EL-FLOW Classic series

Instruction Manual
EL-FLOW Classic series
Thermal Mass Flow Controllers
Doc. no.: 9.17.085C
Date: 01-05-2015
ATTENTION
Please read this Instruction Manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.
Bronkhorst High-Tech B.V.
Disclaimer
The information in this manual has been reviewed and is believed to be wholly reliable. No responsibility, however, is assumed for
inaccuracies. The material in this manual is for information purposes only.
Bronkhorst High-Tech B.V.
May 2015
Symbols
Important information. Discarding this information could cause injuries to people or damage to the Instrument or
installation.
Helpful information. This information will facilitate the use of this instrument.
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Additional info available on the internet or from your local sales representative.
Receipt of equipment
Check the outside packing box for damage incurred during shipment. When the packing box is damaged, then the local carrier must
be notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales
representative.
Carefully remove the equipment from the packing box. Verify that the equipment was not damaged during shipment. Should the
equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a
report should be submitted to your local sales representative.
Check the packing list to ensure that you received all of the items.
Do not discard spare or replacement parts with the packing material and inspect the contents for damage.
Refer to "Removal and return instructions" about return shipment procedures.
Equipment storage
The equipment should be stored in its original packing in a cupboard warehouse or similar. Care should be taken not to subject the
equipment to excessive temperatures or humidity.
Copyright
© 2015 Bronkhorst High-Tech B.V.
All rights reserved. This documentation is protected by copyright.
Subject to technical and optical changes as well as printing errors.
The information contained in this document is subject to change at any time without prior notification. Bronkhorst High-Tech B.V.
reserves the right to modify or improve its products and modify the contents without being obliged to inform any particular
persons or organizations. The device specifications and the contents of the package may deviate from what is stated in this
document.
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EL-FLOW Classic series
9.17.085
Bronkhorst High-Tech B.V.
Warranty
Bronkhorst products are warranted against defects in material and workmanship for a period of one year from the date of
shipment provided they are used in accordance with the ordering specifications and not subjected to abuse or physical damage.
Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are normally warranted
for one year or the balance of the original warranty, whichever is the longer.
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See also paragraph 9 of the Conditions of sales:
http://www.bronkhorst.com/files/corporate_headquarters/sales_conditions/en_general_terms_of_sales.pdf
The warranty includes all initial and latent defects, random failures, and undeterminable internal causes.
It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is performed under
warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect to our factory or service
center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping methods/carriers are paid by
the customer.
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EL-FLOW Classic series
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Bronkhorst High-Tech B.V.
Table of contents
1
......................................................................................................................................................................
5
Scope
of this manual
1.1
1.1.1
1.2
1.3
Introduction
...................................................................................................................................................................... 5
Intended
use
......................................................................................................................................................................
5
......................................................................................................................................................................
5
References
to other applicable documents
Maintenance
...................................................................................................................................................................... 5
......................................................................................................................................................................
6
Starting
up
Check
......................................................................................................................................................................
properties
6
Rated
pressure test inspection
......................................................................................................................................................................
6
......................................................................................................................................................................
6
Instrument
mounting
Piping
requirements
......................................................................................................................................................................
6
......................................................................................................................................................................
7
Fluidic
connections
Inlet
filter
......................................................................................................................................................................
7
......................................................................................................................................................................
7
Electrical
connections
Interface
...................................................................................................................................................................... 7
......................................................................................................................................................................
7
Power
Supply
Purging
...................................................................................................................................................................... 8
Zeroing
...................................................................................................................................................................... 8
Calibration
...................................................................................................................................................................... 8
Supply
......................................................................................................................................................................
pressure
9
Model
key
......................................................................................................................................................................
9
......................................................................................................................................................................
10
Basic
operation
General
...................................................................................................................................................................... 10
Push-button
operation
......................................................................................................................................................................
10
LED
......................................................................................................................................................................
indications
11
......................................................................................................................................................................
12
Advanced operation
Using
other gases than specified
......................................................................................................................................................................
12
Software
......................................................................................................................................................................
for conversion factor calculation
12
Maximum
pressure drop
......................................................................................................................................................................
12
......................................................................................................................................................................
13
Troubleshooting
and service
General
...................................................................................................................................................................... 13
LED
indications
......................................................................................................................................................................
13
Troubleshooting
......................................................................................................................................................................
summary general
13
Service
...................................................................................................................................................................... 14
......................................................................................................................................................................
15
Removal
and return instructions
2
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.7.1
2.7.2
2.8
2.9
2.10
2.11
2.12
3
3.1
3.2
3.3
4
4.1
4.2
4.3
5
5.1
5.2
5.3
5.4
6
4
EL-FLOW Classic series
9.17.085
Bronkhorst High-Tech B.V.
