilent zwecks

Reparatur oder Austausch kontaktieren.

GAUGE(X)

ERROR

PANEL

INTERLOCK

GAUGE(X)

ERROR

GAUGE NOT

FOUND

GAUGE(X)

Der Schalter “HV ENABLE” steht auf AUS oder das

Gehäuse wurde von der Einheit entfernt.

Der Mikroprozessor kann die

HW zur Gauge Steuerung nicht finden.

FEHLER GAUGE 1 ODER GAUGE 2

1. Den Schalter “HV ENABLE” auf

EIN setzen und die Prozedur zum Einschalten der

Hochspannung wiederholen.

2. Sicherstellen, dass das

Gehäuse richtig montiert ist.

Das Netzteil des Dual-Controller aus- und wieder einschalten. Bleibt der

Fehler bestehen, Agilent zwecks

Reparatur oder Austausch kontaktieren.

Im angeschlossenen Eyesys 1. Das Verbindungskabel

Dual Controller User Manual / 87-900-094-01 (I) 53/ 194

2 Gebrauchsanleitung

Fehlermeldungen

MELDUNG BESCHREIBUNG

ERROR

GAUGE

FAULT

Gauge wurde eine Störung entdeckt.

STÖRUNGSBEHEBUNG zwischen Dual-Controller und

Gauge prüfen.

2. Sicherstellen, dass das

Eichnormal richtig arbeitet, wenn es vom Dual Controller getrennt ist. Bleibt der Fehler bestehen, Agilent zwecks

Reparatur oder Austausch kontaktieren.

54/194 Dual Controller User Manual / 87-900-094-01 (I)

Gebrauchsanleitung

Fehlermeldungen

2

MELDUNG BESCHREIBUNG

GAUGE(X)

ERROR

GAUGE NOT

CONNECT

Das Eichnormal wurde vom

Dual Controller getrennt.

SYSTEM

ERROR

ER 1 ÷ 10

STÖRUNGSBEHEBUNG

Das Eichnormal wieder anschließen und die Einschaltprozedur wiederholen.

SYSTEMFEHLER

Nur für Diagnosen durch den Agilent Service. Den Hauptschalter des

Dual-Controllers aus – und wieder einschalten. Bleibt der Fehler bestehen, Agilent zwecks Reparatur oder Austausch kontaktieren.

Dual Controller User Manual / 87-900-094-01 (I) 55/ 194

2 Gebrauchsanleitung

Fehlermeldungen

56/194 Dual Controller User Manual / 87-900-094-01 (I)

Dual Controller User Manual

3

Mode d’emploi

Indications Generales 59

Description du controleur 60

Emmagasinage 62

Preparation pour l’installation 62

Installation 63

Utilisation 65

Contrôles ou indicateurs du panneau frontal du contrôleur Dual 66

Procédure de réglage du contraste de l’écran LCD du el

Contrôleur à pompe ionique “DUAL” 67

Tableau dorsal du Dual Contrôleur 69

Utilisation 71

Modes de fonctionnement 71

Mode de fonctionnement Step 72

Allumage du contrôleur du panneau frontal (modalité

LOCAL) 73

Démarrage de la pompe 74

Arrêt de la pompe 74

Traduction de la mode d’emploi originale

57/194

3 Mode d’emploi

Fehlermeldungen

Entretien 74

Mise au rebut 75

Messages d’erreur 76

58/194 Dual Controller User Manual / 87-900-094-01 (I)

Mode d’emploi

Indications Generales

Indications Generales

Cet appareillage a été conçu en vue d'une utilisation professionnelle.

Il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication supplémentaire fournie par Agilent, avant l'utilisation de l'appareillage. Agilent décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire aux réglementations nationales spécifiques.

Les paragraphes suivants donnent toutes les indications nécessaires

à garantir la sécurité de l'opérateur pendant l'utilisation de l'appareillage. Des renseignements plus détaillés se trouvent dans l'appendice "Technical Information".

Cette notice utilise les signes conventionnels suivants:

3

AVERTISSEMENT! Les messages d'avertissement attirent l'attention de l'opérateur sur une procédure ou une manoeuvre spéciale qui, si elle n'est pas effectuée correctement, risque de provoquer de graves lésions.

ATTENTION! Les messages d'attention apparaissent avant certaines procédures qui, si elles ne sont pas observées, pourraient endommager sérieusement l'appareillage.

NOTE Les notes contiennent des renseignements importants, isolés du texte.

Dual Controller User Manual / 87-900-094-01 (I) 59/ 194

3 Mode d’emploi

Description du controleur

Description du controleur

Le contrôleur Dual de la Agilentt est un controleur pour les pompes ioniques modulaires et flexibles. L’unité est fabriquée en usine selon les exigences du client.

Le contrôleur Dual de la Agilentt est disponible avec:

ƒ Un panneau frontal avec clavier, display (16x2) et carte processeur.

ƒ

ƒ

Carte de I/O éloignée.

Carte de communication sérielle (partielle).

ƒ

ƒ

Alimentateur à 24 Vcc, 20 W, pour le mesureur Eyesys Gauge

(optionnel).

Carte d’alimentation avec DSP intégré pour la gestion des tensions en sortie.

ƒ Carte de haute tension.

Les configurations sont indiquées dans le tableau suivant:

Tab. 1

DESCRIPTION

Modèles Dual

Unité de base à 120 Vac avec 1 carte haute tension

(haut voltage) HV négative

Unité de base à 120 Vac avec 2 cartes haute tension

HV négative

Unité de base à 120 Vac avec 1 carte haute tension

HV positive

Unité de base à 120 Vac avec 2 carte haute tension

HV positive

Unité de base à 230 Vac avec 1 carte haute tension

Hv négative

Unité de base à 230 Vac avec 2 cartes haute tension

HV négative

NUMERO DE PIÈCE

929-7000

929-7001

929-7002

929-7003

929-7004

929-7005

60/194 Dual Controller User Manual / 87-900-094-01 (I)

Mode d’emploi

Description du controleur

3

DESCRIPTION

Unité de base à 230 Vac avec 1 carte haute tension

HV positive

Unité de base à 230 Vac avec 2 cartes haute tension

HV positive

Unité de base à 120 Vac avec 1 carte haute tension

HV négative et carte RS 232

Unité de base à 120 Vac avec 2 cartes haute tension

HV négative et 1 carte RS 232

Unité de base à 120 Vac avec 1 carte haute tension

HV positive et carte RS 232

Unité de base à 120 Vac avec 2 cartes haute tension

HV positive et 1 carte RS 232

Unité de base à 230 Vac avec 1 carte haute tension

HV négative et 1 carte RS 232

Unité de base à 230 Vac avec 2 cartes haute tension

HV négative et 1 carte RS 232

Unité de base à 230 Vac avec 1 carte haute tension

HV positive et 1 carte RS 232

Unité de base à 230 Vac avec 2 cartes haute tension positive et 1 carte RS 232

NUMERO DE PIÈCE

929-7006

929-7007

929-7008

929-7009

929-7010

929-7011

929-7012

929-7013

929-7014

929-7015

Le contrôleur Dual est en mesure de gérer jusqu’à 2 pompes ioniques de 20 l/s à 500 l/s avec polarité positive ou négative. Il permet d’effectuer des lectures fiables de pression jusqu’à 10 11 Torr en améliorant ainsi les prestations de la pompe en ce qui concerne le champ entier opérationnel.

Avec 2 mesureurs Eyesys Gauges optionnels l’on peut effectuer la lecture de pression avec les différentes précisions et les différents champs de mesure.

Le contrôleur Dual peut être géré en mode LOCAL, ELOIGNE I/O ET

SERIEL par l’intermédiaire des interfaces RS 232-422 et 485 (les interfaces RS422 et RS485 sont optionnelles).

Dual Controller User Manual / 87-900-094-01 (I) 61/ 194

3 Mode d’emploi

Emmagasinage

NOTE Contacter le bureau de ventes Agilent pour commander les systèmes avec

RS 422/485 et les mesureurs Eyesys Gauge.

Les modalités selon lesquelles les commandes opérationnelles sont fournies dépendent de la modalité opérationnelle où se trouve le contrôleur:

ƒ Dans le mode LOCAL toutes les commandes sont fournies par l’intermédiaire du panneua frontal.

ƒ

ƒ

Dans le mode ELOIGNE I/O toutes les commandes sont fournies par l’intermédiaire de signaux I/O (relay contacts) directement sur le connecteur Remote Control placé sur le panneau postérieur.

Dans le mode SERIEL toutes les commandes sont fournies par l’intermédiaire d’un ordinateur locale relié à l’interface

RS 232-422-485.

Emmagasinage

Pour transporter et emmagasiner le contrôleur il faut observer les conditions suivantes d’environnement:

ƒ température: de -20 °C à +70 °C

ƒ humidité relative: 0 - 95 % (non condensante).

Preparation pour l’installation

Le contrôleur est fourni dans un emballage de protection spécial; si l'on constate des dommages pouvant s'être produits pendant le transport, contacter tout de suite le bureau de vente local. Pendant l'opération d'ouverture de l'emballage, veiller tout particulièrement à ne pas laisser tomber le contrôleur et à ne lui faire subir aucun choc.

Le matériel est entièrement recyclable et il est conforme aux directives CEE 85/399 en matière de protection de l'environnement.

62/194 Dual Controller User Manual / 87-900-094-01 (I)

Mode d’emploi

Installation

3

Figure 1 Emballage du contrôleur

Le contrôleur Dual est fabriqué en usine afin de pouvoir fonctionner selon les voltage suivants d’alimentation:

ƒ Modèles 929-7000/1/2/3 et 929-7008/09/10/11, tension d’entrée de 100 à 120 Vca, fréquence de 50/60 Hz.

ƒ Modèles 929-7004/5/6/7 et 929-7012/13/14/15; tension d’entrée de 200 à 240 Vca, fréquence de 50/60 Hz.

Installation

AVERTISSEMENT! Le contrôleur Dual est pourvu d’un câble d’alimentation à trois fils pourvu d’une prise à norme internationale. Utiliser toujours ce câble d’alimentation en introduisant la prise dans une prise d’alimentation munie de liaison au sol afin d’éviter les décharges électrostatiques.

A l’intérieur du contrôleur se développent des hautes tensions qui peuvent provoquer des lésions graves ou carrément la mort. Avant d’effectuer n’importe quelle opération d’installation ou d’entretien du contrôleur, le débrancher de la prise électrique.

Dual Controller User Manual / 87-900-094-01 (I) 63/ 194

3 Mode d’emploi

Installation

ATTENTION! Le contrôleur peut être utilisé soit comme unité de table que comme module installé dans une armoire. De toute façon, il doit être placé de manière à ce que l’air puisse circuler librement à travers les trous d’aération présents dans la couverture.

Lorsque le contrôleur est utilisé comme module armoire il DOIT être installé dans un adaptateur d’une hauteur de quatre unités armoire afin d’éviter qu’il ne tombe à l’intérieur de l’armoire même. Le panneau frontal du contrôleur n’est pas prévu pour supporter le poids de l’unité. Ne pas installer ou utiliser le contrôleur Dual dans des milieux exposés aux agents atmosphériques (pluie, neige, glace). En présence de poussière, de gaz corrosifs ou dans des milieux explosifs ou à fort risque d’inflammabilité.

NOTE Si le contrôleur est installé dans une armoire, enlever les quatre pieds de manière à ce qu’il soit placé avec au moins 30 mm d’espace en haut et en bas.

Pendant le fonctionnement, il est nécessaire de respecter les conditions d’environnement suivantes:

ƒ température: de 0 °C à +45 °C

ƒ humidité relative: 0 – 90 % (non condensante).

Pour relier le contrôleur à la pompe, utiliser le câble spécial fourni en option.

Voir l'appendice "Technical Information" pour toutes informations détaillées sur ces connexions et sur d'autres connexions ainsi que sur l'installation des cartes optionnelles.

64/194 Dual Controller User Manual / 87-900-094-01 (I)

CABLE

Mode d’emploi

Utilisation

3

POMPE

LIGNE

BRANCHEMENT

DE TERRE

DE LA POMPE

Figure 2 Connexions des masses

NOTE L’interlock du câble est serré sur la masse de la pompe. Si le branchement est coupé, la haute tension est interrompue. Lorsqu’on utilise un câble sans connecteur d’interlock, fermer l’interlock avec le connecteur de fermeture prévu

à cet effet.

Utilisation

Dans ce paragraphe, on indique les principales procédures opérationnelles. Pour tous autres détails et pour les procédures concernant des connexions ou des éléments en option, se reporter au paragraphe "USE" de l'appendice "Technical Information". Avant d'utiliser le contrôleur, effectuer toutes les connexions électriques et pneumatiques et se reporter à la notice de la pompe connectée.

AVERTISSEMENT! Afin d’éviter des accidents aux personnes et à l’appareillage, dans le cas où la pompe doit être placée sur une table, vérifier qu’elle soit stable. Ne jamais faire fonctionner la pompe si la bride d’entrée n’est pas reliée au système ou n’est pas fermée avec la bride de fermeture.

Dual Controller User Manual / 87-900-094-01 (I) 65/ 194

3 Mode d’emploi

Utilisation

Contrôles ou indicateurs du panneau frontal du contrôleur Dual

Le tableau qui suit indique la définition et la fonctionnalité des contrôles et des indicateurs.

66/194

Figure 3 Commandes du Tableau Frontal

1

2

3

4

Display à cristaux liquides verso illuminé, 16 caractères x 2 lignes

LED verts qui indiquent la modalité opérationnelle sélectionnée:

ƒ LED local allumé lorsque la modalité opérationnelle LOCAL est sélectionnée

ƒ LED Sériel allumé lorsque la modalité opérationnelle SERIELLE est sélectionnée

ƒ LET Eloigné allumé lorsque la modalité opérationnele ELOIGNE I/O est sélectionnée

Interrupteur HV ENABLE actif indépendamment de la modalité opérationnelle sélectionnée. Pour alimenter la haute tension du panneau de contrôle du REMOTE I/O ou de la ligne sérielle, il faut que l’interrupteur HV ENABLE soit placé dans la position ON.

HV1 on/off et HV2 on/off boutons, utilisés pour brancher/débrancher la fonctionnalité des circuits de haute tension

Dual Controller User Manual / 87-900-094-01 (I)

5

6

Mode d’emploi

Utilisation

3

LEDs; lorsque le LED ON est allumé, le circuit relatif HV (haute tension/ haut voltage) est branché, lorsque le LED PROT eest allumé, la modalité opérationnelle pour la pompe correspondante a été sélectionnée.

