Probe Card Adapter.book

Probe Card Adapter.book
w w w . k e i th l e y. c o m
Model 9139A-PCA
Probe Card Adapter
Instruction Manual
9139A-901-01 Rev. D / October 2011
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Model 9139A-PCA Probe Card Adapter
Instruction Manual
©2011, Keithley Instruments, Inc.
All rights reserved.
Cleveland, Ohio, U.S.A.
October 2011
Document Number: 9139A-901-01 Rev. D
Safety Precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although some
instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may
be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer
to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument.
They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or
replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the
operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service
personnel may perform installation and service procedures.
Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement
Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and
data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient
over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC
mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise
marked or described in the user documentation.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak,
or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are
prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact.
Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of
operating at or above 1000V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER
connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current
and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
04/09
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power
disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers,
installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.
The instrument and accessories must be used in accordance with its specifications and operating instructions, or the safety of the
equipment may be impaired.
Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information,
and as shown on the instrument or test fixture panels, or switching card.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid
interlock.
If a
screw is present, connect it to safety earth ground using the wire recommended in the user documentation.
The ! symbol on an instrument means caution, risk of danger. The user should refer to the operating instructions located in the user
documentation in all cases where the symbol is marked on the instrument.
The
symbol on an instrument means caution, risk of danger. Use standard safety precautions to avoid personal contact with these
voltages.
The
The
symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
symbol indicates a connection terminal to the equipment frame.
If this
symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly
disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the
associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the
warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits - including the power transformer, test leads,
and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if
the rating and type are the same. Other components that are not safety-related may be purchased from other suppliers as long as they
are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain
accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments
office for information.
To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner
directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis
(e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the
board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.
04/09
Table of Contents
Section
1
Page
General Information ..............................................................................................1-1
Introduction ................................................................................................................................................................ 1-1
Features ...................................................................................................................................................................... 1-1
Manual addenda ......................................................................................................................................................... 1-1
Safety symbols and terms .......................................................................................................................................... 1-1
Associated documents ................................................................................................................................................ 1-2
Unpacking and inspection .......................................................................................................................................... 1-2
Inspection for damage ......................................................................................................................................... 1-2
Shipment contents ............................................................................................................................................... 1-2
Additional manuals ............................................................................................................................................. 1-2
Packing for shipment ................................................................................................................................................. 1-2
2
Probe Card Adapter Overview .............................................................................2-1
Introduction ................................................................................................................................................................ 2-1
Probe card adapter standard components ................................................................................................................... 2-1
Leakage paths and low current
capabilities ................................................................................................................................................................. 2-2
Mother board characteristics ...................................................................................................................................... 2-2
Probe card configuration ............................................................................................................................................ 2-2
Probe needle description ............................................................................................................................................ 2-2
Light shield ................................................................................................................................................................ 2-3
Options ....................................................................................................................................................................... 2-3
3
Installation ..............................................................................................................3-1
Introduction ................................................................................................................................................................ 3-1
Handling precautions ................................................................................................................................................. 3-1
General installation considerations ............................................................................................................................ 3-2
Overview ............................................................................................................................................................. 3-2
Safety .................................................................................................................................................................. 3-2
Stack height ......................................................................................................................................................... 3-3
Cable routing ....................................................................................................................................................... 3-3
Probe card adapter configuration ........................................................................................................................ 3-3
Light shield and microscope clearance ............................................................................................................... 3-4
Installation procedure ................................................................................................................................................. 3-4
Probe card removal procedure ................................................................................................................................... 3-6
i
Performance verification ............................................................................................................................................3-6
Options ........................................................................................................................................................................3-6
Build plate and planarization fixture ...................................................................................................................3-6
Close proximity load board .................................................................................................................................3-6
4
Close Proximity Load Board ................................................................................. 4-1
Introduction .................................................................................................................................................................4-1
Close proximity load board ........................................................................................................................................4-1
Installing Hypertac pins ..............................................................................................................................................4-2
Installing components on load board ..........................................................................................................................4-4
Connecting ground to load board ...............................................................................................................................4-5
Connecting power supply and control cables to load board .......................................................................................4-5
Installing and removing the load board ......................................................................................................................4-5
5
Maintenance .......................................................................................................... 5-1
Introduction .................................................................................................................................................................5-1
Mechanical disassembly .............................................................................................................................................5-1
Replacing plug-in type DUT cables ...........................................................................................................................5-2
Moving DUT cable connections .................................................................................................................................5-2
Cleaning ......................................................................................................................................................................5-3
Replacing pogo pins ...................................................................................................................................................5-3
Replacing a pogo pin socket .......................................................................................................................................5-4
Replacing vacuum connection ....................................................................................................................................5-4
6
Replaceable Parts ................................................................................................... 6-1
Introduction .................................................................................................................................................................6-1
Parts list ......................................................................................................................................................................6-1
Ordering information ..................................................................................................................................................6-1
Factory service ............................................................................................................................................................6-1
A
Glossary ..................................................................................................................A-1
B
Standard Prober Requirements ............................................................................B-1
ii
1
General Information
1.1
Introduction
• Maintains test system specifications to the probe tip,
This section contains general information about the Model
9139A-PCA Probe Card Adapter. The probe card adapter is
designed specifically for parametric testing. The advanced
design of the probe card adapter provides greater accuracy of
parametric tests where a wide range of measurements are
needed.
The Model 9139A is a specially designed interface to connect a Keithley Parametric Tester to the device under test
(DUT) while maintaining system specifications. Other applications with Keithley switching systems are possible on a
custom order basis.
NOTE
Specific information about installing hardware on the prober is found in the documentation provided by the prober manufacturer.
Information about connections to the Keithley Parametric Test systems is found in
the documentation provided with your system.
1.2
Features
Key features of the Model 9139A-PCA Probe Card Adapter
include:
• Vacuum lock allows quick exchange of probe cards
with accurate and repeatable alignment,
• Easy connection of DUT cables to probe card,
• Mother board accepts 64 DUT cables; probe card contains 64 fully guarded measure and sense lines,
• Preserves full Kelvin connections to probe tip,
• Extended guards (reduces capacitance),
• DUT cables can be routed vertically or horizontally to
the motherboard, supporting many different probers,
• Extends low current capabilities of the Keithley Parametric Test system.
1.3
Manual addenda
Any improvements or changes concerning the probe card
adapter or manual will be explained in an addendum included with the unit. Be sure to note these changes and incorporate them into the manual before using or servicing the unit.
1.4
Safety symbols and terms
The following safety symbols and terms may be found on the
probe card adapter or used in this manual.
The ! symbol on an instrument indicates that the user
should refer to the operating instructions located in the instruction manual.
