PDC-32G Plasma Cleaner

www.harrickplasma.com
PLASMA CLEANER
USER’S MANUAL FOR THE BASIC PLASMA CLEANER
(AND OPTIONAL PLASMAFLO)
HARRICK PLASMA
Harrick Plasma • 120 Brindley St. • Ithaca, NY 14850
(USA) 800-640-6380 • (Intl) 607-272-5070 • (Fax) 607-272-5076
TABLE OF CONTENTS
General Information
Safety Information ......................................................................................................................
Unpacking ...................................................................................................................................
Technical Support .......................................................................................................................
Feedback ....................................................................................................................................
1
1
1
1
About the Plasma Cleaner
Principle of Operation .................................................................................................................
Getting Started ............................................................................................................................
2
3
Processing with Room Air
Setup ..........................................................................................................................................
Operation ....................................................................................................................................
4
4
Processing with Gas
Setup ..........................................................................................................................................
Operation ....................................................................................................................................
6
7
Using the Optional PlasmaFlow
Getting Ready ............................................................................................................................. 9
Setup .......................................................................................................................................... 10
Operation .................................................................................................................................... 11
Troubleshooting .................................................................................................................. 13
Appendix A
Exchanging Needle Valves ......................................................................................................... 14
Appendix B
Replacing the Chamber .......................................................................................... 16
Appendix C
Optional and Replacement Parts ............................................................................... 17
Appendix D
Specifications .............................................................................................................................. 18
PDC32G-M-03
GENERAL INFORMATION
SAFETY INFORMATION
UNPACKING
The Plasma Cleaner is designed for safe and efficient
operation when used properly and in accordance with this
manual. Failure to observe the following precautions could
result in serious personal injury:
The plasma cleaner is an electrical instrument; to
avoid electric shock, please observe all standard
precautions, such as not operating the device near
water and operating the device at appropriate line
voltage and frequency.
Do not remove cover plates or housing, except by a
certified electronics technician.
Do not open the plasma cleaner door when the
chamber is under vacuum.
Do not use the plasma cleaner near flammable
materials.
Do not plug vacuum pumps whose input electrical
current requirement exceeds 7 Amps into the Plasma
Cleaner.
With respect to vacuum pumps, please refer to the
pump user’s manual for specific precautions.
If oxygen is used as the process gas in concentrations
at or above its flammability threshold, an oxygen
service pump must be used.
If toxic gases or gases that ionize to toxic products or
intermediates are used as the process gas, an efficient
exhaust filter must be used.
Before installing the Plasma Cleaner make sure all the parts
on the included check-off list are present. If any parts are
missing or damaged, contact Harrick Plasma immediately.
TECHNICAL SUPPORT
For additional information please contact us at (USA) 800640-6380 / (Intl) 607-272-5070 between 9 a.m. and 5 p.m.
EST; or e-mail your questions to: info@harrickplasma.com.
FEEDBACK
Your comments and suggestions are welcome. Please
send them to:
Harrick Plasma
120 Brindley St.
Ithaca, NY 14850
(USA) 800-640-6380
(Intl) 607-272-5070
(Fax) 607-272-5076
info@harrickplasma.com
1 of 18
ABOUT THE PLASMA CLEANER
PRINCIPLE OF OPERATION
When a gas under sufficiently low pressure is subjected to a
high frequency oscillating electromagnetic field, the
accelerated ions in the gas collide with the gas molecules
ionizing them and form plasma.
The ionized gas particles in the plasma interact with solid
surfaces placed in the same environment by:
• Removing organic contamination from surfaces.
The high energy plasma particles combine with the
contaminant to form carbon dioxide (CO2) or
methane (CH4).
• Modifying or enhancing the physical and
chemical characteristics of surfaces.
A chemical reaction occurs between the plasma gas
molecules and the surface undergoing treatment.
The operation of the Plasma Cleaner is simple. The sample
is placed in the reaction chamber. Low flow rates (typically
5-10 SCFH) of process gas at low pressure (typically 200600 mtorr) are subjected to RF (radio frequency)
electromagnetic radiation at 8-12 MHz creating plasma, at
near ambient temperatures, within the chamber.
The type of interaction between the plasma and the surface
depends on parameters such as the intensity and frequency
of the RF power used to excite the plasma, the type of
gas(es) that are ionized, the pressure and flow rate of the
gas(es), the type of sample and the amount of time the
surface is exposed to the plasma.
2 of 18
ABOUT THE PLASMA CLEANER
Before starting, take a few moments to familiarize
yourself with the Plasma Cleaner by looking at the
drawings of the front and back of the unit (Figures 1, 2).
