User Manual PZ77E - Physik Instrumente

PZ 77E User Manual
E-509 Position Servo-Control Module
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Release: 2.8.4
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Date: 2009-02-20
This document describes the
following product(s):
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„ E-509.Lx
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Position Servo-Control Module for LVDT sensor
E-509.Sx
Position Servo-Control Module for SGS
E-509.CxA
Position Servo-Control Module for Capacitive
sensors
E-509.E3
Position Servo-Control Module for Single-Plate
PISeca™ Capacitive Sensors
E-509.E03
Signal Conditioner for Single-Plate PISeca™
Capacitive Sensors
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© Physik Instrumente (PI) GmbH & Co. KG
Auf der Römerstr. 1 ⋅ 76228 Karlsruhe, Germany
Tel. +49-721-4846-0 ⋅ Fax: +49-721-4846-299
info@pi.ws ⋅ www.pi.ws
Physik Instrumente (PI) GmbH & Co. KG is the owner of the following company names and
trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, NanoCube®,
NanoAutomation®
Copyright 1999–2009 by Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany.
The text, photographs and drawings in this manual enjoy copyright protection. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG reserves all rights. Use of said text,
photographs and drawings is permitted only in part and only upon citation of the source
First printing 2009-02-20
Document Number PZ 77E, Eco, Bro, Release 2.8.4
E-509_User_PZ77E284.doc
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Subject to change without notice. This manual is superseded by any new release. The newest
release is available for download at www.pi.ws.
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About This Document
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Users of This Manual
This manual is designed to help the reader to install and operate the E-509 Position ServoControl Module. It assumes that the reader has a fundamental understanding of basic servo
systems, as well as motion control concepts and applicable safety procedures.
The manual describes the physical specifications and dimensions of the E-509 Position ServoControl Module as well as the procedures which are required to put the associated motion
system into operation.
This document is available as PDF file. Updated releases are available from www.pi.ws or
email: contact your Physik Instrumente Sales Engineer or write info@pi.ws.
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Conventions
The notes and symbols used in this manual have the following meanings:
CAUTION
Calls attention to a procedure, practice, or condition which, if not
correctly performed or adhered to, could result in damage to
equipment.
NOTE
Provides additional information or application hints.
Related Documents
The other system components and any software tools which might be delivered with E-509
Position Servo-Control Module are described in their own manuals. All documents are available
as PDF files from www.pi.ws or by email from your Physik Instrumente Sales Engineer or
info@pi.ws.
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E-509 Position Servo-Control Module
User Manual PZ 77E
Contents
Introduction ................................................................. 6
1.
1.1.
Safety Precautions ..................................................................... 6
1.2.
Prescribed Use ............................................................................ 7
1.3.
Model Survey ............................................................................... 7
1.4.
Front Panels................................................................................. 9
2.
Quick Start................................................................... 9
3.
E-509 Design.............................................................. 11
3.1.
Signal Path Diagram .................................................................. 12
3.2.
Submodules ............................................................................... 13
3.3.
Sensor Processing and Servo-Control Functions ...................... 14
4.
E-509 Calibration Routines ....................................... 15
4.1.
Static Calibration........................................................................ 15
4.2.
Dynamic Calibration................................................................... 19
4.3.
Adjustment for Systems with E-509.Ex PISeca™ Models ......... 19
5.
Disposal..................................................................... 22
6.
E-509 Technical Data ................................................. 23
6.1.
Two-Plate Cap. Sensor on-board Sensor Processing ........... 25
6.2.
Single-Plate Cap Sensor on-board Sensor Processing ............. 27
Pin Assignments........................................................ 30
7.
7.1.
32-Pin Main Connector, DIN 41612 ........................................... 30
7.2.
SENSOR-MONITOR Output ...................................................... 31
7.3.
Sensor Connections................................................................... 33
8.
Appendix—Single-Plate PISeca™ Capacitive Sensors36
8.1.
Measuring Principle ................................................................... 36
8.2.
Measurement Range ................................................................. 37
8.3.
Bandwidth .................................................................................. 37
8.4.
Linearity ..................................................................................... 37
8.5.
Target Plane .............................................................................. 38
8.6.
Terminology ............................................................................... 38
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1. Introduction
E-509 is a displacement-sensor and position-servo-control module for PZT
actuators. The module is used in the E-500-series electronics and allows
controlling the position (displacement) of piezoelectric devices with nanometer
resolution. It can also be installed in E-470, E-471, E-480 and E-481 high-voltage
amplifier systems, giving them servo-control capability.
The E-509 controller generates the input signal for the power amplifier module
which actually drives the PZT. The E-509 uses the difference between target
position and the actual position in a servo-loop algorithm, compensating drift and
hysteresis of the PZT actuators. The effective stiffness of the actuator is
significantly increased due to the rapid displacement control effected by adjusting
the PZT operating voltage so as to maintain the displacement even when external
forces change.
Position information is provided by high-resolution sensors integrated in the
mechanical stage or PZT actuator. Strain gauge sensors (SGS), LVDT sensors
and capacitive sensors are supported by the E-509.
The E-509 does not encompass an amplifier to supply the PZT operating voltage.
High-voltage (E-507, E-508, E-470, E-471, E-480, E-481) or low-voltage amplifiers
(E-503, E-505) can be used—the choice depends on the PZT type. The E-509 and
amplifier are installed in the same chassis and communicate automatically over the
backplane (see signal path diagram, p. 12).
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The main parts of the E-509 are the sensor signal processing circuit and a servocontroller with adjustable P-I filter and optional notch filter to allow operation close
to the mechanical resonant frequency.
The E-509 hardware design comprises the basic PCB module and one or two
small PCB submodules for each channel. Implemented on submodules are the
servo-control algorithms, and, in the case of SGS and LVDT sensor versions, the
sensor processing.
1.1.
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Safety Precautions
CAUTION—Electrostatic Hazard
Electronic components are sensitive to electrostatic electricity. Take appropriate electrostatic
protection measures when installing or removing boards or working on an open controller.
CAUTION—High Voltage
The piezo amplifiers used with this product are high-voltage devices capable of generating high
output currents. They may cause serious or even lethal injury if used improperly.
Take special care if connecting products from other manufactures.
CAUTION—Avoid Resonance Damage
!
Most of the PZT actuators used with the system described in this manual can be permanently
damaged by uncontrolled resonance. The system must never be operated too close to the
resonant frequency. If you hear or see resonant behavior, switch off the unit.
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E-509 Position Servo-Control Module
1.2.
User Manual PZ 77E
Prescribed Use
Based on their design and realization, E-509 modules are intended to be used
installed in compatible housings, like the PI E-500/E-501 series chassis. They
must not be used for applications not in conformance with this manual.
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Observe the safety precautions given in this User Manual.
E-509 systems conform to Measurement Category I (CAT I) and may not be used
for Measurement Categories II, III or IV. Other use of the device (i.e. operation
other than instructed in this Manual) may affect the safeguards provided.
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Standard E-509 systems are designed to operate under normal ambient conditions
at least as listed here. More stringent conditions given in the Specifications Table
(p. 23) are, of course, also met.
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Indoor use
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Altitude up to 2000 m
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Temperature range 5°C to 40°C
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Max. relative humidity 80% for temperatures up to 31°C, decreasing linearly to 50%
relative humidity at 40°C
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Line voltage fluctuations not greater than ±10% of the line voltage
Transient overvoltages as typical for public power supply
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Note: The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category
II (IEC 60364-4-443).
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1.3.
