Data Sheet - Silicon Sensing Systems

Data Sheet - Silicon Sensing Systems
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
DMU10-01/-21
DMU10-02/-22
OEM
Module
Features
1 General Description
• High performance six degrees of freedom (6-DOF)
MEMS IMU
• 7 sensor inputs
- Angular rate (x3)
- Linear acceleration (x3)
- Temperature
• Dynamic Range ±300°/s and ±10g
• Bias instability <10°/hr and 0.05mg
• Random Walk <0.4°/hr and 0.05m/s
• Small (45 x 26 x 16mm)
• User programmable bandwidth
• 3.2 to 5.25V Supply
• Wide operating temperature range -40°C to +85°C
• RS-422 Interface
• Optional Configurations:
- Uncalibrated and thermally calibrated
- OEM and Module
• RoHS compliant
DMU10 is a 6-DOF Precision MEMS Inertial
Measurement Unit from Silicon Sensing Systems.
It provides three axes of angular rate and linear
acceleration, and temperature. The output message
includes message counter, built-in test results, delta
theta and delta velocity information. Data is output
on an industry standard RS422 interface for ease of
integration.
DMU10 is engineered using Silicon Sensing’s own
unique MEMS VSG5 ring gyroscope and capacitive
accelerometer technologies to provide benchmark
performance, size and affordability. It contains three
5th generation piezoelectric (PZT) gyroscopes and six
accelerometers. Outputs from dual accelerometers
per axis are averaged to improve precision and reduce
uncorrelated noise.
Available uncalibrated or calibrated over the full
operating temperature range. DMU10 is supplied either
as an OEM or a Module.
Full Evaluation Kit available (see Section 8 for details).
Applications
•
•
•
•
•
•
•
Machine control
Antenna and Platform Stabilisation
Precision Agriculture
Autonomous Vehicles and ROVs
Attitude Measurement Systems
Personal Navigation
GPS Aiding
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 1
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
PL1_2
www.siliconsensing.com
3.2 to 5.25V
EXPANSION PORT
3.1V
3.1V
3.1V
3.1V
REGULATOR
PL1_1
GND
3.1V
PL1_3
PL1_4
PL1_9
PL1_10
COMBI
SENSOR
1
TEMPERATURE
SENSOR
RX_Lo
3.1V
3.1V
RX
RX_Hi
RS422
I/F
TX_Lo
TX
TX_Hi
SPI I/F
COMBI
SENSOR
2
TX_TRISTATE
RS422_TERMINATION
PL1_12
PL1_11
PL1_6
PL1_7
PL1_8
PL1_5
MICROCONTROLLER
FACTORY USE
3.1V
SPARE
RUN MODE
COMBI
SENSOR
3
AUX
SYNC
RESET
C.G. 18710
26
22
Figure 1.1 DMU10 Functional Block Diagram
DMU10
PT. NO. DMU10-02-0100
SER NO. WWYYXXXX C
MADE IN PLYMOUTH UK
16
11
45
41
All dimensions in millimetres.
Figure 1.2 DMU10 (OEM) Unit
Overall Dimensions
All dimensions in millimetres.
Figure 1.3 DMU10 (Module) Unit
Overall Dimensions
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 2
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
2 Ordering Information
Calibration: UN = Uncalibrated, OT = Over Temperature Calibration
Item
Description
Overall
Dimensions
Calibration
Part Number
UN
DMU10-01-0100
OT
DMU10-21-0100
UN
DMU10-02-0100
OT
DMU10-22-0100
OT
DMU10-21-0500
mm
Bare PCB with four
mounting holes
41 x 22 x 10.6
DMU10 OEM Unit
A two-part, anodised
aluminium, non-hermetic
housing. Three
mounting lugs.
45 x 26 x 16
DMU10 Module Unit
Customer evaluation kit
comprising a
DMU10-21-0100, RS422
to USB Connector, USB
Driver and Data Logging
Software, Cables and
Connectors, Instruction
Manual.
Not Applicable
DMU10 OEM Evaluation Kit
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 3
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
3 Performance
Calibration: UN = Uncalibrated, OT = Over Temperature Calibration
Parameter
CAL
Minimum
Typical
Maximum
Notes
All
< -300
–
> +300
Clamped at ±305°/s
during over-range
UN
-3.00
±1.50
+3.00
–
OT
-0.25
±0.10
+0.25
–
UN
-0.125
±0.05
+0.125
–
OT
-0.067
±0.033
+0.067
–
UN
-3.30
±1.65
+3.30
OT
-0.50
±0.25
+0.50
UN
-0.20
±0.10
+0.20
OT
-0.05
±0.025
+0.05
Bias Instability (°/hr)
All
–
< 15.00
–
Angle Random Walk
( °/hr)
All
–
< 0.40
–
UN
-3600
±1800
+3600
OT
-300
±150
+300
UN
-6.00
±2.00
+6.00
OT
-0.7
±0.35
+0.7
Gyro Bandwidth (Hz)
All
< 10
85
> 150
-3dB point
User programmable
Noise (°/s rms)
All
–
0.10
0.15
Wide band noise at
100Hz bandwidth
VRE (°/s rms / g)
All
-0.006
±0.003
+0.006
3.3g rms stimulus
20Hz to 2,000Hz
Angular Rate (Roll, Pitch, Yaw)
Dynamic Range (°/s)
Scale Factor Error (%)
Scale Factor Non-Linearity
Error (%)
Bias (°/s)
Bias drift with time (°/s)
Bias Repeatability (°/hr)
Gyro Cross Coupling (%)
Over operating
temperature range
At constant
temperature
As measured using the
Allan Variance method.
