CRM 512C.book.fm

Command Reference Manual
Software Version 5.12 r3
Part Numbers
004-122-000 (Standard)
004-122-100 (Cleanroom)
Copyright ©2001, 2000 Digital Instruments Veeco Metrology Group
All rights reserved.
Document Revision History: Title of Document
Revision
C
Date
1/07/02
Section(s) Affected
Reference
Approval
Updates to 5.12 r3
C. Fitzgerald
B
Modify Commands
C. Fitzgerald
A
All Sections
C. Fitzgerald
Notices: The information in this document is subject to change without notice. NO WARRANTY OF ANY KIND IS MADE WITH REGARD TO
THIS MATERIAL, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A
PARTICULAR PURPOSE. No liability is assumed for errors contained herein or for incidental or consequential damages in connection with the
furnishing, performance, or use of this material. This document contains proprietary information which is protected by copyright. No part of this
document may be photocopied, reproduced, or translated into another language without prior written consent.
Copyright: Copyright © 2001 Veeco Metrology, LLC. All rights reserved.
Trademark Acknowledgments: The following are registered trademarks of Veeco Instruments Inc. All other trademarks are the property of their
respective owners.
Product Names:
NanoScope®
MultiMode™
Dimension™
BioScope™
Atomic Force Profiler™ (AFP™)
Dektak®
Software Modes:
TappingMode™
Tapping™
TappingMode+™
LiftMode™
AutoTune™
TurboScan™
Fast HSG™
PhaseImaging™
DekMap 2™
HyperScan™
StepFinder™
SoftScan™
Hardware Designs:
TrakScan™
StiffStage™
Hardware Options:
TipX®
Signal Access Module™ and SAM™
Extender™
TipView™
Interleave™
LookAhead™
Quadrex™
Software Options:
NanoScript™
Navigator™
FeatureFind™
Miscellaneous:
NanoProbe®
Table of Contents
Chapter 1
Introduction
1
1.1 Conventions in this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.1.1 Page Content. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1.2 NanoScope Command Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 NanoScope Software Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.2.1
1.2.2
1.2.3
1.2.4
1.2.5
1.2.6
System Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Starting Up the NanoScope Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Accessing Real-time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Control Monitor Mouse and Keyboard Functions. . . . . . . . . . . . . . . . . . . . . 11
Interfacing with the Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Mouse Operations on the Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.3 Technical Support at Digital Instruments . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.3.1 Submitting Bug Reports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.3.2 Contact Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Chapter 2
DI System Menu
19
2.1 Overview of the DI Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.2 About... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.3 Real-time and Off-line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.4 Microscope Select . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.4.1
2.4.2
2.4.3
2.4.4
2.4.5
2.4.6
Microscope Select/Equipment Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Equipment / Scanner Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Equipment / Advanced Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Equipment / Serial Port Configuration Panel . . . . . . . . . . . . . . . . . . . . . . . . 24
Microscope Select/New Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Microscope Select/Delete Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
2.5 NanoScript . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
2.6 Service Access . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
2.7 Administrator Access . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
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2.8 Customize . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
2.8.1 Customize Menus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
2.8.2 Auto Program Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
2.8.3 Color Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Chapter 3
Panels Menu
31
3.1 Overview of Control Panels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
3.2 Scan Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
3.3 Feedback Controls. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
3.3.1 Parameters in the Feedback Controls Panel. . . . . . . . . . . . . . . . . . . . . . . . . . 39
3.4 Other Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
3.4.1 Parameters in the Other Controls Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.5 Interleave Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
3.5.1 Parameters in the Interleave Controls Panel . . . . . . . . . . . . . . . . . . . . . . . . . 50
3.6 Channel (1, 2, 3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
3.7 Gain Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
3.7.1 Parameters in the Auto Gain Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
3.8 Drive Feedback Controls. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
3.8.1 Parameters in the Drive Feedback Control Panel . . . . . . . . . . . . . . . . . . . . . 68
Chapter 4
Motor Menu
71
4.1 Engage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
4.1.1 Control Monitor Actions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
4.1.2 Display Monitor Actions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
4.1.3 Menu Items Affecting Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
4.2 Withdraw . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
4.2.1 Withdraw Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
4.2.2 Withdraw Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
4.2.3 Menu Items Affecting Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
4.3 Step Motor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
4.3.1 Step Motor Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
4.3.2 Display Monitor Actions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
4.3.3 Menu Items Affecting Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
4.4 Step XY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
Chapter 5
View Menu
77
5.1 Image Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
5.1.1 Image Mode Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
5.1.2 Image Mode Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
5.2 Scope Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
5.2.1 Scope Mode Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
5.3 Force Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
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5.4 Force Calibrate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
5.4.1
5.4.2
5.4.3
5.4.4
5.4.5
5.4.6
Force Calibrate Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
Parameters on the Force Calibrate Main Controls Panel . . . . . . . . . . . . 83
Channel Panels and Force Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
Channel Parameters Affecting Force Mode . . . . . . . . . . . . . . . . . . . . . . . . . . 86
Force Calibrate Control Monitor Menu Items . . . . . . . . . . . . . . . . . . . . . . . . 87
Force Calibrate Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
5.5 Force Mode / Advanced . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
5.5.1
5.5.2
5.5.3
5.5.4
5.5.5
5.5.6
5.5.7
5.5.8
Main Controls Panel Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Feedback Controls Panel in Force Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
Feedback Controls Parameters in Force Mode . . . . . . . . . . . . . . . . . . . . . . . 94
Scan Mode Panel in Force Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
Parameters in the Scan Mode Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
Auto Panel in Force Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
Parameters in the Auto Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
Control Monitor Menu Bar and Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
5.6 Force Step . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
5.7 Force Volume . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
5.7.1 Force Volume Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
5.7.2 Force Volume Control Monitor Menu Items . . . . . . . . . . . . . . . . . . . . . . . . 103
5.7.3 Force Volume Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
5.8 Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
5.8.1
5.8.2
5.8.3
5.8.4
5.8.5
5.8.6
5.8.8
Cantilever Tune . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
Cantilever Tune Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
Panels in the Cantilever Tune Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Auto Tune Controls Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Sweep Controls Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110
Spring Constant Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
Cantilever Tune Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
5.9 STS Plot i(v) (STM Only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
5.9.1
5.9.2
5.9.3
5.9.4
STS Plot i(v) Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
STS i(v) Plot Main Controls Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
Feedback Controls, Auto Panel and Scan Mode Panels . . . . . . . . . . . . . . . 119
STS i(v) Plot Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
5.10 STS Plot i(s) (STM Only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120
5.10.1
5.10.2
5.10.3
5.10.4
Chapter 6
Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
Parameters in the Main Controls STS i(s) Panel . . . . . . . . . . . . . . . . . . . . 121
Feedback Controls, Auto Panel, Scan Mode Panels in STS i(v) Plot . . . . 123
STS i(s) Plot Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
Frame and Capture Menus
125
6.1 Capture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125
6.1.1 Capture Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126
6.1.2 Capture Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
6.2 Abort. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
6.3 Continuous (Movie) Capture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
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6.3.1 Continuous Command Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
6.4 AutoScan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
6.4.1
6.4.2
6.4.3
6.4.4
AutoScan Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
Buttons on the AutoScan Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
Scan Controls on the AutoScan Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
Auto Controls in the AutoScan Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
6.5 Capture Plane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
6.5.1 Capture Plane Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
6.6 Capture Withdraw . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
6.7 Capture Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134
6.7.1 Capture Calibration Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
6.7.2 Parameters and Buttons in the Capture Calibration Panel. . . . . . . . . . . . . . 135
6.8 Capture Filename . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
6.9 Frame Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
6.9.1
6.9.2
6.9.3
6.9.4
Chapter 7
Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Reverse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Microscope Menu
143
7.1 Profile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144
7.1.1 Profile Select Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144
7.1.2 Enabling Profile Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
7.2 Scanner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 148
7.3 Microscope/Calibrate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
7.3.1 Calibrate Submenu Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
7.4 Calibrate/Scanner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150
7.4.1 Buttons on the Scanner Calibration Panel . . . . . . . . . . . . . . . . . . . . . . . . . . 151
7.4.2 Parameters in the Scanner Calibration Panel. . . . . . . . . . . . . . . . . . . . . . . . 151
7.5 Calibrate/Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159
7.5.1 Detector Calibration Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 160
7.6 Calibrate/Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161
7.6.1 Z Calibration Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161
7.7 Tapping Engage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163
7.7.1 Tapping Engage Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163
7.7.2 Parameters in the Tapping Engage Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . 164
7.8 Leakage (STM and EC STM Only) . . . . . . . . . . . . . . . . . . . . . . . . . . . 169
7.9 Offset (STM Only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 170
7.10 Sensitivity Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171
7.11 Auto Gain Adjust. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171
7.12 Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171
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Rev. C
7.13 Replace Tip (MM AFM Only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172
Chapter 8
Vision Menu
173
8.1 Vision Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173
8.1.1 Hardware Additions Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 174
8.2 Vision System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175
8.2.1 Recognizable Patterns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175
8.2.2 Illumination Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176
8.2.3 Rotational Alignment of Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 177
8.3 Vision System Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178
8.4 Vision Control Menu Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178
8.4.1
8.4.2
8.4.3
8.4.4
8.4.5
Chapter 10
Vision Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179
Buttons on the Vision System Realtime Control Panel . . . . . . . . . . . . . . . . 180
Parameters on the Vision System Real-time Control Panel. . . . . . . . . . . . . 180
Parms Submenu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 181
Helpers Submenu on the Vision Control Panel . . . . . . . . . . . . . . . . . . . . . . 197
Offline File Menu
201
10.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
10.2 Browse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204
10.2.1 Browse Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204
10.2.2 Browse Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 205
10.2.3 File Menu Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206
10.2.4 Select Menu Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207
10.2.5 View Menu Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 208
10.2.6 Auto Menu Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 208
10.2.7 Page up Menu Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 209
10.2.8 Page down Menu Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 209
10.2.9 Hints to optimize the Browse Command. . . . . . . . . . . . . . . . . . . . . . . . . . 209
10.2.10 Procedure to Use the Browse Command . . . . . . . . . . . . . . . . . . . . . . . . . 210
10.3 Multi View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 211
10.3.1 Multi View Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 211
10.4 Select . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 212
10.4.1 Select Subcommand Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 212
10.5 Sort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213
10.5.1 Sort Subcommand Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213
10.6 Move. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213
10.7 Copy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215
10.7.1 Parameters in the Copy Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215
10.8 Delete . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 216
10.9 Rename. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 216
10.9.1 Parameters in the Rename Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 217
10.10 Create Directory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 217
Rev. C
Command Reference Manual
v
Chapter 11
Offline Image Menu
219
11.1 Image File Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220
11.2 Dual Section . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 222
11.2.1 Section Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 222
11.2.2 Section Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 223
11.2.3 Section Display Monitor Menu Commands . . . . . . . . . . . . . . . . . . . . . . . 223
11.3 Select Left . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225
11.4 Select Right . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225
11.5 Subtract Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225
11.6 Amp/Phase to Amp SinPhase/Amp Cosphase . . . . . . . . . . . . . . . . . . 226
11.6.1 Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 226
11.7 Split Images. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227
11.8 Offset. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227
Chapter 12
Offline View Menu
229
12.1 Top View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
12.1.1
12.1.2
12.1.3
12.1.4
Top View Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 230
Parameters in the Top View Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 230
Buttons on the Top View Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 233
Top View Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234
12.2 Line Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 237
12.2.1
12.2.2
12.2.3
12.2.4
Parameters on the Line Plot Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 237
Buttons in the Line Plot Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239
Line Plot Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 240
Using the Line Plot Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 240
12.3 Surface Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 241
12.3.1 Buttons and Parameters in the Surface Plot Panel. . . . . . . . . . . . . . . . . . . 241
12.3.2 Surface Plot Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 245
12.3.3 The View/Illumination Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 246
12.4 Quick Surface Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247
12.4.1 Buttons and Parameters on Quick Surface Plot Panel . . . . . . . . . . . . . . . . 247
12.5 Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 250
12.5.1 Measurements in the Parameter Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . 250
12.5.2 Buttons on the Parameter Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 251
12.5.3 Parameter Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 252
12.6 Graph. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 252
12.6.1 Graph Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 252
12.6.2 Buttons and Parameters in the Graph Panel . . . . . . . . . . . . . . . . . . . . . . . 252
12.6.3 Display Monitor Graph Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 255
Chapter 13
Analysis Commands (A-L)
257
13.1 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 257
vi
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Rev. C
13.1.1
13.1.2
13.1.3
13.1.4
FFTs, PSDs, Autocovariance and RMS. . . . . . . . . . . . . . . . . . . . . . . . . . . 258
Why a Power Spectrum? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 259
Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260
Autocovariance Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 263
13.2 Autocovariance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264
13.2.1 Parameters on the Autocovariance Panel. . . . . . . . . . . . . . . . . . . . . . . . . . 264
13.2.2 Autocovariance Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265
13.3 Auto Stepheight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266
13.3.1
13.3.2
13.3.3
13.3.4
13.3.5
13.3.6
13.3.7
13.3.8
Auto Stepheight Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 268
Step Results Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 268
Auto Stepheight Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 269
Auto Stepheight Configure Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 269
Parameters in the Auto Stepheight Configure Panel . . . . . . . . . . . . . . . . . 270
Auto Stepheight Auto Program Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . 271
Auto Stepheight Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 273
Using the AutoStepheight Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . 274
13.4 Bearing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275
13.4.1 Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275
13.4.2 Preparation for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 276
13.4.3 Bearing Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 276
13.4.4 Bearing Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 278
13.4.5 Bearing Configure Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 279
13.4.6 Configuration File List Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 280
13.4.7 Zoom Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 280
13.4.8 Auto Program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 281
13.4.9 Bearing Save . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 281
13.4.10 Bearing Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 282
13.4.11 Bearing Display Menu Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 282
13.4.12 Bearing Terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 285
13.5 Bearing Compare . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 288
13.5.1
13.5.2
13.5.3
13.5.4
Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 288
Preparation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 289
Bearing Compare Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 289
Bearing Compare Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 290
13.6 Depth . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 292
13.6.1
13.6.2
13.6.3
13.6.4
13.6.5
13.6.6
13.6.7
Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 292
Depth Panels and Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 292
Depth Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 293
Depth Configure Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 294
Depth Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 296
Depth Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 298
Interpreting Depth Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 300
13.7 Grain Size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 302
13.7.1
13.7.2
13.7.3
13.7.4
Rev. C
Erosion and Dilation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 303
Grain Size Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 305
The Grain Size Configure Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 306
Limits Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 308
Command Reference Manual
vii
13.7.5 Configuration File List Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 309
13.7.6 Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 311
13.7.7 Grain Size Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 312
13.7.8 Menu Commands on the Grain Size Display Monitor . . . . . . . . . . . . . . . 312
13.7.9 Procedure for using the Grain Size Command . . . . . . . . . . . . . . . . . . . . . 315
13.7.10 Using the Zoom Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 315
13.7.11 Interpreting Grain Size Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 316
13.8 Grain Size Average . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 317
13.8.1
13.8.2
13.8.3
13.8.4
Chapter 14
Average Grain Size Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 318
Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 319
Using Average Grain Size . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 321
Interpreting Grain Size Average Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . 322
Aanalysis Commands (M-Z)
323
14.1 Analyze Commands M-Z Overview . . . . . . . . . . . . . . . . . . . . . . . . . . 323
14.2 Particle Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 325
14.2.1 Example of Particle Analysis and Area . . . . . . . . . . . . . . . . . . . . . . . . . . . 325
14.2.2 Erosion and Dilation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 326
14.2.3 Particle Analysis Panels Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 327
14.2.4 Particle Analysis Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 328
14.2.5 Particle Analysis Configure Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 328
14.2.6 Limits Window Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 330
14.2.7 Configuration File List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 331
14.2.8 Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 332
14.2.9 Particle Analysis Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 333
14.2.10 Procedure for Using Particle Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . 338
14.2.11 Interpreting Particle Analysis Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 339
14.3 Pattern Recognition. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 339
14.3.1
14.3.2
14.3.3
14.3.4
Pattern Recognition Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 340
Parameters in the Pattern Recognition Panel. . . . . . . . . . . . . . . . . . . . . . . 341
Buttons in the Pattern Recognition Panel . . . . . . . . . . . . . . . . . . . . . . . . . 341
Helpers Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 346
14.4 Power Spectral Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 347
14.4.1
14.4.2
14.4.3
14.4.4
14.4.5
14.4.6
14.4.7
NanoScope PSD Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 347
PSD and Surface Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 348
PSD and Flatness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 349
Power Spectral Density Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 350
Parameters in the Spectral Density Panel . . . . . . . . . . . . . . . . . . . . . . . . . 351
Buttons on the Spectral Density Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . 352
Power Spectral Density Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . 352
14.5 PSD Compare . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 354
14.5.1
14.5.2
14.5.3
14.5.4
PSD Compare Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 355
Buttons on the PSD Compare Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 355
PSD Compare Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 356
Reference Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 357
14.6 Roughness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 358
14.6.1 Roughness Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 358
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14.6.2
14.6.3
14.6.4
14.6.5
14.6.6
14.6.7
14.6.8
14.6.9
Navigating Control Panels in Roughness Analysis . . . . . . . . . . . . . . . . . . 360
Roughness Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 361
Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 362
Screen Layout Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 363
Roughness Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 364
Troubleshooting the Roughness Function . . . . . . . . . . . . . . . . . . . . . . . . . 369
Roughness Data Definitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 370
Example of Using Roughness Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . 377
14.7 Section . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 378
14.7.1
14.7.2
14.7.3
14.7.4
14.7.5
14.7.6
14.7.7
14.7.8
About Sectioning of Surfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 379
Navigating Control Monitor Panels in Section Analysis . . . . . . . . . . . . . . 380
Section Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 381
Section Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 383
Section Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 384
Troubleshooting the Section Command . . . . . . . . . . . . . . . . . . . . . . . . . . 387
Section Data Definitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 388
Example—Section Analysis of a Diffraction Grating . . . . . . . . . . . . . . . . 389
14.8 Stepheight. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 390
14.8.1
14.8.2
14.8.3
14.8.4
14.8.5
14.8.6
14.8.7
14.8.8
Stepheight Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 391
Parameters on the Stepheight Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 391
Buttons on the Stepheight Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 392
Stepheight Configure Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 392
Configuration File List Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 393
Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 393
Stepheight Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 394
Example—Stepheight Analysis of a Thin Film . . . . . . . . . . . . . . . . . . . . . 396
14.9 Auto Tip Qualify. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 398
14.9.1 Using macros to run Auto TipQual and Tip Exchange . . . . . . . . . . . . . . . 399
14.9.2 Selection of Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 399
14.9.3 Tip Artifacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 399
14.9.4 Tip Estimation Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 400
14.9.5 Auto Tip Qual Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 403
14.9.6 Auto Tip Qual Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 406
14.9.7 Auto Tip Qual Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 410
14.9.8 Tip Qualification Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 410
14.9.9 Example: Using the Auto Tip Qualification Command. . . . . . . . . . . . . . . 411
14.9.10 Running ETD-based Tip Qualification . . . . . . . . . . . . . . . . . . . . . . . . . . 412
14.10 Trench. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 413
14.10.1
14.10.2
14.10.3
14.10.4
Trench Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 414
Trench Configure Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 415
Trench Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 417
Trench Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 418
14.11 Width . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 418
14.11.1
14.11.2
14.11.3
14.11.4
14.11.5
Rev. C
Width Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 419
Width Configure Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 420
Parameters on the Width Configure Panel . . . . . . . . . . . . . . . . . . . . . . . . 421
Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 424
Width Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 425
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14.11.6 Width Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 427
14.11.7 Interpreting Width Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 428
14.12 MSM and HFMFM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 431
14.12.1 MSM and HFMFM Panels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 431
14.12.2 MSM and HFMFM Configure Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . 432
Chapter 15
Modify Menu
439
15.1 Overview of the Modify Commands. . . . . . . . . . . . . . . . . . . . . . . . . . 439
15.1.1 Contents of the Modify Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 439
15.1.2 Modify Command Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 440
15.2 Image Filtering using Data Matrix (Kernel) Operations. . . . . . . . . . . 442
15.3 Clean Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 444
15.3.1 Clean Image Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 444
15.3.2 Clean Image Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . 447
15.4 Contrast Enhancement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 447
15.4.1 Contrast Enhancement Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 448
15.4.2 Contrast Enhancement Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . 449
15.5 Convolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 451
15.5.1 Convolution Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 451
15.5.2 Convolution Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . 453
15.6 Detrend . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 454
15.6.1 Detrend Filter Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 454
15.6.2 Detrend Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 455
15.6.3 Detrend Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 456
15.7 Edge Enhance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 457
15.8 Erase Scan Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459
15.8.1 Erase Scan Lines Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459
15.8.2 Erase Scan Lines Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 460
15.8.3 Procedure in Using the Erase Scan Lines Command . . . . . . . . . . . . . . . . 462
15.9 Flatten . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 463
15.9.1 Flatten Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 463
15.9.2 Flatten Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 465
15.9.3 Flatten Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 465
15.10 Gaussian . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 467
15.10.1
15.10.2
15.10.3
15.10.4
15.10.5
Single Axis Gaussian Filter Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 468
Gaussian Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 471
Gaussian Kernel Algorithm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 471
Lowpass-type Single Axis Gaussian Filtering. . . . . . . . . . . . . . . . . . . . . 472
Highpass-type Single Axis Gaussian Filtering . . . . . . . . . . . . . . . . . . . . 474
15.11 Geometric . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 476
15.11.1 Geometric Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 476
15.11.2 Geometric Command Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . 478
15.12 Highpass . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 480
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15.12.1 Highpass Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 480
15.12.2 Highpass Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 481
15.13 Invert. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 482
15.13.1 Invert Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 483
15.13.2 Invert Command Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 483
15.14 Lowpass . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 484
15.14.1
15.14.2
15.14.3
15.14.4
Lowpass Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 484
Lowpass Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 485
Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 485
Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 486
15.15 Median . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 486
15.15.1 Median Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 486
15.15.2 Median Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 487
15.15.3 Median Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 488
15.16 Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 488
15.16.1 Parameter Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 488
15.17 Plane Fit Auto. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 490
15.17.1
15.17.2
15.17.3
15.17.4
15.17.5
15.18
Fitted Polynomials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 490
Plane Fit Auto Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 491
Planefit Auto Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . 492
Plane Fit Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 493
Procedure for Using Plane Fit Auto. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 494
Plane Fit Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 495
15.18.1 Plane Fit Manual Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 496
15.18.2 Planefit Auto Manual Program Edit Panel. . . . . . . . . . . . . . . . . . . . . . . . 497
15.18.3 Plane Fit Manual Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 497
15.19 Resize . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 500
15.19.1 Resize Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 500
15.19.2 Resize Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 501
15.20 Rotate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 501
15.20.1 Rotate Image Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 501
15.20.2 Rotate Image Auto Program Edit Panel. . . . . . . . . . . . . . . . . . . . . . . . . . 502
15.21 Spectrum 2D. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 503
15.21.1
15.21.2
15.21.3
15.21.4
15.21.5
15.21.6
15.21.7
Spectrum 2D Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 503
Spectrum 2D Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 504
Two-Dimensional FFT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 504
Spectrum 2D Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 506
Example 1—Simplifying an Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 508
Example 2—Highlighting Features Using 2D Spectrum Modification. . 509
Example 3—Removing External Noise. . . . . . . . . . . . . . . . . . . . . . . . . . 511
15.22 Subtract Images . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 512
15.22.1 Subtract Images Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 513
15.23 Zoom . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 514
15.23.1 Zoom Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 515
Rev. C
Command Reference Manual
xi
15.23.2 Zoom Auto Program Edit Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 516
15.23.3 Zoom Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 517
Chapter 16
Utility Menu
519
16.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 519
16.1.1 Utility Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 519
16.2 Print . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 520
16.3 Auto Program File. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 521
16.4 Recipe Auto Program File. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 522
16.5 Auto Result File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 524
16.6 Autocalibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 524
16.6.1 Autocalibration Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 524
16.6.2 The Autocalibration Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 525
16.6.3 Autocalibration Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 527
16.7 TIFF Export. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 528
16.8 TIFF Import. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 529
16.9 ASCII Export. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 530
16.10 ASCII Import. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 531
16.11 JPEG Export . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 532
16.12 Profile Import . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 533
16.12.1 Profile Import Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 534
16.13 Color Table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 535
16.13.1 The Color Table Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 535
16.13.2 Color Table Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 536
Appendix A
Tip Selection Guide
539
1.1 Deflection Mode Cantilevers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 539
1.2 Cantilever Data Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 539
Appendix B
File Formats
547
B.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 547
B.2 File Compatibility. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 548
B.3 Data File Organization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 549
B.3.1
B.3.2
B.3.3
B.3.4
B.3.5
Header Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 549
Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 551
Control-Z (Ctrl-Z) Character . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 552
Padding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 552
Raw Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 552
B.4 Converting Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 553
B.4.1 Preparing Data for Spreadsheets (Summary) . . . . . . . . . . . . . . . . . . . . . . . 553
B.4.2 Preparing Data for Image Processing (Summary) . . . . . . . . . . . . . . . . . . . 553
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Rev. C
B.4.3 Converting Data Files into ASCII . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 553
B.5 Converting Raw Data [Versions 4.3 - 5.12]. . . . . . . . . . . . . . . . . . . . . . 555
B.5.1
B.5.2
B.5.3
B.5.4
B.5.5
Control Input and Output (CAIO). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 555
Calculating Height Data Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 555
Calculating Raw Data Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 555
Force Curve File Format Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 556
Force Volume File Format Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . 558
B.6 General Format for a CIAO Parameter Objects. . . . . . . . . . . . . . . . . . . 558
B.6.1 Procedures to find Z scale CIAO Parameter Objects . . . . . . . . . . . . . . . . . 560
Glossary
563
A-E. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 564
F-J . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 574
K-O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 581
P-T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 585
U-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 602
Rev. C
Command Reference Manual
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xiv
Command Reference Manual
Rev. C
List of Figures
Figure 1.1a. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Figure 1.1b . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Figure 2.2a. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Figure 2.3a. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Figure A.2a . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Figure A.2b . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Chapter 1
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Figure 1.1a
Figure 1.2a
Figure 1.2b
Figure 1.2c
Figure 1.2d
Figure 1.2e
Figure 1.2f
Chapter 2
DI System Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 2.1a
Figure 2.2a
Figure 2.3a
Figure 2.4a
Figure 2.4b
Figure 2.4c
Figure 2.4d
Figure 2.4e
Figure 2.4f
Figure 2.4g
Figure 2.7a
Figure 2.7b
Figure 2.8a
Figure 2.8b
Rev. C
Screen Elements:. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Control Monitor Start Up Screen . . . . . . . . . . . . . . . . . . . . . . . . . 8
Display Monitor Start Up Screen . . . . . . . . . . . . . . . . . . . . . . . . 9
Real-time Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Off-line Control Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Off-line Display Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
The Dialog Box Drop-down Menu . . . . . . . . . . . . . . . . . . . . . . . 13
DI Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
About Nanoscope Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Real-time and Off-line Icons. . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Microscope Select Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Equipment Panel Configured for a MultiMode . . . . . . . . . . . . . 22
Scanner Select Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Advanced Equipment Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Serial Port Configuration Panel . . . . . . . . . . . . . . . . . . . . . . . . . 24
Equipment-New Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Equipment Delete Warning Panel. . . . . . . . . . . . . . . . . . . . . . . . 26
Administrator Access Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . 27
Administrator Password Control Dialog Boxes . . . . . . . . . . . . . 27
Customize Menus Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Customize Menus Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
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Figure 2.8c Auto Program Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Figure 2.8d Color Settings Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Chapter 3
Panels Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Figure 3.1a
Figure 3.1b
Figure 3.1c
Figure 3.2a
Figure 3.2b
Figure 3.2c
Figure 3.2d
Figure 3.3a
Figure 3.4a
Figure 3.5a
Figure 3.5b
Figure 3.5c
Figure 3.5d
Figure 3.5e
Figure 3.7a
Figure 3.8a
Chapter 4
Real-time Control Panels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Panel Drop-down Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
"Show All Items" in the Scan Controls Panel . . . . . . . . . . . . . .
Units Parameter Sub-menu . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Aspect Ratio Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Scan Angle Rotated Example. . . . . . . . . . . . . . . . . . . . . . . . . . .
Example of Slow Scan Axis. . . . . . . . . . . . . . . . . . . . . . . . . . . .
Feedback Controls Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Other Controls Panel (D5000/Tapping Mode). . . . . . . . . . . . . .
Interleave Controls Panel for MultiMode TM . . . . . . . . . . . . . .
Interleave Lift Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Retrace Lift Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Lift Scan Height Illustrated . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Lift Start Height Illustrated.. . . . . . . . . . . . . . . . . . . . . . . . . . . .
Auto Gain Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Drive Feedback Controls Panel . . . . . . . . . . . . . . . . . . . . . . . . .
32
32
33
34
35
36
38
39
45
50
55
56
56
57
65
68
Motor Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Figure 4.0a Motor Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Figure 4.3a Motor Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Figure 4.4a Step XY Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
Chapter 5
View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Figure 5.2a
Figure 5.4a
Figure 5.4b
Figure 5.4c
Figure 5.4d
Figure 5.4e
Figure 5.4f
Figure 5.5a
Figure 5.5b
Figure 5.5c
Figure 5.5d
Figure 5.5e
Figure 5.7a
Figure 5.7b
Figure 5.7c
Figure 5.7d
xvi
TappingMode AFM Scope Trace . . . . . . . . . . . . . . . . . . . . . . . . 80
Force Calibrate Panels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Example: Z Scan.. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Control Panel—Channel 1, 2, 3 . . . . . . . . . . . . . . . . . . . . . . . . . 86
Force Calibrate Menu Bar and Toolbar . . . . . . . . . . . . . . . . . . . 87
Motor Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Illustration of a Force Calibration Plot. . . . . . . . . . . . . . . . . . . . 89
Advanced Force Calibrate Screen . . . . . . . . . . . . . . . . . . . . . . . 91
Control Panel—Feedback Controls . . . . . . . . . . . . . . . . . . . . . . 94
Control Panel—Scan Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
Control Panel—Auto Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
Advanced Force Calibrate Menu Bar and Toolbar. . . . . . . . . . . 99
Standard Force Curve and Force Volume Display . . . . . . . . . . 102
Force Volume Panels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
Schematic of Force Volume Data Set. . . . . . . . . . . . . . . . . . . . 105
Force Volume Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
Command Reference Manual
Rev. C
Figure 5.8a Tapping Cantilever in Mid-air. . . . . . . . . . . . . . . . . . . . . . . . . .107
Figure 5.8b Tapping Cantilever on Sample Surface. . . . . . . . . . . . . . . . . . .108
Figure 5.8c Cantilever Tune Controls Screen. . . . . . . . . . . . . . . . . . . . . . . .109
Figure 5.8d Sweep Controls Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .111
306.5g Sweep Mode Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .112
Figure 5.8a Cantilever Tune Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .114
Figure 5.9a STS i(v) Plot Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .116
Figure 5.9b STS i(v) Spectroscopic Mode . . . . . . . . . . . . . . . . . . . . . . . . . .119
Figure 5.10a STS i(s) Plot Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .121
Chapter 6
Frame and Capture Menus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .125
Figure 6.1a
Figure 6.1b
Figure 6.4a
Figure 6.4b
Figure 6.6a
Figure 6.6b
Figure 6.7a
Figure 6.7b
Figure 6.8a
Chapter 7
Capture Control Monitor and Status Bar . . . . . . . . . . . . . . . . .126
Capture Display Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . .127
AutoScan Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .129
Square Patterns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .131
Capture Withdraw Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .133
Capture and Withdraw Prompt . . . . . . . . . . . . . . . . . . . . . . . . .134
Capture Calibration Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . .135
Capture Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .137
Capture Filename Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .139
Microscope Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .143
Figure 7.1a Profile Select Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .145
Figure 7.1b Profile Edit panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .146
Figure 7.1c Delete Confirm Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .146
Figure 7.1d Save Master As Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .146
Figure 7.2a Scanner Select Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .148
Figure 7.3a Microscope/Calibrate Submenu . . . . . . . . . . . . . . . . . . . . . . . .149
Figure 7.4a Scanner Calibration Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . .150
Figure 7.5a Detector Calibration Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . .160
Figure 7.6a Z Calibration Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .161
Figure 7.7a Tapping Engage Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .164
Figure 7.8a Head Leakage Test Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . .169
Figure 7.9a Head Offset Calibration Test Panel . . . . . . . . . . . . . . . . . . . . . .170
Figure 7.10a Sensitivity Calibration Pane . . . . . . . . . . . . . . . . . . . . . . . . . .171
Figure 7.11a Auto Gain Adjustment Panel. . . . . . . . . . . . . . . . . . . . . . . . . .171
Figure 7.13a Replace Tip Prompt Panels . . . . . . . . . . . . . . . . . . . . . . . . . . .172
Chapter 8
Vision Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .173
Figure 8.1a
Figure 8.1b
Figure 8.2a
Figure 8.3a
Rev. C
Vision Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .174
Optical Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .175
Selection of Visual Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . .176
Navigating in the Vision Menu . . . . . . . . . . . . . . . . . . . . . . . . .178
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Figure 8.4a Vision Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 8.4b Abort Prompt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 8.4c Parms Submenu on Real-time Control Panel. . . . . . . . . . . . . .
Figure 8.4d General Vision Parameters Dialog Box . . . . . . . . . . . . . . . . .
Figure 8.4e Box Search Iterations Example . . . . . . . . . . . . . . . . . . . . . . . .
Figure 8.4f AutoFocus Parameters Panel . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 8.4g Low Mag Optics Parameters Panel . . . . . . . . . . . . . . . . . . . . .
Figure 8.4h High Mag Optics Parameters Panel. . . . . . . . . . . . . . . . . . . . .
Figure 8.4i DarkField Optics Parameters Panel . . . . . . . . . . . . . . . . . . . . .
Figure 8.4j LargeField Optics Parameters Panel . . . . . . . . . . . . . . . . . . . .
Figure 8.4k Edge Detection Parameters Panel . . . . . . . . . . . . . . . . . . . . . .
Figure 8.4l Helpers Submenu on Vision System Real-time Control Panel
Chapter 10
Offline File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
Figure 10.1a Off-line File Drop-down Menu . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.1b Off-line Files Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.2a Browse Image Files Types . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.2b Browse Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.2c Browse Display Window . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.2d Move File Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.2e Copy Files Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.2f Rename Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.2g Select By Name Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.2h Auto Output File Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.3a Multi View Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.4a File/Select Drop-down Menu. . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.4b Select By Name Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.5a File/Sort Drop-down Menu . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.6a Move Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.7a Copy Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.8a File Delete Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.9a Rename Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 10.10a Create Directory Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Chapter 11
202
203
204
205
206
206
207
207
208
209
211
212
212
213
214
215
216
216
217
Offline Image Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 219
Figure 11.1a
Figure 11.1b
Figure 11.1c
Figure 11.2a
Figure 11.2b
Figure 11.5a
Figure 11.6a
Figure 11.7a
xviii
179
180
181
182
183
186
190
192
196
197
197
197
Browse Image Files Types . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dual-Image Drop-down Menu . . . . . . . . . . . . . . . . . . . . . . .
Three-Image Drop-down Menu . . . . . . . . . . . . . . . . . . . . . . .
Section Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Image Section Display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Image Relative Z Scale Pane . . . . . . . . . . . . . . . . . . . . . . . . .
Save As File Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Split Images Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Command Reference Manual
220
221
221
222
223
225
227
227
Rev. C
Chapter 12
Offline View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .229
Figure 12.1a
Figure 12.1b
Figure 12.1c
Figure 12.1d
Figure 12.1e
Figure 12.2a
Figure 12.2b
Figure 12.3a
Figure 12.3b
Figure 12.3c
Figure 12.4a
Figure 12.5a
Figure 12.5b
Figure 12.6a
Chapter 13
View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .229
Top View Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .230
Note Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .233
Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . .234
Top View Display Monitor. . . . . . . . . . . . . . . . . . . . . . . . . . . .235
Line Plot Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .237
Line Plot Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .240
Surface Plot Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .241
Surface Plot Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .245
View/Illumination Controller Operation . . . . . . . . . . . . . . . . .246
Quick Surface Plot Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . .247
Parameter Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .250
Parameter File Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .251
Graph of Force Plot Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . .252
Analysis Commands (A-L) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .257
Figure 13.1a Sample Surfaces Example. . . . . . . . . . . . . . . . . . . . . . . . . . .259
Figure 13.1b "Rules" Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .260
Figure 13.1c X and Y Period (Wavelength) . . . . . . . . . . . . . . . . . . . . . . . . .260
Figure 13.1d Power Spectral Density Plot . . . . . . . . . . . . . . . . . . . . . . . . . .261
Figure 13.1e Wave Forms. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .261
Figure 13.1f “Rings” Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .262
Figure 13.1g “Rings” Image 2D Spectrum Plot . . . . . . . . . . . . . . . . . . . . . .262
Figure 13.1h Power Spectral Density Plot of “Rings” Image . . . . . . . . . . .263
Figure 13.1i “Graf01” Image Autocovariance Example . . . . . . . . . . . . . . .264
Figure 13.2a Autocovariance Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .264
Figure 13.2b Autocovariance Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . .265
Figure 13.3a Navigating in Auto Stepheight Analysis . . . . . . . . . . . . . . . . .267
Figure 13.3b Step Results Window and Auto Stepheight Panels . . . . . . . . .268
Figure 13.3c Auto Stepheight Configure Panel . . . . . . . . . . . . . . . . . . . . . .269
Figure 13.3d Slot Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .271
Figure 13.3e Auto Stepheight Auto Program Edit Panel . . . . . . . . . . . . . . .272
Figure 13.3f Relationship: Data in the Step Results Window and the Image
Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .273
Figure 13.4a Bearing Analysis Illustration. . . . . . . . . . . . . . . . . . . . . . . . . .275
Figure 13.4b Bearing Analysis Display . . . . . . . . . . . . . . . . . . . . . . . . . . . .276
Figure 13.4c Navigating in Bearing Analysis. . . . . . . . . . . . . . . . . . . . . . . .277
Figure 13.4d Bearing Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .278
Figure 13.4e Bearing Configure Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . .279
Figure 13.4f Bearing Configuration File List Panel . . . . . . . . . . . . . . . . . . .280
Figure 13.4g Bearing Zoom Limits Panel . . . . . . . . . . . . . . . . . . . . . . . . . .280
Figure 13.4h Bearing Auto Program Panel . . . . . . . . . . . . . . . . . . . . . . . . .281
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Figure 13.4i Bearing Save Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.4j Bearing Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.4k Bearing Box Area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.4l Bearing Line Length. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.4m Bearing Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.4n Bearing Length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.4o Bearing Volume . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.5a Bearing Compare Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.5b Bearing Compare Advisory . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.5c Bearing Compare Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.5d Bearing Compare Analysis Display. . . . . . . . . . . . . . . . . . . .
Figure 13.6a Navigating Panels in Depth Analysis. . . . . . . . . . . . . . . . . . .
Figure 13.6b Depth Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.6c Depth Configure Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.6d Determining the Exact Depth of a Peak . . . . . . . . . . . . . . . .
Figure 13.6e Depth Thresholds Display . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.6f Auto Program Edit Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.6g Depth Auto Program Set Limits Panel. . . . . . . . . . . . . . . . . .
Figure 13.6h Depth Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.6i Depth Histogram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.6j Depth Display Data Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.7a Grain Size Illustration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.7b . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.7c Chemically Etched Hard Disk Image . . . . . . . . . . . . . . . . . .
Figure 13.7d Navigating Grain Size Analysis. . . . . . . . . . . . . . . . . . . . . . .
Figure 13.7e Grain Size Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.7f Grain Size Configure Panel . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.7g Grain Size Display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.7h Grain Size Correlation Histogram . . . . . . . . . . . . . . . . . . . . .
Figure 13.7i Limits Window Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.7j Limits Window Error Message. . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.7k Configuration File List Menu . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.7l Grain Size Auto Program Edit Panel . . . . . . . . . . . . . . . . . . .
Figure 13.7m Grain Size (Executed) Display . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.8a Grain Size Average Illustration . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.8b Chemically Etched Hard Disk Image . . . . . . . . . . . . . . . . . .
Figure 13.8c Grain Size Average Menu . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.8d Average Grain Size Panel . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.8e Grain Size Average Display . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 13.8f Grain Size Average (Executed) Display . . . . . . . . . . . . . . . .
Chapter 14
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282
285
286
286
287
287
289
290
290
291
293
293
294
295
296
297
297
299
299
300
302
302
303
304
305
306
307
308
308
309
310
311
312
317
318
318
319
319
320
Aanalysis Commands (M-Z) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 323
Figure 14.2a Particles Isolated by Height . . . . . . . . . . . . . . . . . . . . . . . . . . 326
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Figure 14.2b Navigating in Particle Analysis. . . . . . . . . . . . . . . . . . . . . . . .327
Figure 14.2c Particle Analysis Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .328
Figure 14.2d Particle Analysis Configure Panel. . . . . . . . . . . . . . . . . . . . . .329
Figure 14.2e Particle Analysis Limits Window Panel . . . . . . . . . . . . . . . . .330
Figure 14.2f Configuration File List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .331
Figure 14.2g Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . .332
Figure 14.2h Particle Analysis Display . . . . . . . . . . . . . . . . . . . . . . . . . . . .333
Figure 14.2i Particle Analysis Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .334
Figure 14.2j Example of Particle Data Display . . . . . . . . . . . . . . . . . . . . . .339
Figure 14.3a AFM Pattern Recognition Panel . . . . . . . . . . . . . . . . . . . . . . .340
Figure 14.3b Teach Pattern Alert Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . .342
Figure 14.3c Pattern Recognition Site File Panel. . . . . . . . . . . . . . . . . . . . .342
Figure 14.3d Unidentified Pattern Error Box . . . . . . . . . . . . . . . . . . . . . . . .343
Figure 14.3e Shift Image Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .343
Figure 14.3f Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . .344
Figure 14.3g Auto Program Edit Parameters . . . . . . . . . . . . . . . . . . . . . . . .345
Figure 14.3h Helpers Menu on Pattern Recognition Panel . . . . . . . . . . . . .346
Figure 14.3i Off-line Pattern Rec - Advanced Panel . . . . . . . . . . . . . . . . . .346
Figure 14.4a Waveform Surfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .348
Figure 14.4b Progressive Data Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . .349
Figure 14.4c Epitaxial Gallium Arsenide Image . . . . . . . . . . . . . . . . . . . . .350
Figure 14.4d PSD Plot for Terraced Sample . . . . . . . . . . . . . . . . . . . . . . . .350
Figure 14.4e Spectral Density Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .351
Figure 14.4f Power Spectral Density Export Panel . . . . . . . . . . . . . . . . . . .352
Figure 14.4g Power Spectral Density Display . . . . . . . . . . . . . . . . . . . . . . .353
Figure 14.5a Power Spectral Density Compare Panel . . . . . . . . . . . . . . . . .355
Figure 14.5b PSD Compare Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .356
Figure 14.6a Navigating in Roughness Analysis . . . . . . . . . . . . . . . . . . . . .361
Figure 14.6b Roughness Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .361
Figure 14.6c Auto Program Edit Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . .362
Figure 14.6d Screen Layout Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .363
Figure 14.6e Roughness Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .364
Figure 14.6f Peak Threshold Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .365
Figure 14.6g Area Threshold Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .366
Figure 14.6h Surface Area Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . .366
Figure 14.6i Basic Roughness Measurements . . . . . . . . . . . . . . . . . . . . . . .370
Figure 14.6j Summit Illustrations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .375
Figure 14.7a Section Analysis Illustrated. . . . . . . . . . . . . . . . . . . . . . . . . . .379
Figure 14.7b Section Command Profile . . . . . . . . . . . . . . . . . . . . . . . . . . . .380
Figure 14.7c Navigating in Section Analysis . . . . . . . . . . . . . . . . . . . . . . . .381
Figure 14.7d Section Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .381
Figure 14.7e Section Save Note Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . .382
Figure 14.7f Section Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . .383
Figure 14.7g Section Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . .384
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Figure 14.7h
Figure 14.8a
Figure 14.8b
Figure 14.8c
Figure 14.8d
Figure 14.8e
Figure 14.8f
Figure 14.8g
Figure 14.9a
Figure 14.9b
Figure 14.9c
Figure 14.9d
Mouse Drawing Line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 390
Stepheight Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 391
Stepheight Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 392
Configuration File List Panel . . . . . . . . . . . . . . . . . . . . . . . . . 393
Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . 393
Stepheight Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 394
Level Option Profile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 395
Stepheight Analysis Image . . . . . . . . . . . . . . . . . . . . . . . . . . 397
Example of Dull Probe on a Deep Feature . . . . . . . . . . . . . . 399
Tip/Image Relationship . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 400
Wooden Block Analogy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 401
A perfect spike on the sample surface yields a perfect tip estimate.
402
Figure 14.9e A sample with no sharp features yields a dull tip estimate.. . 402
Figure 14.9f A sample with feature sizes similar to the tip size yields a tip estimate
that combines tip and sample geometry. . . . . . . . . . . . 402
Figure 14.9g Typical Tip Qualification Display Monitor . . . . . . . . . . . . . . 403
Figure 14.9h Cross Sections on Tips. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 404
Figure 14.9i Tip Estimation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 404
Figure 14.9j Aspect Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 405
Figure 14.9k Auto Tip Qualification Panel . . . . . . . . . . . . . . . . . . . . . . . . . 406
Figure 14.9l Tip Image Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 407
Figure 14.9m Spike Height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 409
Figure 14.9n Height from Apex . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 410
Figure 14.10a Main Trench Analysis Panels . . . . . . . . . . . . . . . . . . . . . . . 413
Figure 14.10b Trench Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 414
Figure 14.10c Trench Configure Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . 415
Figure 14.10d Peaks Correlation Histogram. . . . . . . . . . . . . . . . . . . . . . . . 416
Figure 14.10e Trench Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . 417
Figure 14.10f Trench Display Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . 418
Figure 14.11a Width Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 419
Figure 14.11b Width Configure Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 421
Figure 14.11c Peaks Correlation Histogram . . . . . . . . . . . . . . . . . . . . . . . . 422
Figure 14.11d Width Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 423
Figure 14.11e Width Auto Program Edit Panel. . . . . . . . . . . . . . . . . . . . . . 424
Figure 14.11f Width Display Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 425
Figure 14.11g Linear Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 426
Figure 14.11h Side Angle Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . 427
Figure 14.11i Electric Field Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 427
Figure 14.11j Width Histogram Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . 428
Figure 14.12a MSM and HFMFM Main Panels . . . . . . . . . . . . . . . . . . . . . 431
Figure 14.12b MSM Configure Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 432
Figure 14.12c MSM Defining Window Parameters . . . . . . . . . . . . . . . . . . 433
Figure 14.12d MSM Data Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 435
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Chapter 15
Modify Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .439
Figure 15.2a Median Filter Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .442
Figure 15.2b 3 x 3 Pixel Matrix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .443
Figure 15.2c Gaussian Filter Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . .444
Figure 15.3a Clean Image Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .444
Figure 15.3b Clean Image Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .445
Figure 15.3c Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . .447
Figure 15.4a Contrast Enhancement Panel . . . . . . . . . . . . . . . . . . . . . . . . .448
Figure 15.4b Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . .450
Figure 15.5a Convolution Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .451
Figure 15.5b Convolution Auto Program Edit Panel. . . . . . . . . . . . . . . . . .453
Figure 15.6a Detrend Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .454
Figure 15.6b Detrend Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . .455
Figure 15.6c The Original Image in Detrend Image Display. . . . . . . . . . . .456
Figure 15.6d Filtered Detrend Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .457
Figure 15.7a Edge Enhance Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .458
Figure 15.7b Sobel Kernel in 3 x 3 Pixels . . . . . . . . . . . . . . . . . . . . . . . . . .458
Figure 15.7c Edge Enhance Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .458
Figure 15.8a Erase Scan Lines Example . . . . . . . . . . . . . . . . . . . . . . . . . . .459
Figure 15.8b Erase Scan Lines Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .459
Figure 15.9a Flatten Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .463
Figure 15.9b Flatten Warning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .464
Figure 15.9c Flatten Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . .465
Figure 15.9d Raw Image Epitaxial Gallium Arsenide . . . . . . . . . . . . . . . . .467
Figure 15.9e Flattened Image Epitaxial Gallium Arsenide . . . . . . . . . . . . .467
Figure 15.10a Larger Filter Cutoff . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .468
Figure 15.10b Smaller Filter Cutoff . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .468
Figure 15.10c Single Axis Gaussian Filter Panel . . . . . . . . . . . . . . . . . . . . .469
Figure 15.10d Gaussian Auto Program Edit Panel. . . . . . . . . . . . . . . . . . . .471
Figure 15.10e Views of Defraction Grating . . . . . . . . . . . . . . . . . . . . . . . . .473
Figure 15.10f Magnetic Domains in a Permalloy Specimen . . . . . . . . . . . .474
Figure 15.10g Gaussian Highpass-Filtered Images . . . . . . . . . . . . . . . . . . .475
Figure 15.11a Altering an Ellipse Geometry . . . . . . . . . . . . . . . . . . . . . . . .476
Figure 15.11b Geometric Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .477
Figure 15.12a Highpass Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .480
Figure 15.13a Invert Command Illustrated. . . . . . . . . . . . . . . . . . . . . . . . . .482
Figure 15.13b Invert Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .483
Figure 15.14a Lowpass Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .484
Figure 15.14b Low Pass Auto Program Edit Panel . . . . . . . . . . . . . . . . . . .485
Figure 15.15a Median Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .486
Figure 15.15b Median Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . .487
Figure 15.16a Parameter Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .488
Figure 15.17a Plane Fit Auto Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .491
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Figure 15.17b
Figure 15.17c
Figure 15.17d
Figure 15.18a
Figure 15.18b
Figure 15.19a
Figure 15.20a
Figure 15.20b
Figure 15.21a
Figure 15.21b
Figure 15.21c
Figure 15.21d
Figure 15.21e
Figure 15.22a
Figure 15.22b
Figure 15.23a
Figure 15.23b
Figure 15.23c
Chapter 16
Plane Fit Auto Program Edit Panel . . . . . . . . . . . . . . . . . . .
Saddle Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Plane Fit Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Plane Fit Manual Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Plane Fit Manual Auto Program Edit . . . . . . . . . . . . . . . . .
Resize Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Rotate Image Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Rotate Image Auto Program Edit. . . . . . . . . . . . . . . . . . . . .
Spectrum 2D Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Two-Dimensional FFT Spectrum 2D Panel. . . . . . . . . . . . .
Horizontal Passband Box Illustration . . . . . . . . . . . . . . . . .
Vertical Passband Box Illustration . . . . . . . . . . . . . . . . . . . .
Spectrum 2D Hot Spots . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Effects of Image Subtraction . . . . . . . . . . . . . . . . . . . . . . . .
Subtract Image Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Zoom Command Illustrated . . . . . . . . . . . . . . . . . . . . . . . . .
Zoom Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Zoom Auto Program Edit Panel. . . . . . . . . . . . . . . . . . . . . .
492
494
495
496
497
500
501
503
504
505
510
511
512
513
513
515
515
516
Utility Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 519
Figure 16.1a Utility Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.2a Print Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.3a Auto Program File List Panel. . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.3b Auto Program Edit Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.4a Recipe Auto Program File List . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.5a Auto Result File List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.6a Autocalibration Warning . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.6b X-Y Piezo Calibration Panel . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.7a Tiff Export Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.8a TIFF Import Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.9a ASCII Export Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.10a ASCII Import Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.11a JPEG Export Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.12a Profile Import Example . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.12b Profile Import Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Figure 16.13a Color Table Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
520
520
521
522
523
524
525
525
528
529
530
532
533
534
534
535
Chapter A
Tip Selection Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 539
Chapter B
File Formats. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 547
Figure B.3a Single and Two-Image Data File Structure . . . . . . . . . . . . . . . 549
Figure B.3b Example of a Two-image Header File . . . . . . . . . . . . . . . . . 550
Figure B.4a ASCII Export Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . 554
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Chapter 1
Glossary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .563
No figures available
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Chapter 1
Introduction
NanoScope ™ systems from Digital Instruments Veeco Metrology Group are technological leaders
in the field of scanning probe microscopy (SPM). They provide fully digital software control of the
SPM process, from Real time manipulation of the microscope system to Offline viewing, analysis
and modification tools.
The focus of this manual is the software. It is a reference to the tasks related to your NanoScope
system. The material covered provides an overview to all of the graphical interface, menus,
toolbars, dialog boxes and parameters in the software for version 5.12.
This chapter includes the following topics:
•
Rev. C
Conventions in this Manual Section 1.1
•
Chapter Contents Section 1.1.1
•
Command Panels Section 1.1.2
•
NanoScope Command Icons Section 1.1.3
•
NanoScope Software Overview Section 1.2
•
Technical Support at Digital Instruments Section 1.3
Command Reference Manual
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Introduction
Conventions in this Manual
1.1
Conventions in this Manual
Most chapters are named for top-level menu bar commands. The organization is by software
command in the order they appear on the menus and dialog boxes. Every attempt has been made to
include all possible NanoScope software commands in this manual even if they may not be
accessible from your particular system. Digital Instruments, Veeco Metrology Group is continually
updating software and product offerings to remain at the cutting edge of the rapidly changing SPM
field. Appendices contain selected advanced technical topics.
Table 1.1a shows the general organization of this manual.
Table 1.1a Command Reference Manual Organization
Category
System-level
Information
Real time Menu
Commands
Offline Menu
Location
Description
Chapter 1
Manual Conventions
Chapter 1
Software Overview
Chapter 1
Hardware Overview
Chapter 1
DI Contact and Technical Support
Chapter 2
DI System Menu
Chapter 3
Panels Menu: Control Dialog Boxes
Chapter 4
Motor Menu
Chapter 5
View Menu
Chapter 6
Frame and Capture Menus
Chapter 7
Microscope Menu
Chapter 8
Vision Menu
Chapter 9
Stage and Recipe Menus
Chapter 10
File Menu
Chapter 11
View Menu
Chapter 12
Image Menu
Chapter 13
Analyze Commands A-M
Chapter 14
Analyze Commands N-Z
Chapter 15
Modify Menu
Chapter 16
Utility Menu
Appendix A
Tip Selection Guide
Appendix B
Data File Formats
Commands
Appendices
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Introduction
Conventions in this Manual
1.1.1 Chapter Contents
Each chapter title signifies menu item(s) on the NanoScope software. The chapter details sub-menu
commands and explanations of each dialog box accessed by selecting the command.
Note:
If the menu item or subcommand is not listed on your system, it may be
disabled or does not exist for your system.
Note:
Parameters disabled or grayed-out may be administrator-access only.
Note:
Some parameters are disabled due to mode of operation (e.g., tapping) or
microscope profile (Real time > Microscope > Profile) selected.
1.1.2 Command Panels
Each panel (also referred to as Dialog Box) on the Control Monitor has basic elements that enable
optimized scanning or analysis. The panels are unique in that they are vieable and changeable
during microscope operations.
The parameters and buttons often lead to subsequent dialog boxes. Each section in this manual
describes the panels, parameters, buttons and settings. Basic knowledge of using a computer is
necessary to understand the parameters.
Panel Elements
Panel elements are those portions of a dialog box that you view to adjust parameters. Figure 1.1a
details general panel elements and terms used in this manual.
Figure 1.1a Screen Elements:
Title Bar Active
/ Inactive
Feedback Controls
Main Controls
Z modulation:
0
Integral gain:
0.4000
Proportional gain:
0.6000
LookAhead gain:
Amplitude setpoint:
2.000 V
Amplitude limit:
2.500 V
Drive frequency:
Drive phase:
Button
Rev. C
Scroll Bar
0
Window Text
300.0 kHz
0 deg
Interleave Controls
Command Reference Manual
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Introduction
Conventions in this Manual
1.1.3 NanoScope Command Icons
NanoScope icons in this manual correspond to the software command icons. Selecting the icon
allows for an alternative method to execute a command. By clicking on the icon, certain dialog
boxes appear or the system executes a command also found as a menu or sub-menu item.
Specific icons relate to Real time or Offline functions. They can be found on your Control Monitor
toolbar. Table 1.1b lists the command icons on the real time and Offline toolbars.
Table 1.1b Real time NanoScope Icons
Real time Icon
4
Function
Offline Icon
Function
Real time Mode
Offline Mode
DI System Menu
DI System Menu
Engage
Browse Mode
Withdraw Tip
Top View
Image Mode
Surface Plot
Scope Mode
Section Analysis
Frame Up
Bearing Analysis
Command Reference Manual
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Introduction
Conventions in this Manual
Real time Icon
Function
Offline Icon
Function
Frame Down
Roughness
Force Calibrate Mode
Flatten
Cantilever Auto Tune
Plane Fit
Capture Image
Auto Program
Abort
Offline Mode
Focus Surface
Focus Tip
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Introduction
NanoScope Software Overview
1.2
NanoScope Software Overview
NanoScope systems provide digital software control of the SPM process, from real time
manipulation of the microscope system to Offline viewing, analysis and modification tools. While
the focus of this manual is the software, it is difficult to separate software from hardware, especially
in integrated systems that have been designed to work as a unit.
NanoScope Scanning Probe Microscope systems consist of hardware and software elements. All
hardware systems are controlled by the software elements (software dialog boxes, parameters and
commands). The software displays on both a Control Monitor and a Display Monitor. More recent
NanoScope SPM systems—including Dimension™ Series, MultiMode™, electrochemical
scanning probe microscopes (ECs), and base-style atomic force microscopes (AFMs)—use the
same basic software element, referred to as Version 5.x (i.e., 5.12 in this manual) NanoScope
software.
1.2.1 System Overview
The NanoScope software system includes basic computer hardware—two-button mouse, keyboard,
CPU, two monitors—and may or may not include a digital signal processor (DSP).
One monitor is configured as the Display Monitor (the NanoScope Image) and the other monitor as
the Control Monitor (the NanoScope Control). All captured images display on the Display Monitor.
The software mode (Offline or real time) and control panels display on the Control Monitor.
Executing commands or changing parameters are done on both monitors. The design of the version
5.0+ NanoScope graphical user interface (GUI) allows you to easily move between these modes,
and even to operate in more than one mode at a time.
Real time Mode Definition
The NanoScope software provides operation of the real time mode of the microscope and other
hardware elements. The software also determines the type of data to be collected and how to store
it.
Offline Mode Definition
The Offline software mode contains numerous commands for data analysis, modification,
presentation and storage of images.
Image files for Offline analysis include:
6
•
Data captured in real time
•
Previously captured images stored as image files
•
New image files created using Offline modification or analysis commands.
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Introduction
NanoScope Software Overview
The user selects commands, enters and changes parameters, changes modes, selects files and
otherwise interfaces with the software using a series of menu bars, drop-down menus, dialog boxes
and icons.
Use the keyboard (e.g. quick keys), the mouse or a combination of both to make selections in the
Control Monitor. In the Display Monitor, only the mouse may be used for selecting commands or
parameters.
For additional information on executing commands or entering parameters, see Section 1.2.4 and
Section 1.2.5.
1.2.2 Starting Up the NanoScope Software
Start the NanoScope software by double-clicking on the desktop shortcut labeled NanoScope III
5.x. (If your system is being used to run the DOS version of the software, start the NanoScope
software by entering “Z” at the DOS prompt from the appropriate directory.) You are presented with
the initial NanoScope screen on the Control Monitor and the Digital Instruments NanoScope logo
screen on the Display Monitor.
The start up screens and subsequent menu items parallel the organization of the software and
NanoScope Command Reference Manual. Chapters of the Command Reference Manual are
organized to parallel the software’s organization.
The following section "Accessing the Start Up Screens" provides more information for accessing
commands and managing the flow of NanoScope software from the initial NanoScope screen.
Opening the Software
Start the NanoScope software by double-clicking on the desktop shortcut labeled NanoScope III
5.x. (If your system is being used to run the DOS version of the software, start the NanoScope
software by entering “Z” at the DOS prompt from the appropriate directory.) You are presented with
the initial NanoScope screen on the Control Monitor and the Digital Instruments NanoScope logo
screen on the Display Monitor.
Accessing the Start Up Screens
Upon first entering the NanoScope software, the two monitors display Start Up screens.
The Control Monitor displays a blank screen with the three system icons. The three icons (i.e., real
time mode, Offline mode and system level operations) parallel the organization of the software and
NanoScope Command Reference Manual
(See Figure 1.2a).
Note:
Rev. C
The NanoScope Control is also referred as the Control Monitor in this manual.
Command Reference Manual
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Introduction
NanoScope Software Overview
Figure 1.2a Control Monitor Start Up Screen
“NanoScope Control”
DI System
Menu
Offline
Mode
Real time
Mode
Note:
The initial screen appears only once for each time you enter the software.
The Display Monitor displays the NanoScope System information (See Figure 1.2b).
Note:
The NanoScope Image is also referred as the Display Monitor in this manual.
Figure 1.2b Display Monitor Start Up Screen
“NanoScope Image”
1.2.3 Accessing Real time
Select the real time icon to access the real time screens. Once the selection is made, a menu bar will
always be present across the top of the Control Monitor. The bar displays general real time menu
items and a toolbar with command icons (See Figure 1.2c).
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NanoScope Software Overview
Figure 1.2c Real time Control Monitor
Select the DI icon in the real time menu to make software mode selections (e.g., the Microscope
Select command). For complete details on the commands in the DI menu, see DI System Menu,
Chapter 2.
The default panels that appear on the Control Monitor have their own menu sub-command (e.g.,
Panels/Interleave Controls). Access sub-menu commands by selecting the menu item or icon. For
example, access Cantilever Tune panels by the path: View/Sweep/Cantilever Tune or select the
Cantilever Tune icon.
A thick black border around a button indicates a default button. Pressing ENTER selects the default
button. A thick black border around a panel indicates that it is the active panel.
For further details on the Display Monitor, see Interfacing with the Display Monitor Section
1.2.5.
Offline Screens
Once in the NanoScope screen, select the Offline icon to access the Offline default screens. Figure
1.2d shows the default Control Monitor display.
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Introduction
NanoScope Software Overview
Figure 1.2d Offline Control Monitor
Menu Bar
Tool Bar Icons
Directory of Files
Status Bar
The Display Monitor opens the last image file in use or the first file selected on the default file list
(See Figure 1.2e).
Figure 1.2e Offline Display Window
Captured Image
Color Table
Basic Scan
Information
Image Note and
File Name
1.2.4 Control Monitor Mouse and Keyboard Functions
All movement from command-to-command and mode-to-mode on the Control Monitor can be
completed exclusively from the keyboard or with a combination of mouse and keyboard actions.
Using the Mouse
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NanoScope Software Overview
Mouse actions are similar to other common GUI applications and include clicking, double-clicking,
click-and-drag, as well as specific actions that can be initiated only from the right or left mouse
button.
In this manual, specific mouse actions are described and indicated with the heading Mouse
Operations. For further procedures on using the mouse, see the desired section in this manual.
Accessing and Selecting Commands Using the Keyboard
There are many keystrokes and keystroke combinations for moving through the boxes, panels,
windows and commands of the Control Monitor. These can be used exclusively or in combination
with mouse operations (See Table 1.2a).
Table 1.2a Control Monitor Keystrokes
Keystrokes
LEFT, RIGHT
UP, DOWN
ENTER
ESC
ALT + QUICK KEY
Action
Within a control entry: increases or decreases a value or cycles through possible values
Within a menu or section: Moves the highlight left or right,
or to a subordinate menu
In conjunction with Move or Size:
controls the direction of movement or increase/decrease
Within a menu: Moves the highlight up or down, and enters
a value
In conjunction with Move or Size:
controls the direction of movement or increase/decrease
Enters a value, initiates a command or makes a selection
Closes a window, menu, or dialog box and returns control to
previous level
Within a dialog box, cancels an edit in progress
Jumps to appropriate menu bar command and pulls down
menu
ALT + /
Opens DI System Menu
ALT + .
Opens a system menu, for example, the “- button” at the upper left of a window
SPACE BAR
For entries with preset options: brings up a menu of available
options
CTRL + TAB
PAUSE
PRINT SCRN
CTRL + F4
TAB
SHIFT + TAB
Cycles control from window to window
Activates the Abort Manager
Prints the screen contents visible on the Display Monitor
Closes the current dialog box or window
Moves the highlight from field to field within a dialog box.
Reverses Tab movement
Use UP and DOWN (arrow keys) to scroll up or down the menu commands. The highlight bar
indicates the currently selected command. Press ENTER to activate the highlighted command.
Pressing ESC closes the open menu and returns you to the previous level.
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Introduction
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Quick Key Commands
Many commands have quick key commands (series of keys to enter in place of using the mouse).
Open menus, access dialog boxes and execute commands with the keys or combination of
keystrokes. In the NanoScope software, the quick keys are designated by an underlined letter in
the command name (e.g., R is the quick key in Real time).
To activate a quick key command, press the ALT button then the quick key, or select the command
with the mouse and press the indicated quick key.
Quick keys only apply when in an active box, menu, dialog box or window that is currently visible
on the screen. Active dialog boxes are designated in color with a highlight on the dialog box title or
with a heavy frame around the dialog box.
Procedure to Move Dialog Boxes Using Quick Keys
Move or relocate windows or dialog boxes on the control screen as follows:
1. With the dialog box selected, press the Alt key and the period key simultaneously (ALT + .)
to open the drop-down menu in the upper left corner of each dialog box (See Figure 1.2f).
Figure 1.2f The Dialog Box Drop-down Menu
Panel
Drop-down
Menu
Note:
The dialog box drop-down menu is noted by a dark hyphen (–) within a grey
box in the upper left corner of the dialog box.
2. Press M to activate the Move option.
3. When the highlight appears around the dialog box, use LEFT, RIGHT, UP or DOWN to move
the highlight to the desired new position.
4. Press ENTER to execute the dialog box to move.
Execute other options in the menu similarly (for example, to execute the Show All Items, the quick
key stroke is A).
Procedure to Resize Dialog Boxes Using Quick Keys
The Size option allows for resizing the dialog box or screen. Resizable windows have bracketed
corners; for example, the File List screen in the Offline mode is resizable. Use the following
procedure to resize a window:
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NanoScope Software Overview
1. Be sure the window to be resized is the active one on the monitor, (i.e. has a thick border
around it or highlighted top border on windows).
2. Press the ALT key and the period key simultaneously (ALT + .) to open the system menu in
the upper left corner of the dialog box .
3. With the Move/Close drop-down menu open, press ALT + S or just S to activate the Size
function.
4. Use the arrow keys to increase or decrease the size in either direction.
5. Press ENTER to set the new size.
1.2.5 Interfacing with the Display Monitor
In general, use the Display Monitor for the following functions:
•
Displaying images as they are being scanned.
•
Browsing through smaller versions of stored images.
•
Displaying stored images.
•
Presenting resulting images, data tables or graphs from modification and analysis
functions.
•
Receiving input from the user.
•
Transmitting that input to the software.
•
Initiating software functions.
•
Making changes to the visible images and data.
One of the major productivity features of NanoScope software is its ability to interact in Real time
with the user.
Note:
All user interaction with the Display Monitor requires a two-button mouse.
Images on the Display Monitor remain on the Display Monitor, even after exiting the software, or
until replaced by another image, mode or application.
Information shown on the Display Monitor is function- and mode- dependent, and is normally
indicated by the title at the top of the display screen.
Display Monitor Interface
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A menu bar contains menu selections and commands that immediately initiate a function or action.
User choices are made from the menu bar and the bar reflects choices or modes selected. When a
command on a Display Monitor menu bar is the same as a button on the Control Monitor, selection
can be made from either location (the resulting software activity is identical).
The Display Monitor screen includes the following components:
•
Scanning Image, Captured Image or Plot - While scanning, a cursor shows Real time
data collection. Some views show a plot of the data. Captured images include stored
data for analysis.
•
Menu Bar - Often list function commands.
•
Status Bar - Bottom bar lists items in use on display.
Note:
•
Almost always, when a menu bar is present along the top of the screen, a status
bar is visible along the bottom of the screen.
Parameter Choices - Measurements or items specified for analysis.
Note:
In many cases, following selection of applicable parameters, the user must
select the EXECUTE command before function activity begins.
•
Graphs - Histogram, Correlation graphs for analysis.
•
User-entered Notes and/or Date - Captured data includes this reference information.
•
Interactive Cursors - Line, Box, etc. that allow for specific analysis.
•
Diagrams - Allows for further analysis of a sample image.
•
Measurements or information relating to the current function - Relate to Parameter
choices and graphs or diagrams on the display screen.
Cursor Types
The cursor types are as follows:
•
Lines
•
Solid boxes
•
Outlined boxes
•
Shapes (e.g., triangles and circle)
•
Color coded—Corresponds to other information on the screen.
When a cursor is moved by the user, it can result in: changes in the image, graph, display data,
viewing perspective, or many other functionally dependent actions.
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Technical Support at Digital Instruments
1.2.6 Mouse Operations on the Display Monitor
1. To open a drop-down menu or initiate a function from the Display Monitor, simply point and
click once with the mouse.
2. Point and click once to make a parameter selection.
3. To select and move a cursor, point to it and click once with the mouse (to “pick up” the
cursor, box, line, etc). Move the mouse to the desired location, and click a second time to
deselect (to “drop”) the cursor.
Note:
In some instances, a third mouse click “picks up” and move the entire shape
(i.e., box, triangle or circle).
4. When in Browse mode, or when dual images are presented, point and click once with the
mouse to select one or more images. The selected images are indicated with an X and
subsequent selection of a function allows manipulation of the selected images.
5. Functions that require specific left or right button actions, or actions different from what is
listed in this chapter, are described within the manual as needed.
6. For precise positioning with the mouse, press and hold down the SHIFT key while moving
the mouse.
Note:
1.3
This causes the mouse to move with only one-quarter of its normal speed.
Technical Support at Digital Instruments
Your satisfaction and productivity regarding Digital Instruments, Veeco Metrology Group products
and documentation are absolutely essential. You can obtain technical support in a variety of ways:
via telephone, send a fax, send us an e-mail, access our World Wide Web site, or send bug reports or
documentation change requests through normal mail processes.
1.3.1 Submitting Bug Reports
The NanoScope software includes the capability to automatically generate a bug report if the
system should abort for any reason. This bug report consists of all the information generally
requested by the programmer for analysis of the problem. If the system should abort, the next time
the software is initiated, a form is displayed on the Control Monitor. The user should enter their
name and a brief description of the functions in use when the crash occurred. Describe the situation
as accurately as possible. When transmitted, a file labeled “bug.txt” will be created. If the
NanoScope system in use has a drive labeled “Q,” the bug.txt file is automatically placed there. If
another bug.txt file exists, the number on the file name is incremented or the information is
appended to the previous file. If there is no Q drive, the software asks you where to place the file.
Once the file is created, you can put it on a floppy diskette and mail it to the address below or attach
it to an
e-mail message and submit it to us that way.
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15
Introduction
Technical Support at Digital Instruments
Note:
You may not get a response to your bug submittal, but be assured that our
programmers will analyze the problem and fix it in a future release if necessary.
1.3.2 Contact Information
Mailing Address:
Technical Documents(or Technical Support
Digital Instruments, Veeco Metrology Group
112 Robin Hill Rd.
Santa Barbara, CA 93117
Voice Phone:(805) 967-1400, (800) 873-9750
Fax:(805) 967-7717
World Wide Web: http://www.di.com
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Command Reference Manual
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Chapter 2
2.1
DI System Menu
Overview
DI System Menu for Real-time and Off-line modes offer the same commands with the exception of
the Access Control and NanoScript commands. The purpose of this menu item is to designate
Microscope settings, change password levels, customize menus and interface settings. Some menu
items may be unique (e.g., Customize) to the microscope mode, but the main functions of the DI
menu include the following:
•
About... Command Section 2.2
•
Real time and Offline Commands Section 2.3
•
Microscope Select Command Section 2.4
•
NanoScript Command Section 2.5
•
Access Control Command Section 2.6
•
Customize Command Section 2.7
2.1.1 Di Menu
The Digital Instruments logo (DI) in the upper-left corner of the Control Monitor opens a main
system menu (See Figure 2.1a).
Figure 2.1a DI Menu
•
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DI System Menu
About... Command
2.2
About... Command
Clicking on the About... option displays information about the NanoScope software (See Figure
2.2a).
Figure 2.2a About Nanoscope Panel
This panel provides a version number for your software, its creation date, and a copyright notice.
Before contacting technical support for telephone assistance, be sure to have the version number
available. This will assist in identifying the specific features of your system. To remove the panel,
click on the OK button.
2.3
Real time and Offline Commands
Select the Real-time and Off-line submenu items to enter that microscope mode. The menu option
is available in both modes. You can also switch between modes by clicking on the icon in the top
right corner of the display screen (See Figure 2.3a).
Figure 2.3a Real-time and Off-line Icons
Real-time
2.4
Off-line
Microscope Select Command
This option configures the software for the type of SPM used. If you have only one type of SPM,
this parameter need only be configured once. Users with multiple SPMs will use this panel when
switching SPMs. The panel features a list of available microscopes and a scroll bar (See Figure
2.4a).
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Microscope Select Command
Figure 2.4a Microscope Select Panel.
Buttons to
Change or
Delete
Microscope
Selection
List of
Available
Microscopes
To select a microscope that has already been configured, select the appropriate microscope name,
then click Ok.
Note: If the microscope has not yet been configured, it will be necessary to click the EDIT
button first.
Buttons on the Microscope Select Panel
•
Edit—Accesses the Equipment panel containing details of the equipment
configuration. These are usually configured during the initial installation, and seldom
require changing (See Section 2.4.1).
•
New—Accesses the Equipment New panel to configure new microscope settings.
•
Delete—Accesses an Equipment Delete warning panel.
•
Cancel—Exits the Microscope Select panel.
2.4.1 Microscope Select/Equipment Panel
In the Microscope Select panel, click the EDIT button to access the Equipment panel (See Figure
2.4b).
Figure 2.4b Equipment Panel Configured for a MultiMode
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DI System Menu
Microscope Select Command
Note: The panel name includes a file name for the selected microscope parameters. This file
(on the SPM/Equip directory) contains the same parameters in a text format.
Parameters in the Equipment Panel
•
Description—Name assigned to the equipment configuration. Many users enter the
microscope type (“AFM,” “STM,” etc.); however, any label may be used (“SPM#2,”
“Dale’s MultiMode,” etc.). When the Equipment panel is closed, this name will be
listed on the Microscope Select panel alongside others.
•
Controller—Type of control box connected between the SPM and computer. Typical
choices include: IIIA, IIIE, Metrology, etc.
•
Microscope—SPM being configured, including AFM, MultiMode, BioScope, etc.
•
Extender—Mode of the installed Extender Electronics Module. Range and Settings:
None, Basic, Capacitance, Velveeta, and Creamy Velveeta.
•
Vision—Type of automatic vision or pattern recognition system installed (not to be
confused with the standard on-axis video system installed on all Dimension Series
SPMs). On systems without an automatic vision system, select None. Other choices
include Cognex and Frame Grabber.
•
Motor Sensitivity (MultiMode only)—Distance of movement at each step toward the
surface.
Note: Changing this parameter is not recommended.
•
Zoom System—Type of Zoom System installed on the instrument. Types include:
Motorized and 2-Camera.
•
Air Table—Identifies the presence of an air table. Choices include: None or Basic.
Buttons on the Equipment Panel
22
•
Scanner—Accesses the Scanner Select panel, which lists scanner files alphabetically
(See Section 2.4.2).
•
Cancel—Exits the Microscope Select/Edit option, and closes the window.
•
Advanced—Displays the Equipment panel parameters and additional parameters (See
Section 2.4.3).
•
Serial—Displays the Serial Port Configuration panel. This panel allows the user to
assign and configure the serial ports (See Section 2.4.4).
Command Reference Manual
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DI System Menu
Microscope Select Command
2.4.2 Equipment / Scanner Panel
In the Equipment panel, click on the SCANNER button to access the Scanner Select panel. (See
Figure 2.4c).
Figure 2.4c Scanner Select Panel
To configure a scanner, select the scanner name from the list, then click on the OK button. Click the
CANCEL button to exit the panel.
Note: Only files included within the SPM/EQUIP directory are listed on the Scanner Select
panel.
See also Real-time/Microscope/Scanner.
2.4.3 Equipment / Advanced Panel
In the Equipment panel, click on the ADVANCED button to display additional microscope
equipment parameters (See Figure 2.4d).
Figure 2.4d Advanced Equipment Panel
Advanced
Parameters
Advanced Equipment Parameters
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DI System Menu
Microscope Select Command
•
Analog 2—Configures the Analog 2 signal to switch either manually (User defined) or
by the Atten switch.
•
Scanner file—Name of file assigned to the scanner.
•
Profile name—Name (alias) assigned to the microscope profile (see Real-time /
Microscope / Profile section in this manual).
•
Controller ciao, Microscope ciao, Custom ciao—(Reserved for future use.)
2.4.4 Equipment / Serial Port Configuration Panel
In the Equipment panel, click on the SERIAL button to access the Serial Port Configuration panel
(See Figure 2.4e).
Figure 2.4e Serial Port Configuration Panel
This panel allows the user to assign and configure the serial ports.
Buttons in the Serial Port Configuration Panel
•
EDIT—Accesses the Edit Port Setup window when the user has Service Access to the
system. The Port Setup Window allows the user to quickly configure each serial port
for a particular equipment type.
Note: Each peripheral item attached to the computer via serial port has pre-assigned default
values. Altering these values may affect system performance.
•
VIEW—Opens the view menu, which allows the user to view the configuration of the
items connected to the serial ports of the computer.
•
DONE—Closes the Serial Port Configuration window and saves the changes.
2.4.5 Microscope Select/New Panel
In the Microscope Select panel, click the NEW button to access the Equipment-New panel (See
Section 2.4g).
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NanoScript Command
Figure 2.4f Equipment-New Panel
The Equipment-New panel allows configuring new equipment on a microscope. The parameters
and buttons are the same as the Equipment panel. For details on the parameters, see Section 2.4.1.
Buttons on the Equipment-New Panel
•
OK—Saves the new microscope settings.
•
SCANNER—Accesses the Scanner panel to select a compatible scanner (See Section
2.4.2).
•
CANCEL—Exits the Equipment-New panel without saving the changes.
•
ADVANCED—Accesses additional items to configure the microscope (See Section
2.4.3).
•
SERIAL—Displays the Serial Port Configuration panel. This panel allows the user to
assign and configure the serial ports.
2.4.6 Microscope Select/Delete Panel
In the Microscope Select panel, click the DELETE button to access the Equipment Delete warning
panel (See Figure 2.4g).
Figure 2.4g Equipment Delete Warning Panel
2.5
NanoScript Command
The NanoScript menu opens an interface to open, edit and load macro commands. Typically, this
command, used for NanoLithography programming.
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DI System Menu
Access Control Command
There are several familiar menus offered within the NanoScript option, including a simple file
manager, edit, and a macro manager.
Note: The NanoLithography functionality is available as an optional package. For further
information on running Lithography commands on Version 5.x software, contact your
Digital Instruments, Veeco Metrology Group representative.
2.6
Access Control Command
The Access Control command allows for password only parameters or commands to be enabled.
The password needs to be enabled (i.e., by an administrator) for this command to be active. Special
functions, such as Z Exclusion and Scaling (Stage Menu) are also activated by logging out of
Service Access.
In the DI system menu, a new menu item replaces the Service Access and Administrator Access
menu items in previous software versions. The Technician level has been added in Access Control.
The Technician level access allows access to NanoScope functionality without the ability to teach
recipes (See Figure 2a).
Figure 308.2a Access Control Menu Item
7207
7206
Technician
DI Menu
New Access Control Dialog Box
You may enable or change passwords for either the technician or engineer levels. You may also turn
on or change Service Access in the Access Control dialog box.
Engineer Access
The Engineer option on the Access Control panel controls user access to higher level, sensitive
functions within the NanoScope environment, including calibration dialog boxes for robot
alignment and automatic tip exchange. This access allows for the safeguarding of sensitive
parameters from accidental or intentional damage.
Note: Special functions such as robot calibration and automatic tip exchange contain sensitive
parameters used for hardware alignment. Entering parameters incorrectly may lead to
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Command Reference Manual
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DI System Menu
Access Control Command
serious mechanical failures and/or damage to samples; these functions should be
password protected.
When Engineer access is turned on, direct access to sensitive dialog boxes is allowed. When
Engineer access is turned off, sensitive functions are disabled, appearing gray on dialog boxes.
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DI System Menu
Customize Command
2.7
Customize Command
The Customize command accesses a screen to configure the menu commands, auto program delay
time and the screen display settings (e.g., screen display and font size) (See Figure 2.7a).
Figure 2.7a Customize Menus Panel
2.7.1 Customize Menus
Not all commands are set by default. To access the available list, use the Customize function (Offline/DI/Customize/View Menu). This function accesses a screen listing all main menu items in Offline mode (See Figure 2.7b). Select the Menu item to access the list of available commands to view.
Select the desired commands or Select all to view all commands in the selected menu item.
Figure 2.7b Customize Menus Panel
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Command Reference Manual
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DI System Menu
Customize Command
2.7.2 Auto Program Delay
The Auto Program Delay function accesses a panel to enter a time in seconds for the Auto
Program commands to delay before the saved commands begin. The default is 0.
Figure 2.7c Auto Program Delay
2.7.3 Color Settings
The Color Settings function accesses a panel to customize the display settings
(See Figure 2.7d).
Figure 2.7d Color Settings Panel
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DI System Menu
Customize Command
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Command Reference Manual
Rev. C
Chapter 3
Panels Menu
Real Time control Panel menu commands (Real Time/Panel) appear on the default screen upon
entering Real Time mode. Each control panel contains parameters important for optimizing the
scanning process. The large number of parameters (more than 2,000) allow adjustment and
manipulation of the hardware.
Note:
Most SPM operators use only a few of the parameters to obtain images. The
parameters within each panel are often microscope-specific and may be hidden.
This chapter discusses the following control panel components:
3.1
•
Overview of Control Panels Section 3.1
•
Scan Controls Section 3.2
•
Feedback Controls Section 3.3
•
Other Controls Section 3.4
•
Interleave Controls Section 3.5
•
Channel (1, 2, 3) Section 3.6
•
Gain Adjust Section 3.7
•
Drive Feedback Controls Section 3.8
Overview of Control Panels
Generally, control panels are organized according to some common task. More than one panel is
usually required to obtain a sought-after image. For this reason, NanoScope software allows all
control panels to be viewed simultaneously (See Figure 3.1a).
Rev. A (variable)
Document Title (variable, update from TP)
31
Panels Menu
Overview of Control Panels
Figure 3.1a Real Time Control Panels
When a panel is selected from its menu (or by clicking on its icon), it appears on the Control
Monitor. Move the panels by dragging them to desired locations within the NanoScope Control
screen. To close a panel, click twice on the HYPHEN button at the upper-left corner, press
CONTROL+F4 (See Figure 3.1b).
Note:
Each panel also has CLOSE, EXIT or QUIT buttons.
Figure 3.1b Panel Drop-down Menu
Access to Panel
Drop-down menu.
Select to Display All
Items
Control panels replace the switches, knobs, and dials required in earlier, analog versions of SPMs.
For example, Scan size, Scan angle, Scan rate, Feedback Gains and other important parameters
can be adjusted on the control panel with the mouse.
Clicking on a parameter and then dragging the mouse back and forth controls the parameter much
like an old analog slider.
The significance, range of acceptable values, and specific information about control panel
parameters are discussed in this chapter.
Parameters listed in the control panels depend on the microscope selected. Parameters necessary
for one style of microscope are not applicable to another. For example, the Drive frequency and
Drive Amplitude parameters are enabled on the Feedback Controls panel only when the
microscope AFM mode is switched to TappingMode. Similarly, the Bias voltage applied to the
sample only appears in the STM control panel.
32
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Rev. A (variable)
Panels Menu
Overview of Control Panels
Some users find operating an SPM less confusing if the number of parameters is limited to only the
most essential ones. Parameters can be selected for display by clicking on the “close” button, then
selecting the Show all items option
(See Figure 3.1b).
In each panel, select or deselect displayed parameters by clicking on the box next to each parameter
For an example of “show all items” in the Scan Control Parameters, (See Figure 3.1c.
Figure 3.1c "Show All Items" in the Scan Controls Panel
Rev. A (variable)
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33
Panels Menu
Scan Controls
3.2
Scan Controls
The Scan Controls panel includes parameters influencing piezo movement and data acquisition, as
well as the ability to execute non-square scans. This control panel is probably the most frequently
used panel, as it controls what type of scan to run, how large the scan is, its angle, scan rate, and
number of samples per scan line.
Non-square scans are set using the Aspect ratio parameter. Square scans have an aspect ratio of
1:1; therefore, any other setting (2:1; 4:1; 8:1; 16:1, etc.) will produce a non-square scan. Once
selected, scans can be modified by adjusting other parameters on the Scan Controls panel.
Scan size
Determines the size of the scan by controlling the voltage applied to the X and Y piezos.
Range or Settings:
•
0 to 440 V
•
0 to XX microns (scanner-dependent)
Note:
The units of this parameter are volts if the Units parameter (Other Controls
panel) is set to Volts. The units are linear distance (nm or µm) if the Units
parameter is set to Metric (See Figure 3.2a).
Figure 3.2a Units Parameter Sub-menu
Optimizing the Scan Size Parameter
34
•
Higher voltages are required for slower piezo movement along the Slow scan axis. This
is one reason why the maximum setting of the Scan size may be less than 440 volts.
•
Non-zero X and Y offsets reduce the maximum Scan size. Each volt of X or Y offset
reduces the maximum scan size by 2 volts.
•
The Scan size and offsets can be set by using to control the Zoom and Offset
subcommands on the Display Monitor.
•
Having a non-zero Scan angle will reduce the maximum allowable Scan size.
•
The maximum Scan size will also decrease as the Scan rate increases.
Document Title (variable, update from TP)
Rev. A (variable)
Panels Menu
Scan Controls
Aspect ratio
Controls the width-to-height size ratio of scans. Set Aspect ratio to 1:1 for square scans. An
Aspect ratio of 2:1 yields scanned images having width equal to twice the height.
Range or Settings: (depends upon the number of scan lines)
•
1:1, 2:1, 4:1, 8:1, 16:1, 32:1, 64:1, 128:1, 256:1
Figure 3.2b Aspect Ratio Example
4:1
1:1
8:1
16:1
X offset, Y offset
Controls the center position of the scan in the X and Y directions, respectively.
Range or Settings:
•
±220 Volts; ± XX Microns
Hints for Optimizing the X Offset, Y Offset Parameter
Rev. A (variable)
•
The maximum amount of X and Y offset available depends upon the scanner being
used.
•
Non-zero X and Y offsets reduce the maximum Scan size. Each volt of X or Y offset
reduces the maximum scan size by 2 volts.
•
These parameters use the sample as the position reference. Therefore, a more negative X
offset value will move a feature in the current image to the left on the Display Monitor.
Similarly, a more negative Y offset moves a feature in the current image down on the
Display Monitor.
•
Using the left-arrow and right-arrow keys when the cursor is in these parameters will
decrement and increment these parameters by 10% of the Scan size.
•
Using the Zoom or Offset subcommands on the Display Monitor automatically changes
the value of X and Y offsets.
Document Title (variable, update from TP)
35
Panels Menu
Scan Controls
Scan angle
Controls the angle of the X (fast) scan relative to the sample.
Range or Settings:
•
0—359° (Any angular value can be entered with the keyboard)
Note:
Changing this parameter can dramatically affect the quality of images due to tip
effects (double tips, dull faces, etc.).
Note:
Setting this parameter to a non-zero setting may reduce the maximum
allowable Scan size 10-20 percent due to corner constraints (See Figure 3.2c).
Figure 3.2c Scan Angle Rotated Example.
Original maximum Scan size
Scan rotated 45 degrees.
Maximum Scan size is reduced.
Scan rate
The Scan Rate sets the number of fast scan lines performed per second.
Range or Settings:
•
0.1—244 Hz, depending on the Number of samples per line (See Table 3.2a).
Table 3.2a Scan Rate/ Number of Samples
Number of
Samples
Maximum Scan
rate
128
256
512
244 Hz
122 Hz
61 Hz
Hints for Using the Scan Parameters
36
Document Title (variable, update from TP)
Rev. A (variable)
Panels Menu
Scan Controls
•
The Scan size and height of features on the sample will affect the maximum Scan rate
that should be used on a given sample.
•
Ramping under NT is limited to approximately 27.9 Hz at 512 samples per line.
Lines
Selects the number of lines to scan in a frame. The Lines parameter reduces resolution along the Y
axis. It also speeds imaging or "frame rate" and reduces the size of the resulting image file.
(See also, )
Range or Settings:
•
4, 8, 16,..., maximum. To determine the maximum number of lines allowed, divide
Samples/line by Aspect ratio.
Tip velocity
Velocity of the tip (in µm/s) as it scans over the surface.
Note:
When Tip Velocity changes, the Scan Rate adjusts automatically.
Samples/line
Selects the number of sample data points per scan line.
Note:
When this parameter is changed, the number of scan lines per image (Scan
Controls/Lines) are automatically adjusted to maintain the same ratio between
the samples/line and lines per image.
Range or Settings:
•
128, 256, 512. This setting influences the size of captured files and image resolution
(See Table 3.2b).
Table 3.2b File Size/Samples per line
Samples/line value
128
256
512
Rev. A (variable)
File size (for square
scans, including 8K
header)
40 Kbytes
136 Kbytes
520 Kbytes
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37
Panels Menu
Scan Controls
Samples/line should be kept at 512 for the highest resolution. To increase the frame rate (rate at
which complete images are generated), the Lines parameter reduces. When the Lines parameter is
reduced, file sizes in Table 3.2b are reduced accordingly.
Slow scan axis
Allows the slow scan to be disabled, causing the fast scan to be repeated continuously at the same
position. This means that the image displays the same line continuously. Images may be presented
either as “true” X-Y renderings of the sample surface (Enabled), or as “stretched” single-line scans
of length equal to the Scan size (Disabled) (See Figure 3.2d).
The advantage of using the Slow Scan Axis/Disabled parameter is to empasize one area (line) to
set SPM parameters accordingly. For example, an area of the image appears fuzzy (believing SPM
parms are not optimized for the sample). Disable the Slow Scan Axis, view the image in Scope
mode, and reconfigure scan parameters to optimize the scan.
For information on viewing the image in Scope Mode, see Chapter 5, Scope Mode Section 5.2.
Note:
Disabling the Slow scan axis and viewing the Scope Mode display (View /
Scope Mode ), is a convenient way of setting the Feedback Gain parameters.
Figure 3.2d Example of Slow Scan Axis.
d
(arbitrary
line)
Slow Scan Axis Disabled
Slow Scan Axis Enabled
The integrated circuit is scanned with the Slow scan axis parameter Enabled (left). When
Disabled (right) the image consists of data taken along the fast scan line (dotted line). The user
may arbitrarily Disable the Slow scan axis at any line along the scan.
Range or Settings:
•
Enabled—Sample is scanned in the slow scan direction. (This is the normal setting of
this parameter.)
•
Disabled—No scanning of the sample in the slow direction is performed. The fast scan
is repeated at the same position.
Note:
38
Setting the Slow scan axis parameter to Disable stops the slow scanning of the
piezo, but does not stop the movement of the Real Time display in Y. Lines are
replicated in the Y direction.
Document Title (variable, update from TP)
Rev. A (variable)
Panels Menu
Feedback Controls
3.3
Feedback Controls
The Feedback Controls parameters allow for monitoring the signals between the NanoScope
Controller and the cantilever. These signals adjust the setpoint, oscillation frequency, drive voltage
and output voltages. The purpose of the Feedback Controls is to maintain a constant current in the
Feedback Loop for tip/sample control.
In the Panels menu, select Feedback Controls to access the Feedback Controls panel (See Figure
3.3a).
Figure 3.3a Feedback Controls Panel
3.3.1 Parameters in the Feedback Controls Panel
SPM feedback
Selects the signal to be used for tip feedback according to the selected Microscope mode parameter
(Other Controls panel). For contact AFM, the choice defaults to Deflection; however, for
TappingMode, you may select either Deflection or Amplitude. STM offers three choices of
feedback: Linear, Log and Boost.
Range or Settings:
•
TappingMode—Amplitude, Deflection-(Forcemod only)
•
Contact Mode—Deflection only.
•
STM—Linear, Log, Boost.
Linear—The linear difference between the instantaneous tunneling current and the
Setpoint current is used in the feedback calculation.
Rev. A (variable)
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Panels Menu
Feedback Controls
Log—The difference between the log of the instantaneous tunneling current and the log
of the Setpoint current is used in the feedback calculation.
Boost—Optimizes the feedback performance for high Scan rates over rough surfaces.
This is not intended for atomic images.
Hints to Optimize the SPM Feedback Parameters
•
The Boost and Log modes are preferable for most STM samples, because the tip
responds in a more symmetric manner (i.e., the same going up and coming down). Log
and Boost modes tend to linearize the entire feedback loop since Z ≈ ln(i). The
asymmetric response of the Lin setting distorts data.
•
Use of Boost mode allows the Proportional gain and Integral gain values to be
reduced and is preferable for large scans having high, vertical features (e.g., integrated
circuits).
•
When Boost mode is selected, the Integral and Proportional gains are often best set to
lower values than when Log mode is used.
•
While the user is ramping Z in Force Mode, the feedback parameters (i.e., type, count
and value) are inactive.
Input Feedback
In the Feedback panel, this parameter is read only. Use the Input feedback in the Interleave
Controls panel for Frequency Modulation (MFM or EFM) and Surface Potential.
Integral gain
Controls the amount of integrated error signal used in the feedback calculation.
Range or Settings:
•
0—1024
Gain settings vary, depending upon the scanner used, the sample and scanner sensitivity. See Table
3.3a for approximate, nominal values (assumes a Scan
rate of ≈ 2.5 Hz).
Table 3.3a Typical Integral Gain Ranges:
Scanner
Aa
Contact AFM and
Forcemod
1.0 - 8.0
TappingMode
STM
0.2 - 1.0
0.3 - 5.0
a. For atomic-scale images, scan rate must be increased to approximately 60 Hz.
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Panels Menu
Feedback Controls
Hints to Optimize the Integral Gain Parameter
•
The Integral gain is usually the major contributor to the performance of the feedback
loop due to its “long term” influence. For this reason, it is usually adjusted first.
•
The integral term in the feedback calculation has the highest gain at low frequencies,
and its effects diminish with increasing frequency.
•
For contact AFM, a nominal Integral gain value may be obtained by slowly increasing
the value until the piezo begins to oscillate, then decreasing the value 1-2 volts.
Oscillation effects are best viewed using Scope Mode.
Proportional gain
Controls the amount of the proportional error signal used in the feedback calculation. The
Proportional gain term in the feedback calculation has equal gain at all frequencies; therefore, it
has a dominating effect over the Integral gain for high frequencies.
Range or Settings:
•
0—1024
Note:
Typically, settings for the Proportional gain parameter are 35-100% more than
Integral gain values.
Look Ahead Gain
Adjusts Z-axis tracking of the sample surface by “remembering” previous scan line data, then
anticipating adjacent surface features on the current scan line. Look ahead gain is a valuable assist
to the Integral gain parameter when scanning regular, steep features such as gratings and integrated
circuits (e.g., by decreasing tip overshooting, etc.).
Range or Settings:
•
0—16
Hints for Optimizing the Look Ahead Gain Parameter
Rev. A (variable)
•
Use Look ahead gain discretely. For many surfaces, 0.5—0.8 is nominal.
•
Settings greater than 1.0 have a linear, multiplying effect on data. For example, a setting
of 2.0 will double the tip’s anticipatory reaction to features; a setting of 3.0 will triple it,
etc.
•
Look ahead gain is applied to noise and features alike. Look ahead gains which are
excessive for the sample surface being scanned can actually amplify noise, or lead to
overdrive feedback problems.
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Panels Menu
Feedback Controls
Setpoint
The meaning of this parameter depends on the operating mode of the microscope as follows:
Amplitude Setpoint (Tapping Mode)—The Setpoint parameter in TappingMode control panel
defines the amplitude of the cantilever oscillation signal to be maintained by the feedback loop.
Range or Settings:
•
0.00—10.00 volts
Note:
The closer the Setpoint is to the maximum cantilever oscillation amplitude, the
lower the amount of force applied to the surface. Therefore, larger Setpoint
values decrease the force applied to the sample surface. This is opposite from
the situation in the AFM contact mode where increasing the Setpoint increases
the contact force.
Note:
Negative values can be entered but they are not valid control points. Zero volts
is not a valid control point either.
Deflection Setpoint (Contact Mode)—The Setpoint parameter in the AFM control panel controls
the deflection-signal level used as the constant desired voltage in the feedback loop.
Range or Settings:
•
-10.00—10.00 Volts
Note:
The Setpoint voltage is proportional to the contact force once the base-line
deflection signal level has been subtracted (i.e., increasing the setpoint,
increases the contact force). This is opposite from the situation in the AFM
tapping mode where increasing the Setpoint decreases the force applied to the
surface.
Note:
In the Real Time/View menu,
Force Mode/Calibrate can be used to help determine the optimal setting for
the Setpoint parameter.
Setpoint—STM.The Setpoint parameter in the STM control panel controls the constant current to
be maintained by the feedback loop.
Range or Settings:
•
0.031 through 100.0 nA
Hints to Optimize the Setpoint-STM Parameter:
42
•
Typical settings for the Setpoint current parameter are 0.5 to 4.0 nA.
•
For large scans over surfaces with high vertical features, increasing the Setpoint current
can improve the feedback performance since it is essentially like raising the gain.
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Panels Menu
Feedback Controls
•
This parameter should be set to low values for poorly conducting surfaces.
Drive frequency (TappingMode and Force Mode only)
Selects the oscillation frequency applied to the piezoelectric crystal that vibrates the cantilever.
Range or Settings:
•
0.00 through 5.00 MHz
Note:
The Center frequency is adjusted with the Cantilever Tune command to find
the resonance frequency of the cantilever. The maximum cantilever oscillation
amplitude occurs at its resonant frequency. The software sets the Drive
frequency equal to the current Center frequency value when the Ok button in
the Cantilever Tune control panel is pressed.
Drive amplitude (TappingMode and Force Mode only)
Selects the amplitude of the drive voltage applied to the piezoelectric crystal that vibrates the
cantilever.
Range or Settings:
•
0.00 through 20.00 Volts
Note:
The Drive amplitude is also adjusted with the Cantilever Tune command.
Increasing the Drive amplitude increases the cantilever-oscillation amplitude.
The cantilever-oscillation amplitude is increased to an appropriate level with
the Cantilever Tune command.
Note:
In AutoTune, the Drive Amplitude automatically adjusts to get a cantilever
oscillation (rms amplitde) equivalent to the user’s "target amplitude".
Bias (STM only)
Controls the sign and magnitude of the bias voltage applied to the sample.
Range or Settings:
•
Rev. A (variable)
-10.00 to 10.00 Volts
Note:
Typical settings for the Bias voltage parameter are 20 to 100 mV for conductive
samples and up to several volts with poorly conducting samples.
Note:
Positive settings of the Bias voltage item correspond to negative current
(electrons) tunneling from the tip into the sample on heads with the Bias
applied to the sample.
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Panels Menu
Other Controls
Analog 1 [V] (STM and standard contact AFM only)
This voltage has no effect on the operation of the standard microscope, but is useful in custom
applications.
Range or Settings:
•
-10.00 through 10.00 Volts
Analog 2 [V] (STM and AFM only)
Outputs two complementary, selectable voltages from the controller (See lines labeled AN2LV and
AN2HV in the “Controller-Interface Signals” matrix in Appendix B of the Control System User's
Manual). One output ranges between ±12 volts while the other output ranges between ±220 volts.
These voltages have no effect on the operation of the standard microscope, but they may be useful
in custom applications.
Range or Settings:
•
±12.00 Volts on the low voltage channel
•
±220 Volts on the high voltage channel.
Note:
3.4
The same digital-to-analog converter controls both the low voltage and high
voltage outputs. The high voltage output simply contains another amplifier.
Therefore, the voltages are complementary, but they are scaled differently.
Other Controls
The Other Controls parameters set the type of microscopy, Z and deflection limits, units to use in
measuring and other parameters specific the to microscope mode (i.e., the parameters that appear in
the Other Controls panel will vary from one microscope to another). Not all parameters are
available on all microscopes. The contents of the panel will depend on the microscope system.
In the Panels menu, select Other Controls to access the Other Controls panel (See Figure 3.4a).
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Panels Menu
Other Controls
Figure 3.4a Other Controls Panel (D5000/Tapping Mode)
3.4.1 Parameters in the Other Controls Panel
Microscope mode
Selects the type of microscopy to be employed. Switching this parameter enables/disables other
parameters. Also, on MultiMode SPMs, any change to the Microscope mode must be
accompanied by use of the mode selector switch on the microscope’s base.