Groupe de six boutons de fonction avec les caractéristiques suivantes

ƒ bouton ENTER utilisé pour confirmer une sélection qui a été effectuée avec le bouton CHANGE

ƒ bouton CHANGE CONFIG utilisé pour visualiser toutes les options diponibles

ƒ bouton MENU utilisé pour entrer dans le menu de configuration

ƒ bouton MODE utilisé pour sélectionner la modalité opérationnelle

ƒ boutons START PROT 1 et START PROT 2 utilisés pour sélectionner la modalité Start Protect pour la pompe correspondante

Procédure de réglage du contraste de l’écran LCD du el Contrôleur à pompe ionique “DUAL”

Le contrôleur à pompe ionique “DUAL” est pourvu d’un écran LCD, installé dans le panneau antérieur de l’unité. Le contraste de l’afficheur nonobstant le fait qu’il est déjà établi à l’usine, aura besoin d’être réglé si une des conditions suivantes a lieu:

ƒ La retroillumination est active mais sur l’afficheur n’est affiché aucun caractère.

ƒ La retroillumination est active mais sur l’afficheur est affichée une matrice à carreaux noirs.

Dual Controller User Manual / 87-900-094-01 (I) 67/ 194

3 Mode d’emploi

Utilisation

Il est nécessaire d’effectuer la procédure de règalage

Figure 4

Pour effectuer la procédure de réglage du contraste de l’écran, allumer le contrôleur et, à la fin de l’initialisation appuyer sur la touche ENTER placée sur la panneau antérieur, en gardant appuyé jusqu’à l’obtention désirée. En laissant la touche “ENTER”, la valeur de contraste sera sauvegardée dans la mémoire de l’unité.

68/194 Dual Controller User Manual / 87-900-094-01 (I)

Mode d’emploi

Utilisation

3

Figure 5

Lorsque l’unité arrive à la “modalité de réglage du contraste”, l’afficheur affiche le relatif message et les LED de l’afficheur commencent à clignoter.

Tableau dorsal du Dual Contrôleur

Le dessin suivant reporte les contrôles et connecteurs sur le panneau postérieur du contrôleur Dual. La configuration reportée dans le schéma consiste en deux cartes à haut voltage (HV) de deux cartes

Set Point/Remote Control, une carte d’interface RS 232/422 et la liaison à deux mesureurs Eyesys Gauges.

Dual Controller User Manual / 87-900-094-01 (I) 69/ 194

3 Mode d’emploi

Utilisation

70/194

7

8

9

5

6

3

4

Figure 6 Tableau dorsal

1 Siège porte fusible

Interlock du câble HV sur le connecteur HV2

Connecteur Fischer HV1 r

Interlock du câble HV cable sur le connecteur HV1

Connecteur à37-pin pour Eloigné I/O HV2

Connecteur à37-pin pour Eloigné I/O HV1

Connecteur à 9-pin Multipour mesureurs Eyesys multiples

Connecteur d’interface à 9-pin

11 Interrupteur d’alimentation principal

Dual Controller User Manual / 87-900-094-01 (I)

Mode d’emploi

Utilisation

3

Utilisation

Modes de fonctionnement

Le Dual contrôleur peut fonctionner dans les modalités suivantes:

ƒ

ƒ

LOCAL

ELOIGNE I/O (input/output)

ƒ SERIEL.

Dans le mode LOCAL toutes les commandes sont activées par le panneau frontal.

Dans le mode ELOIGNE I/O toutes les commandes sont activées par un ordinateur éloigné relié par l’intermédiaire d’un connecteur de input/output placé sur le panneau postérieur .

Dans le mode SERIEL toutes les commandes sont activées par un ordinateur externe relié par l’intermédiaire d’une interface sérielle

RS 232-422-485.

NOTE La modalité opérationnelle sélectionnée est mémorisée par le système et donc dès le rétablissement de la tension suite à sa chute, le contrôleur Dual reviendra

à la modalité opérationnelle où il était au moment de la chute de tension.

NOTE Lorsque une modalité opérationnelle est sélectionnée, le systènme acceptera uniquement les commandes de la modalité relative mais il est en mesure de visualiser des informations et d’acqyérir des signaux et des données contemporairement de toutes les interfaces

Dual Controller User Manual / 87-900-094-01 (I) 71/ 194

3 Mode d’emploi

Utilisation

L’unité est projetée afin de fonctionner dans les modalités suivantes:

ƒ mode START

ƒ mode PROTECTED

Dans le mode START le contrôleur fournit toute la puissance, indépendamment des conditions de la pompe jusqu’à atteindre le courant de court circuit. Cette modalité de fonctionnement doit être utilisée pour actionner la pompe à haute pression.

Dans le mode PROTECTED le contrôleur limite le courant à la sortie et éteint la haute tension lorsque la valeur du courant dépasse le seuil pendant plus de 0,2 secondes.

Dans des conditions de fonctionnement normal, on préfère utiliser cette modalité puisque, en cas de panne de pompe ionique ou câble causée par un court circuit ou une haute charge, la haute tension s’éteint.

Se référer à l’appendice "Technical Information" pour des informations détaillées sur les modalités opérationnelles.

Mode de fonctionnement Step

Le mode Step doit être choisi pour améliorer les performances de la pompe et effectuer des lectures à une pression très basse sans influer sur le courent de dispersion. Dans le mode Step le Dual contrôleur choisit la tension en sortie la plus convenable selon la pression dans la pompe (voir le dessin suivant).

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Mode d’emploi

Utilisation

3

Figure 7 Changement de la tension en sortie par opposition à la pression

Allumage du contrôleur du panneau frontal

(modalité LOCAL)

NOTE Pour allumer le haut voltage( H.V). il faut que l’interlock externe soit fermé

(connecteur branché).

Au cas où aucune connexion externe n’est effectuée, brancher les pontets de fermeture interlock en dotation avec l’unité.

Procéder comme il suit pour alimenter le contrôleur et rendre apte la tension sur les connecteurs de haut voltage (HV):

ƒ

ƒ

Introduire le câble provenant de la pompe et le pin d’interlock de fermeture du câble HV dans les connecteurs relatifs sur le panneau postérieur.

Disposer l’interrupteur d’alimentation sur le panneau postérieur en positon ON.

ƒ

ƒ

Disposer l’interrupteur ENABLE HV sur le panneau antérieur en position ON.

Appuyer sur les boutons HV 1/2 ON/OFF (ON LED s’allume).

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3 Mode d’emploi

Entretien

NOTE Avec un seul circuit H.V installé les lignes du display sont dédiées à la pompe numéro un, tandis qu’avec deux circuits installés, chaque ligne est dédiée à une pompe différente.

Démarrage de la pompe

Pour faire démarrer la pompe, appuyer sur le bouton HV ON/OFF; le ON LED s’allumera.

Arrêt de la pompe

Pour arrêter la pompe appuyer sur le bouton HV ON/OFF; le ON LED s’éteindra.

Entretien

Le contrôleur Dual n’a besoin d’aucun entretien. N’importe quel entretien sur l’unité doit être effectuè par un personnel technique autorisé. En cas de panne contacter le Support technique Agilent ou bien s’abonner au Agilent Advanced Exchange Service” où le contrôleur endommagé est remplacé par un contrôleur reconditionné.

En cas de mise au rebut du contrôleur, procéder à son élimination conformément aux réglementations nationales en la matière.

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Mode d’emploi

Mise au rebut

3

Mise au rebut

Signification du logo "WEEE" figurant sur les étiquettes.

Le symbole ci-dessous est appliqué conformément à la directive CE nommée "WEEE".

Ce symbole (uniquement valide pour les pays de la Communauté

européenne) indique que le produit sur lequel il est appliqué NE doit

PAS être mis au rebut avec les ordures ménagères ou les déchets industriels ordinaires, mais passer par un système de collecte sélective.

Après avoir vérifié les termes et conditions du contrat de vente, l’utilisateur final est donc prié de contacter le fournisseur du dispositif, maison mère ou revendeur, pour mettre en œuvre le processus de collecte et mise au rebut.

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3 Mode d’emploi

Messages d’erreur

Messages d’erreur

Pour certains types de panne, le contrôleur procède à un autodiagnostic et affiche l'un des messages d'erreur indiqués dans le tableau suivant.

Tab. 2

MESSAGE DESCRIPTION

HV(X)

ERROR

PANNELL

INTERLOCK

HV(X)

ERROR

REMOTE

INTERLOCK

HV(X)

ERROR

CABLE

INTERLOCK

HV(X)

ERROR

HV NOT

FOUND

INTERVENTION

PANNES DE HAUTE TENSION 1 OU 2

La haute tension HV a été

éteinte par un interlock reçu par le panneau frontal ou par la couverture.

(l’interrupteur « HV

ENABLE » disposé sur OFF ou bien couverture enlevée par l’unité)

1. Placer l’interrupteurV ENABLE” sur

ON et répéter la procédure d’allumage de la haute tension.

2. Vérifier que la couverture soit installée correctement.

La haute tension HV a été

éteinte par un interlock reçu par le Remote I/O.

La haute tension HV a été

éteinte à cause d’un interlock du câble HV

Le cuircuit de haute tension HV n’a pas été relevé.

1. Contrôler que soient installés les interrupteurs de fermeture avec les interlock externes avec pontets.

2. Vérifier que l’interlock externe soit fermé.

1. Si la pompe utilise un câble HV avec interlock de sécurité, contrôler que le connecteur à l’extrémité de la pompe soit introduit correctement et que le pin de fermetrure à l’extrémité de l’unité soit introduit dans le connectur dur le panneau postérieur.

2. Si la pompe utilise un câble HV à pôle simple sans interlock, vérifier que le pontet soit correctement introduit entre la prise du câble HV interlock et le sol.

Répéter la procédure d’allumage du contrôleur Dual; si le problème persiste, contacter Agilent pour la réparation ou la substitution.

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Mode d’emploi

Messages d’erreur

3

MESSAGE DESCRIPTION

HV(X)

ERROR

HV FAULT

La haute tension a été

éteinte à cause d’un dysfonctionnement dans le circuit HV.

HV(X)

ERROR

HV

OVERTEMP.

Les capteurs de température à l’intérieur du contrôleur Dual ont relevé une température qui dépasse les limites de sécurité.

HV(X)

ERROR

REMOTE

I/O

NOT FOUND

HV(X)

ERROR

R. I/O

FAULT

HV(X)

ERROR

PROTECT

La carte Remote I/O n’a pas été relevée.

Dysfonctionnement dans le circuitRemote I/O

La protection de surcourant a été déclenchée lorsque la modalité opérationnelle

“PROTECT” a été

INTERVENTION

Conctater Agilent pour la réparation ou la substitution.

1. Vérifer que la température environnante durant le fonctionnement du contrôleru ne soit pas supérieure à 45 º.

2. Vérifier que les trous d’aération sur la couverture ne soient pas obstrués.

3. Vérifier que les palettes du ventilateur tournent librement et que l’air apporté à l’intérieur du contrôleur Dual ne soit pas obstrué par la poussière ou par un matériau

étranger.

Attendre quelques minutes de manière à ce que la température interne de l’unité se refroidisse et ensuite répéter la procédure d’allumage de la haute tension

HV.

Répéter la procédure d’allumage du contrôleur Dual; si le problème subsiste, contacter Agilentt pour la réparation ou la substitution.

1. Vérifier que les connecteurs externes Remote I/O soient reliés comme décrit dans ce document.

2. Répéter la procédure d’allumage du contrôleur Dual; si le problème persiste, contacter Agilentt pour la réparation ou la substitution.

Si nécessaire, sélectionner le mode

START de manière à ce que le contrôleur puisser atteindre le courant de court circuit.

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3 Mode d’emploi

Messages d’erreur

MESSAGE DESCRIPTION selectionnée.

HV(X)

ERROR

SHORT

CIRCUIT

Un court circuit à la sortie

HV a été relevé.

INTERVENTION

1. Contrôler l’intégrité du câble de la haute tension.

2. Détacher le câble de la pompe ionique et vérifier s’il y a un cout circuit dans la pompe ou dans le câble.

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Mode d’emploi

Messages d’erreur

3

MESSAGE DESCRIPTION

HV(X)

ERROR

OVER

VOLT/CURR

Des valeurs erronées de voltage et de courant sur la sortie HV ont été relevées.

Cette erreur indique un dysfonctionnement du circuit de contrôle HV

INTERVENTION

Répéter la procédure d’allumage du contrôleur Dual; si le problème persiste contacter Agilentt pour la réparation ou la substitution.

HV(X)

ERROR

ZERO MEAS

Le microprocesseur du contrôleur Dual a relevé que soit la tension que le courant ne sont pas présents à la sortie HV qui devait être active.

Répéter la procédure d’allumage du contrôleur Dual; si le problème persiste, contacter Agilent pour la réparation ou la substitution.

GAUGE(X)

ERROR

PANEL

INTERLOCK

GAUGE(X)

ERROR

GAUGE NOT

FOUND

GAUGE(X)

ERROR

GAUGE

FAULT

GAUGE(X)

ERROR

GAUGE NOT

CONNECT

ERREURS DE FONCTIONNEMENT DES MESUREURS 1 OU 2

L’interrupteur “HV ENABLE” est placé sur OFF ou bien la couverture a été enlevée par l’unité

Le microprocesseur ne relève pas l’HW de gestion mesureur.

1. Placer l’interrupteur “HV

ENABLE” sur ON et répéter la procédure d’allumage.

2. Vérifier que la couverture soit installée correctement

Eteindre l’alimentateur du contrôleur

Dual et ensuite le réallumer. Si le problème persiste, contacter Agilent pour la réparation ou la substitution.

Un dysfonctionnement a été relevé dans le mesureur

Eyesys.

Le mesureur a été débranché par le contrôleur Dual

1. Vérifier le câble de liaison entre le contrôleur et le mesureur.

2. Vérifier que le mesureur fonctionne correctement losrsqu’il est débranché du contrôleur Dual.Si le problème persiste, contacter Agilent pour la réparation ou la substitution.

Rebrancher le mesureur et répéter la procédure d’alimentation

SYSTEM

ERROR

SYSTEM ERRORS

Aux fins du Support technique Agilentt pour le diagnostic.Eteindre et allumer le contrôleur Dual; si le problème persiste, contacter Agilent

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3 Mode d’emploi

Messages d’erreur

MESSAGE DESCRIPTION

ER 1 ÷ 10

INTERVENTION pour la réparation ou la substitution.

