"user manual"

"user manual"
D07- 9F
D07- 9FM
D07- 19F
D07- 19FM
Mass Flow Controller
Mass Flow Meter
INSTRUCTION MANUAL
Version June 2013
A NOTE TO OUR CUSTOMERS
Dear customer,
Thank you for purchasing SEVENSTAR D07 series Mass Flow Controller and Mass Flow Meter product.
This user manual is important when installing and doing maintenance. Please keep it carefully.
We strongly recommend that you read this manual thoroughly before you starting to use the product. This user manual
introduces the important issues including the proper and safe use of the products.
And please notice the words and section with the symbol
. Not in accordance with the user manual for the use of
property caused by loss or personal injury, SEVENSTAR may not be responsible.
If you require any additional information or assistant of Sevenstar D07 series Mass Flow Controller and Mass Flow
Meter, please feel free to contact your local Sevenstar Sales Agent or Sevenstar Customer Service at:
(8610)- 6436 2925.
Yours sincerely,
Sevenstar
CONTENTS
1.
APPLICATION & FEATURES…………….
1
5.2.2 Zero Test and Adjustment…………………..
20
2.
SPECIFICATION…………………………..
3
5.2.3 Gas Supply………………………………….
20
3.
STRUCTURE & PRINCIPLE……………...
5
5.2.4 Shut Off…………………………………….
20
3.1 Structure…………………………………….
5
6.
CAUTION……………………………………
20
3.2 Operation Principle…………………………
6
6.1 Medium Forbidden …………………………...
20
INSTALLATION & CONNECTION ……..
8
6.2 Corrosive Gas ………………………………..
20
4.1 Dimension…………………………………..
8
6.3 Valves Dynamic Sealing ……………………..
21
4.2 Fittings………………………………………
11
6.4 Valves Operating …………………………….
21
4.3 Electrical Interfacing………………………
12
6.5 Installation Position ……………….................
21
4.4 PC Connection………………………………
14
6.6 Operation Pressure Resistance……………….
21
4.5 Zero Adjustment…………………………….
17
6.7 Calibration and Conversion…………………..
21
5.
OPERATION INSTRUCTIONS…………..
18
6.8 D07-9F,9FM Ordering Code….. ……………
22
5.1 MFC Operation……………………………..
18
6.9 D07-19F,19FM Ordering Code….. …………
25
5.1.1 Start Up……………………………………
18
7. TROUBLESHOOTING……………………..
28
5.1.2 Purge………………………………………
19
8. WARRANTY & SERVICE…………………..
30
5.1.3 Readout Box & PC Connection…………...
19
8.1 Product Warranty……………………………..
30
5.1.4 PC Connection…………………………….
19
8.2 Specific warranty requirements ………………
30
5.1.5 Valves Control…………………………….
19
8.3 Service…………………..……………………
30
5.1.6 Shut Off Operation………………………..
20
9.
APPENDIX…………………………….…….
31
5.2 MFM Operation……………………………..
20
9.1 Mass Flow Conversion factors…………….....
31
5.2.1 Start Up …………………………………..
20
9.2 Conversion factors Introduction.......................
33
4.
MASS FLOW CONTROLLER & MASS FLOW METER
Operating Instruction
1. APPLICATION & FEATURES
Mass Flow Meter (MFM) accurately measures mass flow rates, Mass Flow Controller (MFC) accurately measures
and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes. They are
widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical industry,
petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc. The
typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma
etching, sputtering, ion implantation; vacuum deposition equipment, optical fiber melting, micro-reaction equipment,
mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.
D07 series MFM & MFC bring the high accuracy, excellent repeatability, quick response, soft-start, better reliability,
wide variety ranges of operation pressure (good operation in high pressure and vacuum situations), simple
convenient operation, flexible installation, possible connecting with PC to carry out automatic control to the users’
system.
D07-9F、D07-9FM、D07-19F and D07-9FM all use 24 VDC power supply, and they are better connected together
with D08 series Readout Box, the cable connection is showing as following (Figure 1 and Figure 2):
Page 1 of 33
Figure 1
D07-9F MFC and Readout Box
Figure 2 D07-19F MFC and Readout Box
Page 2 of 33
2.
SPECIFICATION
Table 1. Specifications of D07-9F & D07-19F MFC
No.
1
Item
Flow Ranges
D07-9F
D07-19F
0~20,30,50,100,150,200,250
SLM
0~5,10,20,30,50,100,200,300,500SCCM
0~1,2,3,5,10,20,30 SLM
2
Accuracy
±2 % F.S.
±1% F.S.
(20,30SLM: ±2 % F.S.)
3
Linearity
±1% F.S.
±0.5 % F.S.
(20,30SLM: ±2% F.S.)
4
Repeatability
5
Response-Time
6
Differential
Pressure
7
Max Pressure
8
Operation Tem.
9
Input/Output Signal
10
Valve
11
Power Supply
12
Dimension
13
Weight
Notes
±0.2 % F.S.
≤ 4 sec
20,30 SLM: 0.05~0.30 MPa
(7.3~43.5 psid)
≤10SLM:(0.1~ 0.5)MPa(14.5~72.5 psid)
50~150SLM: 0.10~0.30 MPa (14.5~43.5 psid)
200,250SLM: 0.15~0.30 MPa (21.8~43.5 psid)
3
>10SLM:(0.1~0.3) MPa(14.5~43.5 psid)
MPa (435.1 psig)
5 ºC ~ 45 ºC
4~20 mA or 1~5VDC
N.C.Solenoid
24 VDC
400 mA
According to Figure 6
2.6 kg
According to Figure 8
1.2 kg
:
MFC/MFM is calibrated by N2 as a standard gas.
