ECO 3000 User`s Guide

ECO 3000 User`s Guide
The information in this publication is provided for reference only. In providing you with the
information contained in this document, Thermo Nicolet has taken reasonable measures to provide
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Copyright © 2002 by Thermo Nicolet Corporation, Madison WI 53711. Printed in the United States
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For technical assistance, please contact:
Thermo Nicolet Corporation
5225 Verona Road
Madison WI 53711-4495
Telephone: 800-642-6538 or 608-276-6373
Fax: 608-273-5045
E-mail: Careplan.Techsupport@thermo.com
ECO and OMNIC are registered trademarks of Thermo Nicolet Corporation.
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269-141700
Contents
Part 1 — Introduction .............................................................. 2
Questions or concerns....................................................... 3
Conventions....................................................................... 4
Training.............................................................................. 4
Tips for safe operation ....................................................... 5
Software ............................................................................ 7
ECO ............................................................................. 8
ECO Research ........................................................... 10
ECO Equipment Automation software........................ 11
On-line help................................................................ 11
For the Sampling Module...................................... 12
For the Setup Module ........................................... 13
For the Research Module ..................................... 14
On-line Operator’s Guide ........................................... 16
Part 2 — Operator’s Guide.................................................... 18
Metrology tool basics ....................................................... 19
Operator interface ...................................................... 20
Load ports .................................................................. 21
Manual delivery FOUP loaders ............................. 21
Status indicators .............................................. 21
Load door ........................................................ 22
Loading a FOUP.............................................. 23
Automation-capable FOUP loaders ...................... 25
Status indicators .............................................. 25
Load door ........................................................ 27
Loading a FOUP.............................................. 28
Cassette loaders ................................................... 31
Status indicators .............................................. 31
Load door ........................................................ 32
Loading an open cassette ............................... 33
Emergency Off ........................................................... 37
Light tower.................................................................. 38
Spectrometer status indicators................................... 39
Inside the tool .................................................................. 40
Spectrometer compartment........................................ 41
Utility compartment..................................................... 42
Wafer handling compartment ..................................... 43
Analyzing wafers ............................................................. 44
Part 3 — System Administrator’s Guide................................ 50
System components ........................................................ 51
Load ports .................................................................. 52
Equipment automation interfaces.......................... 53
Qualifying carrier changes .................................... 54
Operator Interface ...................................................... 55
Touchscreen ......................................................... 55
Keyboard with trackball ......................................... 56
Spectrometer status indicators.............................. 58
Light tower ............................................................ 59
Status Alerts .................................................... 60
Changing the light tower status ....................... 60
Utility compartment..................................................... 62
Opening the utility compartment ........................... 62
Computer, rear display and keyboard ................... 63
Power drawer........................................................ 67
Circuit breakers ............................................... 68
Pneumatics, purge, and vacuum panel................. 69
Air and nitrogen supply specifications ............. 70
Connections..................................................... 71
Typical system settings.................................... 72
Lock out/tag out .................................................... 73
Electrical .......................................................... 73
Gas sources .................................................... 74
Spectrometer compartment ........................................ 74
Optical components .............................................. 75
Fundamentals of infrared analysis ........................ 76
Wafer handling compartment ..................................... 80
Wafer handler ....................................................... 81
Prealigner.............................................................. 81
Internal cassettes.................................................. 81
Transmission detector........................................... 81
Minienvironment.................................................... 82
Maintenance .................................................................... 83
Periodic maintenance schedule ................................. 83
Powering on ............................................................... 84
Turning off the metrology tool..................................... 92
Locking out the electricity ........................................... 94
Locking out purge and pneumatic gas........................ 97
Checking gas pressure and flow rates ..................... 100
Aligning the optical components............................... 102
Running the Self test ................................................ 104
Testing performance ................................................ 105
Testing optical performance................................ 105
Testing wafer handling........................................ 106
Running the signal-to-noise test.......................... 107
Replacing the source................................................ 109
Checking and changing minienvironment / optics
purge filter ................................................................ 119
Checking and changing external gas filters.............. 127
Cleaning the metrology tool...................................... 131
Clearing broken wafers ........................................... 132
Lifting or moving the metrology tool......................... 139
Parts list ................................................................... 140
Part 1 — Introduction
This manual describes how to operate the Thermo Nicolet
ECO® 3000 metrology tool.
The ECO 3000 metrology tool uses the Fourier Transform
infrared (FT-IR) spectroscopy technique to characterize the
composition of semiconductor wafers and the composition,
uniformity and thickness of dielectric and epitaxial wafer films.
It can provide information about the interstitial oxygen and
substitutional carbon (C&O) in the silicon substrate, the
epitaxial layer film layer thickness (EPI), and the dopant
concentration (boron and phosphorus) in glass dielectrics
(BPSG). It is designed to automatically handle silicon wafers
of different sizes in a clean room environment.
2 Thermo Nicolet
No sample preparation is required for FT-IR analysis and
samples are neither contaminated nor destroyed during the
analysis.
The system is designed to satisfy stringent industry
requirements for manufacturing and testing semiconductor
wafers and is manufactured in a controlled environment. It
complies with S2-200 and S8-95 specifications for safety and
ergonomics from Semiconductor Equipment Manufacturers
International (SEMI). Important safety precautions appear
throughout the guide.
Questions
or concerns
In case of emergency, follow the procedures established for
your facility. If you have questions or concerns about safety,
operating the metrology tool, or if you need assistance with
repairs or replacement parts:
1. Contact your supervisor.
2. Check the documentation available from the ECO
Research software's Help menu and in the manual set.
3. Contact your Thermo Nicolet representative.
In the U. S. A.
Call 1-800-642-6538
or 1-608-276-6373 for assistance.
Outside the U. S. A.
Call your local Thermo Nicolet office. Telephone numbers
for all Thermo Nicolet offices were included in your manual
set. A current listing is maintained in About Us on the
Thermo Nicolet web site at: http:\\www.thermo.com/nicolet
For answers by e-mail or fax
E-MAIL: Careplan.Techsupport@thermo.com
FAX: 608-273-6883
ECO 3000 User’s Guide
3
Conventions
Note
▲ Important
The following conventions are used in this manual to draw
your attention to important information:
Notes contain helpful supplementary information. ▲
Follow instructions labeled “Important” to avoid damaging the
system hardware or losing data. ▲
Caution
Indicates a potentially hazardous situation which, if not
avoided, may result in minor or moderate injury. It may also be
used to alert against unsafe practices ▲
Warning
Indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury. ▲
Danger
Training
Indicates an imminently hazardous situation which, if not
avoided, will result in death or serious injury. ▲
To operate an ECO 3000 safely, all operators should read
the on-line tutorial entiled ECO 3000 Operator’s Guide and
the Metrology Tool Safety Guide. In addition, all system
administrators, service and maintenance personnel, and
process engineers who will be working with or on the
metrology tool should read the ECO 3000 User’s Guide (this
manual). These three resources provide the necessary
information for safe operation of the metrology tool. You may
also wish to consult the ECO Software User’s Guide or the
various on-line Help systems for information about ECO,
ECO Research, and OMNIC software.
The ECO 3000 must be installed, maintained and serviced
by a Thermo Nicolet (or Thermo Nicolet-trained) service
engineer. A listing of current training opportunities is
available on the Thermo Nicolet web site at:
http//:www.thermo.com/nicolet
4 Thermo Nicolet
Tips for
safe operation
The ECO 3000 metrology tool complies with the stringent safety
and ergonomics standards from Semiconductor Equipment
Manufacturers International (SEMI). More detailed safety
information is included throughout this manual and in the
Metrology Tool Safety Guide.
Keep the following in mind while operating the tool:
• Keep hands away from moving parts that can cause injury.
• Two Emergency Off buttons allow you to quickly turn off
the tool to prevent operator injury and wafer damage.
• During normal operation, keep the utility and wafer
handling compartments closed.
• If you are required to perform a procedure that requires
opening the wafer handling compartment,turn off the
nitrogen, open the compartment door, and wait at least one
minute (for breathable air to enter the compartment) before
you begin working.
• If you are required to perfom a procedure that requires
opening the utility compartment, remember that the
computer and rear display remain energized while the
Emergency Off switch is activated.
• Never attempt to move the tool without assistance.
ECO 3000 User’s Guide
5
6 Thermo Nicolet
Software
ECO software is designed so common tasks such as sampling
and maintenance operations can be run from a Touchscreen.
This eliminates the need for a conventional keyboard in your
wafer manufacturing lab. If you use ECO outside the lab or if
you prefer to run software the conventional way, you can attach
the keyboard and mouse or trackball.
As a Windows™ application, ECO software has the flexibility to
combine its data collection and analysis features with your own
applications for data analysis and communications.
Unlike most Windows applications, which have a single program
icon, ECO software has two—ECO and ECO Research. Use the
ECO icon to access the push-button environment of the
Sampling and Setup Modules. Use the ECO Research icon
when you want full access to the data collection and processing
capabilities. Only one of the program configurations can be run
at a time.
Although ECO and ECO Research appear to be two separate
programs, they are actually two configurations of the same
program. The underlying software for both programs is
OMNIC FT-IR spectroscopy software.
OMNIC
ECO
Research
ECO
Setup
Module
Sampling
Module
Research
Module
This tiered design ensures that the same wafer analyzed from
two different modules using the same quantitative analysis
method gives the same answers.
ECO 3000 User’s Guide
7
ECO
ECO includes the Sampling and Setup Modules, which use a
push-button interface for operating a dedicated metrology tool.
Sampling Module – The Sampling Module is designed for the
manufacturing process technician running day-to-day
samples. Only those software features required to verify the
system's performance, run samples, and view analysis results
are included. The analysis process is defined by the selected
method. Press the ECO icon in the upper right corner of the
Sampling Module to find the version number of the ECO
software loaded on your tool and to access the ECO 3000
Operator’s Guide.
8 Thermo Nicolet
Setup Module – Access to the Setup module is security
controlled. The Setup Module is organized in three parts:
System Setup, Method Setup, and Diagnostics. These are the
three main tasks of the on-site process engineer. System
Setup provides access to the system parameters. Method
Setup is the method creation portion of the software. Methods
allow you to customize the analysis process for a particular
group of wafers. Diagnostics can be used to test component
operation and system performance.
ECO 3000 User’s Guide
9
ECO Research
The Research Module is an FT-IR spectroscopy package with
added functionality for accessing a metrology tool. ECO
Research is a sophisticated software package for collecting and
analyzing FT-IR (Fourier-Transform infrared) data from the
semiconductor wafers. Aimed at the materials research
specialist, the Research Module provides tools for advanced
study of wafer analysis data and methodology.
