D07- 9F D07- 9FM D07- 19F D07- 19FM Mass Flow Controller Mass Flow Meter INSTRUCTION MANUAL Version June 2013 A NOTE TO OUR CUSTOMERS Dear customer, Thank you for purchasing SEVENSTAR D07 series Mass Flow Controller and Mass Flow Meter product. This user manual is important when installing and doing maintenance. Please keep it carefully. We strongly recommend that you read this manual thoroughly before you starting to use the product. This user manual introduces the important issues including the proper and safe use of the products. And please notice the words and section with the symbol . Not in accordance with the user manual for the use of property caused by loss or personal injury, SEVENSTAR may not be responsible. If you require any additional information or assistant of Sevenstar D07 series Mass Flow Controller and Mass Flow Meter, please feel free to contact your local Sevenstar Sales Agent or Sevenstar Customer Service at: (8610)- 6436 2925. Yours sincerely, Sevenstar CONTENTS 1. APPLICATION & FEATURES……………. 1 5.2.2 Zero Test and Adjustment………………….. 20 2. SPECIFICATION………………………….. 3 5.2.3 Gas Supply…………………………………. 20 3. STRUCTURE & PRINCIPLE……………... 5 5.2.4 Shut Off……………………………………. 20 3.1 Structure……………………………………. 5 6. CAUTION…………………………………… 20 3.2 Operation Principle………………………… 6 6.1 Medium Forbidden …………………………... 20 INSTALLATION & CONNECTION …….. 8 6.2 Corrosive Gas ……………………………….. 20 4.1 Dimension………………………………….. 8 6.3 Valves Dynamic Sealing …………………….. 21 4.2 Fittings……………………………………… 11 6.4 Valves Operating ……………………………. 21 4.3 Electrical Interfacing……………………… 12 6.5 Installation Position ………………................. 21 4.4 PC Connection……………………………… 14 6.6 Operation Pressure Resistance………………. 21 4.5 Zero Adjustment……………………………. 17 6.7 Calibration and Conversion………………….. 21 5. OPERATION INSTRUCTIONS………….. 18 6.8 D07-9F,9FM Ordering Code….. …………… 22 5.1 MFC Operation…………………………….. 18 6.9 D07-19F,19FM Ordering Code….. ………… 25 5.1.1 Start Up…………………………………… 18 7. TROUBLESHOOTING…………………….. 28 5.1.2 Purge……………………………………… 19 8. WARRANTY & SERVICE………………….. 30 5.1.3 Readout Box & PC Connection…………... 19 8.1 Product Warranty…………………………….. 30 5.1.4 PC Connection……………………………. 19 8.2 Specific warranty requirements ……………… 30 5.1.5 Valves Control……………………………. 19 8.3 Service…………………..…………………… 30 5.1.6 Shut Off Operation……………………….. 20 9. APPENDIX…………………………….……. 31 5.2 MFM Operation…………………………….. 20 9.1 Mass Flow Conversion factors……………..... 31 5.2.1 Start Up ………………………………….. 20 9.2 Conversion factors Introduction....................... 33 4. MASS FLOW CONTROLLER & MASS FLOW METER Operating Instruction 1. APPLICATION & FEATURES Mass Flow Meter (MFM) accurately measures mass flow rates, Mass Flow Controller (MFC) accurately measures and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes. They are widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc. The typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation; vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. D07 series MFM & MFC bring the high accuracy, excellent repeatability, quick response, soft-start, better reliability, wide variety ranges of operation pressure (good operation in high pressure and vacuum situations), simple convenient operation, flexible installation, possible connecting with PC to carry out automatic control to the users’ system. D07-9F、D07-9FM、D07-19F and D07-9FM all use 24 VDC power supply, and they are better connected together with D08 series Readout Box, the cable connection is showing as following (Figure 1 and Figure 2): Page 1 of 33 Figure 1 D07-9F MFC and Readout Box Figure 2 D07-19F MFC and Readout Box Page 2 of 33 2. SPECIFICATION Table 1. Specifications of D07-9F & D07-19F MFC No. 1 Item Flow Ranges D07-9F D07-19F 0~20,30,50,100,150,200,250 SLM 0~5,10,20,30,50,100,200,300,500SCCM 0~1,2,3,5,10,20,30 SLM 2 Accuracy ±2 % F.S. ±1% F.S. (20,30SLM: ±2 % F.S.) 3 Linearity ±1% F.S. ±0.5 % F.S. (20,30SLM: ±2% F.S.) 4 Repeatability 5 Response-Time 6 Differential Pressure 7 Max Pressure 8 Operation Tem. 9 Input/Output Signal 10 Valve 11 Power Supply 12 Dimension 13 Weight Notes ±0.2 % F.S. ≤ 4 sec 20,30 SLM: 0.05~0.30 MPa (7.3~43.5 psid) ≤10SLM:(0.1~ 0.5)MPa(14.5~72.5 psid) 50~150SLM: 0.10~0.30 MPa (14.5~43.5 psid) 200,250SLM: 0.15~0.30 MPa (21.8~43.5 psid) 3 >10SLM:(0.1~0.3) MPa(14.5~43.5 psid) MPa (435.1 psig) 5 ºC ~ 45 ºC 4~20 mA or 1~5VDC N.C.Solenoid 24 VDC 400 mA According to Figure 6 2.6 kg According to Figure 8 1.2 kg : MFC/MFM is calibrated by N2 as a standard gas. Units: SCCM (Standard Cubic Centimeter/Min); SLM (Standard Liter/Min) Standard Situation: Tem — 273.15K ( 0 ºC ); Air Pressure — 101325 Pa (760mm Hg) F.S. : Full Scale Page 3 of 33 Table 2. Specifications of D07-9FM & D07-19FM MFM No. 1 Item Flow Ranges D07-9FM D07-19FM 0~5,10,20,30,50,100,200,300,500 SCCM 0~20,30,50,100,150,200,250 SLM 0~1,2,3,5,10,20,30 