Koganei MRV Magnet type flat rodless Instruction manual

BK-UC003 Ver.1.0
Air Cylinder
MAGNET TYPE FLAT RODLESS CYLINDER MRV Series
INSTRUCTION MANUAL Ver.1.0
Handling Instructions and Precautions
General precautions
Media
1. Use air for the media. For the use of any other media, consult
us.
2. Air used for the Flat Rodless cylinders should be clean air that
contains no deteriorated compressor oil, etc. Install an air filter
(filtration of a minimum 40 µm) near the Flat Rodless
cylinders or valve to remove collected liquid or dust. In
addition, drain the air filter periodically. Collected liquid or dust
entering the Flat Rodless cylinder may cause improper
operation.
Piping
1. In piping connection with the Flat Rodless cylinders, flush the
tube completely (by blowing compressed air) before piping.
Intrusion of machining chips, sealing tape, rust, etc.,
generated during plumbing could result in air leaks and other
defective operations.
2. When screwing in piping or fittings to the Flat Rodless
cylinders, tighten to the appropriate tightening torque shown
below.
Connecting thread
Tightening torque N・m [ft・lbf]
M5×0.8
1.6 [1.2]
Rc1/8
6.9〜8.8 [5.1〜6.5]
Atmosphere
1. When using in locations subject to dripping water, dripping
oil, etc., or to large amounts of dust, use a cover to protect
the unit.
2. The product cannot be used when the media or ambient
atmosphere contains any of the substances listed below.
Organic solvents, phosphate ester type hydraulic oil, sulphur
dioxide, chlorine gas, or acids, etc.
Lubrication
The Flat Rodless cylinders can be used without lubrication. If
lubrication is required, however, always consult us first. Do not
use turbine oil.
Others
1. When the Flat Rodless cylinder is moved manually, its
movement may not feel smooth. This is not a problem,
however, since it is normally operated using air pressure.
Always apply air to the system to check its operation.
2. The Flat Rodless cylinder has a strong magnet integrated
into its body. Do not place magnetic media, recording
devices, magnetic detection devices, etc., within 1 meter
[3.28ft.] of the product. This could result in lost data or erratic
operation.
Selection
Allowable load and moment
Although the Flat Rodless cylinders can be used with directly applying loads, make sure that the load
and moment do not exceed the values in the table below. In addition, since load capacity may vary
depending on the speed, confirm the rubber bumper and shock absorber absorption capacity on
p.1137 before use.
Mp=Fp×r1
Mr=Fr×r2
Fp
Fr
r1
r2
My=Fy×r3
W1
Fy
r3
W2
W3
Pitching moment
: Mp＝Fp×r1(N·m)
Rolling moment
: Mr＝Fr×r2 (N·m)
Yawing moment
: My＝Fy×r3 (N·m)
Maximum load capacity : W1,W2,W3 (N)
Note: External forces Fp and Fy should be restricted to 60% or less of the magnet retaining force.
Direction of
moment
Mp
Mr
My
W1 Note
W2 Note
W3 Note
N･m [ft･lbf]
N･m [ft･lbf]
N･m [ft･lbf]
N [lbf.]
N [lbf.]
N [lbf.]
(CS-)MRV14
1.2 [0.9]
0.3 [0.2]
1.2 [0.9]
130 1[6.7]
30 [6.7]
10 [2.2]
(CS-)MRV22
4.1 [3.0]
1.1 [0.7]
4.1 [3.0]
180 [18.0]
180 [18.0]
30 [6.7]
(CS-)MRV28
8.1 [5.9]
2.1 [1.5]
8.1 [5.9]
120 [27.0]
120 [27.0]
45 [10.1]
Model
1
Caution: The moment including the inertial force generated when the load is moved or stopped
must not exceed the values in the above table.
Keep the mass and speed within the range of the rubber bumper and shock absorber
capacity graphs.
Note: W is the maximum value. Since W varies depending on the stroke, use it within the
“Maximum load capacity and stroke” ranges shown in the graph below.
●Relationship between load capacity and air pressure during vertical operation (reference)
●Maximum load capacity and stroke
250
(CS-)MRV28
Load capacity during
vertical operation
Maximum load capacity
150
100
(CS-)MRV22
50
(CS-)MRV14
W1, W2
（N）Note
0
(CS-)MRV28
150
500
1000
Cylinder stroke (mm)
Note: The value for W3 is 1/3 that of W1 and W2.
1500
1N = 0.225lbf.
1mm= 0.0394in.
r
(CS-)MRV22
100
W
W 50
（N）
0
Bending moment
When M=0
Maximum value
When M=
2
When M=Maximum value
200
0
0.1
(CS-)MRV14
0.2
0.3
0.4
0.5
Air pressure (MPa)
0.6
0.7
1N = 0.225lbf.
1MPa= 145psi.
Bending moment
Ｍ＝Ｗ×r
Handling Instructions and Precautions
Slider deflection
The reference values of the amount of slider deflection due to clearance is shown in the table below.
Since the slider portion of the Flat Rodless cylinder allows a certain amount of play as shown below,
use the cylinder with a linear guide in high-precision applications.
Mp
Mr
My
θθ
θ θ
θθ
Slider deflectionθ(±°)
Model
Mp direction
Mr direction
My direction
(CS-)MRV14
0.8
1.8
0.8
(CS-)MRV22
0.6
1.2
0.6
(CS-)MRV28
0.7
1.3
0.7
Cushioning capacity
■ Rubber bumper capacity
The Flat Rodless cylinders come with rubber bumpers as standard equipment. The maximum load
capacity and impact speed, however, should lie within the “With rubber bumper” range shown in the
“Rubber bumper and shock absorber capacity graph” below. Do not use it when the maximum impact
speed exceeds 500mm/s [19.7in./sec.].
■ Shock absorber absorption capacity
The Flat Rodless cylinders use shock absorbers as optional equipment. The maximum load capacity
and impact speed, however, should lie within the “With shock absorber” range shown in the “Rubber
bumper and shock absorber capacity graph” below. Do not use it when the maximum impact speed
exceeds 800mm/s [31.5in./sec.].
■ Rubber bumper and shock absorber capacity graph
(Horizontal operation, at air pressure of 0.5MPa [73psi.])
● With shock absorber
● With rubber bumper
140
140
120
Maximum load capacity (N)
Maximum load capacity (N)
(CS-)MRV28
100
80
(CS-)MRV22
60
40
(CS-)MRV14
20
0
100
200
300
400
500
Impact speed (mm/s)
600
1N = 0.225lbf.
1mm/s= 0.0394in./sec.
120
(CS-)MRVZ28
100
80
(CS-)MRVZ22
60
40
(CS-)MRVZ14
20
0
100
200
300
400
500
600
Impact speed (mm/s)
700
800
900
1N = 0.225lbf.
1mm/s= 0.0394in./sec.
In the graphs, “Impact speed” refers to the speed immediately before the slider impacts the rubber
bumper or shock absorber. This is not the same as “average speed (cylinder stroke/travel time)”.
Calculation of impact energy
Horizontal impact
→
'
L
→
m
L'
W'
Fo
→
F'o
E＝E1＋E2
m･v2
＝
＋FO・L
2
→
E' ＝E' 1＋E' 2
W' ･v' 2
＝
＋F' O・L'
2g'
Vertical impact Note 1
When descending Note 2
'
m
F'o W'
→
Fo
→
L'
→
→
→
L
L'
L
→
F'o W'
→
m
→
Fo
When ascending
'
E＝E1＋E2＋E3
E' ＝E' 1＋E' 2＋E' 3
m･v2
W' ･v' 2
＝
＋FO・L＋m・g・L
＝
＋F' O・L' ＋W'・L'
2g'
2
E＝E1＋E2−E3
E' ＝E' 1＋E' 2−E' 3
m･v2
W' ･v' 2
＝
＋FO・L−m・g・L
＝
＋F' O・L−W' ・L'
2g'
2
Note 1: For impact on incline,
E3 becomes E3' = m・g・L・sinθ.