Degree of pollution: 2
Model Survey 1
TPF
FPT
E-509.S1 PZT Servo-Control Module, one channel, for strain gauge sensors
E-509.S3 PZT Servo-Control Module, three channels, for strain gauge sensors
E-509.L1 PZT Servo-Control Module, one channel, for LVDT sensors
E-509.L3 PZT Servo-Control Module, three channels, for LVDT sensors
E-509.C1A PZT Servo-Control Module, one channel, for 2-plate capacitive sensors
E-509.C2A PZT Servo-Control Module, two channels, for 2-plate capacitive sensors
E-509.C3A PZT Servo-Control Module, three channels, for 2-plate capacitive sensors
E-509.E3
PZT Servo-Control Module, three channels, for single-plate PISeca™
capacitive sensors
E-509.E03
Signal conditioner (sensor excitation and readout) module, three channels,
for single-plate PISeca™ capacitive sensors; no servo-control
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Most SGS and LVDT versions cannot be distinguished by the front panel.
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E-509 Position Servo-Control Module
1.3.1.
User Manual PZ 77E
Submodules (pre-installed on the E-509 2 )
E-801.1x Sensor-processing submodule for SGS sensors (present on E509.Sx/E-509.S3S)
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E-801.2x Sensor-processing submodule for LVDT sensors (present on E-509.Lx)
E-802.5x Position Servo-Control submodule (present on all except E-509.E03)
The submodules are described in separate manuals: E-801 submodules in
PZ117E, E-802.55s in PZ150E, and all former E-802.5x versions in PZ113E. The
appropriate manuals are included with your E-509 module(s).
1.3.2.
Standard Accessories
E-808.90 Sensor-Monitor cable: comes with three-channel SGS- and LVDTsensor versions (E-509.S3, E-509.L3)
Note: The purpose of this cable is simply to split up the SENSOR
MONITOR output signal (LEMO) for the three channels. The
leads of this open ended cable are color coded:
white = channel 1,
brown = channel 2,
green = channel 3,
shield = GND.
D-893.32 Sensor-Monitor cable: comes with each capacitive-sensor version
(E-509.CxA, E-509.Ex)
Note: The purpose of this cable is simply to split up the SENSOR
MONITOR output signal (6-pin LEMO) to three separate BNC
connectors. The cable is also specially designed for low-noise
operation. The BNC connectors are each labeled with the
channel number.
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1.3.3.
Banana Plug: For single-plate PISeca™
capacitive sensor reference plane ground
connection. Shown at right disassembled,
before installation of lead.
Fig. 1: Banana plug
Single-Plate Capacitive Sensor Probes
Different size sensors are available for the E-509.E03 and E-509.E3 single-plate
capacitive sensor versions. The sensors must thus be ordered separately:
D-510.020
PISeca™ Single-Electrode Capacitive Sensor Probe, 8 mm
diameter, 20 µm nominal range, 40 µm, 50 µm and 100 µm
extended ranges, D-891.01E connecting cable included
D-510.050
PISeca™ Single-Electrode Capacitive Sensor Probe, 12 mm
diameter, 50 µm nominal range, 100 µm, 125 µm, 250 µm
extended ranges, D-891.01E connecting cable included
D-510.100
PISeca™ Single-Electrode Capacitive Sensor Probe, 20 mm
diameter, 100 µm nominal range, 200 µm, 250 µm, 500 µm
extended ranges, D-891.01E connecting cable included
See the sensor documentation for information on mounting and performance.
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For versions and details of the submodules, refer to the E-801 Sensor Submodule User Manual (PZ 117E)
and the E-802 User Manual (PZ150E or PZ 113E). The E-509.CxA and E-509.Ex have sensor-processing
electronics on the main module
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1.4.
User Manual PZ 77E
Front Panels
PZT-SERVO
CONTROLLER
SERVO
ON
OFL
OFF
SENSOR
MONITOR
ZERO
SENSOR
E-509
Fig. 2: LVDT and SGS versions
share the same front panels
Fig. 3: Typical front panels of the different
capacitive sensor versions*
*The predecessors of E-509.CxA models were E-509.Cx; they differ in SENSOR
MONITOR socket.
2. Quick Start
NOTE
To achieve optimum measurement stability it is recommended to wait at least 30 minutes after
powering up the system.
2.1.1.
General Procedure
This quick start assumes that your E-509 was ordered with an appropriate chassis
and was calibrated at the factory with the PZT actuators with which it will be
operated. To put the system into operation, proceed as follows:
1. Make sure the control unit in which the E-509 is installed is powered down.
2. Connect the PZT actuator sensor cables to the E-509 servo-controller. With
single-plate capacitive sensor systems, see Section 2.1.2 below. On multichannel units, make sure that each PZT is connected to the channel with which
it was calibrated (see label affixed to back of chassis). On 2-plate capacitive
sensor systems, make sure that the “Probe” and “Target” sensor cables are not
interchanged.
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3. Connect the PZT voltage supply cables to the power amplifier module (in the
same chassis, near the E-509). Again, in multi-axis systems, make sure the
proper PZTs are connected to the proper channels.
!
CAUTION—High Voltage
The piezo amplifiers used with this product are high-voltage devices capable of generating high
output currents. They may cause serious or even lethal injury if used improperly.
Take special care if connecting products from other manufactures.
!
CAUTION—Avoid Resonance Damage
Most of the PZT actuators used with the system described in this manual can be permanently
damaged by uncontrolled resonance. The system must never be operated too close to the
resonant frequency. If you hear or see resonant behavior, switch off the unit.
4. If you have a computer control and/or display module in the system (e.g. E-516
or E-517), consult its User Manual for information on commanding the system
and setting servo-control parameters. In particular, make sure the front-panel
Servo-Control switch is properly set for the type of operation you require.
5. Power up the system. If you see or hear resonant behavior, power down
immediately and check the servo-control parameters. See the “Dynamic
Calibration” Section on p. 19 for more information.
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2.1.2.
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Systems with E-509.Ex PISeca™ Models
NOTE
Motion of the connecting cable should be avoided because of capacitive influences. If possible,
the application should be designed with sensor probe always at rest and the target the moving
part of the system.
1.
Mount the sensor probe in your intended application as described in the
Technical Note D510T0001. Note that the minimum allowable probe-to-target
gap is 10 µm. A minimum gap of 15 µm is recommended.
CAUTION
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Take care not to shift the sensor probe when connecting the cable!
2.
3.
Connect the sensor probe to the Sensor In socket of the E-509.Ex electronics
unit using the D-891.01E cable (comes with the sensor). Make sure that each
sensor probe is connected to the channel with which it was calibrated (see
label affixed to back of chassis)
Connect the target surface to the Sensor Gnd socket on the front of the E509.Ex (mating banana plug included). Make sure that each target surface is
connected to the channel with which the corresponding sensor probe was
calibrated (see label affixed to back of chassis)
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4.
User Manual PZ 77E
Connect the included E-808.90 sensor monitor cable to the Sensor Monitor 13 socket. The sensor monitor signal shows the current position of the sensor
probe in relation to the target and the selected measurement range. See
Section 4.3.3 for details on how to adjust target surface and probe
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3. E-509 Design
The E-509 module is designed to plug into a compatible PI chassis (e.g. E-500, E501 or E-470, but not E-50x.621). There it operates in conjunction with other
modules such as power amplifiers and display or remote control units. See the
E-500/E-501 User Manual (PZ 62E) and the manuals of other devices in your
system for details. Most questions about E-509 operation can be answered by
reference to the signal path diagram in the next section.
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3.1.
User Manual PZ 77E
Signal Path Diagram
Fig. 4: Signal path (only one channel shown) in a system with an E-509 ServoController, a PZT power amplifier and an E-516 Computer Interface and Display
Module. Note that "Control In" and "DC-offset" on the amplifier module do not
control the amplifier directly, but only determine “Control Out” for the other
modules. Some amplifiers can invert these signals, and the E-509 output can be
inverted or shifted, but if Servo is ON, the E-509 “Target In” must be in the 0 to
10 V range if Servo is ON. Note also that the E-802 servo mode is determined by a
combination of the toggle switch position and the state commanded by the E-516.