GETTING STARTED
Needle Valve
PLASMA
CLEANER / STERILIZER
PDC - 32G
Plasma Cleaner
Door
RF Switch
LOW MED
OFF
HI
RF LEVEL
ON
Plasma Cleaner
Switch
POWER
PUMP
OFF
ON
RF
OFF
Vacuum Pump
Switch
Figure 1 • Plasma Cleaner Front View (110V Model)
Fitting for vacuum
pump
Vacuum Pump
Fuse
Plasma Cleaner
Fuses
Plasma Cleaner
Outlet
Vacuum Pump
Outlet
Figure 2 • Plasma Cleaner Back View (110V Model)
3 of 18
PROCESSING WITH ROOM AIR
SETUP
To setup the Plasma Cleaner for processing with room air
(Figure 3):
• Connect the fitting at the rear of the Plasma
Cleaner (Figure 2) to the vacuum pump with ½’’
ID vacuum tubing.
• Tighten hose clamps over the tubing at each end.
• Plug the Plasma Cleaner in a grounded outlet.
• Plug the vacuum pump into the vacuum pump
outlet on the back of the Plasma Cleaner (110V
model, Figure 2) or into another outlet (220V
model).
CAUTION:
The Plasma Cleaner is designed for vacuum pumps requiring up to 7 amps.
DO NOT plug a vacuum pump whose input electrical current requirement exceeds 7 amps
into the plasma cleaner pump outlet.
Plasma Cleaner
Vacuum
Pump
Air
Figure 3 • Diagram for Room Air Processing
OPERATION
EVACUATING THE CHAMBER
•
•
•
Put the sample in the Plasma Cleaner chamber.
Hold the Plasma Cleaner door against the
vacuum chamber.
Turn on the vacuum pump switch on the front of
the Plasma Cleaner (110V model, Figure 1) or on
the vacuum pump (220V model). It will take a few
minutes to evacuate the air in the Plasma
Cleaner chamber. The vacuum will hold the
Plasma Cleaner door in place.
4 of 18
PROCESSING WITH ROOM AIR
•
BLEEDING IN AIR
•
•
GENERATING PLASMA
•
•
NOTE:
PROCESSING
Turn on the Plasma Cleaner switch on the front
of the Plasma Cleaner (Figure 1).
Select the appropriate RF level.
Look down at an angle through the holes in the
top of the Plasma Cleaner and wait until a
purplish glow is observed. This indicates that
plasma has been generated.
The RF power level used should be set at the lowest
level, needed to initiate a glow discharge.
•
•
•
VENTING THE CHAMBER
To bleed room air into the chamber, slightly open
the needle valve and allow the air to enter the
Plasma Cleaner chamber.
Close the needle valve.
•
•
•
•
•
Subject the sample to plasma for a few minutes.
Upon completion of cleaning set the RF level to
OFF.
Turn off the Plasma Cleaner.
Turn off the vacuum pump.
Hold the door and slowly open the needle valve
to allow air to enter the chamber.
Vent the chamber until atmospheric pressure is
reached and remove the door.
Close the needle valve.
Take out the sample.
CAUTION:
If the reaction chamber is not vented immediately, oil may back stream from the vacuum
pump and contaminate the system. We recommend the use of vacuum pump with an
anti suck back feature, such as that optionally provided by Harrick Plasma.
Do not open the door when the chamber is under vacuum since this will damage the glass
chamber.
5 of 18
PROCESSING WITH GAS
To setup the Plasma Cleaner for processing with process gas,
refer to the diagram below (Figure 4) and follow these steps:
• Connect the fitting at the rear of the Plasma Cleaner
(Figure 2) to a vacuum pump with ½’’ ID vacuum tubing
and hose clamps over the tubing at each end.
• Connect the needle valve on the Plasma Cleaner door
(Figure 1) to the gas source through a pressure regulator.
• Plug the Plasma Cleaner in a grounded outlet.
• Plug the vacuum pump into the vacuum pump outlet on
the back of the Plasma Cleaner (Figure 2) or into a
second outlet.
SETUP
CAUTION:
The Plasma Cleaner is designed for vacuum pumps requiring up to 7 amps.
DO NOT plug a vacuum pump whose input electrical current requirement exceeds 7 amps
into the plasma cleaner pump outlet.
Plasma Cleaner
Vacuum
Pump
Process
Gas
G
a
s
Figure 4 • Diagram for Processing with Gas
NOTE:
To be able to monitor and control the pressure and rate of flow of
the process gas, we recommend connecting the optional
PlasmaFlo (Figure 6).
