Semiconductor Characterization System Technical Data
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Semiconductor Characterization System
Technical Data
Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
4200-SCS
Semiconductor
4200-SPEC Rev. M
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Semiconductor Characterization System
Technical Data
2Introduction
4Configuration Options
6
Hardware Specifications
13 KTE Interactive Software
Tools
Model 4200-SCS Technical Data
13 Microsoft Windows
14 The Keithley
Interactive Test Environment
(KITE)
22 Keithley User
Library Tool (KULT)
23System
Configuration and
Diagnostics (KCON)
23 Keithley External
Control Interface (KXCI)
23 Support Contracts
24 Value-Add Services
24Other Upgrades
25 Embedded PC Policy
25 Warranty Information
26 Switch Matrix Support and
Configurations
28 Accessories and Optional
Instrumentation
29Other Optional Accessories
Introduction
The Model 4200-SCS is a total system solution for electrical
characterization of devices, materials and semiconductor processes.
This advanced parameter analyzer provides intuitive and sophisticated
capabilities for semiconductor device characterization by combining
unprecedented measurement sensitivity and accuracy with an embedded
Windows®-based operating system and the Keithley Interactive Test
Environment. It is a powerful single box solution.
To get a complete picture of any device or material, three fundamental
electrical measurement techniques are required. The Model 4200-SCS
offers all three.
• Precision DC Current-Voltage (I-V) measurements are the foundation of
a full characterization plan.
• AC Impedance, including the well known Capacitance-Voltage (C-V)
technique, provides information beyond what DC alone can provide.
• Pulsed and transient testing adds a time domain dimension and allows
for dynamic characteristics to be explored.
The 4200-SCS is modular, configurable and upgradeable. This allows
it to precisely meet today’s measurement needs and to expand to meet
tomorrow’s. Four core measurement modules can be mixed and matched
in the nine instrument slots.
• Up to nine precision DC Source-Measure units can supply voltage or
current and measure voltage or current from 0.1fA to 1A and from 1μV
to 210V.
• AC Impedance testing is easy with the Model 4210-CVU Multi-Frequency
C-V Module, at test frequencies from 1kHz to 10MHz. Capacitance from
aF to μF can be measured.
• Pulse and transient measurements can be performed with the Model
4225-PMU Ultra-Fast I-V module. This module has two independent
voltage sources that can slew the voltage at 1V/ns while simultaneously
measuring both the voltage and the current. When multiple modules are
installed, they are internally synchronized to less than 3ns.
• A choice of two different digital oscilloscope modules makes digitizing
waveforms easy and efficient.
Semiconductor
The Keithley Interactive Test Environment (KITE) supplies a complete,
graphical user interface that allows nearly any type of characterization
test to be performed with no programming required. Over 400 standard
characterization tests are provided, including those for: MOSFETs, BJT
transistors, diodes, resistors, capacitors, solar cells, carbon nanotubes,
and NVM memory technologies such as Flash, RRAM, PCRAM, and others.
Data is stored in industry standard spreadsheet formats. Any measured
or calculated data can be graphed in KITE’s sophisticated, report-ready
graphing tool.
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Model 4200-SCS Technical Data
4200-SCS
Semiconductor Characterization System
Technical Data
4200-SCS
Integrated industrial controller and additional RAM ensure high
test throughput, plus system robustness, stability, and security.
Store test setups and results
right on the system with the
high capacity fixed disk drive.
No sorting through disks to
find the desired test.
Communicate quickly
with a wide range of
PC accessories with the
built-in USB interface.
The 4200-SCS can be rack mounted. It has the same dimensions and occupies the same rack space as semiconducor parametric analyzers that
may already be in use.
Two LAN Ethernet ports
(10/100/1000) allow easy access
to network files and printers.
Model 4200-SCS Technical Data
The integrated DVD/CD-RW
drive allows high capacity
backup and data transfer.
High speed, high
precision ADC per
channel eliminates
performance
tradeoffs.
RS-232 port
Standard parallel printer port
Low noise
4200-SCP2 Digital Oscilloscope for
ground unit with
measuring pulses and monitoring waveforms
remote sense
4210-CVU Card for multi-frequency C-V testing
Configurable with from
two to nine SMUs and
optional sub-femtoamp
Remote PreAmps. Adding
high power SMUs won’t
restrict SMU capacity.
Dual-channel ultra-fast I-V module supports
pulse I-V testing and other pulse applications.
SVGA monitor port
Additional USB port
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Use the GPIB interface to control external instruments
or to allow external control of the 4200-SCS.
Semiconductor
Model 4200-SCS Technical Data
Industry-standard
Windows-based GUI
minimizes set-up
and integration time.
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Semiconductor Characterization System
Technical Data
4200-SCS
Configuration Options
The 4200-SCS supports many instrument configurations that can include SMUs, C-V measurement
units, ultra-fast I-V modules, pulse generators, and oscilloscopes. The standard configuration includes
two m
­ edium power Source-Measure Units (SMUs) and a Ground Unit.
Model 4200-SCS Technical Data
Standard 4200-SCS Models
4200-SCS/F
9 slot chassis with integrated controller
12.1˝ flat panel display
Two (2) Model 4200-SMU medium power SMUs
One (1) Remote Sense Ground Unit
LAN, GPIB, USB, RS-232, parallel port, hard disk, DVD/CD-RW
4200-SCS/C
9 slot chassis with integrated controller
Composite Front Bezel (i.e., no built-in display)
Two (2) Model 4200-SMU medium power SMUs
One (1) Remote Sense Ground Unit
LAN, GPIB, USB, RS-232, parallel port, hard disk, DVD/CD-RW
Pulse Generator
Source-Measure Units
Each system can be configured with up to seven additional SMUs, for a total of nine SMUs. Two SMU
models are available: a medium power (100mA, 2W) version (Model 4200-SMU) and a high power
(1A, 20W) version (Model 4210-SMU). The system can support up to nine high power SMUs.
4200-SCS Source-Measure Units
MaximumMaximumMaximum
VoltageCurrent Power
4200-SMU (medium power)
210V
100mA
2W
4210-SMU (high power)
210V
1A
20W
Semiconductor
Remote PreAmp
The low current measurement capabilities of
any SMU can be extended by adding an optional
Remote PreAmp (Model 4200-PA). The 4200-PA
provides 0.1fA resolution by effectively adding
five current ranges to either SMU model. The
PreAmp module is fully integrated with the
system; to the user, the SMU simply appears
to have additional meas­urement resolution
available. The Remote PreAmp is shipped
installed on the back panel of the 4200-SCS
for local operation. This installation allows for
standard cabling to a prober, test fixture, or
switch matrix. Users can remove the PreAmp
from the back panel and place it in a remote
location (such as in a light-tight enclosure or on
the prober ­platen) to eliminate measurement
problems due to long cables. Platen mounts
and triax panel mount accessories are available.
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Remote PreAmps are installed at the factory in
numerical order, i.e., SMU1, SMU2, SMU3 … up
to the number of PreAmps specified.
Capacitance-Voltage Instrument
C-V measurements are now as easy to perform
as I-V measurements with the integrated C-V
instrument, the Model 4210-CVU. This optional
capacitance-voltage instrument performs
capacitance measurements from femtofarads (fF)
to microfarads (µF) at frequencies from 1kHz
to 10MHz. It also supplies diagnostic tools that
ensure the validity of your C-V test results.
With this system, you can configure linear or
custom C-V, C-f, and C-t sweeps with up to
4096 data points. In addition, through the open
environment of the 4200-SCS, you can modify
any of the included tests.
The Model 4220-PGU Dual-Channel Pulse
Generator provides dual-channel pulsing
with voltage pulses as high as 40V and down
to 20ns pulse width. In addition to the pulse
capability, the 4200-PGU offers linear, arbitrary
waveform (ARB), and segment ARB™ (patent
pending) sweeps.
Remote Amplifier/Switch
The low current measurement capability of
the Model 4225-PMU can be extended by
adding the optional Model 4225-RPM Remote
Amplifier/Switch. The RPM effectively adds
three lower current ranges to any channel of
the 4225-PMU Ultra-Fast I-V module. The RPM
is fully integrated into the system software, so
to the user it simply looks like three additional
low current ranges. Additionally, the RPM
acts as a multiplexer switch, allowing users to
automatically switch between precision DC
SMUs, the CVU, or the Ultra-Fast I-V modules.
Oscilloscope
The system supports two dual-channel
integrated digital oscilloscope options: the
Model 4200-SCP2 offers 8-bit resolution with
a sample rate up to 2.5 gigasamples/second,
while the Model 4200-SCP2HR provides
16-bit resolution and a sample rate up to 400
megasamples/second. Both can be programmed
for automated measurement and data acquisition
or used with the stand-alone GUI application
provided to perform traditional ­oscilloscope
tasks. They provide measurements in both
the time (frequency, rise/fall time) and voltage
domains (amplitude, peak-peak, etc.).
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Perform ultra-fast (transient) I-V measurements
with the Model 4225-PMU. It provides
ultra-fast voltage waveform generation and
signal observation on its two channels of
integrated sourcing and measurement.
Each channel combines high speed voltage
outputs (including pulse widths from 60ns to
DC) with simultaneous current and voltage
measurements at a sample rate of up to 200
megasamples/second.
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Model 4200-SCS Technical Data
Ultra-Fast I-V Module
Semiconductor Characterization System
Technical Data
4200-SCS
Configuration Examples
The 4200-SCS’s plug-in chassis design offers exceptional configuration flexibility, as the following
examples illustrate. A chassis can contain up to nine SMUs in any combination of high and medium
powered units. Any configuration can be specified without a flat panel display by substituting
the 4200-SCS/C for the 4200-SCS/F. However, an external SVGA monitor is required to operate
the 4200-SCS/C.
One (1) Model 4200-SCS/F
Three (3) Model 4200-SMU medium power SMUs
One (1) Model 4200-PA Remote PreAmp module
One (1) Remote Sense Ground Unit
A general-purpose configuration for characterizing transistors and other devices.
Model 4200-SCS Technical Data
Configuration:
Description:
Maximum DC Configuration
One (1) Model 4200-SCS/F (includes two medium power SMUs as the standard
configuration, which can be substituted with two high power SMUs)
Seven (7) additional Model 4210-SMUs (total of nine; all nine can
be high power SMUs)
Nine (9) Model 4200-PA Remote PreAmp modules
Provides a nine-SMU system with 0.1fA sensitivity on all nine SMUs
and 1A capability on all nine SMUs.
Configuration:
Description:
Model 4200-SCS Technical Data
Basic Characterization System Configuration
Maximum Pulse Configuration
One (1) Model 4200-SCS/F
Four (4) Model 4225-PMU Ultra-Fast I-V modules (8 channels)
Note: More than four Model 4225-PMUs may be configured at reduced power
levels. Contact Keithley for details.
Four (4) Model 4200-SMUs
Four (4) Model 4200-PA Remote PreAmp modules
Provides a four-SMU system with four Model 4225-PMUs that provide eight
channels that support traditional pulse mode, arbitrary waveform mode (ARB),
Segment ARB™ waveform mode (Segment ARB or SARB), and trigger-in. Each
pulse channel contains an inline High Endurance Output Relay (solid-state relay).
Configuration:
Description:
One (1) Model 4200-SCS/F
Two (2) Model 4225-PMU Ultra-Fast I-V modules (4 channels)
Two (2) Model 4225-RPM Remote Amplifier/Switches
Two (2) Model 4200-SMU Medium Power SMUs
Two (2) Model 4210-SMU High Power SMUs
Four (4) Model 4200-PA Remote PreAmp modules
One (1) Model 4210-CVU Capacitance-Voltage Instrument
Provides an ultra-flexible multi-use system for a broad range of parametric tests,
including very low-level DC measurements, C-V, and ultra-fast I-V for pulse and
transient tests.
Configuration:
Description:
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Semiconductor
Example Broad Use Case Configuration
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Semiconductor Characterization System
Technical Data
4200-SCS
Hardware Specifications
Specification Conditions
Specifications are the performance standards against
which the Models 4200-SMU, 4210-SMU, and 4200-PA
are tested. The measurement and source accuracy are
specified at the termina­tion of the s­ upplied cables.
• 23°C ±5°C, within 1 year of calibration, RH
between 5% and 60%, after 30 minutes of warm-up.
• Speed set to NORMAL.
• Guarded Kelvin connection.
• ±1°C and 24 hours from ACAL.
Current SPECIFICATIONS
MEASURE
Model 4200-SCS Technical Data
Current
RANGE1
4200
SMU2
Medium
Power
SMU
4200-SMU and
4210-SMU with
optional
4200-PA PreAmp
4210SMU2
High
Power
SMU
Max.