SLM 2 Accuracy ±2 % F.S. ±1% F.S. (20,30SLM: ±2 % F.S.) 3 Linearity ±1 % F.S. ±0.5% F.S. (20,30SLM: ±2% F.S.) 4 Repeatability 5 Response-Time 6 ±0.2 % F.S. ≤ 4 sec 20~100SLM: <0.02 MPa (2.9 Operation Pressure psid) >100SLM: <0.05 MPa <0.02 MPa (2.9 psid) (7.3 psid) 7 Max Pressure 8 Operation Tem. 9 Output Signal 10 Power Supply 11 Dimension 12 Weight 3 MPa (435.1 psig) 10 MPa (1450.4 psig) 5 ºC ~ 45ºC 4~20 mA or 1~5VDC 24 VDC According to Figure 7 1.5 kg 100 mA According to Figure 8 1.0 kg The main specifications could be found in table 1 and table 2. D07-9FM and D07-19FM is respectively the measuring part of D07-9F and D07-19F, the specifications of measuring parts are almost same. Page 4 of 33 3. STRUCTURE & OPERATION PRINCIPLE 3.1 Structure The MFM consists of flow sensor, flow-splitter bypass and flow amplifying circuit. If add Control valves and PID control circuit to MFM will compose a MFC. The following figures (Figure 3 and Figure 4) are exactly showing the structures of D07-9F MFC and D07-19F MFC after opening up their overall: Stand Electric Connector Locknut PCB Solenoid Zero control valve Sensor Inlet Outlet Base Figure 3. Structure of D07-9F MFC Other models structures are basically as same as showing in figure 3. D07-9FM MFM compared with D07-9F MFC, only is different of lacking solenoid control valve, other parts are almost same. For other more information please be advised by your salesmen. Page 5 of 33 Electric Connector Stand Locknut PCB Zero Solenoid control valve Sensor Inlet Outlet Base Figure 4. Structure of D07-19F MFC Other models structures are basically as same as showing in figure 4. D07-19FM MFM compared with D07-19F MFC, only is different of lacking solenoid control valve, other parts are almost same. For other more information please be advised by your salesmen. 3.2 Operation Principle According to the Capillary Heat Transfer Temperature Difference Calorimetry Theory, the flow sensor measures the mass flow without pressure compensation. The sensor heated the flow signal which was measured by electric bridge and amplified it through amplifier, the amplified flow testing voltage is compared with presetting voltage, the differential signal will control valve after amplified, then the flow rate of closed loop control will be as same as presetting flow rate. The bypass divider controls the flow rate. The corresponding D08 series Flow Readout Boxes have stabilized power supply, 3 and 1/2 digital voltage meter, presetting potentiometer, external & internal converters and three-phase switches. Figure 5 is exactly showing the operating principle while MFC is connecting Page 6 of 33 with Flow Readout Box. FLOW READOUT BOX +5V 100.0 Set V/I +24V EXT 4~20mA +1V Power ~220V 4~20mA INT Output Signal Common Power Common V/I MASS FLOW METER SET I/V MASS FLOW CONTROLLER OUT 1~5VDC Comparator Amplifier ON Drive I 24V Purge Auto Off OFF Sensor Valve Bypass INLET OUTLET Figure5. Principle of MFC The outputting flow testing signal from MFC is a direct ratio with the flow through the channels, flow outputting signal is 4~20mA (or 1~5VDC). The Flow control ranges of MFC is (2~100) %F.S., flow resolving power is 0.1% F.S.. Attention : When Valve controller of MFC is posited on position of “PURGE”, it can be functioned as a MFM. In that case, the maximum flow testing voltage could reach beyond +10V, please be careful, while flow is beyond F.S. +5V(Full Scale), the real flow will have no linearity corresponding with flow testing voltage. While it’s purging, flow display will be inaccurate, even showing “reduce” while the real flow is enhanced, please be sure it’ll be no damaged to device itself. Page 7 of 33 Operation control could accomplish by Flow Readout Box. When set point is turned on the “INT”, flow rate will be under controlled by the presetting potentiometer; when setpoint is turned on the “EXT”, flow rate will be controlled by set signal which is supplied by users. There are three valves control switches on the panel of D08 series Flow Readout Box: CLOSE, PURGE and AUTO. In case of CLOSE, Valves of MFC will shut off; in case of PURGE, Valve will open reach to the tip to purge the Gas systems or could be functioned as a MFM; when set to AUTO, Valve can control the flow rate automatically. 