Brooks CMX0 / CMX1 / CMX2 / CMX3 Pressure & Vacuum Operation Manual

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Installation and Operation Manual

X-VAC-CMX-eng

Part Number: 541B154AAG

January, 2011

Brooks

®

CMX Series

Heated Digital Capacitance Manometers

Brooks

®

CMX Series

5

Brooks® CMX Series

Heated Digital

Capacitance Manometer

Installation and Operation Manual

X-VAC-CMX-eng

Part Number: 541B154AAG

January, 2011

Brooks

®

CMX Series

Essential Instructions

Read before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

European Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive

(PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

European Electromagnetic Compatibility (EMC)

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (2004/108/EC (EMC directive 89/336/EEC)).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1.

Power to unit must be removed.

2.

Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or adjusted.

3.

Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.

Installation and Operation Manual

X-VAC-CMX-eng

Part Number: 541B154AAG

January, 2011

Brooks

®

CMX Series

Dear Customer,

We appreciate this opportunity to service your measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www.BrooksInstrument.com

Yours sincerely,

Brooks Instrument

Brooks

®

CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number: 541B154AAG

January, 2011

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

_CONTENTS

CONTENTS

_1.0 SAFETY NOTICES

_1.1 SAFETY SYMBOLS

_1.2 GROUNDING

_1.3 EXPLOSIVE ATMOSPHERE

_1.4 PART SUBSTITUTIONS AND MODIFICATIONS

_1.5 GENERAL SAFETY GUIDELINES

_1.5.1Unsafe acts

_1.5.2Recommended practices

_2.0 DESCRIPTION

_2.1 BASIC DESIGN

_2.2 HISTORICAL DESIGN

_2.3 BROOKS CMX DESIGN

_2.4 DESIGN OVERVIEW

_2.5 RELAYS

_2.6 ZERO OUTPUT BIAS CONTROL

_2.7 CMX OPERATING TEMPERATURES

_2.8 PRESSURE RANGE SELECTION CRITERIA

_2.9 PRODUCT SPECIFICATIONS

_2.10 ORDERING SPECIFICATIONS

_3.0 INSTALLATION

_3.1 CMX MOUNTING CONSIDERATIONS

_3.2 PLUMBING SIZE

_3.3 USE OF AN ISOLATION VALVE

_3.4 MATERIAL EXPOSURE

_3.5 MECHANICAL CONNECTION

_3.6 ELECTRICAL CONNECTIONS

_3.7 DEVICENET CONNECTION

_3.8 ELECTRICAL SIGNAL DESCRIPTION

_4.0 OPERATION

_4.1 OPERATING PRECAUTIONS

_4.2 POWER THE CMX

_4.3 LED INITIALIZATION SEQUENCE

_4.4 DEVICE WARM-UP

_4.5 HEATER/TEMPERATURE

_4.6 ZEROING THE CMX

_5.0 MAINTENANCE and TROUBLESHOOTING

_5.1 CALIBRATION

_5.2 TROUBLESHOOTING

_5.3 CLEANING

_5.1 REMOVAL OF CMX

25

25

25

26

26

27

28

20

20

21

24

19

19

19

19

25

28

28

28

29 p.0

10

11

8

9

6

7

4

5

3

4

19

1

1

2

2

1

1

1

1

3

_CONTENTS

_6.0 MODELS WITH DEVICENET 30

_6.1 DeviceNet Power Up Sequence 30

_6.2 DEVICENET AND NETWORKING ISSUES AND SOLUTIONS 30

_6.2.1Power-up LED Sequence Fails

_6.2.2Sequence Passes, Module LED Turns Red

31

_6.2.3Sequence Passes, Module LED is Green, Net LED is Red

_6.2.4Sequence Passes, Module LED is Green, Net LED is Off

_6.2.5Sequence Passes, Module LED is Green, Net LED is

Flashing Green

31

31

31

_7.0 CMX MODELS WITH EXTENDED RANGE CAPABILITY

_7.1 CMX WITH EXTENDED RANGE

_7.1 EXTENDED RANGE ACCURACY SPECIFICATION

_7.2 CMX EXTENDED RANGE CONNECTOR PIN-OUT

_8.0 SERVICE and RETURN

_8.1 SERVICE INSTRUCTIONS

_8.2 RETURN INSTRUCTIONS

34

34

34

32

32

32

32

WARRANTY LOCAL SALES/SERVICE CONTACT INFORMATION

BACK COVER

p.1

1.0

_INTRODUCTION

1.0 SAFETY NOTICES

This manual provides information for the installation and operation of the Brooks

CMX Series Heated Digital Capacitance Manometers (CMs). It is imperative that this manual be reviewed prior to installation and operation of the device. Failure to comply with the warnings, cautions, and hazard notes will void the product’s warranty. Use of these instruments in a manner other than those specified by

Brooks may result in injury or death and will void the product’s warranty. Brooks assumes no liability for any damage resulting from the improper use of its products.

1.1 SAFETY SYMBOLS

The following safety symbols are used throughout the system documentation:

!

CAUTION

!

Procedure could cause equipment damage/failure or procedure malfunction if not followed.

!

WARNING

!

Not following the procedure or adhering to advice could result in severe equipment damage and or environmental damage.

DANGER

Severe injury or injury resulting in death could result if stated or local procedures are not followed.

1.2 GROUNDING

DANGER

SHOCK HAZARD. All devices must be properly grounded.

All devices must be properly grounded to reduce the risk of an electrical shock.

1.3 EXPLOSIVE ATMOSPHERE

DANGER

Do not use equipment in an explosive atmosphere.

The CMX family of products are NOT intended for use in explosive atmospheres.

1.4 PART SUBSTITUTIONS AND MODIFICATIONS

!

WARNING

!

Do not substitute parts or modify equipment.

Modifying an instrument in any way not only voids the warranty but could cause a safety hazard and should be avoided. Repair work should be done at the factory or by a factory-authorized service center.

1.5 GENERAL SAFETY GUIDELINES

!

CAUTION

!

Always follow established industrial safety practices when operating any production equipment.

!

CAUTION

!

Safety is designed into every product. When followed, these minimum guidelines provide an acceptable level of safety for operating and maintaining your system.

p.1

1.0

_INTRODUCTION

They are not, however, a substitute for determining your own internal safety procedures.

!

CAUTION

!

Use of controls, adjustments, or procedures other than those specified in this manual without consulting a competent safety professional may result in exposure to potential hazards. Always follow established industrial safety practices when operating production equipment.

1.5.1 Unsafe acts

• NEVER defeat a safety interlock unless you are certified to perform the procedure and have been specifically directed to defeat the interlock.

• NEVER operate or service this system without a thorough knowledge of the dangers involved and the precautions to be followed for safe and efficient operation.

• NEVER disregard instructions to lockout/tagout the system.

• NEVER permit unauthorized or untrained personnel to use the system.

• NEVER STAND IN WATER OR ON A WET SURFACE WHILE OPERATING

ANY ELECTRICALLY POWERED EQUIPMENT.

• NEVER place your hands near moving parts or energized parts or subsystems. Components can move rapidly.

• NEVER remove a warning label from the equipment.

• NEVER operate damaged equipment.

• NEVER permit unauthorized or untrained personnel access to the system.

1.5.2 Recommended practices

• USE THE BUDDY SYSTEM: ALWAYS perform maintenance procedures in teams of two or more people; one to monitor the controls and indicators, and one to watch the system operation.

• ALWAYS observe all warning labels.

• ALWAYS avoid all unsafe acts.

!

CAUTION

!

Use of controls, adjustments, or procedures other than those specified in this manual without consulting a competent safety professional may result in exposure to potential hazards

!

CAUTION

!

The safety procedures described in this manual are minimum guidelines. It is believed that these guidelines will provide an acceptable level of safety. These guidelines, however, should not be considered a substitute for determining your own internal safety procedures in consultation with a competent safety professional.

p.2

2.0

_DESCRIPTION

NOTICE!

From this point forward, the

CMX Series Heated Digital

Capacitance Manometers will be referred to in general terms as the

CMX

or

CM.

2.0 DESCRIPTION

2.1 BASIC DESIGN

The CMX (also referred to as a capacitance manometer (CM)) is a pressure measuring instrument that senses a change in process pressure. It does this by measuring the change in capacitance caused by a change in deflection of a tensioned diaphragm.

The basic design of the CMX sensor is shown in Figure 1. A thin metal diaphragm is welded into a sealed sensor assembly where it is maintained at a fixed distance from an electrode. The area behind the diaphragm, including the electrode, is known as the reference side of the sensor. It may be kept at an ultrahigh vacuum for an

absolute

gauge, or it may be connected to another source of pressure or vacuum to function as a

differential

gauge. The front side of the diaphragm is exposed to the process. The difference pressure between the process and the reference side

Figure 1: Basic Capacitance Manometer Sensor

causes the diaphragm to deflect slightly. This deflection causes a change in capacitance between the electrode and the diaphragm. The result is a capacitive imbalance, which is measured by a circuit, and then converted to an output signal. This output is directly proportional to the pressure (or vacuum) in the process chamber.

The CM reading is not affected by changes or differences in gas composition and therefore overcomes disadvantages of specific gas calibration (due to thermodynamic and electrical property). Typically, in other vacuum gauges such as cold cathode ionization, Pirani, and thermocouple, each instrument must be calibrated for each specific process gas.

Capacitance manometers measure absolute pressure (force per unit area).

They can measure to extremely precise levels and usually have quoted accuracies of 0.25% error of reading (versus typically 10% of reading with other indirect vacuum measurement technologies). p.3

2.0

_DESCRIPTION

2.2 HISTORICAL DESIGN

Unfortunately the simple sensor design described previously, has a number of drawbacks.

• The single large diaphragm is more sensitive to shock and vibration.

• A single electrode cannot distinguish between a true pressure change and capacitance change due to thermal expansion or contraction of the sensor housing.

• The diaphragm is exposed directly to the process environment, where thermal radiation (from RF power) and condensable by-products (from the process) contaminate it. This may even physically damage the diaphragm, changing its characteristics of deflection.

• Internal frictional and stress forces (as an example: due to thermal expansion and vibrations) can distort the pressure readings.

2.3 BROOKS CMX DESIGN

Brooks has created several patented solutions to remedy the above mentioned drawbacks of the simple design described previously: (refer to Figure 2)

1. Use of a diaphragm that is smaller in diameter than in conventional CMs. A smaller diaphragm has less mass, which makes it less sensitive to shock and vibration.

Figure 2: Brooks CMX

2. Brooks uses a dual electrode system which incorporates a reference electrode into the design. Pressure is determined by a change in the measurement electrode relative to a change in the reference electrode. If the spacing between the diaphragm and electrode changes due to thermal expansion of the sensor’s chassis, both capacitances will change equally, thus false capacitance changes brought about by thermal effects can be distinguished from true pressure readings.

3. Brooks places a Plasma Shield in front of the diaphragm to protect the diaphragm from the process environment. It is an Inconel

®

plate that covers the entire front face of the diaphragm that traps condensable materials before p.4

2.0

_DESCRIPTION

they can deposit onto the diaphragm. This shield also protects the diaphragm from thermal radiation.

4. Brooks uses a Guard Volume, which is an annular vacuum surrounding the sensor. This acts as a thermal insulator shielding the sensor from ambient temperature variations and also as a “trash collector” for condensable and deposited process residual matter.

5. Electrodes can behave as antennae for RF radiation and strong magnetic fields. Brooks places Electrode Guards on the electrodes as protection against these interferences.

6. Ruby Rollers have been added to reduce the frictional forces, thermal expansion stress and vibration effects on the measurement electrode which can cause shifts and distortions in the indicated pressure readings.

7. Brooks creates a consistent stable thermal environment for the sensor by use of heaters. This increases stability (especially in lower ranges), reduces condensation on sensing diaphragm through heating the sensor to a slightly greater temperature than the process. When using a heated manometer,

Brooks recommends use of an isolation valve to prevent loss of heat when the chamber (and thus the manometer) is vented to atmosphere.

2.4 DESIGN OVERVIEW

Brooks CMXs are typically used in conjunction with pressure controllers (such as the Brooks’s ACX and Intellisys™ Series) or digital displays to display the measured pressure. The use of heated CMX may require a power supply booster to provide the additional power necessary to operate the heater.

Figure 3 shows a typical configuration using the Brooks CMX.

Figure 3: Typical System

p.5

2.0

_DESCRIPTION

2.5 RELAYS

Two electromechanical relays are provided in CMX configured with the 15-Pin

D-Sub connector option (see Ordering Code on page 11). The relays are UL recognized components rated for 100,000 cycles at 1A, 30V DC, Resistive.

Associated LED indicators located on top of the device illuminate when the coil of the associated relay is energized. Each relay has a normally open (NO) and a normally closed (NC) contact with a common connection (Single Pole Double

Throw). The contacts are accessed through the 15-Pin connector. (refer to

Figure 21, CMX RS-485 Port (2.5mm Jack), on Page 20)

The relays are digitally programmed (with use of the CMX User Software) individually for the following properties:

(Refer to the CMX Software Manual for procedures to set the relays)

• Direction of Relay Actuation:

Above Setpoint (ascending pressure): Relay is energized above the setpoint.

Below Setpoint (descending pressure): Relay is energized below the setpoint.

• Setpoint Pressure:

Pressure value, in percent of full-scale (0-100%) at which the relay actuates.

• Hysteresis:

The amount by which the pressure must return past the setpoint value before the relay will be de-actuated (adjustable from 0-20% of full-scale).

The following graphs provide an example of the relay behavior:

Figure 4: Direction of Relay Actuation: Above Setpoint

Figure 5: Direction of Relay Actuation: Below Setpoint

p.6

2.0

_DESCRIPTION

Programming is accomplished through a separate control and monitoring device plugged into the RS-485/2.5 mm serial Diagnostics port (DIAG) connection located on the top of the CMX (See Figure 6). The 2.5 mm serial port connection communicates through a proprietary Brooks communication protocol at 9600 baud. The following information can be read from the CMX for each relay:

• Setpoint value

• Hysteresis value

• Direction of operation

• Relay status (actuated, de-actuated)

Figure 6: Typical CMX User Software Connection

The programmable configuration is stored internally in non-volatile memory and restored to working memory upon application of power or reset of the CMX.

2.6 ZERO OUTPUT BIAS CONTROL

NOTE: The following method for setting the Output Bias is based on using the CMX

User Software Graphical User Interface (GUI). If the Software is not available, call a

Brooks Technical Service representative for assistance.

In some applications, the process tool is not able to achieve a base pressure low enough to correctly zero the gauge. Typically, CMXs should be zeroed at a base pressure five decades below the gauge full-scale range. As an example, a 10T

CMX should be zeroed at a chamber pressure of 1x10

-4

Torr.

If the chamber cannot be pumped down to the appropriate base pressure, use the Bias Adjust Control to set the desired output pressure signal.

The Zero Output Bias Control allows you to add or subtract a bias voltage to the pressure output signal as shown in Figure 7. The units for the Output Bias adjustment are in mV and have a maximum adjustment capability of ±250 mV.

Procedure for Using the CMX Output Bias Adjustment:

1. Pump the chamber down to the minimum achievable pressure.

2. Determine the actual chamber pressure using an appropriate method.

3. DO NOT press the Zero Button on the gauge. (Doing so will cause the CMX to attempt to zero the gauge. If the chamber pressure is too high, the automatic p.7

2.0

_DESCRIPTION

zero adjust operation will fail anyway. If the chamber pressure is within the adjustment range, the CMX will zero to that pressure, which is not the actual pressure in the chamber. That is, the CMX will output a zero signal at a non-zero chamber pressure.)

4. Connect CMX GUI to CMX and verify communication. (Refer to the CMX User

Software manual, page 37.) Set Bias Adjust Control value, in units of mV, to achieve the desired analog output voltage. Using the actual chamber pressure from Step “2” above, adjust the Zero Bias Adjust Control until the analog output voltage matches the known chamber pressure or desired offset signal.

Figure 7: CMX Bias Adjustment Control Block Diagram

2.7 CMX OPERATING TEMPERATURES

A CMX is heated to a constant temperature to prevent ambient temperature fluctuations from affecting the sensor output signal, and prevent the formation of condensable deposits in the measurement chamber and on the diaphragm of the sensor.

Table 2 is a general guideline for selecting the most suitable CMX for an application. For further information contact Brooks for specific recommendations. This manual provides information to install and operate the following CMX models.

Table 1: CMX Model Description

Description Model

CMX45

Digital CM, heated to 45°C

CMX100

Digital CM, heated to 100°C

CMX160

Digital CM, heated to 160°C p.8

2.0

_DESCRIPTION

APPLICATION

Etch

Table 2: CMX Model Application

PROCESS

Metal

Oxide

Silicon/

Polysilicon

Dielectric

Photoresist

CMX45

NR

R

R

OK

R

MODEL

CMX100

R

OK

OK

R

OK

CVD

Metal

Oxide

Silicon/Polysilicon

Dielectric

PVD

R = RECOMMEND

NR

OK

OK

NR

R OK

OK = ACCEPTABLE

OK

R

R

OK

CMX160

OK

OK

OK

NR

OK

R

OK

OK

R

NR

NR = NOT

RECOM-

MENDED

2.8 PRESSURE RANGE SELECTION CRITERIA

When selecting a capacitance manometer, the measurement range of the instrument should be considered especially if the CMX is part of a closed loop pressure control system. In general, CMX measures over 4 decades (from their full scale range) and can be used in closed loop pressure control systems over a maximum of 3 decades.

Measurement Range = 4 decades

Control Range = 3 decades

Control Range

Measurement Range

1000

100

10

2

1

0.1

10

-5

10

-4

10

-3

10

-2

10

-1

1 10

Process Pressure (Torr)

1000

100

10

2

1

0.1

100 1000

Figure 8: Measurement and Control Ranges of CMX

p.9

2.0

_DESCRIPTION

2.9 PRODUCT SPECIFICATIONS

Table 3: Digital CM Specifications

Range

Accuracy

1

1000 Torr

100 Torr

20 Torr

10 Torr

2 Torr

1 Torr

<1 Torr

Measurement Range

Temperature Effects on Zero

(TCZO)

Temperature Effects on Span

(TCFSO)

Ambient Operating

Temperature

2

Exposed Materials

Volume

Approximate Shipping Weight

Overpressure Limit

Power Input

Initial Warm-up -

Analog (Typical)

3,4

45°C

GAUGE OPERATING TEMPERATURE

100°C

0.1, 1, 2, 10, 100, 1000 Torr

160°C

1, 2, 10, 100, 1000

± 0.25% of reading

± 0.15% of reading

± 0.15% of reading

± 0.15% of reading

± 0.15% of reading

± 0.15% of reading

± 0.25% of reading

4 Decades

± 0.002% of FS/°C

15°C to 35°C

± 0.02% of FS/°C

15°C to 45°C

± 0.25% of reading

± 0.25% of reading

± 0.25% of reading

± 0.25% of reading

± 0.35% of reading

± 0.35% of reading

N/A

15°C to 35°C

Inconel

®

and/or AISI 316L Stainless Steel

17cc

1.40 lbs (726 grams)

17 PSIA or 125% of Full Scale, whichever is greater

270mA @ 15 VDC (±5%) 620mA @±15 VDC (±5%) 620mA @±15 VDC (±5%)

Steady State -

Analog (Typical)

3

Initial Warm-up -

DeviceNet

®

(Typical)

Steady State -

DeviceNet

(Typical)

175mA @ 15 VDC (±5%) 350mA @±15 VDC (±5%) 550mA @±15 VDC (±5%)

400mA @ 24 VDC

300mA @ 24 VDC

900mA @ 24 VDC

600mA @ 24 VDC

950mA @ 24 VDC

600mA @ 24 VDC

Output

Relay Contact Rating

4

(available on 15 Pin Male D-

Sub Interface)

Electrical Connector Type

Analog

RS-485

DeviceNet

0 - 10 VDC (5k load) minimum

1A @ 30 VDC / 0.3A @ 125 VDC

9-pin D-sub male or 15-pin D-sub male

2.5 mm mini jack for RS-485 Communications Port

5-pin eurofast

®

(DeviceNet) w/9-pin D-sub Female (Analog)

Certification Fully CE Compliant to EMC Directive 89/336/EEC

1

Includes hysteresis, linearity, and repeatability within the calibrated range at 21°C.

2

Ambient Operating Temperature with 50 linear feet of airflow = 15-45°C.

3

15 Pin Male D-Sub Model requires an additional 60mA to power the internal relays (if energized).

4

Process relays are UL

®

recognized components rated for 100,000 cycles at 1A, 30V DC, Resistive.

All specifications subject to change without notice.

p.10

_DESCRIPTION

2.0

2.10 ORDERING SPECIFICATIONS

C M X 4 5 6 7 8 9 10 11 12

Operating Temperature

1 = CMX45 (45°C)

2 = CMX100 (100°C)

3 = CMX160 (160°C)

5 mbar

10 mbar

100 mbar

500 mbar

1000 mbar

13.33 Pa

33.32 Pa

66.65 Pa

133.3 Pa

266.6 Pa

666.6 Pa

1.333 kPa

2.666 kPa

13.33 kPa

66.66 kPa

133.3 kPa

Range

100 m Torr

250 m Torr

500 m Torr

1 Torr

2 Torr

5 Torr

10 Torr

20 Torr

50 Torr

100 Torr

500 Torr

1000 Torr

1.33 mbar

2 mbar

PX5

P01

P02

P05

P11

P12

P21

P25

P31

C02

C05

C11

C21

C25

C31

PX1

PX2

T11

T12

T15

T21

T25

T31

C01

Code

M11

M25

M50

T01

T02

T05

*Contact Brooks

Technical Support for other options

Conversion

100 m Torr

100 m Torr

250 m Torr

500 m Torr

1 Torr

2 Torr

5 Torr

10 Torr

20 Torr

100 Torr

500 Torr

1000 Torr

Reserved for

Brooks Use

Calibration Orientation

H = Horizontal - Standard

Calibration Orientation

V = Vertical (for 1 Torr and all mTorr Ranges)

D=

E=

N=

R=

T=

W=

U=

V=

F=

Code

0=

1=

2=

3=

4=

5=

6=

7=

8=

9=

A=

B=

C=

Fitting Type

0.5" od tube stub (no fitting)

KF 10 flange

KF 16 flange

KF 25 flange

8 VCR (1/2") female

Mini CF

8 VCO (1/2") female (non-standard length)

Short 8 VCR (1/2") female

8 VCR (1/2") female - right angle

2.750" CF

1" additional to tube stub

Short 8 VCR (1/2") male

Reseved

Long 8 VCR (1/2") measues 2-5/8" +1/16" from base plate to toroid of gland

KF16 - right angle

4 VCR (1/4") female

Reserved

KF16 flange with pre-filter assy (A33355-4001)

Wrapped tube with KF16 flange

8 UJR (1/2") female

Right angle 8 UJR (1/2") female 30mm +/- 2mm

Short KF16 flange, (A' dimension = 18mm (7.08")

Code

1 =

2 =

3 =

4 =

5 =

8 =

L =

R =

Note:

Connector/Interface

9-Pin "D" Male Connector

15-Pin "D" Male Connector with Process relays

DeviceNet w/Analog 9-Pin "D" Female Connector

15-Pin "D" Sub Connector with 2 Process Relays and a Temperature in Control Relay

15-Pin "D" Sub Connector with 1 Process Relay,

1 Temperature in Control Relay, and an Overheat

Indicator Relay

15-Pin w/Fine/Coarse Compatible Zero Switches,

Pin 13 & Pin 14 configured as Outputs.

Indy Standard Firmware

1" additional to tube stub

15-Pin w/Fine/Coarse Compatible Zero Switches,

Pin 13 & Pin 14 configured as Inputs for Unique Remote

Zero Functionality. Indy Standard Firmware

1,2 and 3 are available on CMX45 and CMX100.

1, 3, 4 and 5 are available on CMX160

Copy Model Number Here

1 2 3 4 5 6

C M X

Figure 9: Ordering Specifications

7 8 9 10 11 12

p.11

2.0

_DESCRIPTION

2.11 PHYSICAL DIMENSIONS

FITTING TYPE

.05” OD Tube

KF-10 Flange

KF-16 Flange

KF-25 Flange

8 VCR Female

FITTING

CODE

0

1

2

3

4

“A” DIMENSION*

CMX45 / CMX100

26.3mm [1.04”]

39.0mm [1.54”]

39.0mm [1.54”]

30.1mm [1.19”]

52.24mm [2.06”]

“B” DIMENSION

OVERALL LENGTH

141.70mm [5.58”]

154.40mm [6.08”]

154.40mm [6.08”]

145.50mm [5.73”]

167.64mm [6.60”]

Mini CF 5 27.56mm [1.09”] 142.96mm [5.63”]

*See Figure 14:, Dimensions With Connectors. For other fittings and flanges call Brooks Technical Support.

Figure 10: CMX45 and CMX100 Dimensions of Body and Tube with Analog

Interface

p.12

2.0

_DESCRIPTION

FITTING TYPE

.05” OD Tube

KF-10 Flange

KF-16 Flange

KF-25 Flange

8 VCR Female

FITTING

CODE

0

1

2

3

4

“A” DIMENSION

CMX45 / CMX100

26.30mm [1.04”]

39.00mm [1.54”]

39.00mm [1.54”]

30.1mm [1.19”]

52.24mm [2.06”]

“B” DIMENSION

OVERALL LENGTH

154.30mm [6.08”]

167.00mm [6.58”]

167.00mm [6.58”]

158.10mm [6.23”]

180.24mm [7.10”]

Mini CF 5 27.56mm [1.09”] 155.56mm [6.13”]

*See Figure 14:, Dimensions With Connectors. For other fittings and flanges, call Brooks Technical Support.

Figure 11: CMX45/CMX100 Dimensions of Body and Tube with DeviceNet

Interface

p.13

2.0

_DESCRIPTION

FITTING TYPE

.05” OD Tube

KF-10 Flange

KF-16 Flange

KF-25 Flange

FITTING

CODE

0

1

2

3

“A” DIMENSION

CMX160

26.30mm [1.04”]

39.00mm [1.54”]

39.00mm [1.54”]

30.1mm [1.19”]

“B” DIMENSION

OVERALL LENGTH

159.30mm [6.28”]

172.00mm [6.78”]

172.00mm [6.78”]

163.10mm [6.33”]

8 VCR Female

Mini CF

4

5

52.24mm [2.06”]

27.56mm [1.09”]

185.40mm [7.30”]

160.56mm [6.43”]

* See Figure 14:, Dimensions With Connectors. For other fittings and flanges call Brooks Technical Support.

Figure 12: CMX 160°C Dimensions of Body and Tube with DeviceNet

Interface

p.14

2.0

_DESCRIPTION

FITTING TYPE

.05” OD Tube

KF-10 Flange

KF-16 Flange

KF-25 Flange

8 VCR Female

FITTING

CODE

0

1

2

3

4

“A” DIMENSION

CMX160

26.30mm [1.04”]

39.00mm [1.54”]

39.00mm [1.54”]

30.10mm [1.19”]

52.24mm [2.06”]

“B” DIMENSION

OVERALL LENGTH

147.00mm [5.79”]

159.70mm [6.29”]

159.70mm [6.29”]

150.80mm [5.94”]

172.94mm [6.81”]

Mini CF 5 27.56mm [1.09”] 148.26mm [5.84”]

*See Figure 14:, Dimensions With Connectors. For other fittings and flanges call Brooks Technical Support.

Figure 13: CMX160 Dimensions of Body and Tube with Analog Interface

p.15

2.0

_DESCRIPTION

2.12 CMX DIMENSIONS WITH CONNECTORS

Not to Scale. Additional Flanges and Fittings available. Contact Brooks Technical support for information.

Figure 14: Dimensions With Connectors

O 81.0 mm

(3.19 inch)

77.4 mm

(3.05 inch)

Figure 15: Analog 9-Pin Top Dimensions

O 81.0 mm

(3.19 inch)

77.4 mm

(3.05 inch)

Figure 16: Analog 15-Pin Top Dimension

p.16

2.0

_DESCRIPTION

O 81.0 mm

(3.19 inch)

77.4 mm

(3.05 inch)

Figure 17: DeviceNet Top Dimension

O 81.0 mm

(3.19 inch)

77.4 mm

(3.05 inch)

Figure 18: Zero Bias (Indy) 15-Pin

Table 4: CMX Top LED Indicators, Switches, and Connectors

DIAG

ITEM DESCRIPTION

2.5mm Diagnostic Port - supports diagnostic functions via an RS-485 based communications protocol.

ZERO

When pressed, the gauge will automatically adjust the pressure signal to zero volts.

MSD ADDRESS

Most Significant address Digit (MAC ID).

ANALOG MODELS: For RS-485 Diagnostics Port.Valid addresses are 0 - 31.

DEVICENET MODELS: Valid addresses are 0 - 63 and P (Programmable).

LSD ADDRESS

Least Significant address Digit (MAC ID).

ANALOG MODELS: For RS-485 Diagnostics Port.Valid addresses are 0 - 31.

DEVICENET MODELS: Valid addresses are 0 - 63.

9-PIN D SUB

(MALE)

Power, analog pressure signal.

15-PIN D SUB

(MALE)

READY/FAULT/

WARM UP

Power, analog pressure signal, and relay contacts.

Temperature of heater indicator LED. Warm up = Amber, At Temperature = Green, Fault = Red

RELAY 1

RELAY 2

MOD STATUS

NET STATUS

Relay 1 status. When relay is energized, LED is lit Green.(Only on analog relay models)

Relay 2 status. When relay is energized, LED is lit Green. (Only on analog relay models)

Module Status LED, per DeviceNet definition. (Only on DeviceNet models)

Network Status LED, per DeviceNet definition. (Only on DeviceNet models)

RATE

Sets to DeviceNet data rate: 1 = 125kbps, 2 = 250 kbps, 5 = 500kbps, P = Program mode. (Only on DeviceNet models)

5-PIN CONNEC-

TOR

“Micro-style” connector for DeviceNet power and communications.

p.17

3.0

_DESCRIPTION

!

CAUTION

!

DO NOT mount the CMX with the inlet tube port facing upward (see Figure 19). The sensing diaphragm may be damaged by process contamination, which will adversely affect the operation and will void the warranty.

ITEM

9-PIN D SUB

(FEMALE)

DESCRIPTION

Analog output signal available on DeviceNet models.

!

WARNING

!

The CMX may not be used in any application where it may be exposed to conditions or materials that could cause damage to the device or injury to the operator.

p.18

3.0

_INSTALLATION

3.0 INSTALLATION

3.1 CMX MOUNTING CONSIDERATIONS

Ab

!

CAUTION

!

Minimize vibration around the

CMX to eliminate output electrical noise and provide a longer instrument life. Mount the CMX away from direct sunlight, heating/cooling system ducts, gas vents, and other sources of temperature variation.

