Semiconductor Characterization System Technical Data

Semiconductor Characterization System Technical Data
Semiconductor Characterization System
Technical Data
Model 4200-SCS Technical Data
4200-SCS
Semiconductor
4200-SPEC Rev. K
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Semiconductor Characterization System
Technical Data
Model 4200-SCS Technical Data
4200-SCS
2 Introduction
3Configuration Options
5 Hardware Specifications
14 KTE Interactive Software Tools
14 Microsoft Windows
15 The Keithley Interactive Test
Environment (KITE)
22 Keithley User Library Tool
(KULT)
23 System Configuration and
Diagnostics (KCON)
23 Keithley External Control
Interface (KXCI)
24 Support Contracts
25 Value-Add Services
25 Upgrades
26 Warranty Information
26 Embedded PC Policy
26 Switch Matrix Support and
Configurations
28Optional Accessories
Introduction
The Model 4200-SCS provides a total system solution for DC I-V, C-V,
and pulse characterization and stress-measure/reliability testing of
semiconductor devices and test structures. This advanced parameter
analyzer provides intuitive and sophisticated capabilities for semiconductor
device characterization. The 4200-SCS combines unprecedented
measurement speed and accuracy with an embedded Windows®-based
PC and the Keithley Interactive Test Environment (KITE) to provide a
powerful ­single-box ­solution.
The Keithley Interactive Test Environment allows users to gain familiarity
quickly with tasks such as managing tests and results and generating
reports. Sophisticated and simple test sequencing and external instrument
drivers ­simplify performing automated device and wafer testing with
combined I-V and C-V measurements. Our new integrated capacitancevoltage measurement unit, the Model 4210-CVU, makes C-V measurements
as easy as DC measurements.
The 4200-SCS is modular and configurable. The system supports up to
nine Source-Measure Units, including up to nine high power SMUs with
1A/20W capability. An optional Remote PreAmp extends the resolution of
any Source-Measure Unit from 100fA to 0.1fA.
KTEI provides software support for DC SMUs and a number of new
instruments. Besides the C-V measurement unit described previously,
it supports a dual-channel pulse generator card (the Model 4205-PG2)
that plugs into one of the Model 4200-SCS’s slots, just like an SMU, and a
choice of dual-channel digital oscilloscopes for time- and voltage-domain
measurements. Together, the pulse generator and oscilloscope make it
simple and cost-effective to integrate pulsing, waveform generation, and
signal observation capabilities into the Model 4200-SCS’s test environment.
Semiconductor
Our KTEI software supports three test application packages to expand
the Model 4200-SCS’s pulsed testing capabilities: 4200-PIV-A performs
charge trapping and isothermal testing for leading-edge CMOS research;
4200-PIV-Q tests for higher power pulse in III-V, LDMOS, and other
higher frequency FET devices; and 4200-FLASH tests FLASH ­embedded
memory devices.
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Semiconductor Characterization System
Technical Data
4200-SCS
Configuration Options
The 4200-SCS supports many instrument configurations that can include SMUs, C-V measurement
units, pulse generators, and oscilloscopes. The standard configuration includes two ­medium power
Source-Measure Units (SMUs) and a Ground Unit.
4200-SCS/F
Chassis
12.1˝ flat panel display
Two (2) Model 4200-SMU medium power SMUs
One (1) Remote Sense Ground Unit
LAN, GPIB, USB, RS-232, parallel port, hard disk, DVD/CD-RW
4200-SCS/C
Chassis
Composite Front Bezel (i.e., no built-in display)
Two (2) Model 4200-SMU medium power SMUs
One (1) Remote Sense Ground Unit
LAN, GPIB, USB, RS-232, parallel port, hard disk, DVD/CD-RW
Model 4200-SCS Technical Data
Standard 4200-SCS Models
Source-Measure Units
Each system can be configured with up to seven additional SMUs, for a total of nine SMUs. Two SMU
models are available: a medium power (100mA, 2W) version (Model 4200-SMU) and a high power
(1A, 20W) version (Model 4210-SMU). The system can support up to nine high power SMUs.
4200-SCS Source-Measure Units
MaximumMaximumMaximum
VoltageCurrent
Power
4200-SMU (medium power)
210V
100mA
2W
4210-SMU (high power)
210V
1A
20W
The low current measurement capabilities of any SMU can be extended
by adding an optional Remote PreAmp (Model 4200-PA). The 4200-PA
provides 0.1fA resolution by effectively adding five current ranges to either
SMU model. The PreAmp module is fully integrated with the system;
to the user, the SMU simply appears to have additional meas­urement
resolution available. The Remote PreAmp is shipped installed on the
back panel of the 4200-SCS for local operation. This installation allows
for standard cabling to a prober, test fixture, or switch matrix. Users can
remove the PreAmp from the back panel and place it in a remote location
(such as in a light-tight enclosure or on the prober ­platen) to eliminate
measurement problems due to long cables. Platen mounts and triax panel
mount accessories are available. Remore PreAmps are installed at the
factory in numerical order, i.e., SMU1, SMU2, SMU3 … up to the number
of PreAmps specified.
Capacitance-Voltage Instrument
C-V measurements are now as easy to perform as I-V measurements with
the new integrated C-V instrument, the Model 4210-CVU. This optional
capacitance-voltage instrument performs capacitance measurements from
femtofarads (fF) to nanofarads (nF) at frequencies from 1kHz to 10MHz.
It also supplies diagnostic tools that ensure the validity of your C-V
test results.
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With this system, you can configure linear or custom C-V, C-f, and C-t
sweeps with up to 4096 data points. In addition, through the open
environment of the 4200-SCS, you can modify any of the included tests.
Pulse Generator
The Model 4205-PG2 Dual-Channel Pulse Generator provides dual-channel
pulsing with voltage pulses as short as 10ns in high speed mode or up to
±20V (into 50W) in high voltage mode. It supports two new waveform
­generation modes in addition to the standard pulse capability. The
Arbitrary Waveform Mode can generate complex waveforms made up of
up to 256K data points at clock speeds up to 25MHz. The Segment ARB™
Mode (patent-pending) generates waveforms made up of up to 1024 userdefined line segments. Each segment can have a different duration.
Oscilloscope
The system supports two dual-channel integrated digital oscilloscope
options: the Model 4200-SCP2 offers 8-bit resolution with a sample rate
up to 2.5 gigasamples/second, while the Model 4200-SCP2HR provides
16-bit resolution and a sample rate up to 400 megasamples/second. Both
can be programmed for automated measurement and data acquisition
or used with the stand-alone GUI application provided to perform
traditional ­oscilloscope tasks. They provide measurements in both the time
(frequency, rise/fall time) and voltage domains (amplitude, peak-peak, etc.).
Semiconductor
Remote PreAmp
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Semiconductor Characterization System
Technical Data
4200-SCS
Configuration Examples
The 4200-SCS’s plug-in chassis design offers exceptional configuration flexibility, as the following
examples illustrate. A chassis can contain up to nine SMUs in any combination of high and medium
powered units. Any configuration can be specified without a flat panel display by substituting the
4200-SCS/C for the 4200-SCS/F. However, an external SVGA monitor is required to operate the
4200-SCS/C. Basic Characterization System Configuration
Model 4200-SCS Technical Data
Basic Characterization System Configuration
Configuration:
One (1) Model 4200-SCS/F
Three (3) Model 4200-SMU medium power SMUs
One (1) Model 4200-PA Remote PreAmp module
One (1) Remote Sense Ground Unit
Description:
A general-purpose configuration for characterizing transistors and other devices.
Maximum DC Configuration
One (1) Model 4200-SCS/F (includes two medium power SMUs as the standard
configuration, which can be substituted with two high power SMUs)
Seven (7) additional Model 4210-SMUs (total of nine; all nine can
be high power SMUs)
Nine (9) Model 4200-PA Remote PreAmp modules
Provides a nine-SMU system with 0.1fA sensitivity on all nine SMUs
and 1A capability on all nine channels.
Configuration:
Description:
Maximum Pulse Configuration
One (1) Model 4200-SCS/F
Four (4) Model 4205-PG2 dual-channel pulse generators (8 channels)
One (1) digital oscilloscope (Model 4200-SCP2 or 4200-SCP2HR)
Four (4) Model 4200-SMUs
Four (4) Model 4200-PA Remote PreAmp modules
Provides a four-SMU system with eight channels that support traditional pulse
mode, arbitrary waveform mode (ARB), Segment ARB™ waveform mode
(Segment ARB or SARB), and trigger-in. Each pulse channel contains an inline
High Endurance Output Relay (solid-state relay). The oscilloscope provides pulse
measure and waveform monitoring.
Configuration:
Description:
Example Broad Use Case Configuration
One (1) Model 4200-SCS/F
Three (3) Model 4205-PG2 dual-channel pulse generators (8 channels)
One (1) digital oscilloscope (Model 4200-SCP2 or 4200-SCP2HR)
Four (4) Model 4200-SMUs
Four (4) Model 4200-PA Remote PreAmp modules
One (1) Model 4210-CVU Capacitance-Voltage Instrument
Provides an ultra-flexible multi-use system for a broad range of parametric tests,
including very low-level DC measurements, C-V, and pulse sourcing.
Semiconductor
Configuration:
Description:
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Semiconductor Characterization System
Technical Data
4200-SCS
Hardware Specifications
Specification Conditions
Specifications are the performance standards against
which the Models 4200-SMU, 4210-SMU, and 4200-PA
are tested. The measurement and source accuracy are
specified at the termina­tion of the ­supplied cables.
• 23°C ±5°C, within 1 year of calibration, RH
between 5% and 60%, after 30 minutes of warm-up.
• Speed set to NORMAL.
• Guarded Kelvin connection.
• ±1°C and 24 hours from ACAL.
Current SPECIFICATIONS
MEASURE
4200
2
SMU
Medium
Power
SMU
4200-SMU and
4210-SMU with
optional
4200-PA PreAmp
4210SMU2
High
Power
SMU
Current
RANGE1
Max.
VOLTAGE
1 A
100 mA
100 mA
10 mA
1 mA
100 µA
10 µA
1 µA
100 nA
10 nA
1 nA
100 pA
10 pA
1 pA
21 V
210 V
21 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
Resolution 3
1 µA
100 nA
100 nA
10 nA
1 nA
100 pA
10 pA
1 pA
100
fA
10
fA
3
fA
1
fA
0.3
fA
100
aA
SOURCE
Accuracy
±(% rdg + amps)
0.100% +200µA
0.045% + 3µA
0.045% + 3µA
0.037% +300nA
0.035% + 30nA
0.033% + 3nA
0.050% +600pA
0.050% + 100pA
0.050% + 30pA
0.050% + 1pA
0.050% + 100 fA
0.100% + 30 fA
0.500% + 15 fA
1.000% + 10 fA
Resolution 3
50 µA
5 µA
5 µA
500 nA
50 nA
5 nA
500 pA
50 pA
5 pA
500 fA
50 fA
15 fA
5 fA
1.5 fA
Accuracy
±(% rdg + amps)
0.100% +350 µA
0.050% + 15 µA
0.050% + 15 µA
0.042% + 1.5 µA
0.040% +150 nA
0.038% + 15 nA
0.060% + 1.5 nA
0.060% +200 pA
0.060% + 30 pA
0.060% + 3 pA
0.060% +300 fA
0.100% + 80 fA
0.500% + 50 fA
1.000% + 40 fA
Voltage Compliance: Bipolar limits set with a single value between full scale and 10% of selected voltage range.
Voltage SPECIFICATIONS
Voltage
RANGE1
200
20
2
200
V4
V
V
mV
Max.
Current
4200-SMU
10.5 mA
105 mA
105 mA
105 mA
MEASURE
4210-SMU
105 mA
1.05
A
1.05
A
1.05
A
Resolution3
200 µV
20 µV
2 µV
1 µV
Model 4200-SCS Technical Data
DC SMU Hardware Specifications
SOURCE
Accuracy
±(% rdg + volts)
0.015% + 3 mV
0.01 % + 1 mV
0.012% +150 µV
0.012% +100 µV
Resolution3
5 mV
500 µV
50 µV
5 µV
Accuracy
±(% rdg + volts)
0.02% + 15 mV
0.02% + 1.5 mV
0.02% +300 µV
0.02% +150 µV
Current Compliance: Bipolar limits set with a single value between full scale and 10% of selected current range.
Supplemental information is not warranted but provides useful infor­mation
about the Models 4200-SMU, 4210-SMU, and 4200-PA.
Compliance Accuracy:
Voltage compliance equals the voltage source specifications.
Current compliance equals the current source specifications.
