CTI-CRYOGENICS 8500 compressor Installation, Operation and Service Instructions

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CRYOGENICS

HELIX TECHNOLOGY CORPORATION

8500 Compressor

(For Use with Cryo-Torr High-Vacuum Pumping System)

Installation, Operation and Service

Instructions

8040251

Rev. L (3/97)

View our inventory

HELIX TECHNOLOGY CORPORATION http://www.helixtechnology.com

The information in this document is believed to be accurate and reliable. However,

Helix Technology Corporation, cannot accept any financial or other responsibilities that may result from the use of this information. No warranties are granted or extended by this document.

Helix Technology Corporation reserves the right to change any or all information contained herein without prior written notice. Revisions may be issued at the time of such changes and/or deletions.

Any duplication of this manual or any of its parts without expressed written permission from

Helix Technology Corporation is strictly prohibited.

Any correspondence regarding this document should be forwarded to:

Helix Technology Corporation

Mansfield Corporate Center

Nine Hampshire Street

Mansfield, Massachusetts 02048-9171 U.S.A.

Telephone: (508) 337-5000

FAX: (508) 337-5464

The following Helix Technology Corporation trademarks and service marks may appear in this document:

CTI-Cryogenics

®

Cryo-Torr

®

Cryogem

®

On-Board

®

RetroFast

®

Value Line

™

FastRegen

™

TurboLink

™

ThinLine

™

GUTS

®

Cryodyne

®

Cryogenerator

®

Helix

®

RetroEase

TurboPlus

®

®

All other trademarks or registered trademarks are the property of their respective holders.

Copyright© 2000 Helix Technology Corporation Printed in U.S.A.

8500 Compressor (For Use with Cryo-Torr High-Vacuum Pumping System)

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Table of Contents

Section 1 - Introduction

General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Installation, Operation and Service Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Section 2 - Inspection

Packaging of the System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

The Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Section 3 - Installation

Compressor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

Preparing the Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

Assembling the Compressor Input-Power Cable . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Electrical Preparation of Compressor Control Module . . . . . . . . . . . . . . . . . . . 3-5

Cooling Water: Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

Cooling Water: General Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

Cooling Water: Flow and Pressure Requirements . . . . . . . . . . . . . . . . . . . . . . . 3-8

Cooling Water: Temperature Rise . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

Oil Circuit Stabilization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Connecting the Compressor to the Cryopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Electrical Connection of Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Multipump Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Section 4 - Maintenance Procedures

Scheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

Removing the Compressor Adsorber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Installing the Compressor Adsorber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Unscheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Suggested Unscheduled Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . 4-4

Adding Helium Gas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Helium Circuit Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Cryopump Decontamination Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Compressor Decontamination Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Priming the Compressor Oil System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

Appendix A - Customer Support Centers

Appendix B - Troubleshooting Procedures

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Table of Contents (continued)

Appendix C - Electrical Schematic for 8500 Compressor

Appendix D - Components in the Electrical Control Module of

8500 Compressor

Appendix E - 8500 Compressor Flow Diagram

Appendix F - Multiple Cryopump Installation with Single 8500 Compressor

Appendix G - Remote Cryo-Torr High-Vacuum Pump Operation Using

8500 Compressor

iv

Figures

Figure 1-1: 8500 Compressor Front and Side Views . . . . . . . . . . . . . . . . . . . . 1-2

Figure 1-2: 8500 Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Figure 3-1: Block Diagram for 8500 Compressor Installation . . . . . . . . . . . . . 3-1

Figure 3-2: Removing Compressor Pump Shipping Supports . . . . . . . . . . . . . . 3-2

Figure 3-3: Stripping Compressor Input-Power Cable Insulation . . . . . . . . . . . 3-3

Figure 3-4: Input Power Cable Receptacle Plug . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Figure 3-5: Wiring Diagram for Standard and Grounded Delta Configurations 3-5

Figure 3-6: Preparing the 8500 Compressor Control Module- . . . . . . . . . . . . . 3-6

Figure 3-7: 8500 Compressor Cooling Water Flow and Pressure Requirements 3-8

Figure 3-8: 8500 Compressor Water Discharge Temperature Increase (°F) . . 3-10

Figure 3-9: 8500 Compressor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

Figure 4-1: Disconnecting the Adsorber Self-Sealing Couplings . . . . . . . . . . . 4-2

Figure C-1: Electrical Schematic for 8500 Compressor, P/N 8031351 Rev. D C-3

Figure D-1: Components in the Electrical Control Module of 8500 Compressor D-2

Figure E-1: Flow Diagram of 8500 Compressor . . . . . . . . . . . . . . . . . . . . . . . . E-2

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8500 Compressor (For Use with Cryo-Torr High-Vacuum Pumping System)

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Table of Contents (continued)

Figure F-1: Typical Multiple Cryopump Installation with 8500 Compressor . . F-1

Figure G-1: Remote High-Vacuum Pump Switching Schematic . . . . . . . . . . . G-2

Tables

Table 1-1: 8500 Compressor—Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

Table 1-2: 8500 Compressor Specifications—Power Requirements Steady-State

Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

Table 1-3: 8500 Compressor Specifications—General Specification . . . . . . . . 1-3

Table 2-1: Cryo-Torr High-Vacuum Pump System . . . . . . . . . . . . . . . . . . . . . 2-1

Table 3-1: Compressor Power Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

Table A-1: Customer Support Centers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-2

Table B-1: Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . B-2

Table C-1: 1FU Through 14FU—(All Slow-Blow Type) . . . . . . . . . . . . . . . . . C-1

Table C-2: Legend for Figure C-1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1

Table D-1: Component Callouts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D-2

P/N 8040251 v

8500 Compressor (For Use with Cryo-Torr High-Vacuum Pumping Systems)

Section 1 - Introduction

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General

The manual provides instructions for installing, operating and servicing the

8500 Compressor. If you are installing or operating a Cryo-Torr High-

Vacuum System you should also have available the high-vacuum manual that applies to your particular system:

• 8040240 Cryo-Torr 100, 7, 8 and 8F High-Vacuum Pumps

• 8040252 Cryo-Torr 10 High-Vacuum Pump

• 8040219 Cryo-Torr 250F High-Vacuum Pump



The manuals for a system cover two basic components: the high-vacuum pump and the compressor. Each manual outlines the details necessary for installation, operation and servicing of that component. A manual is shipped with each system component (high-vacuum pump and compressor).

When you purchase a system, you will receive the two manuals necessary for system installation, plus a loose-leaf binder with index tab separators, allowing you to compile a complete indexed notebook.

Installation, Operation and Service Instructions

Installation, Operation and Service Instructions for your 8500 Compressor provide easily accessible information. All personnel with installation, operation, and servicing responsibilities should become familiar with the contents of these instructions to ensure high quality, safe, reliable performance.

Unit must be wired by an authorized electrician in accordance with the national electrical code, ANSI/NFPA 70-1987, as well as the local codes

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Introduction

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A

B

C

D

Figure 1-1: 8500 Compressor Front and Side Views

Table 1-1: 8500 Compressor—Dimensions

Location

A

B

C

D

Compressor Dimension

Inches (MM)

19.52 max. (496 mm)

21.50 max. (546 mm)

24.24 max. (616 mm)

2.30 (55 mm)

Table 1-2: 8500 Compressor Specifications—Power Requirements Steady-State Conditions

Compressor

8500, Part No.

8031348G001

8500, Part No.

