Koganei DTRY-ELF02 Guide

No.BK-SP005
Static Electricity Removing Unit
IONIZER
Technical Information
Guidebook
Reference
Contents
Application Examples
Blow Type Application Examples ･････････････････････････････････････････ 2
Fan Type Application Examples ･･････････････････････････････････････････ 5
Technical Information
Blow Type: Flow Rate Characteristics ････････････････････････････････････ 6
Static Charge Removing Characteristics When Mini Line Filter (DTRYLF040) is Mounted ････････････････････････････････････････････････････････ 6
Blow Type: Flow Rate Changes in Relation to Number of Throttle Valve
Needle Rotations ･･････････････････････････････････････････････････････････ 6
Static Charge Removing Range by Nozzle Type ････････････････････････････ 7
Selecting Pneumatic Equipment for Blow Type ･･････････････････････････ 8
Discharging Needle Maintenance Period (Rough Guidelines) ･････････････ 9
Cleaning Procedure for Discharging Needle ････････････････････････････ 10
Steady Flow Fan Type: Wind Speed Data ･･････････････････････････････ 11
Other Materials
Static Electricity Countermeasure Accessories ････････････････････････ 12
Static Electricity Q&A ･･･････････････････････････････････････････････････ 13
Frequently Asked Questions ････････････････････････････････････････････ 30
Troubleshooting ･････････････････････････････････････････････････････････ 34
Glossary ･････････････････････････････････････････････････････････････････ 36
1
Application Examples
Blow Type Application Examples
● Removal of static charges when taking out or
storing wafers
Avoids electrostatic discharging when taking wafers out of
their cassettes, and prevents the stored wafers from being
attracted to the transfer arm.
● Removal of static charges when conveying
wafers
Prevents dust from being attracted to the surface of wafers.
Prevents the internal patterns from being damaged.
Use an L-shaped bar nozzle.
Use a blow type ionizer with
straight bar nozzle.
Arm
● Removal of static charges on wafers
● Removal of static charges on parts when
carried by a parts feeder
Static electricity is generated due to friction of parts while the
parts feeder conveys them, and the parts stick to the feeder’s
surface.
Use the blow type ionizer to prevent parts from becoming
stuck due to static electricity. Also, simultaneous use with a
fan type is effective for the static electricity removal.
Use blow type ionizers with shower nozzles that provide
Ionized air flow with a wide angle to remove static charges on
wafers.
Use a straight bar nozzle
or shower nozzle.
● Removal of static charges and particles on
CDs and DVDs
Use 2-head types with bender nozzles to remove static
charges and particles on CDs and DVDs from both sides.
● Removal of static charges and dust using
intermittent ion air blowing
Use a bender nozzle.
CDs and DVDs, etc.
Works in combination with the high-cycle solenoid valve,
using high-tact intermittent blowing of ionized air for
removal of static charges and dust .
Caution: Depending on the
ON/OFF timing for the
ionizer, there could be a
possibility of adverse effects
on equipment and the
environment. For details
about application conditions,
consult with Koganei.
Dust
2
● Removal of static charges on workpieces
using a controller
Simultaneously controls the ionizer power supply and air ON/
OFF function.
● Removal of static charges on devices carried
by pallets
Use blow type Ionizers with straight bar nozzles to remove
static charges on a wide carrying pallet.
● Removal of static charges in printing
process
Use 2-head type Ionizers with bender nozzles. Prevents
faulty printing caused by static charges in ink jet printing
process.
Use a bender nozzle.
Use straight bar nozzles at
two places to remove static
charges.
● Removal of static charges in bottles
(Removal of dust)
Use a spiral bar nozzle to remove static charges
inside a bottle.
● Removal of static charges on electronic parts
Very low generation of electrical noise
・No damage to a device caused by induction electric field by the
discharging needle.
・Removal of static charges with pinpoint accuracy. (It is possible
to place the nozzle close to a device by using the tube.)
Note: Select a tube in accordance with the degree of tube flexibility.
Blows ionized air from the tip.
Spirally blows ionized air from
the side surface of the bar.
● Removal of static charges on
wrap film
● Removal of static charges on
glass substrate
● Removal of static charges
in pipes (φ50 or less)
Use blow type Ionizers with U-shaped
bar nozzles in confined space to
remove static charges on both sides of
the wrap film.
Use 2-head type Ionizers with two
straight bar nozzles to remove static
charges on FPD glass.
Inser ting the tube inside a pipe
enables removal of static charges.
3
Select the proper nozzle for your application
● Shower nozzle
● Flat nozzle
・Blows ionized air at 60° or 90° angles.
・Blows ionized air at 90° angle, suitable for removal
of static charges over relatively wide area.
90°
60°
or 90°
● Straight bar nozzle
● Use of 2 straight bar nozzles
・Removal of static charges over a
wide area.
・5 t y p e s o f b a r n o z z l e s a r e
applicable for 100 to 500 mm [3.94
to 19.69 in.] ionized air coverage.
・Removal of static charges from both
sides of film simultaneously.
● L-shaped bar nozzle
● U-shaped bar nozzle
・Space saving and suitable for
loc a t i o n s w h e re s t ra i g h t b a r
nozzles can't reach.
・2 types of L-shaped bar nozzles
are applicable for 100 and 200
mm [3.94 and 7.87 in.] ionized air
coverage. (only 100 mm [3.94 in.]
for DTRY-ELL01)
・Removal of static charges from
both sides simultaneously for
up to 100 mm [3.94 in.] wide
film.
● Free-mounting L-shaped bar nozzle
・Enables bar rotation to change the direction of the ionized
air flow outlet.
・Applicable for 100 and 200 mm [3.94 and 7.87 in.] ionized
air coverage.
● Combining various nozzle units with bender
nozzles
・Combining various nozzle units with the flexible tube enables
static charge removal for various
applications.
When using the bender shower nozzle unit.
60° or 90°
Note : Nozzle units can only be attached
to the nozzles used in bender
nozzle types. (DTRY-NZR □ 00ND
and DTRY-NZL □ 00ND)
Rotate the bar in the
desired direction.
4
Fan Type Application Examples
● Removal of static charges of parts on
working bench
Removes static charges from parts, during assembly.
● Removal of static charges on packaging films
Removes static charges generated when film is peeled off
from a roller.
● Removal of static charges on printed circuit
boards
Enables static charge removal for relatively wide objects.
● Removal of static charges on plastic
containers and parts
● Replace Louvers to match workpiece size
(For Steady Flow Fan Type only)
Use when removing static charges at high speed in limited
Use when removing static charges in wideareas, or when there is some distance to the workpiece.
angle areas.
Straight-ahead louver
Wide-angle louver
Remarks: While the application example is for the Steady Flow Fan Type only, the same method can be used for the
Wide Flow Fan Type as well. Select the type to match the targeted object.
5
Technical Information
Blow Type: Flow Rate Characteristics
Mini Line Filter
DTRY-LF040
DTRY-ELB01 Flow Rate Characteristics
Without filter
When DTRY-LF040
is mounted
200
150
100
50
DTRY-ELL01 Flow Rate Characteristics
250
Flow rate r/min(ANR)
Flow rate r/min(ANR)
250
Without filter
When DTRY-LF040
is mounted
200
150
100
50
0
0
0.0
0.1
0.2
0.3
Supply air pressure (MPa)
0.4
0.0
0.5
※Nozzle used: Shower nozzle (DTRY-NZR20SW)
※All nozzles have the same flow rate.
※When throttle valve is fully open.
0.1
0.2
0.3
Supply air pressure (MPa)
0.4
0.5
1R/min＝0.0353 ft.3/min.
1 MPa＝145 psi.
※Nozzle used: Shower nozzle (DTRY-NZL20SW)
※All nozzles have the same flow rate.
※When throttle valve is fully open.
DTRY-ELB01 Static Charge Removing Characteristics
5
Without filter
When DTRY-LF040
is mounted
4
3
2
1
0
0.0
0.1
0.2
0.3
Supply air pressure (MPa)
0.4
0.5
※Nozzle used: Shower nozzle (DTRY-NZR20SW)
※Measurement distance: 50 mm [1.97 in.]
※When throttle valve is fully open.
Static charge removing time (sec)
Static charge removing time (sec)
Static Charge Removing Characteristics When Mini Line Filter (DTRY-LF040) is Mounted
DTRY-ELL01 Static Charge Removing Characteristics
5
Without filter
When DTRY-LF040
is mounted
4
3
2
1
0
0.0
0.1
0.2
0.3
Supply air pressure (MPa)
0.4
0.5
1 MPa＝145 psi.
※Nozzle used: Shower nozzle (DTRY-NZL20SW)
※Measurement distance: 50 mm [1.97 in.]
※When throttle valve is fully open.
Blow Type: Flow Rate Changes in Relation to Number of Throttle Valve Needle Rotations
Needle
DTRY-ELB01 Flow Rate Characteristics
0.1 MPa
0.2 MPa
0.3 MPa
0.4 MPa
200
150
100
50
0
DTRY-ELL01 Flow Rate Characteristics
0.1 MPa
0.2 MPa
0.3 MPa
0.4 MPa
0.5 MPa
200
150
100
50
0
1
2
3
4 5 6 7 8 9 10 11 12 13
Number of needle rotations
※Nozzle used: Shower nozzle (DTRY-NZR20SW)
※All nozzles have the same flow rate.