4. INSTALLATION & CONNECTION 4.1 Dimension Dimensions and installations are showing as following figure 6 to figure 8: Figure 6. Dimension of D07-9F MFC Page 8 of 33 Figure 7. Dimension of D07-9FM MFM Attention : The height (which is showing in figure 6 and figure 7) of 140mm are height without electric connectors of cable. It should be added around 50mm more after adding the electric connector. Page 9 of 33 Figure 8. Dimensions of D07-19F and D07-19FM Attention : The height (which is showing in figure 8) of 125mm are height without electric connectors of cable. It should be added around 50mm more after adding the electric connector. Page 10 of 33 4.2 Fittings Four models of external diameters connectors could be provided: Table3. Connectors & Dimensions of D07-9F、D07-9FM VCR Compression Fitting No MFC/MFM Model 1 D07-9F ○ ○ ○ ○ ○ 2 D07-9FM ○ ○ ○ ○ ○ 1/4" Φ6 Φ8 3/8" Φ10 Φ12 (≤60SLM) (≤60SLM) (≤200SLM) 1/2" 1/2" ○ ○ ○ ○ ○ ○ Note Mark"○" means could be selected, but each model only could be selected one connector type at a time. Table4. Connectors & Dimensions of D07-19F、D07-19FM Compression Fitting No MFC/MFM Model Φ3 Φ6 Φ8 Φ10 1/8" VCR 1/4" 3/8" 1/4" Rose Note Φ6 Φ4 （inner （inner ）×1 ）×1 1 D07—19F ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ 2 D07—19FM ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ Mark"○" means could be selected, but each model only could be selected one connector type at a time. Using standard Compression Fitting connectors, general speaking, stainless steel tube was used to connect MFC and Gas System, matching to the different request, other materials also could be used as nylon tube or hard flexible plastic hose. Figure 9 is an example to showing the fitting structure, please be careful, the flow input & output direction should not be inversed fitted. Figure 9. Compression Fitting Connector Installation Page 11 of 33 Figure 10. VCR Connector Installation Attention : For installing the fittings, you should manually use spanner to wrench it tighten by 1/2 turn pulling up, (imported Compression Fitting should use spanner to be tighten in 1.25 turns) to prove its not blow-by after your installing the front ferrule, back ferrule and nut. Please note you should use two spanners to operating, one spanner for locking the fitting stable and another one for revolving the nut. Especially when you dismantle the tube, you should operate by the two spanners otherwise fitting will become flexible which will affect its airproof function. 4.3 Electrical Interfacing MFC could begin operating after it was well connected with professional cable and corresponding Flow Readout Box. The electrical interfacings of each MFC and MFM are showing as following figures (Figure 11 ~ Figure 14). Setpoint 8 15 1 9 Figure 11. Connection of D07-9F MFC Electrical Interfacing Page 12 of 33 8 15 1 9 Figure 12. Connection of D07-9FM MFM Electrical Interfacing D07-9F MFM electrical interfacings (figure12) is as same as connector of D07-9F MFC, only compared with MFC accessories that lacks of “ Valve Control” and “Setpoint” two wires. Setpoint 8 1 15 9 Figure 13. Connection of D07-19F MFC Electrical Interfacing Page 13 of 33 8 15 9 1 Figure 14. Connection of D07-19FM MFM Electrical Interfacing D07-19F MFM electrical interfacings (figure14) is as same as connector of D07-19F MFC, only compared with MFC accessories that lacks of “ Valve Control” and “Setpoint” two wires. 4.4 a. PC Connection Connection through Flow Readout Box with PC or other external signal. (Figure 15) Output I Signal common Set Connection MFC or MFM 4~20mA V/I Signal common EXT 4~20mA INT A/D In D/A Out Signal common Cable I/V SET Valve Off OFF (ATTENTION: Readout Box No “Valve OFF/ON” and “Set” in MFM ) COMPUTER Or PLC Figure15. Connection with PC through Readout Box Page 14 of 33 When need test the output I signal (4~20mA) , users could connect to the “Output I” and the “Signal common” of external control signal socket of Flow Readout Box, also could directly connect with PC modulus (A/D) converter.If flow output signal is voltage signal, +5V output voltage is corresponding as full scale rating flow rate of MFC,+1V output voltage is corresponding as zero scale rating flow. Please be sure the flow testing output electric current will be no more than 3mA. When the flow is setting by external signals, it should be turned the switch on “EXT”, meanwhile, it should be input 4~20mA external signal from external control socket to the Flow Readout Box. . It also could be directly connecting with modulus (D/A) converter of PC to achieve auto-control. If PC or PLC need perform the OFF function of valve control, it could be accomplished by use one RELAYS (two sets) transfer contacts, showing in Figure 15. Page 15 of 33 b. PC Directly Connection (Figure 16) 4~20mA Output I A/D In Signal common Set MFC or MFM Signal common 4~20mA D/A Out V (ATTENTION: No “Valve OFF/ON” Signal common and “Set” in MFM ) OFF +24V common power common Valve Off +24V COM PC or PLC POWER Figure 16. PC Directly Connection Under the case of MFM/MFC directly connects to PC without Flow Readout Box, 24VDC power supply with good anti-jamming should be provided by user itself; connects SET with PC D/A output; connects “Output I” with PC A/D input; “Signal common” connects signal reference point; low-current “common” and heavy-current “power common” down lead separately, and connects together to the 24VDC power supply common port. Page 16 of 33 4.5 