Agilent Technologies | B1500A | User`s guide | Agilent Technologies B1500A User`s guide

Keysight Technologies B1500A
Semiconductor Device Analyzer
User’s Guide
Notices
© Keysight Technologies 2005-2014
Warranty
No part of this manual may be reproduced in
any form or by any means (including electronic storage and retrieval or translation into
a foreign language) without prior agreement
and written consent from Keysight Technologies as governed by United States and international copyright laws.
The material contained in this document is provided “as is,” and is subject
to being changed, without notice, in
future ed itions. Further, to the maximum extent permitted by applicable
law, Keysight d isclaims all warranties,
either express or implied, with regard
to this manual and any information contained herein, includ ing but not limited
to the implied warranties of merchantability and fitness for a particular purpose. Keysight shall not be liable for
errors or for incidental or consequential
damages in connection with the furnishing, use, or performance of this
document or of any information contained herein. Should Keysight and the
user have a separate written agreement
with warranty terms covering the material in this document that conflict with
these terms, the warranty terms in the
separate agreement shall control.
Manual Part Number
B1500-90000
Ed ition
Edition 1, July 2005
Edition 2, December 2005
Edition 3, April 2006
Edition 4, January 2007
Edition 5, June 2007
Edition 6, November 2007
Edition 7, October 2008
Edition 8, February 2009
Edition 9, June 2009
Edition 10, June 2010
Edition 11, June 2011
Edition 12, June 2013
Edition 13, October 2013
Edition 14, August 2014
Keysight Technologies
1400 Fountaingrove Parkway 
Santa Rosa, CA 95403
Technology Licenses
The hardware and/or software described in
this document are furnished under a license
and may be used or copied only in accordance with the terms of such license.
Restricted Rights Legend
If software is for use in the performance of a
U.S. Government prime contract or subcontract, Software is delivered and licensed as
“Commercial computer software” as defined
in DFAR 252.227-7014 (June 1995), or as a
“commercial item” as defined in FAR 2.101(a)
or as “Restricted computer software” as
defined in FAR 52.227-19 (June 1987) or any
equivalent agency regulation or contract
clause. Use, duplication or disclosure of
Software is subject to Keysight Technologies’
standard commercial license terms, and
non-DOD Departments and Agencies of the
U.S. Government will receive no greater than
Restricted Rights as defined in FAR
52.227-19(c)(1-2) (June 1987). U.S. Government users will receive no greater than Limited Rights as defined in FAR 52.227-14
(June 1987) or DFAR 252.227-7015 (b)(2)
(November 1995), as applicable in any technical data.
Declaration of Conformity
To get the latest version of the declaration of
conformity, go to http://regulations.products.keysight.com/DoC/search.htm and type
in the product number in the Search field.
Latest Information
To get the latest firmware/software/electronic manuals/support information, go to
www.keysight.com and type in the product
number in the Search field at the top of the
page.
COMPLIANCE WITH GERMAN NOISE REQUIREMENTS
This is to declare that this product is in conformance with the German Regulation on
Noise Declaration for Machines
(Lärmangabe nach der Maschinenlärminformation-Verordnung -3.GSGV Deutschland).
•
Herstellerbescheinigung
GERÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T. 19
•
Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779
South Korean Class A EMC declaration
This equipment is Class A suitable for professional use and is for use in electromagnetic
environments outside of the home.
Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these precautions
or with specific warnings elsewhere in this manual may impair the protections provided
by the instrument. In addition, it violates safety standards of design, manufacture, and
intended use of the instrument. Keysight Technologies assumes no liability for
customer’s failure to comply with these requirements.
Product manuals may be provided on CD-ROM or in printed form. Printed manuals are an
option for many products. Manuals may also be available on the Web. Go to
www.keysight.com and type the product model number in the Search field at the top of
the page.
NOTE
Do not use this instrument in any manner not specified by the manufacturer. The
protective features of this instrument may be impaired if it is used in a manner not
specified in the operation instructions.
This instrument is an INDOOR USE product.
This instrument complies with INSTALLATION CATEGORY II for mains input and
INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2
defined in IEC 61010-1.
If an instrument is marked CAT I (IEC Measurement Category I), or it is not marked with a
measurement category, its measurement terminals must not be connected to
line-voltage mains.
•
DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, shall be complied. Procedures throughout in this
manual prevent you from potentially hazard. Their instructions contained in the
warnings must be followed.
WARNING
Hazardous vol tage, instrument maximum output vol tage may appear at the
measurement terminals (Force, Guard, and Sense) if Interlock terminal is closed. Open
the Interlock terminal when the measurement terminals are accessible. Vol tage
applied to the terminals will be limited up to ±42 V.
Do not work the interlock function intentionally in order to bring the output vol tage to
the safe level. While the high vol tage ind icator is lit, the dangerous vol tage by the
output vol tage or the resid ual charge appears on the measurement terminal.
•
BEFORE APPLYING POWER
Verify that all safety precautions are taken. Make all connections to the instrument
before applying power. Note the instrument's external markings described under
“Safety Symbols”.
•
GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument chassis
and cabinet must be connected to an electrical ground. The power terminal and the
power cable must meet International Electrotechnical Commission (IEC) safety
standards.
•
DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a definite
safety hazard.
•
DO NOT REMOVE COVERS
No operator serviceable parts inside. Refer servicing to qualified personnel. To
prevent electrical shock do not remove covers.
•
IN CASE OF DAMAGE
Instruments that appear damaged or defective should be made inoperative and
secured against unintended operation until they can be repaired by qualified service
personnel. Return the instrument to a Keysight Technologies sales or service office
for services and repair to ensure that safety features are maintained.
•
USE ONLY THE SPECIFIC ACCESSORIES
Specific accessories satisfy the requirements for specific characteristics for using the
instrument. Use the specific accessories, cables, adapters, and so on for safety
reasons.
Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are listed
below.
Direct current.
`
Alternating current.
Earth (ground) terminal.
Protective conductor terminal. For protection against electrical shock in case of a fault.
Used with field wiring terminals to indicate the terminal which must be connected to
ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment which
normally includes all exposed metal structures.
>
^
Grounded terminal which indicates the earth potential.
On supply.
Off supply.
Standby supply. The equipment will be marked with this symbol is not completely
disconnected from AC mains when power switch is in the standby position.
In position of a bi-stable push switch.
Out position of a bi-stable push switch.
Hazardous voltage and potential for electrical shock. Do not touch terminals that have
this symbol when the equipment is on.
Hot surface. Avoid contact. Surfaces are hot and may cause personal injury if touched.
Instruction manual symbol. The equipment will be marked with this symbol when it is
necessary for the user to refer to the instruction manual.
WARNING
The warning sign denotes a hazard. It calls attention to a procedure, practice, cond ition
or the like, which, if not correctly performed or adhered to, could resul t in injury or
death to personal.
CAUTION
The caution sign denotes a hazard. It calls attention to an operating procedure, practice,
condition or the like, which, if not correctly performed or adhered to, could result in
damage to or destruction of part or all of the equipment.
CAT I
IEC Measurement Category I
The CE mark shows that the product complies with all applicable European Directives.
The CSA mark is a registered trademark of the Canadian Standards Association.
The RCM mark is a registered trademark of the Australian Communications Authority. This
signifies compliance with the Australian EMC Framework Regulations under the terms of
the Radio communications Act.
This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme à la norme NMB-001 du Canada.
This is the symbol for an Industrial, Scientific and Medical, Group 1 Class A product.
(CISPR 11)
Korea’s safety and EMC mark
China RoHS - Environmentally Green Product Label
China RoHS - Product with Toxic Substance 40 yr EPUP
The Chinese mark for paper-based packaging materials; Paperboard and Corrugated
Fiberboard
Plastic Material Coding Identification
Power Supply and Measurement Safety
•
Power Supply Safety
This instrument can output high currents and voltages. Make sure that the load or
device under test can safely handle the output current and voltage. Also, make sure
that the connection leads can safely withstand the expected currents and are
insulated for the expected voltages.
The instrument outputs may be connected so as to float relative to earth ground.
Isolation or floating voltage ratings are indicated on the instrument, near the output
terminal or the Circuit Common terminal. There is the danger of electric shock by
touching the floated measurement terminals. Keep in mind it to protect yourself. And
it is a reason of using the recommended accessories.
•
Voltage/Current Measurement Safety
Multimeters and other instruments capable of measuring high voltages and currents
are subject to specific safety concerns because of the circuits to which they may be
connected. To safely use these instruments, you need to understand the markings on
the instrument near the input terminals, which include the Protection Limits and the
IEC Measurement Category.
•
Protection Limits
Keysight multimeters and other voltage measurement instruments provide protection
circuitry to prevent damage to the instrument and to protect against the danger of
electric shock, provided the Protection Limits are not exceeded. To ensure safe
operation of the instrument, do not exceed the Protection Limits shown on the input
terminals.
•
Source/Monitor Terminals
Source/monitor unit, SMU, can simultaneously perform DC voltage or current output
and measurement. Typical SMU has the Force, Guard, Sense, and Circuit Common
terminals as shown below. Normally the Force, Guard, and Sense terminals are the
same potential. Voltage marked around the terminals indicates the Protection Limits.
Force and Sense must be connected to a terminal of a device under test for the Kelvin
connection which is effective for high current measurement and low resistance
measurement. For the non-Kelvin connection to ease the connections, connect Force
only. Do not connect Sense. It must be opened.
Guard should be extended to around the device terminal for reducing leakage current
caused by a coaxial cable used. Guard must be never connected to anything at the
device side.
Circuit Common should be connected to shielding of the coaxial cable used.
The following image is the Kelvin triaxial connector of High Power SMU.
Guard Force Circuit Common Sense Guard
High Voltage Shock Hazard
Keysight B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V
for MPSMU/HRSMU) at the Force, Guard, and Sense terminals. To prevent electric
shock hazard, the following safety precautions must be observed during the use of
Keysight B1500A.
•
Use a three-conductor AC power cable to appliance coupler (inlet) and the
instrument to an electric ground (safety ground).
•
Prepare shielding box which covers interface to a device under test and equipped
with interlock circuit that opens when the door is opened.
•
Before performing measurement, connect the interlock circuit to the Interlock
terminal of this instrument.
•
Confirm periodically that the interlock function works normally.
•
Before touching the connections of the Force, Guard, and Sense terminals, turn
the instrument off and discharge any capacitors of the measurement path. If you
do not turn the instrument off, complete “all” of the following items, regardless
of any instrument’s settings.
•
•
Terminate measurement by pressing the Stop key, confirm that the
Measurement status indicator is not lit.
•
Confirm that the High Voltage indicator is not lit.
•
Open the shielding box access door (open the Interlock terminal).
•
Discharge any capacitors if the capacitance is connected to an SMU.
Warn workers in the vicinity of the instrument about hazardous conditions.
Gefahr durch Hochspannung
Von den Geräten Keysight B1500A können Spannungen an den Anschlüssen
“Force”, “Guard” und “Sense” von bis zu 200 V ausgehen. Um elektrischem Schlag
vorzubeugen, ist bei der Benützung der Geräte Keysight B1500A folgendes zu
beachten.
•
Verwenden Sie ein dreiphasiges AC-Stromkabel für die Gerätsteckvorrichtung
(Eingang) und schließen Sie das Instrument an eine Erdung an
(Sicherheitserdung).
•
Bereiten Sie das Abschirmungsgehäuse vor, dass die Oberfläche eines zu
testenden Geräts abdeckt und mit einem Verriegelungsstromkreis ausgestattet
ist, der bei geöffneter Tür unterbrochen wird.
•
Vor der Messung verbinden Sie den Verriegelungsstromkreis mit dem
Interlock-Anschluss dieses Instruments.
•
Prüfen Sie in regelmäßigen Abständen, dass die Verriegelungsfunktion
ordnungsgemäß funktioniert.
•
Bevor Sie die Verbindungen zu den Anschlüssen “Force”, “Guard” und “Sense”
berühren, schalten Sie das Instrument aus und entladen alle Kondensatoren des
Messwegs. Wenn Sie das Instrument nicht ausschalten, führen Sie, unabhängig
von den Instrumenteinstellungen, alle folgenden Schritte durch.
•
•
Beenden Sie die Messung, indem Sie auf die Taste “Stop” drücken. Stellen
Sie sicher, dass die Statusanzeige “Measurement” nicht leuchtet.
•
Stellen Sie sicher, dass die Anzeige “High Voltage” nicht leuchtet.
•
Öffnen Sie die Tür des Abschirmungsgehäuses (öffnen des
Interlock-Anschlusses).
•
Entladen Sie alle Kondensatoren, wenn die Kapazität mit einer SMU
verbunden ist.
Warnen Sie Mitarbeiter in der Umgebung des Instruments vor den Gefahren.
Danger de choc dû à une haute tension
Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/
HRSMU; 100 Vdc) émanant du dispositif Keysight B1500A peut être sortie aux
bornes Force, Guard et Sense. Les précautions suivantes doivent être obserées contre commotion électrique accidentelle.
•
Utilisez un câble d’alimentation CA à trois conducteurs vers le coupleur secteur
(entrée) et branchez l’instrument sur une mise électrique à la terre (prise de terre
de sécurité).
•
Préparez le boîtier de protection qui couvre l’interface avec le dispositif à tester
et équipez-le d’un circuit de sécurité qui s’ouvre lors de l’ouverture d’une porte.
•
Avant de procéder aux mesures, connectez le circuit de sécurité à la borne
Interlock de l’instrument.
•
Vérifiez régulièrement le bon fonctionnement de la fonction de sécurité.
•
Avant de toucher les connexions des bornes Force, Guard et Sense, mettez
l’instrument hors tension et déchargez tout condensateur du chemin de mesure.
Si vous ne mettez pas l’instrument hors tension, effectuez « toutes » les
opérations ci-dessous, quels que soient les paramètres de l’instrument.
•
•
Terminez les mesures en appuyant sur la touche Stop ; vérifiez que
l’indicateur d’état Measurement est éteint.
•
Vérifiez que le témoin High Voltage est éteint.
•
Ouvrez la trappe d’accès au boîtier de protection (ouvrez la borne Interlock).
•
Déchargez les éventuels condensateurs si la capacité est connectée à une
unité SMU.
Informez les personnes travaillant à proximité de l’instrument des conditions.
高電圧感電注意
Keysight B1500A の Force、Guard、Sense 端子には、危険電圧が出力されることがあ
ります(HPSMU の場合は最大 ±200 Vdc、MPSMU/HRSMU の場合は最大 ±100
Vdc)
。感電事故防止のため、必ず以下の事柄を守ってください。
•
3 極電源ケーブルを使用して本器を接地してください。
•
ドアを開くことによって開放されるインターロック回路を装備し、被測定デバ
イスとのインタフェースを覆うことのできるシールド・ボックスを用意してく
ださい。
•
測定を開始する前にはインターロック回路を本器の Interlock 端子に接続してく
ださい。
•
インターロック機能が正常であることを定期的に確認してください。
•
Force、Guard、Sense 端子に繋がる接続部に触れる前には、本器の電源を切断し
てください。また、測定系のキャパシタを放電してください。電源を切らない
場合は、以下の事項を全て実施してください。
•
•
Stop キーを押して Measurement インジケータが消灯したことを確認してくだ
さい。
•
高電圧警告(High Voltage)インジケータが消灯していることを確認してく
ださい。
•
シールド・ボックスのドアを開けてください(Interlock 端子を開放してくだ
さい)
。
•
キャパシタが SMU に接続されているならば、キャパシタを放電してくださ
い。
周囲のほかの作業者に対しても、高電圧危険に対する注意を徹底してください。
Product Stewardship
•
Waste Electrical and Electronic Equipment (WEEE) Directive 2002/96/EC
This product complies with the WEEE Directive (2002/96/EC) marking requirements.
The affixed label indicates that you must not discard this electrical/ electronic
product in domestic household waste.
Product Category: With reference to the equipment types in the WEEE directive
Annex 1, this product is classified as a “Monitoring and Control instrumentation”
product.
Do not dispose in domestic household waste.
To return unwanted products, contact your local Keysight office or visit the following
website for more information.
www.keysight.com/environment/product/
•
LCD Fluorescent Lamp
Certain products sold by Keysight contain a liquid crystal display (LCD); backlighting
for the LCD is provided by a fluorescent lamp which contains mercury, and must be
managed, recycled, and/or disposed in accordance with all applicable laws,
ordinances and regulations.
For information on how to recycle or dispose of the fluorescent lamp contained in
your own product, visit the following website.
http://www.keysight.com/environment/mercury.shtml
If you live in the U.S., also visit the following websites.
http://www.lamprecycle.org
http://www.eiae.org
If you have additional questions, please visit the following website.
http://www.keysight.com/go/contactus
•
Perchlorate Information
Perchlorate Material - special handling may apply. Visit the following website.
http://www.dtsc.ca.gov/hazardouswaste/perchlorate/
Equipment's real-time clock battery or coin cell battery may contain perchlorate and
may require special handling when recycled or disposed of in California.
Precautionary Statement
Keysight B1500A Semiconductor Device Analyzer operates in the Microsoft Windows
environment. Keysight B1500A requires Keysight EasyEXPERT software, a
specially-designed Windows application program.
•
About guarantee and support for Keysight B1500A
Keysight Technologies guarantees and supports the performance of Keysight B1500A
for the same condition as the preload condition when shipped from the factory.
•
About updating Keysight EasyEXPERT and the Windows Update
Keysight Technologies confirms the operation of Keysight EasyEXPERT patch
programs and important Windows security patches, and provides recommended
update information. Visit Keysight B1500A support site, download the patches, and
perform the software update.
•
About Windows application programs and peripherals (including driver)
Using commercial products on Keysight B1500A is your responsibility. Keysight
Technologies cannot provide compatibility information for commercial products. If
problems arise, perform Keysight B1500A system recovery.
•
About servicing
Bench repair service is available at your nearest Keysight Technologies service
center. Be aware that the B1500A configuration might be updated to the latest one
without notice because of support issues.
The internal hard disk drive (HDD) might be initialized during servicing. If peripherals
are connected, they will be removed.
When Keysight B1500A is returned, the internal HDD might be initialized. Peripherals
will be returned separately.
•
Other notes
•
Back up the internal HDD to prevent loss of data by accident or failure.
•
Protect Keysight B1500A from computer viruses.
•
If you connect Keysight B1500A to the network, take care to protect it from
computer virus.
Working in Comfort
To optimize your comfort and productivity, it is important that you set up your work area
correctly and use your instrument properly. With that in mind, we have developed some
set-up and use recommendations for you to follow based on established ergonomic
principles. Improper and prolonged use of keyboards and input devices are among those
tasks that have been associated with repetitive strain injury (RSI) to soft tissues in the
hands and arms. If you experience discomfort or pain while using the instrument,
discontinue use immediately and consult your physician as soon as possible. For more
information on RSI you may wish to consult the About Repetitive Strain Injury section.
Please study the recommendations described below. Included there are references to
relevant parts of international standards, regulations and guidelines, such as ISO 9241
and the European Community Display Screen Equipment directive. You may also wish to
consult your employer’s human resources department or other relevant departments for
guidance specific to your company.
About Repetitive Strain Injury
Because your comfort and safety are our primary concern, we strongly recommend that
you use the instrument in accordance with established ergonomic principles and
recommendations. Scientific literature suggests that there may be a relationship between
injury to soft tissues -especially in the hands and arms- and prolonged improper use of
keyboards or other equipment requiring repeated motions of the hands and forearms.
This literature also suggests that there are many other risk factors that may increase the
chance of such injury, commonly called Repetitive Strain Injury.
What is RSI?
Repetitive Strain Injury (RSI -also known as cumulative trauma disorder or repetitive
motion injury) is a type of injury where soft tissues in the body, such as muscles, nerves,
or tendons, become irritated or inflamed. RSI has been a reported problem for those who
perform repetitive tasks such as assembly line work, meatpacking, sewing, playing
musical instruments, and computer work. RSI also has been observed in those who
frequently engage in activities such as carpentry, knitting, housework, gardening, tennis,
windsurfing and lifting children.
What causes RSI?
The specific causes of RSI have not been established. Nevertheless, the incidence of RSI
has been associated with a variety of risk factors, including:
•
Too many uninterrupted repetitions of an activity or motion.
•
Performing an activity in an awkward or unnatural posture.
•
Maintaining static posture for prolonged periods.
•
Failing to take frequent short breaks.
•
Other environmental and psychosocial factors.
In addition, there have been reports associating the occurrence of RSI with the use of
keyboards, mice, and other input devices. Also, certain medical conditions, such as
rheumatoid arthritis, obesity and diabetes, may predispose some people to this type of
injury.
What if I experience discomfort?
If you are experiencing any discomfort, seek professional medical advice immediately.
Typically, the earlier a problem is diagnosed and treated, the easier it is to resolve.
Mice and Other Input Devices
Various aspects of using mice and other input devices may increase your risk of
discomfort or injury. Observing the following recommendations may reduce that risk.
•
Try to keep your hand, wrist, and forearm in a neutral position while using your mouse
or other input device.
•
If you use your thumb to rotate the ball on a trackball or spaceball, keep it in a
relaxed, natural shape, and maintain a neutral posture in your hand, wrist, and
forearm.
•
Hold the mouse gently by draping your fingers over it. Keep your hand relaxed and
fingers loose. Do not grip the mouse tightly.
•
It takes very little pressure or force from your fingers to activate the buttons or scroll
wheel on your mouse, scrolling mouse, trackball, or other input device. Using too
much force can place unnecessary stress on the tendons and muscles in your hands,
wrists, and forearms.
•
If you are using a scrolling mouse, be sure to keep your fingers and hand in a relaxed,
neutral position when activating the scroll wheel. Also, this type of mouse features
software that can minimize the number of mouse movements or button clicks.
•
When using a mouse, trackball, or other input device, position it as close to the
keyboard as possible, and keep it at the same level as you do not have to stretch while
using it.
•
Be sure to keep your mouse and trackball clean. Regular removal of accumulated
dust and dirt helps ensure proper tracking and reduces unnecessary hand and wrist
motions.
In This Manual
This manual describes the product overview and installation information of Keysight
Technologies B1500A. This manual consists of the following chapters:
•
Chapter 1, Getting Started
This chapter describes basic operations of Keysight B1500A.
•
Chapter 2, Introduction
This chapter describes basic features of Keysight B1500A.
•
Chapter 3, Installation
This chapter describes installation, device connection, and maintenance.
•
Chapter 4, Specifications
This chapter describes specifications of Keysight B1500A.
•
Chapter 5, Accessories and Options
This chapter describes accessories and options of Keysight B1500A.
Contents
1. Getting Started
To Turn On/Off B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
To Turn B1500A On. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
To Turn B1500A Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
To Launch EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
If Only One Workspace Exists . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
To Create Workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
To Select Workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
To Use Tracer Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
To Use Application Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
To Use Classic Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
To Perform Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
To Use Test Result Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17
To Use Analysis Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18
2. Introduction
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Keysight EasyEXPERT Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Front View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Rear View. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
Measurement Modules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
GNDU - Ground Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
About SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Keysight B1500A User’s Guide, Ed ition 14
Contents
HPSMU - High Power SMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MPSMU - Medium Power SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MCSMU - Medium Current SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
HRSMU - High Resolution SMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MFCMU - Multi Frequency CMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
HVSPGU - High Voltage SPGU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
WGFMU - Waveform Generator/Fast Measurement Unit . . . . . . . . . . . . . . . . . . . . .
2-19
2-22
2-26
2-28
2-32
2-35
2-36
3. Installation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3
Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Storaging/Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5
Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5
Inspection and Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-7
To Inspect B1500 and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-7
To Perform Initial Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8
To Change Windows Logon Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9
To Change GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
To Enable System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Installing Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Connect 16442B Test Fixture (B1500A-A5F). . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Connect Connector Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Connect ASU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Connect SCUU/GSWU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Connect GNDU Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To Connect MCSMU Connection Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
................................................................
3-12
3-13
3-15
3-17
3-21
3-25
3-26
3-26
Keysight B1500A User’s Guide, Ed ition 14
Contents
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
Mounting Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
To Make an Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
To Connect GNDU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34
To Connect SMU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35
To Connect MCSMU Output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-41
To Connect MFCMU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-42
Connecting Measurement Devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-43
Using Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-44
Using Connector Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-46
Capacitance Compensation When Using Switching Matrix . . . . . . . . . . . . . . . . . . . . . . 3-50
Required Conditions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-51
To Create Compensation Data File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-53
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-58
Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-58
Self-test and Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-58
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-58
Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-58
About Plug-in Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-59
Module Type and Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-59
To Interconnect SPGUs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-60
To Interconnect WGFMUs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-61
About Module Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-62
4. Specifications
Hard ware. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
EasyEXPERT Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42
Program and interface capabilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-49
Furnished Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-49
Keysight B1500A User’s Guide, Ed ition 14
Contents
Desktop EasyEXPERT Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-50
General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-51
5. Accessories and Options
Keysight B1500A User’s Guide, Ed ition 14
1
Getting Started
Getting Started
This chapter describes the basic operations of Keysight B1500A. Before learning
the product details, let’s try to use the B1500A briefly. The operations need the
B1500A, power cable, and USB keyboard only (USB mouse and stylus pen are
optional). Keysight B1500A also requires Keysight EasyEXPERT software as its
graphical user interface.
During the operations, you will not connect device under test. Open all
measurement terminal.
This chapter consists of the following sections.
NOTE
•
“To Turn On/Off B1500A”
•
“To Launch EasyEXPERT”
•
“To Use Tracer Test Mode”
•
“To Use Application Test Mode”
•
“To Use Classic Test Mode”
•
“To Perform Measurement”
•
“To Use Analysis Tools”
If you use the B1500A at the first time
If this is the first time to turn Keysight B1500 on after the delivery, you need to
perform the initial setup of the B1500. See “Inspection and Installation” on page
3-7. After the initial setup and if no users are added, you can automatically logon as
“Keysight B1500 User” account without password.
1- 2
Keysight B1500A User’s Guide, Ed ition 14
Getting Started
To Turn On/Off B1500A
To Turn On/Off B1500A
NOTE
When turning the B1500A on
Open the measurement terminals at the device side when turning the B1500A on.
Also disconnect the device from the measurement terminals and open the
measurement terminals after the test. If you leave the connection with the device,
the device may be damaged by unexpected operations or charge-up of measurement
cables.
NOTE
If Start EasyEXPERT button is not displayed
Select All Programs > Start EasyEXPERT from the Start menu. The
Start EasyEXPERT button will be displayed.
NOTE
Automatic start function
If the automatic start function is on, EasyEXPERT is launched within the B1500A
boot up process. If the function is off, EasyEXPERT is not launched and the Start
EasyEXPERT button is displayed.
To turn the automatic start function off, use the Start EasyEXPERT window
displayed by the File > Exit menu on the EasyEXPERT main screen. And remove
the check from the Option > Auto Start of EasyEXPERT menu.
NOTE
If EasyEXPERT does not run
Launch “Keysight Connection Expert” by using the icon on Windows taskbar. And
check the USB0 connection status displayed in “Instrument I/O on this PC” area.
USB0 connection status display example:
USB0
+ B1500A(USB0::2391::1::0001::0::INSTR)
+ agb1500a
+ UsbDevice1
If “agb1500A” and “UsbDevice1” are not listed, add them by using “Add VISA
Alias” in the right-button-menu on “B1500A (USB0:: . . ::INSTR)”. If the problem
still remains, perform Keysight B1500 system recovery. To perform recovery, see
Keysight EasyEXPERT User’s Guide.
Keysight B1500A User’s Guide, Ed ition 14
1- 3
Getting Started
To Turn On/Off B1500A
To Turn B1500A On
1. Connect the power cable from Keysight B1500A to an AC power outlet.
2. Connect the USB keyboard to the B1500A. Optionally, connect the USB mouse
to the B1500A.
3. Press the Standby switch (lower right corner of the front panel). Windows,
measurement module initialization, and self-calibration will start. For the
Windows logon screen, log on Windows.
After logging on, the Start EasyEXPERT button will be displayed on the screen,
or EasyEXPERT will be launched if the automatic start function is on.
To Turn B1500A Off
Press the Standby switch (lower right corner of the front panel). Windows will be
shutdown and the B1500A will become the standby state.
1- 4
Keysight B1500A User’s Guide, Ed ition 14
Getting Started
To Turn On/Off B1500A
NOTE
Keysight B1500A has the following front panel user interface.
•
Stop
Stops the present measurement or source output immediately.
•
Rotary knob
Rotating the knob moves the marker on the graph window, or
increases/decreases/changes the value in the active entry field.
Pressing the knob sets or enters the value.
•
Softkeys
Seven softkeys are available. Used to select one for the entry field specified or
the dialog box. They are also used to recall the test definitions (pre-defined test
setups).
•
Touch Panel Off
Enables or disables the touch screen operation.
•
Standby switch
Turns the B1500A on. Pressing the button in the ON state makes the B1500A in
the standby state.
•
LCD Off
Enables or disables the LCD panel. LED lights when the LCD is disabled.
•
+, -, Set, Cancel
Four keys are available for adjusting brightness. Use + and - to adjust it and
then press Set to fix it. Pressing Cancel instead of Set cancels the adjustment.
Keysight B1500A also requires Keysight EasyEXPERT software as its graphical
user interface. You can operate Keysight EasyEXPERT by using the touch panel.
Use your fingers, stylus pen, and so on for the touch panel operation. The USB
keyboard and the USB mouse are also available for operating the EasyEXPERT.
To remove USB devices from the B1500A, use “Safely Remove Hardware” on
Windows taskbar. If it is not used, the B1500A may cause the internal USB
communication error. If the error occurs, turn the B1500A off and disconnect the
power cable from the B1500A. Leave it about 30 seconds before rebooting the
B1500A, and connect the power cable again, and then turn the B1500A on.
Keysight B1500A User’s Guide, Ed ition 14
1- 5
Getting Started
To Launch EasyEXPERT
To Launch EasyEXPERT
1. If the automatic start function is off, the Start EasyEXPERT button is displayed.
Click the button and wait until the EasyEXPERT main screen or workspace
selection screen is displayed.
NOTE
Workspace is the space created in Keysight B1500A’s internal hard disk drive, and is
used to store the test setup, test result data, and so on. The workspace can be created
and allocated for each user.
2. If this is the first time to start the EasyEXPERT, or if no workspace exists, a
workspace will be created automatically.
Skip to “To Use Tracer Test Mode” on page 1-10, “To Use Application Test
Mode” on page 1-12, or “To Use Classic Test Mode” on page 1-14.
3. If only one workspace exists, the B1500A displays the screen as shown in Figure
1-1.
Skip to “If Only One Workspace Exists” on page 1-7.
4. If two or more workspaces exist, the B1500A displays the screen as shown in
Figure 1-3.
Skip to “To Select Workspace” on page 1-9.
1- 6
Keysight B1500A User’s Guide, Ed ition 14
Getting Started
To Launch EasyEXPERT
If Only One Workspace Exists
For the screen as shown in Figure 1-1, perform the following steps.
•
If you do not want to create a workspace, select the Yes radio button and click
OK. Skip to “To Use Tracer Test Mode” on page 1-10, “To Use Application Test
Mode” on page 1-12, or “To Use Classic Test Mode” on page 1-14.
•
If you want to create a workspace, select the No, I want to start a new session.
radio button and click Next. The B1500A displays the screen as shown in Figure
1-2. Skip to “To Create Workspace” on page 1-8.
•
If you want to manage workspaces, select the No, I want to manage Workspaces.
radio button and click Next. The B1500A displays the screen as shown in Figure
1-3. Skip to “To Select Workspace” on page 1-9.
Figure 1-1
If Only One Workspace Exists
NOTE
Work on the same setups and data in the next time
If this check box is checked, the workspace selection screen will be skipped at the
next startup and EasyEXPERT will be launched with the workspace used at the last
operation. To perform this setup again, click the File > Close Workspace menu on
the EasyEXPERT main screen.