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Dual Controller User Manual

4

Instructions for Use

General Information 83

Controller Description 84

Storage 86

Prior to Installation 86

Installation

Usage 89

87

Controls and Indicators on the Dual Controller Front

Panel 90

Sequence to Adjust the LCD Contrast of the “DUAL” Ion

Pump Controller 91

Rear Panel of the Dual Controller 93

Operating Procedures 95

Operating Modes 95

Step Mode of Operation 96

Powering On the Controller from the Front Panel (LOCAL

Mode) 97

Starting the Pump 98

Stopping the Pump 98

Original Instructions

81/194

4 Instructions for Use

Messages d’erreur

Maintenance 98

Disposal 99

Error Messages 100

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Instructions for Use

General Information

4

General Information

This equipment is intended for professional use. Prior to using this equipment the user must carefully read this Instruction Manual in its entirety and any additional information provided by Agilent. Agilent declines all responsibility for damage caused by the total or partial misuse of the instructions provided herein, by the improper use of the equipment by untrained personnel, by unauthorized interventions or by negligence in complying with any specific national rule or regulation.

The following sections provide you with all the information needed to guarantee the operator’s safety when using the equipment. Detailed information is provided in the appendix entitled “Technical

Information”.

The following conventions are used in this manual:

WARNING! The warning messages call the operator’s attention to a specific procedure or operation that could cause serious injury if not performed correctly.

CAUTION! The caution messages are provided before procedures that could cause damage to the equipment if not complied with.

NOTE Notes provide you with important information extracted from the text.

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4 Instructions for Use

Controller Description

Controller Description

Agilent’s Dual controller is a flexible ion pump controller, which is pre-configured at the factory according to the customer’s requirements.

The Dual controller is available with:

ƒ Front panel with keypad, display (16x2) and microprocessor card.

ƒ

ƒ

Remote I/O card.

Serial data exchange card (optional).

ƒ

ƒ

24 Vdc, 20 W, power supply unit for the Eyesys Gauge (optional).

Power supply card with integrated DSP for output voltage management.

ƒ High voltage card(s).

The configurations are listed in the following table:

Tab. 1

84/194

Dual Models

120 Vac basic unit with 1 negative HV

120 Vac basic unit with 2 negative HV’s

120 Vac basic unit with 1 positive HV

120 Vac basic unit with 2 positive HV’s

230 Vac basic unit with 1 negative HV

230 Vac basic unit with 2 negative HV’s

230 Vac basic unit with 1 positive HV

230 Vac basic unit with 2 positive HV’s

120 Vac basic unit with 1 negative HV and RS 232 card

120 Vac basic unit with 2 negative HV cards and one

RS 232 card.

120 Vac basic unit with 1 positive HV and RS 232 card

929-7000

929-7001

929-7002

929-7003

929-7004

929-7005

929-7006

929-7007

929-7008

929-7009

929-7010

Dual Controller User Manual / 87-900-094-01 (I)

Instructions for Use

Controller Description

4

NOTE

120 Vac basic unit with 2 positive HV cards and one

RS 232 card.

230 Vac basic unit with 1 negative HV and RS 232 card

230 Vac basic unit with 2 negative HV cards and one

RS 232 card.

230 Vac basic unit with 1 positive HV and RS 232 card

230 Vac basic unit with 2 positive HV cards and one

RS 232 card.

929-7011

929-7012

929-7013

929-7014

929-7015

The Dual controller can control up to two ion pumps, from 20 l/s to

500 l/s with positive or negative polarity.

Reliable pressure are measured at up to 10 -11 Torr. Variable voltages allow the pump performance to be optimized on the entire operational field.

With two optional Eyesys Gauges, pressure readings can be taken with different accuracy and fields of measurement.

The Dual controller can be controlled in the LOCAL mode, REMOTE

I/O mode and in the SERIAL mode via the RS 232-422 and 485 ports

(the RS422 and RS485 are optional).

To order systems with RS 422/485 and Eyesys Gauges, contact the Agilent sales office.

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4 Instructions for Use

Storage

The ways in which the operating commands are entered into the system differ depending on the controller’s mode of operation:

ƒ

ƒ

In the LOCAL mode all the commands are entered through the front panel

In the REMOTE I/O mode all the commands are entered through remote I/O signals (Relay contacts) which are connected to the

Remote Control connector on the rear panel

ƒ In the SERIAL mode all the commands are through a local computer connected to the RS 232-422-485 interface.

Storage

The following environmental conditions must be met when transporting and storing the controller:

ƒ

ƒ

Temperature: -20 °C to +70 °C

Relative humidity: 0 – 95 % (non-condensing)

Prior to Installation

The controller comes in a special protective packaging; if there is any sign of damage that could have been caused during transportation, contact your local sales office immediately.

When unpacking the controller, be particularly careful to avoid dropping it or knocking it against anything.

The packaging material is totally recyclable and complies with EEC directives 85/399 for the safeguard of the environment.

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Instructions for Use

Installation

4

Figure 1 Controller Packaging

The Dual controller is preset at the factory to operate with the following power supply voltages:

ƒ Models 929-7000/1/2/3 and 929-7008/09/10/11, input voltage of

100 to 120 Vac, frequency of 50/60 Hz,

ƒ Models 929-7004/5/6/7 and 929-7012/13/14/15; input voltage of

200 to 240 Vac, frequency of 50/60 Hz,

Installation

WARNING! The Dual controller is equipped with a three-wire power cord with an internationally approved plug. Always use this power cord and insert the plug into an appropriately grounded power outlet to avoid electrostatic discharges.

High voltages that could cause serious injury or even death are generated inside the controller. Before performing controller installation or maintenance, disconnect the unit from the power outlet.

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4 Instructions for Use

Installation

CAUTION! The controller can be used either as a desktop unit or as a rack module. In any case it must be positioned in a way that the air can circulate freely through the ventilation slots on the cover.

If the controller is used as a rack module, it MUST be inserted into a four-rack high adapter to prevent it from falling inside the rack itself. The Dual controller front panel is not designed to support the weight of the unit.

Do not install or use the controller in an environment exposed to atmospheric agents (rain, snow, ice), in the presence of dust, corrosive gases or in a highly flammable or explosive environment.

NOTE If the controller is installed in a rack, remove its four feet and place it so as to leave at least 30 mm (1.2 inches) of free space above and below.

The controller must be used in the following environmental conditions:

ƒ

ƒ

Temperature: 0 °C to +45 °C

Relative humidity: 0 – 90 % (non-condensing)

To attach the controller to the pump use the specific cable supplied as option.

Refer to the appendix entitled “Technical Information” for detailed information on these and other connections.

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Instructions for Use

Usage

4

Figure 2 Ground Connections

NOTE The cable interlock closes on pump ground. The high voltage is disabled if the connection is interrupted. Close the interlock using the appropriate counterconnector when using a cable which is not equipped with the interlock connector.

Usage

This section provides you with the major operating procedures. For more information and for the procedures that concern connections or specific options, refer to the section “USAGE” in the “Technical

Information” appendix. Before using the controller, perform all electrical and pneumatic connections and refer to the manual of the connected pump.

WARNING! To avoid injury to persons or damage to the equipment, if the pump needs to be placed on a table make sure that the table is stable. Never activate the pump if the input flange is not connected to the system or if it is not closed with the blank-off flange.

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4 Instructions for Use

Usage

Controls and Indicators on the Dual Controller

Front Panel

The following figure shows the Dual controller front panel. The following table gives the definition and function of the controls and indicators.

90/194

Figure 3 Front Control Panel

1

2

3

4

5

Back-lit Liquid Crystal Display, 16 characters x 2 rows

Green LEDs, indicating the selected operating mode:

ƒ Local LED on when the LOCAL operating mode is selected

ƒ Serial LED on when the SERIAL operating mode is selected

ƒ Remote LED on when the REMOTE I/O operating mode is selected

HV ENABLE switch, active regardless of the operating mode selected. To power on the HV from the front control panel, from Remote I/O or from the serial line, the HV ENABLE switch must be set to the ON position.

HV1 on/off and HV2 on/off buttons, used to enable/disable the operation of the high voltage circuits.

LEDs; when the ON LED is lit the corresponding HV circuit is enabled.

While when the PROT LED is lit the Protect operating mode has been selected for the corresponding pump.

Dual Controller User Manual / 87-900-094-01 (I)

6

Instructions for Use

Usage

4

Group of six function buttons with the following functions:

ƒ ENTER button, used to confirm a selection that has been made with the CHANGE button

ƒ CHANGE CONFIG button, used to display all of the different options available

ƒ MENU button, used to enter into the configuration menu

ƒ MODE button, used to select the operating mode

ƒ START PROT 1 and START PROT 2 buttons, used to select the Start

Protect operating mode for the corresponding pump.

Sequence to Adjust the LCD Contrast of the

“DUAL” Ion Pump Controller

The ‘DUAL’ ion pump controller is equipped with a LCD display, located on the controller front panel. The contrast of the display is factory set.

Anyway, a contrast adjustment will be needed if one of the following conditions would be true:

ƒ backlights are on but no characters appear on the display

ƒ backlights are on but a black squares matrix appear on the display

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4 Instructions for Use

Usage

Adjustment needed

Figure 4

In order to perform the display contrast regulation, power on the controller and, after the startup, press the ENTER button on the front panel. Then, keep it pushed until the proper setting is obtained.

Releasing the ‘enter button’ will cause the storage of the contrast value into the unit memory.

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Instructions for Use

Usage

4

Figure 5

When the unit enters into the "contrast adjustment modality" a specific message will appear on the display and all the LED indicators placed under the diplay will start to blink together.

Rear Panel of the Dual Controller

The following figure shows the controls and connections on the rear panel of the Dual controller. The configuration shown in the following figure consists of two H.V. cards, two Set Point/Remote

Control cards and one RS 232/422 Computer Interface card and the connection to two Eyesys Gauges.

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4 Instructions for Use

Usage

94/194

4

5

6

2

3

7

8

9

10

11

Figure 6 Rear Panel

Fischer HV2 connector

Interlock for the HV cable on connector HV2

Fischer HV1 connector

Interlock for the HV cable on connector HV1

37-pin connector for Remote I/O HV2

37-pin connector for Remote I/O HV1

9-pin Multi Gauge Eyesys connectors

9-pin serial interface connector

Power cord socket

Main power switch

Dual Controller User Manual / 87-900-094-01 (I)

Instructions for Use

Operating Procedures

4

Operating Procedures

Operating Modes

The Dual controller can work in the following operating modes:

ƒ

ƒ

LOCAL

REMOTE I/O (input/output)

ƒ SERIAL.

In the LOCAL mode all the commands are given through the front panel.

In the REMOTE I/O mode all the commands are given from a remote computer through the input/output connector located on the rear panel.

In the SERIAL mode. All the commands are given from an external computer through the RS 232-422-485 serial line.

NOTE The selected mode of operation is stored by the system and therefore even if a power failure occurs, when the power is restored, the Dual controller will return to the mode of operation that it was in prior to the blackout.

NOTE When any one mode of operation is selected, the system will only accept the commands of that related mode while being able to simultaneously display information and acquire signals and data from all the interfaces.

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4 Instructions for Use

Operating Procedures

The unit is designed to work in the following modes:

ƒ START mode

ƒ PROTECTED mode

In the START mode the controller provides all the power regardless of the pump’s conditions, until reaching the short circuit current.

This mode of operation must be used to start the pump at High

Pressure.

In the PROTECTED mode the controller limits the output current and switches off the high voltage when the current exceeds the threshold current for more that 0.2 seconds.

In normal operation, this is the preferred mode, as any failure of the ion pump or cable due to short circuit or high load will cause the high current to switch off.

Refer to the appendix entitled “Technical Information" for detailed information on the modes of operation.

Step Mode of Operation

The Step mode has to be chosen in order to increase the performance of the pump and to read at very low pressure without influence of leakage current.

In Step mode the Dual controller chooses the best output voltage according to the pressure into the pump (see the following figure).

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Instructions for Use

Operating Procedures

4

Figure 7 Output voltage change-over vs pressure

Powering On the Controller from the Front Panel

(LOCAL Mode)

NOTE To switch on the H.V. the external interlock must be closed (connector inserted).

If no external connection is made, insert the interlock-closing jumper that are provided with the unit.

Proceed as follows to power on the controller and enable the voltage on the H.V. connectors:

ƒ

ƒ

Insert the cable from the pump and the interlock loopback pin of the H.V. cable into the related connectors on the rear panel.

Set the power switch on the rear panel to the ON position.

ƒ

ƒ

Set the ENABLE HV switch on the front panel to the ON position.

Press the HV 1/2 ON/OFF buttons (ON LED lit).

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4 Instructions for Use

Maintenance

NOTE With only one H.V. circuit installed both rows on the display are dedicated to pump number one, while with two circuits installed each row is dedicated to a different pump.

Starting the Pump

To start the pump, press the corresponding HV ON/OFF button; the

ON LED will come on.

Stopping the Pump

To stop the pump press the corresponding HV ON/OFF button; the

ON LED will go off.

Maintenance

The Dual controller does not require any maintenance. Any form of servicing on the unit must be performed by authorized personnel.

If servicing is needed, contact Agilent Technical Support or subscribe to the “Agilent Advanced Exchange Service” where the faulty controller is replaced by a refurbished one.

If the controller needs to be scraped, proceed to do so in compliance with the specific national norms.

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Instructions for Use

Disposal

4

Disposal

Meaning of the "WEEE" logo found in labels

The following symbol is applied in accordance with the EC WEEE

(Waste Electrical and Electronic Equipment) Directive.

This symbol (valid only in countries of the European Community) indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system.

The end user is therefore invited to contact the supplier of the device, whether the Parent Company or a retailer, to initiate the collection and disposal process after checking the contractual terms and conditions of sale.

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4 Instructions for Use

Error Messages

Error Messages

For certain types of failure, the controller performs an autodiagnostic test and displays one of the messages indicated in the following table.

Tab. 2

MESSAGE DESCRIPTION

HV(X) ERROR

PANEL

INTERLOCK

HV(X) ERROR

REMOTE

INTERLOCK

HV(X) ERROR

CABLE

INTERLOCK

HV(X) ERROR

HV NOT FOUND

HV(X) ERROR

HV FAULT

HIGH VOLTAGE 1 OR 2 ERRORS

HV switched-off by an interlock received from the front panel or cover. (“HV

ENABLE” switch set to

OFF or unit cover removed)

1. Set the “HV ENABLE” switch to

ON and repeat the H.V. power on procedure.