Zero Adjustment It could be zero adjusted in case of zero excursions while the first time operates or a long period operating. Users could adjust Zero Potentiometer from side face or adjust it while removed its overall (showing in Figure 17 and Figure 18). Please note it should be sure that gas flow tube could not be open while zero adjustment (or shutoff the valves); it should be warming up not less than 15 minutes, adjustment performs after its zero moving to the stable stop. Users should not adjust zero except zero potentiometer, otherwise it will affect device accuracy. Linearity Zero Span After Open Zero Figure 17. The Position of Potentiometer of D07-9F & D07-9FM Linearity Zero Span After Open Zero Figure 18. The Position of Potentiometer of D07-19F & D07-19FM Page 17 of 33 There is another external zero adjustment function, while MFC connected with our new zero adjustment functional D08 Flow Readout Box, it could be achieved by zero potentiometer of display panel. The important is the ranges of external zero adjustment is narrow, when there is big zero excursion happened, it should be better adjust zero from zero potentiometer of MFC. 5. OPERATING INSTRUCTIONS 5.1 MFC Operation (Together with Flow Readout Box) 5.1.1 Start up (Reference to Figure 19) The main operating should perform in the Flow Readout Box. Valve Control Switches and flow setting potentiometer are in the front of display panel, the flow setting internal or external signal control switches are on the back of panel of Readout Box. When the switch is turned on the “INT” position, the potentiometer will control flow rate; when the switch is turned on “EXT” position, the external signal will control flow rate (Please check out the details in Flow Readout Box Instruction). Flow Display Flow Unit Set Conversion Swich Valve Drive Switch Set Figure 19. Flow Readout Box Operating Panel Page 18 of 33 a. When the valve switch is on the position of “AUTO”, gas supply should be open first and then turn on the power supply, the flow rate will not be beyond 5% of presetting after flow soft-start about 20 seconds. General speaking it should be warming up around 15 minutes in case of valves shut off and without gas flow, operates it after zero has stable movement. If there is big zero excursion, please see the reference 4.5, in the case of non-gas flow, it could be possible to adjust zero by zero potentiometer. b. If valve switch is on the position of OFF, after power supplying, gas supplying and warming-up, turns the switch to “AUTO” position, the flow rate will reach the presetting 2% (or lower) after a few seconds, which is the suggested operating method. c. If valve switch is on the position of PURGE, the flow rate will reach up to the maximum value after gas and power supplying, which will have the function of air blasting to the gas circuit. d. If valve switch is on the position of “AUTO” and presetting is not zero, open the gas after power supply, the flow rate will have a big overshoot and then rapidly reach to the stable presetting value, this kind of operation should better be avoided. e. The best operating sequence should be: 1.Open the power supply; 2.Turn the valve switch on the position of OFF; 3.Open the gas supply; 4.Warm up for minutes to have stable zero point movement; 5.Turn the switch on “AUTO” position; 6.Set flow rate under request. This is the best way to operate without an overshooting. 5.1.2 PURGE When need air blasting and cleaning bypass and tube, users could turn the switch on PURGE position, during the purging, the flow rate value should reach up to times or even several decuples of the full scale flow value. If shutoff the gas supplying, it could be vacuum pumping to get rid of MFC internal or upper reaches remained gas to match request. And then shut off valves, open gas supply again and turn it to “OFF” position. 5.1.3 Readout Box &PC Connection Please find the reference in Figure 5 and Figure 15，it should set the switch of Readout Box to the “External” and turn the switch to the position of “CONTROL”, and then startup PC. 5.1.4 PC Connection Please have the reference in Figure 5 and Figure 16, after MFC warming up, it could have PC startup. 5.1.5 Valves Control When the valve switch sets to “CONTROL” position, users could perform valves control by “CONTROL” wire of external control signal socket, please find the reference in Figure 5 and Figure 15. When valve control wire connects with +15 V, valves will be shutoff; when valve control wire connects with –15 V, valves will be turned to the top of maximum to purge position; when valve control wire hangs in the air, it’s in the auto-control situation. Page 19 of 33 5.1.6 Shut off Operation After shutoff power supply, flow will be cut off automatically. It should be better shut off gas supply (Turns valve switch to “CLOSE” position and closes the cut-off valve of gas circuit) before power supply. 