Overshoot: <0.1% typical.
Voltage: Full scale step, resistive load, and 10mA range.
Current: 1mA step, R L = 10kΩ, 20V range.
Range Change Transient:
Voltage Ranging: <200mV.
Current Ranging: <200mV.
Accuracy Specifications: Accuracy specifications are multiplied by one of
the following factors, depending upon the ambient temperature and humidity.
% Relative Humidity
Temperature
5–60
60–80
10°–18°C
×3
×3
18°–28°C
×1
×3
28°–40°C
×3
×5
Maximum GUARD Offset Voltage: 3mV from FORCE.
GUARD Output Impedance: 100kΩ.
Maximum GUARD Capacitance: 1500pF.
Maximum shield Capacitance: 3300pF.
4200-SMU and 4210-SMU Shunt resistance (FORCE to COMMON):
>1012Ω (100nA–1µA ranges).
4200-PA Shunt resistance (FORCE to COMMON): >1016Ω (1pA and
10pA ranges), >1013Ω (100pA–100nA ranges).
Output Terminal Connection: Dual triaxial connect­ors for 4200-PA,
dual mini-triaxial connectors for 4200-SMU and 4210-SMU.
Noise Characteristics (typical):
Voltage Source (rms): 0.01% of output range.
Current Source (rms): 0.1% of output range.
Voltage Measure (p-p): 0.02% of measurement range.
Current Measure (p-p): 0.2% of measurement range.
Maximum Slew Rate: 0.2V/µs.
Remote Sense: <10Ω in series with FORCE terminal not to exceed a 5V difference between FORCE and SENSE terminals. ±30V maximum between
COMMON and SENSE LO.
Maximum load Capacitance: 10nF.
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Semiconductor Characterization System
Technical Data
4200-SCS
Additional DC SMU Specifications
Max. Output Power: 22 watts for 4210-SMU and 2.2 watts for 4200-SMU
(both are four-quadrant source/sink operation).
DC Floating Voltage: COMMON can be floated ±32 volts from chassis
ground.
Model 4200-SCS Technical Data
Voltage Monitor (SMU in VMU mode):
Measure
VoltageMeasure
Accuracy
RangeResolution
±(%rdg + volts)
200 V
200 µV
0.015% + 3 mV
20 V
20 µV
0.01% + 1 mV
2 V
2 µV
0.012% + 110 µV
200mV
1 µV
0.012% + 80 µV
Input Impedance: >1013Ω.
Input Leakage Current: <30pA.
Measurement Noise: 0.02% of measure­ment range (rms).
General
Temperature Range
Operating: +10° to +40°C.
Storage:
–15° to +60°C.
Humidity Range
Operating: 5% to 80% RH, non-condensing.
Storage:
5% to 90% RH, non-condensing.
Altitude
Operating: 0 to 2000m.
Storage:
0 to 4600m.
Power Requirements: 100V to 240V, 50 to 60Hz.
Maximum VA: 1000VA.
Regulatory Compliance:
Safety: Low Voltage Directive 73/23/EEC.
EMC: Directive 89/336/EEC.
Dimensions: 43.6cm wide × 22.3cm high × 56.5cm deep (175⁄32 in × 83⁄4
in × 221⁄4 in).
Weight (approx.): 29.7kg (65.5 lbs) for typical configuration of four SMUs.
I/O Ports: USB, SVGA, Printer, RS-232, GPIB, Ethernet, Mouse, Keyboard.
NOTES
Differential Voltage Monitor:
Differential Voltage Monitor is available by measuring with two SMUs in VMU
mode or by using the low sense terminal provided with each SMU.
1. All ranges extend to 105% of full scale.
2. Specifications apply on these ranges with or without a 4200-PA.
3. Specified resolution is limited by fundamental noise limits. Measured resolution is
6½ digits on each range. Source resolution is 4½ digits on each range.
4. Interlock must be engaged to use the 200V range.
Ground Unit
Voltage error when using the ground unit is included in the 4200-SMU, 4210-SMU,
and 4200-PA specifications. No additional errors are intro­duced when using the
ground unit.
Output Terminal Connection: Dual triaxial, 5-way binding post.
Maximum Current: 2.6A using dual triaxial connection; 8.5A using
5-way binding posts.
Load Capacitance: No limit.
Cable Resistance: FORCE ≤1Ω, SENSE ≤10Ω.
RAMP RATE QUASISTATIC C-V TYPICAL
PERFORMANCE CHARACTERISTICS
Semiconductor
MEASUREMENT PARAMETERS: Cp, DCV, timestamp.
RANGING: 1pF to 1nF.
Measurement Terminals: Triaxial guarded.
Ramp Rate: 0.1V/s to 1V/s.
DC Voltage: ±200V.
TYPICAL CP ACCURACY: 5% at 1v/s ramp rate.
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Technical Data
4200-SCS
Model 4210-CVU Specifications
Measurement Accuracy
Measurement parameters: Cp-G, Cp-D, Cs-Rs, Cs-D, R-jX,
Z-theta.
Ranging: Auto and fixed.
Measurement terminal configuration:
Four-terminal pair.
Connector type: Four SMA (female) connectors.
Cable length: 0m, 1.5m, 3m, or custom selectable.
Integration time: FAST, NORMAL, QUIET, and CUSTOM.
Example of C/G Measurement Accuracy
Test Signal
Frequency range: 1kHz to 10MHz.
Minimum resolution: 1kHz, 10kHz, 100kHz, 1MHz
depending on frequency range.
Source Frequency Accuracy: ±0.1%.
Signal output level Range: 10mV rms to 100mV rms.
Resolution: 1mV rms.
Accuracy: ±(10.0% + 1mV rms) unloaded (at rear panel).
Output impedance: 100W, typical.
DC Bias Function
DC voltage bias:
Range: ±30V (±60V differential).
Resolution: 1.0mV.
Accuracy: ±(0.5% + 5.0mV) unloaded.
Maximum DC Current: 10mA.
Measured
C
Frequency Capacitance Accuracy 1
1 pF
± 0.92%
10 pF
± 0.32%
10MHz 3
100 pF
± 0.29%
1 nF
± 0.35%
1 pF
± 0.38%
10 pF
± 0.16%
1MHz
100 pF
± 0.09%
1 nF
± 0.09%
10 pF
± 0.17%
100 pF
± 0.18%
100 kHz
1 nF
± 0.08%
10 nF
± 0.08%
100 pF
± 0.26%
1 nF
± 0.15%
10 kHz
10 nF
± 0.08%
100 nF
± 0.08%
1 nF
± 0.69%
10 nF
± 0.25%
1 kHz
100 nF
± 0.10%
1 µF
± 0.15%
Supplemental Cable Specification
G
Accuracy 1, 2
± 260 ns
± 990 ns
± 9 µs
± 99 µs
± 15 ns
± 65 ns
± 590 ns
± 4 µs
± 15 ns
± 59 ns
± 450 ns
± 3 µs
± 15 ns
± 66 ns
± 450 ns
± 3 µs
± 40 ns
± 120 ns
± 500 ns
± 10 µs
Notes
Sweep Characteristics
Available sweep parameters: DC bias voltage, frequency,
AC voltage.
Sweep type: Linear, custom.
Sweep direction: Up sweep, down sweep.
Number of measurement points: 4096.
1. The capacitance and conductance measurement accuracy is specified
under the following conditions: DX < 0.1.
2. Conductance accuracy is specified as the maximum conductance
­measured on the referenced capacitor.
3. These specs are typical. Typical and supplemental specs are
non-­warranted, apply at 23°C, and are provided solely as useful
information.
Integration time: QUIET.
Test signal level: 30mV rms.
At the rear panel of the 4210-CVU.
4210-CVU Typical C Accuracy with 1.5m Cables
(supplemental)
Measured
Capac­itance
1 pF
10 pF
100 pF
1 nF
10 nF
100 nF
1 µF
1 kHz
10 kHz 100 kHz 1 MHz 10 MHz
N/A
N/A
N/A
±0.72%
±0.28%
±0.12%
±0.17%
±8.38%
±0.94%
±0.29%
±0.17%
±0.12%
±0.13%
±0.21%
±1.95%
±0.21%
±0.20%
±0.12%
±0.13%
±0.22%
N/A
±0.43%
±0.18%
±0.15%
±0.16%
±0.25%
±1.14%
N/A
N/A
±1%
±1%
±2%
±2%
N/A
N/A
4210-CVU Typical C Accuracy with 3m Cables
(supplemental)
Measured
Capac­itance
1 pF
10 pF
100 pF
1 nF
10 nF
100 nF
1 µF
1 kHz
10 kHz 100 kHz 1 MHz 10 MHz
N/A
N/A
N/A
±0.72%
±0.28%
±0.12%
±0.17%
±8.5  %
±0.96%
±0.29%
±0.17%
±0.12%
±0.13%
±0.21%
±2.05%
±0.23%
±0.20%
±0.12%
±0.13%
±0.22%
N/A
±0.57%
±0.21%
±0.17%
±0.18%
±0.27%
±1.16%
N/A
N/A
±1%
±1%
±2%
±2%
N/A
N/A
CVU Confidence Check
Model 4200-SCS Technical Data
Measurement Functions
The 4210-CVU includes a diagnostic tool called Confidence
Check. It allows users to check the integrity of open and short
connections and connections to a device-under test (DUT).
When the Model 4210-CVU is connected to a DUT, Confidence
Check displays the measured readings in real time. This also
allows Confidence Check to be used as a C-V meter to perform
quick and accurate measurements.
C-V POWER PACKAGE TYPICAL
PERFORMANCE CHARACTERISTICS
Example of Included Libraries
• C-V, C-t, and C-f measurements and analysis of:
– High and low k structures
– MOSFETs
– BJTs
– Diodes
– III-V compound devices
– Carbon nanotube (CNT) devices
• Doping profiles, TOX, and carrier lifetime tests
• Junction, pin-to-pin, and interconnect capacitance measurements
• Solar cells including Si, organic, thin film, CIGS, etc.
The C-V instrument integrates directly into the Model 4200-SCS
chassis. It can be purchased as an upgrade to existing systems or
as an option for new systems.
Semiconductor
MEASUREMENT PARAMETERS: Cp-Gp, DCV, timestamp.
RANGING: 1pF to 1nF.
MEASUREMENT TERMINALS: 2-wire SMA, with BNC adapters.
TEST SIGNAL: 100kHz to 10MHz, 10mV to 100mV.
DC VOLTAGE SOURCE: ±200V with 5mV resolution.
DC CURRENT: 100mA or 300mA maximum.
TYPICAL CP ACCURACY @ 1MHz: 1.0%.
DC CURRENT SENSITIVITY: 10nA/V.
SMU BIAS TERMINALS SUPPORTED: 4.
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Technical Data
4200-SCS
Model 4200-SCS Technical Data
4205-PG2 Dual-Channel Pulse Generator Specifications 1, 2
The 4205-PG2 includes three operational modes for flexible, reconfigurable pulsing:
• Standard pulse
– Pulse between any two voltage levels
– Period range: 20ns to 1s
• Arbitrary (ARB) waveform
– Output ARB waveforms built from standard wave libraries or sampled data
– Depth: 256K points/channel
– Timebase: 20ns/point up to 1sec/point, fixed timebase for entire waveform
– Waveform Libraries: sine, ramp, gaussian, white noise
– Input in .csv format
• Segment ARB™ waveform
– With a single pulse channel, build multi-level and multi-pulse waveforms with user-defined
line segments
– Depth: 1024 segments/channel
– Parameters for each segment: Segment #, start voltage, stop voltage, segment time,
trigger out, High Endurance Output relay (HEOR/SSR) on/off
– Time per segment: 20ns to 1s, 10ns increments (each segment can have a different duration)
PULSE/LEVEL3
VOUT
50 W into 50 W
VOUT
50 W into 1 MW
Accuracy
Amplitude/Level 50 W into 50 W
Resolution
50 W into 1 MW
Output Connectors
Source Impedance
Short Circuit Current
Current into 50W Load
(at full scale)
Baseline Noise
Overshoot/Pre-shoot/Ringing
Output Limit
High Speed
–5V to +5V
–10V to +10V
±(3% + 50 mV)
1 mV
2 mV
SMA
50W Nominal
1%
±200 mA
High Voltage
–20V to +20V
–40V to +40V
±(3% + 100 mV)
5 mV
10 mV
SMA
50W Nominal
1%
±800 mA
±100 mA typical
±400 mA typical
TIMING
Frequency Range
Timing Resolution
RMS Jitter (period, width)
Period Range
Accuracy
Pulse Width Range
Accuracy
Programmable
Transition Time (0–100%)
Accuracy
Transition Slew Rate4
Linearity
Typical Minimum
Transition Time 10–90%
Solid state relay
High Speed
1 Hz to 50 MHz
10 ns
0.01 % + 200 ps typical
20 ns to 1 s
±1%
10ns to (period – 10ns)
±(3% + 200 ps)
High Voltage
1 Hz to 2 MHz
10 ns
0.01 % + 200 ps typical
500 ns to 1 s
±1%
250ns to (period – 100ns)
±(3% + 5ns)
10 ns–33 ms
100 ns–33 ms
±1% for transition time
±1% for transition time
<100 ns
<1 µs
3% for transition time
3% for transition time
<100 ns
<500 ns
<15 ns
<150 ns
Pulse Period and width are variable in 10 ns steps without
any output glitches or dropouts
Open or
close time
100 µs
100 µs
TRIGGER
Trigger Output Impedance: 50W.