!

CAUTION

!

For an CMX with full scale 01

Torr or less, the mounting orientation for the device is specified for optimal performance.

Horizontal mounting should be used unless there is a “V” (vertical mounting) in the model number.

A b ef cd g

Ab

NO

A b cd ef g

Figure 19: Mounting Orientation

!

CAUTION

!

The tubing between the CMX and the system chamber must be of equal or greater internal diameter than the CMX inlet tube.

!

CAUTION

!

The tubing between the CMX and the system chamber must be as short as possible, with the maximum length no longer than 152 mm [6”].

3.2 PLUMBING SIZE

When connecting any CMX to the system chamber, minimize restrictions between the CMX and chamber to maximize the conductance. This is important to maintain the response characteristics of the CMX in a dynamic control system. The following should be considered:

• Tubing Size Diameter

• Tubing Length

3.3 USE OF AN ISOLATION VALVE

The use of an isolation valve will reduce the need to wait for the device to re-stabilize after each vent to atmosphere. Although not required to protect the

CMX, it is strongly recommended that you use an isolation valve for all CMX with one Torr and below full scale range.

3.4 MATERIAL EXPOSURE

The process gas needs to be compatible with Inconel and/or 316L stainless steel. If the process generates by-products that could deposit inside the CMX, a heated device should be used to reduce this deposition.

p.19

3.0

_INSTALLATION

!

CAUTION

!

Combining the chassis ground, signal common, and power common will severely compromise quality of the pressure signal output.

!

CAUTION

!

Connecting the 9 or 15 pin “D” connector to the device should only be done with power off.

3.5 MECHANICAL CONNECTION

1. Vent the vacuum system.

2. At the location of installation, remove the CMX from the shipping container.

Take care to not drop the device or contaminate it with dust or other foreign matter.

3. Install the CMX in the vacuum system. Take care not to twist or apply mechanical loading on the CMX housing or tube.

3.6 ELECTRICAL CONNECTIONS

All analog CMX CMs produced by Brooks (with exception to the DeviceNet models) are designed to be powered by a plus and minus 15 VDC (±5%) power supply. Temperature-controlled devices require more power than unheated devices. Refer to Specification Tables beginning on page 10.

3.6.1 Analog Connection

After assuring power has been removed, connect the appropriate 9-pin or 15-pin connector. If no connector cable is available, use one of the following pin-out table to construct one.

1. Connect the cable to the gauge.

2. Hand tighten the lock screws to secure the connectors.

9-Pin D Sub Male

CMX

6

7

4

5

PIN #

1

2

3

8

9

PIN ASSIGNMENT

Output signal

No connection

Temperature status

+15 VDC

-15 VDC

Chassis ground

Remote ZERO trigger

Signal common

External power supply common

Cable

9-Pin D Sub Female

Connector Option 1

Figure 20: CMX45 and CMX100 9-Pin “D” Connector Pinouts

Pinout Description

Tip

Ring 1

Sleeve

RS_A

RS_B

Ground

Figure 21: CMX RS-485 Port (2.5mm Jack)

p.20

3.0

_INSTALLATION

PIN # PIN ASSIGNMENT

1 Temperature in control relay NO

2 Pressure signal

3 Temperature in control relay common

4 Temperature in control relay NC

5 Power supply common

6 -15 VDC

7 +15 VDC

8 Relay 1 - Normally OPEN

9 Relay 1 - Contact common

10 Relay 1 - Normally CLOSED

11 Overheat Relay - Normally OPEN

12 Signal common

13 Overheat Relay - common

14 Overheat Relay - Normally CLOSED

15 Chassis ground

Connector Option 5 (CMX160 only)

PIN # PIN ASSIGNMENT

1 Temperature in control relay NO

2 Pressure signal

3 Temperature in control relay common

4 Temperature in control relay NC

5 Power supply common

6 -15 VDC

7 +15 VDC

8 Relay 1 - Normally OPEN

9 Relay 1 - Contact common

10 Relay 1 - Normally CLOSED

11 Relay 2 - Normally OPEN

12 Signal common

13 Relay 2 - common

14 Relay 2 - Normally CLOSED

15 Chassis ground

Connector Option 4 (CMX160 only)

CMX

Cable

15-Pin D Sub Male

15-Pin D Sub Female

PIN # PIN ASSIGNMENT

1 Temperature status

2 Output signal

3 Remote ZERO trigger

4 No connection

5 External power supply common

6 -15 VDC

7 +15 VDC

8 Relay 1 - Normally OPEN

9 Relay 1 - Contact common

10 Relay 1 - Normally CLOSED

11 Relay 2 - Normally OPEN

12 Signal common

13 Relay 2 - Contact common

14 Relay 2 - Normally CLOSED

15 Chassis ground

Connector Option 2

Figure 22: 15-Pin “D” Connector Pinouts

3.7 DEVICENET CONNECTION

Set the DeviceNet baud rate selection switch (Located on top of the device) to the desired baud rate. Set the address selection switches (Node Address) to the desired address, noting the most significant digit and least significant digit position. After these switches have been set, connect the DeviceNet power/ communication cable to the device. When power is applied, the unit will go through an initialization procedure. The LED indicators will flash in sequence.

After this initial sequence, the Module Status LED should be green, the Network

Status LED should be flashing green (if network on-line, with no connection established), and the Ready/Temperature status indicator should be:

• Amber – unit is warming up to the proper operating temperature.

p.21

3.0

_INSTALLATION

• Green

unit is at the proper operating temperature.

• Red – unit is over the proper operating temperature or at a fault condition.

1. After assuring power has been removed to the system, connect the appropriate 9-pin (Figure 23) and 5-pin connector (Figure 24). If no connector cable is available, use one the following pin-out table for construction of one.

2. Connect the 9-pin cable to the CMX.

3. Hand tighten the lock screws to secure the connector.

4. Connect the DeviceNet cable to the CMX.

5. Hand tighten the connector.

CMX

Cable

9-Pin D Sub Male

PIN #

1

2

5

6

3

4

7

8

9

PIN ASSIGNMENT

Output signal

No connection

Temperature status

Not Used

Not Used

Chassis ground

Remote ZERO trigger

Signal common

Not Used

9-Pin D Sub Female

Connector Option 3

Figure 23: DeviceNet Model 9-Pin D-Sub Connector Pin Out

Consult local documentation for DeviceNet communications details

3.7.1 DeviceNet SET UP (Example)

Issue the following commands in the order shown to set up the DeviceNet communication connections.

1. Verify the baud rate and MAC ID (address) is set properly.

2. Allocate the explicit connection.

3. Set expected packet rate (epr) for explicit connection to 0, (no time out)

(NOTE: this step is optional).

4. Allocate the polled I/O connection.

5. Set expected packet rate for polled connection to 1000mSec.

6. Send poll command to device (no data is sent with the poll command).

7. Process the poll data.

8. Repeat steps 6 and 7.

The default configuration for the CMX device is to return the pressure data as a real, floating point number. The real data conforms to the IEEE-754 standard for

32-bit floating point number representation. Therefor, there will be five bytes of data returned with each poll response. The first byte is the status byte (typically

0x80). Bytes two through five are the four bytes of real pressure data, with the least significant bytes first and ending with the most significant byte.

p.22

3.0

_INSTALLATION

3.7.2 DeviceNet Cables

CABLE

L thick

+ 5 L thin

L thick

= 2.5

thin

L thick

+ 5 L thin

Table 5: DeviceNet Cables

LENGTH BAUD

RATE

DROP-LENGTH (Maximum Meters)

500

250

100

125k

250k

500k

6

6

6

DROP-LENGTH

(Cumulative

Meters)

156

78

39

Male

(Pin)

4

5...........

1

3

2

2

3

1 - Drain Bare

2 - V+ Red

3 - V- Black

4 - CAN H White

5 - CAN I Blue

4

............5

1 Female

(Sockets)

5

Network Connector (Female Contacts)

1

1 2 3 4 5

5 - V+

4 -

CAN H

3 -

Drain

2 -

CAN I

1 -

V-

Red

White

Bare

Blue

Black

Network Connector (Male Contacts)

DeviceNet Connector

Figure 24: DeviceNet 5 Pin Connector

p.23

3.0

_INSTALLATION

3.8 ELECTRICAL SIGNAL DESCRIPTION

Table 6: Electrical Signals Descriptions

Signal

+ 15 VDC

-15 VDC

Chassis ground

Signal common

Signal output

Description

Positive power supply input for the CMX.

Negative power supply input for the CMX.

This pin connects to the system chassis ground when the CMX is mounted.

Pressure output reference return signal.

A differential voltage developed between the

Signal Out pin and the Signal Common pin.

Notes

Wire size should be selected to minimize the voltage drop between the power source and the CMX.

The shield in the cable should be connected to this pin to eliminate the possibility of radio frequency interference (RFI) affecting the output signal from the device.

This should be used as the reference signal to avoid any ground return potentials developed in the External Power Supply

Common, described below.

This signal voltage has a maximum differential output of +10 VDC at the rated full scale pressure of the CMX. The output signal voltage is linearly proportional to pressure. Cable used for this signal should be shielded, and the shield should be connected to the chassis ground.

External Power

Supply Ground

Temperature status

Power supply ground return line.

Wire size should be selected to minimize the voltage drop between the power source and the CMX.

Reports the status of the internal heater by remaining low (0V DC) until the CMX reaches the control temperature, at which time the signal goes to 5V DC. Remains at 5V DC as long as the temperature stays at the control temperature.

All CMXs are heated.

No internal connection.

No Connection

Remote ZERO trigger

Relay (x)

Normally OPEN

Relay (x)

Common

Input that will activate zeroing.

Relay normally open contact.

Relay common contact.

1

This pin is driven high to 3.3V DC.

Normal state is de-energized.

Connects to normally open or normally closed contact depending on relay state.

Relay (x)

Normally

CLOSED

Relay normally closed contact.

Normal state is de-energized.

1

See page 20 Figure 21, Pin #3, Connector Option 2 for remote zero parameters.

p.24

_OPERATION

4.0

!

CAUTION

!

Never over-pressurize the CMX.

The CMX is designed to withstand a positive over pressure of 17 PSIA or 125% of rated full scale, whichever is greater, within the pressure port. Pressures greater than this may damage the pressure-sensitive diaphragm and cause a failure of the CMX.

!

CAUTION

!

Never exceed the ambient temperature operating limits.

These limits are listed in the

Specifications Table 3, beginning on page 10. Devices which are designed for a specific operation range may be damaged by excessive temperature and may not function correctly.

NOTE:

Avoid venting a heated or low-range CMX to atmosphere.

While this action will not damage the CMX, it will cause temperature and signal instabilities, which in turn may require an additional warm-up or recovery period. Although not required to protect the CMX from damage, it is strongly recommended that heated CMXs with less than a 10

Torr full scale range be used with a properly sized isolation valve.

4.0 OPERATION

4.1 OPERATING PRECAUTIONS

It is important to operate the CMX within the designed mechanical specifications in order to reduce the possibility of erroneous readings. The operating precautions must be followed.

4.2 POWERING THE CMX

Refer to Specifications beginning on page 10.

The power may be supplied from a variety of Brooks controllers or directly from a secondary power supply that is regulated to within ±5% of 15 VDC and can supply the current required for the CMX.

1. Turn the gauge on by applying power to the device.

2. The heaters will start warming the device (refer to “DEVICE WARM-UP” on page 26). (The device’s temperature is automatically maintained internally, see Figure 25, Temperature vs. LED State, on Page 26).

3. The Temperature LED (READY/FAULT/WARM-UP) will be solid Amber then change to flashing Amber during the warm-up period and turn to Green upon the device’s reaching operating temperature.

4. Once the gauge is up to temperature and the system at recommended base vacuum, ZERO the CMX if the gauge is being placed into operation for the first time or after a shut down of the system. ( The temperature indicator status can also be monitored remotely through pin 1 of the DB15 connector, or through pin 3 of the DB9 connector. This pin is normally driven high to 3.3 volts when the temperature LED is Green.)

5. When the temperature has stabilized and the device has been ZEROed, the device is ready for use.

4.3 LED INITIALIZATION SEQUENCE

The LED indicators will go through each state during the power-up/reset initialization sequence. Although this is primarily a DeviceNet requirement, it will also be done on the analog and other non-DeviceNet models.

The sequence starts with all LED indicators OFF. Each included LED indicator will flash through all states (Relay Control Status LEDs, that indicate the status of the relays, will not go through an initialization flash sequence). The states for each indicator are listed below. Each state will last approximately 250 milliseconds, (1/4 second), and then proceed to the next state. Once each state has been sequenced on a particular LED, the next LED will go through its sequence.

LED INDICATOR

Status (MOD status on Devicenet models)

Network Status (DeviceNet only)

Temperature Status (all Models)

Relay Control Status (relay model)

STATE

Green - Red - Green

Green - Red - OFF

Amber- Red - Amber -OFF

OFF p.25

4.0

_OPERATION

4.4 DEVICE WARM-UP

When an CMX is installed and powered up on a system or tool, the signal output will be variable for a period of time. Once the temperature profile of the device reaches a steady-state condition and thermal saturation has occurred, the variance in the signal output will be negligible.

Table 7: Recommended Ready To Use Times

Device Temp

Range

45 o

C

100 o

C

160 o

C

Device Pressure

Range

100m Torr

1 Torr - 1000 Torr

100m Torr

1 Torr - 1000 Torr

100m Torr

1 Torr - 1000 Torr

From Cold Condition

(in hours)

5

3

5

3

5

3

Ready to Use:

- Warm-up completed, flashing Amber LED now Green, signal output change negligible and repeatable temperatures status signal level at 3.3

VDC.

4.5 HEATER/TEMPERATURE (WARM-UP/READY/FAULT) LED

FUNCTIONALITY

The sensor temperature is precisely controlled via the digital signal processor.

An intuitive tri-color LED is provided to indicate the three temperature states:

Warm-up, Ready to Use, and Fault. The following graph and table relate the

LED status to the actual sensor temperature.

Figure 25: Temperature vs. LED State

Table 8: LED Function Table

LED Indicator

AMBER (Warming Up)

FLASHING AMBER (At temperature but not ready for use)

GREEN (Sensor at temperature and ready to use)

RED (Over Temperature) (Fault) p.26

4.0

_OPERATION

The temperature indicator status can also be monitored remotely through pin 1 of the DB15 connector, or through pin 3 of the DB9 connector. This pin is normally driven high to 3.3 volts when the temperature LED is Green.

4.6 ZEROING THE CMX

When the gauge is placed into operation for the first time or after a shut down of the system, ZERO should be set using the following steps.

• Adjust ZERO at the ambient temperature at which the gauge is normally operated.

• The CMX cannot be zeroed if the pressure is too high or if the gauge has not reached a stabilized operating temperature (Green LED).

1. Pump the system down to a pressure that is at least 5 decades below the full scale range of the device. See the ZERO Pressure Chart below. (For 100mT device, check that the installation orientation is the same as the calibration orientation):

Full Scale

Range

0.1 Torr

1 Torr

2 Torr

5 Torr

10 Torr

20 Torr

100 Torr

1000 Torr

Table 9: ZERO Pressure Chart

Highest Pressure for Proper Zero

Adjustment

1 X 10

-6

Torr

1 X 10

-5

Torr

2 X 10

-5

Torr

5 X 10

-5

Torr

1 X 10

-4

Torr

2 X 10

-4

Torr

1 X 10

-3

Torr

1 X 10

-2

Torr

2. Allow the device to warm-up and settle (see “Recommended Ready To Use

Times” on page 26).

3. Press the ZERO pushbutton or momentarily connect the remote zero trigger signal in the D-Sub connector to signal ground.

The CMX will attempt to correct the ZERO adjustment in a series of steps over a period of a few seconds. While ZERO adjustment is being performed automatically, the STATUS LED will blink GREEN; repeating until ZERO adjustment is completed or aborted.

If ZEROING is completed successfully, the STATUS LED returns to its normal color (GREEN), and the output signal should be 0 volts (±2 mV).

If ZERO adjustment is aborted, the STATUS LED will blink RED three times and return to its normal color (GREEN). The ZERO adjustment will be returned to the value it had before the ZERO Set push button was depressed.

p.27

5.0

_MAINTENANCE

5.0 MAINTENANCE AND TROUBLESHOOTING

5.1 CALIBRATION

The Brooks CMX has been manufactured, tested and is compliant to all requirements of the applicable published specifications. All devices used for the manufacture and test of these instruments have traceability to National Institute of Standards (NIST) according to ISO 10012-1.

Digital CMs should be calibrated every 6-12 months depending on the application and actual usage. The following factors may affect calibration and may require calibration at more frequent intervals:

• Sensor diaphragm has become contaminated with process material

• Improper handling (dropping, misuse, etc.)

If the CMX is suspected to have calibration errors, return the unit to Brooks for repair/calibration.

5.2 TROUBLESHOOTING

Table 10: Troubleshooting Guide

Symptom

No output signal

Possible Cause

No power

Action

Check electrical connection.

Check cable continuity.

Verify power supply outputs.

Check for dents to the enclosure.

Fluctuating Zero

Fluctuating output signal

Pressure reading too low or too high

Positive output drift

Negative drift

Cannot zero CMX

Temperature fluctuations

Power supply fluctuations

Electrical noise

Pressure control system

Excessive vibration

Zero offset

Power input wrong

Grounds

Chamber outgassing

Leak in chamber

Chamber pumping down

Leaky sensor

Not at base pressure

Temperature not in range

Improper ground

Device malfunction

Check for varying temperature sources.

Check power supply regulation.

Check power supply regulation.

Verify cable grounding and shields.

Check pressure control system.

Reduce vibration.

Verify electrical zero at zero pressure.

Verify power voltage levels.

Check signal and power grounds.

Re-pump system to base pressure.

Eliminate chamber leak.

Re-zero sensor after pump-down.

Return device for repair.

Verify chamber is at base pressure.

Wait for Green READY LED to illuminate.

Check signal and power grounds.

Return device for repair.

Orientation

Check or replace calibration position (see note below).

NOTE: For 1 Torr and sub 1 Torr full scale ranges CMX, the specific mounting orientation for the device is specified for optimal performance. Model number containing “V” in it stands for vertical mounting. Without letter “V” in model number implies a horizontal mounting.

5.3 CLEANING

Cleaning is NOT recommended by anyone other than authorized Brooks service personnel as this may cause damage to the device and may void the warranty.

p.28

_MAINTENANCE

5.0

DANGER

Contaminated parts can pose a health hazard. Before beginning work, determine whether any parts are contaminated. Adhere to all regulations and take all necessary precautions when handling and shipping contaminated parts.

!

CAUTION

!

Handle vacuum products with care. Dirt and damage severely impair the function of the vacuum component.

5.4 REMOVAL OF CMX

1. Vent the vacuum system to atmospheric pressure.

2. Remove power to the CMX.

3. Loosen the lock screws and unplug the control cable.

4. Remove the communication cable (if used).

5. Carefully remove the gauge from the vacuum system.

6. Dispose of the gauge using local procedures or return to Brooks as described in “SERVICE and RETURN” on page 34.

p.29

6.0

_DEVICENET MODELS

6.0 MODELS WITH DEVICENET

6.1 DEVICENET POWER UP SEQUENCE

Applying power to a DeviceNet CMX initiates a power-up sequence that initializes the embedded Vacuum Measurement system along with performing a

Module and Network test. The real time status of these tests is indicated on the

Module and Network LEDs on the top of the device.

After power is applied, the CMX flashes the Module and Network LEDs according to the following sequence. If this sequence does not occur, a problem exists with module power or with the device itself.

Module LED Power-up Sequence:

Off,

Green

(250 mSec),

Red

(250 mSec).

Network LED Power-up Sequence:

Off,

Green

(250 mSec),

Red

(250 mSec).

After the LED flash sequence has completed, the Module and Network LEDs will display the real time status of the Module and Network respectively. The following tables describe the status LED behavior:

Off

LED STATE

Flashing Green-

Red

Green

Red

Table 11: DeviceNet: MODULE LED

PROBLEM

Power off

SOLUTION

No power applied to the device.

Device self-test

Unit is operating normally

Unrecoverable fault

Device is in self-test. The DeviceNet specifications defines blink rates and patterns for the Modules Status LED during self-test.

No corrective action required.

Device has detected an unrecoverable fault.

LED STATE

Off

Flashing Green-

Red

Flashing Green

Green

Flashing Red

Red

Table 12: DeviceNet: NETWORK LED

PROBLEM SOLUTION

Power off No power applied to the device.

Device self-test Device is in self-test.

On-line, not connected

On-line, connected

Connection time out

Unrecoverable fault

Device is operating normal. It is on-line but no connection has been established.

Device is operating normal. It is on-line and one or more connections are established.

One or more connections have timed out.

Device cannot communicate on the network.

(Duplicate Macld or Bus-off condition)

6.2 DEVICENET AND NETWORKING ISSUES AND SOLUTIONS

There are a number of initialization failure scenarios that can occur with

DeviceNet. These issues include wrong default assembles or produced and consumed paths, incorrect address or baud rate settings, network wiring, network termination, and network power supply problems. Several of the more common initialization problems are: p.30

6.0

_DEVICENET MODELS

6.2.1 Power-up LED Sequence Fails

If the Module or Network LEDs fail to sequence from OFF to Red to Green as previously described, there is either a network power supply problem or the device has most likely experienced an unrecoverable fault. The corrective action is to verify that the power supply is providing 11 to 24 volts to the DeviceNet network on the correct cable conductors. If the power supply voltage is properly applied and the LEDs do not sequence correctly, the device should be returned to the Brooks service center.

6.2.2 Sequence Passes, Module LED Turns Red

If the normal LED flash sequence completes and the Module LED then turns

Red, there is a problem with the gauge. Return the device to the Brooks service center.

6.2.3 Sequence Passes, Module LED is Green, Net LED is Red

This situation will occur if there is another device on the network with the same

MAC ID or address. The Network LED will turn Red if the device initializes after another device has already initialized itself with the same MAC ID. The first device that “claims” the MAC ID will initialize correctly, but subsequent devices will not be able to initialize with the same MAC ID. The solution is to select a unique MAC ID for each device. Note that the embedded control system reads the MAC ID (address) and baud rate switches only once during initialization after power is applied.

In some cases, the Network LED may display Red due to a baud rate error. verify that the baud rate of the device matches that of the network. If it is necessary to change the address or baud rate, remove power, change the switch settings, then reply power to device.

6.2.4 Sequence Passes, Module LED is Green, Net LED is Off

This problem will occur if the baud rate of the device is not the same as the baud rate of the other devices on the network. Set the device baud rate to the correct value and power cycle the device as described above.

6.2.5 Sequence Passes, Module LED is Green, Net LED is Flashing Green

This situation indicates that the device is working properly and that there are no

MAC ID or Baud Rate conflicts. The flashing Green Net LED indicates that the device “sees” a valid network and it is waiting for the tool controller or scanner to establish logical connection(s). Logical connections enable the process tool controller to set or get variable or assemblies of data such as setpoint and indicated flow.

p.31

7.0

_EXTENDED RANGE

7.0 CMX MODELS WITH EXTENDED RANGE CAPABILITY

7.1 CMX WITH EXTENDED RANGE

The CMX can be configured with Extended Range (ER) Calibration. The ranges that are currently supported for extended range calibration are 10T, 50T, and

500T. Legacy CMX devices are calibrated from 10% to 100% of full-scale pressure (over one pressure decade). The Extended Range CMX is calibrated from 1% to 100% of full-scale (over two pressure decades).

7.2 EXTENDED RANGE ACCURACY SPECIFICATION

The accuracy specification for Extended Range is shown in Table 13:

Table 13: CMX Extended Range Accuracy Specifications

Inlet Pressure

1% to 10%

10% to 100%

Accuracy Specification CMXER (digital mode)

0.15% + 0.006% FS

0.15% + 0.006% FS

Dual-decade or extended range calibration enables the CMX to meet strict accuracy specifications in the second pressure decade (1% to 10%) in addition to the first decade (10% to 100%). Legacy gauges are only calibrated in the first decade.

6

7

4

5

8

9

1

2

3

7.3 CMX EXTENDED RANGE CONNECTOR PIN-OUT

The pin-out for the extended Range CMX is shown in Table 14. Note that the pin-out for the extended range device is very similar to the IN2 and IN3XP MFCs with a DB9 connector. The wiring allows the user to use the CMX with the same

DB9 connector wiring that is used for IN2 and IN3XP MFCs.

!

CAUTION

!

The CMXER connector wiring is NOT the same as the legacy CMX DB9 wiring.

Table 14: Extended Range Pin-out

Pin CMX Extended Range DB9

Connector Wiring

Not Connected (N/A)

Pressure Output 0-10VDC

+15VDC

Power Supply Common

-15VDC

Not Connected (N/A)

Signal Common

RS-485 Positive

RS-485 Negative

CMX Standard Connector

Wiring

Pressure Output

Not Used

Temperature status (TTL)

+15VDC

-15VDC

Case Ground

Remote Zero

Signal Ground

Power Supply Common

IN2 and IN3XP Connector

Wiring (D/A)

Valve Voltage 0-5VDC

Flow Output 0-5VDC

+15VDC

Power Supply Common

-15VDC

Setpoint 0-5VDC

Signal Common

RS-485 Positive

RS-485 Negative p.32

7.0

_EXTENDED RANGE

The series communication port signals are included in the DB9 connector which enables the user to communicate to the device over the same cable as is used for power and analog pressure output.

Contact Brooks regarding questions concerning the digital communications protocol.

p.33

_SERVICE AND RETURN

8.0

DANGER

In order to protect our technical support staff, we MUST know all of the chemicals to which the

Brooks CMX you are returning has been exposed. This information will help us determine if special handling is required to process your repair.

As a result, you MUST complete and submit a Contamination

Disclosure Form when you return your Brooks CMX for service. NOTE: a copy of this form is provided in this manual.

Place a copy of the completed

Contamination Disclosure Form on the outside of the shipping container and place the original inside the shipping container on

TOP of the Brooks CMX you are returning.

8.0 SERVICE AND RETURN

8.1 SERVICE INSTRUCTIONS

Contact the nearest Brooks Technical Support office prior to returning any CMX.

In response to your call, a qualified Technical Support Engineer will assist in diagnosing the CMX.

When contacting the Technical Support Group, please have available:

• the serial number on the CMX case,

• the gas(es) to which the CMX has been exposed, and

• a description of the process system on which the CMX is installed.

If the Technical Support Engineer determines that the Brooks CMX requires servicing, you will be instructed to return the CMX to a specified Brooks Service

Center; in addition you will be given a Global Customer Care (GCC) number.

The GCC number will allow you to track the progress of your return until a resolution is achieved.

• If you do not send all of the requested information, our response to your service request may be delayed.

• If you do not send the Contamination Disclosure Form, your service request may be delayed or rejected.

8.2 RETURN INSTRUCTIONS

If it is necessary to return the Brooks CMX, please provide:

A disclosure of all chemicals exposed to the equipment enables us to protect our personnel and environment and to determine if special handling is required to process your repair. Therefore, a Contamination Disclosure Form must be completed (Figure 26, Contamination Disclosure Form (Example), on Page 35).

Please place a copy of the completed Contamination Disclosure Form on the exterior of the shipping container and include the original along side the product being returned.

• Omission of pertinent information may result in a delay in processing your order.

• Omission of the Contamination Disclosure Form may result in either a delay or rejection of you service request.

If Brooks can be of assistance in any way, please contact Brooks Technical

Support. p.34

8.0

Figure 26: Contamination Disclosure Form (Example)

p.35

_

p.36

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

9.0 - Essential Instructions

Brooks

®

CMX Series

Bulgarian

Ɉɫɧɨɜɧɢ ɢɧɫɬɪɭɤɰɢɢ ɉɪɨɱɟɬɟɬɟ ɩɪɟɞɢ ɪɚɛɨɬɚ

!

Brooks Instrument ɩɪɨɟɤɬɢɪɚ

, ɩɪɨɢɡɜɟɠɞɚ ɢ ɬɟɫɬɜɚ ɩɪɨɞɭɤɬɢɬɟ ɫɢ ɩɨ ɬɚɤɴɜ ɧɚɱɢɧ

, ɱɟ ɬɟ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ ɦɧɨɝɨɛɪɨɣɧɢ ɧɚɰɢɨɧɚɥɧɢ ɢ ɦɟɠɞɭɧɚɪɨɞɧɢ ɫɬɚɧɞɚɪɬɢ

.

Ɍɟɡɢ ɨɛɨɪɭɞɜɚɧɢɹ ɬɪɹɛɜɚ ɩɪɚɜɢɥɧɨ ɞɚ ɫɟ ɢɧɫɬɚɥɢɪɚɬ

, ɟɤɫɩɥɨɚɬɢɪɚɬ ɢ ɩɨɞɞɴɪɠɚɬ ɡɚ ɞɚ ɫɟ ɝɚɪɚɧɬɢɪɚ

, ɱɟ ɳɟ ɦɨɝɚɬ ɞɚ ɪɚɛɨɬɹɬ ɫɴɨɬɜɟɬɧɨ ɧɚ ɬɟɯɧɢɬɟ ɧɨɪɦɚɥɧɢ ɫɩɟɰɢɮɢɤɚɰɢɢ

. ɋɥɟɞɜɚɳɢɬɟ ɢɧɫɬɪɭɤɰɢɢ ɬɪɹɛɜɚ ɞɚ ɫɟ ɫɩɚɡɜɚɬ ɢ ɬɪɹɛɜɚ ɞɚ ɫɟ ɜɤɥɸɱɚɬ ɜ ɩɪɨɝɪɚɦɚɬɚ ɡɚ ɛɟɡɨɩɚɫɧɨɫɬ ɧɚ ɬɪɭɞɚ ɩɪɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ

, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ ɢ ɩɨɞɞɪɴɠɤɚɬɚ ɧɚ ɩɪɨɞɭɤɬɢɬɟ ɧɚ

Brooks Instrument. x

Ɂɚ ɞɚ ɫɟ ɝɚɪɚɧɬɢɪɚ ɯɚɪɚɤɬɟɪɧɚɬɚ ɩɪɨɢɡɜɨɞɢɬɟɥɧɨɫɬ

, ɢɧɫɬɚɥɢɪɚɧɟɬɨ

, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ

, ɚɤɬɭɚɥɢɡɢɪɚɧɟɬɨ

, ɩɪɨɝɪɚɦɢɪɚɧɟɬɨ ɢ ɩɨɞɞɪɴɠɤɚɬɚ ɧɚ ɩɪɨɞɭɤɬɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɢɡɜɴɪɲɜɚɬ ɫɚɦɨ ɨɬ ɤɜɚɥɢɮɢɰɢɪɚɧ ɩɟɪɫɨɧɚɥ

. x ɉɪɨɱɟɬɟɬɟ ɜɫɢɱɤɢ ɢɧɫɬɪɭɤɰɢɢ ɩɪɟɞɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ

, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ ɢ ɩɨɞɞɪɴɠɤɚɬɚ ɧɚ ɩɪɨɞɭɤɬɚ

.