The Research Module offers a flexible environment for
displaying and processing FT-IR spectra using a standard
menu-style interface.
10 Thermo Nicolet
ECO
Equipment
Automation
software
The ECO Equipment Automation software is a communications
package that facilitates metrology tool monitoring and control
from a host computer. The ECO Equipment Automation
software sends and receives data through standard connections
using SECS (SEMI Equipment Communications Standard)
protocols for message format, GEM (Generic Equipment Model)
communication and state models, carrier management,
substrate tracking, process job management, and control job
management. The software works with standard HSMS (HighSpeed SECS Message Services) Ethernet-based and SECS I
RS-232 interface connections. The ECO Equipment Automation
Software User’s Guide, located on the ECO Documentation CD,
contains more information about using this software package.
On-line help
The on-line and printed documentation included with your system
is designed to let you find the information you need quickly. We
recommend first using the on-line documentation provided with
ECO and ECO Research when you have a question. ECO
Research includes several on-line books, tutorials for OMNIC
functions, and a complete Help system for all three software
modules to give you easy access to information while you are
using the software. Use Help for information about how to use a
feature. .
ECO 3000 User’s Guide
11
For the
Sampling Module
The Sampling Module includes context-sensitive on-line help to
provide information about the features on your screen. To turn on
context-sensitive on-line help for features in the Sampling
Module, press the question mark (?) button. The button turns
white when you press it, indicating that on-line help is active.
The initial Help window describes how to use context-sensitive
help.
To display help information about a feature on your screen,
press Done to close the initial Help window and touch or click
on the feature. A Help window that contains information about
the feature appears.
The illustration that follows shows the help screen for the
Method button.
The buttons in the bottom of this help window lead to
information about the other options in the Method screen.
To see information about another feature, press Done to close
the Help window then, touch or click on the new feature you
wish to learn about.
When you are finished using Help, press Done to close the
current Help window and press the Question mark (?) button
to turn off on-line help.
12 Thermo Nicolet
For the
Setup Module
The Setup Module includes on-line help to provide information
about the Setup Module commands. To display help information
for a button on the screen, press the question mark (?) button at
the top of the screen.
When you click on the ? button, the button turns white,
indicating that on-line help is active. A Help window appears
that contains information about the commands currently on the
screen.
The Help screen for the Setup Module.
To display detailed information about a command in the
current Setup Module screen, press one of the buttons along
the bottom of the Help window. For example, to display help
information about the Parameters subgroup, you would press
the Parameters button at the bottom of the help window
shown above.
When you are finished using Help, press Done to close all the
open Help windows. The (?) button turns back to gray to
indicate that on-line help is no longer active.
ECO 3000 User’s Guide
13
For the
Research Module
The Research Module includes on-line help to provide
information about a feature on the screen. The on-line help
included in the Research Module works essentially the same
as other Help software found in Windows applications and in
Windows itself. If you have not used Windows Help before,
see the manuals that came with your Windows software for
complete information about on-line help. You can also choose
Using Help from the Help menu to see information about the
Help features.
ECO 3000 Research Module. The ECO menu is displayed.
14 Thermo Nicolet
• You can see information about a particular feature in ECO
Research (such as a parameter in a dialog box) by clicking
the item using the right mouse button. A brief description of
the item appears, and in most cases one or more buttons
that you can click to display more detailed information.
Here is an example:
Click the Discussion button to display a complete discussion
of the item (or the dialog box or window that contains the
feature). Click the How To button to display a step-by-step
procedure for using the item (or the dialog box or window
that contains the item).
• You can press the F1 function key to see a discussion
topic for the currently displayed or selected feature, dialog
box or window.
• If a dialog box or window contains a Help button, click it to
see information about the dialog box or window (or the
command that displayed it).
• To see the Contents of the ECO Research Help system,
choose Help from the ECO menu.
Here is an example of the Contents tab showing the
contents of some of the books in the system:
ECO 3000 User’s Guide
15
On-line
Operator’s Guide
The on-line Operator’s Guide provides an introduction to the
metrology tool, basic information about:
●
●
●
ECO 3000 controls and safety features
Manually loading a carrier (FOUP or cassette)
Analyzing wafers
Press the ECO icon to start the
ECO 3000 Operator’s Guide
A message box that provides information about your ECO
software appears. Press the Operator’s Guide button to start
the tutorial.
16 Thermo Nicolet
Each person who will be operating the tool should review this
tutorial.
ECO 3000 User’s Guide
17
Part 2 — Operator’s Guide
The ECO 3000 FT-IR metrology tool allows the use of
Fourrier-Transform infrared (FT-IR) spectroscopy to perform
EPI and MEMS thickness measurements and quantitative
characterizations during the manufacturing and testing of
semiconductor wafers.
This part of the manual provides system administrators and
process engineers with the same basic information presented
to tool operators in the on-line Operator’s Guide. It includes:
●
●
●
18 Thermo Nicolet
ECO 3000 controls and safety features
Instructions for loading a carrier (FOUP or cassette)
Instructions for analyzing wafers
Metrology
tool basics
Each ECO 3000 metrology tool is equipped with:
●
●
●
●
●
A Touchscreen (the tool may also have an optional
keyboard and mouse)
One or two load ports
Status indicators for the load port(s), the spectrometer,
and the minienvironment filtering system.
Two Emergency Off buttons
A light tower
Your metrology tool may differ slightly in appearance from the
illustrations in this guide. The functions illustrated are the
same.
Note
FOUPs (Front Opening Universal Pod) or wafer cassettes in
your fab may differ slightly from those shown in this tutorial.
Contact your supervisor if you have questions about the wafer
carriers used in your fab. ▲
ECO 3000 User’s Guide
19
Operator interface
All ECO 3000 metrology tools are equipped with a
Touchscreen display. Your tool may also have an optional
keyboard with trackball.
For an ECO 3000 with a Touchscreen display and no
keyboard/trackball, use your finger to choose options and
enter data. When given an instruction such as "press
Operator," touch the button labeled Operator.
For an ECO 3000 with both a Touchscreen and a keyboard
with trackball, you may use either your finger or the keyboard
with trackball to operate the metrology tool.
20 Thermo Nicolet
Load ports
An ECO 3000 metrology tool may be equipped with:
●
●
●
One or two FOUP load ports
One or two open cassette load ports
A combination of FOUP and cassette load ports.
Manual delivery
FOUP loaders
This section describes FOUP load ports that are designed for
manual delivery. It provides information about the status
indicators, safety features, and the proper procedure for
loading a FOUP on the port.
Status indicators
Manual delivery FOUP load ports are equipped with a series
of indicators that light to indicate the status of the port. If the
load port on your metrology tool appears different from those
shown here, see the load port documentation for specific
information.
Ready — When the READY indicator glows, the load port can
be loaded with a FOUP.
Carrier present — When the load port senses a FOUP in the
vicinity, CARRIER PRESENT glows.
Carrier in place — Once a FOUP has been properly placed
on the load port, CARRIER IN PLACE glows.
Error — If at any time the ERROR indicator glows or flashes,
contact your supervisor.
ECO 3000 User’s Guide
21
Load door
Warning
22 Thermo Nicolet
Each manual delivery FOUP load port on an ECO 3000 has
an automated load door that protects you from exposure to
moving parts in the wafer handling compartment.
Never operate an ECO 3000 if the load port door(s) have been
removed or do not open and close properly. Moving parts
inside the wafer handling compartment can crush or pinch. ▲
Loading a FOUP
Warning
To load a FOUP:
Never operate an ECO 3000 if the load port door(s) have been
removed or do not open and close properly. Moving parts
inside the wafer handling compartment can crush or pinch. ▲
1. Verify that the loader is ready.
2. Verify that the FOUP is locked.
ECO 3000 User’s Guide
23
3. Place the FOUP on the loader.
Be sure that the slots on the bottom of the FOUP are
aligned with the pins on the loader.
4. Check the status indicator.
The Ready, Carrier Present, and Carrier in Place indicators
all glow when the FOUP is properly placed.
24 Thermo Nicolet
Automation-capable
FOUP loaders
Status indicators
The ECO 3000 can also be equipped with a load port that can
be used with an automated FOUP delivery system. Both cart
and overhead track systems can be accommodated.
If your tool is equipped with a load port that is capable of
automated operation, as many as eight indicators light to
indicate the status of the load port:
The number indictors and the specific color and location of
each indicator was specified by your fab. Contact your
supervisor for more information about each indicator.
Typically, you will see:
ECO 3000 User’s Guide
25
Manual — When the MANUAL indicator glows, the port is
configured for manual load and unload. Usually, this indicator
is used in conjunction with the LOAD READY and UNLOAD
READY indicators.
Load Ready — When the LOAD READY indicator glows, the
load port can be loaded with a FOUP. This indicator blinks
while a carrier is being loaded. When this indicator is off, no
manual load is permitted.
Unload Ready — When the UNLOAD READY indicator
glows, the FOUP on the load port can be unloaded. This
indicator blinks while a carrier is being unloaded. When this
indicator is off, no manual unload is permitted.
Auto — When the AUTO indicator glows, the port is
configured for automated operation. This indicator is ytpicaly
used in conjunction with the RECEIVE indicator.
Receive — When the RECEIVE indicator glows, the load port
is ready to receive a FOUP.
Presence — When the load port senses a FOUP in the
vicinity, PRESENCE indicator glows.
Placement — Once a FOUP has been properly placed on the
load port, PLACEMENT glows.
Alarm — When the ALARM indicator glows or flashes, contact
your supervisor.
26 Thermo Nicolet
Load door
Warning
Each automation-capable FOUP load port on an ECO 3000
tool has an automated load door that protects you from
exposure to moving parts in the wafer handling compartment.
Never operate an ECO 3000 if the load port door(s) have been
removed or do not open and close properly. Moving parts
inside the wafer handling compartment can crush or pinch. ▲
ECO 3000 User’s Guide
27
Loading a FOUP
Warning
To load a FOUP:
Never operate an ECO 3000 if the load port door(s) have been
removed or do not open and close properly. Moving parts
inside the wafer handling compartment can crush or pinch. ▲
1. Verify that the loader is ready.
2. Verify that the FOUP is locked.
28 Thermo Nicolet
3. Place the FOUP on the loader.
Be sure that the slots on the bottom of the FOUP are
aligned with the pins on the loader.
ECO 3000 User’s Guide
29
4. Check the status indicator.
The Ready, Carrier Present, and Carrier in Place indicators
all glow when the FOUP is properly placed.
Note
The loader may be equipped with a Load/Unload button.
▲
30 Thermo Nicolet
Cassette loaders
Status indicators
The ECO 3000 metrology tool can accept 300 mm wafers in
an open cassette using this load port.