Note that E-517 Interface and Display modules act in the same way as E-516s.
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3.2.
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Submodules
Some functions of the E-509 are implemented on plug-in submodules 3 , as
discussed in the following sections. It should not be necessary to remove or
replace the submodules, but if you ever do so, be sure to face the component
sides as illustrated, (Fig. 5).
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SGS and LVDT Versions
Capacitive Sensor Servo Versions
Fig. 5: Submodule locations on E-509 modules. Note also sensor gain
potentiometer locations
3.2.1.
E-509.S1 and E-509.L1
These single-channel versions have one servo-control and sensor submodule
each. The submodules location is identical with the layout shown in Fig. 5, but only
for one channel each.
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3.2.2.
E-509.S3 and E-509.L3
These 3-channel versions are depicted at left in Fig. 5, and have three servocontrol and three sensor submodules each.
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3.2.3.
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E-509.CxA and E-509.E3
The E-509.CxA and E-509.E3 versions also have one servo-control submodule per
channel. The sensor processing electronics is implemented on the main board
rather than on a submodule (Fig. 5 right).
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See Fig. 9 on page 25 for the full layout of a three-channel E-509.C3A or Fig. 11
on p. 28 for the E-509.E3.
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3.2.4.
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E-509.E03
The E-509.E03 does sensor processing only and has no servo-controller and no
submodules. Its layout is otherwise the same as the E-509.E3 (Fig. 11).
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Except on the E-509.E03 which has no servo-controller and no submodules.
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E-509 Position Servo-Control Module
3.3.
User Manual PZ 77E
Sensor Processing and Servo-Control Functions
The E-509 modules normally come pre-installed in an appropriate PI chassis
(except for OEM versions). The system is calibrated at the factory with the
associated PZT actuators.
If, however, you should need to recalibrate your system, see Section 4 and the E802 Servo-Control Submodule User Manual.
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3.3.1.
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Sensor Processing Electronics
SGS versions have E-801.1x submodules which provide DC sensor excitation and
readout.
LVDT versions have E-801.2x submodules which provide AC sensor excitation.
They can also be connected to SGS sensors if necessary. On multi-channel E509s, the LVDT excitation frequencies are synchronized by the appropriate use of
master and slave E-801.2x versions or jumper settings.
Should you ever need to make any adjustments on the sensor submodules, refer
to the E-801 User Manual for more details.
Capacitive sensor versions have the sensor electronics on the E-509. See Section
6.1 or 6.2 of this manual for details.
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3.3.2.
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E-802 Position Servo-Control Submodules
The E-802 submodule processes the control signal for the amplifier driving the piezoelectric
translators. Slew rate limitation, notch filter and servo-control loop are all implemented on
the E-802.
The servo-loop logic compares the TARGET IN and the sensor signal (current position) to
generate the SERVO-CONTROL OUT amplifier control signal using an analog proportionalintegral (P-I) algorithm. For details see the signal path diagram, Fig. 4, on 12.
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The E-802 can operate in either servo OFF mode or servo ON mode. The mode is
determined by a combination of the (active-low) SERVO ON/OFF signal and the front-panel
SERVO TOGGLE SWITCH: for servo OFF mode, both must be in the OFF condition (see
Signal Path diagram, p. 12). With the E-802.55 and higher versions of the E-802, the notch
filter and slew rate limiter remain active even when servo-mode is OFF. This can cause a
±5% shift of the open-loop output voltage to occur when the notch filter frequency is
changed.
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For more details and calibration procedures, see Section 4 and the E-802 Servo-Control
Submodule User Manual.
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4. E-509 Calibration Routines
For most applications, only the zero point has to be realigned from time to time to
compensate for temperature changes. Further adjustments are not required and
not recommended as long as system components are not exchanged or modified.
NOTE
All basic calibration adjustments are done in PI lab before shipment. The PZT system is
delivered ready for operation. Except for occasional zero-point adjustment, it should not be
necessary to calibrate the system.
Therefore calibration should only be done if the controller/actuator configuration is
changed or elements are replaced.
The full calibration and adjustment procedure for the E-509 Position Servo-Control
Module includes static calibration (zero point and sensor gain adjustment) and
dynamic calibration (servo-loop, slew rate and step response). In addition, on the
capacitive sensor versions, the ILS (integrated linearization system) can be
adjusted to minimize 2nd order polynomial non-linearities.
Calibration must be performed separately on each channel.
NOTE
The PZT actuator is calibrated in conjunction with a particular E-509 control module: the
devices then belong together. Replacement of either one or the other requires new calibration
runs to obtain the specified system accuracy.
4.1.
Static Calibration
Proper static calibration makes it possible to accurately drive the PZT system to
absolute positions with an external analog control signal running over a 10 V range
and without reaching the output voltage limits of the amplifier and causing overflow
conditions.
Static calibration consists of zero-point adjustment and static gain adjustment—
and for capacitive sensor versions—ILS adjustment. The adjustments are to some
degree interdependent and should be repeated until stable settings are obtained.
NOTE
Zero-point adjustment is the only calibration operation regularly required in most application
environments.
The following subsections describe the static calibration procedure for one
channel. Note that calibration must be performed separately on each channel.
4.1.1.
Equipment Needed
Zero-point adjustment:
For calibration in analog (offline) operation an
adjustable voltage source from 0 to +10.0000 V is needed. If a display
or computer-control module (e.g. E-516 or E-517) is present in the
system, zero-point adjustment can be performed without additional
equipment. Otherwise, a precision voltmeter is required.
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Static gain (sensor range) adjustment:
Static PZT displacement calibration
requires an external expansion gauge with appropriate resolution (e.g.
0.01 µm for a P-841.30 actuator) and a precision voltmeter. The
accuracy of calibration depends on the resolution of the external
measurement system. We recommend using a system with an
accuracy of at least 100 nm and a resolution of 10 nm.
For calibration in analog (offline) operation an adjustable voltage
source from 0 to +10.0000 V is needed.
Since the E-509 module has to be brought out of the chassis to permit
access to the appropriate adjustment elements, a 32-pin extension
board (P-895.00, not included) is also required.
4.1.2.
Zero-Point Adjustment
Proper zero-point adjustment ensures that the full output voltage swing of the
amplifier can be used without reaching the output voltage limits of the amplifier and
causing overflow conditions, both in open-loop and closed-loop operation.
The zero-point is adjusted with the ZERO potentiometer, accessible through a
labeled hole in the E-509 front panel. This potentiometer shifts the output of the
sensor processing circuitry and hence the values on the "Sensor out," "Monitor
out" and servo-loop sensor-input lines (see Fig. 4).
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1
Before powering up the system, make sure the PZT actuator is mounted in the
same way and with the same load as during normal operations in the
application. In multi-axis systems, make sure the PZTs are always connected
to the same controller modules.
2
If you use your own LVDT or capacitive sensors, adjust the sensor mechanical
zero position (LVDT core or capacitor plate position). For details see the
sensor or sensor-submodule documentation.
3
Decide whether you want to calibrate in computer-controlled mode (online) or
in "analog" mode (offline). Online and offline operation must not be mixed
during calibration. If you choose offline operation, make sure any computer
interface module (e.g. E-516 or E-517) is set to "offline". The following steps
describe offline operation—if you choose online operation, use computer
commands in place of the control voltage and DC-offset to command voltages
and position (you do not need an external voltage source for computercontrolled calibration).
4
Make sure the control input (on the amplifier module) is 0 V.
5
Set the switch on E-509 front panel to Servo OFF (required in computer mode
also).
6
Power up the system. Make sure that any computer-control module is
consistent with servo OFF.