The
symbol on an instrument shows that high voltage
may be present on the terminal(s). Use standard safety precautions to avoid personal contact with these voltages.
The WARNING heading used in this manual explains dangers that might result in personal injury or death. Always
read the associated information very carefully before performing the indicated procedure.
1-1
General Information
The CAUTION heading used in this manual explains hazards that could damage the probe card adapter. Such damage
may invalidate the warranty.
1.5
Associated documents
The following associated documents are not included in this
manual. They are included with the Keithley Parametric Test
System and are recommended references.
• System installation guide — This guide provides general information about locations of components within
the system cabinet. This guide also provides information about installing DUT cables, Instrument Cables
and shorting plugs.
• Matrix manual — This manual provides detailed installation and operation instructions for the system matrix.
• The drawing set of your system — These drawings contain detailed information about the configuration of
your system. The drawings show the DUT cable connections. Numbers located next to each DUT connection identify the pin number associated with the DUT
connection.
1.6
Unpacking and inspection
1.6.1 Inspection for damage
CAUTION
Do not touch high impedance areas of
the probe card assembly or the probe
card. Touching a high impedance area
will cause leakage and problems when
performing low current measurements.
Also, excessive leakage will cause the
probe card adapter to fail system tests.
1.6.2 Shipment contents
The following items are included with every Model 9139APCA order:
• Model 9139A-PCA Probe Card Adapter
• Model 9139A-VUA Vacuum control box
• Unpopulated (blank) probe card (This probe card is
used for diagnostics and is installed in the probe card
adapter.)
• 15' (6 m) of 1/4” the vacuum hose
• Close Proximity Load Board with pin and sockets (optional)
1.6.3 Additional manuals
This manual is included with every order. If an additional
manual is required, order the manual package (Keithley part
number 9139A-901-00). The manual package includes an instruction manual and any pertinent addenda.
1.7
Packing for shipment
Should it become necessary to return the Model 9139A-PCA
for repair, carefully pack the Model 9139A-PCA in its original packing carton (or equivalent) along with the following
information:
• An RA (Return Authorization). Obtain the RA from the
Semiconductor Business Unit Repair Department at
Keithley. When an RA is issued, the Semiconductor
Business Unit Administrator will also determine the
warranty status of your probe card adapter.
• Advise as to the warranty status of the probe card adapter (received from the Semiconductor Business Unit Repair Department – see above).
• Write ATTENTION REPAIR DEPARTMENT on the
shipping label.
Carefully unpack your Model 9139A-PCA Probe Card
Adapter from its original shipping carton and inspect the
card for any obvious signs of physical damage. Report any
such damage to the shipping agent immediately. Save the
original packing carton for possible future shipment.
1-2
2
Probe Card Adapter Overview
2.1
Introduction
appropriate DUT cables,
strain reliefs and other miscellaneous hardware,
mother board containing interconnect pins for DUT
cable connection,
pogo pins and retention ring,
light shield with interlock connection,
prober ring,
mother board support plate,
insulation ring (Teflon),
probe card ring,
vacuum connection,
This section contains an overview of the Model 9139A-PCA
Probe Card Adapter.
2.2
Probe card adapter standard components
The Probe Card Adapter consists of the following parts (Figure 2-1):
• prober hardware,
• probe card adapter assembly consisting of:
• probe card (without probe pins),
• close proximity load board (if needed for specific application of probe card adapter).
Strain Relief
(9139A-333-1 or -2)
Motherboard
(9139A-102,
9139A-122)
Pogo Pins and Spring
Contact Retainer
(9139A-331,
CS-830, CS-831)
DUT Cable
Vacuum
Connection
(PF-6)
Probe Card
Retainer Cap
(9139A-327)
Figure 2-1
Probe and adapter components
Light Shield (with
interlock connection)
(S500-339A)
Alignment Pin for
Motherboard and
Probe Card
Probe Card
(9139A-172)
Strain Relief
Hold Down
Screws
(4-40x3/4 50BTNH)
Prober Ring
Insert
(9139A-325)
Motherboard
Retainer Ring
(9139A-326)
Insulator
(Teflon Ring)
(9139-313-01,
9139-313-02)
2-1
Probe Card Adapter Overview
2.3
Leakage paths and low current
capabilities
The Model 9139A-PCA Probe Card Adapter permits fast
low current measurements. The short length of the connections between the DUT cables and the probe pins reduces capacitive coupling between probe pins. Capacitance is further
reduced by the extended guards. This reduced capacitance
permits faster rise times.
The Model 9139A-PCA extends the low current capabilities
of the Keithley Parametric Test system. Leakage is minimized by using short direct connections and by extending the
guards traces through to the probe blade connections. Leakage paths are also minimized by using low leakage materials
for the probe card and mother board.
2.4
Mother board characteristics
The mother board is the interface between the DUT cables
and the probe card and it accepts 64 DUT cables. It is suspended from the prober mounting hardware. Source, measure, guard, and ground (where appropriate) are terminated
for each DUT cable on the mother board. Source, measure,
and guard signals are kept separate for each pin and are all
carried down to the probe card through spring loaded contacts (pogo pins). Four ground pogo pins take ground down
to the probe card. Source and measure lines are guarded on
the mother board using state-of-the-art printed circuit board
manufacturing techniques. DUT cables can be routed vertically or horizontally to the mother board. Vertical routing is
used when the DUT cables are routed above the top platform
(head plate) of the prober. Horizontal routing is used when
the DUT cables are routed under the top platform of the
prober.
2-2
2.5
Probe card configuration
The probe card contains 64 fully guarded measure and sense
lines. It contains mounting traces for 64 probe needles.
Drilled, plated-through holes are provided for interconnect
pins. The interconnect pins provide connections to an optional close proximity load board. An unpopulated (blank)
probe card is provided with the Probe Card Adapter Assembly. Additional blank probe cards are available through your
Keithley sales representative.
NOTE
To reduce pin to pin capacitance, use ceramic blade probes.
2.6
Probe needle description
Although probe cards with mounted probe needles (pins) are
not available through Keithley. Many probe card vendors are
able to make probe cards for the 9139A. Make sure the probe
card manufacturer complies with the probe needle specifications required by the Model 9139A (Figure 2-2 and Figure 23). Refer to Figure 2-3 for probe needle mounting information.
Ceramic Side
Arm
Height
Tip
Depth
0.150"
(3,81mm)
0.245"
(6,22mm)
Figure 2-2
Probe needle dimensional specifications
Probe Card Adapter Overview
2.7
Light shield
The light shield covers the opening in the center of the probe
card adapter. This blocks ambient light and permits testing
under a lights out condition.
