Ana/Dig MFC Manual_upd04_c.qrk

Ana/Dig MFC Manual_upd04_c.qrk
Analog and Digital
Mass Flow Controllers and Meters
User’s Manual
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
Contents
1. OVERVIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 Flow Controller / Flow Meter Model Designations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.2 Flow Controller / Flow Meter Model Designations, by Applications. . . . . . . . . . . . . . . . . . . . . . . . . . . 1
2. STANDARD FEATURES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2.1 Attitude . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2.2 Calibration Conditions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2.3 Standard Temperature and Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2.4 Calibration Traceability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2.5 Manufacturing Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2.6 Purge Capability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
3. OPTIONAL FEATURES. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
3.1 Auto Shut-off Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
3.2 Response Time Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
3.3 Connector Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
3.4 Special Adapters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
3.5 Valve Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
3.6 Flow Direction Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
3.7 Auto-Zero Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
3.8 Fittings Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
4. POWER SUPPLIES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
5. PRODUCT DRAWINGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
6. PRODUCT SPECIFICATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
6.1 MFC side can label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
6.2 Traceability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
7. INSTALLATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
7.1 Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
7.2 Purging before Installing the MFC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
7.3 Positioning the Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
7.4 Mounting the Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
7.5 Connecting to gas supply line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
8. ELECTRICAL CONNECTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
8.1 Voltage and Pinouts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
8.2 Connections to a Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
8.3 Warm Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
9. MULTIFLO VIRTUAL INTERFACE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
9.1 Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
9.2 Configure the DMFC for Networking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
10. OPERATION AND PERFORMANCE CHECKS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
10.1 Automatic Zero Initialization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
10.2 Proper Sequencing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
10.3 Leak Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
10.4 Purge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
10.4.1 Non-Reactive Gases: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
10.4.2 Reactive Gases:. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
10.5 Zero Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
10.6 Full Flow Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
10.7 Flow Control Response Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
10.8 Calibration Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
11. TROUBLESHOOTING. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
11.1 Environmental Factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
11.2 MFC Troubleshooting Checklist. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
12. REMOVAL. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
12.1 Purging before removing the MFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
12.2 Removing the MFC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
12.3 Packaging the MFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
12.4 Un-Packaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
12.5 Cleaning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
12.6 Shipping. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
12.7 Shipping Costs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
12.8 Returned Material Authorizations (RMA). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
12.9 Documentation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
13. MAINTENANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
13.1 Emergency Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
13.2 Routine Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
13.3 Factory Calibration and Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
13.4 Field Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
13.5 Technical Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
14. WARRANTY. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
15. WEB SITE TECHNICAL RESOURCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
16. APPENDICES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
16.1 Connector Pinouts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
16.2 Setting The MFC/MFM Zero . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
16.3 9000 Series Supplement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
16.4 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
16.5 DeviceNet Operations LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
16.6 Manufacturing, Sales, and Service Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
16.7 Auto-Zero Feature (for Analog Mass Flow Controllers). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
1. OVERVIEW
Celerity Mass Flow Controllers precisely monitor and control the mass flow of gases in processes
such as Plasma Etching, CVD, Diffusion, EPI, and Sputtering where superior accuracy is required.
Mass Flow Meters are identical to mass flow controllers, except that they do not have a controlling
valve. Therefore they do not control, but only accurately measure and report the gas flow that is
passing through them.
1.1
Flow Controller / Flow Meter Model Designations
Unit Mass Flow Controller models have the prefix of “UFC-“ (Unit Flow Controller), and Mass
Flow Meters have the prefix of “UFM-” (Unit Flow Meter).
1.2
Mass Flow Controllers:
UFC-XXXX (Unit Flow Controller)
Mass Flow Meters:
UFM-XXXX (Unit Flow Meter)
Flow Controller / Flow Meter Model Designations, by Applications
Table 1 shows the general applicability of each model covered by this manual.
Category / Model Family
Footprint
Full Scale
Flow Range
(Min - Max)
<Digital>
RS485
Analog
<Digital>
DeviceNet™
PROFIBUS
<Analog>
Analog
Protocol
Elastomer Seal Products - 32 µ in Ra Finish
122 series Control Valves
180 series Standard Flow Applications
7300 series Standard Flow Applications
7320 series Standard Flow w/ Auto Shutoff
8100 series Standard Flow Applications
8130 series Setpoint Pressure Control
1.1"
1"
1.5"
1.5"
1.5"
1.5"
10 sccm - 30 slm
10 sccm - 30 slm
10 sccm - 30 slm
10 sccm - 30 slm
10 sccm - 30 slm
10 sccm - 30 slm
122
7301
7321
8101
8130
7304
7324
8105
180HS /180HA
7300
7320
8100
High Purity Metal Seal Products - 10 or 16 µ in Ra Finish
132 series Control Valves
1551 series Standard Flow Applications
1630 series Setpoint Pressure Control
1660 series Standard Flow Applications
1660 SDS series Safe Delivery Source
3160 series High Flow Applications
5360 series High Flow Applications
7360 series Standard Flow Applications
9660 series High Temperature Applications
1.42"
1.5"
1.5"
1.5"
1.5"
1.5"
1.5"
1.5"
1.5"
10 sccm - 30 slm
30 sccm - 6 slm
10 sccm - 30 slm
10 sccm - 30 slm
10 sccm - 30 slm
30 slm - 100 slm
30 slm - 100 slm
10 sccm - 30 slm
10 sccm - 30 slm
132
1551
1661
1663
3161
5361
7361
1665
1664
3165
5365
7364
8161
8163
8261
8561
8563
9561
9861
8165
8164
1630
1660
1662/1662L
7360
9660
Ultra High Purity Metal Seal Products - 4 µ in Ra Finish
8160 series Standard Flow Applications
8160 SDS series Safe Delivery Source
8260 series Standard Flow Applications
8560 series Standard Flow Applications
8560 SDS series Safe Delivery Source
9500 series High Temperature Applications
9860 series High Temperature Applications
1.5"
1.5"
1.5" mini
1.125"
1.125"
1.125"
1.5"
10 sccm - 30 slm
10 sccm - 30 slm
10 sccm - 30 slm
10 sccm - 30 slm
10 sccm - 30 slm
10 sccm - 30 slm
10 sccm - 30 slm
8160
8162/8162L
8260
8565
8564
9565
9865
Table 1. Model Designations by applications
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
1
2. STANDARD FEATURES
2.1
Attitude
- Each MFC is built for a specific attitude either HOS (Horizontal on Side) or HOV (Horizontal
or Vertical).
- For further details, refer to Section 7.3 “Mounting Attitude”.
2.2
Calibration Conditions
- MFCs ordered as “Atmosphere” are calibrated with the MFC’s outlet exhausting to
Atmosphere.
- MFCs ordered as “Vacuum” are calibrated with the MFC’s outlet exhausting to Vacuum.
2.3
Standard Temperature and Pressure
- 0°C and 760 mm Hg
2.4
Calibration Traceability
- National Institute of Standards and Technology (N.I.S.T.)
2.5
Manufacturing Environment
- Assembled, Calibrated, Tested and Packaged in Class 100 Cleanroom Environment
2.6
Purge Capability
- Full purge capability with 1 slm purge minimum (depends on gas density and pressure).
3. OPTIONAL FEATURES
Options are set at the factory, unless otherwise specified.
3.1
Auto Shut-off Option
- With the Auto Shut-off option a setpoint command of less than 2% (0.1 VDC) closes the
MFC control valve.
- Since an MFC valve is not a positive shutoff valve, a shutoff valve in series with the MFC
may be needed.
- Users of digital MFCs can disable or increase the Auto Shutoff option to any value up to a
maximum of 10% of the full scale operational range using the MultiFlo Virtual Interface.
(Refer to the MultiFlo Virtual Interface User’s Manual.)
3.2
Response Time Options
Fast:
≤1
Sec to a setpoint command of 20%-100% (per SEMI E17-91)
Soft Start:
Ramping gradually (5 second linear ramp)
Soft start options:
4-6, 6-10, 10-15, 20-30, or 40-60 seconds.
- This option is configured in the factory for analog MFCs, and cannot be adjusted by the
user.
