datasheet for CRS09-02 by Silicon Sensing Systems Ltd

datasheet for CRS09-02 by Silicon Sensing Systems Ltd
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
Features
1 General Description
• Proven and Robust silicon MEMS vibrating
ring structure
• FOG-like performance
• Low Bias Instability
• Excellent Angle Random Walk
• Low noise
• Precision analogue output
• Wide range from -40°C to +85°C
• High shock and vibration rejection
• Temperature sensor output for precision
thermal compensation
• MEMS frequency output for precision thermal
compensation
• RoHS Compliant
• Two rate ranges, two performance options
for each
CRS09 provides the optimum solution for rate range
applications where bias instability, angle random walk
and low noise are of critical importance.
Applications
•
•
•
•
•
•
•
Platform Stabilization
Precision Surveying
Maritime Guidance and Control
Gyro-compassing and Heading Control
Autonomous Vehicles and ROVs
Rail Track monitoring
Robotics
The latest inductive MEMS gyro sensor element
is combined with precision discrete electronics
to achieve high stability and low noise, making
the CRS09 a viable alternative to fibre-optic and
dynamically tuned gyros.
An on board temperature sensor and the resonant
frequency of the MEMS enables additional external
conditioning to be applied to the CRS09 by the
host, enhancing the performance even further. Test
data for Bias and Scale Factor can be provided with
each gyroscope enabling this compensation to be
implemented without the need for further calibration.
Typical applications include downhole surveying,
precision platform stabilization, ship stabilisation, ship
guidance and control, autonomous vehicles and
high-end AHRS.
Whatever your application, the unique and patented
silicon ring technology gives advanced and stable
performance over time and temperature, overcoming
mount sensitivity problems associated with simple
beam or tuning fork based sensors.
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS09-00-0100-132 Rev 1
Page 1
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
1
Vcc
www.siliconsensing.com
4.6V (Regulated)
Regulator
2
Ref (2.4V)
4
Ref
GND
PD
VCO
PLL
3
AGC
Rate_Out
SD
Quad
Real
PP
SP
28kHz
7
FREQ
5
TMP
TMP
PCB
C.G.18633
Figure 1.1 CRS09 Functional Block Diagram
63
4 x Ø 3.5
Mass: 60g
54
63
54
CRS09-01
S/N.
19
0
All dimensions in millimetres.
Connector: IL-S-8P-S2L2-EF (JAE)
Mating Connector: IL-S-8S-S2C2-S
(This connector with 500mm cable is
included with each CRS09)
Figure 1.2 CRS09 Overall Dimensions
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 2
CRS09-00-0100-132 Rev 1
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
2 Ordering Information
Part Number
Rate Range
Bias Over Temperature
Notes
CRS09-01
±200°/s
< ±3°/s
–
CRS09-02
±100°/s
< ±3°/s
–
CRS09-11
±200°/s
< ±1°/s
Optimal performance
over temperature
CRS09-12
±100°/s
< ±1°/s
Optimal performance
over temperature
3 Specification
Unless otherwise specified the following specification
values assume Vdd = 4.75 to 5.25V over the temperature
range -40 to +85°C.
