VS Series Helium Mass Spectrometer Leak Detector

VS Series Helium Mass Spectrometer Leak Detector
VS Series Helium
Mass Spectrometer
Leak Detector
Models: PR02, MR15, MD30, BR15, BD30 and PD03
Manual No. 699910004
Revision B
January 2009
FIELD SERVICE
COMPONENT REPLACEMENT
MANUAL
DRAFT 6/4/11
Vacuum Products Division
VS Series Helium Mass Spectrometer Leak Detector
DRAFT 6/4/11
VS Series Helium Mass Spectrometer Leak
Detector
Alconox is a registered trademark of Alconox, Inc.
Apiezon is a registered trademark of M&I Materials Ltd.
Scotch-Brite is a trademark of 3M.
Loctite and PST are registered trademarks of Loctite Corporation
Teflon is a registered trademarks of E. I. du Pont de Nemours and Company.
Copyright 2009
Agilent, Inc.
VS Series Helium Mass Spectrometer Leak Detector
Products manufactured by Seller are warranted against defects in materials and workmanship for
twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of
the purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjustment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at Customer expense; in addition, a charge for testing and examination may be made on Products so returned.
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VS Series Helium Mass Spectrometer Leak Detector
Preface ........................................................................................................................................... xviii
Documentation Standards ....................................................................................................... xviii
Text ..................................................................................................................................... xviii
Hazard and Safety Information ..................................................................................................xix
Solvents .................................................................................................................................xx
Vacuum Equipment and Cleanliness .....................................................................................xx
O-ring Care ...........................................................................................................................xxi
Metal Seal Care ................................................................................................................... xxii
Equipment, General ............................................................................................................. xxii
Power and Static Sensitivity................................................................................................ xxiv
Spectrometer...................................................................................................................... xxvii
Pumps ................................................................................................................................ xxvii
Agilent Services ..................................................................................................................... xxviii
Contacting Agilent .................................................................................................................. xxviii
Tools Required for Component Replacement .......................................................................... xxix
Materials Required for Component Replacement .................................................................... xxix
Section 1. Introduction to the VS Series Leak Detector .................................................................. 1-1
1.1 The VS Series Leak Detector ............................................................................................. 1-1
1.1.1 VS Series Leak Detector Configurations..................................................................... 1-3
1.2 Front Panel Display and Controls ........................................................................................ 1-5
1.3 Display Panel Controls......................................................................................................... 1-8
1.4 Rear Panel ......................................................................................................................... 1-10
Section 2. Cleaning the Test Port ................................................................................................... 2-1
Section 3. Internal Calibrated Leak Replacement ........................................................................... 3-1
3.1 Recalibrating the Internal Calibrated Leak .......................................................................... 3-1
3.2 Replacing the Internal Calibrated Leak................................................................................ 3-1
3.2.1 Equipment Required ................................................................................................... 3-1
Section 4. Valve Block (Turbo) and Spectrometer Assembly Removal .......................................... 4-1
4.2.1 Equipment Required ................................................................................................... 4-1
4.1 Removing the Covers ......................................................................................................... 4-2
4.2 Removing the Valve Block Wiring Harness ......................................................................... 4-3
4.3 Removing the Valve Block Assembly and Spectrometer..................................................... 4-4
4.4 Replacing the Turbo Pump, Valve Block and Spectrometer................................................ 4-9
4.5 Replacing the Valve Block Harness and Thermocouple Wiring........................................... 4-9
Section 5. The Electronics .............................................................................................................. 5-1
5.5.1 Equipment Required ................................................................................................... 5-1
5.1 User Interface ..................................................................................................................... 5-1
5.2 CPU Board........................................................................................................................... 5-7
5.3 Ion Source Board ................................................................................................................. 5-9
5.4 Mother Board ..................................................................................................................... 5-11
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Contents
VS Series Helium Mass Spectrometer Leak Detector
5.5 Valve Driver Board............................................................................................................. 5-14
5.6 Turbo Controller Board ...................................................................................................... 5-16
Section 6. Turbo Molecular Pump and Roughing/Foreline Pumps ................................................. 6-1
6.6.1 Equipment Required ................................................................................................... 6-1
6.1 DS-42 Fore Pump ............................................................................................................... 6-1
6.2 Scroll Pump.......................................................................................................................... 6-6
6.2.2 Valve Block Wiring Harness........................................................................................ 6-6
6.2.3 Removing the Valve Block Assembly and Spectrometer ............................................ 6-8
6.2.4 Replacing the Turbo Pump, Valve Block and Spectrometer ..................................... 6-11
6.2.5 Replacing the Valve Block Harness and Thermocouple Wiring................................ 6-11
6.3 Changing the Mechanical Pump Fluid ............................................................................... 6-12
Section 7. Fan Replacement .......................................................................................................... 7-1
7.3.1 Equipment Required ................................................................................................... 7-1
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Section 8. Power Supply ................................................................................................................. 8-1
8.3.1 Equipment Required ................................................................................................... 8-1
Section 9. Speaker Replacement ................................................................................................... 9-1
9.3.1 Equipment Required ................................................................................................... 9-1
Section 10. Filament Replacement ............................................................................................... 10-1
10.1 Installation Procedure ...................................................................................................... 10-1
10.1.1 Equipment Required ............................................................................................... 10-1
Section 11. Thermocouple Gauge and Octal Cable Replacement ............................................... 11-1
11.1 Installation Procedure ...................................................................................................... 11-1
11.1.1 Equipment Required ............................................................................................... 11-1
Section 12. Compression Port Adapter Kit ................................................................................... 12-1
12.1 Installation Procedure ...................................................................................................... 12-1
12.1.1 Equipment Required ............................................................................................... 12-1
Section 13. Oil Mist Eliminator Installation .................................................................................... 13-1
13.1 Installation Instructions .................................................................................................... 13-1
Section 14. Ion Source Replacement ........................................................................................... 14-1
14.1 Installation Procedure ..................................................................................................... 14-1
Section 15. Flapper Box Installation ............................................................................................. 15-1
15.1 Installation Procedure ..................................................................................................... 15-1
Section 16. I/O Card Installation ................................................................................................... 16-1
16.1 Installation Procedure ...................................................................................................... 16-1
16.1.1 Equipment Required ............................................................................................... 16-1
Section 17. Wireless Remote Base Unit Installation ..................................................................... 17-1
17.1 Installation Procedure ...................................................................................................... 17-1
17.1.1 Equipment Required ............................................................................................... 17-1
Section 18. Scroll Pump Replacement
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VS Series Helium Mass Spectrometer Leak Detector
(PD03 only) ................................................................................................................................... 18-1
18.1 Installation Procedure ...................................................................................................... 18-1
18.1.1 Equipment Required ............................................................................................... 18-1
Section 19. Scroll Pump Fan Replacement
(PD03 only) ................................................................................................................................... 19-1
19.1 Installation Procedure ...................................................................................................... 19-1
19.1.1 Equipment Required ............................................................................................... 19-1
Section 20. Clippard Valve Replacement
(PD03 only) ................................................................................................................................... 20-1
20.1 Installation Procedure ...................................................................................................... 20-1
20.1.1 Equipment Required ............................................................................................... 20-1
Section 22. Diaphragm Pump Replacement (PD03 only) ............................................................. 22-1
22.1 Installation Procedure ...................................................................................................... 22-1
22.1.1 Equipment Required ............................................................................................... 22-1
Section 23. Diaphragm and Seal Replacement (PD03 only) ........................................................ 23-1
23.1 Installation Procedure ...................................................................................................... 23-1
23.1.1 Equipment Required ............................................................................................... 23-1
Section 24. Manual Tuning, Calibration, Maintenance Screen and Fore Pump Set-Up ............... 24-1
24.1 Manual Tuning ................................................................................................................ 24-1
24.2 Gauge Calibration ............................................................................................................ 24-4
24.2.1 Vacuum (Low Pressure) Calibration ....................................................................... 24-5
24.2.2 Atmospheric Calibration .......................................................................................... 24-5
24.3 Maintenance Screen ........................................................................................................ 24-6
24.3.1 Cal Leak Expiration Set-Up..................................................................................... 24-8
24.4 Fore Pump Set-Up ........................................................................................................... 24-9
24.4.1 Date Serviced........................................................................................................ 24-10
Section 25. Maintenance .............................................................................................................. 25-1
25.1 Daily Maintenance .......................................................................................................... 25-5
25.1.1 Sensitivity Check..................................................................................................... 25-5
25.2 Dry Nitrogen Vent ............................................................................................................ 25-5
25.3 Spare Parts List ............................................................................................................... 25-6
25.4 Leak Detector Accessory Item List .................................................................................. 25-7
Section 26. Leak Checking for Reliability ...................................................................................... 26-1
26.1 General Suggestions for Leak Checking ........................................................................ 26-1
A.1 Protocol (RS-232)................................................................................................................A-1
A.2 Communicating with RS-232 ...............................................................................................A-2
A.2.1 Windows HyperTerminal Set-Up Instructions ............................................................A-2
A.2.2 Printing with HyperTerminal .......................................................................................A-4
A.3 Customer Accessible Inputs and Outputs .........................................................................A-13
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Section 21. Exhaust Valve Replacement
(PD03 only) ................................................................................................................................... 21-1
21.1 Installation Procedure ...................................................................................................... 21-1
21.1.1 Equipment Required ............................................................................................... 21-1
VS Series Helium Mass Spectrometer Leak Detector
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A.3.1 Serial Connector ......................................................................................................A-13
A.3.2 I/O Connector ..........................................................................................................A-13
C.1 Spectrometer Tube Description...........................................................................................C-2
C.2 Printed Circuit Boards P/Ns and Descriptions.....................................................................C-3
C.2.1 CPU PCB ..................................................................................................................C-3
C.2.2 Motherboard PCB ......................................................................................................C-4
C.2.3 Ion Source PCB .........................................................................................................C-5
C.2.4 Valve Driver PCB ......................................................................................................C-6
C.2.5 Turbo Controller PCB ................................................................................................C-6
C.2.6 Front Panel Controller PCB .......................................................................................C-7
C.2.7 Pre-Amp PCB ............................................................................................................C-8
C.2.8 Temperature Sensor PCB .........................................................................................C-8
C.2.9 Discrete I/O PCB .......................................................................................................C-9
C.2.10 WRC-B PCB ..........................................................................................................C-10
C.2.11 WRC_HH PCB ......................................................................................................C-11
D.1 Start Up and Operational Failures.......................................................................................D-1
D.2 Operational Failures ..........................................................................................................D-13
D.3 Performance Issues ..........................................................................................................D-22
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VS Series Helium Mass Spectrometer Leak Detector
1-1
1-2
1-3
1-4
1-5
1-6
1-7
1-8
2-1
2-2
2-3
3-1
3-2
3-3
4-1
4-2
4-3
4-4
4-5
4-6
4-7
4-8
4-9
4-10
4-11
4-12
4-13
5-1
5-2
5-3
5-4
5-5
5-6
5-7
5-8
5-9
5-10
5-11
5-12
5-13
Portable Leak Detector with Internal DS42 Wet Rotary Vane Pump, Model VS PR02, and
Portable Leak Detector with Internal IDP-3 (PD03) Dimensions ........................................ 1-3
Mobile Leak Detector with External DS302 Wet Rotary Vane Pump on a Cart, Model VS
MR15, Dimensions.............................................................................................................. 1-3
Mobile Leak Detector with External TS620 Dry Scroll Pump on a Cart, Model VS MD30,
Dimensions ......................................................................................................................... 1-4
Front Panel Displays and Controls ..................................................................................... 1-5
Screen Flow ........................................................................................................................ 1-7
VS Series Rear Panel ....................................................................................................... 1-10
Optional I/O PCB Rear Panel ........................................................................................... 1-11
Rear Panel (with Discrete I/O PCB).................................................................................. 1-13
Test Port with Blank-Off Flange Cap .................................................................................. 2-1
Centering Ring with O-ring.................................................................................................. 2-2
O-ring and Centering Ring on Test Port ............................................................................. 2-3
Rear Cover Screws............................................................................................................. 3-2
Calibrated Leak Location .................................................................................................... 3-2
High Voltage Location......................................................................................................... 3-3
Rear and Front Cover Screws ............................................................................................ 4-2
Sensor Wiring and Thermocouple ...................................................................................... 4-3
Thermocouple ..................................................................................................................... 4-3
Test Port Grounding Wire Connection ................................................................................ 4-4
Vacuum Connection............................................................................................................ 4-4
Valve Block Ground ............................................................................................................ 4-5
Spectrometer Ground Wire ................................................................................................. 4-5
Leak Sensor and Pre-Amp Cables ..................................................................................... 4-6
Plastic Shield ...................................................................................................................... 4-6
Valve Block Assembly and Spectrometer M5 Mounting Screws ........................................ 4-7
Calibrated Leak Connection................................................................................................ 4-7
Turbo Controller Connection............................................................................................... 4-8
Spectrometer Nut Locations ............................................................................................... 4-8
Rear and Front Cover Screws ............................................................................................ 5-2
User Interface Plate Mounting Screw ................................................................................. 5-2
Interface Board Wiring ........................................................................................................ 5-3
Interface Board Mounting Nuts ........................................................................................... 5-3
User Interface Board to Front Panel Display Wiring ........................................................... 5-4
White Plug to Front Panel ................................................................................................... 5-4
Green/Yellow Wire to Front Panel ...................................................................................... 5-5
White Plug to Front Panel ................................................................................................... 5-6
Rear and Front Cover Screws ............................................................................................ 5-7
Mounting Screws ................................................................................................................ 5-8
Rear and Front Cover Screws ............................................................................................ 5-9
Mounting Screws .............................................................................................................. 5-10
Rear and Front Cover Screws .......................................................................................... 5-11
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Figures
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VS Series Helium Mass Spectrometer Leak Detector
5-14
5-15
5-16
5-17
5-18
5-19
5-20
6-1
6-2
6-3
6-4
6-5
6-6
6-7
6-8
6-9
6-10
6-11
6-12
6-13
6-14
6-15
7-1
7-2
7-3
7-4
7-5
7-6
7-7
8-1
8-2
8-3
8-4
8-5
9-1
9-2
10-1
10-2
10-3
10-4
10-5
10-6
10-7
10-8
10-9
10-10
x
Motherboard Screw Locations .......................................................................................... 5-12
Rear and Front Cover Screws .......................................................................................... 5-14
M4 Mounting Screws ........................................................................................................ 5-14
Valve Driver Board Mounting Screws ............................................................................... 5-15
Rear and Front Cover Screws .......................................................................................... 5-16
M4 Mounting Screws ........................................................................................................ 5-16
Turbo Controller Board Mounting Screws......................................................................... 5-17
Rear and Front Cover Screws ............................................................................................ 6-2
Valve Block Connection ...................................................................................................... 6-3
Fore Pump Cap .................................................................................................................. 6-4
Cap Wire Connections ........................................................................................................ 6-4
Fore Pump Mounting Screws ............................................................................................. 6-5
Fore Pump Mounting Spacers ............................................................................................ 6-5
Rear and Front Cover Screws ............................................................................................ 6-7
Sensor Wiring and Thermocouple ...................................................................................... 6-7
Thermocouple ..................................................................................................................... 6-8
Test Port Grounding Wire Connection ................................................................................ 6-8
Vacuum Connection ........................................................................................................... 6-9
Valve Block and TC Ground ............................................................................................... 6-9
Spectrometer Ground Wire ............................................................................................... 6-10
Valve Block Assembly and Spectrometer Mounting Nuts................................................. 6-10
Turbo Pump Connector .................................................................................................... 6-11
Fan Locations ..................................................................................................................... 7-1
Rear and Front Cover Screws ............................................................................................ 7-2
Fan Wiring .......................................................................................................................... 7-2
Fan Nuts ............................................................................................................................. 7-3
Rear and Front Cover Screws ............................................................................................ 7-4
Fan Wiring .......................................................................................................................... 7-4
Fore Pump Connection ....................................................................................................... 7-5
Rear and Front Cover Screws ............................................................................................ 8-1
User Interface Plate Mounting Screw ................................................................................. 8-2
Interface Board Wiring ........................................................................................................ 8-3
Power Supply Connections................................................................................................. 8-4
Power Supply Mounting Holes............................................................................................ 8-5
Rear and Front Cover Screws ............................................................................................ 9-1
Speaker Nuts and Wiring .................................................................................................... 9-2
Rear Screws ..................................................................................................................... 10-1
Fan Assembly ................................................................................................................... 10-2
Cable Locations ................................................................................................................ 10-2
Spectrometer Exploded View ........................................................................................... 10-3
Coupler Screws ................................................................................................................ 10-4
Coupler and Filament Assembly ....................................................................................... 10-4
Filament Position .............................................................................................................. 10-5
Filament Alignment ........................................................................................................... 10-5
Figure 9: Spectrometer Alignment .................................................................................... 10-6
Direction of Cone .............................................................................................................. 10-6
10-11
10-12
10-13
11-1
11-2
11-3
11-4
11-5
11-6
12-1
12-2
12-3
13-1
13-2
13-3
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14-2
14-3
14-4
14-5
14-6
14-7
14-8
14-9
14-10
14-11
14-12
14-13
14-14
14-15
14-16
14-17
14-18
15-1
15-2
15-3
15-4
15-5
15-6
15-7
15-8
15-9
15-10
16-1
16-2
16-3
Ion Source Header Pin Schematic.................................................................................... 10-7
Ion Source Header Pin Locations ..................................................................................... 10-7
Vent Valve......................................................................................................................... 10-8
Rear and Front Cover Screws .......................................................................................... 11-2
Fan and TC Gauge Assemblies........................................................................................ 11-2
Octal Cable ....................................................................................................................... 11-3
Thermocouple Gauge Orientation..................................................................................... 11-3
Figure 5: Ground Lug Position .......................................................................................... 11-4
Octal Cable ....................................................................................................................... 11-4
Rear and Front Cover Screws .......................................................................................... 12-1
Compression Test Port Flange ......................................................................................... 12-2
Compression Port Adapter Kit .......................................................................................... 12-2
Unit Before Install.............................................................................................................. 13-1
KF-16 Flange Adapter w/Centering Ring .......................................................................... 13-2
Figure 3: Oil Mist Eliminator After Install........................................................................... 13-2
Rear Screws ..................................................................................................................... 14-2
Fan Assembly ................................................................................................................... 14-2
Cable Locations ................................................................................................................ 14-3
Spectrometer Exploded View............................................................................................ 14-4
Direction of Cone .............................................................................................................. 14-4
Ion Support Assembly....................................................................................................... 14-5
M4 Support Screws........................................................................................................... 14-5
Partial Pressure Plate ....................................................................................................... 14-6
Extractor Plate .................................................................................................................. 14-6
Filament Alignment ........................................................................................................... 14-7
Coupler and Filament Assembly ....................................................................................... 14-7
Filament Position .............................................................................................................. 14-8
Filament Alignment ........................................................................................................... 14-8
Spectrometer Alignment ................................................................................................... 14-9
Direction of Cone ............................................................................................................ 14-10
Ion Source Header Pin Schematic.................................................................................. 14-10
Ion Source Header Pin Locations ................................................................................... 14-11
Vent Valve....................................................................................................................... 14-11
Rear and Front Cover Screws .......................................................................................... 15-1
Plastic Shield .................................................................................................................... 15-2
I/O Assembly with Screws ................................................................................................ 15-2
I/O Bracket ........................................................................................................................ 15-3
I/O Clip .............................................................................................................................. 15-3
Front Panel Removal ........................................................................................................ 15-3
PCB Mounting Tray........................................................................................................... 15-4
Flapper Box Wiring Harness Layout ................................................................................. 15-4
Front Cover Assembly ...................................................................................................... 15-5
Flapper Box Assembly, NW25 Installation........................................................................ 15-5
Rear and Front Cover Screws .......................................................................................... 16-2
Back Plate with Screws..................................................................................................... 16-2
Plastic Shield .................................................................................................................... 16-3
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VS Series Helium Mass Spectrometer Leak Detector
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17-2
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18-5
18-6
19-1
19-2
19-3
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24-5
24-6
24-7
A-1
A-2
A-3
D-1
D-2
D-3
D-4
D-5
D-6
D-7
xii
I/O Cable to Mother Board ................................................................................................ 16-3
I/O Bracket Installation...................................................................................................... 16-4
I/O Bracket ........................................................................................................................ 16-4
I/O Clip .............................................................................................................................. 16-5
Rear and Front Cover Screws .......................................................................................... 17-2
Fan Assembly and Socket Head Cap Screw .................................................................... 17-2
Wireless Antenna.............................................................................................................. 17-3
Base Board Assembly with Posts ..................................................................................... 17-3
Front Panel Display .......................................................................................................... 17-4
Label ................................................................................................................................. 17-5
Rear and Front Cover Screws .......................................................................................... 18-1
NW 16 Connection............................................................................................................ 18-2
Scroll Pump Mounting Connections.................................................................................. 18-2
Exhaust Hose ................................................................................................................... 18-3
Fan Assembly Mounts ...................................................................................................... 18-3
Manifold Block Connections ............................................................................................. 18-4
Rear and Front Cover Screws .......................................................................................... 19-1
Fan Screws ....................................................................................................................... 19-2
Connector Routing ............................................................................................................ 19-2
Rear and Front Cover Screws .......................................................................................... 20-1
Spade Connectors ............................................................................................................ 20-2
Rear and Front Cover Screws .......................................................................................... 21-1
Unit Screws....................................................................................................................... 21-2
Rear and Front Cover Screws .......................................................................................... 22-1
Molex Connector............................................................................................................... 22-2
Ground Connection........................................................................................................... 22-2
Pump to Plate Connections .............................................................................................. 22-3
Rear and Front Cover Screws .......................................................................................... 23-1
Pump Head Removal........................................................................................................ 23-2
Manual Tuning .................................................................................................................. 24-1
Gauge Calibration ............................................................................................................. 24-4
Maintenance ..................................................................................................................... 24-6
Internal Calibrated Leak.................................................................................................... 24-7
Cal Leak Expiration Set-Up .............................................................................................. 24-8
Fore Pump Set-Up ............................................................................................................ 24-9
Date Serviced ................................................................................................................. 24-10
Serial Connector Map .......................................................................................................A-13
Optically Isolated Output Circuit Sketch ...........................................................................A-16
Optically Isolated Input Circuit Sketch ..............................................................................A-17
VS Series Power and Communications Panel....................................................................D-1
DS42 Mechanical Pump Removal ......................................................................................D-2
Board Locations ..................................................................................................................D-3
Valve Driver and Turbo Controller Boards ..........................................................................D-5
Valve Block - Exploded View ..............................................................................................D-6
VPI Valve ............................................................................................................................D-7
Valve Block Spectrometer - Exploded View .......................................................................D-7
VS Series Helium Mass Spectrometer Leak Detector
Screws - Exploded View .................................................................................................... D-9
Washer Alignment and Pattern .......................................................................................... D-9
Spectrometer (Ion Source Assembly) .............................................................................. D-10
Spectrometer Header: Decomposition............................................................................. D-10
Pre-Amp Board - Measurement Points ............................................................................ D-11
Ion Source Board - Measurement Points......................................................................... D-15
Interconnection Diagram.....................................................................................................E-1
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D-8
D-9
D-10
D-11
D-12
D-13
E-1
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1-1
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25-1
25-2
25-3
25-4
25-5
A-1
A-2
A-3
A-4
A-5
A-6
B-1
B-2
D-1
VS Series Leak Detector Configurations and Part Numbers ............................................. 1-2
Screens – General Description .......................................................................................... 1-8
Scheduled Maintenance .................................................................................................. 25-3
As-Required Maintenance ............................................................................................... 25-3
Fuses and Circuit Breakers.............................................................................................. 25-4
Leak Detector Spare Parts............................................................................................... 25-6
Leak Detector Accessory Item List .................................................................................. 25-7
Internal Operating Parameters ...........................................................................................A-5
Non-Volatile Operating Parameters ...................................................................................A-7
Spectrometer Operating Parameters ...............................................................................A-10
Leak Detection Actions ....................................................................................................A-11
Serial Connector Summary ..............................................................................................A-13
I/O Connector Pin Signals ................................................................................................A-13
Spare Parts ........................................................................................................................B-1
Leak Detector Accessory Item List ....................................................................................B-3
Spectrometer Header, Pre-amp Board J1 Pin Assignments ........................................... D-11
xv
D RA F T 6/ 4/ 11
Tables
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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CE DECLARATION OF CONFORMITY
We
Wir
Nous
Nosotros
Wij
Noi
Agilent, Inc.
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
V S S e r ie s H e l iu m M a ss S p e c t ro m e t e r L e a k D e t e c t o rs :
M o d els V S P R0 2 x , V S M R1 5 x , V S M D 3 0 x , V S BR 1 5 x, V S B D 3 0 x an d P D 0 3
( W i t h O p t io n a l W ir e l e s s R e m o t e C o n t r o l a n d D is c r e t e I / O )
to w h i c h th is d e c la r a tio n r e la te s is i n c o n fo rm it y w ith th e fo llo w in g s ta n d a r d s :
S a fe ty :
E N 6 1 0 1 0 -1 , S e c o n d E d i ti o n , 2 0 0 1 - S a f e ty R e q u i r e m e n ts f o r E l e c tri c a l E q u i p m e n t f o r M e a s u re m e n t , C o n t ro l , a n d L a b o ra t o r y U s e - P a rt 1 :
G e n e ra l R e q u i re m e n t s
p e r th e p r o v i s i o n s o f t h e L o w V o l t a g e D ir e c t i v e 7 3 / 2 3 / E E C o f 1 9 F e b ru a r y 1 9 7 3 a s A m e n d e d b y 9 3 / 6 8 / E E C , A rti c le 1 3 , o f 2 2 J u ly 1 9 9 3 .
C A N / C S A -C 2 2 .2 N o . 6 1 0 1 0 -1 -0 4 - S a f e t y R e q u i r e m e n t s f o r E l e c tri c a l E q u i p m e n t f o r M e a s u re m e n t , C o n t ro l, a n d L a b o ra t o r y U s e -P a r t 1 : G e n e ra l
R e q u ire m e n t s ( A d o p t e d IE C 6 1 0 1 0 -1 : 2 0 0 1 , M O D )
U L 6 1 0 1 0 -1 , S e c o n d E d i ti o n , 2 0 0 4 - S a f e ty R e q u i r e m e n ts f o r E l e c tri c a l E q u i p m e n t f o r M e a s u re m e n t , C o n t ro l , a n d L a b o ra t o r y U s e - P a rt 1 :
G e n e ra l R e q u i re m e n t s
E M C E m i s s i o n a n d I m m u n it y :
E N 5 5 0 1 1 : 1 9 9 8 / A 1 : 1 9 9 9 / A 2 : 2 0 0 2 G r o u p 1 C la s s A : I S M r a d i o -f r e q u e n c y e q u i p m e n t - R a d i o d i s t u rb a n c e c h a ra c t e ri s t ic s - L i m i t s a n d m e t h o d s
o f m ea s u r e m e n t (E U )
E N 6 1 3 2 6 : 1 9 9 7 / A 1 : 1 9 9 8 / A 2 : 2 0 0 1 E le c t r i c a l e q u i p m e n t fo r m e a s u re m e n t, c o n tr o l a n d l a b o r a t o ry u s e - E M C r e q u ire m e n t s (E U )
p e r th e p r o v i s i o n s o f t h e E l e c tr o m a g n e ti c C o m p a tib i li t y D ir e c ti v e 8 9 /3 3 6 /E E C o f 3 M a y 1 9 8 9 a s A m e n d e d b y 9 2 / 3 1 / E E C o f 2 8 A p ri l 1 9 9 2 a n d 9 3 / 6 8 /
E E C , A r t ic l e 5 o f 2 2 J u l y 1 9 9 3
A S /N Z S C I S P R 1 1 : 2 0 0 4 C l a s s A : I S M r a d io - f re q u e n c y e q u ip m e n t - E l e c t r o m a g n e ti c d i s t u r b a n c e c h a ra c t e ri s t i c s - L i m i t s a n d m e t h o d s o f
m e a s u re m e n t ( A u s t ra l i a )
F C C : C o d e o f F e d e ra l R e g u l a t i o n s , 4 7 C F R : 2 0 0 4 , P a rt 1 5 C , S e c t i o n 1 5 . 2 4 , C l a s s A : T e le c o m m u n i c a ti o n , R a d i o F re q u e n c y D e v i c e s, O p e ra t i o n
w i t h in t h e b a n d s 9 0 2 - 9 2 8 M H z , 2 4 0 0 -2 4 8 3 .5 M H z , a n d 5 7 2 5 - 5 8 5 0 M H z ( U S A )
C A N / I C : R a d i o S t a n d a rd S p e c i f ic a t i o n R S S - 2 1 0 , I ss u e 5 , f o r L o w P o w e r L i c e n s e - E x e m p t R a d io c o m m u n i c a t i o n D e v i c e s o f I n d u s t ry C a n a d a ,
N o v e m b e r 2 0 0 1 (C a n a d a )
EM C a n d R ad io S p e ctr u m M a tter s :
E N 3 0 0 3 2 8 -1 V 1 . 3 . 1 ( 2 0 0 1 - 1 2 ) E l e c t ro m a g n e t i c c o m p a ti b i li t y a n d R a d io s p e c t ru m M a t t e r s ( E R M ) : W i b a n d T r a n sm is s i o n s y s t e m s ; D a t a
t r a n s m it t i n g e q u i p m e n t o p e r a t i n g in th e 2 . 4 G H z I S M b a n d a n d u s i n g sp re a d sp e c t r u m m o d u l a t i o n te c h n i q u e s ; P a r t 1 : T e c h n ic a l c h a r a c te ris ti c s a n d
te s t c o n d iti o n s (E U )
E N 3 0 0 3 2 8 -2 V 1 . 2 . 1 ( 2 0 0 1 - 1 2 ) E l e c t ro m a g n e t i c c o m p a ti b i li t y a n d R a d io s p e c t ru m M a t t e r s ( E R M ) : W i b a n d T r a n sm is s i o n s y s t e m s ; D a t a
t r a n s m it t i n g e q u i p m e n t o p e ra ti n g i n t h e 2 .4 G H z IS M b a n d a n d u s i n g s p re a d s p e c tru m m o d u l a t i o n t e c h n i q u e s ; P a r t 2 : H a rm o n i z e d E N c o v e rin g
e s s e n t i a l re q u i r e m e n t s u n d e r a r t ic l e 3 .2 o f R & T T E D ire c t i v e ( E U )
E N 3 0 1 4 8 9 -1 V 1 . 3 . 1 ( 2 0 0 1 - 0 9 ) E l e c t ro m a g n e t i c c o m p a ti b i li t y a n d R a d io s p e c t ru m M a t t e r s ( E R M ) : E l e c t ro m a g n e ti c C o m p a t i b i li t y ( E M C )
s t a n d a rd fo r ra d i o e q u i p m e n t a n d s e rv i c e s: P a rt 1 : C o m m o n T e c h n i c a l r e q u ire m e n t s ( E U )
E N 3 0 1 4 8 9 -1 7 V 1 .1 . 1 ( 2 0 0 1 - 0 9 ) E l e c t ro m a g n e t i c c o m p a ti b i l it y a n d R a d i o sp e c t r u m M a t t e r s ( E R M ) : E l e c t ro m a g n e ti c C o m p a t i b il i t y ( E M C )
s t a n d a rd fo r ra d i o e q u i p m e n t a n d s e rv i c e s: P a rt 1 7 : S p e c i f ic c o n d i t i o n s fo r W i d e b a n d d a ta a n d H I P E R L A N e q u i p m e n t ( E U )
p e r th e p r o v i s i o n s o f t h e R a d i o a n d T e l e c o m m u n i c a t i o n s T e r m in a l E q u i p m e n t ( R & T T E ) D ir e c t i v e , 1 9 9 9 /5 / E C o f 9 M a rc h 1 9 9 9
The authorized representative located within Community is:
Agilent, Inc. (Torino)
Varian S.p.A
Via F.lli Varian.54
Leini (Torino) - Italy
Tel: (39) 011 997 9 111
Fax: (39) 011 997 9 350
John Ehmann
Operations Manager
Agilent, Inc.
Lexington, Massachusetts, USA
VS Series Helium Mass Spectrometer Leak Detectors
Preface
This manual contains information for field replacement of components of the VS Series
Mass Spectrometer Helium Leak Detector. It is organized so that similar items or procedures
are included in a section. The manual moves from a brief overview of the leak detector to
specific replacement procedures to calibration and tuning procedures that must be run after
the replacement of certain components. Photographs are liberally used to help document
procedures. Various appendices provide interconnection drawings, troubleshooting and
parts lists.
Documentation Standards
This manual uses the following documentation standards:
D RA F T 6/ 4/ 11
NOTE
Notes contain important information.
CAUTION
Cautions appear before instructions, which if not followed,
could cause damage to the equipment or data loss.
WARNING
Warnings appear for a particular procedure or practice which, if
not followed correctly, could lead to serious injury or death.
Text
Hard buttons are depicted in text in bold text.
Soft key screen buttons are depicted in bold text when part of an action.
Italics is used for emphasis or to indicate screen text.
xviii
VS Series Helium Mass Spectrometer Leak Detectors
Hazard and Safety Information
°l
OFF Supply (Power)
Earth (Ground) Terminal
ON Supply (Power)
Caution, Hot Surface
AC – Alternating Current
Caution, Risk of Electrical
Shock
Warning, Risk of danger
Protective Conductor
Terminal
Frame or chassis Terminal
Do Not Place in Trash
Indoor, Dry Location Use
Only
Caution, Radio
Restriction
Operators and service personnel must be aware of all hazards associated with this
equipment. They must know how to recognize hazardous and potentially hazardous
conditions, and know how to avoid them. The consequences of unskilled, improper, or
careless operation of the equipment can be serious. Every operator or service person must
read and thoroughly understand operation/maintenance manuals and any additional
information provided by Agilent. All warning and cautions must be read carefully and
strictly observed. Consult local, state, and national agencies regarding specific requirements
and regulations. Address any safety, operation, and/or maintenance questions to your
nearest Agilent office.
xix
D RA F T 6/ 4/ 11
The common international symbols used in this manual and on the equipment are defined
below.
VS Series Helium Mass Spectrometer Leak Detectors
Solvents
WARNING
The mechanical components of leak detectors are typically
cleaned with alcohol, methanol, or other solvents.
When heated, sprayed, or exposed to high-temperature
equipment, these solvents become flammable and explosive,
causing serious injury or death. Do not use these solvents near
a high-temperature source. Ventilate the working area with a
blower and work in a large, well-ventilated room.
