Advanced Energy Rapid F 6kW Remote Plasma Source User Manual
The Rapid F 6kW Remote Plasma Source is a compact and easy-to-mount combination plasma source and integrated mid-frequency (~400 kHz) 6 kW generator. It provides flexibility and control of a wide range of reactive plasma chemistries at a number of critical points within the process stream. The Rapid F 6kW plasma source is inductively-coupled, with a closed-path, water-cooled metal manifold in which induced plasma currents act as a single-turn secondary to a ferrite-core transformer.
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Rapid F 6kW
Remote Plasma Source
June 2003 5707038-C
User Manual
User Manual
Rapid™ F 6 kW Remote Plasma
Source
5707038-C
Advanced Energy
®
COPYRIGHT
This manual and the information contained herein is the proprietary property of
Advanced Energy Industries, Inc.
No part of this manual may be reproduced or copied without the express written permission of Advanced Energy Industries, Inc. Any unauthorized use of this manual or its contents is strictly prohibited. Copyright
©
2002 Advanced Energy Industries,
Inc. All Rights Reserved.
DISCLAIMER AND LIMITATION OF LIABILITY
The information contained in this manual is subject to change by Advanced Energy
Industries, Inc. without prior notice. Advanced Energy Industries, Inc. makes no warranty of any kind whatsoever, either expressed or implied, with respect to the information contained herein. Advanced Energy Industries, Inc. shall not be liable in damages, of whatever kind, as a result of the reliance on or use of the information contained herein.
PRODUCT USAGE STATEMENT
Read this entire manual and all other publications pertaining to the work to be performed before you install, operate, or maintain this equipment. Practice all plant and product safety instructions and precautions. Failure to follow instructions can cause personal injury and/or property damage. If the equipment is used in a manner not specified by the manufacturer the protection provided by the equipment may be impaired. All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury.
Advanced Energy Industries, Inc., (AE) provides information on its products and associated hazards, but it assumes no responsibility for the after-sale operation of the equipment or the safety practices of the owner or user. This equipment produces or uses potentially lethal high-voltage, high-current, radio frequency (RF) energy.
NEVER DEFEAT INTERLOCKS OR GROUNDS.
TRADEMARKS
is a registered trademark of Advanced Energy Industries, Inc.
Advanced Energy is a registered trademark of Advanced Energy Industries, Inc.
AE is a registered trademark of Advanced Energy Industries, Inc.
Chemraz
®
is a registered trademark of Greene Tweed & Co.
iv 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Han
®
is a registered trademark of the Harting Corporation, Inc.
Rapid™ is a trademark of Advanced Energy Industries, Inc.
Teflon
®
is a registered trademark of E. I. du Pont de Nemours and Company.
5707038-C v
Advanced Energy
®
1-vi 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table of Contents
Chapter 1. Introduction
Safety and Compliance Directives and Standards . . . . . . . . . . . . . . . . . . . . . 1-4
Chapter 2. Theory
Chapter 3. Specifications
Gas Pressure and Operating Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Chapter 4. Controls, Indicators, and Interfaces
User (Analog Control) Port Wiring Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Communicating Through the AE Bus (RS-232) Port . . . . . . . . . . . . . . . . . . 4-10
What is the Message Packet? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Ideal Communications Transaction . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
5707038-C Table of Contents vii
Advanced Energy
®
Command Status Response (CSR) Codes . . . . . . . . . . . . . . . . . . . . . . 4-13
AE Bus Command Set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
Chapter 5. Installation, Setup, and Operation
Connecting I/O and Auxiliary Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Plasma Source Operational Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Chapter 6. Troubleshooting and Global Support
viii Table of Contents 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Chapter A. Appendix A
Selecting Gas Mixtures, Gas Pressures, and Power Levels . . . . . . . . . . . . . . . . .A-1
5707038-C Table of Contents ix
Advanced Energy
® x Table of Contents 5707038-C
Rapid™ F 6 kW Remote Plasma Source
List of Figures
Figure 3-1. Viable operating range of Rapid F 6 kW plasma source . . . . . . . . . . . . . . 3-8
5707038-C List of Figures xi
Advanced Energy
® xii List of Figures 5707038-C
Rapid™ F 6 kW Remote Plasma Source
List of Tables
Table 3-7. Power, pressure, and gas flow examples for Figure 3-1 . . . . . . . . . . . . . . . 3-9
5707038-C List of Tables xiii
Advanced Energy
® xiv List of Tables 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Introduction
This manual documents how to install, operate, maintain, and troubleshoot the
Advanced Energy
®
Rapid F 6 kW plasma source. Retain this manual for future reference.
READ THIS SECTION!
To ensure safe operation, read and understand this manual before attempting to install or operate this unit. At a minimum, read the safety instructions and follow the safety
practices under the heading “Safety” on page 1-3.
INTERPRETING THE MANUAL
The following sections explain the type conventions, icons, and symbols that appear in this manual.
Type Conventions
Please note the following type conventions:
• Pin and signal names appear in capitalized italics (POWER_ON).
• New terms appear in italicized text.
• Unit labels (switches, indicators, and so on) appear in boldface text (MODIFY).
• Commands (162) and command names (set point) appear in boldface, lowercase text.
1
5707038-C Introduction 1-1
Advanced Energy
®
Icons (Symbols)
This symbol represents important notes concerning potential harm to people, this unit, or associated equipment. Advanced Energy
®
includes this symbol in Danger,
Warning, and Caution boxes to identify specific levels of hazard seriousness.
This box identifies hazards that could result in severe personal injury or death.
This box identifies hazards or unsafe practices that could result in personal injury.
This box identifies hazards or unsafe practices that could result in product or property damage.
The following symbols may appear on the unit:
High voltage
Protective earth ground
1-2 Introduction 5707038-C
Rapid™ F 6 kW Remote Plasma Source
CE label
Non-ionizing radiation
Hot surface
Warning (refer to manual)
NRTL
Heavy object
SAFETY
Do not attempt to install or operate this equipment without proper training.
• Ensure that this unit is properly grounded.
• Ensure that all cables are properly connected.
5707038-C Introduction 1-3
Advanced Energy
®
• Verify that input line voltage and current capacity are within specifications before turning on the power supplies.
• Use proper ESD precautions.
• Operate this device only within the specified range of vacuum pressures, powers, duty-cycles and gas chemistries.
• Do not attempt to disassemble the source assembly or its integrated power supply to clean or service the vacuum housing from potential process-related deposition.
• BE CAREFUL AROUND THIS EQUIPMENT
PRODUCT COMPLIANCE AND CONDITIONS
OF USE
The following sections include information about unit compliance and certification, including the conditions of use and installation required to be in compliance with the standards and directives.
Safety and Compliance Directives and Standards
Certain options of this unit have been tested for and comply with the following safety and electromagnetic compatibility (EMC) directives and standards and semiconductor industry guidelines:
Table 1-1. Electromagnetic Compatibility (EMC) Directives
Directive
89/336/EEC
Description
EC Council directive on the approximation of the laws of the
Member States relating to electromagnetic compatibility (EMC
Directive)
Table 1-2. Electromagnetic Compatibility (EMC) Standards
Standard Description
47 CFR Part 18 Code of Federal Regulations—Limits and methods of measurement of radio interference characteristics of industrial, scientific, and medical equipment
1-4 Introduction 5707038-C
5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 1-2. Electromagnetic Compatibility (EMC) Standards (Continued)
Standard Description (Continued)
EN 55011 Limits and methods of measurement of radio disturbance characteristics of industrial, scientific, medical (ISM) radio frequency equipment (Group 2, Class A) (CISPR 11)
EN 61000-6-2 Electromagnetic Compatibility - Generic Standards- Immunity for Industrial Environments
Table 1-3. Safety Directives
Directive
73/23/EEC
Description
EC Council directive on the harmonization of the laws of the
Member States relating to electrical equipment designed for use within certain voltage limits (LVD - Low Voltage Directive)
Table 1-4. Safety Standards
Standard
ANSI/ISA
82.02.01
CSA C22.2
No. 1010.1
EN 61010-1
Description
Safety standard for electrical and electronic test, measuring, controlling and related equipment—general requirements
(harmonized standard to IEC publication 61010-1)
Safety requirements for electrical equipment for measurement, control, and laboratory use
Safety requirements for electrical equipment for measurement, control, and laboratory use
Table 1-5. Semiconductor Industry Guidelines
Guideline
SEMI F47 Environmental, health, and safety guidelines for semiconductor manufacturing equipment
Description
This device must be installed and used only in compliance with the directives and standards listed in addition to VDE 0113, EN 60204 (IEC 60204), and applicable requirements.
Introduction 1-5
Advanced Energy
®
Certification
Certain options of this product are certified by:
• Canadian Standards Association (CSA) (NRTL/C)
• CE marking is self-addressed by AE Compliance Engineering
• EMC measurements verified by TÜV Product Services
For more information, refer to the letter of conformance (US) or declaration of conformity (EU) accompanying the product.
Installation Requirements
Install this unit according to the following requirements.
The following section describes required steps to be taken before attempting installation.
Operating and maintenance personnel must receive proper training before installing, troubleshooting, or maintaining high-energy electrical equipment. Potentially lethal voltages could cause death, serious personal injury, or damage to the equipment. Ensure that all appropriate safety precautions are taken.
RISK OF DEATH OR BODILY INJURY. Disconnect and lockout/tagout all sources of input power before working on this unit or anything connected to it.
Conditions of Use
To comply with the stated directives and standards, you must meet the following conditions of use:
• Before making any other connection, connect the auxiliary protective earth ground stud on the front panel.
• Install and operate this device only in a pollution degree 2 or better environment, which means an indoor location such as a computer room, office, or factory floor where only non-conductive pollution occurs during operation.
1-6 Introduction 5707038-C
Rapid™ F 6 kW Remote Plasma Source
•
inhibit the reliable performance of this device.
• Operate this device under flows, vacuum pressures, and power levels declared in the specifications to avoid inadvertent or unintended vacuum arc issues due to high voltages when igniting a plasma in the source.
• Use only ASM #326 O-rings for mounting the Rapid F 6 kW plasma source to existing vacuum hardware.
• Use only shielded cables on the AE Bus (RS-232) port and the user (Analog
Control) port connectors.
• Install and operate this device in an over-voltage category III or better environment.
• To provide the required over-current protection, you must install and operate this device with a 35 A (max) circuit breaker switch on the AC input. The circuit breaker must be easily accessible and near the device.
• This device must be installed so that the input power connection is inaccessible to the user.
5707038-C Introduction 1-7
Advanced Energy
®
1-8 Introduction 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Theory
The following chapter provides general information about the Rapid F 6 kW plasma source as well as an explanation of its operating principles.
GENERAL DESCRIPTION
This combination plasma source and integrated mid-frequency (~400 kHz) 6 kW generator is compact and easy to mount, and it provides flexibility and control of a wide range of reactive plasma chemistries at a number of critical points within the process stream. The Rapid F 6 kW plasma source is inductively-coupled, with a closed-path, water-cooled metal manifold in which induced plasma currents act as a single-turn secondary to a ferrite-core transformer. This manifold not only has unique electrical features that ignite the source, but also possesses frequency agile, selfresonant tuning features that facilitate power control into the plasma load via integrated impedance matching components. Thus, this versatile unit is capable of providing power to plasmas over a wide range or flows and pressures. The source itself is controlled through its 25-pin user (Analog Control) port or 9-pin AE Bus
(RS-232) port. It also includes an internal AC line filter and user-interlocked contactor.
The primary application for this product is to provide a reactive etch gas (NF
3
) for remote chamber cleaning in semiconductor and flat panel display applications.
THEORY OF OPERATION
In the Rapid F 6 kW plasma source, 60 Hz, three phase AC is DC conditioned and then switched at RF mid-frequencies (~400 kHz). The switch-mode power supply adjusts its switching frequency to match the power in a resonant CLL transformer
circuit, as shown in Figure 2-1 on page 2-2. As soon as energy is stored in this
resonant tank circuit, a secondary strike circuit provides a controlled high electrostatic potential RF burst to a portion of the vacuum vessel wall in order to ignite the discharge. Once ignited, a ferrite transformer core couples mid-frequency power to the plasma within the vacuum housing such that the conductive plasma body forms a single turn secondary. The frequency of the CLL circuit and power are mutually adjusted to sustain the discharge and provide the desired power set point depending upon the resistive characteristics of the plasma body. The high density plasma formed in the vacuum housing can then ionize, excite, or dissociate feed gases that flow through its interior. Typically, the source is ignited in argon (Ar) gas, which is easy to
5707038-C Theory 2-1
2
Advanced Energy
® ionize, for an ignition period of about one second. After the formation of a high density inductively-coupled plasma, the reactive gases are then introduced until the plasma reaches the desired operating point.