2.8
Options
• Close proximity load board (and Hypertac™ pins and
sockets) — Not required for most applications - used
when external components are required at the DUT pin.
The close proximity load board contains drilled, platedthrough holes. Holes are provided for connections to
source and measure of the DUT cable and for connections to the probe needles. A grid pattern of holes is provided to install components. Pin numbers are labeled on
the board. This option is available directly from Keithley.
The following options are available with the Model 9139APCA Probe Card Adapter.
• Build Plate and Planarization fixture — Designed for
mounting and adjusting probes on this probe card. The
fixture interfaces to the Rucker & Kolls build station
#300X and planarization station #425. This option is
available from the facilities listed in Appendix B.
Probe Needle
Probe Card
(9139A-172)
0.245"
Tip
Depth
Figure 2-3
Probe needle mounting
2-3
Probe Card Adapter Overview
2-4
3
Installation
3.1
Introduction
WARNING
The installation procedures contained
in this manual are intended for use only
by qualified service personnel. Do not
perform these procedures unless qualified to do so. Failure to observe normal
safety precautions could result in personal injury or death.
This section contains information needed for installing the
Model 9139A-PCA Probe Card Adapter on your prober.
Several paragraphs contain general installation steps. Other
paragraphs contain installation steps required for your specific prober. Review the appropriate paragraph(s) before
handling or installing the Model 9139A-PCA Probe Card
Adapter.
3.2
CAUTION
Do not touch high impedance areas of
the probe card assembly or the probe
card (Figure 3-1). Touching a high impedance area will cause leakage and
problems when performing low current
measurements. Also, excessive leakage
will cause the probe card adapter to fail
system tests.
Handle board only by the edges. Use gloves to prevent inadvertent contact with the high impedance areas (Figure 3-1).
Avoid bringing the board into contact with sources of contamination. Always confirm that fixtures and handling
equipment are clean.
Handling precautions
The Model 9139A Probe Card Adapter is assembled at the
factory to provide the highest quality connections possible
between the DUT and your system. Use care when handling
these parts.
3-1
Installation
High Impedance Areas
Cable Terminations
(Motherboard)
Pogo Pins
Probe Card
Figure 3-1
High impedance areas
• TAC PR8100
3.3
General installation considerations
• Ultraprecision 680
3.3.1 Overview
• Ultraprecision 880
The mechanical architecture of the probe card adapter makes
it possible to install the probe card adapter in a wide variety
of probers. In general, the architecture consists of a mother
board (Figure 2-1) suspended from the prober ring. Spacers
inserted between the mother board and prober ring connect
the two assemblies. The length of the spacers determines the
overall stack height of the probe card assembly. Modification
of the mother board assembly is not required when changing
the stack height or when replacing the prober ring. The ring
insert diameter is changed by replacing the prober ring. The
following is a list of the different probers supported by the
Model 9139A-PCA Prober Card Adapter.
• TSK A-PM-90A
• Alessi
• Karl Suss
3.3.2 Safety
Operator safety from hazardous voltages depends on proper
installation. After installation but before energizing the unit,
make sure all prober safety shields are properly in place (refer to the manufacturer of your specific prober for prober
safety shield information). The light shield contains components to allow for the installation of an interlock switch (such
as that provided with a Keithley S500 Series Test System).
See Figure 3-2.
• Electroglas 1034
• Electroglas 2000 Series (EG2001 and EG2010)
• Electroglas 3000 Series (EG3001 and EG3010)
• Electroglas 4060
• Electroglas 4080
• Electroglas 4085
• KLA 1007
• KLA 1220
• KLA/TEL P-8
• Pacific Western PW2
• Pacific Western PW3
3-2
Figure 3-2
PCA light shield
Installation
WARNING
Do not operate the system until it is
properly installed and all prober safety
shields and interlocks are in place. Failure to have the complete system properly installed with all safety shields in
place could result in personal injury or
death.
3.3.3 Stack height
The height from the prober’s mounting seat to the surface of
the chuck (stack height) is a basic installation consideration
(Figure 3-3). This stack height must equal the stack height of
the probe card adapter. The stack height of the Keithley
probe card adapter can be 1.330 inches (3.378 cm) or 1.492
inches (3.790 cm) depending on the type of prober and on the
requirements for cable routing. Refer to Appendix C for
prober specific stack height requirements. Installation may
require installing mounting hardware onto the prober to insure that the prober stack height is the same as the probe card
adapter stack height. See paragraph 3.4.
3.3.4 Cable routing
Cable routing is an important installation consideration.
DUT cables can be routed above or below the top plate of the
prober. For cable routing above the top plate, the DUT cables
exit vertically from the probe card adapter. For cable routing
below the top plate, the DUT cables exit horizontally from
the probe card adapter.
The DUT cables are routed under the prober ring (of the
probe card adapter). In addition, the DUT cables on some
probers may exit from the left, right, or from the back of the
prober. The cable exit you use depends on the type of prober
and how the prober is oriented next to the system. Regardless
of how the DUT cables exit from the prober, all the DUT cables must be the same length. A uniform cable length provides uniform electrical characteristics (capacitance and
inductance) of the cables. This is important when performing
capacitance measurements, or when measuring low level
currents. (paragraph 3.4 contains important information
about installing DUT cables.)
3.3.5 Probe card adapter configuration
Confirm that your probe card adapter assembly was configured properly at the factory. Included with your probe card
adapter is a copy of your completed Probe Card Adapter Order
Guide and a site specific drawing of your probe card adapter.
Confirm that the probe card adapter and the drawing match
your requirements as listed on the order guide. Check the following items:
• Check the DUT cables' interconnecting plug(s). Make
sure they are the correct type for your system.
• Check that there are the correct number of DUT pins
(count the number of cables connected to the mother
board).
• Inspect the installation hardware. This hardware is specific to your prober.
• Check DUT cable routing. Make sure that DUT cables
are assembled correctly to the probe card adapter. This
Prober
Prober Top Plate
Bearing Surface
Stack Height
Figure 3-3
Stack height
Top of Wafer (with chuck at probing position)
3-3
Installation
allows the DUT cables to exit properly from prober after the probe card adapter is installed.
3.3.6 Light shield and microscope clearance
Check the light shield and microscope clearance. Most microscopes are located far enough above the probe card assembly that they do not present clearance problems when the
light shield cover is installed. Some microscopes may protrude into the probe ring assembly to the area below the
shield plate. This presents clearance problems. If the microscope is mounted on a pivoted arm, move the microscope
aside and then install the light shield.
3.4
Installation procedure
WARNING
An installed probe card may contain lethal voltages when a test is in operation.
Reset the test equipment to place the
PCA (probe card adapter) in a safe
state.