D RA F T 6/ 4/ 11
Alcohol, methanol, or other solvents are irritants, narcotics,
depressants and/or carcinogens. Their inhalation and/or
ingestion may produce serious side effects. Prolonged or
continued contact with the skin results in absorption through
the skin and moderate toxicity. Always ensure that cleaning
operations are carried out in large, well-ventilated rooms, and
wear eye shields, gloves, and protective clothing.
To clean the leak detector plastic enclosure, the LCD display
and Front Panel buttons, use only a soft cloth slightly
dampened with water or a mild soap.
Do NOT use excess water or cleaning solvents of any kind.
Avoid splashing any cleaning solvents into the unit through the
ventilation openings or Front Panel buttons. Wipe the surface
with a dry lint-free cloth.
CAUTION
Do not clean any aluminum parts with Alconox®. Alconox is
not compatible with aluminum and will cause damage.
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are
some techniques that are more important in leak detector servicing than in general vacuum
work:
CAUTION
Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
NOTE
Agilent does not recommend the use of vacuum grease.
Vacuum grease absorbs helium tracer gas and releases this
slowly resulting in helium background during leak test
operations. If it must be used, use it sparingly and avoid
silicone types. Apiezon® L grease is recommended (Agilent Part
No. 695400004).
xx
VS Series Helium Mass Spectrometer Leak Detectors
O-ring Care
NOTE
Agilent recommends replacing all O-rings during routine
maintenance or during any maintenance procedure requiring
that O-rings be removed.
NOTE
Due to the effective cleaning nature of VacuSolv solvent and
its residue-free properties, Agilent’ Component and
Spectrometer Cleaning Kit (Part Number 670029096), used in
accordance with the kit instructions, is recommended for
cleaning spectrometer components. The kit can also be used for
fine cleaning of other parts in the leak detector’s vacuum
system such as valves and fittings. No rinsing steps or
high-temperature drying are required following cleaning with
VacuSolv. Although appropriate precautions are advised,
VacuSolv is compatible with most materials and does not
contain toxic chemicals or CFCs (chlorofluorocarbons). Other
acceptable solvents are isopropyl alcohol (IPA) or Dow
Corning® OS-20.
CAUTION
Remove O-rings carefully with your fingers. Do not use metal
tools for this task; this prevents scratching of any sealing
surfaces.
❑ Wipe all O-rings clean with a lint-free cloth before
installation to ensure that no foreign matter is present to
impair the seal.
❑ Do not use grease or any other substance on O-rings that
will come in contact with the spectrometer.
❑ Do not use alcohol, methanol or other solvents on O-rings.
Doing so causes deterioration and reduces their ability to
hold a vacuum.
❑ Agilent does not recommend the use of vacuum grease. If
applicable, apply a small amount of Apiezon® L grease and
wipe the O-rings shiny dry.
xxi
D RA F T 6/ 4/ 11
When removing, checking or replacing O-rings, keep in mind the following:
VS Series Helium Mass Spectrometer Leak Detectors
Metal Seal Care
CAUTION
Metal Seals must be replaced during routine maintenance or
during any maintenance procedure required. All fasteners must
be installed and torqued per assembly procedure specifications.
Remove Metal Seals carefully with your fingers. Do not use
metal tools for this task, this prevents scratching of any sealing
surfaces. Wear non-powdered, ESD safe Nitride or equivalent
gloves prior to removing or replacing Metal Seals.
❑ All Metal Seals come in clean room condition packages. No
cleaning is required If necessary, Metal Seals can be cleaned
using alcohol or methanol. Wipe all Metal Seals clean with a
lint free cloth before installation to ensure that no foreign
matter is present to impair the seal.
❑ Do not use grease or any other substance on Metal Seals that
will come in contact with the spectrometer.
D RA F T 6/ 4/ 11
Equipment, General
Environment of intended use:
❑ Indoors use in an industrial and laboratory installation only.
❑ Altitude up to 2000 m
❑ POLLUTION DEGREE 2, Material group III
❑ Operating Temperature: +12 °C to +40 °C, Relative
Humidity (RH) up to 90% max.
❑ Storage ambient conditions: RH from 0% to 95%,
non-condensing, temperature: -20 °C to +60 °C
WARNING
❑ Do not use in presence of flammable or explosive gas.
❑ Do not attempt to disassemble or modify the equipment.
Such action could lead to electric shock or injury. Agilent's
authorized technician will do any repair work.
❑ If there is smoke or unusual smell or noise, stop the using the
equipment immediately, and contact the Agilent Service
Center.
WARNING
The leak detector is not designed for use with hazardous gases.
Verify that the system to be tested has been purged of all
hazardous gases prior to using the leak detector. When testing a
system that contained hazardous gases, connect the exhaust of
the leak detector to a scrubbed or toxic containment exhaust.
Exposure to hazardous gases could result in serious injury or
death.
xxii
VS Series Helium Mass Spectrometer Leak Detectors
WARNING
Equipment tightness is guaranteed for normal operating
conditions when the equipment leaves the factory. It is the
user’s responsibility to maintain the level of tightness,
particularly when pumping dangerous products.
CAUTION
The performance and operating safety of this equipment can
only be guaranteed if it is operated according to normal
conditions of use.
Allow at least 4" of clearance adjacent to the ventilation slots at
the front, sides and back of the equipment enclosure.
Allow sufficient room for the operator to safely maneuver to
perform testing.
WARNING
If the LCD display breaks, avoid getting any liquid crystal in mouth
or eyes. If it gets on the operator hands, feet or clothing, wash it
immediately with soap and water.
CAUTION
Do not apply excessive pressure to the LCD display as this may
cause smears.
In general, the lower the temperature, the longer it takes the LCD
display to turn on. Performance of the LCD display may deteriorate
in low temperature.
Radio
The Wireless Remote Control is built around an Aerocomm, model
AC4424-100, RF transceiver module operating in 2.4 GHz ISM
band. The same type of the RF module is built in a VS Series Leak
Detector Wireless Base Station PCB and Wireless Remote unit (see
VS Series Leak Detector Wireless Remote Operational Manual
(6999099945A)).
Agency Identification Numbers for Aerocomm, Model
AC4424-100:
❑ US/FCC ID: KQL-AC4424
❑ CAN/IC: CAN2268C391190A
❑ EUR/EN: CE
are also applied to the Agilent's Wireless Remote and VS Series
Leak Detector Wireless Base Station, when the units are used the
approved antennas.
xxiii
D RA F T 6/ 4/ 11
LCD Display
VS Series Helium Mass Spectrometer Leak Detectors
WARNING
The Wireless Remote complies with Part 15 of the FCC Rules.
Operation is subject to the following two conditions: (1) This
device may not cause harmful interference, and (2) This device
must accept any interference received, including interference that
may cause undesired operation.
To satisfy FCC RF exposure requirements for mobile type transmitting devices, maintain a separation distance of 20 cm or more
between the antenna of the Wireless Remote and persons during
operation, with exception of hands wrist, feet, and ankles. To
ensure compliance, operations at closer distance than this distance
are prohibited.
Maintain a separation distance of 20 cm or more between the operator and the RF antenna of the VS Series leak detector with a wireless base station.
D RA F T 6/ 4/ 11
CAUTION
Use only approved type of antennas for:
❑ Wireless Remote: Centurion, Model WCP2400-MMCX2,
www.centurion.com.
❑ VS Series Leak Detector Wireless Base Station, Nearson,
Model S181FL-5-RMM- 2450S, www.nearson.com
Power and Static Sensitivity
WARNING
Depending on the unit configuration ordered, the mains power
supply requirements for VS Series leak detectors are:
❑ 100 VAC, 50 Hz, 20 A
❑ 115 VAC, 60 Hz, 20 A or
❑ 230 VAC, 50/60 Hz, 12 A
Before powering the unit for the first time, verify that the unit is
configured to operate for the local mains supply voltage.
CAUTION
Use surge protection to improve the immunity of the leak
detector against unidirectional transients caused by the
following phenomena:
❑ Switching phenomena in the power network
(e.g., switching of capacitor banks, inductive loads,
electrical motors, etc.)
❑ Faults in the power network
❑ Indirect lightning strokes
xxiv
VS Series Helium Mass Spectrometer Leak Detectors
CAUTION
Many components of the leak detector are static sensitive.
Wear a grounding device when performing any maintenance
on the leak detector, especially when performing maintenance
of static sensitive parts, such as circuit boards and the
spectrometer.
CAUTION
This equipment has been tested and found to comply with the
limits for Class A digital device, pursuant to Part 15 of FCC
Rules. These limits are designed to provide reasonable
protection against harmful interference when it is operated in a
commercial environment.
This equipment generates, uses, and can radiate RF energy,
which if not installed and used in accordance with the
instructional manual, can cause harmful interference to
radio communications.
❑ This equipment must not cause harmful interference.
❑ This equipment must accept any interference received,
including interference (RF and ESD) that may cause
undesired operation.
The equipment may need to be reset after RF and/or ESD events
by cycling the Power Switch/Circuit Breaker on the back panel
of the unit.
Operation of this equipment in a residential area is also likely to
cause harmful radio communications interference, in which
case, the users will be required to correct the interference at
their expense.
xxv
D RA F T 6/ 4/ 11
When this equipment is operated in a commercial
environment, operation is subject to the following two
conditions:
VS Series Helium Mass Spectrometer Leak Detectors
WARNING
This equipment is designed to meet current EEC regulations:
LVD (Low Voltage Directive, 73/23/EEC:1993) and EMC
(Electromagnetic Compatibility Directive, 89/336/EEC:1993) for
Material Group III, Pollution Degree 2 environment for
Industrial, Scientific, Measuring and Process Control Electrical
Equipment and R&TTE (Radio and Telecommunications
Terminal Equipment Directive, 199915/EC:1999)
❑ Any modifications on the part of the user are liable to cause
non-compliance with regulations or affect the EMC
performance and the safety of the product. Agilent cannot
be held responsible for consequences resulting from such
intervention.
❑ Before powering the unit the first time, verify that the unit is
configured to operate for the local mains supply voltage.
❑ The equipment can be damaged by:
D RA F T 6/ 4/ 11
❑ Incorrect mains AC supply voltages
❑ Radio Frequency (RF) and Electrostatic Discharge (ESD)
energy inputs that exceed the maximum ratings
❑ Operating in very high temperatures or without adequate
ventilation
❑ Immersion in liquids
❑ Physical abuse
❑ All electrical connections must be performed by a qualified
electrician and must comply with national and local codes.
❑ Opening the enclosure may expose hazardous voltages.
Always disconnect the power cord and interface cables
before opening the enclosure. Do not touch the power
inlet’s contacts for at least 10 seconds after disconnecting
the power cord.
❑ Electrical installation must include the appropriate branch
circuit (20 A maximum), with a long time delay and a
reliable earth ground.
❑ Use only the power cord that was provided with your leak
detector. The use of extension cords is not recommended
and could result in damage to the equipment and loss of
warranty.
❑ To avoid electric shock, connect the product power cord to
a grounded power receptacle. A power cord with a
grounding conductor is required.
xxvi
VS Series Helium Mass Spectrometer Leak Detectors
WARNING
Store the Ion Source/Preamplifier sub-assembly in a cool, dry
area in a tightly sealed, ESD protected container. Wear lint-free
gloves when handling the spectrometer. Wash hands
thoroughly after handling the spectrometer filaments and
especially before smoking or eating.
CAUTION
The spectrometer operates at a very high vacuum produced by
the high vacuum pump. Service of the spectrometer requires
that this vacuum be vented to the atmosphere.
CAUTION
Do not use grease or any other substance on O-rings or metal
seals that will come in contact with the spectrometer.
CAUTION
If the spectrometer magnet comes in contact with a magnetic
surface, the magnet can become degraded causing the
spectrometer to lose sensitivity.
WARNING
To avoid injury, use proper lifting techniques when moving
pumps. Two people may be required to move pumps safely.
WARNING
The vacuum pumps are also compressors; incorrect operation
may be dangerous. Study the Mechanical Pump Operation
Manual enclosed with your pump before starting pumps.
Pumps
The pumps are designed to prevent any thermal risk for user
safety. However, specific operating conditions may generate
temperatures >70 °C.
Hot oil burns the skin. Service of the pumps in this area must be
performed by authorized personnel only. Stand back from a
mechanical pump before starting it.
xxvii
D RA F T 6/ 4/ 11
Spectrometer
VS Series Helium Mass Spectrometer Leak Detectors
WARNING
To avoid injury, wait until the turbo pump is completely
stopped before disconnecting it from the vacuum system.
To vent the turbo, open the knurled vent screw located on the
side of the turbo. If the turbo is spinning, you will hear it wind
down. Close the vent screw after the turbo has stopped.
CAUTION
Check the oil level often. Do not allow oil-based mechanical
pumps to run when the oil level is below the LOW mark.
Damage to pumps can occur if operated with no oil, if the oil
level is too high or if the oil has become discolored.
Agilent Services
D RA F T 6/ 4/ 11
Agilent offers:
❑
Rebuilt spectrometers on an exchange basis
❑
NIST-traceable calibrated leak testing and verification services
❑
Preventive maintenance services
❑
Overhaul services
❑
System recertification
❑
Support agreements
❑
On-site support
Please see our catalog or contact us to learn about available services.
Contacting Agilent
In the United States, you can contact Agilent Customer Service at 1-800-882-7426. See the
back cover of this manual for a listing of our sales and service offices.
Visit our web site at: http://www.chem.agilent.com/en-US/Products/Instruments/vacuum/
pages/default.aspx.
xxviii
VS Series Helium Mass Spectrometer Leak Detectors
Tools Required for Component Replacement
Each procedure lists the tools required for that component replacement.
Materials Required for Component Replacement
❑ Powder-free butyl or
❑ VacuSolv or similar solvent
polycarbonate gloves
❑ Cotton swabs
❑ Lint-free wipes
❑ Loctite PST 565 Thread Sealant
D RA F T 6/ 4/ 11
❑ Clean, non-magnetic surface
xxix
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detectors
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VS Series Helium Mass Spectrometer Leak Detectors
Section 1. Introduction to the VS Series
Leak Detector
1.1 The VS Series Leak Detector
The VS Series is a wide-range Helium Mass Spectrometer Leak Detector, which is
comprised of a turbo molecular high vacuum pump, internal mechanical rough pump
(model VS PR02 and PD03), external mechanical rough pump (models VS MR15, VS
MD30, VS BR15 and VS BD30), spectrometer tube, valve block, leak detector electronics,
an operator interface (TFT-LCD display with a touch panel and two hard buttons: TEST and
VENT), and optional features, including:
❑
Wireless remote control that is includes:
❑
Wireless Base PCB (P/N R2541301) installed in a VS leak detector
❑
Wireless Remote unit (P/N R3000301).
Optional I/O PCB (P/N R2111301).
Both models VS MR15x and VS MD30x include an optional two-wheel cart.
All models are available in 100/115 VAC and 230 VAC configurations (see Table 1-1 on
page 1-2).
The wireless remote control has the following capabilities:
❑
RF communication between VS leak detector (Base Station or Host) and the Wireless
Remote unit from the distance up to 100 m (300 ft).
❑
Enter the VS leak detector unit into Test and Hold modes from the Wireless Remote
unit keypad.
❑
Read the VS leak detector unit's leak rate in a linear and logarithmic bar graph
format with a numeric range indicator and System status in alphanumeric format on
the Wireless Remote unit LCD display.
❑
Configure up to ten different VS leak detector units for wireless control by toggling
through a MAC address list using one Wireless Remote unit.
The optional I/O PCB compromises:
❑
Optically isolated parallel I/O (DB25 female connector with 12 output and 8 input
lines) to use with an external PLC and should be powered by the user (+5-24 VDC)
via a cable with length less than 10’ and provided by the user (see Appendix A.3.1
“Serial Connector” on page A-13).
1-1
D RA F T 6/ 4/ 11
❑
VS Series Helium Mass Spectrometer Leak Detectors
CAUTION
❑
The usage of a longer cable for the parallel I/O output
connection with an external PLC is fully responsibility of the
user. Some EMC prevention measure may be required by the
user
USB HUB with two downstream type A connectors and one upstream type B
connector.
NOTE
Table 1-1
USB features are SW disabled in this release.
VS Series Leak Detector Configurations and Part Numbers
Vacuum Pump System
D RA F T 6/ 4/ 11
Model
Number
VS PR02
Agilent
P/N
Mains
Voltage
VSPR021
100/115 VAC
VSPR022
230 VAC
Internal
External
Configuration
Two
Wheel
Cart
DS-42
N/A
Portable
N/A
N/A
DS302
Mobile
Yes
N/A
TS620
Mobile
Yes
N/A
DS302
Bench Mount
N/A
N/A
TS620
Bench Mount
N/A
IDP-3
N/A
BR/NBL
N/A
VSMR151 100/115 VAC
VS MR15
VSMR152 230 VAC
VSMD301 100/115 VAC
VS MD30
VSMD302 230 VAC
VSMR151 100/115 VAC
VS BR15
VS BD30
VS PD03
VSBR152
230 VAC
VSBD301
100/115 VAC
VSBD302
230 VAC
VSPD030
110 VAC
VSPD031
115 VAC
VSPD032
220 VAC
Outline drawings for each configuration are shown in Section 1.1.1 “VS Series Leak
Detector Configurations”.
1-2
VS Series Helium Mass Spectrometer Leak Detectors
1.1.1 VS Series Leak Detector Configurations
This section contains outline drawings of the leak detector configurations. Dimensions are
given in inches, in brackets, and in mm, below the brackets.
Figure 1-1 Portable Leak Detector with Internal DS42 Wet Rotary Vane Pump, Model VS
PR02, and Portable Leak Detector with Internal IDP-3 (PD03) Dimensions
Figure 1-2 shows the outline drawing and physical dimensions of a mobile leak detector
with External DS302 Wet Rotary Vane Pump on a Cart, Model VS MR15.
Figure 1-2
Mobile Leak Detector with External DS302 Wet Rotary Vane Pump on a Cart,
Model VS MR15, Dimensions
1-3
D RA F T 6/ 4/ 11
Figure 1-1 shows the outline drawing and physical dimensions of the portable leak detector
with Internal DS42 Wet Rotary Vane Pump, Model VS PR02 and the PD03, which utilizes a
Agilent IDP-3 dry pump.
VS Series Helium Mass Spectrometer Leak Detectors
D RA F T 6/ 4/ 11
Figure 1-3 shows the outline drawing and physical dimensions of a Mobile Leak Detector
with External TS620 Dry Scroll Pump on a Cart, Model VS MD30.
Figure 1-3
1-4
Mobile Leak Detector with External TS620 Dry Scroll Pump on a Cart, Model VS
MD30, Dimensions
VS Series Helium Mass Spectrometer Leak Detectors
1.2 Front Panel Display and Controls
The front panel (Figure 1-4) consists of two hard buttons: TEST and VENT and an LCD
display to access the software control screens. All operator control and monitoring of results
are achieved via the resident software accessed using the Home screen. Table 1-2 on
page 1-8 lists the main sub-screens and their purpose.
Test Port
Display
Model Label
TEST (Hard)
Button
D RA F T 6/ 4/ 11
Handle
(Recessed)
VENT (Hard)
Button
Figure 1-4
Front Panel Displays and Controls
The front panel display touch panel is calibrated at the factory and should not require
recalibration. If the touch panel buttons do not respond to pushes, recalibrate as follows:
1. Turn off the leak detector power.
2. Press and hold the center of the touch panel and restart power.
A blue screen appears.
3. Press the four cross hairs on the screen and accept the calibration.
1-5
VS Series Helium Mass Spectrometer Leak Detectors
LCD Display
Represents:
❑ Leak Rate - in a Bar Graph format with a numeric range
indicator
❑ Leak Rate, System Status and Parameters - in alphanumeric
format
❑ Series of screens with the soft key buttons for operator
interface
Leak Rate, System Status and Parameters in alphanumeric format:
❑ Leak Rate is presented in a scientific notation: XXE-YY with
appropriate units
Where: X .X mantissa is a leak rate value
E- Y = 10-YY exponent is a leak rate range
X and Y are any numbers from 0 to 9
❑ System Status and/or Mode are represented on the screen in
D RA F T 6/ 4/ 11
alpha format on the screen and an italic font in this manual
❑ Parameters are represented on the screen in alphanumeric
format a bold font in this manual.
Leak Rate Bar Graph
The large bar graph displays the leak rate in one of three forms:
❑ A linear bar graph
❑ A logarithmic bar graph
❑ Both linear and logarithmic bar graphs
Use the Output Control Set-Up screen to change the type of bar
graph that appears.
Over-range and under-range conditions are indicated using two up
and down arrows on the right and left side of the bar graph, respectively.
VENT
The VENT button advances the leak detector to the vented state. A
red LED illuminates while the leak detector is in the vented state.
TEST
When the system is in the Vent or Hold states, pressing the TEST
button automatically advances the leak detector through roughing,
then through the various test states, depending on the achievable
test port pressures and leak rates. A green TEST LED in the button
illuminates when the leak detector is in a Test state.
Press the VENT button to isolate the test port from the leak detector
vacuum system and vent the test port to atmosphere. The red VENT
LED remains lit while the leak detector is in the vented state. To
activate the VENT function, press and hold VENT for one second.
1-6
VS Series Helium Mass Spectrometer Leak Detectors
The leak detector operator interface functions through a series of screens, which are
navigated as in Figure 1-5.
MAIN SCREEN
ZERO
GROSS TEST
CALIBRATION
SET-UP
LEAK RATE
RANGING
SET-UP
REJECT/AUDIO
SETPOINTS
TRANSFER
POINTS
CONTROL PANEL
ACCESS
SYSTEM
INFORMATION
AUTO
SEQUENCER
MENUS
D RA F T 6/ 4/ 11
CONTROL PANEL
SET-UP
ADVANCED
PARAMETERS
MANUAL
TUNING
MANUAL VALVE
CONTROL
PASSWORD
OUTPUT
CONTROL
UNITS
LANGUAGES
NEXT
SET-UP
GAUGE
CALIBRATION
MAINTENANCE
FORE PUMP
WIRELESS
Figure 1-5
Screen Flow
1-7
VS Series Helium Mass Spectrometer Leak Detectors
1.3 Display Panel Controls
Table 1-2
Screens – General Description
Screen
Home
Purpose
Accesses the Control Panel and Menu screens.
Activates the Zero function. The LED illuminates while zeroing occurs.
Accesses the Gross Leak Test screen, when Gross Test is pressed.
Control Panel
Activates/deactivates:
❑ Std Leak
❑ Zero Enable
❑ Hold
❑ Calibrate
Displays the type of leak: Internal or external, associated with Calibrate.
D RA F T 6/ 4/ 11
Adjusts the speaker volume.
Menus
Accesses the following screens for tailoring leak detector operation:
❑ Calibration Set-Up – Configures leak type, mode and parameters.
❑ Reject & Audio Set Points – Configures parameters and toggles operations
on/off for each reject set point and for the audio threshold.
❑ Leak Ranging – Configures the Range Stop, Manual Range values, toggles
the high pressure test feature and toggles operations on/off.
❑ Transfer Pressure – Configures the Maximum Test Pressure.
❑ System Information – Displays the status of configured and active items.
❑ Control Panel Access – Activates/deactivates Vent and Panel Lockouts.
❑ Auto Sequencer – Configures roughing and test times, toggles features
on/off and displays rough timer value.
❑ Set-Up - Accesses all the screens shown in Figure 1-5 on page 1-7.
1-8
VS Series Helium Mass Spectrometer Leak Detectors
Table 1-2
Screens – General Description (Continued)
Screen
Accesses the following screens:
❑ Advanced Parameters:
❑ Activates Autozero and Split Flow functions.
❑ Activates the Gross Leak function.
❑ Sets Split Flow value.
❑ Output Control – Configures the Analog Output and Bar Graph default
units.
❑ Manual Tuning:
❑ Toggles between Filament 1 and 2.
❑ Sets Emission, Ion and Gain settings.
❑ Units – Configures Leak Rate and Pressure units.
❑ Manual Valve Control – Access to control all valves.
❑ Languages – Configures language.
❑ Gauge Calibration – Calibrates the Test Port Vacuum and Test Port ATM
D RA F T 6/ 4/ 11
Set-Up
Purpose
reference points and displays Test Port Pressure and Spectrometer
Pressure.
❑ Maintenance – Configures:
❑ Date and Time
❑ Cal Leak Expiration and Internal Calibrated Leak values
❑ Password.
❑ Fore Pump.
❑ Wireless.
1-9
VS Series Helium Mass Spectrometer Leak Detectors
1.4 Rear Panel
The rear panel of the leak detector with an external mechanical pump (Model VS MR15 or
MD30) and a wireless remote control option is shown in Figure 1-6.
➀
8
10
7
➀
➃
➂
D RA F T 6/ 4/ 11
➅
9
11
➄
➁
➁
Figure 1-6
➀ Serial Connector
VS Series Rear Panel
A 9-pin male D-type connector to interface with an external PC via
RS-232 type communications protocol for system diagnostic or
control.
A detailed summary of information related to serial communication
is provided in Appendix A “Communications Protocol” on page
A-1.
➁ Cover Plate
1-10
Access to expansion slot. This is not used when an optional I/O
PCB is installed. A rear panel of the optional I/O PCB is shown in
Figure 1-7 on page 1-11.
VS Series Helium Mass Spectrometer Leak Detectors
➂ Power Entry
Provides supply power, overcurrent and EMI protection for the leak
detector. The Power Entry Module consists of:
Module
❑ Power Input Connector - An IEC/EN60320/C20 standard,
three-prong grounded Inlet connector.
❑ Power Switch (I/O) - A 20A rocker type Power
Switch/Thermal Circuit Breaker.
❑ 20 A EMC line filter.
Connection
An IEC/EN60320/C19 standard, three-prong grounded outlet
connector.
➄ Analog Output
Banana type output connector for an Isolated Leak Rate Analog
reading. The Red connector is a signal positive terminal; black is
the signal negative terminal. Signal range: From 0 to +10 VDC.
➅ Chassis (Earth)
Provided for additional connection of the leak detector to the
building grounding system to improve ESD protection.
Terminal
➆ Product Label
A product label with part number, serial number and rating information.
➇ RF Antenna
A swirl 2.4 GHz antenna for the optional Wireless Remote ControlStandard USB connector.
➈ Exhaust Cover
Exhaust opening for a VS PR02 model.
10
Oil Level Cover
Oil level window for a VS PR02 model.
11
Oil Drain Cover
Oil drain opening for a VS PR02 model.
Test Port
Test port adapter (not shown).
2-Wheel Cart
2-wheel cart for an external fore pump (not shown)
Wireless Label
A wireless info label for VS leak detector with an optional Wireless
Remote Control.
A rear panel for the optional I/O PCB assembly is shown in Figure 1-7.
➀
➁
Figure 1-7
➀ USB - A1
➂
➃
Optional I/O PCB Rear Panel
USB 1.1 full speed downstream port, USB type A receptacle.
1-11
D RA F T 6/ 4/ 11
➃ Fore Pump Power
VS Series Helium Mass Spectrometer Leak Detectors
➁ USB - A2
➂ USB - B
➃ I/O Connector
USB 1.1 full speed downstream port, USB type A receptacle.
USB 1.1 full speed upstream port, USB type B receptacle.
A 25-pin female D-sub connector to interface with an external PLC
via a parallel cable.
Inputs:
❑ Four level inputs: optically isolated, (+5 to+24) VDC.
❑ Four momentary inputs: optically isolated, (+5 to+24) VDC,
requires 200 ms pulse width.
All inputs are opto-isolator LEDs with a series 3300 Ohm resistor.
Outputs:
❑ Eight optically isolated emitter followers with a 10 Ohm
series resistor, 14 mA max drive current, +24VDC max.
Power:
D RA F T 6/ 4/ 11
❑ An external power supply is supplied by the user.
A detailed summary of information related to I/O pin identifications
is provided in the VS Series User Guide.
1-12
VS Series Helium Mass Spectrometer Leak Detectors
The rear panel of the leak detector (Model VS PR02 and PD03) is shown in Figure 1-8. The
optional Wireless remote control and I/O PCB is not installed.
➁
10
9
7
➅
D RA F T 6/ 4/ 11
➃
➂
8
12
➀
➄
Figure 1-8
➀ Oil Drain
➁ Glass Window
➂ Exhaust
➃ Serial Connector
11
Rear Panel (with Discrete I/O PCB)
For the internal mechanical vacuum pump.
Oil level sight glass reading.
A barbed hose fitting (OD = 12.57 mm) for exhaust of the internal
mechanical vacuum pump.
A 9-pin male D-type connector to interface with an external PC via
RS-232 type communications protocol for system diagnostic or
control
A detailed summary of information related to serial communication
is provided in Appendix A “Communications Protocol” on page
A-1.
➄ Cover Plate
Access to expansion slot.
1-13
VS Series Helium Mass Spectrometer Leak Detectors
➅ Power Entry
Module
Provides supply power, overcurrent and EMI protection for the leak
detector. The Power Entry Module consists of:
❑ Power Input Connector - An IEC/EN60320/C20 standard,
three-prong grounded inlet connector.
❑ Power Switch (I/O) - A 20A rocker type Power
Switch/Thermal Circuit Breaker.
❑ 20 A EMC line filter.
➆ Vacuum Pump
A 6 A Thermal Circuit Breaker for the internal mechanical pump.
Breaker
➇ Analog Output
Banana type output connector for an Isolated Leak Rate Analog
reading. The Red connector is a signal positive terminal; black is
the signal negative terminal. Signal range: From 0 to +10 VDC.
➈ Chassis (Earth)
Provided for additional connection of the leak detector to the
building grounding system to improve ESD protection.
Terminal
D RA F T 6/ 4/ 11
➉ Product Label
11
25 Pin I/O
A product label with part number, serial number and rating information.
❑ Inputs: Opto-isolated, 5 - 24 VDC 3300 Ohm resistive load.
All inputs are opto-isolator LEDs with series resistors.
❑ Momentary Inputs: Opto-isolated, 5 - 24 VDC 3300 Ohm
resistive load, requires 200 ms minimum pulse width.
❑ Outputs: Emitter follower with 10 Ohm series resistor, 14
mA max drive current, 24 VDC max.
12
1-14
USB
Standard USB connector (types USB A and USB B).
VS Series Helium Mass Spectrometer Leak Detector
Section 2. Cleaning the Test Port
The test port is located on the outside of the leak detector. Therefore, it is not necessary to
turn the leak detector off or disconnect it from mains power if this is the only procedure
being performed. If you are cleaning the test port in conjunction with other procedures that
require opening the leak detector, be sure to turn the leak detector off and disconnect it
from mains power.
The NW-25 uses the blank-off flange cap on top of the centering ring when the system is not
in use or when in use but not connected to a device.
To clean the test port:
CAUTION
Be careful not to drop the test port blank-off flange cap when
you remove the test port tightening nut. It is deceptively heavy
for its size.
Test Port
Blank-off Flange Cap
Test Port
Tightening
Nut
Figure 2-1
Test Port with Blank-Off Flange Cap
2-1
D RA F T 6/ 4/ 11
1. Turn the test port wing nut counterclockwise to loosen it (Figure 2-1), remove the quick
clamp (Agilent p/n KQ25AWP) from the test port, and remove any connected devices.
VS Series Helium Mass Spectrometer Leak Detector
2. Remove the test port blank-off flange cap and/or centering ring from the top of the test
port (Figure 2-2).
Figure 2-2
Centering Ring with O-ring
3. Remove the O-ring from the centering ring.
4. Examine the O-ring for wear.
D RA F T 6/ 4/ 11
If necessary, use a new O-ring, otherwise clean the O-ring.
NOTE
Agilent recommends replacing all O-rings during routine
maintenance or during any maintenance procedure requiring
that O-rings be removed.
CAUTION
Remove O-rings carefully with your fingers. Do not use metal
tools for this task. This prevents scratching of any sealing
surfaces.
Do not use alcohol, methanol or other solvents on O-rings. To
do so causes deterioration and reduces their ability to hold a
vacuum.
Wipe all O-rings clean with a lint-free cloth before installation
to ensure that no foreign matter is present to impair the seal.
If applicable, apply a small amount of Apiezon L grease and
wipe the O-rings shiny dry.
5. Examine all parts of the test port, including inside the test port.
In necessary, use a VacuSolv wipe to remove any dirt or foreign matter and allow parts
to air dry.
6. Place the O-ring into the groove of the centering ring.
2-2
VS Series Helium Mass Spectrometer Leak Detector
7. Place the centering ring onto the top of the test port (Figure 2-3).
Figure 2-3
O-ring and Centering Ring on Test Port
8. Replace the blank-off flange cap or connected device.
D RA F T 6/ 4/ 11
9. Replace the quick clamp onto the test port and tighten the wing nut clockwise until it is
just tight enough to stay in place.
2-3
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 3. Internal Calibrated Leak
Replacement
3.1 Recalibrating the Internal Calibrated Leak
Helium calibrated leaks typically degrade at 3 percent per year. Check the calibrated leak
supplied with your leak detector at least once a year to ensure it is at the value stated on its
tag. Failure to check the leak could result in unreliable testing. You can arrange for testing
and recalibration at a lab of your choice.
Agilent provides NIST-traceable calibrated leak testing and verification services. You can
contact Customer Service at 1-800-882-7426 to arrange for recalibration.
D RA F T 6/ 4/ 11
3.2 Replacing the Internal Calibrated Leak
3.2.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Slotted Screw Driver
For clarity, some items have been omitted from views.
WARNING
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 3-1) and detach the rear plastic cover from the unit.
3-1
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
Figure 3-1
Rear Cover Screws
4. Carefully disconnect the calibrated leak temperature cable from the calibrated leak PC
board.
5. Using a slotted screwdriver, remove the two screws holding the calibrated leak in place
(Figure 3-2).
Figure 3-2
Calibrated Leak Location
6. Discard the calibrated leak and the O-ring.
7. Inspect the replacement calibrated leak and O-ring for damage or particle
contamination and remove any particle contamination.
3-2
VS Series Helium Mass Spectrometer Leak Detector
8. Install the O-ring in the groove and then assemble the replacement calibrated leak to the
valve block using a slotted screwdriver (Figure 3-2).
9. Reconnect the calibrated leak temperature cable to the replacement calibrated leak.
Extreme care must be taken due to the presence of high voltage.
Ensure that high voltage shield and front cover are in position
before proceeding (Figure 3-3).
Figure 3-3
D RA F T 6/ 4/ 11
WARNING
High Voltage Location
10. Connect the power cord and power up the unit.
11. Watch the Home screen to verify that the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.
12. Leak check the calibrated leak O-ring to ensure a leak free joint between the
atmosphere and the vacuum space inside.
13. Refer to the Internal Calibrated Leak and Cal Leak Expiration Set-Up of the user's
manual for the correct calibration procedures for the calibrated leak.