Range or Settings: Contact, Tapping or STM
Note:
Settings for this parameter will also vary according to settings in the Real Time
/ Microscope / Profile.
Z limit
•
Permits attenuation of maximum allowable Z voltage and vertical scan range for
achieving higher resolution (smaller quantization) in the Z direction.
Range or Settings:
•
11—440 Volts
Note:
Scanner dependent systems use metric measurements (nm and µm).
Hints for Optimizing the Z Limit Parameter
•
Rev. A (variable)
The Z limit parameter allows the Z-axis digital-to-analog converter’s full 16 bits to be
applied to the specified range.
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Panels Menu
Other Controls
•
The Data scale parameter is limited to maximum Z Limit value.
•
Lowering the maximum scan voltage with this command is useful when performing
atomic scale scans with long-range heads where the effects of quantization are greatest.
•
The new Z range scales around the current Z center voltage.
•
Pressing Enter or double-clicking on the Z limit parameter resets the Z center position
value to the current Z average.
Deflection Limit
Use this parameter for attenuating the input voltage signal (appears only when performing contact
AFM).
Range or Settings:
•
2.500 V for regular imaging
•
20.00 V in Force Mode only
Hints for Optimizing the Deflection Limit Parameter
•
Attenuation was formerly adjusted using the Input attenuation parameter, whose
settings of 1x and 8x correspond to settings of 2.50 V and 20.00 V on the Deflection
limit parameter, respectively.
Amplitude Limit
Use this parameter for attenuating the input voltage signal (appears only for TappingMode or
STM).
Range or Settings:
•
2.500 V for regular imaging
•
20.00 V in Force Mode only
FM igain
Integral gain for Frequency modulation. Controls the feedback loop that uses phase electronics.
FM pgain
Proportional gain for Frequency modulation. Controls the feedback loop that uses phase
electronics.
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Rev. A (variable)
Panels Menu
Other Controls
Illumination
Controls the fiber optic illumination of the sample in Dimension series microscopes.
Range or Settings: 0—100, recommended range is 20—50
Units
Selects whether the units of certain scan parameters are in Volts or in units of Metric distance (nm,
etc.). Parameters affected include Scan size, X Offset, Lift start height and Lift scan height,
Y Offset, Data Scale, Z Limit, Z Scan Start, Ramp Size, Column Step and Row Step.
Range or Settings:
•
Volts—Parameters are in Volts.
•
Metric—Parameters are in units of distance (nm, µm, etc.)
Color table
Selects the range of colors used to map Z data. Color tables can be created or altered using the
Color Table command in the Offline/Utility menu.
Range or Settings:
•
Rev. A (variable)
0—21
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Panels Menu
Other Controls
Bidirectional scan
When the Bidirectional scan parameter is Enabled, data from both Trace and Retrace scans are
used to capture frames in half the normal time. Images have alternately shifted lines, which cause
features to lose some of their lateral definition; however, data may be used for metrological
analysis. Use to save time while capturing images.
Range or Settings:
•
Enabled or Disabled
Note:
When Enabled, features shown in images lose some lateral definition, making
point-to-point measurements inadvisable. Vertical data, however, is unaffected.
Use the Scan line shift parameter to readjust images with the Bidirectional scan parameter
Enabled. This will shift scan lines relative to one another to restore some lateral definition in
features.
Scan line shift
Use the Scan Line Shift parameter to shift trace and retrace lines relative to one another by up to 5
pixels in either direction. Units are in pixels and range from -5 to +5. Scan line shift is used for
readjusting images captured when the Bidirectional scan parameter is Enabled (see “Bidirectional
scan").
Range or Settings:
•
-5 to +5.
Note:
This parameter is generally only for images that have been captured with the
Bidirectional scan parameter set to Enabled.
Engage Setpoint (TappingMode only)
Allows the user to correct for loss of tracking on engage due to sample differences. The automatic
Engage procedure establishes the setpoint voltage at the smallest possible value that detects the
sample surface, resulting in a value that protects both the sample surface and the cantilever tip.
However, this value may not be sufficient for optimal surface tracking on all samples. The setpoint
voltage determined by the automatic Engage procedure will be multiplied by the Engage Setpoint
value, increasing or decreasing tapping force.
Range or Settings: 0.5 through 2.0. A value of 1.0 results in no change to the tapping force. Values
less than 1.0 increase the tapping force and values greater than 1.0 decrease the tapping force. A
value of .9 is nominal for most samples.
Example. The Engage Setpoint for a particular sample may be empirically determined.
Procedures are as follows:
1. Set the Engage Setpoint to 1.0 and engage on the sample.
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Interleave Controls
2. After engagement, make note of the Setpoint parameter.
3. While watching the scan, adjust the Setpoint value until the tip tracks the surface correctly.
Calculate the following:
- Setpoint value/ Starting Setpoint value = Engage Setpoint
(For optimal value, take the average of several engages on a selection of samples or different
areas of the same sample).
Z Modulation (Fluid TappingMode only)
Allows the user to add the drive oscillation signal to the Z piezo voltage. This parameter is used to
set up fluid cell oscillation in any Dimension system for Fluid TappingMode.
Range or Settings:
•
1—Enables Z modulation drive oscillation signal is added to Z piezo voltage. When
enabled, the Z limit must be set ≤420 Volts.
•
0—Disables the Z modulation (i.e., no additional signal is added to Z piezo voltage).
Note:
The desired Drive amplitude and Drive frequency voltages (Real Time/
View / Sweep / Cantilever Tune ) need to be set for Fluid TappingMode
operation.
Tip Serial Number
Saves input in the image header (Ciao Scan List) for users who keep a tip filing system. This is to
keep track of the tips used for certain images.
Serial Number: Scanner Calibration file.
Min. Engage Gain (STM only)
Allows user to engage tip in "constant height" mode. In constant height mode, the gains (feedback)
is disabled. However, the Min. Engage Gain parameter provides for gain during engagement.
3.5
Interleave Controls
As the name implies, the Interleave Controls panel allows scan parameters for the main and
interleaved scan lines to be set independently. Enable Interleave Control feedback parameters by
clicking on the round “LED” enable light to the left of each highlighted interleave parameter. When
the interleave parameter defaults to the same as the main parameter, the enable light appears gray.
In addition to having independent feedback controls, the tip may be lifted and have its feedback
turned off during the interleaved scan lines. The Interleave Controls panel also contains
Rev. A (variable)
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Panels Menu
Interleave Controls
parameters to adjust the height of the lifted tip. Although liftmode is used most commonly for
magnetic force microscopy, it can be used in all operating modes.
When the Interleave mode is enabled, the system scans twice as many lines by alternating between
the “main” and “interleave” scan lines. Having independent feedback controls allows a wider range
of scanning possibilities.
In the Panel menu, select Interleave Controls to access the Interleave Controls panel (See Figure
3.5a).
Figure 3.5a Interleave Controls Panel for MultiMode TM
3.5.1 Parameters in the Interleave Controls Panel
SPM Feedback
Selects the signal used for tip feedback according to the selected microscope mode (Other
Controls panel).
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Panels Menu
Interleave Controls
The SPM Feedback settings are as follows:
Other Controls/
Microscope Mode
Range or Setting
Tapping
Amplitude (TM Deflect
only for Force Mode)
Contact
Deflection only
STM
Log, Linear, Boost
Input Feedback [For Systems configured with an Extender™ Electronics Module]
Use the Input feedback parameter for Frequency Modulation (MFM or EFM) and Surface
Potential.
Range or Settings:
•
Off—Disables the parameter
•
Frequency—Enables the frequency data from oscillating TappingMode tips for MFM
(Magnetic Force Microscopy) or EFM (Electric Force Microscopy) to be displayed and
captured.
•
Potential—Enables the feedback signal for electrical surface potential data (EFM) to be
displayed and captured.
Z Modulation [Fluid TappingMode only]
Allows to add the oscillation signal to the Z piezo voltage used to set up fluid cell oscillation in an
Dimension system for Fluid TappingMode.
Range or Settings:
•
1—Enables Z modulation drive oscillation signal that is added to the Z piezo voltage.
•
0—Disables the Z modulation signal.
Note:
Z limit (Other Controls panel) must be set to ≤ 420 for optimizing the Z
Modulation parameter.
Integral gain
Controls the amount of integrated error signal used in the feedback calculation.
Range or Settings: 0—1024
Rev. A (variable)
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Panels Menu
Interleave Controls
Gain settings vary, depending upon the scanner used, the sample and scanner sensitivity. See Table
3.3a for approximate, nominal values (assumes Scan rate of ≈2.5 Hz).
Table 3.5a Typical Integral Gain Ranges:
Scanner
Contact AFM and
Forcemod
TappingMode
STM
Aa
1.0 - 8.0
0.2 - 1.0
0.3 - 5.0
a. For atomic-scale images, scan rate must be increased to approximately 60 Hz.
Hints to Optimize the Integral Gain Parameter
•
The Integral gain is usually the major contributor to the performance of the feedback
loop due to its “long term” influence. For this reason, it is usually adjusted first.
•
The integral term in the feedback calculation has the highest gain at low frequencies,
and its effects diminish with increasing frequency.
•
For contact AFM, a nominal Integral gain value may be obtained by slowly increasing
the value until the piezo begins to oscillate, then decreasing the value 1-2 volts.
Oscillation effects are best viewed using Scope Mode.
Proportional gain
Controls the amount of the proportional error signal used in the feedback calculation. The
Proportional gain term in the feedback calculation has equal gain at all frequencies; therefore, it
has a dominating effect over the Integral gain for high frequencies.
Range or Settings:
•
0—1024
Note:
Typically, settings for the Proportional gain parameter are 35-100% more than
Integral gain values.
Look Ahead Gain
Adjusts Z-axis tracking of the sample surface by “remembering” previous scan line data, then
anticipating adjacent surface features on the current scan line. Look ahead gain is a valuable assist
to the Integral gain parameter when scanning regular, steep features such as gratings and integrated
circuits (e.g., by decreasing tip overshooting, etc.).
Range or Settings:
•
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0—16
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Rev. A (variable)
Panels Menu
Interleave Controls
Hints for Optimizing the Look Ahead Gain Parameter
•
Use Look ahead gain discretely. For many surfaces, 0.5—0.8 is nominal.
•
Settings greater than 1.0 have a linear, multiplying effect on data. For example, a setting
of 2.0 will double the tip’s anticipatory reaction to features; a setting of 3.0 will triple it,
etc.
•
Look ahead gain is applied to noise and features alike. Look ahead gains which are
excessive for the sample surface being scanned can actually amplify noise, or lead to
overdrive feedback problems.
Setpoint
The meaning of this parameter depends on the operating mode of the microscope as follows:
Amplitude Setpoint (Tapping Mode)—The Setpoint parameter in TappingMode control panel
defines the amplitude of the cantilever oscillation signal to be maintained by the feedback loop.
Range or Settings:
•
0.00—10.00 volts
Note:
The closer the Setpoint is to the maximum cantilever oscillation amplitude, the
lower the amount of force applied to the surface. Therefore, larger Setpoint
values decrease the force applied to the sample surface. This is opposite from
the situation in the AFM contact mode where increasing the Setpoint increases
the contact force.
Note:
Negative values can be entered but they are not valid control points. Zero volts
is not a valid control point either.
Deflection Setpoint (Contact Mode)—The Setpoint parameter in the AFM control panel controls
the deflection-signal level used as the constant desired voltage in the feedback loop.
Range or Settings:
•
Rev. A (variable)
-10.00—10.00 Volts
Note:
The Setpoint voltage is proportional to the contact force once the base-line
deflection signal level has been subtracted (i.e., increasing the setpoint,
increases the contact force). This is opposite from the situation in the AFM
tapping mode where increasing the Setpoint decreases the force applied to the
surface.
Note:
In the Real Time/View menu,
Force Mode/Calibrate can be used to help determine the optimal setting for
the Setpoint parameter.
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Panels Menu
Interleave Controls
Setpoint—STM.The Setpoint parameter in the STM control panel controls the constant current to
be maintained by the feedback loop.
Range or Settings:
•
0.031 through 100.0 nA
Hints to Optimize the Setpoint-STM Parameter:
•
Typical settings for the Setpoint current parameter are 0.5 to 4.0 nA.
•
For large scans over surfaces with high vertical features, increasing the Setpoint current
can improve the feedback performance since it is essentially like raising the gain.
•
This parameter should be set to low values for poorly conducting surfaces.
Drive frequency (TappingMode and Force Mode only)
Selects the oscillation frequency applied to the piezoelectric crystal that vibrates the cantilever.
Range or Settings:
•
0.00 through 5.00 MHz
Note:
The Center frequency is adjusted with the Cantilever Tune command to find
the resonance frequency of the cantilever. The maximum cantilever oscillation
amplitude occurs at its resonant frequency. The software sets the Drive
frequency equal to the current Center frequency value when the Ok button in
the Cantilever Tune control panel is pressed.
Drive amplitude (TappingMode and Force Mode only)
Selects the amplitude of the drive voltage applied to the piezoelectric crystal that vibrates the
cantilever.
Range or Settings:
•
0.00 through 20.00 Volts
Note:
The Drive amplitude is also adjusted with the Cantilever Tune command.
Increasing the Drive amplitude increases the cantilever-oscillation amplitude.
The cantilever-oscillation amplitude is increased to an appropriate level with
the Cantilever Tune command.
Note:
In AutoTune, the Drive Amplitude automatically adjusts to get a cantilever
oscillation (rms amplitde) equivalent to the user’s "target amplitude".
Interleave mode
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Panels Menu
Interleave Controls
The Interleave mode parameter enables or disables the interleave scanning function.
1. When either Interleave, Lift, Linear, Retrace Lift are chosen, the number of scan lines
doubles, with the slow axis running at half the normal (single trace-retrace) speed (i.e.,
capture time doubles).
Range or Settings:
•
Interleave—Adds a second, interleaved set of lines to the scan, which can be accessed
from the Channel panel and captured as data. Invoking Interleave reduces the slow axis’
speed by one-half and doubles the capture time.
•
Lift—A variant of Interleave, the Lift option uses the first set of scan lines to detect the
surface, then lifts the probe above the sample surface on the interleaved set of scan lines
according to the Lift start height and Lift scan height parameter settings. During the
Interleaved scan, the tip mimics the surface topography from the previous surface scan
line (See Figure 3.5b).
Lift
Figure 3.5b Interleave Lift Mode
Sample
Surface
Retrace
Trace
Rev. A (variable)
•
Linear—Lifts the tip to a predetermined height and runs the interleave scan at that
height.
•
Disabled—Turns off the interleave scanning.
•
Retrace Lift—Lifts after the trace scan in the retrace direction. This parameter is
optimized with the rounding parameter (Microscope/Calibrate/Scanner/rounding). The
suggested rounding setting is 0.2.
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Panels Menu
Interleave Controls
Figure 3.5c Retrace Lift Mode
Lift
Retrace
Trace
Hints for Optimizing the Interleave Mode Parameters
•
Before starting an interleaved scan, be certain that parameters on the Interleave
Controls panel are properly set to avoid crashing the probe.
•
To display interleaved data, set the Scan line parameter on a Channel panel to
Interleave. Channel panels having their Scan line parameters set to Main will display
only data from the normal scan.
•
The Lift start height and Lift scan height parameters control the height of the lifted
scan and should be set prior to starting interleaved lift scanning.
Lift scan height
Specifies the tip’s height above the sample surface during interleaved scans. This parameter is in
effect ONLY when the Interleave mode parameter is set to Lift and Linear.
Figure 3.5d Lift Scan Height Illustrated
Range or Settings:
•
56
XX µm (Scanner dependent)
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Rev. A (variable)
Panels Menu
Channel (1, 2, 3)
Note:
The maximum meaningful value of the parameter depends on the Z voltages
applied in the Main scan line and the maximum voltage that the system can
output. The maximum voltage that can be applied to the piezo is ±220 volts. It
will be lower if the Z voltage is restricted by the Z limit parameter.
Lift start height
Specifies the height that the tip is to be lifted above the sample surface at the start of each
interleaved scan. Generally, this parameter serves to lift the tip clear of any contamination layers
present on the sample before assuming its Lift scan height during interleaved scans. This parameter
is in effect ONLY when the Interleaved mode parameter is set to Lift. This parameter defines an
offset from the Z voltage, or height, applied to the piezo on the Main scan line.
Figure 3.5e Lift Start Height Illustrated.
Range or Settings:
•
XX µm (Scanner dependent)
Hints for Optimizing the Lift Start Height Parameter
3.6
•
This value can be left at zero for TappingMode and STM. It is generally only used for
contact AFM to break the tip free of the adhesive force produced by the water layer
before settling to the final tip height.
•
The maximum meaningful value of the parameter depends on the Z voltages applied in
the Main scan line and the maximum voltage that the system can output. The maximum
voltage that can be applied to the piezo is ±220 volts. It will be lower if the Z voltage is
restricted by the Z limit parameter.
•
The tip will go through this height at the start of every lifted scan line, then proceeds to
the lift scan height for the rest of the scan line.
Channel (1, 2, 3)
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Panels Menu
Channel (1, 2, 3)
Up to three data Channels may be opened simultaneously using the Real Time / Panels menu.
Channels are numbered 1, 2 and 3 and feature their own control panels. When a Data type is
selected on a Channel, its image is added to the Display Monitor. It is possible to have up to three
separate images from each scan. For example, a TappingMode scan might simultaneously present a
Height image on Channel 1, a Deflection image on Channel 2, and an Amplitude image on
Channel 3.
Parameters shown on each Channel control panel vary slightly, depending upon the type of
microscope selected and its operating mode. For example, a MultiMode SPM imaging in
TappingMode will offer six choices for its Data type parameter: Height, Deflection, Amplitude.
The same microscope operating in contact AFM does not offer Amplitude, but offers Friction.
Microscopes imaging with STM offer the choice of Current.
Parameters offered on each Channel panel follow. Differences are noted where pertinent.
Data type
Settings vary, depending upon the microscope selected and operating mode. The Data type
parameter may receive: no data (Off); sample-height data (Height); cantilever oscillation amplitude
data for TappingMode (Amplitude); cantilever deflection data (Deflection); STM current data
(Current); phase data in extended AFM mode.
Range or Settings:
•
Amplitude (TappingMode and Force Mode only)—The RMS of the cantilever
amplitude signal is displayed and captured.
•
Current (STM only)—Data displayed and captured is the tunneling current generated
by the preamplifier.
Note:
•
Deflection—Cantilever deflection signal data is displayed and captured.
Note:
When this parameter is set to Deflection, the units of the data are in distance or
volts.
•
Frequency—Frequency data from oscillating TappingMode tips, usually used with
MFM and EFM, is displayed and captured. This setting appears only when an
Extender™ Electronics Module is attached to the microscope.
•
Friction—Torsional deflection signal data is displayed and captured.
•
Height—The Z piezo voltage set by the feedback calculation in the Digital Signal
Processor (DSP) is displayed and captured.
Note:
58
When this parameter is set to Current, the units of the data are nA.
If Height is selected, the displayed data comes from the voltage output to the Z
piezo. When this parameter is set to Height, the units of the data are distance
(e.g., nm, µm, etc.).
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Panels Menu
Channel (1, 2, 3)
•
Off—This setting will not appear unless more than one channel is being used.
•
Phase—Phase data from oscillating TappingMode tips, generally used with MFM and
EFM, is displayed and captured. This setting appears when the microscope is configured
with an Extender™ Electronics Module.
•
Potential—Electrical surface potential data (EFM) is displayed and captured. This
setting appears only when an Extender™ Electronics Module is attached to the SPM
and it is hardware-configured.
•
Thermal—Temperature data from thermal tips is displayed and captured.
Note:
This setting appears only when a Thermal Head is used and the Thermal Profile
is selected.
Hints for Optimizing the Date Type Parameters
•
The system displays up to three Real Time images on the Display Monitor, depending
on the settings of Data type parameters.
•
The Data type parameter does not switch the operating mode of the instrument, it
simply changes the source of the data displayed.
•
Nanometers of deflection are calculated using the Sensitivity parameter in the Force
Calibrate panel.
Contact AFM
•
To run in the Constant Force mode, increase the feedback gains so that the Z piezo
actually tracks the surface while keeping the deflection signal almost constant.
Set this parameter to Height data to image the variation in Z required to keep the
deflection signal “constant.”
To run in what is referred to as the “Constant Height” mode, set the feedback gains low
(so that the Z piezo would not respond very well to the variations in deflection signal,
keeping the sample height almost constant), and set this parameter to Deflection to
image the variation in deflection signal as the sample height remained “constant”.
Tapping Mode
•
To produce accurate Height data in TappingMode, feedback gains should be relatively
high to force the piezo height to change in an effort to keep the amplitude of the
cantilever oscillation as constant as possible.
•
Calculate nanometers of cantilever oscillation amplitude using the Sensitivity parameter
in the Force Mode/Calibrate/Main panel. Finally, note that the Setpoint amplitude, or
the nominal amplitude, is not zero, so that only the change in amplitude voltage is
displayed.
STM
Rev. A (variable)
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Panels Menu
Channel (1, 2, 3)
•
To run in “Constant Current” mode, set the feedback gains relatively high so that the Z
piezo actually tracks the sample surface, keeping the current almost constant.
Set this parameter to Height to image the variation in Z required to keep the current
“constant”.
•
To run in what is referred to as the “Constant Height” mode, set the feedback gains low
so that the Z piezo does not respond very well to the variations in current, keeping the
height almost constant. Set this parameter to Current to image the variation in the
current as the tip height remains “constant”.
•
Current, “Constant Height”, imaging should only be done for small scans (less than
0.1µ) over relatively flat surfaces; for example, atomic imaging. Otherwise, the image
will appear spiky and the relatively low gains will cause the tip to strike the surface.
Data scale
The Data Scale controls the vertical scale corresponding to the full height of the display and color
bar.
Range or Settings:
•
0.0067—440 Volts (Data type set to Height, Units set to Volts).
•
XX—XXX µm (Scanner dependent; where Data type set to Height, Units set to
Metric).
•
XX—XXX (Sensitivity dependent; where the Data type is set to Deflection or
Amplitude; Units are set to Metric).
•
0.00003815 - 2.5 V or 20 V (Set to Amplitude; Units set to Volts).
•
0.001—XX Volts (Data type set to Deflection; Units are set to Volts).
•
0.031—200 nA (Data type set to Current; Units are set to Metric).
•
0.0003052V—20V (Units are set to Volts).
Hints for Optimizing the Data Scale Parameters
60
•
Data beyond the setting of the Data scale is clipped for the Real Time display. Captured
data, however, is not clipped. Independent of the settings of this parameter, the captured
data will be correct, unless of course, it exceeds the maximum vertical range of the
currently selected scanner.
•
Retain separate settings for Data scale for all settings of the Data type parameter.
•
The conversion of volts to nm or nA, is dependent on the value Sensitivity Detector
parameters in the Microscope/Calibrate/Detector panel.
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Panels Menu
Channel (1, 2, 3)
Data center
Offsets centerline on the color scale by the amount entered.
Note:
The Data Center offset does not become a permanent part of the data.
Range or Settings:
•
± 220 V (Volts)
•
± XX nm (Metric)
Line direction
Selects the direction of the fast scan during data collection.
The feedback calculation is always performed regardless of the scan direction. This parameter
simply selects whether the data is collected on the trace or the retrace. This parameter selects the
relative motion of the tip to the sample.
Range or Settings:
•
Trace—Data is collected when the relative motion of the tip is left to right as viewed
from the front of the microscope.
•
Retrace—Data is collected when the relative tip motion is right to left as viewed from
the front of the microscope.
Scan line
The scan line controls whether data from the Main or Interleave scan line is displayed and
captured.
Range or Settings:
•
Main or Interleave
Note:
This parameter is not selectable when the Interleave mode parameter is set to
Disable. The system is locked on the Main scan lines whenever the interleaved
mode is turned off.
Note:
Either channel 1 or 2 can be selected for the Main display, but the other channel
must be defined for the Interleave display.
This setting appears only when an Extender™ Electronics Module is attached
to the SPM and it is hardware-configured.
Real Time Planefit
Rev. A (variable)
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Panels Menu
Channel (1, 2, 3)
Applies a software “leveling plane” to each Real Time image, thus removing up to first-order tilt.
Five types of planefit are available to each Real Time image shown on the Display Monitor.
Range or Settings:
•
None—Only raw, unprocessed data is displayed.
•
Offset—Takes the Z-axis average of each scan line, then subtracts it from every data
point in that scan line.
•
Line—Takes the slope and Z-axis average of each scan line and subtracts it from each
data point in that scan line. This is the default mode of operation, and should be used
unless there is a specific reason to do otherwise.
•
AC—Takes the slope and Z-axis average of each scan line across one-half of that line,
then subtracts it from each data point in that scan line.
•
Frame—Level the Real Time image based on a best-fit plane calculated from the most
recent Real Time frame performed with the same frame direction (Up or Down).
•
Captured—Level the Real Time image based on a best fit plane calculated from a plane
captured with the Capture Plane command in the Real Time/ Capture menu. This
selection will not appear until a valid plane is captured.
Note:
The Real Time Planefit is applied only to display data at the time of the scan
and does not apply to captured data. To planefit captured data, use the Offline
Planefit parameter.
Offline Planefit
Applies a software “leveling plane” to each offline image for removing first-order tilt. Five types of
planefit are available to each offline image.
Range or Settings:
•
None—Only raw, unprocessed data is displayed.
•
Offset—Captured images have a DC Z offset removed from them, but they are not fitted
to a plane.
•
Full—A best-fit plane which is derived from the data file is subtracted from the
captured image.
Hints for Optimizing the Offline Planefit Parameter
•
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The None option should only be used in special cases. The Offset and Full options
provide greater dynamic range in the data to reduce round-off and other errors in
subsequent calculations.
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Rev. A (variable)
Panels Menu
Channel (1, 2, 3)
•
The Offline / Modify / Flatten and Planefit commands can also be used to level the
data after it has been captured.
•
The Captured option will not appear in the control panel until the Capture Plane
command is used to collect a plane.
Highpass filter (Channel 1 TappingMode and contact AFM only)
The Highpass filter sets the cut-off frequency of a digital high-pass filter used on the Real Time
and captured images. This feature is normally used only for imaging at atomic scales.
Range or Settings:
•
Off
•
1—9
Hints for Optimizing the Highpass Filter Parameter
•
Removes low-frequency effects from Real Time and captured images such as ripples in
the image caused by torsional forces on the cantilever when the scan reverses direction.
Note:
The Height information in the image will be distorted by the application of this
filter.
•
The Off setting results in no high-pass filtering of the image and increasing the settings
from 1 through 9 increases the passband by lowering the cut-off frequency of the twopole high-pass filter applied to the data stream.
•
The keyboard can be used to turn off the Highpass filter by typing 0 when the
parameter is highlighted.
Lowpass filter (Channel 1 TappingMode and contact AFM only)
Allows Real Time digital low-pass filtering of each line of data to remove the effects of highfrequency noise from the image without affecting the feedback.
Range or Settings:
•
Off or 1 - 9
Hints for Optimizing the Lowpass Filter Parameter
Rev. A (variable)
•
The Off setting results in no low-pass filtering of the image.
•
Increasing the settings 1 through 9 decreases the passband by lowering the cut-off
frequency of the one-pole low-pass filter applied to the data stream.
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Panels Menu
Gain Adjust
3.7
•
This parameter only affects the displayed and captured data and does not affect the
feedback loop.
•
The keyboard can be used to turn off the low-pass filter by typing 0 when the parameter
is highlighted.
Gain Adjust
Auto Gain automatically sets the feedback parameters (Proportional and Integral gain) for a
given sample.
Auto Gain works by analyzing the difference between Trace minus Retrace (TMR). The analysis
is used to choose a set of feedback parameters that minimizes the TMR value. By specifying the
starting value of the Integral gain sweep, the ending value, and the size of the increments, Auto
Gain may be used to calculate a set of useful feedback parameters.
For the purposes of this analysis, Proportional gain operates as a factor of Integral gain. The
relationship is Proportional gain = F × Integral gain , where F is a factor defined as Pro. Gain factor.
Auto Gain only requires the input of the three Gain values in order to calculate an effective
Integral gain.
In the Panels menu, select Gain Adjust to access the Auto Gain panel (See Figure 3.7a).
Figure 3.7a Auto Gain Panel
3.7.1 Parameters in the Auto Gain Panel
Gain start
The starting value of the integral gain sweep.
Range or Settings: Recommended settings are 0.10 for TappingMode, 0.5 for Contact Mode
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Panels Menu
Gain Adjust
Gain end
The ending value of the integral gain sweep.
Range or Settings: Recommended settings are 1.0 for TappingMode, 10.0 for Contact Mode
Gain incr.
The increment step for each integral gain test.
Range or Settings: 0.0—5.0; recommended settings are 0.1 for TappingMode, 0.5 for Contact
Mode.
Pro. Gain factor
Proportional gain is set to: Pro. Gain factor × Integral gain
Range or Settings: 0.0—10.0; recommended value is 1.50
Max shift
The percentage of pixels to shift the Retrace line to match the trace line during the correlation
routine. This more closely the Trace and Retrace lines match, the lower the TMR will be, and the
more effective the Auto Gain feature.
Range or Settings: 0—0.2; recommended setting is 0.02 (or 2%)
Gain offset
Specifies the number that determines the final, best fit Integral gain. Allows a change in the value
produced by Auto Gain.
Range or Settings: 0.0—2.0; recommended setting is 0.95 (or 95%)
Lines/gain
The number of lines to test and average for each integral gain step. Optimal settings are between 4
and 8. This, like Max shift, allows for a more accurate determination of TMR.
Range or Settings: 1—20, with a default setting of 8
Hints for Optimizing the Lines/gain Parameter
•
Rev. A (variable)
Start and End values should bracket the expected value, but not enough to cause
damage.
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Panels Menu
Gain Adjust
•
The user should perform Auto Gain on the actual feature of interest. If the feature is
large this will usually result in an aggressive gain setting, but it is the most effective
method.
•
If there are no significant features, the calculated Integral gain is set too low because it
is trying to reduce the noise in the background.
The basic procedure for using the Auto Gain parameter is as follows:
1. Take a Trace/Retrace pair.
2. Remove horizontal shift in the Trace and Retrace to improve the match.
3. Calculate Trace minus Retrace (TMR).
4. Step the gains to the next value. Auto Gain repeats the process until the End Gain value
(Gain end) is reached. The Integral gain value that generates the least difference between
Trace and Retrace is the selected value.
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Rev. A (variable)
Panels Menu
Drive Feedback Controls
3.8
Drive Feedback Controls
Many users are familiar with the difficulties of minimizing tip-sample forces on extreme surfaces
(i.e., surfaces which are extremely hard or soft). Very hard surfaces tend to wear out silicon tips
rapidly; very soft samples are easily damaged by the tips themselves. Minimizing tip-sample forces
in TappingMode with a higher setpoint may also lead to a condition in which tips suddenly
disengage from surfaces. The Drive Feedback Controls panel contains parameters for precisely
maintaining feedback levels during TappingMode imaging. This protects tips and samples, and
assists greatly in maintaining tip engagement.
In the Panel menu, select Drive to access the Drive Feedback Controls panel
(See Figure 3.8a).
Figure 3.8a Drive Feedback Controls Panel
When enabled, Drive Feedback works by readjusting the drive amplitude at the beginning and end
of each scan line. As the tip reaches either edge of the scan area, the tip is lifted off the surface by
the Drive height amount and the drive amplitude is adjusted by a factor equal to the Drive gain
times the drive error signal. This occurs for a duration of Drive time. The tip then turns around,
descends to the surface, and resumes scanning.
3.8.1 Parameters in the Drive Feedback Control Panel
Use Drive feedback parameters only for TappingMode imaging and Disable during other types of
imaging. Although automatic control of Drive Feedback is not required for most TappingMode
imaging, it should be applied whenever imaging extreme surfaces and when making tip changes
with automatic tip exchange.
Drive feedback
The Drive feedback parameter turns drive feedback parameters on and off. Enabled is on,
Disabled is off.
Drive height
Distance tip is lifted during readjustment of drive feedback. Default is 5.00 nm.
Rev. A (variable)
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Panels Menu
Drive Feedback Controls
Drive time
Time required for the tip to exit the scan boundary, turn off feedback, ascend to the Drive height
and adjust drive feedback. Default is 10.00 ms.
Drive setpoint
Drive amplitude setpoint, expressed as a fraction of the free-air amplitude. Default is 0.90.
Drive gain
Integral gain applied to the feedback loop’s drive error signal. Once the tip resumes normal scan
height, Drive gain is no longer applied. Default is 1.00.
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Rev. A (variable)
Chapter 4
Motor Menu
The commands in the Motor menu control the step motor responsible for gross movement of either
tip or sample. Use the step motor to advance or retract the probe tip from the sample in the Z axis.
The software takes the different microscope configurations of into account.
This chapter discusses the following Motor menu commands:
•
Engage Section 4.1
•
Withdraw Section 4.2
•
Step Motor Section 4.3
•
Step XY Section 4.4
On the Real-time menu bar, select Motor to open the Motor subcommands (See Figure 4.0a).
Figure 4.0a Motor Menu
4.1
Engage
The Engage command brings the tip into contact with the sample surface and starts the Real-time
imaging process.
4.1.1 Control Monitor Actions
Engage may be initiated in one of two ways:
1. Click on the Engage icon on the Real-time tool bar.
2.
Rev. C
Select Motor/Engage (CTRL-E).
Command Reference Manual
71
Motor Menu
Withdraw
4.1.2 Display Monitor Actions
•
The Image of the sample appears on the Display Monitor along with a cursor. The
cursor moves along the image vertically to show the engaged tip position on the surface.
Hints for Optimizing the Engage Command
•
When used with stepper-motor-engagement microscopes (the Motor item in the
Microscope/Calibrate/Z panel is set to Forward or Reverse), the tip is lowered under
program control. While the tip is being engaged, the total tip travel distance is shown in
the center of the status bar on the Control Monitor. For the AFM, the error signal (input
- Setpoint) is also displayed in the status bar. When the surface is detected, the
workstation beeps, starts the Real-time imaging process, and displays Engaged in the
status bar on the Control Monitor.
•
During automatic engagement, the tip will travel up to 250 µm for the STM A and D
heads, and for the center-mounted STM G and J heads, and 125 µm for the AFM. If the
sample surface is not detected in this distance, an error message will be displayed.
•
If the tip is on the surface and the Z center voltage indicates that the piezo is near full
extension or retraction, the tip may be withdrawn and re-engaged to center the Z center
voltage. Alternatively, the Tip Up and Tip Down subcommands of the Motor command
can be used to center the Z voltage.
•
Pressing Ctrl-F after the Engage command has been executed will cause a false engage
to occur, causing the Real-time software to start scanning independently of whether the
surface has been detected or not.
4.1.3 Menu Items Affecting Results
Microscope/Calibrate panels: Scanner, Z, and Detector items.
4.2
Withdraw
The Withdraw command stops the scanning process and withdraws the tip from the surface.
4.2.1 Withdraw Control Monitor
Withdraw may be initiated in one of two ways:
72
1.
Click on the Withdraw icon located on the Real-Time tool bar.
2.
Select Motor/Withdraw (Ctrl-W).
Command Reference Manual
Rev. C
Motor Menu
Step Motor
4.2.2 Withdraw Display Monitor
•
ATTENTION:
The cursor stops moving along the image.
Do not unplug scan heads from the microscope or the microscope from the control unit
when the TIP status is ENGAGED. If you do, you may damage the head, the microscope,
and/or the controller, or suffer an electric shock.
4.2.3 Menu Items Affecting Results
•
4.3
No menu items.
Step Motor
Step Motor may be initiated by selecting Motor/Step Motor. The Step Motor command allows
the tip-to-sample spacing to be changed by incrementing the motor and leadscrew. The tip can be
moved up (away from the sample) or down (towards the sample) in selectable step sizes.
4.3.1 Step Motor Control Monitor
The Motor Control panel allows control of the position of the tip relative to the sample (See Figure
4.3a).
Figure 4.3a Motor Control Panel
Buttons and Parameters on the Motor Control Panel
SPM Step size—The change in tip height per step.
Range and Settings:
Rev. C
•
25—1000 nm for the AFM
•
50—2000 nm for the STM "A" and "D" heads
•
25-1000 nm for the STM "G" and "J" heads
Command Reference Manual
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Motor Menu
Step Motor
QUIT—Exits the Step Motor mode.
TIP UP—This has the effect of moving the tip or cantilever up (away from the sample) by the
amount specified by Step size.
Range and Settings:
•
Specified by the Step size value.
TIP DOWN—Moves the tip or cantilever down (towards the sample) by the amount specified by
Step size.
Range and Settings:
•
Specified by the Step size value.
4.3.2 Display Monitor Actions
•
No action items.
Hints for Optimizing Step Motor Controls
•
The Motor field in the Microscope / Calibrate / Z Calibration panel can cause the
meanings of Tip up and Tip down to be reversed if not set correctly for the head being
used. STM heads with front mounted tips (A and D) should have this item set to
Forward. All AFM heads and STM heads with center-mounted tips (G and J) should
have this item set to Reverse.
•
The Step size should be kept small (less than 200 nm) when moving the tip while it is
engaged.
•
There is up to 2 µm backlash in the motor-leadscrew coupling; depending upon the step
size, several steps may be required to see an effect when reversing step direction.
•
The step sizes are not equal because the stepper motor operates in the half-step mode. If
an exact step size is required, it should be an even multiple of the minimum step size.
4.3.3 Menu Items Affecting Results
Microscope/Calibrate/Z panel: Motor direction and
Motor sensitivity items.
Example
1. If the Z center voltage puts the piezo near the fully extended or fully retracted position (± 220
V), use the Step Motor subcommands to move it closer to the center (0.0 V).
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Command Reference Manual
Rev. C
Motor Menu
Step XY
2. If the Z center voltage is too low (i.e., tip extended past center point), you would use the Tip
Down subcommand. Likewise, you would use the Tip Up subcommand when the Z center
voltage is too high (tip retracted above centerpoint).
4.4
Step XY
The buttons in the Step XY panel move the sample in steps of approximately 25 percent of the full
range of the particular scanner being used. The sample can be moved in the ±X and the ±Y
directions.
Note:
This command is only available for microscopes that move the sample during
scanning (Small Sample, Contact AFM or MultiMode).
The Step XY panel allows the user to move the sample in one or ten steps in both the X and Y axes
(See Figure 4.4a).
Figure 4.4a Step XY Panel
Buttons and Parameters on the Step XY Panel:
Rev. C
•
QUIT: Exits the Step XY mode.
•
CYCLE Y+: Moves the sample 10 steps in the +Y direction.
•
Y+: Moves the sample one step in the +Y direction.
•
CYCLE X-: Moves the sample 10 steps in the –X direction.
•
X–: Moves the sample one step in the –X direction.
•
X+ : Moves the sample one step in the +X direction.
•
CYCLE X+: Moves the sample 10 steps in the +X direction.
•
Y– : Moves the sample one step in the –Y direction.
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Motor Menu
Step XY
•
CYCLE Y–: Moves the sample 10 steps in the –Y direction.
Note:
76
The number of steps depends on the Cycles parameter.
•
Step XY Size: Adjusts the size of the stepping signal applied to the scanner. This
parameter controls the effectiveness in scanning.
•
Cycles: Number of times the stepping signal is applied to the scanner.
Command Reference Manual
Rev. C
Chapter 5
View Menu
The commands in the View menu alter the form of Real-time information shown on the display
menu for specific microscope modes. For example, the spectroscopic modes are not applicable to
AFM, so they do not appear in the View menu when an AFM head is selected. Similarly, the Force
Calibrate mode is specific to the AFM, so the Force Calibrate command only appears when an
AFM is selected.
In some of the View commands (e.g., Force Mode), the X-Y scanning stops.
This chapter discusses the following View commands:
5.1
•
Image Mode Section 5.1
•
Scope Mode Section 5.2
•
Force Mode Section 5.3
•
Force Calibrate Section 5.4
•
Force Mode / Advanced Section 5.5
•
Force Step Section 5.6
•
Sweep Section 5.8
•
STS Plot i(v) (STM Only) Section 5.9
•
STS Plot i(s) (STM Only) Section 5.10
Image Mode
The Image Mode command displays scan data on the display screen using a Top View format; this
is the usual mode to select during scanning. The Control Monitor displays the default Control
panels.
Note:
Rev. C
When the Control Monitor panels change (e.g., in Force Mode), toggle back to
the default screen by clicking the Image icon or selecting the View menu and
then Image Mode.
Command Reference Manual
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View Menu
Image Mode
5.1.1 Image Mode Control Monitor
Default Control Panels display on the Control Monitor. Panel parameters vary slightly depending
upon the selected microscope (Real-time/DI/Microscope Select) and microscope profile (Realtime/Microscope/Profile). For details on each panel, see Chapter 3.
General Functions of Control Panels in Image Mode
•
Scan Controls—Affects the movement of the piezo.
•
Other Controls—Adjusts general imaging parameters (i.e., Units).
•
Feedback Controls—Directs the feedback response between the tip and sample.
•
Drive Feedback Controls (TappingMode only)—Controls imaging of extremely hard
or soft samples.
•
Interleave Controls—Allows feedback parameters for interleaved, or in between, scans
lines to be adjusted independently.
Up to three Channel panels may be displayed simultaneously, each presenting a separate image on
the Display Monitor. If only one channel’s Data type is ON and the others are set to OFF, only a
single image will be displayed. Setting Channel panel Data type parameters to something other
than Off puts the system in multi-image mode where two or three images are shown side-by-side
on the Display Monitor.
5.1.2 Image Mode Display Monitor
The Display Monitor presents the Real-time image(s), a color bar for interpreting height
information, a graph of the Z position, and a menu bar. The Data type parameter defines the
number of images displayed. The menu bar contains subcommands associated with the Real-time/
Zoom In, Zoom Out and Offset functions.
These commands enable the mouse to change the center of the scan and the Scan size to highlight
regions of interest. The mouse may also be used to measure an X-Y distance directly on the Realtime image.
•
Distance and angle measurement—The cursor can be placed on the image to measure
the distance and angle between two points in the X-Y plane; distances and angles are
displayed directly on the image. The mouse remains in this mode until another
subcommand is selected.
Mouse Operations
78
•
1st click, left button—fixes one end of the line segment. The line segment then
rubberbands out from this point.
•
2nd click, left button—fixes the other end of the line segment and displays the X-Y
distance between the two points.
Command Reference Manual
Rev. C
View Menu
Image Mode
•
3rd click, left button—picks up the end of the line segment which is closest to the
cursor.
Image Mode Menu Commands
Offset—Changes the center point of the scan. Cross hairs are used to define the new scan center
point on the Real-time image.
Mouse Operations
•
1st click, left button—Drops the cross hair at its current position.
•
2nd click, left button (within the image)—Ties the cross hair to the mouse cursor.
•
Click right button—Sets the cross hair position and moves the cursor to the Execute
subcommand in the menu bar.
Note:
Select Execute with right or left mouse button.
Zoom In—Displays an adjustable box over the Real-time image. The area within the box will fill
the screen when the Execute command is given.
Zoom Out—Displays an adjustable box over the Real-time image. When the Execute command is
given, the scanned area will be enlarged proportionally to the zoom box drawn on the current
image.
Zoom Notes—Selecting either of the Zoom subcommands places a square box on the image. The
position of the box is tied to the movement of the mouse.
Mouse Operations
•
1st click, left button—Allows the box size to be changed by moving the mouse.
•
2nd click, left button—Allows the box position to be changed by moving the mouse.
Additional clicks of the left button switch between the box-translation and box-sizeadjustment modes.
•
Click right button—Freezes the box and moves the cursor to the Execute subcommand
in the menu bar. The Execute subcommand can be given with either mouse button.
•
Additional click left button—After the box is dropped, it may be “picked up” by
clicking the left button within the image.
Execute—Completes the Offset and Zoom menu commands.
Clear—Removes the zoom box or cross hair from the Display Monitor.
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Command Reference Manual
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View Menu
Scope Mode
Rotate—Rotates the image display.
Erase Image—Clears and resets the image display.
See also: Real-time/View menu; Scope Mode and Force Calibrate commands.
5.2
Scope Mode
The Scope Mode plots tip-sample interactions. Depending on the selected microscope and Data
type (Channel 1, 2 or 3), the feedback signal (Deflection), Z data (Height), or auxiliary signal (A,
B or C) displays as a plot versus the probe position in an oscilloscope-type format on the Display
Monitor (See Figure 5.2a).
Note:
A plot displays for each image (e.g., Two images scanning display two Scope
plots).
Figure 5.2a TappingMode AFM Scope Trace
Height
0.20 µm/div.
TMR
0.01 µm
10.04 ms/div, 2.50 µm/div
Scan
As with Image Mode, control panels for the selected microscope are available on the Control
Monitor, allowing various parameters to be adjusted.
5.2.1 Scope Mode Display Monitor
The plot (or plots), Z center position graph, and menu bar appear on the Display Monitor. The
“trace minus retrace” value (TMR) is displayed next to each scope display. TMR is the average
distance between the trace and retrace values.
Note:
The TMR value is a useful indicator of whether the tip is tracking the surface
properly.
Scope Mode Menu Commands
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Command Reference Manual
Rev. C
View Menu
Scope Mode
The subcommands in the menu bar control the format of the Real-time scope trace display. The
commands are:
Rev. C
•
Single Trace—Displays a single trace corresponding to the Line direction parameter.
The line will be white if Trace is selected and yellow if Retrace is selected.
•
Dual Trace—Displays both trace and retrace where the left-to-right trace of the tip is
shown in white and the right-to-left trace is shown in yellow.
Command Reference Manual
81
View Menu
Force Mode
5.3
Force Mode
In the View menu, the Force Mode commands include:
•
Calibrate—See Section 5.4
•
Advanced—See Section 5.5
•
Step—See Section 5.6
•
Volume—See Section 5.7
Note:
X-Y scanning is halted during all Force Calibrate, Advanced, and Force Step
operations.
The Force Calibrate and Force Step commands allow users to execute and plot controlled tipsample interactions. Advanced (i.e., advanced Force Calibrate) allows for additional
configurations in executing a Force curve for tip-sample interactions.
5.4
Force Calibrate
Also referred to as Force Curves or Force Plots, the Force Calibrate command modulates tipsample separation and plots either the resulting deflection of the cantilever (contact AFM), or the
amplitude of the cantilever oscillation (TappingMode), as a function of sample displacement. The
cantilever deflection or oscillation amplitude is plotted relative to a
user-designated input signal.
5.4.1 Force Calibrate Control Monitor
Clicking on the Calibrate command (Real-time / View / Force Mode / Calibrate) displays several
control panels on the Control Monitor: Main Controls and Channel 1, 2 and 3 (See Figure 5.4a).
82
Note:
The Drive frequency and Drive amplitude parameters are displayed only
when the microscope is switched to TappingMode.
Note:
The Feedback Controls panel parameters also affect changes to the Force
Calibrate
(See Section 5.5.2).
Command Reference Manual
Rev. C
Figure 5.4a Force Calibrate Panels
View Menu
Force Calibrate
5.4.2 Parameters on the Force Calibrate Main Controls Panel
Use these panels to view the force curve on the Display Monitor by manipulating various
parameters found on the Control Monitor. In the View menu, select Force Mode and the
subcommand Calibrate to access the Main Controls panel and specified Channel panels.
For advanced Force Calibrate parameters, see Section 5.5.
Ramp size
Specifies the range of the Ramp channel. Visible only if the Ramp channel parameter is
set to Z. Settings depend on the specified units.
Ramp offset—Obsolete
Z scan start
Visible only if the Ramp channel parameter is set to Z.
Rev. C
Command Reference Manual
83
View Menu
Force Calibrate
Z scan start is the bottom position of the Z-axis scan as represented on the Display Monitor’s bar
graph (See Figure 5.4b). When the Force Calibrate command is first accessed during imaging, this
value is automatically set to the Z Center Position. When returning to Image mode from the Force
Calibrate command, the Z position value is initially set to this value. Z scan start is constrained
such that Z scan start minus Z Scan size is greater than -220 Volts.
Note:
The value of this parameter will need to be increased to move the sample closer
to the cantilever in the case where there is no deflection of the cantilever for a
displacement of the sample.
Figure 5.4b Example: Z Scan.
Retracted
Ramp size
Z scan start
Z Center
Position
-10.72 V
Extended
Range and Settings:
•
-220 through 220 V. The units of this parameter are volts or nanometers, depending on
the setting of the Units parameter.
Note:
While the user is ramping Z in Force Calibrate, the feedback parameters (i.e.,
type, count and value) are inactive.
Scan rate
The rate at which the piezo extends and retracts in the Z direction (full cycle).
Note:
The units for this value vary depending on the Ramp channel value. Very slow
Scan rates (< 0.10 Hz) may prove too slow; the system completes the present
scan before initiating parameter changes. For advanced users, this value also
varies depending upon the Forward and Reverse Velocities (See Section
5.5.1).
Range or Settings:
•
Min. 0.010; maximum value depends upon Number of samples.
Note:
Ramping under NT is limited to approximately 30 Hz at 512 samples per line.
Number of samples
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Force Calibrate
Number of data points collected during each upward (retraction) and downward (extension) travel
cycle of the piezo. The Number of samples parameter sets the pixel density of the force curve. This
parameter does not change the Z scan size.
Range or Settings
•
4—512 data points displayed per extension and retraction cycle.
Units
Switches parameters in the control panels between units of Volts (V) or Metric units (nm or µm).
Changing this parameter also changes the setting of the Units parameter on the AFM control panel.
Range or Settings: Volts (V) or Metric (nm)
Deflection [Amplitude] setpoint
Defines the deflection or amplitude signal, and therefore the tip-sample force, maintained by the
feedback loop.
Range or Settings:
•
± 10.0 V maximum, depending upon Deflection or Amplitude limit.
Hints for Optimizing the Deflection [Amplitude] Setpoint
•
The setpoint parameter is the same as the setpoint voltage parameter on the Real-time
Feedback Control panel. Therefore, changing the value in one place will change it in
the other.
•
Increasing this parameter by 1 volt has the effect of lowering the entire force curve by 1
volt.
•
Exiting the program (DI system menu) from Force Calibration mode withdraws the tip
automatically.
5.4.3 Channel Panels and Force Mode
The Channel 1,2,3 appear on the Control Monitor in Force Calibrate and advanced Force Mode
(See Figure 5.4c). For details on all of the Channel parameters, see Chapter 3.
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Force Calibrate
Figure 5.4c Control Panel—Channel 1, 2, 3
5.4.4 Channel Parameters Affecting Force Mode
The parameters in each Channel panel affecting Force Calibrate and advanced Force Mode is as
follows:
Data type
Channels may be assigned to any input signal available including: Deflection, Amplitude, Phase,
Friction, Aux A, B or C data. The Channel 3 panel displays Aux A, B or C data only. Any channel
may be switched to Off, however, at least one channel is always on.
Data scale
Voltage range to be scaled along the vertical axis of the force curve plot.
Data center
Offsets centerline of scan by the amount entered.
Note:
The Data center offset does not become a permanent part of the data.
Range or Settings:
•
86
Depends upon the input signal, generally ± one-half of data scale maximum.
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View Menu
Force Calibrate
5.4.5 Force Calibrate Control Monitor Menu Items
Along with panels, a menu bar and icon toolbar (i.e., different than the Image Mode) appear after
selecting the Calibrate command (See Figure 5.4d).
Figure 5.4d Force Calibrate Menu Bar and Toolbar
Motor
The Motor menu controls the tip movement.
ATTENTION:
Use of Step Motor panel is not recommended while the surface is engaged—the tip and/or
sample surface may be damaged.
The Motor menu commands include:
•
Withdraw—Retracts the tip from moving toward the surface.
•
Step Motor—Accesses a Motor Control panel and allows large, motorized movements
of the tip to the surface (See Figure 5.4e).
Figure 5.4e Motor Control Panel
Parameters on the Motor Control Panel
•
STEP SIZE—Distance to move the tip.
•
TIP UP—Executes tip move up (away from
sample surface).
•
TIP DOWN—Executes tip move down (i.e., toward sample surface).
•
QUIT—Exits the Motor Control dialog box and returns user to the Force Calibrate or
Force Step screen.
View Menu
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Force Calibrate
The View menu contains the Image Mode command and returns the user to the Real-time / Image
Mode screen. Image Mode may also be accessed by clicking on its icon.
Capture Menu
Stores the Force Calibrate or Force Step curve in the Capture directory. The Capture command is
included among the Force Calibrate and Force Step commands to record the resulting force
curve.
•
Capture—Allows for saving the Force Curve in a directory.
•
Abort—Exits the Capture command.
•
Continuous—Saves multiple files of the Force Curve in a directory.
•
Capture File Name—Designates the file name where the image is to be stored.
Probe
The Probe menu contains various tip control commands, including:
•
Run Continuous—The tip is continuously lowered and raised by a distance equal to
the Z scan size. This is the normal, default motion during Force Calibrate. “Raising”
and “lowering” are relative to your system (e.g., On Dimension Series SPMs, the tip is
raised and lowered to the surface; however, other SPMs raise and lower the sample
beneath the tip).
•
Run Single—Lowers and raises tip once by a distance equal to the Z scan size, then
halts.
•
Stop—Halts all tip movement.
Note:
View additional menu subcommands by accessing the advanced Force Mode
command (See Section 5.5).
5.4.6 Force Calibrate Display Monitor
After selecting the Force Calibrate command, the Display Monitor shows a Force Calibrate plot.
The plot is an oscilloscope-like display of the cantilever-deflection signal plotted against the Z-axis
piezo voltage (sample height).
Figure 5.4f illustrates a Force Calibration using the mouse to set the Sensitivity value.
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Force Calibrate
Figure 5.4f Illustration of a Force Calibration Plot.
Force Calibration Plot
M
raw
-d
se
ou
Tip
Deflection
0.25 V/div.
ivi
sit
en
ns
Setpoint
Force curve
ty
ce
tra
First Trace
Z position - 8.44 V/div
Procedures to Set the Sensitivity Value in the Force Plot
Use the mouse to set the Sensitivity parameter in the Force Calibrate control panel by tracing a
line on the sloped portion of the force curve (See Figure 5.4f). Use the Sensitivity value to calculate
the deflection of the cantilever in nanometers.
Note:
To ensure accuracy, the Sensitivity should be recalculated every time the laser
spot position or the photodiode position is changed.
Procedures to Define the Sensitivity
Complete the following steps to define the Sensitivity of the cantilever deflection voltage due to the
change in the piezo position:
Note:
The Sensitivity must be defined before the Metric version of Deflection type
data is available and accurate.
1. Position the cursor on the curve near the top of the sloped portion of the force curve.
2. Click on the left button to lock the cursor position. A line segment expands from this
position.
3. Fit the line segment to the sloped portion of the curve. Remember that the slope of the curve
is the only concern.
4. Click on the left button to define the bottom end of the line segment. The slope of the line
will be calculated and automatically entered as the Sensitivity parameter in the Force
Calibrate control panel.
5. An additional click of the left button within the limits of the graph will remove the line from
the screen allowing the calibration operation to be repeated.
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Procedures to Graph a Contact AFM Force Curve
This exercise demonstrates how to graph a contact AFM force curve using the View / Force
Calibration function.
1. Prepare a Probe and Load the Calibration Standard
Samples may consist of the silicon calibration standard supplied with the microscope or a sample
of some other choosing.
2.
Engage the Surface
Follow the procedures to engage for contact AFM. If an experienced user is available, consult them
for assistance.
3. Transfer to the Force Calibration Screen (Real-time/View/Force Mode/Calibrate)
At this point, the surface of the sample should be engaged in contact AFM; a good image of the
surface should display on the monitor. Next, complete the following:
4.
Align the Graph Window
To align the graph window with the active part of curve, it is necessary to make adjustments to three
parameters shown on the Force Calibration screen:
90
•
Z scan start—Positions the graph horizontally on the force curve.
•
Graph range—Scales the vertical axis of the graph to show more or less of the force
curve.
•
Setpoint—Positions the graph vertically on the force curve by setting the horizontal
center line at the setpoint value indicated.
Command Reference Manual
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View Menu
Force Mode / Advanced
5.5
Force Mode / Advanced
Additional panels and parameters are available in the Force Mode /Advanced subcommand. Due
to improvements in the software, it is now possible to select which output channel/signal to ramp or
sweep (e.g., Force Calibrate ramps Z). The ramp channel is determined by the Ramp Channel
parameter in the Main Controls panel.
After selecting the Advanced subcommand, a screen appears with a menu bar, toolbar, several
additional parameters and a status bar (See Figure 5.5a).
Figure 5.5a Advanced Force Calibrate Screen
5.5.1
Main Controls Panel Parameters
Advanced parameters in the Main Controls panel allow for further detail in optimizing the Force
Curve. See Section 5.4.2 for details on the basic Force Calibrate parameters.
The advanced Force Calibrate parameters are as follows:
Ramp channel
Defines the variable to be plotted along the X-axis of the Scope Trace.
Range or Settings:
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Force Mode / Advanced
•
Z—Plots Z
•
Analog 1—Any analog channel. Units will vary depending on the channel output.
Bias—Appears only in STM mode.
Velocity, Forward or Reverse
For advanced users only; must be enabled from the di/Show all items selection. Forward and
Reverse Velocity control the velocity of the piezo toward and away from the sample. These values
vary depend upon the Ramp Channel and Scan Rate values. Velocities may be set at different
values, however, changing the Scan Rate changes the velocities in the ratio of difference between
the values. Changing the velocities adjusts the Scan Rate value.
X offset, Y offset
X, Y offset controls the center position of the scan in the X and Y directions, respectively.
Range or Settings:
•
±220 Volts; ± XX Microns (head-dependent)
Average count
Number of force calibration curves averaged to plot the displayed and captured curve.
Spring constant
Records the spring constant of the indentation cantilever that is currently being used. This
parameter is input by the user and is recorded along with each force plot captured.
It is used for Off-line analysis of the force plot only. It is not critical to set the Spring constant,
since it can be altered in the Off-line analysis of the captured force plot. Also, use the Spring
constant to display a graph of force vs. separation when conducting Off-line analysis of the force
plot.
Display mode
The portion of a tip’s vertical motion to be plotted on the force graph.
Range or Settings:
•
92
Extend—Plots only the extension portion of the tip’s vertical travel.
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View Menu
Force Mode / Advanced
•
Retract—Plots only the retraction portion of the tip’s vertical travel.
•
Both—Plots both the extension and retraction portions of the tip’s vertical travel.
•
If a channel other than Z is chosen and the force curve is captured Off-line, Display
mode will not be available in Off-line view.
X-rotate
X-rotate allows the user to move the tip laterally, in the X direction, during indentation. This is
useful since the cantilever is at an angle relative to the surface. One purpose of X Rotate is to
prevent the cantilever from plowing the surface laterally, typically along the X direction, while it
indents in the sample surface in the Z direction. Plowing can occur due to cantilever bending during
indentation or due to X movement caused by coupling of the Z and X axes of the piezo scanner.
When indenting in the Z direction, the X Rotate parameter allows the user to add movement to
scanner in the X direction. X Rotate causes movement of the scanner opposite to the direction in
which the cantilever points. Without X Rotate control, the tip may be prone to pitch forward during
indentation. Normally, it is set to about 22.0 degrees.
Range or Settings:
•
0 to 90 degrees; most effective values are between 15 and 25 degrees
Feedback type
The Feedback type option specifies the feedback site.
Range or Settings:
•
None—No feedback taking place when ramping
•
Pixel—Feedback done after every pixel encountered during the ramp (of the force
curve)
•
Ramp—Feedback takes place at the top and bottom of the ramp
•
Cycle—One feedback takes place at the starting point after one complete cycle
Feedback counts
The Feedback counts option specifies the number of feedbacks to be reported at each feedback
site. When Feedback type is set to Ramp, and Feedback counts is set to 3, then three counts are
performed at each stop during the ramp cycle (i.e., A total of six).
Feedback value
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View Menu
Force Mode / Advanced
The Feedback value is useful only in scanning tunneling microscopy (STM) and allows
adjustment of the feedback value to a different bias than is being used in Image Mode.
Note:
While the user is ramping Z in Force mode, the feedback parameters (i.e., type,
count and value) are inactive.
For further details on the basic Force Calibrate parameters, see
Section 5.4.2.
5.5.2 Feedback Controls Panel in Force Mode
Many parameters on the Feedback Controls panel are identical to those used on the Real-time /
Feedback Controls panel. Several Feedback Controls parameters affect the quality of a force
curve. Only parameters requiring further explanation are included in this section. For complete
details on the Feedback Controls panel, see Chapter 3.
In advanced Force Mode (Real-time/View/Force Mode/Advanced), the Feedback Controls panel
appears on the Control Monitor (See Figure 5.5b).
Figure 5.5b Control Panel—Feedback Controls
5.5.3 Feedback Controls Parameters in Force Mode
For details on all of the Feedback Controls parameters, see Section 3.3.
Integral Gain—Controls the amount of integrated error signal used in the feedback
calculation.
Range or Settings for Force Mode:
•
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1.0—8.0
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Force Mode / Advanced
Proportional gain—Controls the amount of the proportional error signal used in the feedback
calculation. The Proportional gain term in the feedback calculation has equal gain at all
frequencies; therefore, it has a dominating effect over the Integral gain for high frequencies.
Range or Settings:
•
Typically, settings are 35 to100 percent more than Integral gain values.
Amplitude [Deflection] limit
Available on MultiMode and Dimension SPMs. Sets the input range of the photodetector signal.
(Previously called Input Atten.) If set to 2.5, the Amplitude [Deflection] limit parameter gives less
range but better resolution. In general, use 20 V for silicon nitride tips and 2.5 for crystal silicon
tips.
Analog 1, 2, 3, 4
(STM and standard contact AFM only)—Outputs a selectable voltage to the microscope (see line
labeled ANA1 in the “Controller-Interface Signals” matrix in Appendix B of the Control System
User's Manual). This voltage has no effect on the operation of the standard microscope, but is useful
in custom applications.
Range or Settings:
•
-10.00 through 10.00 Volts
Setpoint 0 (button)
Sets the setpoint to zero (i.e., in Contact mode the deflection off the surface is no force, or 0).
5.5.4 Scan Mode Panel in Force Mode
The Scan Mode panel appears along with other Advanced panels to configure the Force plot (See
Figure 5.5c).
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View Menu
Force Mode / Advanced
Figure 5.5c Control Panel—Scan Mode
5.5.5 Parameters in the Scan Mode Panel
Trigger mode
Limits the amount of force exerted by the tip upon the sample. It is possible to operate the trigger
independent of drift (Relative) or at some arbitrarily fixed point (Absolute) depending on the
trigger settings.
Trig channel
Specifies on which data channel that Trig threshold will trigger. Trig channel varies depending on
the selected Ramp channel, microscope type and mode.
Note:
If a channel other than Z is chosen and the force curve is captured Off-line,
Display mode will not be available in Off-line view.
Trig threshold
The value of the cantilever deflection, as measured by the photodetector, desired for the indentation
or scratch. The Trigger threshold defines the maximum force applied to the sample corresponding
to the upper leftmost point on the force plot.
Range or Settings:
•
96
0 V to 1.250 V, but the recommended starting value depends on the Deflection Limit.
Try 0.5 V to 1.0 V. The value may also be negative, depending on the desired deflection.
Command Reference Manual
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View Menu
Force Mode / Advanced
Trig direction
Determines the direction of the trigger and allows for a Positive, Negative, or Absolute trigger
slope. In this way, the trigger may be configured to activate on either the positive or negative
direction of the force curve.
;;;;;;;
;;;;;;;
2745-110
Z position - 0.10 µm/div
Z position - 0.10 µm/div
Negative Trigger Direction
Positive Trigger Direction
Start mode
Start mode allows the user to switch between the various force modes without returning to image
mode.
Range or Settings:
•
Indent—The normal start mode to use for nanoindentation. This uses TappingMode to
find the surface.
•
Scratch—The normal start mode to use for nanoscratching. This uses TappingMode to
find the surface.
•
Calibrate—Produces standard Force Mode force plots. Includes the ability to
continuously cycle the tip up and down.
•
Step—Produces standard Force Mode force plots, with added control to step the tip
towards the surface.
End mode
Determines the location of the tip when the microscope is returned to Image mode. Choices include
Extended, Retracted, or Surface.
Auto start
When Enabled, autostarts Force mode when entering from Image mode. If off, user must start
ramping by clicking the Continuous or Single icon, or by selecting the proper menu selection under
the Probe pull-down menu.
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View Menu
Force Mode / Advanced
Ramp delay
Specifies a delay when the tip reaches the trigger threshold or ramp end
Range or Settings:
•
0 to 250 seconds
Reverse delay
Similar to Ramp delay, this value specifies the duration of the delay when the piezo is at the top of
the cycle (farthest away from the sample).
Range or Settings:
•
0 to 250 seconds
Auto offset
Because of Z drift (thermal drift, piezo drift, etc.), the sample will sometimes drift out of Z range.
When Enabled, Auto offset uses the feedback value from Image mode to find the surface and
resume Force imaging. The Auto offset feature is a form of drift correction.
5.5.6 Auto Panel in Force Mode
The Auto Panel allows you to define a matrix of sample points for Force Cal., STS Plot i(v), and
STS Plot i(s). The Rows and Columns define the number of data acquisition points. Rows are
points in the X axis, and Columns are points in the Y axis.
The Auto Panel appears in the Control Monitor for advanced Force Mode (See Figure 5.5d).
Figure 5.5d Control Panel—Auto Panel
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Force Mode / Advanced
5.5.7 Parameters in the Auto Panel
Columns—Points in the Y axis.
Rows—Points in the X axis.
Column step—Offset distance between points in the X plane.
Row step—Offset distance between points in the Y plane.
Threshold step
The trigger point at which the deflection or the current activates the position change. In STS mode,
the Threshold step is measured in current.
Capture
State is either Enabled or Disabled. When Enabled, the software records and stores the data for each
data point in the matrix of rows and columns.
5.5.8 Control Monitor Menu Bar and Toolbar
In addition to the advanced Force Calibrate (Force Mode/Advanced) parameters, new menu bar
subcommands and icons appears for optimizing the Force Calibrate command (See Figure 5.5d).
Figure 5.5e Advanced Force Calibrate Menu Bar and Toolbar
For details on the basic Force Calibrate menu items and icons, see Figure 5.4.5. The following
additional menu items and icons appear for the advanced Force Calibrate command:
Probe
Rev. C
•
Retract—The Z-axis piezo retracts to its limit in preparation for Approach Continuous.
This command does not initiate motor movements.
•
Approach Continuous—The tip lowers to the surface and raises in a controlled series
of steps, then indexed by the Z step size (see Scan Mode panel) distance. This process
continues downward until the tip encounters the surface. When tip deflection exceeds
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View Menu
Force Step
the Threshold Step amount, Approach Continuous halts and the resulting force curve
displays.
•
Approach Single—The tip is lowered to the surface and raised in a single, controlled
step. This process is halted if the surface is encountered by the tip, causing deflection
exceeding the Step threshold amount. The resulting force curve is displayed.
•
Auto Ramp—Begins auto ramping as defined by the parameters specified in the Auto
Panel (See Figure 5.5d)
•
Ramp—Accesses the Ramp Channel parameter in the Main Controls panel.
•
Feedback—Accesses the Feedback Controls panel.
•
Mode—Accesses the Scan Mode panel.
•
Auto—Accesses the Auto Mode panel.
•
Channel (1,2,3)—Accesses up to three Channel panels.
Panels
5.6
Force Step
The Force Step command halts the X-Y scan and allows the user to extend the Z piezo in a highly
controlled manner. It brings the tip and sample into contact one or more times, then plots either the
resulting deflection of the cantilever (contact AFM) or the amplitude of the cantilever oscillation
(TappingMode) as a function of sample displacement.
Force Calibrate and Force Step commands are similar; however, they differ slightly in the type of
tip-sample interaction allowed. The main difference being that in Force Step the tip is carefully
“stepped” down to the sample surface rather than continuously oscillated. Generally, use Force
Calibrate to observe multiple tip-sample interactions (i.e., with the Z-axis piezo repeatedly
oscillating up and down).
All commands detailed in the Section 5.4 apply to Force Step.
Note:
100
After selecting the Force Step command, the tip and sample are initially fully
separated (i.e., the Z-axis piezo is fully retracted).
Command Reference Manual
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View Menu
Force Volume
5.7
Force Volume
Force Volume imaging with the atomic force microscope (AFM), combines force measurement
and topographic imaging capabilities. A Force Volume data set can be used to map in two or three
dimensions the interaction forces between a sample and the AFM tip and correlate the force data
with topographic information.
Advantages of Force Volume imaging include the ability to collect distributions of forces at
various Z-positions and at thousands of X-Y positions during a single image scan, correlation of
surface topography to interaction force, better quantization of the interaction force, and new
methods of analysis.
A single Force Curve records the force felt by the tip as it approaches and retracts from a point on
the sample surface. A Force Volume image contains a topographic image of an area of a sample
and an array of force curves over the same area. Each force curve is measured at a unique X-Y
position in the area, and force curves from an array of X-Y points are combined into a threedimensional array of force data (hence the term volume).
The value at a point (X,Y,Z) in the volume is the deflection (force) of the cantilever at that position
in space. Typical AFM images depict the topography of a surface by measuring the response of a
feedback loop to changes in the tip-sample interactions as the tip is scanned across the surface.
The Force Volume data set combines simultaneously measured topographic information (a
constant force map of the surface) and force information into a single data set allowing to test for
correlations between forces and surface features (See Figure 5.7a).
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View Menu
Force Volume
Figure 5.7a Standard Force Curve and Force Volume Display
Note:
The XYZ arrows in the graph are an addition and are not visible on screen.
A Force Volume data set or an array of regularly spaced force curves yields three-dimensional
force information. All the force curves are identical in the figure to simplify the diagram.
Note:
102
In a Force Volume data set, the force curves will vary with XY position.
Command Reference Manual
Rev. C
View Menu
Force Volume
5.7.1 Force Volume Control Monitor
After selecting the Force Volume command a screen appears on the Control Monitor to allow for
configuration of the data (See Figure 5.7b).
Figure 5.7b Force Volume Panels
5.7.2 Force Volume Control Monitor Menu Items
Motor—Withdraws or accesses the Motor Step panel. For details on the Motor menu, see
Section 5.4.5.
View—Toggles the screen to Image Mode.
Frame—Commands include: Up, Down, Reverse and Line to adjust the imaging direction in
the display frame.
Capture
Commands include: Capture, Abort, Auto Scan, Capture Plane, Capture Calibrate, Capture
Withdraw, Capture Filename. For details on the commands, see “Image Mode Menu Commands”.
Probe—Commands include: Start and Stop. Controls the tip movement.
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View Menu
Force Volume
Panels—Accesses panels on the Control Monitor
•
Scan—Accesses the Image Scan panel similar to the main Scan Controls panel.
•
Main—Accesses the Z Scan Controls panel similar to the Main Controls panel in Force
Calibrate.
•
Feedback—Accesses the Feedback Controls panel.
•
Channels—Accesses three types of Channel panels: Image, Force Plot and FV Image
channels. Each configures specific windows seen on the Display Monitor.
Hints to Optimize the Force Volume Parameters
•
The Z display parameter in the FV Channel panel chooses the slice of the volume
displayed in the FV Image window. Changing this parameter during the collection of an
image will allow the user to view different slices through the volume. Only the lines
scanned after changing Z display correspond to the new slice. Lines scanned before the
change correspond to the previous slice.
•
Adjusting the Volume scale and Volume Offset parameters in the FV Channel panel
allow the user to zoom in on certain force features in the Force Volume image. Setting
these parameters in such a way as to mask all but the range of forces of interest may be
helpful.
•
The Height image adjusts the scale through the Z range parameter in the Image
Controls panel. Also, the Z direction parameter determines whether the microscope
collects the Trace or the Retrace of the scan line.
•
As a rule, it is best to set the above parameters to values that allow for clear and
unambiguous identification of the topographic and force features of the sample during
the scan.
5.7.3 Force Volume Display Monitor
The Display Monitor includes three main parts: an image window displaying the Height Image, a
FV Image window, and a Force Curve plot.
The windows interact to allow the user to inspect each slice in the volume (See Figure 5.7c).
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Force Volume
Figure 5.7c Schematic of Force Volume Data Set
General Procedures to Display a Force Volume Slice
To display a Force Volume slice at a particular Z position complete the following:
1. Click the left mouse button on the Z position in the force plots window.
Note:
The Z display parameter in the Graph dialog box contains the present Z
position (the Z value of the slice, also a vertical green line in the force plots
window).
2. Drag the mouse in the force plots window while holding down the left button to select
consecutive slices (See Figure 5.7d).
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View Menu
Force Volume
Figure 5.7d Force Volume Display
Note:
Multiple force curves, measured at points A, B, and C in the height image,
display simultaneously Off-line. Also, individual curves can display.
Presently, the only way to save images of slices for later use is through the Utility menu. This will
save (or export) an image of the Display Monitor to a directory. The images can then be modified in
third party graphics software (IDL, NIH image, Canvas, etc.).
For further details on the Off-line Utility menu, see Chapter 16.
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Sweep
5.8
Sweep
5.8.1 Cantilever Tune
The Cantilever Tune command allows determination of the cantilever resonant frequency and the
setting of the operating point for TappingMode feedback. In addition, it is possible to determine the
spring constant of a Contact Mode cantilever quickly and easily. Cantilever Tune sweeps the
cantilever drive frequency over a selectable range, then displays a plot of the cantilever amplitude
versus drive frequency on the Display Monitor. This command is enabled only when the AFM
mode parameter on the Other Controls panel is set to Tapping. On Small Sample MultiMode
SPMs, verify that the switch located on the base is toggled to TM AFM before selecting the
Cantilever Tune command.
Note:
The sweep channel is determined in the Channel 1, Channel 2, or Channel 3
control panels.
Figure 5.8a Tapping Cantilever in Mid-air.
Laser beam
Return signal
Cantilever
Maximum amplitude is attained at the cantilever natural resonance
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View Menu
Sweep
Figure 5.8b Tapping Cantilever on Sample Surface
Laser beam
Return signal
(deflected)
Sample surface
Note: Deflection of cantilever and return signal (exaggerated).
MultiMode and Dimension Series microscopes rely on an optical lever technique to map sample
topography. In TappingMode, the optical lever technique reflects a laser beam off the back of the
oscillating cantilever, thence to a segmented photodiode. The differential signal between the top
and bottom photodiode segments provides a sensitive measure of cantilever deflection. As the
sample is scanned, analog circuitry determines the RMS value of the rapidly changing cantilever
deflection signal. The RMS value of the cantilever deflection signal corresponds to the amplitude of
the cantilever oscillation. Changes in amplitude of the cantilever oscillation is controlled by the
feedback system to track the sample surface.
5.8.2 Cantilever Tune Control Monitor
Clicking on Panels /Auto Tune displays the Auto Tune Controls screen. Along with the menu bar
and status bar, up to three control panels and two channel panels appear (See Figure 5.8c).
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Sweep
Figure 5.8c Cantilever Tune Controls Screen
5.8.3 Panels in the Cantilever Tune Screen
To tune the cantilever at its natural resonance, click on the Auto Tune icon on the toolbar prior to
selecting the Cantilever Tune command. Otherwise, select the Cantilever Tune command to
access screens that allow for configuring parameters to tune the cantilever. The Cantilever Tune
control panels include:
5.8.4
•
Auto Tune Controls—See Section 5.8.4
•
Sweep Controls—See Section 5.8.5
•
Spring Constant—See Section 5.8.6
Auto Tune Controls Panel
The Auto Tune command simplifies the TappingMode tuning procedure. This command initiates a
user-defined frequency sweep, then automatically determines the cantilever natural, resonant
frequency and sets the Drive frequency to that value.
Parameters in the Auto Tune Controls Panel
Start frequency—Starting point of the Auto Tune frequency sweep.
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Sweep
End frequency—Ending point of the Auto Tune frequency sweep.
Target amplitude—Targeted output signal amplitude at the photodiode detector. This value should
not be confused with Drive amplitude, which is the amplitude applied directly to the cantilever
itself (see Drive amplitude).
Range and Settings:
•
0.00—5.00 V
•
Dimension Series SPMs, nominal = 2.00 V
•
Small Sample MultiMode SPMs, nominal = 3.00 V
Peak offset—Percentage of cantilever’s free-air resonant frequency to be automatically offset.
Peak offset is used to compensate for changes in resonance before engagement due to the tip’s
interaction with the surface after engagement.
Range and Settings: 0—50 percent; typical value = 1—2 percent.
Note:
Positive values offset the Drive frequency rightward on the graph.
Minimum Q—Q is the value defined by the amount of oscillation it takes for a wave to drop to 1/e
of its amplitude value (i.e. a wave with an amplitude of ten would have a Q of 10/e, or 3.6788).
Minimum Q establishes a minimum “width of peak” value allowed by the AutoTune function.
Peaks not meeting the Minimum Q may be ignored by setting the Smash Q factor.
Smash Q factor—The width of the area beneath the wave “smashed” (set to zero) when a peak not
meeting the Minimum Q requirement is found.
Buttons on the Auto Tune Control Panel
AUTO TUNE—Executes the automatic tuning procedure: the cantilever is excited through a range
of frequencies beginning at the Start frequency and ending at the End frequency. A plot of the
cantilever’s response curve is shown on the Display Monitor.
BACK TO IMAGE MODE—Returns the software to image mode.
5.8.5 Sweep Controls Panel
The Sweep Controls panel parameters adjust the frequency values applied to the cantilever. The
parameters toggle to Interleave Controls parameters after selecting the INTERLEAVE CONTROLS
button (See Figure 5.8d).
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Sweep
Figure 5.8d Sweep Controls Panel
Interleave
Controls
Parameters
Parameters in the Sweep Controls Panel
Graph Controls
Sweep width—Controls the range of frequencies applied to the cantilever. This value corresponds
to the width of the frequency plot.
Drive frequency—Selects the oscillation frequency applied to the piezoelectric crystal that
vibrates the cantilever.
Range and Settings: 0 through 25000 kHz
Sweep sample count—Controls the number of frequencies used to generate the Frequency Sweep
plot on the Display Monitor.
Main Controls
Amplitude setpoint—Defines the desired cantilever oscillation amplitude voltage to be maintained
by the feedback loop. The feedback loop continually compares the setpoint to the present value of
the cantilever oscillation amplitude voltage to calculate the desired vertical change in the piezo
position.
Range and Settings: ± 10 Volts
Drive amplitude—Selects the amplitude of the drive voltage applied to the piezoelectric crystal
vibrating the cantilever.
Range and Settings: 0 through 20000 mV
Buttons on the Sweep Controls Panel
MOTOR—Displays the Motor Control panel used to control tip position relative to the sample
with motor movements (See Figure 5.4e).
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View Menu
Sweep
INTERLEAVE CONTROLS—Displays a duplicate set of parameters applied only to the interleaved
portions of the scan (See Figure 5.8d). For further details on the Interleave Controls parameters,
see Section 3.5.
5.8.6 Spring Constant Panel
The Spring Constant panel is a panel in the Cantilever Tune screen. The parameters (Tip factor,
true Resonance and Spring Constant) are defined by the tip type (e.g., 100W/100N or 200W/
200N). The spring constant calculates automatically by using the equation:
k = æ1 * f3 (Spring Constant = Tip factor * resonant frequency)
306.5g Sweep Mode Screen
Parameters in the Spring Constant Controls Panel
Tip type—The type of Contact mode tip used (e.g., 100 wide and 100 narrow).
Table 5.8a Suggested Sweep Controls Values
Tip type
112
Drive
frequency
Sweep width
100W
100N
50
50
200W
200N
15
25
Command Reference Manual
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View Menu
Sweep
Tip factor—Value defined by the tip type; each tip has a different tip factor. Values of the
coefficient for cantilever types are stored in the file cant.ins in the Equip directory.
Range and Settings: Tip type dependent
Resonant frequency—While in Sweep mode, the ADJUST button finds the resonant peak,
measures the Resonant frequency value, enters this value, then recalculates the spring constant
value of the cantilever.
Spring constant—Calculates automatically based on the values for Tip type, Tip factor, and
Resonant frequency.
Buttons on the Spring Constant Controls Panel
ADJUST—Tunes the cantilever to the center, responsible for finding the Resonant Frequency and
calculating the Spring Constant value.
SAVE—Saves the Sweep Controls values to a file.
RESET—Resets the Sweep Controls values to the defaults.
5.8.8 Cantilever Tune Display Monitor
The plots shown on the Display Monitor for Cantilever Tune graph cantilever oscillation
amplitude versus the cantilever drive frequency. This plot allows the resonance frequency of the
cantilever to be determined and the operating point for the feedback loop to be set. A menu bar at
the top of the monitor contains commands to help tune the drive frequency and define the operating
point.
The Frequency Sweep plot does not appear after the microscope is engaged, because the frequency
cannot be swept after the microscope is engaged. The following commands appear in the menu bar
of the Display Monitor during the Cantilever Tune process:
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View Menu
Sweep
Figure 5.8a Cantilever Tune Display
Offset Cursor
Resonant Frequency
Cantilever Tune Display Menu Commands
•
Offset—The Center frequency shifts to the position of the center vertical cursor when
the command is executed. This has the effect of shifting the curve on the plot.
•
Zoom In—The Sweep width of the graph is set to values indicated by the two yellow
vertical lines when the command is executed. This command expands the plot by
adjusting the Center frequency and decreasing the Sweep width. The left mouse button
toggles between this command and Zoom Out. Continuing to press the left mouse
button toggles between the two modes if the cursor remains in the graph area.
•
Zoom Out—The Sweep width will increase by the ratio of the graph width and the
spacing between the two yellow vertical lines when the command is executed. This
command compresses the plot by adjusting the Center frequency to the center point
between the cursors and increasing the Sweep width. The left mouse button toggles
between this command and Zoom In. Continuing to press the left mouse button toggles
between the two modes if the cursor remains in the graph area.
•
Execute—This command initiates the previously selected command. Pressing the right
mouse button moves the pointer up to this command in the command bar. Press the right
button a second time (or the left button) and the previously selected command will be
executed.
•
Clear—Eliminates the cursors from the display.
Procedures To Find the Spring Constant
To find the Spring Constant in Contact Mode, complete the following:
1.
114
Determine the type of cantilever being used. Standard silicon nitride Contact mode
cantilever types are listed in Table 4.1.
Command Reference Manual
Rev. C
2. Identify the cantilever in the Spring Constant control panel under Tip type. The
Tip factor is a function of the cantilever type, and will appear when the cantilever
type has been identified. The values are stored in the file cant.ins in the Equip
directory.
View Menu
Sweep
3. Determine the resonant frequency of the particular cantilever as follows.
•
Set the Drive amplitude to 0 (in the Sweep Controls panel)
•
Set Sweep width and Drive frequency using values defined in Table 4.1
•
Use the Offset cursor in the Display Monitor to center the thermal resonance
noise envelope and determine the resonant frequency of the cantilever.
4. Input the resonant frequency in the Spring Constant panel and the spring constant
appears in the “Spring Constant” box. The formula used to determine an
3
approximate spring constant is as follows: k = α 1 × f where “k” is the spring
constant, “α” is some coefficient stored in the NanoScope software based on Tip
type, and “f” is the measured resonant frequency.
Mouse Operations
Rev. C
•
Select the desired command (Offset, Zoom In, Zoom Out, Setpoint) by
positioning the pointer on the command in the menu bar and pressing the left
button of the mouse.
The command will then be highlighted (white background), and the appropriate
vertical or horizontal yellow lines will appear on the graph.
•
Move the mouse in the proper axis (see the particular command discussion
preceding this) to obtain the desired parameter value on the graph.
•
Press the right mouse button. This will cause the horizontal or vertical lines
(depending upon the command) to quit moving, and the mouse pointer will
jump to the Execute command in the command bar.
•
Press the right (or left) mouse button to execute the command. The proper
parameter values on the Control and Display Monitors will change to the new
values.
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View Menu
STS Plot i(v) (STM Only)
5.9
STS Plot i(v) (STM Only)
The STS Plot i(v) command places the STM in a spectroscopic mode. In most cases, the tip
position is constant and the change in the tunneling current as a function of bias voltage is
measured and plotted. However, it can also be used for BEEM (Ballistic Electron Emission
Microscopy) with some additional hardware.
5.9.1 STS Plot i(v) Control Monitor
The STS Plot i(v) screen displays a menu bar, toolbar, up to four control panels and up to three
Channel panels (See Figure 5.9a).
Figure 5.9a STS i(v) Plot Screen
5.9.2 STS i(v) Plot Main Controls Panel
Ramp Controls
Ramp channel—Defines the variable to be plotted along the X-axis of the Scope Trace.
Range or Settings:
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Z—Plots Z
STS Plot i(v) (STM Only)
Analog 1—Any analog channel. Units will vary depending on the channel output.
Bias—Appears only in STM mode.
Ramp Begin—Specifies the start of the Ramp channel scan. Units depend on the setting
for Ramp channel.
Ramp End—Determines the end position of the output ramp.
Scan rate—Rate at which piezo extends in Z direction (toward surface). Note that the units
for this value will vary depending on the Ramp channel value. Very slow Scan rates (< 0.10
Hz) may prove frustrating; the system completes the present scan before initiating
parameter changes.
Range or Settings: min. 0.010; maximum value depends upon Number of samples.
Note:
Ramping under NT is limited to approximately 30 Hz at 512 samples
per line.
Velocity—Forward or Reverse, units will depend on the ramp channel. Controls the
velocity of the piezo.
X offset, Y offset—Controls the center position of the scan in the X and Y directions,
respectively.
Range or Settings:
•
±220 Volts; ± XX Microns (head-dependent)
Number of samples—Number of data points collected during each upward (retraction)
and downward (extension) travel cycle of the piezo. The Number of samples parameter sets
the pixel density of the force curve. This parameter does not change the Z scan size.
Range or Settings
•
4—60,000 data points displayed per extension and retraction cycle.
Average count—The Average count parameter in the STS Plot control panel controls how
many values are averaged for each point displayed in the plot. The entire cycle repeats and
the corresponding values from each cycle are averaged to reduce noise.
Range or Settings: 1 - 1024
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STS Plot i(v) (STM Only)
Hints to Optimize the Parameters in the Average count Parameter
•
Increasing this parameter increases the signal-to-noise ratio by averaging out the
random noise in the signal.
•
Increasing this parameter also increases the total measurement time.
•
This parameter defines the number of times the entire modulation cycle repeats. The
cycle from +Bias scan/2 to -Bias scan/2 repeats Average count times. The
corresponding data points from each scan are averaged to reduce noise.
Main Panel Display Parameters
Display mode—Portion of tip’s vertical motion to be plotted on the force graph.
Range or Settings
•
Extend—Plots only the extension portion of the tip’s vertical travel.
•
Retract—Plots only the retraction portion of the tip’s vertical travel.
•
Both—Plots both the extension and retraction portions of the tip’s vertical travel.
Units—Switches parameters in control panels between units of Volts or Metric units (nm, etc.).
Changing this parameter also changes the setting of the Units parameter on the AFM control panel.
Range or Settings
•
Volts
•
Metric
Feedback type—Specifies the feedback site.
Range or Settings:
•
None—No feedback taking place when ramping
•
Pixel—Feedback done after every pixel encountered during the ramp (of the force
curve)
•
Ramp—Feedback takes place at the top and bottom of the ramp
•
Cycle—One feedback takes place at the starting point after one complete cycle
Feedback counts—Specifies the number of feedbacks to be reported at each feedback site. When
Feedback type is set to Ramp, and Feedback counts is set to 3, then three feedbacks are performed
at each stop during the ramp cycle (a total of six, in this case).
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STS Plot i(v) (STM Only)
Feedback value—Useful only in scanning tunneling microscopy, allows user to adjust the bias
value to a different bias than is being used in Image Mode.
5.9.3
Feedback Controls, Auto Panel and Scan Mode Panels
The panels in the STS i(v) Plot screen are similar to the advanced Force Calibrate screen panels.
For further details on the parameters in these panels, see Section 5.5.
5.9.4 STS i(v) Plot Display Monitor
A plot of tunneling current versus bias voltage, and the Z Center Position bar graph, are shown on
the Display Monitor. No control operations are possible.
Hints for Optimizing the STS i(v) Plot Command
•
Figure 5.9b depicts the operation of the STS i(v) spectroscopic mode when the
Feedback parameter is set to Off. (See following note for the case when the Feedback
parameter has a non-zero value).
Figure 5.9b STS i(v) Spectroscopic Mode
Sample period
V
+Bias scan/2
Bias voltage
(feedback activated)
0
-Biasscan/2
scan/2
-Bias
t
•
An STS i(v) measurement of tunneling current versus Bias voltage involves a few steps.
First, the feedback loop runs to establish the tip-to-sample separation for the settings of
Bias voltage and Setpoint current; the Setpoint current is sampled here. The tip-toscan
– Bias scan
sample voltage is then set to +Bias
-------------------------- and ramped to -------------------------- . The tip-to-sample
2
2
± Bias modulation
voltage is modulated by ------------------------------------------- along the ramped portion and the following
2
tunneling currents are measured:
Bias modulation
i + = tunneling current at V Bias = V ramp + --------------------------------------2
Bias modulation
i - = tunneling current at V Bias = V ramp – --------------------------------------2
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STS Plot i(s) (STM Only)
•
The software combines these two quantities as shown to derive the various functions of
i(v) spectroscopy:
in + in + 1
i+ + ii ( t ) = -------------- , or ---------------------2
2
∆i = i + – i - , or i n – i n + 1
if Bias Modulation = 0
if Bias Modulation = 0
Bias scan
∆v = Bias modulation , or ----------------------------------------------Number of samples
if Bias Modulation = 0
where v = instantaneous Bias scan value
δi
∆i
------ = ------δv
∆v
δli
∆i ⁄ ∆v
-------- = ---------------δlv
i(t) ⁄ v
δli
∆i ⁄ ∆v
-------- = ---------------δlv
i(t)
ATTENTION:
•
If the Feedback parameter is set to something other than Off, the system responds
differently. This is the setting required for BEEM (Ballistic Electron Emission
Microscopy). Additional hardware is required for BEEM experiments.
•
When the Feedback parameter is not zero, the feedback runs for each setting of the bias
voltage ramp. In this way the tunneling current is kept constant throughout the bias
voltage ramp.
•
The signal-to-noise ratio can be increased by increasing the Average count parameter;
however, the total measurement time is also increased. The Average count item controls
the number of times the ramp occurs per data point. A value of four implies that the
same ramp pattern occurs four times. The corresponding four data points from each
ramp would be averaged to improve the signal-to-noise ratio.
•
The input sensitivity must be properly defined for the auxiliary channel if the data is
input through an auxiliary channel.
All parameters on the STS Plot i(v) control panel affect results.
5.10 STS Plot i(s) (STM Only)
The STS Plot i(s) command places the STM in a spectroscopic mode. The change in the tunneling
current as a function of tip-to-sample separation is measured. Many control panel parameters are
common to the STS Plot i(v) and STS Plot i(s) control panels.
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STS Plot i(s) (STM Only)
5.10.1 Control Monitor
The STS Plot i(s) control panel is shown on the Control Monitor, allowing the user to control the
system operation. Each of the parameters in the STS i(s) Plot screen can be changed to vary the
operation of the microscope. After selecting the STS i(s) Plot command, a new screen appears with
a menu bar, toolbar, four control panels and up to three channel panels.
Figure 5.10a STS i(s) Plot Screen
5.10.2 Parameters in the Main Controls STS i(s) Panel
Ramp Controls
Ramp channel—Defines the variable to be plotted along the X-axis of the Scope Trace.
Range or Settings:
•
Z—Plots Z
•
Analog 1—Any analog channel. Units will vary depending on the channel output.
•
Bias—Appears only in STM mode.
Ramp Begin—Specifies the start of the Ramp channel. Units depend on the setting for Ramp
channel.
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View Menu
STS Plot i(s) (STM Only)
Ramp End—Determines the end position of the output ramp.
Scan rate—Rate at which piezo extends in Z direction (toward surface). Note that the units for this
value will vary depending on the Ramp channel value. Very slow Scan rates (< 0.10 Hz) may prove
frustrating; the system completes the present scan before initiating parameter changes.
Range or Settings:
min. 0.010; maximum value depends upon Number of samples.
Ramping under NT is limited to approximately 30 Hz at 512 samples per line.
Velocity —Forward or Reverse, units will depend on the ramp channel. Controls the velocity of the
piezo.
X offset, Y offset—Controls the center position of the scan in the X and Y directions, respectively.
Range or Settings:
•
±220 Volts; ± XX Microns (head-dependent)
Number of samples—Selects the number of data points reported per STS cycle. Lower values
allow faster line rates.
Range or Settings: 4 - 60,000
Average count—Controls how many values are averaged for each point displayed in the plot. The
entire cycle repeats and the corresponding values from each cycle are averaged to reduce noise.
Range or Settings:
•
1 through 1024
Hints to Optimize the Parameters in the Average Count Parameter
•
Increasing this parameter increases the signal-to-noise ratio by averaging out the
random noise in the signal.
•
Increasing this parameter also increases the total measurement time.
•
This parameter defines the number of times the entire modulation cycle repeats. The
cycle from +Bias scan/2 to -Bias scan/2 repeats Average count times. The
corresponding data points from each scan are averaged to reduce noise.
STS i(s) Main Panel Display Parameters
Display mode—Portion of tip’s vertical motion to be plotted on the force graph.
Range or Settings:
•
122
Extend—Plots only the extension portion of the tip’s vertical travel.
Command Reference Manual
Rev. C
View Menu
•
Retract—Plots only the retraction portion of the tip’s vertical travel.
•
Both—Plots both the extension and retraction portions of the tip’s vertical
travel.
STS Plot i(s) (STM Only)
Units—Switches parameters in control panels between units of Volts or Metric units (nm,
etc.). Changing this parameter also changes the setting of the Units parameter on the AFM
control panel.
Range or Settings: Volts or Metric (nm)
Feedback type—Specifies the feedback site.
Range or Settings:
•
None—No feedback taking place when ramping
•
Pixel—Feedback done after every pixel encountered during the ramp (of the
force curve)
•
Ramp—Feedback takes place at the top and bottom of the ramp
•
Cycle—One feedback takes place at the starting point after one complete cycle
Feedback counts—Specifies the number of feedbacks to be reported at each feedback site.
When Feedback type is set to Ramp, and Feedback counts is set to 3, then three feedbacks
are performed at each stop during the ramp cycle (a total of six, in this case).
Feedback value—Useful only in scanning tunneling microscopy, allows user to adjust the
bias value to a different bias than is being used in Image Mode.
5.10.3 Feedback Controls, Auto Panel, Scan Mode Panels in STS i(v)
Plot
The panels in the STS i(s) Plot screen are similar to the advanced Force Calibrate screen
panels. For further details on the parameters, see Section 5.5.
5.10.4 STS i(s) Plot Display Monitor
A plot of tunneling current versus bias voltage, and the Z Center Position bar graph, are
shown on the Display Monitor. No control operations are possible.
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Chapter 6
Frame and Capture Menus
The Capture menu allows images and parameters to be captured, then stored for future analysis.
Captured image files are saved with the label assigned by the user.
The Frame menu (Up, Down, Reverse and Line) restarts the Real-time scan. These four
commands facilitate data collection, especially when slower Scan rates are being used.
This chapter discusses the following Capture and Frame Commands:
6.1
•
Capture Section 6.1
•
Abort Section 6.2
•
Continuous (Movie) Capture Section 6.3
•
AutoScan Section 6.4
•
Capture Plane Section 6.5
•
Capture Withdraw Section 6.6
•
Capture Calibration Section 6.7
•
Capture Filename Section 6.8
•
Frame Commands Section 6.9
Capture
The Capture command stores the image data of the current scan. During the image scanning
process, the cursor moves up and down a square image frame (i.e., see image display in the Display
Monitor). When the cursor moves across one complete frame the Capture is done and an image file
is saved.
If the scan is in in the middle of the frame, the Capture command waits for the beginning of the
next frame to begin storing the file.
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Frame and Capture Menus
Capture
Note:
For multiple images, the Capture command collects each frame
simultaneously. However, the channel 1 image is saved in the capture file ahead
of channels 2 and 3.
To begin capturing, select the Capture icon, the Capture command (Capture/Capture) or
CNTRL-C.
6.1.1 Capture Control Monitor
The Control Monitor displays the main menu bar, control panels and a status bar along the bottom
of the screen. The status bar reflects the state of the Capture operation along with the status of the
scan (See Figure 6.1a).
Figure 6.1a Capture Control Monitor and Status Bar
"Capture: On"
Status Bar
The Capture status bar options include:
126
•
On—Indicates that the Capture mode is in progress.
•
Off—Indicates that the Capture has stopped.
•
Next—Indicates that the Capture mode is waiting for the next frame to begin capturing.
•
Done—Displays when the Capture finishes.
•
Movie—Displays when the Continuous Capture mode begins (See Section 6.3).
•
Forced—Indicates a Forced capture. This is done by clicking the Capture command a
second time. The advantage is that the capture begins or resumes without waiting for the
start of a new frame.
Command Reference Manual
Rev. C
Frame and Capture Menus
Capture
6.1.2 Capture Display Monitor
The Capture menu bar is visible on the Display Monitor. The menu bar commands allow the user
to Offset, Zoom In, Zoom Out, Clear, Rotate, Erase Image and Execute the commands for the
displayed image to (See Figure 6.1b).
Note:
Initiating any command will postpone the image capture until the scan regains
the beginning of the next frame.
Figure 6.1b Capture Display Menu Bar
Hints for Optimizing the Capture Command
Rev. C
•
Captured images are modified according to the setting of the Off-line planefit parameter
on each channel panel. See the descriptions of the control panel parameters for details
about stored data options.
•
If the SPM motor is moved while a capture is in progress, the capture aborts.
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127
Frame and Capture Menus
Abort
6.2
Abort
The Abort command stops the data collection of the Capture command. The Abort command
stops all of the Capture operations except the Auto Scan command.
To abort the Capture command, press the Abort icon or select the ABORT command key (Realtime/Capture/Abort).
6.3
Continuous (Movie) Capture
The Continuous command allows for storing multiple images sequentially and automatically. This
often proves invaluable when recording images of an evolving, dynamic process (e.g.,
electrochemical changes to materials).
Note:
Changing a parameter aborts the Continuous Capture function.
6.3.1 Continuous Command Display Monitor
The menu bar is visible, but attempting operation aborts the Continuous Capture operation. The
Continuous Capture mode captures and stores images until the Abort command is given or the
system runs out of disk space in the Capture partition.
Note:
128
Changing any control panel parameter or invoking the Offset or Zoom
functions within the current frame will stop the Continuous Capture
command until the next frame.
Command Reference Manual
Rev. C
Frame and Capture Menus
AutoScan
6.4
AutoScan
Use the Auto Scan command with any head or scanner to obtain multiple high-magnification
images within the confines of the maximum allowable Scan size for the head or scanner.
Note:
Locate the scanner parameters for your system in the EQUIPE Directory and
then select filename *.scn.
Refer to the following sections on AutoScan:
•
AutoScan Panel Section 6.4.1
•
Buttons on the AutoScan Panel Section 6.4.2
•
Scan Controls on the AutoScan Panel Section 6.4.3
•
Auto Controls in the AutoScan Panel Section 6.4.4
6.4.1 AutoScan Panel
The AutoScan panel displays parameters to control automatic scanning.
Figure 6.4a AutoScan Panel
6.4.2 Buttons on the AutoScan Panel
Start
The START button initiates AutoScan.
Note:
Rev. C
If you click the Abort button, capture and frame incrementing should stop.
Clicking Continue resumes with the next frame. If Quit is clicked after Abort,
scan will reset to X and Y offset values in use before AutoScan was started.
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Frame and Capture Menus
AutoScan
Continue
The CONTINUE button resumes capturing after it has been suspended.
Quit
The QUIT button halts AutoScan and returns to the Real-time/Image mode.