6
250
Flow rate R/min (ANR)
Flow rate R/min (ANR)
250
1
2
3
4 5 6 7 8 9 10 11 12 13
Number of needle rotations
※Nozzle used: Shower nozzle (DTRY-NZL01NS)
※All nozzles have the same flow rate.
1R/min＝0.0353 ft.3/min.
1 MPa＝145 psi.
Static Charge Removing Range by Nozzle Type (Compact blow type reference values)
Static charge removing range for typical nozzle.
Standard nozzle
DTRY-NZL01NS
Shower nozzle
DTRY-NZL21SW
Bender nozzle
DTRY-NZL300ND
(300 mm [11.81 in.] nominal dimension)
200
200
250
250
250
250
300
300
300
300
50
(mm)
(mm)
(mm)
(mm)
Static charge removing time
1 mm＝0.0394 in.
2〜4 sec
4〜6 sec
Straight bar nozzle
DTRY-NZL100B
(300 mm [11.81 in.] nominal dimension)
150
200
200
200
250
250
250
300
300
300
50
(mm)
500
150
450
100
150
400
50
100
350
50
100
300
50
250
0
200
0
150
50
0
100
50
50
100
50
500
100
450
150
100
400
150
350
200
150
300
250
200
250
250
200
200
250
150
(mm)
300
(mm)
2〜4 sec
(500 mm [19.69 in.] nominal dimension)
(mm)
300
Static charge removing time
0〜2 sec
Straight bar nozzle
DTRY-NZL500B
(mm)
300
500
450
400
350
300
250
200
150
100
8〜10 sec
Straight bar nozzle
DTRY-NZL300B
(100 mm [3.94 in.] nominal dimension)
50
6〜8 sec
100
0〜2 sec
500
200
450
150
200
400
150
350
150
300
100
150
250
50
100
200
50
100
150
50
100
100
50
50
0
500
0
450
0
400
50
0
350
100
50
300
100
50
250
100
50
200
100
150
150
100
150
50
150
500
200
150
450
250
200
400
250
200
350
250
200
300
250
250
(mm)
300
200
(mm)
300
150
(mm)
300
100
(mm)
300
500
450
400
350
300
250
200
150
100
（90゜type）
50
Flat nozzle
DTRY-NZL01FT
(mm)
1 mm＝0.0394 in.
4〜6 sec
6〜8 sec
8〜10 sec
Notes: 1. The method of measurement used a 20 pF, □150 mm [5.91 in.] charged plate monitor, and the measurement was performed using
Koganei measurement conditions.
2. The static charge removing time is the time required to decay from ±1000V down to ±100V.
3. Graphs assume a supply air pressure of 0.5 MPa [73 psi.].
7
Selecting Pneumatic Equipment for Blow Type
※ Select ionizer air cleanliness suited to your applications.
※ The combinations shown below are typical examples. For details, see p. 41 of the Accessories General Catalog.
Please feel free to consult us.
②
③
④
DF
Drain filter
Drain filter
Drain filter
Drain filter
F
Filter
Filter
Filter
Filter
MF
Mist filter
Mist filter
Mist filter
Mist filter
MMF
Micro mist filter
Micro mist filter
Micro mist filter
KRM
Membrane air dryer
Membrane air dryer
R
Regulator
Regulator
Regulator
Regulator
DTRYLF040
Mini line filter
Ionizer
Ionizer
Ionizer
Ionizer
Blowing, filling, and
especially strict particle
control locations
Locations where dry
air or clean dry air is
required
Clean air for ordinary
industrial use
Oil removal
Moisture
removal
①
Dry air
generation
Low
Air pressure
regulation
High
Final filter
Clean level
Air for ordinary
industrial use
● Example of combination (for level ④ )
Item
Model
Drain filter
DF300-02-A
Adaptor
8-30D
Filter
F300-02-A
Adaptor
8-30F
Mist filter
MF300-02-A
Adaptor
8-30D
Regulator
R300-02
Note: When selecting equipment, check the flow rate.
8
Regulator
Drain filter
Air filter
Mist filter
Discharging Needle Maintenance Period (Rough Guidelines)
Periodic cleaning of the ionizer discharging needle is required.
The photographs below show the accumulation of dust on the tip of the discharging needle used in the steady flow fan type.
Depending on the application conditions, perform the cleaning after 300 to 500 hours of use. When cleaning the discharging needle,
cleaning the louver and the inside of the ionizer body at the same time is recommended.
0h
100 h
300 h
500 h
Note: Based on Koganei measurement conditions.
When operating the DTRY-ELF04 (without back filter): Appearance of discharging needle
The photographs below show the shape of the discharging needle after cleaning. The tip of the discharging needle can wear down from
repeated use. While it depends on the application environment and conditions, replacement is recommended after around 10000 hours of use.
0h
2500 h
5000 h
10000 h
Note: White lines denote the discharging needle shapes when new (at 0 hours of use).
DTRY-ELF04 (without back filter): Appearance after discharging needle cleaning
9
Cleaning Procedure for Discharging Needle
An example of the cleaning procedure for the blow type discharging needle is shown below.
・Apply alcohol (isopropyl alcohol, etc.) to a cotton swab, and clean the tip of the discharging needle using the swab.
・Also remove any contamination inside and around the metal cap.
Note: Before cleaning, check that the power supply and air are switched OFF.
Never use a wire brush.
For cleaning the fan type, use the nylon brush provided with the product or a cotton swab dampened with
alcohol. For details, see the Owner’s Manual.
Precautions for Maintenance and Cleaning
・Contamination on the tip of the discharging needle can cause the static charge removal effectiveness to deteriorate. If static charge
removal effectiveness has reduced, clean the discharging needle.
・The discharging needle is a consumable part that must be replaced if used over long periods. For replacement, use a dedicated
tool (DTRY-ELB21).
・After cleaning, flush the needle. Activating the ionizer with residual alcohol on the needle could result in unstable performance.
The ionizer requires periodic maintenance and checks.
Example: Ionizer Performance Check Sheet
Ionizer type
Koganei
Compact Blow
Type
DTRY-ELL01
No.
Static charge removal time [sec] Ion balance
Date
(YYYY/MM/DD) Plus side Minus side
(V)
1
20XX/4/15
1.2
1.0
2
20XX/5/15
1.1
1.0
Inspection
Measurement
conditions
Cleaning
check
Discharging needle Operation hours
Remarks
(h)
replacement
−9
Device installation condition
(100 mm distance)
ﾚ
—
—
＋11
↑
ﾚ
—
160
Initial condition
3
4
5
6
7
8
9
10
Memo
＊＊＊ Device: No. 1
・Ionizer operations begin:
20XX/4/15
※ 8 h/day × 20 days/month
・For the static charge removal time and ion balance, the charged plate monitor manufactured by ＊＊ was used.
・Static charge removal time is the time required for decaying from ±1000V down to ±100V.
10
Steady Flow Fan Type: Wind Speed Data (Reference value)
●DTRY-ELF02 When wide-angle louver is used
0.2
1.0
1.9
1.7
1.0
3.2
2.4
2.1
1.9
4.6
4.1
3.1
2.4
2.0
1.0
3.2
2.4
2.1
1.9
0.2
1.0
1.9
1.7
100 mm 100 mm 100 mm 100 mm
（m/s）
100 mm 100 mm 100 mm 100 mm 100 mm
（m/s）
0.2
0.3
0.9
0.6
0.8
1.5
0.9
0.6
0.6
0.6
0.5
0.7
0.5
0.6
0.6
1.5
0.9
0.6
0.6
0.6
0.2
0.3
0.9
0.6
0.8
100 mm 100 mm 100 mm 100 mm
●DTRY-ELF02 When straight louver is used
100 mm 100 mm 100 mm 100 mm 100 mm
●DTRY-ELF03 When wide-angle louver is used
1.0
1.9
2.2
1.2
3.3
3.0
2.4
2.3
3.5
3.6
2.9
2.5
2.2
1.2
3.3
3.0
2.4
2.3
0.2
1.0
1.9
2.2
100 mm 100 mm 100 mm 100 mm 100 mm
（m/s）
0.2
0.3
1.0
1.1
1.4
3.8
1.4
1.8
1.4
1.3
1.1
1.1
1.3
1.2
1.1
3.8
1.4
1.8
1.4
1.3
0.2
0.3
1.0
1.1
1.4
100 mm 100 mm
0.2
100 mm 100 mm 100 mm 100 mm
（m/s）
100 mm 100mm
●DTRY-ELF03 When straight louver is used
100 mm 100 mm 100 mm 100 mm 100 mm
●DTRY-ELF04 When wide-angle louver is used
0.3
1.3
2.8
3.4
3.1
3.4
3.8
4.3
3.6
3.9
3.0
4.7
4.5
3.7
3.7
3.4
3.8
4.3
3.6
3.9
0.3
1.3
2.8
3.4
3.1
100 mm 100 mm 100 mm 100 mm 100 mm
100 mm 100 mm 100 mm 100 mm
（m/s）
（m/s）
3.6
3.1
1.1
0.9
1.0
1.7
1.6
1.0
0.7
1.0
1.7
1.0
0.7
0.6
0.5
1.7
1.6
1.0
0.7
1.0
3.6
3.1
1.1
0.9
1.0
100 mm 100 mm 100 mm 100 mm
●DTRY-ELF04 When straight louver is used
100 mm 100 mm 100 mm 100 mm 100 mm
Notes: 1. The wind speed at maximum wind volume is measured at each point.
