Smart Sensors Laser Sensors CMOS Type

Smart Sensors Laser Sensors CMOS Type
Smart Sensors Laser Sensors CMOS Type
ZX2
CSM_ZX2_DS_E_3_1
Stable measurement that is unaffected by
workpiece changes.
The simple setting for everyone.
• High-precision measurement to approx. 10 μm.
• Stable measurement regardless of movement or changes in
workpiece color or material.
• Smart tuning for optimal setting with one button for essentially any user.
• The 11-segment display enables reading characters at a glance.
• Four built-in banks make changeovers easy.
• Stable measurement in harsh environments with IP67
protection for Sensor Head and robot cable.
• Laser life indicator to prevent line stoppage through visualization.
For the most recent information on models that have been certified for
safety standards, refer to your OMRON website.
Be sure to read Safety Precautions on page 11
Features
Stability
Easy
Measurements to a Precision in the Order of 10 µm for any Workpiece
Essentially Anyone Can Set Optimum Conditions
Stable measurement even for changes in colors and materials or for moving
workpieces with CMOS that has a dynamic range of two million times
Easily select smart tuning
with one button.
PAT.P
The use of a unique OMRON HSDR-CMOS (high-speed and dynamic range) image sensor
and a step-less laser power adjustment algorithm enable stable measurements for any
color or surface conditions, from metals to substrates, rubber, and transparent objects.
Linearity of 0.05% F.S.* achieves a measurement precision in the order of 10 µm.
PAT.P
The optimum settings for stable measurement can be achieved with one
smart tuning button. The settings will not rely on the skill of the user.
Stablee measurements on objects with cha
changing color/material
Measurements for Bright Workpieces
Measurements for Dark Workpieces
Small
CMO
CMOS shutter
ter tim
time
me
L
Large
Weak
Laser eemission
on power
Strong
Sensor configuration by just a pushing
the SMART button
TTwo-element
ment
automatic
autom adjustment
justment
Shinny metals
Black rubber
rubb
Three selectable tunings
The light
g int
intake amount
mount remains
changes.
the same even if the workpiece
orkpiece changes
More accurate settings are made possible by the three tuning
methods for different workpiece types and surface conditions.
Light
intake
amount
Scene.1
One type of workpiece
Scene.2
Several types of workpiece
Shinny metals Black rubber
Linearity characteristic of
the ZX2 according to material
1
0.8
0.6
0.4
0.2
0
-0.2
-0.4
White ceramic
SUS304, hairline (parallel)
-0.6
SUS304, mirror finishing
Black rubber
-0.6
SUS304, hairline (orthogonal)
-1
2
4
6
8 10
-10 -8 -6 -4 -2 0
Distance (mm)
Linearity (%FS)
Linearity (%FS)
Linearity characteristic of
existing product according to material
1
0.8
0.6
0.4
0.2
0
-0.2
-0.4
White ceramic
-0.6
SUS304, mirror finishing
-0.6
SUS304, hairline (orthogonal)
-1
-10 -8 -6 -4 -2 0
No Variation
for Different
Workpieces
Single smart tuning
SUS304, hairline (parallel)
Black rubber
2
Best configuration for stable detection
in case of objects do not change by
pushing the button for one second
4
6
8 10
Distance (mm)
Stable measurements on moving objects
Limit of resolution of
existing product when workpiece is moving
Max error: approx.400µm
0
-100
-200
-300
-400
Rest state
Moving condition
workpiece
Measurement error (µm)
Measurement error (µm)
Workpiece:SUS304, hairline (parallel)
100
Surface conditions
of the workpiece are variable
Limit of resolution of
the ZX2 when workpiece is moving
40
400
200
Ideal configuration for stable detection
of changing objects by pushing the
button for three seconds
Scene.3
A line beam is used in addition to an emitter beam when dealing with rough surfaces to average out the
amount of reflected light and to offset the amount of light received at a high-speed measurement period of
30 µs in order to reduce variations in received light and to enable stable measurements for moving objects.
300
Multi-smart tuning
Workpiece:SUS304, hairline (parallel)
30
20
Max error:
approx.7µm
10
No Variation
for Moving
Workpieces
0
-10
-20
-30
-40
Rest state
Moving condition
workpiece
* Linearity: The maximum error that occurs for measurements within the measurement range.
A linearity of ±0.05% F.S. means that when the LD50L is used for a measurement range of 40 to 50 mm,
the maximum error within the measurement range will be 10 µm.
Active smart tuning
Continuous configuration improvement
for the stable detection of all locations
by pushing the button for five seconds
1
ZX2
Ordering Information
Units
Sensor Heads
[Dimensions➜ page 11]
Appearance
Sensing method
Beam shape
Sensing distance
Line beam
Diffuse reflection type
Spot beam
Diffusereflective
Regularreflective
Amplifier Units
50±10 mm
40
100±35 mm
Spot beam
65
135
48±5mm
43
Model
ZX2-LD50L 0.5M
1.5 μm
60
Line beam
Spot beam
Resolution
ZX2-LD50 0.5M
ZX2-LD100L 0.5M
5 μm
ZX2-LD100 0.5M
1.5 μm
53
ZX2-LD50V 0.5M
[Dimensions ➜ page 11]
Appearance
Power supply
Output type
Model
NPN
ZX2-LDA11 2M
PNP
ZX2-LDA41 2M
DC
Accessories (sold separately)
Calculating Unit
These are not included with the Sensor Head or Amplifier Unit. Please order as necessary.
[Dimensions ➜ page 12]
Appearance
Model
Communications Interface Unit
Appearance
ZX2-CAL
Sensor Head Extension Cables
[Dimensions ➜ page 12]
Type
Model
RS-232C
ZX2-SF11
[Dimensions ➜ page 12]
Cable Length
Model
1m
ZX2-XC1R
4m
ZX2-XC4R
9m
ZX2-XC9R
20 m
ZX2-XC20R
Note: Extension cables cannot be coupled and used together.