6.4.3 Scan Controls on the AutoScan Panel
X Separation
Center-to-center distance between successive captures in the X (horizontal) direction.
Range or Settings:
•
0 V through 440 V (the allowed range is dependent on the settings of the Scan size, X
offset, Y offset, and Rotation parameters on your SPM.
Y separation
Center-to-center distance between successive images in the Y (vertical) direction.
Range or Settings:
•
0 through 440 V (the allowed range is dependent on the settings of the Scan size, X
offset, Y offset, and Rotation parameters on your SPM.
Units
Selects whether X and Y separation are in Volts (V) or Metric distance units.
Range or Settings:
•
Volts—Separation units are in volts.
•
Metric—Separation units are in metric units of distance (nm, µm,).
6.4.4 Auto Controls in the AutoScan Panel
Pattern
Selects the geometrical arrangement of the images acquired.
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Frame and Capture Menus
AutoScan
Range or Settings:
•
Square—Acquires a square pattern of images with the number of images on a side
equal to the Capture number. Specify spacing between columns by the X separation
and spacing between rows by the Y separation.
•
Linear—Acquires images in a line (not necessarily horizontal or vertical) with the X
and Y separations specifying the X and Y displacements between subsequent image
centers.
Note:
The linear array can be oriented diagonally.
Note:
Square patterns are acquired by row (horizontal, X separation), and then by
column (vertical, Y separation) order.
Example of Using the Linear Parameter
For example, auto scanning a square pattern with the Capture number set to 3 would acquire nine
images in the order shown in Figure 6.4b. The first image captured is the left- and top-most frame
for the linear array.
Figure 6.4b Square Patterns
1
2
3
4
5
6
7
8
9
The X and Y offsets on the Real-time / Scan Controls panel define the center of the scan pattern.
The X and Y offsets define the center of the square when the Pattern parameter is set to Square
(the center of frame 5 in the example pattern). When the Pattern parameter is set to Linear, the X
and Y offsets define the center of the array.
Capture Number
Controls the number of images per side (for Square patterns), or the number of images per line (for
Linear patterns). This represents the square root of the total number of images captured for square
patterns.
Range or Settings:
•
Rev. C
2 to XX. The number of images captured depends on the settings of the Scan size, X
offset, Y offset, and Rotation parameters on the appropriate STM or AFM control
Command Reference Manual
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Frame and Capture Menus
AutoScan
panel. The number of images captured may also be limited by the space available in the
Capture directory.
Capture Pre-lines
Sets the amount of image frame to be scanned before capturing each image, expressed as a
percentage of the frame lines. For example, if 75 percent is entered, the probe will scan threequarters of the frame lines before beginning a capture. (For a scan frame having 256 Lines, this
would be 192.) This allows the scanner piezo time to stabilize between frame offsets, improving
image quality.
Range or Settings: 0—100 percent
Capture direction
Direction of scan while capturing images. Capture direction is maintained for all capture frames,
regardless of Capture number or Capture pre-lines settings.
Range or Settings:
•
Up or Down.
Example of Using the Capture Direction Parameter
To capture a series of four, adjacent 1-micron scans with a "D" head arranged in a square pattern,
you would set the Scan size to 1000 nm, then access the Auto Scan command. In the Auto Scan
panel you would set the Pattern item to Square, the Capture number to 2 (2 x 2 = 4 total
images), and the X and Y separation parameters to 1000 nm. Finally, click on the Start button to
begin data acquisition. To provide a half-frame settling period between captures, set the Capture
pre-lines parameter to 50 percent.
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Capture Plane
6.5
Capture Plane
The Capture Plane command captures data from the current scan and calculates a best-fit plane for
the data. The best-fit plane defines the plane for lithographic operations and to level captured real
time images.
Note:
For details on Lithographic operations, see Support Note 327,
NanoLithography.
6.5.1 Capture Plane Control Monitor
The control panel is visible, but changing a parameter postpones the data capture until the scan has
regained the beginning of the next frame.
Changing any control panel parameter or invoking the Offset or Zoom functions within the current
frame postpones the Capture operation until the scan regains the beginning of the next frame.
Note:
6.6
Use the Capture Plane command to define the plane of the sample surface
prior to lithographic operations. Lithographic operations require the tip to be at
a uniform distance from the sample surface to produce consistent effects on the
sample surface.
Capture Withdraw
The Capture Withdraw command captures data being scanned and withdraws the tip upon
completion of the capture.
Figure 6.6a Capture Withdraw Menu
Select to
Capture then
Withdraw.
A prompt appears to show the process (See Chapter 6.6b).
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Frame and Capture MenusFigure 6.6b Capture and Withdraw Prompt
Capture Calibration
6.7
Capture Calibration
The Capture Calibration command stores image data for future use with the Head
Autocalibrate command in the Offline/Utility menu. Images may be captured
individually or in groups to calibrate: (1) sensitivities and deratings;
and, (2) coupling between the slow and fast scan wave forms.
The entire set of twelve images required to calibrate the head or scanner may be captured
automatically.
Note:
The system must be in single image mode with the Interleave mode
set to Off to capture calibration images.
Refer to the following sections on Capture Calibration:
134
•
Capture Calibration Panel Section 6.7.1
•
Parameters and Buttons in the Capture Calibration Panel Section 6.7.2
Command Reference Manual
Rev. C
Frame and Capture Menus
Capture Calibration
6.7.1 Capture Calibration Panel
The Capture Calibration panel allows to name, select and capture the calibration images (See
Figure 6.7a).
Figure 6.7a Capture Calibration Panel
Capture Calibration
6.7.2 Parameters and Buttons in the Capture Calibration Panel
Filename prefix
Defines the name prefix assigned to the calibration images. The default name is "calibrat" but any
name up to eight characters in length can be entered.
cxx
Selects scan with 45° rotation to be used to calculate the X coupling terms.
cyy
Selects scan with 45° rotation to be used to calculate the Y coupling terms.
dxx
Selects scan with 19° rotation to be used to calculate the X coupling-derating terms.
dyy
Selects scan with 71° rotation to be used to calculate the Y coupling-derating terms.
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Capture Calibration
sfx
Selects scan with no rotation to be used to calculate the X fast sensitivity.
sfy
Selects scan with 90° rotation to be used to calculate the Y fast sensitivity.
ssx
Selects scan with 90° rotation to be used to calculate the X slow sensitivity.
ssy
Selects scan with 0° rotation to be used to calculate the Y slow sensitivity.
dfx
Selects scan with 0° rotation to be used to calculate the X fast derating.
dfy
Selects scan with 90° rotation to be used to calculate the Y fast derating.
dsx
Selects scan with 0° rotation to be used to calculate the X slow derating.
dsy
Selects scan with 90° rotation to be used to calculate the Y slow derating.
Withdraw when completed
Acts similar to the Capture Withdraw command by capturing then withdrawing the tip after
capturing an image.
Quit (button)
Ends the Capture operation.
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Capture Calibration
Capture(button)
The CAPTURE button photographs the selected image(s) and stores them with the name defined in
the Filename prefix field. The extensions "sfx", "sfy", "ssx", through "dyy" will be appended to the
files. A panel similar to the one shown in Figure 6.7b appears on the screen during the Capture
operation.
Note:
The panel items change according to the parameter to be calibrated (i.e., y
offset or x offset changes).
Figure 6.7b Capture Control Panel
Capturing at...
Defines the calibration image being captured.
Amplitude Setpoint
Adjusts the voltage applied in the Z direction for changes to the captured image.
Adjust Y Offset (Up) (Down) or Adjust X Offset (Left) (Right)
This item appears when capturing images required to calibrate the slow-fast coupling parameters.
When the scan required to calibrate the X slow-fast coupling is captured, the Y scan is shut off, and
this item is displayed as shown in the panel. When the scan required to calibrate the Y slow-fast
coupling is captured, the X scan is shut off and this item reads ADJUST Y OFFSET (UP) (DOWN).
In either case, the Left / Right or Up / Down buttons should be used to align the scan to features on
the sample.
Skip
Delays the Capture operation until the next scan. Exercise this option if an anomaly appears in the
current scan.
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Capture Filename
Abort
Terminates the Capture operation.
Hints for Optimizing the Capture Commands
6.8
•
The file name suffix appended to the file name is specific to the calibration operation
performed with the Autocalibrate command in the Utility menu (Off-line/Utility).
•
The Capture directory will be checked for conflicting file names before the Capture
operation begins.
•
The voltage applied during the Capture operations are fractions of the Piezo cal
voltage in the microscope list. By reducing the Piezo cal voltage, something other than
the maximum scan voltage can be used to calibrate the piezo. In most cases the Piezo
cal parameter should be set to 440 volts.
•
Some items in the Capture Calibration list will not be selectable for heads that do not
allow rotation.
•
The status bar reflects the status of the Capture operation when the Capture
Calibration command is running. To allow time for the scan to settle, two images are
skipped before the calibration image is captured.
•
A two-dimensional calibration standard must be used, and it must be aligned with X and
Y scan directions. The Scan angle parameter in the control panel should be set to 0
degrees.
Capture Filename
The Capture Filename command assigns file names to captured files. File names may include a
user-defined name and/or date-time stamp.
The Capture Filename panel appears on the Control Monitor allowing a new file name and note to
be entered (See Figure 6.8a).
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Capture Filename
Figure 6.8a Capture Filename Panel
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Frame and Capture Menus
Capture Filename
Filename
Allows a custom filename to be appended to captured images. Enter the name in the Name
field.The specified filename must be DOS compatible. The filename may now be up to 32
characters in length. A three-digit extension will be appended to the file name. The extension is
sequentially numbered after each image is captured.
Note:
If an extension is specified as part of the file name, the labeling will begin with
the specified extension number.
The file name command checks for conflicts with existing files. The numerical extension appended
to the file increments to avoid conflicts.
Date / Time stamp
The filename assigned to the captured file results from the month/day/hour/minute the file was
captured. Format: MMDDHHMM.xxx
Use Note
Select to add a note to the captured file.
No Note
Deselects the option to add a note to the captured file.
Note Field
Field to add a message to the captured file.
OK
Quits the operation and saves the specified filename selection.
Capture
Resumes capturing.
Cancel
Quits the operation without saving changes to the filename selection.
Example
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Frame Commands
Specify the file name "IC.023" to continue numbering the integrated circuit data files with the
extension 023. If IC.023 already exists, the new file will be given the next available extension, e.g.,
.024.
6.9
Frame Commands
6.9.1
Up
The Up command restarts the Real-time scan at the bottom of the frame.
Note:
The Up command can be used to view an entire Real-time frame as quickly as
possible. When the Scan rates are low, it can take a fairly long time to scan an
entire frame.
Example
With the Scan rate set to 0.5 Hz and the Number of samples set to 512, it can take over 17 minutes
to capture a single image. Using the Up and Down commands will allow you to go right to the start
of the frame and not have to wait for the previous frame to end.
6.9.2 Down
The Down command restarts the Real-time scan at the top of the frame.
Note:
The Down command can be used to view an entire Real-time frame as quickly
as possible. When the Scan rates are low, it can take a long time to scan an
entire frame.
6.9.3 Reverse
The Reverse command switches the direction of the Real-time scan.
6.9.4 Line
The Line Frame command allows Frame Up/Down to be initiated arbitrarily from any designated
line in the scan. Line “0” is the bottommost line in the scan.
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Frame Commands
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Chapter 7
Microscope Menu
The NanoScope system accommodates a wide range of SPM parameters that are saved in a file and
interchanged. The commands in the Microscope menu allow microscopes with different Profiles
(e.g., scan settings or tips) to be selected and calibrated then stored for later use.
Note:
Changes made with any command resets the Real-time mode.
This chapter discusses the following Microscope menu items:
Rev. C
•
Profile Section 7.1
•
Scanner Section 7.2
•
Microscope/Calibrate Section 7.3
•
Calibrate/Scanner Section 7.4
•
Calibrate/Detector Section 7.5
•
Calibrate/Z Section 7.6
•
Tapping Engage Section 7.7
•
Leakage (STM and EC STM Only) Section 7.8
•
Offset (STM Only) Section 7.9
•
Sensitivity Calibration Section 7.10
•
Auto Gain Adjust Section 7.11
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Microscope Menu •
Reset Section 7.12
Profile
•
7.1
Replace Tip (MM AFM Only) Section 7.13
Profile
The Profile command in the Microscope menu works with the Microscope Select
command (Real-time/DI/Microscope Select) to configure the microscope for specific
imaging modes (e.g., Contact mode, Tapping mode or STM).
Note:
The Profile command is similar to the Microscope/Settings
command used in earlier software versions.
A Profile is a file that includes all the Real-time parameter settings. There are two copies
of each Profile, a master copy and a temporary copy. The master copy can only be
modified by selecting the SAVE AS MASTER button and accessing the Save as Master
Profile panel.
The temporary copy is updated whenever the user exits the software or enters Off-line
mode. Access the temporary copy using the LOAD button. Once the Load button is
selected, the Master Profile overwrites the temporary copy.
Refer to the following sections on using the Profile functions:
•
Profile Select Panel Section 7.1.1
•
Enabling Profile Commands Section 7.1.2
7.1.1 Profile Select Panel
In the Microscope menu, select Profile to access the Profile Select panel (See Figure
7.1a).
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Profile
Figure 7.1a Profile Select Panel
Profile Select
!Tapping AFM
The Profile Select panel includes a two-column window and command buttons. In the window, the
left column names the profile description for reference.
The right column lists the corresponding file name for the Profile. The file includes settings for each
Profile (e.g., parameter values, display and placement of panels).
The Profiles marked with an exclamation mark (!) designate read only master files and can not be
modified by the user (See Figure 7.1a).
Note:
Changing the Master Profile File Name to Contact, STM, or Tapping also
changes the Microscope Mode setting in the Other Controls panel.
Once changes are made, they may be easily saved to the Profile, then recalled later. This avoids any
need for readjusting parameters each time the microscope is switched to a new imaging mode.
Buttons on the Profile Select Panel
The buttons allow for loading the Profile, including a description of the file, saving the file in the
SPM/Equip directory, deleting the file or exiting from the Profile command.
Load
The LOAD button loads the selected temporary copy of the Profile file from the di/SPM/par
directory and sets panels and setting parameters to their preset values. Select Profiles with the
mouse from the scroll bar list on the Profile Select panel.
Note:
If a different scanner is being used along with the new microscope profile, use
the Real-time/Microscope/Scanner option to install the appropriate scanner
file. For details on Scanner selections, see Section 7.2).
Describe
The DESCRIBE button accesses the Edit panel to enter the file name description (i.e., the left
column description in the Profile Select panel). The description attaches a user-defined note to each
profile for easy identification. Descriptions may be up to 40 characters in length (See Figure 7.1b).
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Figure 7.1b Profile Edit panel
Microscope Menu
Profile
Select OK to incorporate the description in to the profile .
Load Master
The LOAD MASTER button loads a Master Profile from the D:/SPM/PAR directory,
which acts as a template and overwrites the temporary copy of the Profile of the same
name. Selecting the LOAD MASTER button accesses the Delete Confirm panel (See
Figure 7.1c).
Figure 7.1c Delete Confirm Panel
Save As Master
The SAVE AS MASTER button saves the Profile as a Master Profile. The new file name
appears in the Profile Select panel (right column) and saves a preset file in the d:/
directory.
Note:
The system also saves a temporary copy of the Master Profile.
In the Save Master Profile panel, enter the Name in the Name field
(See Figure 7.1d).
Figure 7.1d Save Master As Panel
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Profile
Note:
If a previously used Name is entered, the old Profile will be updated.
Select the OK button to enter the description and corresponding file name to the Master Profiles.
Delete Master
The DELETE MASTER button deletes a Master Profile from the Profile Select panel and the D:/
SPM/PAR directory.
Cancel
The CANCEL button exits the Profile Select panel (or/and any changes) and returns to the Real-time
menus.
7.1.2 Enabling Profile Commands
Some profiles may appear disabled (i.e., greyed) in the Profile Select panel. This is due to the
equipment restrictions for this profile that are set up in the *.pan files. Locate the *.pan files in your
EQUIP directory and view the allowable configurations that enable viewing the profile.
To view the restrictions, complete the following:
1. Locate the EQUIP directory in Windows Explorer (e.g., c:\spm\equip).
2. Select the profile name (e.g., MFM.pan).
3. Locate the restrictions at the top of the profile.
4. To view the profiles in the Profile Select panel, enable these configurations.
Example: MFM.pan file
Restrictions:
Extender = Quadrex
Microscope = D3000
Therefore, in order to view the MFM profile on the Profile panel, you must be on a D3000
microscope configured with a Quadrex extender.
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Menu
7.2 Microscope
Scanner
Scanner
Use the Scanner command to select a scanner calibration file. The Microscope/Scanner
option displays the Scanner Select panel, which lists all available scanner files located within
SPM/EQUIP directory that are compatible with the selected microscope configuration.
The SPM/EQUIP directory contains separate parameter files for each microscope and scanner.
Files having an ".eqp" extension contain information about your microscope hardware and
configuration. Files having a ".scn" extension contain information for a specific scanner. For
example, if you operate a MultiMode SPM with a J scanner, there should be a MM.EQP file for
the microscope base, and a XXXXJ.SCN file for the scanner (i.e., where xxxx is the serial
number of the scanner).
To select a scanner listed in the SPM/EQUIP directory, open the Scanner Select panel. The
scanners are listed alphabetically and are selected using the mouse (See Figure 7.2a).
Note:
If a required scanner file is not listed, its *.scn file needs to be added to
the SPM/EQUIP directory manually.
Figure 7.2a Scanner Select Panel
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Microscope/Calibrate
7.3
Microscope/Calibrate
The Calibrate menu provides access to the scanner calibration and signal gains. The Scanner and
Z submenus allow the scanner calibration parameters to be viewed and changed. The Detector
submenu allows various signal sensitivity and polarity settings to be viewed and changed.
The calibration parameters for the heads and scanners purchased with the instrument are set prior to
shipment. Calibration parameters for heads and scanners purchased after installation can be loaded
directly from the disk shipped with these added parts.
Some parameters appear on panels according to the microscope selected (Real-time/DI/
Microscope Select) and the microscope profile settings (Real-time/Microscope/Profile); however,
every attempt has been made to include all parameters, including some from earlier software
versions.
ATTENTION:
Changes made to parameters in any of the Calibrate panels, immediately affects the
operation of the microscope.
The parameters are saved in the appropriate microscope parameter file after selecting the OK button
to exit the panel.
Note:
All Calibrate parameters can only be changed by typing in a numeric value.
Unlike parameters in other windows, it is not possible to change the values by
scrolling the mouse OR incrementing with the arrow keys on the keyboard.
See also: Off-line/Utility menu: Auto calibration command.
7.3.1 Calibrate Submenu Commands
In the Microscope menu, select the Calibrate command to access the submenu items (See Figure
7.3a).
Figure 7.3a Microscope/Calibrate Submenu
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Microscope
Menu
7.4
Calibrate/Scanner
Calibrate/Scanner
For optimizing the scanner, parameters set the sensitivity, applied voltage, limits on scan
rate, etc. for specific scanner types. The parameters vary by the scanner serial number
entered.
The Scanner command accesses the Scanner Calibration panel (See Figure 7.4a).
Refer to the following Calibrate/Scanner sections:
•
Buttons on the Scanner Calibration Panel Section 7.4.1
•
Parameters in the Scanner Calibration Panel Section 7.4.2
Figure 7.4a Scanner Calibration Panel
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Calibrate/Scanner
7.4.1 Buttons on the Scanner Calibration Panel
Ok—The OK button exits the Calibrate/Scanner command and saves the changes made to the
parameters.
Print— Accesses the Print panel, which allows printing of scanner calibration parameters on the
system printer. Once parameters are satisfactorily set, it will prove helpful to print a copy of the
parameters list and store it with the scanner as a future reference. Note that some parameters need
to be altered slightly as the scanner ages.
7.4.2 Parameters in the Scanner Calibration Panel
The heads and scanners are factory calibrated. The values for this item are entered into the
calibration panels for all heads and scanners shipped with the system. Sensitivity values are listed
on the back of the head or scanner.
Following are parameters for calibrating typical scanners:
X fast sens
Sets the piezo deflection per volt when the fast scan waveform is applied to X-axis electrodes (as
when the Scan angle parameter in the Scan Controls panel is set to 0.00 degrees).
Table 7.4a Typical Parameter Values (nm/V)
Scanner
X fast sensitivity
"A"
2.00
"D"
"E"
35.0
"G"
30.0
200
"J"
300
X fast derate
Sets the rate of decrease in the X fast sensitivity as the fast scan voltage applied to the X-axis is
reduced.
Table 7.4b Typical Parameter Values
Scanner
X fast derating
"A"
0.00
"D"
0.020
"G"
0.20
"J"
0.25
X slow sens
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Microscope Menu
Calibrate/Scanner
Defines the deflection in nanometers produced in the piezo per volt applied when the slow scan
waveform is applied to the X electrodes (as when the Scan angle parameter in the Scan Controls
panel is set to 90 degrees).
Table 7.4c Typical Parameter Values
Scanner
"A"
X slow sensitivity
Note:
NA
"D"
NA
"G"
300
"J"
400
The values listed in the table are typical values; the sensitivities of individual
scanners often vary.
X slow derate
The rate of decrease in the X sensitivity when the slow scan voltage applied to the X electrode is
reduced from the maximum.
Table 7.4d Typical Parameter Values (nm/V2)
Scanner
"A"
X slow derating
0.00
"D"
0.020
"G"
0.35
"J"
0.45
Xs-Xf coupling
Defines the degree of coupling between the slow and fast scan waveforms when they are both
applied to the X electrode (as when the scan angle parameter in the control panel is set to a nonorthogonal angle).
Values are in units of nanometers/volt/volt.
Note:
This item has no effect if the Scan angle parameter in the Scan Controls panel
is set to 0, 90, 180, or 270 deg.
Note:
This number is defined by the Off-line/Utility/Auto calibration command.
Xs-Xf coup der
The Xs-Xf coupling derate compensates for the decrease in the X coupling between the slow and
fast waveform when the fast-scan voltage applied to the X electrode is reduced from the maximum
(e.g., when the scan is rotated).
Values are in units of picometers/volt/volt/volt.
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Calibrate/Scanner
Note:
This item has no effect if the Scan angle parameter in the Scan Controls panel
is set to 0°, 90°, 180°, or 270 degrees.
Note:
This number is defined by the Off-line/Utility/Autocalibration command.
Xs-Yf coupling
Xs-Xf coupling defines the degree of coupling between the slow X waveform and the fast Y
waveform. The fast Y waveform enhances the effect of the slow waveform applied to the Y axis.
This item compensates for that effect.
Values are in units of nm/V3.
Note:
This number is defined by the Off-line/Utility/Autocalibration command.
Xs-Yf coup der
The Xs-Yf coupling derate compensates for the decrease in coupling between the slow X and the
fast Y waveforms when the fast-scan voltage applied to the Y electrode is reduced from the
maximum.
Values for the heads and scanners are in units of pm/V3.
Note:
This number is defined by the Off-line/Utility/Autocalibration command.
Fast mag0, Fast mag1, Fast arg
These are correction factors which improve the linearity of the fast-scan waveform.
Table 7.4e Typical Values for Nonlinear Correction Factors
Scanner Type
A
D, E
G
J
Note:
Rev. C
Fast mag0
Fast mag1
Fast arg
0.00
0.00
1.00
0.75
0.35
2.50
1.35
0.65
2.75
1.3
0.80
3.65
A patented, nonlinear ramp is applied to the piezo to produce linear scans. A
linear voltage ramp applied to many piezo scanners will not generate a linear
response. The scan waveform applied to the piezo consists of a linear ramp
added to a decaying exponential of varying magnitude and argument.
The parameters Fast mag0, Fast mag1, and Fast arg define the magnitude and
argument of the exponential. Fast arg determines the exponential decay of the
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Microscope Menu
Calibrate/Scanner
nonlinear term while Fast mag0 and Fast mag1 determine the amount of the
exponential term to use and how that amount varies with Scan size.
Fast arg derate
The Fast arg derate creates fine adjustment of the Fast arg parameter as a function of the scan
size. The value of the argument for a given scan size is as follows:
arg – ( Piezo cal – scan size ) × arg derate
Therefore, the value of the argument used is actually arg when the scan size is equal to the Piezo
cal, and is reduced for smaller scan sizes.
Note:
This parameter is used only under very special circumstances and should
normally be set to 0.00 (zero).
Fast cal freq
Fast cal freq is the frequency of the slow waveform when the scanner was calibrated.
Range and Settings:
•
2.44 Hz (typical value)
Note:
This number is assigned by the Off-line/Utility/Autocalibration command.
Piezo cal
Piezo cal is the voltage used to calibrate the head or scanner.
Range and Settings:
•
I V—440 V.
Note:
For large area scanners this value will usually be 440 V.
Allow rotation
Allow rotation allows the scan direction to be rotated relative to the sample by using the Scan
angle parameter on the Scan Controls panel.
Range and Settings: Allow or Disallow
Note:
154
Only the STM "A" and "D" heads, which have front-mounted tips, require the
Disallow setting. Scan rotation is allowed for all other STM heads and all AFM
scanners.
Command Reference Manual
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Microscope Menu
Calibrate/Scanner
Minimum scan rate
The Minimum scale rate sets a lower limit for the Scan rate parameter on the Scan Controls panel.
Range and Settings:
•
0.001—10 Hz; default = 0.100 Hz
Y fast sens
Y fast sens defines the deflection in nanometers produced in the piezo per volt applied when the
fast scan waveform is applied to the Y electrodes (as when the Scan angle parameter in the control
panel is set to 90.0 degrees).
Table 7.4f Typical Values (nm/V)
Scanner Type
Y fast sensitivity
"A"
2.20
"D"
30.0
"G"
200
"J"
300
Y fast derate
Y fast derate is the rate of decrease in the Y sensitivity when the fast scan voltage applied to the Y
electrode is reduced from the maximum.
Table 7.4g Typical Values (nm/V2)
Scanner
Y fast derating
"A"
0.00
"D"
0.020
"G"
0.20
"J"
0.25
Y slow sens
Y slow sens defines the deflection in nanometers produced in the piezo per volt applied when the
slow scan waveform is applied to the Y electrodes (as when the scan angle parameter in the control
panel is set to 0.00 degrees).
Table 7.4h Typical Values (nm/V)
Scanner type
Y slow sensitivity
"A"
2.20
"D"
40.0
"G"
300
"J"
400
Y slow derate
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Calibrate/Scanner
Y slow derate is the rate of decrease in Y sensitivity when the slow scan voltage waveform applied
to the Y electrode is reduced from the maximum.
Table 7.4i Typical Values (nm/V2)
Scanner type
Y slow derating
"A"
0.00
"D"
0.020
"G"
0.35
"J"
0.45
Ys-Yf coupling
Ys-Yf coupling defines the coupling between the slow and fast waveform when both waveforms
are applied to the Y piezo electrode (e.g., when the scan is rotated).
Values are in units of nm/V2.
Note:
This parameter has no effect if the Scan angle parameter in the Scan Controls
panel is set to 0, 90, 180, or 270 degrees.
Note:
This number is defined by the Off-line/Utility/Autocalibration command.
Ys-Yf coup der
Ys-Yf coupling derate compensates for the decrease in the Y coupling between the slow and fast
waveform when the fast scan voltage applied to the Y electrode is reduced from the maximum (e.g.,
while rotating the scan). Values for heads and scanners are in units of pm/V3.
Note:
This item has no effect if the Scan angle parameter in the Scan Controls panel
is set to 0, 90, 180, or 270 degrees.
Note:
This number is defined by the Off-line/Utility/Autocalibration command.
Ys-Xf coupling
Ys-Xf coupling defines the degree of coupling between the slow Y waveform and the fast X
waveform.
Values for scanners are in units of nm/V2.
Note:
The fast X waveform enhances the effect of the slow waveform applied to the Y
axis. This parameter compensates for that effect.
Note:
This number is defined by the Off-line/Utility/Autocalibration command.
Ys-Xf coup der
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Calibrate/Scanner
Ys-XF coupling derate compensates for the decrease in the coupling between the slow Y and the
fast X waveforms when the fast-scan voltage applied to the X electrode is reduced from the
maximum (e.g., when the scan is rotated).
Values for scanners are in units of pm/V2.
Note:
This number is defined by the Off-line/Utility/Autocalibration command.
Slow mag0, Slow mag1, Slow arg
These items are correction factors which improve the linearity of the slow-scan waveform.
Table 7.4j Typical Values for Nonlinear Correction Factors
Scanner Type
A
D, E
G
J
Note:
Slow mag0
Slow mag1
Slow arg
0.00
0.00
1.00
0.75
0.35
2.50
1.35
0.60
2.75
1.3
0.80
3.65
A patented nonlinear ramp is applied to the piezo to produce linear scans. A
linear voltage ramp applied to many piezo scanners will not generate a linear
response. The scan waveform applied to the piezo consists of a linear ramp
added to a decaying exponential of varying magnitude and argument. The
parameters Slow mag0, Slow mag1, and Slow arg define the magnitude and
argument of the exponential. Slow arg determines the exponential decay of the
nonlinear term while Slow mag0 and Slow mag1 determine the amount of the
exponential term to use, and how that amount varies with Scan size.
Slow arg derate
Slow arg derate makes fine adjustment of the Slow arg parameter as a function of the the scan
size. The value of the argument for a given scan size is as follows:
arg – ( Piezo cal – scan size ) × arg derate
Therefore, the value of the argument used is actually arg when the scan size is equal to the Piezo
cal, and is reduced for smaller scan sizes.
Note:
This parameter is used only under very special circumstances and should
normally be set to 0.00 (zero).
Slow cal freq [mHz]
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Slow cal freq is the frequency of the slow scan waveform used when the selected scanner was
Microscope Menu
Calibrate/Scanner
calibrated. The units are millihertz (i.e., thousandths of Hertz). This value represents the
frequency of the slow waveform when the head or scanner was calibrated.
Range and Settings:
•
4.77 mHz represents a typical value.
Note:
This number is in millihertz. This number is calculated by dividing the
Fast cal freq by the number of data points (or scan lines), then dividing
the result by two.
Note:
This number is assigned by the Off-line/Utility/Autocalibration
command.
Rounding
Rounding defines the percentage of the fast scan time not captured or shown on the Display
Monitor. This function allows mechanical systems to stabilize after the scan direction changes.
This function distorts the linearity corrections made on the head or scanner.
Range and Settings:
•
0 - 50%
Note:
This parameter should be zero for long, slow scans and increased only for
short, fast scans.
Note:
This parameter should be set to 0.00 when using the LFM.
Orthogonality
Orthogonality is the angular value added or subtracted to achieve an X-Y axis orthogonality
of 90.00 degrees.
Range and Settings:
•
± 10.0 deg
Note:
158
X- and Y-axis piezo crystals cannot always be assembled at precisely 90
degrees to one another. This parameter is designed to compensate for
whatever orthogonality error exists in the assembled scanner.
Command Reference Manual
Rev. C
7.5
Microscope Menu
Calibrate/Detector
Calibrate/Detector
The Microscope/Calibrate/Detector panel allows the gain, polarity and units of some
signals to be viewed and /or changed. The standard setting for most signals is 1.0.
CAUTION:
Changing the sensitivity settings changes your data! An incorrect polarity setting
can affect feedback operation.
Note:
ATTENTION:
Listed items vary depending upon the configuration of the microscope.
In version 4.42 and later software versions, units and polarity are entered directly
by the user and conveyed to other panel parameters. For example, Deflection sens
is normally entered in units of volt-per-volt (Volt/Volt).
In version 4.42 and later software, however, the user also has the option of entering
whatever units they wish to use. Units should be entered directly with the numeric value
(e.g., "2.54 Volt/Volt"). To set polarity, simply enter a positive value or insert a minus sign
("-") before the value to make it negative. Positive values are generally assigned to all
normal settings (i.e., normal motor direction, normal piezo polarity). Negative values are
generally assigned to abnormal settings (e.g., reverse polarized scanners, reverse motor
direction, etc.).
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Microscope Menu
Calibrate/Detector
7.5.1 Detector Calibration Panel
Figure 7.5a Detector Calibration Panel
Buttons on the Detector Calibration Panel
Ok
The OK button exits the Detector command and saves changes made to parameters.
Print
The PRINT button accesses the Print panel, which allows printing of Detector parameters on the
system printer.
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7.6
Microscope Menu
Calibrate/Z
Calibrate/Z
The Calibrate/Z allow to set the Z-axis piezo and leadscrew motor (MultiMode only)
Refer to the following sections:
•
Z Calibration Panel Section 7.6.1
•
Buttons on the Z Calibration Panel Section
•
Parameters in the Z Calibration Panel Section
7.6.1 Z Calibration Panel
Parameters are microscope and scanner-type dependent.
Figure 7.6a Z Calibration Panel
MultiMode
Only
Buttons on the Z Calibration Panel
Ok
Exits the Z Calibration command and saves changes made to parameters.
Print
Accesses the Print panel, which allows printing of Z Calibration parameters on the system
printer.
Parameters in the Z Calibration Panel
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Microscope Menu
Calibrate/Z
Serial number
The serial number is visible upon entering the panel.
Zscan sens
Z scan sens is the sensitivity of the piezo tube in the Z direction. The values are in units of
nanometers of extension per volt applied to the electrodes.
Table 7.6a Typical Sensitivity Values (nm/V)
Scanner type
Z Scan
sensitivity
Note:
"A"
1.50
"D"
9.00
"E"
7.00
"G"
12.5
"J"
12.5
Almost all SPM heads produced by Digital Instruments require positive
Zscan sens values. A positive Zscan sens value extends the piezo element with
positive voltage. In very rare instances, a Z piezo may exhibit reverse polarity
properties (i.e., a positive voltage retracts the piezo element.) In these
instances, a negative Zscan sens value should be entered.
Contact Digital Instruments/Veeco Metrology Group for more information on the Z scan sens.
Current Sens. [STM mode only]
Current Sens. specifies the current sensitivity in STM mode.
Range and Settings:
•
Defaults to 10.00 nA/V (i.e., appropriate gain for standard STM pre-amp).
Retracted [Extended] offset der
Derating applied to the Z scan sensitivity as the Z piezo is offset by fixed voltages. This parameter
corrects for Z-axis errors due to the piezo’s increased sensitivity at higher voltages, and is
expressed as a percentage of the scanner’s Z-axis voltage above-below zero.
Range and Settings:
•
0—100%
Suggested Values:
162
•
Retracted offset derating = 2.5 percent
•
Extended offset derating = 7 percent
Command Reference Manual
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Microscope Menu
Tapping Engage
Bias derate [mV/nA] (STM only)
Corrects for the bias voltage drop which exists in some STM preamplifiers used on the NanoScope.
This parameter only appears when an STM head is selected.
Range and Settings:
•
1 mV/nA for the standard preamplifier circuit
•
0 mV/nA for trans impedance low-noise preamplifier circuit
Note:
This item ensures the accuracy of the Bias voltage parameter on the Real-time
STM control panel.
For further instructions on calibrating offset deratings, see the Calibration chapter of your system
manual.
7.7
Tapping Engage
The Calibrate/Tapping Engage commands are designed to assist users in controlling key
parameters associated with surface engagement during TappingMode. In former software editions,
these parameters were not subject to operator control, being optimized for engagement speed and
tip safety under most conditions. By using the Calibrate/Tapping Engage panel, however, users
may minimize engagement times or tapping forces for specific conditions (e.g., TappingMode in
fluids, etc.).
CAUTION:
Adjustment of the Tapping Engage parameters can decrease engagement times during
TappingMode by speeding the tip’s travel to the surface and decreasing the number of test
probes. Although this may save time, it also endangers the tip. You should always default to
more conservative settings when in doubt; otherwise, you risk breaking tips.
7.7.1 Tapping Engage Panel
The Tapping Engage panel shown in Figure 7.7a illustrates recommended parameter values for
most conditions. These setting yield an engagement time of 20 - 40 seconds.
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Figure 7.7a Tapping Engage Panel
Microscope Menu
Tapping Engage
Setpoint values represent percentages of a setpoint established internally by the software
for engagement purposes (generally, about 90 percent of the tip’s free-air amplitude).
These values should not be confused with the Setpoint value indicated on the Feedback
Controls panel.
7.7.2 Parameters in the Tapping Engage Panel
Engage delta setpoint
Amount the setpoint is adjusted during each false engage test.
Note:
While in TappingMode, this tests for false engagement assist in
engaging the tip on the sample surface. Tests for false engagement
help to avoid artifacts produced by light scatter, fluid film damping,
etc. Therefore, a setting of 0.00 (no test for false engagement) is not
recommended.
Range and Settings:
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Tapping Engage
•
± 0—0.10 (default: 0.02) A value of 0.10 (corresponds to ±10%) is the recommended
maximum. If set to 0.00, the system will not test for false engagement.
Engage final delta setpoint
Percentage of setpoint value (internally set) to be used after tests for false engagement are
concluded. This is the amount of temporary "overdrive" used by the system to verify whether the
sample is, in fact, engaged by the tip. If this test is passed, the setpoint is restored to the last value
used during false engagement tests.
Range and Settings:
•
0.00—0.10 (corresponding to 0 to 10 percent)
Note:
This value is usually set equal to the Engage delta setpoint. It represents a
cumulative value which is eventually reached in a series of Engage delta
setpoint increments (rather than one, single test). For example, with an engage
delta setpoint of 0.02 and a final delta of 0.10, five extra tests will be run after
"engagement" to verify that the tip is actually on the surface (0.10 ÷ 0.02 = 5).
Note:
If problems persist with false engagement, set the Engage final delta setpoint
to a value that is 2-3 times the engage delta setpoint.
Engage test threshold
Slope value obtained by dividing the change in Z piezo voltage by the change in setpoint, which
ultimately represents an envelope within which engagement is detected.
Range and Settings:
•
100—1000 (default: 100)
Note:
Because changes in Z piezo voltage units occur approximately 200 times per
unit change of setpoint, slope values tend to be between
100—1000.
Note:
The higher the slope value, the greater the chance of "false engagement." Lower
values are recommended for most applications. Using much lower values may
reduce tip life.
Engage min setpoint [%]
Lowest allowable percentage of setpoint value (internally set) used during engagement,
representing the "last word" in tip-sample force. This value overrides other parameters determining
setpoint during engagement.
Range and Settings:
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Microscope Menu
Tapping Engage
•
10—90. (typical value: 25).
Note:
Lower values may endanger the tip and/or sample, as higher tip-sample forces
will be employed.
Note:
Higher values represent lower, more conservative tip-sample forces; however,
very high values will increase false engagements.
TM engage gain
Integral gain value used during TappingMode engagement. Once the surface is engaged, gain
values revert to those displayed on the Feedback Controls panel.
Range and Settings:
•
0.0100—10.00 (typical values: 0.5-2)
Hints for optimizing the TM Engage Gain
•
As TM engage gain is increased, the tip’s vertical velocity downward increases. This
parameter may be used to speed the engagement process and save time; however, if set
too high, the tip and sample may be damaged.
•
During engagement, gain values (Integral and Proportional) displayed on the
Feedback Controls panel are not utilized. Instead, the software sets its own integral
gain based on this parameter.
•
With normal (non-fluid) samples, higher values tend to accelerate engagement speed at
the cost of endangering tips and samples. Use of a higher gain may be recommended for
TappingMode scanning of hard samples in fluid; however, gain should be increased
cautiously.
•
Use of lower gain values will tend to increase engagement times; however, lower values
are recommended for soft, delicate samples where impact is to be minimized.
Sew tip
Controls use of sewing during the engagement process to detect the surface. Sewing consists of
moving the tip vertically with the Z piezo while lowering it toward the surface. If the surface
position is well known, Sewing may be triggered to save time.
Range and Settings:
•
Yes—Turns sewing on. This is the normal, default mode.
•
No—Turns sewing off.
Note:
166
Only used for testing purposes; typically results in a damaged tip.
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Microscope Menu
Tapping Engage
•
Triggered—Turns sewing on when the RMS amplitude reaches the specified Sewing
trigger value. The Triggered switch is used to protect tips and samples and to decrease
engagement time.
•
Ramped-Specifies the distance the motor travels toward the sample.
Sewing trigger [%]
Percentage of oscillation amplitude required to trigger sewing. This parameter is enabled only when
the Sew tip parameter has been set to Triggered. Default setting is 98; not recommended at values
less than 90.
Range and Settings:
•
1—100; default setting = 98.
Note:
Regardless of setting, this parameter may be overridden by the Trigger safety
parameter.
Trigger safety [for Dimension series microscopes only]
Minimum height above sample surface at which sewing is turned on. This parameter overrides the
Sewing trigger parameter.
Range and Settings:
•
ATTENTION:
0—100 µm; typical setting = 20 µm
To avoid damaging the tip or sample, the Trigger safety should be set to a value greater
than the height of the tip, or the maximum peak-to-valley distance of surface features,
whichever is greater. This parameter consists of a height above the surface as determined
during the Real-time/Stage/Focus Surface command.
Pre engage setpoint [%]
Used to set the setpoint of the tip prior to engagement by reducing the setpoint relative to the RMS
amplitude.
Range and Settings
•
50—100; default = 90.
Note:
The usable range of this parameter is generally from 85 to 95. This represents
the starting value for the engagement cycle (see beginning of this section).
Trig channel
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Only
active when the set top is set to ramped. The Trip channel specifies the data channel on
Microscope
Menu
Tapping Engage
which Trig threshold trigger. Trig channel choices will vary depending on the available inputs.
Possible settings include Off (which disables the Trigger function), Deflection, Amplitude and
Phase.
Trig threshold
Only active when the set top is set to ramped. The Trigger threshold is the change in value of
the trigger channel that will determine when the tip contacts the surface.
Range and Settings:
•
Dependent on selected channel.
Scan rate
Rate at which piezo extends in Z direction (toward surface). Very slow Scan rates (< 0.10 Hz)
may prove frustrating; the system completes the present scan before initiating parameter
changes.
Range or Settings:
•
Min. 0.010; maximum value depends upon Number of samples; normal: 5-10Hz.
Note:
Ramping under NT is limited to approximately 30 Hz at 512 samples per
line.
Ramp step
Specifies the distance the motor will travel towards the sample when trying to find the surface
(when Sew tip has been set to Ramped). This feature is used to increase the motor steps when
ramped sewing has been activated.
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Microscope Menu
Leakage (STM and EC STM Only)
7.8
Leakage (STM and EC STM Only)
The Leakage command measures any current leakage between the tip and the Y electrode on the
piezo tube of STM heads.
The Leakage test display appears on the Control Monitor:
Figure 7.8a Head Leakage Test Panel
As leakage tests are executed, the panel will display the results:
ATTENTION:
Quit the panel when a sufficient number of tests have been run.
Hints for Optimizing the Leakage Command
•
This command can only be executed if the head is withdrawn. Make sure the tip is not
touching the sample when this command is executed.
•
Null the preamplifier offset using the Real-time/Microscope/Offset command prior to
running this command; otherwise, a Y offset will appear doubly as leakage.
•
Select the Quit subcommand to exit the Leakage command.
•
Head leakage is usually caused by an excess of moisture buildup in the area where the
tip holder mounts to the piezoelectric scanner. This problem is greatest where etched
tips (which can have some residual salts from the etching process) are used.
•
If the measured leakage is greater than 0.2 to 0.5 nanoamps, then clean the area around
the tip holder with a cotton swab and alcohol.
Note:
Rev. C
Do not use more reactive solvents (i.e., acetone), as they will eat away the
protective coating applied to the piezo scanner and tip holder.
•
Head leakage can cause effects such as making the Z center voltage go off-scale when
the Scan size is increased past a certain point. This is caused by domination of the
tunneling current by the leakage current as the Y scan voltage increases.
•
Each pass takes 8 seconds.
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169
Microscope Menu
Offset (STM Only)
7.9
Offset (STM Only)
The Offset command measures the voltage offset of the STM head preamplifier when the tip is
withdrawn from the surface. This command allows the voltage offset to be measured and trimmed
to zero for standard preamps. Low-noise preamps and Tipview preamps are not adjustable.
The Offset Calibration Test panel appears on the Control Monitor, allowing the offset in the head
preamplifier to be nulled with the pot on the preamp board
(See Figure 7.9a).
Figure 7.9a Head Offset Calibration Test Panel
Note:
Execute only when the tip is withdrawn (use the Motor/Withdraw command
several times).
Note:
Unusually high offsets indicate that the tip is contacting the sample, that the
head is disconnected from the base, the microscope is disconnected from the
controller, or the controller is turned off or disconnected from the workstation.
See also: Real-time/Motor menu: Withdraw command. Real-time/Microscope menu: Leakage
command.
Procedure to Adjust Head Offset
To adjust the preamplifier offset of a head, you would make sure the system is withdrawn, so that
there are no high voltages applied to the head (using the Withdraw command several times).
Connect the desired head to the microscope and make sure the tip was well away from the surface.
Finally, after invoking the Offset command, adjust the head-offset potentiometer (accessible
through the hole in the cover of the head) until the reading is close to zero.
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Sensitivity Calibration
7.10 Sensitivity Calibration
The Sensitivity command measures the voltage offset of the STM head preamplifier when the tip is
withdrawn from the surface. The Sensitivity Calibration Test panel appears on the Control
Monitor, showing the sensitivity calibration (See Figure 7.10a).
Figure 7.10a Sensitivity Calibration Pane
7.11 Auto Gain Adjust
The Auto Gain Adjust command measures Integral Gain of STM head preamplifier when the tip is
withdrawn from the surface. The Auto Gain Adjustment panel appears on the Control Monitor,
displaying the measurements
(See Figure 7.11a).
Figure 7.11a Auto Gain Adjustment Panel
7.12 Reset
The Reset command renews the Microscope settings to the default parameters. If the controller is
turned off/on without restarting the software, this command needs to be executed.
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Microscope Menu
Replace Tip (MM AFM Only)
7.13 Replace Tip (MM AFM Only)
The Replace Tip command opens instruction panels when replacing a tip. The function of the
panels is to assist the user with the hardware knobs and levers to optimize the tip replacement.
Selecting the Replace Tip command accesses a series of Replace Tip prompts (See Figure 7.13a).
Figure 7.13a Replace Tip Prompt Panels
See also: Real-time/Stage /Replace Tip for Dimension series microscopes.
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Chapter 8 Vision Menu
This chapter describes the vision system hardware and software components for locating features
on sample surfaces using a video camera.
The vision system components discussed in this chapter include:
•
Vision Hardware: Section 8.1
•
Vision System Requirements: Section 8.2
•
Vision System Interface: Section 8.3
•
Vision Control Menu Command: Section 8.4
For additional automated functions of the Vision System, see the Automation Supplement Rev A.
8.1
Vision Hardware
The standard on-axis, high magnification optical system supplied with all Dimension series SPMs
is designed to align the probe with sample sites; however, these optics are unsuitable for conducting
wide-angle searches. Therefore, a second, wide-angle, low magnification camera is added (as an
option) to some microscopes for locating larger patterns with the Pattern Recognition option. The
low magnification camera is used to align wafers with the microscope stage and to perform other
wide-field tasks.
After large patterns are identified using the low magnification camera, the vision control system
switches to the microscope’s high magnification camera to zoom in on finer features. These finer
features are used to determine the wafer’s X-Y coordinate system and serve as reference points in
all subsequent navigation of the sample.
In Figure 8.1a the high magnification system shown on the left side of the SPM is supplied with all
Dimension series SPMs. Low magnification optics shown on the right side are supplied as a special
option.
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Vision Menu
Vision Hardware
Figure 8.1a Vision Hardware
High Mag Camera
(in rear)
SPM Head
Low Mag Camera
Illuminator
Illuminator
High Magnification Optics
Low Magnification Optics
8.1.1 Hardware Additions Requirements
Meteor Frame Grabber Board
The Frame Grabber board processes the output from up to four CCD (circuit cable devices) color
NTSC cameras residing in the microscope and sends it to the display for viewing.
Low Magnification Optics
An optional set of low magnification optics is added to the right dovetail. The field of view of these
optics is large enough (~8000 x 6500 µm) to handle the maximum wafer positioning error of the
autoloader (<1000 µm). The low mag optics are offset from the tip high mag optics by about 1.25
inches.
Illumination System
A computer-controlled illumination system is added. This allows the system to save light levels
during the macro teach process and restore them during the macro run process. The illumination
system consists of a single halogen bulb illuminating two fiber bundles, one for each set of optics.
The intensity of the bulb is controlled by a 6811 microprocessor. The 6811 communicates with the
PC and NanoScope software through an RS-232 serial port.
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Vision System Requirements
Miscellaneous Hardware
Several small system changes have been made to accommodate the vision system:
•
An Optical Standard is mounted to the right-rear of the chuck to provide a reference for
calibrating both sets of optics. Note that the image is optically inverted (negative) from
what is seen through the optics (See Figure 8.1b).
Figure 8.1b Optical Standard
8.2
•
The illumination optics are upgraded to improve the contrast of the high magnification
optics.
•
A hard stop is added to the zoom to improve the repeatability of the zoom.
Vision System Requirements
8.2.1 Recognizable Patterns
The Cognex vision control system is capable of recognizing high-contrast features having a
distinct, local appearance. These are referred to as “visual models”.
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Vision Menu
Vision System Requirements
Many wafers are etched with distinct marks to serve as reference points. Corners, contact pads,
trace intersections, etc. may all be used as visual models; however, they must be distinct from their
surroundings.
Examples of poor visual models include non distinct pads located within a field of identical pads;
wafer edges; parallel, identical traces, etc. Figure 8.2a shows one such example. Features within the
box in the left illustration might easily be confused with each other. Features within the box in the
right illustration are distinct from those immediately surrounding it.
Figure 8.2a Selection of Visual Model
Pattern
recognition
box
A good visual model should have few transitions between dark and light, and the transitions should
be far apart. T he model should have a distinct, local appearance that cannot be confused with any
other area nearby.
When teaching a model, the upper-right of the video display shows the position (X-Y) and size (XY) of the model, and the total pixels within the model. Model size is limited to 65535 pixels or less.
An error message is displayed if the model is 65536 pixels or greater. The optimum size of a model
is in the range or 75 to 200 pixels on a side. A model that is too large takes a long time to save and
load. A model that is too small requires a longer search time.
8.2.2 Illumination Control
Both the high magnification camera and the low magnification camera are equipped with on-axis,
fiber optic illumination supplied by the same halogen lamp. The halogen lamp’s intensity is
controlled by the Illumination software parameter. When a visual model is saved, the level of
illumination is saved along with it.
The illumination intensity is crucial to the ability of the vision control system to distinquish
features:
•
176
The lower the magnification, the lower the illumination intensity required. Too much
light at low magnification washes out features, making them impossible to see.
Conversely, higher magnification requires more light.
Command Reference Manual
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Vision Menu
Vision System Requirements
•
Illuminate features as brightly as possible without washing them out. You want features
to be imaged with adequate contrast against their backgrounds and reduced tonal
differences between one visual model and another.
8.2.3 Rotational Alignment of Features
The Cognex recognition system allows most features to be recognized within angular orientations
of ± 7.5 degrees. The robot employed with Dimension series SPMs is designed to locate samples
with an angular accuracy of ± 0.25 degrees. Therefore, rotation is normally not a problem with
automatically loaded samples. When manually loading samples, you can reduce rotational
alignment problems by ensuring that the samples are squarely positioned.
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Vision Menu
Vision System Interface
8.3
Vision System Interface
Figure 8.3a illustrates the Vision menu panels and parameters associated with typical MultiMode
and Dimension series microscopes. Additional parameters and menus appear for systems
configured with automated features (i.e., robot functions).
5696
Figure 8.3a Navigating in the Vision Menu
Executes:
"Intitialize
Vision
System"
Executes the
"AutoFocus"
Command
Accesses panel
to move the
stage and
"AutoFocus"
8.4
Vision Control Menu Command
From the Vision menu item, select Vision Control to display the Vision System Real Time
Control panel. The purpose of the Vision System Control panel includes
:
•
Adjusts parameters for the currently selected camera and monitor.
•
Assigns and recalls filenames for visual models and parameters.
Note:
178
On a Dimension series microscopes that include a stage and the pattern
recognition option, a number of additional parameters are available. See, The
Automation Supplement (Version 5.13) for details on the parameters associated
with automated systems.
Command Reference Manual
Rev. C
Vision Menu
Vision Control Menu Command
Refer to the following Vision Control sections:
•
Vision Control Panel: Section 8.4.1
•
Buttons on the Vision System Realtime Control Panel: Section 8.4.2
•
Parameters on the Vision System Real-time Control Panel: Section 8.4.3
•
Parms Submenu: Section 8.4.4
•
General Parameters: Section
•
AutoFocus Button [Auto Focus Parms Panel]: Section
•
Helpers Submenu on the Vision Control Panel: Section 8.4.5
8.4.1 Vision Control Panel
Figure 8.4a Vision Control Panel
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Vision Menu
Vision Control Menu Command
8.4.2 Buttons on the Vision System Realtime Control Panel
AutoFocus
Executes the Auto Focus command. If the stage is not initialized, you are informed of this condition
and given the opportunity to ABORT or RESUME (See Figure 8.4b).
Figure 8.4b Abort Prompt
Selecting the ABORT button discontinues Vision Control and returns you to the Real Time
environment (scan controls, channel controls, etc.). Selecting the RESUME button opens the Vision
Control panel, but any vision system functions that require stage motion (e.g., Camera selection,
MOVE STAGE button) do not operate properly.
Move Stage
The MOVE STAGE button accesses a panel allowing trackball stage control, stage control using the
panel buttons and direct camera control.
8.4.3 Parameters on the Vision System Real-time Control Panel
Camera—Defines the current camera selection and allows the user to select a different camera.
Range or settings: Low Mag. or High Mag.
Zoom—Shows the current zoom setting and allows the user to select a different zoom setting.
Range or settings: Low Zoom or High Zoom
Illumination—SHows the current illumination (light) level and allows the user to select a different
illumination setting.
Range or settings: 0 (min. light) - 100 (max. light).
Video Attenuation—Shows the current value of the video attenuation (hardware control over the
video signal strength similar to the “Brightness” knob on a TV set) and allows the user to change
the attenuation.
Range or settings: 0 attenuation is very bright - 100 attenuation (maximum) is very dark.
Hue—Controls the color value of the displayed image.
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Saturation—Sets the value of the color intensity.
Contrast—Enhances or degrades the contrast in the image.
Range or settings: 0 (min. contrast) - 255 (max. contrast)
Cursor—Defines the color of the main cursor. Also allows the cursor to be disabled.
Cursor Hole (pixels)—Sets the number of pixels open at the center of the cursor where the
horizontal and
vertical lines meet.
Target Cursor—Defines the color of the “target cursor”. The target cursor controls the color of the
box used to define models for pattern recognition.
8.4.4 Parms Submenu
The Parms pull-down menu on the Vision System Real-time Control panel provides access to
additional parameter panels.
Figure 8.4c Parms Submenu on Real-time Control Panel
General Parameters
The General Vision Parameters dialog box contains parameters for controlling vision paths and
general vision functions.
Note:
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All of the fields display, even if a particular parameter is not available.
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Figure 8.4d General Vision Parameters Dialog Box
Parameters on the General Vision Parameters Panel
182
•
Vision Debug
•
The Vision Debug parameter is a diagnostic tool for controlling the quantity of
information that is displayed in the Vision Debug box (Ctrl-Alt-V). The default value is
0 (no debug information). Increasing values cause more information to be displayed in
the Vision Debug box when commands are sent to the vision system.
•
Logger
•
The Logger parameter allows you to enable or disable the logging function. If enabled,
the Logger enters the vision errors in the Vision Debug file. If disabled, vision errors
are not logged.
•
IO Base Address—This field is obsolete.
•
Baseline Path
•
The Baseline Path parameter defines where the boot files for initializing the vision
system are located on the NanoScope hard disk. The default directory is
c:\spm\vision.
•
Visual Models Path
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•
The Visual Models Path parameter defines the path for loading and saving visual
models. The default path is c:\spm\vision\models.
•
Last Booted File—This field is obsolete.
•
Box Search Iterations
•
The Box Search Iterations parameter defines the maximum number of boxes around
the original search location which are allowed during a box search. A box search is
conducted during a look if 1) the visual model is not found at the initial search location,
and 2) the Box Search parameter is enabled for that look.
•
The default is 2 boxes, with options of 0 to 10 boxes.
•
With Box Search Iterations set to 1, the X-Y stage moves to obtain a series of images
with the centerpoints of the images forming a square box (in the X-Y plane) around the
original image center. The length of each side of the depicted box is twice the value of
the Box Size (pixels) parameter. See the example in Figure 8.4e.
•
The actual size of the box in microns depends on the camera, zoom, and the associated
calibration parameter (microns per pixel) as set in the Low Mag Optics or High Mag
Optics Parameters (See and ).
•
When the parameter Box Search Iterations is greater than 1, each successive box
increases in size such that the length of the side increases by:
•
2 × Box Size (pixels) × microns per pixel
Figure 8.4e Box Search Iterations Example
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•
Box Size (pixels)
•
The Box Size parameter defines the X or Y distance in pixels of two successive looks
during a box search. The size of the box through which the stage moves is defined by
twice the value of Box Size (pixels). See the discussion of “Box Search Iterations” on
page 8-183.
•
Hit Selection Criteria
•
The Hit Selection Criteria parameter determines the method used by the vision system
when it finds multiple locations during the search for a model (i.e., two or more areas of
the video correlate with the model).
•
Best Score—Selects the location with the highest score. This is the default and is
appropriate for most applications.
•
Close to Original—Selects the location closest to the screen position of the model
when the model was taught. This method is appropriate for regular use of pattern
recognition on images that have repeated or ambiguous features. While pattern
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The sequence of X-Y stage moves in a Box Search Iteration:
2
Box search site
9
3
1
4
Original search location
8
5
7
6
If High Mag Optics is selected with High Zoom (maximum), the calibrated
pixel size is 0.2 µm/pixel, and the value of Box Size is 100 pixels.
-20 mm in X, 20 µm in Y (diagonal move to upper left corner of box)
20 mm in X, (top of box)
20 mm in X,
-20 mm in Y, (right side of box)
-20 mm in Y,
-20 mm in X, (bottom of box)
-20 mm in X,
20 mm in Y (left side of box)
Each of the above eight steps involves stage motion, the acquisition of a video image at
the new stage location, and the search of that image for the previously trained visual
model. If the model is located at any of the eight locations, the box search is terminated
at that location, and alignment of the model is performed.
recognition can dither between the ambiguous locations when aligning the pattern, the
Close to Original option consistently uses the model closest to the original alignment.
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•
Accept Threshold
•
When the software compares a location to the model it was taught, it uses the Accept
Threshold minimum correlation score to determine if the location is acceptable.
•
The default is 500, with a range of 1 to 1000.
•
SPM Accept Threshold
•
When the software compares a location to the model it was taught, it uses the SPM
Accept Threshold minimum correlation score to determine if it is an acceptable SPM
location.
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•
The default is 500, with a range of 1 to 1000.
•
Search Control
•
The Search Control parameter establishes the type of correlation values used to
determine acceptability.
•
Normalized—Correlation values are acceptable from 0 to 1000. This is the default
value.
•
Absolute—The absolute value of the correlation score is acceptable; therefore, the
software recognizes locations that are inverted or optical negative of the original model.
•
Intensity Min
•
The Intensity Minimum parameter determines the acceptable threshold for a location’s
average pixel intensity (brightness).
•
The default is 10, with a range of 0 to 255.
•
Auto Reload Hardware —This field is obsolete.
•
Disp Max Hor Size (pix)—This field is obsolete.
•
Sync Workarkound (pixels)—This field is obsolete.
•
Magic Parm—This field is obsolete.
•
Display video on Multi chan image
•
When capturing images in multi channels, the Display video on Multi channel image
parameter enables or disables the video. If Disabled (default), only the channel captures
display. If Enabled, the channel captures and the video screen are sized to display
simultaneously.
•
Video Based Stage Motion
•
The Video Based Stage Motion parameter determines whether or not you can indicate
stage position from the video screen. If Enabled, double-clicking on a point in the video
display causes the stage to move so that the indicated point is aligned beneath the video
display cross hair. To work well, this option requires good pixel calibration.
•
The default is Disabled.
AutoFocus Parameters Panel [Parms Submenu Item]
Access the AutoFocus Parameters panel in the Vision System Control / Parms submenu. Select
AutoFocus Parameters.
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Figure 8.4f AutoFocus Parameters Panel
Max Z - Hi Mag, Hi Zoom (µm)
•
This parameter defines the total Z (SPM) axis excursion during AutoFocus for the high
mag camera at high zoom setting. The actual downward movement is half the value set
in the parameter, after which it raises the full value gathering focus data. The default
value is 200 µm, with a range of 0 to 2000 microns.
•
At the default setting, the AutoFocus algorithm moves the SPM axis 50 µm down at
maximum velocity, then move the SPM axis up slowly (defined by the Velocity % Hi
Mag, Hi Zoom parameter) 100 µm during which focus data is gathered. If an optimum
focus point is detected, the SPM axis is moved down to that point at maximum velocity.
Max Z - Lo Zoom & Lo Mag
•
This parameter defines the maximum Z (SPM) axis excursion during AutoFocus when
either the Low Mag camera is selected or the High Mag camera is selected at the Low
Zoom setting. The default is 600 µm, with a range of 0 to 2000 microns.
Velocity % Hi Mag, Hi Zoom
•
186
This parameter defines the Z (SPM) axis velocity for the data collection phase of
AutoFocus when the Hi Mag camera and Hi Zoom settings are selected. The velocity
is specified as a percentage of the maximum SPM axis velocity. The default is 7% (of
maximum velocity), with a range of 0 to 100%
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Velocity% Lo Zoom & Lo Mag
•
This parameter defines the Z (SPM) axis velocity for the data collection phase of
AutoFocus as a percentage of the maximum velocity when either Low Mag optics or
High Mag optics is selected at the Low Zoom setting. The default is 25% (of maximum
velocity), range of 0 to 100%
SPM Axis Backlash Comp
•
This parameter defines the backlash compensation in microns during AutoFocus for the
downward -Z (SPM) axis movement. The default value is 0.0 µm (no compensation),
with a range of 0.0 to 100.0 µm.
Smoothing Pixels
•
During data collection the AutoFocus algorithm repeatedly performs the following
operations: 1) video acquisition, 2) windowing of acquired data, 3) smoothing of the
windowed data, and 4) calculation of the differential-sum (sharpness) of the smoothed
data.
•
The number of pixels over which the data is smoothed is defined by the Smoothing
Pixels parameter. The default is 8 pixels, with a range of 0 to 8.
Convergence
•
After the AutoFocus data collection phase is complete, the resulting data relates focus
(sharpness) to SPM axis position. This data is then fit to a Gaussian function using an
iterative non-linear algorithm. The Convergence parameter determines how closely the
Gaussian curve must fit. The default is 0.01, with a range of 0.00 to 1.00.
Max Chi Squared
•
The Maximum Chi Squared parameter originally provided an iterative look for
AutoFocus to aid in asymmetrical curves. This parameter is now obsolete.
Max Iterations
Rev. C
•
The Max Iterations parameter defines the maximum number of attempts to make the
AutoFocus data fit a Gaussian curve. If Convergence does not occur within this number
of iterations, then the covariance of each of the Gaussian function parameters (height,
width, center) is checked to determine if a fit has been obtained.
•
The default is 100 iterations, range: up to 1000.
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Max Acceptable Covariance
•
At the completion of a curve fit, the covariance of the height, width, and center of the
Gaussian function are provided by the curve fit algorithm. The Max Acceptable
Covariance parameter defines the greatest tolerable covariance for a successful curve
fit. If any of the three covariance are greater than the value of this parameter, AutoFocus
fails.
Max Center Covariance
•
The Maximum Center Covariance parameter defines the greatest tolerable covariance
for a successful curve fit relative to only the center value. At the completion of a curve
fit, the covariance of the height, width, and center of the Gaussian function are provided
by the curve fit algorithm.The default is 0 iterations, range: 0 to 100.
Min Autofocus Samps
•
The Minimum AutoFocus Samples parameter defines the number of pictures snapped
during the AutoFocus routine. This parameter works in conjunction with the Minimum
AutoFocus Velocity parameter. The higher the number of samples requested, the slower
the AutoFocus.
•
The default is 0 samples, with a range of 0 to 100.
Min Autofocus Vel (%)
•
The Minimum AutoFocus Velocity parameter defines the minimum speed of the
AutoFocus routine. This parameter works in conjunction with the Minimum
AutoFocus Samples parameter. The slower the velocity, the slower the AutoFocus.
•
The default is 0%, with a range of 0 to 100%.
AutoFocus Curve Fit
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•
The AutoFocus Curve Fit parameter determines the type of curve to apply to the data
during AutoFocus.
•
Gaussian—Fits the data to a smooth, symmetrical curve. This is the default value.
•
Asymmetric—Recognizes asymmetry and fits the data appropriately to recognize the
asymmetry. Use this type if the curve is known to be asymmetrical or if dealing with a
dramatic step.
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Vision Control Menu Command
AutoFocus Button [Auto Focus Parms Panel]
The AUTOFOCUS button provides you with the ability to execute the AutoFocus algorithm from
within the parameters adjustment box.
AutoFocus performs the following operations using the values set in AutoFocus Parameters
panel:
AutoFocus moves the Z (SPM) axis down X microns, where X is determined by the Max Z
parameter for the currently selected optics. The actual downward movement is half the value set in
the parameter, after which it raises the full value gathering focus data.
Backlash compensation is used if the SPM Axis Backlash Comp parameter is non-zero (i.e.,
downward motion is 150 percent of the parameter’s value, then the Z axis moves upward by the
amount of the backlash parameter).
AutoFocus commands the stage to move upward by Max Z amount at the percentage of maximum
velocity defined by the appropriate Velocity % parameter.
Simultaneously, the vision system hardware repeatedly executes the following:
•
Saves stage Z position for this pass.
•
Acquires image in frame buffer.
•
Identifies appropriate window of frame buffer image—center quarter of image for Low
Mag optics or High Zoom, High Mag optics, or center (vertical), left (vertical) quarter
of image for Low Zoom, High Mag optics.
•
Checks window contrast and generates error if too low (<1.0).
•
Smooths window according to Smoothing Pixels parameter value.
•
Executes differential-sum algorithm on smoothed window (sharpness calculation).
•
Repeats until stage motion completes.
AutoFocus then fits the acquired stage Z and sharpness data pairs to a Gaussian curve using the
Levenberg-Marquardt method (nonlinear, steepest descent) and checks for convergence while
iterating (Convergence and Max Iterations parameters).
AutoFocus verifies that the variances of the values that define the Gaussian curve (height, width,
center) are sufficiently low (Max Acceptable Covariance parameter) and verifies that the
computed center is within the range of motion through which the stage moved (Max Z).
If the settings for AutoFocus are met, the stage is moved downward in Z to the “sharpest” point, the
center of the Gaussian curve. The downward motion includes backlash compensation if the
backlash parameter is non-zero.
If any single constraint is not met, the Z stage is sent back to the position at which AutoFocus was
initiated, and a failure message is displayed.
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Low Mag Parameters [Parms Submenu]
Low magnification is available on systems with the Pattern Recognition option.
The Low Mag Optics Parameters panel provides access to parameters related to the behavior of
the Low Mag optics within the vision system.
Figure 8.4g Low Mag Optics Parameters Panel
Low Mag Camera Enable
•
The Low Mag Camera Enable parameter allows you to enable and disable the low
mag optics. If set to Disabled, the other Low Mag Parameters are unavailable.
Low Mag Camera Port
•
This parameter designates the port (either 1 or 2) to which the low mag camera is
connected. Changes to this parameter take effect on initialization only (restart z.exe).
The default is port 2.
Low Mag Stage X Location
190
•
This parameter defines the X position (absolute) of the X-Y stage when the stage is at
the Low Mag optics calibration position. The parameter is set when the Low Mag
optics calibration function is executed or taught. This parameter is usually grayed-out
and cannot be directly modified.
•
The default is 0 counts (microns)
range of -1000000 to 1000000 µm.
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Low Mag Stage Y Location
•
This parameter defines the Y position (absolute) of the X-Y stage when the stage is at
the Low Mag optics calibration position.
•
The parameter is set when the Low Mag optics calibration function is executed or
taught. This parameter is usually grayed-out and cannot be directly modified.
•
The default is 0 counts (microns)
range of -1000000 to 1000000 µm.
Low Mag Stage Z Location
•
This parameter defines the Z position (absolute) of the Z stage when the stage is at the
Low Mag optics calibration position. The parameter is set when the Low Mag optics
calibration function is executed or taught. This parameter is usually grayed-out and
cannot be directly modified.
•
The default is 0 counts (microns)
range of -1000000 to 1000000 µm.
Low Mag Pixel X Size [µm]
•
This parameter defines the size of a pixel in µm in the X direction for the low mag
camera. The default is 10.0 µm, with a range from -1000 to 1000 µm.
•
When coarse alignment occurs, the vision system determines the number of pixels along
the X axis between the current location of the model and the taught location of the
model. Using the value of this parameter, the number of pixels is converted to µm for
subsequent stage motion to correct the alignment error in the X direction.
•
You calculate this number by converting the video image of the 1000 µm square on the
Optical Standard to a NanoScope image using the vision system function Video image>Nano3 image. Use the Off-line/View/Top View utility to measure the apparent width
of the square, calculate the percent of error, and modify this parameter accordingly.
Low Mag Pixel Y Size [µm]
Rev. C
•
This parameter defines the size of a pixel in µm in the Y direction for the low mag
camera. The default is -10.0 µm, with a range from -1000 to 1000 µm.
•
When coarse alignment occurs, the vision system determines the number of pixels along
the Y axis between the current location of the model and the taught location of the
model.
Using the value of this parameter, the number of pixels is converted to µm for
subsequent stage motion to correct the alignment error in the Y direction.
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•
You calculate this number by converting the video image of the 1000 microns square on
the Optical Standard to a NanoScope image using the vision system function Video
image->Nano3 image. Use the Off-line/View/Top View utility to measure the apparent
width of the square, calculate the percent of error, and modify this parameter
accordingly. This number is generally negative, because the positive Y direction of the
X-Y stage is opposite that of the vision system.
Low Mag Stage Accuracy
•
This parameter defines the accuracy threshold the vision system must meet when
attempting to null errors during registration between the current screen location of the
model and the taught location of the model.
•
For example, if the vision system determines that the error between the current screen
location of the video model and the taught location of the video model is 5 microns, and
the Low Mag Stage Accuracy is set to 10 microns, then no error correction is
attempted.
•
This parameter applies to both the X and Y axes. Typically, the Low Mag Stage
Accuracy should be greater than or equal to the pixel size of the camera.
High Mag Parameters [Parms Submenu]
The High Mag Optics Parameters panel gives you access to parameters related to the behavior of
vision system High Mag optics (See Figure 8.4h).
Figure 8.4h High Mag Optics Parameters Panel
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High Mag Camera Enable
•
The High Mag Camera Enable parameter allows you to enable and disable the high
mag optics. If set to Disabled, the other High Mag Parameters are unavailable.
High Mag Camera Port
•
This parameter designates the port (either 1 or 2) to which the high mag camera is
connected. Changes to this parameter take effect on initialization only (restart z.exe).
The default is port 1.
High Mag Stage X Location
•
This parameter defines the X position (absolute) of the X-Y stage when the stage is at
the High Mag optics calibration position.
•
(continued on next page...)
•
The parameter is set when the High Mag optics calibration function is executed or
taught. This parameter is usually grayed-out and cannot be directly modified.
•
The default is 0 counts (microns), range of -1000000 to 1000000 µm.
High Mag Stage Y Location
•
This parameter defines the Y position (absolute) of the X-Y stage when the stage is at
the High Mag optics calibration position. The parameter is set when the High Mag
optics calibration function is executed or taught. This parameter is usually grayed-out
and cannot be directly modified.
•
The default is 0 counts (microns),
range: 1000000-1000000 µm
High Mag Stage Z Location
Rev. C
•
This parameter defines the Z position (absolute) of the Z stage when the stage is at the
High Mag optics calibration position. The parameter is set when the High Mag optics
calibration function is executed or taught. This parameter is grayed-out and cannot be
directly modified.
•
The default is 0 counts (microns),
range of -1000000 to 1000000 µm.
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Move To Opt. Stand. X Offset (µm)
•
The Move to Optical Standard X Offset (µm) parameter defines the X distance in
microns from the center of the optical standard to the point which the stage must move
after selecting the Move to Optical Standard command.
•
The default is 1000 µm,
range of -2000 to 2000
Move To Opt. Stand. Y Offset (µm)
•
The Move to Optical Standard Y Offset (µm) parameter defines the Y distance in
microns from the center of the optical standard to the point which the stage must move
after selecting the Move to Optical Standard command.
•
The default is -1000 µm, with a range of -2000 to 2000.
High Mag (Lo Zoom) Pixel X Size [µm]
•
This parameter defines the High Mag (Low Zoom) camera’s X axis pixel size. The
default is 1.0 µm, with a range from -1000 to 1000 µm.
•
When coarse alignment occurs, the vision system determines the number of pixels along
the X axis between the current location of the model and the taught location of the
model. Using the value of this parameter, the number of pixels is converted to µm for
subsequent stage motion to correct the alignment error in the X direction.
•
You calculate this number by converting the video image of the 150 µm square on the
Optical Standard to a NanoScope image using the vision system function Video image>Nano3 image. Use the Off-line/View/Top View utility to measure the apparent width
of the square, calculate the percent of error, and modify this parameter accordingly.
High Mag (Low Zoom) Pixel Y Size [µm]
194
•
This parameter defines the High Mag (Low Zoom) camera’s Y axis pixel size. The
default is -1.0 µm, with a range from -1000 to 1000 µm.
•
When coarse alignment occurs, the vision system determines the number of pixels along
the Y axis between the current location of the model and the taught location of the
model. Using the value of this parameter, the number of pixels is converted to µm for
subsequent stage motion to correct the alignment error in the Y direction.
•
You calculate this number by converting the video image of the 150 µm square on the
Optical Standard to a NanoScope image using the vision system function Video image>Nano3 image. Use the Off-line/View/Top View utility to measure the apparent width
of the square, calculate the percent of error, and modify this parameter accordingly. This
number is generally negative because the positive Y direction of the X-Y stage is
opposite the vision system.
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High Mag, Low Zoom Stage Accuracy
•
This parameter defines the accuracy threshold the vision system must meet when
attempting to null errors during registration between the current screen location of the
model and the taught location of the model. The default is 4.0 µm, with a range of 0 to
1000000 microns.
•
For example, if the vision system determines that the error between the current screen
location of the video model and the taught location of the video model is 2 microns, and
the High Mag, Low Zoom Stage Accuracy is set to 4 microns, then no error correction
is attempted.
•
This parameter applies to both the X and Y axes. Typically, the High Mag, Low Zoom
Stage Accuracy should be greater than or equal to the pixel size of the camera.
High Mag (Hi Zoom) Pixel X Size [µm]
•
This parameter defines the High Mag (High Zoom) camera’s X axis pixel size. The
default is 0.214 µm, with a range from -1000 to 1000 µm.
•
When fine alignment occurs during registration, the vision system determines the
number of pixels along the X axis between the current location of the model and the
taught location of the model.
Using the value of this parameter, the number of pixels is converted to µm for
subsequent stage motion to correct the alignment error in the X direction.
•
You calculate this number by converting the video image of the 20 µm square on the
Optical Standard to a NanoScope image using the vision system function Video image>Nano3 image. Use the Off-line/View/Top View utility to measure the apparent width
of the square, calculate the percent of error, and modify this parameter accordingly.
High Mag (Hi Zoom) Pixel Y Size [µm]
Rev. C
•
This parameter defines the High Mag (High Zoom) camera’s Y axis pixel size. The
default is -0.214 µm, with a range from -1000 to 1000 µm.
•
When fine alignment occurs during registration, the vision system determines the
number of pixels along the Y axis between the current location of the model and the
taught location of the model.
Using the value of this parameter, the number of pixels is converted to µm for
subsequent stage motion to correct the alignment error in the Y direction.
•
Calculate this number by converting the video image of the 20 µm square on the Optical
Standard to a NanoScope image using the vision system function Video image->Nano3
image. Use the Off-line/View/Top View utility to measure the apparent width of the
square, calculate the percent of error, and modify this parameter accordingly. This
number is generally negative because the positive Y direction of the X-Y stage is
opposite the vision system.
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High Mag, High Zoom Stage Accuracy
•
This parameter defines the accuracy threshold the vision system must meet when
attempting to null errors during registration between the current screen location of the
model and the taught location of the model. The default is 1.0 µm, with a range of 0 to
1000000 microns.
•
For example, if the vision system determines that the error between the current screen
location of the video model and the taught location of the video model is 0.5 microns,
and the High Mag, High Zoom Stage Accuracy is set to 1 micron, then no error
correction is attempted.
•
This parameter applies to both the X and Y axes. Typically, the High Mag, High Zoom
Stage Accuracy should be greater than or equal to 1 µm, the step size of the X-Y stage.
Camera AGC Delay (Secs)
•
The Camera Automatic Gain Control parameter controls the time allowed for the
camera iris and processor to determine acceptable brightness of the image.
•
The default is 0 seconds, with a range of 0 to 1000.
DarkField Parameters [Parms Submenu]
Figure 8.4i DarkField Optics Parameters Panel
The DarkField parameters are similar to those for low magnification, as described on Page 190.
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Large Field Parameters [Parms Submenu]
The Large Field parameters allow you to enable/disable the Large Field camera and to specify the
port to which the Large Field camera is connected.
Figure 8.4j LargeField Optics Parameters Panel
Edge Detection
This function accesses a panel to enable the Vision system type (See Figure 8.4k).
Figure 8.4k Edge Detection Parameters Panel
Enables PatMax (Vision
System).
8.4.5 Helpers Submenu on the Vision Control Panel
Several functions are available in the Helpers pull-down menu on the Vision System Real-time
Control panel.
Figure 8.4l Helpers Submenu on Vision System Real-time Control Panel
Vision Image->Nano3 Image
The Vision Image->Nano3 Image function translates the vision image to a NanoScope compatible
image for analysis.
For example, you can calculate a number by converting the video image of the 1000 µm square on
the Optical Standard to a NanoScope image using the vision system function Video image->Nano3
image.
Then use the Off-line / View / Top View utility to measure the apparent width of the square,
calculate the percent of error, or modify the image.
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Chapter 9
Stage and Recipe Menus
The commands in the Stage menu pertain to the movement and calibration of stage systems. The
commands in the Recipe menu control teaching the microscope to perform automated functions. For
further details on the Recipe menu commands, see The Automation Supplement or your system
manuals.
This chapter details the following Stage and Recipe commands:
•
Overview of the Stage Command: Section 9.1
•
Stage Menu Interface: Section 9.2
•
Rev. A (variable)
•
Load New Sample Section 9.3
•
Locate Tip Section 9.4
•
Focus Surface Section 9.5
•
Move To (x, y) (Dimension Series only) Section 9.6
•
Set Reference (Dimension Series only) Section 9.7
•
Programmed Move (Dimension Series Only) Section 9.8
•
Replace Tip (D3000 Series) Section 9.9
•
Scaling Section 9.10
•
Set Image Center (Dimension 5000/9000 only) Section 9.11
•
Initialize Section 9.12
•
SPM Parameters Section 9.13
•
Set Z Exclusion Section 9.14
Recipe Commands Section 9.15
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Stage and Recipe Menus
Overview of the Stage Command
9.1
Overview of the Stage Command
The Stage menu appears whenever Dimension™ Series microscopes are selected using the Microscope
/ Select command. The Dimension 3000 features two stage types: a manual (hand-cranked) version; and
an open-loop, motorized version. Dimension 9000 microscopes feature a large sample stage having highprecision, closed-loop positioning for such materials as silicon wafers and computer hard drive media.
These stages consist of stacked, perpendicular X- and Y-axis slides.
9.1.1 Mounting Samples
Stages come equipped with vacuum chucks, which are the usual choice employed for securing samples;
an outside source of vacuum is required. Operators should be cautious when handling larger samples
with the vacuum chuck—an 8-inch wafer held using 5 psi vacuum sustains a loading of 250 lbs. If debris
is trapped between the stage and wafer, the wafer may become scratched or broken. Keep the stage clean
at all times using isopropyl alcohol. When cleaning dust from the stage area, use a vacuum cleaner with a
soft brush. DO NOT clean stages using compressed air.
Samples may also be secured to the stage using magnetic pucks, which are themselves magnetically
attached to the stage. This system allows for easy mounting and removal of small samples.
Regardless of the method used, operators should verify that samples are mounted flat and parallel to the
stage. This is especially important for larger samples being inspected over more than one site. Grossly
tilted samples may require raising the head higher whenever the sample is indexed, increasing cycle time
and the risk of probe-sample collision. Similarly, large numbers of identical samples should be mounted
the same way whenever possible; this allows use of the same settings between samples.
9.1.2 Axis Orientation—X-Y Stages
Viewing the SPM from the front, stage movements are defined over two axes of motion: X (left-right),
and Y (front-back). For X-axis movements, lesser (decreasing) coordinates are located to the left. For Yaxis movements, positive (increasing) coordinates are located toward the rear of the machine, negative
values are located forward (see Figure 9.1a of a Dimension 5000/7000 stage; Dimension 3000 is
similar).
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Overview of the Stage Command
Figure 9.1a Dimension Series Stage, X-Y Axis Coordination
+Y
-X
+X
-Y
(Front)
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Stage and Recipe Menus
Stage Menu Interface
9.2
Stage Menu Interface
Stage software allows for manual or taught movement of the stage prior to scanning.
The stage menu allows for setting up stage parameters for optimal scanning. Prior to initializing the
stage, menu commands appear disabled. This is to avoid head crashes and to properly set up locations for
scanning. Enable some commands by entering the Service Access (e.g., Z exclusion) and enable the
parameters set by logging out of Service Access. The software guides and prompts the user to complete
the functions of each Stage command.
Figure 9.2a Stage Menu
9.3
Load New Sample
The Load New Sample command programs the probe to automatically lift from the sample surface, then
index the stage to a preprogrammed location (usually front-center) from which samples may be rapidly
reloaded.
Once a new sample has been placed on the stage and secured, the stage software is used to quickly and
accurately relocate the sample to the previously used site. It is possible to establish a series of separate
sites on any one sample, then repeatedly inspect these same sites on identical samples. This is the
preferred method for inspecting integrated circuits and magnetic media
Refer to the following sections:
•
Procedures to Load or Unload a Sample Section 9.3.1
9.3.1 Procedures to Load or Unload a Sample
1. Click on the Stage / Load New Sample option. The screen will display a panel:
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Locate Tip
Figure 9.3a Stage Panel
Stage
Load/Unload?
Ok
Cancel
2. To load the new sample, click the Ok option. The head will first be raised to the Load/Unload
height, then the stage will index to the front-center position. The screen will display a reminder:
Figure 9.3b Stage Prompt
Stage
Remember to locate a new tip before engaging
Ok
Note:
Operators are advised to verify that the head’s tip is still usable. If the tip has been
used for a lengthy period, or if damage is suspected, change the tip now per
instructions provided in your Dimension Series manual.
3. When the tip has been changed, or if a tip change is not required, click Ok in the panel.
4.
To release the vacuum chuck’s hold on a previous sample, use the pneumatic toggle switch
located on the right side of the beam. The vacuum will be released; remove the sample.
5.
Verify that the stage and vacuum chuck are clean of debris. If debris is noticed, clean using a lintfree wipe and isopropyl alcohol.
6.
Place the new sample on the stage. Check that the sample is seated flat against the chuck’s contact
points and centered. Actuate the vacuum chuck by toggling the vacuum chuck switch.
7.
Click on the Stage / Load New Sample option. The screen will display an execute panel:
Figure 9.3c Stage Prompt
Stage
Load/Unload?
Ok
Cancel
8. To load the new sample, click the Ok option. The stage will return the sample to its most recent
position.
9.4
Locate Tip
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Stage and Recipe Menus
Locate Tip
This function is used as a prelude to focusing on the sample surface, and should be executed whenever
new tips are installed before proceeding with engagement. It enables the operator to find the probe tip
using the optical system.
Refer to the following sections:
•
Procedure to Locate Tip Section 9.4.1
9.4.1 Procedure to Locate Tip
1. 1. Verify that a tip has been installed into the probe tipholder, then click on the Stage / Locate Tip
option. The screen will prompt the operator to continue:
Figure 9.4a Stage Prompt
Stage
Locate Tip
Ok
Cancel
2. Click on Ok to continue. The screen will display a caution to the operator, indicating that the
microscope objective is being maneuvered:
Figure 9.4b Stage Prompt
Stage
Moving to tip position
As the objective is positioned, the tip may begin to come into focus. When the focus position is attained,
the screen will then display trackball instructions for achieving a focus:
Figure 9.4c Locate Tip Instructions Panel
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Focus Surface
3.
Bring the tip into focus by holding down the left button while turning the trackball. The tip may
be off from the center of the field of view (particularly if a new type of tip has been installed);
however, this will be corrected shortly.
4.
To center the tip in the field of view, rotate the small, metal knobs located on the front of the
camera casing as indicated in the screen prompt. The tip should be centered in the frame’s field of
view. You should verify that a sufficiently large field of view is being utilized to locate the tip. If
locating the tip proves difficult, turn the metal knobs CW until they stop, then turn back CCW
approximately 1.5 turns.
5. .When the tip has been brought into focus and centered in the field of view, click on Quit in the
Locate Tip panel.
9.5
Focus Surface
The Focus Surface command accesses a panel to control the stage and view the surface. The purpose of
this command is to optimize placement of the tip on the sample surface. Also, use this command for
setting the Z-exclusion limit, (See Section 9.14).
In the Stage menu, access the Focus Surface panel (See Figure 9.5a).
Figure 9.5a Focus Surface Panel
9.5.1 Focus Surface Panel
Parameters on the Focus Surface Panel
Camera—Sets the level of magnification for viewing the surface (i.e., High Mag or Low Mag).
Illumination—Value for viewing the surface (i.e., 0 is darkest and 100 is brightest).
Focus On—Sets the focus designator (i.e., Surface or Tip).
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Stage and Recipe Menus
Move To (x, y) (Dimension Series only)
Zoom In—Moves optics closer to the surface to enlarge a specified point on the sample surface.
Zoom Out—Distances the optics to enlarges the area on a sample surface.
Auto Focus—Automatically adjusts optics to find a position relative to the sample surface for setting
engage values and SPM parameters.
Ok—Set the focus surface values and exits the Focus Surface command.
9.6
Move To (x, y) (Dimension Series only)
This option enables the operator to quickly index the stage to a defined X-Y coordinate. If the origin has
not been preset using the Stage / Set Reference menu, the stage will automatically default to using its
center point as the origin. (All subsequent X-Y moves are done from the origin).
Refer to the following sections:
•
Procedure to Move the X-Y Stage Section 9.6.1
•
CAUTION:, Page 9
9.6.1 Procedure to Move the X-Y Stage
1. Verify that the stage origin (position 0, 0) is either: a) at the default, center stage position; or, b)
has been reset to a new position using the Stage / Set Reference menu.
2.
Click on the Stage / Move To (x,y) option. The screen will present a panel having four
parameters:
Figure 9.6a Move to (x, y) Panel
Move To (x,y)
X position:
-49850 µm
Y position:
49967 µm
X position change:
0.00 µm
Y position change:
0.00 µm
Quit
Note:
3.
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Move
Focus Surface
The first two parameters define absolute moves relative to the currently set origin
(0,0). The third and fourth parameters define relative moves from the current
position.
Enter the X and Y coordinates of the position to be moved to, then click Move. The stage will
move to the new position; meanwhile, the screen reminds the operator to monitor the Esc button:
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Set Reference (Dimension Series only)
Figure 9.6b Stage Screen
Stage
Press <Esc> to abort motion
4. Should it become necessary to halt movement, press the Esc button.
Note:
The software permits stage movement while the tip is engaged (using Focus Surface
trackball controls); however, this is not generally advised.
CAUTION:
Always verify that the tip is off the surface before attempting stage movements. If manual stage
movements are attempted during engagement, the tip and/or sample may be damaged.
ATTENTION:
Il est impératif de toujours s’assurer que la pointe ne touche pas la surface avant de bouger la
platine porte-échantillons. Si le déplacement de la platine porte-échantillons est effectué
manuellement, la pointe et/ou l’échantillon pourrai(en)t être endommagés.
WARNHINWEIS: Überprüfen Sie immer zunächst, daß die Meßspitze nicht mehr auf der Oberfläche ist, ehe Sie
den XY-Verschiebetisch bewegen. Wenn der XY-Verschiebetisch von Hand bewegt wird,
während sich das Mikroskop im Engage-Zustand befindet, können Meßspitze und/oder Probe
beschädigt werden.
9.7
Set Reference (Dimension Series only)
Use the Set Reference command to set the origin point on the sample surface for all subsequent Move
To and Programmed Move operations. Operators should verify the reference point (0,0) with
programmed move sequences, since all moves are relative to the current origin. For example, a program
designed to move the stage to the four corners of a square sample when the origin (0, 0) is set to the
upper-left corner will not probe the same positions if the origin is changed to the lower-right corner. It
will avoid confusion to select a standard position as the usual origin reference (e.g., lower-left corner),
then reuse the same reference position with all samples.
On samples having a grid-like aspect (e.g., integrated circuits), the reference is initially defined from a
line (two points) rather than a single point. The reference line is defined parallel to some feature on the
sample surface (e.g., an electronic trace on an integrated circuit). This is done by defining two points: an
origin and a second point.
Refer to the following sections:
•
Procedure to Set a Reference Section 9.7.1
9.7.1 Procedure to Set a Reference
1.
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Select the Stage / Set Reference option. The screen will offer four options to the operator:
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Set Reference (Dimension Series only)
Figure 9.7a Set Reference Screen
Set Reference
Quit
Origin
X Axis
Y Axis
Reset
2. Verify that the sample surface is in focus on the Display Monitor, then use the trackball to move
the sample until the monitor cross-hairs are on the intended origin. Click Origin in the Set
Reference panel; this is the first of two points to be used for defining a reference line on the
coordinate grid.
3.
Next, use the Focus Surface option and trackball to either:
a.
Move the stage rightward to a second point on the linear feature. (This second point, along
with the point set in Step 2 , will define the X-axis.) Now, click on the X Axis option. This
will establish the (Y = 0) reference line.
b.
Move the stage upward to a second point on the linear feature. (This second point, along with
the point set in step Step 2, will define the Y-axis.) Now, click on the Y Axis option. This will
establish the (X = 0) reference line.
Note:
Accuracy will be improved if the two points defining a reference line are located at
some distance to each other. For maximum angular accuracy, the two points should
be located at opposite sides of the sample (See Figure 9.7b).
Figure 9.7b Stage Illustration
XX
1
2
Reference Points
10
X1
X2
Reference Points
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Programmed Move (Dimension Series Only)
Figure 9.7c Scanning illustration
Note: Left image uses two closely located points to
image is better—reference line defined by two,
widely spaced points. This image
shows the resultant reference line and axes.
+Y
Reference Line
Reference Line
X
-X
X
1
2
+X
-Y
9.8
Programmed Move (Dimension Series Only)
The Stage / Programmed Move function allows the stage to be automatically positioned at a series of
memorized positions. These positions are programmed into the controller’s computer, then called out
automatically in sequence. The operator may run either the entire memorized sequence, or skip
positions, as desired. This function is particularly useful for statistical quality assurance runs on large
numbers of identical samples, and as a basic inspection aid.
Refer to the following sections:
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•
Programmed Move Panel Section 9.8.1
•
Procedure for Teaching a Programmed Move Section 9.8.2
•
Procedure to Remove a Programmed Option Section 9.8.3
•
Procedure to Insert a Step into an Existing Program Sequence Section 9.8.4
•
Procedure To Run a Series of Programmed Moves Section 9.8.5
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Stage and Recipe Menus
Programmed Move (Dimension Series Only)
9.8.1 Programmed Move Panel
To access this option, select on Stage / Programmed Move. The screen will display a panel of short
options:
Figure 9.8a Programed Move Panel
Programmed Move
Program name:
Quit
move
Run
Teach
Definitions
•
Program Name Field—Provides the name of the move program currently loaded (in this
example, the program is called “move”). Moves are first programmed using the Teach option.
Later they may be executed using the Run option.
•
Quit (button)—Exits the Programmed Move panel.
•
Run (button)—Executes the specified program name.
Once a program sequence has been taught to the computer, the program can be run from the
Programmed Move panel. The stage will move to each position in the same order it was
taught, relative to the current origin point. At each program position, the sample will be
scanned for 1.5 frames, captured, then indexed to the next position. Captured data from each
position is stored on the hard disk; there should be sufficient memory to record 100 frames at
256 samples each.
•
Teach (button)—Accesses a panel to crate a new program.
•
Origin Points—Current origin at the time of programming.
Programmed Move positions are memorized relative to the current origin at the time of
programming. If the origin has been shifted from its original position since the time of
programming, it will be necessary to reestablish the original origin point to locate the same
positions on the sample. When generating maps of programmed moves, the origin point
should always be indicated.
9.8.2 Procedure for Teaching a Programmed Move
To program (teach) a series of moves, do the following:
1.
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Click on the Program name option in the panel, then enter the name to be used. (Program names
should be eight characters or less and follow DOS protocol.) From the Programmed Move panel,
click on the Teach option. The screen will prompt with:
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Figure 9.8b Programmed Move Panel
Programmed Move
Creating new program
Ok
2. Click on Ok to proceed with programming moves. A new panel will be displayed, featuring the
basic teaching commands:
Figure 9.8c Teach Program Panel
Teach Program
Program step:
0
Add Step
Remove Step
Move to (x,y)
Save
Quit
3. To add a first step, click on the Add Step option; this will, in turn, access the Teach Mode panel:
Figure 9.8d Teach Mode Panel
Teach Mode
Hold down the left button to move the SPM
Hold down the right button to zoom.
Hold down either top button to lock last move.
Zoom In
Zoom Out
Ok
The operator may now use the controls to position the stage and sample to the desired location(s) to be
programmed into the computer. (These controls are identical to the Focus Surface controls explained in
Chapter 5 of this manual.)
4. The Move To (X,Y) command offers an alternative method to move the stage. Click on the Move
To (X,Y) to access the Move To panel:
5.
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When the stage has been moved to a desired position, press Quit on the Teach Mode panel; to
add another position, click again on the Add Step option. The Teach Mode panel will be
displayed again, and the operator may again position the stage at the desired location, quit the
Teach Mode panel, and click on Add Step. Each time the Teach Program panel is reentered, the
Program step will increment by another count. This procedure may be repeated until all the
desired positions have been programmed up to a maximum of 100 steps. Each position will be
automatically assigned a program step number.
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Programmed Move (Dimension Series Only)
It will prove helpful to draw a simple map of the sample, along with each programmed position, before
programmed moves are entered. If reducing cycle time is important, position order should be optimized
to reduce stage travel. Also, note the origin point at the time of programming.
6.
When all stage positions have been entered into the program, click on Save in the Teach Program
panel, then Quit. The program should now be entered and saved under the name entered in Step 1.
Note:
7.
The operator must save steps before using Quit to exit the Teach Program panel;
otherwise, programmed steps will be lost.
Additional programs are entered in the same manner, using a separate program name for each.
9.8.3 Procedure to Remove a Programmed Option
To remove a step from the programmed sequence:
1.
Click on the Stage / Programmed Move / Teach Program panel.
2.
Click on Program step field in the Teach Program panel.
3.
Enter the step number to be removed into the keyboard, or drag the mouse to index to the step
number. The stage will simultaneously move to the new step position.
4. Click on the Remove Step option. When individual program steps are removed, all subsequent
steps are “moved up” by one count. (For example, after removing step #2 from a program, step #3
would become the new step #2, step #4 would become the new step #3, etc.)
5.
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Click on Save to save the edited version of program.
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Programmed Move (Dimension Series Only)
9.8.4 Procedure to Insert a Step into an Existing Program Sequence
1.
Click on the Stage / Programmed Move / Teach Program option.
2.
Click on Program step in the Teach Program panel.
3.
Enter one less than the step number to be added to the sequence, or drag the mouse to index to the
desired step number. (For example, if the operator wishes to add a new program step #7, while
leaving all preexisting steps intact, they would enter “6” in the Program step field. The stage will
simultaneously move to the preexisting step position #6.)
4.
Click on the Add Step option. The Teach Mode panel will appear; at this point the operator
should use the trackball to move the stage to the new position to be added. When new program
steps are added, all preexisting steps beyond the new entry are “moved up” by one count.
5.
Click on Quit to exit the Teach Mode panel. The new position should now be added.
6.
Click on Save to save the edited version of program.
9.8.5 Procedure To Run a Series of Programmed Moves
1.
Click on the Stage / Programmed Move panel.
2.
Click on the Program name field, then enter the name of the program to be run.
3.
Click on the Run option. If the program is being loaded and run from the beginning, the screen
will prompt the operator whether to refocus the screen:
Figure 9.8e Stage Panel
Stage
Do you want to set the initial focus?
Yes
No
4. Clicking on Yes will transfer the user to the Focus Surface panel; the user may then make
focusing adjustments to better view the surface. Clicking on No will initiate the programmed
move from step #1.
If the program was previously run without finishing (aborted), the screen will request whether to begin
the program sequence at the aborted step; for example, if the operator left off at step #5:
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Stage and Recipe Menus
Programmed Move (Dimension Series Only)
Figure 9.8f Stage Panel
Stage
Continue from step 5?
Yes
No
5. The operator may wish to run the entire program from its beginning (step #1); if this is the case,
click No. Otherwise, click on Yes. The screen will display the current program step in progress:
Figure 9.8g Programmed Move Panel
Programmed Move
Program step 5 in progress
Abort
If the operator wishes to initiate the program sequence from another starting point, it will be quickest to
simply use the Teach Program panel to remove any unwanted step(s), then run the program again from
the new “step 1” position.
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Replace Tip (D3000 Series)
9.9
Replace Tip (D3000 Series)
The Replace Tip command opens instruction panels when replacing a tip. The function of the panels is
to assist the user with the hardware knobs and levers to optimize the tip replacement. Each prompt
guides you through the process of replacing a tip on the Dimension 3000 series microscopes.
Select the Replace Tip command to access a series of Replace Tip prompts
(See Figure 9.9a).
Figure 9.9a Replace Tip Prompts for the Dimension Series Microscopes
9.10 Scaling
Sets values according to the proportions of an established scale of measurement (e.g., wafer x, y or x and
y dimensions). This function allows for locating features on the sample surface.
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Scaling
Refer to the following topics on Scaling:
•
Procedures for Scaling Section 9.10.1
•
Navigating in the Scaling Panels and Parameters Section 9.10.2
9.10.1 Procedures for Scaling
1. Select DI/SERVICE ACCESS and enter your Service password.
Note:
Scaling is only available to engineers with Service Access.
2. Select Real-time/STAGE/SCALING. Select the coordinate(s) to be rescaled: X, Y or X+Y. Click
OK.
3. Read the Ready? panel and select OK . Proceed or CANCEL to set up.
4. In the Scaling panel, enter X- and Y-coordinates for the FIRST REGISTRATION POINT, and X- and
Y-coordinates of the SECOND REGISTRATION POINT, so that they are separated by the reference
distance.
Figure 9.10a .
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Scaling
Note:
If the two registration points are ≤50mm apart, a warning is displayed; select OK
and proceed, or CANCEL and return to item 4.
5. Move to and align the crosshairs on the first target. Click OK.
6. Move to and align the crosshairs on the second target. Click OK.
7. Click OK to acknowledge the reminder.
8. Click OK to go to the Service Access log-off panel.
9. Log-off Service Access.
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Scaling
9.10.2 Navigating in the Scaling Panels and Parameters
A series of panels and prompts opens to set the X and Y registration points
Figure 9.10b Scaling Panels
Select to Focus
Surface
Select to accept Scale values
9.10.3 Buttons on the Scaling Options Panel
X + Y AXIS:
Sets the scale based on both X and Y coordinates.
X AXIS:
Sets the scale based on the X coordinates only.