5.2 MFM Operation 5.2.1 Start Up Please warm up for 15 minutes by power supply before MFM using. 5.2.2 Zero Test and Adjustment Please check up the zero point of MFM after its warming up (especially for the first time operating), it could have reference in 4.5, without gas supplying, which could adjust zero by zero potentiometer. 5.2.3 Gas Supply After zero movement reaches stable, MFM could have gas supply. Please pay attention to the flow rate, it should be better operate not beyond full scale range. 5.2.4 Shut Off Turn off the power supply, which means MFM operating will be terminated, it could not affect the flow rate of bypass. 6. 6.1 CAUTION Medium Forbidden The gas of using should be purified without dust、liquid and oil stain. When necessary, it should be added filter to gas circuit to make sure gas purified. If the outlet of MFC connects with liquid sources, which should be added simple directional valve of MFC outlet to avoid the liquid is refluent to the tube to destroy MFC. 6.2 Corrosive Gas The materials of bypass are anti-caustic materials like 00Cr17Ni14Mo2(same as 316Lstainless steel), Teflon, and Viton. When users operate in condition of without vapor, low leakage, regular cleaning and proper operating, MFC could possible control the normal corrosive gas. Using ammonia, organic solvent gas such as acetone or other strong caustic gas (like BC13 and BBr3), please informed in your order statements. Valves Dynamic sealing materials usually are Viton, for D07-9F MFC could also use Teflon. While Teflon has been selected, there maybe leakage happened of valve port, valve sealing leakage rate will lower than 2% of full scale flow rate; when use the special caustic gas, all sealing materials should be changed relatively. Page 20 of 33 For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure that the fixing and fitting are airtight. It becomes necessary to remove the controller from the system, purge the controller thoroughly with a dry inert gas such as nitrogen, before disconnecting the gas connections. Failure to purge the controller could cause a fire or explosion resulting in death. 6.3 Valves Dynamic Sealing The Valve of MFC is an electric-magnetic valve for adjustment, which is not a solenoid plug valve so that could not perform that kind of function. Users should better have that plug valve by themselves. Especially when users operate with caustic gas, general speaking, it should separately add one cut-off valve of MFC inlet and outlet to protect operating security. After a long period operating, if the leakage rate of MFC valve outlet is not beyond 2% F.S., it is the standard situation. Otherwise, it should be under maintaining. 6.4 Valves operating When valve is operating “PURGE”, which should not be directly turned to “AUTO”, operation should be turned the switch to “OFF” position and then turn it into “AUTO” to operating. 6.5 Installation Position Keeping installation surface horizontal while installation. Please provide the installation position when ordering the MFC. We will calibrate products according to the requirement of customers. The MFC might show the zero drift if it is not installed as the same position of calibration. Customer can adjust zero to fix it. 6.6 Operation Pressure Resistance Please be caution for the medium operating pressure of MFC, it should not be beyond the rage of specification of inlet and outlet. Especially while operating under the high-pressure situation, the big differential pressure will affect flow fail to shut off or lower adjustment. In case of using heavy flow rate of MFC, please be sure appropriately widen tube and reduce gas internal resistance, if operating differential pressure is lower than the value of request, it might could not be reach to the full scale flow rate value. 6.7 Calibration and Conversion D07 series is calibrated by nitrogen. Other gas calibrations please inform in your order statements. When the nitrogen calibration users use other gas operating, it could convert and calculate used gas flow rate by conversion factors of appendix 8.1. Which means users could multiply the readout flow rate from MFC Readout Box with the used gas corresponding conversion factors, the result will be the used gas corresponding mass flow rate of standard situation. For example, there is 100 SCCM (N2) calibrated MFC, the flow rate is displayed 86 SCCM while firedamp flowing, the conversion factors of firedamp is 0.719 from reference of appendix 8.2, the real firedamp flow rate is 86 * 0.719= 61.8 SCCM. If users use the mixture gas, it could be calculated the conversion factors by the method which introducing in appendix 8.2. Page 21 of 33 6.8 D07-9F,9FM Ordering Code D07-[t] [g,g,g] [r,r,r,r] [f,f] [s] [m] [d] [t] –Type Number - [9F ] MFC - [9FM] MFM [g,g,g] –Gas Please consult SEMI52-0302 For Example: -[ 013 ] N2 -[ 007 ] H2 -[ 000 ] Mixture gases (please consult [d] for detail) [r,r,r,r] –Flow Range Full Scale - [020L] - [030L] - [050L] - [100L] - [150L] - [ 200L] - [ 250L] - [ 000C] 20SLM 30SLM 50SLM 100SLM 150SLM 200SLM 250SLM Customer Special Request (please consult [d] for detail) [f,f] –Inlet and Outlet Fittings -[GG] Compression Fittingφ6mm (F.S.