Users of digital MFCs can select the Response Time to be 0-20 seconds using the MultiFlo
Virtual Interface. (Refer to the Details section of the MultiFlo Virtual Interface User’s Manual.)
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
2
3.3
Connector Options
The electrical connector configurations are shown in Appendice 16.1, “Electrical
Connections”. This includes detailed information and pinouts.
3.4
Special Adapters
Retrofitting of the models of most competitors is accomplished using special electronic and
mechanical adapters. Contact Celerity’s Applications Engineering department for help with
your particular requirement.
3.5
Valve Options
The valve is configured at the time of manufacture to be Normally Closed or Normally Open,
and is not user modifiable.
- Normally-closed (standard): The valve is closed when there is no power applied to the unit.
- Normally-open (optional): The valve is fully open when there is no power applied to the
unit.
3.6
Flow Direction Options
There are two configurations of Flow Direction, and this is not user modifiable.
- “Standard”:
- The sensor is upstream and the valve is downstream.
- The valve buffers the sensor from downstream (process) pressure fluctuations.
- “Pressure buffered”:
- The valve is upstream and the sensor is downstream.
- The valve buffers the sensor from upstream pressure fluctuations.
3.7
Auto-Zero Option
- The Auto-Zero feature detects zero offset during no-flow conditions and electronically
re-zeros the output signal.
- Auto-Zero, on earlier Unit models, was of great benefit in reducing drift and increasing
equipment uptime.
- However, the current sensor models have a drift specification of less than .6% per year.
- The proper application of the Auto-Zero option depends entirely on the ability to ensure
absolutely no flow across the MFC sensor during the Auto-Zero cycle.
- With few exceptions, this means that there must be positive shutoff valves immediately
upstream and downstream of the MFC, and that there must be proper valve sequencing.
- All Digital Mass Flow Controllers have Auto-Zero circuitry installed, which can be enabled or
disabled using the MultiFlo Virtual Interface. (Refer to the MultiFlo Virtual Interface User’s
Manual.)
- For a more complete explanation of the the Auto-Zero Feature see Appendice 16.7.
- If you have any questions regarding the ordering or installing of an MFC with the Auto-Zero
feature please consult Applications Engineering first.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
3
3.8
Fittings Options
The fittings available for these units are:
- Swagelok®, VCR®, VCO®
- C-seal and W-seal surface-mount
- Ultraseal, Buttweld and Specials
Not all fittings are available for all gases and ranges. Fitting options will vary according to the
MFC model.
4. POWER SUPPLIES
Celerity manufactures a series of analog and digital power supplies. These are capable of
monitoring and/or controlling from 1 to 5 mass flow controllers or meters simultaneously. Call
Celerity Customer Service for further information.
5. PRODUCT DRAWINGS
You can access and download a product drawing for any specific model of mass flow controller
(MFC) via www.celerity.net (http://www.celerity.net/html/products/technical_data/drawings).
6. PRODUCT SPECIFICATIONS
You can access and download the exact product specifications for any specific model, via
www.celerity.net (http://www.celerity.net/html/products/literature/literature.html)
6.1
MFC side can label
MFC side can labels carry a detailed listing of all information about a specific MFCs statistics
as built at the factory.
1.
2.
3.
4.
5.
6.
7.
MFC Model Number
Nameplate Gas and Range
Customer Part Number
Serial Number
Calibration reference for traceability
N2 Calibration Reference
Response Speed-Exhaust Condition
(Atmosphere or Vacuum)
8. Operating Attitude
9. Valve Type (NC/NO)
Seal (and Seat) Material
10. Reference Temperature and Pressure
11. Electrical Connector Types
12. Options (Auto Shutoff/Auto Zero)
13. Customer Special Request Number
14. Main Firmware Revision
15. DeviceNet Firmware Revis
Figure 1. MFC Side Can Label with Explanations
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6.2
Traceability
If you wish to replace an MFC, call Celerity with the serial number of the MFC you wish to
replace. Celerity will determine the part number for the equivalent MFC with the same
options.
7. INSTALLATION
7.1
Unpacking
Verify that the controller was not damaged in shipment. Notify the shipper immediately if you
find a problem. All products returned must have a Return Material Authorization number
(RMA #; see section 12.8) issued prior to return shipment to the factory.
NOTE: Do not remove the shipping caps covering the inlet and outlet fittings until
immediately prior to the actual MFC installation in the tool.
7.2
Purging before Installing the MFC
Before installing the MFC completely purge the gas lines with nitrogen or argon. The purge
gas must be moisture and oxygen free, to less than 100 ppb. The preferable method is to
cycle purge the line for a period of two to four hours, depending on the cleanliness required
by the process and the reactiveness of the process gas.
Cycle purging consists of evacuating to a low pressure, adequate to induce outgassing, and
then purging to remove adhered moisture and oxygen. The cycle is repeated several times to
complete the cleaning. Alternatively, eight to twenty-four hours of purging alone may be used
if vacuum is not available.
7.3
Positioning the Controller
The controller must be positioned so that the gas flow is in the direction of the arrow stamped
on the controller base. It is designed to be mounted only in the position for which it was
calibrated (See the side label of the MFC. Refer to Section 6.1). High Temperature models
(9000-series) are designed to be mounted in the horizontal position only.
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Mounting Attitude
HOS
Horizontal-On-Side
HOV
Horizontal-Or-Vertical
Figure 1. Mounting Attitudes. Two Configurations: HOS and HOV
In order to provide optimum performance, Celerity calibrates all Mass Flow Controllers
and Mass Flow Meters to the position specified at the time of the order.
7.4
Mounting the Controller
Use two #8-32 screws to mount the controller. This will ensure the flow controller's
resistance to vibration from external sources.
7.5
Connecting to gas supply line
Once the unit is correctly mounted, connect the inlet and outlet fittings of the controller to the
gas supply line. Depending on the type of fittings used, connect and tighten per fitting
manufacturers specifications.
NOTE: You MUST use two wrenches to tighten each fitting of the unit, one for the nut and the
other to keep the fitting from receiving any rotational stress. If you do not do this you
could cause a leak, due to stress applied to the MFC’s internal seals.
8. ELECTRICAL CONNECTIONS
8.1
Voltage and Pinouts
- Check that the pin connections of the mating cable have the same pinout
(See Appendice 16.1).
- Most analog and digital MFCs use ±15 VDC power.
- DeviceNet MFCs use +11-25 VDC power.
- A Flow meter has the same pinout as a controller, except that the following pinouts do not
apply on a meter:
- Setpoint, Valve Test Point, Valve Off
- Auto-Zero Disable, Auto-Zero Alarm.
NOTE: Do not make any connections to any unlabeled connector pins.
©2005 Celerity, Inc.
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8.2
Connections to a Power Supply
If you are using a power supply other than one from Celerity, check the pin assignments,
making sure they match those in Appendice 16.1, depending on connector type.
Celerity power supplies use a cable that has a 20 pin female header type connector at one
end and a 20 pin card edge (MFC) type at the other.
- The connectors are keyed at both ends.
- When making the connection, be sure to apply pressure directly down on the edge
connector.
NOTE: Do not rock the connector back and forth; this could cause damage to the electronic
circuits.
8.3
Warm Up
Once the power supply is securely connected to the MFC/MFM, please allow at least 60
minutes for the unit to stabilize.
9. MULTIFLO VIRTUAL INTERFACE
9.1
Features
To fully take advantage of all the outstanding operational features of Celerity’s digital mass
flow controllers, a Multiflo Virtual Interface User Kit is required. This will allow access to the
mass flow controllers through a conventional personal computer.
With it you can issue commands to, and access information from, up to 32 MFCs.
(See the MultiFlo Virtual Interface Operational Manual for details)
-
Refer to Multiflo Virtual Interface User Manual to perform the following.
Monitor Setpoint, Flow, and Valve Voltage
Turn the Flow Off and On
Archive and analyze collected data from these units.
Make comparisons among units.
Change the gas that the unit is configured for.
Troubleshoot quickly.
Correct for a calibration inaccuracy.
NOTE: The Digital MultiFlo MFC doesn’t need to be warmed up to be programmed for gas
and range.