Y AXIS:
Sets the scale based on the Y coordinates only.
RESET FACTORS: Resets the scale to previously saved values or
default values.
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Set Image Center (Dimension 5000/9000 only)
9.11 Set Image Center (Dimension 5000/9000 only)
Ideally, operators should be able to locate features on the surface of a sample using the optical system’s
monitor, then engage the exact site of interest. Usually, this requires adjustment due to offsetting
between camera optics, the tip, and the sample surface. The Set Image Center function of the Stage menu
allows the operator to align images seen with the optical system with the SPM image seen on the Display
Monitor. This requires scanning a frame, noting the offset difference between the optical system’s center
and the scanned image’s center, then using the Set Image Center option to make a stage offset correction;
subsequent engagements should locate the tip at the exact location(s) chosen from the optical system
monitor.
9.11.1 General Procedures for Using Set Image Center
1.
Verify that the tip has been located.
2.
From the Stage / Focus Surface panel, use the SPM’s optical system to locate a prominent
feature on the sample surface which is suitable for scanning. Examples include prominent holes
and cornered features, etc. The camera should be zoomed out to maximum.
3.
Center the screen’s cross-hairs exactly over the feature to be scanned, then click on Quit to exit
the Focus Surface panel.
4.
Verify that the X offset and Y offset values on the Main Controls screen are set to zero (0).
Engage the sample surface and begin scanning until a full-frame view of the surface is obtained.
The Scan size field should be sufficiently large (50—90 µm) to completely image the prominent
feature(s) selected.
Survey the location of the prominent centering feature on the Display Monitor’s scanned image.
5.
Note:
If the feature is located at the center of the Display Monitor, the SPM is centered and
will require no further adjustment. The operator may skip the Set Image Center
procedure.
Note:
If the feature is off-center, proceed to step #5.
Click on the Stage / Set Image Center option. A panel will display the various options for Set
Image Center:
Figure 9.11a Set Image Center
Set Image Center
Locate
6.
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Set
Reset
Click the Locate option in the Set Image Center panel; a caution will be displayed on the screen:
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Stage and Recipe Menus
Initialize
Figure 9.11b Set Image Center
Set Image Center
Please do not use <Execute> on the image screen
Ok
Note:
The prompt in Figure 9.11b is designed to remind operators not to use the Execute
option at the top of the Display Monitor. If Execute is used, the computer will
attempt centering the image with X and Y offsets, rather than by correcting from the
stage; this will not correct the offset error.
7. Click on OK in the prompt panel to continue; a cursor (cross-hairs) will then appear on the Display
Monitor.
8. Use the mouse to move the Display Monitor cursor (cross-hairs) onto the feature, then click the
mouse to lock the cursor in place. Click on the Set option in the Set Image Center panel. This will
establish the stage’s correction offset between the images centered in both the optical system and
SPM Display Monitors; subsequent engagement of the surface should occur beneath the tip as
viewed from the optical system monitor.
Clear an Image and Center Stage Offset
If the previously selected image center offset is no longer accurate due to tip replacement, etc., the
operator may clear the offset by clicking the Clear option in the Set Image Center panel. This can be
done before setting a new image center.
9.12 Initialize
The Initialize option is used by the system software to locate home pulses on the stage slides’ linear
encoders. When executed, the stages are exercised to their limits of travel and the stage is parked in the
center position. Initialization must be executed under the following conditions:
a. Use Initialize whenever the computer has been turned off.
b.
Use Initialize whenever the stage has been manually moved while not under software
control.
9.12.1 Procedures for Using the Initialize Command
1.
Click on the Stage / Initialize option. The screen will offer a menu of short options:
Figure 9.12a Stage Panel
Stage
Initialize
22
Cancel
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SPM Parameters
2. Before beginning initialization, check that the stage is clear of loose items and debris, and that
operators are clear. To begin initialization, click on Initialize. As the stage begins a series of
motorized movements, the screen will indicate operating status:
Figure 9.12b Stage Panel
Stage
Initializing—Press <F12> to abort
3. The initialization sequence may be aborted at any time by pressing the F12 key. When the stage
has completed its initialization sequence, it will park at the load/unload position.
9.13 SPM Parameters
The SPM Parameters menu lists the most important Z-axis parameter values for loading/unloading the
stage and engaging samples.
Select the SPM Parameters command to access the SPM Parameters panel (See Figure 9.13a).
Figure 9.13a SPM Parameters
Parameters on the SPM Parameters Panel
Sample Clearance:
Sets the distance that the tip should be above the surface to allow reasonable
clearance above the sample when moving the trackball.
Range or Settings:1000
SPM safety:
Sets the distance of the tip above the sample surface where the fast approach
segment of the engage process ends, and the slow approach begins.
Range or Setings:100
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SPM engage step:
Sets the step size (in microns) that is used while approaching the surface, during the slow engage portion of the engage (i.e., -1.0µm is safest).
Range and Settings: Less than 1µm
Load/Unload height:
Sets the distance the tip should withdraw to, above the surface, when loading
or unloading a sample (See Section 9.3).
SPM exclusion limit
(Read-only):
Value in counts below the focus surface height (i.e., Sample Clearance height)
below which trackball motion is excluded (disabled) to help protect against
accidentally driving the tip in to the surface or tip-x cassette. This value is set
by the Set Z Exclusion command (See Section 9.14).
9.14 Z Exclusion for Two Substrate Thicknesses [5.12 r1]
The Z Exclusion Zone feature allows you to set two independent trackball protection, or exclusion,
zones. You can run two thickness samples and teach an exclusion zone for each sample. When changing
from one sample thickness to another, you can enable or set which exclusion zone setting is active.
There is a distinct menu option for enabling (that is, Enable Protection) and disabling (that is, Disable
Protection) the Z Exclusion Zone settings (see Figure 9.14a).
9.14.1 Z Exclusion Submenu Items
The new Z Exclusion Zone functionality adds five submenu items to the Z Exclusion command (see
Figure 9.14a).
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Figure 9.14a Z Exclusion Menu After Stage Initialization and Service Access
24
•
Teach Z Exclusion Zone(s)—Accesses the Set Z Exclusion dialog box.
•
See Which Zone is Active—Accesses a dialog box to show the active zone.
•
Set Which Zone is Active—Accesses a dialog box to change the active zone.
•
Enable Protection—Activates the settings taught for Zone 1 or Zone 2.
•
Disable Protection—Disables the settings taught for Zone 1 or Zone 2.
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9.14.2 Z Exclusion Warning Prompts
Upon entering the system, a warning prompts you to enable the Z Exclusion Zone settings. Also, if a
thick and thin zone have been taught, a warning appears as a reminder to verify which sample is loaded.
Procedures to Disable the Warning Prompts
An added feature disables the warning prompts that appear when opening your NanoScope software. To
disable these prompts complete the following:
1. In your NanoScope System files, locate the Par/STAGE.PAR file.
2. Locate the Exclusion Warning Level option.
3. Set the option to 0 for suppressing the warning prompts for Z Exclusion.
4. Setting the option to 1 enables the warning prompts.
9.14.3 Procedures to Enable Z Exclusion
1. Initialize the stage (Real Time > Stage > Initialize).
2. In the Stage menu, select Z Exclusion > Teach Z Exclusion Zone > Zone 1.
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Figure 9.14b Teach Zone 1
Note:
A reminder to load a sample and initialize the stage appears (see Figure 9.14c).
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Figure 9.14c Teach Z Exclusion Prompt
3. Verify that your sample is on the chuck or stage.
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4. Verify that Locate Tip is complete.
5. Set the SPM parameters (Stage menu > SPM Parameters) appropriate for your sample.
Move the Tip with the Trackball
1. While looking at the probe and surface to verify a safe distance of tip to sample, roll the trackball
slowly (that is, toward you) to lower the probe to approximately 5 mm above the surface.
2. Select the Focus Surface command (Stage > Focus Surface) (See Figure 9.14d).
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Figure 9.14d Auto Focus/Trackball Settings Enabled
3. Set the Illumination setting (that is, percentage of lightness) to view the cantilever in your vision
window.
4. Lower or raise the probe (that is, using the trackball) slowly to focus on the surface.
CAUTION: Tip crashes can occur with the trackball fully enabled. Be careful when
moving the tip toward the sample in focusing on the surface.
5. Bring the surface into sharp focus to set the Z Exclusion Zone level.
Note: This setting enables the system to remember the accepted level as the lowest point
which the trackball can safely travel.
6. Click OK to accept this distance.
7. Select Z Exclusion > Enable Protection.
Verify Which Zone is Active
1. Select Z Exclusion > See Which Zone is Active.
2. Verify that Zone 1 is active.
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Figure 9.14e Verify Zone 1 is Active Prompt
For additional substrate thicknesses, follow the 9.14.3 for Setting the second Z distance (that is, Zone 2).
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Chapter 10 Offline File Menu
The pull-down File menu features a number of basic commands to facilitate the preview, transfer,
copy, and deletion of files. File commands in this chapter include:
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Browse Section 10.2
•
Multi View Section 10.3
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Select Section 10.4
•
Sort Section 10.5
•
Move Section 10.6
•
Copy Section 10.7
•
Delete Section 10.8
•
Rename Section 10.9
•
Create Directory Section 10.10
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Overview
10.1 Overview
Select the File menu to execute commands to open, save, copy, rename or move to a specific folder
menu (See Figure 10.1a).
Figure 10.1a Off-line File Drop-down Menu
Off-line files are displayed on the Control Monitor using the Files screen shown in Figure 10.1b. At
the top of the panel, all available disk drives are displayed; drives are selected by clicking on them
with the mouse. On the left side of the Files panel is a directory tree for the selected disk drive. A
slider bar permits you to navigate through the tree and select directories. Files contained within the
current directory display on the right side of the screen.
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Overview
Figure 10.1b Off-line Files Screen
In the File commands, select individual files by clicking on them with the mouse. To select more
than one file, press the SHIFT or CONTROL keys simultaneously. The procedure for these functions
are as follows:
Shift Key Function for Selecting Files
To select a serialized group of files, hold down the SHIFT key while dragging the mouse over the
files to be selected. All selected files are highlighted. Release the mouse and SHIFT key after all
selected files are highlighted.
Control Key Function for Selecting Files
To select a composite group of files, hold down the CONTROL key and click on individual files oneby-one with the mouse. All selected files are highlighted. Release the mouse and CONTROL key
after all selected files are highlighted.
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Browse
10.2 Browse
The Browse command previews up to twenty-four image files on the Display Monitor. Image files
may take the form of single, dual, or triple images, depending on how many channels were enabled
during Capture. The Browse command allows isolating and comparing two or three images within
a single file, or comparing separate images from separate files.
Figure 10.2a Browse Image Files Types
AFMdata.000
AFMdata.002
AFMdata.003
CITSdata.000
Single-image file
Two-image file
Three-image file
CITS file
Note:
The two-image and three-image files are not distinguishable from each other on
the browse screen.
Refer to the following Browse sections:
•
Browse Panel Section 10.2.1
•
Browse Display Monitor Section 10.2.2
•
File Menu Command Section 10.2.3
•
Select Menu Command Section 10.2.4
•
View Menu Commands Section 10.2.5
•
Auto Menu Commands Section 10.2.6
•
Page up Menu Command Section 10.2.7
•
Page down Menu Command Section 10.2.8
•
Hints to optimize the Browse Command Section 10.2.9
•
Procedure to Use the Browse Command Section 10.2.10
10.2.1 Browse Panel
The following panel is displayed on the Control Monitor, allowing the Color table, Color
contrast, and Color offset of images to be adjusted
(See Figure 10.2b).
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Browse
Figure 10.2b Browse Panel
Parameters in the Browse Panel
•
Color Table—Number (0 - 21) designates color for the displayed images (e.g. 0 shows
black and white image).
•
Color Contrast—Number (0 - 10) designates contrast of colors in displayed image (e.g.,
0 shows little change, while 10 shows highest contrast).
•
Color Offset—Number (0 - 120) designates offset of colors in displayed image (e.g.,
120 shows illuminated background on image).
•
Browse Channel Pref—For multiple images, selects which channel image appears on
top of the Browse Display Monitor.
10.2.2 Browse Display Monitor
Image files can be previewed quickly using Browse; the subcommands allow files to be selected
and configured. The Display Monitor includes: menu bar, up to 24 thumbnail images and menu
commands including (SeeFigure 10.2c): File, Select, View, Auto, Page Up, Page Down
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Browse
Figure 10.2c Browse Display Window
10.2.3 File Menu Command
Move—Accesses the Move panel, allowing files to be moved from the current directory and/or
disk to another directory (See Figure 10.2d).
Figure 10.2d Move File Panel
Parameters in the Move Panel
•
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From and To—From refers to the current file name; To allows entry of the path where
the file will be moved. The current directory displays at the top of the panel.
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Browse
Copy—Accesses the Copy panel, allowing files to be copied (See Figure 10.2e).
Figure 10.2e Copy Files Panel
Parameters in the Copy Panel
•
From refers to the current file name; To allows entry of the path where the file will be
copied. The current directory displays at the top of the panel.
Delete—Removes selected image file(s) from the current directory.
Rename—Accesses the Rename panel. The Rename panel allows you to rename selected
files (See Figure 10.2f).
Figure 10.2f Rename Panel
Parameters in the Rename Panel
•
From refers to the current file name; To allows entry of the new file name. The current
directory displays at the top of the panel.
•
Rename with sequential file extensions—Names file extensions with sequential
extensions (i.e., *.000, *.001, *.002)
10.2.4 Select Menu Command
Contains the file handling subcommands All, None, Page, Name, and Invert.
•
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All—Selects all of the images within the directory.
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Browse
•
None—Deselects (removes the X marker) all of the images within the directory.
•
Page—Selects the twenty-four images currently displayed on the page.
•
Name—The Select By Name panel appears on the Control Monitor, allowing the
selection of images by name (See Figure 10.2g).
Figure 10.2g Select By Name Panel
Note:
•
Using one of the DOS “wild card” symbols allows you to select more than one
file at a time. The * symbol allows selection of files with matching name
strings. For example, typing image*.* selects all of the files beginning with the
word “image”.
Invert—Reverses the current command. For instance, if all the images in the directory
are selected, the Invert command deselects all the images (removes the X marker).
10.2.5 View Menu Commands
Contains the file-handling subcommands Dual and Multi.
•
Dual—Two images may be selected and displayed
side-by-side in the dual-screen display. The two selected files may be composed of
either single or dual images. If dual images are selected, only the front images is used.
•
Multi—Displays from two to six images on the Display Monitor in 256 x 256 format. If
more than six images are selected, the first six images are displayed in the selected
order.
10.2.6 Auto Menu Commands
Initiates the currently selected Auto Program file. The file can be selected with the Auto Program
File command in the Utility menu. The Auto Program file should be created by selecting the
AUTO PROGRAM button in the desired commands in the desired order.
The panel in Figure 10.2h appears on the Control Monitor, allowing you to select the format of the
output file.
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Browse
Figure 10.2h Auto Output File Panel
The form of the output file selected depends on the type of printer that is available. If a Postscript
compatible printer is to be used, select Postscript; otherwise ASCII is a more appropriate
selection.
Note:
If a custom report maco file is loaded on the system, the Auto Output File
panel includes a Custom format.
The NOTE button accesses a panel to insert a message to be inserted in the output file.
10.2.7 Page up Menu Command
Pages to the previous images (twenty-four maximum).
10.2.8 Page down Menu Command
Pages to the next images (twenty-four maximum).
10.2.9 Hints to optimize the Browse Command
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•
Select the desired image(s) before selecting a command.
•
Clicking on selected images a second time removes the X marker.
•
DOS file conventions apply to filenames and directories.
•
When renaming images, the extension can be specified to begin numbering at any
specified value. For example, if the new base name “.055” is specified, the first image is
renamed “.055,” the second “.056”...to the end of the images.
•
Sequential images listed after the selected image are displayed. To view files out of
sequential order, use the Multi View command described in Section 10.3.
•
Spectroscopic and force plots are not displayed unless in Force Calibrate mode.
•
Up to twenty-four images can be selected across page boundaries.
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Browse
•
The ESC key or space bar may be used to interrupt the preview of all twenty-four
images. This can save time if the desired image previews early in the list.
•
A Browse subdirectory is created in the currently selected directory. This subdirectory
contains low-resolution forms of the browsed images to speed up subsequent browses.
10.2.10Procedure to Use the Browse Command
To perform any Browse command displayed on the Display Monitor’s menu bar, complete the
following:
1. Select the first image in the file list on the Control Monitor.
2. Click the Browse command to view all the images in the directory (i.e.,twenty-four
maximum).
Note:
Image selection can be performed across pages.
3. Using the mouse, select the image or images that you want to configure.
4. Select the desired command.
See also: Off-line/View/Topview panel: Color table, Color offset, Color contrast, and Z range
parameters; Offline /Image panel.
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Multi View
10.3 Multi View
The Multi View command is similar to the Browse command; however, Multi View allows you to
choose specific files to preview rather than viewing all of the images after the selected file. Multi
View previews up to six image files (256 x 256 format) on the Display Monitor. Use the CTRL key
to choose single files and the SHIFT key to choose file ranges.
Figure 10.3a shows the Multi View panel, allowing you to adjust the Color table, Color contrast,
Color offset and Browse Channel Pref.
Figure 10.3a Multi View Panel
Parameters in the Multi View Panel
•
Color Table—Number (0 - 21) designates color for the displayed images (e.g. 0 shows
black and white image).
•
Color Contrast—Number (0 - 10) designates contrast of colors in displayed image (e.g.,
0 shows little change, while 10 shows highest contrast).
•
Color Offset—Number (0 - 120) designates offset of colors in displayed image (e.g.,
120 shows illuminated background on image).
•
Browse Channel Pref—For multiple images, selects which channel image appears on
top of the Browse Display Monitor.
•
Comment—Appends a comment to the saved Multi View images.
•
Quit—Exits the Multi View panel.
10.3.1 Multi View Display Monitor
Up to six images in the 256 x 256 format are shown on the Display Monitor. The images are
displayed without rotation and with the default Z range for that image.
If more than six images are selected, the first six images are displayed in the selected order.
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Offline File Menu
Select
Example of Multi View Function
To quickly preview the images in a directory, use the CTRL key to select the desired images in the
file list and use the Multi View command to view the selected images, up to six at a time.
10.4 Select
The Select command (File/Select) selects images within the open directory by using one of the
Select subcommands (See Figure 10.4a).
Figure 10.4a File/Select Drop-down Menu
10.4.1 Select Subcommand Menu
All—Selects (highlights) all of the files in the directory.
None—Deselects any selected files in the directory.
Name—The Select By Name panel appears on the Control Monitor, allowing you to select images
by name. Using one of the DOS “wild card” symbols to select more than one file at a time (e.g.,
Typing image*.* selects all of the files beginning with the word “image") (See Figure 10.4b).
Figure 10.4b Select By Name Panel
image*.*
Invert
Reverses the current file selection. For instance, if one file is selected, the Invert command
deselects that file and selects all of the remaining files in the directory. This command performs the
opposite command.
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Sort
10.5 Sort
The Sort command sorts images within the open directory by using one of the Sort subcommands.
Figure 10.5a File/Sort Drop-down Menu
10.5.1 Sort Subcommand Menu
Name—Sorts files alphabetically by filenames.
Extension—Sorts files alphabetically by their three letter file suffix.
Date—Sorts files by file creation date.
None—Returns the files to their original order before using the Sort command.
10.6 Move
The Move command functions almost exactly the same as Copy; however, it also deletes moved
files from their source directory. The Move command transfers the selected image to the drive and/
or directory you specify.
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Move
The Move panel allows you to move a file.
Figure 10.6a Move Panel
From—The source drive\directory\filename to be moved.
To—The new location of the drive\directory\filename being moved.
Ok—Completes the Move command.
Cancel—Aborts the Move command.
Hints for Optimizing the Move Command
The following are hints to optimize the Move function:
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•
The default To filename is the same as the From filename. This default filename can be
changed by selecting the To field and typing a new name.
•
The desired partition and directory can be entered directly for the To directory; however,
the entered directory must already exist, and the partition must be valid. The entry form
should be partition:\directory.
•
If a file with the same name already exists, the software asks whether to overwrite or
supply a different filename.
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Copy
10.7 Copy
The Copy command duplicates the selected image and results in two identical images. An identical
image with a new name can be created in the current directory, or a copy can be created in a new
directory and/or partition with the same name or a new name.
Use the Copy panel shown in Figure 10.7a to copy files to/from any directory accessible by the
microscope computer. Normal DOS file conventions should be observed.
Figure 10.7a Copy Panel
10.7.1 Parameters in the Copy Panel
From—The directory and name of file to be copied (e.g., C:\images\fileorig.001).
To—The directory and name of the file being assigned the file copy (e.g.,
C:\images\filecopy.001).
Ok—Completes the Copy command.
Cancel—Aborts the Copy command.
Hints for Optimizing the Copy Command
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The default To filename is the same as the source filename. When copying an individual
file, the name of the copy can be changed by selecting the To field, then typing a new
name.
•
The desired partition and directory can be entered directly for the To directory; however,
the entered directory must already exist, and the partition must be valid. The entry form
should be partition:\Directory.
•
If a file with the same name already exists, you are asked whether to overwrite or supply
a different filename.
•
You can also use the Copy subcommand of the Browse command to copy files.
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Delete
10.8 Delete
The Delete command eliminates the selected image from the disk.
The Delete panel allows you to delete a selected filename. Normal DOS file conventions should be
observed.
Figure 10.8a File Delete Panel
Hints for Optimizing the File Delete Command
•
Confirmation is requested for the Delete command to prevent accidental removal of
files.
•
The default name is the file selected when the command was given. A different file can
be entered by selecting the filename and typing in another filename.
•
The Delete command may also be used to delete empty directories.
•
You can also use the Delete subcommand of the Browse command to delete files.
10.9 Rename
The Rename command changes the name of the selected file.
The Rename panel allows you to rename selected files.
Figure 10.9a Rename Panel
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Create Directory
10.9.1 Parameters in the Rename Panel
From—Refers to the old file name.
To—Names the new file name.
Rename with sequential file extensions—If the To filename is given a numeric extension,
subsequent files with the same filename are assigned incremental, sequential extensions.
Ok—Completes the name change.
Cancel—Aborts the Rename command, leaving the filename unchanged.
See also: Offline /File menu: Delete, Copy, and Move commands.
10.10Create Directory
The Create Directory command allows creation of additional directories in the Current directory.
Directories created with this command are subsequently recognized by all MS-DOS commands.
The Create Directory panel shown in Figure 10.10a is displayed on the Control Monitor. Enter the
directory to be added into the Name field, then click on the OK button.
Figure 10.10a Create Directory Panel
New directories are placed in the Current directory shown in the panel. If the new directory is to
go to a different drive or directory other than the one displayed, Cancel the Create Directory
panel, and use the Files panel on the Offline screen to specify a new Current directory. Reenter
the Create Directory panel and enter the new directory name.
Note:
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You can also create a directory on a different drive by specifying the path as
part of the directory name, using the format
drive:\directory\filename
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Chapter 11 Offline Image Menu
The Image menu commands allow the user to view two- or three-image files, and then select a
single image for further analysis (e.g., Select Left Image, Subtract, and Offset).
Note:
The Image menu only appears after multiple image files are selected.
This chapter includes the following Image commands:
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Dual Section Section 11.2
•
Select Left Section 11.3
•
Select Right Section 11.4
•
Subtract Image Section 11.5
•
Amp/Phase to Amp SinPhase/Amp Cosphase Section 11.6
•
Split Images Section 11.7
•
Offset Section 11.8
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Image File Types
11.1 Image File Types
Image files may take the form of single, dual, or triple images, depending upon how many channels
were enabled during Capture. It is sometimes necessary to isolate and compare two or three
images within a single file, or to compare separate images from separate files. The commands in the
Off-line/Image menu make image isolation and comparison possible. Look for the layered display
of boxes denoting multiple images (See Figure 11.1a).
Figure 11.1a Browse Image Files Types
AFMdata.000
AFMdata.002
AFMdata.003
CITSdata.000
Single-image file
Two-image file
Three-image file
CITS file
Displayed menu commands depend on the type of image file(s) selected (See Table 11.1a).
Table 11.1a Image File Types and Menu Commands
Image File Type Selected
Image Menu Commands Displayed
Two-image files, or
Dual Section
two single-image files selected simultaneously using the Browse command.
Select Left Image
Select Right Image
Subtract Images
AmpPHase to amp Sinphase/ampCosphase
Split Images
Offset
Three-image files
Select First Image
Select Second Image
Select Third Image
Amp Phase to amp Sinphase/amp Cosphase
Note:
The Image menu only appears in the Off-line mode when selecting the
following:
•
multiple (two or three) image files
•
two (simultaneous) single-image files using the Browse screen
Figure 11.1b shows the menu for two-image files.
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Image File Types
Figure 11.1b Dual-Image Drop-down Menu
Figure 11.1c shows the drop-down menu for three-image files.
Figure 11.1c Three-Image Drop-down Menu
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Dual Section
11.2 Dual Section
The Dual Section command allows you to analyze surface profiles. When sectioning two images,
the section profile is identical in each image (i.e., when cursor moves on one image, the identical
position and size moves on the second image). This feature is similar to Section Analysis. For
complete details on Section Analysis, see Chapter 14.
Refer to the following Dual Section topics:
•
Section Panel Section 11.2.1
•
Section Display Monitor Section 11.2.2
•
Section Display Monitor Menu Commands Section 11.2.3
11.2.1 Section Panel
The Section panel appears to control the image colors and aspect ratio
(See Figure 11.2a).
Figure 11.2a Section Panel
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Dual Section
11.2.2 Section Display Monitor
The Section monitor includes: the two images, a spectrum graph, two statistic boxes, a crosssectional profile, a menu bar and a status bar
(See Figure 11.2b).
Figure 11.2b Image Section Display
Menu Bar
Green
Reference
Markers
Red Cursor
Area
Measurements
CrossSectional
Profile
Statistics
of Green
Cursor
Area
Green
Cursors
Red
Cursors
FFT
(Spectrum)
Status
Bar
11.2.3 Section Display Monitor Menu Commands
The menu bar commands control specified areas of the image to be analyzed. The menu commands
include:
Cursor
•
Fixed—Allows a fixed line cursor to be drawn in area and displays this data in the
Cross-sectional profile and Spectrum Graph.
•
Moving—Allows a fixed-position line to be drawn on the images and places a moving
reference line perpendicular to the fixed line. The Cross-sectional profile and FFT
(Spectrum Graph) displays data from the reference line.
•
Average—Allows a fixed-position reference line to be drawn on the image and places a
box parallel to the reference line.
Spectrum Zoom
Controls the magnification of the Spectrum window:
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Dual Section
•
8:1—Interpolates data between reference markers in an 8 to 1 ratio
•
4:1—Interpolates data between reference markers in a 4 to 1 ratio
•
2:1—Interpolates data between reference markers in a 2 to 1 ratio
•
1:1—Interpolates data between reference markers in a 1 to 1 ratio
Center Line
Displays the calculated center line (local RMS) between cursors on the Cross-sectional profile.
The center line displays in white with green and red reference markers.
Range and Settings:
•
On and Off—Switches the center line on or off between cursors. If the Center Line
subcommand is ON, each time the markers are repositioned a line appears (i.e., the first
line is red for the red markers, then green and the last is white).
Offset
Allows the center line cursor to be arbitrarily moved so the viewing window can be shifted relative
to the data. To move the center line, drag with the mouse:
Offset Range and Settings:
•
On—Turns Offset on by displaying the t-cross reference markers positioned in the
images.
•
Off—Turns Offset off by anchoring the center line at “0.”
•
Cursor Clear—Anchors the center line at its currently set position.
Clear
Removes the Profile and Spectrum windows and clears the reference marker measurements to
allow new reference lines to be selected.
See also, Offline/Analyze/Section.
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11.3 Select Left
Select Left
The Select Left command appears only when dual-image files are selected. It places only
the left image from the current file on the Display Monitor.
The Off-line menu bar appears when the single image is selected and displayed for
individual analysis.
11.4 Select Right
The Select Right command appears only when dual-image files are selected. It places only
the right image from the current file on the Display Monitor.
The Off-line menu bar appears when the single image is selected and displayed for
individual analysis.
11.5 Subtract Image
The Subtract command appears when either a dual image file is selected, or two singleimage files are selected by executing the Dual command from the Browse screen. It allows
one image to be subtracted from another.
If the Data type for the images is different, panels appear, allowing you to enter Relative
Z scale values for each image. In either case, another panel appears so the resultant file can
be named and stored.
Figure 11.5a Image Relative Z Scale Pane
Hints for Optimizing the Subtract Command
•
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When Data types are the same, the second (right) image is subtracted from the
first (left) image.
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Amp/Phase to Amp SinPhase/Amp Cosphase
•
When Data types are not the same, the calculation is performed as follows:
First (left) Relative Z scale * first (left) image – second (right) Relative Z scale *
second (right) image = New Image
•
The images must be the same Scan size and contain the same number of data points
(i.e., Number of samples must be equal).
•
The Relative Z scale parameter must be less than 10,000 and greater than 0.0001.
•
Two separate images can be put together for the sake of this command with the Dual
subcommand under the Off-line / Browse command.
•
Limitations built into the command are not that stringent. Just because the command
subtracts two images does not mean that the result is useful.
See also: Off-line/File menu: Browse/Dual subcommand.
11.6 Amp/Phase to Amp SinPhase/Amp Cosphase
In this function, dual images, which were obtained in Force Modulation appear on the Display
Monitor. The left image is an amplitude image and the right is a phase image (i.e., Amp/Phase). The
command creates two new images:
1. The left image is the amplitude image multiplied by the sine of the phase image.
New left Image = old left point * sin (old right point)
(EQ 1)
2. The new right image is the amplitude image multiplied by the cosine of the phase image.
New right image = old left point * cos (old right point)
(EQ 2)
11.6.1 Control Panel
After Amp/Phase to Amp Sinphase/Amp Cophase is selected, a Save As file panel appears to
store the two new images (See Figure 11.6a).
Note:
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Open the new files in Windows Explorer using your local simpletext editor.
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Split Images
Figure 11.6a Save As File Panel
11.7 Split Images
The Split Images command appears only when a two or three image file is selected. It places all
images from the current multiple image file on the Display Monitor in two- or three-image format.
These separated images may then be saved as separate files.
Note:
The Off-line menu bar is truncated by this command, because images must be
processed individually.
Figure 11.7a Split Images Panel
11.8 Offset
The Offset command displays in the two or three-image file menus and allows for a comparison of
visual data. Clicking on this function creates a center line reference marker on each image. Position
a marker and drag the mouse to reposition markers for comparing data in the multiple images.
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Chapter 12 Offline View Menu
View menu commands allow previously captured files to be displayed in various formats. This
chapter includes the following View functions:
•
Top View Section 12.1
•
Line Plot Section 12.2
•
Quick Surface Plot Section 12.4
•
Parameter Section 12.5
•
Graph Section 12.6
Not all commands are set by default. To access the entire list available, use the Customize function
(Off-line/DI/Customize/View Menu).
Commands providing a top view and selectable oblique views are available for image files. The
Graph command appears when force calibration curves are selected. The Image command appears
when you select dual image files.
12.1 Top View
The Top View command displays the selected image from a top-down perspective. The X and Y
information is in the plane of the monitor, and the height information is represented by the color at
a given point. You can calculate the distance and angle between features, as well as the angle
between planar features. Access Top View by clicking on the icon below the menu bar or entering
the following path: Off-line/View/Top View.
Figure 12.1a View Menu
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Top View
12.1.1 Top View Control Monitor
The Top View panel is displayed on the Control Monitor, allowing the appearance of the image on
the Display Monitor to be adjusted to your preference (See Figure 12.1b).
Figure 12.1b Top View Panel
12.1.2 Parameters in the Top View Panel
Plot type
Selects the mode in which the data is displayed: Height, Illuminate, or the contrast-enhanced
Equal area mode.
Range and Settings:
•
Equal area—Applies a contrast-enhancing function
to the data.
•
Height—The image is displayed with the height values at each point encoded according
to the color table.
•
Illuminate—The image is displayed as if a light source is shining on the sample surface
from a selectable direction.
Note:
In the Equal area mode, the Z range and Illuminate parameters have no effect
on the display.
Note:
The Illumination parameter on the Top View panel affects the display only if
Illuminate is selected as Plot type.
Rotation
Selects the angular orientation of the displayed image relative to the captured image.
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Range & Settings:
•
0—No rotation.
•
90—Rotates image 90 degrees counterclockwise.
•
180—Rotates image180 degrees counterclockwise.
•
270—Rotates image 270 degrees counterclockwise.
Data scale
Controls the vertical range of the image, corresponding to the full extent of the color table.
Range & Settings:
•
This parameter is head- and scanner-dependent, and the units vary according to the type
of image (e.g., nm, nA, etc.).
•
This parameter applies only to height data.
Color table
Selects which color table is used by the display commands to encode the Z information.
Range & Settings:
•
0—21
Note:
Color tables 0 through 3 are built into the NanoScope software. Tables 4
through 21 are from color table files you can access and modify with the Offline/Utility/Color table command.
Note:
This parameter has an immediate effect on the image and any visible color bar.
Plot labels
Selects which axes and labels display with the image. This parameter is useful for generating hard
copies for presentation. You can display and print images with the amount of information you
choose to include.
Range & Settings:
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All—Includes plot axes, color bar, file name, and information label.
•
Axes—Includes the plot axes and the color bar.
•
None—Displays image by itself.
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Top View
•
Big Note—Includes plot axes, color bar, and a
double-sized label.
Illumination
Selects the position of the imaginary light source used to highlight features if you have selected
Illuminate as the Plot type.
Range & Settings:
•
Top—Illumination is from directly above the image.
•
Right—Illumination is from above and to the right of the image.
•
Front—Illumination is from above and to the front of the image.
•
Left—Illumination is from above and to the left of the image.
•
Back—Illumination is from above and to the back of the image.
Note:
This parameter only takes effect when the Plot type parameter in the Top View
panel is set to Illuminate.
Color contrast
Compresses or expands the color table about its center, effectively increasing or decreasing the
image contrast.
Range & Settings:
•
± 10
Note:
This parameter has an immediate effect on the image and any visible color bar.
Color offset
Adds or subtracts a constant offset from each color table index, shifting the color scale up or down.
Range & Settings:
•
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±120 As the color table shifts upward or downward, the bottom or top color continues to
fill in the offset.
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12.1.3 Buttons on the Top View Panel
Note
Allows a descriptive message and time stamp to be added to the display (See Figure 12.1c). The
note can be up to 32 characters.
Figure 12.1c Note Panel.
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Top View
Auto Program
The AUTO PROGRAM button accesses the Auto Program Edit panel. In this panel, the Top View
command is saved or deleted from the currently selected Auto Program file (See Figure 12.1d).
Figure 12.1d Auto Program Edit Panel
Note:
The Auto Program File command in the Utility menu must be used to select or
create an auto program file.
Use the Auto subcommand under the Browse command to select files to be processed and to
execute the Auto Program file.
Quit
Exits the Top View command.
12.1.4 Top View Display Monitor
The Display Monitor includes the image, the color bar used to encode the height information, a
menu bar, and a status bar (See Figure 12.1e).
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Top View
Figure 12.1e Top View Display Monitor.
Color Bar
Menu Bar to
Execute Top
View Analysis
Note and/or
Time Stamp
Top View Menu Bar Commands
The commands in the menu bar let you use the mouse to determine point-to-point distances and
angles on the captured image.
Height
Allows you to measure the change in height and the distance between points on an image. When
more than one line is drawn, the sum of the line lengths and the average line length are reported in
the status bar on the Display Monitor.
Mouse Operations
•
1st click, left button—Fixes the position of the first point. A line segment “rubberbands”
from the point as the mouse is moved.
•
2nd click, left button—Fixes the position of the second point.
•
Subsequent clicks—Pick up the end of the line closest to the cursor. A second click fixes
the point.
•
Click on Height again to remove line cursor.
Angle
Allows angular features to be measured on the image.
Mouse Operations
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Top View
•
1st click, left button—Defines the vertex of the angle. A line segment expands from the
point as you move the mouse.
•
2nd click, left button—Defines one leg of the angle. The other leg swings out as the
mouse is moved.
•
3rd click, left button—Fixes the position of the second leg of the angle.
•
Subsequent clicks—Pick up the leg of the angle closest to the cursor. Another click fixes
the leg.
•
Click on Angle again to remove angle from image.
Surface Normal
Calculates the angle between two planes you define. This subcommand performs a least-squares
plane fit on the data in the two boxes, then calculates and reports the angle between vectors
perpendicular to
the calculated planes.
Mouse Operations
•
1st click, left button—Defines the corner of the first box (shown with red perimeter
lines). A box expands from the point as the mouse is moved.
•
2nd click, left button—Defines and expands the opposite corner of the first box.
•
3rd click, left button—Defines the corner of the second box (shown with green
perimeter lines). A box expands from the point as the mouse is moved.
•
4th click, left button—Defines and expands the opposite corner of the second box.
•
Subsequent clicks—With cursor inside a box, picks up the entire box. With cursor on
edge or corner, resizes box. Another click fixes the box position.
•
Click on the Surface Normal command again to remove the boxes from the displayed
image.
Clear Calculator
Zeros the sum and average values reported for the Height subcommand.
Note:
In the typical color table, lighter colors represent taller positions while darker
shades represent lower positions on the sample. However, this is flexible. A
wide variety of color tables is available, and almost any color scheme can be
used.
See also: Off-line/View menu: Line Plot and Surface Plot commands.
Off-line/Utility menu: Color table command.
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Line Plot
12.2 Line Plot
The Line Plot command displays the selected image as a series of cross sections in an oblique view.
Select View/Line Plot to access the Line Plot panel (See Figure 12.2a).
Figure 12.2a Line Plot Panel
12.2.1 Parameters on the Line Plot Panel
Line spacing
Controls the horizontal distance between lines in the displayed image.
Range & Settings:
•
2—16
Rotation
Selects the angular orientation of the displayed image relative
to the captured image.
Range & Settings:
•
0—No rotation.
•
90—Rotates image 90 degrees counterclockwise.
•
180—Rotates image180 degrees counterclockwise.
•
270—Rotates image 270 degrees counterclockwise.
Data scale
Defines the vertical range of the color table used to encode the height information in the image.
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Line Plot
Range & Settings:
•
This parameter is head- and scanner-dependent, and the units vary according to the type
of image (e.g., nm, nA).
Color table
Selects the color table used to encode the Z information.
Range & Settings:
•
0—21 (Color schemes are numbered in no particular order.)
Hints for Optimizing the Color Table Command
•
Colors used to construct images are rendered electronically and often bear little
resemblance to the actual sample color. Most scan sizes are below the wavelengths of
visible light.
•
Color tables 0 through 3 are built into the NanoScope software. Tables 4 through 21 are
from color table files which can be accessed and modified with the Off-line/Utility/
Color table command.
•
This parameter has an immediate effect on the image and any visible color bar.
Plot labels
Selects which axes and labels are displayed with the image.
Range & Settings:
•
All—Includes plot axes, color bar, file name, and information label.
•
Axes—Includes the plot axes and the color bar.
•
None—Displays image by itself.
•
Big Note—Includes plot axes, color bar, and a
double-sized label.
Note:
Regardless of the setting of this parameter, the color bar is not displayed when
the Line plot shading parameter on the Line Plot panel is set to White.
Line plot shading
Allows the lines to be displayed in plain white or in color with the color representing the height at a
given point in the image.
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Line Plot
Range & Settings:
•
White—The cross sectional lines displayed are white.
•
Height—The color table is applied to the cross sectional lines which form the image.
Pitch
Selects the pitch of the Y axis in the three-dimensional Line Plot image.
Range & Settings: 30 and 60
Color contrast
Compresses or expands the color table about its center, effectively increasing or decreasing the
image contrast.
Range & Settings:
•
±10
Note:
This parameter only has an effect when the Line plot shading parameter on the
Line Plot panel is set to Height.
Color offset
Adds or subtracts a constant offset from each color table index, shifting the color scale up or down.
Range & Settings:
•
±120 This parameter has an immediate effect on the image and any visible color bar. As
the color table is shifted upward or downward, the bottom or top entry is replicated to
fill in the offset.
Note:
This parameter only has an effect when the Line plot shading parameter on the
Line Plot panel is set to Height.
12.2.2 Buttons in the Line Plot Panel
Note
Allows a descriptive message and/or a time stamp to be added to
the displayed image.
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Line Plot
Quit
Exits the Line Plot command.
See also: Off-line/View menu: Top View and Surface Plot commands.
12.2.3 Line Plot Display Monitor
The Display Monitor includes an image, a color bar and a list of scan parameters (See Figure
12.2b). No menu items exist since the commands execute by using the Line Plot panel.
Figure 12.2b Line Plot Display
Color Bar
Scan
Parameters
12.2.4 Using the Line Plot Command
To produce a hardcopy line plot of an image, complete the following:
1.
Select the image with the mouse.
2. Access the Line Plot command.
3. Adjust the display parameters until the presentation is satisfactory.
4. Quit the Line Plot command and click on the Print subcommand (Off-line/Utility/Print) to
print the displayed image.
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Surface Plot
12.3 Surface Plot
The Surface Plot command displays the selected image with color-coded height information in a
three-dimensional, oblique perspective. You can select the viewing angle and illumination angle for
a modeled light source.
View the Surface Plot by clicking on the Surface Plot icon, or enter the following path: Off-line/
View/Surface Plot.
The Surface Plot panel appears and allows formatting of image data on the Display Monitor
(SeeFigure 12.3a).
Figure 12.3a Surface Plot Panel
12.3.1 Buttons and Parameters in the Surface Plot Panel
Plot Type
Selects data type displayed in Height, Illuminate, or a combination of the two.
Range & Settings:
•
Height—Displays image with the height values encoded according to the color table.
•
Illuminate—Displays image as if a light source is shining on the sample surface from a
selectable direction.
•
Mixed—A combination of height and illumination encoding is used on the displayed
image. The relative weights of the height and illumination are determined by the
Illumination weight parameter on the Surface Plot panel.
Note:
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The Illumination weight parameter only affects the display when the Plot type
is set to MIXED.
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Surface Plot
Rotation
The Rotation parameter in the Surface Plot panel changes the viewing angle by rotating the
displayed image about the Z axis relative to its captured orientation.
Range & Settings:
•
0—360°
Pitch
The Pitch parameter in the Surface Plot panel changes the viewing angle by selecting the pitch (in
degrees) of the Y axis in the three-dimensional Surface Plot image.
Range & Settings:
•
0—90°
Light Hor Angle
The Light hor(izontal) angle parameter in the Surface Plot panel rotates the modeled incident
light source in the horizontal plane (along the Z axis).
Range & Settings:
•
0—360°
Light Ver Angle
The Light ver(tical) angle parameter in the Surface Plot panel selects the vertical angle (in
degrees) for the modeled, incident light source.
Range & Settings:
•
0—90°
Illumination Weight
Selects the percentage of the imaginary light source mixed with the color-encoded height
information when the Plot type is set to Mixed.
Range & Settings:
•
0—100
Note:
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This parameter applied for Plot type set to MIXED.
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Surface Plot
Data Scale
The Data scale parameter in the Surface Plot panel defines the full range of the color bar used to
encode the height information applied to the displayed image.
Range & Settings:
•
This parameter is head- and scanner-dependent, and the units vary according to the type
of image (e.g., nm, nA).
Color Table
The Color table parameter in the Surface Plot panel selects which color table is applied to the Zaxis data.
Range & Settings:
•
0—21: Color tables 0 through 3 are built into the NanoScope software. Tables 4 through
21 are from color table files which can be accessed and modified with the Off-line/
Utility/Color table command.
Color Contrast
The Color contrast parameter in the Surface Plot panel compresses or expands the color table
about its center, effectively increasing or decreasing the image contrast.
Range & Settings:
•
±10
Note:
This parameter has an immediate effect on the image and any visible color bar.
Color Offset
The Color offset parameter in the Surface Plot panel changes the image color by shifting the range
of the color table used to display the image. It adds/subtracts a constant offset from each color table
index, shifting the color scale up/down.
Range & Settings:
•
±120
Note:
As the color table is shifted upward or downward, the bottom or top entry
continues to fill in the offset.
Label
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Surface Plot
The Label parameter in the Surface Plot panel selects whether labels, axes, and the view/
illumination controller are displayed with the image.
Range & Settings:
•
All—Includes the plot axes, scan parameters, and scale.
•
Axes—Includes he plot axes and scale.
•
None—Only the image is displayed.
Note
The Note parameter in the Surface Plot panel enables/disables the note appended to the image and
changes its size on the Display Monitor.
Range & Settings:
•
Big—Large font.
•
Small—Small font.
•
None—No message.
Target
The Target parameter in the Surface Plot panel turns the Display Monitor view/illumination
controller on or off.
Range & Settings:
•
On—Displays illumination controller with the image.
•
Off—Does not display illumination controller.
Note
Allows a descriptive message to be added to the control monitor.
Quit
Exits the Surface Plot mode.
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Surface Plot
12.3.2 Surface Plot Display Monitor
The Display Monitor includes an image, a list of scan parameters and a View/Illumination
controller (See Figure 12.3b).
Figure 12.3b Surface Plot Display
Basic Image
Parameters
View/
Illumination
Controller
The View/Illumination controller, which consists of cross hairs in a circle, can be used to set the
viewing angle and the angle of incidence from an imaginary light source (See Figure 12.3c).
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Surface Plot
Figure 12.3c View/Illumination Controller Operation
view angle
light angle
increasing pitch
and vertical ligh
angle
increasing rotation
and horizontal light
angle
0 deg
12.3.3 The View/Illumination Parameter
The light icon, which is used to position the angle of incidence of the imaginary light source, is the
circle with radial lines. It affects the image if the Plot type is set to either Illuminate or Mixed (if
the Illumination weight in the panel is greater than zero). Placing the light icon at the cross hairs in
the center of the view/illumination controller places the light source directly above the sample.
Moving the light icon toward the circumference of the circle moves the light source toward the
horizon.
The nested square boxes constitute the view angle icon. Placing the view angle icon in the center of
the view/illumination controller provides a top view perspective of the image. Moving the view
angle icon radially toward the circumference of the circle reduces the pitch angle. Rotating the view
angle icon around the circle changes the rotation of the sample.
Hints for Optimizing the Surface Plot Command
•
Height-encoded surface plots (Plot type parameter set to Height) are less susceptible to
high frequency noise and tend to look better than slope-shaded plots (Plot type
parameter set to Illuminate) for images with a large number of features.
•
The Rotation, Pitch, Light hor angle, and Light ver angle can be changed by
changing the position of the appropriate symbol on the view/illumination controller or
by changing the values in the Surface Plot panel.
See also: Off-line/View menu: Surface Plot, Top View, and Line Plot commands.
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Quick Surface Plot
12.4 Quick Surface Plot
The Quick Surface Plot command is similar to the Surface Plot command but has fewer
parameters displayed.
Figure 12.4a Quick Surface Plot Panel
12.4.1 Buttons and Parameters on Quick Surface Plot Panel
Plot Type
Selects whether the data is displayed in the Height or Illuminate mode.
Range & Settings:
•
Height—The image is displayed with the height values encoded according to the color
table.
•
Illuminate—The image is displayed as if a light source is shining on the sample surface
from a selectable direction.
Rotation
The Rotation parameter in the Quick Surface Plot panel changes the viewing angle by rotating the
displayed image about the Z axis relative to its captured orientation.
Range & Settings:
•
0—360°
Data Scale
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The Data scale parameter in the Quick Surface Plot panel defines the vertical range of the color
table used to encode the height information in the image.
Range & Settings:
•
This parameter is head- and scanner-dependent, and the units vary according to the type
of image (e.g., nm, nA).
Color Table
The Color table parameter in the Quick Surface Plot panel selects which color table is applied to
the Z-axis data.
Range & Settings:
•
0—21
Note:
Color tables 0 through 3 are built into the NanoScope software. Tables 4
through 21 are from color table files you can access and modify with the Color
table command.
Plot Labels
The Plot labels parameter in the Quick Surface Plot panel selects whether labels, axes, the view/
illumination controller, or a note are displayed with the image.
Range & Settings:
•
All—The plot axes, scan parameters, and scale are displayed with the image.
•
Axes—The plot axes and scale are displayed with the image.
•
None—Only the image is displayed.
•
Big Note—A note with large font is appended to the image.
Illumination
Images displayed with the Illuminate Plot type appear to be illuminated by a light source. This
parameter varies the position of the light source relative to the sample.
Range & Settings:
248
•
Top—Places the light source directly above the sample.
•
Right—Places the light source on the right side of the sample.
•
Front—Places the light source in front of the sample.
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•
Left—Places the light source on the left side of the sample.
•
Back—Places the light source behind the sample.
Offline View Menu
Quick Surface Plot
Pitch
The Pitch parameter in the Surface Plot panel changes the viewing angle by selecting the
pitch (in degrees) of the Y axis in the three-dimensional Surface Plot image.
Range & Settings:
•
30°, 60°
Color Contrast
The Color contrast parameter in the Quick Surface Plot panel compresses or expands the
color table about its center, effectively increasing or decreasing the image contrast.
Range & Settings:
•
±10
Note:
This parameter has an immediate effect on the image and any visible
color bar.
Color Offset
The Color offset parameter in the Quick Surface Plot panel changes the image color by
shifting the range of the color table used to display the image. It adds/subtracts a constant
offset from each color table index, shifting the color scale up/down.
Range & Settings:
•
±120
Note:
This parameter has an immediate effect on the image and any visible
color bar. As the color table is shifted upward or downward, the bottom
or top entry continues to fill in the offset.
Note [button]
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Offline View Adds
Menua descriptive message and/or time stamp to the displayed image.
Parameter
Quit
Exits the Quick Surface Plot mode.
12.5 Parameter
The Parameter command allows you to select a limited number of parameters which are
subsequently shown on the Display Monitor with the image or force curve in all View
formats.
A representative panel is shown in Figure 12.5a. The actual parameters listed depend on
the type of file selected. The panel shows lists of parameters and their configured setting.
Figure 12.5a Parameter Panel
12.5.1 Measurements in the Parameter Panel
The Parameter panel displays parameters to be displayed with the image. All of the
parameters from the header to the image file are shown, but only selected parameters
may be displayed. You can scroll through the list of parameters by using the Page Up and
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Page Down keys, the Up and Down arrow keys, or by dragging the pointer on the side ofOffline
the View Menu
Parameter
list.
12.5.2 Buttons on the Parameter Panel
Default
The selection defaults to a predefined set of parameters
(Scan size, Setpoint, Scan rate, and Number of samples).
Save Selection
The selected parameters are displayed in a list with the image the next time a View command
is used to display the image.
Save Listing
Accesses the Parameter File panel to create a new file that contains all of the parameters in
the entire list (See Figure 12.5b).
Figure 12.5b Parameter File Panel.
Quit—Exits the Parameter command.
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View Parameter
Menu
12.5.3
Display Monitor
Graph
In several cases, the same parameter appears twice in the list, but the values may be
different. Always use the parameter from the AFM or STM list for different values.
Note:
For dual image files, the Parameter command is not available until
one of the images is selected. The header for a dual image contains
two image lists, one for each image. Both of the image lists are
available with the Parameter command even after one image has
been separated. The first image list corresponds to the left image
while the second image list relates to the right image.
12.6 Graph
The Graph command appears in the View menu when a Force Calibrate function (also
referred to as Force Curve) or Scope Trace is selected. For the Force Curve function,
several formats of the graph axes can be selected.
12.6.1 Graph Control Monitor
The Graph panel displays on the Control Monitor, allowing you to adjust the appearance
of the plot, sensitivity values, displayed units and Spring Constant value. For additional
information on Force Curves, see Chapter 5, Force Mode Section 5.3.
Figure 12.6a Graph of Force Plot Panel
12.6.2 Buttons and Parameters in the Graph Panel
Range
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Controls the range of the vertical axis of the plot. The units of this parameter vary according
Graph
to the type of image.
Force Offset
The distance to offset the plot along the deflection or force axis. This can be set with the
Offset subcommand in the Display Monitor menu.
Display Mode
Changes the format of the displayed data. Several combinations of axes are available. The
selections vary depending on the type of data.
Use the following Display mode options for TappingMode data:
•
Amp v Z—Displays the RMS cantilever amplitude versus the Z position of the
scanner.
•
Amp v Sep(aration)—Displays the RMS cantilever amplitude versus the sampleto-tip separation.
•
The following are for contact mode data:
•
Def v Z—Displays the cantilever deflection versus the Z position of the scanner.
•
Def v Sep(aration)—Displays the cantilever deflection versus the sample-to-tip
separation.
•
Frc v Sep(aration)—Displays the force on the cantilever versus the sample-to-tip
separation. By first placing the cursor at the point of the start of deflection, the Frc
v Sep mode gives a load versus penetration plot of the distance the tip moves
versus force applied to the surface.
Sensitivity
Allows Sensitivity parameter to be determined graphically. Displays change in the cantilever
deflection voltage-versus-piezo———voltage applied to the Z axis (the slope of the force
curve between the cursors) when the probe is on the surface. This value has several important
functions within the Graph command. It must be determined accurately before any data can
be accurately represented.
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Tip Deflection
depends on this value. Therefore, the Tip Force also depends on the
Offline View
Menu
Graph Sensitivity. The tip-to-sample separation is defined by removing this slope from the
deflection data.
Note:
Both cursors should be placed on the sloped
portion of the curve.
Mouse Operations:
Two arrow cursors appear on the plot. A left button click on either cursor picks it up. A
second left button click drops the cursor. When a cursor stops, or is dropped, Sensitivity
parameter changes to the slope of the least-squares fit of the data points between the cursors.
The cursors should be positioned on the downward sloping section of the plot where the tip is
in firm contact with the sample, encompassing as much good data as possible.
Units
Sets the units for all measurements.
Range & Settings:
•
Volts or Metric
Spring Constant
Use the Spring Constant for converting deflection to force. This value must be set accurately
to use the Frc v Sep display mode.
Note
Allows a descriptive message to be added to the display.
Quit
Exits the operation.
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Graph
12.6.3 Display Monitor Graph Commands
Sensitivity
Allows the Sensitivity parameter to be changed graphically.
Direction
This subcommand changes the plot line (trace or retrace) tracked by the Sensitivity and Offset
cursors.
Offset
Allows the Offset parameter to be changed graphically.
Zoom in / Zoom out
Zooms the graph inward or outward.
Z Offset
Activates the center vertical cursor. Moving the cursor and Executing the move shifts the center of
the plot to the cursor.
Execute
Completes the Z Offset command.
Reset
Resets the plot to its original display (erases any offsets and zooms).
Clear
Clears any offset lines (center vertical lines) in the Display Monitor.
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Graph
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Chapter 13 Analysis Commands (A-L)
The commands in the Analyze menu provide methods for quantifying the surface properties of
samples. You may skip though different sections of this chapter, according to your immediate
interests. Commands beginning with the letters M-Z are listed in Chapter 14.
This chapter includes the following Analyze commands:
•
Autocovariance Section 13.2
•
Auto Stepheight Section 13.3
•
Bearing Section 13.4
•
Bearing Compare Section 13.5
•
Depth Section 13.6
•
Grain Size Section 13.7
•
Grain Size Average Section 13.8
Note:
Instructions for highly specialized Off-line Analyze commands (such as LZT Analysis)
are not included in this manual. For more information on these features, please contact
your local sales representative.
13.1 Theory
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See Table 13.1a to review Analyze features and its applications in this chapter.
Table 13.1a Analyze Commands & Applications
Analyze Command
Measure
Depth
Measure
Roughnes
s
Autocovariance
Auto Stepheight
√
Bearing
√
√
Bearing Compare
√
√
Depth
√
√
Grain Size
√
Measure
Power
Spectrum
Grain Size
√
√
Bump Analysis
√
√
Grain Size Average
Numerous books are available which describe image processing with matrices, Fourier analysis and
statistical methods such as autocovariance. Digital Instruments recommends two excellent books
on the subject of image processing by John C. Russ—The Image Processing Handbook (1992,
CRC Press, Inc., Boca Raton) and Computer-Assisted Microscopy, The Measurement and Analysis
of Images (1992, Plenum Press, New York). You are also referred to author Jean M. Bennett as an
excellent source of books and articles on Fourier analysis and statistical methods. Digital
Instruments recommends her Introduction to Surface Roughness and Scattering (co-authored with
Lars Mattsson, 1989, Optical Society of America, Washington, D.C.), among others.
13.1.1 FFTs, PSDs, Autocovariance and RMS
Two off-line NanoScope commands, Power Spectral Density (Analyze/PSD) and 2D Spectrum
(Modify/2D Spectrum), use Fourier analysis to extract information from images. A third method,
Autocovariance (Analyze/Autocovariance), uses a related, discrete method for analyzing images.
Applications of all three features are discussed briefly in this section to assist the reader. Features
are discussed further in their own sections.
Relating FFTs, PSDs, Autocovariance and Root Mean Square (RMS)
Fast Fourier transforms (FFTs), power spectral densities (PSDs), autocovariance and Root Mean
Square (RMS) roughness are interrelated mathematically. Their relationship may be stated as
follows:
2
PSD = FFT = FFT { ACF } = RMS
2
The (one-dimensional) power spectral density (PSD) of a surface is equal to the square of its
Fourier transform (FFT) and is also equal to the Fourier transform of its autocovariance function
(ACF), or the RMS value squared. Both one- and two-dimensional PSDs are calculated
automatically and displayed by the Analyze/ Power Spectral Density function; however, the
spectral plot is presented only for the two-dimensional PSD.
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13.1.2 Why a Power Spectrum?
Surfaces illustrated in Figure 13.1a may be characterized with roughness analysis, commonly using
the RMS roughness, or Ra value. In the surfaces represented here, peaks and valleys are equidistant
from the mean surface centerline. Although surface #A contains noticeably more peaks than surface
frequency or wavelength also distinguish them apart for characterizing each surface’s feature. It
would be helpful to know which wavelengths occur most often and which impart the greatest
influence or “power” to the surface’s topography. This is presented in a power spectral density
analysis.
Figure 13.1a
Sample Surfaces Example
Mean
Surface
1543-110
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#B
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13.1.3 Example
Figure 13.1b is a synthetic image of an idealized, sinusoidal waveform having a wavelength of 63
nanometers. The waveform is pure and noise-free, and is not observed on natural surfaces;
however, analysis is helpful in understanding spectral plots.
Figure 13.1b "Rules" Image
63 nm
Figure 13.1c X and Y Period (Wavelength)
X Period = 0.0625 µm
Y Period = DC
Notice that there is no Y component (the rules are perfectly parallel), and the Y Period is equal to
DC (direct current) That is, the Y axis in this case cannot be expressed as a sinusoidal wave form
and is, therefore, a flat wave form—as though produced by a fixed, direct current signal.
To further analyze, click on Analyze/ Power Spectral Density. The plot is shown on the Display
Monitor (See Figure 13.1d).
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Figure 13.1d Power Spectral Density Plot
2D Isotropic PSD
1010
P
S
D
10-7
101
10-3
Wavelength (µm/cycle)
The left (green) cursor is automatically positioned at the wavelength with the greatest power. The
right (red) cursor is positioned rightward of the data plots. Specifications for both the green and red
cursors are displayed below the plot. Notice that the most powerful wave form is detected at 62.5
nm, corresponding to the dominant wave form of the image. Additional spectra are plotted at
shorter wavelengths (21, 13 and 9 nm); however, these contribute virtually no power to the image.
When considering complex images, the spectrum quickly broadens to include multiple
wavelengths, see Figure 13.1e.
Figure 13.1e Wave Forms
Original wave form
Wave form “A”
Wave form “B”
1546-110
Wave form “C”
Wave form “D”
The two-dimensional wave form at the top of Figure 13.1e (“Original wave form”) is an additive
composite of the wave forms below it (“A” through “D”). A Fast Fourier Transform (FFT)
algorithm separates the original wave form into its constituent parts, mapping each wavelength on
the 2D spectral plot. Since SPM images are three dimensional, wave forms mapped on the 2D
Spectrum may be oriented at any angle and density (power) to reconstruct the original image.
Moreover, since the entire image is digitally comprised of a finite number of pixels, a finite number
of wave forms suffice to reconstruct the image in toto. This and other aspects of FFT analysis are
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discussed in a voluminous literature. Further reading is recommended to those seeking additional
information.
Figure 13.1f shows another synthetic image having a wavelength of 100 nanometers. 2D Spectrum
analysis of this image reveals a broad plot, consisting of many wavelengths.
Figure 13.1f “Rings” Image
100 nm
Note:
To better view the plot, use the Zoom command on the Display Monitor.
Figure 13.1g reflects the concentric symmetry of the data, with various wavelength densities plotted
through 360° of rotation. As the cursor is positioned to various points on the plot, the X, Y and R
Period and Angle reveal each wavelength’s position on the plot. Notice that wavelength values
range from the original scan size (1 µm) to about 0.02 µm, and occur in various powers represented
on the screen in terms of brightness and/or color.
Figure 13.1g “Rings” Image 2D Spectrum Plot
Power on the 2D Spectrum plot displays in pixel brightness and color, the Power Spectral
Density plots each wavelength on a logarithmic scale. A Power Spectral Density (PSD) plot of the
image confirms that the image consists of a composite of multiple wave forms (See Figure 13.1h).
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Figure 13.1h Power Spectral Density Plot of “Rings” Image
2D Isotropic PSD
109
P
S
D
101
101
10-3
Wavelength (µm/cycle)
Notice that an exact wavelength of 100 nanometers is not plotted on the PSD. This is because the
scan clip portions of the outermost annular waves, reducing the overall average. (The PSD’s most
powerful wave form peaks at 91.4 nm.) Users of PSD should bear in mind that the graph includes
all features within the image, not just those of immediate interest.
Relating PSDs, FFTs and Autocovariance
In the NanoScope III software environment, the FFT is the chief subroutine called in 2D Spectrum,
Power Spectral Density and Autocovariance software routines.
The FFT function consists of a common algorithm specially adapted to the NanoScope
environment. It may be summarized as follows:
FFT =
N ⁄ 2 – 1 2πikj
-------------N⁄2
∑
e
j=0
where W ≡ e
f2 j + W
k
N ⁄ 2 – 1 2πikj
-------------N⁄2
∑
e
(f2 j + 1)
j=0
2πi
-------N
and k varies from 0 to N. The expression is divided into two terms—one for evennumbered data points, the other for odd-numbered data points.
13.1.4 Autocovariance Theory
The Autocovariance function initiates an incremental correlation of the image data with itself. It is
the product of two exact copies of the image data as they are shifted relative to one another. The
amount of lateral shift between the two profiles is the lag length.
A related function of interest is the Analyze/ Autocovariance command. This runs a statistical
covariance of the image data, yielding an image which highlights inherent, periodic features.
Analysis of a sectioned autocovariance image provides information about the average size and
separation of surface features. By comparing the lag-lengths and angular orientation of features in
the autocovarianced image, it is possible to obtain information about “hidden” regularities in the
surface.
The image in Figure 13.1i (graf01 on the tutorial disk) is shifted diagonally by the Autocovariance
command until only one pixel is compared between the two copies.
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Autocovariance
Figure 13.1i “Graf01” Image Autocovariance Example
13.2 Autocovariance
The Autocovariance command calculates the autocovariance function of the image and displays
the results on the Display Monitor. The autocovariance function is calculated by taking the inverse
Fourier transform of the product of the FFT of the image and the complex conjugate of the FFT.
The Autocovariance command is performed on the currently loaded image when selected. To undo
the command, Quit the panel and reload the image.
The Autocovariance panel displays parameters adjustable to the preferences of the user (See
Figure 13.2a).
Figure 13.2a Autocovariance Panel
13.2.1 Parameters on the Autocovariance Panel
Data scale
Controls the vertical range of the image corresponding to the full extent of the Color table. The
units of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
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Selects the Color table used to encode the Z information.
Analysis Commands (A-L)
Autocovariance
Color contrast
Controls the contrast in the image by compressing or expanding the Color table.
Color offset
Shifts the Color table used to display the image.
Save
Stores the autocovariance file to the specified directory, allowing it to be reviewed and
processed.
Quit—Exits the Autocovariance command.
13.2.2 Autocovariance Display Monitor
The Autocovariance display includes an image, a note and/or time stamp and a Covariance
Data Box (See Figure 13.2b).
Figure 13.2b Autocovariance Display
Covariance
Data Box
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Auto Stepheight
Mouse Operations:
A measurement cursor with the cross hair inside a box appears within the covariance image when
the image is displayed.
•
1st click, left button—Attaches the measurement cursor to the cursor. As the cursor is
moved around the image, the value of the relative covariance updates.
•
2nd click, left button—Drops the measurement cursor.
•
Right mouse button—Clicking the right mouse button moves the mouse cursor out of
the covariance window.
Note:
The message prompt, AUTOCOVARIANCE IN PROGRESS appears while the Autocovariance is calculated.
PLEASE WAIT,
Covariance Data Box
•
Covariance—Peak value of the Autocovariance command in µm2 or nm2.
•
Cur[sor] covariance—Covariance value at the cursor (on Display Monitor).
•
Rel covariance—Ratio of the covariance and the peak covariance at any point.
13.3 Auto Stepheight
The AutoStepheight command automatically makes relative height measurements between two
levels (steps) on sample surfaces based on the entered parameters in the Configure panel (See
Section 13.3.4).
AutoStepheight displays a top view of the image and two plots for displaying the averaged Height
Profile and a derivative of the height value. For further details on the image display and the two
plots, see Section 13.3.7.
Accessing Auto Stepheight Panels
In Off-line mode, select the image you want to measure. Then select Analyze/ AutoStepheight.
The Auto Stepheight panel appears (See Figure 13.3a).
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Auto Stepheight
Figure 13.3a Navigating in Auto Stepheight Analysis
Refer to the following Auto Stepheight sections:
Rev. C
•
Auto Stepheight Control Monitor Section 13.3.1
•
Step Results Window Section 13.3.2
•
Auto Stepheight Panel Section 13.3.3
•
Auto Stepheight Configure Panel Section 13.3.4
•
Parameters in the Auto Stepheight Configure Panel Section 13.3.5
•
Auto Stepheight Auto Program Panel Section 13.3.6
•
Auto Stepheight Display Monitor Section 13.3.7
•
Using the AutoStepheight Command Section 13.3.8
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Commands
(A-L)
13.3.1
Auto Stepheight
Control Monitor
Auto Stepheight
Along with the Offline list of files, the following panels appear in the control monitor for
analyzing Auto Stepheight (See Figure 13.3b):
•
Auto Stepheight panel, Section 13.3.3
•
Step Results window, Section 13.3.2
Figure 13.3b Step Results Window and Auto Stepheight Panels
Step
Results
Window
Auto Stepheight
Panel
13.3.2 Step Results Window
The Step Results window shows all cursor placements measured in nanometers that fall
within the parameters set in the Configure panel (See Section 13.3.4). These are
measured from the left side of the profile. Highlighting a line of data in this window
causes cursors representing this data to appear in the two image plots (e.g., Height
Profile) on the Display Monitor (See Figure 13.3f).
Each line in the Step Results window contains the following data:
•
268
Left x—The average of the placement of the two red cursors (i.e., the mid
point between the red cursors).
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Auto Stepheight
•
Right x—The average of the placement of the two green cursors (i.e., the mid point
between the two green cursors).
•
Width—The distance between the Left x and the Right x.
•
Height—The z distance between the average of the data between the red cursors, and
the average of the data between the green cursors.
•
Sigma—The +\- error resulting from using averaged date to establish the z height.
13.3.3 Auto Stepheight Panel
The parameters in the Auto Stepheight panel are the same as in the Stepheight command (See
Chapter 14).
Buttons on the Auto Stepheight Panel
Configure—Accesses parameters to adjust settings (See Section 13.3.4).
Note—Accesses a Note panel to append a note and/or time stamp to the displayed image.
AutoProgram—Accesses the Auto Program panel to add the Stepheight command to the Auto
Program file (See
Quit—Exits the Auto Stepheight command.
13.3.4 Auto Stepheight Configure Panel
The Configure panel contains six Cut-off parameters, but usually requires only the Step height
cutoff, Data variation cutoff, and Gaussian filter cutoff parameters.
Figure 13.3c Auto Stepheight Configure Panel
Gaussian filter cutoff:
Three main
parameters
configured
for
Auto Stepheight.
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Step Height cutoff:
Data variation cutoff:
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13.3.5 Parameters in the Auto Stepheight Configure Panel
Analysis Commands (A-L)
Auto Stepheight
Cut Offs
Leveling Cutoff—Specifies a cutoff value for a low pass filter that is used to level the profile
automatically. Most images are auto leveled with the default value (i.e., 4). Some types of
images may require adjusting this parameter with a value of 2 or 3 (low pass at one-half or
one-third of the profile length) to make the auto level work precisely.
Range and Settings—
•
0 to 512 (Default is 4)
Gaussian filter cutoff—Smooths the profile so that noise or small changes in the profile do
not get identified as steps. The effective value is dependent on the profile and can be
determined only by your experimentation.
Range and Settings—
•
0 nm to Scan Size value in nm (Default—100 nm.)
Step height cutoff—Specifies the minimum step height to be identified. Values below this
cutoff are ignored in the data.
Range and Settings—
•
1 nm to infinity (Default—100 nm.)
Data variation cutoff—Sets the distance between the two cursors of a cursor pair. After
finding the beginning of a step, the second cursor moves to one side (away from the step) and
keeps going as long as the variation in the data encountered is not larger than the value of this
parameter. If the cutoff value is 5 nm, the cursor continues moving until it encounters a
variation greater than 5 nm, at which point the boundary of the cursor pair is set.
Note:
All the data between the respective cursor pairs is averaged to determine
the Left x and the Right x values.
Range and Settings—
•
0 nm to Scan Size value (Default—0 nm.)
Low band pass cutoff and High band pass cutoff—Profiles with nested steps, multiple
levels of steps, or steps that do not have approximately horizontal levels may require a band
pass filter to define the steps and place the cursors.
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Complicated profiles seems to respond to a Low band pass cutoff set to 2 (i.e., one-half scan
length) and a High band pass cutoff set to 8 (i.e., one-eighth scan length). However, the optimum
settings are dependent on the profile and must be determined through experimentation.
Range and Settings:
•
0 to 512 (Default—Low=0, High=256)
Slot Dimensions in the Auto Stepheight Configure Panel
The Slot dimensions appear below the cut off parameters in the Configure panel (SeeFigure
13.3d).
Figure 13.3d Slot Dimensions
The Slot Dimension parameters include:
•
Between Inflection Points—Specifies the measurements to include data between the
points on a curve that separates an arc concave upward from one concave downward and
vice versa.
•
Between Slot Edges—Specifies the measurements to include data between the
openings in a groove on the sample surface.
Depth Scale (a + b*x) Parameters
Where a is usually 0 nm and b is a multiplier (usually 1 or 2) for the stepheight value x
•
Step Scale Parameter a—Value of stepheight offset (default is 0 nm).
•
Step Scale Parameter b—Value of multiplier (default is 1.00) for the reported
stepheight value.
13.3.6 Auto Stepheight Auto Program Panel
The Auto Program Edit panel displays parameters to add to the Auto Program file (See Section
13.3e). Select parameters manually or by clicking the function buttons: SELECT ALL or CLEAR
ALL.
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Auto Stepheight
Figure 13.3e Auto Stepheight Auto Program Edit Panel
Buttons on the Auto Stepheight Auto Program Edit Panel
272
•
Select All—Selects all of the parameters in the Auto Program Edit panel.
•
Clear All—Removes all of the selected parameters in the Auto Program Edit panel.
•
Note—Appends a note to the Auto Program file for reference.
•
Save—Accesses a panel to save selected parameters to the Auto Program file (*.prg).
•
Delete—Deletes selected parameters.
•
Quit—Exits the Auto Program Edit panel.
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13.3.7 Auto Stepheight Display Monitor
Analysis Commands (A-L)
Auto Stepheight
The Display Monitor includes an image, a note and/or time stamp and two plots (See Figure
13.3f).
Figure 13.3f Relationship: Data in the Step Results Window and the Image Window
The cursor pairs move to the point
highlighted in the Step Results window.
In this example, the
stepheight value is
42.906434 mm.
Figure 13.3f shows the sample image in the lower-left corner. In the center of this image is the
reference line used to define the box cursor, and the step height is measured perpendicular to this
line. Two pairs of cursors define the levels for the step.
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Auto Stepheight
The lower graph displays the average of the line values. The position of the cursor pairs in the
sample image are shown in the chart. The upper graph displays the derivative of the data shown it.
13.3.8 Using the AutoStepheight Command
1. Select Off-line.
2. Select the image to be measured.
3. Click on Analyze/ AutoStepheight on the menu bar.
4. Left click on the image, release and draw a reference line on the sample image, which
appears in the lower-left of the image screen.
Note:
Remember that image data is averaged perpendicular to the reference line.
Therefore, you can draw the line in any direction.
5. In the sample image select the side border to size and position the box cursor to include the
area you want measured
6. Configure the Auto Stepheight panel parameters.
7. Click on Configure and enter the appropriate parameters for your sample (See Section
13.3.4 for a description of these parameters).
Note:
Notice that one pair of cursor lines is over the peak, and the other pair is over
the pit. The data between the respective cursor pairs is averaged. Then the two
averages are subtracted to calculate the step height. Refer to Figure 13.3f for an
illustration of the relationship between the control screens and the image
screens.
8. Click File to save the parameters; otherwise, click Quit.
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Bearing
13.4 Bearing
Analyze/ Bearing provides a method of plotting and analyzing the distribution of surface height
over a sample. This form of analysis may be applied to the entire image, or to selected areas of the
image, using a rubberband box. Moreover, regions within the selected area can be blocked out by
using “stopbands” to remove unwanted data from the analysis.
13.4.1 Theory
Bearing analysis reveals how much of a surface lies above or below a given height. This
measurement provides additional information beyond standard roughness measurements. (Surface
roughness is generally represented in terms of statistical deviation from average height; however,
this gives little indication of height distribution over the surface.) By using bearing analysis, it is
possible to determine what percentage of the surface (the “bearing ratio”) lies above or below any
arbitrarily chosen height. In industries where materials are polished or chemically etched, this is a
particularly useful tool. For example, bearing analysis is frequently used in silicon etching
processes to observe changes in etched features over an interval of time.
Figure 13.4a Bearing Analysis Illustration
D
C
B
Z Height
A
1552-110
Figure 13.4a represents how Bearing analysis generates a histogram of feature height based upon
the occurrence of pixels at various Z heights.
At Z height “A,” virtually all of the surface is included (corresponding to a Bearing ratio of 100, or
100 percent of the area). At Z height “D,” the pixel count is much reduced, representing a smaller
Bearing ratio (approximately 2-5 percent of area). By using Bearing Compare (See Section 13.5),
you may compare sample regions before and after processing to reveal relative changes in surface
height.
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13.4.2 Preparation for Use
Use Modify/Plane Fit to remove all tilt before running Analyze/ Bearing. When running Bearing
Compare between two or more files, make certain that Z-scales are roughly equal; otherwise,
comparisons cannot be generated.
The Bearing command displays a top view of the image, then calculates and displays bearing ratio
curves and surface height histograms for lines or areas drawn on the image (See Figure 13.4b).
Figure 13.4b Bearing Analysis Display
Cursor
Depth Scale
Hist Cursr
Stopband
Depth Ref
Zoom
Execute
Clear
30
Depth [nm]
60
90
90
Depth
BA% 1 30.006
52.893490
BA% 2 19.987
51.293407
BA% 3 0
0.000000
BA% 4 0
0.000000
BA% 5 0
0.000000
0.000000
BA% 6 0
120
Bearing area%
1129.9 µm2
90.264 nm
405.77 µm2
35.913
74.011 nm
9.155 µm3
244701 µm2
0.022
74.011 nm
120
Box area
Center line av
Bearing area
Bearing area %
Bearing depth
Bearing volume
Hist area
Hist%
Hist depth
Depth [nm]
60
30
0
0
Bearing Analysis
0
0.75
Hist %
1.50
0
50
Bearing area %
100
130 Micron AFM Scan of Low-friction Surface
Cursor—Box
Depth—Auto
Ref—Peak
Scale—Full
The word bearing means the relative roughness of a surface in terms of high and low areas. The
bearing ratio curve is the integral of the surface height histogram and plots the percentage of the
surface above a reference plane as a function of the depth of that plane below the highest point in
the image.
Plotted data includes all data points, noise spikes and holes. If noise is to be filtered out, it should
be removed before using the Bearing command by executing one of the various filtering
commands in Off-line/ Modify (e.g., Gaussian, Lowpass, Median).
13.4.3 Bearing Control Monitor
The Bearing panel displays on the Control Monitor. Each button on the panel leads to another
panel to adjust bearing parameters to the preferences of the user. See Figure 13.4c for navigating in
Bearing analysis.
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Figure 13.4c Navigating in Bearing Analysis
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13.4.4 Bearing Panel
The Bearing panel sets the image display parameters (See Figure 13.4d).
Figure 13.4d Bearing Panel
Parameters on the Bearing Panel
•
Data scale—Controls the vertical range of the image corresponding to the full extent of
the Color table. The units of this item vary according to the type of image (e.g., nm, nA,
etc.).
•
Color table—Selects the Color table used to encode the Z information.
•
Color contrast—Controls the contrast in the image by compressing or expanding the
Color table.
•
Color offset—Shifts the Color table used to display the image.
Buttons on the Bearing Panel
278
•
Configure—Allows the input of various bearing ratios (See Section 13.4.5).
•
Zoom Settings—Expands or contracts the range about the center of data (See Section
13.4.7).
•
Note—Allows you to add a descriptive message and time stamp to the display.
•
Auto Program—Allows the Bearing command to be added to, or deleted from, the
currently selected Auto Program file (See Section 13.4.8).
•
Bearing Save—Saves the current bearing measurements (See Section 13.4.9).
•
Quit—Cancels Bearing analysis and returns screen to Off-line mode.
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13.4.5 Bearing Configure Panel
The Configure panel allows the input of Bearing ratios (See Figure 13.4e).
Figure 13.4e Bearing Configure Panel
Parameters and Buttons on the Bearing Configure Panel
•
Bearing Percent (1, 2, 3, 4, 5, 6)—Displays depth data for specifically entered bearing
ratios. For example, if 50 is entered for the ratio, the box displayed on the image screen
measures the depth above which 50% of the data points are above.
Up to six different ratios may be entered simultaneously. A red, triangular cursor is
automatically located on the bearing area histogram to indicate the last entered Bearing
ratio value.
•
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File (button)—Opens the Configuration file list panel (See Section 13.4.6) and allows
for saved files to be opened.
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13.4.6 Configuration File List Panel
Figure 13.4f Bearing Configuration File List Panel
Buttons on the Configuration File List Panel
•
Load—Loads the specified Bearing Configure file
•
Save—Saves the current settings as a Bearing Config file
•
Delete—Deletes the specified Bearing Configure file
•
Quit—Exits the Configuration file list panel.
13.4.7 Zoom Settings
Expands or contracts the range about the center of data. For instance, if the Zoom factor is set to 2
and the current range is 100 nm (centered at 50 nm), the resulting zoomed range is 200 nm and
extends from -50 to 150 nm (still centered at 50 nm). The Zoom factor is always applied to the
current range; therefore, if the Zoom factor is set to 0.25 and applied to a range of 200, the new
range is 50 (200 x 0.25) and extends from 25 to 75 nm (See Figure 13.4g).
Figure 13.4g Bearing Zoom Limits Panel
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13.4.8 Auto Program
The Auto Program panel allows the Bearing command to be added to, or deleted from, the
currently selected Auto Program file. A selection of reportable values displays in the Bearing Auto
Program panel (See Figure 13.4h).
Figure 13.4h Bearing Auto Program Panel
Buttons on the Bearing Auto Program Edit Panel
•
Select All—Selects all of the parameters in the Auto Program Edit panel.
•
Clear All—Removes all of the selected parameters in the Auto Program Edit panel.
•
Note—Appends a note to the Auto Program file for reference.
•
Save—Accesses a panel to save selected parameters to the Auto Program file (*.prg).
Note:
A prompt appears to overwrite the existing Bearing program if the file is the
same name.
•
Delete—Deletes selected parameters.
•
Quit—Exits the Auto Program Edit panel.
13.4.9 Bearing Save
Accesses the Bearing Save panel shown in Figure 13.4i to save the currently selected Bearing file
to the Destination Directory and Destination File specified by the user. Files may be compared
using Analyze/ Bearing Compare function (See Section 13.5).
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Figure 13.4i Bearing Save Panel
13.4.10Bearing Display
The Display Monitor includes: a menu bar, status bar, an image, two sets of measurements and two
histograms. The histograms show the Z values in the image and the bearing ratio curve (See Figure
13.4j).
Figure 13.4j Bearing Display
Bearing
Menu
Bearing
Depth
Hist. %
Measurements
Bearing
Area %
Measurements
13.4.11Bearing Display Menu Commands
The menu bar provides subcommands which modify and control the operation of the Bearing
command.
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Cursor
Determines whether the histogram and bearing ratio are calculated along a line or within a box.
•
Line—Puts the system into line mode, allowing a reference line to be drawn on the
image. The data along the line is used in the calculation of the bearing and histogram
curves.
Mouse operations:
•
1st click, left button—Fixes one end of the reference line and “rubberbands” from the
selected position, allowing the reference line to be drawn in any direction.
•
2nd click, left button—Fixes the position of the reference line and displays the Bearing
Ratio and Histogram curves for the data along the line.
•
Box—Puts the system into area mode, allowing a rectangular box to be drawn on the
image. The data within the box is used in the calculation of the bearing and histogram
curves.
Mouse operations:
Rev. C
•
1st click, left button—First, locate a corner or edge of the image and click once to allow
the rectangle to be formed by moving the mouse.
•
2nd click, left button—Fixes the position of the box and displays the Bearing Ratio
Curve and the Histogram for the enclosed area.
•
3rd click left button—The effect of the third depends on the position of the cursor when
the click occurs.
•
On box edge—Clicking the left button when the cursor is on an edge of the box allows
that edge of the box to be repositioned by moving the mouse.
•
On box corner—Clicking the left button when the cursor is on a corner of the box allows
that corner of the box to be repositioned by moving the mouse.
•
Inside the box—Clicking the left button when the mouse is inside the box allows the
entire box to be repositioned by moving the mouse.
•
Another click of the left button freezes the position and size of the box.
•
Stop Add—This creates a user-defined rectangle (a “stopband”), having an “X,” whose
area is not included in the bearing calculation. Click and drag on the image to draw the
stopband. The stopband can be any size with any rectangular shape.
•
Stop Remove—Removes stopbands which have already been drawn. Click on the
particular rectangle to be removed.
•
Stop Clear—Removes all currently drawn stopbands.
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Depth Scale
Sets the Z-axis scales (depth) of height histogram and bearing ratio curves.
•
Z Scale—Scales the Z-axis on the height histogram and bearing ratio curves to the Data
scale value entered in the panel on the control monitor. The lowest depth datum point is
set to zero.
•
Auto Scale—Automatically scales the Z-axis on the height histogram and bearing ratio
curves over the entire data range.
Hist[ogram] Cursor
When the Hist Cursor subcommand is On, two reference markers are generated—one is red and
the other is green.
Mouse and Cursor Operation—Clicking the left button when the cursor is on a reference marker
attaches the reference marker to the cursor. Moving the mouse causes the reference marker to move
and the relevant histogram values to be updated in the measurement chart. A second click of the left
button drops the reference marker.
Depth Ref[erence]
Sets the Z-axis scale relative to one of two references—the peak (highest) height; or, the median
(center line) height.
•
Peak—When Peak is selected, the values are the difference between the tallest point in
the selected region (i.e., the zero point of the Bearing Curve) and the cursor position.
•
Center Line—When Center Line is selected, the values are the difference between
Center line av (median height) and the cursor position.
Zoom
After executing Bearing analysis, subcommands under Zoom menu allow the height histogram
between two green cursor lines to be magnified, and/or normalized. Zoomed plots may be zoomed
again and again.
284
•
On—Generates two green Zoom cursor lines on the height histogram. The portion to be
zoomed lies between the green cursor lines. To adjust the zoom, drag the lines above
and below the plotted data to be zoomed.
•
Off—Removes the green Zoom cursor lines from the height histogram.
•
Zoom—Expands the height histogram region between the green cursor lines to occupy
the height histogram; vertical and horizontal axes are rescaled accordingly. This option
may be used repeatedly for any given bearing data set. If the Zoom function is used
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without first activating the red cursor lines, the area zoomed lies above the triangular
cursor indicated on the Bearing Area histogram.
•
Normalize—Readjusts the bearing area% curve (horizontal axes) to fit to the zoomed
height histogram.
•
Full scale—Restores the height histogram and bearing ratio curve to their original
forms (zoom range at 100%). Equivalent to another Execute of the bearing curve.
Thresh
Analysis tool, used to illustrate depths in the image. When activated, the percent (%) value indicates
the top % of pixels that are turned red. 2% is the top two percent of pixels, 25% is the top twentyfive percent, etc.
13.4.12Bearing Terms
Depending on the image cursor selection, values for up to eight of the following terms are listed in
the measurement windows:
Box area
Area of the box. This value is only displayed when the box cursor is selected.
Figure 13.4k Bearing Box Area
Box Cursor
Box Area
Line length
Length of the line. This value is only displayed when the line cursor is selected.
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Figure 13.4l Bearing Line Length
th
eng
eL
n
i
L
Line Cursor
Center line av
Depth at which the number of points above and below the depth point are equal. This is the 50%
point on the Bearing Curve.
Bearing area
Area covered by all of the points above the selected Bearing depth. This value is only displayed
when the box cursor is selected.
Figure 13.4m Bearing Area
Bearing Area
Bearing Depth Plane
Bearing length
Length of cursor line above the selected Bearing depth. This value is only displayed when the line
cursor is selected.
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Figure 13.4n Bearing Length
th
ng
Le
g
n
ari
Be
Line Cursor
Bearing Depth Plane
Bearing area %
The bearing area % curve is the integral of the Histogram curve. The bearing area % reported in the
measurement list defines the percentage of the surface above the reference plane defined by the
green cursor.
Bearing length %
When using the line cursor in the cursor menu, this value returns the length data along the line.
Performs the same function as Bearing area %, but reduced to points along a line.
Bearing depth
The depth at the green bearing area cursor position relative to highest point in the image when Peak
is selected in the Depth reference command and relative to the Center line av when Center Line is
selected in the Depth reference command.
Bearing volume
Sample volume defined above the bearing depth plane.
Figure 13.4o Bearing Volume
Bearing Volume (shaded)
Bearing Depth Plane
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Histogram area
The area covered by the points at the depth indicated by the red histogram cursor. This value is only
displayed when the box cursor is selected.
Histogram length
The length of points along the cursor line at the depth indicated by the red histogram cursor. This
value is only displayed when the line cursor is selected.
Histogram %
The percentage of the total number of points at the depth indicated by the red histogram cursor.
Histogram depth
The depth at the red histogram cursor position relative to highest point in the image when Peak is
selected in the Depth subcommand and relative to the Center line av when Center Line is
selected in the Depth subcommand. When both cursors are present, this value represents the depth
difference between the two cursors, and this item is titled Hist rel depth.
Histogram relative depth
When the second histogram cursor is activated (in the Hist Cursor menu on Display Monitor), this
value reports the distance between the two cursors.
Note:
The Bearing command only operates on buffers with a “height” vertical scale.
13.5 Bearing Compare
Once Bearing analysis has been completed on two or more images, it becomes possible to compare
results using the Bearing Compare function. This generates a composite height histogram and
bearing ratio curve for the images being compared, and makes obvious any height differences
between them.
13.5.1 Theory
Bearing Compare is designed to assist those interested in assessing height/depth changes on
similar samples that have undergone a process, or for comparing dissimilar samples having surface
features within a similar Z-axis scale. The Bearing feature is particularly useful for evaluating
etched surfaces.
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13.5.2 Preparation
Images to be compared must first undergo Bearing analysis (See Section 13.4) to obtain height
histograms and bearing ratio curves. After Bearing analysis is obtained, files to be compared are
saved to a common directory using the Bearing/ Bearing Save option.
Note:
To ensure accurate comparisons between files, always prepare images to
undergo Bearing analysis with Plane Fit modification first; otherwise, the
surfaces to be compared may be at different attitudes. (That is, sample #1 may
be “flat and level,” while sample #2 may appear wedged, “tilted, running
downhill.” Whereas heights on the first, level sample appear relatively uniform,
the second, wedged sample appears to have heights which diminish from one
edge to the other. Use Modify/ Plane Fit (Auto or Manual) to correct this).
13.5.3 Bearing Compare Panel
On the Analyze menu, select Bearing Compare to access the Bearing Compare panel (See Figure
13.5a).
Figure 13.5a Bearing Compare Panel
Buttons in the Bearing Compare Panel
Execute—Executes Bearing Compare analysis between the files selected from the current
directory.
Clear—Clears currently selected files in the Bearing Compare panel (removes all “X”s) without
quitting the panel.
Save—Avg[average]—Saves the average values of compared files to a directory and file named by
the operator.
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Quit—Exits the Bearing Compare analysis without saving.
13.5.4 Bearing Compare Procedure
1. Analyze images to be compared using the Analyze/ Bearing function. Each image file
should be saved to a common directory using Bearing Save in the Bearing panel. (See
Section 13.4 for instructions on using Bearing Save.)
2. Exit the Bearing panel. Using the Files window, transfer to the directory where the bearing
files to be compared are saved.
3. Click on Analyze/ Bearing Compare. The control screen displays a prompt during bearing
file location (See Figure 13.5b).
Figure 13.5b Bearing Compare Advisory
Wait
Scanning directory.
Abort
When all bearing files are located, the control monitor then displays the Bearing Compare panel
(See Figure 13.5c).
Figure 13.5c Bearing Compare Panel
4. Use the mouse to select all files to be compared. An “X” appears in the box of each file
selected. When all desired files are selected, click on the Execute button.
5. The Display Monitor displays the results of the Bearing Compare analysis shown in Figure
13.5d.
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Figure 13.5d Bearing Compare Analysis Display
Bearing Compare
0
0
Average
Difference
Depth [µm]
0.25
0.50
Difference (File1 - File2)
Bearing depth
Bearing area %
Bearing area
File1
File2
0.50
130.31 nm
-3.125
-16224 nm2
2
Depth [µm]
Average
Bearing depth
Bearing area %
Bearing area
File count
0.25
File List
test_1.brg
test_2.brg
130.31 nm
-3.125
-16224 nm2
test_1.brg
test_2.brg
0
50
Bearing area %
100
-100
0
Bearing area %
100
The two files compared are listed in the File List box near the upper-left corner of the screen (i.e.,
“test_1.brg” and “test_2.brg” in Figure 13.5d). The Display Monitor includes Average values and
Difference values for the first two files compared. On the right half of the screen are displayed
the Average and Difference bearing ratio curves.
The Difference bearing ratio curve is computed as file #1 minus file #2; thus, curves to the left of
the green center line represent areas where file #1 was lower than file #2, curves to the right of the
green center line represent areas where file #1 was higher than file #2.
By manipulating the triangle cursors with the mouse, it is possible to change the Bearing depth,
Bearing ratios, and Bearing areas for Average and/or Difference curves, then obtain bearing
ratios for any given depth.
6. To exit the Bearing Compare panel, click on Quit.
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13.6 Depth
To analyze the depth of features you have numerous choices which measure the height difference
between two dominant features that occur at distinct heights. Depth was primarily designed for
automatically comparing feature depths at two or more similar sample sites (e.g., when analyzing
etching depths on large numbers of identical silicon wafers). The depth commands are also useful
on unique samples.
The Section (Section 14.7) and Bearing (Section 13.4) commands are designed for analyzing
unique samples. It is recommended that those tools be examined as well to determine which
analysis is most appropriate for a particular image or sample.
13.6.1 Theory
The term “depth” often proves troublesome when analyzing features which undergo change. For
example, silicon wafers undergo a cyclical building-up of deposition, etching, planarization, etc. to
create multiple layers. Evaporated films on surfaces often alternate between one material and
another to yield a multi-layer of many films. With normal probing to such surfaces, the SPM
sometimes has no base-line reference from which to judge feature depth, giving rise to the question,
“How deep is the feature, relative to what?”
One solution is to saw sections from samples to reveal layering, then scan the entire cross-section;
this is accurate but destructive. Another is to compare all depths to some feature of unchanging
depth (e.g., a substrate); however, such datum features are not always available, or may be located
too far away from the imaging site to be of use.
The Depth command is designed to accumulate depth data within a specified area, apply a
Gaussian low-pass filter to the data to remove noise, then rapidly obtain depth comparisons
between two or more dominant features (for example, the depth of a single feature and its
surroundings). Although this method of depth analysis does not substitute for direct, crosssectioning of the sample, it does afford a means for comparing feature depth between two or more
similar sites in a consistent, statistical manner.
13.6.2 Depth Panels and Parameter
In the Analyze menu, select the Depth command to access the Depth panels and parameters (See
Figure 13.6a).
Note:
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Figure 13.6a Navigating Panels in Depth Analysis
13.6.3 Depth Panel
The Depth panel parameters set the image display parameters (See Figure 13.6b).
Figure 13.6b Depth Panel
Parameters in the Depth Panel
•
Data scale—Controls the vertical range of the image corresponding to the full extent of
the Color table. The units of this item vary according to the type of image (e.g., nm, nA).
•
Color table—Selects the Color table used to encode the Z information.
•
Color contrast—Controls the contrast in the image by compressing or expanding the
Color table.
•
Color offset—Shifts the Color table used to display the image.
Buttons on the Depth Panel
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•
Configure—Accesses the Configure panel
(See Section 13.6.4).
•
Auto Program—Accesses the Auto Program panel
(See Section 13.6.5).
•
Note—Allows for a descriptive message to be added to the display (up to 32 character).
•
Quit—Exits the Depth command.
13.6.4 Depth Configure Panel
Cursors applied to the filtered data histogram serve two functions—1) to identify surface features
for measurement and comparison; 2) to facilitate rapid recognition of curve components by the
computer. The CONFIGURE button in the Depth panel accesses the Configure panel. This box
displays, loads and deletes preexisting configuration files, and initiates new ones (See Figure
13.6c).
Figure 13.6c Depth Configure Panel
Parameters in the Depth Configure Panel
Peaks—Controls the smoothing of the data in the Correlation Histogram. Also controls the method
of how the exact depth of the peaks is chosen. See Figure 13.6d for determining the exact depth of
a Correlation Histogram.
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Figure 13.6d Determining the Exact Depth of a Peak
Highest peak or
Lowest peak value
75%
25%
0%
Centroid at 0%
Centroid at 25%
2708-110
Depth (nm)
1
0
Centroid at 75%
Correlation
1. Centroid—A weighted average of points on a curve.
Thresholds—Sets how much of a peak is used when calculating the centroid to determine its depth
(or position)
Rev. C
•
Highest Peak—Topmost peak in the Correlation Histogram. Value used to define how
much of the Highest peak is included when calculating the centroid. At 0 percent, only
the maximum point on the curve is included. At 25 percent, only the maximum 25% of
the peak is included in the calculation of the centroid.
•
Lowest Peak—Peak closest to the bottom in the Correlation Histogram. Value used to
define how much of the Lowest peak is included when calculating the centroid. At 0
percent, only the maximum point on the curve is included. At 25 percent, only the
maximum 25 percent of the peak is included in the calculation of the centroid.
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Figure 13.6e Depth Thresholds Display
Histogram filter cutoff—Lowpass filter which smooths out the wavelengths below the cutoff. Use
to reduce noise in the Correlation histogram.
Min peak to peak—Sets the minimum distance between the maximum peak (green cursor) and the
second peak (red cursor). The second peak is the next largest peak to meet this distance criteria.
Depth Scale (a + bx)—Modifies the height data where A is the offset and B is the multiplier to the
height data. Adjustments to the default values changes the data. Use this feature with caution
unless manipulated data is desired.
•
Depth scale parameter A—Offset value.
•
Depth scale parameter B—Multiplier to the height data x.
Ranges and Settings: A=0, and B=1.0 (Changed values from the default values, modifies the data.)
13.6.5 Depth Auto Program Edit Panel
The Auto Program Edit panel adds or deletes the Depth command from the currently selected
Auto Program file. A panel listing measurements reported by the Depth command is displayed (See
Figure 13.6f). Selecting a measurement stores it in the Auto Results file when Auto Program is run.
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Figure 13.6f Auto Program Edit Pane
Parameters in the Auto Program Edit Panel
•
Peak to Peak—Depth between the two data peak centroids as shown by the green and
red line cursors.
•
Total Peaks—Total number of peaks included within the data histogram.
•
Filter Cutoff—Reports the value from Histogram filter cutoff in the Configure menu.
•
Depth at Max.—Depth of maximum (lowest) pixel from shallowest pixel.
Buttons in the Auto Program Edit Panel
•
Select All—Selects all the parameters.
•
Clear All—Clears all the parameters.
•
Note—Allows you to insert a command note in the Auto Program file.
•
SET LIMITS—Sets specific limits on the peak to peak measurements in an Auto
Program (See Figure 13.6g).
Note:
The Set Limit panel only appears if PEAK
panel is enabled.
TO
PEAK on the Auto Program Edit
Figure 13.6g Depth Auto Program Set Limits Panel
Parameters and Buttons in the Set Limits Panel
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Peak to Peak
•
Check these limits—If enabled, the limits specified in the Set Limits panel apply to the
Auto Program. If not selected, the limits are ignored.
•
Pk to Pk Min—If the measured peak to peak value of a file analyzed in an Auto
Program is less than the peak to peak minimum , then that measurement is not included
in the calculation of the peak to peak statistics (average standard deviation, minimum).
The measurement is then reported in the Auto Result file with an L- before the file name
indicating that is was below the limit).
•
Pk to Pk Max—If the measured peak to peak value of a file analyzed in an Auto
Program is greater than the peak to peak maximum, then that measurement is not
included in the calculation of the peak to peak average standard deviation. The
measurement is then reported in the Auto Result file with an L+ before the file name
indicating that is was above the limit.
•
Percent of Pk to Pk—The peak to peak minimum and maximum
•
Save—Saves selected measurements to the Auto Program file. If the Depth command is
already in the current Auto Program file, it retains its position in the file.
•
Delete—Removes the Depth command from the Auto Program file.
•
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program
file.
13.6.6 Depth Display Monitor
The display screen includes a top view image and two histograms; depth data is displayed near the
lower-left corner of the screen. Unconfigured files are displayed with a presized, white cursor box
on other edge of the image. The mouse is used to resize and position the box cursor over the area to
be analyzed. The left histogram displays the raw depth data. The right histogram displays a
Gaussian-filtered version of the same data. In both histograms, depth data is distributed
proportional to its occurrence within the defined bounding box. For example, in Figure 13.6h, the
data peak indicates large numbers of features at a depth of about 60 nm.
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Figure 13.6h Depth Display
Raw Data Hist.
Correlation Hist.
Green Line
Cursor
Red Line
Cursor
Raw Data Histogram
The leftmost histogram displays raw depth data. Depending upon the range and size of depth data,
the curve may appear jagged in profile, with noticeable levels of noise. Data spikes on the
histogram correspond to specific depths of features on the sample surface.(See Figure 13.6i).
120
90
Depth [nm]
60
30
0
Figure 13.6i Depth Histogram
0
1.00
2.00
Hist %
3.00
Correlation Histogram
The Correlation Histogram is a filtered version of the Raw Data Histogram. Filtering is done using
the Histogram filter cutoff parameter in the Depth Configure panel.The larger the filter cutoff, the
more data is filtered into a Gaussian (bell-shaped) curve. Large filter cutoffs average so much of the
data curve that peaks corresponding to specific features are unrecognizable. On the other hand, if
the filter cutoff is too small, the filtered curve may appear noisy.
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The Correlation Histogram presents a lowpass, Gaussian-filtered version of the left histogram. The
low-pass Gaussian filter removes noise from the data curve and averages the curve’s profile. Peaks
which are visible in the curve correspond to features in the image at differing depths.