Figure 2-1 shows the circuit topology of the unit, where R
p
is the plasma resistance and is a function of pressure, power, and gas chemistry. R eff
and X eff
are the effective resistance and reactance, respectively, of the plasma-loaded transformer as seen by the power supply.
VAC
Contactor and
Line Filter
Switch-mode
Frequency-agile
6 kW
Power Supply
RF Ignition
Circuit
Impedance Circuit and Transformer
N:1
R p
2-2
Effective
Impedance of
Transformer
R eff
+ jX eff
Figure 2-1. Rapid F 6 kW plasma source block diagram
Note: Since RF power is directly coupled to the inductively-coupled plasma by the ferrite transformer without the use of transmission lines or a fixed output impedance of a separate generator, measures of forward and reflected power that are conventionally used in plasma source generation have no meaning in this integrated generator/source topology.
The Rapid F 6 kW plasma source is designed to work with pure molecular gas mixtures; however, for ignition, the source requires an easily ionized noble gas such as Ar. Thus, the operator or process engineer must integrate the source’s operation with dynamic or sequential adjustment of gas flow, vacuum pressure, and power set point steps.
Note: If sufficient power is applied and the pressure of the source is not too high, it is possible to remove the Ar starting gas from the process, if desired.
Theory 5707038-C
5707038-C
Rapid™ F 6 kW Remote Plasma Source
Because operation is a function of the dynamic control of the user’s vacuum installation and process, it is important to review the theory of operation in the context
of typical vacuum process equipment and control. Figure 2-2 on page 2-3 shows a
high-level diagram of a typical vacuum system, the Rapid F 6 kW plasma source, and controls, as might be configured for a chamber clean or a remote plasma surface strip
process. See “First Time Operation” on page 5-12 for details on the operation of this
installation.
Pressure/
Throttle Valve
Control Module
User’s Vacuum Process and Remote Plasma Control System
RPS Flow
Controllers
25 pin Sub-D
Analog Interface
Flow
Switch
Pressure
Gauge
Water IN
Water OUT
RPS
Throttle
Valve
Foreline Exhaust to Vacuum Pump(s)
Figure 2-2. Typical installation
Process Chamber
Wafer or Substrate
208 VAC/ 3
φ
Figure 2-3 illustrates the source topology. The source body is a torodial aluminum
vacuum vessel with hard anodization and copper water-cooling channels. The inner walls of the source manifold are hard-anodized to support fluorine-bearing chemistries.
Note: Figure 2-3 recommends a certain direction for gas flow. This gas flow may be
reversed if necessary.
Theory 2-3
Advanced Energy
®
Figure 2-3. Rapid F 6 kW plasma source topology
2-4 Theory 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Specifications
PHYSICAL SPECIFICATIONS
Table 3-1 describes the physical specifications of the Rapid F 6 kW plasma source.
Table 3-1. Physical specifications
Description
Size
Weight
Clearance
Specification
25.6 cm (H) x 25.3 cm (W) x 45.7 cm (D)
10.1" (H) x 9.9" (W) x 18.0" (D)
Approximately 25 kg (55 lb)
10.16 cm (4
″
) required at front for cable connections
Mounting
Vacuum
Mechanical
Lifting Handles
Symmetric ISO NW 40 Split Clamp mating flanges with six #10-32 screw holes—top and bottom of unit (ISO NW 40 split clamps and #10-
32 x 5/8" screws supplied by user)
Six 1/4-20 threaded PEM fastener holes on each side panel 1/4-20 x 5/8" L hardware suggested for mounting to1/4" thick mechanical support or bracing)
10.16 cm (4
″
) required at front for cable connections
Two collapsible handles rated at 4 times the weight of the unit
Connector Specifications
AC input power
User (Analog Control) port
AE Bus host (RS-232) port
Water connectors
Male, 6-pin, Harting type, Han
®
6HSB
Female, 25-pin, shielded, subminiature-D
Female, 9-pin, shielded, subminiature-D
Two female SAE 5/16" straight thread
3
5707038-C Specifications 3-1
Advanced Energy
®
ELECTRICAL SPECIFICATIONS
Table 3-2 describes the electrical specifications of the Rapid F 6 kW plasma source.
Table 3-2. Electrical specifications
Description Specification
Input Power Specifications
Line voltage 208 VAC nominal (190 VAC to 229 VAC), 3
φ, with ground, phase insensitive
50/60 Hz nominal (47 Hz to 63 Hz) Line frequency
Line current 26 A nominal, 35 A maximum per phase
Ground leakage current 3.5 mA or less
Ground connection Chassis ground near AC connector suitable for ring lug connection
Overcurrent protection 30 A internal bus fuse
Overvoltage Use in an overvoltage category III environment
Warm-up delay
Approximately 60 s average for AC on (bus is charged)
Approximately 4 s for RF on (after bus is charged)
Load power specifications
Frequency
Minimum power under load
290 kHz to 650 kHz, limited to 290 kHz to
490 kHz for specified operation
Peak power under load 6000 W with variable duty cycle of no more than
50%, maximum allowed on-time of 300 s
1500 W
Accuracy
Linearity
Power leveling
±5% or 200 W of peak power rating, whichever is greater
±200 W or less from 1500 W to full-scale output
Internal load power leveling
Operational load Load determined by plasma impedance within operational range of about 3:1
Efficiency (line to load) Approximately 80% typical at full-rated power, nominal line
Zero set point Less than 1 W actual and readback when zero or negative set point or when interlock is not satisfied
3-2 Specifications 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 3-2. Electrical specifications (Continued)
Description
Calibration means
Ignition
Power factor
Specification
Auxiliary secondary winding for non-plasma calibration via resistive/inductive load external to the unit
Ignition requires a low ionization voltage gas
(Argon preferred) at .5 to 2 Torr. After ignition, the process gases should be introduced within 90 seconds to prevent a current limit fault.
> 0.73
VACUUM SPECIFICATIONS
Table 3-3 describes the vacuum specifications for the Rapid F 6 kW plasma source.
Table 3-3. Vacuum specifications
Description
Leak rate
Plasma source wall surfaces
Vacuum seals
O-Ring grooves
Input/output vacuum fittings
Specification
He: < 10
-6
mbar-liter per second (converts to
<0.0006
Anodized aluminum, Class III Hardanodization with deionized water seal posttreatment
Chemraz
®
O-rings
Masked aluminum surfaces against O-ring surfaces
ISO NW 40 flanges
Note: If the source is stored for an extended period of time at atmospheric pressure, outgassing will occur when pumping down the source for the first time. To check for leaks upon installation, it is recommended that the source be pumped down to its base pressure and operated in Ar:O
2
mixtures to remove air contaminants and moisture.
5707038-C Specifications 3-3
Advanced Energy
®
COOLING SPECIFICATIONS
Table 3-5 provides cooling specifications. The source is air and water cooled by a single-series loop water flow path.
Table 3-4. Cooling specifications
Description
Air—internal exchange
Air—external exchange
Water temperature
Specification
Internal fans for localized cooling of critical components
External air exchange through perforations at critical locations and an exhaust fan (in the rear of the unit); maximum ambient air temperature =
40ºC
(104ºF)
+5ºC to +25
° C (+41ºF to +77° F)
Water flow rate
Note: Maximum water temperature at minimum flow rate and maximum ambient air temperature (+40
° C)
1.3 gpm to 2.0 gpm for derated power, on-time, and duty cycle
1.4 bar (20 psi) for 1.5 gpm, 1400 kPa, requires 7.6 lpm (2 gpm) at peak power (6 kW).
Minimum pressure
differential (supply to drain required to achieve specified minimum flow rates)
Maximum pressure rating
4.5 bar (65 psi), 450 kPa
Contaminates
The following specifications are recommended for the water used to cool the Rapid F 6 kW plasma source:
• pH between 7 and 9
• Total dissolved solids < 250 ppm
• Specific resistivity of 2500
Ω/cm or higher at
25
° C
• Total dissolved solids (TDS) as estimated by the following:
TDS
≤ 640,000
specific resistivity (
Ω/cm)
Note: Internal fans assist the thermal management of the unit.
3-4 Specifications 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Under normal operation, the chassis case and cooling water reach temperatures hot enough to scald. Before touching the source or disconnecting the water cooling lines, allow the cooling water to flow for several minutes to remove stored thermal energy from the unit.
Do not use de-ionized water for cooling purposes. De-ionized water causes both corrosion and erosion of cooling manifolds.
ENVIRONMENTAL SPECIFICATIONS
Table 3-5 provides climatic specifications.
Install and operate this device only in a pollution degree 2 or better environment, which means an indoor location such as a computer room, office, or factory floor where only non-conductive pollution occurs during operation.
5707038-C Specifications 3-5
Advanced Energy
®
Table 3-5. Climatic specifications
Temperature Relative Humidity Air Pressure
Operating
5
°
C to +40
°
C 15% to 85%
1
<74.5 kPa
+41
°
F to +104
°
F +2 g/m
3
to +25 g/m
3
<745 mbar approximately 2500 m
(8203´) above sea level
<58.5 kPa
Storage
-25
°
C to +55
°
C 15% to 85%
1
-13
°
F to +131
°
F +2 g/m
3
to +25 g/m
3
<585 mbar approximately 4000 m
(13,124´) above sea level
<48.0 kPa
Transportation
-25
°
C to +55
°
C 15% to 85%
1
-13
°
F to +131
°
F +2 g/m
3
to +25 g/m
3
<480 mbar approximately 5000 m
(16.405´) above sea level
1
noncondensing
2
Maximum relative humidity when the unit temperature slowly increases, or when the unit temperature directly increases from -25°C to +30°C
3
Maximum absolute humidity when the unit temperature directly decreases from +70°C to
+15°C
PROCESS OPERATING SPECIFICATIONS
This section describes the operational specifications for the Rapid F 6 kW plasma
source. Table 3-6 shows the general operational parameters for the Rapid F 6 kW
plasma source.
Table 3-6. General operational parameters
Description
Vacuum pressure range
Power requirements
Process application s
Specification
0.5 Torr to 6 Torr for NF
3
processes up to 2.5 slpm with the appropriate gas feed apparatus for high gas flows.
1500 W to 6000 W as limited by thermal management, current, and voltage limits within the range
Remote delivery of gases for downstream chamber cleaning by the utilization of NF
3
as the feed gas
3-6 Specifications 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 3-6. General operational parameters (Continued)
Description
Chemical compatibilities
Long-term stability
Specification
Fluorine-bearing gases, perfluorocarbon-bearing gases
(nondepositing) hydrogen, nitrogen, oxygen-bearing gases, and combinations thereof
No internal parts are consumable (consumables are defined as parts with a lifetime of less than 6000 hours of operation), with the exception of the source anodization. Drift in NF
3
dissociation efficiency within
6000 hours of operation = <2%
GAS PRESSURE AND OPERATING RANGE
The Rapid F 6 kW plasma source ignites in Ar gas and then transitions to pure NF
3
or
O
2
gas (AE also permits blends of NF
3
with Ar or O
2
with Ar dilution). The viable operating range of the Rapid F 6 kW plasma source in any given gas depends on power, pressure, and gas flow. These factors define the effective plasma resistance
into which the supply can deliver power. Figure 3-1 on page 3-8 illustrates the viable
operating range for the Rapid F 6 kW plasma source as restricted by the internal current and voltage limits of the power supply. You must provide a satisfactory power set point in order to maintain a stable power balance for the given gas-phase chemistry and operating pressure between these two limits. The power balance depends on gas chemistry and pressure but is independent of the viable impedance range of the Rapid
F 6 kW plasma source.
Note: The unit reaches a stable power balance when it disposes enough power into the plasma that the net rate of ion and electron production in the plasma body is equivalent to ion and electron volume and wall recombination. It may be difficult to maintain a stable power balance when the unit is operating in pure or diluted electronegative gases such as SF
6
, NF
3
, O
2
, or in various perfluorocarbon gases at low powers and high pressures.
Imposed on the operating range, Figure 3-1 shows examples of NF
3
discharge for
operation at the pressures and flow rates listed in Table 3-7 on page 3-9. At high
power levels and low pressures where the gas discharge is very conductive, the power
5707038-C Specifications 3-7
Advanced Energy
® supply’s current limit may restrict delivered power. At low power levels and high pressures where the discharge is more resistive, the power supply’s voltage limit may restrict delivered power.