2. Make sure that the cover is installed correctly.

HV powered off due to an interlock received from

Remote I/O.

HV power off caused by an

HV cable interlock.

HV circuit has not been detected.

1. Check that the loopback plugs with the external interlock jumpered are installed.

2. Make sure that the external interlock is closed.

1. If the pump uses an HV cable with safety interlock, check that the connector at the pump end is inserted correctly and that the loopback pin at the unit end is inserted into the related socket on the rear panel.

2. If the pump uses an single pole

HV cable without interlock, check that the jumper is correctly inserted between the

Interlock cable HV plug and ground.

Repeat the Dual power on procedure; if the problem persists, contact

Agilent for repair or exchange.

HV powered off caused by an HV circuit failure.

Contact Agilent for repair or exchange.

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Instructions for Use

Error Messages

4

MESSAGE DESCRIPTION

HV(X) ERROR

HV OVERTEMP.

HV(X) ERROR

REMOTE I/O

NOT FOUND

HV(X) ERROR

R. I/O FAULT

HV(X) ERROR

PROTECT

HV(X) ERROR

SHORT

CIRCUIT

HV(X) ERROR

OVER

Temperature sensors inside the Dual have detected a temperature which exceeds the safety threshold.

1. Make sure that the environmental temperature of

Dual controller operation is not over 45 º.

2. Make sure that the ventilation slots on the cover are not obstructed.

3. Make sure that the fan blades rotate freely and that the air channeled inside the Dual controller is not blocked by dust or foreign matter.

Wait a few minutes for the temperature inside the unit to cool down and then repeat the HV power on procedure.

Remote I/O card not detected.

Repeat the Dual power on procedure; if the problem persists, contact Agilent for repair or exchange.

Remote I/O circuit failure. 1. Make sure that the Remote I/O external connectors are connected as indicated in this manual.

2. Repeat the Dual power on procedure; if the problem persists, contact Agilent for repair or exchange.

The overcurrent protection was triggered with the

“PROTECT” mode of operation selected.

If necessary, select the START mode so that the controller can work until the short circuit current is reached.

A short circuit was detected on the H.V. output.

Incorrect voltage and current values were

1. Check the integrity of the HV cable.

2. Remove cable from ion pump and check if there is a short circuit in pump or cable.

Repeat the Dual power on procedure; if the problem persists, contact

Dual Controller User Manual / 87-900-094-01 (I) 101/ 194

4 Instructions for Use

Error Messages

MESSAGE DESCRIPTION

VOLT/CURR detected on the H.V. output.

This error indicates a malfunction of the H.V. control circuit.

HV(X) ERROR

ZERO MEAS

The Dual controller’s microprocessor has detected that both voltage and current were missing from the H.V. output that should have been active.

GAUGE(X)

ERROR

PANEL

INTERLOCK

GAUGE(X)

ERROR

GAUGE NOT

FOUND

GAUGE(X)

ERROR

GAUGE

FAULT

GAUGE(X)

ERROR

GAUGE NOT

CONNECT

Agilent for repair or exchange.

Repeat the Dual power on procedure; if the problem persists, contact

Agilent for repair or exchange.

The Gauge has been disconnected from the Dual controller.

GAUGE 1 OR GAUGE 2 ERRORS

The “HV ENABLE” switch is set to OFF or the cover has been removed from the unit.

The microprocessor does not detect the Gauge control H/W.

A malfunction has been detected in the connected

Eyesys Gauge.

1. Set the “HV ENABLE” switch to

ON and then repeat the power on procedure.

2. Make sure that the cover is installed correctly.

Switch the Dual controller power supply unit off and then on again. If the problem persists, contact Agilent for repair or exchange.

1. Check the connection cable between the Dual controller and

Gauge.

2. Make sure that the Gauge works correctly when disconnected from the Dual controller. If the problem persists contact Agilent for repair or exchange.

Reconnect the Gauge and repeat the power on procedure.

SYSTEM

ERROR

ER 1 ÷ 10

SYSTEM ERRORS

For Agilent Service diagnostic purpose only. Switch OFF and ON again the power to the DUAL system, if the problem persists, contact Agilent for repair or exchange

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Dual Controller User Manual

5

Technical Information

Dual Controller Description 107

Algorithm for the Distribution of the Available Power

108

Controller Specifications 109

Output Voltages 111

Controller Outline 113

Fuse Holder 114

Interconnections 115

Start Mode of Operation 116

Protect Mode of Operation 117

Step Mode of Operation 118

Optional Gauge Connector 119

Remote I/O Connector 121

Female Remote I/O Connector Output Signal 122

Female Remote I/O Connector Input Signal 123

Remote Power On 125

Optional Male Serial Connector 127

Usage 130

General 130

Abbreviations 130

Startup 131

Original Instructions

103/194

5 Technical Information

104/194

Operating Modes 132

Messages Associated to the Mode Button 132

High Voltage Commands 133

Unit Configuration 137

Messages Associated to the Menu Button 137

Pressure Unit selection 137

Channel Selection 137

Pump Type Selection 139

Vmax

Imax

142

142

Pmax

Iprotect

142

142

Spare Pump Pressure Reading Setting 142

Step/Fixed Operating Mode (can be changed with any type of pump) 143

Vstep 1 (can be changed for the SPARE pump only)

144

Istep 1 (can be changed for the SPARE pump only) 144

Vstep 2 (can be changed for the SPARE pump only)

144

Istep 2 (can be changed for the SPARE pump only) 144

Set-point 1 or Set-point 2 selection (valid for all pumps)

145

Messages Associated to the MiniGauge Menu Button 145

Auto Turn-on Sequence 147

MiniB/A Gauge Auto On 147

Auto On Pressure Threshold Selection 148

High Voltage Auto On 148

Auto ON H.V. Pressure Threschold Select 148

Messages Associated to the Menu Button Related to the

Serial Channel 150

Serial Interface 151

Dual Controller User Manual / 87-900-094-01 (I)

Technical Information 5

General 151

General Definitions of the Hardware Protocol 151

Hardware Signals Management 152

Transmission Format and Timeout 152

Data Exchange Error Management 154

Software Protocol 155

Binary Protocol 158

ASCII Protocol 159

MultiGauge Compatible Protocol 160

Binary Protocol: 161

Ascii Protocol: 159

Multigauge Compatible Protocol: 161

List of Commands 162

General Commands 162

Command Code Value 164

HV on/off Command Coding 165

Device Number and Device Type Commands Coding

166

Interlock Status Coding 167

Binary Protocol: 167

Ascii Protocol: 167

Multigauge Compatible Protocol: 168

Binary Protocol: 168

Ascii Protocol: 168

Multigauge Compatible Protocol: 168

High Voltage Commands 169

High Voltage Commands 170

Remote I/O Commands Coding 171

Binary Protocol: 171

Ascii Protocol: 171

Multigauge Compatible Protocol: 172

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5 Technical Information

MiniGauge Commands 172

MiniGauge Commands 173

Binary Protocol: 174

Ascii Protocol: 174

Multigauge Compatible Protocol: 174

Configuration Commands 175

Binary Protocol: 178

Ascii Protocol: 178

Multigauge Compatible Protocol: 179

Protocol Errors 179

MultiVac Compatibile Serial Error Coding 180

Binary Protocol: 180

Ascii Protocol: 181

Multigauge Compatible Protocol: 181

Dual Controller Error Status 181

Specific Protocol Settings 183

Ack/Nack Mode 183

Write Reply 183

Multiple Commands 183

Automatic Serial Mode 184

Compatibility with MultiVac 185

Accessories/Options 187

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Technical Information

Dual Controller Description

Dual Controller Description

The Dual Controller base is available in versions which differ in the factory set input voltage and in the internal configuration.

ƒ Models 929-7000/1/2/3 and 929-7008/09/10/11 require an input voltage from 100 to 120 Vac, frequency of 50/60 Hz,

ƒ Models 929-7004/5/6/7 and 929-7012/13/14/15 require an input voltage from 200 to 240 Vac, frequency of 50/60 Hz.

The models are provided with a front panel with an LCD alphanumeric display to indicate the operating conditions/parameters of the Ion pump and a keyboard, and a rear panel with input/output connectors.

The figure below shows the Dual controller.

The controller unit can be operated via:

ƒ

ƒ

Front panel switches

Remote signals via rear panel connectors

ƒ RS 232/485/422 serial link (option).

A maximum power of 420 W is delivered simultaneously on the two channels, while a maximum power of 400 W is delivered on a single channel. If a total of more than 420 W is requested, the power delivered by the controller is distributed by means of an appropriate algorithm resident in the DSP.

The Dual is a power supply designed to meet a wide range of requirements.

It is a compact unit, specifically designed to operate ion pumps with both positive and negative polarity from 20 l/s to 500 l/s and up to

400 W output power.

5

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5 Technical Information

Dual Controller Description

The unit is programmed with pre-defined pump settings and the user can tailor for his purpose the voltage, short circuit current, maximum power, pressure versus current curve for one more pump not included in the pre-defined type of pumps. Using a patented operation principle, the controller is capable of reading pressure down to the 10 -11 Torr range, while optimising the pumping speed in the entire operating range.

Algorithm for the Distribution of the Available

Power

During the start-up phase, priority is given to the pump that is started first. Consequently, this pump is provided with all the power required while the second pump is provided with the power that remains.

Upon completion of this start-up phase the controller, if necessary, will proportionally distribute the available power according to the maximum power that the pumps can require.

If more than 420 W are requested, to reach a stabilized condition the controller will act on the pump power supply voltage so as to maintain constant the power delivered.

If one of the two pumps enters into the short circuit range the start phase is resumed. In this case, priority is assigned to the pump that is in the short circuit range; if both pumps are in this range, priority is assigned to the one that entered this range first.

If the HV output voltage drops below 150 V with a current equivalent to 80% of the short circuit value for a time frame exceeding 5 seconds, the related output is disabled and the following message is displayed: HV (X) ERROR SHORT CIRCUIT.

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Technical Information

Controller Specifications

5

Figure 8 Dual Controllers

Controller Specifications

Tab. 3

Input:

ƒ Voltage

ƒ Frequency

ƒ Power

Output for pump:

ƒ Voltage

ƒ Short circuit current

ƒ Power

100 to 120 Vac / 200 to 240 Vac

50 – 60 Hz

600 VA maximum

± 7,000 Vdc +2 –10 % maximum programmable via software between 3,000 V and

7,000 V at 100 V steps

400 mA

400 W maximum (programmable via software between 100 W and 400 W at 10 W steps)

Output current 400 mA ± 10 % (programmable via software between 100 mA and

400 mA at 10 mA steps)

0 °C to +45 °C Operating temperature

Storage temperature -20 °C to +70 °C

Fuse:

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5 Technical Information

Controller Specifications

ƒ Line voltage

Voltage measurement

Current measurement

Pressure Analog REC. OUT

Voltage Analog REC. OUT

Measurement updates

Two 4 A(slow blow) for 200 or 240 input

Voltage

Two 8A (slow blow) for 100 or 120 input

Voltage

Resolution ≤ 50 V

Accuracy ± 2 % of Vmax

Measurement range: 10 nA to 400 mA

Resolution: 10 nA

Accuracy: I >10 μA ± 2 %, I < 10 μA ± 10 %

0 to + 5 Vdc log. See Rec Out diagram.

Minimum recorder input impedence 1 MOhm

0 to + 7 Vdc line. See Rec Out diagram.

Minimum recorder input impedence 1 MOhm

On the display: t r

≤ 2 s

On the recorder: t r

≤ 0.1 s

110/194 Dual Controller User Manual / 87-900-094-01 (I)

In compliance with norms

Installation category

Pollution degree

Interconnecting cables

Weight (both models)

Technical Information

Controller Specifications

5

II

2

EN 55011 class A group 1

EN 61000-3-2 (Harmonic Current Emission)

EN 61000-3-3 (Flicker)

EN 61000-4-2 (ESD)

EN 61000-4.4 (Burst)

EN 61000-4.3 (Radiated RF immunity)

EN 61010-1 (Safety)

Power cord (3-wire, 3-meter long) with

European or US plug

With 1 H.V.10 Kg (22.4 lbs)

With 2 H.V. 11.5 Kg (25.8 lbs)

Output Voltages

Provided below are the output voltage diagrams.

Figure 9 Output Voltage VS Current Curve

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5 Technical Information

Controller Specifications

Figure 10 Recorder Output Voltage

112/194

Figure 11 Recorder Output Pressure

Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

Controller Outline

Controller Outline

The outline dimensions for the Dual controllers are shown in the following figures:

5

Figure 12 Controller Model Dimensions

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5 Technical Information

Fuse Holder

Fuse Holder

The following figure shows the location of this assembly.

114/194

Figure 13 Rear Panel

Proceed as follows to replace one or both fuses:

ƒ Remove the assembly by levering in position A with a small screwdriver.

ƒ Replace the fuse

Use only T-type fuses of the following characteristics:

ƒ 100-120 Vac 8 A

ƒ 200-240 Vac 4 A

Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

Interconnections

Interconnections

The following figure shows the Controller inter-connections.

5

Figure 14 Controller Interconnection

ƒ

ƒ

ƒ

Female Remote I/O connector

Optional female Gauge connector(s)

Optional serial male connector

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5 Technical Information

Start Mode of Operation

Start Mode of Operation

Tab. 4

Pump size/type

500 StarCell

300 StarCell

150 StarCell

20 StarCell

Spare

®

75, 55, 40 StarCell

500 Diode Noble Diode

300 Diode Noble Diode

150 Diode Noble Diode

75 Diode Noble Diode

55 Diode Noble Diode

40 Diode Noble Diode

Max. voltage and polarity

-7000 V

-7000 V

-7000 V

-7000 V

Short circuit current

Models with negative H.V. card

400 mA

400 mA

300 mA

-7000 V

-7000 V

250 mA

150 mA

400 mA

+7000 V

+7000 V

+7000 V

+7000 V

Models with positive H.V. card

400 mA

400 mA

300 mA

250 mA

20 Diode Noble Diode

Spare

+7000 V

+7000 V

150 mA

400 mA

Max. power

150 W

400 W

400 W

400 W

400 W

200 W

150 W

400 W

400 W

400 W

400 W

200 W

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Technical Information

Start Mode of Operation

5

Protect Mode of Operation

When the current value exceeds the trip current for more than

0.2 seconds, the power supply turns off the high voltage, and an error message is displayed.