Trigger Output Level: TTL.
Trigger In Impedance: 10kW.
Trigger In Level: TTL.
Trigger In Transition Timing, maximum: <100ns.
Trigger In to Pulse out delay: 560ns.
Trigger Synchronization/Jitter5: <8ns.
Notes
±(0.1% + 5 mV) RMS typical ±(0.1% + 5 mV) RMS typical
±5% of amplitude ±20mV
±5% of amplitude ±80mV
Programmable limit to protect the DUT
1. Unless stated otherwise, all specifications assume a 50W termination.
2. Maximum number of PG2 cards in the 4200 chassis is 4.
3. Level specifications are valid after 50ns typical settling time (after slewing) for the high speed mode and after
500ns typical settling time (after slewing) for the high voltage mode into a 50W load
4. Specifications apply to a 10–90% transition, typical. Minimum slew rate for high speed range = 724mV/ms.
For high voltage range = 2.71V/ms, which applies to both the standard pulse and Segment ARB™ mode
5. For multiple 4205-PG2 cards, when using appropriate cabling and the “trigger per waveform” trigger mode
Semiconductor
All specifications apply at 23° ±5°C, within one year of calibration, RH between 5% and 60%, after 30 minutes
of warmup.
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Semiconductor Characterization System
Technical Data
4200-SCS
4200-SCP2 1.25GS Dual-Channel Oscilloscope Card and
4200-SCP2HR 200MS Dual-Channel Oscilloscope Card Specifications1
ANALOG-TO-DIGITAL CONVERTER
4200-SCP2
2
No. of Channels
DC to 750 MHz
Bandwidth (50W)
DC to 350 MHz
Bandwidth (1MW)
0.05, 0.1, 0.25, 0.5, 1, 2, 5,
Full Scale Input Range (50 W)
10 (Vp-p)
0.1, 0.2, 0.5, 1, 2.5, 5, 10, 20,
Full Scale Input Range (1 MW)
50, 100 (Vp-p)
<±1% of full scale
DC Gain Accuracy
Impedance
1 MW||12 pF or 50 W
±1%
Impedance Accuracy
DC or AC
Coupling
±(full scale range/2)
Offset Adjust
±(1% offset + 1% full scale)
Offset Accuracy
BNC
Input Connectors
±5V DC
Absolute Maximum Input (50 W)
±210V DC
Absolute Maximum Input (1 MW)
4200-SCP2HR
2
DC to 250 MHz, typical
DC to 125 MHz, typical
0.05, 0.1, 0.25, 0.5, 1, 2, 5,
10 (Vp-p)
0.25, 0.5, 1.25, 2.5, 5, 10, 25,
50 (Vp-p)
< ±0.25% of full scale
1 MW||12 pF or 50 W
±1%
DC or AC
±(full scale range/2)
±1%
BNC
±5V DC
±210V DC
Resolution
Sample Rate
Memory Depth
Acquisition Time Range
Acquisition Modes
4200-SCP2
4200-SCP2HR
8 bit
16 bit
2.5 kS/s to 1.25 GS/s in
10 kS/s to 200 MS/s in
1, 2.5, 5 steps
1, 2.5, 4, 5 steps
2.5 GS/s (1 channel interleaved) 400 MS/s (1 channel interleaved)
1 MS/channel
1 MS/channel
2 MS on 1 channel, interleaved
2 MS on 1 channel, interleaved
50 ns to 419 seconds
250 ns to 3,355 seconds
Normal, Average, Envelope, and Normal, Average, Envelope, and
Equivalent-time
Equivalent-time
TRIGGER
Trigger Source
Post-Trigger Delay
Pre-Trigger Delay
Trigger Hold Off Range
Trigger Modes
Edge Trigger Mode
Pulse Width Range
External Trigger Input
Connector
4200-SCP2
Channels 1 or 2, External,
Pattern, Software
0 to 655 seconds
0 to waveform time
0 to 655 seconds
Edge or Pulse Width
Rising or Falling Edge
20ns to 655 seconds,
10ns resolution
TTL Compatible,
10 kW input impedance
SMB
4200-SCP2HR
Channels 1 or 2, External,
Pattern, Software
0 to 655 seconds
0 to waveform time
0 to 655 seconds
Edge or Pulse Width
Rising or Falling Edge
20ns to 655 seconds,
10ns resolution
TTL Compatible,
10 kW input impedance
SMB
Model 4200-SCS Technical Data
ANALOG INPUT1
OPTIONAL SCOPE PROBE: 4200-SCP2-ACC
Bandwidth: 70MHz (4200-SCP2); 15MHz (4200-SCP2HR).
Attenuation: 1×.
Max DC: 300V DC rated.
Loading: 100pF and 1MW.
Length: 1m.
Connector: BNC.
NOTES
Semiconductor
1. Inputs are referenced to 4200 chassis ground
All specifications apply at 23°±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes
of warmup.
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Semiconductor Characterization System
Technical Data
Model 4200-SCS Technical Data
4200-SCS
4200-PIV-A Pulse I-V Option
4200 PIV-A for CMOS Typical Specifications1
The 4200-PIV-A package combines the 4205-PG2 dual-channel pulse
generator with the 4200-SCP2 oscilloscope, a specialized interconnect, and
patented software to provide a turnkey pulse I-V solution. The software
controls sourcing from the pulse generator and data acquisition from the
digital oscilloscope to automate a variety of pulse I-V tests. The specialized
inter­connect solves most of the problems typically encountered in high
speed pulse testing:
Channels: 2.
TYPICAL PULSE PERFORMANCE (with 4205 Remote Bias Tee4):
Measurement Accuracy: <4% of signal ±1mV.
Maximum Current Measure: 100mA.
Resolution: 100nA 2.
Offset: <500nA.
Sample Rate: 1GS/s.
Duty Cycle: <0.1%.
DC Offset: ±200V.
Minimum Transition Time (10–90%): <15ns.
Pulse Source Voltage Range: 0 to ±5V into gate.
Pulse Width: 40ns to 150ns.
SMU Typical DC Performance (with 4205 Remote Bias Tee):
Leakage: 1–10nA/V3.
Noise: 1–10nA RMS.
Maximum Voltage: 210V (>40V requires safety interlock and related precautions).
Maximum Current: 0.5A.
4200 REMOTE BIAS TEE TYPICAL PERFORMANCE:
Band Pass: 3.5kHz–300MHz (3dB).
Power Divider Max Power Input: 0.125W DC.
• Combining pulse and DC sources to a single DUT pin permits both DC
and pulse characterization without the need for re-cabling or switching
• Impedance matching, which minimizes reflection and maintains
pulse fidelity
• Easy setup as a result of straightforward cabling and connection
to the DUT
Pulse I-V for leading-edge CMOS devices:
• Pulse voltage on gate, DC bias on drain
• Measure drain current during gate pulse
• ±5V pulses for the gate (40ns to 150ns), ±200V DC for the drain
NOTES
1.
2.
3.
4.
Included tests:
• V DS–ID: Both pulse and DC.
• VGS–ID: Both pulse and DC.
• Single-pulse scope view: Useful for setup validation, pulse width
­optimization, and prototyping of novel pulse tests.
Unless stated otherwise, all specifications assume a 50 W termination.
When using Adaptive filtering.
Leakage measured after a 5 second settling time.
All typical specs apply to the AC+DC output connector of the 4205 Remote Bias Tee and after system
compensation.
All specifications apply at 23°±5°C, within one year of calibration, RH between 5% and 60%, after 30 minutes
of warmup.
Ch. 1
SCP2
Trig In
Ch. 2
AC Input
DC Sense
AC + DC
DC Force
RBT2
Trig Out
Trig In
PG2
Ch. 1
Ch. 2
SMU2
DUT
DC Sense
S
1
Divider
2
Semiconductor
SMU1
S
AC Input
DC Sense
AC + DC
DC Force
RBT1
DC Sense
DC Force
Interconnection for 4200-PIV-A for leading edge CMOS, high k , and
isothermal testing. PIV-A pulses the voltage on the gate and provides
a DC bias on the drain.
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Semiconductor Characterization System
Technical Data
4200-PIV-Q Pulse I-V with Q point and
Dual Channel Pulsing
4200-PIV-Q Typical Specifications 1
The 4200-PIV-Q package is designed for quiescent point pulsing for
scaled-down RF transistors, such as HEMT and FET devices in III-V or
LDMOS technologies. This package supports multiple 4205-PG2s and the
4200-SCP2HR oscilloscope and includes capabilities such as dual-channel
pulsing (i.e., for pulsing on both the gate and the drain simultaneously),
higher power ­pulsing than the 4200-PIV-A package, and pulsing from a
non-zero quiescent point. Pulse widths can be adjusted from 500ns to
near-DC, and the same setup can also be used for performing true DC
tests without re-cabling the system. The PIV-Q package is useful for a
variety of large signal tests on high frequency transistors, as well as for
investigation of dispersion phenomena and device performance at speed. It
also offers a good approach for avoiding the isothermal problems inherent
in DC ­testing.
Dual-channel pulse I-V testing for III-V and LDMOS:
• Pulse voltage on gate and drain.
• Measure: gate current and drain voltage and current.
• ±20V pulses for the gate, ±38V pulses for the drain. 6
• Pulse Widths: 500ns to 999ms.
Channels: 2.
TYPICAL PULSE PERFORMANCE: 4
Measurement Accuracy: Gate Current: <50μA offset, 10μA resolution.2
Drain Current: <100μA offset, 10μA resolution.2
Maximum Current Measure:Gate: 100mA into 50W.6
Drain: 760mA into 50W, 1.33A into 5W.6
Sample Rate: 200MS/s.
Minimum Transition Time (10–90%): 150ns.
Gate Pulse Source: –20V to +20V.
Drain Voltage Range: –38V to +38V (into 50W), ±75V (into 1kW).6
Pulse Width: 500ns to 999ms.
Pulse Period: 510ns to 1s.
Duty Cycle: 0.001% to 99.9%.
SMU Typical DC Performance:
Typical DC Leakage, Gate: <20nA offset for <35V.
Typical DC Leakage, Drain: <10nA/V 3 for <35V.
Typical DC Noise, Gate: < 20nA RMS.
Gate Offset: <20nA.
Typical DC Noise, Drain: <300pA RMS.
Maximum Voltage: 210V (>40V requires safety interlock and related precautions).
Maximum Current: 1A.5
NOTES
Included tests:
• V DS–ID: Both pulse and DC.
• VGS–ID: Both pulse and DC.
1. Unless stated otherwise, all specifications assume a 50W termination.
2. Offset and resolution specified when using adaptive filtering after system cable compensation and
offset correction.
3. Leakage measured after a 5 second settling time.
4. All typical specs apply to the AC+DC output cable (from the SMU Force, connected to the SMA tee
attached to Triax to SMA adapter) after system compensation.
5. For the high power 4210-SMU. For the medium power 4200-SMU, the maximum current is 100mA.
6. Drain Pulse Source is a voltage pulser with 55W output impedance. To calculate the approximate
maximum Drain current for any DUT resistance:
Idmax = 80V/55 + R DS.
To calculate approximate maximum Drain voltage, input the Imax calculated above:
Vdmax = Idmax × R DS
For more information, refer to the tables titled “Maximum Drain Source” and “Maximum Gate Source.”
Also see the figure titled “Maximum Pulse Drain I and V vs. DUT Drain-Source Resistance.”
• Single-pulse scope view: Useful for setup validation, pulse width
­optimization, prototyping of novel pulse tests.
Model 4200-SCS Technical Data
4200-SCS
All specifications apply at 23° ±°5C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes
of warmup.
