Agilent Technologies | 16440A | Agilent 4155C Semiconductor Parameter Analyzer / Agilent 4156C

Agilent 4155C Semiconductor
Parameter Analyzer
Agilent 4156C Precision Semiconductor
Parameter Analyzer
Technical Data
Introduction
Basic Functions
•
Agilent 4155C and 4156C functions:
• Set measurement and/or stress
•
•
•
•
•
•
conditions
Control measurement and/or stress
execution
Perform arithmetic calculations
Display measured and calculated
results on the LCD display
Perform graphical analysis
Store and recall measurement setups,
and measurement and graphical display
data
Dump to printers or plotters for hardcopy output
•
Perform measurement and analysis
with the built-in instrument
BASIC
Self test, Auto calibration
Configuration
4155C
4156C
4xMPSMU
2xVMU
2xVSU
4xHRSMU
2xVMU
2xVSU
41501B (Optional)
2xPGU(Option)*1
GNDU
HPSMU(Option) or
2xMPSMU (Option)*1
SMU: Source Monitor Unit
Display resolution: 6 digits at each current range
(0.01fA display resolution at 10pA range)*2
HRSMU: High Resolution SMU
(1fA/2µV to 100mA/100V)
MPSMU: Medium Power SMU
(10fA/2µV to 100mA/100V)
HPSMU:High Power SMU
(10fA/2µV to 100mA/200V)
VMU: Voltage Monitor Unit
(0.2µV resolution in differential mode)
VSU: Voltage Source Unit
PGU: Pulse Generator Unit (1 channel)
GNDU: Ground Unit
*1: Minimum number of installable MPSMU
*2: Accuracy not guaranteed. Minimum guaranteed
resolution is 1fA at 10pA range
Hardware
Specification Condition
The “supplemental” information and
“typical” entries in the following specifications are not warranted, but provide
useful information about the functions
and performance of the instruments.
The measurement and output accuracy
are specified at the rear panel connector
terminals when referenced to the Zero
Check terminal under the following
conditions:
1. 23°C ± 5°C (double between 5°C to
18°C, and 28°C to 40°C if not noted
otherwise)
2. After 40 minutes warm-up
3. Ambient temperature change less
than ± 1°C after auto calibration
execution.
4. Integration time: medium or long
5. Filter: ON (for SMUs)
6. Kelvin connection (for HRSMU,
HPSMU, and GNDU)
7. Calibration period: 1 year
Agilent 4156C Precision Semiconductor Parameter Analyzer
Voltage/Current Compliance
(Limiting):
HRSMU (High Resolution SMU) Specifications
Voltage Range, Resolution, and Accuracy (HRSMU)
Voltage
Set.
Set.
Meas.
Meas.
Reso.
Accuracy
Reso.
Accuracy
Range
± 2V
100µV
±(0.02%+400µV) 2µV
±(0.01%+200µV)
1mV
± 20V
±(0.02%+3mV)
20µV
±(0.01%+1mV)
2mV
±(0.025%+6mV) 40µV
± 40V
±(0.015%+2mV)
5mV
± 100V
±(0.03%+15mV) 100µV
±(0.02%+5mV)
*1: 100mA (Vout 20V), 50mA (20V<Vout≤40V)
*2: 100mA (Vout 20V), 50mA (20V<Vout≤40V), 20mA (40V<Vout≤100V)
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to ±100V
Current: ±100fA to ±100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
Max.
Current
100mA
100mA
*1
*2
HRSMU Supplemental Information :
Current Range, Resolution, and Accuracy (HRSMU)
Current
Range
±10pA
±100pA
±1nA
±10nA
±100nA
±1µA
±10µA
±100µA
±1mA
±10mA
±100mΑ
Set.
Set.
Meas.
Meas.
Max.
Reso.
Accuracy
Reso.
Accuracy
V
10fA
±(4%+400fA)*1*2
1fA
±(4%+20fA+1fA×Vout/100)*1*2 100V
10fA
±(4%+400fA)*1*2
1fA ±(4%+40fA+10fA×Vout/100)*1*2 100V
100fA ±(0.5%+0.7pA+1fA×Vout)*2 10fA
±(0.5%+0.4pA+1fA×Vout)*2 100V
1pA
±(0.5%+4pA+10fA×Vout) 10fA
±(0.5%+2pA+10fA×Vout) 100V
10pA ±(0.12%+40pA+100fA×Vout) 100fA ±(0.1%+20pA+100fA×Vout) 100V
100pA ±(0.12%+400pA+1pA×Vout) 1pA
±(0.1%+200pA+1pA×Vout) 100V
1nA
±(0.07%+4nA+10pA×Vout) 10pA
±(0.05%+2nA+10pA×Vout) 100V
10nA ±(0.07%+40nA+100pA×Vout) 100pA ±(0.05%+20nA+100pA×Vout) 100V
100nA ±(0.06%+400nA+1nA×Vout) 1nA
±(0.04%+200nA+1nA×Vout) 100V
1µA
±(0.06%+4µA+10nA×Vout) 10nA
±(0.04%+2µA+10nA×Vout) 100V
10µA ±(0.12%+40µA+100nA×Vout) 100nA ±(0.1%+20µA+100nA×Vout) *3
*1: The accuracy is applicable when offset
cancellation has been performed.
