x-act Technical Manual

x-act Technical Manual
Oxford Instruments
NanoAnalysis
x-act Technical Manual
51-1720-098 Issue 6A / April 2015
x-act Technical Manual
Revision history
Issue
Date
Comment
1
March 2007
Operating take-off angle range quoted in Environmental Ranges table section 3.1
2
March 2007
Note added to section 3.6
3
March 2008
Detectors added to Table 6.1
4
December 2011
Out-of-date resolution information was
removed. Minor corrections made to some
punctuation.
5
September 2013
Updated section “About this manual” to distinguish information that is intended for engineers only.
6
April 2015
Updates to company name, and to legal sections. New pressure sensor.
Contents
Introduction
5
Disclaimer
5
Confidential Information
5
Symbols used throughout this manual
6
Equipment labels
6
Intended use of equipment
6
Support policy
7
Maintenance
Health and Safety
7
9
General safety considerations
9
Specific safety considerations
9
Safety earth
9
Hazardous energy sources
10
Customer maintenance
10
Preventative maintenance
10
CE marking
10
Declaration of conformity
11
Manufacturer and support details
11
General information
12
Electrical interface
12
Pressure switch
13
LED function
13
Detector control
13
Extended operating range
14
INCA Monitor
15
Checking the system using INCA Monitor
15
Status event reports
15
x-act support software
15
Installation Instructions
17
Unpacking the detector
17
Tools required
17
Using the Install software
17
About the interfaces
18
Using the Support Software
19
Installing the software
19
Software features
19
Repair Procedures
21
TDA label and HV warning label
21
3
Replacing the pressure sensor
21
Replacing the pre-amp board
22
Replacing the control board
23
Appendices
4
25
Yearly maintenance check
25
Preventive maintenance checklist for x-act
25
Section 1. General system
25
Section 2. Checking the x-act detector
26
Section 3. Checking the x-stream module
26
Section 4. Checking the mics module (where applicable)
27
Section 5. Checking the microscope control (where applicable)
27
Section 6. Summary
27
Section 7. Further action
28
Parts list
28
Cabling the INCA x-act detector
29
Generic cabling diagram
30
Detector description
31
x-act detector electronics
31
Error codes
32
ADD POST error codes
32
ADD Shutdown error codes
33
Introduction
Introduction
This manual has the following sections:
Health and Safety on page 9
This section describes general and specific Health and Safety considerations. All users of
the equipment should be read and understood this section before beginning to install or use
the equipment.
Appendices on page 25
The appendices provide additional reference information.
The following sections are intended for engineers only:
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Installation Instructions on page 17
Using the Support Software on page 19 .
Repair Procedures on page 21
Customers and engineers must read the 'Health and Safety' section of this manual before using
or installing the INCAx-act
Only personnel who have attended an appropriate training course are permitted to work on the
INCAx-act detector. An untrained engineer will invalidate the warranty.
Disclaimer
Considerable care has been taken to ensure the accuracy of information contained herein but
Oxford Instruments NanoAnalysis cannot guarantee that it contains no errors, omissions or inaccuracies. In addition, the Oxford Instruments NanoAnalysis policy is one of continued product
improvement. Therefore, the company reserves the right to change the information contained
herein without notice.
Subject to the availability of components, Oxford Instruments NanoAnalysis shall use reasonable
endeavours to provide support for the x-act product for a period of seven years after the date of
last production - please contact the system vendor to establish whether this product is still in production. If your product is older than this, please contact the system vendor to see if they can help
further.
Confidential Information
Information contained in this document is proprietary, and remains the intellectual property of
Oxford Instruments NanoAnalysis. The document is distributed by Oxford Instruments NanoAnalysis on the understanding that anyone entrusted with the document will use their best
endeavors to prevent the disclosure of such confidential information to any third parties without
written consent from Oxford Instruments NanoAnalysis. No part of this document may be copied,
transmitted or reproduced in any form, or by any other means, without written consent from
Oxford Instruments NanoAnalysis.
5
Introduction
Symbols used throughout this manual
Caution, risk of danger.
Documentation must be consulted to find out the nature of the potential hazard and any actions
that have to be taken.
