Sierra 954 Flo-box Instruction manual

Model 954 4-Channel MFC Power Supply/Controller

INSTRUCTION MANUAL

954

October

Sierra Instruments, Inc., Headquarters

Sierra Europe, European Headquarters

Sierra Asia, Asia-Pacific Headquarters

TABLE OF CONTENTS

PRODUCT DESCRIPTION ------------------------------------------------------------------------------

SPECIFICATIONS -----------------------------------------------------------------------------------------

FRONT PANEL ---------------------------------------------------------------------------------------------

REAR PANEL -----------------------------------------------------------------------------------------------

CONNECTOR PIN DESIGNATIONS

Transducer Connector (J1, J2, J3, J4) ---------------------------------------------------

Analog Output (J5) ----------------------------------------------------------------------------

Alarms (J8) --------------------------------------------------------------------------------------

RS232 (J6) --------------------------------------------------------------------------------------

RS485 (J7, J9) ---------------------------------------------------------------------------------

Model 954 Configuration ------------------------------------------------------------------

STARTUP

----------------------------------------------------------------------------------------------------

MANUAL SETUP

Selecting Display (Flow or Total) ----------------------------------------------------------

Selecting Valve Override (Open, Close or Run) ---------------------------------------

Selecting Setpoint (Control Voltage) -----------------------------------------------------

Selecting Units of Measure and Gas Identifiers --------------------------------------

Selecting Filter (-3dB A/D Converter Filter Frequency ------------------------------

Selecting Input (0-5Vdc, 0-10Vdc or 4-20mA Signal Input -------------------------

Selecting Alarms (High and Low with Hysteresis) ------------------------------------

Selecting Ratio (Master/Slave Operation) ----------------------------------------------

MANUAL CAL/RANGE

Calibrate (Zero Only) -------------------------------------------------------------------------

Calibrate (Range Only) ----------------------------------------------------------------------

Calibrate (Zero & Range) -------------------------------------------------------------------

Range (Changing Range) ------------------------------------------------------------------

Calibrate (Multiplier) --------------------------------------------------------------------------

RS232/485 HOOKUP ------------------------------------------------------------------------------------

RS232/485 COMMANDS

Setting/Reading Setpoint & Flow Alarms -----------------------------------------------

Setting/Reading Alarm Hysteresis, Units of Measure & Gas ID ------------------

Setting/Reading Signal Input & Filter ----------------------------------------------------

Setting/Reading Multiplier ------------------------------------------------------------------

Setting/Blanking/Reading Display --------------------------------------------------------

Resetting Total ---------------------------------------------------------------------------------

Setting/Reading Range Value -------------------------------------------------------------

Enable Master/Slave Channels & Setting Local/Remote Operation -------------

UNITS OF MEASURE TABLE -------------------------------------------------------------------------

GAS IDENTIFICATION TABLE

Gas #1 thru 66 --------------------------------------------------------------------------------

Gas #67 thru 130 -----------------------------------------------------------------------------

Gas #131 thru 180 ---------------------------------------------------------------------------

APPENDIX A, PCA SCHEMATIC DRAWING

24

25

26

11

11

12

13

9

9

10

10

14

14

15

15

16

17

21

22

22

22

23

18

19

20

21

5

6

5

3

4

1

2

6

6

6B

7

PRODUCT DESCRIPTION

The Model 954 is a high performance, microprocessor-based 4-channel power supply/controller designed for use with Mass Flow Controllers (MFC) or Mass Flow Meters

(MFM).

A linear regulator provides a low noise, foldback current limited, thermal overload protected

+15Vdc and -15Vdc power supply for each of the (4) Channels. The Model 954 accepts user selectable 0-5Vdc, 0-10Vdc or 4-20mA input signals. It also supplies 0-5Vdc, 0-10Vdc or 4-20mA setpoint signals, for each channel, for flow control in MFCʼs.

The firmware utilizes a Real Time Operating Sytem (RTOS) for real time multitasking capabilities. This allows continuous monitoring of each channel's flow rates, total flow and setpoints regardless of the task being performed. A 16-bit multi-channel, high speed, sigma-delta analog-to-digital converter provides accurate flowrate data. A 32K x 8 battery backed RAM stores more than 90 Units of Measure and 190 Gas Identifiers selectable by the user. All pertinent data, required by the microprocessor at power-up to re-initialize the system, is also stored in the same RAM.

The Model 954 utilizes a 4-line by 20 character back lighted LCD display. A built in

Totalizer, for each channel automatically recognizes the units of measure selected and adjusts the time base for the integrator accordingly. The user can select either Flow or

Total to be displayed for each channel. When selected, the setpoint signal is displayed and can be altered via the front panel switches. Override controls for opening or closing the

MFC valves are also available for each channel. Annunciator LED's display the selected valve override conditions.

Ratio control is user selectable for master/slave operation. Channel 1 is always the master and any of the other 3 channels may be selected as slaves. This master/slave arrangement utilizes the actual flow of Channel 1 as the master signal.

Both RS232 and RS485 serial communications are available. All functions selectable from the front panel switches are also accessible via the RS232/RS485 serial ports. Only one, either RS232 or RS485, serial port is active at any one time. Selection, including a baud rate of 9600 or 19.2K, is made via the front panel switches.

Each flow channel has a high and low user programmable alarm. The alarms activate an opto-isolated open collector transistor output capable of switching 25Vdc @ 10ma.

The unit can be rack mounted using standard half-rack hardware or can be bench mounted using the retractable stand provided. Input power is selectable, via the rear panel power selector for 100, 115 or 230 Vac, 50-60 Hz.

PAGE 1

SPECIFICATIONS

Signal Input

Number of Channels ------------------------

Signal Type ------------------------------------

Input Resistance

Voltage ---------------------------------

Current ---------------------------------

4

0-5Vdc, 0-10Vdc, 4-20mA , user selectable

>10 Megohm

120 ohms

Setpoint Output (Control Signal)

Signal Type -------------------------------------

Accuracy (typ) ---------------------------------

0-5Vdc, 0-10Vdc, 4-20mA (user selectable)

+/-0.05% FS (Voltage), +/-0.1% FS (Current)

Analog-to-Digital Converter

Inputs --------------------------------------------

Technique --------------------------------------

Resolution --------------------------------------

Speed (max) -----------------------------------

4

Sigma-Delta

16-bit (bi-polar)

100 Hz

Totalizer (Each Channel)

Technique --------------------------------------

Time Base (Quartz Crystal) ---------------

Accuracy (typ) --------------------------------

Integrated (Riemann Sum) Value

20MHz

+/- 30ppm

Microprocessor

Type ---------------------------------------------

Speed -------------------------------------------

Operating System ----------------------------

Non-volatile memory ------------------------

80C31

20MHz

RTOS with multitasking capabilities

32K x 8 Battery backed Ram

Serial Communications

RS232 -------------------------------------------

RS485 -------------------------------------------

Baud Rate --------------------------------------

Bi-directional (user-slectable)

Full-duplex (user-selectable)

9600 or 19.2K baud (user-selectable)

Transducer Power Supply (Each Channel)

Voltage ------------------------------------------

Current (min) ----------------------------------

Current (max) ----------------------------------

+/-15Vdc, +/-0.75Vdc

250mA

400MA

Input Power

Voltage ------------------------------------------

Current (typ) -----------------------------------

Fuse ---------------------------------------------

100/115/230 Vac, +/-10% (switch selectable)

500 mA

1 amp SLO BLO (Time Delay)

PAGE 2

FRONT PANEL

CH1

CH2

CH3

CH4

6

7

8

9

CH

SELECT

MENU

1

2 3

PURGE

CLOSE

RUN

4 5 6

7 8 9

ESC ENTER

0

.