*2: The offset current specification is
multiplied by one of the following factors
depending upon the ambient temperature
and humidity (RH = Relative Humidity):
Humidity % RH
Temperature
5 - 60
60 - 80
5°C to 18°C
×2
×2
18°C to 28°C
×1
×2
28°C to 40°C
×2
×5
*3: 100V (Iout 20mA)
40V (20mA<Iout≤50mA)
20V (50mA<Iout≤100mA)
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as ±% of set/measured value (0.04%)
plus offset value (200nA+1nA×Vout) for the
1mA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout or Vout/100.
2
Output terminal/connection:
Maximum allowable cable resistance
when using Kelvin connection (Force,
Sense): 10Ω
Typical voltage source output
resistance (Force line/non-Kelvin
connection): 0.2Ω
Voltage measurement input resistance/
current source output resistance:
≥1015Ω (10pA range)
Current compliance setting accuracy for
opposite polarity:
10pA to 10nA range: V/I setting
accuracy ± 12% of range
100nA to 100mA range: V/I setting
accuracy ± 2.5% of range
Dual triaxial connectors, Kelvin
(remote sensing)
100
HRSMU Measurement and
Output Range
Current (mA)
50
20
-100
-40
-20
-20
-50
-100
20
40
100
Voltage (V)
VSU (Voltage Source Unit)
Specifications
VMU (Voltage Monitor Unit)
Specifications
VSU Output Range:
VMU Measurement Range,
Resolution, and Accuracy:
Voltage Meas.
Meas.
Accuracy
Range Reso.
±20V 1mV ±(0.05% of setting+10mV)*1
*1: Specification is applicable under no load
current.
Max. Output Current: 100mA
VSU Supplemental Information:
Output resistance: 0.2Ω
Maximum load capacitance: 10µF
Maximum slew rate: 0.2V/µs
Current limit: 120mA (typical)
Output Noise: 1mV rms (typical)
Voltage
Range
±2V
±20V
Meas.
Reso.
2µV
20µV
For example, accuracy specifications are
given as ±% of set/measured value (0.02%)
plus offset value (1mV+13µV×Vi) for the 2V
range. The differential mode offset value
consists of a fixed part determined by the
measurement range and a proportional part
that is multiplied by Vi.
Meas.
Accuracy
±(0.02%+200µV)
±(0.02%+1mV)
VMU Supplemental Information:
VMU Differential Mode Range
Resolution, and Accuracy:
Diff V Meas.
Meas.
Range Reso.
Accuracy
±0.2V 0.2 µV ±(0.03% + 10µV+0.3µV×Vi)
±2V
2µV
±(0.02%+100µV+3µV ×Vi)
Max. Common Mode Voltage: ± 20V
Note: Vi is the input voltage of VMU2 in
volts.
Input Impedance: ≥1GΩ
Input leakage current (@0V): ≤ 500pA
(Typical)
Measurement noise: 0.01% of range
(p-p) (Typical)
Differential mode measurement noise:
0.005% of range (p-p) (Typical)
Agilent 4155C Semiconductor Parameter Analyzer
MPSMU (Medium Power SMU) Specifications
Output terminal/connection:
Voltage Range, Resolution, and Accuracy (MPSMU)
Voltage Set.
Range Reso.
± 2V
100µV
± 20V 1mV
± 40V 2mV
± 100V 5mV
*1: 100mA (Vout
*2: 100mA (Vout
Set.
Meas.
Meas.
Max.
Accuracy
Reso.
Accuracy
Current
±(0.03%+900µV+0.3×Iout) 2µV
±(0.02%+700µV+0.3×Iout) 100mA
±(0.03%+4mV+0.3×Iout) 20µV
±(0.02%+2mV+0.3×Iout) 100mA
±(0.03%+7mV)+0.3×Iout) 40µV
±(0.02%+3mV+0.3×Iout) *1
±(0.04%+15mV)+0.3×Iout) 100µV ±(0.03%+5mV+0.3×Iout) *2
20V), 50mA (20V<Vout≤40V)
20V), 50mA (20V<Vout≤40V), 20mA (40V<Vout≤100V)
Current Range, Resolution, and Accuracy (MPSMU)
Current Set.
Set.
Meas.
Meas.
Accuracy
Reso.
Accuracy
Range Reso.
±1nA
100fA ±(0.5%+3pA+2fA×Vout) 10fA
±(0.5%+3pA+2fA×Vout)
±10nA 1pA
±(0.5%+7pA+20fA×Vout) 10fA
±(0.5%+5pA+20fA×Vout)
±100nA 10pA ±(0.12%+50pA+200fA×Vout) 100fA ±(0.1%+30pA+200fA×Vout)
±1µA 100pA ±(0.12%+400pA+2pA×Vout) 1pA
±(0.1%+200pA+2pA×Vout)
±10µA 1nA
±(0.12%+5nA+20pA×Vout) 10pA
±(0.1%+3nA+20pA×Vout)
±100µA 10nA ±(0.12%+40nA+200pA×Vout) 100pA ±(0.1%+20nA+200pA×Vout)
±1mA 100nA ±(0.12%+500nA+2nA×Vout) 1nA
±(0.1%+300nA+2nA×Vout)
±10mA 1µA
±(0.12%+4µA+20nA×Vout) 10nA
±(0.1%+2µA+20nA×Vout)
±100mΑ 10µA ±(0.12%+50µA+200nA×Vout) 100nA ±(0.1%+30µA+200nA×Vout)
*1: 100V (Iout 20mA), 40V (20mA<Iout≤50mA), 20V (50mA<Iout≤100mA)
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as ±% of set/measured value (0.1%)
plus offset value (30pA+200fA×Vout) for the
100nA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout.