Units:
SCCM (Standard Cubic Centimeter/Min);
SLM
(Standard Liter/Min)
Standard Situation:
Tem — 273.15K ( 0 ºC );
Air Pressure — 101325 Pa (760mm Hg)
F.S. :
Full Scale
Page 3 of 33
Table 2. Specifications of D07-9FM & D07-19FM MFM
No.
1
Item
Flow Ranges
D07-9FM
D07-19FM
0~5,10,20,30,50,100,200,300,500 SCCM
0~20,30,50,100,150,200,250 SLM
0~1,2,3,5,10,20,30 SLM
2
Accuracy
±2 % F.S.
±1% F.S.
(20,30SLM: ±2 % F.S.)
3
Linearity
±1 % F.S.
±0.5% F.S.
(20,30SLM: ±2% F.S.)
4
Repeatability
5
Response-Time
6
±0.2 % F.S.
≤ 4 sec
20~100SLM: <0.02 MPa (2.9
Operation Pressure
psid)
>100SLM: <0.05 MPa
<0.02 MPa (2.9 psid)
(7.3
psid)
7
Max Pressure
8
Operation Tem.
9
Output Signal
10
Power Supply
11
Dimension
12
Weight
3
MPa (435.1 psig)
10 MPa
(1450.4 psig)
5 ºC ~ 45ºC
4~20 mA or 1~5VDC
24 VDC
According to Figure 7
1.5 kg
100 mA
According to Figure 8
1.0 kg
The main specifications could be found in table 1 and table 2. D07-9FM and D07-19FM is respectively the
measuring part of D07-9F and D07-19F, the specifications of measuring parts are almost same.
Page 4 of 33
3. STRUCTURE & OPERATION PRINCIPLE
3.1
Structure
The MFM consists of flow sensor, flow-splitter bypass and flow amplifying circuit. If add Control valves and PID
control circuit to MFM will compose a MFC. The following figures (Figure 3 and Figure 4) are exactly showing the
structures of D07-9F MFC and D07-19F MFC after opening up their overall:
Stand
Electric Connector
Locknut
PCB
Solenoid
Zero
control valve
Sensor
Inlet
Outlet
Base
Figure 3. Structure of D07-9F MFC
Other models structures are basically as same as showing in figure 3. D07-9FM MFM compared with D07-9F MFC,
only is different of lacking solenoid control valve, other parts are almost same. For other more information please be
advised by your salesmen.
Page 5 of 33
Electric Connector
Stand
Locknut
PCB
Zero
Solenoid control valve
Sensor
Inlet
Outlet
Base
Figure 4. Structure of D07-19F MFC
Other models structures are basically as same as showing in figure 4. D07-19FM MFM compared with D07-19F
MFC, only is different of lacking solenoid control valve, other parts are almost same. For other more information
please be advised by your salesmen.
3.2 Operation Principle
According to the Capillary Heat Transfer Temperature Difference Calorimetry Theory, the flow sensor measures the
mass flow without pressure compensation. The sensor heated the flow signal which was measured by electric bridge
and amplified it through amplifier, the amplified flow testing voltage is compared with presetting voltage, the
differential signal will control valve after amplified, then the flow rate of closed loop control will be as same as
presetting flow rate. The bypass divider controls the flow rate. The corresponding D08 series Flow Readout Boxes
have stabilized power supply, 3 and 1/2 digital voltage meter, presetting potentiometer, external & internal
converters and three-phase switches. Figure 5 is exactly showing the operating principle while MFC is connecting
Page 6 of 33
with Flow Readout Box.
FLOW READOUT BOX
+5V
100.0
Set
V/I
+24V
EXT
4~20mA
+1V
Power
~220V
4~20mA
INT
Output
Signal
Common
Power Common
V/I
MASS FLOW
METER
SET
I/V
MASS FLOW
CONTROLLER
OUT 1~5VDC Comparator
Amplifier
ON
Drive
I
24V
Purge
Auto
Off
OFF
Sensor
Valve
Bypass
INLET
OUTLET
Figure5. Principle of MFC
The outputting flow testing signal from MFC is a direct ratio with the flow through the channels, flow outputting
signal is 4~20mA (or 1~5VDC). The Flow control ranges of MFC is (2~100) %F.S., flow resolving power is 0.1%
F.S..
Attention
:
When Valve controller of MFC is posited on position of “PURGE”, it can be functioned as a MFM. In that
case, the maximum flow testing voltage could reach beyond +10V, please be careful, while flow is beyond
F.S. +5V(Full Scale), the real flow will have no linearity corresponding with flow testing voltage. While it’s
purging, flow display will be inaccurate, even showing “reduce” while the real flow is enhanced, please be
sure it’ll be no damaged to device itself.
Page 7 of 33
Operation control could accomplish by Flow Readout Box. When set point is turned on the “INT”, flow rate will be
under controlled by the presetting potentiometer; when setpoint is turned on the “EXT”, flow rate will be controlled
by set signal which is supplied by users.
There are three valves control switches on the panel of D08 series Flow Readout Box: CLOSE, PURGE and AUTO.
In case of CLOSE, Valves of MFC will shut off; in case of PURGE, Valve will open reach to the tip to purge the
Gas systems or could be functioned as a MFM; when set to AUTO, Valve can control the flow rate automatically.
