advertisement
SQM-160
Rate/Thickness Monitor
User’s Guide
Version 4.09
Safety Information
Read this manual before installing, operating, or servicing this equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments…Now part of INFICON for service and repair to ensure that safety features are maintained.
Safety Symbols
W ARNING
: Calls attention to a procedure, practice, or condition that could possibly cause bodily injury or death.
C AUTION
: Calls attention to a procedure, practice, or condition that could possibly cause damage to equipment or permanent loss of data.
Refer to all manual Warning or Caution information before using this product to avoid personal injury or equipment damage.
Hazardous voltages may be present.
Earth ground symbol.
Chassis ground symbol.
Equipotential ground symbol.
Warranty Information
This INFICON product is warranted against defects in material and workmanship for a period of two (2) years from the date of shipment, when used in accordance with the instructions in this manual. During the warranty period, INFICON will, at its option, either repair or replace products that prove to be defective.
Limitation of Warranty
Defects from, or repairs necessitated by misuse or alteration of the product, or any cause other than defective materials or workmanship are not covered by this warranty.
NO OTHER WARRANTIES ARE EXPRESSED OR IMPLIED, INCLUDING BUT NOT
LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS
FOR A PARTICULAR PURPOSE. UNDER NO CIRCUMSTANCES SHALL INFICON
BE LIABLE FOR CONSEQUENTIAL OR OTHER DAMAGES RESULTING FROM A
BREACH OF THIS LIMITED WARRANTY, OR OTHERWISE.
Table of Contents
Chapter 1 Quick Start
1.0 Introduction .....................................................................................................1-1
1.1 Installation........................................................................................................1-1
1.2 Front Panel.......................................................................................................1-2
1.3 Rear Panel.......................................................................................................1-3
1.4 System Connections ........................................................................................1-4
1.5 Film Setup........................................................................................................1-5
1.6 Depositing a Film..............................................................................................1-6
Chapter 2 Operation
2.0 Introduction ......................................................................................................2-1
2.1 Menu Selection ................................................................................................2-1
2.2 Film Menu ........................................................................................................2-2
2.3 System Menu ...................................................................................................2-4
2.4 Sensor Selection..............................................................................................2-7
2.5 Sensor Frequency............................................................................................2-8
2.6 Sensor Tooling .................................................................................................2-9
2.7 Display Units ....................................................................................................2-10
2.8 Crystal Life.......................................................................................................2-10
2.9 Zero Thickness.................................................................................................2-11
2.10 Shutter Operation...........................................................................................2-11
2.11 Dual Sensors..................................................................................................2-12
2.12 Rate Sampling................................................................................................2-13
2.13 Time Setpoint .................................................................................................2-14
2.14 Thickness Setpoint.........................................................................................2-15
2.15 Simulate Mode ...............................................................................................2-16
2.16 Relay Operation .............................................................................................2-16
2.17 Analog Output Configuration..........................................................................2-17
2.18 Troubleshooting…..........................................................................................2-18
Chapter 3 Options
3.0 Rack Installation...............................................................................................3-1
Chapter 4 Maintenance
4.0 Introduction ......................................................................................................4-1
4.1 Cleaning...........................................................................................................4-1
Appendix
A. Material Parameters
B. Specifications
C. I/O Connections
D. Communications
E. Declaration of Conformity
Chapter 1 Quick Start
1.0 Introduction
Congratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor.
The SQM-160 is an easy-to-use instrument for measuring many types of thin-film coatings. This chapter will help to get you up and running quickly. Please review the entire manual for detailed operational, programming, and safety information.
1.1 Installation
This section assumes you are familiar with thin-film monitors. Refer to Sections 1.3 and
1.4 for detailed system hookup information.
W ARNING
: Maintain adequate insulation and physical separation of sensor, I/O, and wiring from hazardous voltages.
Rack
Installation
Power
Connection
Sensor
Connections
The SQM-160 occupies a 3.5” high, half-rack space. Rack installation requires an optional half-rack adapter kit (900-014) or a full rack extender kit (900-008). Install the unit in a 19” rack with the appropriate hardware. See Chapter 3 for extender assembly instructions.
W ARNING
: Verify that the power cable provided is connected to a properly grounded mains receptacle.
Connect the BNC cables and oscillator from your vacuum chamber feedthrough to the SQM-160 Sensor Input(s). See section 1.4.
Digital I/O
Connections
Computer
Connection
Option
Connections
Refer to Appendix C for details on wiring digital I/O to the
SQM-160 Relay I/O connector.
If you would like to use the supplied Windows™ Comm software with the SQM-160,see Appendix D.
If you have purchased the optional Four Sensor Card, connect the four additional sensors to these four inputs.
Move the rear panel power switch to the On (|) position. The SQM-160 will briefly display its software and hardware versions, then go to normal operating mode.
1-1
Chapter 1
1.2 Front Panel
Quick Start
Gary
Was
Here
Display1 Display2 Crystal Status LEDs
Control Knob
Rate A/s
Zero
Xtal Life
Open
Closed
Shutter
Control
Thickness kA
Time Time SP
Thk SP
Final Thk
1
3
5 6
Crystal Status
2
4
Next Prev
Configuration
Program
Display 1
Display 2
Control
Section
Configuration
Section
Setpoint LEDs
Crystal Status
LEDs
Control Knob
Control Section Setpoint LEDs Configuration Section
Front Panel Controls
Displays rate/thickness or frequency in normal operation. If multiple sensors are being used, and Display shows Time, then this is the average of those sensors. Turn the Control Knob right to display each individual sensor’s readings. Displays the setup parameter name in program mode.
Displays deposition time, or the sensor # displayed on Display
1 when scrolling through sensor readings. Displays setup parameter values in program mode.
Pushbutton to zero the thickness reading.
Pushbutton to toggle display between Crystal Life and
Rate/Thickness readings.
Pushbutton to Open/Close shutter relay.
Two LED shutter relay status display.
Pushbutton to enter/exit program mode.
Pushbutton to cancel a change and return to original value.
Pushbuttons to move to Next/Previous parameter.
Illuminates when the indicated setpoint is reached.
Illuminates when the crystal is active and operating properly.
Flashes when an active crystal fails.
Off when that crystal is not being used.
Used to adjust values or scroll though menu selections.
Pushing the control knob stores the current setting.
1-2
Chapter 1
1.3 Rear Panel
RS-232 USB/Ethernet
3
Option Card
Sensor
4 5 6
Quick Start
Fuse T2.5A 250V
Sensor 1 Sensor 2 Rate Out Thick Out Relay I/O
100-120/200-240V~
50/60 Hz
20 W
Sensor 1 & 2
Rate and Thick
Outputs
Relay I/O
RS-232
USB/Ethernet
Option Card
Power Connector
Rear Panel Connections
Connection to quartz crystal sensors. See Section 1.4 for detailed hookup information.
Provides 0-5V analog outputs for Sensor 1 & 2 rate and thickness readings. For connection to strip chart recorders,etc.
Connects 4 relays and 4 digital inputs to external devices. See
Appendix C for connections.
Connection to computer for programming and data acquisition.
See Appendix D.
Optional connection to computer USB or Ethernet port for programming and data acquisition. See Appendix D.
Provides four additional sensor measurement channels.
Measurement ground terminal useful for common system and cable grounding.
W ARNING
: Use removable power cords only of the specified type and rating, attached to a properly grounded receptacle.
1-3
Chapter 1 Quick Start
1.4 System Connections
The diagram shows typical vacuum system wiring. The table identifies each component’s function.
W ARNING
: Maintain adequate insulation and physical separation of sensor wiring from hazardous voltages.
S ensor
932-000
In- V ac C able
902-014
Feedthrough
930-000
S ource
S hutter
G round W ire
R S -232 3
Option C ard
S ensor
4 5 6
S ensor 1 S ensor 2 R ate OutThick Out R elay I/O
M anufac tured By
S Q M -160
M onitor
Fuse T2.5A 250V
100-120/200-240V ~
20 W
Sensor
6" B N C C able
902-011
O scillator
900-010
In-Vac Cable
Feedthrough
6” BNC Cable
Oscillator
10’ BNC Cable
Ground Wire
10' B N C C able
902-012
System Components
Holds the quartz crystal used to measure rate and thickness.
Crystals must be replaced occasionally.
Microdot cable that connects the sensor to the feedthrough.
Provides isolation between vacuum and atmosphere for electrical and cooling lines.
Provides a flexible connection from the feedthrough to the oscillator. Keep this cable as short as possible.
Contains the electronics to operate the quartz crystal. Total cable length to the crystal should be under 40” (1 meter).
Connects the oscillator to the SQM-160. Lengths up to 100’
(30 meters) are acceptable.
A wire, preferably braided, that connects the vacuum system to the SQM-160 ground terminal.
1-4
Chapter 1 Quick Start
1.5 Film Setup
This section will help you set up the SQM-160 to measure a film. Refer to Chapter 2 for detailed programming instructions.
Note: User actions with front panel controls are indicated by a Box. Results shown on displays are indicated by a Dashed Box .
Enter Program
Mode
Press Program to enter the film setup menu. If the Crystal Life display is shown, first press Xtal Life to return to
Rate/Thickness mode then press Program.
Select a Film Turn the Control Knob to select one of the 99 possible films, then press the Control Knob to enter that Film Menu.
Set Film
Parameters
Set System
Parameters
Turn the Control Knob to set the first film parameter (Density).
The parameter value is shown in Display 2. Press the Control
Knob to save the value and move to the next parameter. If you press Clear, the film parameter returns to its original value.
Continue to set each parameter. Be sure to press the Control
Knob to store each parameter. Press Program to exit Program mode and return to normal mode.
To Enter the System Menu, press Program, then Prev. Set system parameters by turning, then pushing, the Control Knob as described above. Press Program to return to Normal mode.
