Oxford Instruments NanoAnalysis x-act Technical Manual 51-1720-098 Issue 6A / April 2015 x-act Technical Manual Revision history Issue Date Comment 1 March 2007 Operating take-off angle range quoted in Environmental Ranges table section 3.1 2 March 2007 Note added to section 3.6 3 March 2008 Detectors added to Table 6.1 4 December 2011 Out-of-date resolution information was removed. Minor corrections made to some punctuation. 5 September 2013 Updated section “About this manual” to distinguish information that is intended for engineers only. 6 April 2015 Updates to company name, and to legal sections. New pressure sensor. Contents Introduction 5 Disclaimer 5 Confidential Information 5 Symbols used throughout this manual 6 Equipment labels 6 Intended use of equipment 6 Support policy 7 Maintenance Health and Safety 7 9 General safety considerations 9 Specific safety considerations 9 Safety earth 9 Hazardous energy sources 10 Customer maintenance 10 Preventative maintenance 10 CE marking 10 Declaration of conformity 11 Manufacturer and support details 11 General information 12 Electrical interface 12 Pressure switch 13 LED function 13 Detector control 13 Extended operating range 14 INCA Monitor 15 Checking the system using INCA Monitor 15 Status event reports 15 x-act support software 15 Installation Instructions 17 Unpacking the detector 17 Tools required 17 Using the Install software 17 About the interfaces 18 Using the Support Software 19 Installing the software 19 Software features 19 Repair Procedures 21 TDA label and HV warning label 21 3 Replacing the pressure sensor 21 Replacing the pre-amp board 22 Replacing the control board 23 Appendices 4 25 Yearly maintenance check 25 Preventive maintenance checklist for x-act 25 Section 1. General system 25 Section 2. Checking the x-act detector 26 Section 3. Checking the x-stream module 26 Section 4. Checking the mics module (where applicable) 27 Section 5. Checking the microscope control (where applicable) 27 Section 6. Summary 27 Section 7. Further action 28 Parts list 28 Cabling the INCA x-act detector 29 Generic cabling diagram 30 Detector description 31 x-act detector electronics 31 Error codes 32 ADD POST error codes 32 ADD Shutdown error codes 33 Introduction Introduction This manual has the following sections: Health and Safety on page 9 This section describes general and specific Health and Safety considerations. All users of the equipment should be read and understood this section before beginning to install or use the equipment. Appendices on page 25 The appendices provide additional reference information. The following sections are intended for engineers only: l l l Installation Instructions on page 17 Using the Support Software on page 19 . Repair Procedures on page 21 Customers and engineers must read the 'Health and Safety' section of this manual before using or installing the INCAx-act Only personnel who have attended an appropriate training course are permitted to work on the INCAx-act detector. An untrained engineer will invalidate the warranty. Disclaimer Considerable care has been taken to ensure the accuracy of information contained herein but Oxford Instruments NanoAnalysis cannot guarantee that it contains no errors, omissions or inaccuracies. In addition, the Oxford Instruments NanoAnalysis policy is one of continued product improvement. Therefore, the company reserves the right to change the information contained herein without notice. Subject to the availability of components, Oxford Instruments NanoAnalysis shall use reasonable endeavours to provide support for the x-act product for a period of seven years after the date of last production - please contact the system vendor to establish whether this product is still in production. If your product is older than this, please contact the system vendor to see if they can help further. Confidential Information Information contained in this document is proprietary, and remains the intellectual property of Oxford Instruments NanoAnalysis. The document is distributed by Oxford Instruments NanoAnalysis on the understanding that anyone entrusted with the document will use their best endeavors to prevent the disclosure of such confidential information to any third parties without written consent from Oxford Instruments NanoAnalysis. No part of this document may be copied, transmitted or reproduced in any form, or by any other means, without written consent from Oxford Instruments NanoAnalysis. 