VOLTAGE
1A
100mA
100mA
10mA
1mA
100µA
10µA
1µA
100nA
10nA
1nA
100pA
10pA
1pA
21 V
210 V
21 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
Resolution 3
1µA
100nA
100nA
10nA
1nA
100pA
10pA
1pA
100 fA
10fA
3fA
1fA
0.3fA
100 aA
SOURCE
Accuracy
±(% rdg + amps)
0.100% + 200µA
0.045% + 3µA
0.045% + 3µA
0.037% + 300nA
0.035% + 30nA
0.033% + 3nA
0.050% +600pA
0.050% + 100pA
0.050% + 30pA
0.050% + 1pA
0.050% + 100 fA
0.100% + 30 fA
0.500% + 15 fA
1.000% + 10 fA
Resolution 3
50µA
5µA
5µA
500nA
50nA
5nA
500pA
50pA
5pA
500fA
50fA
15fA
5fA
1.5fA
Accuracy
±(% rdg + amps)
0.100% +350µA
0.050% + 15µA
0.050% + 15µA
0.042% + 1.5µA
0.040% +150 nA
0.038% + 15 nA
0.060% + 1.5 nA
0.060% +200 pA
0.060% + 30 pA
0.060% + 3 pA
0.060% +300 fA
0.100% + 80 fA
0.500% + 50 fA
1.000% + 40 fA
Voltage Compliance: Bipolar limits set with a single value between full scale and 10% of selected voltage range.
Voltage SPECIFICATIONS
Voltage
RANGE1
200V 4
20V
2V
200mV
Max.
Current
4200-SMU
10.5 mA
105 mA
105 mA
105 mA
MEASURE
4210-SMU
105mA
1.05 A
1.05 A
1.05 A
Resolution3
200 µV
20 µV
2 µV
1 µV
SOURCE
Accuracy
±(% rdg + volts)
0.015% + 3 mV
0.01 % + 1 mV
0.012% +150µV
0.012% +100µV
Resolution3
5mV
500µV
50µV
5µV
Accuracy
±(% rdg + volts)
0.02% + 15 mV
0.02% + 1.5 mV
0.02% +300µV
0.02% +150µV
Current Compliance: Bipolar limits set with a single value between full scale and 10% of selected current range.
Semiconductor
Supplemental Information
Supplemental information is not warranted but provides useful infor­mation
about the Models 4200-SMU, 4210-SMU, and 4200-PA.
Compliance Accuracy:
Voltage compliance equals the voltage source specifications.
Current compliance equals the current source specifications.
Overshoot: <0.1% typical.
Voltage: Full scale step, resistive load, and 10mA range.
Current: 1mA step, R L = 10kΩ, 20V range.
Range Change Transient:
Voltage Ranging: <200mV.
Current Ranging: <200mV.
Accuracy Specifications: Accuracy specifications are multiplied by one of
the following factors, depending upon the ambient temperature and humidity.
% Relative Humidity
Temperature
5–60 60–80
10°–18°C
×3
×3
18°–28°C
×1
×3
28°–40°C
×3
×5
Remote Sense: <10Ω in series with FORCE terminal not to exceed a 5V difference between FORCE and SENSE terminals. ±30V maximum between
COMMON and SENSE LO.
Maximum load Capacitance: 10nF.
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Maximum GUARD Offset Voltage: 3mV from FORCE.
GUARD Output Impedance: 100kΩ.
Maximum GUARD Capacitance: 1500pF.
Maximum shield Capacitance: 3300pF.
4200-SMU and 4210-SMU Shunt resistance (FORCE to COMMON):
>1012Ω (100nA–1µA ranges).
4200-PA Shunt resistance (FORCE to COMMON): >1016Ω (1pA and
10pA ranges), >1013Ω (100pA–100nA ranges).
Output Terminal Connection: Dual triaxial connect­ors for 4200-PA,
dual mini-triaxial connectors for 4200-SMU and 4210-SMU.
Noise Characteristics (typical):
Voltage Source (rms): 0.01% of output range.
Current Source (rms): 0.1% of output range.
Voltage Measure (p-p): 0.02% of measurement range.
Current Measure (p-p): 0.2% of measurement range.
Maximum Slew Rate: 0.2V/µs.
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Model 4200-SCS Technical Data
DC SMU Hardware Specifications
Semiconductor Characterization System
Technical Data
Additional DC SMU Specifications
Max. Output Power: 22 watts for 4210-SMU and 2.2 watts for 4200-SMU
(both are four-quadrant source/sink operation).
DC Floating Voltage: COMMON can be floated ±32 volts from chassis
ground.
Measure
VoltageMeasure
Accuracy
RangeResolution
±(%rdg + volts)
200 V
200 µV
0.015% + 3 mV
20 V
20 µV
0.01% + 1 mV
2 V
2 µV
0.012% + 110µV
200mV
1 µV
0.012% + 80µV
Input Impedance: >1013Ω.
Input Leakage Current: <30pA.
Measurement Noise: 0.02% of measure­ment range (rms).
Differential Voltage Monitor:
Differential Voltage Monitor is available by measuring with two SMUs in VMU
mode or by using the low sense terminal provided with each SMU.
Temperature Range
Operating: +10° to +40°C.
Storage:
–15° to +60°C.
Humidity Range
Operating: 5% to 80% RH, non-condensing.
Storage:
5% to 90% RH, non-condensing.
Altitude
Operating: 0 to 2000m.
Storage:
0 to 4600m.
Power Requirements: 100V to 240V, 50 to 60Hz.
Maximum VA: 1000VA.
Regulatory Compliance:
Safety: European Low Voltage Directive.
EMC: European EMC Directive.
Dimensions: 43.6cm wide × 22.3cm high × 56.5cm deep (175⁄32 in × 83⁄4
in × 221⁄4 in).
Weight (approx.): 29.7kg (65.5 lbs) for typical configuration of four SMUs.
I/O Ports: USB, SVGA, Printer, RS-232, GPIB, Ethernet, Mouse, Keyboard.
NOTES
1. All ranges extend to 105% of full scale.
2. Specifications apply on these ranges with or without a 4200-PA.
3. Specified resolution is limited by fundamental noise limits. Measured resolution is
6½ digits on each range. Source resolution is 4½ digits on each range.
4. Interlock must be engaged to use the 200V range.
Ground Unit
Voltage error when using the ground unit is included in the 4200-SMU, 4210-SMU,
and 4200-PA specifications. No additional errors are intro­duced when using the
ground unit.
Output Terminal Connection: Dual triaxial, 5-way binding post.
Maximum Current: 2.6A using dual triaxial connection; 9.5A using
5-way binding posts.
Load Capacitance: No limit.
Cable Resistance: FORCE ≤1Ω, SENSE ≤10Ω.
RAMP RATE QUASISTATIC C-V TYPICAL
PERFORMANCE CHARACTERISTICS
MEASUREMENT PARAMETERS: Cp, DCV, timestamp.
RANGING: 1pF to 1nF.
Measurement Terminals: Triaxial guarded.
Ramp Rate: 0.1V/s to 1V/s.
DC Voltage: ±200V.
TYPICAL CP ACCURACY: 5% at 1v/s ramp rate.
Semiconductor
Model 4200-SCS Technical Data
Voltage Monitor (SMU in VMU mode):
General
Model 4200-SCS Technical Data
4200-SCS
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Semiconductor Characterization System
Technical Data
4200-SCS
Measurement Functions
Measurement Accuracy 4
Measurement parameters: Cp-G, Cp-D, Cs-Rs, Cs-D, R-jX,
Z-theta.
Ranging: Auto and fixed.
Measurement terminal configuration:
Four-terminal pair.
Connector type: Four SMA (female) connectors.
Cable length: 0m, 1.5m, 3m, or custom selectable.
Integration time: FAST, NORMAL, QUIET, and CUSTOM.
Example of C/G Measurement Accuracy
Test Signal
Frequency range: 1kHz to 10MHz.
Minimum resolution: 1kHz, 10kHz, 100kHz, 1MHz
depending on frequency range.
Source Frequency Accuracy: ±0.1%.
Signal output level Range: 10mV rms to 100mV rms.
Resolution: 1mV rms.
Accuracy: ±(10.0% + 1mV rms) unloaded (at rear panel).
Output impedance: 100W, typical.
DC Bias Function
DC voltage bias:
Range: ±30V (±60V differential).
Resolution: 1.0mV.
Accuracy: ±(0.5% + 5.0mV) unloaded.
Maximum DC Current: 10mA.
Measured
C
Frequency Capacitance Accuracy 1
1 pF
± 0.92%
10 pF
± 0.32%
10MHz 3
100 pF
± 0.29%
1 nF
± 0.35%
1 pF
± 0.38%
10 pF
± 0.16%
1MHz
100 pF
± 0.09%
1 nF
± 0.09%
10 pF
± 0.17%
100 pF
± 0.18%
100kHz
1 nF
± 0.08%
10 nF
± 0.08%
100 pF
± 0.26%
1 nF
± 0.15%
10kHz
10 nF
± 0.08%
100 nF
± 0.08%
1 nF
± 0.69%
10 nF
± 0.25%
1kHz
100 nF
± 0.10%
1 µF
± 0.15%
Supplemental Cable Specification 3
G
Accuracy 1, 2
± 260 ns
± 990 ns
± 9 µs
± 99 µs
± 42 ns
± 65 ns
± 590 ns
± 4 µs
± 15 ns
± 59 ns
± 450 ns
± 3 µs
± 15 ns
± 66 ns
± 450 ns
± 3 µs
± 40 ns
± 120 ns
± 500 ns
± 10 µs
Notes
Sweep Characteristics
Available sweep parameters: DC bias voltage, frequency,
AC voltage.
Sweep type: Linear, custom.
Sweep direction: Up sweep, down sweep.
Number of measurement points: 4096.
1. The capacitance and conductance measurement accuracy is specified
under the following conditions: DX < 0.1.
2. Conductance accuracy is specified as the maximum conductance
­measured on the referenced capacitor.
3. These specs are typical. Typical and supplemental specs are
non-­warranted, apply at 23°C, and are provided solely as useful
information.
4. Integration time: 1s or 10s below 10kHz.
Test signal level: 30mV rms.
At the rear panel of the 4210-CVU.
All specifications apply at 23°C ±5°C, within one year of calibration,
RH between 5% and 60%, after 30 minutes of warmup.
4210-CVU Typical C Accuracy with 1.5m Cables
(supplemental)
Measured
Capac­itance
1 pF
10 pF
100 pF
1 nF
10 nF
100 nF
1 µF
1 kHz
10 kHz 100 kHz 1 MHz 10 MHz
N/A
N/A
N/A
±0.72%
±0.28%
±0.12%
±0.17%
±8.38%
±0.94%
±0.29%
±0.17%
±0.12%
±0.13%
±0.21%
±1.95%
±0.21%
±0.20%
±0.12%
±0.13%
±0.22%
N/A
• C-V, C-t, and C-f measurements and analysis of:
– High and low k structures
–MOSFETs
–BJTs
–Diodes
– III-V compound devices
– Carbon nanotube (CNT) devices
• Doping profiles, TOX, and carrier lifetime tests
• Junction, pin-to-pin, and interconnect capacitance measurements
• Solar cells including Si, organic, thin film, CIGS, etc.
The C-V instrument integrates directly into the Model 4200-SCS
chassis. It can be purchased as an upgrade to existing systems or
as an option for new systems.
4210-CVU Typical C Accuracy with 3m Cables
(supplemental)
Measured
Capac­itance
1 pF
10 pF
100 pF
1 nF
10 nF
100 nF
1 µF
1 kHz
10 kHz 100 kHz 1 MHz 10 MHz
N/A
N/A
N/A
±0.72%
±0.28%
±0.12%
±0.17%
±8.5 %
±0.96%
±0.29%
±0.17%
±0.12%
±0.13%
±0.21%
±2.05%
±0.23%
±0.20%
±0.12%
±0.13%
±0.22%
N/A
N/A
±1%
±1%
±2%
±2%
N/A
N/A
The 4210-CVU includes a diagnostic tool called Confidence
Check. It allows users to check the integrity of open and short
connections and connections to a device-under test (DUT).
When the Model 4210-CVU is connected to a DUT, Confidence
Check displays the measured readings in real time. This also
allows Confidence Check to be used as a C-V meter to perform
quick and accurate measurements.
C-V POWER PACKAGE TYPICAL
PERFORMANCE CHARACTERISTICS
MEASUREMENT PARAMETERS: Cp-Gp, DCV, timestamp.
RANGING: 1pF to 1nF.
MEASUREMENT TERMINALS: 2-wire SMA, with BNC adapters.
TEST SIGNAL: 100kHz to 10MHz, 10mV to 100mV.
DC VOLTAGE SOURCE: ±200V with 5mV resolution.
DC CURRENT: 100mA or 300mA maximum.
TYPICAL CP ACCURACY @ 1MHz: 1.0%.
DC CURRENT SENSITIVITY: 10nA/V.
SMU BIAS TERMINALS SUPPORTED: 4.
Semiconductor
8
±0.57%
±0.21%
±0.17%
±0.18%
±0.27%
±1.16%
N/A
CVU Confidence Check
(U.S. only)
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N/A
±1%
±1%
±2%
±2%
N/A
N/A
Model 4200-CVU-Power
Specifications
Example of Included Libraries
1.888.KEITHLEY
±0.43%
±0.18%
±0.15%
±0.16%
±0.25%
±1.14%
N/A
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Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
Model 4210-CVU Specifications
Semiconductor Characterization System
Technical Data
4200-SCS
Typical Maximum Voltage and Current 6
The 4225-PMU represents a new generation of ultra-fast I-V measurement capability. Because
measurement speed is integrally linked to settling time, accuracy, resolution, and noise, the following chart was created to illustrate the typical measurement performance that can be achieved.