Caution, risk of electric shock.
Warns of the presence of high voltage that has the potential to cause injury.
X-ray hazard.
Potential exposure to ionizing radiation exists.
Equipment labels
The detector identification label, specifying the model number and serial number, is mounted on
the back of the detector main body. An example:
This external label identifies the assembly and the model (microscope and port specific), customer order number, sensor type and any relevant patents.
This product is covered by the following patents:
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U.S. Patent 5170229
European Patent 0325383
Japanese Patent 2581597.
Intended use of equipment
All INCAx-act detectors are for use within the electron chamber of a scanning electron microscope (SEM) and must not be used in any other environment.
INCAx-act systems are available for a range of Scanning Electron Microscopes (SEM). Please
refer to your local Oxford Instruments NanoAnalysis sales representative for details of specific
compatible Instruments.
The INCAx-act detector is intended to be fitted to a scanning electron microscope (SEM) to give
chemical composition information on the sample.
Chemical composition is found by measuring the energy of the X-rays emitted from the sample
when struck by an electron beam. The energy of a single X-ray photon is converted to an electrical signal in the detector. This signal is processed by the system electronics, and energy data
is passed to the PC. The PC stores the data and can display it in a histogram of the number of
counts against energy (a spectrum). The position of each peak in the spectrum relates to the
energy of the elements within the sample. Special software on the PC identifies the peaks to give
6
Introduction
qualitative information, while other software corrects for sample absorption effects to give quantitative information.
Support policy
The company guarantees the equipment against defects in materials and workmanship for a
period of one year from the date of completion of the installation or 15 months from shipment,
whichever is sooner. During the warranty period, an Oxford Instruments NanoAnalysis trained
engineer will attempt to repair on site, free of charge.
If an engineer, not trained by Oxford Instruments NanoAnalysis, carries out any work on the
INCAx-act detector, the warranty will be null and void.
WARNING; The electron trap must be fitted to the INCAx-act detector at all times when
installed to a microscope column. Failure to have the electron trap fitted will invalidate the warranty.
Maintenance
It is recommended that a routine Preventative Maintenance Schedule comprising of a Yearly Maintenance check should be followed. Please refer to the preventative maintenance schedule in the
Appendices on page 25. This maintenance can be purchased from Oxford Instruments NanoAnalysis either individually or as part of a support agreement.
7
Health and Safety
Health and Safety
General safety considerations
To avoid fire hazard and risk of electrical shock:
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Do not operate the equipment if any cable is damaged.
Do not operate the equipment if there is a suspected failure or any damage to the equipment.
Do not use a supply voltage that is outside the specified range.
Do not operate the equipment with the covers removed.
Do not operate the equipment in damp or wet conditions.
Do not immerse in liquids.
Do not use or store in corrosive or explosive atmospheres.
Do not operate the equipment outside the specified ambient temperature range.
Provide proper ventilation to prevent overheating.
Use only cables and parts provided by the manufacturer.
Specific safety considerations
All electrical supply equipment must meet applicable codes and be installed by qualified
personnel.
Do not remove the covers of any of the electronics units. This could expose live electrical components.
If the equipment is used in a manner not specified by manufacturer, the protection provided
by the equipment may be impaired.
The safety of any system incorporating the equipment is the responsibility of the end
user of the system.
Warns of the presence of the risk of pinching with the potential to cause injury.
Warns of the presence of the risk of crushing with the potential to cause injury.
Safety earth
This symbol indicates a chassis frame earth (ground) connection.
9
Health and Safety
The connection is not a safety earth (ground).
Hazardous energy sources
Electrical Hazard
In normal operating conditions, there is no shock hazard from the detector.
Radiation Hazard
X-rays are generated in any electron microscope column. All Oxford Instruments detectors are
designed with comprehensive radiation shielding to less than 1 microsievert leakage.
Customer maintenance
The INCAx-act system contains no user-serviceable parts. Removing any covers invalidates the warranty and will expose live electrical components and hot components. Users must
not remove the covers of any part of the system. Servicing must only be carried out by engineers
trained by Oxford Instruments.
Periodically or when a problem is suspected to have occurred, users may be asked to extract a
data file from the system and send it to the local support office. Instructions on how to do this are
included in this manual.