8031348G002

Volts

208/230

200

460

380

Hz

60

50

60

50

Phase

3

3

3

3

Full Load

Current

(Amps)

16

14

8

8

Operating

Votage Range

(Volts)

198-250

190-230

395-506

342-457

Maximum

Phase Run

Current

(Amps)

23

22

13

13

1-2 P/N 8040251


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Table 1-3: 8500 Compressor Specifications—General Specification

Specification Description

340 lbs (154 kg) approximate

Weight

Weight (shipping)

Power consumption

Compressor input-power cable (customer-supplied)

Helium pressure

445 lbs (202 kg) approximate

5 kw, nominal operating power, 5.75 kW maximum

Nominal power factor 0.8: 7.6 kVA max.

Recommended type SO-4 conductor, 600V, neoprene jacket and 10-gauge wire. Install per Figure B.1, electrical schematic diagram, ensuring compliance with all national, state and local standards.

Static: 195-205 psig (1345 - 1415 kPa) at 70 to 80° F (21 to

27° C) Return: normal operation: 75-85 psig (517 - 590 kPa) at operating temperature.

50 to 100°F (10 to 38°C) Ambient operating temperature range

Interface Cold-head power receptacles (3): Mates with plugs on cold head power cables.

Compressor input-power receptacle: Mates with Hubbel twist lock plug No. 2723 (for Model G001). For Model 8500 Model

G002, Part No. 2433

Gas-supply connector: 1/2-inch self-sealing coupling

Gas-return connector: 1/2-inch self-sealing coupling

Remote control receptacle (24 VAC): compressor remote current: 2.7A inductive, coldhead remote current: 0.15A mates with P5 connector P/N MS3106A-14, supplied by

CTI-CRYOGENICS.

Adsorber service schedule Replace every three years.

Cooling water requirements 70°F water supply, 2.5 gpm, 14 psid (pressure drop: water inlet to water outlet).

The pressure value does not consider discharge back-pressure conditions.

Maximum/minimum water requirements

Maximum outlet temperature 100°F (38°C)

Minimum inlet temperature 40°F (4°C)

Nominal inlet pressure, maximum 100 psig

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Introduction

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This compressor has been designed to operate with water having a pH value of 6.0 to 8.0 and a calcium carbonate concentration of less than 75 parts per million (typical municipal drinking water quality). For applications of lower pH or greater hardness, water conditioning may be necessary.

1-4 P/N 8040251


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1 7

8 9

10

11

4

3

6

5

12

13

2

18

17

16

15 14

LEGEND

1. Power ON indicator lamp.

2. Oil sight glass

3. Cooling water output.

4. Cooling water input.

5. Helium gas-return connector self-sealing coupling.

6. Helium gas-supply connector self-sealing coupling.

7. Compressor overload reset.

8. Voltage selector switches (S3).

9. Voltage selector switches (S2).

10. Elapsed time meter (ETM).

11. Cold head power circuit breakers (CB2 and CB3).

12. Cold head power cable receptacles (J2, J3, and J4).

13. Input power cable receptacle (J1).

14. Helium gas charge fitting and valve.

15. Helium return pressure gauge.

16. Safety interlock.

17. System power ON/OFF switch circuit breaker (CB1).

18. System remote control receptacle (J5) (Jumper plug installed).

Figure 1-2: 8500 Compressor

P/N 8040251 1-5


Section 2 - Inspection

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Packaging of the System

The Cryo-Torr High-Vacuum Pump System is packaged in three separate cartons. Listed below are the contents of each carton, depending upon which cryopump is included in the system. Note that an Installation,

Operation and Service Manual is included in the carton for the highvacuum pump and for the compressor; each manual covers the component packaged in that carton.

When installing a Cryo-Torr High-Vacuum Pump System, CTI-

CRYOGENICS recommends that as you unpack a component, you perform an inspection and the necessary tasks for system installation for the component according to the manual included with the component. Final system installation and operation will be performed following procedures in the high-vacuum pump manual that applies to your particular system.

Table 2-1: Cryo-Torr High-Vacuum Pump System

Carton Label System Component

Cryo-Torr Cryo-Torr 100, 7, 8 and 8F Cryopump

Cryo-Torr Cryo-Torr 10 Cryopump

Cryo-Torr Cryo-Torr 250F Cryopump



Compressor 8500 Compressor

Accessories Installation and Scheduled Maintenance Tool Kit and Accessories, P/N 8032040G009 for G001 compressor or P/N 8032040G010 for G002 compressor.

Manual Included

804024

8040252

8040219

8040259

8040266

8040251

None

P/N 8040251 2-1

Inspection

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The Compressor

On receipt, remove the 8500 Compressor from its shipping carton and inspect the compressor for evidence of damage as described in this Section.

1. Unpackage and remove the compressor from its shipping carton.

2. Check the carton contents. It should contain: a. 8500 Compressor.

b. Two barbed fittings for compressor cooling water connections.

c. Compressor remote start connector.

d. Input power connector.

e. Oil prime manifold, P/N 8018129.

f.

8500 Compressor Manual, P/N 8040251.

g. Spare fuses.

2-2 P/N 8040251

Installation

Section 3 - Installation

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Removing Compressor Pump

Shipping Supports

(Refer to Page 3-2)

Setting Voltage

Tap Switches

(Refer to Page 3-5)

Cooling Water Connections to Compressor

Cooling Water PH Factors and Conservation

Cooling Water Flow and Pressure Requirements

Cooling Water Temperature Rise

(Refer to Page 3-7)

Oil Circuit Stabilization

(Refer to Page 3-10)

Helium Gas Return and

Supply Connections

Verifying Helium Static Pressure


Making Electrical

Connections


3-1

Figure 3-1: Block Diagram for 8500 Compressor Installation

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Compressor Installation

Installation of your compressor requires no special tools other than those supplied in the Installation and Scheduled Maintenance Tool Kit.

Preparing the Compressor

1. After removing the compressor front panel, refer to Figure 3-2 and remove the front two compressor pump shipping supports.

a. Remove the front two nuts and red flat washers that secure the compressor pump tightly in position.

NOTE: Retain the two red flat washers for use during shipment.

b. Remove the two rubber grommets that are in the package attached to the compressor: install them, flat side up, onto the front two mounting posts.

c. Reinstall the two nuts and screw them down flush with the tops of the mounting posts.

d. Replace the compressor front panel.

3-2

Compressor Base

Hex Head Nut

Red Flat Washer

Hex Head Nut

Red Flat Washer

Rubber Grommets

Figure 3-2: Removing Compressor Pump Shipping Supports

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Assembling the Compressor Input-Power Cable

CAUTION

Use round cable (diameter 0.595 inch to 1.50 inch) with the CTI-

CRYOGENICS supplied compressor receptacle plug. Do not tin the conductor leads.

Assemble the compressor input-power cable using the CTI-supplied compressor receptacle plug and a 600-volt power cable that has a SO-4 conductor, 600-volt rating neoprene jacket and 10-gauge wire as follows.

1. Prepare the input power cable by stripping wires nd jacket of the cable as shown in Figure 3-3.

3-3

Figure 3-3: Stripping Compressor Input-Power Cable Insulation

2. Disassemble the receptacle plug. See Figure 3-4.

a. Loosen the two assembly screws (1) securing the receptacle plug face (2) to the cover (3) until plug face can be removed from cover.

b. Open cord clamp (5) by loosening the two clamp screws (4) securing the clamp to the cover.

NOTE: If you are using cable with a diameter greater than 0.895 inch, remove the auxiliary insert (6) from the cover.

c. Insert the stripped end of the power cable into the cover opening by starting from clamp end (6) until the stripped conductor ends are exposed.

d. Loosen and back off all terminal screws on receptacle plug face (2).

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3-4

1.

Assembly Screw

2.

Plug Face

3.

Cover

4.

Clamp Screw (2)

3.

Cord Clamp

4.

Auxiliary Insert

5.

Key

6.