VSU Specifications
Max.
V
100V
100V
100V
100V
100V
100V
100V
100V
Single triaxial connector, non-Kelvin
(no remote sensing)
Voltage/Current Compliance
(Limiting):
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage: 0V to ±100V
Current: ±1pA to ±100mA
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
MPSMU Supplemental Information:
Typical voltage source output
resistance: 0.3Ω
Voltage measurement input resistance/
current source output resistance:
≥1013Ω (1nA range)
Current compliance setting accuracy for
opposite polarity:
1nA to 10nA range: V/I setting
accuracy ± 12% of range
*1
100nA to 100mA range: V/I setting
accuracy ± 2.5% of range
100
Current (mA)
MPSMU Measurement and
Output Range
50
20
-100
-40
-20
-20
20
40
100
Voltage (V)
Same as 4156C VSU.
VMU Specifications
-50
Same as 4156C VMU.
-100
3
Agilent 41501B SMU and Pulse Generator Expander
Output terminal/connection:
HPSMU (High Power SMU) Specifications
Dual triaxial connectors, Kelvin (remote
sensing)
Voltage Range, Resolution, and Accuracy (HPSMU)
Voltage
Range
± 2V
± 20V
± 40V
± 100V
± 200V
Set.
Reso.
100µV
1mV
2mV
5mV
10mV
Set.
Accuracy
±(0.03%+900µV)
±(0.03%+4mV)
±(0.03%+7mV)
±(0.04%+15mV)
±(0.04%+30mV)
Meas.
Reso.
2µV
20µV
40µV
100µV
200µV
Meas.
Accuracy
±(0.02%+700µV)
±(0.02%+2mV)
±(0.02%+3mV)
±(0.03%+5mV)
±(0.035%+10mV)
Max.
Current
1A
1A
500mA
125mA
50mA
Voltage/Current Compliance
(Limiting):
Voltage: 0V to ±200V
Current: ±1pA to ±1A
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
HPSMU Supplemental Information:
Meas.
Meas.
Max.
Current Set.
Set.
Accuracy
Reso.
Accuracy
V
Range Reso.
±1nA
100fA ±(0.5%+3pA+2fA×Vout) 10fA
±(0.5%+3pA+2fA×Vout) 200V
±10nA 1pA
±(0.5%+7pA+20fA×Vout) 10fA
±(0.5%+5pA+20fA×Vout) 200V
±100nA 10pA ±(0.12%+50pA+200fA×Vout) 100fA ±(0.1%+30pA+200fA×Vout) 200V
100pA ±(0.12%+400pA+2pA×Vout) 1pA
±1µA
±(0.1%+200pA+2pA×Vout) 200V
±10µA 1nA
±(0.12%+5nA+20pA×Vout) 10pA
±(0.1%+3nA+20pA×Vout) 200V
±100µA 10nA ±(0.12%+40nA+200pA×Vout) 100pA ±(0.1%+20nA+200pA×Vout) 200V
100nA ±(0.12%+500nA+2nA×Vout) 1nA
±1mA
±(0.1%+300nA+2nA×Vout) 200V
±10mA 1µA
±(0.12%+4µA+20nA×Vout) 10nA
±(0.1%+2µA+20nA×Vout) 200V
±100mΑ 10µA ±(0.12%+50µA+200nA×Vout)100nA ±(0.1%+30µA+200nA×Vout) *1
±1Α
100µA ±(0.5%+500µA+2µA×Vout) 1µA
±(0.5%+300µA+2µA×Vout) *2
*1: 200V (Iout 50mA), 100V (50mA<Iout≤100mA)
*2: 200V (Iout 50mA), 100V (50mA<Iout≤125mA), 40V (125mA<Iout≤500mA),
20V (500mA<Iout≤1mA)
Vout is the output voltage in volts.
Iout is the output current in amps.
For example, accuracy specifications are
given as ±% of set/measured value (0.1%)
plus offset value (30pA+200fA×Vout) for the
100nA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout.
Current (mA)
HPSMU Measurement
and Output Range
1000
500
PGU ( Pulse Generator Unit)
Specifications
Modes: Pulse or constant
Amplitude: 0Vpp to 40Vpp
Window: -40.0V to +40.0V
Maximum current:
±200mA (pulse width: ≤1ms, average
current≤100mA)
±100mA
Pulse width: 1.0µs to 9.99s
Minimum resolution: 100ns
Pulse period: 2.0µs to 10.0s
Minimum resolution: 100ns
Delay: 0s to 10s
Minimum resolution: 100ns
Transition time: 100ns to 10ms
Minimum resolution: 1ns
Output impedance: 50Ω or low
impedance (≤1Ω)
Burst count range: 1 - 65535
Maximum allowable cable resistance
when using Kelvin connection:
Force: 0.7Ω (100mA to 1A)
Force: 10Ω (≤100mA)
Sense: 10Ω
Typical voltage source output
resistance (Force line/non-Kelvin
connection): 0.2Ω
Voltage measurement input resistance/
current source output resistance:
≥1013Ω (1nA range)
Current compliance setting accuracy for
opposite polarity:
1nA to 10nA range: V/I setting
accuracy ± 12% of range
100nA to 1A range: V/I setting
accuracy ± 2.5% of range
Voltage (V)
125
50
-200
-100
-40
-20
-50
-125
20
40
200
-500
-1000
Pulse/DC Output Voltage and Accuracy (PGU)
Voltage
Resolution
Accuracy*1
Range
4mV
±20V
±(1% of Base + 50mV +1% of Pulse)
8mV
±40V
±(1% of Base + 50mV +1% of Pulse)
Pulse
4mV
±20V
±(3% of Base + 50mV)
8mV
±40V
±(3% of Base + 50mV)
Note: DC output is performed by the Base parameter.