2. The measurement values are the actual measured values and are not guaranteed performance values.
1 m/s＝3.28 ft./sec.
1 mm＝0.0394 in.
11
Other Materials
Static Electricity Countermeasure Accessories
※ Koganei does not offer the static electricity countermeasure goods shown on this page.
● Wrist Strap
Because the operator’s body maintains a constant, low-level electrification
potential, use a wrist strap to ground the body.
● Antistatic Shoes
Use shoe soles made of synthetic rubber or plastic that containing conductive
material to prevent the build-up of static charges. An electrical resistance range
of 105 Ω to 1010 Ω is recommended.
● Antistatic Mat
To prevent workpiece damage or personal injury due to the build-up of static
charges on the worktable during electronic device assembling, use an antistatic
mat or sheet on the worktable.
● Antistatic Work Clothes
Use antistatic work clothes equipped with conductive fibers woven in at regular
intervals (5 to 25 mm [0.20 to 0.98 in.]).
● Antistatic Bags
Antistatic bags are made with material that is blended or coated with antistatic
agents. They also have intermediate shield layers to prevent the build-up of static
charges on the packaging material or on the packaged content. Use the bags to
protect contents from breakdowns or damage due to static electricity.
● Antistatic Fingerstalls and Gloves
Fingerstalls and gloves are made of natural rubber containing carbon black, or
synthetic rubber containing antistatic agents. Use them to prevent contamination
or corrosion to workpieces due to sebum, or sweat secreted from skin when work
is performed with bare hands, and to protect against nicks or punctures.
● Antistatic Chair
Use an antistatic chair to suppress the build-up of static charges on work clothes,
the operator’s body, or the chair itself.
● Antistatic Dolly
Use an antistatic dolly equipped with conductive casters that prevent the build-up
of static charges on the metal frame when the dolly moves on the floor surface.
12
Static Electricity Q&A
Q
A
What is static electricity?
Dynamic electricity
(regular electricity)
Static electricity
(electricity stored on materials)
Static electricity is generated by clothing or seat friction.
Discharges when metal is touched.
ut 3
Abo
Electric current
kV
ZAP!
When friction between materials causes the plus-minus balance to collapse and to tilt electrically
toward one polarity, this condition is called static electricity. The zap that comes when a person
touches a car door on a dry winter day is static electricity.
Q
What is the mechanism for the generation of static electricity?
A
● All materials are made up of atoms. Atoms consist of electrons holding a negative electrical
charge, and a nucleus holding a positive electrical charge (the nucleus further consists of positive
protons and electrically neutral neutrons). The electrons revolve around this nucleus. And it is
these electrons that form the basis of static electricity.
Oxygen atom
Nitrogen atom
Oxygen atom
Nitrogen atom
8 positive protons
8 negative electrons
7 positive protons
7 negative electrons
8 positive protons
9 negative electrons
7 positive protons
6 negative electrons
Electrically neutral
Electrically neutral
Electrification turns
negative
Electrification turns
positive
● In normal conditions, the positive electrical
charge held by the protons is balanced
against the negative electrical charge held
by the electrons, so that the atom overall is
electrically neutral.
● When a neutral atom is moved by friction,
contact, or peeling, addition of an electron
gives it a negative charge, while removal of
an electron gives it a positive charge.
13
Q
What types of electrification are there?
A
Electrification is due to contact:
Electrification is induced when two objects come into contact.
● Triboelectric electrification
Static electricity induced when the surfaces of two objects in contact rub against each other.
● Peeling electrification
A type of contact electrification. Because static electricity appears to occur whenever a peeling
action is performed, it is sometimes called peeling electrification. The amount of static electricity
tends to become larger with faster peeling speed.
● Rolling electrification
A type of contact electrification. The static electricity is induced when an object such as film or a
roller is rolled on another object. (Repeated contact and peeling)
● Spouting electrification
Static electricity induced by friction with a nozzle, etc., during spouting of a high-pressure gas or
liquid.
Electrification due to induction: Electrification induced without contact.
● Induction electrification
Electrification is induced when an object charged with static electricity is brought close to or
taken away from another object. This phenomenon of static electricity between objects even
without mutual contact is called induction electrification. For example, a charged body can
induce a charge on an IC merely by proximity. (Electrostatic induction)
14
Q
What factors determine the amount of electrification?
A
Factors determining the amount of electrification (static electricity) can vary depending on the
environment, as described below.
Contact
surface
area
Pressure
Friction
Temperature
Humidity
The larger the
surface area, the
greater the
amount of static
electricity
generated.
The higher the
pressure, the
greater the
amount of static
electricity
generated.
The greater the
friction, the
greater the
amount of static
electricity
generated.
While not a major
change, a higher
temperature
results in a
smaller resistance
value. (Insulator)
The higher the
humidity, the
smaller the
amount of static
electricity
generated.
Q
What is the difference between a conductor and an insulator?
A
Electrification acts differently between a conductor and an insulator.
Conductor:
Materials that conduct electricity easily → Iron, copper, aluminum, carbon, etc.
Conductor image
Since electrons move freely through the
c o n d u c t o r, g r o u n d i n g t h e c h a r g e d
conductor results in 0V.
Ground
Electrically balanced state
Grounding the conductor results in 0V.
Insulator:
Materials that conduct electricity poorly → Plastic, rubber, glass, etc.
Insulator image
S i n c e e l e c t r o n s d o n o t m o v e f r e e l y,
grounding the charged insulator does not
result in 0V. In addition, the amount of
charges varies by location, resulting in
different polarities from one point to another.
Ground
Grounding an insulator does not result in 0V.
Insulator charge is not evenly distributed.
15
Q
What kind of phenomenon is electrostatic induction?
A
Bringing a charged body close to a conductor (metal, etc.) causes a build-up in the opposite charge
in regions near the charged body, and a build-up of the same charge in regions farther away. This is
called electrostatic induction.
For example, when a positively
charged body is brought close to a
conductor (in an ungrounded state), a
negative charge appears on the
surface of the conductor closest to the
charged body, and a positive charge
appears on the opposite surface.
Next, pulling the charged body
away returns the charge of the
conductor to its original state.
Charged
body
Conductor
Approaches
Pulls away
Returns to original state
When a positively charged
body is brought close to a
c o n d u c t o r, gr o u n d i n g t h e
conductor neutralizes the
charge.
Charged
body
Conductor
Neutralized by
grounding
Neutralization
If the conductor is cut off from
the ground and then
separated from the charged
body, the negative charge
remains, and the conductor
becomes negatively charged.
Pulls away
Charged
body
16
Ground
Cutting off the ground and
pulling away from the
charged body leaves
behind negative charges.
Ground
Q
Is there an example of work-related trouble with electrostatic induction?
A
Even if a workpiece has no charge, bringing a charged body close to a conductor can cause
polarization within the conductor due to electrostatic induction, resulting in a discharge.
Semiconductor (example of device)
Charged body
Approaches
Discharge
Ground
Q
What is a triboelectric series?
A
It is a relative positioning of positively and negatively charged materials undergoing friction. When
two materials are rubbed against each other, the one on the left becomes positively charged, and the
one on the right becomes negatively charged. In general, the magnitude of friction-induced charge is
larger for materials whose positional relationship is distant than for those that are close together.
In addition, if two of the same materials are rubbed together, one will be positively charged and the
other negatively charged.
In reality, of course, variations in temperature, humidity, surface shape, etc., may prevent the
following series from appearing. View this as a general example of what a series could look like.
Triboelectric Series
Negative
When polyester and nylon
are rubbed together
Polyvinyl chloride
is negatively
charged
Polyester is
positively
charged
Polyester is
negatively
charged
Nylon is positively
charged
Friction
Air
Human hand
Asbestos
Glass
Mica
Nylon
Lead
Silk
Aluminum
Paper
Cotton
Steel
Wood
Amber
Sealing wax
Hard rubber
Nickel, copper
Tin, silver
Gold, platinum
Sulfur
Rayon
Polyester
Celluloid
Urethane
Polyethylene
Polyvinyl chloride
Silicone
Fluororesin
Positive
When polyester and polyvinyl
chloride are rubbed together
The same material can become either positively or negatively charged depending on the material against which it rubs.
17
Q
What is electrostatic damage?
A
With increasingly compact parts and greater semiconductor densities, electrostatic damage to
circuits and devices due to electrostatic discharge (ESD) has become a major problem.
In general, MOS-configuration ICs and field-effect transistors (FETs), high-frequency devices, and
other similar types of equipment are extremely sensitive to static electricity, and easily susceptible
to be damaged.
Electrostatic Damage Model of Semiconductor Devices
The electrostatic damage model of semiconductor devices can be broadly classified into the Human
Body Model (HBM), Machine Model (MM), and Charged Device Model (CDM).
■ Human Body Model (HBM)
Model when the body’s static charge is discharged to a device pin when touched.
Causes (example)
● Wrist strap or conductive shoes not worn
● Hand touches a pin directly
■ Machine Model (MM)
Model when the static charge on a metallic device is discharged to a device pin when touched.
Metal
Causes (example)
● Insufficient grounding for electrification of equipment or robot
● Power leak from soldering tool, etc.