Terminal Screw (4)

Figure 3-4: Input Power Cable Receptacle Plug

a. Insert all conductors into their proper wire entrance holes on receptacle plug face. See Figure 3-5. Check that there are no bare conductors exposed. Tighten terminal screws to 9-12 in.-lbs. torque.

WARNING

For installation where one of the 3-phase legs is at or near ground potential, connect that leg to terminal X on the compressor as shown in Figure 3-5.

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PHASE A

PHASE B

PHASE C

GROUND

COMPRESSOR-RECEPTACLE PLUG

SUPPLIED BY CTI-CRYOGENICS

Z

G

X

Y

STANDARD CONFIGURATION

Figure 3-5: Wiring Diagram for Standard and Grounded Delta Configurations

3. Assemble the receptacle plug by sliding the cover over the wire assembly noting key (7). Align the key on the cover to the keyway on the plug face nd tighten the two assembly screws (1) to secure the cover and plug face. Alternately tighten the clamp screws (4) to

8-10 in.-lbs. torque.

WARNING

Insure that the ground wire is returned to the equipment grounding conductor of the circuit supplying the receptacle.

4. Refer to Multipump Installation, for correct phasing checkout procedure.

Do not connect the compressor to the power source at this time. All of the preparation must be completed and all the panels reinstalled before electrically connecting the compressor.

Electrical Preparation of Compressor Control Module

1. Refer to Table 1-2, for electrical power requirements. Then, using a voltmeter, measure the phase-to-phase voltage from the power source.

2. Prepare the compressor voltage selector switch S3 as required in accordance with Figure 3-6.

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3-6

Voltage

Selector Switch

(S2)

Voltage

Selector Switch

(S3)

Elapsed Time

Meter

Cold Head Power

Circuit Breakers

(CB2, CB3)

System Power

ON/OFF Switch Circuit

Breaker (CB1)

RESET

Cold Head Power

Cable Receptacles

(J2, J3, J4)

System Remote

Control Receptacle

(J5)

Input Power Cable

Receptacle

(J1)

Figure 3-6: Preparing the 8500 Compressor Control Module

-

Compressor

Configuration

P/N 8031348G001

208/230 VAC, 50/60Hz

P/N 8031348G002

380 VAC, 50 Hz

460 VAC, 60 Hz

Table 3-1: Compressor Power Information

Frequency (Hz)

50

60

50

60

Line

Volatge

190-210

210-230

198-230

230-250

342-400

400-457

395-460

460-506

2 -

2*

2 -

2*

2 -

2*

2 -

2*

Settings

S2 S3

3 -

4*

3 -

4*

3 -

4*

3 -

4*

* Factory Settings

Cold-head

Voltage

137-153

131-144

145-169

144-158

126-147

125-143

145-169

144-158

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Cooling Water: Preparation

If flexible water hose connections are used, install the barbed fittings supplied with the compressor on the input and output connections:

1. Apply a light coating of standard plumbing thread sealant on the barbed fitting threads.

2. Tighten fittings on 1/2-inch FPT input and output connections. DO

NOT OVERTIGHTEN.

3. Connect flexible hoses to the fittings and secure with hose clamps.

If hard piping is desired, install the water lines directly onto the compressor

1/2-inch FPT input and output connections. DO NOT OVERTIGHTEN.

CAUTION

Check water connections for leaks.

Cooling Water: General Considerations

NOTE: Adjust your water flow to maintain an optimum discharge water temperature of 80°F with a minimum input pressure of 7 psi. For detailed water requirements, see below.

1. Cooling water must meet flow and pressure requirements as indicated in the following subsections.

2. Cooling water should have a pH value of 6.0 to 8.0 and a calciumcarbonate concentration of less than 77 ppm. The quality of typical municipal drinking water is generally acceptable. If the cooling water has a pH value lower than 6.0 or a calcium-carbonate concentration higher than 77 ppm, water conditioning may be required.

3. To conserve water, the cooling water should be shut off when the compressor is not running.

CAUTION

If cooling water below 45°F (7° is allowed to run through the compressor while the compressor is not operating, the compressor oil will change viscosity and thicken, causing the compressor to overheat and shut off at startup. in this event, repeatedly restart the compressor and allow it to run until it has shut off several times. The oil temperature will rise and thereby allow continuous compressor operation.

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4. Drain and purge water from the compressor before shipping it back to the factory or subjecting it to freezing conditions. Purge water from the compressor by blowing compressed air, regulated to 30 to

40 psig (200 to 275 kPa) into the compressor output connection and allowing water to exit from the water input connection.

Cooling Water: Flow and Pressure Requirements

CAUTION

If your water supply pressure falls below 7 psig due to back pressure, the compressor will overheat and shut down.

Use the two graphs in Figure 3-7 to determine the minimum acceptable cooling water supply pressure at different flow rates and temperatures.

Find the minimum pressure:

NOTE: Without consideration of back pressure.

3-8

Figure 3-7: 8500 Compressor Cooling Water Flow and Pressure Requirements

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1. Determine the temperature of the cooling water. Allow a ±10°F to the present water temperature if a variation cannot be ascertained. Plot the high and low temperatures on the vertical axis of the lower graph.

The example describes cooling water that varies between 45° and 67° F.

2. Determine the optimum water flow rate by drawing a horizontal line from the upper temperature variation figure on the lower graph to the upper curve of the allowable operating range indicated by cross-hatching. Draw a line from this intersecting point straight down to the horizontal axis to find the optimal flow rate.

The example shows a solid arrow extending from 67°F and intersecting the allowable operating range. Dashed arrows pointing downward indicate a water flow rate of 2.5 gallons per minute.

3. Determine the cooling water supply pressure drop by drawing a straight line up from the flow rate in the lower graph to the upper graph. At the point at which this line intersects the upper graph, draw a line leftward to the vertical axis and find the water supply pressure drop.

The example shows dashed arrows extending from the lower to the upper graph. On the upper graph the dashed arrows intersect the graph curve at approximately 15 psig.

4. Determine the total cooling water supply pressure drop by adding the pressure drop determined from the graph to the water back pressure at the installation site.

Cooling Water: Temperature Rise

CAUTION

The temperature of the cooling water as it leaves the compressor should not exceed 100°F.

Use the graph in Figure 3-8 to determine the rise in cooling water temperature as it passes through the compressor. The recommended discharge temperature for the compressor is 80° F. This information is used by plant engineering personnel to determine cooling water requirements.

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3-10

NOTE: Used for clarification of example presented in text.

Figure 3-8: 8500 Compressor Water Discharge Temperature Increase (°F)

Oil Circuit Stabilization

1. Check to insure that the cover and all panels are properly installed on the compressor.

2. With the system power ON/OFF switch in the OFF position, connect the input-power cable to the power source. If necessary, refer to Table 1-2, for electrical requirements.

3. Place the system power switch to the ON position and allow the compressor to run 15 minutes to stabilize the oil circuit. If the compressor shuts down, oil system priming may be necessary. Refer to

Section 4 - Maintenance Procedures for oil priming procedures.

Connecting the Compressor to the Cryopump

NOTE: If your application requires the use of multiple compressors on a single gas manifold, you must install an external check valve on each compressor. Order CTI-CRYOGENICS Kit P/N 8080275K004 and contact the Product Service Department for installation guidance on manifolding compressors.

Make the connections between the cryopump and compressor. See Figure

3-9.

1. Remove all dust plugs and caps from the supply fittings and return lines, compressor, and cryopump cold head. Check all fittings.

2. Connect the helium-gas return line from the gas-return connector on the rear of the compressor to the gas-return connector on the cryopump cold head.

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3. Connect the helium-gas supply line from the gas-supply connector on the rear of the compressor to the gas-supply connector on the cryopump cold head.