This chart is neither the maximum (best) performance nor a guaranteed specification; it is simply
intended to offer users an indication of the performance achievable with this new module. The
timing parameters below are the suggested minimums for the measurement type. These suggested
values do not include settling time for the interconnect or the device-under-test.
4225-PMU and 4220-PGU
TYPICAL MINIMUM TIMING PARAMETERS FOR CURRENT MEASUREMENT 1
4225-PMU Ultra-Fast I-V Module (with or without optional 4225-RPM Remote Amplifier/Switch)
40V Range
10 mA
800 mA
160 ns
70 ns
6.4 µs
770 ns
770 ns
20 ns
20 ns
1 µs
100 ns
100 ns
20 ns
20 ns
1 µs
100 ns
100 ns
15 µA
100 ns
50 µA
30 ns
75 nA
4 µs
5 µA
500 ns
200 µA
500 ns
6. To calculate the approximate maximum current and voltage for any resistance:
IMAX = V range/(50W + Resistance)
V MAX = I MAX · Resistance
where Resistance is the total resistance connected to the PMU or PGU channel and V range is
either 10 or 40.
Example: 10V range using R = 10W (for DUT + interconnect)
I MAX = V range/(50 + R) = 10/(50 + 10) = 10/60 = 0.167A
V MAX = I MAX · R = 0.167 · 10 = 1.67V
TYPICAL MINIMUM TIMING PARAMETERS FOR CURRENT MEASUREMENT 1
4225-RPM Remote Amplifier/Switch (RPM optional to 4225-PMU)
10V Range
10 µA
100 µA
100 nA
1 µA
1 mA
134 µs
20.4 µs
8.36 µs
1.04 µs
370 ns
160 ns
10 µs
1.64 µs
1 µs
130 ns
40 ns
20 ns
7. Typical maximum at pulse output connector. Resistance is the total resistance connected to the
pulse output connector, including device and interconnect.
10 mA
1 µs
360 ns
360 ns
40 ns
30 ns
20 ns
200 pA
100 µs
2 nA
15 µs
5 nA
6 µs
50 nA
750 ns
300 nA
250 ns
1.5 µA
100 ns
10V Range: Max. Output vs. DUT Resistance
10
TYPICAL MINIMUM TIMING PARAMETERS FOR VOLTAGE MEASUREMENT 1
4225-PMU and 4225-RPM
4225-PMU
4225-RPM
10 V
40 V
10 V
Voltage Measure Ranges
Recommended Minimum
70 ns
150 ns
160 ns
2
Pulse Width
Recommended Minimum
20 ns
20 ns
20 ns
Measure Window 2
Recommended Minimum
20 ns
100 ns
20 ns
Transition Time 3
2 mV
8 mV
1 mV
Noise 4
30 ns
30 ns
100 ns
Settling Time 5
0.18
0.16
0.14
6
0.12
5
0.10
4
0.08
3
0.06
2
0.04
0
V
I
1
100
0.02
0.00
10000
DUT Resistance (Ω)
40V Range: Max. Output vs. DUT Resistance
Notes for the Typical Performance WINDOW Section:
SMA to SMA cable, 2m, 4 ea (CA-404B)
SMA to SSMC Y-cable, 6 inch (15 cm), 2 each (4200-PRB-C)
0.20
7
40
4225-PMU Accessories Supplied
V
8
1
1. All typical values measured with an open circuit.
2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width =
(Settling Time) / 75%.
3. Recommended rise/fall time to minimize overshoot.
4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current
range, typical.
5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10mA settling time on the PMU 10V
range is defined when the signal is within 1.25% of the final value. This calculation: Accuracy = 0.25% + 100µA
= 0.25% + (100µA/10mA) = 0.25% + 1% = 1.25%).
I
0.8
0.7
30
0.6
25
0.5
20
0.4
15
0.3
10
0.2
0.1
V
0
SMA Cable, 8 inch (20 cm), 1 each (CA-452A)
Triax to BNC Adapter, 1 each (7078-TRX-GND)
BNC to SMA adapter, 1 each (CS-1247)
RPM Cable, 2.1 m, 1 each (CA-547-2A)
Magnetic Base, 1 each (4200-MAG-BASE)
V
35
5
4225-RPM Accessories Supplied
1.888.KEITHLEY
I
9
Max. Output Voltage (V)
Current Measure Ranges
Recommended Minimum
Pulse Width 2
Recommended Minimum
Measure Window 2
Recommended Minimum
Transition Time 3
Noise 4
Settling Time 5
I
1
100
0.0
10000
DUT Resistance (Ω)
Semiconductor
100 µA
Max. Current (A)
10V Range
10 mA
200 mA
40V Range
Maximum V 7 Maximum I 7
0.784V
784 mA
3.64V
727 mA
6.67V
667 mA
13.3V
533 mA
20.0V
400 mA
26.7V
267 mA
33.3V
133 mA
38.1V
38.1 mA
39.8V
3.98 mA
Max. Current (A)
Current Measure Ranges
Recommended Minimum
Pulse Width 2
Recommended Minimum
Measure Window 2
Recommended Minimum
Transition Time 3
Noise 4
Settling Time 5
10V Range
Maximum V 7 Maximum I 7
0.196V
196 mA
0.909V
182 mA
1.67V
167 mA
3.33V
133 mA
5.00V
100 mA
6.67V
66.7 mA
8.33V
33.3 mA
9.52V
9.5 mA
9.95V
995 μA
Resistance 7
1
W
5
W
10
W
25
W
50
W
100
W
250
W
1kW
10kW
Model 4200-SCS Technical Data
Typical Performance Window
Max. Output Voltage (V)
Model 4200-SCS Technical Data
4225-PMU, 4225-RPM, and 4220-PGU Specifications
(U.S. only)
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9
Semiconductor Characterization System
Technical Data
4200-SCS
4225-PMU and 4220-PGU Specifications 1
40V Range
–40 V to +40 V
–20 V to +20 V
±(0.2% + 20 mV)
<750 µV
<1.5 mV
±(3% + 80 mV)
±(2% + 20 mV)
±(0.3% + 1 mV) RMS typical
50 W Nominal
±(0.8% + 40 mV)
±(0.1% + 5 mV) RMS typical
50 W Nominal
±100 mA typical
±400 mA typical
50 W into 1 MW
50 W into 50 W
VOUT
VOUT
Accuracy
Resolution
Model 4200-SCS Technical Data
10V Range
–10 V to +10 V
–5 V to +5 V
±(0.5% + 10 mV)
<250 µV
<0.5 mV
±(3% + 20 mV)
50 W into 50 W
50 W into 1 MW
50 W into 50 W
50 W into 50 W, typical
best case
Overshoot/Pre-shoot/
Ringing 3
Baseline Noise
Source Impedance
Current into 50W Load
(at full scale)
Short Circuit Current
Output Connectors
Output Limit
TIMING
±200 mA
±800 mA
SMA
SMA
Programmable limit to protect the device under test
10 V Range
Source Only
1 Hz to 50 MHz
10 ns
10 V Range
with Meas.
1 Hz to 8.3 MHz
10 ns
40 V Range
Source Only
1 Hz to 10 MHz
10 ns
40 V Range
with Meas.
1 Hz to 3.5 MHz
10 ns
Frequency Range
Timing Resolution
RMS Jitter (period, width),
0.01% + 200 ps
0.01% + 200 ps
0.01% + 200 ps
0.01% + 200 ps
typical
20 ns to 1 s
120 ns to 1 s
100 ns to 1s
280 ns to 1s
Period Range
±1%
±1%
±1%
±1%
Accuracy
10 ns to (Period–10 ns) 60 ns to (Period–10 ns) 50 ns to (Period–10 ns) 140 ns to (Period–10 ns)
Pulse Width Range
±(1% + 200 ps)
±(1% + 200 ps)
±(1% + 5 ns)
±(1% + 5 ns)
Accuracy
Programmable
4
100 ns to 33 ms
10 ns to 33 ms
20 ns to 33 ms
30 ns to 33 ms
Transition Time (0%–100%)
±1%
±1%
±1%
±1%
Transition Slew Rate
(transitions > 100 ns)
(transitions > 100 ns)
(transitions > 1 µs)
(transitions > 100 ns)
Accuracy
Solid State Relay
25 µs
25 µs
25 µs
25 µs
Open/Close Time
CURRENT MEASUREMENT (4225-PMU Only)
10 V Range
Current Measure
10 mA
Ranges
±(0.25% + 100 µA)
Accuracy (DC)
40 V Range
200 mA
100 µA
10 mA
800 mA
±(0.25% + 250 µA)
±(0.25% + 1 µA)
±(0.5% + 100 µA)
±(0.25% + 3 mA)
4225-RPM CURRENT MEASUREMENT
Semiconductor
10 V Range
Current Measure
Ranges
Accuracy (DC)
100 nA
1 µA
±(0.5% + 1 nA)
±(0.5% + 1 nA)
100 µA
1 mA
±(0.5% + 30 nA) ±(0.5% + 100 nA) ±(0.5% + 1 µA)
10 mA
±(0.5% +10 µA)
4225-PMU and 4225-RPM VOLTAGE MEASUREMENT
Accuracy (DC)
±10V PMU
±(0.25% + 10 mV)
1.888.KEITHLEY
±40V PMU
±(0.25% + 40 mV)
±10V RPM
±(0.25% + 10 mV)
TRIGGER
TRIGGER OUTPUT IMPEDANCE: 50W.
TRIGGER OUTPUT LEVEL: TTL.
TRIGGER IN IMPEDANCE: 10kW.
TRIGGER IN LEVEL: TTL.
TRIGGER IN TRANSITION TIMING, MAXIMUM: <100ns.
TRIGGER IN TO PULSE OUTPUT DELAY: 400ns.
TRIGGER SYNCHRONIZATION/JITTER 5: <2ns.
Segment ARB® and TIMING
4220-PGU, 4225-PMU w/ or w/o 4225-RPM
Max. Number of Segments 6: 2048.
Max. Number of Sequences 6: 512.
Max. Number of Sequence Loops: 1012.
Time per Segment: 20ns to 40s.
Segment Timing Resolution: 10ns.
Control Parameters for Each Segment:
Start V
Stop V
Duration
Measurement window (PMU or PMU+RPM only)
Measurement type (PMU or PMU+RPM only)
RMS Jitter (Segment): 0.01 % + 200 ps typical.
Voltage Source Absolute
Best Performance
When used only as a voltage source (that is, without measurements of voltage or current), the Model 4225-PMU can actually
exceed the level of performance listed in these specifications.
The following table is provided only to offer the user a clearer
idea of the Model 4225-PMU’s absolute best performance as
achievable under optimal conditions. This should not be interpreted as a guarantee that the Model 4225-PMU will achieve this
level of performance in typical use cases.
10V Range:
Rise Time: <10ns.
Pulse Width: 10ns (full width half maximum).
Period: 20ns.
Overshoot/Preshoot/Ringing: ±(2% + 20mV).
40V Range:
Rise Time: 50ns to 10V, 100ns to 40V.
Pulse Width: 50ns.
Period: 100ns.
Overshoot/Preshoot/Ringing: ±(0.5% + 40mV).
(U.S. only)
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10
10 µA
1. Unless stated otherwise, all specifications assume a 50W termination.
2. Level specifications are valid after 50ns typical settling time (after
slewing) for the 10V source range and after 500ns typical settling time
(after slewing) for the 40V source range into a 50W load.
3. With transition time of 20ns (0%–100%) for the 10V source range and
100ns (0%–100%) for the 40V source range.
4. 40V Range minimum programmable transition time (source only) is
30ns for voltage <10V and 100ns for voltages >10V.
5. For multiple 4225-PMU or 4220-PGU cards in a single 4200-SCS chassis.
6. Per channel.
All specifications apply at 23° ±5°C, within one year of calibration, RH
between 5% and 60%, after 30 minutes of warmup.
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Model 4200-SCS Technical Data
Notes
PULSE/LEVEL 2
Semiconductor Characterization System
Technical Data
4200-BTI-A Ultra-Fast
NBTI/PBTI Option
Specifications
4225-RPM Remote Amplifier/Switch
Optional Accessory for the 4225-PMU
The 4225-RPM provides lower current measurement ranges to
the 4225-PMU.
• Low current measure ranges supports wide range of measurements, from nanotechnology to BTI (Bias Temperature
Instability) on leading-edge CMOS devices
• This is a single-channel accessory; order two Model
4225-RPMs to support the two channels of the Model
4225-PMU.
• Supports switching to the Model 4200-SCS’s SMUs or
4210-CVU, allowing for a wide range of tests without
re-cabling.
• Built-in bypass mode allows access to the Model 4225-PMU’s
higher current measurement ranges.