5 Introduction Symbols used throughout this manual Caution, risk of danger. Documentation must be consulted to find out the nature of the potential hazard and any actions that have to be taken. Caution, risk of electric shock. Warns of the presence of high voltage that has the potential to cause injury. X-ray hazard. Potential exposure to ionizing radiation exists. Equipment labels The detector identification label, specifying the model number and serial number, is mounted on the back of the detector main body. An example: This external label identifies the assembly and the model (microscope and port specific), customer order number, sensor type and any relevant patents. This product is covered by the following patents: l l l U.S. Patent 5170229 European Patent 0325383 Japanese Patent 2581597. Intended use of equipment All INCAx-act detectors are for use within the electron chamber of a scanning electron microscope (SEM) and must not be used in any other environment. INCAx-act systems are available for a range of Scanning Electron Microscopes (SEM). Please refer to your local Oxford Instruments NanoAnalysis sales representative for details of specific compatible Instruments. The INCAx-act detector is intended to be fitted to a scanning electron microscope (SEM) to give chemical composition information on the sample. Chemical composition is found by measuring the energy of the X-rays emitted from the sample when struck by an electron beam. The energy of a single X-ray photon is converted to an electrical signal in the detector. This signal is processed by the system electronics, and energy data is passed to the PC. The PC stores the data and can display it in a histogram of the number of counts against energy (a spectrum). The position of each peak in the spectrum relates to the energy of the elements within the sample. Special software on the PC identifies the peaks to give 6 Introduction qualitative information, while other software corrects for sample absorption effects to give quantitative information. Support policy The company guarantees the equipment against defects in materials and workmanship for a period of one year from the date of completion of the installation or 15 months from shipment, whichever is sooner. During the warranty period, an Oxford Instruments NanoAnalysis trained engineer will attempt to repair on site, free of charge. If an engineer, not trained by Oxford Instruments NanoAnalysis, carries out any work on the INCAx-act detector, the warranty will be null and void. WARNING; The electron trap must be fitted to the INCAx-act detector at all times when installed to a microscope column. Failure to have the electron trap fitted will invalidate the warranty. Maintenance It is recommended that a routine Preventative Maintenance Schedule comprising of a Yearly Maintenance check should be followed. Please refer to the preventative maintenance schedule in the Appendices on page 25. This maintenance can be purchased from Oxford Instruments NanoAnalysis either individually or as part of a support agreement. 7 Health and Safety Health and Safety General safety considerations To avoid fire hazard and risk of electrical shock: l l l l l l l l l l Do not operate the equipment if any cable is damaged. Do not operate the equipment if there is a suspected failure or any damage to the equipment. Do not use a supply voltage that is outside the specified range. Do not operate the equipment with the covers removed. Do not operate the equipment in damp or wet conditions. Do not immerse in liquids. Do not use or store in corrosive or explosive atmospheres. Do not operate the equipment outside the specified ambient temperature range. Provide proper ventilation to prevent overheating. Use only cables and parts provided by the manufacturer. Specific safety considerations All electrical supply equipment must meet applicable codes and be installed by qualified personnel. Do not remove the covers of any of the electronics units. This could expose live electrical components. If the equipment is used in a manner not specified by manufacturer, the protection provided by the equipment may be impaired. The safety of any system incorporating the equipment is the responsibility of the end user of the system. Warns of the presence of the risk of pinching with the potential to cause injury. Warns of the presence of the risk of crushing with the potential to cause injury. Safety earth This symbol indicates a chassis frame earth (ground) connection. 