Bias Repeatability =
√(Biaswarmup)2 + (Biastoto)2 + (Biasageing)2 + (Biastemperature)2
Over operating
temperature range
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 4
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
3 Performance Continued
Parameter
CAL
Minimum
Typical
Maximum
Notes
All
< -10
–
> +10
Clamped at ±10.01g
during over-range
UN
-3.00
±1.00
+3.00
–
OT
-0.25
±0.10
+0.25
–
UN
-1.00
±0.50
+1.00
OT
-1.00
±0.50
+1.00
UN
-150.00
±50.00
+150.00
OT
-10.00
±2.50
+10.00
UN
-20.00
±10.00
+20.00
OT
-2.00
±1.00
+2.00
Bias Instability (mg)
All
–
< 0.05
–
Random Walk (m/s/hr)
All
–
< 0.05
–
UN
-30
±15
+30
OT
-2
±1
+2
UN
-6.00
±3.00
+6.00
OT
-0.70
±0.35
+0.70
Acc Bandwidth (Hz)
All
< 10
90
> 150
-3dB point
User programmable
Noise (mg rms)
All
–
1.00
1.50
Wide band noise at
100Hz bandwidth
Range (°C)
All
< -45
–
> 100
Exceeds operational
temperature range
Accuracy (°C)
All
–
±3
–
In the operational
temperature range
Linear Acceleration (X, Y, Z)
Dynamic Range (g)
Scale Factor Error (%)
Scale Factor Non-Linearity
Error (%)
Bias (mg)
Bias drift with time (mg)
Bias Repeatability (mg)
Acc Cross Coupling (%)
Maximum error from best straight
line over ±8g
Over operating
temperature range
At constant
temperature
As measured using the
Allan Variance method.
Bias Repeatability =
√(Biaswarmup)2 + (Biastoto)2 + (Biasageing)2 + (Biastemperature)2
Over operating
temperature range
Temperature Output
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 5
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
4 Environment, Power and Physical
Parameter
Minimum
Typical
Maximum
Notes
Operating Temperature
Range (°C)
-40
–
+85
Full specification
Storage Temperature
Range (°C)
-55
–
+100
–
Operational Shock (g)
–
–
95
6ms, half sinewave
Non-Operational Shock (g)
–
–
500
0.1ms, half sinewave
Operational Random
Vibration (g rms)
–
–
3.3
20Hz to 2KHz
Non-Operational Random
Vibration (g rms)
–
–
10
20Hz to 2KHz
Humidity (% rh)
–
–
85
Non-condensing
Communication Protocol
(Standard)
–
RS-422
–
Full duplex communication
Data Rate (Hz)
–
200 (Default)
–
User programmable
* future feature
Baud Rate (BPS)
–
460, 800 (Default)
–
User programmable
* future feature
Startup Time (s)
–
< 0.5
–
–
Current (mA)
–
85
95
With 120  RS422
termination resistor
+3.2
+5
+5.25
–
Size (mm)
–
41 x 22 x 10.6
–
–
Mass (grams)
–
6
–
–
Size (mm)
–
45 x 26 x 16
–
–
Mass (grams)
–
24
–
–
Environment
Interface
Voltage (V)
Physical (OEM)
Physical (Module)
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 6
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
5 Typical Performance Characteristics
This section shows the typical performance of DMU10 (Uncalibrated and Calibrated).