■ Charged Device Model (CDM)
Model when static charge on a device conductor part (chip, wire, lead frame, etc.) is discharged
when the device pin touches equipment or tools.
Causes (example)
● Triboelectric charging on an automated IC conveyer system, etc.
Metallic tweezers, etc.
18
Q
What points should we be careful about during dust removal?
A
Dust Removal Omissions (1)
Dust Removal Omissions (2)
Even after wind force has been used to
blow off dust, the charged state
continues unchanged.
Attracted dust may not be removed when the
method of static charge elimination is not
appropriate.
Blown off by
force of wind
Charged
product
Ionizer
Charged
product
Dust
Dust
Ordinary
air gun, etc.
Static charges
not eliminated
Charged
product
Dust removed,
but charge remains
Charged
product
Dust re-adherence
likely
Static
charge
elminated
product
Ionizer
Dust
Some dust
cannot be
removed with
weak wind force
Ionizer
Air gun type, blow type,
ion wiper, etc.
Static
charge
elminated
product
Simultaneously remove dust and
eliminate static charges using a
relatively strong wind force
Dust Removal Points
1. Blow dust off
2. Static charge elimination from the product
3. Collect the dust (with a dust collector, etc.)
19
Q
What is the mechanism for static electricity attracting dust?
A
When two charged materials are brought close together, the Coulomb force is activated.
As with the North and South poles of a magnet, materials with the same polarity are repulsed, while
materials with opposite polarity attract each other. It is this Coulomb force that causes the problem
of dust adhering to the product.
The larger the amount of charge, and the oloser the distance, the greater the attracting force between two objects.
When workpiece is an insulator
When workpiece is a conductor
Since the magnitude of the charge on the workpiece is
large, charged dust adheres to it. Even non-charged
dust can become internally polarized and adhere to it.
Q
A
When dust becomes charged, electrostatic induction
causes the dust to adhere to the product. Since
grounding alone will not change the situation, the static
charges must be removed from dust.
What kind of static electricity countermeasures are taken at manufacturing sites?
For equipment, people, and other conductors
Grounding, wrist straps, conductive shoes, etc., are effective. In addition, conductive mats are used
for static electricity elimination from workbenches, etc.
For insulators in which grounding is not effective
Antistatic sprays, humidity controls, and ionizers that utilize ions to neutralize static electricity are
used.
Static electricity removal using ionizers
Ionizers are devices that direct positive and negative ion air against the target object to neutralize
the electrification state of the target object.
Neutralized with
negative ions
Positively
charged
material
Ionizer
Positively
charged
material
Ionizer
Electrically
stable
state
20
Static electricity
elimination
complete
Q
What kind of ionizer types exist?
A
Ionizer
Corona discharge
method
Soft X-ray method
Radiation method
DC method
DC method
Pulse DC
Ultraviolet method
AC method
Commercial AC
High frequency
AC
Pulse AC
There are four types of ionizers, including the corona discharge method, radiation method, soft X-ray method, and ultraviolet method.
Q
How does corona discharge generate ions?
A
Corona discharge occurs when high voltage is locally generated between two conductors, causing
a breakdown in air insulation and generating blue-violet light. In a corona discharge ionizer, high
voltage is applied to the discharging needle to generate the corona discharge.
The corona discharge causes the air near the discharging needle to electrically break down,
generating ions.
●Applying a positive high voltage to the discharging needle generates positive ions.
High voltage
generation circuit
Discharging
needle
Ground
●Applying a negative high voltage to the discharging needle generates negative ions.
High voltage
generation circuit
Ground
Discharging
needle
21
Q
What is the difference between the AC and DC methods?
A
The corona discharge type ionizer can be broadly divided into AC and DC methods, depending on
the method of applying voltage.
AC method : Generates positive and negative ions in alternating
sequence from a single discharging needle
Discharging
needle
● Provides a good ion balance.
● Generates fewer ions than DC method.
DC method : Generates ions from dedicated positive-only or
negative-only discharging needle
Discharging
needle（＋）
Discharging
needle（−）
● Poor ion balance at close distances.
● Generates more ions than AC method.
22
In commercial frequency ionizers, the frequency for generating ions is a low 50/60 Hz that results in
a poor ion balance over short periods of time. This causes ions within the tube to be extinguished,
making carrying ions through the tube impossible. The Koganei ionizer, on the other hand, uses a
high frequency of 68000 Hz to achieve an excellent ion balance that avoids ion neutralization within
the tube, thereby enabling ions to be carried through the tube.
Conventional method (Commercial frequency)
High frequency method
68000 Hz（68 ｋＨz）
50/60 Hz
Voltage
High voltage
（＋）
Voltage
Approx.
＋2kV
0V
Approx.
−2kV
0V
High voltage
（−）
AC
＋
−
＋
＋
−
＋
＋
−
＋
＋
−
＋
→Time
→Time
●Number of positive and negative electric fields
generated
60 Hz→60 cycles/sec
0.016 sec/cycle
＋ − ＋ − ＋ − ＋ − ＋ − ＋ − ＋ − ＋ − ＋ − ＋ − ＋ − ＋ −
AC
●Number of positive and negative electric fields
generated
68 kHz→68000 cycles/sec
0.000015 sec/cycle
Average charge per microsurface
area is excellent
Ion conditions inside the tube
Ion conditions inside the tube
Strong attraction force fosters neutralization
Weak attraction force avoids neutralization
φ6
φ6
Tube interior
A
How is it possible that the Koganei high frequency method can
carry ions through a tube or pipe?
Tube interior
Q
23
Q
Please explain about static charge removing time and ion balance.
A
Static charge removing time (elimination speed) and ion balance are two measures for evaluating
ionizer performance.
Static charge removing time
The time required for objects charged to ±1000V to decay down to ±100V.
Ion balance
Measures how close an object approaches 0V when it is continuously delivered with positive and
negative ions. A value closer to 0V represents an excellent ion balance. In addition, a poor ion
balance means that the target object is susceptible to becoming charged.
＋1000V
Static charge
removing time Note
＋100V
Ion balance Note
0V
−100V
Time (sec)
−1000V
Note: Measurement of static dharge removing time and ion balance is performed in accordance with
IEC61340-5-1.
24
Q
Does the frequency make a difference even if the ion balance is equivalent?
A
At a low frequency, the rate that ions are carried to the workpiece is uneven. Since the ion balance
constitutes an average value, the actual voltage fluctuation known as over-voltage has an effect on
the workpiece.
Low-frequency ionizer
High-frequency ionizer
Long cycle for
generation of positive
and negative ions
Short cycle for
generation of positive
and negative ions
Situation on workpiece surface
when ionizer is used
Large voltage
fluctuation
Small voltage
fluctuation
Apparent
ion balance
t
t
25
Q
To be effective, in which process should the ionizer be installed?
A
As shown in Figure 1, when a charged plastic panel is placed on top of a grounded metal plate, the
charge on the plastic panel surface is apparently neutralized by the differing charge induced from
the adjacent metal plate surface. In addition, the potential in the plastic panel becomes virtually
equal to the ground surface.
The situation when the plastic panel is lifted away from the metal plate is shown in Figure 2. When the
plastic panel is separated from the metal plate, its potential rises sharply. If an ionizer was being used to
perform efficient static charge removal, where the static charge is being eliminated is the key point.
(Figure 1)
The plastic panel is apparently neutralized,
causing the potential to drop!
Charged plastic panel
In this situation, the charges on the
plastic panel cannot be effectively
eliminated, even when an ionizer is
used.
Ground
(Figure 2)
Metal plate
When it is lifted from the metal plate,
the potential rises sharply!
Ground
Static charges should be
eliminated during the process
of lifted away from the metal plate!
Ionizer
During the process of lifting the plastic
panel away from the metal plate,
ionized air is delivered to the charged
surface of the plastic panel.
When using an ionizer for eliminating static charges, the key point is choosing
which elimination process to use.
26
Q
Is there a discernible trend in static charge elimination capability due
to differences in charge elimination surface area and distance?
A
When various kinds of ionizers are used, differences in the size and distance of the charged object
show discernible trends in static charge elimination capability.
When eliminating charges of a small charged object
The blow type can bring the nozzle
closer to the charged object.
If the charged object is compact and the
objective is pinpoint static charge
removal, charge elimination effects are
Blow type
better than for the fan type.
Fan type
When eliminating charges of a large charged object
When the targeted workpiece is large in
size, and the ionizer must be set at a
cer tain distance away, the fan type
shows better charge elimination
effectiveness than the blow type.
Blow type
Fan type
27
Q
Please explain about maintenance of the discharging needle.
A
To ensure optimal ionizer performance, maintenance of the discharging needle is needed.(For
details, see pp. 9-10.)
Discharging Needle Contamination
The tip of the discharging needle used in the ionizer can become dirty after repeated use. If this
discharging needle contamination becomes severe enough, the amount of ions generated will
deteriorate, resulting in reduced static charge elimination capability. It can also lead to poor ion
balance. Accordingly, perform periodic cleaning.
Photos of discharging needle (reference)
Before cleaning
After cleaning
Remark: Comparative photos using the blow type. (Contamination and wear state may vary depending on
application conditions.)
Discharging Needle Cleaning Method
If there is black or white residue on the tip of the discharging needle, use a cotton swab soaked in
alcohol, or the brush provided with the fan type, to clean it off.