9 Health and Safety The connection is not a safety earth (ground). Hazardous energy sources Electrical Hazard In normal operating conditions, there is no shock hazard from the detector. Radiation Hazard X-rays are generated in any electron microscope column. All Oxford Instruments detectors are designed with comprehensive radiation shielding to less than 1 microsievert leakage. Customer maintenance The INCAx-act system contains no user-serviceable parts. Removing any covers invalidates the warranty and will expose live electrical components and hot components. Users must not remove the covers of any part of the system. Servicing must only be carried out by engineers trained by Oxford Instruments. Periodically or when a problem is suspected to have occurred, users may be asked to extract a data file from the system and send it to the local support office. Instructions on how to do this are included in this manual. Preventative maintenance Various parameters are monitored within the INCAx-act detector. After warranty, it is recommended that a user enters into a maintenance contract with the system vendor. This will reduce down time, and help to provide an early warning of any impending failure. Any remedial work will be scheduled into the customer’s workload. The appendix of this manual describes the checks performed in the preventative maintenance visit. CE marking The INCAx-act system conforms with the appropriate EEC device directive for this type of instrument and has been subject to the conformity assurance procedures laid down in the Council Directive. 10 Health and Safety Declaration of conformity The Declaration of Conformity is available on request. Manufacturer and support details Manufacturer: Oxford Instruments NanoAnalysis Ltd. Halifax Road, High Wycombe, Bucks HP12 3SE, UK Contact details are on the Oxford Instruments Website: http://www.oxford-instruments.com/support/ For assistance, telephone your local Oxford Instruments representative, and quote your System Order number and suite issue (See Help About in INCA, or the INCA Microanalysis CD). 11 General information General information The INCAx-act detector is a liquid nitrogen-free, cool-on-demand, analytical drift detector (ADD) offering routine microanalysis of elements including Boron and above. The detector has an active area (including collimator) of 10mm2 with INCA SATW ultra-thin polymer window. Peltier cooling reduces the chip temperature. After the system electronics and the detector power ON: o o The detector cools down in approximately 90 seconds (vacuum attained). A stabilized operational level is reached within 15 minutes of power on. A pressure switch senses when the column is open to the atmosphere. A typical INCAx-act system has the following units: l l l l PC, Display unit, mics, x-stream + power adapter, x-act detector. System Rating l l Supply Voltage: 100 - 240V AC 2.5 Amps Frequency Range: 50 - 60Hz Environmental ranges for the x-act detector Operating Temperature nor- 10 - 25°C mal mode Operating Temperature extended mode 10 - 30°C Storage Temperature -25 to 40°C @ 8 to 80% RH non-condensing Operating Humidity <80% R.H. non-condensing Operating Altitude up to 1500m Operating Take-off angle 10 to 45 degrees Power Requirements DC input voltage +24V Power Consumption <16W Physical Dimensions Weight <6kg Dimensions (HxDxW) 130 x 100 x 675 mm Electrical interface The INCAx-act detector is connected to the X-stream module via a 15-way D-plug and socket signal cable. Power is derived from a 24V power adapter. One cable provides for both the signal information (via an I2C serial bus) and the power connection (tail from signal cable) to the detector. 12 General information Power is supplied to the detector directly by the power adapter, which is connected to the mains. The detector has no ON/OFF switch. Pressure switch A pressure switch, in the main body of the detector, senses that the column is evacuated. This switch is a differential-pressure transducer. The differential pressure is measured relative to the local ambient pressure. When the detector is connected to column of an electron microscope, the column atmosphere is connected to the pressure sensor through bellows. Thus the column pressure can be measured. If a difference is detected, the detector responds appropriately and is warmed or cooled automatically. LED function When power is supplied to the detector, the INCAx-act firmware runs a Power-On Self Test (POST). If the POST fails, the detector cannot operate normally. Two LEDs to the rear, on the top of the detector main body report the status of the detector. One LED reports the connection status. The second LED reports the cooling status of the detector LED 1 Description Off No +24V supply Green +24V supply is OK Amber +24V supply is OK. Unit is in standby Red flashing Error detected LED 2 Description Off No vacuum detected Blue flashing Detector is cooling Blue Detector is ready for use Detector control To view or change the operational state of the detector (detector state), select ‘Detector Control’ from the ‘Options’ menu in the INCA software. The status is displayed in a pop-up window. 