Failure to reset the test equipment may
cause injury or death due to electrical
shock.
Use the following procedure to install your Model 9139APCA Probe Card Adapter.
1. Unpack and inspect Model 9139A-PCA. (See paragraph
3.2 for special handling precautions.)
2. Install the probe card adapter in your prober.
The hardware supplied with your probe card adapter assembly varies depending on the type of prober you have.
Refer to paragraph 3.3.1 for a list of supported probers.
Appendix C details the specific requirements for a number of standard probers. In some instances, the prober
may be modified by the supplier for a particular application. If this is the case, contact Keithley for additional
information on prober requirements and available options for the Model 9139A-PCA Probe Card Adapter.
3-4
3. Route 1.9 cm O.D. vacuum hose (provided) to probe
card adapter out of the way of any moving parts of your
prober. Make sure the hose remains clear of any pinch
points that could cut off or restrict flow through the vacuum hose. The customer supplies all connections and
hardware associated with vacuum hosing, in addition to
the vacuum source.
Install PCA to vacuum control box hose.
• Route a section of vacuum hose from the PCA
(probe card adapter) through the “TO PCA” grommet (on vacuum control box).
• Connect the vacuum control box end of the hose to
valve PF-1 (Figure 3-4) and the other end of the hose
to the PCA.
Install vacuum supply hose.
• Route the vacuum supply hose from the vacuum
source through the “VACUUM IN” grommet (on
vacuum control box).
• Connect the vacuum control box end of the hose to
check valve PF-5 (Figure 3-4). Make sure vacuum
supply is at least 50.8 cm Hg.
Vent the vacuum control box to atmosphere (no connection required).
4. Making sure all power has been removed from the system, connect cables.
• Connect the DUT cables between the probe card assembly and the matrix pin cards of the Parametric
Test system. Route the cables to avoid sources of
electromagnetic fields. Avoid routing cables near
sources of vibration or any other mechanical disturbance.
• Confirm that moving parts of the prober do not contact the cables.
Information regarding the location of connections within
your system is found in the configuration drawings for your
system. The User's Manual(s) for your systems contains additional information and can be referenced if required.
Installation
Vacuum Control Box Cover
(9139A-346)
4x40x5/16 PPH (4 places)
1/4" O.D. Tubing
(TX-40-1)
To
Washer
(WA-102-1)
Vent
Grommet
(GR-46)
Anti-rotation bracket
valve handle
(9139A-348)
Valve
(PF-1)
PC
A
Va
u
cu
m
Su
pp
ly
To PCA
Grommet
(GR-46)
Vent
Vacuum in
Grommet
(GR-46)
Check Valve
(PF-5)
Tie Wrap
(CC-38-3)
Vacuum Control Box
(9139A-345)
Tie Mount
(CC-47)
Vacuum Hose Routing
To
Vacuum
Source
PCA
Cable Tie
Vent
(Open)
Vacuum Control
Box
Figure 3-4
Vacuum control box
3-5
Installation
3.6
Probe
Card
1
Pin 1
Probe Card
Retainer Cap
1
Performance verification
A matrix test is run as part of system diagnostics and requires
a blank (unpopulated) probe card. Do not run a matrix test after installing each probe card. Run a Matrix Test after the
probe card adapter installation to check for leakage, open
connections, or shorted connections.
Pin 1
WARNING
Figure 3-5
Probe card and probe card retainer cap
During leakage tests, high voltages are
present on the probe card adapter.
5. Install the probe card.
• Turn vacuum control box valve to load/operate position.
• Line up probe card pin 1 with pin 1 indicator on the
retainer cap (Figure 3-5).
• Insert probe card into probe card retainer cap.
NOTE
It is necessary to install a blank probe card
in the probe card assembly to run diagnostics (provided).
NOTE
Two alignment pins and holes are provided
along the perimeter of the probe card. These
holes and pins provide for proper orientation of the probe card during installation.
• Align pin 1 of the probe card with pin 1 of the mother board.
• Use alignment marking on edge of probe card retainer
cap and match to same markings of mother board support ring. Attach the retainer cap to the mother board
ring. Make sure latches secure the probe ring (retainer
cap will click into place).
6. Perform probe card continuity test (S400 Series System)
to check Kelvin connections from the system matrix to
the probe card adapter (refer to paragraph 3.7).
3.5
Probe card removal procedure
WARNING
An installed probe card may contain lethal voltages when a test is in operation.
Reset the test equipment to place the
PCA (probe card adapter) in a safe
state.
Failure to reset the test equipment may
cause injury or death due to electrical
shock.
1. Run the probe card continuity test program (refer to
paragraph 3.7).
2. Turn vacuum control box valve to the unload position.
3. Release the probe card retainer cap latches.
4. Carefully remove probe card and retainer cap from
probe card adapter.
3-6
A blank probe card is supplied with the probe card adapter.
This blank probe card must be retained by the customer. The
blank probe card's clean surface provides a known, low leakage test environment. The unmodified Kelvin connections
assure accurate continuity tests.
Handling and storage of the blank probe card is important. To
permit accurate leakage tests, the probe card must remain unpopulated. The probe card must be stored in a protective container, in a clean, low humidity environment. Handling is
important (see paragraph 3.2). When installing this card, handle card by the edges and do not touch surface of probe card.
The following list describes the programs to verify performance. For further information about running diagnostics, refer to the software and/or diagnostics manual for your system.
Performance Verification Using S530 Diagnotics
Run the Matrix Tests from S530 diagnostics to verify probe
card adapter performance.
3.7
Options
3.7.1 Build plate and planarization fixture
A build plate and planarization fixture is available through
Cerprobe. This fixture permits you to mount and adjust
probes on the probe card. The fixture accepts the Keithley
probe card. It interfaces to the Rucker & Kolls build station
#300X and Planarization station #425.
The build plate and planarization fixture is purchased
through one of the Cerprobe offices listed in Appendix B.
3.7.2 Close proximity load board
The Close Proximity Load Board is an option used when external components are required at DUT pins. This option is
covered in detail in Section 4.
4
Close Proximity Load Board
4.1
Introduction
This section contains information about the optional close
proximity load board.
4.2
Close proximity load board
The close proximity load board is used when external components are required at the DUT pins. The load board is not
required for most applications.
The load board consists of an unassembled PC board and a
set of interconnecting pins and sockets (Hypertac pins). You
assemble the load board and locate the Hypertac pins where
external connections are required. The Hypertac pins and
sockets should only be connected to probe pins where exter-
Prober
Ring
Location of added
components
Load Board
(9139A-142)
Hypertac Sockets
Hypertac Pins
Probe Card
Figure 4-1
Probe card assembly – cross sectional view
4-1
Falcon Advertising Art
Job Name: 3552-C Keithley
Date: 9-17-96
FIG 4-1
Version: 1
Close Proximity Load Board
nal connections are required. System specifications cannot
be maintained on pins that are connected to the close proximity load board.