Ⱥɤɨ ɬɨɜɚ ɪɴɤɨɜɨɞɫɬɜɨ ɧɟ ɟ ɫɴɨɬɜɟɬɫɬɜɚɳɨɬɨ ɢɡɞɚɧɢɟ

, ɜɢɠɬɟ ɧɚ ɡɚɞɧɚɬɚ ɨɛɥɨɠɤɚ ɢɧɮɨɪɦɚɰɢɹɬɚ ɡɚ ɤɨɧɬɚɤɬ ɫ ɦɟɫɬɧɢɹ ɬɴɪɝɨɜɫɤɢ ɨɮɢɫ

.

Ɂɚɩɚɡɟɬɟ ɬɨɜɚ ɪɴɤɨɜɨɞɫɬɜɨ ɡɚ ɩɨ

ɤɴɫɧɨ ɢɧɮɨɪɦɢɪɚɧɟ

.

ȼɇɂɆȺɇɂȿ

: ɇɟ ɪɚɛɨɬɟɬɟ ɫ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɡɜɴɧ ɞɢɚɩɚɡɨɧɢɬɟ

, ɭɤɚɡɚɧɢ ɜ ɢɧɫɬɪɭɤɰɢɹɬɚ ɢ ɪɴɤɨɜɨɞɫɬɜɨɬɨ ɩɨ ɟɤɫɩɥɨɚɬɚɰɢɹ

. ɇɟɢɡɩɴɥɧɟɧɢɟɬɨ ɧɚ ɬɨɜɚ ɦɨɠɟ ɞɚ ɞɨɜɟɞɟ ɞɨ ɫɟɪɢɨɡɧɢ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ ɢ

/ ɢɥɢ ɩɨɜɪɟɠɞɚɧɟ ɧɚ ɨɛɨɪɭɞɜɚɧɟɬɨ

.

x

Ⱥɤɨ ɧɟ ɪɚɡɛɢɪɚɬɟ ɧɹɤɨɢ ɢɧɫɬɪɭɤɰɢɢɬɟ

, ɫɜɴɪɠɟɬɟ ɫɟ ɫ ɩɪɟɞɫɬɚɜɢɬɟɥɹ ɧɚ

Brooks Instrument ɡɚ ɢɡɹɫɧɹɜɚɧɟ ɧɚ ɩɪɨɛɥɟɦɚ

. x ɋɩɚɡɜɚɣɬɟ ɜɫɢɱɤɢ ɩɪɟɞɭɩɪɟɠɞɟɧɢɹ

, ɩɪɢɡɨɜɢ ɢ ɢɧɫɬɪɭɤɰɢɢ ɨɡɧɚɱɟɧɢ ɜɴɪɯɭ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɥɢ ɞɨɫɬɚɜɟɧɢ ɡɚɟɞɧɨ ɫ ɧɟɝɨ

. x ɂɧɫɬɚɥɢɪɚɣɬɟ ɨɛɨɪɭɞɜɚɧɟɬɨ ɫɴɨɬɜɟɬɧɨ ɧɚ ɭɤɚɡɚɧɢɹɬɚ ɜ ɢɧɫɬɪɭɤɰɢɹɬɚ ɡɚ ɢɧɫɬɚɥɢɪɚɧɟ ɢ ɧɚ ɞɟɣɫɬɜɚɳɢɬɟ ɧɚ ɦɟɫɬɧɢ ɢ ɧɚɰɢɨɧɚɥɧɢ ɩɪɟɞɩɢɫɚɧɢɹ

. ɋɜɴɪɡɜɚɣɬɟ ɩɪɨɞɭɤɬɢɬɟ ɫɚɦɨ ɤɴɦ ɩɨɞɯɨɞɹɳɢ ɢɡɬɨɱɧɢɰɢ ɧɚ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɢ ɧɚɥɹɝɚɧɟ

. x ɏɨɞ

: (1)

Ȼɚɜɧɨ ɜɴɜɟɞɟɬɟ ɫɢɫɬɟɦɚɬɚ ɩɨɞ ɧɚɥɹɝɚɧɟ

.

Ȼɚɜɧɨ ɨɬɜɨɪɟɬɟ ɪɚɛɨɬɧɢɬɟ ɤɥɚɩɚɧɢ ɡɚ ɞɚ ɫɟ ɢɡɛɟɝɧɚɬ ɤɨɥɟɛɚɧɢɹɬɚ ɧɚ ɩɨɬɨɤɚ

. (2) ɉɪɨɜɟɪɟɬɟ ɞɚɥɢ ɧɹɦɚ ɢɡɬɢɱɚɧɟ ɩɪɢ ɜɯɨɞɧɨɬɨ ɢ ɢɡɯɨɞɧɨɬɨ ɫɴɟɞɢɧɟɧɢɟ ɧɚ ɪɚɡɯɨɞɨɦɟɪɚ

.

Ⱥɤɨ ɧɹɦɚ ɢɡɬɢɱɚɧɟ

, ɧɚɩɴɥɧɟɬɟ ɫɢɫɬɟɦɚɬɚ ɞɨ ɪɚɛɨɬɧɨ ɧɚɥɹɝɚɧɟ

. x ɉɪɟɞɢ ɢɡɜɴɪɲɜɚɧɟ ɧɚ ɩɨɞɞɪɴɠɤɚɬɚ ɧɟɩɪɟɦɟɧɧɨ ɩɪɨɜɟɪɟɬɟ ɞɚɥɢ ɪɚɛɨɬɧɢɹɬ ɬɪɴɛɨɩɪɨɜɨɞ ɧɟ ɫɟ ɧɚɦɢɪɚ ɩɨɞ ɧɚɥɹɝɚɧɟ

.

Ⱥɤɨ ɫɚ ɧɟɨɛɯɨɞɢɦɢ ɪɟɡɟɪɜɧɢ ɱɚɫɬɢ

, ɫ ɨɩɪɟɞɟɥɟɧɢɬɟ ɨɬ

Brooks Instrument ɪɟɡɟɪɜɧɢ ɱɚɫɬɢ ɬɪɹɛɜɚ ɞɚ ɛɨɪɚɜɢ ɫɚɦɨ ɤɜɚɥɢɮɢɰɢɪɚɧ ɩɟɪɫɨɧɚɥ

. ɇɟɪɚɡɪɟɲɟɧɢɬɟ ɱɚɫɬɢ ɢ ɩɪɨɰɟɞɭɪɢ ɦɨɝɚɬ ɞɚ ɨɤɚɠɚɬ ɜɥɢɹɧɢɟ ɜɴɪɯɭ ɪɚɛɨɬɚɬɚ ɧɚ ɩɪɨɞɭɤɬɚ

, ɢ ɫɴɳɨ ɞɚ ɡɚɫɬɪɚɲɚɬ ɛɟɡɨɩɚɫɧɨɫɬɬɚ ɧɚ ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ

.

Ɂɚɦɟɫɬɜɚɧɟɬɨ ɫ ɧɟɨɪɢɝɢɧɚɥɧɢ ɱɚɫɬɢ ɦɨɠɟ ɞɚ ɞɨɜɟɞɟ ɞɨ ɩɨɠɚɪ

, ɨɩɚɫɧɨɫɬ ɨɬ ɬɨɤɨɜ ɭɞɚɪ ɢɥɢ ɧɟɩɪɚɜɢɥɧɚ ɪɚɛɨɬɚ

. x ȼɫɢɱɤɢ ɜɪɚɬɢ ɧɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɧɟɩɪɟɦɟɧɧɨ ɞɚ ɛɴɞɚɬ ɡɚɬɜɨɪɟɧɢ

, ɚ ɡɚɳɢɬɧɢɬɟ ɩɨɤɪɢɬɢɹ ɞɚ ɛɴɞɚɬ ɧɚ ɦɹɫɬɨɬɨ ɫɢ

, ɡɚ ɞɚ ɫɟ ɢɡɛɟɝɧɚɬ ɬɨɤɨɜɢɬɟ ɭɞɚɪɢ ɢ ɬɟɥɟɫɧɢɬɟ ɩɨɜɪɟɞɢ

, ɨɫɜɟɧ ɚɤɨ ɤɜɚɥɢɮɢɰɢɪɚɧɢ ɫɩɟɰɢɚɥɢɫɬɢ ɢɡɜɴɪɲɜɚɬ ɪɚɛɨɬɢ ɩɨ ɧɟɝɨɜɨɬɨ ɩɨɞɞɴɪɠɚɧɟ

.

ȼɇɂɆȺɇɂȿ

: ɉɪɢ ɨɛɨɪɭɞɜɚɧɢɹɬɚ ɫ ɩɪɨɬɢɱɚɳɢ ɬɟɱɧɨɫɬɢ

, ɚɤɨ ɩɨ ɧɹɤɚɤɜɚ ɩɪɢɱɢɧɚ ɟ ɧɟɨɛɯɨɞɢɦɨ ɞɚ ɫɟ ɡɚɬɜɨɪɹɬ ɧɚɦɢɪɚɳɢɬɟ ɫɟ ɞɨ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɡɯɨɞɧɢ ɢ ɜɯɨɞɧɢ ɤɥɚɩɚɧɢ

, ɨɛɨɪɭɞɜɚɧɟɬɨ ɬɪɹɛɜɚ ɧɚɩɴɥɧɨ ɞɚ ɫɟ ɢɡɩɪɚɡɧɢ

. ɇɟɢɡɩɴɥɧɟɧɢɟɬɨ ɧɚ ɬɨɜɚ ɦɨɠɟ ɞɚ ɩɪɢɱɢɧɢ ɬɨɩɥɢɧɧɨ ɪɚɡɲɢɪɟɧɢɟ ɧɚ ɬɟɱɧɨɫɬɬɚ

, ɤɨɟɬɨ ɦɨɠɟ ɞɨ ɫɩɭɤɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢ ɞɚ ɞɨɜɟɞɟ ɞɨ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ

.

ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ

(PED)

ȼɫɢɱɤɢ ɫɴɨɪɴɠɟɧɢɹ ɩɨɞ ɧɚɥɹɝɚɧɟ ɫ ɜɴɬɪɟɲɧɨ ɧɚɥɹɝɚɧɟ ɧɚɞ

0,5 bar (g) ɢ ɫ ɪɚɡɦɟɪ ɩɨ

ɝɨɥɹɦ ɨɬ

25 mm ɢɥɢ

1" ( ɢɧɱ

), ɩɨɩɚɞɚɬ ɩɨɞ ɞɟɣɫɬɜɢɟɬɨ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ

(PED). x

Ƚɥɚɜɚ

Ɍɟɯɧɢɱɟɫɤɢ ɞɚɧɧɢ

” ɧɚ ɧɚɫɬɨɹɳɨɬɨ ɪɴɤɨɜɨɞɫɬɜɨ ɫɴɞɴɪɠɚ ɫɜɴɪɡɚɧɢɬɟ ɫ ɞɢɪɟɤɬɢɜɚɬɚ

PED ɢɧɫɬɪɭɤɰɢɢ

. x ɍɤɚɡɚɧɢɬɟ ɜ ɧɚɫɬɨɹɳɨɬɨ ɪɴɤɨɜɨɞɫɬɜɨ ɢɡɦɟɪɢɬɟɥɧɢ ɭɪɟɞɢ ɫɴɨɬɜɟɬɫɬɜɚɬ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ

97/23/ ȿɈ

. x ȼɫɢɱɤɢ ɪɚɡɯɨɞɨɦɟɪɢ ɧɚ

Brooks Instrument ɫɟ ɨɬɧɚɫɹɬ ɤɴɦ ɮɥɭɢɞɢ ɨɬ ɝɪɭɩɚ

1. x ɂɡɦɟɪɢɬɟɥɧɢɬɟ ɭɪɟɞɢ ɩɨ

ɝɨɥɟɦɢ ɨɬ

25 mm ɢɥɢ

1" ( ɢɧɱ

) ɫɴɨɬɜɟɬɫɬɜɚɬ ɧɚ

I, II ɢɥɢ

III ɤɚɬɟɝɨɪɢɹ ɫɩɨɪɟɞ

PED. x ɂɡɦɟɪɢɬɟɥɧɢɬɟ ɭɪɟɞɢ ɫ ɪɚɡɦɟɪɢ

25 mm ɢɥɢ

1" ( ɢɧɱ

), ɢɥɢ ɩɨ

ɦɚɥɤɢ

, ɫɥɟɞɜɚɬ ɞɨɛɪɚɬɚ ɢɧɠɟɧɟɪɧɚ ɩɪɚɤɬɢɤɚ

(SEP).

ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɟɥɟɤɬɪɨɦɚɝɧɢɬɧɚ ɫɴɜɦɟɫɬɢɦɨɫɬ

(EMC)

ɇɨɫɟɳɨɬɨ ɡɧɚɤɚ ɋȿ

( ɟɥɟɤɬɪɢɱɟɫɤɨ

/ ɟɥɟɤɬɪɨɧɧɨ

) ɨɛɨɪɭɞɜɚɧɟ ɧɚ

Brooks Instrument ɟ ɢɡɩɴɥɧɢɥɨ ɭɫɩɟɲɧɨ ɬɟɫɬɨɜɟɬɟ ɡɚ ɩɪɨɜɟɪɤɚ ɧɚ ɢɡɢɫɤɜɚɧɢɹɬɚ ɡɚ ɟɥɟɤɬɪɨɦɚɝɧɢɬɧɚ ɫɴɜɦɟɫɬɢɦɨɫɬ

( ɞɢɪɟɤɬɢɜɚ

EMC 89/336/E ɂɈ

).

Ɉɫɨɛɟɧɨ ɜɧɢɦɚɧɢɟ ɬɪɹɛɜɚ ɞɚ ɫɟ ɨɛɪɴɳɚ ɨɛɚɱɟ ɧɚ ɢɡɛɢɪɚɧɟɬɨ ɧɚ ɫɢɝɧɚɥɧɢɬɟ ɤɚɛɟɥɢ

, ɢɡɩɨɥɡɜɚɧɢ ɫ ɨɛɨɪɭɞɜɚɧɟɬɨ

, ɧɨɫɟɳɨ ɡɧɚɤɚ ɋȿ

.

Ʉɚɱɟɫɬɜɨ ɧɚ ɫɢɝɧɚɥɧɢɬɟ ɤɚɛɟɥɢ

, ɤɚɛɟɥɧɢɬɟ ɫɚɥɧɢɰɢ ɢ ɫɴɟɞɢɧɢɬɟɥɢ

:

Brooks Insturment ɩɪɟɞɥɚɝɚ ɜɢɫɨɤɨɤɚɱɟɫɬɜɟɧɢ ɤɚɛɟɥɢ

, ɨɬɝɨɜɚɪɹɳɢ ɧɚ ɢɡɢɫɤɜɚɧɢɹɬɚ ɧɚ

CE ɫɟɪɬɢɮɢɤɚɰɢɹɬɚ

.

Ⱥɤɨ ɢɡɩɨɥɡɜɚɬɟ ɫɨɛɫɬɜɟɧ ɫɢɝɧɚɥɟɧ ɤɚɛɟɥ

, ɬɪɹɛɜɚ ɞɚ ɢɡɛɟɪɟɬɟ ɬɚɤɴɜ

, ɤɨɣɬɨ ɟ ɧɚɩɴɥɧɨ ɡɚɳɢɬɟɧ ɫɴɫ

100%ɨɜɨ ɟɤɪɚɧɢɪɚɧɟ

. ɋɴɟɞɢɧɢɬɟɥɢɬɟ ɬɢɩ

„D” ɢɥɢ

„ ɤɪɴɝɨɜ

” ɬɪɹɛɜɚ ɞɚ ɛɴɞɚɬ ɟɤɪɚɧɢɪɚɧɢ ɫ ɦɟɬɚɥɟɧ ɳɢɬ

. ɉɪɢ ɧɟɨɛɯɨɞɢɦɨɫɬ ɡɚ ɮɢɤɫɢɪɚɧɟɬɨ ɧɚ ɳɢɬɚ ɧɚ ɤɚɛɟɥɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɢɡɩɨɥɡɜɚɬ ɦɟɬɚɥɧɢ ɤɚɛɟɥɧɢ ɫɚɥɧɢɰɢ

. ɓɢɬɴɬ ɧɚ ɤɚɛɟɥɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɫɜɴɪɠɟ ɫ ɦɟɬɚɥɧɨɬɨ ɩɨɤɪɢɬɢɟ ɢɥɢ ɦɟɬɚɥɧɢɹ ɫɚɥɧɢɤ ɢ ɜ ɞɜɚɬɚ ɤɪɚɹ ɞɚ ɫɟ ɟɤɪɚɧɢɪɚ ɜ

360°. ɓɢɬɴɬ ɬɪɹɛɜɚ ɞɚ ɛɴɞɟ ɡɚɡɟɦɟɧ

. ɋɴɟɞɢɧɢɬɟɥɢɬɟ ɡɚ ɩɟɱɚɬɧɢ ɩɥɚɬɤɢ ɫɚ ɫɬɚɧɞɚɪɬɧɨ ɧɟɦɟɬɚɥɧɢ

. ɂɡɩɨɥɡɜɚɧɢɬɟ ɤɚɛɟɥɢ ɬɪɹɛɜɚ ɞɚ ɛɴɞɚɬ ɡɚɳɢɬɟɧɢ ɫɴɫ

100%ɨɜɨ ɟɤɪɚɧɢɪɚɧɟ

, ɡɚ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ

CE ɫɟɪɬɢɮɢɤɚɰɢɹɬɚ

. ɓɢɬɴɬ ɬɪɹɛɜɚ ɞɚ ɛɴɞɟ ɡɚɡɟɦɟɧ

.

Ʉɨɧɮɢɝɭɪɚɰɢɹ ɧɚ ɤɨɧɬɚɤɬɢɬɟ

: ȼɢɠ ɩɪɢɥɨɠɟɧɚɬɚ ɢɧɫɬɪɭɤɰɢɹ ɡɚ ɟɤɫɩɥɨɚɬɚɰɢɹ

.

ȿɥɟɤɬɪɨɫɬɚɬɢɱɟɧ ɪɚɡɪɹɞ

(ESD

) ȼɇɂɆȺɇɂȿ

: ɉɪɢɛɨɪɴɬ ɫɴɞɴɪɠɚ ɟɥɟɤɬɪɨɧɧɢ ɤɨɦɩɨɧɟɧɬɢ

, ɤɨɢɬɨ ɫɚ ɱɭɜɫɬɜɢɬɟɥɧɢ ɤɴɦ ɫɬɚɬɢɱɧɨɬɨ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɢ ɦɨɝɚɬ ɞɚ ɫɟ ɩɨɜɪɟɞɹɬ ɨɬ ɧɟɝɨ

.

Ɍɪɹɛɜɚ ɞɚ ɫɟ ɫɩɚɡɜɚɬ ɫɴɨɬɜɟɬɧɢɬɟ ɩɪɨɰɟɞɭɪɢ ɩɨ ɜɪɟɦɟ ɧɚ ɢɡɜɚɠɞɚɧɟ

, ɫɥɚɝɚɧɟ ɢɥɢ ɞɪɭɝɨ ɛɨɪɚɜɟɧɟ ɫ ɜɴɬɪɟɲɧɢɬɟ ɦɨɧɬɚɠɧɢ ɩɥɚɬɤɢ ɢ ɭɫɬɪɨɣɫɬɜɚ

. ɉɪɨɰɟɞɭɪɚ ɡɚ ɪɚɛɨɬɚ

:

1. ɂɡɤɥɸɱɟɬɟ ɨɛɨɪɭɞɜɚɧɟɬɨ

.

2. ɉɟɪɫɨɧɚɥɴɬ ɬɪɹɛɜɚ ɞɚ ɫɟ ɡɚɡɟɦɢ ɫ ɝɪɢɜɧɚ ɢɥɢ ɞɪɭɝɨ ɛɟɡɨɩɚɫɧɨ ɢ ɩɨɞɯɨɞɹɳɨ ɡɚ ɰɟɥɬɚ ɫɪɟɞɫɬɜɨ

, ɩɪɟɞɢ ɞɚ ɢɧɫɬɚɥɢɪɚ

, ɢɡɜɚɠɞɚ ɢɥɢ ɪɟɝɭɥɢɪɚ ɦɨɧɬɚɠɧɚ ɩɥɚɬɤɚ ɢɥɢ ɞɪɭɝɨ ɜɴɬɪɟɲɧɨ ɭɫɬɪɨɣɫɬɜɨ

.

3. ɉɟɱɚɬɧɢɬɟ ɦɨɧɬɚɠɧɢ ɩɥɚɬɤɢ ɬɪɹɛɜɚ ɞɚ ɫɟ ɬɪɚɧɫɩɨɪɬɢɪɚɬ ɜ ɩɪɨɜɨɞɹɳɚ ɨɩɚɤɨɜɤɚ

. ɉɟɱɚɬɧɢɬɟ ɩɥɚɬɤɢ ɦɨɝɚɬ ɞɚ ɫɟ ɢɡɜɚɠɞɚɬ ɨɬ ɡɚɳɢɬɧɨɬɨ ɩɨɤɪɢɬɢɟ ɫɚɦɨ ɧɟɩɨɫɪɟɞɫɬɜɟɧɨ ɩɪɟɞɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ

.

Ɉɬɫɬɪɚɧɟɧɢɬɟ ɩɟɱɚɬɧɢ ɩɥɚɬɤɢ ɧɟɡɚɛɚɜɧɨ ɬɪɹɛɜɚ ɞɚ ɫɟ ɫɥɨɠɚɬ ɜ ɡɚɳɢɬɧɚ ɨɩɚɤɨɜɤɚ

, ɫɥɭɠɟɳɚ ɡɚ ɬɪɚɧɫɩɨɪɬɢɪɚɧɟ

, ɫɤɥɚɞɢɪɚɧɟ ɢɥɢ ɜɪɴɳɚɧɟ ɧɚ ɩɪɨɢɡɜɨɞɢɬɟɥɹ

.

Ɂɚɛɟɥɟɠɤɢ

:

ɇɟ ɟ ɭɧɢɤɚɥɧɨ ɹɜɥɟɧɢɟ

, ɱɟ ɬɨɡɢ ɩɪɢɛɨɪ ɫɴɞɴɪɠɚ ɱɭɜɫɬɜɢɬɟɥɧɢ ɤɴɦ ɟɥɟɤɬɪɨɫɬɚɬɢɱɧɢɹ ɡɚɪɹɞ

(ESD) ɤɨɦɩɨɧɟɧɬɢ

.

Ȼɨɥɲɢɧɫɬɜɨɬɨ ɨɬ ɫɴɜɪɟɦɟɧɧɢɬɟ ɟɥɟɤɬɪɨɧɧɢ ɩɪɢɛɨɪɢ ɫɴɞɴɪɠɚɬ ɤɨɦɩɨɧɟɧɬɢ

, ɢɡɝɨɬɜɟɧɢ ɩɨ ɬɟɯɧɨɥɨɝɢɹ ɦɟɬɚɥ

ɨɤɢɫ

(NMOS, SMOS ɢ ɬ

.

ɧ

.).

Ɉɩɢɬɴɬ ɞɨɤɚɡɜɚ

, ɱɟ ɞɚɠɟ ɢ ɦɚɥɤɨ ɤɨɥɢɱɟɫɬɜɨ ɫɬɚɬɢɱɟɫɤɨ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɦɨɠɟ ɞɚ ɩɨɜɪɟɞɢ ɢɥɢ ɫɴɫɢɩɟ ɬɟɡɢ ɩɪɢɛɨɪɢ

. ɉɨɜɪɟɞɟɧɢɬɟ ɤɨɦɩɨɧɟɧɬɢ ɞɚɠɟ ɚɤɨ ɩɪɢɜɢɞɧɨ ɪɚɛɨɬɹɬ ɩɪɚɜɢɥɧɨ

, ɩɪɨɹɜɹɜɚɬ ɧɚɱɚɥɧɢ ɧɟɢɡɩɪɚɜɧɨɫɬɢ

.

9.0 - Essential Instructions

Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

Czech

Základní instrukce

P

Ĝ ed instalací si p

Ĝ e

þ t

Č te následující instrukce!

Spole

þ nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard

Ĥ

. P

Ĝ

ístroje musí být

Ĝ

ádn

Č

nainstalovány, používány a udržovány tak, aby byl zajišt

Č n jejich nep

Ĝ etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující pokyny a integrovat jejich obsah do svého bezpe

þ nostního programu p

Ĝ i instalování, používání a udržování produkt

Ĥ

spole

þ nosti Brooks. x zajišt

Č ní správné funkce za

Ĝ

ízení mohou jeho instalaci, obsluhu, programování, údržbu a aktualizace firmwaru provád

Č t výhradn

Č x kvalifikované osoby.

P

Ĝ ed instalací, provozem a údržbou produktu si prostudujte všechny pokyny. Pokud tato p

Ĝ

íru

þ ka není tou správnou p

Ĝ

íru

þ kou pro dané za

Ĝ

ízení, informujte se na zadní stran

Č

obálky o kontaktu na místní prodejní kancelá

Ĝ

. Uchovejte si tuto p

Ĝ

íru

þ ku pro pozd

Č jší pot

Ĝ ebu.

UPOZORN ċ

NÍ: Neprovozujte za

Ĝ

ízení v rozsahu mimo daný rozsah v provozní p

Ĝ

íru

þ ce. Porušení tohoto upozorn

Č ní m

Ĥ že mít za následek vážné újmy na zdraví a vést k poškození za

Ĝ

ízení.

x n

Č kterým pokyn

Ĥ m nerozumíte, kontaktujte svého prodejního zástupce spole

þ nosti Brooks a vyžádejte si objasn

Č ní. x x

Dodržujte všechny výstrahy, upozorn

Č ní a pokyny, uvedené a vyzna

þ ené na produktu, nebo s ním dodané.

Namontujte

Ĥ sobem podle správné montážní p všechny produkty ke správným zdroj

Ĥ m elektrické energie a stla

þ ených médií.

Ĝ

íru

þ ky a podle platných místních a národních p

Ĝ edpis

Ĥ

. P

Ĝ ipojte x

Postup: (1) Pomalu do systému p

Ĝ ivád

Č jte médium. Pro zabrán

Č ní vzniku ráz

Ĥ

v systému otvírejte procesní ventily postupn

Č

. (2) P t

Č snost vstupního a výstupního p

Ĝ ipojení pr

Ĥ tokom

Č ru. Pokud nezjistíte žádné net

Č snosti, postupn

Č

zvedejte tlak na provozní hodnotu.

Ĝ ekontrolujte x

P

Ĝ ed provád

Č ním servisních prací zkontrolujte, zda systém není pod tlakem. V p

Ĝ

ípad

Č

pot

Ĝ eby vým

Č ny díl

Ĥ

zajist

Č te, aby byly použity náhradní sou

þ

ásti specifikované spole

þ ností Brooks Instrument a vým

Č nu provád

Č la kvalifikovaná osoba. Použití neschválených díl

Ĥ

a postup

Ĥ

m

Ĥ že negativn

Č ovlivnit efektivitu a bezpe

þ nost procesu. Použití náhrad za originální díly m

Ĥ že zp

Ĥ sobit požár, úraz elektrickým proudem nebo nesprávnou funkci. x

Pokud není zrovna provád

Č na údržba kvalifikovanou osobou, ujist

Č te se, že za

Ĝ

ízení je opat

Ĝ eno všemi p

Ĝ edepsanými kryty.

UPOZORN ċ

NÍ: Pokud je u za

Ĝ

ízení s pr

Ĥ tokem kapalin nutno z jakéhokoli d

Ĥ vodu uzav

Ĝ

ít vstupní a výstupní ventily, je nutné za

Ĝ

ízení kompletn

Č

vyprázdnit. Pokud tak neu

þ iníte, m

Ĥ že z d

Ĥ vodu teplotní roztažnosti zbytk

Ĥ

média v za

Ĝ

ízení dojít k jeho poškození nebo k ohrožení zdraví osob.

Evropská sm

Č rnice pro tlakové za

Ĝ

ízení (PED)

x x

Na veškerá tlaková za

Ĝ

ízení s vnit

Ĝ ním tlakem vyšším než 0,5 baru (g) a velikosti v

Č tší než 25 mm nebo 1" (palec) se vztahuje platnost sm

Č rnice o tlakovém za

Ĝ

ízení (PED).

Kapitola „Technické údaje“ v této p

Ĝ

íru

þ ce obsahuje d

Ĥ ležité bezpe

þ nostní a provozní pokyny související se sm

Č rnicí PED. x x

M

ČĜ icí p

Ĝ

ístroje popsané v této p

Ĝ

íru

þ ce jsou v souladu se sm

Č rnicí EN 97/23/ES.

M

M

ČĜ

ČĜ icí p icí p

Ĝ

Ĝ pr

Ĥ tokom

ístroje v

Č

Č ry spole

þ nosti Brooks Instrument spadají do rámce Kapaliny, skupina I. tší než 25 mm nebo 1" (palec) jsou v souladu se sm

Č rnicí PED, kategorii I, II nebo III

ístroje s velikostí 25 mm nebo 1" (palec) a menší spadají do rámce Správných technických postup

Ĥ

(SEP).

Evropská sm

Č rnice pro elektromagnetickou kompatibilitu (EMC)

Elektrické/elektronické za

Ĝ

ízení Brooks Instrument nesoucí zna

þ ku CE bylo úsp

Č

šn

Č

testováno dle p

Ĝ edpis

Ĥ

pro elektromagnetickou kompatibilitu

(sm

Č rnice EMC

þ

. 89/336/EHS).

Výb

Č ru signálních kabel

Ĥ

pro použití se za

Ĝ

ízením ozna

þ eném CE je nutné v

Č novat zvláštní pozornost.

Kvalita signálních kabel

Ĥ

, kabelových pr

Ĥ chodek a konektor

Ĥ

:

Brooks Instrument dodává vysoce jakostní kabely spl

Ė ující požadavky kvalitativního za

Ĝ azení CE. Pokud chcete použít vlastní signální kabely, zvolte typy s kvalitním stín

Č ním všech žil a v celé délce trasy.

V p

Ĝ

ípad

Č

použití konektor

Ĥ

kruhových nebo tvaru „D“, musí mít tyto kovové stín

Č ní. V p

Ĝ

ípad

Č

jejich použití, musí kovové kabelové pr

Ĥ chodky být propojeny se stín

Č ním kabelu.