1
Scope of this manual
1.1
Introduction
This user guide describes the EL-FLOW Classic series mass flow controllers for gases as shown in the picture below. Included herein
is product information, installation instructions, operation, maintenance, troubleshooting and technical specifications.
F-201CL
8 mln/min – 20 ln/min
1.1.1
Intended use
The intended use of EL-FLOW Classic instruments is to control gas flow rates of the specified gas noted on the instrument label. The
gas has to be clean and dry. The instruments can be used for either (fast) switching or controlling a constant flow rate.
1.2
References to other applicable documents
Basic instructions
Technical drawings
Document 9.17.086
Document 9.16.117
Quick installation guide EL-FLOW Classic
Hook-up diagram EL-FLOW Classic
Document 7.15.182
Dimensional drawing F-201CL
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1.3
These documents can be found at: http://www.bronkhorst.com/en/qrclassic
Maintenance
No routine maintenance is required to be performed on the controllers when they are used with clean gas.
Units may be flushed with clean, dry inert gas.
In case of severe contamination it may be required to clean the inside of the instrument. After cleaning a recalibration is needed.
Bronkhorst High-Tech B.V. has a trained staff of servicemen available. Contact your local supplier for cleaning and recalibration
options.
If the equipment is not properly serviced, serious personal injury and/or damage to the equipment could be the
result. It is therefore important that servicing is performed by trained and qualified service personnel.
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2
Starting up
2.1
Check properties
Before installing an EL-FLOW Classic it is important to read the attached label and check:
Flow rate
Fluid to be measured
Up- and downstream pressures
Input/output signal
Temperature
The instrument is fitted with Viton® seals. Check the suitability of this material before installation.
2.2
Rated pressure test inspection
Each EL-FLOW Classic is pressure tested to at least 1.5 times the maximum allowed working pressure of the instrument (30 bar(g)).
This means that each EL-FLOW Classic instrument is pressure tested at 50 bar. Each instrument is helium leak tested to at
least 2×10-9 mbar l/s Helium outboard.
The tested pressure is stated on the flow controller with a RED COLOURED
sticker. Check test pressure before installing in the line.
If the sticker is not available or the test pressure is incorrect, the instrument
should not be mounted in the process line and be returned to the factory.
2.3
Instrument mounting
The bottom side of an EL-FLOW Classic consists of two mounting holes for stable mechanical fixation of the instrument. Refer to
the dimensional drawing for the F-201CL, document nr. 7.15.182 for exact position of the mounting holes.
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This document can be found at: http://www.bronkhorst.com/en/qrclassic
The preferred mounting position of EL-FLOW Classic mass flow controllers is horizontal. Other mounting positions may introduce a
zero shift and/or little gas and pressure dependency of the zero signal. When mounting an instrument other than horizontal,
zeroing of the instrument is advised. The zeroing procedure is described in paragraph 2.9.
Avoid installation in close proximity of mechanic vibration and/or heat sources.
2.4
Piping requirements
Be sure that piping is absolutely clean!
DO NOT install small diameter piping on high flow rates, because the inlet jet flow will affect the accuracy.
DO NOT mount abrupt angles direct on in- and outlet, especially not on high flow rates. At least 10 pipe diameters
distance between the angle and the instrument is recommended.
DO NOT mount pressure regulators direct on the inlet of gas flow meters/controllers, but allow some meters of
piping (at least 25 pipe diameters).
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EL-FLOW Classic series
9.17.085
Bronkhorst High-Tech B.V.
2.5
Fluidic connections
The fluid connections of EL-FLOW Classic instruments consist
of ¼” BSPP female thread. The adapter chambers are optimised for
the use of Swagelok RS-type adapters combined with
AS013 (70°Sh) o-rings for leak tight installation.
Bronkhorst highly recommends the use of Swagelok RS-type
stainless steel adapters, e.g. part number SS-400-1-4RS.
Adapters can be ordered separately to the instruments.
Contact your local distributor for more information.
Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or other dangerous
fluids are used.
2.6
Inlet filter
Fluids to be measured should be absolutely free of dirt, oil, moisture and
other particles. Fluids that are heavily contaminated or contain particulates
are detrimental to precision. If liquid phases enter the sensor chamber, the
function of the sensor and the mass flow controller may be impaired.
It is recommended to install an in-line filter (offered by Bronkhorst) or
liquid separator upstream of the flow controller, and if backflow can occur,
a downstream filter is recommended too. Be aware of the pressure drop
caused by the filter(s). Contact your distributor for further information.