Operating Life of Discharging Needle
Repeated use of corona discharge can cause wear on the tip of the discharging needle after a long
period of use. Since discharging needle wear can cause deterioration of performance, periodic
maintenance is required. While the operating life of the discharging needle depends on the material
used for the needle and on application conditions, in general a tungsten needle is recommended to
be replaced at around 10000 hours.
Cleaning, replacement, and other maintenance is required for the ionizer discharging needle.
28
Q
A
Please explain the measurement principles for the electrostatic
potential sensor EP Sensor.
The electrostatic potential sensor EP Sensor uses the electrostatic induction phenomenon that
arises between the charged body and detection electrodes. The electric field from the charged body
generates an induction charge in the detection electrode surface. This induction charge is then
calculated and displayed as the potential of the charged body.
Basic Principles
EP Sensor
Detecting
electrode
Detecting
circuit
Induction
charge
Ground
Field
Charge (when the charge is positive)
Charged body
Charge Q (induction charge) is proportional to the voltage V (charge voltage).
A high-speed tuning fork shutter is incorporated in the front of an actual detecting electrode. An
alternating current signal proportional to the charge is obtained, depending on the amount of
shutter opening and closing, and that signal is used to measure the potential of the charged body.
Tuning fork shutter
opens and closes.
The EP Sensor uses the tuning fork shutter method to perform measurement.
29
Frequently Asked Questions
Item
Question
Response
In what kind of situation is the a-contact (NO) and The a-contact outputs only when an ionizer alarm occurs.
b-contact (NC) switching function used?
The b-contact outputs at normal times, and output is cut
off when an alarm occurs. Output is also cut off when the
power cable is disconnected. As a result, select the
contact to suit customer’s application conditions. Contact
activation modes are noted in the user’s manuals provided
for each product. See the manuals for details.
What is the method for switching between the a-contact A selector switch is used to switch between the contacts.
(NO) and b-contact (NC)?
To turn the switch, use a precision screwdriver or similar
tool. After switching, cover the switch with the protective
seal provided to prevent operators from touching it by
mistake.
What is the method for measuring the static charge The □150 mm [5.91 in.], 20 pF charged plate monitor is
removal time?
used to measure the decay time from ±1000V→±100V.
(Measured using Koganei measurement conditions. The
measuring instrument conforms to IEC61340.)
Are you in compliance with the RoHS directive?
All Koganei brand products are in compliance with the
RoHS directive. There are no model changes required to
achieve RoHS compliance.
Is ionizer performance related to humidity?
Since the blow type performance is affected by the
supplied compressed air, the environment has little effect
on it. The fan type, however, is susceptible to the effects of
the ambient environment, so environmental humidity must
be carefully maintained for its use.
In the connector pin configuration, should the output Since there is no polarity, the connection may be linked to
contact point be connected to #1 or #2?
either one. (However, caution is required for products
DTRY-ELB0＊ models of not CE compliant, since they do
have polarity.)
Common to
every
ionizer
Are connector pin #4 (power GND) and the ground They are shared, and are internally connected by circuits.
terminal shared?
Can nitrogen be used for ion carrying media?
Since the nitrogen ion balance tends to tilt heavily toward
positive, the performance is unstable.
Is a power cable longer than 2 m [6.56 ft.] available?
No longer-power-cable is available. Please use your own
for extension.
What is the operating life for the discharging needle?
While it depends on the operating conditions and
environment, a rough guide for use is 10000 hours.
What is the method for cleaning the discharging needle?
If black or white contamination has accumulated on the tip
of the discharging needle, use a cotton swab soaked in
alcohol or the brush provided with the fan type to wipe it
away. (See pp. 9-10.)
What are the foreign particles that accumulate on the tip of Discharging on the tip of the discharging needle attracts
the discharging needle?
nearby foreign particles and incinerates them, resulting in
accumulation of carbon, silica, or other substances.
If maintenance is performed on the discharging needle, Maintenance of the discharging needle and the area
can the operating life of the ionizer be extended?
around the discharging needle is performed to restore
them following deterioration of performance. It does not
serve to extend the operating life of the ionizer itself.
Can the ionizer be used in explosive atmospheres?
Corona discharges are induced when ions are generated,
and since it could ignite in a flammable gas atmosphere,
the ionizer cannot be used in such locations.
When positive ions are used to elimenate charges on a Negative ions are repelled by the negative charge in the
negatively charged workpiece, what happens to the workpiece, and dissipate into the air. After that they are
negative ions?
neutralized as they link up with ions in the air.
Can the AC adaptor (DTRY-ELC04) be used overseas?
The 100V−240VAC can. Be sure to have an outlet
conversion adaptor available.
Can the AC adaptor (DTRY-ELC04) be used with all The DTRY-ELC04 can be used with all ionizers other than
ionizers?
the air gun type (DTRY-ELG01). For the DTRY-ELG01,
Koganei has the DTRY-ELC04-140W available as an AC
adaptor.
30
Item
Fan type
Blow type
Question
Response
What material is the cleaning brush made of?
Nylon.
How long should the filter maintenance period be?
If dust appears to be clogging the filter, it is time to replace
it.
When the power switch is left ON, can ON/OFF control be It can. Always perform this control on the ＋24V side.
performed on the ＋24V side?
There will be cases where ON/OFF control cannot be
performed on the 0V side.
Is there a problem with leaving the power supply Do not use the equipment in this way, since plasma
continually ON?
concentrations caused by discharges can build up around
the discharging needle, increasing the risk of ozone
degradation and equipment corrosion.
Can the DTRY-ELB nozzle be used with the DTRY-ELL?
The DTRY-ELL nozzle uses a different thread size than the
DTRY-ELB nozzle for connecting to the main body. Please
purchase the nozzle specially made for each model.
What is the nozzle made of?
The connection part (cone-shaped part) to the ionizer
main body is made of aluminum alloy, while the tips are
made of stainless steel.
In what sort of situations can abnormalities occur?
Abnormalities can occur in such cases as when the cap is
loose, when the nozzle comes into contact with a ground,
or when the discharging needle is exceptionally dirty.
When abnormal output is detected, a red lamp lights up.
DTRY-ELL01 does not have a ground terminal. Is a Since the mounting holes on the side of the main body
ground not needed?
(the rear side) share ground ter minals, the unit is
grounded when brackets are installed on a ground body. If
installed on an insulator, however, be sure to provide a
separate ground.
What is the minimum bending radius for each tube?
Conductive urethane tube: R15 mm [0.59 in.]; Teflon tube:
R50 mm [1.97 in.]; silicone tube: R10 mm [0.39 in.]; and
bender nozzle: R40 mm [1.57 in.].
Will bending the tube have an effect on static charge It has virtually no effect. However, it is conceivable that
removal performance?
bending it at minimum bending radius at several places
could affect performance.
Is a set screw for the mounting bracket DTRY-ELQ02 A set screw is provided with the product. Both items are
provided? Also, what are the hexagon socket head screws made of stainless steel.
and set screw made of?
Can the bender nozzle be chopped short and still function No, it would become unusable.
properly?
Can the tube holder DTRY-NZR31 be used with all tubes, Since the DTRY-NZR31 is compatible with tubes of outer
including Teflon, silicone, and urethane?
diameter φ6 [0.236 in.], it is specially made for the
urethane tube (DTRY-ADN-U). If using this holder to
secure other tubes in place, secure in an insulator.
What is the tube holder made of?
The holder portion is made of POM, and the screws are
made of stainless steel. Everything else is made of
aluminum alloy.
Can we manufacture and use our own nozzle?
Filter
Air gun type
Always use Koganei nozzles. For nozzles with special
shapes, consult with Koganei.
Can the Mini Line Filter DTRY-LF080 be connected to the The blow type tube diameter is for Rc1/8, while the LF080
ionizer body? (Same for blow type)
is for R1/4. The LF080 cannot be directly connected
together.
How long should the period be for replacing the Mini Line It is impossible to tell from outward appearance. While
Filter?
replacement should be performed when the flow rate
declines, Koganei recommends replacement at around
once per year.
Is a power cable provided?
No cable is provided. Moreover, for power, 24VDC (750
mA or more) should be provided by the customer. For the
air gun type, the DTRY-ELC04-140W special AC adaptor is
available.
Isn’t a ground needed?
The structure does not require a ground.
Can the discharging needle be replaced?
The customer cannot perform this replacement. Consult
with Koganei.
31
Frequently Asked Questions
Item
Ion wiper
Question
Response
Can the DTRY-ELL01 be replaced?
It can. Consult with Koganei.
What is the flow rate for the dust collector blower fan?
Approx. 1600R/min [56.5 ft.3 /min.].
In addition to the body being equipped with a dust Use a duct and filter, for exhaust air processing. In
collector blower fan, are any other items required?
addition, prepare a compressed air source, and a power
supply (100VAC), regardless of whether a dust collector
blower fan is used or not.
Is there a recommended duct manufacturer?
Koganei makes no particular designation. Select a duct
with a nominal diameter of φ75 [2.95 in.].
How is it grounded?
The ground can be created from either the main body or
the power cable.
How does the use of the “actual measurement data output Use “actual measurement data output mode” when you
mode” and “averaged data output mode” differ?
want to know the instantaneous value of the charged
object. When the charge variation is so large that the
measured value is difficult to read, use the “averaged data
output mode” to average and display the measured
potential so that the measured value will be easier to read.