4. INSTALLATION & CONNECTION
4.1 Dimension
Dimensions and installations are showing as following figure 6 to figure 8:
Figure 6. Dimension of D07-9F MFC
Page 8 of 33
Figure 7. Dimension of D07-9FM MFM
Attention
:
The height (which is showing in figure 6 and figure 7) of 140mm are height without electric connectors of
cable. It should be added around 50mm more after adding the electric connector.
Page 9 of 33
Figure 8. Dimensions of D07-19F and D07-19FM
Attention
:
The height (which is showing in figure 8) of 125mm are height without electric connectors of cable. It
should be added around 50mm more after adding the electric connector.
Page 10 of 33
4.2 Fittings
Four models of external diameters connectors could be provided:
Table3. Connectors & Dimensions of D07-9F、D07-9FM
VCR
Compression Fitting
No
MFC/MFM
Model
1
D07-9F
○
○
○
○
○
2
D07-9FM
○
○
○
○
○
1/4"
Φ6
Φ8
3/8"
Φ10 Φ12
(≤60SLM)
(≤60SLM) (≤200SLM)
1/2"
1/2"
○
○
○
○
○
○
Note
Mark"○" means could be
selected, but each model
only could be selected one
connector type at a time.
Table4. Connectors & Dimensions of D07-19F、D07-19FM
Compression Fitting
No
MFC/MFM
Model
Φ3
Φ6
Φ8
Φ10
1/8"
VCR
1/4"
3/8"
1/4"
Rose
Note
Φ6
Φ4
(inner
(inner
)×1
)×1
1
D07—19F
○
○
○
○
○
○
○
○
○
○
2
D07—19FM
○
○
○
○
○
○
○
○
○
○
Mark"○" means could be
selected, but each model
only could be selected one
connector type at a time.
Using standard Compression Fitting connectors, general speaking, stainless steel tube was used to
connect MFC and Gas System, matching to the different request, other materials also could be used
as nylon tube or hard flexible plastic hose. Figure 9 is an example to showing the fitting structure,
please be careful, the flow input & output direction should not be inversed fitted.
Figure 9. Compression Fitting Connector Installation
Page 11 of 33
Figure 10. VCR Connector Installation
Attention
:
For installing the fittings, you should manually use spanner to wrench it tighten by 1/2 turn pulling up,
(imported Compression Fitting should use spanner to be tighten in 1.25 turns) to prove its not blow-by after
your installing the front ferrule, back ferrule and nut. Please note you should use two spanners to
operating, one spanner for locking the fitting stable and another one for revolving the nut. Especially when
you dismantle the tube, you should operate by the two spanners otherwise fitting will become flexible
which will affect its airproof function.
4.3
Electrical Interfacing
MFC could begin operating after it was well connected with professional cable and corresponding Flow Readout
Box. The electrical interfacings of each MFC and MFM are showing as following figures (Figure 11 ~ Figure 14).
Setpoint
8
15
1
9
Figure 11. Connection of D07-9F MFC Electrical Interfacing
Page 12 of 33
8
15
1
9
Figure 12. Connection of D07-9FM MFM Electrical Interfacing
D07-9F MFM electrical interfacings (figure12) is as same as connector of D07-9F MFC, only compared with MFC
accessories that lacks of “ Valve Control” and “Setpoint” two wires.
Setpoint
8
1
15
9
Figure 13. Connection of D07-19F MFC Electrical Interfacing
Page 13 of 33
8
15
9
1
Figure 14. Connection of D07-19FM MFM Electrical Interfacing
D07-19F MFM electrical interfacings (figure14) is as same as connector of D07-19F MFC, only compared with
MFC accessories that lacks of “ Valve Control” and “Setpoint” two wires.
4.4
a.
PC Connection
Connection through Flow Readout Box with PC or other external signal. (Figure 15)
Output I
Signal common
Set
Connection
MFC or
MFM
4~20mA
V/I
Signal common
EXT
4~20mA
INT
A/D In
D/A Out
Signal common
Cable
I/V
SET
Valve Off
OFF
(ATTENTION:
Readout Box
No “Valve OFF/ON”
and “Set” in MFM )
COMPUTER
Or PLC
Figure15. Connection with PC through Readout Box
Page 14 of 33
When need test the output I signal (4~20mA) , users could connect to the “Output I” and the “Signal common” of
external control signal socket of Flow Readout Box, also could directly connect with PC modulus (A/D) converter.If
flow output signal is voltage signal, +5V output voltage is corresponding as full scale rating flow rate of MFC,+1V
output voltage is corresponding as zero scale rating flow. Please be sure the flow testing output electric current will
be no more than 3mA.
When the flow is setting by external signals, it should be turned the switch on “EXT”, meanwhile, it should be input
4~20mA external signal from external control socket to the Flow Readout Box. . It also could be directly connecting
with modulus (D/A) converter of PC to achieve auto-control.
If PC or PLC need perform the OFF function of valve control, it could be accomplished by use one RELAYS (two
sets) transfer contacts, showing in Figure 15.
Page 15 of 33
b. PC Directly Connection (Figure 16)
4~20mA
Output I
A/D In
Signal common
Set
MFC or MFM
Signal common
4~20mA
D/A Out
V
(ATTENTION:
No “Valve OFF/ON”
Signal common
and “Set” in MFM )
OFF
+24V
common
power common
Valve Off
+24V
COM
PC or PLC
POWER
Figure 16. PC Directly Connection
Under the case of MFM/MFC directly connects to PC without Flow Readout Box, 24VDC power supply with good
anti-jamming should be provided by user itself; connects SET with PC D/A output; connects “Output I” with PC
A/D input; “Signal common” connects signal reference point; low-current “common” and heavy-current “power
common” down lead separately, and connects together to the 24VDC power supply common port.