Peaks do not show on the correlation curve as discrete, isolated spikes; instead, peaks are
contiguous with lower and higher regions of the sample, and with other peaks. This reflects the
reality that features do not all start and end at discrete depths.
When using the Depth command for analysis, each peak on the filtered histogram is measured from
its statistical centroid (i.e., its statistical center of mass).
Green Line Cursor—The green line cursor identifies the centroid of the largest (maximum) peak.
Red Line Cursor—The red line cursor identifies the centroid of the next largest (minimum) peak
that is no closer to the maximum peak than the distance specified by the Min peak to peak value
set in the Configure panel.
Note:
Both line cursors may be moved using the mouse to manually select their
positions.
The Configure panel generates a configuration file, which sets parameters within the Depth feature
that control many important aspects of the analysis (See Section 13.6.4) It records where the box
cursor is located and how big it is sized, and records the selection of data peaks.
Because configuration files are so closely tied to the location of feature(s) within the image, it is
imperative that images be carefully located the same way each time. If Depth analysis is being used
to compare identical image files (such as captured from magnetic media and integrated circuits) for
monitoring purposes. It is important that each image be captured with features of interest located in
the same area where the cursor is drawn on the configuration file. For automated SPMs, this can be
achieved by registering a representative sample and using a macro routine to process identical
samples. On other SPMs, image sites need to be located manually. It may prove helpful to scan a
larger-than-necessary site, then use the Off-line/ Modify/ Zoom feature to crop the scan to the
same size each time before analyzing it.
13.6.7 Interpreting Depth Data
The Display Monitor lists all depth analysis results within the data box
(See Figure 13.6j).
Figure 13.6j Depth Display Data Box
Note:
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Any or all of these values may be incorporated into the AutoProgram feature
(See Section 13.6.5).
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Depth
Parameters in the Depth Display Data Box
Peak to peak
Depth between two data peak centroids as selected using the horizontal, green line cursors.
Filter cutoff
Reports the value from Histogram filter cutoff in the Configure menu. Histogram filter cutoff
acts as a lowpass filter which smooths out the wavelengths that lie below the cutoff. Used to reduce
noise in the Correlation histogram.
Total peaks
Total number of peaks included within the data histogram.
Depth at max
Depth of maximum (lowest) pixel from shallowest pixel.
Note:
Rev. C
Be aware of an image shifting on automatically captured images. If image
features are shifted outside of the configured cursor box, results are
inconsistent. To automate Depth analysis with optimal results, try using the
Off-line/Analysis/ Pattern Recognition feature to ensure proper location of all
image features.
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Grain Size
13.7 Grain Size
The Grain Size command defines grain boundaries based on the height of pixel data. A histogram
of grain size can be produced and used to identify specific grains by size. The mean area and
standard deviation of the grain sizes, and the total number of grains are calculated and displayed.
Grains may be analyzed singly or in aggregates. Grains, as used here, are defined in terms of
conjoined pixels having a height above or below a given Threshold height.
Figure 13.7a Grain Size Illustration
Figure 13.7b
Grain size
Threshold height
1552-110
The illustration in Figure 13.7a reflects how grains can be isolated by height. This is especially true
of certain materials where grain size or type is linked to height. Consider the chemically etched
hard disk shown in Figure 13.7c.
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Figure 13.7c Chemically Etched Hard Disk Image
Low-lying grains
Analysis Commands (A-L)
Grain Size
Raised grains
Materials which exhibit grain structure but which are very flat (e.g., polished refractories) may
require pre-processing to assist the Grain Analysis software. The Contrast Enhance, or Invert
functions on the modify menu are often useful. The software analyzes grains by height
thresholding from above (normal, default setting) or below (enable Reverse Thresholding
within the Limits window). Grains may also be differentiated by manually drawing lines to
separate them (Cursor/ Line), and by using digital erosion (Erode) and dilation (Dilate) to
further separate or conjoin them.
13.7.1 Erosion and Dilation
As applied to the Grain Size function in digital NanoScope images, erosion and dilation are used
to clump grains together (dilation), or separate them (erosion). Pixels comprising an image are
evaluated in square matrices (i.e., neighborhoods), sized according to the Erode Neighborhood
size and Dilate Neighborhood size parameters shown on the Limits window (See Section
13.7.4).
Erosion—The effect of digital erosion is to separate grains which otherwise touch or conjoin
one another. If all values in a neighborhood are ON, erosion is not applied. If N pixels are OFF in a
neighborhood of ON pixels (where N is specified by the Num. pix. off for erode parameter), the
center pixel is turned OFF and the result written to the eroded image file.
If the Num. pix. off for erode parameter is set to 1, the erosion process is triggered if even one
pixel is off, making erosion more sensitive at a setting of 1. Furthermore, if the Erode
Neighborhood size is large, erosion is applied to larger areas of the image. Therefore, maximum
erosion is obtained with a large Erode Neighborhood size setting and a small Num. pix. off for
erode setting.
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Minimum(A-L)
erosion is attained with a small Erode Neighborhood size setting and a large
Analysis Commands
Grain Size Num. pix. off for erode setting.
Dilation—The effect of digital dilation is to conjoin otherwise separate grains, and to
mend broken grains. If all values in a neighborhood are “off,” dilation is not applied. If N
pixels are “on” in a neighborhood of “off” pixels (where N is specified by the Num. pix.
on for dilate parameter), the center pixel is turned “on” and the result written to the
dilated image file. Note that if the Num. pix. on for dilate parameter is set to 1, the
dilation process is triggered if even one pixel is on, making dilation more sensitive at a
setting of 1. Furthermore, if the Dilate Neighborhood size is large, dilation is applied to
larger areas of the image. Therefore, maximum dilation is attained with a large Dilate
Neighborhood size setting and a small Num. pix. on for dilate setting. Minimum
dilation is attained with a small Dilate Neighborhood size setting and a large Num. pix.
on for dilate setting.
For navigating in the Grain Size panels, see Figure 13.7d.
Figure 13.7d Navigating Grain Size Analysis
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13.7.2 Grain Size Panel
The Grain panel appears and sets the image display parameters (See Figure 13.7e).
Figure 13.7e Grain Size Panel
Parameters in the Grain Size Panel
Data scale
Controls the vertical range of the image corresponding to the full extent of the Color table. The
units of this item vary according to the type of image (e.g., nm, nA, etc.).
Color Table
Selects the color table used to encode the Z information.
Color Contrast
Controls the contrast in the image by compressing or expanding the Color table.
Color Offset
Shifts the Color table used to display the image.
Buttons in the Grain Size Panel
Configure
Accesses the Configure panel and defines the values to be applied in the various grain size
functions. For details on the Configure panel, see Section 13.7.3.
Auto Program
Accesses the Auto Program Edit panel and adds or deletes the Grain Size command from the
currently selected Auto Program file. For details on the Auto Program panel, see Section 13.7.6.
Save—Saves Grain Size data to a directory and file name specified by the user.
Note:
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Saves only the image of the grains and not the numeric information. To save
any numeric results, use the Export command.
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Export—Exports
Analysis Commands
(A-L) Grain Size data in ASCII format to a directory and file name defined by
Grain Size the user.
TQuit—Exits the Grain Size analysis feature.
13.7.3 The Grain Size Configure Panel
The Configure panel defines the values to be applied in the various grain size functions.
In the Grain Size panel, click on the CONFIGURE button to access the Configure panel
(See Figure 13.7f).
Figure 13.7f Grain Size Configure Panel
Parameters in the Grain Size Configure Panel
Thresholds
Sets amount of a peak is used for calculating the centroid (weighted average of points on
a curve).
•
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Highest Peak—Value used to define how much of the highest peak (i.e.,
topmost peak in the Correlation histogram) is included when calculating the
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centroid. At 0%, only the maximum point on the curve is included. At 25%, only the
maximum 25% of the peak is included in the calculation of the centroid.
•
Lowest Peak—Value used to define how much of the lowest peak (i.e., peak closest to
the bottom in the Correlation histogram) is included when calculating the centroid. At 0
percent, only the maximum point on the curve is included. At 25 percent, only the
maximum 25 percent of the peak is included in the calculation of the centroid.
Reference
•
Highest Peak—Topmost peak in the Correlation histogram
•
Lowest Peak—Peak closest to the bottom in the Correlation histogram
•
Min peak—Shortest (smallest) peak in the curve
•
Max peak—Tallest peak in the Correlation histogram
Figure 13.7g Grain Size Display
Substrate Depth
Threshold Hgt.
Grain Height
Figure 13.7h represents the data box measurements in Figure 13.7g.
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Figure 13.7h Grain Size Correlation Histogram
Red Slider
Green Slider
Correlation
Threshold Height
Substrate Depth
Grain Height
Depth
Histogram filter cutoff
Lowpass filter which smooths out the wavelengths that lie below the cutoff. Used to reduce noise in
the Correlation histogram.
Threshold height
Sets threshold height used to differentiate grain boundaries, exactly as the cursor slider does on the
height histogram. Unlike the slider cursor, this parameter allows for precise pinpointing of
threshold values.
13.7.4 Limits Window
In the Configure panel, click on the LIMITS button to access the Limits Window panel. The
Limits Window parameters define limits to be applied to the various Grain Size functions (See
Figure 13.7i).
Figure 13.7i Limits Window Panel
Parameters in the Limits Window
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Erode Neighborhood size—N x N square pixel matrix used to erode a binary image where N
equals the Erode Neighborhood size. (E.g., an Erode Neighbor-hood size of 3 uses a 3 x 3 matrix
to evaluate local erosion in the binary image).
If even numbers are entered in Erode and Dilate parameters, an error panel appears (See Figure
13.7j).
Figure 13.7j Limits Window Error Message
Dilate Neighborhood size—Pixel size of matrix used to define image dilation. E.g., a value of 3
uses a 3 x 3 matrix to evaluate local dilation in the binary image. If all values in a 3 x 3
neighborhood are off, no change is effected.
If any one pixel is on, the center pixel is turned on and the result is written to the dilated image file.
The larger the neighborhood size, the less “tolerant” the dilation process becomes.
Num. pix. off for erode—Number of “off” pixels required in a square matrix of Erode
Neighborhood size to apply erosion.
Num. pix. on for dilate—Number of “on” pixels required in a square matrix of Dilate
Neighborhood size to apply dilation.
# of Size Hist. bins—Number of histogram points used to plot grain size data, varying from 1 to
370. As this parameter is reduced, histogram shape becomes coarser and grain sizes are clustered
together into larger and larger (and fewer and fewer) data “bins” or “buckets,” with a
correspondingly larger standard deviation.
Use Boundary grains—When selected, includes grains along the boundary of the cursor box.
When not selected, includes only those grains which fall entirely within the boundary of the cursor
box.
Reverse Thresholding—Selects sample areas below the height histogram, rather than above; this
parameter should be selected when analyzing low-lying grains.
Note:
Another way to analyze low-lying grains is to apply the Off-line/ Modify/
Invert command to the image first, then use Grain Size analysis in the normal
fashion.
13.7.5 Configuration File List Panel
In the Configure panel, click on the FILE button to access the Configuration file list menu (See
Figure 13.7k).
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Analysis Commands (A-L)Figure 13.7k Configuration File List Menu
Grain Size
The panel allows saved Configure files to be opened, deleted or created.
Buttons on the Configuration File List Panel
LOAD—Loads the specified Grain Size Configure file.
SAVE—Saves the current settings as a Grain Size Config file.
DELETE—Deletes the specified Grain Size Configure file.
QUIT—Quits the Configuration file list window .
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13.7.6 Auto Program Edit Panel
Adds or deletes the Grain Size command from the currently selected Auto Program file. A panel
listing measurements reported by the Grain Size command is displayed (See Figure 13.7l).
Figure 13.7l Grain Size Auto Program Edit Panel
Note:
See the end of this section for a definition of the measurements reported in
Grain Size (Mean @ cursor, Number of grains, Max grain size, etc.).
Parameters and Buttons on the Auto Program Edit Panel
A list of parameters (i.e., measurements) add or delete to the grain size specifications. Selecting a
measurement stores it in the Auto Result file when Auto Program is run.
Select All
Selects all the measurements simultaneously.
Clear All
Clears all the measurements simultaneously.
Note
Allows a command prompt to be inserted into the AutoProgram file. Text input is printed in the
result file with the measurements.
Save
Saves selected measurements to the Auto Program file. If the Grain Size command is already in the
current Auto Program file, it asks to retain or append the new grain size.
Delete
Removes the Grain Size command from the Auto Program file.
Quit
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Grain Size
Exits the Auto Program Edit mode without making changes to the Auto Program file.
Note:
The Auto Program File command in the Utility menu must be used to select,
or create, an Auto Program file. The Auto subcommand under the Browse
command selects the files to be processed and executes the Auto Program file.
13.7.7 Grain Size Display Monitor
When Grain Size is applied to an image, the image and an area histogram are first displayed on the
Display Monitor (See Section 13.7g). The area histogram allows you to select individual grain sizes
by sliding the red, triangular cursor horizontally. The measurement values of the selected grain(s)
are displayed in red; measurements for all the grains in a given analysis are displayed in white.
Figure 13.7m Grain Size (Executed) Display
13.7.8 Menu Commands on the Grain Size Display Monitor
Image
Switches the displayed image between either a Binary or Normal mode. In the Binary mode,
grains are shown in white against a black background. In the Normal mode, grains are assigned
their normal, Color table hues against a black background. While adjusting the Threshold
histogram, it is generally best to view the image in Binary mode to more easily differentiate grains.
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Threshold hist[ogram]
Displays pixel height correlation and a pixel height histogram on the right side of the screen. The
height correlation has two sliders that determine the thresholds of grain size. In the normal, default
mode (with Reverse Thresholding disabled) as the red slider is moved to the right, sample areas
below the threshold are removed from the image (black), leaving only the raised area of the grains
behind.
This effect reverses when Reverse Thresholding is enabled, blacking out image features above the
threshold.
Again in normal, default mode, the green slider shows the position of the centroid of the largest
peak (See Section 13.7g).
After grains are defined with the red threshold slider, the Execute command should be selected to
obtain information about the grains.
Execute
Initiates grain size analysis and displays statistics for the grains defined by the height threshold on
the area histogram. The default position of the red line cursor on the area histogram is the area bin
containing the most grains.
Cursor
Offers several different types of cursors, which may be applied to the sample image.
•
Box—Box cursor for selecting rectangular regions of the image. When Execute is
selected, only the region within the box is analyzed.
•
Grain select—Selects one specific grain from the analyzed region. The selected grain is
highlighted in red, its dimensions are displayed in red characters, and its corresponding
plot is indicated on the grain size histogram by a red line cursor.
•
Grain remove—Removes selected grains from the image. This feature may be used to
eliminate unwanted grains and noise.
•
Grain accumulate—Restricts analysis to selected grains. As more grains are chosen,
the display reflects the new accumulated statistics.
•
Line—The line cursor may be used to cut portions of fragmented grains.
•
Clear—Removes all cursors from the image and recalculates the grains and the grainsize histogram.
Erode
Performs a digital erosion on the image. For a definition of Erode, see Section 13.7.1.
Dilate
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Performs a digital dilation on the image. For a definition of Dilate, see Section 13.7.1.
Zoom
Applies a “zoom in” to the grain size histogram by rescaling its horizontal axis to display only plots
included within a green box cursor. Unzoomed portions of the histogram are not displayed and their
corresponding grains are removed from the image. For a description of using Zoom, see also
Section 13.7.10.
•
On—Enables the Zoom command. A red zoom box cursor is displayed on the grain size
histogram. To zoom a portion of the histogram, use the mouse to stretch and position the
cursor box over the selected region of the plot, then click on Zoom/ Zoom. When Zoom
is on, the data in the lower display reflects those grains within the Zoom lines.
•
Off—Disables the Zoom command.
•
Zoom—Applies the Zoom command to the portion of the histogram included within
the green box cursor.
•
Full scale—Restores the grain size histogram to its original (“zoomed out”) form,
showing all plots.
Mouse Operations on the Display Monitor
Red Slider (cursor)—Defines the threshold.
Green Slider (cursor—Defines the substrate
Using the slider
•
1st click, left button—Placing the cursor on the red, triangular slider and clicking the
left mouse button frees the slider horizontally. The slider can then be dragged by rolling
the mouse left and right.
•
2nd click, left button—Fixes the slider and height histogram threshold.
Within the image
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•
1st click, left button—Fixes one corner of a box cursor (or one end of a line cursor) and
“rubberbands” to the opposite corner or end. Also enables the various Cursor options.
•
2nd click, left button—Fixes the opposite end of the box or line cursor.
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13.7.9 Procedure for using the Grain Size Command
Analysis Commands (A-L)
Grain Size
The Off-line/Analysis/Grain Size function is designed to detect and measure granularity on
sample surfaces.
1. Load image.
2. Select area of interest in image by drawing a box cursor (Cursor/ Box).
3. Use Threshold hist. to define grain boundaries by manipulating the height thresholds in
the correlation box (move the red slider). If the grains to be analyzed are low-lying areas
of the image (e.g., pits), select the Reverse Thresholding command within the Limits
window.
4. If more grain definition is required, apply Erode or Dilate to the image. Separate
conjoined grains using Erode, or manually separate them using the Cursor/Line feature.
5. Click on Execute to perform grain analysis and generate data.
6. Use Zoom to isolate grains of a specific size. Use Cursor/Grain Select, Grain
Accumulate or Grain Remove to manually isolate grains of interest and obtain data.
After grain size analysis is executed, statistics are displayed below the histogram for each plot
pointed to by the sliding cursor. If statistics are sought for more than one grain, use the Zoom
command to specify the size range to be analyzed (See Section 13.7.10).
In Figure 13.7g, a white box cursor has been drawn with the mouse to define the area of
interest. Grain Size is performed by clicking on Execute.
A histogram of the various grains is displayed to the right of the image, and various statistics
such as average size are displayed in the lower-right corner.
By sliding the cursor laterally along the bottom of the histogram, you can highlight each grain
plotted. If the Cursor/Grain option is selected, the mouse may be used to manually select
specific grains from the image; the histogram slider automatically moves to the corresponding
plot
(See Figure 13.7m).
13.7.10Using the Zoom Function
Once an image has been analyzed using the Grain Size function, it is possible to isolate grains
of a particular size range and compile statistics by using the Zoom function. In Grain Size
analysis, size zooming enables you to isolate grains of a specified size range. To use the Zoom
function, complete the following:
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1. Load the image to be analyzed and execute the Grain Size function.
Analysis Commands (A-L)
Grain 2.
SizeClick on the Zoom/ On option. Two red, vertical lines (line cursors or sliders) are displayed
on the histogram.
3. Use the mouse to move the red, vertical lines on the histogram. The lines should encompass
the grain size range of interest. Simultaneously, the sample image highlights all grains
falling within the selected range.
Note:
No extra plane fitting is applied to the data during the grain-size calculations.
Some type of plane fitting may be needed beforehand.
Note:
You can divide a grain into multiple grains by drawing edit lines (Cursor/
Line) through the grains on the image.
13.7.11Interpreting Grain Size Data
The data is divided into two sets, separated by boxes. The data set for a specific grain or group of
grains identified by the red arrow slider in the area histogram is shown in red. The data for the
entire area enclosed by the box cursor is shown at the bottom in white.
Data for a specific (highlighted) grain or group of grains:
•
Grain size mean—Mean size of all highlighted grains in the group
•
Grain size std dev—The standard deviation of the grain size for all the highlighted
grains
•
Number of grains—Number of grains in the group.
•
Histogram %—percent of total number of grains
Data for the area enclosed by the box cursor:
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•
Grain size mean—Mean size of all grains enclosed in the box cursor (data set)
•
Grain size std. dev.—Standard deviation for all the grains enclosed in the box cursor
•
Number of grains—Total number of grains enclosed in the box cursor
•
Min grain size—The size of the smallest grain in the data set
•
Max grain size—The size of the largest grain in the data set
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Grain Size Average
13.8 Grain Size Average
The Grain Size Average command defines grain boundaries based on the height of pixel data. It is
nearly identical to the Grain Size command, although it returns a more true and accurate
measurement of all the grains. Grain Size is used to measure and analyze individual grains. Grain
Size Average is better suited for analyzing larger numbers of grains and grain groups. It does this
by making calculations based on two thresholds. One threshold contains the maximum number of
grains, and another is the maximum surface area (above a user-defined threshold plane). A
histogram of grain size can be produced and used to identify specific grains. The mean size and
diameter, total number of peaks, and the total number of grains are calculated and displayed. Grains
may be analyzed singly or in aggregates. “Grains,” as used here, are defined in terms of conjoined
pixels having a height above or below a given Threshold height.
Figure 13.8a Grain Size Average Illustration
Grain size
Threshold height
1552-110
Grains can be isolated by height. This is especially true of certain materials where grain size or type
is linked to height. Consider the chemically etched hard disk shown in Figure 13.8b.
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Grain Size Average
Figure 13.8b Chemically Etched Hard Disk Image
Low-lying grains
Raised grains
Materials which exhibit grain structure but which are very flat (e.g., polished refractories) may
require pre-processing to assist the Grain Size Average software. The contrast enhance, or invert
functions on the Modify menu are often useful. The software analyzes grains by height
thresholding from above (normal, default setting) or below (enable Reverse Thresholding within
the Limits window). Grains may also be differentiated by manually drawing lines to separate them
(Cursor/Line), and by using digital erosion (Erode) and dilation (Dilate) to further separate or
conjoin them.
To access Average Grain Size, select the Analyze/Average Grain Size command (See Figure
13.8c).
Figure 13.8c Grain Size Average Menu
The Average Grain Size panel is displayed allowing the display parameters to be adjusted to the
preferences of the user (See Figure 13.8d).
13.8.1 Average Grain Size Panel
For details on the panels and parameters in the Average Grain Size command, refer to Grain Size
Section 13.7.
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Figure 13.8d Average Grain Size Panel
13.8.2 Display Monitor
When Grain Size Avg is applied to an image, the image and an area histogram are first displayed on
the Display Monitor (See Figure 13.8e). The area histogram allows you to select individual grain
sizes by sliding the red, triangular cursor horizontally.
Figure 13.8e Grain Size Average Display
The measurement values of the selected grain(s) are displayed in red; measurements for all the
grains in a given analysis are displayed in white (See Figure 13.8f).
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Figure 13.8f Grain Size Average (Executed) Display
Menu Commands in the Display Monitor
Threshold hist[ogram]
Displays pixel height correlation and a pixel height histogram on the right side of the screen. The
height correlation has two sliders that determine the thresholds of grain size. In the normal, default
mode (with Reverse Thresholding disabled) as the red slider is moved to the right, sample areas
below the threshold are removed from the image (black), leaving only the raised area of the grains
behind. This effect is reversed when Reverse Thresholding is enabled, blacking out image features
above the threshold.
Again in normal, default mode, the green slider determines the maximum threshold height of the
grains.
The histogram filter cutoff in the Configure panel determine the size of the Gaussian distribution.
A larger cutoff value produces a more gaussian (bell-shaped) curve.
After grains are defined with the red threshold slider, the Execute command should be selected to
obtain information about the grains.
Execute
Initiates grain size analysis and displays statistics for the grains defined by the height threshold on
the height histogram. The default position of the red line cursor on the area histogram is the area
bin containing the most grains.
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Mouse operations on the Display Monitor
Analysis Commands (A-L)
Grain Size Average
Using the slider:
•
1st click, left button—Placing the cursor on the red, triangular slider and clicking
the left mouse button frees the slider horizontally. The slider can then be dragged
by rolling the mouse left and right.
•
2nd click, left button—Fixes the slider and height histogram threshold.
Using the cursor within the image:
•
1st click, left button—Fixes one corner of a box cursor (or one end of a line cursor)
and expands to the opposite corner or end. Also enables the various Cursor
options.
•
2nd click, left button—Fixes the opposite end of the box or line cursor.
13.8.3 Using Average Grain Size
The Off-line/Analysis/Grain Size Average function is designed to measure the true size of
grains on the sample surface. Generally, the procedure for using Grain Size Average is as
follows:
1. Load image.
2. Select area of interest in image by drawing a box cursor (Cursor/ Box).
3. Use Threshold hist. to define grain boundaries by manipulating the height thresholds in
the correlation box (move the red and green sliders). If the grains to be analyzed are
low-lying areas of the image (e.g., pits), select the Reverse Thresholding command
within the Limits window.
4. Click on Execute to perform grain analysis and generate data.
After grain size analysis is executed, statistics are displayed below the histogram for each plot
pointed to by the sliding cursor.
A histogram of the various grains is displayed to the right of the image, and various statistics
such as average size are displayed in the lower-right corner.
By sliding the cursor laterally along the bottom of the histogram, you can highlight each grain
plotted. If the Cursor/Select grain option is selected, the mouse may be used to manually
select specific grains from the image; the histogram slider automatically moves to the
corresponding plot.
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Note:
You can divide a grain into multiple grains by drawing edit lines (Cursor/
Line) through the grains on the image.
13.8.4 Interpreting Grain Size Average Data
The data is divided into two sets, separated by boxes. The data set for a specific grain or group of
grains identified by the red arrow slider in the area histogram is shown in red. The data for the
entire area enclosed by the box cursor is shown at the bottom in white.
Data for a specific (highlighted) grain or group of grains
•
Grain size mean—Mean size of all highlighted grains in the group
•
Grain size std dev—The standard deviation of the grain size for all the highlighted
grains
•
Number of grains—Number of grains in the group (minimum of 1)
•
Histogram %—Percent of the total area comprised by the selected grain
Data for the area enclosed by the box cursor
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•
Number of grains—Number of grains enclosed in the box cursor
•
Grain height—Average height of grain relative to Threshold plane
•
Mean size—The average size (area) of all the grains enclosed in the box cursor
•
Mean diameter—The average diameter of all the grains enclosed in the box cursor
•
Number of peaks—Number of peaks in the Correlation histogram used to calculate
the true Grain size average.
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Chapter 14 Aanalysis Commands (M-Z)
The commands in the Analyze menu provide methods for quantifying the surface properties of
samples. See Chapter 13 for referencing commands beginning with the letters A-L.
Refer to the following sections:
•
Analyze Commands M-Z Overview Section 14.1
•
Particle Analysis Section 14.2
•
Pattern Recognition Section 14.3
•
Power Spectral Density Section 14.4
•
PSD Compare Section 14.5
•
Roughness Section 14.6
•
Section Section 14.7
•
Stepheight Section 14.8
•
Auto Tip Qualify Section 14.9
•
Trench Section 14.10
•
Width Section 14.11
•
MSM and HFMFM Section 14.12
14.1 Analyze Commands M-Z Overview
See Table 14.1a to review the Analyze features and its applications in this chapter.
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Analyze Commands M-Z Overview
Table 14.1a Analyze Commands and Applications
Measurement/Applications
Analyze
Command
Particle Analysis
Depth
Roughnes
s
Power
Spectrum
X
Width
Area
X
X
X
X
Pattern Recognition
Power Spectral Density
X
PSD Compare
X
Roughness
Section
X
X
X
Stepheight
Auto Tip Qual
324
Width
X
X
X
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14.2 Particle Analysis
The Particle Analysis command defines particles based on the height of pixel data. This analysis
was designed for analyzing well isolated particles. Particles may be analyzed singly or in quantities.
Particles in this context, are conjoined pixels above or below a given threshold height. The Particle
Analysis functions are similar to analyzing grains (Analyze menu/Grain Size). .
The analysis includes a histogram of particle size, which can be used to identify specific particles
by size. Measurements on this analysis include: the mean area and standard deviation of the particle
sizes, the total number of particles, a correlation histogram, a bearing ratio curve and a depth
histogram.
Refer to the following sections on Particle Analysis:
•
Example of Particle Analysis and Area Section 14.2.1
•
Erosion and Dilation Section 14.2.2
•
Particle Analysis Panels Overview Section 14.2.3
•
Particle Analysis Panel Section 14.2.4
•
Particle Analysis Configure Panel Section 14.2.5
•
Limits Window Panel Section 14.2.6
•
Configuration File List Section 14.2.7
•
Auto Program Edit Panel Section 14.2.8
•
Particle Analysis Display Monitor Section 14.2.9
•
Procedure for Using Particle Analysis Section 14.2.10
•
Interpreting Particle Analysis Data Section 14.2.11
14.2.1 Example of Particle Analysis and Area
The illustration in Figure 14.2a reflects how particles can be isolated by height. This type of
analysis works well on materials in which particle size or type is linked to height.
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Figure 14.2a Particles Isolated by Height
Particle size
Threshold height
1552-110
14.2.2 Erosion and Dilation
As applied to the Particle Analysis function in digital NanoScope images, erosion and dilation are
used to clump particles together (dilation), or separate them (erosion). Pixels comprising an image
are evaluated in square matrices (“neighborhoods”), sized according to the Erode Neighborhood
size and Dilate Neighborhood size parameters shown on the Limits window.
Erosion—The effect of digital erosion is to separate particles which otherwise touch or conjoin one
another. If all values in a neighborhood are “on,” erosion is not applied. If N pixels are “off” in a
neighborhood of “on” pixels (where N is specified by the Num. pix. off for erode parameter), the
center pixel is turned “off” and the result written to the eroded image file. Note that if the Num.
pix. off for erode parameter is set to 1, the erosion process is triggered if even one pixel is off,
making erosion more sensitive at a setting of 1. Furthermore, if the Erode Neighborhood size is
large, erosion is applied to larger areas of the image. Therefore, maximum erosion is obtained with
a large Erode Neighborhood size setting and a small Num. pix. off for erode setting. Minimum
erosion is attained with a small Erode Neighborhood size setting and a large Num. pix. off for
erode setting.
Dilation—The effect of digital dilation is to conjoin otherwise separate particles, and to mend
broken particles. If all values in a neighborhood are “off,” dilation is not applied.
If N pixels are “on” in a neighborhood of “off” pixels (where N is specified by the Num. pix. on
for dilate parameter), the center pixel is turned “on” and the result written to the dilated image file.
Note that if the Num. pix. on for dilate parameter is set to 1, the dilation process is triggered if
even one pixel is on, making dilation more sensitive at a setting of 1. Furthermore, if the Dilate
Neighborhood size is large, dilation is applied to larger areas of the image. Therefore, maximum
dilation is attained with a large Dilate Neighborhood size setting and a small Num. pix. on for
dilate setting. Minimum dilation is attained with a small Dilate Neighborhood size setting and a
large Num. pix. on for dilate setting.
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14.2.3 Particle Analysis Panels Overview
For navigating in Particle Analysis, see Figure 14.2b.
Figure 14.2b Navigating in Particle Analysis
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14.2.4 Particle Analysis Panel
Access the Particle Analysis panels by selecting Off-line/Analyze/Particle Analysis (See Figure
14.2c).
Figure 14.2c Particle Analysis Panel
Parameters in the Particle Analysis Panel
Data scale—Controls the vertical range of the image corresponding to the full extent of the color
table. The units of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table—Selects the color table used to encode the Z information.
Color contrast—Controls the contrast in the image by compressing or expanding the color table.
Color offset—Shifts the color table used to display the image.
Buttons on the Particle Analysis Panel
Configure—Defines the values to be applied in the various particle size functions (See Section
14.2.5).
Auto Program— Adds or deletes the Particle Analysis command from the currently selected Auto
Program file (See Section 14.2.8).
Save—Saves Particle Analysis image to a directory and filename you specify.
Export—Exports Particle Analysis data in ASCII format to a directory and file name you define.
Quit— Exits the Particle Analysis command.
14.2.5 Particle Analysis Configure Panel
In the Particle Analysis panel, click the CONFIGURE button to access the Configure panel (See
Figure 14.2d).
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Figure 14.2d Particle Analysis Configure Panel
Parameters in the Particle Analysis Configure Panel
Histogram filter cutoff—Lowpass filter which smooths out the wavelengths that lie below the
cutoff in the depth correlation histogram. Used to reduce noise in the Correlation histogram.
Min Peak to Peak—Specifies a minimum placement of the green and red cursors for particles
configured to the specified distance (nm) between the red and green cursors (threshold height
distance).
Threshold Height—Sets threshold height (distance between the green “substrate” and red
“threshold” slider cursors) used to differentiate particle boundaries, exactly as the Red Slider cursor
does on the Correlation histogram. Unlike the slider cursor, this parameter allows for precise
pinpointing of threshold values.
Bearing Percentage—Displays the percentage of the surface that lies above the threshold height
indicated by the red arrow on the bearing ratio curve.
Buttons on the Configure Panel
Limits—The Limits Window parameters define limits to be applied to the various Particle Analysis
functions. For details on the Limits Window panel, see Section 14.2.6.
File—Opens a Configuration File List panel to save configure parameters. Allows saved Configure
files to be opened and saved. For details on the Configuration File List, see Section 14.2.7.
Quit—Exits the Configure panel
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14.2.6 Limits Window Panel
Figure 14.2e Particle Analysis Limits Window Panel
Parameters in the Limits Window
Erode Neighborhood size—N x N square pixel matrix used to erode a binary image where N
equals the Erode Neighborhood size. (For instance, an Erode Neighborhood size of 3 uses a 3 x
3 matrix to evaluate local erosion in the binary image.) For details on Erosion, see Section 14.2.7.
Dilate Neighborhood size—Pixel size of matrix used to define image dilation. E.g., a value of 3
uses a 3 x 3 matrix to evaluate local dilation in the binary image. If all values in a 3 x 3
neighborhood are off, no change is effected. If any one pixel is on, the center pixel is turned on and
the result is written to the dilated image file. The larger the neighborhood size, the less “tolerant”
the dilation process becomes. For details on Dilation, seeSection 14.2.7.
Num. pix. off for erode—Number of “off” pixels required in a square matrix of Erode
Neighborhood size to apply erosion.
Num. pix. on for dilate—Number of “on” pixels required in a square matrix of Dilate
Neighborhood size to apply dilation.
# of Size Hist. bins—Number of histogram points used to plot particle size data (default is 420).
Note:
As this parameter is reduced, histogram shape becomes coarser and particle
sizes are clustered together into larger and larger (and fewer and fewer) data
“bins” or “buckets,” with a correspondingly larger standard deviation.
Use Boundary grains—When selected, includes particles along the boundary of the cursor box.
When deselected, includes only those grains which fall entirely within the boundary of the cursor
box.
Reverse Thresholding—Selects sample areas below the height histogram, rather than above; this
parameter should be selected when analyzing low-lying areas or depressions rather than particles.
Note:
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Another way to analyze depressions is to apply the Off-line / Modify / Invert
command to the image first, then use Particle Analysis in the normal fashion.
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14.2.7 Configuration File List
The FILE button in the Configure panel, opens the Configuration file list menu in Figure 14.2f.
The panel allows saved Configure files to be opened.
Figure 14.2f Configuration File List
Buttons on the Configuration File List Panel
Load—Loads the specified Configure file.
Save—Saves the current settings as a Particle Analysis Configure file (*.prt).
Delete—Deletes the specified Configure file (*.prt).
Quit—Exits the Configuration file list window.
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14.2.8 Auto Program Edit Panel
Adds or deletes the Particle Analysis command from the currently selected Auto Program file. A
panel listing measurements reported by the Particle Analysis command is displayed (See Figure
14.2g). Selecting a measurement stores it in the results file when Auto Program is run.
Note:
Measurements not shown: Width min, Width max, and Width sigma.
Figure 14.2g Auto Program Edit Panel
Buttons on the Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows a descriptive message to be added to the display and the Auto Program Results file.
Save—Saves selected measurements to the Auto Program file. If the Particle Analysis command is
already in the current Auto Program file, it retains its position in the file.
Note:
An option exists to overwrite the command or add this as a second particle
analysis command in the program.
Delete—Removes the Particle Analysis command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
Note:
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The Auto Program File command in the Utility menu must be used to select,
or create, an Auto Program file. The Auto subcommand under the Browse
command selects the files to be processed and executes the Auto Program file.
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14.2.9 Particle Analysis Display Monitor
In addition to a menu bar and status bar, Particle Analysis displays a selected image, a Bearing
Ratio Curve (Bearing area %) and Correlation (pixel height) histogram to execute particle analysis
(See Figure 14.2h).
Figure 14.2h Particle Analysis Display
Particle Analysis
matching Threshold
height
Bearing percent
cursor
Bearing
Ratio
Curve
Substrate depth
Threshold height
Correlation
Histogram
AbsThres. height
Depth
Histogram
Figure 14.2h displays three histograms on the right side of the display screen. The top histogram is
a Bearing area percent or Bearing Ratio curve showing the Bearing percent or data to be analyzed
above this percent (e.g., for a Bearing percent = 20, the top 80% of data is included in the analysis).
The middle correlation histogram shows data in pixel height for measuring the substrate depth,
threshold height and the absolute threshold height. This histogram has two sliders that determine
the thresholds of particle size. In the normal, default mode (with Reverse Thresholding disabled)
as the red slider is moved to the right, sample areas below the threshold are removed from the
image (black), leaving only the raised area of the particles behind. This effect is reversed when
Reverse Thresholding is enabled, blacking out image features above the threshold.
The green line in the height histogram determine the size of the gaussian distribution. A larger area
within the box produces a more gaussian (bell-shaped) curve.
The bottom graph displays the depth histogram % for read only analysis.
Measurements Calculated in the Display Monitor
As the cursor highlights a specific particle (or group of particles), measurements for that particle are
displayed at the bottom of the screen.
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•
Substrate depth—Distance between the the substrate peaks (green slider cursor) and
the highest peak.
•
Threshold height—Distance between the threshold (red cursor) and the substrate
(green cursor) peaks.
•
Abs Thres. height—Distance between the threshold (red cursor) and the lowest peak.
•
Bearing Percent—Percent of data that has occurred above the depth indicated by the
Bearing cursor.
•
Particle height—Height of specific particles or group of particles for the cursor
placements.
Display Monitor after Executing Particle Analysis
After selecting a group of particles to analyze, click Execute to calculate the Mean, minimum,
maximum and sigma values of the isolated particles. A new screen appears that includes a menu
bar, the selected particles, a Diameter histogram, a Height histogram and two data boxes (See
Figure 14.2i).
Figure 14.2i Particle Analysis Image
Menu Bar Commands
Image
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Switches the displayed image between either a Binary or Normal mode. In the Binary mode,
grains are shown in white against a black background. In the Normal mode, grains are assigned
their normal, color table hues against a black background. While adjusting the Threshold
histogram, it is generally best to view the image in Binary mode to more easily differentiate
particles.
Threshold hist[ogram]
Returns the display to the original Particle Analysis Display (See Figure 14.2h) where the threshold
is set on the depth correlation histogram.
Execute
Initiates particle analysis and displays statistics for the particles defined by the height threshold on
the height histogram. Red arrows below the diameter and height histograms default to most
numerous particle type (See Figure 14.2i).
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Cursor
Offers several different types of cursors applicable to the sample image.
•
Box—Use for selecting rectangular regions of the image. When Execute is selected,
only the region within the box is analyzed. The cross-hair cursor defines the center of
the pattern.
•
Grain select—Selects one specific particle from the analyzed region. The selected
particle is highlighted in red, its dimensions are displayed in red characters, and its
corresponding position on the diameter and height histograms indicated by a red arrow
cursor.
•
Grain remove—Removes selected grains from the image. This feature may be used to
eliminate unwanted particles.
•
Grain accumulate—Restricts analysis to selected particles. As more particles are
chosen, their accumulated statistics are displayed.
•
Line—Used to divide a particle in to 2 pieces. Two particles are created from the
original “cut” particle.
•
Clear—Removes all cursors from the image and recalculates the particle and the
particle-size histogram.
Erode
Performs a digital erosion on the image (For definitions of erosion,
see Section 14.2.2).
Dilate
Performs a digital dilation on the image (For definitions of dilation,
see Section 14.2.2).
Zoom
Applies a “zoom-in” to the particle height histogram by rescaling its horizontal axis to display only
plots included within a white box cursor. Unzoomed portions of the histogram are not displayed
and their corresponding grains are removed from the image For details on using the Zoom
command, see Procedures for Using the Zoom Function.
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•
On—Enables the Zoom command. A red zoom box cursor is displayed on the particle
height histogram. To zoom a portion of the histogram, use the mouse to stretch and
position the cursor box over the selected plots, then click on Zoom / Zoom.
•
Off—Disables the Zoom command.
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Zoom—Applies the Zoom command to the portion of the histogram included within the
white box cursor. Particles within the zoomed height box are highlighted in red and the
statistical data reflects only the selected particles.
•
Full scale—Restores the particle histogram to its original (“zoomed out”) form, with all
particles showing on the plots.
Mouse operations on the Display Monitor:
Using the slider:
•
1st click, left button—Placing the cursor on the red, triangular slider and clicking the left
mouse button frees the slider horizontally. The slider can then be dragged by rolling the
mouse left and right.
•
2nd click, left button—Fixes the slider position on the histogram.
Within the image:
•
1st click, left button—Fixes one corner of a box cursor (or one end of a line cursor) and
“rubberbands” to resize the box as the mouse is rolled. Also enables the various Cursor
options.
•
2nd click, left button—Fixes the opposite corner of the box or end of the line cursor.
Procedures for Using the Zoom Function
Once an image has been analyzed using the Particle Analysis function, it is possible to isolate
particles of a particular size range and compile statistics by using the Zoom function. In Particle
Analysis, size zooming enables you to isolate particles of a specified size range. To use the Zoom
function, do the following:
1. Load the image to be analyzed and execute the Particle Analysis function. The particle
diameter and height histograms appear to the right of the image.
2. Click on the Zoom / On option. Two red, vertical lines are displayed on the histogram.
3. Use the mouse to move the red, vertical lines on the histogram. The lines should be set to
either side of the particle size range to be zoomed. Simultaneously, the sample image
highlights all particles falling within the zoomed size range. The data displayed in the box
below the histogram changes, depending upon the width of the zoom.
If a single histogram plot is zoomed on, the number of particles (displayed as Count in the
data box below the height histogram) is set to 1; if seven histogram plots are zoomed on, the
count is set to 7, etc.
For images having a broad range of particle sizes, the Zoom / Zoom function expands the
histogram scale for plots lying between the vertical, red cursors.
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14.2.10Procedure for Using Particle Analysis
The Off-line/Analysis/Particle Analysis function is designed to detect and measure the lateral and
vertical dimensions of isolated particles on the sample surfaces. Generally, the procedure for using
Particle Analysis is as follows:
1. Load image.
2. Select area of interest in image by drawing a box cursor
(Cursor/Box).
3. Define particle boundaries by sliding the red and green sliders in the correlation box. If the
particles to be analyzed are low-lying areas of the image (e.g., pits), select the Reverse
Thresholding command within the Limits window.
4. Click on Execute to perform particle analysis and generate data.
5. Use Zoom to isolate particles of a specific size. Use Cursor/Grain Select, Grain
Accumulate or Grain Remove to manually isolate particles of interest and obtain data.
6. Separate conjoined particles using the Cursor/Line feature.
After particle analysis is executed, statistics are displayed below the histogram for each plot
pointed to by the sliding cursor. If statistics are sought for more than one particle, use the Zoom
command to specify the size range to be analyzed or use the Grain Accumulate function (Analyze
menu/Grain Size)
In the image below, a white box cursor has been drawn with the mouse to define the area of interest.
Particle Analysis is performed by clicking on Execute. The diameter and height histograms of the
various particles are displayed to the right of the image, and various statistics such as average
height are displayed at the bottom of the screen.
By sliding the cursor laterally along the bottom of the histogram, you can highlight each particle
plotted. If the Cursor/Select Grain option is selected, the mouse may be used to select specific
grains from the image; the histogram slider automatically goes to the corresponding plot. Data for
each particle is displayed in Figure 14.2j.
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Figure 14.2j Example of Particle Data Display
14.2.11Interpreting Particle Analysis Data
Mean
Minimum
Maximum
Sigma
Height
Average height of all
particles in data set
Minimum height of
all particles in data set
Maximum height of
all particles in data set
Standard deviation of
height of all
particles in data set
Area
Average area of all
particles in data set
Minimum area of all
particles in data set
Maximum area of all
particles in data set
Standard deviation of
area of all particles in
data set
Diameter
Average diameter of
all particles in data set
Minimum diameter of
all particles in data set
Maximum
diameter of all
particles in data set
Standard deviation of
diameter of all
particles in data set
Length *
Average length of all
particles in data set
Minimum length of
all particles in data set
Maximum length of
all particles in data set
Standard deviation of
length of all
particles in data set
Width **
Average width of all
particles in data set
Minimum width of all
particles in data set
Maximum width of
all particles in data set
Standard deviation of
width of all particles in
data set
* Length = the longest axis in a particle.
** Width = the perpendicular bisector to the length.
14.3 Pattern Recognition
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Because of (M-Z)
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Aanalysis Commands
Pattern Recognition
two images ever appear exactly the same. The Pattern Recognition command is able to
adjust itself to find patterns wherever they appear within an image.
You can specify a maximum allowable X-Y shift between one image and another, and the
software indicates when patterns have shifted a distance greater than this acceptable
distance. This shift amount is specified using the Max Allowable parameters on the
AFM Pattern Recognition panel.
After the software locates the pattern and detects that the shift exceeds Max Allowable
parameters, the actual shift is limited to the Max Allowable value in either X, Y, or both.
Refer to the following Pattern Recognition sections:
•
Pattern Recognition Panel Section 14.3.1
•
Parameters in the Pattern Recognition Panel Section 14.3.2
•
Buttons in the Pattern Recognition Panel Section 14.3.3
•
Helpers Drop-Down Menu Section 14.3.4
14.3.1 Pattern Recognition Panel
The AFM Pattern Recognition panel appears on the Control Monitor to adjust the X-Y
shift between one image and another in locating patterns. The panel includes buttons to
teach patterns, manually shift locating within the image, undo changes and add these
functions to an Auto Program file.
Figure 14.3a AFM Pattern Recognition Panel
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14.3.2 Parameters in the Pattern Recognition Panel
Max Allowable X Shift
This parameter sets the maximum amount of shift on the X axis that is acceptable for locating a
model from image to image. It is specified in microns.
Changes to the Max Allowable % X Shift parameter (described below) automatically adjust this
parameter.
Max Allowable % X Shift
This parameter defines the maximum acceptable X axis shift for locating a model from image to
image as a percentage of the Scan size (displayed in the Scan Controls panel on the control
monitor). For instance, an image with a Scan size of 10 µm and a Max Allowable % X Shift value
of 25% would be acceptable if the image shift did not exceed 2.5 microns.
Changes to the Max Allowable X Shift parameter (described above) automatically adjust this
parameter.
Max Allowable Y Shift
This parameter sets the maximum amount of shift on theY axis that is acceptable for locating a
model from image to image. It is specified in microns.
Changes to the Max Allowable % Y Shift parameter (described below) automatically adjust this
parameter.
Max Allowable % Y Shift
This parameter defines the maximum acceptable Y axis shift for locating a model from image to
image as a percentage of the Scan size (displayed in the Scan Controls panel on the control
monitor). For instance, an image with a Scan size of 10 µm and a Max Allowable % Y Shift value
of 25% would be acceptable if the image shift did not exceed 2.5 microns.
Changes to the Max Allowable Y Shift parameter (described above) automatically adjust this
parameter.
14.3.3 Buttons in the Pattern Recognition Panel
Teach Pattern
If the pattern you wish to locate has not been taught, draw a box around the desired feature, then
select the TEACH PATTERN button.
An Error prompt appears asking you to specify the area of interest on the image if you select the
TEACH PATTERN button before drawing the box (See Figure 14.3b).
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Figure 14.3b Teach Pattern Alert Box
Troubleshooting Teach Pattern:
1. Use the mouse to draw a box around the feature to be used as the pattern. The cursor box
should encompass the specific feature of interest.
2. After locating the pattern and sizing the box appropriately, click again on the TEACH
PATTERN button.
3. Return to the AFM Pattern Recognition panel (See Figure 14.3a).
Select Pattern
If the pattern you wish to locate has already been taught, click on the SELECT PATTERN button to
find it and other patterns that have previously been taught. The control monitor displays a listing of
all saved pattern files (See Figure 14.3c).
Note:
Pattern Recognition files have an *.ovs (Off-line Vision Site) file extension.
Figure 14.3c Pattern Recognition Site File Panel
Find Pattern
After designating the pattern you wish to find (using SELECT PATTERN, above), click on the FIND
PATTERN button to locate it in the image. A cursor box identifies it in the currently loaded image.
You may find it necessary to use the SHIFT IMAGE button to make minor adjustments to the image
center (See “Shift Image” on page 14-343).
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If the pattern is not found, an error message appears.
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Figure 14.3d Unidentified Pattern Error Box
If the recognition system does not find the pattern, but you are sure it is within the image,
check for the following conditions:
•
The pattern may provide a poor visual model because of bad definition or
contrast. Patterns must have a distinct, local appearance while remaining
relatively simple. Remember, a plain square or cross is a better pattern than a
complex curvilinear pattern. The pattern is rejected if the model does not
satisfy the Accept Threshold parameter located in the Advanced Features
found on the Helpers menu of the AFM Pattern Recognition panel (See
Advanced Features).
•
The sample may be rotated so that its pattern presents an unrecognizable
model to the vision system. Be sure that samples are loaded each time with
the same angular orientation. Autoloaded samples rarely have this problem,
but manually loaded samples can be loaded at any angle. The use of
registration pins or a stage jig on manually loaded stages helps maintain
consistent angular orientation.
Shift Image
Use the SHIFT IMAGE button to make minor adjustments to the image’s center if it has
been captured away from an ideal center point for your pattern.When you select the
SHIFT IMAGE button, an instruction panel appears (See Figure 14.3e).
Figure 14.3e Shift Image Panel
Use the mouse to move the crosshair cursor to the desired image center, then click on Ok.
The captured image is shifted on the Display Monitor to place the new image center point
at the center of the scan’s field of view.
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Undo
The Undo button restores the currently loaded image to its saved version. The image is cleared of
any cursors and returned to its unshifted position (if you have used the SHIFT IMAGE command or
the image was shifted during execution of FIND PATTERN).
Auto Program
The Auto Program command appends the pattern recognition routine to the list of automatic
routines performed on captured images. When the button is selected, the Auto Program Edit panel
(See Figure 14.3f) appears.
Figure 14.3f Auto Program Edit Panel
This panel can also be used to update the current Auto Program. If, after you click the SAVE button,
the software finds an Auto Program step, you are asked if you want to update it. If not, the software
appends the routine.
The Auto Program Edit panel contains several parameters that may be written to the auto result
file during Auto Program execution. Click on the box next to each of the parameters you want
written to the results file.
The Auto Program Edit parameters are illustrated in Figure 14.3g.
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Figure 14.3g Auto Program Edit
Parameters
•Delta X—The distance (µm) along the X axis over which the
found pattern has shifted from the location of the original, taught
pattern.
Delta X
•Delta Y—The distance (µm) along the Y axis over which the found
pattern has shifted from the location of the original, taught pattern.
Delta Y
Found pattern
•Image Name—The name of the image used to teach the pattern
recognition step in the Auto Program.
Original,
taught
pattern
•Model Name—The filename of the model.
•Model Pos X—The X axis location of the pattern relative to the
left side of the image.
•Model Pos Y—The Y axis location of the pattern relative to the
bottom of the image.
Model Pos X
•Model Size X—Width (X-axis dimension) of the model.
Found pattern
•Model Size Y—Height (Y-axis dimension) of the model.
Model Pos Y
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Buttons on the Auto Program Edit Panel
Select All—Selects all parameters on the panel.
Clear All—Deselects all parameters on the panel.
Note—Allows you to make notations to the file.
Save—Saves the pattern recognition data to the Auto Program file.
Delete—Deletes the pattern recognition data from the Auto Program file.
Quit—Exits the Auto Program Edit panel.
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14.3.4 Helpers Drop-Down Menu
The Helpers drop-down menu (See Figure 14.3h) on the AFM Pattern Recognition panel
provides access to functions that configure and modify the pattern recognition process.
Figure 14.3h Helpers Menu on Pattern Recognition Panel
View Pattern Recognition Models
Loads a previously taught video model and displays it on the video monitor.
Advanced Features
The Off-line Pattern Rec - Advanced panel (See Figure 14.3i) enables you to change threshold
parameters.
Figure 14.3i Off-line Pattern Rec - Advanced Panel
Display Hit List
A list of X-Y coordinate positions at which the pattern was found in the image the last time Find
Pattern was run.
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14.4 Power Spectral Density
The Power Spectral Density (PSD) function is useful in analyzing surface roughness. This function
provides a representation of the amplitude of a surface’s roughness as a function of the spatial
frequency of the roughness. Spatial frequency is the inverse of the inplane spatial wavelength of the
roughness features.
The PSD function reveals periodic surface features that might otherwise appear “random” and
provides a graphic representation of how such features are distributed. On turned surfaces, this is
helpful in determining speed and feed data, sources of noise, etc. On ground surfaces, this may
reveal some inherent characteristic of the material itself such as grain or fibrousness. At higher
magnifications, PSD is also useful for determining atomic periodicity or lattice.
Refer to the following Power Spectral Density sections:
•
NanoScope PSD Measurements Section 14.4.1
•
PSD and Surface Features Section 14.4.2
•
PSD and Flatness Section 14.4.3
•
Power Spectral Density Panel Section 14.4.4
•
Parameters in the Spectral Density Panel Section 14.4.5
•
Buttons on the Spectral Density Panel Section 14.4.6
•
Power Spectral Density Display Monitor Section 14.4.7
14.4.1 NanoScope PSD Measurements
The Power Spectral Density function computes the following information for the image:
Rev. C
•
Total power spectrum - Power is roughness amplitude squared, so power is in units of
length squared. Power spectrum is a plot of power as a function of spatial wavelength or
frequency.
•
1D PSD - A one dimensional power spectral density. Power spectral density is a plot of
the density, in spatial frequency space, of the power spectrum. Its units are length
squared divided by a one dimensional frequency, or 1 over length, which is length
cubed. A 1D PSD can be calculated in either the X direction of the data or in the Y
direction.
•
1D isotropic PSD - A different version of a one dimensional power spectrum.
•
2D isotropic PSD - A two dimensional power spectral density. Its units are length
squared divided by a two dimensional frequency, or 1 over length squared, which is
length to the fourth power. This is isotropic in the sense that it is an average taken over
all directions in the data.
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•
RMS roughness values - Since the RMS roughness is the square root of the integral of
the PSD, over some wavelength or frequency interval, this calculation can be
conveniently done when one has the PSD.
14.4.2 PSD and Surface Features
Consider the image in Figure 14.4a.
1564-110
Figure 14.4a Waveform Surfaces
X
Y
This synthetic surface consists of essentially two dominant wave forms: a long period waveform
along the X-axis, and a shorter period waveform along the Y-axis. A 2 dimensional power spectral
density plot consists of two dominant spikes (one for each dominant wavelength), plus some
number of extra wavelengths inherent within the image. (These extra wavelengths may appear due
to fine surface features and/or side bands of the dominant wave forms.) Because of the sinusoidal
nature of the composite wave form, a relatively small set of spectral frequencies suffices to describe
the entire surface. By contrast, an image comprised of angular (saw-toothed or square) waveform
contains more spatial frequency components.
Over a given range of spatial frequencies the total power of the surface equals the RMS roughness
of the sample squared.
The frequency distribution for a digitized profile of length L, consisting of N points sampled at
intervals of d0 is approximated by:
2d o
PSD(f) = -------N
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N
i 2π
---------- ( n – 1 ) ( m – 1 )
∑eN
n=1
2
z(n)
m–1
for f = ------------Nd o
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N⁄2
Where i = √-1, and frequencies, f, range from --1- to ----------- . Practically speaking, the algorithm used
L
L
to obtain the PSD depends upon squaring the FFT of the image to derive the power. Once the
power, P, is obtained, it may be used to derive various PSD-like values as follows:
P
1D PSD = -----∆f
P
1D isotropic PSD = --------2πf
P
2D isotropic PSD = -------------------2πf ( ∆f )
The terms used in the denominators above are derived by progressively sampling data from the
image’s two-dimensional FFT center
(See Figure 14.4b).
Figure 14.4b Progressive Data Sampling
f = 1 pixel
f = 2 pixels
f = 3 pixels
∆f
f = 4 pixels
Each sampling swings a “data bucket” of given frequency f. Since samples are taken from the image
N⁄2
- , where N is the scan size in pixels. This forms
center, the sampling frequency, f, is limited to ---------L
the upper bandwidth limit (i.e., the highest frequency) of the PSD plot. The lower bandwidth limit
is defined at 1/L.
14.4.3 PSD and Flatness
PSD is used increasingly as a metrology tool for evaluating extremely flat surfaces, such as
polished or epitaxial silicon. Generally, the desired surface is expected to adhere to certain PSD
thresholds, signifying it meets a specified flatness criterion.
The main advantage gained over traditional RMS specifications is that PSD flatness is qualified
through the full spectral range of interest. For example, one may specify spectral thresholds at
frequencies measured on the atomic scale, thus ensuring surfaces consist largely of uniform lattices.
Setting the precise thresholds for various materials remains a matter of debate.
Consider the image of epitaxial gallium arsenide in Figure 14.4c (See file “gaas.epi” on the images
disk).
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Figure 14.4c Epitaxial Gallium Arsenide Image
This surface is comprised of “terraces” formed from the material’s natural lattice structure; each
terrace is one atomic monolayer thick and is spaced at fairly regular intervals. This degree of
flatness is handily evaluated with PSD, as the terraces produces a spectral spike corresponding to
their spacing wavelength.
A PSD plot for this type of surface generally takes the form shown in Figure 14.4d.
Figure 14.4d PSD Plot for Terraced Sample
Spectral spike corresponding to "terrace" spacings on surface
2D Isotropic PSD
104
P
S
D
10-1
101
10-2
Wavelength (µm/cycle)
This tapered PSD plot is characteristic of flat, isotropic surfaces. Longer wavelengths are present
up to the scan width, and are accompanied by uniformly decreasing powers of shorter wavelengths
down to 2 pixels. On the plot shown above a spike stands out, corresponding to the wavelength
spacing of the terraced features. Depending upon the qualitative standards of the person evaluating
such a plot, this spike may exceed a threshold standard of flatness.
14.4.4 Power Spectral Density Panel
The Spectral Density panel allows items on the Display Monitor to be adjusted to your
preferences.
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Figure 14.4e Spectral Density Panel
Aanalysis Commands (M-Z)
Power Spectral Density
14.4.5 Parameters in the Spectral Density Panel
Data Scale
Controls the vertical range of the image corresponding to the full extent of the color table.
Color Table
Selects the color table used to encode Z information.
Export Data
Sets the type of data to be exported from the display screen parameters. Data is exported in a
spreadsheet format readable by most third-party applications. Generally, data is exported in
two-column x N/2 rows, where N equals the scan size in pixels. Each row is separated by a
carriage return; columns are separated with a space.
Range and Settings:
•
Power, 1D PSD, 1D iso PSD, 2D iso PSD
Color Contrast
Controls the contrast in the image by compressing or expanding the color table.
Color Offset
Changes the image color by shifting the range of the color table used to display the image.
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14.4.6 Buttons on the Spectral Density Panel
2D—Executes a two-dimensional Power Spectral Density analysis.
X—Executes a one-dimensional Power Spectral Density analysis along the X-axis.
Y—Executes a one-dimensional Power Spectral Density analysis along the Y-axis.
Note—Allows a descriptive message to be added to the display.
Export—Saves current PSD data to a directory and file name you define
(See Figure 14.4f).
Figure 14.4f Power Spectral Density Export Panel
Save—Saves current PSD analysis to a directory and file you specify.
Note:
The PSD Compare function may only be performed on PSD data files that
have been saved to a common directory.
Quit—Exits the Power Spectral Density function.
14.4.7 Power Spectral Density Display Monitor
The Display Monitor generates a histogram of wavelength versus power. Both wavelength and
power are indicated on logarithmic scales (See Figure 14.4g).
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Figure 14.4g Power Spectral Density Display
Power Spectral Density
Power Spectral Density
2D Isotropic PSD
109
P
S
D
101
101
10-3
Wavelength (µm/cycle)
Wavelength (µm/cycle):
Frequency (cycles/µm):
Power (nm2):
1D PSD (nm3):
1D isotropic PSD (nm3):
2D isotropic PSD (nm4):
Total Power:
Equivalent RMS:
Power Between Cursors:
Equivalent RMS:
0.0914
10.9
5.28e+004
5.28e+007
8.53e+005
8.53e+008
0.00791
126
0.0789
78.9
0.104
104
0.000566 nm4
0.0238 nm
0.000503 nm4
0.0224 nm
rings
The calculation begins as soon as the command is selected from the menu. The PSD and a
table of values from the graph are shown on the Display Monitor.
Display Table Parameters
•
Wavelength—The wavelength in µm/cycle units at current cursor positions.
•
Frequency—The frequency in cycles per µm at current cursor positions.
•
Power—Power measured in nm2 at current cursor positions.
•
1D PSD—One-dimensional power spectral density. (See Section 14.4.2 for
mathematical definition.) Power measured in nm3 at current cursor positions.
•
1D isotropic PSD—One-dimensional, isotropic power spectral density. (See
Section 14.4.2 for mathematical definition.) Power measured in nm3 at current
cursor positions.
•
2D isotropic PSD—Two-dimensional, isotropic power spectral density. (See
Section 14.4.2 for mathematical definition.) Power measured in nm4 at current
cursor positions.
Note:
Rev. C
The 2D isotropic PSD is the power function that is plotted on the Display
Monitor histogram.
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•
Total power—The sum of the power contained in the entire spectrum.
•
Equivalent RMS—The root-mean-square (RMS) roughness of the sample. It is
calculated as the square root of the total power.
RMS =
∫ W ( p,q )δpδq
•
Power Between Cursors—The sum of the power contained in the portion of the
spectrum between the cursors.
•
Equivalent RMS—The root-mean-square (RMS) roughness of the sample contributed
by the frequencies between the cursors. It is calculated as the square root of the integral
of the Power Between Cursors (above).
Plot
Specifies the vertical axis of the PSD plot.
•
Power—Power (nm2 units) is plotted against wavelength.
•
1D PSD—One-dimensional power (nm3 units) is plotted against wavelength.
•
1D ISO—One-dimensional, isotropic power (nm3 units) is plotted against wavelength.
•
2D ISO—Two-dimensional, isotropic power (nm4 units) is plotted against wavelength.
Mouse operations on the Display Monitor
The cursors in the power spectrum can be moved by clicking on a cursor and dragging the mouse.
Note:
The ASTM E-42.14 STM/AFM Subcommittee report on “Standard Practices
for Analyzing and Reporting Surface Roughness as Measured by STM/AFM”
describes the basic method for quantifying the surface roughness of materials
imaged by STM and AFM.
14.5 PSD Compare
The PSD Compare command permits one-to-one comparison between PSD data files (as saved
from the Analyze/Power Spectral Density command). The power spectral density plot for each
compared file is presented on a graph so that overlapping power data may be directly compared;
PSD data is displayed in a table below. Plots are displayed and compared for: power, 1-dimensional
PSD, 1-dimensional isotropic, or 2-dimensional isotropic data.
To utilize PSD Compare, it is necessary to collect all PSD files in a common directory and transfer
to that directory beforehand. When the PSD Compare command is accessed, the software searches
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the current directory for PSD files. If none are found, an error message (“Warning: Directory has
no files with .psd extension”) displays.
Refer to the following PSD Compare sections:
•
PSD Compare Panel Section 14.5.1
•
Buttons on the PSD Compare Panel Section 14.5.2
•
PSD Compare Display Monitor Section 14.5.3
•
Reference Data Section 14.5.4
14.5.1 PSD Compare Panel
Clicking on the Analyze / PSD Compare command displays the PSD Compare panel (See Figure
14.5a).
Figure 14.5a Power Spectral Density Compare Panel
All saved PSD data files are listed for the current directory and feature a “.psd” extension. To
change directories, use the Off-line file manager panel. To select files for comparison, click on the
box to the left of each file; an “X” indicates that the file is to be compared. Up to six PSD data files
may be selected and compared at one time.
14.5.2 Buttons on the PSD Compare Panel
Execute—Plots the selected data (where an “X” has been placed) to the Display Monitor histogram
and displays each data set’s PSD information.
Clear—Deselects all previously selected files (removes all “X”s).
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Quit—Quits PSD Compare command.
14.5.3 PSD Compare Display Monitor
On the Display Monitor, the selected files are plotted relative to one another. If the PSD data is
similar between files, plots may be overlapping.
Figure 14.5b PSD Compare Display
Plot Graph
PSD Compare
106
Click left button on field
entry to select Ref. File
or turn plot on/off
Reference
*
data1
data2
2
D
Plot
yes
yes
Click here with mouse
to select reference data.
I
S
O
10-13
Filename
PSD Type
Power (nm2)
1D PSD (nm3)
1D iso PSD (nm3)
2D iso PSD (nm4)
Delta 2D PSD
Delta Power
Wavelength (µm)
Frequency (/µm)
Plot: 2D ISO
101
10-2
Wavelength (µm/cycle)
:
:
:
:
:
:
:
:
:
:
Reference
data1
2D
0.0114
45.5
0.429
1.71e+003
-1.16e+003
-0.0077
0.238
4.2
data2
2D
0.00367
14.7
0.139
554
0
0
Graph: Both
Sliding the line cursor back and forth on the plot histogram displays new data for each point. Where
a plot has no data, the value reads “NA” (not available).
Display Monitor Commands
Plot
Commands listed here present different types of data histograms on the Display Monitor. Choices
are outlined below.
356
•
Power—Total PSD power data is plotted.
•
1D PSD—One-dimensional PSD data is plotted.
•
1D ISO—One-dimensional isotropic PSD data is plotted.
•
2D ISO—Two-dimensional isotropic PSD data is plotted.
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Graph
Commands listed here determine the manner in which data is plotted to the histogram. Choices are
outlined below.
•
Curves—Plots data as a series of curves.
•
Lines—Plots data as a series of lines (bar graph).
•
Both—Plots data with both curves and lines simultaneously.
14.5.4 Reference Data
Clicking on the Reference column in the upper-left corner of the Display Monitor allows a file to
be designated as the reference data set. An asterisk (*) is placed alongside the selected file name
and REFERENCE is displayed above the data column. Each data set is also assigned a separate color
to assist in organization. Two values are generated from the reference data:
Rev. C
•
Delta 2D PSD—Difference in two-dimensional PSD value between reference data and
selected data.
•
Delta Power—Difference in total power between reference data and selected data.
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14.6 Roughness
The Roughness command generates a wide variety of statistics for surfaces, including classical
roughness values, peak and summit (texture) data and surface area calculations. “Image” statistics
are reported for the entire image. “Box” statistics are reported only for the region you define within
a cursor box. In addition, the area included within a box cursor can be augmented with passbands
and stopbands to isolate specific features.
Most industrial standards for roughness measurement call for planefitting of data before values are
calculated. Digital Instruments’ Roughness routine applies a temporary, first-order planefit before
calculating roughness statistics. On many surfaces, especially those which are tilted, this yields
different values from those seen in raw (unplanefitted) data. Moreover, peripheral features included
within the analyzed region may produce cumulative results uncharacteristic of the feature(s) of
interest. To ensure the best results, you should observe the following rules when using Roughness
analysis:
•
If the image shows signs of second- or third-order distortion (e.g., bow due to large
scans areas on large scanners), apply a second- or third-order Flatten (Off-line/Modify/
Flatten) and Planefit (Off-line/Modify/Planefit) to the image before using Roughness
analysis.
•
Isolate your analysis to specific areas of the image. This may be accomplished by using
Off-line / Modify / Zoom to limit the entire image, or by using the box cursor in
Roughness to analyze only select portions of the image.
For further details on the Roughness panels and parameters, refer to the following sections:
•
Roughness Parameters Section 14.6.1
•
Navigating Control Panels in Roughness Analysis Section 14.6.2
•
Roughness Panel Section 14.6.3
•
Auto Program Edit Panel Section 14.6.4
•
Screen Layout Panel Section 14.6.5
•
Roughness Display Monitor Section 14.6.6
•
Troubleshooting the Roughness Function Section 14.6.7
•
Roughness Data Definitions Section 14.6.8
•
Example of Using Roughness Analysis Section 14.6.9
14.6.1 Roughness Parameters
There are currently forty-five parameters available from the Roughness routine; however, only
parameters selected from the Screen Layout menu are actually displayed and reported. In addition,
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some parameters are reported only when certain subroutines are turned on from the command bar
of the Display Monitor. For example, Surface area is displayed only when it has been selected
from the Screen Layout panel AND the “Surface Area” subroutine is turned On.
Table 14.6a lists all parameters available within the Roughness routine, along with subroutines
required (if any) to be turned On for their display.
To display a parameter, select it from the Screen Layout panel first, then turn On the required
subroutine.
Note:
Only 21 parameters can be selected an on time. If the box gets too big, the
image statistics after 21 do not display.
Refer to Section 14.6.8 for Roughness parameter definitions.
Table 14.6a Roughness Parameters
Required Subroutine
Parameter
“Peak”
“Surface Area”
“Summit”
10 pt mean (Rz)
Area Thresh abs
X
Area Thresh ref
X
Area Thresh (%rms)
X
Av max depth (Rvm)
X
Av max ht (Rpm)
X
Box x dimension
Box y dimension
Img. Mean
Img. Ra
Img. Raw mean
Img. Rmax
Img. RMS (Rq)
Img. Srf. area
Img. Srf. area diff
Img. Z range
Kurtosis
Line density
Max depth (Rv)
X
Max height (Rmax)
Max peak ht (Rp)
X
Mean
Mean roughness (Ra)
Rev. C
Peak count
X
Peak Threshold
X
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Table 14.6a Roughness Parameters
Required Subroutine
Parameter
“Peak”
Peak Thresh ref
X
Peak Thresh (%rms)
X
“Surface Area”
“Summit”
Raw mean
RMS (Rq)
Skewness
Summit count
X
Summit curvature
X
Summit Cutoff
X
Summit Cutoff ref
X
Summit Cutoff (%rms)
X
Summit density
X
Summit diameter
X
Summit Threshold
X
Summit Thresh ref
X
Summit Thresh (%rms)
X
Summit rad. curv.
X
Summit slope
X
Surface area
X
Surface area diff
X
Z range
14.6.2 Navigating Control Panels in Roughness Analysis
Off-line/Analyze/Roughness accesses the Roughness panel. After selecting the captured image,
you can configure and program commands that allow for specific Roughness Analysis. For an
overview of the navigational path in this analysis, see Figure 14.6a.
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Figure 14.6a Navigating in Roughness Analysis
14.6.3 Roughness Panel
The Roughness panel includes familiar display parameters and buttons to control the image display
and set parameters (See Figure 14.6b).
Figure 14.6b Roughness Panel.
Parameters in the Roughness Panel
Data Scale
Controls the vertical range of the image corresponding to the full extent of the color table. This is
the difference between the highest and lowest points within the image.
The units of this item vary according to the type of image (e.g., nm, nA, etc.).
Note:
Rev. C
This value does not correct for tilt in the plane of the data; therefore, plane
fitting or flattening the data changes the data while the data scale remains the
same value.
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Color Table
Selects the color table used to encode the image (e.g., Z information).
Color Contrast
Controls the contrast in the image by compressing or expanding the color table.
Color Offset
Shifts the color table used to display the image.
Buttons in the Roughness Panel
Note—Appends a descriptive message to the image file and the bottom of the displayed image.
Auto Program—Accesses the Auto Program Edit panel and allows Roughness parameters to be
selected and stored in the Auto Program file list. For details on the Auto Program Edit panel, see
Section 14.6.4.
Screen Layout—Accesses the Screen Layout panel and allows you to select the Roughness
parameters to display. For details on the Screen Layout panel, see Section 14.6.5.
Quit—Exits the Roughness command.
14.6.4 Auto Program Edit Panel
The Auto Program Edit panel allows Roughness parameters to be selected and stored in the Auto
Program file list. When the Auto Program file is run, the selected Roughness parameters are
computed and listed in a report file along with any other functions selected (See Figure 14.6c).
Figure 14.6c Auto Program Edit Panel
Note:
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Select up to 21 parameters to be added to the output result file.
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Buttons in the Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Set Limits—Sets specific measurement limits for an AutoProgram result. You may specify the Min,
Max ,and % of Section values for each result available in the Set Limits window.
Note—Allows a descriptive message to be added to the display and the Auto Program Results file.
Save—Saves selected measurements to the Auto Program file. If the Roughness Analysis
command is already in the current Auto Program file, it retains its position in the file.
An option exists to overwrite the command or add this as a second particle analysis command in the
program.
Delete—Removes the Roughness command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
Note:
The Auto Program File command in the Off-line/ Utility menu must be used
to create and edit Auto Program files. The Auto subcommand under the Browse
command selects the currently selected files to be processed and executes the
Auto Program file (Utility menu/Auto Program File).
14.6.5 Screen Layout Panel
The Screen Layout panel allows you to select which Roughness parameters display. Because of
the limited size of the Display Monitor, it shows a maximum of twenty-one parameters at any one
time; however, the current Auto Program files still contains all selected parameters.
Figure 14.6d Screen Layout Panel
Buttons and Parameters on the Screen Layout Panel
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To select a parameter, use the mouse to place an “X” in the box next to it. Deselect a parameter by
removing its “X” with the mouse.
Save—Finalizes the selected Roughness parameters. Once the Save button is clicked, the selected
parameters appear on the Display Monitor.
Quit—Exits the Screen Layout panel without changing the parameter selection.
14.6.6 Roughness Display Monitor
The Display Monitor shows the image alongside Roughness parameters selected from the Screen
Layout panel. Parameters chosen from the Screen Layout panel are displayed in two data boxes
(i.e., Box Statistics and Image Statistics). Values listed in the Box Statistics apply only to the area
within the box cursor; if no box cursor is drawn, no values appear there. Image Statistics apply to
the entire image. Commands on the menu bar control the operating mode (See Figure 14.6e).
Figure 14.6e Roughness Display
Statistics
For Whole
Image
Parameters
For Boxed
Area on
Image
Roughness Display Menu Bar Commands
Peak
The Peak feature, when switched On, isolates specified height portions of the image (peaks) from
background data. Peaks are specified using the Peak Threshold panel, either in terms of their
absolute height or their deviation from the RMS value of all surface data, and relative to either the
highest data point (Peak) or the lowest (Zero). When Peak is turned On, portions of the image
contained within the box cursor and falling within the specified boundaries are retained; all other
data is removed.
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•
On—The following statistical parameters are turned on: Peak Threshold; Peak Thresh
ref.; Peak Thresh (%rms); 10 Pt Mean (Rz); Peak count; Max peak ht (Rp); Ave.
Max ht (Rpm); Max depth (Rv); and, Ave. max depth (Rvm). All Peak parameters are
calculated from the threshold you define with the Threshold subcommand.
•
Off—Peak statistics are not calculated.
•
Threshold—Defines a height threshold for the Peak measurement (See Figure 14.6f).
Figure 14.6f Peak Threshold Panel
Reference
Options
Value Type
Options
Peak Threshold Panel
The Reference options select whether the threshold is defined relative to the Zero (lowest) value, or
the tallest Peak in the selected region.
The Value Type options select whether the threshold is defined as an absolute distance (Absolute
value) from the reference point or a percentage of the root-mean-square (RMS %) of the Z values.
Surface Area Menu Command
Controls the surface area statistical calculations. Disable Surface Area functions on the Area
Threshold panel (i.e., unlike Peak functions that are enabled in the Menu commands).
Range and Settings:
Rev. C
•
On—The following statistical parameters are turned on: Surface area; Surface area
diff; Area Thresh (% rms); and, Area Thresh abs. Parameters are calculated based on
the threshold you define with the Threshold subcommand.
•
Off—Surface area statistical parameters are not calculated.
•
Threshold—The Area Threshold panel allows a height threshold for surface area
statistics (See Figure 14.6g).
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Figure 14.6g Area Threshold Panel.
Area Threshold Panel
When Threshold is On, the surface area is calculated for the surface above the threshold. The
threshold is applied according to the Reference and Value Type parameters in the panel. When
Threshold is Off, the surface area of the entire selected area is calculated.
The Reference options determine whether the threshold is defined relative to the Zero value of the
data or the tallest Peak within the selected region.
The Value Type options determine whether the threshold is defined as an absolute distance from
the reference point in nanometers (Absolute value) or a percentage of the root-mean-square (RMS
%) of the Z values.
Note:
Surface area is calculated as a sum of triangles over the surface of the analyzed
area defined within two-by-two pixel kernels (See Figure 14.6h).
Figure 14.6h Surface Area Calculation
Triangular areas
Pixels
Summit
A summit is any surface data point which is higher than its four nearest neighbors by a height you
specify. The Summit subroutine allows you to isolate summits according to the Threshold
settings.
See also, Section 14.6.8 for specific descriptions of summit parameters.
Range and Settings:
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•
Aanalysis
On—The number of summits within the box cursor is determined based
on theCommands (M-Z)
Roughness
threshold you define with the Threshold subcommand. The number of summits
is reported as the Summit count. The number of summits is divided by the area
of the box cursor and reported as the Summit density.
•
Off—The Summit determination is not performed.
•
Threshold—The Summit Threshold panel appears on the control monitor,
allowing a height threshold for the summit determination to be defined.
•
The Reference selection defines whether the threshold is defined relative to the
zero value of the data or the tallest peak in the selected region.
•
The Value Type selects whether the threshold is defined as an absolute distance
from the reference point or a percentage of the root-mean-square of the Z
values.
•
Cutoff—The Summit Cutoff panel appears on the control monitor, allowing a
cutoff threshold for the summit determination to be defined.
•
Summit disp. on/off—Allows you to display the summit.
Zero crossing
A zero crossing is a point where the Z values go through zero regardless of slope. This
value is the total number of zero crossings along both the X and Y center lines divided by
the sum of the box dimensions.
Range and Settings:
Rev. C
•
On—The number of zero crossings along the X and Y center lines of the box
cursor is determined.
The number of zero crossings is divided by the sum of the lengths of the X and
Y center lines and reported as the Line density.
•
Off—The zero crossing determination is not performed.
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Stopband
Excludes covered regions of the image from analysis.
Range and Settings:
•
Add—This creates a rectangle you define containing an X whose area is excluded from
the roughness calculation. Click on the image to create the stopband.
•
Remove—Removes stopbands which have already been drawn. Click on the
stopband(s) to be removed.
•
Clear—Removes all stopbands.
Execute—Calculates roughness values for the region you define.
Cursor—Controls the type of cursor to be used.
•
Clear—Removes all cursors from the image.
•
Box—Places the cursor into box mode, which is the normal, default cursor mode. Boxes
are defined by dragging the cursor from one corner to another. To switch the cursor to
summit mode, select the Summit option.
•
Summit—Allows summits to be selected and analyzed individually. Selected summits
are distinquished by a small X. Summit statistics on the Display Monitor pertain only to
the selected summit. To switch the cursor back to box mode, select the Box option.
Mouse Operation on the Display Monitor
Within the image
368
•
1st click, left button—Locates a corner of a rectangle and allows the rectangle to be
formed by moving the mouse.
•
2nd click, left button—Fixes the position of the opposite corner of the box.
After selecting the Execute command, the 2nd click, left button calculates the
roughness values for the area confined by the box, and displays the values in the
measurement chart.
•
3rd click, left button—The effect of the third depends on the position of the cursor when
the click occurs.
•
On box edge—clicking the left button when the cursor is on an edge of the box allows
that edge of the box to be repositioned by moving the mouse.
•
On box corner—Clicking the left button when the cursor is on a corner of the box allows
that corner of the box to be repositioned by moving the mouse.
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Roughness
•
Inside the box—Clicking the left button when the mouse is inside the box allows the
entire box to be repositioned by moving the mouse.
•
4th click, left button—Freezes the position and/or size of the box.
•
Right mouse button—Clicking the right mouse button when the cursor is in any of the
windows moves the cursor to the menu bar.
14.6.7 Troubleshooting the Roughness Function
•
All Roughness parameters are affected by offline filters applied to the data beforehand.
When qualifying roughness statistics, be certain to evaluate the impacts of previous
operations.
•
Some statistics calculated by the Roughness routine are also calculated by other
routines. (For example, RMS roughness is also calculated by the Offline / Analyze /
Section and PSD routines).
If statistics differ slightly from routine-to-routine, it may be because they are calculated
for a line rather than an area, or because planefitting was utilized. Check the appropriate
sections in this manual to determine how values are calculated.
Rev. C
•
Regarding the Effects of Planefitting on Roughness Statistics—When Roughness
analysis is applied to an image, statistical values are calculated according to the relative
heights of each pixel in the image.
Planefitting—used to correct images for tilt and bow—reorients these pixels in a manner
which can affect roughness statistics dramatically on some surfaces. This is especially
true of surfaces having broad, coplanar features. Planefitting can be applied at the time
of file capture using Real-time planefit and Off-line planefit from a Channel panel, or
via either of the two Modify / Plane Fit functions.
•
When Roughness analysis is applied to an image, the image data is automatically
planefit beforehand. This is done to accord with ASME and ISO metrological standards.
(Only the Raw mean parameter is exempt from this operation, being calculated from
raw data only.) To avoid unexpected results due to planefitting, be certain to apply
Roughness analysis only to the surface(s) of interest by utilizing a cursor box, or by
scanning just the specific site of interest. Including peripheral features within an
analyzed area may produce cumulative results uncharacteristic of the feature(s) of
interest.
•
The relationship between the zero plane and the data also changes according to the
setting of the Off-line planefit parameter. If the Off-line planefit parameter is set to
None the offset is not removed from the data and it is very possible that the zero plane
does not intersect the data. The other settings of the parameter subtract the average Z
value from every point in the image so the data varies around the zero plane.
•
Regarding Basic Roughness Measurements—Average roughness (Ra) is one of the most
commonly used roughness statistics. Figure 14.6i represents two surfaces having the
same “average roughness”.
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Roughness
Similarly, a number of other roughness values are based upon least-squares calculations
(e.g., RMS roughness, or Rq), and their algorithms are more concerned with a best fit of
all height points than with the spatial frequency of features.
Figure 14.6i Basic Roughness Measurements
A
Best-fit plane
B
0
1567-11
The surface of image A is represented as having a high frequency profile of features. Image B
represents a separate surface having the same average feature height, but distributed at wider
(lower-frequency) intervals. In terms of average and RMS roughness, both surfaces are “equally
rough.” If you are interested in differentiating between the two, you must rely upon more precise
statistical parameters. Refer to the Analyze / Bearing and Power Spectral Density functions, which
analyze surface features in terms of depth-versus-occurrence and wavelength-versus-power,
respectively.
14.6.8 Roughness Data Definitions
Statistics used by the Roughness routine are defined in this section. The terms are listed
alphabetically. Most are derived from ASME B46.1 (“Surface Texture: Surface Roughness,
Waviness and Lay”) available from the American Society of Mechanical Engineers, which should
be consulted.
10 pt mean (Rz)
This is the average difference in height between the five highest peaks and five lowest valleys
relative to the Mean Plane. In cases where five pairs of peaks and valleys do not exist, this value is
based on fewer points.
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Area Thresh abs
Roughness
The threshold absolute value in terms of height.
Area Thresh ref
The reference point for the area threshold.
Area Thres (%rms)
The threshold value as a percentage of the root-mean-square of the Z values.
Av max depth (Rvm)
Average distance between the five lowest profile points and the mean data plane.
Av max ht (Rpm)
Average distance between the five highest profile points and the mean data plane.
Box x dimension
The width of the Lx box cursor you define.
Box y dimension
The length of the Ly box cursor you define.
Img. Mean
Mean value of data contained within the image.
Img. Ra
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Roughness
Arithmetic average of the absolute values of the surface height deviations measured from the mean
plane.
n
1
R a = --- ∑ Z j
n
j=1
Img. Raw mean
Mean value of image data without application of plane fitting.
Img. Rmax
Maximum vertical distance between the highest and lowest data points in the image.
Img. RMS Rq
Root mean square average of height deviations taken from the mean data plane, expressed as:
Zi
∑
-------------2
n
= Rq
Img. Srf. area
The three-dimensional area of the analyzed region. This value is the sum of the area of all of the
triangles formed by three adjacent data points.
Img. Srf. area diff
Difference between the image’s three-dimensional Surface area and its two-dimensional, footprint
area.
Img. Z range
Maximum vertical distance between the highest and lowest data points in the image. (Same as Img.
Rmax).
Kurtosis
This is a non dimensional quantity used to evaluate the shape of data about a central mean. It is
calculated as follows:
n
1 1
4
Kurtosis = --------4- --- ∑ Z j
n
Rq j = 1
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Graphically, kurtosis indicates whether data are arranged flatly or sharply about the mean.
Line Density
The number of zero crossings per unit length on the X and Y center lines of the box cursor. A zero
crossing is a point where the Z values go through zero regardless of slope. This value is the total
number of zero crossings along both the X and Y center lines divided by the sum of the box
dimensions.
Max Depth (Rv)
Lowest data point in examined region.
Max height (Rmax)
Maximum vertical distance between the highest and lowest data points within the cursor box.
Max peak ht (Rp)
Maximum peak height within the analyzed area with respect to the mean data plane.
Mean
The average of all the Z values within the enclosed area. The mean can have a negative value
because the Z values are measured relative to the Z value when the microscope is engaged. This
value is not corrected for tilt in the plane of the data; therefore, plane fitting or flattening the data
changes this value.
Mean Roughness (Ra)
Arithmetic average of the absolute values of the surface height deviations measured from the mean
plane within the box cursor:
n
1
R a = --- ∑ Z j
n
j=1
Peak Count
The number of Surface peaks taller than the threshold.
Peak Threshold
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Roughness
The threshold value in terms of height.
Peak Thresh ref
The reference point for the peak threshold.
Peak Thresh(%rms)
The threshold value as a percentage of the root-mean-square of the Z values.
Raw Mean
Mean value of image data within the cursor box you define without application of plane fitting.
RMS (Rq)
This is the standard deviation of the Z values within the box cursor and is calculated as:
Rq =
( Zi ) 2
∑
------------------n
where Zi is the current Z value, and N is the number of points within the box cursor. This value is
not corrected for tilt in the plane of the data; therefore, plane fitting or flattening the data changes
this value.
Skewness
Measures the symmetry of surface data about a mean data profile, expressed as:
n
1 1
3
Skewness = --------3- --- ∑ Z j
n
Rq j = 1
where Rq is the RMS roughness. Skewness is a non dimensional quantity which is typically
evaluated in terms of positive or negative. Where Skewness is zero, an even distribution of data
around the mean data plane is suggested. Where Skewness is strongly non-zero, an asymmetric,
one-tailed distribution is suggested, such as a flat plane having a small, sharp spike (> 0), or a small,
deep pit (< 0).
Summit Count
Number of summits within the analyzed area having the defined “Threshold” and “Cutoff” values.
Note:
374
Summits are identified on the image with special markers:
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Roughness
Summit Curvature
Measure of the peak’s sharpness using the summit and one of its nearest neighbors.
Summit Cutoff
Distance where a summit is recognized, referenced either from the mean Zero data plane or the
highest Peak. The cutoff is measured in terms of an Absolute value, or as a percentage of the total
data range (% of Range) within the analyzed area.
Figure 14.6j Summit Illustrations
Summit (individual pixel)
Neighboring pixel (1 of 4)
Summit Threshold
Maximum data point
[Max peak ht (Rp)]
Maximum data point
[Max peak ht (Rp)]
Z
Summit Cutoff
(referenced from Peak)
Summit
Summit base (+X)
Summit base (-X)
X
Summit
diameter
Z
Summit slope
Summit Cutoff
(referenced from Zero)
X
Summit Cutoff ref
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Reference from
which the Summit Cutoff is measured. There are two choices: the Zero
Aanalysis Commands
(M-Z)
Roughness data plane, and the Peak (maximum) data point.
Summit Cutoff (%rms)
Summit Cutoff measured in terms of a percentage of the root mean square.
Summit Density
Number of summits found within the analyzed image area expressed as peaks per square
micron.
Summit Diameter
Diameter of summit as measured from one summit base to another.
Summit Threshold
Minimum distance a pixel must rise above all four of its nearest neighbors to be
identified as a summit.
Note:
Usually, this value must be small to work effectively (e.g., < 500 nm
Absolute value, or
< 2% of Range), as many summits prove to be relatively flat on top.
Summit Thresh ref
Reference from which the Summit Threshold is measured.
Summit Thresh (% range)
Summit Threshold expressed as a percentage of height range.
Summit Rad. Curv.
Radius of curvature expressed as the inverse of the summit curvature found by using a
summit and one of its nearest neighbors.
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Roughness
Summit Slope
Slope of a line connecting a summit and one of its bases along one of its axes.
Surface Area
The three-dimensional area of the region enclosed by the cursor box. This value is the sum of the
area of all of the triangles formed by three adjacent data points.
Surface Area Diff
Difference between the analyzed region’s three-dimensional Surface area and its two-dimensional,
footprint area.
Surface Area Ratio
The percentage of the three-dimensional surface area (as defined above) to the two-dimensional
surface area produced by projecting surface onto the threshold plane. The calculation is as shown
below.
Σ ( surface area i )
- – 1 × 100%
surface area diff = ------------------------------------------Σ ( projected area i )
When the threshold is lower than the lowest point in the image, the projected area equals the twodimensional image area for the image calculations and the area of the box cursor for the box
calculations.
Z Range
Peak-to-valley difference in height values within the analyzed region.
14.6.9 Example of Using Roughness Analysis
For general Roughness Analysis, complete the following procedures:
1. Select the captured image in the list of files.
2. Select the Roughness command (Off-line/Analyze/Roughness).
3. When the Roughness panel appears, configure the image display settings for desired color
settings.
Note:
Rev. C
The color settings are computer generated and should not be confused with
actual sample colors.
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Section
4. Set Auto Program settings for multiple task settings and to save settings in a file for later
use.
5. In Display Monitor, select Cursor commands to enable or disable desired areas to be
calculated (e.g., enable box cursor to create a box area within image).
6. In Display Monitor, select Execute to calculate roughness statistics.
7. Note calculations and continue process of Roughness Analysis.
14.7 Section
The Section command displays a top view image, upon which three types of reference lines may be
drawn. The cross-sectional profiles and fast Fourier transform (FFT) of the data along those
reference lines are shown in separate windows on the Display Monitor. Roughness measurements
are made of the surface along the reference line(s) you define.
Section is probably the most commonly used Analyze command; it is also one of the easiest
commands to use. To obtain consistently accurate results, ensure your image data is corrected for
tilt, noise, etc. before analyzing with Section.
If you wish to analyze the depth of features, you have three choices from the Analyze menu:
Bearing, Depth and Section. This portion of the chapter is devoted to the Section command,
which is designed for analyzing unique, one-of-a-kind surfaces.
To compare feature depth at two or more similar sample sites (e.g., when analyzing etched depths
on large numbers of identical silicon wafers), use the Depth command (See Depth Section 13.6).
For statistical analysis (histograms) of depth data, use the Bearing command (See Bearing Section
13.4 and Bearing Compare Section 13.5).
For further information, refer to the following sections on Section Analysis:
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•
About Sectioning of Surfaces Section 14.7.1
•
Navigating Control Monitor Panels in Section Analysis Section 14.7.2
•
Section Panel Section 14.7.3
•
Section Auto Program Edit Panel Section 14.7.4
•
Section Display Monitor Section 14.7.5
•
Troubleshooting the Section Command Section 14.7.6
•
Example—Section Analysis of a Diffraction Grating Section 14.7.8
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Section
14.7.1 About Sectioning of Surfaces
Samples are sectioned to learn about their surface profiles. The Section command does not reveal
what is below the surface—only the profile of the surface itself. When sectioning samples, you
should first ascertain surface topology. Depending upon the topology and orientation of the sample,
the results of Section analysis may vary tremendously (See Figure 14.7a).
Figure 14.7a Section Analysis Illustrated
1
2
1568-110
3
1
2
3
In Figure 14.7a, the sample surface (a diffraction grating) is sectioned along three axes. Sections 1
and 2 are made perpendicular to the grating’s rules, revealing their blaze and spacings. (Sections 1
and 2 may be compared simultaneously using two fixed cursor lines, or checked individually with a
moving cursor.) Section 3 is made parallel to the rules, and reveals a much flatter profile because of
its orientation.
The Section command produces a profile of the surface, then presents it on the Display Monitor.
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Section
Figure 14.7b Section Command Profile
1569-11
0
Generally, Section analysis proves most useful for making direct depth measurements of surface
features. By selecting the type of cursor (fixed, moving, or average), and its orientation to features,
you may obtain the following analysis:
•
Vertical distance (depth), horizontal distance and angle between two or more points.
•
Roughness along section line: RMS, Ra, Rmax, Rz.
•
FFT spectrum along section line
See also, Section Data Definitions Section 14.7.7 and Roughness Section 14.6 for additional
information on Section data and information regarding roughness calculations.
14.7.2 Navigating Control Monitor Panels in Section Analysis
The Section panels allow for definitions of image display, changing data for specific analysis
of the sample surface. For an overview in navigating in this analysis, see Figure 14.7c.
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Figure 14.7c Navigating in Section Analysis
14.7.3 Section Panel
The Section panel displays parameters to define the image display.
Figure 14.7d Section Panel
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Section
Parameters in the Section Panel
1 x 1 Aspect Ratio
Selecting this option adjusts the Data scale to display the section profile with its true X-Y-Z aspect
and proportions. On very flat samples, profiles may be imperceptible with 1 x 1 Aspect Ratio
selected; however, section cursors and other functions may still be used.
Data scale
Controls the vertical range used to display the top view image and the cross-sectional profile along
the reference line. The units of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode Z information.
Color contrast
Controls image contrast by compressing or expanding the color table.
Color offset
Changes image color by shifting the image’s color table range.
Buttons on the Section Panel
Note—Appends a note to the display. The note may include a time stamp.
Auto Program—Adds or deletes the Section command from the currently selected Auto Program
file. For details on the Auto Program panel, see Section 14.7.4.
Save—Saves Section data to a directory and file name you specify. Once the Section file is saved,
the screen prompts you whether to append the file name with a note
(See Figure 14.7e).
Figure 14.7e Section Save Note Panel
Note:
Comments may be up to 32 characters in length.
Quit—Exits the Section command.
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14.7.4 Section Auto Program Edit Panel
The Auto Program panel adds or deletes the Section command from the currently selected Auto
Program file. A panel listing measurements reported by the Section command is placed on the
screen. Selecting a measurement stores it in the data file when Auto Program is run (See Figure
14.7f).
Figure 14.7f Section Auto Program Edit Panel
Buttons on the Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Set Limits—Sets specific limits for the peak result. You may specify the Rmax Min (high peak),
Rmax Max (low peak) , and % of Section Rmax values.
Note:
If the data does not fit within the set limits, the file is flagged with an “L” in the
Auto Result file.
Note:
For Section data definitions, see Section 14.7.7.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Section command is already in
the current Auto Program file, and option appears to overwrite the current file or add a new Section
analysis to the Auto Program file.
Delete—Removes the Section command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
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Note:
The Auto Program File command in the Utility menu can be used to select, or
create, an Auto Program file. The Auto subcommand under the Browse
command selects the files to be processed and executes the Auto Program file.
14.7.5 Section Display Monitor
The Display Monitor includes (See Figure 14.7g):
•
Menu Bar (Cursor, Marker, Spectrum Zoom, Center Line, Offset, Clear)
•
Cross-Sectional Profile
•
Small image (lower left corner)
•
Spectrum (FFT) (Next to image)
•
Upper-right date box (defined by reference markers)
•
Lower-right data box (defined by all reference markers in the Cross-sectional profile
and Spectrum).
•
Status bar
Figure 14.7g Section Display Monitor
CrossSectional
Profile
Roughness
Measurements
Measurements
from all of the
markers. (Red
markers only
.
shown
in this
example).
FFT (Spectrum)
Display Monitor Explanation. The menu, status bar and five windows are shown on the Display
Monitor.
An image is displayed in the lower-left window, allowing the cross-sectional line you specify to be
drawn on the image. When the line is drawn, the cross-sectional profile is displayed in the upperleft window, and the FFT (Spectrum) along the line is displayed in the lower-center window. The
extra points are generated by interpolation.
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Section
The upper-right window lists roughness information based on the position of the presently selected
reference markers. The lower-right window displays measurements from all of the reference
markers in the Cross-sectional Profile window and the Spectrum window. The menu bar provides
the subcommand list for the Section mode while the status bar reflects the subcommands that have
been selected.
Display Monitor Menu Commands
Cursor
Five cross-sectional line types are available:
•
Fixed—Allows a fixed-position line to be drawn on the image and shows the crosssectional profile and FFT of the data along that line.
•
Mouse operations for a Fixed cursor are as follows:
•
1st click—Anchors the origin of the reference line and expands from the selected
position, allowing a reference line to be drawn in any direction.
•
2nd click—Anchors the terminal point of the reference line, then displays the crosssectional profile and the FFT of the data along this line.
•
Moving—Allows a fixed-position line to be drawn on the image and places a moving
reference line perpendicular to the fixed line on the screen. The cross-sectional profile
and FFT of the data along the moving reference line is displayed.
•
Mouse operations for a Moving cursor:
•
1st click—Anchors the origin of a line segment and expands from the selected position,
allowing a line segment to be drawn in any direction.
•
2nd click—Anchors the terminal point of the first (dashed) line segment and draws a
moving reference line perpendicular to the fixed-line segment. The cross-sectional
profile and the FFT along the reference line are displayed at this time. The position of
the moving reference line tracks the movements of the mouse. When the mouse is
stationary, the cross-sectional profile and the FFT of the data along the moving reference
line is updated on the Display Monitor.
•
3rd click—Fixes the position of the reference line.
•
4th click—Recouples the reference line to the movement of the mouse.
•
Average—Allows a fixed-position reference line to be drawn on the image and places a
box parallel to the reference line.
The average of all the cross-sectional profiles perpendicular to the reference line and
constrained by the box is displayed. The FFT of the average profile is also displayed.
•
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Mouse Operations for Average
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•
1st click—Anchors the origin of a line segment and “rubberbands” from the selected
position, allowing the line segment to be drawn in any direction.
•
2nd click—Anchors the terminal point of the first line segment and draws a box along
the fixed-line segment. The average profile of the lines perpendicular to the segment and
confined by the box is displayed. The FFT along the average cross-section is also
displayed at this time.
•
As a reference, the cursor positions also show up as red lines in the box.
•
3rd click—Allows the box to be moved (cursor inside box), or resized (cursor on edge of
box). Clicking on the corner allows the box to be resized in two directions.
•
4th click—Fixes the box position or size.
•
Fixed Two—Allows two fixed-position reference lines to be drawn on the image,
showing the cross-sectional profiles of the data along those lines. Cross-sectional
profiles may be shifted relative to one another by dragging the profile’s handle (tiny box
on reference line) with the mouse.
•
Fixed Three—Allows three fixed-position reference lines to be drawn on the image,
showing the cross-sectional profiles and FFTs of the data along those lines. Crosssectional profiles may be shifted relative to one another by dragging the profile’s handle
(tiny box on reference line) with the mouse.
Marker
Adds or deletes pairs of reference markers (inverted colored triangles) from the cross-sectional
profile window.
•
Draw—Adds another pair of reference markers on the cross-sectional profile window if
all three pairs are not already visible. Reference markers are added in the following
order: Red-Green-White.
•
Erase—Removes a pair of reference markers from the cross-sectional profile window.
Reference markers are removed in the opposite order that they are added: White-GreenRed.
Spectrum Zoom
Controls the magnification of the Spectrum window. Eight-to-one, four-to-one, two-to-one, and
one-to-one options are available.
Center Line
Displays the calculated center line (RMS) between cursors on the cross-sectional profile window.
The center line is displayed in red with equal areas above and below.
Range and Settings:
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•
On—Switches the center line on between cursors. The cutoff length (lc) defined on the
FFT plot, changes the calculation of the center line.
•
Off—Switches the center line off between cursors.
Offset
Allows the center line cursor in the Section plot on the Display Monitor to be arbitrarily moved updown so the viewing window can be shifted relative to the data. To move the center line, drag with
the mouse.