13 General information This window automatically appears when the operational state of the detector changes. The user may choose to change the operational state of the detector to either ‘Standby’ or ‘Operate’. A spectrum can only be acquired when the detector is cold. When electrical power is removed from the detector, the detector remains in the chosen operational state. When power is restored, the detector returns to that detector state. Extended operating range If the detector cannot reach, or fails to maintain, its target operating temperature, the INCA software reports a detector error, and offers the option to switch to an 'Extended Operating Range'. This option allows the detector to operate at 5 degrees above the target temperature. The detector must be calibrated for use at this extended range. Failure to maintain target operating temperature might be caused by altitude, room temperature, and the take-off angle being outside the stated limits. The displayed message is: “The environmental temperature has exceeded the normal working range. To continue working, INCA x-act must be switched to extended range. Change to extended range using the X-ray Calibration step in INCA Monitor”. 14 General information INCA Monitor Monitor is a part of the INCA package, and provides common functions such as Calibration, Thermal control, Guided Exchange and Configure. You cannot run Monitor at the same time as the standard INCA software. To start Monitor, double-click on the task bar icon, or select 'Launch Monitor' menu item by rightclicking on the icon. Details on INCA Monitor and on the standard INCA software are in the help guide in these packages. Click on the buttons or select the Help menu to browse the help guide. Checking the system using INCA Monitor If a problem is detected with the system, the 'System Check' utility within Monitor is useful. Select 'System Check' and follow the on-screen instructions. Status event reports The INCAx-act detector can notify the controlling hardware and software of any event as it happens. Communication between the detector and the x-stream means that these events can be viewed in the x-act support software. In normal operation, no communication can take place when acquiring X-rays. Notifications appear as a message box on the user interface as they happen. x-act support software To monitor the status of the detector and detector electronics, use the INCAx-act support software. You can export the viewed data to a worksheet or file. 15 Installation Instructions Installation Instructions Only engineers trained by Oxford Instruments are permitted to install, repair or service xact and INCA systems. Failure to comply will invalidate the system warranty and could damage the system or cause injury to personnel. Unpacking the detector The INCA x-act detector is shipped in a box specifically designed to accommodate its shape. 1. Check the ShockWatch indicators on the outside of the box. If they are red, contact the freight carrier, and do not accept the delivery. 2. Confirm that the contents match the packing list. 3. After installation, retain the packing materials for return shipment of any part of the system if it is necessary. If the original packaging is disposed of after installation, Oxford Instruments will charge for a new set of packaging material. The use of the incorrect packaging will invalidate the warranty. Tools required l l l l l Allen keys Latex (or other plastic) gloves Lint-free cleaning materials Ethanol or Isopropanol Digital Volt Meter (DVM). Using the Install software Follow the instructions in the INCAx-stream and INCAmics 'Installation and User's Guide', 'System Installation' (Guided Install). The INCAx-act detector requires Microanalysis suite 21A or higher. Any existing installation information resides in C:\Program Files\Inca\data\install.ipj. Before beginning the new installation, you can copy the date or rename the file, as a back-up. 1. Start the installation program from C:\Program Files\Inca\bin\install.exe, or click on the install icon. Log on as an OEM or Oxford Instruments NanoAnalysis engineer. 