Stín

Č ní by m

Č lo být p

Ĝ ipojené ke kovovému t

Č lesu p

Ĝ

ístroje nebo krytu, na obou koncích kabelu a po celém jeho obvodu.

Stín

Č ní by m

Č lo být uzemn

Č no.

P

Ĝ

ípojky vedoucí ke kartám podle norem jsou nekovová. Pro spln

Č ní požadavk

Ĥ

p

Ĝ edpis

Ĥ

CE musí být použité kabely kompletn

Č

stín

Č ny.

Stín

Č ní by m

Č lo být uzemn

Č no.

Konfigurace kontakt

Ĥ

je uvedena v p

Ĝ iloženém návodu k obsluze.

Elektrostatický výboj (ESD)

UPOZORN ċ

NÍ: Tento p

Ĝ

ístroj obsahuje komponenty citlivé na poškození statickou elekt

Ĝ inou. P

Ĝ i montáži, demontáži

þ i jiné manipulaci s vnit

Ĝ ními elektronickými obvody je pot

Ĝ eba dodržovat p

Ĝ

íslušné postupy.

Postup ošet

Ĝ ování:

1.

Odpojte p

Ĝ

ístroj od napájení.

2.

Osoba provád

Č jící údržbu má být p

Ĝ i instalaci, vyjímání

þ i práci na desce plošných spoj

Ĥ

nebo jiné vnit

Ĝ ní elektronice uzemn

Č na zemnícím náramkem, nebo jiným vyhovujícím zp

Ĥ sobem.

3.

Desky plošných spoj

Ĥ

je nutné p

Ĝ epravovat v elektricky vodivém obalu. Plošné spoje vyjímejte z vodivého obalu až bezprost

Ĝ edn

Č

p

Ĝ ed instalací do p

Ĝ

ístroje! Plošné spoje vyjmuté z p

Ĝ

ístroje a ur

þ ené pro další využití, op

Č t neprodlen

Č

umíst

Č te do ochranného obalu.

Poznámky:

Existence prvk

Ĥ

, citlivé na elektrostatické výboje (ESD) v p

Ĝ

ístrojích je

þ astým jevem. Prvky s technologií oxidu kov

Ĥ

(NMOS,SMOS) jsou používány u v

Č tšiny moderních elektronických za

Ĝ

ízení. Zkušenosti dokazují, že i jen malé elektrostatické výboje mohou poškodit nebo zni

þ it tyto za

Ĝ

ízení. U poškozených sou

þ

ástek, jakkoli zdánliv

Č

pracujících bezchybn

Č

, dochází brzy k poruše.

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

9.0 - Essential Instructions

Brooks

®

CMX Series

Dansk

Grundlæggende vejledninger

Læs disse før anvendelse!

Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode. De følgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation. x

For at garantere den passende kapacitet, er udstyrets installation, anvendelse, opdatering, programmering kun tilladt for kvalificeret personale. Alle vejledninger skal læses før produktets installation, anvendelse og reparation. x

Hvis denne manual ikke er den passende udgave, kontakt venligst jeres leverandør for yderligere information. x

Det anbefales at gemme denne manual for senere brug.

OBS.: Udstyret må ikke anvendes til andet end det er angivet i brugsanvisningen. Hvis denne regel brydes, kan der forekomme alvorlige personskader eller brist på udstyret.

x

Hvis vejledningerne ikke er forståelig, kontakt venligst Deres Brooks repræsentant for at afklare problemet som er opstået.

Overhold alle regler, som er markeret eller leveret sammen med udstyret. x

Installer udstyret efter den angivne installationsvejledning og gældende lovgivning for anvendelsesområde. Udstyret må kun tilsluttes med kabler og stik som overholder kravspecifikationerne i vejledningen. x

Ibrugtagning: (1) Åbn langsomt for trykket i systemet.. Åbn langsomt for alle procesventiler for at forhindre ustabil gas flow. (2) Tjek systemet for lækage ved tilsluttet måleinstrumenter, samlinger og andet tilsluttet udstyr. Derefter øg trykket i systemet indtil arbejdstrykket er opnået. x

Før reparation tjek altid at procesledningen ikke står under tryk. Hvis der er brug for at udskifte defekte dele må kun kvalificeret personale udføre arbejdet og af sikkerhedsmæssige årsager må der kun anvendes originale Brooks reservedele. Det er ikke tilladt at anvende reservedele eller udføre arbejde der på nogen måde kan ændre produktet fra dens oprindelige specifikationer. Manglende overholdelse af de foreskrevne procedurer kan resultere i brænd, og fare for elektrisk stød eller kortslutning. x

Af sikkerhedsmæssige årsager sørg for at alle sikkerhedsforanstaltninger er overholdt. Eksempelvis at alle afskærmninger eller anden form for installationsbeskyttelse er lukket eller installeret ved normal drift.

Advarsel.: Ved brug af udstyr som anvendes til væske skal det sikres at indgangsventilen og udgangsventilen ikke bliver lukket på samme tid i forbindelse med aftapning. Såfremt dette ikke overholdes, er der risiko for at væsken på grund af varmeudvikling ekspanderer og dette kan forårsage skade på udstyr og personer.

Det Europæiske direktiv for trykudstyr (PED)

På alt udstyr hvis indgangstryk er større end 0,5bar (g) og større end 25 mm eller en tomme, gælder det europæiske direktiv for trykapparater. Manualens x x x afsnit ”tekniske data” indeholder anvisninger om PED direktivet.

I manualen angives måleinstrumenter der er tilpasset direktivet 97/23/EK EU. x

Alle Brooks gennemstrømningsmålere tilhører væskegruppen nr. 1.

Alle målinstrumenter som er større end 25 mm eller en tomme beskrives i direktivet PED´s kategorier I, II eller III.

Alle målinstrumenter som er på 25 mm eller en tomme, eller mindre, beskrives i Sound Engineering Practice (SEP).

Det europæiske direktiv for elektromagnetisk kompatibilitet (EMC)

Alle Brooks instrumenter (elektrisk/elektronisk) som har CE markering er godkendt og testet ifølge direktiv nr. 89/336/EGK EMC om elektromagnetiske kompatibilitets forskrifter.

OBS: Man skal være opmærksom på hvilken type kabler der bruges til CE mærket udstyr..

Om kvalitet af signalkabler, kabeltilslutninger og koblinger:

Brooks tilbyder kabler af højest kvalitet, som er tilpasset CEE kvalificeringens forskrifter. Hvis man vælger at bruge egne kabler, skal man vælge et kabel som har den nødvendige afskærmning for at sikre 100 % mod udefra kommende støj.

Tilslutningerne ”D” eller rundformede tilslutninger skal være afskærmet med skal af metal.

Stikket skal være afskærmet på alle sider. Al afskærmning skal jordes..

Card Edge tilslutninger er ifølge standarden ikke metalliske.. De anvendte kabler og stik skal være 100 % afskærmet for at opfylde CE kravene.. De skal ligeledes jordes.

For stik konfigurationen se vedlagte brugsvejledning.

Elektrostatisk afladning (ESD)

OBS.: Udstyret indeholder tilbehør som kan skades ved elektrostatisk elektricitet. Alle forskrifter skal overholdes ved kontakt med alle elektriske komponenter både under drift og vedligeholdelse..

Behandlingsproceduren:

1.

Sluk for al strømtilførsel til udstyret.

2.

Personer som skal i kontakt med udstyret skal være jordet eller bære anden form for elektrisk beskyttende udstyr Manglende overholdelse af dette kan medføre skader på alle elektriske komponenter.

3.

Alle elektriske komponenter skal opbevares eller transporteres i deres originale indpakning for at sikre komponenter mod statiske elektriske skader.

Emballagen må ikke åbnes før komponenten skal installeres i udstyret. Ved afslutning af vedligeholdelse/reparation af udstyret, skal udstyret installeres med det samme eller pakkes forsvarligt hvis det skal på lager eller transporteres.

Bemærkninger:

Dette udstyr er ikke unik i den hensigt, at det indeholder for elektrostatisk afladning (ESD) sensitive reservedel. I de fleste elektronisk udstyr findes der metaloxyd teknologiske reservedel (NMOS, SMOS m.m.). Erfaringerne viser at selv den mindste statiske elektricitet kan skade, eller ødelægge disse instrumenter. Selv en fungerende elektrisk del kan have levetiden markant reduceret på grund af statisk elektricitet..

.

9.0 - Essential Instructions

Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

Dutch

Essentiële instructies

Lees ze voordat u verder gaat!

Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken. De volgende instructies moeten worden toegevoegd aan en geïntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert, bedient en onderhoudt.

Om de juiste prestaties te kunnen garanderen mag alleen gekwalificeerd personeel het product installeren, bedienen, updaten, programmeren en onderhouden.

Lees alle instructies voordat u het product gaat installeren, bedienen en onderhouden. Als dit niet de juiste handleiding is, kijk dan op de achterzijde voor contactinformatie van uw vertegenwoordiger. Bewaar deze handleiding voor later.

WAARSCHUWING: gebruik dit instrument niet als niet is voldaan aan de specificaties in de handleiding. Het niet naleven van deze waarschuwing kan ernstig letsel en/of schade aan de apparatuur tot gevolg hebben.

Als u één of meer instructies niet begrijpt, vraag dan om uitleg aan uw vertegenwoordiger van Brooks Instrument.

Neem alle waarschuwingen, voorschriften en instructies in acht die op het product zijn aangebracht of bij het product zijn geleverd.

Installeer uw apparatuur volgens de instructies in de bijgeleverde handleiding en in overeenstemming met de geldende lokale en nationale voorschriften.

Sluit alle producten aan op de juiste elektrische voedings- en drukbronnen.

Bediening: (1) Laat het systeem langzaam volstromen. Open de procesafsluiters langzaam om drukstoten te voorkomen. (2) Controleer op lekkages rondom de inlaat- en uitlaataansluitingen van de stromingsmeter. Als er geen lekkages zijn, kan het systeem op de bedrijfsdruk worden gebracht.

Zorg ervoor dat de procesleiding drukvrij is gemaakt voordat u servicewerkzaamheden gaat uitvoeren. Als vervangingsonderdelen nodig zijn, zorg er dan voor dat gekwalificeerd personeel de door Brooks Instrument gespecificeerde vervangingsonderdelen gebruikt. Niet goedgekeurde onderdelen en procedures kunnen de prestaties van het product en de veilige werking van uw proces in gevaar brengen. Niet goedgekeurde vervangingsonderdelen kunnen brand, elektrische schokken of een onjuiste werking tot gevolg hebben.

Zorg ervoor dat alle deksels van de apparatuur gesloten zijn en de afdekkingen gemonteerd zijn om elektrische schokken en lichamelijk letsel te voorkomen, behalve als gekwalificeerd personeel de onderhoudswerkzaamheden uitvoert.

WAARSCHUWING: bij vloeistofstroomapparaten waarvan de inlaat- en uitlaatkleppen om welke reden dan ook gesloten zijn, moet de vloeistof volledig worden afgetapt. Als dat wordt nagelaten, kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken.

PED-richtlijn (Pressure Equipment Directive)

Alle drukapparatuur met een interne druk van meer dan 0,5 barg en een diameter van meer dan 25 mm valt onder de PED-richtlijn. x

In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED-richtlijn. x x

De meters die in deze handleiding worden beschreven, voldoen aan de Europese richtlijn 97/23/EG.

Alle stromingsmeters van Brooks Instrument vallen in groep 1. x

Meters met een diameter van meer dan 25 mm voldoen aan de categorieën I, II of III van de PED-richtlijn. x

Meters met een diameter van 25 mm of kleiner voldoen aan de regels van goed vakmanschap.

Elektromagnetische compatibiliteit (EMC)

De elektronische apparatuur van Brooks Instrument met de CE-markering is succesvol getest in overeenstemming met de EMC-voorschriften volgens richtlijn

89/336/EEG.

De keuze van de signaalkabel voor gebruik in combinatie met apparatuur met CE-markering verdient speciale aandacht.

Kwaliteit van de signaalkabel, kabelafdichtingen en stekkers:

Brooks Instrument levert hoogwaardige kabels die voldoen aan de specificaties voor de CE-markering.

Als u zelf voor signaalkabel zorgt, moet u altijd een volledig afgeschermde kabel gebruiken.

Stekkers van het type “D” of ronde stekkers moeten zijn voorzien van een metalen afscherming. Indien nodig moeten metalen kabelafdichtingen worden gebruikt waarvan de afscherming voor het klemmen van de kabel kan worden gebruikt.

Het kabelscherm moet met het metalen omhulsel of de metalen afdichting worden verbonden en aan beide uiteinden rondom volledig worden afgeschermd.

De afscherming moet aan de aardpotentiaal worden aangesloten.

Card Edge Connectors zijn standaard niet van metaal. De gebruikte kabels moeten volledig zijn afgeschermd om te voldoen aan de CE-markering.

De afscherming moet aan de aardpotentiaal worden aangesloten.

Voor de pinconfiguratie: Raadpleeg de bijgevoegde handleiding.

Elektrostatische ontlading

VOORZICHTIG: Dit instrument bevat elektronische componenten die gevoelig zijn voor statische elektriciteit. Neem de juiste procedures in acht bij het verwijderen en installeren of bij andere werkzaamheden aan de interne printplaten of apparaten.

Procedure:

1. Schakel de voeding van de eenheid uit.

2. Het personeel moet zich met een polsbandje of ander veilig en geschikt hulpmiddel aarden voordat een printplaat of ander intern apparaat mag worden geïnstalleerd, verwijderd of aangepast.

3. Printplaten moeten in een geleidende verpakking worden vervoerd. De platen mogen pas vlak voor de eigenlijke installatie uit de beschermende verpakking worden gehaald. Verwijderde printplaten moeten onmiddellijk in de beschermende verpakking worden geplaatst om te worden getransporteerd, opgeslagen of teruggestuurd naar de fabriek.

Opmerkingen

Dit instrument is niet uniek als het gaat om componenten die gevoelig zijn voor elektrostatische ontlading. De meeste moderne elektronische apparaten bevatten componenten die gebruik maken van de metaaloxidetechnologie (NMOS, SMOS, enz.). Uit ervaring blijkt dat zelfs kleine hoeveelheden statische elektriciteit deze apparaten al dan niet onherstelbaar kunnen beschadigen. Beschadigde componenten, zelfs als ze goed lijken te functioneren, raken eerder defect.

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

9.0 - Essential Instructions

Brooks

®

CMX Series

Estonian

Olulised juhised

Enne kasutamist lugege hoolikalt läbi!

x x x

Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite nõuetele.

Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrument'i toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.

x

Nõuetekohase talitluse tagamiseks tohib toodet paigaldada, kasutada, täiustada, programmeerida ja hooldada ainult kvalifitseeritud personal. x

Enne toote paigaldamist, kasutamist ja hooldamist lugege kõik kasutusjuhised hoolikalt läbi. Kui käesolev kasutusjuhend ei vasta teie tootele, pöörduge kohaliku edasimüüja poole, kelle kontaktandmed leiate kasutusjuhendi tagakaanelt. Hoidke see kasutusjuhend edaspidiseks alles.

HOIATUS: ärge kasutage seda instrumenti väljaspool kasutusjuhendis spetsifitseeritud piirväärtusi. Selle hoiatuse eiramine võib põhjustada tõsiseid kehavigastusi ja/või kahjustada seadet.

Kui te saa mõne juhise mõttest aru, pöörduge selgituste saamiseks kohaliku Brooks Instrument’i edasimüüja poole.

Järgige kõiki hoiatusi, tähelepanule manitsusi ja juhiseid, mis on tootele peale kantud või tootega kaasa antud.

Seadme paigaldamisel järgige vastavas kasutusjuhendis toodud paigaldusjuhiseid ning asjakohaseid kohalikke ja riiklikke eeskirju. Ühendage tooted nõuetekohaste toite- ja surveallikatega. x

Talitlus: (1) Avage aeglaselt vool süsteemi. Vooluimpulsside vältimiseks avage tööventiilid aeglaselt. (2) Kontrollige, et voolukulumõõturi sisend- või väljundühenduste ümber ei ole lekkeid. Kui lekkeid ei ole, laske süsteemil saavutada töösurve. x

Enne seadme hooldamist veenduge, et kogu süsteem on surve alt vabastatud. Varuosasid tohib vahetada ainult kvalifitseeritud personal, kasutades selleks

Brooks Instrument’i poolt heakskiidetud varuosi. Mitteoriginaalvaruosade kasutamine ja ebapädev toimingute tegemine võivad kahjustada toote tööomadusi ja põhjustada riski tootmistegevuse ohutuse tagamisel. Originaalvaruosadele sarnaste osade kasutamine võib põhjustada tule- või elektrilöögiohtu või seadme väärtalitlust. x

Elektrilöögi- ja vigastuseohu vältimiseks peavad seadme luugid olema alati suletud ja kaitsekatted oma kohal, va seadme hooldamisel kvalifitseeritud isikute poolt.

HOIATUS: voolava vedelikuga seadmete kasutamisel – kui seadmega külgnevad sisend- ja väljundklapid on vaja mingil põhjusel sulgeda, tuleb seadmed vedelikust täiesti tühjaks lasta. Vastasel korral võib vedelik soojuse mõjul paisuda niivõrd, et seade puruneb. See võib põhjustada tõsiseid kehavigastusi.

Euroopa surveseadmete direktiiv (PED)

Euroopa surveseadmete direktiiv kohaldub kõikidele surveseadmetele, mille sisesurve on üle 0,5 baari (g) ja läbimõõt üle 25 mm või 1 tolli. x

Käesoleva kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid. x x x x

Käesolevas kasutusjuhendis kirjeldatud mõõturid vastavad EN direktiivi 97/23/EÜ nõuetele.

Brooks Instrument’i voolukulumõõturid kuuluvad vedelike 1. gruppi.

Mõõturid läbimõõduga üle 25 mm või 1 tolli vastavad surveseadmete direktiivi kategooriale I, II või III.

Mõõturitele läbimõõduga alla 25 mm või 1 tolli kohaldatakse häid inseneritavasid.

Euroopa elektromagnetilise ühilduvuse direktiiv (EMÜ)

Brooks Instrument’i (elektrilised/elektroonilised) seadmed, millele on omistatud CE-tähis, on edukalt läbinud asjakohased katsed ja vastavad elektromagnetilise

ühilduvuse nõuetele (EMÜ direktiiv 2004/108/EC (89/336/EMÜ)).

Kuid signaalkaabli valimisel on vaja pöörata suurt tähelepanu CE-tähisega seadmetele.

Signaalkaabli, läbiviigutihendite ja konnektorite kvaliteet

Brooks Instrument turustab kõrgekvaliteedilisi kaableid, mis vastavad CE-sertifikaadi nõuetele.

Olemasoleva kaabli kasutamisel jälgige, et kaabel oleks täielikult ümbritsetud varjestusega.

„D” või „Ring“-tüüpi konnektorid peavad olema varustatud metallvarjestusega. Kus kohaldatav, tuleb kasutada metallist läbiviike, mis tagavad kaabli varjestuse

ühenduse.

Kaabli varjestus ühendatakse metallkesta või läbiviigutihendiga ja on mõlemast otsast kaitstud 360° ulatuses.

Varjestus peab olema maandatud.

Mikroskeemide servaühendused on üldjuhul mittemetallist. Vastavuse tagamiseks CE-sertifikaadi nõuetele peavad kasutatud kaablid olema 100% varjestatud.

Varjestus peab olema maandatud.

Klemmide konfigureerimine: vt komplekti kuuluvat kasutusjuhendit.

Elektrostaatiline laeng

TÄHELEPANU: seade sisaldab staatilise elektri suhtes tundlikke elektroonikakomponente. Seadmesse paigaldatud trükkplaatide eemaldamisel ja paigaldamisel, samuti trükkplaadi või seadmega muude toimingute teostamisel järgige nõuetekohase käsitsemise juhiseid.

Käsitsemisjuhised

2.

3.

Enne trükkplaadi või mõne muu siseelemendi paigaldamist, eemaldamist või konfigureerimist peab personal olema maandatud läbi randmepaela või mõne muu sobiva vahendi.

Trükkplaate transporditakse voolujuhtivas konteineris. Võtke trükkplaat kaitsvast konteinerist välja vahetult enne selle paigaldamist. Seadmest eemaldatud trükkplaadid tuleb viivitamatult asetada kaitsvasse konteinerisse kas siis edasiseks transportimiseks, hoiustamiseks või tehasesse tagasisaatmiseks.

Kommentaarid

See seade ei ole ainus, mis sisaldab staatilise elektri suhtes tundlikke elemente. Enamik kaasaegsetest elektroonikaseadmetest sisaldavad komponente, mille valmistamiseks on kasutatud metalloksiidtehnoloogiat (NMOS, SMOS jne). Kogemused näitavad, et isegi väike kogus staatilist elektrit võib neid seadmeid kahjustada või isegi hävitada. Kuigi võib näida, et kahjustatud komponendid töötavad nõuetekohaselt, hakkavad talitlushäired ilmnema juba varakult.

9.0 - Essential Instructions

Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

Finnish

Perusohjeet

Lue ensin ohjeet huolellisesti!

Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.

Oikean toiminnan varmistamiseksi vain valtuutettu huoltohenkilö saa asentaa, käynnistää, päivittää, ohjelmoida ja huoltaa laitteita.

Lue kaikki käyttöohjeet koskien tuotteen asennusta, käyttöä ja huoltoa. Jos käyttöohje on puutteellinen, lisätietoja saa paikalliselta jälleenmyyjältä.

Yhteystiedot löytyvät oppaan kansilehdestä. Säilytä ohjeet.

VAROITUS!: Käyttöohjeessa ilmoitettujen standardien mukaisia ohjeita ja raja-arvoja ei saa ylittää. Rajoitusten laiminlyönti voi aiheuttaa tuotteen rikkoutumisen ja/tai vakavan henkilövahingon vaaran.

x

Jos ohjeissa on epäselvyyttä, ota yhteyttä Brooks Instrumentin edustajaan ongelman selvittämiseksi. x

Noudata kaikkia laitteessa olevia tai siihen liittyviä ohjeita, määräyksia ja varoituksia. x

Laittteen asennuksessa on noudatettava erityisiä asennusohjeita sekä voimassa olevia paikallisia ja kansainvälisiä määräyksiä. Laitteet saa yhdistää vain soveltuvaan sähkö- ja paineverkkoon. x

Asennusohjeita: (1) Päästä virtaus hitaasti järjestelmään. Avaa venttiilit hitaasti, jotta virtaus pysyy tasaisena. (2) Tarkista, ettei virtausmittarin sisään- ja ulosmenon vieressä ole vuotoa. Jos järjestelmässä ei ole vuotoa, aseta oikea käyttöpaine. x

Tarkista, että laitteeseen menevä paine on katkaistu ennen laitteen korjaamista välttääksesi äkillisen painepäästön aiheuttaman loukkaantumisriskin.

Mahdollisten varaosien tulee olla Brooks Instrumentin hyväksymiä. Vain valtuutettu huoltohenkilö saa asentaa varaosat. Ei-hyväksyttyjen varaosien käyttö voi vahingoittaa tuotteen toimintaa ja aiheuttaa turvallisuusriskin. Samoin ei-hyväksyttyjen varaosien käyttö voi aiheuttaa tulipalon, sähköiskun tai virhetoiminnan riskin. x

Varmista että kaikki kaikki laitteen ovet/luukut ovat suljettuina ja tarkista että suojakannet ovat paikoillaan estääksesi mahdollisen sähköisku- ja loukkaantumisvaaran.

VAROITUS!: Jos järjestelmässä virtaa neste ja laitteen sisään- ja ulosmenoventtiilit pitää sulkea, laite on ensin tyhjennettävä kokonaan.

Tyhjentämisen laiminlyönti aiheuttaa nesteen lämpölaajenemista, joka saattaa johtaa laitteen rikkoutumiseen ja henkilövahingon vaaraan.

Eurooppalainen painelaitedirektiivi (PED)

Painelaitteet, joidenpaine on suurempi kuin 0,5 bar ja joiden koko on suurempi kuin 25 mm tai 1 tuuma , kuuluvat eurooppalaiseen painelaitedirektiiviin

(PED).

x

PED direktiiviä koskevat määräykset löytyvät käyttöoppaan ’’Tekniset tiedot” -luvusta. x

Käyttöoppaassa kuvatut mittarit ovat 97/23/EC EU-direktiivin mukaisia. x

Kaikki Brooks Instrumentin virtausmittarit kuuluvat virtausryhmään 1. Laitteet jotka ovat suurempia, kuin 25 mm tai 1 tuuma, ovat PED I, II, III kategorien mukaisia.

x

Mittarit joiden koko on alle 25 mm tai 1 tuuma ovat hyvän konepajakäytännön (SEP) mukaisia.

Eurooppalainen direktiivi sähkömagneettisesta yhteensopivuudesta (EMC)

Brooks Instrumentin CE-merkin saaneet (sähkö/sähköiset) laitteet täyttävät EMC direktiivin vaatimukset ja testit sähkömagneettisesta yhteensopivuudesta

(2004/108/EC (no. 89/336/EGK EMC direktiivi)).

Erityistä huomioita on kiinnitettävä CE-merkittyjen laitteiden käytössä olevien kaapelien valintaan.

Kaapelien, kiinnikkeiden ja liittimien laatu:

Brooks Insturmentin kaapelit ovat korkealaatuisia ja täyttävät CE-merkintä direktiivin vaatimukset.

Muun valmistajan kaapelia käytettäessä on käytettävä 100% suojattua kaapelia.

Liittimien tulee olla häiriösuojattua tyyppiä. Tarvittaessa käytetään metallisia kiinnikkeitä kaapelin suojuksen kiinnittämiseen. Kaapelin suojakuoren pitää olla yhdistettynä metallisuojukseen tai laippaan ja sen pitää olla molemmista päistä suojattuna 360 o

. Suojaus päättyy maadoitukseen.

Standardin mukaan korttien liittimet eivät ole metallisia. Käytettyjen kaapelien suojaus on oltava 100%, jotta se täyttäisi CE-merkinnän direktiivin vaatimukset.

Suojaus päättyy maadoitukseen.

Napojen järjestys: Katso liitteenä oleva käyttöopas.

Elektrostaattinen purkaus (ESD)

VAROITUS!: Tuote sisältää elektroniikkakomponentteja jotka voivat vahingoittua staattisesta sähköstä. Sisäisten piirilevyjen purkamisessa,asennuksessa ja käsittelyssä tulee noudattaa kaikkia määräyksiä ja ohjeita.

Asennusohjeet:

1. Järjestelmän sähköt katkaistaan.

2. Laitteen kanssa työskentelevä henkilö on suojattava sähköiskuilta rannehihnalla tai muulla suojavarustuksella ennen piirilevyn tai muun sisäosan asennusta, poistamista tai korjaamista.

3. Piirilevyt kuljetetaan konduktiivisessa pakkauksessa. Piirilevyt puretaan paketista juuri ennen asennusta. Poistettu piirilevy on heti pakattava soveltuvaan suojapakkaukseen kuljettamista, varastoimista tai palautusta varten.

Huomautukset:

Tuotteen herkkyys elektrostaattiselle purkaukselle (ESD) ei ole epätavallista. Suurin osa elektroniikkatuotteista sisältää komponentteja jotka hyödyntävät metallioksiditekniikkaa (NMOS, SMOS jne.) Kokemusten mukaan pienikin elektrostaattinen purkaus voi aiheuttaa laitteiden virhetoiminnan tai vahingoittumisen. Vahingoittuneet komponentit saattavat aiheuttaa laitteen ennenaikaisen rikkoutumisen vaikka laite näyttäisi toimivan normaalisti.

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

9.0 - Essential Instructions

Brooks

®

CMX Series

French

Instructions essentielles

A lire avant de commencer !

Brooks Instrument conçoit, fabrique et teste ses produits pour répondre à de nombreuses normes nationales et internationales. Ces produits doivent être correctement installés, utilisés et entretenus pour pouvoir fonctionner dans le cadre de leurs spécifications normales. Les instructions qui suivent doivent être respectées et intégrées à votre programme de sécurité lors de l’installation, l’utilisation et l’entretien des produits Brooks Instrument.

• Afin d’assurer un fonctionnement correct, faites appel à du personnel qualifié pour l’installation, l’utilisation, la mise à jour, la programmation et l’entretien du produit.

• Lisez toutes les instructions avant l’installation, l’utilisation et l’entretien du produit. Si le présent manuel d’utilisation n’est pas le bon, consultez la dernière page de la couverture pour connaître le point de vente le plus proche. Conservez ce manuel d’utilisation pour pouvoir vous y reporter par la suite.

AVERTISSEMENT : n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation.

Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement.

• Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications.

• Tenez compte de tous les avertissements, précautions et instructions marquées sur le produit et fournies avec celui-ci.

• Installez votre équipement de la façon indiquée dans les instructions d’installation du manuel d’utilisation et conformément à la législation en vigueur au niveau local et national. Branchez tous les produits aux sources d’électricité et de pression agréées.

• Utilisation : (1) Faites lentement entrer le débit dans le système. Ouvrez progressivement les vannes de procédé pour éviter des pics de débits. (2) Vérifiez qu’il n’y a pas de fuite au niveau des branchements d’entrée et de sortie du débitmètre. S’il n’y a pas de fuite, amenez le système à sa pression d’utilisation.

• Avant de procéder à l’entretien, assurez-vous que la conduite de procédé n’est plus sous pression. Lorsqu’il faut remplacer une pièce, assurez-vous que les pièces de rechange sont celles indiquées par Brooks Instrument et que des personnes qualifiées effectuent le remplacement. Les pièces et procédures non autorisées peuvent porter atteinte au fonctionnement du produit et mettre en péril la sécurité de votre procédé. Les remplacements par des pièces d’apparence similaire peuvent entraîner des incendies, des risques électriques ou un mauvais fonctionnement.

• Vérifiez que toutes les trappes de l’équipement sont fermées et que les couvercles de protection sont en place pour éviter les chocs électriques et les blessures, sauf lorsque l’entretien est réalisé par des personnes qualifiées.

AVERTISSEMENT : dans le cas d’appareils à écoulement liquide, si les vannes d’entrée et de sortie adjacentes aux appareils doivent être fermées pour une raison quelconque, les appareils doivent être complètement vidangés. Si cela n’est pas fait, une éventuelle dilatation thermique du fluide peut casser l’appareil et provoquer des blessures.

Directive européenne « équipements sous pression » (PED)

Tous les équipements sous pression dont la pression interne est supérieure à 0,5 bar (pression relative) et dont la taille dépasse 25 mm ou un pouce entrent dans le cadre de la directive PED.

• La section « Spécifications » de ce manuel contient les instructions relatives à la directive PED.

• Les appareils de mesure de ce manuel sont conformes à la directive EN 97/23/EC.