Tab. 5

PUMP SIZE/TYPE

500 StarCell

300 StarCell

150 StarCell

40 - 55 - 75 StarCell

20 StarCell

PROTECT TRIP CURRENT

Models with negative H.V. card

100 mA

100 mA

50 mA

30 mA

20 mA

500 Diode/Noble Diode

300 Diode/Noble Diode

150 Diode/Noble Diode

20 Diode/Noble Diode

Models with positive H.V. card

100 mA

100 mA

50 mA

40 - 55 - 75 Diode/Noble Diode 30 mA

20 mA

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5 Technical Information

Start Mode of Operation

Step Mode of Operation

When the current reaches the value listed in the table, the controller changes the voltage output.

Tab. 6

Pump size/type Current value for switching from 7.0 to 5 KV

500 StarCell

300 StarCell

Current value for switching from 5 to 3 KV

Models with negative H.V. card

9.0 x 10 -4 A 2.5 x 10 -5 A

150 StarCell

40, 55, 75

StarCell

5.5 x 10 -4 A

3.0 x 10 -4 A

1.3 x 10 -4 A

1.6 x 10 -5 A

8.5 x 10 -6 A

3.8 x 10 -6 A

20 StarCell

Spare

6.5 x 10 -5 A

User selection

1.9 x 10 -6 A

User selection

Models with positive H.V. card

1.4 x 10 -3 A 3.9 x 10 -5 A 500 Diode

Noble Diode

300 Diode

Noble Diode

150 Diode

Noble Diode

40, 55, 75 Diode

Noble Diode

7.2 x 10

3.6 x 10

2.2 x 10

-4

-4

-4

A

A

A

2.1 x 10

9.5 x 10

6.7 x 10

-5

-6

-6

A

A

A

20 Diode Noble

Diode

Spare

2 x 10 -4 A

User selection

2.7 x 10 -6 A

User selection

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Technical Information

Start Mode of Operation

5

Figure 15 Output voltage change-over vs pressure

Optional Gauge Connector

Figure 16 Connector

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5 Technical Information

Start Mode of Operation

The following table gives the connector pinout in the

ConvecTorr configuration.

Tab. 7

Pin ConvecTorr

1 +24 V Power

NOTE

5 N.C.

7 N.C.

8 N.C.

9 N.C.

Connecting cables between EYESYS GAUGES and DUAL available on request.

See "Accessories List” at the end of the Instruction Manual.

The following table gives the connector pinout in the Mini B/A configuration.

Tab. 8

1 +24 V Power

120/194

7

8

9

5 N.C.

6 Degas ON/OFF Output

Degas Status Input

Emission ON/OFF Output

Emission Status Input

Dual Controller User Manual / 87-900-094-01 (I)

Remote I/O Connector

Technical Information

Start Mode of Operation

5

Figure 17 Remote I/O Connector

The following figure gives the connector pinout with related signals description.

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5 Technical Information

Start Mode of Operation

Female Remote I/O Connector Output Signal

Tab. 9

10 N.O

29 common

9 N.O

28 common

8 N.O

27 common

24 N.O

25 common

4 N.O

5 common

21 N.O

22 common

1 N.O

2 common

18 positive

19 ground

37 positive

19 ground

6 power

23 ground

17, 36

3, 7, 20, 26

High Voltage on

Digital output

Set point 2

Digital output

Set point 1

Digital output

Interlock status

Digital output

Fault

Digital output

Remote mode

Digital output

Protect mode

Digital output

Pressure recorder output

Analog output

Voltage recorder output

Analog output

External voltage

Power

Not used

Not used

Relay contact: 0.5A at 250VAC, 0.2A at 150VDC, 0.5A at 30VDC

Relay contact: 0.5A at 250VAC, 0.2A at 150VDC, 0.5A at 30VDC

Relay contact: 0.5A at 250VAC, 0.2A at 150VDC, 0.5A at 30VDC

Relay contact: 0.5A at 250VAC, 0.2A at 150VDC, 0.5A at 30VDC

Relay contact: 0.5A at 250VAC, 0.2A at 150VDC, 0.5A at 30VDC

Relay contact: 0.5A at 250VAC, 0.2A at 150VDC, 0.5A at 30VDC

Relay contact: 0.5A at 250VAC, 0.2A at 150VDC, 0.5A at 30VDC

0V to 5V

Min. impedance 1 MΩ

0V to 7V

Min. impedance 1 MΩ

10-30VAC, 1.5W

Description

HV On: Closed

HV Off: Open

P<Pthreshold set point 2:

Closed

P>Pthreshold set point 2:

Open

P<Pthreshold set point 1:

Closed

P>Pthreshold set point 1:

Open

Interlock OK: Closed

Interlock FAULT: Open

HV Off after FAULT: Closed

Other condition: Open

Serial mode: Closed

Other modes: Open

Protect ON: Closed

Protect OFF: Open

0V → P ≤ 10 -11 Torr

5V → P =10 -5 Torr

Logarithmic

0V → 0KV

7V → 7KV

Linear

External voltage to power the optoisolated input

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Technical Information

Start Mode of Operation

5

Figure 18 Typical Output Connection

Female Remote I/O Connector Input Signal

Tab. 10

Pin Signal Maximum Description

11 positive

30 negative

External interlock

Digital input

8 to 30 VDC/VAC 15 mA max Interlock closed: The H.V. output of the corresponding H.V. channel is enabled.

Interlock open: The H.V. output of the corresponding H.V. channel is disabled.

12 positive

31 negative

Confirm HV ON

Digital input

8 to 30 VDC/VAC 15 mA max

13 positive

32 negative

14 positive

33 negative

Output ON/OFF

Digital input

Start/Protect mode

Digital input

8 to 30 VDC/VAC 15 mA max

8 to 30 VDC/VAC 15 mA max

Active on the positive edge. If a positive edge is detected, the H.V. output is switched on if both interlock and output ON/OFF are closed.

Output ON/OFF open: The H.V output of the corresponding channel is switched OFF.

Output ON/OFF closed: The H.V. output of the corresponding channel is enabled.

Closed: Protect selected

Open: Start selected

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5 Technical Information

Start Mode of Operation

Pin Signal Maximum Description

15 positive

34 negative

16 positive

35 negative

Communication select

Digital input

StepV FixedV mode

Digital input

8 to 30 VDC/VAC 15 mA max

8 to 30 VDC/VAC 15 mA max

Active on the positive edge. If a positive edge is detected, the DUAL switches alternatively from Serial

Communication operation to

Remote I/O operation and vice versa.

Closed: Step V

Open: Fixed V

NOTE The External Interlock, it will operates independently from the operational mode

(Local, Remote Communication, Remote I/O). In any operational mode, the

Interlock must be closed to start the pump.

NOTE The input signals are only active if the operational mode is set to Remote. The output signals are active in all operational modes.

Figure 19 Typical Input Connection

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Technical Information

Start Mode of Operation

Remote Power On

Proceed as follows to turn on the HV from the Remote I/O

Connection:

1. Switch on the DUAL.

2. Switch the unit to the “Remote I/O” mode of operation by pressing the related button on the front panel.

3. Connect the HV cable with the corresponding cable interlock

4. Press the “HV ENABLE” button on the front panel.

5. Close the Interlock contact on the corresponding Remote I/O connector (pins 11 – 30).

6. Close the Output On/Off contact on the corresponding Remote

I/O connector (pins 13-32)

7. Close the corresponding Confirm Contact on the Remote I/O

Connector (12-31).

The following figures show possible interconnections that switch on the HV through the Remote I/O.

5

Figure 20 Remote I/O Connection DUAL

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5 Technical Information

Start Mode of Operation

Figure 21 Timing

NOTE If S1 and S2 are not both closed, a transition (Open to Closed) of S3 does not switch-on the H.V.

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Technical Information

Start Mode of Operation

Optional Male Serial Connector

The Dual controller uses an RS 232/422/485 serial interface. The following tables provide this connector’s pinout in the different configurations.

Tab. 11

Pin RS232

1 N.C.

5

4 N.C.

6 N.C.

7 N.C.

8 N.C.

9 N.C.

Figure 22 RS232 Connector

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5 Technical Information

Start Mode of Operation

Tab. 12

Pin RS422

1

2

Transmit Data neg.

Receive Data pos

4 N.C.

6 N.C.

7 N.C.

8 N.C.

Figure 23 RS422 Connector

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Tab. 13

Pin RS485

4 N.C.

6 N.C.

7 N.C.

8 N.C.

Technical Information

Start Mode of Operation

5

Figure 24 RS485 Connector

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5 Technical Information

Usage

Usage

General

Make all vacuum manifold and electrical connections and refer to Ion pump instruction manual before to operating the DUAL controller.

WARNING! To avoid injury to personnel and damage to the equipment, if the pump is lying on a table make sure it is steady. Never operate the pump if the pump inlet is not connected to the system or blanked off.

130/194

Abbreviations

This section provides the notations that are used during message display.

ƒ Unit of measure

Tab. 14

Torr mbar

Pa

Volt

V mA

Amp

A

W pressure pressure pressure voltage voltage current current current power

Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

Startup

5

ƒ Abbreviations

Tab. 15

HV1

HV2 mG1 mG2

SC1

High Voltage 1

High Voltage 2 mini Gauge 1 mini Gauge 2

Serial Comm.

Startup

ƒ

ƒ

Plug the controller power cord into a suitable power source.

Set the main power switch on the rear panel to the ON position

ƒ The display comes on and the following is displayed:

* * * * D U A L * * * *

I n i t i a l i z e . . .

Display of the μC software version

* * * * D U A L * * * *

u C v e r . 1 . 0

Display of the DSP software version

* * * * D U A L * * * *

D S P v e r . 1 . 0

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5 Technical Information

Operating Modes

NOTE Upon completion of the initialization routine, the Dual controller will return to the condition it was in when powered off. If the high voltage was on at power off, when powered back on again the Dual controller will re-enable it if allowed to do so by all the interlocks.

Operating Modes

Messages Associated to the Mode Button

The MODE button is used to change the Dual controller’s current operating mode. Pressing the MODE button displays the mode currently set. Pressing this key cyclically alternates between one of the three modes available: LOCAL, REMOTE I/O, SERIAL, as shown below.

O p e r a t i n g M o d e

L O C A L

O p e r a t i n g M o d e

R E M O T E I / O

O p e r a t i n g M o d e

S E R I A L

The three LEDs located underneath the LCD indicate the operating mode that the controller is in.

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Technical Information

Operating Modes

5

NOTE When H.V. is ON, it is not possible to change the Dual controller’s operating mode.

High Voltage Commands

If after being powered on the Dual controller is set to the LOCAL mode, the LCD will display a message concerning the pump(s) selected.

If, for example, the controller has only one H.V. channel, the following is displayed:

H V 1 5 0 0 S C / T r

If, for example, the controller has two H.V. channels, the following is displayed:

H V 1 5 0 0 S C / T r

H V 2 3 0 0 S C / T r

To switch-on the high voltage all the interlocks (cable, Remote I/O connector and front panel) must first be closed; then press the HV1 and/or HV2 buttons.

The voltage and pressure values will be displayed if only one H.V. card is present.

If two cards are present, the display will only show the values of the two voltages.

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5 Technical Information

Operating Modes

The following is displayed if only one card is present:

H V 1 - 7 0 0 0 V o l t

2 . 5 E - 9 T o r r

H V 1 - 7 0 0 0 V o l t

H V 2 - 5 0 0 0 V o l t

The lighting of the LED located above the H.V. On/Off button continuously informs the operator whether the high voltage is present or not.

By pressing the CHANGE CONFIG button, the display will show in sequence the current and pressure values of the pump, and the pressure values of the Eyesys Gauges if installed.

The following is displayed if an HV card is installed:

3 . 0 E - 9 T o r r

The following is displayed if two H.V. cards are installed:

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Technical Information

Operating Modes

5

If one H.V. card is installed (with multigauge option), pressing the

CHANGE CONFIG button again displays the following:

If two H.V. cards are installed the following are displayed:

H V 1 3 . 7 E - 9 T o r r

H V 2 3 . 9 E - 8 T o r r

In a dual H.V. card and multigauge configuration, pressing the CHANGE

CONFIG button again displays the multigauge pressure as indicated below.

Pressing the CHANGE CONFIG button again returns to the voltage value display.

The same indication can be seen on the following flow diagram:

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5 Technical Information

Operating Modes

NOTE

Figure 25

The START/PROT 1 and START/PROT 2 buttons enable/disable the

PROTECT operating mode; when this mode is enabled, the corresponding LED on the front panel comes on.

The START PROT 1 and 2 buttons are active even with H.V. set to ON.

In the START mode, the controller will continue to provide high voltage regardless of the current supplied.

The high voltage is disabled if during operation in the PROTECT mode the current delivered exceeds the I protect level.

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Technical Information

Unit Configuration

Unit Configuration

Using the Menu button accesses this configuration menu.

NOTE If the high voltage is enabled the controller settings cannot be modified; they can only be changed with H.V set to Off.

5

Messages Associated to the Menu Button

When pressing the Menu button, the device enters into the cycle configuration program that must be terminated in order to return to the Main Menu.

The unit automatically exits from this menu if nothing is pressed within a preset time of 15 sec.

Pressure Unit selection

When pressing Main menu button the first time it is possible to select the pressure unit of measure; in fact, the display shows the last unit set. Pressing the CHANGE button allows to change the unit of measure; the following units can be selected: mbar, Torr and Pascal

P R E S S U R E U N I T

Channel Selection

S E L E C T C H A N N E L

H I G H V O L T A G E 1

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5 Technical Information

Unit Configuration

Press the CHANGE button to display the options available on the second row:

ƒ HIGH VOLTAGE 1

ƒ

ƒ

ƒ

ƒ

HIGH VOLTAGE 2

GAUGE 1

GAUGE 2

SERIAL COMM.

Confirm by pressing the ENTER button.

The same information can be seen in the following flow-chart.

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Figure 26

Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

Unit Configuration

5

Pump Type Selection

The following message is now displayed.

H V 1 P U M P S E L E C T

Use the CHANGE button to select the pump, then confirm the selection made by pressing the ENTER button.