Keysight B1500A User’s Guide, Ed ition 14
1- 7
Getting Started
To Launch EasyEXPERT
To Create Workspace
For the screen as shown in Figure 1-2, perform the following steps. To cancel
creating workspace, click Prev.
1. Enter the name of the new workspace into the above-entry field.
Check Allow other users to access this workspace box if you want to create a
public workspace that is opened for all users.
2. If you are the owner of the existing workspace, you can change the name of the
existing workspace.
If you want to rename the existing workspace, enter the name into the
below-entry field.
Check Allow other users to access this workspace box if you want to set it to a
public workspace that is opened for all users.
3. Click OK.
Skip to “To Use Tracer Test Mode” on page 1-10, “To Use Application Test Mode”
on page 1-12, or “To Use Classic Test Mode” on page 1-14.
Figure 1-2
To Create Workspace
1- 8
Keysight B1500A User’s Guide, Ed ition 14
Getting Started
To Launch EasyEXPERT
To Select Workspace
For the screen as shown in Figure 1-3, perform the following steps. This example
selects the workspace named as test that is a private workspace.
1. Select Your Workspaces radio button.
2. Select test and click Continue.
Skip to “To Use Tracer Test Mode” on page 1-10, “To Use Application Test Mode”
on page 1-12, or “To Use Classic Test Mode” on page 1-14.
If you want to manage workspaces, click the Manage Workspaces button. See
Keysight EasyEXPERT User’s Guide.
Figure 1-3
To Select Workspace
NOTE
Choose the same Workspace in the next time
If this check box is checked, the workspace selection screen will be skipped at the
next startup and EasyEXPERT will be launched with the workspace used at the last
operation. To perform this setup again, click the File > Close Workspace menu on
the EasyEXPERT main screen.
Keysight B1500A User’s Guide, Ed ition 14
1- 9
Getting Started
To Use Tracer Test Mode
To Use Tracer Test Mode
The following procedure performs the tracer test setup.
1. Click the Tracer Test tab on the main screen. The tab is in the leftmost column
on the screen. The I/V Trace screen is displayed. See Figure 1-4.
2. Set the channels at the field below the graph as shown in Table 1-1.
3. Set the measurement condition at the right field of the graph as shown in Table
1-3.
4. Set the graph display condition at the field below the graph as shown in Table
1-2.
To enter the value, use the USB keyboard or the screen/numeric keyboard opened by
clicking the right button of the entry field.
To start measurement, click
for the repeat measurement.
for the single measurement or
If the Stop field is highlighted, the range of measurement and graph display can be
changed by using the rotary knob during the repeat measurement.
Table 1-1
I/V Trace Channel Setup
Unit
V Name
Mode a
I Name
Function
SMU1
V1
I1
V
VAR1
SMU2
V2
I2
V
CONST
a. Channel output mode. Set I or IPULSE for the current output and voltage measurement. Set V or VPULSE for the voltage output and current
measurement.
Table 1-2
I/V Trace Graph Setup
Name
Y
1- 10
I1
Scale
LIN
Name

X
V1
Scale
LIN

Keysight B1500A User’s Guide, Ed ition 14
Getting Started
To Use Tracer Test Mode
Table 1-3
I/V Trace Measurement Setup
VAR1
Figure 1-4
CONST
Mode
LIN-SGL
Unit
SMU2
Start
0 V
Source
0 V
Stop
1 V
Compliance
5 mA
Step
10 mV
NOS
101
Interlacing
1
Compliance
5 mA
Pwr Comp.
OFF
Meas. Time
2 us
Dual Polarity
ON
Step Time
500 us
Display Example of I/V Trace Screen
Keysight B1500A User’s Guide, Ed ition 14
1- 11
Getting Started
To Use Application Test Mode
To Use Application Test Mode
For the screen as shown in Figure 1-5, perform the following procedure.
Figure 1-5
Display Example of EasyEXPERT Main Screen
1. Click the Application Test tab on the main screen. The tab is in the leftmost
column on the screen.
2. Set the Category field. For example, check the CMOS only. The Library field
lists the test definitions.
3. Select a test definition at the Library field. For example, click the Id-Vg and
Select button sequentially. The screen changes the display as shown in Figure
1-6.
4. Change the measurement conditions at the Test Parameters field.
The following example changes the voltage sweep output.
a. Set VgStart to 0 V and VgStep to 0.2 V.
b. Set VsubsStep to -1.0 V.
1- 12
Keysight B1500A User’s Guide, Ed ition 14
Getting Started
To Use Application Test Mode
To enter the value, use the USB keyboard or the screen/numeric keyboard opened by
clicking the right button of the entry field.
See “To Perform Measurement” on page 1-16 to start measurement.
NOTE
Test Definitions
Test definitions are the built-in test setups that have been defined and stored in the
EasyEXPERT as the application library. The EasyEXPERT contains more than two
hundred test definitions. You can execute the test without modifications. Also you
can create your own test setup/definition by making any changes. All furnished test
definitions are just sample. Keysight Technologies is NOT LIABLE for any
damages caused by the samples.
Figure 1-6
Display Example of Application Test Setup Screen
Keysight B1500A User’s Guide, Ed ition 14
1- 13
Getting Started
To Use Classic Test Mode
To Use Classic Test Mode
The following procedure performs the I/V Sweep classic test setup.
1. Click the Classic Test tab on the main screen. The tab is in the leftmost column
on the screen.
2. Click I/V Sweep and Select button sequentially. The I/V Sweep Channel Setup
screen is displayed. See Figure 1-7.
3. Set the Channel Setup parameters as shown in Table 1-4.
4. Click the Measurement Setup tab and set the parameters as shown in Table 1-5.
5. Click the Display Setup tab and set the parameters as shown in Table 1-6.
To enter the value, use the USB keyboard or the screen/numeric keyboard opened by
clicking the right button of the entry field.
Figure 1-7
Display Example of I/V Sweep Channel Setup Screen
1- 14
Keysight B1500A User’s Guide, Ed ition 14
Getting Started
To Use Classic Test Mode
See “To Perform Measurement” on page 1-16 to start measurement.
Table 1-4
I/V Sweep Channel Setup
Unit
V Name
Mode a
I Name
Function
SMU1
V1
I1
V
VAR1
SMU2
V2
I2
V
CONST
a. Channel output mode. Set I or IPULSE for the current output and voltage measurement. Set V, VPULSE, or COMMON for the voltage output
and current measurement.
Table 1-5
I/V Sweep Measurement Setup
VAR1
Table 1-6
Timing
Constants
Unit
SMU1
Hold
0 s
Unit
SMU2
Name
V1
Delay
0 s
V Name
V2
Direction
Single
I Name
I2
Linear/Log
LINEAR
Mode
V
Start
0 V
Source
0 V
Stop
1 V
Compliance
100 mA
Step
10 mV
No of Step
101
Compliance
100 mA
Pwr Comp
OFF
Sweep
CONTINUE AT ANY
status
I/V Sweep Display Setup
Name
Sharing
Scale
Min
Max
X
V1
(None)
Linear
0 V
1 V
Y1
I1
(None)
Linear
-1 pA
1 pA
Keysight B1500A User’s Guide, Ed ition 14
1- 15
Getting Started
To Perform Measurement
To Perform Measurement
1. Click the Single button (upper right on the main screen) to start measurement.
This opens the Data Display window and starts a single sweep measurement.
After the measurement, the measurement data is displayed on the Data Display
window. For the measurement after performing “To Use Classic Test Mode” on
page 1-14, you will have the test result as shown in Figure 1-8. This is the
leakage current measurement result because all measurement terminal is opened
for performing the procedures described in this chapter.
2. If the automatic data record function has been set to ON (Auto Record ON), Test
Result Editor appears on the lower area of the screen when the measurement is
completed. See “To Use Test Result Editor” on page 1-17.
Figure 1-8
Display Example of Data Display Window
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Keysight B1500A User’s Guide, Ed ition 14
Getting Started
To Perform Measurement
To Use Test Result Editor
The Test Result Editor provides the following GUI to set a flag and remarks to the
test result record.
•
Save button and Delete button
Divides test records into groups, Save and Delete.
Test records in Save-group are always listed in the lower area of the
EasyEXPERT main screen.
Test records in Delete-group can be listed when Results > Filter >
Show Deleted Data is checked.
•
Flags buttons
The following buttons are available. You can set one of the following flags.
•
Important ! button
Sets the important flag (!) to the test result record.
•
Valid # button
Sets the valid flag (#) to the test result record.
•
Questionable ? button
Sets the questionable flag (?) to the test result record.
•
Remarks field
You can enter characters into this field. The characters will be recorded as the
Remarks value of the test result record.
•
OK button
Applies the setup on the Test Result Editor, and closes this dialog box.
Keysight B1500A User’s Guide, Ed ition 14
1- 17
Getting Started
To Use Analysis Tools
To Use Analysis Tools
The Data Display window provides several analysis functions.
•
View menu: used to adjust the graph scale.
•
Marker menu: used to display and control the marker.
•
Cursor menu: used to display and control the cursor.
•
Line menu: used to display and control the lines.
When the marker, cursor, and lines are effective, their parameters are also displayed
on the X-Y Graph Plot area.
Figure 1-9 is an example displaying marker, tangent line, and regression line on the
test result graph shown in Figure 1-8. You can read position of the marker and the
active cursor, and interrupt and gradient of the active line.
Figure 1-9
Display Example of Analysis Tools
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Keysight B1500A User’s Guide, Ed ition 14
2
Introduction
Introduction
This chapter describes the basic functions and features of Keysight B1500A
Semiconductor Device Analyzer, and consists of the following sections:
NOTE
•
“Overview”
•
“Front View”
•
“Rear View”
•
“Measurement Modules”
Application Library
Keysight B1500A has installed Keysight EasyEXPERT software as the user
interface. The EasyEXPERT contains an application library that is a set of test
definitions. The application test can be performed by selecting a test definition and
setting the test condition for the actual DUT (device under test).
All test definitions are just sample. If the samples damage your devices, Keysight
Technologies is NOT LIABLE for the damage.
NOTE
Furnished Sample Programs (Utility)
The following sample programs are stored in the following folder.
•
<program folder>\Agilent\B1500\EasyEXPERT\Utilities\
Prober control programs
sleep.exe program
•
<program folder>\Agilent\B1500\EasyEXPERT\415xC\Conversion\
4155/4156 setup file converter
•
<program folder>\Agilent\B1500\EasyEXPERT\IC-CAP Support\MDM\
MDM file converter for IC-CAP users
Where, <program folder> is as follows. Then, <system drive> is the drive the
EasyEXPERT has been installed.
For Windows 7 64 bit version, <system drive>:\Program Files (x86)
For Windows 7 32 bit version, Vista, or XP, <system drive>:\Program Files
For more details of programs, see Keysight EasyEXPERT User’s Guide.
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Keysight B1500A User’s Guide, Ed ition 14
Introduction
Overview
Overview
Keysight B1500A Semiconductor Device Analyzer is the new generation one box
solution for the semiconductor device DC/AC parametric measurement and analysis
application. Keysight B1500A provides the DC voltage/current output capability,
DC voltage/current measurement capability, and AC signal output and impedance
measurement capability. So you can perform a current-voltage sweep measurement
and a capacitance-voltage sweep measurement for example by one instrument.
Keysight B1500A also provides an intuitive graphical user interface, touch screen
LCD panel, keyboard, and mouse for easy and effective measurement and analysis
on the Windows environment. You can analyze a measurement result characteristics
graph for example by using several tools such as markers, cursors, and lines.
Also, in the GPIB remote control mode, you can control the B1500A from an
external computer by using Keysight FLEX command set that is the common
language for Keysight semiconductor DC measurement instruments. So you can
reuse the measurement program created for Keysight 4155/4156/E5260/E5270.
Keysight B1500A User’s Guide, Ed ition 14
2- 3
Introduction
Overview
•
Keysight B1500A Semiconductor Device Analyzer
Mainframe that provides the ground unit (GNDU) and ten empty slots for the
measurement facilities, and Keysight EasyEXPERT software for the operating
environment. The EasyEXPERT is the GUI based measurement control and
analysis software runs on the Windows.
This instrument is equipped with the 15 inch LCD with touch panel, hard disk
drive, DVD drive, and USB/LAN/GP-IB interfaces. This instrument is also
furnished the USB keyboard, the USB mouse, and the stylus pen.
•
HRSMU module
High resolution source/monitor unit module. Occupies one slot. Needs Keysight
E5288A ASU to perform atto level current measurement or automatic switching
of the measurement resource connected to the device under test (DUT).
•
HPSMU module
High power source/monitor unit module. Occupies two slots.
•
MPSMU module
Medium power source/monitor unit module. Occupies one slot. Needs Keysight
E5288A ASU to perform atto level current measurement or automatic switching
of the measurement resource connected to the device under test (DUT). ASU is
effective for the B1511B MPSMU. ASU cannot be connected to the B1511A
MPSMU.
•
MCSMU module
Medium current source/monitor unit module. Occupies one slot.
•
MFCMU module
Multi frequency capacitance measurement unit module. Occupies one slot.
Needs Keysight N1301A-100 SCUU to perform automatic switching of the
measurement resource connected to the DUT.
•
SPGU module
High voltage semiconductor pulse generator unit module. Occupies one slot. Up
to five modules can be installed in one mainframe. One module provides two
output channels. Needs Keysight 16440A (B1500A-A04) and 16445A to
perform automatic switching of the measurement resource connected to the
DUT.
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Keysight B1500A User’s Guide, Ed ition 14
Introduction
Overview
•
WGFMU module and RSU
Waveform generator/fast measurement unit module and the remote-sense and
switch unit. Occupies one slot. Up to five modules can be installed in one
mainframe. One module provides two channels. See Keysight B1530A User’s
Guide for using the WGFMU.
•
Keysight 16440A SMU/PGU pulse generator selector (B1500A-A04)
Used to switch the measurement resource connected to the DUT. The
measurement resource can be SPGU or SMU. Needs the 16445A adapter to use
the selector. One selector provides two switching channels.
•
Keysight 16442B test fixture (B1500A-A5F)
Test fixture for semiconductor parameter analyzers and device analyzers.
Provides three Kelvin triaxial connectors (six non-Kelvin triaxial connectors)
for connecting SMU, six BNC connectors for connecting SPGU, MFCMU, or
other instruments, a GNDU connector, and an Intlk connector. Furnished with
the dual-in-line package socket module, universal socket modules (two types),
blank PTFE board, and connection wires for device connection.
•
Keysight 16445A selector adapter
Used to connect the 16440A selector (B1500A-A04) to the B1500A. Two
selectors can be connected.
•
Keysight E5288A ASU
Atto sense and switch unit (ASU). Used to enable the 1 pA range for the atto
level current measurement, also switch the measurement resource connected to
the DUT. The measurement resource can be HRSMU/MPSMU (B1511B) or the
instrument connected to the AUX terminal.
•
Keysight N1255A 2 channel connection box for MCSMU
Connection box to make the MCSMU connection easy. Supports two MCSMU.
•
Keysight N1301A-100 SCUU
SMU CMU unify unit (SCUU). Used to switch the measurement resource
connected to the DUT. The measurement resource can be CMU or one of two
HRSMU/MPSMU connected to the SCUU.
•
Keysight N1301A-200 GSWU
Guard switch unit (GSWU). Needs the SCUU to use the GSWU. Effective for
the accurate impedance measurements by connecting the guard lines between
CMU high and low near the DUT.
Keysight B1500A User’s Guide, Ed ition 14
2- 5
Introduction
Overview
Keysight EasyEXPERT Software
Keysight EasyEXPERT software is a specially-designed Windows application
program for controlling Keysight B1500A. The EasyEXPERT provides the easy and
effective measurement and analysis environment with intuitive graphical user
interface (GUI), touch screen LCD panel, keyboard, and mouse. Some of the
functions are listed below.
•
Single measurement, repeat measurement, and append measurement
•
Switching matrix control
Supported models:
•
Keysight B2200A/B2201A switching matrix
•
Keysight E5250A switching matrix with E5252A
•
Measurement/setup data management by workspace
•
Graph display and analysis with markers, cursors, and lines; and auto analysis
•
Data import/export capability, data output by CSV/XML format, and graph
output by EMF/BMP/GIF/PNG format
•
Maintenance; self-test and self-calibration
•
Remote control function from an external computer
The EasyEXPERT has the following measurement execution environments.
Application Test
•
Application test
•
Classic test
•
Tracer test
•
Quick test
The EasyEXPERT contains an application library that supports typical
measurements for CMOS devices, TFT, BJT, memory, nanotechnology devices such
as CNT FET, and so on. The application library includes more than two hundred test
definitions.
You can perform measurements by choosing the best one for your device under test
(DUT) from the application libraries, and modifying and executing it. Modification
is really simple. For example, it will be completed by changing the output voltage
only to DUT terminals. And the setup with your modifications can be saved and
recalled as your setup (My Favorite Setup).
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Keysight B1500A User’s Guide, Ed ition 14
Introduction
Overview
Classic Test
You can perform measurements by using the user interface similar to the
semiconductor parameter analyzers such as Keysight 4156C. The setup can be made
by entering values into the setup tables used for the measurement module control.
And it can be saved and recalled as your setup (My Favorite Setup). This
measurement environment provides the following functions.
•
I/V Sweep
•
Multi Channel I/V Sweep
•
I/V List Sweep
•
I/V-t Sampling
•
C-V Sweep
•
SPGU Control
•
Switching Matrix Control
•
Direct Control
The Direct Control test mode is used to control the measurement modules directly
by using the B1500A GPIB control commands and perform measurement. For the
control commands, see “Programming Guide”.
Tracer Test
Curve tracer test mode. This test allows you to perform the high speed I-V
measurement on one screen. The Tracer Test screen provides GUI for selecting the
used channels, setting the sweep output, and displaying the measurement result
(tracing the I-V curve). Range of the sweep output and measurement can be changed
by the rotary knob on the front panel.
Tracer test also provides the oscilloscope view to display the pulse current or
voltage output waveform of the MCSMU. You can verify output waveform over the
I-V curve.
Quick Test
You can execute the test setups saved in a preset group (My Favorite Setup)
sequentially.
Keysight B1500A User’s Guide, Ed ition 14
2- 7
Introduction
Front View
Front View
This section describes the front view of Keysight B1500A.
6
7
8
9
5
10
11
12
1
4
3
2
1. Standby switch
Turns the instrument on. Pressing the button in the ON state makes it in the
standby state. The green LED lights when it is in the ON state.
NOTE
When turning the B1500A on
Open the measurement terminals at the device side when turning the B1500A on.
Also disconnect the device from the measurement terminals and open the
measurement terminals after the measurement. If you leave the connection with the
device, the device may be damaged by unexpected operations or charge-up of
measurement cables.
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Keysight B1500A User’s Guide, Ed ition 14
Introduction
Front View
2. HDD access indicator
This green LED lights in the access status of HDD or DVD drive. Do not turn
the instrument off during this LED lights.
3. LCD adjustment keys
LCD Off enables or disables the LCD panel. The green LED lights when the
LCD is disabled.
Four keys are available for adjusting brightness. Use + and - to adjust it and
then press Set to fix it. Pressing Cancel instead of Set cancels the adjustment.
4. USB interfaces
USB, 2 ports. For keyboard, mouse, and so on.
To remove USB devices from the instrument, use “Safely Remove Hardware”
on Windows taskbar. If it is not used, the instrument may cause the internal USB
communication error. If the error occurs, turn the instrument off and disconnect
the power cable from it. Leave it about 30 seconds before rebooting it, and
connect the power cable again, and then turn the instrument on.
5. LCD panel
15 inch TFT XGA display, 1024  768 resolution. Displays the Windows screen,
Keysight EasyEXPERT software window, and so on. Touch screen operation is
available when the Touch Panel Off indicator does not light.
To adjust the touch panel, use Microchip TSHARC Control Panel which is
opened by selecting Microchip TSHARC Control Panel from the Start menu.
6. Stop key
Stops the present measurement or source output immediately.
7. High voltage status indicator
This red LED lights when a source channel applies more than ± 42 V.
8. Measurement status indicator
This green LED lights when a measurement channel performs measurement.
9. Rotary knob
Works on Keysight EasyEXPERT environment. Rotating the knob moves the
marker on the graph window, or increases/decreases/changes the value in the
active entry field. Pressing the knob sets or enters the value.
Keysight B1500A User’s Guide, Ed ition 14
2- 9
Introduction
Front View
10. Softkeys
Seven softkeys are available for Keysight EasyEXPERT environment. Used to
select an alternative for the entry field specified or the dialog box.
11. DVD-R drive
For data backup, software update, and so on. With the option DR1, the drive is
changed to the DVD-ROM drive.
12. Touch Panel Off key
Works on the execution environment of EasyEXPERT software. Enables or
disables the touch screen operation. The green LED lights when the touch screen
is disabled.
6
7
8
9
5
10
11
12
1
4
3
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Keysight B1500A User’s Guide, Ed ition 14
Introduction
Rear View
Rear View
This section describes the rear view of Keysight B1500A.
14a
14
E
D
4
D
D
D
3
5
D
2
D
C
B
A
1
13
12 11
10
9
8 7
6
1. Serial number
You need this serial number when using Keysight Technologies telephone
assistance program.
2. LED status indicator
For troubleshooting. Followings are some examples.
•
Both LEDs turn off:
The instrument is in the standby state and Standby switch is OFF position.
•
One LED turns green:
Power supply works normally.
•
Both LEDs turn orange:
The instrument is in the standby state and Standby switch is ON position.
Keysight B1500A User’s Guide, Ed ition 14
2- 11
Introduction
Rear View
3. LINE input receptacle
AC power cable is connected to this receptacle.
4. GPIB interface
Use a Keysight 82357A USB/GPIB interface or Keysight 10833A/B/C/D GPIB
cable to connect to an external computer or equipment.
5. Module slot
Ten slots are available for installing the modules. Several kinds of module can
be installed in the B1500A. However, the allowable number to install is different
by the module type. See “Measurement Modules” on page 2-17. Also, there is a
rule for the installation order by the module type. See Chapter 3, “Installation.”
6. Circuit Common (
) and Frame ground (
) terminals
Normally, connect the terminals together by using the shorting bar (Keysight
part number 5000-4206). For floating measurement, remove the shorting bar.
WARNING
If the Circuit Common terminal is not connected to the frame ground terminal
(for floating measurement), a potential shock hazard may present. Do not
touch any of measurement circuit at any time while a floating measurement is
in progress.
CAUTION
For floating measurement, do not apply dangerous voltage to the Circuit Common
terminal. Failure to heed this caution may result in damage to the instrument.
7. Zero Check terminal
Ground reference point of the instrument.
CAUTION
The Zero Check terminal can be used for the service purpose only. For the normal
operation, leave this terminal open and do not connect anything to this terminal.
Connecting anything can damage the instrument.
8. GNDU terminal
0 V constant voltage source. Used for the reference of measurement ground.
Triaxial connector.
9. LAN interface
RJ45 connector.
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Keysight B1500A User’s Guide, Ed ition 14
Introduction
Rear View
10. USB interfaces
USB, 2 ports. For keyboard, mouse, or peripherals.
To remove USB devices from the instrument, use “Safely Remove Hardware”
on Windows taskbar. If it is not used, the instrument may cause the internal USB
communication error. If the error occurs, turn the instrument off and disconnect
the power cable from it. Leave it about 30 seconds before rebooting it, and
connect the power cable again, and then turn the instrument on.
11. Ext Trig terminals
Two BNC connectors, one for trigger input, and one for trigger output. For
details about the trigger function, see Programming Guide.
12. Digital I/O terminal
DSUB 25 pin connector. Can be used for the trigger input/output terminals or an
interface to control an external relay circuit and so on. For details, see
Programming Guide. This connector is also used to connect Keysight 16445A
selector adapter.
13. Interlock terminal
Used in conjunction with the interlock function of the instrument. If the
Interlock terminal is open, maximum SMU output is limited to ±42 V. Be sure to
connect this terminal to the interlock circuit of the 16442B test fixture
(B1500A-A5F) or the prober station before performing measurement. For the
interlock circuit, see “To Make an Interlock Circuit” on page 3-31.
To verify the interlock function, perform the Interlock Open/Close test on the
Main Frame tab screen of the EasyEXPERT Configuration window.
WARNING
Dangerous voltage, instrument maximum output voltage may appear at Force,
Guard, and Sense terminals if the Interlock terminal is closed.
14. Video output terminal
VGA connector. For an external display. Signal to the built-in LCD is also
applied to this terminal.
For the B1500A manufactured before the video output terminal is supported, it
is mounted on the position “14a” by upgrading the mainframe.
Keysight B1500A User’s Guide, Ed ition 14
2- 13
Introduction
Rear View
A. GNDU/ADC
Ground unit and A/D converter module. Always installed in the B1500A.
B. SPGU module
The semiconductor pulse generator unit (SPGU) has the Output 1 and Output 2
terminals and the following terminals to synchronize the operation between
SPGUs or with an external equipment.
Ref Out/Sync Out: Connect to the Ref In/Sync In of the slave SPGU.
Ref In/Sync In: Connect to the Ref Out/Sync Out of the master SPGU.
Trig Out: Connect to the trigger input terminal of the equipment synchronized
with the SPGU output.
CAUTION
Connect the Ref Out/In, Sync Out/In, and Trig Out terminals to the specified
terminal properly. Connecting to the other terminal may result in damage to the
SPGU.
In the EasyEXPERT operation mode, the SPGU outputs can be specified by the
PG number. PG1 and PG2 are assigned to the Output 1 and Output 2 terminals
of the SPGU at the lowest position. And the following PG numbers are assigned
to the outputs of the upper SPGUs in sequence. Use the PG number label
furnished with the B1500A or equivalent to identify the SPGU channel number.
14a
14
E
D
4
D
D
D
3
5
D
2
D
C
B
A
1
13
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10
9
8 7
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Keysight B1500A User’s Guide, Ed ition 14
Introduction
Rear View
C. WGFMU module
The waveform generator/fast measurement unit (WGFMU) has the Ch 1 and Ch
2 terminals and the following terminals to synchronize the operation between
WGFMUs or with an external equipment.
Sync Out: Connect to the Sync In of the slave WGFMU.
Sync In: Connect to the Sync Out of the master WGFMU.
Trig Out: Connect to the trigger input terminal of the equipment synchronized
with the WGFMU output.
CAUTION
Connect the Sync Out/In, and Trig Out terminals to the specified terminal properly.
Connecting to the other terminal may result in damage to the WGFMU.
Connect the connection cable between the WGFMU and the RSU (remote-sense and
switch unit) before turning the instrument on. Changing the cable connection in the
power on state may damage them. See Keysight B1530A User’s Guide for cable
connection and usage.
D. SMU module
The source/monitor unit (SMU) has two triaxial connectors, force and sense, for
the Kelvin connections.
The HRSMU (high resolution SMU) and MPSMU (B1511B medium power
SMU) also have a D-sub connector (To ASU terminal) which is used to connect
the ASU (atto sense and switch unit).
In the EasyEXPERT operation mode, the SMUs can be specified by the SMU
number. SMU1 is assigned to the SMU at the lowest position. And the following
SMU numbers are assigned to the upper SMUs in sequence. Use the SMU
number label furnished with the B1500A or equivalent to identify the SMU
number.
NOTE
Connect the connection cables between the SMU and the ASU before turning the
instrument on. Changing the cable connection in the power on state may damage
them. To connect the ASU, see “To Connect ASU” on page 3-17.
E. CMU module
The multi frequency capacitance measurement unit (MFCMU) has four coaxial
connectors, Lcur, Lpot, Hpot, and Hcur, for the four-terminal pair connection.
The Hcur and Hpot have to be connected together at a terminal of the device
Keysight B1500A User’s Guide, Ed ition 14
2- 15
Introduction
Rear View
under test (DUT). Also the Lcur and Lpot have to be connected together at the
other terminal of the DUT. Then, the guard lines of four-terminal pair must be
connected together.
CAUTION
Do not apply voltage more than ±25 V to the MFCMU input terminals. Failure to
heed this caution may result in damage to the module.
WARNING
To avoid electrical shock and instrument damage, turn the all instruments off
before connecting or disconnecting measurement cable.
WARNING
There are potentially hazardous voltages (± 200 V for HPSMU, and ± 100 V for
MPSMU/HRSMU) present at the Force, Sense, and Guard terminals of this
instrument. To prevent electrical shock, the following safety precautions must
be observed during the use of the instrument.
•
Use a three-conductor AC power cable to connect the instrument to an
electrical ground (safety ground).
•
If you do not use the B1500A-A5F/16442A/B test fixture, you must install
and connect an interlock circuit that opens the Interlock terminal when the
shielding box access door is opened.
•
If you change the DUT interface, test fixture, prober, and such, connect an
interlock cable to the one actually used.
•
Confirm periodically that the interlock function works normally.
•
Before touching the connections on the Force, Guard, and Sense terminals
in the test fixture or the shielding box, turn the instrument off and
discharge any capacitors. If you do not turn the instrument off, complete all
of the following items, regardless of the instrument settings.
•
•
Press the front panel Stop key to set the module output off.
•
Confirm that the front panel High Voltage indicator is not lit.
•
Open the Interlock terminal (open the fixture cover or the shielding box
access door).
•
Discharge any capacitors connected to a measurement resource.
Warn persons working around the instrument about dangerous conditions.
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Keysight B1500A User’s Guide, Ed ition 14
Introduction
Measurement Modules
Measurement Modules
Keysight B1500A can be equipped with the following measurement modules.
•
“GNDU - Ground Unit”
•
“HPSMU - High Power SMU”
•
“MPSMU - Medium Power SMU”
•
“MCSMU - Medium Current SMU”
•
“HRSMU - High Resolution SMU”
•
“MFCMU - Multi Frequency CMU”
•
“HVSPGU - High Voltage SPGU”
•
“WGFMU - Waveform Generator/Fast Measurement Unit”
See Keysight EasyEXPERT User’s Guide for the functions available for Keysight
EasyEXPERT software. See Programming Guide for the functions available for the
GPIB remote mode. See Keysight B1530A User’s Guide for using the WGFMU.
GNDU - Ground Unit
Keysight B1500A is equipped with the ground unit (GNDU). The GNDU is a 0 V
constant voltage source, and used for the reference of measurement ground. Also the
GNDU can sink up to ± 4.2 A, so it is effective for using the HPSMU (high power
SMU). Figure 2-1 is a simplified circuit diagram of GNDU.
Figure 2-1
Simplified GNDU Circuit Diagram
0V
GNDU
Force
Common
Keysight B1500A User’s Guide, Ed ition 14
2- 17
Introduction
Measurement Modules
About SMU
Source/monitor unit (SMU) can apply DC voltage or current, and can measure DC
current or voltage. Figure 2-2 is a simplified SMU circuit diagram. The SMU can
perform the following operations:
The HPSMU, MPSMU, and HRSMU can perform the following operations:
•
Apply voltage and measures current or voltage
•
Apply current and measures current or voltage
The MCSMU can perform the following operations:
•
Apply voltage and measures current and/or voltage
•
Apply current and measures current and/or voltage
NOTE
To select the SMU operation mode in the GPIB remote condition, enter the CMM
command.
Figure 2-2
Simplified SMU Circuit Diagram
+A SMU
Force
+
VCommon
Compliance
The SMU has a compliance feature that limits output voltage or current to prevent
damage to the device under test. When the SMU applies voltage, you can specify
current compliance. When the SMU applies current, you can specify voltage
compliance. For details about the compliance, see Keysight EasyEXPERT User’s
Guide.
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Introduction
Measurement Modules
HPSMU - High Power SMU
This section describes typical specification of the high power source/monitor unit
(HPSMU). Maximum four modules can be installed in one mainframe.