9.2
Configure the DMFC for Networking
1. Power the MFC (see Section 8).
2. Starting from left to right configure each DMFC for a MacID address.
- The MacID address must be between 32 and 96, inclusive.
3. Using RJ-11 connectors, daisy chain up to 32 DMFC’s.
©2005 Celerity, Inc.
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4. Install the appropriate length RJ-11 connector to the final DMFC in the daisy chain and
connect to the “25 Pin” to “RJ-11” adapter on the RS-232/RS-485 converter supplied
with your MultiFlo Virtual Interface User Kit.
5. Connect the “25 Pin” to “9 Pin” adapter to the serial port of your personal computer or
Laptop.
6. Install MultiFlo Virtual Interface Software supplied in the Multiflo Virtual Interface User Kit.
10. OPERATION AND PERFORMANCE CHECKS
Perform the following checks after the mass flow controller has been installed into the system.
10.1 Automatic Zero Initialization
See Appendices 16.3 and Appendices 16.7.
10.2 Proper Sequencing
Systems using a microprocessor or computer for operating the MFC should sequence the
valve off between processes.
This is accomplished in the following way:
- MFC’s with Automatic Shut-off
- Simply provide a zero setpoint.
- Gas will automatically be shut off.
- MFC’s without Automatic Shut-off
- Switch Pin J off (if applicable).
Valves, whether upstream or downstream from the mass flow controller, should be
programmed to:
- turn on prior to turning on the MFC, and
- turn off after the MFC is turned off.
For units with Auto Zero, it is recommended that the upstream valve and downstream valve
be turned off for a minimum of three minutes prior to the start of a process. This is because
the Auto Zero function employs a 2 minute time delay before it begins to act upon any zero
offset.
10.3 Leak Test
It is important to test the mass flow controller connections for leak integrity, after it has been
installed into your system, with a helium leak detector.
10.4 Purge
There are two recommended purging processes, one for non-reactive gases and one for
reactive gases.
©2005 Celerity, Inc.
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10.4.1 Non-Reactive Gases:
From process tool control system fully open the MFC by setting the setpoint to 100% of
the full scale range. Purge the mass flow controller with clean, dry nitrogen or argon for a
minimum of two hours.
10.4.2 Reactive Gases:
Use one of the following three methods:
(See “Connecting to Gas Supply Line” Section 7.5)
- Cycle purge:
- Alternately evacuate and purge the mass flow controller for 2 to 4 hours with clean, dry
nitrogen or argon.
-For toxic and corrosive gases it is recommended to use 100 - 120 cycles.
- Continuous purge:
- Purge the mass flow controller with clean, dry nitrogen or argon for 8 to 24 hours.
- Evacuation purge:
- Evacuate the mass flow controller for 8 to 24 hours.
10.5 Zero Check
Reference Appendice 16.2
Note: For remote readouts, including analog-to-digital converters, ensure that the
readouts match the inputs to the controller. Adjust their zero and full-scale to match.
For more information on setting the MFC/MFM Zero, please refer to Appendice 16.2.
©2005 Celerity, Inc.
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10.6 Full Flow Check
1.Apply the gas at the appropriate inlet pressure.
2.Apply a Setpoint of 100%. This is accomplished by applying a 5.00 VDC setpoint (to pin A
relative to pin B or C on the cardedge connector.
3.Verify that the indicated flow output reads a steady 5 volts ±10 mV (pin 3 relative to pin B
(or C) on the cardedge connector. This is equivalent to a flow of 100% ±0.2%.
10.7 Flow Control Response Check
1.Close the valve by
(a) applying a 0% setpoint (where auto shut-off is enabled) or
(b) apply a Valve Off command (apply 0 volts to pin J of the cardedge connector).
2.Remove the Valve Off command.
- This accomplished by disconnecting pin J from pin 10.
3.Verify that the response time is correct.
- For “fast start” units refer to the response specifications for each model and range.
- For “slow start” (linear response) units the response time that is best for your application
was chosen at the time of your order
- 4-6 seconds, 6-10 seconds, 10-15 seconds, 20-30 seconds or 40-60 seconds
4.If the unit does not meet the response specifications contact Celerity for assistance.
10.8 Calibration Check
Calibration is checked by flowing gas through a calibration reference upstream from the
mass flow controller or meter.
- If the gas used for this calibration check is other than the specific surrogate gas or the
actual process gas (such as N2) MFC errors of up to ±10% can be expected. This is due
to the different characteristics among the different gases.
©2005 Celerity, Inc.
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11. TROUBLESHOOTING
Many problems that appear to be MFC-related may actually be caused by another part of the
system. Go through the step-by-step Troubleshooting Guide (Appendice 16.3) before removing the
MFC from service.
Environmental factors may affect MFC performance (see Table 1) but these are easily resolved
using a simple troubleshooting checklist (see Table 2).
11.1 Environmental Factors
SYMPTOMS
CAUSES
Inaccurate flow (span shifts)
• Temperature (steady state and transient)
• Inlet pressure (steady state and transient)
• Power supply problems, electrical interference
Control problems
(cannot reach setpoint, oscillation)
• Differential pressure not within operating range
• Inlet pressure not stable
• Cable losses (too much ground current
Zero problems
(indicated zero not stable)
• Temperature (steady state and transient)
• Inlet pressure (steady state and transient)
• Power supply problems, electrical interference
• Attitude sensitivity
Table 1. Environmental factors
11.2 MFC Troubleshooting Checklist
Check For These Factors:
- Verify that the supply voltage is correct.
- Verify that the grounding is consistent.
- Verify that the setpoint signal at the MFC connector is the same as the setpoint signal
coming from the tool.
- Verify that the Output (Indicated Flow) of the flow controller is the same at the input of the
tool.
- Verify the valve voltage response.
- Move the setpoint upward and downward, looking for the valve voltage to change
accordingly.
- Compare recent valve voltage to past valve voltage. If it has changed and the other
parameters have not then a failure is likely.
©2005 Celerity, Inc.
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12. REMOVAL
The following procedures are designed to minimize or eliminate the contamination normally
associated with the most highly reactive gases. Celerity has also designated these
procedures to reduce the overall exposure of wafers to foreign particles.
12.1 Purging before removing the MFC
Before removing the MFC purge the gas lines with nitrogen or argon. The purge gas must be
moisture and oxygen free, to less than one hundred parts per billion. The preferable method
is to cycle purge the line for a period of two to four hours, depending on the cleanliness
required by the process and the reactiveness of the process gas.
Cycle purging consists of evacuating to a low pressure adequate to induce outgassing and
then purging to remove adhered moisture and oxygen. The cycle is repeated several times to
complete the cleaning. Alternatively, eight to twenty-four hours of purging alone may be used
if vacuum is not available.
12.2 Removing the MFC
Once the line has been purged, the MFC can be removed. Inspect the upstream and
downstream lines, as well as the MFC inlet and outlet, for signs of contamination.
Immediately hardcap the inlet and outlet fittings of the MFC and cap the line fittings as well.
The unit should be sealed in a cleanroom plastic bag before leaving the cleanroom area.
12.3 Packaging the MFC
The unit can now be transported to the service or calibration location. If the MFC is to be
transported outside of the facility, it should be packaged in its original carton or 1 inch of
foam cushion on all sides, adequate for shipping an instrument.
Be sure to include documentation of any contamination found, failure symptoms, and the
location of its installation. This documentation can facilitate future contamination analysis.
If a product is being returned to Celerity it must include your company name, contact,
Contaminination Disclosure Form, and RMA #. Call Unit for an RMA # prior to shipping.
12.4 Un-Packaging
When the MFC is received at a service or calibration facility, the bag should be opened only
within a cleanroom area (Class 1000 or better).
12.5 Cleaning
Cleaning of the MFCs should be done with semiconductor grade chemicals. Assembly,
calibration, response timing, and performance testing is to be accomplished in a Class 100 or
better environment.
12.6 Shipping
Once the unit has been cleaned, serviced and/or recalibrated, it must be hardcapped and
bagged for return. Include with the removal documentation any documentation relevant to
the calibration and service that was performed.