Preventative maintenance
Various parameters are monitored within the INCAx-act detector. After warranty, it is recommended that a user enters into a maintenance contract with the system vendor. This will reduce
down time, and help to provide an early warning of any impending failure. Any remedial work will
be scheduled into the customer’s workload. The appendix of this manual describes the checks
performed in the preventative maintenance visit.
CE marking
The INCAx-act system conforms with the appropriate EEC device directive for
this type of instrument and has been subject to the conformity assurance procedures laid down in the Council Directive.
10
Health and Safety
Declaration of conformity
The Declaration of Conformity is available on request.
Manufacturer and support details
Manufacturer:
Oxford Instruments NanoAnalysis Ltd.
Halifax Road, High Wycombe, Bucks HP12 3SE, UK
Contact details are on the Oxford Instruments Website:
http://www.oxford-instruments.com/support/
For assistance, telephone your local Oxford Instruments representative, and quote your System
Order number and suite issue (See Help About in INCA, or the INCA Microanalysis CD).
11
General information
General information
The INCAx-act detector is a liquid nitrogen-free, cool-on-demand, analytical drift detector (ADD)
offering routine microanalysis of elements including Boron and above.
The detector has an active area (including collimator) of 10mm2 with INCA SATW ultra-thin polymer window. Peltier cooling reduces the chip temperature.
After the system electronics and the detector power ON:
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The detector cools down in approximately 90 seconds (vacuum attained).
A stabilized operational level is reached within 15 minutes of power on.
A pressure switch senses when the column is open to the atmosphere.
A typical INCAx-act system has the following units:
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PC, Display unit,
mics,
x-stream + power adapter,
x-act detector.
System Rating
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Supply Voltage: 100 - 240V AC 2.5 Amps
Frequency Range: 50 - 60Hz
Environmental ranges for the x-act detector
Operating Temperature nor- 10 - 25°C
mal mode
Operating Temperature
extended mode
10 - 30°C
Storage Temperature
-25 to 40°C @ 8 to 80% RH non-condensing
Operating Humidity
<80% R.H. non-condensing
Operating Altitude
up to 1500m
Operating Take-off angle
10 to 45 degrees
Power Requirements
DC input voltage
+24V
Power Consumption
<16W
Physical Dimensions
Weight
<6kg
Dimensions (HxDxW)
130 x 100 x 675 mm
Electrical interface
The INCAx-act detector is connected to the X-stream module via a 15-way D-plug and socket signal cable. Power is derived from a 24V power adapter. One cable provides for both the signal
information (via an I2C serial bus) and the power connection (tail from signal cable) to the
detector.
12
General information
Power is supplied to the detector directly by the power adapter, which is connected to the mains.
The detector has no ON/OFF switch.
Pressure switch
A pressure switch, in the main body of the detector, senses that the column is evacuated. This
switch is a differential-pressure transducer. The differential pressure is measured relative to the
local ambient pressure. When the detector is connected to column of an electron microscope, the
column atmosphere is connected to the pressure sensor through bellows. Thus the column pressure can be measured. If a difference is detected, the detector responds appropriately and is
warmed or cooled automatically.
LED function
When power is supplied to the detector, the INCAx-act firmware runs a Power-On Self Test
(POST). If the POST fails, the detector cannot operate normally.
Two LEDs to the rear, on the top of the detector main body report the status of the detector. One
LED reports the connection status. The second LED reports the cooling status of the detector
LED 1
Description
Off
No +24V supply
Green
+24V supply is OK
Amber
+24V supply is OK. Unit is in standby
Red flashing Error detected
LED 2
Description
Off
No vacuum detected
Blue flashing Detector is cooling
Blue
Detector is ready for use
Detector control
To view or change the operational state of the detector (detector state), select ‘Detector Control’
from the ‘Options’ menu in the INCA software.
The status is displayed in a pop-up window.
13
General information
This window automatically appears when the operational state of the detector changes. The user
may choose to change the operational state of the detector to either ‘Standby’ or ‘Operate’. A
spectrum can only be acquired when the detector is cold.