Set
Parameter
Base
*1: Accuracy is specified at leading edge - trailing edge = 1µs
4
100
Pulse parameter accuracy
Period: ± (2% +2ns)
Width: ± (3% +2ns)
Delay: ±(2% +40ns)
Transition time: ±(5% +10ns)
Trigger output
Level: TTL
Timing: Same timing and width as
PGU1 pulse output
Pulse Range and Pulse Parameter (PGU)
Period
Width
Delay
Set resolution
Range
1
2µs - 100µs
1µs - 100µs
0 - 100µs
0.1µs
2
100µs - 1000µs
1µs - 999µs
0 - 1000µs
1µs
3
1ms - 10ms
0.01ms -9.99ms
0 - 10ms
10µs
4
10ms -100ms
0.1ms - 99.9ms
0 - 100ms
100µs
5
100ms - 1000ms
1ms - 999ms
0 - 1000ms
1ms
6
1s - 10s
0.01s - 9.99s
0 - 10s
10ms
Note: Pulse width is defined when leading time is equal to trailing time. PGU2 must be set in
the same range as PGU1.
PGU Supplemental Information:
Overshoot: ≤ ±5% of amplitude ±10mV
(50Ω output impedance to 50Ω load)
Pulse width jitter: 0.2% + 100ps
Pulse period jitter: 0.2% + 100ps
Maximum slew rate: 100V/µs
(50Ω output impedance to 50Ω load)
Noise: 0.2% of range (@ DC output)
MPSMU Specifications
Same as 4155C MPSMU.
GNDU (Ground Unit)
Specifications:
Output Voltage: 0V±100µV
Maximum sink current: 1.6A
Output terminal/connection:
Single triaxial connector,
Kelvin (remote sensing)
GNDU Supplemental Information
Load Capacitance: ≤1µF
Cable resistance:
Force: ≤1Ω
Sense: ≤10Ω
,
HRSMU, MPSMU,HPSMU
Supplemental Information
Maximum capacitive load: 1000pF
Maximum guard capacitance: 900pF
Maximum shield capacitance: 5000pF
Maximum guard offset voltage: ±1mV
Noise characteristics (typical,
Filter: ON):
Voltage source noise: 0.01% of V
range (rms)
Current source noise: 0.1% of I range
(rms)
Voltage monitor noise: 0.02% of V
range (p-p)
Current monitor noise: 0.2% of I
Output overshoot (typical, Filter: ON):
Voltage source: 0.03% of V range
Current source: 1% of I range
Range switching transient noise
(typical, Filter: ON):
Voltage ranging: 250mV
Current ranging: 10mV
Maximum slew rate: 0.2V/µs
Set Restrictions
Accuracy
Range
100ns - 1000ns
1ns
±(5% + 10ns)
10ns
0.5µs - 10µs
±(5% + 10ns)
100ns
5.0µs - 100.0µs
±(5% + 10ns)
50µs - 1000µs
1µs
±(5% + 10ns)
0.5ms - 10.0ms
10µs
±(5% + 10ns)
Restrictions:
Pulse width < Pulse Period, Delay time < Pulse period, Leading time < Pulse width × 0.8
Trailing time < (Pulse period - Pulse width) × 0.8
Period, width, and delay of PGU1 and PGU2 must be in the same range. Leading time and
trailing time for a PGU must be in the same range.
Capacitance
Capacitance Calculation
Calculation Accuracy
Accuracy (Supplemental
(Supplemental Data)
Data)
Accuracy is derived from the current range, voltage range, capacitance measurement
and leakage current measurement integration times, and the guard capacitance of cabling
and step voltage. The information in the chart below is based on the following conditions:
Voltage Range: ± 20 V; Voltage Step: 100 mV; Guard Capacitance: 100 pF; Equivalent
parallel resistance of DUT: 1 x 10 15 W. The ratio of integration times for capacitance
measurement and leakage current measurement is 1:1.
HRSMU
Current
Range
100pA
1nA
10nA
Integration Measurement Resolution Accuracy
Time
Range
Reading %
0.5sec
1sec
2sec
0.1sec
0.5sec
2sec
0.1sec
0.5sec
2sec
10sec
1pF
20pF
760pF
700pF
4.5nF
18nF
7nF
45nF
180nF
940nF
5fF
10fF
20fF
10fF
40fF
200fF
10fF
40fF
200fF
1pF
4.2
4.3
4.3
0.84
0.85
0.93
0.84
0.85
0.93
1.3
Offset
70fF
90fF
130fF
160fF
280fF
740fF
200fF
440fF
1.4pF
6.2pF
MPSMU
Current
1nA
10nA
Integration Measurement Resolution Accuracy
Time
Range
Reading % Offset
0.1sec
0.5sec
2sec
0.1sec
0.5sec
2sec
10sec
700pF
4.5nF
18nF
7nF
45nF
180nF
940nF
10fF
40fF
200fF
10fF
40fF
200fF
1pF
0.91
0.94
1.0
0.91
0.94
1.0
1.6
170fF
340fF
1pF
180fF
480fF
1.6pF
7.6pF
Current complicance must be larger than the current range. The capacitance of
the DUT and measurement system must be smaller than the measurement range.