≤60SLM) -[DD] Compression Fittingφ8mm (F.S.≤200SLM) -[JJ ] Compression Fittingφ10mm -[SS ] Compression Fittingφ12mm -[CC] Compression Fitting (F.S.≤60SLM) -[HH] Compression Fitting 3/8" -[PP] Compression Fitting 1/2" -[EE] VCR 1/2" -[XX ] Customer Special fittings (please consult [d] for detail) [s] –Seal Materials -[ V ] Viton -[ N ] Neoprene Page 22 of 33 D07-[t] [g,g,g] [r,r,r,r] [f,f] [s] [m] [d] [m] –Mounting Position -[ H ] Horizontal -[ E ] HESD(Horizontal Edge Side Down) -[ U ] Vertical Inlet Up -[ D ] Vertical Inlet Down [d] –Description -[ ] Default Value: The letters on cover and tag：in Chinese Differential Pressure: D07-9F: 20,30SLM: (0.05~0.30) MPa (7.3~43.5 psid) 50~150SLM: (0.10~0.30) MPa (14.5~43.5 psid) 200,250SLM: (0.15~0.30) MPa (21.8~43.5 psid) D07-9FM: 20~100SLM: <0.02MPa (2.9 psid) > 100SLM:<0.05MPa (7.3 psid) Max Operating Pressure: 3 MPa Calibration Temperature: (22±2)℃ D07-9F Setpoint Signal: Current 4～20mA -[ S ] Customer Special Requirements: For Example: The letters on cover and tag: in English；Customer Special Full Scale:29SLM；The proportion of Mixture gases should be indicated: N2 (60%) + CO2(40%)；Customers Differential Pressure: (0.08 ~ 0.13) MPa；Customer Calibration Temperature: 40℃；D07-9F Setpoint Signal: Voltage 1～5VDC and other customers special requirements. For Example: D07-9F013100LJJVHS Page 23 of 33 D07-9F 013 100L JJ V H S Type Number：D07-9F MFC Gas：N2 Flow Range Full Scale：100SLM Inlet and Outlet Fittings：Compression Fittingφ10mm Seal Materials：Viton Mounting Position：Horizontal Customer Special Requirements: For Example: The letters on cover and Tag: in English；Differential Pressure：(0.08~0.13) MPa； Customer Special fittings(According to drawing) ；Customer Special Calibration Temperature：40℃. Page 24 of 33 6.9 D07-19F, 19FM Ordering Code D07-[t] [g,g,g] [r,r,r,r] [f,f] [s] [m] [d] [t] –Type Number - [19F ] MFC - [19FM] MFM [g,g,g] –Gas Please consult SEMI52-0302 For Example: -[ 013 ] N2 -[ 007 ] H2 -[ 000 ] Mixture gases (please consult [d] for detail) [r,r,r,r] –Flow Range Full Scale - [ 005C] - [ 010C] - [ 020C] - [ 030C] - [ 050C] - [ 100C] - [ 200C] - [ 300C] - [ 500C] - [ 001L] - [ 002L] - [ 003L] - [ 005L] - [ 010L] - [ 020L] - [ 030L] - [ 000C] 5SCCM 10SCCM 20SCCM 30SCCM 50SCCM 100SCCM 200SCCM 300SCCM 500SCCM 1SLM 2SLM 3SLM 5SLM 10SLM 20SLM 30SLM Customer Special Request (please consult [d] for detail) Page 25 of 33 D07-[t] [g,g,g] [r,r,r,r] [f,f] [s] [m] [d] [f,f] –Inlet and Outlet Fittings -[AA ] -[GG] -[DD ] -[JJ] -[BB] -[CC ] -[HH] -[MM] -[TT ] -[RR] -[XX ] Compression Fittingφ3mm Compression Fittingφ6mm Compression Fittingφ8mm Compression Fittingφ10mm Compression Fitting1/8" Compression Fitting 1/4" Compression Fitting3/8" VCR 1/4" ф4(inner)×1hose ф6(inner)×1hose Customer Special fittings (please consult [d] for detail) [s] –Seal Materials -[ V ] Viton -[ T ] Teflon -[ N ] Neoprene [m] –Mounting Position -[ H ] Horizontal -[ E ] HESD(Horizontal Edge Side Down) -[ U ] Vertical Inlet Up -[ D ] Vertical Inlet Down [d] –Description -[ ] Default Value： The letters on cover and tag：in Chinese Differential Pressure：D07-19F：≤ 10SLM (0.1 ~ 0.5) MPa (14.5~72.5 psid) > 10SLM (0.1 ~ 0.3) MPa (14.5~43.5 psid) D07-19FM：<0.02MPa (2.9psid) Max Operating Pressure：D07-19F：3 MPa (435.1 psig) D07-19FM：10 MPa (1450.4 psig) Calibration Temperature：(22±2)℃ Page 26 of 33 D07-19F Setpoint Signal: Current 4～20mA -[ S ] Customer Special Requirements： For Example：The letters on cover and tag：in English；Customer Special Full Scale:29SLM；The proportion of Mixture gases should be indicated：N2 (60%) + CO2(40%)；Customer Differential Pressure：(0.05 ~ 0.3) MPa；Customer Calibration Temperature：40℃；D07-19F Setpoint Signal：Voltage 1～5VDC and other customer special requirements. For Example: D07-19F013500CGGVHS D07-19F 013 500C GG V H S Type Number：D07-19F MFC Gas：N2 Flow Range Full Scale：500SCCM Inlet and Outlet Fittings：Compression Fittingφ6mm Seal Materials：Viton Mounting Position：Horizontal Customer Special Requirements：For Example：The letters on cover and tag：in English；Differential Pressure：(0.05~0.3) MPa； Customer Special fittings(According to drawing) ；Customer Special Calibration Temperature：40℃. Page 27 of 33 7. TROUBLESHOOTING Table 5. Failure Handling NO. 1 FAILURE CAUSE There is no gas flow 1.1 Gas flow is shutting off, no gas after turn on. inputting 1.2 Valve control switch is shutoff TREATMENT Check the gas sourcing and make it open Turn the switch to CONTROL or PURGE 1.3 No setting signal Check potentiometer or “In/Out” switch setting position 2 3 4 1.4 Filter is blocked * Change a new filter 1.5 Valve failure Test or *clean valve 1.6 Circuit failure *Repair the electric circuit In case of turning on 2.1 Zero excursion Adjust the zeroing potentiometer but without gas flow, 2.2 Power supply failure *Check Power supply voltages (24VDC) the flow rate testing is 2.3 Sensor failure *Replace the new sensor error. 