What is the threshold voltage setting?
This sets the maximum and minimum voltages, and when
a charge exceeding the range defined by these two values
is detected, outputs an alarm.
What is the difference between the input-output response “Input-output response time” refers to the time required in
time and data output cycle?
“averaged data output mode” for outputting measurement
data equivalent to the actual charge amount. “Data output
cycle” refers to the timing for outputting the measured
data.
What is the meaning of the red LED display on the body? The LED lights up when the sensor is abnormal, and
blinks when the setting threshold voltage is exceeded.
EP sensor,
EP monitor
What is the method for resetting abnormal output in the There is no reset function for abnormal output in the EP
EP sensor?
sensor. A sensor abnormality is treated as a malfunction,
and should be either repaired (consult with Koganei) or
replaced with a new sensor.
In what sort of situations do sensor abnormalities occur?
When the sensor (detector) stops transmitting, this is
output as a sensor abnormality. Since subjecting the EP
sensor to a strong shock can result in an abnormality, be
careful when operating.
When should zero calibration be used?
Use the zero calibration function switch when setting the
reference value (zero adjustment) before charged object
measurement.
What is the relationship between detection range and See the EP Sensor Catalog No.BK-R0002.
installation distance?
In the measurement precision display method, what is the T h e p r e c i s i o n d i s p l ay m e t h o d u s e s t wo k i n d s o f
difference between “±○rdg, ±○digit” and “±○FS”?
expressions: “rdg (reading)” and “FS (full scale).” “rdg”
expresses the error in relation to the read value, and “FS”
expresses the error over the entire measurement range. In
addition, “digit” is the minimum unit of display.
What sort of things in the surrounding environment should Since the sensor is affected by temperature, humidity,
we be concerned about for sensor installation?
electric field, ground status, and noise, use the sensor in
an environment that minimizes fluctuation.
Can calibration be performed?
Since the EP sensor is not a measuring instrument,
calibration cannot be performed. However, Koganei is
ready to perform inspections and adjustments at customer
request. Customers desiring this service are requested to
consult with Koganei.
The measurement target objects are moving at high Since the data output cycle can be as short as 100 ms,
speed. How fast can detection be performed?
measurements can be obtained so long as the workpiece
does not completely pass by within the cycle period.
32
Can this be used in an explosive atmosphere?
No, it cannot be used.
Please give some details about the support software.
The support software can display and save the various
settings and measurement data. It can be downloaded free
of charge from the Koganei website.
Item
EP sensor,
EP monitor
Question
Response
Can the set parameters be saved in the support software? No, they cannot be saved.
Can the continuous measurement data be saved in the Yes. Use Log → Star t, Save to save the continuous
support software?
measurement data.
How long is the processing time for sampling data?
In “averaged data output mode,” it is approx. 100 ms,
including averaging time, while in “actual measurement
data output mode,” it is approx. 30 ms.
In setting the sensor measurement distance, what part of It is the distance from the plastic surface of the body.
the body is the distance measured from?
What is the electrostatic capacity of the ion balance It is 10 pF.
monitor plate?
CC monitor
What does the CC monitor do?
The CC monitor checks the cleanliness level in clean
booths, etc., using simple detection of particles to display
the cleanliness level.
How does it differ from a particle counter?
The particle counter is an instrument for measuring
particles. By contrast, the CC monitor is an instrument for
simple detection of particles.
Can it serve as a substitute for a particle counter?
It is not a substitute. The counter is for periodic (shortterm) measurement, while the monitor is for continuous
monitoring. Used in combination, they can facilitate the
early detection of causes when contamination troubles
occur.
What is the role of the LD monitor in the support software? It shows the operating life status of the detection laser.
Can it be used in downflow environments?
Since measurement can be affected in environments with
wind speeds of 0.2 m/s [0.66 ft./sec.] or higher, use only in
environments with wind speeds below that level.
What is the air flow rate for sampling?
100 mR/min [6.1 in.3/min.].
Can it output the number of particles?
No. It can only display the level of cleanliness.
What is the measurement precision?
Check the output characteristics graph in the CC Montor
Catalog No. BK-P017.
What are the specifications for the communication LAN For a network connection, use a straight cable, and for a
one-to-one connection with a personal computer, use a
cable?
cross cable.
Can calibration be performed?
Since the CC monitor is not a measuring instrument,
calibration cannot be performed. However, Koganei is
ready to perform inspections and adjustments at customer
request. Customers desiring this service are requested to
consult with Koganei.
33
Troubleshooting
No. Category ① Category ② Symptom of problem
1
Ionizer
Common
2
Probable cause
Solution
LED fails to light even
after power is switched
on. Or it lights
momentarily and then
goes out again.
① No power being
supplied.
・Check that the DC power switch is turned ON. If using an AC adaptor,
check that it is firmly plugged into the electrical outlet.
・Check that the voltage applied is within product specifications range.
・Check whether the power and signal cables have breaks.
・Check that the power and signal cable wiring is correct.
Red LED (alarm)
lights up.
① Discharging needle
dirty or damaged.
・Check the tips of all of the discharging needles, and clean the dirty
tips, or replace the damaged ones.
② Discharging needle not ・Check that the discharging needle (discharging needle unit) is firmly
attached.
firmly attached.
3
Ion balance collapses.
① Discharging needle
dirty.
・Check whether the discharging needle is dirty.
② Ground not connected. ・Check that the ground wire is firmly connected to the ground terminal
on the main body.
・Check that the ground wire is firmly connected to the ground.
Blow type
4
5
6
Electrostatic
potential
sensor
・Check whether the metal cap is loose.
Red LED (alarm)
lights up.
① Loose metal cap.
No air is being delivered.
・Check whether the air is throttled too much.
① Ionizer throttle valve
too tightly squeezed, or ・Check whether air is being supplied to the ionizer.
a piping error.
・Check the pneumatic circuit.
② Nozzle in contact with ・Check whether the metal cap, nozzle, or pipe is in contact with the
grounding body.
the grounding body.
Fan type
LED fails to light even after ① Power switch OFF.
・Check that the switch is ON.
power is switched on. Or it
lights momentarily and then ② Safety circuit activated. ・Check that the louver (DTRY-ELF series) and discharging needle unit
goes out again.
(DTRY-ELW series) are both firmly set.
EP sensor
Measurement of GND
does not approach 0V.
① Ground not connected. ・Check that the ground wire is firmly connected to the ground terminal
on the main body.
・Check that the ground wire is firmly connected to the ground.
② Ground being affected by ・Check whether there are charged objects nearby.
nearby charged objects.
7
LED (red) is lit up.
① EP sensor abnormality. ・Repairs required. Consult with Koganei.
8
EP monitor and support
software display values
differ from the actual
charge amounts.
① EP sensor or EP monitor ・Check the measurement distance settings and actual measurement
distance.
measurement distance
settings different from the
actual measurement
distance.
9
LED (red) fails to blink
even when threshold
value is exceeded.
① Voltage comparison
output valid/invalid
setting invalid.
10
LED (red) blinking cannot ① Electric potential in
・Check that the electric potential is lower than the threshold value, and
then reset.
excess of the set
be reset.
threshold value detected.
The check methods are as follows.
・In the support software, check that the Enabling voltage setting range
was selected in the checkbox.
・Check that the EP monitor EP sensor setting (SET2) is set to CPE0.
② Reset cannot be performed ・Check that the communication cable is connected.
from EP monitor and
support software.
① “SEnd” not sent after
setting input value.
Nothing happens even
after setting the EP
sensor (SET2).
12
“PEr” display appears on ① EP sensor abnormality. ・Check the EP sensor’s alarm LED. If it is lit, it means an EP sensor
abnormality, and that the EP sensor requires repairs. Consult with
the monitor.
Koganei.
② Wiring error.
13 Cleanliness
monitor
14
34
・After inputting the setting value, send “SEnd”.
11
CC monitor
(main unit)
・Check that the wiring is correct.
Power does not switch on. ① Power cable
・Check that the AC adaptor is firmly plugged into the electrical outlet.
disconnected. No
・Check that the voltage applied is within product specifications range.
power being supplied. ・Check that the AC adaptor plug is firmly inserted into the power
supply jack.
Power is switched on and ① Measurement
display appears, but then
preparation time.
the LEDs also light up
one by one.
・This is a normal operation. Since the sampling time for this product is
5 minutes, the first 5 minutes after switching on the power is required
as preparation time. During the preparation time, the level display bar
lights up in the sequence of red blinking → orange blinking → green
blinking → red lit up → orange lit up → green lit up, to show that
preparation time is in progress. After 5 minutes have elapsed,
measurement starts.
No. Category ① Category ② Symptom of problem
15 Cleanliness
monitor
CC monitor
(main unit)
Probable cause
Solution
No display appears, even ① Main unit installation ・Check that the main unit up and down direction is correct.
though the object is dirty.
direction upside-down.
Or even though it is clean, ② Ventilation inlet blocked. ・Check whether the upper and lower ventilation inlets are blocked.
the red display does not
・Check whether there are strong sources of noise adjacent to the
③ Affected by noise.
go out.
measurement location.
④ Affected by outside air ・Check that the air flow around the main unit is at a wind speed of 0.2
m/s [0.66 ft./sec.] or less.
flows.