CAUTION:
For processing with pure oxygen, make sure that you use an oxygen compatible vacuum
pump. The optional Harrick Plasma oil-based vacuum pumps are NOT oxygen compatible.
The hydrocarbon pump oil mist can react with the ozone formed producing a potentially
explosive combination. We do offer oxygen service pumps for use with oxygen process
gas; please inquire with Harrick Plasma.
6 of 18
PROCESSING WITH GAS
OPERATION
Purging of the gas line with the process gas is
recommended if there is a possibility that the gas line
contains unwanted substances.
• Open the gas flow.
• Set the process gas regulator to 10 psi.
• Open the needle valve.
• With the Plasma Cleaner door off, purge the gas
line for a few minutes to flush out contaminants.
• Close the needle valve.
PURGING THE GAS LINE/S
EVACUATING THE CHAMBER
•
•
•
Put the sample in the Plasma Cleaner chamber.
Hold the Plasma Cleaner door against the
vacuum chamber.
Turn on the vacuum pump switch on the front of
the Plasma Cleaner (Figure 1). It will take a few
minutes to evacuate the air from the reaction
chamber of the Plasma Cleaner. The vacuum will
hold the Plasma Cleaner door in place.
BLEEDING IN PROCESS GAS
•
To bleed process gas into the chamber, slowly
open the needle valve and allow the gas to flow
for a few minutes.
GENERATING PLASMA
•
•
Close the needle valve.
Turn on the Plasma Cleaner switch on the front
of the Plasma Cleaner (Figure 1).
Select the appropriate RF level.
Wait until a purplish glow is observed. This
indicates that plasma has been generated.
•
•
NOTE:
The RF power level used should be set at the lowest
level, just enough to initiate a glow discharge.
Gas pressures in the vicinity of ~ 600 mtorr and low to
medium RF level are a reasonable starting point, but
develop a set of conditions which work best for the type
of samples you most often use.
7 of 18
PROCESSING WITH GAS
•
PLASMA PROCESSING
VENTING THE CHAMBER
Carefully open the needle valve just enough to
bleed process gas into the reaction chamber
without extinguishing the plasma.
NOTE:
If the plasma disappears when bleeding in process gas,
the needle valve should be closed to allow plasma to
form and then opened very slightly making sure not to
loose the purplish glow.
• Subject the sample to plasma processing for the
desired duration.
• Upon completion of processing turn the RF level
to OFF.
• Turn off the Plasma Cleaner.
NOTE:
By selection of the process gas (or mixture of gases), its
plasma energy (RF power), and the processing duration,
the nature and extent of the surface interactions can be
tailored to your application.
•
•
•
•
•
Turn off the vacuum.
Hold the door and vent the chamber for a few
minutes.
When atmospheric pressure is reached remove
the door.
Close the needle valve.
Take out the sample.
CAUTION:
If the Plasma Cleaner chamber is not vented immediately, oil may back stream from the
vacuum pump and contaminate the system. We recommend the use of vacuum pump
with an anti suck back feature, such as that optionally provided by Harrick Plasma
. Do not open the door when the chamber is under vacuum since this will
damage the glass chamber.
8 of 18
USING THE OPTIONAL PLASMAFLO
Before starting take a few moments to familiarize
yourself with the PlasmaFlo by looking at the drawings
of the front and back views (Figures 5, 6).
GETTING READY
Process Gas
Flowmeter (2)
1
2
PRESSURE
Vacuum Gauge
F
L
O
W
M
E
T
E
R
S
Process Gas
Output
Process Gas
Input (2)
Thermocouple
Outlet
INPUT
ON
TC
1
OUTPUT
2
OFF
PlasmaFlo
Figure 5 • The PlasmaFlo Front View
PlasmaFlo Fuses (2)
PlasmaFlo Outlet
P
O
W
E
R
110 V
AC
Figure 6 • The PlasmaFlo Back View
9 of 18
PlasmaFlo
Switch
USING THE OPTIONAL PLASMAFLO
To setup the Plasma Cleaner for cleaning with gases
using the optional PlasmaFlo (Figures 5, 6), refer to the
diagram below (Figure 7) and follow these steps:
• Connect the fitting at the rear of the Plasma
Cleaner (Figure 2) to the vacuum pump with ½’’ ID
vacuum tubing and hose clamps over the tubing at
each end.
• Connect the needle valve on the Plasma Cleaner
door to the output on the front of the PlasmaFlo.
• Plug the thermocouple gauge attached to the
Plasma Cleaner door into the thermocouple outlet
on the front of the PlasmaFlo.