4. Attach the supply and return line identification decals (CTI supplied) to their respective connecting piping ends.

Verify proper helium supply static pressure by con- firming that the helium pressure gauge reads 195 - 205 psig (1345 - 1415 kPa), in an ambient temperature range of 50 to 10° F (10 to 38° C).

If the indicated pressure is higher than 205 psig (1415 kPa), reduce the pressure as follows:

1. Remove the flare cap from the gas charge fitting located on the rear of the compressor.

2. Open the gas charge valve very slowly. Allow a slight amount of helium gas to escape until the helium pressure gauge reads 200 psig

(1380 kPa).

3. Close the gas charge valve and reinstall the flare cap.

If the indicated pressure is lower than 195 psig (1345 kPa), add helium gas as described in Section 4 - Maintenance Procedures.

Electrical Connection of Compressor

WARNING

The system power switch on the rear of the compressor must be in the

OFF position before making any and all electrical connections.

1. Connect the power cable to the rear panel of the compressor and the other end to the electrical power connector on the cryopump.

2. Plug the compressor input power cable into the power source.

3. Turn the system power switch on the rear of the compressor to the

ON position.

4. If the compressor does not start, the most likely cause is that the main power input phasing is incorrect. To correct the phasing, interchange any two of the three phase wires at the compressor input power receptacle plug. See Figure 3-5.

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Multipump Installation

Your 8500 Compressor can be connected to more than one high-vacuum pump at a time. For example, three Cryo-Torr 8 vacuum pumps can be connected to a single 8500 Compressor.

CAUTION

For detailed instructions on multiple cryopump installation, refer to

Appendix F.

If a remote switching system is desired, refer to Appendix G for fabrication of a remote switching circuit. Remove the supplied jumper plug connected to the compressor remote connector J5 and connect the switching circuit to J5 connector. If the remote switching circuit is to be discontinued, then simply disconnect the remote switching circuit from the

J5 connector and reinstall the jumper plug.

NOTE: The compressor will not operate if the jumper plug is not reinstalled.

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User’s

Vacuum

Chamber

Cryo-Torr 8

Helium Supply Line

Helium Return Line

Power Cable

3-13

Figure 3-9: 8500 Compressor Installation

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Section 4 - Maintenance Procedures

WARNING

Always disconnect the compressor from all sources of electrical power before performing any maintenance procedures.

Unit must be wired by an authorized electrician in accordance with the national Electrical Code, ANSI/NFPA 70-1996, as well as the local codes. This shall include installation of a readily accessible disconnect device into the fixed wiring supplying power.

An insulated safety grounding conductor that is identical in size, insulation material and thickness to the circuit supply conductors, except that it is green with or without one or more yellow stripes is to be installed as part of the branch circuit which supplies the unit or system. The grounding conductor described is to be connected to the equipment grounding conductor of the supply circuit.

Scheduled Maintenance

The only scheduled maintenance required on the 8500 Compressor is replacement of the compressor adsorber (P/N 8080275K001) every three years.

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Maintenance Procedures

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Compressor

Rear

Panel

4-2

This 1 1/8 in. wrench holds the coupling in a stationary position.

This 1 3/16 in. wrench is used to loosen the self sealing coupling connector. Note the direction of the large arrow.

This 1 1/8 in. wrench holds the coupling in a stationary position.

This 1 3/16 in. wrench is used to tighten the self sealing coupling connector. Note the direction of the large arrow.

To Disconnect The Coupling To Connect The Coupling

Figure 4-1: Disconnecting the Adsorber Self-Sealing Couplings

Removing the Compressor Adsorber

To remove the compressor adsorber see Figure 4-1 and proceed as follows:

1. Shut down the compressor.

2. Disconnect the compressor input power cable from its electrical power source and disconnect the water lines.

3. Disconnect the flex lines from the gas-return and gas-supply connectors at the rear of the compressor.

NOTE: Use the two wrenches supplied in the Installation and Scheduled

Maintenance Tool Kit to avoid loosening the body of the coupling from its adapter. Hold one wrench fast on the coupling half attached to the rear side of the compressor. Use the other wrench to loosen the coupling on the helium supply or return line.

4. Loosen the four screws that hold the compressor rear panel and remove the panel.

5. Disconnect the adsorber-inlet self-sealing coupling. See Figure 4-1.

6. Remove the bolts, nuts, and washers that secure the adsorber to the base of the compressor. Save all hardware.

7. Carefully slide the adsorber outward until it clears the compressor and remove the adsorber.

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WARNING

Depressurize the adsorber before disposing of it. Attach the depressurization fitting (included in the Installation and Scheduled Maintenance

Tool Kit) to the coupling half at either end of the adsorber and tighten it slowly.

Installing the Compressor Adsorber

1. Install the replacement adsorber as follows: a. Remove the dust caps from the self-sealing coupling halves at each end of the replacement adsorber.

b. Install the replacement adsorber following the steps for compressor adsorber removal in reverse order. Use the hardware saved from the previous procedure.

2. Connect the adsorber to the compressor internal piping as follows: a. Check the self-sealing connector flat rubber gasket to make sure that it is clean and properly positioned.

b. Make the first turns by hand and then firmly seal the connection using the two wrenches until the fittings “bottom”.

CAUTION

Make sure to hold fast on the left coupling nut while tightening the right coupling nut, as shown in Figure 4-1.

c. Using the two wrenches supplied in the Installation and

Scheduled Maintenance Tool Kit, make the connection quickly to minimize minor gas leakage. See Figure 4-1.

3. Replace the panel and secure it by tightening the four screws.

4. Ensure that the pressure gauge reads 195-205 psig (1345-1415 kPa). If additional gas pressure is required, follow the instructions under, Adding Helium Gas. Record the date that the adsorber was replaced, and also make a note that the next adsorber replacement is in three years.

5. Connect the flex lines to the gas-return and gas-supply connectors at the rear of the compressor.

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6. Connect the water lines to the compressor fittings and secure with hose clamps. If hard piping is used, apply a light coating of plumbing thread sealant on threads and install water lines onto the compressor. DO NOT OVERTIGHTEN.

CAUTION

Check water connections for leaks.

7. Connect the cold head power cables to the compressor connectors.

8. Plug the compressor input power cable into the power source.

Unscheduled Maintenance

Suggested Unscheduled Maintenance Equipment

It is advisable to keep on hand the unscheduled maintenance equipment and disposable supplies listed below.

1. Helium, 99.999% pure.

2. Pressure regulator (0-3000/0-400 psig).

3. Maintenance manifold, P/N 8080250K003*.

4. Helium charging line terminating in a 1/4-inch female flare fitting,

P/N 7021002P001.

5. Installation and Scheduled Maintenance Tool Kit, P/N

8032040G014.

*Available from stock; consult the factory or your sales representative.

Adding Helium Gas

Use only 99.999% pure helium gas.

CAUTION

If the compressor helium pressure gauge reads 0, decontamination is required. Refer to Helium Circuit Decontamination, or contact the

Product Service Department.

1. A User-supplied helium charging line terminating in a 1/4-inch female flare fitting, and a two-stage pressure regulator rated at

0-3000/0-400 psig is required for this operation.

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2. If you need to add helium more than once every several months, check for leaks caused by improperly connected self-sealing connections or any mechanical joint within the compressor.

