9.17.026 - Bronkhorst High

9.17.026 - Bronkhorst High
Instruction manual
DeviceNet™ slave interface
for digital multibus
Mass Flow / Pressure instruments
Doc. no.: 9.17.026T Date: 19-05-2015
ATTENTION
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.
Head Office: Nijverheidsstraat 1a, NL‐7261 AK Ruurlo, The Netherlands, Tel. +31 573 458800, [email protected] BRONKHORST® Disclaimer Even though care has been taken in the preparation and publication of the contents of this manual, we do not assume legal or other liability for any inaccuracy, mistake, mis‐statement or any other error of whatsoever nature contained herein. The material in this manual is for information purposes only, and is subject to change without notice. Bronkhorst High‐Tech B.V. July 2011 Symbols Important information. Discarding this information could cause injuries to people or damage to the Instrument or installation. Helpful information. This information will facilitate the use of this instrument. Additional info available on the internet or from your local sales representative. Warranty The products of Bronkhorst High‐Tech B.V. are warranteed against defects in material and workmanship for a period of three years from the date of shipment, provided they are used in accordance with the ordering specifications and the instructions in this manual and that they are not subjected to abuse, physical damage or contamination. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are normally warranted for one year or the balance of the original warranty, whichever is the longer. See also paragraph 9 of the Conditions of sales: http://www.bronkhorst.com/files/corporate_headquarters/sales_conditions/en_general_terms_of_sales.pdf The warranty includes all initial and latent defects, random failures, and undeterminable internal causes. It excludes failures and damage caused by the customer, such as contamination, improper electrical hook‐up, physical shock etc. Re‐conditioning of products primarily returned for warranty service that is partly or wholly judged non‐warranty may be charged for. Bronkhorst High‐Tech B.V. or affiliated company prepays outgoing freight charges when any party of the service is performed under warranty, unless otherwise agreed upon beforehand. However, if the product has been returned collect to our factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping methods/carriers are paid for by the customer. Page 2 DeviceNet interface 9.17.026 BRONKHORST® Table of contents 1 GENERAL PRODUCT INFORMATION .................................................................................................... 5 1.1 INTRODUCTION ............................................................................................................................................. 5 1.2 MULTIBUS TYPES ........................................................................................................................................... 5 1.3 REFERENCES TO OTHER APPLICABLE DOCUMENTS ................................................................................................... 6 1.3.1 Manuals and user guides: ........................................................................................................................ 6 1.3.2 Technical Drawings: ................................................................................................................................. 6 1.3.3 Software tooling: ..................................................................................................................................... 6 1.4 SHORT FORM START‐UP ................................................................................................................................... 7 2 FIELD BUS INSTALLATION ................................................................................................................... 8 2.1 GENERAL ..................................................................................................................................................... 8 2.2 DEVICENET CONNECTOR .................................................................................................................................. 8 2.3 DEVICENET CABLES AND T‐PARTS ...................................................................................................................... 9 2.4 MAXIMAL CABLE LENGTHS WITH DEVICENET ........................................................................................................ 9 2.5 DROP LINES WITH DEVICENET ......................................................................................................................... 10 2.6 NETWORK TERMINATION ............................................................................................................................... 10 2.7 POWER SUPPLY ........................................................................................................................................... 10 3 FUNCTIONAL DESCRIPTION .............................................................................................................. 11 3.1 GENERAL ................................................................................................................................................... 11 3.2 OBJECTS AND SERVICES ................................................................................................................................. 11 3.3 EXPLICIT MESSAGING .................................................................................................................................... 11 3.3.1 Identity Object ....................................................................................................................................... 11 3.3.2 DeviceNet Object ................................................................................................................................... 12 3.3.3 Connection Objects ................................................................................................................................ 12 3.3.4 Supervisor Objects ................................................................................................................................. 13 3.3.5 S‐Analog Sensor Object .......................................................................................................................... 14 3.3.6 S‐Analog Actuator Object....................................................................................................................... 15 3.3.7 S‐Single Stage Controller Object ............................................................................................................. 16 3.3.8 S‐Gas Calibration Object ........................................................................................................................ 17 3.3.9 Elementary data Types .......................................................................................................................... 18 3.4 POLLED I/O ............................................................................................................................................... 19 3.4.1 Representation ...................................................................................................................................... 19 3.5 DEVICE CONFIGURATION................................................................................................................................ 21 3.5.1 Available data combinations for Polled I/O ............................................................................................ 21 3.5.2 Available parameter data ...................................................................................................................... 21 4 OBJECT DESCRIPTION ....................................................................................................................... 22 4.1 SUPERVISOR OBJECT ..................................................................................................................................... 22 4.1.1 FLOW‐BUS interfacing (via RS232) ......................................................................................................... 22 4.1.2 I/O assembly instances selection ............................................................................................................ 22 4.1.3 Exception Status .................................................................................................................................... 23 4.2 SINGLE STAGE CONTROLLER ............................................................................................................................ 23 4.2.1 Control mode ......................................................................................................................................... 23 4.2.2 Setpoint ................................................................................................................................................. 24 4.3 ANALOG SENSOR OBJECT ............................................................................................................................... 25 4.3.1 Sensor value ........................................................................................................................................... 25 4.3.2 Alarm enable ......................................................................................................................................... 25 4.3.3 Alarm Trip Points ................................................................................................................................... 25 4.3.4 Gas calibration object instance .............................................................................................................. 25 4.4 ANALOG ACTUATOR OBJECT INSTANCE .............................................................................................................. 25 4.4.1 Actuator value ....................................................................................................................................... 