In case the Spare Pump is selected, the operations that can be done are shown in the following flow-chart:

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5 Technical Information

Unit Configuration

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Figure 27

Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

Unit Configuration

5

In case a Standard Pump is selected, the parameters can just be read, and the operations that can be done are shown in the following flowchart:

Figure 28

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5 Technical Information

Unit Configuration

The same sequences can be seen in the following pages:

Vmax

H V 1 V m a x ( V )

+ 7 0 0 0

Imax

H V 1 I m a x ( m A )

4 0 0

Pmax

H V 1 P m a x ( W )

Iprotect

H V 1 I p r o t e c ( m A )

1 0 0

Spare Pump Pressure Reading Setting

H V 1 P 1 0 0 n A ( T o r r )

6 . 2 E X P - 1 1 *

142/194

When this page is displayed the operator should store the pressure value corresponding to the pump current of 100 nA with 5000 V applied on the pump in use.

Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

Unit Configuration

5

In other words, program the conversion table from current to press.

Store the pressure value for other three pump current values (10 μa,

10 mA, 400 mA).

Since an exponential value is displayed, press the CHANGE button to change the mantissa of the pressure and then confirm by pressing the

ENTER button; now press the CHANGE button to modify the exponent and then press ENTER to confirm the selection made.

Storing these values allows the Dual to convert the pump current into pressure values even if the operating voltage is different from 5000 V.

The correction factor due to the different voltage is automatically applied by the Dual software in order to obtain a continuous correct pressure reading.

Step/Fixed Operating Mode (can be changed with any type of pump)

H V 1 O p e r . M o d e or

H V 1 O p e r . M o d e

S T E P V

If the STEP V mode is selected and the high voltage is disabled, the four parameters that regulate the operating mode (two voltage values and two current values) can be displayed and changed.

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5 Technical Information

Unit Configuration

Vstep 1 (can be changed for the SPARE pump only)

H V 1 V s t e p 1 ( V )

5 0 0 0

Istep 1 (can be changed for the SPARE pump only)

H V 1 I s t e p 1 ( A )

1 . 4 E X P - 3

Vstep 2 (can be changed for the SPARE pump only)

H V 1 V s t e p 2 ( V )

3 5 0 0

Istep 2 (can be changed for the SPARE pump only)

H V 1 I s t e p 2 ( A )

At this point the unit switches to the set-point selection menu; the set-points can be changed on all pump models.

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Technical Information

Unit Configuration

5

Set-point 1 or Set-point 2 selection (valid for all pumps)

H V 1 S e t P t 1 ( T o r r )

1 . 0 E X P - 6 *

At this point it is possible to use the CHANGE and ENTER buttons to change and confirm the values for the mantissa and exponent.

Pressing the ENTER button to confirm the selection made returns you to the menu of the voltages on the two channels.

Messages Associated to the MiniGauge Menu

Button

If GAUGE1 or GAUGE2 was set during the channel selection phase you can access the minigauge menu described below.

As in the case of the previous menu, also in this case use the

CHANGE button to change the parameters and the ENTER button to confirm.

MiniGauge Type Selection m G 1 S E L E C T G A U G E

N o t I n s t a l l e d m G 1 S E L E C T G A U G E m G 1 S E L E C T G A U G E

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5 Technical Information

Unit Configuration

The Calibration message provided below is displayed only if

Convectorr was previously selected. m G 1 C A L I B R A T I O N

146/194

If you confirm YES, the display will guide you through atmospheric and High vacuum calibration.

The message Emission indicated below is displayed only if miniB/A was previously selected. m G 1 E M I S S I O N

Usually you can select between OFF and ON, but if the miniB/A is undergoing its power on phase the following message will be displayed: m G 1 E M I S S I O N

The message for Degas ON/OFF selection is the following: m G 1 D E G A S

O F F *

The message for Gas Type selection is the following: m G 1 G A S T Y P E

A I R *

By using the CHANGE and ENTER buttons you can select and confirm one of the following options:

Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

Unit Configuration

5

SPARE CORRECT.

AIR

HELIUM

HYDROGEN

OXYGEN

The message Gas Correction, shown below, is only displayed if the

SPARE Correct option was previously selected. m G 1 G A S C O R R .

1 . 0 0 *

Auto Turn-on Sequence

If 2 of miniB/A and 1 Convector Gauge are installed, the miniB/A can be powered on when the Convector pressure is below a predetermined threshold.

MiniB/A Gauge Auto On

m G 1 A u t o O n G A U G E

N O *

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5 Technical Information

Unit Configuration

Auto On Pressure Threshold Selection

m G 1 P o n G A U ( T o r r )

1 . 0 E X P - 2 *

Proceed as follows to activate the High Voltage in the event that the pressure measured by the MiniB/A Gauge is lower than a certain threshold.

High Voltage Auto On

m G 1 A u t o O n H V 1

N O *

Auto ON H.V. Pressure Threschold Select

m G 1 P o n H V 1 ( T o r r )

1 . 0 E X P - 4 *

At this point the voltage values are displayed.

The detailed sequence can be seen in the following flow chart:

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Technical Information

Unit Configuration

5

Figure 29

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5 Technical Information

Unit Configuration

Messages Associated to the Menu Button Related to the Serial Channel

The serial menu described below can be accessed if SERIAL was selected during the channel selection phase.

As for the previous menu, also in this case you can use the CHANGE button to change the parameters and the ENTER button to confirm them.

Baud Rate Selection

S C 1 B A U D R A T E

9 6 0 0

It is possible to select between 9600, 4800, 2400, and 1200

Address Selection

S C 1 A D D R E S S N O D E

1 *

Parity Selection

S C 1 P A R I T Y

N O N E *

The following values can be chosen:

NONE

ODD

EVEN

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Technical Information

Serial Interface

5

Serial Interface

General

After having described the connector and the pinouts in the different configurations, this section provides information on Dual controller’s serial interface. In particular, bear in mind that compatibility with the existing protocols on the MultiVac (Binary and ASCII) has been maintained as far as the data format and different commands are concerned. Furthermore, a new protocol called MultiGauge

Compatible is introduced. It derives from the Mini B/A Eye Sys specifications and implements the data format above all, while the majority of the commands are new.

General Definitions of the Hardware Protocol

The Dual controller implements the following data exchange protocols:

Tab. 16

Binary

Ascii

MultiGauge

Compatible

Protocol

Derived from the MultiVac’s binary protocol

Derived from the MultiVac’s ASCII protocol

Derived from the protocol used for the MiniGauge Eyesys

With respect to the three native protocols, compatibility is guaranteed at format level (header, terminator, checksum, etc.), while the different commands are implemented in compliance with the characteristics of the Dual controller.

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5 Technical Information

Serial Interface

Hardware Signals Management

The RX, TX and GND signals are present on the data exchange line.

There is no flow control implemented through RTS/CTS and the DTR and DSR signals are not handled.

The RS232, RS422 and RS485 physical interfaces are implemented.

NOTE The RS485 requires software addressing and therefore a binary protocol is needed.

Transmission Format and Timeout

The serial data transmission parameters are listed below:

Tab. 17

Start bit

Stop bit

Data bit

Parity

1

1

8

None, Odd, Even

1 All the baud rates indicated are supported; the default rate is 9600.

Data exchange is performed in the Half-Duplex mode.

To guarantee a synchronized data flow and to prevent conflicts, the timings indicated in the table below must be respected:

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Technical Information

Serial Interface

Tab. 18

Treset

Tmin

Tmax

Maximum delay between consecutive bytes of the same data packet. The controller can reinitialize reception if this time frame expires without data exchange.

Minimum time frame before a reply can be initiated. The controller’s reply message cannot begin until the expiry of this time frame, which is initiated at the end of the Host message.

Maximum time frame within which a reply can be given. The controller’s reply message cannot begin until the expiry of this time frame, which is initiated at the end of the Host message.

Minimum time frame for query transmission.

2 byte time 2

4 msec

100 msec

Tquery

Tresponse Minimum time frame for reply transmission. nº byte x byte time nº byte x byte time

2 byte time Trelease Maximum time frame within which the RS485 line can be freed.

Within this time frame the controller must free the serial line upon completion of reply transmission. Such time out is relevant in the RS485 mode only.

2 Equivalent to the transmission time of a single byte at the selected baud rate and assumes the following values:

8.33 msec at 1200, 4.16 msec at 2400, 2.08 msec at 4800, 1.04 msec at 9600.

A data exchange session will therefore assume the timing shown in the following figure:

5

Figure 30 Timing

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5 Technical Information

Serial Interface

Data Exchange Error Management

The following data exchange errors are handled (during reception by the controller):

Tab. 19

Error Type

Overrun

Possible Cause

Problems with the Dual controller’s data exchange driver

Frame error Line noise, incorrect baud rate or data corruption

Checksum error Data corruption (not on the MultiGauge Protocol)

Full buffer

Bad header

Time-out

Too many bytes or data corruption

Inexistant or incorrect header

Unrespected time out (Treset)

When a data exchange error occurs, the Dual controller does not react in any way to the command received but replies with an NACK message except in cases when an RS485 serial line is used.

If an unrecoverable error (crash error) occurs on the Dual controller, the serial line will not be able to handle any type of data exchange.

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Technical Information

Software Protocol

5

Software Protocol

The Dual controller automatically detects the type of software protocol used by analyzing the header and provides its related reply.

The three protocols have equivalent data fields which comply with the following formats:

Tab. 20

Type

Read

Status

No. of Bytes.

1

1

Integer 5

BitField

Exponential

String

8

7 n

Description

“?” (3Fh3) performs reads on the Dual controller

“0” (30h) = false = off,

“1” (31h) = true = on 5 represented in BCD4 on 5 digits

(always positive)

Like the integer type, but with meanings associated to the number’s single bits

“x.xEsxx” where x is BCD digits, E is the 45h character and s is the (“+” o “-“ sign

Sequence of n characters included within the 20h and 7Fh range

3 the “h” notation following a number indicates that the number is expressed in hexadecimal format

4 BCD: the number is represented by digits included within the “0” and “9” range (ASCII 30h - 39h).

5 Status can also assume values greater than “1”.

The commands have a read and a write mode. By specifying the type of read operation being performed, the Host queries the Dual controller which in turn replies in a format compliant with the command sent. As long as a write operation can be carried out, the write and read formats for the same command coincide.

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5 Technical Information

Software Protocol

The write modes will have the following possible replies:

ƒ ACK command correctly received and executed: run a query to check that the value has been written

(typical for High Voltage/Gauge power on/power off)

ƒ

(“!” 21h) (see Protocol Errors)

ƒ Value command received and executed: the value is immediately returned in the same format of the write command (the query is not required).

The commands are associated to the channel which is specified in the

Channel field. The following table indicates the values that can be assigned in this field:

Tab. 21

Value Channel Description

“0” 30h No channel The command does not act on any specific channel but overall on the entire Dual controller

(e.g. firmware version read)

“1” 31h High Voltage 1 The command acts on a Channel 1 corresponding to the

High Voltage 1 module

“2” 32h High Voltage 2

“3” 33h

“4” 34h

“5” 35h

Gauge1

Gauge2

Serial

The command acts on a Channel 2 corresponding to the

High Voltage 2 module

The command acts on a Channel 3 corresponding to the

MiniGauge 1 module

The command acts on a Channel 4 corresponding to the

MiniGauge 2 module

The command acts on a Channel 5 corresponding to the Serial Communication module

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NOTE

Technical Information

Software Protocol

5

Furthermore, the physical measurements visible from the serial line will always have the related unit of measure indicated. This applies, above all, for pressure measurements that are not subject to the settings made on the Dual controller.

The RS485 mode is normally used in a data exchange network where the software addressing of the different nodes connected (maximum 32) is only made possible by means of the binary protocol. Therefore in the RS485 mode, the Dual controller will only recognize the binary protocol and will ignore any data exchange performed using the ASCII and MultiGauge Compatible Protocol.

In the Remote I/O mode, only the commands present on the digital outputs of the Remote I/O (Fixed/Step, Local/Remote, Start/Protect, pump on/off) are read-only active.

The write commands are enabled in the automatic mode only. In addition, the remote mode cannot be selected during a menu editing phase using the front panel.

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5 Technical Information

Software Protocol

Binary Protocol

Host to Dual controller command format:

[header command] [length] [command] [channel] [data] [checksum]

Dual controller to Host reply format:

[header response] [length] [command] [channel] [data] [checksum]

Tab. 22

Field

Header command

No. of bytes Value Description

81h÷A0h RS422

Header and address for the serial RS485 (129 - 160)

Header response 01h÷20h

Length

Command

2

2

Data packet length in BCD

(command, channel, data fields only)

See commands description

(byte 0 command, byte 1 subcommand)

Channel 1 30h

31h

32h

33h

34h

35h

High Voltage 1

High Voltage 2

Gauge 1

Gauge 2

Serial Communication

Data n See commands description

Checksum 1

RS422

Header and address for the serial RS485

XOR of all bytes (checksum excluded) in and with 7Fh

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Technical Information

Software Protocol

5

ASCII Protocol

Host to Dual controller command format:

[header command] [length] [command] [channel] [data] [checksum]

Dual controller to Host reply format:

[header response] [length] [command] [channel] [data] [checksum]

Tab. 23

Field No. of bytes

Header command 1

Value Description

40h Header “@”

Header response 1 24h “$”

Length 2 Data packet length in BCD

(command, channel, data fields only)

Command 2 See commands description

(byte 0 command, byte 1 subcommand)

Channel 1 30h

31h

32h

33h

High Voltage 1

High Voltage 2

Gauge 1

34h

35h

Gauge 2

Serial Communication

Data

Checksum n

4

See commands description

Sum of all bytes (checksum excluded) represented in BCD

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5 Technical Information

Software Protocol

MultiGauge Compatible Protocol

Host to Dual controller command format:

[header command] [channel] [command] [data] [terminator]

Dual controller to Host reply format:

[header response] [channel] [command] [data] [terminator] where:

Tab. 24

Field

Header command

Header response

No. of Bytes

1

1

Value Description

23h Header “#”

3Eh Header “>”

Command

Data

2 n

31h

32h

33h

34h

35h

High Voltage 1

High Voltage 2

Gauge 1

Gauge 2

Serial Communication

See commands description

See commands description

Terminator 1 0Dh Return

Field No. of Bytes Value Description

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Technical Information

Software Protocol

5

Following are shown a typical command with the answers of the

DUAL in the three different formats. The command is the status at the the High Voltage 1:

Binary Protocol:

ü 04 A01 ? Z

81h 30h 34h 41h 30h 31h 3Fh 7Ah

• 04 A01 0 u

1h 30h 34h 41h 30h 31h 30h 75h

Ascii Protocol:

@ 04 A0 ? 0389

40h 30h 34h 41h 30h 31h 3Fh 30h 33h 38h 39h

$ 04 A01 0346

24h 30h 34h 41h 30h 31h 30h 33h 34h 36h

Multigauge Compatible Protocol:

