Semiconductor Characterization System
08 Semiconductor
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Semiconductor Characterization System
Lab grade DC device characterization
4200-SCS
The easy-to-use Model 4200-SCS Semiconductor Characterization System performs lab grade DC and
pulse device characterization, real-time plotting, and analysis with high precision and sub-femtoamp
resolution. The 4200-SCS offers the most advanced capabilities available in a fully integrated characterization system, including a complete, embedded PC with Windows operating system and mass storage.
Its self-documenting, point-and-click interface speeds and simplifies the process of taking data, so users
can begin analyzing their results sooner. Additional features enable stress-measure capabilities suitable
for a variety of reliability tests.
The powerful test library management tools included allow standardizing test methods and extractions to ensure consistent test results. The Model 4200-SCS offers tremendous flexibility with hardware options that include four different switch matrix configurations and a variety of LCR meters and
pulse generators. A variety of customer support packages are also available, including applications
support, calibration, repair, and training.
• Intuitive, point-and-click Windows®based environment
• Unique Remote PreAmps extend the
resolution of SMUs to 0.1fA
• New pulse and pulse I-V capabilities
for advanced semiconductor testing
• New scope card provides integrated
scope and pulse measure
functionality
• Self-contained PC provides fast test
setup, powerful data analysis,
graphing and printing, and on-board
mass storage of test results
• Unique browser-style Project
Navigator organizes tests by device
type, allows access to multiple tests,
and provides test sequencing and
looping control
• Built-in stress/measure, looping,
and data analysis for point-and-click
reliability testing, including five
JEDEC-compliant sample tests
S E M I C O N D U C TO R T E S T
• Integrated support for a variety of
LCR meters, Keithley switch matrix
configurations, and both Keithley
Series 3400 and Agilent 81110 pulse
generators
• Includes software drivers for
Cascade Microtech Summit 12K
Series, Karl Suss Model PA-200 and
Model PA-300, Micromanipulator
Model 8860, Signatone CM500
Prober, and manual probers
• Advanced semiconductor modeling
support including Keithley supplied
IC-CAP device modeling package
driver and support for Cadence
BSIMProPlus/Virtuoso and Silvaco
UTMOST device modeling tools
1.888.KEITHLEY
A Total System Solution
The Model 4200-SCS provides a total system solution for DC and pulse characterization and reliability
testing of semiconductor devices, test structures, and materials. This advanced parameter analyzer provides intuitive and sophisticated capabilities for a wide variety of semiconductor tests. The Model 4200SCS combines unprecedented measurement speed and accuracy with an embedded Windows-based PC
and the Keithley Interactive Test Environment (KITE) to provide a powerful single-box solution. KITE
allows users to gain familiarity quickly with tasks such as managing tests and results and generating
reports. Sophisticated and simple test sequencing and external instrument drivers simplify performing
automated device and wafer testing with combined I-V and C-V measurements. The exceptional low current performance of the Model 4200-SCS makes it the perfect solution for research studies of single
electron transistors (SETs), molecular electronic devices, and other nanoelectronic devices that require
I-V characterization. The Model 4200-SCS can be used to make four-probe van der Pauw resistivity and
Hall voltage measurements, eliminating the need for a switch matrix and user-written code. With
remote preamps added, resistances well above 1012Ω can be measured.
The Model 4200-SCS is modular and configurable. The system supports up to eight Source-Measure
Units, including up to four high-power SMUs with 1A/20W capability. Also available are new pulse
and scope pulse measure modules.
Pulse I-V Package
The optional Pulse I-V package provides dual-channel pulse generation and measurement. Pulsed I-V
testing offers a new approach to characterization testing. Its high-speed pulses allow you to characterize materials and devices in applications like charge trapping for high κ gates and devices that
have self-heating effects.
Extended Measurement Resolution
An optional Remote PreAmp, the Model 4200-PA, extends the system’s measurement resolution from
100fA to 0.1fA by effectively adding five current ranges to either SMU model. The PreAmp module is
fully integrated with the system; to the user, the SMU simply appears to have additional measurement
resolution available. The Remote PreAmp is shipped installed on the back panel of the Model 4200SCS for local operation. This installation allows for standard cabling to a prober, test fixture, or
switch matrix. Users can remove the PreAmp from the back panel and place it in a remote location
(such as in a light-tight enclosure or on the prober platen) to eliminate measurement problems due
to long cables. Platen mounts and triax panel mount accessories are available.