5.1 Performance Characteristics (Uncalibrated - DMU10-01 and DMU10-02)
Figure 5.1 Gyroscope Bias
Figure 5.2 Gyroscope Scale Factor Error
Figure 5.3 Gyroscope Cross Coupling
Figure 5.4 Gyroscope Non-Linearity
Distribution
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 7
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
Typical Performance Characteristics (Uncalibrated - DMU10-01 and DMU10-02)
Figure 5.5 Accelerometer Bias
Figure 5.6 Accelerometer Scale Factor Error
Figure 5.7 Accelerometer Cross Coupling
Figure 5.8 Accelerometer Non-Linearity
Error
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 8
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
5.2 Typical Performance Characteristics (Calibrated - DMU10-21 and DMU10-22)
Figure 5.9 Gyroscope Bias
Figure 5.10 Gyroscope Scale Factor Error
Figure 5.11 Gyroscope Cross Coupling
Figure 5.12 Gyroscope Non-Linearity
Distribution
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 9
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
Typical Performance Characteristics (Calibrated - DMU10-21 and DMU10-22)
Figure 5.13 Accelerometer Bias
Figure 5.14 Accelerometer Scale Factor Error
Figure 5.15 Accelerometer Cross Coupling
Figure 5.16 Accelerometer Non-Linearity
Error
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 10
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
5.3 Typical Performance Characteristics (Uncalibrated and Calibrated)
Figure 5.17 Gyroscope Allan Variance
Figure 5.18 Gyroscope Stability
Figure 5.19 Gyroscope Cumulative Noise
Figure 5.20 Gyroscope Spectral Noise
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 11
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
Typical Performance Characteristics (Uncalibrated and Calibrated)
Figure 5.21 Gyroscope Noise
over Temperature
Figure 5.22 Accelerometer Allan Variance
Figure 5.23 Accelerometer Stability
Figure 5.24 Accelerometer Cumulative Noise
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 12
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
Typical Performance Characteristics (Uncalibrated and Calibrated)
Figure 5.25 Accelerometer Spectral Noise
Figure 5.26 Accelerometer Noise
over Temperature
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 13
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
6 Glossary of Terms
www.siliconsensing.com
7 Interface
Physical and electrical inter-connect and RS422
message information
ADC
Analogue to Digital Converter
ARW
Angle Random Walk
AWG
American Wire Gauge
BPS
Bits Per Second (or Baud Rate)
BW
Bandwidth
C
Celsius or Centigrade
DAC
Digital to Analogue Converter
Rx Lo*
DPH
Degrees Per Hour
Rx Hi*
DPS
Degrees Per Second
Tx Lo
DRIE
Deep Reactive Ion Etch
EMC
Electro-Magnetic Compatibility
ESD
Electro-Static Damage
F
Farads
h
Hour
HBM
Human Body Model
Hz
Hertz, Cycles Per Second
K
Kilo
MDS
Material Datasheet
MEMS
Micro-Electro Mechanical Systems
mV
Milli-Volts
NEC
Not Electrically Connected
NL
Scale Factor Non-Linearity
OEM
Original Equipment Manufacturer
OT
Over Temperature
PD
Primary Drive
PP
Primary Pick-Off
RC
Resistor and Capacitor filter
RT
Room Temperature
s
Seconds
SF
Scale Factor
SMT
Surface Mount Technology
SOG
Silicon On Glass
SD
Secondary Drive
SP
Secondary Pick-Off
T.B.A.
To Be Advised
T.B.D.
To Be Determined
V
Volts
7.1 Electrical Interface
3.2 to 5.25V
PL1_2
SYSTEM
HOST
(5V or 3.3V SYSTEM)
PL1_3
PL1_4
PL1_9
Tx Hi
PL1_10
RESET*
DMU10
PL1_5
RUN MODE*
PL1_6
SYNC*
PL1_8
0V
PL1_1
* These connections are optional
and can be left not connected.
C.G. 18711
Figure 7.1 Required Connections for RS422
Communications with DMU10
7.2 Physical Interface
10.05
2
12
1
11
4.90
Part No: HARWIN G125-MV11205L1
C.G. 18720
Figure 7.2 Male Connector DMU10
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 14
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
7.3 Connector Specification
7.5 Communications with DMU10
The physical connector for the DMU10 is from the
‘Gecko’ family of connectors, produced by Harwin.
The Run Mode pin on the connector is used to control
the output from the DMU10. The “Free Run” or “Enabled”
mode is active when the Pin is floating (not connected),
and the output will be enabled.
The part number for the board connector is
G125-MV11205L1. The female mating connector
used to interface with this connector is part number
G125-204 12 96 L0 (with crimps G125-0010003 for
26 AWG wires or G125-0010005 for 28 AWG wires).
7.4 Pin Information
Pin
Label
Signal
In/Out
1
GND
Ground connected of the DMU10
I
+5V
Input voltage to the DMU10. Can
be between 3.2V and 5.25V
I
3
Rx Lo
The negative receive connection
required for the RS422
communication
I
4
Rx Hi
The positive receive connection
required for the RS422
communication
I
5
Reset
Microprocessor reset. Pin is
pulled low to reset the device.
Suggested implementation using
TTL logic
I
Run Mode
Device Enable/Disable. Pin is
pulled high or not connected
to enable the device. Pin is
pulled low to disable the device.
Suggested implementation using
TTL logic
7
Aux
Analogue input channel which
integrates a signal into the output
message of the DMU10. This
functionality can be used to allow
the user to synchronise with a
known input clock
I
8
Sync
Output signal that can be used by
an external system to synchronise
with DMU10
O
9
Tx Lo
The negative transmit connection
required for the RS422
communication
O
10
TX Hi
The positive transmit connection
required for the RS422
Communication
O
11
Spare
Not electrically connected
N/A
Factory Use
Used by SSSL for programming
purposes and should not be
interfaced with
N/A
2
6
12
Table 7.1 Pin Information
The DMU10 output is disabled when the “Run Mode”
Pin is pulled low.
7.6 Operational Message Output
The Output Message is output on a RS422 Serial output
at 460,800 baud using a non-return to zero protocol.
Each byte contains a start bit (logic 0), 8 data bits and
2 stop bits (logic 1). Data is output in big endian format
by default.
Data is output at a rate of 200 messages per second.
Each message contains 34 words (68 bytes) as described
in Table 7.2. The message is transmitted if the “Run
Mode” Pin is High (NC).
If the “Run Mode” Pin changes to a Low (Disable output),
while the message is being transmitted, the message is
completed before the output is disabled.
7.7 Sensor Sampling and Synchronisation
I
The Inertial Sensors within DMU10 are all sampled at
1,000Hz. The ‘Sync Pulse’ on the connector is set
HIGH at the start of the sampling and returned to LOW
when the last Inertial Sensor is sampled. Pulses are
therefore seen on the connector at 1,000Hz.