Figure 4-1 shows a cross section of the probe card assembly.
The load board is mounted directly above the probe needles.
It is held in place by the Hypertac pins.
4.3
Installing Hypertac pins
Procedure
To connect the load board to the probe card, use the following procedure:
1. Cut the source and measure traces on probe card pins
where external components are required (Figure 4-2).
CAUTION
The source and measure signals must be
connected together on the load board.
Failure to do so may cause inaccurate
readings and/or improper guarding.
2. Pre-assemble the Hypertac pins (Figure 4-3). Mate the
pairs of pins.
3. Insert the mated pins and sockets into holes located onthe probe card. Orient the mated pair so that the long pin
is inserted into the probe card. Install three mated pins
and sockets (Figure 4-4) for each DUT pin that requires
connections to the load board.
For applications requiring low capacitance and fast settling times, plan connections so that a minimum quantity of connections are required to the load board.
Cut source and measure traces here
Hypertac Socket (SO-147)
Measure
Source
Guard
Figure 4-2
Source and measure traces
Hypertac Pin (CS-837)
Figure 4-3
Hypertac pin assembly
4-2
Close Proximity Load Board
Hypertac Socket
Insert Hypertac pins
in these three locations
Hypertac Pin
Measure
Source
Guard
Probe Card
Figure 4-4
Hypertac pin installation
4. Place the load board on the sockets and line up so that
all the sockets are seated in the load board (Figure 4-5).
5. Solder the socket to the load board. DO NOT SOLDER
THE HYPERTAC PINS TO THE PROBE CARD (Figure 4-6).
Solder Socket
Load Board
Hypertac Socket
Load Board
Probe Card
Hypertac Pin
Hypertac Socket
Probe Card
Figure 4-6
Soldering Hypertac sockets to load board
Hypertac Pin
Figure 4-5
Seating Hypertac sockets in load board
6. Insert a spacer between the load board and the probe
card (Figure 4-7). Pull boards far enough to insert a
spacer. Do not pull boards apart. Spacing between the
boards should allow approximately 1/16” of the Hypertac pin to protrude through holes on the probe card.
7. Turn the probe card / load board assembly over so that
the probe card faces up. Solder the Hypertac pins to the
probe card (Figure 4-8).
4-3
Close Proximity Load Board
CAUTION
When soldering pins, avoid excessive
heat on the foils. Excessive heat could
cause breakdown of the chemical structure of the board material and could
cause leakage problems.
Load Board
Temporary
Spacer
Probe Card
8. When all components are mounted, clean the load board
and probe card with an HCFC to remove all solder flux
and contamination.
1/16"
1.5mm
CAUTION
If the probe card adapter is used to perform low current measurements, proper
cleaning is required. See paragraph 5.5
for additional information.
Figure 4-7
Temporary spacer installation
Solder Pin
Probe Card
Temporary
Spacer
Load Board
Figure 4-8
Soldering Hypertac pins
4-4
4.4
Installing components on load board
The load board has a grid pattern of holes spaced on 0.1 inch
centers. Components are secured by soldering the leads into
the plated through holes. Interconnections are made by soldering wires between the components. Connections to the
source and measure conductors are made by soldering wires
to holes located adjacent to where the source and measure
Hypertac pins are soldered to the load board. See Figure 4-9.
NOTE
Source and measure conductors must be
connected together on the load board.
Connections to the probe pin are made by
soldering a wire to the hole located adjacent to where the Hypertac pin is soldered
to the load board.
Close Proximity Load Board
Guard
Source
Measure
64
1
62
4
63
3
2
62
Connections
to D.U.T. pins
01
64
62
61
5
02
03
63
04
62
6
05
60
7
59
56
8
07
10 09 08
58
57
9
09
61
7 56
58 5
59
10
62
Source
Measure
58
06
63
60
08
04
01 64
59
05
02
03
60
07
06
61
57
56
10
Figure 4-9
Locations of connections on probe card
4.5
Connecting ground to load board
If the components mounted on the load board require a
ground connection, ground the load board. To ground the
load board, either connect the load board to an external
ground or ground to the mother board.
Note
A plug can be soldered to the load board
end of the ground wire allowing the
ground wire to be disconnected from the
load board (if required).
External ground
Connect a ground wire to the load board (either by soldering
or by soldering a plug to the end of the wire). Route the
ground wire out of the top of the prober to an external
ground.
Ground to mother board
4.6
Connecting power supply and control
cables to load board
Connections to external power supplies and connections to
digital control signals can be routed from the load board, out
of the top of the prober.
4.7
Installing and removing the load board
To simplify installation, each pin is numbered on the probe
card and on the load board. When assembling the two
boards, confirm that the pin numbers match. The probe card
is keyed and therefore will align with the correct pogo pins
on the mother board.
To install the load board, follow these steps:
1. Orient the load board so that pin 1 of the load board
aligns with pin 1 of the probe card.
2. Plug the load board into the Hypertac pins located on the
probe card.
3. Install the support ring, probe card and load board assembly into the probe card adapter. See paragraph 3.4.
Connect a ground wire to the load board (either by soldering
to the load board or by soldering a plug to the end of the wire).
Connect the ground wire to the mother board at one of the
ground sockets for the DUT cables (the outer row of sockets).
4-5
Close Proximity Load Board
4-6
5
Maintenance
5.1
Introduction
This section describes how to perform maintenance while
maintaining the high performance characteristics of the
probe card adapter.
A minimum amount of maintenance is required for the mother board and the DUT cables. However when maintenance is
required, it is important to perform maintenance operations
correctly. Maintenance items, such as replacing cables, can
have a significant impact on the probe card adapter’s performance. When performing maintenance, lubricate all o-rings
using Vacuum Goop (from Swagelok™). Make sure to use
adequate Vacuum Goop for lubrication, but do not over lubricate o-rings.
For maintenance of the probe pins, refer to documentation
provided by the manufacturer of the probe pins.
WARNING
The system can source high voltages at
current levels that can result in personal
injury or death. Turn off power to system before performing any maintenance
procedure.
5.2
Mechanical disassembly
Disassembly of the probe card adapter is required when replacing DUT cables or when maintenance is required to the
mother board.
NOTE
When assembling the probe card adapter,
use Vacuum Goop (from Swagelok) to
coat all o-rings.
To disassemble the probe card adapter, use the following procedure:
WARNING
An installed probe card may contain lethal voltages when a test is in operation.