KTE Interactive Software Tools
KTE Interactive includes four software tools for operating and maintaining the Model 4200-SCS in
addition to the Windows operating system:
• The Keithley Interactive Test Environment (KITE) is the Model 4200-SCS Windows device characterization application. It provides advanced test definition, parameter analysis and graphing, and
automation capabilities required for modern semiconductor characterization. Built-in looping,
stress-measure capabilities, and data management enable many types of reliability testing.
• Keithley User Library Tool (KULT)—Allows test engineers to integrate custom algorithms into KITE
using Model 4200-SCS or external instruments.
(U.S. only)
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Semiconductor Characterization System
4200-SCS
The Keithley Interactive
Test Environment (KITE)
is designed to let users
understand device
behavior quickly. When
running a test sequence,
users can view results
and plots for completed
tests while the sequence
is still running. As shown
here, multiple plots can
be viewed at the same
time to get a complete
picture of device performance.
Ordering Information
4200-SCS/F
Flat Panel Display
4200-SCS/C
Composite Front Bezel;
requires an external SVGA
display
Accessories Supplied
Reference and User Manual
on CD-ROM
236-ILC-3 Interlock Cable, 3m
Note: All 4200-SCS systems and
instrument options are supplied
with required cables of 2m
length.
Additional Instrumentation
4200-PG2
Dual-Channel Pulse
Generator
4200-SCP2
Dual-Channel Digital
Oscilloscope
4200-PIV
Complete Pulse I-V Package
Related Products
707A
Semiconductor
Switching Matrix
Mainframe
708A
Single Slot Switching
Matrix Mainframe
4200-SCP2-ACC
70MHz Scope Probe
7071
8×12 General Purpose
Matrix Card
7072
8×12 Semiconductor
Matrix Card
7072-HV 8×12 High Voltage
Semiconductor Matrix
Card
7174A 8×12 High Speed, Low
Current Matrix
1.888.KEITHLEY
• Keithley Configuration Utility (KCON)—Allows test engineers to define the configuration of GPIB
instruments, switch matrices, and analytical probers connected to the Model 4200-SCS. It also
provides system diagnostics functions.
• Keithley External Control Interface (KXCI)—The Model 4200-SCS application for controlling the
Model 4200-SCS from an external computer via the GPIB bus.
KITE Projects
A project is a collection of related tests, organized in a hierarchy that parallels the physical layout of
the devices on a wafer. KITE operates on projects using an interface called the project navigator. The
project navigator simplifies organizing test files, test execution, and test sequencing. The project navigator organizes tests into a logical hierarchy presented in a browser style format. This structure
allows users to define projects around wafer testing:
• The project level organizes subsites and controls wafer looping execution.
• The subsite level organizes devices and controls subsite test sequencing.
• The device level organizes test modules, manages test module libraries, and controls device test
sequencing.
• The test module level performs tests, analyzes data, and plots results.
Prober Control
Keithley provides integrated prober control for supported analytical probers when test sequencing is
executed on a user-programmable number of probe sites on a wafer. Contact the factory for a list of
supported analytical probers. A manual prober mode prompts the operator to perform prober operations during the test sequence.
Test Sequencing
KITE provides “point and click” test sequencing on a device, a group of devices (subsite, module, or
test element group), or a user-programmable number of probe sites on a wafer.
Keithley User Library Tool (KULT)
The Keithley User Library Tool is an open environment that provides you with the flexibility to create
your own custom routines as well as use existing Keithley and third-party C-language subroutine
libraries. User library modules are accessed in KITE through User Test Modules. Factory supplied
libraries provide up and running capability for supported instruments. Users can edit and compile
subroutines, then integrate libraries of subroutines with KITE, allowing the Model 4200-SCS to control an entire test rack from a single user interface. KULT is derived from the Keithley S600 and Series
S400 Parametric Test Systems. This simplifies migration of test libraries between the Model 4200-SCS
and Keithley parametric test systems.
(U.S. only)
www.keithley.com
Lab grade DC device characterization
12/30/06
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Semiconductor Characterization System
4200-SCS
Lab grade DC device characterization
Dual-Channel Pulse Generator
The optional, integrated dual-channel pulse generator adds pulsing to the
Model 4200-SCS’s DC source and measure capabilities. It supports voltage
pulses as short as 10ns in high speed mode or up to ±20V (into 50Ω) in
high voltage mode. Two pulse generators on one card provides you with
the flexibility to apply pulses to two points on a DUT, such as the gate and
the drain, simultaneously.