If the sensor(s) you selected during Film setup are connected properly to the SQM-160, the Crystal Status LEDs should be lit. If not, return to the Film Menu and set the Sensor
Average parameter to the desired sensor(s). See Section 2.4 for detailed information on assigning sensors to a film.
If the Crystal Status LED is flashing, it is most likely that the sensor is not properly connected. A small test crystal, supplied with each oscillator module, can be used to test sensor connections external to the vacuum chamber. To use the test crystal, disconnect the oscillator from its 6” BNC cable. Attach the test crystal to the oscillator’s feedthrough connector. The Crystal Status LED will remain lit if the external sensor connections are correct.
Refer to the Troubleshooting section of Chapter 2 for assistance in troubleshooting sensor problems.
1-5
Chapter 1 Quick Start
1.6 Depositing a Film
If you have followed this Quick Start chapter, you are ready to deposit a film. Follow the procedure below to begin deposition.
Verify Sensor
Operation
Verify that the Crystal Status LED for the measuring sensor(s) is lit, and not blinking.
Display
Rate/Thickness
Display 1 should be displaying Rate on the left and Thickness on the right. If the Crystal Life display mode is active, press the Xtal Life switch to return to Rate/Thickness mode. If the
Program Mode is active, press Program to return to normal mode.
If needed, press the Zero switch to zero the thickness reading.
Zero
Thickness
Start
Deposition
Apply power to your source evaporation supply. If the SQM-
160 shutter relay is connected, press the Shutter switch to open the source shutter and begin deposition.
The Rate and Thickness displays should begin to move from zero.
If the displays remain at zero, check your system setup to assure that you are actually evaporating. Also check that the deposited material is reaching the sensor.
If the display is erratic or noisy, first check your sensor connections. Refer to the
Troubleshooting section of Chapter 2 for information that can help in identifying the cause of noisy readings.
If the rate and thickness readings do not match your expectations, refer to the Film
Parameter (Density, Z-Factor, Tooling) and Sensor Tooling sections of Chapter 2.
Please take time to review the remainder of this manual for detailed operational, programming, and safety information.
1-6
Chapter 1 Quick Start
1-7
Chapter 2 Operation
2.0 Introduction
This section details the operation of the SQM-160 menus and front panel controls. It is arranged by common user tasks.
Note: User actions with front panel controls are indicated by a Box. Results shown on displays are indicated by a Dashed Box .
2.1 Menu Selection
Two menus provide control of the SQM-160 programming. The Film Menu allows you to customize each of the stored films. The System Menu sets values that remain constant for all films.
The Configuration Section of the SQM-160 front panel contains four switches used to access the program menus. Within the program menus, the Control Knob is also used to adjust values and select menu choices. In program mode, Display 1 shows the parameter to be changed. Display 2 shows the selected parameter’s value.
Note: If Crystal Life is shown on the SQM-160 displays, press the Xtal Life switch to return the displays to normal rate/thickness or frequency display.
To enter the Film Menu, press the Program switch. The SQM-160 displays the currently selected film. If desired, turn the control knob to select a different film. Press
Next to display the first parameter for the selected film.
To enter the System Menu, press the Program switch. Then press Prev before any other switches.
Rate A/s
Z ero
Xtal Life
O pe n
C los e d
Shutter
Control
Thickness kA
Time
Tim e S P
Th k S P
Fina l Thk
SQ M-160
R ate/T hickn ess M onitor
1 2
3 4
5 6
Crystal Status
N ext P rev
Configuration
Program
Press NEXT to move thru the
Film menu
Press PREV then
N E X T to move thru the
System menu
Press
P R O G R A M to access menus
2-1
Chapter 2 Operation
2.2 Film Menu
The Film Menu programs the SQM-160 for the materials that will be deposited as thin films. Ninety nine films can be stored, but only one film is active at any time.
1. Press Program to enter program mode.
2. Use the Control Knob to scroll to the desired Film # (1-99).
3. Depress the Control Knob or Next to enter the film parameters for the selected film.
4. Use Next and Prev to move through the film parameters, shown in Display 1.
5. Use the Control Knob to adjust the parameter value, shown in Display2, to the desired setting.
6. Depress the Control Knob or Next to save the displayed value and move to the next material parameter. Press Clear to abandon the change and return to the original setting.
7. Press Program to exit the Film Menu and return to normal mode.
The diagram and table that follow detail the parameters available in the Film Menu.
Refer to later sections of this chapter for instructions on setting specific film parameters.
Program
F ilm S ele c tio n F ilm P a ra m e te rs M e n u
.
.
.
.
.
.
Film 99
- DENSITY
- TOOLING
- Z-FACTOR
- FINL THK
- THK SET *
- TIM E SET *
- SAMPLE *
- HO LD *
- SENS AVG *
S u b -M e n u
- 1
- 2
- 3
.
.
- 6
Sensors 3 to 6 show only if the four-sensor option card is installed.
Note: Depending on System Menu setup, selections marked with a * may not be available. Consult the table that follows for details.
Note: You can clear film memory by pressing Zero-XtalLife-Shutter while powering up the SQM-160.
2-2
Chapter 2 Operation
Film Menu
Display
DENSITY
Description
Density of the material being deposited. Consult the Appendix for common material densities.
TOOLING
Overall Tooling Factor for this film.
See the Sensor Tooling section of this chapter.
Z-FACTOR
Z-Factor of the material being deposited. Consult the Appendix for common material Z-Factors.
FINL THK
THK SET
TIME SET
SAMPLE
HOLD
Range
0.5 – 99.99
10 – 399
0.10 – 10.00
Default
1.00
100
1.0
Desired Final Thickness of deposited material. Lights Final Thk
LED when reached.
Thickness value that closes the
Thickness Setpoint relay and lights
Thk SP LED. *Not available when
Sampling is ON in System Menu.
Elapsed time that closes the Timer
Setpoint relay and lights Time SP
LED. *Not available when Relay 2 is set to Dual or Sensor 2 in the
System Menu.
0.000 – 99.99
0.500
0.000 – 99.99
0
0:00 – 99:59 0
0 - 9999 0 The time for the sensor shutter to remain open when Rate Sampling is enabled in the System Menu. *Not available when Sampling is OFF in
System Menu.
The time for the sensor shutter to remain closed when Rate Sampling is enabled in the System Menu.
*Not available when Sampling is
OFF in System Menu.
0 - 9999 0
Units gm/cc
% kÅ kÅ
Min:
Sec
Sec
Sec
2-3
Chapter 2
SENS AVG
Enable/disable crystals for this film.
See the Sensor Selection section of this chapter. *Not available when
Relay 2 is set to Dual in the System
Menu.
Enabled/
Disabled
Operation
Ch1
Enabled
2-4
Program
Chapter 2 Operation
2.3 System Menu
The System Menu sets values that pertain to the overall functions of the SQM-160 and to your vacuum system’s setup. System Menu parameters apply to all films.
1. Press Program to enter program mode.
2. Press Prev to enter the System Menu.
3. Use Next and Prev to move through the system parameters.
4. Use the Control Knob to adjust the parameter value shown in Display2 to the desired setting.
5. Press Clear to abandon the change and return to the original setting.
6. Depress the Control Knob or Next to save the displayed value and move to the next material parameter. Press Clear to abandon the change and return to the original setting.
7. Press Program to exit the System Menu and return to normal mode.
Prev
S ys te m P a ra m e te rs M e n u
- TIM EBASE
- SIM M O DE
- DISPLAY
- RATE RES
- RATEFILT
- RELAY 2
- SAM PLING
- BAUDRATE
- ETCH
- xTO O LING
- RELAYS
- FM IN/M AX
- R/T BNDS
S u b -M e n u
- THCK (A)
- THCK (nM )
- M ASS
- FREQ
- TIM E SP
- DUAL
- SENS 2
- xTLTO O L1
- xTLTO O L6
- FREQ M IN
- FREQ M AX
- RATE M IN
- RATE M AX
- THICKM IN
- THICKM AX
- RELAY 4
2-5
Chapter 2 Operation
System Menu
Display Description
TIMEBASE
Time required for a measurement.
Longer times yield higher accuracy.
Range
0.15 – 2.00
SIM MODE
Simulates sensor inputs.
On/Off
DISPLAY
Selects Rate/Thickness in
Angstroms, Rate/Thickness in
Nanometers, Frequency, or Mass
(ugm/cc) display.
THCK/nAnM/
FREQ/MASS
RATE RES
Sets rate resolution to .01 or .1 Å/s. Hi/Low
RATEFILT
Number of rate readings averaged.
1 – 20
RELAY 2
Select Timer to cause relay to close when time setpoint is reached.
Dual causes relay to close (to activate dual sensor) when sensor
1 fails. Sensor 2 causes relay to activate a sensor shutter when
Sensor 2 is assigned to a film.
On/Off
SAMPLING
When Sampling is ON the sensor shutter periodically “samples” the rate. After a period, the shutter closes and the SQM-160 “holds” the same rate reading until the next sample period. Sample and Hold times are set in the Film Menu.
BAUDRATE
Serial baud rate to PC.
On/Off
2.4 – 19.2
On/Off
ETCH
Sets rate negative for etching.
xTOOLING
Tooling value assigned to each sensor. See the Sensor Tooling section of this chapter.
10 – 399
RELAYS
Assigns normally open or normally closed operation for each relay.
Note: All relays are open with power off.
NO/NC
Default Units
0.25
Sec.
Off
Rate
Low
8
Timer
Off
19.2
Off
100
NO kbps
%
2-6
Chapter 2 Operation
FMIN/MAX
Sub-menu sets minimum and maximum crystal frequencies.
R/T BNDS
Rate and Thickness Bounds submenu for analog outputs.
RATE MIN
Deposition Rate for zero output
(zero Volts).
RATE MAX
Deposition Rate for full scale output (+5 Volts).
THICKMIN
Thickness for zero output
(zero Volts).
THICKMAX
Thickness for full scale output
(+5 Volts).