# 1 30 ?

23h 31h 33h 30h 3Fh Dh

> 1 30 0

3Eh 31h 33h 30h 30h Dh

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5 Technical Information

List of Commands

List of Commands

The commands that have been implemented are described in the following tables:

General Commands

Tab. 25

Command Description Mode Channels Format Values operating mode or Read/Write No channel Status 30h local

31h Remote I/O

32h serial

HV on/off

Unit of measure

µC firmware version

On/off

High Voltage

Unit of measure on

Dual controller

µC (micro central) firmware version

Read/Write

Read/Write

Read

HV1, HV2

No channel

No channel

Status

Status

String

See HV on/off command in the codes table

30h Torr

31h mBar

32h Pascal

18 characters e.g. “VPo 1 0

24/04/98”

DSP firmware version

Versione firmware DSP

(micro HV)

Device number Pump number set on the specified channel

Device type Type of device set on the specified channel

Read No channel

Gauge1,

Gauge2

Serial

HV1, HV2

Gauge1,

Gauge2

Serial

HV2

String

Status

String

16 characters e.g. “VPd 1 0

24/04/98”

See device table

See device table

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Technical Information

List of Commands

5

Command Description Mode Channels Format Values

V meas Voltage measurement (V)

“00000” if powered off

I meas Read

Pr meas

Current measurement

Pressure measurement

HV1, HV2 Exp. (A) “0 0E+00” if powered off

HV2

Gauge1,

Gauge2

(Torr)

“0 0E+00” if powered off

Dual Controller

Error Status

Serial reset

Reads the error status on the selected channel

Resets the

Dual controller

Write 1

Gauge1,

Gauge2

Serial no channel

No channel

Integer

Status

See Error Status Table

30h not ok, no reset

31h ok, reset performed

See the Protocol error table

Remote error Error returned by the Dual controller due to an invalid data exchange

Interlock

Status

Reads the status of the interlocks

1

DUAL Controller doesn't reply to this command. channel See the Interlock table

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5 Technical Information

List of Commands

Command Code Value

Tab. 26

Command Name

General Usage

Commands ascii hex ascii hex

Protocol ascii hex

HV on/off

Unit of measure

µc firmware version

Dsp firmware version device number device type

V meas

Pr meas

Vacuum Pump

Controller error status

Serial reset remote error

Interlock status

[0

!0

]0

A0

D0

E0

E1

41h30h

44h30h

45h30h

66h30h

A0

D0

E0

E1

41h30h

44h30h

45h30h

66h30h

30

03

05

04

30h30h

30h33h

30h35h

30h34h

F0

F1

46h30h

46h30h

F0

F1

46h30h

46h30h

01

11

30h31h

31h31h

S0 53h30h S0 53h30h 07 30h37h

T0 54h30h T0 54h30h 08 30h38h

U0 55h30h U0 55h30h 02 30h32h z0 7Ah30h z0 7Ah30h 19 31h39h

5Bh30h

21h30h

5Dh30h

[0

!0

]0

5Bh30h

21h30h

5Dh30h

06

12

13

30h36h

31h32h

31h33h

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Technical Information

List of Commands

HV on/off Command Coding

Tab. 27

Mode Code Description

Write 0 30h HV power off

Write 1 31h HV power on (in compliance to the Start/Protect and Fixed/Step selection made using the related commands)

5

Read

Read

Read

Read

Read

Read

If full compatible MultiVac

Read 2

4

-3

-4

-3

-8

-7

32h

34h

2Dh33h

2Dh34h

2Dh33h

2Dh38h

2Dh37h

HV on in start/fixed V

HV on in protect/fixed V

Power off caused by Interlock Panel

Power off caused by Remote I/O Interlock

Power off caused by Cable Interlock

Power off caused by HV Overtemperature

Power off caused by Remote I/O not Present or

Remote I/O Fault

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5 Technical Information

List of Commands

Device Number and Device Type Commands

Coding

Tab. 28

Channel

HV1, HV2

HV1, HV2

HV1, HV2

HV1, HV2

HV1, HV2

HV1, HV2

HV1, HV2

HV1, HV2

HV1, HV2

HV1, HV2

HV1, HV2

Gauge1, Gauge2

Gauge1, Gauge2

Gauge1, Gauge2

1

2

10

0

8

9

6

7

4

5

2

3

Device Number

0

1

30h

31h

32h

33h

34h

35h

36h

37h

38h

39h

3Ah

30h

31h

Device Type

Spare

500 SC/Tr

300 SC/Tr

150 SC/Tr

75-55-40SC/T

20 SC/Tr

500 Diode/ND

300 Diode/ND

150 Diode/ND

75-55-40 D/ND

20 -25 Diode/ND

Convectorr

Mini-B/A

NOTE When reading, if the required device is missing, DUAL replies: "?" (3Fh).

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Interlock Status Coding

Tab. 29

08h

10h

20h

40h

80h

BitField

01h

02h

04h

Interlock type (active if 1)

Reserved (always 0)

Front Panel Interlock (equal to bit 20h)

HV1 Remote I/O Interlock

HV1 Cable interlock

Reserved (always 0)

Front Panel Interlock (equal to bit 20h)

HV2 Remote I/O Interlock

HV2 Cable interlock

Technical Information

List of Commands

5

In the following example shown the use of the command HV ON/OFF to power up the channel 1 in the three protocols.

Binary Protocol:

ü 04 A0 1 1 +

81h 30h 34h 41h 30h 31h 31h 74h

ACK

6h

Ascii Protocol:

@ 04 A0 1 1 0375

40h 30h 34h 41h 30h 31h 31h 30h 33h 37h 35h

ACK

6h

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5 Technical Information

List of Commands

Multigauge Compatible Protocol:

# 1 30 1

23h 31h 33h 30h 31h Dh

ACK

6h

NOTE The answer ACK or 6h is given only if the mode ACK NACK is selected, if not with this type of command, nothing is provided by the DUAL.

168/194

The following example command is used to read the current of the channel 1 or 2.

Binary Protocol:

ü 04 T02 ? 1 |

81h 30h 34h 54h 30h 32h 3Fh 6Ch

• 10 T02 8.9E – 04

F

1h 31h 30h 54h 30h 32h 38h 2Eh 39h 45h 2Dh 30h 34h 15h

Ascii Protocol:

@ 04 T02 ? 0409

40h 30h 34h 54h 30h 32h 3Fh 30h 34h 30h 39h

$ 10 T0 2 4.4 E-04 0679

24h 31h 30h 54h 30h 32h 34h 2Eh 34h 45h 2Dh 30h 34h 30h 36h

37h 39h

Multigauge Compatible Protocol:

# 1 0 8 ?

23h 31h 30h 38h 3Fh Dh

> 1 08 1.9 E - 04

3Eh 31h 30h 38h 31h 2Eh 39h 45h 2Dh 30h 34h Dh

Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

List of Commands

High Voltage Commands

Tab. 30

Command Description Mode Values mode Read

Write

HV1, HV2 Status 30h fixed

31h step

Status start/protect start/protect mode

Read

Write

HV1, HV2 supply HV1, HV2 polarity

Write

HV1, HV2

Status

Integer (V)

30h start

31h protect

30h negative

31h positive

[3000, 7000] step 100

Integer (mA) [100, 400] step 10

Write

Write

HV1, HV2 Integer (W) [100, 400] step 10

Integer (mA) [10, 100] step 10

Vstep1 Vstep1 variable

Write

Read

Write

HV1, HV2

Write

HV1, HV2

Integer (V)

Exp. (A)

[3000, 7000] step 100

[1.0E-9, 1.0E1]

Vstep2 Vstep2 Integer (V) [3000, 7000] step 100

Remote I/O

Output

Remote I/O

Input

(Set Point 1)

(Set Point 2)

Reads the status of the Remote I/O outputs

Reads the status of the Remote I/O inputs

Write

Write

HV1, HV2

HV1, HV2

Write

HV1, HV2

Write

Read HV1, HV2

Read HV1, HV2

Exp. (A)

Exp. (Torr)

Exp. (Torr)

BitField

BitField

[1.0E-9, 1.0E1]

[1.0E-9, 1.0E1] (have to be greater than SP2)

[1.0E-9, 1.0E1]

See Remote I/O table

See Remote I/O table

5

Dual Controller User Manual / 87-900-094-01 (I) 169/ 194

5 Technical Information

List of Commands

High Voltage Commands

Tab. 31

Command Name

General Usage

Commands

ASCII Hex ASCII Hex

Protocol

ASCII Hex

48h30h 48h30h

49h30h 49h30h

4Ah30h 4Ah30h

4Dh30h 4Dh30h

Remote I/O Output g0 67h30h g0 67h30h 73 37h33h

Remote h0 68h30h 74 37h34h

170/194 Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

List of Commands

Tab. 32

Bitfield

01h

02h

04h

08h

10h

20h

40h

80h

Remote I/O Commands Coding

Remote I/O Input id. I/O board (always 1)

I/O board OK (always 1)

Step mode

Remote mode

Protect mode

Output HV enable

Confirm HV on

Remote I/O interlock

Remote I/O Output

High Voltage enable

Set Point2 active

Set Point1 active

Interlock active

High Voltage fault

Remote mode or Local mode (0) - Serial mode (1)

Protect mode

Not used (always 0)

5

The following example shows the reading on the High Voltage 1, the status of the Start/Protect.

Binary Protocol:

ü 04 C01 ? X

81h 30h 34h 43h 30h 31h 3Fh 78h

• 04 C0 1 0 W

1h 30h 34h 43h 30h 31h 30h 77h

Ascii Protocol:

@ 04 C0 1 ? 0391

40h 30h 34h 43h 30h 31h 3Fh 30h 33h 39h 31h

$ 04 C0 1 0 0348

24h 30h 34h 43h 30h 31h 30h 30h 33h 34h 38h

Dual Controller User Manual / 87-900-094-01 (I) 171/ 194

5 Technical Information

List of Commands

Multigauge Compatible Protocol:

# 1 61 ?

23h 31h 36h 31h 3Fh Dh

> 1 61 0

3Eh 31h 36h 31h 30h Dh

MiniGauge Commands

Tab. 33

Command Description Mode Channels Format Possible

Read

Write Gauge 2

Status 30h emiss Off

31h emiss On

32h emiss Auto

Mini B/A and

ColdCathode only degas on/off

Mini B/A degas mode

Read

Write

Gauge 1,

Gauge 2 31h on

Mini B/A only gas correction auto on

Gas Correction value

Emission auto on mode

Read

Write

Read

Write

Gauge 1,

Gauge 2

Gauge 1,

Gauge 2

Mini B/A only auto on value

Emission auto on value auto on hv1 Auto on High

Voltage 1 mode

Read

Write

Read

Write

Gauge 1,

Gauge 2

Gauge 1,

Gauge 2

Exp. (Torr)

31h enable

ConvecTorr only

[1.0E-2, 1.0E1]

ConvecTorr only auto on value hv1

Auto on High

Voltage 1 value

Read

Write

Gauge 1,

Gauge 2

Exp. (Torr)

31h enable

Mini B/A and ColdCathode only

[1.0E-8, 1.0E1]

Mini B/A and

ColdCathode only

172/194 Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

List of Commands

Command Description Mode Values auto on hv2 Auto on High

Voltage 2 mode

Read

Write

Gauge 1,

Gauge 2 disable

31h enable

Mini B/A and

ColdCathode only auto on value hv2

Auto on High

Voltage 1 value

Read

Write

Gauge 1,

Gauge 2

Exp. (Torr) [1.0E-8, 1.0E1]

Mini B/A and

ColdCathode only

5

MiniGauge Commands

Tab. 34

Command Name

General Usage

Commands ASCII Hex ASCII Hex

Protocol

ASCII Hex degas on/off gas correction auto on auto on value auto on hv1 auto on value hv1 auto on hv2 auto on value hv2

I0 m0 n0 o0 a0 c0 d0 e0

61h30h

63h30h

64h30h

65h30h

6Ch30h

6Dh30h

6Eh30h

6Fh30h

I0 m0 n0 o0 a0 c0 d0 e0

61h30h

63h30h

64h30h

65h30h

6Ch30h

6Dh30h

6Eh30h

6Fh30h

55

56

57

58

40

50

53

54

34h30h

35h30h

35h33h

35h34h

35h35h

35h36h

35h37h

35h38h

The following example shows how to turn on the eyesys mini B/A

GAUGE on the channel 3.

Dual Controller User Manual / 87-900-094-01 (I) 173/ 194

5 Technical Information

List of Commands

Binary Protocol:

ü 04 i0 3 1 ^

81h 30h 34h 69h 30h 33h 31h 5Eh

ACK

6h

Ascii Protocol:

@ 04 i0 3 1 0417

40h 30h 34h 69h 30h 33h 31h 30h 34h 31h 37h

ACK

6h

Multigauge Compatible Protocol:

# 3 52 1

23h 33h 35h 32h 31h Dh

F

6h

174/194 Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

List of Commands

5

Configuration Commands

The following commands are enabled in the configuration mode only.

This mode is accessed through the serial property command, enabling the configuration; reset the system to exit.

Tab. 35

Command Description Mode Values serial config Enables write access to the configuration parameters

Read

Write

No channel Status 30h normal mode

31h serial configuration mode serial property short circuit volt

Serial protocol characteristics

Short circuit voltage

Read

Write

Read

Write

No channel bitField

No channel Integer

See the protocol properties table

[1, 7000]

No channel Integer (mA) [1, 400] short circuit current short circuit time protect time protect delay

Short circuit current

Short circuit intervention time

Protect intervention time

Protect at power on function enable delay time

Read

Write

Read

Write

Read

Write

Read

Write

No channel

No channel

No channel

Integer (s)

Integer (s)

Integer

[10, 6000] step 10 expressed in ms x10

[10, 6000] step 10 expressed in ms x10

[10, 6000] step 10 expressed in ms x10 prDeita1 prDeita2

P100nA

P1µA

P10µA f(I, V) = Pressure calculation constant f(I, V) = Pressure calculation constant

Pressure value at

5000V with

I=100nA

Read

Write

Read

Write

Read

Write

No channel

No channel

HV1, HV2

Pressure value at

5000V with I=1µA

Read

Write

HV1, HV2

Pressure value at Read HV1, HV2

Exp.

Exp.

