User Manual MP47E

User Manual MP47E
MP47E
M-06x Rotation Stage
User Manual
Version: 2.0.0
Date: 29.05.2015
This document describes the following
precision rotation stages (>360°):




M-06x.DG:
with closed-loop DC gear motor
M-06x.PD:
with DC motor and PWM control
M-06x.2S:
with 2-phase stepper motor
M-06x.M0:
with manual drive
x stands for the platform diameter:
0 = 60 mm
1 = 100 mm
2 = 120 mm
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe, Germany
Phone: +49 721 4846-0, Fax: +49 721 4846-1019, E-mail: [email protected]
Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PIMag®, PiezoWalk®, NEXACT®,
NEXLINE®, NanoCube®, NanoAutomation®, Picoactuator®, PInano®
© 2015 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. The use of any
text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 29.05.2015
Document number: MP47E, MMa, Version 2.0.0
Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download (p. 3) on our website.
Contents
1
About this Document
1.1
1.2
1.3
1.4
1.5
1.6
2
3
Objective and Target Audience of this User Manual ............................................1
Symbols and Typographic Conventions ...............................................................1
Definition ...............................................................................................................2
Figures ..................................................................................................................2
Other Applicable Documents ................................................................................3
Downloading Manuals ..........................................................................................3
Safety
2.1
2.2
2.3
5
Intended Use ........................................................................................................5
General Safety Instructions ..................................................................................5
Organizational Measures ......................................................................................6
Product Description
3.1
3.2
3.3
3.4
3.5
3.6
3.7
3.8
1
7
Model Overview ....................................................................................................7
Product View.........................................................................................................9
Product Labeling .................................................................................................10
Direction of Motion ..............................................................................................11
Scope of Delivery ...............................................................................................12
Accessories ........................................................................................................12
Suitable Controllers ............................................................................................13
Technical Features .............................................................................................13
3.8.1
Encoder ............................................................................................13
3.8.2
Reference Point Switch ....................................................................13
3.8.3
Integrated PWM Amplifier .................................................................14
4
Unpacking
15
5
Installation
17
5.1
General Notes on Installation .............................................................................17
5.1.1
Notes on all Models ..........................................................................17
5.1.2
Notes on Models with a Motor ..........................................................18
5.2
5.3
5.4
5.5
5.6
5.7
6
Start-Up
6.1
6.2
7
Optional: Modifying the Connection Orientation on the M-06x ...........................18
Optional: Aligning the Hole Pattern of the Platform ............................................20
Mounting the M-06x on a Surface ......................................................................22
Affixing the Load to the M-06x ............................................................................23
Connecting the Motor Cable to the M-06x ..........................................................25
Connecting the Power Supply to the M-06x .......................................................26
27
General Notes on Start-Up .................................................................................27
Starting Up the Rotation Stage ...........................................................................29
6.2.1
M-06x Entries in the Stage Database of PI ......................................30
6.2.2
Operating Parameters of the Models with DC Motor ........................30
6.2.3
Operating Parameters of the Models with Stepper Motor ................31
Maintenance
7.1
7.2
7.3
33
General Notes on Maintenance ..........................................................................33
Performing a Maintenance Run ..........................................................................33
Cleaning the M-06x ............................................................................................34
8
Troubleshooting
35
9
Customer Service
37
10
Technical Data
39
10.1
10.2
10.3
Specifications......................................................................................................39
10.1.1
Data Table ........................................................................................39
10.1.2
Maximum Ratings .............................................................................41
10.1.3
Ambient Conditions and Classifications ...........................................41
10.1.4
Reference Point Switch Specifications .............................................41
Dimensions .........................................................................................................42
10.2.1
M-06x.DG / M-06x.PD / M-06x.2S Models .......................................42
10.2.2
M-06x.M0 Models .............................................................................44
Pin Assignment ...................................................................................................46
10.3.1
Sub-D 15 (m) Controller Connection ................................................46
10.3.2
Mini XLR3 (m) Power Supply Connection ........................................48
11
Old Equipment Disposal
49
12
EC Declaration of Conformity
51
1 About this Document
1
About this Document
In this Chapter
Objective and Target Audience of this User Manual ..................................................... 1
Symbols and Typographic Conventions ........................................................................ 1
Definition ........................................................................................................................ 2
Figures ........................................................................................................................... 2
Other Applicable Documents ......................................................................................... 3
Downloading Manuals ................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This user manual contains the information needed for the intended use of the M-06x.
The stages of the M-060, M-061 and M-062 series are summarized under the
designation M-06x in this manual. (x stands for the platform diameter here. Details can
be found in the model overview (p. 7)).
Basic knowledge of servo systems, motion control concepts and applicable safety
measures is assumed.
The latest versions of the user manuals are available for download (p. 3) on our
website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.

Actions to take to avoid the situation.
INFORMATION
Information for easier handling, tricks, tips, etc.
M-06x Rotation Stage
MP47E
Version: 2.0.0
1
1 About this Document
Symbol/Label
Meaning
1.
Action consisting of several steps whose sequential order
must be observed
2.

Action consisting of one or several steps whose sequential
order is irrelevant

List item
p. 5
Cross-reference to page 5
RS-232
Labeling of an operating element on the product (example:
socket of the RS-232 interface)
Warning sign on the product which refers to detailed
information in this manual.
1.3 Definition
Term
Explanation
Load capacity
Maximum load capacity in the vertical direction when the
rotation stage is mounted horizontally. The contact point of the
load is in the center of the platform.
Incremental position
sensor
Sensor (encoder) for capturing changes of position or changes
of angle. Signals from the incremental position sensor are
used for axis position feedback. After switching on the
controller a reference point definition must be performed
before absolute target positions can be commanded and
reached.
1.4 Figures
For better understandability, the colors, proportions and degree of detail in illustrations
can deviate from the actual circumstances. Photographic illustrations may also differ
and must not be seen as guaranteed properties.
2
Version: 2.0.0
MP47E
M-06x Rotation Stage
1 About this Document
1.5 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are
described in their own manuals.
Product
Document
C-863.11 DC Motor Controller
MS205E User Manual
C-663.11 Stepper Motor Controller
MS208E User Manual
C-843 DC Motor Controller PCI Board
MS77E User Manual
C-884 DC Motor Controller
MS213E User Manual
Stages with electric motors
MP119EK Short Instructions
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:

Contact our customer service department (p. 37).
INFORMATION
For some products (e.g. Hexapod systems and electronics that are delivered with a
CD), access to the manuals is password-protected. The password is stored on the
CD. Availability of the manuals:


Password-protected manuals: FTP download directory

Follow the corresponding instructions for downloading.
Freely available manuals: PI website
Downloading freely accessible manuals
1. Open the website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding product category.
4. Go to the corresponding product code.
The available manuals are displayed.
5. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.
M-06x Rotation Stage
MP47E
Version: 2.0.0
3
1 About this Document
Downloading password-protected manuals
1. Insert the product CD in the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews
in the file name).
4. Find the user name and the password in the section "User login for software
download"in the Release News.
5. Open the FTP download directory (ftp://pi-ftp.ws).
−
Windows operating systems: Open the FTP download directory in
Windows Explorer.
6. Log in with the user name and the password from the Release News.
7. In the directory of the corresponding product, go to the Manuals sub-directory.
8. Copy the desired manual to the hard disk of your PC or to a data storage
medium.
4
Version: 2.0.0
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M-06x Rotation Stage
2 Safety
2
Safety
In this Chapter
Intended Use ................................................................................................................. 5
General Safety Instructions ........................................................................................... 5
Organizational Measures............................................................................................... 6
2.1 Intended Use
The M-06x is a laboratory device as defined by DIN EN 61010. It is intended for indoor
use and use in an environment that is free of dirt, oil and lubricants.
In accordance with its design and realization, the M-06x is intended for single-axis
positioning, adjusting and shifting of loads at different velocities. The M-06x is not
intended for applications in areas in which a failure would present severe risks to
human beings or the environment.
The M-06x is intended for horizontal or vertical mounting. For the load limits with
vertical mounting, see "General Notes on Installation" (p. 17).
The intended use of the M-06x is only possible when completely mounted and
connected.
The M-06x must be operated with a suitable controller (p. 13). The controller is not
included in the scope of delivery of the M-06x.
2.2 General Safety Instructions
The M-06x is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the M-06x.
 Only use the M-06x for its intended purpose, and only use it if it is in a good
working order.
 Read the user manual.
 Immediately eliminate any faults and malfunctions that are likely to affect
safety.
The operator is responsible for the correct installation and operation of the M-06x.
M-06x Rotation Stage
MP47E
Version: 2.0.0
5
2 Safety
2.3 Organizational Measures
User manual
 Always keep this user manual available with the M-06x.
The latest versions of the user manuals are available for download (p. 3) on
our website.
 Add all information given by the manufacturer to the user manual, for example
supplements or technical notes.
 If you give the M-06x to other users, also include this user manual as well as
other relevant information provided by the manufacturer.
 Only use the device on the basis of the complete user manual. Missing
information due to an incomplete user manual can result in damage to
equipment.
 Only install and operate the M-06x after you have read and understood this
user manual.
Personnel Qualification
The M-06x may only be installed, started up, operated, maintained and cleaned by
authorized and appropriately qualified personnel.
6
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M-06x Rotation Stage
3 Product Description
3
Product Description
In this Chapter
Model Overview ............................................................................................................. 7
Product View ................................................................................................................. 9
Product Labeling .......................................................................................................... 10
Direction of Motion ....................................................................................................... 11
Scope of Delivery ........................................................................................................ 12
Accessories ................................................................................................................. 12
Suitable Controllers ..................................................................................................... 13
Technical Features ...................................................................................................... 13
3.1 Model Overview
Classification of the stages
The stages of the M-060, M-061 and M-062 series are summarized in this manual
under the designation M-06x.
All models are precision rotation stages with backlash-compensated worm drives and
a continuous travel range in both directions of rotation. They differ with respect to:


Platform diameter
Drive type
Model
Platform diameter [mm]
60
M-060.xx
100
+
M-061.xx
+
M-062.xx
M-06x Rotation Stage
120
+
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Version: 2.0.0
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3 Product Description
Model
Drive type
DC motor
Stepper motor Manual
Direct drive,
PWM
M-06x.PD
Gearhead,
analog
+
M-06x.DG
+
M-06x.2S
+
M-06x.M0
+
Detailed model overview
Order
number
Product name
M-060.2S
Precision Rotation Stage, Ø 60 mm, 360°, 2-Phase Stepper Motor
M-060.DG
Precision Rotation Stage, Ø 60 mm, 360°, closed-loop DC Gear Motor
M-060.M0
Precision Rotation Stage, Ø 60 mm, 360°, Manual Drive
M-060.PD
Precision Rotation Stage, Ø 60 mm, 360°, ActiveDrive DC Motor
M-061.2S
Precision Rotation Stage, Ø 100 mm, 360°, 2-Phase Stepper Motor
M-061.DG
Precision Rotation Stage, Ø 100 mm, 360°, closed-loop DC Gear Motor
M-061.M0
Precision Rotation Stage, Ø 100 mm, 360°, Manual Drive
M-061.PD
Precision Rotation Stage, Ø 100 mm, 360°, ActiveDrive DC Motor
M-062.2S
Precision Rotation Stage, Ø 120 mm, 360°, 2-Phase Stepper Motor
M-062.DG
Precision Rotation Stage, Ø 120 mm, 360°, closed-loop DC Gear Motor
M-062.M0
Precision Rotation Stage, Ø 120 mm, 360°, Manual Drive
M-062.PD
Precision Rotation Stage, Ø 120 mm, 360°, ActiveDrive DC Motor
 For further technical data, see the specifications (p. 39).
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M-06x Rotation Stage
3 Product Description
3.2 Product View
Figure 1: Components of the M06x.2S models
Figure 3: Components of the M06x.DG models
1
Motor
2
Motor flange
3
Platform
4
Scale ring
5
Base body
6
Controller connection (Sub-D 15 panel plug)
7
Power supply connection (Mini XLR3 panel plug)
8
Handwheel
M-06x Rotation Stage
MP47E
Figure 2: Components of the M06x.PD models
Figure 4: Components of the M06x.M0 models
Version: 2.0.0
9
3 Product Description
3.3 Product Labeling
Figure 5: Position of the product labeling
Position
Labeling
Description
1
Manufacturer's logo
1
CE conformity mark
1
Warning sign "Observe manual!"
1
M-060.PD
Product name (example), the places after
the point refer to the model
1
113050975
Serial number (example), individual for
each M-06x
Meaning of the places (counting from left):
1 = internal information, 2 and 3 =
manufacturing year, 4 to 9 = consecutive
numbers
1
WWW.PI.WS
Manufacturer's address (website)
1
10
Old equipment disposal (p. 49)
1
Country of origin: Germany
Country of origin
2
0
0° mark in the base body
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MP47E
M-06x Rotation Stage
3 Product Description
Position
Labeling
Description
Graduation on the scale ring of the moving
platform (detail)
3
0