4.00 – 6.00
4.10-6.10
0 – 999
9.9 – 999
0 – 99.99
0 – 99.99
0
5.00
6.10
100
0.00
1.00
MHz kÅ kÅ
Å/s
Å/s
2-7
Chapter 2 Operation
2.4 Sensor Selection
The SQM-160 comes standard with two sensor inputs. Four additional sensors are available by adding a Sensor Option Card. A specific sensor can be assigned to each film, or multiple sensors can be averaged for a film. The averaging option provides more uniform coverage of the deposition area, and provides a backup sensor capability.
If one of multiple sensors assigned to a film fails, the sensor is automatically removed from rate/thickness calculations.
Note: If Relay 2 Dual is selected in the System Menu, Sensors 1 and 2 are set up as a primary/secondary sensor pair. In that case, sensor averaging is disabled. See Section
2.11 for information on dual sensors.
To assign a sensor, or sensors, to a film:
1. Press Program to enter Program mode.
2. Use the Control Knob to scroll to the desired Film # (1-9).
3. Depress the Control Knob or Next to enter the film parameters for the selected film.
4. Press Next until SENS AVG is shown.
5. Use the Control Knob to scroll through the sensors in Display2.
6. Depress the Control Knob to toggle the sensor on/off.
Sensor status can be seen by observing the Crystal Status LEDs:
If the LED is not illuminated, the crystal is disabled.
If the LED is illuminated, the crystal is enabled and receiving valid readings.
If the LED is blinking, the crystal is enabled, but is not receiving valid readings.
7. Continue selecting sensors until the Crystal Status LEDs indicate the desired setup.
8. Press Program to exit the Film Menu and return to normal mode.
9. Turn the Control Knob to sequence though each sensor’s reading on Display1.
When a single number is shown in Display2 it is the sensor number whose readings are shown in Display1. When time is shown in Display2 , Display1 shows the average of all assigned sensors..
2-8
Chapter 2 Operation
2.5 Sensor Frequency
The Sensor Min/Max frequencies establish the operating range for the sensing quartz crystals. Both values are used to determine the % life that is displayed in Xtal Life mode.
When the sensor frequency drops below the minimum (or reads above the maximum), the SQM-160 indicates a sensor failure by blinking the Crystal Status display.
To set sensor minimum and maximum frequencies:
1. Press Program to enter Program mode.
2. Press Prev to enter the System Menu.
3. Press Next until FMIN/FMAX is shown.
4. Depress the Control Knob to display FREQ MIN.
5. Adjust the Control Knob to the desired minimum operating frequency on Display2.
6. Depress the Control Knob to accept the minimum value and display FREQ MAX.
7. Adjust the Control Knob to the desired maximum operating frequency on Display2.
8. Depress the Control Knob to accept the maximum value.
9. Press Program to exit the System Menu and return to normal mode.
Crystals sometimes fail unexpectedly, or exhibit erratic frequency shifts (mode hopping) before total failure. Depending on the material, crystals may fail well before the typical 5
MHz minimum. If you find that crystals fail early consistently, set FREQ MIN to a value higher than 5 MHz to provide a Crystal Life warning consistent with actual failure.
A sensor whose initial value exceeds the maximum will also cause a blinking Crystal status. You can set the maximum frequency slightly above the nominal values with no effect on accuracy.
2-9
Chapter 2 Operation
2.6 Sensor Tooling
Sensor Tooling adjusts for the difference in deposition rate between the sensor and the substrate being coated. It is an empirically determined value that matches the sensor readings to your vacuum system.
Substrate
Substrate
Tooling
Over 100%
Tooling
Under 100% xTooling is set in the System Menu. It adjusts the tooling for each individual sensor before it is averaged. xTooling for a sensor applies to all films. If the individual sensor xToolings are set properly, a sensor failure will not cause a jump in the average Rate and Thickness reading.
To adjust xTooling:
1. Press Program to enter Program mode.
2. Press Prev to enter the System Menu.
3. Press Next until xTOOLING is shown, then press the Control Knob.
4. Adjust the Control Knob to set the XTLTOOL 1 value. Depress the Control Knob to save the value and move to XTLTOOL 2.
5. Repeat Step 4 for each of the installed sensors.
6. Press Program to exit the System Menu and return to normal mode.
Film Tooling is set in the Film Menu, and is applied to the averaged Rate and
Thickness for all sensors assigned to that film. Film Tooling is a film-specific value, and is seldom required.
2-10
Chapter 2 Operation
2.7 Display Units
The SQM-160 can display crystal measurements in several different units. To select the display units:
1. Press Program to enter Program mode.
2. Press Prev to enter the System Menu.
3. Press Next until DSP….. is shown.
4. Turn the Control Knob left or right to select the desired display mode:
THCK - Rate in A/s, Thickness in kA nAnM - Rate in nM/s, Thickness in uM
MASS - Rate in ng/cc/s, Thickness in ng (nanograms)
FREQ – Frequency in Hz
Note: When Nanometers is selected a small “n” appears between the rate and thickness displays When Mass is selected a small “m” appears between the rate and thickness displays.
5. Depress the Control Knob to accept your choice.
6. Press Program to exit the System Menu and return to normal mode.
2.8 Crystal Life
The SQM-160 calculates the remaining crystal life based on the FMin/Max values set in the System Menu (see Section 2.5).
To display the remaining crystal life for the sensors used by the currently active film:
1. Press the Xtal Life switch in the front panel Control section.
2. The sensor is shown in Display 1 and the % remaining life is shown in Display2.
3. Turn the Control Knob to display the % life of other sensors active for this film.
4. Press Xtal Life again to return to normal rate/thickness, or frequency display.
Note: You cannot enter program mode while the crystal life display is active.
2-11
Chapter 2 Operation
2.9 Zero Thickness
Before starting each film deposition, you will probably want to reset the SQM-160
Thickness value to zero. To zero Thickness:
1. Press the Zero switch in the front panel Control section.
In addition to zeroing Thickness, pressing the Zero switch has these effects:
1. The Time display is reset to its programmed value, and starts counting down.
2. The Thickness Setpoint and Timer relays open.
3. The Time SP, Thk SP, and Final Thk LEDs turn off.
2.10 Shutter Operation
The SQM-160 Shutter switch controls a relay that is normally connected to the source shutter.
To open or close the Shutter relay:
1. Press the Shutter switch in the front panel Control section.
The Open and Closed LEDs illuminate to indicate the shutter status.
Note: If Relay 2 is set to Sensor 2 in System Menu, the operation of the Shutter switch/relay changes slightly. In this case, the shutter relay will activate only if
Sensor 1 is assigned to the active film. If sensor 2 is assigned to the active film,
Relay 2 will close instead.
2-12
Chapter 2 Operation
2.11 Dual Sensors
Dual shuttered sensors provide a backup (secondary) sensor in case of primary sensor failure. When Relay 2 is programmed for Dual sensors in the System menu, the SQM-
160 will automatically switch to Sensor 2 when Sensor 1 readings stop or become erratic.
To program the SQM-160 for dual sensors:
1. Press Program to enter Program mode.
2. Press Prev to enter the System Menu.
3. Press Next until RELAY 2 is shown.
4. Turn the Control Knob right to select DUAL sensor function.
5. Depress the Control Knob to accept the value.
6. Press Program to exit the System Menu and return to normal mode.
7. In the film menu, assign only Sensor 1 to the film. The backup sensor 2 is automatically assigned internally.
Note: Relay 2 is a multi-function relay. It can be programmed as a dual sensor shutter, or to close when a programmed time has elapsed, or as a sensor 2 shutter relay.
Section 2.10 and 2.13 discuss the other Relay 2 functions.
2-13
Chapter 2 Operation
2.12 Rate Sampling
In Rate Sampling mode, the SQM-160 opens a sensor shutter for a fixed time to
“sample” the process rate, then closes the shutter and “holds” the last rate reading for a fixed time. While the shutter is closed (hold mode), the SQM-160 calculates thickness based on the last sampled rate.
Note: Rate sampling can significantly extend crystal life in a high deposition rate process. However, unless the process is very stable, the thickness calculation during hold mode may be incorrect. Do not use rate sampling if your rate varies during deposition.
To program the SQM-160 for Rate Sampling:
1. Press Program to enter Program mode.
2. Press Prev to enter the System Menu.
3. Press Next until SAMPLING is shown.
4. Turn the Control Knob right to turn ON rate sampling. Depress the Control Knob to accept the value.
5. Press Program to exit the System Menu and return to normal mode.
6. Press Program to re-enter Program mode.
7. Use the Control Knob to scroll to the desired Film # (1-9), then depress the Control
Knob or Next to enter the film parameter menu for the selected film.
8. Press Next until SAMPLE is shown.
9. Use the Control Knob to set the sample time period. Depress the Control Knob to accept the sample value and display HOLD.
10. Use the Control Knob to set the hold time period. Depress the Control Knob to accept the Hold value.
11. Press Program to exit the Film Menu and return to normal mode.
Note: The rate sampling relay is a dual function relay. It can be programmed either to sample rate or to close when a programmed thickness is reached. Section 2.14
discusses the Thickness Setpoint function. Consult Appendix C for relay wiring.
2-14
Chapter 2 Operation
2.13 Time Setpoint
The Time Setpoint provides a convenient way to signal a timed event. After a preprogrammed time period, the Time Setpoint closes a relay when the Zero switch is pushed.
To program the Time Setpoint:
1. Press Program to enter Program mode.
2. Press Prev to enter the System Menu.
3. Press Next until RELAY 2 is shown.
4. Turn the Control Knob right to select TIME. Depress the Control Knob to accept the value.
5. Press Program to exit the System Menu and return to normal mode.
6. Press Program to re-enter Program mode.
7. Use the Control Knob to scroll to the desired Film # (1-9), then depress the Control
Knob or Next to enter the Film Parameter menu for the selected film.