There are two conditions that require the addition of helium gas:

1. Compressor not operating; helium pressure gauge reads 195 psig (1345 kPa), or below.

2. Compressor operating; helium pressure reads 75 psig (517 kPa), or below.

To add helium gas:

1. Attach a two-stage regulator (0-3000/0-400 psig) and charging line to a helium gas (99.999% pure). DO NOT OPEN THE

BOTTLE AT THIS TIME. Purge the regulator and charging lines as instructed in steps a through e below. Do not use helium gas that is less than 99.999% pure.

a. Open the regulator a small amount by turning the adjusting knob clockwise until it contacts the diaphragm, then turn approximately 1/8 to 1/4 turn more, so that the regulator is barely open.

b. Slowly open the bottle valve, and purge the regulator for 10 to 15 seconds. Turn the regulator knob counterclockwise until the helium stops flowing.

c. Connect the charge line to the helium pressure regulator.

d. Remove the flare cap of the gas charge fitting on the rear of the compressor. Loosely connect the charge line to the charge fitting.

e. Set the helium pressure regulator to 10 to 25 psig (70-125 kPa). Allow helium gas to flow through the charging line and around the loosened flare fitting for 30 seconds to purge the charging line of air. Then tighten the flarenut at the end of the charge line.

(This procedure is required to ensure that both the regulator and the charging line will be purged of air and that the air trapped in the regulator will not diffuse back into the helium bottle. For best results, CTI-

CRYOGENICS suggests a dedicated helium bottle, regulator, and line, which are never separated, for adding helium.)

2. Set the helium pressure regulator to 300 psig (2070 kPa). Depending on the compressor operating state, add helium gas:

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HELIX TECHNOLOGY CORPORATION a. If the compressor is running (approximately 2 hours operating time) under normal operating conditions, slowly open the helium charge valve on the rear of the compressor.

When the helium pressure gauge rises to 75-85 psig (517-

590 kPa) tightly close the charge valve.

b. If the compressor is not running, slowly open the helium charge valve. When the helium pressure gauge rises to 195-

205 psig (1345-1415 kPa), tightly close the charge valve.

CAUTION

Add helium gas slowly to prevent relief valve blow-off.

3. Ensure that the helium charge valve on the compressor is tightly closed. Shut off the helium pressure regulator on the helium bottle and remove the charging line from the male flare fitting. Shut off the helium gas bottle valve. Reinstall the flare cap.

Helium Circuit Decontamination

Contamination of the helium-gas circuit is indicated by sluggish or intermittent operation (ratchetting) of the cold head drive mechanism. With severe contamination the cold head drive may seize and fail to operate. One of the major sources of contamination is using helium gas of less than the required purity. When performing the decontamination process, use only

99.999% pure-helium gas, and the regulator and charging line must be properly connected and purged. This contamination procedure will remove contaminants from the cold head and/or compressor, thereby restoring system performance. The cold-trapping of contaminants inside the cold head during this procedure will also decontaminate the compressor if the contamination of the system is not severe. Separate decontamination of the compressor is required whenever the compressor has been opened to atmosphere, or the pressure dropped to zero.

Cryopump Decontamination Procedures

1. Cool down the cryopump and operate it for one to three hours.

If the system will not cool down, proceed to step 2. Operating the cryopump will isolate the contaminants by “freezing” them in the cold head. The contaminants in the helium-gas circuit of the cryopump tend to become frozen inside the cold head. The longer the cryopump is operated beyond the one-hour period, the greater is the amount of contamination that becomes isolated inside the cold head.

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2. Shut down the compressor as follows: a. Close the Hi-Vac valve in your vacuum system.

b. Turn off the system power ON/OFF switch.

CAUTION

Exposing the cryopump to atmosphere during warm-up will cause excessive water vapor adsorption by the charcoal of the 15K array.

3. Immediately disconnect the helium-gas supply and helium-gas return lines from the gas-supply and gas-return connectors at the rear of the compressor. Leave them attached to the cold head.

4. Attach the maintenance manifold (P/N 8080250K003) to the disconnected ends of the helium-gas return and helium-gas supply lines.

5. Reduce the pressure in the cold head to a level of 45 psig by using the maintenance manifold.

6. Allow the second stage of the cold head to warm up to room temperature. Warm-up time can be reduced by purging the cryopump with warm dry argon or nitrogen gas. Using the gas heater, CTI P/N

8080250K020, will reduce warm-up time about 50 percent, and will maintain the gas temperature below the 150°F (66°C) limit.

7. Once the cryopump has reached room temperature, attach a twostage regulator (0-3000/0-400 psig) and charging line to a helium bottle (99.999% pure). DO NOT OPEN THE BOTTLE VALVE AT

THIS TIME. Purge the regulator and charging line as instructed in steps a through e under, Adding Helium Gas. Do not use helium gas that is less than 99.999% pure.

8. Perform in sequence: a. Backfill the cold head and helium-gas return and supply lines with helium to a static charge pressure of 195-205 psig

(1345-1415 kPa) by adjusting the regulator to the required pressure, and opening the valve on the manifold. Close the valve when the pressure is correct.

b. Depressurize the cold head by slowly opening the ball valve and allowing the helium to bleed out slowly. Do not reduce the pressure to less than 30 psig or the cold head may be further contaminated.

c. Perform flushing steps a and b three more times.

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HELIX TECHNOLOGY CORPORATION d. Pressurize the cold head to the static charge pressure of 195-

205 psig (1345-1415 kPa) and run the cold head drive motor for 10 to 30 seconds by actuating the controller ON/OFF switch to on.

e. Perform steps b through d three more times for a total of 16 flushes and a total of 4 drive-motor runs.

9. Verify that the cold head is pressurized to the static charge pressure of 195-205 psig (1345-1415 kPa).

10. Disconnect the maintenance manifold from the helium-gas return and helium-gas supply lines.

11. Reconnect the helium-gas return and helium-gas supply lines to the return and supply connectors at the rear of the compressor. The cryopump is now ready for operation.

Compressor Decontamination Procedures

The procedure to decontaminate a compressor is similar to the above procedure with certain exceptions.

• There is no need to operate the cryopump before decontaminating the compressor.

• The maintenance manifold and helium-gas supply and helium-gas return lines will be connected to the supply and return fittings on the compressor.

1. Open the ball valve slightly on the maintenance manifold and allow the helium to bleed out and depressurize the compressor

(if pressurized) to 30 psig.

2. Charge the compressor slowly to approximately 200 psig (1380 kPa) by opening the 1/8-inch valve on the maintenance manifold.

3. Run the compressor for about 30 seconds.

4. Repeat steps 1 and 2, one time.

5. Disconnect the maintenance manifold from the helium-gas return and helium-gas supply lines.

6. Reconnect the helium-gas return and helium-gas supply lines to the return and supply connectors on the cold head. The compressor is now ready for operation.

NOTE: After connecting the compressor to the cryopump, and operating the system for a period of time, it may be necessary to decontaminate the cryopump as some residual contamination from the compressor may become trapped in the cold head. If the entire system was reduced to zero

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psig (a broken flex line, for example), then the cryopump and compressor would have to be decontaminated according to the Cryopump

Decontamination Procedures section.

Priming the Compressor Oil System

The oil-prime manifold (P/N 8018129) supplied with the 8500 Compressor is used to prime the compressor oil system when any of the following conditions exist:

1. The compressor has been inoperative for a period of three months or longer.

2. The compressor is not operating and the supply pressure gauge reads 0 psig. If this condition exists contact the Product Service

Department for corrective action before priming the compressor.

3. The compressor has automatically shut off because of a loss of helium supply pressure.

Priming procedures are:

1. Disconnect the helium return and supply lines from the rear of the compressor.

2. Install the oil-prime manifold on the compressor supply and return connectors.

3. Ensure that the pressure gauge reads 195-205 psig (1345-1415 kPa). If additional gas pressure is required, follow the instructions under, Adding Helium Gas.