Exp. (Torr)

Exp. (Torr)

Exp. (Torr)

[0.0, 10.0]

[0.0, 10.0]

[1.0E-15, min(1.1E-9, P1µA)]

[P100nA, P10µA] in read on

SPARE pump

[max(1.2E-9, P10µA),

Dual Controller User Manual / 87-900-094-01 (I) 175/ 194

5 Technical Information

List of Commands

Command Description Mode Channels Format Possible

5000V with

I=10µA

P100µA Read

Write

HV1, HV2 Exp. (Torr) [P10µA, P1mA] in read on

SPARE pump

P1mA

P10mA

P100mA

P400mA reinitialize eeprom setpoint histeresys %

Pressure value at

5000V with

I=100µA

Pressure value at

5000V with I=1mA

Pressure value at

5000V with

I=10mA

Pressure value at

5000V with

I=100mA

Pressure value at

5000V with

I=400mA

Reloads the defaults in

EEPROM

Histeresys percentage range of the setPoint

Remote I/O value

Read

Write

Read

Write

Read

Write

Read

Write

Write 1 No channel Status

Read

Write

HV1, HV2

HV1, HV2

HV1, HV2

HV1, HV2

Exp. (Torr)

Exp. (Torr)

Exp. (Torr)

Exp. (Torr)

[P100µA, P10mA] in read on SPARE pump

[max(7.5E-8, P1mA), min(7.4E-5, P100mA]

[P10mA, P400mA] in read on SPARE pump

[max(7.5E-5, P100mA),

1.0E2]

1 reloads the defaults in

EEPROM

No channel Integer (%) [0,100] step 1

1

DUAL Controller doesn't reply to this command and the display will show SYSTEM ERR 5, turn off and on the power to reset the error.

176/194 Dual Controller User Manual / 87-900-094-01 (I)

Tab. 36

Command Name

General Usage

Commands serial config mode serial property short circuit volt short circuit current short circuit time protect time protect delay xd xe xf xg

ASCII Hex xa 78h61h xb xc

78h62h

78h63h

78h64h

78h65h

78h66h

78h67h xd xe xf xg

ASCII Hex xa 78h61h xb xc

78h62h

78h63h

78h64h

78h65h

78h66h

78h67h

Technical Information

List of Commands

5

Protocol

83

84

85

86

ASCII Hex

80 38h30h

81

82

38h31h

38h32h

38h33h

38h34h

38h35h

38h36h

78h6Bh 90 reinitialize eeprom setPoint histeresys% xr xs

78h72h

78h73h xr xs

78h72h

78h73h

97

98

39h37h

38h38h

Dual Controller User Manual / 87-900-094-01 (I) 177/ 194

Tab. 37

Bitfield

01h

02h

04h

08h

10h

20h

40h

80h

5 Technical Information

List of Commands

Remote I/O Input

Disables full compatible MultiVac

Disabled reply on Write

Disables Ack/Nack mode

Remote I/O Output

Enables full compatible MultiVac

Enables reply on Write

Enables Ack/Nack mode

Disables automatic serial mode

Not used

Parity bit 0 (read only)

Parity bit 1 (read only)

Enables automatic serial mode

Not used

Parity coding

0=none, 1=odd, 2=even, 3=not valid

The following example shows a reading of the serial property.

Binary Protocol:

ü 04 xb 0 ?

F

81h 30h 34h 78h 62h 30h 3Fh 1h 0h

• 1 1 xb 0 00000100

1h 31h 31h 78h 62h 30h 30h 30h 30h 30h 30h 31h 30h 30h

2Ah

Ascii Protocol:

@ 04 xb 0 ? 0493

40h 30h 34h 78h 62h 30h 3Fh 30h 34h 39h 33h

$ 11 xb 0 00000100 0785

24h 31h 31h 78h 62h 30h 30h 30h 30h 30h 30h 31h 30h 30h

30h 30h 37h 38h 35h

178/194 Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

List of Commands

5

Multigauge Compatible Protocol:

# 0 81 ?

23h 30h 38h 31h 3Fh Dh

> 0 81 00000100

3Eh 30h 38h 31h 30h 30h 30h 30h 31h 30h 30h Dh

The answer means that the unit is in ACK/NACK mode.

Tab. 38

Value

“2”

“3”

“4”

“5”

“6”

“7”

“8”

“9”

“:”

32h

33h

34h

35h

36h

Protocol Errors

If incongruencies are detected in the composition of the data packet sent to the Dual controller (in other words a correct reception but an incorrect data format), the Dual controller will reply with an error code identified by the “!” (21h) command according to the following table.

37h

38h

38h

3Ah

Description

Non existent command code

Channel not valid for the selected command

Write mode not allowed for the selected command

Unvalid or non-congruent data transmitted

Write value exceeding the allowed limits or step not allowed

Data format not recognized on the protocols implemented

Write not allowed to channel ON

Write not allowed to channel OFF

Write allowed in Serial Configuration Mode only

Value In Full Comp. Mv

“0” 30h

“1”

“2”

31h

32h

“4096” 34h30h39h36h

“4” 34h

“16” 31h36h

“1” 31h

“64”

“128”

36h34h

21h32h38h

“4096” 34h30h39h36h

Dual Controller User Manual / 87-900-094-01 (I) 179/ 194

5 Technical Information

List of Commands

MultiVac Compatibile Serial Error Coding

Tab. 39

Full Compatible MV Value

1 31h

2 32h

Description

Error in the power supply unit code

4 34h

8 38h

16

32

64

31h36h

33h32h

36h34h

128

256

512

1024

2048

4096

8192

31h32h38h

32h35h36h

35h31h32h

31h30h32h34h

32h30h34h38h

34h30h39h36h

38h31h39h32h

Out of limits error

Unallowed step error

Attempt to modify values with pump powered on

Attempt to read measurements with pump powered off

Pump fault error

Intervention on non-existing pump error

Pump polarity error

Intervention on non-present remote I/O error

Write attempt made in

“REMOTE COMM.” mode

Modification allowed on SPARE pump only

In the following example is shown a bad command send to the DUAL.

Binary Protocol:

ü 04 A0 31 V

81h 30h 34h 41h 30h 33h 31h 76h

• 05 A0 3 !3 T

1h 30h 35h 41h 30h 33h 21h 33h 54h

180/194 Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

List of Commands

5

Ascii Protocol:

$ 04 A0 3 1 0377

24h 30h 34h 41h 30h 33h 31h 30h 33h 37h 37h

$ 05 A0 3 !3 0385

24h 30h 35h 41h 30h 33h 21h 33h 30h 33h 38h 35h

Multigauge Compatible Protocol:

# 3 30 ?

23h 33h 33h 30h 3Fh Dh

> 3 00 ! 3

3Eh 33h 30h 30h 21h 33h Dh

Tab. 40

Dual Controller Error Status

2

3

1

4

5

6

7

8

31h

32h

33h

34h

35h

36h

37h

38h

High Voltage errors

High Voltage off due to front panel interlock activation

High Voltage off due to Remote I/O interlock activation

High Voltage off due to Cable HV interlock activation

Dual fault

High Voltage off due to a general DSP determined fault

High Voltage off due to an HV module overtemperature determined by the DSP

Remote I/O card not present or faulty

Remote I/O card present, but faulty

Panel Interlock

Remote Interlock

Cable Interlock

HV not found

HV Fault

HV Overtemperature

R.I/O not found

R.I/O fault

Dual Controller User Manual / 87-900-094-01 (I) 181/ 194

7

8

9

10

9

10

11

12

1

4

1

2

2

3

3

4

5

5 Technical Information

List of Commands

39h High Voltage off due to the protect function activation

31h30h High Voltage off due to shortcircuit protection activation

31h31h High Voltage off due to an HV module overvoltage or overcurrent determined by the DSP

31h32h High Voltage off due to the zero measurement protection activation

31h

32h

33h

34h

31h

32h

33h

34h

35h

Protect

Short Circuit

Over Volt/Curr

Zero Meas

MiniGauge off due to front panel interlock activation

The selected Minigauge was not recognized

The Minigauge is signaling a Fault condition

The selected Minigauge was disconnected

RAM failure: RAM diagnostics error config register: incorrect value in the uC 68HC11 configuration register test mode: invalid uC 68HC11 operating mode copyright: violation of the signature in the ROM or the ROM was corrupted eeprom fault: checksum or non-volatile memory write errors. Factory defaults are automatically loaded

Panel Interlock

Gauge not found

Gauge fault

Gauge not connected

Software Error

Software Error

Software Error

Software Error

Software Error

37h

38h hv dsp not found: the Dsp does not respond during the uC initialization phase dsp fault: the Dsp does not respond during normal operation

Software Error

Software Error

39h invalid option: option card not configured correctly Software Error

31h30h unknow option: generic execution error Software Error

182/194 Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

Specific Protocol Settings

5

Specific Protocol Settings

Ack/Nack Mode

Setting the appropriate bit via the Serial Property command enables the Dual to transmit the Acknowledge (06h) flow control.

Write Reply

Setting the appropriate bit via the Serial Property command enables the Dual to provide a reply after a write command with the typical read communication.

Example:

HV power on: reply (HV on): reply (HV not on):

[header]A011[chk]

[header]A011[chk]

[header]A010[chk]

Multiple Commands

Setting the appropriate bit via the Serial Property command enables multiple command function. With this function, it is possible to transmit to the Dual query command sequences within the same data packet, by linking 1 up to 6 query commands to the command-

channel-data fields.

Dual Controller User Manual / 87-900-094-01 (I) 183/ 194

5 Technical Information

Specific Protocol Settings

In the case of multiple commands, the data format has the following limitations:

ƒ

ƒ

ƒ

ƒ

Format errors in only one of the commands sent will cause an error with the entire packet

With the multiple command it is not possible to read the strings

(eg., software version)

Multiple commands are not enabled with the Lexington protocol

The query has to be as follows:

[command][channel][data query (?)][8 byte space] [next command]….[chk]

ƒ The reply data are collected in 12-byte packets as follows:

[command][channel][data answer][n space]

Following is an example of a multiple command where a space is indicated with the letter s: query: HV1 state, HV2 state, Vmax ch1, Vmax ch2:

ƒ [header]A01?ssssssssA02? ssssssssH01? ssssssssH02?ssssssss [chk] reply HV1 off, HV2 on, Vmax ch1 5000V, Vmax ch2 7000V

ƒ [header]A010ssssssssA021ssssssssH0105000 ssssssssH0207000ssss[chk]

Automatic Serial Mode

Setting the appropriate bit via the Serial Property command enables the automatic Serial Mode function. When the Dual receives a serial write command, it automatically switches to the Serial Mode state in which it can accept the serial command. If a read command is received instead, the operating mode remains unaltered.

If this bit is not set, the serial write command is not accepted (the reply will be an error code) and the Dual will remain in the selected operating mode (either Local or Remote I/O).

184/194 Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

Specific Protocol Settings

5

Compatibility with MultiVac

The Binary and ASCII protocols are implemented, for the most part, by the protocol used on the MultiVac but are characterized by certain differences consisting of new features and certain Dual controller structural variations with respect to the MultiVac.

The new features implemented are the following:

ƒ

ƒ

ƒ

ƒ

Multiple commands

Ack/Nack mode

Reply on write mode

Even and odd parity management

ƒ

ƒ

New serial commands

MiniGauge serial commands

ƒ Configuration serial commands.

The structural variations mostly concern the command set and formats. In particular, it is not possible to make up for the differences resulting from the hardware implementation such as the presence of the HV microcontroller, the Remote I/O, the MiniGauge options and the configuration commands.

NOTE These differences can be limited by using the Serial Property command to set the full compatibility MultiVac bit to 1. Its purpose is to render compatible the already existing programs but introduces certain limitations that advise against its use with new applications. In the case of a full compatibility MultiVac, the following settings will also be made:

ƒ Multiple command disable

ƒ Reply on write disable

ƒ Lexington protocol exclusion

The following table lists the incompatibilities that remain even though full compatibility MultiVac has been set:

Dual Controller User Manual / 87-900-094-01 (I) 185/ 194

5 Technical Information

Specific Protocol Settings

Tab. 41

Command Modification

HV on/off

Unit of measure

Cannot be used on the gauges

Also implements Pascal (02h reply)

µC firmware version

Device number

Dual error status

Serial reset

Full meas hv

Identifier for: “VPc ver. 0.1”

Pump correspondence table modified

Returns the Dual error codes according to the table

Implemented on all versions

Full status

Remote error

Psel

Eliminated

Was available on MultiVac 3.0 and later versions only

(MultiGauge)

Eliminated

Was available on MultiVac 3.0 and later versions only

(MultiGauge)

Partly implemented

Read only also on “Spare” pump

186/194 Dual Controller User Manual / 87-900-094-01 (I)

Technical Information

Accessories/Options

5

The following commands, therefore, remain unchanged:

HV on/off, V meas, I meas, Pr meas, fixed/step, start/protect,

Vmax, Imax, Pmax, Iprotect, Vstep1, Istep1, Istep2, SetPt1, SetPt2,

P100nA, P10uA, P10mA, P400mA.

The part relating to the Gauges will not guarantee compatibility since the Gauge cards implemented have been changed with respect to

MultiVac.

In addition, configuration commands were unavailable on the

MultiVac.

Accessories/Options

Tab. 42

Rack Adapter

High Voltage cables:

ƒ H.V. bakeable cable, radiation resistant, 13 ft. (4 m) long, with Interlock

ƒ H.V. bakeable cable, radiation resistant, 13 ft. (4 m) long

ƒ H.V. bakeable cable, radiation resistant, 13 ft. (4 m) long, for vacIon Pumps

Eyesys Convectorr gauge cable

Eyesys Mini B/A gauge cable

RS422 computer interface option

RS485 computer interface option

Eyesys gauges option

929-0064

929-0705

929-0710

929-0712

929-0721

929-0720

Ask for Modified Standard P/N

Ask for Modified Standard P/N

Ask for Modified Standard P/N

Dual Controller User Manual / 87-900-094-01 (I) 187/ 194

5 Technical Information

Accessories/Options

188/194 Dual Controller User Manual / 87-900-094-01 (I)

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Vacuum Products Division

Via F.lli Varian 54 10040 Leini, (Torino) -

Italy

Tel.: +39 011 997 9111

Fax: +39 011 997 9350

Toll-Free: 00 800 234 234 00

Customer Support & Service

NORTH AMERICA:

Toll Free: 800 882 7426, Option 3 [email protected]

EUROPE:

Toll Free: 00 800 234 234 00 [email protected]

PACIFIC RIM: please visit our website for individual office information http://www.agilent.com

Worldwide Web Site, Catalog and Order

On-line: www.agilent.com

Representative in most countries

12/10

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