When electrical power is removed from the detector, the detector remains in the chosen operational state. When power is restored, the detector returns to that detector state.
Extended operating range
If the detector cannot reach, or fails to maintain, its target operating temperature, the INCA software reports a detector error, and offers the option to switch to an 'Extended Operating Range'.
This option allows the detector to operate at 5 degrees above the target temperature. The detector
must be calibrated for use at this extended range. Failure to maintain target operating temperature
might be caused by altitude, room temperature, and the take-off angle being outside the stated limits.
The displayed message is: “The environmental temperature has exceeded the normal working
range. To continue working, INCA x-act must be switched to extended range. Change to extended range using the X-ray Calibration step in INCA Monitor”.
14
General information
INCA Monitor
Monitor is a part of the INCA package, and provides common functions such as Calibration,
Thermal control, Guided Exchange and Configure. You cannot run Monitor at the same time as
the standard INCA software.
To start Monitor, double-click on the task bar icon, or select 'Launch Monitor' menu item by rightclicking on the icon.
Details on INCA Monitor and on the standard INCA software are in the help guide in these packages.
Click on the buttons or select the Help menu to browse the help guide.
Checking the system using INCA Monitor
If a problem is detected with the system, the 'System Check' utility within Monitor is useful.
Select 'System Check' and follow the on-screen instructions.
Status event reports
The INCAx-act detector can notify the controlling hardware and software of any event as it happens. Communication between the detector and the x-stream means that these events can be
viewed in the x-act support software. In normal operation, no communication can take place when
acquiring X-rays.
Notifications appear as a message box on the user interface as they happen.
x-act support software
To monitor the status of the detector and detector electronics, use the INCAx-act support software. You can export the viewed data to a worksheet or file.
15
Installation Instructions
Installation Instructions
Only engineers trained by Oxford Instruments are permitted to install, repair or service xact and INCA systems. Failure to comply will invalidate the system warranty and could damage
the system or cause injury to personnel.
Unpacking the detector
The INCA x-act detector is shipped in a box specifically designed to accommodate its
shape.
1. Check the ShockWatch indicators on the outside of the box. If they are red, contact the
freight carrier, and do not accept the delivery.
2. Confirm that the contents match the packing list.
3. After installation, retain the packing materials for return shipment of any part of the system
if it is necessary. If the original packaging is disposed of after installation, Oxford Instruments will charge for a new set of packaging material. The use of the incorrect packaging
will invalidate the warranty.
Tools required
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Allen keys
Latex (or other plastic) gloves
Lint-free cleaning materials
Ethanol or Isopropanol
Digital Volt Meter (DVM).
Using the Install software
Follow the instructions in the INCAx-stream and INCAmics 'Installation and User's Guide', 'System Installation' (Guided Install).
The INCAx-act detector requires Microanalysis suite 21A or higher.
Any existing installation information resides in C:\Program Files\Inca\data\install.ipj. Before beginning the new installation, you can copy the date or rename the file, as a back-up.
1. Start the installation program from C:\Program Files\Inca\bin\install.exe, or click on the
install icon. Log on as an OEM or Oxford Instruments NanoAnalysis engineer.
2. Select Abort, to abort any current install data.
3. Follow the guided install.
17
Installation Instructions
About the interfaces
The detector interface is supplied in two parts. The detector main body has an interface adapter
that fits to a microscope-specific interface. The microscope-specific interface must be fitted to
the chamber port before the detector is installed to that interface.
Microscope-specific interface being fitted to port. This is fitted before the detector is installed,
through this interface, to the chamber.
Interface adapter for the main body of the detector. The detector is installed through the microscope-specific interface. The adapter is joined to the microscope-specific interface with four (4)
screws.
18
Using the Support Software
Using the Support Software
This software can monitor the status of the INCAx-act detector.
Installing the software
The support software is installed as part of the suite to the following directory:
C: \Program Files\INCA\bin\.
To start the program, click on the file, IncaXactSupport.exe . To view on-line help for the software, press F1 or click Help, then Contents.
Software features
The INCAx-act support software displays the configuration (first figure) and current status
(second figure) of the detector. The information is gathered at set time intervals and immediately
updated in the display. Any measured voltages outside pre-set limits are shown in red for immediate identification. Some conditions are displayed as text statements to inform the user or engineer of their status.