4. Turn the compressor switch to the ON position and allow the compressor to run between 15 and 30 minutes.

5. After completing the oil-system priming turn off the compressor and remove the oil-prime manifold.

6. Reconnect the helium return and supply lines on the rear of the compressor.

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Appendix A - Customer Support Centers

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Appendix A - Customer Support Centers

Introduction

Refer to Table A-1 for the nearest Customer Support Center for technical assistance or service. North American customers may call 800-FOR-

GUTS (800-367-4887) 24 hours a day, seven days a week. All other customers must call their local Customer Support Center.

Please have the following information available when calling so that we may assist you:

• Product Part Number

• Product Serial Number

• Product Application

• Specific Problem Area

• Hours of Operation

• Equipment Type

• Vacuum System Brand/Model/Date of Manufacture

For your convenience, you may also e-mail us at:

[email protected]

Visit us at our corporate website:

www.helixtechnology.com

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United States and Canada

Table A-1: Customer Support Centers



Customer Response Center

Nine Hampshire Street

Mansfield, Massachusetts 02048 U.S.A.

Tel: 508-337-5000

Tel: 800-379-7224 (within USA)

Fax: 508-337-5169

Dial: 800-FOR-GUTS (800-367-4887)

24 hours a day, seven days a week



3350 Montgomery Drive

Santa Clara, California 95054 U.S.A.

Tel: 408-592-5940


Fax: 408-988-6630

Dial: 800-FOR-GUTS (800-367-4887)




4120 Freidrich Lane

Suite 600

Austin, Texas 78744 U.S.A.

Tel: 512-912-2800


Fax: 512-912-2888

Dial: 800-FOR-GUTS (800-367-4887)



Colorado Operations

6450 Dry Creek Parkway

Longmont, Colorado 80503 U.S.A.

Tel: 303-443-7660


Fax: 303-443-2546

Dial: 800-FOR-GUTS (800-367-4887)


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Table A-1: Customer Support Centers (Continued)

Germany, Italy, Denmark, Switzerland,

Holland, Norway, The Netherlands

France, Spain, Portugal, Greece


Haasstrasse 15

D-64293 Darmstadt

Germany

Tel: +(49) 6151-959-55

Fax: +(49) 6151-959-57

Helix Technology

Domaine Technologique de Saclay

4, rue Rene Razel, Bât Apollo

F-91892 Orsay Cedex

France

Tel: +(33) 1-6935-2600

Fax: +(33) 1-6985-3725

Dial: +(33) 1-6935-2600


Japan

Dial: +(49) 6151-959-55


United Kingdom, Ireland, Sweden,

N. Ireland


Fleming Road

Kirkton Campus

Livingston, West Lothian

Scotland EH54 7BN

Tel: +(44) 1-506-460017

Fax: +(44) 1-506-411122


Queens Tower A 14F

3-1, Minatomirai 2-chome

Nishi-ku, Yokohama

Japan 220-6014

Tel: +(81) 45-682-5470

Fax: +(81) 45-682-5475

Dial: +(81) 45-682-5470

24 hours a day, seven days a week Dial: +(44) 1-506-460017


Korea Taiwan

Helix Vacuum Technology Limited

4F-1 No. 81 Shui Lee Road

Hsin-Chu 300, Taiwan

Helix Technology

Zeus Company, Ltd.

Zeus Building

3-16, Yangjae-Dong, Socho-ku

Seoul 137-130, Korea

Tel: +(82) 2-577-3181/3186

Fax: +(82) 2-576-3199

Dial: +(82) 2-577-3181


Tel: +(886) (3) 572-3999

Fax: +(886) (3) 571-7670

Dial: +(886) (3) 516-9022


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Australia, New Zealand, Tasmania China


Tritek International Company

Da An Square, 9A Middle Bldg

829 Yan An Middle Road

Shanghai, 200040

China

Tel: +(86) 21-6279-1389

Fax: +(86) 21-6247-1539

Dial +(86) 21-6279-1389



CTI-Cryogenics Products

AVT Services Pte. Ltd.

Unit 1, 12 Pioneer Avenue

Thornleigh NSW 2120

Sydney, Australia

Tel: +(612) 9-4810748

Fax: +(612) 9-4810910

Dial: +(612) 9-4810748


Australia, New Zealand, Tasmania


Granville-Phillips Products

Stanton Scientific

2/6 Jonson St.

Byron Bay, NSW 2481

Australia

Tel: +(61) 66-856-902

Fax: +(61) 66-858-530

Singapore, Malaysia, Philippines,

Indonesia


APP Systems Services Pte Ltd.

2 Corporation Road

#06-14 Corporation Place

Singapore 2261

Tel: +(65) 268-2024

Fax: +(65) 268-6621

Dial: +(65) 268-2024


A-4



India India



Goodwill Cryogenics Enterprise

213 Nirman, Sec. 17, Vashi

New Bombay, 400703

India

Tel: +(91) 22-7632906

Fax: +(91) 22-7822769

Dial: +(91) 22-7632906




Ashwini Enterprises

C-2/13/03, Sector-16, Vashi

New Bombay 400 705

India

Tel: +(91) 22-766 1107

Fax: +(91) 22-766 2631

Israel



Vacuum System & Technology Ltd.

P.O. Box 4137

Petach Tikva 49130

Israel

Tel: +(972) 3-9247710

Fax: +(972) 3-9247711

Dial: +(972) 3-9247710


Israel



El-Tan Technologies

P.O. Box 1020

Hod-Hasharon 45110

Israel

Tel: +(972) 9-740-5551

Fax: +(972) 9-740-6690

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Appendix B - Troubleshooting Procedures

Troubleshooting the Compressor

The compressor troubleshooting procedures are summarized in Table B-1.

Technical Inquiries

Please refer to Appendix A of this manual for a complete list of the

CTI-CRYOGENICS’ world wide customer support centers.

WARNING

Disconnect the compressor before performing any troubleshooting procedures.

The compressor pump is hot after operating. Wait for the pump to cool down before working on the inside of the compressor

Do not change or modify any compressor internal wiring circuits, this may cause failure of the compressor and cold head due to improper phasing.

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Appendix B - Troubleshooting Procedures

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Table B-1: Compressor Troubleshooting Procedures

Problem Possible Cause Corrective Action

1) System power ON/

OFF switch (CB1) remains in the ON position when switched on but the compressor will not run. Refer to Figure

C-1 and D-1, for identification of all electrical components.

1) Incorrect phasing of input power causing phase monitor switch to remain open.

2) No power coming from the source.

3) Insufficient voltage at power source causing phase monitor switch to remain open.

1) Check phasing of input power from the source against its schematic, Figure 3-5.

2) Check source fuses, circuit breakers, and wiring associated with the power source, and repair as needed.

3) Verify adequate phase-tophase input voltage. Refer to

Table 1-2.

4) Control circuit fuses missing or blown.

4) Check control fuses 1FU,

2FU, and 3FU. Also check control fuse 4FU. If any of these fuses are blown, contact the Product Service Department.

5) Improperly wired external remote control circuit. This will apply only if the remote control feature if being utilized.

5) Verify correct installation of remote control feature per

Appendix G.

6) Remote control jumper plug not in place. This will apply only if remote circuit is not being used.

6) Check to insure that remote jumper plug is fully seated.

See Figure C-1, for jumper plug location on J5 remote connector.

7) Incorrect control circuit voltage.

7) Check the voltage setting on switch S2/S3 per Figure 3-6.

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Table B-1: Compressor Troubleshooting Procedures (Continued)


8) Excessive current drawn by the compressor pump has caused the overload relay in the motor contactor (MI) to open.

1) Loss or degradation of power coming from power source.

8) a. Reset the overload relay in the motor contactor. Refer to

Figure C-1, for its location.

b. Contact the Product Service

Department.

1) Ensure a constant supply of power per Table 1-3

2) System power ON/

OFF switch (CB1) remains in the ON position, and the compressor stops after several minutes of operation and remains off.