2. Select Abort, to abort any current install data. 3. Follow the guided install. 17 Installation Instructions About the interfaces The detector interface is supplied in two parts. The detector main body has an interface adapter that fits to a microscope-specific interface. The microscope-specific interface must be fitted to the chamber port before the detector is installed to that interface. Microscope-specific interface being fitted to port. This is fitted before the detector is installed, through this interface, to the chamber. Interface adapter for the main body of the detector. The detector is installed through the microscope-specific interface. The adapter is joined to the microscope-specific interface with four (4) screws. 18 Using the Support Software Using the Support Software This software can monitor the status of the INCAx-act detector. Installing the software The support software is installed as part of the suite to the following directory: C: \Program Files\INCA\bin\. To start the program, click on the file, IncaXactSupport.exe . To view on-line help for the software, press F1 or click Help, then Contents. Software features The INCAx-act support software displays the configuration (first figure) and current status (second figure) of the detector. The information is gathered at set time intervals and immediately updated in the display. Any measured voltages outside pre-set limits are shown in red for immediate identification. Some conditions are displayed as text statements to inform the user or engineer of their status. Monitoring of the measured values, with regular service checks, can increase up-time because predictive failures can be forecast. You can save the displayed information as a text file or in a worksheet format. 19 Using the Support Software Several parameters are displayed. These identify various items of information such as the hardware and firmware revision. The result of the initial Power ON Self Test (POST) is displayed. A value of '0' indicates that the system has powered on correctly, i.e. no errors have been detected. Full details of each item are described in the help menu. The Appendix of this manual also describes the error codes. 20 Repair Procedures Repair Procedures The procedures include: l l l Replacing the pressure sensor Replacing the pre-amp board Replacing the control board TDA label and HV warning label These labels are on the EMC cover underneath the main cover. The TDA label specifies: l l l l l TDA serial number nnnn; a sequential number starting at 0001 TDA sub assembly part number Sensor serial number (can ID), XNaaaa. Voltage settings for XNaaaa (R1, RX, Back / Sub) for optimum performance of the detector. Temperature to set Detector to as a default TDA label HV warning label Replacing the pressure sensor Observe static precautions. PCB assemblies are extremely fragile. They are static-sensitive. ESD and fragile handling precautions must be adhered to at all times. The pressure sensor has two designs. The newer design includes a tiny circuit board on one end of the ribbon cable 1. 2. 3. 4. Note the operational microscope vacuum level. Vent the microscope chamber. Remove power from the detector. Retract the detector from the column. (The detector can stay on the column for Pressure Sensor replacement). 5. Remove the Main cover. 6. Remove the EMC cover. The pressure sensor is on the detector body beneath the EMC cover. It is next to the loom feed-through. 21 Repair Procedures Older 7. Unplug the insulated ribbon cable. Older Newer Newer 8. Carefully pry the sensor out with needle-nose pliers. Take care not to let the pliers slip off the metal and damage the O-ring or sensor wires. 9. Reverse this procedure to fit the new sensor. 10. After replacing the pressure sensor, reset the operational microscope vacuum level (as noted in Step 1) . Replacing the pre-amp board Note 1 : PCB assemblies are extremely fragile. They are static-sensitive. ESD and fragile handling precautions must be adhered to at all times. Note 2: Refer to the next section if you suspect that the Control board will also be replaced. The circuit boards are on the detector body underneath the EMC cover. 1. Vent the microscope column. 2. Remove power from the detector. 3. Retract the detector from the column. (The detector can stay on the column for PCB replacement). 4. Remove the main cover. 