3-8
Figure 3-1. Viable operating range of Rapid F 6 kW plasma source
On the graph, you can see lines that indicate a range of operation near the current limit in which the power supply enables the current limit time-out counter. In this range of operation, currents on the primary windings are exceptionally high and can lead to high heating losses. To protect the long term integrity of the windings, the unit derates the allowable on-time in this range of operation. This derating is a function of primary current and scales from 300 seconds (maximum) to 90 seconds (minimum). This range of high current operation is usually restricted to Ar ignition or the process transition steps immediately after Ar ignition. When the unit is operating is this range, the E21 error code flashes on the display panel, but output continues. If the unit continues to operate in this range for longer than the limit, the E21 error code stays on
Specifications 5707038-C
Rapid™ F 6 kW Remote Plasma Source the display and the unit shuts output off. To avoid this fault and to avoid long-term operation in this part of the range, increase the increase the operation pressures of gas flows.
Table 3-7. Power, pressure, and gas flow examples for Figure 3-1
6
7
4
5
1
2
3
Number in
Pressure
12.0
10.0
6.5
3.0
3.5
3.0
1.0
(Torr)
NF
3
2000 / 0
2500 / 0
1500 / 0
0 / 500
/Ar
(sccm)
2800 / 5600
2000 / 4000
1500 / 0
Voltage (V)
87
75
94
82
86
75
32
Plasma
8 0.42
0 / 500 25
Plasma
Power (kW)
6.0
6.0
6.0
5.5
5.5
5.5
3.5 (current limited)
2.5 (current limited
Under typical operating conditions, the interaction between the plasma's resistive properties and the power supply’s control dynamics near the voltage limit will lead to disruption and loss of the discharge. Avoid operating the unit at or very close to the voltage limit. Also avoid pressure bursts, which may induce transient spikes or overshoots in plasma resistance.
This unit is intended for use in select molecular gases. Do not operate continuously in argon and nitrogen for prolonged periods of time (>10 s).
5707038-C Specifications 3-9
Advanced Energy
®
Gas Operation Parameters
Table 3-8 provides gas operation specifications in fluorine (NF
3
).
Table 3-8. Gas operational specifications
Description Specification
Flows and dilutions
At least 2.5 slpm of NF
3
at up to 6 Torr at 6 kW
Dissociation efficiency
>98% dissociation of 2.5 slpm at 6 kW, as measured by mass spectroscopy
Gas quality
At least 2.5 slpm of NF
3
:Ar at 1:1 ratio up to 10 Torr at
6 kW
Operation in low-grade NF
3
(~95% pure) with no additional particulate formation
3-10 Specifications 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Controls, Indicators, and
Interfaces
The Rapid F 6 kW plasma source provides two communication interfaces, the user
(Analog Control) port and the serial AE Bus (RS-232) port. You can also use AE’s
Virtual Front Panel (VFP) software interface to communicate with the unit. For more
information about VFP, see “Virtual Front Panel (VFP) Software Interface” on page 4-20.
The Rapid F 6 kW plasma source also has a passive front panel display with several
LEDs and a display panel. For more information, see “Indicators” on page 4-22.
USER (ANALOG CONTROL) PORT
On the unit, this connector is labeled Analog Control.
The following section provides the connector type, cabling requirements, signal characteristics, pin descriptions, and wiring diagrams for the Rapid F 6 kW plasma source’s user (Analog Control) port.
The unit’s 25-pin user (Analog Control) port provides analog and digital signals to remotely control and monitor the Rapid F 6 kW plasma source. It uses a 25-pin, shielded, male, subminiature-D connector.
4
Figure 4-1. User (Analog Control) port connector
Interface Cabling Requirements
The cable used to connect the unit’s 25-pin user (Analog Control) port to the system controller must be a shielded, 25-wire I/O cable. Twisted-pair wiring may be used but is not mandatory. Signal losses should be minimized by keeping the cable length as short as possible. The maximum recommended cable length between the Rapid F 6
5707038-C Controls, Indicators, and Interfaces 4-1
Advanced Energy
® kW plasma source and the controller is 10 meters (33´). To minimize interference from adjacent electrical equipment, the EMI shield in the cable should be terminated to ground at the plasma source end of the cable. Additionally, the chassis of the Rapid
F 6 kW plasma source must be tied to a local earth ground through a copper grounding strap that is sized in accordance with applicable requirements (local electrical code).
Signal Characteristics
Table 4-1 provides remote interface connector signal types.
Table 4-1. Remote interface connector signal types
Signal Type
Analog
Digital
Grounds
Description
Unless otherwise specified, all analog signals are 0 to 10 V.
Unless otherwise specified, all digital signals are 5 to 24 V, opto-coupled (open-collector signals with return lines nonreferenced to ground).
All ground lines are to chassis ground.
Pin Descriptions
Table 4-2 provides the connector pin descriptions for the user (Analog Control) port
interface.
Table 4-2. User (Analog Control) port pin descriptions
Signal
Pin
1
Related
Pin
Name
GROUND
Signal
Type
Analog output common
Description
2
3
4
18
PLASMA ON
ENABLE RETURN
RF POWER SET
POINT RETURN
Digital return
Analog output return
This pin is the return for all analog output lines. It is connected internally to pins 5 and 14 and the internal (chassis) ground of the unit.
This pin is the return for the
+24 VDC PLASMA ON
ENABLE signal (pin 4). See
This pin is the return for the RF
POWER SET POINT signal.
4-2 Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
9
10
11
12
13
6
7
8
Table 4-2. User (Analog Control) port pin descriptions (Continued)
Signal
Pin
4
Related
Pin
2
Name
PLASMA ON
ENABLE
Signal
Type
Digital input
Description
When a positive voltage of
+24 VDC is applied to this pin with respect to pin 2, the RF power to the plasma source module is enabled.
Note: The user must provide the
+24 Vdc. The current flow between pins 4 and 2 must be <30 mA.
5
GROUND
Analog output return
This pin is a return for analog outputs. This pin is connected to pins 1 and 14 and the internal
(chassis) ground of the unit. See
25
Not used
Not used
Not used
Not used
Not used
Not used
Not used
INTERLOCK
Interlock loop
14
ANALOG GROUND
Analog output common
This pin, when connected externally to pin 25, closes the interlock. Closure of the interlock enables the unit’s AC input power contactor. See
Note: RF power will not come on until the plasma on
enable command is given
(pin 4).
This pin is the return for all analog output lines. It is connected internally to pins 1 and 5 and internal (chassis) ground of the unit.
5707038-C Controls, Indicators, and Interfaces 4-3
Advanced Energy
®
Table 4-2. User (Analog Control) port pin descriptions (Continued)
Signal
Pin
15
Related
Pin
20
READY
Name Signal
Type
Digital output
Description
When the Rapid F 6 kW plasma source is successfully interlocked and AC power is ready, a low impedance is established between this pin and pin 20 (+24 V return).
16 20
PLASMA ON
Digital output
• low = true
• high = false
When a plasma exists within the source, a low impedance is established between this pin and pin 20 (+24 V return).
17
18
19
20
20
3
1, 5, or
14
17
FAULT
RF POWER SET
POINT
RF DELIVERED
POWER
+24 V RETURN
Digital output
Analog input
Analog output
Digital common
• low = true
• high = false
When an error code is displayed, a low impedance is established between this pin and pin 20 (+ 24
V return).
• low = true
• high = false
A 0 to 10 V signal applied to this pin linearly controls the RF power level requested by the user. 10 V = max rated output.
This 0 to 10 V signal provides a linearly-scaled readback of the power delivered into the internal plasma load. 10 V = max rated output.
This pin is the return for pins 15,
16, and 17.
21 Not used
4-4 Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 4-2. User (Analog Control) port pin descriptions (Continued)
Signal
Pin
22
23
24
25
Related
Pin
13
Name
Not used
Not used
Not used
INTERLOCK
RETURN
Signal
Type
Interlock loop
Description
See pin 13.
User (Analog Control) Port Wiring Diagrams
Use these wiring diagrams in conjunction with the pin description in Table 4-2 to
interface the unit to your system controller. Each wiring diagram is divided with a dashed line into two sections:
• The left side of the dashed line (User) shows the necessary external connections.
• The right side of the dashed line (Unit) represents the Rapid F 6 kW plasma source’s internal circuitry.
Figure 4-2. Plasma on enable (pins 4 and 2)
5707038-C Controls, Indicators, and Interfaces 4-5
Advanced Energy
®
Figure 4-3. Interlock (pins 13 and 25)
Figure 4-4. Ready (pins 15 and 20)
4-6 Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Figure 4-5. Plasma on (pins 16 and 20)
Figure 4-6. Fault (pins 17 and 20)
5707038-C Controls, Indicators, and Interfaces 4-7
Advanced Energy
®
Figure 4-7. RF power/set point (pins 18 and 3)
4-8
Figure 4-8. RF delivered power (pins 19 and 5)
Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
AE BUS HOST (RS-232) PORT
On the Rapid F 6 kW plasma source, this port is labeled RS232. The AE Bus (RS-
232) port uses a 9-pin, female, shielded, subminiature-D connector.
5707038-C
Figure 4-9. AE Bus (RS-232) port connector
The AE Bus (RS-232) port uses an RS-232 signal format and AE Bus communication
protocol. See “Communicating Through the AE Bus (RS-232) Port” on page 4-10 for
further details on the communications protocol. AE can also provide simple command host software.
The signals available at the AE Bus (RS-232) port conform to the RS-232 interface standards. The Rapid F 6 kW plasma source has an nonadjustable, factory-set baud rate of 19.2 kB.
Table 4-3. AE Bus (RS-232) port pin descriptions
Signal
Pin
Name Description
4
5
6
1
2
3
RESERVED
TXD
RXD
RESERVED
COM
RESERVED
Reserved for future use
RS-232 transmit data
RS-232 receive data
Reserved for future use
Data Common
Reserved for future use
7
8
9
*
RESERVED
RESERVED
Reserved for future use
Reserved for future use
RESERVED-(FACTORY)
Reserved for future use
Note: *Do not ground this factory reserved pin. Grounding this pin will disrupt the operation of the unit.
Controls, Indicators, and Interfaces 4-9
Advanced Energy
®
Communicating Through the AE Bus (RS-232) Port
You can control the Rapid F 6 kW plasma source through the AE Bus (RS-232) port.
The AE Bus (RS-232) port on your Rapid F 6 kW plasma source uses the AE Bus communications protocol. The AE Bus communications protocol uses pure binary data. The transmission parameters are as follows:
• Odd parity
• One start bit, eight data bits, one stop bit
Low-order bytes (of the Data field) are transmitted before high-order bytes.
Two types of information are sent over the RS-232 link:
• Message packet
• Single byte packet (NAK or ACK)
WHAT IS THE MESSAGE PACKET?
The AE Bus message packet combines chunks of information in such a way that much information can be sent over communication lines at one time. Each packet contains four, or possibly five, types of information or “fields”:
• Header (contains the unit’s address and the length of Data field)
• Command
• Optional (supplements the Header field)
• Data (contains parameter setting or status, Command Status Response (CSR), or nothing)
• Checksum (aids in error checking)
Figure 4-10 shows the organization of these data fields in the AE Bus message packet.
The subsequent paragraphs describe each data field.
Command
0-FFh
Data (0-255 bytes)
7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0
Header
5-bit address
3-bit length
Optional
Figure 4-10. Graphic representation of a message packet
Checksum
4-10 Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
5707038-C
Header
This field contains two pieces of information: the first five bits contain the address, factory preset to 1, and the last three bits contain the length of the Data field. If the message packet originates with the host computer (master), the address specifies the packet's destination (to a Rapid F 6 kW plasma source, for example). If the packet is going to the host, the address specifies the packet's origin (from the Rapid F 6 kW plasma source). The address section of the Header field is five bits long (bits 3-7), which allows a total of 32 distinct addresses. Address 0 (zero) is reserved for the network broadcast address; when this address is used in a host-originated packet, all units receive the packet (but will not respond).
The remaining three bits (bits 0,1, and 2) tell the receiving unit how long the Data field is so that the unit can determine when the entire message has been received.
Note: The value in these bits should refer only to the number of actual data bytes. Do not include the checksum byte when calculating the value for these bits.
The header field (address and length) must be at the beginning of the message packet so that the receiving unit can compute the length of the packet after receiving the first byte.
Optional
This field exists to supplement the header field. The optional field contains a value only when the length bits in the header field contain a value of 7. (A value of 7 indicates that the data field contains more than 6 bytes of data.) Under those circumstances, the optional field contains a one-byte value (between 7 and 255) indicating the actual length of the data field.