2) Thermal protective switches are open.

2) Check for inadequate water cooling, see Table 1-3.

3) System power ON/

OFF switch (CB1) remains in the ON position, and the compressor stops after several minutes of operation and remains off.

3) Very cold cooling water has caused a restriction of oil flow through the oil injection orifice during start-up.

1) a. Loss of oil injection has caused the oil flow thermal switch (TS2) to open.

b. The solenoid valve (SOL

1) is not opening.

c. Insufficient oil in the compressor pump.

d. The oil injection orifice is blocked.

3) Recheck for proper cooling water temperature per Table

1-3. Restart the compressor repeatedly until continuous operation is achieved.

1) a. Check the thermal switch

(TS2) for continuity.

b. Check the solenoid coil for continuity.

c. Confirm that oil is visible in the compressor sight glass.

d. Contact the Product Service

Department for assistance.

2) Excessive current drawn by the compressor pump or the solenoid valve (SOL 1) has caused the overload relay in the motor contactor

(M1) to open.

2) a. Reset the overload relay in the motor contactor, Refer to

Figure 1-1, for its location.

b. Contact the Product Service Department for assistance.

3) Control circuit fuses blown.

3) Check condition of control circuit fuses (F1, F2, F3, and F4).

Refer to Figure D-1, for location of fuses.

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Appendix B - Troubleshooting Procedures

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Table B-1: Compressor Troubleshooting Procedures (Continued)


4) The remote control system switch has opened. This will apply only if the remote control feature is incorporated per Appendix G, Figure G-1.

1) Intermittent loss or degradation of input power.

4) Close the remote control system switch.

1) Confirm that there is a constant supply of power per

Table 1-2.

4) System power ON/

OFF switch (CB1) remains in the on position, the compressor and all cold heads stop and recycle.

5) Cold head circuit breakers (CB2, CB3) shut off, or will not remain on.

1) Damaged cold head drive cable, connectors or drive motor.

1) Check for compressor operation with each cold-head connector (P2, P3 or P4) disconnected. Contact the

Product Service Department if the compressor operates improperly.

6) Cold head hunts or ratchets during operation.

2) Damaged components in the cold head control circuit

(K3, K4, K5, K6, K7, K8,

K9, ETM, TS1, TS2, TS3,

M1 (Coil), CB1, T1, T2,

T3.)

1) Improper voltage select settings.

2) Refer to Figure C-1, and check for damaged components and contact the Product Service

Department.

1) Low control voltage, remove jumper plug from J5 remote connector and check control voltage between pins F and G on the remote connector for correct voltage readings. If incorrect reading check setting of voltage selector switch(s) S2 or S3, refer to Figure 3-6.

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Appendix C - Electrical Schematic for 8500

Compressor

CB1

CB2, CB3

ETM

J1

J2

J3

J4

J5

J6, J9

K3

K4

K5

K6

K7

K8

K9

1LT

M1

M1OL

PM1

S2

S3

SOL

SOL2

T1

Table C-1: 1FU Through 14FU—(All Slow-Blow Type)

Fuse Designation

1FU

2FU

3FU

4FU

14FU

G001

Amp Rating

G002

3.2

3.2

3.2

4.0

0.125

1.5

1.5

1.5

4.0

0.125

Table C-2: Legend for Figure C-1

System Power Switch and Circuit Breaker

Circuit Breakers, 3A, Cryopump Power

Elapsed Time Meter

Input Power Connector

Number One Cold-Head Cable Connector — 6 Pins

Number Two Cold-head Cable Connector — 6 Pins

Number Three Cold Head Cable Connector — 6 Pins

System Remote Connector — 14 Pins

Chassis Connectors

Voltage Select Remote Relay

System Power Answerback Relay

Thermal Lockout Relay

Coldhead Interlock Relay

Number One Cold-Head Remote Start Relay

Number Two Cold-Head Remote Start Relay

Number Three Cold-Head Remote Start Relay

Compressor Status Indicator Lamp

Motor Contactor

Motor Overload Protector

Phase Monitor

Voltage Selector Switch

Voltage Selector Switch

Solenoid Valve, Normally Closed

Solenoid Valve, Normally Open

Cold-Head Drive Transformer

P/N 8040251 C-1

Appendix C - Electrical Schematic for 8500 Compressor

T2

T3

TS1

TS2

TS3

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Table C-2: Legend for Figure C-1 (Continued)


Control Voltage Transformer

Thermal Protective Switch — Oil Flow/Gas Discharge Temperature

Thermal Protective Switch — Oil Flow/Motor Temperature

Thermal Protective Switch — Oil /Water Temperature

C-2 P/N 8040251


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P/N 8040251

Figure C-1: Electrical Schematic for 8500 Compressor, P/N 8031351 Rev. D

C-3


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Appendix D - Components in the Electrical

Control Module of 8500 Compressor

P/N 8040251 D-1

Appendix D - Components in the Electrical Control Module of 8500 Compressorr

4

5

6

7 8

9

10-16

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3

2

1

17

18

19

20

21

D-2

Figure D-1: Components in the Electrical Control Module of 8500 Compressor

Table D-1: Component Callouts

Item Number

7

8

5

6

3

4

1

2

9

10

11

12

Description



Compressor Status Indicator Lamp

ETM Fuse

Control Circuit Fuse

Control Voltage Transformer




Number Three Cold-Head Remote Start Relay

Number Two Cold-Head Remote Start Relay

Number One Cold-Head Remote Start Relay

Symbol

Designation

T2

T1

1LT

14FU

4FU

T3

3FU

2FU

1FU

K9

K8

K7

P/N 8040251


Table D-1: Component Callouts (Continued)

Item Number

17

18

19

20

21

13

14

15

16

Description

Compressor Start Relay

System Power Remote Relay

Voltage Select Relay

Interlock Relay

Phase Monitor

Motor Overload

Motor Contactor

Chassis Connector

Chassis Connector

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Symbol

Designation

K5

K4

K3

K6

PM1

M1OL

M1

J9

J6

P/N 8040251 D-3


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Appendix E - 8500 Compressor

Flow Diagram

P/N 8040251 E-1

Appendix E - 8500 Compressor Flow Diagram

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E-2

Figure E-1: Flow Diagram of 8500 Compressor

P/N 8040251


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Appendix F - Multiple Cryopump

Installation with Single 8500 Compressor

Your 8500 Compressor may be used to drive a number of multiple Cryo-

Torr cryopump combinations.

Figure F-1 depicts a typical multi-cryopump installation with a 8500

Compressor. As shown in this figure, a power cable is connected from the compressor to each cold head; also, the components are helium connected in parallel (all supply fittings piped together).

If you are considering a multiple cryopump installation please contact CTI-

CRYOGENICS, U.S.A. Application Engineering Department (1-800-447-

5007) for technical assistance in the selection and sizing of the manifolds and interconnecting lines for your particular installation.

1

2

3

Cryo-Torr

Cryopump

Cryo-Torr

Cryopump

Cryo-Torr

Cryopump

Helium Return Line

Helium Supply Line

Input Power

P/N 8040251

Figure F-1: Typical Multiple Cryopump Installation with 8500 Compressor

F-1

Appendix F - Multiple Cryopump Installation with Single 8500 Compressor

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Preliminary System Requirements

Installation of the 8500 Compressor for use with a single cryopump is covered in the Installation section. Installation for multiple cryopump usage is similar, but requires that system charge pressure be established for a given high-vacuum pump system. Additionally, the following parameters must be considered before the system can be assembled.

• All system components must be assembled and be operational for system static charge pressure determination.

• All system components must have static charge pressures of 195 -

205 psig at 70°F to 80°F (21° to 27°C).