©2005 Celerity, Inc.
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12.7 Shipping Costs
Celerity prepays outgoing freight charges when any part of the service is performed under
warranty. All domestic shipments are sent via UPS ground transport. However, if the unit
has been returned collect to Celerity, the costs are added to the repair invoice. Import/export
charges, foreign shipping charges, or special customer specified handling will be paid for by
the customer.
12.8 Returned Material Authorizations (RMA)
All product returns must accompany a RMA number for proper material handling within
Celerity. Contact customer service at (714) 921-2640, for a Returned Material Authorization
number.
12.9 Documentation
The documentation of the service and calibration should be maintained, based on the
location, in order to determine the contamination of each gas line. These procedures should
provide maximum cleanliness. This is required for many of the new, more critical
semiconductor processes.
13. MAINTENANCE
13.1 Emergency Service
In addition to a fast turnaround time for regular service and repairs, Celerity can, in most
cases, provide an advance replacement unit for EMERGENCY PRODUCTION DOWN
situations. In this way, your production can get back on-line while your original unit is
repaired.
13.2 Routine Maintenance
Any precision instrument such as a mass flow controller requires occasional servicing. It is
especially important to perform this service if the flow controller has been operating for an
extended period of time or has been subjected to gases which leave excessive residue. If
non-reactive gases are used, the flow controller should be serviced annually. If reactive gases
are used, the flow controller should be serviced every six months.
Occasionally the Zero Offset should be checked. See the section, “Operation and
Performance Checks”, for adjustment instructions.
13.3 Factory Calibration and Service
Celerity provides a 5 day turnaround time for factory calibration and repair, and an even
shorter turnaround time for a nominal additional cost.
13.4 Field Service
Celerity Mass Flow Controllers are field serviceable by the factory. They should be maintained,
cleaned, and repaired by an authorized Celerity/Unit repair center.
©2005 Celerity, Inc.
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13.5 Technical Support
A factory technician is available to answer your questions by phone any time, 24 hours a day,
7 days a week 1-888-UNIT-INC.
14. WARRANTY
Celerity products are warranted against defects in materials and workmanship for a period of two or
three years, depending on the model, from the date of shipment, when used in accordance with
specifications and not subjected to physical damage, abuse, or contamination.
MODEL TYPES
MODEL NUMBERS
WARRANTY LENGTH
MODEL TYPES
MODEL NUMBERS
WARRANTY LENGTH
ULTRA HIGH PURITY
METAL SEAL MFCs
HIGH PURITY
METAL SEAL MFCs
ELASTOMERIC MFCs
8160
8161
8162
8163
8165
8260
8262
8561
8564
8565
1551
1660
1661
1662
1663
1665
3161
3165
8100
8101
8105
3101
Three years
Three years
Two years
HIGH PURITY
METAL SEAL MFCs
HIGH PURITY
METAL SEAL MFCs
ELASTOMERIC MFCs
7360
7361
7364
5361
5365
180
7300
7301
7304
5301
Three years
Two years
Two years
Table 3. Warranties
If units are judged to be out of warranty, Celerity will notify the owner of replacement or repair costs
before proceeding. Factory service and repairs include a ninety-day warranty on all parts and labor.
Normal turnaround time is five working days, or less, on any standard range item returned for
warranty service.
MFCs that are repaired by anyone other than Celerity service centers during the warranty period
void their warranty.
Check our website at www.celerity.net to find your local service center.
15. WEB SITE TECHNICAL RESOURCES
Celerity provides several technical information resources on our website, including “The Basics of
Thermal Mass Flow Control”.
©2005 Celerity, Inc.
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16. APPENDICES
16.1
Connector Pinouts
MFC CARDEDGE CONNECTOR
1
2
3
4
5
6
8
9
10
A
B
C
D
E
F
Case Ground
Power Common
Output (0-5 VDC)
+15 VDC
Sensor Out
Common
Setpoint (0-5 VDC)
Signal Common
Signal Common
Valve Test Point
15 PIN "D" CONNECTOR (UDU15)
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Common
+15 VDC
Output (0-5 VDC)
Power Common
Case Ground
Valve Off
-15 VDC
Valve Test Point
Signal Common
Signal Common
Setpoint (0-5 VDC)
-15 VDC
REMOTE "D" CONNECTOR OPTION (UDU15)
H
I
J
Zero Alarm
Valve Off
MFM CARDEDGE CONNECTOR
1
2
3
4
5
6
8
9
10
A
B
C
D
E
F
Case Ground
Power Common
Output (0-5 VDC)
+15 VDC
Sensor Out
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Common
+15 VDC
Output (0-5 VDC)
Power Common
Case Ground
Valve Off
-15 VDC
Valve Test Point
Signal Common
Signal Common
Setpoint (0-5 VDC)
Signal Common
Signal Common
-15 VDC
H
I
J
15 PIN D CONNECTOR
9 PIN D CONNECTOR
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15 PIN "D" BROOKS CONNECTOR
(UDB15/ UDN15)
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Signal Common
Flow Out
Power Common
Valve Off
+15 VDC
-15 VDC
Valve Test Point
Setpoint (0-5 VDC)
Power Common
Signal Common
Case Ground
Setpoint Return
0-5VDC Flow Out
Output (4-20mA)
+24 VDC MFC Power
Setpoint (4-20mA)
Power Common
Flow Output Common
Valve Override
VTP
RS485 A+
RS485 A-
15 PIN "D" CONNECTOR (UDK15)
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
15 PIN "D" BROOKS SMART CONNECTOR
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
15 PIN "D" 4-20mA CONNECTOR (UDI15)
MKS Test Point
Flow Out
Valve Close
Valve Open
Power Common
-15 VDC
+15 VDC
Setpoint (0-5 VDC)
Optional Input
Signal Common
Signal Common
Chassis Ground
#199-001-0006 REV.F
+15 VDC
Output (4-20mA)
Power Common
Case Ground
Valve Off
+15 to +35 VDC Ext
Drv. (Option)
-15 VDC
Valve Test Point
Signal Common
Signal Common
Setpoint (4-20mA)
20 PIN HONDA CONNECTOR (UDH20)
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
Power Common
Output (0-5 VDC)
+15 VDC
VTP -15 – 0 VDC
Setpoint (0-5 VDC)
Signal Common
Signal Common
Purge/Close
-15 VDC
9 PIN "D" CONNECTOR (UDU9/UDT9)
1
2
3
4
5
6
7
8
9
Valve Off
Output (0-5 VDC)
+15 VDC
Power Common
-15 VDC
Setpoint (0-5 VDC)
Signal Common
Signal Common
Valve Test Point
9 PIN "D" STEC CONNECTOR (UDS9/UDF9/UDJ9)
1
2
3
4
5
6
7
8
9
©2005 Celerity, Inc.
Common
Zero Alarm
4/05
Purge/CloseOutput (0-5 VDC)
+15 VDC
Power Common
-15 VDC
Setpoint (0-5 VDC)
Signal Common
Signal Common
VTP -15 – 0 VDC
16
9 PIN "D" STEC CONNECTOR (UDV9)
1
2
3
4
5
6
7
8
9
Purge/CloseOutput (0-5 VDC)
+15 VDC
Power Common
-15 VDC
Setpoint (0-5 VDC)
Signal Common
Signal Common
VTP -10 VDC
9 PIN "D" STEC 7350 COMPATIBLE PINOUT
(UDM9/UDY9/UDZ9)
1
2
3
4
5
6
7
8
9
Purge/CloseOutput (0-5 VDC)
+15 VDC
Signal Common
-15 VDC
Setpoint (0-5 VDC)
AZ Alarm
VTP
AZ Disable
9 PIN "D" CONNECTOR (UDG9)
1
2
3
4
5
6
7
8
9
Valve Control
Output (0-5 VDC)
+15 VDC
Power Common
-15 VDC
Setpoint (0-5 VDC)
Signal Common
RS485 DX+
RS485 DX-
DEVICENET CONNECTOR
1
2
3
4
5
Drain
V+ 11-25 VDC
VCAN-H
CAN-L
9 PIN "D" PORTER CONNECTOR (UDR9)
1
2
3
4
5
6
7
8
9
Open
Output
Setpoint
Power Common
Valve Test Point
-15 VDC
+15 VDC
Signal Common
Shield
9 PIN "D" STEC UDS CONNECTOR (UDQ9/UDW9/UDO9)
W/INTERCONNECTED GROUNDS
1
2
3
4
5
6
7
8
9
Purge/CloseOutput (0-5 VDC)
+15 VDC
Power/Signal Common
-15 VDC
Setpoint (0-5 VDC)
Power/Signal Common
Power/Signal Common
VTP -15 – 0 VDC
9 PIN "D" PROFIBUS CONNECTOR (UDP9)
1
2
3
4
5
6
7
8
9
©2005 Celerity, Inc.