1

2

3

4

5

1

2

Column 2: Reserved for polarity indicator (minus sign for negative signal, none for positive).

Col's 3 - 8: Actual scaled value of input signal. Displays FLOW or TOTAL in normal display mode. Displays

the Setpoint (Control) value when CH SEL is depressed.

Column 9: Space

Col's 10-14: Units of Measure

Column 15: Space

Col's 16-20: Gas Identifier

6

7

8

Setpoint (Control) voltage or to send the selected OVERRIDE signal.

MENU: Key used to enter MENU or manual setup sequence.

CH SEL: Used to scroll through Channels 1, 2, 3 and 4 to update the selected Channel's

9

PAGE 3

REAR PANEL

5

J5

5

10

1

6

15

11

ANALOG OUT

J1

8 1

15

9

8

CHANNEL 1

J3

1

15

9

CHANNEL 3

6

J8

9

18

26

8

ALARMS

J2

19

1

1

10

8

15

9

CHANNEL 2

J4

1

15

9

CHANNEL 4

4

J9

5

1

5

9

RS485

J7

6

1

5

9

RS485

J6

6

1

9

RS232

6

3

2

7

8

230

115

100

VAC

O

T250 1A

1

POWER SELECTOR SWITCH

RS232 SERIAL PORT (J6)

ANALOG OUTPUT (J5)

PAGE 4

CONNECTOR PIN DESIGNATIONS

TRANSDUCER CONNECTORS (J1, J2, J3, J4)

9

10

11

12

13

14

15

5

6

7

8

1

2

3

4

SIGNAL COMMON

SIGNAL INPUT

GROUND

VALVE OPEN

GROUND

-15Vdc

NC

SETPOINT SIGNAL

GROUND

GROUND

NC

VALVE OFF

+15Vdc

NC

CHASSIS GROUND

8

15

9

1

Transducer Connector (Female)

Rear Panel View

ANALOG OUTPUT (J5)

9

10

11

12

13

14

15

5

6

7

8

1

2

3

4

NC

NC

NC

NC

SIGNAL CH 1

SIGNAL COMMON CH 1

SIGNAL CH2

SIGNAL COMMON CH2

NC

NC

SIGNAL CH3

SIGNAL COMMON CH3

SIGNAL CH4

SIGNAL COMMON CH4

NC

5

10

15

1

6

11

Analog Output Connector (Female)

Rear Panel View

PAGE 5

CONNECTOR PIN DESIGNATIONS

ALARMS (J8)

13

14

15

16

9

10

11

12

5

6

7

8

1

2

3

4

21

22

23

24

17

18

19

20

25

26

NC

NC

NC

NC

NC

NC

NC

NC

CH1 HIGH ALARM

CH 1 LOW ALARM

CH1 ALARM COMMON

CH2 HIGH ALARM

CH2 LOW ALARM

CH2 ALARM COMMON

NC

NC

NC

NC

CH3 HIGH ALARM

CH3 LOW ALARM

CH3 ALARM COMMON

CH4 HIGH ALARM

CH4 LOW ALARM

CH4 ALARM COMMON

NC

NC

9

18

26 19

1

10

Alarm Connector (Female)

Rear Panel View

RS232 (J6)

1

2

3

4

5

NC

RXD

TXD

DTR

DIGITAL GROUND

6

7

8

9

RS485 (J7, J9)

1

2

3

4

5

NC

RXD(-)

TXD(+)

DIGITAL GROUND

NC

6

7

8

9

DSR

NC

NC

NC

NC

RXD(+)

TXD(-)

NC

5

9 6

1

RS232 Connector (Female)

Rear Panel View

5

9 6

1

RS485 Connector (Female)

Rear Panel View

PAGE 6

MODEL 954 CONFIGURATION

As Sierra Instrument supplies mass flow instruments with two different valve circuits (15 Vdc and 30 Vdc), our Model 954 is designed to accommodate both types. This is accomplished by moving 4 jumpers

(one per channel) on the Model 954 PCA (inside the housing). Please refer to the PCA schematic in

Appendix A for the location of these jumpers. All Model 954 units come factory set for 15 Vdc valve circuit operation (unless ordered new with a 30 Vdc instrument).

Determining which valve circuit you have inside your Sierra flow instrument.

The following Sierra instruments have 15 Vdc valve circuits:

All Model 830 mass flow meters

All Model 840 mass flow controllers with plastic electronics cover

All Model 840 mass flow controllers with full-scale flow below 1.0 slpm

Model 840L mass flow controllers with metal electronics cover having a plug in the rear of the cover (upper right)

The following Sierra instruments have 30 Vdc valve circuits:

All Model 840M mass flow controllers

Model 840L Mass flow controllers with metal electronics cover having a screw in the rear of the cover (upper right)

The following Sierra instruments should never be used with the Model 954:

Any 840H mass flow controller. Contact Sierra Instruments for information on operating the Model 840H.

Jumper verification and adjustment

Select which one of the Model 954ʼs four channels is to be used with each of your instruments.

With the power disconnected, remove the top 2 large screws on the rear of Model 954. With the screws removed, carefully slide the top cover to the rear exposing the PCA inside (see Appendix A for PCA schematic). Locate the jumpers numbered 3 to 10. They are selected as follows:

Jumper position 3

Jumper position 4

Jumper position 5

Jumper position 6

Jumper position 7

Jumper position 8

Jumper position 9

Jumper position 10

Channel 1

Channel 1

Channel 2

Channel 2

Channel 3

Channel 3

Channel 4

Channel 4

30 Vdc valve

15 Vdc valve

30 Vdc valve

15 Vdc valve

30 Vdc valve

15 Vdc valve

30 Vdc valve

15 Vdc valve

Move the jumpers if needed, close the cover, replace the 2 screws.

PAGE 6B

START-UP

The Model 954 has a 100 Vac, 115 Vac or 230 Vac, 50/60 Hz power selector switch located at the rear of the instrument. Please refer to page 4 to locate this switch. Verify the power selector switch is in the proper position prior to connecting the power cable to the unit. Verify power ON/OFF switch is in the OFF position. Then perform the following steps.

1. Connect the power cable to the instrument and apply the proper input power. Do not make any other connections to the instrument.

2. Turn power ON/OFF switch ON.

3. The display will momentarily display the current version of the firmware utilized, If you purchase the model

954 separately, it will show the following factory default display:

126.72 SCCM #1

126.72 SCCM #2

126.71 SCCM C3H6O

126.72 SCCM C2H3N

If your model 954 was purchased with Sierra MFM or MFC instruments, each channel will be set to the

proper calibration for that unit.

Note: All 4 channels should have the CLOSE annunciators illuminated. The values 126.71 and 126.72

are approximate and is the display for an open signal input . It may not correspond exactly to the

display shown on this unit.

4. Change the Units of Measure and Gas Identifiers as desired. Please refer to page 10. To blank the Units

of Measure select "00" then "ENT". To blank the Gas Identifier select "000" then "ENT". To blank the

entire line, please refer to RS232/485 Commands, Selecting/Blanking/Reading Display on page 21.

5. The Model 954 is factory calibrated at 0.000 and 5.000Vdc to display 0.00 and 100.00 for each channel.

To change the display range, without recalibration, see MANUAL CAL/RANGE, Range(Changing

Range) on page 15. To enter a Gas Correction Factor or Multiplier, refer to MANUAL CAL/RANGE,

Calibrate (Multiplier) on page 16. The factory Multiplier setting is 1.0000.

6. The Model 954 can accept 0-5Vdc, 0-10Vdc or 4-20mA input signals. If either 0-10Vdc or 4-20mA is required, the instrument needs to be recalibrated. Select the proper signal input for the Transducer to be used for each channel. Please refer to MANUAL SETUP, Selecting Input on page 11. Do not attempt to recalibrate the instrument at this time. The factory Input setting is 0-5Vdc.

