Sputter Coater (Polaron) User Manual 2nd Edition Sept 2012 NR I) Check the following on the front panel • LEAK valve is closed (clockwise). • VENT valve is closed (clockwise). • The timer is set to the desired time. • VOLTAGE CONTROL set to zero. II) Loading specimens • Put on a pair of gloves. • Open Ar gas cylinder, gas pressure 20~30 psi. • Open the top plate of the sample chamber. • Place the sample mount in the sample holder. • Close the top plate of sample chamber. III) Pumping • Turn the OPERATION SWITCH to the PUMP position. • Wait for the vacuum gauge to indicate 0.1 mbar. May take up to 20min. IV) Flushing Chamber • Open the LEAK valve by rotating it counterclockwise until the vacuum gauge indicates 0.5 mbar, wait for 10 seconds. • Close the LEAK valve, wait the system to pump down to 0.07~0.08 mbar. • Open the LEAK valve again to flush argon for 10 seconds with the gauge indicating 0.5 mbar. • Close the LEAK valve and pump down to about 0.06 mbar, wait about 5 minutes. V) Coating Specimens • Open LEAK valve to ~0.14 mbar (marked). • Turn voltage control knob to 2.5 kV. • Switch to SET HT, quickly check current is reading ~18mA and switch to CONTROL. • Press start and deposition will occur for specified time. Approximately 13.5nm/minute. WARNING: If pressure is too high fuse will blow! VI) Shutdown • Turn voltage to zero. • Close LEAK valve. • Turn OPERATION SWITCH to OFF. • Open VENT valve slowly to let Ar bring the chamber back to atmospheric pressure. VII) Clean-up • Take out sample and close the top plate of sample chamber. • Close gas cylinder. • Close the VENT valve. •Clean chamber with ethanol and Chem Wipe.