180
Short line: 2°
Medium line: 10°
Long line: 90° and 270°
Numbers: 0° and 180°
4
24 VDC
Power supply connection (only for
M-06x.PD models)
5
Controller
Controller connection (only for M-06x.DG,
M-06x.PD and M-06x.2S models)
3.4 Direction of Motion
Figure 6: Direction of motion of the M-06x.2S (top) and M-06x.PD / M-06x.DG (bottom) models
+
Direction of motion on positive command
0
0° mark in the base body: After a reference move, the 0° mark on the scale ring of the moving
platform is above the 0° mark in the base body.
M-06x Rotation Stage
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3 Product Description
3.5 Scope of Delivery
Item number Component
M-06x.xx
Rotation stage according to the order (p. 7)
MP119EK
Short instructions for stages with electric motors
Only M-060.xx models:
2493
Screw set for mounting the rotation stage:


6 M4x12 socket head cap screws ISO 4762
Allen wrench AF 3 DIN 911
Only M-061.xx / M-062.xx models:
2498
Screw set for mounting the rotation stage:


6 M4x16 socket head cap screws ISO 4762
Allen wrench AF 3 DIN 911
Only M-06x.DG / M-06x.PD / M-06x.2S models:
C-815.38
Motor cable, 3 m, Sub-D 15 (m/f)
Only M-06x.PD models:
C-663.PS
Wide-range-input power supply 24 V / 42 W
3763
Power cord
K050B0002
Adapter from 5.5 mm x 2.1 mm barrel connector to Mini
XLR3 (f) for the power supply connection
3.6 Accessories
Order
number
Description
C-815.83
Motor cable, 10 m, Sub-D 15 (m/f)
To order, contact our customer service department (p. 37).
12
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M-06x Rotation Stage
3 Product Description
3.7 Suitable Controllers
For the M-06x.DG, M-06x.PD and M-06x.2S models, the following applies:
The M-06x must be connected to a suitable controller. The following controllers from
PI are suitable for the operation of the M-06x:
Drive type
Controller
Axes per
controller
DC motor
C-843
2 or 4
Internal (PCI
bus)
Yes, separate boards
C-863
1
USB, RS-232,
daisy chain
Yes, same interface
C-884
1 to 4
USB, RS-232,
TCP/IP
Yes
C-663
1
USB, RS-232,
daisy chain
Yes, same interface
Stepper
motor
PC interface
Multiple controllers on
the same PC
PC software is included in the scope of delivery of the controllers from PI. The
operation of the controllers is described in the corresponding user manuals.
3.8 Technical Features
3.8.1 Encoder
The M-06x.DG and M-06x.PD models are equipped with an incremental rotary
encoder. For the encoder resolution, refer to the table in the "Specifications" section
(p. 39).
A rotary encoder is implemented at a rotating point in the drivetrain, e.g. the motor
shaft.
3.8.2 Reference Point Switch
The M-06x.DG, M-06x.PD and M-06x.2S models are equipped with a directionsensing reference point switch (see "Reference Point Switch Specifications" (p. 41)).
The commands that use the reference signal are described in the user manual of the
controller and/or in the corresponding software manuals.
After a reference move of the M-06x, the 0° mark on the scale ring of the moving
platform is above the 0° mark in the base body.
M-06x Rotation Stage
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Version: 2.0.0
13
3 Product Description
3.8.3 Integrated PWM Amplifier
The M-06x.PD models with direct drive are equipped with a PWM amplifier
("ActiveDrive concept"). The PWM amplifier only receives the control signals from the
controller, whereas the supply voltage is provided via an external power supply. The
ActiveDrive concept allows high motor power and dynamics at low power loss.
14
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M-06x Rotation Stage
4 Unpacking
4
Unpacking
1. Unpack the M-06x with care.
2. Compare the contents against the items covered by the contract and against
the packing list.
3. Inspect the contents for signs of damage. If parts are missing or you notice
signs of damage, contact PI immediately.
4. Keep all packaging materials in case the product needs to be returned.
M-06x Rotation Stage
MP47E
Version: 2.0.0
15
5 Installation
5
Installation
In this Chapter
General Notes on Installation ...................................................................................... 17
Optional: Modifying the Connection Orientation on the M-06x.................................... 18
Optional: Aligning the Hole Pattern of the Platform ..................................................... 20
Mounting the M-06x on a Surface ............................................................................... 22
Affixing the Load to the M-06x ..................................................................................... 23
Connecting the Motor Cable to the M-06x ................................................................... 25
Connecting the Power Supply to the M-06x ................................................................ 26
5.1 General Notes on Installation
5.1.1 Notes on all Models
NOTICE
Unintentional changes in position with vertical mounting!
If the load exceeds the self-locking of the drive when the stage is mounted vertically,
unintentional changes in the position of the moving platform occur. Unwanted
changes in the position of the moving platform can damage the drive, the load or the
environment.