7. Select Filter to optimize reading stability and conversion speed. The factory Filter setting is 15Hz.

8. Allow 30 minutes warm-up time.

9. Turn power ON/OFF switch OFF.

10 . Connect MFC/MFM #1 to J1 on the Model 954 using the Connector Pin Designation information on

page 5. Connect all ground connections available to the transducer. Example: If the MFC/MFM has 4

ground pins, connect all four ground pins shown on J1. All ground pins on J1, J2, J3 and J4 are

common but are routed on separate wires from the connector to a ground plane on the instrument

motherboard.

11. Connect MFC/MFM #2, 3 and 4 to the instrument. The Power Supply inside The 954 is designed to

provide +/-15Vdc @ 250-400 mA to each transducer. Do not use a Transducer that requires more than

+/-15Vdc @ 500mA on any channel.

12. Verify the display illuminates and the transducer readings are essentially correct. If the selected signal

input for a channel is 0-5Vdc proceed to Step 13 for that channel. If the selected signal input for a

channel is 0-10Vdc or 4-20mA, that channel needs to be recalibrated. Refer to MANUAL CAL/RANGE,

Calibrate section pages 14 and 15 to recalibrate that channel.

PAGE 7

START-UP

13. To utilize the Setpoint (Control) voltage for MFC's, set the Setpoint voltage for each channel to the

desired setting. Please refer to MANUAL SETUP, Selecting Setpoint (Control Voltage) on page 10.

The factory Setpoint default is 0.0000 for all 4 channels.

The Setpoint voltage, for a 0-5Vdc signal input, is calculated as follows.

Setpoint Voltage = (Setpoint Value/Range Value) * 5.000Vdc

Example: If the Setpoint Value = 120.00 SCCM and the Range Value is 250.00 SCCM,

the Setpoint Voltage = (120.00/250.00)*5.000 = 2.400Vdc.

For a 0-10Vdc signal input

the Setpoint Voltage= (120.00/250.00)*10.000Vdc = 4.800Vdc

For a 4-20mA signal input

the Setpoint Current = (120.00/250.00)*16mA + 4mA = 11.68mA.

14. The Flowrate Alarms are used to monitor the flowrate of the MFC. If the flow rate is not within the

selected HIGH and LOW Alarm values, an opto-isolated open collector output is activated. This output

can be used to illuminate warning lights to alert the user if the Flow Controller's Setpoint (Control)

voltage is not controlling the flow within a desired window. Refer to MANUAL SETUP, Selecting Alarms

on page 12. The factory default is HIGH Alarm set at 75.000, LOW Alarm at 25.000 and HYSTERESIS

at 010 counts.

15. To activate the Setpoint (Control) voltage to the MFC, select RUN for the desired channel. Reference

MANUAL SETUP, Selecting Valve Override (Open, Close or Run) on page 9. The default at power-up

is Valve Close.

16. If the Units of Measure are in flow units, The Model 954 automatically calculates TOTAL flow using a

Riemann Sum Integration method. To display TOTAL or to reset the TOTAL display, refer to

MANUAL/SETUP, Selecting Display (Flow or Total) on page 9. If the Units of Measure are not in flow

units, the TOTAL is not calculated or displayed.

17. The Model 954 has both RS232 and RS485 serial communications ports. Only one port is active at any

one time and is user selectable. The RS232 port has (1) 9-pin D-sub connector, while the RS485 port

has (2) 9-pin D-sub connectors. All Setups described earlier can be performed using the serial

communications ports. Reference RS232/485 Hookup and Commands on pages 17 through 26.

PAGE 8

MANUAL SETUP

Selecting Display (Flow or Total)

MENU

--

MENU: 1=DISPLAY

2=SETUP

3=CAL/RANGE

4=COMM

DISPLAY: 1=FLOW

2=TOTAL

FLOW: 1=Chnl 1

2=Chnl 2

3=Chnl 3

4=Chnl 4

|

|

|

|

|

---- TOTAL: 1=Chnl 1

2=Chnl 2

3=Chnl 3

4=Chnl 4

500.0 SCCM Ar

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

RESET TOTAL?

1=NO

2=YES

500.0 SCCM Ar

T 0000 SCC H2

50.00 SCCM CF4

950.0 SCCM CH4

If Flow is selected, the most significant digit location will be left blank. If Total is selected, a "T" appears in this location and the Unit of Measure changes accordingly. If the Unit of Measure selected is not a flow rate unit of measure, Total will not be displayed.

Selecting Valve Overide (Open, Close or Run)

CH SEL

-- * 500.0 SCCM Ar

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

|

|

|

|

|

|

|

|

|

|

|

|

|

|

|

|

|

|

OPEN CLOSE

CH1 500.0 SCCM Ar

CH2 1000 SCCM H2

CH3 50.00 SCCM CF4

CH4 950.0 SCCM CH4

OPEN CLOSE

CH1 500.0 SCCM Ar

CH2 1000 SCCM H2

CH3 50.00 SCCM CF4

CH4 950.0 SCCM CH4

OPEN CLOSE

CH1 500.0 SCCM Ar

CH2 1000 SCCM H2

CH3 50.00 SCCM CF4

CH4 950.0 SCCM CH4

Channel 1 is shown selected above. An asterisk appears to signify the Channel selected. To select

Channel 2, depress CH SEL switch twice, then select OPEN, CLOSE or RUN. If OPEN is selected, ground is applied to the appropriate channel connector pin-4. This ground is at the same potential as pin-9. If CLOSE is selected, ground is applied to pin-12. Both pin-4 and pin-12 are grounded with an open collector transistor capable of sinking 250mA at 25V. If RUN is selected, no override signals are sent and the MFC Setpoint control is activated. If the valve override does not appear to function correctly, you may need to re-configure The Model 954 using the 15/30 VDC jumpers on the PCA. Refer to page 6B to verify valve circuit configuration of The 954 is correct for your MFM or MFC.

PAGE 9

MANUAL SETUP

Selecting Setpoint (Control Voltage)

CH SEL

--

*

575.0

SCCM Ar

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

500.0 SCCM Ar

*

1250.0

SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

500.0 SCCM Ar

*

1575.0

SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

The example above shows how the setpoint for Channel 2 is changed. When CH SEL is depressed an asterisk points to the channel selected. To select Channel 4, depress CH SEL switch 4 times.

The value displayed after the asterisk is the current setpoint value. Typing in a new value overrides the old value. If ESC is depressed instead of ENT, the old value is retained.

Selecting Units of Measure and Gas Identifiers

MENU

--

MENU: 1=DISPLAY

2=SETUP

3=CAL/RANGE

4=COMM

1=BRIGHTNESS

2=UNITS/GASID

3=FILTER

:

4=INPUT

5=ALARM

6=RATIO

2=Chnl 2

3=Chnl 3

4=Chnl 4

1=SCCM

2=SLM

3=%

:

66=PSI

-------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------

--------

GASID:

1=#1

2=#2

3=C3H60

:

191=C8H10

500.0

SCCM C3H60

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

The bold characters shown in the above flow chart indicate the updated Units of Measure and Gas

Identifier selected. Note: When the Units of Measure and Gas Identifiers are selected, ENT must be depressed before the selection is made. This is because it may require the inputting of more than 1 digit to make the desired selection.