Monitoring of the measured values, with regular service checks, can increase up-time because
predictive failures can be forecast.
You can save the displayed information as a text file or in a worksheet format.
19
Using the Support Software
Several parameters are displayed. These identify various items of information such as the hardware and firmware revision. The result of the initial Power ON Self Test (POST) is displayed. A
value of '0' indicates that the system has powered on correctly, i.e. no errors have been detected.
Full details of each item are described in the help menu. The Appendix of this manual also
describes the error codes.
20
Repair Procedures
Repair Procedures
The procedures include:
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Replacing the pressure sensor
Replacing the pre-amp board
Replacing the control board
TDA label and HV warning label
These labels are on the EMC cover underneath the main cover. The TDA label specifies:
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TDA serial number nnnn; a sequential number starting at 0001
TDA sub assembly part number
Sensor serial number (can ID), XNaaaa.
Voltage settings for XNaaaa (R1, RX, Back / Sub) for optimum performance
of the detector.
Temperature to set Detector to as a default
TDA label
HV warning label
Replacing the pressure sensor
Observe static precautions.
PCB assemblies are extremely fragile. They are static-sensitive. ESD and fragile handling precautions must be adhered to at all times.
The pressure sensor has two designs. The newer design includes a tiny circuit board on one end
of the ribbon cable
1.
2.
3.
4.
Note the operational microscope vacuum level.
Vent the microscope chamber.
Remove power from the detector.
Retract the detector from the column. (The detector can stay on the column for Pressure
Sensor replacement).
5. Remove the Main cover.
6. Remove the EMC cover.
The pressure sensor is on the detector body beneath the EMC cover. It is next to the loom
feed-through.
21
Repair Procedures
Older
7. Unplug the insulated ribbon cable.
Older
Newer
Newer
8. Carefully pry the sensor out with needle-nose pliers. Take care not to let the pliers slip off
the metal and damage the O-ring or sensor wires.
9. Reverse this procedure to fit the new sensor.
10. After replacing the pressure sensor, reset the operational microscope vacuum level (as
noted in Step 1) .
Replacing the pre-amp board
Note 1 : PCB assemblies are extremely fragile. They are static-sensitive. ESD and fragile
handling precautions must be adhered to at all times.
Note 2: Refer to the next section if you suspect that the Control board will also be replaced.
The circuit boards are on the detector body underneath the EMC cover.
1. Vent the microscope column.
2. Remove power from the detector.
3. Retract the detector from the column. (The detector can stay on the column for PCB
replacement).
4. Remove the main cover.
5. Remove EMC cover.
The components for removal are identified here.
22
Repair Procedures
6. Remove the Pre-amp board [2]. (The board is held in place with a locking pin)
7. Reverse this procedure to replace the pre-amp board.
Replacing the control board
1. Vent the microscope chamber.
Note: Part of the replacement procedure requires the detector to be connected but warm.
With the chamber vented, the detector will not cool when mains power is applied.
2. Remove power from the detector.
3. Retract the detector from the column. (The detector can stay on the column for PCB and
sensor replacement).
4. Remove the main cover.
5. Remove the EMC cover.
6. Remove the Pre-amp board [2] (It is held in place with a locking pin).
7. Disconnect the PCB harness [3]. Caution: Do not over-flex the cable.
8. Unscrew the two locking nuts of the 9-pin connector [4].
9. Remove the two holding nuts and washers of the control board [5].
10. Pinch the Control board locking pin [6] to lift the Control board away from the detector
body.
11. Replace the Control board; connect the pre-amp board, harness and pressure sensor and
covers by reversing the above procedure.
12. Wind the detector to the stop position.
13. Restore mains power.
14. On the menu, select Tools/Board replacement.
23
Repair Procedures
Note: To continue this procedure, the detector must have been warm for at least 15
minutes.
15. Enter data into the Detector Information' boxes. (This information is on the TDA label on
the EMC cover). The Secondary Temp. reading must be within +/- 10 degrees Celsius of
ambient temperature. If you do not know the Detector Type ID, see the next table.