2.4 *Replace amplifier or repair circuit In case of valve 3.1 Amplifier or other circuits failure Over- load pressure of input Reduce the inlet operating pressure to shutting off, there is outlet, the differential pressure between still heavy flow rate inlet and outlet is beyond rating. passing. 3.2 Pollution of valve *Clean valve and replace seal ring 3.3 Valve failure *Re-adjust solenoid control valve The flow rate display 4.1 Pressure is lower than the rating Heighten the inlet pressure could not reach to full 4.2 *Clean bypass scale flow rate value. 4.3 Setting voltage is less than5.00V *Check the setting Voltage 4.4 *Repair circuit etc. Block of bypass Others trouble decrease differential pressure. Page 28 of 33 Continue To Table 5. Failure Handling NO. 5 FAILURE Fluctuant flow rate 6 Disturbed frequency sourcing 7 Flow display is inaccurate 8 9 10 by high power There is still flow passing while zero setting. The heavy flow is passing but no outputting display Without gas flow, Zero is fluctuate or excursion happened. Attention CAUSE 5.1 Inlet pressure is too low or instable 5.2. High internal gas resistance 5.3 Circuit or valve failure 6.1 Earth wire and zero wire connecting of power supply is error 6.2 Signal reference port connecting problem 6.3 Inter space disturbing 7.1 The range or unit of Display is not matching to controller. 7.2 Bypass is polluted to cause the flow rate excursion. 7.3 Zero excursion happened to be instable. 8.1 Valves leakage 8.2 Zero point is moving less than 0 9.1 Block of sensor 9.2 Circuit failure 10.1 Sensor failure TREATMENT Heighten inlet pressure Lessen internal resistance (The heavy gas flow should have big valve open, widen tube to parallel connecting gas bottles to improve gas supply capacity.) *Repair and adjust Check the earth wire connection, should be one port connection. Check signal connecting wire. *Re-adjust Display *Clean MFC and re-calibrate it * Change sensor and repair circuit *Repair solenoid control valve Adjust zero *Repair and replace the new sensor Should add filter to block gas dust. Using special gas should be sure of good tube sealing and gas dryness. *Repair circuit *Replace a new sensor : * Mark indicates that reparation and adjustment must be dealt under specialist advices。 Page 29 of 33 8. WARRANTY & SERVICE 8.1 Product Warranty a. Our products are guaranteed within 2 years warranty against defects in materials and workmanship if used in accordance with specifications and not subject to physical damage, contamination, alteration or retrofit. b. Buyers undertake to check and inspect the goods and to notify SevenStar of shipment incidents by fax, phone or e-mail as soon as possible after receipting the goods. c. During the warranty period, products must only be repaired by Sevenstar or authorized SevenStar service centers; otherwise, the SevenStar product warranty will be invalidated. d. Repairs will be performed free of charge during the two-year warranty period. If MFCs/MFMs are out of warranty, SevenStar will notify the owner of replacement or repair costs before proceeding. Factory service and repairs are guaranteed 90 days. The warranty excludes consumable materials and wear parts (in teflon, viton, etc.). e. No MFC/MFM used with dangerous gas will be accepted for repair or warranty without a decontamination and purge certificate. 8.2 Specific warranty requirements are as follows : a. Gas must be clean and particle-free, which means a filter( <30μ) must be fitted in the gas line upstream of the MFC/MFM. b. Gas must comply with the pressure specifications, and never exceed the rated value. c. Process gas should be in line with the seal materials chosen in the order, especially in case of corrosive gas. We shall not be responsible for any damage caused by changing process gas or choosing the wrong seal materials in order. d. Electrical connection requirements are as follows: The system must be wired carefully: non-observance of the pin out may irreversibly damage the electronic board inside the products. If user self scheme power supply of MFCs, a stable and anti-jamming power supply is required, with ripple below 5mV. e. Gas connections: the fittings must be handled carefully. We guarantee that all fittings have been individually inspected and are scratch-free. f. The MFC/MFM must not be dismounted: the MFC/MFM warranty will be invalidated if the seal between the MFC/MFM block and cover is torn. 8.3 Service Our product engineer will help you with issues related to operation, calibration, installation, process specification, gas convention, etc. And we also provide you with technology support& maintenances, and products operation training. Please visit mfc.sevenstar.com.cn for relevant information and the locations of our service centers. Page 30 of 33 9. 