8. Press Next until TIME SET is shown.
9. Use the Control Knob to set the timer setpoint. Depress the Control Knob to accept the value.
10. Press Program to exit the Film Menu and return to normal mode.
Press Zero to open the relay and begin counting down the Time Setpoint. When the time reaches zero, the Time SP LED illuminates and the relay closes.
Note: Relay 2 is a multi-function relay. It can be programmed as a dual sensor shutter, or to close when a programmed time has elapsed, or as a sensor 2 shutter relay.
Section 2.10 and 2.11 discuss the other Relay 2 functions.
2-15
Chapter 2 Operation
2.14 Thickness Setpoint
The Thickness Setpoint closes a relay when a programmed thickness is reached. This setpoint is independent from Final Thickness, which always closes the source shutter.
To program the Thickness Setpoint:
1. Press Program to enter Program mode.
2. Press Prev to enter the System Menu.
3. Press Next until SAMPLING is shown.
4. Turn the Control Knob right to turn OFF the Sampling function. Depress the Control
Knob to accept the value.
5. Press Program to exit the System Menu and return to normal mode.
6. Press Program to re-enter Program mode.
7. Use the Control Knob to scroll to the desired Film # (1-9), then depress the Control
Knob or Next to enter the Film Parameter menu for the selected film.
8. Press Next until THK SET is shown, not FINL THK.
9. Use the Control Knob to set the thickness setpoint. Depress the Control Knob to accept the value.
10. Press Program to exit the Film Menu and return to normal mode.
When the Thickness Setpoint is reached, the Thk SP LED lights and the relay closes.
You can use the Zero switch to open the relay and zero thickness at any time.
Note: The Thickness Setpoint relay is a dual function relay. It can be programmed either to indicate a thickness, or to control a sensor shutter for rate sampling. Section
2.12 discusses the Rate Sampling function. Consult Appendix C for relay wiring.
2-16
Chapter 2 Operation
2.15 Simulate Mode
In Simulate mode, the SQM-160 simulates attached sensors. It is an easy way to become familiar with the SQM-160 front panel controls and programming. You can open/close the shutter to simulate deposition, zero readings, and display crystal life.
You can also test the Time and Thickness setpoint relays and LEDs.
To enter Simulate mode:
1. Press Program to enter Program mode.
2. Press Prev to enter the System Menu.
3. Press Next until SIM MODE is shown.
4. Turn the Control Knob left or right to enable and disable Simulate mode.
5. Depress the Control Knob to accept the value.
6. Press Program to exit the System Menu and return to normal mode.
2.16 Relay Operation
The four relays of the SQM-160 are physically single-pole, normally-open (1FormA) relays. However, each can be programmed to act as either normally-open or normallyclosed during SQM-160 operation. It is important to keep in mind that all relays will open if the SQM-160 is turned off or loses power. Consult Appendix C for relay wiring.
To set the relay operating mode:
1. Press Program to enter Program mode.
2. Press Prev to enter the System Menu.
3. Press Next until RELAYS is shown.
4. Turn the Control Knob left or right to select NO (normally open) or NC (normally closed). Depress the Control Knob to accept the value.
5. Repeat Step 4 for each of the installed sensors.
6. Press Program to exit the System Menu and return to normal mode.
2-17
Chapter 2 Operation
2.17 Analog Output Configuration
The SQM-160 analog outputs must be set to match the device that will be attached to the Rate or Thickness output.
To set up the analog outputs in the System Menu:
1. Press Program to enter Program mode.
2. Press Prev to enter the System Menu.
3. Use Next to move through the system parameters until R/T BNDS is displayed.
4. Depress the Control Knob to display RATE MIN.
5. Adjust the Control Knob to the Rate desired for a 0V output.
6. Depress the Control Knob to save the value and display the RATE MAX setting.
7. Adjust the Control Knob to the Rate desired for a 5V output.
8. Depress the Control Knob to save the value and display the THICK MIN setting.
9. Repeat steps 5-8 to adjust the Thickness output values.
10. Press Program to exit the System Menu and return to normal mode.
Refer to System Menu in Chapter 2 for more information on setting SQM-160 System parameters.
2-18
Chapter 2 Operation
2.18 Troubleshooting
Most SQM-160 problems are caused by defective crystals or improper film setup.
Follow the procedures below to identify and correct common problems.
No Reading, or Erratic Readings from Sensors:
First, replace the quartz crystal. Crystals sometimes fail unexpectedly, or exhibit erratic frequency shifts (mode hopping) before total failure. Depending on the material, crystals may fail well before the 5 MHz lower limit. If you find that crystals consistently fail early, you may want to set Freq Min to a value higher than 5 MHz.
Verify that the sensors, oscillator and cabling are connected as shown in Section 1.4.
Next, in the System Menu, assure that Sim Mode is OFF, Dsp Freq is ON, and F
Min/Max are set properly (typically Freq Min=5.0 MHz, Freq Max=6.0 MHz).
FMIN: FMAX:
In the Film menu, assure that Sens Avg is set for the proper inputs as described in
Section 2.4. When an input is selected, its LED will be on (crystal OK) or blinking
(crystal defective). Record the LED state (on/off/blinking) below:
INPUT 1: INPUT 2:
While not depositing, observe the frequency display for each active sensor. The value should be stable within, say 1Hz..
FREQ 1: FREQ 2:
If the sensor reading is outside the frequency limits: Replace the crystal, or reprogram the Freq Min/Max values.
If the sensor reading is zero or unstable: Recheck the wiring from the sensor to the
SQM-160, and verify that the SQM-160 is properly grounded. Especially check that the quartz crystal is properly seated in the sensor head. Try a different SQM-160 sensor input. If both SQM-160 inputs show zero or unstable readings, the problem is almost certainly a wiring or sensor problem.
If the problem is not corrected: Referring to Section 1.4, disconnect the 6” BNC cable from the external oscillator module. A 5.5 MHz test crystal and BNC barrel adapter is supplied with each oscillator. Attach the test crystal to the oscillator Sensor connector. The display should read about 5.5 MHz, very stable. If not, contact
Sigma Instruments’ technical support. Test all SQM-160 inputs.
FREQ 1: FREQ 2:
2-19
Chapter 2 Operation
When the frequency reading is stable, start the deposition process. As material is deposited on the crystal, the frequency reading should drop steadily. If not, check your source supply for erratic output. Also assure that the sensor is not too close to the source (particularly in sputtering).
Incorrect Rate or Thickness Measurement:
First complete the procedures in Section 2.14 to assure accurate frequency readings.
Set the System Menu xTooling as described in Section 2.6. Incorrect xTooling values will cause consistently low or high rate/thickness values for every material.
Once the System menu xTooling is set, set Tooling in the Film menu to 100 unless you are certain that another value is needed for a specific film.
Verify that the Density and Z-Factor values match those in the Materials Parameters
Appendix. If the material is not listed, check a materials handbook. Density has a significant effect on rate/thickness calculations.
Z-Factor corrects for stresses as a crystal is coated. If accuracy deteriorates as crystals are used, verify the Z-Factor. The relationship between Z-Factor and Acoustic
Impedance is discussed in the Materials Appendix.
2-20
Chapter 2 Operation
2-21
Chapter 3 Options
3.0 Rack Mounting
The Full Rack Extender option (PN 900-008) mounts a single SQM-160 into a full-width
19” rack space. Follow these steps to assemble the extender and mount the SQM-160:
Remove SQM-160
Mounting Ear
Assemble the
Extender
Determine on which side of the SQM-160 you want to attach the rack extender. If a rack-mount ear is already attached to the SQM-160 on that side, remove the two 10-32 flat head screws that mount the ear and remove the rack-mount ear.
Assemble the extender “box” using the eight 6-32 flat head screws, two end panels, and two main panels. Thread two socket head captive panel screws from the inside of one side of the extender. Continue to thread the captive screws until their threads are completely exposed on one side.
Attach the
Extender
Attach the
Mounting Ears
Place the extender next to the SQM-160, and thread the captive screws into the SQM-160 threaded holes that were previously used to mount the rack ear. Tighten the captive screws to secure the extender to the SQM-160.
Attach the mounting ear previously removed from the SQM-
160 to the extender using the same10-32 flat head screws. If a rack-mount ear is not already attached to the SQM-160, attach it also.
Mount the
SQM-160
Slide the entire assembly into an empty 3½” high 19” rackmount space. Secure the assembly with four rack screws (not supplied).
The Half Rack Adapter kit (PN 900-014) mounts one SQM-160 to another 3½” high instrument. It consists of two rack-mount ears and a small adapter bracket. Mount one rack mount ear to the SQM-160, and the other to the second instrument. Attach the two instruments using the adapter bracket.
If you want to connect two SQM-160s side-by-side, contact INFICON for the best method in your installation.
3-1
Chapter 3 Options
3-2
Chapter 4 Maintenance
4.0 Maintenance
W ARNING
: There are no adjustments or user-serviceable parts inside the SQM-160.
For maintenance or repair, contact:
INFICON
Two Technology Place
East Syracuse, New York
13057 USA
Tel +1.315.434.1100
Fax +1.315.437.3803
4.1 Cleaning
Use a soft cloth, moistened with water or a mild cleaner, to clean the outer surfaces.
4-1
Chapter 4 Maintenance
A. Material Parameters
AlSb
As
As
2
Au
B
Se
B
2
O
3
B
4
C
BN
Ba
BaF
Formula
Ag
AgBr
AgCl
Al
Al
Al
2
4
AlF
AlN
3
O
3
C
3
3
Bi
Bi
2
2
BiF
O
3
Bi
2
S
3
Se
Te
3
C
C
C
8
H
8
3
3
BaN
2
2
O
BaO
BaTiO
3
6
BaTiO
3
Be
BeF
2
BeO
Bi
Bi
2
In the table below, an * is used to indicate that the material’s Z Factor is not known. A method of determining Z Factor empirically follows the materials table.