Protective Ground
Reserved for Power
Recv/Transmit-Data-P
Control-P
Data Gnd.
Voltage Plus
Reserved for Power
Recv/Transmit-Data-N
Control-N
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16.2 Setting the MFC/MFM Zero
MFC zero must be set correctly and consistently to avoid any flow inaccuracies that might
be present in a mass flow controller or meter.
16.2.1 Background
It is normal to experience zero drift in the flow meter output during the life of an mass flow
controller (MFC). MFC users should understand what MFC zero offset is and how to adjust
for its drift. When an MFC is first installed, it is normal to re-zero the device to ensure the
best results. "MFC Zero" is the signal produced by the mass flow sensor when gas is
not flowing. This signal is measured at the output terminal of the MFC with respect to the
signal common terminal. The MFC zero must be set such that the output reads 0.0% when
the MFC is not flowing any gas. Zero offset is a major contributor to flow inaccuracies
particularly at lower control setpoints, where the zero offset error becomes a large
percentage of the total flow signal. Because of this problem, it is imperative that the MFC
zero be set correctly and consistently. There are two common errors that can result in
errant zeroing.
16.2.2 Gas Inlet Pressure
The inlet pressure is an often overlooked source of potential zero error on MFCS. Many
high density, low viscosity gasses exhibit slight changes in zero output as a function of
MFC inlet pressure. MFCs flowing gasses such as tungsten hexafluoride and many fluoro
carbons are especially sensitive to this problem. A simple way of minimizing this problem
is to keep the inlet pressure as low as possible.
Note: This does not apply to pressure buffered "reverse flow" controllers as the pressure
sensitive portion of the MFC is on the downstream side of the MFC.
16.2.3 MFC control valve leakage
Because the MFC is not intended to be used as a positive shut-off device, the MFC valve is
not guaranteed to be leak tight when the valve is closed. What this means is that setting
the MFC zero while there is a pressure differential across the MFC can be a problem
because the MFC will be measuring the valve leakage. Setting the zero under these
conditions will result in a calibration error. In order to minimize flow errors, it is suggested
that the user follow the zeroing procedure below.
16.2.4 Factory Suggested Zeroing Procedure
1. Mount the MFC in the intended physical orientation. The gas delivery system should be
at the intended operating temperature.
2. Insure the MFC flow path is filled with process gas. If the MFC was recently purged or
newly connected to the system, run process gas for 5 to 10 minutes. Alternatively,
evacuate the MFC using a vacuum pump then run process gas long enough to full the
MFC and gas line.
©2005 Celerity, Inc.
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3. While running process gas at the normal operating pressure, close the down stream
isolation valve.
4. Place the MFC in purge mode or give it a command to flow 100% setpoint. Monitor the
indicated flow until it stabilizes near zero.
5. Close the upstream isolation valve.
6. Give the MFC a zero percent flow command to close the control valve.
7. Let the MFC warm up and stabilize for 60 minutes.
8. Monitor the zero output to insure it has stabilized.
9. ANALOG MFC’s - Adjust R13, Zero Potentiometer until desired zero value is
established.
10. DIGITAL MFC’s - Activate the zero adjust routine by one of two methods:
10.1 Depress the zero momentary contact switch on the top of
the MFC.
10.2 Through the RS 485 digital interface: Class0x68, Instance
1, Attribute 0xBA. Send a write command with an 8 bit
integer value of 1.
11. Wait 30 seconds while the MFC runs the zero routine. Do not send any commands to
the MFC or disturb the inlet pressure.
Note: The status of the zero service routine can be monitored through the RS485
digital interface. Read the Class 0x68, Instance 1, Attribute 0xBA. The MFC
will return an eight bit integer value of 1 while it is in process of running the zero
service routine and return an eight bit integer value of 0 when the zero service
routine has been completed.
12. Read the zero output. If it is not 0% FS +/- .05%, then repeat from step 9.
16.2.5 Conclusion
Improperly zeroed MFCs can cause significant calibration errors and result in process
inconsistencies. Following the above zeroing procedure should eliminate the most often
overlooked sources of zero adjustment error. If you have any questions regarding the
adjustment of MFC zero or any technical questions, please call the Celerity Applications
Engineering Department at (714) 921-2640 or visit our website at www.celerity.net.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
19
16.3 9000 Series Supplement
Metal Seal High Temperature Liquid & Solid Source Vapor Mass Flow Controllers
Models 9660, 9661, 9860, 9861, and 9865
16.3.1 Installation Instructions
16.3.1.1
Unpacking
- Verify that the controller was not damaged in transit.
- The following items are part of the 9000 Series controller:
- 9000 Series controller
- 9000 Series remote electronics
- High temperature cable assembly, length 3 ft. P/N 955-000-0003
- Remote clamp bracket P/N 860-004-1015
- Optional 15 pin “D” to 20 pin card edge adapter. P/N 200-104-1000 (Model 9660,
9860, 9861 only)
16.3.2 Site Preparation
Thoroughly clean, dry, and purge all piping associated with the entire flow control system
prior to installing the controller.
16.3.3 Positioning and Mounting the Controller
The controller must be positioned so that the gas flow is in the direction of the arrow
stamped on the controller base. The High Temperature controller is designed and
calibrated to be mounted in the Horizontal position only. Match the mounting holes on the
bottom of the flow controller with those on the mounting surface.
Using two #8-32 screws, mount the flow controller. See drawings 990-111-9660U or
990-111-9865U for mounting hole positions.
The Remote electronics must be mounted outside of the high temperature area. The
controller and Remote electronics are connected through the high temperature cable
assembly. Using the remote clamp bracket, mount the Remote electronics in any position
that is convenient, within reach of the high temperature cable. Longer length cable can be
specially ordered. The temperature limit of the electronics is 0-50°C (32°F-122°F).
16.3.4 Connect to Gas Supply Line
Once the controller is correctly mounted, connect the inlet and outlet VCR fittings to the
gas supply line.
1. Install new gaskets compatible with the gas to be used.
2. Tighten nut finger tight.
3. Tighten in accordance with the fitting manufacturers specifications.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
20
16.3.5 Connect to Power Supply
- The 9000 Series uses a Cardedge plus either 15 pin or 9 pin “D” connector for power,
flow, and control signal lines, unless it is a DeviceNet model.
- If you are using a power supply other than one from Unit Instruments, check the pin
assignments, making sure they match those in Figure 1.
- Once the power supply is securely plugged in, the flow controller should be warmed up
for 60 minutes before any other operation.
Figure 1. 9000 Series 15 pin D Connector Pinout
Figure 2. 9000 Series Cardedge Connector Pinout
NOTE: The Model 9865 DeviceNet versions use a mini 5 pin connector that is compliant
with DeviceNet specifications (see Pinouts below).
Figure 3. 9000 Series DeviceNet Connector Pinout (Male)
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
21
Figure 4. 9000 Series Remote “D” Connector Option Pinout (UDU15)
16.3.6 Purge
Prior to introducing process gas, insure that the MFC and gas lines have been thoroughly
purged with clean, dry N2.
16.3.7 Zero Check (For High Temp Controllers)
The electrical zero should be regularly monitored and adjusted accordingly, using the
zero adjustment.
16.3.7.1
Ensure that the flow controller has been ON for more than 60 minutes
and the flow controller is at its operational temperature.
- The High Temperature controllers have a calibration temperature
window that is ±15°C from the nominal operating temperature.