If your tool is equipped with a cassette load port, three
indicators are used to show the status:
Ready and Process Complete — The PROCESS
COMPLETE and READY indicators work together to let you
know when it is safe to load and unload cassettes from the
metrology tool. When both indicators are glowing steadily,
pressing the SAFETY DOOR button enables the safety door
to be opened or closed. When either indicator is OFF or
flashing, the SAFETY DOOR button is disabled.
Fault — If at any time, the FAULT indicator glows or flashes,
contact your supervisor.
ECO 3000 User’s Guide
31
Load door
Warning
Each load port on an ECO 3000 has an automated load door
that protects you from exposure to moving parts in the wafer
handling compartment.
Never operate an ECO 3000 if the load port door(s) have been
removed or do not open and close properly. Moving parts
inside the wafer handling compartment can crush or pinch. ▲
In addition, the cassette load port has an external safety door.
When both the Ready indicator and the Process Complete
indicator are glowing steadily, you can press the Safety Door
button and open or close the safety door.
Caution
32 Thermo Nicolet
Keep hands and fingers away from the safety door as it opens
and closes. Whenever you touch the door, use the handle.
The moving parts can pinch. ▲
Loading an
open cassette
Warning
To load an open cassette:
Never operate an ECO 3000 if the load port door(s) have been
removed or do not open and close properly. Moving parts
inside the wafer handling compartment can crush or pinch. ▲
1. Verify that the loader is ready.
Check the documentation that came with the metrology
tool if the loader appears different from the one pictured
below.
ECO 3000 User’s Guide
33
2. Open the safety door.
Press the Safety Door switch and lower the door.
34 Thermo Nicolet
3. Place the cassette on the loader.
Be sure that the slots on the cassette are aligned with the
pins on the loader.
ECO 3000 User’s Guide
35
4. Close the safety door.
Press the Safety Door switch and raise the door.
36 Thermo Nicolet
Emergency Off
Warning
If you need to turn off the metrology tool quickly, use the heel
of your hand to strike one of the Emergency Off buttons.
Computer and video displays remain powered on during
EMO. ▲
Emergency Off powers off the spectrometer, wafer handler,
prealigner, and load ports. The computer and Touchscreen
remain active to allow the metrology tool to be reset by trained
personnel.
Caution
Use the Emergency Off button to turn off the analyzer only to
avoid possible operator injury or damage to wafers. If you
need to turn off the tool for any other reason, contact your
supervisor. ▲
ECO 3000 User’s Guide
37
Light tower
The light tower can be used to provide status information
about the metrology tool. Not all ECO 3000 tools are equipped
with a light tower.
It was programmed to respond to the status conditions
specified by your fab. Usually these include:
Red — Red indicates an abnormal condition that requires
immediate attention.
Yellow — Yellow indicates an abnormal condition that
requires attention.
Green — Green lights when the system is ready.
Blue — Blue lights as required by your fab.
White — White provides confirmation that the metrology tool
is in its normal operating condition.
Your supervisor can explain any variation in the light tower
status indicators.
38 Thermo Nicolet
Spectrometer
status indicators
Four indicators on the front panel, Power, Scan, Laser and
Source, light to provide information about the spectrometer
inside the metrology tool.
Under normal conditions, the Power, Laser and Source
indicators glow steadily. The Scan indicator blinks at the scan
rate of the spectrometer.
Contact your supervisor if any the status indicators do not
light. The metrology tool may need to be reset or require other
service.
ECO 3000 User’s Guide
39
Inside the tool
Inside each ECO 3000 metrology tool there is:
●
●
●
Caution
40 Thermo Nicolet
A spectrometer compartment
A utility compartment
A wafer handling compartment
There are no operator serviceable parts inside an ECO 3000.
The compartments described in this portion of the guide are
never accessed by operators during normal operation. The
compartment covers and doors protect you from any hazards
posed by moving parts, nitrogen gas, and electricity. ▲
Spectrometer
compartment
Caution
The spectrometer generates an infrared beam. This beam is
processed through an interferometer and sent to the wafer
under analysis. Infrared detectors then collect data about the
amount and frequency of radiation that passed through or
reflected off the wafer.
The ECO 3000 is a Class I laser device. A helium neon
(HeNe) laser inside the spectrometer compartment provides a
timing signal for wafer analysis.
Should you ever be in the vicinity of the metrology tool when
the wafer handling, utility, or spectrometer compartments are
open for service, do not stare into the laser beam or its bright
reflection. ▲
ECO 3000 User’s Guide
41
Utility compartment
The utility compartment contains the computer, a video
screen, a keyboard/trackball combination, a power drawer and
a pneumatics/purge panel. The main and individual
component circuit breakers are also located here.
Service personnel, systems administrators, and process
engineers may occasionally control the ECO 3000 from this
compartment. When the utility compartment is open, the
operator's Touchscreen is disabled. This prevents accidental
activation of the wafer handler while the metrology tool is
being serviced.
Should you ever need to use the Emergency Off, trained
personnel will access this compartment to restart the
metrology tool.
Caution
42 Thermo Nicolet
The utility compartment is not used (and should remain closed
and latched) during normal operation. There are no operator
serviceable parts in the utility compartment. ▲
Wafer handling
compartment
Warning
The wafer handling compartment is used to retrieve wafers
from FOUPs or cassettes, align them, deliver them to the
spectrometer for analysis, and deliver them back to the FOUP
or cassette. The 200 mm Thermo Nicolet CO and EPI
reference wafers are stored in an internal cassettes in this
compartment. The 300 mm internal cassette may contain
reference or standards wafers provided by your fab.
The wafer handling compartment is an oxygen deficient
environment. It is always closed and latched during normal
operation. Contact your supervisor if you believe that
something inside the compartment requires service.
During normal operation, this compartment is always closed
and latched. Nitrogen gas used to protect the optical
components and maintain the positive pressure required by
the Minienviroment replaces the air inside. There are also
pinch hazards associated with the wafer handler itself. Only
trained service personnel should open the wafer handling
compartment. ▲
ECO 3000 User’s Guide
43
Analyzing
wafers
To analyze wafers:
1. If your system requires you to log in, press Operator
and log in.
Contact your supervisor for information about your fab's
log-in procedure.
2. Press Application
44 Thermo Nicolet
3. Use the on-screen keypad to select the analysis you
wish to run from the list that appears.
4. Press Method.
5. Use the on-screen keypad to select the method you
wish to run from the list that appears.
6. Press Run.
ECO 3000 User’s Guide
45
7. Follow the prompts on the screen and load the FOUP
or cassette.
Note
For some loaders you may need to press a Load/Unload
button.
▲
46 Thermo Nicolet
8. Check the loader status indicators and verify that the
FOUP or cassette is properly loaded.
ECO 3000 User’s Guide
47
9. Once the FOUP or cassette is properly loaded, press
OK to begin wafer analysis.
Inside the metrology tool, the wafer handler moves a wafer
from the FOUP or cassette into the infrared beam for
analysis.
Once the analysis is complete, the wafer is returned to a
cassette or FOUP and another wafer is selected and
analyzed until the process is complete.
48 Thermo Nicolet
10. Once the process is complete, remove the FOUP or
cassette from the loader.
Note
For some loaders you may need to press a Load/Unload
button.
▲
ECO 3000 User’s Guide
49
Part 3 — System
Administrator’s Guide
This part of the User’s Guide provides system administrators,
process engineers, maintenance and service personnel with
additional information about the ECO 3000 metrology tool.
50 Thermo Nicolet
It includes information about and instructions for:
●
●
●
●
●
●
●
●
●
System
components
Fundamentals of infrared analysis
Powering on the metrology tool
Emergency shutdown
Circuits remaining powered during EMO
Lock out/tag out capabilities
Restoring power following an emergency shutdown
Changing the operator interface
Enabling and using the utility compartment interface
Data and software backup
Each ECO 3000 metrology tool includes:
●
One or two wafer load ports
●
Operator interface
●
A utility compartment
●
A spectrometer compartment
●
A wafer handling compartment
ECO 3000 User’s Guide
51
Load ports
52 Thermo Nicolet
The ECO 3000 was designed to accept either a front-opening
unified pod (FOUP) that meets the SEMI E47.1 standard or an
open cassette that meets the SEMI E1.9-0699 standard. It
accommodates 300 mm wafers, or smaller wafers within a
pre-qualified 300 mm FOUP. The load ports are positioned at
a height that meets ergonomic specifications for handling
FOUPs and open cassettes.
Equipment
automation
interfaces
To allow handshaking between the metrology tool and
overhead track automated delivery systems, a dedicated SEMI
E84 communications connector is located on the top of each
ECO 3000.
To allow handshaking with cart-based systems, an IR
interface is available on many load ports. The illustration that
follows shows a typical IR interface.
ECO 3000 User’s Guide
53
Qualifying
carrier changes
Prior to installation, an example of the type of FOUP or cassette
used at your facility was pre-qualified by Thermo Nicolet. If your
facility proposes to change the type of FOUP or open cassette that
will be used, you must send a new example to Thermo Nicolet for
qualification. All FOUPs and cassettes that are sent to
Thermo Nicolet will be returned following qualification.
For qualification, please follow the steps below:
• Obtain a Return Material Authorization (RMA) number from
Thermo Nicolet Customer Support. Call 1-800-642-6538
or 1-608-276-6373 and choose the order entry option from
the menu.
• Make sure your RMA number is clearly visible on the
exterior of the shipping container your FOUP or cassette is
in. Also, refer to your RMA number in the correspondence
you send with your carrier.
• Send your FOUP to the following address:
ECO Final Test
Thermo Nicolet Corporation
5225-1 Verona Road
Madison, WI 53711-4495
If you have any technical questions about this requirement.
Please contact Thermo Nicolet Technical Support for
assistance.
54 Thermo Nicolet
Operator Interface
Touchscreen
The operator interface includes:
●
the Touchscreen
●
an optional keyboard with trackball
●
a light tower
●
the spectrometer status indicators
●
two Emergency Off buttons
The ECO 3000 was designed to be operated using the
Touchscreen interface. The Touchscreen remains active during
EMO to prevent data loss and allow the metrology tool to be
reset. The interface is disabled whenever the utility
compartment is open, to prevent accidental activation of the
wafer handler during power restoration, maintenance, or
servicing.
ECO 3000 User’s Guide
55
Keyboard
with trackball
56 Thermo Nicolet
An optional operator keyboard/trackball is stowed in a
compartment under the Touchscreen. The compartment cover
doubles as a keyboard shelf. Simply lift the cover until the
supports snap into place and slide the keyboard/trackball out of
the compartment.