25 4.4.2 Override ................................................................................................................................................. 26 4.4.3 Safe state ............................................................................................................................................... 26 4.5 GAS CALIBRATION OBJECT INSTANCE ................................................................................................................. 26 4.5.1 Gas standard number ............................................................................................................................ 26 4.5.2 Gas Symbol ............................................................................................................................................ 26 Page 3 DeviceNet interface 9.17.026 BRONKHORST® 4.6 4.7 4.8 NETWORK ERROR DETECTION .......................................................................................................................... 26 BUS DIAGNOSTICS ........................................................................................................................................ 27 SERIAL NUMBER .......................................................................................................................................... 28 5 EDS‐FILE ........................................................................................................................................... 29 6 ADD SLAVE TO DEVICENET ................................................................................................................ 30 7 SLAVE CONFIGURATION SETTINGS ................................................................................................... 31 8 SLAVE PARAMETER SETTINGS ........................................................................................................... 32 9 CHANGING MAC ID AND BAUD RATE ................................................................................................ 33 9.1 VIA ROTARY SWITCHES ON THE SIDE OF THE INSTRUMENT (IF PRESENT). ..................................................................... 33 9.1.1 DATA RATE............................................................................................................................................. 33 9.1.2 NODE ADDRESS (00 – 63 PGM) .............................................................................................................. 33 9.2 VIA DEVICENET: .......................................................................................................................................... 34 9.2.1 MAC ID .................................................................................................................................................. 34 9.2.2 BAUD Rate ............................................................................................................................................. 34 9.3 VIA RS232: FLOWFIX .................................................................................................................................. 35 9.4 VIA RS232: OTHER PROGRAMS ...................................................................................................................... 36 9.5 VIA MICRO‐SWITCH AND LEDS ON TOP OF INSTRUMENT ........................................................................................ 36 10 DOWNLOAD TO MASTER .............................................................................................................. 37 11 TEST COMMUNICATION ................................................................................................................ 39 12 TROUBLESHOOTING ...................................................................................................................... 40 12.1 LED INDICATIONS ........................................................................................................................................ 40 12.1.1 LED indications mode (MBC‐II and MBC3) .............................................................................................. 40 12.1.2 LED indications mode (MBC3 only) ......................................................................................................... 41 12.1.3 DeviceNet error description ................................................................................................................... 42 12.2 TROUBLESHOOTING HINTS AND TIPS ................................................................................................................. 42 13 SERVICE ........................................................................................................................................ 43 Page 4 DeviceNet interface 9.17.026 BRONKHORST® 1 GENERAL PRODUCT INFORMATION 1.1 INTRODUCTION The DeviceNet interface offers a direct connection to DeviceNet Networks for Bronkhorst1) digital mass‐
flow/pressure meters/controllers according to the Mass Flow Controller Profile specified by the ODVA. This manual is limited to the description of the interface between the DeviceNet Mass Flow Controller with a master device. This manual will explain how to install a Bronkhorst instrument to your DeviceNet system. It only consists of that information which is needed most. There is no mutual communication between DeviceNet slaves, only between master and slave. Each slave should have its own unique MAC ID on the network, otherwise there is no communication possible. Setting MAC ID can be performed by either:  Master configuration software  Bronkhorst tooling software: FlowFix (on Multibus documentation/software tool CD) This programme is able to communicate with the instrument via RS232 using a special cable. If you don’t have such a cable, ask your local sales representative.  Button (+ LED's) on top of the instrument  Rotary switches on the side of the instrument (if present). Information about DeviceNet can be found at the website of de ODVA organisation. www.odva.org 1)
Bronkhorst: This includes Bronkhorst High‐Tech B.V. , Bronkhorst Cori‐Tech B.V. and M+W Instruments GmbH. 1.2 MULTIBUS TYPES In 2000 Bronkhorst developed their first digital instruments according to the “multibus” principle. The basic pc‐board on the instrument contained all of the general functions needed for measurement and control, including alarm, totalizing and diagnostic functions. It had analog I/O‐signals and also an RS232 connection as a standard feature. In addition to this there is the possibility of integrating an interface board with DeviceNet™, Profibus‐DP®, Modbus , FLOW‐BUS or EtherCAT protocol. The first generation (MBC‐I) was based on a 16 bit Fujitsu controller. It was superseded in 2003 by the Multibus type 2 (MBC‐II). This version was also based on the 16 bit Fujitsu controller but it had several improvements to the MBC‐I. One of them is the current steering of the valve. It reduced heat production and improved control characteristics. The latest version Multibus controller type 3 (MBC3) is introduced in 2011. It is build around a 72MHz 32 bit NXP ARM controller. It has AD and DA controllers on board which makes it possible to measure noise free and control valves without delays. The internal control loop runs 6 times faster compared to the MBC‐II therefore control stability has improved significantly. It also has several improved functions like reverse voltage protection, inrush current limitation and overvoltage protection. MBC3 instruments can be recognised by the “MBC3” placed on lower left side of the instrument label (see example). Page 5 DeviceNet interface 9.17.026 BRONKHORST® 1.3 REFERENCES TO OTHER APPLICABLE DOCUMENTS Manuals and guides for digital instruments are modular. General instructions give information about the functioning and installation of instruments. Operational instructions explain the use of the digital instruments features and parameters. Field bus specific information explains the installation and use of the field bus installed on the instrument. 1.3.1
Manuals and user guides: General instructions Instrument type based Operational instructions Document 9.17.022 Field bus specific information Document 9.17.023
Bronkhorst High‐Tech General instructions digital Mass Flow / Pressure
Document 9.17.024
FLOW‐BUS interface Operational instructions for digital multibus Mass Flow / Pressure instruments Document 9.17.031 Bronkhorst Cori‐Tech General instructions CORI‐FLOW Document 9.17.050 Bronkhorst Cori‐Tech General instructions mini CORI‐FLOW Document 9.17.044 Bronkhorst High‐Tech General instructions digital LIQUI‐FLOW L30 Document 9.17.025
PROFIBUS–DP interface Document 9.17.026
DeviceNet interface Document 9.17.035
Modbus interface Document 9.17.027
RS232 interface with FLOW‐BUS protocol M+W Instruments Instruction manual MASS‐STREAM D‐6300 Document 9.17.063
EtherCAT interface 1.3.2
Technical Drawings: Hook‐up diagram laboratory‐style MBC DeviceNet.pdf Hook‐up diagram industrial style MBC DeviceNet.pdf Hook‐up diagram CORI‐FLOW DeviceNet.pdf Hook‐up diagram LIQUI‐FLOW L30 digital DeviceNet.pdf 1.3.3
(document 9.16.060) (document 9.16.054) (document 9.16.050) (document 9.16.071) Software tooling: Flowfix FlowDDE EDS file All these documents can be found at: http://www.bronkhorst.com/en/downloads Page 6 DeviceNet interface 9.17.026 BRONKHORST® 1.4 SHORT FORM START‐UP All necessary settings for this module are already performed at Bronkhorst. To follow next steps carefully is the quickest way to get this module operational in your own DeviceNet environment. START Master present Make sure your master has been installed to the DeviceNet system
Load EDS Load EDS‐file with configuration tool
Bitmaps (with flow controllers) can be copied in the proper directory (mostly automatic, sometimes by hand; depends on program) Copy bitmaps Add slave to DeviceNet system Select "Bronkhorst meter/controller" and add new instrument to the bus