2.7
Electrical connections
2.7.1
Interface
EL-FLOW Classic instruments are analogue operated, I/O signals can be provided by means of:
1. Voltage I/O
2. Current I/O
(0...5Vdc)
(4...20mA sourcing)
For electrical hook-up diagram refer to document 9.16.117, “Hook-up EL-FLOW Classic”
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2.7.2
This document can be found at: http://www.bronkhorst.com/en/qrclassic
Power Supply
EL-FLOW Classic controllers are powered with +15 Vdc to +24 Vdc.
When providing your own power supply be sure that voltage and current rating are according to the specifications of the
instrument(s) and furthermore that the source is capable of delivering enough power to the instrument(s). Refer to Hook-up ELFLOW Classic, document nr. 9.16.117, for more details.
Bronkhorst High-Tech B.V. recommends the use of their standard cables. These cables have the right connectors and if loose ends
are used, these will be marked to prevent wrong connection.
When using other cables, cable wire diameters should be sufficient to carry the supply current and voltage losses must be kept as
low as possible. When in doubt: contact your distributor.
EL-FLOW Classic instruments carry the CE-mark. Therefore they have to comply with the EMC requirements as are valid for these
instruments. However compliance with the EMC requirements is not possible without the use of proper cables and connector/
gland assemblies.
When connecting the system to other devices (e.g. to PLC), be sure that the integrity of the shielding is not affected.
Do not use unshielded wire terminals.
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EL-FLOW Classic series
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Bronkhorst High-Tech B.V.
2.8
Purging
Do not apply pressure until electrical connections are made. When applying pressure to the system, avoid pressure
shocks in the system and increase pressure gradually. Also decrease pressure gradually when required.
In systems for use with toxic or other dangerous fluids, purging for at least 30 minutes with a dry, inert gas (like
Nitrogen or Argon) is absolutely necessary before use. After use with toxic or other dangerous fluids, complete
purging is also required before exposing the system to air.
Warm-up time
Let the EL-FLOW Classic warm-up for at least 30 minutes for best accuracy.
2.9
Zeroing
The zero-point of each instrument is factory adjusted. If required, the zero point may be re-adjusted by means of
using the micro switch. Procedure for zeroing by micro switch:
Warm-up, pressure up the system and fill the instrument according to the process conditions.
Make sure no flow is going through the instrument by closing valves near the instrument.
The setpoint must be zero.
Press micro switch and hold it. After a short time the red LED will go ON and OFF, then the green LED will go ON.
At that moment release the micro switch.
The zeroing procedure will start at that moment and the green LED will blink fast. The zeroing procedure waits
for a stable signal and saves the zero. If the signal is not stable, zeroing will take long and the nearest point to
zero is accepted. The procedure will take approx. 10 seconds.
When the indication is showing 0% signal and the green indication LED is burning continuously again, then the
zeroing action was successful.
2.10
Calibration
EL-FLOW Classic instruments are Air calibrated. Bronkhorst High-Tech B.V. certifies that all instruments meet the rated accuracy.
They have been calibrated using measurement standards traceable to the standards of the Dutch Metrology Institute (VSL).
The calibration is converted to the customer’s gas and conditions using a detailed conversion model. This conversion adds a level of
calibration uncertainty.
Thumb rule for calculating the conversion uncertainty is typical:
Uncertainty < 2% x CF
for CF > 1
Uncertainty < 2% / CF
for CF < 1
With CF defined as the approximate conversion factor, which can be calculated with:
in which:
Cpn
n
(1)
(2)
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specific heat
density at normal conditions
calibration fluid (Air)
customer fluid
Check FLUIDAT® on the Net on http://www.fluidat.com
FLUIDAT® is a collection of routines to calculate physical properties of gases and liquids. These routines are made
available at the FLUIDAT® on the Net website.
EL-FLOW Classic series
9.17.085
Bronkhorst High-Tech B.V.
EL-FLOW Classic instruments are delivered with a statement of compliance.
This document can be found at www.bronkhorst.com/en/qrclassic
Use the hyperlink above or scan the QR-code on the right and on top of the
instrument.
2.11
Supply pressure
It is recommended to turn on power before applying pressure on the instrument and to switch off power after
removing pressure.
Turn on fluid supply gently. Avoid pressure shocks and bring the instrument gradually up to the level of the actual
operating conditions. Also switch off fluid supply gently.
2.12
Model key
Example: F-201CL-009-1K0-A
Gas:
CO
Range:
1 SLM
Analog output:
0..5 Vdc
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EL-FLOW Classic series
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Bronkhorst High-Tech B.V.