Page 16 of 33
4.5 Zero Adjustment
It could be zero adjusted in case of zero excursions while the first time operates or a long period operating. Users
could adjust Zero Potentiometer from side face or adjust it while removed its overall (showing in Figure 17 and
Figure 18). Please note it should be sure that gas flow tube could not be open while zero adjustment (or shutoff the
valves); it should be warming up not less than 15 minutes, adjustment performs after its zero moving to the stable
stop. Users should not adjust zero except zero potentiometer, otherwise it will affect device accuracy.
Linearity
Zero
Span
After
Open
Zero
Figure 17. The Position of Potentiometer of D07-9F & D07-9FM
Linearity
Zero
Span
After
Open
Zero
Figure 18. The Position of Potentiometer of D07-19F & D07-19FM
Page 17 of 33
There is another external zero adjustment function, while MFC connected with our new zero adjustment functional
D08 Flow Readout Box, it could be achieved by zero potentiometer of display panel. The important is the ranges of
external zero adjustment is narrow, when there is big zero excursion happened, it should be better adjust zero from
zero potentiometer of MFC.
5. OPERATING INSTRUCTIONS
5.1
MFC Operation (Together with Flow Readout Box)
5.1.1 Start up (Reference to Figure 19)
The main operating should perform in the Flow Readout Box. Valve Control Switches and flow setting
potentiometer are in the front of display panel, the flow setting internal or external signal control switches are on the
back of panel of Readout Box. When the switch is turned on the “INT” position, the potentiometer will control flow
rate; when the switch is turned on “EXT” position, the external signal will control flow rate (Please check out the
details in Flow Readout Box Instruction).
Flow Display
Flow Unit
Set Conversion Swich
Valve Drive Switch
Set
Figure 19. Flow Readout Box Operating Panel
Page 18 of 33
a.
When the valve switch is on the position of “AUTO”, gas supply should be open first and then turn on the power
supply, the flow rate will not be beyond 5% of presetting after flow soft-start about 20 seconds. General speaking it
should be warming up around 15 minutes in case of valves shut off and without gas flow, operates it after zero has
stable movement. If there is big zero excursion, please see the reference 4.5, in the case of non-gas flow, it could be
possible to adjust zero by zero potentiometer.
b.
If valve switch is on the position of OFF, after power supplying, gas supplying and warming-up, turns the switch to
“AUTO” position, the flow rate will reach the presetting 2% (or lower) after a few seconds, which is the suggested
operating method.
c.
If valve switch is on the position of PURGE, the flow rate will reach up to the maximum value after gas and power
supplying, which will have the function of air blasting to the gas circuit.
d.
If valve switch is on the position of “AUTO” and presetting is not zero, open the gas after power supply, the flow
rate will have a big overshoot and then rapidly reach to the stable presetting value, this kind of operation should
better be avoided.
e.
The best operating sequence should be:
1.Open the power supply; 2.Turn the valve switch on the position of OFF; 3.Open the gas supply; 4.Warm up
for minutes to have stable zero point movement; 5.Turn the switch on “AUTO” position; 6.Set flow rate under
request. This is the best way to operate without an overshooting.
5.1.2 PURGE
When need air blasting and cleaning bypass and tube, users could turn the switch on PURGE position, during the
purging, the flow rate value should reach up to times or even several decuples of the full scale flow value. If shutoff
the gas supplying, it could be vacuum pumping to get rid of MFC internal or upper reaches remained gas to match
request. And then shut off valves, open gas supply again and turn it to “OFF” position.
5.1.3 Readout Box &PC Connection
Please find the reference in Figure 5 and Figure 15,it should set the switch of Readout Box to the “External” and
turn the switch to the position of “CONTROL”, and then startup PC.
5.1.4 PC Connection
Please have the reference in Figure 5 and Figure 16, after MFC warming up, it could have PC startup.
5.1.5 Valves Control
When the valve switch sets to “CONTROL” position, users could perform valves control by “CONTROL” wire of
external control signal socket, please find the reference in Figure 5 and Figure 15. When valve control wire connects
with +15 V, valves will be shutoff; when valve control wire connects with –15 V, valves will be turned to the top of
maximum to purge position; when valve control wire hangs in the air, it’s in the auto-control situation.
Page 19 of 33
5.1.6 Shut off Operation
After shutoff power supply, flow will be cut off automatically. It should be better shut off gas supply (Turns valve
switch to “CLOSE” position and closes the cut-off valve of gas circuit) before power supply.
5.2 MFM Operation
5.2.1 Start Up
Please warm up for 15 minutes by power supply before MFM using.
5.2.2 Zero Test and Adjustment
Please check up the zero point of MFM after its warming up (especially for the first time operating), it could have
reference in 4.5, without gas supplying, which could adjust zero by zero potentiometer.
5.2.3 Gas Supply
After zero movement reaches stable, MFM could have gas supply. Please pay attention to the flow rate, it should be
better operate not beyond full scale range.
5.2.4 Shut Off
Turn off the power supply, which means MFM operating will be terminated, it could not affect the flow rate of
bypass.
6.
6.1
CAUTION
Medium Forbidden
The gas of using should be purified without dust、liquid and oil stain. When necessary, it should be added filter to
gas circuit to make sure gas purified. If the outlet of MFC connects with liquid sources, which should be added
simple directional valve of MFC outlet to avoid the liquid is refluent to the tube to destroy MFC.