Set device configuration Set parameter data Set parameter data for a‐cyclic setting of parameter values Default instruments will be delivered to customers on address 63 and with a baud rate of 125000 baud. Normally setting an address can be performed by your master configuration software. However, if you choose to set a station address off‐line you can use the programme FLOWFIX to change MAC ID and baud rate via RS232 connection. MAC ID and baud rate can also be changed by using the button on top of the instrument or the rotary switches on the side of the instrument if present. See chapter 8 for more details. Set MAC ID and baud rate of instrument: Download all configuration settings into your master Download configuration Test data‐exchange communication between your master and the instrument(s) Test data exchange Ready Page 7 DeviceNet interface 9.17.026 BRONKHORST® 2 FIELD BUS INSTALLATION 2.1 GENERAL This chapter introduces the DeviceNet cable system and provides a brief overview of how to set up a DeviceNet network efficiently. The steps in this chapter describe the basic tasks involved in setting up a network. For the installation of DeviceNet, ODVA has created a document which can be found in the DeviceNet library: PUB00027R1_Cable_Guide_Print_Copy.pdf 2.2 DEVICENET CONNECTOR Bronkhorst instruments are fitted with a micro‐style sealed M12 connector. M12 Connector Male Female Page 8 nr Color Wire Identity Usage
Round 1 Bare Drain shield 2 RED 3 Black V‐ (0Vdc) power 4 White CAN_H (CAN+) signal 5 Blue CAN_L (CAN‐) signal V+ power (+24Vdc) 5 4 3 1
2 A‐coded
DeviceNet interface 9.17.026 BRONKHORST® 2.3 DEVICENET CABLES AND T‐PARTS M12 cable M12 termination resistor T‐part T‐part wiring 2.4 MAXIMAL CABLE LENGTHS WITH DEVICENET The DeviceNet cable system uses a trunk/drop line topology Round shielded cable (thick, mid and thin) contains five wires: One twisted pair (red and black) for 24V dc power; one twisted pair (blue and white) for signal, and a drain wire (bare). Flat cable contains four wires: One pair (red and black) for 24 dc power; one pair (blue and white) for signal. Unshielded 4‐wire drop cable is only designed for use with flat cable systems. Page 9 DeviceNet interface 9.17.026 BRONKHORST® The distance between any two points must not exceed the maximum cable distance allowed for the data rate used. Maximum distance Maximum distance Maximum distance Maximum distance
Data rate (flat cable) (thick cable) (mid cable) (thin cable) 125k bit/s 420m 500m
300m
100m 250k bit/s 200m 250m
250m
100m 500k bit/s 75m 100m
100m
100m The maximum cable distance is not necessarily the trunk length only. It is the maximum distance between any two devices. 2.5 DROP LINES WITH DEVICENET The cumulative drop line length refers to the sum of all drop lines, thick, thin, or mid cable, in the cable system. This sum cannot exceed the maximum cumulative length allowed for the data rate used. Data rate
Cumulative drop line length
125k bit/s
156m
250k bit/s
78m
500k bit/s
39m
The maximum cable distance from any device on a branching drop line to the trunk line is 6m.
2.6 NETWORK TERMINATION You must terminate the trunk line at both ends with 121 Ohms, 1%, 1/4W terminating resistors. 2.7 POWER SUPPLY The cable system requires the power supply to have a rise time of less than 250 milliseconds to within 5% of its rated output voltage. You should verify the following:  The power supply has its own current limit protection  Fuse protection is provided for each segment of the cable system  Any section leading away from a power supply must have protection  The power supply is sized correctly to provide each device with its  Required power  De‐rate the supply for temperature using the manufacturer’s guidelines Use the power supply to power the DeviceNet cable system only. If a device requires a separate 24V power source other than the DeviceNet power source, you should use an additional 24V power source. Choosing a Power Supply
The total of all of the following factors must not exceed 3.25% of the nominal 24V needed for a DeviceNet system.
initial power supply setting 1.00%
line regulation 0.30%
temperature drift (total) 0.60%
time drift 1.05%
load regulation 0.30%
Page 10 DeviceNet interface 9.17.026 BRONKHORST® 3 FUNCTIONAL DESCRIPTION 3.1 GENERAL The Bronkhorst digital instruments will behave as slaves on the DeviceNet bus. This means all communication (instructions / readout) will be performed by a master on the same DeviceNet field bus. Mostly this will be any PLC or PC‐card controlling a process. The Bronkhorst DeviceNet MFC is a Group 2 Only Server device which messages comply with the CAN 2.0A standard and with the DeviceNet protocol. The DeviceNet MFC supports two types of connection: Explicit and Polled I/O. As defined by the DeviceNet protocol. 3.2 OBJECTS AND SERVICES Bronkhorst MFC’s consist of several objects with attributes and services for interfacing to DeviceNet. These objects are described below. The DeviceNet Mass Flow Controller will be in "Idle" state after powered on or reset. In this state, the device will not allow the Master to use the Setpoint Attribute to control gas flow. Instead, gas flow will be controlled by the value previously set in the Analog Actuator Object’s Safe‐State Attribute and Safe‐Value Attribute. For instance, if the Safe‐
State Attribute had a value 0x03 which is the code for “Use Safe Value” then the device will set the actuator (valve) according to the value previously stored in the Analog Actuator Object’s Safe‐Value Attribute. To be able to control the flow, the Master device must send a “Start” request to the supervisor object of the Mass Flow Controller. The “Start” request brings the device from “Idle” state to “Executing” state. In this state, the device will be executing new setpoints received from the Master and then control the flow accordingly. Another way to bring the device in the "Executing" state is by sending I/O data (Polled I/O). 3.3 EXPLICIT MESSAGING Using explicit messaging, following tables are needed with the descriptions of DeviceNet objects for Digital Mass Flow / Pressure Controllers / Meters. These messages have an a‐cyclic character. For cyclic messages, see Polled I/O in the next paragraph. The FLOW‐BUS column shows how DeviceNet attributes are mapped on the internal FLOW‐BUS variables of the instrument. This information can be useful for who is familiar with FLOW‐BUS. 3.3.1
Identity Object Class Code: 01 HEX This object provides identification of and general information about the device. The Identity Object is present in all CIP products. IDENTITY OBJECT’S INSTANCE ATTRIBUTES (Instance = 1)
IDENTITY OBJECT 0x01 0x01 0x01 0x01 0x01 0x01 0x01 ATTRI‐
BUTE 0x01 0x02 0x03 0x04 0x05 0x06 0x07 SERVICE CODE 0x0E 0x0E 0x0E
0x0E 0x0E
0x0E 0x0E
ATTRIBUTE NAME Vendor Id Device Type Product Code Revision Status
Serial Number Product Name DATA TYPE UINT UINT UINT
STRUCT WORD
UDINT SHORT‐STRING
FLOW‐
BUS 113,12
Comment 706 0x001A IdentNr V major. minor always 0x0001 calculate from 113,3 “Bronkhorst meter/controller”
Page 11 DeviceNet interface 9.17.026 BRONKHORST® IDENTITY OBJECT SERVICES
IDENTITY OBJECT 0x01 0x01 0x01 3.3.2
SERVICE SERVICE NAME CODE 0x05 Reset 0x0E Get_Attribute_Single 0x10 Set_Attribute_Single SERVICE DESCRIPTION Reset device, parameters: 0 = reset, 1 = load default values + reset Returns the contents of the specified attribute
Modifies an attribute value DeviceNet Object Class Code: 03 HEX The DeviceNet Object provides the configuration and status of a DeviceNet port. Each DeviceNet product must support (and anly one) DeviceNet object per physical connection to the DeviceNet communication link. DEVICENET OBJECT’S INSTANCE ATTRIBUTES (Instance = 1)
DEVICENET OBJECT 0x03 0x03 0x03 0x03 0x03 ATTRI‐
BUTE 0x01 0x02 0x03 0x04 0x05 DEVICENET OBJECT 0x03 0x03 0x03 0x03 SERVICE CODE 0x0E 0x10 0x4B 0x4C SERVICE
CODE 0x0E, 0x10 0x0E, 0x10
0x0E, 0x10 0x0E, 0x10
0x0E ATTRIBUTE NAME MAC ID BAUD Rate Bus Off Interrupt Bus Off Counter Allocation Information FLOW‐
BUS 125,10 126,9 DATA TYPE USINT USINT
BOOL USINT
STRUCT Comment 0‐63 0‐2 0,1 0‐255 Alloc choice, Masters MAC ID DEVICENET OBJECT SERVICES
3.3.3
SERVICE NAME SERVICE DESCRIPTION Get_Attribute_Single
Set_Attribute_Single Allocate M/S connection set Release M/S connection set Returns the contents of the specified attribute Modifies an attribute value Requests the use of the Predefined Master/Slave connection set Release Master/Slave connection set Connection Objects Class Code: 05 HEX Use the Connection Object to manage the characteristics of a communication connection. CONNECTION OBJECT’S INSTANCE ATTRIBUTES (Instance = 1)
CONNECTION OBJECT 0x05 0x05 0x05 0x05 0x05 0x05 0x05 0x05 0x05 0x05 0x05 0x05 0x05 0x05 0x05 ATTRI‐ BUTE 0x01 0x02 0x03 0x04 0x05 0x06 0x07 0x08 0x09 0x0C 0x0D 0x0E 0x0F 0x10 0x11 ATTRIBUTE NAME State Instance Type Transport Class Trigger Produced Connection ID Consumed Connection ID
Initial Comm. Characteristics Production Connection Size
Consumption Connection Size Expected Packet Rate
Watchdog Time out Action Produced Connection Path Length Produced Connection Path
Consumed Connection Path Length Consumed Connection Path
Production Inhibit Time SERVICE
CODE 0x0E 0x0E
0x0E 0x0E 0x0E
0x0E 0x0E
0x0E 0x0E,0x10
0x0E,0x10 0x0E 0x0E,0x10
0x0E 0x0E,0x10
0x0E,0x10 FLOW‐
BUS DATA TYPE USINT USINT
BYTE UINT UINT
BYTE UINT
UINT UINT
USINT UINT EPATH
UINT EPATH
UINT Comment CONNECTION OBJECT SERVICES
CONNECTION OBJECT 0x05 0x05 0x05 0x05 Page 12 SERVICE CODE 0x05 0x09 0x0E 0x10 SERVICE NAME SERVICE DESCRIPTION Reset Delete Get_Attribute_Single Set_Attribute_Single
Used to reset all resetable Connection Objects
Used to delete all Connection Objects and to release all associated resources Returns the contents of the specified attribute Modifies an attribute value
DeviceNet interface 9.17.026 BRONKHORST® 3.3.4
Supervisor Objects Class Code 30 HEX This object models the interface, functions and behaviour associated with the management of application objects for devices within the “Hierarchy of Semiconductor Equipment Devices” SUPERVISOR OBJECT’S INSTANCE ATTRIBUTES (Instance = 1)
DEVICE ATTRI‐
SUPERVISOR ATTRIBUTE NAME BUTE OBJECT 0x30 0x01 Number of Attributes 0x30 0x02 Attribute List 0x30 0x03 Manufacturer’s Device Type