1.990
3.010
9.800
8.900
7.390
6.820
7.700
5.320
1.860
3.500
4.886
3.244
5.720
5.999
6.035
1.850
2.250
3.520
1.100
Density
10.500
6.470
5.560
2.700
3.970
2.360
3.070
3.260
4.360
5.730
4.750
19.300
2.370
1.820
2.370
Z-Ratio
0.529
1.180
1.320
1.080
0.336
*1.000
*1.000
*1.000
0.743
0.966
*1.000
0.381
0.389
*1.000
*1.000
*1.000
2.100
0.793
1.261
*1.000
0.464
0.412
0.543
*1.000
*1.000
0.790
*1.000
*1.000
*1.000
*1.000
*1.000
3.260
0.220
*1.000
Material Name
Silver
Silver Bromide
Silver Chloride
Aluminum
Aluminum Oxide
Aluminum Carbide
Aluminum Fluoride
Aluminum Nitride
Aluminum Antimonide
Arsenic
Arsenic Selenide
Gold
Boron
Boron Oxide
Boron Carbide
Boron Nitride
Barium
Barium Fluoride
Barium Nitrate
Barium Oxide
Barium Titanate (Tetr)
Barium Titanate (Cubic)
Beryllium
Beryllium Fluoride
Beryllium Oxide
Bismuth
Bismuth Oxide
Bismuth Trisuiphide
Bismuth Selenide
Bismuth Telluride
Bismuth Fluoride
Carbon (Graphite)
Carbon (Diamond)
Parlyene (Union Carbide)
4-2
Cs
2
SO
4
CsBr
CsCl
CsI
Cu
Cu
2
Cu
2
O
S
Cu
2
CuS
S
Dy
Dy
2
O
Er
Er
2
O
3
3
Eu
EuF
2
CdS
CdSe
CdTe
Ce
CeF
3
CeO
2
Co
CoO
Cr
Cr
2
O
3
Cr
3
CrB
Cs
C
2
Formula
Ca
CaF
2
CaO
CaO-SiO
2
CaSO
4
CaTiO
3
CaWO
4
Cd
CdF
CdO
2
4.243
4.456
3.988
4.516
8.930
6.000
5.600
5.800
7.130
8.900
6.440
7.200
5.210
6.680
6.170
1.870
4.600
8.550
7.810
9.050
8.640
5.260
6.500
8.640
6.640
8.150
4.830
5.810
6.200
6.780
6.160
Density
1.550
3.180
3.350
2.900
2.962
4.100
6.060
1.212
1.410
1.399
1.542
0.437
*1.000
0.690
0.670
*1.000
0.343
0.412
0.305
*1.000
*1.000
*1.000
*1.000
0.682
*1.000
*1.000
1.020
*1.000
0.980
*1.000
*1.000
Z-Ratio
2.620
0.775
*1.000
*1.000
0.955
*10~
*1.000
0.820
0.600
*1.000
0.740
*1.000
*1.000
*1 .000
Appendix
Material Name
Calcium
Calcium Fluoride
Calcium Oxide
Calcium Silicate (3)
Calcium Sulfate
Calcium Titanate
Calcium Tungstate
Cadmium
Cadmium Fluoride
Cadmium Oxide
Cadmium Sulfide
Cadmium Selenide,
Cadmium Telluride
Cerium
Cerium (III) Fluoride
Cerium (IV) Dioxide
Cobalt
Cobalt Oxide
Chromium
Chromium (III) Oxide
Chromium Carbide
Chromium Boride
Cesium
Cesium Sulfate
Cesium Bromide
Cesium Chloride
Cesium Iodide
Copper
Copper Oxide
Copper (I) Sulfide (Alpha)
Copper (I) Sulfide (Beta)
Copper (II) Sulfide
Dysprosium
Dysprosium Oxide
Erbium
Erbium Oxide
Europium
Europium Fluoride
HfSi
2
Hg
Ho
Ho
2
O
In
In
2
In
2
O
3
Se
3
K
KBr
KCl
KF
KI
In
2
Te
3
3
InAs
InP
InSb
Ir
Ge
Ge
3
N
GeO
2
2
GeTe
Hf
HfB
2
HfC
HfN
HfO
2
Formula
Fe
Fe
2
O
3
FeO
FeS
Ga
Ga
2
O
3
GaAs
GaN
GaP
GaSb
Gd
Gd
2
O
3
8.800
8.410
7.300
7.180
5.700
5.800
5.700
4.800
6.200
13.090
10.500
12.200
13.800
9.680
7.200
13.460
6.100
4.100
5.600
7.890
7.410
5.350
5.200
6.240
Density
7.860
5.240
5.700
4.840
5.930
5.880
5.310
5.760
22.400
0.860
2.750
1.980
2.480
3.128
0.580
*1.000
0.841
*1.000
*1.000
*1.000
*1.000
*1.000
*1.000
0.360
*1.000
*1.000
*1.000
*1.000
*1.000
0.740
*1.000
*1.000
*1.000
0.670
*1.000
0.516
*1.000
*1.000
Z-Ratio
0.349
*1.000
*1.000
*1.000
0.593
*1.000
1.590
0.769
0.129
10.189
1.893
2.050
*1.000
2.077
Appendix
Material Name
Iron
Iron Oxide
Iron Oxide
Iron Sulphide
Gallium
Gallium Oxide (B)
Gallium Arsenide
Gallium Nitride
Gallium Phosphide
Gallium Antimonide
Gadolinium
Gadolinium Oxide
Germanium
Germanium Nitride
Germanium Oxide
Germanium Telluride
Hafnium
Hafnium Boride,
Hafnium Carbide
Hafnium Nitride
Hafnium Oxide
Hafnium Silicide
Mercury
Holminum
Holminum Oxide
Indium
Indium Sesquioxide
Indium Selenide
Indium Telluride
Indium Arsenide
Indium Phosphide
Indium Antimonide
Iridium
Potassium
Potassium Bromide
Potassium Chloride
Potassium Fluoride
Potassium Iodide
Mo
2
C
MoB
2
MoO
3
MoS
2
Na
Na
3
Na
5
AlF
AL
3
6
F1
4
NaBr
NaCl
NaClO
3
NaF
NaNO
3
Nb
Nb
2
O
NbB
2
3
Nb
2
O
5
NbC
NbN
Nd
Nd
2
O
NdF
3
3
Formula
La
La
2
LaB
O
LaF
3
Li
LiBr
6
3
LiF
LiNbO
3
Lu
Mg
MgAl
2
O
4
MgAl
2
O
6
MgF
2
MgO
Mn
MnO
MnS
Mo
7.500
4.470
6.970
7.820
8.400
7.000
7.240
6.506
2.900
2.900
3.200
2.170
2.164
2.558
2.270
8.578
5.390
3.990
10.200
9.180
7.120
4.700
4.800
0.970
4.700
9.840
1.740
3.600
8.000
3.180
3.580
7.200
Density
6.170
6.510
2.610
5.940
0.530
3.470
2.638
*1.000
*1.000
*1.000
1.570
1.565
0.949
1.194
0.492
0.467
0.940
0.257
*1.000
*1.000
*1.000
*1.000
4.800
*1.000
*1.000
*1.000
*1.000
*1.000
*1.000
*1.000
*1.000
0.463
*1.000
1.610
*1.000
*1.000
0.637
0.411
0.377
Z-Ratio
0.920
*1.000
*1.000
*1.000
5.900
1.230
0.778
Appendix
Material Name
Lanthanum
Lanthanum Oxide
Lanthanum Boride
Lanthanum Fluoride
Lithium
Lithium Bromide
Lithium Fluoride
Lithium Niobate
Lutetium
Magnesium
Magnesium Aluminate
Spinel
Magnesium Fluoride
Magnesium Oxide
Manganese
Manganese Oxide
Manganese (II) Sulfide
Molybdenum
Molybdenum Carbide
Molybdenum Boride
Molybdenum Trioxdide
Molybdenum Disulfide
Sodium
Cryolite
Chiolite
Sodium Bromide
Sodium Chloride
Sodium Chlorate
Sodium Fluoride
Sodium Nitrate
Niobium (Columbium)
Niobium Trioxide
Niobium (V) Oxide
Niobium Boride
Niobium Carbide
Niobium Nitride
Neodynium
Neodynium Oxide
Neodynium Fluoride
Rh
Ru
S8
Sb
Sb
Sb
2
2
O
3
S
3
Sc
Sc
2
O
3
Se
Si
Si
3
SiC
SiO
N
4
SiO
2
PbSe
PbSnO
3
PbTe
Pd
PdO
Po
Pr
Pr
2
O
3
Pt
PtO
2
Ra
Rb
Rbl
Re
Formula
Ni
NiCr
NiCrFe
NiFe
NiFeMo
NiO
P
3
N
5
Pb
PbCl
2
PbF
2
PbO
PbS
12.038
8.310
9.400
6.780
6.880
21.400
10.200
5.000
1.530
3.550
21.040
12.410
12.362
2.070
6.620
5.200
4.640
3.000
3.860
4.810
2.320
3.440
3.220
2.130
2.648
Density
8910
8.500
8.500
8.700
8.900
7.450
2.510
11.300
5.850
8.240
9.530
7.500
8.100
8.100
8.160
2.540
*1.000
0.150
0.210
0.182
2.290
0.768
*1.000
0.357
*1.000
*1.000
*1.000
*1.000
0.245
*1.000
*1.000
*1.000
0.910
*1.000
0.864
0.712
*1000
*1.000
0.870
1.000
1.130
*1.000
0.661
*1.000
0.566
*1.000
*1.000
0.651
Z-Ratio
0.331
*1.000
*10~
*1.000
*10~
*1.000
*1.000
Appendix
Material Name
Nickel
Nichrome
Inconel
Permalloy
Supermalloy
Nickel Oxide
Phosphorus Nitride
Lead
Lead Chloride
Lead Fluoride
Lead Oxide
Lead Sulfide
Lead Selenide
Lead Stannate
Lead Telluride
Palladium
Palladium Oxide
Polonium
Praseodymium
Praseodymium Oxide
Platinum
Platinum Oxide
Radium
Rubidium
Rubidium Iodide
Rhenium
Rhodium
Ruthenium
Sulphur
Antimony
Antimony Trioxide
Antimony Trisulfide
Scandium
Scandium Oxide
Selenium
Silicon
Silicon Nitride
Silicon Carbide
Silicon (II) Oxide
Silicon Dioxide
U
3
4
UO
O
O
2
8
9
V
V
2
O
5
VB
2
VC
VN
TiO
2
Tl
TlBr
U
U
TlCl
TlI
Ti
Ti
2
O
3
TiB
2
TiC
TiN
TiO
Ta
2
O
5
TaB
2
TaC
TaN
Tb
Tc
Te
TeO
2
Th
ThF
ThO
4
2
ThOF
2
Formula
Sm
Sm
2
Sn
SnO
O
3
2
SnS
SnSe
SnTe
Sr
SrF
2
SrO
Ta
8.270
11.500
6.250
5.990
11.694
6.320
9.860
9.100
4.500
4.600
4.500
4.930
5.430
4.900
4.260
11.850
Density
7.540
7.430
7.300
6.950
5.080
6.180
6.440
2.600
4.277
4.990
16.600
8.200
11.150
13.900
16.300
7.560
7.000
7.090