Parameter
CRS09-01, CRS09-11
CRS09-02, CRS09-12
Notes
Rate Range
±200°/s
±100°/s
–
Nominal Scale Factor
10mV/°/s
20mV/°/s
–
Scale Factor Setting Error
 ±1%
 ±1%
At nominal 23°C
Scale Factor Variation Over
Temperature
 ±1%
 ±1%
Over specified operating
temperature range
Non-Linearity
< 0.1%
< 0.1%
Of full scale range
< ±10mV
< ±20mV
At nominal 23°C
< ±3°/s (CRS09-01)
< ±1°/s (CRS09-11)
< ±3°/s (CRS09-02)
< ±1°/s (CRS09-12)
–
Angular Random Walk
< 0.1°/hr
< 0.1°/hr
At constant temperature using the
Allan Variance method
Bias Instability
< 3.0°/hr
< 3.0°/hr
At constant temperature using the
Allan Variance method
< 0.03°/s rms
< 0.03°/s rms
Over 3 - 30Hz
> 30Hz
> 30Hz
55Hz typical to -3dB point
Cross Axis Sensitivity
< 2%
< 2%
–
Power Up Time
< 0.5s
< 0.5s
–
Current Dissipation
< 100mA
< 100mA
–
Inrush Current
< 200mA
< 200mA
–
2.4V ±0.02V
2.4V ±0.02V
w.r.t. GND over specified
operating temperature range
100 ±20ohms
100 ±20ohms
Rate and Ref. outputs
> 500μA
> 500μA
Rate and Ref. outputs
Bias Setting Error
Bias Variation Over Temperature
Range
Quiescent Noise
Bandwidth
Ref Output
Output Impedance
Minimum Output Current
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS09-00-0100-132 Rev 1
Page 3
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
4 Characteristics
Parameter
Minimum
Typical
Maximum
Notes
Supply Voltage
0.00V
5.00V
5.50V
–
Storage Temperature
-40°C
–
+85°C
See Note 1
Operational Vibration
–
–
98m/s2
20 to 2KHz
peak to peak
Shock Survival
–
–
–
See Note 2
4.75V
5.00V
5.25V
–
–
–
15.00mV rms
0.5 to 100Hz
Temperature
-40°C
+23°C
+85°C
–
Humidity
5%RH
–
95%RH
Not condensing
Minimum
Typical
Maximum
Notes
27.4kHz
28.0kHz
28.6kHz
Output impedance
1kohm
-0.86Hz/°C
-0.80Hz/°C
-0.74Hz/°C
–
-12.60mV/°C
-11.77mV/°C
-11.00mV/°C
Output impedance
470ohm
Absolute Maximum Ratings
Operating Conditions
Supply Voltage
Power Supply Noise
5 Auxillary Output Signals
Parameter
Frequency
Resonanting Ring
Frequency
Frequency
Temperature
Coefficient
Temperature
Temperature Sensor
Scale Factor
Note 1: The product must not be subjected to temperatures outside the recommended storage
temperature range at any time.
Note 2: Do not drop the device onto a hard surface from a height exceeding 300mm.
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 4
CRS09-00-0100-132 Rev 1
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
6 Typical Performance Characteristics
Graphs showing typical performance characteristics for CRS09 are below.
Note: Typical data is with the device powered from a 5.0V supply, unless
stated otherwise.
Bias Characteristics
Figure 6.1 Bias Error over Temperature for
CRS09-01, including the Bias Setting
Error at 23°C
Figure 6.2 Bias Error over Temperature for
CRS09-11, including the Bias Setting
Error at 23°C
Figure 6.3 Bias Error over Temperature for
CRS09-02, including the Bias Setting
Error at 23°C
Figure 6.4 Bias Error over Temperature for
CRS09-12, including the Bias Setting
Error at 23°C
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS09-00-0100-132 Rev 1
Page 5
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
Scale Factor Characteristics
Figure 6.5 Scale Factor Error over Temperature
for CRS09-01, including the Setting
Error at 23°C
Figure 6.6 Scale Factor Error over Temperature
for CRS09-02, including the Setting
Error at 23°C
Figure 6.7 Scale Factor Error over Temperature
for CRS09-11, including the Setting
Error at 23°C
Figure 6.8 Scale Factor Error over Temperature
for CRS09-12, including the Setting
Error at 23°C
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 6
CRS09-00-0100-132 Rev 1
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
Non-Linearity Error
Figure 6.9 Non-Linearity Error (Maximum) over
Temperature for CRS09-01 and CRS09-11
Figure 6.10 Non-Linearity Error versus Applied
Rate at -40°C, CRS09-01 and CRS09-11
Figure 6.11 Non-Linearity Error versus Applied
Rate at 23°C, CRS09-01 and CRS09-11.