Detector Part number
Info file to use
Detector type ID
51-1385-002
51-INFO-0009
9
51-1385-003
51-INFO-0009
9
51-1385-005
51-INFO-0009
9
51-1385-006
51-INFO-0009
9
51-1385-026
51-INFO-0009
9
51-1385-029
51-INFO-0026
26
51-1385-034
51-INFO-0026
26
51-1385-046
51-INFO-0026
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16. When you have entered all the information, click OK.
24
Appendices
Appendices
Yearly maintenance check
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Check that can voltages are within limits
Check TEC temperatures are within limits
Check TEC currents are within limits
Check any reported POST errors
Check operation of pressure switch
Check detector resolution
Change desiccant as required
Check operation of Slide and correction stop position is set
Check operation of LEDs on cover
Perform preventative maintenance on mics/x-stream hardware as per schedule
Check surge-protection LED
Report any impending failures and remedial action as necessary to customer and support
centre.
Preventive maintenance checklist for x-act
For INCA x-stream/mics and x-act Detector
Site
code
____________________
System
S/N
____________________
Site
name
____________________
Detector
S/N
____________________
Contract ____________________
no.
Detector
Model
____________________
Contract ____________________
Type
Detector
Window
____________________
Call no
____________________
Microscope ____________________
Model
Date
____________________
PC Model
____________________
Section 1. General system
1. Inspect equipment for signs of physical damage and/or modification. List the details
below:
25
Appendices
2. Check cabling is complete and securely connected. Ensure cables are not stretched or
liable to damage.
3. Ensure all cabling is neat and tidy. Ensure all cabling is away from any possible sources of
electrical / electronic noise.
4. Clean exterior surfaces, screen, printer, monitor and tabletop etc. and vacuum-clean the
keyboard.
5. Start INCA Monitor and run System check “I do not know where the problem lies”. Print out
report.
6. Check available disk space on C:\ drive. Advise customer if less than 10%.
7. If fitted, check that the surge-protection LED in the power strip is still glowing. (If the LED
is not glowing, the surge protection is no longer active and the power strip must be
exchanged).
Section 2. Checking the x-act detector
Use x-act support software to check the following:
1.
2.
3.
4.
5.
6.
7.
8.
9.
Check can voltages are within limits
Check TEC temperatures are within limits
Check TEC currents are within limits
Check any reported POST errors
Check operation of pressure switch
Change desiccant as required
Electromechanical checks. Check operation of slide and that the stops are set correctly.
Check correct operation of LEDs on outer cover. Resolution Check. Run strobe resolution test in Monitor software and check the resolution
is in spec.
Process
Time
Strobe FWHM
Mn kα FWHM
PT1
PT2
PT3
PT4
PT5
PT6
10. Ramp check. Measure ramp time of the quiescent ramp on the input monitor BNC on the
x-stream with the beam off.
Ramp Time = ______________________ ms Section 3. Checking the x-stream module
1. Check the operation of the cooling fan. (Listen for the noise of the fan turning.)
2. Vacuum-clean fan inlet and outlets (non-clean room applications only).
3. View the status log. Examine for any “x-stream” and “Detector Control Unit” reported error
conditions. Give details of errors below:
26
Appendices
Section 4. Checking the mics module (where applicable)
1. Acquire a Site of Interest of a SE image from a reference grid using the following conditions: Resolution = 512 x nnn, Speed = Kalman. Overlay the marker bar on the image.
(Note: Ensure that the magnification used is set in Microscope Control before collecting
the image).
2. SEI Brightness / Contrast check. Check that the brightness and contrast of the acquired
image correspond to the brightness and contrast set on the microscope display.
3. Is the image linear? Check linearity of the image by measuring the grid pitch spacing horizontally and vertically across the image. Attach a printout to the service report.
4. Is the Aspect ratio correct? Check the aspect ratio of the collected image is the same as
the microscope.
5. Is the Marker bar correct? Check the marker bar calibration is correct.
6. If available, acquire a BSED (Tetra) image from a reference grid.
7. BSED Brightness / Contrast check. Check that the INCA Tetra image brightness and contrast correspond to microscope Tetra image. Attach a printout to the service report.