When the stage is mounted vertically, make sure that the installed load is lower
than the self-locking of the drive.
INFORMATION
For optimum repeatablity, all components must be firmly affixed to each other.
 If possible, simulate the rotation stage motions with a mounted load or make
suitable calculations to detect collisions or unfavorable center of gravity
constellations.
 If necessary, take suitable constructive measures to avoid collisions and
instability in the overall system.
M-06x Rotation Stage
MP47E
Version: 2.0.0
17
5 Installation
 Avoid or mark danger zones that result from the installation of the rotation
stage and the application, in accordance with the legal regulations.
5.1.2 Notes on Models with a Motor
NOTICE
Cable break!
A cable break leads to a failure of the rotation stage.

Install the rotation stage so that the cable is not bent or crushed too strongly
during operation.

M-06x.DG and M-06x.PD models: If you change the connection orientation of the
rotation stage (p. 18), avoid overstretching the cable between the motor flange
and the motor case.
NOTICE
Heating up of the M-06x during operation!
The heat produced during operation of the M-06x can affect your application.

Install the M-06x so that your application is not affected by the dissipating heat.
5.2 Optional: Modifying the Connection Orientation on the
M-06x
INFORMATION
Motor and connections of the M-06x.DG and M-06x.PD models can be rotated
around the axis of the motor and fixed at any position.

18
Check whether the connections of the rotation stage are at a position that is
suitable for your installation situation.
Version: 2.0.0
MP47E
M-06x Rotation Stage
5 Installation
Figure 7: Optional: Continuous rotation of the motor around its axis
Figure 8: Position of the grub screws on the motor flange (left: top side, right: bottom side)
M-06x Rotation Stage
1
Grub screw
2
Motor flange
3
Motor case
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Version: 2.0.0
19
5 Installation
Prerequisites

The rotation stage is not mounted on a surface.

The rotation stage is not connected to the controller and the power supply.
Tools and accessories

Allen wrench AF 2
Changing the orientation for connection
1. Turn out the grub screws on the motor flange of the rotation stage (see figure)
by a few rotations.
2. Rotate the motor case with the connections to the desired orientation:
−
Avoid overstretching the cable between the motor flange and the motor
case.
−
Make sure that no cables are crushed or bent at the desired orientation.
3. Tighten the grub screws on the motor flange.
4. Check that the motor case is affixed firmly to the motor flange.
5.3 Optional: Aligning the Hole Pattern of the Platform
INFORMATION
If necessary, you can change the orientation of the 0° mark to the hole pattern for
mounting a load. The change is made by rotating the scale ring on the moving
platform.

20
Note the following: Irrespective of how the scale ring is oriented on the moving
platform, the 0° mark on the scale ring is always above the 0° mark in the base
body of the M-06x after a reference move.
Version: 2.0.0
MP47E
M-06x Rotation Stage
5 Installation
The scale ring is fixed on the moving platform of the M-06x with three grub screws.
Figure 9: Position of the grub screws on the scale ring
1
Access to the grub screw
2
Mounting hole for load
3
Scale ring
4
0° mark in the base body
Prerequisites

M-06x.DG / M-06x.PD / M-06x.2S models: The rotation stage is not
connected to the controller and the power supply.
Tools and accessories

Allen wrench AF 0.9
Aligning the hole pattern of the platform
1. Turn out the three grub screws on the scale ring (see figure) by a few
rotations.
2. Rotate the scale ring until it has reached the desired orientation to the hole
pattern of the platform.
3. Tighten the grub screws on the scale ring.
4. Check that the scale ring is affixed firmly.
M-06x Rotation Stage
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Version: 2.0.0
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5 Installation
5.4 Mounting the M-06x on a Surface
NOTICE
Warping of the M-06x due to mounting on uneven surfaces!
Mounting the M-06x on an uneven surface can warp the M-06x. Warping reduces the
accuracy.

Mount the M-06x on an even surface. The recommended evenness of the
surface is ≤10 µm.

For applications with large temperature changes:
Only mount the M-06x on surfaces that have the same or similar thermal
expansion properties as the M-06x.
Figure 10: Position of the holes for mounting the rotation stage on a surface
Prerequisites
22

You have read and understood the general notes on installation (p. 17).

You have provided a suitable surface (for the required position and depth of
the holes for accommodating the screws, see "Dimensions" (p. 42)):
−
There are three M4 threaded holes.
−
The evenness of the surface is ≤ 10 µm.
Version: 2.0.0
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M-06x Rotation Stage
5 Installation
−
For applications with large temperature changes: The surface should have
the same thermal expansion properties as the M-06x (e.g. surface made
of aluminum).

You have accounted for the space required to route cables without bending
and according to regulations.

M-06x.DG / M-06x.PD / M-06x.2S: The rotation stage is not connected to the
controller and the power supply.
Tools and accessories

Mounting accessories, in the scope of delivery (p. 12):
−
M-060.xx: 3 M4x12 screws
−
M-061.xx / M-062.xx: 3 M4x16 screws
−
Allen wrench AF 3
Mounting the rotation stage on a surface
1. Align the rotation stage on the surface so that the corresponding mounting
holes in the rotation stage and the surface overlap.
2. Completely screw in the screws into all mounting holes.
3. Check that the rotation stage is affixed firmly to the surface.
5.5 Affixing the Load to the M-06x
NOTICE
Impermissibly high load on the rotation stage!
An impermissibly high load interferes with the motion of the moving platform and can
damage the rotation stage.

In respect to the mass and mounting type of the load, observe the maximum
permissible forces that are allowed to act on the moving platform according to
the specification (p. 39).
M-06x Rotation Stage
MP47E
Version: 2.0.0
23
5 Installation
NOTICE
Screws that are too long!
Screws that are inserted too deeply can damage the M-06x.