19.050
8.300
10.969
10.970
5.960
3.360
5.100
5.770
6.130
0.628
*1.000
*1.000
*1.000
*1.000
*1.000
0.400
1.550
0.660
*1.000
0.900
0.862
0.484
*1.000
0.284
*1.000
*1.000
0.727
0.517
0.262
0.300
*1.000
*1.000
*1.000
Z-Ratio
0.890
*1.000
0.724
*1.000
*1.000
*1.000
*1.000
*1.000
*1.000
*1.000
0.238
*1 .000
0.348
0.286
0.530
*1.000
*1.000
*1.000
*1.000
Appendix
Material Name
Samarium
Samarium Oxide
Tin
Tin Oxide
Tin Sulfide
Tin Selenide
Tin Telluride
Strontium
Strontium Fluroide
Strontium Oxide
Tantalum
Tantalum (V) Oxide
Tantalum Boride
Tantalum Carbide
Tantalum Nitride
Terbium
Technetium
Tellurium
Tellurium Oxide
Thorium
Thorium.(IV) Fluoride
Thorium Dioxide
Thorium Oxyfluoride
Titanium
Titanium Sesquioxide
Titanium Boride
Titanium Carbide
Titanium Nitride
Titanium Oxide
Titanium (IV) Oxide
Thallium
Thallium Bromide
Thallium Chloride
Thallium Iodide (B)
Uranium
Tri Uranium Octoxide
Uranium Oxide
Uranium Dioxide
Vanadium
Vanadium Pentoxide
Vanadium Boride
Vanadium Carbide
Vanadium Nitride
Appendix
ZnO
2
ZnS
ZnSe
ZnTe
Zr
ZrB
2
ZrC
ZrN
ZrO
2
Formula
VO
2
W
WB
WC
2
WO
3
WS
2
WSi
2
Y
Y
2
O
3
Yb
Yb
Zn
2
O
3
Zn
3
ZnF
Sb
2
Density
4.340
19.300
10.770
15.600
7.160
7.500
9.400
4.340
5.010
6.980
9.170
7.040
6.300
4.950
5.610
4.090
5.260
6.340
6.490
6.080
6.730
7.090
5.600
Z-Ratio
*1.000
0.163
*1.000
0.151
*1.000
*1.000
*1.000
0.835
*1.000
1.130
*1.000
0.514
*1.000
*1.000
0.556
0.775
0.722
0.770
0.600
*1.000
0.264
*1.000
*1.000
Material Name
Vanadium Dioxide
Tungsten
Tungsten Boride
Tungsten Carbide
Tungsten Trioxide
Tungsten Disulphide
Tungsten Suicide
Yttrium
Yttrium Oxide
Ytterbium
Ytterbium Oxide
Zinc
Zinc Antimonide
Zinc Fluoride
Zinc Oxide
Zinc Sulfide
Zinc Selenide
Zinc Telluride
Zirconium
Zirconium Boride
Zirconium Carbide
Zirconium Nitride
Zirconium Oxide
Z-Factor is used to match the acoustic properties of the material being deposited to the acoustic properties of the base quartz material of the sensor crystal.
Z-Factor = Z q
/ Z m
For example, the acoustic impedance of gold is Z=23.18, so:
Gold Z-Factor = 8.83 / 23.18 = .381
Unfortunately, Z Factor is not readily available for many materials. Z Factor can be calculated empirically using this method:
1. Deposit the material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
2. Place a new substrate adjacent to the used quartz sensor.
3. Set QCM Density to the calibrated value; Tooling to 100%. Zero thickness.
4. Deposit approximately 1000 to 5000 Å of material on the substrate.
5. Use a profilometer or iterferometer to measure the actual substrate film thickness.
6. Adjust the Z Factor of the instrument until the correct thickness reading is shown.
Appendix
Another alternative is to change crystals frequently. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z
Factor.
Appendix
B. Specifications
Measurement
Number of Sensors
Sensor Frequency Range
Reference Frequency Accuracy
Reference Frequency Stability
Thickness Display Resolution
Frequency Resolution*
Rate Resolution*
Thickness Resolution*
*Density = 1, Period = 4 rdgs/sec (Std.)
10 rdgs/sec. (HiRes)
Film Parameters
Stored Films
Density
Tooling
Z-Factor
Final Thickness
Thickness Setpoint
Time Setpoint
Sample/Hold
Sensor Average
System Parameters
Measurement Period
Simulate Mode
Frequency Mode
Rate Resolution
Measurement Filter
Dual Crystal 1/2
Rate Sampling
RS-232 Baud Rate
Etch Mode
Crystal Tooling 1-6
Crystal Fail Min/Max
2 standard, 4 additional optional
4.0 MHz to 6.0 MHz
.002%
+/- 2ppm (total, 0 to 50C)
1 Å
+/- 0.12 Hz (Std.), +/- 0.03 Hz (HiRes)
0.60 Å/s (Std.), 0.037 Å/s (HiRes)
0.15 Å (Std.), 0.037 Å (HiRes)
99
0.5 – 99.99 gm./cc
10 – 399 %
0.10 – 10.00
0.000 – 99.99 kÅ
0.000 – 99.99 kÅ
0:00 – 99:59 mm:ss
0-9999 sec.
Any combination of installed sensors
.15 to 2 sec.
On/Off
On/Off
.01/.1 Å/s
1 to 20 readings
On/Off
On/Off
2.4/4.8/9.6/19.2 kb/s
On/Off
10-399 %
4.0 to 6.0 MHz / 4.1 to 6.1 MHz
Digital I/O
Digital Inputs
Functions
Input Rating
Relay Outputs
Functions
Relay Rating
General Specifications
Mains Power Supply
Power Consumption
Operating Environment
Storage Environment
Rack Dimensions (HxWxD)
Weight
Appendix
4
Open Shutter
Close Shutter
Zero Thickness
Zero Time
5VDC, non-isolated
4
Shutter
Sample/Hold or Thickness Setpoint
Dual Sensor Shutter or Time Setpoint
Crystal Fail
30Vrms or 30VDC, 2A maximum
100-120/200-240~, ±10% nominal
50/60 Hz
20W
0C to 50C
0 to 80% RH non-condensing
0 to 2,000 meters
Indoor Use Only
Class 1 Equipment (Grounded Type)
Suitable for Continuous Operation
Ordinary Protection (not protected
Pollution Degree 2
Installation (Overvoltage) Category II
C
88.5mm x 212.7mm x 196.9mm
2.7 kg (6 pounds)
Appendix
C. I/O Connections
A 15-pin female D-sub connector is included with the instrument to connect digital I/O to the SQM-160 Relay I/O connector. The figure below shows the solder-side pin assignments for the supplied connector.
1
9 15
8
Relay I/O Connector Rear View
Pins
1,2
Relay 1
3,4
Relay 2
5,6
Relay 3
Function
Crystal Fail
Relay
Time Setpoint,
Dual Sensor, or
Sensor 2 Relay
Shutter
Relay
7,8
Relay 4
9
10
Sampling or
Thickness
Setpoint
Zero Timer
Input
Zero Thick
Input
Close Shutter 11
12
Input
Open Shutter
Input
13,14,15 Ground
Description
Contacts close when all enabled sensors have failed.
If Relay 2 is set to TIME in the System menu, contacts close when timer counts down to zero from its programmed Timer Setpoint value. If DUAL is selected, contacts close when Sensor 1 fails. If SENS2 is selected, contacts close when shutter is pushed if
Sensor 2 is programmed for the active film.
Controlled by front panel shutter switch. Contacts close when Shutter Open is selected. If SENS2 is selected for
Relay 2 in the System menu, the shutter relay contacts close only if Sensor 1 is programmed for the active film.
If Sampling is ON in System Menu, contacts close during
Sample, open during Hold. If Sampling is OFF contacts close when Thickness Setpoint is reached.
Grounding this pin zeroes the setpoint timer.
Grounding this pin zeroes the thickness display..
Grounding this pin opens the shutter relay.
Grounding this pin closes the shutter relay.
W ARNING
: The inputs are not isolated! The voltage level applied must be limited to between 0 and +5 volts with respect to Ground.
W ARNING
: Output relays are rated for 30Vrms or 30VDC, at 2A maximum.
Proper fusing and adequate wiring insulation and separation should be provided to assure these limits are not exceeded.
Appendix
C. Communications
Communications with a computer is by RS-232, or optional USB or Ethernet.
RS-232 requires a standard 9-pin straight through cable.