DC Sense
Force
DC
SMU1 DC Force
SMU2
SCP2
PG2
PCU
Ch. 1
Trig In
Ch. 2
Trig Out
Trig In
Ch. 1
Ch. 2
Trig Out
Sense
Ch. 1
D
G
S
DUT
Interconnection for 4200-PIV-Q for III-V and LDMOS scaled-down
RF transistors. PIV-Q pulses voltage on both the gate and drain from
non-zero bias (quiescent) conditions.
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SMU1
DC Sense
Force
DC
DC Sense
Force
DC
DC Force
DC Sense
Force
DC
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Semiconductor Characterization System
Technical Data
4200-SCS
4200-PIV-Q Typical Specifications (continued)
Maximum V D* (V)
Maximum ID* (A)
6.65
1.33
12.3
1.23
25
1.0
38
0.76
50
0.54
51.6
0.51
65
0.26
75.8
0.075
*Approximate maximum, does not account for interconnect losses.
Stabilization Kit
The stabilization kit for the 4200-PIV-Q, the 4200-Q-STBL-KIT, minimizes the oscillations caused
be III-V RF transistors and LDMOS RF devices. The stabilization kit includes 10 resistors and 2
blanks for customization.
R DS (W)
5
10
25
50
92
100
250
1k
Maximum Gate Source (20V Range ), typical
90
I
80
RGS (W)
5
10
25
50
Stabilization resistor
V
70
1.6
1.4
1.2
60
1.0
50
0.8
40
0.6
30
0.4
20
10
V
0
1
I
10
100
1000
0.2
Max. Drain Current (A)
Maximum VG* (V)
Maximum IG* (A)
3.6
0.769
6.67
0.667
13.3
0.533
20
0.400
*Approximate maximum, does not account for interconnect losses.
Max. Drain Voltage (V)
Model 4200-SCS Technical Data
Maximum Drain Source (40V Range), typical
10 resistors (+ 2 blanks) in the kit
0.0
10000
DUT Drain-Source Resistance (Ω)
Semiconductor
Maximum Pulse Drain I and V vs. Drain-Source Resistance
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4200-FLASH Non-volatile Memory Test Option
4200-FLASH Typical Specifications1
The 4200-FLASH package tests single FLASH memory cells or small
arrays. This package includes all the necessary code and the interconnect
needed to perform a standard set of Flash memory tests for NAND or NOR
technologies, with higher pulse voltages important for MLC technologies.
The tests included generate program and/or erase cycles using the patentpending Segment ARB™ pulse mode as well as controlling the in-line High
Endurance Output Relay. Endurance and Disturb tests are also included.
Channels: 4 channels (optional 8 channels max.).
TYPICAL PULSE PERFORMANCE:
Number of Voltage Levels/Waveform: 25.
Minimum Transition Time: 150ns.
Pulse Source Voltage Range: 0 to ±20V into 50W. 0 to ±40V into high impedance.
Pulse Width: 250ns to 1s.
Trigger Synchronization/Jitter: ±8ns.
Switching Time for DUT Pin Isolation: 100µs.
HEOR Off Capacitance: 250pF.
SMU Typical DC Performance
Typical DC Leakage: <10nA/V2 for <35V.
Typical DC Noise: <300pA RMS.
Maximum Voltage: 200V (>40V requires safety interlock and related precautions).
Maximum Current: 1A.3
Four channels of multi-level pulse:
• ±40V pulsing into high impedance pin (±20V into 50W).
• High Endurance Output Relay provides fast open/close for pin isolation
during erase pulse.
• Pulse Widths: 200ns to 1s.
• Up to 25 pulse levels (100 pulse segments).
Included tests:
• Endurance.
• Program-read.
• Erase-read.
• Disturb.
NOTES
1. Unless stated otherwise, all specifications assume a 50W termination.
2. Leakage measured after a 5 second settling time.
3. For the high power 4210-SMU. For the medium power 4200-SMU, the maximum current is 100mA.
DC Sense
Force
DC
SMU1 DC Force
SMU4
SMU1
SMU3
DC Sense
Force
DC
DC Sense
Force
DC
DC Force
DC Sense
Force
DC
DC Sense
Force
DC
SMU1 DC Force
SMU2
SMU1
Easy setup for program/erase cycles
DC Sense
Force
DC
DC Sense
Force
DC
DC Force
DC Sense
Force
DC
PG2-1
Trig Out
Trig In
Ch. 1
Ch. 2
PG2-2
Trig Out
Trig In
Ch. 1
Ch. 2
Model 4200-SCS Technical Data
Semiconductor Characterization System
Technical Data
4200-SCS
D
G
S
DUT
Interconnect for 4200-FLASH for single DUT, shown with four SMUs
and no external switch matrix. FLASH provides pulsing for program,
erase, and P+E stress waveforms and DC for Vt measurements.
DC Sense
Force
DC
SMU1 DC Force
SMU4
DC Sense
Force
DC
DC Sense
Force
DC
Switch
Matrix
Bit Line
SMU1 DC Force
SMU3
DC Sense
Force
DC
Well
SMU1 DC Force
Typical NOR FLASH gate program/erase cycle
PG2-1
PG2-2
DC Sense
Force
DC
Trig Out
Trig In
Ch. 1
Ch. 2
Trig Out
Trig In
Ch. 1
Ch. 2
Source
DUT
Interconnect for 4200-FLASH for addressable device, shown with four
SMUs and external switch matrix. FLASH provides pulsing for program,
erase, and P+E stress waveforms and DC for Vt measurements.
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SMU2
DC Sense
Force
DC
DC Sense
Force
DC
DC Force
DC Sense
Force
DC
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Semiconductor Characterization System
Technical Data
4200-SCS
KTE Interactive Software Tools
KTE Interactive includes a variety of software tools for operating and maintaining the 4200-SCS:
• Keithley Interactive Test Environment (KITE)—The 4200-SCS device characterization application
• Keithley User Library Tool (KULT)—Allows test engineers to integrate custom algorithms into
KITE using 4200-SCS or external instruments.
Model 4200-SCS Technical Data
• Keithley Configuration Utility (KCON)—Allows test engineers to define the configuration of GPIB
instruments, switch matrices, and analytical probers connected to the 4200-SCS. It also provides
system diagnostics functions.
• Keithley External Control Interface (KXCI)—The 4200-SCS application for controlling the
4200-SCS from an external computer via the GPIB bus or Ethernet.
• KPulse—A graphical user interface (GUI) that is a non-programming alternative to configure and
control the installed Model 4205-PG2 pulse generator cards. It is used for quick tests requiring
minimal interaction with other Model 4200-SCS test resources.
(Note: KPulse is only included with the 4205-PG2, 4200-PIV-A, 4200-PIV-Q, and 4200-FLASH.)
• KScope—A graphical user interface (GUI) that provides a non-programming alternative to control
the system’s scope card (either Model 4200-SCP2HR or Model 4200-SCP2).
(Note: KScope is only included with the 4200-SCP2, 4200-SCP2HR, 4200-PIV-A, and 4200-PIV-Q.)
Microsoft Windows
Windows Operating System
The operating system is a standard distribution of Microsoft Windows. Upgrades are available
for older systems. Contact the Keithley factory for supported versions and service packs.
Data Security and Recovery
Data security and recovery are handled by the included software package, Acronis True Image. This
utility can be used to create exact hard disk images, including all operating systems, applications and
configuration files, software updates, personal settings, and data. If failures occur that block access to
information or affect system operation, or if files are accidentally deleted, the user can easily restore
the system and lost data with the Acronis tool.
Data Storage
Fixed disk
Internal high capacity fixed disk drive stores the operating system, application programs,
and data files.
DVD/CD-RW Drive
Standard DVD/CD read-write drive is provided for data storage and retrieval.
USB Ports
Semiconductor
Four USB 2.0 ports for typical PC USB peripherals.
Connectivity
The 4200-SCS includes two LAN Ethernet ports (10/100/1000) with software drivers installed.
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Semiconductor Characterization System
Technical Data
4200-SCS
The Keithley Interactive Test Environment (KITE)
The Keithley Interactive Test Environment (KITE) is the Model 4200-SCS Windows device
characterization application. It provides advanced test definition, parameter analysis and graphing,
and automation capabilities required for modern semiconductor characterization.
KITE Projects
The project navigator organizes tests into a logical hierarchy presented in a browser style format.
This structure allows users to define projects around wafer testing:
The project level organizes subsites and controls wafer looping execution.
The subsite level organizes devices and controls subsite test sequencing.
The device level organizes test modules, manages test module libraries, and controls device
test sequencing.
The test module level performs tests, analyzes data, and plots results.
Selectable checkboxes allow enabling/disabling individual tests/plans.
Test Modules
Within KITE, two types of test modules are provided to capture the test input parameters, data
analysis, and plot setting for data. “Interactive Test Modules” provide a point-and-click interface for
defining test input parameters and controlling the 4200-SCS SMUs. “User Test Modules” provide a
fill-in-the-blank interface to either factory-provided or user-written C language subroutines. These
subroutines can control internal 4200-SCS instruments and/or external instruments and systems
through the RS-232 or GPIB interface. This dual approach provides an extendable test environment
that gives the users the same capabilities for data analysis, plotting, and output and automation,
whether the instrument used is part of the base system or an external instrument. It also offers users
the flexibility to write complex test algorithms for control of either internal or external instruments.
Model 4200-SCS Technical Data
A project is a collection of related tests, organized in a hierarchy that parallels the physical layout
of the devices on a wafer. KITE operates on projects using an interface called the project navigator.
The project navigator simplifies organizing test files, test execution, and test sequencing.
Definition Tab—Interactive Test Module
The Definition Tab of an ITM provides a point-and-click interface for setting test input parameters
that control the 4200-SCS SMUs and defining parameter extractions. Two modes are available:
Forcing Functions:
Common, Voltage Bias, Current Bias (VMU), Voltage Sweep, Current Sweep, Voltage Step, Current Step, Voltage List Sweep, Current List Sweep, Open1, 2 , C-V Differential Bias
Measuring
Functions: Measure Current or Programmed Current, Measure Voltage or
Programmed Voltage.
C-V Measurement parameters: Cp-G, Cp-D, Cs-Rs, Cs-D, R-jX, Z-theta.
Fast, Normal, Quiet, and Custom Integration Times
Measure voltage, current or both on each sweep point, regardless of
forcing function.
1. Pulse SMU: The system’s SMUs can now be set to provide pulse output for sweep (linear, log, and list) and bias forcing functions.
This involves having the SMU pulse, which is different than the PG2 pulse mode. Pulse “on” and “off” times can be set from 5ms
to 10s. Pulse output goes to the specified pulse level during the pulse “on” time and back to a user-defined base voltage during the
“off” time. If the SMU is also set to measure, the measurement will occur after the “on” time expires and before the transition to
the “off” time level. If it’s not set to measure, the output will simply transition from “on” to “off.”
2. Standby: There’s a new checkbox in the Timing window called “Disable outputs at completion,” which is checked by default. If this
box is unchecked, the SMU outputs will stay at their last values when the test is complete (instead of returning to zero or “idle”
state). These values then change when a new test is started (if that particular SMU is required in the new test), or KITE is exited,
or a UTM calls a “DEVINT.”
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Semiconductor Characterization System
Technical Data
4200-SCS
Sampling Mode
Model 4200-SCS Technical Data
Linear sampling of up to 4096 points. Sampling period is programmable from 1ms to 1000s.
Additional hold delay before first sample of up to 1000s.
Interactive Test Modules (ITM) are built from
three different major functions: Definition,
Sheet, and Graph. The Definition Tab allows
the operator to define a sweep or sampling
mode test using a graphical approach. The
Sheet Tab stores acquired data and provides
an Excel®-like workbook for viewing and
analyzing test results. The Graph Tab provides
a full-featured data plotting tool capable of
producing report-ready graphs. The Status
Tab reports any errors that would interfere
with test execution.
Definition Tab—User Test Module
Semiconductor
The Definition Tab of a UTM presents users a tabular fill-in-the-blank interface for entering input
parameters to call a C language subroutine. UTMs provide the ability to control internal SMUs and
GPIB and RS-232 devices. This screen allows the user to select a user library, a subroutine module,
and then enter the desired input parameters. Test results are returned to the Sheet Tab for viewing
and analysis. Select UTMs have a GUI interface to simplify operation.
The User Test Module (UTM) has virtually identical functionality as the
ITM. However, users enter input parameters in a tabular interface in
the UTM’s Definition Tab.
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GUI to control switch matrix UTMs.
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4200-SCS
Data Analysis
Two methods of parameter extraction are available. The Formulator provides automated line fits
and parameter extraction. A spreadsheet offers standard spreadsheet analysis tools.