Note 1: For impact on incline,
E' 3 becomes E'' 3= W'・L'・sinθ.
θ
m
W'
Fo
F'o
→
→
θ
Note 2: When descending, heavier loads can be carried using lower operating air pressure (P)
than when ascending.
E ：Total impact energy … [J]
m･v2
E1 ：Kinetic energy …
[J]
2
E2 ：Additional energy by cylinder thrust …Fo·L [J]
E3 ：Additional energy by load mass …m·g·L [J]
m ：Load mass [kg]
v ：Impact speed [m/s]
g ：Gravity acceleration 9.8 [m/s2]
Fo ：Cylinder thrust … = π ·D2·P [N]
4
Fo ：[D: Cylinder bore (mm) P: Operating air pressure (MPa)]
L ：Absorbing stroke of shock absorber [m]
Note 2: When descending, heavier loads can be carried using lower operating air
pressure (P' ) than when ascending.
E' ：Total impact energy … [ft·lbf]
W'･v' 2
E' 1 ：Kinetic energy …
[ft·lbf]
2g'
E' 2 ：Additional energy by cylinder thrust …F'o·L' [ft·lbf]
E' 3 ：Additional energy by load weight …W' · L' [ft·lbf]
W' ：Load weight [lbf]
v' ：Impact speed [ft./sec.]
g' ：Gravity acceleration 32.2 [ft./sec.]
F'o：Cylinder thrust … = π ·D' 2·P' [lbf.]
4
Fo ：[D' : Cylinder bore [in.] P' : Operating air pressure [psi.]]
L' ：Absorbing stroke of shock absorber [ft.]
Handling Instructions and Precautions
Mounting
Mounting
Mounting the shock absorber
1. Because the Flat Rodless cylinders have strong magnets
built into the cylinder bodies, they cannot be used in locations
with magnetized cutting oil or powder.
2. Be careful to avoid making scratches, dents, etc., on the
cylinder barrel.
3. If an external force larger than the magnetic retaining force is
applied, causing the slider and piston to deviate or
completely separate, return the piston to the stroke end and
then apply external force to the slider to restore it to the
correct position.
4. When using in locations where the cylinder can easily
become smeared, clean the cylinder periodically.
After cleaning, always apply grease to the surface of the
cylinder barrel. For the type of grease to be applied, consult
us.
5. Mount the cylinder barrel so that it cannot be twisted.
Insufficient flatness of the mounting surface could result in
cylinder barrel twisting and malfunctions.
Tightening torque for shock absorber
hexagon nuts
Model
Tightening
torque
For (CS-)MRV14
KSHJM8×5-14
N･m [ft･lbf]
For (CS-)MRV22
KSHJM8×5-22
For (CS-)MRV28
KSHJM10×10-28
2.5 [1.8]
6.5 [4.8]
1. Use the shock absorber within its absorption capacity range
(from its capacity graph).
2. The maximum impact speed to the shock absorber is
800mm/s [31.5 in./sec.]. Note that this is not the same as the
average speed. The speed at time of impact should not
exceed 800mm/s [31.5 in./sec.].
3. Do not use the shock absorber in a place subject to large
amounts of dripping water, dripping oil, or dust. If using it in
these places, install a cover, etc., so that the liquid drops etc.
do not drip on it directly. This could lead to improper
operation and might decrease the absorption energy.
4. Do not loosen the set screw on the center of the shock
absorber’s back end surface. The oil sealed inside will leak
out, which will cause the shock absorber to fail.
5. Do not install other shock absorbers in this product. Because
product characteristics vary among shock absorbers, if other
shock absorbers are used, damage to the cylinder, etc., may
occur.
Size of piping materials
Cylinder barrel
6. When mounting the body, always secure it by mounting bolts
at 4 counterbore holes on the end plate (left and right).
Tightening torque
N･m [ft･lbf]
For the side surface port with a sensor rail type, the distance to
the sensor rail determines the outer diameter of the attached
piping fitting, while for an end surface port, the diameter of the
counterbore determines the outer diameter. Use the outer
diameters shown in the table below or smaller for piping fittings.
Model
Side surface (with sensor rail)
End surface
A
B
(CS-)MRV22
(CS-)MRV28
(CS-)MRV14
φ10 [0.394in.]
φ10 [0.394in.]
Tightening
torque
2.8 [2.1]
（M4）
6 [4.4]
（M5）
10 [7.4]
（M6）
(CS-)MRV22
φ13 [0.512in.]
φ10 [0.394in.]
(CS-)MRV28
φ16 [0.630in.]
―
4-Counterbore holes
B
(CS-)MRV14
A
Model
FLAT RODLESS
CYLINDERS
Standard Cylinders
Symbol
Specifications
Item
Equivalent bore size
Model
MRV14
MRV22
MRV28
mm [in.]
14 [0.551]
22 [0.866]
28 [1.102]
Media
Air Note1
Operation type
Double acting type
Operating pressure range
MPa [psi.]
Proof pressure
MPa [psi.]
Operating temperature range
0.2〜0.7 [29〜102]
1.05 [152]
°C [°F]
0〜60 [32〜140]
8〜500 [0.31〜19.7] Note2
Basic type
Operating speed range
mm/s [in./sec.] With shock absorber specification
8〜800 [0.31〜31.5] Note2
Basic type
Cushion
Rubber bumper
Shock absorber
With shock absorber specification
Lubrication
Not required Note3
Stroke adjusting range (with shock absorber specification only)
(per side in specification stroke)
mm [in.]
0〜−10 [0〜−0.394]
mm
Maximum stroke
0〜−6 [0〜−0.236]
1000
1500 Note4
[
]
＋2 ＋0.079
0 ＋0.079
mm [in.]
Stroke tolerance
0〜−15 [0〜−0.591]
Port size
M5×0.8
Rc1/8
Notes: 1. Use clean air that contains no moisture, dust, and oxidized oil.
2. For the relationship between the maximum load capacity and the impact speed, see the “Rubber bumper and shock absorber capacity graph” on p.1137.
3. This product can be used without lubrication. If lubrication is required, however, always consult us. Do not use turbine oil.
4. The maximum stroke of the cylinder with sensor rail is 1000mm.
Magnet Retaining Force
N [lbf.]
Model
Item
Retaining force
MRV14
MRV22
MRV28
115 [25.9]
310 [69.7]
500 [112]
Specifications of Shock Absorber
Model
Item
Applicable shock absorber
Maximum absorption J [ft·lbf]
Absorbing stroke
MRVZ14
MRVZ22
MRVZ28
KSHJM 8×5-14
KSHJM 8×5-22
KSHJM 10×10-28
1 [0.7]
mm [in.]
1.5 [1.1]
3 [2.2]
5 [0.197]
10 [0.394]
Maximum impact speed mm/s [in./sec.]
800 [31.5]
Maximum operating frequency cycle/min
60
Spring return force (compressed) N [lbf.]
6 [1.3]
8 [1.8]
Angle variation
1° or less
Operating temperature range °C [°F]
0〜60 [32〜140]
Note: The life of the shock absorber may vary from the Flat Rodless cylinder, depending on its operating condition.
Equivalent Bore Size and Stroke
Item
Model
MRV(Z)14
Standard strokes
100, 150, 200, 250, 300, 350, 400, 450, 500
Maximum available stroke
1〜1000
MRV(Z)22
200, 250, 300, 350, 400, 450, 500, 600, 700, 800
1〜1500
MRV(Z)28
200, 250, 300, 350, 400, 450, 500, 600, 700, 800
1〜1500
Remark: Non-standard strokes are available at 1mm pitch intervals.
mm
Maximum available stroke with sensor rail
1〜1000
Mass
kg [oz.]