7
Turn the DC-OFFSET potentiometer on the amplifier module full clockwise and
than back full counterclockwise (0 V) to exercise the PZT.
8
Adjust the ZERO potentiometer so that the sensor-monitor signal is 0 V. For
offline calibration, read it either with a voltmeter on the SENSOR MONITOR
socket or on a display module in the system. The zero adjustment is now close
enough to allow switching on servo-control.
9
Switch the channel to closed-loop (SERVO ON).
10 If no display module (e.g. E-516 or E-517) is installed, connect a voltmeter to
the PZT socket (PZT output voltage) on the amplifier in parallel with the PZT.
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11 Again using the ZERO potentiometer, adjust the PZT output voltage as follows:
For HV amplifiers: set voltage to approx. -50 V
For LV amplifiers: set voltage to approx -5 V
The zero-point setting is now close enough to allow checking of the PZT output
range
12 Check the PZT output range by applying a voltage which goes from 0 V to +10
V to the CONTROL INPUT and watching the voltage at PZT socket in parallel
with the PZT.
a) If the output voltage ranges from -10 V to +100V, then zero-point
adjustment is finished.
b) If the output voltage exceeds the range from -10 V to +100 V, the
zero point should be shifted so that the PZT-output voltage range is
in the center of the amplifier output range. For this purpose, return
the control input to 0 V and repeat step 11 using a slightly different
value, e.g. -10 V for an LVPZT.
X
X
Example: Assume the LVPZT used requires 90 V to achieve the nominal
displacement of 100 µm. Furthermore take into account that the
maximum voltage at the LVPZT should not exceed +100 V in order to
maintain a long lifetime. The E-503/E-505 LVPZT amplifiers have an
output range from -20 V to +120 V.
In this case, the zero position PZT voltage can be set within the range
from -10 V to +10 V. Then, the nominal displacement of 100 µm will be
reached with PZT out in the +80 V to 100 V range., i.e. there is a
cushion of ±10 V available to keep the amplifier from clipping the
output when the controller is within the nominal servo-control range.
4.1.3.
!
Second Order Polynomial Linearization (cap sensor versions only)
The capacitive sensor electronics on the E-509.CxA and E-509.Ex versions
includes a trim pot (ILS) for minimizing second-order polynomial non-linearity. To
adjust the ILS proceed as follows:
1
Before powering up the system, make sure the PZT actuator is mounted in the
same way and with the same load as during normal operations in the
application. In multi-axis systems, make sure the PZTs are always connected
to the same controller modules.
2
Mount an external gauge to measure the PZT displacement. Only if the
external measurement system offers higher precision than the capacitive
sensor can the maximum performance be achieved. With PZT power amplifier
powered down, the external gauge should read 0; if it does not, note the offset
and subtract it from subsequent readings.
CAUTION—Electrostatic Hazard
Modular Boards Subject to Damage
T
Electronic components are sensitive to electrostatic electricity. Take appropriate electrostatic
protection measures when installing or removing boards or working on an open controller.
3
Remove the E-509 from the chassis and reconnect through the extension
bracket (not included). To remove the module, proceed as follows:
a) Loosen the two Phillips screws on the front panel.
b) Using the grip at the bottom of the front panel, pull the module out of
the chassis.
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E-509 Position Servo-Control Module
4
Scan the voltage at CONTROL INPUT from 0 V to +10 V and read the PZT
displacement using an external gauge.
5
Adjust the Integrated Linearization System (ILS) by turning the ILS
potentiometer (see Fig. 9, p. 25) and observe the linearity of the PZT
displacement.
X
4.1.4.
User Manual PZ 77E
X
X
X
Static Gain Adjustment
It should only be necessary to readjust the static gain if system components have
been exchanged or altered. Before doing so, reading the detailed description of the
sensor-processing system is recommended (for SGS and LVDT the E-801 Sensor
Submodule User Manual, for capacitive sensors the manual or technical note
covering the sensors.
The objective of static gain adjustment is to ensure that the PZT actuator expands
to its nominal expansion when a control signal input of 10 V is applied (amplifier
module DC-offset set to 0).
The zero-point must be appropriately set before the static gain adjustment can be
done. This is an iterative process.
The static gain adjustment procedure is as follows:
!
1
Before powering up the system, make sure the PZT actuator is mounted in the
same way and with the same load as during normal operations in the
application. In multi-axis systems, make sure the PZTs are always connected
to the same controller modules.
2
Mount an external gauge to measure the PZT displacement. (with PZT power
amplifier powered down, the external gauge should read 0; if it does not, note
the offset and subtract it from subsequent readings)
CAUTION—Electrostatic Hazard
Modular Boards Subject to Damage
T
Electronic components are sensitive to electrostatic electricity. Take appropriate electrostatic
protection measures when installing or removing boards or working on an open controller.
3
Remove the E-509 from the chassis and reconnect through the extension
bracket (not included). To remove the module, proceed as follows:
a) Loosen the two Phillips screws on the front panel.
b) Using the grip at the bottom of the front panel, pull the module out of the
chassis.
4
Decide whether you want to calibrate in computer-controlled mode (online) or
in "analog" mode (offline). Online and offline operation must not be mixed
during calibration. If you choose offline operation, set any computer interface
module (e.g. E-516 or E-517) to "offline". The following steps describe offline
operation—if you choose online operation, use computer commands in place of
the control voltage and DC-offset to command voltages and position (you do
not need an external voltage source for computer-controlled calibration).
5
Set the corresponding switch on the E-509 front panel to Servo OFF.
6
Make sure the DC-Offset potentiometer on amplifier module is set to zero (full
counterclockwise).
7
Power up the system. Make sure that any computer-control module is
consistent with the servo OFF state.
Release 2.8.4
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E-509 Position Servo-Control Module
8
Scan the voltage at CONTROL INPUT from 0 V to +10 V and read the PZT
displacement using the external gauge. With +10 V the external gauge should
show the PZT at about nominal expansion. Adjust with the sensor gain trim
potentiometer (Fig. 6). Sensor gain is now close enough to allow switching
servo ON.
X
9
User Manual PZ 77E
X
Switch servo ON.
10 Adjust the sensor monitor signal to exactly 10.000 V using the gain adjustment
potentiometer on the E-802 servo submodule (different versions of this
submodule exist, see the E-802 User Manual for gain adjustment on your unit)
11 Adjust the PZT position to the nominal expansion value using the sensor gain
adjustment (Fig. 6) from step 8. Now, because servo ON, the sensor monitor
value will not change!
X
X
X
X
12 Repeat the last two steps until you get stable readings
If the Gain settings have been changed, the zero-point adjustment starting with
section 4.1.2 should be repeated, and then the static gain rechecked.
X
X
Sensor gain adjustment
SGS and LVDT Versions
Capacitive Sensor Versions
C
Fig. 6: Sensor gain adjustment location
4.2.
Dynamic Calibration
Dynamic performance of the PZT system is determined by the maximum output
current of the amplifier and by the mechanical properties of the PZT mechanics,
like moving mass, damping and resonant frequencies. Dynamic calibration
optimizes step response and suppresses resonance, overshoot, and oscillation.
These servo-loop, notch filter and slew-rate limitation setting procedures are all
described in detail in the E-802 Servo-Control Submodule User Manual.
4.3.
Adjustment for Systems with E-509.Ex PISeca™ Models
4.3.1.
Calibrated System
Calibration routine ensures linearity of the output signal over the measurement
range within the specified linearity for the calibrated range setting. The linearity
error of a measurement is the maximum deviation of the output from a straight line
between minimum and maximum output.
If ordered together, a PISeca™ single-electrode, capacitive measurement system
consists of the sensor probe (D-510 series), the signal conditioner electronics (E509.Ex) and connecting cables. This system is calibrated together at PI and
shipped with a corresponding calibration sheet. During calibration, the
measurement range and bandwidth are preset to the appropriate values.