3
Basic operation
3.1
General
The following signals are available:
• measured value (output)
• setpoint (input)
The type of installed interface (0..5V or 4..20mA) can be found in the model key of the instrument. Refer to paragraph 2.12
Input signals:
Setpoints below 2% of the full scale will be interpreted as 0% setpoint.
Output signals:
the 100% point of the measured value is based on the customers flow. The customers flow can be found at the serial
number label at the rear of the instrument.
In case of the example label on page 7, the 100% point of the measured value is 5V, which equals 8 ln/min Air.
3.2
Push-button operation
By means of manual operation of the micro push-button switch some important actions for the instrument can be selected/
started.
LEDs
Green
Red
Time
Pushed
Indication
Off
Off
0 – 4 sec.
No action
Pressing a switch shortly by accident will not cause unwanted reactions of the
instrument.
Off
On
4 – 8 sec.
Reset instrument
Instrument program will be restarted and all warning and error messages will
be cleared. During start-up the instrument will perform a (new) self-test.
Off
Normal
flash
4 – 8 sec.
Restore parameters
All parameter settings will be restored to situation of final test at BHT
production.
On
Off
8 – 12 sec.
Auto-zero
Instrument will be re-adjusted for measurement of zero-flow.
NOTE: First make sure there is no flow and instrument is connected to power
for at least 30 minutes!
Normal
Off
8 – 12 sec.
No action
flash
LED indications using micro-switch at normal running mode of an instrument.
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EL-FLOW Classic series
9.17.085
Bronkhorst High-Tech B.V.
LED indications
3.3
LEDs
Green
Time
Indication
0.2 sec on,
0.2 sec off
Wink mode
By a command send to the instrument.
Red
Slow wink
0.1 sec on,
Switch-released, selected action started.
0.1 sec off
Green and Red LED turn-by-turn indication modes (no switch used).
Fast wink
Time
Indication
Off
Continuously
Power-off or program not running
On
Continuously
Normal running/operation mode
Green LED
Special function mode
Instrument is busy performing any special function.
E.g. auto-zero or reset instrument function.
Green and Red LED turn-by-turn indication modes (no switch used).
0.2 sec on,
0.2 sec off
Flash
Red LED
Off
Time
Indication
Continuously
No error
Critical error message
A serious error occurred in the instrument.
Instrument needs service before further using.
Green and Red LED turn-by-turn indication modes (no switch used).
On
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Continuously
EL-FLOW Classic series
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Bronkhorst High-Tech B.V.
4
Advanced operation
4.1
Using other gases than specified
Each instrument has been calibrated and adjusted for customer process conditions.
Controllers or valves may not operate correctly, if process conditions vary too much, because of the restriction of the
orifice in the valve. The performance and accuracy of thermal Mass Flow Controllers may be affected tremendously
if physical fluid properties such as heat capacity and viscosity change due to changing process conditions.
4.2
Software for conversion factor calculation
Bronkhorst High-Tech B.V. gathered the physical properties of over 600 fluids in a database called FLUIDAT.
Application software, such as FLOW CALCULATIONS, enables the user to calculate accurate conversion factors,
not only at 20°C/1 atm but at any temperature/pressure combination, both for gases and for liquids.
Apply to your distributor for more details of this software.
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4.3
Check FLUIDAT® on the Net on http://www.fluidat.com
FLUIDAT® is a collection of routines to calculate physical properties of gases and liquids. These routines are made
available at the FLUIDAT® on the Net website.
Maximum pressure drop
For (pilot) solenoid operated control valves with small orifices the maximum allowable pressure drop for gases is according to the
table.
Diameter [mm]
Kv
Normally closed
p max. [bard]
0,05
4,33 x 10-5
30
0,07
8,48 x 10-5
30
0,10
1,73 x
10-4
30
0,14
3,39 x 10-4
30
0,20
6,93 x 10-4
30
0,30
1,56 x 10-3
30
0,37
2,37 x 10-3
30
0,50
4,33 x
10-3
30
0,70
8,48 x 10-3
24
1,00
1,73 x
10-2
12
1,30
2,93 x 10-2
8
1,50
3,90 x 10-2
6
1,70
5,00 x 10-2
5
2,00
6,63 x 10-2
3,6
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EL-FLOW Classic series
9.17.085
Bronkhorst High-Tech B.V.
5
Troubleshooting and service
5.1
General
For a correct analysis of the proper operation of a flow meter/controller it is recommended to remove the unit from the process
line and check it without applying fluid supply pressure. In case the unit is dirty, this can be ascertained immediately by loosening
the compression type couplings on the inlet side.
