User Manual MP 34E Rotation Stages

O p e r a t i n g
M a n u a l
User Manual MP 34E
Rotation Stages
M-038, M-035 Series
Operating and Service Information
This document refers to the products:
M-035.xx
M-036.xx
M-037.xx
M-038.xx
Rotary Stages, 60 mm
Rotary Stages, 100 mm
Rotary Stages, 60 mm, worm gear drive
Rotary Stages, 100 mm, worm gear drive
Release:
Release Date:
3.10
2002-08-29
© PI (Physik Instrumente) GmbH & Co.
D-76337 Waldbronn, Germany
EMail:info@pi.ws
FAX: (+49)7243-604-145
www.pi.ws
Rotation Stages
Operating Manual MP 34E
Table of Contents :
0.
Manufacturer Declarations ................................................... 2
1.
Precision Rotary Stages (Worm Gear Drive Types) .............. 3
1.1.
M-037 Rotation Stages ....................................................................... 3
1.1.1. M-037 Technical Data......................................................................... 4
1.1.2. Motion Parameters Setting with M-037.DG......................................... 6
1.2.
M-038 Rotation Stages ....................................................................... 7
1.2.1. M-038 Technical Data......................................................................... 8
1.2.2. Motion Control Parameters for M-038 ................................................. 9
1.2.3. Dimensions M-038 ............................................................................ 10
1.3.
Cable Connectors and Pin Assignment............................................. 12
1.3.1. M-037.DG, M-038.DG connectors .................................................... 12
1.3.2. M-037.PD, M-038.PD connectors ..................................................... 12
2.
Rotary Stages with Stepper Motors...................................... 13
2.1.
M-037.2S........................................................................................... 13
2.2.
M-038.2S........................................................................................... 13
2.3.
Stepper Motor Controller................................................................... 14
2.4.
Connector Pin Assignment ................................................................ 14
3.
Precision Rotary Stages (Tangent Arm Types)..................... 15
3.1.
Manual and PZT driven Rotary Stages............................................. 15
3.2.
DC Motor Driven Precision Rotation Stages ..................................... 16
3.3.
M-035.xx TECHNICAL DATA: ........................................................... 17
3.3.1. M-035 Dimensions ............................................................................ 18
3.4.
M-036.xx TECHNICAL DATA: ........................................................... 20
3.4.1. M-036 Dimensions ............................................................................ 21
4.
Mounting Brackets ............................................................... 23
© 1999-2002 by PI (Physik Instrumente ) GmbH, 76228 Karlsruhe
File: MP34E310.doc, 357376 bytes
PDate: 29.08.02 15:03
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Page 1
Rotation Stages
0.
Operating Manual MP 34E
Manufacturer Declarations
WARRANTY
Physik Instrumente (PI) warrants the products described in this
document to be free from defects in material and workmanship for a
period of 1 year from the date of shipment.
The warranty does not apply to defects resulting from misuse or any
product modification without PI´s express written consent.
This warranty does not apply to problems arising from normal wear.
SAFETY PRECAUTONS
Following safety precautions should be observed before operating
M-035 or M-036 rotary stages :
? The stages are motorized by powerful electrical motors and can
accelerate up to high speeds and can generate high forces. If handled
improperly, the stages may cause injuries. Be aware that failure of the
motor controller may drive the stage into a hard stop at high speed.
? When the stage is connected to the motor controller (and/or amplifier)
be aware that the stage could start an undesired move due to
whatever reason.
? To avoid injury, do not put any parts in the gap between the moving
stage and the body structure.
? Never put your finger at a place where the moving platform or any
connected object could possibly trap it !
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Rotation Stages
1.
Operating Manual MP 34E
Precision Rotary Stages (Worm Gear Drive Types)
Features
? Ultra-High Resolution
? Compact Design
? Continuous Rotation Range
? Preloaded Worm Drive for Zero Backlash
? DC Motor, Stepper Motor and Manual Versions
? 20 mm diam. Clear Aperture
1.1.
M-037 Rotation Stages
M-037 rotation stages are equipped with worm wheel drives providing continuous
rotation in both directions. An integrated spring pre-load eliminates backlash. The
worm gear ratio is 180:1, corresponding to a turntable rotation of 2 ° per revolution of
the drive shaft. DC motor and stepper motor drives are available.