6.2 Corrosive Gas
The materials of bypass are anti-caustic materials like 00Cr17Ni14Mo2(same as 316Lstainless steel), Teflon, and
Viton. When users operate in condition of without vapor, low leakage, regular cleaning and proper operating, MFC
could possible control the normal corrosive gas. Using ammonia, organic solvent gas such as acetone or other strong
caustic gas (like BC13 and BBr3), please informed in your order statements. Valves Dynamic sealing materials
usually are Viton, for D07-9F MFC could also use Teflon. While Teflon has been selected, there maybe leakage
happened of valve port, valve sealing leakage rate will lower than 2% of full scale flow rate; when use the special
caustic gas, all sealing materials should be changed relatively.
Page 20 of 33
For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure
that the fixing and fitting are airtight. It becomes necessary to remove the controller from the system, purge
the controller thoroughly with a dry inert gas such as nitrogen, before disconnecting the gas connections.
Failure to purge the controller could cause a fire or explosion resulting in death.
6.3
Valves Dynamic Sealing
The Valve of MFC is an electric-magnetic valve for adjustment, which is not a solenoid plug valve so that could not
perform that kind of function. Users should better have that plug valve by themselves. Especially when users
operate with caustic gas, general speaking, it should separately add one cut-off valve of MFC inlet and outlet to
protect operating security. After a long period operating, if the leakage rate of MFC valve outlet is not beyond 2%
F.S., it is the standard situation. Otherwise, it should be under maintaining.
6.4
Valves operating
When valve is operating “PURGE”, which should not be directly turned to “AUTO”, operation should be turned the
switch to “OFF” position and then turn it into “AUTO” to operating.
6.5
Installation Position
Keeping installation surface horizontal while installation. Please provide the installation position when ordering the
MFC. We will calibrate products according to the requirement of customers. The MFC might show the zero drift if
it is not installed as the same position of calibration. Customer can adjust zero to fix it.
6.6
Operation Pressure Resistance
Please be caution for the medium operating pressure of MFC, it should not be beyond the rage of specification of
inlet and outlet. Especially while operating under the high-pressure situation, the big differential pressure will affect
flow fail to shut off or lower adjustment. In case of using heavy flow rate of MFC, please be sure appropriately
widen tube and reduce gas internal resistance, if operating differential pressure is lower than the value of request, it
might could not be reach to the full scale flow rate value.
6.7 Calibration and Conversion
D07 series is calibrated by nitrogen. Other gas calibrations please inform in your order statements. When the
nitrogen calibration users use other gas operating, it could convert and calculate used gas flow rate by conversion
factors of appendix 8.1. Which means users could multiply the readout flow rate from MFC Readout Box with the
used gas corresponding conversion factors, the result will be the used gas corresponding mass flow rate of standard
situation.
For example, there is 100 SCCM (N2) calibrated MFC, the flow rate is displayed 86 SCCM while firedamp
flowing, the conversion factors of firedamp is 0.719 from reference of appendix 8.2, the real firedamp
flow rate is 86 * 0.719= 61.8 SCCM.
If users use the mixture gas, it could be calculated the conversion factors by the method which introducing in
appendix 8.2.
Page 21 of 33
6.8
D07-9F,9FM Ordering Code
D07-[t]
[g,g,g] [r,r,r,r]
[f,f]
[s]
[m]
[d]
[t] –Type Number
- [9F ] MFC
- [9FM] MFM
[g,g,g] –Gas
Please consult SEMI52-0302
For Example:
-[ 013 ] N2
-[ 007 ] H2
-[ 000 ] Mixture gases (please consult [d] for detail)
[r,r,r,r] –Flow Range Full Scale
- [020L]
- [030L]
- [050L]
- [100L]
- [150L]
- [ 200L]
- [ 250L]
- [ 000C]
20SLM
30SLM
50SLM
100SLM
150SLM
200SLM
250SLM
Customer Special Request (please consult [d] for detail)
[f,f] –Inlet and Outlet Fittings
-[GG] Compression Fittingφ6mm (F.S.≤60SLM)
-[DD] Compression Fittingφ8mm (F.S.≤200SLM)
-[JJ ] Compression Fittingφ10mm
-[SS ] Compression Fittingφ12mm
-[CC] Compression Fitting (F.S.≤60SLM)
-[HH] Compression Fitting 3/8"
-[PP] Compression Fitting 1/2"
-[EE] VCR 1/2"
-[XX ] Customer Special fittings (please consult [d] for detail)
[s] –Seal Materials
-[ V ] Viton
-[ N ] Neoprene
Page 22 of 33
D07-[t]
[g,g,g] [r,r,r,r]
[f,f]
[s]
[m]
[d]
[m] –Mounting Position
-[ H ] Horizontal
-[ E ] HESD(Horizontal Edge Side Down)
-[ U ] Vertical Inlet Up
-[ D ] Vertical Inlet Down
[d] –Description
-[
] Default Value:
The letters on cover and tag:in Chinese
Differential Pressure: D07-9F: 20,30SLM: (0.05~0.30) MPa (7.3~43.5 psid)
50~150SLM: (0.10~0.30) MPa (14.5~43.5 psid)
200,250SLM: (0.15~0.30) MPa (21.8~43.5 psid)
D07-9FM: 20~100SLM: <0.02MPa (2.9 psid)
> 100SLM:<0.05MPa (7.3 psid)
Max Operating Pressure: 3 MPa
Calibration Temperature: (22±2)℃
D07-9F Setpoint Signal: Current 4~20mA
-[ S ] Customer Special Requirements:
For Example: The letters on cover and tag: in English;Customer Special Full Scale:29SLM;The proportion
of Mixture gases should be indicated: N2 (60%) + CO2(40%);Customers Differential Pressure:
(0.08 ~ 0.13) MPa;Customer Calibration Temperature: 40℃;D07-9F Setpoint Signal: Voltage
1~5VDC and other customers special requirements.