Command
This field contains a one-byte value: 00h to FFh (0 to 255). If the message packet originates with the host computer, this value specifies the purpose of the message packet. If the message originates with the Rapid F 6 kW plasma source, the value
specifies the command to which it is responding. See Table 4-5 for a complete list of
host commands.
Data (Data Bytes)
The Data field can contain from 0 to 255 bytes of binary data, which are interpreted in various ways, depending on the value that appears in the command field. The data field typically contains data or a CSR, depending on what was requested. Since some commands do not require data, sometimes the data field contains no value.
If the value specified in the length bits of the header field is 0 to 6, the Rapid F 6 kW plasma source expects 0 to 6 bytes of data. However, if the value in the header field is
7, the Rapid F 6 kW plasma source looks for an additional eight-bit byte after the command field (the optional field) and expects 7 to 255 bytes of data (as specified by the optional field).
Controls, Indicators, and Interfaces 4-11
Advanced Energy
®
Host
Checksum
This one-byte field is the last one in the packet. The content depends on the value of each of the preceding fields. The transmitting unit determines this value by accumulating the XOR (exclusive-or) of all bytes of the packet up to, but not including, the checksum value. The receiving unit accumulates the XOR of all bytes of the packet, including the checksum. If the result is zero, the packet has likely been received intact.
Only after the checksum of a message packet is validated will the Rapid F 6 kW plasma source act on the message (which consists of the contents of the command, and if appropriate, the data fields).
IDEAL COMMUNICATIONS TRANSACTION
Figure 4-11 is a simplified graphic showing the steps in an ideal communications
transaction between a host computer and an Rapid F 6 kW plasma source.
Rapid F 6 kW
4-12
Figure 4-11. Communications transaction
First, the host computer sends a message packet to the Rapid F 6 kW plasma source.
The packet contains one of the following:
• A command that requests data or status information
Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
5707038-C
• A command and data that change a parameter setting
• An executable command
The Rapid F 6 kW plasma source analyzes the checksum to verify that the message was received correctly.
If the address is incorrect (that is, if the message was not intended for the Rapid F 6 kW plasma source that received it), the unit does not respond to the host; the unit resets and resumes waiting for a message addressed to it. If the sum of the bytes in the packet (including the checksum) is not zero, the Rapid F 6 kW plasma source sends a negative acknowledgment (NAK) with a hex code of 15h to the host. If the message is intact, the unit sends an acknowledgment ACK with a hex code of 06h to the host.
If the Rapid F 6 kW plasma source receives a request for data or status information, it gathers and sends the requested information. Otherwise, it evaluates the incoming command and sends a message-packet that contains a 1-byte data value (CSR code) to the host (see “Command Status Response (CSR) Codes” that follow). CSR code 0 is sent when the command has been accepted.
If the host receives a NAK from the unit, the host either re-transmits the packet or does whatever else it has been programmed to do in this situation. If the host receives an ACK, it waits for the requested data or status information or for the CSR code telling it whether or not the new parameter was accepted. If the host receives no response within a reasonable period (usually 1 s), it takes whatever action it has been programmed to take.
Meanwhile, the unit has prepared a message packet with the requested information or appropriate CSR code, which it then transmits to the host. The host determines by means of the checksum if the message is complete. If the host detects an error in the transmission (by using the Checksum), it can request the packet be sent again by transmitting a NAK.
If the unit receives an ACK, it returns to the normal waiting state. If the unit receives a
NAK, it re-transmits the message packet. The unit continues to re-transmit in response to NAK transmissions until the host stops the cycle. If the unit receives no response, it assumes an ACK and returns to the waiting state.
COMMAND STATUS RESPONSE (CSR) CODES
When the Rapid F 6 kW plasma source sends a Command Status Response (CSR) code in response to a command, interpret the CSR (a one-byte response) code as
Table 4-4. CSR Codes
Value
0 Command accepted.
Meaning
Controls, Indicators, and Interfaces 4-13
Advanced Energy
®
Table 4-4. CSR Codes
1
2
3
4
7
9
99
Command not accepted because the control mode is incorrect.
Command not accepted because the output is on.
Command not accepted because the output is off.
Command not accepted because it specifies a value that exceeds the limit for that parameter.
Command not accepted because one or more faults are active.
Command not accepted because the command’s data byte count is incorrect.
Command not implemented
AE BUS COMMAND SET
The following section describes the AE Bus commands used with the Rapid F 6 kW plasma source’s AE Bus (RS-232) port.
Table 4-5. AE Bus Commands
Command
1
RF off
2
RF on
8 set point
14 control transfer
Description
Requests RF output off; request is always honored regardless of which interface has control.
Requests RF output on; host control must have been selected.
Specifies the output set point level. Accepts a value of 0 to 6000 W.
Sets the active control mode of the Rapid F 6 kW plasma source (2 = AE Bus (RS-232) port, 4 = user (Analog Control) port).
(Read back with command 155)
Number of
Host Data
Bytes
0
Number of
Response
Data Bytes
1
0
2 data bytes
16-bit value
1 data byte
8-bit value
1
1
1
4-14 Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 4-5. AE Bus Commands (Continued)
Command Description
39 set host heartbeat timeout
40
AE Bus (RS-
232) port timeout value
128 supply type
129 supply size
130 read mainframe software version number
Sets the time allowed between packets in milliseconds for the AE Bus (RS-232) port. If the unit receives no communication packets from the host computer for longer than this period, it disables output. Send a value of 0 to
65535 (0 disables the feature), representing milliseconds. The timer resolution is 100 ms; any portion of 100 ms will be truncated. This value defaults to zero on power-up.
• Set byte 1 = 1
• Bytes 2 and 3 set the heartbeat timeout value (LSB first).
Read back with command 139.
Sets the AE Bus (RS-232) port timeout value.
Accepts a value of 2 to 500, representing 0.02 to 5.0 s. Default = 0.5 s upon power up.
Requests the Rapid F 6 kW plasma source type; returning packet contains 4 ASCII characters (e.g. “IICP”).
Requests the output capacity of the Rapid F 6 kW plasma source; returning packet contains
6 ASCII characters.
Requests the version number of the mainframe software. The returning packet contains 7 ASCII characters—a 7-digit number. This command is used in conjunction with command 198 to obtain the version/ revision number of the mainframe software.
Number of
Host Data
Bytes
3 data bytes
One 8-bit value
One 16-bit value (LSB first)
Number of
Response
Data Bytes
1
(CSR only)
2 data bytes
16-bit value
0
0
0
1
4 data bytes
4 ASCII characters
6 data bytes
6 ASCII characters
7 data bytes
7 ASCII characters
5707038-C Controls, Indicators, and Interfaces 4-15
Advanced Energy
®
Table 4-5. AE Bus Commands (Continued)
Command Description
139 report Host heartbeat timeout
Reports the time allowed between packets in milliseconds for the AE Bus (RS-232) port.
Reports values of 0 to 65535, representing milliseconds (0 indicates that the feature is disabled). The timer resolution is 100 ms, so any portion of 100 ms will be truncated. This value defaults to zero on power-up.
Send one data byte set with a value of 1.
Returns 2 data bytes indicating the timer setting, in milliseconds.
Set with command 39.
Requests the serial Host port timeout value, from 002 to 500, representing 0.02 to 5.00 seconds.
140 report Host timeout value
147 report output frequency
155 report control mode
Requests the output frequency of the unit in hertz. Returns 4 data bytes.
Requests control mode setting. Returns 1 data byte:
• 2 = AE Bus (RS-232) port
• 4 = user (Analog Control) port
Set with command 14.
Number of
Host Data
Bytes
1 data byte
8-bit value
Number of
Response
Data Bytes
2 data bytes
16-bit value
(LSB first)
0
0
0
2 data bytes
16-bit value
4 data bytes
64 bit value
LSB first
1 data byte
8-bit value
4-16 Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 4-5. AE Bus Commands (Continued)
Command
162 report process status
5707038-C
Description
Requests report on process status; returning packet contains 4 data bytes.
• First status byte:
4 0 = Output power is on
4 1 = Output power is requested
4 2 = Output is at set point
4 3 = Supply is ready for use (no fault conditions)
4 4 = Interlock satisfied
4 5 = Overtemperature fault active
4 6 = Output on is disabled (held active by faults and output on requested)
4 7 = Bus over-voltage fault active
• Second status byte:
4 0 = Bus under-voltage fault active
4 1 = No plasma timeout fault active
4 2 = Plasma is on
4 3 = Overtemperature fault defeated
4 4 = No plasma time-out fault defeated
4 5 = Ignition voltage enabled
4 6 = Self-test enabled
4 7 = Self-test error
• Third status byte:
4 0 = Ignition signal defeated
4 1 = Bus undervoltage defeated
4 2 = Fan fault
4 3 = Fan fault defeated
4 4 = Unassigned
4 5 = Load out of range fault
4 6 = Load out of range fault defeated
4 7 = Com heartbeat time-out fault
• Fourth status byte:
4 0 = Duty cycle fault
4 1 = Current limit time-out fault
4 2 = Plasma wink-out fault
4 3 through 7 = unassigned
Controls, Indicators, and Interfaces
Number of
Host Data
Bytes
0
Number of
Response
Data Bytes
4 data bytes
8-bit values
4-17
Advanced Energy
®
Table 4-5. AE Bus Commands (Continued)
Command Description
164 read set point/ regulation mode
Requests output set point level (set with command 8) and method of output regulation.
• First and second bytes = set point value
• Third byte = output regulation mode
Note: This byte always returns the same value (6). Conventional terms for power regulation have no meaning in this integrated power supply/plasma source.
Requests a snapshot of load power level.
167 read delivered power
198 read mainframe software revision level
Requests the revision level of the mainframe software. The returning packet contains three
ASCII characters—one letter, followed by a two-digit number. This command is used in conjunction with command 130 to obtain the version/revision of the mainframe software.
Number of
Host Data
Bytes
0
Number of
Response
Data Bytes
3 data bytes
16-bit value
8-bit value
0
0
2 data bytes
16-bit value
3 data bytes
3 ASCII characters
4-18 Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 4-5. AE Bus Commands (Continued)
Command
212 report last nonzero error code
Description
Requests the last non-zero error code that
occurred. (See Table 6-1 on page 6-4 for error
codes.)
Note: The unit does not save this information when it powers off.
Returning values:
• 1 = Unassigned
• 2 = Unassigned
• 3 = Thermal limit exceeded
• 4 = Fan fault
• 5 = Bus undervoltage fault
• 6 = Bus over-voltage fault
• 7 = Plasma ignition timeout error
• 11 = Heartbeat time-out error
• 16 = Ambient thermistor error
• 19 = Ambient temperature too high
• 20 = Duty cycle fault
• 21 = Current limit time-out fault
• 24 = Plasma wink-out fault
Number of
Host Data
Bytes
1 data byte
8-bit value
Number of
Response
Data Bytes
4 data byte
32-bit value
5707038-C Controls, Indicators, and Interfaces 4-19
Advanced Energy
®
Table 4-5. AE Bus Commands (Continued)
Command
220 report statistical data
Description
Requests operational and cycle statistics recorded by unit.
Note: The unit saves this information in nonvolatile memory.
Send one data byte indicating the desired statistic
• 0 = Number of ignition cycles
• 1 = Minutes of AC on time
• 2 = Minutes of output on time
• 3 = Number of overtemperature faults
• 4 = Number of duty cycle faults
• 5 = Number of bus high faults
• 6 = Number of bus low faults
• 7 = Number of no ignition faults
• 8 = Number of heartbeat time-out faults
• 9 = Number of fan faults
• 10 = Number of current limit time-out faults
• 11 = Number of ambient thermistor faults
• 12 = Number of high ambient temperature faults
• 13 = Number of plasma lost faults
Returns 4 bytes, representing the value of the statistic.
Number of
Host Data
Bytes
0
Number of
Response
Data Bytes
4 data bytes
32-bit value
(LSB first)
VIRTUAL FRONT PANEL (VFP) SOFTWARE
INTERFACE
AE manufactures Virtual Front Panel (VFP), a software application that provides an easy way to communicate with a Rapid F 6 kW plasma source from a personal computer. VFP communicates with the unit through the AE Bus interface. It allows you to set unit operating parameters, turn RF output on and off, troubleshoot the unit
4-20 Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source through fault status indicators, fingerprint new chamber set up, as well as build and optimize process settings. The following illustration shows an example of a VFP interface.