PULSE/LEVEL 1
VOUT
Accuracy 2 into open load
Resolution
Output Connectors
Baseline Noise
Overshoot/Pre-shoot/Ringing 3
4225-PMU with
4225-RPM
–10 V to +10 V
±(0.5% ± 10 mV)
<0.5 mV
Triaxes, source and sense
±(0.39% + 1 mV) RMS typical
±2% of amplitude ±20 mV
• One Model 4225-PMU Ultra-Fast I-V Module
4225-RPM REMOTE AMPLIFIER/SWITCH (must be used in conjunction with 4225-PMU)
• Two Model 4225-RPM Remote Amplifier/
Switches
Typical Minimum Timing Parameter for current measurement
• Automated Characterization Suite (ACS)
Standard Version 4.2 Software (or later)
• Ultra-Fast BTI Test Project Module
• Cabling
The Model 4200-BTI-A offers the best highspeed, low-current measurement sensitivity
available in a single-box integrated solution.
For example:
• Supports sub-microsecond pulse
characterization of drain current at reduced
drain voltage, minimizing drain-to-source
fields that could otherwise skew test results.
• Ensures that source/measure instrumentation
won’t be the limiting factor when making
low-level measurements.
The ACS software, which is provided in the
package, supports building complex test
sequences, including up to 20 measurement
sequences and full prober integration. It also:
• Easily integrates DC I-V and ultra-fast I-V
measurements into a pre- and post-stress
measurement sequence.
Range
100 nA
Recommended Minimum
134 µs
Pulse Width 4, 5
Recommended Minimum
10 µs
Measure Window 5
±(0.5% + 1nA)
Accuracy (DC)
Recommended Minimum
1 µs
Transition Time 5, 6
5,
7
200 pA
Noise
100 µs
Settling Time 5, 8
1 µA
10 µA
100 µA
1 mA
10 mA
20.4 µs
8.36 µs
1.04 µs
370 ns
160 ns
1.64 µs
1 µs
130 ns
40 ns
20 ns
±(0.5% + 1nA) ±(0.5% + 30nA) ±(0.5% + 100nA) ±(0.5% + 1µA) ±(0.5% + 10µA)
360 ns
360 ns
40 ns
30 ns
20 ns
2 nA
15 µs
5 nA
6 µs
50 nA
750 ns
300 nA
250 ns
1.5 µA
100 ns
Voltage Measure
Max. Voltage: ±10V.
Recommended Minimum Pulse Width 4, 5: 160ns.
Recommended Minimum Measure Window 5: 20ns.
Accuracy (DC): 0.25% + 10mV.
Recommended Minimum Transition Time 5, 6: 20ns.
Noise 5, 7: 1mV.
Settling Time 5, 8: 100ns.
Notes
1. Performance at the triax output connectors of the 4225-RPM when using a 2m RPM interconnect cable between the 4225-PMU and 4225-RPM Remote
Pulse Measure unit.
2. 100mV to 10V.
3. Typical, with transition time of 100ns (0%–100%).
4. Recommended minimum pulse width = (Settling time)/0.75.
5. Typical values, into an open.
6. Recommended rise/fall time to minimize overshoot.
7. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical.
8. Time necessary for the signal to settle to the DC accuracy level. (Example: the 10mA measurement range’s settling time refers to the period required
for the signal to settle to within 0.35% of the final value. Calculated as Accuracy = 0.25% + 10µA = 0.25% + (10µA/10mA) = 0.25% + 0.1% = 0.35%).
All specifications apply at 23° ±5°C, within one year of calibration, RH between 5% and 60%, after 30 minutes of warmup
• Characterizes degradation and recovery
behaviors using either AC or DC stress.
• Incorporates single pulse charge trapping
(SPCT) measurements into longer stressmeasure sequences.
1.888.KEITHLEY
Model 4200-SCS Technical Data
The Model 4200-BTI-A package is ideal
for wafer- and cassette-level automation. It
combines Keithley’s advanced DC I-V and
ultrafast I-V measurement capabilities with
automatic test executive software to provide
the most advanced NBTI/PBTI test platform
available in the semiconductor test industry.
The 4200-BTI-A package includes all the
instruments, interconnects, and software needed
to make the most sophisticated NBTI and PBTI
measurements on leading-edge silicon CMOS
technology, including:
Semiconductor
Model 4200-SCS Technical Data
4200-SCS
(U.S. only)
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11
Semiconductor Characterization System
Technical Data
4200-SCS
4200-SCP2 1.25GS Dual-Channel Oscilloscope Card and
4200-SCP2HR 200MS Dual-Channel Oscilloscope Card Specifications1
ANALOG-TO-DIGITAL CONVERTER
4200-SCP2
2
No. of Channels
DC to 750 MHz
Bandwidth (50W)
DC to 350 MHz
Bandwidth (1MW)
0.05, 0.1, 0.25, 0.5, 1, 2, 5,
Full Scale Input Range (50 W)
10 (Vp-p)
0.1, 0.2, 0.5, 1, 2.5, 5, 10, 20,
Full Scale Input Range (1 MW)
50, 100 (Vp-p)
<±1% of full scale
DC Gain Accuracy
Impedance
1 MW||12 pF or 50 W
±1%
Impedance Accuracy
DC or AC
Coupling
±(full scale range/2)
Offset Adjust
±(1% offset + 1% full scale)
Offset Accuracy
BNC
Input Connectors
±5V DC
Absolute Maximum Input (50 W)
±210V DC
Absolute Maximum Input (1 MW)
4200-SCP2HR
2
DC to 250 MHz, typical
DC to 125 MHz, typical
0.05, 0.1, 0.25, 0.5, 1, 2, 5,
10 (Vp-p)
0.25, 0.5, 1.25, 2.5, 5, 10, 25,
50 (Vp-p)
< ±0.25% of full scale
1 MW||12 pF or 50 W
±1%
DC or AC
±(full scale range/2)
±1%
BNC
±5V DC
±210V DC
Resolution
Sample Rate
Memory Depth
Acquisition Time Range
Acquisition Modes
4200-SCP2
4200-SCP2HR
8 bit
16 bit
2.5 kS/s to 1.25 GS/s in
10 kS/s to 200 MS/s in
1, 2.5, 5 steps
1, 2.5, 4, 5 steps
2.5 GS/s (1 channel interleaved) 400 MS/s (1 channel interleaved)
1 MS/channel
1 MS/channel
2 MS on 1 channel, interleaved
2 MS on 1 channel, interleaved
50 ns to 419 seconds
250 ns to 3,355 seconds
Normal, Average, Envelope, and Normal, Average, Envelope, and
Equivalent-time
Equivalent-time
TRIGGER
Trigger Source
Post-Trigger Delay
Pre-Trigger Delay
Trigger Hold Off Range
Trigger Modes
Edge Trigger Mode
Pulse Width Range
External Trigger Input
Connector
4200-SCP2
Channels 1 or 2, External,
Pattern, Software
0 to 655 seconds
0 to waveform time
0 to 655 seconds
Edge or Pulse Width
Rising or Falling Edge
20ns to 655 seconds,
10ns resolution
TTL Compatible,
10 kW input impedance
SMB
4200-SCP2HR
Channels 1 or 2, External,
Pattern, Software
0 to 655 seconds
0 to waveform time
0 to 655 seconds
Edge or Pulse Width
Rising or Falling Edge
20ns to 655 seconds,
10ns resolution
TTL Compatible,
10 kW input impedance
SMB
OPTIONAL SCOPE PROBE: 4200-SCP2-ACC
Bandwidth: 70MHz (4200-SCP2); 15MHz (4200-SCP2HR).
Attenuation: 1×.
Max DC: 300V DC rated.
Loading: 100pF and 1MW.
Length: 1m.
Connector: BNC.
NOTES
Semiconductor
1. Inputs are referenced to 4200 chassis ground
All specifications apply at 23°±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes
of warmup.
1.888.KEITHLEY
(U.S. only)
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Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
ANALOG INPUT1
Semiconductor Characterization System
Technical Data
4200-SCS
KTE Interactive Software Tools
KTE Interactive includes a variety of software tools for operating and maintaining the 4200-SCS:
• Keithley Interactive Test Environment (KITE)—The 4200-SCS device characterization application
Model 4200-SCS Technical Data
• Keithley Configuration Utility (KCON)—Allows test engineers to define the configuration of GPIB
instruments, switch matrices, and analytical probers connected to the 4200-SCS. It also provides
system diagnostics functions.
• Keithley External Control Interface (KXCI)—The 4200-SCS application for controlling the
4200-SCS from an external computer via the GPIB bus or Ethernet.
• KPulse—A graphical user interface (GUI) that is a non-programming alternative to configure and
control the installed Model 4225-PMU or 4220-PGU pulse generator cards. It is used for quick tests
requiring minimal interaction with other Model 4200-SCS test resources.
• KScope—A graphical user interface (GUI) that provides a non-programming alternative to control
the system’s scope card (either Model 4200-SCP2HR or Model 4200-SCP2).
Microsoft Windows
Windows Operating System
Model 4200-SCS Technical Data
• Keithley User Library Tool (KULT)—Allows test engineers to integrate custom algorithms into
KITE using 4200-SCS or external instruments. Requires optional Model 4200-COMPILER.
The operating system is a standard distribution of Microsoft Windows. Upgrades are available
for older systems. Contact the Keithley factory for supported versions and service packs.
Data Security and Recovery
Data security and recovery are handled by the included software package, Acronis True Image. This
utility can be used to create exact hard disk images, including all operating systems, applications and
configuration files, software updates, personal settings, and data. If failures occur that block access to
information or affect system operation, or if files are accidentally deleted, the user can easily restore
the system and lost data with the Acronis tool.
Data Storage
Fixed disk
Internal high capacity fixed disk drive stores the operating system, application programs,
and data files.
DVD/CD-RW Drive
Standard DVD/CD read-write drive is provided for data storage and retrieval.
USB Ports
Four USB 2.0 ports for typical PC USB peripherals.
Connectivity
Semiconductor
The 4200-SCS includes two LAN Ethernet ports (10/100/1000) with software drivers installed.
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Semiconductor Characterization System
Technical Data
4200-SCS
The Keithley Interactive Test Environment (KITE)
The Keithley Interactive Test Environment (KITE) is the Model 4200-SCS Windows device
characterization application. It provides advanced test definition, parameter analysis and graphing,
and automation capabilities required for modern semiconductor characterization.
KITE Projects
The project navigator organizes tests into a logical hierarchy presented in a browser style format.
This structure allows users to define projects around wafer testing:
The project level organizes subsites and controls wafer looping execution.
The subsite level organizes devices and controls subsite test sequencing and stress/measure looping.
The device level organizes test modules, manages test module libraries, and controls device
test sequencing.
The test module level performs tests, analyzes data, and plots results.
Selectable checkboxes allow enabling/disabling individual tests/plans.
Test Modules
Within KITE, two types of test modules are provided to capture the test input parameters, data
analysis, and plot setting for data. Interactive Test Modules provide a point-and-click interface for
defining test input parameters and controlling the 4200-SCS SMUs. User Test Modules provide a
fill-in-the-blank interface to either factory-provided or user-written C language subroutines. These
subroutines can control internal 4200-SCS instruments and/or external instruments and systems
through the RS-232 or GPIB interface. This dual approach provides an extendable test environment
that gives the users the same capabilities for data analysis, plotting, output, and automation, whether
the instrument used is part of the base system or an external instrument. It also offers users the
flexibility to write complex test algorithms for control of either internal or external instruments.
Definition Tab—Interactive Test Module
The Definition Tab of an ITM provides a point-and-click interface for setting test input parameters
that control the 4200-SCS SMUs and defining parameter extractions. Two modes are available:
Sweep Mode
Common, Voltage Bias, Current Bias (VMU), Voltage Sweep, Current Sweep,
Voltage Step, Current Step, Voltage List Sweep, Current List Sweep, Open,
C-V Differential Bias, C-V Frequency Sweep, Pulsed I-V, Waveform
Precision DC I-V SMU: Measure voltage, current, and timestamp up to 4096
points per SMU
Forcing
Functions
Measuring
Functions
Semiconductor
C-V (AC Impedance): Cp-Gp, Cs-Rs, Cp-D, Cs-D, R+jX, Z-theta, DCV, frequency,
timestamp up to 4096 points per sweep
Ultra-Fast I-V: Voltage and current (spot mean) simultaneously in Pulsed I-V
mode; voltage, current, and time digitized simultaneously in Waveform Capture
mode, up to 1 million digitized points
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Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
A project is a collection of related tests, organized in a hierarchy that parallels the physical layout
of the devices on a wafer. KITE operates on projects using an interface called the project navigator.
The project navigator simplifies organizing test files, test execution, and test sequencing.
Semiconductor Characterization System
Technical Data
4200-SCS
Sampling Mode
Ultra-Fast I-V: Simultaneous 14-bit, 5ns to 1ms sampling of voltage and current on up to 8 channels
with <3ns synchronization. 4096 data points on every channel. Up to 1 million data points per
channel in UTM mode.
Model 4200-SCS Technical Data
Interactive Test Modules (ITM) are built from
three different major functions: Definition,
Sheet, and Graph. The Definition Tab allows
the operator to define a sweep or sampling
mode test using a graphical approach. The
Sheet Tab stores acquired data and provides
an Excel®-like workbook for viewing and
analyzing test results. The Graph Tab provides
a full-featured data plotting tool capable of
producing report-ready graphs. The Status
Tab reports any errors that would interfere
with test execution.