0x30 0x04 SEMI Standard Revision 0x30 0x05 Manufacturer’s Name 0x30 0x06 Manufacturer’s Model # 0x30 0x07 Digital MFC Software Revision Level 0x30 0x08 DeviceNet Hardware Revision Level 0x30 0x09 Manufacturer’s Serial Number
0x30 0x30 0x30 0x30 0x30 0x30 0x30 0x30 0x30 0x30 0x30 0x30 0x30 0x0A 0x0B 0x0C 0x0D 0x0E 0x0F 0x10 0x13 0x17 0x64 0x65 0x66 0x67 Device Configuration Device Status Exception Status Exception Detail Alarm Exception Detail Warning Alarm Enable Warning Enable Last Maintenance Date Running Hours Init Mode Monitor Default_Inp_IO_Assembly_Inst Default_Outp_IO_Assembly_Inst
SERVICE CODE DATA TYPE FLOW‐BUS Comment 0x0E 0x0E 0x0E
0x0E 0x0E
0x0E 0x0E
USINT 20 Array of USINT SHORT‐STRING 113,1; Char[6] “MFM" or "MFC”
SHORT‐STRING
“E54‐0997” SHORT‐STRING
“Bronkhorst High‐Tech”
SHORT‐STRING 113,2; Char[14] SHORT‐STRING 113,5; Char[5] “V6.XX” 0x0E SHORT‐STRING
0x0E
SHORT‐STRING 113,3; Char[20] Unique serial nr. for BHT instruments SHORT STRING 113,4; Char[16] Manufacturer configuration
USINT
BYTE STRUCT
STRUCT BOOL
0‐1 BOOL 0‐1 DATE 113,11; Char[8] Service date UDINT
118,2
0‐65535 USINT 0,10 0,64,73,82 USINT
115,2
0: measure=setpoint
USINT USINT
0x0E 0x0E
0x0E 0x0E
0x0E 0x0E, 0x10
0x0E, 0x10
0x0E 0x0E
0x0E, 0x10
0x0E, 0x10
0x0E, 0x10
0x0E, 0x10
113,7; Char[1] “C” Device status Attribute value State 0 1 2 3 4 5 6 7‐50 51‐99 100‐255 Undefined
Self testing
Idle
Self test Exception
Executing
Abort
Critical fault
Reserved by CIP
Device specific
Vendor specific
Bit Exception Status Exception status bit map, Bit 7 set to 0
Function 0 1 2 3 4 5 6 7 Device specific definition 0=basic method
State Alarm/device‐common
Alarm/device‐specific
Alarm/manufacturer‐specific reserved – set to 0
Warning/device‐common Warning/device‐specific Warning/manufacturer‐specific 1= Expanded Method
Page 13 DeviceNet interface 9.17.026 BRONKHORST® SUPERVISOR OBJECT SERVICES
SUPERVISOR OBJECT 0x30 0x30 0x30 0x30 0x30 0x30 0x30 0x30 SERVICE CODE 0x05 0x06 0x07 0x0E 0x10 0x4B 0x4C 0x4E SERVICE NAME SERVICE DESCRIPTION Reset Start Stop Get_Attribute_Single Set_Attribute_Single Abort Recover Perform_Diagnostics Resets the device to the Self‐Testing state Starts the device execution by moving the device to the Executing state
Moves the device to the Idle state Returns the contents of the specified attribute Modifies an attribute value
Moves the device to the Abort state Moves the device out of the Abort state
Causes the device to perform a set of diagnostic routines 3.3.5
S‐Analog Sensor Object Class Code 31 HEX The S‐Analog Sensor Objects models the acquisition of a reading from a physical sensor in a device. ANALOG SENSOR OBJECT’S INSTANCE ATTRIBUTES (Instance = 1) ANALOG SENSOR OBJECT 0x31 0x31 0x31 0x31 0x31 0x31 ATTRI‐
BUTE 0x01 0x02 0x03 0x04 0x05 0x06 SERVICE
DATA TYPE CODE Number of Attributes 0x0E USINT Attribute List 0x0E
Array of USINT
Data Type 0x0E, 0x10 USINT Data Unit 0x0E, 0x10
UINT
Reading Valid 0x0E BOOL Sensor Value 0x0E
INT or REAL1
ATTRIBUTE NAME 0x31 0x07 Status 0x31 0x31 0x31 0x31 0x31 0x31 0x31 0x08 0x0A 0x11 0x12 0x14 0x1C 0x23 0x31 0x31 0x31 0x31 0x31 0x31 0x69 0x6A 0x6B 0x6C 0x6D 0x6E 0x31 0x6F 0x31 0x31 0x31 Page 14 FLOW‐BUS Comment 12 0xC3=INT, 0xCA=REAL 0x1001=counts, 0x1400=sccm, etc
0 = invalid, 1 = valid see attribute 3 and 4 For data unit counts the value attribute will be in the range of 0..32767 where: 0 = no flow/pressure 32000 = max flow /pressure (100.0%) 32767 = max flow /pressure (102.4%) Note: 32767 is max. flow for data type INT. Max. flow REAL = 41943.04 (131.07%) 1=High Alarm Exception, 2=Low Alarm Exception 32000
see attribute 3 and 4 see attribute 3 and 4 0‐65000, alarm delay (msec) 1 = busy, 0 = ready 1‐8
1 = fluid 1 selected Actual fluid Temperature (mini Cori) Actual fluid Density (mini Cori)
Actual counter value Index of counter unit table
Counter lImit 0 = No setpoint change 1 = Setpoint change on limit reached Setpoint when counter limit reached 0..32000 where 0 = 0% and 32000 = 100% Counter unit string 0 = Counter Off 1 = Counter On 2 = Counter On, Up to limit Counter reset mode (see manual) 1,0
0x0E
BYTE
0x0E, 0x10 0x0E
0x0E, 0x10 0x0E, 0x10
0x0E, 0x10 0x0E 0x0E, 0x10
BOOL INT
INT INT
UINT UINT UINT
0x0E 0x0E
0x0E, 0x10 0x0E, 0x10
0x0E, 0x10 0x0E, 0x10 REAL REAL
REAL USINT
REAL USINT 33,7 116.15
104, 1 104, 2
104, 3 104, 5 0x0E, 0x10 UINT 104, 6 0x70 Counter Unit 0x71 Counter Mode 0x0E
0x0E, 0x10 STRING
USINT 104, 7
104, 8 0x72 Counter Reset Mode 0x0E, 0x10 USINT 104, 9 Alarm Enable Full Scale Alarm Trip Point High Alarm Trip Point Low Alarm Settling Time Autozero status Gas Calibration Object Instance Temperature Density Counter Value Counter Unit Index Counter Limit Counter Setpoint mode Counter Setpoint DeviceNet interface 97,1 97,2
97,7 9.17.026 BRONKHORST® 0x31 0x73 Counter Convergence 0x0E, 0x10 factor 0x74 Counter Controller 0x0E, 0x10 Gain 0x75 Reset 0x10
0x31 0x31 REAL 104, 10 REAL 104, 11 USINT
115, 8
0.0 …. 1.0 (mini CORI‐FLOW only) (mini CORI‐FLOW only) 0 = No Action 1 = Reset counter 3 = Reset counter 4 = Reset and stop counter 1
Depends on the value assigned to the Data Type attribute. If the value of this attribute is 0xC3, the selected data type is Integer. If the value of this attribute is 0xCA, the selected data type will be the IEEE‐754 single‐precision floating‐point. No indication is available if counter limit is reached.
A workaround could be: read counter limit and counter value all the time by the master application. If counter value >= counter limit, the batch has been reached. ANALOG SENSOR OBJECT SERVICES
ANALOG SENSOR OBJECT 0x31 0x31 0x31 SERVICE CODE 0x0E 0x10 0x4B SERVICE NAME Get_Attribute_Single
Set_Attribute_Single Zero Adjust SERVICE DESCRIPTION Returns the contents of the specified attribute
Modifies an attribute value Start Autozero 3.3.6
S‐Analog Actuator Object Class Code 32 HEX The S‐Analog Actuator Object models the interface to a physical actuator in a device. ANALOG ACTUATOR OBJECT’S INSTANCE ATTRIBUTES (Instance = 1) ANALOG ACTUATOR OBJECT 0x32 0x32 0x32 0x32 0x32 0x32 ATTRI‐
ATTRIBUTE NAME BUTE 0x32 0x32 0x32 SERVICE CODE DATA TYPE 0x01 0x02 0x03 0x04 0x05 0x06 Number of Attributes Attribute List Data Type Data Units Override Actuator Value (valve) 0x0E
0x0E 0x0E, 0x10
0x0E, 0x10 0x0E, 0x10
0x0E, 0x10 USINT
Array of USINT USINT
UINT USINT
1
INT or REAL 0x07 0x15 0x16 Status Safe State Safe Value 0x0E 0x0E, 0x10
0x0E, 0x10 BYTE USINT
INT FLOW‐
Comment BUS 7
0xC3=INT, 0xCA=REAL 0x1001 = counts, 0x1007 = % 114,1 See attribute 3 and 4 For data unit counts the value attribute will be in the range of 0..32767. Where: 0 = valve closed 32767 = valve fully open always 0 114,6 1
Depends on the value assigned to the Data Type attribute. If the value of this attribute is 0xC3, the selected data type is Integer, and if the value of this attribute is 0xCA, the selected data type will be the IEEE‐754 single‐precision floating‐point. ANALOG ACTUATOR OBJECT SERVICES
ANALOG ACTUATOR OBJECT SERVICE CODE SERVICE NAME 0x32 0x0E Get_Attribute_Single 0x32 0x10 Set_Attribute_Single SERVICE DESCRIPTION Returns the contents of the specified attribute Modifies an attribute value Page 15 DeviceNet interface 9.17.026 BRONKHORST® 3.3.7
S‐Single Stage Controller Object Class Code 33 HEX The S‐Single Stage Controller Object models a closed‐loop control system within a device. CONTROLLER OBJECT’S INSTANCE ATTRIBUTES (Instance = 1)
SINGLE STAGE CONTROLLER OBJECT 0x33 ATTRI‐
BUTE 0x01 ATTRIBUTE NAME 0x33 0x33 0x33 0x33 0x33 0x02 0x03 0x04 0x05 0x06 Number of Attributes Attribute List Data Type Data Units Control Mode Setpoint 0x33 0x33 0x0A 0x13 Status Ramp Rate SERVICE CODE DATA TYPE FLOW‐
Comment BUS 0x0E USINT 6 0x0E
0x0E, 0x10 0x0E, 0x10 0x0E, 0x10
0x0E, 0x10 Array of USINT
USINT UINT USINT
1
INT or REAL 0xC3=INT, 0xCA=REAL 0x1001=counts, 0x1400=sccm, etc 1,1 0x0E 0x0E, 0x10
BYTE UDINT
1,2
See attribute 3 and 4. For data unit counts the setpoint attribute must be in the range of 0..32000. Where: 0 = min. setpoint (0%) 32000 = max. setpoint (100%) Setpoint slope in msec (max. 3000000 msec) 1
Depends on the value assigned to the Data Type attribute. If the value of this attribute is 0xC3, the selected data type is Integer, and if the value of this attribute is 0xCA, the selected data type will be the IEEE‐754 single‐precision floating‐point. Page 16 DeviceNet interface 9.17.026 BRONKHORST® CONTROLLER OBJECT SERVICES
SINGLE STAGE CONTROLLER OBJECT 0x33 0x33 SERVICE SERVICE NAME CODE 0x0E 0x10 SERVICE DESCRIPTION Get_Attribute_Single Set_Attribute_Single
Returns the contents of the specified attribute Modifies an attribute value
3.3.8
S‐Gas Calibration Object Class Code 34 HEX An S‐Gas Calibration Object affects the behaviour of an associated S‐Analog Sensor object instance. GAS CALIBRATION OBJECT’S CLASS ATTRIBUTES (Instance = 0)
GAS ATTRI‐
CALIBRATION BUTE OBJECT 0x34 0x02 ATTRIBUTE NAME SERVICE CODE 1
Max Instance 0x0E FLOW‐
BUS DATA TYPE UINT Comment 8 1
This is the total number of process gases currently calibrated for the device. GAS CALIBRATION OBJECT’S INSTANCE ATTRIBUTES (Instance = 1...8) GAS CALIBRATION OBJECT 0x34 0x34 0x34 0x34 0x34 0x34 ATTRI‐
BUTE 0x34 ATTRIBUTE NAME SERVICE CODE DATA TYPE FLOW‐BUS 0x01 0x02 0x03 0x04 0x05 0x06 Number of attributes Attribute List Gas Standard number Valid Sensor instance Gas Symbol Full Scale 0x0E 0x0E
0x0E 0x0E
0x0E 0x0E
USINT Array of USINT
UINT UINT
SHORT STRING STRUCT
0x08 Calibration Date 0x0E DATE 1,17; Char[10] 113,9; Char[8] Comment 6 see list from SEMI 1 fluidname Full scale capacity (REAL),
capacity unit (UINT) 1
The gas calibration is formed by a 3rd grade polynomial (y=a+bx+cx²+dx³). This polynomial will perform linearization to achieve the wanted accuracy. Up to 8 polynomials can be stored for different fluids. Each fluid has its own instance (1...8). GAS CALIBRATION OBJECT SERVICES
GAS CALIBRATION OBJECT 0x34 0x34 SERVICE CODE 0x0E 0x10 SERVICE NAME SERVICE DESCRIPTION Get_Attribute_Single Set_Attribute_Single
Returns the contents of the specified attribute Modifies an attribute value
Page 17 DeviceNet interface 9.17.026 BRONKHORST® 3.3.9