Figure 6.12 Non-Linearity Error versus Applied
Rate at 85°C, CRS09-01 and CRS09-11
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS09-00-0100-132 Rev 1
Page 7
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
Non-Linearity Error Continued
Figure 6.13 Non-Linearity Error (Maximum) over
Temperature for CRS09-02 and CRS09-12
Figure 6.14 Non-Linearity Error versus Applied
Rate at -40°C, CRS09-02 and CRS09-12
Figure 6.15 Non-Linearity Error versus Applied
Rate at 23°C, CRS09-02 and CRS09-12
Figure 6.16 Non-Linearity Error versus Applied
Rate at 85°C, CRS09-02 and CRS09-12
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 8
CRS09-00-0100-132 Ren 1
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
Frequency Output
Figure 6.17 Frequency Output variation over
Temperature for CRS09-01
Figure 6.18 Frequency Output variation over
Temperature for CRS09-11
Figure 6.19 Frequency Output variation over
Temperature for CRS09-02
Figure 6.20 Frequency Output variation over
Temperature for CRS09-12
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS09-00-0100-132 Rev 1
Page 9
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
Allan Variance Data
Figure 6.21 Typical Allan Variance Data for
CRS09-01 and CRS09-11
Figure 6.22 Typical Allan Variance Data for
CRS09-02 and CRS09-12
Temperature Sensor Characteristics
Figure 6.23 Temperature Sensor Error against
Chamber Temperature for CRS09-01
and CRS09-11
Figure 6.24 Temperature Sensor Output with
respect to 0V (GND) against Chamber
Temperature for CRS09-01 and CRS09-11
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 10
CRS09-00-0100-132 Rev 1
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
Temperature Sensor Characteristics Continued
Figure 6.25 Temperature Sensor Output with
respect to VRef against Chamber Temperature
for CRS09-01 and CRS09-11
Figure 6.26 Temperature Sensor Error against
Chamber Temperature for CRS09-02
and CRS09-12
Figure 6.27 Temperature Sensor Output with
respect to 0V (GND) against Chamber
Temperature for CRS09-02 and CRS09-12
Figure 6.28 Temperature Sensor Output with
respect to VRef against Chamber Temperature
for CRS09-02 and CRS09-12
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS09-00-0100-132 Rev 1
Page 11
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
Voltage Reference Output (VRef)
Figure 6.29 Voltage Reference variation with
Temperature for CRS09-01 and CRS09-11
Figure 6.30 Voltage Reference variation with
Temperature for CRS09-02 and CRS09-12
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 12
CRS09-00-0100-132 Rev 1
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
7 Interfacing
Housing
1
GND
+5V
200mA
2
+5V
100Ω
3
+
Rate
-
0.1µF
100Ω
4
Differential
Amplifiers
Ref
0.1µF
5
470Ω
+
LM20B
TMP
0.1µF
6
Leave Unconnected
D.N.C.
74HC
CMOS Schmitt Gate
(e.g. 74HC14, TS7S14F)
7
1kΩ
FRQ
390pF
8
Leave Unconnected
N.C.
C.G. 18634
Figure 7.1 Recommended Interfacing
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS09-00-0100-132 Rev 1
Page 13
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
The table below provides connection details.
Connector
Pin Number
Name
Comment
1
GND
Power Supply and Signal Ground, 0 Volts
2
Vcc
Power Rail: 4.75 to 5.25 Volts, at 100 mA approx. (200mA inrush)
3
Rate_Out
Angular Rate output. Nominally centred at 2.40 Volts for zero angular rate
4
Ref
Voltage reference. Nominally fixed at 2.40 Volts. This reference is derived from a precision
voltage reference integrated circuit and is used as the reference for the analogue electronics
5
TMP
Temperature sensor output. A National Semiconductor LM20B is used to
measure the temperature
6
D.N.C.
Do Not Connect to this pin
7
FREQ
This is CMOS Digital (74HC series) compatible digital output at two
times the frequency of the sensor head
8
N.C.
No Connection: Do Not Connect to this pin
7.1 Temperature Sensor
The temperature sensor uses the LM20B device,
internally connected as shown in Figure 8.7.
The output at 0°C is typically +1.864V with respect
to GND. The temperature coefficient is typically
-11.77 mV/°C.
4.6V
U10
4
C37
1608
0.1µF
10%
X7R
2
5
V+
Vout
3
R30
0.5%
1608
25ppm
TMP1
470
GND 1
GND 2
NC
1
C38
3216
0.1µF
5%
CH
LM20BIM7/N0PB
C.G.18618
The output can be measured with respect to GND or
can be put through a differential input instrumentation
amplifier, referenced to the Ref pin, in which case
the offset at 0°C is typically -0.536V. At +25°C,
the output is typically -0.830V with respect to Ref.