To stow the keyboard/trackball:
1. Lift the keyboard off the shelf and slide it into the
compartment below.
2. Close the compartment.
Pull the levers toward the front of the shelf until the shelf
supports release and then close the cover.
ECO 3000 User’s Guide
57
Spectrometer
status indicators
58 Thermo Nicolet
When you turn on the metrology tool, the four status
indicators—Power, Scan, Laser and Source—flash in various
sequences as the system runs through its diagnostic routines.
When the routines are finished, the Power, Laser and Source
indicators stay lighted. The Scan indicator flashes with each
scan of the interferometer.
Power — The Power indicator lights when the spectrometer
power is on and within specification..
Scan — The Scan indicator flashes with each scan of the
interferometer. If no data has been collected for an hour or
more and the spectrometer is in “stand-by” mode, the light
glows steadily. .
Laser — The laser emission indicator lights whenever the
helium/neon laser is on; if laser power fails, the indicator light
turns off.
Source — The source indicator lights while the infrared
source is on and operating within specifications. If there is a
problem with the source, the indicator light turns off..
Light tower
The light tower is configured at the Thermo Nicolet factory. The
lights can be programmed singly or in combination to respond
to the status conditions you specify. The Thermo Nicolet
service engineer who installs your system can explain the
signals if you have questions about the light tower.
ECO 3000 User’s Guide
59
Status Alerts
Usually, the tower includes the following alerts:
Red — Red indicates an abnormal condition that requires
immediate attention.
Yellow — Yellow indicates an abnormal condition that
requires attention.
Green — Green lights when the system is ready.
Blue — Blue lights as required by your fab.
White — White provides confirmation that the metrology tool
is in its normal operating condition.
If your facility has requested a change from these generally
recognized status alerts, you should advise all metrology tool
operators of the meaning of the alerts at your facility.
Changing the
light tower status
Note
You can use the Modify Status feature of your ECO software
to set the light tower to indicate that the metrology tool is not
working and should not be used. This may be useful, for
example, if the system is scheduled for maintenance. Once
set to Not Working, the red indicator lights and stays lit. The
green, yellow, and white indicators turn off and remain off until
Modify Status is used to set the tool’s status to Working.
The Working/Not Working status is saved and indicator
settings are maintained even if someone restarts or
disconnects the computer or recycles the power on the
metrology tool. ▲
To use Modify Status:
1. From the Sampling Module, choose Setup.
If a message appears asking for your password, enter a
valid password to access the Setup Module and then
choose Enter.
Note
60 Thermo Nicolet
See your supervisor if you don’t have a password. ▲
If you see the message You are not authorized to
access the Setup Module, see your supervisor for
information on changing your authorization.
2. From the Setup module, choose the System Setup
command group.
3. From System Setup, choose the Metrology tool
subgroup.
4. From the Metrology tool subgroup, choose the Modify
Status tab.
The Working and Not Working buttons appear.
5. Select the metrology tool status by choosing Working
or Not Working.
If you want the light tower to indicate that the metrology
tool is off-line, choose Not Working. The red light
immediately turns on and all other lights turn off.
If you want the light tower to indicate that the metrology
tool is on-line, choose Working. The green light
immediately turns on and all other lights resume normal
operation.
ECO 3000 User’s Guide
61
Utility compartment
Opening the
utility compartment
Caution
62 Thermo Nicolet
The utility compartment houses the:
●
power switches and AC power connector
●
built-in computer and rear display panel
●
power drawer
●
main and individual component circuit breakers
●
reset key switches
●
purge, pneumatics and vacuum panel
The compartment is accessed whenever you need to restore
power and reset the tool following an emergency shutdown,
turn off and lock out the electricity or nitrogen gas, check and
change a gas line filter, adjust the pressure or flow rate of
optics purge gas, adjust the pressure of pneumatic gas, check
system vacuum levels, check minienvironment pressure.
To open the utility compartment, turn both handles to release
the latches and then swing the door open.
To prevent accidental activation of the wafer handler during
service, the Touchscreen is disabled whenever the utility
compartment door is open. Keep the compartment door
closed during normal operation. ▲
Computer,
rear display and
keyboard
Warning
The built-in computer, a video display panel, and keyboard with
trackball are located inside the utility compartment door. During
normal operation, the computer, the front panel Touchscreen is
used to control the metrology tool. To prevent accidental
activation of the wafer handler during service, the Touchscreen
is disabled whenever the utility compartment door is open. You
can either close and latch the utility compartment door to
activate the Touchscreen or connect and use the rear display
and keyboard.
Computer and rear display remain powered on during EMO. ▲
To use the rear display and keyboard:
1. Lift the keyboard tray until the supports snap into
place.
ECO 3000 User’s Guide
63
2. Disconnect the cables labeled Video Front, Keyboard
Front, and Mouse Front from the computer.
64 Thermo Nicolet
3. Connect the cables labeled Video Rear, Keyboard Rear
and Mouse Rear to the computer.
See the documentation that came with the computer if you
are unfamiliar with connecting video, keyboard and mouse
cables.
ECO 3000 User’s Guide
65
4. Connect the power cord labeled Video Rear to the
outlet labeled Rear Display.
5. Move the Display Power switch to the On position.
I = On
O = Off
66 Thermo Nicolet
Power drawer
Warning
The power drawer contains two of the four internal power
supplies, the main power circuit breaker, switches and breakers
for individual components, the main AC power connector, and
AC power outlets for the computer and rear display.
Do not disconnect protective earth terminals inside the
ECO 3000.
Doing so creates a shock hazard. ▲
ECO 3000 User’s Guide
67
Circuit breakers
The ECO 3000 metrology tool is protected from over-voltage and
over-current conditions by a 10 ampere, 240 vac. 10,000 AIC
main circuit breaker. The breaker is located inside the utility
compartment. If the circuit breaker is tripped, follow the
instructions in the section entitled “Powering up” to reset the
breaker and restore power to the tool.
Components within the tool are further protected by a series of
circuit breakers. In the event of an over-voltage/over-current
condition, any of the following breakers may be tripped.
Component protected
Circuit breaker rating
Wafer handler
Load port #1 (front)
Load port #2 (side)
Prealigner
Fan
15 amperes,10,000 AIC
10 amperes,10,000 AIC
10 amperes,10,000 AIC
5 amperes,10,000 AIC
2 amperes,10,000 AIC
An electrical service, used to provide power to an ECO
metrology tool, must meet the following specifications.
Characteristic
Specification
Input voltage
100 to 120 vac or 220 to 240 vac
Line frequency
Branch circuit protection
50 to 60 Hz
15 ampere, 10,000 available
interrupting current circuit breaker
Sags, surges, or other line
disturbances must not exceed 10% of
input voltage (even for a half cycle)
less than 2 volts (common mode)
less than 20 volts (normal mode)
Line disturbances
Noise
68 Thermo Nicolet
Pneumatics, purge,
and vacuum panel
▲ Important
The ECO 3000 metrology tool requires a source of compressed
nitrogen to purge the metrology tool of water vapor, carbon
dioxide and other airborne contaminants. The metrology tool
contains precise optical components that may be damaged by a
moist or dirty environment. Purging (forcing nitrogen through the
metrology tool) removes airborne contaminants and protects
hygroscopic components from moisture damage.
Optical damage caused by failure to purge the metrology tool
as specified below is not covered under Thermo Nicolet
warranty. ▲
The use of purge also ensures more accurate results. This is
particularly true when you collect data for sample components
that are also present in your laboratory environment.
ECO 3000 User’s Guide
69
Danger
Never use a flammable gas to purge the spectrometer
compartment or operate the load port and wafer handling
pneumatics in a metrology tool. Heat from the source or from
laser absorption could ignite the gas. Both pneumatic and
purge gas must be free of moisture, oil and other reactive
materials. Use only nitrogen to purge the instrument. Other
gases, even inert gases such as argon (Ar), can damage the
tool. Argon is a good insulator and can cause the unit to
overheat. ▲
Either compressed nitrogen or clean, dried air may be used to
run the wafer handling system
Air and nitrogen
supply specifications
Dry air and nitrogen are considered equally effective for running
the wafer handling system and load ports. Nitrogen is required for
purging the spectrometer compartment of water vapor, volatile
solvent, and carbon dioxide interferences.
Air or nitrogen supplied to the system must meet the following
specifications.
Input pressure and flow — Input pressure and flow rate at
ambient pressure for nitrogen and dried air must be as follows:
Supply
specification
Optics/Minienvironment Loader pneumatics
input pressure
40 - 120 psig
2.7 - 8.1 atm
0.27 - 0.8 MPa
75 - 120 psig
5.1 - 8.1 atm
0.5 – 0.8 MPa
190 liters/min
300 SCFH
36 LPM
75 SCFH
input flow rate
at ambient
pressure
70 Thermo Nicolet
Purity — Nitrogen gas supplied for optics and
minienvironment purge must be free of particulate matter and
oil. A .01-micron filter is installed in series with a 10-micron
filter to filter all nitrogen supplies used by the purge system.
Clean,dry air may be supplied instead of nitrogen to run
pneumatics systems and the vacuum generator. A 10-micron
filter is installed to filter all nitrogen/air supplies used to run the
pneumatics systems. .
Moisture content — Air or nitrogen supplied for the
ECO 3000 should be dried to a dew point of -70° C (-94° F) or
below for best performance.
Connections
The illustration that follows shows the input valves for purge and
pneumatic gases.
Purge gas — The metrology tool is plumbed to accept 12 mm
tubing. The elbow fitting may be removed and the plumbing
altered to accommodate a pipe or tube that has a 0.5 inch
NPT fitting.
Pneumatic systems — The metrology tool is plumbed to
accept 6 mm tubing. The elbow fitting may be removed and
the plumbing altered to accommodate a pipe or tube that has
a 0.125 inch NPT fitting.
Note
If you wish to alter the gas plumbing, you must provide the
fittings. ▲
ECO 3000 User’s Guide
71
Typical system settings
72 Thermo Nicolet
For each ECO 3000, the purge gas pressure and flow and the
pneumatic gas pressure are individually set at the factory for
optimum performance. The settings can be adjusted, if required,
for your particular needs. The illustrations that follow show the
guages and controls on the pneumatic, purge, and vacuum panel.
Typical pressure and flow rate settings are included in the table
that follows.
regulated pressure
regulated flow rate
Minienvironment
0.1 MPa maximum
> 0.005 in. of water
not adjustable
Optics purge
0.27 - 0.8 MPa
0.3 MPa typical
25 LPM minimum
Loader pneumatics
0.5 – 0.8 MPa
0.6 MPa typical
not adjustable
Lock out/tag out
The ECO 3000 provides separate lock out capability for
electricity, nitrogen gas for purging the spectrometer
compartment, and nitrogen gas or dried air used for the wafer
handler and load port pneumatics.