Mounting Brackets
[Dimensions ➜ page 13]
Applicable Sensor Head
Appearance
ZX2-LD50V
ZX2-LD50L
ZX2-LD50
Model
Remarks
E39-L178
Mounting Brackets (1)
Nut Plate (1)
Phillips screws (M30 ✕ 30) (2)
ZX2-LD100L
ZX2-LD100
E39-L179
2
ZX2
Sensor Head
Sensor Heads for Various Applications-select
the Range and Type of Beam
New Regular-reflective Sensor Head Designed for Optimal Wafer Measurement
ZX2-LD50L
ZX2-LD50
Line beam type
•
• Resolution
• Linearity
50mm ±10mm
1.5µm
Line beam ±0.05%F.S.*1
Spot beam ±0.10%F.S.*1
• Beam size
Line beam
Measurement range
ZX2-LD50V
Spot beam type
Spot beam
•
• Resolution
• Linearity
• Beam size
Measurement range
Spot beam type
(regular-reflective)
48mm ±5mm
1.5µm
Spot beam ±0.3%F.S.
Spot beam
Approx.60µm dia.
Approx.60µm×2.6mm
Approx.60µm dia.
ZX2-LD100L
ZX2-LD100
Line beam type
Spot beam type
• Measurement range
• Resolution
• Linearity
100mm ±35mm
5µm
Line beam ±0.05%F.S.*2
Spot beam ±0.10%F.S.*2
• Beam size
Line beam
Spot beam
Spot beam
Regular-reflective
Precise measurement on
micro-scale objects
Stable wafer
measurement
Approx.110µm×2.7mm
Approx.110µm dia.
Line beam
Stable measurement on
rough-surfaced objects
*1 Using 40 to 50mm
*2 Using 65 to 100mm
Reliable measurements in harsh environments
IP67, robot cable
& temperature characteristic 0.02% F.S./°C
IP67 protection class enables to use the sensor in harsh
environments. A robot cable is used as standard between the
head and amplifier, that the unit can be used reliably on moving
parts. In addition, as 3D UV bond is used to fix the optical
components rather than screws, stress can be controlled and a
temperature characteristic 0.02% F.S./°C* is realized.
* If the room temperature varies 1°C, the measured value varies 0.02% F.S.
(corresponding to 4µm for the Model ZX2-LD50)
Compact sensor for easy mounting
World smallest*
The world’s smallest CMOS laser displacement sensor
head is realized in a resin case. Enables to mount the
sensor in smallest spaces and to minimize measurement errors arising from temperature fluctuations.
* According to OMRON investigation of CMOS laser
displacement sensors performed in September 2010.
35.5mm
Cable can be
fed through
from the back
22.6mm
47. mm
47.5mm
3
ZX2
Amplifier and Calculating Unit
Ease of Use by “LED Display” and “Calculating Unit”
Easy calculations of measurements
11-segment LED display for intuitive configuration
Determination output indicators
High (orange)/Pass (green)/
Low (orange), two color display
Intuitive operation through
cross buttons
11 Segment LED Display
No need for a manual
11 Segment LED Display
An 11 segment LED display is integrated
in the compact housing. Alphanumeric
characters can be read with ease and
there is no need to refer to a manual.
Comparison of the existing 7 segment LED display and
the 11 segment LED display
The 7 segment display
on existing models
The 11 segment display
on model ZX2
30mm
30mm
38mm
31mm
64mm
72mm
The compact housing stays just as it is
Perform two calculations with ease
Thickness + subtraction mode
The calculated results of two sensor heads are displayed on the amplifier unit by just connecting the calculating unit between
the two amplifier units. The calculation function can be chosen from the two modes of thickness and subtraction. It is also
possible to prevent mutual interference by coupling via the calculating units. (Up to five amplifier units can be connected.)
Thickness mode
Sensor 1
Subtraction mode
A
Sensor 1 0 criterion
Sensor 2 0 criterion
K
T
S
A
B
Sensor 2
B
Thickness
T=K+(A+B)
Level difference
S=B - A
Easy change of setup
Equipped with 4 banks
Existing models
The amplifier unit is equipped
with four bank functions.
Easy change of setup between
four modes is supported by
just switching between the
bank functions.
ZX2
B
BANAKNK 3
2
BANK 1
0
Amplifier unit
+
Bank unit
Built into the unit
4
ZX2
Specifications
Diffuse-reflective Sensor Heads
Item
Optical system
Model
ZX2-LD50L
ZX2-LD50
ZX2-LD100L
ZX2-LD100
Diffuse reflective
Visible-light semiconductor laser with a wavelength of 660 nm and an output of 1mW max.
Light source
(wave length)
EN class 2, FDA class ΙΙ *5
Measurement center point
50 mm
100 mm
Measurement range
±10 mm
±35 mm
Beam shape
Line
Spot
Line
Spot
Beam size *1
Approx. 60 μm × 2.6 mm Approx. 60 μm dia.
Approx.110 μm × 2.7 mm Approx. 110 μm dia.
Resolution *2
1.5 μm
5 μm
Linearity *3
±0.05% F.S. (40 to 50 mm) ±0.1% F.S. (40 to 50 mm) ±0.05% F.S. (65 to 100 mm) ±0.1% F.S. (65 to 100 mm)
Temperature characteristic *4 0.02% F.S. /°C
Ambient illumination
Incandescent lamp: 10,000 lx max. (on light receiving side)
Ambient temperature
Operating: 0 to 50 °C, Storage: −15 to 70 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35% to 85% (with no condensation)
Dielectric strength
1,000 VAC, 50/60 Hz for 1 min.