14. Attach the rear cover and secure it to the frame using existing hardware.
15. Agilent recommends a full calibration of the unit prior to leak test operations.
3-3
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 4. Valve Block (Turbo) and
Spectrometer Assembly Removal
4.2.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ M5 Allen Wrench
❑ Phillips Screw Driver
❑ Slotted Screw Driver
Replacing the spectrometer is comprised of:
1. Section 4.1 “Removing the Covers”
D RA F T 6/ 4/ 11
2. Section 4.2 “Removing the Valve Block Wiring Harness” on page 4-3
3. Section 4.3 “Removing the Valve Block Assembly and Spectrometer” on page 4-4
4. Section 4.4 “Replacing the Turbo Pump, Valve Block and Spectrometer” on page 4-9
5. Section 4.5 “Replacing the Valve Block Harness and Thermocouple Wiring” on
page 4-9
4-1
VS Series Helium Mass Spectrometer Leak Detector
4.1 Removing the Covers
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
D RA F T 6/ 4/ 11
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 4-1) and detach the rear plastic cover from the unit.
Figure 4-1
Rear and Front Cover Screws
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 4-1).
4-2
VS Series Helium Mass Spectrometer Leak Detector
4.2 Removing the Valve Block Wiring Harness
The valve block wiring harness is comprised of seven three-prong sensor blocks labeled: V1
through V5 and V7 and the thermocouple. See the wiring diagram on Appendix E
“Interconnection Diagram”.
To remove the valve block wiring harness:
Figure 4-2
D RA F T 6/ 4/ 11
1. Remove the valve pug or connector, unscrew the Phillips head screw and remove the
wires from the six three-prong connector (Figure 4-2).
Sensor Wiring and Thermocouple
2. Unplug the thermocouple octal connector (Figure 4-3).
Figure 4-3
Thermocouple
4-3
VS Series Helium Mass Spectrometer Leak Detector
4.3 Removing the Valve Block Assembly and Spectrometer
To remove the valve block:
D RA F T 6/ 4/ 11
1. Unscrew the Phillips head screw connecting the test port ground wire to the center rail
(Figure 4-4).
Figure 4-4
Test Port Grounding Wire Connection
2. Loosen, but don’t remove, the two bolts for the foreline to valve block connection. Take
care not to damage the O-ring (Figure 4-5).
Figure 4-5
4-4
Vacuum Connection
VS Series Helium Mass Spectrometer Leak Detector
3. Remove the ground to the valve block (CONDS) (Figure 4-6).
Figure 4-6
Valve Block Ground
D RA F T 6/ 4/ 11
4. Unscrew the Phillips screw for the spectrometer ground (SP_GND) (Figure 4-7).
Figure 4-7
Spectrometer Ground Wire
4-5
VS Series Helium Mass Spectrometer Leak Detector
5. Disconnect the (Figure 4-8):
❑ Ion source sensor cable (R2126-301)
D RA F T 6/ 4/ 11
❑ Pre-amp cable (R2125-301)
Figure 4-8
Leak Sensor and Pre-Amp Cables
6. Loosen and remove the two wing nuts holding the plastic shield and remove the shield
(Figure 4-9).
Figure 4-9
4-6
Plastic Shield
VS Series Helium Mass Spectrometer Leak Detector
7. Loosen and remove the four M5 screws and rubber spacers holding the unit to the VS
Series body (Figure 4-10). Two are shown with the unit already removed for a better
view. The spectrometer and turbo pump are shown together.
Figure 4-10
Valve Block Assembly and Spectrometer M5 Mounting Screws
8. Carefully disconnect the calibrated leak temperature cable from the calibrated leak PC
board (Figure 4-11).
Figure 4-11
Calibrated Leak Connection
4-7
D RA F T 6/ 4/ 11
Cal leak
connection
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
9. Loosen the four M3 screws and disconnect the turbo controller cable from the pump
(Figure 4-12).
Figure 4-12
Turbo Controller Connection
10. Gently pull the valve block assembly straight up and out of the unit. Place the block
bottom down on a flat surface (Figure 4-10 on page 4-7).
11. Remove the three bolts for the spectrometer connection. Take care not to damage the
O-ring (Figure 4-13).
Figure 4-13
Spectrometer Nut Locations
12. Replace the spectrometer and reattached the pump as per step 11.
4-8
VS Series Helium Mass Spectrometer Leak Detector
4.4 Replacing the Turbo Pump, Valve Block and Spectrometer
To reinstall the scroll pump and valve block:
1. Gently place the valve block onto it mounting holes and tighten the four M5 screws nuts
(Figure 4-10 on page 4-7).
2. Reinstall the two bolts for the vacuum connection. Take care not to damage the O-ring
(Figure 4-5 on page 4-4).
3. Tighten the Phillips head screw connecting the test port ground wire to the center rail
(Figure 4-4 on page 4-4).
4. Reinstall the four M3 screws that connect the turbo controller cable to the pump
(Figure 4-12 on page 4-8).
4.5 Replacing the Valve Block Harness and Thermocouple
Wiring
To replace the wiring:
1. Replug the valve plugs, screw the Phillips head screw and reattach the wires from the
six three-prong blocks (Figure 4-2 on page 4-3).
2. Reattached the thermocouple wires (Figure 4-3 on page 4-3).
3. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 4-1 on page 4-2).
4. Replace and retighten the two wing nuts holding the plastic shield (Figure 4-9 on
page 4-6).
5. Reconnect the ground connection on the valve block and the spectrometer (Figure 4-7
on page 4-5).
6. Tighten the Phillips head screw connecting the test port ground wire to the center rail
(Figure 4-4 on page 4-4).
7. Reconnect the (Figure 4-8 on page 4-6):
❑ Ion source sensor cable (R2126-301)
❑ Pre-amp cable (R2125-301)
8. Reinstall the four screws holding the front plastic cover to attach the cover to the unit.
Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 4-1).
9. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 4-1).
4-9
D RA F T 6/ 4/ 11
5. Reconnect the calibrated leak temperature cable from the calibrated leak PC board
(Figure 4-11 on page 4-7).
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VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 5. The Electronics
This chapter gives the replacement procedures for the VS Series electronics. Refer to
Appendix D “Troubleshooting” for diagnostics to determine when to replace various boards
and flow control modules. Refer to Appendix E “Interconnection Diagram” for a diagram
showing the electronics interconnections.
5.5.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ M5 Allen Wrench
❑ Phillips Screw Driver
5.1 User Interface
To replace the user interface:
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3.Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 5-1) and detach the rear plastic cover from the unit.
4.Remove the four screws holding the front plastic cover and detach the cover from the unit.
Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-1).
5-1
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❑ Slotted Screw Driver
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
Figure 5-1
Rear and Front Cover Screws
5. Remove the user interface front cover using an Allen wrench to loosen the M4 screw at
the bottom front of the plate (Figure 5-2).
Figure 5-2
User Interface Plate Mounting Screw
6. Gently rock the metal interface panel up and out.
5-2
VS Series Helium Mass Spectrometer Leak Detector
Figure 5-3
Interface Board Wiring
8. Use a nut driver to remove the four hex nuts that mount the interface board to the user
interface (Figure 5-4). The spacers between the interface board and user interface loosen
as well; remove them.
Figure 5-4
Interface Board Mounting Nuts
5-3
D RA F T 6/ 4/ 11
7. Disconnect the speaker wire, green plug, ground and red/black wire connector at the
interface board Figure 5-3.
VS Series Helium Mass Spectrometer Leak Detector
9. Disconnect the two ribbon cables on the left and right sides of the board and gently lift
board off (Figure 5-5).
Figure 5-5
User Interface Board to Front Panel Display Wiring
D RA F T 6/ 4/ 11
10. Gently pull the board out and disconnect the blue plug from the user interface board
that originates on the display (Figure 5-6).
11. Disconnect the white plug form the backside of the interface board (Figure 5-6).
White
plug
Figure 5-6
5-4
White Plug to Front Panel
VS Series Helium Mass Spectrometer Leak Detector
Figure 5-7
Green/Yellow Wire to Front Panel
13. Remove the four Phillips head screws that hold the user interface in place. The spacers
between the interface and the front membrane loosen as well; remove them.
14. Place the new interface into the slot, inserting the spacers and reinstall the four Phillips
head screws.
15. Inert the spacers between the user interface and the user interface board and gently
place the user interface on top.
16. Replace and tighten the four hex nuts that mount the interface board to the user
interface (Figure 5-4).
17. Reconnect the green/yellow wire spade connection that runs between the user interface
board and the Front Panel (Figure 5-7).
5-5
D RA F T 6/ 4/ 11
12. Disconnect the green/yellow wire spade connection that runs between the user
interface board and the Front Panel (Figure 5-7).
VS Series Helium Mass Spectrometer Leak Detector
18. Reconnect the blue plug from the user interface board that originates on the display
(Figure 5-8).
D RA F T 6/ 4/ 11
Blue
plug
Figure 5-8
White Plug to Front Panel
19. Reconnect the white plug form the backside of the interface board (Figure 5-6 on
page 5-4).
20. Reconnect the two ribbon cables on the left and right sides of the board (Figure 5-5 on
page 5-4).
21. Use a nut driver to reinstall the four hex nuts and the spacers that mount the interface
board to the user interface (Figure 5-4).
22. Reconnect the speaker wire, green plug, ground and red/black wire connector at the
interface board Figure 5-3.
23. Gently rock the metal interface panel back in place.
24. Reattach the user interface front cover using an Allen wrench to tighten the M4 screw
and washer at the bottom front of the plate (Figure 5-2).
25. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-1).
26. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 5-1).
5-6
VS Series Helium Mass Spectrometer Leak Detector
5.2 CPU Board
To replace this board:
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
Figure 5-9
Rear and Front Cover Screws
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-9).
5. Disconnect the:
❑ R2140-301 from R24202 (black/white)
❑ Grey plug rightside - R2730-301
5-7
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3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 5-9) and detach the rear plastic cover from the unit.
VS Series Helium Mass Spectrometer Leak Detector
6. Unscrew the four Phillips head screws (Figure 5-10). The spacers between the board
and the mother board loosen as well; remove them.
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CPU board
Figure 5-10
Mounting Screws
7. Remove the board.
8. Place the new board with the spacers into the location.
9. Replace and tighten the four Phillips head screws and spacers on the corners of the
board (Figure 5-10).
10. Reconnect the:
❑ R2140-301 from R24202 (black/white)
❑ Grey plug rightside - R2730-301
11. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-9 on page 5-7).
12. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 5-9 on page 5-7).
5-8
VS Series Helium Mass Spectrometer Leak Detector
5.3 Ion Source Board
To replace this board:
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
Figure 5-11
Rear and Front Cover Screws
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-11).
5. Disconnect the:
❑ P1 cable
❑ P1 - J1 cable from position J1 and unscrew the red/black ground from the lower left
5-9
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3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 5-11) and detach the rear plastic cover from the unit.
VS Series Helium Mass Spectrometer Leak Detector
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6. Unscrew the four Phillips screws (Figure 5-12). The spacers between the board and the
mother board loosen as well; remove them.
Figure 5-12
Mounting Screws
7. Remove the board.
8. Place the new board with the spacers into the location.
9. Replace and tighten the four Phillips head screws and spacers on the corners of the
board (Figure 5-10).
10. Reconnect the:
❑ P1 cable
❑ P1 - J1 cable from position J1 and unscrew the red/black ground from the lower left
11. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-11).
12. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 5-11).
5-10
VS Series Helium Mass Spectrometer Leak Detector
5.4 Mother Board
To replace this board:
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
Figure 5-13
D RA F T 6/ 4/ 11
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 5-11) and detach the rear plastic cover from the unit.
Rear and Front Cover Screws
4. Remove the right board as per Section 5.2 “CPU Board” on page 5-7.
5. Remove the left board as per Section 5.3 “Ion Source Board” on page 5-9.
5-11
VS Series Helium Mass Spectrometer Leak Detector
6. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-14).
D RA F T 6/ 4/ 11
Mounting
screws
Figure 5-14
Motherboard Screw Locations
7. Disconnect the:
❑ Top board:
❑ Green plug (P100A) at J100 on the right
❑ Yellow plug (P100B) at J100 on the left
❑ Righhand board:
❑ Blue plug (P101A) at J100 on the bottom
❑ Grey plug (P101B) at J100 on the top
❑ Righthand bottom board:
❑ Red plug (P101A) at J302 on the top
❑ Black plug (P101B) at J302 on the bottom
❑ R2142-301 at J300 (black/white) - connection to right board
❑ White plug at J301 (green/white/yellow)
❑ White plug (P200) at J200 (white/black/red) and ground to back plate
❑ Black plug (P500) at J500
8. Remove the board.
5-12
VS Series Helium Mass Spectrometer Leak Detector
9. Place the new board with the spacers into the location.
10. Replace and tighten the four Phillips head screws and spacers on the corners of the
board (Figure 5-14 on page 5-12).
11. Reconnect the:
❑ Top board:
❑ Green plug (P100A) at J100 on the right
❑ Yellow plug (P100B) at J100 on the left
❑ Righhand board:
❑ Blue plug (P101A) at J100 on the bottom
❑ Grey plug (P101B) at J100 on the top
❑ Righthand bottom board:
❑ Black plug (P101B) at J302 on the bottom
❑ R2142-301 at J300 (black/white) - connection to right board
❑ White plug at J301 (green/white/yellow)
❑ White plug (P200) at J200 (white/black/red) and ground to back plate
❑ Black plug (P500) at J500
12. Reinstall the right board as per Section 5.2 “CPU Board” on page 5-7.
13. Reinstall the left board as per Section 5.3 “Ion Source Board” on page 5-9.
14. Replace the user interface front cover using an Allen wrench to tighten the M4 screw
and washer at the bottom front of the plate (Figure 5-2 on page 5-2).
15. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-11 on page 5-9).
16. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 5-11 on page 5-9).
5-13
D RA F T 6/ 4/ 11
❑ Red plug (P101A) at J302 on the top
VS Series Helium Mass Spectrometer Leak Detector
5.5 Valve Driver Board
To replace this board:
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
D RA F T 6/ 4/ 11
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 5-15) and detach the rear plastic cover from the unit.
Figure 5-15
Rear and Front Cover Screws
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-15).
5. Loosen and remove the two M4 screws and washers that hold the electronics back plate
to the top rail (Figure 5-16) and gently rock the assembly forward.
M4
mounting
screws
Figure 5-16
5-14
M4 Mounting Screws
VS Series Helium Mass Spectrometer Leak Detector
6. Unscrew the four Phillips screws. The spacers between the board and the backplate
loosen as well; remove them (Figure 5-17).
Mounting
screws
Figure 5-17
Valve Driver Board Mounting Screws
D RA F T 6/ 4/ 11
7. Disconnect the:
❑ 24 VDC connector at J2 (R2124301)
❑ Valve driver cables (2) at J3 and J4 (R2431301 and R2432301)
❑ Gray RS-232 cable (R2130301)
NOTE
Take care with cable bundle on the back of the board. The
white clip opens so the cable can be temporarily moved to
access the board.
8. Remove the board.
9. Place the new board with the spacers into the location.
10. Replace and tighten the four Phillips head screws and spacers on the corners of the
board.
11. Reconnect the:
❑ 24 VDC connector at J2 (R2124301)
❑ Valve driver cables (2) at J3 and J4 (R2431301 and R2432301)
❑ Gray RS-232 cable (R2130301)
12. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-11).
13. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 5-11).
5-15
VS Series Helium Mass Spectrometer Leak Detector
5.6 Turbo Controller Board
To replace this board:
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
D RA F T 6/ 4/ 11
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 5-18) and detach the rear plastic cover from the unit.
Figure 5-18
Rear and Front Cover Screws
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-18).
5. Loosen and remove the two M4 screws and washers that hold the electronics back plate
to the top rail (Figure 5-19) and gently rock the assembly forward.
M4
mounting
screws
Figure 5-19
5-16
M4 Mounting Screws
VS Series Helium Mass Spectrometer Leak Detector
6. Unscrew the four Phillips screws. The spacers between the board and the backplate
loosen as well; remove them (Figure 5-20).
Mounting
screws
Figure 5-20
Turbo Controller Board Mounting Screws
D RA F T 6/ 4/ 11
7. Disconnect the:
❑ 24 VDC J3 connector (R2124301)
❑ Turbo controller cable (R134301)
❑ RS-232 cable (R2133301)
❑ Ground at the top the backplate
NOTE
Take care with cable bundle on the back of the board. The
white clip open so the cable can be temporarily moved to
access the board.
8. Remove the board.
9. Place the new board with the spacers into the location.
10. Replace and tighten the four Phillips head screws and spacers on the corners of the
board.
11. Reconnect the:
❑ 24 VDC J3 connector (R2124301)
❑ Turbo controller cable (R134301)
❑ RS-232 cable (R2133301)
❑ Ground at the top the backplate
12. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 5-18 on page 5-16).
13. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 5-18 on page 5-16).
5-17
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VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 6. Turbo Molecular Pump and
Roughing/Foreline Pumps
The VS Series has an internal high speed turbo pump and, depending upon your system’s
configuration, either one or three roughing/foreline pumps.
NOTE
The DS302 (MR15), TS620 (MD30) and the DS42 (PR02).
6.6.1 Equipment Required
❑ M5 Allen Wrench
❑ Phillips Screw Driver
❑ Slotted Screw Driver
6.1 DS-42 Fore Pump
CAUTION
The fore pump operates at high temperatures. Allow the pump
to cool before proceeding.
To replace the fore pump:
1. Shut down the system using the On/Off rocker switch.
2. Wait for the pump to cool.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 6-1) and detach the rear plastic cover from the unit.
6-1
D RA F T 6/ 4/ 11
❑ Extended Length M5 Allen Wrench
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
Figure 6-1
Rear and Front Cover Screws
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 6-1).
5. Drain oil.
6. Unscrew the wing nut on the NW-16 clamp and remove the vacuum connection to the
valve block (Figure 6-2).
7. Remove the sensor (Figure 6-2) to the VS Series housing by:
a. Loosening the knurl nut on the top of the sensor form which the green/black wire
exits and pulling off the cap.
b. Removing the hex nut.
6-2
VS Series Helium Mass Spectrometer Leak Detector
Figure 6-2
D RA F T 6/ 4/ 11
Valve block
connection
Valve Block Connection
8. Gently push the vacuum hose to the side (Figure 6-2).
9. Loosen the hex nut and remove the exhaust connection (Figure 6-2).
6-3
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
10. Remove the four Phillips screw on the cap and pull off the cap. (Figure 6-3).
Figure 6-3
Fore Pump Cap
11. Loosen the two collars on the nuts exterior to the box and disconnect the wires inside
and label them for reconnection (Figure 6-4).
Figure 6-4
6-4
Cap Wire Connections
VS Series Helium Mass Spectrometer Leak Detector
WARNING
Use two people for the next step.
12. Place 6” blocks under all four corners of the unit.
13. Rock the unit back gently.
14. Accessing from the bottom, remove the four Phillips head screws. (Figure 6-5).
Figure 6-5
D RA F T 6/ 4/ 11
Fore pump
mounting
screws
Fore Pump Mounting Screws
15. Remove the rubber spacers, washers and nuts (Figure 6-6).
Fore pump mounting feet
Figure 6-6
Fore Pump Mounting Spacers
6-5
VS Series Helium Mass Spectrometer Leak Detector
16. Place the new pump in and screw down the spacers, washers and nuts.
WARNING
Use two people for the next step.
17. Remove the 6” blocks under all four corners of the unit.
18. Reinstall the exhaust hose and tighten the hex nut (Figure 6-2).
19. Reinstall the valve block connection using the NW-16 wing nut (Figure 6-2).
20. Reconnect the wires in the box and tighten the two collars on the nuts exterior to the
box (Figure 6-4).
21. Reinstall the four Phillips screw on the cap and pull off the cap. (Figure 6-3).
D RA F T 6/ 4/ 11
22. Replace the oil.
23. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 6-1).
24. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 6-1).
6.2 Scroll Pump
Replacing the scroll pump is comprised of:
1. Section 6.2.2 “Valve Block Wiring Harness”
2. Section 6.2.3 “Removing the Valve Block Assembly and Spectrometer” on page 6-8
3. Section 6.2.4 “Replacing the Turbo Pump, Valve Block and Spectrometer” on page 6-11
4. Section 6.2.5 “Replacing the Valve Block Harness and Thermocouple Wiring” on
page 6-11
6.2.2 Valve Block Wiring Harness
The valve block wiring harness is comprised of seven three-prong sensor blocks labeled: V1
through V5 and V7 and the thermocouple. See the wiring diagram on Appendix E
“Interconnection Diagram”.
To remove the valve block wiring harness:
1. Shut down the system using the On/Off rocker switch.
2. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 6-1) and detach the rear plastic cover from the unit.
6-6
VS Series Helium Mass Spectrometer Leak Detector
Rear and Front Cover Screws
3. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 6-1).
4. Disconnect valve block harness from the valve driver board. Connections are labeled P3
and P4. Or, remove the valve plug or connector, unscrew the Phillips head screw and
remove the wires from the six three-prong connector (Figure 6-8).
Figure 6-8
Sensor Wiring and Thermocouple
6-7
D RA F T 6/ 4/ 11
Figure 6-7
VS Series Helium Mass Spectrometer Leak Detector
5. Unplug the thermocouple octal connector (Figure 6-9).
Figure 6-9
Thermocouple
6.2.3 Removing the Valve Block Assembly and Spectrometer
D RA F T 6/ 4/ 11
To remove the valve block:
1. Unscrew the Phillips head screw connecting the test port ground wire to the center rail
(Figure 6-10).
Ground wire
Figure 6-10
6-8
Test Port Grounding Wire Connection
VS Series Helium Mass Spectrometer Leak Detector
Figure 6-11
D RA F T 6/ 4/ 11
2. Loosen, but don’t remove, the two bolts for the foreline to valve block connection. Take
care not to damage the O-ring (Figure 6-11).
Vacuum Connection
3. Remove the ground to the valve block (CONDS) (Figure 6-12).
Figure 6-12
Valve Block and TC Ground
6-9
VS Series Helium Mass Spectrometer Leak Detector
4. Unscrew the Phillips screw for the spectrometer ground (SP_GND) (Figure 6-13).
D RA F T 6/ 4/ 11
Ground wire
Figure 6-13
Spectrometer Ground Wire
5. Unscrew the five Allen nuts that mount the valve block to the unit (Figure 6-14). Two are
shown with the unit already removed for a better view. The spectrometer and turbo
pump are shown together.
Valve block
mounting nut:
M5
Figure 6-14
6-10
Valve Block Assembly and Spectrometer Mounting Nuts
VS Series Helium Mass Spectrometer Leak Detector
6. Gently pull the valve block assembly straight up and out of the unit. Place the block
bottom down on a flat surface (Figure 6-14).
7. Unscrew the knurled nut that connects the vacuum connection to the turbo pump
(Figure 6-15).
Figure 6-15
Turbo Pump Connector
8. Lift the pump straight up and out of the unit.
To reinstall the scroll pump and valve block:
1. Gently place the valve block onto it mounting holes and tighten the five M4 Allen nuts
(Figure 6-14 on page 6-10).
2. Reinstall the spectrometer ground wire (Figure 6-13 on page 6-10).
3. Reinstall the ground to the valve block (CONDS).
4. Reinstall the three bolts for the spectrometer connection. Take care not to damage the
O-ring (Figure 6-14 on page 6-10).
5. Reinstall the two bolts for the vacuum connection. Take care not to damage the O-ring
(Figure 6-11 on page 6-9).
6. Tighten the Phillips head screw connecting the test port ground wire to the center rail
(Figure 6-10 on page 6-8).
6.2.5 Replacing the Valve Block Harness and Thermocouple Wiring
To replace the wiring:
1. Replug the valve plugs, screw the Phillips head screw and reattach the wires from the
six three-prong blocks (Figure 6-8 on page 6-7).
2. Reattached the thermocouple wires (Figure 6-9 on page 6-8).
3. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 6-1 on page 6-2).
4. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 6-1 on page 6-2).
6-11
D RA F T 6/ 4/ 11
6.2.4 Replacing the Turbo Pump, Valve Block and Spectrometer
VS Series Helium Mass Spectrometer Leak Detector
6.3 Changing the Mechanical Pump Fluid
D RA F T 6/ 4/ 11
Refer to the Mechanical Pump Operation Manual, provided with the pumps that came with
your leak detector. See the accessory item list in this manual for the replacement oil part
number.
6-12
VS Series Helium Mass Spectrometer Leak Detector
Section 7. Fan Replacement
7.3.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ M5 Allen Wrench
❑ Slotted Screw Driver
D RA F T 6/ 4/ 11
There are two cooling fans inside the unit body (Figure 7-1).
Figure 7-1
Fan Locations
To replace the top fan:
1. Shut down the system using the On/Off rocker switch.
2. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 7-2) and detach the rear plastic cover from the unit.
3. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 7-2).
7-1
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
Figure 7-2
Rear and Front Cover Screws
4. Disconnect the red/black wire connector (Figure 7-4).
Figure 7-3
7-2
Fan Wiring
VS Series Helium Mass Spectrometer Leak Detector
Figure 7-4
NOTE
D RA F T 6/ 4/ 11
5. Loosen and remove the four hex nuts, lock washers and washers in the back of the fan
in the corners (Figure 7-4).
Fan Nuts
The fan spacers are part of the fan unit and will not loosen.
6. Mount the replacement fan using the four hex nuts, lock washers and washers.
7. Replace the red/black wire connector.
8. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 7-2 on page 7-2).
9. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 7-2 on page 7-2).
7-3
VS Series Helium Mass Spectrometer Leak Detector
To replace the bottom fan:
1. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 7-5) and detach the rear plastic cover from the unit.
D RA F T 6/ 4/ 11
2. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 7-5).
Figure 7-5
Rear and Front Cover Screws
3. Disconnect the red/black wire connector (Figure 7-6).
Figure 7-6
7-4
Fan Wiring
VS Series Helium Mass Spectrometer Leak Detector
4. Loosen and remove the four hex nuts, lock washers and washers in the back of the fan
in the corners (Figure 7-6).
Figure 7-7
Fore Pump Connection
6. Mount the replacement speaker using the four M3 screws and washers.
7. Replace the black and clear spade connections.
8. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 7-5 on page 7-4).
9. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 7-5 on page 7-4).
7-5
D RA F T 6/ 4/ 11
5. Unplug the fore pump connection (Figure 7-7).
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 8. Power Supply
CAUTION
Always where and ESD bracelet when performing this
procedure.
8.3.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ M5 Allen Wrench
❑ Phillips Screw Driver
2. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 8-1) and detach the rear plastic cover from the unit.
3. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 8-1).
Figure 8-1
Rear and Front Cover Screws
8-1
D RA F T 6/ 4/ 11
1. Shut down the system using the On/Off rocker switch.
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
4. Remove the user interface front cover using an Allen wrench to loosen the M4 screw
and washer at the bottom front of the plate (Figure 8-2).
Figure 8-2
User Interface Plate Mounting Screw
5. Gently rock the interface panel up and out.
8-2
VS Series Helium Mass Spectrometer Leak Detector
6. Disconnect (Figure 8-3):
❑ P401 (red/black) wire from position J401
❑ Ground wire from the Front Panel using a small Phillips head screw driver and place
washer aside
❑ R2148301 (red/black) wire from position J301 Spkr connection
❑ R2127-301 (green cable) from position J303 COM1 connection
❑ J300-2 from the P300 connector using the two captive screws
D RA F T 6/ 4/ 11
7. Remove the assembly and lay it aside.
Figure 8-3
Interface Board Wiring
8-3
VS Series Helium Mass Spectrometer Leak Detector
8. Remove the bank of connections shown in Figure 8-4. Label the wires as they are
disconnected (from left side):
❑ SP1 goes to L on power supply
❑ SPN goes to N (white) on power supply
❑ SPG (green/yellow) goes to CGND2 on power supply
❑ SP GND goes to GND on power supply
❑ Three red wire lead:
❑ PS1 goes to POS1 +V on power supply
❑ PS2 goes to POS2 +V on power supply
❑ PS3 goes to POS3 +V on power supply
❑ Three black wire lead:
❑ PS4 goes to POS4 -V on power supply
D RA F T 6/ 4/ 11
❑ PS5 goes to POS5 -V on power supply
❑ PS6 goes to POS6 -V on power supply
Figure 8-4
WARNING
Power Supply Connections
Use two people for the next step.
9. Place 6” blocks under all four corners of the unit.
10. Rock the unit back gently.
8-4
VS Series Helium Mass Spectrometer Leak Detector
CAUTION
Do not exceed 45° or the oil will leak into the unit.
11. Remove the four Phillips screws on the bottom mounting plate (Figure 8-5).
Figure 8-5
Power Supply Mounting Holes
12. Place the new power supply in place and install using the four Phillips screws removed
in step 9.
WARNING
Use two people for the next step.
13. Remove the 6” blocks.
14. Reinstall the bank of connections shown in Figure 8-4 on page 8-4:
❑ SP1 goes to L on power supply
❑ SPN goes to N (white) on power supply
❑ Black (green/yellow) goes to CGND2 on power supply
❑ SP GND goes to GND on power supply
❑ Three red wire lead:
❑ PS1 goes to POS1 +V on power supply
❑ PS2 goes to POS2 +V on power supply
❑ PS3 goes to POS3 +V on power supply
8-5
D RA F T 6/ 4/ 11
Power supply mounting holes
VS Series Helium Mass Spectrometer Leak Detector
❑ Three black wire lead:
❑ PS4 goes to POS4 -V on power supply
❑ PS5 goes to POS5 -V on power supply
❑ PS6 goes to POS6 -V on power supply
15. Reconnect:
❑ P401 (red/black) wire from position J401
❑ Ground wire from the Front Panel using a small Phillips head screw driver and place
washer aside
❑ R2148301 (red/black) wire from position J301 Spkr connection
❑ R2127-301 (green cable) from position J303 COM1 connection
❑ J300-2 from the P300 connector using the two captive screws
D RA F T 6/ 4/ 11
16. Reinstall the speaker wire, green plug, ground and red/black wire connector at the
interface board (Figure 8-3 on page 8-3).
17. Replace the user interface front cover using an Allen wrench to tighten the M4 screw
and washer at the bottom front of the plate (Figure 8-2 on page 8-2).
18. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 8-1 on page 8-1).
19. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 8-1 on page 8-1).
8-6
VS Series Helium Mass Spectrometer Leak Detector
Section 9. Speaker Replacement
9.3.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Slotted Screw Driver
To replace the speaker:
1. Shut down the system using the On/Off rocker switch.
3. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 9-1).
Figure 9-1
Rear and Front Cover Screws
9-1
D RA F T 6/ 4/ 11
2. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 9-1) and detach the rear plastic cover from the unit.
VS Series Helium Mass Spectrometer Leak Detector
4. Disconnect the speaker black (SPK2) and red spade connections (SPK1) (Figure 9-2).
NOTE
The speaker connects to the J50 connector on the Front Panel
board.
D RA F T 6/ 4/ 11
5. Use a nut driver to loosen and remove the four M3 screws in the speaker corners
(Figure 9-2). Remove the plastic protective shell and place it aside.
Figure 9-2
Speaker Nuts and Wiring
6. Mount the replacement speaker and plastic shield using the four M3 screws and
washers.
7. Replace the black and red spade connections.
8. Reinstall the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 9-1 on page 9-1).
9. Using an extended length M5 Allen wrench, reinstall the four screws holding the rear
plastic cover (Figure 9-1 on page 9-1).
9-2
VS Series Helium Mass Spectrometer Leak Detector
Section 10. Filament Replacement
10.1 Installation Procedure
10.1.1 Equipment Required
❑ Filament Service Kit (PN: VSFLDFR)
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
❑ Needle nose pliers or tweezer
❑ M3 Phillips Head Screw Driver
❑ 5 mm Hex Driver
❑ Torque Wrench (must be adjustable to 40 in-lbs (4.5 N-m) and 90 in-lbs (10.2 N-m))
❑ Digital Multimeter (Fluke 187 or equivalent)
For clarity, some items have been omitted from views.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 10-1).
Figure 10-1
Rear Screws
10-1
D RA F T 6/ 4/ 11
❑ 1.5 mm Hex Driver
VS Series Helium Mass Spectrometer Leak Detector
4. Detach the rear plastic cover from the unit.
D RA F T 6/ 4/ 11
5. Disconnect the fan cable and remove the fan assembly by unfastening two wing nuts
and one M4 socket head cap screw (Figure 10-2).
Figure 10-2
CAUTION
Fan Assembly
Static sensitive device, ensure that personnel are properly
grounded before proceeding.
6. Disconnect the spectrometer ground cable, the preamp signal cable and the ion source
cable from the spectrometer (Figure 10-3).
NOTE
Cables not shown for clarity.
Figure 10-3
10-2
Cable Locations
VS Series Helium Mass Spectrometer Leak Detector
7. Using an M3 Phillips screw driver, remove the spectrometer cover.
CAUTION
Wear non-powdered, ESD-safe Nitride or equivalent gloves (not
included in kit) to prevent skin oils from getting on vacuum
surfaces.
Figure 10-4
Spectrometer Exploded View
9. Remove the metal gasket (item 3) and discard. Do not scratch the mating surface when
removing the gasket. Do not attempt to reuse the gasket (Figure 10-4).
10. Examine the spectrometer cavity for discolored areas. If present, refer to the service
manual for cleaning instruction.
10-3
D RA F T 6/ 4/ 11
8. Loosen screws (item 1, Figure 10-4) and carefully remove the spectrometer header from
the body. The vacuum system vents to atmosphere as the screws are loosened. Retain
the socket head cap screws (item 1) and the Belleville washers (item 2). See line item 21
for correct orientation of the Belleville washers (Figure 10-10 on page 10-6).
VS Series Helium Mass Spectrometer Leak Detector
11. On a clean work surface, remove the defective filament(s) (item 4) from the
spectrometer by loosening the two coupler screws. Then loosen the M2 screw and
washer and remove the defective filament (Figure 10-5).
D RA F T 6/ 4/ 11
Figure 10-5
Coupler Screws
12. Inspect the new filament assembly for deformation, damage and flaking of the coating
prior to installation. Do not install if damaged.
13. Insert new filament assembly into the coupler.
14. Guide the ceramic against the bottom and side ribs of the ion source support block
(Figure 10-6 and Figure 10-7). Correct positioning of filament is critical for proper
spectrometer operation.
Figure 10-6
10-4
Coupler and Filament Assembly
VS Series Helium Mass Spectrometer Leak Detector
15. While holding the filament in position, insert the M2 screw and washer and tighten
(Figure 10-7).