In the calibrated range the minimum probe-to-target gap equals 50% and the
maximum gap 150% of the measurement range value.
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E-509 Position Servo-Control Module
User Manual PZ 77E
If not ordered otherwise, the following settings are used for calibration (see p. 27
for different settings and location of the adjustment elements):
X
Bandwidth
3 kHz
Sensor output voltage
range
0 to 10 V
Measurement range
Standard extension range factor of
1 used for calibration; resulting
range depends on nominal range
of the sensor probe
Environmental
conditions
Room temperature 22°C
Parallelism probe
surface to target surface
Tilt < 700 µrad
X
Fig. 7: Definitions: due to the system design, the numerical values of mid-range
(working) distance and measurement range are the same
NOTE
The zero point for the output voltage given by the electronics may differ up to 10% for different
specimen of the E-509.Ex. Thus the mid-range distance may vary from the electronic zero point
by up to 10%.
See calibration sheet for details.
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E-509 Position Servo-Control Module
4.3.2.
User Manual PZ 77E
Sensor Monitor Signal
For each sensor channel, the sensor monitor signal available on the E-509.Ex front
panel indicates the gap size between target surface and sensor probe, known as
the probe-to-target gap. The sensor monitor signal can be used to adjust target
and probe (see Section 4.3.3 below for how to proceed).
X
X
Fig. 8: Relation of sensor (monitor) signal and measurement range
The linearity specified in the datasheet is only valid for the measurement range
setting with which the system was calibrated (default extension factor = 1). The
system is calibrated in such a way that the minimum monitor voltage is output
when the minimum gap is reached and the maximum monitor voltage when the
upper gap limit is reached. The default range of the sensor output and hence of the
monitor signal is 0 to 10 V. See p. 27 for different measurement and sensor output
range values.
X
X
If the sensor monitor signal is outside of the valid sensor output range, the
measurement is outside the calibrated range, and the specified linearity is no
longer assured.
NOTE
Differing from the standard, sensor probes D-510.020 covering a nominal measurement range
of 20 µm are calibrated for 15 to 30 µm. Nevertheless, the sensor monitor signal covers the full
range (10 to 20 µm).
4.3.3.
How to Adjust Target and Probe
Do not interchange signal conditioners, connecting cables and/or sensor probes
after they have been calibrated together. The probe ID serial number is noted on
labels affixed to the connecting cable and to the signal conditioner. Proceed as
follows to adjust target and probe for a PISeca™ sensor channel.
Preparation, optionally, requires removing the E-509.Ex module from the chassis
(see p. 27 for details):
X
X
1. Check the setting for the sensor output range (and hence the range of the
sensor monitor signal). See p. 27 for details. Default range is 0 to 10 V
X
X
2. Check the setting for the measurement range extension factor. Default factor is
1
3. Check the polarity setting for the sensor output. See p. 27 for details. Default
polarity is positive
X
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Page 21
E-509 Position Servo-Control Module
User Manual PZ 77E
Adjustment procedure, valid with default settings for sensor output range,
measurement range and polarity:
1.
Mount sensor probe as described in the Technical Note D510T0001. Note that
the minimum allowable probe-to-target gap is 10 µm. A minimum gap of 15 µm
is recommended
2.
Turn the corresponding Zero potentiometer fully counterclockwise
3.
Adjust sensor probe and target so that the gap is equal to the nominal
measurement range (e.g. with D-510.050 = 50 µm). The sensor monitor signal
then must be approx. 0 V
4.
Adjust the Zero potentiometer so that the sensor monitor signal is approx. 5 V
5.
Reduce the gap between sensor probe and target so that it is half the nominal
measurement range (e.g. with D-510.050 = 25 µm). The sensor monitor signal
should then be 0 V
6.
Enlarge the gap between sensor probe and target so that it is 1.5 times the
nominal measurement range (e.g. with D-510.050 = 75 µm). The sensor
monitor signal should now be 10 V
NOTE
When the sensor output voltage range selection is changed, the voltage value may be up to 2%
different from the expected value.
5. Disposal
In accordance with EU directive 2002 / 96 / EC (WEEE),
as of 13 August 2005, electrical and electronic equipment
may not be disposed of in the member states of the EU
mixed with other wastes.
To meet the manufacturer’s product responsibility with
regard to this product, Physik Instrumente (PI) GmbH &
Co. KG will ensure environmentally correct disposal of
old PI equipment that was first put into circulation after 13
August 2005, free of charge.
If you have such old equipment from PI, you can send it to the following address
postage-free:
Physik Instrumente (PI) GmbH & Co. KG
Auf der Römerstr. 1
76228 Karlsruhe, Germany
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E-509 Position Servo-Control Module
User Manual PZ 77E
6. E-509 Technical Data
E-509.C1A /
E-509.C2A /
E-509.C3A
E-509.L1 /
E-509 L3
E-509.S1 /
E-509.S3
E-509.E3
E-509.E03
Function
Sensor
electronics and
position servocontroller
Sensor
electronics and
position servocontroller
Sensor
electronics and
position servocontroller
Sensor
electronics and
position servocontroller
Sensor
electronics only,
no servo
Number of axes
1/2/3
1/3
1/3
3
3
Sensor
Servo characteristics
P-I (proportional- P-I (proportional- P-I (proportional- P-I (proportional- none
integral; analog) integral; analog) integral; analog) integral; analog)
+ notch filter
+ notch filter
+ notch filter
+ notch filter
Sensor type
2-plate
capacitive
LVDT
Strain gauge
PISeca™ single- PISeca™ singleplate capacitive plate capacitive
Sensor channels
1/2/3
1/3
1/3
3
Measurement range
extension
0.56, 0.68, 0.75,
1.0 (default),
1.25, 2.13, 3
1 (default), 2, 2.5 1 (default), 2, 2.5
&5
&5
Sensor bandwidth
0.3 to 3 kHz,
jumper settable;
up to 10 kHz on
request
0.3 to 10 kHz,
jumper settable
0.3 to 10 kHz,
jumper settable
Noise factor 4
0.115 ppm/√Hz
see note 5
0.14 ppm/√Hz
see note
0.14 ppm/√Hz
see note
possible
possible
< 1 mV/C°
< 1 mV/C°
TPF
FPT
TPF
FPT
Ext. synchronization
possible
Temperature drift
-30 ppm/C° see
note 6
TPF
3
X5X
n.a.
FPT
7
Static resolution
<0.001%
Dynamic resolution
<0.0025%
Linearity @ nominal
range
X5X
Linearity error <
0.1% 8
TPF
TPF
<0.001%
FPT
X7X
<0.1%
X7X
<0.0025%
<0.1%
TPF
X7X
9
FPT
FPT
Interface and
operation
Rear connector
32-pin connector, 32-pin connector, 32-pin connector, 32-pin connector, 32-pin connector,
DIN 41612
DIN 41612
DIN 41612
DIN 41612
DIN 41612
Sensor output
0 – 10 V 10
Sensor output
impedance (DC)
100 k-ohm
4
TP
FPT
0 V – 10 V
X10X
0 V – 10 V
X10X
0 V – 10 V
X10X
0 V – 10 V
X10X
Values measured with reference capacitor and 1m cable length
In nominal measurement range
PT
5
TP
TPF
PT
6
ppm (parts per million), relative to full measurement range
Bandwidth: static 300 Hz, dynamic 3 kHz
8
Values are measured with capacitive sensor D-100.00.