Using a supplied User Test Module, it is simple to incorporate pulse generation into KITE test sequences. The pulse generator can also be used as a
stand-alone pulse generator using the pulse generator’s Window’s GUI.
This GUI can control a wide range of variables, including pulse frequency,
duty cycle, rise/fall time, amplitude, offset, and the ability to trigger single
pulses and/or pulse chains.
The dual-channel pulse generator has a wide range of uses. Typical
applications include:
• Charge pumping to characterize interface state densities in MOSFET
devices
• Using AC stress pulses of varying frequencies to simulate real-world
AC signals applied to clocked devices
• Basic clock generation for test vectoring
and failure analysis
• Digital triggering
The pulse generator can be purchased as
an upgrade to existing systems (KTEI
version 6.0 or above required) or as an
option for new systems.
KEY PULSE GENERATOR SPECIFICATIONS
Frequency Range
1Hz–50MHz
Pulse Width
Programmable from 10ns to near DC
Channels
Dual independent channels
Pulse Amplitude
Range
100mV–20V into 50Ω,
100mV–40V into 1MΩ
Programmable
Parameters
Pulse width, duty cycle, rise time,
fall time, amplitude, offset
Dual-Channel Digital Oscilloscope
The optional dual-channel digital oscilloscope places more than the performance of a bench-top oscilloscope into your 4200-SCS. It also supports
time-domain measurements of pulse waveforms and monitors the reactions of devices under test to those pulses. Some of the features of this
oscilloscope include: a broad selection of acquisition modes, triggers,
measurements, calculations, and up to four reference waveforms.
S E M I C O N D U C TO R T E S T
The dual-channel oscilloscope integrates directly into the Model 4200-SCS
chassis. It can be purchased as an upgrade to existing systems (KTEI version 6.0 or above required) or as an option for new systems.
KEY OSCILLOSCOPE SPECIFICATIONS
Bandwidth
DC to 750MHz
Channels
2
Maximum Sample Rate
1.25 giga-samples per second per channel
1.888.KEITHLEY
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Semiconductor Characterization System
4200-SCS
The Pulse I-V software controls sourcing (from the pulse generator) and data acquisition (from the
oscilloscope) to automate a variety of Pulse I-V tests. Running in the Model 4200-SCS’s proven interface, the Pulse I-V software provides instrument setup and control, data storage, and presentation.
The innovative software includes both cable compensation and a solution to the load-line effect, producing pulsed-based I-V transistor curves, such as the VDS-ID family of curves and VGS-ID for voltage
threshold extraction.
Upper Interfacial Region
High κ Film
Lower Interfacial Region
Bulk Si
Pulse I-V measurement capabilities are increasingly critical for high κ gate stack characterization and isothermal testing of new
devices.
The Pulse I-V bundle allows the Model 4200-SCS to support a wide range of applications, such as
charge trapping for high κ dielectric characterization, isothermal testing of devices and materials subject to self-heating effects, charge pumping, AC stress testing, clock generation, and mixed signal
device testing.
The specialized interconnect
solves most of the problems
encountered in high speed
pulse testing, such as:
DC Source
• Combining pulse and DC
sources to a single DUT pin
to permit both DC and
pulse characterization without recabling or switching
DC
DC Source
• Impedance matching for
pulse integrity to minimize
reflection
To minimize the signal reflections due to poor
impedance matching that often plague “do-ityourself” pulse testing systems, Keithley’s
Pulse I-V package includes a system interconnect setup that provides AC/DC coupling to
connect the pulse generator and the DC instrumentation.
• Straightforward cabling and
connection to the DUT for
easy setup
DC
Trigger
AC+DC
Out
Dual-Channel
Pulse Generator
Pulse testing can characterize a device with little to no isothermal
degradation.
1.888.KEITHLEY
Dual-Channel
Digital
Oscilloscope for
Measurement
The Pulse I-V package includes everything needed to implement
a turnkey system for pulsed I-V testing of leading-edge devices
and materials. Pieces included in the package are:
• Integrated dual-channel pulse generator
• Dual-channel digital oscilloscope
• Pulse I-V control software (patent pending)
• Interconnect designed to minimize the signal reflections common to pulse I-V testing (patent pending)
• All required connectors and cables
• Sample projects for:
- Pulse I-V isothermal testing of FinFETs, SOI devices, and
other devices with self-heating problems
- Charge-trap testing for high κ gate stack characterization
(U.S. only)
www.keithley.com
AC+DC
Out
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Poly Si
Gate Electrode
Lab grade DC device characterization
Pulse I-V Solution Package
The Pulse I-V package provides a turnkey pulse I-V solution. It is a comprehensive package of hardware and software, designed to integrate seamlessly with the Model 4200-SCS workstation. It combines the dual-channel pulse generator, dual-channel digital oscilloscope, specialized interconnect,
and patented Pulse I-V software.