Figure 2-3
•
Maximum voltage, current, output power: ± 200 V, ± 1 A, 20 W
•
Minimum range: 2 V, 1 nA
•
Output/measurement value and resolution: see Table 2-1 to Table 2-4.
HPSMU Output and Measurement Ranges
Current (mA)
1000
500
125
50
-200
-100
Voltage (V)
-40 -20 20 40
-125
200
100
-500
-1000
Keysight B1500A User’s Guide, Ed ition 14
2- 19
Introduction
Measurement Modules
Table 2-1
Table 2-2
HPSMU Output Voltage Ranges and Resolutions
Range
Output Value
Setting
Resolution
Maximum
Current
2V
0  |V|  2 V
100 V
± 1000 mA
20 V
0  |V|  20 V
1 mV
± 1000 mA
40 V
0  |V|  40 V
2 mV
± 500 mA
100 V
0  |V|  100 V
5 mV
± 125 mA
200 V
0  |V|  200 V
10 mV
± 50 mA
HPSMU Output Current Ranges and Resolutions
Range
Output Value
Setting
Resolution
Maximum
Voltage
1 nA
0  |I|  1.15 nA
50 fA
± 200 V
10 nA
0  |I|  11.5 nA
500 fA
± 200 V
100 nA
0  |I|  115 nA
5 pA
± 200 V
1 A
0  |I|  1.15 A
50 pA
± 200 V
10 A
0  |I|  11.5 A
500 pA
± 200 V
100 A
0  |I|  115 A
5 nA
± 200 V
1 mA
0  |I|  1.15 mA
50 nA
± 200 V
10 mA
0  |I|  11.5 mA
500 nA
± 200 V
100 mA
0  |I|  50 mA
5 A
± 200 V
50 mA < |I|  115 mA
5 A
± 100 V
0  |I|  50 mA
50 A
± 200 V
50 mA < |I|  125 mA
50 A
± 100 V
125 mA < |I|  500 mA
50 A
± 40 V
500 mA < |I|  1 A
50 A
± 20 V
1A
2- 20
Keysight B1500A User’s Guide, Ed ition 14
Introduction
Measurement Modules
Table 2-3
HPSMU Measurement Voltage Values and Resolutions
Table 2-4
Measurement Resolutions
Measurement
Value a
High Speed ADC
High Resolution ADC
2V
0  |V|  2.2 V
100 V
2 V
20 V
0  |V|  22 V
1 mV
20 V
40 V
0  |V|  44 V
2 mV
40 V
100 V
0  |V|  110 V
5 mV
100 V
200 V
0  |V|  200 V
10 mV
200 V
Range
HPSMU Measurement Current Values and Resolutions
Measurement Resolutions
Range
Measurement Value a
High Speed ADC
High Resolution ADC
1 nA
0  |I|  1.15 nA
50 fA
10 fA
10 nA
0  |I|  11.5 nA
500 fA
10 fA
100 nA
0  |I|  115 nA
5 pA
100 fA
1 A
0 |I|  1.15 A
50 pA
1 pA
10 A
0  |I|  11.5 A
500 pA
10 pA
100 A
0  |I|  115 A
5 nA
100 pA
1 mA
0  |I|  1.15 mA
50 nA
1 nA
10 mA
0  |I|  11.5 mA
500 nA
10 nA
100 mA
0  |I|  115 mA
5 A
100 nA
1A
0  |I|  1 A
50 A
1 A
a. This column is applied to the auto ranging or the limited auto ranging. For
fixed ranging, maximum measurement value is Range column value.
Keysight B1500A User’s Guide, Ed ition 14
2- 21
Introduction
Measurement Modules
MPSMU - Medium Power SMU
This section describes typical specification of the medium power source/monitor
unit (MPSMU). There is no restriction for the number of modules installed in one
mainframe.
Figure 2-4
•
Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W
•
Minimum range: 0.5 V, 1 nA (1 pA when the E5288A ASU is used)
•
Output/measurement value and resolution: see Table 2-5 to Table 2-8.
MPSMU Output and Measurement Ranges
Current (mA)
100
50
20
Voltage (V)
-40
-100
-20
20
40
-20
100
-50
-100
NOTE
The E5288A Atto Sense and Switch Unit (ASU) can be connected to the B1511B
MPSMU, but it cannot be connected to the B1511A MPSMU.
2- 22
Keysight B1500A User’s Guide, Ed ition 14
Introduction
Measurement Modules
Table 2-5
MPSMU Output Voltage Ranges and Resolutions
Range
0.5 V
Maximum
Current
0 |V| 
0.5 V
25 V
± 100 mA
2V
0  |V| 
2V
100 V
± 100 mA
5V
0  |V| 
5V
250 V
± 100 mA
20 V
0  |V| 
20 V
1 mV
± 100 mA
0  |V|  20 V
2 mV
± 100 mA
20 V < |V|  40 V
2 mV
± 50 mA
5 mV
± 100 mA
20 V < |V|  40 V
5 mV
± 50 mA
40 V < |V|  100 V
5 mV
± 20 mA
40 V
100 V
Table 2-6
Setting
Resolution
Output Value
0  |V| 
20 V
MPSMU Output Current Ranges and Resolutions
Range
Output Value
Setting
Resolution
Maximum
Voltage
1 pA a
0  |I|  1.15 pA
1 fA
± 100 V
10 pA a
0  |I|  11.5 pA
5 fA
± 100 V
100 pA a
0  |I|  115 pA
5 fA
± 100 V
1 nA
0  |I|  1.15 nA
50 fA
± 100 V
10 nA
0  |I|  11.5 nA
500 fA
± 100 V
100 nA
0  |I|  115 nA
5 pA
± 100 V
1 A
0  |I|  1.15 A
50 pA
± 100 V
10 A
0  |I|  11.5 A
500 pA
± 100 V
100 A
0  |I|  115 A
5 nA
± 100 V
1 mA
0  |I|  1.15 mA
50 nA
± 100 V
10 mA
0  |I|  11.5 mA
500 nA
± 100 V
100 mA
0  |I|  20 mA
5 A
± 100 V
20 mA < |I|  50 mA
5 A
± 40 V
50 mA < |I|  100 mA
5 A
± 20 V
a. For B1511B MPSMU. Available when the ASU is used.
Keysight B1500A User’s Guide, Ed ition 14
2- 23
Introduction
Measurement Modules
Table 2-7
MPSMU Measurement Voltage Values and Resolutions
Table 2-8
Measurement Resolutions
Measurement
Value a
High Speed ADC
High Resolution ADC
0.5 V
0  |V|  0.55 V
25 V
0.5 V
2V
0  |V|  2.2 V
100 V
2 V
5V
0  |V|  5.5 V
250 V
5 V
20 V
0  |V|  22 V
1 mV
20 V
40 V
0  |V|  44 V
2 mV
40 V
100 V
0  |V|  100 V
5 mV
100 V
Range
MPSMU Measurement Current Values and Resolutions
Measurement Resolutions
Measurement
Value a
High Speed ADC
High Resolution ADC
1 pA b
0  |I|  1.15 pA
100 aA
100 aA
10 pA b
0  |I|  11.5 pA
1 fA
400 aA
100 pA b
0  |I|  115 pA
5 fA
500 aA
1 nA
0  |I|  1.15 nA
50 fA
10 fA
10 nA
0  |I|  11.5 nA
500 fA
10 fA
100 nA
0  |I|  115 nA
5 pA
100 fA
1 A
0  |I|  1.15 A
50 pA
1 pA
10 A
0  |I|  11.5 A
500 pA
10 pA
100 A
0  |I|  115 A
5 nA
100 pA
1 mA
0  |I|  1.15 mA
50 nA
1 nA
10 mA
0  |I|  11.5 mA
500 nA
10 nA
100 mA
0  |I|  100 mA
5 A
100 nA
Range
a. This column is applied to the auto ranging or the limited auto ranging.
For fixed ranging, maximum measurement value is Range column value.
b. For B1511B MPSMU. Available when the ASU is used.
2- 24
Keysight B1500A User’s Guide, Ed ition 14
Introduction
Measurement Modules
NOTE
To connect ASU
To use the ASU, it must be connected to the SMU which is connected together when
the calibration is performed. The specifications are satisfied and guaranteed in this
condition only. So confirm the serial number of the ASU and connect it to the
dedicated SMU properly.
To connect the ASU, see “To Connect ASU” on page 3-17.
To confirm the serial number, see Keysight EasyEXPERT User’s Guide.
NOTE
Before using 1 pA range
The measurement channel connected to the ASU supports the 1 pA range. To use the
1 pA range, set the 1 pA fixed range or the 1 pA limited auto ranging.
The B1500A automatically performs the compensation of the data measured by the
1 pA range and returns the compensated data. You can use either the pre-stored
offset data or the pre-measured offset data.
To measure the offset data, perform the self-calibration before starting the
measurement for a DUT. This offset data is temporarily memorized until the
B1500A is turned off.
Keysight B1500A User’s Guide, Ed ition 14
2- 25
Introduction
Measurement Modules
MCSMU - Medium Current SMU
This section describes typical specification of the medium current source/monitor
unit (MCSMU). Maximum four modules can be installed in one mainframe.
Figure 2-5
•
Maximum current: ± 1 A (pulse), ± 0.1 A (DC)
•
Maximum voltage: ± 30 V
•
Maximum output power: 30 W (pulse), 3 W (DC)
•
Minimum range: 0.2 V, 10 A
•
Minimum pulse width: 10 s
•
Output/measurement value and resolution: see Table 2-9 and Table 2-10.
MCSMU Output and Measurement Ranges
Current (A)
1
Pulse mode only
0.1
30
Voltage (V)
- 30
- 0.1
Pulse mode only
-1
2- 26
Keysight B1500A User’s Guide, Ed ition 14
Introduction
Measurement Modules
Table 2-9
MCSMU Voltage Ranges and Resolutions
Range
Output Value and
Measurement Value
Setting/
Measurement
Resolution
Maximum
Current
Maximum
Pulse Base
Value
0.2 V
0  |V|  0.2 V
200 nV
100 mA, 1 A a
± 0.2 V
2V
0  |V|  2 V
2 V
±2V
20 V
0  |V|  20 V
20 V
± 20 V
40 V
0  |V|  30 V
40 V
± 30 V
a. For pulse.
Table 2-10
MCSMU Current Ranges and Resolutions
Range
Output Value and
Measurement Value
Setting/
Measurement
Resolution
Maximum
Voltage
Maximum
Pulse Base
Value
10 A
0  |I|  11.5 A
10 pA
± 30 V
± 10 A
100 A
0  |I|  115 A
100 pA
± 100 A
1 mA
0  |I|  1.15 mA
1 nA
± 1 mA
10 mA
0  |I|  11.5 mA
10 nA
± 10 mA
100 mA
0  |I|  100 mA,
0  |I|  115 mA a
100 nA
± 100 mA
1Ab
0  |I|  1 A
1 A
± 50 mA
a. For pulse.
b. For pulse. Maximum pulse width and duty cycle are 100 ms and 5 %
respectively.
Keysight B1500A User’s Guide, Ed ition 14
2- 27
Introduction
Measurement Modules
HRSMU - High Resolution SMU
This section describes typical specification of the high resolution source/monitor
unit (HRSMU). There is no restriction for the number of modules installed in one
mainframe.
Figure 2-6
•
Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W
•
Minimum range: 0.5 V, 10 pA (1 pA when the E5288A ASU is used)
•
Output/measurement value and resolution: see Table 2-11 to Table 2-14.
HRSMU Output and Measurement Ranges
Current (mA)
100
50
20
Voltage (V)
-40
-100
-20
20
40
-20
100
-50
-100
2- 28
Keysight B1500A User’s Guide, Ed ition 14
Introduction
Measurement Modules
Table 2-11
HRSMU Output Voltage Ranges and Resolutions
Range
Output Value
Setting
Resolution
Maximum
Current
0.5 V
0  |V|  0.5 V
25 V
± 100 mA
2V
0  |V|  2 V
100 V
± 100 mA
5V
0  |V|  5 V
250 V
± 100 mA
20 V
0  |V|  20 V
1 mV
± 100 mA
40 V
0  |V|  20 V
2 mV
± 100 mA
20 V < |V|  40 V
2 mV
± 50 mA
0  |V|  20 V
5 mV
± 100 mA
20 V < |V|  40 V
5 mV
± 50 mA
40 V < |V|  100 V
5 mV
± 20 mA
100 V
Table 2-12
HRSMU Output Current Ranges and Resolutions
Range
Output Value
Setting
Resolution
Maximum
Voltage
1 pA a
0  |I|  1.15 pA
1 fA
± 100 V
10 pA
0  |I|  11.5 pA
5 fA
± 100 V
100 pA
0  |I|  115 pA
5 fA
± 100 V
1 nA
0  |I|  1.15 nA
50 fA
± 100 V
10 nA
0  |I|  11.5 nA
500 fA
± 100 V
100 nA
0  |I|  115 nA
5 pA
± 100 V
1 A
0  |I|  1.15 A
50 pA
± 100 V
10 A
0  |I|  11.5 A
500 pA
± 100 V
100 A
0  |I|  115 A
5 nA
± 100 V
1 mA
0  |I|  1.15 mA
50 nA
± 100 V
10 mA
0  |I|  11.5 mA
500 nA
± 100 V
100 mA
0  |I|  20 mA
5 A
± 100 V
20 mA < |I|  50 mA
5 A
± 40 V
50 mA < |I|  100 mA
5 A
± 20 V
a. Available when the ASU is used.
Keysight B1500A User’s Guide, Ed ition 14
2- 29
Introduction
Measurement Modules
Table 2-13
HRSMU Measurement Voltage Values and Resolutions
Table 2-14
Measurement Resolutions
Measurement
Value a
High Speed ADC
High Resolution ADC
0.5 V
0  |V|  0.55 V
25 V
0.5 V
2V
0  |V|  2.2 V
100 V
2 V
5V
0  |V|  5.5 V
250 V
5 V
20 V
0  |V|  22 V
1 mV
20 V
40 V
0  |V|  44 V
2 mV
40 V
100 V
0  |V|  100 V
5 mV
100 V
Range
HRSMU Measurement Current Values and Resolutions
Measurement Resolutions
Measurement
Value a
High Speed ADC
High Resolution ADC
1 pA b
0  |I|  1.15 pA
100 aA
100 aA
10 pA
0  |I|  11.5 pA
1 fA
1 fA / 400 aA b
100 pA
0  |I|  115 pA
5 fA
2 fA / 500 aA b
1 nA
0  |I|  1.15 nA
50 fA
10 fA
10 nA
0  |I|  11.5 nA
500 fA
10 fA
100 nA
0  |I|  115 nA
5 pA
100 fA
1 A
0  |I|  1.15 A
50 pA
1 pA
10 A
0  |I|  11.5 A
500 pA
10 pA
100 A
0  |I|  115 A
5 nA
100 pA
1 mA
0  |I|  1.15 mA
50 nA
1 nA
10 mA
0  |I|  11.5 mA
500 nA
10 nA
100 mA
0  |I|  100 mA
5 A
100 nA
Range
a. This column is applied to the auto ranging or the limited auto ranging.
For fixed ranging, maximum measurement value is Range column value.
b. Available when the ASU is used.
2- 30
Keysight B1500A User’s Guide, Ed ition 14
Introduction
Measurement Modules
NOTE
To connect ASU
To use the ASU, it must be connected to the SMU which is connected together when
the calibration is performed. The specifications are satisfied and guaranteed in this
condition only. So confirm the serial number of the ASU and connect it to the
dedicated SMU properly.
To connect the ASU, see “To Connect ASU” on page 3-17.
To confirm the serial number, see Keysight EasyEXPERT User’s Guide.
NOTE
Before using 1 pA range
The measurement channel connected to the ASU supports the 1 pA range. To use the
1 pA range, set the 1 pA fixed range or the 1 pA limited auto ranging.
The B1500A automatically performs the compensation of the data measured by the
1 pA range and returns the compensated data. You can use either the pre-stored
offset data or the pre-measured offset data.
To measure the offset data, perform the self-calibration before starting the
measurement for a DUT. This offset data is temporarily memorized until the
B1500A is turned off.
Keysight B1500A User’s Guide, Ed ition 14
2- 31
Introduction
Measurement Modules
MFCMU - Multi Frequency CMU
This section describes typical specification of the multi frequency capacitance
measurement unit (CMU). The CMU performs the impedance measurement and
returns the specified measurement data such as Cp-G. Only one module can be
installed in one mainframe.
•
Measurement parameters: See Table 2-15.
•
AC signal, output frequency:
1 kHz to 5 MHz
Setting resolution: 1 mHz (1 kHz to), 10 mHz (10 kHz to), 0.1 Hz (100 kHz to),
or 1 Hz (1 MHz to 5 MHz)
•
AC signal, output level:
10 mVrms to 250 mVrms, 1 mV resolution
•
DC bias:
0 to ± 25 V, using MFCMU internal DC bias
0 to ± 100 V, using SMU and SCUU (SMU CMU unify unit)
•
Measurement range:
For the fixed ranging mode, measurement range (impedance range) must be
specified to perform measurement. Table 2-16 shows the available measurement
ranges and the corresponding impedance value. And Figure 2-7 shows the
calculation example of the impedance vs frequency characteristics of a
capacitive load. Use these information to decide the measurement range.
Impedance Z is calculated by the following formula.
Z = 1 / (2 f C)
where f is frequency (Hz) and C is capacitance (F).
2- 32
Keysight B1500A User’s Guide, Ed ition 14
Introduction
Measurement Modules
Table 2-15
Measurement Parameters
Primary Parameter
Secondary Parameter
R (resistance, )
X (reactance, )
G (conductance, S)
B (susceptance, S)
Z (impedance, )
 (phase, radian)
Z (impedance, )
 (phase, degree)
Y (admittance, S)
 (phase, radian)
Y (admittance, S)
 (phase, degree)
Cp (parallel capacitance, F)
G (conductance, S)
Cp (parallel capacitance, F)
D (dissipation factor)
Cp (parallel capacitance, F)
Q (quality factor)
Cp (parallel capacitance, F)
Rp (parallel resistance, )
Cs (series capacitance, F)
Rs (series resistance, )
Cs (series capacitance, F)
D (dissipation factor)
Cs (series capacitance, F)
Q (quality factor)
Lp (parallel inductance, H)
G (conductance, S)
Lp (parallel inductance, H)
D (dissipation factor)
Lp (parallel inductance, H)
Q (quality factor)
Lp (parallel inductance, H)
Rp (parallel resistance, )
Ls (series inductance, H)
Rs (series resistance, )
Ls (series inductance, H)
D (dissipation factor)
Ls (series inductance, H)
Q (quality factor)
Keysight B1500A User’s Guide, Ed ition 14
2- 33
Introduction
Measurement Modules
Table 2-16
Measurement Range for Fixed Ranging Mode
Measurement range (impedance range)
Impedance Z
1 kHz  f  200 kHz
200 kHz < f  2 MHz
2 MHz < f  5 MHz
0  Z < 100 
50 
50 
50 
100   Z < 300 
100 
100 
100 
300   Z < 1 k
300 
300 
300 
1 k  Z < 3 k
1 k
1 k
1 k
3 k  Z < 10 k
3 k
3 k
3 k
10 k  Z < 30 k
10 k
10 k
30 k  Z < 100 k
30 k
30 k
100 k  Z < 300 k
100 k
300 k  Z
300 k
Impedance vs Frequency Characteristics of Capacitive Load, Calculation
Example
Impedance Z
Figure 2-7
10 T7
1 T7
100 G7
10 G7
1 G7
100 M7
10 M7
1 M7
100 k7
10 k7
1 k7
100 7
10 7
17
100 m7
10 m7
1 m7
100 M7
10 M7
1 M7
100 n7
10 n7
1 kHz
300 k7 range
3 k7
range
100 aF
1 fF
10 fF
100 fF
1 pF
10 pF
100 pF
1 nF
10 nF
100 nF
1 MF
10 MF
100 MF
1 mF
10 mF
100 mF
1F
50 7 range
10 kHz
100 kHz
1 MHz
5 MHz
Frequency f
2- 34
Keysight B1500A User’s Guide, Ed ition 14
Introduction
Measurement Modules
HVSPGU - High Voltage SPGU
This section describes key specification of the high voltage semiconductor pulse
generator unit (SPGU). Maximum five modules can be installed in one mainframe.
•
Number of output channels: 2 channels per module
•
Output impedance: 50 
•
Output level: 0 to ± 40 V (open load), ± 20 V (50  load), 1 mV resolution
•
SPGU operation mode:
PG (pulse generator) or ALWG (arbitrary linear waveform generator)
•
Channel output operation mode:
Free run, duration, or pulse count (PG mode)/sequence count (ALWG mode)
•
PG output mode:
2-level pulse or 3-level pulse, for each channel
•
Pulse timing parameters: (programmable range)
Period: 20 ns to 10 s, 10 ns resolution
Width: 10 ns to period-10 ns, resolution 2.5 ns or 10 ns (transition time > 8 s)
Delay: 0 to period-20 ns, resolution 2.5 ns or 10 ns (transition time > 8 s)
Transition time (leading time or trailing time): 8 ns to 400 ms, resolution 2 ns or
8 ns (transition time > 8 ms)
Figure 2-8
•
Pulse switch, which is more durable than mechanical relays, and better suited for
frequent switching applications.
•
Automatic voltage level adjustment by specifying load impedance of DUT
SPGU Simplified Circuit Diagram
50 7
Pulse switch
50 7
Pulse switch
Output 1
PG 2-level
or 3-level
or
ALWG
Keysight B1500A User’s Guide, Ed ition 14
Output 2
PG 2-level
or 3-level
or
ALWG
2- 35
Introduction
Measurement Modules
WGFMU - Waveform Generator/Fast Measurement
Unit
This section describes typical specification of the waveform generator/fast
measurement unit (WGFMU) and the remote-sense and switch unit (RSU).
Maximum five modules can be installed in one mainframe.
•
Number of channels: 2 channels per module
•
Function:
Voltage output and current or voltage sampling measurement with minimum
sampling interval of 5 ns
•
Current measurement range: 1 A, 10 A, 100 A, 1 mA, or 10 mA
•
Operation mode: PG mode, Fast IV mode, or DC mode
•
PG mode:
ALWG (arbitrary linear waveform generator) voltage output and voltage
measurement (VFVM).
Output level: -5 V to 5 V for open load or -2.5 V to 2.5 V for 50  load
Minimum pulse width: 50 ns
•
Fast IV mode:
ALWG voltage output and current or voltage measurement (VFIM or VFVM).
Output level: 0 to -10 V, 0 to 10 V, or -5 V to 5 V
Minimum pulse width (VFVM): 130 ns for 10 V output, 105 ns for 5 V output
•
DC mode:
DC voltage output and current or voltage measurement (VFIM or VFVM).
Output level: 0 to -10 V, 0 to 10 V, or -5 V to 5 V
Figure 2-9
WGFMU Simplified Circuit Diagram
PG mode
PG mode
50 7
V
Ch1
RSU output
ALWG
A
Fast IV mode
2- 36
50 7
V
V
Ch2
RSU output
ALWG
A
Fast IV mode
V
Keysight B1500A User’s Guide, Ed ition 14
3
Installation
Installation
This chapter describes how to install Keysight B1500A and accessories.
•
“Requirements”
•
“Inspection and Installation”
•
“Installing Accessories”
•
“Mounting Connectors”
•
“Connecting Measurement Devices”
•
“Capacitance Compensation When Using Switching Matrix”
•
“Maintenance”
•
“About Plug-in Modules”
To change the GPIB address of the B1500A, see “To Change GPIB Address” on
page 3-10. To control external GPIB devices from the B1500A/EasyEXPERT, see
“To Enable System Controller” on page 3-11.
WARNING
To avoid electrical shock and instrument damage, turn the instrument off
before connecting or disconnecting measurement cable.
WARNING
This instrument is heavy and requires a two person lift.
CAUTION
Do not grab the fixture cover when lifting the test fixture.
3- 2
Keysight B1500A User’s Guide, Ed ition 14
Installation
WARNING
There are potentially hazardous voltages (± 200 V for HPSMU, and ± 100 V for
MPSMU/HRSMU) present at the Force, Sense, and Guard terminals of this
instrument. To prevent electrical shock, the following safety precautions must
be observed during the use of the instrument.
•
Use a three-conductor AC power cable to connect the instrument to an
electrical ground (safety ground).
•
If you do not use the B1500A-A5F/16442A/B test fixture, you must install
and connect an interlock circuit that opens the Interlock terminal when the
shielding box access door is opened.
•
If you change the DUT interface, test fixture, prober, and such, connect an
interlock cable to the one actually used.
•
Confirm periodically that the interlock function works normally.
•
Before touching the connections on the Force, Guard, and Sense terminals
in the test fixture or the shielding box, turn the instrument off and
discharge any capacitors. If you do not turn the instrument off, complete all
of the following items, regardless of the instrument settings.
•
•
Press the front panel Stop key to set the module output off.
•
Confirm that the front panel High Voltage indicator is not lit.
•
Open the Interlock terminal (open the fixture cover or the shielding box
access door).
•
Discharge any capacitors connected to a measurement resource.
Warn persons working around this instrument about dangerous conditions.
Keysight B1500A User’s Guide, Ed ition 14
3- 3
Installation
Requirements
Requirements
This section contains information on:
•
“Power Requirements”
•
“Operating Environment”
•
“Storaging/Shipping Environment”
•
“Installation Requirements”
•
“Power Cable”
Power Requirements
This instrument can operate from any single-phase AC power source supplying
100-240 V (±10 %) at 50/60 Hz. The maximum power consumption is 900 VA.
Operating Environment
This instrument is specified to operate within the following environmental
conditions:
Temperature:
5 C to 40 C
Humidity:
20 % to 70 % RH, non-condensing
Altitude:
0 to 2,000 m (6,561 ft.)
Storaging/Shipping Environment
This instrument is specified to store/ship within the following environmental
conditions:
Temperature:
-20 C to 60 C
Humidity:
10 % to 90 % RH, non-condensing
Altitude:
0 to 4,600 m (15,092 ft.)
3- 4
Keysight B1500A User’s Guide, Ed ition 14
Installation
Requirements
Installation Requirements
WARNING
Do not operate the instrument in dusty environment, or in the presence of
flammable gasses, corrosive gasses, or fumes.
•
Environmental conditions for this instrument are documented in “General
Specifications” on page 4-51. In principle, this instrument should only be
operated indoors in a controlled environment.
•
Install the instrument horizontal place then face the roof up.
•
The dimensions of this instrument are also given in “General Specifications”.
Fan cools the instrument by drawing air through the sides and exhausting it out
the back. The instrument must be installed in a location that allows sufficient
space at the sides and back of the instrument for adequate air circulation.
If the airflow is restricted, the internal operating temperature will be higher. This
may reduce the instrument’s reliability, or cause the thermal-protection circuits
to turn the instrument off.
•
Make sure that there is enough space for connecting/disconnecting the power
cable easily.
Power Cable
WARNING
FIRE HAZARD: Use only the power cable supplied with your instrument.
Using other types of power cable may cause overheating of the power cable,
resulting in fire.
SHOCK HAZARD: The power cable provides the chassis ground through a
third conductor. Be sure to connect to a three-conductor type power outlet with
the correct pin grounded.
NOTE
The detachable power cable may be used as an emergency disconnecting device.
Removing the power cable will disconnect AC input power to the instrument.
Connect the power cable to the IEC 320 connector on the rear of the instrument. If
the wrong power cable was shipped with your instrument, contact your nearest
Keysight Sales and Support Office.
The AC input on the back of your instrument is a universal AC input. It accepts
nominal line voltages in the range of 100 to 240 VAC.
Keysight B1500A User’s Guide, Ed ition 14
3- 5
Installation
Requirements
Option 900
Option 901
Option 902
Option 903
•
•
•
•
•
Plug: BS 1363/A,
250 V, 10 A
PN: 8120-4420
•
Plug: AS/NZS 3112,
250 V, 10 A
PN: 8120-4419
•
Plug: IEC 60277-1,
250 V, 10 A
PN: 8121-1226
•
Plug: NEMA 5-15P,
125 V, 10 A
PN: 8120-6825
Option 904
Option 906
Option 912
Option 917
•
•
•
•
•
Plug: NEMA 6-15P,
250 V, 10 A
PN: 8120-3996
•
Plug: SEV 1011,
250 V, 10 A
PN: 8120-4416
•
Plug: SB 107-2-D1,
250 V, 10 A
PN: 8121-1655
•
Plug: IS 1293 and
IS 6538, 250 V, 10 A
PN: 8121-1690
Option 918
Option 919
Option 920
Option 921
•
•
•
•
•
Plug: JIS C 8303,
125 V, 12 A
PN: 8121-0743
•
Plug: Israel SI 32,
250 V, 10 A
PN: 8121-0724
•
Plug: IRAM 2073,
250 V, 10 A
PN: 8121-0725
•
Plug: CEI 23-16,
250 V, 10 A
PN: 8121-0722
Option 922
Option 923
Option 927
Option 930
•
•
•
•
•
Plug: GB 1002
figure 3, 250 V, 10 A
PN: 8120-8376
•
Plug: SANS 164-1,
250 V, 10 A
PN: 8121-0564
Option 931
Option 932
•
•
•
Plug: CNS 10917-2,
125 V, 10 A
PN: 8121-1635
•
3- 6
•
Plug: NEMA WD-6,
250 V, 10 A
PN: 8120-0674
•
Plug: NBR 14136,
250 V, 10 A
PN: 8121-1809
Plug: CS 0017,
250 V, 10 A
PN: 8121-1638
Keysight B1500A User’s Guide, Ed ition 14
Installation
Inspection and Installation
Inspection and Installation
This section describes what to do when you receive the instrument and accessories.
1. Inspect the shipment. See “To Inspect B1500 and Accessories”.
2. Verify the instrument operation and perform initial setup. See “To Perform
Initial Setup”.
3. Install the instrument in the appropriate place. See “Requirements” on page 3-4.
To use the instrument briefly, see “Getting Started” on page 1-1.
To change the Windows logon setting, see “To Change Windows Logon Setting” on
page 3-9.
To change the GPIB address of the instrument, see “To Change GPIB Address” on
page 3-10.
To allow the B1500A/EasyEXPERT to control external GPIB devices, see “To
Enable System Controller” on page 3-11.
To Inspect B1500 and Accessories
Perform the following inspections when the instrument and accessories arrive at
your site.
1. Before unpacking any components, inspect all boxes for any signs of damage
that might have occurred during shipment, such as:
•
dents
•
scratches
•
cuts
•
water marks
If you suspect any damage, notify your local Keysight Technologies sales or
service office.
2. When you open the boxes that contain the instrument and accessories, check the
components against the contents lists attached to the boxes.
If anything is missing, notify your local Keysight Technologies sales or service
office.
Keysight B1500A User’s Guide, Ed ition 14
3- 7
Installation
Inspection and Installation
To Perform Initial Setup
After you receive the instrument, perform the following setup.
For the users available just after the initial setup, see Table 3-1.
1. Make sure that the Standby switch is set to off.
2. On the instrument rear panel, connect the Circuit Common terminal to the frame
ground terminal by using a shorting-bar.
3. If you use Keysight 16444A-001 USB keyboard and/or the 16444A-002 USB
mouse, connect it to an USB port of the instrument.
4. Connect the power cable from the instrument to an AC power outlet.
5. Open the measurement terminals and press the Standby switch to turn on the
instrument.
If the instrument is operating correctly, the power-on self-test is automatically
performed. If problems arise, see Keysight EasyEXPERT User’s Guide.
6. Follow the Windows setup wizard and complete the initial setup.
a. Set the system display language to English. The language must be English. If
you set another language, you must perform the system recovery of the
B1500A. See Keysight EasyEXPERT User’s Guide for the system recovery.
b. Set Country or region, Time and currency, and Keyboard layout.