Reset the test equipment to place the
PCA (probe card adapter) in a safe
state.
Failure to reset the test equipment may
cause injury or death due to electrical
shock.
NOTE
If time and space are available, it is possible to disassemble the probe card adapter
without disconnecting the DUT cables.
1. Place the PCA in a safe state by resetting the test equipment.
2. Turn the vacuum control box valve to the unload position.
3. Disconnect vacuum hose from the probe card adapter.
4. Disconnect the DUT cables from your system
5-1
Maintenance
5. Remove the probe card adapter assembly from your
prober.
6. Remove the light shield assembly. See Figure 2-1.
7. Remove the Allen head screws that secure the cable
strain relief, for the cable being replaced or moved.
8. Remove the probe card from the probe card adapter assembly (paragraph 3.5).
2. Disassemble the probe card adapter assembly (refer to
paragraph 5.2).
3. Insert connector pins of cable in sockets in mother board
(see Figure 5-1).
4. Reassemble probe card adapter.
5.4
5.3
Replacing plug-in type DUT cables
Moving DUT cable connections
WARNING
The DUT cables are pre-assembled with connector pins installed at the factory. Replacement cables with pre-assembled connector pins are available through your Keithley sales
office. When you install the replacement cable, note that
three sizes of connector pins are used on each DUT cable.
The smallest connector pin is installed on the source and
measure conductors. A larger size connector pin is installed
on the guard conductor. The largest connector pin is installed
on the outer shield (ground) conductor.
An installed probe card may contain lethal voltages when a test is in operation.
Reset the test equipment to place the
PCA (probe card adapter) in a safe
state.
Failure to reset the test equipment may
cause injury or death due to electrical
shock.
WARNING
An installed probe card may contain lethal voltages when a test is in operation.
Reset the test equipment to place the
PCA (probe card adapter) in a safe
state.
Failure to reset the test equipment may
cause injury or death due to electrical
shock.
Typically probe card pin #1 is connected to system pin #1,
probe card pin #2 is connected to system pin #2, etc. If an application requires different connections, you can connect the
probe card pins to other system pins.
.
To replace a DUT cable, perform the following procedure:
1. Place the PCA in a safe state by resetting the test equipment.
System
S4xx Cable
Cable
System
400 Series
System
S5xxand
Cable
System 900 Series
Cables
System 350 Cables
Source
Source
Source or Measure*
Measure
Ground
Guard
Guard
Measure
Shield
Guard
* Two
cables
required
for Kelvin connection
(no
ground
connection)
Figure 5-1
Replacing plug-in guarded type DUT cables
5-2
Maintenance
5.5
Cleaning
5.6
Cleaning is important to ensure accurate low current measurements. The cleaning process removes contamination that causes shunt resistance (leakage) between measurement paths.
Replacing pogo pins
WARNING
An installed probe card may contain lethal voltages when a test is in operation.
Reset the test equipment to place the
PCA (probe card adapter) in a safe
state.
Contamination can take many forms. Some sources of contamination are:
• Residue remaining after incomplete cleaning.
• Residue after using an improper or contaminated cleaning fluids.
Failure to reset the test equipment may
cause injury or death due to electrical
shock.
• Residue from fingerprints. See paragraph 3.2.
• Flux from soldering.
• Condensation from room conditions which do not meet
Keithley specifications.
To replace a pogo pin, use the following procedure:
1. Reset the tester hardware.
Observe the following precautions when it is necessary to
use solder on a circuit board:
• Use an OA-based (organic activated) flux, and take care
not to spread the flux to other areas of the circuit board.
2. Remove the probe card from the probe card adapter assembly. Refer to paragraph 3.5.
3. Remove the defective pogo pin. Grab the pin with a pair
of needle-nose pliers. Pull the pin out of its socket.
• Remove the flux from the work areas when the repair
has been completed. Use pure water along with clean
foam-tipped swabs or a clean soft brush to remove the
flux.
• Once the flux has been removed, swab only the repaired
area with methanol, then blow dry the board with dry
nitrogen gas.
• After cleaning, the board should be allowed to dry in a
50°C low-humidity environment for several hours.
CAUTION
The pogo pins are not symmetrical.
Damage to the socket may occur if the
pogo pins are inserted incorrectly.
4. Locate the rounded end of the replacement pogo pin (see
Figure 5-2). Insert the rounded end of the pin into the
socket. The double-chisel tip, located on the other end of
the pogo pin, must protrude out of the socket. This end
of pogo pin contacts a pad located on the probe card.
5. Re-install probe card.
Pogo Pin (CS-830)
Double Chisel Tip
Figure 5-2
Orientation of pogo pin and socket
Retainer
Ring
Socket (CS-831)
Rounded End
Mother
Board
Small End
Solder Pads
(on surface of board)
this is the probe ring
side of the mother board
5-3
Maintenance
5.7
Replacing a pogo pin socket
If a pogo pin breaks off in a socket or if the pin becomes
lodged in a socket, the pogo pin socket can be replaced. To
replace a socket, use the following procedure:
WARNING
An installed probe card may contain lethal voltages when a test is in operation.
Reset the test equipment to place the
PCA (probe card adapter) in a safe
state.
Failure to reset the test equipment may
cause injury or death due to electrical
shock.
5. Remove the unsoldered pin. Push the end of the socket
that protrudes through the mother board. Grab the other
end of the socket with a pair of needle-nose pliers. Pull
the socket out of its hole in the retention ring.
6. Remove residual solder from hole of solder pad.
7. Insert the small end of the replacement socket into the
hole located in the retention ring (Figure 5-2). Slide the
socket into the hole until the bottom of the socket is
flush with the surface of the retention ring (pogo pin not
installed in socket).
8. Confirm that the socket is installed properly (Figure 5-2).
The small end of the socket protrudes through the hole on
the mother board. The open end of the socket is flush
with the surface of the retainer ring.
9. Solder the socket to the pad located on the mother board.
10. Install a pogo pin into the socket.
1. Follow steps in paragraph 5.2 to disassemble the probe
card adapter.
11. Clean the flux from the solder connection. See procedure in paragraph 5.5.
2. Locate the defective pogo pin/socket assembly.
12. Re-install the probe card.
3. Locate the pad where the defective socket is soldered to
the mother board. This pad is on the probe ring side of
the mother board (refer to Figure 2-1).
5.8
4. Unsolder the socket from the probe ring side (refer to
Figure 2-1) of the mother board.
CAUTION
Do not apply excessive heat when desoldering socket. Excessive heat can
melt the retention ring of the probe card
adapter.
5-4
Replacing vacuum connection
The probe card adapter's vacuum connection can be replaced
if damaged. Remove the vacuum connection. Make sure all
old sealant is removed from threaded holes on probe card
adapter. Lightly apply standard pipe sealant to new vacuum
connection and install. Do not overtighten connection.