Vibration resistance (destruction) 10 to 150 Hz, 0.7-mm double amplitude, 80 min. each in X, Y, and Z directions
Shock resistance (destruction) 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
Degree of protection
IEC60529, IP67
Connection method
Connector connection (standard cable length: 500 mm)
Weight (packed state)
Approx. 160 g (main unit only: Approx. 75 g)
Materials
Case and cover: PBT (polybutylene terephtahalate), Optical window: Glass, Cable: PVC
Accessories
Instruction sheet, Ferrite core, Laser warning label (English), FDA certification label
Regular-reflective Sensor Head
Item
Model
Optical system
Light source (wave length)
Measurement center point
Measurement range
Beam shape
Beam size *1
Resolution *2
Linearity *3
Temperature characteristic *4
Ambient illumination
Ambient temperature
Ambient humidity
Dielectric strength
Vibration resistance (destruction)
Shock resistance (destruction)
Degree of protection
Connection method
Weight (packed state)
Materials
Accessories
ZX2-LD50V
Regular reflective
Visible-light semiconductor laser with a wavelength of 660 nm and an output of 0.24 mW max. EN class 1, FDA class I *5
48mm
±5mm
Spot
Approx. 60 μm dia.
1.5 μm
±0.3%F.S. (entire range)
0.06%F.S./°C
Incandescent lamp: 10,000lx max. (on light receiving side)
Operating: 0 to 50 °C, Storage: -15 to 70 °C (with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
1,000 VAC, 50/60 Hz for 1 minute
10 to 150 Hz, 0.7-mm double amplitude, 80 minutes, each in X,Y,and Z directions
300 m/s2 3 times each in six directions (up/down,left/right,forward/backward)
IEC 60529, IP67
Connector connection (standard cable length: 500 mm)
Approx.160g (Sensor Head only: Approx.75g)
Case and cover: PBT (polybutylene terephtahalate), Optical window: Glass, Cable: PVC
Instruction sheet, Ferrite core, Laser warning label (English), FDA certification label
Note: False detection outside the measurement range can occur in the case of an object with high reflectance.
*1. Beam size: Defined as 1/e2 (13.5 %) of the center optical intensity at the minimum value of the measurement range (effective value).
False detections can occur in the case there is light leakage outside the defined region and the surroundings of the target object have a high
reflectance in comparison to the target object. Correct measurements may not be obtained if the workpiece is smaller than the beam size.
*2. Resolution: indicates the degree of fluctuation (±3σ) of analog output when connected to the ZX2-LDA.
(The measured value is given for the center distance for OMRON’s standard target object (diffuse-reflective models: white ceramic object,
regular-reflective models:1/4 λ flat mirror) when the response time of the ZX2-LDA is set to 128 ms.)
Indicates the repetition accuracy for when the workpiece is in a state of rest. Not an indication of distance accuracy.
Resolution performance may not be satisfied in a strong electromagnetic field.
*3. Linearity: indicates the error with respect to the ideal straight line of the displacement output in the case of measuring Omron’ s standard target
object. Linearity and measured value may vary depending on target object.
F.S. indicates the full scope of the measurement range. (ZX2-LD50(L): 20 mm)
*4. Temperature characteristic: Value for the case the space between the sensor head and Omron’ s standard target object is secured by an
aluminum jig. (Measured at the measurement center distance)
*5. These Sensors are classified as Class 2 laser devices for diffuse-reflective models and Class 1 for regular-reflective models under EN 608251 and the regulations of Laser Notice No. 50 for FDA certification. CDRH registration has been completed.
5
ZX2
Amplifier Units
Item
Measurement period *1
Model
Response time
Analog output *2
Judgement outputs
(HIGH/PASS/LOW: 3 outputs),
error output
Laser OFF input, zero reset input,
timing input, reset input,
bank input
Functions
Indications
Power supply voltage
Power consumption
Ambient temperature
Ambient humidity
Dielectric strength
Vibration resistance (destruction)
Shock resistance (destruction)
Degree of protection
Connection method
Weight (packed state)
Materials
Accessories
ZX2-LDA11
ZX2-LDA41
Min. 30 μs
60 μs, 120 μs, 240 μs, 500 μs, 1 ms, 2 ms, 4 ms, 8 ms, 12 ms, 20 ms, 36 ms, 66 ms, 128 ms, 250 ms,
500ms
4 to 20 mA, Max. load resistance: 300Ω/±5 VDC or 1 to 5 VDC, Output impedance: 100Ω
NPN open-collector outputs, 30 VDC, 50 mA max. PNP open-collector outputs, 30 VDC, 50 mA max.
(residual voltage: 1 V max. for load current 10 mA (residual voltage: 1 V max. for load current 10 mA
max., 2V max. for load current above 10 mA)
max., 2 V max. for load current above 10 mA)
ON: Supply voltage short-circuited or supply voltage
ON: Short-circuited with 0-V terminal or 1.2 V or less
within -1.2 V
OFF: Open (leakage current: 0.1 mA max.)
OFF: Open (leakage current: 0.1 mA max.)
Smart tuning, scaling, sample hold, peak hold, bottom hold, peak-to-peak hold, self-peak hold,
self-bottom hold, average hold, zero reset, On-delay timer, OFF-delay timer, keep/clamp switch,
(A-B) calculations *3, thickness calculation *3, mutual interference prevention *3,
laser deterioration detection, bank function (4 banks), differential function
Judgement indicators: HIGH (orange), PASS (green), LOW (orange), 11-segment main display (red),
11-segment sub-display (orange), laser ON (green), zero reset (green), enable (green), menu (green),
HIGH threshold (orange), LOW threshold (orange)
10 to 30 VDC, including 10% ripple (p-p)
3,000 mW max. (at 24 VDC: 125 mA max., at 12 VDC: 250 mA max.)