Formulator functions
The Formulator performs data transformations for performing parameter analysis and line fits.
The Formulator supports the following functions:
Model 4200-SCS Technical Data
• Mathematical Functions
Addition (+), subtraction (-), division (/), multiplication (*), exponent (^), absolute value (ABS),
value at an index position (AT), Average (AVG), moving average (MAVG), conditional computation
(COND), derivative (DELTA), differential coefficient (DIFF), exponential (EXP), square root
(SQRT), natural logarithm (LN), logarithm (LOG), integral (INTEG), standard deviation (STDEV),
moving summation (SUMMV), arc cosine (ACOS), arc sine (ASIN), arc tangent (ATAN), cosine
(COS), sine (SIN), tangent (TAN)
• Conversion Functions
Radians to degrees (DEG), degrees to radians (RAD)
• Line Fits and Parameter Extraction Functions
Exponential line fit (EXPFIT), coefficient a (EXPFITA), coefficient b (EXPFITB)
Linear Fit (LINFIT), linear slope (LINFITSLP), x intercept (LINFITXINT), y intercept (LINFITYINT)
Logarithmic line fit (LOGFIT), coefficient a (LOGFITA), coefficient b (LOGFITB)
Linear Regression line fit (REGFIT), slope (REGFITSLP), x intercept (REGFITXINT), y intercept
(REGFITYINT)
Tangent line fit (TANFIT), slope (TANFITSLP), x intercept (TANFITXINT), y intercept
(TANFITYINT)
Polynomial line fit including POLY2FIT and POLY2COEFF.
Maximum value (MAX), minimum value (MIN), midpoint (MEDIAN)
• Search Functions
Find Down (FINDD), Find Up (FINDU), Find using linear interpolation (FINDLIN)
Maximum position (MAXPOS), minimum position (MINPOS)
First Position (FIRSTPOS), Last Position (LASTPOS)
Sub Array (SUBARRAY), return a specified number of points (INDEX)
Formulator Constants
The Formulator supports user-supplied constants for use in parameter extractions. These constants
are factory installed:
PI = 3.14159 rad (π)
K = 1.38065 × 10 –23 J/K (Boltmann’s constant)
Q = 1.60218 × 10 –19 C (Charge of electron)
M 0 = 9.10938 × 10 –31 kg (Electron mass)
Semiconductor
EV = 1.60218 × 10 –19 J (Electron voltage)
U0 = 1.25664 × 10 –6 N/A2 (Permeability)
E0 = 8.85419 × 10 –12 F/m (Permittivity of a vacuum)
H = 6.62607 × 10 –34 J-s (Planck’s constant)
C = 2.99792 × 10 +8 m/s (Speed of light)
KT/Q = 0.02568 V (Thermal voltage)
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Semiconductor Characterization System
Technical Data
4200-SCS
Sheet Tab—Data Viewing and Analysis
Model 4200-SCS Technical Data
The Sheet Tab of a test module captures data from a test execution and allows calculations in a
spreadsheet. The Sheet Tab operates like an Excel workbook with the following spreadsheets:
the Data sheet, the Calc sheet, the Settings sheet, and the Append sheets.
Data Sheet
The Data sheet displays test results in real time. It is read-only so that results cannot be ­modified.
Calc Sheet
A spreadsheet that operates much like a standard Microsoft Excel spreadsheet is available for
computation with each test. The spreadsheet tool supports these functions:
Functions in the KITE Calc sheet
ABS
ACOS
ACOSH
ASIN
ASINH
ATAN
ATAN2
ATANH
AVERAGE
COS
COSH
EXP
FIXED
IF
LN
LOG
LOG10
LOOKUP
MATCH
MAX
MIN
NOW
PI
PRODUCT
ROUND
SIGN
SIN
SINH
SQRT
STDEVP
SUM
SUMSQ
TAN
TANH
VARP
Settings Sheet
The Settings sheet stores the test setup so that when the Sheet tab is exported as a workbook,
users can refer to the test configuration.
Append Sheet
Semiconductor
Append sheets store test results when the Append button is clicked. Data in Append sheets can
be automatic­ally plotted on the graph. Test modules support up to 40 Append sheets.
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Example Projects
Graph Tab—Plotting
The Graph Tab is a full-featured plotting tool for ­creating report-ready
graphs. It allows real-time X-Y plotting of acquired and extracted data
with one or two Y axes.
• Linear, Semilog, and Log/Log graphs.
• Real-time auto scaling, end of test auto scaling, or manual scaling.
• Six cursors with X-Y readout.
• Graphical line fitting.
• Plot overlay of multiple test executions.
• Four data variable readouts.
• User-formatted comment box, title, and axis labels.
• Choice of engineering units on axes: V (volts), A (amps), s (seconds),
S (Siemens), F (farads), Hz (Hertz).
• Choice of engineering symbols on axes: m, μ, n, etc.
The 4200-SCS includes the following KITE projects to facilitate rapid
startup and provide examples for common semiconductor lab applications.
Default Project
Default—The default project includes standard tests for MOSFETs,
BIPOLAR transistors, resistors, and diodes. This project helps users get
started quickly.
Memory Projects
These projects test floating gate FLASH and embedded NVM memory.
They test up to four independent, multi-level pulse channels with up to
±40V pulsing on the gate. The waveforms can be predefined or custom.
These projects also offer three types of DUT setups: NAND, NOR, and
switch based.
Flash-NOR, Flash-NAND, Flash-Switch—These projects provide the
ability to send n pulses to the DUT, then perform a V T sweep. The tests
in these projects support four- and eight-terminal testing and allow
investigation into program and erase state dependencies on pulse
parameters using three types of waveforms: program, erase, and fast
program erase. Flash-Switch also includes automatic control of Keithley’s
Model 707A or Model 708A Switch Matrix.
FlashDisturb-NOR, FlashDisturb-NAND, FlashDisturb-Switch—The
Disturb tests pulse stress a device in an array test structure, then perform
a measurement, such as V T, on a device adjacent to the pulsed device.
The goal is to measure the amount of V T shift in adjacent cells, either in
the programmed or erased states, when a nearby device is pulsed with
either program, erase, or program+erase waveforms. FlashDisturb-Switch
also includes automatic control of Keithley’s Model 707A or Model 708A
Switch Matrix.
FlashEndurance-NOR, FlashEndurance-NAND, FlashEnduranceSwitch—These projects pulse stress the DUT with a number of
Program+Erase waveform cycles, then periodically measure the V T. The
purpose of these projects is to determine the lifetime of the DUT, based
on the number of program+erase cycles withstood by the device before a
certain amount of shift, or degradation, in the V T or other measurement.
They also control in-line solid-state relays for the erase waveform cycle.
FlashEndurance-Switch also includes automatic control of Keithley’s
Model 707A or Model 708A Switch Matrix.
• Sheet tab test results can be saved as a Microsoft Excel Workbook
or delimited ASCII text file.
• Plots can be saved as bit map image (.bmp), JPEG (.jpg), or TIFF (.tif)
files.
CMOS Project
CMOS-default—The tests in this project include the most common CMOS
device tests that a typical user might perform on a daily basis.
BJT Project
BJT-default—The tests in this project represent the most common BJT
tests that a typical user might perform on a daily basis.
Display
• Flat Panel: 1024 × 768 resolution.
• External SVGA: 1024 × 768 or 800 × 600 resolution.
Reliability Projects
EM_const_I—Tests electromigration using constant current. It also
controls a hot chuck.
Printers
• A generic printer driver is factory installed using standard Windows
printer support.
HCI_1_DUT—This is a Hot Carrier Injection (HCI) project on one
4-terminal N-MOSFET. No switch matrix is involved in the measurement.
Parameters monitored between two successive stresses include IDoff,
Semiconductor
Output
Files
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Model 4200-SCS Technical Data
4200-SCS
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Semiconductor Characterization System
Technical Data
4200-SCS
Model 4200-SCS Technical Data
IDon, IG, V T, and Gm. Those parameters are measured on both forward
(normal operation condition) and reverse (reverse source and drain bias)
conditions. If only a subset of these parameters is needed, it is possible to
deselect the test(s) that include the unwanted parametric measurements.
It is also possible to add custom tests that will be monitored between
successive stresses.
QPulseIV-Complete—This project includes PIV-Q tests that generate ID
vs. V D and IG vs. V D graphs for a FET as well as calibration routines. This
project is used to run characterization curves on III-V and LDMOS high
power devices using the pulse technique and a non-zero quiescent point.
Solar Cell Project
This project is designed for photovoltaic cells of all types, including
crystalline, amorphous, and thin film. I-V, C-V, and resistivity test
are included.
HCI_4_DUT—This is a Hot Carrier Injection (HCI) project on two
4-­terminal N-MOSFETs and two 4-terminal p-MOSFETs with a switch
matrix. Parameters monitored between two successive stresses include
IDoff, IDon, IG, V T, and Gm. Those parameters are measured on both forward
(normal operation condition) and reverse (reverse source and drain bias)
conditions. If only a subset of these parameters is needed, it is possible to
deselect the test(s) that include the unwanted parametric measurements.
It is also possible to add custom tests that will be monitored between
successive stresses. Also, if less than four devices are tested, it is possible
to deselect the unwanted device plan in the project tree or modify it for
more devices.
Nanotechnology Project
NanoDevices—This project is designed specifically for Nanotechnology
applications and includes the most common tests for nanowires,
nanotubes, molecular and CNT transistors, and biocomponents.
C-V Projects
HCI_PULSE—This Hot Carrier Injection (HCI) project tests one 4-terminal
N-MOSFET using AC stress. It is similar to HCI_1_DUT.
NBTI_1_DUT—This is a Negative Bias Temperature Instability (NBTI)
project on one 4-terminal P-MOSFET. Parameters monitored between two
successive stresses include IDoff, IDon, IG, V T, and Gm. If only a subset of these
parameters is needed, it is possible to deselect the test(s) that include the
unwanted parametric measurements. It is also possible to add custom tests
that will be monitored between successive stresses.
Qbd—This charge-to-breakdown project consists of two QBD tests on gate
dielectrics (V-Ramp and J-Ramp). Those two tests follow JEDEC Standard
35-A. An additional test performs an I-V measurement under normal work
conditions to obtain input parameters for the V-Ramp and J-Ramp tests.
Chargepumping—This project consists of Charge Pumping (CP) tests that
characterize interface and charge-trapping phenomena. There are a variety
of tests, including base sweep, amplitude sweep, rise time linear sweep,
fall time linear sweep, frequency linear sweep, and frequency log sweep.
ChargeTrapping—The Charge Trapping project uses a single pulse
technique to look at device charge trapping and de-trapping behavior
within a single, well-configured gate pulse. During the rise and fall times
of the voltage ramp, the corresponding drain current response is captured,
­allowing appropriate VGS–ID curves to be formed.
Semiconductor
ivpgswitch_340x—The tests in this project demonstrate automated device
testing using a 4200-SCS, a Keithley Model 3402 pulse generator, and a
switch matrix.
ivpgswitch—The tests in this project demonstrate automated device
testing using a 4200-SCS, an HP8110A/81110A pulse generator, and a
switch matrix.
CVU_highV—Performs C-V and C-T sweeps using the Model 4200-CVUPWR C-V Power Package up to 400V.
CVU_InterconnectCap—Measures C-V of small interconnect capacitance
on wafer.
CVU_ivcvswitch—Demonstrates using DC SMUs, 4210-CVU, and
707A/708A (switch matrix) in one project. Switches back and forth
between DC and C-V tests and connections to the DUT.
CVU-MobileIon—Determines mobile charge using the bias-temperature
stress method. Extracts flatband voltage. Includes built-in control of a hot
chuck to test a sample at room temperature, heated, then tested again at
room temperature to determine flatband shift.
CVU_MOScap—Measures C-V on a MOS capacitor. Extracted parameters
include oxide capacitance, oxide thickness, doping density, depletion
depth, Debye length, flatband capacitance, flatband voltage, bulk potential,
threshold voltage, metal-semiconductor work function difference, and
effective oxide charge.
CVU_MOSFET—Makes a C-V sweep on a MOSFET device. Extracted/
calculated parameters include oxide thickness, oxide capacitance, flatband
capacitance, flatband voltage, threshold voltage, and doping concentration
as a function of depletion depth.
CVU_nanowire—Makes a C-V sweep on a two-terminal nanowire device.
PulseIV-Complete—This project provides PIV (pulse IV) tests, including
tests that generate ID vs. V D graphs and ID vs. VG graphs as well as tests that
show the effect of self-heating on devices due to DC voltages. (This is the
primary sample project included in the 4200-PIV-A package.)