Range and Settings:
•
On—Turns Offset on by making center line available for moving (green center line).
•
Off—Turns Offset off by anchoring the center line at “0” (yellow center line).
•
Cursor Clear—Anchors the center line at its currently set position.
Mouse Operations for Offset:
•
1st click—Once the Offset subcommand is On, clicking on the green center line cursor
in the section plot picks up the green line. Moving the mouse moves the green line
cursor and defines the value of the new center line. When the mouse movement stops,
the values on the vertical axis shift to make the position of the green line the new center
of the graph.
•
2nd click—Fixes the center line of the plot.
Clear
Removes the cross-sectional profile window and the Spectrum window and clears the referencemarker measurements to allow new reference lines to be selected.
14.7.6 Troubleshooting the Section Command
Rev. C
•
Reference (Triangle) Markers—When in the cross-sectional profile window or
Spectrum window, reference markers can be 'picked-up' by clicking the left button
when the cursor is on the desired marker. Moving the mouse changes the position of the
marker. A second click drops the marker. The horizontal separation, vertical separation,
and angle between the reference markers in the cross-sectional profile window are listed
in the lower-right measurement window.
•
Jumping between Windows—After selecting a cursor type from the Cursor menu, the
cursor jumps to the image window. After selecting Marker / Draw, the cursor jumps to
the cross-sectional profile window and is attached to one of the added reference
markers. When Spectrum Zoom is selected, the cursor jumps to the Spectrum window
and is attached to the reference marker.
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•
Clicking the right mouse button when the cursor is in one of the windows moves the
cursor to the menu bar.
14.7.7 Section Data Definitions
Roughness Measurements
The standard deviation (RMS), mean Roughness (Ra), the maximum height (Rmax), and the 10point roughness (Rz) for the segment between the reference markers are also listed in the
measurement (upper right) window. This is the roughness data.
These four parameters are calculated based upon the following definitions and criteria:
•
L—Length of the roughness curve.
•
RMS (Standard Deviation)—Standard deviation of the Z values between the reference
markers, calculated as follows:
RMS = σ =
∑ ( Zi – Zave ) 2-----------------------------------n
•
where Zi is the current Z value, Zave is the average of the Z values between the
reference markers, and N is the number of points between the reference markers.
•
lc—Cutoff length (in nanometers) of the high-pass filter used in creating the roughness
curve. The FFT period is equal to lc.
•
Ra (Mean Roughness)—Mean value of the roughness curve relative to the center line,
calculated as:
L
1
R a = --- ∫ f ( x ) dx
L
0
•
where L is the length of the roughness curve and f(x) is the roughness curve relative to
the center line.
•
Rmax (Maximum Height)—Difference in height between the highest and lowest points
on the cross-sectional profile relative to the center line (not the roughness curve) over
the length of the profile, L.
•
Rz (Ten-Point Mean Roughness)—Average difference in height between the five highest
peaks and five lowest valleys relative to the center line over the length of the profile, L.
In cases where five pairs of peaks and valleys do not exist, this is based on fewer points.
Profile
Cross-sectional data between the two reference markers.
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Roughness Curve
Cross-sectional data between the two reference markers that have been high-pass filtered with a
two-pole filter having a gain of 75% at the cutoff length, lc.
Mean Line of Profile
Calculated straight line based upon the profile that has a minimum variance about this line.
Center Line of Roughness Curve
Calculated straight line based upon the roughness curve data that has equal area (bounded by the
roughness curve) above and below the line.
Profile Peak, Profile Valley
Continuous area above and below the mean line of the profile, respectively. Bounded by the profile
and between the two intersection points.
Peak, Valley
Highest and lowest points, respectively, in the profile peaks and profile valleys.
Changing the cursor on the FFT changes lc, the cut-off length of the high-pass filter applied to the
data. The filter is applied before the roughness data is calculated; therefore, the position of the cutoff affects the calculated roughness values.
14.7.8 Example—Section Analysis of a Diffraction Grating
This example uses Section to analyze a diffraction grating (file name “grating” on the images
disk). The Section command profiles peaks and valleys, as well as the blaze angle and other
features in the grating.
Note:
The file “grating” is included with the images disk which accompanies this
manual. It may be loaded from the B: floppy drive.
1. Transfer to the Off-line screen, then use File / Open to access the image grating on the
images disk.
2. Open the file by double-clicking on grating, or using Off-line/File/ Open to load the file.
The image should appear on the display screen.
3. Use View / Surface Plot (or click on the Surface Plot icon) to obtain a surface plot view of
the grating surface. Study the image—notice that the grating consists of parallel, ruled lines
which are etched into the surface. These lines are used to diffract white light into light having
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narrower wavelengths. (You may have seen diffraction gratings used as colorful reflectors on
ornaments and packages.)
Depending upon the incident angle of the light falling on the grating’s surface and spacing
between rules, different colors are produced. Manufacturers of gratings are especially
concerned with maintaining a fixed, definite spacing between lines and the angle (or “blaze”)
of the rulings.
4. Click on the Quit button to exit from the Surface Plot panel.
5. Before doing a sectional analysis of the grating, ensure that the image is properly oriented by
removing any tilt or bow. This is especially important if a high level of precision is to be
employed in measuring the blaze angle.
6. To remove any tilt which might be present, click on Off-line / Modify / Plane Fit Auto. Set
the Planefit order parameter in the panel to 1, then click on the Execute button. The image
is fitted to a plane (“leveled”) by fitting each scan line to a first-order equation, then fitting
each scan line to others in the image. At this point, the image has not been appreciably
altered, it has only been reoriented slightly.
7. Click on the Quit button to exit from the Plane Fit Auto panel.
8. To use the Section command, click on Offline / Analyze / Section, or use the Section icon.
The Section panel is displayed on the control monitor, and the “grating” image is displayed
on the Display Monitor.
9. To make a single-line section of the image, use the mouse to draw a line through the image,
as in Figure 14.7h.
Figure 14.7h Mouse Drawing Line
Use the mouse to drag a line
cursor across the image.
See also, Dual Section Section 11.2 for Section Analysis on two and three images simultaneously.
14.8 Stepheight
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The Stepheight command makes relative height measurements between two regions (steps) on
sample surfaces. Typical applications include measuring film thickness and etch depths. Stepheight
works similarly to a Section command with an averaging box cursor, but its operation is simplified.
Stepheight displays a top view of the image, then a reference line is drawn across the regions to be
measured. A height profile is generated from averaged data on either side of the reference line.
Cursors—which are moved along the profile—define specific regions (steps). These may be
measured (Measure button) relative to each other, with or without data leveling (Level button).
Refer to the following Stepheight sections:
•
Stepheight Panel Section 14.8.1
•
Parameters on the Stepheight Panel Section 14.8.2
•
Buttons on the Stepheight Panel Section 14.8.3
•
Stepheight Configure Panel Section 14.8.4
•
Configuration File List Panel Section 14.8.5
•
Auto Program Edit Panel Section 14.8.6
•
Stepheight Display Monitor Section 14.8.7
•
Example—Stepheight Analysis of a Thin Film Section 14.8.8
14.8.1 Stepheight Panel
The Stepheight panel displays parameters for adjusting the image display, as well as buttons to
Configure and Auto Program the Stepheight analysis.
Figure 14.8a Stepheight Panel
14.8.2 Parameters on the Stepheight Panel
Data scale
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Controls the vertical range used to display the top view image and the cross-sectional profile along
the reference line. The units of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode Z information.
Color contrast
Controls image contrast by compressing or expanding the color table.
Color offset
Changes image color by shifting the image’s color table range.
Show tutorial
When selected, this displays a help box on the Display Monitor. The help box consists of several
pages of useful information describing how to use the Stepheight command.
14.8.3 Buttons on the Stepheight Panel
Configure—Accesses the Configure panel and displays the Current File being used in the
Stepheight function (See Section 14.8.4).
Note—Appends a note or timestamp to the display. The note may include a time stamp.
Auto Program—Adds or deletes the Stepheight command from the currently selected Auto
Program file. For details on the Auto Program Edit panel, see Section 14.8.6.
Quit—Exits the Stepheight command.
14.8.4 Stepheight Configure Panel
Figure 14.8b Stepheight Panel
The Configure panel opens and shows the CURRENT FILE for running the Stepheight Analysis
function. Click the FILE button to access a new file in the Configuration File List panel (See
Section 14.8.5) or QUIT to exit the Configure panel.
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14.8.5 Configuration File List Panel
Figure 14.8c Configuration File List Panel
Buttons in the Configuration File List Panel
Load—Loads the specified Stepheight Configure file.
Save—Saves the current settings as a Stepheight Configure file.
Delete—Deletes the specified Stepheight Configure file.
Quit—Exits the Configuration File List panel.
14.8.6 Auto Program Edit Panel
The Auto Program Edit panel adds or deletes the Stepheight command from the currently
selected Auto Program file. The Auto Program Edit panel is displayed. To include Stepheight
within the auto program file, click on the box next to STEP HEIGHT, then click on the SAVE button
(See Figure 14.8d).
Note:
If you do not place an “X” within the “Step height” box, the command is
executed but no results are recorded.
Figure 14.8d Auto Program Edit Panel
Note:
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The Auto Program File command in the Utility menu must be used to select,
or create, an Auto Program file. The Auto subcommand under the Browse
command selects the files to be processed and executes the Auto Program file.
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Buttons on the Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Section command is already in
the current Auto Program file, it retains its position in the file.
Delete—Removes the Section command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
14.8.7 Stepheight Display Monitor
Figure 14.8e Stepheight Display
"Show
Tutorial"
The image appears in the lower-left corner of the display screen. The mouse is used to draw a
reference line across the image, which orients a white box cursor. The box is sized and positioned
to define the measured area.
In the profile above the image, the averaged height of features lying within the box are shown. Two
pairs of cursors (one red and one green) are moved across the profile to define the steps to be
measured. (The region between each cursor pair defines a “step.”) In the box labeled “Step height,”
the relative height between steps is displayed in large numerals.
Stepheight Display Menu Commands
Level
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Reorients the profile so that the average height of each step region is equal.
Figure 14.8f Level Option Profile
Original profile
Level option applied
Measure
Displays the relative height between steps.
Restore
Returns the profile to its original, unleveled form. (Deselects the Level option.)
Mouse Operation (within image)
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•
1st click—Anchors the origin of a line segment and “rubberbands” from the selected
position, allowing the line segment to be drawn in any direction.
•
2nd click—Anchors the terminal point of the first line segment and draws a box along
the fixed-line segment. The average profile of the lines perpendicular to the segment and
confined by the box is displayed.
•
As a reference, the cursor positions also show up as red and green lines in the box.
•
3rd click—Allows the box to be moved (cursor inside box), or resized (cursor on edge of
box). Clicking on the corner allows the box to be resized in two directions.
•
4th click—Fixes the box position or size.
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14.8.8
Example(M-Z)
—Stepheight
Analysis of a Thin Film
Stepheight
This example uses Stepheight to analyze metal lines on a gallium arsenide substrate.
The Stepheight command is used to profile adjacent lines and measure their height
above the substrate.
Note:
This example uses the file "gaas" included with the images disk
which accompanies most recent software versions and may be loaded
from the B: floppy drive. You may also download it from Digital
Instrument’s “Public” FTP site folder.
1. Transfer to the Off-line screen, then use File / Open to access the image “gaas” on
the images disk.
2. Open the file by double-clicking on “gaas,” or using Off-line / File / Open to load
the file. The image should appear on the display screen.
3. Use View / Surface Plot (or click on the Surface Plot icon) to obtain a surface plot
view of the grating surface. Study the image—notice that the image consists of
parallel, metal lines atop a gallium arsenide substrate. The lines and substrate have
been fractured through the center of the image, making two sets of juxtaposed
lines.
4. Click on the Quit button to exit from the Surface Plot panel.
5. Before doing a Stepheight analysis of the image, it may prove helpful to ensure
that the image is properly oriented by removing any tilt or bow. To remove any tilt
which might be present, use the Off-line / Modify / Plane Fit Auto command. At
this point, the image has not been appreciably altered, it has only been reoriented
slightly.
6. To use the Stepheight command, click on Offline / Analyze / Stepheight. The
image appears in the lower-left corner of the display screen. Use the mouse to
draw a vertical reference line on the image between to parallel lines. (Remember,
image date is averaged perpendicular to this line, which is why we are drawing it
vertically.) Next, use the mouse to size and position the box cursor to include at
least one complete line and a substrate region.
The image should appear similar to the one in Figure 14.8g.
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Figure 14.8g Stepheight Analysis Image
Notice that one pair of cursor lines have been moved over the substrate; another pair are centered on
a line. The measured height difference is displayed prominently. (The step height in the example
above indicates a relative height difference of 44.230 nm.)
7. You may continue to experiment with other images. Characteristics of a good image for
Stepheight analysis include prominent, flat (planar) features. The Stepheight command is
less useful for measuring features having rounded or uneven surfaces.
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14.9
Auto
Tip Qualify
Auto Tip Qualify
The Off-line / Analyze / Auto Tip Qual function actually incorporates two separate
capabilities in one software feature: tip estimation and tip qualification. Tip estimation
generates a composite image of the tip (as seen looking straight down on to the apex)
based upon the tip’s interaction with a sample, and is displayed in the lower-left corner of
the display screen. Tip qualification uses the estimate to determine whether the tip is
acceptable for use. This is useful in at least two ways:
•
Tips may be checked periodically for signs of wear, then changed when found
to be unacceptably worn.
•
By using tip estimation and qualification to enforce an envelope of tip
acceptability, metrological values can be compared from image to image,
ensuring consistent, long-term analysis of samples.
The Auto Tip Qualify command allows the user to qualify a tip before proceeding with
the Real-time scan.
For Auto. Tip Exchange and Auto Tip Qual, see also, the Automation Supplement
(Version 5.13).
Refer to the following Auto Tip Qualify sections:
398
•
Using macros to run Auto TipQual and Tip Exchange Section 14.9.1
•
Selection of Probes Section 14.9.2
•
Tip Artifacts Section 14.9.3
•
Tip Estimation Theory Section 14.9.4
•
Auto Tip Qual Display Monitor Section 14.9.5
•
Auto Tip Qual Panel Section 14.9.6
•
Auto Tip Qual Display Monitor Section 14.9.7
•
Tip Qualification Parameters Section 14.9.8
•
Example: Using the Auto Tip Qualification Command Section 14.9.9
•
Running ETD-based Tip Qualification Section 14.9.10
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14.9.1 Using macros to run Auto TipQual and Tip Exchange
When run under macro control, the Auto TipQual software can be combined with Automatic Tip
Exchange.
If ETD-based tip qualification is selected while teaching the macro program, then when the tip
qualification software determines that a tip is worn or bad, it will cause the system to execute an
Exchange Tip function, which replaces the used cantilever with a fresh one or, if the system does
not have Automatic Tip Exchange, it prompts the user to change the tip manually.
14.9.2 Selection of Probes
An important prelude to tip estimation and qualification is the correct choice of a suitable tip. There
will be little gained in estimating and qualifying a tip if it is improperly sized for the features it will
encounter. Specifically, a tip cannot resolve the linear and angular aspects of any feature sharper
than itself.
Note:
Even a blunt tip can still resolve height accurately. Therefore, select a tip which
is sufficiently sharp, depending upon what you are attempting to measure with
it.
14.9.3 Tip Artifacts
AFM measurements are limited by the shape of the tip used to probe the sample surface. Depending
upon sample features, this may lead to “tip artifacts” in the image. In the simplest case, the finite
size of the AFM tip will not let it probe narrow, deep features on a sample as shown in Figure 14.9a
where the tip’s radius R, is greater than the radius of the recess, r.
Figure 14.9a Example of Dull Probe on a Deep Feature
In addition, sharp sample features will appear broadened in AFM images due to the finite width of
the tip. Consequently, image measurements such as surface roughness and surface area are affected
by the shape of the AFM tip. An image captured with a very sharp tip will show a greater roughness
and a larger surface area than an image captured with a dull tip (See Figure 14.9b).
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Figure 14.9b Tip/Image Relationship
Note:
It is often desirable to discard a tip when it is no longer sufficiently sharp.
The Tip Estimation software provides tools for characterizing the apparent size and shape of the
tip, based on captured sample images. Tip Qualification software can then use the apparent size
and shape of the tip to decide whether or not a tip and/or the image data should be discarded.
Based on thresholds set by the user, the Tip Qualification software will usually return one of the
following tip statuses: GOOD, WORN, or BAD. A tip status of GOOD indicates that the tip is still
sufficiently sharp and that the image data should be acceptable. A tip status of WORN indicates
that the tip is becoming dull and should be changed, but previous image data taken with this tip
should still be acceptable. If a BAD status is returned, the tip should be changed and the current
image data discarded. In cases where imaging errors are suspected, Tip Qualification may return
one of two other statuses: SUSPECT or NO TIP.
Auto Tip Qual describes multiple operations, including:
•
Estimation of tip shape from measured samples and designated characterizers.
•
Qualifying tips as “good,” “worn,” or “bad,” depending upon their estimated shapes.
14.9.4 Tip Estimation Theory
Tip Estimation uses measured images of a sample to construct a 3-dimensional estimate of the
apparent tip shape. The model of the tip is constructed by analyzing a collection of different
features from the image data. The software first identifies a series of local peaks (neighborhood
maxima) in the image data and then successively analyzes each peak, refining the tip estimate as it
does so. At the top of each of these peaks, the software effectively determines the rate at which
surrounding data slopes down in all directions. The degree of the slope determines the tip
sharpness, as no data in the image can have a slope steeper than the slope of the tip. As this basic
process is repeated for each local peak, any feature sharper than corresponding features from all
previously analyzed peaks will cause the tip model to update to a new, sharper estimate.
A Physical Analogy: Carving a Wooden Model of the Tip
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Try to carve a wooden model of the tip based on collected image data. Start with
a simpleCommands (M-Z)
wooden block. Now consider a sample image that has a series of small peaks (bumps) in Auto Tip Qualify
the image data. This is the typical image for many samples with grain-like structure. Pick
one of the peaks in the image data and measure the shape of the peak in all directions as
you move down from the top of the peak. The tip must be at least as sharp as this measured
shape. So your first estimate of the tip shape is to carve the same shape as the first peak into
the wooden block.
Now, move on to the next peak in the image data and compare this to the wooden model. If
there are any features that are duller than the current model (that is, they fall away more
slowly), ignore them.
Figure 14.9c Wooden Block Analogy
You already know that the tip is sharper than the dull parts of the second feature. But if
there are any regions of the second peak that are sharper than on the last peak, you will
carve away regions of the tip model that have the smaller slopes of the previous peak. You
will repeat this for each peak in the image data.
Each peak will typically make the model of the tip more and more accurate since different
peaks will often reflect contact between the sample and different parts of the tip. You keep
carving away material from the model as necessary based on the sharpness of each new
peak. The final model is the aggregate of all the shapes of all the peaks found in the image.
Mathematically, the result is called the geometric intersection of all the individual peaks
analyzed in the image data. A simplified progression of constructing the tip model is shown
above. (You can see this same basic process occurring dynamically while running the Tip
Estimation software—turn on the Dynamic Tip Update function described later in this
chapter).
The Tip Model is Sample-dependent
The model generated by Tip Estimation is not, in general, the actual shape of the tip.
Since the tip model is constructed by analyzing the shapes of peaks in the image data, the
accuracy of the model is limited by the sharpness of features on the sample. A surface with
infinitely sharp features will produce an accurate model of the tip. Conversely, a surface
having large rounded features will impart its shape to the tip’s estimation. Here are a few
examples:
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Figure 14.9d A perfect spike on the sample surface yields a perfect tip estimate.
Figure 14.9e A sample with no sharp features yields a dull tip estimate.
Figure 14.9f A sample with feature sizes similar to the tip size yields a tip estimate that combines tip and
sample geometry.
For this reason it is always important to consider the effects of the sample features on the calculated
tip model. Samples that provide the most accurate estimate of tip size and shape are those with
many fine protrusions. Very flat samples will not provide a very useful estimate of tip shape.
Despite the dependence on the sample characteristics, Tip Estimation and Tip Qualification
software can often provide a reliable method of tracking tip wear and ensuring that probes are
changed when they become dull.
Example: When making repeated measurements on suitable rough samples, Tip Estimation can
provide very reproducible estimates of tip size and shape, which change in a predictable and
consistent fashion as the tip wears.
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14.9.5 Auto Tip Qual Display Monitor
Figure 14.9g Typical Tip Qualification Display Monitor
The top-left frame is the image data being analyzed. The lower-left frame is a top view image of the
software model of the tip (looking down onto the apex).
Once a tip model has been generated, the Tip Estimation software extracts quantitative
measurements of the tip’s size and shape.
The software cuts cross-sections at two different heights through the tip model as shown in Figure
14.9h.
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Figure 14.9h Cross Sections on Tips
These cross-sections show the apparent size and shape of the tip at two different distances from the
apex of the tip. Typical cross-sections are shown in the two right frames labeled “level 1 etd” and
“level 2 etd.” In the level 1 cross-section, the apparent tip shape is shown as a light gray shape (in
this case, roughly circular). In the lower-right frame, the level 1 cross-section is shown again (light
gray) and the additional tip area in the cross-section at level 2 is shown as a darker color. (The
actual colors of the tip cross-section depend on the color table selected).
The Tip Estimation software then provides two numerical measurements of the tip size and shape:
Estimated Tip Diameter (ETD) and aspect ratio (AR). The Estimated Tip Diameter is the diameter
of a circle having the same area as the measured tip cross-section (See Figure 14.9i).
Figure 14.9i Tip Estimation
The Aspect Ratio (AR) is calculated as the ratio of the vertical (y) and horizontal (x) size of the tip
as shown in Figure 14.9j.
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Figure 14.9j Aspect Ratio
Tip Qualification Status
The Tip Qualification software will generate a tip status, depending on the calculated values of
Estimated Tip Diameter (ETD), the Aspect Ratio (AR) and user-selected threshold and limit values.
For the ETD values, there are two thresholds that affect the tip status:
•
Good/Worn ETD Threshold— If the ETD is smaller than this number, the tip will
usually be characterized as GOOD. The threshold diameters are shown as green circles
on the Display Monitor.
•
Bad/Worn ETD Threshold— If the ETD is smaller than this threshold, but bigger than
the Good/Worn ETD Threshold, it is characterized as WORN. If the ETD is larger
than this number, it is characterized as BAD. These threshold diameters are shown as
red circles on the Display Monitors.
There are two separate sets of ETD thresholds for the two tip levels (ETD 1 at Height 1, and ETD 2
at Height 2). There are also minimum and maximum limits for the tip Aspect Ration (AR) at each
level. These limits will detect when the image data produces a tip model of an oblong shape that is
not likely to be physically correct. (Usually, induced by an imaging artifact, such as a noise streak
not removed by discontinuity rejection.) In most cases these thresholds should not require
adjustment.
Setting ETD Thresholds
It takes some experimentation with a particular tip and sample type to find appropriate values for
the various thresholds. The basic idea is to find the maximum ETDs (the diameters of the dullest
tips) that provide reliable image data. Then set the Bad/Worn ETD Thresholds based on these
diameters. Then it is usually desirable to set the Good/Worn ETD Thresholds slightly smaller than
the Bad/Worn ETD thresholds.
An additional limit MIN ETD SIZE is used to reject Tip Qualification results if the estimated tip
shape is unreasonably small (indicating a tip that is sharper than physically likely).
This is usually induced by imaging artifacts, such as noise spikes which were not removed by spike
rejection. In most cases, this can be set at or near the same value as the Height (from Apex) for each
different level. So, if Height 1 = 10 nm, a reasonable value for the Min ETD size is also 10 nm.
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Since the tip estimate is valid only where the tip contacted the sample, ETD heights should be
selected to ensure that the tip made “frequent” contact with the sample at those heights. Thus, the
ETD heights should be below the sample’s peak-to-valley values. If the ETD heights are too high
for the sample, the resultant ETD will tend to be very large and multiple apparent peaks will be
found at that height.
14.9.6 Auto Tip Qual Panel
Access the Automatic Tip Qualification panel by using the Off-line / Analyze / Auto Tip Qual
command. However, before accessing the Auto Tip Qual command, a qualification image must be
loaded first. The sample image must have sufficient surface relief to make tip qualification possible,
and produce an ETD that changes in a consistent and predictable fashion as the tip wears.
After the image is loaded, the Auto Tip Qualification panel is used to analyze image data and
qualify the tip based on parameters set by the user. In the Off-line/Analyze menu, select Auto Tip
Qual to access the AutoTip Qualification panel (See Figure 14.9k).
Figure 14.9k Auto Tip Qualification Panel
Parameters in the Auto Tip Qualification Panel
Parameters at the top of the panel control how the top view image on the left side of the Display
Monitor is presented. These function the same as with other Off-line features.
Data Scale— Controls the vertical range of the image corresponding to the full extent of the Color
Table. The units of this item vary according to the type of image (e.g., nm, µm, etc.).
Color Contrast— Controls the contrast in the image by compressing or expanding the Color Table.
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Color Table— Selects the color scheme used to render Z-axis data.
Color Offset— Shifts the Color Table used to render Z-axis data up and down.
Buttons on the Auto Tip Qualification Panel
Estimate Tip— Performs a new tip estimation. A rendering of the tip as seen looking down on to
the apex is shown in the lower left-hand corner of the Display Monitor. In the upper left hand corner
of the screen is shown the original image, with green markers (+) indicating the data peaks used for
the estimation. If the Save Tip button is selected, the estimated tip image is saved to a directory.
This image can be loaded and analyzed the same as other NanoScope images.
Qualify Tip— Selecting this button results in the following actions:
1. If any “Tip Estimation” parameter or the analysis region has been changed, a new tip
estimation is performed.
2. The tip cross sections and qualification results are displayed on the graphics window.
3. Tip status is determined based upon the estimated tip shape.
Save Tip— This saves the estimated tip image as a NanoScope image file, allowing it to be
analyzed using the standard NanoScope Off-line / Modify and Analyze functions. Because tip
images have fewer data points than a standard image, saved tip images are centered in a large,
uniform field of flat data (See Figure 14.9l).
Figure 14.9l Tip Image Display
Tip image
Flat data
Quit— This will cause the current parameter settings to be written out to the ATIPQUAL.PAR file and
exit the AutoTip Qualification panel.
Tip Estimation Parameters
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Tip Image Size— The Tip Image Size sets the size of the image displayed in the lower-left corner
of the Display Monitor. The calculated tip size will be the smallest size greater than or equal to Tip
Image Size, as determined by the sample resolution. For example, Tip Image Size = 120 nm will
result in a tip image approximately 120 nm x 120 nm square.
Tip Image Size also defines the neighborhood size which is used to select the maxima points used
for the tip calculation. For example, for Tip Image Size = 120 nm, each selected maxima point is
the maximum of approximately 120 nm x 120 nm centered about that point. Therefore selected
maxima have to be at least 120 nm apart.
Note:
Larger Tip Sizes results in a smaller number of selected points.
Because more points provide more tip information, it is best to select Tip Image Size to be as small
as possible while still satisfying the following conditions:
•
Tip Image Size should encompass a tip shape as far up the shaft of the tip as required to
obtain measurements. This can be determined experimentally by varying the Tip Image
Size and observing the image which results in the lower-left corner of the Display
Monitor.
Note:
•
A good starting point for this value is the sum of the maximum allowable tip
diameter plus the diameter of a typical feature in the characterizer.
If and when “double tip” peaks arise due to rough wear, their apexes should be no
farther apart than one-half the Tip Image Size. This ensures that multiple peaks from a
“double tip” feature are not treated as separate features from the same peak (which
would produce erroneous results and no longer guarantee an outside tip envelope).
LPF [low pass filter] for max select— Determines whether a Gaussian lowpass filter is applied to
the data before identifying selected points. The filtered data is only used for point selection, not for
the actual tip calculation. This filter has the effect of reducing noise sensitivity. It is recommended
that the filter be turned on (Yes).
Sigma mult[iplier] for spike rejection—Sets a threshold for rejection of isolated (upward) noise
spikes by distributing data over a Gaussian curve, then rejecting that portion of the data lying
beyond xσ of the average, where x is the Sigma mult[iplier] for spike rejection value and σ is equal
to the standard deviation of the spike heights. (See Figure 14.9m).
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Figure 14.9m Spike Height
In Figure 14.9m, image data is shown normalized in a Gaussian distribution. With the Sigma mult
for spike rejection value set to 1, all outlying data beyond one standard deviation (shaded regions)
would be rejected for purposes of tip estimation.
If Sigma mult for spike rejection = 0, noise spike rejection is not performed. If the parameter is >
0, noise spike rejection is performed as follows: for each point x,y in the selected region, the
difference δx,y between that point and the average of its 8 neighbors is determined. The mean (µ)
and standard deviation (σ) of all such positive differences δx,y is calculated and all outliers are
rejected via the following formula:
δ x,y > µ + M∗ σ
where x,y is a noise spike datum and M is the specified sigma multiplier. A point identified as a
noise spike is disqualified from the selected point set S.
Sigma Mult[iplier] for Discontinuity Rejection— Similar to Sigma mult for spike rejection
(above), this parameter is used to set a threshold for rejection of an entire line of data where a
statistical discontinuity is detected, such as when a tip “trips” over features. If Sigma mult for
discontinuity rejection = 0, discontinuity rejection is not performed.
If the parameter is > 0, discontinuity rejection is performed as follows: for each row y in the
selected region, the average absolute difference δy between each point and its immediate neighbor
on the next line is calculated. The mean (µ) and standard deviation (σ) of all such average
differences δy is calculated and all outliers are rejected via the following formula:
δ y > µ + M∗ σ
where row y is a discontinuity and M is the specified sigma multiplier.
Points which fall within a (tip-sized) neighborhood centered on a discontinuity row are disqualified
from the selected point set S. Thus detected discontinuities cannot contribute to the tip estimation.
Discontinuity rows are displayed as red horizontal lines on the image display.
Note:
Rev. C
Tip Qualification returns SUSPECT status whenever discontinuities are
detected. In this case, the ETD values will provide additional tip size
information.
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14.9.7 Auto Tip Qual Display Monitor
Parameters on the Display Monitor control how the graphics display looks whenever tip estimation
is performed (See Section 14.9.5). During tip estimation the tip is successively refined as each point
in the selected point set S is analyzed. For diagnostic purposes it is often helpful to see the tip shape
evolve as it is refined and/or have a visual indication of which selected points in the image are
contributing to certain features in the estimated tip shape.
Sample Row Increment— This parameter controls how frequently the row marker is incremented
during the tip calculation on the image display. This marker is a yellow line which is updated every
Ith line, where I is the specified Sample Row Increment. The line corresponds to the current line
being analyzed; any selected points in S on this line will be analyzed when the marker is on this
line. If this parameter is set to zero, no row marker is displayed.
Dynamic Tip Update— If this option is selected (Yes) the tip display updates after processing each
image line. If this option is deselected (No) the tip shape is displayed only after it has been
completely estimated. Dynamic Tip Update slows down the tip estimation process but when used in
conjunction with Sample Row Increment it is possible to get a good idea of which features in the
image are contributing to significant tip features.
14.9.8 Tip Qualification Parameters
Tips are cross-sectionally analyzed by the software at two separate heights above the apex to
determine the tip Status. These heights occur at Cross Section 1 and Cross Section 2. Parameters
are appended with either a “1” or a “2,” depending upon which cross section they describe, (e.g.,
Height 1 and Height 2, respectively).
Note:
If cross-sectional analysis is desired at only one height, set Height 1 to 0.00
nm, and set Height 2 to the desired value.
Height 1 [Height 2] (From Apex)— Height above the tip apex at which the cross section is defined.
Figure 14.9n Height from Apex
Min ETD1 [ETD2] Size— Minimum estimated tip diameter (ETD) at Cross Section 1 [2]. If the
calculated ETD is smaller than Min ETD Size, then TipStatus = SUSPECT.
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Good/Worn ETD1 [ETD2] Threshold— If ETDX is smaller than Good/Worn ETD1 [ETD2]
Threshold (but greater than Min ETD Size) then Tip Status = GOOD (assuming that no other
conditions such as a bad aspect ratio or the presence of discontinuities result in a SUSPECT
TipStatus).
Worn/Bad ETD1 [ETD2] Threshold— If ETDX is greater than Good/Worn ETD Threshold but
smaller than Worn/Bad ETD Threshold then TipStatus = WORN. If ETDX is greater than Worn/
Bad ETD Threshold then TipStatus = BAD.
Min y/x Aspect Ratio 1 [Ratio 2]— If ARX is less than Min y/x Aspect Ratio X, then TipStatus =
SUSPECT.
Max y/x Aspect Ratio 1 [Ratio 2]— If ARX is greater than Max y/x Aspect Ratio X, then
TipStatus = SUSPECT.
14.9.9 Example: Using the Auto Tip Qualification Command
1. Select Tip Size and Filtering
With the image loaded, enter the Tip Image Size desired for the currently loaded tip and
characterizer image. Next, select whether or not to apply a low pass filter to the image by selecting
either Yes or No from the LPF for max select parameter. NOTE: It is generally a good idea to use
a low pass filter to ensure that small noise artifacts are removed beforehand. If noise is left in the
image, the software may mistake it for an actual feature and render a poor image of the tip.
Additionally, large noise artifacts can be selectively removed by adjusting the Sigma mult for
spike rejection and Sigma mult for discontinuity rejection parameters.
2. Enable “Display” Parameters (Optional)
Optionally, parameters within the “Display” box may be used to: 1) detect which features in the
image contribute to significant tip features; or, 2) assist with diagnosing any problems that derive
from the image. The Dynamic Tip Update parameter, in conjunction with the Sample row
increment, identifies which portion of the image is being analyzed during the Estimate Tip
command using a horizontal line. Meanwhile, tip shape is dynamically rendered within the “tip”
window on the Display Monitor. If a sudden, abrupt change is noted in tip shape, the user should
note which portion of the image was being analyzed at the time, then closely examine this portion
of the image for noise. If noise is noted, it may be excluded by moving the cursor box to another,
noise-free portion of the image, or by adjusting the Sigma mult for spike rejection and Sigma
mult for discontinuity rejection parameters and rerunning the Estimate Tip command.
Sample Row Increment— Spacing of rows used to dynamically display the tip estimate.
Range and Settings: 0—100 (in multiples of 5 rows).
Dynamic Tip Update— Enables dynamic tip updating.
Range and Settings: Yes = enabled, No = disabled.
3. Select Cross Section 1 and 2 parameters
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The selection of tip qualification parameters must be researched beforehand by the user. Each
parameter will influence how the tip is qualified and whether or not it is rejected. Depending upon
how parameters are set, they will result in one of the following flags. Evaluated in the following
order:
•
SUSPECT— Tips will be qualified as SUSPECT under any of the following conditions:
•
A discontinuity has been found in the data that exceeds the Sigma mult[iplier] for
discontinuity rejection.
•
One of the aspect ratios of the tip exceeds Y/X or X/Y thresholds.
•
One of the ETDs (ETD1 or ETD2) is smaller than its minimum threshold.
•
GOOD— Both ETDs are less than the Good/Worn ETD Threshold parameter setting.
•
BAD— At least one of the ETDs is greater than its WORN/BAD threshold or one of the
cross-sections intersects a large portion of the tip image boundary.
•
WORN— At least one of the ETDs falls between its GOOD/WORN and WORN/BAD
limits.
14.9.10 Running ETD-based Tip Qualification
ETD-based tip qualification may be run either manually using the Off-line / Analyze / Auto Tip
Qual function above, or from a recipe file. For more information on automated capabilities using
this feature, see the Automation Supplement (Version 5.13) or your system manual.
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Trench
14.10Trench
Trench is designed to measure long narrow features on the sample image. The parameter functions
are similar to the Depth command (See Section 13.6) and the Width command (See Section
14.11).
For navigating in the Trench panels, see Figure 14.10a.
Figure 14.10a Main Trench Analysis Panels
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14.10.1 Trench Panel
Figure 14.10b Trench Panel
Parameters and Buttons on the Trench Panel
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the color table.
Color offset
Shifts the color table used to display the image.
Configure—Accesses the Width Configure panel (See Section 14.11.2).
Auto Program—Accesses the Auto Program Edit panel (Section 14.11.4).
Note—Adds a descriptive message and time stamp to the display.
Quit—Exits the Width analysis feature.
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14.10.2 Trench Configure Panel
Figure 14.10c Trench Configure Panel
Peaks
Adjusts the minimum and maximum search values in the Trench Correlation histogram by
adjusting the threshold heights
(See Figure 14.10d).
Note:
Rev. C
The Correlation histogram defines which peak to use for a reference height.
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Trench
Figure 14.10d Peaks Correlation Histogram
Highest peak or
Lowest peak value
75%
25%
0%
Centroid at 0%
2708-110
Depth (nm)
Centroid at 25%
0
Centroid at 75%
Correlation
Thresholds
Establishes the height and depth thresholds when calculating the centroid.
•
Highest Peak—Value defines how much of the Highest peak is included when
calculating the centroid. At 0%, only the maximum point on the curve is included. At
25%, only the maximum 25% of the peak is included in the calculation of the centroid.
•
Lowest Peak—Value used to define how much of the Lowest peak is included when
calculating the centroid. At 0%, only the maximum point on the curve is included. At
25%, only the maximum 25% of the peak is included in the calculation of the centroid.
Reference
You may specify a reference point for the green cursor. This feature is useful for repeated, identical
measurements on similar samples. For example, the green slider cursor is moved to a specific point
on the Correlation histogram. That point is remembered (saved) as a distance from whatever
reference peak you choose.
•
Highest Peak—Topmost peak in the Correlation histogram
•
Lowest Peak—Peak closest to the bottom in the Correlation histogram
•
Min peak—Shortest (smallest) peak in the curve
•
Max peak—Tallest peak in the Correlation histogram
Histogram filter cutoff
Lowpass filter which smooths out the wavelengths that lie below the cutoff. Used to reduce noise in
the Correlation histogram.
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Min peak to peak
Sets the minimum distance between the maximum peak (green cursor) and the second peak (red
cursor). The second peak is the next largest peak to meet this distance criteria.
Locate Feature
Saves location information to a configuration file.
•
By location only—Saves location information only in one parameter (location in X, Y,
and Z). Note that this function analyzes the feature CLOSEST to the feature position
established during the original configuration.
Use all parameters—Saves location information based on several parameters, including: location,
area, width, length, and height. This function searches the entire image and finds the feature most
closely matching the size of the feature established during the original configuration.
14.10.3 Trench Auto Program Edit Panel
Adds or deletes the Trench command from the currently selected Auto Program file. A panel
listing measurements reported by the Trench command is displayed. Selecting a measurement
stores it in the data file when Auto Program is run.
Note:
The measurement selections vary depending on the setting of the Measure
feature in the display screen.
Figure 14.10e Trench Auto Program Edit Panel
Buttons in the Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
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Width
Note—Allows you to insert a command note in the Auto Program file.
Set Limits—Sets specific limits for a given value, as well as a % limit on the total. Limits may be
set only for non-planar, non-circular Width measurements.
Save—Saves selected measurements to the Auto Program file. If the Trench command is already in
the current Auto Program file, it retains its position in the file.
Delete—Removes the Width command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
14.10.4 Trench Display Monitor
The Trench Display Monitor includes a menu bar command (Cursor) for selecting features on the
image to analyze, two Histograms, a data box and status bar. The histograms include a Correlation
and Trench Histogram for determining the exact measurements for specified features (e.g., Depth
at Max[imum] and Width) (See Figure 14.10f).
Figure 14.10f Trench Display Monitor
14.11 Width
To analyze the width of features, you have two choices from the Analyze menu: Width and
Section. It is also possible to measure features on images loaded into the Off-line / View / Top
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Width
View feature. This portion of the chapter is devoted to the Width command, which is designed to
automatically measure the width of features on large numbers of identical images (e.g., silicon
wafers). The Section command (discussed in the “Section” portion of this chapter) is better suited
for analyzing unique, one-of-a-kind sample surfaces.
The Width command is designed to automatically measure width between features distinguished
by height, such as trenches and raised features.
This algorithm utilizes many of the same functions found in Depth and Grain Size analysis by
accumulating height data within a specified area, applying a Gaussian low-pass filter to the data (to
remove noise), then rapidly obtaining height comparisons between two dominant features. For
example, 1) the depth of a single feature and its surroundings; or, 2) depth differences between two
or more dominant features. Although this method of width measurement does not substitute for
direct, cross-sectioning of the sample, it does afford a means for comparing feature widths between
two or more similar sites in a consistent, statistical manner.
The Width command is best applied when comparing similar features on similar sites. Width
measurement on dissimilar sites is better performed using the Section command, or from View /
Top View.
Refer to the following section on Width analysis:
•
Width Panel Section 14.11.1
•
Width Configure Panel Section 14.11.2
•
Auto Program Edit Panel Section 14.11.4
•
Width Display Monitor Section 14.11.5
•
Width Example Section 14.11.6
•
Interpreting Width Data Section 14.11.7
14.11.1Width Panel
Clicking on the Analyze / Width command accesses the Width panel.
Figure 14.11a Width Panel
Parameters on the Width Panel
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Width
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the color table.
Color offset
Shifts the color table used to display the image.
Buttons on the Width Panel
Configure—Accesses the Width Configure panel (See Section 14.11.2).
Auto Program—Accesses the Auto Program Edit panel (Section 14.11.4).
Note—Adds a descriptive message and time stamp to the display.
Quit—Exits the Width analysis feature.
14.11.2 Width Configure Panel
Cursors applied to the filtered data histogram serve two functions: 1) to identify surface features for
measurement and comparison; 2) to facilitate rapid recognition of curve components by the
computer. The Configure button in the Width panel accesses the Configure panel. This box
displays, loads and deletes preexisting configuration files, and initiates new ones (See Figure
14.11b).
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Width
Figure 14.11b Width Configure Panel
Buttons on the Width Configure Panel
File—Accesses the Configuration file list panel. The list button commands are as follows:
•
Load—Loads the specified Depth Configure file.
•
Save—Saves the current settings as a Depth Config file.
•
Delete—Deletes the specified Depth Configure file.
•
Quit—Quits the Configuration file list window.
Quit—Exits the width Configure panel.
14.11.3Parameters on the Width Configure Panel
Locate Feature
Saves location information to a configuration file.
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Width
•
By location only—Saves location information only in one parameter (location in X, Y,
and Z). Note that this function analyzes the feature CLOSEST to the feature position
established during the original configuration.
•
Use all parameters—Saves location information based on several parameters,
including: location, area, width, length, and height. This function searches the entire
image and finds the feature most closely matching the size of the feature established
during the original configuration.
Peaks
Adjusts the minimum and maximum search values in the Width Correlation histogram by adjusting
the threshold heights (See Figure 14.11c).
Note:
The Correlation histogram defines which peak to use for a reference height.
Figure 14.11c Peaks Correlation Histogram
Highest peak or
Lowest peak value
75%
25%
0%
Centroid at 0%
2708-110
Depth (nm)
Centroid at 25%
0
Centroid at 75%
Note: Centroid is a weighted
average of points on a curve.
Correlation
Thresholds
Establishes the depth threshold when calculating the centroid.
•
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Highest Peak—Value defines how much of the Highest peak is included when
calculating the centroid. At 0%, only the maximum point on the curve is included. At
25%, only the maximum 25% of the peak is included in the calculation of the centroid
(See Figure 14.11d).
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Width
Figure 14.11d Width Display
Highest
peak
Max peak
•
Lowest Peak—Value used to define how much of the Lowest peak is included when
calculating the centroid. At 0%, only the maximum point on the curve is included. At
25%, only the maximum 25% of the peak is included in the calculation of the centroid.
Reference
You may specify a reference point for the green cursor. This feature is useful for repeated, identical
measurements on similar samples. For example, the green slider cursor is moved to a specific point
on the Correlation histogram. That point is remembered (saved) as a distance from whatever
reference peak you choose.
•
Highest Peak—Topmost peak in the Correlation histogram
•
Lowest Peak—Peak closest to the bottom in the Correlation histogram
•
Min peak—Shortest (smallest) peak in the curve
•
Max peak—Tallest peak in the Correlation histogram
Histogram filter cutoff
Lowpass filter which smooths out the wavelengths that lie below the cutoff. Used to reduce noise in
the Correlation histogram.
Peak Average Factor
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Another method
Aanalysis Commands
(M-Z)of averaging the height histogram data to eliminate extraneous peaks.
Width
When Peak Avg. Factor is set to 4, the height histogram data of four peaks is averaged
out and displayed as one peak in the correlation data.
14.11.4 Auto Program Edit Panel
Adds or deletes the Width command from the currently selected Auto Program file. A
panel listing measurements reported by the Width command is displayed. Selecting a
measurement stores it in the data file when Auto Program is run.
Note:
The measurement selections vary depending on the setting of the
Measure feature in the display screen. The following values are for
the Linear Dimensions setting (See Figure 14.11e).
Figure 14.11e Width Auto Program Edit Panel
Buttons in the Auto Program Edit Panel
SELECT ALL—Selects all the measurements simultaneously.
CLEAR ALL—Clears all the measurements simultaneously.
NOTE—Allows you to insert a command note in the Auto Program file.
SET LIMITS—Sets specific limits for a given value, as well as a % limit on the total.
Limits may be set only for non-planar, non-circular Width measurements.
SAVE—Saves selected measurements to the Auto Program file. If the Width command is
already in the current Auto Program file, it retains its position in the file.
DELETE—Removes the Width command from the Auto Program file.
QUIT—Exits the Auto Program Edit mode without making changes to the Auto Program
file.
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Width
14.11.5 Width Display Monitor
Figure 14.11f Width Display Screen
The display screen includes a top view image and two histograms. Statistical width data is
displayed near the lower-left corner of the screen. By using the mouse, the topview image allows a
bounding box to be superimposed over it, defining the area where width is to be analyzed. The left
histogram displays the raw depth data as depth-vs-histogram area. The right histogram displays a
Gaussian-filtered version of the same data. In both histograms, depth data is distributed
proportional to its occurrence within the defined bounding box. For example, in the example shown
above, most of the surface (where the histogram peaks horizontally) lies near a depth of
approximately 75 and120 nm.
When the Width command is opened, the most recent configuration file sets the Threshold plane
and measure a feature. Temporary adjustments to the Width measurement functions may be made
by adjusting the box cursor and/or sliders on the Display Monitor.
These adjustments are not saved and are immediately reset to the current configuration file while in
the function. If these settings need to be saved, a new configuration file may be created.
Width Display Menu Commands
Cursor
Allows to select different types of cursors for different types of image data selection.
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Width
•
Box cursor—The mouse draws a white box on the image. Area within the box is
analyzed.
•
Feature select—The mouse is used to include a feature in Width analysis.
•
Feature de-select—The mouse is used to exclude a feature from Width analysis.
•
Line—Allows you to cut a portion of a feature or allows you to divide one feature in to
two parts.
Mode
Switches Width analysis between single and multiple features.
•
Single feature—Width analysis is performed on one feature only.
•
Multiple feature—Width analysis is performed on two or more features.
Measure
Determines the manner in which features are to be measured using Width analysis.
•
Circular dimensions—Measures features in terms of area and diameter. This form of
measurement may be preferable for certain types of features, such as grains and holes.
•
Linear dimensions—Measures features in the X or Y direction (width and length) and
calculates the mean value.
Figure 14.11g Linear Measurement
X1
X1
X2
X3
X4
X5
X6
X7
X Linear Dimensions = X
426
Y Y Y
Y1 2 3 4 Y5 Y6Y7
Y Linear Dimensions = Y
•
Height—For raised features (bumps)—measures vertical distance between highest point
of the selected feature and the reference peak. For depressed features (holes, trenches)—
measures vertical distance between lowest point of the selected feature and the
reference peak.
•
Side angle—Measures angles on right and left sides selected feature (See
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Width
Figure 14.11h Side Angle Measurement
Green Cursor on Plane
Z
Side Angle
X
Red Cursor on Pit
Cross Section of Feature
14.11.6 Width Example
Figure 14.11i Electric Field Image
The 35.12-micron image above reveals metal lines on a gallium arsenide sample. The sample is
broken, creating four separate height levels. For this example, we are measuring a series of lines in
the upper portion of the image. Width is to be measured from the left to right sides of a raised
feature.
Sample Width Procedures for Electric Field Sample
1. Load the image “e_field.tm” in the images directory.
Note:
The file “e-field.tm” is included with the images disk which accompanies most
recent software versions.
2. Before doing any Width analysis, first ensure the image is plane fit by clicking on Modify /
Plane Fit (Manual or Automatic). Use a plane fit along the image’s X- and Y-axes (Planefit
order = 1).
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Width
Note:
To obtain accurate depth comparisons between two or more identical images,
each image must be plane fit before commencing Width analysis. Tilted
images introduce inconsistencies to measurements.
3. Next, load the plane fitted image into the Analyze / Width function by clicking on Analyze
/ Width. .
4. Click on the Configure button to begin configuring for the image. Select the appropriate
parameters for measurement (See Figure 14.11b).
5. Click on Measure/Linear dimensions and then select Mode/Multiple features.
6. Use the mouse to move the cursor to the Display Monitor, then draw a box cursor on the top
view image similar to the one in the example figure above.
Histograms for depth data are presented on the right side of the screen. The histogram peaks
correspond to the different parts of the image (See Figure 14.11j).
0
Figure 14.11j Width Histogram Analysis
40
Analyzed area
80
Surface
2
120
Pit
160
Depth [nm]
1
0
0.50
Correlation
1.00
7. Move the green cursor in the right Gaussian Filtered histogram to define a threshold where
the desired raised lines are separated from the lower areas between the lines.
8. Select Cursor in the display menu, then select Feature select. Click on the desired lines
(features) to be measured.
The linear width values (X mean) display in the lower-left data box.
14.11.7 Interpreting Width Data
The Display Monitor lists all information regarding width analysis within the bounding box. The
information varies depending on the selection in the Measure menu (at the top of the Display
Monitor).
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Width
Note:
Define the Threshold plane value. Except for the Side Angle value, all other
values in the Measure menu are calculated or measured values. If no
Threshold plane is set, a default value is set by the software.
Height
•
Threshold plane—Depth from the selected peak to the plane which defines the cutoff
level of continuous features.
•
Pk to LocMax—Depth from reference peak to the highest point in the feature selected
by the Threshold plane and Feature select.
•
Pk to LocMin—Depth from reference peak to the lowest point in the feature selected by
the Threshold plane and Feature select.
Side Angle
•
Threshold plane—Depth from the selected peak to the plan which defines the cutoff
level of continuous features. Also defines one pair of X-Z data points for slope
calculation.
•
Bottom plane—Depth from selected peak to the level at which the second set of X-Z
data points are measured.
•
Left side angle—Left wall angle of feature
•
Right side angle—Right wall angle of feature
Linear Dimensions
•
Threshold plane—Depth from the selected peak to the plan which defines the cutoff
level of continuous features.
•
X mean—The average of all the highlighted X values within the enclosed area.
•
X sigma—The standard deviation of the measured X values.
•
Y mean—The average of all the highlighted Y values within the enclosed area.
•
Y sigma—The standard deviation of the measured Y values.
Circular Dimensions
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•
Threshold plane—Depth from the selected peak to the plan which defines the cutoff
level of continuous features.
•
Area—The area of the circle defined by the feature.
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• Diameter—Diameter
of the circle defined by the feature.
Aanalysis Commands
(M-Z)
Width
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MSM and HFMFM
14.12MSM and HFMFM
MSM and HFMFM are AFM measurement tools typically used to measure magnetic field
characteristics and the Magnetoresistive (MR) read sensitivity of data storage products (write/read
heads used in disk and tape mass storage).
14.12.1MSM and HFMFM Panels
In the Analyze menu, select MSM and HFMFM for navigating in the MSM and HFMFM Track
Width Analysis (See Figure 14.12a).
Figure 14.12a MSM and HFMFM Main Panels
MSM and HFMFM Track Width Analysis Panel
This panel allows to configure the display image colors, contrast and offset of colors for
interpreting the analysis. The buttons on the panel access a Configure panel to define an area to
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MSM and HFMFM
analyze (See Section 14.12.2), save trace and correlation parameters, and set limits in an Auto
Program file.
14.12.2 MSM and HFMFM Configure Panel
Figure 14.12b MSM Configure Panel
Parameters and Buttons on the Configure Panel
Searching Window Parameters—Defines the area of data to be analyzed for Reader width and
amplitude within a 1:1 aspect ratio image. A rectangular window is determined from the
coordinates assigned by the Lower Left Corner X-Y to the Upper Right Corners X-Y (See
Figure 14.12c).
•
432
Input Image ID—Selects the image to be analyzed. 0 is default, 1 is the left image, 2
and 3 are the middle and right images.
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Aanalysis Commands (M-Z)
MSM and HFMFM
•
Lower Left Corner X—The pixel location of the lower left corner of the search window
on the X-axis. Range: 0-512
•
Lower Left Corner Y—The pixel location of the lower left corner of the search
window on the Y-axis. Range: 0-512.
•
Upper Right Corner X—The pixel location of the upper right corner of the search
window on the X-axis. Range: 0-512.
•
Upper Right Corner Y—The pixel location of the upper right corner of the search
window on the Y-axis. Range: 0-512.
Figure 14.12c MSM Defining Window Parameters
Figure 14.12c represents HF MFM and MSM images captured in a single scan of an active GMR
disk head with the inductive write portion of the head indicated by the left image and the Magneto
Resistive reader indicated by the right. MSM and HF MFM Analysis (Off-line / Analyze / MSM
and HF MFM) is used to analyze both scans individually and return width, amplitude and position
information. Position information is useful in determining Y offset values between the write and
read elements of the head.
Track Width Analysis Parameters—Defines the location of the top edge of the Mid Shield (See
Figure 14.12d).
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•
Analysis Band Width—Width of the searching box in pixels. Range: 1-512.
•
Analysis Band Height—Height of the searching box in pixels. Range: 10-512.
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MSM and HFMFM
•
Analysis Band X Offset—Offsets the analysis band in the X direction, by the number
of pixels specified. A negative number offsets the band to the left of the peak value.
Range: 0-512.
•
Top Cut Off Factor—Percent of data excluded at top for best-fit line calculation from
high reference to low reference. Range: 0.05-0.950.
•
Bot Cut Off Factor—Percent of data excluded at bottom for best-fit line calculations
from the low reference to high reference. Range: 0-1.00.
•
Target Threshold—Threshold, in percent, to find the edge between the high and low
reference levels. Range: 0.05-0.950.
Other Parameters
•
Correlation Slope—A gain value that can be applied to track width results to fine tune
different systems into agreement. The ‘M’ in MX+B.
Range: –1000-1000.
•
Correlation Offset—An offset value that can be applied to track width results to fine
tune different systems into agreement. The ‘B’ in MX+B.
Range: –2000-2000.
•
Min Spec Limit—Acceptance criteria lower value. Range: 0-1000.
•
Max Spec Limit—Acceptance criteria upper value. Range: 0-1000.
Reference Preferences
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•
Use 0 (Zero) As Low Reference—If selected, the low reference value is the average of
the two end values of the analysis band.
•
Use Top_Average As High Reference—If selected, the high reference value is the
average of the data in the area of the Analysis Band determined by Top Cut Off Factor
(2d). If unchecked, the high reference value is the maximum data value in the Analysis
Band.
•
Use Best_Fit_Line TW With Spec Limits—If selected, the specification limits set in
3c,d are applied to best-fit line track width for failure codes. If unchecked o, the
specification limits are applied to trace track width.
•
Search Target Y Position First—If selected, the system searches the image for the peak
value of each scan line in the Ydirection. If not selected, images are searched in the
direction.
For example in Figure 14.12d X direction search is appropriate (i.e., not selected) if the
image was rotated 90º, Y direction (selected) search would be appropriate.
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Aanalysis Commands (M-Z)
MSM and HFMFM
Figure 14.12d MSM Data Display
Failure Codes on the MSM and HFMFM Display Monitor
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•
0—Failed to find a target in any of the search windows or analysis bands.
•
20—Failed to derive a Track Width result.
•
100—Failed the lower Spec. Limit.
•
200—Failed the upper Spec. Limit.
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Aanalysis Commands (M-Z)
MSM and HFMFM
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Aanalysis Commands (M-Z)
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Chapter 15 Modify Menu
The commands in the Modify menu enhance image features, eliminate noise, correct for bow and
tilt and isolate specific features. These operations process the captured/stored image, then produce
another (modified) version.
Note:
Before modifying images, always make a backup copy of the original. This
allows more freedom to experiment with images without the risk of losing
them.
A number of books have been written on the subject of image processing. Digital Instruments
Veeco Metrology Group recommends two excellent books on the subject by John C. Russ: The
Image Processing Handbook, 1992, CRC Press, Inc., Boca Raton; and, Computer-Assisted
Microscopy, The Measurement and Analysis of Images, 1992, Plenum Press, New York.
15.1 Overview of the Modify Commands
15.1.1 Contents of the Modify Menu
This chapter discusses the following Modify menu commands:
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•
Clean Image Section 15.3
•
Contrast Enhancement Section 15.4
•
Convolution Section 15.5
•
Detrend Section 15.6
•
Edge Enhance Section 15.7
•
Erase Scan Lines Section 15.8
•
Flatten Section 15.9
•
Gaussian Section 15.10
•
Geometric Section 15.11
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Overview of the Modify Commands
•
Highpass Section 15.12
•
Invert Section 15.13
•
Lowpass Section 15.14
•
Median Section 15.15
•
Parameter Section 15.16
•
Plane Fit Auto Section 15.17
•
Plane Fit Manual Section 15.18
•
Resize Section 15.19
•
Rotate Section 15.20
•
Spectrum 2D Section 15.21
•
Subtract Images Section 15.22Zoom Section 15.23
15.1.2 Modify Command Applications
See Table 15.1a to review each Modify feature and its application.
[Fix this table prior to next print]
Table 15.1a
Modify Commands
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Reduce
Noise
Isolate Small Features Isolate Large Features Detect Edges
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Modify Menu
Overview of the Modify Commands
Modify Commands
Reduce
Noise
Isolate Small Features Isolate Large Features Detect Edges
Zoom
Clean Image
Contrast Enhancement
w/ Background Remove.
Convolution
Detrend
Erases Scan Lines
Flatten: Order = 0
Order = 1
Order = 2, 3
Gaussian
Geometric
Highpass
Invert
Low Pass
Median
Plane Fit:Auto
Plane Fit - Manual
Resize
Rotate
Spectrum 2D
Subtract
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15.2 Menu
Image Filtering using Data Matrix (Kernel)
Image Filtering using Data Matrix (Kernel) Operations
Operations
A number of Offline / Modify image filters use matrix operations to achieve
their effects. The matrix operations include:
•
Clean Image
•
Convolution
•
Gaussian
•
Highpass
•
Lowpass
•
Median
In each of these commands, data is analyzed in kernels (matrices), with every
pixel individually recalculated based upon its neighboring values. For example,
data which is undergoing a Median filter applies a 3 x 3 or 5 x 5 matrix operation
to each image pixel. (Most filters utilize 3 x 3 matrices.)
2746-110
Figure 15.2a Median Filter Example
Pixel a2a3 (height datum)
Pixel a2a4
Shift neighborhood
one column right
Image data
Neighborhood A
Neighborhood B
In the example in Figure 15.2a, each pixel is individually evaluated within its
own local, 5 x 5 “neighborhood.” Neighborhood “A“ has pixel a2a3 at its center.
For a Median filter, the 25 pixels in neighborhood A are evaluated to locate the
median value pixel. The median value of neighborhood A is then mapped to a
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new pixel a2a3 in a separate data set.
Modify Menu
Image Filtering using Data Matrix (Kernel) Operations
The matrix is shifted over one column to define a new neighborhood (“B”) with pixel a2a4
at its center.
The median value for neighborhood “B” is found, then mapped to pixel a2a4 in the separate
data set. The filtering process is repeated until all pixels have been remapped.
Note:
In this and all other matrix operations, pixels are mapped to the new,
separate data set without changing pixel values in the original image
data until saved. (Matrices do not operate cumulatively on previously
filtered data.) Filters include averaging (e.g., Lowpass filter) and nonaveraging (e.g., Highpass) types.
Most filters utilize 3 x 3 pixel matrixes, which tend to confine any averaging effects to
smaller areas. They process image data in a manner similar to the
5 x 5 matrix example in Figure 15.2b.
Figure 15.2b 3 x 3 Pixel Matrix
Pixel a2a2
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Gaussian filters utilize a 1 x N matrix, where N is determined by the
Filter size parameter. In this instance, image data is analyzed in two-dimensional matrices
which are shaped to a Gaussian curve where the sigma value (σ) is determined by the
Filter cutoff parameter. (See Section 15.10.)
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Clean Image
2750-110
2749-110
Figure 15.2c Gaussian Filter Example
15.3 Clean Image
The Clean Image command is used to smooth noisy image data within the cursor box you specify.
The Spike cut off and Streak cut off commands define sigma cut-offs for spikes and streaks,
respectively. Data points lying beyond the mean ± designated sigma values (σ) are replaced with
the mean data value.
Figure 15.3a Clean Image Diagram
User-specified
cut off values
−3σ
−σ
+σ
+3σ
Affected data
Affected data
−2σ
µ
+2σ
15.3.1 Clean Image Panel
The Clean Image panel allows filter and display parameters to be adjusted (See Figure 15.3b).
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Clean Image
Figure 15.3b Clean Image Panel
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Clean Image
Parameters on the Clean Image Panel
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.)
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
Spike cut off
Number of sigma values to use as the cut off point for spike data. Data points lying outside the
mean ± Spike cut off sigma value(s) are replaced by the mean data value.
Range and Settings:
•
0—10
Streak cut off
Number of sigma values to use as the cut off point for streak data. Data points lying outside the
mean ± Streak cut off sigma value(s) are replaced by the mean data value.
Range and Settings:
•
0—10
Remove Spikes
Enables the Spike cut off value and applies it to data within the cursor box you specify.
Remove Streaks
Enables the Streak cut off value and applies it to data within the cursor box you specify.
Buttons on the Clean Image Panel
Execute—Executes the filter.
Undo—Restores the image to its original form.
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Modify Menu
Contrast Enhancement
Auto Program—Accesses the Auto Program Edit panel on the Control Monitor, allowing the
Clean Image command to be added to, or deleted from, the currently selected Auto Program file
(See Section 15.3.2).
Save—Allows the converted image to be saved to the disk.
Quit—Exits the Clean Image command.
15.3.2 Clean Image Auto Program Edit Panel
The Auto Program Edit panel allows the Clean Image command to be added or deleted to the
currently selected Auto Program file (See Figure 15.3c)
Figure 15.3c Auto Program Edit Panel
Buttons on the Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Lowpass command is already
in the current Auto Program file, it retains its position in the file.
Delete—Removes the Clean Image command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
Note:
The Auto Program File command in the Utility menu must be used to select or
create an Auto Program file.
Note:
The Auto subcommand under the Browse command selects the files to be
processed and executes the current Auto Program file.
15.4 Contrast Enhancement
The Contrast Enhancement command runs a statistical differencing filter on the current image.
This filter can bring all the features of an image to the same height and equalize the contrast
between all the features. This allows all features of an image to be seen simultaneously. Contrast
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Contrast Enhancement
Enhancement distorts height information, so quantitative measurements performed after running
this filter are inaccurate.
15.4.1 Contrast Enhancement Panel
The Contrast Enhancement panel allows filter and display parameters to be adjusted (See Figure
15.4a).
Figure 15.4a Contrast Enhancement Panel
Buttons on the Contrast Enhancement Panel
Execute—Executes the filter.
Undo—Restores the image to its original form.
Save—Allows the converted image to be saved to the disk.
Auto Program—Allows the Contrast Enhancement command to be added or deleted to the
currently selected Auto Program file
(See Section 15.4.2).
Quit—Exits the Contrast Enhancement command.
Parameters in the Contrast Enhancement Panel
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.)
Color table
Selects the color table used to encode the Z information.
Color contrast
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Contrast Enhancement
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
Contrast equalization
Degree to which the filter attempts to equalize the image contrast. The Contrast equalization
parameter is a filter coefficient which is trying to drive the standard deviation of each neighborhood
to the same value. The larger the number, the more aggressively it is driven. Values as low as 2 and
3 can have dramatic effects. This processes an image with tall features in some areas and shorter
features in other areas so that all the features become closer to the same size and can be seen
simultaneously. It can also have many other effects, including edge enhancement.
Range and Settings:
•
0—9
Background removal
Amount of background to be removed. The Background removal parameter is a filter coefficient
which brings the mean of each neighborhood towards the same value. A value of 0 has no effect and
a value of 9 makes the mean for each neighborhood the same. This allows an image that has small
features on large features to be essentially stripped of the larger features so that all of the smaller
features can be seen simultaneously. The neighborhood size should be set larger than the size of the
features you wish to preserve.
Range and Settings:
•
0—9
Neighborhood size
Sets the size in pixels of the neighborhoods to used for background removal and contrast
equalization. The Neighborhood size parameter specifies the size in pixels of square regions
(kernels) the image is divided into for Contrast equalization and Background removal. This should
be set near to, or larger than, the pixel size of features in the image you are trying to enhance.
Range and Settings:
•
2, 4, 8, 16, 32, 64
15.4.2 Contrast Enhancement Auto Program Edit Panel
The Auto Program Edit panel allows the Contrast Enhancement command to be added or
deleted to the currently selected Auto Program file (See Figure 15.4b).
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Contrast Enhancement
Figure 15.4b Auto Program Edit Panel
Buttons on the Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Contrast Enhancement
command is already in the current Auto Program file, it retains its position in the file.
Delete—Removes the Contrast Enhancement command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
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Note:
The Auto Program File command in the Utility menu must be used to select or
create an Auto Program file.
Note:
The Auto subcommand under the Browse command selects the files to be
processed and executes the current Auto Program file.
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Convolution
15.5 Convolution
The Convolution filter incorporates filters similar to the Highpass and Lowpass commands (See
Section 15.12 and Section 15.14), plus a third, User filter having an assignable 3 x 3 kernel. This
third option enables you to apply a custom-designed, non-averaging filter to the image data and can
prove very useful in enhancing edge features. Filter kernels are applied to the image data pixel-bypixel to construct an entirely new image.
Selecting the Convolution function displays a panel shown in Figure 15.5a featuring a 3 x 3 kernel
(matrix). The kernel values alter, depending upon which filter is selected in the Filter option box. A
brief discussion of each filter follows.
15.5.1 Convolution Panel
Figure 15.5a Convolution Pane
Buttons on the Convolution Panel
Execute—Executes the filter.
Undo—Restores the image to its original form.
Save—Allows the converted image to be saved to the disk.
Auto Program—Allows the Convolution command to be added or deleted to the currently
selected Auto Program file (See Section 15.5.2).
Quit—Exits the Convolution command.
Parameters in the Convolution Panel
Filter—Lowpass
This is the only averaging filter in the Convolution command and is similar to the Modify/
Lowpass function (See Section 15.14). It is designed to filter out high frequency noise, and imparts
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Convolution
a “smoothing” effect to surface features, averaging each pixel with the pixels around it. When
selected, its kernel defaults to the following values:
1
1
1
1
1
1
1
1
1
This filter treats each pixel of the image data according to the following algorithm:
a 11 a 12 a 13
111
1 1 1 ⇒ a 21 a 22 a 23
111
a 31 a 32 a 33
a 11
∑ aii
a
33
a′ 22 = -----------9
Each pixel in the image data, a 22 , is incrementally multiplied by every pixel immediately adjacent
to it; the product is divided by 9 (averaged), and the result, a′ 22 , is plotted to the modified image.
This averaging effect removes high frequency noise from the image and has a “smoothing” effect
on sharp surface features.
Filter—Highpass
This filter is similar to the Modify / Highpass function (See Section 15.14). It is designed to filter
out low frequency noise and accentuate high frequency features. When selected, its kernel defaults
to the following values:
-1
-1
-1
-1
8
-1
-1
-1
-1
This filter treats each pixel of the image data according to the following algorithm:
a 11 a 12 a 13
–1 –1 –1
⇒
a 21 a 22 a 23
–1 8 –1
–1 –1 –1
a 31 a 32 a 33
a′ 22 =
a 11
a 23
a 21
a 33
∑ –aii + 8a22 + ∑ –aii
Each pixel in the image data, a 22 , is multiplied by eight (8) and incrementally added to every pixel
immediately adjacent to it, then the result, a′ 22 , is plotted to the modified image. Notice that this
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Convolution
algorithm is non-averaging; therefore, it accentuates differences in adjacent pixels rather than
smooth them (as does the Lowpass filter).
Filter—User
The third filter option is labeled User. This option allows you to custom-design the image filter by
assigning values to the 3 x 3 kernel. When this option is selected, its values default to those of the
Highpass option . To change the filter, click on any of nine kernel values with a cursor, then enters
the new value.
Note:
Whole numbers (integers) must be used for all values.
Note:
If any negative values are entered into the User kernel, the sum of all values
must equal zero (0).
The user-defined kernel operates upon the image data in a manner similar to the Highpass filter:
User-defined kernel
x 11 x 12 x 13
a 11 a 12 a 13
x 21 x 22 x 23 ⇒ a 21 a 22 a 23
x 31 x 32 x 33
a 31 a 32 a 33
a, x 11
a′ 22 =
∑ xii aii
a, x 33
Experimentation with various values on a known sample surface provide the best indication of how
the user-defined kernel impacts image data.
15.5.2 Convolution Auto Program Edit Panel
The Auto Program Edit panel allows the Convolution command to be added or deleted to the
currently selected Auto Program file (See
Figure 15.5b Convolution Auto Program Edit Panel
Buttons on the Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
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Detrend
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Convolution command is
already in the current Auto Program file, it retains its position in the file.
Delete—Removes the Convolution command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file
15.6 Detrend
The Detrend command modifies the displayed image by accessing spatial frequency data for
imaging features with slowly changing topography and for viewing the image for sharp changes in
topography. The lower spatial frequency includes data at a “lower frequency” and correlates to a
lower Eigenvalue input in the Detrend Filter panel.
The original image can be thought of as a sum of 100 Eigenvalues numbered from 1 (lowest spatial
frequencies) to 100 (highest spatial frequencies).
15.6.1 Detrend Filter Panel
Select Modify/Detrend to access the Detrend panel (See Figure 15.6a).
Figure 15.6a Detrend Panel
Parameters and Buttons on the Detrend Panel
Save—Saves the modified data.
Auto Program—Allows the Detrend command to be added or deleted to the currently selected
Auto Program file (See Section 15.6.2).
Quit—Exits the Detrend command without saving.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.)
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Detrend
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
Number of Eigenvalues
Controls the displayed image when entered and Execute is the Display Monitor is run.
Range and Settings:
•
1—Displays the lowest spatial frequency data.
•
2-100—Displays increasing spatial frequency data of the original image.
15.6.2 Detrend Auto Program Edit Panel
The Auto Program Edit panel allows the Detrend command to be added or deleted to the currently
selected Auto Program file (See Figure 15.6b).
Figure 15.6b Detrend Auto Program Edit Panel
Parameters and Buttons on the Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Detrend command is already
in the current Auto Program file, it retains its position in the file.
Delete—Removes the Detrend command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
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Detrend
15.6.3 Detrend Display Monitor
The Display Monitor displays the original image, the scan parameters and a command menu.
Detrend Display Menu Commands
View—Displays the Original image, Trend (image based on Eigenvalues) and the Detrended
Image (the sum of the detrended image and the trended image and the Eigenvalues equals the
original image) (See Figure 15.6c).
Figure 15.6c The Original Image in Detrend Image Display
Menu
Color Table
Original
Image
Scan
Parameters
Status
Note:
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For 1 Eigenvalue, the image displays lower spatial frequency data (i.e., the
image shows slower changes in topography) (See Figure 15.6d).
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Figure 15.6d Filtered Detrend Image
Modify Menu
Edge Enhance
Image change
with “1” Eigenvalue shows
low frequency
image.
Execute—Runs the Detrend command.
Undo—Resets the Detrend settings to the original image without saving.
Cursor—Allows a box cursor to specify an area on the image to be modified. The Delete
command detrends the specified area. The Clear command clears the cursor box(es).
Note:
To reset the image, select the Undo command.
15.7 Edge Enhance
Edge Enhance is used to accentuate boundaries (edges) between dissimilar areas of an
image. This is accomplished at some loss of height resolution; therefore, images should be
copied and processed with edge enhancement separately if height data needs to be
preserved.
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Edge Enhance
Figure 15.7a Edge Enhance Example
Before
After
The Edge Enhance routine detects edges in images by applying Sobel kernels to 3 x 3 pixel cells.
These kernels are of the form where edge enhancement is achieved by summing the absolute value
of the results of both kernels. This routine is applied to the center pixel in each 3 x 3 kernel of the
image (See Figure 15.7b).
Figure 15.7b Sobel Kernel in 3 x 3 Pixels
-1
-2
-1
-1
0
1
0
0
0
-2
0
2
1
2
1
-1
0
1
There are no parameter controls associated with the Edge Enhance command; however, the
command may be applied repeatedly to the same image by clicking on the Re-execute button.
Images may be restored by clicking on the Undo button.
The Edge Enhance panel allows display parameters to be adjusted to your preferences (See Figure
15.7c)
Figure 15.7c Edge Enhance Panel
Re-execute—Reapplies edge enhancement.
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Erase Scan Lines
Note:
Edge Enhance may be applied as many times as desired; however, image
definition may be lost if used excessively.
Undo—Restores the image to its original form.
Save—Allows the converted image to be saved to the disk.
Quit—Exits Edge Enhance.
15.8 Erase Scan Lines
The Erase Scan Lines command removes noisy scan lines from an image. This operation replaces
the specified line or lines by interpolation. For example, the image in Figure 15.8a includes noisy
scan lines. Erasure lines are positioned over the noisy lines to remove them. Where noise is larger,
the erasure line is widened (bottom).
Figure 15.8a Erase Scan Lines Example
Noisy scan lines
Erasure bands
Erasure band (widened)
15.8.1 Erase Scan Lines Panel
The Erase Scan Lines panel allows display parameters to be adjusted to your preferences (See
Figure 15.8b).
Figure 15.8b Erase Scan Lines Panel
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Erase Scan Lines
Parameters and Buttons in the Erase Scan Lines Panel
Execute—Initiates the command.
Undo—Restores the image to its original form.
SAVE—Allows the converted image to be saved to the disk.
Quit—Exits the operation.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
15.8.2 Erase Scan Lines Display Monitor
The standard top view of the image, plus the menu and status bar are shown on the Display
Monitor.
Erase Scan Lines Menu Bar Commands
Add
Allows a horizontal reference line to be placed over a scan line to remove it from the image.
Reference lines can also be moved in the Add mode by clicking on a previously placed line. The
first click ties the line to the mouse movement; the second click drops the line.
Mouse Operations—Add mode
•
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Erase Scan Lines
•
1st click—Places a horizontal line which is tied to the mouse on the image. The line can
be positioned by moving the mouse.
•
2nd click—Drops the line generated by the first click.
Delete
Removes a line previously placed with the Add subcommand.
Mouse Operations—Delete mode
•
Position the cursor over a previously added line and click the left button to remove the
line.
Move
Moves a reference line previously placed with the Add subcommand.
Mouse Operations—Move mode
•
Use the left button.
•
1st click—Position the cursor over a previously added line and click the left button to tie
the line to the movement of the mouse. The line can be repositioned by moving the
mouse.
•
2nd click—Drops the line picked up by the first click.
Widen
Increases the width of a reference line previously placed with the Add subcommand.
Mouse Operations—Widen mode
•
Position the cursor over a previously added line and click the left button to increase the
width of the line in both directions.
Clear
Removes all of the reference lines from the image.
Execute
Removes the scan line or lines beneath the reference lines added to the image.
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Undo
Restores the image to its original form.
Mouse Operations—All modes
•
A click of the right mouse button completes the operation and positions the cursor over
the Execute subcommand in the menu bar. At this point, clicking either mouse button
executes the command. Therefore, once the lines are positioned properly, two clicks of
the right mouse button execute the command.
Note:
The operating modes, Add, Delete, Move, or Widen, are shown in the status
bar. Once a mode has been selected, repeated operations can be performed. For
example, after the Delete subcommand has been selected, any number of lines
can be deleted with multiple clicks of the left button. The Add mode is the
default mode for this command.
Note:
The data for the adjoining scan lines is used to interpolate new data for the
removed scan lines. Therefore, this command does not change the number of
scan lines in the image.
See also: Off-line / Modify menu: Median, Lowpass, and Spectrum 2D commands.
15.8.3 Procedure in Using the Erase Scan Lines Command
1. Load a captured image from the SPM/IMAGES DIRECTORY.
2. Click on the Offline / Modify / Erase Scan Lines command.
3. Move the cursor to the Display Monitor, then click on Add. Next, move the cursor to the top
view image.
4. Locate a noisy scan line (See Figure 15.8a for locating noise on an image), then use the
cursor to click on it. A white erasure line is drawn.
5. Drag the white erasure line to a position where it is covering the offending scan line, then
click the mouse again to drop the line.
6. Click on Add again and place another white erasure line over a wider noisy scan line. Drop
the line and click on Widen, then return to the line once more and click on it. The erasure
line is widened. (You may continue to widen the line by clicking on it again and again.)
7. To erase the covered lines, click on Execute (use either the display or Control Monitor). The
covered lines is reconstructed (“erased”) by interpolating from neighboring data.
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15.9 Flatten
The Flatten command eliminates unwanted features from scan lines. It uses all unmasked
(stopbanded) portions of scan lines to calculate individual least-squares fit polynomials. The
polynomials are subtracted from each scan line. This is useful for samples that have sporadic, tall
features in predominantly flat areas. (Only featureless area of the scan should be used to calculate
the polynomial. All other features should be covered with a stopband.)
15.9.1 Flatten Panel
The Flatten panel is displayed, allowing the order of the equation to be selected and display
parameters to be adjusted to your preferences.
Figure 15.9a Flatten Panel
Parameters and Buttons on the Flatten Panel
Execute—Initiates the command.
Undo—Restores the image to its original form.
Auto Program—Allows the Flatten command to be added or deleted to the currently selected
Auto Program file (See Section 15.9.2).
Save—Allows the converted image to be saved to the disk.
Quit—Exits the operation.
Flatten order
Selects the order of the polynomial calculated and subtracted from each scan line.
Range and Settings:
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Flatten
•
Zero order (0) removes the Z offset between scan lines by subtracting the average Z
value for the selected segment from every point in the scan line.
•
First order (1) removes the Z offset between scan lines, and the tilt in each scan line, by
calculating a first order, least-squares fit for the selected segment then subtracting it
from the scan line.
•
Second order (2) removes the Z offset between scan lines, and the tilt and bow in each
scan line, by calculating a second order, least-squares fit for the selected segment then
subtracting it from the scan line.
•
Third order (3) removes the Z offset between scan lines, and the tilt and bow in each
scan line, by calculating calculates a third order, least-squares fit for the selected
segment and subtracts it from the scan line.
Show warning
When enabled (click on the box to place an “X”), the following warning is displayed before access
to the Flatten panel is granted (See Figure 15.9b).
Figure 15.9b Flatten Warning
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the color table.
Color offset
Shifts the color table used to display the image.
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15.9.2 Flatten Auto Program Edit Panel
The Auto Program Edit panel allows the Flatten command to be added or deleted to the currently
selected Auto Program file (See Figure 15.9c).
Figure 15.9c Flatten Auto Program Edit Panel
Parameters and Buttons in the Flatten Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Flatten command is already in
the current Auto Program file, it retains its position in the file.
Delete—Removes the Flatten command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
15.9.3 Flatten Display Monitor
The standard top view of the image, and the menu and status bars, are shown on the Display
Monitor.
Flatten Menu Bar Commands
Clear
Removes stopband(s) from the image.
Execute
Initiates the flattening operation.
Undo
Restores the image to its original form.
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Mouse Stopband Operations
•
1st click, left button—Drops the first corner of the stopband.
•
2nd click, left button—Drops the second corner of the stopband.
•
Subsequent clicks, left button—Additional clicks can be used to draw additional
stopbands, or pick up, resize or reposition.
•
Clicking the right button moves the cursor to the Execute subcommand in the top menu
bar.
Note:
The Flatten command uses only those data points which have not been
stopbanded to generate each least-squares fit polynomial; however, all data is
subtracted from polynomials.
Note:
Use of the Flatten command modifies the file’s height information. If you need
to keep the height information, save a separate, unflattened copy of the image
file before using Flatten.
See also: Off-line / Modify menu: Geometric, Plane Fit Auto, and Plane Fit Manual commands.
Procedures for the Flatten Command
For an image that contains a number of noisy scan lines, use the Flatten command to correct the
problem.
1. Load the image. Before using Flatten, examine the image using Surface Plot. Click on
View / Surface Plot, or use the Surface Plot icon. Notice that the image contains disjointed
scan lines which are misaligned along the Z-axis (some are high and some are low). This
effect somewhat resembles an unshuffled deck of cards when viewed on-edge. The image
also has bow along its Y-axis. When finished examining the image, click on Quit.
Note:
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Figure 15.9d shows an image file “gaas.epi” in its original, raw form as an
example for the Flatten command. Many of the image’s scan lines are
disjointed along the Z-axis. The image also has a slight bow along the Y-axis.
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Figure 15.9d Raw Image Epitaxial Gallium Arsenide
2. Click on Flatten. Set the Flatten order value to 2. This removes both the scan line
misalignment and the Y-axis bow.
3. Click on Execute to initiate the Flatten command. The flattened image appears on the
display screen.
Note:
Figure 15.9e shows the same image file after using a second-order Flatten
(Flatten order = 2). The scan lines are now aligned and the Y-axis bow is
removed.
Figure 15.9e Flattened Image Epitaxial Gallium Arsenide
4. To see a variety of effects using the Flatten command, enter different Flatten order values.
Each new version may be undone by clicking on the Undo button.
15.10Gaussian
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The Single Axis Gaussian Filter permits analysis of images along either the X or Y axis with a 1by-X kernel you define specified in Gaussian terms. The Filter size value in the panel corresponds
to the kernel size, with the symmetric Gaussian curve centered over the operated-upon pixel. The
Filter cutoff value corresponds to the sigma (σ) value of the Gaussian curve, encompassing
approximately 68 percent of the data. By varying these two values, you are able to effectively shape
the Gaussian curve.
Larger Filter cutoff values distribute the curve broadly (See Figure 15.10a). During Lowpass
filtering, this lends greater weight to values farther away from the pixel and increases the Gaussian
filter’s averaging effects upon the image. During Highpass filtering, this subtracts a decreased
average from each pixel, lessening the filter’s impact.
Figure 15.10a Larger Filter Cutoff
−σ
µ
+σ
Larger Filter cutoff
Filter size
The Flatten Warning
Smaller Filter cutoff values concentrate curve data around the center value (See Figure 15.10b).
prompt reminds you
Figure 15.10b Smaller Filter Cutoff
that flattening
permanently alters the
height characteristics of
your data. If you do not
wish to see the warning
when Flatten is used,
During Lowpass filtering, this lends less weight to pixels distant from the center, decreasing the
Gaussian filter’s ability to average local pixels with distant ones—the filter’s impact is lessened.
During Highpass filtering, the larger and more localized pixel average being subtracted from the
operated-upon pixel value yields an enhanced impact upon the image.
Note:
Filter size and Filter cutoff are specified in units of Distance, Spatial
frequency, Time , Temporal frequency, and Pixel size.
15.10.1Single Axis Gaussian Filter Panel
The Single Axis Gaussian Filter panel is shown in Figure 15.10c.
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Figure 15.10c Single Axis Gaussian Filter Panel
Parameters and Buttons in the Gaussian Filter Panel
Auto Program—Allows the Gaussian command to be added or deleted to the currently selected
Auto Program file (See Section 15.10.2).
Execute—Applies the Single Axis Gaussian Filter to the currently loaded image.
Undo—Undoes the Single Axis Gaussian Filter command and restores the file to its original form.
Save—Saves the filtered image file to the directory and file name you specify.
Quit—Quits the Single Axis Gaussian Filter panel.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
Filter size
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Size of the scan line to be operated upon by the Gaussian filter kernel. This value is expressed in the
Cutoff units specified (See below).
Range and Settings:
•
Minimum = 3 pixels
•
Maximum = one-half scan size
#pixels
The current Filter size in pixel units. This value may be used to both enter and monitor the Filter
size.
Range and Settings:
•
Minimum = 3
•
Maximum = one-half scan size.
Filter cutoff
Portion of the scan line to be included within filtered computations. This value represents a
statistical sigma (σ) value and is applied to both sides of the center, average data point (i.e., µ ± σ);
therefore, the filtered area equals twice the Filter cutoff value.
Range and Settings:
•
≥ 0.01 nm
Cutoff units
Selected units are applied simultaneously to both the Filter size and the Filter cutoff. (The #pixels
field displays the pixel equivalent of the current Filter size value.)
Range and Settings:
•
Distance
•
Spatial frequency
•
Time
•
Temporal frequency
Type: Low Pass and High Pass
Low Pass filtering allows through longer wavelength features while filtering out shorter
wavelength features. The net effect is to remove noise in the form of spikes and fuzz on the image.
(For a more thorough discussion on Low Pass, See Section 15.14.)
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Conversely, High Pass filtering allows shorter wavelength features through while filtering out
longer wavelength features. (For a more thorough discussion, See Section 15.12.)
15.10.2Gaussian Auto Program Edit Panel
The Auto Program Edit panel allows the Gaussian command to be added or deleted to the
currently selected Auto Program file (See Figure 15.10d).
Figure 15.10d Gaussian Auto Program Edit Panel
Buttons on the Gaussian Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Gaussian command is already
in the current Auto Program file, it retains its position in the file.
Delete—Removes the Gaussian command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
15.10.3Gaussian Kernel Algorithm
The general equation used to generate a 1-by-(N+1) Gaussian kernel is as follows:
1 i

– ---  ---
2  σ
1
 f = --------------e
 i σ 2π

2




Where i , is in units of pixels, and σ is set by the Filter cutoff value. Using this kernel, the filter
output is as follows:
N
Lowpass pixel value
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 ---2


a 0' =  ∑ a i f i
 –N

 -----
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N
Gaussian
Highpass pixel value
 ---2


a 0' = a 0 –  ∑ a i f i
 –N

 -----
2
The actual impact of filtering on an image is best demonstrated by reviewing examples of
images before and after filtering. In the following example, both Lowpass and Highpass
Gaussian filter capabilities are demonstrated.
15.10.4Lowpass-type Single Axis Gaussian Filtering
During Lowpass filtering, the Single Axis Gaussian Filter has a unique ability to
average features oriented orthogonally to the scan frame. For example, the Gaussian
filter can average features running parallel to an image’s Y scan axis while leaving
features relatively unchanged along the X axis, or vice versa. This is a similar capability
to the Modify / Spectrum 2D function; however, it is more unidirectional (i.e., strictly
operating along the X or Y axis). One such example is provided in the three views of a
diffraction grating in Figure 15.10e.
The "grating" image Scan size is 1.872 microns. Applying a Single Axis Gaussian
Filter with Filter size of 500 nm and a Filter cutoff of 250 nm along the Y Filter axis
results in view B. Notice that rulings running parallel to the Y axis are smoothed along
their length by the filter, while features oriented orthogonal to the Y axis remain
relatively unchanged. This results in an idealized (averaged) profile of the X axis. In this
instance, the Filter cutoff is large with respect to the Filter size, giving rise to a
significant impact upon the image. (Decreasing the Filter cutoff value reduces this
impact.)
In view C, the Filter size and Filter cutoff values are unchanged; however, the Filter
axis has been rotated 90° to the X axis. The filter’s impact upon the image here is very
dramatic, destroying the ruling features in the image by averaging across their profile.
The result is an almost flat surface.
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Figure 15.10e Views of Defraction Grating
A. Original image.
B. Filter axis = Y.
C. Filter axis = X.
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15.10.5Highpass-type Single Axis Gaussian Filtering
Applications for Highpass filtering are limited to detecting smaller features. Generally, higher
frequency (shorter wavelength) features are enhanced, while sacrificing lower frequency (longer
wavelength) features and height data.
One example of applying a Gaussian Highpass filter is provided in Figure 15.10f.
This 27.41-micron, MFM image reveals magnetic domains in a permalloy specimen. Although
magnetic domains are visible on the original image, you may apply a Gaussian highpass filter to
highlight boundaries between domains.
Figure 15.10f Magnetic Domains in a Permalloy Specimen
Figure 15.10f shows the magnetic force microscopy (MFM) image in its original form. This is an
early MFM image of a permalloy specimen, and contains artifacts which are significantly reduced
in phase analyzed images using the Extender™ Electronics Module. Magnetic force is represented
in the image as height data. Suppose the microscopist wanted to highlight the magnetic boundaries
without regard to magnetic force (height data). A Gaussian Highpass filter here would be
appropriate.
Procedures for the Gaussian Filter Command
1. Select a captured *.mfm image.
2. Load into the Gaussian filter by clicking on Off-line / Modify / Gaussian.
3. If the image is fairly large image (e.g.,27.41 microns), the Filter size may be set to 1.00
micron; set the Filter cutoff to 250 nm. (These values can be experimented with to observe
how the filter’s effects alter.)
4. Set the filter Type to Highpass.
Example Explanation. First, the image is filtered along the X-axis by setting the Filter axis to X.
Clicking on Execute activates the Gaussian filter, and the result is shown on the display screen (See
Figure 15.10g, View A). Notice that features running parallel to the X-axis (e.g., the tips of each
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oval area) are washed out, while features running perpendicular to the X-axis are enhanced. This
image can be saved by clicking on Save and entering a file name.
Figure 15.10g Gaussian Highpass-Filtered Images
X Filter Axis
Y Filter Axis
+
A.
(Composite Image)
=
B.
C.
Next, reload the image and filter along the Y-axis by setting the Filter axis to Y. Clicking on
Execute activates the Gaussian filter, and the result is shown on the display screen (See Figure
15.10g, View B). Notice that features running parallel to the Y-axis (e.g., the sides of each oval area)
are washed out, while features running perpendicular to the Y-axis are enhanced. Again, this image
can be saved by clicking on Save and entering a file name.
To construct a composite image of the two Gaussian-filtered images, add them together. (This can
be accomplished by subtracting an inverted image from another image.) A composite of the two
filtered images is shown in Figure 15.10g, View C. This shows the domain boundaries clearly;
however, all Highpass filtered images have lost their height data, including the composite.
For more information regarding Highpass filtering, See Section 15.12.
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Geometric
15.11Geometric
The Geometric function is designed to perform unique Lowpass and Highpass filtering on image
files. What makes the Geometric function unique is that it sections images, then analyzes the
sectioned profiles either from above or below their surfaces.
In addition, the Geometric function also features a "roller" which allows filtering to be selectively
applied. The roller—which can also be thought of as the tip of profilometer—is represented on the
right side of the Display Monitor. By manipulating its shape with the mouse, its geometry may be
changed from a sharp ellipse, through a circle, to a blunt ellipse.
Figure 15.11a Altering an Ellipse Geometry
Roller Geometry
A “sharp” ellipse.
Roller Geometry
A “blunt” ellipse.
The Geometric command can perform Lowpass as well as Highpass filtering. The envelope of the
data corresponds to the position of the center point of an ellipsoid as the ellipsoid scans over, or
under, the sample surface. The envelope contains the low frequency components of the data. A
Lowpass filter is performed by replacing the data with the envelope. When used as a Highpass filter,
the data are replaced with the difference between data and the envelope. The size of the ellipsoid
defines the cutoff frequency of the filter.
15.11.1Geometric Panel
The Geometric panel is displayed allowing the display parameters to be adjusted to your
preference.
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Figure 15.11b Geometric Panel
Modify Menu
Geometric
Parameters and Buttons on the Geometric Panel
Execute—Applies the geometric filter based on the specified ellipse size.
Undo—Restores the original image.
Save—Allows the converted image to be saved to the disk.
Quit—Exits the operation.
Hor size
Defines the horizontal size of the elliptical roller used for finding the envelope as a percentage of
the image size.
Data scale
Controls the vertical range used to display the top view image. The units of this item vary
according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Ver size
Defines the vertical size of the elliptical roller used for finding the envelope as a percentage of the
image size.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
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Color offset
Changes the image color by shifting the range of the color table used to display the image.
15.11.2Geometric Command Display Monitor
The menu bar, image, and status bar are shown on the Display Monitor. The mouse is used to define
an arbitrary cross-section on the image as described below. At this point, the subtleties of the
command operation become important.
After the position of the cross-section has been defined, Section subcommand displays the crosssection data in two windows. The window labeled "Roller Geometry" shows the relationship
between the roller size and the section data. The window labeled Section shows the cross-section,
the envelope, and the difference between the two.
On the Section plot, the red trace is the section data. The white trace represents the envelope
created by the elliptical roller. The green trace is the data with the envelope removed (i.e., red trace
minus white trace). Note that the green trace is the result of the Highpass filter on the section data
and the white trace is the result of the Lowpass filter. The cursor in this window allows the data to
be scrolled by the ellipse in the Roller Geometry window.
Geometric Display Menu Bar Commands
Envelope
Defines whether the elliptical roll runs over the top of the data or the bottom of the data to produce
the Upper or Lower envelope, respectively. If Mean is selected, the average of the two envelopes is
used.
Averaging
Defines the spacing between the data points that are compared to the roller. If 1 Pixel is selected,
every data point in every line is compared. If 2 Pixels is selected, every other data point in every
other line is compared.
Default
Value depends on the number of data points in the image. If default is selected, every data point is
compared in 128 x 128 images; every other data point in every other line is compared in 256 x 256
images; and every fourth data point in every fourth line is compared in 512 x 512 images.
Filter
Defines whether a Low pass filter is performed by replacing the data with the envelope or High pass
filter in which the data are replaced with the difference between data and the envelope.
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Section
Draws the cross-section, envelope, and the difference between the two on the "Section" plot and
draws the cross section on the "Roller Geometry" plot.
Execute
Filters and redisplays the image based on the current subcommand settings.
Clear
Removes the section from the image and the corresponding windows from the Display Monitor
allowing a new cross-section to be defined.
Mouse Operation —Geometric
There are three main functions that the mouse performs in the Geometric command.
1. Define the cross section on the image.
•
The first click of the left mouse button when the cursor is on the image anchors a
"rubber band" line.
•
The second click fixes the direction of the line, and draws a cross-sectional profile in the
"Section" and "Roller Geometry" windows. The "Section" window also displays the line
envelope and the filtered-line data.
2. Scroll the section in the "Roller Geometry" window.
•
The cursor in the Section window can be grabbed and released with the mouse.
•
As the cursor is moved, the section in the "Roller Geometry" window scrolls past the
elliptical roller.
3. Change the size of the elliptical roller.
•
The size of the elliptical roller can be changed by clicking and dragging the elliptical
cursor in the "Roller Geometry" window. As the roller size changes, the envelope is
recalculated and the "Section" and the "Roller Geometry" windows are updated.
Note:
The geometric filter can be used as a Highpass as well as a Lowpass filter. The
cutoff frequency is essentially determined by the roller size. As the size
increases, the cutoff frequency decreases.
Example for Using the Geometric Command
The Geometric command can be very helpful in removing saddle-type bowing from an image. A
Highpass operation with relatively large ellipse works quite well.
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15.12Highpass
The Highpass command replaces each data point in the image with the weighted difference
between that data point and each of its eight neighbors. This operation is useful in highlighting
edges or areas with rapidly changing height in images. Note that it does not make any sense to
apply this filter more than once to an image.
15.12.1Highpass Panel
The Highpass panel allows the display parameters to be adjusted to your preferences.
Figure 15.12a Highpass Panel
Parameters and Buttons on the Highpass Panel
Re-execute—Applies the Highpass filter to the data again.
Undo—Restores the image to its original form.
Save—Allows the converted image to be saved.
Quit—Exits the operation.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the color table.
Color offset
Shifts the color table used to display the image.
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15.12.2Highpass Display Monitor
The Highpass filter is applied to the data as soon as the Highpass command is selected. (When the
image is displayed after selecting the command, it has already been filtered once.)
Example for Using the Highpass Command
The Highpass command can be used to bring out edges in images, since it essentially takes the
derivative of the image, thus highlighting areas with rapidly changing surface height.
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Invert
15.13Invert
The Invert command Inverts image data along the Z-axis, effectively turning valleys into mounds
and vice versa. The inverted image retains the symmetry and orientation of the original (it does not
produce a reverse or "mirrored" image).
Figure 15.13a Invert Command Illustrated
Inverted Image
2773-110
Original Image
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15.13.1Invert Panel
The Invert panel features a Re-execute button and allows display parameters to be adjusted.
Figure 15.13b Invert Panel
Parameters and Buttons on the Invert Panel
Re-execute—Runs the command again.
Undo—Restores the image to its original form.
Quit—Exits the operation.
Save—Allows the converted image to be saved to the disk.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
15.13.2Invert Command Display Monitor
The original image is displayed in its inverted form when Invert is first selected. Use the Reexecute button to restore the image to its original form.
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The Invert command can be used to add two images by subtracting an inverted version from an
original. If image A is to be added to image B, invert image B first, then use the Modify / Subtract
Images command to subtract image B from image A. (That is, A + B ≡ A – ( – B ) .)
15.14Lowpass
The Lowpass command replaces each data point in the image with the weighted average of the 3 x
3 cell of points surrounding and including the point. This command is faster than Fourier filtering,
and it can be applied to the same image a number of times.
15.14.1Lowpass Panel
The Lowpass panel allows display parameters to be adjusted to your preferences.
Figure 15.14a Lowpass Panel
Parameters and Buttons on the Lowpass Panel
Re-execute—Applies the Lowpass filter again.
Undo—Restores the image to its original form.
Auto Program—Allows the Lowpass command to be added to, or deleted from, the currently
selected Auto Program file (See Section 15.14.2).
Save—Allows the converted image to be saved to the disk.
Quit—Exits the operation.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
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Color contrast
Controls the contrast in the image by compressing or expanding the color table.
Color offset
Shifts the color table used to display the image.
15.14.2Lowpass Auto Program Edit Panel
Accesses the Auto Program Edit panel and allows the Lowpass command to be added to, or
deleted from, the currently selected Auto Program file.
Figure 15.14b Low Pass Auto Program Edit Panel
Buttons on the Lowpass Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Lowpass command is already
in the current Auto Program file, it retains its position in the file.
Delete—Removes the Lowpass command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
Note:
The Auto Program File command in the Utility menu must be used to select or
create an Auto Program file.
Note:
The Auto subcommand under the Browse command selects the files to be
processed and executes the current Auto Program file.
15.14.3Display Monitor
The Lowpass filter is applied to the data when the Lowpass command is selected from the Modify
menu. The first time the data displays, it has already been filtered once.
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Median
See also: Off-line / Modify menu: Median, Spectrum 2D, and Erase Scan Lines commands.
15.14.4Example
To remove high frequency noise from images, try several passes with the Lowpass filter. For images
with a large number of features across the screen (more than 10 to 20), the Lowpass filter attenuates
those features even on a single pass.
15.15Median
The Median command replaces each data point in the image with the median value of either a 3 x 3
or 5 x 5 cell of surrounding points. The data point forms the center of the cell and is included in the
calculation. The operation removes spot noise, and it can be applied repeatedly.
15.15.1Median Panel
The Median panel is displayed allowing the display parameters to be adjusted to your preferences.
Figure 15.15a Median Panel
Parameters and Buttons on the Median Panel
3x3—Executes the operation for the 3 x 3 cell.
5x5—Executes the operation for the 5 x 5 cell.
Undo—Restores the image to its original form.
Save—Allows the converted image to be saved to the disk.
Auto Program—Allows the Median command to be added to, or deleted from, the currently
selected Auto Program file (See Section 15.15.2.
Quit—Exits the operation.
Data scale
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Median
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by increasing or decreasing the contrast of colors in the Color
Table.
Color offset
Shifts the Color Table used to display the image.
15.15.2Median Auto Program Edit Panel
Accesses the Auto Program Edit panel and allows the Median command to be added to, or deleted
from, the currently selected Auto Program file.