The temperature sensors are not intended for use
as a thermometer, since they are not calibrated
on the Celsius scale. They are intended only as a
temperature reference for thermal compensation
techniques.
Figure 7.2 Temperature Sensors
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 14
CRS09-00-0100-132 Rev 1
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
7.2 Rate and Ref Outputs
Both the Rate and the Ref outputs are passed through
a simple RC low pass filter before the output pins.
The resistor value is 100 ohms. The capacitor value
is 0.1μF.
www.siliconsensing.com
8 Glossary of Terms
ADC
Analogue to Digital Converter
ARW
Angular Random Walk
BW
Bandwidth
It is recommended that the Rate Output (signal High
or +) is differentially sensed using a precision
instrumentation amplifier, referenced to the Ref output
(signal Low or -).
C
Celsius or Centigrade
DAC
Digital to Analogue Converter
DPH
Degrees Per Hour
The Offset of the instrumentation amplifier should be
derived from the host stage (e.g. derived from the
ADC Ref Voltage) or from the signal ground if the
following stage is an analogue stage.
DPS
Degrees Per Second
DRIE
Deep Reactive Ion Etch
EMC
Electro-Magnetic Compatibility
ESD
Electro-Static Damage
7.3 Frequency Outputs
F
Farads
This is CMOS Digital (74HC series) compatible digital
output at two times the frequency of the sensor head.
It is provided to give an indication of the temperature
of the MEMS sensor head. The nominal frequency is
28 KHz with a typical temperature coefficient of
-0.8 Hz/°C.
h
Hour
HBM
Human Body Model
Hz
Hertz, Cycle Per Second
K
Kilo
MEMS
Micro-Electro Mechanical Systems
The signal is protected with a 1Kohm resistor before
being output from the CRS09. It is recommended
that this signal is buffered with a CMOS Schmitt Gate
such as 74HC12, or TC7S14F. The signal can be used
to accurately measure the temperature of the MEMS
structure.
mV
Mili-Volts
NEC
Not Electrically Connected
NL
Scale Factor Non-Linearity
PD
Primary Drive
PP
Primary Pick-Off
RC
Resistor and Capacitor filter
s
Seconds
SF
Scale Factor
SMT
Surface Mount Technology
SOG
Silicon On Glass
SD
Secondary Drive
SP
Secondary Pick-Off
T.B.A.
To Be Announced
T.B.D.
To Be Described
V
Volts
An example of measuring the MEMS temperature is
to use a precision crystal oscillator (operating at a
very high frequency, for example 20, 40 or 60 MHz)
to measure the frequency of the ring by measuring
the time (oscillator clock cycles) to count to a defined
number of ring cycles.
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS09-00-0100-132 Rev 1
Page 15
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
9 Part Markings
Silicon Sensing
Company Logo
CRS09-01
Part Number
S/N. PPNNYYMMDDXXX
Serial Number
Pin Number
Table
C.G. 18637
www.siliconsensing.com
The bulk silicon etch process and unique patented ring
design enable close tolerance geometrical properties
for precise balance and thermal stability and, unlike
other MEMS gyros, there are no small gaps to create
problems of interference and stiction. These features
contribute significantly to CRS09’s bias and scale factor
stability over temperature, and vibration immunity.
Another advantage of the design is its inherent
immunity to acceleration induced rate error, or
‘g-sensitivity’.
Can Lid
Figure 9.1 Part Marking
Code
Range
Product Type
PP
09
Device Type
NN
01, 02, 11 or 12
Year Number
YY
00 - 99
Month Number
MM
01 - 12
Day Number
DD
01 - 31
Serial Number
XXX
001 - 999
Upper Pole
Magnet
Silicon
Pedestal Glass
Can Base
Support Glass
Lower Pole
C.G. 18620
Table 9.1 Serial Number Code
10 Silicon MEMS Ring Sensor (Gyro)
The silicon MEMS ring is 6mm diameter by 100μm
thick, fabricated by Silicon Sensing Systems using a
DRIE (Deep Reactive Ion Etch) bulk silicon process.
The ring is supported in free-space by sixteen pairs of
‘dog-leg’ shaped symmetrical legs which support the
ring from the supporting structure on the outside of
the ring.