16.3.7.2
Shut OFF the inlet and outlet gas supply lines to the flow controller,
making sure that no gas is flowing through the controller.
16.3.7.3
The flow signal output should read a steady 0. If the output is not within
±0.5%(±25 mV) of 0.0 V, then remove the small inspection label on the
Remote electronics and press the Zero button.
- For best performance the Zero should be within ±0.2% (±10 mV).
See drawing 990-111-9660U for zero adjustment access.
Note: For remote readouts, including analog to digital converters, ensure that the
readouts match the 9000 Series signals. Adjust the remote readout zero and
full-scale to match the 9000 Series signals.
16.3.8 Calibration Check (For High Temp Controllers)
Calibration must be checked by flowing gas through a calibration reference and then
through the mass flow controller to verify correct readout.
Celerity recommends that all High Temperature metal seal controllers be returned
to Celerity for re-calibration.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
22
16.3.9 Maintenance
16.3.9.1
Service
Any precision instrument such as a mass flow controller requires occasional servicing. It
is especially important to perform this service if the flow controller has been operating
for an extended period of time or has been subjected to corrosive gases or other gases
which leave excessive residue. If non-reactive gases are used, service your flow
controller annually. If reactive gases are used, the flow controller should be serviced
every six months. Due to the high service temperature, low particle count, and high leak
integrity all High Temperature metal seal flow controllers must be returned to
Celerity for service.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
23
16.4 Troubleshooting Guide
16.4.1 Determining Whether or Not to Remove the MFC, Always contact Celerity Technical
Support before removing the MFC.
- Prior to replacing an MFC thoroughly purge the system or replace/re-clean contaminated
components.
NO GAS FLOW
WHAT TO DO?
Is the gas supply turned on?
Check the shut-off valve and the pressure readout.
Is the regulator on and at the correct operating pressure?
Typically 25 psia.
Are any upstream or downstream isolation valves closed, either by the system
Verify that the pneumatic valves are operating.
or because of failure?
Is the MOD LED on the MFC lit solid green?
Look at the top of the unit.
Is the NET LED on the MFC lit solid green?
Look at the top of the unit.
If not, cycle power to the unit or re-boot.
Is the commanded setpoint from the system “0%”?
Use the tool software. Verify interlocks.
Has the MFC been commanded off by an active “valve close” input?
Use the tool software. Verify interlocks.
FLOW OUT-OF-RANGE
WHAT TO DO?
Is the gas inlet/outlet pressure differential either too high or too low?
Verify that the pressure is correct for this gas and
• If the differential is too high, MFC valve voltage or drive will be zero or
range, typically 25 psia.
abnormally low for the setpoint.
Is the MOD LED on the MFC lit solid green?
Look at the top of the unit.
Is the setpoint correct for the required flow?
Use the tool software to verify this.
Is the MFC calibrated for the particular gas?
Check the MFC label. Run Flow Verify.
Is the MFC zero correct? (If not refer to the Zeroing Procedure.)
Verify Leak Check Rates are OK.
NO GAS CONTROL; FLOW IS AT OR ABOVE MAXIMUM
WHAT TO DO?
Is there too much gas pressure across the MFC?
Verify that the pressure is correct for this gas and
range, typically 25 psia.
Is a system “valve open” or “purge” input activated?
Use the tool software to verify this.
Is the setpoint correct for the required flow?
Use the tool software to verify this.
FLOW UNABLE TO REACH A SETPOINT (When the setpoint is raised
WHAT TO DO?
beyond this point, the MFC remains at some value lower than the setpoint.)
Is the gas inlet/outlet pressure-differential sufficient?
Verify that the pressure is correct for this gas and
• If the differential is too low, the MFC valve voltage or drive will be at its
range, typically 25 psia.
maximum value when the setpoint is raised above the point where the flow
will increase.
• Adjust regulator to the proper operating pressure. Verify that the pressure is
correct for this gas and range, typically 25 psia.
Is the MFC calibrated for the gas flowing?
Check the MFC label. Run Flow Verify.
• If not, replace the MFC with properly calibrated unit.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
24
NO GAS FLOW CONTROL BELOW SOME SETPOINT (When the setpoint is
WHAT TO DO?
lowered below this point, the MFC signal remains at some value higher than
the setpoint.)
Is the gas inlet/outlet pressure differential too high?
Verify that the pressure is correct for this gas and
• If the differential is too high, MFC valve voltage or drive will be at its
range, typically 25 psia.
minimum value when the setpoint is lowered below the point where the flow
will decrease.
• Adjust the regulator to the proper operating pressure.
Is the MFC valve leaking?
Run the Leak By procedure.
• Possibly caused by contamination
• Test the valve for leak integrity and replace if leaking.
GAS FLOW OR MFC READING OSCILLATES
WHAT TO DO?
Is the MFC calibrated for the gas flowing?
Check the MFC label. Run Flow Verify.
• If not, replace MFC with properly calibrated unit.
• Most nitrogen calibrated MFCs will oscillate on hydrogen or helium.
Is there too much gas pressure across the MFC?
Verify that the pressure is correct for this gas and
• Adjust regulator to proper operating pressure if necessary.
range, typically 25 psia.
Are the inlet and outlet pressures steady?
• Check inlet pressure.
• If erratic, a faulty pressure regulator can make an MFC appear to oscillate.
Verify that the pressure is correct for this gas and
range, typically 25 psia.
MFC DOES NOT READ ZERO WHEN GAS IS SHUT OFF
WHAT TO DO?
Is the differential pressure across the MFC really zero?
Verify that the pressure is correct for this gas and
• Equalize the pressure across the MFC by opening the control valve briefly.
range, typically 25 psia.
• Perform a zero adjustment, using tool software.
(If the unit has been contaminated the valve may
(If not refer to the Zeroing Procedure.)
Is the MFC configured properly in the tool software?
not be able to close, and therefore it will not zero.)
Use the tool software to verify this.
Is the MFC mounted in the proper attitude?
See the MFC side can label; look for HOV (Vertical)
• Also, for best results, calibrate the MFC in the same attitude in which it will
or HOS (Horizontal).
be operating.
©2005 Celerity, Inc.
#199-001-0006 REV.F
Check the part number or “MFC Description”.
4/05
25
16.5 Maintenance
MOD (Module) Status LED
LED
INDICATES
Not lit
No power to the MFC.
WHAT TO DO
Check the voltage at the cable connector across pins 2 and 3.
Verify that the voltage is 11-25 Vdc.
Not lit
Damaged/Defective LED
Contact Kinetics Technical Support.
Not lit
MFC Power Supply problem.
Contact Celerity Technical Support.
Flashing
The device is in Self-test
The Device is operating normally if this flashing green/red lasts for no more
Green/Red
mode.
than five seconds.
Steady Red
The microprocessor has
Contact Celerity Technical Support.
failed.
Steady Green
The device is powered up.
This is normal operating mode.
NET (Network) Status LED
LED
INDICATES
Not lit
No power to the MFC.
WHAT TO DO
If both the Mod and Net LEDs are out, check the voltage at the cable
connector across pins 2 and 3. Verify that the voltage is 11-25 VDC.
Not lit
Damaged/Defective LED
Unplug and plug the MFC cable (performing a hard reset), or send the tool
command to soft reset the MFC. Verify that the LED is flashing red/green.
If not, contact Celerity Technical Support.
Not lit
Not lit
A single MFC is the only
Having the NET Status LED not lit is normal operating mode for a single
connection to the bus.
device on the system controller.
There is a tool connection
Verify the physical condition of the system controller connections.
issue.
Flashing
The device is in Self-test
Green/Red
mode.
Flashing Green
Flashing Green
Flashing Green
This is normal operation for the Self test mode.
The device is in Standby
This is normal operation. It is waiting for the MFC to be connected to the
mode.
tool.
The MFC and tool are not
Verify that the MFC has been set up with the MAC ID that the tool is
communicating.
expecting.
The System Controller is not
Reconnect the system controller bus.
functioning (it is off the bus).
Steady Green
The device is operating
This is normal operation.
normally and communicating
properly.
Steady Red
There are duplicate MAC Ids.