5. Remove EMC cover. The components for removal are identified here. 22 Repair Procedures 6. Remove the Pre-amp board . (The board is held in place with a locking pin) 7. Reverse this procedure to replace the pre-amp board. Replacing the control board 1. Vent the microscope chamber. Note: Part of the replacement procedure requires the detector to be connected but warm. With the chamber vented, the detector will not cool when mains power is applied. 2. Remove power from the detector. 3. Retract the detector from the column. (The detector can stay on the column for PCB and sensor replacement). 4. Remove the main cover. 5. Remove the EMC cover. 6. Remove the Pre-amp board  (It is held in place with a locking pin). 7. Disconnect the PCB harness . Caution: Do not over-flex the cable. 8. Unscrew the two locking nuts of the 9-pin connector . 9. Remove the two holding nuts and washers of the control board . 10. Pinch the Control board locking pin  to lift the Control board away from the detector body. 11. Replace the Control board; connect the pre-amp board, harness and pressure sensor and covers by reversing the above procedure. 12. Wind the detector to the stop position. 13. Restore mains power. 14. On the menu, select Tools/Board replacement. 23 Repair Procedures Note: To continue this procedure, the detector must have been warm for at least 15 minutes. 15. Enter data into the Detector Information' boxes. (This information is on the TDA label on the EMC cover). The Secondary Temp. reading must be within +/- 10 degrees Celsius of ambient temperature. If you do not know the Detector Type ID, see the next table. Detector Part number Info file to use Detector type ID 51-1385-002 51-INFO-0009 9 51-1385-003 51-INFO-0009 9 51-1385-005 51-INFO-0009 9 51-1385-006 51-INFO-0009 9 51-1385-026 51-INFO-0009 9 51-1385-029 51-INFO-0026 26 51-1385-034 51-INFO-0026 26 51-1385-046 51-INFO-0026 26 16. When you have entered all the information, click OK. 24 Appendices Appendices Yearly maintenance check l l l l l l l l l l l l Check that can voltages are within limits Check TEC temperatures are within limits Check TEC currents are within limits Check any reported POST errors Check operation of pressure switch Check detector resolution Change desiccant as required Check operation of Slide and correction stop position is set Check operation of LEDs on cover Perform preventative maintenance on mics/x-stream hardware as per schedule Check surge-protection LED Report any impending failures and remedial action as necessary to customer and support centre. Preventive maintenance checklist for x-act For INCA x-stream/mics and x-act Detector Site code ____________________ System S/N ____________________ Site name ____________________ Detector S/N ____________________ Contract ____________________ no. Detector Model ____________________ Contract ____________________ Type Detector Window ____________________ Call no ____________________ Microscope ____________________ Model Date ____________________ PC Model ____________________ Section 1. General system 1. Inspect equipment for signs of physical damage and/or modification. List the details below: 25 Appendices 2. Check cabling is complete and securely connected. Ensure cables are not stretched or liable to damage. 3. Ensure all cabling is neat and tidy. Ensure all cabling is away from any possible sources of electrical / electronic noise. 4. Clean exterior surfaces, screen, printer, monitor and tabletop etc. and vacuum-clean the keyboard. 5. Start INCA Monitor and run System check “I do not know where the problem lies”. Print out report. 6. Check available disk space on C:\ drive. Advise customer if less than 10%. 7. If fitted, check that the surge-protection LED in the power strip is still glowing. (If the LED is not glowing, the surge protection is no longer active and the power strip must be exchanged). Section 2. Checking the x-act detector Use x-act support software to check the following: 1. 2. 3. 4. 5. 6. 7. 8. 9. Check can voltages are within limits Check TEC temperatures are within limits Check TEC currents are within limits Check any reported POST errors Check operation of pressure switch Change desiccant as required Electromechanical checks. Check operation of slide and that the stops are set correctly. Check correct operation of LEDs on outer cover. Resolution Check. Run strobe resolution test in Monitor software and check the resolution is in spec. Process Time Strobe FWHM Mn kα FWHM PT1 PT2 PT3 PT4 PT5 PT6 10. Ramp check. Measure ramp time of the quiescent ramp on the input monitor BNC on the x-stream with the beam off. Ramp Time = ______________________ ms Section 3. Checking the x-stream module 1. Check the operation of the cooling fan. (Listen for the noise of the fan turning.) 