Definition Tab—User Test Module
The Definition Tab of a UTM presents users a tabular fill-in-the-blank interface for entering input
parameters to call a C language subroutine. UTMs provide the ability to control internal SMUs and
GPIB and RS-232 devices. This screen allows the user to select a user library, a subroutine module,
and then enter the desired input parameters. Test results are returned to the Sheet Tab for viewing
and analysis. Select UTMs have a GUI interface to simplify operation.
The User Test Module (UTM) has virtually identical functionality as the
ITM. However, users enter input parameters in a tabular interface in
the UTM’s Definition Tab.
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GUI to control switch matrix UTMs.
Semiconductor
Model 4200-SCS Technical Data
Precision DC I-V or C-V: Linear sampling at fixed voltage, current, or frequency. Up to 4096 points.
Programmable hold time and interval time from 1ms to 1000s.
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Semiconductor Characterization System
Technical Data
4200-SCS
Data Analysis
Two methods of parameter extraction are available. The Formulator provides automated line fits
and parameter extraction. A spreadsheet offers standard spreadsheet analysis tools. Many of the
sample libraries include parameter extraction examples.
Formulator functions
Model 4200-SCS Technical Data
• Mathematical Functions
Addition (+), subtraction (-), division (/), multiplication (*), exponent (^), absolute value (ABS),
value at an index position (AT), Average (AVG), moving average (MAVG), conditional computation
(COND), derivative (DELTA), differential coefficient (DIFF), exponential (EXP), square root
(SQRT), natural logarithm (LN), logarithm (LOG), integral (INTEG), standard deviation (STDEV),
moving summation (SUMMV), arc cosine (ACOS), arc sine (ASIN), arc tangent (ATAN), cosine
(COS), sine (SIN), tangent (TAN)
• Conversion Functions
Radians to degrees (DEG), degrees to radians (RAD)
• Line Fits and Parameter Extraction Functions
Exponential line fit (EXPFIT), coefficient a (EXPFITA), coefficient b (EXPFITB)
Linear Fit (LINFIT), linear slope (LINFITSLP), x intercept (LINFITXINT), y intercept (LINFITYINT)
Logarithmic line fit (LOGFIT), coefficient a (LOGFITA), coefficient b (LOGFITB)
Linear Regression line fit (REGFIT), slope (REGFITSLP), x intercept (REGFITXINT), y intercept
(REGFITYINT)
Tangent line fit (TANFIT), slope (TANFITSLP), x intercept (TANFITXINT), y intercept
(TANFITYINT)
Polynomial line fit including POLYFIT2, POLY2COEFF, and POLYNFIT.
Maximum value (MAX), minimum value (MIN), midpoint (MEDIAN)
• Search Functions
Find Down (FINDD), Find Up (FINDU), Find using linear interpolation (FINDLIN)
Maximum position (MAXPOS), minimum position (MINPOS)
First Position (FIRSTPOS), Last Position (LASTPOS)
Sub Array (SUBARRAY), return a specified number of points (INDEX)
Formulator Constants
Semiconductor
The Formulator supports user-supplied constants for use in parameter extractions. These constants
are factory installed:
PI = 3.14159 rad (π)
K = 1.38065 × 10 –23 J/K (Boltmann’s constant)
Q = 1.60218 × 10 –19 C (Charge of electron)
M 0 = 9.10938 × 10 –31 kg (Electron mass)
EV = 1.60218 × 10 –19 J (Electron voltage)
U0 = 1.25664 × 10 –6 N/A2 (Permeability)
E0 = 8.85419 × 10 –12 F/m (Permittivity of a vacuum)
H = 6.62607 × 10 –34 J-s (Planck’s constant)
C = 2.99792 × 10 +8 m/s (Speed of light)
KT/Q = 0.02568 V (Thermal voltage)
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Model 4200-SCS Technical Data
The Formulator performs data transformations for performing parameter analysis and line fits.
The Formulator supports the following functions:
Semiconductor Characterization System
Technical Data
4200-SCS
Sheet Tab—Data Viewing and Analysis
Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
The Sheet Tab of a test module captures data from a test execution and allows calculations in a
spreadsheet. The Sheet Tab operates like an Excel workbook with the following spreadsheets:
Data, Calc, Settings, and Append.
Data Sheet
The Data sheet displays test results in real time. It is read-only so that results cannot be m
­ odified.
Calc Sheet
A spreadsheet that operates much like a standard Microsoft Excel spreadsheet is available for
computation with each test. The spreadsheet tool supports these functions:
Functions in the KITE Calc sheet
ABS
ACOS
ACOSH
ASIN
ASINH
ATAN
ATAN2
ATANH
AVERAGE
COS
COSH
EXP
FIXED
IF
LN
LOG
LOG10
LOOKUP
MATCH
MAX
MIN
NOW
PI
PRODUCT
ROUND
SIGN
SIN
SINH
SQRT
STDEVP
SUM
SUMSQ
TAN
TANH
VARP
Settings Sheet
Semiconductor
The Settings sheet stores the test setup so that when the Sheet tab is exported as a workbook,
users can refer to the test configuration. The test setups for multiple appends are also stored.
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Semiconductor Characterization System
Technical Data
4200-SCS
Append Sheet
Append sheets store test results when the Append button is clicked. Data
in Append sheets can
be automatic­ally plotted on the graph. Test modules support up to 40
Append sheets.
The Graph Tab is a full-featured plotting tool for ­creating report-ready
graphs. It allows real-time X-Y plotting of acquired and extracted data
with one or two Y axes.
• Dual graphs per tab.
• Linear, Semilog, and Log/Log graphs.
• Real-time auto scaling, end of test auto scaling, or manual scaling.
• Six cursors with X-Y readout.
• Graphical line fitting.
• Plot overlay of multiple test executions.
• Four data variable readouts.
• User-formatted comment box, title, and axis labels.
• Choice of engineering units on axes: V (volts), A (amps), s (seconds),
S (Siemens), F (farads), Hz (Hertz).
• Choice of engineering symbols on axes: m, μ, n, etc.
Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
Graph Tab—Plotting
Output
Files
• Sheet tab test results can be saved as a Microsoft Excel Workbook
or a delimited ASCII text file.
• Plots can be saved as bit map image (.bmp), JPEG (.jpg), or
TIFF (.tif) files.
Display
• Flat Panel: 1024 × 768 resolution.
• External SVGA: Up to 1920 × 1200 resolution.
Printers
Semiconductor
Windows printer drivers are used to support a wide variety of print and
plot devices.
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Semiconductor Characterization System
Technical Data
4200-SCS
Example Projects
The 4200-SCS includes the following KITE projects to facilitate rapid
startup and provide examples for common semiconductor lab applications.
CMOS-default: The tests in this project include the most common CMOS
device tests that a typical user might perform on a daily basis.
BJT-default: The tests in this project represent the most common BJT
tests that a typical user might perform on a daily basis.
Memory Projects
Reliability Projects
These projects test floating gate FLASH and embedded NVM memory.
They test up to four independent, multi-level pulse channels with up to
±40V pulsing on the gate. The waveforms can be predefined or custom.
These projects also offer three types of DUT setups: NAND, NOR, and
switch based.
EM_const_I: Tests electromigration using constant current. It also
controls a hot chuck.
Flash-NOR, Flash-NAND, Flash-Switch: These projects provide the ability
to send n pulses to the DUT, then perform a V T sweep. The tests in these
projects support four- and eight-terminal testing and allow investigation
into program and erase state dependencies on pulse parameters using
three types of waveforms: program, erase, and fast program erase. FlashSwitch also includes automatic control of Keithley’s Model 707B or Model
708B Switch Matrix.
FlashDisturb-NOR, FlashDisturb-NAND, FlashDisturb-Switch: The
Disturb tests pulse stress a device in an array test structure, then perform
a measurement, such as V T, on a device adjacent to the pulsed device.
The goal is to measure the amount of V T shift in adjacent cells, either in
the programmed or erased states, when a nearby device is pulsed with
either program, erase, or program+erase waveforms. FlashDisturb-Switch
also includes automatic control of Keithley’s Model 707B or Model 708B
Switch Matrix.
FlashEndurance-NOR, FlashEndurance-NAND, FlashEnduranceSwitch: These projects pulse stress the DUT with a number of
Program+Erase waveform cycles, then periodically measure the V T. The
purpose of these projects is to determine the lifetime of the DUT, based
on the number of program+erase cycles withstood by the device before a
certain amount of shift, or degradation, in the V T or other measurement.
They also control in-line solid-state relays for the erase waveform cycle.
FlashEndurance-Switch also includes automatic control of Keithley’s
Model 707B or Model 708B Switch Matrix.
HCI_4_DUT: This is a Hot Carrier Injection (HCI) project on two
4-­terminal N-MOSFETs and two 4-terminal p-MOSFETs with a switch
matrix. Parameters monitored between two successive stresses include
IDoff, IDon, IG, V T, and Gm. Those parameters are measured on both
forward (normal operation condition) and reverse (reverse source and
drain bias) conditions. If only a subset of these parameters is needed, it
is possible to deselect the test(s) that include the unwanted parametric
measurements. It is also possible to add custom tests that will be
monitored between successive stresses. Also, if less than four devices are
tested, it is possible to deselect the unwanted device plan in the project
tree or modify it for more devices.
HCI_PULSE: This Hot Carrier Injection (HCI) project tests one 4-terminal
N-MOSFET using AC stress. It is similar to HCI_1_DUT.
NBTI_1_DUT: This is a Negative Bias Temperature Instability (NBTI)
project on one 4-terminal P-MOSFET. Parameters monitored between two
successive stresses include IDoff, IDon, IG, V T, and Gm. If only a subset of
these parameters is needed, it is possible to deselect the test(s) that include
the unwanted parametric measurements. It is also possible to add custom
tests that will be monitored between successive stresses.
PMU-Flash-NAND: Demonstrates the FLASH memory testing capabilities
of the Model 4225-PMU.
PRAM: Tests a Phase Change Random Access Memory (PRAM or PCRAM)
device using the Model 4225-PMU. Includes set, reset, I-V, and RI tests.
RRAM: Tests Resistive Random Access Memory (RRAM, Memristor) devices
using the Model 4225-PMU. Includes conditioning, set, reset, I-V, and
other tests.
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HCI_1_DUT: This is a Hot Carrier Injection (HCI) project on one
4-terminal N-MOSFET. No switch matrix is involved in the measurement.
Parameters monitored between two successive stresses include IDoff,
IDon, IG, V T, and Gm. Those parameters are measured on both forward
(normal operation condition) and reverse (reverse source and drain bias)
conditions. If only a subset of these parameters is needed, it is possible to
deselect the test(s) that include the unwanted parametric measurements.
It is also possible to add custom tests that will be monitored between
successive stresses.
Model 4200-SCS Technical Data
BJT Project
Default—The default project includes standard tests for MOSFETs,
BIPOLAR transistors, resistors, and diodes. This project helps users get
started quickly.
Qbd: This charge-to-breakdown project consists of two QBD tests on gate
dielectrics (V-Ramp and J-Ramp). Those two tests follow JEDEC Standard
35-A. An additional test performs an I-V measurement under normal work
conditions to obtain input parameters for the V-Ramp and J-Ramp tests.
Semiconductor
Model 4200-SCS Technical Data
Default Project
CMOS Project
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Semiconductor Characterization System
Technical Data
Pulse Projects
C-V Projects
Chargepumping: This project consists of Charge Pumping (CP) tests that
characterize interface and charge-trapping phenomena. There are a variety
of tests, including base sweep, amplitude sweep, rise time linear sweep,
fall time linear sweep, frequency linear sweep, and frequency log sweep.
CVU_BJT: Measures capacitance (at 0V bias) between terminals, including
Cbe, Cbc, and Cec.
ChargeTrapping: The Charge Trapping project uses a single pulse
technique to look at device charge trapping and de-trapping behavior
within a single, well-configured gate pulse. During the rise and fall times
of the voltage ramp, the corresponding drain current response is captured,
­allowing appropriate VGS –ID curves to be formed.
CVU_InterconnectCap: Measures C-V of small interconnect capacitance
on wafer.
ivpgswitch_340x: The tests in this project demonstrate automated device
testing using a 4200-SCS, a Keithley Model 3402 pulse generator, and a
switch matrix.
CVU_ivcvswitch: Demonstrates using DC SMUs, 4210-CVU, and
707B/708B (switch matrix) in one project. Switches back and forth
between DC and C-V tests and connections to the DUT.
ivpgswitch: The tests in this project demonstrate automated device
testing using a 4200-SCS, an HP8110A/81110A pulse generator, and a
switch matrix.
CVU_Lifetime: Determines generation velocity and lifetime testing
(Zerbst plot) of MOS capacitors.
PMU-MOSFET: Contains test modules for performing measurements on a
MOSFET, including generating DC and pulsed I-V drain families of curves
and gate voltage vs. drain current measurements.
CVU_MOScap: Measures C-V on a MOS capacitor. Extracted parameters
include oxide capacitance, oxide thickness, doping density, depletion
depth, Debye length, flatband capacitance, flatband voltage, bulk potential,
threshold voltage, metal-semiconductor work function difference, and
effective oxide charge.