For USB communications, first install the SQM-160 Comm program supplied on the CD-ROM. When the SQM-160 is connected to a USB port, it will be found and installed automatically by Windows.
For Ethernet communications, the SQM-160 is supplied with a fixed TC/IP address of 192.168.1.200. That address can be changed using the Dgdiscvr program on the CDROM. To change the IP address:
Run dgdiscvr.exe and find the unit (it may take a minute, click Refresh)
Double click on unit (should be highlighted)
Enter User Name: root and Password: dbps
Click Login
Click Configuration, Network and set
1 – Change IP=192.168.1.200 to your new IP address.
Click Apply, then Log Out
SQM-160 Comm
This Windows program allows you to set film parameters and names, download them to the SQM-160, and collect data from the instrument. The data can be graphed, and also saved in a spreadsheet format.
Appendix
SQM-160 Communications Protocol
The SQM-160 communicates with a host computer via an ASCII based protocol.
The instrument defaults to 19200 baud, 8 data bits, and no parity. The baud rate can be changed in the System Menu of the SQM-160, but is always 8 data bits with no parity.
The basic protocol is:
<sync character> <length character> <1 to n data characters> <CRC1><CRC2>
Once a valid command has been transmitted to the SQM-160, a response is returned. The structure of the packet is identical in both the command and response. In the response, the first character is a Response Status. These are summarized in the following table.
Response Letter
A
B
C
D
E
Meaning
Command understood, normal response
Command understood, but instrument reset
Invalid command
Problem with data in command
Instrument in wrong mode for this command
The sync character is an exclamation point ‘!’. Anytime this character is received, the communications for that packet is reset. Following the sync character is the length character. This is the number of characters in the packet starting with the length and counting the 2 CRC characters. This character has a decimal 34 added to it so there cannot accidentally be a sync character embedded in the packet. The two character CRC is computed using the following algorithm:
1. The CRC is initialized to 3FFF hex.
2. Each character in the message is examined, bit by bit, and added to the CRC in the following manner: a) The character is exclusive or’d with the CRC.
b) The CRC is shifted right one bit position.
c) If the character’s least significant bit is a 0 then the CRC is exclusive or’d with 2001 hex.
d) Steps b and c are repeated for each of the 8 bits in the character.
The CRC contains 14 significant bits. This is split into two characters of 7 bits each, and then a decimal 34 is added to offset the character outside the range of the Sync Character. See the code example in the SQM-TERM.C file for an example of managing the CRC.
Appendix
Command: @
Parameters: None
Description: Returns the model number and software version number.
Example: @ AMON Ver 2.01
Command: A
Parameters: [1..99], Values | ?
Description: Film parameters. The parameters available for change or inspection are
Label, Density, Tooling, Z-Factor, Final Thickness, Thickness Setpoint, Time Setpoint, Sensor
Average
The parameters are sent/retrieved in that order. The label is a maximum of 8 characters, and is terminated by a space character.
If you want to send a space embedded in a Label, use an underscore character ‘_’. Each parameter is separated by a space.
Each film’s parameters are accessed by using the ASCII character associated with film number directly after the Command. For example Film 1-9 are ASCII characters “1” (ASC 49) to “9” (ASC
57). Film 10 is a “:” character (ASC 58), etc. The parameters are edited by adding a value after the command film number.
The parameters are inspected by issuing a command, film number, then a question mark. An example of the Set/Get command for
Film 4 is:
Example: A4LENS_1 6.23 125 1.05 1.525 0.450 30 1
A4?
ALENS 1 6.23 125 1.05 1.525 0.450 30 1
Command: B
Description: System 1 parameters. The parameters available for change or inspection are Time Base, Simulation Mode, Frequency Mode,
Rate Resolution, Rate Filter, Crystal Tooling and the parameters are sent/retrieved in that order.
Example: B?
A0.25 0 0 0 8 100 100 100 100 100 100
Appendix
Appendix
Command: C
Description: System 2 parameters. The parameters available for change or inspection are Minimum Frequency, Maximum Frequency,
Minimum Rate, Maximum Rate, Minimum Thickness, Maximum
Thickness, Etch Mode and the parameters are sent/retrieved in that order.
Example: C?
5.000 6.000 0.000 100.00 0.000 1.000 0
Command: D
Parameters: 1 to 9
Description: Sets the active film.
Example: D1 Set the active film to Film #1
Command: J
Parameters: None.
Description: Read the number of channels installed. The number of channels will be either an ASCII two or six.
Example: J A2 The unit has two channels available.
Command: L
Parameters: [1..6]
Description: Read the current Rate for a channel.
Example: L1 A9.32
Channel one’s rate is 9.32 Angstroms/S
Command: M
Parameters: None.
Description: Read the current Average Rate.
Example: M A10.42
Appendix
Average Rate is 10.42 Angstroms/S
Command: N
Parameters: [1..6]
Description: Read the curent thickness for a channel.
Example: N4 A1.187
Angstroms.
Channel four’s Thickness is 1.187 Kilo
Command: O
Parameters: None.
Description: Read the current Average Thickness
Example: O A2.376
Angstroms.
The current Average Thickness is 2.376 kilo
Command: P
Parameters: [1..6]
Description: Read the current Frequency for a channel.
Example: P2 A5701563.2 Channel two’s current Frequency 5701563.2Hz
Command: R
Parameters: [1..6]
Description: Read the Crystal Life for a channel.
Example: R3 A57.82
57.82%.
Channel three’s remaining life is
Command: S
Parameters: None.
Appendix
Description: Zero Average Thickness and Rate.
Example: S A
Command: T
Parameters: None.
Description: Zero Time
Example: T A Zeroes time display on unit.
Command: U
Parameters: 0,1, or ?
Description: Toggles shutter open/closed or reads shutter state.
Example: U1 A Shutter is opened
U?
A1 Shutter Status is open
U0 A Shutter is closed.
Command: Y
Parameters: None.
Description: Read the Power-Up Reset flag. The Power-Up Reset flag is set during boot-up of the unit and stays set until read through the RS-
232 interface. After the flag is read, it is reset and will not be set again until the unit is power cycled.
Example: Y
Y
A1
A0
Power-Up Reset flag is set.
Power-Up Reset flag is reset.
Command: Z
Parameters: None.
Description: Set all Film and System menu parameters to defaults.
Note that this command can take over 1 second to complete
Example: Z to defaults.
A
Appendix
All Film and System parameters are set
Appendix
SIGMACOM.DLL Function Descriptions
This dll acts as an interpreter between an application and the SQM160. The dll transforms function calls to specific command sequences that the unit understands.
Transfer of data to the unit, in general, requires two function calls. The first function call is to transfer the data to the unit. The data to be sent is usually contained in the function’s parameter(s). The second function call is to
ChkCommDone
. This function call ensures that the data was sent properly to the unit.
Data retrieval requires three function calls. The first function call is used to tell the unit what data is being requested. The second function call is to ChkCommDone.
This function call is used to determine when all of the data has been transferred from the unit to the dll or if an error occurred in the communications. The third function call is used to retrieve the data from the dll.
InitComm
Parameters: 16 Bit Integer, 32 Bit Integer
Return : 16 Bit Integer.
InitComm is used to initialize the dll com port. The function’s first parameter is the com port number to initialize (1 - 99 are valid). The second parameter is the baud rate for the port. The function returns zero if initialization was successful or a bit flag to indicate the failure of the initialization : bit 0 : Communications Port handle is invalid.
bit 1 : Communications Port Set parameters invalid (Baud Rate) bit 2 : Communications Port Set timeouts invalid.
bit 3 : Communications Port Set mask invalid.
bit 4 : Communications Port Error – Already exists.
bit 5 : Communications Port Set Read Thread fail.
bit 6 : Communications Port Set Read Thread priority fail.
Example:
ReturnVal =InitComm(1,19200) initialize Com1 to 19200 baud if (ReturnVal != 0)
CloseComm() if port did not initialize correctly close the port
ClearComm
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
Appendix
ClearComm is used to clear the communications buffers in the dll.
Example: ReturnVal =ClearComm() the dll
Clear the comm buffers in
CloseComm
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
CloseComm is used to close the currently opened communications port.
CloseComm should always be used before attempting to open another port or before exiting the dll’s calling application. The dll can have only one port open at a time.
Example:
ReturnVal =CloseComm() port
Close the currently open comm
ChkCommDone
Parameters: None.
Return : 16 Bit Integer.
ChkCommDone is used to check the status of a single communications iteration. The function returns one of five different types of values:
-1: communications not complete
Positive integer : communications complete, value is byte count of returned message.
-99 : communications complete, but return message incomplete due to timeout with unit.
-98 :
-97 : communications complete, but return message not valid due to a CRC error.
communications complete, but message not understood by unit.
Example:
ReturnVal =ChkCommDone() check communications status
SendGetVers
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
Appendix
SendGetVers is used to retrieve the software version of the unit from the unit. This function must precede the use of the GetVers function
Appendix
GetVers
Parameters: Pointer to Null-Terminated string.
Return : 16 Bit Integer, always returns a 1.
GetVers is used to retrieve the software version of the unit from the dll.
This function must be preceded by the SendGetVers. The Null-terminated string is used to return the version from the dll.
Example:
ReturnVal = SendGetVers() tell unit to transfer version to dll do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = GetVers(&VersionString[0]) VersionString contains version info
Set160Film
Parameters: Pointer to a Film Structure.
Return : 16 Bit Integer, always returns a 1.
SetFilm is used to set a Film’s parameters in the unit. All of the parameters are passed to the function through the Film Structure.
Example:
ReturnVal = SetFilm(&FilmStruct) set film parameters to
FilmStruct values do while(ChkCommDone == -1) wait for comm to finish
SendGetFilm
Parameters: 16 Bit Integer.
Return : 16 Bit Integer, always returns a 1.
SendGetFilm is used to get a Film’s parameters from the unit. The Film’s number (1 - 9) is passed to the function. This function must precede the use of GetFilm.