For Example: D07-9F013100LJJVHS
Page 23 of 33
D07-9F
013
100L JJ
V
H
S
Type Number:D07-9F MFC
Gas:N2
Flow Range Full Scale:100SLM
Inlet and Outlet Fittings:Compression Fittingφ10mm
Seal Materials:Viton
Mounting Position:Horizontal
Customer Special Requirements: For Example: The letters on cover and
Tag: in English;Differential Pressure:(0.08~0.13) MPa;
Customer Special fittings(According to drawing) ;Customer
Special Calibration Temperature:40℃.
Page 24 of 33
6.9 D07-19F, 19FM Ordering Code
D07-[t]
[g,g,g]
[r,r,r,r]
[f,f]
[s] [m]
[d]
[t] –Type Number
- [19F ] MFC
- [19FM] MFM
[g,g,g] –Gas
Please consult SEMI52-0302
For Example:
-[ 013 ] N2
-[ 007 ] H2
-[ 000 ] Mixture gases (please consult [d] for detail)
[r,r,r,r] –Flow Range Full Scale
- [ 005C]
- [ 010C]
- [ 020C]
- [ 030C]
- [ 050C]
- [ 100C]
- [ 200C]
- [ 300C]
- [ 500C]
- [ 001L]
- [ 002L]
- [ 003L]
- [ 005L]
- [ 010L]
- [ 020L]
- [ 030L]
- [ 000C]
5SCCM
10SCCM
20SCCM
30SCCM
50SCCM
100SCCM
200SCCM
300SCCM
500SCCM
1SLM
2SLM
3SLM
5SLM
10SLM
20SLM
30SLM
Customer Special Request (please consult [d] for detail)
Page 25 of 33
D07-[t]
[g,g,g]
[r,r,r,r]
[f,f]
[s] [m]
[d]
[f,f] –Inlet and Outlet Fittings
-[AA ]
-[GG]
-[DD ]
-[JJ]
-[BB]
-[CC ]
-[HH]
-[MM]
-[TT ]
-[RR]
-[XX ]
Compression Fittingφ3mm
Compression Fittingφ6mm
Compression Fittingφ8mm
Compression Fittingφ10mm
Compression Fitting1/8"
Compression Fitting 1/4"
Compression Fitting3/8"
VCR 1/4"
ф4(inner)×1hose
ф6(inner)×1hose
Customer Special fittings (please consult [d] for detail)
[s] –Seal Materials
-[ V ] Viton
-[ T ] Teflon
-[ N ] Neoprene
[m] –Mounting Position
-[ H ] Horizontal
-[ E ] HESD(Horizontal Edge Side Down)
-[ U ] Vertical Inlet Up
-[ D ] Vertical Inlet Down
[d] –Description
-[
] Default Value:
The letters on cover and tag:in Chinese
Differential Pressure:D07-19F:≤ 10SLM (0.1 ~ 0.5) MPa (14.5~72.5 psid)
> 10SLM (0.1 ~ 0.3) MPa (14.5~43.5 psid)
D07-19FM:<0.02MPa (2.9psid)
Max Operating Pressure:D07-19F:3 MPa (435.1 psig)
D07-19FM:10 MPa (1450.4 psig)
Calibration Temperature:(22±2)℃
Page 26 of 33
D07-19F Setpoint Signal: Current 4~20mA
-[ S ] Customer Special Requirements:
For Example:The letters on cover and tag:in English;Customer Special Full Scale:29SLM;The proportion
of Mixture gases should be indicated:N2 (60%) + CO2(40%);Customer Differential
Pressure:(0.05 ~ 0.3) MPa;Customer Calibration Temperature:40℃;D07-19F Setpoint
Signal:Voltage 1~5VDC and other customer special requirements.
For Example: D07-19F013500CGGVHS
D07-19F
013
500C
GG
V
H
S
Type Number:D07-19F MFC
Gas:N2
Flow Range Full Scale:500SCCM
Inlet and Outlet Fittings:Compression Fittingφ6mm
Seal Materials:Viton
Mounting Position:Horizontal
Customer Special Requirements:For Example:The letters on cover and
tag:in English;Differential Pressure:(0.05~0.3) MPa;
Customer Special fittings(According to drawing) ;Customer
Special Calibration Temperature:40℃.
Page 27 of 33
7.
TROUBLESHOOTING
Table 5. Failure Handling
NO.
1
FAILURE
CAUSE
There is no gas flow
1.1
Gas flow is shutting off, no gas
after turn on.
inputting
1.2 Valve control switch is shutoff
TREATMENT
Check the gas sourcing and make it open
Turn the switch to CONTROL or
PURGE
1.3
No setting signal
Check potentiometer or “In/Out” switch
setting position
2
3
4
1.4 Filter is blocked
* Change a new filter
1.5 Valve failure
Test or *clean valve
1.6
Circuit failure
*Repair the electric circuit
In case of turning on
2.1
Zero excursion
Adjust the zeroing potentiometer
but without gas flow,
2.2 Power supply failure
*Check Power supply voltages (24VDC)
the flow rate testing is
2.3 Sensor failure
*Replace the new sensor
error.