Operating: 0 to 50 °C, Storage: −15 to 70 °C (with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
1,000 VAC, 50/60 Hz for 1 min.
10 to 150 Hz, 0.7-mm double amplitude, 80 min. each in X, Y, and Z directions
300 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
IEC60529, IP40
Prewired (standard cable length: 2 m)
Approx. 200 g (main unit only: Approx. 135 g)
Case: PBT (polybutylene terephtahalate), Cover: Polycarbonate, Display: Methacrylic resin,
Button: Polyacetal, Cable: PVC
Instruction sheet
*1. In the case of Omron’s standard target object (white ceramic)
*2. Select current output (4 to 20 mA) and voltage output (±5V or 1 to 5V) by MENU mode.
*3. Calculating unit (ZX2-CAL) is necessary. Calculations are possible for up to two amplifier units. Mutual interference prevention is possible for
up to five amplifier units.
Calculating Unit
Item
Model
ZX2-CAL
Applicable Amplifier Units ZX2-LDA11, ZX2-LDA41
12 mA max. (supplied from the Smart
Current consumption
Sensor Amplifier Unit)
Operating: 0 to +50°C, storage: -15 to
Ambient temperature
+70°C (with no icing or condensation)
Operating and storage: 35% to 85%
Ambient humidity
(with no condensation)
Connection method
Connector
Dielectric strength
1,000 VAC, 50/60 Hz for 1 minute
Vibration resistance
10 to 150 Hz, 0.7-mm double amplitude,
(destruction)
80 minutes, each in X,Y,and Z directions
Shock resistance
300 m/s2 3 times each in six directions
(destruction)
(up/down, left/right, forward/backward)
Materials
Case: ABS, Display: Methacrylic resin
Approx. 50g
Weight (packed state)
(Calculating Unit only: Approx. 15g)
Accessories
Instruction sheet
ZX2-series Communications Interface Unit
Item
Model
Power supply voltage
Power consumption
Applicable Amplifier Units
Applicable Amplifier
Unit versions
Max. No. of Amplifier
Units
Port
Communications method
Synchronization method
Transmission code
Commu- Baud rate
nications
functions Data bit length
Parity check
Stop bit length
Receiving
Data
delimiter Sending
Indicators
Protective circuits
Ambient temperature
Ambient humidity
Insulation resistance
Dielectric strength
Materials
Accessories
ZX2-SF11
10 to 30 V DC ±10% (including 10% ripple (p-p))
(Supplied from Sensor Amplifier.)
720 mW max. (at 24 V: 30 mA max., at 12 V: 60 mA max.)
(Not including Sensor Amplifier current consumption or
output current
[email protected]@ (Production after November 2013)
Sensor Amplifier Unit version: V1.330 or higher
(The Sensor Amplifier version is shown on the sub-digital
display when the power of the Sensor Amplifier is turned ON.)
5
RS-232C (9-pin, D-Sub connector)
Full duplex
Start/stop synchronization
ASCII
38,400 (at shipping)/9,600 bps switchable
8 bits
None
1 bit
CR or CR + LF is automatically recognized.
CR + LF fixed
Power supply: green, Sensor communications: green, Sensor
communications error: red, External terminal communications:
green, External terminal communications error: red
Power supply reverse polarity protection
Operating: 0 to 50°C, storage: -15 to 60°C
(with no icing or condensation)
Operating and storage: 35% to 85%
(with no condensation)
20 MΩ min. (at 500 VDC)
1,000 VAC, 50/60 Hz for 1 min,
Leakage current: 10 mA max.
Case: PBT (polybutylene terephthalate), Cover: Polycarbonate
Instruction sheet, 2 clamps
6
ZX2
Engineering Data (Reference Value)
Angle Characteristic
ZX2-LD50
Side-to-side Inclination
Front-to-back Inclination
Error (%F.S.)
Error (%F.S.)
The angle characteristic is a plot of the inclination of the sensing object in the measurement range and the maximum value of the error to analog output.
Note: SUS304 = Stainless steel SUS304
1.0
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
0.4
+ Inclination
- Inclination
+ Inclination
0.4
- Inclination
0
−0.2
−0.2
−0.4
−0.4
−0.6
−0.6
−0.8
−0.8
1.0
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
+ Inclination
0.4
- Inclination
−1.0
−50 −40 −30 −20 −10
10 20 30 40 50
Angle of Inclination (°)
0
10 20 30 40 50
Angle of Inclination (°)
Front-to-back Inclination
Error (%F.S.)
0
ZX2-LD50L
Side-to-side Inclination
Error (%F.S.)
0.6
0
−1.0
−50 −40 −30 −20 −10
0.2
1.0
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
+ Inclination
0.4
- Inclination
0.2
0
0
−0.2
−0.2
−0.4
−0.4
−0.6
−0.6
−0.8
−0.8
0
ZX2-LD100
Side-to-side Inclination
1.0
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
+ Inclination
0.4
- Inclination
−1.0
−50 −40 −30 −20 −10
10 20 30 40 50
Angle of Inclination (°)
0
10 20 30 40 50
Angle of Inclination (°)
Front-to-back Inclination
Error (%F.S.)
−1.0
−50 −40 −30 −20 −10
Error (%F.S.)
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.2
0.2
0.2
1.0
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
+ Inclination
0.4
- Inclination
0.2
0
0
−0.2
−0.2
−0.4
−0.4
−0.6
−0.6
−0.8
−0.8
0
ZX2-LD100L
Side-to-side Inclination
1.0
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
+ Inclination
0.4
- Inclination
−1.0
−50 −40 −30 −20 −10
10 20 30 40 50
Angle of Inclination (°)
10 20 30 40 50
Angle of Inclination (°)
1.0
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
+ Inclination
0.4
- Inclination
0.2
0.2
0
0
−0.2
−0.2
−0.4
−0.4
−0.6
−0.6
−0.8
−0.8
−1.0
−50 −40 −30 −20 −10
0
Front-to-back Inclination
Error (%F.S.)