9.1 APPENDIX Mass Flow Conversion Factors Table 6. GAS Air Ar AsH3 BBr3 BCl3 BF3 B2H6 CCl4 CF4 CH4 C2H2 C2H4 C2H6 C3H4 C3H6 C3H8 C4H6 C4H8 C4H10 C5H12 CH3OH C2H6O C2H3Cl3 CO CO2 C2N2 Cl2 D2 F2 GeCl4 Conversion Factors GAS CODE (SEMIE52-0302) 008 004 035 079 070 048 058 101 063 028 042 038 054 068 069 089 093 104 111 240 176 136 112 009 025 059 019 014 018 113 HEAT ( Cal/g ℃) 0.2400 0.1250 0.1168 0.0647 0.1217 0.1779 0.5020 0.1297 0.1659 0.5318 0.4049 0.3658 0.4241 0.3633 0.3659 0.3990 0.3515 0.3723 0.4130 0.3916 0.3277 0.3398 0.1654 0.2488 0.2017 0.2608 0.1145 1.7325 0.1970 0.1072 ρ (g/l 0℃) 1.2930 1.7837 3.4780 11.1800 5.2270 3.0250 1.2350 6.8600 3.9636 0.7150 1.1620 1.2510 1.3420 1.7870 1.8770 1.9670 2.4130 2.5030 2.5930 3.2190 1.4300 2.0550 5.9500 1.2500 1.9640 2.3220 3.1630 0.1798 1.6950 9.5650 Factors 1.006 1.415 0.673 0.378 0.430 0.508 0.441 0.307 0.420 0.719 0.581 0.598 0.481 0.421 0.398 0.348 0.322 0.294 0.255 0.217 0.584 0.392 0.278 1.000 0.737 0.452 0.858 0.998 0.931 0.267 Page 31 of 33 Continue To Table 6. Conversion Factors GAS GeH4 H2 HBr HCl HF HI H2S He Kr N2 Ne NH3 NO NO2 N2O O2 PCl3 PH3 PF5 POCl3 SiCl4 SiF4 SiH4 SiH2Cl2 SiHCl3 SF6 SO2 TiCl4 WF6 Xe GAS CODE (SEMIE52-0302) 043 007 010 011 012 017 022 001 005 013 002 029 016 026 027 015 193 031 143 102 108 088 039 067 147 110 032 114 121 006 HEAT ( Cal/g ℃) 0.1405 3.4224 0.0861 0.1911 0.3482 0.0545 0.2278 1.2418 0.0593 0.2486 0.2464 0.5005 0.2378 0.1923 0.2098 0.2196 0.1247 0.2610 0.1611 0.1324 0.1270 0.1692 0.3189 0.1472 0.1332 0.1588 0.14890 0.1572 0.0956 0.0379 ρ (g/l 0℃) 3.4180 0.0899 3.6100 1.6270 0.8930 5.707 1.5200 0.1786 3.7390 1.2500 0.9000 0.7600 1.3390 2.0520 1.9640 1.4270 6.1270 1.5170 5.6200 6.8450 7.5847 4.6430 1.4330 4.5060 6.0430 6.5160 2.8580 8.4650 13.2900 5.8580 Factors 0.569 1.010 1.000 1.000 1.000 0.999 0.844 1.415 1.415 1.000 1.415 0.719 0.976 0.741 0.709 0.992 0.358 0.691 0.302 0.302 0.284 0.348 0.599 0.412 0.340 0.264 0.687 0.206 0.215 1.415 Page 32 of 33 9.2 Conversion Factors Instruction MFC and MFM are standard calibrated by N2 while it’s out of factory. Other gas calibrations can be approximated by converting of conversion factors of our instruction. While using other gas operating: One single gas: The conversion factors could find out in the users specification instruction. A mixture of two or more gases: Assume there is “n” sorts of gases, could calculate the conversion factors C by the following formula: Basic Formula： C=0.3106 N /ρ(Cp) ρ — Density of the gas Cp — Specific heat of the gas N — Structure factors of gas-molecule (See Table 6.) Table 6. Gas-Molecule Composing factors COMPOSITION Single atom numerator Double atom numerator Tree atom numerator Multi-atom numerator EXAMPLE Ar He CO N2 CO2 NO2 NH3 C4H8 N VALUE 1.01 1.00 0.94 0.88 For mixture gases： N = N1 (ω1/ωT )+N2 (ω2/ωT ) + ···+ Nn (ωn/ωT ) Then： 0.3106 [N1 (ω1/ωT )+N2 (ω2/ωT ) + ···+ Nn (ωn/ωT )] C = ———————————————————————— ρ1Cp1 (ω1/ωT )+ ρ2Cp2 (ω2/ωT )+ ···+ ρnCpn (ωn/ωT) ω1 …ωn — The flow of single gas ωT — The flow of mixture gas ρ1…ρn — The density of single gas CP1…CPn —Specific heat of the single gas N1…Nn —Structure factors of gas-molecule (See Table 6.) Attention : 1） Standard：Temperature 273.15K (0 ºC ); Air Pressure— 101325 Pa (760mm Hg) 2） Please feel free to contact us if the request gas conversion factors could not be found in our appendix. Page 33 of 33 Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co.,Ltd. D07 Series Mass Flow Controller Beijing Sevenstar Electronics Co., Ltd. Mass Flow Meter Subsidiary Co., Ltd. Address: P.O.BOX Post code： Tel： Fax： Homepage： E-Mail: No.1 Jiuxianqiao East Rd., Chaoyang District, Beijing, China 3#741, Beijing, China 100015 (+86)-10-64362939 (+86)-10-64361831 ext. 8491 or 8315 (+86)-10-64362923 or 64362939 http://mfc.sevenstar.com.cn [email protected] Shanghai Office: Room 1916, Unicom International Tower, NO.547 Tianmu West Road, Zhabei District, Shanghai, 200070, China Tel： (+86)-21-33030324 Fax： (+86)-21-63533265 Shenzhen Office: Room 712, Section B, Qiche Tower, No.45 Zhenhua Road, Futian District, Shenzhen, China Zip code： 518031 Tel： (+86)-755-88290258 Fax： (+86)-755-88294770 *Description may be changed following improvements to product. The information contained in this document is subject to change without notice *If there is any mistake in this uses manual, please feel free to contact us. *©2010 Beijing Sevenstar Electronics Co.,Ltd. All rights reserved.
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