"user manual"

"user manual"
D08-2F, D08-3F, D08-4F
Flow Readout Boxes
INSTRUCTION MANUAL
Version April,2010
A NOTE TO OUR CUSTOMERS
Dear customer,
Thank you for purchasing SEVENSTAR D08 series Flow Readout Boxes.
This user manual is important when installing and doing maintenance. Please keep it carefully.
We strongly recommend that you read this manual thoroughly before you starting to use the product. This user manual
introduces the important issues including the proper and safe use of the products.
And please notice the words and section with the symbol . Not in accordance with the user manual for the use of
property caused by loss or personal injury, SEVENSTAR may not be responsible.
If you require any additional information or assistant of Sevenstar D08 series Flow Readout Boxes. Please feel free to
contact your local Sevenstar Sales Agent or Sevenstar Customer Service at:
(8610)- 6436 2925.
Yours sincerely,
Sevenstar
CONTENTS
D08-2F, D08-3F, D08-4F Flow Readout Boxes
1.
APPLICATIONS & FEATURES.........................
1
6.1
Preparation.......................................................
8
2.
SPECIFICATIONS...............................................
1
6.1.1 Control Buttons................................................
8
3.
FRONTAL & BACK OPERATION PANELS.....
2
6.1.2 Power Lead Connection...................................
9
4.
STRUCTURE INSTRUCTION............................
3
6.1.3 Control Line Connection.................................
9
4.1
±15V Power Supply............................................
3
6.2
Operation Method............................................
9
4.2
+5.00V Nominal Power Supply............................
3
6.2.1 Turn On............................................................
9
4.3
Displayer..............................................................
3
6.2.2 Zero Adjustment..............................................
9
4.4
Valve Controller...................................................
4
6.2.3 Valve Controller Setting..................................
9
4.5
Zero Potentiometer...............................................
4
6.2.4 Setting..............................................................
9
4.6
Setting Potentiometer...........................................
4
6.2.5 Turn Off..........................................................
9
4.7
Power Supply Switch...........................................
4
7.
Parameter Setting.............................................
9
4.8
Power Supply Connector......................................
4
7.1
Range Selection...............................................
10
4.9
Fuse .....................................................................
4
7.2
Range Adjustment ...........................................
10
4.10 Setting Selection...................................................
4
7.3
Radix Point Adjustment...................................
10
4.11 MFC “D” Connector ...........................................
5
8.
MAINTENANCE............................................
10
4.12 External Control Connector..................................
5
8.1
Internal Potentiometer Adjustment..................
10
4.13 Nameplate............................................................
5
8.2
Grounding Problem.........................................
10
5.
INSTALLATION & CONNECTION...................
5
8.3
Substitution.....................................................
11
5.1
Dimension............................................................
5
9.
PRODUCTION SELECTION..........................
11
5.2
MFC Connection..................................................
6
9.1
Type Selection ................................................
11
5.3
External Control Connection................................
7
9.2
Order form.......................................................
12
6.
OPERATION PROCEDURE...............................
8
D08 SERIES FLOW READOUT BOXES
D08-2F, D08-3F, D08-4F
Flow Readout Box
1. APPLICATIONS & FEATURES
Flow Readout Boxes provide operating power supply, operating control, flow setting and flow digital display for
the mass flow controller (MFC) and the mass flow meter (MFM). D08 series of Flow Readout Boxes could directly
connected with D07 series MFC or MFM without any change. And it can also be used for other models of MFC or
MFM.
With standard desk-style section bar chassis, D08-2F, 3F, 4F Flow Readout box can control 2, 3 or 4 MFCs (or
MFMs). And each channels have the independent displays and control potentiometers.
2. SPECIFICATIONS
Table1. Technical Specifications of D08-2F, D08-3F & D08-4F Flow Readout Box
No.
Items
1
Output Power
Supply
Nominal Power
Supply
Power Supply
Max
Consumption
Input & Output
Signal
Dimension (mm)
2
3
4
5
6
7
8
Weight (kg)
Control Channels
Display Number
D08-2F
+15V±3%
-15V±3%
D08-3F
300mA
600mA
+5.00V±0.1%
D08-4F
+15V±3%
-15V±3%
5mA
+5.00V±0.1%
~220V±10% 50Hz
or
600mA
1.2 A
10mA
~110V±10% 60Hz
25W
45W
0 ~ +5V
4.2
2 MFCs/MFMs
2 Displayers
Standard: 440×100×220
Max: 440×115×284
4.3
3 MFCs/MFMs
3 Displayers
4.4
4 MFCs/MFMs
4 Displayers
Page 1 of 12
3.