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Semiconductor Characterization System
4200-SCS
ACCESSORIES AVAILABLE
Lab grade DC device characterization
COMPUTER OPTIONS
4200-FPD-RM
1V 17˝ TFT Display with keyboard and
pointing device
4200-MOUSE
Microsoft 2 Button Mouse
CABINETS AND MOUNTING ACCESSORIES
4200-CAB-20UX 20U Cabinet (35˝)
4200-CAB-25UX 25U Cabinet (44˝)
4200-CAB-34UX 34U Cabinet (60˝)
4200-RM
Slide Rack Mounting Kit for 4200-SCS/F and
4200-SCS/C
4200-CRT-RM
Fixed Rack Mounting Kit for external CRT
4200-KEY-RM
Slide Rack Mounting Kit for standard keyboard
and pointing device
REMOTE PREAMP MOUNTING OPTIONS
4200-MAG-BASE Magnetic Base for mounting 4200-PA on a
prober platen
4200-VAC-BASE Vacuum Base for mounting 4200-PA on a
prober platen
4200-TMB
Triaxial mounting bracket for mounting
4200-PA on a triaxial mounting panel
OTHER ACCESSORIES
4000-CASE
Wheeled Carrying Case
4200-MAN
Printed Manual Set
4200-CART
Roll-Around Cart
SWITCH MATRIX OPTIONS
Ultra Low Current 100fA offset, 30µV offset, remote or local sense
Low Current
1pA offset, 40µV offset, 12–360 pins, local
sense only
General Purpose 100pA offset, 5µV offset, 12–360 pins, remote
sense
DRIVER OPTIONS
4200-ICCAP-6.0 IC-CAP Driver and Source Code for 4200-SCS:
UNIX/Windows
PULSE GENERATOR, OSCILLOSCOPE, AND
ACCESSORIES
4200-PG2
Dual-Channel Pulse Generator
4200-SCP2
Dual Channel Digital Oscilloscope
4200-PIV
Complete Pulse I-V Package
4200-SCP2-ACC Dual-Channel Digital Oscilloscope Accessory
Kit (70MHz probe)
8101-4TRX
4-Pin Transistor Fixture
8101-PIV
Pulse I-V Demo Fixture
ADDITIONAL CABLES AND CONNECTORS
4200-RPC-0.3
Remote PreAmp Cable, 0.3m (for use inside
prober shield)
4200-RPC-2
Remote PreAmp Cable, 2m (for remote location
of 4200-PA, one included with each 4200-PA)
4200-RPC-3
Remote PreAmp Cable, 3m (for remote location
of 4200-PA)
4200-RPC-6
4200-TRX-0.3
4200-TRX-1
4200-TRX-2
4200-TRX-3
4200-MTRX-1
4200-MTRX-2
4200-MTRX-3
236-ILC-3
7007-1
7007-2
7078-TRX-BNC
CURRENT SPECIFICATIONS
CURRENT
RANGE1
4200-SMU and
4210-SMU with
optional
4200-PA PreAmp
SPECIFICATION CONDITIONS
MAX.