The measurement range might be reduced by the leakage current.
5
Functions
Measurement Set-up
Setting
• Fill-in-the-blanks using front-panel or
full-size external keyboard
• Load settings from floppy disk or via
the LAN port
• Program using internal Instrument
•
•
•
•
BASIC or via GPIB
HELP Function
Library: Default measure setup, Vce-Ic,
Vds-Id, Vgs-Id, and Vf-If are predefined softkeys
User-defined measurement setup
library
Auto file load function on power-up
Measurement
The 4155C and 4156C can
perform dc or pulsed force/measure,
and stress force. For dc,
voltage/current sweep and sampling
(time domain) measurements are
available.
Voltage/Current Sweep
Measurement Characteristics
Each SMU and VSU can sweep using
VAR1 (primary sweep), VAR2
|
(subordinate sweep), or VAR1
(synchronous sweep).
VAR1
Primary sweep controls the staircase (dc
or pulsed) voltage or current sweep.
Maximum number of steps: 1001 for one
VAR1 sweep.
Sweep type: linear or logarithmic
Sweep direction: Single or double sweep
Hold time:
Initial wait time or wait time after
VAR2 is set: 0 to 655.35s with 10ms
resolution
Delay time:
Wait time from VAR1 step to the start
of the measurement: 0 to 65.535s with
100 µs resolution
VAR2
Subordinate linear staircase or linear
pulsed sweep. After primary sweep is
completed, the VAR2 unit output is
incremented.
Maximum number of steps: 128
VAR1
|
Staircase or pulse sweep synchronized
with the VAR1 sweep. Sweep is made
with a user specified ratio and offset
|
value. VAR1 output is calculated as
|
VAR1 = a × VAR1 + b, where “a” is the
user specified ratio and “b” is the user
specified offset value.
CONSTANT
A source unit can be set as a constant
voltage or current source depending on
the unit.
PULSE
One of the SMUs can be set as a pulse
source.
Pulse width: 0.5ms to 100ms, 100µs
resolution.
Pulse period:
(5ms to 1s (≥ pulse width + 4ms),
100µs resolution.
SMU pulse setting accuracy
(supplemental information, at fixed range
measurement except multi- channel
measurement):
Width: 0.5% + 50µs
Period: 0.5% + 100µs
Trigger output delay for pulsed
measurement: 0 - 32.7ms with 100µs
resolution (< pulse width).
Sampling (Time Domain)
Measurement Characteristics
Displays the time sampled voltage/
current data versus time.
Maximum sampling points: 10,001
(linear)
Sampling mode: linear, log, and
thinned-out
Note: The thinned-out mode is similar to
reverse-log sampling. Sampling
measurement continues by thinning out
older data until the sampling completion
condition is satisfied.
Sampling interval range and resolution:
Linear scale (auto mode):
60µs to 480µs range: 20µs resolution
480µs to 1s range: 80µs resolution
1s to 65.535s range: 2ms resolution
Linear scale (no limit mode), log
scale, and thinned-out modes:
560µs (720µs at thinned-out mode)
to 1s range: 80µs resolution
1s to 65.535s range: 2ms resolution
Note: The following conditions must be set
when initial interval is less than 2ms.
• Number of measurement channels: 1
• Measurement ranging: fixed range
• Stop condition: disable
6
Hold time:
Initial wait rime: 0.03s to 655.35s,
100µs resolution
Sampling measurement stop condition:
A condition to stop the sampling can
be defined.
Sampling interval setting accuracy
(supplemental data):
0.5% + 10µs (sampling interval ≤
480µs)
0.5% + 10µs (480µs ≤ sampling
interval <2ms)
0.5% + 100µs (2ms ≤ sampling
interval)
C-V Measurement
Characteristics
Capacitance is calculated value
derived from the following
equation:
dQ
C
=
dV
dQ is the charge when dV, the step
voltage, is applied by the SMU;
dQ is derived from the measurement current (amps) and the
integration time (seconds).
Measurement Range:
Measurement range depends on the
current range, integration time, and
step voltage (refer to the chart in
supplemental data).
Capacitance Calculation Accuracy:
Accuracy is dependent on accuracy of the
current measurement and voltage measurement, and the stray capacitance and
leakage current of measurement system etc
(Refer to the chart in supplemental data).
Zero Offset:
Cancels stray capacitance of the fixtures
and test leads.
Leakage Current Compensation:
Cancels the influence of the leakage current to the capacitance measurement.
Stress Force Characteristics
SMU, VSU, and PGU output can be
forced for the user specified period.
Stress time set range:
5000µs to 31,536,000s (365 days)
Resolution:
100µs (500µs≤stress time≤10s)
10ms (10s<stress time≤31,536,000s)
Burst pulse count:
1 - 65,535 (PGU only)
Trigger:
The 4155C and 4156C output a gate
trigger while stress channels are
forcing stress.