If you use the 16444A-001 USB keyboard, the Keyboard layout must be US.
c. Accept the End User License Agreement.
d. Set Time zone, date and time.
If the instrument has been already connected to your site LAN, you can proceed
the network connection setup.
NOTE
Other Windows setup
You can set other setup of Windows after the initial setup. It is your responsibility.
If you connect the instrument to the network, take care to protect it from computer
virus.
3- 8
Keysight B1500A User’s Guide, Ed ition 14
Installation
Inspection and Installation
Table 3-1
Users Available Just After the Initial Setup
User Account
Description
Keysight B1500
User
Account for automatic logon. Password is not set to this
account.
keysightOnly
Account for Keysight service personnel. Do not delete
this account. This account is password protected.
Administrator
Administrator. Password is not set to this account.
You can add users after the initial setup. Add users as you need.
NOTE
Keysight Technologies cannot guarantee the performance and provide compatibility
information for all B1500As under several conditions. If problems arise, perform
Keysight B1500A system recovery.
To perform recovery, see Keysight EasyEXPERT User’s Guide.
To Change Windows Logon Setting
Keysight B1500A initially enables Windows automatic logon. If you want to change
this setting, select All Programs > Control Auto Logon from the Start menu. Control
Auto Logon is displayed on the browser. Then click one of the following buttons on
the browser and follow the setup script.
NOTE
•
Enable Auto Logon
•
Disable Auto Logon
If you set a password for the user account Keysight B1500 User, disable the
automatic logon.
Keysight B1500A User’s Guide, Ed ition 14
3- 9
Installation
Inspection and Installation
To Change GPIB Address
When this instrument is shipped from the factory, the GPIB address is set to 17. To
change the GPIB address, perform the following procedure.
1. If the EasyEXPERT software is running, terminate it as shown below:
a. Select the menu function File > Exit on the EasyEXPERT main screen.
b. Click [x] at the upper right corner of the Start EasyEXPERT button.
2. Select All Programs > Keysight IO Libraries Suite > Keysight Connection
Expert from the Start menu. Keysight Connection Expert window appears.
3. At the Instrument I/O on this PC area, select GPIB0, and click the Change
Properties... button. Keysight 82350 PCI GPIB Interface - GPIB0 window
appears.
4. Change the GPIB Address value.
5. Remove the check from the Auto-discover instruments connected to this
interface box.
6. Click the OK button on Keysight 82350 PCI GPIB Interface - GPIB0 window.
7. If the Reboot Required dialog box is displayed, click the Reboot Now button,
and reboot the instrument.
3- 10
Keysight B1500A User’s Guide, Ed ition 14
Installation
Inspection and Installation
To Enable System Controller
To allow Keysight B1500A/EasyEXPERT to control external GPIB devices,
perform the following procedure.
1. If the EasyEXPERT software is running, terminate it as shown below:
a. Select the menu function File > Exit on the EasyEXPERT main screen.
b. Click [x] at the upper right corner of the Start EasyEXPERT button.
2. Select All Programs > Keysight IO Libraries Suite > Keysight Connection
Expert from the Start menu. Keysight Connection Expert window appears.
3. At the Instrument I/O on this PC area, select GPIB0, and click the Change
Properties... button. Keysight 82350 PCI GPIB Interface - GPIB0 window
appears.
4. Set the GPIB Address value to 21 that is the typical address number for the
system controller.
5. Check the System Controller box.
6. Remove the check from the Auto-discover instruments connected to this
interface box.
This disables the automatic device detection. So the Connection Expert cannot
detect the instruments connected to the GPIB interface by itself.
7. Click the OK button on Keysight 82350 PCI GPIB Interface - GPIB0 window.
8. If the Reboot Required dialog box is displayed, click the Reboot Now button,
and reboot the instrument.
NOTE
To Disable System Controller
If the B1500A is the system controller, you cannot control the B1500A by using an
external computer. To disable the system controller, change the steps 4 and 5 for
setting the GPIB Address value to not 21 and removing the check from the System
Controller box, and perform the procedure to the step 8.
Keysight B1500A User’s Guide, Ed ition 14
3- 11
Installation
Installing Accessories
Installing Accessories
This section describes how to install the accessories.
•
“To Connect 16442B Test Fixture (B1500A-A5F)”
•
“To Connect Connector Plate”
•
“To Connect ASU”
•
“To Connect SCUU/GSWU”
•
“To Connect GNDU Adapter”
•
“To Connect MCSMU Connection Box”
WARNING
To avoid electrical shock and instrument damage, turn the instrument off
before connecting or disconnecting measurement cable.
WARNING
There are potentially hazardous voltages (± 200 V for HPSMU, and ± 100 V for
MPSMU/HRSMU) present at the Force, Sense, and Guard terminals. To
prevent electrical shock, do not expose these lines.
WARNING
This instrument supports the Interlock function to prevent you from receiving
an electrical shock from high voltage (more than ± 42 V). If the Interlock
terminal is open, this instrument cannot apply high voltage more than ± 42 V.
If you do not use the 16442A/B test fixture, install an interlock circuit (see page
31) and connect it to the Interlock terminal.
CAUTION
The GNDU can sink current of up to 4.2 A. Use Keysight 16493L GNDU cable to
connect the GNDU to a test fixture or a connector plate.
Do not use normal triaxial cable (Keysight 16494A) because the maximum current
rating of the cable is 1 A.
CAUTION
Never connect the Guard terminal to any output, including circuit common, chassis
ground, or any other guard terminal. Doing so will damage the SMU.
3- 12
Keysight B1500A User’s Guide, Ed ition 14
Installation
Installing Accessories
To Connect 16442B Test Fixture (B1500A-A5F)
See this section if you use Keysight 16442B test fixture (B1500A-A5F). This
section describes how to set up the 16442B and how to connect the B1500A to the
16442B.
To Set up 16442B (B1500A-A5F)
You can stabilize the 16442B (B1500A-A5F) as shown in the figure below.
1. Put a stabilizer on both sides of the test fixture.
2. Attach each stabilizer to the test fixture with a flathead screw.
To Connect 16442B (B1500A-A5F)
Use the cables shown in Table 3-2 to connect from the B1500A connectors to the
16442B’s relative connectors.
NOTE
Making non-Kelvin connection
The Force terminals can be used to force and measure DC voltage or current. If you
want to simplify the cable connections, open the Sense terminals and connect the
Force terminals only to the test fixture by using the triaxial cables.
If you make the Kelvin connection (remote sensing), use both Force and Sense
terminals. Connecting the Force and Sense lines together at the terminal of the
device under test minimizes the measurement error caused by the residual resistance
of the connection cables. The Kelvin connection is effective for the low resistance
measurement and the high current measurement.
Keysight B1500A User’s Guide, Ed ition 14
3- 13
Installation
Installing Accessories
Table 3-2
To Connect 16442B (B1500A-A5F)
Cables
16442B
Terminals
B1500A Terminals
Keysight 16493J Interlock Cable, 3 m or 1.5 m
Intlk
Interlock
Keysight 16493L GNDU Cable, 3 m or 1.5 m
GNDU
GNDU
Keysight 16493K Kelvin Triaxial Cable, 3 m
or 1.5 m, for the Kelvin connection
SMU1
Up to 3 SMUs can be connected to the 16442B
by the Kelvin connection.
SMU
SMU2
SMU3
Sense
SMU
SMU4
SMU5
Keysight 16493P SPGU Cable, 3 m or 1.5 m
SMU
Force
Sense
SMU1
SMU
Force
SMU2
SMU
Force
SMU3
SMU
Force
SMU4
SMU
Force
SMU5
SMU
Force
SMU6
SMU
Force
PGU1
SPGU
Output 1
PGU2
Keysight N1300A CMU Cablea, 3 m or 1.5 m
Force
Sense
SMU6
Keysight 16494A Triaxial Cable, 3 m or 1.5 m,
for the non-Kelvin connection
Force
PGU1
PGU2
Output 2
CMU
Hcur/Hpot
Lcur/Lpot
a. To extend the four-terminal pair (4TP) connection to the 16442B inputs,
connect the Hcur and Hpot cables together and the Lcur and Lpot cables
together by using the BNC T-type adapter (female-female-male, Keysight
part number 1250-2405), then connect them to the 16442B inputs.
To extend the 4TP connection to the socket module inputs, connect the
cables to the PGU1, PGU2, VSU1, VSU2, VMU1, or VMU2 connector
individually, and connect the Hcur and Hpot terminals together and the
Lcur and Lpot terminals together at the socket module inputs.
It is ok to leave open the ground wire extended from the CMU cable.
3- 14
Keysight B1500A User’s Guide, Ed ition 14
Installation
Installing Accessories
To Connect Connector Plate
The available connector plates are listed in Table 3-3. Option 001 provides the
through connectors except for the Interlock connector that provides the soldering
patterns at the back side. For the option 002, the back of each connector is designed
for soldering. For connector plate installation information, see Keysight 16495
Installation Guide.
For the 16495H/J, the insulator is inserted between the panel and the outer
conductor of Triax connectors/BNC connectors.
Use the cables shown in Table 3-4 to connect from the B1500A connectors to the
connector plate’s relative connectors. For the cable connections from the connector
plate to the DUT interface such as manipulator and probe card, see “Mounting
Connectors” on page 3-29 as reference.
NOTE
Making non-Kelvin connection
The Force terminals can be used to force and measure DC voltage or current. If you
want to simplify the cable connections, open the Sense terminals and connect the
Force terminals only to the connector plate by using the triaxial cables.
If you make the Kelvin connection (remote sensing), use both Force and Sense
terminals. Connecting the Force and Sense lines together at the terminal of the
device under test minimizes the measurement error caused by the residual resistance
of the connection cables. The Kelvin connection is effective for the low resistance
measurement and the high current measurement.
Table 3-3
Connector Plates
Model
Option Item
16495F
16495F-001
Triax. (f-f) 12, GNDU (f-f) 1, Interlock (f) 1
16495F-002
Triax. (f) 12, GNDU (f) 1, Interlock (f) 1
16495G-001
Triax. (f-f) 24, GNDU (f-f) 1, Interlock (f) 1
16495G-002
Triax. (f) 24, GNDU (f) 1, Interlock (f) 1
16495H-001
Triax. (f-f) 6, Coax. (f-f) 6, GNDU (f-f) 1, Interlock (f) 1
16495H-002
Triax. (f) 6, Coax. (f) 6, GNDU (f) 1, Interlock (f) 1
16495J-001
Triax. (f-f) 8, Coax. (f-f) 4, GNDU (f-f) 1, Interlock (f) 1
16495J-002
Triax. (f) 8, Coax. (f) 4, GNDU (f) 1, Interlock (f) 1
16495K-001
Connector plate, rubber holder
16495G
16495H
16495J
16495K
Connectors
Keysight B1500A User’s Guide, Ed ition 14
3- 15
Installation
Installing Accessories
Table 3-4
To Connect Connector Plate
Cables
Connector
Plate
B1500A Terminals
Keysight 16493J Interlock Cable, 3 m or 1.5 m
Intlk
Interlock
Keysight 16493L GNDU Cable, 3 m or 1.5 m
GNDU
GNDU
Keysight 16493Ka Kelvin Triaxial Cable, 3 m
or 1.5 m, for the Kelvin connection
odd number
16495F provides the inputs 1 to 12 (6 Kelvin).
16495H provides the inputs 1 to 6 (3 Kelvin).
Force
SMU
even number
Sense
16495J provides the inputs 1 to 8 (4 Kelvin).
Keysight 16494A Triaxial Cable, 3 m or 1.5 m,
for non-Kelvin connection
16495H provides the inputs 1 to 6.
odd number
or
even number
SMU
Force
SPGU
Output 1
16495J provides the inputs 1 to 8.
Keysight 16493P SPGU Cable, 3 m or 1.5 m
16495H provides the inputs 7 to 12.
odd number
or
even number
Output 2
16495J provides the inputs 9 to 12.
Keysight N1300A CMU Cableb, 3 m or 1.5 m
16495H provides the inputs 7 to 12.
odd number
or
even number
Hcur/Hpot
CMU
Lcur/Lpot
16495J provides the inputs 9 to 12.
a. Use Keysight 16494B Kelvin Triaxial Cable to connect to Keysight E5250A
Low Leakage Switch Mainframe or the connector plate for Keysight 4142B
Modular DC Source/Monitor by the Kelvin connection.
b. To extend the four-terminal pair (4TP) connection to the connector plate
inputs, connect the Hcur and Hpot cables together and the Lcur and Lpot
cables together by using the BNC T-type adapter (female-female-male, Keysight part number 1250-2405), then connect them to the connector plate
inputs. To extend the 4TP connection to the DUT interface, connect the cables
to the connector plates input connectors individually, and connect the Hcur
and Hpot terminals together and the Lcur and Lpot terminals together on the
DUT interface. See Figure 3-21.
It is ok to leave open the ground wire extended from the CMU cable.
3- 16
Keysight B1500A User’s Guide, Ed ition 14
Installation
Installing Accessories
To Connect ASU
Keysight E5288A Atto Sense and Switch Unit (ASU) adds the following functions
to the B1500A. To use the ASU, it must be connected to the SMU which is
connected together when the calibration is performed.
•
Atto ampere (aA) level current measurement capability
•
Automatic switching of ASU input resource connected to ASU output
NOTE
For the installation of the ASU and the connection to the DUT interface (probe card,
manipulators, and so on), contact your favorite prober vender. The prober vender
will have the solutions. Dimensions of the ASU are 132 mm (W)  88.5 mm (H) 
50 mm (D) excluding the connectors.
Figure 3-1
Image of ASU Installation
Shielding box
CMU Return
16495K
CMU Return
DUT interface
ASU
16495K
ASU
Prober
To B1500A/CMU
Required parts
To install 16495K
•
Keysight 16495K Connector plate
•
Keysight 16493M ASU cable
•
Keysight N1300A CMU cable or Keysight 16048D/E test leads
•
Keysight N1254A-108 Magnet stand
•
BNC cable, coaxial cable, manipulator, wire, and so on
Fix the 16495K plate to the shielding box or something that will cover the DUT
interface. See Keysight 16495 Installation Guide. The 16495K is the plate that has
the mechanism to block the light from the cable hole used to pass the cables in the
shielding box.
Keysight B1500A User’s Guide, Ed ition 14
3- 17
Installation
Installing Accessories
To install ASU
1. Fix the ASU in the shielding box. The ASU must be fixed to the best position for
accessing its connectors. Keysight N1254A-108 Magnetic Stand will be useful
for fixing the ASU.
2. Pass the 16493M (D-sub cable, triaxial cable), N1300A CMU cable, 16048D/E
test leads, BNC cable and so on through the cable hole of the 16495K. They will
be connected between the ASU and the instruments
3. Connect the D-sub cable to the ASU D-sub connector.
Connect the triaxial cable to the ASU Force terminal.
Connect the cable to the ASU CMU-cur/AUX In terminal. See Figure 3-2.
•
For the MFCMU, connect the N1300A CMU cable.
•
For Keysight 4284A/E4980A LCR meter, connect Keysight 16048D/E test
leads.
•
For the instrument other than the MFCMU or the 4284A/E4980A, connect
the BNC cable to the CMU-cur/AUX In terminal. And open the CMU-pot
terminal or cover it by using the BNC open cap.
4. Adjust the cable length in the shielding box, and catch in the cables by using the
cover of the 16495K.
5. Connect the cable from the DUT interface to the ASU output terminal.
For the non Kelvin connection, open the Sense terminal or cover it by using the
triaxial open cap.
To connect
B1500A
1. Turn the B1500A off.
2. Connect the D-sub cable from the ASU to the SMU D-sub connector.
3. Connect the triaxial cable from the ASU to the SMU Force terminal.
NOTE
To use the ASU, it must be connected to the SMU which is connected together when
the calibration is performed. The specifications are satisfied and guaranteed in this
condition only. So confirm the serial number of the ASU and connect it to the
dedicated SMU properly. See Keysight EasyEXPERT User’s Guide to confirm the
serial number.
3- 18
Keysight B1500A User’s Guide, Ed ition 14
Installation
Installing Accessories
To connect
MFCMU/4284A/
E4980A to AUX
Perform the following procedure to connect the MFCMU or the 4284A/E4980A.
See Figure 3-2 and Figure 3-3.
Prepare a shorting bar furnished with the ASU. The shorting bar is effective for
reducing the offset capacitance caused by connecting a measurement terminal to the
chuck of a wafer prober.
1. Turn the instrument off.
2. Prepare two ASUs (#1 and #2) and two shorting bar. And perform the following
procedure for each ASU.
a. Disconnect the triaxial cable from the ASU if it is connected to the ASU
Force terminal.
b. Face the concave side of the shorting bar to front.
c. Slide the shorting bar from the right side of the connectors.
3. Connect the cable to the instrument. For the MFCMU, use the N1300A CMU
cable. For the 4284A/E4980A, use the 16048D/E test leads. It is ok to leave
open the ground wire extended from the cable.
4. Connect the high potential (Hp) cable of the test leads to the ASU #1 CMU-pot
terminal.
5. Connect the high current (Hc) cable to the ASU #1 CMU-cur/AUX In terminal.
The shorting bar is fixed to the ASU #1 by the step 5 and 6.
6. Connect the triaxial cable from the SMU #1 Force terminal to the ASU #1 Force
terminal.
7. Connect the low potential (Lp) cable to the ASU #2 CMU-pot terminal.
8. Connect the low current (Lc) cable to the ASU #2 CMU-cur/AUX In terminal.
The shorting bar is fixed to the ASU #2 by the step 8 and 9.
9. Connect the triaxial cable from the SMU #2 Force terminal to the ASU #2 Force
terminal.
10. Prepare the connection wire (both pin terminals) furnished with the ASU and
connect it between the CMU Return terminals of the ASU #1 and ASU #2
together.
NOTE
About ASU output cables
To perform capacitance measurements accurately, the cable length between DUT
and the ASU output must be as short as possible.
Keysight B1500A User’s Guide, Ed ition 14
3- 19
Installation
Installing Accessories
Figure 3-2
To Connect ASU
ASU #1
To CMU
To SMU
Hc
CMU-cur/AUX In
Hp
CMU-pot
Force
Force
D-sub
From SMU
Force/CMU/AUX
Sense
To DUT
CMU Return/AUX Common
ASU #2
To CMU
To SMU
Figure 3-3
Lc
CMU-cur/AUX In
Lp
CMU-pot
Force
Force
D-sub
From SMU
CMU Return/AUX Common
Force/CMU/AUX
Sense
To DUT
To Set Shorting Bar
5/8
AUX
CMU-cur/AUX In
b/c
SMU Force
6/9
SMU Force
Shorting bar
To connect other
To connect the instrument other than the MFCMU or the 4284A/E4980A:
instrument to AUX
1. Turn the instrument off.
2. Connect the BNC cable from the ASU CMU-cur/AUX In terminal to the
instrument. Prepare an adapter if the instrument’s input/output connector is not
BNC.
3- 20
Keysight B1500A User’s Guide, Ed ition 14
Installation
Installing Accessories
To Connect SCUU/GSWU
Keysight N1301A-100 SMU CMU Unify Unit (SCUU) is used to switch the
measurement resource (CMU or SMU) to be connected to the DUT.
Keysight N1301A-200 Guard Switch Unit (GSWU) is used to connect the CMU
high and low guard lines together near the DUT. The connection is broken when the
SCUU is in the SMU connection state. The GSWU is effective for the accurate
impedance measurement.
NOTE
For the installation of the SCUU/GSWU and the connection to the DUT interface
(probe card, manipulators, and so on), contact your favorite prober vender. The
prober vender will have the solutions. Dimensions of the SCUU are 148 mm (W) 
75 mm (H)  70 mm (D). Dimensions of the GSWU are 33.2 mm (W)  41.5 mm
(H)  32.8 mm (D).
Figure 3-4
Image of GSWU Installation
Shielding box
Wire from CMU Guard
GSWU
16495K
DUT interface
To B1500A/
SCUU
Required parts
Prober
•
Keysight 16495K Connector plate
•
Keysight N1301A-201/202 GSWU cable (if GSWU is used)
•
Keysight N1301A-102 SCUU cable (if SCUU is not attached to the MFCMU)
•
Keysight N1301A-110 Magnet stand (if GSWU is used)
•
BNC cable, coaxial cable, manipulator, wire, and so on
Keysight B1500A User’s Guide, Ed ition 14
3- 21
Installation
Installing Accessories
To install 16495K
Fix your necessary 16495 connector plates to the shielding box or something that
will cover the DUT interface. See Keysight 16495 Installation Guide. For the
GSWU installation, the 16495K is required. It is the plate that has the mechanism to
block the light from the cable hole used to pass the cables in the shielding box.
Before starting
1. GSWU is furnished with wires (2 ea.) for the connection between the GSWU
and the DUT interface Guard terminal. If it is too short to connect them, prepare
additional wire.
2. Turn the B1500A off.
Figure 3-5
To Connect SCUU/GSWU
SCUU
To CMU
(slot N)
Hc
Hp
Force1/CMUH
Lc
Lp
Sense1
To SMU Force1
(slot N-1) Sense1
To SMU Force2
(slot N-2) Sense2
3- 22
Guard
DUT
Sense2
GSWU
Guard
Force2/CMUL
Keysight B1500A User’s Guide, Ed ition 14
Installation
Installing Accessories
To connect
SCUU/GSWU 1
To attach the SCUU to the B1500A:
1. Attach the SCUU to the B1500A rear panel connectors for the MFCMU in the
slot N and two SMUs in the slots N-1 and N-2 (N: integer, 3 to 10).
Connection will be easy by bringing the control connectors together before
bringing the BNC connectors.
2. Fix the GSWU in the shielding box. The GSWU must be fixed to the best
position for accessing its connectors.
3. Pass the GSWU cable (Keysight N1301A-201/202) through the cable hole of the
16495K. And connect it between the SCUU and the GSWU.
4. Adjust the cable length in the shielding box, and catch in the cables by using the
cover of the 16495K.
5. Connect the proper cables from Force1/CMUH and Force2/CMUL to the 16495
connector plates or the DUT interface. See Figure 3-5.
For the Kelvin connections, also connect the proper cables from Sense1 and
Sense2 to the 16495 connector plates or the DUT interface.
6. Connect the wires (furnished, 2 ea.) to the GSWU.
7. Connect one of the wires to the Guard terminal extended from CMUH of SCUU.
Then the wire should contact the Guard terminal as close to the device as
possible.
8. Connect another one to the Guard terminal extended from CMUL of SCUU.
Then the wire should contact the Guard terminal as close to the device as
possible.
NOTE
About SCUU output cables
To perform capacitance measurements accurately, the cable length between DUT
and the SCUU output must be as short as possible.
To connect
SCUU/GSWU 2
1. Attach an end of the SCUU cable (Keysight N1301A-102) to the SCUU.
Connection will be easy by putting the SCUU and the cable connection box on
the flat table, and bringing the control connectors together before bringing the
BNC connectors.
If the SCUU is fixed inside the shielding box, pass the SCUU cable through the
cable hole of the 16495K.
Keysight B1500A User’s Guide, Ed ition 14
3- 23
Installation
Installing Accessories
2. Fix the SCUU inside or outside the shielding box. The SCUU must be fixed to
the best position for accessing its connectors. Keysight N1301A-110 Magnetic
Stand will be useful for fixing the SCUU.
3. Attach the other end of the SCUU cable to the B1500A rear panel connectors for
the MFCMU in the slot N and two SMUs in the slots N-1 and N-2 (N: integer, 3
to 10).
Connection will be easy by bringing the control connectors together before
bringing the BNC connectors.
4. Fix the GSWU in the shielding box. The GSWU must be fixed to the best
position for accessing its connectors.
5. Connect the GSWU cable (Keysight N1301A-201/202) between the SCUU and
the GSWU.
If the SCUU is fixed outside the shielding box, pass the GSWU cable through
the cable hole of the 16495K.
6. Adjust the cable length in the shielding box, and catch in the cables by using the
cover of the 16495K.
7. Connect the proper cables from Force1/CMUH and Force2/CMUL to the 16495
connector plates or the DUT interface. See Figure 3-5.
For the Kelvin connections, also connect the proper cables from Sense1 and
Sense2 to the 16495 connector plates or the DUT interface.
8. Connect the wires (furnished, 2 ea.) to the GSWU.
9. Connect one of the wires to the Guard terminal extended from CMUH of SCUU.
Then the wire should contact the Guard terminal as close to the device as
possible.
10. Connect another one to the Guard terminal extended from CMUL of SCUU.
Then the wire should contact the Guard terminal as close to the device as
possible.
NOTE
About SCUU output cables
To perform capacitance measurements accurately, the cable length between DUT
and the SCUU output must be as short as possible.
3- 24
Keysight B1500A User’s Guide, Ed ition 14
Installation
Installing Accessories
To Connect GNDU Adapter
The ground unit (GNDU) output is the single triaxial connector. To change it to the
dual triaxial connector, use Keysight N1254A-100 GNDU to Kelvin Adapter. The
adapter and cables are furnished with the B1500A.
Attach the adapter directly to the rear panel as shown below.
1. Face the adapter’s GNDU connector and banana jack to the B1500A’s GNDU
connector and Circuit Common terminal respectively.
2. Push the adapter toward the B1500A.
3. Rotate the GNDU connector handle of the adapter to fix it to the B1500A.
Use the following cables to extend the GNDU Force and Sense terminals.
Figure 3-6
Figure 3-7
•
16493L GNDU cable, for Force
•
16494A Triaxial cable, for Sense
GNDU to Kelvin Adapter
Connector handle
GNDU
Banana jack
Force
Sense
GNDU to Kelvin Adapter Internal Connections
GNDU
Common
Sense
Force
Force
Sense
Keysight B1500A User’s Guide, Ed ition 14
3- 25
Installation
Installing Accessories
To Connect MCSMU Connection Box
Keysight N1255A connection box is used to make the connection of MCSMU easy.
Input panel provides six triaxial connectors for connecting two MCSMU and one
GNDU or SMU. Output panel provides six triaxial connectors for the High1, High2,
and Low terminals. See Figure 3-10 for image of the Input panel and the Output
panel. Also see Figure 3-8 for the connection image. And see Figure 3-9 for the
internal connection.
Use the following cables to connect the N1255A to the MCSMU.
•
16494A Triaxial cable, 2 ea. per one MCSMU
Use the following cables and adapter to connect the N1255A to the GNDU.
Figure 3-8
•
N1254A-100 GNDU to Kelvin adapter, 1 ea.
•
16493L GNDU cable, 1 ea.
•
16494A Triaxial cable, 1 ea.
N1255A Connection Example
B1500A
MCSMU
N1255A Connection Box
16494A
Force
Sense
16494A
MCSMU
Force
Sense
16493L
N1254A-100
NOTE
Force
High1
Sense
Force
MCSMU2
Sense
Force
High2
Sense
Force
GNDU/SMU
Sense
Low
16494A
16494A
GNDU
Force
MCSMU1
Sense
Force
Sense
DUT
Force
Sense
16494A
N1255A Input and Output terminals
If a MP/HP/HRSMU is connected instead of the GNDU, use the following cable.
Also, do not use the SMU current range less than 100 mA.
•
16494A Triaxial cable, 2 ea.
Voltage rating of terminal is indicated near connector on the Input or Output panel.
The N1255A cannot be used for measurement of the IEC Measurement Category II,
III, or IV.
3- 26
Keysight B1500A User’s Guide, Ed ition 14
Installation
Installing Accessories
Figure 3-9
N1255A Internal Connections
N1255A Connection Box
High
Low
Force
MCSMU1
Force
SW1
High1
High
Sense
Low
High
Low
Force
MCSMU2
Sense
Sense
100 Ω
SW4
SW2
High2
High
Low
Sense
50 Ω SW5
Force
Force
SW3
GNDU/SMU
Sense
NOTE
Force
Low
Sense
•
SW1: Kelvin/Non-Kelvin selection switch for High1
•
SW2: Kelvin/Non-Kelvin selection switch for High2
•
SW3: Kelvin/Non-Kelvin selection switch for Low
•
SW4: 0 /100  series resistor selection switch for High2 Force
•
SW5: Open/50  shunt resistor selection switch between High2 and Low, Force
Selection switch SW2 and SW4
The SW4 switches the series resistance 0 /100  on the High2 Force line. The
resistor is not mounted on the High2 Sense line.
Set the SW4 to “0 ” if the SW2 is set to “Kelvin”.
Set the SW2 to “Non-Kelvin” if the SW4 is set to “100 ”.
NOTE
Selection switch SW1/SW2/SW3 and Sense connector on Output panel
The switch is used to make or break the connection between Force and Sense in the
N1255A. Setting it to “Non-Kelvin” makes this internal connection to enable the
non-Kelvin connection. And setting it to “Kelvin” breaks this internal connection to
enable the Kelvin connection.
If the switch is set to “Non-Kelvin”, do not extend the Sense output corresponding
to it. Voltage on the Force line also appears on the Sense line. So, open the Sense
connector on the Output panel.
Keysight B1500A User’s Guide, Ed ition 14
3- 27
Installation
Installing Accessories
NOTE
Series Resistor and Shunt Resistor
The series resistor and the shunt resistor can be used for preventing MCSMU from
oscillation. If the MCSMU oscillates, insert either 100  series resistor or 50 
shunt resistor.
If it does not stop the oscillation, prepare the resistor of the other value and insert it
between the Output High and the device under test (DUT).
Figure 3-10
N1255A Input Panel and Output Panel
Input Panel
Input
MCSMU 1
MCSMU 2
GNDU/SMU
±40 V&Max
Force
Sense
±40 V &Max
Force
Sense
±200 V &Max
Force
Sense
High Force/
Sense
Low Force/
Sense
Circuit
Common
High Force/
Sense
Low Force/
Sense
Circuit
Common
Force/
Sense
Circuit
Common
Guard
Use N1254A-100 GNDU
Adapter to connect GNDU.
Circuit Common
Circuit Common
High Sense
High Force
Low Force
Force
Sense
Guard
Low Sense
Guard
Output Panel
Output
Low
High 2
High 1
±200 V&Max
Sense
Force
±240 V &Max
Sense
Force
±240 V &Max
Sense
Force
Force/
Sense
Circuit
Common
Force/
Sense
Circuit
Common
Force/
Sense
Circuit
Common
Open the Sense terminal if the switch is set to Non-Kelvin.
Circuit Common
Low Sense
Low Force
Circuit Common
3- 28
Circuit Common
High Sense
High Force
Circuit Common
Keysight B1500A User’s Guide, Ed ition 14
Installation
Mounting Connectors
Mounting Connectors
Previous sections described how to install the available accessories, and Keysight
16495 Installation Guide provides the information on how to install connector
plates on the shielding box. However, you may choose to mount connectors directly
on your own connector plate or test fixture.
To do this, you will need to make connector holes and mount the connectors
yourself. This section contains information on connector hole dimensions.
To mount connectors:
1. Select and prepare the appropriate parts for your application. See Table 3-5.
2. Make the holes and mount the connectors. See Table 3-6.
For Kelvin connections (remote sensing), use Keysight 16493K Kelvin triaxial
cable. The Kelvin triaxial cable requires a Kelvin triaxial connector, which has
two connector holes and three screw holes.
3. Build the interlock circuit shown in “To Make an Interlock Circuit” on page
3-31.
4. Attach cables from the connectors to the DUT (device under test). See “To
Connect GNDU Output” on page 3-34, “To Connect SMU Output” on page
3-35, and “To Connect MFCMU Output” on page 3-42.
WARNING
For safety, prepare and attach a shield cover to avoid touching the joints on the
wiring side of connectors. And ground the cover.
Wrap an insulator around the naked conductors of coaxial cable to avoid
touching it.