M-037.DG features a 3 Watt DC motor with 29.6:1 backlash free gearhead and a
2000 counts/ revolution encoder, mounted on the motor shaft. M-037.2S is equipped
with a 2 phase stepper motor providing 20000 micro-steps / revolution. Coarse
position can be read from an adjustable scale ring on the outer edge of the turntable
graduated in 2 degree increments and a drive shaft mounted indicator with 0.1
degree graduations.
Models
M-037.00
Rotation Stage, diameter 60 mm, worm gear, Manual Drive
M-037.DG
Rotation Stage, diameter 60 mm, worm gear, closed loop DC
motor/ gearhead drive
M-037.PD
Rotation Stage, diameter 60 mm, worm gear, closed loop DC
motor direct Drive with integrated PWM amplifier
M-037.2S
Rotation Stage, diameter 60 mm, worm gear, 2-phase stepper
motor drive
M-037.00
M-037.DG
Dwg:M03700.gif, M037DG.gif
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Rotation Stages
1.1.1.
Operating Manual MP 34E
M-037 Technical Data
C-862
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C-862
Physik Instrumente (PI)
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Rotation Stages
Operating Manual MP 34E
M-037.00
M-037.00
M-037.PD
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Rotation Stages
1.1.2.
Operating Manual MP 34E
Motion Parameters Setting with M-037.DG
using C-842 Motor Controllers with
Stage
Parameter
M-037.DG
M-037.PD
with Gear Drives
with PWM amplifier
Recommended
Value
Operating Range
Recommended
Value
Operating Range
p –term (DP)
DP250
DP50...DP300
DP200
DP150...DP250
i –term (DI)
DI40
DI0...DI50
DI10
DI0...DI50
d –term (DD)
DD800
DD0...DD1200
DD300
DD0...DD500
L – limit (DL)
DL2000
DL0...DL2000
DL2000
DL0...DL2000
Velocity (SV)
SV120000
SV1...SV190000
SV120000
SV1...SV240000
Acceleration (SA)
SA800
SA20...SA1200
SA450
SA10...SA600
see MS45E Operating Manual for detailed command survey
using C-844 Motor Controllers with
Stage
Parameter
M-037.DG
M-037.PD
with Gear Drives
with PWM amplifier
Recommended Value
Operating Range
Recommended Value
Operating Range
p-i-d setting
PID 250,40,800
P : 50..350
i : 0..50
d : 0..1200
PID 200,10,300
P : 150..250
i : 0..50
d : 0..500
i –limit
LIM:IERR 2000
0..2000
LIM:IERR 2000
0..2000
Velocity
MVEL 120000
0..190000
MVEL 120000
0..240000
Acceleration (SA)
ACC 300000
0..800000
ACC 500000
0..1500000
see MS52E Operating Manual for detailed command survey
using C-862 Mercury Controllers with
Stage
Parameter
M-037.DG
M-037.PD
with Gear Drives
with PWM amplifier
Recommended
Value
Operating Range
Recommended
Value
Operating Range
p –term (DP)
DP250
50...DP300
DP250
50...DP250
i –term (DI)
DI40
0...50
DI40
0...50
d –term (DD)
DD800
0...1200
DD800
0...1200
L – limit (DL)
DL2000
0...2000
DL2000
0...2000
Velocity (SV)
SV120000
1...190000
SV120000
1...220000
Acceleration (SA)
SA800000
1000...2200000
SA1500000
1000...3000000
see MS74E Operating Manual for detailed command survey
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Rotation Stages
1.2.
Operating Manual MP 34E
M-038 Rotation Stages
Features:
? Continuous Rotation
? Preloaded Worm Drive for Zero Backlash
? DC Motor, Stepper Motor and Manual Versions
? 30 mm diameter Clear Aperture
M-038 rotation stages are equipped with worm wheel drives providing continuous
rotation in both directions. An integrated spring pre-load eliminates backlash. The
worm gear ratio is 180:1, corresponding to a turntable rotation of 2° per revolution of
the drive shaft. DC motor and stepper motor drives are available.