Figure 15.15b Median Auto Program Edit Panel
Parameters and Buttons on the Median Auto Program Edit
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Median command is already
in the current Auto Program file, it retains its position in the file.
Delete—Removes the Median command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
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15.15.3Median Display Monitor
This operation is particularly useful in removing spot noise from images, but it can have a rather
degrading effect on the image resolution. For optimal effect, this operation should be performed
before the Lowpass operation if both are to be used.
See also: Off-line / Modify menu: Lowpass, Spectrum 2D, and Erase Scan Lines commands.
Example for Using the Median Command
This operation would be particularly useful on an image with randomly located sharp spike noise.
The Lowpass Filter would require too many applications to remove the noise. A 3x3 or 5x5
Median operation would eliminate the spikes.
15.16Parameter
The Parameter command allows the Z range and Scan size of a captured image to be rescaled
based on new sensitivity information.
15.16.1Parameter Panel
The Parameter panel allows the Z range and Scan size to be adjusted to change the dimensions of
a stored image.
Figure 15.16a Parameter Panel
Parameters and Button on the Parameter Panel
Quit—Performs and exits the operation.
Data Scale—Allows Z distance to be entered.
Scan Size—Allows scan size to be entered.
Hints for Optimizing the Parameter Command
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•
The numbers and units shown in the panel when the command is first called are the
values used to collect the data.
•
The operation of this command is different than changing the Z range in the Off-line /
View panels. Changing the Z range in the panels changes the range of the color bar
used to display the Z data; this command changes the numerical values of the Z range
and the Scan size.
•
An image captured with incorrect piezo sensitivities can be corrected with this
command.
•
The correction does not show until the image is redisplayed.
•
For offline profiler data files, an added feature allows you to change the data scale, in
terms of length, by entering a new Scan size.
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Plane Fit Auto
15.17Plane Fit Auto
The Plane Fit Auto command calculates a single polynomial of a selectable order for an image and
subtracts it from the image. The plane fit operation can be applied to either the X , Y or XY
direction.
15.17.1Fitted Polynomials
Refer to Table 15.17a to view the inherent software polynomials that calculate the best plane fit for
the images in the Plane Fit Auto function.
Table 15.17a Plane Fit Auto Equations
Order
0
1
2
Variable
Polynomial Equation
X
z=a
Y
z=a
XY
z=a
X
z = a + bx
Y
z = a + by
XY
z = a + bx + cy + dxy
X
z = a + bx + ex2
Y
z = a + cy + fy2
XY
z = a + bx + cy + dxy + ex2 + fy2+ gxy2 + hx2y +
ix2y2
X
z = a + bx + ex2 + jx3
Y
z = a + cy + fy2 + ky3
XY
z = a + bx + cy + dxy + ex2 + fy2+ gxy2 + hx2y +
ix2y2 + jx3 + ky3 + lxy3 + mx2y3 +nx3y3 +ox3y +
px3y2
3
Box cursors in the software functions, allow specific points to be used in the calculation of the
polynomial. The calculation uses the average value of the columns in the box to determine the
polynomial for X and the average across rows when Y is selected. One point is used for each
column, or row, in every box. The command fits a polynomial of the selected order to the points and
subtracts this same polynomial from each line in the image.
For further details on the Plane Fit Auto command, refer to the following sections:
•
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Planefit Auto Auto Program Edit Panel Section 15.17.3
•
Plane Fit Display Monitor Section 15.17.4
•
Procedure for Using Plane Fit Auto Section 15.17.5
15.17.2Plane Fit Auto Panel
The Plane Fit Auto panel allows the display parameters and the Planefit order to be adjusted to
your preferences.
Figure 15.17a Plane Fit Auto Panel
Parameters and Buttons on the Plane Fit Auto Panel
X—Applies the plane fit operation along the X axis.
Y—Applies the plane fit operation along the Y axis.
XY—Applies the plane fit operation along the X and Y axis
Undo—Restores the image to its original form.
Auto Program—Accesses the Auto Program Edit panel allowing the Plane Fit Auto command to
be added to, or deleted from, the currently selected Auto Program file (See Section 15.17.3).
Save—Allows the converted image to be saved to the disk.
Quit—Exits the operation.
Planefit order
Selects the order of the plane calculated and subtracted from the image.
Planefit Z offset
If Apply offsets is activated, the image is offset by the absolute value of Planefit Z offset in the
negative direction.
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Planefit Tilt
If Apply offsets is activated, the image is offset by the absolute value of Planefit Tilt in the
negative direction.
Color offset
Shifts the color table used to display the image.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color table.
Apply offsets
When box is checked, the Planefit Auto offsets are applied.
15.17.3Planefit Auto Auto Program Edit Panel
Accesses the Auto Program Edit panel allowing the Plane Fit Auto command to be added to, or
deleted from, the currently selected Auto Program file.
Figure 15.17b Plane Fit Auto Program Edit Panel
Parameters and Buttons on the Plane Fit Auto Program Edit
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
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Save—Saves selected measurements to the Auto Program file. If the Plane Fit Auto
command is already in the current Auto Program file, it retains its position in the file.
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Plane Fit Auto
Delete—Removes the Plane Fit Auto command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program
file.
Note:
The Auto Program File command in the Utility menu must be used to
select or create an Auto Program file.
The Auto subcommand under the Browse command selects the files to be processed and
executes the current Auto Program file.
15.17.4Plane Fit Display Monitor
The standard top view of the image plus the menu and status bars are shown on the Display
Monitor.
Plane Fit Menu Bar Commands
Mode
Selects the orientation of the plane fit.
•
X—Selects the horizontal direction for the polynomial curve-fit.
•
Y—Selects the vertical direction for the polynomial curve-fit.
Mouse Operations—X and Y subcommands.
•
1st click—fixes the corner of the box cursor. It "rubber bands" out as the cursor
is moved.
•
2nd click—fixes the position of the box cursor.
•
Subsequent clicks—Clicks inside of an existing box picks up the box so it can
be repositioned. Clicks outside of the box allow additional boxes to be drawn.
Cursor
Allows the mouse to be used to draw box cursors.
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Delete—Allows the mouse to remove individual box cursors.
•
Clear—Removes all of the cursors from the image.
Mouse Operations —Delete subcommand
•
Clicking on a box removes it.
Execute—Initiates the plane fit operation.
Undo—Restores the image to its original form.
See also: Off-line / Modify menu: Flatten, Geometric, and Plane Fit Manual commands.
15.17.5Procedure for Using Plane Fit Auto
Use Plane Fit (Auto or Manual) to correct the image distortion as follows:
1. Load and study a captured image before modifying it by clicking on View / Surface Plot (or
use the Surface Plot icon). Notice any the strong saddle appearances as shown in Figure
15.17c.
Figure 15.17c Saddle Image
Y
X
2. Click on the Modify / Plane Fit Manual command (Plane Fit Auto is similar). The Plane
Fit Manual panel appears on the Control Monitor; the top view image of the file is shown on
the Display Monitor. For this image, the Plane Fit order value should be set to 3.
3. Next, select the X cursor option on the display screen menu bar, then click on the image. A
movable, white X-axis line cursor is displayed. Position the X line cursor to intersect the
center of the bulge, between rows of pits. Click on the Execute button to plane fit the image
along its X axis. The image is now corrected along the X axis, but not along the Y axis.
4. Repeat the process for the Y axis: select the Y cursor option on the display screen menu bar,
then click on the image. A movable, white Y-axis line cursor is displayed. Position the Y line
cursor between rows of pits. Click on the Execute button to plane fit the image along its Y
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axis. The image is now fully plane fit along both X and Y axes, and appears as shown in
Figure 15.17d.
Figure 15.17d Plane Fit Image
5. Notice that the image’s distortion is removed almost entirely, reflecting a flat, planar profile.
Checking a section of the pits’ depth before and after Plane Fit reveals that the pit depth is
relatively unchanged before and after, even near the most severely rolled-off edges.
Now, experiment with this image to explore the range of Plane Fit capabilities. Try the following:
•
Change the Planefit order value to see its effects. Notice that there is a vast difference
between a value of 1, 2 or 3.
•
Try plane fitting in one axis (e.g., X), but not the other. This generally keeps whatever
errors are presently oriented along the unused axis. For example, the image can be
straightened along its Y axis, while leaving the X axis strongly bowed.
•
Try using a different Planefit order for the X and Y axis. (For example, a setting of 3 for
X, but a setting of 1 for Y.) This is similar to using one axis, but not the other.
•
Compare the effect of Plane Fit with Flatten. Notice that each command has a
significantly different impact upon this image; although, the difference is less noticeable
for some other types of images.
15.18 Plane Fit Manual
The Plane Fit Manual command allows either a vertical or horizontal line placed anywhere on the
image to specify the data used for calculating the best-fit polynomial. Furthermore, sections of the
line can be eliminated from the calculation and the order (first, second, or third) of the polynomial
can be specified.
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15.18.1Plane Fit Manual Panel
The Plane Fit Manual panel allows display parameters to be adjusted to your preferences.
Figure 15.18a Plane Fit Manual Panel
Parameters and Buttons on the Plane Fit Manual Panel
Execute—Initiates the command.
Undo—Restores the image to its original form.
Auto Program—Accesses the Auto Program Edit panel and places the Plane Fit Manual
functions on the Auto Program file (Section 15.18.2).
Save—Allows the converted image to be saved to the disk.
Quit—Exits the operation.
Planefit order
Specifies the order of the polynomial used to fit the cross section of the image. First, second, and
third-order polynomials can be selected.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
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15.18.2Planefit Auto Manual Program Edit Panel
Accesses the Auto Program Edit panel allowing the Plane Fit Manual command to be added to,
or deleted from, the currently selected Auto Program file.
Figure 15.18b Plane Fit Manual Auto Program Edit
Parameters and Buttons on the Plane Fit Manual Auto Program Edit
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Plane Fit Manual command
is already in the current Auto Program file, it retains its position in the file.
Delete—Removes the Plane Fit Manual command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
Note:
The Auto Program File command in the Utility menu must be used to select or
create an Auto Program file.
Note:
The Auto subcommand under the Browse command selects the files to be
processed and executes the current Auto Program file.
15.18.3Plane Fit Manual Display Monitor
The standard top view of the image plus the menu and status bars are shown on the Display
Monitor.
Plane Fit Manual Display Menu Bar
X
Selects the horizontal direction for the polynomial curve-fit and places a horizontal line to be
positioned by the mouse on the image.
Y
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Selects the vertical direction for the polynomial curve-fit and places a vertical line to be positioned
by the mouse on the image.
Move
Allows the mouse to be used to reposition the horizontal or vertical reference line.
Draw
Allows the mouse to be used to add segments to previously erased portions of either the horizontal
or vertical reference line.
Erase
Allows the mouse to be used to delete segments from either the horizontal or vertical reference line.
Clear
Removes the line from the image.
Execute
Initiates the plane fit operation.
Undo
Restores the image to its original form.
Mouse Operations—X, Y, Mover, Draw, Erase
X—Places a horizontal line on the image. The line position is tied to the mouse; therefore, the line
can be positioned by moving the mouse up and down.
•
1st click—drops the line.
Y—Places a vertical line on the image. The line position is tied to the mouse; therefore, the line can
be positioned by moving the mouse left and right.
•
1st click—drops the line.
•
1st click—picks up the line and ties the line position to the mouse movement.
•
2nd click—drops the line.
Move:
Draw—Places the cursor in the desired position
•
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1st click—begins drawing along the reference line. Moving the mouse adds a new line
segment where a portion of the reference line was previously deleted.
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2nd click—ends the new line segment.
Erase—Places the cursor in the desired position
•
1st click—begins erasing the previously drawn line. Moving the mouse deletes a
segment of the line.
•
2nd click—ends the erase process.
Hints for Optimizing the Mouse Operations
•
The status bar reports the line orientation, X for horizontal or Y for vertical, and the line
manipulation mode, Move, Erase, or Draw.
•
After a Clear or Undo operation, a new line can be placed on the image in the
orientation indicated in the status bar by clicking the left mouse button on the image.
•
The Move, Draw, and Erase operations can be initiated by clicking the left button of
the mouse in the image whenever the respective mode is highlighted in the status bar.
See also: Off-line / Modify menu: Plane Fit Auto, Geometric, Flatten commands.
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Resize
15.19Resize
The Resize command converts images collected with one number of data points, the Number of
samples parameter, to another number of data points. Images captured in the 512 x 512 or 256 x
256 format can be reduced to smaller formats. Images captured in the smaller 128 x 128 or 256 x
256 formats can be expanded through interpolation to larger formats.
15.19.1Resize Panel
The Resize panel is displayed allowing the display parameters to be adjusted to your preferences.
Figure 15.19a Resize Panel
Parameters and Buttons on the Resize Panel
Execute—Initiates the command.
Undo—Restores the image to its original form.
Quit—Exits the operation.
Save—Allows the converted image to be saved to the disk.
New size
Specifies the size of the image after the conversion operation.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA).
Color table
Selects the color table used to encode the Z information.
Color contrast
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Rotate
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
15.19.2Resize Display Monitor
Images can be stored in smaller sizes to reduce the disk space required to store the image. Resizing
to a larger format does not increase image resolution. The added pixels are interpolated from the
original data.
Example for Using the Resize Command
The Resize command can be handy for seeing how 512 x 512 images would appear if stored in
256 x 256 format. Use this to see if there is any perceptible loss of image quality.
15.20Rotate
Rotate serves to rotate an image in ninety degree increments. Occasionally, a scan is captured that
would be easier to analyze if it were oriented a different way (a scan of a penny, for example).
Rotate allows you to re-orient the scan. Note that the relative data remains unchanged, only the
orientation of the data is altered.
15.20.1Rotate Image Panel
The Rotate panel allows display parameters to be adjusted to your preferences.
Figure 15.20a Rotate Image Panel
Parameters and Buttons on the Rotate Image Panel
Data scale
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Rotate
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
Rotate image
Rotates the image in 90° increments, in either the positive or negative direction.
0°
270° (-90°)
90° (-270°)
180°
Execute—Initiates the Rotate image operation.
Undo—Restores the image to its original form.
Save—Allows the converted image to be saved to the disk.
Auto Program—Places the Auto Program Edit panel on the Control Monitor allowing the Rotate
command to be added to, or deleted from, the currently selected Auto Program file (SeeSection
15.20.2).
Quit—Exits the Rotate Image command.
15.20.2Rotate Image Auto Program Edit Panel
Places the Auto Program Edit panel on the Control Monitor allowing the Rotate command to be
added to, or deleted from, the currently selected Auto Program file.
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Figure 15.20b Rotate Image Auto Program Edit
Buttons on the Rotate Image Auto Program Edit
Select All—Selects all the measurements simultaneously.
Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Rotate command is already in
the current Auto Program file, it retains its position in the file.
Delete—Removes the Rotate command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
15.21Spectrum 2D
The Spectrum 2D (two-dimensional) function transforms images into a 2D fast Fourier transform
(FFT) plot, then allows you to selectively pass or remove specific frequencies from the image. After
selected frequencies are passed or removed, the image is reconstructed, yielding an improved
version. The Spectrum 2D function is extremely useful in removing electrical and acoustic noise
from images, and may also be used to isolate certain surface features (e.g., lathe lines on turned
surfaces, load marks on ground or polished surfaces, etc.)
Noise is removable using the Spectrum 2D function generally consists of two types: 1) high
frequency electrical noise (most visible at atomic resolution); 2) lower-frequency acoustic noise
from floor vibrations, air blowers, etc. The 2D spectral display is scaled according to the scan size
of the original image
15.21.1Spectrum 2D Procedures
Before beginning, it is advisable to make a backup copy of the original image file. The Spectrum
2D function is capable of making major changes to the image which, if saved, can destroy the
original data.
The Spectrum 2D command allows filtering of images in the frequency domain through the 2dimensional fast Fourier transform (FFT). The 2-D FFT (power spectrum) of the image is
calculated and displayed. Rectangular boxes representing either frequencies to pass (multiply by
1.0), passband, or frequencies to stop (multiply by 0.0), stopband, are selected. Finally, the inverse
transform is performed on the filtered transform data to reconstruct a new filtered image.
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15.21.2Spectrum 2D Pane
The Spectrum 2D panel allows display parameters to be adjusted to your preferences.
Figure 15.21a Spectrum 2D Panel
Parameters and Buttons on the Spectrum 2D Panel
Execute—Initiates the two-dimensional FFT calculation.
Undo—Restores the image to its original form.
Save—Allows the converted image to be saved to the disk.
Quit—Exits the operation.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
15.21.3Two-Dimensional FFT
When the two-dimensional FFT (2D FFT) is calculated and shown on the Display Monitor, a new
panel is displayed on the Control Monitor (See Figure 15.21b). It allows the filtering process to
continue by performing the inverse FFT after the desired passbands and stopbands have been
selected.
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Figure 15.21b Two-Dimensional FFT Spectrum 2D Panel
Parameters and Buttons on the 2D FFT Spectrum 2D Panel
Execute—Initiates the inverse FFT calculation.
Undo—Restores the image to its original form.
Quit—Exits the operation.
FFT attenuation band
Controls the pixel width of the attenuation band used to ramp the passband boxes to zero and the
stopband boxes to one. This enables the effect of stopbands and passbands to be either gently
"feathered" into the image spectral data (by using larger values, e.g., 16), or directly applied (by
using smaller values, e.g., 0).
Range or Settings:
•
0, 2 ,4 ,6 ,8 ,10 ,12 ,14 ,16
If FFT attenuation band values are set smaller than the stopband’s box size in pixels, the stopband
DOES NOT WORK. Stopbands that are to be applied directly to very small spectral "hot spots"
should have their FFT attenuation band values set at 0.
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the color table.
Color offset
Shifts the color table used to display the image.
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15.21.4Spectrum 2D Display Monitor
In addition to the menu and status bars, the power spectrum, a color bar which reflects the
amplitude of the power spectrum, and a measurement chart are shown on the Display Monitor. The
subcommands available in the menu bar of the Display Monitor allow you to select different areas
of the power spectrum. The status bar indicates which options are currently selected. The
measurement chart contains data from the power spectrum.
Spectrum 2D Display Menu Bar Commands
Cursor
Controls the mode of the cursor and mouse in the Display Monitor.
Range or Settings:
•
Stopband—Puts the mouse in the stopband mode. This allows placement of stopband
boxes which set the frequency data within the boxes to zero. The data outside of the
boxes is passed. Stopbands appear on the top view image as "X-ed rectangles.
•
Passband—Puts the mouse in the passband mode. This allows placement of passband
boxes which set the frequency data outside the boxes to zero. Data inside the boxes is
passed.
Mode
Controls the Mode of the Stopband and Passband boxes.
•
Add—Allows stopband or passband boxes to be placed on the image of the power
spectrum.
•
Delete—Allows stopband or passband boxes to be removed from the image of the
power spectrum.
•
Clear—Removes all of the stopband or passband boxes from the image of the power
spectrum.
Mouse operations—Add mode
•
1st click—Fixes the position of a corner of the box and allows the mouse to drag out the
desired shape of the box. A mirror image of the box is also drawn due to the symmetry
of the calculation.
•
2nd click—Fixes the position of the opposite corners of the boxes.
Mouse Operation—Delete mode
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•
Each click erases from the power spectrum display any passband or stopband boxes that
enclose the location where the click occurred. The complimentary box in the opposite
quadrant is also removed.
Mouse Operations—Any mode
•
Clicking the right mouse button completes the current operation and moves the cursor
to the Execute subcommand in the menu bar.
•
While the FFT transform is displayed, moving the cursor within the image and briefly
stopping displays the period, angle, amplitude, and spectral density at the cursor
position.
Execute
Initiates the calculation of the power spectrum, FFT, from the original image and the calculation of
the image, inverse FFT, from the modified power spectrum.
Undo
Restores the image to its original form.
Zoom
Provides three levels of magnification for the power spectrum
Range and Settings:
•
1 : 1—shows all of the available spectral frequencies
•
2 : 1—zooms the display 2:1, showing the lowest one-half of X and Y spectral
frequencies.
•
4 : 1—zooms the display 4:1, showing the lowest one-quarter of X and Y spectral
frequencies.
Hints for Optimizing the Spectrum 2D Command
•
It is possible to negate the effect of a small stopband box or passband box by using a
large value for the FFT attenuation parameter.
•
If any passband boxes exist on the display, then data outside the passband boxes is
deleted. Thus, it is superfluous to have a stopband box completely outside the confines
of a passband box.
•
Due to the symmetry of the transformed data about the line f x = – f y , all stopband and
passband boxes drawn actually produce two boxes on the display.
See also: Off-line/Modify menu: Lowpass and Highpass commands.
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15.21.5Example 1—Simplifying an Image
Regarding data contained within an image, more data is not always better. Sometimes it is desirable
to eliminate components of an image to better isolate and accentuate another component of direct
interest. The following example demonstrates how to utilize the Spectrum 2D function to simplify
an image for analysis. The image utilized here is of lathed plastic used in the manufacture of
contact lenses.
1. Load an image from the SPM/IMAGES DIRECTORY (or in the IMAGES folder on your installed
system). Examine the image using the Offline / Surface Plot function.
Supposing you want to make a general, cross-sectional inspection of the sample’s lathe lines, it may
prove helpful to remove spikes and smaller, jagged features on the surface. Notice the surface
topology may be analyzed in terms of two dominant influences: 1) lathe lines running parallel to
the image’s Y-axis; 2) a contiguous, jagged aspect to each lathe line (i.e., the lines themselves are
not smooth streaks, but present a jagged profile along their length). Since the parallel lathe lines
occur at longer wavelengths than the short-wavelength, jagged bumps and spikes, it is possible to
separate these components using 2D spectral analysis.
2. With the image selected, click on Offline / Modify / Spectrum 2D. The Spectrum 2D panel
appears on the Control Monitor; the image appears on the Display Monitor. Click on the
Execute button.
The 2D spectrum of the image appears on the Display Monitor as a clustering of data having a
narrow, horizontal band. This horizontal band reveals the prominence of the parallel lathe lines, and
the fact that they are distributed uniformly along the X-axis of the image.
As the cursor is moved through the 2D plot, the X period, Y period and R period values are
displayed in a box to the right of the plot. Moving the cursor through the data cluster reveals that
shorter wavelengths lie around the periphery of the plot, while longer wavelengths lie near the
plot’s center. Notice that the plot is bandwidth limited at its exact center; that is, nothing larger than
the scan size of the image may be plotted here. The centermost point of the plot (best viewed by
using the Zoom / 4:1 function on the Display Monitor) is labeled “DC.” This reference to “direct
current” is another way of saying that the longest wavelengths, when considered in terms of
alternating current, approach infinite periods such as observed in a fixed (DC) waveform.
Note:
The term “wavelength” as used throughout applies to actual surface features,
NOT the color of light used to represent those features.
The trick to using 2D spectral filtering lies in first identifying wavelength components of interest to
you. This requires some interpretive ability on your part and is perfected with practice. When the
sought-after component is identified, all that remains is to remove everything else.
One use of 2D spectral modification is in removing high frequency components, commonly
referred to as “noise.” (Whether the component is referred to as “noise,” or simply as “high
frequency features” of an image is analogous to whether or not to call unwanted plants “weeds.”)
High frequency components are rendered on images as finely spaced, jagged lines, spikes and fuzz.
Assuming you want to remove high frequency noise, they would seek to eliminate outer portions of
the plot. This is easily done with the
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Spectrum 2D function by enclosing the central cluster of the plot within a passband drawn on the
Display Monitor.
The objective here is to pass (allow) the central, longer wavelength portions of the plot, while
stopping (disallowing) the shorter wavelength components located around the periphery of the plot.
The X period and Y period of the enclosed area are displayed to the right as the boxes are drawn.
3. Click on Cursor / Passband, then draw a passband box around the central portion of the 2D
spectral plot. Click on Execute to reconstruct the image with the high frequency components
removed. To obtain the best view of the image, quit the 2D Spectrum panel, then click on
the View / Surface Plot function (or Surface Plot icon button). Changes to the image are
most obvious when viewing from an elevated angle.
When the image is reconstructed with its high frequency components removed, the most obvious
change is smoother, more contiguous image features. Jagged lines and spikes are reduced,
accentuating the longer wavelength features.
Note:
Filtering may also be accomplished by utilizing the Offline / Modify /
Lowpass filter, although without selective wavelength controls.
15.21.6Example 2—Highlighting Features Using 2D Spectrum Modification
Another use of the Spectrum 2D function is in highlighting certain surface features by filtering out
unwanted wavelengths. Continuing with the example of the lathed plastic, it is possible to isolate
and accentuate lathe lines. (This might prove useful to an analyst intending to examine how cutting
tool geometry imparts features to the surface of the plastic.) Conversely, it may also be used to
isolate and accentuate smaller surface features inherent within lathe lines, while reducing the
separation between lines.
1. Reload the image file used in Section 15.21.5; but do not save the previously filtered version
of the image. When the image is reloaded, select the Modify / Spectrum 2D function, then
click on the Execute button. As before, the 2D spectrum of the image is plotted. To isolate
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the lathe lines, draw a thin, horizontal passband box across the center of the plot (See Figure
15.21c).
Figure 15.21c Horizontal Passband Box Illustration
The intent is to pass most wavelengths inherent in the horizontally distributed lathe lines, while
stopping those wavelengths inherent in the vertically distributed features of each line (i.e., the
jagged contour running along each individual line). After the passband box is drawn, click on the
Execute button to reconstruct the image. Quit the Spectrum 2D panel, then use the View / Surface
Plot function to look closer at the reconstituted image.
The change in the image quickly becomes evident; lathe lines stand out more dramatically and have
been smoothed along their length. By analyzing a section across the lathe lines (Offline / Analyze /
Section), a cleaner profile of lathe lines in the plastic is obtained.
The vertically distributed features of the lathe lines may be similarly examined by filtering out the
horizontal components. By drawing a passband box vertically, it is possible to isolate and
accentuate the features running along each individual lathe line. (See Figure 15.21d)
Note:
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This type of analysis might prove helpful in a study of how tool chatter affects
the surface, without regard to tool geometry.
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Figure 15.21d Vertical Passband Box Illustration
15.21.7Example 3—Removing External Noise
In Example 1 above (See Section 15.21.5), high frequency surface noise was removed by drawing a
passband around the center spectral plot of the image. This type of noise tends to be evenly
distributed across the surface and is inherent to the surface itself. Another type of noise is externally
introduced, either due to electrical noise (especially during extremely high resolution, atomic
scans), or due to acoustic noise introduced from air blowers, loud sounds, etc. Distinquishing one
type of noise from another requires some experience. Here are a few guidelines.
•
Steady acoustic noise (such as from a constant pitch sound or moving air) and steady
electronic noise, introduce diagonal bands to the image. These bands run parallel and
are produced when the noise is introduced in sync with the scan. If the bands change
their angle of orientation when the Scan size or Scan rate is altered, they are probably
from this source. This type of noise can be easily removed from the image by using the
Spectrum 2D function.
•
Sporadic noise (such as from sudden, loud noises and/or powerful EMF spikes)
introduce isolated “noise lines” which run partially or completely across the image.
These may arise sporadically and without pattern. This type of noise cannot be removed
from the image using the Spectrum 2D function; however, another function (Modify /
Erase Scan Lines) easily removes this type of noise.
•
To remove the diagonal bands characteristic of steady acoustic and electronic noise
using the Spectrum 2D function, do the following:
1. Load the image, then click on the Modify / Spectrum 2D function. Click on the Execute
button to obtain the image’s 2D spectral plot. If the image is of a more or less isotropic
surface, search the spectral plot for bright “hot spots”—small islands of high spectral
concentration—near its center.
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Figure 15.21e Spectrum 2D Hot Spots
Spectral “Hot Spots”
Note:
Click on the Zoom / 4:1 function to obtain a closer view of the "hot spots."
Depending upon the distribution and orientation of the noise bands, the hot spots should be
distributed at the same angle in the spectral plot as they are on the image. There may also exist
other spectral hot spots which are actually part of the surface features; however, these are usually
distributed at some other orientation. If the surface is anisotropic and includes some type of
banding features naturally, isolating the noise bands proves more difficult, especially if they run
parallel to the noise bands.
2. Verify that the FFT attenuation band value is set to 0. When the hot spots are located, draw
a stopband box around them, then click on the Execute button to reconstruct the image. The
image should now appear without the noise bands. If noise bands are still present, click on
the Undo option and try again by stopbanding different hot spots.
15.22Subtract Images
The Subtract Images command enables data from one image to be subtracted from another. This
proves most useful when comparing two or more images from a surface to determine changes over
time, or to compare completely different images. The Subtract Images command cannot be
directly applied to images having different pixel sizes (Number of samples value). For example, a
256 x 256 pixel image cannot be directly subtracted from a 512 x 512 image. Images may be
resized, however, using the Modify / Resize command, then subtracted.
Figure 15.22a diagrams an image subtraction and its effects. Surface 2, when subtracted from
surface 3, yields surface 1 (“3” - “2” = “1”). Conversely, surface 1 plus surface 2 yields surface 3
(“1” + “2” = “3”).
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Figure 15.22a Effects of Image Subtraction
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2
3
15.22.1Subtract Images Panel
Access the Subtract Images panel by clicking on the Modify / Subtract Images command. The
command assumes that one of the two images (the minuend) is already selected when choosing this
command. The panel requests a file to subtract (the subtrahend). Enter the file to subtract in the
Image to sub field, then clicks on Execute. The result is shown on the Display Monitor.
Figure 15.22b Subtract Image Panel
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Parameters and Buttons on the Subtract Image Panel
Select File—Presents a panel for rapid selection of the file to be subtracted (subtrahend). To select
a file, highlight the file name with the mouse, then click on Ok.
Execute—Subtracts the selected file from the currently loaded file. The resulting image is
displayed.
Undo—Undoes the Subtract Images command. The originally loaded file (minuend) is restored to
the Display Monitor.
Auto Program—Accesses the Auto Program Edit panel on the Control Monitor, allowing the
Subtract Images command to be added to, or deleted from, the currently selected Auto Program
file.
Save—Saves the subtracted image to the disk.
Quit—Exits the Subtract Images panel.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The units
of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
Image to sub
The disk drive, directory and file being subtracted (subtrahend) away from the currently loaded file.
Enter this filename, automatically, by using the Select File field .
15.23Zoom
The Zoom command expands selected areas of a captured image to fill the display screen. Selected
features of captured images can be magnified using the Zoom command; however, they do not gain
increased resolution beyond the original image. Image data is interpolated when magnifying to a
larger size.
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Figure 15.23a Zoom Command Illustrated
15.23.1Zoom Panel
The Zoom panel controls the operation of the Zoom command (See Figure 15.23b).
Figure 15.23b Zoom Panel
Parameters and Buttons on the Zoom Panel
Zoom & Plane Fit—Expands the region defined by the Zoom box to the size of the regular top
view display and includes a plane fit operation as described under the Plane Fit Auto command.
Zoom Only—Expands the region defined by the Zoom box to the size of the regular top view
display.
Execute—Performs the selected zoom operation.
Undo—Restores the image to its original form.
Auto Program—Allows the Zoom command to be added to, or deleted from, the currently
selected Auto Program file (See Section 15.23.2).
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Save—Allows the converted image to be saved to the disk.
Modify Menu
Zoom
Quit—Exits the operation.
Data scale
Controls the vertical range of the image corresponding to the full extent of the color table. The
units of this item vary according to the type of image (e.g., nm, nA, etc.).
Color table
Selects the color table used to encode the Z information.
Color contrast
Controls the contrast in the image by compressing or expanding the Color Table.
Color offset
Shifts the color table used to display the image.
15.23.2Zoom Auto Program Edit Panel
The Auto Program Edit panel allows the Zoom command to be added to, or deleted from,
the currently selected Auto Program file. The Auto Program File command in the Utility
menu must be used to select, or create, an Auto Program file. The Auto subcommand under
the Browse command (File/Browse) selects the files to be processed and executes the current
Auto Program file.
Figure 15.23c Zoom Auto Program Edit Panel
Buttons on the Zoom Auto Program Edit Panel
Select All—Selects all the measurements simultaneously.
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Clear All—Clears all the measurements simultaneously.
Note—Allows you to insert a command note in the Auto Program file.
Save—Saves selected measurements to the Auto Program file. If the Zoom command is already in
the current Auto Program file, it retains its position in the file.
Delete—Removes the Zoom command from the Auto Program file.
Quit—Exits the Auto Program Edit mode without making changes to the Auto Program file.
15.23.3Zoom Display Monitor
The standard top view of the selected image, the Zoom menu and status bars appear on the Display
Monitor.
Zoom Display Menu Bar Commands
Zoom & Plane Fit
This selection followed by Execute expands the region defined by the Zoom box to the size of the
regular top view display and includes a plane fit operation as described under the Plane Fit Auto
command.
Zoom Only
This selection followed by Execute expands the region defined by the Zoom box to the size of the
regular top view display.
Clear
Removes the Zoom box from the image.
Execute
Begins the selected operation.
Undo
Restores the image to its original form.
Mouse Operations
•
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Zoom
•
Successive clicks of the left button, toggles the Zoom box between expansion mode
(where movement of the mouse causes expansion/contraction of the box) and
translation mode (where movement of the mouse causes translation of the box).
•
Click of the right button, Freezes the Zoom box and transfers the cursor to the menu bar
allowing the desired subcommand to be initiated with a click of either mouse button.
See also: Zoom operations in the Real-time / Image Mode.
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Chapter 16 Utility Menu
The Utility menu includes basic commands to Print, Export, Import, alter the image for saving,
and access the Auto Program and Auto Result files.
This chapter includes the following Utility commands:
•
Overview Section 16.1
•
Print Section 16.2
•
Auto Program File Section 16.3
•
Recipe Auto Program File Section 16.4
•
Auto Result File Section 16.5
•
Autocalibration Section 16.6
•
TIFF Export Section 16.7
•
TIFF Import Section 16.8
•
ASCII Export Section 16.9
•
ASCII Import Section 16.10
•
JPEG Export Section 16.11
•
Color Table Section 16.13
16.1 Overview
16.1.1 Utility Menu
Select Off-line/Utility to access the Utility menu (See Figure 16.1a).
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Print
Figure 16.1a Utility Menu
16.2 Print
The Print command outputs the Display Monitor screen data to the printer based on the selected
options in the Print panel.
Computers running NanoScope software under Windows NT™ use the NT print panels and drivers.
You can specify the NT printer, set the number of copies, and set the collation (if available). For
more information on the NT print panels, consult the appropriate Windows NT documentation.
Select the Print command to open the Print panel (See Figure 16.2a).
Figure 16.2a Print Panel
The Print panel shown on the Control Monitor allows you to select various printer options.
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16.3 Auto Program File
The Auto Program File command contains several subcommands for creating and manipulating
Auto Program files. Auto Program files are programmed from the individual commands. As the
command is selected it can be inserted into the file. Auto Program files are run with the Auto
subcommand in the Browse command. Up to 32 images can be processed with the Top View,
Section, Bearing, Roughness, Zoom, Lowpass, Flatten Auto, Planefit Auto, and Print
commands. Each command can be used once per file. The order of the commands depends on the
order in which they are selected and edited into the auto program file.
The Auto Program file creates an output file that can be viewed and printed from the Auto Result
File command.
The Auto Program File panel allows you to select an auto program file or create a new one.
Buttons allow for reviewing and printing auto program files (See Figure 16.3a).
Figure 16.3a Auto Program File List Panel
Parameters and Buttons on the Auto Program File List
•
File name and List—Lists the selected auto program file. The Up and Down arrow keys
and the Page Up and Page Down keys help move through the list.
Ok—Exits the Auto Program command.
Cancel—Exits the Auto Program File List panel without executing the file.
Edit—Accesses the selected file name in the SPM/PAR Directory. The panel opens the list of
parameters to view a specified line, cut, copy, paste, save changes and create a new file (i.e., Save
As) (See Figure 16.3b).
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Recipe Auto Program File
Figure 16.3b Auto Program Edit Panel
Print—Prints the auto program file to a selectable printer and port.
New—Creates a new auto program file.
Delete—Removes the currently selected file from the list.
Procedures for Running the Auto Program File
General procedures for creating and running an Auto Program file are as follows:
1. Create the file in the Auto Program File command.
2.
Select auto programs in the Auto Program panel and enter them into the Auto Program
file from each Off-line/Menu/Command.
3. Select the image files, and run the Auto Program file from the Browse command.
Note: The program files are automatically stored in the C:\AUTO\PROGRAM
directory with a .PRG extension.
Note: The result files are automatically stored in the C:\AUTO\RESULT directory with
a .RES extension.
See also: Off-line/View menu: Top View command. Off-line/Analyze menu: Section, Bearing,
and Roughness commands. Off-line/Modify menu: Zoom, Lowpass, Flatten Auto and Planefit
Auto commands. Off-line/Utility menu: Print and Auto Result File commands.
16.4 Recipe Auto Program File
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Recipe Auto Program File
The Recipe Auto Program File command displays, prints, and deletes output files created in
Automation Recipe Programming. For complete details on recipe programming, see the
Automation Supplement manual, V. 5.13.
Select the Recipe Auto Program File command to access the Auto Program File List. When
accessing this panel after creating a recipe, the recipe file being configured should appear in the File
Name field as *.prg (i.e. your selected filename with the extension prg) (See Figure 16.4a).
Figure 16.4a Recipe Auto Program File List
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16.5 Auto Result File
The Auto Result File command displays, prints, and deletes the output files created by previously
run auto program files.
The Auto Result File panel on the Control Monitor allows you to select an output file and review
the contents, print the file, or delete the file (See Figure 16.5a).
Figure 16.5a Auto Result File List
Buttons on the Auto Result File List Panel
•
View—Lists the selected auto result file.
•
Print—Prints the auto result file to a selectable printer and port.
•
Delete—Removes the currently selected file from the list.
•
Ok—Exits the Auto Result File command.
16.6 Autocalibration
Because of the nonlinear electrical response of piezo materials, the electrical signals applied to
SPM scanners must be carefully calibrated to ensure accuracy. Use the Autocalibration command
to calibrate microscope scanners. It is based upon carefully measuring images of calibration
standards captured with the Capture Calibration command in the Real-time/Capture menu.
Sensitivities of the piezo to applied voltages and the derating of piezo sensitivity at low voltages are
determined. The calibration of coupling parameters that maintain accuracy with rotated scans and
account for changes in scan rate are also determined. This command automatically changes the
parameter values stored in the parameter file (e.g. AFMJ.PAR) in the C:\EQUIP directory.
16.6.1 Autocalibration Control Monitor
The Autocalibration commands include:
•
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Calibrate individual parameters.
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Autocalibration
•
Sequentially calibrate the sensitivities and deratings .
•
Calibrate the couplings.
•
Calculate all calibration parameters.
For details on the command options, see Section 16.6.2.
16.6.2 The Autocalibration Panel
The user must initialize the microscope or a warning appears
(See Figure 16.6a).
Figure 16.6a Autocalibration Warning
In the Off-line/Modify menu, select Autocalibration to access the X-Y Piezo Calibration panel
(See Figure 16.6b).
Figure 16.6b X-Y Piezo Calibration Panel
Parameters and Buttons in the X-Y Piezo Calibration Panel
Filename Prefix
Defines the prefix of the name of the calibration images. The default name is the prefix of the
currently selected file, but the name used to capture the images with the Capture/Capture
Calibration command must be used.
Ssx & Dsx & Cxy & Dxy
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Autocalibration
Selects the proper images to calibrate the sensitivity of the piezo and derating of the piezo
sensitivity in the X direction when the slow waveform is applied. The X Y coupling parameters are
also calibrated with this selection.
Ssy & Dsy & Cyx & Dyx
Selects the proper images to calibrate the sensitivity of the piezo and derating of the piezo
sensitivity in the Y direction when the slow waveform is applied. The X Y coupling parameters are
also calibrated with this selection.
Sfx & Dfx
Selects the proper images to calibrate the sensitivity of the piezo and derating of the piezo
sensitivity in the X direction when the fast waveform is applied.
Cxx & Dxx
Selects the proper images to calibrate the coupling between the slow X and fast X waveforms and
the derating of the coupling between the slow X and fast X waveforms.
Sfy & Dfy
Selects the proper images to calibrate the sensitivity of the piezo and derating of the piezo
sensitivity in the Y direction when the fast waveform is applied.
Cyy & Dyy
Selects the proper images to calibrate the coupling between the slow Y and fast Y waveforms and
the derating of the coupling between the slow Y and fast Y waveforms.
CALIBRATE—Begins the calibration operation. The image for the selected calibration operation is
shown on the Display Monitor, and a panel appears on the Control Monitor for each parameter
being calibrated.
QUIT—Exits the Autocalibrate command and saves any changes made to the calibration
parameters of the selected head or scanner.
Hints for Optimizing the Autocalibration Command
•
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After the horizontal or vertical line is drawn on the image between features of known
spacing, a best guess of the distance based on the current value of the parameter
displays in the panel. If the best guess is incorrect, enter a new value based on the
known spacing of the features in the sample.
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Autocalibration
•
The value of the parameter for the head or scannerupdates automatically in the
corresponding parameter file.
•
When drawing lines, it is best to span as many features as possible. This has the effect of
averaging values across the scan, thus improving accuracy.
•
DO NOT draw lines between different portions of features (such as the top of one
feature to the bottom of another, or the left side of one feature to the right side of
another). It is easier to calculate distances between features based upon their even,
regular spacing.
•
Images are made using a DI-supplied calibration standard (e.g., 10-micron standard)
with the Capture Calibration command. At least one-third of the captured images
appear distorted (that is, elongated and/or angled) due to the unusual manner in which
the image is scanned.
Note: Lines should be drawn on the image and distances entered without regard to this
distortion. Do not “compensate” for any perceived angularity.
•
The file name specified must match the file name used to capture the calibration images
using the Capture Calibration command.
•
For best results, the features on the calibration standard should be parallel to the scan
directions.
•
The Autocalibrate command automatically enters the new calibration parameters in the
parameter file (e.g., afmj.par) for the scanner used to collect the calibration images.
These numbers should be transferred to other parameter files that rely on the same
scanner.
16.6.3 Autocalibration Display Monitor
For each parameter to be calibrated, a top view of the selected image appears on the Display
Monitor. The direction “Draw a horizontal (or vertical) line” also appears. The following mouse
operations should be used to draw a line between two features which are separated by a known
distance.
Mouse Operations:
•
1st click, left button: Fixes one end of the reference line at the cursor position and
extends from that position allowing either a horizontal or vertical line to be drawn.
•
2nd click, left button: Fixes the other end of the reference line at the current position.
Note: The images used to calibrate a particular head or scanner must have been
captured with the head or scanner to be calibrated.
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TIFF Export
See also: Real-time/Capture menu: Capture Calibration command. Real-time/Microscope
menu: Select and Calibrate commands.
16.7 TIFF Export
The TIFF Export command creates and stores a TIFF (Tagged Image File Format) file. A TIFF file
is one of the industry-standard formats for stored image files. If a given file contains image-type
data, then the file can be converted into a TIFF file. The file can then be integrated into documents
with an application program capable of reading the TIFF format.
The following TIFF Export panel is displayed when the file selected is an image file.
Figure 16.7a Tiff Export Panel
Parameters and Buttons in the Tiff Export Panel
•
OK—Executes the conversion operation.
•
CANCEL—Exits the TIFF Export command.
Source
Selects the source of the file for the conversion.
Range & Settings:
•
Screen—Results in a bit mapped version of the screen.
•
File—Produces a top view of the image from the raw image data.
Background
Selects the color of the background in the converted file.
Range & Settings:
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TIFF Import
•
Normal—Black.
•
Reverse—White.
Destination DOS Directory
Specify the directory that the file is to be stored in.
Destination file
The name of the file to be created must be entered.
See also: Off-line/Utility menu: Data Export, Print, and Printer File commands.
16.8 TIFF Import
The TIFF Import command displays a TIFF (Tagged Image File Format) file list. The Print and
Printer File commands can then be used to print or create a file for subsequent printing.To import
the file, it must be in the TIFF 5.0 format, and it may not be compressed.
The TIFF Import panel specifies the TIFF file to display (See Figure 16.8a).
Figure 16.8a TIFF Import Panel
Parameters and Buttons on the Tiff Import Input Panel
•
OK—Executes the conversion operation.
•
CANCEL—Exits the TIFF Import command.
File Name—Specifies the source TIFF file to be displayed.
Directories—Directory containing the TIFF file to be displayed.
Rev. A
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Utility Menu
ASCII Export
Hints for Optimizing the Tiff Import Command
•
You can import TIFF versions of NanoScope screen or image files. You can import files
from any other source as long as the files are uncompressed and in the TIFF 5.0 format.
•
You can display NanoScope screen or image files that have been converted to TIFF
format with the TIFF Export command and modified with desk-top publishing
programs to be displayed within the NanoScope program. You can then print the
modified files.
•
Photostyler™ and Adobe Photoshop™ have been used to modify NanoScope TIFF
files.
•
Images that have been reduced in size are displayed at the center of the Display
Monitor. The program does not display imported images that are larger than the screen.
See also: Off-line/Utility menu: TIFF Export, Print, and Printer File commands.
16.9 ASCII Export
The ASCII Export command converts the selected binary file to an ASCII file in either Raw Units
or nanometers.
In the Off-line/Utility menu, select ASCII Export to access the Ascii Export panel (See Figure
16.9a).
Figure 16.9a ASCII Export Panel
Parameters and Buttons on the ASCII Export Panel
Format
Determines how exported data will be separated. You should set this according to the requirements
of third-party software accepting the data.
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Command Reference Manual
Rev. A
Utility Menu
ASCII Import
•
ASCII—Each data value is separated with a space.
•
Spreadsheet—Each data value is separated with a comma.
Save Header
Specifies whether the file header is retained or not.
•
Yes—Retains the file header.
•
No—Removes the file header. File consists only of raw data.
Number of Columns
Specifies the number of columns applied to the exported data.
Destination DOS Directory
Specifies the directory where the converted file is to be stored.
Destination File
Specifies the name of the destination ASCII file.
Note: The converted file contains the same ASCII header as the binary file.
Note: Specified Destination DOS Directory should be appended with a slash (for
example, B:\).
See also: Off-line/Utility menu: ASCII Import command.
16.10ASCII Import
The ASCII Import command converts a previously converted ASCII file back to the binary format.
The ASCII Import panel displays on the Control Monitor
(See Figure 16.10a).
Rev. A
Command Reference Manual
531
Utility Menu
JPEG Export
Figure 16.10a ASCII Import Panel
Source DOS directory
Specifies the name of the DOS directory containing the ASCII file to be imported.
Source File
Specifies the name of the ASCII file to be imported.
Destination DOS directory
The name of the DOS directory where the binary data file is to be stored.
Destination file
The name of the binary data file to be created.
Hints for Optimizing the ASCII Import Command
•
The full menu bar is not available when an ASCII file (or any other non-NanoScope
image file) is selected.
•
Most of the commands in the Off-line menus are designed specifically for image data
and do not operate on anything but image data.
See also: Off-line/Utility menu: ASCII Export command.
16.11JPEG Export
The JPEG Export utility command allows the storing of file images or screen shots as a jpeg
compressed file. The compression reduces the TIFF (.tiff) or bitmap (.bmp) image file by 20
percent (a typical image file of 34 KB reduces
to ~27 KB). View the JPEG images in your browser, save in any file or print.
532
Command Reference Manual
Rev. A
Utility Menu
Profile Import
In the Utility menu, access the JPEG Export panel (See Figure 16.11a).
Figure 16.11a JPEG Export Panel
Parameters and Buttons on the JPEG Export Panel
Source—Designates the image source or location of specified image.
•
Screen: Choose this option when image is displayed on the screen.
•
File: Choose this option if image is saved in a file.
Background—Designates background display of specified image.
•
Normal: Choose this option for image to display as shown on screen or in file.
•
Reverse: Choose this option for image to display reverse of image shown on the screen
or in the file (i.e., For image displayed with black background, exported image displays
with white background).
Destination DOS Directory—Designates destination to a DOS directory.
Destination File—Designates image destination to a file.
Ok—Executes the JPEG Export command.
Cancel—Exits the JPEG Export command without saving.
16.12Profile Import
The Profile Import command is for profiler-enabled systems (i.e. the Vx Profiler microscope). The
Profiler microscopes are systems configured with a profilometer (scanning hardware) in addition to
NanoScope SPMs. Although profilometers cannot reconfigure at the same magnitude as an SPM,
they quickly and conveniently scan much larger areas. The profilometer files (here after referred to
as profiles) include 128, 256 or 512 consecutive lines of data. When configuring the set of profiles,
that data matches to essentially create the entire image file as one file. For complete details on
profiling, see Support Note 256, Profile Analysis and Support Note 299, 3D Profiling.
Rev. A
Command Reference Manual
533
Utility Menu
Profile Import
The Utility/Profile Import command is designed to import profiles then convert them to
NanoScope III files, as shown in Figure 16.12a. The files may be viewed, modified and analyzed in
exactly the same manner as a microscope image.
Figure 16.12a Profile Import Example
You should bear in mind that profile scans are usually conducted at much coarser raster spacings
than SPM scans; therefore, much of the data must be interpolated to generate the more finely
resolved NanoScope III file.
16.12.1Profile Import Panel
Clicking on the Utility/Profile Import command accesses the Profile Import panel (See Figure
16.12b).
Figure 16.12b Profile Import Panel
Parameters and Buttons on the Profile Import Panel
534
•
Source DOS Directory—The directory from which the profiles are imported.
•
Source File—The name of the profilometry file to be converted. The file name entered
should include the base name characters, plus the data files’ extension (usually ".PIP").
Command Reference Manual
Rev. A
•
Destination DOS Directory—The Directory to which the converted file(s) are
sent.
•
Destination File—New name to be assigned to the converted file.
Utility Menu
Color Table
Note: The program automatically sorts through all the profiles to construct the
single NanoScope file.
•
Ok—Button to accept configured parameters.
•
Cancel—Button to exit Profile Import panel without saving changes.
16.13Color Table
The Color Table command allows the operator to modify existing color tables or to create
new color tables. The red, green, blue, or gray intensities at a given Z position can be
adjusted individually with this command.
16.13.1 The Color Table Panel
A list of the available color tables appears on the Control Monitor. The color composition
of the listed color tables can be viewed and modified. A modified table can be saved or the
modification can be ignored by quitting without saving. The desired color table can be
selected with the mouse.
Figure 16.13a Color Table Panel
Rev. A
Command Reference Manual
535
Utility Menu
Color Table
16.13.2 Color Table Display Monitor
In addition to the status and menu bars, a plot of the color intensity versus the length of the color
bar (Z height), as well as a plot of the image, is shown on the Display Monitor. The intensities of
the individual color components can be adjusted on the plot to create a color table that accentuates
the important information in the image. The sum of the individual color intensities is displayed in a
color bar across the bottom of the intensity plot. The image is also shown so the color table can be
tailored to highlight features in a particular image.
Color Table Menu Bar Commands
Edit mode
•
Move—Allows points placed on the plot to be rearranged.
•
Add—Allows new points to be added to the plot.
•
Delete—Allows points to be removed from the plot.
Color Select
Selects the color for the editing mode.
Range & Settings:
•
Red, Green, Blue, Gray
Color Restore
Returns the selected curve to its original shape.
Range & Settings:
•
Red, Green, Blue
Mouse Operations—All edit modes:
•
Clicking the right button from the intensity plot moves the cursor to the menu bar.
Mouse Operations—Move mode:
•
1st click, left button—positioning the cursor on an existing point and clicking the left
button picks up the point and tie its position to the mouse movement.
•
2nd click, left button—drops the point. The system automatically recalculates and
draws the best curve-fit through the existing points.
Mouse Operations—Add mode:
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Command Reference Manual
Rev. A
Utility Menu
Color Table
•
each click of the left button places a new point at the cursor position. The system
calculates and draws the best curve-fit through the points as each point is placed.
Mouse Operations—Delete mode:
•
Positioning the cursor over an existing point and clicking the left button removes the
point from the plot.
•
The system automatically recalculates and draws the best curve-fit through the existing
points.
Hints for Optimizing the Color Table Command
•
The sum of the individual color intensities is shown in the color bar under the intensity
plot. This is the same color bar that is displayed along side of the image in the Realtime Image Mode and the Off-line View modes.
•
You cannot modify Color tables 0 through 3. They are not included in the list.
•
The system calculates the best curve-fit through the points as they are placed and draws
the curve through the points. It updates the color bar along the bottom of the plot and the
color of the image as each change is made to the plot.
•
Either mouse button can be used to select subcommands.
•
After an item is selected from a pull-down menu, the cursor moves to the center of the
intensity plot.
See also: Off-line/View: Color table, Color offset, and Color contrast items.
Procedures for the Color Table Command
Suppose you have an image with features that are not highlighted well by any of the existing color
tables. The Color table command can be used to create a new color table while viewing the image.
The new color table can be adjusted until the image highlights are improved.
Rev. A
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537
Utility Menu
Color Table
538
Command Reference Manual
Rev. A
Appendix A Tip Selection Guide
Refer to the following sections and tables in determining tip selection:
1.1
•
Deflection Mode Cantilevers: Section 1.1
•
Cantilever Data Specifications: Section 1.2
Deflection Mode Cantilevers
The following tables provide information to help guide your selection of cantilever tips. Table 1.2a,
Table 1.2b, and Table 1.2c list deflection mode cantilevers for use with standard atomic force
microscopes (AFM), MultiMode™ AFMs (MMAFM), lateral force microscopes (LFM),
BioScope™ and Dimension™ Series SPMs.
1.2
Cantilever Data Specifications
Table 1.2d and Table 1.2e lists Cantilever specifications called, "Diving Board Data in Air". Table
1.2f and Table 1.2g lists Cantilever specifications called, "Diving Board Data in Water".
The Digital Instruments Web Site at http://www.di.com/ maintains a NanoProbe™ Tip Guide on the
Products page. Reference the NanoProbe Tip Guide for the latest information on cantilevers
available from Digital Instruments.
Rev. A (variable)
Document Title (variable, update from TP)
539
Tip Selection Guide
Cantilever Data Specifications
Table 1.2a
Model Number
NP
SP-S
DNP
NDP-S
NP-STT
Description
Standard Silicon
Nitride
Oxide
Sharpened
Silicon Nitride
Standard Silicon
Nitride
Oxide
Sharpened Silicon Nitride
Oxide
Sharpened
Silicon Nitride Oriented Twin Tip
Force or Spring
Constant(s) - Typical
0.01-0.6 N/m
0.01-0.6 N/m
0.01-0.6 N/m
0.01-0.6 N/m
0.01-0.6 N/m
Resonant Frequency Typical
5 - 50 KHz
5 - 50 KHz
5 - 50 KHz
5 - 50 KHz
5 - 50 KHz
Nominal Tip Radius of
Curvature
20 - 40 nm
20 - 40 nm
20 - 40 nm
20 - 40 nm
20 - 40 nm
Nominal Tip Height
3µm
3µm
3µm
3µm
2nd tip height
clearance ≈ 100 nm
(for single tip image)
Tip 1/2 Cone Angle
35°
35°
35°
35°
35°
Reflective Coating
Gold
Gold
Gold
Gold
Gold
Cantilever Length
120 or 200µm
120 or 200µm
120 or 200µm
120 or 200µm
120 or 200µm
Cantilever Width per
Leg-Perpendicular
15 - 40 µm
15 - 40 µm
15 - 40 µm
15 - 40 µm
15 - 40 µm
Cantilever Thickness
0.4 - 0.6 µm
0.4 - 0.6 µm
0.4 - 0.6 µm
0.4 - 0.6 µm
0.4 - 0.6 µm
Cantilever Configuration
V-Frame
V-Frame
V-Frame
V-Frame
V-Frame
Used in Microscope
Models
540
AFM, LFM,
MMAFM
AFM, LFM,
MMAFM
BioScope,
Dimension
Document Title (variable, update from TP)
BioScope,
Dimension
AFM, LFM,
MMAFM,
BioScope,
Dimension
Rev. A (variable)
Tip Selection Guide
Cantilever Data Specifications
Table 1.2b
Model Number
AFTS
ESP(W)
FESP(W)
TESP(W)
MESP(W)
Description
Experimental
Fluid Taping Sampler
Contact Etched
Silicon
Fore Modulation
Etched Silicon
TappingMode
Etched Silicon
Magnetic Resonant Etched Silicon
Force or Spring Constant(s)
0.004 - 0.125 N/m
(soft)
0.02 - 0.1 N/m
1 - 5 N/m
20 - 100 N/m
1 - 5 N/m
Resonant Frequency
Various (includes
90 Lever types)
6 - 20 Khz
6 - 100 KHz
200 - 400 KHz
60 - 100 KHz
Nominal Tip Radius
of Curvature
5 - 40 nm
5 - 20 nm
5 - 10 nm
5 - 10 nm
25 - 50 nm
Nominal Tip Height
3 µm
10 - 15 µm
10 - 15 µm
10 - 15 µm
10 - 15 µm
Tip 1/2 Cone Angle
35º
18º side, 25 º front,
10 º back
18º side, 25 º front,
10 º back
18º side, 25 º front,
10 º back
18º side, 25 º front,
10 º back
Reflective Coating
Gold
Aluminum
Uncoated
Uncoated
Gold
Cantilever Length
Various (includes
90 lever types,
35 -195 µm
450 µm
225 µm
125 µm
225 µm
Cantilever Width per
Leg-Perpendicular
3 - 20 µm
30 - 40 µm
30 µm
30 - 40 µm
30 µm
Cantilever Thickness
0.4 - 0.6 µm
1 - 3 µm
2 - 3 µm
3.5 - 5.0 µm
2 - 3 µm
Cantilever
Configuration
Various (V-Frame,
Single Beam,
Torsional)
Single Beam
Single Beam
Single Beam
Single Beam
Used in Microscope
Models
Rev. A (variable)
AFM, LFM,
MMAFM,
BioScope,
Dimension
AFM, LFM,
MMAFM,
BioScope,
Dimension
MMAFM,
Dimension
MMAFM,
BioScope,
Dimension
Document Title (variable, update from TP)
MMAFM,
Dimension
541
Tip Selection Guide
Cantilever Data Specifications
Table 1.2c
Model Number
MESP-LM(W)
MESP-LC(W)
FIBLADE
FISPIKE
Description
Low Moment
Magnetic Force
Etched Silicon
Low Coercivity Magnetic
Force Etched Silicon
TappyMode™ Etched
Silicon FIB Blade
TappingMode™
Etched Silicon FIB
Spike
Force or Spring Constant(s)
1 - 5 N/m
1 - 5 N/m
20 - 100 N/m
20 - 100 N/m
Resonant Frequency
60 - 100 KHz
60 - 100 KHz
200 - 400 KHz
200 - 400 KHz
Nominal Tip Radius
of Curvature
20 - 40 nm
20 - 40 nm
75 - 100 nm
75 - 100 nm
Nominal Tip Height
10 - 15 µm
10 - 15 µm
Tip 10 - 15 µm,
End Blade 1.5 - 2 µm
Tip 10 - 15 µm, End
Spike 1.5 - 2 µm
Tip 1/2 Cone Angle
18º side, 25º front,
10 º back
18º front to back (asymmetric) 3º side to side, 18º
front to back
(asymmetric)
3º on spike
Reflective Coating
Gold
Gold
Uncoated
Uncoated
Cantilever Length
225 µm
225 µm
125 µm
125 µm
Cantilever Width per
Leg-Perpendicular
30 µm
30 µm
30 - 40 µm
30 - 40 µm
Cantilever Thickness
2 - 3 µm
2 - 3 µm
3.5 - 5 µm
3.5 - 5 µm
Cantilever
Configuration
Single Beam
Single Beam
Single Beam
Single Beam
Used in Microscope
Models
MMAFM,
Dimension
MMAFM, Dimension
MMAFM,
BioScope
Dimension
MMAFM,
BioScope,
Dimension
Refer to the following key in reading Table 1.2d, Table 1.2e, and Table 1.2f:
542
Document Title (variable, update from TP)
Rev. A (variable)
Tip Selection Guide
Cantilever Data Specifications
All data is in MKS units:
Length, RMS, FitRMS - (m)
ResFreq, ResFreqError - (Hz)
NoiseAtRes - (mHz 1/2)
ThermalK - (N/m)
Sens - (V/m)
Table 1.2d Diving Board Data in Air
Width
Nominal
(µm) Length (µm)
Length
Air RMS
AirFit RMS
AirRes
Freq
AirFreq
Error
12
18
2.260e-05 8.28e-12
3.36e-11
643671
46
16
25
2.950e-05 2.64e-11
5.33e-11
379264
46
20
34
3.910e-05 5.50e-11
6.93e-11
233771
39
20
46
5140e-05
8.76e-11
9.83e-11
143835
40
20
57
6.270e-05 1.34e-10
1.32e-10
98994
43
20
72
7.780e-05 1.60e-10
1.59e-10
64759
18
20
98
1.047e-04 2.44e-10
2.32e-10
37821
21
20
124
1.306e-04 3.56e-04
3.26e-10
24466
30
20
156
1.645e-04 5.10e-10
4.49e-10
15984
18
20
194
2.030e-04 6.96e-10
6.03e-10
10472
28
Table 1.2e Diving Board Data in Air continued...
Width
Nominal
(µm) Length (µm)
AirQ
AirQ-Error
AirNoise-as
Res
AirThermalk
AirSens
12
18
138.6
3.48
4.87e-13
3.6122
3.032e+08
16
25
76.7
1.70
6.10e-13
1.4316
1.827e+08
20
34
57.9
1.28
8.71e-13
0.8476
2.927e+08
20
46
36.4
1.53
1.25e-12
0.4213
2.578e+08
20
57
27.7
1.33
1.77e-12
0.2321
1.889e-08
20
72
20.2
0.29
2.09e-12
0.1613
1.768e-08
20
98
12.5
0.21
3.24e-12
0.0754
1.523e-08
Rev. A (variable)
Document Title (variable, update from TP)
543
Tip Selection Guide
Cantilever Data Specifications
Width
Nominal
(µm) Length (µm)
AirQ
AirQ-Error
AirNoise-as
Res
AirThermalk
AirSens
20
124
9.3
0.23
4.96e-12
0.0383
1.196e-08
20
156
7.2
0.12
7.46e-12
0.0202
9.844e-07
20
194
4.5
0.17
9.95e-12
0.0112
7.193e-07
Table 1.2f Diving Board Data in Water
Nominal Length
Length
Water-RMS
WaterFit WaterRes
Water Freq Error Water Q
RMS
Freq
18
2.260e-05 3.42e-11
4.29e-11
261823
245
3.5
25
2.950e-05 4.81e-11
4.94e-11
141771
191
3.2
34
3.910e-05 6.31e-11
6.62e-11
77155
151
2.6
46
5.140e-05 9.94e-11
9.73e-11
43730
179
2.2
57
6.270e-05 1.42e-10
1.25e-10
29199
133
1.7
72
7.780e-05 1.78e-10
1.70e-10
18252
114
1.5
98
1.047e-04 2.65e-10
2.52e-10
10207
118
1.0
124
1.306e-04 3.62e-10
3.23e-10
6214
170
0.8
156
1.645e-04 4.98e-10
4.62e-10
3660
145
0.6
194
2.030e-04 6.99e-10
5.88e-10
1961
273
0.5
Table 1.2g Diving Board Data in Water continued...
Nominal Length
544
Length
WaterQ
Error
Water
Noise at
Res
WaterThermal
k
Water Sens
18
2.260e-05 0.022
1.27e-13
2.2075
1.290e+08
25
2.950e-05 0.028
1.86e-13
1.6651
2.190e+08
34
3.910e-05 0.028
3.09e-13
0.9296
3.663e+08
46
5.140e-05 0.035
5.51e-13
0.4300
3.162e+08
57
6.270e-05 0.028
7.66e-13
0.2598
2.739e+08
72
7.780e-05 0.028
1.21e-12
0.1410
1.952e+08
98
1.047e-04 0.025
1.98e-12
0.0640
1.642e+08
Document Title (variable, update from TP)
Rev. A (variable)
Tip Selection Guide
Cantilever Data Specifications
Nominal Length
Length
WaterQ
Error
Water
Noise at
Res
WaterThermal
k
Water Sens
124
1.306e-04 0.034
2.89e-12
0.0391
1.401e+08
156
1.645e-04 0.036
4.71e-12
0.0191
1.092e+08
194
2.030e-04 0.085
7.72e-12
0.0118
1.001e+08
Rev. A (variable)
Document Title (variable, update from TP)
545
Tip Selection Guide
Cantilever Data Specifications
546
Document Title (variable, update from TP)
Rev. A (variable)
Appendix B File Formats
This appendix details file format information for NanoScope software Version 5.12. Customers often
upgrade to newer software, therefore, this appendix also includes compatibility and conversion information
for earlier software versions (i.e., 4.3 - 5.12).
Note: For details on earlier file format information, refer to Support Note 330 File Formats, which
includes versions 3.0 - 5.12.
This appendix includes the following information:
•
Overview: Section B.1 on Page 547
•
File Compatibility: Section B.2 on Page 548
•
Data File Organization: Section B.3 on Page 549
•
Converting Data: Section B.4 on Page 553
•
Converting Raw Data [Versions 4.3 - 5.12]: Section B.5 on Page 555
•
General Format for a CIAO Parameter Objects: Section B.6 on Page 558
WARNING:
Before attempting data extraction on files, always make backup copies of the originals.
If files become damaged due to loss of data, they may be irrecoverable.
AVERTISSEMENT: Toujours effectuer une copie des fichiers originaux avant d’en extraire des
données. Si la perte de données endommageait des fichiers, ceux-ci pourraient
être irrécupérables.
WARNUNG: Machen Sie bitte immer Backup-Files Ihrer Originaldaten, ehe Sie versuchen,
Datenfiles selbst zu bearbeiten. Wenn Files durch Datenverlust beschädigt werden,
könnten die Daten unwiederbringlich verloren sein.
B.1
Overview
File formats in the NanoScope software are of concern to users for at least two reasons:
•
Rev. C
Compatibility—Processing older files using newer NanoScope software
Command Reference Manual
547
File Formats
File Compatibility
•
Converting file data—Exporting data into third-party applications such as spreadsheets and
statistical packages to evaluate data in unique ways.
The ability to extract data from files is for the purpose of applying third-party software packages and
analyze data in other formats. This may include displaying data in spreadsheets (e.g., Excel), statistical
packages and expert systems. Typically, you extract data from the image files, then filter the data according
to the requirements of their software. This section discusses how data files are organized to assist in
extracting the file data.
B.2
File Compatibility
Digital Instruments, Veeco Metrology Group updates file formatting to ensure cross-compatibility of files
between different versions of the NanoScope software. There are some exceptions. For example, version 3.0
electrochemical files are not compatible with version 4.23 or 5.12. Table 2.2a summarizes file compatibility
by file type and NanoScope software version.
Note: Versions 3.0 and 4.1 software versions were written using DOS commands.
Table 2.2a File Compatibility
3.0 - 4.1 Versions of
Software
4.3 - 5.12 Versions of
Software
All data files
Files captured in this software may be open in the
same or newer versions of
software only.
Files captured in this software may be open in this or
newer versions of software
only.
Electrochemical (EC) Data
Not compatible with other
versions.
Not compatible with other
versions.
File Type
Almost all software can open earlier versions of software. Conversely, image files captured and saved on an
earlier version of software should run on any later version of software. However, once the files are open and
re-saved on a newer version, they are no longer usable in older versions of software.For this reason, use
Table 2.2a as a guide to make backup copies of the files before saving them into the newer software
version.
WARNING:
IMPORTANT! To analyze old files using newer software versions and then to return
the files to the older software version, make backup copies of the files with the old
software BEFORE loading them into the newer software.
AVERTISSEMENT: IMPORTANT! Les Utilisateurs désirant analyser d’anciens fichiers en utilisant
une nouvelle version de logiciel, et désirant également les retraiter par la suite
dans l’ancienne version, doivent effectuer des copies (backup) de leurs fichiers
AVANT de les charger dans la nouvelle version.
WARNUNG: WICHTIG! Anwender, die alte Datenfiles mit neuerer Software analysieren und später
die Files wieder mit der alten Software einlesen wollen, sollten Backup-Kopien ihrer
Files mit der alten Softwareversion machen, EHE sie diese mit der neuen Software
laden.
File Formats
Data File Organization
B.3
Data File Organization
Images which are captured by the user are immediately stored in the NanoScope’s capture directory as binary
files. Depending upon the Number of samples taken per scan line (128, 256 or 512), files will vary in size
from about 41K to 532K per image. Multiple images may be two or three times larger. Regardless of size, all
files include: 1) a “header,” containing various parameter settings used during the capture of the original
image, a Ctrl-Z character to signal the end of the header, and “padding,” comprised of random data; and, 2)
data, stored two bytes (216) per pixel (2’s complement).
File organization includes the following:
B.3.1
•
Header Files: Section B.3.1 on Page 549
•
Parameters: Section B.3.2 on Page 551
•
Control-Z (Ctrl-Z) Character: Section B.3.3 on Page 552
•
Padding: Section B.3.4 on Page 552
•
Raw Data: Section B.3.5 on Page 552
Header Files
The first portion of every image file contains a header file. The header file tells the software about the data
which follows. The header file size depends upon the number of parameters used at the time that data is
captured. Also, depending upon the type of file saved and the version of NanoScope software used when
saving the file, the header may contain more than 2,000 parameters.
Each header is divided into separate lists (beginning with the characters \*). Users typically, manipulate only
a few of the parameters for each application. See the Parameters section for a few of the most important
parameters and characters.
The header is also crucial to interpreting the data. The header information provides crucial parameter and
setting information for converting ASCII file data. The end of the header file reveals where the actual data
begins. Figure B.3a shows the size and relationship of data file formats commonly found in software versions
prior to version 5.12.
Figure B.3a Single and Two-Image Data File Structure
Parameters
Padding data
Image data
“Ctrl-Z”
Header (4K or 8K)
SINGLE IMAGE DATA FILE
Padding data
Parameters (Image #1)
“Ctrl-Z”
Parameters (Image #2)
Header (4K or 8K)
Image data (#1)
TWO-IMAGE DATA FILE
Two-Image Files
Image data (#2)
File Formats
Data File Organization
Files with two or more images contain separate parameter lists and image data. Figure B.3b illustrates data
organization of a two-image files.
Figure B.3b Example of a Two-image Header File
\*File list
\Version: 0x04 100201
\Date: 05:32:38 PM Wed Apr
19 1995
\Data length: 8192
1
Image file
parameters
(common to
both images)
\*NCAFM image list
\Data offset: 8192
\Date length: 131072
2
Image #1
parameters
\*NCAFM image list
\Data offset: 139264
\Date length: 131072
3
Image #2
parameters
4
Control-Z
5
Padding data
(random)
6
Image #1 data
7
Image #2 data
\*NCAFM list
\*Controller list
D3F87F311F35E22C
E9F55A8D9AE4B74
E9F55A8D6B4B7D11
1F35E22C297BA3F8
9AE4B74D3F87F31
297BA3F81F35E22C
1F35E22C297BA3F8
9AE4B74D3F87F31
E9F55A8D6B4B7D11
1F35E22C297BA3F8
D3F87F311F35E22C
E9F55A8D9AE4B74
9AE4B74D3F87F31
Analysis of the Two-Image Header File
•
Section 1 includes parameters common to both images (only a few are shown here). The
parameters are included within various lists beginning with \*. The type of image and the
NanoScope software version also affect the lists and parameters. For example, the \Data
File Formats
Data File Organization
length parameter in the \*File list of this section is generally either 4K, 8K or (rarely) 12K
and includes the entire header.
B.3.2
•
Section 2 contains parameters which are specific to image #1. In this example, only two are
shown; however, there may be dozens. The \Data offset parameter is very important because
it indicates the Nth byte where data for image #1 begins (here, it is 8192). The \Data length
parameter indicates the length of data for image #1 in bytes (here, it is 131072). By adding
the \Data offset and \Data length together, the data offset for image #2 is found.
•
Section 3 contains parameters which are specific to image #2. The \Data offset parameter
here indicates that data for image #2 begins at byte 139264 and is 131072 bytes in length.
•
Section 4 is a Ctrl-Z character which denotes the end of parameter lists.
•
Section 5 contains random padding data. This is added to the header to make it a
predetermined length (specified in the first \Data length parameter at the start of the header)
and is used to read the file into NanoScope software. Image files containing multiple images
will have less padding than files containing only one image.
•
Section 6 contains image data specific to image #1. In this example, it begins at byte 8192
and is 131072 bytes in length. Depending upon whether the image was captured at 128, 256
or 512 samples per scan line, the length of data will vary.
•
Section 7 contains image data specific to image #2. In this example, it begins at byte 139264
and is 131072 bytes in length. The last data value in this section of the file denotes the end of
the file.
Parameters
\* File List—Denotes the beginning of several parameter lists. For example, \*Image list, \*Microscope list,
etc. Each image in the file has its own image list (e.g., \*AFM image list).
\Version—Describes the version of software currently in use.
\Data length—Length of header, Ctrl-Z character and padding in bytes.
\Samples/line—Number of pixels per scan line. This is the same as the Number of samples value on the
Real-time / Scan Controls panel.
\Scan size—Height and width of the square scan area in nanometers.
\Z atten—Z-axis attenuation value. The total Z-axis range of data may be calculated from this number as
follows:
Z atten value
Total Z-axis range = ------------------------------- ⋅ 440
65,536
The Z attenuation value is divided by 65,536 (steps of resolution for Z scanner crystal), then multiplied times
the Z-axis scanner crystal’s voltage range (± 220 Volts) to yield the total Z-axis range of data.
\Data offset—Nth byte in the image file where raw data commences. This value is typically 8000 for version
2.3 and later NanoScope software.
File Formats
Data File Organization
\Data length—Length of raw data stream in bytes. Divide this value by 2 to obtain the total number of
pixels in the image.
\Z scale—Factor used to convert data to indicated units. E.g., for \Z scale: 20000 nm,
pixel value
data (nm) = -------------------------- ⋅ 20000
65,536
\Z sensitivity—Z-axis scanner sensitivity in nanometers per volt. To obtain the maximum Z-axis scanner
travel, multiply this value by 440.
\Z scale magnify—Multiplier applied to Z-axis height data to render a NanoScope image on the display
screen. For example, a value of 1.0 would render data on the display screen at the same scale as actual
features. This value is generally of no use outside the NanoScope software environment.
B.3.3
Control-Z (Ctrl-Z) Character
A Ctrl-Z (ASCII value 26) character is used to show the end of the parameter lists and the beginning of
padding. Users wishing to organize their data for spreadsheets may search for this character to locate the end
of the parameter lists.
B.3.4
Padding
After the Ctrl-Z character, a quantity of random data—”padding”—is inserted into the file to make the
header a fixed length specified in the first \Data length parameter at the start of the header. (Before version
2.3 NanoScope software, the header length was typically 4K.) Padding contains no information, and exists
only to accommodate various lengths of parameter lists for different image files.
B.3.5
Raw Data
Comprising the bulk of every image file is the raw data of the image itself. At the time of Capture, image
data is stored 16-bits per pixel in the capture directory on the computer’s hard drive. (Data is stored in 2’s
complement, LSB). The 16 bits accorded each pixel allows a 32K Z-axis resolution.Whenever image files
are exported using the Utility / ASCII Export command, data is presented in a converted form.
File Formats
Converting Data
B.4
Converting Data
Refer to the following sections for preparing file data:
B.4.1
•
Preparing Data for Spreadsheets (Summary): Section B.4.1 on Page 553
•
Preparing Data for Image Processing (Summary): Section B.4.2 on Page 553
•
Converting Data Files into ASCII: Section B.4.3 on Page 553
Preparing Data for Spreadsheets (Summary)
You may load data files into third-party, spreadsheet software (e.g., Excel, Igor Pro, Mathematica, etc.). To
convert data in to a spreadsheet program, complete the following:
1. Convert the data into ASCII format—for example, by using the Off-line / Utility / ASCII Export
command. (NOTE: This may increase the size of the file substantially.)
2. Load the file into a suitable editor where it may be prepared for third-party applications.
3. Locate and note important header parameters.
4. Locate the start of raw data, then separate raw data from the remainder of the file.
5. Load raw data into the third-party software program, then condition data according to important
header parameters and requirements of third-party software application(s).
6. Analyze or modify conditioned data as required.
B.4.2
Preparing Data for Image Processing (Summary)
You may convert data files into third-party, image processing software (e.g., Photoshop, CorelDraw). To
convert the data into image processing software, complete the following:
1. Convert the data into TIFF format—for example, by using the Off-line / Utility / TIFF Export
command. TIFF screen files include everything shown on the Display Monitor, along with the
actual image.
2. Load the TIFF file directly into the third-party, image processing software.
3. Process the image file. This may include cropping the image from the rest of the display screen,
filtering the image, adjusting contrast, brightness, color, etc.
B.4.3
Converting Data Files into ASCII
When NanoScope image files are captured and stored, they are in 2-byte, binary (LSB—least significant bit)
form. Although some programs import raw, binary files, most users find they must convert the files into
ASCII form first to use them. The converted file allows users to read the header information directly and
works with many third-party programs requiring ASCII formatting. (Some users prefer to download the
File Formats
Converting Data
original, raw binary files into their third-party program, while using their ASCII version of the file as a guide
map.)
Note: Depending upon the software version used during capture of the image data, the actual file
format and file size varies. Headers may include more than 2000 parameters, followed by CtrlZ, data padding, and raw data (i.e., for NanoScope software prior to 5.x).
Convert captured data in to ASCII format by using the Offline > Utility menu command To convert files,
complete the following:
1. Make a backup copy of the file to be converted and save it to a safeguarded archive.
2. Select the file to be converted from the Offline file list by clicking on it in the file menu box.
3. Click on the Utility > ASCII Export command. The ASCII Export dialog box displays.
Figure B.4a ASCII Export Dialog Box
4. Set options on the ASCII Export dialog box according to the type of conversion required.
5. In the Format options, select ASCII to save the data in plain text.
a. See also, Section B.4.1 for converting data to a spreadsheet.
6. In the Save Header options, select Yes to display the header file information.
Note: In order to convert the ASCII data from binary (LSB) data to useful values (Phase, Frequency,
Current, etc.), you must save the information in the header.
7. In the Image Units options, select Raw Units for displaying binary data numeric form.
a. For data to be converted to nanometers, select the nm option.
8. Select a Number of Columns for displaying the data (e.g., 512 displays all data in one column, 8
displays data in 8 columns).
Note: Data displays in rows from left to right. Total data points correspond to the number of data
points per line selected in your parameter settings (i.e, 128, 256 or 512 data points per line) and
the number of lines per scan (i.e., 128, 256 or 512 lines).
9. The Destination DOS Directory is the output directory to archive the ASCII file (e.g,
SimpleText, NotePad).
10. Name the Destination File for retrieval and include a file extension (e.g., test.doc).
File Formats
Converting Raw Data [Versions 4.3 - 5.12]
B.5
Converting Raw Data [Versions 4.3 - 5.12]
Before bringing raw data into a third-party application, the user can first convert the data.
Note: In Version 5.12, the Utility menu includes Export commands (i.e., ASCII Export, JPEG
Export, TIFF Export) to convert the raw data in to nanometers and pixel data.
Usually, this means simply multiplying all values by a constant to convert them into common measuring
units. Once converted, the data becomes more meaningful to analyze.
By using parameters in the header, it is possible to convert and analyze data for various purposes. Users need
only understand how parameters are related to extract the maximum amount of information from their files.
In the raw data information, each numeric value is relative horizontally and vertically.
B.5.1
Control Input and Output (CAIO)
As of the release of Version 4.3, the NanoScope uses a format to simplify the interaction between the software
and the microscope electronics. The new format, or Z scales, use a new format called CIAO (Control Input
and Output). This comes from the complete redesign of the internal code of the software that makes it easier
for Digital Instruments to describe to the software the microscope electronics capabilities.
B.5.2
Calculating Height Data Values
In order to calculate height data, it must be converted from LSB form by using the Z scale value. Recall that
raw data recorded from each scan is scaled to the maximum resolution of the Z-axis scanner crystal (±
32,768). Whether features are related in terms of “height” or “depth” is irrelevant. What matters most is that
features be accurately represented in meaningful units.
To convert raw data into metric units, use the following relation:
( data point value ) ( Z scale ) ( Sens. Z scan )
Z height = ---------------------------------------------------------------------------------------------------2 16
Note: The Z scale value in a parameter list includes the value and the units (for example, \Z scale:
1.57541 µm). In this example, the units of measure are in microns (µm).
Calculating X and Y Pixel Width from Raw Data
To obtain the X axis pixel width, use the following relation:
Scan size
X = -------------------------------------------( Samples/line ) – 1
To obtain the Y axis pixel width, use the following relation:
Scan size
Y = -----------------------------------------------------( Number of Lines ) – 1
B.5.3
Calculating Raw Data Values
File Formats
Converting Raw Data [Versions 4.3 - 5.12]
This section details equations to calculate values for analysis (e.g., height data, phase, etc.).
Note:
Only one set of values may be found for each Z scale. That is, the Zscale units are different for
each type of image (Hz for Frequency, or nA for Current), and the Zscale for a Height image
(for example) may not be used to find values for Phase.
For software version 4.2x, the equations for converting the LSB data points into various values are as
follows:
Height
data point
Height = ------------------------ × Z scale height value
65536
Phase:
Data point
180°
Phase =  ------------------------- × Z scale phase ×  ---------------
 65536
 65536 
Frequency
 25e 6
Data point
-
Frequency =  ------------------------- × Z scale freq ×  --------- 65536 
 2 32 
Potential
Data point
2 ⋅ In 2 max
Potential =  ------------------------- × Z scale pot ×  ----------------------------
 65536 
 65536 
Current (nA)
Data point
2 ⋅ In 1 max
Current =  ------------------------- × Z scale amplitude ×  ---------------------------- × In sensitivity
 65536 
 65536 
Amplitude (nm)
Data point
2 ⋅ In 1 max
In sensitivity
Amplitude =  ------------------------- × Z scale amplitude ×  ---------------------------- ×  ------------------------------
 65536 
 65536   Detect sens 
For LFM Aux data, the torsional deflection of the cantilever in volts (or whatever else, depending, on the
definition of the input sensitivity) can be calculated by applying the following formula to each point in the
data file:
Data point
2 ⋅ In 2 max
Deflection =  ------------------------- × Z scale Aux A ×  ---------------------------- × In sensitivity Aux A
 65536 
 65536 
In this formula, the parameter Aux A and In sensitivity aux A can be substituted with the corresponding
parameters for Aux B, Aux C, and Aux D. In order to get the In sensitivity aux (A,B,C,D) parameters to
appear in the header, you must select Microscope / Calibrate / Detector, highlight the parameter, and then
press enter.
B.5.4
Force Curve File Format Information
The following Force Curve File Format information is for force curves captured with software version 4.3 5.12.
File Formats
Converting Raw Data [Versions 4.3 - 5.12]
When exporting the force curve in ASCII format, it is recommended that the file be exported twice, once with
the header and once without. The one without the header should be exported in Spreadsheet format (this
makes it comma delineated).
When you import the file without the header into MS Excel each value should come up as a separate entry. In
your file, there should be 1024 values, the first 512 are the retract curve and the next are the extend curve. The
scan size in Z is calculated by looking at the Scan size value in the Force cal. list in the header and the Z
sensitivity in the Microscope list. You then do the following calculation.
In the header, find the line "\*Force cal. list” and "\Scan Size". The Scan Size is in 16-bit
values. Convert to nm by:
Z Scan size ⋅ Sens. Z scan
Size (nm) = ---------------------------------------------------------------------( Number of Data points – 1 )
In some cases it may be necessary to calculate the force to determine the vertical (Deflection) axis of a curve.
The following calculation may be used, as long as the microscope is in ContactMode and Input Atten is set
to 1x.
Value (nm) = data point (LSB) ⋅ Sens. Defl. ⋅ Z scale
Note that the above equation only works when calculating force vs. separation. When calculating force vs. Z,
Z magnify force must be removed from the calculation. When calculating deflection vs. Z, the spring constant
must also be removed from the calculation.
When interested only in the deflection of the curve, the calculation below will suffice. Divide by the number
of samples to get the Z step per data point. This value is also found in the "\*Force Image list" near
the header end.
Force Data Organization
In later versions, the data changes and is opposite from previous versions of software. For example, the first
n samples of data includes the Extend curve from the closest aproach to the farthest distance. The next n
samples are the Retract curve data from the closest to farthest distance.
Converting the Force Data to Volts [4.3 - 5.12]
The actual data is again in 16-bit values for the input signal. Convert to volts by:
Value (LSB)
Value (V) = ------------------------------ ⋅ (Full Volt Range)
32768
The volt range is 20V for Contact Mode when In Atten is 8X. Its 2.5 for 1X In Atten. If you are in
TappingMode looking at deflection (normal mode using Nanoindentation), it's 5V (see the table below).
Microscope Mode
InAtten / Deflection
Volt Range
Contact mode
8X
10V
Contact mode
1X
1.25V
TappingMode
(normal mode)
5V
V of detector
The Detector Sensitivity is under the "\AFM list", as "\Detect Sens." in units of ------------------------------- .
nm of Z
File Formats
General Format for a CIAO Parameter Objects
B.5.5
Force Volume File Format Information
The curve data should be right after the image height data. The curve data is the data collected at each Z
point as in a normal single force curve file. If deflection, volts is given by:
Data point (LSB)
10(V)
Deflection (V) = ------------------------------------------ ⋅ --------------------------------------------32768(LSB)
Input atten (1 or 8)
Using the value for deflection in volts (V), it is possible to calculate the deflection in nanometers (nm) using
the equation:
Deflection (V)
Defl (nm) = ------------------------------------------------------------------Detector Sensitivity (V/nm)
The way force volume works, it gets tricky to figure which image pixel corresponds to which force curve
data. The data and force curve are in the same order: bottom to top, left to right. There are three pixel
numbers that are needed:
•
Under “\*[NC]AFM” image list, “\Samps/line” gives the number of image pixels/
line, 128, 256 or 512
•
Under “\*Force” image list, “\Samps/line: n m”, where n is the number of
samples per Force line.
•
Under “\*Force cal.” list is the “\force/line: n m” parameter, where n is the
number of force curves / image line.
Consider a square block of pixels that represents one force curve. Including the data in the bottom left
corner, a simple analysis allows the identification of which pixel corresponds to which curve. If the number
of samples/force line is 128 and the number of force curves/image data is 32 and there are 256 pixels/image
data, then there is a curve every 256/32 or 8 pixels. The next image data line with force curves is the 8th one
from that line. Since there are 128 samples/force curve, they are 256 pixels or 512 bytes each. Thus, the first
image pixel matches the first force curve, the 8th pixel matches the second force curve 512 bytes later, etc.
Even though there are 3 data displays during Force Volume (Image, Force plot and FV Image), the FV
image is NOT SAVED. It is calculated during both the Real-time and Off-line display from the force curve
data as described above.
B.6
General Format for a CIAO Parameter Objects
In the file header some parameters start with '\@' instead of simply '\'. This is an indication to the software
that the data that follows is intended for one of our new CIAO parameter objects. After the '@', you might see
a number followed by a colon before the label. This number is what we call a "group number" and can
generally be ignored.
Further, after the label and its colon, you will see a single definition character of 'V', 'C', or 'S'.
•
V means Value – a parameter that contains a double and a unit of measure, and some scaling
definitions.
•
C means Scale – a parameter that is simply a scaled version of another.
•
S means Select – a parameter that describes some selection that has been made.
File Formats
General Format for a CIAO Parameter Objects
The Value (identified by the letter “V”) parameters have the following format.
[soft-scale] (hard-scale) hard-value
Example 1
CIAO Parameter Indicator
“Group” Number
(usually ignored)
Soft-Scale
Hard-Value
\@1:Z limit: V [Sens. Zscan] (0.006714 V/LSB) 440.0 V
Parameter
Hard-Scale
Parameter Type
LSB
Since the NanoScope is a digital device, all data is numeric. We call this number in its rawest form an LSB
(i.e., scaling values on ADCs and DACs as Volts per Least-Significant-Bit). The LSB is the digital
representation of volts or frequency.
Hard value
The hard value is the analog representation of a measurement. It is simply the value read on the parameter
panel when you set the Units: to Volts. The hard-value is the value you would read with a voltmeter inside of
the NanoScope electronics or inside the head. This value is always in volts with the exception of the Drive
Frequency (which is in Hertz) and some STM parameters (which are in Amps).
Hard Scale
The hard scale is the conversion factor we use to convert LSBs into hard values. We use the prefix "hard-" in
hard-scale and hard-value because these numbers are typically defined by the hardware itself and are not
changeable by the user.
Note:
Soft-scale and soft-value also exist for distinguishing units. A soft-value is what the user sees on
the screen when the Units: are set to Metric. The soft-scale is what we use to convert a hardvalue into a soft-value. Soft-scales are user defined, or are calibration numbers that the user
divines. Soft-scales in the parameters are typically not written out – rather, another tag appears
between the brackets, like [Sens. Zscan]. In that case, you look elsewhere in the plist for tag and
use that parameter's hard-value for the soft-scale.
A value parameter might be missing a soft-scale or a hard-scale, but must always have a hard-value.
The Scale parameters (identified by the letter “C”) have the following format.
Example 2: [Soft-scale] hard-value
CIAO Parameter Indicator
Soft-Scale
\@Z magnify: C [2:Z scale] 1.98
Parameter
Parameter Type
Hard-Value
File Formats
General Format for a CIAO Parameter Objects
•
The hard-value is almost always a scalar value.
•
The soft-scale always points to another parameter – this parameter is the target of the scaling
action.
•
Most often used for the Z magnify parm to allow user to change scaling of Z scale in Offline without actually affecting the real data in the file.
The Select parameters (identified by the letter “S”) have the following format:
Example 3: [Internal-designation for selection] "external-designation for selection"
CIAO Parameter Indicator
“Group” Number
Internal-Designation
for Selection
(usually ignored)
\@2:Image Data: S [Height] "Height"
Parameter
B.6.1
Parameter Type
External-Designation
for Selection
Procedures to find Z scale CIAO Parameter Objects
To find the Z scale conversion factors, refer to Figure B.6a to complete the following calculation:
1. Find the soft scale by searching for a tag in brackets. Note that the parameter “Sens. Zscan”
appears in brackets in some of the value parameters and defines a specific soft scale.
2. Locate the [Sens. Zscan in nm/V] in the Scanner List.
File Formats
General Format for a CIAO Parameter Objects
Figure B.6a Sample Parameter List
\*File list
\Version: 0x04310000
\Data length: 20480
\*Equipment list
\Description: D5000
\Controller: IIIA
\Scanner file: xxxg.scn
\*Scanner list
\Scanner type: Dimension
\Serial number: xxxG
\Piezo size: G
\@Sens. Zscan: V 12.50 nm/V
\*Ciao scan list
\Scan size: 311.1 nm
\Samps/line: 256
\Lines: 256
\Scan rate: 61.0352
\@InterleaveList: S [InterleaveOffMode] "Disabled"
\@MicroscopeList: S [TMMode] "Tapping"
\@2:SPMFeedbackList: S [SPMFb] "Amplitude"
\@3:SPMFeedbackList: S [SPMFb] "Amplitude"
\@Sens. Deflection: V 1.000
\@1:Z limit: V [Sens. Zscan] (0.006714 V/LSB) 440.0 V
\*Ciao image list
\Data offset: 20480
\Data length: 131072
\Bytes/pixel: 2
\Samps/line: 256
\Number of lines: 256
\@2:Image Data: S [Height] "Height"
\@Z magnify: C [2:Z scale] 1.98
\@2:Z scale: V [Sens. Zscan] (0.006714 V/LSB) 202.2 V
\*File list end
Soft scale, Sens. Zscan value
The hard scale (e.g., 0.006714 V/LSB) is the scale at which the file was originally captured. However, to help
minimize round off errors in the off-line processing, the software automatically scales the image data to the
full range of the data word. While the hard value of the Z scale is updated, the hard scale is not. Therefore,
this hard scale should be ignored.
Following are two formulas that explain the relationship between the hard scale, the hard-value, and the softscale:
hard value
hard scale = ----------------------------------------------( 8 × ( bytes ) ⁄ ( pixel ) )
2
hard value ⋅ soft-scale = soft-value
Using these two formulas, it is possible to figure out all one might want to know about the data.
Converting Raw Data into Height
The raw data in the file is assigned 2-byte number. The numbers in the data file are called LSBs (and, for our
purposes, assigned a unit of ‘LSB’). In order to convert the raw data in the file, use the number from the file
and multiply it by both the hard-scale and the soft-scale.
For example, using the above parameter list in Figure B.6a, the hard scale would be:
V
202.2V
202.2V
------------------ = ------------------ = 0.003085 ----------(8 ⋅ 2)
LSB
65536
2
File Formats
General Format for a CIAO Parameter Objects
Now, if we had a value of 54 in the data file, the result would be:
V
nm
( 54LSB ) ⋅  0.003085 ----------- ⋅  12.5 -------- = 2.08nm

LSB 
V
Note: The same procedure may be used to calculate frequency, current, potential, amplitude data, etc.,
by using the appropriate Z scale. However, each data set requires a specific Z scale. For
example, the Z scale for potential may not be used to calculate frequency.
What is the range of the data in the file?
The range of data in the file may be found by multiplying the hard-value by the soft-scale. Using the hardvalue and soft-scale values from the example above:
nm
202.2V ⋅ 12.5 -------- = 2.53µm
V
Data is expanded in the NanoScope file after capture to prevent round-off in the Off-line calculations. The
expansion procedure changes the Z scale to correspond with the new scale of the expanded data. Yet, in Offline, the software displays the data with the original Z scale I used to capture it.
How can I calculate the displayed Z scale for use in my own analysis programs?
Use Z magnify to discover the displayed Z scale. The modified Z scale is 2.53 µm. Z magnify (from the
Sample Parameter List) tells us there is a scale of 1.98 missing. So the data on the screen in the NanoScope
off-line is displayed at 5.00 nm. This trick also works if the user changed the displayed Z scale in Off-line.
Force Curve File Format
To find the Z scan size and steps, refer to the Sample Parameter List and complete the following:
1. Under \*Ciao Force List are the parameters that describe Z:
\@Z scan start: (last number is in volts)
\@Z scan size: (last number is also in volts)
You can convert using the \@Sens. Zscan: which shows the value and units (typically 12.5 nm/V)
under the \*Scanner list line.
2. Find the number of pixels/line of data is under the \*Ciao force image list (usually last) as:
\Samps/line: nnn [where nnn is the number of pixels in each direction]
Also in the \*Ciao section is the Data Type:
\@4: Image Data: S [data type] "data description"
Note: Data type is usually Deflection or Amplitude and can be "Deflection", "TM Deflect."
or "Amplitude".
Glossary
Abstract
This glossary defines terms used in the semiconductor and general purpose microscopy industries,
as well as terms specific to Digital Instruments, Veeco Metrology Group. Some of the terms in this
glossary are specific to SEMATECH. This version also includes terminology from other industry
organizations, namely ASME, SIA, EIA, IEEE, ASTM, and SEMI. Sources are indicated at the end
of each definition.
Reprint Permissions
SEMI definitions are reprinted by SEMATECH with permission from Semiconductor Equipment
and Materials International. Copyright Semiconductor Equipment and Materials International, 805
E. Middlefield Road, Mountain View, CA, 94043.
Last updated July 9, 2001.
© Copyright 2001 Digital Instruments, Veeco Metrology Group
Quick Reference
A-E
Rev. A (variable)
F-J
K-O
P-T
U-Z
Document Title
563
Glossary
Term
A-E
564
Definition
absolute pressure
In mass flow controllers, the pressure measured relative to zero
pressure (perfect vacuum). [SEMI E28-92]
accuracy
In statistical process control, the compliance of the measured or
observed value to the true value or accepted reference value. [EIA
557]
acetone
A colorless, volatile, and extremely flammable liquid used as a solvent and as a reagent. [SEMATECH]
acoustic isolation
The combination of a complete acoustic enclosure of the isolation
platform and a multilayer foam design results in a complete acoustic isolation system which effectively dampens acoustic noise
sources.
actuation cycle
The full operation of a valve, such as from a fully opened position
to fully closed and back to fully opened. [SEMATECH]
adjusted decibel (dBa)
A unit used to express the relationship between the interfering
effect of a noise frequency and a noise power level. [SEMATECH]
AFM
Atomic Force Microscope or atomic force microscopy.
air velocity (VA)
In the thermal testing of semiconductor devices, the velocity of the
cooling air at a specified location upstream from the device under
test. Air velocity is measured in linear feet per minute. [SEMI
G38-87]
aliasing
Electronic image error due to differences in resolution between
surface features and the pixels used to represent them.
alignment
1: The accuracy of the relative position of an image on a reticle
with reference to an existing image on a substrate. [SEMATECH]
2: a procedure in which a wafer is correctly positioned relative to a
reticle. [SEMATECH] 3: the mechanical positioning of reference
points on a wafer or flat panel display substrate (also called alignment marks or alignment targets) to the corresponding points on
the reticle or reticles. The measure of alignment is the overlay at
the positions on the wafer or substrate where the alignment marks
are placed. [Adapted from SEMI P18-92 and D8-94]
Document Title
Rev. A (variable)
Glossary
Term
Definition
ambient pressure
In mass flow controllers, the absolute pressure of the medium surrounding the device. [SEMI E28-92]
ambient temperature
1: the temperature of the surrounding medium, such as air or liquid, that comes into contact with the device or apparatus.
[SEMATECH] 2: the temperature of the specified, surrounding
medium (such as air, nitrogen, or a liquid) that comes into contact
with a semiconductor device being tested for thermal resistance.
[SEMI G38-87]
American National Standards
Institute (ANSI)
An organization that compiles and publishes computer industry
standards. [SEMATECH]
analog
A signal in an electronic circuit that takes on a continuous range of
values rather than only a few discrete values; a circuit or system
that processes analog signals. [1994 National Technology Roadmap for Semiconductors]
angstrom (Å)
Unit of linear measure equal to one ten billionths of a meter (10-10
m). The preferred SI unit is nanometers. 10 Å = 1 nm. [SEMATECH]
area contamination
Foreign matter on localized portions of a wafer or substrate surface. [SEMI M3-88]
artifact
1: A physical standard against which a parameter is measured; for
example, a test wafer used for testing parametric drift in a
machine. [SEMATECH] 2: a superficial or unessential attribute of
a process or characteristic under examination; for example, a piece
of lint on a lens that appears through a microscope to be a defect
on a die. [SEMATECH] 3: in surface characterization, any contribution to an image from other than true surface morphology (e.g.,
contamination, vibration, electronic noise, and instrument imperfections). [SEMATECH]
aspect ratio
1: In etch, the depth-to-width ratio of an opening on a wafer.
[SEMATECH] 2: in feature profile, the ratio of height to width of a
feature. [SEMATECH]
atmosphere (atm.)
A unit of pressure equal to the pressure exerted by a vertical column of mercury 760 mm high, at a temperature of 0°C, and under
standard gravity. One technical atmosphere equals 1 kg f/cm 2
(14.7 pounds per square inch). [ASTM D1356 REV A-73]
Rev. A (variable)
Document Title
565
Glossary
Term
566
Definition
atmospheric hood
An enclosure for use with the MultiMode Scanning Probe Microscope (SPM) which enables control of the imaging environment. It
is strongly recommended for users who need to control humidity
or require specific environmental atmospheres during operation.
atomic force microscopy (AFM)
A microscopy technique based on profilometry using an atomically sharp probe that provides three-dimensional highly magnified
images. During AFM, the probe scans across a sample surface. The
changes in force between the sample and the probe tip cause a
deflection of the probe tip that is monitored and used to form the
magnified image. [SEMATECH] The three primary AFM modes
used at Digital Instruments, Veeco Metrology Group are: Contact
Mode, Non-Contact Mode and Tapping Mode.