Observe the depth of the mounting holes in the moving platform (p. 42).

Only use screws of the correct length for the respective mounting holes.
Figure 11: Position of the mounting holes for affixing the load
Prerequisites
24

You have read and understood the general notes on installation (p. 17).

You have properly attached the rotation stage to a surface (p. 22).

M-06x.DG / M-06x.PD / M-06x.2S: The rotation stage is not connected to the
controller and the power supply.

You have prepared the load so that it can be affixed to the mounting holes on
the moving platform:
−
The distance between the center of gravity of the load and the center of
the platform is as small as possible in all directions.
−
At least two points are provided for mounting the load on the platform
(ideally: three attachment points).
Version: 2.0.0
MP47E
M-06x Rotation Stage
5 Installation
Tools and accessories


At least 2 M4 screws of suitable length
Suitable tools for fastening the screws
Affixing the Load
1. Align the load so that the selected mounting holes in the platform can be used
to affix it.
2. Use the screws to affix the load on the selected mounting holes in the
platform.
3. Check that the load is affixed firmly to the platform of the rotation stage.
5.6 Connecting the Motor Cable to the M-06x
Prerequisites

You have read and understood the general notes on installation (p. 17).

The motor cable is not connected to the controller.
Tools and accessories

Suitable motor cable from PI, e.g.:
−
C-815.38 motor cable, 3 m, Sub-D, 15-pin (m/f), in the scope of delivery
(p. 12).
−
C-815.83 motor cable, 10 m, Sub-D, 15-pin (m/f), available as optional
accessory (p. 12).
Connecting the motor cable to the M-06x
1. Connect the connector (f) of the motor cable to the Sub-D 15-pin panel plug
(m) of the rotation stage.
2. Secure the connector (f) with the two integrated screws against being
unintentionally pulled out of the rotation stage.
M-06x Rotation Stage
MP47E
Version: 2.0.0
25
5 Installation
5.7 Connecting the Power Supply to the M-06x
Connecting a power supply is only necessary for the M-06x.PD models.
Prerequisites

The power cord is not connected to the power socket.
Tools and accessories


Supplied components:
−
24 V wide-range-input power supply
−
Adapter for the power supply connection; barrel connector 5.5 mm x
2.1 mm to Mini XLR3 (f)
−
Power cord
If one of the components supplied for connection to the power source has to
be replaced: Use a sufficiently measured and certified replacement
component. Details:
−
Power supply: Output 24 V DC, maximum output current 2 A
−
Power cord: Three wires, cable cross section at least 3 x 0.75 mm (3 x
AWG18), maximum length 2 m
2
Connecting the power supply to the M-06x
 Connect the Mini XLR3 connector (f) of the adapter to the Mini XLR3 panel
plug of the M-06x.
 Connect the barrel connector of the adapter to the barrel connector socket of
the power supply.
 Connect the power cord to the power supply.
26
Version: 2.0.0
MP47E
M-06x Rotation Stage
6 Start-Up
6
Start-Up
In this Chapter
General Notes on Start-Up .......................................................................................... 27
Starting Up the rotation stage ...................................................................................... 29
The instructions and descriptions in this chapter apply to models with a motor (M06x.DG, M-06x.PD, M-06x.2S).
6.1 General Notes on Start-Up
NOTICE
Damage from collisions!
Collisions can damage the rotation stage, the load to be moved and the environment.

Make sure that no collisions are possible between the rotation stage, the load to
be moved and the environment in the motion range of the rotation stage.

Do not place any objects in areas where they can get caught by moving parts.

Stop the motion immediately if a controller malfunction occurs.

If possible, adapt the travel range limits of your mechanical system in the
software that you use for commanding the motion.
NOTICE
Damage if an incorrect controller is connected!
Connecting a rotation stage to an unsuitable controller can cause damage to the
rotation stage or controller.

Connect a rotation stage with DC motor to a DC motor controller only.

Connect a rotation stage with stepper motor to a stepper motor controller only.

If you use controllers and software from other manufacturers, check their
technical data to make sure that they are suitable before starting up the stage!
M-06x Rotation Stage
MP47E
Version: 2.0.0
27
6 Start-Up
NOTICE
Operating voltage too high or incorrectly connected!
Operating voltages that are too high or incorrectly connected can cause damage to
the M-06x.

Do not exceed the operating voltage range (p. 41) for which the M-06x is
specified.

Only operate the M-06x when the operating voltage is properly connected; see
"Pin Assignment" (p. 46).
NOTICE
Damage or considerable wear due to high accelerations!
High accelerations can cause damage to or considerable wear on the mechanical
system.

Stop the motion immediately if a controller malfunction occurs.

Determine the maximum velocity for your application.
NOTICE
Unintentional motions!
When the M-06x is being connected to the controller, it can carry out unintentional
motions. Defective software or wrong operation of the software can also result in
unintentional motions.

Do not place any objects in areas where they can get caught by moving parts.

Before connecting the M-06x, check whether a macro is defined as the start-up
macro in the controller, and cancel the selection of the start-up macro if
necessary.
INFORMATION
The maximum velocity for a rotation stage with a stepper motor should be
determined in the application. If the commanded velocity is too high, the stepper
motor might stop without the controller detecting this condition.
28
Version: 2.0.0
MP47E
M-06x Rotation Stage
6 Start-Up
INFORMATION
The repeatability of the positioning is only ensured when the reference point switch is
always approached from the same side. Controllers from PI fulfill this requirement
due to the automatic direction sensing for reference moves to the reference point
switch.
INFORMATION
For models with DC motors:
Unsuitable settings made to the servo-control parameters can impair the
performance of the M-06x. The consequences of this can be expressed as follows:



Oscillations

If the performance of the M-06x is not satisfactory, check the settings for the
servo-control parameters of your controller.
Imprecise approach of the position
Settling time is too long
6.2 Starting Up the Rotation Stage
Prerequisites

You have read and understood the General Notes on Start-Up (p. 27).

You have properly installed the stage (p. 17).