5707038-C
VFP software includes the following functions:
• Establish communication with a Rapid F 6 kW plasma source (through the AE
Bus interface on the plasma source)
• Change the control mode between VFP and the plasma source Analog Control port
• Set or change the unit set point within the operating range of the unit
• Turn RF output on and off
• Monitor multiple plasma source operating parameters at rates up to 100 ms; parameters that can be monitored include: connection status, set point, delivered power, frequency, voltage, current, plasma status, and fault status
Note: VFP allows you to monitor some of these parameters in both numerical format and on a line graph that charts the parameter over time.
• Log operational data for the plasma source including: time, delivered power, set point, frequency, voltage, current, and unit status
To order Rapid VFP or to receive a free, time-limited evaluation copy of the software,
contact AE. See “AE Global Customer Support” on page 6-10 for contact
information.)
Note: The documentation included with the software provides complete instructions for using the software to control and monitor a Rapid F 6 kW plasma source.
Controls, Indicators, and Interfaces 4-21
Advanced Energy
®
INDICATORS
The front panel of the Rapid F 6 kW plasma source has a digital display and LEDs that indicate the unit’s status. The digital display provides an alphanumeric indication of delivered plasma power in kilowatts and registers error codes when faults occur. (See
Table 6-1 on page 6-4 for error codes and their descriptions). Five status LEDs allow
you to check the source’s status, verify its operation, and troubleshoot problems.
Table 4-6 provides detailed descriptions of the status LEDs and display.
Table 4-6. Indicators and displays
Indicator
AC POWER
Description
When lit, this green LED indicates that the AC mains contactor and the interlock loop are closed and thus AC power is available within the generator.
RF POWER
When off, this LED indicates that no AC power is being supplied to the power supply. However, power is still available and stored in the system.
When lit, this green LED indicates that the RF power enable state is satisfied and that RF power is being applied to the primary windings of the inductively-coupled plasma source.
When off, this LED indicates that no power is being supplied to the primary windings of the plasma source.
4-22 Controls, Indicators, and Interfaces 5707038-C
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Table 4-6. Indicators and displays (Continued)
Indicator
PLASMA
Description
This green LED has three modes of operation:
INTERLOCK
• Off: Indicates that no plasma is present because RF power is not being supplied.
• Continuous (solid): Indicates that RF power is being coupled to the plasma and that the supply is meeting the desired set point.
• Flashing: Indicates that the supply is unable to reach the desired set point.
4 The power supply is responding to a recent change in gas composition or pressure and is attempting to level power.
4 The plasma has failed to ignite (soon to be followed by
a fault and “E07” error; see Table 6-1 on page 6-4)
4 The plasma ignited, but then went out (unit will display
a E24 fault); see E24 in Table 6-1 on page 6-4 for more
information
4 The plasma body is too conductive and the supply is at its current limit as typically seen in high power Ar
discharges or low pressure discharges. See “Appendix
4 The plasma body is too resistive and the supply is at its voltage limit.
When lit, this green LED indicates that the user interlock condition is satisfied through the user (Analog Control) port.
This interlock should be tied to the vacuum status and the cooling water flow status to the unit.
When off, this LED indicates that the user interlock state has not been satisfied on the user (Analog Control) port.
5707038-C Controls, Indicators, and Interfaces 4-23
Advanced Energy
®
Table 4-6. Indicators and displays (Continued)
Indicator
FAULT
Description
When lit, this yellow LED indicates that a fault has occurred.
When a fault occurs, the RF power enable state is overridden and the RF POWER and PLASMA status indicators turn off, signifying that no RF power is being applied to the plasma source. The fault is accompanied by an error code displayed on
the digital readout. (See Table 6-1 on page 6-4 for error code
information.)
DISPLAY
Note: AC power is still active in the device even after a fault has registered.
This three digit (seven segment) alphanumeric display is used to display error codes (EXX) and the immediate power being delivered to the plasma load in kilowatts (X.XX). For more
information on the error codes, see Table 6-1 on page 6-4.
4-24 Controls, Indicators, and Interfaces 5707038-C
UNIT ILLUSTRATIONS
Front View
Rapid™ F 6 kW Remote Plasma Source
5707038-C
Figure 4-12. Front view
Controls, Indicators, and Interfaces 4-25
Advanced Energy
®
Left Side View
4-26
Figure 4-13. Left side view
Controls, Indicators, and Interfaces 5707038-C
Right Side View
Rapid™ F 6 kW Remote Plasma Source
5707038-C
Figure 4-14. Right side view
Controls, Indicators, and Interfaces 4-27
Advanced Energy
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Top View
4-28
Figure 4-15. Top view
Controls, Indicators, and Interfaces 5707038-C
Bottom View
Rapid™ F 6 kW Remote Plasma Source
5707038-C
Figure 4-16. Bottom view
Controls, Indicators, and Interfaces 4-29
Advanced Energy
®
4-30 Controls, Indicators, and Interfaces 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Installation, Setup, and
Operation
This chapter includes information about making connections to the unit, and provides steps for first time as well as normal operation.
INSTALLING
The following sections will aid you in installing your Rapid F 6 kW plasma source.
5
RISK OF DEATH OR BODILY INJURY
Disconnect and lockout/tagout all sources of input power before working on this unit or anything connected to it.
5707038-C
Operating and maintenance personnel must receive proper training before installing, troubleshooting, or maintaining high-energy electrical equipment. Potentially lethal voltages could cause death, serious personal injury, or damage to the equipment. Ensure that all appropriate safety precautions are taken.
Occasionally, a temporary conductivity caused by condensation occurs when the device is not operating. Operate only in noncondensing environments.
Installation, Setup, and Operation 5-1
Advanced Energy
®
Unpacking
Unpack and inspect the unit carefully. Check for obvious physical damage. If none is apparent, proceed with the unit connections. If you do see signs of shipping damage, contact Advanced Energy Industries, Inc., and the carrier immediately. Save the shipping container for submitting necessary claims to the carrier.
Grounding
Do not attempt to turn on power until the chassis of the Rapid F 6 kW plasma source is tied to a local earth ground through a copper grounding strap that is sized in accordance with applicable requirements.
A suitable chassis ground connection made to the RFI ground stud (1/4 - 20 brass) on the front panel below the AC power input connection prevents or minimizes radio
frequency interference. See Figure 5-1 on page 5-3 for the location of the ground stud.
Spacing Requirements
Refer to Figure 5-1 on page 5-3 for unit dimensions. The fan exhaust grill at the rear
of the unit and all air vents require at least 1.9 cm (0.75") clearance for proper ventilation.
5-2 Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source
RFI ground stud
5707038-C
Figure 5-1. Dimensions
Installation, Setup, and Operation 5-3
Advanced Energy
®
Before Installing
Read the following recommendations and requirements before attempting to install the unit:
• Process gas flows must be shut off, disconnected, and disabled (lockout/tagout procedures are strongly recommended), and the source must be purged of all process gasses before working on this device or anything connected to it.
• Gas plumbing must be installed in accordance with applicable safety and environmental requirements.
• The Rapid F 6 kW plasma source requires the following standard vacuum connection for input and output gasses:
4 ISO KF 40 Flange (x2)
4 ISO KF 40 Centering Ring Assembly (x2)
4 ISO KF 40 split-ring bulkhead clamps (x2)
4 10-32 x 5/8" long stainless-steel screws and washers (x12)
• The following vacuum equipment is recommended for operation between 500 mT and 10 Torr:
4 A capacitance manometer vacuum pressure gauge rated for at least 10 Torr
4 An Ar flow controller rated for about 1.4 slpm
4 An NF
3
flow controller rated for about 2.5 slpm
4 An O
2
flow controller rated for about 1.0 slpm
4 A pumping system rated for 10 to 100 liter/second (effective pumping speed at the output of the process chamber or near a the throttle valve before the foreline of the pumping system)
4 A throttle valve with either integrated or manual control
Mounting the Unit
After unpacking the Rapid F 6 kW plasma source, prepare it for mounting by removing the protective end caps from the input and output flanges in a dust-free environment. Keep the end flanges free of dust and grease and use powder-free cleanroom gloves when handling the vacuum fittings.
The unit is designed to operate in any physical orientation (see Figure 2-2 on page 2-3
for typical installation). It is mounted to the top of the source assembly and shares its thermal management with the vacuum housing. Use the 1/4"-20 mounting fittings on
5-4 Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source each face of the unit when installing. Use only 1/4-20 x 1/2 long stainless-steel or brass hardware to prevent deep intrusion of the mounting hardware into the source’s chassis.
Note: Use only ASM #326 O-rings for mounting the unit to existing vacuum hardware.
5707038-C Installation, Setup, and Operation 5-5
Advanced Energy
®
See Figure 5-2 for the location of the unit’s mounting holes.
5-6
Figure 5-2. Right side mounting holes
Note: These holes are intended for mounting the Rapid F 6 kW plasma source to your system. Do not use these assembly holes to mount additional hardware not associated with the product.
Note: Though the unit is operational in a variety of orientations, do not cantilever the source such that the full weight and torque of the unit is solely supported from
Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source the ISO KF 40 fitting on either its input or output connection. The #10-32 screws used for the split flange fittings are insufficient to hold the weight and torque of the assembly. If the source must sit in a cantilevered orientation, it is possible to mount the source in an upright and vertical position on its bottom- side ISO KF 40 fitting with a user provided fixture. If the unit is oriented vertically, it is possible to support the full weight of the unit on the exit flange of the source.
Vacuum Connections
Interlock the Rapid F 6 kW plasma source operation against minimal water flow requirements and recommended peak vacuum pressure levels. Failure to do so could damage polymeric cooling lines or cause internal damage to the unit if operated at near atmospheric pressures.
Note: The Rapid F 6 kW plasma source has no water flow switch or pressure switch for internal interlocks or protection. It is the responsibility of the user to provide protection for water flow, operating pressure, and gas chemistry.
To avoid getting water in the source chamber, prepare and complete all vacuum connections prior to making water cooling connections.
The source has two ISO KF 40 vacuum connections for input and output gases.
1. Inspect the input and output ISO KF 40 flanges for scratches, dust, or debris before mounting. Do not allow any dust or foreign objects to enter the source’s vacuum interior during installation. If necessary, the sealing surfaces of the endflange fittings may be cleaned with isopropyl alcohol and lint-free clean wipes.
2. Once the Rapid F 6 kW plasma source is mounted and the vacuum connections
are sealed, vacuum pressure may be applied. (See “Troubleshooting and Global
Support” on page 6-1 if you suspect any significant vacuum leaks as a result of the
installation of the unit).
Note: When used for the first time, the source requires longer pumping time due to outgassing.
Connecting Cooling Water
The following section contains information on connecting cooling water to the Rapid
F 6 kW plasma source.
5707038-C Installation, Setup, and Operation 5-7
Advanced Energy
®
Interlock unit operation against minimal water flow requirements and recommended peak vacuum pressure levels. Failure to do so could damage polymeric cooling lines or cause internal damage to the unit if operated at near atmospheric pressures.
Because of the high volume of cooling water recommended, use the source only in a noncondensing environment. Condensing water vapor within the device can damage the unit.
Specifications” on page 3-5 for permissible range of water conductivity.)
Do not use de-ionized water for cooling purposes. De-ionized water causes both corrosion and erosion of cooling manifolds.
5-8
Avoid electrically conductive cooling water (such as salty or rusty water), which can compromise the isolation of electrically active components.
The Rapid F 6 kW plasma source is primarily water cooled, though internal fans assist the thermal management of the unit. To avoid getting water into the vacuum housing of the source, ensure that vacuum connections are made before making water connections. Do not operate the unit until water connections are made and cooling flow requirements are met. The Rapid F 6 kW plasma source requires two male SAE
The unit has no water flow interlock. While the source can protect itself and will register an over-temperature fault in the event of loosing adequate cooling water, it is strongly recommended that you provide a flow-switch interlock. Be certain to flow water in the correct direction to ensure the maximum available thermal protection and
Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source range of operation in your installation and application. Do not allow water flow to drop below recommended levels or to exceed the maximum allowable water temperature.
The following steps explain how to connect cooling water lines to the unit.
1. Connect the input and output water fittings and tighten securely.
2. Turn on the water and verify that there are no leaks at the connections.
3. Check that the flow rate and input water temperature are within the specified
range (see “Cooling Specifications” on page 3-4) before operating the unit.
Note: Keep the cooling water flowing through the unit even when RF power is disabled, especially during cycled operation.
Connecting AC Input Power
The following section provides information on connecting AC power to the Remote
Power Source.
This device must be installed so that the input power connection is inaccessible to the user.
To provide the required over-current protection, you must install and operate this device with a 35 A (max) circuit breaker switch on the AC input. The circuit breaker must be easily accessible and near the device.
Do not connect any power to this unit without first connecting cooling water and ensuring there are no leaks.