Figure 10-7
Filament Position
17. Verify ceramic is tight against the bottom and right side ribs. Ensure that the filament is
positioned in the slot of the ion source as shown (Figure 10-7 and Figure 10-8).
Figure 10-8
Filament Alignment
18. Clean the mating surfaces of the spectrometer body and header with Isopropyl alcohol
and a clean lint free wipe.
NOTE
Agilent recommends that you use the Vac-u-solv spectrometer
cleaning kit (PN: 670029096).
19. Center replacement metal gasket inside the bolt pattern and outside of the body cavity.
To prevent scratching of any sealing surface do not use metal tools for this task.
10-5
D RA F T 6/ 4/ 11
16. Tighten the coupler screws onto the filament posts (Figure 10-7).
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
20. Guide the spectrometer header into pocket with the detector housing closest to the inlet
(Figure 10-9).
Figure 10-9
Figure 9: Spectrometer Alignment
21. Insert a screw with three Belleville washers into each hole and finger tighten
(Figure 10-10).
NOTE
The cones of the Belleville washers should all point to the head
of the screw.
Figure 10-10
Direction of Cone
22. Following the pattern shown in Direction of Cone, torque screws to 40 in-lbs (4.5 N-m).
23. Re-torque screws to 90 in-lbs (10.2 N-m) following the same pattern. Go through the
entire torque pattern twice to ensure the metal gasket is firmly compressed.
10-6
VS Series Helium Mass Spectrometer Leak Detector
24. Wait a minimum of five minutes then torque the screws shown in pattern (Figure 10-10)
to 90 in-lbs (10.2 N-m).
Figure 10-11
Ion Source Header Pin Schematic
If there is continuity (short circuit) at any of the points, remove the header and inspect
for shorting.
26. Place the spectrometer cover over the header and align the holes (Figure 10-12).
Figure 10-12
Ion Source Header Pin Locations
27. Install screws and washers (items 5 & 6), then tighten using a M3 Phillips screw driver
(Ion Source Header Pin Locations).
10-7
D RA F T 6/ 4/ 11
25. On the PCB, use the resistance meter to verify an open circuit between any two of the
six ion source header pins (except FIL-1 to FIL-1 and FIL-2 to FIL-2 which should be 0.3
Ohms or less). Also verify an open circuit between the body of the spectrometer and any
of the ion source header pins (Figure 10-11).
VS Series Helium Mass Spectrometer Leak Detector
28. Connect the spectrometer ground cable, the preamp signal cable and the ion source
cable to the spectrometer cover.
29. Ensure that the vent valve on the turbo molecular pump (if installed) is tightened
(Figure 10-13).
D RA F T 6/ 4/ 11
NOTE
The vent valve is not installed on most turbo pumps.
Figure 10-13
Vent Valve
30. Attach the fan assembly (Figure 10-2 on page 10-2) by fastening two wing nuts and one
M4 socket head cap screw. Then connect the fan cable to the unit.
31. Leak check the spectrometer to ensure a leak free joint.
32. Attach the rear cover and secure to the unit using existing hardware.
33. Power up the unit.
34. Watch the Home screen to verify that the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes. Refer to the user manual if the
system fails to reach the System Ready mode.
The filament emission current normally operates at 0.8mA.
35. Use the display menus (MENUS, SET-UP, MANUAL TUNING, EMISSION) to set the
emission to.8mA.
NOTE
Agilent recommends that you wait a minimum of 30 minutes
for the vacuum system to clean up to obtain optimum
calibration.
36. Calibrate the system per the user manual. For proper operation the system must be
calibrated after opening the spectrometer or changing a filament.
10-8
VS Series Helium Mass Spectrometer Leak Detector
37. If the system fails calibration, adjust the filament emission current as follows:
❑ If gain is too low, there is too much signal; reduce emission current (by 0.1 - 0.2mA),
then calibrate again.
❑ If gain is too high, there is too little signal; increase emission, then calibrate again.
The permitted emission current range is from 0.5 to 1.5 mA.
D RA F T 6/ 4/ 11
When calibration is successful, filament replacement is complete.
10-9
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VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 11. Thermocouple Gauge and Octal
Cable Replacement
11.1 Installation Procedure
11.1.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
WARNING
NOTE
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
Some early versions of this instrument used one assembly that
incorporated a TC gauge and cable. If you need to replace one
of these early assemblies, you will need to replace the TC gauge
(VSFLDOG) and the cable assembly (VSFLDOC).
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 11-1) and detach the rear plastic cover from the unit.
11-1
D RA F T 6/ 4/ 11
For clarity, some items have been omitted from views.
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
Figure 11-1
Rear and Front Cover Screws
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 11-1).
NOTE
Cables not shown for clarity.
5. Disconnect the fan cable and remove the fan assembly by unfastening two wing nuts
and one M4 socket head cap screw (Figure 11-2).
Figure 11-2
11-2
Fan and TC Gauge Assemblies
VS Series Helium Mass Spectrometer Leak Detector
6. Replace the TC Gauge (VSFLDOG) by:
a. Disconnecting the octal connector from the TC gauge (Figure 11-3).
Octal Cable
b. Using an M4 Allen wrench to remove the TC gauge from the valve block. Retain
both screws and the two washers, and discard the old TC Gauge and O-ring.
c. Placing the new O-ring onto the replacement TC Gauge.
d. Installing the replacement TC Gauge: orientate the TC vent towards the base of the
valve block (6 o'clock position) and loosely install existing hardware (Figure 11-4).
Figure 11-4
Thermocouple Gauge Orientation
11-3
D RA F T 6/ 4/ 11
Figure 11-3
VS Series Helium Mass Spectrometer Leak Detector
e. Installing the ground lug between the washer and the screw (Figure 11-5) and secure
the existing hardware using an M4 Allen wrench.
Figure 11-5
D RA F T 6/ 4/ 11
f.
Figure 5: Ground Lug Position
Reconnecting the octal connector to the TC Gauge (Figure 11-5).
g. If an Octal cable installation is required then proceed to step 7, otherwise proceed
to step 8.
Figure 11-6
Octal Cable
7. Replace the octal cable (VSFLDOC) by:
a. Disconnecting the octal connector from the TC gauge (Figure 11-3 on page 11-3).
b. Using an M4 Allen wrench, loosen the lower TC gauge screw and remove the
ground lug (Figure 11-3 on page 11-3).
c. Detaching the cable plug from the mother board PCB and disconnecting the ground
cable form the chassis (Figure 11-2 on page 11-2).
d. Removing the octal cable from the cable ties and discard.
e. Routing the replacement octal cable back through the assembly in the same position
as the removed cable.
11-4
VS Series Helium Mass Spectrometer Leak Detector
f.
Attaching the cable plug and the chassis ground to the location (Figure 11-2 on
page 11-2).
g. Installing the ground lug between the washer and screw and securing it using an M4
Allen wrench.
h. Attaching the octal connector to the TC gauge.
8. Attach the fan assembly (Figure 11-2 on page 11-2) by fastening the two wing nuts and
one M4 socket head cap screw. Then connect the fan cable to the unit.
9. Attach the front cover and secure to the frame using existing hardware.
10. Leak test the TC gauge to ensure a leak free joint.
11. Attach the rear cover and secure to the frame using existing hardware.
12. Connect the power cord and power up the unit.
Refer to the operator's manual if the system fails to reach the System Ready mode.
14. Refer to the TC gauge calibration section of the user's manual for the correct calibration
procedure for the TC gauge.
15. Agilent recommends a full calibration of the unit prior to leak test operations.
11-5
D RA F T 6/ 4/ 11
13. Watch the home screen to verify that the Spectrometer Pressure Wait message
progresses to Stabilization Wait and System Ready within ten minutes.
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 12. Compression Port Adapter Kit
12.1 Installation Procedure
12.1.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
❑ Compression Port Adapter Kit (P/N VSFLDCP)
WARNING
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 12-1) and detach the rear plastic cover from the unit.
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 12-1).
Figure 12-1
Rear and Front Cover Screws
12-1
D RA F T 6/ 4/ 11
For clarity, some items have been omitted from views.
VS Series Helium Mass Spectrometer Leak Detector
NOTE
Cables not shown for clarity.
D RA F T 6/ 4/ 11
5. Using an M5 allen wrench remove the four screws and disconnect the compression test
port flange (Figure 12-2). Do not discard hardware.
Figure 12-2
NOTE
Compression Test Port Flange
Cables not shown for clarity.
6. Attach new compression port adapter kit using existing hardware and O-ring
(Figure 12-3).
Figure 12-3
Compression Port Adapter Kit
7. Attach the front cover and secure to the unit using existing hardware.
8. Leak test the Compression Port Adapter to ensure a leak free joint.
12-2
VS Series Helium Mass Spectrometer Leak Detector
9. Attach the rear cover and secure to the unit using existing hardware.
10. Connect the power cord and power up the unit.
11. Watch the home screen to verify that the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.
D RA F T 6/ 4/ 11
12. Agilent recommends a full calibration of the unit prior to leak test operations.
12-3
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 13. Oil Mist Eliminator Installation
13.1 Installation Instructions
Equipment required:
❑ Oil Mist Eliminator Kit
❑ Adjustable Wrench
❑ Extended Length M5 Allen Wrench
❑ Adjustable Pliers
To install the unit:
2. Using an extended length M5 Allen wrench remove the four screws holding the rear
plastic cover.
3. Detach the rear plastic cover from the unit.
4. Disconnect the hose clamp and remove the hose from the barbed fitting.
5. Remove the elbow and reducer using an adjustable wrench (Figure 13-1).
Elbow and
reducer
Figure 13-1
Unit Before Install
6. Clean any particles that may be present at the pump exhaust port opening.
13-1
D RA F T 6/ 4/ 11
1. Unplug the unit from the power source.
VS Series Helium Mass Spectrometer Leak Detector
7. Install the KF-16 flange adapter provided with the leak detector using adjustable pliers
(Figure 13-2).
Figure 13-2
KF-16 Flange Adapter w/Centering Ring
D RA F T 6/ 4/ 11
8. Install KF-16 centering ring, the oil mist eliminator, and the KF-16 quick clamp by
tightening up the wing nut.
9. Ensure the orientation of the barbed fitting as shown in Figure 13-2.
10. Reconnect the hose to the barbed fitting and secure using a hose clamp. The unit
appears as in Figure 13-3.
Figure 13-3
Figure 3: Oil Mist Eliminator After Install
11. Attach the rear plastic cover and secure to the unit using existing hardware.
12. Connect the power cord and power up the unit.
13. Watch the home screen to verify the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes. Refer to the operator's manual
if the system fails to reach the System Ready mode.
14. Agilent recommends a full calibration of the unit prior to leak test operations.
13-2
VS Series Helium Mass Spectrometer Leak Detector
Section 14. Ion Source Replacement
14.1 Installation Procedure
Equipment required:
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set (Range 1.5 mm to 10 mm)
❑ Needle nose pliers or tweezer
❑ M3 Phillips Head Screw Driver
❑ 1.5 mm Hex Driver
❑ Torque Wrench (must be adjustable to 45 in-lbs (5.0 N-m) and 90 in-lbs (10.2 N-m))
❑ Digital Multimeter (Fluke 187 or equivalent)
NOTE
Inspect the new ion source kit for deformation, damage and
filament coating flaking prior to installation. Do not install if
damaged. Touching the filament under any condition will
cause damage.
For clarity, some items have been omitted from views.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 14-1 on page 14-2).
14-1
D RA F T 6/ 4/ 11
❑ 5 mm Hex Driver
VS Series Helium Mass Spectrometer Leak Detector
Figure 14-1
Rear Screws
D RA F T 6/ 4/ 11
4. Detach the rear plastic cover from the unit.
5. Disconnect the fan cable and remove the fan assembly by unfastening two wing nuts
and one M4 socket head cap screw (Figure 14-2).
Figure 14-2
CAUTION
14-2
Fan Assembly
Static sensitive device, ensure that personnel are properly
grounded before proceeding.
VS Series Helium Mass Spectrometer Leak Detector
6. Disconnect the spectrometer ground cable, the preamp signal cable and the ion source
cable from the spectrometer (Figure 14-3).
NOTE
Cable Locations
Cables not shown for clarity.
7. Use an M3 Phillips screw driver to remove the spectrometer cover.
CAUTION
Wear non-powdered, ESD-safe Nitride or equivalent gloves (not
included in kit) to prevent skin oils from getting on vacuum
surfaces. Ensure that personnel are properly grounded before
proceeding.
8. Use an M5 allen wrench to loosen screws (item 1 of Figure 14-4 on page 14-4) and
carefully remove the spectrometer header from the body. The vacuum system vents to
atmosphere as the screws are loosened. Retain the socket head cap screws (item 1) and
the Belleville washers (item 2). See Figure 14-5 on page 14-4 for correct orientation of
the Belleville washers.
14-3
D RA F T 6/ 4/ 11
Figure 14-3
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
Figure 14-4
Spectrometer Exploded View
Figure 14-5
Direction of Cone
9. Remove the metal gasket (item 3) and discard. Do not scratch the mating surface when
removing the gasket. Do not attempt to reuse the gasket (Figure 14-4).
10. Examine the spectrometer cavity for discolored areas. If present, refer to the service
manual for cleaning instruction.
CAUTION
14-4
This is a static sensitive device, ensure that personnel are
properly grounded before proceeding.
VS Series Helium Mass Spectrometer Leak Detector
11. Use an M1.5 Allen wrench to unscrew the six coupler screws and the collimator screw
(Figure 14-6).
Ion Support Assembly
D RA F T 6/ 4/ 11
Figure 14-6
12. Remove the extractor, chamber and collimator wires from the assembly.
13. Remove the two M4 support screws (Figure 14-7).
Figure 14-7
M4 Support Screws
14. Gently remove the ion support assembly from the spectrometer header.
NOTE
Ensure that no damage is done to the spectrometer wire during
disassembly.
15. Position the new ion support assembly onto the spectrometer header and align.
14-5
VS Series Helium Mass Spectrometer Leak Detector
16. Secure to the spectrometer header using two M4 support screws.
17. Connect the collimator wire to the collimator plate using an M1.5 screw (Figure 14-8).
D RA F T 6/ 4/ 11
Figure 14-8
Partial Pressure Plate
18. Insert the chamber and extractor wires into the ion support assembly (Figure 14-9 and
Figure 14-10).
Figure 14-9
CAUTION
14-6
Extractor Plate
Do not cut the wires by over tightening. Ensure that wires are
contacting the assembly where required and that no short
circuit exists.
VS Series Helium Mass Spectrometer Leak Detector
Figure 14-10
Filament Alignment
20. Guide the ceramic against the bottom and side ribs of the ion source support block
(Figure 14-11 and Figure 14-12 on page 14-8). Correct positioning of filament is critical
for proper spectrometer operation.
Figure 14-11
Coupler and Filament Assembly
14-7
D RA F T 6/ 4/ 11
19. Insert each new filament assembly into a pair of couplers.
VS Series Helium Mass Spectrometer Leak Detector
21. While holding the filament in position, insert the M2 screw and washer and tighten
(Figure 14-12).
22. Tighten the coupler screws onto the filament posts (Figure 14-12).
D RA F T 6/ 4/ 11
23. Verify ceramic is tight against the bottom and right side ribs. Ensure that the filament is
positioned in the slot of the ion source as shown (Figure 14-12 and Figure 14-13 on
page 14-8).
Figure 14-12
Figure 14-13
Filament Position
Filament Alignment
24. Clean the mating surfaces of the spectrometer body and header with Isopropyl alcohol
and a clean lint free wipe.
14-8
VS Series Helium Mass Spectrometer Leak Detector
NOTE
Agilent recommends that you use the Vac-U-Solv spectrometer
cleaning kit (PN: 670029096).
25. Center replacement metal gasket inside the bolt pattern and outside of the body cavity.
To prevent scratching of any sealing surface do not use metal tools for this task.
Figure 14-14
D RA F T 6/ 4/ 11
26. Guide the spectrometer header into pocket with the detector housing closest to the inlet
(Figure 14-14).
Spectrometer Alignment
27. Insert a screw with three Belleville washers into each hole and finger tighten
(Figure 14-15 on page 14-10).
NOTE
The cones of the Belleville washers should all point to the head
of the screw.
14-9
VS Series Helium Mass Spectrometer Leak Detector
Figure 14-15
Direction of Cone
28. Following the pattern shown in Figure 14-15, torque screws to 45 in-lbs (5.0 N-m).
D RA F T 6/ 4/ 11
29. Re-torque screws to 90 in-lbs (10.2 N-m) following the same pattern. Go through the
entire torque pattern twice to ensure the metal gasket is firmly compressed.
30. Wait a minimum of five minutes then torque the screws shown in pattern (Figure 14-14)
to 90 in-lbs (10.2 N-m).
31. On the PCB, use the resistance meter to verify an open circuit between any two of the
six ion source header pins (except FIL-1 to FIL-1 and FIL-2 to FIL-2 which should be 0.3
Ohms or less). Also verify an open circuit between the body of the spectrometer and any
of the ion source header pins (Figure 14-16).
Figure 14-16
Ion Source Header Pin Schematic
If there is continuity (short circuit) at any of the points, remove the header and inspect
for shorting.
14-10
VS Series Helium Mass Spectrometer Leak Detector
Figure 14-17
Ion Source Header Pin Locations
33. Install screws and washers (items 5 & 6), then tighten using a M3 Phillips screw driver
(Figure 14-17).
34. Connect the spectrometer ground cable, the preamp signal cable and the ion source
cable to the spectrometer cover.
35. Ensure that the vent valve on the turbo molecular pump (if installed) is tightened
(Figure 14-18).
NOTE
The vent valve is not installed on most turbo pumps.
Figure 14-18
Vent Valve
14-11
D RA F T 6/ 4/ 11
32. Place the spectrometer cover over the header and align the holes (Figure 14-17).
VS Series Helium Mass Spectrometer Leak Detector
36. Attach the fan assembly (Figure 14-2 on page 14-2) by fastening two wing nuts and one
M4 socket head cap screw. Then connect the fan cable to the unit.
37. Leak check the spectrometer to ensure a leak free joint.
38. Attach the rear cover and secure to the unit using existing hardware.
39. Power up the unit.
40. Watch the Home screen to verify that the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes. Refer to the user manual if the
system fails to reach the System Ready mode.
The filament emission current normally operates at 0.8mA.
41. Use the display menus (MENUS, SET-UP, MANUAL TUNING, EMISSION) to set the
emission to .8 mA.
D RA F T 6/ 4/ 11
NOTE
Agilent recommends that you wait a minimum of 30 minutes
for the vacuum system to clean up to obtain optimum
calibration.
42. Calibrate the system per the user manual. For proper operation the system must be
calibrated after opening the spectrometer or changing a filament.
43. If the system fails calibration, adjust the filament emission current as follows:
❑ If gain is too low, there is too much signal; reduce emission current (by 0.1 - 0.2mA),
then calibrate again.
❑ If gain is too high, there is too little signal; increase emission, then calibrate again.
The permitted emission current range is from 0.5 to 1.5 mA.
When calibration is successful, filament replacement is complete.
14-12
VS Series Helium Mass Spectrometer Leak Detector
Section 15. Flapper Box Installation
15.1 Installation Procedure
Equipment Required:
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
❑ Flapper box kit, P/N VSFLDFBCP for leak detectors with Compression Port adapter
installed.
NOTE
To operate the Flapper Box the leak detector must have CPU
software LD02.11 or greater. If correct software is not installed,
contact Agilent Customer Service.
For clarity, some items have been omitted from views.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 15-1) and detach the rear plastic cover from the unit.
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 15-1).
Figure 15-1
Rear and Front Cover Screws
15-1
D RA F T 6/ 4/ 11
❑ Flapper box kit, P/N VSFLDFBNW25 for leak detectors with NW-25 Flange
VS Series Helium Mass Spectrometer Leak Detector
WARNING
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
5. Remove the two wing nuts holding the plastic shield around the leak detector power
input area and remove the shield (Figure 15-2).
D RA F T 6/ 4/ 11
6. Remove the fan assembly by loosening the M4 socket head cap screw (Figure 15-2).
Shield
Figure 15-2
CAUTION
Plastic Shield
Use proper ESD safety techniques when handling a PCB card.
7. Remove the two I/O board Phillips head screws w/lock washers and remove the I/O
board that is installed in the unit (Figure 15-3).
8. Slide the I/O assembly back to allow room to connect the flapper box wiring harness to
the I/O board.
M3 Phillips
Head Screws
Figure 15-3
15-2
I/O Assembly with Screws
VS Series Helium Mass Spectrometer Leak Detector
9. Connect the P102 Molex receptacle on the flapper box wire harness to the J102
connector on the I/O board (Figure 15-4).
I/O J102
Figure 15-4
I/O Bracket
10. Slide the I/O assembly into the leak detector and ensure that the I/O bracket engages the
clip at the base of the leak detector (Figure 15-5).
Figure 15-5
D RA F T 6/ 4/ 11
11. Reinstall the two I/O board Philips head screws w/lock washers (Figure 15-3 on
page 15-2).
I/O Clip
12. Remove M4 screw (Figure 15-6) and open front panel to provide required room for
installing the Flapper Box Wiring harness.
M-4 Screw
Figure 15-6
Front Panel Removal
15-3
VS Series Helium Mass Spectrometer Leak Detector
13. Remove the M4 screws (Figure 15-7) and gently lean the PCB Mounting Tray forward to
gain access to the Flapper Box Wiring Harness.
M-4 Screws
Figure 15-7
PCB Mounting Tray
D RA F T 6/ 4/ 11
14. Install the Flapper Box Wiring Harness, as shown (Figure 15-8), utilizing the top two
wire clips, only use bottom wire clip, if accessible.
Figure 15-8
Flapper Box Wiring Harness Layout
15. Reinstall the M4 screws (Figure 15-7).
16. Reinstall the M4 screw (Figure 15-6 on page 15-3).
17. Reinstall the (Figure 15-2 on page 15-2):
❑ Fan assembly by tightening the M4 socket head screw.
❑ The plastic shield using the two wing nuts.
18. Attach the front cover and secure to the frame using existing hardware.
15-4
VS Series Helium Mass Spectrometer Leak Detector
19. Carefully locate the Flapper Box Wire Harness leads between the front cover and the
test port (Figure 15-9).
20. Attach the rear cover and secure the unit using existing hardware.
Flapper Box
Wire Harness
Leads
Figure 15-9
Front Cover Assembly
❑ P/N VSFLDFBNW25: Utilizing the NW-25 Centering Ring and Quick Clamp
(Figure 15-10).
❑ P/N VSFLDFBCP: Inserting the Flapper Box into leak detector's Compression Port
Adapter and tighten.
22. Connect the leads of the Flapper Box to the leads of the Wire Harness: Red to Red and
Black to Black.
Figure 15-10
Flapper Box Assembly, NW25 Installation
23. Connect the power cord and power up the unit.
24. Watch the home screen to verify that the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes.
15-5
D RA F T 6/ 4/ 11
21. Install the flapper box for:
VS Series Helium Mass Spectrometer Leak Detector
Refer to the operator's manual if the system fails to reach the System Ready mode.
25. Manually close the flapper box, the leak detector should transfer into test.
26. After 30 seconds verify that the vent button is operational (the flapper box should open).
D RA F T 6/ 4/ 11
27. Agilent recommends a full calibration of the unit prior to leak test operations.
15-6
VS Series Helium Mass Spectrometer Leak Detector
Section 16. I/O Card Installation
16.1 Installation Procedure
16.1.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
❑ M3 Phillips Head Screw Driver
WARNING
NOTE
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
Prior to I/O installation, ensure that the software revision is 2.0
by navigating from the Home screen menu to System
Information. If not, contact Agilent customer services, see the
back cover of this manual for a listing of our sales and service
offices.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 16-1 on page 16-2) and detach the rear plastic cover from the unit.
16-1
D RA F T 6/ 4/ 11
For clarity, some items have been omitted from views.
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
Figure 16-1
Rear and Front Cover Screws
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 16-1).
5. Remove the two back plate Phillips head screws w/lock washers (Figure 16-2) and pull
the blank back plate off and discard.
Figure 16-2
16-2
Back Plate with Screws
VS Series Helium Mass Spectrometer Leak Detector
6. Remove the two wing nuts holding the plastic shield around the power input area inside
the leak detector and remove the shield (Figure 16-3).
Plastic Shield
7. Remove the fan assembly by loosening the M4 socket head cap screw (Figure 16-3).
CAUTION
Use proper ESD safety techniques when performing a PCB card
install.
8. Connect the I/O cable end labeled P100B, provided with the kit, to J100 (marked
Yellow) on the mother board PCB (Figure 16-4). Then run the cable along the base of
the leak detector to the I/O board location.
Figure 16-4
I/O Cable to Mother Board
16-3
D RA F T 6/ 4/ 11
Figure 16-3
VS Series Helium Mass Spectrometer Leak Detector
9. Rotate the I/O bracket and board to approximately a 30° angle and insert into the leak
detector (Figure 16-5).
D RA F T 6/ 4/ 11
Figure 16-5
I/O Bracket Installation
10. Connect the (Figure 16-6):
❑ Opposite end of the cable labeled P1 to J100 on the I/O board.
❑ 24 V plug labeled P101, which is tie rapped at the base of the leak detector, to the
connector labeled J101 on the I/O board.
❑ 24 V lug as a ground to one of the bracket screws.
Figure 16-6
16-4
I/O Bracket
VS Series Helium Mass Spectrometer Leak Detector
Figure 16-7
D RA F T 6/ 4/ 11
11. Slide the I/O assembly into the leak detector and ensure that the I/O bracket engages the
clip at the base of the leak detector (Figure 16-7).
I/O Clip
12. Reinstall the two back plate Phillips head screws w/lock washers (Figure 16-2 on
page 16-2).
13. Reinstall the (Figure 16-3 on page 16-3):
❑ Fan assembly by tightening the M4 socket head screw.
❑ Reinstall the plastic shield using the two wing nuts.
14. Attach the front cover and secure to the frame using existing hardware.
15. Attach the rear cover and secure to the frame using existing hardware.
16. Connect the power cord and power up the unit.
17. Watch the home screen to verify the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes. Refer to the operator's manual
if the system fails to reach the System Ready mode.
18. Agilent recommends a full calibration of the unit prior to leak test operations.
19. Connect operators 25-pin cable to the I/O connector and verify the connection. Refer to
Section A.3 of the users manual for the I/O pin connector signals.
16-5
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 17. Wireless Remote Base Unit
Installation
17.1 Installation Procedure
17.1.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
❑ M3 Phillips Head Screw Driver
❑ Adjustable Wrench
WARNING
NOTE
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
Prior to I/O installation, ensure that the software revision is 2.0
by navigating from the Home screen menu to System
Information. If not, contact Agilent customer services, see the
back cover of this manual for a listing of our sales and service
offices.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 17-1) and detach the rear plastic cover from the unit.
17-1
D RA F T 6/ 4/ 11
For clarity, some items have been omitted from views.
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
Figure 17-1
Rear and Front Cover Screws
4. Remove the four screws holding the front plastic cover and detach the cover from the
unit. Two screws are situated at the front of the unit (not shown) and two screws are
positioned inside the unit (Figure 17-1).
5. Disconnect the fan connector from the 24 V cable harness.
6. Detach the fan assembly by removing the M4 socket head cap screw and loosening the
two wing nuts (Figure 17-2). Place the fan assembly on a flat surface on its back.
Figure 17-2
Fan Assembly and Socket Head Cap Screw
7. Hand tighten the antenna to the fan bracket, and then apply a ½ turn using an
adjustable wrench (Figure 17-3).
17-2
VS Series Helium Mass Spectrometer Leak Detector
CAUTION
Wireless Antenna
Use proper ESD safety techniques when performing a PCB card
install.
8. Place the wireless board assembly on the four fan bracket standoffs. Note the correct
orientation of the wireless base board P300 connector (Figure 17-4).
Figure 17-4
Base Board Assembly with Posts
17-3
D RA F T 6/ 4/ 11
Figure 17-3
VS Series Helium Mass Spectrometer Leak Detector
9. Connect the antenna cable to the MMCX jack (Color: gold) on the wireless base board.
10. Secure the wireless base board to the fan bracket using the four M3 Phillips screws
provided with the kit.
11. Unfurl the black/red wire (P1-RF) with the 24 V three-pin connector and the ground lug,
which is tie rapped at the base of the leak detector, and:
❑ Plug the 24 V connector labeled P1-RF into the three-pin connector on the wireless
board.
❑ Attach the 24 V ground lug to one of the bracket screws.
❑ Reinstall the fan assembly by tightening the M4 socket head cap screw and the two
wing nuts (Figure 17-2 on page 17-2).
12. Connect the RS-232 cable end labeled J300-1 to P300 on the wireless board using its
two slotted screws (Figure 17-4 on page 17-3).
13. Dress the RS-232 cable through the leak detector to the front panel display.
D RA F T 6/ 4/ 11
14. Remove the M6 screw and washer from the front panel display and detach the display
(Figure 17-5).
Figure 17-5
Front Panel Display
15. Connect the RS-232 cable end labeled J300-2 to P300-COM2 on the front panel display
board using its two slotted screws (Figure 17-5).
16. Reattach the display by inserting the tabs into their slotted positions and secure using
the M6 screw and washer.
17. Attach the front cover and secure to the frame using existing hardware.
17-4
VS Series Helium Mass Spectrometer Leak Detector
18. Rotate the antenna to its horizontal locked position.
19. Guide the antenna through its location hole in the rear cover. Then secure the rear cover
to the frame using existing hardware.
Figure 17-6
Label
21. Connect the power cord and power up the unit.
22. Watch the home screen to verify the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.
23. After installation refer to the VS Series leak detector manual (P/N # 699909942) Section
3, for leak detector activation of the wireless remote.
24. Refer to the wireless remote user's manual (P/N # 699909945) for operational
instructions.
25. Agilent recommends a full calibration of the unit prior to leak test operations.
17-5
D RA F T 6/ 4/ 11
20. Attach the label to the rear cover in location shown (Figure 17-6).
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 18. Scroll Pump Replacement
(PD03 only)
18.1 Installation Procedure
18.1.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
❑ M3 Phillips Head Screw Driver
WARNING
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 18-1) and detach the rear plastic cover from the unit.
Figure 18-1
Rear and Front Cover Screws
18-1
D RA F T 6/ 4/ 11
For clarity, some items have been omitted from views.
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
4. Disconnect the NW 16 connection (Figure 18-2).
Figure 18-2
NW 16 Connection
5. Tilt the unit and unscrew the four connections underneath that hold the pump
(Figure 18-3). Place the unit flat again and remove the whole pump assembly.
Figure 18-3
18-2
Scroll Pump Mounting Connections
VS Series Helium Mass Spectrometer Leak Detector
Figure 18-4
D RA F T 6/ 4/ 11
6. Disconnect the exhaust hose (Figure 18-4).
Exhaust Hose
7. Disconnect the diaphragm, fan and motor power connectors.
8. Remove the fan assembly bracket and lay it aside (Figure 18-5).
Figure 18-5
Fan Assembly Mounts
18-3
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
9. Unscrew the four M2 screws and remove the manifold block (Figure 18-6).
Figure 18-6
Manifold Block Connections
10. Remove the exhaust valve unit. See Section 21 “Exhaust Valve Replacement (PD03
only)” on page 21-1.
11. Remove the diaphragm pump. See Section 22 “Diaphragm Pump Replacement (PD03
only)” on page 22-1.
12. Mount the new scroll pump using the four connections seen in Figure 18-3 on
page 18-2.
13. Reattach the diaphragm pump. See Section 22 “Diaphragm Pump Replacement (PD03
only)” on page 22-1.
14. Reattach the exhust valve. See Section 21 “Exhaust Valve Replacement (PD03 only)” on
page 21-1.
15. Reattach the four M2 screws to remount the manifold block.
16. Reattach the fan assembly.
17. Reconnect the diaphragm, fan and motor power connectors.
18. Reconnect the exhaust hose.
19. Attach the front cover and secure to the frame using existing hardware.
20. Connect the power cord and power up the unit.
21. Watch the home screen to verify the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.
22. Agilent recommends a full calibration of the unit prior to leak test operations.
18-4
VS Series Helium Mass Spectrometer Leak Detector
Section 19. Scroll Pump Fan Replacement
(PD03 only)
19.1 Installation Procedure
19.1.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
❑ M3 Phillips Head Screw Driver
WARNING
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 19-1) and detach the rear plastic cover from the unit.
Figure 19-1
Rear and Front Cover Screws
19-1
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For clarity, some items have been omitted from views.
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
4. Remove the four M3 screws and remove the fan (Figure 19-2).
Figure 19-2
Fan Screws
5. Run the black/red connector through the slit (Figure 19-3). Where is the power
connection?
Figure 19-3
19-2
Connector Routing
VS Series Helium Mass Spectrometer Leak Detector
6. Install the new fan using the reserved M3 screws.
7. Attach the front cover and secure to the frame using existing hardware.
8. Attach the rear cover and secure to the unit using existing hardware.
9. Reinstall the power connector.
10. Connect the power cord and power up the unit.
11. Watch the home screen to verify the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.
D RA F T 6/ 4/ 11
12. Agilent recommends a full calibration of the unit prior to leak test operations.
19-3
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 20. Clippard Valve Replacement
(PD03 only)
20.1 Installation Procedure
20.1.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
❑ M3 Phillips Head Screw Driver
WARNING
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 20-1) and detach the rear plastic cover from the unit.
Figure 20-1
Rear and Front Cover Screws
20-1
D RA F T 6/ 4/ 11
For clarity, some items have been omitted from views.
VS Series Helium Mass Spectrometer Leak Detector
4. Disconnect the two spade connectors (red arrow in Figure 20-2):
❑ Red/black
D RA F T 6/ 4/ 11
❑ Black/black
Figure 20-2
Spade Connectors
5. Use an Allen wrench to loosen valve from housing (blue arrow in Figure 20-2).
6. Mount the new valve and tighten.
7. Reconnect the two spade connections.
8. Attach the front cover and secure to the frame using existing hardware.
9. Attach the rear cover and secure to the unit using existing hardware.
10. Connect the power cord and power up the unit.
11. Watch the home screen to verify the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.
20-2
VS Series Helium Mass Spectrometer Leak Detector
Section 21. Exhaust Valve Replacement
(PD03 only)
21.1 Installation Procedure
21.1.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
❑ M3 Phillips Head Screw Driver
WARNING
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 21-1) and detach the rear plastic cover from the unit.
Figure 21-1
Rear and Front Cover Screws
21-1
D RA F T 6/ 4/ 11
For clarity, some items have been omitted from views.
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
4. Unscrew the black cover using the Philips head screw, pull up the cover and disconnect
(red arrow in Figure 21-2)
Figure 21-2
Unit Screws
5. Unscrew the two Philips head screws (blue arrow in Figure 21-2) and pull the complete
black/grey body up and out.