Once you have locked out a metrology tool, place a tag out
label near the main circuit breaker or main power connector.
Typically, this label would indicate that the system is out of
service, the date the system was put out of service, and the
name and contact information for the person authorized to
restore the system to service.
Electrical
The ECO 3000’s electrical lock out/tag out capability allows the
metrology tool to be disabled and protected from accidental
power up in the event that it has become unsafe to operate.
The following symbols provide a reminder to lock out the
electricity in the event the tool becomes unsafe to operate and
to disconnect the tool from the AC source before opening the
power drawer.
ECO 3000 User’s Guide
73
Gas sources
The pneumatic and minienvironment/optics purge gas systems
can be turned off and locked out separately. Each will accept a
locking device with a diameter of 6mm (0.25 inch) or less.
The following symbols provide a reminder to lock out the gas
sources.
Spectrometer
compartment
The spectrometer compartment, accessible through the top
doors of the metrology tool, contains the optical components
and electronic circuitry for collecting data.
Caution
There are no user serviceable parts inside the spectrometer
compartment. Refer service to qualified, Thermo Nicolettrained personnel. ▲
74 Thermo Nicolet
Optical components
The optical components are described according to their order in
the path of the infrared (IR) beam.
Source — The source produces the beam of IR (infrared)
radiation. The ECO 3000 is equipped with an Ever-Glo™
source, which produces radiation in the mid-infrared range
(from 50 to 9600 cm-1). It is located outside the actual
compartment. The source may be replaced without opening
the spectrometer compartment. See the Maintenance section
of this manual for complete instructions.
Interferometer — Mirrors are used to direct the IR beam from
the source into the interferometer, which splits the beam,
modulates the intensity of all frequencies of IR light and then
recombines the beams. The ECO 3000 interferometer
features Auto-Tune system alignment and continuous dynamic
alignment. Periodic system alignment compensates for any
long term shift in the system's optical alignment. Continuous
dynamic alignment keeps the moving mirror aligned during
each stroke.
Beamsplitter — This device inside the interferometer
separates the IR beam from the source into two beams of
nearly equal energy. One of the beams is reflected from the
beamsplitter to a moving mirror and then back to the
beamsplitter. The other beam is transmitted through the
beamsplitter to a fixed mirror and back to the beamsplitter,
where the beams recombine. The ECO 3000 features a
potassium bromide (KBr) beamsplitter, which allows maximum
IR energy throughput in the mid-IR region.
Moving mirror — While reflecting the IR beam back toward
the beamsplitter, this mirror moves toward and away from the
beamsplitter in a repeating cycle. This motion enables the
computer to subsequently convert the beam to an IR spectrum
Laser — The laser is used as an internal calibrator in FT-IR
instruments because it emits light at a known and constant
frequency. All spectra are collected at precise laser-calibrated
points, which generate wavenumber accuracy better than
±0.01 cm-1. The laser helps control the moving mirror’s
position and signals the capture of data.
Wafer sampling area — Wafers are placed here for analysis.
A focused 9 mm IR beam passes through the sampling area
and continues on to the detector.
ECO 3000 User’s Guide
75
Detectors — After being absorbed by, or reflected from, the
sample at specific frequencies, the remainder of the beam is
focused onto one of the detectors, which produces an
electrical signal in response to the energy striking it. The
signal is sent to a computer for processing. The ECO 3000
includes two detectors, one for reflection measurements and
one for transmission measurements. The angle of incidence
for reflection measurements is 15 degrees.
Fundamentals of
infrared analysis
The ECO 3000 includes an infrared (IR) spectrometer
whichmeasures the interaction of IR radiation with
experimental samples. Most infrared spectrometers are
designed to transmit infrared light through the sample in order
to measure the frequencies at which the sample absorbs the
radiation and the intensities of the absorptions.
Determining the frequencies allows identification of the
sample’s chemical makeup, since chemical functional groups
are known to absorb light at specific frequencies. Identification
of what makes up the sample is called qualitative analysis.
The intensity of an absorption is related to the concentration of
the component. After the spectrometer is calibrated, which
establishes how concentration changes affect absorbance
changes, the absorbance for an unknown sample can be used
to calculate concentration. Determination of component
concentration is referred to as quantitative analysis.
IR light from the source (“A” in the illustration that follows) is
directed into the Michelson interferometer, the key component
to FT-IR spectrometry. The interferometer modulates each
wavelength of IR light at a different frequency.
76 Thermo Nicolet
When both mirrors are the same distance from the
beamsplitter, the two reflected beams pass through exactly
the same pathlength and, consequently, are totally in phase
(distance BC = BD). The resulting signal intensity is at its
maximum, a point called the Zero Path Difference (ZPD).
The modulated beam is reflected from the mirrors to the
sample, where selective absorption takes place. From the
sample the beam travels on to the detector, which translates
the beam into an electrical signal.
The cosine waves produced by the source and modulated by
the interferometer appear to the detector as an interferogram,
a signature of intensity versus mirror position.
Interferogram
ECO 3000 User’s Guide
77
When both mirrors are the same distance from the
beamsplitter, the two reflected beams pass through exactly
the same pathlength and, consequently, are totally in phase
(distance BC = BD). The resulting signal intensity is at its
maximum, a point called the Zero Path Difference (ZPD).
The modulated beam is reflected from the mirrors to the
sample, where selective absorption takes place. From the
sample the beam travels on to the detector, which translates
the beam into an electrical signal.
The cosine waves produced by the source and modulated by
the interferometer appear to the detector as an interferogram,
a signature of intensity versus mirror position.
The interferogram is a summation of all the IR light
frequencies.
The interferogram signal is sent to a computer and converted
into an IR spectrum through a mathematical formula called
Fourier Transform (FT). The formula calculates the amplitude
of each of the component signals. The amplitude gives the
intensity at the corresponding wavelength of light.
Intensity and frequency of sample absorption are depicted in a
two-dimensional plot called a spectrum. Intensity is generally
reported in terms of absorbance, the amount of light absorbed
by a sample, or percent transmittance, the amount of light that
passes through it. Frequency is usually reported in terms of
wavenumbers.
ECO 3000 metrology tools include two detectors, one for
transmission measurements and one for reflection
measurements. The transmission detector measures the
amount of energy that passes through a sample wafer. This
information can be used to identify the material’s chemical
makeup.
78 Thermo Nicolet
The reflection detector measures the amount of energy
reflected by a sample or different layers on a sample.
Reflected IR radiation can also be used to identify chemical
makeup and component concentrations, especially from
samples that are opaque to infrared light.
You can also use reflectance data to obtain information about
a sample's physical properties, such as its refractive index or
thickness. For example, when IR radiation is reflected off a
low resistivity layered sample, a large portion of the radiated
beam reflects off the sample surface. The remaining radiation
may penetrate the layer, especially if the resistivity of the layer
is higher than the resistivity of the substrate, and reflect from
the interface between the layer and the substrate. The path
difference between the two rays of IR light is a function of
three things: the refractive index of the surface layer, the
thickness of the surface layer, and the cosine of the angle of
incidence, Ø.
If you know the refractive index of the surface layer and the
angle of incidence, you can calculate the thickness value. If
the thickness value and angle are known, you can use the
information to calculate the sample’s refractive index.
Calculations of the sample's refractive index or thickness are
made directly from the interferogram data.
ECO 3000 User’s Guide
79
Wafer
handling
compartment
Caution
The wafer handling compartment, accessible through a door
at the back of the metrology tool, contains the automated
wafer retrieval and alignment components and electronic
circuitry for retrieving wafers from FOUPs or cassettes,
aligning individual wafers, moving the wafer into the sampling
area, positioning the wafer in the infrared beam, and returning
the wafer to the carrier.
Never operate the metrology tool while the wafer handler
compartment door is open. The wafer handler’s moving parts
can pinch or crush. ▲
Within the wafer handler compartment you will find
•
•
•
•
80 Thermo Nicolet
Wafer handler
Prealigner
Internal reference wafer cassettes
Transmission detector
Wafer handler
The wafer handler is designed specifically for substrate
moving applications that demand a high degree of cleanliness,
accuracy and reliability. It includes:
• a vacuum end effector, used to pick wafers from a carrier.
• the upper and lower arm segments, which extend or retract
and rotation about the center spindle.
• a mast tube, used to move the wafer handler’s arm
vertically.
• a base assembly, which contains motors and control
electronics for operating the arms.
Prealigner
Internal cassettes
Transmission detector
The wafer handler sets a wafer on the prealigner. The
prealigner then positions the notch of a 200 mm or 300 mm
wafer towards the front of the metrology tool.
Two 200 mm reference wafers are provided by
Thermo Nicolet for use with diagnostic tests. During
installation, these wafers were placed in the internal test
cassette (slots 1 and 3 are dedicated and may not be used for
any other purpose). The CO reference must be located in
slot 1. The EPI reference must be located in slot 3.They must
be in place during diagnostic tests.
The metrology tool includes two infrared detectors: one in the
wafer handler compartment that detects transmitted
frequencies and one in the spectrometer compartment that
measures reflected frequencies.
The IR detectors in ECO metrology tools use deuterated
triglicene sulfate (DTGS) as the active detecting element.
These thermal detectors respond to changes in the
temperature of the detector element material caused by the
infrared signal.
ECO 3000 User’s Guide
81
Minienvironment
Warning
The wafer handling compartment is sealed and pressurized
with nitrogen gas to provide a clean, minienvironment for
sample analysis.
Nitrogen gas creates an oxygen deficient atmosphere. Wait at
least one minute for breathable air enter before working inside
the wafer handling compartment. ▲
A fan unit and PTFE filter removes 0.1 – 0.2 µm particles
within the environment with an efficiency rating of
≥99.99995%. While the fan/filter unit is operating properly, the
Fan Filter Unit status indicator (on the back of the tool) glows
steadily.
If there is a problem with the unit, the indicator blinks or turns
off. Contact Thermo Nicolet Customer support for assistance if
the indicator blinks or is off.
82 Thermo Nicolet
Maintenance
The ECO 3000 includes comprehensive electrical,
mechanical, and performance diagnostics, which allow you to
easily troubleshoot and solve problems. Read the diagnostics
section in your ECO Software User’s Guide to learn about the
diagnostic features available on your system.
This chapter explains the maintenance procedures It also
describes how to take the instrument out of service when it is
scheduled for maintenance or repair.