VOLTAGE
MEASURE
SOURCE
21 V
210 V
21 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
ACCURACY
RESOLUTION3 ±(% rdg + amps)
1 µA
0.100% + 200 µA
100 nA
0.045% + 3 µA
100 nA
0.045% + 3 µA
10 nA
0.037% + 300 nA
1 nA
0.035% + 30 nA
100 pA
0.033% + 3 nA
10 pA
0.050% + 600 pA
1 pA
0.050% + 100 pA
100 fA
0.050% + 30 pA
10 fA
0.050% + 1 pA
3 fA
0.050% + 100 fA
1 fA
0.100% + 30 fA
0.3 fA
0.500% + 15 fA
100 aA
1.000% + 10 fA
ACCURACY
RESOLUTION3 ±(% rdg + amps)
50 µA
0.100% + 350 µA
5 µA
0.050% + 15 µA
5 µA
0.050% + 15 µA
500 nA
0.042% + 1.5 µA
50 nA
0.040% + 150 nA
5 nA
0.038% + 15 nA
500 pA
0.060% + 1.5 nA
50 pA
0.060% + 200 pA
5 pA
0.060% + 30 pA
500 fA
0.060% + 3 pA
50 fA
0.060% + 300 fA
15 fA
0.100% + 80 fA
5 fA
0.500% + 50 fA
1.5 fA
1.000% + 40 fA
1 A
100 mA
100 mA
10 mA
1 mA
100 µA
10 µA
1 µA
100 nA
10 nA
1 nA
100 pA
10 pA
1 pA
4210-SMU2
High
Power
4200-SMU2
SMU
Medium
Power
SMU
Remote PreAmp Cable, 6m (for remote location
of 4200-PA)
Ultra Low Noise PreAmp Triax Cable, 0.3m
(Triax-Triax, connects 4200-PA to a test fixture,
recommended for remote location of the
4200-PA)
Ultra Low Noise PreAmp Triax Cable, 1m
(Triax-Triax, connects 4200-PA to a test fixture)
Ultra Low Noise PreAmp Triax Cable, 2m
(Triax-Triax, connects 4200-PA to a test fixture,
two included with each 4200-PA)
Ultra Low Noise PreAmp Triax Cable, 3m
(Triax-Triax, connects 4200-PA to a test fixture)
Ultra Low Noise SMU Triax Cable, 1m (Mini
Triax-Triax, connects 4200 SMUs to a test
fixture)
Ultra Low Noise SMU Triax Cable, 2m (Mini
Triax-Triax, connects 4200 SMUs to a test fixture, two included with each 4200 SMU that is
not configured with a Remote PreAmp)
Ultra Low Noise SMU Triax Cable, 3m (Mini
Triax-Triax, connects 4200 SMUs to a test
fixture)
Interlock Cable, 3m (one included with each
4200-SCS)
Shielded IEEE-488 Cable (1m)
Shielded IEEE-488 Cable (2m)
Coaxial connector for connecting coax instruments to a triax matrix
Specifications are the performance standards against
which the Models 4200-SMU, 4210-SMU, and 4200-PA
are tested. The measurement and source accuracy are
specified at the termination of the supplied cables.
• 23°C ±5°C, within 1 year of calibration, RH between
5% and 60%, after 30 minutes of warm-up.
• Speed set to NORMAL.
• Guarded Kelvin connection.
• ±1°C and 24 hours from ACAL.
S E M I C O N D U C TO R T E S T
VOLTAGE COMPLIANCE: Bipolar limits set with a single value between full scale and 10% of selected voltage range.
VOLTAGE SPECIFICATIONS
VOLTAGE
RANGE1
200 V 4
20 V
2 V
200 mV
MAX.
CURRENT
MEASURE
4200-SMU
4210-SMU
10.5 mA
105 mA
105 mA
105 mA
105 mA
1.05 A
1.05 A
1.05 A
Resolution3
200 µV
20 µV
2 µV
1 µV
SOURCE
Accuracy
±(% rdg + volts)
0.015% + 3 mV
0.01 % + 1 mV
0.012% + 150 µV
0.012% + 100 µV
Resolution3
5 mV
500 µV
50 µV
5 µV
Accuracy
±(% rdg + volts)
0.02% + 15 mV
0.02% + 1.5 mV
0.02% + 300 µV
0.02% + 150 µV
CURRENT COMPLIANCE: Bipolar limits set with a single value between full scale and 10% of selected current range.
1.888.KEITHLEY
(U.S. only)
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Semiconductor Characterization System
4200-SCS
Supplemental information is not warranted but provides useful information about
the Models 4200-SMU, 4210-SMU, and 4200-PA.
COMPLIANCE ACCURACY:
Voltage compliance equals the voltage source specifications.
Current compliance equals the current source specifications.
OVERSHOOT: <0.1% typical.
Voltage: Full scale step, resistive load, and 10mA range.
Current: 1mA step, RL = 10kΩ, 20V range.
RANGE CHANGE TRANSIENT:
Voltage Ranging: <200mV.
Current Ranging: <200mV.
ACCURACY SPECIFICATIONS: Accuracy specifications are multiplied by one of the
following factors, depending upon the ambient temperature and humidity.