Elementary data Types This section describes the data type specification syntaxes, data type value ranges and operations that can be performed on the defined data types. Table 2‐18: SUBSET OF ELEMENTARY DATA TYPES
Keyword BOOL SINT INT USINT UINT UDINT REAL DATE BYTE WORD STRING SHORT_STRING Description Boolean Short Integer Integer Unsigned Short Integer Unsigned Integer Unsigned Double Integer Floating Point Date only Bit string – 8 bits Bit string – 16 bits Character string (1 byte per character) Character string (1 byte per character, 1 byte length indicator) Minimum range 0
‐128 ‐32768
0 0 0 IEEE 754 single floating point D#1972‐01‐01 Maximum range 1
127 32767 255 65535 2^32‐1 D#2151‐06‐06 (65536 days)
See IEC1131‐3 See IEC1131‐3 Page 18 DeviceNet interface 9.17.026 BRONKHORST® 3.4 POLLED I/O 3.4.1
Representation All of the above attributes in the tables from Table 2‐1 to Table 2‐16 can be accessed using Explicit Messaging. Upon existence of an explicit connection, a Polled I/O connection can also be established and coexist. Once the Polled I/O connection has been established, the device will be able to accept and process the Polled I/O requests. For example, if Instance #7 has been selected as Output IO Assembly Instance, two data bytes representing the new setpoint shall be appended to the Polled I/O request for setting a setpoint. If the Data Unit attribute were 0x1001 as the code for “Counts”, the value of the setpoint bytes will be an signed integer where 0x7D00 (*) represents 100% flow and 0x0000 represents 0% flow. Upon reception of the Polled I/O Request, if Instance #2 has been selected as Input IO Assembly Instance the DeviceNet MFC will respond with a Polled I/O Response carrying with it three data bytes as described below: Polled I/O Response’s Data Field using Counts as Data Unit
Byte0: Exception Status BYTE Byte1: Byte2: Indicated Flow (LSB) Indicated Flow (MSB) INT (0x7D00 = 100%)
Polled I/O Request’s Data Field using Counts as Data Unit
Byte0: New Setpoint (LSB) Byte1: New Setpoint (MSB) INT (0x7D00 = 100%) Note that if “Counts” has been selected for the Data Unit attribute of the Analog Sensor and Controller object (i.e., the value of these attributes is 0x1001), then the Indicated‐Flow bytes in the Polled I/O Response represent the same information as that of the New‐Setpoint bytes in the Polled I/O Request (i.e., 0x0000 represents 0% flow and 0x7D00 (*) represents 100% flow). However, if the “Data Unit” attribute of the Sensor and the Setpoint object are 0x1400, the value of the indicated flow and setpoint will be in Standard Cubic Centimeter (SCCM). Note that the setpoint and the indicated flow can be set with different data unit (i.e., Counts for Setpoint and SCCM for Indicated‐flow or vice versa). Since the Indicated‐flow and Setpoint attribute are integer, if used in SCCM mode the value of these attribute can not exceed 32767 SCCM. Therefore the SCCM mode shall not be used for MFCs having gases with the full‐scale exceeding 32767 SCCM or having the Full‐scale loaded with SLM data unit. Polled I/O Response’s Data Field using SCCM as Data Unit
Byte0: Exception Status BYTE Byte1: Byte2: Indicated Flow (LSB) Indicated Flow (MSB) INT (0 to Full Scale) Polled I/O Request’s Data Field using SCCM as Data Unit
Byte0: New Setpoint (LSB) INT (0 to Full Scale) Byte1: New Setpoint (MSB) The tables above show some examples of the Polled I/O setting. There are eight (8) IO Assembly Instances that the user can choose from; 4 for input and 4 for output. These instances are specified in the MFC Device Profile document. See next paragraph for more details. (*) 100% Measured Value indication for Bronkhorst instruments is 0x7D00 (signed integer). Maximum value for Measured Value is 102.4 %, which is: 0x7FFF. Other suppliers may use different ranges for Measured Value. Via Full Scale: attribute 0x0A of object 0x31, analog sensor, it is possible to readout the signed integer value used for 100%. Page 19 DeviceNet interface 9.17.026 BRONKHORST® Furthermore, with the use of the Data‐type attribute(0x03) and Data‐unit attribute(0x04) of the Sensor object 0x31 and the Controller object 0x33 the user can select one of the following settings for both Explicit and Polled I/O messages (see paragraph 3.2.2 for a complete list of supported data‐units, the settings below are just a few examples): Example 1 (ClassId: 0x31, Data‐type: 0xC3, Data‐unit: 0x01 0x10): Example 2 (ClassId: 0x31, Data‐type: 0xC3, Data‐unit: 0x00 0x14): Example 3 (ClassId: 0x31, Data‐type: 0xCA, Data‐unit: 0x01 0x10): Example 4 (ClassId: 0x31, Data‐type: 0xCA, Data‐unit: 0x00 0x14): Example 5 (ClassId: 0x33, Data‐type: 0xC3, Data‐unit: 0x01 0x10): Example 6 (ClassId: 0x33, Data‐type: 0xC3, Data‐unit: 0x00 0x14): Example 7 (ClassId: 0x33, Data‐type: 0xCA, Data‐unit: 0x01 0x10): Example 8 (ClassId: 0x33, Data‐type: 0xCA, Data‐unit: 0x00 0x14): Signed Integer Count Indicated‐flow. Signed Integer SCCM Indicated‐flow. Single‐precision floating‐point Count Indicated‐flow. Single‐precision floating‐point SCCM Indicated‐flow. Signed Integer Count Setpoint. Signed Integer SCCM Setpoint. Single‐precision floating‐point Count Setpoint. Single‐precision floating‐point SCCM Setpoint. For Polled I/O messages only Data‐type can be selected. The Data‐unit attribute will be automatically set when Polled I/O is started (on receipt of the first Polled I/O Request’s Data). The Data‐unit setting will be determined by the selected IO Assembly Instance (see paragraph 2.5.1, Available data combinations for Polled I/O). Object 30 31 31 30 Object 30 33 33 30 Page 20 The Data‐type and Data‐unit Attribute can only be set when the MFC is in the Idle state. If the MFC is not in this state (i.e., Executing state) the user must use the Stop service (0x07) of Instance (0x01) of the Supervisor object (0x30) to allow the MFC to enter the Idle state for making the change. When the attribute has been set the user can use the Start service (0x06) of the same object and instance to resume the Executing state. Example 1: How to program instrument with option 1 from above Instance Service code Attribute
Value
Description
1 0x07 stop: instrument to idle state; green LED long flash: 2 sec on, 0.1 sec off 1 0x10 0x03
0xC3
Data type = INT
1 0x10 0x04
0x01 0x10 Data unit = COUNT
1 0x06 start: instrument to executing state green LED on continuously Example 2: How to program instrument with option 8 from above Instance Service code Attribute
Value
Description
1 0x07 stop: instrument to idle state; green LED short flash: 2 sec on, 0.1 sec off 1 0x10 0x03
0xCA
Data type = REAL
1 0x10 0x04
0x00 0x14
Data unit = SCCM
1 0x06 start: instrument to executing state green LED on continuously DeviceNet interface 9.17.026 BRONKHORST® 3.5 DEVICE CONFIGURATION 3.5.1
Available data combinations for Polled I/O Using the EDS‐file in the DeviceNet configuration program of the master, following I/O combinations are available (IO Assembly Instances): Inputs: 1. ExceptionStatus + Flow data‐type: integer (0xC3) 2. ExceptionsStatus + Flow + Setp + Override + Valve signal data‐type: integer (0xC3) (0xCA) 3. ExceptionStatus + Flow data‐type: float 4. ExceptionsStatus + Flow + Setpoint + Override + Valve data‐type: float (0xCA) Outputs: 1. Setpoint data‐type: integer (0xC3) 2. Override + Setpoint data‐type: integer (0xC3) 3. Setpoint data‐type: float (0xCA) 4. Override + Setpoint data‐type: float (0xCA) 3.5.2
Available parameter data Using the EDS‐file in the configuration program of the master, following parameters are available for customising: 1. Polled I/O (input) : select IO Assembly Instance for input (data combination polled I/O) 2. Polled I/O (output) : select IO Assembly Instance for output (data comb. polled I/O) : sets controller to idle, valve off, purge or normal setpoint 3. Control mode 4. Setpoint ramp rate (msec) : sets ramp rate of setpoint from 0…3000000 msec 5. Fluid number : selects wanted calibration/fluid nr.: 1…8 6. Alarm : switches alarms on or off 7. Alarm delay (msec) : sets alarm delay time in range 0…65000 msec Page 21 Parameter "Polled I/O (input)" and "Polled I/O (output)" must always be set to the correct value. This will select the data combination for Polled I/O (IO Assembly Instance). If it is not possible to start communication with the device always check these two settings! DeviceNet interface 9.17.026 BRONKHORST® 4 OBJECT DESCRIPTION 4.1 SUPERVISOR OBJECT 4.1.1
FLOW‐BUS interfacing (via RS232) To enable controlling the device by RS232, a new control mode has been added: CTRL_RS232 (18). This control mode is equal to CTRL_FB (0), but in this case the device will always make the transition to the EXECUTING state (no start request or receipt of I/O data needed). So CTRL_RS232 makes it possible to give setpoints without the need of a DeviceNet connection. The device will only be compliant with the ODVA profile when control mode is CTRL_FB (0). In case of taking over control via RS232, it is possible to send value 18 to parameter “Control Mode” (FLOW‐BUS: proc1, par4 or FLOWDDE: parameter 12). From this moment on, it will be possible to give setpoints without being overruled by the safe state. This control mode will be valid until the next power‐up situation. Control mode = 18 will not be stored into non‐volatile memory. At each power‐up, the instrument will be normally set to control mode = 0. The safe state is active when the device is not in the EXECUTING state.
The functionality of the RS232 FLOW‐BUS “Control Mode” parameter is not the same as the Control Mode attribute in the Single State Controller Object (attribute 0x05, object 0x33). 4.1.2
I/O assembly instances selection Attribute 0x66 and 0x67 can be used to select the I/O assembly instances used for the Polled I/O connection (see also Polled I/O input/output parameters in EDS file). Devicenet
Input I/O assembly
obj 0x30, attr 102
instance
0 2
1 6
2 14
3 18
Devicenet
Output I/O assembly
obj 0x30, attr 103
instance
0 7
1 8
2 19
3 20
Page 22 DeviceNet interface 9.17.026 BRONKHORST® 4.1.3
Exception Status Exception status is a single byte which indicates the status of alarms and warnings. When 128 is read everything is o.k. This means that the expanded method is used for the exception status. Bit Meaning