8. Is the Blanking working? Check that the blanking is working correctly during INCA imaging
control (where applicable).
9. View the status log. Examine for any mics -eported error conditions. Give details of errors
below,
Section 5. Checking the microscope control (where applicable)
1. Check the operation of Microscope Control by ensuring the magnification, kV etc. are read
by INCA. Change magnification from Microscope Control and check the microscope
changes magnification and displayed value.
2. Where applicable, check that the stage initialization is correct by comparing the co-ordinates in Microscope Control with the microscope stage position.
3. Where applicable, check the operation of the stage control by moving the microscope
stage, and ensuring that the stage co-ordinates are read by INCA. Move the microscope
stage from INCA. Check for correct movement of the stage and that the new stage position is read by the microscope or stage controller.
4. Do the stage limits work? Where applicable, ensure that the stage limits are functioning
correctly by carefully driving to the limit. Report any hazardous conditions to the customer.
Section 6. Summary
1. Note any observed defects, failures, etc. during visit, action taken and parts used (as
required).
27
Appendices
Section 7. Further action
1. Describe further action, e.g. visit, parts, etc. required to ensure proper system operation,
(as required).
2. Include Order Numbers, Service Call Numbers (if known).
The maintenance work has been completed satisfactorily.
Signed Name Position Date Next maintenance due Engineer Parts list
Part numbers
Description
51-1137-001
Tested x-act assembly
51-1128-487
PCBA INCAx-act DETECTOR CNTRL
51-1294-031
THERMAL PAD FOR 51-1128-487
51-1128-488
PCBA INCAx-act PREAMP
51-1104-058-01
BELLOWS 70MM STROKE X-ACT
51-1106-1195
CABLE MERCURY EDS PREAMP 5m
51-1390-105
MOLECULAR SIEVE CAPSULE
51-1390-106
PLUG BLANKING g1/4 WITH O RING
51-1286-005
PRESSURE TRANSDUCER +/-15psi (Older version)
51-G-1286-013
PRESSURE TRANSDUCER +/-15psi (Newer version)
51-1380-012
O-RING 016 I/D=15.5 CSD=1.78mm
51-1380-060
O-RING 128 I/D=37.77 CSD=2.62
51-1380-063
O-RING 132 I/D=44.21 CSD=2.62
28
Appendices
Cabling the INCA x-act detector
Refer to the INCA x-stream and mics Installation and User's Guide to perform this task.
Route
Description
Part number
Detector to x-stream and
power supply
15-way D-socket to D-plug and
2.5mm power socket
51-1106-1195 (5m) or
Detector power adapter
24V PSU
51-1420-087
mics to x-stream
IEEE 1394 cable 1.0m
51-G-1106-1418
mics to x-stream
CAS cable 0.5m
51-1106-1054
mics to x-stream chassis
connect cable
To PC
51-1106-1204 (10m)
51-1106-1073
IEEE 1394 Cable 4.5m
51-1106-1024
Refer to the section, Generic cabling diagram on the next page.
29
Appendices
Generic cabling diagram
30
Appendices
Detector description
A block diagram of the detector and its electronics is shown next.
x-act detector electronics
The x-act detector comprises of an Analytical Drift Detector (ADD) chip, a Field Effect Transistor
( FET), a temperature sensor and a Peltier cooler. Heat from the Peltier is transmitted along a heat
path to a heatsink in the main body of the detector. A loom of wire provides electrical connections
from the main electronics board to the front end electronics. The heat path and loom are within an
outer tube, which is filled with a dry gas (to prevent condensing liquid). When connected to an
electron microscope column, the column atmosphere is connected to a pressure sensor through
bellows, thus a measurement can be made of column pressure.
The x-act electronics comprises:
l
l
l
l
l
l
l
l
l
A microprocessor to provide control and communications
I2C communication interface to the pulse processor
Charge-sensitive preamp producing stepped ramp output
‘Quiet’, controllable, filtered switching power supplies for primary and secondary Peltier
coolers.
Other power supplies.