−1.0
−50 −40 −30 −20 −10
Error (%F.S.)
1.0
0
10 20 30 40 50
Angle of Inclination (°)
−1.0
−50 −40 −30 −20 −10
0
10 20 30 40 50
Angle of Inclination (°)
7
ZX2
Linearity Characteristic for Different Materials
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
0.4
0.6
0.2
1.0
0.6
0.4
+50° Inclination
−50° Inclination
0.2
0
0
0
−0.2
−0.2
−0.4
−0.4
−0.4
−0.6
−0.6
−0.6
−0.8
−0.8
−0.8
−1.0
−10
−1.0
−10
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
−1.0
−10
−6 −4 −2
0
2
4
6
8 10
FAR side
NEAR side
Measurement center distance
Displacement (mm)
−50° Inclination Front-to-back
1.0
0.4
−8
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
0.4
0° Inclination
0.2
0.2
0.6
0.4
+50° Inclination
−50° Inclination
0.2
0
0
−0.2
−0.2
−0.4
−0.4
−0.4
−0.6
−0.6
−0.6
−0.8
−0.8
−0.8
−1.0
−10
−1.0
−10
−2
0
2
4
6
8
10
−8
FAR side
NEAR side
Measurement center distance
Displacement (mm)
ZX2-LD100
0° Inclination
−4
−2
0
2
4
6
8
0.8
0.6
White ceramic
SUS304, mirror finish
Black rubber
0.6
0.2
−0.4
−0.4
−0.4
−0.6
−0.6
−0.6
−0.8
−0.8
−1.0
−35
35
0.6
0.4
−5 0
5
15
25
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.6
0.6
+50° Inclination
0
−0.4
−0.4
−0.4
−0.6
−0.6
−0.6
−0.8
−0.8
−0.8
−1.0
−35
−1.0
−35
25
35
35
0.2
−0.2
15
25
0.4
−50° Inclination
0
5
15
White ceramic
SUS304, mirror finish
Black rubber
0.8
−0.2
−5 0
5
1.0
0
−15
−5 0
+50° Inclination
1.0
−0.2
FAR side
NEAR side
Measurement center distance
Displacement (mm)
−15
FAR side
NEAR side
Measurement center distance
Displacement (mm)
−50° Inclination Front-to-back
0.2
−25
−25
FAR side
NEAR side
Measurement center distance
Displacement (mm)
0.4
0° Inclination
0.2
−1.0
−35
35
Error (%F.S.)
White ceramic
SUS304, mirror finish
Black rubber
0.8
−15
Error (%F.S.)
Error (%F.S.)
1.0
10
−0.8
−25
FAR side
NEAR side
Measurement center distance
Displacement (mm)
ZX2-LD100L
0° Inclination
8
+50° Inclination
0
25
6
0.2
−0.2
15
4
0.4
−50° Inclination
0
5
2
White ceramic
SUS304, mirror finish
Black rubber
0.6
−0.2
−5 0
0
0.8
0
−15
−2
1.0
−0.2
−25
−4
+50° Inclination
1.0
0.8
−6
FAR side
NEAR side
Measurement center distance
Displacement (mm)
0.4
0° Inclination
0.2
−1.0
−35
−8
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Error (%F.S.)
White ceramic
SUS304, mirror finish
Black rubber
−1.0
−10
10
−50° Inclination Front-to-back
1.0
0.4
−6
Error (%F.S.)
−4
White ceramic
SUS304, mirror finish
Black rubber
0.8
0
−6
−6 −4 −2
0
2
4
6
8 10
FAR side
NEAR side
Measurement center distance
Displacement (mm)
1.0
−0.2
−8
−8
+50° Inclination
1.0
Error (%F.S.)
−6 −4 −2
0
2
4
6
8 10
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Error (%F.S.)
−8
White ceramic
SUS304, mirror finish
Black rubber
0.8
−0.2
ZX2-LD50L
0° Inclination
Error (%F.S.)
White ceramic
SUS304, mirror finish
Black rubber
0.8
0.4
0° Inclination
0.2
Error (%F.S.)
+50° Inclination
1.0
Error (%F.S.)
−50° Inclination Front-to-back
1.0
Error (%F.S.)
Error (%F.S.)
ZX2-LD50
0° Inclination
−25
−15
−5 0
5
15
25
35
FAR side
NEAR side
Measurement center distance
Displacement (mm)
−1.0
−35
−25
−15
−5 0
5
15
25
35
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Note: The x-axis displacement indicates the measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier
unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and −, respectively.
8
ZX2
ZX2-LD50V
Side-to-side Inclination for Flat Mirror
Front-to-back Inclination for Flat Mirror
Side-to-side Inclination for Silicon Wafer
Error (%F.S.)
Error (%F.S.)
Error (%F.S.)
Angle Characteristic
3.0
-1.0°
-0.5°
0°
2.5
2.0
0.5°
1.0°
+ Inclination
1.5
- Inclination
1.0
3.0
10.5°
2.0
0.5°
1.0°
+ Inclination
- Inclination
1.5
1.0
0.5
-1.0°
-0.5°
0°
2.5
3.0
2.0
0.5
0
0
0
-0.5
-0.5
-1.0
-1.0
-1.0
-1.5
-1.5
-1.5
-2.0
-2.0
-2.0
-2.5
-2.5
-3
-2
-1
0
1
2
3
4
-3.0
-5
5
- Inclination
1.0
0.5
-4
0.5°
1.0°
+ Inclination
1.5
-0.5
-3.0
-5
-1.0°
-0.5°
0°
2.5
-2.5
-4
-2
-1
0
1
2
3
4
-3.0
-5
5
-4
-3
-2
-1
0
1
2
3
4
5
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Front-to-back Inclination for Glass
3.0
-1.0°
-0.5°
0°
2.5
10.5°
2.0
0.5°
1.0°
+ Inclination
- Inclination
1.5
1.0
Error (%F.S.)