• Tous les débitmètres Brooks Instrument fonctionnent avec des fluides de groupe 1.

• Les appareils de mesure d’une taille supérieure à 25 mm ou un pouce entrent dans la catégorie PED I, II ou III.

• Les appareils de mesure d’une taille inférieure ou égale à 25 mm ou un pouce relèvent des « bonnes pratiques d’ingénierie » (SEP).

Compatibilité électromagnétique européenne (CEM)

L’équipement Brooks Instrument (électrique / électronique) portant le marquage CE répond à la réglementation en matière de compatibilité électromagnétique

(directive CEM 2004/108/EC (89/336/CEE)).

Il faut cependant prêter une grande attention au choix du câble d’interconnexion à utiliser avec l’équipement marqué CE.

Qualité du câble d’interconnexion, des presse-étoupes et connecteurs :

Brooks Instrument fournit un ou des câbles de qualité supérieure qui répondent aux spécifications exigées pour la certification CE.

Si vous utilisez votre propre câble d’interconnexion, ce câble doit être protégé par un blindage intégral.

Les connecteurs rectangulaires ou circulaires utilisés doivent avoir un blindage métallique. S’il y a lieu, des presse-étoupes métalliques doivent faire office de serre-écran de câble.

L’écran du câble doit être raccordé à l’enveloppe métallique ou au presse-étoupe et blindé aux deux extrémités sur 360 degrés.

Le blindage doit s’achever sur une prise de terre.

Les connecteurs de carte standards sont non métalliques. Les câbles utilisés doivent être protégés par un blindage intégral pour se conformer à la certification

CE.

Le blindage doit s’achever sur une prise de terre.

En ce qui concerne la configuration des broches, veuillez vous reporter au manuel d’utilisation joint.

ESD (décharge électrostatique)

ATTENTION : cet instrument contient des composants électroniques sensibles à l’électricité statique. Des procédures de manipulation adéquates doivent être respectées pendant le retrait, l’installation ou la manipulation des cartes de circuits imprimés ou des dispositifs internes.

Procédure de manipulation :

1. L’alimentation électrique de l’appareil doit être coupée.

2. Le personnel doit être mis à la terre, au moyen d’une bande de poignet ou d’un autre moyen sûr et adéquat, avant l’installation, le retrait ou le réglage de toutes les cartes de circuits imprimés ou autres dispositifs internes.

3. Les cartes de circuits imprimés doivent être transportées dans un récipient conducteur. Les cartes ne doivent enlevées de cette enveloppe protectrice qu’au dernier moment, juste avant l’installation. Les cartes retirées doivent être immédiatement placées dans un récipient de protection pour le transport, le stockage ou le retour à l’usine.

Observations

Brooks Instrument n’est pas le seul à proposer des produits comportant des composants sensibles aux décharges électrostatiques. La plupart des produits

électroniques modernes contiennent des composants qui utilisent des technologies à oxydes métalliques (NMOS, SMOS, etc.). L’expérience démontre que d’infimes quantités d’électricité statique suffisent à endommager ou détruire ces appareils. Les composants endommagés, même s’ils semblent fonctionner correctement, tombent rapidement en panne.

9.0 - Essential Instructions

Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

German

Wichtige Anweisungen

Bitte zuerst lesen!

Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt. Die folgenden Anweisungen müssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden, wenn Sie Brooks Produkte installieren, bedienen und warten.

• Um die entsprechende Leistung zu gewährleisten, setzen Sie qualifiziertes Personal für die Installation, den Betrieb, die Aktualisierung, Programmierung und

Wartung des Produkts ein.

• Lesen Sie alle Anweisungen, bevor Sie das Produkt installieren, in Betrieb nehmen und warten. Falls es sich bei diesem Handbuch nicht um das richtige

Handbuch handelt, schauen Sie bitte auf der Rückseite nach den Kontaktdaten Ihres Vertriebsbüros vor Ort. Bewahren Sie dieses Handbuch auf, falls Sie später etwas nachschauen möchten.

WARNUNG: Dieses Gerät nicht außerhalb der in Bedienungsanleitung und Handbuch angegebenen Grenzen betreiben. Wird diese Warnung nicht beachtet, kann dies zu schweren Personenschäden bzw. Schäden des Gerätes führen.

• Falls Sie Anweisungen nicht verstehen, wenden Sie sich zur Klärung an Ihren Brooks Instrument Vertreter.

• Befolgen Sie alle Warnhinweise und Anweisungen, die auf dem Produkt markiert sind oder zusammen mit diesem geliefert werden.

• Installieren Sie Ihr Gerät, wie in den Installationsanweisungen des entsprechenden Handbuchs angegeben und gemäß der gültigen regionalen und nationalen

Gesetze. Schließen Sie alle Produkte an eine geeignete Strom- und Druckluftversorgung an.

• Bedienung: (1) Langsam den Zufluss zum System starten. Die Ventile langsam öffnen, um einen sprunghaften Anstieg der Durchflussmenge zu verhindern. (2)

Bereich der Anschlüsse (Zufluss und Ausfluss) des Durchflussmessers auf Undichtigkeiten überprüfen. Wenn das System dicht ist, auf Betriebsdruck hochfahren.

• Sicherstellen, dass der Leitungsdruck vor Wartungsarbeiten heruntergefahren wird. Wenn Ersatzteile benötigt werden, stellen Sie sicher, dass qualifizierte

Personen Ersatzteile verwenden, die von Brooks Instrument vorgegeben sind. Nicht genehmigte Teile und Verfahren können die Leistungsfähigkeit des

Produkts beeinträchtigen und den sicheren Betrieb Ihres Prozesses gefährden. Ähnlich aussehende Austauschteile können zu Bränden, elektrischen Gefahren oder nicht sachgerechtem Betrieb führen.

• Stellen Sie sicher, dass alle Türen der Anlage geschlossen sind und dass alle Schutzabdeckungen angebracht sind, um Stromschläge und Personenschäden zu vermeiden, es sei denn die Wartungsaufgaben werden von qualifizierten Personen durchgeführt.

WARNUNG: Werden die Ein- und Auslassventile neben Durchflussmessgeräten aus irgendwelchen Gründen geschlossen, so müssen die Geräte komplett entleert werden.

Durchflussmessgeraete muessen vor dem Schliessen von Ein- und Auslassventilen komplett entleert werden, anderenfalls kann es zu einer thermischen Ausdehnung der Flüssigkeit und damit zum Bruch des Gerätes kommen; Personenschäden können die

Folge sein.

Europäische Druckgeräterichtlinie (PED)

x x

Alle Druckgeräte mit einem internen Druck von mehr als 0,5 bar (g) und einer Größe von mehr als 1in ( 1 in = 25,4 mm) unterliegen der Druckgeräterichtlinie.

x

Das Kapitel zu den technischen Daten in dieser Anleitung enthält wichtige Sicherheits- und Betriebsanweisungen in Bezug auf die Druckgeräterichtlinie.

Messgeräte, die in diesem Handbuch beschrieben sind, erfüllen die europäische Richtlinie 97/23/EG.

Alle Durchflussmesser von Brooks Instrument fallen unter die Fluidgruppe 1. x

Messgeräte, die größer als 25 mm oder 1“ (inch) sind, erfüllen die Kategorien I, II oder III der Druckgeräterichtlinie (PED). x

Messgeräte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP).

Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV)

Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen

Verträglichkeit (EMV Richtlinie 2004/108/EC (89/336/EWG)) erfolgreich bestanden.

Dennoch muss bei der Wahl des Signalkabels für das Gerät mit CE-Zeichen auf folgende Dinge geachtet werden.

Qualität von Signalkabel, Kabeldurchführung und Anschlüsse:

Brooks Instrument liefert qualitativ hochwertige Kabel, die den Anforderungen für eine CE-Zertifizierung entsprechen.

Sollten Sie eigene Kabel einsetzen, so sollte das Kabel überall mit einer 100%-Abschirmung versehen sein.

D- oder Rundstecker sollten eine Metallabschirmung aufweisen. Wenn möglich, müssen Kabeldurchführungen aus Metall mit Kabelschirmgeflechts-Klemmen verwendet werden.

Der Kabelschirm sollte an die Metallhülle oder -durchführung angeschlossen werden und an beiden Enden rundherum (360 °) abgeschirmt werden.

Die Abschirmung sollte geerdet werden.

Randstecker auf Platinen sind standardmäßig nicht aus Metall. Die verwendeten Kabel müssen mit einer 100 % Abschirmung versehen werden, um die CE-

Vorgaben zu erfüllen.

Die Abschirmung sollte geerdet werden.

Klemmenbelegung: Siehe beigefügtes Handbuch.

ESD (Elektrostatische Entladung)

ACHTUNG: Dieses Gerät enthält elektronische Komponenten, die durch elektrostatische Entladungen beschädigt werden können. Ordnungsgemäße

Verfahrensanweisungen müssen während des Ausbaus, der Installation oder anderer Handhabung der eingebauten Platinen oder Geräte eingehalten werden.

Verfahrensanweisung:

1. Trennen Sie das Gerät von der Stromversorgung.

2. Das Personal ist vor dem Einbau, Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem

Erdpotential zu verbinden.

3. Platinen sind in speziellen Behältern mit Schutz gegen elektrostatische Spannungen zu transportieren oder zu lagern. Platinen dürfen erst kurz vor dem Einbau aus der Schutzhülle entfernt werden. Ausgebaute Platinen müssen umgehend in Schutzbehälter zum Transport, zur Lagerung oder Rücksendung an das Werk

Anmerkung

Dieses Gerät ist wie viele andere elektronische Geräte auch mit Komponenten bestückt, die anfällig für elektrostatische Entladung sind. Die meisten modernen, elektronischen Geräte enthalten Komponenten, die die Metalloxidtechnologie (NMOS, SMOS etc.) verwenden. Die Erfahrung hat gezeigt, dass schon geringe

Mengen elektrostatischer Energie ausreichen, um diese Geräte zu beschädigen oder zu zerstören. Beschädigte Teile fallen früh aus, obwohl sie funktionsfähig zu sein scheinen.

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

9.0 - Essential Instructions

Brooks

®

CMX Series

Greek

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ȆȇȅǼǿǻȅȆȅǿǾȈǾ

:

ȂȘ ȜİȚIJȠȣȡȖİȓIJİ IJȘ ıȣıțİȣȒ ĮȣIJȒ țĮș

’ ȣʌȑȡȕĮıȘ IJȦȞ ȠȡȓȦȞ ʌȠȣ ĮȞĮȖȡȐijȠȞIJĮȚ ıIJȠ ǼȖȤİȚȡȓįȚȠ ȅįȘȖȚȫȞ țĮȚ ȁİȚIJȠȣȡȖȓĮȢ

.

Ǿ ȝȘ ıȣȝȝȩȡijȦıȘ ȝİ IJȘȞ ʌȡȠİȚįȠʌȠȓȘıȘ ĮȣIJȒ ȝʌȠȡİȓ ȞĮ ȠįȘȖȒıİȚ ıİ ıȠȕĮȡȩ ʌȡȠıȦʌȚțȩ IJȡĮȣȝĮIJȚıȝȩ Ȓ

/ țĮȚ ȗȘȝȚȐ ıIJȠȞ İȟȠʌȜȚıȝȩ

.

x

Ȉİ ʌİȡȓʌIJȦıȘ ȝȘ țĮIJĮȞȩȘıȘȢ țȐʌȠȚĮȢ Įʌȩ IJȚȢ ȠįȘȖȓİȢ ȗȘIJȒıIJİ įȚİȣțȡȚȞȓıİȚȢ Įʌȩ IJȠȞ IJȠʌȚțȩ ĮȞIJȚʌȡȩıȦʌȠ IJȘȢ

Brooks Instrument. x ȉȘȡİȓIJİ ȩȜİȢ IJȚȢ ʌȡȠİȚįȠʌȠȚȒıİȚȢ

, ʌȡȠijȣȜȐȟİȚȢ țĮȚ ȠįȘȖȓİȢ ʌȠȣ ĮȞĮȖȡȐijȠȞIJĮȚ Ȓ ıȣȞȠįİȪȠȣȞ IJȠ ʌȡȠȧȩȞ

. x

ǼȖțĮIJĮıIJȒıIJİ IJȘ ıȣıțİȣȒ ȩʌȦȢ ʌȡȠȕȜȑʌİIJĮȚ ıIJȚȢ ȠįȘȖȓİȢ İȖțĮIJȐıIJĮıȘȢ IJȠȣ ıȦıIJȠȪ İȖȤİȚȡȚįȓȠȣ ȠįȘȖȚȫȞ țĮȚ ıIJȚȢ țİȓȝİȞİȢ IJȠʌȚțȑȢ țĮȚ İșȞȚțȑȢ įȚĮIJȐȟİȚȢ

.

ȈȣȞįȑıIJİ IJĮ ʌȡȠȧȩȞIJĮ ıIJȚȢ İțȐıIJȠIJİ ıȦıIJȑȢ ʌĮȡȠȤȑȢ ȡİȪȝĮIJȠȢ țĮȚ ʌȓİıȘȢ

. x ǻȚĮįȚțĮıȓĮ

: (1) ǹijȒıIJİ ȞĮ ȟİțȚȞȒıİȚ ĮȡȖȐ Ș ȡȠȒ ıIJȠ ıȪıIJȘȝĮ

. ǹȞȠȓȟIJİ ĮȡȖȐ IJȚȢ ȕĮȜȕȓįİȢ ȜİȚIJȠȣȡȖȓĮȢ ȖȚĮ ȞĮ ĮʌȠijȪȖİIJİ IJȚȢ ĮʌȩIJȠȝİȢ ĮȣȟȠȝİȚȫıİȚȢ ȡȠȒȢ

. (2)

ǼȜȑȖȟIJİ ȖȚĮ įȚĮȡȡȠȑȢ IJȚȢ ıȣȞįȑıİȚȢ İȚıȩįȠȣ țĮȚ İȟȩįȠȣ IJȠȣ ȡȠȩȝİIJȡȠȣ

. ǹȞ įİȞ ȣʌȐȡȤȠȣȞ įȚĮȡȡȠȑȢ

,

ȖİȝȓıIJİ IJȠ ıȪıIJȘȝĮ ȝȑȤȡȚ Ș ʌȓİıȘ ȞĮ ijIJȐıİȚ IJȘȞ țĮȞȠȞȚțȒ ʌȓİıȘ İȡȖĮıȓĮȢ

. x

ȆȡȚȞ Įʌȩ IJȘ ıȣȞIJȒȡȘıȘ ȕİȕĮȚȦșİȓIJİ ȩIJȚ ȖȡĮȝȝȒ İȡȖĮıȓĮȢ ȑȤİȚ IJİșİȓ İțIJȩȢ ʌȚȑıİȦȢ

.

Ȉİ ʌİȡȓʌIJȦıȘ ĮȞIJȚțĮIJȐıIJĮıȘȢ ĮȞIJĮȜȜĮțIJȚțȫȞ ȕİȕĮȚȦșİȓIJİ ȩIJȚ IJȠ ʌȡȠıȦʌȚțȩ İȓȞĮȚ İȚįȚțİȣȝȑȞȠ țĮȚ ȤȡȘıȚȝȠʌȠȚİȓ ĮȞIJĮȜȜĮțIJȚțȐ ʌȠȣ ʌȡȠȕȜȑʌİȚ Ș

Brooks Instrument.

ȂȘ İȖțİțȡȚȝȑȞĮ ĮȞIJĮȜȜĮțIJȚțȐ țĮȚ İʌİȝȕȐıİȚȢ İȞįȑȤİIJĮȚ ȞĮ

İʌȘȡİȐıȠȣȞ IJȚȢ İʌȚįȩıİȚȢ IJȠȣ ʌȡȠȧȩȞIJȠȢ țĮȚ ȞĮ ʌȡȠțĮȜȑıȠȣȞ țȓȞįȣȞȠ ȖȚĮ IJȘȞ ĮıijĮȜȒ ȜİȚIJȠȣȡȖȓĮ

. ǹȞIJȚțĮIJĮıIJȐıİȚȢ ȝİ ijĮȚȞȠȝİȞȚțȐ ȩȝȠȚĮ ĮȞIJĮȜȜĮțIJȚțȐ

İȞįȑȤİIJĮȚ ȞĮ ʌȡȠțĮȜȑıȠȣȞ ʌȣȡțĮȖȚȐ

, țȓȞįȣȞȠ ȘȜİțIJȡȠʌȜȘȟȓĮȢ Ȓ ĮȞİʌĮȡțȒ ȜİȚIJȠȣȡȖȓĮ

. x

ǺİȕĮȚȦșİȓIJİ ȩIJȚ ȩȜĮ IJĮ ĮȞȠȓȖȝĮIJĮ IJȠȣ İȟȠʌȜȚıȝȠȪ İȓȞĮȚ țȜİȚıIJȐ țĮȚ IJĮ ʌȡȠıIJĮIJİȣIJȚțȐ țĮȜȪȝȝĮIJĮ İȓȞĮȚ ıIJȘ șȑıȘ IJȠȣȢ ʌȡȠțİȚȝȑȞȠȣ ȞĮ ĮʌȠijİȣȤșİȓ Ƞ țȓȞįȣȞȠȢ

ȘȜİțIJȡȠʌȜȘȟȓĮȢ țĮȚ ʌȡȠıȦʌȚțȫȞ IJȡĮȣȝĮIJȚıȝȫȞ

,

İțIJȩȢ İȐȞ İțIJİȜȠȪȞIJĮȚ İȡȖĮıȓİȢ ıȣȞIJȒȡȘıȘȢ Įʌȩ İȚįȚțİȣȝȑȞȠ ʌȡȠıȦʌȚțȩ

.

ȆȇȅǼǿǻȅȆȅǿǾȈǾ

:

ȆȡȠțİȚȝȑȞȠȣ ȖȚĮ ıȣıțİȣȑȢ ȝİ ȡȠȒ ȡİȣıIJȠȪ

, ȩIJĮȞ ȖȚĮ ȠʌȠȚȠȞįȒʌȠIJİ ȜȩȖȠ ʌȡȩțİȚIJĮȚ ȞĮ țȜİȓıȠȣȞ ȠȚ ȕĮȜȕȓįİȢ İȚıĮȖȦȖȒȢ țĮȚ

İȟĮȖȦȖȒȢ țȠȞIJȐ ıIJȚȢ ıȣıțİȣȑȢ

,

ȠȚ ıȣıțİȣȑȢ ʌȡȑʌİȚ ȞĮ ĮʌȠıIJȡĮȖȖȚıIJȠȪȞ İȞIJİȜȫȢ

.

Ǿ ȝȘ ıȣȝȝȩȡijȦıȘ ȝʌȠȡİȓ ȞĮ ʌȡȠțĮȜȑıİȚ șİȡȝȚțȒ įȚĮıIJȠȜȒ IJȠȣ ȣȖȡȠȪ ʌȠȣ ʌİȡȚȑȤȠȣȞ

, ȝİ ĮʌȠIJȑȜİıȝĮ ȞĮ ȡĮȖȓıİȚ Ș ıȣıțİȣȒ țĮȚ ȞĮ ʌȡȠțȜȘșȠȪȞ ʌȡȠıȦʌȚțȠȓ IJȡĮȣȝĮIJȚıȝȠȓ

.

ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ IJȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ

(PED)

ȀȐșİ İȟȠʌȜȚıȝȩȢ ȣʌȩ ʌȓİıȘ ȝİ İıȦIJİȡȚțȒ ʌȓİıȘ ȐȞȦ IJȠȣ

0,5 bar (g) țĮȚ ȝİȖȑșȠȣȢ ȝİȖĮȜȪIJİȡȠȣ IJȦȞ

25 mm

Ȓ IJȘȢ

1 ȓȞIJıĮȢ İȝʌȓʌIJİȚ ıIJȚȢ įȚĮIJȐȟİȚȢ IJȘȢ

İȣȡȦʌĮȧțȒȢ ȅįȘȖȓĮȢ ȖȚĮ IJȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ

(PED). x ȉȠ țİijȐȜĮȚȠ ȆȡȠįȚĮȖȡĮijȑȢ IJȠȣ ʌĮȡȩȞIJȠȢ İȖȤİȚȡȚįȓȠȣ ʌİȡȚȜĮȝȕȐȞİȚ ȠįȘȖȓİȢ ıȤİIJȚțȐ ȝİ IJȘȞ ȅįȘȖȓĮ

PED. x ȅȚ ȝİIJȡȘIJȑȢ ʌȠȣ ʌİȡȚȖȡȐijȠȞIJĮȚ ıIJȠ ʌĮȡȩȞ İȖȤİȚȡȓįȚȠ ıȣȝȝȠȡijȫȞȠȞIJĮȚ ȝİ IJȘȞ İȣȡȦʌĮȧțȒ ȅįȘȖȓĮ

97/23/

ǼȀ

. x ǵȜĮ IJĮ ȡȠȩȝİIJȡĮ IJȘȢ

Brooks Instrument

ĮȞȒțȠȣȞ ıIJȘȞ ȠȝȐįĮ ȡİȣıIJȫȞ

1. x

ȂİIJȡȘIJȑȢ ȝİȖĮȜȪIJİȡȠȚ Įʌȩ

25 mm

Ȓ

1 ȓȞIJıĮ ıȣȝȝȠȡijȫȞȠȞIJĮȚ ȝİ IJȚȢ țĮIJȘȖȠȡȓİȢ ǿ

, ǿǿ țĮȚ ǿǿǿ IJȘȢ ȅįȘȖȓĮȢ

PED. x

ȂİIJȡȘIJȑȢ ȝİȖȑșȠȣȢ

25 mm

Ȓ

1 ȓȞIJıĮȢ Ȓ țĮȚ ȝȚțȡȩIJİȡȠȚ țĮIJĮıțİȣȐȗȠȞIJĮȚ ıȪȝijȦȞĮ ȝİ IJȠȣȢ țĮȞȩȞİȢ IJȘȢ IJȑȤȞȘȢ

(SEP).

ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ IJȘȞ ȘȜİțIJȡȠȝĮȖȞȘIJȚțȒ ıȣȝȕĮIJȩIJȘIJĮ

(EMC)

ȅ

(

ȘȜİțIJȡȚțȩȢ

/

ȘȜİțIJȡȠȞȚțȩȢ

)

İȟȠʌȜȚıȝȩȢ IJȘȢ

Brooks Instrument ʌȠȣ ijȑȡİȚ IJȠ ıȒȝĮ

CE ȑȤİȚ ȣʌȠıIJİȓ İʌȚIJȣȤȫȢ IJȚȢ įȠțȚȝȑȢ ʌȠȣ ʌȡȠȕȜȑʌȠȣȞ ȠȚ įȚĮIJȐȟİȚȢ IJȘȢ ȅįȘȖȓĮȢ ȖȚĮ IJȘȞ ȘȜİțIJȡȠȝĮȖȞȘIJȚțȒ ıȣȝȕĮIJȩIJȘIJĮ

( ȅįȘȖȓĮ

2004/108/EC (89/336/

ǼȅȀ ȖȚĮ IJȘȞ

EMC)).

ȆȐȞIJȦȢ ȤȡİȚȐȗİIJĮȚ ȚįȚĮȓIJİȡȘ ʌȡȠıȠȤȒ ıIJȘȞ İʌȚȜȠȖȒ IJȠȣ țĮȜȦįȓȠȣ ıȒȝĮIJȠȢ ȖȚĮ IJȠȞ İȟȠʌȜȚıȝȩ ʌȠȣ ijȑȡİȚ IJȠ ıȒȝĮ

CE.

ȆȠȚȩIJȘIJĮ IJȦȞ țĮȜȦįȓȦȞ ıȒȝĮIJȠȢ

, ıIJȣʌȚȠșȜȚʌIJȫȞ țĮȚ ȕȣıȝȐIJȦȞ țĮȜȦįȓȦȞ

:

Ǿ

Brooks Instrument ʌȡȠıijȑȡİȚ ȣȥȘȜȒȢ ʌȠȚȩIJȘIJĮȢ țĮȜȫįȚĮ IJĮ ȠʌȠȓĮ ʌȜȘȡȠȪȞ IJȚȢ ʌȡȠįȚĮȖȡĮijȑȢ

CE.

Ȉİ ʌİȡȓʌIJȦıȘ ʌĮȡȠȤȒȢ įȚțȠȪ ıĮȢ țĮȜȦįȓȠȣ ıȒȝĮIJȠȢ

,

ȤȡȘıȚȝȠʌȠȚİȓIJİ țĮȜȫįȚȠ ȝİ ʌȜȒȡȘ șȦȡȐțȚıȘ

100% ıİ ȩȜĮ IJĮ ıȘȝİȓĮ

.

ǺȪıȝĮIJĮ IJȪʌȠȣ

«D»

Ȓ țȣțȜȚțȐ ʌȡȑʌİȚ ȞĮ ȑȤȠȣȞ ȝİIJĮȜȜȚțȒ șȦȡȐțȚıȘ

. ȃĮ ȤȡȘıȚȝȠʌȠȚȘșȠȪȞ țĮIJȐ ʌȡȠIJȓȝȘıȘ ȝİIJĮȜȜȚțȠȓ ıIJȣʌȚȠșȜȓʌIJİȢ țĮȜȦįȓȦȞ ȖȚĮ IJȘ ıIJİȡȑȦıȘ IJȘȢ șȦȡȐțȚıȘȢ

. ȃĮ ıȣȞįİșİȓ Ș șȦȡȐțȚıȘ IJȠȣ țĮȜȦįȓȠȣ ıIJȠ ȝİIJĮȜȜȚțȩ țȑȜȣijȠȢ Ȓ ıIJȣʌȚȠșȜȓʌIJȘ țĮȚ ȞĮ șȦȡĮțȚıIJİȓ țĮȚ ıIJĮ įȪȠ ȐțȡĮ țĮIJȐ

360 ȝȠȓȡİȢ

.

Ǿ șȦȡȐțȚıȘ ʌȡȑʌİȚ ȞĮ

IJİȡȝĮIJȓȗİȚ ıİ ȖİȓȦıȘ İįȐijȠȣȢ

. ȉĮ ȕȪıȝĮIJĮ ȐțȡȠȣ IJȘȢ ʌȜĮțȑIJĮȢ İȓȞĮȚ İț țĮIJĮıțİȣȒȢ ȝȘ ȝİIJĮȜȜȚțȐ

. ȉĮ ȤȡȘıȚȝȠʌȠȚȠȪȝİȞĮ țĮȜȫįȚĮ ʌȡȑʌİȚ ȞĮ ȑȤȠȣȞ

100% șȦȡȐțȚıȘ ȖȚĮ ıȣȝȝȩȡijȦıȘ ȝİ IJȘȞ ʌȚıIJȠʌȠȓȘıȘ

CE.

Ǿ șȦȡȐțȚıȘ ʌȡȑʌİȚ ȞĮ IJİȡȝĮIJȓȗİȚ ıİ ȖİȓȦıȘ İįȐijȠȣȢ

. īȚĮ IJȘ įȚȐIJĮȟȘ IJȦȞ ĮțȓįȦȞ

:

ȈȣȝȕȠȣȜİȣșİȓIJİ IJȠ ıȣȞȘȝȝȑȞȠ İȖȤİȚȡȓįȚȠ ȠįȘȖȚȫȞ

.

ǾȜİțIJȡȠıIJĮIJȚțȒ İțțȑȞȦıȘ

(ESD)

ȆȇȅĭȊȁǹȄǾ

:

Ǿ ıȣıțİȣȒ ĮȣIJȒ ʌİȡȚȑȤİȚ ȘȜİțIJȡȠȞȚțȐ İȟĮȡIJȒȝĮIJĮ IJĮ ȠʌȠȓĮ ȝʌȠȡȠȪȞ ȞĮ ȣʌȠıIJȠȪȞ İȪțȠȜĮ ȕȜȐȕİȢ Įʌȩ IJȠȞ ıIJĮIJȚțȩ ȘȜİțIJȡȚıȝȩ

.

ȆȡȑʌİȚ ȞĮ ĮțȠȜȠȣșȠȪȞIJĮȚ ȠȚ ȠȡșȑȢ įȚĮįȚțĮıȓİȢ ȤİȚȡȚıȝȠȪ țĮIJȐ IJȘȞ ĮijĮȓȡİıȘ

,

IJȠʌȠșȑIJȘıȘ Ȓ ȐȜȜȠ ȤİȚȡȚıȝȩ IJȦȞ İıȦIJİȡȚțȫȞ ʌȜĮțİIJȫȞ țĮȚ įȚĮIJȐȟİȦȞ

. ǻȚĮįȚțĮıȓĮ ȤİȚȡȚıȝȠȪ

:

1.

ĬȑıIJİ IJȘ ıȣıțİȣȒ İțIJȩȢ IJȐıİȦȢ

.

2. ĭȡȠȞIJȓıIJİ ȖȚĮ IJȘ ȖİȓȦıȘ IJȠȣ ʌȡȠıȦʌȚțȠȪ ȝİ ʌİȡȚțȐȡʌȚȠ Ȓ ȐȜȜȠ ĮıijĮȜȑȢ țĮȚ țĮIJȐȜȜȘȜȠ ȝȑıȠ ʌȡȚȞ IJȠʌȠșİIJȒıİIJİ

,

ĮijĮȚȡȑıİIJİ Ȓ ȡȣșȝȓıİIJİ țȐȡIJİȢ

IJȣʌȦȝȑȞȦȞ țȣțȜȦȝȐIJȦȞ Ȓ ȐȜȜȘ İıȦIJİȡȚțȒ įȚȐIJĮȟȘ

.

3. ȅȚ țȐȡIJİȢ IJȣʌȦȝȑȞȦȞ țȣțȜȦȝȐIJȦȞ ʌȡȑʌİȚ ȞĮ ȝİIJĮijȑȡȠȞIJĮȚ ıİ ıȣıțİȣĮıȓĮ Įʌȩ ĮȖȫȖȚȝȠ ȣȜȚțȩ

. ȅȚ țȐȡIJİȢ įİȞ ʌȡȑʌİȚ ȞĮ ĮijĮȚȡİșȠȪȞ Įʌȩ IJȠ ʌȡȠıIJĮIJİȣIJȚțȩ ʌİȡȓȕȜȘȝĮ ʌĮȡȐ ȝȩȞȠ ĮȝȑıȦȢ ʌȡȚȞ Įʌȩ IJȘȞ IJȠʌȠșȑIJȘıȘ

. ȅȚ țȐȡIJİȢ ʌȠȣ ĮijĮȚȡȑșȘțĮȞ ʌȡȑʌİȚ ȞĮ IJȠʌȠșİIJȘșȠȪȞ ĮȝȑıȦȢ ıİ ʌȡȠıIJĮIJİȣIJȚțȒ ıȣıțİȣĮıȓĮ ȖȚĮ ȝİIJĮijȠȡȐ

,

ĮʌȠșȒțİȣıȘ Ȓ İʌȚıIJȡȠijȒ ıIJȠ İȡȖȠıIJȐıȚȠ

.