5707038-C
Supply wire must be approved to carry 35 A or greater and rated at least
300 Vac.
The unit has a 6", 6-pin, Harting Type, Han 6HSB, male, connector for AC input
power (See Figure 5-3.). The Rapid F 6 kW plasma source is phase insensitive.
Installation, Setup, and Operation 5-9
Advanced Energy
®
Table 5-1 provides pin descriptions for the AC power connector.
4
5
6
1
2
3
Table 5-1. Pin descriptions
Pin Description
Phase
Phase
Phase
Not connected
Ground
Not connected
To connect to AC power, perform the following operations:
1. Remove the protective cover from the Harting connector by releasing the pressure-loaded side tabs. Save the cover in case the unit needs to be moved, stored, or shipped.
2. Ensure that the AC power circuit breaker to the connector is switched off (lockout and tagout procedures are strongly advised.). Connect a properly wired Harting female connector and lock it in place with the two pressure-loaded side tabs.
Note: Connect the unit to a balanced three phase AC line. Connection to an unbalanced line could negatively impact the dynamic performance of this device and its viable range of operation.
5-10
Figure 5-3. Input connector
Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Connecting I/O and Auxiliary Connectors
On the Rapid F 6 kW plasma source, locate the user (Analog Control) port and secure a 25-pin, shielded, male, subminiature-D connector per the pin-out connections
described in Table 4-2 on page 4-2.
The AE Bus port is labeled RS-232. If required for your application, connect a 9-pin, female, shielded, sub-miniature-D connector to this port per the pin-out connections
described in Table 4-3 on page 4-9.
OPERATION
The following section provides information on protection and interlock, an overview of the Rapid F 6 kW plasma source’s operation, as well as instructions for first-time and normal use.
The Rapid F 6 kW plasma source has no chassis cover interlock. Do not attempt to operate the unit without the chassis cover properly affixed to the unit.
Interlock
The Rapid F 6 kW plasma source provides a system interlock through its 25-pin user
(Analog Control) port. When you close the interlock (pin 13 to pin 25), the AC power contactor is closed, making power available to the DC bus of the device’s switch mode power supply.
Plasma Source Operational Overview
The following section gives an overview of the Rapid F 6 kW plasma source’s operation.
Read all of the following instructions before proceeding with the initial operation of the Rapid F 6 kW plasma source.
5707038-C Installation, Setup, and Operation 5-11
Advanced Energy
®
This source was designed for ignition in pure Ar gas. Direct ignition in other gases could lead to unsuccessful start-up of the source or to damage or shortened lifetime of the anodized walls within the device.
Contact AE for range of operation for direct ignition in molecular gas mixtures.
This unit is intended for use in select molecular gases. Do not operate continuously in argon and nitrogen for prolonged periods of time (>10 s).
The Rapid F 6 kW plasma source is designed to work with pure molecular gas mixtures; however, for ignition, the source requires an easily ionized noble gas such as argon (Ar). Thus, it is necessary to integrate the source’s operation with dynamic or sequential adjustment of gas flow, vacuum pressure, and power set point steps.
The test recipe described in “First Time Operation” illustrates the operation of the
source using Ar and O
2
. Use it during first-time operation to verify that the Rapid F 6 kW plasma source is installed and working properly.
Note: Very similar recipe steps can be adopted for operation in Ar with NF
3
or in Ar with O
2
:C x
F y
gas mixtures.
First Time Operation
The following procedures take you through the initial operation of the Rapid F 6 kW
plasma source. See Figure 2-2 on page 2-3 for a diagram of the installation used in the
test recipe.
5-12 Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source
PROCEDURAL OVERVIEW
Figure 5-4 gives an overview of the test recipe.
Figure 5-4. Typical process sequence for normal operation
Power Up
!
!
Interlocked Idle State
!
!
User interlocks source with vacuum and cooling water flow.
Front panel response:
INTERLOCK LED: lit
AC POWER LED: lit
Source is ready to operate
Argon Gas Ignition
!
!
User supplies Ar gas with souce pressure of 0.2 to 1 Torr, sets power setpoint to >2 kW, and enables RF power.
Front panel response:
!
RF POWER LED: lit
If current readback is >1.0 A within 5 s, then ignition is successful and the PLASMA LED turns on.
!
!
!
Molecular Gas Addition/Transition
User adjusts power setpoint to desired level and introduces molecular gas to source with Ar discharge.
Front panel response:
!
RF POWER LED: lit
!
PLASMA LED: lit
Optional: After acheiving setpoint, remove Ar gas if not needed.
!
Process Run Time
User adjusts molecular gas mixture, pressure, and power setpoint as needed.
!
!
Source Off/Return to Idle State
User either turns off or resets gas flows and source power setpoint, returning the unit to idle state for next cycled operation.
Front panel response:
!
RF POWER LED: off
!
PLASMA LED: off
5707038-C Installation, Setup, and Operation 5-13
Advanced Energy
®
5-14
PROCEDURE
Use the following steps to initially turn on and test the installation of the Rapid F 6 kW plasma source.
1. Ensure that you have installed the unit properly by following the preceding procedures.
2. Verify the vacuum integrity installation of the unit on the vacuum process chamber by examining base-pressure and leak-back pressure rates. Base vacuum pressures will depend upon your vacuum system capabilities.
3. Confirm that all power and control connections are secure.
4. Provide AC power to the unit. For approximately 60 s, the unit cycles through a front panel test sequence on the LEDs and alphanumeric display while the internal bus capacitors charge.
5. Close the connection between pins 13 and 25 on the user (Analog Control) port so that the unit is interlocked to cooling water flow and the working pressure.
Note: You must provide the sensing switches and logic for water flow and vacuum pressure.
6. Verify that the green INTERLOCK LED on the front panel is illuminated. After a brief delay, you will hear a click as the internal AC contactor closes. Shortly thereafter, the green AC POWER LED illuminates. The unit is now in its Idle-
Ready state.
7. Provide an Ar gas flow, establishing 0.2 to 1 Torr of pressure in the source.
Note: The use of long gas delivery lines, gas diffusers, diverters, or baffles could induce a pressure in the unit that is substantially higher than that measured in the vacuum process chamber.
Note: On first time installation, atmospheric air present in the gas lines may require several seconds of gas flow to purge.
8. Provide a set point of >2 to 4 kW (0 to 10 V full signal for 6 kW, user (Analog
Control) port pins 18 and 3).
Note: In order for ignition to occur, set point must be above 1 kW
9. Close the connection between pins 4 and 2 on the user (Analog Control) port to satisfy the RF enable condition. The green RF POWER LED on the front panel illuminates, and source responds in one of three ways:
Note: Code E21 may flash intermittently on the display screen during ignition.
This flashing does not indicate an error. Rather, it indicates that the unit has reached the current limit, which is normal during ignition. If the unit remains at the current limit for longer than 90 seconds, it will disable output and provide a steady display of E21 (not flashing) (for information
on resolving this condition, see Table 6-1 on page 6-4).
Installation, Setup, and Operation 5707038-C
5707038-C
Rapid™ F 6 kW Remote Plasma Source
4 Ignition successful; power limited by user set point: the green PLASMA LED is illuminated continuously and the display reads the desired set point. (This limitation is bounded by the current limit of the power supply when attempting to power a highly conductive plasma load, as is often the case with high electron density Ar gas discharges.)
4 Ignition successful; power limited by current control limit of power supply: the green PLASMA LED flashes and the display reads between 2 and 3.5 kW.
(This limitation is bounded by the current limit of the power supply when attempting to power a highly conductive plasma load, as is often the case with high electron density Ar gas discharges.) This response occurs when the power to the plasma is limited to approximately 2.6 kW while your set point is >2.6 kW.
4 Ignition failure; Ar discharge did not ignite: the PLASMA LED is off and the front panel displays the “E07” (Ignition Fault) error code if this condition persists for more than 5 s. Reset the PLASMA ON ENABLE signal on the user
(Analog Control) port to clear the error. Return to step 7 and repeat with a
higher or a lower Ar pressure. See Table 6-1 on page 6-4 for more information
on error codes.
10. Increase the power set point to 4.5 to 6 kW while the Rapid F 6 kW plasma source is operating in pure Ar.
11. With the Ar still flowing, introduce O
2
into the process mix at an Ar:O
2
ratio of approximately 1.5:1 at a pressure of 1 to 2 Torr. (Alternatively you may use NF
3 at and Ar:NF
3
ratio of about 1:1.) One of two conditions will occur:
4 Transition to molecular gas mixture successful; power limited by user set
point: the green PLASMA LED is illuminated continuously. The power levels to within 200 W of your set point.
4 Transition to molecular gas mixture failure; loss of high power density
inductive mode: the power level displayed on the front panel drops below
1 kW, the green PLASMA LED turns off, and the front panel displays error code E24. Return to step 7 and repeat with a higher power set point or a lower vacuum pressure set point. (For more information on the E24 error code, see
Note: A sizable pressure burst could cause this failure. Check for any flow or high pressure overshoots due to under-damping of system flow controllers or throttle valves.
12. Optional Step: if your process does not require Ar dilution, you may choose to perform this step with first time operation. With a power set point of 5 to 6 kW, remove the Ar gas from the mixture. One of two conditions will occur.
4 Transition to a pure molecular gas mixture successful; power limited by user
set point: The green PLASMA LED is illuminated continuously. The delivered power should be within 200 W of your set point.
Installation, Setup, and Operation 5-15
Advanced Energy
®
4 Transition to a pure molecular gas mixture failure; loss of high power density
inductive mode: the power level drops below 1 kW, the green PLASMA LED turns off, and the front panel displays error code E24. Return to step 7 and repeat with a higher power set point or a lower vacuum pressure set point. (For
more information on the E24 error code, see Table 6-1 on page 6-4.)
Normal Operation
The following section gives directions for the normal operation of the unit.
This unit is not intended for operation in chlorine bearing gases or any gases that may deposit insulating or conductive films. Examples of depositing gases include siloxanes, silanes, hydrocarbons, and any metal bearing precursor gas or vapor. Use of these gases could lead to damage of the internal vacuum housing of the unit.
This source was designed for ignition in pure Ar gas. Direct ignition in other gases could lead to unsuccessful start-up of the source or to damage or shortened lifetime of the anodized walls within the device.
Contact AE for range of operation for information on direct ignition in molecular gas mixtures.
5-16
This unit is intended for use in select molecular gases. Do not operate continuously in argon and nitrogen for prolonged periods of time (>10 s).
Provided that the installation and first time operational tests are successful, normal operation should proceed per steps 7 through 14 in “First Time Operation.” However,
consult the following section, “Process Integration” before operation.
PROCESS INTEGRATION
The Ar:O
2
test recipe instructions and reference vacuum conditions should be treated as guidelines for typical dynamic operation. Because each vacuum system is configured for different pumping speeds and gas flow, you will need to develop your own process gas chemistry, pressure, flow, and transition steps. Provided that your flow controllers and vacuum hardware have satisfactory response times and relatively low dynamic pressure overshoot, the Rapid F 6 kW plasma source can be ignited and power-leveled for steady-state operation within a few seconds.
Installation, Setup, and Operation 5707038-C
5707038-C
Rapid™ F 6 kW Remote Plasma Source
Current, voltage, and frequency limits are needed to protect the power supply. These electrical restrictions dictate the viable range of power and pressure for any given gas mixture. Though not all plasma and power conditions can be satisfied, the Rapid F 6 kW plasma source’s topology provides a compact means of delivering high power levels (6 kW) into a wide range of plasma conditions that would be more expensive and complicated with conventional segregated plasma source, matching network, and power supply approaches.
Note: See Appendix, “Selecting Gas Mixtures, Gas Pressures, and Power Levels” for
more information.
Note: Unless otherwise specified, AE does not warranty any process method or material composition results associated with the sale or application of this product.
Working Gas and Vapor Compatibility
The Rapid F 6 kW plasma source was designed for remote excitation and dissociation of reactive gas species in vacuum applications. The following guidelines apply to its application to plasma-based processes.
• This source was designed to ignite on Ar gas at pressure below ~1 Torr. Unless operated below 50 mT, Ar gas is generally recommended for reliable ignition of the source. (Other easily-ionizable noble gases may be used to ignite the source.)