6. Mount new unit and replace the three Philips screws.
7. Attach the front cover and secure to the frame using existing hardware.
8. Attach the rear cover and secure to the unit using existing hardware.
9. Connect the power cord and power up the unit.
10. Watch the home screen to verify the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.
11. Agilent recommends a full calibration of the unit prior to leak test operations.
21-2
VS Series Helium Mass Spectrometer Leak Detector
Section 22. Diaphragm Pump Replacement
(PD03 only)
22.1 Installation Procedure
22.1.1 Equipment Required
❑ Extended Length M5 Allen Wrench
❑ Metric Allen Wrench Set
❑ M3 Phillips Head Screw Driver
❑ Adjustable Wrench
WARNING
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 22-1) and detach the rear plastic cover from the unit.
Figure 22-1
Rear and Front Cover Screws
22-1
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For clarity, some items have been omitted from views.
VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
4. Disconnect the R3359-301 Molex connector to the Clippard valve (Figure 22-2).
Figure 22-2
Molex Connector
5. Remove the ground connection to the system body (red arrow in Figure 22-3).
Figure 22-3
Ground Connection
6. Disconnect the two M4 screws mounting the plate to the scroll pump assembly (blue
arrow in Figure 22-3).
22-2
VS Series Helium Mass Spectrometer Leak Detector
Figure 22-4
D RA F T 6/ 4/ 11
7. Remove the diaphragm pump assembly, turn it over and unscrew the four M2 screw
holding the pump to the plate (Figure 22-4 - two shown).
Pump to Plate Connections
8. Reattach the new pump to the plate.
9. Reattach the plate to the scroll pump.
10. Reattach the ground and Molex connections.
11. Attach the front cover and secure to the frame using existing hardware.
12. Attach the rear cover and secure to the unit using existing hardware.
13. Connect the power cord and power up the unit.
14. Watch the home screen to verify the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.
15. Agilent recommends a full calibration of the unit prior to leak test operations.
22-3
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VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 23. Diaphragm and Seal Replacement
(PD03 only)
23.1 Installation Procedure
23.1.1 Equipment Required
❑ Extended Length M5 Allen Wrench ❑ Metric Allen Wrench Set
❑ M3 Phillips Head Screw Driver
❑ Phillips Head Screw Driver, #1
❑ Felt Tip Pen
WARNING
Disconnect power from the unit before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear
plastic cover (Figure 23-1) and detach the rear plastic cover from the unit.
Figure 23-1
Rear and Front Cover Screws
23-1
D RA F T 6/ 4/ 11
For clarity, some items have been omitted from views.
VS Series Helium Mass Spectrometer Leak Detector
Always change the valve plates, diaphragm and sealing rings at
the same time.
NOTE
D RA F T 6/ 4/ 11
4. Remove the pump head by (Figure 23-2):
Figure 23-2
Pump Head Removal
a. Making a mark (M) on the head plate (3), intermediate plate (2), and housing (1) with
a felt-tip pen.
b. Undoing the 4 screws (4) in the head plate and lifting the head plate, with the
intermediate plate, off the pump housing.
c. For models with:
❑ DC motors (no cooling fan): Removing the cover (6) from the pump housing (1) by
inserting a screwdriver into the slots on the sides, and prying the cover off (with care
the adhesive gasket between cover and housing may be reused).
❑ No fan: Reference is made to turning or holding the cooling fan, the necessary
operations must be carried out by turning or holding the counterweight (16).
5. Change the diaphragm by (see Figure 23-2):
a. Turning the fan to bring the structured diaphragm (9) to top dead center.
b. Lifting the edge of the diaphragm and, gripping it on opposite sides, unscrewing it
by turning counterclockwise.
23-2
VS Series Helium Mass Spectrometer Leak Detector
CAUTION
Ensure that the disc s spring (12) and diaphragm spacers (11) on
the threaded portion of the diaphragm do not fall into the
housing.
c. Taking the disc spring (12), diaphragm spacer(s) (11), and diaphragm support (10) off
the threaded portion of the diaphragm and retaining them.
d. Ensuring that all parts are free from dirt and clean them, if necessary.
e. Placing the diaphragm support, diaphragm spacer(s), and disc spring, in that order,
on the thread part of the new diaphragm. The concave side of the disc spring must
be towards the diaphragm.
f.
Turning the fan until the connecting rod (13) is at top dead center.
g. Screwing the diaphragm, complete with diaphragm support, diaphragm spacer(s),
and disc spring, into the connecting rod (clockwise) and tightening it by hand.
a. Separating the head plate (3) from the intermediate plate (2).
b. Removing the valve plates (7) and sealing rings (8) from the intermediate plate.
c. Checking that the valve seats in the head plate and the intermediate plate are clean.
If scratches, distortion, or corrosion are evident, replace that part.
d. Laying the new valve plates in the intermediate plate recesses. The valve plates for
suction and pressure sides are identical, as are upper and lower sides of the plates.
e. Ensuring the valve plates are not deformed by moving them gently sideways in their
recesses.
f.
Laying the sealing rings on the intermediate plate.
7. Refit the pump heads by (see Figure 23-2 on page 23-2):
a. Turning the fan to bring the diaphragm to top dead center.
b. Placing the intermediate plate (2), with valve plates (7), sealing rings (8), and head
plate (3) on the housing, in the position indicated by the (M).
c. Checking that the head plate is centered by moving it gently sideways.
d. Gently tightening the screws (4), evenly and diagonally.
e. Turning the fan to check that the pump rotates freely.
f.
Turning the fan again to bring the diaphragm to top dead center.
g. Tightening the screws (4).
h. For DC versions (no cooling fan): Reattaching the cover (6) to housing (1).
8. Attach the front cover and secure to the frame using existing hardware.
9. Attach the rear cover and secure to the unit using existing hardware.
23-3
D RA F T 6/ 4/ 11
6. Change the valve plates by (see Figure 23-2 on page 23-2):
VS Series Helium Mass Spectrometer Leak Detector
10. Connect the power cord and power up the unit.
11. Watch the home screen to verify the Spectube Pressure Wait message progresses to
Stabilization Wait and System Ready within ten minutes.
D RA F T 6/ 4/ 11
Refer to the operator's manual if the system fails to reach the System Ready mode.
23-4
VS Series Helium Mass Spectrometer Leak Detector
Section 24. Manual Tuning, Calibration,
Maintenance Screen and Fore Pump
Set-Up
24.1 Manual Tuning
1. Press Set-Up on the Menu screen to open the Set-Up screen.
Many of the values for the parameters included on the Set-Up
sub-screens are calculated when the leak detector performs
functions such as Calibrate and tuning. Changing these values
can cause unreliable test results.
2. Press Manual Tuning on the Set-Up screen and the Manual Spectrometer Tuning screen
appears (Figure 24-1).
Use this screen to manually adjust the parameters of the ion source in the
spectrometer for a maximum helium signal.
0
1
2
3
4
5
6
7
8
9
10
MANUAL TUNING
Select a value
to change it.
Accesses the
keypad to set Gain.
Select the
filament for use.
EMISSION
0.963
ION
258.6
Increments/
decrements
the selected value
OK
2.0
GAIN:
CANCEL
OFFSET (µ
µV): 1126/9108
FILAMENT
1
2
Figure 24-1
DONE
Manual Tuning
24-1
D RA F T 6/ 4/ 11
The items configured using the Set-Up sub-screens significantly
affect the performance of the leak detector and must only be
accessed by trained service personnel.
CAUTION
VS Series Helium Mass Spectrometer Leak Detector
Emission Current
Displays the value of the existing Emission current of the spectrometer Ion Source and allows for emission current adjustment. The
emission current parameter tunes the leak detector, maximizing the
leak detector output for a peak helium signal.
Typical Emission current values range from .5 mA to 1.0 mA.
Ion Voltage
Displays the current ion voltage value of the spectrometer Ion
Source. The ion voltage parameter tunes the leak detector, maximizing the leak detector output for a peak helium signal.
Typical ion voltage values range from 250 VDC to 270 VDC. The
ion voltage value is automatically adjusted and set during the full
calibration routine.
Filament
Switches between Filament 1 and 2. The filament selection can be
performed manually, but occurs automatically if the current operating filament burns out. A calibration routine is recommended every
time the operating filament is changed.
D RA F T 6/ 4/ 11
The change appears on the Home and System Information screens
and C flashes on the Home screen to indicate that calibration is
required.
NOTE
Gain
Replace the filament inside the spectrometer as soon as it is
convenient after the spare filament has been put into use.
Displays the current value of the Gain of the system. Gain is used
to scale the indicated value of a known leak to agree with a known
correct value. The gain parameter is adjusted after the leak detector
has been tuned to helium. It is automatically set by the Calibrate
Procedure. Use the value button (next to Gain) to change the Gain
value.
NOTE
Changing Gain changes Zero by the same percentage, which
can affect system transfer points.
Typical gain values range from 0.8 to 3.0. The higher the gain,
the more noise shows up in the least sensitive range.
To change a manual tuning parameter:
1. Press the desired parameter.
When you press the box containing the desired variable, a highlighted indicator appears
to the right of the numbers.
24-2
VS Series Helium Mass Spectrometer Leak Detector
NOTE
Once a change of value is initiated, you can press Cancel to
exit the screen and revert to the original value
2. Press the Up or Down arrow to peak the helium signal.
NOTE
Do not press the ESC box before pressing the OK box. This
causes the selected parameter to revert to its previously stored
value.
3. Press OK to accept the changes and to store the new parameter value in the leak
detector memory.
4. Press Done to exit the screen and return to the previous menu screen.
1. Place the system in TEST mode.
2. Navigate to the Control Panel and turn the STD LEAK ON.
3. Navigate to the Calibration Set-Up screen and write down the INTERNAL CALIBRATED
LEAK value. This value is temperature compensated.
4. Navigate to the Manual Tuning screen and:
❑
Set the GAIN to 1.0.
❑
Set the EMISSION to between 0.5000 and 0.6000.
❑
Adjust the ION value up or down to attain the maximum value. Ideally, the ION
value should be between 250 and 270.
❑
Adjust the EMISSION to attain the maximum value. Ideally, the EMISSION value
should be between 0.500 and 1.000.
❑
Set the GAIN so that the leak rate on the screen matches the value of the internal
leak you wrote down.
5. Navigate to the CONTROL PANEL and turn the STD LEAK OFF.
24-3
D RA F T 6/ 4/ 11
To manually tune the leak detector:
VS Series Helium Mass Spectrometer Leak Detector
24.2 Gauge Calibration
1. Press Set-Up on the Menu screen to open the Set-Up screen.
The items configured using the Set-Up sub-screens significantly
affect the performance of the leak detector and must only be
accessed by trained service personnel.
CAUTION
Many of the values for the parameters included on the Set-Up
sub-screens are calculated when the leak detector performs
functions such as Calibrate and tuning. Changing these values
can cause unreliable test results.
2. Press Gauge Calibration on the Set-Up screen and the Gauge Calibration screen
appears (Figure 24-2).
Use this screen to perform a calibration on the test port thermocouple gauge.
D RA F T 6/ 4/ 11
Calibrate the thermocouple gauge for the most accurate operation. To calibrate the gauge:
1. Set a calibration point at atmosphere.
2. Set a calibration point at a low vacuum level (<= 1E-4 Torr).
-10
0
1
2
3
4
5
6
7
8
9
10
GAUGE CALIBRATION
TEST PORT VACUUM
Press to activate the
calibration type.
TEST PORT ATM
CAL OK indicates
valid calibrations.
CAL OK
CAL FAILED
TEST PORT PRESSURE: <1.0E-03 TORR
Display only.
CAL FAILED
indicates a failed
cal.
Changes during
the procedure.
. 1.0E-06 TORR
SPECTROMETER PRESSURE:
DONE
Figure 24-2
Gauge Calibration
Test Port Vacuum
Calibrates the thermocouple gauge zero value. Do this at or below
1E-4 Torr.
Test Port ATM
Sets the thermocouple atmospheric value. Perform this operation
only when the test port is at atmosphere.
Test Port Pressure and The Test Port Pressure and the Spectrometer Pressure values appear
Spectrometer Pressure on this screen for reference.
24-4
VS Series Helium Mass Spectrometer Leak Detector
Test Port Pressure
Gauge Calibration
Procedure
Calibrates the test port pressure thermocouple gauge. Perform both
the Vacuum and Atmospheric Calibration procedures in the order
written, TEST PORT VACUUM and the TEST PORT ATM.
NOTE
Display of <1.0E-03 indicates the pressure is less than the
lowest displayable pressure of the TC gauge which is 1.0E-03.
24.2.1 Vacuum (Low Pressure) Calibration
To perform Vacuum Calibration:
1. Verify that the leak detector is in the System Ready condition and that a test port cap is
in place.
3. Press Test and verify that the leak detector transfers to Fine Test mode,
displaying 10−9 atm cc/sec or lower.
4. Wait approximately 5 minutes for the vacuum system pressure to stabilize.
5. Press Test Port Vacuum.
You will receive one of the following messages:
❑
A Cal OK indicator, to the right of the Test Port TC Zero box confirms that the
calibration was successful.
❑
A Failed message indicates that the calibration was not successful.
A Failed message results from a defective or contaminated thermocouple gauge, or
the fact that the actual pressure was not at or near zero. Verify the latter case using an
appropriate vacuum gauge installed on the test port.
6. Press Done to leave the screen and return to the previous menu.
24.2.2 Atmospheric Calibration
To perform Atmospheric Calibration:
1. If the system is not already in Vent mode, press VENT.
2. Wait approximately ten seconds for the test port pressure to stabilize, then move to the
Gauge Calibration screen (Figure 24-2 on page 24-4).
3. Press Test Port Atm.
You will receive one of the following messages:
❑
A Cal OK indication, to the right of the Test Port TC Atm box, confirms that the
calibration was successful.
24-5
D RA F T 6/ 4/ 11
2. If the system is not already in Vent mode, press VENT.
VS Series Helium Mass Spectrometer Leak Detector
❑
A Failed message indicates that the calibration was not successful. This is the result
of a defective or contaminated thermocouple gauge, or that the actual pressure was
not at or near atmosphere. Verify the latter case using an appropriate vacuum gauge
installed on the test port.
4. Press Done to leave the screen and return to the previous menu.
24.3 Maintenance Screen
Use this screen to access the Internal Calibration Leak screen.
1. Press Set-Up on the Menu screen to open the Set-Up screen.
The items configured using the Set-Up sub-screens significantly
affect the performance of the leak detector and must only be
accessed by trained service personnel.
CAUTION
D RA F T 6/ 4/ 11
Many of the values for the parameters included on the Set-Up
sub-screens are calculated when the leak detector performs
functions such as Calibrate and tuning. Changing these values
can cause unreliable test results.
2. Press Maintenance on the Set-Up screen and the Maintenance screen appears
(Figure 24-3).
-10
0
1
2
3
4
5
6
7
8
9
10
MAINTENANCE
DATE & TIME
10/27/2005 04:16 PM
PASSWORD
INTERNAL
CALIBRATED LEAK
✔
Accesses the
Internal Calibration
Leak screen.
✕
CHANGE PASSWORD
DONE
Figure 24-3
Maintenance
3. Press Internal Calibrated Leak.
The Internal Calibrated Leak screen appears (Figure 24-4).
From this screen you can also access the Cal Leak Expiration Set-Up (Section 24.3.1 “Cal
Leak Expiration Set-Up” on page 24-8).
24-6
VS Series Helium Mass Spectrometer Leak Detector
-10
0
1
2
3
4
5
6
7
8
9
10
INTERNAL CALIBRATION LEAK
INTERNAL LEAK VALUE
1.4E-07
TEMPERATURE
24 ± -3
°C
CAL LEAK EXPIRATION
08/02/2006
Accesses the
Internal Leak Value
keypad.
Sets the temp.
at which the leak
was calibrated.
Accesses the
Cal Leak Expiration
Set-Up screen.
DONE
Internal Calibrated Leak
To use this screen:
1. Press a button to activate its field.
A keypad appears.
2. Enter the required values as shown on the calibrated leak label.
3. Repeat step 1 and 2 for each desired item.
4. Press Done to exit the screen.
The value of the internal calibrated leak as shown on the CALIBRATION SET-UP screen is
compensated for temperature using the temperature sensor located on the calibrated leak.
The calibrated leak is not compensated for temperature if any of the following conditions
exist:
❑
The temperature sensor on the calibrated leak fails or there is a cable connection
problem.
❑
The temperature sensor reading is out of the operating range. The operating
temperature range is from 10.0 to 45.0° C (50 to 113° F).
❑
The internal calibrated leak is not a E-7 or E-8 range leak.
24-7
D RA F T 6/ 4/ 11
Figure 24-4
VS Series Helium Mass Spectrometer Leak Detector
24.3.1 Cal Leak Expiration Set-Up
❑
Press the button next to the Cal Leak Expiration text on the Internal Calibrated Leak
screen.
The Cal Leak Expiration Set-Up screen appears (Figure 24-5).
The Cal Leak Expiration is usually one year from leak installation. When the
calibrated leak expires, a message appears on the Home screen.
-00
0
1
2
3
4
5
6
7
8
9
10
Accesses the
Day keypad.
CAL LEAK EXPIRATION SET-UP
Accesses the
Year keypad.
Activates the field.
Use the arrows to
set the value
2006
YEAR
AUG
MONTH
DAY
02
D RA F T 6/ 4/ 11
OK
CANCEL
Figure 24-5
SET
Cal Leak Expiration Set-Up
To use this screen:
1. Press the button next to Year or Month and a keypad appears to set the value.
2. Press Set for each item configured.
3. Press the button next to Day, use the up and down arrows to set the value and press Set.
4. Press OK to exit the screen.
24-8
VS Series Helium Mass Spectrometer Leak Detector
24.4 Fore Pump Set-Up
1. Press Set-Up on the Menu screen to open the Set-Up screen.
The items configured using the Set-Up sub-screens significantly
affect the performance of the leak detector and must only be
accessed by trained service personnel.
CAUTION
Many of the values for the parameters included on the Set-Up
sub-screens are calculated when the leak detector performs
functions such as Calibrate and tuning. Changing these values
can cause unreliable test results.
2. Press Fore Pump on the Maintenance screen.
The Fore Pump Set-Up screen appears (Figure 24-6). Use this screen to select
fore pump speed and type.
C
1
2
3
4
5
6
7
8
9
10
FORE PUMP
DATE SERVICED
11/02/2005
OPERATING HOURS SINCE SERVICED:
Displays pump type:
oil sealed or dry.
135
Opens Date
Serviced screen.
Displays hours
since service.
PUMP TYPE: OIL SEALED
DONE
DONE
Figure 24-6
Fore Pump Set-Up
24-9
D RA F T 6/ 4/ 11
0
VS Series Helium Mass Spectrometer Leak Detector
24.4.1 Date Serviced
❑
Press the date on the Fore Pump screen and the Date Serviced screen appears
(Figure 24-7).
0
1
2
3
4
5
6
7
8
9
10
DATE SERVICED
Press to open the
keypad.
Press to activate
field.
YEAR
MONTH
2005
11
DAY
Press to open the
keypad.
Press to increment
Month.
02
OK
D RA F T 6/ 4/ 11
CANCEL
Figure 24-7
SET
Date Serviced
To use this screen:
1. Press the button next to Year or Day and a keypad appears to set the value.
2. Press Set for each item configured.
3. Press the button next to Month, use the up and down arrows to set the value and press
Set.
4. Press OK to exit the screen.
24-10
VS Series Helium Mass Spectrometer Leak Detector
Section 25.Maintenance
NOTE
All service must be performed by trained personnel only.
This maintenance section covers daily and as-required maintenance. It does not cover
overhaul of the entire vacuum system. Refer to the VS Series Helium Mass Spectrometer
Leak Detectors Field Service Component Replacement Manual for annual and preventive
maintenance procedures.
If your leak detector requires service that is not covered in this section, contact Agilent
Customer Service. See the back cover of this manual for a listing of our sales and service
offices.
Important Reminders
In addition to the safety notes at the beginning of this manual, heed the following notes,
cautions, and warnings when performing maintenance.
WARNING
Disconnect power from the leak detector before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
The VS Series leak detector has a battery backed clock which
uses a primary (non-rechargeable) lithium coin battery from
Panasonic, P/N BR2477A/HB (3.0V, 1Ah) that is permanently
soldered onto a Motherboard PCB. Never replace this battery
with a rechargeable type. Use only the primary type of lithium
battery. Only a qualified technician should replace any battery.
The battery has a life of 7 to 10 years.
The VS Series leak detector uses fuses and circuit breakers that
are not operator replaceable. Only a qualified technician
should replace any fuse.
Information about the fuses and circuit breakers is given in
Table 25-3 on page 25-4.
25-1
D RA F T 6/ 4/ 11
A mass spectrometer leak detector requires periodic maintenance to ensure continued
reliable operation. After prolonged use, the leak detector accumulates contaminants from
even the cleanest of products tested that eventually impair operation. A thorough
disassembly and cleaning of the entire vacuum system, which includes the valve block and
spectrometer, restores normal operation. For heavy production use, more frequent
overhauls may be needed. In most cases, maintenance personnel do this work, but Agilent
can also do this work under the terms of a service contract.
VS Series Helium Mass Spectrometer Leak Detector
Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are
some techniques more important in leak detector servicing than in general vacuum work:
CAUTION
Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox®. Alconox is
not compatible with aluminum and will cause damage.
NOTE
Agilent does not recommend the use of vacuum grease.
Vacuum grease absorbs helium tracer gas and releases this
slowly resulting in helium background during leak test
operations. If it must be used, use it sparingly and avoid
silicone types. Apiezon® L grease is recommended (Agilent Part
No. 695400004).
When removing, checking or replacing O-rings:
D RA F T 6/ 4/ 11
CAUTION
Remove O-rings carefully with your fingers. Do not use metal
tools for this task. This prevents scratching of any sealing
surfaces.
Wipe all O-rings clean with a lint-free cloth before installation
to ensure that no foreign matter is present to impair the seal.
Do not use grease or any other substances on O-rings or metal
seals that will come in contact with the spectrometer.
Do not use alcohol, methanol or other solvents on O-rings as
this causes deterioration and reduces their ability to hold a
vacuum.
NOTE
NOTE
25-2
If applicable, apply a small amount of Apiezon L grease and
wipe the O-rings shiny dry.
Due to the effective cleaning nature of VacuSolv solvent and
its residue-free properties, Agilent’ Component and
Spectrometer Cleaning Kit (Part Number 670029096), used in
accordance with the kit instructions, is recommended for
cleaning spectrometer components. The kit can also be used for
fine cleaning of other parts in the leak detector’s vacuum
system such as valves and fittings. No rinsing steps or
high-temperature drying are required following cleaning with
VacuSolv. Although appropriate precautions are advised,
VacuSolv is compatible with most materials and does not
contain toxic chemicals or CFCs (chlorofluorocarbons). Other
acceptable solvents are isopropyl alcohol (IPA) or Dow
Corning® OS-20.
VS Series Helium Mass Spectrometer Leak Detector
For simplicity, the maintenance functions in this section are grouped by recommended
frequency, as shown in Table 25-1, based on assumed daily use.
Table 25-1
Scheduled Maintenance
Description
Daily
Calibration check
12 Months
X
Recalibrate the internal calibrated leak
X
Spectrometer overhaul
X
Maintenance functions that may be required on a demand basis, such as changing a
filament after filament failure, are listed in Table 25-2.
Function
As-Required Maintenance
Most Common Symptom
Spectrometer cleaning
Loss of sensitivity, increase in background, high ion voltage
(> 300 VDC), high gain required to tune the leak detector.
Filament replacement
Filament failure (as soon as convenient after second
filament is in use).
Tuning adjustments
If calibration is not successful or if the system is calibrated
to an external leak, tuning can maximize the helium signal.
Mechanical pump fluid change
Persistent, high helium background signal. Fluid
contamination (dirty brown color indicates burnt or
contaminated fluid, milky white consistency indicates high
water vapor content in fluid).
25-3
D RA F T 6/ 4/ 11
Table 25-2
VS Series Helium Mass Spectrometer Leak Detector
Table 25-3 lists the fuses and circuit breakers.
Table 25-3
Fuses and Circuit Breakers
Type, MFG, PIN
Function
❑ Main Power Supply: 20 A, 250 V
Circuit Breaker
AC, SCHURTER
Model EF12, PIN
EF12.2196.1110.01
❑ Internal Vacuum Pump: 6 A,
250 V E-T-A, PIN
1110-Fl12-PIMl-6 A
Fuses (PCB overcurrent
protection)
1.85 A, 33 VDC, Raychem
SMD185-2
Location
Power Entry Module
Rear Panel
❑ Motherboard (RT400)
❑ Valve Driver (Fl)
❑ Ion Source (Fl)
❑ Front Panel Controller
D RA F T 6/ 4/ 11
(RT400)
5x20mm, T4A, 4A, 250V AC,
Turbo Controller (F2)
Cooper/Bussmann S505-4A
NOTE
25-4
Only a qualified technician should replace circuit breakers and
fuses. Use only circuit breakers and fuses of the same type and
rating.
VS Series Helium Mass Spectrometer Leak Detector
25.1 Daily Maintenance
25.1.1 Sensitivity Check
To perform a sensitivity check:
1. Turn on the Std Leak in the Control Panel screen.
2. Compare the value on the Home screen to the value of the known calibrated leak on the
Internal Calibrated Leak screen.
3. If the values do not match, press Calibrate on the Control Panel screen to perform an
automated calibration and then repeat step 1.
If specification is still not met, Manual Tuning may be required.
You may want to vent the leak detector test port with dry nitrogen when the system is
vented. Venting with dry nitrogen can be helpful in very humid environments to keep the
test port as dry as possible which reduces the time required to pump down the system.
To do this:
1. Turn the system power OFF.
2. Remove the power cord from the power input and remove the rear plastic from the
system.
3. Locate the filter that provides venting for the test port. It is on the valve block (on valve
V7) on the back facing surface, in the upper right hand corner.
4. Remove the filter and install a nitrogen connection into the port. The threads of the port
are a size Rc 1/8 (metric).
5. Feed the nitrogen line through the lower left hand opening of the rear panel, where the
foreline manifold or mechanical pump drain access is located.
6. Replace the rear cover and re-connect the power to the system.
NOTE
The nitrogen supply line should have a pressure relief valve
installed so that the pressure does not exceed two psi.
25-5
D RA F T 6/ 4/ 11
25.2 Dry Nitrogen Vent
VS Series Helium Mass Spectrometer Leak Detector
25.3 Spare Parts List
Table 25-4
D RA F T 6/ 4/ 11
Assembly
25-6
Leak Detector Spare Parts
Part Number
Motherboard PCB
R2101301
CPU PCB
R2361303
Ion Source PCB
R2120301
Valve Driver PCB
R2104301
24 VDC Turbo Controller PCB
9699518
Front Panel Controller PCB
R2117301
Front Panel Sub-Assembly
R2021301
AC-DC Power Supply
659077040
Spectrometer Assembly
R2041301
TC Upgrade Kit
VS531AIC
Filament Replacement
VSFLDFR
Valve Block O-ring Kit
VSFLDOV
Metal Gasket Kit
VSFLDMG
Discrete I/O PCB
R2111501
Test Port TC
F0472301
Wireless Base PCB
R2541301
VS Series Helium Mass Spectrometer Leak Detector
25.4 Leak Detector Accessory Item List
Leak Detector Accessory Item List
Assembly
Part Number
Flapper Box, NW25 Flange
L6241302
Power Probe, 10’ (NW25 Flange)
K9565306
Power Probe, 25’ (NW25 Flange)
K9565307
Spare Tip Filters for Power Probe (Qty: 10)
K9565303
Throttle Valve (NW25 Flange)
R1947301
Elite-Z Mechanical Pump Fluid
695409005
Calibrated Leak, 10-5, 10-6 (NW25 Flange)
F8473320
Calibrated Leak, 10-7 (NW25 Flange)
F8473321
Calibrated Leak, 10-8 (NW25 Flange)
F8473322
Calibrated Leak, 10-9 (NW25 Flange)
F8473323
Calibrated Leak, 10-10 (NW25 Flange)
F8473324
Oil Mist Eliminator
VSFLDME
Filter, Oil Mist Eliminator
649071021
Inlet Adapter Kit (NW25-1-1/8” Compression)
LDCOMPINADKIT
Wireless Remote Unit, Model VSLDWRC
VSLDWRC
Field Installed, I/O Assembly
VSFLDIO
Field Installed, Wireless Remote Base Unit
VSFLDWB
D RA F T 6/ 4/ 11
Table 25-5
25-7
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Section 26. Leak Checking for Reliability
Accuracy, reliability, and stability of any mass spectrometer leak detector depends upon the
leak-free integrity of its own vacuum system. Inherent helium background and its effect on
sensitivity demands elimination of all detectable leaks. If performance degrades during
operation or after some part of the vacuum system is opened for service, a methodical leak
check eliminates the possibility of a leak as the cause.
NOTE
To ensure reliable testing, the leak detector must be leak
checked before performing testing after servicing any part of the
vacuum system.
The following suggestions apply whether leak checking components, systems, or the leak
detector itself:
❑ When spraying suspected leak locations:
❑ Always apply helium sparingly.
❑ Since helium rises, start at the highest points first.
❑ Apply helium downstream from the source of a draft first, or deflect the draft until
leak checks are completed.
❑ If vent grooves exist at flanges or other assembled seals, apply helium to these points
(rather than spraying a general area) to:
❑ Obtain the most positive response.
❑ Minimize the use of helium.
❑ Save time in checking.
❑ Locate and repair large leaks before attempting to locate extremely small leaks.
❑ Limit the search to a general area of the test piece by isolation methods to shorten the
time required to locate both large and small leaks. Isolation methods include:
❑ Bagging
❑ Masking
❑ Shielding with tape, plastic film or duct seal (if applied properly)
❑ Use only enough helium to reach the leaks. Do not flood the area.
26-1
D RA F T 6/ 4/ 11
26.1 General Suggestions for Leak Checking
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detectors
Appendix A. Communications Protocol
This appendix defines the technical specifications for the RS-232 protocol used with the
leak detector and describes the customer-configured inputs/outputs.
A.1 Protocol (RS-232)
RS-232 ports operate at 9600 baud, 8 bits, no parity, and one stop bit.
The maximum length of the input is 80 characters; if no carriage return has been received
before the 80th character, execution of the command string begins anyway.
Words that begin with:
❑
? are inquiries for the controlling device to determine the current state or value of a
leak detector parameter.
❑
PUT- are commands for the controlling device to set the current state or value of a
volatile leak detector parameter.
❑
INIT- are commands for the controlling device to set non-volatile leak detector
parameters.
Other commands do not require a parameter and do not begin with any special characters.
Successful inquiries respond with data, followed by a space, then: ok<CR><LF>, as
specified in the tables of this appendix. Unsuccessful inquiries respond with the offending
inquiry followed by a space, then: #?<CR><LF> (line feed, <LF>).
Inquiries, parameters, and commands can be concatenated. Each word or numeric
parameter is followed by one or more spaces. The string is terminated by a <CR>, which
causes execution to begin.
Successful strings respond with the specified data for the input inquiries in the order the
inquiries were issued, followed by: ok<CR><LF>.
Unsuccessful strings respond with the first offending command followed by a space,
then: #?<CR><LF>. All commands and inquiries following the failed word are ignored;
all parameters are discarded.
Table A-1 on page A-5, Table A-2 on page A-7, Table A-3 on page A-10, and Table A-4 on
page A-11 outline the available control and query commands.
A-1
DRAFT 6/4/11
All characters transmitted to the leak detector are echoed by the leak detector. Commands,
inquiries, and strings of both commands and inquiries must be terminated by a carriage
return <CR>; the carriage return is echoed as a space character.
VS Series Helium Mass Spectrometer Leak Detectors
A.2 Communicating with RS-232
The RS-232 Protocol is intended for diagnostic purposes and initial set-up inquires. The
RS-232 connection is located on the rear D-sub 9-pin connector.
The leak detector RS-232 port is not an interrupt-driven port. It is configured as DTE
(Data Terminal Equipment), therefore the leak detector's RS-232 Protocol cannot be sent as
strings.
NOTE
When programming with virtual instrumentation programs such
as LabView, TestPoint, or Visual Basic, try one the following two
methods:
❑ Transmit the intended command one character at a time
DRAFT 6/4/11
with a minimal delay time of 50 milliseconds between each
character. Terminate the command with a carriage return
(CR).
❑ Transmit the intended command one character at a time.
Wait for an echoed response from the leak detector before
transmitting the next character. Terminate the command
with a carriage return (CR)
Windows 95 and later versions contain a serial communications program called
HyperTerminal, a useful tool in establishing communication between the leak detector and
a PC.
A.2.1 Windows HyperTerminal Set-Up Instructions
To set up Windows HyperTerminal:
1. Click Start.
2. Select Programs > Accessories > Communications > HyperTerminal.
3. Double-click Hypertrm.exe.
The Connection Description dialog box appears.
4. Enter a name and choose an icon for the connection, for example: leak detector RS-232.
5. Click OK.
The Connect To dialog box appears.
6. Select a COM port from the Connect Using: the pull-down list.
The Com Properties/Port Setting dialog box appears.
A-2
VS Series Helium Mass Spectrometer Leak Detectors
7. Configure the following settings:
❑
Bits per second (baud rate) – 9600
❑
Data bits: – 8
❑
Parity: – None
❑
Stop bits: – 1
❑
Flow Control: – None
8. Click OK.
9. Select Properties from the File menu.
The Properties window appears.
10. Configure the following settings on the Connect To tab:
❑
Connect using – Verify the COM port is correct.
❑
Click Configure and verify the port settings are correct.
❑
Terminal keys radio button selected.
❑
Ctrl+H radio button selected.
❑
Auto detect selected from the Emulation pull-down list.
❑
ANSI entered in the Telnet terminal ID.
❑
500 set in the Background buffer lines field.
D RA F T 6/ 4/ 11
11. Ensure that the Settings tab is configured as follows:
12. Click ASCII Set-Up.
The ASCII Set-Up dialog box appears.
13. Ensure that the settings are as follows:
❑
❑
❑
Line delay – 0 milliseconds
Character delay – 0 milliseconds
ASCII Receiving – Wrap lines that exceed terminal width
The cursor begins blinking.
14. Type some simple commands:
❑
?LEAK
❑
?ALL
❑
?SETUP
A-3
VS Series Helium Mass Spectrometer Leak Detectors
A.2.2 Printing with HyperTerminal
The easiest way to print information captured in HyperTerminal is to choose Print from the
File menu; however, this method only prints information currently displayed on the screen.