PulseIV-Complete: This project provides PIV (pulse IV) tests, including
tests that generate ID vs. V D graphs and ID vs. VG graphs as well as tests that
show the effect of self-heating on devices due to DC voltages. (This is the
primary sample project included in the 4200-PIV-A package.)
QPulseIV-Complete: This project includes PIV-Q tests that generate ID
vs. V D and IG vs. V D graphs for a FET as well as calibration routines. This
project is used to run characterization curves on III-V and LDMOS high
power devices using the pulse technique and a non-zero quiescent point.
Semiconductor
Solar Cell Project
CVU_highV: Performs C-V and C-T sweeps using the Model 4200-CVUPWR C-V Power Package up to 400V.
CVU-MobileIon: Determines mobile charge using the bias-temperature
stress method. Extracts flatband voltage. Includes built-in control of a hot
chuck to test a sample at room temperature, heated, then tested again at
room temperature to determine flatband shift.
PMU-DUT-Examples: Contains example test modules to test a MOSFET
using the Model 4225-PMU.
PMU-Switch: Provides examples for switching between the Model
4225-PMU, 4200-SMU, and 4200-CVU to the DUT.
CVU_MOSFET: Makes a C-V sweep on a MOSFET device. Extracted/
calculated parameters include oxide thickness, oxide capacitance, flatband
capacitance, flatband voltage, threshold voltage, and doping concentration
as a function of depletion depth.
CVU_nanowire: Makes a C-V sweep on a two-terminal nanowire device.
CVU_PNjunction: Measures the capacitance of a p-n junction or Schottky
diode as a function of the DC bias voltage across the device.
SolarCell: This project is designed for photovoltaic cells of all types,
including crystalline, amorphous, and thin film. I-V, C-V, and resistivity
tests are included.
CVU_PVcell: Measures both forward and reverse biased DC characteristics
of an illuminated solar cell and extracts parameters such as max power,
max current, max voltage, short-circuit current, open-circuit voltage, and
efficiency. Also performs characteristic C-V and C-f sweeps.
Nanotechnology Project
default: Standard C-V sweeps for generic MOSFETs, diodes, and c­ apacitors.
NanoDevices: This project is designed specifically for Nanotechnology
applications and includes the most common tests for nanowires,
nanotubes, molecular and CNT transistors, and biocomponents.
ivcvswitch: The tests in this project demonstrate the 4200-SCS’s integra­ted
I-V, C-V, switching, and probing capabilities.
lifetime: The lifetime project performs high frequency C-t measurements
using the Keithley System 82 on MOS capacitors. The minority carrier
recombination lifetime and surface velocity are extracted using
a Zerbst Plot.
QSCV: Performs Quasistatic C-V using the 4200’s SMUs and PAs using the
Ramp Rate method.
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CVU_Capacitor: Performs both a C-V sweep and a C-f sweep on a MetalInsulator-Metal (MIM) capacitor and calculates standard deviation.
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Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
4200-SCS
Semiconductor Characterization System
Technical Data
Automation
SIMCV: This project provides routines for simultaneous C-V measurement
using the Keithley System 82. Typical MOS device parameters, such as
doping profile, flat band voltage, threshold voltage, interface trap density,
and band bending are extracted.
Test Sequencing
The Keithley Interactive Test Environment (KITE) provides “point and
click” test sequencing on a device, a group of devices (subsite, module,
or test element group), or a user-programmable number of probe sites
on a wafer.
Prober Control
Keithley provides integrated prober control for supported analytical
probers when test sequencing is executed on a user-programmable number
of probe sites on a wafer. Contact the factory for a list of supported
analytical probers. A “manual” prober mode prompts the operator to
perform prober operations during the test sequence.
Miscellaneous Projects
FourPtProbe: This project enables users to make four-point collinear
probe measurements on semiconductor materials.
ivswitch: The ivswitch project integrates control of a Keithley Model 707B
or Model 708B external switch matrix with device testing.
Supported Probers
Manual Prober
probesites: The probesites project illustrates how KITE controls semiautomatic probe stations for automated probing of one subsite per site
on a single wafer.
Use the manual prober driver to test without utilizing automatic prober
functionality. Manual prober replaces all computer control of the prober
with that of the operator. At each prober command, a dialog box appears,
instructing the operator what operation is required.
probesubsites: The probesubsites project illustrates how KITE controls
semi-automatic probe stations when testing multiple subsites per site on
a single wafer.
Fake Prober
The Fake prober is useful when prober actions are not desired, such
as when debugging, without having to remove prober commands from
a sequence.
vdp_resistivity: This project enables users to make Van der Pauw
measurements on semiconductor materials.
LowCurrent: This project demonstrates sub-10fA performance on
four SMUs.
Supported Semi-automatic (Analytical) Probers
Cascade Microtech Summit™ 12K Series, verified with Nucleus UI
Demonstration Projects
Demo-Default: The tests in this project demonstrate the most common
DC tests on an FET. Also, new features that were recently introduced are
demonstrated, including pulse SMU, dual sweep, and selecting Engineering
labels for the axes.
Demo-ALL: This project collects more than 400 different test libraries in
one convenient location.
Karl Suss Model PA-200, verified with Wafermap for ProberBench NT, ­NIGPIB Driver for ProberBench NT, PBRS232 Interface for ProberBench NT,
Navigator for ProberBench NT, Remote Communicator for ProberBench NT
MicroManipulator 8860 Prober, verified with pcBridge, pcLaunch, pcIndie,
pcWfr, pcNav, pcRouter
Signatone CM500 driver also works with other Signatone probers with
interlock controller such as the WL250 and S460SE
Optional Software
Automated Characterization Suite (ACS) for reliability testing, general
characterization, and lab automation. For more information on these
capabilities, refer to the ACS Systems data sheet.
Semiconductor
Model 4200-SCS Technical Data
STVS: This project uses the Keithley System 82 to perform an STVS
(Simultaneous Triangular Voltage Sweep) measurement at high
temperature. Mobile ion density is extracted.
Model 4200-SCS Technical Data
4200-SCS
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Semiconductor Characterization System
Technical Data
Keithley User Library Tool (KULT)
ki340xulib
For use with Keithley Series 3400 pulse/pattern generators.
Model 4200-SCS Technical Data
(Requires optional Model 4200-COMPILER)
The Keithley User Library Tool supports creating and integrating
C-language subroutine libraries with the test environment. User library
modules are accessed in KITE through User Test Modules. Factory supplied
libraries provide up and running capability for supported instruments.
Users can edit and compile subroutines, then integrate libraries of
subroutines with KITE, allowing the 4200-SCS to control an entire test rack
from a single user interface.
Standard User Libraries
ki595ulib
The ki595ulib user library performs Q/t sweeps and C-V sweeps using
the Keithley Model 595 Quasi­static C-V Meter.
kiscopeulib
The kiscopeulib UTMs control either the Model 4200-SCP2HR or
4200-SCP2 oscilloscope.
chargepumping
This library can be used to study charge trapping and new charge
creation on a high κ–Si interface and within high κ film.
matrixulib
The matrixulib user library connects instrument terminals to output
pins using a Keithley 707B or 708B switch system when configured
as a general-purpose (Model 4200-GP-RS-XX), low current (Model
4200-LC-LS-XX) or ultra-low current (Model 4200-UL-RS-XX
or Model 4200-UL-LS-XX) matrix.
hotchuck-temptronics-3010b
This user library controls the temperature of Temptronics 3010b
hotchucks. This library sets the target temperature and waits until
the target is reached before exiting.
parlib
The hotchuck_triotek user library controls the temperature of TrioTek
hot chucks. This library sets the target temperature and waits until the
target is reached before exiting.
The parlib user library is used for extracting device parameters on
bipolar and MOSFET transistors. Extracted parameters include Beta,
resistance, threshold voltage, and V DS –ID sweeps and VGS –ID sweeps
for MOSFETs.
hp4284ulib
prbgen
The hp4284ulib user library performs capacitance measurements and
C-V sweeps using the Agilent 4284A or 4980 LCR meter.
hp4294ulib
The hp4294ulib user library performs capacitance measurements, C-V
sweeps, and frequency sweeps using the Agilent 4294 LCR meter. This
library also includes calibration routines to perform phase, open, short,
and load calibrations.
The prbgen user library provides test modules to initialize the prober
driver, move to the next site or subsite in the prober’s wafer map,
make or break contact between the probes and the wafer, and obtain
the X position and Y position of the prober. Contact the factory for
supported probers.
winulib
The winulib user library provides user interface routines for
operator inputs and prompts, such as the abort, retry, and ignore
decision prompts.
hp8110ulib
The hp8110ulib user library performs initialization, setup, and
triggering for the Agilent HP8110A (or 81110A) pulse generator.
wlrlib
ki42xxulib
Semiconductor
The ki590ulib user library performs conductance measurements and
100kHz or 1MHz capacitance measurements, C-V sweeps, C-V pulse
sweeps, C-t sweeps, and cable compensation for the Keithley Model
590 C-V Analyzer.
kipulseulib
The kipulseulib UTMs control the Model 4205-PG2, 4220-PGU, or
4225-PMU pulse card.
The 4200-SCS includes the following subroutine libraries, which provide
“out of the box” integration and control of Keithley switch matrix systems
and other common device characterization equipment. Users access these
libraries with the UTM definition tab described on page 15.
hotchuck_triotek
The wlrlib user library includes routines for performing linear
regression and charge-to-breakdown tests (QBD) on gate dielectrics.
Included modules are qbd_rmpv (V-Ramp method) and qbd_rmpj
(J-Ramp method).
The ki42xxulib user library provides an example subroutine for
performing a MOSFET ON resistance (RON) test routine using the
4200-SCS LPTLIB interface.
ki82ulib
The ki82ulib user library performs simultaneous C-V, C-t, and Q/t
measurements and cable compensation for the Keithley System 82
Simultaneous C-V System.
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ki590ulib
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Model 4200-SCS Technical Data
4200-SCS
Semiconductor Characterization System
Technical Data
Keithley External Control
Interface (KXCI)
C language
Microsoft Visual Studio Professional (optional Model 4200-COMPILER)
provides the compiler for the Keithley User Library Tool (KULT). Users
can develop test subroutine libraries using the full capabilities of
C-language programming.
Model 4200-SCS Technical Data
LPTLIB Control
The LPTLIB provides an application programming interface for developing
C-language test routines that control integrated test hardware and
supported external instruments and switches. This simple connect/source/
measure approach eliminates the need for low-level programming and
allows the user to focus on creating new test routines quickly.
Support Contracts
Note: ISO-17025/2540.3 accredited calibrations are also available for the base
system. Call Keithley for more information.
System Configuration and
Diagnostics (KCON)
On-Site Services
The Keithley Configuration Utility (KCON) simplifies programming and
maintaining a fully integrated test station. KCON provides a single interface
for configuring external instruments, switch matrices, and analytical
probers, and for executing system d­ iagnostics.
Our field service engineers can perform some calibrations and repair
services at your facility. Call Keithley to ask about on-site services for
the 4200-SCS.
Off-Site Services
Base System
External Instrument Configuration
KCON allows lab managers to integrate external instruments with the
4200-SCS and a supported switch matrix. After the user configures the
GPIB addresses for supported instruments, Keithley-supplied libraries will
function and test modules can be transferred between 4200-SCS systems
without any user modification. In addition to the standard supported
instruments, the General Purpose Instrument allows users to develop
subroutines and control switches for a generic two-terminal or fourterminal instrument. For the widest possible system extensibility, users
can develop their own test libraries for general purpose instruments.
4200-3Y-EW 1-year factory warranty on the base 4200-SCS
(including all SMUs and PAs) extended to 3 years
from date of shipment. Includes calibration (reports
compliant to ANSI Z540-1) and return shipping.
4200-5Y-EW 1-year factory warranty on the base 4200-SCS
(including all SMUs and PAs) extended to 5 years
from date of shipment. Includes calibration (reports
compliant to ANSI Z540-1) and return shipping.
4200-3Y-CAL
3 calibrations within 3 years of purchase of the base
4200-SCS (including all SMUs and PAs). Before and
after data reports compliant with ANSI/NCSL Z540-1.
Does not cover Scope or Pulse Generator Cards.
4200-5Y-CAL
5 calibrations within 5 years of purchase of the base
4200-SCS (including all SMUs and PAs). Before and
after data reports compliant with ANSI/NCSL Z540-1.
Does not cover Scope or Pulse Generator Cards.
Switch Matrix Configuration
Users define the connection of 4200-SCS instruments and external
instruments to device under test (DUT) pins through a supported switch
matrix configuration. (See Switch Matrix Support and Configurations).
Once connections are defined, users need only enter the instrument
terminal name and pin number to establish connections. The 4200-SCS
applications and standard user libraries manage the routing of test
signals between instrument terminals and DUT pins. The user doesn’t
need to remember and program row and column closures. Test
modules can transfer between 4200-SCS systems without re-entering
connection information.