Correct the MAC Ids. Unplug, and plug the MFC cable (to create a hard
Steady Red
The baud rate of the MFC is
Switch setting: 2 (for 500K).
different from the rest of the
Reset the baud rate to be consistent with the rest of the devices on the bus.
reset), or send a tool command to soft-reset the MFC.
bus.
Steady Red
Flashing Red
There is a failure in the
Verify the integrity of the physical connection to the bus.
communication link.
Recycle the power to reinitialize the MFCs.
The Poll I/O connection timed
The System Controller may attempt to reestablish communication (tool
out.
software). Verify that the software timing is correct for the number of
devices being polled.
Flashing Red
The software does not have
Revise the timing in the System Controller.
enough time to poll the
number of devices on the
bus.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
26
16.6 Manufacturing, Sales, and Service Locations
UNITED STATES
Benelux (Sales)
Celerity
Tel: +32 5531.0240
Fax: +32 5531.0244
Mobile: +32 474.905.007
Sales: [email protected]
Austin, TX (Sales & Service)
Celerity
200-C Parker Drive, #600
Austin, TX 78728
Tel: 512-247-9092
Fax: 512-246-5590
Israel (Sales)
AVBA Engineers Ltd.
Ramat Gabriel Industrial Park
P.O. Box 690
Migdal Haemek,10500 Israel
Tel: +972 66.442575
Fax: +972 66.442577
Beaverton, OR (Sales & Service)
Celerity
9665 SW Allen Blvd., Ste. 113
Beaverton, OR 97005
Tel: 503-643-5564
Fax: 503-520-8834
Italy (Sales)
Microcontrol Electronic s.r.l.
Via Guiba 11
20132 Milano, Italy
Tel: +39 02.28314420
Fax: +39 02.2871777
Tempe, AZ (Sales)
Celerity
1320 West Auto Drive
Tempe, AZ 85284
Tel: 480-763-2134
Fax: 480-763-2210
Norway & Iceland (Sales)
NorGruppen As
Civ.Ing Helge Ingeberg AS
Gamle Drammensvei 94, Lierporten
PO Box 100, N-3420 Lierskogen, Norway
Tel: +47 32.8535.50
Fax: +47 32.8535.55
Milpitas, CA (Corporate)
Celerity
1463 Centre Pointe Drive
Milpitas, CA 95035
Tel: 408-946-3100
Voice: 408-934-6301
Russia (Sales)
Cheliabinska str., 11-2
Moscow 105568, Russia
Tel & Fax: +7 095.308.0523
Yorba Linda, CA (Sales & Service)
Celerity
22600 Savi Ranch Parkway
Yorba Linda, CA 92887
Tel: 714-279-3500
Fax: 714-921-0804
South Africa (Sales)
Unit Instruments S.A.
29 Marina Crescent
Panorama Parow 7500
Cape Town, South Africa
Tel & Fax: +27 21.923894
EUROPE
Europe Head Office
Ireland & UK (Sales & Service)
Celerity Fluid Systems Ireland Ltd.
Ballycoolin Business Park
Blanchardstown, Dublin 15, Ireland
Tel: +353 18.247.100
Fax: +353 18.247.101
Sales [email protected]
ASIA
China, Shanghai (Sales and Service)
SCH Electronics Shanghai Co. Ltd.
No. 150, Cailun Road
Zhangjiang Industrial Park
Pudong New Aera
Shanghai, China 201203
Tel: +86 21.3895.0181
Fax: +86 21.5895.2569
Germany & Austria (Sales)
Celerity
Tel: +49 811.9988.770
Fax: +49 811.9988.771
Mobile: +49 160.9497.7238
Sales: [email protected]
China, Tianjin (Sales and Service)
Asian Power Technology Co., Ltd.
Teda Group, Heda Industrial Zone
Branch 4 Xing-Hua Street
Xi0Qing Economic Development
Jingang Road
Tianjin, China 300381
Tel: +86 22.83966095
Fax: +86 22.83966093
Germany (Service)
ESL Elektronik GmbH
Am Mitterfeld 35
D-85622 Weissenfeld, Germany
Tel: +49 89.9049.0381
Fax: +49 89.9049.0382
France, Switzerland, Spain & Portugal (Sales)
Celerity
Tel: +33 474.182.544
Fax: +33 474.182.543
Mobile: +33-689-872-027
Sales: [email protected]
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
Japan, Osaka (Sales)
Kinetics (Japan) K.K.
Sumitomo Seimei Shin-Osaka Kita Bldg.
8th Floor, 4-1-14 Miyahara
Yodogawa-ku
Osaka-shi 532-0003, Japan
Tel: +81 6.6150.1581
Fax: +81 6.6150.1606
Japan, Yokohama (Sales)
Kinetics (Japan) K.K.
5F, 3-19-5 Shin-Yokohama Kouhokuku,
Yokohama-shi,
Kanagawa-ken, 222-0033, Japan
Tel: +81 45.477.3521
Fax: +81 45.477.3526
Japan, Kashima (Service & Manufacturing)
Kinetics (Japan) K.K.
3 Hikari, Kashima-shi
Ibaragi 314-0014, Japan
Tel: +81 299.84.3188
Fax: +81 299.84.3189
Korea (Sales and Service)
Celerity Korea, Inc.
RA-406 Sungnam APT Factory
Sungnam, Kyungki-do, 463-070
Korea
Tel: +82 31.708.2522
Fax: +82 31.708.2524
Singapore (Sales & Service)
Celerity Singapore Pte. Ltd.
BLK 164 Kallang Way, #07-28/29
JTC Bldg.
Singapore 349248
Tel: +65 6744.7041
Fax: +65 6744.1867
Taiwan, Taipei (Sales)
SCH Electronic Co., Ltd.
7th Fl., No. 128, Sec. 3
Ming Shen E. Rd.
Taipei, Taiwan 10445
Tel: +886 22.713.6090
Fax: +886 22.717.2072
Taiwan, Hsinchu (Sales and Service)
SCH Electronic Co., Ltd.
No.169-2 1 section Kang Le Rd
HsinFeng Hsiang, HsinChu, Hsien, Taiwan
Tel: +886 3.559.0988
Fax: +886 3.559.2220
Taiwan, Tainan (Sales & Service)
SCH Eleectronic Co., Ltd.
No. 139 Min-Tsu Rd.
Hsin-shi, Tainan County, Taiwan
Tel: +886 6.599.9889
Fax: +886 6.599.9816
India
Xytek Corp.
407 Sai Pooja Chambers
P-58, Sector-11, CBD Belapur
New Bombay 400614, India
Tel: +91 22.757.3611
Fax: +91 22.757.1912
27
16.7 AUTO-ZERO FEATURE (FOR ANALOG MASS FLOW CONTROLLERS)
16.7.1 Introduction
Celerity MFCs guarantee a zero drift of less than .6% per year, essentially eliminating the
need for the Auto Zero feature. However it is still offered as an option. The Auto-Zero
feature eliminates zero drift as a contributor to long-term process non-repeatability. It
automatically and continuously re-zeros the MFC between process runs. This reduces the
need for frequent calibration, a procedure which can be both costly and time-consuming.
This feature can identify an MFC which is in need of recalibration or repair, and can be
used as a trigger for a system alarm to the operator prior to a process run. (See Figure
#2)
The Auto-Zero feature eliminates zero drift thus maximizing process repeatability. The
significance of this enhanced repeatability is very dramatic at the low end of the MFC
ranges, as shown in Figure 1, where a ±1% zero variance can result in a ±10% error at
10% of full scale.
VOLTAGE
OUTPUT
+1%
100%
-1%
+2%
50%
-2%
+10%
10%
-10%
0%
10%
50%
100%
GAS FLOW
Figure 1. Zero Variance of +/- 1% the effects
*An alarm may be triggered to indicate that the calibration of this MFC should be evaluated.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
28
16.7.2 Operation
Start of Auto-Zero Sequence
The Auto-Zero function is activated by a Valve Off signal from pin J on the MFC. This
signal can be triggered by either manual shutoff or the Auto-Shutoff.
Start Delay
When the off signal is received, the Auto-Zero initiates a 90 second flow stabilization
delay.