Additional
Zero stroke mass for each
1mm [0.0394in.]
mass
stroke
Model
MRV(Z)14
MRV(Z)22
MRV(Z)28
Basic type
0.22 1[7.76]
With shock absorber
0.27 1[9.52]
Basic type
0.50 [17.64]
With shock absorber
0.59 [20.81]
Basic type
0.86 [30.34]
With shock absorber
1.00 [35.27]
Shock absorber unit
One side
Both sides
M-type
mount
―
―
0.017 [0.60]
0.000267
[0.00942]
0.011 [0.35] 0.021 [0.71]
0.000491
[0.01732]
0.011 [0.35] 0.021 [0.71]
0.000656
[0.02314]
0.022 [0.78] 0.044 [1.55]
―
―
0.007
[0.25]
―
0.031 [1.06]
―
―
Sensor
magnet
―
Sensor switch
Zero stroke Additional mass
for each
mass of 1 mm [0.0394in.] Lead wire 1m Lead wire
[39in.]
sensor rail
sensor rail
or ZE175G 3m [118in.]
0.004
[0.14]
0.052 [1.83]
0.008
[0.28]
0.0001
[0.0035]
0.035
[1.23]
0.015
[0.53]
0.010
[0.35]
―
Theoretical Thrust
N [lbf.]
Thrust efficiency
Air pressure MPa
0.2 [29]
0.3 [44]
0.4 [58]
0.5 [73]
0.6 [87]
0.7 [102]
MRV14
157 [0.243]
131 1[7.0]
147 [10.6]
163 [14.2]
179 [17.8]
194 [21.1]
110 [24.7]
MRV22
402 [0.623]
180 [18.0]
121 [27.2]
161 [36.2]
201 [45.2]
241 [54.2]
281 [63.2]
MRV28
628 [0.973]
126 [28.3]
188 [42.3]
251 [56.4]
314 [70.6]
377 [84.7]
440 [98.9]
The figures in the table are theoretical values. There may be some difference from these for practical
applications.
For actual selection, see the thrust efficiency at right.
Note that thrust efficiency tends to be lower at low pressure.
100
Thrust efficiency (%)
Model
Pressure area
mm2 [in.2]
50
0.1
0.2
0.3
0.4
0.5
0.6
0.7
Air pressure (MPa)
1MPa = 145psi.
Air Flow Rate and Air Consumption
While the Flat Rodless cylinder’s air flow rate and air consumption can be found through the following calculations, the quick reference table below provides the
answers more conveniently.
Q1 : Required air flow rate for cylinder
R/min (ANR)
Q2 : Air consumption of cylinder
R/min (ANR)
60
P＋0.101
πD2
–6
×L×
×
×10
Air flow rate: Q 1＝
D : Cylinder equivalent bore size
mm
4
t
0.101
L : Cylinder stroke
mm
t : Time required for cylinder to travel 1 stroke
s
P＋0.101
πD2
n : Number of cylinder reciprocations per minute times/min
×L×2×n×
×10 –6
Air consumption: Q 2＝
4
0.101
P : Pressure
MPa
Air flow rate: Q1' ＝ πD'
4
2
× L' ×
Q 1' : Required air flow rate for cylinder
ft.3/min. (ANR)
Q 2' : Air consumption of cylinder
ft.3/min. (ANR)
D' : Cylinder equivalent bore size
in.
L' : Cylinder stroke
in.
t : Time required for cylinder to travel 1 stroke
sec.
n : Number of cylinder reciprocations per minute times/min
P' : Pressure
psi.
60
1
P' ＋14.70
×
×
t
1728
14.70
Air consumption: Q 2' ＝ πD' × L' × 2 × n ×
4
2
1
P' ＋14.70
×
1728
14.70
Air consumption for each 1 mm [0.0394in.] stroke
Equivalent bore
size mm [in.]
cm3 [ft.3]/Reciprocation (ANR)
Air pressure MPa [psi.]
0.2 [29]
0.3 [44]
0.4 [58]
0.5 [73]
0.6 [87]
0.7 [102]
14 [0.551]
0.936 [3.311×10–5] 1.246 [4.401×10–5] 1.558 [5.501×10–5] 1.868 [6.601×10–5] 2.180 [7.701×10–5] 2.490 [8.791×10–5]
22 [0.866]
2.396 [8.461×10–5] 3.192 [1.127×10–4] 3.988 [1.408×10–4] 4.784 [1.689×10–4] 5.580 [1.971×10–4] 6.378 [2.252×10–4]
28 [1.102]
3.744 [1.322×10–4] 4.988 [1.761×10–4] 6.232 [2.201×10–4] 7.476 [2.640×10–4] 8.720 [3.079×10–4] 9.966 [3.519×10–4]
The figures in the table are for computing the air flow rate and air consumption when a Flat Rodless cylinder makes 1 reciprocation
with stroke of 1mm [0.0394in.]. The air flow rate and air consumption actually required are found by the following calculations.
●Finding the air flow rate (for selecting F.R.L., valves, etc.)
Example:
When operating a Flat Rodless cylinder of an equivalent bore size of 22mm [0.866in.] at a speed of 300mm/s [11.8in./sec.] under air pressure of
0.5MPa [73psi.]
1
× 300× 10−3＝0.71R/s [0.025ft.3/sec.] (ANR)
4.784 ×
2
1
× 300 × 60 × 10−3＝43.05R/min [1.52ft.3/min.] (ANR))
(At this time, the flow rate per minute is 4.784 ×
2
●Finding the air consumption
Example 1. When operating a Flat Rodless cylinder of an equivalent bore size of 22mm [0.866in.] and a stroke of 100mm [3.94in.] under air pressure of
0.5MPa [73psi.], for 1 reciprocation
4.784 × 100 × 10−3＝0.478R[0.0169ft.3]/Reciprocation (ANR)
Example 2. When operating a Flat Rodless cylinder of an equivalent bore size of 22mm [0.866in.] and a stroke of 100mm [3.94in.] under air pressure of
0.5MPa [73psi.], for 10 reciprocations per minute
4.784 × 100 × 10 × 10−3＝4.78R/min [0.169ft.3/min.] (ANR)
Note: To find the actual air consumption required when using the Flat Rodless cylinder, add the air consumption of the piping to the air consumption obtained from
the above calculation.
Order Codes
●Basic type
14×200
MRV
Flat Rodless cylinder
with rubber bumper
-
-
Equivalent bore size
×
Stroke
Number of sensor switches
1: With 1 sensor switch
2: With 2 sensor switches
3: With 3 sensor switches
Sensor rail
Blank : No sensor rail
S : With sensor rail
(Including sensor magnet)
Lead wire length
A : 1000mm [39in.]
B : 3000mm [118in.]
G : 300mm [11.8in.] with M8 connector, only for ZE175
Sensor switch
Blank : No sensor switch
ZE135: 2-lead wire solid state type with indicator lamp DC10〜28V
ZE155: 3-lead wire solid state type NPN output with indicator lamp DC4.5〜28V
ZE101: 2-lead wire reed switch type without indicator lamp DC5〜28V, AC85〜115V
ZE102: 2-lead wire reed switch type with indicator lamp DC10〜28V, AC85〜115V
ZE175: 3-lead wire solid state type PNP output with indicator lamp DC4.5〜28V
M-type mount
Blank : No M-type mount
M : With M-type mount
●With shock absorber specification
14×200
MRVZ
Flat Rodless cylinder
with shock absorber
specificationNote
-
-
Equivalent bore size
×
Stroke
Number of sensor switches
1: With 1 sensor switch
2: With 2 sensor switches
3: With 3 sensor switches
Sensor rail
Blank : No sensor rail
S : With sensor rail
(Including sensor magnet)
Lead wire length
A : 1000mm [39in.]
B : 3000mm [118in.]
G : 300mm [11.8in.] with M8 connector, only for ZE175
Sensor switch
Blank : No sensor switch
ZE135: 2-lead wire solid state type with indicator lamp DC10〜28V
ZE155: 3-lead wire solid state type NPN output with indicator lamp DC4.5〜28V
ZE101: 2-lead wire reed switch type without indicator lamp DC5〜28V, AC85〜115V
ZE102: 2-lead wire reed switch type with indicator lamp DC10〜28V, AC85〜115V
ZE175: 3-lead wire solid state type PNP output with indicator lamp DC4.5〜28V
Number of shock absorbers
K1 : With 1 shock absorber
K2 : With 2 shock absorbers
Note: An M-type mount cannot be installed on a cylinder with shock absorber specification.