You have read and understood the user manual of the controller used.

You have read and understood the manual of the PC software used.

The controller and the required PC software have been installed. All
connections on the controller have been set up (see user manual of the
controller; the stage is connected via the motor cable).
Starting up the rotation stage
1. Only M-06x.PD models: Connect the power cord of the power supply to the
power socket.
2. Start up the controller (see user manual of the controller).
Configure the controller during start-up using the PC software for the stage
used (see user manual of the controller and of the PC software):
−
M-06x Rotation Stage
If you use a controller from PI: Select the entry in the stage database that
exactly fits the stage model used (p. 30).
MP47E
Version: 2.0.0
29
6 Start-Up
−
If you use a controller from another manufacturer: Enter the parameters
into the corresponding PC software that exactly fit the stage model used;
see the overview of the operating parameters for DC motor controllers
(p. 30) or stepper motor controllers (p. 31).
3. Start a few motion cycles for testing purposes (see user manual of the
controller).
6.2.1 M-06x Entries in the Stage Database of PI
For controllers from PI, you can select the connected rotation stage from a stage
database in the corresponding PC software. The appropriate operating parameters
are thus loaded to the controller. You can find a detailed description in the user
manual for the controller or in the manual for the PC software used.
INFORMATION
For models with an analog DC gear motor, the stage database contains entries with
the name affix "-PWM". When these entries are used, the controller outputs PWM
signals for operating the stage. The PWM signals must be converted into the analog
signal for the stage by external electronics (PWM/analog converter and separate
amplifier).

Only select an entry containing "-PWM" after you have consulted our customer
service department (p. 37) and provided suitable external electronics in your
application.
6.2.2 Operating Parameters of the Models with DC Motor
If you use a DC motor controller from a third-party supplier, it may be necessary to
enter operating parameters for adaptation to the rotation stage used.
Parameter
30
M-060 model
M-061 model
M-062 model
.DG
.PD
.DG
.PD
.DG
.PD
P term
800
350
260
380
260
450
-
I term
300
450
130
150
130
280
-
D term
450
500
280
350
280
500
-
I limit
2000
2000
2000
2000
2000
2000
-
Maximum
acceleration
100
1000
100
1000
100
1000
°/s²
Version: 2.0.0
MP47E
Unit
M-06x Rotation Stage
6 Start-Up
Parameter
M-060 model
M-061 model
M-062 model
Unit
.DG
.PD
.DG
.PD
.DG
.PD
Maximum velocity*
16
90
9
90
7.5
90
°/s
Maximum velocity*
131742 50000
133388
90000
135859
110000
counts/s
Motor gear ratio
29.6:1
29.6:1
Worm gear ratio
50:1
50:1
90:1
90:1
110:1
110:1
Encoder resolution
8233
556
14820
1000
18115
1222
29.6:1
-
counts/°
* Not recommended for continuous operation
6.2.3 Operating Parameters of the Models with Stepper Motor
If you use a stepper motor controller from a third-party supplier, it may be necessary to
enter operating parameters for adaptation to the rotation stage used.
Parameter
M-060.2S
M-061.2S
M-062.2S
Unit
Recommended start values:
Holding current
200
mA
Operating current
600
mA
Holding current delay
500
ms
Max. motor current
850
mA
Max. acceleration
100
°/s
Max. velocity
36
20
16
°/s
Max. velocity*
18
10
8
°/s
2
Hardware properties:
Full steps
400
steps/motor
revolution
Phase resistance
6.6
ohm
Max. phase current, bipolar
850
mA
* Recommended for continuous operation
M-06x Rotation Stage
MP47E
Version: 2.0.0
31
7 Maintenance
7
Maintenance
In this Chapter
General Notes on Maintenance ................................................................................... 33
Performing a Maintenance Run ................................................................................... 33
Cleaning the M-06x ..................................................................................................... 34
7.1 General Notes on Maintenance
NOTICE
Damage due to improper maintenance!
Improper maintenance can lead to misalignment and failure of the M-06x.

Only loosen screws according to the instructions in this manual.
7.2 Performing a Maintenance Run
Depending on the operating conditions and the period of use of the M-06x, the
following maintenance measures are required:
Maintenance run
The maintenance run serves to distribute the existing lubricant.
 To evenly distribute the existing lubricant, perform a maintenance run over at
least 360° after 500 hours of operation or after 1 year at the latest.
 If you operate the M-06x continuously over a small working range (<20°),
perform a maintenance run over at least 360° every 5000 motion cycles.
M-06x Rotation Stage
MP47E
Version: 2.0.0
33
7 Maintenance
Lubrication
Under laboratory conditions, the rotation stage only needs extra lubrication in
exceptional cases. For continuous industrial use, the lubrication intervals must be
defined individually.
 Do not lubricate the M-06x without consulting our customer service
department (p. 37).
 To lubricate, follow the instructions in the maintenance manual which you can
obtain from our customer service department.
7.3 Cleaning the M-06x
Prerequisites

You have disconnected the rotation stage from the controller and the power
supply.
Cleaning the rotation stage
 If necessary, clean the surfaces of the rotation stage with a cloth that is lightly
dampened with a mild cleanser or disinfectant.
34
Version: 2.0.0
MP47E
M-06x Rotation Stage
8 Troubleshooting
8
Troubleshooting
Problem
Possible causes
Solution
Reduced positioning
accuracy
Warped base body

Increased wear due to small 
motions over a long period of
time
Only M-06x.DG, M06x.PD and M-06x.2S
models: Impairment of
the function after
system modification


Controller has been
replaced.
Mount the M-06x on an even surface.
The recommended evenness of the
surface is 10 µm.
Perform a maintenance run over at least
one rotation of the platform.
Controller from PI:

M-06x has been replaced
with another model.
Load the parameters from the stage
database that correspond to the
combination of controller and M-06x
model.
Controller from a third-party supplier:
Only M-06x.DG, MController and/or power
06x.PD and M-06x.2S supply are incorrectly
models: Mechanical
connected or defective.
system does not move;
no operating noise can
be heard.
M-06x Rotation Stage
MP47E

Check the operating parameters.