ȆĮȡĮIJȘȡȒıİȚȢ

:

Ǿ ȪʌĮȡȟȘ İȟĮȡIJȘȝȐIJȦȞ İȣĮȓıșȘIJȦȞ ıIJĮ ijĮȚȞȩȝİȞĮ

ESD (

ȘȜİțIJȡȠıIJĮIJȚțȒȢ İțțȑȞȦıȘȢ

) įİȞ İȓȞĮȚ ȝȠȞĮįȚțȩ ȤĮȡĮțIJȘȡȚıIJȚțȩ IJȘȢ ıȣıțİȣȒȢ ĮȣIJȒȢ

. ȅȚ ʌİȡȚııȩIJİȡİȢ ıȪȖȤȡȠȞİȢ ȘȜİțIJȡȠȞȚțȑȢ ıȣıțİȣȑȢ ʌİȡȚȑȤȠȣȞ İȟĮȡIJȒȝĮIJĮ IJİȤȞȠȜȠȖȓĮȢ ȝİIJĮȜȜȚțȫȞ ȠȟİȚįȓȦȞ

(NMOS, SMOS țȐ

.).

Ǿ ʌİȓȡĮ ȑȤİȚ ĮʌȠįİȓȟİȚ ȩIJȚ ȝȚĮ ȝȚțȡȒ ʌȠıȩIJȘIJĮ ıIJĮIJȚțȠȪ ȘȜİțIJȡȚıȝȠȪ Įȡțİȓ ȖȚĮ ȞĮ ʌȡȠțĮȜȑıİȚ ȕȜȐȕİȢ Ȓ ȞĮ țĮIJĮıIJȡȑȥİȚ IJȚȢ ıȣıțİȣȑȢ ĮȣIJȑȢ

.

ǼȟĮȡIJȒȝĮIJĮ ʌȠȣ ȣʌȑıIJȘıĮȞ ȕȜȐȕȘ

,

ĮțȩȝȘ țĮȚ ĮȞ ȝȠȚȐȗȠȣȞ ȞĮ

ȜİȚIJȠȣȡȖȠȪȞ ıȦıIJȐ

, țȚȞįȣȞİȪȠȣȞ Įʌȩ ʌȡȫȚȝȘ ĮıIJȠȤȓĮ

.

9.0 - Essential Instructions

Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

Hungarian

Alapvet

Ę

utasítások

El

Ę

ször olvassa el ezeket!

A Brooks Instrument olyan módon tervezi, gyártja és teszteli termékeit, hogy azok megfeleljenek számos belföldi és nemzetközi szabványnak. Ezeket a berendezéseket megfelel

Ę en kell telepíteni, üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m

Ħ ködési tartományuknak megfelel

Ę en

üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése,

üzemeltetése és karbantartása során.

A megfelel

Ę

teljesítmény garantálása érdekében kizárólag szakképzett személyzet végezze a termék telepítését, üzemeltetését, frissítését, programozását és karbantartását.

Valamennyi utasítást el kell olvasni a termék telepítése, üzemeltetése és szervizelése el

Ę tt. Amennyiben ez a kézikönyv nem a megfelel

Ę

kiadvány, a hátsó borítón keresse meg a helyi forgalmazót, és további tájékoztatásért lépjen kapcsolatba vele. ė rizze meg ezt a kézikönyvet kés

Ę bbi tájékoztatásként.

FIGYELEM: Ne m

Ħ ködtesse a berendezést az üzemeltetési utasításban megadott üzemi tartományokon túl. Ennek megsértése súlyos személyi sérüléshez vagy a berendezés meghibásodásához vezethet.

x

Amennyiben a gépkönyv utasításai nem egyértelm

Ħ ek, lépjen kapcsolatba Brooks Instrument képvisel

Ę jével, hogy tisztázzák a problémát. x

Tartsa be a berendezésen feltüntetett vagy azzal együtt szállított összes figyelmeztetést, felhívást és utasítás. x

A

Ę

telepítési utasításban megadott utasítások valamint a hatályos helyi és nemzeti el

Ę

írások szerint telepítse a berendezést. A termékeket kizárólag a megfelel

Ę

elektromos és nyomásellátó forrásra kösse. x

Menete: (1) Lassan helyezze nyomás alá a rendszert. Lassanként nyissa ki az üzemi szelepeket az áramlásingadozás elkerülése érdekében. (2) x

Ellen

Ę rizze, nincs-e szivárgás az áramlásmér

Ę

be-, és kimeneti bekötéseinél. Ha nincs szivárgás, töltse fel a rendszert az üzemi nyomásra. el

Ę tt mindenképpen ellen

Ę rizze, hogy az üzemi vezeték nincs-e nyomás alatt. Amennyiben cserealkatrészekre van szükség, mindenképpen szakképzett személynek kell kezelnie a Brooks Instrument által meghatározott cserealkatrészeket. A nem engedélyezett alkatrészek és tevékenységek befolyásolhatják a termék teljesítményét, illetve veszélyeztethetik a biztonságos üzemeltetést. A pusztán hasonló alkatrészekkel történ

Ę

helyettesítés tüzet, áramütésveszélyt vagy elégtelen m

Ħ ködést eredményezhet. x

A berendezés összes ajtaja mindenképpen legyen zárva, a véd

Ę burkolatok pedig legyenek a helyükön az áramütés és a személyi sérülések elkerülése

érdekében, kivéve, ha szakképzett szakember végez rajta karbantartási munkákat.

FIGYELEM: Folyadékot áramoltató berendezések esetében, ha bármilyen okból el kell zárni a berendezés melletti ki-, és belép

Ę

szelepeket, a berendezést teljesen le kell üríteni. Ennek elmulasztása a folyadék h

Ę tágulását okozhatja, ami károsíthatja a berendezést, és személyi sérüléshez vezethet.

Nyomástartó berendezésekre vonatkozó európai irányelv (PED)

Minden 0,5 bar-nál (g) magasabb bels

Ę

nyomású és 25 mm-nél vagy 1 hüvelyknél nagyobb nyomástartó berendezés a nyomástartó berendezésekre vonatkozó európai irányelv (PED) hatálya alá tartozik. x

A gépkönyv „M

Ħ szaki adatok” fejezete tartalmaz a PED irányelvre vonatkozó utasításokat. x

A gépkönyvben megadott mér

Ę eszközök megfelelnek a 97/23/EK EU irányelvnek. x

Minden Brooks átfolyásmér

Ę

az 1-es folyadékcsoportba tartozik. x

A 25 mm-nél vagy 1 hüvelyknél nagyobb mér

Ę eszközök megfelelnek a PED I, II, vagy III kategóriának. x

A 25 mm-es illetve 1 hüvelykes vagy kisebb mér

Ę eszközök az elfogadott mérnöki gyakorlatot (SEP) követik.

Elektromágneses kompatibilitásra vonatkozó európai irányelv (EMC)

A Brooks Instrument CE jelölést kiérdemelt (elektromos/elektronikus) berendezései sikeresen teljesítették az elektromágneses kompatibilitási követelményeket (2004/108/EC (89/336/EGK sz. EMC irányelv)) vizsgáló teszteket.

Ugyanakkor különös figyelmet kell fordítani a CE jelölés

Ħ

berendezésekhez felhasznált jelkábelek kiválasztására.

A jelkábelek, kábelösszeköt

Ę k, csatlakozók min

Ę sége:

A Brooks Insturment magas min

Ę ség

Ħ

kábeleket kínál, melyek megfelelnek a CE min

Ę sítés követelményeinek.

Amennyiben saját jelkábelt alkalmaznak, olyat kell választani, amely 100%-os árnyékolással, teljes mértékben sz

Ħ rt.

A „D” vagy „kör alakú” csatlakozóknak fémárnyékolóval árnyékoltnak kell lennie. Szükség esetén fém kábelösszeköt

Ę ket kell alkalmazni a kábelsz

Ħ r

Ę rögzítésére.

A kábelsz

Ħ r

Ę t a fém házhoz vagy hüvelyhez kell csatlakoztatni és mindkét felén 360°-ban le kell árnyékolni. Az árnyékolásnak földelésben kell végz

Ę dnie.

A kártyákhoz tartozó csatlakozók szabványosan nem fémesek. Az alkalmazott kábeleknek 100%-és árnyékolással sz

Ħ rteknek kell lenniük, hogy megfeleljenek a CE min

Ę sítésnek.

Az árnyékolásnak földelésben kell végz

Ę dnie.

Érintkez

Ę

konfiguráció: Lásd a mellékelt kezelési utasítást.

Elektrosztatikus kisülés (ESD)

VIGYÁZAT: A készülék olyan alkatrészeket tartalmaz, melyek hajlamosak a sztatikus elektromosság okozta károsodásra. Be kell tartani a megfelel

Ę

eljárásokat a bels

Ę

áramköri kártyák és eszközök eltávolítása, behelyezése vagy egyéb kezelése során.

Kezelési eljárás:

1. A berendezést áramtalanítani kell.

2. A személyt földelni kell csuklópánttal vagy egyéb biztonságos és a célra alkalmas eszközzel, miel

Ę tt áramköri kártyát vagy egyéb bels

Ę

eszközt telepítene, venne ki, vagy állítana be.

3. A nyomtatott áramköri kártyákat vezet

Ę képes csomagolásban kell szállítani. A kártyák kizárólag közvetlenül a behelyezés el

Ę tt vehet

Ę k ki a véd

Ę burkolatból. A kiszerelt kártyát haladéktalanul el kell helyezni a mozgatásra, raktározásra vagy a gyári visszaszállításra szolgáló véd

Ę csomagolásba.

Megjegyzések:

Nem egyedi jelenség, hogy a készülékben elektrosztatikus kisülésre (ESD) érzékeny alkatrészek találhatók. A legtöbb korszer

Ħ

elektronikus eszközben fémoxid technológiás alkatrészek (NMOS, SMOS stb.) találhatók. A tapasztalatok azt igazolják, hogy még kis mérték

Ħ

sztatikus elektromosság is károsíthatja, vagy tönkreteheti ezeket az eszközöket. A károsodott alkatrészek, még ha látszólag megfelel

Ę en m

Ħ ködnek is, kezd

Ę d

Ę

hibára utalnak.

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

9.0 - Essential Instructions

Brooks

®

CMX Series

Italian

Istruzioni fondamentali

Leggerle subito!

La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali. Tali apparecchiature devono essere installate, messe in esercizio e tenute in manutenzione in maniera adeguata affinché operino in conformità alle loro normali specifiche di funzionamento. Le seguenti istruzioni devono essere rispettate ed inserite nel programma di tutela sul lavoro durante l’installazione, il funzionamento e la manutenzione dei prodotti Brooks Instrument. x

Per garantire un adeguato rendimento l'installazione, il funzionamento, l’aggiornamento, la programmazione e la manutenzione del prodotto devono essere eseguiti esclusivamente da personale specializzato. x

Leggere tutte le istruzioni prima dell’installazione, utilizzo e manutenzione del prodotto. Se questo manuale non è quello relativo al Vostro prodotto, cercare sul retro della copertina il distributore locale e contattarlo per ulteriori informazioni. Conservare il presente manuale per future consultazioni.

ATTENZIONE: Non utilizzare questo strumento in condizioni che eccedono le specifiche riportate nel Manuale d’Uso. L’inosservanza può causare gravi lesioni alle persone e/o danni all’apparecchiatura.

x

Qualora le istruzioni del manuale non siano chiare, contattare un rappresentante della Brooks Instrument per chiarire il problema.

x

Rispettare tutti gli avvisi, le istruzioni e gli avvertimenti riportati sull’apparecchiatura o forniti insieme ad essa. x

Installare l’apparecchiatura in base alle istruzioni riportate nel Manuale d’Uso e alle prescrizioni locali e nazionali in vigore. Collegare i prodotti esclusivamente ad un’adeguata sorgente di pressione ed alimentazione elettrica. x

Procedimento: (1) mettere lentamente sotto pressione il sistema. Aprire lentamente le valvole di servizio per evitare l’oscillazione del flusso. (2) Controllare che non ci siano perdite nei punti di connessione in entrata e in uscita del misuratore di flusso. Se non ci sono perdite, caricare il sistema alla pressione d’esercizio.

x

Prima di effettuare manutenzione controllare che la linea di processo non sia sotto pressione. Se avete bisogno di pezzi di ricambio, il personale specializzato deve usare i pezzi di ricambio definiti dalla Brooks Instrument. Attività e pezzi di ricambio non autorizzati possono influire sul rendimento del prodotto e comprometterne il funzionamento in sicurezza. La sostituzione con pezzi di ricambio non originali può causare incendi, pericolo di scosse elettriche o funzionamento improprio. x

Tutti gli sportelli dell’impianto devono essere chiusi, le cappe di protezione devono essere al loro posto per evitare scosse elettriche e lesioni personali, tranne quando il personale specializzato esegue lavori di manutenzione.

ATTENZIONE: In caso di apparecchiature in cui scorre un liquido, se per qualsiasi motivo bisogna chiudere le valvole d’entrata e d’uscita accanto all’apparecchiatura, allora si deve svuotare completamente l’apparecchiatura. L’inosservanza può causare la dilatazione termica del liquido che può danneggiare l’apparecchiatura e provocare lesioni alle persone.

Direttiva europea relativa alle apparecchiature a pressione (PED)

Ogni apparecchiatura a pressione con pressione interna maggiore di 0,5 bar (g) e più grande di 25 mm o di 1 pollice ricade nell’ambito della Direttiva Europea relativa alle apparecchiature a pressione (PED). x

Il capitolo „Dati tecnici” del manuale contiene le disposizioni relative alla direttiva PED. x

Gli strumenti di misura descritti nel presente manuale sono conformi alla Direttiva UE 97/23/CE. x

Ogni flussimetro Brooks appartiene al gruppo di fluidi 1. x

Gli strumenti di misura maggiori di 25 mm o di 1 pollice sono conformi alla categoria I, II o III della PED. x

Gli strumenti di misurazione minori di 25 mm o di 1 pollice rientrano nella categoria SEP (Sound Engineering Practice).

Direttiva europea relativa alla compatibilità elettromagnetica (EMC)

Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2004/108/EC (89/336/CEE)).

In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.

Qualità dei cavi di segnale, dei pressacavi e dei connettori:

La Brooks Instrument offre cavi d’alta qualità conformi ai requisiti della certificazione CE.

Qualora vengano utilizzati cavi di segnale propri, devono essere scelti con schermatura al 100% e interamente filtrati.

I connettori „D” o „rotondi” devono essere schermati con schermatura metallica. In caso di necessità bisogna utilizzare pressacavi metallici di collegamento per fissare la schermatura del cavo.

La schermatura del cavo deve far contatto col guscio metallico o col pressacavo; il cavo deve essere schermato su entrambi i lati a 360°. La schermatura deve essere effettuata con messa a terra.

I connettori Card Edge normalmente non sono di metallo. I cavi utilizzati devono essere filtrati con schermatura al 100% per essere conformi alla marcatura

CE.

La schermatura deve essere effettuata con messa a terra.

Configurazione pin: Vedi Manuale d’uso allegato.

Scarica elettrostatica (ESD)

ATTENZIONE: Il dispositivo contiene componenti elettronici che possono essere danneggiati da elettricità statica. Bisogna rispettare le adeguate procedure durante la rimozione, l’installazione o altra manovra delle schede del circuito elettrico interno.

Procedura di manovra:

1. Togliere alimentazione elettrica all’apparecchiatura.

2. La persona deve essere collegata a terra con una cerniera o con altri strumenti di sicurezza e adeguati allo scopo prima di installare, togliere o impostare la scheda del circuito elettrico o altri dispositivi interni.

3. Le schede del circuito stampato devono essere spedite in contenitori conduttivi. Le schede devono essere tolte dal rivestimento protettivo esclusivamente prima dell’installazione. Le schede confezionate devono essere collocate immediatamente nell’imballaggio protettivo per la movimentazione, l’immagazzinamento o resa alla fabbrica.

Note:

È un fenomeno comune che nei dispositivi di questo tipo si trovino componenti sensibili alla scarica elettrostatica (ESD). Nella maggior parte degli strumenti elettronici moderni si trovano componenti tecnologici metallo-ossido (NMOS, SMOS, ecc.). Le esperienze dimostrano che l’elettrostaticità anche in piccola misura può danneggiare o rovinare gli strumenti. I componenti danneggiati, anche se all’apparenza funzionano correttamente, potrebbero manifestare il difetto rapidamente.

9.0 - Essential Instructions

Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

Latvian

Svar

Ư

ga instrukcija

Pirms turpin

Ɨ

t izlasiet!

„Brooks Instrument” projekt

Ɲ

, ražo un p

Ɨ rbauda savus ražojumus atbilstoši daudziem nacion

Ɨ lajiem un starptautiskajiem standartiem. Lai nodrošin

Ɨ tu šo izstr

Ɨ d

Ɨ jumu turpm

Ɨ ku darb

Ư bu atbilstoši noteiktajiem parametriem, tie ir pareizi j

Ɨ uzst

Ɨ da, j

Ɨ lieto un j

Ɨ apkopj. Uzst

Ɨ dot, lietojot „Brooks Instrument” izstr

Ɨ d

Ɨ jumus un veicot to apkopi, ir j

Ɨ iev

Ɲ ro šie nor

Ɨ d

Ư jumi un j

Ɨ iek ƺ auj tie j nj su droš

Ư bas programm

Ɨ

. x

Lai

Ɨ tu pien

Ɨ c

Ư gu izstr kvalific

Ɲ tam person

Ɨ lam.

Ɨ d

Ɨ juma sniegumu, izstr

Ɨ d

Ɨ juma uzst

Ɨ d

Ư

šanu, lietošanu, atjaunin

Ɨ

šanu, programm

Ɲ

šanu un apkopi uzticiet veikt tikai x

Pirms

Ɨ d

Ɨ juma uzst

Ɨ d

Ư

šanas, lietošanas un apkalpošanas izlasiet visus nor

Ɨ d

Ư jumus. Ja š

Ư

instrukciju rokasgr

Ɨ mata nav pareiz

Ɨ

, izstr

Ɨ d

Ɨ jumam atbilstoš

Ɨ

rokasgr

Ɨ mata, l nj dzu skat. aizmugur

Ɲ jo v

Ɨ ku, kur ir sniegta viet

Ɲ j

Ɨ

tirdzniec

Ư bas biroja kontaktinform

Ɨ cija.

BR

Ʈ

DIN

Ɩ

JUMS! Nelietot instrumentu

Ɨ rpus Instrukciju un lietošanas rokasgr

Ɨ mat

Ɨ

nor

Ɨ d

Ư tajiem parametriem. Š

Ư

br

Ư din

Ɨ juma neiev

Ɲ rošanas rezult

Ɨ t

Ɨ

var rasties traumas un / vai apr

Ư kojuma boj

Ɨ jumi.

x

Ja j nj s nesaprotat k

Ɨ du no instrukcij

Ɨ m, sazinieties ar „Brooks Instrument” p

Ɨ rst

Ɨ vi un l nj dziet izskaidrot to. x

Iev

Ɲ rojiet visus br

Ư din

Ɨ jumus, piesardz

Ư bas m

Ɲ rus un instrukcijas, kas nor

Ɨ d

Ư ti uz izstr

Ɨ d

Ɨ juma vai pieg

Ɨ d

Ɨ ti kop

Ɨ

ar to. x

Uzst

Ɨ diet apr

Ư kojumu t

Ɨ

, k

Ɨ

tas nor

Ɨ d

Ư ts attiec

Ư gaj

Ɨ

instrukciju rokasgr

Ɨ mat

Ɨ

iek ƺ autaj

Ɨ

uzst

Ɨ d

Ư

šanas instrukcij

Ɨ

un atbilstoši piem

Ɲ rojamaj

Ɨ m viet

Ɲ j

Ɨ m un nacion

Ɨ laj

Ɨ m norm

Ɨ m. Pievienojiet visus izstr

Ɨ d

Ɨ jumus pareiziem elektriskajiem un spiediena avotiem. x

Lietošana: (1) L

Ɲ n

Ɨ m uzs

Ɨ ciet pl nj smu sist

Ɲ m

Ɨ

. Lai izvair

Ư tos no straujiem pl nj smas k

Ɨ pumiem, l

Ɲ n

Ɨ m atveriet procesa v

Ɨ nopl nj des ap pl nj smas m

Ɲ r

Ư t

Ɨ ja iepl nj des un izpl nj des savienojumiem. Ja nopl nj des nav, uzst

Ɨ diet sist

Ɲ m

Ɨ

darba spiedienu. rstus. (2) P

Ɨ rbaudiet, vai nav x

P

Ɨ rliecinieties par to, lai pirms instrumenta tehnisk

Ɨ s apkopes b nj tu likvid

Ɲ ts procesa l

Ư nijas spiediens. Ja ir nepieciešams veikt k

Ɨ du da ƺ u nomai nodrošiniet, lai tiktu izmantotas „Brooks Instrument” nor

Ɨ d

Ư t

Ɨ s da ƺ as un da ƺ u nomai

Ƽ u veiktu kvalific

Ɲ ts person

Ɨ ls. Neat ƺ autu da ƺ u un proced nj ru

Ƽ u, izmantošana var ietekm

Ɲ s ražojuma sniegumu un samazin

Ɨ t procesa droš

Ư bu. L

Ư dz

Ư gu, bet ne identisku da ƺ u nomai

Ƽ as lietošana var izrais

Ư t ugunsgr

Ɲ ka, elektrisko trauc

Ɲ jumu riskus un nepareizu izstr

Ɨ d

Ɨ juma darb

Ư bu. x

Nodrošiniet, lai b nj tu aizv

Ɲ rtas visas durvis un b nj tu pareizi uzst

Ɨ d

Ư ti visi aizsargp

Ɨ rsegumi, t

Ɨ d

Ɲ j

Ɨ di nov

Ɲ ršot elektrošoka un traumu risku. Iz

ƼƝ mums ir gad

Ư jumi, kad kvalific

Ɲ ts person

Ɨ ls veic ražojuma apkopi.

BR

Ʈ

DIN

Ɩ

JUMS! Ja š

Ʒ idr

Ɨ s pl nj smas ier

Ưþ u tuvum

Ɨ

esošos iepl nj des un izpl nj des v

Ɨ rstus k

Ɨ da iemesla d

Ɲƺ

ir j

Ɨ aizver, no ier

Ư c

Ɲ m ir j

Ɨ izlaiž viss š

Ʒ idrums. Pret

Ɲ j

Ɨ

gad

Ư jum

Ɨ

š

Ʒ idrums var termiski izplesties, p

Ɨ rraut ier

Ư ci un rad

Ư t traumas.

Eiropas spiedieniek

Ɨ rtu direkt

Ư va (PED)

Uz vis

Ɨ m spiedieniek

Ɨ rt

Ɨ m, kuru iekš

Ɲ jais spriegums p

Ɨ rsniedz 0,5 bar (g) un ir liel

Ɨ kas par 25 mm jeb 1” (collu), attiecas Eiropas spiedieniek

Ɨ rtu direkt

Ư va

(PED). x

Š

Ư s rokasgr

Ɨ matas tehnisko parametru noda ƺƗ

ir sniegtas a PED Direkt

Ư vu saist

Ư t

Ɨ s instrukcijas. x

Šaj

Ɨ

rokasgr

Ɨ mat

Ɨ

aprakst

Ư tie m

Ɲ r

Ư t

Ɨ ji atbilst EN Direkt

Ư vas 97/23/EK pras

Ư b

Ɨ m. x x

Visi „Brooks Instrument” pl nj smas m

Ɲ r

Ư t

Ɨ

Uz 25 mm jeb 1” (collu) maziem un maz ji ietilpst 1. š

Ɨ kiem m

Ɲ r

Ư t

Ɨ

Ʒ idrumu grup

Ɨ

. jiem attiecas labas inženierijas prakse (SEP). x

25 mm jeb 1” (collu) mazi vai maz

Ɨ ki m

Ɲ r

Ư t

Ɨ ji atbilst PED kategorijai I, II vai III.

Eiropas elektromagn

Ɲ tisk

Ɨ s savietojam

Ư bas direkt

Ư va (EMS)

„Brooks Instrument” (elektrisk

Ɨ s / elektronisk

Ɨ s) iek

Ɨ rtas ar CE z

Ư mi ir iztur

Ɲ jušas p

Ɨ rbaudi un atz

Ư tas par atbilstoš

Ɨ m Eiropas elektromagn

Ɲ tisk

Ɨ s savietojam

Ư bas direkt

Ư vas (EMS) pras

Ư b

Ɨ m.

Tom

Ɲ r, izv

Ɲ loties sign

Ɨ lkabeli, kas tiks lietots kop

Ɨ

ar CE mar

ƷƝ juma iek

Ɨ rtu, ir j

Ɨ iev

Ɲ ro

Ư paša uzman

Ư ba.

Sign

Ɨ lkabe ƺ a, kabe ƺ a bl

Ư vsl

Ɲ gu un savienot

Ɨ ju kvalit

Ɨ te:

„Brooks Instrument” pieg

Ɨ d

Ɨ

augstas kvalit

Ɨ tes kabe ƺ us, kas atbilst CE sertifik

Ɨ cijas tehniskajiem parametriem.

Ja j nj s lietojat pats savu sign

Ɨ lkabeli, tam ir j

Ɨ b nj t piln

Ư b

Ɨ

, 100% ekraniz

Ɲ tam.

„D” un „apa ƺƗ

” tipa savienot

Ɨ jiem ir j

Ɨ b nj t apr

Ư kotiem ar met

Ɨ la ekraniz

Ɲ jumu. Ja nepieciešams, ir j

Ɨ izmanto met

Ɨ la bl

Ư vsl

Ɲ gi ar kabe ƺ a ekraniz

Ɲ juma skavojumu.

Kabe ƺ a ekraniz

Ɲ jumam ir j

Ɨ b nj t savienotam ar met

Ɨ la apvalku un ab

Ɨ s pus

Ɲ s aizsarg

Ɨ tam 360 gr

Ɨ du diapazon

Ɨ

.

Ekraniz

Ɲ jumam ir j

Ɨ beidzas pie iezem

Ɲ juma.

„Card Edge” savienot

Ɨ ji standarta izpild

Ư jum

Ɨ

ir nemet

Ɨ la. Kabe ƺ iem ir j

Ɨ b nj t p

Ɨ rkl

Ɨ tiem ar 100% ekraniz

Ɲ jumu, lai tie atbilstu CE sertifik

Ɨ cijas pras

Ư b

Ɨ m.

Ekraniz

Ɲ jumam ir j

Ɨ beidzas pie iezem

Ɲ juma.

Attiec

Ư b

Ɨ

uz tapu konfigur

Ɨ ciju: skat. pievienoto instrukciju rokasgr

Ɨ matu.

ESD (elektrostatisk

Ɨ

izl

Ɨ de)

IEV

Ɯ

ROT PIESARDZ

Ʈ

BU! Šis instruments satur elektriskos komponentus, kas ir jut

Ư gi pret statisko elektr

Ư bu. Iz

Ƽ emot un uzst

Ɨ dot iekš

Ɲ j

Ɨ s

ƷƝ des plates un ier

Ư ces vai k

Ɨ

cit

Ɨ di darbojoties ar t

Ɨ m, ir j

Ɨ iev

Ɲ ro noteikta darba k

Ɨ rt

Ư ba.

Darba k

Ɨ rt

Ư ba:

1. Iek

Ɨ rta j

Ɨ atsl

Ɲ dz no barošanas.

2. Pirms

Ɨ das druk

Ɨ tas sh

Ɲ mas kartes vai citas iekš

Ɲ j

Ɨ s ier

Ư ces uzst

Ɨ d

Ư

šanas, iz

Ƽ emšanas vai regul

Ɲ

šanas person

Ɨ lam, kas veiks šos darbus, ir j

Ɨ b nj t iezem

Ɲ tam, piem., izmantojot aproces vai citus drošus, piem

Ɲ rotus l

Ư dzek ƺ us.

3. Druk

Ɨ t

Ɨ s sh

Ɲ mas kartes ir j

Ɨ transport

Ɲ

vadoš

Ɨ

iepakojum

Ɨ

. Pl

Ɨ ksnes no aizsargkorpusa dr

Ư kst iz

Ƽ emt tikai tieši pirms uzst

Ɨ d

Ư

šanas. Transport

Ɲ jot, uzglab

Ɨ jot vai atgriežot r nj pn

Ư c

Ɨ

no iz

Ƽ emt

Ɨ s pl

Ɨ ksnes ir nekav

Ɲ joties j

Ɨ ievieto aizsargiepakojum

Ɨ

.

Koment

Ɨ ri

Instruments nav unik

Ɨ ls taj

Ɨ

aspekt

Ɨ

, ka tas satur pret ESD (elektrostatisko izl

Ɨ di) jut

Ư gus komponentus. Vairums m nj sdienu elektroiek

Ɨ rtu satur komponentus, kuru ražošan

Ɨ

izmantota met

Ɨ la oks

Ư du tehnolo

Ƨ ijas (NMOS, SMOS u.c.). Pieredze r

Ɨ da, ka pat neliels daudzums statisk

Ɨ s elektr

Ư bas var nodar

Ư t boj

Ɨ jumus

š

Ɨ d

Ɨ m ier

Ư c

Ɲ m vai piln

Ư b

Ɨ

saboj

Ɨ t t

Ɨ s. Boj

Ɨ tie komponenti pat tad, ja tie š

Ʒ ietami darbojas pareizi, ir pak ƺ auti

Ɨ tr

Ɨ kai atteicei.

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

9.0 - Essential Instructions

Brooks

®

CMX Series

Lithuanian

Pagrindin

ơ

s instrukcijos

Perskaitykite prieš t

Ċ

sdami!

„Brooks Instrument“ projektuoja, gamina ir išbando savo gaminius, kad jie atitikt ǐ Ƴ vairius nacionalinius ir tarptautinius standartus. Šie gaminiai turi b nj ti tinkamai montuojami, eksploatuojami ir priži nj rimi, kad ir toliau veikt ǐ

pagal jiems b nj dingus techninius parametrus. Toliau pateikt ǐ

nurodym ǐ

reikia laikytis ir

Ƴ traukti juos

Ƴ saugos program ą

montuojant, eksploatuojant ir priži nj rint „Brooks Instrument“ produktus. x

Siekiant užtikrinti tinkam ą

veikim ą

, montuoti, eksploatuoti, naujinti, programuoti ir priži nj r ơ ti gamin

Ƴ

turi tik kvalifikuoti darbuotojai. x

Perskaitykite visus nurodymus prieš montuodami, eksploatuodami ir priži nj r ơ dami gamin

Ƴ

. Jei gavote netinkam ą

instrukcij ą

, galiniame jos viršelyje ži nj r ơ kite vietin ơ s prekybos atstovyb ơ s kontaktin

Ċ

informacij ą

. Išsaugokite ši ą

instrukcij ą

pasiži nj r ơ jimui ateityje. x

Ʋ

SP

Ơ

JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio

Ƴ sp ơ jimo galite sunkiai susižeisti ir (arba) sugadinti

Ƴ rang ą

.