PAGE 10

MANUAL SETUP

Selecting Filter (-3db A/D Converter Filter Frequency)

MENU -- MENU: 1=DISPLAY

2=SETUP

3=CAL/RANGE

4=COMM

-- -- SETUP:

1=BRIGHTNESS

2=UNITS/GASID

3=FILTER

-- -- FILTER: 1=Chnl 1

2=Chnl 2

3=Chnl 3

4=Chnl 4

:

4=INPUT

5=ALARM

6=RATIO

-- -- FILTER: 1=4Hz

2=15Hz

CHANNEL 1 3=30Hz

15Hz 4=100Hz

-- -- 500.0 SCCM N2

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

The Filter selection sets the output word rate which in turn sets the corner frequency for the sigma-delta A/D converter. With an output word rate of 15Hz, the filter's corner frequency is typically 12.7Hz. The filters are optimized to settle to full accuracy every conversion and yield better than 80dB rejection for both 50 and 60Hz with output word rates at or below 15Hz. The last filter output word rate setting for the selected channel is displayed for user convenience. Each channel may be set to a different filter output word rate. The factory default is15Hz for each channel to optimize response time and noise rejection.

Selecting Input (0-5Vdc, 0-10Vdc or 4-20mA Signal Input)


2=SETUP

3=CAL/RANGE

4=COMM

-- -- SETUP:

1=BRIGHTNESS

2=UNITS/GASID

3=FILTER

:

4=INPUT

5=ALARM

6=RATIO

INPUT: 1=Chnl 1

2=Chnl 2

3=Chnl 3

4=Chnl 4

ANALOG: 1=0-5V

2=0-10V

CHANNEL 2 3=4-20mA

0-5V

-- -- 500.0 SCCM N2

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

The Input selection sets the full scale input signal and the full scale setpoint (control) signal for the selected channel. The selected channel and the input signal setting that was previously selected is displayed during selection. The factory default is 0-5V for each channel. Any input may be selected for any channel. The instrument compensates for any incompatibilities even in the Master/Slave configuration.

Example: If the full scale input selected is 0-10V, then the full scale setpoint output is also 0-10V. If the

Master Channel is 0-10V and the Slave Channel is 4-20mA, the instrument compensates for the the 0-10V input signal for the Slave. incompatibility and sends a 0-10V setpoint signal for the Master and a 4-20mA setpoint signal proportional to

Note: For most MFC's the full scale input is 0-5V.

PAGE 11

MANUAL SETUP

Selecting Alarms (High and Low with Hysteresis)


2=SETUP

3=CAL/RANGE

4=COMM

-- -- SETUP:

1=BRIGHTNESS

2=UNITS/GASID

3=FILTER

-- -- ALARM: 1=Chnl 1

2=Chnl 2

3=Chnl 3

4=Chnl 4

:

4=INPUT

5=ALARM

6=RATIO

----------------------------------------------------------------------------------------------------

ALARMS: 1=HIGH LIMIT

2=LOW LIMIT

3=HYSTERESIS

4=EXIT

-------------------- -----

3

2

-------- -------

1

-------------- -------

ALARM:

CHANNEL 1

HIGH LIMIT

75.000

---

ALARM:

CHANNEL 1

LOW LIMIT

25.000

---------

ALARM:

CHANNEL 1

HYSTERESIS 010

------------------

500.0 SCCM C3H60

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

--------------------------------------------------------------------------------------------------------------------

Each channel has a HIGH and LOW alarm to monitor the flow rate signal. If the flow rate is higher than on. This the HIGH alarm or less than the LOW alarm, an optically isolated open collector output is turned the setpoint (control) alarm may be used as a warning that the flow rate is not within the limits set by deadband for the alarms. To exit the signal. A programmable HYSTERESIS of 1 to 999 counts provide a alarm setup a "4" to exit must be selected.

from

010 for

In the above example, the HIGH alarm limit was changed from 75.000 to 50.000, the LOW alarm limit

25.000 to 10.000 and HYSTERESIS from 010 to 001. The factory default is 75.000, 25.000 and the HIGH, LOW and HYSTERESIS settings, respectively.

PAGE 12

MANUAL SETUP

Selecting Ratio (Master/Slave Operation)


2=SETUP

3=CAL/RANGE

4=COMM

-- -- SETUP:

1=BRIGHTNESS

2=UNITS/GASID

3=FILTER

-- -- RATIO:

1=DISABLE MASTER

2=ENABLE MASTER

3=EXIT

:

4=INPUT

5=ALARM

6=RATIO

--------------------------------------------------------------------------------------------------------

----

SLAVE A:

1=DISABLED

2=CHAN 2

3=EXIT

------------ ----

3

2

SLAVE B:

1=DISABLED

2=CHAN 3

3=EXIT

2

1

-- -------

1=DISABLED

2=CHAN 4

3=EXIT

500.0 SCCM C3H60

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

500.0 SCCM C3H60

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

---

SLAVE C:

1=DISABLED

2=CHAN 4

3=EXIT

M 500.0 SCCM C3H60

1000 SCCM H2

S 50.00 SCCM CF4

950.0 SCCM CH4

---

SLAVE B:

1=DISABLED

2=CHAN 3

3=EXIT

SLAVE C:

1=DISABLED

2=CHAN 4

3=EXIT

M 500.0 SCCM C3H60

S 1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

---

M 500.0 SCCM C3H60

S 1000 SCCM H2

50.00 SCCM CF4

S 950.0 SCCM CH4

--- SLAVE C:

1=DISABLED

2=CHAN 4

3=EXIT

M 500.0 SCCM C3H60

S 1000 SCCM H2

S 50.00 SCCM CF4

950.0 SCCM CH4

---

M 500.0 SCCM C3H60

S 1000 SCCM H2

S 50.00 SCCM CF4

S 950.0 SCCM CH4

--------------------------------------------------------------------------------------------------------------- 500.0 SCCM C3H60

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

PAGE 13

MANUAL CAL/RANGE

Calibrate (Zero only)

SCREEN 1


2=SETUP

3=CAL/RANGE

4=COMM

SCREEN 2

-- -- CAL/RANGE

1=CALIBRATE

2=RANGE

SCREEN 3

-- -- CALIBRATE: 1=Chnl1

2=Chnl2

3=Chnl3

4=Chnl4

-------------------------------------------------------------------------------------------------------

----

SCREEN 4

CALIBRATE:

1=ZERO ONLY

2=ZERO & RANGE

3=RANGE ONLY

:

4=MULTIPLIER

SCREEN 5

-- -- ZERO:

CHANNEL 1

SIGNAL

9

ENTER TO ACCEPT

SCREEN 6

0.0 SCCM C3H60

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

The "Zero only" sequence shown above is used to zero the MFC. Verify the input signal is at or close to zero prior to performing this sequence. In SCREEN 5, the data shown after "SIGNAL" is the raw analog-to-digital data corresponding to the input signal applied. This data is live and will change as the input signal is changed. It should be close to zero, unless the MFC is being zeroed at a point other than zero. If ENT is depressed during SCREEN 5, the value present at the input will be zeroed on the display, as shown in SCREEN 6. If ESC is entered, the previous zeroed value applies.

Calibrate (Range only)

SCREEN 1


2=SETUP

3=CAL/RANGE

4=COMM

SCREEN 2

-- -- CAL/RANGE

1=CALIBRATE

2=RANGE

SCREEN 3


2=Chnl2

3=Chnl3

4=Chnl4

SCREEN 4

CALIBRATE:

1=ZERO ONLY

2=ZERO & RANGE

3=RANGE ONLY

:

4=MULTIPLIER

-------

----

SCREEN 5

RANGE VALUE:

CHANNEL 1

VALUE

100.00

ENTER TO ACCEPT

ENT

Entering 0150.0 instead of 150.00

will result in a full scale display of 150.0 instead of 150.00

SCREEN 6

RANGE VALUE:

CHANNEL 1

SIGNAL

25963

ENTER TO ACCEPT

SCREEN 7

150.00 SCCM C3H60

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

The Range only sequence is used to calibrate the full scale reading of the MFC. Apply a full scale input signal, typically 5Vdc to the signal input prior to performing this sequence. At SCREEN 5, the user has 2 alternatives. The first is to accept the display RANGE value shown by depressing ENT. The second is to enter a new RANGE value, as shown above, prior to completing the RANGE sequence. The Signal displayed on SCREEN 6 is the live, un-scaled analog-to-digital converter data, and will change as the input changes. The value present when ENT is depressed will be used in the full scale calibration calculations. If ESC is entered instead of ENT, the previous calibration applies. NOTE: DO NOT USE

THE RANGE ONLY SEQUENCE TO CHANGE RANGES. USE SELECTION 2 SHOWN IN SCREEN 2.