Knob Sweep
In the knob sweep mode, sweep range
is controlled instantaneously with the
front-panel rotary knob.
Only the Channel Definition page needs
to be defined.
Standby Mode
SMUs in “Standby” remain
programmed to their specified output
value even as other units are reset for
the next measurement.
Other Characteristics
Limited auto-ranging, voltage/current
compliance, power compliance,
automatic sweep abort functions,
self-test, and self-calibration.
Arithmetic and Analysis
Functions
Arithmetic Functions
User Functions
Up to six USER FUNCTIONS can be
defined using arithmetic expressions.
Measured data and analyzed variables
from graphics analysis (marker, cursor,
and line data) can be used in the
computation. The results can be
displayed on the LCD.
Arithmetic Operators
+, -, *, /, ^, LGT (logarithm, base 10),
LOG (logarithm, base e), EXP
(exponent), DELTA, DIFF (differential),
INTEG (integration), MAVG (moving
average), SQRT, ABS (absolute value),
MAX, MIN, AVG (averaging), COND
(conditional evaluation).
Physical Constants
Keyboard constants are stored in memory
as follows:
q: Electron Charge, 1.602177 E-19 C
k: Boltzman’s Constant, 1.380658 E-23
ε: Dielectric Constant of Vacuum,
8.854188 E-12
Engineering Units
The following unit symbols are also
available on the keyboard: f (10-15),
p (10-12), n (10-9), u or µ (10-6), m (10-3),
K (103), M (106), G (109)
Analysis Capabilities
Overlay Graph Comparison
A graphics plot can be stored and later
recalled as an overlay plane. Four
overlay planes can be stored. One plane
can be overlaid onto the current data.
Marker
Marker to min/max, interpolation, direct
marker, and marker slip
Cursor
Long and short, direct cursor.
Line
Two lines, normal mode, grad mode,
tangent mode, and regression mode.
Scaling
Auto scale and zoom.
Data Variable Display
Up to two user defined parameters can be
displayed on the graphics screen.
Read Out Function
The read out functions are built-in
functions for reading various values
related to the marker, cursor, or line.
Automatic Analysis Function
On a graphics plot, the markers and lines
can be automatically located using the
auto analysis setup. Parameters can be
automatically determined using
automatic analysis, user function, and
read out functions.
User Variable
Display the data on the LCD via GPIB
or instrument BASIC.
Output
Display
Display Modes
Graphics and list.
Graphics Display
X-Y or X-Y1/Y2 plot of source
current/voltage, measured
current/voltage, time, or calculated
USER FUNCTION data.
List Display
Measurement data and calculated USER
FUNCTION data are listed in
conjunction with VAR1 step number or
time domain sampling step number. Up
to eight data sets can be displayed.
Display
8.4 inch diagonal color active matrix
LCD, 640 dot (H) × 480 dot (V)
Hard Copy Functions
Graphics Hard Copy
Measured data and all data appearing on
the LCD can be output via GPIB,
parallel printer port, or network interface
to supported HP plotters or printers.
PCL, HR PCL (high-resolution PCL),
and HP GL formats are supported
(selectable).
Text Hard Copy
Print out setup information or measured
data list as ASCII text via GPIB,
parallel printer port, or network
interface to supported HP plotters or
printers. PCL, HR PCL, and HP GL
formats are supported (selectable).
Hard Copy File
Hard copy output can be stored to an
internal or external mass storage device
instead of sending it to a printer or
plotter. The data can be stored in PCL,
HR PCL, TIFF, HR TIFF (highresolution TIFF), or HP GL formats.
Hard Copy via Network Interface
The network interface has lpr client
capability.
High-Resolution (HR) Mode
This file mode is available for cases
where an extremely clean print-out or
plot is desired.
Note: High resolution mode takes significantly greater CPU time to generate, so its
use is recommended for final reports only.
Data Storage
Mass storage device:
Built-in 3.5 inch flexible disk drive
Media: 3.5 inch 2HD or 2DD diskette
Format type: HP LIF and DOS
User area:
1.44Mbyte (2HD) or 720Kbyte (2DD)
File types:
Auto start program file, initial setup
file, measurement setup file,
measurement setup/result file, stress
setup file, customize file, hard copy
data file, and instrument BASIC
program and data file.
Format of data made by the HP BASIC
program:
Data made by the HP BASIC program
and data made by the instrument BASIC
program are compatible.
Network mass storage device:
An NFS mountable mass storage
device
File types:
Auto start program file, initial setup
file, measurement setup file,
measurement setup/result file, stress
setup file, customize file, and hard
copy data file.
7
Maximum number of files allowed per
directory on network mass storage
device: 199
Data storage (supplemental data):
2HD DOS format:
Available bytes: 1457K (byte)
File size:
Measurement setup: 3843 (byte)
Stress setup: 601 (byte)
Measurement setup/result
(Typical data): 15387 (byte)
(VAR1: 101, VAR2: 5)
Customized system setup: 1661 (byte)
Hardcopy data: 30317 (byte)
(Monochrome PCL 75DPI file)
Hardcopy data: 38702 (byte)
(monochrome TIFF file)
Note: For LIF format, the total number of files
is limited to 199.