SETUP
NOTE:
If the PlasmaFlo was purchased separately from the
Plasma Cleaner, the regular needle valve needs to be
replaced with the needle valve with the attached
thermocouple gauge (See Appendix A).
Plasma Cleaner
PlasmaFlo
Vacuum
Pump
Vacuum Gauge
Connection
Process
Gas
G
a
s
G
a
s
1
2
Figure 7 • Diagram for Processing Using the PlasmaFlo
10 of 18
USING THE OPTIONAL PLASMAFLO
•
•
•
Connect the gas source/s to the input/s on the
front of the PlasmaFlo.
Plug the Plasma Cleaner and the PlasmaFlo into
grounded outlets.
Plug the vacuum pump into the vacuum pump
outlet on the back of the Plasma Cleaner.
CAUTION:
The Plasma Cleaner is designed for vacuum pumps requiring up to 7 amps.
DO NOT plug a vacuum pump whose input electrical current requirement exceeds 7 amps
into the plasma cleaner pump outlet.
OPERATION
PURGING THE GAS LINE/S
EVACUATING THE CHAMBER
Purging of the gas line with the process gas is
recommended if there is a possibility that the gas
line contains unwanted substances.
• Open the gas flow.
• Set the process gas regulator to 10 psi.
• Open the needle valve.
• With the Plasma Cleaner door off, purge the gas
line a few minutes to flush out any contaminants.
• Close the needle valve.
•
•
•
•
Put the sample in the Plasma Cleaner chamber.
Hold the Plasma Cleaner door against the
vacuum chamber.
Turn on the PlasmaFlo switch on the front of the
PlasmaFlo.
Turn on the vacuum pump switch on the front of
the Plasma Cleaner (Figure 1). It will take a few
minutes to evacuate the air from the reaction
chamber of the Plasma Cleaner. The vacuum will
hold the Plasma Cleaner door in place. Monitor
the pressure on the vacuum gauge on the
PlasmaFlo.
11 of 18
USING THE OPTIONAL PLASMAFLO
BLEEDING IN PROCESS GAS/S
•
To bleed process gas/s into the chamber, slowly
open the needle valve. Adjust the amount of
gas/s using the flowmeter control knobs on the
PlasmaFlo.
GENERATING PLASMA
•
Turn on the Plasma Cleaner switch on the front
of the Plasma Cleaner (Figure 1).
Select the appropriate RF level. Wait until a
purplish glow is observed. This indicates that
plasma has been generated.
•
NOTE:
The RF power level used should be set at the lowest
level, just enough to initiate a glow discharge. Gas
pressures in the vicinity of ~ 600 mtorr and low to
medium RF level are a reasonable starting point, but
develop a set of conditions which work best for the type
of samples you most often use.
•
PLASMA PROCESSING
•
•
NOTE:
VENTING THE CHAMBER
Subject the sample to plasma processing for a
few minutes.
Upon completion of processing set the RF level
to OFF.
Turn off the Plasma Cleaner.
By selecting the process gas (or gas mixture) and plasma
energy (RF power), the nature and extent of the surface
interactions can be tailored for your application.
•
•
•
•
•
Turn off the vacuum.
Hold the door and vent the chamber for a few
minutes.
When atmospheric pressure is reached remove
the door.
Close the needle valve.
Remove the sample.
CAUTION:
If the Plasma Cleaner chamber is not vented immediately, oil may back stream from the
vacuum pump and contaminate the system. . We recommend the use of vacuum pump
with an anti suck back feature, such as that optionally provided by Harrick Plasma
. Do not open the door when the chamber is under vacuum since this will
damage the glass chamber.
12 of 18
TROUBLESHOOTING
MALFUNCTION
POSSIBLE CAUSES
CORRECTIVE ACTIONS
plasma fails to form in
the chamber
the electronics fails to
deliver power to RF
coil
Place the miniature fluorescent bulb supplied
with the Plasma Cleaner into the chamber.
Leave the door open and turn the RF level to
HIGH. If the bulb glows, the electronic system is
functioning properly. If it does not, check the
fuses at the back of the unit. Replace any that
are defective and repeat the test with the
fluorescent bulb. If this test still fails, contact
Harrick Plasma.
the vacuum system
fails to sufficiently
evacuate
the
chamber.
If you are using a vacuum pump not supplied by
Harrick Plasma, make sure that your vacuum
pump is capable of reaching a pressure of 200
mtorr or less. Then check that the vacuum hose
is properly attached, the Plasma Cleaner door is
properly seated, the o-rings are in place, and
that the window is intact. All o-rings should be
clean and free of defects.