PAGE 14


Calibrate (Zero & Range)

SCREEN 1


2=SETUP

3=CAL/RANGE

4=COMM

SCREEN 2

-- -- CAL/RANGE

1=CALIBRATE

2=RANGE

SCREEN 3


2=Chnl2

3=Chnl3

4=Chnl4

-------------------------------------------------------------------------------------------------------

----

SCREEN 4

CALIBRATE:

1=ZERO ONLY

2=ZERO & RANGE

3=RANGE ONLY

:

4=MULTIPLIER

---------

----

SCREEN 7

RANGE VALUE:

CHANNEL 1

SIGNAL

25963

ENTER TO ACCEPT

SCREEN 5

-- 2 -- ZERO:

CHANNEL 1

VALUE

9

ENTER TO ACCEPT

SCREEN 8

150.00 SCCM C3H60

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

SCREEN 6

RANGE VALUE:

CHANNEL 1

VALUE

100.00

ENTER TO ACCEPT

ENT

The Zero & Range calibration allows both zero and full scale calibrations to be performed in the same sequence. The input signal needs to be changed from a zero to a full scale value during the calibration sequence. The same rules apply as previously mentioned in the Zero only and Range only procedures.

Range (Changing Range)

SCREEN 1


2=SETUP

3=CAL/RANGE

4=COMM

SCREEN 2

-- -- CAL/RANGE

1=CALIBRATE

2=RANGE

SCREEN 3

-- -- RANGE: 1=Chnl1

2=Chnl2

3=Chnl3

4=Chnl4

-------------------------------------------------------------------------------------------------------

----

SCREEN 4

RANGE VALUE:

CHANNEL 1

VALUE

100.00

ENTER TO ACCEPT

ENT

SCREEN 5

150.00 SCCM C3H60

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

The Range sequence is not a calibration sequence. Changing the Range value simply replaces the

Range value used during the previous full scale calibration. The analog-to-digital converter data used during the previous full scale calibration is still valid. Ranging is a simple way to change ranges when changing MFC's. It assumes the full scale output voltage of the new MFC is the same as the previous

MFC.

PAGE 15


Calibrate (Multiplier)

SCREEN 1


2=SETUP

3=CAL/RANGE

4=COMM

SCREEN 2

-- -- CAL/RANGE

1=CALIBRATE

2=RANGE

SCREEN 3


2=Chnl2

3=Chnl3

4=Chnl4

-------------------------------------------------------------------------------------------------------

----

SCREEN 4

CALIBRATE:

1=ZERO ONLY

2=ZERO & RANGE

3=RANGE ONLY

:

4=MULTIPLIER

SCREEN 5

-- -- MULTIPLIER

CHANNEL 1

FACTOR 1.0000

ENT

SCREEN 6

105.00 SCCM C3H60

1000 SCCM H2

50.00 SCCM CF4

950.0 SCCM CH4

Entering a MULTIPLIER value changes the display by that multiplier factor. All data values are multiplied

by the MULTIPLIER prior to display. The MULTIPLIER is sometimes referred to as a GAS

CORRECTION factor when used with MFC's. If the MFC is calibrated with nitrogen and

a nother gas is used with the MFC, a GAS CORRECTION factor can be entered to recalibrate the MFC to the gas used.

PAGE 16

RS232/485 HOOKUP

BI-DIRECTIONAL RS-232 CONNECTION

PC1

COM1/COM2

TXD -----------------------------

RXD ----------------------------

KDT-4000

RXD

TXD

DIGITAL GND

IC-232 IC-232

RS232/485 data is transmitted at 9600 or 19.2K baud (user-selectable) in the following format:

One Start Bit

Eight Data Bits in ASCII Format

No Parity Bit

One Stop Bit

Note: All commands and queries are case sensitive and require an upper case character.

Reading Display

RS232 Query:

C1 Response: "CH1<>sddd.dd<>eeeee<>xxxxx<>z where: <>= blank (ASCII 20)

s= polarity sign (blank for +, ASCII 2E for -)

C5

ddd.dd= data in ASCII format with decimal in

displayed position.

eeeee= unit of measure

xxxxx= gas id

z= carriage return (ASCII 0D)

Response: "CH1<>sddd.dd<>eeeee<>xxxxx<>z

CH2<>sddd.dd<>eeeee<>xxxxx<>z


CH4<>sddd.dd<>eeeee<>xxxxx<>z"

RS485 Query:

*aaC1 Response: "CH1<>sddd.dd<>eeeee<>xxxxx<>z

*aaC5 Response: "CH1<>sddd.dd<>eeeee<>xxxxx<>z



CH4<>sddd.dd<>eeeee<>xxxxx<>z" where: aa= KDT-4000 address

Reference: Checking/Changing RS485 Address on pg 19.

MULTIDROP/4-WIRE FULL DUPLEX

RS-485 CONNECTION

PC1

COM1/COM2

KDT-4000 #01

TXD(+) -----------------------------

TXD(-) -----------------------------

RXD(+) -----------------------------

RXD(-) -----------------------------

IC-485

RXD(+)

RXD(-)

TXD(+)

TXD(-)

--------------------- RXD(+)

------------------ RXD(-)

---------------- TXD(+)

-------------- TXD(-)

IC-485

PC2

COM1/COM2

IC-485

KDT-4000 #02

:

:

--------------------- RXD(+)

------------------ RXD(-)

---------------- TXD(+)

------------- TXD(-)

--------------------- RXD(+)

------------------ RXD(-)

---------------- TXD(+)

------------- TXD(-)

IC-485

:

:

:

:

:

:

:

:

KDT-4000 #nn

--------------------- RXD(+)

------------------ RXD(-)

---------------- TXD(+)

------------- TXD(-)

J9-7

2

3

8

IC-485

Note: nn=32 maximum (drivers and receivers)

PAGE 17

RS232/485 COMMANDS

Checking

Model 954 RS485 Address Setting

RS485 Query:

*00X Response: "MULTIDROP ADDRESS: 01"

Note: All Model 954's will respond to * 0 0 X. To prevent bus

contention, connect only 1 Model 954 to the RS485

port for this check.

Setting Setpoint (Control) Voltage

RS232 Command:

SP1<dd.ddd>

SP2<dd.ddd>

SP3<dd.ddd>

Set CH1 Setpoint to dd.ddd



SP4<dd.ddd> Set CH4 Setpoint to dd.ddd

Example: Send S P 1 1 0 0 . 0 0

CH1 Setpoint (Control) Voltage setting will be

100.00.

Note: < > must contain 5 digits and 1 decimal point.

<ddddd.> is a valid entry. Setpoint is always positive.