6
Replaceable Parts
6.1
Introduction
This section contains a list of replaceable parts for the Model
9139A-PCA.
6.2
Parts list
Probe card adapter
Table 6-1 contains the part numbers of probe card adapter
models 9139A-PCA-01, 9139A-PCA-02, 9139A-PCA-04,
and 9139A-PCA-05. Table 6-2 contains the part numbers of
probe card adapter model 9139A-PCA-03.
Blank probe card
For a replacement blank (unpopulated) probe card, order
Keithley part number 9139A-172.
6.3
Ordering information
To place an order, or to obtain information about replacement parts, contact your Keithley representative or the factory (see the front of this manual for addresses). When
ordering parts, be sure to include the following information:
1.
2.
3.
4.
6.4
Probe card adapter model number 9139A
Adapter serial number
Part description and part number
Circuit designation, if applicable Keithley part number
Factory service
If the probe card adapter is to be returned to Keithley Instruments for repair, perform the following:
1. Obtain an RA from the Repair Department at Keithley.
(They will also determine the warranty status of your
probe card adapter.)
2. Carefully pack the probe card adapter in the original
packing carton or the equivalent.
3. Write ATTENTION REPAIR DEPARTMENT on the
shipping label.
6-1
Replaceable Parts
Table 6-1
Models 9139A-PCA-01, 9139A-PCA-02, 9139A-PCA-04, and 9139A-PCA-05 parts list
6-2
Description
Keithley part number
.025 PIN
4-40X1/4 PHILLIPS PAN HEAD SCREW (strap to standoff)
4-40X3/4 SOCKET BUTTON HEAD (ring segment mounting, Figure 2-1)
6-32X1-1/4 SOCKET FLAT HEAD (mother board retainer mounting)
6-32X3/4 PH PAN HD SCR (shield plate mounting)
CAP, PROBE CARD RETAINER (Figure 2-1)
CLOSE PROXIMITY LOAD BOARD (Figure 4-1)
COVER LIGHT PROBE RING
HANDLE, SHIELD
INSULATOR, BLACK DECAL (Figure 2-1)
INSULATOR, BLACK DECAL (Figure 2-1)
O-RING, THERMOBONDED (use Swagelock Vacuuum Goop)
O-RING, THERMOBONDED (use Swagelock Vacuuum Goop)
PIN, CONTACT (Figure 4-3)
PIN, CRIMP BARREL, .040
PIN, CRIMP BARREL, .060
PROBE CARD (Figure 2-1)
PROBE, POGO PIN (Figure 5-2)
PROBE RING INSERT (Figure 2-1)
RECEPTACLE, POGO PIN (Figure 5-2)
RETAINER RING (Figure 2-1)
RING SEGMENT, CABLE CLAMP (strain relief for Models 9139A-PCA-01 and
9139A-PCA-02, Figure 2-1)
RING SEGMENT, CABLE CLAMP (strain relief for Models 9139A-PCA-04 and
9139A-PCA-05, Figure 2-1)
SHIELD PLATE, PROBE RING (Figure 2-1)
SOCKET, .018 PROBE RING CPLB (Figure 4-3)
SPACER (MODELS 9139A-PCA-01 and 9139A-PCA-04)
SPACER (MODELS 9139A-PCA-02 and 9139A-PCA-05)
STANDOFF, MOUNTING BLOCK
STRAP, PROBE RING SHIELD
10 AWG PVC GREEN/YELLOW
4-40X3/8 SOCKET BUTTON HEAD (mother board to spring contact retainer)
LUG
LUG
MOTHER BOARD (Figure 2-1)
RETAINER, SPRING CONTACT (Figure 2-1)
SOCKET, .025
SOCKET, .040
SOCKET, .060
WASHER (mother board to spring contact retainer)
CS-835
4-40X1/4PPH
4-40X3/4SOBTNH
6-32X1-1/4SOFHS
6-32X3/4PPH
9139A-327
9139A-142
9139-312
HH-37
9139-313-01
9139-313-02
GA-32
GA-33
CS-837
CS-836-1
CS-836-2
9139A-172
CS-830
9139A-325A
CS-831
9139A-326
9139A-333-1
9139A-333-2
9139A-310
SO-147
9139A-334-2
9139A-334-1
9139-315
9139-314
SC-99-5
4-40X3/8SOBTNH
LU-113
LU-99-6
9139A-102
9139A-331
SO-146-1
SO-146-2
SO-146-3
WA-102-2
Replaceable Parts
Table 6-2
Model 9139A-PCA-03 parts list
Description
Keithley part number
.025 PIN
4-40X3/4 SOCKET BUTTON HEAD
4-40X3/8 SOCKET BUTTON HEAD (mother board to spring
contact retainer, Figure 2-1)
CLOSE PROXIMITY LOAD BOARD (Figure 4-1)
MOTHER BOARD
PIN, CRIMP BARREL, .040
PIN, CRIMP BARREL, .060
PIN, CONTACT (Figure 4-3)
PROBE CARD (Figure 2-1)
PROBE, POGO PIN (Figure 5-2)
RECEPTACLE, POGO PIN (Figure 5-2)
RETAINER, SPRING CONTACT (Figure 2-1)
RING SEGMENT, CABLE CLAMP (Figure 2-1)
SOCKET, .018 PROBE RING CPLB (Figure 4-3)
SOCKET, .025
SOCKET, .040
SOCKET, .060
WASHER (mother board to spring contact retainer)
CS-835
4-40X3/4SOBTNH
4-40X3/8SOBTNH
9139A-142
9139A-122
CS-836-1
CS-836-2
CS-837
9139A-172
CS-830
CS-831
9139A-331
9139A-333-1
SO-147
SO-146-1
SO-146-2
SO-146-3
WA-102-2
Probe card retainer/cam assembly
Qty.
1
1
2
2
2
1
2
2
2
1
1
1
1
Description
Keithley part number
Retainer Ring (Figure 2-1)
Cap, Probe Card Retainer (Figure 2-1)
Cam, Retainer
Pivot Pin Cam
Torsion Spring
Ring, Insulator
Dowel Pin
Dowel Pin Cam
Truarc Ring, #45133-14H
O-Ring, Thermobonded
O-Ring, Thermobonded
Adapter, Right Angle (Figure 2-1)
4-40 X ¼ PFHUC (handle mount)
9139A-326
9139A-327
9139A-328
9139A-329
9139A-330
9139A-332
9139A-335
9139A-336
FA-233-2
GA-32
GA-33
PF-6
4-40X¼FHUC
6-3
Replaceable Parts
Miscellaneous vacuum control box parts
Qty.