Auto Step Height
The process of collecting all relative height measurements along
profile data between defined regions.
automated material handling
system (AMHS)
Equipment that helps control the flow of material in a manufacturing facility; e.g., robots, computers, sensors, and protective carriers. [SEMATECH]
automatic valve
A valve with an actuation device that can be operated remotely,
such as a pneumatically or electrically controlled valve. [SEMATECH]
bandwidth
The difference between the highest and lowest values in a range of
two pattern characteristics, such as efficiency, frequency, or impedance. The bandwidth of significant frequencies (frequencies that
conform to standards or that are required for reliable frequencies)
within a spectrum is expressed in hertz. [SEMATECH]
bay
Of a cleanroom, a confined area that contains equipment used for
one or more steps in a process. [SEMATECH]
BEEM
Ballistic Electron Emission Microscopy.
bellows valve
A packless valve that incorporates a statically sealed bellows to
isolate the controlled medium from the atmosphere. [SEMI Chemicals/Gases, Vol. 1, 1990 (no longer in print)]
bias
Electrical potential applied to a tip or sample which causes electron flow to ensue from one to the other (scanning tunnel microscopy and electric force microscopy only).
Document Title
Rev. A (variable)
Glossary
Term
Definition
bidirectional
In the bar code marking of silicon wafers, refers to a bar code that
can be read successfully in either scanning direction, right to left or
left to right. [Adapted from SEMI T1-93]
boiling point (bp)
The temperature of a liquid at which the vapor pressure equals the
prevailing atmospheric pressure. The normal boiling point is specified at one atmosphere. [SEMI Chemicals/Gases, Vol. 1, 1990 (no
longer in print)]
boot
The process of starting or resetting a computer, from "pulling oneself up by the bootstraps"; the chicken and egg problem of a computer starting itself.
Bow
Bow, which increases with scan size, is the result of 2nd order or
3rd order curvatures from an ideal plane. Bow can be removed
from a captured image by using Modify >Planefit Auto.
browser
Type of software that lets your computer read HTML documents
and access related files and software on the Internet, intranets, or
your local hard drive.
bug
An error in coding or logic that causes a program to work incorrectly (from the 50s when insects caused electrical shorts between
vacuum tubes).
c-AFM-air
Contact atomic force microscopy in air.
c-AFM-fluid
Contact atomic force microscopy in fluid.
calibration
Measurement of known features to ensure accuracy of SPM
images.
cantilever
Flexible portion of probe extending from the substrate and to
which the tip is attached.
cantilever tune
Process of finding a cantilever’s natural, resonant frequency by
exciting the cantilever through a range of frequencies until maximum amplitude is obtained. The frequency at which maximum
amplitude is obtained is the resonant frequency.
cassette
An open structure that holds one or more substrates. [SEMI E4495]
Rev. A (variable)
Document Title
567
Glossary
Term
568
Definition
ceiling
In safety threshold limit values, the concentration that should not
be exceeded during any part of the working exposure. [SEMI S293]
check valve
A flow-controlling device, installed in a tube or pipeline, that
allows flow to occur in only one direction and positively prevents
flow in the opposite direction. [SEMI International Standards
1990, Vol. 1, Glossary]
chemical-mechanical polishing
(CMP)
A process for the removal of surface material from a wafer. The
process uses chemical and mechanical actions to achieve a mirrorlike surface for subsequent processing. [SEMI M1-94 and ASTM
F1241]
child node
A name for any subordinate node under another node found in a
workspace.
child view
Name representing view under a top view.
CITS
Current Imaging Tunneling Spectroscopy.
Classic Control
The name for the NanoScope Control display on the modal, dual
display, version of software. The Classic Control displays menu
bars, status bars, control panels and file lists.
Classic Control and Image
The name for the NanoScope Control and Image displays combined (See also Classic Control and Classic Image).
Classic Image
The name for the NanoScope Image display on the modal, dual
display, version of software. The Classic Image displays imaging
data, menu bars, data boxes and graphs.
Classic Interface
The name for the NanoScope software configured for two displays:
control monitor (Classic Control) and image monitor (Classic
Image).
cleanroom
A confined area in which the humidity, temperature, particulate
matter, and contamination are precisely controlled within specified
parameters. The class of the cleanroom defines the maximum number of particles of 0.5 mm size or larger that may exist in one cubic
foot of air in the designated area. For example, a class 1 cleanroom
allows one such particle of any kind to exist in one cubic foot of
space; a class 10 area may contain no more than 10 such particles
in one cubic foot of space. [SEMATECH]
Document Title
Rev. A (variable)
Glossary
Term
Definition
clearance
The minimum distance between the edges of sequentially applied
images. [ASTM F127-84]
client window
Central window for viewing all real time graphical displays, image
processing graphical displays, dockable windows and views.
Cognex
Third-party software used as the primary link in the NanoScope
vision system.
compressed gas
A gas or mixture of gases in a closed container having an absolute
pressure exceeding 40 psi at 70°F. [SEMATECH]
configuration
The definition of equipment and interfaces necessary for a given
application. [SEMATECH]
contaminant
An unwanted substance present in the cleanroom or on the product. [SEMATECH]
controlled work area
A space within a building where hazardous production materials
may be stored, handled, dispensed, or used. [SEMI F6-92]
coordinate system
A means to specify location by mapping each dimension of a space
onto the real number line. A point in the space is identified by its
coordinates, the locator numbers in each dimension.
crater
On the surface of a slice or wafer, an individually distinguishable
bowl-shaped cavity. A crater is visible when viewed under diffused
illumination. [SEMATECH]
creep
The drift of the piezo displacement after a DC offset voltage is
applied to the piezo.
critical dimension (CD)
The width of a patterned line or the distance between two lines,
monitored to maintain device performance consistency; that
dimension of a specified geometry that must be within design tolerances. [ASTM F127-84]
critical pressure
The pressure at which a substance may exist as a gas in equilibrium with the liquid at the critical temperature. [SEMI Chemicals/
Gases, Vol. 1, 1990 (no longer in print)]
critical temperature
The temperature above which gas cannot be liquefied by pressure
alone. [SEMI Chemicals/Gases, Vol. 1, 1990 (no longer in print)]
Rev. A (variable)
Document Title
569
Glossary
Term
570
Definition
current
In scanning tunneling microscopy, tunnel current, expressed in
nanoamperes (nA), that flows across the tip surface gap. [SEMATECH]
Cutoff
The act of isolating or separating values to obtain data (e.g., cutoff
filter).
data
1: information, including programs, program instructions, and the
information used or produced by a computer. [SEMATECH] 2:
any representation to which meaning is or might be assigned (for
example, characters). [SEMI E13-91]
data integration
1:the degree to which tools can share data through a framework.
The degree of integration is dependent on the granularity of data
that a framework supports. [SEMATECH] 2: The means by which
design data is transferred between computer-aided design applications. [1994 National Technology Roadmap for Semiconductors]
datum point
In wafer transport systems, the left rear corner of wafer transport
equipment; formed by the intersection of the planes that define the
left side, back side, and wafer plane. [SEMI E8-92]
design pressure
Of a system or subsystem, the pressure at the most severe condition of coincident internal or external pressure and temperature
expected during normal service. The maximum pressure expected
in any portion of a system or subsystem is typically determined by
the maximum adjustable setting of the last pressure regulator that
supplies it, the supply pressure to the regulator, or the actuation
pressure of any relief device incorporated. [SEMI F1-90]
diameter
Of a semiconductor wafer, the linear dimension across the surface
of a circular wafer that contains the wafer center and excludes flats
or other peripheral fiduciary geometries. [ASTM F1241]
diaphragm valve
A packless valve that incorporates a statically sealed diaphragm
with which to isolate the controlled medium from the atmosphere.
[SEMI International Standards 1990, Vol. 1, Glossary]
dielectric
A nonconductive material; an insulator. Examples are silicon dioxide and silicon nitride. [SEMATECH] 2: a material applied to the
surface of a ceramic or preformed plastic package to provide functions such as electrical insulation, passivation of underlying metallization, and limitations to solder flow. [SEMI G33-90]
Document Title
Rev. A (variable)
Glossary
Term
Definition
differential pressure
In mass flow controllers, the difference in absolute pressure
between two points of measurement in a system. Note—As it
applies to a mass flow controller, differential pressure is usually
the measured difference in pressures between the gas inlet and outlet fittings of the mass flow controller. [SEMI E28-92]
diffusion
A high-temperature process in which desired chemicals (dopants)
on a wafer are redistributed within the silicon to form a device
component. [SEMATECH]
digital signal processor (DSP)
Computer processor used to control Scanning Probe Microscope
feedback loop.
Dimension Series Microscopes
A series of scanning probe microscopes (i.e. 5000, 7000, 9000 and
9300) in which the stage moves under the probe. The Dimension
7000 - 9300 microscopes also include a robot for fully automated
scanning.
drift
In scanning tunneling microscopy or atomic force microscopy,
movement of the sample surface with respect to a microscope tip
or cantilever due to a lack of thermal equilibrium. [SEMATECH]
drive amplitude
Amplitude of the signal used to oscillate a tip in TappingMode.
drive frequency
Frequency of the signal used to oscillate a tip in TappingMode.
DSP
Digital signal processor.
dump
Presentation of intermediate results just prior to an error that stops
a software procedure from completing.
dynamic port
In automated material movement, a port with associated mechanisms capable of assisting with the physical movement of a transfer object or of interfering with the transfer of an object during the
transfer. Such mechanisms may include doors, elevators, and robot
arms. A transfer partner using a dynamic port for the transfer may
be active or passive, as required. Note—The concepts of dynamic
and static are associated with a port rather than equipment, as
equipment may have both dynamic and static ports. [SEMI E3294] Contrast with static port.
ECAFM
Atomic force microscopy (AFM) in fluid with provision to control
the potential difference (voltage) between the tip and sample to
study electrochemistry (EC).
Rev. A (variable)
Document Title
571
Glossary
Term
572
Definition
ECLFM
Lateral force microscopy (LFM) in fluid with provision to control
the potential difference (voltage) between the tip and sample to
study electrochemistry (EC).
ECM
Electrochemical microscopy.
edge effect
Localized structure about the edge of a specimen. [ASTM F1241]
edge sensor
A sensor on automatic test equipment that determines the location
of the edge of the wafer. [SEMATECH]
EFM
Electric force microscopy.
electric force microscopy
Electric field measurement at a fixed small distance from a surface.
Surface topography is established first by atomic force microscopy
(AFM).
electrochemical microscopy
Use of a scanning probe microscope in a fluid with control over tip
and sample voltages.
electromagnetic compatibility
(EMC)
The ability of electronic equipment to function properly with
respect to environmental electromagnetic interference and electrostatic discharge. [SEMI E33-94]
electromagnetic interference (EMI)
Any electrical signal in the nonionizing (suboptical) portion of the
electromagnetic spectrum with the potential to cause an undesired
response in electronic equipment. [SEMI E33-94]
electrostatic chuck (ESC)
A mechanism for holding wafers using electrostatic attraction.
[SEMATECH]
electrostatic discharge (ESD)
A sudden electric current flow, such as between a human body and
a metal oxide semiconductor, with potential damage to the component. [SEMATECH] 2: the transfer of electrostatic charge between
bodies at different electrostatic potentials. [SEMI E33-94]
emergency off (EMO)
Fail safe control switch or circuit that, when de-energized, will
stop the operation of associated equipment and will shut off all
potential hazards outside the main power enclosure. [SEMI E2091]
Document Title
Rev. A (variable)
Glossary
Term
Definition
emergency off (EMO) circuit
In facilities and safety, a control circuit that, when deactivated,
places the equipment into a safe shutdown condition and will
restrict all hazardous potentials to the main power enclosure. This
is a condition in which all hazardous voltage has been removed
from the equipment, all hazardous production materials flow has
been stopped, any radiation sources have been de-energized or
totally contained, any capacitors have been grounded, all moving
parts stopped, internal and external heat sources shut off, and the
equipment presents minimum hazard to personnel or the facility.
[Adapted from SEMI S2-93]
emergency off (EMO) interface
The location at which a process or cassette module EMO cable is
connected into the cluster tool circuit. [SEMI E20-91]
enabled
Refers to one of the two major SECS communication states
(enabled and disabled). The enabled state has two sub-states, communicating and not communicating. In the enabled state, the
equipment will periodically attempt to establish communication
with a host computer or uphold communications with the host.
[SEMI E30-94]
enclosure
In mini environments, a physical barrier between the localized
environment and its surroundings. [SEMI E44-95]
end effector
In cluster tools, a physical location attached to a transport
resource, capable of holding a wafer during an end-to-end material
transfer. [SEMATECH]
engagement
Process of bringing a probe tip and sample together in a controlled
manner such that useful information about the surface is obtained
without damaging either the tip or the sample.
environmental isolation
Separation from the ambient atmospheric environment. [SEMI
E21-94]
equipment cycle
One complete operational sequence of processing, manufacturing,
and testing steps. In single-unit processing systems, the number of
cycles equals the number of units processed. In batch systems, the
number of cycles equals the number of batches processed. [SEMI
E10-92]
equipment downtime
The hours when the equipment is not in a condition or is not available to perform its intended function; does not include any portion
of nonscheduled time. [SEMI E10-92]
Rev. A (variable)
Document Title
573
Glossary
Term
Definition
equipment failure
Any interruption or variance from the specifications of equipment
operation that requires the replacement of a component (other than
specified consumables) because of degradation or failure. Also
includes assists that interrupt operation and require more than six
minutes. [SEMI E10-92]
equipment uptime
The amount of time when the equipment is in a condition to perform its intended function, including productive, standby, and
engineering time; does not include any portion of nonscheduled
time.
ergonomics
The science that deals with adapting the work environment to the
needs of the worker.
error
Difference between actual tip-sample force measured at the detector and the setpoint force.
etch
A category of lithographic processes that remove material from
selected areas of a die. Examples are nitride etch and oxide etch.
[SEMATECH] 2: in the manufacture of silicon wafers, a solution,
a mixture of solutions, or a mixture of gases that attacks the surfaces of a film or substrate, removing material either selectively or
nonselectively. [SEMI M1-94 and ASTM F1241]
excess flow valve (EFV)
A valve inserted in a supply line designed to shut off the flow positively in the event its predetermined flow is exceeded. [SEMI S293]
exposure
The process of subjecting a photosensitive material to light or
other radiant energy. [SEMATECH] 2: the amount of light or other
radiant energy received per unit area of sensitized material.
[ASTM F127-84]
Extender Electronics Module
Offers phase and frequency detection capabilities for enhanced
magnetic and electric force microscopy that eliminate artifacts and
improve image quality. Also allows measurement of sample surface potential. It is recommended for all users performing magnetic or electric force measurements and for specialized
applications requiring microscopic measurement of surface voltage.
F-J
fab
574
The main manufacturing facility for processing semiconductor
wafers. [SEMATECH]
Document Title
Rev. A (variable)
Glossary
Term
Definition
fail safe
A system so designed that a failure of any component in the system
will stop the equipment and prevent unsafe operation of the equipment. [SEMI S2-93]
false engagement
Condition due to surface effects or insufficient setpoint (too low
during contact AFM; too high during TappingMode) in which the
feedback controller attempts imaging a sample that is not engaged
with the tip.
false negative
A measurement that indicates the failure to count a particle that is
present. [SEMATECH]
false positive
A measurement that indicates the presence of particles when no
particles are present. [SEMATECH]
fast axis
In optics, of a doubly refracting crystal, the direction in which the
velocity of light is a maximum. [ASTM F1241]
fast scanning
The ability to scan a sample at speeds up to 10 times faster than
possible with conventional Atomic Force Microscope and Scanning Probe Microscope systems (available in TappingMode and
Contact Mode). This translates to complete scans in seconds versus minutes while maintaining integrity and accuracy
feature
An area within a single continuous boundary (for example, an
aggregate image) that has an optical-density value (gray-level
range) that is distinct from the background area outside the feature;
for example, the simplest element of a pattern such as a single line,
space, or L-bar. [SEMI P19-92]
feature height
In scanning tunneling microscopy and atomic force microscopy,
the height of features on a surface profile; the distance in the Zdirection of any point in a microscope’s scan area, relative to the
lowest point in the scan area, as derived from measurement fluctuations during raster. [SEMATECH]
feedback
In atomic force microscopy, a process by which the cantilever is
moved in the Z-direction relative to the sample to maintain a constant force during scanning. 2: in scanning tunneling microscopy, a
process by which the tip is moved in the Z-direction relative to the
sample to maintain a constant current during scanning. [SEMATECH].
fiber optics
A technique for transmitting light through very fine, flexible glass
rods by means of internal refraction. [SEMATECH]
Rev. A (variable)
Document Title
575
Glossary
Term
576
Definition
field
The printed pattern from a reticle. [SEMATECH]
field rotation
The rotation of a printed reticle pattern with respect to previously
exposed fields. [SEMATECH]
flammable liquid
A liquid that has a flash point below 37.8°C (100°F) and a vapor
pressure not exceeding 40 psi (absolute) at 37.8°C. [ASTM E77287]
flange
In plastic and metal wafer carriers, the material on the exterior of a
wafer carrier and perpendicular to the side walls. [SEMI E1-86]
flatness
1: for wafer surfaces, the deviation of the front surface, expressed
in total indicator reading (TIR) or maximum focal plane deviation
(FPD), relative to a specified reference plane when the back surface of the wafer is ideally flat, as when pulled down by a vacuum
onto an ideally clean, flat chuck. [SEMI M1-94 and ASTM F1241]
Contrast bow and warp. Also see global flatness, site flatness, total
indicator reading, and focal plane deviation. 2: in a ceramic package or lead frame, the allowable deviation of a surface from a
defined reference plane. The tolerance zone is defined by two parallel planes within which the surface must lie. [SEMI G61-94]
floating menu
Pop-menu appearing on top of a specific window for configuring
window elements. Also known as properties menu.
flow coefficient (Cv)
The number of standard cubic meters of air per minute that can
flow through a valve at a pressure drop of 1 psi. [SEMATECH]
flow rate
Measurement of the amount of fluid or gas that passes one point at
a given time. [SEMATECH]
flow velocity (V)
In equipment exhaust systems, the average speed at which the
effluent stream travels through the exhaust duct. It is measured in
meters per second (m/s) or feet per minute (fpm). [SEMI S6-93]
flow volume (Q)
In equipment exhaust systems, the volumetric flow rate of the
effluent stream passing a given location in the exhaust system per
unit of time. It is measured in cubic meters per second (m 3 /s) or
cubic feet per minute (cfm). [SEMI S6-93]
fluid cell
Accessory used for imaging materials in fluid, consisting of a specialized tipholder and o-ring.
Document Title
Rev. A (variable)
Glossary
Term
Definition
fluid cell
A container for electrochemically interesting fluids with provision
for admitting a scanning probe microscope (SPM) probe and possibly allowing fluid to circulate.
flux
The number of particles flowing through a given area per unit time.
[ASTM 1296-92]
FM
Frequency modulation.
focal plane
The plane perpendicular to the optical axis of an imaging system
that contains the focal point of the imaging system. [SEMI M1-94]
focal plane deviation (FPD)
The distance parallel to the optical axis from a point on the wafer
surface to the focal plane of the optical system. [SEMI M1-94 and
ASTM F1241]
focal range
In the measurement of photolithographic instruments, the total distance of defocus in which, over the whole of the processed image
field, the processed image is sufficiently resolved for practical use.
[SEMI P25-94]
focal surface
In the measurement of photolithographic instruments, the surface
determined by finding the focus for each point-like object in the
optical image field, with the object fixed with respect to the lens.
The focal surface is then the map of Z-axis displacements for the
highest contrast at each point in the optical image field as a function of the (x, y) or (r, j) coordinates. [SEMI P25-94]
focussed ion beam
An imaging tool that can be used to deposit or etch materials on
wafers. A focussed ion beam is often used in the etch mode to
selectively cleave structures for failure analysis. It is also used in
photomask repair for removing or adding material, as necessary, to
make the photomask defect free. [SEMATECH]
footprint
The floorspace (in square feet) that a piece of equipment occupies.
[SEMATECH] 2: on a semiconductor package, the pattern of the
metallized pads, leads, or pins used to make contact between the
internal metallization of the package and the connecting external
circuitry. [SEMI G22-86]
force
For atomic force microscopy, interactions in the nanometer scale
leading to movement of the cantilever relative to the sample surface. [SEMATECH]
force curves
Also referred to as force plots. The force acting vertically on a
probe tip as a function of its distance above the sample.
Rev. A (variable)
Document Title
577
Glossary
Term
578
Definition
force modulation
Force modulation imaging is a scanning probe microscopy (SPM)
technique that identifies and maps differences in surface stiffness
or elasticity.
force volume
An array of force plots taken at different locations on a sample.
fork
In cluster tools, a two-prong transport module end effector
designed to hold the wafer around its periphery. [SEMI E22-91]
functions menu
Pop-up menu found only in a workspace (permit multiple views,
add new views, etc.).
FV
Force volume.
gas
A material that is shipped in compressed gas cylinders or acts as a
gas upon release at normal temperatures and pressure, or is used or
handled as a gas, whether or not in strict accordance with the definition of a compressed gas as set forth in Article 9 of the Uniform
Fire Code. [SEMI S4-92]
gas temperature
In a mass flow controller, the actual temperature of the flowing gas
at the primary flow standard. [SEMI E18-91]
gauge pressure
In mass flow controllers, the differential pressure measured relative to ambient pressure. For example, when the pressure within a
system equals the prevailing ambient pressure, the gauge pressure
equals zero. [SEMI E28-92]
Generic Equipment Model (GEM)
1: a generalized model that describes a recommended implementation of the SEMI Equipment Communications Standard II.
[SEMATECH] 2: in communications and control of semiconductor manufacturing equipment, a reference model for any type of
equipment. It contains functionality that can apply to most equipment, but does not address unique requirements of specific equipment. [SEMI E30-94]
gowning
A procedure that includes hand washing and the donning of
gloves, head covering, masks, shoe covering, and other specialized
garments before workers enter the cleanroom. [SEMATECH]
graphical user interface (GUI)
The area on the display monitor that includes all information displayed graphically. A graphical user interface is a combination of
icons, scroll bars, windows, help systems, menus, views, dialog
boxes and other services to make a program easier to use.
[SEMATECH]
Document Title
Rev. A (variable)
Glossary
Term
Definition
groove
In a semiconductor wafer, a shallow scratch with rounded edges
that is usually the remnant of a scratch not completely removed by
polishing. [SEMI M1-94 and ASTM F1241]
hazard
A set of recognizable conditions with the potential for initiating an
event that could result in death, injury, or illness to people, and/or
facility/equipment damage. [SEMI S1-90]
hazardous materials
1: those chemicals or substances that are physical hazards or health
hazards as defined and classified in National Fire Protection Association (NFPA) 704, whether the materials are in use or in waste
conditions. [SEMI S2-93] 2: substances or mixtures having properties capable of producing adverse effects on the health or safety
of a human. [SEMATECH]
help interface
A menu item for initializing the help files and Follow Along Help.
The help is displayed or hidden using the View>Help command.
The help interface allows you to view documentation related to
using the NanoScope software.
HEPA
See high-efficiency particulate air (HEPA) filter.
hermetic seal
A coat applied in the final stage of thermal processing to seal the
ceramic package and to protect the device from the external environment. [SEMATECH]
hertz (Hz)
A term applied to the number of repetitions of a periodic wave per
second. [SEMATECH]
heterogeneous environment
An environment that contains a collection of platforms having both
similar and significantly different parts. [SEMATECH]
HF MFM
High Frequency Magnetic Force Microscopy.
high pressure isolation (HPI) valve
A shutoff valve located on the high-pressure side of a gas piping
system that, when closed, isolates the purged volume from the
pressure regulator and other downstream components. [SEMI F1393]
High Temperature Heater
Accessory for the MultiMode Scanning Probe Microscope that
allows imaging at temperatures up to 250°C, which covers the
melting range of most common polymers
high-efficiency particulate air
(HEPA) filter
A replaceable extended media, dry-type filter in a rigid frame and
having a minimum particle-collection efficiency of 99.97% on all
particles larger than 0.3 mm. [SEMATECH]
Rev. A (variable)
Document Title
579
Glossary
Term
580
Definition
histogram
A graph obtained by dividing the range of the data set into equal
intervals and plotting the number of data points in each interval.
[EIA 557]
icon
A small image (e.g., displayed on a computer screen) representing
something (e.g. an item on the computer that the user can access).
IFM
Interfacial force microscopy.
image
1: any single geometric form appearing in a layout as a part of a
master drawing or layout (image, drafting) projected on a screen or
viewed, usually at some magnification or reduction (image, optical) etched in the silicon dioxide layer on an oxidized silicon wafer
(image, oxide) in a photomask or in the emulsion of a photographic film or plate (image, photographic) an exposed and developed coating on a substrate (image, photoresist) [ASTM F127-84
and SEMI P25-94] 2: in scanning tunneling microscopy, representation of surface topography obtained using the signal from the tip
or surface during rastering and runder tunneling conditions.
[SEMATECH] 3: in atomic force microscopy, representation of
surface topography obtained by using the signal from the cantilever or surface during rastering in constant force conditions.
[SEMATECH]
image display
Window of the realtime scan or captured image.
image processing
The process of analyzing, modifying or reconstructing real time
data (e.g., AFM images or profiles).
input parameters
A grid of parameters in the image processing commands allowing
for editing parameters settings.
inputs window
Window within image processing commands allowing for editing
parameters settings.
insoluble
Not capable of being dissolved. [SEMATECH]
integral gain
Amount of correction applied in response to the average error
between setpoint force and actual force measured by the detector.
integrated circuit (IC)
1: two or more interconnected circuit elements on a single die.
[SEMATECH] 2: a fabrication technology that combines most of
the components of a circuit on a single-crystal silicon wafer.
[SEMI Materials, Vol. 3, Definitions for Semiconductor Materials]
Document Title
Rev. A (variable)
Glossary
Term
Definition
integrated mini-environment
A mini-environment that is an integral part of the tool. [SEMI E4495]
integrated standard mechanical
interface (SMIF)
A unit that includes a SMIF port and a mechanism for indexing the
port door, and which is entirely incorporated within the tool.
[SEMI E44-95]
interconnect
A highly conductive material, usually aluminum or polysilicon,
that carries electrical signals to different parts of a die. [SEMATECH] 2: the wiring between elements on a die, package, or board.
[1994 National Technology Readmit for Semiconductors]
isolation valve
1: in cluster tools, a mechanical component used at an interface
plane to permit environmental isolation between the transport
module and an attached module. There is always one isolation
valve under the control of the transport module. [SEMATECH] 2:
in the pressure testing of fluorocarbon tube fittings, a valve used to
separate high-temperature fluid from high-pressure fluid, or to separate the samples from each other. [SEMI F10-93]
K-O
label
A piece of paper or other material affixed to a container or article,
on which is printed information concerning the product or
addresses. It may also be printed directly on the container. [ASTM
D996-90]
laminar air flow
A flow of air uniformly parallel from ceiling to floor, or wall to
wall in a room or workstation, moving with uniform velocity and a
minimum of turbulence. [SEMATECH]
latent image
A condition produced and persisting in the image receptor by
exposure to radiation that is able to be converted into a visible
image by processing. [ASTM E586 REV A-90]
lateral force microscopy (LFM)
A scanning probe microscopy (SPM) technique that identifies and
maps relative differences in surface frictional characteristics
leak
In the measurement of mass flow controller leak rates, a path or
paths in a sealed system that will pass helium when a partial pressure differential exists. A partial pressure differential can exist for
helium even though a total gas pressure differential may not exist.
A leak may be a mechanical leak or a permeation leak, or it may
have both mechanisms operating in parallel. [Adapted from SEMI
E16-90]
Rev. A (variable)
Document Title
581
Glossary
Term
582
Definition
life cycle
The stages beginning with original requirements specifications and
ending with the final retirement of a program, application, or tool.
[SEMATECH]
lift access
In quartz and high temperature carriers, the clearance space in
which an implement is inserted to pick up a wafer carrier. [SEMI
E2-93]
lift access height
In quartz and high-temperature wafer carriers, the distance from
the horizontal center line of the lift access opening to the bottom
plane. [SEMI E2-93]
lift access opening
In quartz and high-temperature wafer carriers, the size of the opening provided for the insertion of an implement that picks up the
wafer carrier. [SEMI E2-93]
LiftMode™
Two-part, proprietary method of imaging surfaces consisting of a
surface scan to obtain height data, followed by a second scan to
extract other information about the surface (such as magnetic force
or elasticity) while the tip profiles the previous Z path at a constant
height. The two images are subtracting from each other to yield an
image uninfluenced by topography.
linearity
In the linearity of mass flow devices, the closeness to which a
curve approximates a straight line. It is measured as a nonlinearity
and expressed as a linearity. [SEMI E27-92]
lithography
A process in which a masked pattern is projected onto a photosensitive coating that covers a substrate. [SEMATECH] Also called
photolithography.
load (verb)
To place a cassette on the cassette stage of the equipment. [SEMI
E23-91]
load height
The distance from the bottom of the cassette or container to the
floor on which the tool is installed. [SEMI E15-91]
look
1: (noun) An image displayed by the vision system which (potentially) includes a model or a scanning site. Registration of a single
point (e.g., origin only) entails at least one look. Registration of
two points (e.g., origin and deskew) entails at least two looks. 2:
(verb) The process of detecting a model in an image and adjusting
the relative positions of the sample and probe such that the model
occupies the same area of the video image (i.e., same pixel coordinates) as when the user taught the model.
Document Title
Rev. A (variable)
Glossary
Term
Definition
LookAhead gain
Amount of correction applied in response to the error signal
between setpoint force and actual force measured by the detector,
based upon recorded information from the adjacent scan line.
low pressure isolation (LPI) valve
A shutoff valve located on the low pressure side of a gas system
that, when closed, isolates the purged volume from the distribution
piping and all other downstream components. [SEMI F13-93]
LTG
Light-modulated tunneling gap.
machine vision
The automatic acquisition of graphical information.
Magnetic Actuated Drive
TappingMode
Option for the MultiMode Scanning Probe Microscope specifically
designed for TappingMode in fluids. The option offers easy setup
and operation, including AutoTune automatic cantilever tuning.
maintenance
The act of sustaining equipment in a condition to perform its
intended function. [SEMI E10-92]
manual override
A mechanism incorporated into a remotely actuated valve that provides for manual closing and locking. [SEMI F4-90]
material data safety sheet (MSDS)
1: written or printed material concerning a hazardous material that
is prepared in accordance with the provisions of 29 CFR
1910.1200. (See UFC “88” 9.115.) (Form OSHA 20) [SEMI S291] 2: the descriptive data provided on a data sheet recommended
by the Occupational Safety and Health Administration (OSHA) to
provide information regarding the hazards of materials to prevent
and respond to emergency situations. [SEMATECH]
MDM
Magnetic dissipation microscopy
median surface
Of a semiconductor wafer, the locus of points in the wafer equidistant between the front and back surfaces. [ASTM F1241]
menu
A list of options visually presented on a terminal by a computer
program to allow a user to select a course of action. [SEMATECH]
metrology
The science of measurement to ascertain dimensions, quantity, or
capacity; the techniques and procedures for using sensors and
measurement equipment to determine physical and electrical properties in wafer processing. [SEMATECH]
MFM
Magnetic force microscopy
Rev. A (variable)
Document Title
583
Glossary
Term
584
Definition
micro environment
Ambient conditions in a very small region. [SEMATECH]
micrometer (µm)
A metric unit of linear measure that equals 1/1,000,000 meter (10 6 m), or 10,000 angstroms. The diameter of a human hair is
approximately 75 micrometers. [SEMATECH] Also called micron.
micron
See micrometer.
mini environment
A localized environment created by an enclosure to isolate the
product from contamination and people.
MMAFM-ECAFM
Electrochemical atomic force microscopy (AFM) on MultiMode
Atomic Force Microscope (AFM)
MMAFM-ECSTM
Electrochemical scanning tunneling microscopy on MultiMode
Atomic Force Microscope (AFM).
model
A region within a displayed image that is favorable for pattern recognition due to subregions of high contrast.
module
1: a program unit that is discrete and identifiable with respect to
compiling, combining with other units, and loading. For example,
the unit may be the input to, or output from, an assembler, compiler, linkage editor, or executive routine. [SEMATECH] 2: a logically separable part of a program. [SEMATECH] 3: in modular
equipment, an independently operable unit that is part of a tool or
system. [SEMI E21-94] 4: in the calibration of mass flow devices,
the number of moles per unit of time flowing in a closed channel.
[SEMI E29-93]
monitor
A graphical display device for pointing to or selecting individual
pixels within a monitor display.
MSDS
See material safety data sheet.
MSM
Magnetoresistance sensitivity mapping.
MultiMode
The most compact Digital Instruments Scanning Probe Microscope.
NanoScope™
Trademark name applied to Digital Instruments’ scanning probe
microscopy products.
nc-AFM
Non-contact atomic force microscopy.
Document Title
Rev. A (variable)
Glossary
Term
Definition
node
Corresponds to the names found in a workspace allowing to view
captured images, microscope settings, or views (e.g., Realtime,
Recipe, Setup).
normal operating differential
pressure
In a mass flow controller, the range of differential pressure
required by the device to meet its stated performance specifications. [SEMI E28-92]
normal operating temperature
In a mass flow controller, the temperature range within which the
influence of ambient temperature on the performance is stated.
[SEMI E18-91]
NSOM
Near-field scanning optical microscopy.
object-oriented
Describes a perspective that views the elements of a problem or
solution by decomposition into objects and object relationships.
[SEMATECH]
objective
Of a microscope, the primary magnifying system, consisting of a
system (generally of lenses, less frequently of mirrors) forming a
real, inverted, and magnified image of the object viewed. [ASTM
E175-82]
operating temperature limits
In a mass flow controller, the temperature range within which
operation is permitted, but performance is not specified beyond the
normal operating temperature. If the instrument is operated outside
these limits, damage may occur. [Adapted from SEMI E18-91]
operator
In communications and control of semiconductor manufacturing
equipment, a human who operates the equipment to perform its
intended function (for example, processing). The operator typically interacts with the equipment through the equipment-supplied
operator console. [SEMI E30-94]
origin
Of a dot matrix, the physical center point of the dot in the cell common to the primary border row and secondary border column.
[SEMI T2-93]
orthogonality
The measure of perpendicularity between the X- and Y-axis geometries printed on a substrate. [SEMATECH]
P-T
parent node
Rev. A (variable)
A name for the highest level view found in a workspace corresponding to a captured image, microscope settings, group or view.
Document Title
585
Glossary
Term
586
Definition
parent view
Name representing top view.
particle
1: a minute quantity of solid or liquid matter. [SEMATECH] 2: in
the manufacture of photolithographic pellicles, material that can be
distinguished from the film, whether on the film surface or embedded in the film. [SEMI P5-94] 3: the replating step in which a catalytic material, often a palladium or gold compound, is absorbed on
a surface to act as sites for initial stages of deposition. [ASTM
B374-93]
particulate
Discrete particle of dirt or other material. [ASTM F1241] 2: discrete particle of material that can usually be removed by (nonetching) cleaning. [SEMI M10-89] 3: describes material in small,
discrete pieces; anything that is not a fiber and has an aspect ratio
of less than 3 to 1. Examples are dusts, fumes, smokes, mists, and
fogs. [SEMATECH]
particulate contamination
On a semiconductor wafer, a particle or particles on the surface of
the wafer. [ASTM F1241]
partition coefficient
The quotient of the solubility of a compound in octanol and its solubility in water. [SEMATECH]
pattern shift ratio
In silicon wafers, the lateral distance between the center point of
the pattern on the surface of the substrate and the center point of
the pattern on the surface of the epitaxial layer, divided by the epitaxial layer thickness. [SEMI M18-94]
pattern step height
In silicon wafers, the difference in vertical position of the diffused
(buried layer) surface and the original substrate surface, after
removal of oxide. [SEMI M18-94]
pattern surface
In flat panel display, that surface of a substrate that has, or will
have, patterns applied. [SEMI D4-94]
patterning
The process of photolithography; formation of geometrical shapes
by the use of photosensitive resists, masks, and etching techniques.
[SEMATECH]
pedestal
A support pillar axially symmetric to the wafer transport position
in a process or cassette module. [SEMI E22-91]
Document Title
Rev. A (variable)
Glossary
Term
Definition
permissible exposure limit (PEL)
1: a time-weighted average exposure limit (typically 8 hours) or a
ceiling exposure limit for employees to any material listed in
Occupational Safety and Health Administration (OSHA) Regulation 29 CFR, Air Contaminants. [SEMATECH] 2: the maximum
permitted eight-hour time-weighted average concentration of an
airborne contaminant. The maximum permitted time-weighted
average exposures to be used are those published in 29 CFR 1910,
Subpart Z. [SEMI S2-93]
phase imaging
Provides nanometer-scale information about surface structure
often not revealed by other scanning probe microscopy (SPM)
techniques by mapping the phase of the cantilever oscillation during the TappingMode scan.
photolithography
See lithography.
photomask
A structure comprising functional pattern images produced on a
film, plastic, or glass-based material and accurately positioned so
as to be useful for selective exposure of a photoresist coating.
[ASTM F127-84]
photomask, negative
A photomask having an opaque background and transparent
images. [ASTM F127-84]
photomask, positive
A photomask having transparent background and opaque images.
[ASTM F127-84]
photomask, reverse polarity
A photomask that maintains the same geometric orientation of the
array on its surface as that of a referenced photomask, but is of the
opposite polarity, as a correct positive mask to a correct negative
mask. A correct negative mask is a reverse polarity mask of a correct positive mask. [ASTM F127-84]
photomasking
An operation in which patterns or images are produced on a glass
plate to create a mask. [SEMATECH] 2: the practice of photolithography. [SEMATECH] 3: the name of an area or a group that
performs photolithography. [SEMATECH]
physical interlock
Mechanical connection through which interlock conditions are
verified. [SEMATECH]
piezoelectric
A material property such that an applied voltage causes a change in
object size and, inversely, expansion or contraction induces a voltage across the object.
Rev. A (variable)
Document Title
587
Glossary
Term
588
Definition
pin
In plastic and metal wafer carriers, part of a wafer carrier that
enters the hole or slot of another wafer carrier for alignment when
wafers are transferred. [SEMI E1-86]
pit
1: in a wafer surface, a depression in a wafer surface that has
steeply sloped sides which meet the surface in a distinguishable
manner, in contrast to the rounded sides of a dimple. [ASTM
F1241] 2: in semiconductor packages, plastic or ceramic, or in the
leadframes, a shallow depression or crater. The bottom of the
depression must be visible in order for the term to apply. A pit is
formed during the component manufacture. [SEMI G61-94] Contrast chip. 3: in flat panel display substrates, a small indentation on
the glass substrate surface. [SEMI D9-94]
pitch
The distance between a point on an image and a point on the corresponding image in an adjacent functional pattern that lies in either
a row or column on a photomask or reticle. [SEMATECH]
planarization
A process that smooths the contours of the wafer surface by minimizing the step heights. [SEMATECH] 2: minimizing the difference in depth of the test probe pin with respect to the bond pads of
a die. [SEMATECH]
pod
A box having a standard mechanical interface (SMIF). [SEMI
E44-95]
polar transmission
A method of transmitting teletypewriter signals when current flows
in opposite directions. Direct current flowing in one direction identifies the marking signal, and an equal current flowing in the opposite direction identifies the spacing signal. [SEMATECH]
polarization
In optics, the term used to describe the orientation of the electric
field vector in an electromagnetic wave. [ASTM F1241]
polarized light
In optics, light that exhibits different properties in different directions at right angles to the line of propagation. [ASTM F1241]
pop-up menu
A floating menu that appears when right-clicking on each window
or screen. Configures the properties found on that screen or window (e.g., cursor type, color table in the image display).
Document Title
Rev. A (variable)
Glossary
Term
Definition
port
1: a terminal of a semiconductor device or component at which
information can be extracted or inserted. [SEMATECH] 2: in automated material movement, a point on the equipment at which a
change of equipment ownership of a transfer object occurs, including any dedicated mechanisms that either prepare for, facilitate, or
are capable of interfering with the transfer. [Adapted from SEMI
E32-94]
position reference point
In cluster tools, a location defined in an attached module’s local
coordinate system, through which an end effector will pass during
a wafer exchange sequence. [SEMATECH]
positive mask
See photomask, positive.
power dissipation (PH)
In the measurement of the thermal resistance of a semiconductor
device, the heating power applied to the device to cause a junction
to specified reference point (possibly case) temperature difference.
PH is measured in watts. [SEMI G38-87]
practical resolution
The minimum linewidth that reproduces the mask (or drafting)
dimensions faithfully. [SEMI P25-94]
precision
The measure of natural variation of repeated measurements. [EIA
557]
probe
Integrated mechanical device used to image surfaces, including a
substrate, cantilever and tip.
probe
A cantilever, typically several hundred microns in length, with an
atomically-sharp tip attached to the free end for use in scanning
probe microscopy imaging.
probe damage
1: on a substrate, local damage caused by mechanical probing or
measurement. Probe damage consists of pitted areas that have
spacing equal to that of the probe array. [SEMI Materials, Vol. 3,
Definitions for Semiconductor Materials and SEMI M10-89] 2: in
gallium arsenide technology, any damage to the wafer surface
caused by mechanical probing or measurement. [SEMI M10-89]
probe holder
A removable fixture where consumable scanning probe microscopy probes are mounted for use.
process control
The ability to maintain specifications of product and equipment
during the manufacturing operations. [SEMATECH]
Rev. A (variable)
Document Title
589
Glossary
Term
590
Definition
process time
The length of time required to process one wafer or one batch (for
sequential and batch tools, respectively) at a given workstation or
through an entire process. [SEMATECH]
processed image
In the measurement of photolithographic instruments, any single
geometric form that appears in the realized pattern or topographical variation of a material surface or material constitution, and that
is obtained by a physical process of pattern transference from an
optical image. [Adapted from SEMI P25-94]
properties menu
Pop-up menu appearing on each window or screen that configures
the properties of elements found on that screen or window (e.g.,
cursor type, color table in the image display). Also known as floating menu.
proportional gain
Correction applied in response to the error signal between setpoint
force and actual force measured by the detector, in direct proportion to the error.
protective clothing
Articles of apparel to prevent gases, vapors, liquids, and solids
from contacting the skin and to prevent them from being inhaled or
ingested. This clothing includes self-contained breathing apparatus. [SEMATECH]
PSTM
Photon scanning tunneling microscopy.
radio frequency (RF)
Electromagnetic energy with frequencies ranging from 3 kHz to
300 GHz. Microwaves are a portion of radio frequency extending
from 300 MHz to 300 GHz. [SEMI S2-93]
ramp-down
The portion of a maintenance procedure required to prepare the
equipment for hands-on work. It includes purging, cool-down,
warm-up, etc. Ramp-down is included only in scheduled and
unscheduled downtime. [SEMI E10-92]
ramp-up
The portion of a maintenance procedure required, after the handson work is completed, to return the equipment to a condition in
which it can perform its intended function. It includes pumpdown,
warm-up, stabilization periods, initialization routines, etc. It does
not include equipment or process test time. Ramp-up is included
only in scheduled and unscheduled downtime. [SEMI E10-92]
range
The region between the limits within which a quantity is measured,
expressed by stating the lower and upper range values. [SEMI
E27-92]
Document Title
Rev. A (variable)
Glossary
Term
Definition
rapid thermal processing (RTP)
A process in which a wafer is heated to a specified temperature for
short periods of time.
raster
The movement or area defined by repetitively scanning (with a
microscope) in the X-direction while moving stepwise in the Ydirection. [SEMATECH]
reach
The distance measured from the interface plane to the wafer centroid (center of mass) within a process module or a cassette module of a cluster tool. [SEMI E21-94]
reactivity
The tendency of a substance to undergo chemical reaction, either
by itself or with other materials, and to release energy. [SEMATECH]
reactor
A sealed isolation chamber in which a reaction occurs. [SEMATECH]
reagent
In the semiconductor industry, a chemical that is suitable for use in
the manufacture of semiconductors or in the performance of chemical tests. The purity of a reagent solution is higher than the purity
of a standard solution. [SEMATECH]
realtime
Pertaining to a system designed to control a dynamic process
within the timing constraints of the process. [SEMATECH]
recipe
The computer program, rules, specifications, operations, and procedures performed each time to produce a wafer that contains
functional die. Examples are the setup recipe and the process recipe. [SEMATECH]
reference plane
In semiconductor technology, a plane defined by one of the following: three points at specified locations on the front surface of a
wafer; the least squares fit to the front surface of a wafer using all
points within the fixed quality area (FQA); the least squares fit to
the front surface of a wafer using all points within a site; or an
ideal back surface (equivalent to the ideally flat chuck surface that
contacts the wafer). [SEMI M1-94]
refractive index
The ratio of the velocity of light in the first of two media to its
velocity in the second as it passes from one into the other. The first
medium is usually a vacuum. [SEMATECH]
Rev. A (variable)
Document Title
591
Glossary
Term
592
Definition
registration
1: the accuracy of the relative position of all functional patterns on
any reticle with the corresponding patterns of any other reticle of a
given device series when the reticles are properly superimposed.
[ASTM F127-84] 2: a vector quantity defined at every point on the
wafer. It is the difference, R, between the vector position, P1, of a
substrate geometry and the vector position of the corresponding
point, P0, in a reference grid. [SEMATECH] 3: in the overlay
capabilities of wafer steppers, a vector quantity defined at every
point on the wafer. It is the difference, R, between the vector position, P1, of a substrate geometry, and the vector position of the corresponding point, P0, in a reference grid. [SEMI P18-92]
regulator
A valve designed to reduce a high incoming pressure (for example,
from a cylinder) to a lower outlet pressure by automatically opening to allow flow until a desired, preset pressure on the outlet side
is reached and then automatically throttling closed to stop further
pressure increase. [SEMI International Standards 1990, Vol. 1,
Glossary]
relative humidity (RH)
The quantity of water vapor present in the atmosphere as a percentage of the quantity that would saturate at the existing temperature.
[SEMATECH]
relative minimum
In optics, a minimum in the amount of light transmitted through a
polarizer and analyzer combination that results when either the
polarizing angle or the analyzing angle is varied (with the other
angle fixed). [ASTM F1241]
reliability
Of equipment, the probability that the equipment will perform its
intended function, within stated conditions, for a specified period
of time. [SEMI E10-92]
relief valve
A pressure-relieving device, installed in a line or control component, designed and adjusted to release pressure that could damage
other components in the system. [SEMI International Standards
1990, Vol. 1, Glossary]
residue
Any undesirable material that remains on a substrate after any process step. [ASTM F127-84 and SEMI P3-90]
ρ)
resistivity (ρ
1: of a semiconductor, the ratio of the potential gradient parallel
with the current in the material to the current density. Units are
Ωcm. [SEMI M4-88] 2: the resistance that a unit volume of semiconductor material offers to the passage of electricity when the
electric current is perpendicular to two parallel faces. [SEMI M194] 3: the measure of difficulty with which charge carriers flow
through a material. Resistivity is the reciprocal of conductivity.
[ASTM F1241]
Document Title
Rev. A (variable)
Glossary
Term
Definition
resolution
The fineness of detail revealed by an optical device. Resolution is
usually specified as the minimum distance by which two lines in
the object must be separated before they can be revealed as separate lines in the image. [ASTM E7-90]
results data
A grid of measurements within the image processing commands
displaying resulting data from the configured input parameters,
cursor placement and histogram slider cursor placement.
results window
Window within the image processing commands displaying data
from the configured inputs window settings and cursor placement.
reticle
A very flat glass plate that contains the patterns to be reproduced
on a wafer; the image may be equal to or larger than the final projected image. Typical reticle substrate material is quartz, and typical magnifications are 10, 5, and 1 times final size. The reticle is
used in a stepper. [SEMATECH]
RMS amplitude
Root mean square (RMS) signal measured at the detector (TappingMode only).
rotation
In dielectrically isolated (DI) wafers, the angle of deviation
between the primary flat of the DI wafer and the X axis of the photolithography pattern. [SEMI M22-92]
roughness
1: the more narrowly spaced components of surface texture.
[ASTM F1241] 2: in flat panel display substrates, the criterion for
the smoothness of the sheet surface. [SEMI D9-94]
roughness average
In surface profilometry, the arithmetic average of the absolute values of the measure profile height deviations taken within the sampling length and measured from the graphical center line. [ASME
B46.1-85]
safe
Free of conditions that can cause occupational illness, injury, or
death to personnel, damage to or loss of equipment or property, or
damage to the environment. [SEMI S2-93]
sample angle
In electron spectroscopy for chemical analysis, the angle of the
surface with respect to a horizontal axis, which is defined as zero.
[SEMATECH]
sample flow rate
In particle contribution testing, the volumetric flow rate drawn by
the counter for particle detection. The counter may draw higher
flow for other purposes (for example, sheath gas). [SEMATECH]
Rev. A (variable)
Document Title
593
Glossary
Term
594
Definition
sample tilt angle
In scanning electron microscopy, the angle that the sample plane
makes with a line normal to the incoming electron beam.
[SEMATECH]
sample volume flow
The actual amount of liquid being monitored in an optical particle
counter, measured in units of liters or milliliters per minute.
[SEMATECH]
sampling distance
The lateral distance between areas to be measured for characterizing a surface. [SEMATECH]
SAWM
Surface acoustic wave microscopy.
scan
In scanning tunneling microscopy, movement of the microscope
tip relative to sample surface, continuously in one direction. Contrast raster. [SEMATECH] 2 v to move the microscope tip continuously in one direction. [SEMATECH]
scan area
In scanning tunneling microscopy, area defined by successive,
side-by-side scan lengths. [SEMATECH]
scan direction
In scanning tunneling microscopy, the direction in which the tip or
sample is continuously scanned, orthogonal to the Y-direction, in
the sample plane. [SEMATECH]
scan length
In scanning tunneling microscopy, the distance from start to end of
a single scan. [SEMATECH]
scan path
A linkage of registers in an integrated circuit with associated control mechanisms that enables the registers to be operated as a shift
register in addition to their normal mode of operation. This permits
the registers to be controlled and observed during test mode,
greatly enhancing testability. [1994 National Technology Roadmap
for Semiconductors]
scan rate
In scanning tunneling microscopy and atomic force microscopy,
the speed at which the tip or cantilever moves relative to the surface. [SEMATECH]
scanning probe microscopy (SPM)
Generation of graphical portraits of the control signal needed to
maintain a particular tip/sample interaction while scanning a sample surface with an atomically-sharp tip. The two primary forms of
SPM are scanning tunneling microscopy (STM) and atomic force
microscopy (AFM).
Document Title
Rev. A (variable)
Glossary
Term
Definition
scanning tunneling microscope
(STM)
An instrument for producing surface images with atomic scale lateral resolution, in which a fine probe tip is raster scanned over the
surface and the resulting tunneling current is monitored. [SEMATECH]
scheduled downtime
The total time during which equipment is not available to perform
its intended function because of planned downtime events.
SCM
Scanning capacitance microscopy.
scope display
Window that toggles with the video display and shows a scope
trace of the realtime scanning image.
score
The rank of a correlation between a saved model and an image.
When the model and a portion of an image correlate perfectly, the
score is 1000.
SEM
Scanning electron microscopy.
SEMI Equipment Communications
Standard 1 (SECS-I)
A SEMI Equipment Communications Standard (SEMI E4) that
addresses the mechanism for conveying information over an electrically controllable medium such as wire, fiber-optic cable, or
electromagnetic transmission. [SEMATECH] 2: a standard that
specifies a method for a message transfer protocol with electrical
signal levels based on EIA RS232-C. [SEMI E30-94]
SEMI Equipment Communications
Standard 2 (SECS-II)
A SEMI Equipment Communications Standard (SEMI E5) that
addresses how information should be structured for conveyance;
provides syntax and semantics. [SEMATECH] 2: a standard that
specifies a group of messages and the respective syntax and
semantics for those messages relating to semiconductor manufacturing equipment control. [SEMI E30-94]
semiconductor
An element that has an electrical resistivity in the range between
conductors (such as aluminum) and insulators (such as silicon
dioxide). Integrated circuits are typically fabricated in semiconductor materials such as silicon, germanium, or gallium arsenide.
[SEMATECH]
Semiconductor Equipment and
Materials International, Inc. (SEMI)
An international trade organization with membership from companies that supply equipment, materials, and services used in the
semiconductor manufacturing industry. [SEMATECH]
sensitivity
Amount of movement produced by a scanner piezo for a given
amount of voltage.
Rev. A (variable)
Document Title
595
Glossary
Term
596
Definition
server
A computer in a network that stores programs and files that other
computers in the network can access.
servos
Electromechanical devices for effecting control based on feedback
from a process.
setpoint
1: Operator-selected force threshold between tip and sample used
as the feedback control loop’s target. 2: In mass flow controller
testing, the electrical input signal to the device that sets the desired
value of the controlled flow. [SEMI E17-91]
sharpness
The visual impression of distinctness in a photographic reproduction, such as the edge of an image; the subjective effect of the
physical property acutance. [ASTM F127-84]
shutdown
The time required to put the equipment in a safe condition when
entering a nonscheduled state. It includes any procedures necessary to reach a safe condition. Shutdown is included only in nonscheduled time. [SEMI E10-92]
shutoff valve
A valve designed for and capable of positive closure to prevent
flow within a piping system. Typical shutoff valves include, but are
not limited to, manually-actuated, power-actuated, or spring-actuated fail-safe shutoff valves. Usually excluded are self-actuated
valves, such as check valves, pressure regulators, flow controllers,
and other devices that are not intended to provide positive shutoff
for safety isolation. [SEMI F1-90]
SI
Abbreviation for the International System of Units (in its original
French, le Système International d’Unités), which is a modernized
metric system accepted as the standard by (among others) the
American Society for Testing and Materials (ASTM), Semiconductor Equipment and Materials, International (SEMI), and the
Institute of Electrical and Electronics Engineers (IEEE). [SEMATECH]
Signal Access Module (SAM™)
An in-line hardware utility that lets you access or interrupt every
signal going into and out of your NanoScope controller for experimentation and diagnostic evaluation.
silicon probes
Electrical probes on an integrated circuit testing system that have
been etched monolithically from a silicon wafer using a variation
of integrated circuit processing technology. [1994 National Technology Roadmap for Semiconductors]
Document Title
Rev. A (variable)
Glossary
Term
Definition
site
On the front surface of a wafer, a rectangular area, the sides of
which are parallel and perpendicular to the primary flat or to the
notch bisector and the center of which falls within the fixed quality
area (FQA). [SEMI M1-94]
slot
The area in which a wafer is situated within a wafer carrier.
[SEMATECH] 2: a two-sided support for a standard wafer carrier
when the carrier is oriented with its axis in a vertical attitude.
[SEMI E22-91] 3: in cluster tools, a wafer location within a cassette module associated with the function of wafer I/O. Wafers
enter or leave the intratool environment through slots. Generally, a
slot, through its slot group, corresponds to a carrier location within
a wafer carrier. [SEMATECH]
SMIF
See integrated standard mechanical interface.
software interlock
Data exchange between two programs in order to verify that interlock conditions are met. [SEMATECH]
solvent
A substance capable of dissolving another substance, or substances, to form a solution. Examples are isopropyl alcohol,
methyl alcohol, and xylene. [SEMATECH]
SPC
Statistical process control.
specification
A detailed, precise description of a tool, material, process, method,
or procedure. [SEMATECH] 2: a detailed definition of the logic
used by an application or a program. [SEMATECH]
spike
In an epitaxial wafer surface, a tall, thin dendrite or crystalline filament that often occurs at the center or recess. [ASTM F1241] 2: an
extreme structure that has a large ratio of height-to-base width and
no apparent relation to epitaxial film thickness. [SEMATECH]
spring constant
Ratio of resultant force to deflection for a given cantilever or
spring.
standard
A method, rule, or description subscribed to by the consensus of
the appropriate industry and under control of the issuing organization for document revision. [SEMATECH]
Rev. A (variable)
Document Title
597
Glossary
Term
598
Definition
standard coordinates
In the measurement of photolithographic instruments, a system of
Cartesian coordinates with the Z axis along the optical axis of the
system and with the X and Y axes in the flat plane perpendicular to
the optical axis. The system user or vendor will specify the X and
Y directions in this plane for any particular equipment studies.
[SEMI P25-94]
standard deviation
A measure of the spread of the process output or the spread of a
sampling statistic from the process. The true standard deviation
(represented by the Greek letter sigma) is estimated by calculating
the difference of each individual observation from the average of
the observations, squaring the differences, finding the sum of the
squares, dividing by one less than the number of observations, and
finding the square root of the result. 2: a measure of the variation
among the members of a statistical sample. [SEMATECH] 3: in
the pressure testing of fluorocarbon tube fittings, a measure of the
variation among the members of a statistical sample. [SEMI F892]
standard pressure
In the calibration of mass flow devices, the pressure, in pascals,
specified as a reference for measurement and comparison. In the
semiconductor industry, this pressure is defined as 101.32 kPa (760
torr). [SEMI E29-93]
standard temperature
1: defined as 21°C– 5°C (70°F–10°F). [SEMI F4-90] 2: in the calibration of mass flow devices, the temperature, in degrees Celsius,
specified as a reference for measurement and comparison. In the
semiconductor industry, this temperature is defined as 0.0°C.
[SEMI E29-93]
standby state
One of the six equipment states or conditions; a period other than
nonscheduled time, in which the equipment is not operated,
although it is in a condition to perform its intended function, and
the chemicals and facilities are available. [SEMI E10-92]
standby time
The total time (other than nonscheduled time) during which equipment is not operated, although it is in a condition to perform its
intended function, and the chemicals and facilities are available.
[SEMI E10-92] Also see standby state and nonscheduled time.
statistical process control
Area of software that reports statistical deviations from recipe program configurations.
step
A single action in the performance of an operation, procedure, or
process. [SEMATECH] 2: the transitions from lower levels of a
wafer pattern to upper layers; the topography of a patterned wafer.
[SEMATECH]
Document Title
Rev. A (variable)
Glossary
Term
Definition
Step Height
The value of relative height measurements between two regions
(steps) on sample surfaces.
step response time
In mass flow controller testing, the time between the set point step
change and the moment the actual flow first enters the specified
band. [SEMI E17-91]
stepper
Equipment used to transfer a reticle pattern onto a wafer. [SEMATECH]
SthM
Scanning thermal microscopy.
STM
Scanning tunneling microscopy.
stress test
Exposure of components to extreme mechanical, temperature,
humidity, and biased conditions. [SEMATECH]
STS
Scanning tunneling spectroscopy.
submenu
Name for a drop-down menu resulting from hovering over a main
menu item.
substrate
In the manufacture of semiconductors, a wafer that is the basis for
subsequent processing operations in the fabrication of semiconductor devices or circuits. [ASTM F1241]
surf
To browse among Internet websites or TV channels.
surface
The boundary that separates an object from another object, substance, or space. [ASME B46.1-85] 2: in electron spectroscopy for
chemical analysis (ESCA), that volume from which the photoelectrons can escape. [SEMATECH]
surface imaging
Multilayer resists on which the image to be transferred is focused
onto a thin resist layer on the surface when developed. This thin
layer serves as a mask to pattern a thick resist layer that is
employed for forming the image on the wafer. [1994 National
Technology Roadmap for Semiconductors]
surface profile
The contour of the surface in a plane perpendicular to the surface,
unless some other angle is specified. [ASME B46.1-85]
Rev. A (variable)
Document Title
599
Glossary
Term
600
Definition
surface roughness
The finer irregularities of the surface texture, usually including
those irregularities that result from the inherent action of the production process. Examples include traverse feed marks and other
irregularities within the limits of the roughness sampling length.
[ASME B46.1-85]
surface texture
The topographic deviations of a real surface from a reference surface. NOTE—Surface texture includes roughness, waviness, and
lay. [ASTM F1241]
symmetrical valve
A valve bilaterally identical with respect to its center line and having similar flow and pressure characteristics in either direction.
[SEMATECH]
TappingMode™
Proprietary mode of scanning probe microscopy exclusive to Digital Instruments which utilizes an oscillating probe to obtain nanometric images. Advantages include negligible surface impacts,
high resolution and sensing of magnetic, electric and chemical
forces.
teach
To program an automated system to perform a sequence of operations and give the sequence a name so it may be subsequently
called to enact the sequence automatically.
temperature coefficient (Kt)
In regulator performance testing, the average rate of change of the
regulator’s set point per degree of temperature change, that is, Pa
per 1°C. The temperature coefficient may be positive (set point
increases with increasing temperature) or negative (set point
decreases with increasing temperature) or both. [SEMATECH]
Thermal Accessory
This accessory provides controlled heat to the bottom of the sample from ambient temperature to 50°C. It can be used with any
scanning technique (TappingMode™, contact mode, force measurements, etc.) and in liquid, ambient air, or controlled gaseous
environments.
thermal deposition
A process in which chemical dopants are introduced onto a silicon
wafer in a controlled atmosphere at temperatures typically greater
than 950°C. [SEMATECH]
thermocouple (TC)
A pair of dissimilar metal wires; used for accurate measurement of
temperature. [SEMATECH]
Document Title
Rev. A (variable)
Glossary
Term
Definition
thickness
Of an epitaxial layer, the distance from the surface of the wafer to
the layer-substrate interface. [SEMI M2-94 and ASTM F1241] 2:
of a semiconductor wafer, the distance through the wafer between
corresponding points on the front and back surfaces. [ASTM
F1241]
throughput
The number of wafers per hour through a machine, assuming
100% equipment uptime and a fully loaded machine. The number
is adjusted downward for any detracting factors one wants to consider (for example, downtime, setup time, idle time, etc.)[SEMATECH]
tilt
A small angle of offset from the normal horizontal or vertical surfaces of a cassette or container, designed to preferentially align or
keep wafers in their normal places. [SEMI E15-91] 2: the loss of
parallelism between the die pad and the Z-plane formed by the
dambars of a semiconductor devices leadframe. [SEMI G2-87]
tip
In a scanning tunneling microscope probe, a sharpened, nonoxidized, or minimally oxidized conductive point at the end.
[SEMATECH]
Tip Estimation
Refers to the approximation of current tip sharpness based on periodic checking of images generated by scanning with that tip.
tip holder
Removable appliance for mounting scanning probe microscope
probes. On MultiMode Scanning Probe Microscopes, the tipholder
is installed within the head of the microscope. On Dimension
Series Scanning Probe Microscopes, the tipholder plugs onto the
end of the scanner tube.
Tip Qualification
Software generates a tip status by comparing the estimated tip
diameter and aspect ratio with user-selected threshold and limit
values. The software will usually return one of the following tip
statuses: good, worn, or bad.
tm-AFM-air
TappingMode atomic force microscopy in air.
tm-AFM-fluid
TappingMode atomic force microscopy in fluid.
tm-AFM-pi
TappingMode atomic force microscopy phase imaging.
toggle
To switch a transistor between “off” and “on” states. [SEMATECH]
Rev. A (variable)
Document Title
601
Glossary
Term
Definition
tool
An instrument, machine, or device used to perform a task or to
measure a characteristic or quality. [SEMATECH] 2: any piece of
semiconductor fabrication or inspection equipment designed to
process wafers delivered in cassettes or cassettes in containers
intended for use with an automated material transport system.
[SEMI E15-91]
toxic
Describes a chemical or material that has the ability to seriously
injure biological tissue. Examples of toxic substances are phosphine, diborane, and arsine. [SEMATECH]
trackball
A ball mounted on a console and rotated to control the movement
of a cursor or mechanical motion (e.g., probe height).
transfer envelope
In automated material movement, the three-dimensional space
occupied during the transfer by the transfer object and all associated transfer mechanisms of both transfer partners. This defines the
space in which transfer activity occurs, and in which the potential
for physical interference with the transfer exists. [SEMI E32-94]
transfer job
In automated material movement, the set of atomic transfers constructed by the host to accomplish a cohesive material movement
objective. [SEMI E32-94]
transfer object
In automated material movement, a physical object that is transferred to and from equipment, such as a product material, an empty
carrier, or a carrier containing material to be processed. Tools, such
as stepper reticles, and expendable materials also may be transfer
objects. [SEMI E32-94]
transfer standard
In the calibration of mass flow devices, a device typically calibrated against a primary standard that can guarantee sufficient
accuracy to, in turn, calibrate another device. [SEMI E29-93]
trench
A deeply etched area used to isolate one area from another or to
form a storage capacitor on a silicon wafer. [SEMATECH]
U-Z
602
UFM
Ultrasonic force microscopy.
unload
To remove a cassette from the cassette stage of the equipment.
[SEMI E23-91]
Document Title
Rev. A (variable)
Glossary
Term
Definition
unscheduled downtime
The total time during which equipment is not in a condition to perform its intended function because of unplanned downtime events.
[SEMI E10-92]
user
In communications and control of semiconductor manufacturing
equipment, a human or humans who represent the factory and
enforce the factory operation model. A user is considered to be
responsible for many setup and configuration activities that cause
the equipment to best conform to factory operations practices.
[SEMI E30-94]
vacuum
An absence of air or other gas. [SEMATECH]
vacuum wand
A tool that uses suction on the back of an individual wafer to pick
up the wafer. [SEMATECH]
vapor pressure
The pressure exerted when a solid or liquid is in equilibrium with
its own vapor. Vapor pressure is a function of the substance and of
the temperature. [SEMI Chemicals/Gases, Vol. 1, 1990 (no longer
in print)]
vibration isolation
Provides the high damping needed for optimum isolation of high
ground noise sources.
video display
Window that displays the surface or tip during realtime scanning
(toggles with the scope display).
view
Name for a specific screen that appears in the client window for
configuring the settings to run the microscope or image processing
commands.
viscosity
Measurement of the flow properties of a material expressed as its
resistance to flow. [SEMATECH]
Vx Series Microscopes
An Atomic Force Microscope combined with a stylus profiler for
2-dimensional scans (larger than the range of the Atomic Force
Microscope’s piezoelectric actuators). Also referred to as the
Atomic Force Profiler (AFP).
wafer
In semiconductor technology, a thin slice with parallel faces cut
from a semiconductor crystal. [ASTM F1241]
wafer carrier
1: any vessel or supporting structure used to contain or transfer
wafers during processing. [SEMATECH] 2: a device for holding a
wafer for various processing steps in semiconductor manufacturing. [SEMI E1-86]
Rev. A (variable)
Document Title
603
Glossary
Term
604
Definition
wafer environment
The atmosphere contained within a chamber in which the wafers
are exposed. [SEMATECH]
wafer height
In quartz and high-temperature wafer carriers, the distance from
the horizontal center line of a wafer to the bottom plane of the
wafer carrier. [SEMI E2-86]
wafer tilt
In plastic and metal wafer carriers, the possible unparallel position
of a wafer in relation to the crossbar end of a wafer carrier when
the wafer carrier is resting on the crossbar end. [SEMI E1-86]
wafer transfer
The act of relocating wafers from one carrier into another. [SEMI
E1-86]
waviness
The more widely spaced component of surface texture. NOTEWaviness may be caused by such factors as machine or work piece
deflections, vibration, and chatter. Roughness may be considered
as superimposed on a wavy surface. [ASTM F1241]
working distance
In scanning electron microscopy, the distance between the bottom
of the objective lens and the sample. [SEMATECH]
workspace
A hierarchical arrangement of nodes. Each node corresponds to a
captured image, microscope settings, group or view. If a node corresponds to a view, clicking on the node displays a window that
contains information about the most immediate parent node. A
dockable window used for configuring a hierarchy of views.
X Series Microscopes
Similar to the Atomic Force Profiler with additional automated
features.
X-direction
See scan direction.
Y-direction
In characterizing surface roughness, the direction over which successive scans are taken by a microscope, orthogonal to the scan
direction, in the sample plane. [SEMATECH]
Z-direction
In characterizing surface roughness, the direction perpendicular to
the sample plane, orthogonal to the X and Y directions. [SEMATECH] Also called feature height direction.
zero effect
In flat panel displays, the change in zero due to a change in ambient temperature from one normal operating temperature to a second normal operating temperature. All other conditions must be
held within the limits of reference operating conditions. [SEMI
E18-91]
Document Title
Rev. A (variable)
Index
A
Abort, Capture Control panel 138
Abort, Capture menu 128
About...,di menu 20
Accept Threshold 184, 343
Administrator Access
definition 26
panel 26
Administrator Access panel
Change 27
Password 27
Administrator Access, di menu 26
Adobe Photoshop™ 530
Advanced
Force Mode 91
Advanced Features
Pattern Recognition 346
Advanced Features dialog box 346
Advanced, Microscope Select panel 23
AFM Control Panel
Highpass filter 41, 53, 58
Image mode 43, 95
Z range 41, 53, 58
Allow rotation, Scanner Calibration panel 154
Alt
See quick key
alt
See keystrokes
Amplitude limit, Feedback Controls panel 95
Amplitude setpoint, Main Controls panel 85
Amplitude setpoint, Sweep Controls panel 111
AN2HV 44
AN2LV 44
ANA1 95
Analog 95
Analog 2, Microscope Select panel 24
Analysis commands 257
Approach Continuous, Probe menu 99
Rev. C
Approach Single, Probe menu 100
Area Thresh (%rms), Roughness 359, 371
Area Thresh abs, Roughness 359
Area Thresh ref, Roughness 359, 371
Area Threshold, Roughness 371
arrow keys
See keystrokes
ASCII Export 530
ASCII Import 531
Aspect ratio, Scan Controls panel 35
ASTM E-42.14, reference to roughness 354
Auto Program Delay Panel 29
Auto Program Edit dialog box 344
Auto Program File 521
Auto Program, Depth 296
Auto Program, Grain Size 311
Auto Program, Particle Analysis 332
Auto Program, Roughness 362
Auto Program, Section 382, 383
Auto Program, Stepheight 393
Auto Program, Width 417, 424
Auto Reload Hardware 185
Auto Result File 524
Auto Scan, Capture menu 129
Auto Stepheight
Depth Scale 271
Slot Dimensions 271
Auto Tune Control panel
Peak offset 110
Auto Tune Controls panel
Auto Tune 110
End frequency 110
Start frequency 109
Auto Tune Controls panels
Target amplitude 110
Auto Tune, Auto Tune Controls panel 110
Autocovariance 258, 264–266
AutoFocus 189
Command Reference Manual
605
description 189
AutoFocus Curve Fit 188
AutoFocus Parameters dialog box 185
Av max depth (Rvm), Roughness 359, 371
Av max ht (Rpm), Roughness 359, 371
Average count, STS Plot i(s) panel 122
Average count, STS Plot i(v) panel 117
Average count, Z Scan Controls panel 92
Average cursor, Section 385
B
Ballistic Electron Emission Microscopy 116
Ballistic Electron Emission Microscopy (BEEM)
120
Baseline Path 182
Bearing 275–288
Bearing area, Bearing 286
Bearing Compare 288–291
Bearing depth, Bearing 287
Bearing length, Bearing 286
Bearing Percentage, Particle Analysis 329
Bearing ratio, Bearing 275, 279, 287
Bearing Save, Bearing 281
Bearing volume, Bearing 287
BEEM 116
BEEM (Ballistic Electron Emission Microscopy)
120
Bias derate, Z Calibration panel 163
Bias, Feedback Controls panel 43
Bidirectional scan 48
Bidirectional scan, Other Controls panel 48
box 12, 15
Box area, Bearing 285
Box Search Iterations 183
Box Size (pixels) 183
Box x dimension, Roughness 371
Box y dimension, Roughness 371
Browse 16, 204
C
Calibrate, Microscope menu 149
calibration standard 90
Camera AGC Delay 196
Cancel, Profile Select panel 147
Cantilever Tune Control Panel
Drive amplitude 111
Interleave Controls 112
Motor 111
Cantilever Tune panels 107–115
606
Cantilever Tune panels (display monitor)
Clear 114
Execute 114
Offset 114
Zoom In 114
Zoom Out 114
Capture 125–141
Capture Calibrationpanel 135
Capture direction, AutoScan panel 132
Capture Filename 138
Capture Filename, Capture menu 138
Capture number, AutoScan panel 131
Capture Plane, Capture menu 133
Capture pre-lines, AutoScan panel 132
Capture, Capture Calibration panel 137
Center line av, Bearing 286
Center Line of Roughness Curve, Section 389
Center Line, Section 386
Change, Administrator Access panel 27
Channel panels 57–64
Data center 61, 86
Data scale 60, 86
Data type 58, 86
Highpass filter 63
Line direction 61
Offline planefit 62
Realtime Planefit 62
Scan line 61
Clear, Bearing Compare 289
Clear, Cantilever Tune panels (display monitor)
114
Clear, Section 387
Color contrast 232, 239, 243
Color offset 232, 239, 243, 249
Color Settings 29
Color Table 535
Color table 231, 243, 248
Color table, Other Controls panel 47
Commands
Off-line File
Browse 204, 211
Copy 215
Delete 216
Dir Make 217
Move 213
Rename 216
Off-line Modify
Command Reference Manual
Rev. C
Contrast Enhance 447
Flatten Manual 463
Highpass 480
Invert 482
Lowpass 484
Median 486
Parameter 488
Planefit Auto 490
Planefit Manual 495
Remove Scan Lines 459
Resize 500
Spectrum 2D 503
Zoom 514
Off-line Utility
ASCII Export 530
ASCII Import 531
Auto Program File 521
Auto Result File 524
Color Table 535
Print 520
TIFF Export 528
TIFF Import 529
Off-line View
Graph 252
Line Plot 237
Surface Plot 241, 247
Top View 229
Real-time Image
Split 227
Subtract 225
Real-time Motor
Engage 71
Step Motor 73
Withdraw 72
Configure, Depth 294
Configure, Width 420
Contact AFM
Setpoint 42, 53
Continue, AutoScan panel 130
Continuous, Capture menu 128
control monitor
See monitor, control
Controller, Microscope Select panel 22
Convergence 187
Copy 215
Rev. C
Covariance, Autocovariance 266
CPU 7
Create Directory 217
ctrl
See keystrokes
Ctrl-E 72
Cursor 283
cursor 15, 16
Cursor covariance, Autocovariance 266
Cursor, Bearing 283
Cursor, Grain Size 313
Cursor, Particle Analysis 336
Cursor, Roughness 368
Cursor, Section 385
Cursor, Width 425
Curves, PSD Compare 357
Customize Menus 28, 229
cxx, Capture Calibration panel 135
cyy, Capture Calibration panel 135
D
DarkField Optics Parameters dialog box 196
Data center, Channel panels 61, 86
Data scale, Channel panels 60, 86
Data type, Channel panels 58, 86
Date / Time stamp, Capture Filename panel 140
default button 10
Deflection limit, Other Controls panel 46
Deflection setpoint, Main Controls panel 85
Delete 216
Delta 345
Delta 2D PSD, PSD Compare 357
Delta Power, PSD Compare 357
Delta X/Y 345
Depth 292–301
Depth at max, Depth 301
Depth Reference, Bearing 284
Depth Scale
and Auto Stepheight 271
Depth Scale, Bearing 284
Describe, Profile Select panel 145
Description, Microscope Select panel 22
Detector, Microscope / Calibrate menu 159
dfx, Capture Calibration panel 136
dfy, Capture Calibration panel 136
DI Menu
Auto Program Delay 29
Color Settings 29
Command Reference Manual
607
Customize 28
Customize Menus 28
di menu 20
About... 20
Administrator Access 26
Microscope Select 21–25
NanoScript 26
dialog box
Advanced Features 346
Auto Program Edit 344
AutoFocus Parameters 185
DarkField Optics Parameters 196
Edge Detection Parameters 197
General Vision Parameters 181
High Mag Optics Parameters 192
LargeField Optics Parameters 197
Low Mag Optics Parameters 190
Pattern Recognition 340
Shift Image 343
Vision System Real-time Control 180
Dialog Boxes
ASCII Export 530
ASCII Import 531
Auto Program File 521
Auto Result File 524
Clean Image 444
Contrast Enhance 448
Copy Files 215
Delete 216
Flatten Manual 463
Highpass 480
Invert 483
Lowpass 484
Median 486
Motor Control 73
Move Files 214
Parameter 488
Planefit Auto 491
Planefit Manual 496
Print 520
Remove Scan Lines 459
Rename 207, 216
Resize 500
Roughness 361
Section 381
Spectrum 2D, Box 1 504
Spectrum 2D, Box 2 504
608
Surface Plot 241
TIFF Export 528
TIFF Import 529
Top View 230
Zoom 515
digital signal processor
See DSP
Dilate Neighborhood size, Grain Size 309
Dilate Neighborhood size, Particle Analysis 330
Dilation, effects on Grain Size analysis 304
Dilation, effects on Particle Analysis See Grain
Size
Disp Max Hor Size (pix) 185
Display Hit List 346
Display mode, Z Scan Controls panel 92, 118,
122
display monitor
See monitor, display
Display Monitor menu bar
2D Filter
Mode 506
Zoom 507
Display video on Multi chan image 185
DOS prompt 7, 8
Down 141
down
See keystrokes
Down, Capture Control panel 137
Down, Capture menu 141
Drive amplitude, Feedback Controls panel 43,
54
Drive Feedback Controls panel 68–69
Drive feedback 68
Drive gain 69
Drive height 69
Drive setpoint 69
Drive time 69
Drive feedback, Drive Feedback Controls panel
68
Drive frequency, Feedback Controls panel 42, 54
Drive frequency, Sweep Controls panel 111
Drive gain, Drive Feedback Controls panel 69
Drive height, Drive Feedback Controls panel 69
Drive setpoint, Drive Feedback Controls panel 69
Drive time, Drive Feedback Controls panel 69
DSP 7
dsx, Capture Calibration panel 136
dsy, Capture Calibration panel 136
Dual Trace, Scope Mode menu 81
Command Reference Manual
Rev. C
dual-image 252
dxx, Capture Calibration panel 135
dyy, Capture Calibration panel 135
E
Edge Detection Parameters dialog box 197
Edge Enhance 458
Edit, Microscope Select panel 21
Edit, Serial Port Configuration panel 24
End frequency, Auto Tune Controls panel 110
Engage 71
Engage delta setpoint, Tapping Engage panel 164
Engage final delta setpoint, Tapping Engage panel
165
Engage min setpoint, Tapping Engage panel 165
Engage Setpoint, Other Controls panel 48
Engage test threshold, Tapping Engage panel 165
enter 12
Equivalent RMS, Power Spectral Density 354
Erase Scan Lines 459
Erode Neighborhood size, Grain Size 309
Erode Neighborhood size, Particle Analyis 330
Erosion, effects on Grain Size analysis 303
Erosion, effects on Particle Analysis. See Grain
Size
Esc 12
esc 12
Execute, Cantilever Tune panels (display
monitor) 114
Execute, Grain Size 313
Export Data, Power Spectral Density 351
Export, Particle Analysis 328
Extended offset der, Z Calibration panel 162
Extender, Microscope Select panel 22
F
F4
See keystrokes
Fast arg derate, Scanner Calibration panel 154
Fast arg, Scanner Calibration panel 153
Fast cal freq, Scanner Calibration panel 154
Fast fourier transform (FFT) 258
Fast mag0, Scanner Calibration panel 153
Fast mag1, Scanner Calibration panel 153
Feedback Controls panel 39–44
Amplitude limit 95
Bias 43
Drive amplitude 43, 54
Drive frequency 42, 54
Rev. C
Integral gain 40, 51
Look ahead gain 41, 52
Proportional gain 41, 52
Setpoint 41, 53
SPM feedback 39
file manager 13
Filename prefix, Capture Calibration panel 135
Filename, Capture Filename panel 140
Filter cutoff, Depth 301
Find Pattern 342
Fixed cursor, Section 385
Fixed Three cursors, Section 386
Fixed Two cursors, Section 386
Flatten Manual 463
Fluid Tapping Mode 49
Force Cal Control Panel
Number of samples 85, 117
Force Calibration panels 82–90
Force Mode
Integral gain 94
Proportional gain 95
Force Mode / Advanced 91
Force Mode options 82
Force Step panels 100
Frame Grabber board 174
Frequency, Power Spectral Density 353
G
General Vision Parameters dialog box 181
Geometric 476
Grain height 322
Grain Size 302–316
Grain Size Average 317–322
Grain size mean 316, 322
Grain size std dev 316, 322
Graph
Off-line View menu 252
graph 15
graph range 90
graph window 90
Graph, PSD Compare 357
GUI 7
See also graphical user interface 7
H
hardware 6
vision 173
Head Autocalibrate 524
Helpers
Command Reference Manual
609
Pattern Recognition 346
Helpers menu
Vision System Real-Time Control 197
High Mag (Hi Zoom) Pixel X/Y Size 195
High Mag (Lo Zoom) Pixel X/Y Size 194
High Mag Camera Enable 193
High Mag Camera Port 193
High Mag Optics Parameters dialog box 192
High Mag Stage X/Y/Z Location 193
High Mag, High Zoom Stage Accuracy 196
High Mag, Low Zoom Stage Accuracy 195
Highest Peak, Grain Size 307
Highpass 480
Highpass filter, Channel panels 63
Histogram %, Bearing 288
Histogram area, Bearing 288
Histogram Cursor, Bearing 284
Histogram depth, Bearing 288
Histogram filter cutoff, Depth 296
Histogram filter cutoff, Grain Size 308
Histogram filter cutoff, Particle Analysis 329
Histogram filter cutoff, Trench 416
Histogram filter cutoff, Width 423
Histogram length, Bearing 288
Hit Selection Criteria 183
I
Icons
Software System 4
Icons
Off-line 3
Real-time 6
Icons
Off-line 6
Real-time 5
icons 7
Illumination 232
illumination control 176
illumination system 174
Illumination weight 242
image 14
dual 16
Image Mode menu 77–80
Offset 79
Zoom In 79
Zoom Out 79
Image Mode options 88
Image Name 345
610
Img. Mean, Roughness 371
Img. Ra, Roughness 371
Img. Raw mean, Roughness 372
Img. Rmax, Roughness 372
Img. Rms (Rq), Roughness 372
Img. Srf. area diff, Roughness 372
Img. Srf. area, Roughness 372
Img. Z range, Roughness 372
Integral gain, Feedback Controls panel 40, 51
Integral gain, Force Mode panel 94
Intensity Min 185
Interleave Controls panel 49
Interleave mode 54
Lift scan height 56
Lift start height 57
Interleave mode, Interleave Controls panel 54
Invert 482
IO Base Address 182
K
keyboard 7, 11
keystrokes 12
pause 12
print scrn 12
Kurtosis, Roughness 372
L
Label 243, 248
LargeField Optics Parameters dialog box 197
Last Booted File 183
lc, Section 388
Leakage (STM Only) 169
Leakage, Microscope / Calibrate menu 169
Left 222
Left, Capture Control panel 137
left, right (arrow keys)
See keystrokes
Level, Stepheight 394
Lift scan height, Interleave Controls panel 56
Lift start height, Interleave Controls panel 57
LiftMode 55
Light hor angle 242
Light ver angle 242
Limits, Grain Size 308
Limits, Particle Analysis 330
Line density, Roughness 373
Line direction, Channel panels 61
Line length, Bearing 285
Line Plot 237
Command Reference Manual
Rev. C
Line plot shading 238
Line spacing 237
Line, Capture menu 141
Lineplot Dialog Box
Z range 248
Lines, PSD Compare 357
Lines, Scan Controls panel 37
Load, Profile Select panel 145
Locate Feature, Width 421
Logger 182
Look ahead gain, Feedback Controls panel 41,
52
Low Mag Camera Enable 190
Low Mag Camera Port 190
Low Mag Optics Parameters dialog box 190
Low Mag Pixel X Size 191
Low Mag Stage Accuracy 192
Low Mag Stage X/Y/Z Location 190
low magnification optics 174
Lowest Peak, Grain Size 307
Lowpass 484
M
Magic Parm 185
Main Controls panel
Amplitude setpoint 85
Deflection setpoint 85
Marker, Section 386
Max Acceptable Covariance 188
Max Allowable % X/Y Shift 341
Max Allowable X/Y Shift 341
Max Center Covariance 188
Max Chi Squared 187
Max depth (Rv), Roughness 359, 373
Max height (Rmax), Roughness 373
Max Iterations 187
Max peak ht (Rp), Roughness 359, 373
Max peak, Grain Size 307
Max Z - Hi Mag, Hi Zoom 186
Max Z - Lo Zoom & Lo Mag 186
Mean diameter 322
Mean Line of Profile, Section 389
Mean Roughness (Ra), Roughness 373
Mean size 322
Mean, Roughness 373
Measure, Stepheight 395
Measure, Width 426
Median 486
Rev. C
menu bar 2, 7, 9, 15
Microcope Select, di menu 21–25
microscope
AFM 90
Microscope / Calibrate menu
Detector 159
Leakage 169
Offset 170
Tapping Engage 163
Z 161
Microscope menu
Calibrate 149
Profile 144
Scanner 148
Microscope mode, Other Controls panel 45
Microscope Select panel
Advanced 23
Analog 2 24
Controller 22
Description 22
Edit 21
Extender 22
Microscope 22
Profile name 24
Scanner 23
Scanner File 24
Serial 23, 24
Vision 22
Microscope, Microscope Select panel 22
Min Autofocus Samps 188
Min Autofocus Vel (%) 188
Min peak, Grain Size 307
Min. Peak to Peak 329
Minimum Q 110
Minimum scan rate, Scanner Calibration panel
155
mode 7, 10
Mode, Width 426
Model Name 345
Model Pos X/Y 345
Model Size X/Y 345
monitor 7, 11
control 7, 9–14, 15
display 7, 14
menu bar 15
status bar 15
Motor Control panel
Command Reference Manual
611
Other Controls panel 44–49
Bidirectional scan 48
Color table 47
Deflection limit 46
Engage Setpoint 48
Microscope mode 45
Scan line shift 48
Units 47
Z limit 45
Z Modulation 49
Step size 87
Tip Down 87
Tip Up 87
mouse 11, 16
hardware 7
operations 16
two-button 14
Move 212
Move To Opt. Stand. X/Y Offset 194
Moving cursor, Section 385
MSM and HFMFM 431
P
N
NanoScope software 6, 7, 8
NanoScript
definition 26
NanoScript, di menu 26
Note 244
Note, Section 382
Note, Stepheight 392
notes
user entered 15
Num. pix. off for erode, Grain Size 309
Num. pix. off for erode, Particle Analysis 330
Num. pix. on for dilate, Grain Size 309
Num. pix. on for dilate, Particle Analsyis 330
Number of grains 316, 322
Number of peaks 322
Number of samples, STS Plot i(s) panel 122
Number of samples, Z Scan Controls panel 84,
117, 122
O
Off-line
definition
icons 4
Offline planefit, Channel panels 62
Offset (STM Only) 170
Offset, Cantilever Tune panels (display monitor)
114
Offset, Image Mode menu 79
Offset, Microscope / Calibrate menu 170
Offset, Section 387
1D ISO, PSD Compare 356
1D isotropic PSD, Power Spectral Density 347,
353
1D PSD, Power Spectral Density 347, 353
1D PSD, PSD Compare 356
Optical Standard 175
Orthogonality, Scanner Calibration panel 158
612
Parameter 247, 488
parameter 7
Parms menu
Vision System Real-Time Control 181
Particle Analysis 325–339
Passband,Spectrum 2DDisplay Monitor 506
Password, Administrator Access panel 27
pattern recognition 175
Pattern Recognition dialog box 340
pause
See keystrokes
Peak count, Roughness 359, 373
Peak offset, Auto Tune Controls panel 110
Peak Thresh (%rms), Roughness 360, 374
Peak Thresh ref, Roughness 360, 374
Peak Threshold, Roughness 359, 373
Peak to peak, Depth 301
Peak, Roughness 364
Peak, Valley, Section 389
Peaks, Depth 294
Photostyler™ 530
Piezo cal, Scanner Calibration panel 154
Pitch 239, 242, 249
Plane Fit, effects on roughness measurements 369
Planefit Auto 490
Planefit Manual 495
Planefit Tilt, Plane Fit Auto 492
Planefit Z offset, Plane Fit Auto 491
Plot labels 231, 238
Plot type 230, 241, 247
Plot, PSD Compare 356
Power Between Cursors, Power Spectral Density
354
Power Spectral Density 347–??
Power spectral density (PSD) 258
Power, Power Spectral Density 353
Command Reference Manual
Rev. C
Power, PSD Compare 356
Pre engage setpoint, Tapping Engage panel 167
Print 520
print screen
See keystrokes
Probe menu
Approach Continuous 99
Approach Single 100
Retract 99
Run Continuous 88
Run Single 88
Stop 88
Profile name, Microscope Select panel 24
Profile Peak, Section 389
Profile Select panel
Default 145, 147
Load 145
Profile Valley, Section 389
Profile, Microscope menu 144
Profile, Section 388
Proportional gain, Feedback Controls panel 41,
52
Proportional gain, Force Mode panel 95
PSD Compare 354–357
pull-down menu 7
Q
quick key 12, 13
R
Ra (Mean Roughness), Section 388
Ra, Roughness 369
Ramp channel, Z Scan Controls panel 116
Raw mean, Roughness 374
Real-time 7
definition
icons 4
Real-time Control Panels 34–69
Realtime Planefit, Channel panels 62
Reference, Grain Size 307
Relative covariance, Autocovariance 266
Rename 216
Resize 500
Restore, Stepheight 395
Retract, Probe menu 99
Retracted offset der, Z Calibration panel 162
Reverse Thresholding, Grain Size 309
Reverse Thresholding, Particle Analysis 330
Right, Capture Control panel 137
Rev. C
right, left (arrow keys)
See keystrokes
Rmax (Maximum Height), Section 388
RMS (Rq), Roughness 374
RMS roughness, Power Spectral Density 348
Root mean square (RMS) 258
Rotate 501
Rotate image, Rotate 502
rotated scans 524
Rotation 230, 237, 242, 247
rotational alignment 177
Roughness 358–377
Roughness Curve, Section 389
roughness measurements, Section 388
Roughness, effects of plane fitting on 369
Rounding, Scanner Calibration panel 158
Run Continuous, Probe menu 88
Run Single, Probe menu 88
Rz 370
Rz (Ten-Point Mean Roughness), Section 388
S
Samples/line, Scan Controls panel 37
Save Average, Bearing Compare 289
Scan angle, Scan Controls panel 36
Scan Controls panel 34–38
Scan Controls panel
Aspect ratio 35
Lines 37
Samples/line 37
Scan angle 36
Scan rate 36
Scan size 34, 36, 37
Slow scan axis 38
Tip velocity 37
X offset 35
Y offset 35
Scan line shift 48
Scan line shift, Other Controls panel 48
Scan line, Channel panels 61
Scan rate 84, 117, 122, 168
Scan rate, Scan Controls panel 36
Scan size, Scan Controls panel 34, 36, 37
Scanner
sensitivity 16
Scanner Calibration panel
Allow rotation 154
Fast arg 153
Command Reference Manual
613
Fast arg derate 154
Fast cal freq 154
Fast mag0 153
Fast mag1 153
Minimum scan rate 155
Orthogonality 158
Piezo cal 154
Rounding 158
Slow arg 157
Slow arg derate 157
Slow cal freq 157
Slow mag0 157
Slow mag1 157
X fast derate 151
X fast sens 151
X slow derate 152
X slow sens 151
Xs-Xf coup der 152
Xs-Xf coupling 152
Xs-Yf coup der 153
Xs-Yf coupling 153
Y fast derate 155
Y fast sens 155
Y slow derate 155
Y slow sens 155
Ys-Xf coup der 156
Ys-Xf coupling 156
Ys-Yf coup der 156
Ys-Yf coupling 156
Scanner File, Microscope Select panel 24
Scanner, Microscope menu 148
Scanner, Microscope Select panel 23
Scanning Tunneling Microscopy (STM)
Boost feedback 40
Linear feedback 39
Log feedback 40
Scope Mode menu 80–??
Dual Trace 81
Single Trace 81
Screen Layout, Roughness 362, 363
Search Control 185
Section 378–390
Select Pattern 342
Serial number, Z Calibration panel 162
Serial Port Configuration panel
Edit 24
View 25
614
Serial, Microscope Select panel 23, 24
Setpoint
Contact AFM 42, 53
STM 42, 54
TappingMode 42, 53
setpoint 90
Setpoint, Feedback Controls panel 41, 53
Sew tip, Tapping Engage panel 166
Sewing trigger, Tapping Engage panel 167
sfx, Capture Calibration panel 136
sfy, Capture Calibration panel 136
Shift Image 343
Shift Image dialog box 343
shift key
See keystrokes
shift parameters 340
Show tutorial, Stepheight 392
Single Trace, Scope Mode menu 81
Skewness, Roughness 374
Skip, Capture Control panel 137
Slot Dimensions
and Auto Stepheight 271
Slow arg derate, Scanner Calibration panel 157
Slow arg, Scanner Calibration panel 157
Slow cal freq, Scanner Calibration panel 157
Slow mag0 157
Slow mag0, Scanner Calibration panel 157
Slow mag1, Scanner Calibration panel 157
Slow scan axis, Scan Controls panel 38
Smash Q factor 110
Smoothing Pixels 187
space bar
See keystrokes
Spectrum 2D 503
Spectrum Zoom, Section 386
Split 227
SPM Accept Threshold 184
SPM Axis Backlash Comp 187
SPM feedback, Feedback Controls panel 39
ssx, Capture Calibration panel 136
ssy, Capture Calibration panel 136
Stage Not Initialized alert box 180
Start frequency, Auto Tune Controls panel 109
Start, AutoScan panel 129
Step Motor 73
Step scale
Parameter a 271
Parameter b 271
Command Reference Manual
Rev. C
Step size, Motor Control panel 87
Step XY 75
Stepheight 391–397
STM
Bias 43
Setpoint 42, 54
Stop, Probe menu 88
Stopband, Roughness 368
Stopband, Spectrum 2DDisplay Monitor 506
STS Plot i(s) 120–123
STS Plot i(s) panel
Number of samples 122
STS Plot i(v) 116–120
Subtract 225
Summit area diff, Roughness 360
Summit area, Roughness 360
Summit count, Roughness 360, 374
Summit curvature, Roughness 360, 375
Summit Cutoff (%rms), Roughness 360, 376
Summit Cutoff ref, Roughness 360, 375
Summit Cutoff, Roughness 360, 375
Summit density, Roughness 360, 376
Summit diameter, Roughness 360, 376
Summit rad. curv. 376
Summit rad. curv., Roughness 360, 376
Summit slope, Roughness 360, 377
Summit Thresh (% range), Roughness 376
Summit Thresh (%rms), Roughness 360
Summit Thresh ref, Roughness 360, 376
Summit Threshold, Roughness 360, 376
Summit, Roughness 366
Surface area diff, Roughness 377
Surface area ratio, Roughness 377
Surface Area, Roughness 365
Surface area, Roughness 377
Surface Plot 241
Surface Plot Dialog Box
Color contrast 243, 249
Color offset 243, 249
Color table 243, 248
Light hor angle 242
Light ver angle 242
Pitch 242, 249
Rotation 242, 247
Z range 243
Sweep Controls panel
Amplitude setpoint 111
Rev. C
Drive frequency 111
Sweep sample count 111
Sweep width 111
Sweep sample count, Sweep Controls panel 111
Sweep width, Sweep Controls panel 111
Sweep, View menu 107
Sync Workarkound (pixels) 185
system
icons 8
T
tab
See keystrokes
Tapping Engage panel
Engage delta setpoint 164
Engage final delta setpoint 165
Engage min setpoint 165
Engage test threshold 165
Pre engage setpoint 167
Sew tip 166
Sewing trigger 167
TM engage gain 166
Trigger safety 167
Tapping Engage, Microscope / Calibrate menu
163
TappingMode
Amplitude feedback 39
Deflection feedback 39
Engage Setpoint 48
Setpoint 42, 53
Z Modulation 49
Target 244
Target amplitude, Auto Tune Controls panels 110
Teach Pattern 341
Technical Support 16
10 pt mean (Rz), Roughness 370
Thermal imaging 59
Threshold height, Grain Size 302, 308
Threshold height, Grain Size Average 317
Threshold height, Particle Analysis 325, 329
TIFF 528, 529
TIFF Export 528
TIFF Import 529
time stamp
user entered 15
Tip Down, Motor Control panel 87
Tip Up, Motor Control panel 87
Tip velocity, Scan Controls panel 37
Command Reference Manual
615
tip-sample force 85
TM engage gain, Tapping Engage panel 166
Top View 229
Total peaks, Depth 301
Total power spectrum, Power Spectral Density
347
Total power, Power Spectral Density 354
Trench Analysis 418
Trench Analysis 413
Trench Configure Panel 415
Trench Panel 414
triangle
See cursor
Trigger safety, Tapping Engage panel 167
2D Filter
add 506
clear 506
delete 506
See also Spectrum 2D
2D, Power Spectral Density 352
2D ISO, PSD Compare 356
2D isotropic PSD, Power Spectral Density 347,
353
U
Undo 344
Units, AutoScan panel 130
Units, Other Controls panel 47
Units, Z Scan Controls panel 85, 118, 123
Up, Capture Control panel 137
Up, Capture menu 141
up, down (arrow keys)
See keystrokes
Use Boundary grains, Grain Size 309
Use Boundary grains, Particle Analysis 330
V
Velocity % Hi Mag, Hi Zoom 186
Velocity % Lo Zoom & Lo Mag 187
Video Based Stage Motion 185
View menu
Force Mode/Advanced 91
View menu
Sweep 107
View Pattern Rec Models 346
View, Serial Port Configuration panel 25
Vision Debug 182
vision hardware 173
Vision Image->Nano3 Image 197
Vision System
and AutoFocus 180
616
Vision System Real-time Control 181, 197
Helpers menu 197
Parms menu 181
Vision, Microscope Select panel 22
Visual Models Path 182
W
Wavelength, Power Spectral Density 353
Width 419–430
Withdraw 72
world wide web 16
X
X fast derate, Scanner Calibration panel 151
X fast sens, Scanner Calibration panel 151
X offset, Scan Controls panel 35
X offset, Z Scan Controls panel 92, 117, 122
X separation, AutoScan panel 130
X slow derate, Scanner Calibration panel 152
X slow sens, Scanner Calibration panel 151
X, Power Spectral Density 352
Xs-Xf coup der, Scanner Calibration panel 152
Xs-Xf coupling, Scanner Calibration panel 152
Xs-Yf coup der, Scanner Calibration panel 153
Xs-Yf coupling, Scanner Calibration panel 153
Y
Y fast derate, Scanner Calibration panel 155
Y fast sens, Scanner Calibration panel 155
Y offset, Scan Controls panel 35
Y offset, Z Scan Controls panel 92, 117, 122
Y separation, AutoScan panel 130
Y slow derate, Scanner Calibration panel 155
Y slow sens, Scanner Calibration panel 155
Y, Power Spectral Density 352
Ys-Xf coup der 157
Ys-Xf coup der, Scanner Calibration panel 156
Ys-Xf coupling 157
Ys-Xf coupling, Scanner Calibration panel 156
Ys-Yf coup der, Scanner Calibration panel 156
Ys-Yf coupling, Scanner Calibration panel 156
Z
Z Calibration panel
Bias derate 163
Extended offset der 162
Retracted offset der 162
Serial number 162
Zscan sens 162
Z command 7, 8
Z limit, Other Controls panel 45
Command Reference Manual
Rev. C
Z Modulation, Other Controls panel 49
Z range 231, 237, 243
Z range, Roughness 377
Z Scan Controls panel
Average count 92
Display mode 92, 118, 122
Number of samples 84, 117, 122
Ramp channel 116
Units 85, 118, 123
X offset 92, 117, 122
Y offset 92, 117, 122
Z scan start 83
Z scan start 90
Z scan start, Z Scan Controls panel 83
Z, Microscope / Calibrate menu 161
Zero crossing, Roughness 367
Zoom 514
Zoom In, Cantilever Tune panels (display
monitor) 114
Zoom In, Image Mode menu 79
Zoom Out, Cantilever Tune panels (display
monitor) 114
Zoom Out, Image Mode menu 79
Zoom Settings, Bearing 280
Zoom, Bearing 284
Zoom, Grain Size 315, 337
Zscan sens, Z Calibration panel 162
Rev. C
Command Reference Manual
617