16
Nothing happens when
① SET button not
pressed.
attempting to change alarm
setting using rotary switch.
17
Alarm buzzer does not
shut off.
18
19
Even though RESET
button was pressed,
alarm LED does not turn
off.
Communication fails.
CC monitor
(communicationrelated)
① RESET button not
pressed.
① Particle density not
lower than setting
value.
・After changing the setting, press the SET button.
・The alarm cancel operation can vary depending on the timing of
pressing the RESET button.
① After an alarm occurs, if RESET is pressed before the particle
density falls below the setting value:
If the RESET button is pressed when the particle density is at the
setting value or higher, only the buzzer is cancelled. All other alarm
LEDs and external outputs are maintained. The alarm LEDs and
external outputs are cancelled when the particle density falls below
the setting value.
② After an alarm occurs, if the particle density falls below the setting
value without RESET being pressed:
If RESET is not pressed even though the particle density is below
the setting value, all alarm outputs are maintained. In this state,
pressing the RESET button cancels all alarm outputs.
For details about alarm operations, see the Owner’s Manual.
① LAN cable specifications ・Check the LAN cable specifications.
For a network connection → Straight cable.
incorrect.
For direct connection to a personal computer → Cross cable.
② Hardware and software ・Personal computer operating Microsoft WindowsNT/2000/XP.
configurations necessary ・Ensure network card compatible with the above computer.
for Ethernet
・Check that TCP/IP is installed as network protocol, and is operating
communication not set up. correctly.
20
Devicelnstaller does not
recognize CC monitor
when implementing IP
address settings.
① Network configuration ・Problem could be due to any of various factors. For details, consult
with Koganei.
and PC settings.
21
Could not install
DeviceInstaller.
① Restrictions due to PC ・Ask the administrator of your company’s personal computer network.
security.
22
② NET Framework not
installed in PC.
・Download and install NET Framework Ver1.1 from the Microsoft
Website.
In the support software
① IP address not set.
window for state of
communication, “The
sensor is not connected!”
is displayed.
・In the support software window for the IP address allocated in
DeviceInstaller, go to Setting and select Condition, and in Setting IP
address of Sensor input the IP address allocated in DeviceInstaller for
implementing the support software settings.
＊ If the product fails to operate correctly even after the above measures are adopted, there may be a problem with the product itself. Consult with Koganei.
35
Glossary
Term
A
36
Definition
a-contact
A normally open contact that closes when a signal (switch input or sensor input) is given. Also called
NO (Normally Open) contact ⇔ See b-contact.
Alternating current type
ionizer (AC method)
A type of high-voltage application in corona discharge method ionizers. Devices using alternating high
voltage (AC) are called alternating current method devices.
Antistatic agent
(process)
An agent usually consisting of a surfactant. Coating or blending with an insulation object makes the
surface of the insulation object more hydrophilic, increasing its hygroscopicity and granting it ionic
properties, which increase its surface conductivity and prevent charging.
Atom
A particle that cannot chemically be further divided. The atom consists of a nucleus carrying a positive
charge and surrounding electrons carrying a negative charge. The electrons revolve around the
nucleus like satellites.
B
b-contact
A normally closed contact that opens when a signal (switch input or sensor input) is given. Also called
NC (Normally Closed) contact. ⇔ See a-contact.
C
Carrying ions through a
tube
A method where ions generated by the ionizer are carried through a tube to remove charges from an
electrified area. In ionizers with a low frequency of 50/60 Hz, carring ions through a tube is impossible
because the ions are extinguished inside the tube. The DTRY-ELB series and DTRY-ELL series
manufactured by Koganei use a high frequency of 68000 Hz, to achieve an excellent ion balance and
ensure that ions can be carried through a tube with relatively little extinguishing inside the tube.
CE marking
A safety mark required to be affixed on designated products sold in the European Union (EU) area.
The CE marking is issued as a directive from the European Community Council of Ministers (EC
Directive), and certifies that the product is in compliance with the requisite safety regulations. Koganei
products generally come under the EMC, Low Voltage, and Machinery Directives.
Charge
The amount of electricity in a substance or its atoms, electrons, etc., which determines the size of an
electromagnetic interaction. The unit is the Coulomb (C). Charge exists in two states, positive and
negative, which are called positive charge and negative charge, respectively.
Charged device model
(CDM or CPM)
A model for when device package leads (terminals) become charged due to friction, etc., causing a
break when the charge is discharged via the device terminal. (CPM: charged package model).
Charging series
(triboelectric series)
A list of materials that produce a charge when rubbed together arranged in order depending on
whether they have positive or negative charges. In general, rubbing-induced electrification is larger for
materials whose positional relationship is distant than for those that are close together. Even rubbing
between substances of the same material will result in a positive charge on one side and negative
charge on the other.
Charged plate monitor
Used for measurement of ionizer performance. High voltage is applied to a □150 mm [5.91 in.], 20 pF
metal plate, to measure the time required for an ionizer to decay the voltage (decay time), and the
difference in the amount of ions generated by the ionizer (ion balance).
Clean room
A space where particles and micro-organisms floating in the air are controlled to be at or below a
certain level of cleanliness, with temperature, humidity, pressure, and other environmental conditions
also controlled as necessary.
Cleanliness
An amount showing the state of cleanliness in a target object, expressed in the size or number of
contamination substances incorporated into a certain surface or volume. In addition, the degree of
cleanliness ranked by the amount of contaminated substances or size of particles existing in a
specified location or volume is called the cleanliness level, and the arrangement of cleanliness level
by class is called the cleanliness class.
While standards for clean room cleanliness are independently set in each country, in general,
ISO146441-1 and Fed.Std. 209E are most widely used. Note that the clean room evaluation method
JIS B9920 regulated under the Japanese Industrial Standards (JIS) is based on ISO146441-1.
Conductor
Substance that easily passes electricity. Gold, silver, copper, iron, aluminum, etc.
Contact charging
Charging caused by contact.
Contamination
Contaminated by dirt or other foreign material. Particles adhering to semiconductor wafers are also called
contamination.
Corona discharge
method ionizer
Application of high voltage to a needle-tipped electrode forms an unbalanced electric field adjacent to
the electrode, and the discharge that occurs when that electric field locally exceeds the dielectric
breakdown electric field strength is called a corona discharge. In a dark room, this discharge is visible
as a blue-white light near the electrode. The corona discharge method ionizer utilizes this principle to
intentionally induce a corona discharge on the discharging needle, to generate ions.
Coulomb force
The force exerted according to Coulomb’s Law, which is defined as one coulomb being equal to the
amount of charge carried by one ampere of current for a period of one second.
Term
Definition
C
Coulomb’s Law
The size of the force exerting between two small charged objects is inversely proportional to the
square of the distance between the two objects, and proportional to the product of the two charges. Charges
with the same sign repel each other, while differing charges attract. This relationship is called Coulomb’s Law.
D
Direct current type
ionizer (DC method)
A type of high-voltage application method in corona discharge method ionizers. Devices using direct
current high voltage (DC) are called direct current type ionizers.
Discharging needle
A needle-shaped electrode attached to the interior of a corona discharge method ionizer. A corona
discharge is generated from its tip, to generate ions.
Dust generation
Generation of dust or particles.
Electric field
The gradient of a potential induced by existence of a charge. The force acting on an electric field is
expressed by Coulomb’s Law.
Electrification
Phenomenon where electric charge accumulates on an object. Discharge occurs when the intensity of
an electric field induced in a charged object reaches the dielectric breakdown electric field strength of
media, causing multiple problems.
Electron
Tiny particles with negative charges revolving around the atomic nucleus like satellites.
Electrostatic breakdown
Phenomenon where discharge of static electricity causes fusion, etc., of circuits in electronic parts.
Electrostatic capacity
Amount of charge per unit of voltage built up in a capacitor or other insulated conductor. Unit is F
(Farad).
Electrostatic discharge
(ESD)
Movement of electrostatic charges between objects of different potential.
Electrostatic induction
Phenomenon where electrons inside a conductive object move when the conductive object is brought
close to a charged object, causing the surface facing the charged body to become charged with
opposite polarity of the charged object.
Electrostatic spark
Phenomenon in which a certain amount of charge builds up and induces a discharge to an adjacent
conductive object.
EPA
ESD Protected Area. An area, space, or room designed to avoid risk to operators, and minimize the
risk of damage due to static electricity as a condition for handling ESDS or equipment.
ESA
Electrostatic Attraction. Attraction of particles to workpieces due to static electricity.
ESDS
Electrostatic Discharge Sensitive Devices. Stand-alone devices, integrated circuits, or mounted parts
with the possibility of damage due to encounters with electric fields or electrostatic discharge during
normal handling, testing, or transportation.
Ethernet
A computer network standard. In LANs (Local Area Networks), a combination of Ethernet and the
TCP/IP protocol is common.
Farad (F)
Farad (unit: F) is an SI unit of electrostatic capacity. When 1V is applied to a capacitor, and 1 C of
electrical quantity has accumulated, the electrostatic capacity of that capacitor is defined as 1 F.
Feedback-type ionizer
A method involving sensing the amount of charge in workpieces targeted for charge removal, and
controlling the amount of discharging ions. Failure to accurately measure the amount of charge in the
workpiece could result in emission of ions of the opposite polarity, leading to a reverse charge.