Operating Limits
Following the 90 second delay, the Auto-Zero continuously compares the output of the
MFC meter with DC Common and makes any necessary alignment of the MFC meter by
adjusting a digital potentiometer. This comparison/adjustment process typically requires
30-60 seconds for completion.
Operating Limits
If the variation between the MFC meter output and DC Common is greater than 4 to 5%,
the Auto-Zero will not zero but will display the differential between the true zero and the 4
to 5% limit. This difference and the Auto-Zero alarm indicates the need to check
calibration or service of the MFC.
Auto-Zero Hold
When the valve is turned on to resume flow, the Auto-Zero reference is stored in memory
and maintained through subsequent operations until the MFC is turned off again. (Any
time the MFC is unplugged the Auto-Zero procedure should be re-initiated before use in
process control.)
System Standby
Most systems are programmed to shutoff the MFC during Standby conditions. This
activates the auto zero continuously until the process is turned on. In addition, most
systems return to standby if there is a loss of power and the system is powered back up.
This standby condition automatically activates the auto zero to zero the MFC for process
running.
Automatic Zero Frequency Requirements
It is recommended that the MFC with Auto-Zero be turned off and taken through above
Steps #2-3 at a typical frequency of daily to weekly to ensure its best performance.
Automatic Zero Alarm
The alarm indicates that zero has drifted beyond the operating limits of the Auto-Zero. The
Auto-Zero alarm will indicate to the system that there is a need to check the calibration.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
29
16.7.3 Theory of Auto-Zero Operation
The Auto-Zero feature in CELERITY Mass Flow Controllers overcomes zero drift by
automatically adjusting the MFC meter to electrical zero during off-cycles between process
runs. A stable zero enables operators to achieve repeatability of ±1% even in very low flow
operations (±0.2% of full scale). The following tabulation and graph demonstrate the
critical effect of zero drift on repeatability:
Setpoint
_1%
Error if +
Zero Offset
_ 2%
Error if +
Zero Offset
Maximum with
Auto-Zero
100% FS
_ 1%
+
_ 2%
+
_ 0.2%
+
50% FS
_ 2%
+
_ 4%
+
_ 0.4%
+
20% FS
_ 5%
+
_ 10%
+
_ 1.0%
+
10% FS
_ 10%
+
_ 20%
+
_ 2.0%
+
1% FS
_ 100%
+
_ 200%
+
_ 20.0%
+
*Such drift may vary from MFC to MFC
Figure 3. Simplified Logic of the Auto-Zero Circuitry. Flow Diagram
The Auto-Zero circuitry is triggered by a signal from Valve-Off command (pin J) or zero
setpoint for automatic shutoff (A) feature models of the MFC which initiates a 2 minute
delay. After the delay the Auto-Zero compares the output of the MFC meter to DC
Common, determining the direction and degree of variance. The Auto-Zero then executes
an incremental or decremental step of its digital potentiometer (as determined) and
compares the new reading to zero. This continuous incremental step-and-compare cycle
continues indefinitely.
The operator may observe the progress of this cycle by monitoring the readout of the MFC
meter. A stable zero readout is typically achieved in 30-60 seconds, at which point the
MFC is ready for operation. After a stable zero (±0.2%) is achieved, the operator may turn
on the MFC. This action disconnects pin J, disabling the Auto-Zero circuitry, and
maintaining the new zero setting.
If the meter output never achieves zero, the MFC zero variance may have exceeded the
correction limit of the Auto-Zero circuitry (±4-5% of full scale). The Automatic Zero alarm
will then indicate the need for service or re-calibration of the MFC.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
30
16.7.4 Operational Test
1.
2.
3.
4.
Plug in the MFC with the gas off and the MFC turned on.
Allow the MFC to warm-up for 60 minutes.
Note what zero reading is displayed.
Turn off the MFC, using either manual (pin J, Input=0 VDC) or automatic shutoff (zero
setpoint of models with Auto Shutoff feature). Verify that no gas is flowing when the
MFC is off. This is critical to the accurate and repeatable operation of the automatic
zero feature.
Celerity suggests that positive isolation valves be installed upstream and downstream of the
MFC to ensure no gas flow during Auto-Zero operation cycle. If the MFC is being used in a
vacuum process we recommend that zeroing take place under vacuum conditions to better
ensure that there is no flow.
If the MFC is installed in the vertical position, the gas should either be evacuated or the
pressure reduced to atmosphere. Celerity recommends this because, some high density
gases exhibit a thermal siphon effect within the MFC during standby. Thermal siphon
produces internal recirculating flow within mass flow controllers due to heating of the gas.
This effect will cause the Auto-Zero to offset in error. Current Celerity MFCs with the new
sensor will not exhibit this offset
5. Wait 3 minutes to allow the Auto-Zero to complete the zeroing process.
6. Confirm that the reading is zero (±0.2% of full scale).
16.7.5 Auto-Zero Specifications
Performance
Accuracy..........................±0.2% of full scale
Time Requirement
Warm-Up......................... 60 minutes
Auto-Zero stabilization...... 2 min delay between turn on and Auto-Zero function
Auto-Zero operation..........continuous comparative cycle for 30-60 seconds minimum
after valve off or until the MFC is turned on
Operating Period.............. after MFC cutoff and 90 sec. delay continuous operation until
the MFC is turned on
Minimum Operating Time..2 to 3 minutes depending on offset of true zero
Operating Limits............... ±4-5% of full scale
Auto-Zero Alarm...............Indicates Auto-Zero at operating limits.
Transistor close: Pin I B/C
Ambient Temp. Range...... 0°-50°C (32°-122°F)
Dimensions......................1.6" x 1.1" x 0.1"
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
31
16.7.6 Troubleshooting
Auto-Zero boards should be either replaced or repaired at the factory. The following is a
list of potential sources of operator difficulty when improperly utilizing the Auto-Zero
feature. Each item on the checklist should be investigated during troubleshooting:
16.7.7 Checklist
1.
2.
3.
4.
5.
6.
7.
Was the MFC warmed up for 60 minutes prior to zeroing?
Is the MFC being operated in the position for which it was calibrated?
Was the Auto-Zero allowed the 90 second delay for stabilization?
Is the setpoint above 1% of full scale (for units with Auto Shut-off(A))?
Was the Auto-Zero board installed correctly?
Is there gas flowing when the MFC is off?
Is the MFC meter zero beyond the ±4-5% range of automatic zero and in need of repair
or recalibration?
8. Has the Auto-Zero MFC been off-cycled regularly to ensure best performance?
9. Is the Auto-Zero allowed to operate for a minimum of 3 minutes to re-establish zero?
16.7.8 Disabling Auto-Zero to Establish True Zero
1.
2.
3.
4.
5.
6.
Apply a setpoint of 2% or more.
Turn on the MFC (pin J open circuited or 5VDC applied)
Isolate gas flow or evacuate the MFC.
Unplug the MFC
Replug the MFC and allow 10 min. warm-up (assuming previous 60 min. warm-up)
Establish the normal operating temperature and attitude of the MFC.
The true zero should now appear on the flow readout. If the true zero is beyond the
operating limits (±4-5%), then the following re-zero procedure can be used. (Re-zeroing is
advised if true zero is more than ±1% out.)
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
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Figure 6. Zero Pot Location Adjusted with no pressure applied to the unit
16.7.10 AUTO-ZERO FUNCTIONAL TEST
The Auto-Zero control may be tested by intentionally adjusting true zero to -1% or +1%,
turning off the MFC (zero setpoint or 0 VDC applied to pin J) and observing the Auto-Zero
compensation after the two minute delay.
After the test is complete reset the true zero to zero output utilizing the same procedure
described in the section Auto-Zero Out of Range Adjustment, re-zeroing true zero.
16.7.11 AUTO-ZERO ALARM FUNCTIONAL TEST
When the true zero is outside of the range of the Auto-Zero (±4-5% F.S.) the Auto-Zero
alarm should be activated. The true zero may be adjusted outside of this range to test the
alarm on/off.
©2005 Celerity, Inc.
#199-001-0006 REV.F
4/05
33
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