Repeating and Automating
Test
Instrument Control
Agilent 4155C and 4156C function control:
Internal or external computer controls
the 4155C and 4156C functions
via the GPIB interface
Command sets:
SCPI command set
Agilent FLEX command set
Agilent 4145B command set
Program Memory:
Using the 4155C/4156C Agilent FLEX
command set, the user can store
program code in the 4155C or the
4156C. The maximum number of
subprograms is 256 (8 bit).
External instrument remote control:
Control external equipment via the
GPIB interface.
Instrument BASIC
Instrument BASIC is a subset of
HP BASIC.
Functions:
Arithmetic operation, binary operation,
string manipulation, logical operation,
array operation, program flow control,
event-initiated branching, program
editing and debugging support, mass
storage operation, instrument control,
real-time clock, softkey operation, and
graphics.
Agilent 4145B automatic sequence
program (ASP) typing aid:
4145B ASP-like syntax softkeys are
available in instrument BASIC. A
4145B ASP file cannot be read by
the 4155C or 4156C.
8
Remote control:
Instrument BASIC is remote
controllable from an external computer
via the GPIB interface.
Instrument BASIC memory area
(supplemental data):
Program (text) area: 16K (byte)
Variable/stack area: 500K (byte)
Common variable area: 600K (byte)
Note: The memory size for common variabl
is decreased when hard copy or disk operation
is performed.
Trigger
Input:
External trigger input starts a sweep or
sampling measurement or can be used
as a trigger input for continuing an
Instrument BASIC program.
Input Level:
TTL level, negative or positive edge
trigger
Output:
External trigger can be generated by the
following events: start of each sweep
measurement step, start of each pulse
(SMU) output, while the stress source
is forcing, and Instrument BASIC
trigger out command execution.
Output Level:
TTL level, negative or positive logic
4145B Data Compatibility
and Syntax Commands
Setup and data file
Measurement setup and data from the
4145B can be loaded.
GPIB program
GPIB programs for the 4145B can
be used when the 4145B command
set is selected.
Note: There is a possibility that GPIB
programs for the 4145B will need to be
modified.
Interfaces
GPIB interface:
SH1, AH1, T6, L4, SR1, RL1, PP0,
DC1, DT1, C1, C2, C3, C4, C11, E2
Parallel interface: Centronics
RJ45:
Ethernet IEEE 802.3 10BASE-T for a
10Mbps CSMA/CD local area
network
External keyboard:
Compatible PC-style 101-key
keyboard (mini DIN connector)
Interlock and LED connector
R-BOX control connector
Trigger in/out
SMU/PGU selector control connector
(41501B)
Sample Application
Programs
Flash EEPROM test
TDDB
Constant I (Electromigration test)
V-Ramp Test
J-Ramp Test
SWEAT
GO/NO-GO Test
HCI degradation test
Sample VEE Program
Vth measurement using the 4155C
or 4156C, the E5250A, and a wafer
prober.
VXI plug&play Drivers
VXIplug&play drivers for the
4155C and 4156C
Supported VXIplug&play operating
systems:
Windows NT
Windows 95
Format
Tree-structured function panel.
Panel mode for hardware configuration and manual parameter setting.
Parameter mode for variable definition
and I/O configuration.
General Specifications
Temperature range
Operating:
+10°C to +40°C (if using floppy disk
drive)
+5°C to +40°C (if not using floppy
disk drive)
Storage: -22°C to +60°C
Humidity range
Operating:
20% to 80% RH, non-condensing and
wet bulb temperature ≤ 29°C (if using
floppy disk drive)
15% to 80% RH, non-condensing and
wet bulb temperature ≤ 29°C (if not
using floppy disk drive)
Storage: 5% to 90% RH , noncondensing and wet bulb temperature
≤ 39° C
Altitude
Operating: 0 to 2,000 m (6,561 ft)
Storage: 0 to 4,600 m (15,091 ft)
Power requirement
90V to 264V, 47 to 63 Hz
Maximum VA
4155C and 4156C: 450VA
41501B: 350 VA
Regulatory Compliance
EMC:
EN 61326-1:+A1, AS/NZS 2064.1
Safety:
CSA C22.2 NO.1010.1-1992
IEC 61010-1:+A2/EN 61010-1:+A2
UL3111-1:1994
Certification:
CE, CSA, NRTL/C, C-Tick
Dimensions:
4155C and 4156C:
235mm H × 426mm W × 600mm D
41501B:
190mm H × 426mm W × 600mm D
Weight (approx.):
4155C and 4156C: 21kg
41501B: 16kg
(option 412, HPSMU + 2×PGU)
4155C and 4156C
Furnished Accessories
Triaxial cable, 4 ea. (4155C)
Kelvin triaxial cable, 4 ea. (4156C)
Coaxial cable, 4 ea.
Interlock cable, 1 ea.
Keyboard, 1 ea.
User manual, 1 set
Sample application program disk, 1 ea.
Sample VEE program disk, 1 ea
VXIplug&play drivers disk for the
4155C and 4156C, 1 ea.
VXIplug&play drivers disk for the
E5250A, 1 ea.
Accessory Specifications
16440A cannot work without two
pulse generator units of the
41501A/B (SMU and Pulse
Generator Expander).