Screen information can also be highlighted, copied and pasted into Microsoft Word or
Excel.
To capture large amounts of data that exceeds the terminal screen limits, use the Transfer
menu Capture Text option:
1. Select Transfer > Capture text.
The Capture text dialog box appears.
2. Click Browse.
The Select Capture File dialog box appears.
DRAFT 6/4/11
3. Navigate to a location, enter a file name and select a file type:
❑
.txt text file (Notepad)
❑
.doc (Word)
❑
.xls (Excel)
4. Click Save.
The Capture Text dialog box reappears.
5. Click Start to log data.
6. Select Transfer > Capture Text > Stop to end text capture.
7. Open the file where the data was stored and select File > Print.
Example
To use the above procedures to poll the leak detector leak rate using HyperTerminal and
capture the text:
1. Type the command: XYZZY.
If received correctly, the leak detector responds ok.
2. Type the command: ?LEAK 1 SECS CR ?ESC.
This command polls the leak rate every second. The time is set in seconds.
3. Press ESC to abort polling.
4. Select Transfer > Capture Text.
5. Browse to a folder and file using the Capture Text dialog box and click Start.
6. Select Transfer > Capture Text > Stop to abort data logging.
A-4
VS Series Helium Mass Spectrometer Leak Detectors
Table A-1 lists inquiries that are used to determine internal operating parameters.
All inquiries, except VER, begin with ? and end with <CR>.
Table A-1
Internal Operating Parameters
Response
?ALL
Responds with four lines. Each begins with a <cr><lf>. The first line
reports the ion chamber value. The second line reports the emission value.
The third line reports the value of the offset variable. The fourth line reports
the gain value.
?AZ<0
Reports the status of the Auto-zero < 0 function, ON or OFF.
?CALOK
Reports the status of the last calibration.
?CL-XFER
Reports the currently stored contra-flow mode crossover pressure.
?CPLOCKOUT
Reports the status of the control panel lockout feature, ON or OFF.
?CURRDATE
Reports the current system date and time in the following format: 3
05/25/2005 04:19:03.35 1 where 3 is the day of the week (0 = Sunday, 1 =
Monday, etc), 05/25/2005 is mm/dd/yyyy (date), 04:19:03.35 is
hh/mm/ss/ms (time) and 1 is PM (0=AM, 1=PM, 2=24 hour).
?DISPLAY
Reports what the display bar graph is set to, log or lin.
?EMISSION
Reports the emission value.
?EXPONENT
Reports the current manual-mode exponent with a two-character (minus
followed by one digit) number. The exponent is within the least sensitive
range (as reported by ?RANGE) and the three lower (more negative
exponent) ranges. See also INIT-EXPONENT.
?EXTLEAK
Reports the currently stored value of the external standard leak.
?GAIN
Reports the system gain value by returning a three-character number
consisting of a two-digit gain factor with a decimal point after the first digit.
?INTEXT
Indicates which leak, Internal or External has been selected for use during
calibration.
?IONCHAMBER
Reports the ion chamber value.
?LANGUAGE
Reports the language that has been selected to display on the front panel
(0=English, 1=French, 2=German, 3=Korean, 4=Spanish, 5=Japanese,
6=Chinese).
?LEAK
Reports a six-character number consisting of a two-digit leak rate mantissa
with decimal point after the first digit followed by E - then a two digit
number, which is the leak rate range exponent (e.g., 1.3E-08).
?LKEXPIRE
Reports the internal calibrated leak expiration date mm/dd/yyyy.
A-5
D RA F T 6/ 4/ 11
Inquiry
VS Series Helium Mass Spectrometer Leak Detectors
Table A-1
DRAFT 6/4/11
Inquiry
Internal Operating Parameters (Continued)
Response
?LEAKTEMP
Reports the internal calibrated leak temperature that the factory calibration
was performed at (degrees C).
?LP
Reports the current leak rate along with the test port and system pressures.
?LPV
Reports the current Leak Rate, Pressures and Valve state.
?ML-XFER
Reports the current contra to midstage crossover pressure setpoint in Torr.
The response is in exponential format (in Torr): X.XE-XX
?PRESSURES
Reports two lines. Each begins with a <cr><lf>. The first line consists of the
words test port TC followed by a number in mTorr. The second line
consists of the words system TC followed by a number in uTorr.
?PWDONOFF
Reports status of system password (ON or OFF).
?QUICK-CAL
Reports whether Fast or Full Calibration is chosen if a calibration were to
be started.
?RANGESTOP
Reports the value of the Range Stop variable.
?REJECT
Reports the reject leak rate setpoint (e.g., 7.0E-05) (where x is a number
from 1 to 4 or the letter A).
?>xREJECT
Reports the status of a reject set point (where x is a number from 1 to 4 or
the letter A).
?xREJECT
Reports the reject leak rate setpoint (e.g., 7.0E-05) (where x is a number
from 1 to 4 or the letter A).
?ROUGH
Reports the currently stored Test Sequencer rough time used as part of
setting up the Auto Sequencer.
?RSONOFF
Reports the status of the Rangestop function as Enabled or Disabled.
?SEQONOFF
Reports the status of the Auto Sequencer as Enabled or Disabled.
?SETUP
Reports seven lines, each begins with a <cr><lf>. The first line reports the
turbo pump speed with the RPM value or OFF. The second line reports the
selected manual leak rate range, and the ranging method as auto or
manual. The third line reports the least sensitive leak rate range. The fourth
line reports the reject set point leak rate. The fifth line reports the internal
calibrated leak rate value. The sixth line reports the DAC output method as
Linear, Log(2V), or Log(3V). The seventh line reports the active filament
status as One or Two, followed by Lit or Out.
?SPLITFLOW
Returns the status of the split flow function, ON or OFF.
A-6
VS Series Helium Mass Spectrometer Leak Detectors
Table A-1
Internal Operating Parameters (Continued)
Response
?STDLEAK
Reports a six-character number consisting of a two-digit calibration
standard leak rate mantissa with a decimal point after the first digit
followed by E-, and then by a two-digit exponent (e.g., 1.3E-07). This
inquiry is used for reporting the calibration standard leak rate entered
using INIT-STDLEAK.
?SYSLEAK
Reports the leak rate value that has been stored that relates to the split flow
functionality.
?SYSPWD
Reports the value of the system password.
?TEST
Reports the currently stored Test Sequencer test time used as part of setting
up the Auto Sequencer.
?TEMPFACTOR
Reports the internal calibrated leak temperature factor that is used as part
of the temperature correction logic (degrees C).
?TURBO
Reports four lines, each begins with a <cr><lf>. The first line consists of
the word turbo followed by either READY or NOT READY. The second line
consists of the word turbo followed by either Fault or No Fault. The third
line consists of the words turbo speed RPM followed by the RPM value:
xxxxx. The fourth line consists of the words "Turbo Temp (Celsius):"
followed by the bearing temperature value: XX.
?VALVESTATE
Reports the current mode of the valves: Vent, Hold, etc.
VER
Reports the CPU software version in the form LC02.05 followed by a six
digit hexadecimal checksum.
?VOLUMEONOFF
Reports audio as either ON or OFF.
WHYNOCAL
Reports the calibration failure diagnostics.
?0ENABLE
Responds with the status of the Zero Enable function, ON or OFF.
The commands listed in Table A-2 are used to set non-volatile operating parameters. The
current value of the operating parameter is changed to the new value. If the leak detector is
in back panel control, the response is cant.
Table A-2
Command
Non-Volatile Operating Parameters
Parameter
INIT-AZ<0
Preceded by 0 or 1, sets the status of Auto-zero < 0. 0 = off, 1 = on.
INIT-CL-XFER
Preceded by X.XE-X, sets the value of the contra-flow mode crossover
pressure in Torr.
A-7
D RA F T 6/ 4/ 11
Inquiry
VS Series Helium Mass Spectrometer Leak Detectors
Table A-2
DRAFT 6/4/11
Command
Non-Volatile Operating Parameters (Continued)
Parameter
INIT-CPLOCKOUT
Sets the status of the control panel lockout. Preceded by (0) or (1), 0 =
OFF, 1 = ON.
INIT-DATE
Sets the system date and time. Preceded by: dow, mm dd yyyy hh mm ss
AmPm 24-12 mode, Where 2 is the day of the week (dow) (0 = Sunday, 1
= Monday, etc), mm/dd/yyyy (date), hh:mm:ss (time) AmPm (0=AM,
1=PM)24-12 mode (0 for 24 hr, 1 for 12 hr). Examples: 2 02 12 2005 04 16
33 1 0 INIT-DATE(Tuesday, February 12, 2005, 4:16:33 on a 24 hr clock)2
02 12 2005 04 16 33 1 1 INIT-DATE(Tuesday, February 12, 2005, 4:16:33
PM)?CURRDATE reports the stored value
INIT-DISPLAY
Sets the status of the bar graph display to either a log or linear display.
Preceded by (1) Log or (0) Linear.
INIT-EMISSION
Sets the emission of the ion source. Preceded by a three-digit number
(micro-amps), in the range 60 to 165.
INIT-EXPONENT
Sets the range that the leak detector will operate in when Manual Range is
ON. Preceded by 0 to -11.
INIT-EXTLEAK
Sets the value of the external leak. Preceded by a two-digit leak rate
mantissa with a decimal point after the first digit followed by E-, and then
by a two-digit leak range exponent: the helium leak rate number in atm
cc/sec of the calibration standard leak.
Example: 3.2E-08 INIT-EXTLEAK
INIT-FILAMENT
Sets the operating filament in the ion source. Preceded by a single digit,
either 1 or 2.
INIT-GAIN
Sets the value of the gain used for adjusting the helium signal to match a
calibration standard leak. Preceded by a two-digit number with a decimal
point after the first digit, in the range 1.0 to 6.0.
Note: Changing Gain changes Zero by the same ratio.
INIT-ION
Sets the ion voltage of the ion source. Preceded by a three-digit number
(volts) in the range 220 to 280.
INIT-LANGUAGE
Selects the language to be shown on the display. Preceded by 0-6 where
(0=English, 1=French, 2=German, 3=Korean, 4=Spanish, 5=Japanese,
6=Chinese).
INIT-LINEAR
Sets the leak rate analog output voltage to Linear. Not preceded by a value.
INIT-LKEXPIRE
Sets the date on which the internal calibrated leak expires. Preceded by the
date.
Example: mm dd yyyy INIT-LKEXPIRE
A-8
VS Series Helium Mass Spectrometer Leak Detectors
Table A-2
Non-Volatile Operating Parameters (Continued)
Command
INIT-LEAKTEMP
Parameter
Sets the internal calibrated leak temperature (printed on the leak label)
that the factory calibration was performed at. Preceded by 12.0 to 50.0
(degrees C).
INIT-1LOG
Sets the leak rate analog output voltage to logarithmic at 1 volt per decade.
Not preceded by a value.
INIT-ML-XFER
Sets the value of the midstage-flow mode crossover pressure in Torr.
Preceded by X.XE-XX. The range is 1.0E-03 to 1.0E-01 Torr. The default is
1.0E-01 (100 mTorr).
INIT-PASSWORD
Sets the system password. Preceded by a 1 to 6 digit password and
followed by a digit indicating the number of digits in the password.
Example: 123123 6 INIT-PASSWORD.
Password is read back using the ?SYSPWD command.
INIT-QUICK-CAL
Sets which type of calibration will be run if the CALIBRATE command is
initiated. Preceded by 0 or 1, 0 for FULL cal, 1 for FAST cal.
INIT-RANGESTOP
Sets the value of the most sensitive range exponent. Preceded by XX.
INIT-1REJECT
Sets the leak rate value for Reject Set Point #1. Preceded by a two-digit
leak rate mantissa with a decimal point after the first digit followed by E-,
and then by a two-digit leak range exponent, the helium leak rate number
is in atm cc/sec.
Example 3.4E-08 INIT-1REJECT
INIT-2REJECT
Same as INIT-1REJECT, but for Reject Set Point #2.
INIT-3REJECT
Same as INIT-1REJECT, but for Reject Set Point #3.
INIT-4REJECT
Sets the test port pressure value for Reject Set Point #4. Preceded by a
two-digit leak rate mantissa with a decimal point after the first digit
followed by E-, and then by a two-digit exponent: the test port TC pressure
in millitorr.
Example 1.5E-02 INIT-4REJECT
INIT-AREJECT
Same as INIT-1REJECT, but for the Audio Reject Set Point.
HIGH-xREJECT
Sets the reject set point to activate when the actual test value is higher than
the set point. Where x is a number from 1 to 4 or the letter A. For example,
the reject set point is set for 7.0E-05 and the actual test value is 9.2E-05.
LOW-xREJECT
Sets the reject set point to activate when the actual test value is lower than
the set point. Where x is a number from 1 to 4 or the letter A. For example,
the reject set point is set for 7.0E-05 and the actual test value is 4.3E-07.
A-9
D RA F T 6/ 4/ 11
Example: 23.5 INIT-LEAKTEMP
VS Series Helium Mass Spectrometer Leak Detectors
Table A-2
Non-Volatile Operating Parameters (Continued)
Command
Parameter
INIT-ROUGH
Sets the Auto Sequencer rough time in seconds. Preceded by XX.
INIT-SYSLEAK
Sets the split flow leak value, system must be in TEST and the split flow
feature must be OFF when this parameter is set. Preceded by a two-digit
leak rate mantissa with a decimal point after the first digit followed by E-,
and then by a two-digit leak range exponent: the helium leak rate number
in atm cc/sec.
Example 3.4E-08 INIT-SYSLEAK.
INIT-STDLEAK
Sets the value of the internal leak. Preceded by a two-digit leak rate
mantissa with a decimal point after the first digit followed by E-, and then
by a two-digit leak range exponent: the helium leak rate number in atm
cc/sec.
DRAFT 6/4/11
Example: 3.2E-08 INIT-STDLEAK.
INIT-TCTPZERO
Used to calibrate the low-pressure end of the test port thermocouple to a
known pressure higher than zero. Preceded by a number (XX) of mTorr
representing the test port pressure at the time of the command.
INIT-TEMPFACTOR
Sets the temperature correction factor that is printed on the internal calibrated leak label. Preceded by –10 to +10.
Example: -7 INIT-TEMPFACTOR
INIT-TEST
Sets the Auto Sequencer test time in seconds. Preceded by XX.
LOCK-MS
Enables the MS lock feature. If the system exceeds 150 mTorr, the system
goes from Fine test directly into Roughing mode (no Contra mode). If the
leak rate exceeds the 7 range, the over range symbol appears.
UNLOCK-MS
Disables the MS lock feature.
?MS-LOCK
Queries the status of the MS lock feature; either on or off appears.
The commands listed in Table A-3 are used to cause an immediate change in the
spectrometer operating parameters. These Commands Do Not Change The Non-Volatile
Operating Parameters.
Table A-3
Command
PUT-EXPONENT
A-10
Spectrometer Operating Parameters
Parameter
Sets the exponent leak range for Manual mode. Preceded by a
two-character number Acceptable values are 0 through -10.
VS Series Helium Mass Spectrometer Leak Detectors
Table A-3
Spectrometer Operating Parameters (Continued)
Command
Parameter
PUT-ION
Sets the ion value of the ion source. Preceded by a three-digit number of
volts, in the range 200 to 350.
PUT-RANGESTOP
Sets the Range Stop exponent. Preceded by two or three characters -XX or
-X.
The commands listed in Table A-4 are used to cause certain leak detection actions.
Table A-4
Leak Detection Actions
Action
AUTO
Initiates auto-ranging mode. Success is indicated by the normal ok
response.
CALIBRATE
Initiates a Full or Fast calibration depending on system settings. The CPU
software tunes, then adjusts the gain so that the current helium signal
causes the current leak rate measurement to be the same as the most
recently input using INIT-STDLEAK. If the gain is 2.9 or higher, a normal
calibration is performed. Success is indicated by the normal ok response.
DECREMENT
Subtracts 1 from the Manual Ranging leak rate exponent (making it more
negative). Success is indicated by the normal ok response. Does nothing in
auto-ranging mode. Does nothing upon reaching the most sensitive range.
DISABLE-0ENABLE
Turns the Zero Enable function OFF.
DISABLE-PASSWORD
Turns the password function OFF.
DISABLE-xREJECT
Turns the Reject Set Point OFF. Where x is a number from 1 to 4 or the
letter A.
DISABLE-RANGESTOP
Turns the Range Stop function OFF.
DISABLE-SEQUENCER
Turns the auto sequencer function OFF.
DISABLE-SPLIFLOW
Turns the split flow function OFF.
DISABLE-VOLUME
Turns audio OFF.
ENABLE-0ENABLE
Turns the Zero Enable function ON.
ENABLE-PASSWORD
Turns the Password feature ON.
ENABLE-xREJECT
Turns the Reject Set Point ON. Where x is a number from 1 to 4 or the
letter A.
ENABLE-RANGESTOP
Turns the Range Stop function ON.
ENABLE-SEQUENCER
Turns the auto sequencer function ON.
A-11
D RA F T 6/ 4/ 11
Command
VS Series Helium Mass Spectrometer Leak Detectors
Table A-4
Leak Detection Actions (Continued)
DRAFT 6/4/11
Command
Action
ENABLE-SPLITFLOW
Turns the split flow function ON.
ENABLE-VOLUME
Turns audio ON.
EXTERNAL
Sets the External Calibrated Leak (in test port) as the leak for use during
calibration.
INCREMENT
Adds 1 to the Manual Ranging leak rate exponent (making it less negative).
Success is indicated by the normal ok response. Does nothing in
auto-ranging mode. Does nothing upon reaching the least sensitive range.
INTERNAL
Sets the Internal Calibrated Leak as the leak to be used during calibration.
KEEP
Causes the leak detector to close most valves and enter the Hold state.
MANUAL
Turns the Manual Ranging Mode ON. Success is indicated by the normal
ok response.
NOSNIFF
Turns the HIGH PRESSURE TEST function OFF.
ROUGH
Causes the leak detector to begin a roughing on the test port only.
SNIFF
Turns the HIGH PRESSURE TEST mode ON.
STDLEAK
Turns Read Std Leak ON/OFF. Verifies calibration by exposing internal cal
leak to the system.
TPTCATM
Sets the current test port thermocouple reading to represent atmospheric
pressure when the test port is exposed to atmosphere. Success is indicated
by the normal ok response.
TPTCZERO
Sets the current test port thermocouple reading to represent a ZREO
pressure reading when the test port pressure is less than 1.0E-04 Torr.
Success is indicated by the normal ok response.
TUNE
Adjusts the ion source voltage to cause a maximum response to helium.
VENT
Causes the leak detector to isolate and vent the test port to the atmosphere.
XYZZY
Unlocks the system so that all RS-232 commands are accessible.
ZERO
Sets the current leak rate measurement to be 0.0 atm cc/sec in the most
sensitive range.
A-12
VS Series Helium Mass Spectrometer Leak Detectors
A.3 Customer Accessible Inputs and Outputs
A.3.1 Serial Connector
Use the SERIAL connector on the Rear Panel to interface the VS Series leak detector to a PC
via an isolated RS-232 connection. Table A-5 and Figure A-1 provide details of the
connection. A typical connection from a 9-pin PC serial connector requires a
female-to-female, 9-pin, null modem cable, where pins 2 and 3 are crossed.
Pin
Serial Connector Summary
EIA Name
Description
2
Received Data
Data into the leak detector
3
Transmit Data
Data out of the leak detector
5
Signal Common
RS-232 Ground
2 3
Figure A-1
5
Serial Connector Map
A.3.2 I/O Connector
Table A-6 lists the optional discrete I/O PCB (P/N# R2111501) pin signals. This I/O
connector provides a means for a controller, usually a PLC, to control or to determine the
leak detector status. The I/O is accessible via a type DB25S (female socket) connector.
Table A-6
Pin
No.
Signal Name
I/O
Signal
I/O Connector Pin Signals
Description
Leak Detector Behavior
15,
19,
23
+ VIN
N/A
+5 V to
+24
VDC
Customer-supplied +5VDC
to + 24VDC for Output
Common pins.
17,
21
VRET
N/A
0 VDC
Customer -supplied GND for
the Input Common pins.
1
CAL_OUT
O
Level
Active HIGH when the leak Performs calibrating routine
detector is in CALIBRATION with the Internal Calibrated
mode.
Leak; Zeroing routine is
included.
A-13
D RA F T 6/ 4/ 11
Table A-5
VS Series Helium Mass Spectrometer Leak Detectors
Table A-6
DRAFT 6/4/11
Pin
No.
Signal Name
I/O
I/O Connector Pin Signals (Continued)
Signal
Description
Leak Detector Behavior
2
ZERO_OUT
O
Level
Active HIGH when the leak
detector is in ZEROING
mode.
Performs the Zeroing
routine.
3
HOLD_OUT
O
Level
Active HIGH when the leak
detector is in HOLD mode.
Performs a HOLD routine
and isolates the test port and
any test objects from the
leak detector vacuum
system.
4
VENT_OUT
O
Level
Active HIGH when the leak
detector is VENT mode.
Performs a VENT routine,
isolates the test port from the
leak detector vacuum system
and vents the test port to
atmosphere.
5
START_OUT
O
Level
Active HIGH when the leak
detector is in
START/ROUGH mode.
Performs a ROUGHING
routine on the test port and
any attached test objects.
6
READY_
OUT
O
Level
Active HIGH when the leak
detector is in READY mode.
Indicates that the leak
detector is completing a
STARTING routine and that
the filament and turbo are
OK.
7
TEST_OUT
O
Level
Active HIGH when the leak
detector is in FINE TEST
mode.
Indicates that the leak
detector is ready for fine leak
testing.
8
REJECT1_
OUT
O
Level
Active HIGH when the leak
rate is over set point #1.
Indicates that the value of
the leak rate exceeds the
value set in the 1REJECT
variable.
9
REJECT2_
OUT
O
Level
Active HIGH when the leak
rate is over set point #2.
Indicates that the value of
the leak rate exceeds the
value set in the 2REJECT
variable.
10
REJECT3_
OUT
O
Level
Active HIGH when the leak
rate is over set point #3.
Indicates that the value of
the leak rate exceeds the
value set in the 3REJECT
variable.
A-14
VS Series Helium Mass Spectrometer Leak Detectors
Pin
No.
Signal Name
I/O
I/O Connector Pin Signals (Continued)
Signal
Description
Leak Detector Behavior
11
REJECT4_
OUT
O
Level
Active HIGH when the test
port pressure is over set
point #4.
Indicates that the value of
the test port pressure
exceeds the value set in the
4REJECT variable.
12
CAL_OUT_
OK
O
Level
Active HIGH when
calibration is successful.
Indicates the calibration has
successfully completed. Set
low on power-up or if
calibration is not
successfully completed.
13
AUTO_
MANUAL_
RANGE_IN
I
Level
Active HIGH when Manual
Ranging is selected.
Activation causes the leak
detector to change from
AUTO to MANUAL ranging
; Default is AUTO.
14
CAL_IN
I
> 200
Active HIGH pulse.
ms Pulse
Initiate CALIBRATING
routine with Internal
Calibrated Leak; Zeroing
routine is included.
16
ZERO_IN
I
> 200
Active HIGH pulse.
ms Pulse
Initiate ZEROING routine.
18
HOLD_IN
I
> 200
Active HIGH pulse.
ms Pulse
Initiate HOLD routine and
isolate the test port and any
test objects from leak
detector vacuum system.
20
VENT_IN
I
> 200
Active HIGH pulse.
ms Pulse
Initiate VENT routine and
vent the test port to
atmosphere.
22
TEST_IN
I
> 200
Active HIGH pulse.
ms Pulse
Initiate ROUGHING routine
on the test port and any
attached test objects.
A-15
D RA F T 6/ 4/ 11
Table A-6
VS Series Helium Mass Spectrometer Leak Detectors
Table A-6
Pin
No.
Signal Name
I/O
I/O Connector Pin Signals (Continued)
Signal
Description
Leak Detector Behavior
24
RDSTDLK_
IN
I
Level
Active HIGH when standard Initiate the INTERNAL
leak is ON.
STANDARD LEAK reading
routine.
25
PARALLEL_
ENABLE_IN
I
Level
Active HIGH when ENABLE
is active.
Activation causes the leak
detector to take inputs only
from the rear panel I/O or
RS-232 port. No control
functions (inputs) from the
front panel or wireless are
allowed.
DRAFT 6/4/11
Figure A-2 shows the output circuit sketch. Level outputs are optically isolated emitter
followers with 10 Ohm series resistors, and a 14 mA max drive current (24 VDC max).
Figure A-2
A-16
Optically Isolated Output Circuit Sketch
VS Series Helium Mass Spectrometer Leak Detectors
Figure A-3 shows the input circuit sketch. All inputs are optically isolated 3300 Ohm
resistive loads in series with the LEDs of the opto-isolators and voltage level from +5 VDC to
+24 VDC. The required pulse inputs are 200 ms minimum pulse width.
Optically Isolated Input Circuit Sketch
D RA F T 6/ 4/ 11
Figure A-3
A-17
DRAFT 6/4/11
VS Series Helium Mass Spectrometer Leak Detectors
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VS Series Helium Mass Spectrometer Leak Detector
Appendix B. Leak Detector Spare Parts and
Accessories Lists
Item
Spare Parts
Part Number
VS Series Remote, Base Unit (Field Installation):
VSFLDWB
❑ Wireless Baseboard Assembly (Qty: 1)
R2541301
❑ Label, Wireless Remote Control Base (Qty: 1)
R2778001
❑ Cable, RS-232, Wireless Base (Qty: 1)
R2552301
❑ Antenna, # S181FL-4-RMM-2450S (Qty: 1)
648751010
❑ Screw, SEMS, M3 X 6lg Pan HD Phillips (Qty: 4)
614418306
❑ Ion Source Field Replacement (w/o filaments)
VSFLDIS
❑ Testport TC Cable
VSFLDOC
VS I/O Kit (Field Installation):
VSFLDIO
❑ I/O Assembly (Qty: 1)
R2988301
❑ Cable, Discrete I/O, RS-232, Yellow (Qty: 1)
R2128301
2-Way Valve Assembly (V1, V2, V3, V4, V5 and V7)
R2010301
3-Way Valve Assembly (V6 and V8 (PR02))
R2011301
Spectrometer Assembly
R2041301
Replacement Fan Assembly
VSFLDFN
Motherboard PCB
R2101301
CPU PCB
R2361303
Ion Source PCB
R2120301
Valve Driver PCB
R2104301
24 VDC Turbo Controller PCB
9699518
Front Panel Controller PCB
R2117301
Front Panel Sub-Assembly
R2021301
AC-DC Power Supply
659077040
Filament Replacement
VSFLDFR
Valve Block O-ring Kit
VSFLDOV
D RA F T 6/ 4/ 11
Table B-1
B-1
VS Series Helium Mass Spectrometer Leak Detector
Table B-1
Spare Parts (Continued)
D RA F T 6/ 4/ 11
Item
Part Number
Diaphragm Pump (PD03)
VSFLDDP
Diaphragm Kit (PD03)
614911041
Clippard Valve (PD03 and PR02)*
VSFLDV9
Exhaust Valve (2-way for PD03)
VSFLDV8
Fan Kit
VSFLDFN
Metal Gasket Kit
VSFLDMG
Discrete I/O PCB
R2111501
Wireless Base PCB
R2541301
Calibrated Leak
VSFLDCL
TC Replacement Kit
VS531A1S
TC 531 1/8" NPT
F072301
* For PR02 units manufactured after Spring 2009.
B-2
VS Series Helium Mass Spectrometer Leak Detector
Leak Detector Accessory Item List
Assembly
Part Number
Flapper Box, NW25 Flange
L6241302
Power Probe, 10’ (NW25 Flange)
K9565306
Power Probe, 25’ (NW25 Flange)
K9565307
Spare Tip Filters for Power Probe (Qty: 10)
K9565303
Throttle Valve (NW25 Flange)
R1947301
Elite-Z Mechanical Pump Fluid
695409005
Calibrated Leak, 10-5, 10-6 (NW25 Flange)
F8473320
Calibrated Leak, 10-7 (NW25 Flange)
F8473321
Calibrated Leak, 10-8 (NW25 Flange)
F8473322
Calibrated Leak, 10-9 (NW25 Flange)
F8473323
Calibrated Leak, 10-10 (NW25 Flange)
F8473324
Oil Mist Eliminator
VSFLDME
Filter, Oil Mist Eliminator
649071021
Inlet Adapter Kit (NW25-1-1/8” Compression)
VSFLDCP
D RA F T 6/ 4/ 11
Table B-2
B-3
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Appendix C. VS Series Leak Detector Hardware
Descriptions
The VS Series Helium Mass Spectrometer Leak Detector system hardware locates and
measures the partial pressure of helium that is proportional to the desired Helium leakage
flow rate in a vacuum system under full software control.
The VS Series leak detector hardware provides:
❑ Gas evacuation and high vacuum creation in the test port and spectrometer tube
❑ Helium detection and leak rate measurement
❑ Microprocessor-based software control of all leak detector functions, mode and
operations such as:
❑ Leak rate analog-to-digital and digital-to-analog conversion, calculation and
presentation via LCD Display, audio speaker, analog voltage and RS-232 outputs
❑ Spectrometer and Test Port pressure measurement, calculation and presentation
via the LCD display and RS-232 output
❑ Valves control
❑ Turbo molecular and mechanical pumps control
❑ Front Panel control and indication
❑ Discrete I/O reading and control
❑ Wireless remote control
❑ AC-to- DC voltage supply conversion and distribution
❑ Protected AC power for the mechanical pumps
VS Series hardware resides in a stand-alone unit with a plastic enclosure compromised:
❑ Spectrometer tube sub-assembly with a pre-amplifier PCB
❑ Valve block sub-assembly with seven solenoids and Standard Calibrated Leak with a
Temperature Sensor PCB
❑ Turbo molecular pump
❑ Internal mechanical pump with a valve (VS PR02 model only) and external 6 A
circuit breaker or an AC 20 A outlet for the external mechanical wet or dry pumps.
❑ Electronics block sub-assembly with the CPU, Motherboard, Ion Source, Valve
Driver and Turbo Controller PCBs
❑ Front Panel with the color LCD Display, Touch Panel and two hard keys (TEST and
VENT)
C-1
D RA F T 6/ 4/ 11
❑ Spectrometer tube electrode parameters
VS Series Helium Mass Spectrometer Leak Detector
❑ Discrete I/O PCB (optional)
❑ Wireless Base PCB with RF antenna (optional)
❑ Two fans
❑ AC Power Entry Module with the IEC60320, C20 input, 20 A thermal circuit breaker/
switch and EMI filter
❑ Universal Power supply with (100 –253) VAC, 50/60 Hz input and +24 VDC output
All VS Series leak detector hardware PCBs and sub-assemblies are interconnected using the
cables shown in Appendix E “Interconnection Diagram” on page E-1.
C.1 Spectrometer Tube Description
The spectrometer tube is a heart of the VS Series Helium Mass Spectrometer Leak Detector
and is quantitatively sensitive to the presence of helium.
D RA F T 6/ 4/ 11
The VS Series spectrometer tube:
❑ Creates positive ions from gas molecules that penetrate inside the spectrometer,
maintained under high vacuum, via any leaks in the unit under test (UUT), which is
connected to the test port
❑ Separates helium from all other gas ions, detects helium and total gas pressures as
currents
❑ Converts the helium current into voltage with amplification.
The VS Series leak detector spectrometer tube is a stand-alone unit comprised of five
sections:
❑ Spectrometer tube body with magnets
❑ Ion source with two filaments section
❑ Electro-magnetic ion lenses
❑ Electrometer section for the partial helium pressure signal
❑ Collector plate for the total pressure signal
C-2
VS Series Helium Mass Spectrometer Leak Detector
C.2 Printed Circuit Boards P/Ns and Descriptions
This section describes the following circuit boards:
❑ Section C.2.1 “CPU PCB”
❑ Appendix C.2.2 “Motherboard PCB” on page C-4
❑ Appendix C.2.3 “Ion Source PCB” on page C-5
❑ Appendix C.2.4 “Valve Driver PCB” on page C-6
❑ Appendix C.2.5 “Turbo Controller PCB” on page C-6
❑ Appendix C.2.6 “Front Panel Controller PCB” on page C-7
❑ Appendix C.2.7 “Pre-Amp PCB” on page C-8
❑ Appendix C.2.8 “Temperature Sensor PCB” on page C-8
❑ Appendix C.2.10 “WRC-B PCB” on page C-10
❑ Appendix C.2.11 “WRC_HH PCB” on page C-11
C.2.1 CPU PCB
The CPU PCB (Agilent P/N R2362303) is a modified version of a PC104-based single board
Computer that functions as an embedded PC in the VS Series leak detector.
The CPU PCB circuitry provides:
❑ 32-bit, 16 MHz, integrated MC68332 microcontroller unit (MCU), which combines
high-performance data manipulation capabilities with powerful peripheral
subsystems
❑ Battery backed SRAM for frequently updated process parameters and real time clock/
calendar
❑ Flash Memory with boot sector
❑ EEPROM for setup and configuration parameters
❑ Non-isolated UART/RS-232 serial interface for communication with the external VS
Series leak detector peripherals such as:
❑ Front Panel PCB
❑ Valve Driver PCB
❑ Turbo Pump Controller PCB
❑ Discrete I/O PCB
❑ Serial Interface for background debug mode (BDM)
❑ EEPLD control signals generation for the Motherboard PCB
C-3
D RA F T 6/ 4/ 11
❑ Appendix C.2.9 “Discrete I/O PCB” on page C-9
VS Series Helium Mass Spectrometer Leak Detector
❑ ESD protected PC104 Parallel Interface (Data, Address and Control) Bus for
communication with the Ion Source and Preamp PCBs via the Motherboard PCB
The CPU circuitry resides on a stand-alone PC104 PCB comprised of six sections:
❑ MCU and memory (SRAM, FLASH and EEPROM) section
❑ Real Time Clock/Calendar section with the battery and super capacitor backup with
4-pin battery connector (JXBT) and IRQ1 jumper
❑ RS-232 section with 9-pin connector (J2); pin No. 10 is removed
❑ BDM section with 10-pin connector (J1)
❑ Time processor section with 34-pin connector (J4); not used in VS leak detector.