9
Linearity over nominal range with D-510.020 in 1.0 range extension is 0.2%
TP
PT
7
TP
PT
PT
TP
TP
PT
P
10
P
Can be shifted and/or inverted to -10 to 0 V or -5 to +5 V for special applications
Release 2.8.4
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E-509 Position Servo-Control Module
E-509.C1A /
E-509.C2A /
E-509.C3A
Sensor connector
E-509.L1 /
E-509 L3
User Manual PZ 77E
E-509.S1 /
E-509.S3
E-509.E3
E-509.E03
LEMO
LEMO
LEMO
LEMO
LEMO
EPL.00.250.NTD ERA.0S.304.CLL ERA.0S.304.CLL ECP.00.650.NLL ECP.00.650.NLL
see note 11
see note
.543 Triax
.543 Triax
TPF
Sensor monitor
0 V – 10 V
X10X
FPT
0 V – 10 V
X10X
X11X
0 V – 10 V
X10X
0 V – 10 V
X10X
0 V – 10 V
X10X
Sensor monitor output 10 k-ohm
impedance (DC)
Sensor monitor socket LEMO 6-pol.
FGG.0B.306.CL
AD56
BNC /
BNC /
LEMO 6-pol.
ERA.05.303.CLL ERA.05.303.CLL FGG.0B.306.CL
AD56
LEMO 6-pol.
FGG.0B.306.CL
AD56
Linearization
ILS
ILS
ILS
ILS
Target ground
connector
LEMO
EPL.00.250.NTD
banana socket
banana socket
+5 bis +40 °C
+5 bis +40 °C
ILS
Miscellaneous
Operating temperature +5 bis +50 °C
range
+5 bis +50 °C
+5 bis +50 °C
Dimensions
Euroboard, one 7 Euroboard, one 7 Euroboard, one 7 Euroboard, one 7 Euroboard, one 7
T slot wide, 3 H T slot wide, 3 H T slot wide, 3 H T slot wide, 3 H T slot wide, 3 H
high
high
high
high
high
Mass
0.2 / 0.25 /
0.35 kg
0.2 / 0.35 kg
0.2 / 0.35 kg
0.3 kg
0.3 kg
±15 V
±15 V
±15 V
±15 V
±15 V
Operating voltage 12
TPF
11
TP
PT
TP
12
PT
FPT
This signal also on DIN 41612 32-pin rear connector
Requires E-530/E-531 power supply (as in compatible PI chassis, e.g. E-500/E-501)
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E-509 Position Servo-Control Module
6.1.
User Manual PZ 77E
Two-Plate Cap. Sensor on-board Sensor Processing
The E-509.CxA versions have the sensor processing on the main board.
The adjustment elements affecting sensor processing which are described in this
section are for use only if the controller/actuator configuration is changed or
elements are replaced. Do not hesitate to consult with PI before proceeding with
calibration procedures. See also the “E-509 Calibration Routines” section on page
15.
X
X
X
X
Note that the zero adjust trim potentiometers (TRx02) are accessible through the
front panel (ZERO; see Fig. 3 on page 9). Adjustment of other elements involves
removing the module from the chassis.
X
X
X
X
Fig. 9: E-509.C3A Layout showing location of sensor processing adjustment
elements.
Note: Numbering of jumpers and potentiometers is channel-specific: “x” can be 1,
2 or 3 depending on the channel number.
6.1.1.
Adjustment Potentiometers:
TRx01:
Sensor gain
TRx02:
Zero, accessible through front panel
TRx03:
Linearization (ILS)
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E-509 Position Servo-Control Module
6.1.2.
User Manual PZ 77E
Jumpers and On-Board Switch
JPx01–JPx06:
Code Selection for measurement range, see table below:
Default setting: 1.0
factor of extention
of measurement range
no
measurement
0.56
0.68
0.75
1.0
1.25
2.13
JPx06
JPx05
JPx04
JPx03
JPx02
JPx01
Jumper
Position
Dwg: code.wmf
JPx07:
Output Polarity Setting: positive / negative
Default setting: positive
_
_
+
+
Positive
Negative
Position of the Jumper
JP107,JP207,JP307
Polarity of Output
JPx08 and JPx09: Output Offset setting:
Default setting: 0 V ~ 10 V
For stable measurements, the front-panel zero potentiometer should be set to
either CW or CCW end position. Select the desired offset by setting the jumpers.
Switch SWx01:
Bandwidth Setting
Default setting: 1500Hz (position C)
Note:
All numbers for jumpers and switches refer to channel 1, channel 2 or
channel 3.
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E-509 Position Servo-Control Module
User Manual PZ 77E
Jumper Settings for Master and Slave
On systems with multiple E-509s or another timing source, the excitation
frequencies are synchronized by the appropriate use of jumpers for master and
slave.
JP1 and JP2 both set to same side:
left=Master, right=Slave
Default setting: SLAVE
Fig. 10: Capacitive sensor versions Master/Slave jumper setting (upper right of
board); see Fig. 16 for signal routing
X
Note:
X
In SLAVE position the internal clock is disabled, i.e. an external clock
(such as that in an E-516 or E-517 Display Module) is required. If an
external clock is not available, the jumpers must be set to MASTER.
Attention: If an external clock is used while the jumpers are set at MASTER, there
may be interference. If that occurs, check for the correct jumper settings.
6.2.
Single-Plate Cap Sensor on-board Sensor Processing
The E-509.E3 and E-509.E03 versions for use with PISeca™ single-plate
capacitive sensors also have the sensor processing on the main board.
The adjustment elements affecting sensor processing which are described in this
section are for use only if the controller/actuator configuration is changed or
elements are replaced. Do not hesitate to consult with PI before proceeding with
calibration procedures. See also the “E-509 Calibration Routines” section on page
15.
X
X
X
X
Note that the zero adjust trim potentiometers (TRx02) are accessible through the
front panel (ZERO; see Fig. 3 on page 9). Adjustment of other elements involves
removing the module from the chassis.
X
!
X
X
X
CAUTION—Electrostatic Hazard
Modular Boards Subject to Damage
T
Electronic components are sensitive to electrostatic electricity. Take appropriate electrostatic
protection measures when installing or removing boards or working on an open controller.
Release 2.8.4
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E-509 Position Servo-Control Module
User Manual PZ 77E
Fig. 11: E-509.E3 and E-509.E03 layout (“x” in jumper designations stands for
channel number: 1,2 or 3)
6.2.1.
Adjustment Potentiometers:
Note: Numbering of some jumpers and potentiometers is channel-specific: “x” can
be 1, 2 or 3 depending on the channel number
TRx01:
Sensor gain
TRx02:
Zero, accessible through front panel
TRx03:
Linearization (ILS)
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E-509 Position Servo-Control Module
6.2.2.
User Manual PZ 77E
Jumpers and on-board Switch
JP101, JP110 and JP111: Measurement Range Extension Factor
Together these jumpers determine the factor applied to the measurement range.
Supported are settings for 1 (default), 2, 2.5 and 5 times the standard range of the
sensor head used. Corresponding settings are shown in Fig. 11.
X
X
Switch SWx01: Sensor bandwidth setting
Standard values are 300 Hz, 3 kHz (default) or 10 kHz; corresponding positions
show in Fig. 11.
X
X
JP1 & JP2: Master and Slave (Internal / External Clock)
Both jumpers must be set to the same side (one enables/disables the internal
clock, the other routes the clock signal). Default setting is SLAVE, i.e. to the right,
shorting 2-3, as shown in Fig. 11.
X
X
In SLAVE position an external clock (such as that in an E-516 or E-517
Display Module) is required. If an external clock is not available, the
jumpers must be set to MASTER. If an external clock is used while the
jumpers are set at MASTER, there may be interference. If that occurs,
check for the correct jumper settings.
Note:
JP107: Polarity
If JP107 is set to negative, the output signal is inverted; if SERVO-CONTROL OUT
(Fig. 4) is to be used by standard PI electronics this will not be necessary.