RS485 Command:

*aaSP1<dd.ddd> Set CH1 Setpoint at Address 01 to dd.ddd




Example: Send * 0 1 S P 2 2 5 0 0 . 0

Model 954 with Address 01 will have CH2 Setpoint

(Control) Voltage set to 2500.0

Setting Alarms

RS232 Command:

A1H<dd.ddd>

A2L<dd.ddd>

A2H<dd.ddd>

A2L<dd.ddd>

A3H<dd.ddd>

A3L<dd.ddd>

A4H<dd.ddd>

Set CH1 High Alarm to dd.ddd

Set CH1 Low Alarm to dd.ddd






A4L<dd.ddd> Set CH4 Low Alarm to dd.ddd

Example: Send A 4 L 3 5 . 0 0 0

CH4 Low Alarm Setpoint will be 35.000

RS485 Command:

*aaA1H<dd.ddd> Set CH1 High Alarm at Address 02 to dd.ddd

*aaA1L<dd.ddd> Set CH1 Low Alarm at Address 02 to dd.ddd





Example: Send *02A3H500.00

Model 954 with Address 02 will have CH3 High

Alarm set to 500.00

Changing Model 954 RS485 Address Setting

RS485 Command:

*00x<aa> Set 954 Address to aa

Example: Send * 0 0 x 2 2

Model 954 will respond with a "spade" character

to acknowledge receipt of this command and

change its Address to "22"

Reading Setpoint (Control) Voltage

RS232 Query:

SP1 Response: "SP1ddd.dd"




RS485 Query:

*aaSP1 Response: "SP1ddd.dd"




Reading Alarms

RS232 Query:

A1H Response: A1H ddd.dd

A1L Response: A1L ddd.dd






A4L Response: A4lL ddd.dd

RS485 Query:

*aaA1H Response: A1H ddd.dd

*aaA1L Response: A1H ddd.dd


*aaA2L Response: A2L ddd.dd





PAGE 18


Setting Alarm Hysteresis

RS232 Command:

HY1<ddd>

HY2<ddd>

HY3<ddd>

HY4<ddd>

Set CH1 Alarm Hysteresis to ddd



Set CH4 Alarm Hysteresis to ddd where 000<ddd<250

Example: Send HY1010

CH1 Alarm Hysteresis set to 10 counts.

RS485 Command:

*aaHY1<ddd>

*aaHY2<ddd>

*aaHY3<ddd>

Set CH1 Hysteresis at Address aa to ddd



*aaHY4<ddd> Set CH4 Hysteresis at Address aa to ddd

Example: Send * 0 1 HY3100

Model 954 with Address 01 will have CH3 Alarm

Hysteresis set to 100

Setting Units of Measure

RS232 Command:

UM1<dd>

UM2<dd>

UM3<dd>

UM4<dd>

Set CH1 Unit of Measure to selection dd




Reference Units of Measure Table on pg 14 for selection

Example: Send UM101

CH1 Unit of Measure will be SCCM

RS485 Command:

*aaUM1<dd>

*aaUM2<dd>

*aaUM3<dd>

*aaUM4<dd>

Set CH1 Unit of Measure at Address 02 to selection dd




Example: Send *03UM366

Model 954 with Address 02 will have CH3 Unit of

Measure set to PSI

Setting Gas Idenfifier

RS232 Command:

GS1<ddd>

GS2<ddd>

GS3<ddd>

GS4<ddd>

Set CH1 Gas Identifier to selection dd




Reference Gas Identifier Table on pgs 15, 16 and 17 for selection

Example: Send GS1050

CH1 Gas Identifier will be C2H6O

Reading Alarm Hysteresis

RS232 Query:

HY1 Response: HY1ddd




Example: Send IN3 Response: IN3

RS485 Query:

*aaHY1 Response: HY1ddd




Reading Units of Measure

RS232 Query:

UM1 Response: UM1dd

UM2 Response: UM2dd

UM3 Response: UM3dd

UM4 Response: UM4dd

Example: Send UM1

Response: UM11 if CH1 Unit of Measure was

RS485 Query:

SCCM

*aaUM1 Response: UM1dd




Reading Gas Identifier

RS232 Query:

GS1 Response: GS1ddd




Example: Send GS3

Response: GS3050 if CH1 Gas Identifier was

C2H60

PAGE 19


Setting Signal Input

RS232 Command:

IN1<d>

IN2<d>

IN3<d>

IN4<d>

Set CH1 Signal Input to selection d



Set CH4 Signal Input to selection d where d=1 Signal Input = 0-5V

d=2 Signal Input = 0-10V

d=3 Signal Input = 4-20mA

Example: Send IN33

CH3 Signal Input selection is 4-20mA. This also

sets CH3 Setpoint (Control) signal to 4-20mA.

RS485 Command:

*aaIN1<d> Set CH1 Signal Input at Address aa to selection d

*aaIN2<d> Set CH2 Signal Input at Address aa to selection d

*aaIN3<ddd> Set CH3 Signal Input at Address aa to selection d

*aaIN4<ddd> Set CH4 Signal Input at Address aa to selection d

Example: Send *01IN31

Model 954 with Address 01 will have CH3 Signal

Input set for 0-5V.

Setting Filter

RS232 Command:

FL1<d>

FL2<d>

FL3<d>

FL4<d>

Set CH1 Filter selection to d




Where d=1

d=2

d=3

d=4

Filter = 4Hz

Filter = 15Hz

Filter = 30Hz

Filter =100Hz

Example: Send FL12

CH1 Filter f(-3dB) will be 15Hz

RS485 Command:

*aaFL1<d>

*aaFL2<d>

*aaFL3<d>

*aaFL4<d>

Set CH1 Filter at Address aa to selection d




Example: Send *03FL13

Model 954 with Address 03 will have CH1 Filter selection set for 30Hz.

Reading Signal Input Selection

RS232 Query:

IN

1 Response: IN1<>d<>zzzzz

IN2 Response: IN2<>d<>zzzzz

IN3

IN4

Response: IN3<>d<>zzzzz

Response: IN4<>d<>zzzzz

Where zzzzz = 0-5V for d=1 zzzzz = 0-10V for d=2 zzzzz = 4-20mA for d=3

Example: Send IN3 Response: IN3 3 4-20mA

RS485 Query:

*aaIN1 Response: IN1<>d<>zzzzz




Example: Send *10IN2 Response: IN2 1 0-5V

Reading Filter

RS232 Query:

FL1 Response: FL1<>d<>zzzzz

FL2

FL3

FL4

Response: FL2<>d<>zzzzz



Where zzzzz = 4Hz for d=1 zzzzz = 15Hz for d=2 zzzzz = 30Hz for d=3 zzzzz = 100Hz for d=4

Example: Send FL1

Response: FL1 2 15Hz if CH1 Filter selection

was 2.

RS485 Query:

*aaFL1 Response: FL<>1<>zzzzz



*aaFL4 Response: FL4<>4<>zzzzz

PAGE 20


Setting Multiplier

RS232 Command:

ML1<d.dddd>

ML2<d.dddd>

ML3<d.dddd>

ML4<d.dddd>

Set CH1 Multiplier to d.dddd




Example: Send ML31.1375

CH3 Multiplier=1.1375

RS485 Command:

*aaML1<d.dddd> Set CH1 Multiplier at Address aa to d.dddd

*aaML2<d.dddd> Set CH2 Multiplier at Address aa to d.dddd

*aaIN3<d.dddd> Set CH3 Multiplier at Address aa to d.dddd

*aaIN4<d.dddd> Set CH4 Multiplier at Address aa to d.dddd

Example: Send *05ML31.0000

Model 954 with Address 05 will have CH3

M ultiplier set to 1.0000.