4
4
1
1
6-4
Description
Keithley part number
Nylon Tie Wrap (Figure 3-3)
Tie Mount (Figure 3-3)
Static Shielding Bag
Tygon Tubing (order by length) (Figure 3-3)
CC-38-3
CC-47
PO-13-3
TX-40-1
A
Glossary
Chuck The metal platform that holds the wafer during
probing.
Probe card This is the printed circuit board where the
probe blades are mounted.
Close proximity load board (load board) This is an optional printed circuit board that mounts directly above the
probe needles. It is used to connect resistors, capacitors, etc.
to the probe needles. The load board is used when additional
components must be located as close as possible to the probe
needles.
Probe card adapter The complete probe assembly. This
includes the mother board assembly, DUT cables, probe
card, and prober specific hardware. The probe card adapter
is mounted to the head plate.
Head plate (top plate) (ring carrier) The upper surface of
the prober that holds the probe card adapter.
Hypertac™ pin A type of connector pin used where low
contact resistance, long life and low insertion forces are required.
Interconnect pins Pins located between the probe card
end of the DUT cable and the mother board.
Mother board assembly The printed circuit board where
the DUT cables and pogo pins are soldered.
Mother board support ring
the mother board.
The metal ring located under
Pogo pins The spring loaded contacts that are located between the mother board and the probe card.
Probe card support ring The retaining ring for the probe
card. This is mounted on the bottom side of the Probe Card
Adapter and holds the probe card.
Probe needles The contacts located between the probe
card and the pads on the wafer.
Prober specific hardware Any special hardware that is required to install the probe card adapter into a specific prober.
Ring carrier
specific).
Supports the mother board assembly (prober
Stack height (of prober) The distance between the surface
the probe ring mounts on, and the surface of the chuck.
Stack height (of probe card adapter) This is the distance
between the surface where the probe ring rests against the
top plate and the tips of the probe blades.
Probe blade A fine wire or contact assembly that provides
the electrical connection between the die on the wafer and
the probe card.
A-1
Glossary
A-2
C
B
Standard Prober Requirements
Alessi Prober
Stack height:
Cable Routing:
Cable exit:
Ring insert diameter:
Customer supplied parts:
(from Alessi)
Electroglas 4060 Prober
3.378cm (1.330 in.)
Top (only)
Any direction
24.764cm (9.75 in.)
Adapter ring
Electroglas 1034 Prober
Stack height:
Cable Routing:
Ring insert diameter:
Stack height:
Cable Routing:
Ring insert diameter:
Adapter ring part number:
3.789cm (1.492 in.)
Over top plate of prober
(only)
24.764cm (9.75 in.)
254635-001
Electroglas 4080 Prober
3.789cm (1.492 in.)
Over top plate of prober
(only)
24.764cm (9.75 in.)
Stack height:
Cable Routing:
Ring insert diameter:
Adapter ring part number
3.789cm (1.492 in.)
Over top plate of prober
(only)
24.764cm (9.75 in.)
254635-001
Electroglas 2000 Series (EG2001 and EG2010) Prober
Stack height:
Cable Routing:
Ring insert diameter:
3.789cm (1.492 in.)
Over top plate of prober
(only)
24.764cm (9.75 in.)
Electroglas 4085 Prober
Stack height:
Cable Routing:
Ring insert diameter:
3.789cm (1.492 in.)
Over top plate of prober
(only)
24.764cm (9.75 in.)
Electroglas 3000 Series (EG3001 and EG3010) Prober
Stack height:
Cable Routing:
Ring insert diameter:
3.789cm (1.492 in.)
Over top plate of prober
(only)
24.764cm (9.75 in.)
B-1
Standard Prober Requirements
KLA 1007/1220 Prober
Stack height:
Cable Routing:
Cable exit:
Ring insert diameter:
Special installation notes:
Customer supplied parts
(from KLA):
Pacific Western PW3 Prober
3.378cm (1.330 in.)
Top (only)
Any direction except from
front of prober
24.764cm (9.75 in.)
1. Move vacuum hose to permit installation of probe
card adapter.
2. Move LED sensor to permit
installation of probe card
adapter.
Stack height:
Cable Routing:
Cable exit:
Ring insert diameter:
Special items required
(from Pacific Western):
1. Standard ring insert adapter P/N 780-900935-00
2. HF prober ring insert adapter P/N 780-910804-00.
TAC PR8100 Prober
TEL P-8/P-8XL
Stack height:
Cable Routing:
Cable exit:
Ring insert diameter:
Customer supplied parts:
(from KLA/TEL):
3.378cm (1.330 in.) standard
headplate - order 9139APCA-03 for SACC P-8 Model
(auto probe card changer)
Top (only)
Any direction except from
front of prober.
24.764 cm (9.75 in.)
Ring insert adapter
P/N U261-Z30003-XX
Pacific Western PW2 Prober
Stack height:
Cable Routing:
Cable exit:
Ring insert diameter:
Special item required
(from Keithley):
3.789cm (1.492 in.)
From top or bottom
Any direction
24.447cm (9.625in.)
(from Keithley):
Stack height:
Cable Routing:
Cable exit:
Ring insert diameter:
Special item required:
3.789cm (1.492 in.)
From top or bottom
Any direction
24.447cm (9.625 in.)
1. Extended travel option
(to allow for a 6" probe
card)
2. Cylindrical card adapter
with no cutouts.
3. Keithley probe ring insert
P/N 9139A-351 (501112)
3.378cm (1.492 in.)
Top (only)
Any direction
24.764cm (9.75 in.)
Special adapter ring from
Teledyne TAC
Ultraprecision 680 Prober
Stack height:
Cable Routing:
Cable exit:
Ring insert diameter:
3.789cm (1.492 in.)
From top or bottom
Any direction
24.764cm (9.75 in.)
Ultraprecision 880 Prober
Stack height:
Cable Routing:
Cable exit:
Ring insert diameter:
3.789cm (1.492 in.)
From top or bottom
Any direction
24.764cm (9.75 in.)
Karl Suss Prober
Keithley probe ring insert
P/N 9139A-351 (501112)
Consult factory for specifications.
TSK A-PM-90A Prober
NOTE
Contact Keithley Instruments if your prober is not shown.
B-2
Stack height:
Cable routing:
Cable exit:
Ring insert diameter:
Customer supplied parts
(from TSK):
3.789cm (1.492 in.)
Top (only)
Rear and left (only)
24.764 cm (9.75 in.)
Ring insert
P/N FM01275-D001-00
Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.
All other trademarks and trade names are the property of their respective companies.
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Keithley Instruments, Inc.
Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY • www.keithley.com
12/06
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