Determining System Charge Pressure

To establish the helium gas charge pressure of a multiple cryopump installation proceed as follows:

1. Assemble your multiple cryopump system components.

2. Check the compressor pressure gauge to insure static pressure does not exceed 195 - 205 psig (1345-1415 kPa).

3. If it is necessary to reduce helium gas pressure then perform the following: a. Disconnect the charging line from gas charge fitting on rear of compressor.

b. Open the gas charge valve very slowly. Allow helium gas to escape until pressure gauge reads 50-100 psig (345-690 kPa).

c. Close the gas charge valve and reinstall the charging line to the gas charge fitting, refer to step 4 for procedure.

4. If the pressure is low, attach a helium bottle, regulator, and charging line to the compressor and perform the following: a. Remove the flare cap of the gas charge fitting on the rear of the compressor.

b. Loosely attach a charging line from the helium pressure regulator on the helium bottle to the 1/4-inch male flare fitting installed on the helium charge fitting of the compressor.

NOTE: Use only 99.999% pure helium.

c. Set the helium pressure regulator to 10 to 25 psig (70-125 kPa). Allow helium gas to flow through the charging line and around the loosened flare fitting for 30 seconds to purge

F-2 P/N 8040251


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HELIX TECHNOLOGY CORPORATION the charging line of air. Then tighten the flare nut at the end of the charge line.

d. Slowly add helium gas until compressor pressure gauge reads 195-205 psig (1345-1415 kPa).

5. Turn on the system power ON/OFF switch.

6. Note helium pressure gauge reading immediately after startup. It should read 50-100 psig (345-690 kPa). If necessary add additional helium gas by slowly opening the helium charge valve on the rear of the compressor until the helium pressure gauge rises to 50-100 psig (345-690 kPa).

7. Allow the cryopump to operate until a cooldown temperature of

20K or less is reached.

Adjust the helium pressure if necessary as described in step 6 until the helium pressure gauge reads 80-100 psig (550-690 kPa) while the system is operating.

8. Allow the system to reach steady state. Recheck the helium pressure.

9. When steady state is achieved, shut the system off and allow the system time to reach steady state conditions at room temperature.

10. When the system reaches room temperature, the pressure reading on the compressor gauge is the system charge pressure.

NOTE: Record the compressor static pressure in your operating log. This is the static pressure for your. This is the static pressure for your particular installation and should be used for checking compressor performance or when troubleshooting the installation.

11. Ensure that the helium charge valve on the compressor is tightly closed. Then shut off the helium pressure regulator or the helium bottle. Remove the charging line from the male flare fitting and reinstall the flare cap.

P/N 8040251 F-3

8500 Compressor for Use with Cryo-Torr High-Vacuum Pumping Systems

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Appendix G - Remote Cryo-Torr

High-Vacuum Pump Operation Using

8500 Compressor

Remote Operation

An electrical schematic is provided, see Figure G-1, for fabrication of an external switching circuit. This feature provides the capability for remote

ON/OFF switching of the complete system (compressor and all cold heads) and for individual switching of electrical power to each of the cold head connectors J2, J3 and J4. It is not mandatory that all three remote switching features be utilized simultaneously. The switching circuit is connected into the control module of the compressor by means of the 14-pin system remote connector J5, which is located at the rear of the control module.

Note that a J5 jumper connector is installed on the compressor as shipped.

Refer to Figure 1-1, for location of the connector.

Assembling the Switching Circuit

Assemble the remote switching circuit to suit your installation requirements as follows:

1. Uncouple the J5 jumper connector from the compressor. Wire the remote connector using 18-gauge stranded copper wire and a remote switch or relay contact. Cryopump remote contacts must be 24 VAC, 150 ma. Minimum rating of compressor remote contacts must be 24V AC, 2.7 A inductive. Follow the schematic in Figure G-1, ensuring compliance with all national, state and local standards.

2. After fabricating and checking the remote switching circuit, connect it to the system remote connector J5.

3. Ensure that the system power ON/OFF switch on the compressor is off, and that all the remote switches are off before connecting the input power cable to the power source. The system power ON/OFF switch and circuit breaker safety features on the compressor will remain operational even with the remote switching circuit being utilized.

P/N 8040251 G-1

Appendix G - Remote Cryo-Torr High-Vacuum Pump Using 8500 Compressor

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4. Turn the system power ON/OFF switch on the compressor module to the ON position and check for proper operation of the remote switching circuit.

5. If the use of the remote control switching circuit is to be discontinued, then simply disconnect the remote control switching circuit from J5 and reinstall the J5 jumper connector.

NOTE: The cryopump system will not operate if the jumper connector is not reinstalled.

G-2

Master (system)

24 VAC, 2.7 A Inductive

Coldhead No. 3

24 VAC, 150 mA

Coldhead No. 2

24 VAC, 150 mA

Coldhead No. 1

24 VAC, 150 mA

Figure G-1: Remote High-Vacuum Pump Switching Schematic

P/N 8040251

CTI-CRYOGENICS 8500 compressor Installation, Operation and Service Instructions

Assistant Bot

8500 Compressor

(For Use with Cryo-Torr High-Vacuum Pumping System)

Installation, Operation and Service

Instructions

8040251

Rev. L (3/97)

View our inventory

Table of Contents

Table of Contents (continued)

Figures

Table of Contents (continued)

Tables

Section 1 - Introduction

General

Installation, Operation and Service Instructions

Figure 1-1: 8500 Compressor Front and Side Views

Table 1-1: 8500 Compressor—Dimensions

Table 1-2: 8500 Compressor Specifications—Power Requirements Steady-State Conditions

Table 1-3: 8500 Compressor Specifications—General Specification

Figure 1-2: 8500 Compressor

Section 2 - Inspection

Packaging of the System

Table 2-1: Cryo-Torr High-Vacuum Pump System

The Compressor

Section 3 - Installation

Figure 3-1: Block Diagram for 8500 Compressor Installation

Compressor Installation

Preparing the Compressor

Figure 3-2: Removing Compressor Pump Shipping Supports

Assembling the Compressor Input-Power Cable

CAUTION

Figure 3-3: Stripping Compressor Input-Power Cable Insulation

Figure 3-4: Input Power Cable Receptacle Plug

Figure 3-5: Wiring Diagram for Standard and Grounded Delta Configurations

Electrical Preparation of Compressor Control Module

Figure 3-6: Preparing the 8500 Compressor Control Module

Table 3-1: Compressor Power Information

Cooling Water: Preparation

CAUTION

Cooling Water: General Considerations

CAUTION

Cooling Water: Flow and Pressure Requirements

CAUTION

Figure 3-7: 8500 Compressor Cooling Water Flow and Pressure Requirements

Cooling Water: Temperature Rise

CAUTION

Figure 3-8: 8500 Compressor Water Discharge Temperature Increase (°F)

Oil Circuit Stabilization

Section 4 - Maintenance Procedures for oil priming procedures.

Connecting the Compressor to the Cryopump

Electrical Connection of Compressor

Multipump Installation

CAUTION

Appendix F.

Figure 3-9: 8500 Compressor Installation

Section 4 - Maintenance Procedures

Scheduled Maintenance

Figure 4-1: Disconnecting the Adsorber Self-Sealing Couplings

Removing the Compressor Adsorber

Installing the Compressor Adsorber

CAUTION

CAUTION

Unscheduled Maintenance

Suggested Unscheduled Maintenance Equipment

Adding Helium Gas

CAUTION

CAUTION

Helium Circuit Decontamination

Cryopump Decontamination Procedures

CAUTION

Compressor Decontamination Procedures

Priming the Compressor Oil System

Appendix A - Customer Support Centers

Introduction

United States and Canada

Table A-1: Customer Support Centers

United States and Canada

United States and Canada