M-038.DG features a 3 Watt DC motor with 29.6:1 backlash free gearhead and a
2000 counts/ revolution encoder, mounted on the motor shaft. M-038.2S is equipped
with a 2 phase stepper motor providing 20000 micro-steps / revolution. Coarse
position can be read from an adjustable scale ring on the outer edge of the turntable
graduated in 2 degree increments and a drive shaft mounted indicator with 0.1
degree graduations.
M-038.00
Rotation Stage, diameter 100 mm, worm gear, manual drive
M-038.DG
Rotation Stage, diameter 100 mm, worm gear, closed loop DC
motor/ gearhead drive
M-038.PD
Rotation Stage, diameter 100 mm, worm gear, closed loop DC
motor direct drive with integrated PWM amplifier
M-038.2S
Rotation Stage, diameter 100 mm, worm gear, 2-phase stepper
motor drive
M-038.00
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M-038.DG
Physik Instrumente (PI)
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Rotation Stages
1.2.1.
Operating Manual MP 34E
M-038 Technical Data
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Rotation Stages
1.2.2.
Operating Manual MP 34E
Motion Control Parameters for M-038
using C-842 Motor Controllers with
Stage
Parameter
M-038.DG
M-038.PD
(gear drive)
(PWM amplifier)
Recommended
Value
Operating Range
Recommended
Value
Operating Range
p –term (DP)
DP250
DP50...DP300
DP200
DP150...DP250
i –term (DI)
DI40
DI0...DI50
DI10
DI0...DI50
d –term (DD)
DD800
DD0...DD1200
DD300
DD0...DD500
L – limit (DL)
DL2000
DL0...DL2000
DL2000
DL0...DL2000
Velocity (SV)
SV120000
SV1...SV190000
SV120000
SV1...SV240000
Acceleration (SA)
SA800
SA20...SA1200
SA450
SA10...SA600
see MS45E Operating Manual for detailed command survey
using C-844 Motor Controllers with
Stage
Parameter
M-038.DG
M-038.PD
(gear drive)
(PWM amplifier)
Recommended Value
Operating Range
Recommended Value
Operating Range
p-i-d setting
PID 250,40,800
P : 50..350
i : 0..50
d : 0..1200
PID 200,10,300
P : 150..250
i : 0..50
d : 0..500
i –limit
LIM:IERR 2000
0..2000
LIM:IERR 2000
0..2000
Velocity
MVEL 120000
0..190000
MVEL 120000
0..240000
Acceleration (SA)
ACC 300000
0..800000
ACC 500000
0..1500000
see MS52E Operating Manual for detailed command survey
using C-862 Mercury Controllers with
Stage
Parameter
M-038.DG
M-038.PD
(gear drive)
(PWM amplifier)
Recommended
Value
Operating Range
Recommended
Value
Operating Range
p –term (DP)
DP250
50...DP300
DP250
50...DP250
i –term (DI)
DI40
0...50
DI40
0...50
d –term (DD)
DD800
0...1200
DD800
0...1200
L – limit (DL)
DL2000
0...2000
DL2000
0...2000
Velocity (SV)
SV120000
1...190000
SV120000
1...220000
Acceleration (SA)
SA800000
1000...2200000
SA1500000
1000...3000000
see MS74E Operating Manual for detailed command survey
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Rotation Stages
1.2.3.
Operating Manual MP 34E
Dimensions M-038
M-038.00
M-038.DG
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Rotation Stages
Operating Manual MP 34E
M-038.PD
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Rotation Stages
1.3.
1.3.1.
Operating Manual MP 34E
Cable Connectors and Pin Assignment
M-037.DG, M-038.DG connectors
D-sub 15 pin connector (m)
1.3.2.
PIN
Assignment
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
n.c.
input: Motor(+)
internal use
input: +5V (Encoder and logic supply)
output: Limit Switch positive
GND
output: Encoder A (inverted)
output: Encoder B (inverted)
input: Motor (-)
GND (power)
internal use
output: Limit Switch negative
output: Reference signal
output: Encoder A (standard)
output: Encoder B (standard)
M-037.PD, M-038.PD connectors
D-sub 15 pin connector (m)
PIN
Assignment
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
input +5 to +12V, enable PWM amplifier
input: Motor(+)
input: PWM magnitude
input: +5V (Encoder and logic supply)
output: Limit signal positive
GND
output: Encoder A (inverted)
output: Encoder B (inverted)
input: Motor (-)
GND (power)
input: PWM sign
output: Limit signal negative
output: position reference signal
output: Encoder A (standard)
output: Encoder B (standard)
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Rotation Stages
Operating Manual MP 34E
2.