Flushing
When assembling parts, pressurized air is blown to prevent dust or particles from being attracted to
the parts.
Frequency
Number showing how many times per second a phenomenon of periodic change occurs in electricity,
radio waves, sound waves, etc. The unit is Hz (hertz).
Frictional charging
Charging induced by friction. The friction state can generate a large amount of charge due to pressure
application, heat generation, surface distortion, or rupture occurrence.
G
Ground
Refers mainly to the use of grounding wires for electrical connection between a charged object and
the earth to prevent conductor charging, and generally includes the meaning that a state of
equivalence is achieved when grounded.
H
High-frequency AC
method ionizer
High-voltage frequencies type in AC voltage type static charge removal devices (AC method ionizers),
for the generation of ions. The high-frequency AC method ionizer manufactured by Koganei operates
at 68000 Hz, to achieve an ion balance that is superior to other methods. The ordinary alternating
current (AC) method is 50/60 Hz.
Human body model
(HBM)
A model for when a person with a build-up of static electricity touches a device, causing a break when
the charge is discharged via the device.
IEC standard
International standard set by the International Electrotechnical Commission (IEC), a body for
standardizing technologies related to electrical engineering and electronic engineering. Standards for
static electricity removal devices (ionizers) are also stipulated in the IEC regulations.
E
F
I
37
Glossary
Term
I
Induction charging
Definition
Phenomenon where charging occurs when a charged object is brought close to another object and
then pulled away again, causing electrostatic induction from the charged object. Charging can occur
even if the two objects do not actually touch each other.
Insulator, non-conductor Substances that let virtually no electricity pass through (glass, paper, air, etc.)
Ion
A particle carrying a ＋ (positive) or − (negative) charge. An atom or molecule that has lost electrons
is called a positive ion, while an atom or molecule that has added electrons is called a negative ion.
Since electrons are much lighter than protons, it is the electrons that usually move.
Ion balance
The difference between positive ions and negative ions generated by an ionizer. Also called offset
voltage. Measurement is performed using a charged plate monitor (CPM), and the result appears as a
potential on a charged plate monitor that has been exposed to ionized air for a specific period.
Ionizer
A device for eliminating (neutralizing) static charges through ionization of the air, etc.
L
Light scattering method
A measurement principle used for par ticle counters and other par ticle measurement. The
measurement principle involves radiating a laser or intense light into air containing particles, and
using the intensity of the light scattered off particles to measure the particle diameters and numbers
of particles.
M
Machine model (MM)
A model for when metal with a build-up of static electricity touches a device, causing a break when
the charge is discharged via the device.
Minimum bending radius Shows how much bending a tube, pipe, or cable can tolerate when used. Expresses the radius of the
inner side of the curve.
Molecule
The minimum particles possessing the properties of a substance. A number of atoms bond together
to form a molecule, and an accumulation of an extremely large number of molecules form the
substances that surround us.
O
Ozone (density)
O3, an allotrope of oxygen. It gives off a distinctive odor. Often used for disinfection, bleaching, or
oxidation. While ozone has a strong oxidation action, and can be toxic at high concentrations, it even
exists in the natural world at 0.005 ppm to 0.05 ppm (depending on the environment). The allowed
ozone density in Japan’s labor environment is an average of 0.1 ppm or less over an 8-hour period
(Japan Society for Occupational Health).
P
Particle
Refers to particles with extremely tiny diameters, and generally to particles of 10 µm or less that rarely
precipitate out when suspended in a gas.
Peeling charging
Charging that is induced when an object once contacted is peeled off a surface.
Potential
Positional energy per unit of charge in an electric field. The unit is V(volt). Also, the difference between
a certain potential and another potential is called the potential difference or voltage.
ppm
A unit of density, expressed in parts per million. Used for expressing in ultramicroscopic concentration
and ratios. There are also units of concentration expressed in pphm (parts per hundred million) and
ppb (parts per billion).
Pulse AC method ionizer A method for applying high voltage to the discharging needle in the corona discharge method ionizer.
A feature is its ability to use sensing to control the amount of positive and negative ions. Positive ions
and negative ions can be discharged from a single discharging needle.
R
38
Pulse DC method
ionizer
A method for applying high voltage to the discharging needle in the corona discharge method ionizer.
A feature is its ability to use sensing to control the amount of positive and negative ions. Positive ions
and negative ions are discharged from separate discharging needles.
Radiation method
ionizer
An ionizer utilizing the ionizing radiation effect of alpha rays emitted from radioisotopes.
Relative humidity
Amount of water vapor in the air, divided by the saturated amount of water vapor at a given
temperature (unit: %).
When the relative humidity in the ambient atmosphere is high, leakage of charge from the insulator
surface suppresses generation of static electricity. A relative humidity level of 65% or more
demonstrates particular effectiveness as a charge prevention measure.
Removal of charge
Removal (neutralization) of charge built up on the surface of an object.
Reverse charge
A phenomenon where the ionizer fails to eliminate charges on a charged object, but instead actually
charges the object.
RoHS directive
The restriction of the use of certain hazardous substances in electrical and electronic equipment. In
principle, use of 4 heavy metals, lead, mercury, cadmium, and hexavalent chrome, and the
brominated flame retardants PBB and PBDE must be eliminated or curtailed in electrical and
electronic equipment by July 2006. All Koganei-brand products shipped by Koganei since July 2006
are in conformance with the RoHS directive.
Term
S
Definition
Sampling time
The time targeted for measurement.
Self-discharge
Electrostatic energy discharged from a charged object through a conductive object in close proximity.
Discharging brushes utilize this principle.
Soft X-ray method
ionizer
A type of light irradiation ionizer. The ionizer uses soft X-rays, a type of electromagnetic wave with an
extremely short wavelength.
Static charge removing
brush (ribbon)
Brush-shaped self-discharging devices commonly equipped with OA equipment (such as at the paper
outlet on copy machines). These do not require power supplies, as they remove charges by grounded
conductive fiber as electrodes. Although low-priced and simple to attach, their theoretical charge
removal capacity is greatly affected by the potential of the charged object and they therefore cannot
perform charge removal when the amount of charge is low (approx. 3 kV or less).
Static charge removing
characteristics
In ionizers, such characteristics as static charge removing time, static charge removing range, ion
balance, etc.
Static charge removing
time
The time required for reduction from a certain voltage down to a specified voltage. Also called
electrostatic decay time.
Static electricity
Electricity where the charge’s spatial movement is very small.
Static electricity removal An ionizer. Also called a static charge removal device. (See Ionizer.)
device
T
Tungsten
A metallic element, with the element symbol W. It has the highest melting point of the metals, and
because it possesses an electrical resistance that is relatively high for a metal, it is used as a filament
for incandescent bulbs, etc. It is often used for ionizer discharging needles.
U
Ultraviolet method
ionizer
A type of light irradiation ionizer. It features ultraviolet, a type of electromagnetic wave with a
wavelength longer than soft X-rays, and uses the optoelectric effect to ionize the atmosphere.
39
MEMO
40
Limited Warranty
KOGANEI CORP. warrants its products to be free from defects
in material and workmanship subject to the following provisions.
Warranty Period
Koganei
Responsibility
Limitations
The warranty period is 180 days from the date
of delivery.
If a defect in material or workmanship is found
during the warranty period, KOGANEI CORP.
will replace any part proved defective under
normal use free of charge and will provide the
service necessary to replace such a part.
•
This warranty is in lieu of all other warranties,
expressed or implied, and is limited to the
original cost of the product and shall not
include any transportation fee, the cost of
installation or any liability for direct, indirect
or consequential damage or delay resulting
from the defects.
•
•
•
•
KOGANEI CORP. shall in no way be liable or responsible for
injuries or damage to persons or property arising out of the
use or operation of the manufacturer’s product.
This warranty shall be void if the engineered safety devices
are removed, made inoperative or not periodically checked for
proper functioning.
Any operation beyond the rated capacity, any improper use or
application, or any improper installation of the product, or any
substitution upon it with parts not furnished or approved by
KOGANEI CORP., shall void this warranty.
This warranty covers only such items supplied by KOGANEI
CORP. The products of other manufacturers are covered only by
such warranties made by those original manufacturers, even
though such items may have been included as the components.
The specifications are subject to change without notice.
● ISO 9001 certified offices are Main Office,
Tokyo Plant, Komagane Plant and Sales Offices.
ISO 9001 / ISO 14001
● ISO 14001 certified offices are Main Office,
Tokyo Plant and Komagane Plant.
URL http://www.koganei.co.jp
E-mail: [email protected]
OVERSEAS DEPARTMENT
3-11-28, Midori-cho, Koganei City, Tokyo 184-8533, Japan
Tel: 042-383-7271 Fax: 042-383-7276
SHANGHAI KOGANEI INTERNATIONAL TRADING CORPORATION
Room 2606-2607, Tongda Venture Building No.1, Lane 600, Tianshan Road, Shanghai, 200051, China
Tel: 021-6145-7313 Fax: 021-6145-7323
KOGANEI-PORNCHAI CO., LTD.
89/174 Moo 3, Vibhavadee Rangsit Road, Talad Bangkhen, Laksi, Bangkok, 10210, Thailand
Tel: 02-551-4025 Fax: 02-551-4015
3/’09 30 BPBP
©KOGANEI CORP. PRINTED IN JAPAN
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