Setting/Blanking Display (Flow or Total)

RS232 Command:

D1<d>

D2<d>

D3<d>

D4<d>

Set CH1 Display to selection d




Where d=1 sets Display for TOTAL

d=2 sets Display for FLOW

d=3 blanks Display for selected Channel

Example: Send D11

CH1 Display shows TOTAL

RS485 Command:

*aaD1d

*aaD2d

*aaD3d

*aaD4d

Model 954 with Address 03 will display FLOW on

CH1

Set CH1 Display at Address aa to selection d




Example: Send *03D12

Reading Multiplier

RS232 Query:

ML1 Response: ML1<><>d.dddd




Example: Send ML3 Response: ML3 1.1375

RS485 Query:

*aaML1 Response: ML1<><>d.dddd




Reading Display (Selection)

RS232 Query:

D1 Response: D1d

D2

D3

D4

Response: D2d

Response: D3d

Response: D4d

Example: Send D1

Response: D12 indicates d=2 for FLOW on CH1

RS485 Query:

*aaD1 Response: D1d

*aaD2 Response: D2d

*aaD3 Response: D3d

*aaD4 Response: D4d

PAGE 21


Resetting Total

RS232 Command:

T1R

T2R

T3R

T4R

Reset CH1 Total to zero




Example: Send T3R

CH3 Total reset to zero

RS485 Command:

*aaT1R

*aaT2R

*aaIT3R

*aaIT4R

Reset CH1 Total at Address aa to zero




Example: Send *01T1R

Model 954 with Address 01 CH1 Total reset to zero

Setting Range Value

RS232 Command:

SN1<d.dddd>

SN2<d.dddd>

SN3<d.dddd>

SN4<d.dddd>

Set CH1 Range value to d.dddd




Example: Send SN1150.00

CH1 Range value set to 150.00

RS485 Command:

*aaSN1<d.dddd> Set CH1 Range value at Address aa to d.dddd

*aaSN2 <d.dddd> Set CH2 Range value at Address aa to d.dddd



Example: Send *03SN35000.0

Model 954 with Address 03 will have CH3 Range value set to 5000.0.

Enable Master Channel (CH1)

RS232 Command:

R11

R12

Enable Master Channel (CH1)

Disable Master Channel (CH1)

Note: Master Channel must be enabled before enabling Slave Channel(s)

Setting Local or Remote Operation

RS232 Command:

RE1 Local Operation (Front Panel Enabled)

RE2 Remote Operation (Front Panel Disabled)

RS485 Command:

*aaRE1 Local Operation (Front Panel Enabled)

*aaRE2 Remote Operation (Front Panel Disabled)

Reading Range Value

RS232 Query:

SN1 Response: SN1d.dddd




Example: Send SN1

Response: SN1150.00

RS485 Query:

*aaSN1 Response: SN1d.dddd




Enable Slave Channels (CH2, CH3 and CH4)

RS232 Command:

R21

R22

R31

R32

R41

R42

Enable Slave A (CH2)

Disable Slave A (CH2)

Enable Slave B (CH3)

Disable Slave B (DH3)

Enable Slave C (CH4)

Disable Slave C (CH4)

RS485 Command;

*aaR21

*aaR22

*aa R31

*aaR32

*aaR41

*aa R42

Enable Slave A (CH2)

Disable Slave A (CH2)

Enable Slave B (CH3)

Disable Slave B (CH3)

Enable Slave C (CH4)

Disable Slave C (CH4)