Get160Film
Parameters: Pointer to a Film Structure.
Return : 16 Bit Integer, always returns a 1.
GetFilm is used to retrieve a Film’s parameters, the film requested by
SendGetFilm, from the dll. The parameters are passed through the Film
Structure.
Example:
ReturnVal = SendGetFilm(FilmNum)tell unit to transfer Film #
FilmNum to dll
Appendix do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = GetFilm(&FilmStruct) FilmStruct contains Film info
SetSys1
Parameters: Pointer to a System1 Structure.
Return : 16 Bit Integer, always returns a 1.
SetSys1 is used to set the System1 Parameters. The parameters are passed to the function through the System1 Structure.
Example:
ReturnVal = SetSys1(&Sys1Struct) do while(ChkCommDone == -1) set System1 parameters to
Sys1Struct values wait for comm to finish
SendGetSys1
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
SendGetSys1 is used to get the System1 Parameters from the unit. This function must precede the use of the GetSys1 function.
GetSys1
Parameters: Pointer to a System1 Structure.
Return : 16 Bit Integer, always returns a 1.
GetSys1 is used to retrieve the System1 Parameters from the dll. The parameters are passed through the System1 Structure.
Example:
ReturnVal = SendGetSys1() do while(ChkCommDone == -1) wait for comm sequence to finish
ReturnVal = GetSys1(&Sys1Struct) Sys1Struct contains
System1 info tell unit to transfer System1 parameters
SetSys2
Parameters: Pointer to a System2 Structure.
Return : 16 Bit Integer, always returns a 1.
SetSys2 is used to set the System2 Parameters. The parameters are passed to the function through the System2 Structure.
Example:
ReturnVal = SetSys2(&Sys2Struct) set System2 parameters to
Sys2Struct values
do while(ChkCommDone == -1)
Appendix wait for comm to finish
Appendix
SendGetSys2
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
SendGetSys2 is used to get the System2 Parameters from the unit. This function must precede the use of the GetSys2 function.
GetSys2
Parameters: Pointer to a System2 Structure.
Return : 16 Bit Integer, always returns a 1.
GetSys2 is used to retrieve the System2 Parameters from the dll. The parameters are passed through the System2 Structure.
Example:
ReturnVal = SendGetSys2() do while(ChkCommDone == -1) wait for comm sequence to finish
ReturnVal = GetSys2(&Sys2Struct) Sys2Struct contains
System2 info tell unit to transfer System2 parameters
SendGetNumCh
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
SendGetNumCh is used to get the number of channels installed from the unit. This function must precede the use of the GetNumCh function.
GetNumCh
Parameters: None.
Return : 16 Bit Integer, Number of channels installed.
GetNumCh is used to retrieve the number of channels installed from the dll. The number of channels is returned by the function.
Example:
ReturnVal = SendGetNumCh() tell unit to transfer Number of channels do while(ChkCommDone == -1) wait for comm sequence to finish
ReturnVal = GetNumCh() ReturnVal contains Number of channels
ZeroStartTime
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
Appendix
ZeroStartTime is used to zero the beginning time before acquiring data with GetAllData.
Appendix
SendGetAllData
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
SendGetAllData is used to get the data from the unit. This function must precede the use of the GetAllData function.
GetAllData
Parameters: Pointer to an AllData Structure.
Return : 16 Bit Integer, always returns a 1.
GetAllData is used to retrieve the data from the dll. The parameters are passed through the AllData Structure. If the TimeStamp parameter of the
AllData structure returned is equal to -1 then the unit does not have new data available.
Example:
ReturnVal = ZeroStartTime() time do
ReturnVal = SendGetAllData() zero the run tell unit to transfer
AllData do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = GetAllData(&AllDataStruct) AllDataStruct contains if (AllData.TimeStamp != -1) then
ProcessData() while(Running) run info if new data available then graph or save data
SendCrystalLife
Parameters:16 Bit Integer
Return : 16 Bit Integer, always returns a 1.
SendCrystalLife is used to get the crystal life for a channel from the unit.
The parameter is the channel number to retrieve.This function must precede the use of the CrystalLife function.
CrystalLife
Parameters: None.
Return : Double.
CrystalLife is used to retrieve the Crystal life remaining for the channel requested by SendCrystalLife from the dll. The Crystal life is returned by the function.
Appendix
Example:
ReturnVal = SendCrystalLife(XtalNum) tell unit to transfer Life for do while(ChkCommDone == -1)
ReturnVal = CrystalLife()
XtalNum wait for comm to finish
ReturnVal contains Life for
XtalNum
ZeroReadings
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
ZeroReadings is used to command the unit to zero the rate and thickness values for all channels and the average rate and thickness.
Example:
ReturnVal =ZeroReadings() tell unit to reset Rate and
Thickness do while(ChkCommDone == -1) wait for comm sequence to finish
ZeroTime
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
ZeroTime is used to command the unit to zero the system time.
Example:
ReturnVal =ZeroTime() display do while(ChkCommDone == -1) tell unit to reset time wait for comm to finish
ShutterState
Parameters: 16 Bit Integer
Return : 16 Bit Integer, always returns a 1.
ShutterState is used to command the unit to set the shutter open or closed.
Example:
ReturnVal =Shutter(0) tell unit to toggle open the shutter do while(ChkCommDone == -1) wait for comm sequence to finish
SendGetShutter
Parameters: None.
Return : 16 Bit Integer.
Appendix
SendGetShutter is used to retrieve the condition of the shutter, open or closed, from the unit.
Appendix
GetShutter
Parameters: None.
Return : 16 Bit Integer, Shutter value (0 = Closed, 1 = Open).
GetShutter is used to retrieve the value of the shutter from the dll. The returned value from the function is the value of the shutter :
Example:
ReturnVal = SendGetShutter() tell unit to transfer Shutter value do while(ChkCommDone == -1) wait for comm sequence to finish
ReturnVal = GetShutter() ReturnVal contains Shutter value
SendGetReset
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
SendGetReset is used to get the value of the power up reset flag from the unit.
GetReset
Parameters: None.
Return : 16 Bit Integer, Flag value (0 = flag not set, 1 = flag set).
GetReset is used to get the value of the power up reset flag from the dll.
The value of the flag is the return value of the function :
Example:
ReturnVal = SendCrystalLife(XtalNum) tell unit to transfer Life left do while(ChkCommDone == -1)
ReturnVal = CrystalLife() for XtalNum wait for comm to finish
ReturnVal contains Life left for XtalNum
LoadDefaults
Parameters: None.
Return : 16 Bit Integer, always returns a 1.
LoadDefaults is used to cause the unit to load the default values into every film and system parameter.
Example:
ReturnVal =LoadDefaults() tell unit to load default values do while(ChkCommDone == -1) wait for comm sequence to finish
Appendix
Data Structures: unit.
The size of each data type in the structures is : double : 8 bytes, the LSB is thrown out before transmission to the int : 2 bytes.
char : 1 byte.
Film Data double Density double Tooling double ZFactor double FinThk double ThkSet double TimeSet double SnsAvg char int
Name[8]
FilmNum film density film tooling film zfactor film End Thickness film Thickness Setpoint film Time Setpoint
Sensors to average film Name film Number
System1 Data double TimeBase double SimMode simulation mode (1 = on, 0 = off) double FreqDisp frequency display (1 = on, 0 = off) double RateRes double RateFilt double XTool[6] rate resolution (1 = hi, 0 = low) rate filter depth (1 - 20) six individual crystal tooling
System2 Data double FMin double FMax double RMin minimum frequency maximum frequency minimum rate maximum rate double RMax double TMin double TMax minimum thickness maximum thickness double EtchMode Etch mode on/off
AllData double TimeStamp time relative to start time data was acquired double AvgRate average rate double AvgThick average thickness double ChRate[6] up to six individual channels of rate double ChThick[6] up to six individual channels of thickness double ChFreq[6] up to six individual channels of frequency
Appendix
Appendix
E. EC Declaration of Conformity
This is to certify that this equipment, designed and manufactured by:
INFICON Inc.
Two Technology Place
East Syracuse, NY 13057
USA meets the essential safety requirements of the European Union and is placed on the market accordingly. It has been constructed in accordance with good engineering practice in safety matters in force in the Community and does not endanger the safety of persons, domestic animals or property when properly installed and maintained and used in applications for which it was made.
In addition, this is to certify that this equipment has also been designed and manufactured, having regard to the state of the art, to ensure complies with the
Protection Requirements of EMC directive 2004/108/EC.
A Technical Documentation File is also available for review by competent authorities and will be maintained for a period of ten years after the date on which the equipment was last manufactured. In additional to this file, technical, installation, maintenance and application information concerning this equipment can also be found in the Operating Manual(s) for this product or product family.
Equipment Description:
SQM-160 Rate / Thickness Monitor (including all options).
Applicable Directives:
2006/95/EC (LVD)
2004/108/EC (General EMC)
2002/95/EC (RoHS)
Applicable Standards:
Safety: EN 61010-1:2001
Emissions: EN 61326-1:1997/A1: 1998/A2: 2001 (Radiated &
Conducted Emissions)
Class A: Emissions per Table 3
(EMC – Measurement, Control & Laboratory Equipment)
Appendix
Immunity:
RoHS:
EN 61326-1:1997/A1: 1998/A2: 2001 (General EMC)
Class A: Immunity per Table A1
(EMC – Measurement, Control & Laboratory Equipment)
Fully compliant
CE Implementation Date:
January 2003 (Updated December 2008)
Authorized Representative:
Duane H. Wright
Operations Quality Manager, ISS
INFICON Inc.
ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY
OF INFICON'S PRODUCTS SHOULD BE DIRECTED, IN WRITING, TO THE
VICE-PRESIDENT OF OPERATIONS AT THE ABOVE ADDRESS.
Revised 12/24/08 (Rev B)
advertisement
* Your assessment is very important for improving the workof artificial intelligence, which forms the content of this project