Figure 10.2 MEMS Sensor Head
The ring is essentially divided into 8 sections with
two conductive tracks in each section. These tracks
enter and exit the ring on the supporting legs. The
silicon ring is bonded to a glass pedestal which in
turn is bonded to a glass support base. A magnet,
with upper and lower poles, is used to create a strong
and uniform magnetic field across the silicon ring. The
complete assembly is mounted within a hermetic can
with a high internal vacuum.
The tracks along the top of the ring form two pairs
of drive tracks and two pairs of pick-off tracks. Each
section has two loops to improve drive and pick-off
quality.
C.G. 18619
Figure 10.1 Silicon MEMS Ring
One pair of diametrically opposed tracking sections,
known as the Primary Drive PD section, is used to
excite the cos2 mode of vibration on the ring. This is
achieved by passing current through the tracking, and
because the tracks are within a magnetic field causes
motion on the ring. Another pair of diametrically
opposed tacking sections is known as the Primary
Pick-off PP section is used to measure the amplitude
and phase of the vibration on the ring. The Primary
Pick-off sections are in the sections 90° to those of
the Primary Drive sections. The drive amplitude and
frequency is controlled by a precision closed loop
electronic architecture with the frequency controlled
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 16
CRS09-00-0100-132 Rev 1
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
by a Phase Locked Loop (PLL), operating with a
Voltage Controlled Oscillator (VCO), and amplitude
controlled with an Automatic Gain Control (AGC)
system. The primary loop therefore establishes the
vibration on the ring and the closed loop electronics
is used to track frequency changes and maintain the
optimal amplitude of vibration over temperature and
life. The loop is designed to operate at about 14kHz.
ν
Fc
Resultant
Radial Motion
Fc = Coriolis Force
ν
ν
ν
Applied Rate
Fc
Fc
ν
Zero Radial
Motion
at these
points
Cos2θ
Vibration
Mode at
14kHz
ν
ν
ν
C.G 18400
Figure 10.4 Secondary Vibration Mode
C.G 18623
Figure 10.3 Primary Vibration Mode
The closed loop architecture on both the primary
and secondary loops result is excellent bias, scale
factor and non-linearity control over a wide range
of operating environments and life. The dual loop
design, introduced into this new Sensor Head design,
coupled with improved geometric symmetry results in
excellent performance over temperature and life. The
discrete electronics employed in CRS09, ensures that
performance is not compromised.
Having established the cos2 mode of vibration on the
ring, the ring becomes a Coriolis Vibrating Structure
Gyroscope. When the gyroscope is rotated about
its sense axis the Coriolis force acts tangentially on
the ring, causing motions at 45° displaced from the
primary mode of vibration. The amount of motion at
this point is directly proportional to the rate of turn
applied to the gyroscope. One pair of diametrically
opposed tracking sections, known as the Secondary
Pick-off SP section, is used to sense the level of this
vibration. This is used in a secondary rate nulling loop
to apply a signal to another pair of secondary sections,
known as the Secondary Drive SD. The current
applied to the Secondary Drive to null the secondary
mode of vibration is a very accurate measure of the
applied angular rate. All of these signals occur at the
resonant frequency of the ring. The Secondary Drive
signal is demodulated to baseband to give a voltage
output directly proportional to the applied rate in free
space.
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS09-00-0100-132 Rev 1
Page 17
CRS09 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
www.siliconsensing.com
Notes
Silicon Sensing Systems Limited
Clittaford Road Southway
Plymouth Devon
PL6 6DE United Kingdom
Silicon Sensing Systems Japan Limited
1-10 Fuso-Cho
Amagasaki
Hyogo 6600891 Japan
T:
F:
E:
W:
T:
F:
E:
W:
+44 (0)1752 723330
+44 (0)1752 723331
s[email protected]
siliconsensing.com
+81 (0)6 6489 5868
+81 (0)6 6489 5919
[email protected]
siliconsensing.com
Specification subject to change without notice.
© Copyright 2013
Silicon Sensing Systems Limited
All rights reserved.
Printed in England 02/2013
Date 01/02/2013
CRS09-00-0100-132 Rev 1
DCR No. 710003905
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 18
CRS09-00-0100-132 Rev 1
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