FRONTAL & BACK OPERATION PANELS
(Figure 1~3)
Displayer
Power Switch
Valve Controller
Set
Range Adjustment
Radix Point Set
AC Power
MFC D Connector
Fuse
INT & EXT Setting Selection
EXT Control Connector
Figure 1. Frontal & Back Operation Panels of D08-2F
Figure 2. Frontal & Back Operation Panels of D08-3F
Page 2 of 12
220VAC / 110VAC
Figure 3. Frontal & Back Operation Panels of D08-4F
4.
4.1
STRUCTURE INSTRUCTION
±15V Power Supply
Composed by three-terminal integrated stabilized modules, ±15V power supply with the simple connection, high
stability and reliability are available as well as over-heat and over-load protections in the integrated stabilized
electric circuit.
4.2 +5.00V Nominal Power Supply
From the +5.00V nominal power supply, the 0~5V voltage output which is adjusted by its set potentiometer can be
used for controlling MFCs. Because of the soft-start circuit, the voltage will rises gradually from 0 to +5V for
avoiding the overshoot of MFC responding. The time of soft-start will cost 20 seconds approximately.
4.3
Displayer
3 and 1/2 numbers panel can display the readout from MFC (The maximum value: 1999). Flow rate can be
displayed by “SCCM”, “SLM” or “%FS”. Normally, the default flow range and unit of Flow Displayer will be set
to the user want to. If the user cannot give MFC flow specifications, the default will be set as %FS. The SLM and
SCCM LBD in the frontal panel will indicate the flow unit. Two LBD off means that flow unit is %FS. The radix
point, unit of every channel could be adjusted respectively.
Page 3 of 12
4.4
Valve Controller
Valve Controller is used for selecting working status of MFC. When MFC is operated normally, it should be
“Valve Control”. If MFC valve need to be full opened, it should be “Purge”. MFC valve will be closed if it is
“OFF”. Caution: This function can be only available for D07 series MFC without any problems. For other MFC
products, please do NOT connect “ Valve Control” pin.
4.5 Zero Potentiometer
“Zero Potentiometer” can only adjust zero in a small range for D07 series MFC/MFM products. It will be useless
for other MFC products.
4.6 Setting Potentiometer
The user can use “setting potentiometer’ to send the voltage (0-5V) to MFC for setpoints.
4.7 Power Supply Switch
Power on or off the box.
4.8 Power Supply Connector
AC (~220V±10% 50Hz)should be imported by this connector.
4.9 Fuse
1A fuse tube is used. Please check the fuse if power of the box failure.
4.10 Setting Selection
“Setting selection” is used for selecting where the setting signal comes from. If it is set to “INT”, the “setting
potentiometer” of the box will control the MFC. Comparably if it is set to “EXT”, the control signal of MFC will
come from the “EXT control connector”.
4.11
MFC “D” Connector
15pin D connector is used for connection with the MFC/MFM. Every connector (channel) can only be connected to
one MFC. Thus, two channel for D08-2F, three channel for D08-3F, and four channel for D08-4F.
4.12 External Control Connector
The 0-5V voltage can be used for external control signal Please refer table 3 for connection.
4.13 Nameplate
Page 4 of 12
Nameplate indicates the actual situation of each MFC (or MFM) channel when flow readout box connected with
MFC (or MFM), for example the full scales and flow units.
5.
INSTALLATION & CONNECTION
5.1
Dimension ( Figure 4.)
D08-2D/ZM 流量显示仪
通
MFC1
MFC2
电源
清
洗
阀
控
关
闭 调零
设定
清
洗
阀
控
关
闭 调零
北京七星华创电子股份有限公司
设定
Figure 4. Chassis Dimension
Note: Dimensions are in mm.
5.2
MFC Connection
For the pin configure of MFC “D” connector, please refer to Table 2.
Table2. MFC “D” connector diagram
Page 5 of 12
MFC
Controller Signal
No.
Functions
1
External Zero
2
3
Power Common
4
Set
5
Valve Drive
6
Signal Common
7
Flow Readout
8
GND
9
Signals Instruction of Table 2:
① Necessary signals:±15V, Power Common, Set, Flow
Output and Signal Common. These signals must be
connected correctly.
② “Valve Drive” and “ External Zero Adjustment”
signals are only for D07 series MFC products. For
other MFC products, please do NOT connect
③ GND Line normally is disconnected. (Please refer to
the MAINTENANCE information)
④ For MFM, “Valve Drive ”and “Set” is invalid.
10
11
-15V
12
-15V
⑤ If you provide your own cable for other MFC products,
we suggest that you only connect necessary signals as
in ①.