The Inertial Sensor measurements are then filtered with
a 2nd order low pass filter, also running at 1000Hz.
The factory default setting for this filter has a corner
frequency of > 85Hz.
The internal sequence for DMU10 is:
• Cycle 1: Sample Sensors, 2nd order Filter
• Cycle 2: Sample Sensors, 2nd order Filter, Calculate
Sensor Compensation
• Cycle 3: Sample Sensors, 2nd order Filter, Apply
Sensor Compensation
• Cycle 4: Sample Sensors, 2nd order Filter, Calculate
Delta Theta and Vels
• Cycle 5: Sample Sensors, 2nd order Filter, Transmit
Message
The message is transmitted after the ‘Sync Pulse’
associated with Cycle 5 has returned LOW. The inertial
data included in the message is generated when the
‘Sync Pulse’ associated with Cycle 3 was HIGH. This
enables the external equipment to synchronise with the
time when the Inertial Data was valid.
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 15
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
1ms
SYNC
Output
Sensor logging 0.19ms
Sensor logging filtering and temperature averaging 0.44ms
0.31ms
Gyro and
acceleration
data
logging
Sensor
Logging
Temperature
Voltage & BIT
data
logging
Application
of 2nd order
filter (100Hz
default)
Gyro and
acceleration
data
logging
Temperature
running
average
Temperature
Voltage & BIT
data
logging
Application
of 2nd order
filter (100Hz
default)
Temperature
running
average
C.G. 18738
Figure 7.3 Relationship between SYNC
and Sensor Logging
Serial TX of 34 words at 460,800 baud:
1.623ms every 5ms (using DMA)
TX End
Sensor error calculation:
0.05ms every 5ms
Sensor compensation:
0.03ms every 5ms
TX Start
DMA TX
(continued from SLOT 4)
DMA TX (continued
from SLOT 0)
Message
processing
0.16ms
0.44ms
SLOT 0
SLOT 1
SLOT 2
SLOT 3
SLOT 4
1,000Hz (1ms)
200Hz (5ms)
Sensor logging filtering
and temperature averaging
C.G. 18739
Figure 7.4 Relationship between Sensor Logging,
Compensation and Transmitted Output
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 16
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
7.8 Operational Message Definitions
7.9 System BIT Flags
The data output message has the content and
sequence as shown in the table below:
7.9.1 System Startup BIT Flags
Item
Word
Data Item
Value / Unit
0
0
Header
16 Bit, 0x55AA
1
1
Message Count
16 Bit, 0 to 65535
decimal
2
2-3
Axis X Rate
32 Bit Single Precision
FP, (˚/s)
3
4-5
Axis X
Acceleration
32 Bit Single Precision
FP, (g)
4
6-7
Axis Y Rate
32 Bit Single Precision
FP, (˚/s)
5
8-9
Axis Y
Acceleration
32 Bit Single Precision
FP, (g)
6
10-11
Axis Z Rate
32 Bit Single Precision
FP, (˚/s)
7
12-13
Axis Z
Acceleration
32 Bit Single Precision
FP, (g)
8
14-15
Aux Input Voltage
32 Bit Single Precision
FP, (volts)
9
16-17
Average IMU
Temperature
32 Bit Single Precision
FP, (˚C)
10
18-19
Axis X Delta
Theta
32 Bit Single Precision
FP, (˚)
11
20-21
Axis X Delta
Vel
32 Bit Single Precision
FP, (m/s)
12
22-23
Axis Y Delta
Theta
32 Bit Single Precision
FP, (˚)
13
24-25
Axis Y Delta
Vel
32 Bit Single Precision
FP, (m/s)
26-27
Axis Z Delta
Theta
32 Bit Single Precision
FP, (˚)
15
28-29
Aux Z Delta
Vel
32 Bit Single Precision
FP, (m/s)
16
30
System Startup
BIT Flags
16 Bit decimal value
System Operation
BIT Flags
16 Bit decimal value
14
17
18
19
31
32
33
Error Operation
BIT Flags
16 Bit decimal value
Checksum
16 Bit 2’s Complement
of the 16 Bit Sum of the
Previous 0-18 data items
These flags indicate errors detected during DMU10
Initialisation. Once set, these flags will not be cleared
for the whole of the power cycle.
BIT No.
System Startup BIT Flags
D00
Code_Checksum_Fail
Set if the DMU10 code checksum does not
match. If this flag is set, correct operation of the
DMU10 cannot be guaranteed.
D01
NVM_Coefficient_Checksum_Fail
Set if the DMU10 NVM coefficient checksum
does not match. If this flag is set, correct
operation of the DMU10 cannot be guaranteed.
D02
Orion_Startup_Error
This flag will be set if there were any Orion Startup
Flags set in any of the three 32 BIT
Orion BIT flag arrays. The output items affected
by this failure will be marked in the Item Error
Indication table.
D03
Internal_Processor_Error
Set if there was an error accessing hardware
internal to the microprocessor.
D04
Invalid_NVM_Coefficient
Set if an NVM coefficient value is invalid. If
this affects an operational output item, the
corresponding item will be marked in the Item Error
Indication table and this should help to identify
which coefficient is invalid.