Keysight B1500A User’s Guide, Ed ition 14
3- 29
Installation
Mounting Connectors
Table 3-5
Recommended Parts
Usage
Keysight Part No.
Making an
interlock circuit
Description
1252-1419
Interlock Connector (6 pin,
female)
N1254A-402 or 3101-3241
Switch
1450-0641
LED (VF 2.1 V @ IF = 10 mA)
8150-5680
Wire (24 AWG, 600 V, 150 C)
Connecting GNDU
to DUT
1250-2457
Triaxial Connector (female)
8121-1189 or 8150-2639
Coaxial Cable or Wire
Connecting SMU
to DUT
1250-2457
Triaxial Connector (female)
8121-1191
Low Noise Coaxial Cable
Connecting
MFCMU to DUT
1250-0118
BNC Connector (female)
8120-0367
Coaxial Cable (50 )
8150-0447
Wire
Table 3-6
Dimensions of Connector Holes
Kelvin Triaxial Connector (in mm)
14
11
11
Triaxial Connector (in mm)
14
11.3
10.3
2.8
10.3
2−
11.3
3.2
2 − M3 x 0.5
BNC Connector (in mm)
Interlock Connector (in mm)
1.8
12.8
8.2
5.1
12.1
3- 30
Keysight B1500A User’s Guide, Ed ition 14
Installation
Mounting Connectors
To Make an Interlock Circuit
The interlock circuit is designed to prevent electrical shock when a user touches the
measurement terminals.
CAUTION
You must install an interlock circuit on a shielding box to prevent hazardous
voltages when the door of the shielding box is open.
Figure 3-11 shows the pin assignments of the interlock connector that should be
mounted on a connector plate or test fixture.
Figure 3-11
Interlock Connector Pin Assignments
Interlock switch
6
1
1
5
6
2
5
2
4
3
3
Connector side
WARNING
4
LED
Wiring side
Potentially hazardous voltages may be present at the Force, Guard, and Sense
terminals when the interlock terminals are shorted.
Keysight B1500A User’s Guide, Ed ition 14
3- 31
Installation
Mounting Connectors
Installing the interlock circuit
Install the interlock circuit as follows:
1. Mount two mechanical switches on your shielding box, so that the switches
close when the door of the shielding box is closed, and open when the door is
opened. For the dimensions of the switch, see Figure 3-13 and Figure 3-14
below.
2. Mount an LED on your shielding box. For the dimensions of the LED, see
Figure 3-12.
3. Use wire to connect the two switches in series between pin number 1 and 2 (or
3) of the interlock connector. See Figure 3-11.
4. Use wire to connect the LED between pin number 4 and 5 (or 6) of the interlock
connector. See Figure 3-11.
If Keysight B1500A Interlock connector is connected to the interlock circuit,
Keysight B1500A SMU cannot force more than ± 42 V when the door is open.
When the door is closed, it can force more than ± 42 V.
When more than ± 42 V is forced from an SMU, the LED lights to indicate high
voltage output.
Figure 3-12
Dimensions of the LED (1450-0641)
6
11
10
5
5
5.6
Anode (+)
Cathode (-)
3- 32
Units : mm
Keysight B1500A User’s Guide, Ed ition 14
Installation
Mounting Connectors
Figure 3-13
Dimensions of the Interlock Switch (N1254A-402)
2.8
10.3
4.3
4.75
2.8
6.4
35.6
Switch off
2.8
8.1
3.2
3.1
2.8
15.3
NC
10.3
6.3
NO
15.9 18.8
C OM
3.1
22.2
14
27.8
Figure 3-14
Units: mm
Dimensions of the Interlock Switch (3101-3241)
10.2
4.3
27.5
10.9
3.1
3.2
Switch off
Switch on
2.0
15.9
3.4
Units: mm
27.8
Keysight B1500A User’s Guide, Ed ition 14
6.8
3- 33
Installation
Mounting Connectors
To Connect GNDU Output
The GNDU output connection examples are shown in Table 3-7
Table 3-7
GNDU Output Connections
Kelvin connections (remote sensing)
non-Kelvin connections
Use a low-noise coaxial cable (Keysight part
number 8121-1189) from the connector to the
prober, socket, or DUT as shown.
Short the Sense and Force on the connector as
shown below. Measurement data will include the
residual resistance of the connection wire.
To cancel the effects of cable resistance, connect the
Sense line and Force line as close as possible to the
terminal of the DUT.
Use AWG 22 single-strand insulated wire
(Keysight part number 8150-2639) from the
connector plate to the prober, socket, or DUT.
For a quick connection where measurement
accuracy is not critical, connect only Force to the
DUT, without shorting the Sense and Force. With
this connection, the measurement data will
include residual resistance from the connection
cable between the GNDU and the connector
plate.
Common
Force
Sense
Common
Force
Sense
to
DUT
to
DUT
Insulator
Plate
Coaxial cable
Triaxial connector
CAUTION
Insulator
Plate
Wire
Triaxial connector
Use Keysight 16493L GNDU cable to connect the GNDU to your connector plate or
test fixture. Do not use the triaxial cable. The GNDU is rated for up to 4.2 A, while
the maximum current rating of the triaxial cable is 1 A.
3- 34
Keysight B1500A User’s Guide, Ed ition 14
Installation
Mounting Connectors
To Connect SMU Output
The SMU output connection examples are shown in Table 3-8.
WARNING
There are potentially hazardous voltages (± 200 V for HPSMU, and ± 100 V for
MPSMU/HRSMU) present at the Force, Sense, and Guard terminals.
To prevent electrical shock, do not expose these lines.
Before turning the instrument on, connect the Interlock terminal to an
interlock circuit.
Before you touch any connections to these terminals, turn the instrument off,
disconnect the power cable, and discharge any capacitors.
CAUTION
Never connect the Guard terminal to any output, including circuit common, chassis
ground, or any other guard terminal. Doing so will damage the SMU.
NOTE
Low-Noise Coaxial Cable
For the extended measurement paths over the connector plate, use low-noise coaxial
cable (Keysight part number 8121-1191). This cable can maximize the guard effects
and minimize the impression of the external noise.
Figure 3-15 shows the cutting example of this cable. Key point is the isolation
between the conductive layer and the center conductor. So, cut and trim the end of
the cable as shown in this figure by using a cutter and so on.
Figure 3-15
Coaxial Cable Cutting Example
Cover here using sleeve
Insulator (black)
min 2 mm
Center conductor
(for Force/Sense signal)
approx. 10 to 15 mm
Outer conductor
(for Guard signal)
Insulator (clear)
Conductive layer (black)
WARNING
Wrap an insulator around the naked conductors of coaxial cable to avoid
touching it.
Keysight B1500A User’s Guide, Ed ition 14
3- 35
Installation
Mounting Connectors
Table 3-8
SMU Output Connections
Kelvin connections (remote sensing)
non-Kelvin connections
Use low-noise coaxial cable (Keysight part number
8121-1191) from the connector to the prober,
socket, or DUT as shown.
Use low-noise coaxial cable (Keysight part
number 8121-1191). The following figure is for
the connection using Kelvin triaxial cable.
See Figure 3-16 and Figure 3-18 for the ASU and
SCUU connections respectively.
For the connection using triaxial cable, connect
the cable to the Force terminal only.
To cancel the effects of cable resistance, connect
the Sense line and Force line as close as possible to
the DUT terminal.
In this connection, measurement data will include
residual resistance from the connection cable.
To prevent oscillations, do not use cables longer
than 1.5 m.
See Figure 3-17 and Figure 3-19 for the ASU and
SCUU connections respectively.
Common
Guard
Force
Common
Guard
Force
to
DUT
Triaxial
connector
Common
Guard
Sense
Coaxial cable
to
DUT
Triaxial
connector
Common
Guard
Sense
Coaxial cable
Wire
Insulator
Plate
NOTE
Insulator
Plate
To Minimize Leakage Current
For the highly accurate current forcing and measurements, surround all force and
sense lines by a guard as far as possible, and physically stable the cables with tape.
3- 36
Keysight B1500A User’s Guide, Ed ition 14
Installation
Mounting Connectors
Figure 3-16
ASU Output Kelvin Connection (Remote Sensing)
Guard
Wire
CMH
or Force
ASU
#1
Coaxial cable
Common
to DUT 1 or
DUT 1 high terminal
Sense
CMU Return
Guard
CMU Return
CML
or Force
ASU
#2
Common
to DUT 2 or
DUT 1 low terminal
Sense
Guard
The ASU inputs can be connected to the instruments by using a control cable, a
triaxial cable, and two coaxial cables. The cables can be connected to the ASU
inside the shielding box through the 16495K plate.
The ASU outputs should be connected to the DUT by using coaxial cables and wires
as shown above.
When a SMU is used for the measurements, the Kelvin paths will work as same as
Table 3-8.
When a four-terminal pair (4TP) instrument is used, the sense lines can be ignored.
And a Kelvin path is used for the high signal, and the other one is used for the low
signal. For the accurate impedance measurements, a wire must be connected
between the ASU#1 CMU Return and the ASU#2 CMU Return.
If the 4TP instrument is not used, you can ignore the CMH, CML, CMU Return, and
the DUT1 high and low terminals.
Keysight B1500A User’s Guide, Ed ition 14
3- 37
Installation
Mounting Connectors
Figure 3-17
ASU Output non-Kelvin Connection
Guard
Wire
CMH
or Force
ASU
#1
Coaxial cable
Common
Wire
to DUT 1 or
DUT 1 high terminal
Sense
CMU Return
Guard
to DUT 2 or
DUT 1 low terminal
CMU Return
CML
or Force
Common
ASU
#2
Sense
Guard
The ASU inputs can be connected to the instruments by using a control cable, a
triaxial cable, and two coaxial cables. The cables can be connected to the ASU
inside the shielding box through the 16495K plate.
The ASU outputs should be connected to the DUT by using coaxial cables and wires
as shown above.
When a SMU is used for the measurements, the Kelvin paths/force lines will work
as same as Table 3-8. Then the sense line is not extended to the DUT.
When a four-terminal pair (4TP) instrument is used, the sense lines can be ignored.
And a force line is used for the high signal, and the other one is used for the low
signal. For the accurate impedance measurements, a wire must be connected
between the ASU#1 CMU Return and the ASU#2 CMU Return.
If the 4TP instrument is not used, you can ignore the CMH, CML, CMU Return, and
the DUT1 high and low terminals shown above.
3- 38
Keysight B1500A User’s Guide, Ed ition 14
Installation
Mounting Connectors
Figure 3-18
SCUU Output Kelvin Connection (Remote Sensing)
Guard
Force 1 or CMH
Common
to GSWU
to DUT 1 or
DUT 1 high terminal
Guard
Sense 1
Insulator
Plate
Guard
Force 2 or CML
Common
to GSWU
to DUT 2 or
DUT 1 low terminal
Guard
Sense 2
Coaxial cable
Triaxial connector
Wire
The SCUU should be connected to the DUT by using coaxial cables and wires as
shown above. Also the SCUU should be connected to the GSWU inside the
shielding box by using a control cable through the 16495K plate.
When a SMU is used for the measurements, the Kelvin paths will work as same as
Table 3-8.
When the MFCMU is used, the sense lines can be ignored. And a Kelvin path is
used for the CMU high, and the other one is used for the CMU low. For the accurate
impedance measurements, wires must be connected to the GSWU from the CMH
guard and the CML guard as near as possible to the DUT.
Keysight B1500A User’s Guide, Ed ition 14
3- 39
Installation
Mounting Connectors
Figure 3-19
SCUU Output non-Kelvin Connection
Guard
Force 1 or CMH
to GSWU
Common
to DUT 1 or
DUT 1 high terminal
Guard
to GSWU
Insulator
Sense 1
Plate
to DUT 2 or
DUT 1 low terminal
Guard
Force 2 or CML
Coaxial cable
Wire
Common
Guard
Sense 2
Triaxial connector
The SCUU should be connected to the DUT by using coaxial cables and wires as
shown above. Also the SCUU should be connected to the GSWU inside the
shielding box by using a control cable through the 16495K plate.
When a SMU is used for the measurements, the Kelvin paths/force lines will work
as same as Table 3-8. Then the sense line is not extended to the DUT.
When the MFCMU is used, the sense lines can be ignored. And a force line is used
for the CMU high signal, and the other one is used for the CMU low signal. For the
accurate impedance measurements, wires must be connected to the GSWU from the
CMH guard and the CML guard as near as possible to the DUT.
3- 40
Keysight B1500A User’s Guide, Ed ition 14
Installation
Mounting Connectors
To Connect MCSMU Output
The MCSMU output connection example is shown in Figure 3-20.
For the connection of the MCSMU, the N1255A connection box is required. See
“To Connect MCSMU Connection Box” on page 3-26 to connect the MCSMU to
the N1255A Input terminals. To connect the N1255A Output terminals to the
connectors as shown in Figure 3-20, use the 16494A triaxial cable.
Figure 3-20
MCSMU Output Connection
High Force
High Force
From N1255A Output
Common
To DUT
High terminal
High Sense
High Sense
Insulator
Plate
Low Force
Low Force
From N1255A Output
Common
To DUT
Low terminal
Low Sense
Coaxial cable
Low Sense
Triaxial connector
Wire
The High Force/High Sense/Low Force/Low Sense lines should be connected to the
DUT as shown above. Wiring shown in “To Connect SMU Output” on page 3-35
can be used. To simplify the connections, omit the wiring of the Common.
For the non-Kelvin connection, use the High Force and the Low Force only. Omit
the wiring of the High Sense and the Low Sense.
Keysight B1500A User’s Guide, Ed ition 14
3- 41
Installation
Mounting Connectors
To Connect MFCMU Output
The MFCMU output connection example is shown in Figure 3-21. This connection
is for the MFCMU without the SCUU. Then Keysight N1300A-001/002 CMU cable
should be used for the connection between the MFCMU and the connectors you
mount. It is ok to leave open the ground wire extended from the CMU cable.
Figure 3-21
MFCMU Output Connection
Hcur
Wire
Guard
Hpot
to DUT 1
high terminal
Insulator
Plate
Lpot
to DUT 1
low terminal
Guard
Lcur
BNC connector
Coaxial cable
The Hcur/Hpot/Lcur/Lpot lines should be connected to the DUT as shown above.
Use a 50  coaxial cable (Keysight part number: 8120-0367) for the
Hcur/Hpot/Lcur/Lpot lines connection. Use a wire for the guard connection.
3- 42
Keysight B1500A User’s Guide, Ed ition 14
Installation
Connecting Measurement Devices
Connecting Measurement Devices
This section describes how to connect device under test (DUT) to the 16442B test
fixture (B1500A-A5F), and how to connect cables to the connector plate.
If you use a wafer prober, see wafer prober manuals.
Note that you must set the module output off when connecting or disconnecting
DUTs. If not, the DUTs may be damaged.
To set the module output off, press the Stop key.
This section has the following descriptions:
NOTE
•
“Using Test Fixture”
•
“Using Connector Plate”
Kelvin connection and non-Kelvin connection
To make the Kelvin connection (remote sensing), use both Force and Sense
terminals. Connecting the Force and Sense lines together at the terminal of the DUT
(device under test) minimizes the measurement error caused by the residual
resistance of the connection cables. The Kelvin connection is effective for the low
resistance measurement and the high current measurement.
If you want to simplify the cable connections, open the Sense terminals and use the
Force terminals only. This is the non-Kelvin connection. The Force terminals can be
used to force and measure dc voltage or current.
Keysight B1500A User’s Guide, Ed ition 14
3- 43
Installation
Connecting Measurement Devices
Using Test Fixture
1. Press the Stop key to set the output off.
2. Select a proper socket module for your DUT, then set the socket module on the
test fixture.
3. Mount your DUT on the socket module.
4. Connect between the socket module and the test fixture by using the proper test
leads.
5. Close the fixture cover.
To force more than ± 42 V, close the fixture cover. Otherwise, the interlock
function will stop Keysight B1500A output.
To connect between the socket module and the test fixture, you can use test leads
that have the following terminals:
WARNING
•
Miniature banana-to-miniature banana
•
Miniature banana-to-pin plug
•
Miniature banana-to-miniature clip
Set the instrument output off before connecting or disconnecting test leads.
Press the front panel Stop key to set the output off. And confirm that the front
panel High Voltage indicator is not lit.
WARNING
Make sure that the fixture cover is closed properly before starting
measurement. Do not perform the measurement when a test lead is protruding
from the test fixture and the cover.
CAUTION
Do not touch the terminals of the test leads. Oil, perspiration, and dirt prevent good
electrical contact, deteriorate insulation, and degrade measurement accuracy.
WARNING
To prevent electrical shock and DUT damage, do not connect or disconnect the
DUT while the instrument is applying voltage or current.
When you touch the DUT after measurement, devise a countermeasure of
residual charge and heat to prevent electrical shock and burn. Use glove and
any tool. Also have enough time for discharge and radiation.
3- 44
Keysight B1500A User’s Guide, Ed ition 14
Installation
Connecting Measurement Devices
Connections for High Current Measurements
When you force or measure a large current, you may want to use a Kelvin
connection (4-wire, remote sensing) to eliminate the residual resistance effects of
test leads and contacts. For example, you can use the following connections as
Kelvin connections on the test fixture.
Examples: Kelvin Connection
SMU(±200V= 1A Max)
1
2
3 (Selected)
Force
Sense
Force
Sense
Force
Sense
Guard
Guard
Guard
Guard
Guard
Guard
Drain
Gate
Substrate
Source
To cancel the effects of the residual resistance, test leads must be connected as close
as possible to the DUT.
Keysight B1500A User’s Guide, Ed ition 14
3- 45
Installation
Connecting Measurement Devices
Using Connector Plate
This section provides the information useful for connecting cables and probing
needles to a connector plate.
•
“To Reduce Leakage Current”
•
“To Measure Low Resistance”
To Reduce Leakage Current
To reduce the leakage current caused by connection cables, the guard technique is
effective. Connect the probing needles to the terminals of the connector plate by
using coaxial cables as shown below:
1. At end of cable, connect coaxial center conductor to force terminal of connector
plate, and connect coaxial outer conductor to guard terminal of connector plate.
2. At another end, connect coaxial center conductor to tail of the probing needle.
Never connect the outer conductor at this cable end.
Extend the outer conductor as close as possible to the probing needle.
Example
The following example connection can be used to reduce the leakage current.
Extend the outer conductor as close as possible to the probing needle. This also
reduces the induced noise.
Center conductor
Outer conductor
Coaxial cable
Connector plate
WARNING
Probing needle
Contact pad
For safety, prepare and attach a shield cover to the connector plate to avoid
touching the joints on the wiring side of connectors. And ground the cover.
Wrap an insulator around the naked conductors of coaxial cable to avoid
touching it.
3- 46
Keysight B1500A User’s Guide, Ed ition 14
Installation
Connecting Measurement Devices
WARNING
To prevent electrical shock and DUT damage, do not connect or disconnect the
DUT while the instrument is applying voltage or current.
When you touch the DUT after measurement, devise a countermeasure of
residual charge and heat to prevent electrical shock and burn. Use glove and
any tool. Also have enough time for discharge and radiation.
WARNING
Do not touch the guard terminal with bare hands because you may be shocked
by high voltage. The potential of the guard terminal is equal to the output
voltage.
CAUTION
Never connect the guard terminal to any other output, including circuit common,
frame ground, or the terminals of any other measurement resource. Doing so may
damage it.
Guarding
Guarding reduces the leakage current between the measurement points and
instrument. This is important when you measure low current.
The following figure shows the theory of guarding. The buffer amplifier (1) keeps
the potential of the guard conductor at the same potential as the force conductor, so
current does not flow between the force and guard conductors. Therefore, the
current measured by SMU is same as current at measurement point because no
current is leaked.
A
Guard
Force
DUT
Buffer
Keysight B1500A User’s Guide, Ed ition 14
3- 47
Installation
Connecting Measurement Devices
To Measure Low Resistance
When you measure a low resistance, high current flows through the DUT. This high
current increases the measurement error caused by the residual resistance of cables.
To cancel the effect of this resistance, you can use Kelvin connections (4-wire,
remote sensing), which means the force and sense lines are extended separately to
the DUT.
Connect the probing needles to the terminals of the connector plate by using test
leads or coaxial cables. Following instruction uses the coaxial cables:
1. At end of cable, connect coaxial center conductor to force terminal of connector
plate, and connect coaxial outer conductor to guard terminal of connector plate.
2. At another end, connect coaxial center conductor to tail of the probing needle.
Never connect the outer conductor at this cable end.
Extend the outer conductor as close as possible to the probing needle.
3. Repeat 1 and 2 for the sense terminal of connector plate.
4. Contact the probing needles from force and sense terminals as close as possible
to the DUT.
Example
The following example connection can be used to measure low resistance. The sense
line is extended to the probing pad, and contacts the force line through the pad, so
the voltage drop due to the residual resistance caused by cables and test leads is
canceled. To reduce the leakage current, use coaxial cables.
Force
Center conductor
Outer conductor
Probing needle
Sense
Contact pad
Coaxial cable
Connector plate
Contact pad
WARNING
For safety, prepare and attach a shield cover to the connector plate to avoid
touching the joints on the wiring side of connectors. And ground the cover.
Wrap an insulator around the naked conductors of coaxial cable to avoid
touching it.
3- 48
Keysight B1500A User’s Guide, Ed ition 14
Installation
Connecting Measurement Devices
WARNING
To prevent electrical shock and DUT damage, do not connect or disconnect the
DUT while the instrument is applying voltage or current.
When you touch the DUT after measurement, devise a countermeasure of
residual charge and heat to prevent electrical shock and burn. Use glove and
any tool. Also have enough time for discharge and radiation.
Kelvin Connection (Remote Sensing)
Kelvin connections give good measurement results when you force high-current.
The following figure shows the equivalent circuits for Kelvin and non-Kelvin
connections.
•
For the non-Kelvin connection, the voltmeter measures the voltage drop of
resistances rF1, RDUT, and rF2.
•
For the Kelvin connection, the voltmeter measures the voltage drop of resistance
RDUT only. The impedance of the voltmeter is very high, so the voltage drop of
resistances rS1 and rS2 can be ignored.
R DUT
rF1
R DUT
rF2
V
(a) non-Kelvin connection
rF1
rF2
rS1 rS2
V
V
(b) Kelvin connection
The Kelvin connection is effective even when forcing voltage. The voltage drop due
to the residual resistance of the force line wiring is fed back to the voltage source via
a comparator in the sense line. The input impedance of comparator is high, and
current flow into the sense line is very low. So output error is not significant if the
sense line wiring has a residual resistance of 10  or less. Therefore, the specified
voltage appears at the sense point (point where sense line contacts force line)
Keysight B1500A User’s Guide, Ed ition 14
3- 49
Installation
Capacitance Compensation When Using Switching Matrix
Capacitance Compensation When Using
Switching Matrix
When the capacitance/conductance measurement is performed through Keysight
B2200A/B2201A/E5250A switching matrix, Keysight B1500A measures the
capacitance/ conductance of the path including a DUT (device under test), matrix
switches, extension cables and so on. So, the data measured by the B1500A is far
from the DUT’s capacitance/conductance.
Keysight EasyEXPERT provides the functions used to compensate the data
measured in the environments described in “Required Conditions” on page 3-51.
This section explains how to perform compensation.
NOTE
•
“Required Conditions”
•
“To Create Compensation Data File”
Corrected data by the function is not guaranteed. But typical data (supplemental
data) is as follows.
Capacitance measurement accuracy (typical): ±1 % ±0.5 pF
This typical data is for the following measurement conditions:
Measurement frequency: 1 kHz to 5 MHz
Measurement range:
Maximum 1000 pF
Measurement terminal:
At the end of Keysight 16494A/B/C cable connected to
the switch module output terminals.
The typical data does not apply to anything extended from the 16494A/B/C cable.
The conditions described in “Required Conditions” on page 3-51 must be satisfied.
3- 50
Keysight B1500A User’s Guide, Ed ition 14
Installation
Capacitance Compensation When Using Switching Matrix
Required Conditions
The following conditions must be satisfied to use the capacitance compensation
function. For the instrument connections, see Figure 3-22.
•
Setting of the MFCMU
•
Range of the measurement frequency: 1 kHz to 5 MHz
•
Measurement function: Cp-G, Cp-D, Cs-Rs, or Z-Th. There is no limitation.
•
Calibration
Perform the MFCMU open calibration at the end of the measurement paths
in front of the switching matrix inputs. If you also perform the short
calibration (optional), prepare the BNC thru adapter (Keysight part number
1250-0080, 1 ea.).
•
•
Total cable length of both Hc-Hp side and Lc-Lp side must be the same.
Switching matrix input ports
Use Keysight N1300A CMU cable to connect the MFCMU. The BNC-T
adapters (2 ea., Keysight part number 1250-2405 for each) are required to
connect between the Hc and Hp terminals and between the Lc and Lp terminals.
Connect the Hc-Hp cable and the Lc-Lp cable as follows. It is ok to leave open
the ground wire extended from the CMU cable.
Hc-Hp: Input 13 (B2200A/B2201A) or AUX INPUT CV1 (E5250A)
Lc-Lp: Input 14 (B2200A/B2201A) or AUX INPUT CV2 (E5250A)
•
Switching matrix output terminals
Use the Keysight 16494A triaxial cable to extend the outputs to the connector
plate or the Keysight B2220A probe card interface (only for B2200A/B2201A).
For the Kelvin connection, use the Keysight 16494B/C Kelvin triaxial cable.
•
Ahead of the connector plate
Recommended cable: Keysight part number 8121-1191 Triaxial cable
You can also use another type of triaxial cable, coaxial cable, or combination of
these.
To approximate the capacitance/conductance of the DUT, you need to obtain the
appropriate compensation coefficients for your measurement environment, and
create your compensation data file. See Figure 3-22.
Keysight B1500A User’s Guide, Ed ition 14
3- 51
Installation
Capacitance Compensation When Using Switching Matrix
In Figure 3-22, C1 (DATA04), C2H (DATA05), C2L (DATA06), C3H (DATA07),
C3L (DATA08) are the compensation coefficients defined in the compensation data
file. where, CxH is for the path connected to the MFCMU Hc-Hp terminal, and CxL
is for the path connected to the MFCMU Lc-Lp terminal.
When Keysight B2220A probe card interface is used, obtain the coefficients for
C3x, and create your compensation data file. In this case, probe card will be used for
the C3x path.
When the connector plate is used, obtain the coefficients for C2x and C3x, and
create your compensation data file. In this case, triaxial cable with connector plate
will be used for the C2x path. And coaxial cable with positioner will be used for the
C3x path.
For obtaining the compensation coefficients and creating the compensation data file,
see “To Create Compensation Data File” on page 3-53.
Figure 3-22
Extension Cables and Compensation Coefficients
B1500A/MFCMU
Perform open calibration at this plane.
Short calibration is optional.
N1300A
+ BNC-T adapters
Low
to CML
C2H, C3H, DATA05, DATA07: for CMH path
C2L, C3L, DATA06, DATA08: for CML path
High
to CMH
Case 1. Probe card interface
B2220A (C2H, DATA05, need update)
(C2L, DATA06, need update)
Case 1 is not available
for E5250A.
16494A/C
(C1, DATA04, fixed)
Probe card etc.
(C3H, DATA07, need update)
(C3L, DATA08, need update)
Case 2. Connector plate
16494A/B
(C1, DATA04, fixed)
B2200A with B2210A or
B2201A with B2211A or
E5250A with E5252A
B2210A outputs or
B2211A outputs or
E5252A outputs
3- 52
16495F/G
Extended coaxial
cables and positioners
Extended triaxial
(C3H, DATA07, need update)
cables
with connector plate (C3L, DATA08, need update)
(C2H, DATA05, need update)
(C2L, DATA06, need update)
Keysight B1500A User’s Guide, Ed ition 14
Installation
Capacitance Compensation When Using Switching Matrix
To Create Compensation Data File
This section explains how to create the compensation data file. To perform the
capacitance compensation, enter the file name of the compensation data file to the
User Compensation Data File field of the Extended Configuration dialog box
opened from the Switching Matrix tab screen of the Configuration window.
1. Create a text file (e.g. C:\temp\c_data.txt) that contains the information as shown
below.
•
For B2200A/B2201A:
#
# Compensation data file for B2210A/Cable connection/3m triax cable
#
#
# MB
Mother Board
# MH
Matrix Path High
# ML
Matrix Path Low
# C1
Triax Cable
# C2H
Probe card I/F or User Triax cable High
# C2L
Probe card I/F or User Triax cable Low
# C3H
Probe card or User Coax cable High
# C3L
Probe card or User Coax cable Low
#
format version 1.0
B2210A
CABLE
#
#
R[Ohm]
L[H]
C[F]
#--------------------------------------------------MB
0.000000e+00
5.250000e-08
2.940000e-11
MH
2.430000e+00
6.310000e-07
1.930000e-10
ML
2.490000e+00
5.970000e-07
1.920000e-10
C1
6.300000e-01
1.250000e-06
1.600000e-10
C2H
1.007000e-01
4.000000e-07
8.000000e-11
C2L
1.007000e-01
4.000000e-07
8.000000e-11
C3H
1.140000e-01
5.440000e-07
1.300000e-10
C3L
1.140000e-01
5.440000e-07
1.300000e-10
The 15th line specifies the used switch module, B2210A or B2211A.
The 16th line specifies the DUT interface, PCIF or CABLE. PCIF indicates
that Keysight B2220A probe card interface is used. CABLE indicates that
the connector plate is used.
The lines C2H to C3L should be modified for each measurement
environment. See Table 3-9. Do not modify the other lines.
NOTE
EasyEXPERT provides the template of the compensation data file for the
B2200A/B2201A. See Table 3-11. Select and use the template suitable for your
measurement environment.
Keysight B1500A User’s Guide, Ed ition 14
3- 53
Installation
Capacitance Compensation When Using Switching Matrix
•
For E5250A:
# E5250A
C Compensation coefficient data table
#
#
CAUTION : Do not add or delete "REVISION" line and "DATAxx" line.
#
Change the value for R,L,C of DATA05,06,07 or 08.
#
REVISION
A.03.00
#
R [ohm]
L [H]
C [F]
DATA00
74.65E-3
140.00E-9
58.44E-12
# Frame Path 1
DATA01
75.41E-3
90.00E-9
67.13E-12
# Frame Path 2
DATA02
231.41E-3
450.00E-9
178.85E-12 # Card Path High
DATA03
177.56E-3
390.00E-9
135.45E-12 # Card Path Low
DATA04
100.70E-3
400.00E-9
80.00E-12
# Triax Cable
[/m]
DATA05
100.70E-3
400.00E-9
80.00E-12
# User Triax Cbl H [/m]
DATA06
100.70E-3
400.00E-9
80.00E-12
# User Triax Cbl L [/m]
DATA07
114.00E-3
544.00E-9
130.00E-12 # User Coax Cbl H [/m]
DATA08
114.00E-3
544.00E-9
130.00E-12 # User Coax Cbl L [/m]
DATA09
0.00E-3
0.00E-9
1.20E-12
# Stray Capacitance
# END of Data
The lines DATA05 to DATA08 should be modified for each measurement
environment. See Table 3-9. Do not modify the other lines.
Table 3-9
Compensation Coefficients and Modifications
Compensation
coefficients
C2H
(DATA05)
C2L
(DATA06)
Modifications of data file
For the connector plate, change the R, L, C values in the lines.
The value must be changed to the R, L, C values of the
C2H (DATA05) path and the C2L (DATA06) path (triaxial
cable with connector plate) shown in Figure 3-22.
For Keysight B2220A probe card interface, do not modify the
lines.
C3H
(DATA07)
C3L
(DATA08)
Change the R, L, C values in the lines. The value must be
changed to the R, L, C values of the C3H (DATA07) path and
the C3L (DATA08) path shown in Figure 3-22.