Warning
Periodic
maintenance
schedule
To ensure your safety and safeguard the warranty, do not
attempt to service the system yourself. Only Thermo Nicolet
(or Thermo Nicolet-trained) service engineers are authorized
to service the ECO 3000. ▲
The table that follows lists the maintenance tasks that are
recommended for an ECO 3000 metrology tool to ensure peak
performance.
Schedule
Maintenance task
every 7 days
Run the Self test diagnostic.
Align optical components.
every 30 days
Run the Optics test diagnostic.
Run the Signal-to-Noise diagnostic.
Run the 10-point center diagnostic.
Check the Fan Filter Unit indicator.
Check the gas pressure and flow rates.
once each year
Change the internal minienvironment gas input
filter.
as needed
Check and change the external gas filters.
Replace the IR source.
Clean the exterior.
Clear broken wafers.
ECO 3000 User’s Guide
83
Powering on
The metrology tool was powered on at installation. We
recommend that you leave it on. This maintains a constant
temperature inside the spectrometer compartment, which
improves consistency of performance. If you need to restart
the system, follow the instructions below.
To restart and reset the metrology tool following an
emergency shutdown:
1. Reset the Emergency Off switch(es).
Turn the button clockwise until it pops out.
Caution
84 Thermo Nicolet
During normal operation, the utility compartment is closed and
latched. ▲
2. Turn the handles to release the latches that secure the
utility compartment.
To prevent accidental activation of the wafer handler
during service, an interlock disables the Touchscreen on
the front panel of the metrology tool whenever the utility
compartment is open.
ECO 3000 User’s Guide
85
3. Verify that the both gas shut off valves are open, then
use the information in the following table to verify that
the pressure and flow rates are set correctly.
86 Thermo Nicolet
regulated pressure
flow rate
Optics purge
0.27 - 0.8 MPa
0.5 MPa typical
20 – 25 LPM
5 LPM minimum
Minienvironment
0.05 - 0.1 MPa
>.005 inches of water
not adjustable
Loader pneumatics
0.5 – 0.8 MPa
not adjustable
Note
For all switches on the metrology tool:
I = on
O = off. ▲
4. Move the Main Power circuit breaker to the On
position.
ECO 3000 User’s Guide
87
5. Reset the Emergency Off/Reset keyswitches.
Rotate the keys clockwise ¼ turn and then release the
keys simultaneously. The keys return to the vertical
position when you release them.
88 Thermo Nicolet
6. Turn on the Computer Power switch on the metrology
tool.
Note
Leave the Display Power switch in the off position. It is used
only when the rear display is enabled. ▲
7. Turn on the power switch on the computer.
For more information about powering up the computer,
refer to the documentation that came with the computer.
ECO 3000 User’s Guide
89
8. Turn on the load port(s).
Use the switch labeled Loader #1 for a load port on the
front of the metrology tool.
Use the switch labeled Loader #2 for a load port on the
side of the tool.
8. Turn on the Prealigner and Wafer Handler switches.
10. Turn on the Fan switch.
90 Thermo Nicolet
Warning
Do not operate a metrology tool without following the safety
precautions described in this manual and the documentation
that came with your metrology tool. ▲
11. Close and latch the utility compartment door.
Remember, the Operator (front) display is not active unless
the utility compartment door is closed and firmly latched.
12. Start ECO software and run the Self Test.
The Self Test button can be found in the Sampling Module.
See the ECO Software User’s Guide for instructions, if you
are unfamiliar with running the metrology tool Self Test.
If you need to turn off your system, follow the instructions
in the next section to properly shut off each of the system
components. The metrology tool also has an Emergency
Off button in case you need to shut it off quickly to avoid
possible operator injury or damage to wafers.
ECO 3000 User’s Guide
91
Turning off the
metrology tool
If you need to turn off the system components, follow the
instructions below.
To turn off the ECO 3000:
1. Exit the ECO software.
Press the button labeled Setup Module in the lower right
corner of the computer screen.
When the display changes to the Setup Module, press the
Exit button in the upper right corner of the screen.
When you see a message asking you to confirm your
action, press Yes.
2. Shut down and then turn off your computer.
See the documentation that came with the internal
computer if you are unfamiliar with this procedure.
92 Thermo Nicolet
3. Turn off the circuit breaker on the metrology tool rear
panel (❘ = on and O = off).
You may also wish to disconnect the main power cord.
Warning
▲ Important
Voltage is applied to the computer and rear display when the
main circuit breaker switch is on. Always turn off the circuit
breaker switch and disconnect the metrology tool from the AC
power source before performing any service procedures. ▲
Leave the optics purge shutoff valve open and maintain purge
flow unless the wafer handling or spectrometer compartments
require service. Optical damage caused by failure to purge the
metrology tool as specified in this manual is not covered under
Thermo Nicolet warranty. ▲
ECO 3000 User’s Guide
93
Locking out
the electricity
If you need to turn off the system components, follow the
instructions below.
To lock out the electricity:
1. Open the utility compartment.
Turn both handles and release the latches that secure the
door.
94 Thermo Nicolet
2. Move the Main Power circuit breaker to the Off
position.
I = on
O = off
3. Disconnect the Main Power cord from the ECO and
from the AC power source.
ECO 3000 User’s Guide
95
4. Install the lock out device on the circuit breaker.
Slide the device onto the switch until it is flush with the face
of the power drawer and the stop above the switch.
5. Pull the tab to expose the hole and insert a locking
device with a diameter of 6mm (0.25 inch) or less.
6. Place a company approved tag out label near the main
circuit breaker or main power connector.
This label should indicate that the system is out of service.
96 Thermo Nicolet
Locking out purge
and pneumatic gas
If you need to turn off the system components, follow the
instructions below.
To lock out either of the gas sources:
1. Open the utility compartment.
Turn both handles and release the latches that secure the
door.
ECO 3000 User’s Guide
97
2. Close the input valve for the gas source you wish to
lock out.
98 Thermo Nicolet
3. Insert a locking device with a diameter of 6 mm
(0.25 inch) or less.
4. Place a company approved tag out label near the
shutoff valves.
This label should indicate that the system is out of service.
ECO 3000 User’s Guide
99
Checking
gas pressure
and flow rates
Once every 30 days, check the gas connections and gauge
settings in the Utility Compartment.
regulated pressure
flow rate
Optics purge
0.27 - 0.8 MPa
0.3 MPa typical
20 – 25 LPM
5 LPM minimum
Minienvironment
0.05 - 0.1 MPa
0.1 MPa maximum
>.005 inches of water
not adjustable
Loader pneumatics
0.5 – 0.8 MPa
not adjustable
0.6 MPa typical
100 Thermo Nicolet
ECO 3000 User’s Guide
101
Aligning the
optical components
Aligning the metrology tool optics maximizes system
performance by optimizing the throughput of infrared energy.
We recommend that you check your system's throughput at
least once a week and align the interferometer optics if the
throughput value is outside the tolerance limits for throughput.
You should also align the optics if you move the metrology
tool. If one of the optical components in your metrology tool
fails, the Thermo Nicolet service engineer will align the optics
after replacing the component.
To align the metrology tool optics:
1. From the Setup Module, press Diagnostics.
2. Press Optics.
3. Press Align Optics.
4. To align using the detector for reflection
measurements, choose Reflection; to align using the
detector for transmission measurements, choose
Transmission.
Automatic alignment takes about two minutes to complete.
The alignment phases are displayed as alignment
progresses.
102 Thermo Nicolet
5. Review the results.
If ECO displays a message that alignment was
unsuccessful, contact Thermo Nicolet technical support.
The optical components may be performing unreliably.
When alignment is complete, the alignment display
disappears and the Align Optics command changes to the
off mode.
The Peak-to-Peak Voltage displayed should be in the 9 to
13 volt range. If the voltage drops below 9 volts, replace
the source.
ECO 3000 User’s Guide
103
Running
the Self test
The :self test checks the metrology tool's electronic circuitry,
homes the wafer handler, and evaluates the system's overall
performance. Running this test weekly is recommended.
To run the self test, press Self Test in the Sampling Module.
If the system's optical throughput is outside the tolerance limits
for throughput, the software aligns the optics and then
rechecks the throughput. Automatic alignment takes about 2
minutes.
In most cases, alignment will bring the throughput value back
in range and the following message will appear.
Self test was successful
If you see this message, press OK and then follow the
instructions in the next section to begin analyzing samples.
A comprehensive report of the
self test diagnostics is generated each
time you run the self test. See the ECO
Software User’s Guide for instructions
on viewing self test reports.
104 Thermo Nicolet
If ECO reports that your system failed the self test, follow the
instructions that appear on your screen to correct the problem. If
no instructions appear, contact your supervisor. Samples cannot
be run until the problem detected by the diagnostic is corrected.
Testing
performance
▲ Important
The reproducibility of the metrology tool optics can be testing
using on-board diagnostics. The two Thermo Nicolet reference,
200 mm, sample wafers are used during performance testing.
These wafers were placed in the internal test cassette (dedicated
slots 1 and 3) during the metrology tool installation. They must be
in place during diagnostic tests.
Always align the optics before running the performance
tests. ▲
To track performance and detect problems with the optical
components and wafer handling system, these tests should be
run once every 7 days.
Testing
optical performance
To test the reproducibility of your metrology tool optics:
1. If you removed the Thermo Nicolet reference wafers from
the internal test cassette, re-install them.
The CO reference must be located in slot 1.
The EPI reference must be located in slot 3.
2. From the Setup Module, press Diagnostics.
3. Press Optics.
If you have not recently aligned the tool, align it now.
If you have aligned the optics, continue on to step 4.
4. Press Optics test.
5. Press the 10-point center diagnostic test.
Wait while the test runs on the CO and EPI references.
ECO 3000 User’s Guide
105
6. Review the results.
If the results report standard deviations in the following
ranges, the optical components are performing reliably.
Oxygen: ± 0.1ppma (CO wafer)
EPI ± 0.002 microns (EPI wafer)
If the results report standard deviations outside these
ranges, contact Thermo Nicolet technical support. The
optical components may not be performing reliably.
Testing
wafer handling
Several tests allow you to check the wafer handler while it
moves at a very slow speed. Press the tab with the test name
to start the test you wish to run.
Initialization test – Returns the wafer handler to the home
position, resets the spectrometer, and does a full initialization.
This is the safest way to return the wafer handler to the home
position.
106 Thermo Nicolet
▲ Important
You must run this test any time the wafer handler is in an
unknown position, such as after an emergency shut down or a
power failure. ▲
Movement with no wafer test - Returns the wafer handler to
the home position, uses Z, R and theta movements to send
the arm towards the back door (above the prealigner). It stops
at this point to verify the location then returns to home when
we press enter. This test verifies the wafer handler can go to a
known location reliably.