Rotary Stages with Stepper Motors
2.1.
M-037.2S
2.2.
M-038.2S
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Rotation Stages
2.3.
Operating Manual MP 34E
Stepper Motor Controller
M-037.2S and M-038.2S stages are equipped with 2-phase stepper motors. In
conjunction with the C-600 Stepper Motor Controller high resolution microstepping
achieves an angular resolution of 0.36 arc seconds.
2.4.
Connector Pin Assignment
Type: DSub15(m)
Pin 01: Phase 1A (brown)
Pin 09: Phase 1B (orange)
Pin 02: Phase 2A (red)
Pin 10: Phase 2B (yellow)
Pin 03: n.c.
Pin 11: n.c.
Pin 04: n.c.
Pin 12: n.c.
Pin 05: n.c.
Pin 13: n.c.
Pin 06: input +5V
Pin 14: out: Limit signal (positive side)
Pin 07: GND
Pin 15: out: Reference Signal
Pin 08: out: Limit Signal (negative side)
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Rotation Stages
Operating Manual MP 34E
3.
Precision Rotary Stages (Tangent Arm Types)
3.1.
Manual and PZT driven Rotary Stages
M-035 / M-036 series precision rotation stages feature high resolution, excellent
repeatability and minimum wobble. The stages are equipped with double
? 360 ° Coarse Range, 19° Fine Range
? Precision Micrometer Drive
? Piezo Option for High Resolution, Dynamic Scanning and Tracking
? 20 mm Æ Clear Aperture
M-035 series precision rotation stages feature high resolution, excellent repeatability
and minimum wobble. The stages are equipped with double ball bearings for
minimum backlash and high load capacity. Both the rotation platform and the scale
ring (graduated in 2 degree increments) can be independently coarse positioned
over 360 degrees and then be locked by screws.
The basic version, M-035.50, is equipped with a micrometer drive and a zero
backlash magnetic coupling. The micrometer provides a positioning range of ±9.5
degrees (click here for information on how to convert linear input into rotation).
The versions M-035.PS and M-035.P0 feature additional piezoelectric fine
adjustment over a range of ±520 µrad. They also allow dynamic operation such as
scanning or tracking. The .PS version is equipped with a closed loop PZT drive
(model P-841.30), while the .P0 version has an open loop PZT drive (model P840.30). Both drives provide a linear range of 45 microns and sub-nanometer linear
resolution (see "PZT Actuators" section for further details and recommended drivers)
Upgrades:
M-035 stages without PZT drives or DC motor drives can be upgraded at a later
date.
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Rotation Stages
3.2.
Operating Manual MP 34E
DC Motor Driven Precision Rotation Stages
? Closed Loop DC Motor with 1 µrad Resolution
? Piezo Option for High Resolution, Dynamic Scanning and Tracking
? 360 ° Coarse Range, 12 ° Fine Range
? 20 mm Æ Clear Aperture
? Standard Limit Switches
M-035 and M-036 series rotary stages feature high resolution, excellent repeatability
and minimum wobble. The stages are equipped with double ball bearings for
minimum backlash and high load capacity. Both the rotation platform and the scale
ring (graduated in 2 degree increments) can be independently coarse positioned
over 360 degrees and then be locked by screws.
The basic version, M-035.D0, is equipped with a DC servo motor drive (model M222.20) for further details and recommended motor controller) providing a positioning
range of ± 6.3 degrees. A set of limit switches eliminates the possibility of overtravel.
(See page 7.45 for information on how to convert linear input into rotation).
The versions M-035.DS and M-035.DP provide additional piezoelectric fine
adjustment over a range of ±520 µrad. The piezoelectric fine adjustment also allows
dynamic operation such as scanning or tracking. The .DS version is equipped with a
closed loop PZT drive (model P-841.30), while the .DP version comes with an open
loop PZT drive (model P-840.30). Both drives provide a linear range of 45 microns
and sub-nanometer linear resolution (see "PZT Actuators" section for further details
and recommended drivers).