D05
Spare
D06
Spare
D07
Spare
D08
Spare
D09
Spare
D010
Spare
D011
Spare
D012
Spare
D013
Spare
D014
Spare
D015
Spare
Table 7.3 System Startup BIT Flags
Table 7.2 Operational Message Data
Output Definitions
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 17
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
7.9.2 System Operation BIT Flags
These flags indicate errors detected during DMU10
operation. These flags are set per DMU10 output
message and so may not appear in every returned
message (because the fault may clear or be
intermittent).
BIT No.
www.siliconsensing.com
BIT No.
System Operation BIT Flags
D011
Spare
D012
Spare
D013
Spare
D014
Spare
D015
Spare
System Operation BIT Flags
D00
Voltage_Regulator_Range_Error
Regulator Voltage BIT Function.
D01
Scheduler_Slot_Period_Extended
This flag will be set if the DMU10 software
scheduler could not complete its allocated tasks
within the required slot time. If this happens,
the DMU10 will widen it’s scheduler slot time.
This will normally be caused by a hardware fault
that caused a timeout. When this flag is set, the
DMU10 will output data at a decreased rate.
Table 7.4 System Operation BIT Flags
7.9.3 System Error Indication BIT Flags
These flags indicate which message items have faults
associated with them.
BIT No.
System Error Indication BIT Flags
Output_Message_Missed
This flag will be set if the previous output message
was missed. This will occur if the DMU10 was
unable to output a serial port message because
the previous message was still being sent. This will
normally be caused by incompatible Message or
Baud Rate selection.
D00
Message Item 01 Error (X axis Rate for standard
message format).
D01
Message Item 02 Error (X axis acceleration for
standard message format).
D02
Message Item 03 Error (Y axis Rate for standard
message format).
D03
Message Item 04 Error (Y axis acceleration for
standard message format).
D03
Internal_Processor_Error
This flag will be set if the software timed out
while accessing hardware internal to the
microprocessor (A/D, SPI). The output items
affected by this failure will be marked in the Item
Error Indication table.
D04
Message Item 05 Error (Z axis Rate for standard
message format).
D05
Message Item 06 Error (Auxillary input for
standard message format).
D04
Orion_Operation_Error
This flag will be set if there are any Orion Operation
Flags set in any of the three 32 BIT Orion BIT flag
arrays. The output items affected by this failure will
be marked in the Error Indication table.
D06
Message Item 07 Error (Temperature for
standard message format).
D07
Message Item 08 Error (X delta theta for standard
message format).
D08
Message Item 09 Error (X delta velocity for
standard message format).
D09
Message Item 10 Error (Y delta theta for standard
message format).
D010
Message Item 11 Error (Y delta velocity for
standard message format).
D011
Message Item 12 Error (Z delta theta for standard
message format).
D012
This currently only applies to accelerometer
sensors which have corresponding sensors in the
same sense axis.
Message Item 13 Error (Z delta velocity for
standard message format).
D013
Message Item 14 Error.
D02
D05
D06
Output_Value_Out_Of_Range
Set when an output value has been clamped
because it is out of range. The output items
affected by this failure will be marked in the Error
Indication table.
Max Rate = ± 305˚/s
Max Acceleration = ± 10.01g
Plausibility_Error
Set when the system has determined that a
sampled sensor value is implausible. The output
items affected by this failure will be marked in the
Error Indication table.
D07
Spare
D014
Message Item 15 Error.
D08
Spare
D015
Message Item 16 Error.
D09
Spare
D010
Spare
Table 7.5 System Error Indication BIT Flags
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 18
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
8 Design Tools and Resources Available
Item
Description of Resource
Part Number
Order/Download
DMU10 Brochure: A one page sales brochure describing the
key features of the DMU10 Inertial Measurement Unit.
DMU10-00-0100-131
Download
(www.siliconsensing.com)
DMU10 Datasheet: Full technical information on all
DMU10 Dynamic Measurement Unit part number options.
Specification and other essential information for assembling
and interfacing to DMU10 Inertial Measurement Unit, and
getting the most out of it.
DMU10-00-0100-132
Download
(www.siliconsensing.com)
DMU10 Evaluation Kit: DMU10 delivered with an RS422 to
USB interface, plug-and-play real time display and logging
software and two interface cabling solutions DMU10-21-0100
unit included.
DMU10-21-0500
Order
(www.siliconsensing.com)
DMU10 Presentation: A useful presentation describing the
features, construction, principles of operation and applications
for the DMU10 Inertial Measurement Unit.
—
Download
(www.siliconsensing.com)
DMU10-01-0100-408
Solid Model CAD files for DMU10 Inertial
Measurement Unit:
Available in .STP and .IGS file format.
Download
(www.siliconsensing.com)
DMU10-02-0100-408
Interface: Off-the-peg pseudo code and a simple flowchart
with message handling instructions for use as a customer aid
to developing their own interface directly to a DMU10 Inertial
Measurement Unit via the RS422 interface.
—
Download
(www.siliconsensing.com)
Questions and Answers: Some useful questions asked
by customers and how we’ve answered them. This is an
informal (uncontrolled) document intended purely as additional
information.
—
Download
(www.siliconsensing.com)
RoHS compliance statement for DMU10 : DMU10 is fully
compliant with RoHS. For details of the materials used in the
manufacture please refer to the MDS Report.