2. Vacuum-clean fan inlet and outlets (non-clean room applications only). 3. View the status log. Examine for any “x-stream” and “Detector Control Unit” reported error conditions. Give details of errors below: 26 Appendices Section 4. Checking the mics module (where applicable) 1. Acquire a Site of Interest of a SE image from a reference grid using the following conditions: Resolution = 512 x nnn, Speed = Kalman. Overlay the marker bar on the image. (Note: Ensure that the magnification used is set in Microscope Control before collecting the image). 2. SEI Brightness / Contrast check. Check that the brightness and contrast of the acquired image correspond to the brightness and contrast set on the microscope display. 3. Is the image linear? Check linearity of the image by measuring the grid pitch spacing horizontally and vertically across the image. Attach a printout to the service report. 4. Is the Aspect ratio correct? Check the aspect ratio of the collected image is the same as the microscope. 5. Is the Marker bar correct? Check the marker bar calibration is correct. 6. If available, acquire a BSED (Tetra) image from a reference grid. 7. BSED Brightness / Contrast check. Check that the INCA Tetra image brightness and contrast correspond to microscope Tetra image. Attach a printout to the service report. 8. Is the Blanking working? Check that the blanking is working correctly during INCA imaging control (where applicable). 9. View the status log. Examine for any mics -eported error conditions. Give details of errors below, Section 5. Checking the microscope control (where applicable) 1. Check the operation of Microscope Control by ensuring the magnification, kV etc. are read by INCA. Change magnification from Microscope Control and check the microscope changes magnification and displayed value. 2. Where applicable, check that the stage initialization is correct by comparing the co-ordinates in Microscope Control with the microscope stage position. 3. Where applicable, check the operation of the stage control by moving the microscope stage, and ensuring that the stage co-ordinates are read by INCA. Move the microscope stage from INCA. Check for correct movement of the stage and that the new stage position is read by the microscope or stage controller. 4. Do the stage limits work? Where applicable, ensure that the stage limits are functioning correctly by carefully driving to the limit. Report any hazardous conditions to the customer. Section 6. Summary 1. Note any observed defects, failures, etc. during visit, action taken and parts used (as required). 27 Appendices Section 7. Further action 1. Describe further action, e.g. visit, parts, etc. required to ensure proper system operation, (as required). 2. Include Order Numbers, Service Call Numbers (if known). The maintenance work has been completed satisfactorily. Signed Name Position Date Next maintenance due Engineer Parts list Part numbers Description 51-1137-001 Tested x-act assembly 51-1128-487 PCBA INCAx-act DETECTOR CNTRL 51-1294-031 THERMAL PAD FOR 51-1128-487 51-1128-488 PCBA INCAx-act PREAMP 51-1104-058-01 BELLOWS 70MM STROKE X-ACT 51-1106-1195 CABLE MERCURY EDS PREAMP 5m 51-1390-105 MOLECULAR SIEVE CAPSULE 51-1390-106 PLUG BLANKING g1/4 WITH O RING 51-1286-005 PRESSURE TRANSDUCER +/-15psi (Older version) 51-G-1286-013 PRESSURE TRANSDUCER +/-15psi (Newer version) 51-1380-012 O-RING 016 I/D=15.5 CSD=1.78mm 51-1380-060 O-RING 128 I/D=37.77 CSD=2.62 51-1380-063 O-RING 132 I/D=44.21 CSD=2.62 28 Appendices Cabling the INCA x-act detector Refer to the INCA x-stream and mics Installation and User's Guide to perform this task. Route Description Part number Detector to x-stream and power supply 15-way D-socket to D-plug and 2.5mm power socket 51-1106-1195 (5m) or Detector power adapter 24V PSU 51-1420-087 mics to x-stream IEEE 1394 cable 1.0m 51-G-1106-1418 mics to x-stream CAS cable 0.5m 51-1106-1054 mics to x-stream chassis connect cable To PC 51-1106-1204 (10m) 51-1106-1073 IEEE 1394 Cable 4.5m 51-1106-1024 Refer to the section, Generic cabling diagram on the next page. 29 Appendices Generic cabling diagram 30 Appendices Detector description A block diagram of the detector and its electronics is shown next. x-act detector electronics The x-act detector comprises of an Analytical Drift Detector (ADD) chip, a Field Effect Transistor ( FET), a temperature sensor and a Peltier cooler. Heat from the Peltier is transmitted along a heat path to a heatsink in the main body of the detector. A