X
X
JP108, JP109: Output Offset
Supported sensor output ranges are 0 to 10V (default, should be used with
standard applications), -5 to +5 V and -10 to 0 V. Settings shown in Fig. 11.
X
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Page 29
E-509 Position Servo-Control Module
User Manual PZ 77E
7. Pin Assignments
7.1.
32-Pin Main Connector, DIN 41612
7.1.1.
LVDT and SGS 3-Channel
(E-509.S3, E-509.L3)
Pin No.
Function
Pin No.
Function
2a
4a
6a
8a
10a
12a
14a
16a
18a
20a
22a
24a
26a
28a
30a
32a
GND
internal use
IN: +15 V
IN: -15 V
Sync LVDT+**
internal use (Bus_A)
OUT: Display ch2
internal use (Bus_B)
internal use (BUS_Vcc)
IN: Control ch1
IN: Control ch3*
Sync CAP-ref
IN: VC/EC ch2
OUT: Overflow ch1
OUT: Overflow ch3*
GND
2c
4c
6c
8c
10c
12c
14c
16c
18c
20c
22c
24c
26c
28c
30c
32c
GND
OUT: ch1 (control)
IN: +15 V
IN: -15 V
Sync LVDT-**
OUT: ch2 (control)
OUT: Display ch1
OUT: Display ch3*
internal use (BUS_GND)
OUT: Control ch3*
IN: Control ch2
Sync CAP input
IN: VC/EEC ch1
IN: VC/EC ch3*
OUT: Overflow ch2
GND
** LVDT signals meaningless on SGS versions
Note: Pins labeled with "nc" may be used internally and must not be connected externally.
7.1.2.
LVDT and SGS 1-Channel Versions (E-509.S1, E-509.L1)
Pin No. Function
Pin
No.
Function
2a
4a
6a
8a
10a
12a
14a
2c
4c
6c
8c
10c
12c
14c
GND
OUT: ch1 (control)
IN: +15 V
IN: -15 V
Sync LVDTnc
OUT: Display ch1
GND
internal use
IN: +15 V
IN: -15 V
Sync LVDT+
internal use (Bus_A)
nc
16a
internal use (Bus_B)
16c
nc
18a
internal use (BUS_Vcc)
18c
internal use (BUS_GND)
20a
IN: Control ch1
20c
nc
22a
nc
22c
nc
24a
Sync. CAP-ref
24c
Sync.CAP-input
26a
nc
26c
IN: VC/EEC ch1
28a
OUT: Overflow ch1
28c
nc
30a
nc
30c
nc
32a
GND
32c
GND
Note: Pins labeled with "nc" may be used internally and must not be connected externally.
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E-509 Position Servo-Control Module
7.1.3.
User Manual PZ 77E
Capacitive Sensor Versions
(E-509.C1A, E-509.C2A, E-509.C3A, E-509.E3, E-509.E03)
Function on
Pin No.
.C3A, .Ex**
.C2A
.C1A
*
2a
GND
*
4a
n.c.
*
6a
+ 15 V
*
8a
- 15 V
*
10a
n.c.
*
12a
internal use
14a
16a
Function on
Pin No.
.C3A, Ex**
.C2A
.C1A
2c
GND
*
4c
Control signal
output CH1
*
*
6c
+ 15 V
*
*
*
8c
- 15 V
*
*
*
10c
n.c.
*
*
*
*
12c
Control signal
output CH2
*
n.c.
Display CH2
*
n.c.
14c
Display CH1
*
*
internal use
*
n.c.
16c
Display CH3
n.c.
n.c.
18a
internal use
n.c.
n.c.
18c
internal use
*
*
20a
Control signal
input CH1
*
*
20c
Control signal
output CH3
to
JP210,
pin 1
n.c.
22a
Control signal
input CH3
to
JP210,
pin 2
n.c.
22c
Control signal
input CH2
*
n.c.
P
P
P
P
*
P
*
P
P
P
*
24a
n.c.
*
*
24c
SYNC
*
*
26a
Servo
ON/OFF,ch2
*
n.c.
26c
Servo ON/OFF,
ch1
*
*
28a
overflow CH1
*
*
28c
Servo
ON/OFF,ch3
n.c.
n.c.
30a
overflow CH3
n.c.
n.c.
30c
overflow CH2
*
n.c.
32a
n.c.
*
*
32c
n.c.
*
*
* Same as on E-509.C3A
** E-509.E03 has no servo-controller and hence all servo-related pins are not connected
n.c. : No Connection: may be used on the backplane and must not be connected.
JP210 shorted on E-509.C2A (default): connects CH3 input to CH3 output (i.e. CH3 bypassed)
7.2.
SENSOR-MONITOR Output
7.2.1.
Capacitive sensor versions:
LEMO Connector (FGG.0B.306.CLAD56), 6-pin
pin 1
ch1+
pin 2
ch1pin 3
ch2+
pin 4
ch2pin 5
ch3+
pin 6
ch3shield:
GND
Fig. 12 Six-pin
LEMO sensor
monitor socket
Each capacitive sensor version (E-509.CxA, E-509.Ex) comes with the D-893.32
Sensor-Monitor cable (2m). The purpose of this cable is simply to split up the SENSOR
MONITOR output signal (6-pin LEMO, EGG.0B.306.CLL) onto three separate BNC
connectors. The BNC connectors are each labeled with the channel number.
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E-509 Position Servo-Control Module
7.2.2.
User Manual PZ 77E
Three-channel SGS- and LVDT-sensor versions (E-509.S3, E-509.L3):
The SENSOR MONITOR socket (LEMO) on the front
panel also carries the signals from all three channels.
Each (E-509.S3, E-509.L3, E-509.S3S) comes with
the E-808.90 Sensor-Monitor cable. The purpose of
this cable is simply to split up the SENSOR
MONITOR output signal (LEMO) for the three
channels.
Fig. 13: Three-pin LEMO
sensor monitor socket
The leads of this open-ended cable are color coded:
white = channel 1,
brown = channel 2,
green = channel 3,
shield = GND.
7.2.3.
Single-channel SGS- and LVDT-sensor versions (E-509.S1, E-509.L1)
With single-channel SGS- and LVDT-versions a standard BNC cable can be used.
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User Manual PZ 77E
7.3.
Sensor Connections
7.3.1.
Connection of Strain Gauge Sensors
For more details or when replacing actuators, see the E-801 Sensor Submodule
User Manual.
Fig. 14: Strain gauge sensor wiring for various actuators
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7.3.2.
User Manual PZ 77E
Connection of LVDT Sensors
Sensors working on the principle of LVDTs usually have a coil with a primary
winding, two secondary windings and a moving core. If an AC current is applied to
the primary winding, it produces a magnetic field which is concentrated by the soft
iron or ferrite core. The magnetic field then passes through the two secondary
windings and induces a voltage in each. If the core is moved from the central
position, one secondary winding receives more magnetic flux than the other and
the induced voltages are different—proportional to the movement. LVDT
transducers normally operate at 3 to 5 Vrms, at frequencies between 1 and 20
kHz, and have a typical current consumption between 10 and 50 mA.
The output signal from an LVDT can be expressed as a sensitivity in mV output
voltage per volt of supply voltage and per millimeter displacement. Typical LVDT
output sensitivity is in the range of about 100 to 250 mV/V·mm, depending on the
type.
LVDTs have to be used in conjunction with E-509.Lx versions, which are equipped
with the E-801.2x AC sensor submodules.
Dwg.: QAFP-003.hgl
Fig. 15: LVDT Pin Configuration
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E-509 Position Servo-Control Module
7.3.3.
User Manual PZ 77E
Connection of 2-Plate Capacitive Sensors
The sensor probe and target plates form a air-capacitor. Its capacitance value,
depending on the separation of the both plates, is compared with an internal
reference capacitor of Cr=10 pF. Changes of the distance d between the two plates
cause a change in capacitance and the resulting signal is related to the deviation
from the nominal distance d0.