2.4
*Replace amplifier or repair circuit
In
case
of
valve
3.1
Amplifier or other circuits failure
Over- load pressure of input
Reduce the inlet operating pressure to
shutting off, there is
outlet, the differential pressure between
still heavy flow rate
inlet and outlet is beyond rating.
passing.
3.2 Pollution of valve
*Clean valve and replace seal ring
3.3 Valve failure
*Re-adjust solenoid control valve
The flow rate display
4.1 Pressure is lower than the rating
Heighten the inlet pressure
could not reach to full
4.2
*Clean bypass
scale flow rate value.
4.3 Setting voltage is less than5.00V
*Check the setting Voltage
4.4
*Repair circuit etc.
Block of bypass
Others trouble
decrease differential pressure.
Page 28 of 33
Continue To Table 5. Failure Handling
NO.
5
FAILURE
Fluctuant flow rate
6
Disturbed
frequency
sourcing
7
Flow display is inaccurate
8
9
10
by
high
power
There is still flow
passing while zero
setting.
The heavy flow is
passing
but
no
outputting display
Without gas flow, Zero
is
fluctuate
or
excursion happened.
Attention
CAUSE
5.1
Inlet pressure is too low or
instable
5.2. High internal gas resistance
5.3 Circuit or valve failure
6.1
Earth wire and zero wire
connecting of power supply is error
6.2 Signal reference port connecting
problem
6.3 Inter space disturbing
7.1 The range or unit of Display is not
matching to controller.
7.2 Bypass is polluted to cause the
flow rate excursion.
7.3 Zero excursion happened to be
instable.
8.1 Valves leakage
8.2 Zero point is moving less than 0
9.1
Block of sensor
9.2 Circuit failure
10.1 Sensor failure
TREATMENT
Heighten inlet pressure
Lessen internal resistance (The heavy gas
flow should have big valve open, widen
tube to parallel connecting gas bottles to
improve gas supply capacity.)
*Repair and adjust
Check the earth wire connection, should
be one port connection.
Check signal connecting wire.
*Re-adjust Display
*Clean MFC and re-calibrate it
* Change sensor and repair circuit
*Repair solenoid control valve
Adjust zero
*Repair and replace the new sensor
Should add filter to block gas dust.
Using special gas should be sure of
good tube sealing and gas dryness.
*Repair circuit
*Replace a new sensor
:
* Mark indicates that reparation and adjustment must be dealt under specialist advices。
Page 29 of 33
8.
WARRANTY & SERVICE
8.1 Product Warranty
a.
Our products are guaranteed within 2 years warranty against defects in materials and workmanship if used in
accordance with specifications and not subject to physical damage, contamination, alteration or retrofit.
b.
Buyers undertake to check and inspect the goods and to notify SevenStar of shipment incidents by fax, phone
or e-mail as soon as possible after receipting the goods.
c.
During the warranty period, products must only be repaired by Sevenstar or authorized SevenStar service
centers; otherwise, the SevenStar product warranty will be invalidated.
d.
Repairs will be performed free of charge during the two-year warranty period. If MFCs/MFMs are out of
warranty, SevenStar will notify the owner of replacement or repair costs before proceeding. Factory service and
repairs are guaranteed 90 days. The warranty excludes consumable materials and wear parts (in teflon, viton,
etc.).
e.
No MFC/MFM used with dangerous gas will be accepted for repair or warranty without a decontamination and
purge certificate.
8.2 Specific warranty requirements are as follows :
a.
Gas must be clean and particle-free, which means a filter( <30μ) must be fitted in the gas line upstream of the
MFC/MFM.
b.
Gas must comply with the pressure specifications, and never exceed the rated value.
c.
Process gas should be in line with the seal materials chosen in the order, especially in case of corrosive gas. We
shall not be responsible for any damage caused by changing process gas or choosing the wrong seal materials
in order.
d.
Electrical connection requirements are as follows: The system must be wired carefully: non-observance of the
pin out may irreversibly damage the electronic board inside the products. If user self scheme power supply of
MFCs, a stable and anti-jamming power supply is required, with ripple below 5mV.
e.
Gas connections: the fittings must be handled carefully. We guarantee that all fittings have been individually
inspected and are scratch-free.
f.
The MFC/MFM must not be dismounted: the MFC/MFM warranty will be invalidated if the seal between the
MFC/MFM block and cover is torn.
8.3 Service
Our product engineer will help you with issues related to operation, calibration, installation, process specification,
gas convention, etc. And we also provide you with technology support& maintenances, and products operation
training.
Please visit
mfc.sevenstar.com.cn
for relevant information and the locations of our service centers.
Page 30 of 33
9.
9.1
APPENDIX
Mass Flow Conversion Factors
Table 6.