Front-to-back Inclination for Silicon Wafer Side-to-side Inclination for Glass
Error (%F.S.)
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Error (%F.S.)
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-3
3.0
-1.0°
-0.5°
0°
2.5
2.0
0.5°
1.0°
+ Inclination
1.5
- Inclination
1.0
3.0
1.0
0.5
0
0
-0.5
-0.5
-0.5
-1.0
-1.0
-1.0
-1.5
-1.5
-1.5
-2.0
-2.0
-2.0
-2.5
-2.5
-3
-2
-1
0
1
2
3
4
5
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-3.0
-5
0.5°
1.0°
+ Inclination
- Inclination
1.5
0
-4
10.5°
2.0
0.5
-3.0
-5
-1.0°
-0.5°
0°
2.5
0.5
-2.5
-4
-3
-2
-1
0
1
2
3
4
5
FAR side
NEAR side
Measurement center distance
Displacement (mm)
-3.0
-5
-4
-3
-2
-1
0
1
2
3
4
5
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Linearity Characteristic for Different Materials
Error (%F.S.)
ZX2-LD50V
0° Inclination
1.0
Flat Mirror
Silicon Wafer
Glass
0.8
0.6
0.4
10.5°
0° Inclination
0.2
0
-0.2
-0.4
-0.6
-0.8
-1.0
-5
-4
-3
-2
-1
0
1
2
3
4
5
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Note: The x-axis displacement indicates the measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier
unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and −, respectively.
9
ZX2
Beam Size
Spot Beams
Line Beams
L
L
Beam cross-section
Beam cross-section
Y
Y
X
X
ZX2-LD50
ZX2-LD50L
L*
+10 mm
0 mm
−4 mm
−10 mm
L*
+10 mm
0 mm
−4 mm
−10 mm
X
Approx.
600 μm
Approx.
160 μm
Approx.
40 μm
Approx.
220 μm
X
Approx.
2.6 mm
Approx.
2.6 mm
Approx.
2.6 mm
Approx.
2.6 mm
Y
Approx.
350 μm
Approx.
90 μm
Approx.
60 μm
Approx.
130 μm
Y
Approx.
350 μm
Approx.
90 μm
Approx.
60 μm
Approx.
130 μm
ZX2-LD100
ZX2-LD100L
L*
+35 mm
0 mm
−20 mm
−35 mm
L*
+35 mm
0 mm
−20 mm
−35 mm
X
Approx.
1.1 mm
Approx.
400 μm
Approx.
70 μm
Approx.
250 μm
X
Approx.
2.1 mm
Approx.
2.5 mm
Approx.
2.7 mm
Approx.
2.9 mm
Y
Approx.
550 μm
Approx.
190 μm
Approx.
110 μm
Approx.
150 μm
Y
Approx.
550 μm
Approx.
190 μm
Approx.
110 μm
Approx.
150 μm
* Measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier unit takes the measurement center
distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and −, respectively.
I/O Circuit Diagrams
NPN Amplifier Unit (ZX2-LDA11)
PNP Amplifier Unit (ZX2-LDA41)
Brown: 10 to 30 VDC
Brown: 10 to 30 VDC
Load
Load
White: HIGH judgement output
White: HIGH judgement output
10 to
30 VDC
Load
Load
Green: PASS judgement output
Green: PASS judgement output
10 to
30 VDC
Gray: LOW judgement output
Gray: LOW judgement output
Yellow: Error output
Load
Load
Yellow: Error output
Load
Load
Blue: GND (0 V)
Pink: LD-OFF input
Orange: Zero reset input
Purple: Timing input/BANK input 0
Red: Reset input/BANK input 1
Internal circuits
Internal circuits
Blue: GND (0 V)
Pink: LD-OFF input
Orange: Zero reset input
Purple: Timing input/BANK input 0
Red: Reset input/BANK input 1
Current output
4 to 20 mA
Current/voltage
output switch
Voltage output
100 Ω
±5 V
1 to 5 V
Current output
4 to 20 mA
Black: Analog output
Load
Current output: 300 Ω or lower
Voltage output: 10 kΩ or higher
Shield: Analog GND
Current/voltage
output switch
100 Ω
Black: Analog output
Voltage output
±5 V
1 to 5 V
Load
Current output: 300 Ω or lower
Voltage output: 10 kΩ or higher
Shield: Analog GND
Wiring
Amplifier Units
ZX2-LDA11/ZX2-LDA41
Brown
Blue
White
Green
Gray
Yellow
Black
Shield
Pink
Orange
Purple
Red
10 to 30 VDC
GND (0V)
HIGH judgement output
PASS judgement output
LOW judgement output
Error output
Analog output
Analog GND
LD-OFF input
Zero reset input
Timing input/BANK input 0
Reset input/BANK input 1
Note: 1. Use a separate stabilized power supply for the Amplifier Unit,
particularly when high resolution is required.
2. Wire the Unit correctly. Incorrect wiring may result in damage to the
Unit. (Do not allow wiring, particularly the Analog output, to come
into contact with other wires.)
3. Use the 0-V ground (blue) for the power supply and use the Analog
ground (shield) for Analog output. Each of these grounds must be
used for the designed purpose. When not using the Analog output,
connect the Analog ground (shield) to the 0-V ground (blue).