CVU_PNjunction—Measures the capacitance of a p-n junction or Schottky
diode as a function of the DC bias voltage across the device.
CVU_PVcell—Measures both forward and reverse biased DC
characteristics of an illuminated solar cell and extracts parameters such as
max power, max current, max voltage, short-circuit current, open-circuit
voltage, and efficiency. Also performs characteristic C-V and C-f sweeps.
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CVU_Capacitor—Performs both a C-V sweep and a C-f sweep on a MetalInsulator-Metal (MIM) capacitor and calculates standard deviation.
CVU_Lifetime—Determines generation velocity and lifetime testing
(Zerbst plot) of MOS capacitors.
Pulse Projects
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CVU_BJT—Measures capacitance (at 0V bias) between terminals, including
Cbe, Cbc, and Cec.
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Automation
default—Standard C-V sweeps for generic MOSFETs, diodes, and
­capacitors.
Test Sequencing
ivcvswitch—The tests in this project demonstrate the 4200-SCS’s integra­
ted I-V, C-V, switching, and probing capabilities.
The Keithley Interactive Test Environment (KITE) provides “point and
click” test sequencing on a device, a group of devices (subsite, module,
or test element group), or a user-programmable number of probe sites
on a wafer.
lifetime—The lifetime project performs high frequency C-t measurements
using the Keithley System 82 on MOS capacitors. The minority carrier
recombination lifetime and surface velocity are extracted using
a Zerbst Plot.
Prober Control
Keithley provides integrated prober control for supported analytical
probers when test sequencing is executed on a user-programmable number
of probe sites on a wafer. Contact the factory for a list of supported
analytical probers. A “manual” prober mode prompts the operator to
perform prober operations during the test sequence.
QSCV—Performs Quasistatic C-V using the 4200’s SMUs and PAs using the
Ramp Rate method.
SIMCV—This project provides routines for simultaneous C-V measurement
using the Keithley System 82. Typical MOS device parameters, such as
doping profile, flat band voltage, threshold voltage, interface trap density,
and band bending are extracted.
Supported Probers
Manual Prober
STVS—This project uses the Keithley System 82 to perform an STVS
(Simultaneous Triangular Voltage Sweep) measurement at high
temperature. Mobile ion density is extracted.
Use the manual prober driver to test without utilizing automatic prober
functionality. Manual prober replaces all computer control of the prober
with that of the operator. At each prober command, a dialog box will
appear, instructing the operator what operation is required.
Miscellaneous Projects
Fake Prober
FourPtProbe—This project enables users to make four-point collinear
probe measurements on semiconductor materials.
The Fake prober is useful when prober actions are not desired, such
as when debugging, without having to remove prober commands from
a sequence.
ivswitch—The ivswitch project integrates control of a Keithley Model 707A
or Model 708A external switch matrix with device testing.
Model 4200-SCS Technical Data
4200-SCS
Supported Semi-automatic (Analytical) Probers
probesites—The probesites project illustrates how KITE controls semiautomatic probe stations for automated probing of one subsite per site
on a single wafer.
Cascade Microtech Summit™ 12K Series, verified with Nucleus UI
Karl Suss Model PA-200, verified with Wafermap for ProberBench NT, ­NIGPIB Driver for ProberBench NT, PBRS232 Interface for ProberBench NT,
Navigator for ProberBench NT, Remote Communicator for ProberBench NT
probesubsites—The probesubsites project illustrates how KITE controls
semi-automatic probe stations when testing multiple subsites per site on
a single wafer.
MicroManipulator 8860 Prober, verified with pcBridge, pcLaunch, pcIndie,
pcWfr, pcNav, pcRouter
vdp_resistivity—This project enables users to make Van der Pauw
measurements on semiconductor materials.
Signatone CM500 driver also works with other Signatone probers with
interlock controller such as the WL250 and S460SE
LowCurrent—This project demonstrates sub-10fA performance on
four SMUs.
Demonstration Projects
Demo-Default—The tests in this project demonstrate the most common
DC tests on an FET. Also, new features that were recently introduced are
demonstrated, including pulse SMU, dual sweep, and selecting Engineering
labels for the axes.
Semiconductor
Demo-PulseIV—This project demonstrates PIV (pulse I-V) tests, including
tests that generate ID vs. V D graphs and ID vs. VG graphs as well as tests
that show the effect of self heating on devices due to DC voltages. It also
provides a test that demonstrates the oscilloscope.
Demo-QPulseIV—This project demonstrates quiescent (Q) point tests
utilizing the PIV hardware.
Demo-ALL—This project collects more than 400 different test libraries in
one convenient location.
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Semiconductor Characterization System
Technical Data
4200-SCS
Model 4200-SCS Technical Data
Keithley User Library Tool (KULT)
The Keithley User Library Tool supports creating and integrating
C-language subroutine libraries with the test environment. User library
modules are accessed in KITE through User Test Modules. Factory supplied
libraries provide up and running capability for supported instruments.
Users can edit and compile subroutines, then integrate libraries of
subroutines with KITE, allowing the 4200-SCS to control an entire test
rack from a single user interface. KULT is derived from the Keithley S600
and S400 Series Parametric Test Systems. This simplifies migration of test
libraries between the 4200-SCS and Keithley parametric test­systems.
Standard User Libraries
The ki595ulib user library performs Q/t sweeps and C-V sweeps using
the Keithley Model 595 Quasi­static C-V Meter.
kipulseulib
The kipulseulib UTMs control the Model 4205-PG2 pulse card.
kiscopeulib
The kiscopeulib UTMs control either the Model 4200-SCP2HR or
4200-SCP2 oscilloscope.
The matrixulib user library connects instrument terminals to output
pins using a Keithley 707A or 708A switch system when configured
as a general-purpose (Model 4200-GP-RS-XX), low current (Model
4200-LC-LS-XX) or ultra-low current matrix (Model 4200-UL-RS-XX
or Model 4200-UL-LS-XX).
chargepumping
This library can be used to study charge trapping and new charge
creation on a high κ–Si interface and within high κ film.
hotchuck-temptronics-3010b
This user library controls the temperature of Temptronics 3010b
hotchucks. This library sets the target temperature and waits until
the target is reached before exiting.
parlib
The parlib user library is used for extracting device parameters on
bipolar and MOSFET transistors. Extracted parameters include Beta,
resistance, threshold voltage, and V DS–ID sweeps and VGS–ID sweeps for
MOSFETs.
prbgen
The prbgen user library provides test modules to initialize the prober
driver, move to the next site or subsite in the prober’s wafer map,
make or break contact between the probes and the wafer, and obtain
the X position and Y position of the prober. Contact the factory for
supported probers.
The hotchuck_triotek user library controls the temperature of TrioTek
hot chucks. This library sets the target temperature and waits until the
target is reached before exiting.
hp4284ulib
winulib
The hp4284ulib user library performs capacitance measurements and
C-V sweeps using the Agilent 4284A or 4980 LCR meter.
hp4294ulib
The hp4294ulib user library performs capacitance measurements, C-V
sweeps, and frequency sweeps using the Agilent 4294 LCR meter. This
library also includes calibration routines to perform phase, open, short,
and load calibrations.
hp8110ulib
The hp8110ulib user library performs initialization, setup, and
triggering for the Agilent HP8110A (or 81110A) pulse generator.
The winulib user library provides user interface routines for operator
inputs and prompts, such as the abort, retry, and ignore decision
prompts.
wlrlib
The wlrlib user library includes routines for performing linear
regression and charge-to-breakdown tests (QBD) on gate dielectrics.
Included modules are qbd_rmpv (V-Ramp method) and qbd_rmpj
(J-Ramp method).
C language
Microsoft Visual C++ Standard Edition provides the compiler for the
Keithley User Library Tool. Users can develop test subroutine libraries
using the full capabilities of C-language programming.
ki42xxulib
The ki42xxulib user library provides an example subroutine for
performing a MOSFET ON resistance (RON) test routine using the
4200-SCS LPTLIB interface.
LPTLIB Control
ki82ulib
Semiconductor
ki595ulib
matrixulib
The 4200-SCS includes the following useful subroutine libraries, which
provide “out of the box” integration and control of Keithley switch matrix
systems and other common device characterization equipment. Users
access these libraries with the UTM definition tab described on page 16.
hotchuck_triotek
The LPTLIB provides an application programming interface for developing
C-language test routines that control integrated test hardware and
supported external instruments and switches. This simple connect/
source/measure approach eliminates the need for low-level programming
and allows the user to focus on creating new test routines quickly. The
4200-SCS LPTLIB is derived from the Keithley S600 series and S400 series
parametric test systems to simplify migration of test routines between the
4200-SCS and Keithley parametric test systems.
The ki82ulib user library performs simultaneous C-V, C-t, and Q/t
measurements and cable compensation for the Keithley System 82
Simultaneous C-V System.
ki340xulib
For use with Keithley Series 3400 pulse/pattern generators.
ki590ulib
The ki590ulib user library performs conductance measurements and
100kHz or 1MHz capacitance measurements, C-V sweeps, C-V pulse
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sweeps, C-t sweeps, and cable compensation for the Keithley Model
590 C-V Analyzer.
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Accessories and Optional
Instrumentation
The Keithley Configuration Utility (KCON) simplifies programming and
maintaining a fully integrated test station. KCON provides a single interface
for configuring external instruments, switch matrices, and analytical
probers, and for executing system ­diagnostics.
Accessories Supplied for DC SMUs
4200-MTRX-2 Ultra Low Noise SMU Triax Cable (Two supplied for each
SMU), 2m (6.6 ft). Not included with SMUs configured with
a 4200-PA Remote PreAmp.
4200-TRX-2
Ultra Low Noise PreAmp Triax Cable, 2m (6.6 ft). Two
supplied for Ground Unit. Two supplied in replacement of
4200-MTRX-2 cables for each SMU configured with a 4200-PA.
4200-RPC-2
Remote PreAmp Cable (One supplied for each PreAmp),
2m (6.6 ft).
236-ILC-3
Interlock Cable, 3m (10 ft).
Line Cord
NEMA 5-15P for 100-115VAC or CEE 7/7 (Continental
European) for 240VAC.
User Manual User Manual and Reference Manual supplied on the 4200SCS Complete Reference CD-ROM. (Printed manual available
as an option.)
Accessories Supplied with 4210-CVU
CA-447A
Four SMA Cables, male to male, 100W, 1.5m
CS-1247
Four Female SMA to Male BNC Adapters
CS-701
Two BNC Tee Adapters
TL-24
One SMA Torque Wrench
Accessories Supplied with 4200-CVU-Prober-Kit
CA-446A
Four SMA Cables, 100W, 3m
CS-565
Four Female BNC to Female BNC Adapters
237-TRX-BAR Four Female Triax to Female Triax Adapters
7078-TRX-GND Four Male Triax to Female BNC Adapters (guards removed)
7078-TRX-BNC Four Male Triax to Female BNC Adapters
CS-1247
Four Female SMA to Male BNC Adapters
CS-1391
Two SMA Tee Adapters (female, male, female)
4200-PRB-C Two SSMC to SMA Cables with local ground
Optional Instrumentation
4210-CVU
Integrated C-V Instrument
4200-CVU-PROBER-KIT
Optional accessory kit for connection to popular
analytical probers
4200-CVU-PWR CVU Power Package for ±200V C-V
4200-SMU
Medium Power Source-Measure Unit for 4200-SCS.
100mA to 100fA, 200V to 1µV, 2 Watt
4210-SMU
High Power Source-Measure Unit for 4200-SCS.
1A to 100fA, 200V to 1µV, 20 Watt
4200-PA
Remote PreAmp Option for 4200-SMU and 4210-SMU,
extends SMU to 0.1fA ­resolution
4205-PG2
Dual-Channel Pulse Generator
4200-SCP2
Dual-Channel Integrated Oscilloscope
4200-SCP2HR High Resolution, Dual-Channel Integrated Oscilloscope
4200-SCP2-ACC Optional Scope Probe
Application Packages
4200-PIV-A
Complete Pulse I-V Package for leading edge CMOS
4200-PIV-Q
Pulse I-V Package with Q Point and Dual-Channel Pulsing
4200-FLASH Non-volatile Memory Test package
External Instrument Configuration
KCON allows lab managers to integrate external instruments with the
4200-SCS and a supported switch matrix. After the user configures the
GPIB addresses for supported instruments, Keithley-supplied libraries will
function and test modules can be transferred between 4200-SCS systems
without any user modification. In addition to the standard supported
instruments, the General Purpose Instrument allows users to develop
subroutines and control switches for a generic two-terminal or fourterminal instrument. For the widest possible system extensibility, users
can develop their own test libraries for general purpose instruments.