ORDERING INFORMATION:
M-035.50
M-035.P0
M-035.PS
M-035.D0
M-035.DP
M-035.DS
M-036.00
M-036.P0
M-036.PS
Rotation Stage, 60 mm, Micrometer Drive
Rotation Stage, 60 mm, Micrometer + PZT Drive
Rotation Stage, 60 mm, Micrometer + Closed Loop PZT Drive
Rotation Stage, 60 mm, DC Motor Drive
Rotation Stage, 60 mm, DC Motor + PZT Drive
Rotation Stage, 60 mm, DC Motor + Closed Loop PZT Drive
Rotation Stage, 100 mm, Micrometer Drive
Rotation Stage, 100 mm, Micrometer + PZT Drive
Rotation Stage, 100 mm, Micrometer + Closed Loop PZT Drive
UPGRADES:
M-035.U0
M-035.US
M-035.UD
M-036.U0
M-036.US
M-036.UD
Upgrade Kit with Open Loop PZT Drive
Upgrade Kit with Closed Loop PZT Drive
Factory Installed Upgrade Kit with DC Motor Drive
Upgrade Kit with Open Loop PZT Drive
Upgrade Kit with Closed Loop PZT Drive
Factory Installed Upgrade Kit with DC Motor Drive
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Rotation Stages
3.3.
Operating Manual MP 34E
M-035.xx TECHNICAL DATA:
Common specifications:
Rotation Range (coarse)
Rotation / Linear stroke:
Tangent Arm Length:
Wobble:
Maximum axial force:
Maximum torque (Tx, Ty)
Maximum torque CW:
Maximum torque CCW:
360 deg
22.7 µrad/µm
44 mm
< 150 µrad
± 300 N
± 3000 mNm
300 mNm
50 mNm
Minimum incremental motion
using PZT drives:
1 µrad
Models M-035
.50
.P0
.PS
.D0
.DP
.DS
Rotation range
(motorized PZT/DC) [deg]
±9.5
±9.5
±9.5
±6.3
±6.3
±6.3
Rotation range (PZT) [µrad]
---
±520
±520
---
±520
±520
Manual micrometer
M-662
M-662
M-662
---
---
---
PZT drive
---
P-840.30
P-840.30
---
P-840.30
P-840.30
M-222.20 M-222.20 M-222.20
Motor drive
Weight [kg]
0.4
0.5
0.52
0.6
0.65
For motion controller parameter setting see MP31E Operating Manual.
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0.67
Rotation Stages
3.3.1.
Operating Manual MP 34E
M-035 Dimensions
M035-50.hgl
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Rotation Stages
Operating Manual MP 34E
M035d0.hgl
M035dp.hgl
M035px.hgl
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Rotation Stages
3.4.
Operating Manual MP 34E
M-036.xx TECHNICAL DATA:
Common specifications:
Rotation Range (coarse)
Rotation / Linear stroke:
Tangent Arm Length:
Wobble:
Maximum axial force:
Maximum torque (Tx, Ty)
Maximum torque CW:
Maximum torque CCW:
360 deg
15 µrad/µm
66 mm
< 75 µrad
± 400 N
± 6000 mNm
450 mNm
75 mNm
Minimum incremental motion
using PZT drives:
1 µrad
Models M-036
.00
.P0
.PS
.D0
.DP
.DS
Rotation range
(motorized PZT/DC) [deg]
±10.5
±10.5
±10.5
±10.5
±10.5
±10.5
Rotation range (PZT) [µrad]
---
±350
±350
---
±350
±350
Manual micrometer
M-624
M-624
M-624
---
---
---
PZT drive
---
P-840.30
P-840.30
---
P-840.30
P-840.30
M-224.20 M-224.20 M-224.20
Motor drive
Weight [kg]
0.85
0.95
0.97
1.05
1.15
For motion controller parameter setting see MP31E Operating Manual.
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1.17
Rotation Stages
3.4.1.
Operating Manual MP 34E
M-036 Dimensions
M036-00.hgl
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Rotation Stages
Operating Manual MP 34E
M036d0.hgl
M036dp.hgl
M036px.hgl
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Rotation Stages
4.
Operating Manual MP 34E
Mounting Brackets
M-052 Mounting Bracket
M-053 Mounting Bracket
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