Additional Parts
●M-type mount
M-MRV
●Sensor rail
S-MRV 14×100
Equivalent bore size
14 : For MRV14
22 : For MRV22
28 : For MRV28
●Magnet set
MG-MRV
Equivalent bore size
14 : For MRV14
22 : For MRV22
28 : For MRV28
(Sensor magnet 1pc., magnet holder 1pc., bolt 2pcs.)
Equivalent bore size×stroke
(Sensor rail 1pc., bolt 2pcs.)
●Shock absorber
KSHJM
Size
18×5-14 : For MRVZ14
18×5-22 : For MRVZ22
10×10-28 : For MRVZ28
Dimensions of MRV14
mm [in.]
●Basic type MRV14× Stroke
41 [1.614]
24.6 [0.969]
34 [1.339]
44 [1.732]
30 [1.181]
4-M4×0.7 Depth6 [0.236]
72 [2.835]＋Stroke
5 [0.197]
2-M5×0.8
Connection port (left chamber)
(with 1 plug)
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
4-φ4.8 [0.189]
5
[0.197] φ8 [0.315] Counterbore
Depth4.5 [0.177]
11.6 [0.457]
23 [0.906]
25 [0.984]
8.5 [0.335]
47 [1.850]
2 [0.079]
41 [1.614]
Stroke
44 [1.732]
30 [1.181]
23 [0.906]
13.5 [0.531]
2-M5×0.8
Connection port (right chamber)
(with 1 plug)
4-M2×0.4 Depth4 [0.157]
For mounting sensor magnet
52 [2.047]＋Stroke
82 [3.228]＋Stroke
9.5 [0.374]
15
[0.591]
9.5 [0.374]
15
[0.591]
●With shock absorber specification MRVZ14× Stroke
31.5 [1.240]
24.6 [0.969]
34 [1.339]
44 [1.732]
30 [1.181]
41 [1.614]
Stroke
44 [1.732]
30 [1.181]
4-M4×0.7 Depth6 [0.236]
72 [2.835]＋Stroke
5 [0.197]
4 [0.157]
25.5 [1.004]
M8×0.75 13 [0.512] MAX.
2-M5×0.8
Connection port (left chamber)
(with 1 plug)
4-M2×0.4 Depth4 [0.157]
For mounting sensor magnet
52 [2.047]＋Stroke
82 [3.228]＋Stroke
9.5 [0.374]
15
[0.591]
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
11.6 [0.457]
2 [0.079] 31 [1.220]
33 [1.299]
41 [1.614]
8.5 [0.335]
47 [1.850]
23 [0.906]
13.5 [0.531]
4-φ4.8 [0.189]
5
φ8 [0.315] Counterbore
[0.197]
Depth4.5 [0.177]
13 [0.512] MAX.
2-M5×0.8
9.5 [0.374] Connection port (right chamber)
15
[0.591]
2.5 [0.098]
77 [3.031]＋Stroke
2.5
[0.098]
1 [0.039] 7 [0.276]
●With sensor rail MRV□S14× Stroke
6.7 [0.264]
The “With sensor rail” model is shipped with the sensor rail
and sensor magnet assembled on the piping port side.
51 [2.008]
57 [2.244]
56 [2.205]
34 [1.339]
±1
[±0.039]
●M-type mount
1 [0.039]
4-M3×0.5
Depth7 [0.276]
7 [0.276]
26 [1.024]
Note: When using an M-type mount, be sure to remove the plate bumper.
(with 1 plug)
Dimensions of MRV22
mm [in.]
●Basic type MRV22× Stroke
46 [1.811]
9.7 [0.382]
58 [2.283]
61 [2.401]
2 [0.079] 29 [1.142]
4-M5×0.8Depth9 [0.354]
40 [1.575]
6 [0.236]
31 [1.220]
52 [2.047]
Stroke
58 [2.283]
38 [1.496]
52 [2.047]
37 [1.457]
29 [1.142]
16.5 [0.650]
4-φ5.8 [0.228]
6
φ9.5 [0.374] Counterbore, Depth5.5 [0.217]
[0.236]
2-M5×0.8
Connection port (right chamber)
(with 1 plug)
92 [3.622]＋Stroke
17.6
[0.693]
2-M5×0.8
Connection port (left chamber)
(with 1 plug)
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
4-M2×0.4 Depth4 [0.157]
For mounting sensor magnet
68 [2.677]＋Stroke
104 [4.094]＋Stroke
11.5 [0.453]
18
[0.709]
11.5 [0.453]
18
[0.709]
●With shock absorber specification MRVZ22× Stroke
38.5 [1.516]
38 [1.496]
40 [1.575]
40 [1.575]
6 [0.236]
37 [1.457]
4-M5×0.8 Depth9 [0.354]
4-φ5.8 [0.228]
6
φ9.5 [0.374] Counterbore, Depth5.5 [0.217]
[0.236]
92 [3.622]＋Stroke
9 [0.354]MAX.
5 [0.197]
9 [0.354] MAX.
17.6
[0.693]
32
[1.260]
M8×0.75
46 [1.811]
9.7 [0.382]
58 [2.283]
61 [2.401]
2 [0.079]
52 [2.047]
Stroke
58 [2.283]
16.5 [0.650]
38 [1.496]
52 [2.047]
29 [1.142]
2-M5×0.8
Connection port (left chamber)
(with 1 plug)
11.5 [0.453]
18
[0.709]
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
2-M5×0.8
Connection port (right chamber)
4-M2×0.4 Depth4 [0.157]
11.5 [0.453] (with 1 plug)
For mounting sensor magnet
68 [2.677]＋Stroke
18
104 [4.094]＋Stroke
[0.709]
5 [0.197]
94 [3.701]＋Stroke
5
[0.197]
2.5 [0.098] 7 [0.276]
●With sensor rail MRV□S22× Stroke
6.2 [0.244]
46 [1.811]
●M-type mount
68 [2.677]
77 [3.031]
70 [2.756]
±1
[±0.039]
The “With sensor rail” model is shipped with the sensor rail
and sensor magnet assembled on the piping port side.
1 [0.039]
4-M5×0.8
Depth8 [0.315]
8 [0.315]
32 [1.260]
Note: When using an M-type mount, be sure to remove the plate bumper.
Dimensions of MRV28
mm [in.]
●Basic type MRV28× Stroke
63 [2.480]
44 [1.732]
4-M6×1 Depth9 [0.354]
113 [4.449]＋Stroke
35 [1.378]
37 [1.457]
45 [1.772]
56 [2.205]
11.7 [0.461]
70 [2.756]
72 [2.835]
2 [0.079]
63 [2.480]
Stroke
64 [2.520]
46 [1.811]
35 [1.378]
19.5 [0.768]
6.5 [0.256]
21.6
[0.850]
2-Rc1/8
Connection port (left chamber)
(with 1 plug)
4-φ7 [0.276]
6.5 φ11 [0.433] Counterbore, Depth6.5 [0.256]
[0.256]
2-Rc1/8
Connection port (right chamber)
(with 1 plug)
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
4-M2×0.4 Depth4 [0.157]
For mounting sensor magnet
80 [3.150]＋Stroke
14 [0.551]
23
[0.906]
126 [4.961]＋Stroke
14 [0.551]
23
[0.906]
●With shock absorber specification MRVZ28× Stroke
63 [2.480]
Stroke
64 [2.520]
45 [1.772]
56 [2.205]
11.7 [0.461]
70 [2.756]
72 [2.835]
2 [0.079]
63 [2.480]
46 [1.811]
46 [1.811]
35 [1.378]
19.5 [0.768]
4-φ7 [0.276]
6.5 [0.256] φ11 [0.433] Counterbore, Depth6.5 [0.256]
44 [1.732]
4-M6×1 Depth9 [0.354]
113 [4.449]＋Stroke
46 [1.811]
6.5 [0.256]
48 [1.890]
8 [0.315]
19 [0.748] MAX.
