CS200 series MFC software manual
Introduction ··························································· 3
PC Specifications·································································································3
Minimum PC Requirements··························································································· 3
Operating Instructions ············································· 3
Software START··································································································3
Interface Introduction ··························································································4
Communication Tab: ····························································································6
Product Tab ········································································································9
Regulation (Control) Tab····················································································· 10
Control Mode (Valve): ································································································10
Set Mode (Control): ··································································································11
S.P. (Flow Setting): ·····································································································11
Function ················································································································11
Others Tab········································································································ 17
Alarm ··················································································································17
Conversion Factor ····································································································20
Full Scale ················································································································20
Soft Start ···············································································································21
Delay ··················································································································21
Shutoff level ············································································································22
CS200 series MFC software manual
CS200 software is a user-friendly interface used to control CS200 serials Mass
Flow Controllers and Meters. It provides such main functions as to control and
display instant flow rate, change valve mode, Set alarm and warning, Data saving
PC Specifications
Minimum PC Requirements
CPU: P4 1.5GHz
Memory: 256Mb
Port: RS485 Converter from Serial COM or USB port
Operating system: Windows XP or Windows2000 SP4
Operating Instructions
Software START
After starting, the program will automatically search for a connected MFC.
CS200 series MFC software manual
1. Address: from 32 to 96
2. Baud rate:
:19200, 9600,4800,2400,1200
3. COM Port No.: starts from 1
Interface Introduction
After finding the MFC, the program will enter the main screen.
The main screen includes four tabs:
• Communication
• Product info
• Regulation
• Others
In all tabs a status line, showing Address, Calibration Gas, Full Scale, Flow Unit,
Target Gas and a bar indicating communication progress will be displayed in the
lower part of the screen.
CS200 series MFC software manual
When communication is interrupted, an error message will be shown below
the status line.
CS200 series MFC software manual
Communication Tab
CS200 series MFC software manual
Baud Rate and COM port can be selected from the dropdown menu in this tab.
Baud Rates of 19200, 9600,4800,2400,1200 bps are available for selection.
CS200 series MFC software manual
For special PC configurations, the COM Port can be selected from the drop
down menu, from COM1 to COM8. Normally, the software will automatically
find the appropriate COM port during search.
After changing COM port, software will search for the MFC in new COM
CS200 series MFC software manual
Product Tab
In this screen, basic information of the product is displayed, including
Identification, Address, and Valve type.
Manufacturing information is shown in the Identification group. The Valve type,
NC or NO, are read only parameters.
For changing to a new address, input new address, and then click “Validate
Current Address” button.
Address can be changed from 32 to 96. When communicating with RS485,
using more than one MFC, each MFC must be set to a unique address.
After clicking the “Search DMFC Address” button, the software will start a new
search for the MFC.
CS200 series MFC software manual
Regulation (Control) Tab
Control Mode (Valve):
In Valve Control Mode, there are three options, “purge” will set the valve to its
full open position. “Close” will shut off the valve. In either of these modes, the
setpoint signal will be inactive. In “Regulation”, setpoint signal will be active and
will control the position of the valve to achieve the desired flow.
Note: the solenoid valve can not be used as shut-off valve.
“Valve Control Mode” is available only in the “Digital” set mode (See
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CS200 series MFC software manual
Set Mode (Control):
In the “Digital” mode, the RS485 communication will be activ2, and the flow
rate will be set (setpoint) and read through software.
In the “Analog Voltage” mode, MFC will receive the setpoint as a 0-5Vdc signal
and will provide back the flow rate signal (0-5Vdc).
In the “Analog Current” mode, MFC will receive a 4-20mA current setpoint
signal and will provide back the flow rate signal (4-20mA).
Using the ”Direct Control” mode, the valve can be controlled directly by
entering a specific value (0-65535).
The “Direct Control” mode is for diagnostic purposes only and it is not
recommended to be used as a flow control mechanism.
S.P. (Flow Setting):
Set flow rate:
Input value directly, then click “set” button to activate. Default units are in
percent of Full Scale. Units can be set by selecting the applicable choice.
Click “Zero” to command the MFC to zero itself.