Movement with wafer test - Returns the wafer handler to the
home position and gives option of wafer size. The handler
picks a wafer from test cassette or FOUP and puts it in the IR
beam. The wafer handler replaces the wafer in the cassette or
FOUP then returns to the home position. This test verifies the
ability to measure the entire distance across a wafer
Running the
signal-to-noise
test
.
The signal-to-noise test measures the features in your spectral
data that are due to the metrology tool itself or to the sampling
environment. We refer to these types of features as instrument
noise.
To run the signal-to-noise test:
1. From the Setup Module, press Diagnostics.
2. Press System.
3. Press Signal-to-Noise Test.
A message appears asking which detector you want to use
for the signal-to-noise test.
•
Press Transmission if most of your methods collect
transmittance data. ECO begins collecting 32 scans for the
background. When it is finished, it immediately begins
collecting 32 scans for the sample.
ECO 3000 User’s Guide
107
•
Press Reflection if most of your methods are set up to use the
reflectance detector. ECO begins collecting 32 scans of the
reference mirror for the background measurement, followed
by 32 scans of the reference mirror for the sample
measurement.
The following spectrum appears when the signal-to-noise test
is completed.
Your system's noise
specification might be
different than the one in this
illustration. If your metrology
tool failed the signal-to-noise
test, call your Thermo
Nicolet service office.
The result of the signal-to-noise test appears at the top of the
screen. The numbers show the current signal-to-noise value
compared to the signal-to-noise specification.
108 Thermo Nicolet
Replacing
the source
Whenever the Source indicator on the front panel indicates a
problem, or whenever the peak-to-peak voltage of the
interferogram is less than 9 vpp in the Self-Test window,
replace the source. Since the ECO source is pinned in place
and pre-aligned, replacing the source should not effect
measurement results, however an improperly installed or
handled source will effect the performance of the system. You
may wish to have source replacement done by a
Thermo Nicolet-certified service engineer or Thermo Nicolettrained on-site maintenance personnel. :
To replace the source:
Caution!
The source becomes extremely hot during normal analyzer
operation. Always turn off the analyzer and allow the source to
cool for at least 15 before removing a source from the
analyzer. ▲
1. Power off the metrology tool.
ECO 3000 User’s Guide
109
2. Use a 4 mm hex wrench to loosen the captive screws
and open the top cover.
110 Thermo Nicolet
3. Disconnect the power cable from the IR source.
Grasp the connector, squeeze the tabs, and pull straight
out.
ECO 3000 User’s Guide
111
4. Use a 4 mm hex wrench to remove the screw that
secures the IR source to the spectrometer
compartment.
Save the screw. You will need it to secure the new source.
112 Thermo Nicolet
5. Lift the source straight up until it clears the pin and
then remove it from the metrology tool.
Discard the spent source.
6. Carefully remove the replacement source from its
protective packaging.
ECO 3000 User’s Guide
113
7. Orient the source so that the element faces the
spectrometer compartment window, and lower the
replacement source into position.
Be sure to align the hole in the bottom of the source with
the pin on the spectrometer compartment.
114 Thermo Nicolet
8. Insert the screw you removed from the spent source
and use a 4mm hex wrench to secure the new source
to the spectrometer compartment.
ECO 3000 User’s Guide
115
9. Connect the source to power.
Squeeze the tabs and press straight in. The connectors
are keyed so they cannot be plugged in incorrectly.
116 Thermo Nicolet
10. Close the top cover and use a 4mm hex wrench to
secure it.
ECO 3000 User’s Guide
117
11. Power on the metrology tool and then close and firmly
latch the Utility Compartment door.
When the door is properly latched, the operator
Touchscreen activates.
12. Start ECO software and align the optics.
13. Run the Self-test, Optics test, Signal-to-Noise, and
10-point center diagnostic tests.
118 Thermo Nicolet
Checking
and changing
minienvironment /
optics purge filter
Note
The two, gas filters for the minienvironment/optics purge gas are
located behind the pneumatics panel in the utility compartment.
In the event of a problem with your clean, dried nitrogen, you
may need to check and change the minienvironment/optics
filters more frequently.
To check and change minienvironment/optics purge filter:
1. Turn the handles to release the latches and open the
utility compartment.
ECO 3000 User’s Guide
119
2. Close the input valve for the minienvironment/optics
purge.
120 Thermo Nicolet
3. Loosen, but do not remove, the screws that secure the
pneumatics panel to the metrology tool.
Use a 4 mm hex wrench.
ECO 3000 User’s Guide
121
4. Grasp the panel by the handles, lift it up and off the
standoffs, and carefully set it on the floor, gauges
facing down.
The panel is heavy. Be sure you have a firm grasp on the
handles.
Do not disconnect any hoses or wires.
5. Locate the filter holders inside the compartment.
122 Thermo Nicolet
6. For each filter holder, loosen the nut that secures the
filter clamp until the spring clamp opens enough to
allow you to lift the cover off the filter holder.
7. From inside each filter holder, remove and discard the
spent filter element.
ECO 3000 User’s Guide
123
8. Into each filter holder, insert a new filter element and
then reinstall the filter cover and tighten the spring
cover
124 Thermo Nicolet
9. Lift the panel back onto the standoffs.
10. Slide the panel down so that the top of the keyhole slot
rests on the standoff and then use a 4mm hex wrench
to secure the panel.
ECO 3000 User’s Guide
125
11. Open the input valve for the minienvironment/optics
purge.
12. Check gas pressure and flow rates.
13. Close and latch the utility compartment.
126 Thermo Nicolet
Checking
and changing
external gas filters
In the event of a problem with your clean, dried nitrogen or air
source, you may need to change the external gas filters. The
external gas filters are located in the utility compartment.
To check and change an external gas filter:
1. Turn the handles to release the latches and open the
utility compartment.
ECO 3000 User’s Guide
127
2. Close the input valve for the filter you wish to check.
128 Thermo Nicolet
3. Remove the filter cover.
For the optics/minienvironment filter, slide the latch
down and hold it down while you turn the filter cover ¼ turn
until the vertical lines on the cover are aligned with the
vertical lines on the valve, and then slide the cover down
and off the filter.
ECO 3000 User’s Guide
129
For the loader pneumatics filter, unscrew the metal
cover and slide it off the plastic filter cover.
Then slide the plastic cover off the filter.
Use a short (stubby) #2 Phillips screwdriver to remove the
screw that secures the filter.
4. Check the filter for dust, dirt, particles, oil or other
contaminants.
If necessary, replace the filter.
130 Thermo Nicolet
Cleaning
the metrology tool
If the outside of the metrology tool needs cleaning, turn off the
power and disconnect the power cord. Then use a damp (not
wet), soft cloth to clean the outside of the analyzer, computer
and accessories. Isopropyl alcohol may be used to clean the
system components. See the material data safety sheet that
accompanied the alcohol or other mild cleaning fluid you
choose for safe handling information.
Warning
Avoid shock hazard. Do not allow liquid to run into the power
supplies. Also, do not allow liquids to run down the windows in
the sample compartment walls. ▲
▲ Important
Do not use harsh detergents, solvents, chemicals or
abrasives; these can damage the finish. ▲
▲ Important
Do not attempt to clean or even touch the mirror surfaces. The
mirrors inside the spectrometer compartment are front
surfaced and can be easily scratched. Fingerprints can
degrade spectral performance or permanently damage the
mirrors. Use purge gas only for cleaning mirrors;
commercially-prepared canned air contains contaminants that
can damage the mirror surface or interfere with spectral
data. ▲
ECO 3000 User’s Guide
131
Clearing
broken wafers
Warning
In the event that a wafer is damaged, you may need to open the
wafer handling compartment to remove the debris.
Always turn off electrical power to the wafer handler and
pre-aligner, pneumatic gas, and purge gas before opening the
wafer handler compartment. Moving parts inside the
compartment can injure hands and fingers. ▲
To open the wafer handler compartment:
1. Open the utility compartment
132 Thermo Nicolet
2. Move the circuit breakers labeled Wafer Handler and
Prealigner to the OFF position,
ECO 3000 User’s Guide
133
3. Turn off the optics/minienvironment gas and loader
pneumatic gas.
134 Thermo Nicolet
4. Use a flat-blade screwdriver and turn the latches that
secure the door.
Warning
Oxygen deficient atmosphere inside. Wait at least one minute
for breathable air enter the compartment before servicing. ▲
5. Open the compartment door and wait at least one
minute for breathable air to enter the compartment.
Caution
Wafer shards are extremely sharp. To avoid cuts and other
injuries, handle them with care. ▲
ECO 3000 User’s Guide
135
Important
To avoid damage to the metrology tool, do not lean on, apply
pressure to, or even touch the pre-aligner, the wafer handler
arm, and transmission detector arm.
6. Carefully, without disconnecting any hoses or cables,
remove the shards by hand or with a vacuum system.
136 Thermo Nicolet
7. Lift the test wafer cassette(s) up until they clear the
pins and then remove them from the compartment.
Check the cassettes and test wafers and remove any
debris.
If the reference wafers have been damaged, contact
Thermo Nicolet Customer Support.
ECO 3000 User’s Guide
137
▲ Important
Do not attempt to clean or even touch the mirror surfaces. The
mirrors inside the spectrometer compartment are front
surfaced and can be easily scratched. Fingerprints can
degrade spectral performance or permanently damage the
mirrors. Use purge gas only for cleaning mirrors;
commercially-prepared canned air contains contaminants that
can damage the mirror surface or interfere with spectral
data. ▲
8. Wipe down the wafer handling compartment with a
clean room cloth.
9. Reinstall the test wafer cassette(s).
10. Close the wafer handling compartment, turn on the
purge and pneumatic gas, and restore power to the
tool.
138 Thermo Nicolet
Lifting or moving
the metrology tool
Caution
The ECO 3000 metrology tool should be moved only by trained
Thermo Nicolet service personnel . The tool must be partially
disassembled prior to being moved. The base unit weighs
436.4 kg (960 lb). Each FOUP load port installed on the tool
adds 53.72 kg (117 lb). Each cassette load port adds 75.5 kg
(166 lb). The metrology tool cannot be moved safely by one
person. Four people are recommended.
Should an emergency situation arise which requires you to
move a metrology tool, contact Thermo Nicolet Customer
Support for specific instructions. Damage from improper
moving techniques is not covered by warranty. To avoid risk of
injury, lower the wheels and get help to roll the metrology tool
to its new location whenever moving the metrology is required.
If the tool must be lifted, use a fork lift or other approved
mechanical device (such as a crane) to lift the tool. ▲
ECO 3000 User’s Guide
139
Parts list
The following replacement parts are available from
Thermo Nicolet.