• After ignition, the source may operate in either pure O
2
or NF
3
gases over a broad range of pressures. For example, the source may provide near-complete dissociation of NF3 gases at flows up to 2 Torr to 2.5 Torr at full power. The exact level of dissociation is a function of operating pressure and residence time of gases in the source. Higher pressure operation at a constant flow can provide more dissociation as the net residence time of the gas in the source is longer. However, the source and power supply have a finite viable plasma impedance range that will limit the pressure/flow range for stable operation with a given gas. Some attempts to increase the pressure range or apparent transport of reactive F species from the remote source to the chamber have been made by using Ar dilution of NF3. While
Ar dilutions can decrease the impedance of the plasma, such dilution does not change the viable plasma impedance range of the remote plasma source. For a
viable operating range of NF3 and NF3/Ar mixtures, see “Process Operating
• When the plasma is present in the unit, do not operate the device with depositing gases and vapors without a secondary oxidant or other gas additive that inhibits deposition within the source. For example, hydrocarbon and perfluorocarbon gases should be accompanied with appropriate level of O
2
or H
2
O.
• Depositing gases such as silane, siloxanes, silazanes, or any metal-bearing deposition precursors should never be disposed directly through the source.
Installation, Setup, and Operation 5-17
Advanced Energy
®
• Gases that may be highly corrosive to the anodized aluminum walls of the vacuum chamber should never be disposed through the source. In particular, chlorinebearing gases should never be used.
Note: See “Process Operating Specifications” on page 3-6 for operational
specifications and working gases.
PREVENTIVE MAINTENANCE
Do not attempt to disassemble, re-work or perform repairs on the vacuum housing of the source, as it is integrated with the power supply.
Doing so could invalidate any warranty associated with this product or cause damage to the power supply or vacuum source components.
Note: There are no user-serviceable parts or components associated with this product.
Your Rapid F 6 kW plasma source has been designed to have minimal preventative maintenance that would require removing the source from its vacuum installation. For most applications that involve fluorine and oxygen bearing chemistries, deposits and wall contamination introduced by the process can be cleaned from the anodized aluminum walls by in-situ processes using other fluorine, hydrogen, or oxygen based gases or mixtures. Because the power supply and vacuum source are completely integrated into a single mechanical structure, you cannot disassemble and inspect the vacuum walls of the source assembly. As such, preventative maintenance is limited to inspection of the integrity of the source’s ISO KF 40 fittings and seals.
Note: An annual water pressure test at 19.5 bar (1950 kPa) for a duration of 1 minute is recommended.
5-18 Installation, Setup, and Operation 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Troubleshooting and Global
Support
This chapter provides information on diagnosing and resolving problems with the unit. It also gives contact information for Global Support.
Note: You can also troubleshoot the Rapid F 6 kW plasma source using AE’s Virtual
Front Panel (VFP) software interface. For more information about VFP, see
“Virtual Front Panel (VFP) Software Interface” on page 4-20.
6
Do not attempt to disassemble, re-work, or perform repairs on the vacuum housing of the source as it is integrated with the power supply.
Doing so could invalidate any warranty associated with this product or cause damage to the power supply or vacuum source components.
BEFORE CALLING AE CUSTOMER SUPPORT
Before calling AE Customer Support, perform the following steps or procedures.
RISK OF DEATH OR BODILY INJURY. Disconnect and lockout/tagout all sources of input power before working on this unit or anything connected to it.
5707038-C
Process gas flows must be shut off, disconnected, and disabled (that is, locked out/tagged out), and the source must be purged of all process gases before working on this device or anything connected to it.
Troubleshooting and Global Support 6-1
Advanced Energy
®
There are no user serviceable parts or components associated with this product. Contact AE for any service issues related to the unit.
Checks With Input Power Off
The following section provides steps for checking the unit’s operation with the power off and the unit installed on a working vacuum system.
1. Ensure that the power to the unit is off.
2. Check that the unit is securely mounted to the vacuum chamber and is under vacuum.
3. Check the operation of flow controller, pressure controllers, throttle valves, and all associated auxiliary vacuum equipment that is required for the unit to run.
4. Perform leak checks or leak-back rate checks on the Rapid F 6 kW plasma source installation to see if the unit has been installed properly on the vacuum chamber.
5. Check for external damage to the unit, power cable, and control connectors.
6. Check to determine whether any system-related circuit breakers have been tripped.
7. Ensure the input power meets specifications and, in particular, that all three phases are present.
8. Check that the input line connectors are properly attached to the unit.
9. Verify that ground connections are adequate and secure.
10. Ensure that the cooling water to the unit meets specifications (in terms of flow, temperature, contaminant levels, and conductivity.)
Checks With Input Power On
The following section provides steps for checking the unit’s operation with the power on.
Note: You can also troubleshoot the Rapid F 6 kW plasma source using AE’s Virtual
Front Panel (VFP) software interface. For more information about VFP, see
“Virtual Front Panel (VFP) Software Interface” on page 4-20.
1. Turn on input power.
2. After AC power is turned on, the unit cycles through a front panel test sequence on the status LEDs and alphanumeric display for approximately 60 seconds while
6-2 Troubleshooting and Global Support 5707038-C
Rapid™ F 6 kW Remote Plasma Source the internal bus capacitors charge. Verify that the unit performs this test while charging up.
3. Satisfy the interlock condition on the user (Analog Control) port by connecting
pins 13 and 25. See “User (Analog Control) Port” on page 4-1 for more
information about making this connection.
4. Verify that the INTERLOCK LED is illuminated. If the interlock condition is satisfied, the internal AC contactor closes in about 10 seconds. The AC POWER
LED turns on, indicating that the unit is ready to operate.
TROUBLESHOOTING
Troubleshooting the source’s operation may require that you investigate or make adjustments to elements of the process such as gas mixtures as well as flow and pressure dynamics. The dynamic impedance range of Rapid F 6 kW plasma source has limitations; therefore, not every operating pressure, gas chemistry, and power level can be satisfied. For instance, higher power will likely be required in order to sustain plasma at higher pressures when using pure or weakly diluted molecular gases. Also, you may find problems sustaining a plasma in the source when the response of flow/ pressure controllers leads to high pressure bursts when turning on or making transitions from low flow/pressure to high flow/pressure conditions. Such process integration work should be anticipated when applying the unit to any new or untested
process. See “Selecting Gas Mixtures, Gas Pressures, and Power Levels” in the
appendix for further information.
This source was designed for ignition in pure Ar gas. Direct ignition in other gases could lead to unsuccessful start-up of the source or to damage or shortened lifetime of the anodized walls within the device.
Contact AE for range of operation for direct ignition in molecular gas mixtures.
5707038-C Troubleshooting and Global Support 6-3
Advanced Energy
®
Error Code Troubleshooting Table
The Rapid F 6 kW plasma source displays an error code on the front display when an
error or fault occurs. Table 6-1 defines these codes and provides procedures to resolve
the faults.
Note: The unit clears all faults and errors when it powers off. It reports a lifetime count of errors and faults through AE Bus command 220 (saved in nonvolatile memory). AE Bus command 212 reports the most recent error code (the unit erases this information when it powers off).
Table 6-1. Error code troubleshooting table
Error Code
Number and
Message
E03
Thermal limit exceeded
Problem Indicated
The source is inadequately cooled, causing thermal switches associated with the vacuum housing and electronics cold plate to open and shut off the delivery of power to the plasma source.
E04
Internal fan fault
The convective cooling fan inside source chassis has failed.
Suggested Action
To resolve this fault:
1. Send an RF off command or reset the user port PLASMA ON
ENABLE signal to clear the fault.
2. Check cooling water flow and local environmental temperature and adjust to regulate the unit to working temperatures.
If this error code persists after completing the previous steps, contact AE Global
Customer Support” on page 6-10).
Contact AE Global Support.
6-4 Troubleshooting and Global Support 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 6-1. Error code troubleshooting table (Continued)
Error Code
Number and
Message
E05
Bus AC undervoltage fault
E06
Bus AC overvoltage fault
E07
Plasma ignition failure
Problem Indicated
Facility AC power to the bus is too far below its nominal working limits.
Facility AC power to the Bus is above the unit’s nominal working limits.
The source has failed to ignite a discharge.
Upon any attempt to ignite the source, if the power readback is less than 1500 W for the first 5 s, the E07 fault will be displayed.
Note: This fault is only associated with the inability to ignite a plasma. If the gas discharge extinguishes during typical run-time operation after the first 5 s of operation, the
“E24” fault will appear on the display.
Suggested Action
Check the line voltages on each phase coming in to the unit. Correct any abnormal condition. If you find no abnormalities and the error persists, contact AE Global
Customer Support” on page 6-10.)
Check the line voltages on each phase coming in to the unit. Correct any abnormal condition. If you find no abnormalities and the error persists, contact AE Global
Customer Support” on page 6-10.)
To resolve this fault:
1. Send an RF off command or reset the user port PLASMA ON
ENABLE signal to clear the fault.
2. Check for proper Ar flow and pressure conditions entering the source.
3. Verify that no molecular gases are leaking through the flow controllers or valves.
4. Restart your process. If this fault recurs, contact
AE Global Support. (See
5707038-C Troubleshooting and Global Support 6-5
Advanced Energy
®
Table 6-1. Error code troubleshooting table (Continued)
Error Code
Number and
Message
E11
AE Bus (RS-232) port heart beat time-out fault
Problem Indicated
The RS-232 port time-out has been exceeded, and the unit has shut output off.
That is, the Rapid F 6 kW plasma source has not received a communication packet from the host computer in the time set with
AE Bus command 40 (see page 4-15 for a
description of this command).
E16
Bad ambient temperature thermistor
E19
Ambient overtemperature fault
This error code indicates a malfunction of the ambient temperature thermistor within the unit.
Ambient temperature of unit has exceeded
60ºC (140ºF).
Suggested Action
To resolve this problem:
1. Send an RF off command or reset the user port PLASMA ON
ENABLE signal to clear the fault.
2. Make sure that communication links
between the host computer and the plasma source are
properly connected. For installation information,
Auxiliary Connectors” on page 5-11.
3. Make sure that the host computer is sending communication packets at a rate that complies with the time-out set with AE Bus command
40. If it is not, change either the time-out value or the rate at which the host computer is sending communication packets.
Contact AE Global Support
contact information).
Allow the unit to cool (with the output off) to below 50ºC
(122ºF). Unit will reset when temperature returns to a level below 50ºC (122ºF). Make sure that all cooling requirements are met (see
6-6 Troubleshooting and Global Support 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 6-1. Error code troubleshooting table (Continued)
Error Code
Number and
Message
E20
Duty cycle fault
Problem Indicated
The Rapid F 6 kW plasma source has a maximum duty cycle of 50%. As the unit runs, the duty cycle timer counts on and off time, adding a second to the timer for each second of on-time and subtracting a second for each second of off-time. If the timer reaches 300 seconds (meaning that there have been 300 more seconds of otime than off-time, the unit shuts output off and activates the duty cycle error.
Suggested Action
To resolve this fault:
1. Wait 300 seconds for the condition to clear.
2. Send an RF off command or reset the user port PLASMA ON
ENABLE signal to clear the fault.
3. Adjust the process times to avoid the error.
4. Restart the process.
5707038-C Troubleshooting and Global Support 6-7
Advanced Energy
®
Table 6-1. Error code troubleshooting table (Continued)
Error Code
Number and
Message
E21
Current limit fault
Problem Indicated
This error code has two states:
When flashing, this error code indicates that the unit is operating at the current limit, which is normal during ignition. A flashing E21 does not indicate a fault; the flashing should stop after ignition and transition to regular process gases.
When on steady, this error code indicates that the unit has exceeded the software current limit by 20 A for more than 90 seconds or that it has exceeded a maximum current limit duty cycle of 23% and turned output off. The unit calculates current by dividing delivered power by single-turn voltage. Both values are available through the AE Bus (RS-232) port or VFP software (see Chapter 4).
The software current limit is 80 A. The hardware current limit is 100 A. Use the following equation to calculate the maximum time that the unit can operate at the current limit before generating a steady
E21 fault:
Time (s) = 1800 / (current [A] - 80)
Use the following equation to calculate the maximum current limit duty cycle:
Duty cycle (%) = 600 / (current [A] - 74)
The following table displays examples of maximum current, time, and duty cycles.
Suggested Action
To resolve this fault:
1. Wait 300 seconds for the condition to clear.
2. Send an RF off command or reset the user port PLASMA ON
ENABLE signal to clear the fault.
3. Make process adjustments as suggested in the following paragraph.
The following conditions may contribute to this fault.
To resolve the problem, make the necessary process adjustments.
• Plasma pressure may be too low
• There may be too much argon in the mixture
• The argon mass flow controller may be leaking
Maximum
Current (A)
Maximum
Time (s)
Max Current Limit
Duty Cycle (%)
100
95
90
120
23.1
28.6
90
85
180
360
37.5
54.5
1
1. RF-on duty cycle is limited to 50%
6-8 Troubleshooting and Global Support 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 6-1. Error code troubleshooting table (Continued)
Error Code
Number and
Message
E24
Plasma wink-out fault
Problem Indicated
After the first 5 seconds of operation, the unit monitors the delivered power level. A power level below 1500 W activates this fault and the unit turns output off.