21.6
[0.850]
38.5
[1.516]
M10×1 19 [0.748] MAX.
2-Rc1/8
Connection port (left chamber)
(with 1 plug)
4-M2×0.4 Depth4 [0.157]
For mounting sensor magnet
14 [0.551]
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
23
[0.906]
80 [3.150]＋Stroke
126 [4.961]＋Stroke
14 [0.551]
23
[0.906]
8 [0.315]
110 [4.331]＋Stroke
8
[0.315]
4 [0.157]
7 [0.276]
●With sensor rail MRV□S28× Stroke
56 [2.205]
●M-type mount
76 [2.992]
88 [3.465]
84 [3.307]
±1
[±0.039]
The “With sensor rail” model is shipped with the sensor rail
and sensor magnet assembled on the piping port side.
4-M6×1
Depth9 [0.354]
1 [0.039]
9 [0.354]
38 [1.496]
Note: When using an M-type mount, be sure to remove the plate bumper.
6.2 [0.244]
2-Rc1/8
Connection port (right chamber)
(with 1 plug)
Dimensions of Shock Absorber mm [in.]
A
B
C
K
G
φJ
N
Nut
F
E
L
(Width across flats)
D
（H）
(Stroke)
Q
Model
A
B
C
G
H
J
K
L
N
Q
KSHJM8×5-14 (For MRVZ14)
37
[1.457]
5
[0.197]
32
[1.260]
2
1.2
[0.047] M8×7.5 [0.079]
10
[0.394]
11.5
[0.453]
2.5
[0.098]
3
[0.118]
7
[0.276]
1.3
[0.051]
1.5
[0.059]
60
[2.362]
10
[0.394]
50
[1.969]
2
[0.079]
3
[0.118]
12
[0.472]
13.9
[0.547]
3
[0.118]
5
[0.197]
8.5
[0.335]
1.3
[0.051]
1.5
[0.059]
KSHJM8×5-22 (For MRVZ22)
KSHJM10×10-28 (For MRVZ28)
D
E
M10×1
F
FLAT RODLESS
CYLINDERS
Clean System Cylinders
Symbol
Specifications
Item
Equivalent bore size
Model
CS-MRV14
CS-MRV22
CS-MRV28
mm [in.]
14 [0.551]
22 [0.866]
28 [1.102]
Media
Air Note1
Operation type
Double acting type
Operating pressure range
MPa [psi.]
Proof pressure
MPa [psi.]
Operating temperature range
0.2〜0.7 [29〜102]
1.05 [152]
°C [°F]
0〜60 [32〜140]
8〜500 [0.31〜19.7] Note2
Basic type
Operating speed range
mm/s [in./sec.] With shock absorber specification
8〜800 [0.31〜31.5] Note2
Basic type
Cushion
Rubber bumper
Shock absorber
With shock absorber specification
Lubrication
Not required Note3
Stroke adjusting range (with shock absorber specification only)
(per side in specification stroke)
mm [in.]
0〜−10 [0〜−0.394]
mm
Maximum stroke
0〜−6 [0〜−0.236]
1000
1500 Note4
[
]
＋2 ＋0.079
0 ＋0.079
mm [in.]
Stroke tolerance
0〜−15 [0〜−0.591]
Port size
M5×0.8
Rc1/8
Notes: 1. Use clean air that contains no moisture, dust, and oxidized oil.
2. For the relationship between the maximum load capacity and the impact speed, see the “Rubber bumper and shock absorber capacity graph” on p.1137.
3. This product can be used without lubrication. If lubrication is required, however, always consult us. Do not use turbine oil.
4. The maximum stroke of the cylinder with sensor rail is 1000mm.
Magnet Retaining Force
N [lbf.]
Model
Item
Retaining force
CS-MRV14
CS-MRV22
CS-MRV28
115 [25.9]
310 [69.7]
500 [112]
Specifications of Shock Absorber
Model
Item
Applicable shock absorber
Maximum absorption J [ft·lbf]
Absorbing stroke
CS-MRVZ14
CS-MRVZ22
CS-MRVZ28
KSHJM 8×5-14
KSHJM 8×5-22
KSHJM 10×10-28
1 [0.7]
mm [in.]
1.5 [1.1]
3 [2.2]
5 [0.197]
10 [0.394]
Maximum impact speed mm/s [in./sec.]
800 [31.5]
Maximum operating frequency cycle/min
60
Spring return force (compressed) N [lbf.]
6 [1.3]
8 [1.8]
Angle variation
1° or less
Operating temperature range °C [°F]
0〜60 [32〜140]
Note: The life of the shock absorber may vary from the Flat Rodless cylinder, depending on its operating condition.
Equivalent Bore Size and Stroke
Item
Model
CS-MRV(Z)14
Standard strokes
100, 150, 200, 250, 300, 350, 400, 450, 500
Maximum available stroke
1〜1000
CS-MRV(Z)22
200, 250, 300, 350, 400, 450, 500, 600, 700, 800
1〜1500
CS-MRV(Z)28
200, 250, 300, 350, 400, 450, 500, 600, 700, 800
1〜1500
Remark: Non-standard strokes are available at 1mm pitch intervals.
mm
Maximum available stroke with sensor rail
1〜1000
Mass
kg [oz.]
Additional mass
Zero stroke
for each
1mm [0.0394in.]
mass
stroke
Model
CS-MRV(Z)14
CS-MRV(Z)22
CS-MRV(Z)28
Basic type
0.22 1[7.76]
With shock absorber
0.27 1[9.52]
Basic type
0.50 [17.64]
With shock absorber
0.59 [20.81]
Basic type
0.86 [30.34]
With shock absorber
1.00 [35.27]
Shock absorber unit
One side
Both sides
―
―
0.000267
[0.00942]
0.011 [0.35] 0.021 [0.71]
0.000491
[0.01732]
0.011 [0.35] 0.021 [0.71]
0.000656
[0.02314]
0.022 [0.78] 0.044 [1.55]
―
―
Sensor
magnet
Sensor switch
Zero stroke Additional mass
for each
Lead wire 1m
mass of
Lead wire
1 mm [0.0394in.]
[39in.]
sensor rail
sensor rail
or ZE175G 3m [118in.]
0.007
[0.25]
0.004
[0.14]
―
―
0.008
[0.28]
0.035
[1.23]
0.015
[0.53]
0.0001
[0.0035]
0.010
[0.35]
Theoretical Thrust
N [lbf.]
Thrust efficiency
Air pressure MPa
0.2 [29]
0.3 [44]
0.4 [58]
CS-MRV14
157 [0.243]
131 1[7.0]
147 [10.6]
CS-MRV22
402 [0.623]
180 [18.0]
121 [27.2]
CS-MRV28
628 [0.973]
126 [28.3]
188 [42.3]
0.5 [73]
0.6 [87]
0.7 [102]
163 [14.2]
179 [17.8]
194 [21.1]
110 [24.7]
161 [36.2]
201 [45.2]
241 [54.2]
281 [63.2]
251 [56.4]
314 [70.6]
377 [84.7]
440 [98.9]
The figures in the table are theoretical values. There may be some difference from these for practical
applications.
For actual selection, see the thrust efficiency at right.
Note that thrust efficiency tends to be lower at low pressure.
100
Thrust efficiency (%)
Model
Pressure area
mm2 [in.2]
50
0.1
0.2
0.3
0.4
0.5
0.6
0.7
Air pressure (MPa)
1MPa = 145psi.
Air Flow Rate and Air Consumption
While the Clean System Flat Rodless cylinder’s air flow rate and air consumption can be found through the following calculations, the quick reference table below
provides the answers more conveniently.