13
14
Common
15
+15V
Page 6 of 12
5.3 External Control Connection
For External Control Connection, please refer to Table 3. PC or other external control equipments can control the
MFC by external control connector.
Table 3. External Control Connection
a. D08-2F
b. D08-3F
c. D08-4F
External Control Signal
External Control Signal
External Control Signal
No.
Functions
No.
Functions
No.
Functions
1
+5.00V
1
+5.00V
1
+5.00V
2
Signal Common
2
Signal Common
2
Signal Common
3
External SetⅠ
3
External SetⅠ
3
External SetⅠ
4
External SetⅡ
4
External SetⅡ
4
External SetⅡ
5
5
External SetⅢ
5
External SetⅢ
6
6
6
External Set Ⅳ
7
Flow ReadoutⅠ
7
Flow ReadoutⅠ
7
Flow ReadoutⅠ
8
Flow ReadoutⅡ
8
Flow ReadoutⅡ
8
Flow ReadoutⅡ
9
9
Flow Readout Ⅲ
9
Flow Readout Ⅳ
10
10
10
Flow Readout Ⅲ
11
Valve OverrideⅠ
11
Valve OverrideⅠ
11
Valve OverrideⅠ
12
Valve OverrideⅡ
12
Valve OverrideⅡ
12
Valve OverrideⅡ
13
13
Valve Override Ⅲ
13
Valve Override Ⅲ
14
14
14
Valve Override Ⅳ
15
15
15
Page 7 of 12
Signals Instruction of Table 3:
a.
The voltages between External Set Ⅰ~Ⅳ and signal common will be used for setting
the 1~4 channel MFC respectively. If external potentiometer is used for setting, a 3.3K
potentiometer can be connected with “+5.00V” and “ Signal common”, and its tap can be
connected with “External Set”. The user can connect D/A of computer to external control
connector for the automatic control. Please make sure input impedance should be more
than 10KΩ.
b.
0~+5V voltage signals from flow readout Ⅰ~Ⅳ will indicate the flow rate from
channel I~IV respectively.
c.
Valve Override Ⅰ~Ⅳ are ONLY available for D07 series MFC products without any
problems. If valve Override is connected to +15V, valves will be shut off. If valve
Override is connected to -15V, valves will be full opened. Valves will be in the automatic
control status if valve Override is not connected. Caution: if the user wants to use external
(PC control) function, “ Valve Controller ” switch should be in the middle.
6.
OPERATION PROCEDURE
6.1 Preparation
6.1.1 Control Button
a. Power Supply: OFF
b. Valve Controller: OFF
c. Setting Potentiometer: Minimum
d. Internal & External Setting Selection
If setting potentiometer of the box will control MFC directly, the selection should be “INT” (internal setting). If
controlled by the computer, the selection should be “EXT”(external setting).
Page 8 of 12
6.1.2 Power Supply Connection
One terminal of power lead should be connected with power connector of the back panel. And another one should
be connected with AC power. ( Please make sure power supply should be ~220V±10% 50Hz, and the ground
terminal of three-phrase plug has been connected to the ground properly ,otherwise flow readout box maybe
operate incorrectly.)
6.1.3 Control Line Connection
Please use the appropriate cable to connect the MFC/MFM according to the configure
6.2 Operation Method
Please refer to the related technical instruction of MFC (or MFM).
6.2.1 Turn On
Connect with power supply and switch on.
6.2.2 Zero Adjustment:
The “Zero Potentiometer” is ONLY available for D07 series MFC/MFM. After warming up by 15 minutes, without
flow passing, “Zero Potentiometer” could be adjusted by a small screwdriver.
6.2.3 Valve controller Setting:
For normal operating, it should be “Valve Control”. And it can be used to drive valve full open or close.
6.2.4 Setting
Adjusting ten-rounded potentiometer of panel will give setpoint to the MFC.
6.2.5 Turn Off:
AC power should be shut off after using.
7.
PARAMETER SETTING
Please select the appropriate flow unit and range for the MFC/MFM. If necessary, the user can change flow unit
and range by “radix point”, “Unit set” and “range adjustment” for D08-2F/3F/4F.
Page 9 of 12
7.1 Range Selection
High accuracy will be acquired by the appropriate range and radix. Normally the full range should be 1,000. For
example, if the full scale of MFC/MFM is 30SCCM or 30SLM, the full scale range of the box should be 30.0 (one
decimal place) instead of 30. Another one, if full scale of MFC/MFM is 1SLM, the full scale range of the box
should be 1.000. And if full scale of MFC/MFM is 10SCCM or 10SLM, the full scale range of the box should be
10. 00.