0 alarm device common
1 alarm device specific
2 alarm manufacturer specific
3 reserved
4 warning device common
5 warning device specific
6 warning manufacturer specific
7 1 = expanded method
For more details, see the DeviceNet specification. 4.2 SINGLE STAGE CONTROLLER 4.2.1
Control mode The Control Mode is implemented as follows: Control Mode
Setpoint Value
0 (Normal)
set by attribute 6 (setpoint)
1 (Close)
0
2 (Open)
max. value
3 (Hold)
last used value
4 (Safe state)
(not supported)
When Override attribute of Analog actuator (object 0x32, attribute 0x05) is set to a value other than 0, this attribute will override the Control Mode attribute. Page 23 DeviceNet interface 9.17.026 BRONKHORST® 4.2.2
Setpoint For the objects Analog Sensor and Single Stage Controller, the following data types and data units are supported for Value and alarm levels. Note that data type and data unit can only be changed when not in executing mode. The followings data units are supported (dependent on sensor type, actual sensor type can be found in calibration sheet): Sensortype Supported units
0 (pressure) 0x1001 (counts) 0x1007 (percentage) [not for Sensor value] 0x1300 (psi) 0x1301 (Torr) 0x1303 (mm Hg) 0x1305 (cm H2O) 0x1307 (bar) 0x1308 (mbar) 0x1309 (Pa) 0x130A (kPa) 0x130B (atm) 2
0x130C (gf/cm ) 0x0800 (cm Hg) 0x0801(kgf/cm2) 0x1001 (counts) 0x1007 (percentage) [not for Sensor value] 0x0900 (l/min) 0x0901 (ml/h) 0x0902 (ml/min) 0x0903 (l/h) 0x0904 (mm3/s) 3
0x0905 (cm /min) 0x1001 (counts)
0x1007 (percentage) [not for Sensor value] 0x1404 (kg/s) 0x140E (mg/min) 0x140F (g/min) 0x1410 (kg/h) 0x0A00 (kg/min) 0x0A01 (g/h) 0x0A02 (g/s) 0x0A03 (mg/h) 0x0A04 (mg/s) 0x1001 (counts)
0x1007 (percentage) [not for Sensor value] 0x1400 (sccm) 0x1401 (slm) 0x0B00 (ln/min) 0x0B01 (mln/h) 0x0B02 (mln/min) 0x0B03 (ln/h) 3
0x0B04 (m n/h) 0x0B05 (mls/min) 0x0B06 (mls/h) 0x0B07 (ls/h) 0x0B08 (m3s/h) 0x0B09 (ls/min) 0x1001 (counts) 0x1007 (percentage) [not for Sensor value] 0x1001 (counts)
0x1007 (percentage) [not for Sensor value] 0x1200 (deg. C) 0x1201 (deg. F) 0x1202 (K) 1 (liq. Volume) 2 (mass flow) 3 (gas volume) 4 (other) 5 (temperature) The following data types are supported: 0xC3 (int) Page 24 DeviceNet interface 0xCA (real) 9.17.026 BRONKHORST® 4.3 ANALOG SENSOR OBJECT 4.3.1
Sensor value See Setpoint attribute of Single stage controller above. 4.3.2
Alarm enable Attribute Alarm enable of Analog Sensor object is linked to propar 97;3 (Alarmmode). FLOW‐BUS
Devicenet
Alarmmode proc 97; par 3
ALRM_OFF (ALRM_RESPONSE) (ALRM_POWERFAILURE) ALRM_MINMAX Alarm enable obj 0x31, attr 8
0 (off) 1 (on) When 0 is written to Alarm enable attribute, the internal alarm mode is always set to ALRM_OFF. The modes ALRM_RESPONSE and ALRM_POWERFAILURE can be set by RS232, not by DeviceNet. 4.3.3
More information can be found in the manual “917023 Operational instructions digital instruments”
This document can be found at: http://www.bronkhorst.com/en/downloads/instruction_manuals/ Alarm Trip Points Alarm_Trip_Point_Low attribute is linked to propar 97/2 (Min. limit). Valid range is [0, 32000]. Alarm_Trip_Point_High attribute is linked to propar 97/1 (Max. limit). Valid range is [0, 32000]. A value outside the valid range is rounded to the nearest value within the range. Note that the Trip Point values are dependent on the selected data types/units. For the maximum value the following mapping is used: FLOW‐BUS
DeviceNet
Max limit proc 97; par 1
0 (off) 1 32000
Alarm Trip Point High obj 0x31, attr 17
32000 0 31999
4.3.4
Gas calibration object instance Indicates which Gas Calibration object instance is active for this object. The value of this attribute is equal to (fluidnumer+1). Value 0 (disabled) is not supported. 4.4 ANALOG ACTUATOR OBJECT INSTANCE 4.4.1
Actuator value The followings data units are supported: 0x1001 (counts): 0 = valve closed, 32767 = valve fully open 0x1007 (percent): 0 = valve closed, 100 = valve fully open The following data types are supported: 0xC3 (int) Page 25 0xCA (real) DeviceNet interface 9.17.026 BRONKHORST® 4.4.2
Override The Override attribute is implemented as follows: Override 0 (Normal) 1 (Close) 2 (Open) 3 (Hold) 4 (Safe state) 4.4.3
Value to Valve
set by attribute 6 (Actuator Value)
0
max. value
last used value
See section 4.4.3.
Safe state In the following table the implemented values of the Valve output are shown. Mapping Safe state: Safe state Value to Valve
0 (zero/off) 0
1 (full scale / on) max. value
2 (hold last value) last used value
3 (use safe value) Safe value (obj 0x32, attr 0x16)
4.5 GAS CALIBRATION OBJECT INSTANCE 4.5.1
Gas standard number The retrieval of the gas standard number is implemented as follows: the first 2 characters of the fluid name are interpreted as a decimal number. This number is returned as the gas standard number. 4.5.2
Gas Symbol The fluid name is returned as the Gas Symbol. 4.6 NETWORK ERROR DETECTION When a network error is detected while the device is in Executing state, it is set back to the Idle or Critical Fault state. In those states the valve is set to the Safe state (see attribute Safe State in Analog Actuator object). When the device detects that no bus power is available, the network is closed and no communication is started until the bus power is detected again. Such errors are shown by the LED’s on the instrument. See the chapter “Troubleshooting” Page 26 DeviceNet interface 9.17.026 BRONKHORST® 4.7 BUS DIAGNOSTICS A propar (FLOW‐BUS) variable (process 125, parameter 20) can be used to retrieve a string with bus diagnostics. This zero terminated string contains 13 bytes of data and is described below. Layout bus diagnostics string for DeviceNet: Byte Description Diagnostic values
Explanation Length
field 0 ces_state 1 2 ces_event nas_state 3 nas_event 4 sos_state 5 sos_event 6 diag_bits 8 AnSens Data Type (attr:0x31/1/3) AnAct Data Type (attr:0x32/1/3) Contrl Data Type (attr: 0x33/1/3) Default Inp IO (attr: 0x30/1/102) Default Outp IO (attr: 0x30/1/103) 9 10 11 12 0 1 2 0 0 1 2 3 4 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 6 7 8 9 10 11 12 bit 0 bit 1 bit 2 bit 3 bit 4 bit 5 bit 6 bit 7 bit 8 bit 9 bit 10 bit 11 bit 12 bit 13 bit 14 bit 15 error active error passive
bus off no events (always 0)
on line waiting for dup MAC ID check message
sending dup MAC ID check message
non existent communication fault
duplicate MAC ID check req/resp not received (num_reties = 1)
duplicate MAC ID check req/resp not received (num_reties = 0)
duplicate MAC ID check request received
duplicate MAC ID check response received
powerup/reset
bus off detected executing idle abort self‐testing self‐test exception
critical fault receipt of first valid IO data
IO connection timeout
IO connection deleted
start request
abort request
stop request
reset request
recover request
self test passed
self test failed
perform diagnostics request
power applied
critical fault from any state
ces state, error passive
ces state, bus off
nas state, communication fault
nas event occurred, duplicate MAC ID check request received
nas event occurred, duplicate MAC ID check response received
sos state, critical fault
sos event occurred, IO connection timeout
sos event occurred, IO connection deleted
sos event occurred, self test failed
sos event occurred, critical fault from any state
rx queue overrun
tx queue overrun
can overrun explicit connection timeout
devicenet reset
bus sense error (24V detection)
CAN error state 1
CAN error state event Network access state 1
1
Network access state 1
duplicate MAC ID check req/resp not received (num_reties = 1) 1
Supervisor object state event
1
Diagnostic bits (will be reset automatically) 2
Analog sensor data type 1
Actuator data type 1
Controller data type 1
Current Assembly Instance (Input) Current Assembly Instance (Output) 1
Page 27 DeviceNet interface 9.17.026 1
BRONKHORST® 4.8 SERIAL NUMBER The DeviceNet serial number (attribute 6 of Identity object) must be unique in combination with the Vendor id. In our implementation this number is calculated from the Bronkhorst serial number string (propar process 113, parameter 3). Layout serial number string: "AB2#####NNP" Meaning: AB = year A = 'M' : year 2000‐2099 B = '0' ‐ '99' : year modulo 100 2 = always '2' (indicates that an order has been received) ##### = order number of 4 or 5 digits (0000 to 9999 or 00000 to 99999) NN = optional code of 1 or 2 letters (for example 'A', 'B' or 'AA' etc) 'A' = 0, 'B' = 1, 'Z' = 25, 'AA' = 26, 'AZ' = 51, 'IV' = 255 P = optional sequence number ('0' to '9') NN and P are optional and may be omitted; in that case they are assumed to be 0. Computation of DeviceNet serial number (0x01/1/6, UDINT) The DeviceNet serial number is computed as follows: value range bits (a) (year‐2000) 0 ‐ 19 5 (b) order number 0 ‐ 52427 (c) sequence number 0 ‐ 9 (bc) (order number * 10) + sequence number 0 ‐ 524279 19 (d) code 0 ‐ 255 8 The DeviceNet serial number is computed by bitwise concatenating of (a), (bc) and (d). This will result in a 32 bits value. Note: when the serial number string is not filled in according to the above template, the resulting DeviceNet serial number will not be unique anymore. Page 28 DeviceNet interface 9.17.026 BRONKHORST® 5 EDS‐FILE To assist users in configuring the Polled I/O communication, an Electronics Data Sheet (EDS) file will be provided. Each type DeviceNet instrument should have its own EDS‐file with instrument specifications to tell the master configuration software which facilities/features the instruments/slaves offer to the master. For Bronkhorst meter/controller the file is called: BHT_DMFC.EDS. This file is available on the Multibus documentation/software tool CD. This EDS‐file is a text‐file containing: Identification info:  Model name: “Bronkhorst meter/controller”  Vendor name: “Bronkhorst High‐Tech B.V.”  Vendor ID: 706 Setting info:  IO Characteristics section, contains available polled I/O combinations (IO Assembly Instances)  Parameter section, the configuration software uses this section to generate a dialog box where the user can enter instrument parameters for customising (see paragraph 2.5.2). After starting‐up your master configuration software, this EDS‐file should be load/import/copied. This is needed only once (until a eventual next revision from the file). Page 29 DeviceNet interface 9.17.026 BRONKHORST® 6 ADD SLAVE TO DEVICENET In next paragraphs some example screens will be showed of a master configuration tool to explain how to install a Bronkhorst meter/controller DeviceNet slave. The tool used for this purposes is Sycon V2.6.2. from Hilscher G.m.b.H. For other master configuration software tools the working will be almost the same, because DeviceNet is a standardised field bus system. Read the user manual carefully for correct operation of other programs than Sycon. In your master configuration software select: [Insert][Device]. Select [Bronkhorst meter/controller] and evt. press [Add]. AN EXAMPLE OF THIS PROCEDURE CAN BE FOUND BELOW: Page 30 DeviceNet interface 9.17.026 BRONKHORST® 7 SLAVE CONFIGURATION SETTINGS Bronkhorst DeviceNet instruments offer many available attributes/parameters for operation of the instruments. These attributes/parameters can be selected by means of the master configuration tooling software (after loading the EDS‐