—
Download
(www.siliconsensing.com)
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 19
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
8.1 DMU10 Evaluation Kit
9 Part Markings
The DMU10 Evaluation Kit enables the output data from
the DMU10 to be viewed and logged for testing and
evaluation purposes.
DMU10 is supplied with an adhesive label attached.
The label displays readable DMU10 part and part
identification numbers.
The part identification number is a numeric code;
WWYYXXXX C or CC where:
WW = Manufacturing week number
YY
= Manufacturing year number
XXXX = Serial number
C/CC = Revision
A 4x4 data matrix barcode containing the part
identification number is also displayed on the label.
Figure 8.1 DMU10 Evaluation Kit
8.1.1 DMU10 Evaluation Kit Contents
The DMU10 Evaluation Kit (part number DMU10-21-0500)
contains the following:
DMU10 IMU (part number DMU10-21-0100).
• MEV RS485i to USB converter.
• CD containing the MEV drivers.
• USB memory stick containing the data logging
software.
• Interface cables.
• User manual.
8.1.2 System Requirements
The DMU10 Evaluation Kit requires a PC with a USB port.
The requirements for the PC are as follows:
• Microsoft® Windows® XP (SP3 or greater), Vista®,
Windows 7 or Windows 8 Operating Systems.
The software has not been tested on any
other Operating System and therefore correct
functionality cannot be guaranteed.
• Minimum of 500Mb of RAM.
• 500Mb of free hard drive space plus space for
logged data (typical data rate ≈ 50kbit/s).
• High power or self-powered USB 2.0 Port.
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 20
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
10 Installation Details
Figures 10.1 and 10.2 show the installation drawing for
the DMU10, the OEM and Module versions respectively.
The DMU10 (OEM) is supplied as a PCBA. It is
recommended that the PCBA is mounted on spacers
or pillars using the four mounting holes provided.
The holes are clearance holes for use with M2.0
screws. During calibration, alignment is achieved
using external reference dowels on two sides of the
PCBA. These two sides therefore form the datum for
alignment purposes.
The DMU10 (Module) is designed for 3 point mounting
using M2.5 screws. During calibration alignment is
achieved using two external reference dowel holes on
the base of the DMU10. The dowel holes are designed
to be used with two Ø2mm (in accordance with
BS EN ISO 8734 or BS EN ISO 2338) dowel pins
provided by the host.
The DMU10 mounting screw torque settings will be
dependent on the host application; it will for example
vary depending on the specification of the screw, the
material of the host structure and whether a locking
compound is used. When securing a DMU10 OEM
unit to the host system using steel M2 screws and
a thread locking compound the suggested torque
setting is 0.1Nm for securing to an aluminium host
structure. When securing a DMU10 Module unit to
the host system using steel M2.5 screws and a thread
locking compound the suggested torque setting is
0.2Nm for securing to an aluminium host structure.
This information is provided for guidance purposes
only, the actual torque settings are the responsibility
of the host system designer.
Alignment Dowels used for
Calibration and Test
3x Ø 3.199
3.188
5.2
22
17.4
6
25.6
28.4
1.6
7
2
4x Ø 2.4
2.3
41
All dimensions in millimetres.
Figure 10.1 DMU10 (OEM) Installation Drawing
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 21
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
45
37
18.5
16
9.5
26
3x Ø 3.1
3.0
2.024 x3.0DP
2.012
3.5
All dimensions in millimetres.
34.5
0.5
Ø 2.024
2.012 x3DP
2x R
Figure 10.2 DMU10 (Module) Installation Drawing
+ Pitch
(P)
+Y
+X
+ Roll
(R)
+Z
+ Yaw
(Y)
Figure 10.3 Axis Definitions
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 22
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
11 DMU10 MEMS Sensor Internal
Construction and Theory of Operation
Construction
The DMU10 uses three MEMS rate and acceleration
Combi-Sensors providing three gyroscopes and six
accelerometers.
Each Combi-Sensor comprises six main components;
Silicon MEMS Single-Axis Angular Rate Sensor, Silicon
On Glass (SOG) Dual-Axis MEMS Accelerometer,
Silicon Pedestal, ASIC Package Base and Lid. The
MEMS Sensors, ASIC and Pedestal are housed in a
hermetically sealed package cavity with a nitrogen
back-filled partial vacuum, this has particular
advantages over sensors supplied in plastic packages
which have Moisture Sensitivity Level limitations.
An exploded drawing of a Combi-Sensor showing the
main components is given in Figure 11.1 below.
CM
PPY S300
Y
Mad MMLLL
e In
JapaLRDD
n
Vacuum Cavity
Seal Ring
Lid
YYM
MLL
LL_X
XXX
Bond Wires
MEMS Ring
Pedestal
Dual-Axis Accelerometer
ASIC
Package Base
C.G. 18542
Figure 11.1 Combi-Sensor
Main Components
Silicon MEMS Ring Sensor (Gyro)
The 3mm diameter by 65μm thick silicon MEMS ring
is fabricated by Silicon Sensing using a DRIE (Deep
Reactive Ion Etch) bulk silicon process. The annular
ring is supported in free-space by eight pairs of
‘dog-leg’ shaped symmetrical spokes which radiate
from a central 1mm diameter solid hub.