Channel configurations:
Two channels (CH1, CH2)
CH1: INPUT ports: 2
(SMU and PGU, PGU port has
additional series semiconductor relay)
OUTPUT port: 1
CH2: INPUT ports: 2 (SMU and PGU)
OUTPUT port: 1
Voltage & Current Range
Input port
SMU
PGU
Max. V
200 V
40V
Max I
1.0 A
0.2A (AC peak)
Supplemental Information (at
23°C ± 5°C, 50% RH)
SMU port leakage current:
< 100fA @100V
SMU port residual resistance (typical):
0.2Ω
SMU port stray capacitance (typical
@1MHz):
Force ↔ Common: 0.3pF
Force ↔ Guard:
15pF
Guard ↔ Common: 130pF
PGU port residual resistance: 3.4Ω
PGU port OFF capacitance (typical):
5pF
PGU port OPEN capacitance (typical):
700pF (@ 1MHz, Vin - Vout = 0V)
PGU port signal transfer characteristics
Overshoot: < 5% of pulse amplitude
(@20ns leading and trailing time, 50Ω
pulse generator source impedance,
50pF and 1MΩ in parallel load).
General Specifications
Dimensions:
50 mm H × 250 mm W × 275 mm D
Weight (approx.): 1.1kg
Specification Condition
The “supplemental information” and “typical”
entries in the following specifications are not
warranted, but provide useful information
about the functions and performance of the
instruments. 23°C ± 5°C, 50% RH.
16440A
SMU/Pulse Generator
Selector
The 16440A switches either an SMU
or PGU to the associated output port.
You can expand to 4 channels by adding
an additional 16440A. The channel 1
PGU port provides “PGU OPEN”
function, which can disconnect the PGU
by opening a semiconductor relay. The
16441A R-BOX
The 16441A R-BOX adds a selectable
series resistor to the SMU output. You
can select the resistor from the setup
page, and the voltage drop due to the
series resistor is automatically
compensated for in the measurement
result.
Measurement limitations with the
4155C and 4156C and R-BOX
If you measure device characteristics
including negative resistance over
1MΩ with the 4155C/4156C and
R-BOX, there is a possibility that
they cannot be measured.
There is a possibility that the
4155C and 4156C cannot perform
measurements because of DUT
oscillations even with the R-BOX.
Whether oscillation occurs or not
depends upon the DUT and
measurement conditions.
Number of SMU channels that can add
resistor: 2
Resistor values:
1MΩ, 100kΩ, 10kΩ, 0Ω (each
channel)
Resistance accuracy:
0.3% (at 23°C±5°C, between inputoutput terminal)
Maximum voltage: 200V
Maximum current: 1A (0Ω selected)
Kelvin connection: Kelvin connection
is effective only when 0Ω is selected.
Supplemental Information (at
23°C ± 5°C, 50% RH)
Leakage current: <100fA @ 100V
General Specifications
Dimensions:
72 mm H × 250 mm W × 270 mm D
Weight (approx.): 1.6kg
16442A Test Fixture
Channel Information
SMU:
6 channels (1 triaxial connector/
channel)
3 channels (1 Kelvin triaxial connector/
channel)
VSU:
2 channels (1 BNC connector/channel)
VMU:
2 channels (1 BNC connector/channel)
PGU:
2 channels (1 BNC connector/channel)
GNDU:
1 channel (1 triaxial connector)
INTLK: 6 pin connector
Supplemental Information (at
23°C ± 5°C, 50% RH)
SMU channel:
Leakage current: 10pA max @200V
(Force or Sense ↔ Common)
Stray capacitance: 15pF max
(Force or Sense ↔ Common)
Stray capacitance: 3pF typical
(Force or Sense ↔ Other SMU)
Residual resistance: 60mΩ typical
(Force, Sense)
Guard capacitance: 70pF max
(Force or Sense ↔ Guard)
9
VSU channel residual resistance:
60mΩ typical
VMU channel residual resistance:
60mΩ typical
PGU channel characteristic impedance:
50Ω typical
GNDU channel residual resistance:
40mΩ typical (Force, Sense)
General Specifications
Temperature range
Operating: +5°C to +40°C
Storage: -40°C to +70°C
Humidity range
Operating: 5% to 80% RH
(no condensation)
Storage: 5% to 90% RH at 65°C
(no condensation)
Dimensions:
140 mm H × 260 mm W × 260 mm D
Weight (approx.): 2.5kg
For more information about Agilent
Technologies semiconductor test products,
applications,and services,visit our website:
www.agilent.com/go/semiconductor
or you can call one of the centers listed
and ask to speak with a semiconductor
test sales representative.
For more information about other Agilent
test and measurement products,go to
www.agilent.com
United States:
1 800 452 4844
Canada:
1 877 894 4414
Europe:
(31 20) 547 2000
Japan:
(81) 426 56 7832
Fax: (81) 426 56 7840
Latin America:
(305) 269 7500
Fax: (305) 269 7599
Australia/New Zealand:
1 800 629 485 (Australia)
Fax: (61 3) 9272 0749
0 800 738 378 (New Zealand)
Fax: (64 4) 495 8950
Asia Pacific:
(852) 2599 7889
Fax: (852) 2506 9233
Taiwan:
(886 2) 717 9524
Fax: (886) 2 718 9860
Korea:
(822) 769 0800
Fax: (822) 786 1083
Singapore:
(65) 1 800 292 8100
Fax: (65) 275 0387
Product specifications and descriptions in this
document subject to change without notice.
Copyright ©2000 Agilent Technologies
Printed in U.S.A. 11/00
5988-0301EN
Download PDF