Oscilliscope Option
4200-SCP2-3Y-EW
1-year factory warranty on the 4200-SCS Scope Card
(Standard or HR version) extended to 3 years from
date of shipment. Includes calibration and return
shipping. Requires purchase of 4200-3Y-EW.
4200-SCP2-5Y-EW
1-year factory warranty on the 4200-SCS Scope Card
(Standard or HR version) extended to 5 years from
date of shipment. Includes calibration and return
shipping. Requires purchase of 4200-5Y-EW.
4200-SCS Instrument Diagnostics
Users can confirm system integrity of SMUs, C-V measurement unit, pulse
generator, oscilloscopes, and Remote PreAmps by running a system selftest. For more complex problems, the system’s configuration analysis
tool can generate reports that assist Keithley’s Technical Support staff in
diagnosing problems.
1.888.KEITHLEY
Model 4200-SCS Technical Data
With KXCI, you can use an external computer to control the SMUs and
CVU modules in the Model 4200-SCS directly. KXCI also provides you with
indirect control of the Ultra-fast I-V and Oscilloscope modules using UTMs
via either the built-in GPIB or Ethernet. For the SMUs, the KXCI command
set includes an HP 4145 compatibility mode, allowing many programs
already developed for the HP4145 to use the 4200-SCS instead.
Semiconductor
4200-SCS
(U.S. only)
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Semiconductor Characterization System
Technical Data
4200-SCS
Support Contracts
Value-Add Services
Off-Site Services
APPS SERVICE Customized applications assistance. Examples include:
Oscilliscope Option (continued)
• Software services – KULT/UTM development and
customization
4200-SCP2-5Y-CAL 5 calibrations within 5 years of purchase of the 4200SCS Scope Card (Standard or HR version). Requires
purchase of 4200-5Y-CAL.
Training services are available. Please contact Keithley for information.
4220-PGU-3Y-EW
1-year factory warranty on the 4220-PGU Dual-Channel
Pulse Generator extended to 3 years from date of
shipment. Includes calibration and return shipping.
Requires purchase of 4200-3Y-EW.
4220-PGU-5Y-EW
1-year factory warranty on the 4220-PGU Dual-Channel
Pulse Generator extended to 5 years from date of
shipment. Includes calibration and return shipping.
Requires purchase of 4200-5Y-EW.
Other Upgrades
4220-PGU-3Y-CAL
3 calibrations within 3 years of purchase of the
4220-PGU Dual-Channel Pulse Generator. Requires
purchase of 4200-3Y-CAL.
4220-PGU-5Y-CAL
5 calibrations within 5 years of purchase of the
4220-PGU Dual-Channel Pulse Generator. Requires
purchase of 4200-5Y-CAL.
4200-KTEI-x.x 4200-SCS Keithley Test Environment Interactive (KTEI)
complete software test suite (latest version). Includes
installation CD and instructions. Not available for Version
1 (Windows NT) chassis.
4225-PMU-3Y-EW
4225-PMU-5Y-EW
4225-PMU-3Y-CAL
Semiconductor
• System development – integration of a 4200-SCS
with other elements of a test system, such as a switch
matrix or a C-V meter
Pulse Generator Option
Ultra-Fast I-V Module Option
4225-PMU-5Y-CAL
1-year factory warranty on both the 4225-PMU UltraFast I-V Module and the 4225-RPM Remote Amplifier/
Switch extended to 3 years from date of shipment.
Includes calibration and return shipping. Requires
purchase of 4200-3Y-EW.
1-year factory warranty on both the 4225-PMU UltraFast I-V Module and the 4225-RPM Remote Amplifier/
Switch extended to 5 years from date of shipment.
Includes calibration and return shipping. Requires
purchase of 4200-5Y-EW.
3 calibrations within 3 years of purchase of both the
4225-PMU Ultra-Fast I-V Module and the 4225-RPM
Remote Amplifier/Switch. Requires purchase of
4200-3Y-CAL.
5 calibrations within 5 years of purchase of both the
4225-PMU Ultra-Fast I-V Module and the 4225-RPM
Remote Amplifier/Switch. Requires purchase of
4200-5Y-CAL.
1.888.KEITHLEY
Visit Keithley’s Technical Support Web Forums to get answers to your
product support and applications questions 24/7.
Besides adding the instrument modules listed on page 28, there are
other upgrades available for the 4200-SCS/x.
4200-Upgrade Required installation and calibration service when any
instrument module is added to any 4200-SCS chassis.
Only one 4200-Upgrade required per instrument module
upgrade order. Not required for 4200-Chassis-Refurb or
the 4200-Complete-Refurb.
4200-Chassis-Refurb
This upgrade service will take Version 2 and Version
3 chassis and upgrade them to the latest instrument
backplanes, displays, power supplies, etc. It does not
include a new CPU board. Not compatible with Version 1
(Windows NT) systems.
4200-Complete-Refurb
This upgrade service will bring any 4200-SCS chassis
(including Version 1 Windows NT systems) up to the
latest CPU and instrument capability.
Note: 4200-Chassis-Refurb and 4200-Complete-Refurb restores
the 4200-SCS to factory conditions, including re-formatting the
hard drive. All existing data and programs will be lost. Be sure to
create a backup of all data and projects prior to ordering either of
these upgrades.
(U.S. only)
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• Applications assistance – test plan development, test
process optimization, measurement troubleshooting
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Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
4200-SCP2-3Y-CAL 3 calibrations within 3 years of purchase of the 4200SCS Scope Card (Standard or HR version). Requires
purchase of 4200-3Y-CAL.
Semiconductor Characterization System
Technical Data
Caution: Keithley Instruments warrants the performance of the Model
4200-SCS only with the factory-approved Windows Operating System
and applications software pre-installed on the 4200-SCS by Keithley
Instruments. Systems that have been modified by the addition of
un-approved third-party application software (software that is not explicitly
approved and supported by Keithley Instruments) are not covered under
the product warranty. Model 4200-SCS systems with unapproved software
may need to be restored to factory approved condition before any warranty
service can be performed (e.g., calibration, upgrade, technical support).
Services provided by Keithley Instruments to restore systems to factory
approved condition will be treated as out-of-warranty services with
associated time and material charges. Approved software is listed in the
Reference Manual and under “Approved Third-Party Software” on page
25 of this document.
Caution: DO NOT reinstall or upgrade the Windows operating
system (OS) on any Model 4200-SCS. This action should only be
performed at an authorized Keithley service facility. Violation of this
precaution will void the Model 4200-SCS warranty and may render
the Model 4200-SCS unusable. Any attempt to reinstall or upgrade
the Windows operating system will require a return-to-factory repair
and will be treated as an out-of-warranty service, including time and
material charges.
Warranty Information
Warranty Summary
This section summarizes the warranties of the 4200-SCS. For complete
warranty information, refer to the 4200-SCS Reference Manual. Any
portion of the product that is not manufactured by Keithley is not
covered by this warranty and Keithley will have no duty to enforce any
other manufacturer’s warranties.
Hardware Warranty
Keithley Instruments, Inc. warrants the Keithley manufactured portion
of the hardware for a period of one year from defects in materials
or workmanship; provided that such defect has not been caused
by use of the Keithley hardware which is not in accordance with
the hardware instructions. The warranty does not apply upon any
modification of Keithley hardware made by the customer or operation
of the hardware outside the environmental specifications.
Software Warranty
Keithley warrants for the Keithley produced portion of the software
or firmware will conform in all material respects with the published
specifications for a period of ninety (90) days; provided the software
is used on the product for which it is intended in accordance with the
software instructions. Keithley does not warrant that operation of the
software will be uninterrupted or error-free, or that the software will
be adequate for the customer’s intended application. The warranty
does not apply upon any modification of the software made by the
customer.
Approved Third-Party Software:
Acronis True Image (OEM)
Adobe Acrobat 8.0 or later
Adobe Acrobat Reader 8.0 or later
Diskeeper 9.0 or later
Kaspersky Anti-Virus 2009 or later
McAfee Virus Scan Plus 2009 or later
Microsoft Excel
Microsoft Internet Explorer 7.0 or later
Microsoft Word
Norton AntiVirus 2000 6.0 or later
Symantec pcAnywhere 11.0
TrendMicro Anti-Virus 2008 or later
Visual C++ .net
Visual Studio 2010 Professional Edition
Windows XP Professional
1.888.KEITHLEY
Semiconductor
Model 4200-SCS Technical Data
Embedded PC Policy
Model 4200-SCS Technical Data
4200-SCS
(U.S. only)
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Semiconductor Characterization System
Technical Data
4200-SCS
Switch Matrix Support and Configurations
A
Various
integrated
instruments
(SMU, SMU w/PA,
4200-SCP2, etc.)
B
C
D
E
4210-CVU or
External
C-V Meter
H
G
L
H
*All switch matrix cards
in a system must be
of the same type.
Pins 1–12
Pins 13–24
...
Pins 61–72
Model 708B Chassis
1 Card 8×12 Pins
Model 707B Chassis
1–6 Cards Up to 8×72 Pins
Semiconductor
Basic block diagram of 4200-SCS configurations
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Model 4200-SCS Technical Data
4200
Additional Card (optional)
Card 1
Up to
Optional
Card 6
Optional
Card 2
Additional Card (optional)
A number of useful standard switch matrix
configurations are available for the 4200-SCS.
Each standard configuration includes all
components, cabling, and instructions for the
user to assemble the switch matrix and add
the matrix configuration to the 4200-SCS test
environment. Once a supported configuration
is added to the test environment, the 4200-SCS
standard user library (matrixulib) ­connects
instrument terminals to output pins through a
simple “fill-in-the-blank” interface.
7174A or 7072 Card*
Model 4200-SCS Technical Data
Overview
Semiconductor Characterization System
Technical Data
4200-UL-LS-12/B (or -12/707B)
1
1
12
1
2
708B (or 707B) Switch Mainframe
7174A Switch Card
4200-TRX-3 Cable for each 12 pins
7007-1 IEEE-488 Cable
7078-TRX-BNC Adapter
4200-LC-LS-12/B (or -12/707B)
1
1
12
1
2
708B (or 707B) Switch Mainframe
7072 Matrix Switch Card
4200-TRX-3 Cable
7007-1 IEEE-488 Cable
7078-TRX-BNC Adapter
4200-LC-LS-24/B, -36/B, -48/B, -60/B, -72/B
1
1
12
1
2
4200-UL-LS-24B, -36B, -48B, -60B, -72B
1
1
12
1
2
Low Current/Local Sense Configuration
(4200-LC-LS-XX)
The Low Current/Local Sense switch configuration is built using the
Keithley Model 7072 Semiconductor Matrix Card, which is designed for
semiconductor applications requiring good quality I-V and C-V signals. The
configuration provides eight instrument inputs with up to 72 output pins
with less than 1pA offset current.
707B Switch Mainframe
7174A Switch Card for each 12 pins
4200-TRX-3 Cable for each 12 pins
7007-1 IEEE-488 Cable
7078-TRX-BNC Adapter
707B Switch Mainframe
7072 Matrix Switch Card for each 12 pins
4200-TRX-3 Cable for each 12 pins
7007-1 IEEE-488 Cable
7078-TRX-BNC Adapter
Connector Type: 3-lug triax.
Maximum Signal Level: 200V, 1A.
Offset Current: <1pA (Rows A–B).
Maximum Leakage: 0.1pA/V.
3dB Bandwidth: 5MHz typical (Rows G–H).
Connector Type: 3-lug triax.
Maximum Signal Level: 200V, 2A.
Offset Current: 100fA max, 10fA typical.
Maximum Leakage: 0.01pA/V.
3dB Bandwidth: 30MHz typical.
Semiconductor
Model 4200-SCS Technical Data
Ultra-Low Current/Local Sense
Configuration (4200-UL-LS-XX)
The Ultra-Low Current/Local Sense switch configuration is built using
the Keithley Model 7174A Low Current Matrix Card (with the Model 707B
or 708B Switch Matrix), which is designed for semiconductor research,
development, and production applications requiring high quality, high
performance switching of I-V and C‑V signals. This configuration provides
eight instrument inputs with up to 72 output pins at only 10fA typical
­offset current.
Model 4200-SCS Technical Data
4200-SCS
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Semiconductor Characterization System
Technical Data
4200-SCS
ACCESSORIES SUPPLIED WITH EVERY CHASSIS
ACCESSORIES SUPPLIED WITH EACH 4210-MMPC-S
263-ILC-3
4200-KTEI-x.x
TL-22
TL-24
CA-532A
CA-534-24A
CA-535-7A
CS-712
CS-737
CS-751
CS-1247
CS-1546
Interlock Cable (3m)
System Software and Manuals CD
General Tool Kit
SMA Torque Wrench
ACCESSORIES SUPPLIED WITH DC SMUs
Model 4200-SCS Technical Data
4200-MTRX-2
4200-RPC-2
4200-TRX-2
Line Cord
User Manual
Ultra Low Noise SMU Triax Cable (Two supplied for each SMU), 2m (6.6 ft). Not
included with SMUs configured with a 4200-PA Remote PreAmp.
Remote PreAmp Cable (One supplied for each PreAmp), 2m (6.6 ft).
Ultra Low Noise PreAmp Triax Cable, 2m (6.6 ft). Two supplied for Ground Unit.