Check all connecting cables.

Check the controller.

If present: Check the power supply of the
stage.
Version: 2.0.0
35
8 Troubleshooting
Problem
Possible causes
Solution
When a controller from PI is Motion error = The difference between the
used: There is a motion error current position and the commanded position
of the axis.
exceeds the specified maximum value in
closed-loop operation. For example, motion
errors can be caused by malfunctions of the
drive or the position sensor of the stage.
1. Read out the error code of the controller
in the PC software. If there is a motion
error, error code -1024 is output.
2. Check your system and make sure that
all axes can be moved safely.
3. Switch on the servo mode in the PC
software for the affected axis.
For details, see the user manual of the
controller.
Only M-06x.2S
models: The
mechanical system no
longer moves but
generates operating
noise.
The motor is overloaded by
an external load torque or the
mass to be driven in the case
of strong acceleration or
deceleration.
The motor skips steps. The information on
the current position is lost without the
controller recognizing this state.

Determine the maximum acceleration
and velocity in the application for the
rotation stage.
If the problem that occurred with your system is not listed in the table above or cannot
be solved as described, contact our customer service department (p. 37).
36
Version: 2.0.0
MP47E
M-06x Rotation Stage
9 Customer Service
9
Customer Service
For inquiries and orders, contact your PI sales engineer or send us an e-mail
(mailto:[email protected]).
 If you have questions concerning your system, have the following information
ready:
−
Product codes and serial numbers of all products in the system
−
Firmware version of the controller (if present)
−
Version of the driver or the software (if present)
−
Operating system on the PC (if present)
 If possible: Take photographs or make videos of your system that can be sent
to our customer service department if requested.
The latest versions of the user manuals are available for download (p. 3) on our
website.
M-06x Rotation Stage
MP47E
Version: 2.0.0
37
10 Technical Data
10 Technical Data
In this Chapter
Specifications .............................................................................................................. 39
Dimensions .................................................................................................................. 42
Pin Assignment ............................................................................................................ 46
10.1 Specifications
10.1.1 Data Table
M-060.M0 /
M-061.M0 /
M-062.M0
M-060.PD /
M-061.PD /
M-062.PD
M-060.DG /
M-061.DG /
M-062.DG
M-060.2S /
M-061.2S /
M-062.2S
Rotation
Rotation
Rotation
Rotation
Rotation range
>360
>360
>360
>360
Integrated
sensor
–
Rotary encoder
Rotary encoder
--
Sensor
resolution
–
4000
2000
Design
resolution
–
32 (0.0018) /
17.5 (0.001) /
15 (0.0008)
2.1 (0.00012) /
1.2 (6.9 x 10-5) /
0.96 (5.5 x 10-5)
19.7 (0.0011) /
10.9 (0.00063) /
8.9 (0.00051)*
µrad (°)
Incremental
motion
–
32 / 17.5 / 15
6.3 / 6 / 5
40 / 20 / 18*
µrad
Backlash
–
200 / 200 / 240
200 / 200 / 240
200 / 200 / 240
µrad
Unidirectional
repeatability
–
50 / 50 / 60
50 / 50 / 60
50 / 50 / 60
µrad
Velocity
–
90
16 / 9 / 7.5
36 / 20 / 16
°/s
Worm gear ratio
50:1 /
90:1 /
110:1
50:1 /
90:1 /
110:1
50:1 /
90:1 /
110:1
50:1 /
90:1 /
110:1
Gear ratio
–
–
(28/12) 4:1
29.6:1
–
Active axes
Unit
Tolerance
Motion and
positioning
°
cts./rev.
min.
max.
Mechanical
properties
M-06x Rotation Stage
MP47E
Version: 2.0.0
39
10 Technical Data
M-060.M0 /
M-061.M0 /
M-062.M0
M-060.PD /
M-061.PD /
M-062.PD
M-060.DG /
M-061.DG /
M-062.DG
M-060.2S /
M-061.2S /
M-062.2S
Unit
Tolerance
Motor resolution
–
–
–
6400*
steps/rev.
Load capacity /
axial force
±500 / ±550 / ±650
±500 / ±550 / ±650
±500 / ±550 / ±650
±500 / ±550 / ±650
N
Torque θX, θY
±6 / ±6 / ±7
±6 / ±6 / ±7
±6 / ±6 / ±7
±6 / ±6 / ±7
Nm
max.
Torque θZ
±4 / ±6 / ±8
±4 / ±6 / ±8
±4 / ±6 / ±8
±4 / ±6 / ±8
Nm
max.
Motor type
–
DC motor,
ActiveDrive
DC gear motor
2-phase stepper
motor**
Operating
voltage
–
24 (PWM)
12 differential
24
V
Motor power
–
30
3
4.8
W
Reference point
switch
–
Hall effect
Hall effect
Hall effect
Operating temperature range
-10 to 40
-10 to 40
-10 to 40
-10 to 40
Material
Aluminum
Aluminum
Aluminum
Aluminum
Mass
0.42 / 1.36 / 2.24
0.94 / 1.88 / 2.76
0.94 / 1.88 / 2.76
0.96 / 1.9 / 2.78
C-863 (single-axis)
C-863 (single-axis)
C-663 (single-axis)
C-843 PCI board,
for up to 4 axes
C-843 PCI board,
for up to 4 axes
Drive
properties
Miscellaneous
Recommended
controller / driver
°C
kg
Specifications for vacuum versions can differ.
* With C-663 stepper motor controller.
** Max. 0.85 A/phase; 400 full steps/rev..
40
Version: 2.0.0
MP47E
M-06x Rotation Stage
10 Technical Data