10
ZX2
Safety Precautions
For details, refer to common precautions, warranty, limitation of liability, and other related information.
WARNING
Precautions for Correct Use and Other Details
Refer to the “Smart Sensors Laser Displacement Sensors
CMOS Type ZX2 Series User’s Manual” (Cat. No. Z310).
This product is not designed or rated for ensuring
safety of persons.
Do not use it for such purposes.
(Unit: mm)
Dimensions
Tolerance class IT16 applies to dimensions in thes data sheet unless otherwise specified.
Units
Sensor Heads
Reference surface
ZX2-LD50
ZX2-LD50L
ZX2-LD100
ZX2-LD100L
ZX2-LD50V
(9.7)
Emitter axis
22.6
9.7
L*
Emitter
axis
10.1
10.5
Mounting Dimensions
Reference surface
Two, 3.2-dia. (Mounting holes)
35.5
27.5
4
Reference surface
Range indicator
6
4.8 20.9
A*
4±0.05
35.3
16.7
39.5
Two, M3
Mounting
reference surface
4
7
7
Mounting
reference surface
43.5±0.05
47.5
Receiver axis
4.8
Emitter center
15.1
Range indicator
Laser
warning light
28.43
4±0.05
31.5±0.05
12.6 dia.
* In the case of ZX2-LD50 (L), L=50, A=21 °
In the case of ZX2-LD100 (L), L=100, A=11.5 °
29.8
Vinyl insulated round cable, 4.7 dia., 4 conductors
(Conductor cross-section: 0.086 mm2/Insulator diameter: 0.9 mm)
Standard length: 0.5 m, Minimum bending radius: 30 mm
Note: Attach the enclosed
ferrite core (16.5 dia.,
length: 30 mm) to the
cable within 100 mm
from the Sensor Head.
Amplifier Units
ZX2-LDA11
ZX2-LDA41
11.7
*2
6.2
72
(when cover open, 84.6)
50
4.2
47.6
30
*1. Maximum height when cover open: 56
*2. Minimum length when connected: 50
18
9.6
34.2
10.9
16.9
6.1
20.7
38.4 *1
16.6
15.4
36.8
Vinyl insulated round cable,5.2 dia., 11 conductors
(Conductor cross-section 0.09 mm2/Insulator diameter: 0.7 mm)
Standard length: 2 m, Minimum bending radius: 35 mm
11
ZX2
Accessories (sold separately)
Sensor Head Extension Cables
Calculating Unit
ZX2-CAL
ZX2-XC1R
ZX2-XC4R
ZX2-XC9R
ZX2-XC20R
24.9
Coupled indicators
Coupling connectors
15.1
57
44.05
12
8
12.6 dia.
28.9
L*
29.8
12 dia.
9.5
30
14.4
Amplifier Unit
attachment connector
(female, 6 poles)
15
3.4
5
Vinyl insulated round cable, 4.7 dia.
(ZX2-XC20R: 5.1 dia.)
Sensor Head
attachment connector
(male, 6 poles)
* Length L is as follows.
ZX2-XC1R: 1 m, ZX2-XC4R: 4 m, ZX2-XC9R: 9 m, ZX2-XC20R: 20 m
Minimum bending radius: 30 mm
Note: Attach the enclosed ferrite cores (16.5 dia., length: 30 mm) within 100 mm of
each end of the extension cable.
36.7
ZX2-series Communications Interface Unit
ZX2-SF11
Coupling
connector
Sensor communications indicator (communications operation)
Sensor communications indicator (communications error)
Power supply indicator
External terminal
communications indicator
(communications operation)
External terminal communications indicator (communications error)
4.2
3
30
64.3
4.2
(336)
(46)
31.5
15
13.2
36.8
13
Vinyl -insulated round cable,
5.23 dia. Standard length 100 mm
29
2.2
11.7
4.3
(33.1)
Connector
11.7
3
5 6.55
12
ZX2
Mounting Bracket
Mounting Bracket
E39-L178
E39-L179
Mounting Bracket
(36.4)
31.4
2-R3
Nut plate
6
5
2- M3
P=0.5
Nut plate
6
5
5
5
3.2 dia.
3.2 dia.
.1
.1
R48
R48
54.1 48.1
58
3.5
2- M3
P=0.5
54.1 48.1
56
3.5
23
24.5°(Regular-reflective
Sensor mounting)
34.7°(Diffuse-reflective
Sensor mounting)
8.8
23
29.2°(Regular-reflective
Sensor mounting)
34.7°(Diffuse-reflective
Sensor mounting)
Material: Stainless steel
(SUS304)
Thickness: 2.0 mm
8.8
3.2 14
Material: Stainless steel
(SUS304)
Thickness: 2.0 mm
3.2 14
12
12
3.2
5.2
Mounting Bracket
(36.6)
31.6
2-R3
2-R3
16.8
9.6
(26.4)
16.8
Material: Stainless steel (SUS304)
Thickness: 3.0 mm
Accessories: Phillips screws (M3×30): 2
Nut plate: 1
3.2
5.2
2-R3
16.8
9.6
(26.4)
16.8
Material: Stainless steel (SUS304)
Thickness: 3.0 mm
Accessories: Phillips screws (M3×30): 2
Nut plate: 1
this Mounting Bracket when installing the ZX2-LD100 (L) as a normal
* Use
Diffuse-reflective or Regular-reflective Sensor Head.
Installation Method for Regular-reflective Sensor Head
Using a E39-L178 Mounting Bracket:
*1
Phillips screws
(32)
22.6
Installation Method for Regular-reflective Sensor
Heads (Installing a Diffuse-reflective Sensor
Head as a Regular-reflective Sensor Head)
Using a E39-L179 Mounting Bracket:
*1
Phillips screws
(32)
22.6
Nut plate
Nut plate
Mounting Bracket
10.5°
*2
Note: When securing the Sensor Head in the
Mounting Bracket, insert the screws into
the side of the Sensor Head where the
warning label is located and secure the
Sensor Head into place.