Energizing or de-energizing of the instrument of the instrument indicates whether there is an electronic failure.
After that, fluid pressure is to be applied in order to check behaviour. If there should be suspicion of leakage in case of a gas unit,
do not check for bubbles with a leak detection liquid under the cover as this may lead to a short-circuit in the sensor or p.c.board.
5.2
LED indications
The two LEDs on the instrument give information about the status of the instrument. Refer to paragraph 3.3, "Led indications" for
detailed information.
5.3
Troubleshooting summary general
Symptom
Possible cause
No output signal
No power supply
Action
1a) check power supply
1b) check cable connection
Maximum output signal
Output signal much lower than setpoint
signal or desired flow
Flow is gradually decreasing
9.17.085
Output stage blown-up due to long
lasting shortage and/or high-voltage
peaks
1c) return to factory
Supply pressure too high, or
differential pressure across meter
too high
1d) lower supply pressure
Valve blocked/contaminated
1e) connect 0 .. 15 Vdc to valve and
slowly increase voltage while supply
pressure is ‘on’. The valve should open
at 7V 3V; if not open, then cleaning
parts and adjust valve (qualified
personnel only)
Screen in inlet fitting blocked
1f) clean screen
Sensor/capillary failure
1g) return to factory
Output stage blown-up
2a) return to factory
Sensor/capillary failure
2b) return to factory
Screen blocked/contaminated
3a) clean screen
LFE blocked/contaminated and/or
liquid in meter
3b) remove LFE and clean; dry meter
with air or N2
Valve blocked/contaminated
3c) clean valve
Valve internal damage (swollen seat
in plunger)
3d) replace plunger assembly and
adjust valve or return
Incorrect type of gas is used and/or
pressure/diff. pressure
3e) try instrument on conditions for
which it was designed
Valve adjustment has changed
4b) see ‘1e’
EL-FLOW Classic series
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Bronkhorst High-Tech B.V.
Symptom
Possible cause
Oscillation
Supply pressure/diff. pressure too
high
5a) lower pressure
Pipeline too short between pressure
regulator and MFC
5b) increase length or diameter of
piping upstream
Pressure regulator is oscillating
5c) replace pressure regulator or try
‘5b’
Valve sleeve or internals damaged
5d) replace damaged parts and adjust
valve, see ‘1e’ or return to factory
Controller adjustment wrong
5e) adjust controller
Valve leaks due to damaged plunger
or dirt in orifice
6a) clean orifice and/or, when
replacing plunger assembly, see ‘1e’
Pressure too high or much too low
6b) apply correct pressure
Small flow at zero setpoint
5.4
Action
Service
For current information on Bronkhorst High-Tech B.V. and service addresses please visit our website:
http://www.bronkhorst.com
Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your
application. Contact sales by e-mail:
[email protected]
For after-sales questions, our Customer Service Department is available with help and guidance.
To contact CSD by e-mail:
[email protected]
No matter the time zone, our experts within the Support Group are available to answer your request immediately or ensure
appropriate further action. Our experts can be reached at:
+31 573 45 88 39
Bronkhorst High-Tech B.V.
Nijverheidsstraat 1A
NL-7261 AK Ruurlo
The Netherlands
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EL-FLOW Classic series
9.17.085
Bronkhorst High-Tech B.V.
6
Removal and return instructions
Instrument handlings:
Purge gas lines
When toxic or dangerous fluids have been used, the customer should pre-clean the instrument
Remove instrument from line
The instrument must be at ambient temperature before packaging
Insert the instrument into a plastic bag and seal the bag
Place the bag in a appropriate shipping container
Add documentation:
Reason of return
Failure symptoms
Contaminated condition
Declaration on Contamination form: 9.17.032
When returning material, always describe the problem and if possible the work to be done, in a covering letter.
It is absolutely required to notify the factory if toxic or dangerous fluids have been metered with the instrument!
This to enable the factory to take sufficient precautionary measures to safeguard the staff in their repair department. Take proper
care of packing, if possible use the original packing box.
Contaminated instruments must be dispatched with a completely filled in 'declaration on contamination form'. Contaminated
instruments without this declaration will not be accepted.
Important:
Clearly note, on top of the package, the customer clearance number of Bronkhorst High-Tech B.V., namely:
NL801989978B01
If applicable, otherwise contact your distributor for local arrangements.
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9.17.085
The declaration on contamination form is available at the Bronkhorst download site:
http://www.bronkhorst.com/files/support/safety_information_for_returns.pdf
EL-FLOW Classic series
15

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