Suggested Action
To resolve this fault:
1. Send an RF off command or reset the user port PLASMA ON
ENABLE signal to clear the fault.
2. Make process adjustments as suggested in the following paragraph.
The following conditions may contribute to this fault.
To resolve the problem, make the necessary process adjustments.
• Gas pressure may be too high (causing excessively high voltage)
• Gas pressure or flow may be fluctuating
• Power set point may be too low for the plasma pressure
5707038-C Troubleshooting and Global Support 6-9
Advanced Energy
®
AE GLOBAL CUSTOMER SUPPORT
Please contact one of the following offices if you have questions:
Table 6-2. Global Customer Support locations
Office
AE, World Headquarters
1625 Sharp Point Drive
Fort Collins, CO 80525 USA
Contact
Phone (24 hrs/day, 7 days/week):
800.446.9167 or
970.221.0108
Fax (M–F, 7:00 am – 5:30 pm MST):
970.407.5981
Note: For returns and repairs, please call Global
Customer Support to get the correct shipping address.
Email: [email protected]
(We will respond to email by the next business day.)
AE, GmbH
Note: For customers outside the US, please contact your local AE office.
Phone: 49.711.779270
Fax: 49.711.7778700
Raiffeisenstrasse 32
70794 Filderstadt
(Bonlanden) Germany
AE, Japan KK
TOWA Edogawabashi Bldg. 347
Yamabuki-cho Shinjuku-ku
Tokyo 162-0801 Japan
AE, Korea Ltd.
Phone: 81.3.32351511
Fax: 81.3.32353580
Phone: 82.31.705.2100
Fax: 82.31.705.2766
Gongduk Building, 4th floor
272-6 Seohyun-Dong,
Bundang-Gu, Seongnam-Si
Kyunggi, 463-050 Korea
AE, United Kingdom
Unit 5, Minton Place,
Market Court, Victoria Road
Bicester, Oxon OX26 6QB UK
Phone: 44.1869.320022
Fax: 44.1869.325004
6-10 Troubleshooting and Global Support 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Table 6-2. Global Customer Support locations (Continued)
Office
AE, Taiwan, Ltd.
Contact
Phone: 886.2.82215599
10F-6, No. 110, Chung Shan Rd.
Sec. 3, Chungho City, Taipei
Hsien
Taiwan 235
AE China
Fax: 886.2.82215050
Phone: 86.21.58579011
469 Huaxia Dong Road
Zhangjiang Town
Shanghai, China 201203
Fax: 86.21.58579003
RETURNING UNITS FOR REPAIR
Before returning any product for repair and/or adjustment, first follow all
troubleshooting procedures. If, after following these procedures, you still have a problem or if the procedure instructs you to, call AE Customer Support and discuss the problem with a representative. Be prepared to give the model number and serial number of the unit as well as the reason for the proposed return. This consultation call allows Customer Support to determine whether the problem can be corrected in the field or if the unit needs to be returned. Such technical consultation is always available at no charge.
If you return a unit without first getting authorization from Customer Support and that unit is found to be functional, you will be charged a re-test and calibration fee plus shipping charges.
To ensure years of dependable service, Advanced Energy
®
products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide.
WARRANTY
5707038-C
Advanced Energy
®
(AE) products are warranted to be free from failures due to defects in material and workmanship for 12 months after they are shipped from the factory
(please see warranty statement below, for details).
In order to claim shipping or handling damage, you must inspect the delivered goods and report such damage to AE within 30 days of your receipt of the goods. Please note that failing to report any damage within this period is the same as acknowledging that the goods were received undamaged.
Troubleshooting and Global Support 6-11
Advanced Energy
®
For a warranty claim to be valid, it must:
• Be made within the applicable warranty period
• Include the product serial number and a full description of the circumstances giving rise to the claim
• Have been assigned a return material authorization number (see below) by AE
Customer Support
All warranty work will be performed at an authorized AE service center (see list of contacts at the beginning of this chapter). You are responsible for obtaining authorization (see details below) to return any defective units, prepaying the freight costs, and ensuring that the units are returned to an authorized AE service center. AE will return the repaired unit (freight prepaid) to you by second-day air shipment (or ground carrier for local returns); repair parts and labor will be provided free of charge.
Whoever ships the unit (either you or AE) is responsible for properly packaging and adequately insuring the unit.
Authorized Returns
Before returning any product for repair and/or adjustment, call AE Customer Support and discuss the problem with them. Be prepared to give them the model number and serial number of the unit as well as the reason for the proposed return. This consultation call will allow Customer Support to determine if the unit must actually be returned for the problem to be corrected. Such technical consultation is always available at no charge.
Units that are returned without authorization from AE Customer Support and that are found to be functional will not be covered under the warranty (see warranty statement, below). That is, you will have to pay a retest and calibration fee, and all shipping charges.
Warranty Statement
The seller makes no express or implied warranty that the goods are merchantable or fit for any particular purpose except as specifically stated in printed AE specifications. The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published specifications and that the goods will be free from defects in material and workmanship. The seller's liability for breach of an expressed warranty shall exist only if the goods are installed, started in operation, and tested in conformity with the seller's published instructions. The seller expressly excludes any warranty whatsoever concerning goods that have been subject to misuse, negligence, or accident, or that have been altered or repaired by anyone other than the seller or the seller's duly authorized agent. This warranty is expressly made in lieu of any and all other warranties, express or implied, unless otherwise agreed to in writing. The
6-12 Troubleshooting and Global Support 5707038-C
Rapid™ F 6 kW Remote Plasma Source
warranty period is 12 months after the date the goods are shipped from AE. In all cases, the seller has sole responsibility for determining the cause and nature of the failure, and the seller's determination with regard thereto shall be final.
5707038-C Troubleshooting and Global Support 6-13
Advanced Energy
®
6-14 Troubleshooting and Global Support 5707038-C
Rapid™ F 6 kW Remote Plasma Source
A
Appendix A
SELECTING GAS MIXTURES, GAS
PRESSURES, AND POWER LEVELS
The following paper discusses the operational impedance range of the Rapid F 6 kW plasma source in order to assist process design.
Power Supply Limitations
All power supplies must operate within the limits of their maximum output voltage and maximum output current capabilities. These limits define the load impedance into which full power (maximum current at maximum voltage) can be delivered. The advanced topology of the power supply integrated within the Rapid F 6 kW plasma source automatically varies the output impedance and frequency, allowing the delivery of full power into a range of load impedances. However, even though its capabilities are much broader than other power supplies, this unit still operates within a given range of load impedances.
Plasma Impedance
The impedance of a plasma load within the source is a function of numerous parameters, including gas or vapor chemistry, pressure, and plasma discharge power level. These and other factors also affect plasma ignition. To ignite the plasma, the power supply must deliver enough voltage to drive sufficient current into the high impedance of the unignited gas. Further, in order to sustain the plasma discharge and provide high power levels, it must deliver high levels of voltage and current into the much lower impedance of the ignited gas.
Because noble gases ionize easily, they present a much lower ignition and operating impedance to the power supply than do reactive gases. The undiluted flow of a noble gas such as argon greatly improves the probability of ignition. However, once ignited, the low operating impedance of argon may result in excessive current demands on the power supply, thus creating a condition that limits current at the maximum specified level. This produces an output power level below the power set point. The plasma is sustained, but the set point is lost, indicated by a flashing PLASMA LED.
After the plasma ignites, it is possible to transition to reactive process gas flow.
Because the operating impedance of the molecular gas is substantially higher than that of argon, this plasma may require a higher voltage than the power supply is capable of producing, usually resulting in the loss of the plasma. The power supply responds by turning off the PLASMA LED.
5707038-C Appendix A A-1
Advanced Energy
®
To prevent plasma impedance from going outside the range of the power supply’s capabilities, end users have three options:
• When in current limit, increase the flow rate of the molecular gas. This increases plasma impedance. If the plasma extinguishes, use argon to re-ignite it.
• Dilute the molecular gas with a noble gas to reduce the plasma impedance.
• Increase the power set point. This increases the plasma charged-particle density, lowering the plasma impedance.
Summary
The Rapid F 6 kW plasma source is specified to operate within a certain range of plasma impedances. The end user controls impedance by varying gas chemistry, gas pressure, and power set point. In proper combination, the resulting impedance permits successful ignition and operation. An improper combination prohibits ignition, causes operation below the power set point, or extinguishes the plasma. If you suspect that the unit is not functioning in accordance with its specifications, please consult the
Troubleshooting chapter.
A-2 Appendix A 5707038-C
Rapid™ F 6 kW Remote Plasma Source
Index
A
ac power
AE Bus ideal communications transaction
message packet
AE customer support
analog control
B
before calling customer support
bottom View
C
certification
checks power off
power on
checksum
clearance requirements
codes error
command
command set host port
command status response (CSR) codes
commands host port
communicating through the host port
communications transaction, figure
conditions of use
connecting cooling water
connecting ac input power
connections input power
input/output vacuum fittings
vacuum
connector/cable specifications
connectors coolant
host port
input
user port
controls, indicators, and interfaces
coolant contaminates
flow rate
temperature
cooling
specifications
cooling water
CSR
customer support before calling
contact information
returning units for repair
D
data (data bytes)
dimensional drawing
directives
73/23/EEC
89/336/EEC
display
displays and indicators
drawings dimensional
E
electrical specifications
electromagnetic compatability (EMC) directives and standards
EMC, see electromagnetic compatibility
environmental specifications
error codes
F
fault
front panel display indicators
front view
G
general description
grounding
H
Han 6HSB
5707038-C Index iii
Advanced Energy
®
Harting 6-pin
header
host port
command set
commands
communications
RS232
host port (RS-232 with AE Bus)
host port connector
I
icons in user manual
ideal communications transaction
indicators
fault
interlock
indicators and displays
input connector
input connector pin description
input requirements
installation
safety warning
installing safety requirements
interlock
introduction
L
labels on unit
load power specifications
M
maintenance preventive
message packet
checksum
command
data bytes
header
mounting requirements
mounting specifications
N
normal operation
O
operation
iv Index normal
typical process sequence
operational specifications
overcurrent protection
overvoltage category
P
physical installation
physical specifications
pin description input connector
pin descriptions serial host port
pin descriptions, user port
plasma
power alternating current
input
input line current
line input voltage
load frequency
load specifications
RF
preventive maintenance
product certification
product compliance
protection excessive internal temperature
ignition failure
input over voltage
input under voltage
internal over current
over current
phase drop
plasma load impedance
R
remote plasma source topology diagram
returning units for repair
RF power
RS232
S
safety directives
see also directives
installation
precautions
product
5707038-C
standards
see also standards
serial host port pin description
setup
side view
specifications
AC input power
cable
clearance
connector
coolant connectors
coolant contaminates
coolant flow rate
coolant temperature
cooling
efficiency (line to load)
electrical
environmental
input line current
input line voltage
input power
input/output vacuum fittings
load power
load power accuracy
load power frequency
operational
over current
overvoltage
peak load power
physical
power factor
size
source frequency
vacuum
vacuum leak rate
vacuum wall surfaces
weight
standards
47 CFR Part 18
ANSI/ISA 82.02.01
CSA C22.2 No. 1010.1
EN 55011
EN 61010-1
SEMI S2-0200
symbols in user manual
T
theory
theory of operation
top view
5707038-C Index
Rapid™ F 6 kW Remote Plasma Source troubleshooting pointers
troubleshooting and customer support
typical installation
U
unpacking
user manual icons used
symbols used
type conventions
user port analog control
user port (25-pin)
User port (analog control) signal characteristics
wiring diagrams
user port connector
user port pin descriptions
V
vacuum leak rate
wall surfaces
vacuum connections
vacuum specifications
W
warranty authorized returns
filing a claim
returning units
statement
water
wiring diagrams
User port (analog control)
working gas and vapor compatibility corrosive gasses
depositing gasses
v
Advanced Energy
® vi Index 5707038-C
Advertisement
Key features
- Compact and easy-to-mount
- Inductively-coupled
- Closed-path, water-cooled metal manifold
- Integrated mid-frequency (~400 kHz) 6 kW generator
- Provides flexibility and control of a wide range of reactive plasma chemistries
- 25-pin user (Analog Control) port
- 9-pin AE Bus (RS-232) port
- Internal AC line filter
- User-interlocked contactor