10.1.2 Maximum Ratings
The M-06x rotation stages are designed for the following operating data:
Device
Maximum operating
voltage
Operating frequency
Maximum power
consumption
M-06x.DG
12 V
0 Hz
3W
M-06x.PD
24 V
0 Hz
30 W
M-06x.2S
24 V
0 Hz
4.8 W
10.1.3 Ambient Conditions and Classifications
The following ambient conditions and classifications must be observed for the M-06x:
Area of application
For indoor use only
Maximum altitude
2000 m
Relative humidity
Max. 80 % for temperatures up to 31 °C
Linearly decreasing to 50 % at 40 °C
Storage temperature
-10 °C to 40 °C
Transport temperature
-10 °C to 40 °C
Supply fluctuations
Max. ±10 % of the nominal voltage
Degree of pollution
2
Degree of protection according
to IEC 60529
IP40
10.1.4 Reference Point Switch Specifications
Type
Magnetic (Hall effect) sensor
Supply voltage
+5 V/GND, supplied via the motor connector
Signal output
TTL level
M-06x Rotation Stage
MP47E
Version: 2.0.0
41
10 Technical Data
10.2 Dimensions
10.2.1 M-06x.DG / M-06x.PD / M-06x.2S Models
Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings
.
42
Version: 2.0.0
MP47E
M-06x Rotation Stage
10 Technical Data
Series
M-060
Model
PD
DG
2S
PD
DG
2S
PD
DG
2S
A
90
90
90
130
130
130
150
150
150
B
29
29
29
34
34
34
42
42
42
C
25
25
25
30
30
30
38
38
38
D
35
35
35
55
55
55
65
65
65
E
12.5
12.5
12.5
15
15
15
21.5
21.5
21.5
F
70
70
70
110
110
110
130
130
130
G
60
60
60
100
100
100
120
120
120
H
20
20
20
35
35
35
45
45
45
I
50
50
50
90
90
90
110
110
110
J
38
38
38
50
50
50
60
60
60
K
20
20
20
20
20
20
28
28
28
L
39
34
39
39
34
39
39
34
39
M
80.8
83.8
86.5
80.8
83.8
86.5
80.8
83.8
86.5
N
19
15
19.5
19
15
19.5
19
15
19.5
O
59.3
51.3
52.5
59.3
51.3
52.5
59.3
51.3
52.5
P
7
7
7
4.5
4.5
4.5
-
-
-
M-06x Rotation Stage
M-061
MP47E
M-062
Version: 2.0.0
43
10 Technical Data
10.2.2 M-06x.M0 Models
Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings
.
44
Version: 2.0.0
MP47E
M-06x Rotation Stage
10 Technical Data
Model
M-060.M0
M-061.M0
M-062.M0
A
90
130
150
B
29
34
42
C
25
30
38
D
35
55
65
E
12.5
15
21.5
F
70
110
130
G
60
100
120
H
20
35
45
I
50
90
110
J
38
50
60
K
20
20
28
M-06x Rotation Stage
MP47E
Version: 2.0.0
45
10 Technical Data
10.3 Pin Assignment
10.3.1 Sub-D 15 (m) Controller Connection
Figure 12: Sub-D 15 (m) controller connection, front view
M-06x.DG models
Pin
Signal
Direction
1
Not connected
-
Motor (-)
Input
Motor (+)
Input
GND
GND
Not connected
-
Not connected
-
+ 5 V (encoder)
Input
Not connected
-
Not connected
-
Reference
Output
GND
GND
Encoder A (+)
Output
Encoder A (-)
Output
Encoder B (+)
Output
Encoder B (-)
Output
9
2
10
3
11
4
12
5
13
6
14
7
15
8
46
Version: 2.0.0
MP47E
M-06x Rotation Stage
10 Technical Data
M-06x.PD models
Pin
Signal
Direction
1
Not connected
-
Not connected
-
Not connected
-
GND
GND
MAGN (PWM magnitude)
Input
SIGN (PWM sign)
Input
+5V
Input
Not connected
-
Not connected
-
Reference
Output
GND
GND
Encoder A (+)
Output
Encoder A (-)
Output
Encoder B (+)
Output
Encoder B (-)
Output
9
2
10
3
11
4
12
5
13
6
14
7
15
8
M-06x Rotation Stage
MP47E
Version: 2.0.0
47
10 Technical Data
M-06x.2S models
Pin
Signal
Direction
1
Motor phase 1A
Input
Motor phase 1B
Input
Motor phase 2A
Input
Motor phase 2B
Input
Not connected
-
Not connected
-
Not connected
-
Not connected
-
Not connected
-
Not connected
-
+5 V
Input
Not connected
-
GND
GND
Reference
Output
Not connected
-
9
2
10
3
11
4
12
5
13
6
14
7
15
8
10.3.2 Mini XLR3 (m) Power Supply Connection
Connecting a power supply is only necessary with the M-06x.PD models.
Figure 13: Mini XLR 3 (m) power supply connection, front view
48
Pin
Signal
Direction
1
GND
GND
2
24 V DC supply voltage
Input
3
Not connected
-
Version: 2.0.0
MP47E
M-06x Rotation Stage
11 Old Equipment Disposal
11 Old Equipment Disposal
In accordance with EU law, electrical and electronic equipment may not be disposed
of in EU member states via the municipal residual waste.
Dispose of your old equipment according to international, national, and local rules and
regulations.
In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI)
GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment
made available on the market after 13 August 2005 without charge.
Any old PI equipment can be sent free of charge to the following address:
Physik Instrumente (PI) GmbH & Co. KG
Auf der Roemerstr. 1
D-76228 Karlsruhe, Germany
M-06x Rotation Stage
MP47E
Version: 2.0.0
49
12 EC Declaration of Conformity
12 EC Declaration of Conformity
For the M-06x, an EC Declaration of Conformity has been issued in accordance with
the following European directives:
2004/108/EC, EMC Directive
2011/65/EU, RoHS Directive
The applied standards certifying the conformity are listed below.
EMC: EN 61326-1:2013
Safety: EN 61010-1:2010
RoHS: EN 50581:2012
M-06x Rotation Stage
MP47E
Version: 2.0.0
51
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