High-voltage generator
Filtered regulator circuits to give bias supplies to ADD and FET
Measurement circuits for measuring temperatures and pressure as well as internal diagnostics
LEDs to quickly indicate the status (cold, cooling, standby or error states)
The cooling is controlled by Proportional, Intergral, Differential (PID) control loops within the microcontroller. The temperature-sense diode is used to control power. Both ADD and thermal shunt
31
Appendices
set-point temperatures are written into the microcontroller’s non-volatile memory. In normal operation, cooling starts as soon as the detector is powered. Typically, cooling is complete in under
two minutes. The cooling is interlocked with the pressure sensor so that cooling does not occur if
the microscope column is at atmospheric pressure.
Error codes
These error codes may appear on the Configuration page in the Support Software.
ADD POST error codes
32
Flag
Problem
Text
1
INTERNAL_I2C
There was a problem with the internal I2C
bus.
2
DAC_1
There was a problem communicating with
DAC 1.
3
DAC_3
There was a problem communicating with
DAC 3.
4
POWER_
INITIALISE
There was a problem during power initialization.
5
TEST_PULSE_
INITIALISE
There was a problem during test pulse initialization.
6
ADC_1
There was a problem communicating with
ADC 1.
7
ADC_2
There was a problem communicating with
ADC 2.
8
CAN_INCORRECT_ The detector can is incorrectly orientated or
ORIENTATION_
broken.
OR_BROKEN
9
P24V_OUT_OF_
LIMIT
The +24V power rail was outside acceptable
limits.
10
N24V_OUT_OF_
LIMIT
The -24V power rail was outside acceptable
limits.
11
P2V5REF_OUT_
OF_LIMIT
The +5V power rail was outside acceptable
limits.
12
BOARD_TEMP_1_
OUT_OF_LIMIT
The board temperature (1) was outside
acceptable limits.
13
BOARD_TEMP_2_
OUT_OF_LIMIT
The board temperature (2) was outside
acceptable limits.
Appendices
ADD Shutdown error codes
Hexadecimal Problem
Flag
Text
1
POST_FAILED
The detector failed its power-on self
test. Please contact your Oxford Instruments supplier for more information.
2
ADC_READ_
FAILED
An ADC read failed.
4
DAC_WRITE_
FAILED
A DAC write failed.
8
TIMER_QUEUE_
OVERFLOW
The timer queue overflowed.
10
SECONDARY_
TEMPERATURE_
PROBLEM
There was a problem with the secondary temperature.
20
PRIMARY_
TEMPERATURE_
PROBLEM
There was a problem with the primary
temperature.
40
UNIDENTIFIED_
The detector was in an unidentified
INTERNAL_STATE internal state.
80
FAILED_TO_
COOL_NORMAL_
MODE
The environmental temperature has
exceeded the normal working range.
To continue working, INCAx-act must
be switched to extended range.
Change to extended range using the Xray Calibration step in INCA Monitor.
100
P24V_OUT_OF_
LIMIT
The +24V power rail was outside
acceptable limits.
200
N24V_OUT_OF_
LIMIT
The -24V power rail was outside
acceptable limits.
400
P2V5REF_OUT_
OF_LIMIT
The +5V power rail was outside acceptable limits.
800
BOARD_TEMP_1_ The detector has overheated. Please
OUT_OF_LIMIT
ensure that you have adequate airflow
around the detector.
1000
BOARD_TEMP_2_ The detector has overheated. Please
OUT_OF_LIMIT
ensure that you have adequate airflow
around the detector.
2000
HV_OUT_OF_
LIMIT
The detector HV was outside acceptable limits.
4000
BACK_OUT_OF_
LIMIT
The detector back voltage was outside
acceptable limits.
8000
RING_1_OUT_OF_ The detector ring 1 voltage was out-
33
Appendices
Hexadecimal Problem
Flag
34
Text
LIMIT
side acceptable limits.
10000
RING_N_OUT_
OF_LIMIT
The detector ring n voltage was outside acceptable limits.
20000
SUBSTRATE_
OUT_OF_LIMIT
The detector substrate voltage was outside acceptable limits.
40000
FAILED_TO_
COOL_
EXTENDED_
MODE
The environmental temperature has
exceeded the extended working range.
INCAx-act cannot function under
these environmental conditions.
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