loom of wire provides electrical connections from the main electronics board to the front end electronics. The heat path and loom are within an outer tube, which is filled with a dry gas (to prevent condensing liquid). When connected to an electron microscope column, the column atmosphere is connected to a pressure sensor through bellows, thus a measurement can be made of column pressure. The x-act electronics comprises: l l l l l l l l l A microprocessor to provide control and communications I2C communication interface to the pulse processor Charge-sensitive preamp producing stepped ramp output ‘Quiet’, controllable, filtered switching power supplies for primary and secondary Peltier coolers. Other power supplies. High-voltage generator Filtered regulator circuits to give bias supplies to ADD and FET Measurement circuits for measuring temperatures and pressure as well as internal diagnostics LEDs to quickly indicate the status (cold, cooling, standby or error states) The cooling is controlled by Proportional, Intergral, Differential (PID) control loops within the microcontroller. The temperature-sense diode is used to control power. Both ADD and thermal shunt 31 Appendices set-point temperatures are written into the microcontroller’s non-volatile memory. In normal operation, cooling starts as soon as the detector is powered. Typically, cooling is complete in under two minutes. The cooling is interlocked with the pressure sensor so that cooling does not occur if the microscope column is at atmospheric pressure. Error codes These error codes may appear on the Configuration page in the Support Software. ADD POST error codes 32 Flag Problem Text 1 INTERNAL_I2C There was a problem with the internal I2C bus. 2 DAC_1 There was a problem communicating with DAC 1. 3 DAC_3 There was a problem communicating with DAC 3. 4 POWER_ INITIALISE There was a problem during power initialization. 5 TEST_PULSE_ INITIALISE There was a problem during test pulse initialization. 6 ADC_1 There was a problem communicating with ADC 1. 7 ADC_2 There was a problem communicating with ADC 2. 8 CAN_INCORRECT_ The detector can is incorrectly orientated or ORIENTATION_ broken. OR_BROKEN 9 P24V_OUT_OF_ LIMIT The +24V power rail was outside acceptable limits. 10 N24V_OUT_OF_ LIMIT The -24V power rail was outside acceptable limits. 11 P2V5REF_OUT_ OF_LIMIT The +5V power rail was outside acceptable limits. 12 BOARD_TEMP_1_ OUT_OF_LIMIT The board temperature (1) was outside acceptable limits. 13 BOARD_TEMP_2_ OUT_OF_LIMIT The board temperature (2) was outside acceptable limits. Appendices ADD Shutdown error codes Hexadecimal Problem Flag Text 1 POST_FAILED The detector failed its power-on self test. Please contact your Oxford Instruments supplier for more information. 2 ADC_READ_ FAILED An ADC read failed. 4 DAC_WRITE_ FAILED A DAC write failed. 8 TIMER_QUEUE_ OVERFLOW The timer queue overflowed. 10 SECONDARY_ TEMPERATURE_ PROBLEM There was a problem with the secondary temperature. 20 PRIMARY_ TEMPERATURE_ PROBLEM There was a problem with the primary temperature. 40 UNIDENTIFIED_ The detector was in an unidentified INTERNAL_STATE internal state. 80 FAILED_TO_ COOL_NORMAL_ MODE The environmental temperature has exceeded the normal working range. To continue working, INCAx-act must be switched to extended range. Change to extended range using the Xray Calibration step in INCA Monitor. 100 P24V_OUT_OF_ LIMIT The +24V power rail was outside acceptable limits. 200 N24V_OUT_OF_ LIMIT The -24V power rail was outside acceptable limits. 400 P2V5REF_OUT_ OF_LIMIT The +5V power rail was outside acceptable limits. 800 BOARD_TEMP_1_ The detector has overheated. Please OUT_OF_LIMIT ensure that you have adequate airflow around the detector. 1000 BOARD_TEMP_2_ The detector has overheated. Please OUT_OF_LIMIT ensure that you have adequate airflow around the detector. 2000 HV_OUT_OF_ LIMIT The detector HV was outside acceptable limits. 4000 BACK_OUT_OF_ LIMIT The detector back voltage was outside acceptable limits. 8000 RING_1_OUT_OF_ The detector ring 1 voltage was out- 33 Appendices Hexadecimal Problem Flag 34 Text LIMIT side acceptable limits. 10000 RING_N_OUT_ OF_LIMIT The detector ring n voltage was outside acceptable limits. 20000 SUBSTRATE_ OUT_OF_LIMIT The detector substrate voltage was outside acceptable limits. 40000 FAILED_TO_ COOL_ EXTENDED_ MODE The environmental temperature has exceeded the extended working range. INCAx-act cannot function under these environmental conditions.
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