Jei koki ǐ

nors nurodym ǐ

, kreipkit ơ s

Ƴ

„Brooks Instrument“ atstov ą

, kad paaiškint x

Paisykite ǐ Ƴ sp ơ jimo, persp ơ jim ǐ

ir nurodym ǐ

, pažym ơ t ǐ

ant gaminio arba pateikt ǐ

su juo. ǐ

. x

Ʋ rang ą

montuokite taip, kaip nurodyta atitinkamos instrukcijos montavimo nurodymuose arba taikomuose vietiniuose ar nacionaliniuose kodeksuose. Visus gaminius junkite prie tinkam ǐ

elektros ir sl ơ gio šaltini ǐ

. x

Eksploatacija: (1) l ơ tai

Ƴ junkite sraut ą Ƴ

sistem ą

. L ơ tai atidarykite proceso vožtuvus, kad išvengtum ơ te srauto antpl nj dži ǐ

. (2) Patikrinkite, ar n ơ ra nuot ơ ki ǐ aplink srauto matuoklio

Ƴ leidimo ir išleidimo jungtis. Jei nuot ơ ki ǐ

n ơ ra, sukurkite sistemoje darbin

Ƴ

sl ơ g

Ƴ

. x

Prieš atlikdami prieži nj ros darbus b nj tinai pašalinkite sl ơ g

Ƴ

proceso linijoje. Jei reikia pakeisti dalis, užtikrinkite, kad kvalifikuoti darbuotojai naudot ǐ

„Brooks

Instrument“ nurodytas pakaitines dalis. Netinkamos dalys ir proced nj ros gali pakenkti gaminio veikimui ir kelti pavoj ǐ

saugiai j nj s ǐ

proceso eksploatacijai. Tik panašiai atrodantys pakaitalai gali s ą lygoti gaisr ą

, elektros pavojus ar netinkam ą

veikim ą

. x

Užtikrinkite, visos ơ s b darbuotojai atlieka prieži nj ros darbus. nj t ǐ

uždarytos, o apsauginiai dang

þ iai užd ơ ti, kad išvengtum ơ te elektros sm nj gio ir sužeidim ǐ

, išskyrus kai kvalifikuoti

Ʋ

SP

Ơ

JIMAS: naudojant skysto srauto

Ƴ renginius, jei d ơ l kokios nors priežasties prireikia uždaryti šalia

Ƴ renginio esan

þ ius

Ƴ leidimo ir išleidimo vožtuvus, iš

Ƴ renginio reikia išleisti vis ą

skyst

Ƴ

. To nepadarius galimas šiluminis skys

þ io pl ơ timasis, galintis sugadinti

Ƴ rengin

Ƴ

ir sužeisti žmon ơ s.

Europos sl ơ gin ơ s

Ƴ rangos direktyva (PED)

Visa sl ơ gin ơ Ƴ ranga, kurios vidinis sl ơ gis didesnis nei 0,5 bar (g), o dydis didesnis nei 25 mm arba 1 colis, yra reglamentuojama sl ơ gin ơ s

Ƴ rangos direktyvos

(PED). x

Šios instrukcijos dalyje „Techniniai duomenys“ pateikiami nurodymai, susij

Ċ

su PED direktyva. x

Šioje instrukcijoje aprašyti matuokliai atitinka Europos S ą jungos direktyv ą

97/23/EB. x

Visi „Brooks Instrument“ srauto matuokliai priklauso 1 skys

þ i ǐ

grupei. x

Didesni nei 25 mm arba 1 colis matuokliai atitinka PED I, II arba III kategorij ą

. x

25 mm arba 1 colio ar mažesni matuokliai atitinka tinkam ą

inžinerijos praktik ą

(SEP).

Europoje taikomi elektromagnetinio suderinamumo (EMC) reikalavimai

CE ženklu pažym ơ ta „Brooks Instrument“ (elektrin ơ

/ elektronin ơ

)

Ƴ ranga buvo s ơ kmingai išbandyta pagal elektromagnetinio suderinamumo reikalavimus (EMC direktyv ą

2004/108/EC (89/336/EEB)).

Bet reikia ypatingo d ơ mesio renkantis signalizavimo kabel

Ƴ

, kuris bus naudojamas su CE ženklu pažym ơ ta

Ƴ ranga.

Signalizavimo kabelio, kabeli ǐ

riebokšli ǐ

ir jung

þ i ǐ

kokyb ơ

:

„Brooks Instrument“ tiekia kokybiškus kabelius, kurie atitinka CE sertifikavimo specifikacijas.

Jei naudojate savo signalizavimo kabel

Ƴ

, jis turi b nj ti visiškai ir visas ekranuotas 100 % ekranu.

Naudojamos „D“ arba „apskrito“ tipo jungtys turi b nj ti ekranuotos metaliniu ekranu. Jei taikoma, reikia naudoti metalinius kabeli ǐ

riebokšlius, užtikrinan

þ ius kabelio ekrano suspaudim ą

.

Kabelio ekran ą

reikia jungti prie metalinio apvalkalo ar riebokšlio ir ekranuoti abiejuose galuose 360 laipsni ǐ

.

Ekranas turi baigtis

Ƴ žeminimu.

Standartin ơ s kraštin ơ s jungtys yra ne metalin ơ s. Naudojami kabeliai turi b nj ti ekranuoti 100 % ekranu, kad atitikt ǐ

CE sertifikavim ą

. Ekranas turi baigtis

Ƴ žeminimu.

Keturi ǐ

kontakt ǐ

konfig nj racija: žr. prid ơ t ą

instrukcij ą

.

ESD (elektrostatinis išlydis)

PERSP

Ơ

JIMAS: šiame prietaise yra elektronini ǐ

komponent ǐ

, kuriuos gali sugadinti statin ơ

elektra. Išimant ar

Ƴ dedant vidines spausdintines plokštes ar

Ƴ renginius, arba atliekant su jomis kitus darbus, reikia laikytis tinkam ǐ

darbo proced nj r ǐ

.

Darbo proced nj ra:

1. Atjunkite ą

. turi nj pinti

Ƴ žeminimu naudodami riešo juostel

Ċ

ar kitas saugias tinkamas priemones prieš

Ƴ d ơ dami, išimdami ar reguliuodami bet koki ą spausdintin ơ s plokšt ơ s kortel

Ċ

ar kit ą

vidin

Ƴ

komponent ą

.

3. Spausdintin ơ s plokšt ơ s korteles reikia transportuoti laidžiame konteineryje. Neleidžiama išimti plokšt ơ s iš apsauginio d ơ klo, nebent prieš pat

Ƴ d ơ jim ą

. Išimtas plokštes reikia nedelsiant

Ƴ d ơ ti

Ƴ

apsaugin

Ƴ

konteiner

Ƴ

transportavimui ar saugojimui arba gr ą žinti

Ƴ

gamykl ą

.

Pastabos

Šis instrumentas n ơ ra unikalus d ơ l jame esan

þ i ǐ

ESD (elektrostatiniam išlydžiui) jautri ǐ

komponent ǐ

. Daugelyje šiuolaikini ǐ

elektronini ǐ

gamini ǐ

yra komponent ǐ

, kuriuose naudojama metalo oksid ǐ

technologija (NMOS, SMOS ir pan.). Patirtis rodo, kad net ir mažas statin ơ s elektros kiekis gali pakenkti tokiems gaminiams ar juos sugadinti. Sugadinti komponentai, net jei atrodo, kad jie veikia tinkamai, anksti nustoja veikti.

9.0 - Essential Instructions

Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

Polish

Zalecenia wst

Ċ

pne

Prosimy przeczyta

ü

przed rozpocz

Ċ

ciem u

Ī

ytkowania!

Brooks Instrument projektuje, wytwarza i testuje swoje produkty tak, aby spe

á nia

á y wymagania licznych norm krajowych i mi

Ċ dzynarodowych. Te produkty musz ą

by

ü

poprawnie instalowane, obs

á ugiwane oraz konserwowane, aby zapewni

ü

ich prawid

á owe dzia

á anie zgodnie ze specyfikacj ą

techniczn ą

. Podczas instalowania, obs

á ugiwania i konserwowania produktów firmy Brooks Instrument nale

Ī y przestrzega

ü

nast

Ċ puj ą cych zalece

Ĕ

: x zapewni

ü

w

á a

Ğ ciwe dzia

á anie sprz

Ċ tu, instalacja, obs

á uga, aktualizacje, programowanie i konserwacja powinny by

ü

wykonywane przez przeszkolony x personel.

Przed ą

, obs odpowiedni ą

dla danego sprz

Ċ tu nale

Ī y skontaktowa

ü

si

Ċ

z lokalnym przedstawicielem handlowym producenta. Instrukcj

Ċ

obs

á ugi nale

Ī y zachowa

ü

do pó

Ĩ niejszego u

Ī ycia.

á ug ą

i czynno

Ğ ciami serwisowymi nale

Ī y zapozna

ü

si

Ċ

ze wszystkimi zaleceniami producenta. Aby uzyska

ü

instrukcj

Ċ

obs

á ugi

OSTRZE ĩ

ENIE: Nie wolno przekracza

ü

podanych w instrukcji zakresów dzia

á ania urz ą dzenia. Nieprzestrzeganie tego zalecenia mo

Ī e doprowadzi

ü

do powa

Ī nego zagro

Ī enia

Ī ycia lub zdrowia personelu i / lub uszkodzenia sprz

Ċ tu.

x

Je

Ī eli jakie

Ğ

zalecenia w instrukcji obs

á ugi urz ą dzenia s ą

niezrozumia

á e, prosimy o skontaktowanie si

Ċ

z przedstawicielem firmy Brooks Instrument, aby wyja

Ğ ni

ü

problem. x

Nale

Ī y post

Ċ powa

ü

bior ą c pod uwag

Ċ

wszystkie ostrze

Ī enia, uwagi i zalecenia umieszczone na produkcie lub do

áą czone do niego. x

Instalacj

Ċ

urz ą dzenia nale

Ī y przeprowadzi

ü

zgodnie z zaleceniami zawartymi w instrukcji instalacji oraz z obowi ą zuj ą cymi lokalnymi i narodowymi x oznaczeniami. Wszystkie urz ą dzenia mo

Ī na pod

áą cza

ü

wy

áą cznie do odpowiednich

Ĩ róde

á

energii elektrycznej oraz ci

Ğ nienia.

Pierwsze

Ğ ci obs

á ugowe: (1) Nale

Ī y powoli w

áą czy

ü

przep

á yw w instalacji. Nast

Ċ pnie powoli otworzy

ü

zawory robocze tak, aby unikn ąü

waha

Ĕ przep

á ywu. (2) Nale

Ī y teraz sprawdzi

ü

, czy nie wyst

Ċ puj ą

nieszczelno

Ğ ci przy pod

áą czeniach wej

Ğ ciowym i wyj

Ğ ciowym miernika przep

á ywu. Je

Ī eli nie ma x

Ī adnych nieszczelno

Ğ ci, mo

Ī na zwi

Ċ kszy

ü

ci

Ğ nienie w instalacji do warto

Ğ ci ci

Ğ nienia roboczego.

Przed ą pieniem do czynno

Ğ ci serwisowych nale

Ī y upewni

ü

si

Ċ

,

Ī e ci

Ğ nienie robocze jest od

áą czone. Je

Ī eli konieczna jest wymiana cz

ĊĞ ci zamiennych, nale

Ī y zawsze stosowa

ü

cz

ĊĞ ci zamienne specyfikowane przez firm

Ċ

Brooks Instrument a czynno

Ğ ci ich wymiany powinien w ka

Ī dym przypadku dokonywa

ü

przeszkolony personel. Stosowanie nieautoryzowanych cz

ĊĞ ci i procedur serwisowych mo

Ī e niekorzystnie wp

á yn ąü

na dzia

á anie produktu oraz zagrozi

ü

bezpiecze

Ĕ stwu instalacji. Korzystanie z podobnie wygl ą daj ą cych zamienników mo

Ī e doprowadzi

ü

do po

Ī aru, pora

Ī enia pr ą dem lub nieprawid

á owego dzia

á ania urz ą dzenia. x

Nale

Ī y upewni

ü

si

Ċ

,

Ī e wszystkie otwory urz ą dzenia s ą

zamkni

Ċ te a os

á ony umocowane na swoich miejscach, aby zapobiec obra

Ī eniom cia

á a lub pora

Ī eniu pr ą dem personelu. Zalecenie to nie dotyczy przeszkolonego pracownika wykonuj ą cego prace serwisowe lub konserwacyjne.

OSTRZE ĩ

ENIE: W przypadku mierników przep

á ywu cieczy, je

Ī eli znajduj ą ce si

Ċ

na nich zawory wej

Ğ ciowe i wyj

Ğ ciowe maj ą

by

ü

z jakiego

Ğ powodu zamkni

Ċ te, to urz ą dzenie musi zosta

ü

ca

á kowicie opró

Ī nione z ciek

á ego medium. Niedope

á nienie tego zalecenia mo

Ī e doprowadzi

ü do termicznego zwi

Ċ kszenia obj

Ċ to

Ğ ci cieczy, co z kolei mo

Ī e spowodowa

ü

uszkodzenie urz ą dzenia i obra

Ī enia personelu.

Europejska dyrektywa dotycz ą ca urz ą dze

Ĕ

ci

Ğ nieniowych (PED)

Wszystkie urz ą dzenia ci

Ğ nieniowe pracuj ą ce przy ci

Ğ nieniu wewn

Ċ trznym wzgl

Ċ dnym wi

Ċ kszym ni

Ī

0.5 bara i wielko

Ğ ci powy

Ī ej 25 mm lub 1 cala podlegaj ą dyrektywie europejskiej dotycz ą cej urz ą dze

Ĕ

ci

Ğ nieniowych (PED). x

Rozdzia

á

„Specyfikacja techniczna” niniejszej instrukcji zawiera zalecenia dotycz ą ce dyrektywy PED. x

Mierniki opisane w tej instrukcji s ą

zgodne z dyrektyw ą

EN 97/23/EC. x

Wszystkie mierniki przep

á ywu firmy Brooks Instrument nale

Īą

do 1-szej grupy cieczy. x

Urz ą dzenia pomiarowe o wielko

Ğ ci powy

Ī ej 25 mm lub 1 cala nale

Īą

do kategorii I, II lub III dyrektywy PED. x

Urz ą dzenia pomiarowe o wielko

Ğ ci 25 mm lub 1 cala lub mniejsze podlegaj ą

zaleceniom „Uznanej Praktyki In

Ī ynierskiej” (SEP).

Europejska dyrektywa dotycz ą ca kompatybilno

Ğ ci elektromagnetycznej (EMC)

Urz ą dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ą ce oznaczenie CE, przesz

á y pozytywnie testy pod k ą tem spe

á niania przez nich wymogów kompatybilno

Ğ ci elektromagnetycznej (Dyrektywa EMC 2004/108/EC (89/336/EEC)).

Jednak

Ī e szczególn ą

uwag

Ċ

nale

Ī y po

Ğ wi

Ċ ci

ü

przy doborze przewodów sygna

á owych, które maj ą

by

ü

stosowane z urz ą dzeniami ze znakiem CE.

Jako

Ğü

przewodu sygna

á owego, d

á awic oraz z

áą czy przewodu:

Firma Brooks Instrument dostarcza wysokiej jako

Ğ ci przewody, które spe

á niaj ą

wymagania zawarte w specyfikacji dla certyfikatu CE.

Je

Ī eli stosuje si

Ċ

w

á asne przewody sygna

á owe, to powinny one by

ü

w ca

á o

Ğ ci w pe

á ni ekranowane.

Z

áą cza typu „D” lub okr ą g

á e powinny zawiera

ü

metalowy ekran. Je

Ğ li to mo

Ī liwe, nale

Ī y stosowa

ü

metalowe d

á awice przewodu zapewniaj ą ce mocowanie jego ekranu.

Ekran przewodu powinien by

ü

po

áą czony z metalow ą

os

á on ą

lub d

á awic ą

zapewniaj ą c ca

á kowite, dookólne ekranowanie na obu ko

Ĕ cach przewodu. Ekran przewodu powinien by

ü

uziemiony.

Z

áą cza kraw

Ċ dziowe s ą

standardowo niemetaliczne. Stosowane przewody musz ą

by

ü

w pe

á ni ekranowane zgodnie z certyfikatem CE.

Ekran przewodu powinien by

ü

uziemiony.

Konfiguracja styków jest podana w niniejszej instrukcji obs

á ugi.

Wy

á adowania elektrostatyczne (ESD)

UWAGA: Urz ą dzenie zawiera cz

ĊĞ ci elektroniczne podatne na uszkodzenia spowodowane

á adunkami elektrostatycznymi. Przy obchodzeniu si

Ċ

z wewn

Ċ trznymi podzespo

á ami i cz

ĊĞ ciami elektronicznymi nale

Ī y przestrzega

ü

nast

Ċ puj ą cych zasad post

Ċ powania:

1. Nale

Ī y od

áą czy

ü

zasilanie od urz ą dzenia.

2. Osoba ą ca czynno

Ğ ci musi zosta

ü

uziemiona za pomoc ą

opaski na przegubie d

á oni lub w inny, bezpieczny sposób, zanim przyst ą pi do instalacji, wyj

Ċ cia lub regulacji obwodów drukowanych lub innych wewn

Ċ trznych podzespo

á

ów elektronicznych urz ą dzenia. drukowane

Ī y transportowa

ü

w przewodz ą cym pojemniku. P

á ytki drukowane nale

Ī y wyjmowa

ü

z opakowania ochronnego bezpo

Ğ rednio przed ich monta

Ī em. Wymontowane p

á ytki nale

Ī y niezw

á ocznie umie

Ğ ci

ü

w opakowaniu ochronnym s

á u

Īą cym do transportowania, sk

á adowania lub odsy

á ania do producenta.

Uwagi:

Fakt, Ī e urz ą dzenie zawiera cz ĊĞ ci nieodporne na wy á adowania elektrostatyczne (ESD) jest rzecz ą normaln ą . Wi Ċ kszo Ğü nowoczesnych urz ą dze Ĕ elektronicznych zawiera komponenty wykonane w technologii tlenków metali (NMOS, SMOS itp.). Jak pokazuje praktyka, nawet niewielkie wy á adowanie elektrostatyczne mo Ī e uszkodzi ü lub zniszczy ü takie urz ą dzenie. Uszkodzone cz ĊĞ ci, nawet je Ī eli na pozór dzia á aj ą poprawnie, szybko doprowadzaj ą do nieprawid á owej pracy urz ą dzenia.

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

9.0 - Essential Instructions

Brooks

®

CMX Series

Portuguese

Instruções Básicas

Antes de proceder, leia-as!

A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a que os mesmos satisfaçam numerosas normas nacionais e internacionais. Os equipamentos devem ser instalados, explorados e mantidos de maneira adequada, e devem funcionar de acordo com a sua gama de utilização. Durante a instalação, exploração e manutenção dos equipamentos da Brooks Instrument, as instruções seguintes devem ser observadas e integradas no programa de protecção e segurança no trabalho. x

Para assegurar o desempenho adequado a instalação, exploração, actualização, e manutenção do equipamento deve ser realizada, exclusivamente, por pessoal qualificado. x

Antes de instalar, explorar e executar operações de manutenção do equipamento devem ser lidas todas as instruções. No caso do presente manual não ser apropriado procure na capa traseira o distribuidor mais próximo e contacte-o para obter informações adicionais. Guarde este manual para referência futura.

ATENÇÃO: não faça funcionar o equipamento fora da gama de trabalho indicada nas instruções de exploração. Da violação desta advertência podem resultar graves lesões pessoais ou avarias no equipamento.

x

Se as instruções deste manual não forem claras, contacte o representante Brooks Instrument para esclarecer as suas dúvidas. x

Observe todas as advertências, apelos e instruções indicadas no equipamento e/ou fornecidas junto com o mesmo. x

Instale o equipamento observando todas as instruções indicadas no manual e as prescrições vigentes nos regulamentos locais e nacionais. Ligue o equipamento exclusivamente às fontes de energia eléctrica e pneumática adequadas. x

Procedimento: (1) Pressurize lentamente o sistema. Abra lentamente as válvulas para evitar variações bruscas de caudal. (2) Verifique se há fugas nas ligações de entrada e saída do medidor de caudal. Se não houver fugas, carregue o sistema à pressão de trabalho. x

Antes de efectuar qualquer operação de manutenção verifique sempre que o equipamentos não está sob pressão. Em caso de ser preciso substituir peças estas devem ser as recomendadas pela Brooks Instrument e o trabalho feito por técnicos qualificados. Peças e actuações não conformes poderão influenciar o desempenho do equipamento, ou pôr em risco a sua segurança. A substituição de peças por outras não originais, meramente semelhantes poderá resultar em fogo, choques eléctricos ou funcionamento inadequado. x

Mantenha fechadas todas as portas do equipamento, e verifique que as coberturas de protecção estão nos seus lugares para evitar choques eléctricos e danos pessoais, salvo se for um técnico qualificado e estiver a executar trabalhos de manutenção.

ATENÇÃO: Tratando-se de equipamentos em que podem fluir líquidos, se por qualquer razão tiver que fechar as válvulas de entrada e saída contíguas ao equipamento, o mesmo deverá ser prévio, e completamente esvaziado. Da omissão deste procedimento poderão resultar, devido à dilatação térmica do líquido, a destruição do equipamento e eventuais danos pessoais.

Directiva Europeia para equipamentos sob pressão (PED)

Os equipamentos sob pressão interior superior a 0,5 bar (g) e com calibre superior e 25 mm (1 polegada) caem sob a vigência da directiva europeia de equipamentos sob pressão (PED). x

O capítulo "Dados técnicos" do manual contem instruções relativas à Directiva PED. x

Os caudalímetros objecto deste manual satisfazem a directiva 97/23/CE da UE. x

Os caudalímetros Brooks pertencem ao grupo de fluidos 1. x

Os caudalímetros com calibre superior a 25 mm (1 polegada) pertencem às categorias PED I, II, ou III. x

Os caudalímetros de 25 mm (1 polegada) ou menores observam as “Boas regras de engenharia” (SEP).

Directiva Europeia referente á Compatibilidade electromagnética (EMC)

Os equipamentos (eléctricos/electrónicos) da Brooks Instrument que têm a marcação CE passaram os testes comprovantes dos requisitos de compatibilidade electromagnética (Directiva EMC número 2004/108/EC (89/336/CEE)).

Ao utilizá-los compete-lhe, todavia, a escolha dos cabos de sinal adequados para os equipamentos com marcação CE.

Qualidade dos cabos de sinal, bucins e conectores:

A Brooks Instrument oferece cabos de alta qualidade que cumprem todos os requisitos da marcação CE.

Em caso de utilizar os seus próprios cabos de sinal, tem que garantir uma blindagem a 100%.

Os conectores do tipo “D” ou "circular" têm que ser blindados por uma bainha metálica. Em caso de necessitar de utilizar bucins estes têm que permitir a crimpagem da malha/blindagem do cabo.

A blindagem do cabo deve ser ligada ao corpo metálico ou bocal e ambas as suas metades devem estar blindadas em 360°. A blindagem deve terminar numa ligação à terra.

Os conectores ligados a cartões serão em geral não-metálicos. Os cabos utilizados devem ter fita de blindagem a 100% para satisfazer a marcação CE.

A blindagem, deverá terminar numa ligação à terra.

Atribuição de pinos

: Veja as instruções de operação anexas.

Descarga Electrostática (ESD)

CUIDADO: O equipamento contém peças que são susceptíveis a danos causados pela electricidade estática. Durante a remoção, colocação ou outras manipulações dos cartões de circuitos electrónicos deverão observar-se os procedimentos adequados.

Procedimento de manuseio:

1. Desligar o equipamento da rede.

2. O utilizador, antes de qualquer intervenção, remoção de circuitos ou ajustes em cartões de circuitos ou em outros dispositivos internos, tem que ligar-se à terra por meio duma bracelete de pulso ou outro dispositivo adequado.

3. Os circuitos impressos deverão ser transportados em embalagem condutiva. Os cartões só deverão ser retirados da embalagem protectora imediatamente antes da sua inserção. O cartão retirado deverá ser recolocado imediatamente na embalagem protectora que servirá para o seu transporte, armazenagem, ou retorno a fábrica.

Observações:

O equipamento não é único enquanto portador de peças sensíveis à descargas electrostáticas (ESD). Na maioria dos dispositivos electrónicos Brooks encontram-se peças de tecnologia de óxidos metálicos (NMOS, SMOS, etc.). A experiência mostra que até pequenas quantidades de electricidade estática são capazes de danificar ou destruir esses dispositivos. Os componentes danificados, embora funcionem aparentemente bem inicialmente, acabam por falhar permaturamente

.

9.0 - Essential Instructions

Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

Romanian

Indica

Ġ

ii de referin

Ġă

Citi

Ġ

i-le întâi pe acestea!

Brooks Instrument î

ú i proiecteaz ă

, produce

ú i testeaz ă

produsele într-un mod ce respect ă

un mare num ă r de standarde autohtone

ú i interna

Ġ ionale. Aceste instala

Ġ ii trebuie amplasate, exploatate

ú i între

Ġ inute corespunz ă tor, pentru ca în toate situa

Ġ iile, domeniul lor de lucru s ă

corespund ă

oper ă rii normale. În ceea ce prive

ú te instalarea, operarea

ú i între

Ġ inerea produselor Brooks Instrument, indica

Ġ iile de mai jos trebuie respectate

ú i trebuie introduse in programul de protec

Ġ ia muncii. x

Pentru garantarea presta

Ġ iei corecte, instalarea, operarea, actualizarea, programarea

ú i între

Ġ inerea produsului poate fi realizat ă

doar de c ă tre personal calificat. x

Instruc

Ġ iunile de instalare ale produsului trebuie citite integral, înainte de punerea în serviciu

ú i exploatarea sa. În m ă sura în care edi

Ġ ia acestui manual nu este cea adecvat ă

, identifica

Ġ i pe ultima copert ă

coordonatele distribuitorului local

ú i pentru l ă muriri suplimentare adresa

Ġ i-v ă

acestuia. P ă stra

Ġ i acest manual pentru referin

Ġ e ulterioare.

ATEN ğ

IE: Nu utiliza

Ġ i instala

Ġ ia în afara intervalului de func

Ġ ionare indicat în instruc

Ġ iunile de operare. Nerespectarea acestui lucru se poate solda cu r ă niri grave de persoane sau defectarea instala

Ġ iei.

x

În sura în care indica

Ġ iile c ă r

Ġ ii ma

ú inii nu sunt suficient de l ă muritoare, lua

Ġ i leg ă tura cu reprezentantul Brooks Instrument pentru clarificarea problemei. x

P ă stra

Ġ i toate avertismentele, avizele

ú i instruc

Ġ iunile livrate odat ă

cu instala

Ġ ia sau inscrip

Ġ ionate pe aceasta. x

Efectua

Ġ i instalarea echipamentului în conformitate cu indica

Ġ iile de instalare corespunz ă toare, respectiv cu respectarea prevederilor na

Ġ ionale.

Echipamentul se conecteaz ă

exclusiv la surse de energie electric ă ú i de presiune corespunz ă toare. x

Succesiune: (1) Presuriza

Ġ i lent instala

Ġ ia. Deschide

Ġ i încetul cu încetul supapa de func

Ġ ionare pentru evitarea fluctua

Ġ iilor de flux. (2) Controla

Ġ i dac ă

nu x sunt prelingeri la intrarea sau ie

ú irea debitmetrului de bran

ú are. Dac ă

nu sunt scurgeri, presuriza

Ġ i instala

Ġ ia la presiunea de lucru.

Înaintea ă rii/ între

Ġ inerii, verifica

Ġ i neap ă rat dac ă

conducta uzinal ă

nu este sub presiune. În m ă sura în care este nevoie de piese de schimb, este neap ă rat necesar ca manevrarea pieselor de schimb s ă

fie f ă cut ă

de personal cu calificare profesional ă

agreat de Brooks Instrument. Utilizarea altor piese de schimb decât cele originale

ú i licen

Ġ iate poate avea efecte asupra performan

Ġ elor instala

Ġ iei

ú i asupra siguran

Ġ ei sale în exploatare. Utilizarea de piese asem ă n ă toare de substituire poate avea ca rezultat pericol de incendiu

ú i electrocutare. x

În toate cazurile toate u

ú ile instala

Ġ iei trebuie s ă

fie închise, cu

ú tile de protec

Ġ ie s ă

fie puse la locurile lor, pentru evitarea electrocut ă rii

ú i r ă nirii de persoane, exceptând situa

Ġ iile când un specialist efectueaz ă

lucr ă ri de între

Ġ inere.

ATEN ğ

IE: În cazul instala

Ġ iilor cu flux de fluide, dac ă

din orice motiv este necesar ă

închiderea valvelor de intrare

ú i ie

ú ire, limitrofe instala

Ġ iei, instala

Ġ ia trebuie complet golit ă

. Neglijarea acestui lucru poate avea ca efect dilatarea termic ă

a fluidului, care poate defecta instala

Ġ ia

ú i poate produce r ă niri de persoane.

Directiva european ă

pentru instala

Ġ iile sub presiune (PED)

Toate instala

Ġ iile

ú i sistemele presurizate ce se afl ă

sub presiuni interne ce dep ăú esc 0,5 mbar (g)

ú i au mai mult de 25 mm sau 1

Ġ ol, cad sub inciden

Ġ a normei europene corespunz ă toare (PED). x

La capitolul "Date tehnice" din cartea ma

ú inii se g ă sesc indica

Ġ iile corespunz ă toare directivei PED. x

Mijloacele de m ă surare men

Ġ ionate în cartea ma

ú inii corespund directivei 97/23/EK EU. x

Toate debitmetrele Brooks corespund clasei 1 de fluide. x

Mijloacele de m ă surare mai mari de 25 mm sau 1

Ġ ol corespund categoriei PED I, II sau III. x

Mijloacele de m ă surare mai mici de 25 mm sau 1

Ġ ol se conformeaz ă

practicii inginere

ú ti acceptate (SEP).

Directiva european ă

privitoare la compatibilitatea electromagnetic ă

(EMC).