GAS
Air
Ar
AsH3
BBr3
BCl3
BF3
B2H6
CCl4
CF4
CH4
C2H2
C2H4
C2H6
C3H4
C3H6
C3H8
C4H6
C4H8
C4H10
C5H12
CH3OH
C2H6O
C2H3Cl3
CO
CO2
C2N2
Cl2
D2
F2
GeCl4
Conversion Factors
GAS CODE
(SEMIE52-0302)
008
004
035
079
070
048
058
101
063
028
042
038
054
068
069
089
093
104
111
240
176
136
112
009
025
059
019
014
018
113
HEAT
( Cal/g ℃)
0.2400
0.1250
0.1168
0.0647
0.1217
0.1779
0.5020
0.1297
0.1659
0.5318
0.4049
0.3658
0.4241
0.3633
0.3659
0.3990
0.3515
0.3723
0.4130
0.3916
0.3277
0.3398
0.1654
0.2488
0.2017
0.2608
0.1145
1.7325
0.1970
0.1072
ρ
(g/l 0℃)
1.2930
1.7837
3.4780
11.1800
5.2270
3.0250
1.2350
6.8600
3.9636
0.7150
1.1620
1.2510
1.3420
1.7870
1.8770
1.9670
2.4130
2.5030
2.5930
3.2190
1.4300
2.0550
5.9500
1.2500
1.9640
2.3220
3.1630
0.1798
1.6950
9.5650
Factors
1.006
1.415
0.673
0.378
0.430
0.508
0.441
0.307
0.420
0.719
0.581
0.598
0.481
0.421
0.398
0.348
0.322
0.294
0.255
0.217
0.584
0.392
0.278
1.000
0.737
0.452
0.858
0.998
0.931
0.267
Page 31 of 33
Continue To Table 6. Conversion Factors
GAS
GeH4
H2
HBr
HCl
HF
HI
H2S
He
Kr
N2
Ne
NH3
NO
NO2
N2O
O2
PCl3
PH3
PF5
POCl3
SiCl4
SiF4
SiH4
SiH2Cl2
SiHCl3
SF6
SO2
TiCl4
WF6
Xe
GAS CODE
(SEMIE52-0302)
043
007
010
011
012
017
022
001
005
013
002
029
016
026
027
015
193
031
143
102
108
088
039
067
147
110
032
114
121
006
HEAT
( Cal/g ℃)
0.1405
3.4224
0.0861
0.1911
0.3482
0.0545
0.2278
1.2418
0.0593
0.2486
0.2464
0.5005
0.2378
0.1923
0.2098
0.2196
0.1247
0.2610
0.1611
0.1324
0.1270
0.1692
0.3189
0.1472
0.1332
0.1588
0.14890
0.1572
0.0956
0.0379
ρ
(g/l 0℃)
3.4180
0.0899
3.6100
1.6270
0.8930
5.707
1.5200
0.1786
3.7390
1.2500
0.9000
0.7600
1.3390
2.0520
1.9640
1.4270
6.1270
1.5170
5.6200
6.8450
7.5847
4.6430
1.4330
4.5060
6.0430
6.5160
2.8580
8.4650
13.2900
5.8580
Factors
0.569
1.010
1.000
1.000
1.000
0.999
0.844
1.415
1.415
1.000
1.415
0.719
0.976
0.741
0.709
0.992
0.358
0.691
0.302
0.302
0.284
0.348
0.599
0.412
0.340
0.264
0.687
0.206
0.215
1.415
Page 32 of 33
9.2 Conversion Factors Instruction
MFC and MFM are standard calibrated by N2 while it’s out of factory. Other gas calibrations can be approximated
by converting of conversion factors of our instruction. While using other gas operating:
One single gas: The conversion factors could find out in the users specification instruction.
A mixture of two or more gases: Assume there is “n” sorts of gases, could calculate the conversion factors C by the
following formula:
Basic Formula:
C=0.3106 N /ρ(Cp)
ρ — Density of the gas
Cp — Specific heat of the gas
N — Structure factors of gas-molecule (See Table 6.)
Table 6.
Gas-Molecule Composing factors
COMPOSITION
Single atom numerator
Double atom numerator
Tree atom numerator
Multi-atom numerator
EXAMPLE
Ar
He
CO
N2
CO2
NO2
NH3
C4H8
N VALUE
1.01
1.00
0.94
0.88
For mixture gases: N = N1 (ω1/ωT )+N2 (ω2/ωT ) + ···+ Nn (ωn/ωT )
Then:
0.3106 [N1 (ω1/ωT )+N2 (ω2/ωT ) + ···+ Nn (ωn/ωT )]
C = ————————————————————————
ρ1Cp1 (ω1/ωT )+ ρ2Cp2 (ω2/ωT )+ ···+ ρnCpn (ωn/ωT)
ω1 …ωn — The flow of single gas
ωT
— The flow of mixture gas
ρ1…ρn
— The density of single gas
CP1…CPn —Specific heat of the single gas
N1…Nn —Structure factors of gas-molecule (See Table 6.)
Attention
:
1) Standard:Temperature 273.15K (0 ºC ); Air Pressure— 101325 Pa (760mm Hg)
2) Please feel free to contact us if the request gas conversion factors could not be found in our appendix.
Page 33 of 33
Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co.,Ltd.
D07 Series
Mass Flow Controller
Beijing Sevenstar Electronics Co., Ltd.
Mass Flow Meter Subsidiary Co., Ltd.
Address:
P.O.BOX
Post code:
Tel:
Fax:
Homepage:
E-Mail:
No.1 Jiuxianqiao East Rd., Chaoyang District, Beijing, China
3#741, Beijing, China
100015
(+86)-10-64362939
(+86)-10-64361831 ext. 8491 or 8315
(+86)-10-64362923 or 64362939
http://mfc.sevenstar.com.cn
[email protected]
Shanghai Office: Room 1916, Unicom International Tower, NO.547 Tianmu West
Road, Zhabei District, Shanghai, 200070, China
Tel:
(+86)-21-33030324
Fax:
(+86)-21-63533265
Shenzhen Office: Room 712, Section B, Qiche Tower, No.45 Zhenhua Road,
Futian District, Shenzhen, China
Zip code:
518031
Tel:
(+86)-755-88290258
Fax:
(+86)-755-88294770
*Description may be changed following improvements to product. The information
contained in this document is subject to change without notice
*If there is any mistake in this uses manual, please feel free to contact us.
*©2010 Beijing Sevenstar Electronics Co.,Ltd.
All rights reserved.
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