For the connector plate, the coaxial cable with positioner will
be the appropriate path.
For Keysight B2220A probe card interface, the probe card will
be the appropriate path.
3- 54
Keysight B1500A User’s Guide, Ed ition 14
Installation
Capacitance Compensation When Using Switching Matrix
2. Measure the R, L, C values of the for C2H (DATA05), C2L (DATA06),
C3H (DATA07), and C3L (DATA08) by using the MFCMU. See “To obtain
compensation coefficients” on page 3-56.
After the measurements, calculate the per meter value of the R, L, C, and record
them into the following table.
Compensation
coefficients
Explanation
R ()
L (H)
C (F)
C2H
(DATA05)
C2L
(DATA06)
C3H
(DATA07)
C3L
(DATA08)
3. Launch a text editor and open the compensation data file created at step 1.
Change the R, L, C values of the C2H (DATA05), C2L (DATA06),
C3H (DATA07), and C3L (DATA08) lines to the values recorded at step 2.
Do not change any other lines.
4. Save the file as your compensation data file (e.g. C:\temp\my_env_1.txt).
To perform the capacitance compensation, enter the file name of the
compensation data file to the User Compensation Data File field of the Extended
Configuration dialog box, and execute the measurement.
Before starting measurement, perform the CMU calibration. For details, see
Keysight EasyEXPERT User’s Guide.
Keysight B1500A User’s Guide, Ed ition 14
3- 55
Installation
Capacitance Compensation When Using Switching Matrix
To obtain compensation coefficients
Obtain the compensation coefficients as shown below.
1. Select the measurement frequency (Fmeas) used for the capacitance
measurement of a device under test (DUT), and set it to the MFCMU. The
coefficients must be measured at the same frequency.
2. Perform the MFCMU open calibration at the measurement terminal. Optionally,
perform short calibration if you want.
3. See Table 3-10 and Figure 3-23, and set the MFCMU.
4. Connect the path/cable corresponding to C3H (DATA07) shown in Figure 3-22
to the MFCMU. Then measure and record the R, L, and C values.
5. Connect the path/cable corresponding to C3L (DATA08) to the MFCMU. Then
measure and record the R, L, and C values.
6. If you use the connector plate, perform the following procedure.
a. Connect the path/cable corresponding to C2H (DATA05) to the MFCMU.
Then measure and record the R, L, and C values.
b. Connect the path/cable corresponding to C2L (DATA06) to the MFCMU.
Then measure and record the R, L, and C values.
Table 3-10
R, L, C Measurement Conditions
Parameter
Frequency
Function
Terminals
R
1 kHz to 5 MHz a

A and B
L
SERIES
see note b
C
PARALLEL
A and C
a. R, L, C of all coefficients must be measured with the same frequency setting.
b. For triaxial cable, connect B to F directly, and measure L between A and E.
For coaxial cable, ignore E and F, and connect B to D directly, and measure
L between A and C.
Figure 3-23
Compensation Coefficient Measurement Terminals of Extended Cables
GUARD (C)
GROUND (E)
GROUND (F)
GUARD (D)
Insulator
FORCE or SENSE (A)
3- 56
Triaxial Cable
FORCE or SENSE (B)
Keysight B1500A User’s Guide, Ed ition 14
Installation
Capacitance Compensation When Using Switching Matrix
Table 3-11
Template Compensation Data Files for B2200A/B2201A
Measurement environment that template targets
File namea
<path>\b2210a\pcif\triax\3m.data
Switch
module
Cableb
DUT
interfacec
Coefficients to
be modified
B2210A
16494A-002
B2220A
C3H and C3L
16495F/G
C2H, C2L,
C3H, and C3L
B2220A
C3H and C3L
16495F/G
C2H, C2L,
C3H, and C3L
<path>\b2210a\pcif\triax\4m.data
16494A-005
<path>\b2210a\pcif\kelvin\3m.data
16494C-002
<path>\b2210a\pcif\kelvin\4m.data
16494C-005
<path>\b2210a\cable\triax\1_5m.data
16494A-001
<path>\b2210a\cable\triax\3m.data
16494A-002
<path>\b2210a\cable\triax\4m.data
16494A-005
<path>\b2210a\cable\kelvin\1_5m.data
16494B-001
<path>\b2210a\cable\kelvin\3m.data
16494B-002
<path>\b2210a\cable\kelvin\4m.data
16494C-005
<path>\b2211a\pcif\triax\3m.data
B2211A
16494A-002
<path>\b2211a\pcif\triax\4m.data
16494A-005
<path>\b2211a\pcif\kelvin\3m.data
16494C-002
<path>\b2211a\pcif\kelvin\4m.data
16494C-005
<path>\b2211a\cable\triax\1_5m.data
16494A-001
<path>\b2211a\cable\triax\3m.data
16494A-002
<path>\b2211a\cable\triax\4m.data
16494A-005
<path>\b2211a\cable\kelvin\1_5m.data
16494B-001
<path>\b2211a\cable\kelvin\3m.data
16494B-002
<path>\b2211a\cable\kelvin\4m.data
16494C-005
a. <path>: \Program Files\Agilent\B1500\EasyEXPERT\B220xA\ccdata
b. Model number of the cable connected between the switch module and the DUT interface.
c. Keysight B2220A probe card interface or Keysight 16495F/G connector plate.
Keysight B1500A User’s Guide, Ed ition 14
3- 57
Installation
Maintenance
Maintenance
Maintenance should be performed periodically to keep the instrument in good
condition.
Cleaning
Before performing cleaning, turn off the instrument, and disconnect power cable
from the rear panel. Use a dry cloth to clean the external case parts.
To prevent electrical shock, do not perform cleaning when the instrument is turned
on, and do not use a wet cloth.
Self-test and Diagnostics
This instrument provides the following functions to check the operation. Perform
the following functions as necessary. Open the measurement terminals to perform
self-test, self-calibration, or diagnostics.
•
Self-test
•
Self-calibration
•
Diagnostics
If problems arise, contact Keysight Technologies. For details, see Keysight
EasyEXPERT User’s Guide.
NOTE
Interlock Open/Close test and High Voltage LED test
Interlock function limits the maximum output voltage to ± 42 V when the
measurement terminal is touchable. For safety, this function must be checked before
using the B1500A after power on at least once a day by performing the diagnostics.
Calibration
Calibration and adjustments must be performed periodically so that the instruments
satisfy the specifications, and keep a good condition. It is recommended to perform
the calibration once a year at least. For the calibration and adjustments, contact
Keysight Technologies. Trained service personnel will perform the calibration and
adjustments. Also see Keysight EasyEXPERT User’s Guide.
3- 58
Keysight B1500A User’s Guide, Ed ition 14
Installation
About Plug-in Modules
About Plug-in Modules
This section describes the following notices about plug-in modules.
•
“Module Type and Locations”
•
“To Interconnect SPGUs”
•
“To Interconnect WGFMUs”
•
“About Module Installation”
Module Type and Locations
Module locations when the B1500A is shipped from the factory are shown in Table
3-12. This table shows the relative locations by the module types.
If the SPGUs are installed, the SPGUs must be installed in the slots from the slot
number 1. And if the SPGU and the WGFMU are not installed and the HPSMUs are
installed, the HPSMUs must be installed in the slots from the slot number 1. Then
the same type of modules must be installed in the contiguous slots.
For example, if the module configuration is two HPSMU, two MPSMU, and one
CMU, the B1500A will be shipped with the HPSMUs of the slots 1 to 4, the
MPSMUs of the slots 5 to 6, the CMU of the slot 7, and the blank panels of the slots
8 to 10.
Table 3-12
Module Installation Rule
Slot Number and Location
10
:
:
:
:
:
:
:
:
:
1
0
top
:
:
:
:
:
:
:
:
:
:
:
bottom
Module Type
B1514A Medium Current SMU (MCSMU)
B1520A Multi Frequency CMU
B1511A Medium Power SMU (MPSMU)
B1511B Medium Power SMU (MPSMU)
B1517A High Resolution SMU (HRSMU)
B1510A High Power SMU (HPSMU)
B1530A WGFMU
B1525A High Voltage SPGU
GNDU/ADC (always installed)
Keysight B1500A User’s Guide, Ed ition 14
3- 59
Installation
About Plug-in Modules
To Interconnect SPGUs
If multiple SPGUs have been installed, connect the SPGUs by using the following
parts furnished with the SPGU. See Figure 3-24.
Figure 3-24
•
SPGU Sync cable, 16493Q-001, (number of SPGUs -1)2 ea.
•
RF connector cap, 1253-7431, 4 ea.
SPGU Module Connection Example, Four Modules
RF connector cap
SPGU Sync cable
Slave SPGU
Master SPGU
Ref In
Trig Out
Ref Out
Output 2
Sync In
Sync Out
Output 1
If multiple SPGUs have been installed, connect the SPGUs as shown in Figure 3-24.
This connection makes it possible to perform the synchronous output by the
multiple SPGU channels. In this figure, the master SPGU is the module which
outputs the reference signal and the slave SPGUs are the modules which follow to
the reference signal.
Connect the RF connector cap to the Ref In and Sync In connectors on the master
SPGU and the Ref Out and Sync Out connectors on the last slave SPGU.
The Trig Out terminal must be connected to the trigger input terminal of the external
equipment to make the synchronized operation of it.
CAUTION
Connect the Ref Out/In, Sync Out/In, and Trig Out terminals to the specified
terminal properly. Connecting to the other terminal may result in damage to the
SPGU.
NOTE
The B1500A does not support the synchronized operation between SPGU and
WGFMU.
3- 60
Keysight B1500A User’s Guide, Ed ition 14
Installation
About Plug-in Modules
To Interconnect WGFMUs
If multiple WGFMUs have been installed, connect the WGFMUs by using the
following cable furnished with the WGFMU. See Figure 3-25.
•
Figure 3-25
WGFMU Sync cable, 16493R-803, number of WGFMUs -1 ea.
WGFMU Module Connection Example, Four Modules
WGFMU Sync cable
open
Slave WGFMU
open
Master WGFMU
Trig Out
Ch 1
Sync Out
Sync In
Ch 2
If multiple WGFMUs have been installed, connect the WGFMUs as shown in
Figure 3-25. This connection makes it possible to perform the synchronous output
by the multiple WGFMU channels. In this figure, the master WGFMU is the module
which outputs the reference signal and the slave WGFMUs are the modules which
follow to the reference signal.
Open the Sync In connector on the master WGFMU and the Sync Out connector on
the last slave WGFMU.
The Trig Out terminal must be connected to the trigger input terminal of the external
equipment to make the synchronized operation of it.
CAUTION
Connect the Sync Out/In, and Trig Out terminals to the specified terminal properly.
Connecting to the other terminal may result in damage to the WGFMU.
NOTE
The B1500A does not support the synchronized operation between SPGU and
WGFMU.
Keysight B1500A User’s Guide, Ed ition 14
3- 61
Installation
About Plug-in Modules
About Module Installation
Module installation must be carried out at a Keysight Technologies service center.
Contact Keysight Technologies for the module installation. Then send the following
equipment and accessories to Keysight Technologies.
•
B1500A
•
Plug-in modules to be installed
•
ASU, for installing the exclusive SMU or retrofitting ASU only
•
Connection cable between ASU and SMU, for installing the exclusive SMU or
retrofitting ASU only
•
RSU, for installing WGFMU
•
Connection cable between RSU and WGFMU, for installing WGFMU
For returning ASU or RSU, do not forget to notify the combination of the unit,
connection cable, and module channel.
WARNING
To prevent electrical shock, turn the instrument off and remove the power
cable before removing the connection cables.
NOTE
About B1500A which supports SPGU and WGFMU
SPGU and WGFMU are supported by the B1500A serial numbered JP40Nxxxxx and
later. The other B1500A needs the mainframe upgrade to support the module.
Contact Keysight Technologies to upgrade the B1500A.
NOTE
Module locations after servicing
After the module installation, upgrade, and so on, the B1500A will be returned with
the module configuration decided by the rule shown in Table 3-12. If you want to
change the module locations, consult the service personnel before servicing.
3- 62
Keysight B1500A User’s Guide, Ed ition 14
4
Specifications
Specifications
This chapter describes the specifications and supplemental characteristics for
Keysight B1500A Semiconductor Device Analyzer and its associated modules.
The specifications are the standards against which the B1500A and its associated
modules are tested. When the B1500A and any of its associated modules are shipped
from the factory, they meet the specifications. The “supplemental” information and
“typical” entries in the following specifications are not warranted, but provide
useful information about the functions and performance of the instrument.
This chapter contains the following sections.
•
“Hardware”
•
“Specification Conditions”
•
“Ground Unit (GNDU)”
•
“MPSMU/HRSMU”
•
“ASU”
•
“HPSMU”
•
“MCSMU”
•
“SMU Common Specifications”
•
“SMU Supplemental Characteristics”
•
“MFCMU”
•
“SCUU/GSWU”
•
“HV-SPGU”
•
“WGFMU/RSU”
•
“EasyEXPERT Software”
•
“Furnished Software”
•
“General Specifications”
4- 2
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
Hardware
Specification Conditions
The measurement and output accuracy are specified at the rear panel connector
terminals when referenced to the Zero Check terminal. The B1530A WGFMU
measurement and output accuracy are specified at the output terminal of the RSU.
Accuracy is specified under the following conditions:
1. Temperature: 23 C ± 5 C
2. Humidity: 20 % to 60 %
3. After 40 minutes warm-up followed by self-calibration
4. Ambient temperature change less than ± 1 C after self-calibration execution,
not applicable for MFCMU and WGFMU
5. Measurement made within one hour after self-calibration execution,
not applicable for MFCMU and WGFMU
6. Calibration period: 1 year
7. SMU integration time setting:
1 PLC (1 nA to 1 A range, voltage range)
20 PLC (100 pA range)
50 PLC (1 pA to 10 pA range)
Averaging of high speed ADC: 128 samples per 1 PLC
8. SMU filter: ON for HPSMU, MPSMU, and HRSMU
9. SMU measurement terminal connection: Kelvin connection
10. WGFMU load capacitance: 25 pF or less
NOTE
Keysight Technologies is responsible for removing, installing, and replacing the
B1500A modules. Contact your nearest Keysight Technologies to install and
calibrate the B1500A modules.
Keysight B1500A User’s Guide, Ed ition 14
4- 3
Specifications
Hardware
Supported Plug-in Modules
The B1500A supports ten slots for the following plug-in modules.
B1510A High power source/monitor unit (HPSMU).
•
Slots occupied: 2
•
Range up to 200 V/1 A with 4-quadrant operation
•
Minimum measurement resolution 10 fA/2 V
•
Spot, sweep, and more measurement capabilities
•
Sampling (time domain) measurement from 100 s
•
Pulse measurement from 500 s pulse width
•
Accurate Quasi-Static Capacitance Voltage (QSCV) measurement with leakage
current compensation
B1511B Medium power source/monitor unit (MPSMU).
•
Slots occupied: 1
•
Range up to 100 V/0.1 A with 4-quadrant operation
•
Minimum measurement resolution 10 fA/0.5 V
•
Optional ASU (atto-sense and switch unit) for 100 aA resolution and IV/CV
switching capability
•
Spot, sweep, and more measurement capabilities
•
Sampling (time domain) measurement from 100 s
•
Pulse measurement from 500 s pulse width
•
Accurate Quasi-Static Capacitance Voltage (QSCV) measurement with leakage
current compensation
B1517A High resolution source/monitor unit (HRSMU).
•
Slots occupied: 1
•
Range up to 100 V/0.1 A with 4-quadrant operation
•
Minimum measurement resolution 1 fA/0.5 V
•
Optional ASU (atto-sense and switch unit) for 100 aA resolution and IV/CV
switching capability
4- 4
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
•
Spot, sweep, and more measurement capabilities
•
Sampling (time domain) measurement from 100 s
•
Pulse measurement from 500 s pulse width
•
Accurate Quasi-Static Capacitance Voltage (QSCV) measurement with leakage
current compensation
B1514A Medium current source/monitor unit (MCSMU).
•
Slots occupied: 1
•
Range up to 30 V/1 A pulsed (0.1 A DC) with 4-quadrant operation
•
Pulse measurement from 50 s pulse width with 2 s resolution
•
Oscilloscope view for voltage/current waveform monitoring
•
Minimum measurement resolution 10 pA/0.2 V
B1520A Multi-frequency capacitance measurement unit (MFCMU).
•
Slots occupied: 1
•
AC impedance measurement (C-V, C-f, C-t)
•
1 kHz to 5 MHz frequency range with minimum 1 mHz frequency resolution
•
25 V built-in DC bias and 100 V DC bias with SMU and SCUU (SMU CMU
Unify Unit)
•
Easy and fast yet accurate IV and CV automated connection change by SCUU
B1525A High voltage semiconductor pulse generator unit (HV-SPGU).
•
Slots occupied: 1
•
High voltage output up to ± 40 V applicable for non-volatile memory testing
•
Two-level and three-level pulse capability by single channel
•
Flexible arbitrary waveform generation with 10 ns resolution (arbitrary linear
waveform generation function)
•
Two channels per module
B1530A Waveform generator / fast measurement unit (WGFMU).
•
Slots occupied: 1
Keysight B1500A User’s Guide, Ed ition 14
4- 5
Specifications
Hardware
•
Ultra-fast IV measurement capability for the pulsed IV and transient IV such as
NBTI/PBTI, RTN, etc.
•
Waveform generation with 10 ns programmable resolution
•
Simultaneous high-speed IV measurement capability (200 MSa/s, 5 ns sampling
rate)
•
10 V peak-to-peak output
•
No load line effect accurate pulsed IV measurement by dynamic SMU
technology
Maximum Module Configuration
The B1500A can contain any combination of the following module. Then the total
power consumption of all SMU modules cannot exceed 84 W.
•
Up to 10 MPSMU
•
Up to 10 HRSMU
•
Up to 4 HPSMU
•
Up to 4 MCSMU
•
One MFCMU
•
Up to 5 HV-SPGU
•
Up to 5 WGFMU
When one or more WGFMU modules are installed in the B1500A mainframe, the
following table applies. Multiply the values given below by the number of installed
modules of that type and add the products together. The sum of the products must be
less than or equal to 59 for the configuration to be permissible.
MPSMU
2
HRSMU
2
HPSMU
14
MCSMU
5
MFCMU
7
HV-SPGU
12
WGFMU
10
Maximum Voltage between Common and Ground
 ± 42 V
4- 6
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
Ground Unit (GNDU)
The GNDU is furnished standard with the mainframe.
•
Output voltage: 0 V ± 100 V
•
Maximum sink current: ± 4.2 A
•
Output terminal/connection: Triaxial connector, Kelvin (remote sensing)
•
Load capacitance: 1 F, supplemental characteristics
•
Cable resistance: supplemental characteristics
Terminal
Cable resistance
Sense
 10 
Force
< 1  (Is  1.6 A)
< 0.7  (1.6 A < Is  2.0 A)
< 0.35  (2.0 A < Is  4.2 A)
where Is is the current being sunk by the GNDU.
Keysight B1500A User’s Guide, Ed ition 14
4- 7
Specifications
Hardware
MPSMU/HRSMU
MPSMU: Medium Power Source/Monitor Unit
HRSMU: High Resolution Source/Monitor Unit
•
Voltage range, resolution, and accuracy
See Table 4-1 for high resolution ADC and Table 4-3 for high speed ADC.
•
Current range, resolution, and accuracy
See Table 4-2 for high resolution ADC and Table 4-4 for high speed ADC.
Specified measurement resolution is limited by fundamental noise limits.
Minimum displayed resolution is 1 aA at 1 pA range by 6 digits. Measurements
made in the lower ranges can be greatly impacted by vibrations and shocks.
These specifications assume an environment free of these factors.
•
Power consumption
Voltage source mode:
Voltage range (V)
Power consumptiona (W)
0.5
Ic  20
2
Ic  20
5
Ic  20
20
Ic  20
40
Ic  40
100
Ic  100
a. Ic is the current compliance setting.
Current source mode:
Voltage compliancea (V)
Power consumptionb (W)
Vc  20
Io  20
20 < Vc  40
Io  40
40 < Vc  100
Io  100
a. Vc is the voltage compliance setting.
b. Io is the output current.
4- 8
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
Table 4-1
Voltage range, resolution, and accuracy (high resolution ADC)
Range
Force
resolution
Measurement
resolution
Force accuracy
±(%+mV)a
Measurement accuracy
±(%+mV)a
Maximum
current
±0.5 V
25 V
0.5 V
±(0.018 + 0.15)
±(0.01 + 0.12)
100 mA
±2 V
100 V
2 V
±(0.018 + 0.4)
±(0.01 + 0.14)
100 mA
±5 V
250 V
5 V
±(0.018 + 0.75)
±(0.009 + 0.25)
100 mA
±20 V
1 mV
20 V
±(0.018 + 3)
±(0.009 + 0.9)
100 mA
±40 V
2 mV
40 V
±(0.018 + 6)
±(0.01 + 1)
b
±100 V
5 mV
100 V
±(0.018 + 15)
±(0.012 + 2.5)
a. ±(% of output/measured value + offset value in mV)
b. 100 mA (Vo  20 V), 50 mA (20 V < Vo  40 V), 20 mA (40 V < Vo), Vo is the output voltage.
Table 4-2
Current range, resolution, and accuracy (high resolution ADC)
Range
Force
resolution
Measurement
resolution
Force accuracy ±(%+A+A)a
Measurement accuracy
±(%+A+A)a
Maximum
voltage
±1 pAb
1 fA
0.1 fA
±(0.9+15E-15)
±(0.9+12E-15)
100 V
±10 pAc
5 fA
0.4 fAb / 1 fA
±(0.46+3E-14+VoE-17)
±(0.46+15E-15+Vo1E-17)
100 V
±100 pAc
5 fA
0.5 fAb / 2 fA
±(0.3+1E-13+VoE-16)
±(0.3+3E-14+Vo1E-16)
100 V
±1 nA
50 fA
10 fA
±(0.1+3E-13+Vo1E-15)
±(0.1+2E-13+Vo1E-15)
100 V
±10 nA
500 fA
10 fA
±(0.1+3E-12+Vo1E-14)
±(0.1+1E-12+Vo1E-14)
100 V
±100 nA
5 pA
100 fA
±(0.05+3E-11+Vo1E-13)
±(0.05+2E-11+Vo1E-13)
100 V
±1 A
50 pA
1 pA
±(0.05+3E-10+Vo1E-12)
±(0.05+1E-10+Vo1E-12)
100 V
±10 A
500 pA
10 pA
±(0.05+3E-9+Vo1E-11)
±(0.04+2E-9+Vo1E-11)
100 V
±100 A
5 nA
100 pA
±(0.035+15E-9+Vo1E-10)
±(0.03+3E-9+Vo1E-10)
100 V
±1 mA
50 nA
1 nA
±(0.04+15E-8+Vo1E-9)
±(0.03+6E-8+Vo1E-9)
100 V
±10 mA
500 nA
10 nA
±(0.04+15E-7+Vo1E-8)
±(0.03+2E-7+Vo1E-8)
100 V
±100 mA
5 A
100 nA
±(0.045+15E-6+Vo1E-7)
±(0.04+6E-6+Vo1E-7)
d
a.
b.
c.
d.
±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
Applicable if Keysight E5288A Atto Sense and Switch Unit (ASU) is used.
Not applicable for the MPSMU without ASU.
100 V (Io  20 mA), 40 V (20 mA < Io  50 mA), 20 V (50 mA < Io), Io is the output current.
Keysight B1500A User’s Guide, Ed ition 14
4- 9
Specifications
Hardware
Table 4-3
Voltage range, resolution, and accuracy (high speed ADC)
Range
Force
resolution
Measurement
resolution
Force accuracy
±(%+mV)a
Measurement accuracy
±(%+mV)a
Maximum
current
±0.5 V
25 V
25 V
±(0.018 + 0.15)
±(0.01 + 0.25)
100 mA
±2 V
100 V
100 V
±(0.018 + 0.4)
±(0.01 + 0.7)
100 mA
±5 V
250 V
250 V
±(0.018 + 0.75)
±(0.01 + 2)
100 mA
±20 V
1 mV
1 mV
±(0.018 + 3)
±(0.01 + 4)
100 mA
±40 V
2 mV
2 mV
±(0.018 + 6)
±(0.015 + 8)
b
±100 V
5 mV
5 mV
±(0.018 + 15)
±(0.02 + 20)
a. ±(% of output/measured value + offset value in mV)
b. 100 mA (Vo  20 V), 50 mA (20 V < Vo  40 V), 20 mA (40 V < Vo), Vo is the output voltage.
Table 4-4
Current range, resolution, and accuracy (high speed ADC)
Range
Force
resolution
Measurement
resolution
Force accuracy ±(%+A+A)a
Measurement accuracy
±(%+A+A)a
Maximum
voltage
±1 pAb
1 fA
0.1 fA
±(0.9+15E-15)
±(1.8+12E-15)
100 V
±10 pAc
5 fA
1 fA
±(0.46+3E-14+VoE-17)
±(0.5+15E-15+Vo1E-17)
100 V
±100 pAc
5 fA
5 fA
±(0.3+1E-13+VoE-16)
±(0.5+4E-14+Vo1E-16)
100 V
±1 nA
50 fA
50 fA
±(0.1+3E-13+Vo1E-15)
±(0.25+3E-13+Vo1E-15)
100 V
±10 nA
500 fA
500 fA
±(0.1+3E-12+Vo1E-14)
±(0.25+2E-12+Vo1E-14)
100 V
±100 nA
5 pA
5 pA
±(0.05+3E-11+Vo1E-13)
±(0.1+2E-11+Vo1E-13)
100 V
±1 A
50 pA
50 pA
±(0.05+3E-10+Vo1E-12)
±(0.1+2E-10+Vo1E-12)
100 V
±10 A
500 pA
500 pA
±(0.05+3E-9+Vo1E-11)
±(0.05+2E-9+Vo1E-11)
100 V
±100 A
5 nA
5 nA
±(0.035+15E-9+Vo1E-10)
±(0.05+2E-8+Vo1E-10)
100 V
±1 mA
50 nA
50 nA
±(0.04+15E-8+Vo1E-9)
±(0.04+2E-7+Vo1E-9)
100 V
±10 mA
500 nA
500 nA
±(0.04+15E-7+Vo1E-8)
±(0.04+2E-6+Vo1E-8)
100 V
±100 mA
5 A
5 A
±(0.045+15E-6+Vo1E-7)
±(0.1+2E-5+Vo1E-7)
d
a.
b.
c.
d.
±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
Applicable if Keysight E5288A Atto Sense and Switch Unit (ASU) is used.
Not applicable for the MPSMU without ASU.
100 V (Io  20 mA), 40 V (20 mA < Io  50 mA), 20 V (50 mA < Io), Io is the output current.
4- 10
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
ASU
ASU: Atto Sense and Switch Unit
•
Maximum voltage, AUX path
100 V (AUX input to AUX common)
100 V (AUX input to circuit common)
42 V (AUX common to circuit common)
•
Maximum current, AUX path
0.5 A (AUX input to Force output)
•
Band width (at -3 dB), AUX port
30 MHz, supplemental characteristics
NOTE
Connect ASU to dedicated SMU
The specifications of the ASU are guaranteed while it is connected to the exclusive
SMU which is connected together when the calibration is performed. Confirm the
serial number of the ASU, and connect it properly.
NOTE
Connection path control
Disable source output of the instruments connected to the ASU inputs before
controlling the ASU connection path.
Keysight B1500A User’s Guide, Ed ition 14
4- 11
Specifications
Hardware
HPSMU
HPSMU: High Power Source/Monitor Unit
•
Voltage range, resolution, and accuracy
See Table 4-5 for high resolution ADC and Table 4-7 for high speed ADC.
•
Current range, resolution, and accuracy
See Table 4-6 for high resolution ADC and Table 4-8 for high speed ADC.
Specified measurement resolution is limited by fundamental noise limits.
•
Power consumption
Voltage source mode:
Voltage range (V)
Power consumptiona (W)
2
Ic  20
20
Ic  20
40
Ic  40
100
Ic  100
200
Ic  200
a. Ic is the current compliance setting.
Current source mode:
Voltage compliancea (V)
Power consumptionb (W)
Vc  20
Io  20
20 < Vc  40
Io  40
40 < Vc  100
Io  100
100 < Vc  200
Io  200
a. Vc is the voltage compliance setting.
b. Io is the output current.
4- 12
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
Table 4-5
Voltage range, resolution, and accuracy (high resolution ADC)
Range
Force
resolution
Measurement
resolution
Force accuracy
±(%+mV)a
Measurement accuracy
±(%+mV)a
Maximum
current
±2 V
100 V
2 V
±(0.018 + 0.4)
±(0.01 + 0.14)
1A
±20 V
1 mV
20 V
±(0.018 + 3)
±(0.009 + 0.9)
1A
±40 V
2 mV
40 V
±(0.018 + 6)
±(0.01 + 1)
500 mA
±100 V
5 mV
100 V
±(0.018 + 15)
±(0.012 + 2.5)
125 mA
±200 V
10 mV
200 V
±(0.018 + 30)
±(0.014 + 2.8)
50 mA
a. ±(% of output/measured value + offset value in mV)
Table 4-6
Current range, resolution, and accuracy (high resolution ADC)
Measurement accuracy
±(%+A+A)a
Maximum
voltage
±(0.1+3E-13+Vo1E-15)
±(0.1+2E-13+Vo1E-15)
200 V
10 fA
±(0.1+3E-12+Vo1E-14)
±(0.1+1E-12+Vo1E-14)
200 V
5 pA
100 fA
±(0.05+3E-11+VoE-13)
±(0.05+2E-11+Vo1E-13)
200 V
±1 A
50 pA
1 pA
±(0.05+3E-10+VoE-12)
±(0.05+1E-10+Vo1E-12)
200 V
±10 A
500 pA
10 pA
±(0.05+3E-9+Vo1E-11)
±(0.04+2E-9+Vo1E-11)
200 V
±100 A
5 nA
100 pA
±(0.035+15E-9+VoE-10)
±(0.03+3E-9+Vo1E-10)
200 V
±1 mA
50 nA
1 nA
±(0.04+15E-8+Vo1E-9)
±(0.03+6E-8+Vo1E-9)
200 V
±10 mA
500 nA
10 nA
±(0.04+15E-7+VoE-8)
±(0.03+2E-7+Vo1E-8)
200 V
±100 mA
5 A
100 nA
±(0.045+15E-6+VoE-7)
±(0.04+6E-6+Vo1E-7)
b
±1 A
50 A
1 A
±(0.4+3E-4+VoE-6)
±(0.4+15E-5+Vo1E-6)
Range
Force
resolution
Measurement
a
resolution Force accuracy ±(%+A+A)
±1 nA
50 fA
10 fA
±10 nA
500 fA
±100 nA
a. ±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output
voltage in V.
b. 200 V (Io  50 mA), 100 V (50 mA < Io  125 mA), 40 V (125 mA < Io  500 mA),
20 V (500 mA < Io  1 A), Io is the output current.
Keysight B1500A User’s Guide, Ed ition 14
4- 13
Specifications
Hardware
Table 4-7
Voltage range, resolution, and accuracy (high speed ADC)
Range
Force
resolution
Measurement
resolution
Force accuracy
±(%+mV)a
Measurement accuracy
±(%+mV)a
Maximum
current
±2 V
100 V
100 V
±(0.018 + 0.4)
±(0.01 + 0.7)
1A
±20 V
1 mV
1 mV
±(0.018 + 3)
±(0.01 + 4)
1A
±40 V
2 mV
2 mV
±(0.018 + 6)
±(0.015 + 8)
500 mA
±100 V
5 mV
5 mV
±(0.018 + 15)
±(0.02 + 20)
125 mA
±200 V
10 mV
10 mV
±(0.018 + 30)
±(0.035 + 40)
50 mA
a. ±(% of output/measured value + offset value in mV)
Table 4-8
Current range, resolution, and accuracy (high speed ADC)
Measurement accuracy
±(%+A+A)a
Maximum
voltage
±(0.1+3E-13+Vo1E-15)
±(0.25+3E-13+Vo1E-15)
200 V
500 fA
±(0.1+3E-12+Vo1E-14)
±(0.25+2E-12+Vo1E-14)
200 V
5 pA
5 pA
±(0.05+3E-11+VoE-13)
±(0.1+2E-11+Vo1E-13)
200 V
±1 A
50 pA
50 pA
±(0.05+3E-10+VoE-12)
±(0.1+2E-10+Vo1E-12)
200 V
±10 A
500 pA
500 pA
±(0.05+3E-9+Vo1E-11)
±(0.05+2E-9+Vo1E-11)
200 V
±100 A
5 nA
5 nA
±(0.035+15E-9+VoE-10)
±(0.05+2E-8+Vo1E-10)
200 V
±1 mA
50 nA
50 nA
±(0.04+15E-8+Vo1E-9)
±(0.04+2E-7+Vo1E-9)
200 V
±10 mA
500 nA
500 nA
±(0.04+15E-7+VoE-8)
±(0.04+2E-6+Vo1E-8)
200 V
±100 mA
5 A
5 A
±(0.045+15E-6+VoE-7)
±(0.1+2E-5+Vo1E-7)
b
±1 A
50 A
50 A
±(0.4+3E-4+VoE-6)
±(0.5+3E-4+Vo1E-6)
Range
Force
resolution
Measurement
a
resolution Force accuracy ±(%+A+A)
±1 nA
50 fA
50 fA
±10 nA
500 fA
±100 nA
a. ±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output
voltage in V.
b. 200 V (Io  50 mA), 100 V (50 mA < Io  125 mA), 40 V (125 mA < Io  500 mA),
20 V (500 mA < Io  1 A), Io is the output current.
4- 14
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
MCSMU
Medium Current Source/Monitor Unit
•
Voltage range, resolution, and accuracy
See Table 4-9.