❑ Parallel interface section with two 64-pin, 0.1x0.1, PC-104 bus type I/O connectors
(J3)
C.2.2 Motherboard PCB
D RA F T 6/ 4/ 11
The Motherboard PCB (Agilent P/N R2101301) functions as liaison between the CPU PCB
and all other hardware section under full software control provided by CPU PCB
The Motherboard PCB circuitry provides:
❑ Parallel interface (Data, Address and Control) communication between a CPU and
an Ion Source PCBs
❑ UART/RS-232 non–isolated parallel-to-serial and serial-to-parallel interface for the
leak detector peripherals such as:
❑ Front Panel PCB
❑ Valve Driver PCB
❑ Turbo Pump Controller PCB
❑ Discrete I/O PCB
❑ RS-232 isolated serial communication between the CPU PCB and a rear panel serial
diagnostic port
❑ Isolated leak rate analog output (0-10 VDC)
❑ Parallel-to-serial and serial-to-parallel communication between the Pre-amp ADC
PCB and CPU PCB
❑ Test Port Thermocouple (TP TC) power supply and TP pressure voltage-to-frequency
signal conversion
❑ Isolated calibrated leak temperature frequency signal conversion
❑ CLPD control signals generation, data-to-frequency and frequency-to-data
conversion
❑ +24 VDC to a +5 VDC DC-DC conversion for the 5V-logic supply and clock/memory
battery power back up.
C-4
VS Series Helium Mass Spectrometer Leak Detector
The Motherboard circuitry resides on a stand-alone PCB comprised of five sections:
❑ Parallel interface section with two 64-pin, 0.1x0.1, PC-104 bus type I/O connectors
(J1 and J2)
❑ Non-isolated quad UART/RS-232 section with four I/O, RJ45-8x8 connectors (J100A/
B and J101A/B)
❑ TP TC gauge section with 4-pin I/O connector (J200)
❑ Isolated section that consists of analog output and RS-232 circuitry with 10-pin I/O
connector (J300) and two I/O, RJ45-8x8 connectors (J302) and a calibrated leak
temperature circuitry with 4-pin input connector (J301)
❑ Power Supply section with 3-pin connector (J400) and 4-pin connector (XJBT1)CPLD
section with two 14-pin JTAG connectors (J501 and J502) and RJ45-10x10 connector
(J500)
The Ion Source PCB (Agilent P/N R2120301) creates the high voltage and filament current
supply for all spectrometer tube electrodes under full software control provided by the CPU
PCB.
The Ion Source PCB circuitry provides:
❑ Parallel interface (Data, Address and Control) communication between the Ion
Source and CPU PCBs via the Motherboard PCB
❑ High voltage flyback power supplies for a spectrometer tube such as:
❑ Filament Bias
❑ Suppressor
❑ Chamber/Repeller
❑ Filament power supply with an emission current regulation loop
❑ CLPD control signals generation
❑ Isolated digital control of the ion voltage (filament bias/repeller voltage) and emission
current (filament voltage) tuning; the filament selecting (FIL 1_SEL and FIL2_SEL),
high voltage supply (HV_ON/OFF) switching
❑ +24 VDC to a +5 VDC DC-DC conversion for the filament supply and +24 V to +15
V for the digital control circuitry
The Ion Source circuitry resides on a stand-alone PCB comprised of five sections:
❑ Parallel interface/CPLD section with a 64-pin, 0.1x0.1, PC-104 bus type I/O
connector (J5) and a 14-pin JTAG connector (J2)
❑ High voltage section with the ion voltage tuning and a 10-pin connector (J4)
C-5
D RA F T 6/ 4/ 11
C.2.3 Ion Source PCB
VS Series Helium Mass Spectrometer Leak Detector
❑ Filament power supply section with the emission tuning and good emission
(EMI-OK) signals generation
❑ Isolated digital control section
❑ Power supply section with 3-pin connector (J1)
C.2.4 Valve Driver PCB
The Valve Driver PCB (Agilent P/N R2104301) functions as PWM solenoid drivers under
software control provided by the CPU PCB.
Valve Driver PCB circuitry provides:
❑ ± 50 V Isolated RS-232 interface with the CPU PCB via the Motherboard PCB
❑ Local microprocessor control and valve failure detection signals for eight solenoid
valves
D RA F T 6/ 4/ 11
❑ Delayed pulse-width modulated (PWM) output voltage for the solenoid valves
❑ +24 VDC to a +5 VDC conversion for the 5 V-logic.
The Valve Driver circuitry resides on a stand-alone PCB comprised of three sections:
❑ Isolated I/O RS-232 interface section with a RJ45-8x8 connector (J1)
❑ Microcontroller and eight valve driver cells section with two 12-pin connectors (J3
and J4)
❑ Power supply with 3-pin connector (J2)
C.2.5 Turbo Controller PCB
Turbo V70 Controller PCB circuitry provides:
❑ RS-232 communication with the CPU PCB via the Motherboard PCB
❑ Local microprocessor-controlled 24 VDC-to- frequency conversion with
auto-diagnostic (voltage, current and temperature control) and auto-protection (over
current and temperature) functionality for turbo pump
❑ 3-phase variable output voltage, current and frequency control respect to the speed
reached by the turbo pump
❑ +24 VDC to +5 VDC, +15 VDC, +12 VDC and +VP (~50 VDC) conversion
The Turbo V70 controller circuitry resides on a stand-alone PCB comprised of five sections:
❑ I/O RS-232 interface section with a 6-pin connector (P5)
❑ Microcontroller with an 8-channel ADC section with the temperature (ambient,
turbo and heat sink), current and motor voltage sensors
❑ 3-phase motor driver section with over current protection and 6-pin connector (P2)
❑ Power supply section with 4-pin connector (P3)
C-6
VS Series Helium Mass Spectrometer Leak Detector
❑ Parallel I/O section with 15-pin connector (P4) – not used in the VS Series leak
detector.
C.2.6 Front Panel Controller PCB
The Front Panel PCB (Agilent P/N R2117301) functions as liaison between an operator and
VS Series leak detector via an LCD display, Touch Panel and two hard keys (TEST and
VENT) under software control provided by the CPU PCB.
The Front panel PCB circuitry provides:
❑ ± 50 V isolated RS-232 interface with the CPU PCB via the Motherboard PCB
❑ Non-isolated RS-232 interface with a Wireless Base PCB
❑ Microprocessor (CPU) control of the two UART, color TFT- LCD Display, Touch and
Front Panels, LCD brightness and audio volume, PWM output for an audio circuitry,
USB device functionality and temperature control
❑ CPLD control signal generation
❑ 24 VDC to +3.3 VDC, +12 VDC and +1.8 VDC conversion
❑ 24 VDC to 600 VAC conversion for a CCFL backlight of the LCD display
The Front Panel Controller PCB circuitry resides on a stand-alone PCB comprised of nine
sections:
❑ CPU and memory (SDRAM and Flash) section
❑ Isolated I/O RS-232 interface section (UART1) with a RJ45-8x8 connector (J303)
❑ Non-isolated I/O RS-232 interface section (UART2) with a DB9 female connector
(P300)
❑ USB device section with a USB B-type connector (J302)
❑ CPLD section with a 6-pin overlay connector (J503) and 14-pin CPLD JTAG
connector (J500)
❑ Audio amplifier section with a 2-pin speaker connector J501
❑ TFT_LCD and Touch Panel interface section with a 33-pin display connector (J602),
4-pin touch panel connector (J601), and 20-pin debug connector (P602)
❑ Power supply section with 3-pin power connector (J401) and 5-pin backlight
connector (J400)
❑ DC-AC daughter PCB with high voltage AC connector CN2
C-7
D RA F T 6/ 4/ 11
❑ Power amplification for the audio control
VS Series Helium Mass Spectrometer Leak Detector
C.2.7 Pre-Amp PCB
The Pre-Amp PCB (Agilent P/N R2107301) functions as an ADC converter for the
spectrometer tube helium and total pressure signals under full software control provided by
the CPU PCB. The Pre-Amp PCB passes all voltages and currents to the ion source section of
the spectrometer tube. The Pre-Amp PCB is soldered directly to a spectrometer tube header.
Pre-Amp PCB circuitry provides:
❑ Digital isolated serial interface with the Motherboard PCB
❑ 24-bit sigma-delta analog-to-digital conversion of the signals proportional to:
❑ Helium leak rate generated by an electrometer amplifier in a spectrometer tube
❑ Total (spectrometer tube) pressure generated by the ions of gasses heavier than
helium, collected by an off-target collector plate and amplified by an active low
pass filter stage
❑ 24 VDC conversion to ± 15 VDC, ± 12 VDC (the electrometer supply), ± 5 VDC
D RA F T 6/ 4/ 11
analog supply for the ADC converter, +5 VDC digital supply and 24 V/5 V DC-DC
conversion for the electrometer Peltier cooler element inside of the spectrometer
tube
❑ Ion source’s electrodes voltage supply distribution and filtering
The Pre-Amp PCB circuitry resides on a stand-alone PCB comprised of four sections:
❑ Digital isolated section with a RJ45-10x10 connector (JR1)
❑ ADC section with 8-pin spectrometer connector (J3)
❑ Power supply section
❑ Ion source’s high voltage and high current distribution section with 10-pin connector
(J1) and 6-pin spectrometer connector (J2)
C.2.8 Temperature Sensor PCB
The Temperature Sensor PCB (Agilent P/N R2114301) provides direct temperature
–to-frequency conversion, where a period of the output square-wave 5 V-TTL signal is
proportional to temperature. Further conversion to 16-bit digital signal is provided by a
CPLD on the Motherboard PCB and sent to the CPU PCB via RS-232 port.
The Temperature circuitry resides on a stand-alone PCB directly placed on the Standard
Calibrated Leak and comprised of an TMP03 integrated circuit and a 4-pin connector (J1).
C-8
VS Series Helium Mass Spectrometer Leak Detector
C.2.9 Discrete I/O PCB
The Discrete I/O PCB (Agilent P/N R2111301) functions as liaison between the VS Series
leak detector and the external devices, such as PLC and USB connected devices (PC,
Printer, External Memory and/or Bar Code readers) in future releases. The USB section is
non-functional. The Discrete I/O PCB is under full software control provided by the CPU
PCB.
The Discrete I/O PCB circuitry provides:
❑ Local CPU and memory (SDRAM and Flash) for serial-to parallel (Address, Data and
Control signals) conversion for the parallel I/Os and embedded USB Host controllers
❑ Parallel optically isolated input (7- lines) and Output (12-lines) interface between the
VS leak detector and external equipment (e.g. PLC)
❑ RS-232 Isolated Serial communication interface with the CPU PCB via the
Motherboard PCB
D RA F T 6/ 4/ 11
❑ Non-isolated USB interface for communication:
❑ Upstream with a Front Panel Controller PCB (1-channel)
❑ Downstream with the external USB devices (2-channels)
❑ Downstream with communication with an external PC
❑ +24 VDC to +5 VDC, +3.3 VDC and +1.8 VDC conversion
❑ Flapper box interface
The Discrete I/O circuitry resides on a stand-alone PCB comprised of six sections:
❑ CPU and memory section
❑ Isolated RS-232 section (system site) with a RJ45-8x8 connector (J100)
❑ Isolated parallel interface section (customer site) with a 25-pin DB25 female type
connector (J103)
❑ Flapper box interface section with a 6-pin connector (J102)
❑ Power supply section with a 3-pin connector (J101)
❑ Non-isolated USB section with:
❑ Dual USB, type A, connectors (J201A and J201B) for the external USB devices
❑ USB, type A, connectors (J202) for the Flat Panel PCB
❑ USB, type B, connectors (J203) for the external PC
C-9
VS Series Helium Mass Spectrometer Leak Detector
C.2.10 WRC-B PCB
The VS Series leak detector Wireless Remote Control (Agilent P/N R2541301) provides
wireless communication between the leak detector and the hand-held remote control unit.
The Wireless Remote Base PCB circuitry provides:
❑ Isolated RS-232 serial interface for communication with the CPU PCB via the Front
Panel PCB
❑ Serial/parallel interface for communication with a 2.4 GHz transceiver module
❑ RF output for communication with an omni-directional dipole antenna via a coax
cable
❑ Voltage-to-frequency conversion of RF strength signal
❑ 24 VDC-to +5 VDC conversion.
The Wireless Remote Base circuitry resides on a stand-alone PCB comprised of five sections:
D RA F T 6/ 4/ 11
❑ Isolated RS-232 serial interface and V/F converter with a 9-pin DB9 female type
connector (P300)
❑ Serial/parallel interface with 20-pin connector (J2),
❑ 3-pin jumpers (J4-J6, J8 and J9) and 10-pin connector (J4)
❑ RF module with 20-pin interface connector and RF MMCX type connector
❑ Power supply section with 3-pin connector (J401)
C-10
VS Series Helium Mass Spectrometer Leak Detector
C.2.11 WRC_HH PCB
The Wireless Remote HH PCB (Agilent P/N R2544301) circuitry provides:
❑ Local microprocessor for parallel communication with the RF 2.5GHz module,
keypad, LCD Display and backlight LED
❑ RS-232 serial interface for software programming
❑ Leak rate audio indication
❑ Battery voltage to +5 VDC and +3.3 VDC conversion
❑ RF output for communication with an omni-directional dipole antenna via a coax
cable
The Wireless Remote HH PCB circuitry resides on a stand-alone PCB comprised of five
sections:
❑ Keypad interface section with a 14-pin connector (J3)
❑ LCD display section
❑ Audio section with a 2-pin speaker connector and 3-pin audio jack connector (J7)
❑ Power supply section
C-11
D RA F T 6/ 4/ 11
❑ Microcontroller Section with a BDM 10-pin connector (J4
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
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VS Series Helium Mass Spectrometer Leak Detector
Appendix D. Troubleshooting
D.1 Start Up and Operational Failures
Main Power switch trips on power up
Causes/Resolutions
1. Foreline pump failure (MR15 and MD30 models only):
a. Disconnect the foreline pump power cord from the back of the leak detector.
b. Power up the leak detector and confirm the power switch does not trip.
If it does not trip: Replace the foreline pump, due to a seizure or motor failure.
2. 24 V power supply failure (all models):
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a. Remove leak detector covers and disconnect power cable.
b. Disconnect the AC input to the 24 VDC power supply (Figure D-1).
Figure D-1
VS Series Power and Communications Panel
c. Power up the leak detector and confirm the power switch does not trip.
D-1
VS Series Helium Mass Spectrometer Leak Detector
6 A vacuum pump breaker trips at startup
Causes/Resolutions
1. Operating temperature is less than 10 °C (50 °F). Mechanical pump oil is cold causing
the motor to draw more current during power up:
❑ Place the leak detector (PR02) in a warmer environment > 10 °C (50 °F) for one hour,
preferably 22 °C (72 °F).
2. Defective mechanical pump (DS42 only):
❑ Replace the mechanical pump (Figure D-2). Refer to Section 6 “Turbo Molecular
Pump and Roughing/Foreline Pumps” for the correct procedure.
D RA F T 6/ 4/ 11
3. Defective scroll pump (IDP-3) - PD03 model. See Section 18 “Scroll Pump Replacement
(PD03 only)”.
Figure D-2
D-2
DS42 Mechanical Pump Removal
VS Series Helium Mass Spectrometer Leak Detector
Front panel display is blank after power up and mechanical pump is running
Causes/Resolutions
1. 24 V power supply is defective:
❑ Remove leak detector covers and measure the output of the 24 V power supply
Figure D-3
D RA F T 6/ 4/ 11
(Figure D-3).
Board Locations
2. Defective front panel display:
❑ Ensure that the 24 VDC is available for the front panel display, if present, replace
front display. 24 VDC can be measured at the P401 connector.
D-3
VS Series Helium Mass Spectrometer Leak Detector
System Pressure Wait error message appears on the front panel display.
This error can also occur during normal operation.
Causes/Resolutions
1. Foreline pump is not running
For the:
❑ DS302 - Ensure the foreline pump is operating - check electrical connections and
that the power switch is on.
❑ PR02 and PD03 - Ensure the 6 A breaker (Figure D-1 on page D-1) is not off or
tripped:
a. Press Vent.
b. Remove test port cap and press Test and verify that suction (vacuum) is present by
placing hand over test port.
D RA F T 6/ 4/ 11
2. Foreline valve is not open:
a. Verify if the valve error symbol is present.
b. Open the Manual Valve Control screen and verify that the foreline valve indicates a
failure (red circle- coil shorted or open).
c. Remove covers and disconnect the V1 plug (Figure D-7 on page D-7) from the coil
and measure the resistance of the coil (coil resistance = 10 Ohms).
To attach the spectrometer to the turbo pump, the torque sequence is:
❑ Finger tight all hardware in place.
❑ Torque hardware pattern to 6.2 N-m (55 in-lb).
❑ Re-torque hardware pattern to 12.4 N-m (110 in-lb).
❑ Wait 5 minutes and re-torque hardware pattern to 12.4 N-m (110 in-lb).
❑ Re-torque to 12.4 N-m (110 in-lb) three times at 5 minute intervals.
d. Reconnect the V1 plug and verify operation (listen for activation) by toggling the
foreline valve from the Manual Valve Control screen.
3. Valve Driver board failure:
a. Press Test or Vent to verify correct operation.
b. Select the Manual Valve Control screen; toggle the individual valves, and verify
activation.
c. Ensure the 24 V and communication cable between the valve driver PCB and
motherboard are secure (Figure D-4).
D-4
Figure D-4
Valve Driver and Turbo Controller Boards
d. Remove the connectors from V1 and V2 and place the V2 connector on V1
(Figure D-5). Open the Manual Tuning screen and toggle Contraflow on. Verify that
the turbo RPM is increasing and ramps up to 69960 and return to the Home screen
and verify the System Pressure Wait message is gone. V1 valve channel is defective;
replace PCB (Figure D-4 on page D-5).
D-5
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VS Series Helium Mass Spectrometer Leak Detector
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
Figure D-5
Valve Block - Exploded View
4. VPI valve (Figure D-6) on TS620 scroll pump (MD30 only) is not open:
If the scroll pump is running, press Vent, remove the test port cap and press Test and
verify that suction (vacuum) is present by placing hand over test port. If no vacuum is
present, the coil on the VPI valve is defective.
D-6
Figure D-6
Figure D-7
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
VPI Valve
Valve Block Spectrometer - Exploded View
5. Turbo pump failure:
a. Verify that the red turbo symbol appears on the Home screen. This symbol flashes
when a turbo failure is present.
b. Select the Manual Valve Control screen and verify that the turbo RPM is 70K 69960 RPM and that the bearing temperature is normal (< 50 °C
(122 °F)). If the bearing temperature is > 60 °C, the turbo shuts down.
D-7
VS Series Helium Mass Spectrometer Leak Detector
c. If no turbo error symbol is present on the Home screen, select the Manual Valve
Control screen and observe the turbo RPM and bearing temperature. If the turbo
RPM is 6000, it is possible that the turbo has crashed (Figure D-5 on page D-6):
❑ Remove the complete valve block assembly (valve block, turbo and spectrometer)
from the leak detector.
❑ Remove the spectrometer (Figure D-4 on page D-5) from the turbo and see if the
turbo spins freely. If not, replace turbo.
NOTE
Install the turbo pump using a new metal gasket and follow
torque requirement instructions.
6. Turbo Controller board failure:
a. Verify that the red turbo symbol appears on the Home screen.
D RA F T 6/ 4/ 11
b. Open the Manual Valve Control screen and ensure that the turbo RPM = 0 and the
bearing temperature = 255 °C (491 °F).
c. Verify that the power cable is connected to the turbo and that 24 VDC is present at
the turbo controller board. If all connections are secure, replace the turbo controller
board (Figure D-4 on page D-5).
d. Open the Manual Valve Control screen and ensure that the turbo RPM = 0 and the
bearing temperature = 0 C (32 F). Ensure that the RS-232 cable is secure at the turbo
controller board and motherboard. If the RS-232 cable is secure, replace the turbo
controller board.
If the replacement turbo controller board does not solve the communication
problem, there is a chance that the RS-232 cable is defective or that the
communication port on the motherboard is not working, replace the motherboard
(Figure D-3 on page D-3).
7. Gross leak in vacuum system:
❑ Ensure that the foreline connection (bellows) between the foreline pump and valve
block are properly attached and free of cracks and fractures. If not, replace these.
Spec Tube message error appears on the front panel display
This error can also occur during normal operation.
Causes/Resolutions
1. Spectrometer pressure is >1E-4 due to a gross leak:
a. Select Setup menu > Gauge Calibration menu and ensure that the Spectrometer
Pressure reading is < 1E-4 Torr.
b. Check for a gross leak at the turbo inlet, spectrometer inlet (gasket misaligned) or at
the spectrometer header (gasket misaligned) or entire spectrometer (Figure D-4 on
page D-5, Figure D-8 on page D-9 and Figure D-9 on page D-9).
D-8
Figure D-8
Figure D-9
NOTE
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
Screws - Exploded View
Washer Alignment and Pattern
Insert a screw with three Belleville washers into each hole and
finger tight (Figure D-9).
Following the pattern shown in Figure D-9, torque screws to 5
N-m (45 in-lbs).
Re-torque hardware in pattern shown to 10.2 N-m (90 in-lbs).
Go through the entire torque pattern twice to ensure the metal
gasket is firmly compressed.
Wait a minimum of five minutes then torque the pattern shown
to 10.2 N-m (90 in-lbs).
D-9
VS Series Helium Mass Spectrometer Leak Detector
2. Spectrometer pressure is >1E-4 due to a misaligned, incorrectly assembled or
contaminated total pressure plate:
D RA F T 6/ 4/ 11
a. Disassemble the spectrometer header from the spectrometer body and inspect the
total pressure plate (Figure D-8 on page D-9, Figure D-10 and Figure D-11).
D-10
Figure D-10
Spectrometer (Ion Source Assembly)
Figure D-11
Spectrometer Header: Decomposition
VS Series Helium Mass Spectrometer Leak Detector
b. Ensure the total pressure plate is electrically isolated from ground and other points of
contact.
c. Ensure that the total pressure plate wire is securely fastened to total pressure plate
and feed through pin.
Figure D-12
Pre-Amp Board - Measurement Points
a. Measure on the pre-amp board the voltage present at the header pin labeled PRESS
(spectrometer pressure output).
b. Carefully remove the ion source power cable (warning high voltage present), if the
measured voltage is greater than 1.5 VDC.
c. Re-measure the voltage at the PRESS pin. The voltage should be 0. If a constant
steady state voltage is measured, replace the pre-amp board.
CAUTION
Many components of the leak detector are static sensitive.
Wear a grounding device when performing any maintenance
on the leak detector, especially when performing maintenance
of static sensitive parts, such as circuit boards and the
spectrometer.
Table D-1 gives the spectrometer header, pre-amp board J1 connector pin assignments.
Table D-1
Spectrometer Header, Pre-amp Board J1 Pin Assignments
Chamber
Repeller
Filament #1
Filament #1
Filament #2
Filament #2
D-11
D RA F T 6/ 4/ 11
3. Pre-amp board failure (Figure D-11 and Figure D-12):
VS Series Helium Mass Spectrometer Leak Detector
Both Filaments Burnt Out error message appears on the front panel display
Both Filaments No Emission error message appears on the front panel display*
*Occurs for PD03 and PR02 (manufactured after Spring 2009).
This error can also occur during normal operation.
Causes/Resolutions
1. Both filaments are an open circuit due to age and prolonged normal everyday use:
❑ Spectrometer - Pre Amp Board (Figure D-11 and Figure D-12 on page D-11):
Measure the J2 connector filament resistance (with power off) (filament resistance <
.5 Ohm). If filaments are open circuit, open the spectrometer and replace the
filaments. See Section 10 “Filament Replacement”.
2. Ion Source board failure:
D RA F T 6/ 4/ 11
a. Ensure that the ion source board cable is secure at both the spectrometer and ion
source board.
b. If both filaments failed prematurely and both were replaced:
❑ Run a calibration (Figure D-11 on page D-10 and Figure D-12 on page D-11) and
after a successful pass, measure the voltage of the filament that is in use on the
Pre-Amp board J2 connector (Spectrometer Header). The filament voltage should
= 1.4 to 1.9 VDC with < 30 mV of noise (AC). If not, go to the Manual Tuning
screen and adjust the Emission Current until the AC ripple is < 50 mV and the
filament voltage is 1.4 to 1.9 VDC.·
❑ Select Setup Menu > Manual Tuning screen and note the Emission Current.
Measure the emission current (actually VDC) on the Ion Source board at test
points EMISS T.P and TP101 FIL GND. The measured voltage should correspond
to the observed reading in the Manual Tuning screen (within +/- 10%). If the
emission current <.3 mA, the system senses no emission current, indicating that
the filament is defective. Replace the filament.
NOTE
Ion Source Bd. Assy. Rev G May 2007 the measured emission
current will be a factor of 10 lower than observed emission. For
example, Manual Tuning screen - Emission Current = .702, if
measured on the Ion Source board = .0702.
c. Adjust the emission in ether direction; the measured value should track the
displayed value. If the measured emission current (voltage) is fixed at 1.5 to 3.0
VDC, replace the Ion Source board due to a failed emission regulation circuit:
❑ Remove the spectrometer header and inspect filaments for distortion and loss of
thoria coating due to over heating; replace if needed
d. Select Setup Menu > Manual Tuning screen and verify that the Emission or Ion is 0.
Measure (with power on) the ion voltage (with respect to ground) on the pre-amp
D-12
VS Series Helium Mass Spectrometer Leak Detector
board, J2 connection, pins labeled REP or CHA. The voltage range is from 198 to
287 VDC. If no high voltage is present replace the Ion source board.
e. If the high voltage is present and there is continuity for both filaments, verify if the
filament voltage is present at either of the two filaments (Filament Voltage 1.3 to 1.8
VDC). If there is no filament voltage or < 1.0 VDC is measured replace, the ion
source board.
3. Contaminated spectrometer - Emission current cannot be established - ion source:
a. Refer to step 2b for steps to measure filament resistance, ion voltage and filament
voltage. Verify (Figure D-12 on page D-11 and Figure D-10 on page D-10):
❑ Continuity for both filaments.·
❑ Reverify that the ion and filament voltage are available at the spectrometer. If yes,
b. Select Setup Menu > Manual Tuning and note the Emission Current setting. Measure
the emission current on the Ion Source board (Figure D-13 on page D-16) at test
points EMISS T.P and TP101 FIL GND. The measured voltage should correspond to
the noted reading (within +/- 10%). If emission current < .3 mA or zero, inspect the
spectrometer for contamination (if necessary, replace the ion source). See
Figure D-10 on page D-10 and Figure D-11 on page D-10.
D.2 Operational Failures
NOTE
A flashing C indicates that the leak detector has failed a
calibration attempt or that the calibration routine was
interrupted. For example, by pressing Vent during the
calibration routine and going back into Test.
Gain Too High error message and a flashing C appear on the front panel display after
a calibration attempt.
Insufficient helium signal during calibration - Gain > 6.9
Causes/Resolutions
1. Calibrating to the wrong calibrated leak or the leak rate value was incorrectly entered:
a. Open the Calibration Set Up screen and verify that the correct calibrated leak is
selected.
b. Select Setup Menu > Maintenance Option > Internal Calibrated Leak and verify that
the programmed parameters match the calibration certificate or physically check the
information on the label for the internal standard leak (Figure D-5 on page D-6).
2. Internal or external calibrated leak is damaged/destroyed. If the:
❑ Internal full calibration failed; try calibrating to an external calibrated leak.
D-13
D RA F T 6/ 4/ 11
continue to the step b.
VS Series Helium Mass Spectrometer Leak Detector
❑ External calibration is successful turn on the internal calibrated to validate the leak
rate and vice versa.
3. Calibrated leak valve or valve driver board is defective:
❑ Verify that the valve error symbol is present. If:
❑ Yes -Measure the resistance of V6 (resistance ~ 115 Ohms). It shorted or open,
replace V6 (Figure D-5 on page D-6).
❑ No - Open the Manual Valve screen and toggle the standard leak valve and listen
for activation. If activation is not heard, check the connection between V6 and its
valve.
4. Filament failure - not generating enough electrons for proper ionization to occur:
❑ Switch filaments and re-calibrate and if the second filament fails, inspect the ion
source and filaments and replace (Figure D-11 on page D-10). See Section 10
“Filament Replacement”.
❑ Measure the voltage with respect to filament (1 and 2). The voltage should be 88
D RA F T 6/ 4/ 11
VDC ±1%; if not replace ion source board.
5. Contaminated ion source:
❑ Inspect ion source and if contaminated (discoloration), clean ion source or replace
(Figure D-10 on page D-10).
6. Electrometer failure (spectrometer):
a. Select Setup Menu > Manual Tuning. Note, the offset reading (mV); if the offset
reading is -1000000/-1000000, perform the following:
❑ On the J3 connector of the pre-amp board (Figure D-12 on page D-11), measure the
voltage (with respect to ground) on the pin labeled OUT. The voltage should be in
mV DC with no leak present.
If the voltage reads:
❑ -11.00 VDC, remove the ion source voltage cable (J1 connector) on the pre amp
board (Figure D-12 on page D-11) and re-measure the OUT pin voltage.
❑ -11.00 VDC, with no high voltage or filament voltage, the electrometer is
defective. Replace the spectrometer header or entire spectrometer.
Extended Sensitivity (Gain) with Range Stop/Manual Range
The VS Series leak detector has an MDL sensitivity of 5E-12 std cc/sec He when the unit
ships from the factory. In order to maintain this sensitivity requirement the gain calibration
cannot be greater than 6.9.
❑ This sensitivity specification might be too stringent for end users that, for example,
only require an E-7 to E-8 std cc/sec He reject set point.
Activating the range stop extends the sensitivity requirements for calibration, thus
eliminating unnecessary calibration errors (see Table D-2).
D-14
VS Series Helium Mass Spectrometer Leak Detector
Table D-2
Range Stop/Sensitivity Requirements
Range Stop
Max Gain
MDL
OFF
6.9
5.00E-12
ON at
-11
6.9
5.00E-12
-10
10
5.00E-11
-9
20
5.00E-10
-8
50
5.00E-09
There are guidelines for activating or setting the Range Stop or Manual Range after a Gain
Too High error condition occurs:
Range Stop has been applied, the Range Stop value cannot be lowered (example:
changing E-8 to E-9). The out of range symbol (<>) appears, thus not allowing the
change.
❑ Once the Range Stop has been activated it cannot be deactivated. The lock symbol
appears on the front display:
❑ De-activating the Range Stop can be achieved if spectrometer maintenance has
been performed; for example, changing the filaments or ion source. Perform a full
internal calibration. Once the calculated gain <=6.9 after a full calibration
procedure the Range Stop can be turned off.
❑ Manual Range - Gain Too High
❑ De-activate Manual Range
❑ Select the desired Range Stop and activate if it less than the previous Manual
Range value (See Table D-2)
❑ Re-calibrate
❑ Calibration successful - activate Manual Range
NOTE
The Manual Range value cannot be lower than the Range Stop
value allowed by the max gain. The out of range symbol (<>)
appears, thus not allowing the change.
D-15
D RA F T 6/ 4/ 11
❑ When a calibration is complete and the gain has been calculated and the correct
VS Series Helium Mass Spectrometer Leak Detector
Gain Too Low error message and a flashing C appear on the front panel display after
a calibration attempt
Too much helium signal during calibration - Gain <.8.
Causes/Resolutions
1. Calibrating to the wrong calibrated leak or the leak rate value was incorrectly entered:
a. Open the Calibration Set Up screen and verify that the correct calibrated leak is
selected.
b. Select Setup Menu > Maintenance Option > Internal Calibrated Leak and verify that
the programmed parameters match the calibration certificate or physically check the
information on the label for the internal standard leak (Figure D-5 on page D-6).
2. Leak present in system:
❑ Leak check the system; concentrate around the internal calibrated leak,
spectrometer, turbo pump, mechanical pump and foreline connection.
D RA F T 6/ 4/ 11
3. Emission current set to high:
a. Select Setup Menu > Manual Tuning. Note the emission reading. The factory default
is .702 mA, but adjustments can be made. If the Emission is set for >1.0 mA it may
be necessary to turn it down.
b. Measure test points EMISS T.P and TP101 FIL GND (Emission current) on the Ion
Source board (Figure D-13). The measured voltage should correspond to the
observed reading in the Manual Tuning screen (within +/- 10%). If the measurement
voltage (Emission current) is > 2.0 VDC and cannot be adjusted, replace the Ion
Source board.
Figure D-13
Ion Source Board - Measurement Points
c. Turn down the emission current to .702 and perform a full calibration and verify that
it was successful.
D-16
VS Series Helium Mass Spectrometer Leak Detector
4. Foreline Pump - elevated foreline (test port) pressure:
❑ MR15 and PR02 models: Check the operating hours, which are found in the Fore
Pump menu. Inspect oil and if necessary change.
❑ MD30 models: Check the operating hours, which are found in the Fore Pump menu.
Investigate the maintenance schedule in the scroll pump manual. > 7000 hours
typically require cleaning and tip seal replacement.
Offset Fault error message and a flashing C appear on the front panel display after a
calibration attempt
Causes/Resolutions
1. Defective electrometer (spectrometer assembly):
a. Go to the Manual Tuning screen and observe the first offset value (uV).
b. Power off and remove front and back covers.
d. Power unit back up.
e. Place the leak detector in Hold or Vent.
f.
On the Pre-Amp board, measure the voltage with a DMM the pin labeled OUT
(electrometer output) with reference to ground.
The voltage should be in the mV DC range. Verify if the voltage reading is in V and
matches the large offset reading observed prior in the Manual Tuning screen.
g. Carefully remove the Ion Source (high voltage) cable from the pre amp board and
re-measure the electrometer output.
If the large voltage reading (-500mV to -11 VDC) is still present in the absence of the ion
source high voltage and the filament voltage the electrometer is defective: Replace the
spectrometer header assembly or the entire spectrometer assembly.
2. Defective Pre-Amp board (A/D converter-corrupted):
a. Place the leak detector in Hold or Vent.
b. On the Pre-Amp board measure the voltage with a DMM the pin labeled OUT
(electrometer output) with reference to ground:
❑ Confirm that the electrometer output is approximately between -20 to +20mV
DC.
❑ Place the leak detector in Test and activate the internal standard leak.
❑ Verify that the electrometer output is approximately between -20 to -100mV.
❑ Attempt another full internal calibration. If the calibration aborts to an Offset Fault
condition go into the Manual Tuning screen and observe the first Offset reading.
The Offset reading should be between -20000 to +20000 uV for a normal
operating Pre-Amp board.
D-17
D RA F T 6/ 4/ 11
c. Remove the aluminum cover of the spectrometer and reconnect the ion source and
pre-amp cables and verify that the pre-amp going to the Mother board is secure.
VS Series Helium Mass Spectrometer Leak Detector
c. Replace the Pre-Amp board or Spectrometer Header assembly if the observed Offset
reading is abnormally higher (ex. -1000000 to -10000000 uV) than what was
measured above.