% Relative Humidity
Temperature
5–60
60–80
10°–18°C
×3
×3
18°–28°C
×1
×3
28°–40°C
×3
×5
MAXIMUM LOAD CAPACITANCE: 10nF.
MAXIMUM GUARD OFFSET VOLTAGE: 3mV from FORCE.
GUARD OUTPUT IMPEDANCE: 100kΩ.
MAXIMUM GUARD CAPACITANCE: 1500pF.
MAXIMUM SHIELD CAPACITANCE: 3300pF.
4200-SMU and 4210-SMU SHUNT RESISTANCE (FORCE to COMMON): >1012Ω
(100nA–1µA ranges).
4200-PA SHUNT RESISTANCE (FORCE to COMMON): >1016Ω (1pA and 10pA
ranges), >1013Ω (100pA–100nA ranges).
OUTPUT TERMINAL CONNECTION: Dual triaxial connectors for 4200-PA, dual
mini-triaxial connectors for 4200-SMU and 4210-SMU.
NOISE CHARACTERISTICS (typical):
Voltage Source (rms):
0.01% of output range.
Current Source (rms):
0.1% of output range.
Voltage Measure (p-p):
0.02% of measurement range.
Current Measure (p-p):
0.2% of measurement range.
MAXIMUM SLEW RATE: 0.2V/µs.
REMOTE SENSE: <10Ω in series with FORCE terminal not to exceed a 5V difference between FORCE and SENSE terminals. ±30V maximum between COMMON
and SENSE LO.
Additional Specifications
GENERAL
MAX. OUTPUT POWER: 22 watts for 4210-SMU and 2.2 watts for 4200-SMU (both
are four-quadrant source/sink operation).
DC FLOATING VOLTAGE: COMMON can be floated ±32 volts from chassis ground.
VOLTAGE MONITOR (SMU in VMU mode):
Voltage
Range
200 V
20 V
2 V
200 mV
Measure
Accuracy
±(%rdg + volts)
0.015% +
3 mV
0.01% +
1 mV
0.012% + 110 µV
0.012% + 80 µV
Measure
Resolution
200 µV
20 µV
2 µV
1 µV
INPUT IMPEDANCE: >1013Ω.
INPUT LEAKAGE CURRENT: <30pA.
MEASUREMENT NOISE: 0.02% of measurement range (rms).
Model 4200-SCS specifications
Supplemental Information
TEMPERATURE RANGE
Operating: +10° to +40°C.
Storage:
–15° to +60°C.
HUMIDITY RANGE
Operating: 5% to 80% RH, non-condensing.
Storage:
5% to 90% RH, non-condensing.
ALTITUDE
Operating: 0 to 2000m.
Storage:
0 to 4600m.
POWER REQUIREMENTS: 100V to 240V, 50 to 60Hz.
MAXIMUM VA: 500VA.
REGULATORY COMPLIANCE:
Safety: Low Voltage Directive 73/23/EEC.
EMC: Directive 89/336/EEC.
DIMENSIONS: 43.6cm wide × 22.3cm high × 56.5cm deep (175⁄32 in × 83⁄4 in
× 221⁄4 in).
WEIGHT (approx.): 29.7kg (65.5 lbs) for typical configuration of four SMUs.
I/O PORTS: SVGA, Printer, RS-232, GPIB, Ethernet, Mouse, Keyboard.
DIFFERENTIAL VOLTAGE MONITOR:
GROUND UNIT
Voltage error when using the ground unit is included in the 4200-SMU, 4210-SMU,
and 4200-PA specifications. No additional errors are introduced when using the
ground unit.
OUTPUT TERMINAL CONNECTION: Dual triaxial, 5-way binding post.
MAXIMUM CURRENT: 2.6A using dual triaxial connection; 4.4A using
5-way binding posts.
LOAD CAPACITANCE: No limit.
CABLE RESISTANCE: FORCE ≤1Ω, SENSE ≤10Ω.
1.888.KEITHLEY
NOTES
1. All ranges extend to 105% of full scale.
2. Specifications apply on these ranges with or without a 4200-PA.
3. Specified resolution is limited by fundamental noise limits. Measured resolution is 61⁄2 digits on
each range. Source resolution is 41⁄2 digits on each range.
4. Interlock must be engaged to use the 200V range.
(U.S. only)
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Differential Voltage Monitor is available by measuring with two SMUs in VMU mode
or by using the low sense terminal provided with each SMU.