*1. The measurement distance reference
position is the end of the Mounting Bracket.
*2. For the Regulalr-reflective Sensor Heads,
rotate the Sensor Head counterclockwise,
secure it in place, and then perform any
necessary fine adjustments.
5.75°
*2
Mounting Bracket
Note: When securing the Sensor Head in the
Mounting Bracket, insert the screws into
the side of the Sensor Head where the
warning label is located and secure the
Sensor Head into place.
*1. The measurement distance reference
position is the end of the Mounting Bracket.
*2. For the IInstalling a Diffuse-reflective
Sensor as a Regular-reflective Sensor,
rotate the Sensor Head counterclockwise,
secure it in place, and then perform any
necessary fine adjustments.
Not Using a Mounting Bracket:
Tilt the Sensor Head towards the workpiece as shown below.
Measurement
center distance
workpiece
13
ZX2
Installation Method for Diffuse-reflective Sensor Heads
Using a E39-L178, E39-L179 Mounting Bracket:
Not Using a Mounting Bracket:
Mount the Sensor Head in relation to the workpiece as shown below.
*1
Phillips screws
(32)
22.6
L*
Measurement
center distance
31.5
±0.05
Nut plate
39.5±0.05
Mounting Bracket
workpiece
measurement distance reference position is
*1 The
the Sensor’s sensing surface.
4.0
±0.05
* ZX2-LD50 (L): 50
ZX2-LD100 (L): 100
Note: When securing the Sensor Head in the
Mounting Bracket, insert the screws
into the side of the Sensor Head where
the warning label is located and secure
the Sensor Head into place.
14
Terms and Conditions Agreement
Read and understand this catalog.
Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you
have any questions or comments.
Warranties.
(a) Exclusive Warranty. Omron’s exclusive warranty is that the Products will be free from defects in materials and workmanship
for a period of twelve months from the date of sale by Omron (or such other period expressed in writing by Omron). Omron
disclaims all other warranties, express or implied.
(b) Limitations. OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT
NON-INFRINGEMENT, MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OF THE PRODUCTS. BUYER
ACKNOWLEDGES THAT IT ALONE HAS DETERMINED THAT THE
PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE.
Omron further disclaims all warranties and responsibility of any type for claims or expenses based on infringement by the
Products or otherwise of any intellectual property right. (c) Buyer Remedy. Omron’s sole obligation hereunder shall be, at
Omron’s election, to (i) replace (in the form originally shipped with Buyer responsible for labor charges for removal or
replacement thereof) the non-complying Product, (ii) repair the non-complying Product, or (iii) repay or credit Buyer an amount
equal to the purchase price of the non-complying Product; provided that in no event shall Omron be responsible for warranty,
repair, indemnity or any other claims or expenses regarding the Products unless Omron’s analysis confirms that the Products
were properly handled, stored, installed and maintained and not subject to contamination, abuse, misuse or inappropriate
modification. Return of any Products by Buyer must be approved in writing by Omron before shipment. Omron Companies shall
not be liable for the suitability or unsuitability or the results from the use of Products in combination with any electrical or
electronic components, circuits, system assemblies or any other materials or substances or environments. Any advice,
recommendations or information given orally or in writing, are not to be construed as an amendment or addition to the above
warranty.
See http://www.omron.com/global/ or contact your Omron representative for published information.
Limitation on Liability; Etc.
OMRON COMPANIES SHALL NOT BE LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL, OR CONSEQUENTIAL DAMAGES,
LOSS OF PROFITS OR PRODUCTION OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS,
WHETHER SUCH CLAIM IS BASED IN CONTRACT, WARRANTY, NEGLIGENCE OR STRICT LIABILITY.
Further, in no event shall liability of Omron Companies exceed the individual price of the Product on which liability is asserted.
Suitability of Use.
Omron Companies shall not be responsible for conformity with any standards, codes or regulations which apply to the
combination of the Product in the Buyer’s application or use of the Product. At Buyer’s request, Omron will provide applicable
third party certification documents identifying ratings and limitations of use which apply to the Product. This information by itself
is not sufficient for a complete determination of the suitability of the Product in combination with the end product, machine,
system, or other application or use. Buyer shall be solely responsible for determining appropriateness of the particular Product
with respect to Buyer’s application, product or system. Buyer shall take application responsibility in all cases.
NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY OR IN LARGE
QUANTITIES WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS,
AND THAT THE OMRON PRODUCT(S) IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE
OVERALL EQUIPMENT OR SYSTEM.
Programmable Products.
Omron Companies shall not be responsible for the user’s programming of a programmable Product, or any consequence
thereof.
Performance Data.
Data presented in Omron Company websites, catalogs and other materials is provided as a guide for the user in determining
suitability and does not constitute a warranty. It may represent the result of Omron’s test conditions, and the user must correlate
it to actual application requirements. Actual performance is subject to the Omron’s Warranty and Limitations of Liability.
Change in Specifications.
Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our
practice to change part numbers when published ratings or features are changed, or when significant construction changes are
made. However, some specifications of the Product may be changed without any notice. When in doubt, special part numbers
may be assigned to fix or establish key specifications for your application. Please consult with your Omron’s representative at
any time to confirm actual specifications of purchased Product.
Errors and Omissions.
Information presented by Omron Companies has been checked and is believed to be accurate; however, no responsibility is
assumed for clerical, typographical or proofreading errors or omissions.
2013.10
In the interest of product improvement, specifications are subject to change without notice.
OMRON Corporation
Industrial Automation Company
http://www.ia.omron.com/
(c)Copyright OMRON Corporation 2013 All Right Reserved.
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