Before initiating the Zero operation, make sure that the MFC has been
warmed up at least 20minutes and that there is no gas flow.The best way
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CS200 series MFC software manual
to insure that there is no flow through the valve is to Zero the MFC only
when there is no pressure difference between the inlet and outlet gas
Time Set:
Click the “Time Set” button. There will be a new screen shown on the right
side of the main screen, providing 3 nodes, through which users can simulate a
simple sequential process. After setting the time and setpoint of each node,
“lock” the node. When the system clock reaches a node time, the setpoint will
be automatically changed to its programmed value. If the “gradually” button is
selected, the setpoint will change at a calculated rate until it reaches its final
The time in this software is acquired from the operating system.Time of
nodes must be set chronologically increasing.
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CS200 series MFC software manual
The “Microscope” function provides a zoomed-in curve to observe the flow
signal in detail (±1%F.S.). When clicking the “Microscope” button, a new screen
will be activated below the main screen.
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CS200 series MFC software manual
Magnified Flow Plot:
The curves of Setpoint and Readout flow can be displayed in a magnified screen
by right-clicking the flow plot area and selecting “magnify”.
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CS200 series MFC software manual
A selected portion of the plot can be zoomed into by left-clicking and dragging.
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CS200 series MFC software manual
Right-click in the screen to select “UndoZoom”.
The graph will scroll with time. By clicking the “Dynamic” button, the user can
stop scrolling. The user can also change the sample rate of the curve by
dragging the “sample interval” slide control.
After changing the sample interval, the plot will re-initialize.
By right-holding and dragging, the user can review previous history. By dragging
the “Move Speed” slide control, the user can change the scrolling speed.
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CS200 series MFC software manual
Others Tab
By left-clicking on the value of the “Set Alarm” input area, the user can select
which alarms conditions will be monitored.
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CS200 series MFC software manual
To activate the alarm function, select the “active” check box.
When an active alarm or warning condition is detected, the LED on top of the
MFC will change color (red for alarm, yellow for warning) and a message will be
displayed at the bottom of the screen,
Press “Clear” to erase an alarm or warning condition.
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CS200 series MFC software manual
Users can use the program to cause a specific action to occur when flow is
outside of a window defined by Upper and Lower Limits. The action to take
place can be selected to be to display an alarm condition at the bottom of the
screen, or to close, or fully open the solenoid valve.
When the flow rate is out of the limits, the selected function will be active, and
the color of status bar will change to yellow.
This function will work only under “Digital” mode and needs to be set
each time the software is restarted.
Flow Totalizer displays total accumulated gas flow (Unit: Standard Cubic Centimeter).
Click the “Read” button to display the current accumulated flow.
Click the “Erase” button to erase accumulated flow.
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CS200 series MFC software manual
Input a sampling interval time, and click the “…” button to chose the file path
and file name for data saving. Select the “Active” check box to start saving data,
including setpoint, readout, and system time. Unselect the “active” check box to
stop saving the data.
Conversion Factor
The user can input a Conversion Factor to flow a specific target gas.
When changing conversion factor, Fullscale will be changed
automatically to the target gas full scale value.
Full Scale
The Full Scale flow of the MFC can be programmed.
The full scale range must be within 30% to 110% of the original Full scale
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CS200 series MFC software manual
N2 equivalent range of the MFC.
Soft Start
The Soft Start feature allows the user to cause the CS200 MFC to ramp up or down
the setpoint at a specified rate to provide a soft response characteristic. The rate of
setpoint change is entered as %F.S. change per second.
For example, given a setpoint change from 0 to 100%, if the Soft Start value is 20, gas
flow will change at a rate of by 20% of full scale per second. Full scale flow will be
reached after 5 seconds.
This function provides the selection of a delay from the time the setpoint is received
until and the flow through the CS200 begins. Delay is rounded up to multiples of 100
NOTE: When the delay is set from 1 to 149msec, the actual delay will be 100ms.
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CS200 series MFC software manual
Shutoff level
Shutoff is a feature of CS200 that ensures the valve is closed when the setpoint is
less than the set value of shutoff.
The unit of shutoff level is % F.S.
The value of shutoff level can be programmed between 1.5% F.S. and 100% F.S.
NOTE: the default value of shutoff level is 1.5% F.S.
For more information, please contact your nearest Sevenstar agent.
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