Q1 : Required air flow rate for cylinder
R/min (ANR)
Q2 : Air consumption of cylinder
R/min (ANR)
60
P＋0.101
πD2
–6
×L×
×
×10
Air flow rate: Q 1＝
D : Cylinder equivalent bore size
mm
4
t
0.101
L : Cylinder stroke
mm
t : Time required for cylinder to travel 1 stroke
s
2
P＋0.101
πD
n : Number of cylinder reciprocations per minute times/min
×L×2×n×
×10 –6
Air consumption: Q 2＝
4
0.101
P : Pressure
MPa
Air flow rate: Q1' ＝ πD'
4
2
× L' ×
Q 1' : Required air flow rate for cylinder
ft.3/min. (ANR)
Q 2' : Air consumption of cylinder
ft.3/min. (ANR)
D' : Cylinder equivalent bore size
in.
L' : Cylinder stroke
in.
t : Time required for cylinder to travel 1 stroke
sec.
n : Number of cylinder reciprocations per minute times/min
P' : Pressure
psi.
60
1
P' ＋14.70
×
×
t
1728
14.70
Air consumption: Q 2' ＝ πD' × L' × 2 × n ×
4
2
1
P' ＋14.70
×
1728
14.70
Air consumption for each 1 mm [0.0394in.] stroke
Equivalent bore
size mm [in.]
cm3 [ft.3]/Reciprocation (ANR)
Air pressure MPa [psi.]
0.2 [29]
0.3 [44]
0.4 [58]
0.5 [73]
0.6 [87]
0.7 [102]
14 [0.551]
0.936 [3.311×10–5] 1.246 [4.401×10–5] 1.558 [5.501×10–5] 1.868 [6.601×10–5] 2.180 [7.701×10–5] 2.490 [8.791×10–5]
22 [0.866]
2.396 [8.461×10–5] 3.192 [1.127×10–4] 3.988 [1.408×10–4] 4.784 [1.689×10–4] 5.580 [1.971×10–4] 6.378 [2.252×10–4]
28 [1.102]
3.744 [1.322×10–4] 4.988 [1.761×10–4] 6.232 [2.201×10–4] 7.476 [2.640×10–4] 8.720 [3.079×10–4] 9.966 [3.519×10–4]
The figures in the table are for computing the air flow rate and air consumption when a Clean System Flat Rodless cylinder makes
1 reciprocation with stroke of 1mm [0.0394in.]. The air flow rate and air consumption actually required are found by the following
calculations.
●Finding the air flow rate (for selecting F.R.L., valves, etc.)
Example:
When operating a Clean System Flat Rodless cylinder of an equivalent bore size of 22mm [0.866in.] at a speed of 300mm/s [11.8in./sec.] under air
pressure of 0.5MPa [73psi.]
1
× 300× 10−3＝0.71R/s [0.025ft.3/sec.] (ANR)
4.784 ×
2
1
× 300 × 60 × 10−3＝43.05R/min [1.52ft.3/min.] (ANR))
(At this time, the flow rate per minute is 4.784 ×
2
●Finding the air consumption
Example 1. When operating a Clean System Flat Rodless cylinder of an equivalent bore size of 22mm [0.866in.] and a stroke of 100mm [3.94in.] under air
pressure of 0.5MPa [73psi.], for 1 reciprocation
4.784 × 100 × 10−3＝0.478R[0.0169ft.3]/Reciprocation (ANR)
Example 2. When operating a Clean System Flat Rodless cylinder of an equivalent bore size of 22mm [0.866in.] and a stroke of 100mm [3.94in.] under air
pressure of 0.5MPa [73psi.], for 10 reciprocations per minute
4.784 × 100 × 10 × 10−3＝4.78R/min [0.169ft.3/min.] (ANR)
Note: To find the actual air consumption required when using the Clean System Flat Rodless cylinder, add the air consumption of the piping to the air consumption
obtained from the above calculation.
Order Codes
●Basic type
14×200
CS-MRV
-
Equivalent bore size
×
Stroke
Clean System
Flat Rodless cylinder
with rubber bumper
Number of sensor switches
1: With 1 sensor switch
2: With 2 sensor switches
3: With 3 sensor switches
Sensor rail
Blank : No sensor rail
S : With sensor rail
(Including sensor magnet)
Lead wire length
A : 1000mm [39in.]
B : 3000mm [118in.]
G : 300mm [11.8in.] with M8 connector, only for ZE175
Sensor switch
Blank : No sensor switch
ZE135: 2-lead wire solid state type with indicator lamp DC10〜28V
ZE155: 3-lead wire solid state type NPN output with indicator lamp DC4.5〜28V
ZE101: 2-lead wire reed switch type without indicator lamp DC5〜28V, AC85〜115V
ZE102: 2-lead wire reed switch type with indicator lamp DC10〜28V, AC85〜115V
ZE175: 3-lead wire solid state type PNP output with indicator lamp DC4.5〜28V
Remark: The packaging is the same as for standard products with use a single package.
●With shock absorber specification
CS-MRVZ
14×200
Clean System
Flat Rodless cylinder
with shock absorber
specification
Equivalent bore size
×
Stroke
-
Number of sensor switches
1: With 1 sensor switch
2: With 2 sensor switches
3: With 3 sensor switches
Sensor rail
Blank : No sensor rail
S : With sensor rail
(Including sensor magnet)
Number of shock absorbers
K1 : With 1 shock absorber
K2 : With 2 shock absorbers
Lead wire length
A : 1000mm [39in.]
B : 3000mm [118in.]
G : 300mm [11.8in.] with M8 connector, only for ZE175
Sensor switch
Blank : No sensor switch
ZE135: 2-lead wire solid state type with indicator lamp DC10〜28V
ZE155: 3-lead wire solid state type NPN output with indicator lamp DC4.5〜28V
ZE101: 2-lead wire reed switch type without indicator lamp DC5〜28V, AC85〜115V
ZE102: 2-lead wire reed switch type with indicator lamp DC10〜28V, AC85〜115V
ZE175: 3-lead wire solid state type PNP output with indicator lamp DC4.5〜28V
Remark: The packaging is the same as for standard products with use a single package.
Additional Parts
●Magnet set
●Sensor rail
MG-MRV
S-MRV 14×100
Equivalent bore size×stroke
(Sensor rail 1pc., bolt 2pcs.)
Equivalent bore size
14 : For CS-MRV14
22 : For CS-MRV22
28 : For CS-MRV28
(Sensor magnet 1pc., magnet holder 1pc., bolt 2pcs.)
●Shock absorber
KSHJM
Size
18×5-14 : For CS-MRVZ14
18×5-22 : For CS-MRVZ22
10×10-28 : For CS-MRVZ28
Remark: Additional parts are the same ones for standard specification.
About Evaluations of Clean Level
No standard, including JIS, has officially stipulated a method for evaluating the clean level of the equipment for the cleanroom
specifications. KOGANEI has established its own measurement method for evaluating the clean level. The particle generation level of
the Clean System Flat Rodless Cylinder is measured using the method below.
Clean room class 7 equivalent
1.Measuring Sample Products
q CS-MRVZ14 × 500 (no load)
w CS-MRVZ22 × 500 (1 kg [2.2 lb.] load)
e CS-MRVZ28 × 500 (1.5 kg [3.3 lb.] load)
(FED−STD Class 10000 equivalent)
Filter
2.Measuring Conditions
2-1 Testing circuit
Measuring area
: Center of the cylinder, lower section
Measuring position : 30 mm [1.18 in] from the slider
2-2 Operating condition of the sample product
Operating frequency : 10 times/minute*
Operating Speed
: CS-MRVZ14 500 mm/s [19.7 in/sec]
: CS-MRVZ22
250 mm/s [7.87 in/sec]
: CS-MRVZ28
Applied pressure
: 0.5 MPa [73 psi]
Mounting direction : Horizontal
Downflow
Clean bench
Class 3 equivalent
}
30mm
Caution : The particle generation level is an average of 10
repetitions of the test taken 10 times/minute.