file: BHT_DMFC.EDS). After installing the slave to the DeviceNet system, point to actual slave and select: [Device Configuration]. In the first table all available data types for polled I/O are listed. Select those instrument variables you want to use. The selected connections will be displayed in the second table. An example: Page 31 DeviceNet interface 9.17.026 BRONKHORST® 8 SLAVE PARAMETER SETTINGS If you want to give your instrument specific values for certain parameters at start‐up you can do this by means of parameter settings. In your master configuration tool, in the Device Configuration menu select [Parameter data]. All available parameters will become visible. Selecting/double clicking on the value enables you to add Available Parameters to Customise Parameters. E.g. Parameter fluid number will be default = 1, but when added to Customised Parameter it can be changed into another value. Example: Parameter "Polled I/O (input)" and "Polled I/O (output)" must always be set to the correct value. This will select the data combination for Polled I/O (IO Assembly Instance). This data combination must be the same as the selected data combination in the "Device Configuration" dialog box. Page 32 DeviceNet interface 9.17.026 BRONKHORST® 9 CHANGING MAC ID AND BAUD RATE When you have installed your Bronkhorst meter/controller DeviceNet slave and made right settings for device configuration and parameter data, you can give your instrument the MAC ID you want. Default instruments will be delivered with MAC ID 63. This MAC ID has been agreed by the DeviceNet organisation to be free for installing new devices to the bus. Changing the MAC ID can be performed in different ways: 9.1 VIA ROTARY SWITCHES ON THE SIDE OF THE INSTRUMENT (IF PRESENT). On the side of the instrument are rotary switches placed and a label with the explanation of the switches. Make sure to use a screwdriver which is suited for the switches. The switches have the following function: 9.1.1
DATA RATE With the DATA RATE switch the baud rate of the instrument can be set. Data rate BAUD Rate
1 125kbps (default)
2 250kbps
5 500kbps
P Programmable mode
If the switch is set to P the baud rate is software programmable. During instrument initialisation, the DATA RATE switch is read. If the switch specifies one of the valid data rates, i.e. 125, 250, 500Kbaud, this value is used. If the specified data rate differs from the value stored in the instrument, the new data rate is saved in memory. If the switch specifies the programmable mode, the value stored in the instrument’s memory will be used as the data rate. 9.1.2
NODE ADDRESS (00 – 63 PGM) With the NODE ADDRESS switch the MAC ID can be set. The MSD is the high part of the decimal number and the LSD the low part. For instance address 25 means MSD on 2 and LSD on 5. The default address is 63. During instrument initialisation, the node address switches are read. If the switches specify a valid DeviceNet MAC ID, i.e. a value from 0 to 63 this value is used. If the specified MAC ID differs from the value stored in the instrument, the new MAC ID is saved in memory. If the switches specify an invalid DeviceNet MAC ID, i.e. a value greater than 63, the value stored in the instrument’s memory will be used as the MAC ID. If the address is set by the switch and it is not on the P position the instrument will respond with error status code 0E (Attribute not settable) if by software is tried to change the address. Page 33 DeviceNet interface 9.17.026 BRONKHORST® 9.2 VIA DEVICENET: 9.2.1
MAC ID MAC ID can be changed by writing to attribute 1 of the DeviceNet Object (Object 0x03). The MAC ID must be in the range of 0‐63 and will be stored in non‐volatile memory. 9.2.2
BAUD Rate BAUD Rate can be changed by writing to attribute 2 of the DeviceNet Object (Object 0x03). The BAUD Rate code must be in the range of 0‐2 and will be stored in non‐volatile memory. The following table describes the actual BAUD Rate that corresponds to the BAUD Rate code stored in attribute 2. Value attribute 2
0
1
2
BAUD Rate
125K
250K
500K
The normal way to change MAC ID. Point to the actual slave in your master configuration tool and select [online] [Set Device Attribute]. Give correct new address at Value and press [Set]. This is the common way to Set or Get Attribute values of a device. Look for correct Class, Instance and Attribute in the tables at chapter 2. Example: Re‐address action can be checked using the option ‘Live list’. This gives an overview of all devices connected to a DeviceNet segment. Page 34 DeviceNet interface 9.17.026 BRONKHORST® The menu option ‘Global State field’ can also be used to give an overview of connected devices. 9.3 VIA RS232: FLOWFIX ‘Off‐line’ via the RS232 communication port by means of a special tooling program, called FlowFix. FlowFix is a tool for multi‐bus instruments which can be used for all field busses enabling the user to:  Change station address/MAC‐ID  Read and evt. change baud rate (depends on field bus system)  Make a service log file to be send to Bronkhorst in case of trouble Connect your Bronkhorst meter/controller DeviceNet slave instrument to a free COM‐port using the special cable with on one side a T‐part with male and female sub‐D 9 connectors and on the other side a female sub‐D 9 connector. The single sub‐D 9 connector should be connected to your COM‐port and the female sub‐D 9 of the T‐part to the male sub‐
D 9 of the instrument. Standard cables are approx. 3 meters. Maximum length between PC and instrument allowed is approx. 10 meters. Start‐up FlowFix.exe and select COM‐port. Then the configuration screen will appear. Enter MAC‐ID and Baud rate and press [OK]. Re‐address action can be checked using the option ‘Live list’ or ‘Global State Field’. This gives an overview of all masters and slaves connected to a DeviceNet segment (see example in previous paragraph). Page 35 DeviceNet interface 9.17.026 BRONKHORST® 9.4 VIA RS232: OTHER PROGRAMS It is also possible to read and or change station address or baud rate by means of any program via RS232 using the COM‐port of your PC on 38.4 KBaud. This can be achieved using the FLOW‐BUS protocol. The following table gives the parameters in proc 125 which may be used: Parameter Type R/W Init mode
Description
9 LONG R/W Soft init
Baud rate for field bus interface 10 CHR R/W Soft init
Field bus station address/MAC ID
More detailed information about the RS232 protocol (document 9.17.027) can be found at: http://www.bronkhorst.com/en/downloads/instruction_manuals/ 9.5 VIA MICRO‐SWITCH AND LEDS ON TOP OF INSTRUMENT With the micro‐switch on top of the instrument it is possible to change and readout the settings for MAC‐ID and baud rate. The LED’s will indicate the tens of the address with green flashes and the units with red flashes. For baud rate indication both LED’s will flash. See document 9.17.023 for a detailed description
This document can be found at: http://www.bronkhorst.com/en/downloads/instruction_manuals/ Page 36 DeviceNet interface 9.17.026 BRONKHORST® 10 DOWNLOAD TO MASTER When needed baud rate for the master can be changed at [Settings][Bus parameter]. See example: When slave has been installed and all settings are done the configuration has to be downloaded to the master. Point to actual master and select [online][download]. When this is ready, from that moment on there will be data‐
exchange between master and slave. The green LED on the instrument will stop blinking and will go on continuously when data‐exchange is O.K. Example: Page 37 DeviceNet interface 9.17.026 BRONKHORST® Data‐exchange between master and slaves can be checked with Sycon by selecting [online][start debug mode]. When everything is O.K. the screen looks like this: Note: It is possible that your master configuration software does not support this option. Page 38 When there is something wrong, see ‘device diagnostic’ for details. DeviceNet interface 9.17.026 BRONKHORST® 11 TEST COMMUNICATION Some master configuration tool programs offer facilities to read input I/O and write output I/O data. An example of this: Only the first 32 bytes from your input and output data area will be displayed in this monitor If your program does not support such option, you have to use your master software or other available programs to check communication between master and slave(s). Page 39 DeviceNet interface 9.17.026 BRONKHORST® 12 TROUBLESHOOTING 12.1 LED INDICATIONS LED indications can be very useful in case of problems with the instrument. The green LED is normally used for instrument status indication, like normal operation or special function mode. For DeviceNet it is also possible to show that the instrument is in abort state and idle state. The red LED is normally used to for error/warning indication (how longer the flash, how greater the trouble). 12.1.1 LED indications mode (MBC‐II and MBC3) Led Time Indication 