7.2 Range Adjustment
Please select “INT”, and short the pin 4(set) and pin 7(flow readout) of without connection with the MFC/MFM
firstly. And adjust the “Set” potentiometer to maximum value. Then, adjust the “Range adjustment” potentiometer
to the value you want.
7.3 Radix Point Adjustment
Figure 5 shows the configuration of radix point adjustment. The corresponded relations are showed in Table 4.
Figure 5. Radix Point Position Switch
8.
MAINTENANCE
8.1
Internal Potentiometer Adjustment
Table 4. Radix Point Position Table
Pointer Position
Radix Point
Postion
0or 8
XXXX
1or 9
X.XXX
2
XX.XX
4
XXX.X
All internal potentiometers in the device have been already adjusted before delivery. Please do NOT adjust it.
8.2
Grounding Connection
In principle, the ground of the Flow Readout Box (Power GND) and the cover of MFC (or MFM) should be
connected for sharing the same grounding place. But they can be connected with the bases respectively, if the
connection cable is too long. In this way, please make sure the box must NOT be connected with ground of the
MFC because ground wire may be broken, even burning.
Page 10 of 12
8.3
Substitution
If the Flow Readout Box is used for other model MFC (or MFM), please make sure the capability of power supply
and the correct connections firstly. Especially, please be very careful for the valve control function and connections
because it is quite different according to the different models.
9.
PRODUCTION SELECTION
9.1 Type selection
Circuit
Type
1F
MFC MFM Ana. Dig.
√
1FM
Cases
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
1/2/4
√
√
√
√
2F/3F/4F
√
√
√
√
2B/3B/4B
√
2E/3E/4E
√
√
1K
√
√
√
1G
√
√
8CM
√
Output
voltage
√
√
8C
Power supply
Other funtions
1
Multi- Multi4~20mA 4~20mA
Rack
~85
4~20mA/ 4~20mA/
Mini Desk
channel Channel Channel ~110 ~220
/ 1~5V / 1~5V
±15 +24
-desk
-265
0~10mA 0~10mA
-Type -style
1
1
Multi- VAC VAC
VDC VDC
Input
Output
-style
VAC
I input I output
Display Display Display
Signal Signal
1FP
1GM
Display
√
√
√
√
√
√
√
√
√
√
√
RS232/
Flow
RS485 Setpoint
Accumu
Commu- display
-lator
nication
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
√
1~5V
Page 11 of 12
9.2 Order form
D08- [t] - [p] - [s]
[t] – Type
2F/3F/4F
[p] – Power supply
-[ ] ~220VAC±10% 50Hz
include ~85-265VAC wide voltage input
-[D] ~110VAC±10% 60Hz
[s] – Special request
-[ ] percentage display (%FS) for each channel,
-[S] List full scale of each channel (see table on right side) and other
request.
If only one channel needs %FS unit, please fill in “S”.
scale
code
5sccm
A
10sccm
B
20sccm
C
30sccm
D
50sccm
E
100sccm
F
200sccm
G
300sccm
H
500sccm
J
1slm
K
2slm
L
3slm
M
5slm
N
10slm
P
20slm
Q
30slm
R
50slm
U
100slm
V
150slm
W
200slm
X
250slm
Y
300slm
Z
percentage
display
S
Page 12 of 12
Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co.Ltd.
D08 Series
Flow Readout Boxes.
Beijing Sevenstar Electronics Co., Ltd
Mass Flow Meter Subsidiary Co., Ltd
Address:
No.1 Jiuxianqiao East Rd., Chaoyang District, Beijing, China
P.O.BOX
3#741, Beijing, China
Post code:
100015
Tel:
(+86)-10-64362939
(+86)-10-64361831 ext. 8491 or 8315
Fax:
(+86)-10-64362923 or 64362939
Homepage: http://mfc.sevenstar.com.cn
E-Mail:
[email protected]
Shanghai Office: Room 1916, Unicom International Tower, NO.547 Tianmu West
Road, Zhabei District, Shanghai, 200070, China
Tel:
(+86)-21-33030324
Fax:
(+86)-21-63533265
Shenzhen Office: Room 712, Section B, Qiche Tower, No.45 Zhenhua Road,
Futian District, Shenzhen, China
Zip code:
518031
Tel:
(+86)-755-88290258
Fax:
(+86)-755-88294770
*Description may be changed following improvements to product. The information
contained in this document is subject to change without notice
*If there is any mistake in this uses manual, please feel free to contact us.
*©2010 Beijing Seventar Electronics Co.,Ltd
All rights reserved.
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