Instala

Ġ iile (electrice /electronice) ce poart ă

marca Brooks Instrument CE îndeplinesc cu succes cerin

Ġ ele testelor de verificare ale compatibilit ăĠ ii electromagnetice (Cf. directivelor europene EMC cu nr. 2004/108/EC (89/336/EGK)).

În acela

ú i timp trebuie acordat ă

o aten

Ġ ie deosebit ă

la alegerea cablurilor de semnalizare utilizate pentru instala

Ġ iile ce poart ă

marcajul CE.

Calitatea cablurilor de semnalizare, a leg ă turilor prin cablu

ú i a conectoarelor:

Brooks Instrument ofer ă

cabluri de calitate ridicat ă

, care corespund cerin

Ġ elor calitative ale CE.

În m ă sura în care folosi

Ġ i cabluri proprii, trebuie alese acelea care sunt 100% ecranate

ú i prev ă zute cu filtre

.

Conectoarele „D” sau cele „circulare” trebuie sa dispun ă

de ecrane metalice. În caz de nevoie trebuie folosite conectoare metalice pentru montarea filtrelor de cablu.

Filtrul de cablu trebuie conectat la carcasa metalic ă

sau man

ú on

ú i în ambele cazuri trebuie asigurat ă

ecranarea la 360°. Ecranarea trebuie terminat ă

cu o legare la p ă mânt.

Conform standardului, conectoarele apar

Ġ inând pl ă cilor electronice nu sunt metalice. Cablurile folosite trebuie s ă

fie 100% ecranate

ú i prev ă zute cu filtre pentru a corespunde clasific ă rii CE.

Ecranarea trebuie terminat ă

cu o legare la p ă mânt.

Configura

Ġ ie de contact: Vezi instruc

Ġ iunile de operare ata

ú ate.

Desc ă rcare electrostatic ă

(ESD)

ATEN ğ

IE: Instala

Ġ ia include piese care sunt predispuse la defectare sub influen

Ġ a electricit ăĠ ii statice. Trebuie respectate metodele corespunz ă toare de extragere, instalare sau alte manipul ă ri ale circuitelor electronice.

Procedur ă

de manipulare:

1. Instala

Ġ ia trebuie scoas ă

de sub tensiune.

2. Înaintea de inserarea, scoaterea sau reglarea vreunei cartele electronice, sau a altui dispozitiv intern, persoana trebuie s ă

se lege la p ă mânt cu banda pentru articula

Ġ ia mâinii sau alte dispozitive de siguran

Ġă

disponibile pentru acest scop.

3. Cartelele cu cablaje electronice imprimate trebuie transportate în ambalaje anti-electrostatice (conductoare). Cartelele se pot scoate din ambalaj, doar nemijlocit înaintea amplas ă rii lor. Cartela demontat ă

trebuie pus ă

neîntârziat în ambalajul de protec

Ġ ie în vederea transport ă rii, a depozit ă rii sau return ă rii la produc ă tor.

Observa

Ġ ii:

În echipamente se g ă sesc adesea componente sensibile la desc ă rcare electrostatic ă

(ESD). Majoritatea echipamentelor moderne includ componente electronice realizate în tehnologie metal-oxid semiconductor (NMOS, SMOS, etc.) Experien

Ġ a a dovedit c ă

acestea pot fi afectate sau deteriorate chiar de energii electrostatice de slab ă

intensitate. Componentele defectate, cu toate c ă

în aparen

Ġă

sunt func

Ġ ionale, duc în timp la defec

Ġ iuni incipiente.

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

9.0 - Essential Instructions

Brooks

®

CMX Series

Slovak

Základné príkazy

Pre

þ

íta

Ģ

pred inštaláciou!

Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova

Ģ

, prevádzkova

Ģ

a udržiava

Ģ

, na zabezpe

þ enie ich spo

Đ ahlivej a normálnej prevádzky v celom pracovnom rozsahu.

Nižšie uvedené príkazy je potrebné dodržiava

Ģ

a za

þ leni

Ģ

do programu bezpe

þ nostných predpisov v priebehu inštalácie, prevádzky a údržby výrobkov Brooks

Instruments.

• V záujme zabezpe

þ enia vyhovujúceho výkonu inštaláciu, prevádzku, programovanie, aktualizáciu a údržbu zariadení má vykonáva

Ģ

výlu

þ ne odborne kvalifikovaný personál.

• Pred inštaláciou, prevádzkou a servisu zariadení je potrebné pre

þ

íta

Ģ

všetky príkazy. Ak táto príru

þ ka nie je správna, tak na zadnej strane treba nájs

Ģ miestneho distribútora, kontaktova

Ģ

ho pre ć alšie informácie. Pre neskoršie informácie uschovajte príru

þ ku.

UPOZORNENIE: Neprevádzkova

Ģ

zariadenie v rozsahu mimo rozsahu uvedenom v prevádzkovej príru

þ ke. Porušenie tohto oznámenia môže ma

Ģ za následok

Ģ ažkú ujmu na zdraví a vedie k poškodeniu zariadenia.

x

Ak príkazy v návode nie sú jednozna

þ né, kontaktujte zástupcu Brooks Instrument na objasnenie problémov. x

Dodržujte všetky upozornenia, príkazy a usmernenia uvedené na zariadení, alebo s ním dodané. x

Zariadenia inštalujte pod

Đ a návodu uvedeného v príkaze na inštaláciu, v súlade s miestnymi a národnými predpismi. Zariadenie pripojte výlu

þ ne len na vyhovujúci elektrický a tlakový zdroj x

Postup: (1) Pomaly natlakujte systém. Prevádzkový ventil otvorte pomaly na zamedzenie kolísania prietoku. (2) Prekontrolujte tesnos

Ģ

vstupného a výstupného zapojenia prietokomeru. Ke ć

nie je presakovanie, spoje sú tesné, naplni

Ģ

systém na prevádzkový tlak. x

Pred vykonávaním servisných prác kontrolova

Ģ

,

þ i systém nie je pod tlakom. V prípade, že je potrebná výmena sú

þ iastky, výmenu dielov, ur

þ ených Brooks

Instrument musí vykona

Ģ

kvalifikovaná osoba. Použitie nepovolených dielov a vykonávanie nepovolených aktivít ohrozujú bezpe

þ nos

Ģ

prevádzvky a majú negatívny vplyv na výkon zariadenia. Nahradenie sú

þ iastok len podobnými komponentmi môže ma

Ģ

za následok požiar, úraz elektrickým prúdom alebo nedostato

þ nú funkciu zariadenia x

Všetky ochranné kryty, dvierka zariadenia majú by

Ģ

zatvorené na zabezpe

þ enie ochrany proti úrazu elektrickým prúdom a proti poraneniam obsluhy.

Výnimku tvorí vykonávanie údržby kvalifikovaným odborníkom.

UPOZORNENIE: Pri zariadeniach s prietokom kvapalín, ke ć

z akéhoko

Đ vek dôvodu je nutné uzavrie

Ģ

vstupné a výstupné ventily, zariadenie je potrebné úplne vyprázdni

Ģ

. Zanedbanie vypúš

Ģ ania má za následok poškodenie zariadenia s možnos

Ģ ou zranenia obsluhy z dôvodu tepelnej roz

Ģ ažnosti náplne.

Európska smernica vz

Ģ ahujúca sa na tlakové zariadenia (PED)

x

Všetky zariadenia s vyšším vnútorným pretlakom ako 0,5 bar (g), a vä

þ

šieho rozmeru ako 25 mm alebo 1 anglický palec, podliehajú pod Európsku smernicu vz

Ģ ahujúcu sa na tlakové nádoby (PED). x

Kapitola "Technické údaje" návodu na obsluhu obsahuje príkazy vz

Ģ ahujúce sa na smernicu PED. x

Meracie prostriedky uvedené v návode na obsluhu vyhovujú smernici 97/23/ES EÚ. x

Všetky prietokomery Brooks patria do 1. skupiny kvapalín. x

Meracie prístroje presahujúce rozmery 25 mm alebo 1 " sp

ĎĖ ajú I., II., alebo III. kategóriu PED. x

Meracie prístroje menšie alebo rovné ako 25 mm alebo 1 " zodpovedajú zaužívanej meracej praxi (SEP).

Európska smernica vz

Ģ ahujúca sa na elektromagnetickú kompatibilitu (EMC)

Elektrické / elektronické zariadenia Brooks Instrument, ktoré si zaslúžili zna

þ ku CE, úspešne splnili skúšobné testy požiadaviek elektromagnetickej kompatibility (smernica EMC

þ

. 2004/108/EC (89/336/EHS)).

Pritom treba venova

Ģ

zvláštnu starostlivos

Ģ

na výber signálnych káblov zariadenia, s ozna

þ ením CE.

Kvalita signálnych káblov, káblových spojov a prípojov:

Brooks Instrument ponúka vysoko kvalitné káble, ktoré sp

ĎĖ ajú požiadavky kvalitatívneho zaradenia CE.

Ak použijete vlastné signálne káble, majú ma

Ģ

100%-né tienenie, s plným filtrovaním.

Prípojky "kruhové" alebo tvaru "D" majú ma

Ģ

kovové tienenie. V prípade potreby treba použi

Ģ

kovové káblové spojky k upevneniu káblového filtra.

Káblový filter treba pripoji

Ģ

ku kovovému telesu alebo k puzdru, na oboch stranách zabezpe

þ i

Ģ

tienenie v kruhu 360 °. Tienenie má by

Ģ

ukon

þ ené uzemnením.

Prípojky vedúce ku kartám pod

Đ a noriem sú nekovové. Použité káble, pre vyhovenie predpisom CE musia ma

Ģ

100%-né filtrovanie tienením.

Tienenie má by

Ģ

ukon

þ ené uzemnením.

Konfigurácia kontaktov: Vi ć

priložený návod na obsluhu. .

Elektrostatický výboj (ESD)

UPOZORNENIE: Prístroj obsahuje sú

þ iastky, ktoré môžu by

Ģ

poškodené od elektrostatických nábojov. Pri montáži, odstra

Ė ovaní alebo inej

údržby vnútorných obvodových kariet je potrebné dodržiava

Ģ

príslušné postupy.

Postup ošetrovania:

1. Zariadenie

Ģ

od napájania.

2. Osoba vykonávajúca údržbu má by

Ģ

uzemnená uzem

Ė ujúcim náramkom, alebo iným, na túto prácu vyhovujúcim spôsobom pred vykonávaním inštalácie, demontáže a nastavenia obvodových kariet alebo iného vnútorného prostriedku.

3. Karty obvodov sa musia prepravova

Ģ

v elektricky vodivom balení. Karty sa môžu vybera

Ģ

z ochranného obalu výlu

þ ne len tesne pred montážou, zasunutím! Vybranú kartu okamžite treba umiestni

Ģ

do ochranného obalu, ur

þ eného pre dopravu, skladovanie, alebo pre spätnú prepravu do výrobného závodu.

Poznámky:

Existencia prvkov, ktoré sú citlivé na elektrostatické výboje (ESD) v prístroji je

þ astým javom. U vä

þ

šiny moderných elektronických prostriedkov sú použité prvky s technológiou oxidu kovov (NMOS, SMOS, at ć

.). Skúsenosti dokazujú, že aj nepatrné elektrostatické výboje poškodzujú, zni

þ ia tieto prostriedky.

Poškodené sú

þ iastky, aj ke ć

zdanlivo pracujú bez chyby, odkazujú na vznikajúce poruchy.

9.0 - Essential Instructions

Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

Slovene

Osnovna navodila

Najprej preberite jih

Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim doma

þ im in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podro

þ ju funkcioniranja. Naslednjih navodil se mora držati in potrebno je vgraditi v program varstva pri delu pri instaliranju, koriš

þ enju in vzdržavanju izdelkov proizvajalca Brooks Instrument. x

Za jemstvo ustreznega u

þ inka naj izklju

þ no strokovno osobje opravlja instaliranje, koriš

þ enje, osveženje, programiranje in vzdrževanje izdelka. x

Potrebno je prebrati vsa navodila pred instaliranjem, koriš

þ enjem in servisiranjem izdelka. V kolikor ta priro

þ nik ni ustrezna publikacija, na zadnji strani poiš

þ ite lokalnega distributerja in za nadaljnje informacije stopite z njim v kontakt. Prihranite ta priro

þ nik za poznejše informacije.

OPOMBA: Ne koristite napravo izven podro

þ ja iz navodila za uporabo. Prekršek tega lahko privede do osebnih poškodb ali okvare naprave.

x

V kolikor navodila priro

þ nika niso enosmiselna, stopite v kontakt z zastopnikom društva Brooks Instrument, da raz

þ istite problem. x

Držite se vseh opozoril, povabil, navodil, ki so navedena na napravi ali skupaj z njim izporo

þ ena. x

Napravo instalirajte shodno navodilom in relevantnim lokalnim in nacionalnim navodilom iz navodila za instalirenje.. Izdelek spojite izklju

þ no na ustrezni izvir elektrike in obskrbo tlaka. x

Proces: (1) Po

þ asi položite sistem pod tlak. Po

þ asi odpirajte pogonske ventile zaradi izogibanja nihanju pretoka. (2) Preverjajte, ima li curljanja pri povezu vstopa in izstopa merilca toka.

ý e ni curljanja, naplonite sistem na pogonski tlak. x

Pred servisom vsekakor preverjajte, ali je pogonski vod pod tlakom.

ý e je potreben rezervni del, svekakor strokovna oseba mora rokovati z rezervnimi deli odrejenimi od Brooks Instrument. Nedovoljeni rezervni deli in dejavnosti lahko vplivajo na u

þ inek izdelka, oziroma ugrožavajo varnostni pogon.

Sprememba samo z podobnimi rezervnimi deli lahko ima za posledico požar, nevarnost elekti

þ nega šoka ali nedovoljno funkcioniranje. x

Vsa vrata naprave svekakor morajo biti zaprta, zaš

þ itni ovitki morajo biti na svojem mestu zaradi izogibanja šoku in osebnim poškodbam, razen,

þ e na njej strokovnjak opravlja dela vzdrževanja.

OPOMBA: V primeru naprave za tok teko

þ ine,

þ e je iz katera koli razloga potrebno zapreti vstopne in izstopne ventile pri napravi, naprava se mora celotno izprazniti. Zamuda tega lahko provzro

þ i toplotno proširjenje teko

þ ine, kar poškoduje napravo in lahko povrzo

þ i osebno poškodbo.

Europske smernice za naprave ohranjanja pritiska (PED)

Vsaka naprava ohranjanja pritiska z notranjim pritiskom ve

þ

od 0,5 bara (g) in ve

þ jim od 25 mm ali 1 palca sodi pod Europskim smernicam za ohranjanje x pritiska (PED).

Poglavje

þ nika „Tehni

þ ni podatki” vsebuje navodila, ki se nanašajo na smernice PED. x

Merilni instrumenti navajani v priro

þ niku ustrezajo smernicam EU številke 97/23/EK x

Vsaki merilec pretoka Brooks sodi v skupino teko

þ in številke 1. x

Merilni instrumenti ve

þ ji od 25 mm ali 1 palca ustrezajo kategriji PED I, II, ali III. x

Merilni instrumenti manjši od 25 mm oziroma 1 palca ali manjši sledijo sprejeti inženjeski praksi (SEP).

Evropska smernica za Elektromagnetno kompatibilnost (EMC)

Naprave Brooks Instrument, ki so zaslužile CE ozna

þ bo (elektri

þ ni/elektronski) so uspešno izpolnile testove zahteve o elektromangnetni kompatibilnosti (št.

2004/108/EC (89/336/EGK smernice EMC)) .

Obenem mora se posebno pozornost posvetiti na izbiro signalnega kabla, ki se uporabljajo za naprave z ozna

þ bo CE.

Kakaovost signalnih kablov, povezav kablov, priklju

þ kov:

Brooks Insturment nuja kabele visoke kakovosti, ki ustrezajo zahtevam kvalificiranja CE.

V kolikor se uporbalja lastni signalni kabel, treba je izbrati, ki za 100 % senco v polni meri filtriran.

Priklju

þ ki „D” „olika kroga” morajo biti zasen

þ eni kovonskom sencom.

ý e bo potrebno, uporabite kovinske povezave za pritrditev filtra kabla

Filtar kabla je treba priklju

þ iti na kovinsko ohišje ali plašt in na obe polovici je treba sen

þ iti v 360°. Sen

þ enje mora završiti v ozemljitvi.

Priklju

þ ki, ki sodijo karitcam normalno nisu kovinskik. Koriš

þ eni kabli moraju biti filtrirani s 100 % senco, da odgovarjajo CE kvalifikaciji.

Sencanje mora imat konec v ozemljitvi.

Konfiguracija stika: Vidi priloženo navodilo za uporabo.

Elektrostati

þ no izpražnjenje (ESD)

OPOZORILO: Naprava vsebuje take sestavne dele, ki so naklonjeni k poškodbi od stati

þ ne elektrike. Treba se je držati ustreznih postopkov pri odstranjevanju, vlogu ali drugega rokovanja kartic in sredstev notranjih tokovnih krogov.

Posotpek rokovanja:

1. napravo je treba izklopiti iz elektri

þ nega toka.

2. Osebo je treba ozemljiti zapestnim paš

þ ekom ali z drugim varnostnim in za ta namen primernim sredstvom preden bi instalirala, jemala, ali nastavila kartico za tokovni krog ali drugo notranjo opremo.

3. Tiskane kartice tokovnega kroga je treba izporo

þ iti v konduktivni embalaži. Karte so odstranjive izklju

þ no neposredno pred vlogom iz zaš

þ itne embalaže ven. Izjemljeno kartico nemudoma staviti v zaš

þ itno embalažo za gibanje, skladiš

þ enje ali pošiljanje nazaj.

Opombe:

Nije poseben pojav, da se v napravi nahajajo ob

þ utljivi sestavni deli na elektrostati

þ no pražnjenje (ESD). V ve

ü em delu modernih elektronskih sredstev nahajajo se sestavni deli na kovinsko oksidno tehnologijo (NMOS, SMOS itd..). Izkustva potrjujejo, da majhna stati

þ na elektrika more poškodovati ali uni

þ iti ta sredstva. Oškodovani rezervni deli,

þ e na videz dobro delajo, nakažejo za

þ etno napako.

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

9.0 - Essential Instructions

Brooks

®

CMX Series

Spanish

Instrucciones básicas

¡

Léalos primero!

El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento. Las siguientes instrucciones deben cumplirse y incorporadas en su programa de seguridad cuando instalando, operando y mantenimiento los productos Brooks Instrument. x

Para asegurar el adecuado rendimiento, para instalar, operar, actualizar, programar y mantener tiene que realizarse exclusivamente por una persona calificada.

x

Antes de la instalación, operación y servicio del producto leer todas las respectivas instrucciones. Si el presente manual no es la adecuada publicación, busque al distribuidor local que figura en la contraportada y póngase en contacto con él para obtener informaciones. Guarde el presente manual para tener informaciones también en el futuro.

ATENCIÓN: No haga funcionar los equipos fuera del rango indicado en las instrucciones de funcionamiento. El incumplimiento de estas últimas puede conducir a graves daños personales o a la avería del equipo.

x

Si las instrucciones del manual no son evidentes, póngase en contacto con el representante de Brooks Instrument para aclarar el problema x

Observar todas las alertas, advertencias e instrucciones indicadas en el equipo o suministradas con el mismo. x

Instale su equipo en conformidad con las recomendaciones indicadas en las respectivas instrucciones de instalación y con las pautas de las normas vigentes locales e internacionales. Conectar el producto exclusivamente a la adecuada fuente eléctrica y presión. x

Proceso: (1) Colocar lentamente flujo en el sistema. Abrir lentamente las válvulas de proceso para evitar oscilación del flujo. (2) Verificar si hay fuga alrededor de las conexiones de entrada y salida del flujómetro, Si no hay, llenar el sistema con la presión de operación.

x

Antes de efectuar el servicio, verificar si hay presión o no en la tubería de la red. Si se requiere realizar un recambio de piezas, solamente el personal calificado puede manipular las piezas de repuesto determinadas por Brooks Instrument Las piezas y operaciones no autorizadas pueden afectar el rendimiento del producto o arriesgar el funcionamiento seguro. El recambio realizado con piezas sólo similares pueden traer como consecuencias incendios, choques eléctricos o funcionamiento bajo. x

Todas las puertas de la instalación deben estar cerradas, las cubiertas de protección tienen que hallarse en el debido sitio con el fin de evitar los daños personales y los choques eléctricos, salvo cuando un especialista efectúa el mantenimiento.

ADVERTENCIA: En caso de instalaciones que circulen líquido, si por cualquier razón se hubiera de cerrar las válvulas de entrada y salida situadas al lado del equipo, dichas instalaciones deberán ser completamente vaciadas. La omisión de esto último puede provocar la dilatación térmica del líquido, lo que puede dañar al equipo y conducir a daños personales.

Directriz Europea de los Equipos de Presión (PED)

Todos los equipos de presión, con una presión interna que supere a 0,5 bar (g) con tamaño mayor a 25 mm o 1 pulgada entran el ámbito de la Directriz

Europea de los Equipos de Presión (PED). x

El capítulo Datos Técnicos del manual incluye las instrucciones respecto a las directivas de PED x

Los instrumentos de medición indicados en el Manual responden a las EN directivas 97/23/EC. x

Todos los flujómetros Brooks pertenecen a la categoría 1 del grupo de fluidos. x

Los instrumentos de medición más grandes que 25 mm o 1 pulgada están en conformidad con las categorías I, II o III de PED x

Los instrumentos de medición más pequeños que 25 mm o 1 pulgada siguen la Práctica Aceptada de Ingeniería (SEP).

Directriz Europea respecto a la Compatibilidad Electromagnética (EMC)

Las instalaciones de Brooks Instrument (eléctricas/electrónicas) merecedores de la categoría CE cumplieron con éxito las pruebas que verifican las exigencias de la compatibilidad electromagnética (directiva de EMC No.89/336/EEC)

Al mismo tiempo se ha de prestar una especial atención en la selección de los cables de señal, utilizados con los equipos marcados con CE.

Calidad de los cables de señal, piezas de unión de cable y conectores:

El Brooks Instrument ofrece cables de alta calidad, que responden a los requerimientos de calificación CE.

Si se utiliza cable propio de la firma, se ha de elegir uno que sea completamente filtrado con blindaje de 100%.

Las piezas de unión de forma „D” o „circular” deben ser blindadas mediante blindaje metálica. Si es necesario, aplicar piezas de unión de metal para sujetar el filtro de cable.

Conectar el filtro de cable a la caja o manguito de metal blindándolo en ambas caras en 360°.

El blindaje debe terminar en tierra.

Los conectores que pertenecen a las tarjetas normalmente no son metalizados. Los cables utilizados deben ser filtrados con una blindaje de 100% para responder a la calificación CE.

El blindaje debe terminarse en tierra.

Configuración de contacto: Véase Instrucciones de operación adjuntas.

Descarga Electroestática (ESD)

PRECAUCIÓN: El aparato incluye piezas electrónicas que son susceptibles a los daños provocados por la electricidad estática. Observar los adecuados procesos para remover, instalar o manipular las tareas y medios de circuitos eléctricos internos

Proceso de operación:

1. Desconectar la fuente eléctrica de la unidad.

2. La persona debe ponerse a tierra mediante una palanca acodada o por otro medio seguro y apropiado para dicho fin antes de instalar, sacar o ajustar el circuito impreso eléctrico u otro medio interno.

3. El circuito impreso debe ser transportado en embalaje conductivo. Las tarjetas no pueden sacarse de la cubierta protectora exclusivamente directamente antes de la instalación. Las tarjetas desmontadas deben colocarse sin tardar en el embalaje protector utilizado para manipulación, almacenamiento o devolución a la fábrica.

Notas:

Esto equipo no es el único contenido de piezas susceptibles a la descarga electroestática (ESD). En la mayoría de los medios electrónicos modernos se encuentran piezas fabricadas por tecnología de óxido metálico. (NMOS, SMOS etc.). Las experiencias confirman que incluso una mínima electricidad estática puede dañar o destruir dichos medios. Las piezas averiadas, aunque funcionen aparentemente bien, indican una falla inicial.

9.0 - Essential Instructions

Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number:541B154AAG

January, 2011

Swedish

Väsentliga anvisningar.

Läs detta innan du fortsätter !

Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls. x

För att garantera angiven funktion, använd kvalificerad personal till att installera, handha, uppgradera, programmera och serva produkten. x

Läs alla instruktioner innan produkten installeras, startas upp och underhålls. Om du finner att denna instruktionshandbok inte är den rätta instruktionsboken, titta på i slutet av pärmen för information om hur man kan kontakta lokala representanter. Spara denna instruktions manual för senare behov.

VARNING: Kör inte detta instrument utanför dess specifikationer som är angiven i Instruktionsboken. Undvikande att ta denna varning kan leda till allvarliga personliga skador och / eller skada utrustningen.

x

Om du inte förstår någon av dessa instruktioner, kontakta din representant för Brooks Instrument för klarläggande. x

Följ alla varningar och instruktioner som följer med leveransen av denna produkt. x

Installera din utrustning på sättet som anges i den gällande handbokens installationsanvisningar och enligt tillämpliga lokala och nationella föreskrifter.

Koppla varje produkt till föreskriven ström- och tryckkällan. x

Igångsättning: (1) Koppla långsamt på flöde i systemet. Öppna processventiler sakta för att undvika för höga flöden. (2) Kontrollera läckor vid mätarens anslutningar för in- och utlopp. Om inget läckage förekommer, kör systemet upp till drifttrycket. x

Kontrollera att processledningens tryck är bortkopplat före service. I fall det behöves kompletteras med nya delar, se till att komponenter föreskrivna av

Brooks Instrument används. Samt att kvalificerad personal utför arbetet. Ej rekommenderade komponenter och åtgärder kan påverka produktens prestanda och sätta din driftsäkerhet på spel. ”Felaktiga” ersättningar kan orsaka eld, elektriska skador samt felaktig funktion.

x

Se till att anordningens kåpor och skyddslock ligger på sin plats med syfte att förebygga elektriska kontakt och personliga skador; det enda undantag gäller när underhållsarbete utförs av kvalificerad personal.

VARNING: I fall av - flödesmätare / regulatorer för vätskor: Ifall ventiler före och efter skall stängas av, måste alla ledningar tömmas på all vätska. Att ej tömma ledningar alt koppla bort trycket kan göra så att vätskans värmeutvidgning kan spräcka / skada utrustningen och orsaka personliga skador.

European Pressure Equipment Directive (PED) - (Rådets Direktiv 99/36/EG av den 29 april 1999[1] om transportabla tryckbärande anordningar)

Alla utrustning för tryck med ett tryck över 0.5 Bar(g) bar och större demensioner än 25 mm eller 1" (inch) faller under Tryck direktiv 99/36/EG av den 29 april

1999[1] om transportabla tryckbärande anordningar - PED. x

Den här Instruktionsbokens Sektion ” Specifikation” innehåller anvisningar gällande PED Direktivet. x

Mätare som beskrivs i denna Instruktionsbok är i överensstämmelse med EN Direktivet 97/23/EC. x

Brooks Instruments alla flödesmätare faller under flödesgrupp nr. I. x

Mätare som är större än 25 mm eller 1" (inch) överensstämmer med PED kategorier I, II eller III. x

Mätare på 25mm eller 1" (inch) eller mindre faller under Sound Engineering Practice (SEP) (God Teknisk Praxis).

European Electromagnetic Compatibility (EMC) - Elektromagnetisk kompatibilitet

Brooks Instrument (elektriska/elektroniska) CE-märkta anordningar har redan genomgått ett framgångsrikt prov enligt regleringar under Electromagnetic

Compatibility (EMC directive 2004/108/EC (89/336/EEC)). Man måstre dock ägna särskild uppmärksamhet till valet av signalkabeln som skall används för CEmärkta anordningar.

Signalkablars, packboxars och kontakdons kvalitet:

Brooks Instrument levererar högkvalitativa kablar som överensstämmer med specifikation för CE-intygade produkter.

Om man använder sin egen signalkabel, då bör man använda en kabel som är fullständigt skärmad med en 100% avskärmning.

“D” eller “Cirkelformiga” kontakdon skall vara skärmade med metalliska avskärmningar. Om det är användbart, bör metallpackboxar som ger en bra fastspänning för kabelskärmar användas.

Kabelavsärmningen måste kopplas till den metalliska skärmande anordningen eller packboxen och skärmas vid båda ändar runt omkring. Avskärmningens avspänning måste jordas.

Card Edge Kontaktdon är icke metalliska. För att överensstämma med krav på CE-intyg, skall de kablarna som används vara skärmade med 100% skärmning.

Skärmningen måste jordas.

Vad gäller stiftkonfigurationen: Se den bifogade Instruktionshandboken.

ESD (Elektrostatiska urladdningar)

OBS: Denna utrustning innehåller elektroniska komponenter som är lättpåverkade av skada orsakad av statisk elektricitet. Lämplig hanteringsprocedur måste följas när man tar bort, installerar eller på något annat sätt hanterar inre kretskort eller andra anordningar.

1. Ström till enheten måste kopplas från.

2. Personalen måste jordas med hjälp av ett armband eller något annat säkert medel innan något kretskort eller andra inre anordningar installerras, tas bort eller justeras.

3. Kretskort måste transporteras i en speciell förpackning för elektronik. Kort skall ej tas bort från deras skydsskåpa innan man skall installera dem. De borttagna korten bör omedelbart läggas i speciell förpackning för transport, lagring eller återlämnande till fabriken.

Anmärkningar:

Dessa instrument är ej unika vad gäller dess ESD (Elektrostatiska urladdningar) - känsliga komponenter. De flesta samtida konstruktioner innehåller komponenter som utnyttjar metalloxid teknologi (NMOS, SMOS, o.s.v.). Erfarenhet har visat att även små mängder av statisk elektricitet kan skada eller förstöra dess komponenter. Skadade komponenter - även om de annars verkar fungera ordentligt – har ofta en kortare livslängd. .

Installation and Operation Manual

X-VAC-CMX-eng

Part Number: 541B154AAG

January, 2011

Brooks

®

CMX Series

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Brooks ® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number: 541B154AAG

January, 2011

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.

Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended by the original manufacturer.

All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of

Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse, accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of

Seller are not covered by this limited warranty, and shall be at Buyer’s expense.

Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant

International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

START-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required.

For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas 1 888 554 FLOW

Europe

Asia

+31 (0) 318 549 290

+81 (0) 3 5633 7100

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.

X-VAC-CDL-eng (supersedes A330168 REV 001 08/07)

TRADEMARKS

Brooks ....................................................... Brooks Instrument, LLC

Inconel .............................................................................. HP Alloys

ODVA .......................... Open DeviceNet Vendors Association, Inc.

VCO .................................................................................. Cajon Co.

VCR .................................................................................. Cajon Co.

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