Switch Matrix Configuration
Users define the connection of 4200-SCS instruments and external
instruments to device under test (DUT) pins through a supported switch
matrix configuration. (See Switch Matrix Support and Configurations).
Once connections are defined, users need only enter the instrument
terminal name and pin number to establish connections. The 4200-SCS
applications and standard user libraries manage the routing of test
signals between instrument terminals and DUT pins. The user doesn’t
need to remember and program row and column closures. Test modules
can transfer between 4200-SCS systems without re-entering connection
information.
4200-SCS Instrument Diagnostics
Users can confirm system integrity of SMUs, C-V measurement unit, pulse
generator, oscilloscopes, and Remote PreAmps by running a system selftest. For more complex problems, the system’s configuration analysis
tool can generate reports that assist Keithley’s Technical Support staff in
diagnosing problems.
Keithley External Control
Interface (KXCI)
KXCI allows you to use an external computer to control the SMUs, C-V
measurement unit, pulse generator cards, and oscilloscope in the Model
4200-SCS remotely over GPIB or Ethernet. When controlled by an external
computer, the Model 4200-SCS functions like any other GPIB ­instrument.
The KXCI GPIB command set is similar to the command set used by
the Agilent Model 4145B. This similarity allows many programs already
developed for the Agilent model to be used by the Model 4200-SCS.
NOTE: Page 28 lists all optional accessories.
1.888.KEITHLEY
Semiconductor
System Configuration and
Diagnostics (KCON)
Model 4200-SCS Technical Data
Semiconductor Characterization System
Technical Data
4200-SCS
(U.S. only)
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23
Semiconductor Characterization System
Technical Data
4200-SCS
Support Contracts
Model 4200-SCS Technical Data
Base System 4200-3Y-EW
1-year factory warranty on the base 4200-SCS (including all SMUs and
PAs) extended to 3 years from date of shipment. Includes calibration (reports
compliant to ANSI Z540-1) and return shipping.
4200-3Y-CAL
3 cals within 3 years of purchase of the base 4200-SCS (including all SMUs
and PAs). Before and after data reports compliant with ANSI/NCSL Z540-1. Does
not cover Scope Cards or Pulse Gen Cards.
PIV, Pulse, Scope, C-V, and Flash options
4200-FLASH-3Y-CAL 3 cals within 3 years of purchase of the 4200-FLASH. Requires purchase of
4200-3Y-CAL
4200-FLASH-3Y-EW 1-year factory warranty on the 4200-FLASH extended to 3 years from date
of shipment. Includes calibration and return shipping. Requires purchase of
4200-3Y-EW.
4200-PIV-A-3Y-CAL 3 cals within 3 years of purchase of the 4200-PIV-A Package. Requires purchase
of 4200-3Y-CAL.
4200-PIV-A-3Y-EW
1-year factory warranty on the 4200-PIV-A Package extended to 3 years from
date of shipment. Includes calibration and return shipping. Requires purchase
of 4200-3Y-EW.
4200-PIV-Q-3Y-CAL 3 cals within 3 years of purchase of the 4200-PIV-Q. Requires purchase of
4200-3Y-CAL
4200-PIV-Q-3Y-EW 1-year factory warranty on the 4200-PIV-Q extended to 3 years from date of
shipment. Includes calibration and return shipping. Requires purchase of
4200-3Y-EW.
4200-SCP2-3Y-CAL 3 cals within 3 years of purchase of the 4200-SCS Scope Card (Standard or HR
version). Requires purchase of 4200-3Y-CAL.
4200-SCP2-3Y-EW
1-year factory warranty on the 4200-SCS Scope Card (Standard or HR version)
extended to 3 years from date of shipment. Includes calibration and return
shipping. Requires purchase of 4200-3Y-EW.
4205-PG2-3Y-EW
1-year factory warranty on the 4205-PG2 Pulse Generator Card extended to 3
years from date of shipment. Includes calibration and return shipping. Requires
purchase of 4200-3Y-EW.
4205-PG2-3Y-CAL
3 cals within 3 years of purchase of the 4205-PG2 Pulse Generator Card.
Requires purchase of 4200-3Y-CAL
4210-CVU-3Y-EW
1-year factory warranty on the 4210-CVU C-V Measurement Unit extended to 3
years from date of shipment. Includes calibration and return shipping. Requires
purchase of 4200-3Y-EW.
Semiconductor
4210-CVU-3Y-CAL 3 cals within 3 years of purchase of the 4210-CVU C-V Measurement Unit.
Requires purchase of 4200-3Y-CAL.
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Semiconductor Characterization System
Technical Data
Value-Add Services
Upgrades
IMPL-4200
Besides the upgrades listed below, the optional instrumentation listed
on page 23 can also be added as upgrades.
APPS SERVICE
One 8-hour day of on-site implementation. An
Applications Engineer will visit your facility and get
your 4200-SCS implemented for your application.
Includes unpack, installation, setup, configuration,
and basic training on product usage. Does
not include travel expenses.
4200-SMU-UPGRADE Adds a 4200-SMU to an existing 4200 system.
4210-CVU-UPGRADE Adds a 4210-CVU to an existing 4200 system.
4210-SMU-UPGRADE Adds a 4210-SMU to an existing 4200 system.
Customized applications assistance. Examples
include:
• Software services – KULT/UTM development and
customization
• Applications assistance – test plan development,
test process optimization, measurement
troubleshooting
4200-KTEI-X.X
4200-SCS Keithley Test Environment Interactive
(KTEI) software test suite (latest version); includes
KTEI V7.2 CD and Complete Reference V7.2 CD.
4200-CPU-COR2/C
4200-CPU-COR2/C (4200-SCS/C (CRT) systems only)
4200-SCS upgrade service; includes installation of
new 2.13GHz multi-core single board computer
(w/2GB DDR2 memory, dual Gigabit LAN ports,
XGA graphics controller), four USB 2.0 ports (two
front, two back), fresh installation of Windows
XP Professional w/SP3 (not upgrade—See Note).
Also includes installation of Model 4200-KTEI-7.2
software test suite.
4200-CPU-COR2/F
Same as 4200-CPU-COR2/C except for 4200-SCS/F
(Flat Panel) systems only.
• System development – integration of a 4200-SCS
with other elements of a test system, such as a
switch matrix or a C-V meter
TRN-4200-1-K
Two-day training class at Keithley, “Optimizing
the Use of Your 4200-SCS Semiconductor
Characterization System.” Two days in-depth,
hands-on training on how to unleash the powerful
capabilities of your 4200-SCS. Includes theory of
operation, product operation, making measurements,
optimizing measurements, and troubleshooting. See
website for dates and locations.
On-site training, per day, for up to 6 people.
Additional charges for larger audience. Travel
expenses not included.
TRN-4200-1-R
Remote (web-based) training, per hour.
Approved Third-Party Software:
Acronis True Image (OEM)
Adobe Acrobat 7.0 or later
Adobe Acrobat Reader 7.0 or later
Diskeeper 9.0 or later
Kaspersky Anti-Virus 2009 or later
Microsoft Excel
Microsoft Internet Explorer 5.0 or later
Microsoft Word
Norton AntiVirus 2000 6.0 or later
Symantec pcAnywhere 11.0
TrendMicro Anti-Virus 2008 or later
Visual C++ .net
Windows XP Professional
Semiconductor
TRN-4200-1-C
Note: The 4200-CPU-COR2/C and -/F upgrades restore the 4200-SCS
to factory conditions. The hard drive is reformatted and all old data
and projects will NOT be preserved. Be sure to back up all data and
projects prior to ordering either of these upgrades.
Model 4200-SCS Technical Data
4200-SCS
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Semiconductor Characterization System
Technical Data
This section summarizes the warranties
of the 4200-SCS. For complete warranty
information, refer to the 4200-SCS
Reference Manual. Any portion of the
product which is not manufactured by
Keithley is not covered by this warranty and
Keithley will have no duty to enforce any
other manufacturer’s warranties.
Hardware Warranty
Keithley Instruments, Inc. warrants the
Keithley manufactured portion of the
hardware for a period of one year from
defects in materials or workmanship;
provided that such defect has not been
caused by use of the Keithley hardware
which is not in accordance with the
hardware instructions. The warranty
does not apply upon any modification of
Keithley hardware made by the customer
or operation of the hardware outside the
environmental specifications.
Software Warranty
Keithley warrants for the Keithley produced
portion of the software or firmware will
conform in all material respects with the
published specifications for a period of
ninety (90) days; provided the software
is used on the product for which it is
intended in accordance with the software
instructions. Keithley does not warrant
that operation of the software will be
uninterrupted or error-free, or that the
software will be adequate for the customer’s
intended application. The warranty does
not apply upon any modification of the
software made by the customer.
Caution: Keithley Instruments warrants the performance of the Model 4200-SCS only with the
factory-approved Windows Operating System and applications software pre-installed on the 4200-SCS
by Keithley Instruments. Systems that have been modified by the addition of un-approved third-party
application software (software that is not explicitly approved and supported by Keithley Instruments)
are not covered under the product warranty. Model 4200-SCS systems with unapproved software
may need to be restored to factory approved condition before any warranty service can be performed
(e.g., calibration, upgrade, technical support). Services provided by Keithley Instruments to restore
systems to factory approved condition will be treated as out-of-warranty services with associated
time and material charges. Approved software is listed in the Reference Manual and under “Approved
Third-Party Software” on page 25 of this document.
Caution: DO NOT reinstall or upgrade the Windows operating system (OS) on any Model
4200-SCS. This action should only be performed at an authorized Keithley service facility.
Violation of this precaution will void the Model 4200-SCS warranty and may render the Model
4200-SCS unusable. Any attempt to reinstall or upgrade the Windows operating system will
require a return-to-factory repair and will be treated as an out-of-warranty service, including
time and material charges.
Switch Matrix Support and Configurations
Overview
A number of useful standard switch matrix configurations are available for the 4200-SCS.
Each standard configuration includes all components, cabling, and instructions for the user to
assemble the switch matrix and add the matrix configuration to the 4200-SCS test environment.
Once a supported configuration is added to the test environment, the 4200-SCS standard
user library (matrixulib) ­connects instrument terminals to output pins through a simple
“fill-in-the-blank” interface.
Card 1
4200
A
Various
integrated
instruments
(SMU, SMU w/PA,
4205-PG2,
4200-SCP2, etc.)
External
C-V Meter
B
C
D
E
H
G
L
H
*All switch matrix cards
in a system must be
of the same type.
Pins 13–24
...
Pins 61–72
Semiconductor
Model 708A Chassis
1 Card 8×12 Pins
Model 707A Chassis
1–6 Cards Up to 8×72 Pins
Basic block diagram of 4200-SCS configurations
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Pins 1–12
Up to
Optional
Card 6
Optional
Card 2
Additional Card (optional)
Model 4200-SCS Technical Data
Warranty Summary
Embedded PC Policy
Additional Card (optional)
Warranty Information
7174A, 7072, or 7071 Card*
4200-SCS
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Semiconductor Characterization System
Technical Data
Ultra-Low Current/Local Sense
Configuration (4200-UL-LS-XX)
The Ultra-Low Current/Local Sense switch configuration is built using
the Keithley Model 7174A Low Current Matrix Card (with the Model 707A
or 708A Switch Matrix), which is designed for semiconductor research,
development, and production applications requiring high quality, high
performance switching of I-V and C‑V signals. This configuration provides
eight instrument inputs with up to 72 output pins at only 10fA typical
­offset current.
Low Current/Local Sense Configuration (4200-LC-LS-XX)
The Low Current/Local Sense switch configuration is built using the
Keithley Model 7072 Semiconductor Matrix Card, which is designed for
semiconductor applications requiring good quality I-V and C-V signals. The
configuration provides eight instrument inputs with up to 72 output pins
with less than 1pA offset current.
1 708A (or 707A) Switch Mainframe
1 7072 Matrix Switch Card
12 4200-TRX-3 Cable
1 7007-1 IEEE Cable
2 7078-TRX-BNC Adapter
1 7078-PEN Light Pen
4200-UL-LS-12 (or -12/707A)
1 708A (or 707A) Switch Mainframe
1 7174A Switch Card
12 4200-TRX-3 Cable for each 12 pins
1 7007-1 IEEE Cable
2 7078-TRX-BNC Adapter
1 7078-PEN Light Pen
Connector Type: 3-lug triax.
Maximum Signal Level: 200V, 2A.
Offset Current: 100fA max, 10fA typical.