•
Current range, resolution, and accuracy
See Table 4-10.
•
Power consumption
Voltage source mode:
Voltage range (V)
Power consumptiona (W)
0.2
Ic  40
2
Ic  40
40
Ic  40
a. Ic is the current compliance setting.
Current source mode:
Voltage compliancea (V)
Power consumptionb (W)
Vc  0.2
Io  40
0.2 < Vc  2
Io  40
2 < Vc  40
Io  40
a. Vc is the voltage compliance setting.
b. Io is the output current.
Keysight B1500A User’s Guide, Ed ition 14
4- 15
Specifications
Hardware
Table 4-9
MCSMU voltage range, resolution, and accuracy
Range
Force
resolution
Measurement
resolution
Force accuracy
±(%+mV)a
Measurement accuracy
±(%+mV+mV)a
Maximum
current
±0.2 V
200 nV
200 nV
±(0.06+0.14)
±(0.06+0.14+Io0.05)
1A
±2 V
2 V
2 V
±(0.06+0.6)
±(0.06+0.6+Io0.5)
1A
±20 V
20 V
20 V
±(0.06+3)
±(0.06+3+Io5)
1A
±40 Vb
40 V
40 V
±(0.06+3)
±(0.06+3+Io10)
1A
a. ±(% of output/measured value + fixed offset + proportional offset), Io is the output current in A.
b. Maximum output voltage is 30 V.
Table 4-10
MCSMU current range, resolution, and accuracy
Measurement accuracy
±(%+A+A)a
Maximum
voltage
±(0.06+2E-9+Vo1E-10)
±(0.06+2E-9+Vo1E-10)
30 V
100 pA
±(0.06+2E-8+VoE-9)
±(0.06+2E-8+VoE-9)
30 V
1 nA
1 nA
±(0.06+2E-7+Vo1E-8)
±(0.06+2E-7+Vo1E-8)
30 V
±10 mA
10 nA
10 nA
±(0.06+2E-6+VoE-7)
±(0.06+2E-6+VoE-7)
30 V
±100 mA
100 nA
100 nA
±(0.06+2E-5+VoE-6)
±(0.06+2E-5+VoE-6)
30 V
±1 A b
1 A
1 A
±(0.4+2E-4+VoE-5)
±(0.4+2E-4+VoE-5)
30 V
Range
Force
resolution
Measurement
a
resolution Force accuracy ±(%+A+A)
±10 A
10 pA
10 pA
±100 A
100 pA
±1 mA
a. ±(% of output/measured value + fixed offset + proportional offset), Vo is the output voltage in V.
b. Pulse mode only. The maximum value of the base current during pulsing is ±50 mA.
4- 16
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
SMU Common Specifications
•
Output terminal/connection
Dual triaxial connector, Kelvin (remote sensing)
•
Voltage/current compliance (limiting)
The SMU can limit output voltage or current to prevent damaging the device
under test.
•
Voltage compliance:
0 V to ± 100 V (MPSMU, HRSMU)
0 V to ± 200 V (HPSMU)
0 V to ± 30 V (MCSMU)
•
Current compliance:
± 10 fA to ± 100 mA (HRSMU/MPSMU with ASU)
± 100 fA to ± 100 mA (HRSMU)
± 1 pA to ± 100 mA (MPSMU)
± 1 pA to ± 1 A (HPSMU)
± 10 nA to ± 1 A (MCSMU)
•
Compliance accuracy:
Same as the current or voltage set accuracy.
•
Pulsed measurement
Programmable pulse width, period, and delay:
For HPSMU, MPSMU, HRSMU
•
Width: 500 s to 2 s, 100 s resolution
•
Period: 5 ms to 5 s, 100 s resolution
Period  Width+2 ms (when Width  100 ms)
Period  Width+10 ms (when Width > 100 ms)
•
Delay: 0 s
Keysight B1500A User’s Guide, Ed ition 14
4- 17
Specifications
Hardware
For MCSMU
•
Width: 10 s to 100 ms (1 A range), 10 s to 2 s (10 A to 100 mA ranges),
2 s resolution
Recommended pulse width:  50 s (time to reach within 1 % of the final
value at resistive load  50 , 10 V step voltage, and 1 A compliance,
supplemental characteristics)
•
Period: 5 ms to 5 s, 100 s resolution
•
Pulse duty:
For 1 A range:  5 %
For 10 A to 100 mA ranges:
Period  Width+Delay+2 ms (when Width+Delay  100 ms)
Period  Width+Delay+10 ms (when Width+Delay > 100 ms)
•
•
Delay: 0 to (Period-Width) s, 2 s resolution
About measurement accuracy
•
RF electromagnetic field and SMU measurement accuracy
Voltage and current measurement accuracy may be affected by RF
electromagnetic field of strength over 3 V/m at frequencies 80 MHz to
1 GHz and 1.4 GHz to 2.0 GHz, and 1 V/m at frequencies 2.0 GHz to 2.7
GHz. The extent of this effect depends upon how the instrument is
positioned and shielded.
•
Induced RF field noise and SMU measurement accuracy
Voltage and current measurement accuracy can be affected by induced RF
field noise strengths greater than 3Vrms in the frequency range of 150 kHz
to 80 MHz. The extent of this effect depends upon how the instrument is
positioned and shielded.
4- 18
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
SMU Supplemental Characteristics
•
Current compliance setting accuracy (for opposite polarity)
For HPSMU, MPSMU, HRSMU
± (setting accuracy + 12 % of range), for 1 pA to 10 nA ranges
± (setting accuracy + 2.5 % of range), for 100 nA to 1 A ranges
For MCSMU
± (setting accuracy + 2.5 % of range)
•
SMU pulse setting accuracy (fixed measurement range)
For HPSMU, MPSMU, HRSMU
Width: ± (0.5 % + 50 s)
Period: ± (0.5 % + 100 s)
For MCSMU
Width: ± (0.1 % + 2 s)
Period: ± (0.1 % + 100 s)
•
Minimum pulse measurement time
For HPSMU, MPSMU, HRSMU: 16 s
For MCSMU: 2 s
•
Voltage source output resistance (Force line, Non-Kelvin connection)
0.2  (HPSMU)
0.3  (MPSMU, HRSMU)
•
Voltage measurement input resistance
For HPSMU, MPSMU, HRSMU:  1013 
For MCSMU:  109 
•
Current source output resistance
For HPSMU, MPSMU, HRSMU:  1013 
For MCSMU:  109 
Keysight B1500A User’s Guide, Ed ition 14
4- 19
Specifications
Hardware
•
Maximum allowable cable resistance (Kelvin connection)
For HPSMU, MPSMU, HRSMU: 10  (Sense), 10  (Force,  100 mA), 1.5 
(Force, > 100 mA)
For MCSMU: 10  (Sense), 1  (Force, between high and low)
•
Maximum allowable inductance
For MCSMU: 3 H (Force, with low force as shield)
•
Maximum load capacitance
For HPSMU, MPSMU, HRSMU
1000 pF, for 1 pA to 10 nA ranges
10 nF, for 100 nA to 10 mA ranges
100 F, for 100 mA and 1 A ranges
For MCSMU
12 nF, for 10 A to 10 mA ranges
100 F, for 100 mA and 1 A ranges
•
Maximum guard capacitance
900 pF (HPSMU, MPSMU, HRSMU)
660 pF (HRSMU/MPSMU with ASU)
•
Maximum shield capacitance
5000 pF (HPSMU, MPSMU, HRSMU)
3500 pF (HRSMU/MPSMU with ASU)
•
Noise characteristics
For HPSMU, MPSMU, HRSMU
Voltage source: 0.01 % of V range (rms.)
Current source: 0.1 % of I range (rms.)
For MCSMU
Voltage/Current source: 200 mV (0 to peak) max
Condition: filter ON for HPSMU, MPSMU, and HRSMU
4- 20
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
•
Overshoot (filter ON)
For HPSMU, MPSMU, HRSMU
Voltage source: 0.03 % of V range
Current source: 1 % of I range
For MCSMU
Voltage/Current source: 10 % of range
•
Range switching transient noise
Voltage ranging: 250 mV
Current ranging: 70 mV
Condition: filter ON for HPSMU, MPSMU, and HRSMU
•
Maximum guard offset voltage
± 1 mV (HPSMU)
± 3 mV (MPSMU, HRSMU)
± 4.2 mV (HRSMU/MPSMU with ASU, Iout  100 A)
•
Maximum slew rate
0.2 V/s (HPSMU, MPSMU, HRSMU)
1 V/s (MCSMU)
•
Maximum DC floating voltage
± 200 V DC between low force and common (MCSMU)
Keysight B1500A User’s Guide, Ed ition 14
4- 21
Specifications
Hardware
MFCMU
MFCMU: Multi Frequency Capacitance Measurement Unit
•
•
Measurement functions
•
Measurement parameters: Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D, Cs-Q,
Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs, Ls-D, Ls-Q, R-X, G-B, Z-, Y-
•
Ranging: Auto or fixed
•
Measurement terminal: Four-terminal pair configuration, four BNC (female)
connectors
•
Cable length: 1.5 m or 3 m, automatic identification of accessories
Test signal
•
Frequency
Range: 1 kHz to 5 MHz
Resolution: 1 mHz (minimum)
Accuracy: ± 0.008 %
•
Output signal level
Range: 10 mVrms to 250 mVrms
Resolution: 1 mVrms
Accuracy:
± (10.0 % + 1 mVrms) at the measurement port of the MFCMU
± (15.0 % + 1 mVrms) at the measurement port of the MFCMU cable (1.5 m
or 3.0 m)
•
Output impedance: 50 , typical
•
Signal level monitor
Range: 10 mVrms to 250 mVrms
Accuracy (open load):
± (10.0 % of reading + 1 mVrms) at the measurement port of the MFCMU
± (15.0 % of reading + 1 mVrms) at the measurement port of the MFCMU
cable (1.5 m or 3.0 m)
4- 22
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
•
DC bias function
•
DC bias
Range: 0 to ± 25 V
Resolution: 1 mV
Accuracy: ± (0.5 % + 5.0 mV) at the measurement port of the MFCMU or
the MFCMU cable (1.5 m or 3.0 m)
•
Maximum DC bias current, supplemental characteristics:
Impedance range ()
Maximum DC bias current (A)
50
1010-3
100
1010-3
300
1010-3
1103
110-3
3103
110-3
10103
10010-6
30103
10010-6
100103
1010-6
300103
1010-6
•
Output impedance: 50 , typical
•
DC bias monitor
Range: 0 to ± 25 V
Accuracy (open load): ± (0.2 % of reading + 10 mV) at the measurement
port of the MFCMU or the MFCMU cable (1.5 m or 3.0 m)
•
Sweep characteristics
•
Available sweep parameters: DC bias voltage, oscillator level, frequency
•
Sweep type: linear, log
•
Sweep mode: single, double
•
Sweep direction: up, down
•
Number of measurement points: maximum 1001
Keysight B1500A User’s Guide, Ed ition 14
4- 23
Specifications
Hardware
•
Measurement accuracy
Measurement accuracy at the measurement port of the MFCMU or the MFCMU
cable (1.5 m or 3.0 m)
•
|Z| accuracy: ± E (%)
•
 accuracy: ± E/100 (radian)
•
C accuracy:
± E (%) at Dx  0.1
± E(1+Dx2)1/2 (%) at Dx > 0.1
•
D accuracy:
± E/100 at Dx  0.1
± E(1+Dx)/100 at Dx > 0.1
•
G accuracy:
± E/Dx (%) at Dx  0.1
± E(1+Dx2)1/2/Dx (%) at Dx > 0.1
where,
Zx: Impedance measurement value ()
Dx: Measurement value of D
E = EP’ + (ZS’ / |Zx| + YO’ |Zx| )  100 (%)
EP’ = EPL + EPOSC + EP (%)
YO’ = YOL + YOSC + YO (S)
ZS’ = ZSL + ZOSC + ZS ()
For the parameter value, see Table 4-11 to Table 4-13. Calculation example of
the measurement accuracy is also shown in Table 4-14.
Specification conditions:
•
Temperature: 23 C ± 5 C
•
Integration time: 1 PLC or 16 PLC
4- 24
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
Table 4-11
Parameters EPOSC, ZOSC
Oscillator level
Vosc mV
EPOSC %
ZOSC m
125 < Vosc  250
0.03(250/Vosc-1)
5(250/Vosc-1)
64 < Vosc  125
0.03(125/Vosc-1)
5(125/Vosc-1)
32 < Vosc  64
0.03(64/Vosc-1)
5(64/Vosc-1)
Vosc  32
0.03(32/Vosc-1)
5(64/Vosc-1)
Vosc is oscillator level in mV.
Table 4-12
Parameters EPL, YOL, ZSL
Cable length
EPL %
YOL nS
ZSL m
1.5 m
0.02+3f/100
750f/100
5.0
3m
0.02+5f/100
1500f/100
5.0
f is frequency in MHz. If measurement cable is extended, open compensation,
short compensation, and load compensation must be performed.
Table 4-13
Parameters YOSC, YO, EP, ZS
YOSC nS
YO nS
EP %
ZS m
200k
1(125/Vosc-0.5)
1.5
0.095
5.0
200k < f  1M
2(125/Vosc-0.5)
3.0
0.095
5.0
1M < f  2M
2(125/Vosc-0.5)
3.0
0.28
5.0
2M < f
20(125/Vosc-0.5)
30.0
0.28
5.0
Frequency f Hz
1k  f 
Vosc is oscillator level in mV.
Keysight B1500A User’s Guide, Ed ition 14
4- 25
Specifications
Hardware
Table 4-14
Example of calculated C/G measurement accuracy
Frequency
Measured
Capacitance
C Accuracy a
Measured
Conductance
G Accuracy a
5 MHz
1 pF
± 0.61 %
 3 S
± 192 nS
10 pF
± 0.32 %
 31 S
± 990 nS
100 pF
± 0.29 %
 314 S
± 9 S
1 nF
± 0.32 %
 3 mS
± 99 S
1 pF
± 0.26 %
 628 nS
± 16 nS
10 pF
± 0.11 %
 6 S
± 71 nS
100 pF
± 0.10 %
 63 S
± 624 nS
1 nF
± 0.10 %
 628 S
± 7 S
10 pF
± 0.18 %
 628 nS
± 11 nS
100 pF
± 0.11 %
 6 S
± 66 nS
1 nF
± 0.10 %
 63 S
± 619 nS
10 nF
± 0.10 %
 628 S
± 7 S
100 pF
± 0.18 %
 628 nS
± 11 nS
1 nF
± 0.11 %
 6 S
± 66 nS
10 nF
± 0.10 %
 63 S
± 619 nS
100 nF
± 0.10 %
 628 S
± 7 S
100 pF
± 0.92 %
 63 nS
± 6 nS
1 nF
± 0.18 %
 628 nS
± 11 nS
10 nF
± 0.11 %
 6 S
± 66 nS
100 nF
± 0.10 %
 63 S
± 619 nS
1 MHz
100 kHz
10 kHz
1 kHz
a. The calculation examples are specified under the conditions Dx = 0.1, 1 PLC integration time,
30 mVrms test signal level, and at four-terminal pair port of MFCMU.
4- 26
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
SCUU/GSWU
SCUU: SMU CMU Unify Unit
GSWU: Guard Switch Unit
The SCUU multiplexes the outputs from two SMUs (MPSMUs and/or HRSMUs)
and the CMU. The SCUU outputs are two sets of Kelvin triaxial ports (Force and
Sense). The SCUU also allows the SMUs to act as DC bias sources in conjunction
with the CMU. Special cables are available to connect the SMUs and CMU with the
SCUU, and an auto-detect feature automatically compensates for the cable length
going to the SCUU.
The GSWU contains a relay that automatically opens for IV measurements and
closes for CV measurements, forming a guard return path to improve CV
measurement accuracy.
•
Supported SMU: MPSMU and HRSMU
•
SCUU
•
Inputs
Triaxial port: Force1, Sense1, Force2, and Sense2
BNC port: for MFCMU
Control port: for MFCMU
•
Outputs
Triaxial port: Force1/CMUH, Sense1, Force2/CMUL, and Sense2
Control port: for GSWU
LED: SMU/CMU output status indicator
•
Docking mode
Direct and indirect mode
•
GSWU
•
Input
Control port: for SCUU
Mini pin plug port: Guard1 and Guard2
•
Output
LED: Connection status indicator
Keysight B1500A User’s Guide, Ed ition 14
4- 27
Specifications
Hardware
•
SCUU supplemental characteristics
•
SMU path
Offset current: < 20 fA
Offset voltage: < 100 V at 300 sec
Closed channel residual resistance: < 200 m
Channel isolation resistance: > 1015 
•
CMU path
•
Test signal
•
Signal output level additional errors (CMU bias, open load):
± 2 % (direct docking)
± 7 % (indirect docking)
•
Signal output level additional errors (SMU bias, open load):
± 5 % (direct docking,  10 kHz)
± 10 % (indirect docking,  10 kHz)
•
Output impedance: 50 , typical
•
Signal level monitor additional errors (open load):
± 2 % (CMU bias), direct docking
± 5 % (SMU bias), direct docking
± 7 % (CMU bias), indirect docking
± 10 % (SMU bias), indirect docking
•
DC bias function
•
DC voltage bias (CMU bias)
Range: 0 to ± 25 V
Resolution: 1 mV
Additional errors (for CMU bias): ± 100 V (open load)
•
DC voltage bias (SMU bias)
Range: 0 to ± 100 V
Resolution: 5 mV
4- 28
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
Additional errors (for SMU voltage output accuracy): ± 100 V
(open load)
•
DC bias monitor additional errors (open load):
± 20 mV, direct docking
± 30 mV, indirect docking
•
•
Output impedance: 50 , typical
•
DC output resistance: 50  (CMU bias), 130  (SMU bias)
Measurement accuracy
Impedance measurement error is given by adding the following
additional error Ee to the MFCMU measurement error.
Ee = ± (A + Zs / |Zx| + Yo |Zx| )  100 (%)
Zx: Impedance measurement value ()
A: 0.05 % (direct docking) or 0.1 % (indirect docking)
Zs: 500  (1 + f ) m (f: frequency in MHz)
Yo: 1 + f  10 nS (direct docking,  2 for indirect docking)
When the measurement terminals are extended by using the
measurement cable, the measurement accuracy is applied to the data
measured after performing the open/short/load correction at the DUT
side cable end.
Specification conditions:
•
Temperature: 23 C ± 5 C
•
Integration time: 1 PLC or 16 PLC
Keysight B1500A User’s Guide, Ed ition 14
4- 29
Specifications
Hardware
HV-SPGU
HV-SPGU: High Voltage Semiconductor Pulse Generator Unit
•
Number of output channels: 2 channels per module
•
Modes: pulse, constant, and free run
•
Standard pulse mode
•
Two level pulse
•
Three level pulse per one channel
•
Pulse period: 30 ns to 10 s
•
Delay range: 0 s to 9.99 s
•
Delay resolution: minimum 2.5 ns
•
Output count: 1 to 1,000,000
•
Voltage monitor minimum sampling period: 5 s
•
Trigger output
Level: TTL
Timing: Synchronized with pulse period
Trigger width: Pulse period  1/2 (pulse period  10 s), maximum 5 s (pulse
period > 10 s)
Figure 4-1
•
Pulse range and pulse parameter: See Table 4-15.
•
Pulse/DC output voltage and accuracy: See Table 4-16.
SPGU pulse setup parameters
Tperiod
Tdelay
Twidth
Vpeak
90%
90%
Vamp
Vbase
10%
Tr
4- 30
10%
Tf
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
Table 4-15
Pulse range and pulse parameter
Value a
Item
Frequency range
0.1 Hz to 33 MHz
Pulse period
Pulse width
Programmable range
30 ns to 10 s
Resolution
10 ns
Minimum
100 ns (Vamp  10 V)
Accuracy
± 1 % (± 0.01 % b )
Programmable range
10 ns to (period -10 ns)
Resolution
2.5 ns (Tr and Tf  8 s)
10 ns (Tr or Tf > 8 s)
Transition time (leading time Tr
and trailing time Tf) c
Minimum
50 ns (25 ns, typical) at Vamp  10 V
Accuracy
± (3 % + 2 ns)
Programmable range
8 ns to 400 ms (see below for the minimum
transition time)
Resolution
2 ns (Tr and Tf  8 s)
8 ns (Tr or Tf > 8 s)
Minimum (typical)
< 15 ns (Vamp  10 V)
Minimum
20 ns (Vamp  10 V)
30 ns (Vamp  20 V)
60 ns (Vamp > 20 V)
Accuracy
-5 % to 5 % + 10 ns (Vamp  10 V)
-5 % to 5 % + 20 ns (Vamp  20 V)
Output relay switching time d
a.
b.
c.
d.
Open/close
< 100 s
Unless otherwise stated, all specifications assume a 50  termination.
Typical minimum. This is the supplemental characteristics.
The time from 10 % to 90 % of Vamp which is the amplitude of output pulse.
The time it takes the open state relay to open or close.
Keysight B1500A User’s Guide, Ed ition 14
4- 31
Specifications
Hardware
Table 4-16
Pulse/DC output voltage and accuracy
Item
Value
Condition
-20 V to +20 V
50  load
-40 V to +40 V
open load
Accuracy a
± (0.5 % + 50 mV)
open load
Amplitude resolution
0.2 mV (± 10 V range)
50  load
Output voltage (Vout)
0.8 mV (± 40 V range)
0.4 mV (± 10 V range)
open load
1.6 mV (± 40 V range)
Output connectors
SMA
Source impedance
50  b
Short circuit current
800 mA peak (400 mA average c )
Overshoot/pre-shoot/ringing d
± (5 % + 20 mV)
Output limit
Monitoring over current limit
50  load
a. At 1 s after completing transition.
b. Typical (± 1 %)
c. Specification condition: N  0.2 + Itotal < 3.0 A where, N is the number
of installed HV-SPGUs, and Itotal is DC current output by all modules
(including HV-SPGUs)
d. Following the specified condition with transition time.
•
ALWG (arbitrary linear waveform generator) function
Arbitrary linear waveform generator (ALWG) mode
•
Output complex waveform per one channel of HV-SPGU
•
Define multi-level pulse and multi-pulse waveform including open state
pulse with ALWG GUI editor
•
Sequential pulse waveform from user-defined pulse waveform
•
1024 points per one channel
4- 32
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
•
•
Programmable timing range: 10 ns to 671.088630 ms, 10 ns resolution
SPGU supplemental characteristics
•
Pulse width jitter: 0.001 % + 150 ps
•
Pulse period jitter: 0.001 % + 150 ps
•
Maximum slew rate: 1000 V/s (50  load)
•
Noise: 10 mVrms (at DC output)
•
Advanced feature:
Voltage monitor: The HV-SPGU has a voltage monitor function to measure
the voltage at the DUT terminal.
Measurement accuracy (open load): ± (0.1 % of reading + 25 mV)
Measurement resolution: 50 V
Note: Specified at 1 PLC (20 ms = (5 s sample + 5 s interval) 2000
samples)
Voltage compensation: The HV-SPGU can measure the impedance of DUT
and adjust the output voltage according to the DUT impedance.
Figure 4-2
ALWG setup table and pattern example
Pattern
P3
15
P4
10
0 P1
P2
P5
P7
P8
P6
P9
500 ns
0
Figure 4-3
P10
Point
Time
Voltage
1
2
3
4
5
6
7
8
9
10
0
50 ns
70 ns
100 ns
200 ns
300 ns
320 ns
400 ns
450 ns
500 ns
0.0 V
0.0 V
15.0 V
15.0 V
0.0 V
0.0 V
10.0 V
10.0 V
0.0 V
0.0 V
ALWG complex waveform example
Pattern1 x 1
Pattern2 x 5
Keysight B1500A User’s Guide, Ed ition 14
Pattern3 x 1
4- 33
Specifications
Hardware
Selector
Keysight 16440A (B1500A-A04) SMU/pulse generator selector switches either a
SMU or PGU to the associated output port. You can expand to four channels by
adding an additional selector. The PGU port on channel 1 provides a “PGU OPEN”
function, which can disconnect the PGU by opening a semiconductor relay.
Keysight B1500A and 16445A are required to use the selector.
The following specifications data is specified at 23 C ± 5 C (73 F ± 9 F) and
50 % relative humidity.
•
Channel configuration: 2 channels (CH 1 and CH 2). Can add the additional 2
channels (CH 3 and CH 4) by adding another selector (selector expander).
Input
Output
Channel 1 (CH 1)
2 (SMU and PGU a)
1
Channel 2 (CH 2)
2 (SMU and PGU)
1
Channel 3 (CH 3) b
2 (SMU and PGU a)
1
Channel 4 (CH 4) b
2 (SMU and PGU)
1
a. PGU channels 1 and 3 have a built-in series semiconductor relay.
b. Available when a selector expander is installed.
•
Voltage and current range
Input port
Maximum voltage (V)
Maximum current (A)
SMU
200
1.0
PGU
40
0.4 a
a. This is peak-to-peak ac current. For 50  load. If DUT impedance
is lower than 50 , SPGU output voltage should be decreased for
preventing the selector from over current.
Selector Adapter
Keysight 16445A selector adapter is required to control and to supply DC power to
the selector.
•
Power requirement: 100 to 240 V, 50/60 Hz
•
Maximum volt-amps (VA): 20 VA
4- 34
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
WGFMU/RSU
WGFMU: Waveform Generator/Fast Measurement Unit
RSU: Remote-sense and Switch Unit
The WGFMU is a self-contained module offering the combination of arbitrary linear
waveform generation (ALWG) with synchronized fast current or voltage (IV)
measurement. The ALWG function allows you to generate not only DC, but also
various types of AC waveforms. In addition to this versatile sourcing capability, the
WGFMU can also perform measurement in synchronization with the applied
waveform, which enables accurate high-speed IV characterization.
•
Number of output channels: 2 channels per module
•
Modes: Fast IV, PG (pulse generator), DC, and SMU pass-through
•
Measurement functions: See Table 4-17.
•
Voltage force accuracy, resolution, and timing: See Table 4-18.
•
Voltage measurement accuracy, resolution and noise: See Table 4-19.
•
Current measurement accuracy and resolution: See Table 4-20.
•
RF electromagnetic field and WGFMU measurement accuracy
The voltage and current measurement accuracy and the timing accuracy between
modules may be affected by RF electromagnetic field of strength over 3 V/m at
frequencies 80 MHz to 1 GHz and 1.4 GHz to 2.0 GHz, and 1 V/m at
frequencies 2.0 GHz to 2.7 GHz. The extent of this effect depends upon the
installation condition how the instrument is positioned and shielded.
•
RSU
•
•
•
Output terminal
•
Connector: SMA
•
Source impedance: 50  (nominal), at DC output in PG mode
SMU path
•
Maximum voltage: ± 25 V
•
Maximum current: ± 100 mA
V Monitor terminal
•
Connector: BNC
•
Source impedance: 50  (nominal), at DC output
Keysight B1500A User’s Guide, Ed ition 14
4- 35
Specifications
Hardware
The V Monitor terminal outputs a buffered signal equal to 1/10 of the Output
terminal voltage (into a 50  load).
•
WGFMU to RSU cable length
The WGFMU and RSU are connected by a special composite cable. The
following configurations are available.
•
3m
•
5m
•
1.5 m
•
2.4 m + connector adapter + 0.6 m
•
4.4 m + connector adapter + 0.6 m
Note: The connector adapter is used when routing the cable through the prober’s
connector panel.
•
ALWG function: See Table 4-21.
•
Trigger output
Level: TTL
Trigger width: 10 ns
Generated synchronously with ALWG waveform.
•
•
Software
•
Instrument library for WGFMU control
•
NBTI and general-purpose EasyEXPERT Application Tests
•
Sample programs (NBTI and general-purpose measurement using WGFMU
and RTS data analysis)
WGFMU supported prober vendors
Cascade Microtech
Suss MicroTec
Vector Semicon
Note: The maximum number of installable RSUs for a given prober depends
upon the available space. Please contact your local sales representative for
details on connecting and mounting the WGFMU and RSU.
4- 36
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
•
WGFMU supplemental data
•
RSU SMU path
Leakage current: < 100 pA
Residual resistance: < 300 m
•
Jitter: < 1 ns
•
Skew between channels: < 3 ns, under no electrostatic discharge condition
•
Trigger output skew: < 3 ns
•
Current range change time: < 150 s
This is the time until the measured current settles within ± 0.3 % of the final
result value after the range change.
Table 4-17
•
Minimum timing parameters for current measurement: See Table 4-22.
•
Minimum timing parameters for voltage measurement: See Table 4-23.