B
B
B
B
At the nominal distance, the capacitance of the sensor equals the capacitance of
the internal reference capacitor. The resulting output voltage Uout is 0 V (with
standard setting), which can be monitored at the 'SENSOR-MONITOR' output at
the front panel.
B
B
Uout = (10 V) ((d/d0) - 1)
B
B
B
B
If the distance of the sensor plates becomes smaller, the monitor signal falls
negative and will reach -5 V at the closest sensor position, which is 50% of the
nominal range (d=0.5d0). At the maximum separation of the sensor plates, at 150%
of the nominal range (d=1.5d0), the monitor signal reaches +5 V.
B
B
B
B
Fig. 16: Two-plate capacitive sensor version sensor processing and sync signals
The PROBE plate has a brown cable or is labeled with "P".
The TARGET plate has a yellow cable or is labeled with "T".
Connect the PROBE plate with the "PROBE" connector and the TARGET plate
with the "TARGET" connector.
NOTE
A capacitive sensor consists of a matched pair of one PROBE and one TARGET plate. The pair
used to tune the E-509 module to best performance should also be used in the application. For
highest precision, you should not mix up different probes and targets.
If you switch the PROBE and TARGET, the sensor system will work, but results will not be as
accurate as specified
For more details on capacitive sensors see the Capacitive Sensor User Manual.
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E-509 Position Servo-Control Module
7.3.4.
User Manual PZ 77E
Connection of Single-Plate PISeca™ Capacitive Sensors
The E-509.E3 and E-509.E03 have the triaxial sockets required to connect with
PISeca™ single-plate capacitive sensors. The sensor cable carries the sensor
signal surrounded by an active shield, all inside a grounded shield. The conductive
reference plane is electrically connected to the unit on a separate cable via a
banana jack.
See Section 4.3 on p. 19, the Appendix below and the documentation provided
with the PISeca™ sensor heads for mounting and performance details.
X
X
X
X
8. Appendix—Single-Plate PISeca™ Capacitive Sensors
8.1.
Measuring Principle
The measuring principle of a capacitive dimensional measurement system is
based on the function of an ideal parallel-plate capacitor. The sensor probe
surface and the conductive target surface form the two plate electrodes.
The measurement itself is a measurement of the capacitance between sensor
probe and target surface, which is directly proportional to the change in the gap.
Fig. 17: Circuitry principle for single-electrode capacitive measurement. For the
nominal range, Cref is 5 pF
The PISeca™ sensor probes feature a special guard electrode that guarantees the
homogeneity of the electric field by protecting it from outside influences.
Fig. 18: Capacitive sensor working principle. The capacitance C is proportional to
the active area A, Ɛ 0 is constant, Ɛ r is the dielectric constant of the material
between the plates, generally air
B
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B
B
B
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E-509 Position Servo-Control Module
8.2.
User Manual PZ 77E
Measurement Range
The measurement range depends on the size of the active sensor area as well as
on the electronics used.
Fig. 19: Definitions: measurement range and mid-range distance have identical
values
Due to PI’s proprietary signal conditioner electronics design, the mid-range
distance is always identical to the selected measurement range. The probe-totarget gap may vary from 50% to 150% of the measurement range.
The sensor capacitance is the same as that of the reference capacitance in the
electronics (see Fig. 17 on p. 36). For the nominal range, Cref is 5 pF. Different
reference capacitances can be used to extend the nominal (standard)
measurement range.
X
X
X
X
B
B
The measurement range is the range for which the sensor can be calibrated for
linear operation (see p. 38). The measurement range depends on the sensor area:
the larger the area, the larger the possible range.
X
X
With the same sensor size, the measurement range can be changed using the
measurement extension range factor (default factor = 1, see p. 27 for details). The
sensor resolution at different measurement extension range factors will be
different.
X
8.3.
X
Bandwidth
Electronic noise and sensor signal bandwidth are interdependent. Limiting the
bandwidth reduces noise and thereby improves resolution. The mid-range distance
also influences the resolution: the smaller the mid-range distance of the system,
the lower the absolute value of the electronic noise.
A low-bandwidth setting removes unwanted high-frequency noise and ensures the
best possible resolution.
For high-dynamics applications, however, the bandwidth can be set up to 10 kHz.
8.4.
Linearity
The linearity of a measurement denotes the constancy of the proportion between
the change in probe-target distance and the change in output signal. Usually
linearity is given as linearity error in percent of the full measurement range. A
linearity error of 0.1% with range of 100 µm means a maximum error of 0.1 µm.
Linearity error has no influence whatsoever upon resolution and repeatability of a
measurement.
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User Manual PZ 77E
Linearity is influenced to a high degree by the homogeneity of the electric field and
thus by any non-parallelism of the probe and target in the application. PI capacitive
position sensor electronics incorporate a proprietary design providing superior
linearity, low sensitivity to cable capacitance, low background noise and low drift.
The Integrated Linearization System (ILS) compensates for non-parallelism
influences.
Linearity of the electronics output is optimized during the calibration procedure
performed at PI (ILS adjustment).
The smaller the sensor heads the more adverse influences on linearity are caused
by poor parallelism between sensor probe and the target plane. See Technical
Note D510T0001 for details.
Replacing one or more parts of a calibrated system may worsen the linearity.
8.5.
Target Plane
The PISeca™ system measures changes in capacitance between the sensor
probe and a conductive, grounded target surface. The target or structure under
test should provide a noise-free, low-impedance return path. To verify that a proper
return path is present, connect a ground lead directly from the target to the
corresponding Sensor Gnd ground connector on the E-509.Ex module.
The surface structure of the target has a strong influence on linearity of the
system. The target area size must be considerably larger than the sensor area (by
at least 50%).
Motion of the connecting cable should be avoided. Thus, the sensor probe should
always be the part at rest and the target the moving part.
Target and sensor surfaces must be clean and free from contaminants. It is
recommended that the surface has a quality of N4 and better to guarantee
optimum performance.
Measurement against a grounded semi-conductor is also possible.
8.6.
Terminology
Measurement range: the range over which measurements can be performed. The
actual measurement range depends on the sensor probe size, the extension factor
set with the jumpers JPx10, JPx11 and JPx01 (see p. 29) and whether or not the
unit was ordered with the standard (1) or with the alternative (2x, 2.5x or 5x)
measurement extension factors active.
X
X
Nominal measurement range: as defined in the technical data of the sensor
probe, e.g. D-510.050 has a nominal measurement range of 50 µm. Difference
between minimum and maximum probe-to-target gap.
Extended measurement ranges: the measurement range extension factor (as
specified in the technical data for the sensor electronics) multiplied by the nominal
measurement range gives the value for the extended measurement range. The EE-509.Ex provides different extended measurement ranges, e.g. with a D-510.050
the nominal range is 50 µm, the extended measurement ranges are 100, 125 and
250 µm
Calibrated measurement range: a measurement range obtained with the
particular sensor, sensor cable and extension factor with which the system was
calibrated at the factory. Calibrated measurement ranges offer maximum accuracy
and linearity.
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User Manual PZ 77E
Measurement range extension factor: set by jumpers JPx10, JPx11 and JPx01
on the E-509.Ex module (see p. 29); if multiplied by the nominal measurement
range gives the extended measurement range
X
X
Gap: distance between sensor probe surface and target surface. In the calibrated
range the minimum probe-to-target gap equals 50% and the maximum gap 150%
of the measurement range value
Target area / target surface: denotes the surface against which the measurement
is performed. The target surface consists of a conductive material that is
connected to electrical ground
Mid-range distance: the distance from the center of the measurement range to
the target surface (see Section 8.2 on p. 37)
X
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X
X
X
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