The bulk silicon etch process and unique patented ring
design enable close tolerance geometrical properties
for precise balance and thermal stability
and, unlike other MEMS gyros, there are no small gaps
to create problems of interference and stiction.
These features contribute significantly to DMU10’s
bias and scale factor stability over temperature, and
vibration and shock immunity. Another advantage
of the design is its inherent immunity to acceleration
induced rate error, or ‘g-sensitivity’.
Piezoelectric (strain) thin film actuators/transducers
are attached to the upper surface of the silicon ring
perimeter and are electrically connected to bond
pads on the ring hub via tracks on the spokes.
These actuate or ‘drive’ the ring into its Cos2 mode
of vibration at a frequency of 22kHz or detect radial
motion of the ring perimeter either caused by the
primary drive actuator or by the coriolis force effect
when the gyro is rotating about its sensing axis. There
is a single pair of primary drive actuators and a single
pair of primary pick-off transducers, and two pairs of
secondary pick-off transducers.
The combination of transducer technology and
eight secondary pick-off transducers improves the
DMU10’s signal-to-noise ratio, the benefit of which
is a very low-noise device with excellent bias over
temperature performance.
Silicon MEMS Dual-Axis Accelerometer
Figure 11.2 Combi-Sensor
(Lid Removed)
The Combi-Sensor dual-axis open loop accelerometer
is a one-piece resonating silicon MEMS structure
anodically bonded to top and bottom glass substrates
to form a hermetically sealed Silicon on Glass (SOG)
wafer sub-assembly. The same DRIE bulk silicon
process as used to create the gyro in is used to
create two orthogonal finger-like spring/seismic proof
mass structures, each measuring 1.8mm square,
and with a resonant frequency of 2.9kHz. Figure 11.3
shows a schematic cross section through the SOG
wafer.
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 23
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
Capacitive drive and pick-off signals are transmitted
by wire bond interconnections, in through-glass vias,
between the metallised transducer plates on the
MEMS proof mass and the ASIC.
Multiple inter-digitated fingers create increased
capacitance thus enabling a high signal-to-noise
ratio. The fingers are tapered to increase the resonant
frequency and also have a high aspect ratio to provide
highly stable performance. The differential gaps
between the static electrode fingers and those of the
proof mass provide an air squeeze film with nearcritical damping.
Control of the accelerometer is handled by the ASIC.
Support flexure
Glass Substrates
Seismic proof mass
Through-glass via
Cavity
Silicon
C.G. 18538
Figure 11.3 Schematic Section of the Silicon On
Glass Accelerometer MEMS Wafer
Sub-Assembly
Pedestal
The hub of the MEMS gyro ring is supported above
the ASIC on a 1mm diameter cylindrical silicon
pedestal, which is bonded to the ring and ASIC using
an epoxy resin.
ASIC
The ASIC is a 5.52mm x 3.33mm device fabricated
using 0.35μm CMOS process. ASIC and MEMS are
physically separate and are connected electrically
by using gold bond wires and thus the ASIC has
no MEMS-to-ASIC internal tracking, meaning
there is reduced noise pick-up and excellent EMC
performance. Gold bond wires also connect the ASIC
to the internal bond pads on the Package Base.
Package Base and Lid
The LCC ceramic Package Base is a multi-layer
aluminium oxide construction with internal bond
wire pads connected through the Package Base via
integral multi-level tungsten interconnects to a series
of external solder pads. Similar integral interconnects
in the ceramic layers connect the Lid to Vss, thus
the sensitive elements are inside a Faraday shield
for excellent EMC. Internal and external pads are
electroplated gold on electroplated nickel.
The Package Base incorporates a seal ring on the
upper layer onto which a Kovar ® metal Lid is seam
welded using a rolling resistance electrode, thus
creating a totally hermetic seal. Unlike other MEMS
Inertial Sensor packages available on the market,
the DMU10 Combi Sensor has a specially developed
seam weld process which eliminates the potential
for internal weld spatter. Inferior designs can cause
dislodged weld spatter which affects gyro reliability
due to interference with the vibratory MEMS element,
especially where the MEMS structure has small gaps,
unlike Combi-Sensor with its large gaps as described
above.
Theory of Operation (Gyro)
The rate sensor is a solid-state device and thus has
no moving parts other than the deflection of the ring
itself. It detects the magnitude and direction of
angular velocity by using the ‘coriolis force’ effect.
As the gyro is rotated coriolis forces acting on
the silicon ring cause radial movement at the ring
perimeter.
There are eight actuators/transducers distributed
evenly around the perimeter of the silicon MEMS ring.
Located about its primary axes (0° and 90°) are a
single pair of ‘primary drive’ actuators and a single
pair of ‘primary pick-off’ transducers. Located about
its secondary axes (45° and 135°) are two pairs of
‘secondary pick-off’ transducers.
The ‘primary drive’ actuators and ‘primary pick-off’
transducers act together in a closed-loop system to
excite and control the ring primary operating vibration
amplitude and frequency (22kHz). Secondary ‘pick-off’
transducers detect radial movement at the secondary
axes, the magnitude of which is proportional to the
angular speed of rotation and from which the gyro
derives angular rate.