Measurement functions, voltage forcing, voltage measurement, and current
measurement
Mode
Function
V force ranges
V measure
ranges
I measure
ranges
Fast IV
V force/
I measure,
V force/
V measure
-3 V to +3 V,
-5 V to +5 V,
-10 V to 0 V,
0 V to +10 V
-5 V to +5 V,
-10 V to
+10 V
1 A, 10 A,
100 A,
1 mA, 10 mA
PG
V force/
V measure
-3 V to +3 V,
-5 V to +5 V
-5 V to +5 V
-
DC
V force/
I measure,
V force/
V measure
-3 V to +3 V,
-5 V to +5 V,
-10 V to 0 V,
0 V to +10 V
-5 V to +5 V,
-10 V to
+10 V
1 A, 10 A,
100 A,
1 mA, 10 mA
SMU pass
through
Measurement
using SMU
Maximum
± 25 V
Keysight B1500A User’s Guide, Ed ition 14
-
Maximum
± 100 mA
4- 37
Specifications
Hardware
Table 4-18
Voltage force accuracy, resolution, and timing
V force (Fast IV mode)
-5 V to +5 V, -10 V to 0 V, 0 V to +10 V
V force (PG mode)
-5 V to +5 V, open load
-2.5 V to +2.5 V, 50  load
Accuracy
± 0.1 % of setting ± 0.1 % of range a
Resolution b
96 V (-3 V to +3 V)
160 V (all ranges except for -3 V to +3 V)
Overshoot/undershoot
± (5 % + 20 mV) c
Noise
Maximum 0.1 mVrms d
Rise time Trise (10 to 90 %)/
Fall time Tfall (90 to 10 %)
Accuracy: -5 % to +(5 % + 10 ns) of setting e
Pulse period
Minimum: 24 ns, PG mode and 50  load
Timing accuracy: ± 1 % of setting f
Minimum: 100 ns, PG mode and 50  load
Pulse width
Accuracy: ± (3 % + 2 ns) g
Minimum: 50 ns, PG mode and 50  load
a. Independent of the range or the mode. DC constant voltage output. Load
impedance must be  1 M (1 A range) or  200 k (all other current
ranges) for Fast IV mode, or  1 M for PG mode.
b. Can vary at most 5 % based on the result of calibration
c. PG mode, 50  load, Trise and Tfall >16 ns with the 1.5 m cable, >32 ns
with 3 m cable, or >56 ns with 5 m cable
d. Theoretical value for the observed time 100 ns to 1 ms, supplemental
characteristics
e. PG mode, 50  load, Trise and Tfall  24 ns
f. PG mode, 50  load, pulse period  100 ns
g. PG mode, 50  load, pulse width  50 ns
4- 38
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
Table 4-19
Voltage measurement accuracy, resolution, and noise
Accuracy
± (0.1 % of reading + 0.1 % of range) a
Resolution b
680 V, -5 V to +5 V range
1.4 mV, -10 V to +10 V range
Noise c
Maximum 4 mVrms (-5 V to +5 V range)
a. Independent of the range or the mode. DC constant voltage output. Applicable condition: 10,000 averaging samples for 10 A range and above;
100,000 averaging samples for the 1 A range
b. Display resolution. Can vary at most 5 % based on the result of calibration
c. 0 V output, open load, no averaging. Maximum 1.5 mVrms as supplemental characteristics
Table 4-20
Current measurement accuracy, resolution, and noise
Accuracy
± (0.1 % of reading + 0.2 % of range) a
Resolution b
0.014 % of range
Noise (Effective resolution)
Maximum 0.2 % of range c
a. Independent of the range or the mode. DC constant voltage output. Applicable condition: 10,000 averaging samples for 10 A range and above;
100,000 averaging samples for the 1 A range
b. Display resolution. Can vary at most 5 % based on the result of calibration
c. Effective value at 0 V output, open load, and no averaging. Supplemental
characteristics
Table 4-21
ALWG and sampling measurement capability
Maximum number of vectors
2048
Maximum number of sequences
512
Maximum number of loop counts
1 to 1012
Length of a vector
10 ns to 10,000 s with 10 ns resolution
Sampling rate
5 ns, or 10 ns to 1 s with 10 ns resolution
Averaging time
10 ns to 20 ms with 10 ns resolution
Hardware memory
About 4 M data points/channel (typical)
Keysight B1500A User’s Guide, Ed ition 14
4- 39
Specifications
Hardware
Table 4-22
Minimum timing parameters for current measurement1
Voltage applied to DUT
Current applied to DUT
10 V
100 nA
1 A
10 A
100 A
1 mA
10 mA
Applied
voltage
condition
Recommended
minimum pulse
widtha
47 s
38.7 s
6.8 s
950 ns
240 ns
145 ns
Current
measurement
condition
Measurement Range
1 A
1 A
10 A
100 A
1 mA
10 mA
Recommended
minimum
measurement
window
10 s
1.64 s
1 s
130 ns
40 ns
20 ns
Settling timeb
37 s
37 s
5.8 s
820 ns
200 ns
125 ns
Noise (rms)c
160 pA
425 pA
2.5 nA
47 nA
280 nA
1.9 A
a. Recommended minimum pulse width = settling time + recommended minimum measurement
window.
b. The time until the measured value settles to within ± 0.6 % of the final result value after the output voltage is changed from the initial value (0 V). Minimum rise/fall time of 70 ns is recommended for minimizing overshoot.
c. RMS noise measured over the recommended minimum measurement window.
1. Measurement conditions: The DUT is a resistive load chosen to adjust the flowing current to the
specified current in the table above. The capacitance of the cable between the RSU and the DUT
is 20 pF. Voltage is applied to the DUT by a channel of WGFMU/RSU in Fast IV mode and in
the 10 mA range, and current measurement is performed by another channel at 0 V in Fast IV
mode.
4- 40
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Hardware
Table 4-23
Minimum timing parameters for voltage measurement1
Voltage applied to DUT
5V
10 V
105 ns
130 ns
5V
10 V
Recommended minimum measurement window
20 ns
20 ns
Settling timeb
85 ns
110 ns
Noise (rms)c
1.4 mV
1.4 mV
Applied voltage condition
Recommended minimum pulse widtha
Voltage measurement condition
Measurement Range
a. Recommended minimum pulse width = settling time + recommended minimum measurement
window.
b. The time until the measured value settles to within ± 0.6 % of the final result value after the output voltage is changed from the initial value (0 V). Minimum rise/fall time of 70 ns for 10 V, or
30 ns for 5 V is recommended for minimizing overshoot.
c. RMS noise measured over the recommended minimum measurement window.
1. Measurement conditions: The DUT is a resistive load between 1 k and 10 M. The capacitance of the cable between the RSU and the DUT is 20 pF. Voltage is applied to the DUT by a
channel of WGFMU/RSU, and voltage measurement is performed by the same channel. (PG
mode for 5 V, Fast IV mode for 10 V)
Keysight B1500A User’s Guide, Ed ition 14
4- 41
Specifications
EasyEXPERT Software
EasyEXPERT Software
Operation mode
•
Application test mode
Realizes application oriented point-and-click test setup and execution. You can
select a test definition from library by device type and measurement item, and
execute the test after changing setup parameter values as needed. Also see
“Application library”.
•
Classic test mode
Realizes function oriented test setup and execution with the same look, feel, and
terminology of Keysight 4155/4156 user interface. In addition, it improves the
user interface by taking full advantage of EasyEXPERT’s GUI features.
•
Tracer test mode (Curve tracer mode)
Realizes intuitive and interactive sweep control by using a rotary knob, similar
to a curve tracer. Just like an analog curve tracer, you can sweep in only one
direction (useful for R&D device analysis) or in both positive and negative
directions (useful in failure analysis applications). Test setups can be saved, and
used in the classic test mode for further detailed measurement and analysis. Also
see “Oscilloscope view”.
•
Quick test mode
A GUI-based quick test mode enables you to perform test sequencing without
programming. You can select, copy, rearrange, and cut-and-paste any test setups
with a few simple mouse clicks. Once you have selected and arranged your tests,
simply click on the measurement button to begin running an automated test
sequence.
Application library
Contains over 300 application test definitions conveniently organized by device
type, application, and technology. You can easily edit and customize the furnished
application tests to fit your specific needs.
The following table shows a part of tests included in the library. They are subject to
change without notice.
4- 42
Keysight B1500A User’s Guide, Ed ition 14
Specifications
EasyEXPERT Software
Category
CMOS
BJT
Test items
Id-Vg, Id-Vd, Vth, breakdown, capacitance, QSCV, etc.
Ic-Vc, diode, Gummel plot, breakdown, hfe, capacitance, etc.
Discrete
Id-Vg, Id-Vd, Ic-Vc, diode, etc.
Memory
Vth, capacitance, endurance test, etc.
PwrDevice
Pulsed Id-Vg, pulsed Id-Vd, breakdown, etc.
NanoTech
Resistance, Id-Vg, Id-Vd, Ic-Vc, etc.
Reliability
NBTI/PBTI, charge pumping, electromigration, hot carrier
injection, J-Ramp, TDDB, etc.
Oscilloscope view
Available for the tracer test using MCSMU modules. The oscilloscope view displays
MCSMU current or voltage measurement data versus time. The pulsed
measurement waveforms appear in a separate window for easy verification of the
measurement timings. This function is useful for verifying waveform timings and
debugging pulsed measurements. It is available when a tracer test has one or more
MCSMU channels being used in pulsed mode. The oscilloscope view can display
the pulse waveform at any (user specified) sweep step of the sweep output.
•
Sampling interval: 2 s
•
Sampling points: 2000 Sa
•
Sampling duration: 22 s to 24 ms
•
Marker function
Data read-out for each channel
Resolution: 2 s
•
Data saving
Numeric: TXT/CSV/XMLSS
Image: EMF/BMP/JPG/PNG
Keysight B1500A User’s Guide, Ed ition 14
4- 43
Specifications
EasyEXPERT Software
Measurement modes
Supports the following measurement modes.
•
IV measurement
Spot
Staircase sweep
Pulsed spot
Pulsed sweep
Staircase sweep with pulsed bias
Sampling
Multi-channel sweep
Multi-channel pulsed sweep
List sweep
Linear search (*1)
Binary search (*1)
•
C measurement
Spot C
CV (DC bias) sweep
Pulsed spot C (*1)
Pulsed sweep CV (*1)
C-t sampling (*1)
C-f sweep (*1)
CV (AC level) sweep (*1)
Quasi-static CV (QSCV) (*1)
(*1)
Direct Control classic test is used.
Sweep measurement
Number of steps: 1 to 10001 (SMU), 1 to 1001 (CMU)
Sweep mode: linear or logarithmic (log)
Sweep direction: single or double
Hold time: 0 to 655.35 s, 10 ms resolution
Delay time: 0 to 65.535 s or 655.35 s for CV (AC level) sweep and C-f sweep, 100
s resolution
4- 44
Keysight B1500A User’s Guide, Ed ition 14
Specifications
EasyEXPERT Software
Step delay time: 0 to 1 s, 100 s resolution
Step output trigger delay time: 0 to (delay time) s, 100 s resolution
Step measurement trigger delay time: 0 to 65.535 s, 100 s resolution
Sampling (time domain) measurement
Performs the voltage/current measurement in the specified time interval and plots
the measured data versus time.
Sampling channels: up to 10
Sampling mode: linear or logarithmic (log)
Sampling points: 1 to 100001/(number of channels) for linear sampling, 1 to
1 + (number of data for 11 decades) for log sampling
Sampling interval range: 100 s + 20 s  (number of channels -1) to 2 ms in 10 s
resolution for linear sampling, or 2 ms to 65.535 s in 1 ms resolution for both linear
and log sampling
Hold time, bias hold time: -90 ms to -100 s in 100 s resolution, 0 to 655.35 s in
10 ms resolution
Measurement time resolution: 100 s
Other measurement characteristics
•
Measurement control:
Single, repeat, append, and stop
•
SMU setting capabilities:
Limited auto ranging, voltage/current compliance, power compliance, automatic
sweep abort functions, self-test, and self-calibration
•
Standby mode
If the standby mode is ON, only the standby channels remain programmed to
their specified output value in the non-measurement status.
•
Bias hold function
This function allows you to keep a source active between measurements. The
source module will apply the specified bias between measurements when
running classic tests inside an application test, in quick test mode, or during a
repeated measurement. The function ceases as soon as these conditions end or
when a measurement that does not use this function is started.
Keysight B1500A User’s Guide, Ed ition 14
4- 45
Specifications
EasyEXPERT Software
•
Current offset cancel
This function subtracts the offset current from the current measurement raw
data, and returns the result as the measurement data. This function is used to
compensate the error factor (offset current) caused by the measurement path
such as the measurement cables, manipulators, or probe card.
•
Time stamp
Time stamp function utilizing an internal quartz clock. Resolution: 100 s
Data display
•
X-Y graph plot
X-axis and up to eight Y-axes. Linear and log scale. Real time graph plotting.
X-Y graph plot can be printed or stored as image data to clip board or mass
storage device. The formats BMP, GIF, PNG, and EMF are supported.
•
Scale
Auto scale and zoom
•
Marker
Marker to min/max, interpolation, direct marker, and marker skip
•
Cursor
Direct cursor
•
Line
Two lines, normal mode, grad mode, tangent mode, and regression mode
•
Overlay graph comparison
Graphical plots can be overlaid for comparison.
•
List display
Measurement data and calculated user function data are listed in conjunction
with sweep step number or time domain sampling step number. Up to 20 data
sets can be displayed.
•
Data variable display
Up to 20 user-defined parameters can be displayed.
4- 46
Keysight B1500A User’s Guide, Ed ition 14
Specifications
EasyEXPERT Software
Automatic analysis function
On a graphics plot, the markers and lines can be automatically located using the auto
analysis setup. Parameters can be automatically determined using automatic
analysis, user function, and read out functions.
•
Analysis functions
Up to 20 user-defined analysis functions can be defined using arithmetic
expressions.
Measured data, pre-defined variables, and read out functions can be used in the
computation. The results can be displayed on the LCD.
•
Read out functions
Built-in functions for reading various values related to the marker, cursor, or line
Arithmetic functions
•
User functions
Up to 20 user-defined functions can be defined using arithmetic expressions.
Measured data and pre-defined variables can be used in the computation. The
results can be displayed on the LCD.
•
Arithmetic operators
+, -, *, /, ^, abs (absolute value), at (arc tangent), avg (averaging), cond
(conditional evaluation), delta, diff (differential), exp (exponent), integ
(integration), lgt (logarithm, base 10), log (logarithm, base e), mavg (moving
average), max, min, sqrt, trigonometric function, inverse trigonometric function,
and so on
•
•
Physical constants assigned to the keys
•
q: Electron charge, 1.602177E-19 C
•
k: Boltzmann constant, 1.380658E-23 J/K
•
 (e): Dielectric constant of vacuum, 8.854188E-12 F/m
Numeric constants assigned to the keys
a (10-18), f (10-15), p (10-12), n (10-9), u or  (10-6), m (10-3), k (103), M (106), G
(109), T (1012), P (1015)
Keysight B1500A User’s Guide, Ed ition 14
4- 47
Specifications
EasyEXPERT Software
Workspace and data management
•
Workspace
Separate work environment for EasyEXPERT. Every workspace supports the
following features.
•
•
Measurement setup and execution
•
Save/Recall My Favorite (preset group) setup
•
Save/Recall measurement data and settings
•
Import/Export device definition, measurement settings, My Favorite setup,
measurement data, and application library
•
Test result data management
•
Access authority (private/public) setting
Data auto record / auto export
EasyEXPERT has the ability to automatically store the measurement setup and
data within a workspace. It can also export measurement data in real time. You
can save data to any storage device connected to the PC.
•
Import/export files
File type: EasyEXPERT format, XML-SS format, CSV format
•
Workspace management
EasyEXPERT has the ability to import/export a workspace for back-up and
portability.
External instrument control
•
Switching matrix operation panel (GUI)
Keysight B2200A, B2201A, and E5250A with E5252A cards
•
External instruments supported by application tests
Keysight 4284A/E4980A, 81110A, and 3458A
•
Wafer prober control
Scripts to perform chuck move/up/down and subsite move for major semiautomatic probers are furnished. The wafer prober control can be performed in
the repeat measurement process.
4- 48
Keysight B1500A User’s Guide, Ed ition 14
Specifications
Program and interface capabilities
Program and interface capabilities
•
Data storage
Hard disk drive, DVD-R drive
•
Interfaces
GPIB, interlock, USB (USB 2.0, 2 ea. on front, 2 ea. on rear),
LAN (1000BASE-T/100BASE-TX/10BASE-T), trigger in/out, digital I/O,
VGA video output
•
Remote control capabilities
FLEX commands (GPIB)
EasyEXPERT remote control function (LAN)
•
Trigger I/O
Only available using GPIB FLEX commands.
Trigger in/out synchronization pulses before and after setting and measuring DC
voltage and current. Arbitrary trigger events can be masked or activated
independently.
Furnished Software
•
Prober control scripts
•
Desktop EasyEXPERT software
•
VXIplug&play driver for Keysight B1500A
•
4155/56 setup file converter
Converts the measurement setup file (extension MES or DAT) for Keysight
4155 and 4156 into the equivalent setup file for EasyEXPERT classic test mode.
•
MDM file converter
Converts the EasyEXPERT test result data file (extension XTR or ZTR) to
Keysight IC-CAP MDM file. Supports the data of the following classic tests.
•
I/V Sweep
•
Multi Channel I/V Sweep
•
C-V Sweep
Keysight B1500A User’s Guide, Ed ition 14
4- 49
Specifications
Desktop EasyEXPERT Software
NOTE
For the latest system requirements, go to www.keysight.com and type in B1500A in
the Search field at the top of the page.
Desktop EasyEXPERT Software
Provides almost the same capability, look and feel of EasyEXPERT on a PC.
•
Execution mode
Online and offline
•
Supported instruments
•
B1500A
•
B1505A
•
4155B, 4156B, 4155C, and 4156C
Firmware:
•
•
HOSTC: 03.08 or later
•
SMUC: 04.08 or later
Supported 4155/4156 functionality
•
I/V sweep
•
I/V-t sampling (except thinned out mode)
•
VSU/VMU (except differential voltage measurement using VMU)
•
PGU (41501B)
•
Switching matrix control
4- 50
Keysight B1500A User’s Guide, Ed ition 14
Specifications
General Specifications
General Specifications
•
Temperature range
Operating: +5 C to +40 C
Storage: -20 C to +60 C
•
Humidity
Operating: 20 % to 70 %RH, non-condensing
Storage: 10 % to 90 %RH, non-condensing
•
Altitude
Operating: 0 to 2,000 m (6,561 ft.)
Storage: 0 to 4,600 m (15,092 ft.)
•
Power requirement: 100-240 V (±10 %), 50/60 Hz
•
Maximum volt-amps (VA): 900 VA
•
Regulatory compliance
•
EMC
IEC 61326-1 / EN 61326-1
ICES/NMB-001
AS/NZS CISPR 11
KC: RRA Notification amending Radio Waves Act Article 58-2
•
Safety
IEC 61010-1 / EN 61010-1
CAN/CSA-C22.2 No. 61010-1
•
Dimensions
B1500A: 420 mm (W)  330 mm (H)  575 mm (D)
B1531A RSU: 45.2 mm (W)  70 mm (H)  82 mm (D)
E5288A ASU: 132 mm (W)  88.5 mm (H)  50 mm (D)
N1255A Connection box: 184.4 mm (W)  61.6 mm (H)  169.6 mm (D)
N1301A-100 SCUU: 148 mm (W)  75 mm (H)  70 mm (D)
N1301A-200 GSWU: 33.2 mm (W)  41.5 mm (H)  32.8 mm (D)
Keysight B1500A User’s Guide, Ed ition 14
4- 51
Specifications
General Specifications
16440A Selector: 250 mm (W)  50 mm (H)  275 mm (D)
16445A Selector adapter: 250 mm (W)  50 mm (H)  260 mm (D)
•
Weight
B1500A (empty): 20 kg
B1510A: 2.0 kg
B1511B: 1.0 kg
B1514A: 1.3 kg
B1517A: 1.2 kg
B1520A: 1.5 kg
B1525A: 1.3 kg
B1530A: 1.3 kg
B1531A: 0.13 kg
E5288A: 0.5 kg
N1255A: 0.7 kg
N1301A-100: 0.8 kg
N1301A-200: 0.1 kg
16440A: 1.1 kg
16445A: 1.0 kg
4- 52
Keysight B1500A User’s Guide, Ed ition 14
5
Accessories and Options
Accessories and Options
Furnished accessories, available accessories, and available options of Keysight
B1500A Semiconductor Device Analyzer are described in this chapter.
Table 5-1
Furnished Accessories
Description
Quantity
USB keyboard
1
USB mouse
1
Stylus pen
1
Interlock cable, 1.5 m or 3.0 m
1
GNDU cable, 1.5 m or 3.0 m
1
GNDU Kelvin adaptera
1
Triaxial cablea, 1.5 m or 3.0 m
1
SMU number label, only for the B1500A installed with SMU
1
PG number label, only for the B1500A installed with SPGU
1
Power cable
1
Disk set for Keysight 4155B/4155C/4156B/4156C firmware
update
1
Software CD (including VXIplug&play driver and utility tools)
1
WGFMU instrument library and sample program CD
1
Desktop EasyEXPERT CD
1
License-to-use for EasyEXPERT and Desktop EasyEXPERT
a. GNDU Kelvin adapter must be directly connected to the B1500A
GNDU connector for taking out the GNDU Force and Sense to the individual connectors. Then the GNDU cable must be used for extending
the GNDU Force. And the triaxial cable must be used for the Sense.
Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or B1500A-030.
5- 2
Keysight B1500A User’s Guide, Ed ition 14
Accessories and Options
Table 5-2
Options
Option Item
Description
B1500A-015
1.5 m length of bundled cables
B1500A-030
3.0 m length of bundled cables
B1500A-050
50 Hz power line frequency
B1500A-060
60 Hz power line frequency
B1500A-A00
Empty package for custom solution, contains no measurement module
B1500A-A01
Standard package, contains four MPSMU and eight triaxial cables
B1500A-A02
High resolution package, contains four HRSMU and eight triaxial cables
B1500A-A03
High power package, contains two HPSMU, two MPSMU, and eight triaxial cables
B1500A-A04
Flash memory cell measurement basic package, see Table 5-3
B1500A-A10
HPSMU add-on package, adds one HPSMU and two triaxial cables
B1500A-A11
MPSMU add-on package, adds one MPSMU and two triaxial cables
B1500A-A17
HRSMU add-on package, adds one HRSMU and two triaxial cables
B1500A-A1A
Add-on package, adds one MCSMU, two triaxial cables, and one N1255A
B1500A-A1B
Add-on package, adds two MCSMU, four triaxial cables, and one N1255A
B1500A-A20
Capacitance measurement add-on package, adds the MFCMU and one CMU cable
B1500A-A25
HVSPGU add-on package, adds one HVSPGU and two SPGU cables
B1500A-A28
Add-on package for HRSMU, adds one ASU, one D-sub cable, and one triaxial cable
B1500A-A29
Add-on package for MPSMU, adds one ASU, one D-sub cable, and one triaxial cable
B1500A-A30
WGFMU add-on package, adds one WGFMU, two RSU, and two RSU cables
B1500A-A31
WGFMU add-on package with connector adapters, see Table 5-4
B1500A-A3P
WGFMU probe cable kit, see Table 5-5
B1500A-A5F
Test fixture for package device measurement, adds one 16442B, see Table 5-6
B1500A-A6J
ANSI Z540 compliant calibration
B1500A-ABA
Paper manual set, English
B1500A-ABJ
Paper manual set, Japanese
B1500A-DR1
Changing DVD-R drive to DVD-ROM drive
B1500A-UK6
Commercial calibration certificate with test data
Keysight B1500A User’s Guide, Ed ition 14
5- 3
Accessories and Options
Table 5-3
B1500A-A04 Basic Flash Memory Cell Package
Description
Table 5-4
Quantity
Medium power source/monitor unit (MPSMU)
2
High resolution source/monitor unit (HRSMU)
2
High voltage semiconductor pulse generator unit (HVSPGU)
1
SPGU cable, 1.5 m or 3.0 m
2
16440A SMU/PGU pulse generator selector
1
16445A selector adapter for 16440A
1
Control cable, 1.5 m, between B1500A and 16445A
1
Control cable, 40 cm, between 16445A and 16440A
1
Triaxial cable, 1.5 m, between B1500A and 16440A
2
Triaxial cable, 1.5 m or 3.0 m
8
B1500A-A311 WGFMU Add-on Package with Connector Adapter
Description
Quantity
Waveform generator/fast measurement unit (WGFMU)
1
Remote-sense and switch unit (RSU)
2
RSU cable, 2.4 m, between WGFMU and connector adapter
2
RSU cable, 0.6 m, between RSU and connector adapter
2
16493R-801 connector adapter (female-female)
2
1. The option B1500A-A31 cannot be selected with the option B1500A-015.
5- 4
Keysight B1500A User’s Guide, Ed ition 14
Accessories and Options
Table 5-5
B1500A-A3P WGFMU Probe Cable Kit
Description
Table 5-6
Quantity
16493R-101 SSMC short-open cable for current return path,
50 mm
2
16493R-102 SSMC short-open cable for current return path,
75 mm
2
16493R-202 SMA-SSMC cable between RSU and DC probe,
200 mm
2
16493R-302 SMA-SMA cable between RSU and RF probe,
200 mm
2
B1500A-A5F1 Test Fixture for Package Device Measurement
Description
Quantity
16442B test fixture
1
Accessory case
1
Blank PTFE board for DUT stage
1
28-pin DIP (dual-in-line) package socket module
1
Universal socket module, 0.075 inch pitch
1
Universal socket module, 0.05 inch pitch
1
Connection pin set for universal socket module
10
Connection wire, mini banana to pin plug
4/color
Connection wire, pin plug to pin plug
3/color
Connection wire, mini banana to mini clip
3/color
Connection wire, mini banana to mini banana
3/color
1. Contains four types of the connection wire. There is three colors for each connection wire,
black, red, and blue.
Keysight B1500A User’s Guide, Ed ition 14
5- 5
Accessories and Options
Table 5-7
Model
Number
Available Accessories
Option Item
16440A
Description
SMU/PGU pulse generator selector
16440A-001
Control cable, 1.5 m
16440A-002
Control cable, 3.0 m
16440A-003
Control cable, 40 cm for second selector
16442B
Test fixture
16442B-010
Add triaxial cables, 1.5 m, 4 ea.
16442B-011
Add triaxial cables, 3 m, 4 ea.
16442B-800
Extra blank PTFE board
16442B-801
Universal socket module, 0.1 inch pitch, with 10 pins
16442B-802
Universal socket module, 0.075 inch pitch, with 10 pins
16442B-803
Universal socket module, 0.05 inch pitch, with 10 pins
16442B-810
Extra pin set (for universal socket module, 10 pins.)
16442B-811
Extra wire set (mini banana to pin plug, 6 ea.)
16442B-812
Extra wire set (pin plug to pin plug, 6 ea.)
16442B-813
Extra wire set (mini banana to mini clip, 6 ea.)
16442B-814
Extra wire set (mini banana to mini banana, 6 ea.)
16442B-821
Socket module, 4-pin TO package
16442B-822
Socket module, 18-pin DIP package
16442B-823
Extra socket module, 28-pin DIP package
16442B-890
Extra accessory case
16444A
Accessories for B1500A
16444A-001
USB keyboard
16444A-002
USB mouse
16444A-003
Stylus pen
5- 6
Keysight B1500A User’s Guide, Ed ition 14
Accessories and Options
Model
Number
Option Item
16445A
Description
Selector adapter for 16440A
16445A-001
Control cable (B1500 to 16445A), 1.5 m
16445A-002
Control cable (B1500 to 16445A), 3.0 m
16493G
Digital I/O connection cable
16493G-001
1.5 m length
16493G-002
3 m length
16493J
Interlock cable
16493J-001
1.5 m length
16493J-002
3 m length
16493J-003
5 m length
16493K
Kelvin triaxial cable (B1500 to B1500)
16493K-001
1.5 m length
16493K-002
3 m length
16493L
GNDU cable
16493L-001
1.5 m length
16493L-002
3 m length
16493L-003
5 m length
16493M
Triaxial and D-sub cables for ASU
16493M-001
1.5 m length
16493M-002
3 m length
16493N
GNDU cable for B2200 Kelvin input
16493N-001
16493P
2 m length
SPGU output connection cable (SMA to BNC)
16493P-001
1.5 m length
16493P-002
3 m length
Keysight B1500A User’s Guide, Ed ition 14
5- 7
Accessories and Options
Model
Number
Option Item
16493Q
Description
SPGU-SPGU connection cable (SMA to SMA)
16493Q-001
16493R
8 cm length
WGFMU Cables and Accessories
16493R-001
WGFMU-to-RSU cable, 0.6 m
16493R-002
WGFMU-to-RSU cable, 2.4 m
16493R-003
WGFMU-to-RSU cable, 3 m
16493R-004
WGFMU-to-RSU cable, 5 m
16493R-005
WGFMU-to-RSU cable, 4.4 m
16493R-006
WGFMU-to-RSU cable, 1.5 m
16493R-101
SSMC short-open cable for current return path, 50 mm
16493R-102
SSMC short-open cable for current return path, 75 mm
16493R-202
SMA-SSMC cable between RSU and DC probe, 200 mm
16493R-302
SMA-SMA cable between RSU and RF probe, 200 mm
16493R-801
WGFMU connector adapter (female-female)
16493R-802
Magnet stand for RSU
16493R-803
Sync terminal connection cable
16494A
Triaxial cable
16494A-001
1.5 m length
16494A-002
3 m length
16494A-003
80 cm length
16494A-004
40 cm length
16494A-005
4 m length
16494B
Kelvin triaxial cable (B1500 to E5250)
16494B-001
1.5 m length
16494B-002
3 m length
16494B-003
80 cm length
5- 8
Keysight B1500A User’s Guide, Ed ition 14
Accessories and Options
Model
Number
Option Item
16495F
Description
Connector plate w/ 12triax., Interlock, GNDU
16495F-001
Bulkhead feedthrough connectors (female to female)
16495F-002
Connectors to contacts for soldering
16495G
Connector plate w/ 24triax., Interlock, GNDU
16495G-001
Bulkhead feedthrough connectors (female to female)
16495G-002
Connectors to contacts for soldering
16495H
Connector plate w/ 6triax., 6coax., Interlock, GNDU
16495H-001
Bulkhead feedthrough connectors (female to female)
16495H-002
Connectors to contacts for soldering
16495J
Connector plate w/ 8triax., 4coax., Interlock, GNDU
16495J-001
Bulkhead feedthrough connectors (female to female)
16495J-002
Connectors to contacts for soldering
16495K
Connector plate with universal cable holder
16495K-001
Connector plate with rubber holder
B1510A
High Power Source/Monitor Unit module (HPSMU)
B1511B
Medium Power Source/Monitor Unit module (MPSMU)
B1514A
Medium Current Source/Monitor Unit module (MCSMU)
B1517A
High Resolution Source/Monitor Unit module (HRSMU)
B1520A
Multi Frequency Capacitance Measurement Unit module (MFCMU)
B1525A
Semiconductor Pulse Generator Unit module (SPGU)
B1530A
Waveform Generator/Fast Measurement Unit (WGFMU)
B1530A-0KN
Self-paced sample program learning kit
B1531A
Remote-sense and Switch Unit (RSU)
B1542A
Pulsed IV package for B1500A/EasyEXPERT
Keysight B1500A User’s Guide, Ed ition 14
5- 9
Accessories and Options
Model
Number
Option Item
E5288A
Description
Atto Sense and Switch Unit (ASU)
E5288A-001
Add triaxial and D-sub cables, 1.5 m
E5288A-002
Add triaxial and D-sub cables, 3 m
N1253A
Accessories for Digital I/O
N1253A-100
Digital I/O T-cable
N1253A-200
Digital I/O BNC Box
N1254A
Accessories
N1254A-100
GNDU Kelvin Adapter
N1254A-108
ASU Magnetic Stand
N1255A
2 Channels Connection Box for MCSMU
N1300A
CMU cable
N1300A-001
1.5 m length
N1300A-002
3 m length
N1301A
Accessories for CMU
N1301A-100
SMU CMU Unify Unit (SCUU)
N1301A-102
SCUU cable, 3 m
N1301A-110
SCUU magnetic stand
N1301A-200
Guard Switch Unit (GSWU)
N1301A-201
GSWU cable, 1.5 m
N1301A-202
GSWU cable, 3 m
5- 10
Keysight B1500A User’s Guide, Ed ition 14
This information is subject to change without notice.
© Keysight Technologies 2005-2014
Edition 14, August 2014
*B1500-90000*
B1500-90000
www.keysight.com
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