08 Semiconductor
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Semiconductor Characterization System
4200-SCS
4200-PG2 Specifications1
4200-SCP2 Specifications1
PULSE/LEVEL2
ANALOG INPUT1
50 Ω into 50 Ω
50 Ω into 1 MΩ
Accuracy
50 Ω into 50 Ω
50 Ω into 1 MΩ
VOUT
Model 4200-SCS specifications
AMPLITUDE/LEVEL
RESOLUTION
OUTPUT CONNECTORS
SOURCE IMPEDANCE
Accuracy
SHORT CIRCUIT CURRENT
CURRENT INTO 50Ω LOAD
AT FULL SCALE
BASELINE NOISE
OVERSHOOT/PRE-SHOOT/RINGING
OUTPUT LIMIT
HIGH SPEED
–5 V to +5 V
–10 V to +10 V
±(3% + 50 mV)
1 mV
2 mV
SMA
50 Ω nominal
±0.5%
±200 mA
HIGH VOLTAGE
–20 V to +20 V
–40 V to +40 V
±(3% + 100 mV)
5 mV
10 mV
SMA
50 Ω nominal
±0.5%
±800 mA peak
±100 mA typical
±400 mA typical
±(0.1 % + 5 mV) RMS typical
±(0.1 % + 5 mV) RMS typical
±5% of amplitude ±20 mV
±5% of amplitude ±80 mV
Programmable limit to protect the DUT
TIMING
HIGH SPEED
1 Hz to 50 MHz
10 ns
FREQUENCY RANGE
TIMING RESOLUTION
RMS JITTER (period, width)
PERIOD RANGE
Accuracy
PROGRAMMABLE
TRANSITION TIME
(0–100%)
TRANSITION SLEW RATE3
Accuracy
Linearity
TYPICAL MIN. TRANSITION
TIME (10–90%)
Pulse Vp-p (into 50Ω)
0.01 % + 200 ps typical
20 ns to 1s (See Figure 1.)
500 ns to 1 s
±1%
±1%
10 ns to (period – 10 ns)
250 ns to (period – 100 ns)
±(3% + 200 ps)
±(3% + 5 ns)
Accuracy
PULSE WIDTH RANGE
HIGH VOLTAGE
1 Hz to 2 MHz
10 ns
10 ns – 1 s
100 ns – 1 s
±1% for transition time ≥100 ns
±1% for transition time ≥1 µs
3% for transition time ≥100 ns
3% for transition time ≥500 ns
< 15 ns
< 150 ns
Pulse period and width are variable in 10ns steps
without any output glitches or dropouts.
70ns
10V
Not
Permitted
High Speed Range
Pulse Period
Operating Region
3V
20ns
70ns
ANALOG-TO-DIGITAL CONVERTER
RESOLUTION: 8-bit.
SAMPLE RATE: 2.5kS/s to 1.25GS/s in 1, 2.5, 5 steps. 2.5GS/s (1
channel interleaved).
MEMORY DEPTH: 1M samples/channel (2M using 1 channel
interleaved).
ACQUISITION TIME RANGE: 50ns to 419 seconds.
ACQUISITION MODES: Normal, Average, Envelope, and
Equivalent-Time.
TRIGGER
TRIGGER SOURCE: Channels 1 to 2, External, Pattern, Software.
POST-TRIGGER DELAY: 0 to 655 seconds.
PRE-TRIGGER DELAY: 0 to waveform time.
TRIGGER HOLD OFF RANGE: 0 to 655 seconds.
TRIGGER MODES: Edge or Pulse Width.
EDGE TRIGGER MODE: Rising or Falling Edge.
PULSE WIDTH RANGE: 20ns to 655 seconds, 10ns resolution.
EXTERNAL TRIGGER INPUT: TTL compatible, 10kΩ input
impedance.
CONNECTOR: SMB.
OPTIONAL SCOPE PROBE:
4200-SCP2-ACC
1s
Period
BANDWIDTH: 70MHz.
ATTENUATION: 1×.
MAX. DC: 300V DC rated.
LOADING: 100pF and 1MΩ.
LENGTH: 1 meter.
CONNECTOR: BNC.
Figure 1. Permitted area of operation.
S E M I C O N D U C TO R T E S T
NO. OF CHANNELS: 2.
BANDWIDTH (50Ω): DC to 750MHz.
BANDWIDTH (1MΩ): DC to 500MHz.
FULL SCALE INPUT RANGE (50Ω): 0.05, 0.1, 0.25, 0.5, 1, 2, 5,
10 (Vp-p).