13 of 18
APPENDIX A
EXCHANGING
NEEDLE VALVES
To replace the standard needle valve with the needle valve with the
attached thermocouple gauge:
• Using a 9/16” end wrench or an adjustable wrench, unscrew
the regular needle valve(Figure 8).
Figure 8 • Removing the Standard Needle Valve
14 of 18
APPENDIX A
•
•
Replace it with the needle valve with the attached
thermocouple (Figure 9).
Tighten the needle valve with a 7/16” end wrench or an
adjustable wrench.
Figure 9 • Installing the Needle Valve with the
Thermocouple Gauge
15 of 18
APPENDIX B
REPLACING THE CHAMBER
To replace the Plasma Cleaner chamber:
• Disconnect the tubing to the chamber.
• Loosen the thumbscrew on the fitting for the
vacuum pump on the back of the Plasma Cleaner
(Figure 2).
• Pull out the glass chamber.
• Slide in the new chamber.
• Tighten the thumbscrew on the back of the
Plasma Cleaner.
• Reconnect the tubing to the chamber.
16 of 18
APPENDIX C
OPTIONAL AND REPLACEMENT PARTS
OPTIONAL PARTS
Premium Vacuum Pump, 110V ...............................................................................
Premium Vacuum Pump, 220V ...............................................................................
Premium Vacuum Pump Oil ....................................................................................
Economy Vacuum Pump, 110V ...............................................................................
Economy Vacuum Pump, 220V ...............................................................................
Economy Vacuum Pump Oil ....................................................................................
Fomblin-Based Vacuum Pump, 110V (for Oxygen Service) ....................................
Fomblin-Based Vacuum Pump, 220V (for Oxygen Service) ....................................
Fomblin Fluid for Fomblin-Based Vacuum Pump.....................................................
Dry Scroll Vacuum Pump, 110V (for Oxygen Service).............................................
Dry Scroll Vacuum Pump, 220V (for Oxygen Service).............................................
PlasmaFlo, 110V .....................................................................................................
PlasmaFlo, 220V .....................................................................................................
Quartz Plasma Chamber .........................................................................................
Quartz Sample Tray (2.75” x 6.5”)............................................................................
PDC-VP
PDC-VP-2
PDC-VP-OIL
PDC-VPE
PDC-VPE-2
PDC-VPE-OIL
PDC-OPF
PDC-OPF-2
PDC-FMB
PDC-OPD
PDC-OPD-2
PDC-FMG-1
PDC-FMG-2
PDC-32Q
PDC-32T
REPLACEMENT PARTS
Pyrex Vacuum Chamber .........................................................................................
Front Cover Assembly ..............................................................................................
Front Cover O-ring, Viton ........................................................................................
Fluorescent Bulb ......................................................................................................
PDC-191-105
PDC-191-111
ORV-341
PDC-FLB
REPLACEMENT FUSES
110V (PDC-32G)
220V (PDC-32G-2)
Plasma Cleaner
3 amp, fast acting
3 amp, fast acting
Vacuum Pump
7 amp, fast acting
None
0.5 amp, fast acting
0.5 amp, fast acting
PlasmaFlo
17 of 18
APPENDIX D
SPECIFICATIONS
PLASMA CLEANER
Chamber Dimensions
System Dimensions
System Weight
Chamber Material
Input Power
RF Frequency
Inlet
Outlet
3” diameter by 7” deep
8” H x 10” W x 8” D
12 lbs
Pyrex
100 W
8 -12 MHz
1/8” NPT needle valve
1/2” O.D. glass or quartz tubing
POWER APPLIED TO RF COIL
6.8 W
10.5 W
18 W
Low Setting
Medium Setting
High Setting
UTILITIES REQUIRED
Vacuum Pump ...................................................................................... minimum pumping speed
of 1.4 m3h-1and
an ultimate total pressure
of 200 mtorr or less
OPTIONAL VACUUM PUMPS
Models PDC-VP and PDC-VP-2
Pumping speed 50/60 Hz .....................................................................
Ultimate total pressure ..........................................................................
Motor power ..........................................................................................
Weight ...................................................................................................
Dimensions ...........................................................................................
3,2/3,6 m3h-1
23 mtorr
250/300 W
33 lbs
9” H x 15” W x 5” D
Models PDC-VPE-1 and PDC-VPE-2
Pumping speed 50/60 Hz .....................................................................
Ultimate total pressure ..........................................................................
Motor power ..........................................................................................
Weight ...................................................................................................
Dimensions ...........................................................................................
18 of 18
10.2 m3h-1
20 mtorr
325 W
27 lbs
9 3/4” H x 15” W x 5 5/8” D
Manual Part No. PDC32G-M-03
©2004 Harrick Plasma
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