 Green off Continuous Power‐off or program not running
on Continuous Normal running/operation mode
Short 0.1 sec on Initialization mode Abort state flash 2.0 sec off Secured params can be changed normal 0.2 sec on Special function mode
flash 0.2 sec off Instrument is busy performing any special function. E.g. auto‐zero or self‐test long flash 2.0 sec on idle state 0.1 sec off 

 Red off Continuous No error Short 0.1 sec on Minor communication error
flash 2.0 sec off normal 0.2 sec on No bus power flash 0.2 sec off long flash 2.0 sec on Serious communication error
0.1 sec off manual intervention needed long flash 1.0 sec on For special service purpose only
0.1 sec off on Continuous Critical error message.
A serious error occurred in the instrument. Instrument needs service before further using. 



 Red
 Green 
 Red 

turn by turn
Wink Mode  Green 
slow 0.2 sec on Wink mode wink 0.2 sec off By a command send via FLOW‐BUS the instrument can “wink” with Led’s to indicate its position in a (large) system normal 1.0 sec on Alarm indication: minimum alarm, limit/maximum alarm; power‐up alarm or limit exceeded or wink 1.0 sec off batch reached. fast 0.1 sec on Switch‐released, selected action started
wink 0.1 sec off Page 40 DeviceNet interface 9.17.026 BRONKHORST® 12.1.2 LED indications mode (MBC3 only) for this state Led Indication Network status LED (NET) Not powered/ Not Off online Link OK, Online, Connected Online, Not connected Connection Time‐
out Critical link Failure On 

 green Flashing 
 green 
0.5 sec on 0.5 sec off Flashing 
 red 
0.5 sec on 0.5 sec off On 

 red Device is not online
 The device has not been completed the Dup_MAC_ID test yet.  The device may not be powered, look at module status LED  No network power present Device is online and has connections in the established state  For a group 2 device it means that the device is allocated to a master. The device is online but has no connections in the established state.  The device has passed the Dup_MAC_ID test, is online but has no established connections to other nodes  For a group 2 device it means that the device is not allocated to a master. One or more I/O connections are in timed‐out state.
Failed communication device. The device has detected an error that has rendered it incapable of communicating on the network. (Duplicate MAC ID or bus off) Module status LED (MOD) No power Off There is no power applied to the device
The device is operating in normal condition.
Device operational On 

 green The device needs commissioning due to configuration missing, incomplete or Device in Standby Flashing 

incorrect. The device may be in the standby state. (The device needs  green 0.5 sec on commissioning) 0.5 sec off The device has an unrecoverable fault, may need replacing. Unrecoverable fault On 

 red Device self testing Flashing The device is in self test. red / green 0.5 sec on 0.5 sec off Module and status LED’s sequence at power‐up
Network LED (NET) off 

Module LED (MOD)  green 0.25 sec


0.25 sec
Module LED (MOD)  red 

Module LED (MOD)  green 

Network LED (NET)  green 0.25 sec


0.25 sec
Network LED (NET)  red Network LED (NET) off Page 41 More information can be found in the manual “917023 Operational instructions digital instruments”
This document can be found at: http://www.bronkhorst.com/en/downloads/instruction_manuals/ DeviceNet interface 9.17.026 BRONKHORST® 12.1.3 DeviceNet error description SITUATION Description Minor communication error (red LED: 0.1 sec on, 2 sec off) Each communication error will be seen as a minor communication error except for when the instrument is in the communication fault state. Instrument will stay in the on‐line state. These errors will be recovered automatically. Examples of minor errors: When instrument is only member on DeviceNet network When an I/O connection time‐out has occurred Instrument hardware detects that +24 Vdc in DeviceNet cable is not present.
Instrument will get in communication fault state. This will happen at duplicate MAC ID or at bus‐off event (This node is faulty and is not allowed to have any influence on the bus). This state can only be left by manual intervention. Instrument needs a reset either by using the micro‐switch on top of the instrument or a new power‐up. At duplicate MAC ID situation, sending a new MAC ID via RS232 (e.g using FlowFix) could also solve the problem. No bus power (red LED: 0.2 sec on, 0.2 sec off) Serious communication error ( red LED: 2 sec on, 0.1 sec off) 12.2 TROUBLESHOOTING HINTS AND TIPS SITUATION Description DeviceNet problems Check all DeviceNet settings at your master. Master and device settings for use of memory modules must be the same. Make sure selected configuration at device configuration for polled I/O is the same as the settings at parameter data. See chapter 7 for more details. Check MAC ID and Baud rate of device (slave). Check cabling and bus termination of your DeviceNet system. Check power supply. Instruments need +24Vdc. Try to reset the instrument and/or restart your master. Make sure all settings for your slave are downloaded to your master (otherwise it won’t work). Contact DeviceNet sales representative or service department. Contact Bronkhorst local sales representative or send e‐mail describing your problem to: see service chapter. Other (FLOW‐BUS) problems Page 42 DeviceNet interface 9.17.026 BRONKHORST® 13 SERVICE For current information on Bronkhorst and service addresses please visit our website:  http://www.bronkhorst.com Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your application. Contact sales by e‐mail:  [email protected] For after‐sales questions, our Customer Service Department is available with help and guidance. To contact CSD by e‐
mail:  [email protected] No matter the time zone, our experts within the Support Group are available to answer your request immediately or ensure appropriate further action. Our experts can be reached at:  +31 573 45 88 39 Page 43 DeviceNet interface 9.17.026 
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