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 24
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
The transducers produce a double sideband,
suppressed carrier signal, which is demodulated
back to a baseband. This gives the user complete
flexibility over in system performance, and makes the
transduction completely independent of DC or low
frequency parametric conditions of the electronics.
PPO
SPO
SPO
PD
PD
Referring to Figures 11.4(a) to 11.4(d)
Figure 11.4(a) shows the structure of the silicon MEMS
ring. Figure 11.4(b) shows the ring diagrammatically,
the spokes, actuators and transducers removed for
clarity, indicating the Primary Drive actuators (single
pair), Primary Pick-Off transducers (single pair) and
Secondary Pick-Off transducers (two pairs).
In Figure 11.4(b) the annular ring is circular and is
representative of the gyro when unpowered.
SPO
SPO
PPO
C.G 18399
Figure 11.4(b)
ν
When powered-up the ring is excited along its primary
axes using the Primary Drive actuators and Primary
Pick-Off transducers acting in a closed-loop control
system within the ASIC. The circular ring is deformed
into a ‘Cos2θ’ mode which is elliptical in form and has
a natural frequency of 22kHz. This is depicted in Figure
11.4(c). In Figure 11.4(c) the gyro is powered-up but
still not rotating. At the four Secondary Pick-Off nodes
located at 45° to the primary axes on the ring perimeter
there is effectively no radial motion.
Zero Radial
Motion
SPO
ν
If the gyro is now subjected to applied angular rate, as
indicated in Figure 11.4(d), then this causes the ring
to be subjected to coriolis forces acting at a tangent
to the ring perimeter on the primary axes. These
forces in turn deform the ring causing radial motion at
the Secondary Pick-Off transducers. It is the motion
detected at the Secondary Pick-off transducers which
is proportional to the applied angular rate. The signal
is demodulated with respect to the primary motion,
which results in a low frequency component which
is proportional to angular rate. All of the gyro control
circuitry is hosted in the ASIC. A block diagram of the
ASIC functions is given in Figure 1.1 in Section 1.
Cos2θ
Vibration
Mode at
22kHz
ν
ν
C.G 18400
Figure 11.4(c)
ν
Fc
Resultant
Radial Motion
Fc = Coriolis Force
PPO+
SPOSPO+
ν
SPO-
Applied Rate
SPO+
PD+
PDPD+
ν
Fc
PD-
Fc
SPO+
SPO-
SPO+
SPOPPO+
Figure 11.4(a)
C.G 18398
ν
C.G 18400
Figure 11.4(d)
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 25
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
Theory of Operation (Accelerometer)
The accelerometer contains a seismic ‘proof mass’
with multiple fingers suspended via a ‘spring’, from a
fixed supporting structure. The supporting structure
is anodically bonded to the top and bottom glass
substrates and thereby fi xed to the sensor package
base.
When the accelerometer is subjected to a linear
acceleration along its sensitive axis, the proof
mass tends to resist motion due to its own inertia,
therefore the mass and it’s fingers becomes
displaced with respect to the interdigitated fi xed
electrode fingers (which are also fi xed to glass
substrates). Air between the fingers provides a
damping effect. This displacement induces a
differential capacitance between the moving and
fi xed silicon fingers which is proportional to the
applied acceleration.
88kHz reference
Electrode 2
Signal proportional
to movement of
proof mass
Out of Phase Square Wave
at 88kHz on Electrode 2
Sensing axis
Amplifier
Electrode 1
Demodulator
Low pass
filter
In Phase Square Wave
at 88kHz on Electrode 1
Output signal
C.G. 18540
Figure 11.5(b) Schematic of Accelerometer
Control Loop
Capacitor plate groups are electrically connected in
pairs at the top and bottom of the proof mass.
In-phase and anti-phase waveforms are applied by
the ASIC separately to the ‘left’ and ‘right’ finger
groups. The demodulated waveforms provide a
signal output proportional to linear acceleration.
Figures 11.5(a) and 11.5(b) provide schematics
of the accelerometer structure and control loop
respectively.
Sensing axis
Fixed Electrode 1
Fixed support
Fixed Electrode 2
Proof mass
(includes fingers)
C.G. 18613
Figure 11.5(a) Schematic of Accelerometer
Structure
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 26
DMU10-00-0100-132 Rev 4
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
Notes
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
DMU10-00-0100-132 Rev 4
Page 27
DMU10 Technical Datasheet
Six Degrees of Freedom Precision
MEMS Inertial Measurement Unit
www.siliconsensing.com
Notes
Silicon Sensing Systems Limited
Clittaford Road Southway
Plymouth Devon
PL6 6DE United Kingdom
Silicon Sensing Systems Japan Limited
1-10 Fuso-Cho
Amagasaki
Hyogo 6600891 Japan
T:
F:
E:
W:
T:
F:
E:
W:
+44 (0)1752 723330
+44 (0)1752 723331
[email protected]
siliconsensing.com
+81 (0)6 6489 5868
+81 (0)6 6489 5919
[email protected]
siliconsensing.com
Specification subject to change without notice.
© Copyright 2015
Silicon Sensing Systems Limited
All rights reserved.
Printed in England 06/2015
Date 09/06/2015
DMU10-00-0100-132 Rev 4
DCR No. 710009189
© Copyright 2015 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 28
DMU10-00-0100-132 Rev 4
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