Maximum Leakage: 0.01pA/V.
3dB Bandwidth: 30MHz typical.
4200-LC-LS-24, -36, -48, -60, -72
Ultra-Low Current/Remote Sense
Configuration (4200-UL-RS-XX)
Remote sensing is more accurate for voltage sourcing and measuring,
­particularly at currents greater than approximately 10mA, but degrades the
performance of C-V meters and pulse generators. The Ultra-Low Current/
Remote Sense switch configuration is built using the Keithley Model 7174A
Low Current Matrix Card, which is designed for semiconductor research,
development and production applications requiring high quality, high
performance switching of I-V and C-V signals. The configuration provides
six instrument inputs with up to 30 output pins at only 10fA typical
offset ­current.
4200-UL-RS-6, -12, -18, -24, -30
1 707A Switch Mainframe
1 7174A Switch Card for input
1 7174A Switch Card for each 6 DUT pins
12 4200-TRX-3 Cable for each 6 DUT pins
1 7007-1 IEEE Cable
2 7078-TRX-BNC Adapter
1 7078-PEN Light Pen
Connector Type: 3-lug triax.
Maximum Signal Level: 200V, 2A.
Offset Current: 100fA max, 10fA typical.
Maximum Leakage: 0.01pA/V.
1.888.KEITHLEY
1 707A Switch Mainframe
1 7072 Matrix Switch Card for each 12 pins
12 4200-TRX-3 Cable for each 12 pins
1 7007-1 IEEE Cable
2 7078-TRX-BNC Adapter
1 7078-PEN Light Pen
Connector Type: 3-lug triax.
Maximum Signal Level: 200V, 1A.
Offset Current: <1pA (Rows A–B).
Maximum Leakage: 0.1pA/V.
3dB Bandwidth: 5MHz typical (Rows G–H).
Model 4200-SCS Technical Data
4200-LC-LS-12 (or -12/707A)
General-Purpose/Remote Sense
Configuration (4200-GP-RS-XX)
The General-Purpose/Remote Sense switch configuration is built using the
Keithley Model 7071 General-Purpose Matrix Card, which is designed for
applications requiring cost-effective switching of I-V and C-V signals. Remote
sensing is more accurate for voltage sourcing and measuring, particularly
at currents greater than approximately 10mA. The configuration provides
eight instrument inputs with up to 72 output pins with less than 100pA
offset current. Each crosspoint provides HI, LO, and GUARD signal
­switching.
4200-GP-RS-12 (or -12/707A)
1
1
1
1
1
708A (or 707A) Switch Mainframe
7071 Switch Card
7078-MTC-20 Cable
7007-1 IEEE Cable
7078-PEN Light Pen
4200-GP-RS-24, -36, -48, -60, -72
1 707A Switch Mainframe
1 7071 Switch Card for each 12 pins
1 7078-MTC-20 Cable for each 12 pins
1 7007-1 IEEE Cable
1 7078-PEN Light Pen
Maximum Signal Level: 200V, 1A.
Offset Current: <100pA.
Maximum Leakage: 100pA/V.
3dB Bandwidth: 5MHz typical.
Connector Type: Quick disconnect using 38-pin connectors or
screw terminals.
Semiconductor
4200-SCS
(U.S. only)
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Semiconductor Characterization System
Technical Data
4200-SCS
Optional Accessories
Driver Options
4200ICCAP-6.0 IC-CAP Driver and Source Code for 4200-SCS:
UNIX/Windows
Semiconductor
Model 4200-SCS Technical Data
Computer Options
4200-MOUSE
Microsoft Ambidextrous 2 Button Mouse (Note: a pointing
device is integrated with the 4200 keyboard.)
Remote PreAmp Mounting Accessories
4200-MAG-BASE 1 Magnetic base for mounting 4200-PA on a prober platen
4200-TMB 2
Triaxial mounting bracket for mounting 4200-PA on a triaxial
mounting panel
4200-VAC-BASE 2 Vacuum base for mounting 4200-PA on a prober platen
Cabinets and Mounting Accessories
4200-CAB-20UX 20U Cabinet (35 in.)
4200-CAB-25UX 25U Cabinet (44 in.)
4200-CAB-34UX 34U Cabinet (60 in.)
4200-KEY-RM
Slide Rack Mounting Kit for standard keyboard and
pointing device
4200-RM
Slide Rack Mounting Kit for 4200-SCS/F and 4200-SCS/C
Connectors, Adapters, and Fixtures
237-BAN-3A
Triax Cable Center Conductor terminated in a safety banana
plug
237-BNC-TRX
Male BNC to 3-lug Female Triax Adapter
237-TRX-BAR
3-lug Triax Barrel for use with triax interconnect
237-TRX-T
3-slot Male to Dual 3-Lug Female Triax Tee Adapter
237-TRX-TBC
3-lug Female Triax Bulkhead Connector
7078-TRX-BNC Coaxial Connector for connecting coax instruments to
a triax matrix
7078-TRX-GND Male Triax to Female BNC Connector (guards removed)
8101-4TRX
4-pin Transistor Fixture
8101-PIV
Pulse I-V Demo Fixture
CA-404B SMA Plug to SMA Plug, RG188, 2m
CA-405B SMA Plug to SMA Plug, RG188, 6in
CA-406B SMA Plug to SMA Plug, RG188, 13in
CA-451A SMA-SMA Plug, RG188, 4.25in
CA-452A SMA-SMA Plug, RG188, 8in
CS-565
Female BNC to Female BNC Adapter
CS-633 Adapter, TRIAX to BNC
CS-701
BNC Tee Adapter
CS-1247 SMA Female to BNC Male
CS-1249 SMA Female to SMB Plug
CS-1251 BNC Female to SMB Plug
CS-1252 SMA Male to BNC Female
CS-1281 SMA Female to SMA Female
CS-1382 MMBX-to-SMA Adapter
CS-1390 TRIAX to SMA Adapter, no guard
CS-1391 SMA TEE Adapter (female, male, female)
Other Accessories
4200-CART
Roll-around Cart for 4200-SCS
4200-CASE
Transport Case for 4200-SCS
4200-MAN
Printed Manual Set for 4200-SCS
(Manual on CD-ROM is included in Base Unit)
4200-Q-STBL-KIT Stabilization Kit for 4200-PIV-Q
NOTES
1. 4200-MAG-BASE is included with 4200-PIV-A Remote Bias Tees.
2. Also fits 4200-PIV-A Remote Bias Tees.
3. All 4200-SCS systems and instrument options are supplied with required cables (2m length).
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Additional Cables 3
236-ILC-3
Interlock Cable, 3m (one included with each 4200-SCS)
237-ALG-2
Low Noise Triax Cable, 2m (terminated with a 3-slot male
triax connector on one end and 3 alligator clips on the other
4200-MMPC-C Multi-measurement cable set for Cascade Microtech probers.
Requires one set per manipulator.
4200-MMPC-S Multi-measurement cable set for SUSS MicroTec probers.
Requires one set per manipulator.
4200-MTRX-1
Ultra Low Noise SMU Triax Cable, 1m (Mini Triax-Triax,
connects 4200 SMUs to a test fixture)
4200-MTRX-2
Ultra Low Noise SMU Triax Cable, 2m (Mini Triax-Triax,
connects 4200 SMUs to a test fixture, two included with each
4200 SMU that is not configured with a Remote PreAmp )
4200-MTRX-3
Ultra Low Noise SMU Triax Cable, 3m (Mini Triax-Triax,
connects 4200 SMUs to a test fixture)
4200-PRB-C
SSMC to SMA Cable with local ground
4200-RPC-0.3
Remote PreAmp Cable, 0.3m (for use inside prober shield)
4200-RPC-2
Remote PreAmp Cable, 2m (for remote location of 4200-PA,
one included with each 4200-PA)
4200-RPC-3
Remote PreAmp Cable, 3m (for remote location of 4200-PA)
4200-RPC-6
Remote PreAmp Cable, 6m (for remote location of 4200-PA)
4200-TRX-0.3
Ultra Low Noise PreAmp Triax Cable, 0.3m, (Triax-Triax,
connects 4200-PA to a test fixture, recommended for remote
location of the 4200-PA)
4200-TRX-1
Ultra Low Noise PreAmp Triax Cable, 1m, (Triax-Triax,
connects 4200-PA to a test fixture)
4200-TRX-2
Ultra Low Noise PreAmp Triax Cable, 2m, (Triax-Triax,
connects 4200-PA to a test fixture, two included with
each 4200-PA)
4200-TRX-3
Ultra Low Noise PreAmp Triax Cable, 3m, (Triax-Triax,
connects 4200-PA to a test fixture)
7007-1
Double Shielded IEEE-488 Cable (1m)
7007-2
Double Shielded IEEE-488 Cable (2m)
CA-19-2 Cable Assembly
CA-426B TRIAX to SSMC Cable Assembly
CA-446A
SMA Cable, 100W, 3m
CA-447A
SMA Cable, male to male, 100W, 1.5m
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Semiconductor Characterization System
Technical Data
4200-SCS
Integrated industrial controller and additional RAM ensure high
test throughput, plus system robustness, stability, and security.
Store test setups and results
right on the system with the
high capacity fixed disk drive.
No sorting through floppy
disks to find the desired test.
Industry-standard
Windows-based GUI
minimizes set-up
and integration time.
Communicate quickly
with a wide range of
PC accessories with the
built-in USB interface.
The 4200-SCS can be rack mounted. It has the same dimensions and occupies the same rack space as semiconducor parametric analyzers that
may already be in use.
Two LAN Ethernet ports
(10/100/1000) allow easy access
to network files and printers.
Model 4200-SCS Technical Data
The integrated DVD/CD-RW
drive allows high capacity
backup and data transfer.
High speed, high
precision ADC per
channel eliminates
performance
tradeoffs.
RS-232 port
Standard parallel printer port
Low noise
4200-SCP2 Digital Oscilloscope for
ground unit
measuring pulses and monitoring waveforms
with remote
4210-CVU Card
sense
Dual-channel pulse generator supports pulse I-V
testing and other pulse applications.
SVGA monitor port
Additional USB port
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Use the GPIB interface to control external instruments or to allow external
control of the 4200-SCS using an Agilent 4145 style command language.
Semiconductor
Configurable with from
2 to 9 SMUs and optional
sub-femtoamp Remote
PreAmps. Adding high
power SMUs won’t restrict
SMU capacity.
(U.S. only)
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Semiconductor Characterization System
Technical Data
4200-SCS
Model 4200-SCS Technical Data
PreAmp Mounting and Cabling
It's easy to connect the Model 4200SCS to a probe station or a switch
matrix with standard triax cables.
PreAmps can be mounted on the probe station with either a platen base or a
triax mounting bracket. By reducing the signal path between the DUT and the
PreAmp from several feet to a fraction of an inch, the Model 4200-SCS can
­eliminate cable effects like parasitic capacitance and leakage currents, for
more accurate low-level measurements.
An optional vacuum (Model 4200-VAC-BASE) or
magnetic (Model 4200-MAG-BASE) platen mounting base allows the PreAmp to be located next
to manipulators on the chuck platen, ­eliminating
­measurement problems caused by long cable
lengths when performing ultra-low current
­measurements.
Semiconductor
If platen space is not available, the triax mounting
bracket (Model 4200-TMB) allows users to locate
the PreAmp on dual triaxial connectors that may
already be installed for HP4156 Kelvin triax cables.
This mounting option reduces problems caused by
long cables without occupying platen space.
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Semiconductor Characterization System
Technical Data
4200-SCS
Model 4200-CASE
Transport case
Model 4200-SCS Technical Dataw
4200-SCS Accessories
Model 4200-CART
Model 4200-CAB-XXX
Roll-around cart
Cabinet
Model 4200-KEY-RM
Semiconductor
Keyboard rack mount
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Semiconductor Characterization System
Technical Data
Model 4200-SCS Technical Data
4200-SCS
Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.
All other trademarks and trade names are the property of their respective companies.
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Semiconductor
Keithley Instruments, Inc. ■ 28775 Aurora Road ■ Cleveland, Ohio 44139-1891 ■ 440-248-0400 ■ Fax: 440-248-6168 ■ 1-888-KEITHLEY ■ www.keithley.com
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Sint-Pieters-Leeuw
Ph: 02-3630040
Fax: 02-3630064
[email protected]
www.keithley.nl
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Beijing
Ph: 8610-82255010
Fax: 8610-82255018
[email protected]
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finland
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© Copyright 2009 Keithley Instruments, Inc.
Printed in the U.S.A.
No. 2199
Rev. 03.06.09
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