High Background error message and a flashing C appear on the front panel display
after a calibration attempt
Causes/Resolutions
1. Helium background is >1E-5 std cc/sec He in Test (ContraFlow) or E-7std cc/sec He in
Fine Test (Midstage):
a. This is sometimes due to leak checking parts that have gross leaks thus saturating the
leak detector with helium:
❑ MR15 - Open the gas ballast on the DS302 for 5 minutes and then shut off the gas
ballast and re-calibrate. Repeat the process, if necessary, until the leak detector
completes a full internal calibration.
❑ MD30/PD03 - Place a light Nitrogen purge in the test port of the leak detector
D RA F T 6/ 4/ 11
and throttle the Nitrogen until the leak detector transfers into Test or Fine Test for
several minutes. Repeat the process, if necessary, until the leak detector
completes a full internal calibration.
❑ PR02 - Remove the test port cap or plug and place the leak detector into Test and
run for several minutes at atmospheric pressure. Repeat the process, if necessary,
until the leak detector completes a full internal calibration.
b. Possible leaks in the foreline connections or bellows:
❑ Inspect and fix - leak check foreline.
c. Defective foreline pump (MD30, MR15 & PD02 models):
❑ Activate a High Pressure Test in the Leak Rate Ranging Menu with the test port
blanked off and observe the test port pressure after twp minutes. A typical baseline
pressure of 10 mTorr should be achieved; 100 mTorr or higher indicates a poor
performing primary pump.
d. MD30/PD03 models only - High ambient helium background due to poor helium
management; excessive spraying of helium and poor ventilation:
❑ MD30 - Plumb in a nitrogen purge (15 sccm or 2 psi) at the inlet of the scroll
pump. Verify that the test port pressure is <100mTorr while in Test.
❑ PD03 - Verify that the diaphragm pump is functional, electrically (running) and
creating a vacuum.
D-18
VS Series Helium Mass Spectrometer Leak Detector
No Ion Peak error message and a flashing C appear on the front panel display after a
calibration attempt
Output from A/D converter on the pre-amp board is constant (no- change in reading).
Causes/Resolutions
1. Cable (w/RJ45 connectors) from Pre-Amp board to motherboard disconnected:
❑ Check the cable and re-calibrate.
2. Pre-Amp board failure (Figure D-12 on page D-11):
a. Measure the voltage, with respect to ground, on the pre-amp board J3 connector
OUT pin.
b. Monitor the output voltage during the calibration routine.
d. Enter the command: 'AD_READ @ . CR 1 SECS MANY
The following response appears (example):
8390438...8391004...8390710...8390937 (continues until ESC is entered).
e. Perform a full calibration and note the electrometer output voltage. The voltage
should be scaling up and down as the ion voltage is scanning. The same should be
happening for the A/D output.
f.
If the:·
❑ Response back from the A/D is not changing, the A/D on the Pre-Amp board is
defective. Replace the Pre-Amp board.
❑ Electrometer was not responding during the calibration, measure and verify that
+/- 12 VDC is available on the Pre-Amp board J3 connection.
3. Electrometer failure (spectrometer):
❑ If +/- 12 VDC is:·
❑ Not measured, replace the Pre-Amp board.
❑ Available on the Pre-Amp board, use the same troubleshooting method in step 2.
Both the electrometer and the A/D will not respond, as the electrometer has
failed. Install a new spectrometer header.
D-19
D RA F T 6/ 4/ 11
c. Monitor the A/D output from the Pre-Amp board by connecting a laptop to the leak
detector using HyperTerminal.
VS Series Helium Mass Spectrometer Leak Detector
Leak Detector will not go into Test
Causes/Resolutions
1. Panel Lockout:
❑ Select the Control Panel Access menu. Verify that Panel Lockout is enabled.
2. Test Port TC defective:
❑ The leak detector will not go into Test if the test port TC is open circuit. Measure the
resistance of the TC. (Figure D-5 on page D-6). Any combination of the 4 pins
(resistance = 1.5 Ohms).
3. Pumping down against a gross leak - test port pressure > 10 Torr:
a. Blank off the test port and verify that the leak detector goes into Test.
b. Connect the item for leak checking and verify that all fixturing connections are tight.
4. Front Panel Display - Test button defective:
D RA F T 6/ 4/ 11
a. Connect a laptop to the leak detector using HyperTerminal.
b. Enter the command: ROUGH and verify if the leak detector goes into Test. If the
command worked, replace the front panel display.
5. Valve Driver board failure:
a. Communication failure between motherboard and valve driver board:
❑ Press Test and if ROUGHING does not appear on the front display, verify the
RS-232 communication cable from the motherboard to the Valve Driver board
(Figure D-4 on page D-5)is secure. If it is secure, the Test button is defective.
b. Defective valve driver channel:
❑ Verify if a valve error symbol is present on the front panel display:
❑ Open the Manual Valve Control screen and toggle the Vent valve or Contra Flow
Valve.
❑ Verify that the valves are heard turning off and on. If this does:
❑ Not occur, replace the Valve Driver board.
❑ Occur, proceed to the next step.
6. Foreline pump failure:
a. Blank off test port and press Test.
b. Verify the test port pressure. The pressure should go down to <1E-3. If no gross leak
was found in step 3, replace the foreline pump.
7. I/O Board enabled:
❑ Disable the Parallel Enable signal.
D-20
VS Series Helium Mass Spectrometer Leak Detector
Leak Detector will not go into Vent
Causes/Resolutions
1. Vent Lockout button active:
❑ Open the Control Panel Access screen and verify that Vent Lockout is active.
2. Panel Lockout button active:
❑ Open the Control Panel Access screen and verify that Panel Lockout is active.
3. Vent button - front panel display button active:
❑ Select Setup Menu > Manual Valve Control and toggle the vent valve. If leak detector
vents, the Vent button is defective, replace the front panel.
4. Vent Valve is defective:
a. Verify that the valve error symbol is present on the front panel display.
5. Valve Driver board failure:
a. Disconnect the V7 (Vent Valve) connector, disconnect V4 and V5 and place V5
connector on V7 (Vent Valve).
b. Open the Manual Valve Control screen and toggle the Midstage Valve and verify if
the vent valve toggles. If the vent valve toggles, replace the Valve Driver Board due
to a bad valve channel (Figure D-4 on page D-5).
D-21
D RA F T 6/ 4/ 11
b. Using an Ohmmeter, verify the vent coil resistance is between 9 and 10 Ohms. If the
coil's resistance is open or shorted replace the valve.
VS Series Helium Mass Spectrometer Leak Detector
D.3 Performance Issues
High helium background - after a full calibration with the test port blanked off
Causes/Resolutions
1. Leak at the test port:
a. Blank off the test port, press Test and let the background stabilize.
b. Open the Manual Valve Control screen and turn off the Midstage valve. Verify that
the leak rate lowers.
c. Clean and leak check the test port.
2. Vent Valve leak:
a. Perform a full calibration and let the background stabilize.
b. Zero out the background and leak check the vent valve (Figure D-5 on page D-6).
D RA F T 6/ 4/ 11
3. Filament condition:
❑ Switch filaments and perform a full calibration.
4. Contaminated ion source/spectrometer: Both filaments 1 and 2 produce a high helium
background:
a. Open the spectrometer and inspect the ion source for contamination (carbon
buildup) or noticeable discoloration (Figure D-10 on page D-10).
b. Clean or replace the ion source and filaments (Figure D-11 on page D-10).
5. Electrometer offset /noise drift:
a. Measure the voltage, with respect to ground, on the pre-amp board (Figure D-12 on
page D-11), J3 connector OUT pin.
b. Monitor the output voltage (low mV range).
c. Unplug the P1 (ion source bd. cable) cable and observe if the leak rate is 0.0E-11
and electrometer output voltage <= 5mV DC. If the leak rate and output voltage
remain unchanged or very unstable replace spectrometer header or entire
spectrometer.
6. Foreline pump (MD30) failure:
❑ Replace the tipseal.
Unstable leak rate reading - (Test and Fine Test modes of operation)
Causes/Resolutions
1. Leak in system:
❑ Perform a full calibration, blank off test port and leak check the system.
2. Filament - unstable/damaged:
❑ Switch filaments and verify if instability has been eliminated.
D-22
VS Series Helium Mass Spectrometer Leak Detector
3. Contaminated ion source: If both filaments 1 and 2 produce an unstable background
reading (Figure D-11 on page D-10):
a. Open the spectrometer and inspect ion source for contamination (carbon buildup)
or noticeable discoloration (Figure D-10 on page D-10 and Figure D-11 on
page D-10).
b. Clean or replace ion source and filaments.
4. Electrometer - cooler failure (Figure D-11 and Figure D-12 on page D-11):
a. Verify that 5.0 VDC is present on the pins labeled H+ and H on the Pre-amp board.
b. Power off the unit and measure resistance of pins H(+) and H(-); resistance should
be between 15 to 45 Ohms.
c. Replace the spectrometer header (Figure D-8 on page D-9) or entire spectrometer if
the voltage or resistance is not within specification (Figure D-4 on page D-5).
5. Foreline pump failure:
D RA F T 6/ 4/ 11
a. Lock system into High Pressure Test and perform a full calibration.
b. Let the system stabilize and verify instability. If the foreline pump is a:
❑ Rotary vein mechanical pump, drain and add new oil.
❑ Dry scroll pump, replace tip seal or pump module.
If needed replace foreline pump.
6. Ion Source board Emission Current noise regulation > 100 mVAC:
a. Open the Manual Tuning menu and adjust and measure the emission current
(Figure D-13 on page D-16), to minimize the emission current to < 30 mVAC.
b. If after adjustment, emission current noise is > 100 mV AC:
❑ Switch filaments: if no change,
❑ replace ion source board, if no change (noise > 100 mVAC),
❑ replace the ion source (Figure D-10 on page D-10).
D-23
VS Series Helium Mass Spectrometer Leak Detector
Leak detector will not transfer into Fine Test (Midstage) model
Causes/Resolutions
1. Background greater than 1.5E-7 std cc/sec He (leak/contamination):
❑ Perform steps in order until background normailzes:
a. Leak in system - leak check.
Open the Manual Tuning screen and verify high negative offset values.
b. Switch filaments and calibrate.
c. Contaminated ion source - clean spectrometer and replace ion source (Figure D-10
on page D-10 and Figure D-11 on page D-10).
2. Test port pressure > 100 mTorr - defective foreline pump:
❑ Perform steps in order until pressure normailzes:
a. Replace foreline pump.
D RA F T 6/ 4/ 11
b. Rotary vein mechanical pump - drain and replace oil.
c. Dry scroll pump - replace tip seal or pump module.
3. Test Port TC:
❑ Not calibrated correctly
a. Open the Gauge Calibration screen and ensure that the spectrometer pressure <
1E-5 Torr and that the leak detector is in Test.
b. Open the Manual Valve Control screen, turn off the Contraflow and turn on the
Midstage valve.
c. Open the Gauge Calibration screen and let the system stabilize for a few minutes.
d. Press the Test Port Vacuum button and ensure CAL OK appears and the Test Port
Pressure is reading < 1.0E-3 Torr.
e. Press Vent, open the Gauge Calibration screen, press Test Port ATM and ensure CAL
OK appears and that the Test Port Pressure is reading 7.6E+02 Torr.
f.
Open the Home screen (test port blanked), press Test and verify that the leak
detector transfers into Fine Test.
❑ Contaminated -In stressful environments (Figure D-5 on page D-6):
❑ Remove the TC and fill and soak for several minutes with Acetone.
❑ Fill and rinse two to three times with isopropyl alcohol.
❑ Install the TC and verify if the system goes into Fine Test. Then calibrate the TC at
atmosphere and vacuum.
If necessary replace TC.
D-24
VS Series Helium Mass Spectrometer Leak Detector
4. Diaphragm Pump (PD03):
❑ Disconnect hose to diaphragm pump inlet and verify system and pump motor are
making audible sounds.
❑ Check diaphragm pump for damaged diaphragm and replace if required.
❑ Replace diaphragm pump (especially pump HR5 > 15000 hours)
5. V8 (PD03 only) – Exhaust valve not activating:
❑ Verify on the front panel display that the valve error symbol is flashing – replace V8,
❑ Verify in the Manual Valve menu that V8 indicates a failure (red circle) – replace V8.
❑ Valve Driver Board failure – (remove covers) while in Test, disconnect power
D RA F T 6/ 4/ 11
connections for V8 and measure if 24 VDC is present; if not replace the Valve Driver
board.
D-25
VS Series Helium Mass Spectrometer Leak Detector
Front Panel Display - Difficulty selecting menus or in activating/deactivating features/
options
Causes/Resolutions
Front Panel Display is out of calibration:
❑ Re-calibrate front panel by:
a. Turning off leak detector.
b. Place and hold a finger on front panel and hold; power up unit.
c. A blue screen appears with the message Touch all Crosshairs. In every corner of the
screen a crosshair appears; touch all four crosshairs.
D RA F T 6/ 4/ 11
d. A second message appears Accept Calibration; select Accept.
D-26
A
3
2
1
P101
R2124301
R2124301
R2135301
R2124301
3
2
1
3
2
1
2
3
2
1
1
2
3
P200
1
2
3
P400
3
2
1
P1-IS
FIL & HV CONN
3
2
1
24VDC
24VDC
1
2
3
J400
J1
TP TC
1
2
3
4
J200
J103
R J 45- 10x10
FIL & HV CONN
J4A
P4
PR1
JR1
PREAMP
2
4
6
8
10
12
14
16
18
20
22
24
26
28
30
32
34
36
38
40
42
44
46
48
50
52
54
56
58
60
62
64
J2A/B
1
3
5
7
9
11
13
15
17
19
21
23
25
27
29
31
33
35
37
39
41
43
45
47
49
51
53
55
57
59
61
63
R2125301
SPECTUBE
BODY
SCREW
#4
1
DB2 5 F PARALLEL I/O
ION SOURCE PCB, R2120301
R2126301
P4
J4
WIRELESS CONTROL PCB,
R2541301, (OPTIONAL)
DISCRETE I/O PCB, R2111301
(OPTIONAL)
SPECTROMETER TUBE
24VDC
J101
FLAPPER
BOX
J102
J203
USB_B
PREAMP PCB, R2108301
1
2
3
4
24VDC
J401
J201A/B
USB_2A
1A
2A
3A
4A
5A
6A
7A
8A
9A
10A
1
2
3
4
5
6
7
8
9
10
R2124301
P401
Shell2
Shell1
GND
D+
DVCC
P2
P1
4
3
2
1
10
9
8
7
6
5
4
3
2
1
10
9
8
7
6
5
4
3
2
1
1
2
3
4
5
6
7
8
9
10
1/2 R J 45- 8x 8
J100
R J 45- 10x10
J300
P300
P2
1
3
5
7
9
11
13
15
17
19
21
23
25
27
29
31
33
35
37
39
41
43
45
47
49
51
53
55
57
59
61
63
J1A/B
PRE-AMP
2
4
6
8
10
12
14
16
18
20
22
24
26
28
30
32
34
36
38
40
42
44
46
48
50
52
54
56
58
60
62
64
USB_A
1
2
3
4
5
J200
1
2
3
4
5
R2552301
R2148301
2
1
P501
5
4
3
2
1
P304
5
9
4
8
3
7
2
6
1
P301_1
1
2
3
4
PXBT
ISO-LEAK
RATE
ISO-RS232
R2142301
CAL TEMP
BLK
1
2
3
4
5
6
7
8
1
2
3
4
5
6
7
8
RED
1
2
3
4
PXBTR1
1
2
3
4
5
6
7
8
BLU
1
2
3
4
5
6
7
8
GREY
VALVE
DRIVER
TURBO
CTRL
4
3
2
1
J400
J302A
8
1
8
1
J302B
1
2
3
4
XBTR1
8
1
J101A
8
1
J101B
4
3
2
1
P400
1
2
3
4
J301
J600
1
2
3
4
5
6
7
8
CN2
3
2
1
1
2
3
- P2 -BLK
FOR
BANANA
JACKS
RS-232
8
7
6
5
4
3
2
1
24VDC
R J 4 5 -8 x8
+ P1 -RED
1
8
J1
J2
P303
1
2
3
4
5
6
7
8
P401
1
2
3
4
5
6
P3
J3
V1 to V5
2
1
J1-1/2
R2431301
R2135301
2
1
V2
CTRFLW
FORE
V3
J4-1/2
R2432301
J3-1/2
1
2
3
4
P301
TMP SENSOR
PCB,
R2114301
CALIBRATED LEAK
V1
J2-1/2
R I N G #10
V4
J5-1/2
R2124301
1
V5
V7
TP TC HEADER
1
CGND_PE
#10
RS-232
24VDC
+
V6
CAL
- +
V8
24V/167mA
1
NUM
ECO
DFT
CHK
D A TE
R EV
R2123301-3
1
DP BACKUP VALVE
NKVF334-50
J8-1/2
MODEL 969-9518
TURBO-V70 PCB
24VDC CONTROLLER
3 -PH POWER
JM
B LK
B LK
B LK
B
1
A
W HT
B LK
PEM-L11
PEM-L
PEM-N11
1
R2123301-1
W HT
1
CHASSIS
WASHER
LUG
NUT
R3369301
W HT
CGND1
ASSY
LUG
NUT
GND1_PE STUD
TURBO-V70
M6
CGND_PE
PE-GND
PS-GND
PS-GND
G RN
J6-1/2
4
3
2
1
P5
2
3
4
P3
1
1
2
3
4
5
LOCK WASHER
FLAT WASHER
P2
VENT
VALVE BLOCK
MIDSTG
J5
J1
J7-1/2
4
3
2
1
2
3
4
J31
1
2
3
4
5
PM
R2124301
R2123301-2
R2134301
T-CGND
STUD
1
+V
+V
G ND
-V
-V
N
L
D RA F T 6/ 4/ 11
A
THE PCBs.
R2124301
J301
REAR PANEL
ISO_RS232
DB9M
V6 to V8
R2104301 VALVE
DRIVER PCB
J4
P4
9
8
7
6
5
4
3
2
1
CONN SCREW 9
SP-320-24
AC-DC POWER
SUPPLY
1
2
3
4
R2136301
5
9
4
8
3
7
2
6
1
ISO_ANALOG LEAK RATE
1
1
8
7
6
5
4
3
2
1 GRAY
P1
3
2
1
1
2
3
4
5
6
P503
GRN
P
P301
R2129301
R2145301
R2133301
R2130301
1
2
3
J401
8
1
J303
P2-VD
24VDC
RS-232
1
2
3
4
5
6
7
8
1
2
3
4
5
6
J503
DGND
FRT PNL
OVERLAY
R2127301
CN2
CN1
DC-AC
INVERTER
HV
BLEEDING
WIRE
CHASSIS SCREW
VENT
1
2
3
4
5
6
J
A
R2146301
1
2
3
4
BLK
1
2
3
4
5
6
7
8
P302A
RED
1
2
3
4
5
6
7
8
P303B
BLUE
1
2
3
4
5
6
7
8
P101A
GRAY
P101B
TFT LCD
DISPLAY
BACKLIGHT
CONTROL
1
2
3
4
SPEAKER
SPK
USB
RS-232
J300
TOUCH
PANEL
J601
COLOR TFT LCD DISPLAY
TOUCH PANEL
TEST
OVERLAY
LCD SUB-ASSY
FRONT PANEL SUB-ASSY
ESD SCREEN
MOTHERBOARD PCB, R2101301
1
2
3
4
JXBT
FRONT PANEL CTRL
J100A
5
9
4
8
3
7
2
6
1
FFC CABLE
NOTE: ALL CONNECTIONS ARE SHOWN FROM THE COMPONENT SIDE OF
RS-232
R2140301
J2
DISCRETE I/O
CPU PCB
J100B
1 / 2 R J4 5 -8 x8
GREEN
1/2 R J 45- 8x 8
P100A
1
2
J501
5
4
3
2
1
J304
YELLOW
T
YELLOW
8
7
6
5
4
3
2
1
P200
P100
P7
P100B
#10
5
9
4
8
3
7
2
6
1
RS-232
J500
P500
R2123301-41
8
7
6
5
4
3
2
1
D B 9F
P300
R2149301
2
Shell2
Shell1
GND
D+
DVCC
P2
P1
4
3
2
1
5
9
4
8
3
7
2
6
1
8
FFC CABLE
WIRELESS MODULE
AC4424-100
R2128301
1
2
3
4
5
6
7
8
1
1
2
3
4
1
2
3
4
1
2
3
4
1
2
3
4
J2
A
1
2
3
4
5
6
7
8
9
10
11
A
2
3
4
5
6
7
8
9
10
11
C
E
13
25
12
24
11
23
10
22
9
21
8
20
7
19
6
18
5
17
4
16
3
15
2
14
1
1A
2A
3A
4A
5A
6A
7A
8A
9A
10A
B
F
P2 1
8
1
2
3
4
5
6
7
8
10
9
8
7
6
5
4
3
2
1
10
9
8
7
6
5
4
3
2
1
1
2
3
4
5
6
7
8
1
1
2
3
4
5
6
7
8
B
F
1
2
3
P4
P5
1
1
CB-L1
C 1
6
5
4
CB-L2
1
1
1
1
2
P2FA
1
2
S1
RED
W HT
4
3
2
1
6A
P8
CB1
J_24VDC
1
1
4
3
2
1
1
1
2
P-DPF
1
2
P-DF
1
2
P-TPF
1
2
PF1 A
MGND
P13
3
2
1
3
1
2
JF1A
1
P10
DRY
PUMP
FAN_3
DRY
SCROLL
PUMP
Pa ge Modify Da te = Thur s da y, January 08, 2009
1
2
JF3A
2
TURBO
PUMP
FAN_2
SPECTUBE
FAN_1
J-DF DIAPHRAGM
1
PUMP
1
2
3
INLET,C20
AC MOTOR
J -TPF
B LK
RED
W HT
TA-4 5 DPST
SCHURTER, EF12
3
2
1
EXTENSION 24VDC CABLE,
R3XXXXXXX
R2124301
L_IN
N_IN
EMI FILTER
L_OUT
PE_IN
POWER ENTRY MODULE
N_OUT
PE_OUT
J1 1
MOTOR START
CAPACITOR
1
1
L
N
PE
DRAWN
J . K LE B A NOV
C H E CKED
XX
A P P ROV E D
XX
A P P ROV E D
XX
W H E R E USED
L .D.
D ate
6/16/08
D ate
XX
D ate
XX
D ate
XX
Sheet
1
of
3
R3YYY-INT
N U MBER
121 H ar twel l Ave., Lexi ng ton, MA 02421
Varian Vacuum Technologies
VS PD03x
INTERCONNECT BLOCK-DIAGRAM
CLASS
S i ze
C L A S S NO. D
T i tle
T H I S D O C U M E N T CONTA INS P ROP RIE TA RY INFORM A TION OF V A RIA N A S S OCIA TE S .
E X C E P T A S A UTHORIZE D B Y V A RIA N IN A S E P A RA TE WRITING, THIS DOCUM E NT
A N D I T S I N F ORM A TION S HA LL NOT B E COP IE D, US E D OR DIS CLOS E D TO OTHE RS ,
A N D S H A LL B E RE TURNE D TO V A RIA N UP ON RE QUE S T.
1
1
PEM-N
PGND1
3
PLUG, EN60320,C19
20A, DETACHABLE CORD
PLUG,MALE (CUNTRY DEPENDABLE)
1
1
GREEN
1
2
3
4
5
6
7
8
9
10
11
12
1
2
3
4
5
6
7
8
9
10
11
12
12
11
10
9
8
7
6
5
4
3
2
1
12
11
10
9
8
7
6
5
4
3
2
1
YELLOW
10
9
8
7
6
5
4
3
2
1
1
2
3
4
5
6
7
8
9
10
1
2
3
4
5
6
7
8
9
10
1
2
3
4
5
6
7
8
9
10
1 / 2 R J4 5 -8 x 8
1 / 2 R J4 5 -8 x8
1 / 2 R J4 5 -8 x 8
1 / 2 R J4 5 8 x 8
1
2
1
2
1
2
1
2
1
2
C
E
2
1
MMCX
2
3
D
1
2
2
1
R F-F
1
4
1
2
2
1
2
1
D
2
1
2
1
2
1
Figure E-1
2
1
10
1
2
1
1
10
1
2
2
1
1
8
1
1.0
R ev
A
VS Series Helium Mass Spectrometer Leak Detector
Appendix E. Interconnection Diagram
Interconnection Diagram
E-1
D RA F T 6/ 4/ 11
VS Series Helium Mass Spectrometer Leak Detector
This page intentionally left blank.
VS Series Helium Mass Spectrometer Leak Detector
Req
uest for Return Health and
Safety Certification
Vacuum Products Division
Instructions for returning products
Dear Customer:
Please follow these instructions whenever one of our products needs to be returned.
1) Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to identify
all products that have pumped or been exposed to any toxic or hazardous materials.
2) After evaluating the information, Agilent Technologies will provide you with a Return Authorization (RA) number via email or fax,
as requested.
Note: Depending on the type of return, a Purchase Order may be required at the time the Request for Return is submitted. We
will quote any necessary services (evaluation, repair, special cleaning, eg).
3) Important steps for the shipment of returning product:
x Remove all accessories from the core product (e.g. inlet screens, vent valves).
x Prior to shipment, drain any oils or other liquids, purge or flush all gasses, and wipe off any excess residue.
x If ordering an Advance Exchange product, please use the packaging from the Advance Exchange to return the defective
product.
x Seal the product in a plastic bag, and package product carefully to avoid damage in transit. You are responsible for loss or
This page intentionally left blank.
damage in transit.
x Agilent Technologies is not responsible for returning customer provided packaging or containers.
x Clearly label package with RA number. Using the shipping label provided will ensure the proper address and RA number
are on the package. Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will
be returned.
4) Return only products for which the RA was issued.
5) Product being returned under a RA must be received within 15 business days.
6) Ship to the location specified on the printable label, which will be sent, along with the RA number, as soon as we have received
all of the required information. Customer is responsible for freight charges on returning product.
7) Return shipments must comply with all applicable Shipping Regulations (IATA, DOT, etc.) and carrier requirements.
RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION:
EUROPE:
Fax:
00 39 011 9979 330
Fax Free: 00 800 345 345 00
Toll Free: 00 800 234 234 00
[email protected]
NORTH AMERICA:
PACIFIC RIM:
Fax:
1 781 860 9252
Toll Free: 800 882 7426, Option 3
[email protected]
please visit our website for individual
office information
http://www.DJLOHQW.com
Pg 1/3
VS Series Helium Mass Spectrometer Leak Detector
Vacuum Products Division
Request for Return Form
(Health and Safety Certification)
Please read important policy information on Page 3 that applies to all returns.
1) CUSTOMER INFORMATION
Company Name:
Contact Name:
Tel:
Email:
Fax:
Customer Ship To:
Customer Bill To:
Europe only: VAT reg. Number:
USA/Canada only:
2) PRODUCT IDENTIFICATION
Product Description
Agilent P/N
Agilent S/N
Taxable
Non-taxable
Original Purchasing Reference
3) TYPE OF RETURN (Choose one from each row and supply Purchase Order if requesting a billable service)
3A.
Non-Billable
3B.
Exchange
Billable
Repair
New PO # (hard copy must be submitted with this form):
Upgrade
Consignment/Demo
Calibration
Evaluation
Return for Credit
4) HEALTH and SAFETY CERTIFICATION This page intentionally left blank.
AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS,
RADIOACTIVE MATERIAL, OR MERCURY AT ITS FACILITY.
Call Agilent Technologies to discuss alternatives if this requirement presents a problem.
The equipment listed above (check one):
HAS NOT pumped or been exposed to any toxic or hazardous materials. OR
HAS pumped or been exposed to the following toxic or hazardous materials. If this box is checked, the following
information must also be filled out. Check boxes for all materials to which product(s) pumped or was exposed:
Toxic
Corrosive
Reactive
Flammable
Explosive
Biological
Radioactive
List all toxic/hazardous materials. Include product name, chemical name, and chemical symbol or formula:
________________________________________________________________________________________________________
NOTE: If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all
costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of
exposure to toxic or hazardous materials present in the product.
Print Name:
Authorized Signature: ……………………….
Date:
5) FAILURE INFORMATION:
Failure Mode (REQUIRED FIELD. See next page for suggestions of failure terms):
Detailed Description of Malfunction: (Please provide the error message)
Application (system and model):
I understand and agree to the terms of Section 6, Page 3/3.
Print Name:
Authorized Signature: ……………………….
Pg 2/3
Date:
VS Series Helium Mass Spectrometer Leak Detector
Vacuum Products Division
Request for Return Form
(Health and Safety Certification)
Please use these Failure Mode to describe the concern about the product on Page 2.
APPARENT DEFECT/MALFUNCTION
- Does not start
- Does not spin freely
- Does not reach full speed
- Mechanical Contact
- Cooling defective
- Bad feedthrough
TURBO PUMPS and TURBO CONTROLLERS
POSITION
PARAMETERS
Power:
- Noise
- Vertical
Current:
- Vibrations
-Horizontal
Temp 1:
-Leak
-Upside-down
-Overtemperature
-Other:
Temp 2:
-Clogging
………………….
OPERATING TIME:
ION PUMPS/CONTROLLERS
- Poor vacuum
- Main seal leak
Rotational Speed:
Inlet Pressure:
Foreline Pressure:
Purge flow:
VALVES/COMPONENTS
- Bellows leak
- Vacuum leak
- High voltage problem
- Solenoid failure
- Damaged flange
- Error code on display
- Other
- Damaged sealing area
-Other
- Cannot calibrate
LEAK DETECTORS
-No zero/high backround
INSTRUMENTS
- Gauge tube not working
- Display problem
- Vacuum system unstable
- Cannot reach test mode
- Communication failure
- Degas not working
- Failed to start
- Other
- Error code on display
- Other
SCROLL AND ROTARY VANE PUMPS
This
page
- Pump doesn’t start
- Noisy pump
(describe)
DIFFUSION PUMPS
intentionally
left blank.
- Heater failure
- Electrical problem
- Doesn’t reach vacuum
- Over temperature
- Doesn’t reach vacuum
- Cooling coil damage
- Pump seized
- Other
- Vacuum leak
- Other
Section 6) ADDITIONAL TERMS
Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent
Technologies Vacuum Product Division – Products and Services Terms of Sale.
x
Customer is responsible for the freight charges for the returning product. Return shipments must comply with all
applicable Shipping Regulations (IATA, DOT, etc.) and carrier requirements.
x
Customers receiving an Advance Exchange product agree to return the defective, rebuildable part to Agilent Technologies
within 15 business days. Failure to do so, or returning a non-rebuildable part (crashed), will result in an invoice for the
non-returned/non-rebuildable part.
x
Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur
a restocking fee. Please reference the original purchase order number.
x
Units returned for evaluation will be evaluated, and a quote for repair will be issued. If you choose to have the unit
repaired, the cost of the evaluation will be deducted from the final repair pricing. A Purchase Order for the final repair price
should be issued within 3 weeks of quotation date. Units without a Purchase Order for repair will be returned to the
customer, and the evaluation fee will be invoiced.
x
A Special Cleaning fee will apply to all exposed products per Section 4 of this document.
x
If requesting a calibration service, units must be functionally capable of being calibrated.
Pg 3/3
VS Series Helium Mass Spectrometer Leak Detector
This page intentionally left blank.
Agilent Technologies
Vacuum Product Division
United States & Canada
Agilent Technologies
Vacuum Products Division
121 Hartwell Avenue
Lexington, MA 02421 USA
Tel: +1 781 861 7200
Toll-Free: +1 800 882 7426
Fax: +1 871 860 5437
India
Agilent Technologies
Vacuum Product Division
205-A, “A” wing of Galleria,
2nd floor, Hiranandani Gardens,
Powai, Mumbai-400 076, India
Tel.: +91 22-2570 8595 / 8597
Fax: +91 22- 2570 8599
Benelux
Agilent Technologies
Vacuum Products Division
Herculesweg 8
4338 PL Middelburg
THE NETHERLANDS
Tel: +31 118 671570
Fax: +31 118 671569
Italy
Agilent Technologies
Vacuum Products Division
via F.lli Varian 54
10040 Leini, (Torino) ITALY
Tel.: +39 011 997 9111
Toll-Free: 00 800 234 234 00
Fax: +39 011 997 9350
Singapore
Agilent Technologies
Vacuum Products Division
Singapore
Unit 10-04 Helios
Biopolis @ one-north
11 Biopolis Way, 138667
Singapore
H/P.: +65 92364988
Fax: +65 64789603
China
Agilent Technologies
Vacuum Products Division
Room 1648
Central Tower South Wing
Beijing Junefield Plaza
No. 10 XuanWuMenWai Street
Beijing 100052 P.R. CHINA
Tel.: +86 (10) 6310 8550
Toll-Free: 800 820 6556
Fax: +86 (10) 6310 0141
Japan
Agilent Technologies
Vacuum Products Division
Sumitomo Shibaura Building 4-16-36
8th Floor
4-16-36 Shibaura Minato-ku
Tokyo 108 JAPAN
Tel.: +81 3 5232 1253
Toll-Free: 0120 655 040
Fax: +81 3 5232 1710
Taiwan
Agilent Technologies
Vacuum Products Division
14F-6, No. 77, Hsin Tai Wu Road,
Sec. 1
Hsi chih, Taipei Hsien, Taiwan,
R.O.C.
Tel.: +886 2 2698 9555
Toll Free: 0800 051 342
Fax: +886 2 2698 9678
Korea
Agilent Technologies
Vacuum Products Division
Shinsa 2nd Bldg. 2F 966-5
Daechi-dong
Kangnam-gu, Seoul
KOREA 135-280
Tel.: +82 2 3452 2452
Toll-Free: 080 222 2452
Fax: +82 2 3452 2451
UK & Ireland
Agilent Technologies
Vacuum Products Division
6 Mead Road
Oxford Industrial Park
Tel.: +44 (0) 1865 291570
Fax: +44 (0) 1865 291571
France
Agilent Technologies
Vacuum Products Division
7 avenue des Tropiques
Z.A. de Courtaboeuf - B.P. 12
91941 Les Ulis cedex FRANCE
Tel.: +33 (0) 1 69 86 38 84
Fax: +33 (0) 1 69 86 29 88
Germany & Austria
Agilent Technologies
Vacuum Products Division
Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt GERMANY
Tel.: +49 (0) 6151 703 353
Fax: +49 (0) 6151 703 302
Mexico
Agilent Technologies
Vacuum Products Division
Concepcion Beistegui No 109
Col Del Valle C.P. 03100
MEXICO, D.F.
Tel.: +52 5 523 9465
Fax: +52 5 523 9472
Southeast Asia
Agilent Technologies
Vacuum Products Division
South East Asia (SEA) - Alex Ho
H/P: +601 2213 1253
Fax: +603 6733 8121
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