The particle generation level is also the actual
measured value based on the above conditions.
In your applications, we would like to ask for your
evaluations based upon your operating conditions.
Particle counter
Exhaust
Exhaust
3.Particle counter
Maker/Model ............................ Rion Co., Ltd. /KM-20
Suction flow rate ...................... 28.3R/min [1 ft.3/min]
Possible particle diameter ........ 0.1 µ m, 0.2 µ m, 0.3 µ m, 0.5 µ m, 0.7 µ m, 1.0 µ m
4.Measuring methodology
4-1 Verification of the particle generation level in the measurement system
Before measuring, measure the background for 9 minutes and verify that the particle generation of the measurement system is at
zero.
4-2 Measurement
4-3 Re-verification
Repeat the measurement in step 4-1 and verify that the particle generation of the measurement system is at zero.
5.Measurement Results (average particle generation level of over 0.1 µ m particles)
80
60
40
20
Class 4
equivalent
0
100
200
300
400
Distance traveled (km)
500
Number of generated particles
(per 10 operations)
Number of generated particles
(per 10 operations)
Class 5
equivalent
0
CS-MRVZ22
(particles/1 cf)
100
Class 5
equivalent
80
60
40
20
Class 4
equivalent
0
0
100
200
300
CS-MRVZ28
(particles/1 cf)
100
400
Distance traveled (km)
500
Number of generated particles
(per 10 operations)
CS-MRVZ14
(particles/1 cf)
100
Class 5
equivalent
80
60
40
20
Class 4
equivalent
0
0
100
200
300
400
500
Distance traveled (km)
Caution : The number of generated particles in the graphs above are based on measured values under conditions established at
KOGANEI and are not guaranteed values.
Clean System Dimensions of CS-MRV14
mm [in.]
●Basic type CS-MRV14× Stroke
41 [1.614]
24.6 [0.969]
34 [1.339]
44 [1.732]
30 [1.181]
4-M4×0.7 Depth6 [0.236]
72 [2.835]＋Stroke
5 [0.197]
2-M5×0.8
Connection port (left chamber)
(with 1 plug)
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
4-φ4.8 [0.189]
5
[0.197] φ8 [0.315] Counterbore
Depth4.5 [0.177]
11.6 [0.457]
23 [0.906]
25 [0.984]
8.5 [0.335]
47 [1.850]
2 [0.079]
41 [1.614]
Stroke
44 [1.732]
30 [1.181]
23 [0.906]
13.5 [0.531]
2-M5×0.8
Connection port (right chamber)
(with 1 plug)
4-M2×0.4 Depth4 [0.157]
For mounting sensor magnet
52 [2.047]＋Stroke
82 [3.228]＋Stroke
9.5 [0.374]
15
[0.591]
9.5 [0.374]
15
[0.591]
●With shock absorber specification CS-MRVZ14× Stroke
31.5 [1.240]
24.6 [0.969]
34 [1.339]
44 [1.732]
30 [1.181]
41 [1.614]
Stroke
44 [1.732]
30 [1.181]
4-M4×0.7 Depth6 [0.236]
72 [2.835]＋Stroke
5 [0.197]
4 [0.157]
25.5 [1.004]
M8×0.75 13 [0.512] MAX.
2-M5×0.8
Connection port (left chamber)
(with 1 plug)
9.5 [0.374]
15
[0.591]
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
11.6 [0.457]
2 [0.079] 31 [1.220]
33 [1.299]
41 [1.614]
8.5 [0.335]
47 [1.850]
23 [0.906]
13.5 [0.531]
4-M2×0.4 Depth4 [0.157]
For mounting sensor magnet
52 [2.047]＋Stroke
82 [3.228]＋Stroke
4-φ4.8 [0.189]
5
φ8 [0.315] Counterbore
[0.197]
Depth4.5 [0.177]
13 [0.512] MAX.
2-M5×0.8
9.5 [0.374] Connection port (right chamber)
15
[0.591]
2.5 [0.098]
77 [3.031]＋Stroke
2.5
[0.098]
1 [0.039] 7 [0.276]
●With sensor rail CS-MRV□S14× Stroke
The “With sensor rail” model is shipped with the sensor rail
and sensor magnet assembled on the piping port side.
6.7 [0.264]
(with 1 plug)
Clean System Dimensions of CS-MRV22
mm [in.]
●Basic type CS-MRV22× Stroke
46 [1.811]
9.7 [0.382]
58 [2.283]
61 [2.401]
2 [0.079] 29 [1.142]
4-M5×0.8Depth9 [0.354]
40 [1.575]
6 [0.236]
31 [1.220]
52 [2.047]
Stroke
58 [2.283]
38 [1.496]
52 [2.047]
37 [1.457]
29 [1.142]
16.5 [0.650]
4-φ5.8 [0.228]
6
φ9.5 [0.374] Counterbore, Depth5.5 [0.217]
[0.236]
2-M5×0.8
Connection port (right chamber)
(with 1 plug)
92 [3.622]＋Stroke
17.6
[0.693]
2-M5×0.8
Connection port (left chamber)
(with 1 plug)
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
4-M2×0.4 Depth4 [0.157]
For mounting sensor magnet
68 [2.677]＋Stroke
104 [4.094]＋Stroke
11.5 [0.453]
18
[0.709]
11.5 [0.453]
18
[0.709]
●With shock absorber specification CS-MRVZ22× Stroke
38.5 [1.516]
38 [1.496]
40 [1.575]
40 [1.575]
6 [0.236]
9 [0.354]MAX.
2-M5×0.8
Connection port (left chamber)
(with 1 plug)
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
38 [1.496]
4-M5×0.8 Depth9 [0.354]
92 [3.622]＋Stroke
5 [0.197]
4-φ5.8 [0.228]
6
φ9.5 [0.374] Counterbore, Depth5.5 [0.217]
[0.236]
9 [0.354] MAX.
17.6
[0.693]
32
[1.260]
M8×0.75
46 [1.811]
61 [2.401]
2 [0.079]
52 [2.047]
Stroke
58 [2.283]
9.7 [0.382]
58 [2.283]
16.5 [0.650]
37 [1.457]
52 [2.047]
29 [1.142]
11.5 [0.453]
18
[0.709]
2-M5×0.8
Connection port (right chamber)
4-M2×0.4 Depth4 [0.157]
11.5 [0.453] (with 1 plug)
For mounting sensor magnet
68 [2.677]＋Stroke
18
104 [4.094]＋Stroke
[0.709]
5 [0.197]
94 [3.701]＋Stroke
5
[0.197]
The “With sensor rail” model is shipped with the sensor rail
and sensor magnet assembled on the piping port side.
2.5 [0.098] 7 [0.276]
●With sensor rail CS-MRV□S22× Stroke
6.2 [0.244]
Clean System Dimensions of CS-MRV28
mm [in.]
●Basic type CS-MRV28× Stroke
63 [2.480]
44 [1.732]
4-M6×1 Depth9 [0.354]
113 [4.449]＋Stroke
35 [1.378]
37 [1.457]
45 [1.772]
56 [2.205]
11.7 [0.461]
70 [2.756]
72 [2.835]
2 [0.079]
63 [2.480]
Stroke
64 [2.520]
46 [1.811]
35 [1.378]
19.5 [0.768]
6.5 [0.256]
21.6
[0.850]
2-Rc1/8
Connection port (left chamber)
(with 1 plug)
4-φ7 [0.276]
6.5 φ11 [0.433] Counterbore, Depth6.5 [0.256]
[0.256]
2-Rc1/8
Connection port (right chamber)
(with 1 plug)
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
4-M2×0.4 Depth4 [0.157]
For mounting sensor magnet
80 [3.150]＋Stroke
14 [0.551]
23
[0.906]
126 [4.961]＋Stroke
14 [0.551]
23
[0.906]
●With shock absorber specification CS-MRVZ28× Stroke
63 [2.480]
Stroke
64 [2.520]
45 [1.772]
56 [2.205]
11.7 [0.461]
70 [2.756]
72 [2.835]
2 [0.079]
63 [2.480]
46 [1.811]
46 [1.811]
35 [1.378]
19.5 [0.768]
4-φ7 [0.276]
6.5 [0.256] φ11 [0.433] Counterbore, Depth6.5 [0.256]
44 [1.732]
4-M6×1 Depth9 [0.354]
113 [4.449]＋Stroke
46 [1.811]
6.5 [0.256]
48 [1.890]
8 [0.315]
19 [0.748] MAX.