Two supplied in replacement of 4200-MTRX-2 cables for each SMU configured with
a 4200-PA.
NEMA 5-15P for 100-115VAC or CEE 7/7 (Continental European) for 240VAC.
User Manual and Reference Manual supplied on the 4200-SCS Complete Reference
CD-ROM. (Printed manual available as an option.)
ACCESSORIES SUPPLIED WITH EACH 4200-CVU-Prober-Kit
237-TRX-BAR
4200-PRB-C
7078-TRX-BNC
7078-TRX-GND
CA-446A
CS-565
CS-1247
CS-1391
Four BNC Male to BNC Male Coax Cables (1.5m)
SMA Male to SMA Male Coax Cable (15cm)
SMA Male to SMA Male Coax Cable (11cm)
Two SMA Male to SMA Male Coax Cables (20cm)
Two BNC Female to BNC Female Barrels
Two BNC Female to Triax Male Adapters
Four SMA Female to BNC Male Adapters
Four SMA Male to BNC Female Adapters
Two Micro Triax (LEMO) to SMA (no guard)
Three SMA Tees, female-male-female
ACCESSORIES SUPPLIED WITH EACH 4210-CVU
CA-447A
CS-701
CS-1247
Four SMA Cables, male to male, 100W, 1.5m
Two BNC Tee Adapters
Four Female SMA to Male BNC Adapters
Semiconductor
ACCESSORIES SUPPLIED WITH EACH 4210-MMPC-C
ACCESSORIES SUPPLIED WITH EACH 4225-RPM
Triax to BNC Adapter
SMA to SMA 50W Cable (0.2m)
RPM Cable (2.1m)
BNC to SMA Adapter
4200-CVU-PROBER-KIT
Optional accessory kit for connecting to popular analytical probers
4200-CVU-PWR CVU Power Package for ±200V C-V
4200-PA
Remote PreAmp Option for 4200-SMU and 4210-SMU, extends SMU to
0.1fA ­resolution
4200-PMU-PROBER-KIT
Optional accessory kit for connecting ultra-fast I-V modules to popular
analytical probers
4200-SCP2
Dual-Channel Integrated Oscilloscope
4200-SCP2HR High Resolution, Dual-Channel Integrated Oscilloscope
4200-SCP2-ACC Optional Scope Probe
4200-SMU
Medium Power Source-Measure Unit for 4200-SCS. 100mA to 100fA, 200V to 1µV,
2 Watt
4210-CVU
Integrated C-V Instrument
4210-MMPC-C Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for the Cascade MicroTech
12000 prober series
4210-MMPC-S Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for the Suss MicroTec PA300
prober series
4210-SMU
High Power Source-Measure Unit for 4200-SCS. 1A to 100fA, 200V to 1µV, 20 Watt
4220-PGU
Dual-Channel Pulse Generator, ±40V, 10ns
4225-PMU
Ultra-Fast I-V Module, ±40V, 60ns, 800mA
4225-RPM
Remote Amplifier/Switch for Model 4225-PMU
4200-BTI-A
Hardware and Software Ultra-Fast Package for complete NBTI/PBTI Testing
(U.S. only)
w w w.keithley.com
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Two SMA to SSMC Y-Cable Assemblies (0.15m)
Four SMA to SMA 50W Cables (2m)
APPLICATION PACKAGES
CA-533-24A
Two Mini Triax/Full Triax Cables, 100W (61cm)
CA-535-4A
Prober Ground Jumper (10cm)
CA-540-12A
Mini Triax/Mini Triax Cable, 100W (35cm)
CS-712
Three Triax Male to BNC Female Adapters
CS-737
Triax Tee Adapter, female-male-female
CS-1247
Three SMA Female to BNC Male Adapters
4210-MMPC-304AGrounding Bracket Assembly
4210-MMPC-305AMini Triax, 3-lug, Shorting Plug (shorts center pin to outer shield)
1.888.KEITHLEY
4200-PRB-C
CA-404B
OPTIONAL INSTRUMENTATION
ACCESSORIES SUPPLIED WITH EACH 4200-PMU-PROBER KIT
CA-19-2
CA-405B
CA-451A
CA-452A
CS-565
CS-712
CS-1247
CS-1252
CS-1390
CS-1391
ACCESSORIES SUPPLIED WITH EACH 4225-PMU
OR 4220-PGU
7078-TRX-GND
CA-452A
CA-547-2A
CS-1247
Four Female Triax to Female Triax Adapters
Two SSMC to SMA Cables with local ground
Four Male Triax to Female BNC Adapters
Four Male Triax to Female BNC Adapters (guards removed)
Four SMA Cables, 100W, 3m
Four Female BNC to Female BNC Adapters
Four Female SMA to Male BNC Adapters
Two SMA Tee Adapters (female, male, female)
MMPC Prober Cable Assembly
Two Male Triax to Male Triax Cables, 100W (61cm)
Prober Ground Jumper (17.8cm)
Three Triax Male to BNC Female Adapters
Triax Tee Adapter, female-male-female
Two Triax Female to Triax Female Adapters
Three SMA Female to BNC Male Adapters
Triax Shorting Plug (shorts center pin to outer shield)
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Model 4200-SCS Technical Data
Accessories and Optional Instrumentation
Semiconductor Characterization System
Technical Data
4200-SCS
Computer Options
Additional Cables 1
4200-MOUSE
236-ILC-3
237-ALG-2
Microsoft Ambidextrous 2 Button Mouse (Note: a pointing device is integrated with
the 4200-SCS keyboard.)
Remote PreAmp Mounting Accessories
Cabinets and Mounting Accessories
4200-CAB-25UX 25U Cabinet (44 in.)
4200-KEY-RM Slide Rack Mounting Kit for standard keyboard and pointing device
4200-RM
Slide Rack Mounting Kit for 4200-SCS/F and 4200-SCS/C
Connectors, Adapters, and Fixtures
237-BAN-3A
237-BNC-TRX
237-TRX-BAR
237-TRX-T
237-TRX-TBC
7078-TRX-BNC
7078-TRX-GND
8101-4TRX
8101-PIV
CA-404B CA-405B CA-406B CA-451A CA-452A CS-565
CS-633 CS-701
CS-1247 CS-1249 CS-1251 CS-1252 CS-1281 CS-1382 CS-1390 CS-1391 Triax Cable Center Conductor terminated in a safety banana plug
Male BNC to 3-lug Female Triax Adapter
3-lug Triax Barrel for use with triax interconnect
3-slot Male to Dual 3-Lug Female Triax Tee Adapter
3-lug Female Triax Bulkhead Connector
Coaxial Connector for connecting coax instruments to a triax matrix
Male Triax to Female BNC Connector (guards removed)
4-pin Transistor Fixture
Pulse I-V Demo Fixture
SMA Plug to SMA Plug, RG188, 2m
SMA Plug to SMA Plug, RG188, 6in
SMA Plug to SMA Plug, RG188, 13in
SMA-SMA Plug, RG188, 4.25in
SMA-SMA Plug, RG188, 8in
Female BNC to Female BNC Adapter
Adapter, TRIAX to BNC
BNC Tee Adapter
SMA Female to BNC Male
SMA Female to SMB Plug
BNC Female to SMB Plug
SMA Male to BNC Female
SMA Female to SMA Female
MMBX-to-SMA Adapter
TRIAX to SMA Adapter, no guard
SMA TEE Adapter (female, male, female)
Other Accessories
4200-CART
4200-CASE
4200-MAN
Roll-around Cart for 4200-SCS
Transport Case for 4200-SCS
Printed Manual Set for 4200-SCS
(Manual on CD-ROM is included in Base Unit)
4200-Q-STBL-KITStabilization Kit for 4200-PIV-Q
NOTES
1. 4200-MAG-BASE is included with 4225-RPM.
2. All 4200-SCS systems and instrument options are supplied with required cables (2m length).
Semiconductor
Model 4200-SCS Technical Data
4200-MAG-BASE 1Magnetic base for mounting 4200-PA or 4225-RPM on a prober platen
4200-TMB
Triaxial mounting bracket for mounting 4200-PA on a triaxial mounting panel
4200-VAC-BASE Vacuum base for mounting 4200-PA or 4225-RPM on a prober platen
Interlock Cable, 3m (one included with each 4200-SCS)
Low Noise Triax Cable, 2m (terminated with a 3-slot male triax connector on one
end and 3 alligator clips on the other
4200-MTRX-1 Ultra Low Noise SMU Triax Cable, 1m (Mini Triax-Triax, connects 4200 SMUs to a
test fixture)
4200-MTRX-2 Ultra Low Noise SMU Triax Cable, 2m (Mini Triax-Triax, connects 4200 SMUs to
a test fixture, two included with each 4200 SMU that is not configured with a
Remote PreAmp)
4200-MTRX-3 Ultra Low Noise SMU Triax Cable, 3m (Mini Triax-Triax, connects 4200 SMUs to a
test fixture)
4200-PRB-C
SSMC to SMA Cable with local ground
4200-PRB-C-SMA SMA to SMA Y-cable, 6 in. (15 cm)
4200-PRB-C-SMB SMA to SMB Y-cable, 6 in. (15 cm)
4200-RPC-0.3 Remote PreAmp Cable, 0.3m (for use inside prober shield)
4200-RPC-2
Remote PreAmp Cable, 2m (for remote location of 4200-PA, one included with
each 4200-PA)
4200-RPC-3
Remote PreAmp Cable, 3m (for remote location of 4200-PA)
4200-RPC-6
Remote PreAmp Cable, 6m (for remote location of 4200-PA)
4200-TRX-0.3
Ultra Low Noise PreAmp Triax Cable, 0.3m, (Triax-Triax, connects 4200-PA to a test
fixture, recommended for remote location of the 4200-PA)
4200-TRX-1
Ultra Low Noise PreAmp Triax Cable, 1m, (Triax-Triax, connects 4200-PA to a
test fixture)
4200-TRX-2
Ultra Low Noise PreAmp Triax Cable, 2m, (Triax-Triax, connects 4200-PA to a test
fixture, two included with each 4200-PA)
4200-TRX-3
Ultra Low Noise PreAmp Triax Cable, 3m, (Triax-Triax, connects 4200-PA to a
test fixture)
4210-MMPC-C Multi-measurement cable set for Cascade Microtech probers. Requires one set
per manipulator.
4210-MMPC-S Multi-measurement cable set for SUSS MicroTec probers. Requires one set
per manipulator.
7007-1
Double Shielded IEEE-488 Cable (1m)
7007-2
Double Shielded IEEE-488 Cable (2m)
CA-19-2 RG-58 Coax Cable, 50W (1.5m)
CA-426B TRIAX to SSMC Cable Assembly
CA-446A
SMA Cable, 100W, 3m
CA-447A
SMA Cable, male to male, 100W, 1.5m
Model 4200-SCS Technical Data
Other Optional Accessories
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G R E A T E R
M E A S U R E
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C O N F I D E N C E
29
Semiconductor Characterization System
Technical Data
4200-SCS
It's easy to connect the Model
4200-SCS to a probe station or a
switch matrix with standard triax
cables.
DC PreAmps can be mounted on the probe station with either a platen base
or a triax mounting bracket. By reducing the signal path between the DUT and
the PreAmp from several feet to a fraction of an inch, the Model 4200-SCS can
­eliminate cable effects like parasitic capacitance and leakage currents, which
provides more accurate low-level measurements.
Semiconductor
An optional vacuum (Model 4200-VAC-BASE) or magnetic (Model
4200-MAG-BASE) platen mounting base allows the PreAmp to
be located next to manipulators on the chuck platen, ­eliminating
­measurement problems caused by long cable lengths when
performing ultra-low current ­measurements.
If platen space is not available, the triax mounting bracket (Model
4200-TMB) allows users to locate the DC PreAmp on dual triaxial
connectors that may already be installed for HP4156 Kelvin triax
cables. This mounting option reduces problems caused by long cables
without occupying platen space.
1.888.KEITHLEY
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30
The Model 4225-RPM Remote Amplifier/Switch can be mounted close
to the probe needles to reduce the cable effects when performing
pulse or other ultra-fast I-V measurements.
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G R E A T E R
M E A S U R E
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C O N F I D E N C E
Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
PreAmp Mounting and Cabling
Semiconductor Characterization System
Technical Data
4200-SCS
Model 4200-CASE
Transport case
Model 4200-CAB-XXX
Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
4200-SCS Accessories
Model 4200-CART
Cabinet
Roll-around cart
Model 4200-KEY-RM
Semiconductor
Keyboard rack mount
Each Model 4220-SCS chassis can accommodate up to four Model 4225-PMU modules to
provide up to eight ultra-fast source and measure channels. Pictured are four 4225-RPM
modules connected to a 4-pin prober.
1.888.KEITHLEY
(U.S. only)
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G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
31
Semiconductor Characterization System
Technical Data
Model 4200-SCS Technical Data
Model 4200-SCS Technical Data
4200-SCS
Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.
All other trademarks and trade names are the property of their respective companies.
A
Semiconductor
KEITHLEY INSTRUMENTS, INC.
■
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C O N F I D E N C E
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© Copyright 2011 Keithley Instruments, Inc.
32
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2.1.11
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