PAGE 22

UNITS OF MEASURE TABLE

#

61

62

63

64

57

58

59

60

65

66

53

54

55

56

49

50

51

52

45

46

47

48

41

42

43

44

37

38

39

40

33

34

35

36

29

30

31

32

25

26

27

28

21

22

23

24

17

18

19

20

13

14

15

16

9

10

11

12

5

6

7

8

1

2

3

4

Description

Standard Cubic Centimeters per Minute

Standard Liters per Minute

Percent

Volts

Millivolts

Counts

Normal Liters per Minute

Standard Liters per Second

Normal Liters per Second

Standard Liters per Hour

Normal Liters per Hour

Standard Milliliters per Minute

Normal Milliliters per Minute

Standard Milliliters per Second

Normal Mililiters per Second

Standard Milliliters per Hour

Normal Milliliters per Hour

Normal Cubic Centimeters per Minute

Standard Cubic Centimeters per Second

Normal Cubic Centimeters per Second

Standard Cubic Centimeters per Hour

Normal Cubic Centimeters per Hour

Standard Cubic Feet per Minute

Normal Cubic Feet per Minute

Standard Cubic Feet per Second

Normal Cubic Feet per Second

Standard Cubic Feet per Hour

Normal Cubic Feet per Hour

Standard Cubic Meters per Minute

Normal Cubic Meters per Minute

Standard Cubic Meters per Second

Normal Cubic Meters per Second

Standard Cubic Meters per Hour

Normal Cubic Meters per Hour

Standard Cubic Meters per Hour

Normal Cubic Inches per Minute

Standard Cubic Inches per Second

Normal Cubic Inches per Second

Standard Cubic Inches per Hour

Normal Cubic Incher per Hour

Pounds per Minute

Pounds per Second

Pounds per Hour

Kilograms per Minute

Kilograms per Second

Kilograms per Hour

Grams per Minute

Grams per Second

Grams per Hour

Moles per Minute

Moles per Second

Moles per Hour

Kilomoles per Minute

Kilomoles per Second

Kilomoles per Hour

Watts

Bits per Second

Seconds

Minutes

Hours

Watt*Hours

Torr

Bar

Pascals

Inches of Water

Pounds per Square Inch

Abbrev Total

SCFM SCF

NCFM NCF

SCFS SCF

NCFS NCF

SCFH SCF

NCFH NCF

SCMM SCM

NCMM NCM

SCMS SCM

NCMS NCM

SCMH SCM

NCMH NCM

SCMH SCM

NCIM NCI

SCIS SCI

NCIS NCI

SCIH SCI

NCIH NCI

LBM

LBS

LBH

KgM

KgS

KgH

GRM

GRS

LB

LB

LB

Kg

Kg

Kg

GR

GR

GRH GR

MolM Mol

SCCM SCC

SLM

%

V

MV

CNT

SL

NA

NLM

SLS

NLS

SLH

NLH

SMLM SML

NMLM NML

SMLS SML

NMLS NML

SMLH SML

NMLH NML

NCCM NCC

SCCS SCC

NCCS NCC

SCCH SCC

NCCH NCC

SL

NL

SL

NL

NA

NA

NA

NL

MolS

MolH

Mol

Mol

KMolM KMol

KMolS KMol

KMolH KMol

W NA

BP BPS

S

M

H

NA

NA

NA

W WH

TORR NA

BAR

Pa

NA

NA inH20 NA

PSI NA

PAGE 23

GAS IDENTIFICATION TABLE

56

57

58

59

60

61

62

63

48

49

50

51

52

53

54

55

64

66

40

41

42

43

44

45

46

47

32

33

34

35

36

37

38

39

24

25

26

27

28

29

30

31

16

17

18

19

20

21

22

23

8

9

10

11

12

13

14

15

4

5

6

7

#

1

2

3

GAS

Acetic Acid, Anhydride

Acetonitryl

Air

Arsine

Ammonia

Boron Trichloride

Boron Triflouride

Carbonyl Sulfide

Chloropentafluoroethane

Cyclopropane

Dichloropropane

Diethyl Amine

Diethyl Sulfide

Difluoroethylene

Dimethylamine

Dimethyl Ether

Divinyl

Ethane

Ethane, 1-chloro-1,2,2,2-tetrafluoro-

Ethanol

Ethylacetylene

Ethyl Amine

Ethylbenzene

Ethyl Bromide

Ethyl Chloride

Ethyl Fluoride

Ethylene

Ethylene Dibromide

Ethylene Oxide

GAS ID

C2H4F2

C4H603

C3H60

C2H3N

C2H2

Air

C3H4

NH3

Ar

C6H6

#48

C2H7N

C2H6O

C2H6S

C4H6

C2H6

#54

#55

C2H6O

C4H6

C2H7N

C8H10

#60

#61

C2H5F

C2H4

#64

C2H4O

#40

R21

#42

#43

#44

#45

#46

#47

#32

C4H8

C2N2

ClCN

C4H8

C3H6

H22

B2H6

#16

CBrF3

C4H10

C4H10O

C4H8

CO2

CS2

CO

CCl4

COS

Cl2

ClF3

#28

#29

CHCl3

#31

DISPLAY

#1

#2

C3H60

C2H3N

C2H2

Air

C3H4

NH3

Ar

AsH3

C6H6

BCl3

BF3

Br2

#15

CO2

CO

COS

ClF3

C6H5Cl

C2H3ClF2

CHCl3

C2ClF5

C3H7Cl

C4H8

C2N2

ClCN

C4H8

C3H6

H22

B2H6

CBr2F2

CHCl2F

CH2Cl2

C3H6Cl2

H2SiCl2

C4H11N

C4H10O

C4H10S

C2H2F2

C2H7N

C2H6O

C2H6S

C4H6

C2H6

C2HClF4

C2HClF4

C2H6O

C4H6

C2H7N

C8H10

C2H5Br

C2H5Cl

C2H5F

C2H4

C2H4Br2

C2H4O

PAGE 24


Methyl Iodide

Nitromethane

Nitrous Oxide

GAS

Ethyleneimine

Ethylidene Dichloride

Ethyl Mercaptan

Fluorine

Formaldehyde

Freon 11

Freon 12

Freon 13

Freon 14

Freon 22

Freon 23

Freon 114

Furan

Helium

Heptafluoropropane

HMDS

Hexamethyldisiloxane

Hexane

Hexafluorobenzene

Hexene

Hydrazine

Hydrogen

Hydrogen Bromide

Hydrogen Chloride

Hydrogen Fluoride

Hydrogen Selenide

Isobutane

Isobutanol

Isopentane

Isoxazole

Ketene

Methane

Methanol

Methyl Acetylene

122

123

124

125

126

127

114

115

116

117

118

119

120

121

128

130

106

107

108

109

110

111

112

113

98

99

100

101

102

103

104

105

90

91

92

93

94

95

96

97

82

83

84

85

86

87

88

89

74

75

76

77

78

79

80

81

#

67

68

69

70

71

72

73

C6H19NSi2

C6H18OSi2

C6H14

C6F6

C6H12

N2H4

H2

HBr

HCl

CHN

HF

HI

H2Se

H2S

C4H10

C4H10O

C4H8

C5H12

C3H8O

C2H2O

CH4O

GAS ID

C2H4N

C2H4Cl2

C2H6S

DISPLAY

C2H4N

#68

C2H6S

F2

CH2O

F2

CH2O

CCl3F CCl3F

CCl2F2 #73

CClF3 CClF3

CF4 CF4

CHClF2 #76

CHF3 CHF3

C2Cl2F4

C4H4O

He

C3HF7

#78

C4H4O

He

C3HF7

HMDS

#83

C6H14

C6F6

C6H12

N2H4

H2

HBr

HCl

CHN

HF

HI

CH3I

H2Se

H2S

C4H10

#97

C4H8

C5H12

C3H8O

#101

C2H2O

Kr

CH4O

CH4O

#106

C3H4

CH5N

CH3Br

CH3Cl

C7H14

C3H9N

C3H8O

C3H8S

CH3F

#116

CH3I

CH4S

C6H12

N2

N2O4

N2O

PAGE 25


GAS

Octane

Oxygen

Oxygen Difluoride

Ozone

Pentaborane

Pentane

Perchloryl Fluoride

R116

Perfluorocyclobutane

Phosphine

Propyl Amine

Pyradine

Sulfur Dioxide

R113

Trimethyl Amine

Vinyl Chloride

Xylene, p-

186

187

188

189

190

191

178

179

180

181

182

183

184

185

170

171

172

173

174

175

176

177

162

163

164

165

166

167

168

169

154

155

156

157

158

159

160

161

146

147

148

149

150

151

152

153

138

139

140

141

142

143

144

145

#

131

132

133

134

135

136

137

C4H10O

SiH4

SO2

SO3

C2Cl4

C2F4

C4H8O

C4H10O

C4H4S

C7H8

C4H8

C2H3Cl3

C2HCl4

C2Cl3F3

C6H15N

WF6

C2H3Br

GAS ID

C8H18

O2

F2O

O3

B5H9

C5H12

ClFO3

C4F8

C2F6

C3F8

C6H6O

COCl2

PH3

PF3

C3H8

C3H8O

C3H9N

C3H6

C5H5N

CH2F2

C2HCl2F3

C2HCl2F3

C2HF5

C2H2F4

C2H2F4

C2H3F3

C2H3F3

C2H4F2

C3F8

C2H3Cl2F

Rn

H2O

C8H10

C8H10

C8H10

#178

R113

#180

C3H9N

WF6

UF6

#184

#185

C2H3F

H2O

Xe

C8H10

C8H10

C8H10

#162

SiH4

SiF4

SO2

SF6

SF4

SF3

SO3

#170

C2F4

C4H8O

#173

C4H4S

C7H8

C4H8

#177

C3H8O

C3H9N

C3H6

C5H5N

CH2F2

R123

R123A

C2HF5

R134

R134A

R143

R143A

R152A

C3F8

R1416

Rn

DISPLAY

C8H18

O2

F2O

O3

B5H9

C5H12

CLFO3

C4F8

C2F6

C3F8

C6H6O

COCl2

PH3

PF3

C3H8

PAGE 26

per channel

Appendix A

Model 954

Internal Circuit Assembly Board

Appendix A

Model 954

Display Assembly

Zero Adj

10V Range

(CH4)

Zero Adj

10V Range

(CH3)

Zero Adj

10V Range

(CH2)

Zero Adj

10V Range

(CH1)

FRONT

FS Adj

10V Range

(CH4)

FS Adj

10V Range

(CH3)

FS Adj

10V Range

(CH2)

FS Adj

10V Range

(CH2)

20mA Adj

(CH4)

20mA Adj

(CH3)

20mA Adj

(CH2)

20mA Adj

(CH1)

4mA Adj

(CH4)

4mA Adj

(CH3)

4mA Adj

(CH2)

4mA Adj

(CH1)

Reference

Voltage Adj

(5.000V)

Input Offset Adj for 4-20mA Signal

C86

C87

Adjustment Potentiometer Locations

Sierra 954 Flo-box Instruction manual

Assistant Bot

Model 954 4-Channel MFC Power Supply/Controller

INSTRUCTION MANUAL

FRONT PANEL

Appendix A

Model 954

Internal Circuit Assembly Board

Appendix A

Model 954

FRONT

Key Features

Frequently Answers and Questions

What is the Model 954 4-Channel MFC Power Supply/Controller used for?

What types of input signals does the Model 954 accept?

What types of serial communication options are available?

Does the Model 954 have a totalizer function?

How does the Model 954 handle alarms?

Can I use the Model 954 in master/slave operation?

Related manuals

Sierra 954 Flo-box Instruction manual

Assistant Bot

Model 954 4-Channel MFC Power Supply/Controller

INSTRUCTION MANUAL

FRONT PANEL

Appendix A

Model 954

Internal Circuit Assembly Board

Appendix A

Model 954

FRONT

Key Features

Frequently Answers and Questions

What is the Model 954 4-Channel MFC Power Supply/Controller used for?

What types of input signals does the Model 954 accept?

What types of serial communication options are available?

Does the Model 954 have a totalizer function?

How does the Model 954 handle alarms?

Can I use the Model 954 in master/slave operation?

Related manuals

CCR

400

Sierra

900 Single & Dual

AudioWind

4332835336

Sierra

903,904,905 FloBox

HORIBA STEC

MT-52-3J

Lintec

MC-3000S Series

Lintec

MC-3000L-TC Series

Teledyne Hastings Instruments

POWERPOD 400

Teledyne Hastings Instruments

POWERPOD 400

Sierra

920 Collector-Box

Kofloc

PSK-3FB