2-Rc1/8
Connection port (left chamber)
(with 1 plug)
4-M2×0.4 Depth5 [0.197]
For mounting sensor rail
21.6
[0.850]
38.5
[1.516]
M10×1 19 [0.748] MAX.
14 [0.551]
23
[0.906]
4-M2×0.4 Depth4 [0.157]
For mounting sensor magnet
80 [3.150]＋Stroke
126 [4.961]＋Stroke
14 [0.551]
23
[0.906]
8 [0.315]
110 [4.331]＋Stroke
The “With sensor rail” model is shipped with the sensor rail
and sensor magnet assembled on the piping port side.
8
[0.315]
4 [0.157]
7 [0.276]
●With sensor rail CS-MRV□S28× Stroke
6.2 [0.244]
2-Rc1/8
Connection port (right chamber)
(with 1 plug)
Dimensions of Clean System Shock Absorber mm [in.]
A
B
C
K
G
φJ
N
Nut
F
E
L
(Width across flats)
D
（H）
(Stroke)
Q
Model
A
B
C
G
H
J
K
L
N
Q
KSHJM8×5-14 (For CS-MRVZ14)
37
[1.457]
5
[0.197]
32
[1.260]
2
1.2
[0.047] M8×7.5 [0.079]
10
[0.394]
11.5
[0.453]
2.5
[0.098]
3
[0.118]
7
[0.276]
1.3
[0.051]
1.5
[0.059]
60
[2.362]
10
[0.394]
50
[1.969]
2
[0.079]
3
[0.118]
12
[0.472]
13.9
[0.547]
3
[0.118]
5
[0.197]
8.5
[0.335]
1.3
[0.051]
1.5
[0.059]
KSHJM8×5-22 (For CS-MRVZ22)
KSHJM10×10-28 (For CS-MRVZ28)
D
E
M10×1
F
SENSOR SWITCHES
Solid State Type, Reed Switch Type
Symbol
Order Codes
- MRV
Lead wire length
A：1000mm [39in.]
B：3000mm [118in.]
G：300mm [11.8in.] with M8 connector, only for ZE175
Sensor switch
ZE135 : Solid state type with indicator lamp
DC10〜28V Horizontal lead wire
ZE101 : Reed switch type without indicator lamp DC5〜28V Horizontal lead wire
AC85〜115V
ZE175 : 3-lead wire solid state type PNP output with indicator lamp DC4.5〜28V
Horizontal lead wire
●For sensor switch details, see p.1544.
Moving Sensor Switch
Loosening the mounting screw allows the sensor switch to be
moved along the switch mounting groove on the barrel.
● Tighten the mounting screw with tightening torque of
0.1N・m〜0.2N・m [0.9in·lbf〜1.8in·lbf].
ZE155 : 3-lead wire solid state type NPN output with indicator lamp DC4.5〜28V Horizontal lead wire
ZE102 : Reed switch type with indicator lamp
DC10〜28V Horizontal lead wire
AC85〜115V
Sensor Switch Operating Range, Response Differential, and Maximum Sensing Location
● Operating range :R
The distance the piston travels in one direction, while the
switch is in the ON position.
● Response differential : C
The distance between the point where the piston turns the
switch ON and the point where the switch is turned OFF as
the piston travels in the opposite direction.
●Reed switch type
(CS-)MRV14
(CS-)MRV22
(CS-)MRV28
Operating range：r
7〜8.6
[0.276〜0.339]
7.5〜8.6
[0.295〜0.339]
6.8〜8.5
[0.268〜0.335]
1.2 [0.047]
or less
1.2 [0.047]
or less
1 [0.039]
or less
：C
Maximum sensing location
Magnet
mm [in.]
Model
Response
differential
Sensor switch
Maximum sensing
location※
R
Operating
C
range
Response
differential ON
OFF
10 [0.394]
OFF
Remark: The values in the above table are reference values.
※ : It is a value measured from the other end side of the lead wire.
R
Operating
range
●Solid state type
mm [in.]
Model
(CS-)MRV14
(CS-)MRV22
(CS-)MRV28
Operating range：r
2.6〜3.5
[0.102〜0.138]
2.8〜3.7
[0.110〜0.146]
2.6〜4.0
[0.102〜0.157]
0.9 [0.035]
or less
1.1 [0.043]
or less
1.2 [0.047]
or less
Response
differential
：C
Maximum sensing
location※
ON
C
Response
differential
6 [0.236]
Remark: The values in the above table are reference values.
※ : This is the length measured from the switch’s opposite end side to the
lead wire.
Mounting the Sensor Rail and Sensor Magnet
The Flat Rodless cylinder has tapped holes on the cylinder’s
both sides for mounting the sensor rail and sensor magnet.
When securing the bolts, tighten to a suitable torque within the
allowed range limits.
Bolt
Maximum tightening torque N･m [in・lbf]
M2×0.4
0.2 [1.8]
Sensor magnet
Bolt
Plate
Bolt
Magnet holder
Sensor rail
Bolt
Mounting Location of End of Stroke Detection Sensor Switch
When the sensor switch is mounted in the locations shown below, the magnet comes to the maximum sensing location of the sensor
switch at the end of the stroke.
A
B
C
E
E
D
G
H
A
B
F
□ , ZE102□
□)
●Reed switch type (ZE101□
mm [in.]
Model
A
B
C
D
(CS-)MRV14
41 [1.614]
15 [0.591]
13.5 [0.531]
16 [0.630]
(CS-)MRV22
52 [2.047]
18 [0.709]
21.5 [0.846]
24 [0.945]
(CS-)MRV28
63 [2.480]
23 [0.906]
27.5 [1.083]
30 [1.181]
E
22.5 [0.886]
H
F
G
6.7 [0.264]
1 [0.039]
6.2 [0.244]
2.5 [0.098]
7 [0.276]
4 [0.157]
□ , ZE155□
□ , ZE175□
□)
●Solid state type (ZE135□
mm [in.]
Model
A
B
C
D
(CS-)MRV14
41 [1.614]
15 [0.591]
16.5 [0.650]
20 [0.787]
(CS-)MRV22
52 [2.047]
18 [0.709]
24.5 [0.965]
28 [1.102]
(CS-)MRV28
63 [2.480]
23 [0.906]
30.5 [1.201]
34 [1.339]
E
15.5 [0.610]
H
F
G
6.7 [0.264]
1 [0.039]
6.2 [0.244]
2.5 [0.098]
7 [0.276]
4 [0.157]
When Mounting the Cylinders with Sensor Switches in Close Proximity
When mounting Flat Rodless cylinders in close proximity, use them at the values shown in the table below, or larger.
A
●Reed switch type
B
D
C
E
mm [in.]
●Solid state type
mm [in.]
Model
A
B
C
D
E
Model
A
B
C
D
E
(CS-)MRV14
0
59.4 [2.339]
0
53.2 [2.094]
0
(CS-)MRV14
3 [0.118]
61.4 [2.417]
2 [0.079]
55.2 [2.173]
2 [0.079]
(CS-)MRV22
0
73.4 [2.890]
0
67.2 [2.646]
0
(CS-)MRV22
0
76.4 [3.008]
3 [0.118]
69.2 [2.724]
2 [0.079]
(CS-)MRV28
0
84.4 [3.323]
0
78.2 [3.079]
0
(CS-)MRV28
0
87.4 [3.441]
3 [0.118]
84.2 [3.315]
6 [0.236]
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