FULL SCALE INPUT RANGE (1MΩ): 0.1, 0.2, 0.5, 1, 2.5, 5, 10,
20, 50, 100 (Vp-p).
DC GAIN ACCURACY: <±1% of full scale.
IMPEDANCE: 1MΩ||12pF or 50Ω.
IMPEDANCE ACCURACY: ±1%.
COUPLING: DC or AC.
OFFSET ADJUST: ±(full scale range/2).
OFFSET ACCURACY: ±(1% offset + 1% full scale).
INPUT CONNECTOR: BNC.
ABSOLUTE MAXIMUM INPUT (50Ω): ±5VDC.
ABSOLUTE MAXIMUM INPUT (1MΩ): ±150 DC, derated
20dB/decade above 1MHz.
NOTES
1. Unless stated otherwise, all specifications assume a 50Ω termination.
2. Level specs are valid after 50ns typical settling time (after slewing) for the
high speed mode and after 500ns typical settling time (after slewing) for
the high voltage mode into a 50Ω load.
3. Specifications apply to a 10–90% transition, typical.
All specifications apply at 23° ±5°C, within 1 year of calibration, RH between
5% and 60%, after 30 minutes of warmup.
NOTES
1. Inputs are referenced to 4200 chassis ground.
All specifications apply at 23° ±5°C, within 1 year of calibration, RH between
5% and 60%, after 30 minutes of warmup.
1.888.KEITHLEY
(U.S. only)
www.keithley.com
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
08 Semiconductor
12/30/06
7:32 PM
Page 275
Semiconductor Characterization System
4200-SCS
4200-PIV Typical Specifications1
Measurement Accuracy
Max. Current Measure
Resolution
Sample Rate
Duty Cycle
DC Offset
Min. Transition Time
Pulse Source
Voltage Range
Pulse Width
With 4200 Remote Bias Tee4 (Figure 2)
<4% of signal ±1mV
100 mA
Maximum 5µA, 250µV
8-bit A/D converter
1.25 Gsample/s
<0.1%
±200 V
10 ns2
Without 4200 Remote Bias Tee (Figure 3)
N/A
400 mA
Maximum 5µA, 250µV
8-bit A/D converter
1.25 Gsample/s
See PG2 specs
N/A
See PG2 specs
0 to ±5V into gate2
0 to ±5V into gate, 40Vpp into drain
40 ns to 150 ns
See PG2 specs
SMU TYPICAL DC PERFORMANCE (with 4200 Remote Bias Tee):
Leakage: 1–10nA/V.3
Noise: 1–10nA RMS.
Max. Voltage: 200V (>40V requires safety interlock and related
precautions).
Max. Current: 0.5A.
4200 REMOTE BIAS TEE TYPICAL PERFORMANCE:
Band Pass: 10kHz–300MHz (3dB).
Power Divider Max. Power Input: 0.125W DC.
NOTES
1.
2.
3.
4.
Unless stated otherwise, all specifications assume a 50Ω termination.
4200 Remote Bias Tee supports the 4200-PG2 high speed range only.
Leakage measured after a five-second settling time.
All typical specs apply to the AC+DC output connector of the 4200
Remote Bias Tee interconnect box and after system compensation.
All specifications apply at 23° ±5°C, within 1 year of calibration, RH between
5% and 60%, after 30 minutes of warmup.
2
SCP2
SMU2
SMU1
Splitter Tee
SMA
Ch. 1
Trig Out
Ch. 2
S
DC Force
1
SMU2
Divider
DC Force
DC Sense
Ch. 1
Trig Out
Ch. 2
SCP2
DC Sense
SMA
Ch. 1
Trig In
Ch. 2
PG2
DC Sense
1
S
Divider
DC Force
2
SMA
2
AC Input
DC Sense
AC+DC
DC Force
RBT1
SMA
Figure 2. Interconnect for pulse I-V (high κ charge trapping
and isothermal testing). Pulse voltage on gate with DC bias
on drain.
1.888.KEITHLEY
SMU1
DC Sense
DC Force
Figure 3. Interconnect for single pulse charge trapping.
S E M I C O N D U C TO R T E S T
PG2
Ch. 1
Trig In
Ch. 2
AC Input
DC Sense
AC+DC
DC Force
RBT2
Model 4200-SCS specifications
CHANNELS: Two.
TYPICAL PULSE PERFORMANCE:
(U.S. only)
www.keithley.com
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
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