Part Number
Description
470-184100
IR source assembly
Gas Filters
114-7321xx
114-7322xx
114-7323xx
Internal minienvironment/optics purge
External minienvironment/optics purge
External loader pneumatics/vacuum
Documentation
269-1415xx
269-1416xx
269-1436xx
269-1431xx
ECO 3000 Documentation CD
includes software and hardware
documentation formatted for Adobe
Acrobat Reader
Preparing your site (manual)
ECO 3000 Safety Guide
(manuals)
English
Chinese
Korean
Label sets
017-8213xx
017-8233xx
017-8235xx
017-8234xx
017-8232xx
017-8231xx
140 Thermo Nicolet
ECO 3000 safety labels
English
Chinese
German
Italian
Japanese
Korean
index
a
d
abnormal condition alert
automation-capable FOUP loader, 26
cassette loader, 31
light tower, 38, 60
manual delivery FOUP loader, 21
minienvironment, 82
spectrometer, 59
align
aligning the optics, 102
continuous dynamic alignment, 75
interferogram specifications (vpp), 103
time required for authmatic alignment, 104
angle
calculating thickness value, 79
of incidence, 76
Auto-Tune, 75
Danger, defined, 4
detector, 76
reflection, 79
transmission, 78, 81
diagnostic tests, 105
diagnostics, 83
initialization, 106
movement no wafer, 107
movement wafer, 107
optics performance, 105
required reference samples, 105
self test, 104
self test failed, 104
starting, 9
dried air
checking pressure and flow rates, 100
dew point specifications, 71
external filter, 130
input pressure and flow rate, 70
input valve locations and specifications, 71
purity specifications, 71
specifications, 70
turning off, 128
DTGS, 81
b
beam diameter, 75
beamsplitter, 75, 77
broken wafer, 132
c
calculating
angle of incidence, 79
refractive index, 79
thickness, 79
carrier. See FOUP
casette loader
Safety Door switch, 36
cassette
internal, 81
loader, 31
loading, 32, 33
Caution, defined, 4
changing filters, 119, 127
circuit breakers
locations, 68
ratings, 68
cleaning
broken wafers, 132
exterior housing, 131
mirrors, 131
oxygen deficient atmosphere precautions, 135
wafer shard precautions, 135
cosine waves, 77, 78
custom status alerts
light tower, 60
e
ECO 3000
turning off, 92, 94, 97
ECO software, 7
diagnostics, 9
equipment automation, 11
materials research interface, 10
on-line safety tutorial, 16
operator interface, 8
Operator's Guide, 16
Research Module Help, 14
Sampling Module Help, 12
electrical, 42
circuit breaker specifications, 68
ground connections, 67
lock out, 94
power drawer, 67
restart, 84
e-mail, 3
Emergency Off, 37
button locations, 5
circuits remaining energized, 37
resetting, 84
EMO. See Emergency Off
ECO 3000 User’s Guide
141
end effector, 81
EPI, 18
F1 function key
for on-line Help, 15
f
Fan Filter Unit, 82
fax, 3
filters
changing internal, 119
efficiency rating, 82
pneumatic and vacuum generator, 71
PTFE, 82
purge, 71
fixed mirror, 75
FOUP
automation capable status indicators, 25
defined, 19
manual delivery loading, 23
manual delivery loading for automation-capable load
port, 28
manual delivery status indicators, 21
standards, 52
Fourier Transform, 78
Front Opening Unified Pods (FOUPs)
pre-qualification requirements, 54
FT-IR theory, 76
g
gas filters, 119, 127
gas fittings
for purge or pneumatic systems, 71
gauges
checking, 100
location, 72
schedule for checking, 83
typical settings, 73
guages
settings at power on, 86
h
Help, 11
? button, 12, 13, 15
Discussion button, 15
F1 function key, 15
for the Research Module, 14
for the Sampling Module, 12
for the Setup Module, 13
Help button, 15
How to button, 15
142 Thermo Nicolet
i
Important, defined, 4
incidence
angle of, 76
infrared
analysis, 76
beam diameter, 75
source, 75
source frequency range, 75
instrument noise, measuring, 107
interferogram, 78
calculations from, 79
defined, 77
minimum vpp, 109
interferometer
location, 75
Michelson, 76
internet address, 3
IR. See infrared
k
keyboard
enabling operator, 56
enabling system administrator, 63
how to use, 20
storing operator, 57
l
laser, 41, 75
emission indicator, 59
location, 75
Laser indicator, 58
lifting and moving
safety tips, 5
light tower, 38
indicators defined, 60
programming indicators, 60
load door
automation-capable FOUP loader, 27
cassette load port, 32
manual delivery FOUP loader, 22
load port
300 mm open cassette, 31
automation-capable FOUP, 25
cassette status indicators, 31
configurations, 21
manual delivery FOUP status indicators, 21
operator information, 21
loader
standards, 53
loading wafer cassettes, 32
lock out
device specifications, 74, 96
lock out / tag out, 73
m
maintenance
broken wafers, 132
cleaning, 131
diagnostic tests, 105
gas filters, 119, 127
light tower status, 60
optical alignment, 102
periodic schedule, 83
replacing infrared source, 109
Self test, 104
signal-to-noise test, 107
system administrator tasks, 83
manual conventions, 4
mast tube, 81
measuring
signal to-noise, 107
MEMS, 18
method
creation, 9
metrology tool optics, 75
minienvironment, 82
mirrors, 75, 138
role in generating interferogram, 77
moving parts
safety tips, 5
moving precautions, 139
n
nitrogen
checking pressure and flow rates, 100
dew point specifications, 71
external filter, 129
input pressure and flow rate, 70
input valve locations and specifications, 71
lock out, 74
purity specifications, 71
regulated pressure specifications, 72
supply specifications, 70
turning off, 128
noise
measuring, 107
Note, defined, 4
o
OMNIC software, 7
on-line manuals, 11
operator interface, 20
operator keyboard
disconnecting, 64
operator trackball
disconnecting, 64
optics, 75
alignment instructions, 102
damage not covered by warranty, 69
periodic maintenance, 102
optics reproducibility
testing, 105
ordering replacement parts, 140
oxygen deficient atmosphere
precautions, 82, 135
safety tips, 5
wait before servicing, 135
p
parts list, 140
pathlength, 77, 78
% transmittance, 78
performance tests
signal-to-noise, 107
plumbing, 71
pneumatics
gas fittings, 71
pneumatics panel
reinstalling, 125
removing, 121
pneumatics, purge and vacuum panel, 69
pod. See FOUP
power drawer, 67
Power indicator, 58, 59
power up procedure, 84
prealigner, 81
pre-qualification
for Front Opening Unified Pods (FOUPs), 54
purge
flow, 93
gas fittings, 71
gas precautions, 70
purge gas
specifications, 70
q
qualitative analysis, 76
quantitative analysis, 76
ECO 3000 User’s Guide
143
r
rear display
enabling keyboard and trackball, 65
enabling video, 63, 66
power connector, 66
reference wafer cassette
cleaning, 137
removing, 137
reference wafers
dedicated slots, 81
reflection detector, 76, 79
location, 75
refractive index
calculating, 79
Research Module, 10
accessing on-line help, 14
reset switches, 88
robotics tests, 106
s
safe operation overview, 5
safety
abnormal condition indicator, 38
broken wafers, 132
cassette load door, 31
electrical, 40
emergency shut down, 37
flammable gases, 70
laser, 39, 40
manual delivery FOUP loader, 21
moving parts, 22, 27, 32, 40, 42, 43
moving parts precautions, 132
nitrogen gas, 40, 43
sampling area, 75
Sampling Module, 8
accessing on-line help, 12
scan indicator, 59
Scan indicator, 58
self test
failed, 104
Self Test
instructions for running, 104
running to reset metrology tool, 91
scheduling for maintenance, 83
SEMI compliance
E1.9-0699, 52
E47.1, 52
E84, 52, 53
S2-200 and S8-95, 3
service
by trained personnel only, 83
Setup Module, 9
accessing on-line help, 13
programming light tower status indicators, 61
144 Thermo Nicolet
signal-to-noise
how to measure, 107
overview, 107
Signal-to-Noise Test button, 107
software
ECO, 8
ECO 3000 Operator's Guide, 17
ECO Research, 10
equipment automation, 11
on-line help, 11
source, 75, 76
diagnosing problems, 109
heat precautions, 109
indicator, 59
location, 75
replacing, 109
Source indicator, 58
specifications
dried air and nitrogen, 70
purge gas, 70
spectrometer compartment, 41, 74
aligning optical components, 102
beamsplitter, 75
detector, 76
infrared beam, 75
interferometer, 75
IR source, 75
laser, 75
optical components, 75
wafer sampling area, 75
spectrometry theory, 76
spectrum, 78
stability
optimizing, 84
stand-by mode, 59
status
light tower programming, 60
status indicators
automation-capable FOUP load port, 25
cassette load port, 31
Fan Filter Unit, 82
light tower, 38, 59
manual delivery FOUP load port, 21
minienvironment, 82
spectrometer, 39, 58
system alignment, 75
system ready alert
automation-capable FOUP loader, 26
cassette loader, 31
Fan Filter Unit, 82
light tower, 38, 60
manual delivery FOUP loader, 21
spectrometer, 39
t
u
technical support, 3
telephone, 3
testing
initialization, 106
optics reproducibility, 105
performance, 104
prealigner, 106
robotics, 106
self test, 104
signal-to-noise, 107
wafer handler, 106
wafer handler movement, 107
thermal detectors, 81
thickness
calculating, 79
throughput
how to optimize, 102
Touchscreen
disabled conditions, 42
disabling conditions, 55
disabling operator, 63
disconnecting, 64
how to use, 20
using, 55
trackball
enabling operator, 56
how to use, 20
training, 4
transform, 78
transmission detector, 76, 78, 81
location, 75
troubleshooting, 83
turning off the system
using Emergency Off, 37
using the main power switch, 92, 94, 97
utility compartment, 42, 62, 99
enabling rear display and keyboard, 63
gauges, 69
interlock, 62
opening, 62, 132
pneumatic gas, 69
purge gas, 69
safety tips, 5
v
vacuum, 69
end effector, 81
w
wafer handler, 81
motors and control electronics, 81
wafer handling compartment, 80
safety tips, 5
wafer sampling area, 75
location, 75
wafers. See also reference wafers
alignment position, 81
how to analyze, 44
notch, 81
Thermo Nicolet reference, 81
Warning, defined, 4
wavenumbers, 78
web site, 3
weight, 139
z
Zero Path Difference (ZPD), 77, 78
ECO 3000 User’s Guide
145
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